IN-PROCESS MEASUREMENT FOR PRECISION MANUFACTURING OF OPTICAL COMPONENTS

Manufacturing of optical components places the highest demands on the manufacturing processes as well as on the metrology in order to achieve typical form deviations <100 nm. The paper presents the 1D distance measurement system used and the challenges in determining its position in the machine tool coordinate system. Using a demonstrator, the achievable measurement uncertainty is estimated and the use of the measurement system as on-machine metrology system in closed-loop machining is discussed.