Published May 30, 2022 | Version v1
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StretchBio_D.3.1_Guidelines for optimized semiconductor fabrication route

Description

This deliverable presents the results of the cleanroom fabrication work performed in the initial phase of the StretchBio project. Pillars with various pitches, diameters and heights have been fabricated. These results show that the required nanostructures can be fabricated with the desired dimensions and forms the basis of delivery of the sample to consortium partners going forward in the project.

Files

D3.1_StretchBio_Deliverable _20220530 _final_removed ZENODO.pdf

Files (1.5 MB)

Additional details

Funding

StretchBio – Continuous two-dimensional Stretch monitoring of fresh tissue Biopsies 964808
European Commission