Gene_id	24-1	24-2	24-3	40-1	40-2	40-3	60-1	60-2	60-3	96-1	96-2	96-3	Control-1	Control-2	Control-3
ENSRNA049437471	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049437473	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049437518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049437607	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049437614	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049437658	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049437881	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049437912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049437967	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438083	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438276	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438321	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438363	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438404	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438418	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438546	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438664	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438710	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438763	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438777	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438795	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438847	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438855	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438872	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438884	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438894	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438956	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049438965	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439064	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439167	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439213	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439227	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439244	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439367	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439420	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439609	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439691	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439730	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439764	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439777	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439822	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049439996	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440072	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440088	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440167	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440219	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440232	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440259	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440276	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440360	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440434	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440447	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440535	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440572	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440629	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440693	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440749	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440843	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440873	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440883	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049440969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441024	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441066	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441180	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441214	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441297	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441317	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441369	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441594	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441606	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441695	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441729	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441754	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441770	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441819	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049441950	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442047	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442071	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442135	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442311	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442349	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442419	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442454	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442482	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442590	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442624	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442640	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442661	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442682	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442711	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442725	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442735	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442750	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442753	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442759	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442767	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442774	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442786	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442798	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442804	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442814	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442822	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442838	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442848	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442855	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442884	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442894	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442905	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442941	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442959	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442979	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049442989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443039	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443050	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443058	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443081	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443083	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443089	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443220	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443253	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443287	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443307	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443319	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443354	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443370	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443391	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443450	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443461	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443507	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443697	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443707	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443772	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443806	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443819	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443842	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443919	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443931	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049443992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444016	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444035	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444055	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444109	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444159	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444172	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444185	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444291	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444331	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444341	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444372	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444450	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444459	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444555	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444619	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444634	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444648	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049444658	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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ENSRNA049450397	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450431	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450472	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450511	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450532	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450586	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450597	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450621	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450697	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450745	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450759	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450782	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450785	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450801	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450817	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450842	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450899	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450914	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450950	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049450987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451031	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451091	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451266	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451307	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451338	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451362	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451374	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451382	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451399	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451533	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451572	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451616	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451664	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451736	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451776	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451822	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451852	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451859	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049451885	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049452030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049452066	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049452118	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049453565	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049453582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049453693	0	0	0	0.460815402	0.486860982	0	0.215876175	0.222762111	0	0	0	0	0	0	0.85436822
ENSRNA049453717	0	0	0	0	0.200153959	0	0.177498188	1.282119706	0	0	0	0	0	0	0
ENSRNA049453784	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049453826	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049453841	0	0	0	0.666022261	0.422199758	0.523410379	0	0	0.395166164	0	0	0	0	0.117085052	0.246965814
ENSRNA049453982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454111	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454125	7.644130794	7.961459114	10.23092889	5.500054802	4.648737118	4.68255307	10.6498913	2.658773585	4.169782031	1.216444225	4.448997311	0.814213576	2.303007488	1.289194555	1.699549685
ENSRNA049454203	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454254	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454282	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454293	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454366	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454404	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454571	0	0	0	0.107912468	0	0.636042992	0	0	0	0	0	0	0	0	0
ENSRNA049454705	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454750	0	0	0	0	0	0	0	0	0	0	0	0	0	0.49956289	0
ENSRNA049454767	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.173690243
ENSRNA049454868	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454877	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454895	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454938	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049454997	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455185	0	0	0.135925198	0	0.720554253	0	0	0	0	0	0	0	0.979107184	0	0
ENSRNA049455202	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455219	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455242	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455261	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455282	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455334	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455425	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455527	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455608	0.017121145	0.021564145	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455651	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455853	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049455955	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049456187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049456278	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049456300	5.286210449	2.295862628	1.812335974	1.136677992	5.043879772	6.699652854	1.277986956	1.538543648	2.023250759	0	0.919459444	0	0	0	0.210744161
ENSRNA049456320	1.822831189	1.147931314	2.718503961	5.683389962	4.803695021	3.349826427	2.342976086	0.879167799	3.147278959	0	0	0	0.407961327	0.199825156	0.421488322
ENSRNA049456343	0	0	0	0.635410058	0.447549226	0	0	0	0	0	0	0	0	0	0.196345492
ENSRNA049456385	0	0	0	0	0	0	0	0	0.351258812	0	0	0	0	0	0
ENSRNA049456396	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049456416	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049456552	0	0	0	0	0	0	0	0	0	0	0.143665538	0	0	0	0
ENSRNA049456636	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049456661	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049456692	0	0.400441156	0	0	1.256780674	1.363301453	0.371507836	0.383358052	0.19605143	0	0.801854167	0.528292064	0.355780227	0	0
ENSRNA049456702	0.569634747	0	0.35397187	0	0.750577347	0.174470126	0.166404552	0.343424921	0	0	0	0.473261641	0	0	0.658575503
ENSRNA049456719	2.014708157	0.181252313	0.35769789	0	1.137717242	0.176306654	0.168156178	0.867599801	0	0	0.544416776	0.797072238	0	0	1.164638784
ENSRNA049456746	0.712043433	0	1.592873415	1.776059363	0.375288674	2.617051896	1.331236412	1.545412146	2.634441093	0.589215171	0	0	0	0.624453612	0
ENSRNA049456769	0	0	0	0.341003398	1.981524196	1.004947928	1.597483695	0.659375849	1.18022961	2.639683968	1.034391875	1.817324702	0.458956492	0.149868867	0.790290603
ENSRNA049456789	0.996860807	0	0.70794374	1.420847491	3.940531072	1.570231138	4.492922892	1.888837067	2.107552874	0	0	0.15775388	1.115519252	0.468340209	0
ENSRNA049456826	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457014	0	0	0.25171333	0	0	0	0	0	0	0	0	0	0.113322591	0	0
ENSRNA049457064	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457072	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457201	1.367123392	0.645711364	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457226	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457253	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457319	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457334	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457359	1.536093699	1.160829419	2.099967947	0	0.60720864	0.564577488	2.33340315	2.222615221	1.326100685	1.482968521	2.13076978	1.020968934	0.687575269	0.336783971	0.355186788
ENSRNA049457405	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457438	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457460	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457503	0.661511319	0	0.274042738	0	0.87163821	0	0	0.265877358	0.271942306	0.608222112	0.556124664	0.244264073	0.493501605	0	0
ENSRNA049457531	0	0	0	0	0.129596089	0	0.114926885	0	0.363894021	0.406939975	0	0.435809281	0	0.107819329	0
ENSRNA049457554	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457570	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457643	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457729	0	0	0	0	0.960739004	0.669965285	0	0.879167799	0.67441692	0	0	0	0	0	0
ENSRNA049457749	0	0.120412376	0	0	0.629855116	1.522648376	0.111712146	2.190234463	1.179050559	0	0	0	0.213965731	0.104803403	0.110530154
ENSRNA049457777	0	0	0.207203046	0.207928901	0	0.204257709	0.194815085	1.206175334	0.822459658	0	0	0	0	0.548300733	0.578261417
ENSRNA049457806	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049457944	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458208	4.045569221	2.811260361	2.42723568	2.609719881	1.838148605	3.930918766	2.119111024	2.186705622	2.580676989	0.769587163	2.462837797	1.236275307	3.27826066	1.223419322	1.290270373
ENSRNA049458293	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458369	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458390	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458426	2.869271317	2.12579873	2.936655513	3.578430717	4.892652337	5.996602863	10.05823067	3.866710226	5.203834258	0.232776364	0	0.560902686	0	0.74009317	0.390266965
ENSRNA049458448	9.881188873	10.05860607	11.10280083	10.46644092	19.61905145	23.87995077	22.30150505	20.72790416	21.03379502	2.426866449	8.875969883	2.5490528	20.90296896	14.0965766	9.07660495
ENSRNA049458467	11.78554648	12.66682829	11.71768949	14.69842232	14.07979575	12.51371941	16.52569339	12.69487985	13.17826165	6.935130294	5.350302801	5.222197419	9.847342365	11.54162539	10.17385604
ENSRNA049458495	1.870800431	1.631270815	2.325036282	3.230558505	8.532879314	8.462719395	6.053622422	3.643919166	4.43695342	0	0.362944517	0.318828895	0.161037366	0.315513404	0.665507877
ENSRNA049458540	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458582	17.38440857	29.97376209	20.7663497	25.04901502	11.34205769	14.26777923	17.55259862	10.98959748	11.240282	4.189974552	9.152026876	5.982961981	12.27661399	12.95163048	8.39073974
ENSRNA049458611	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458634	12.82733059	17.64412946	13.63447203	15.78719434	10.23009125	9.305073409	13.01653381	6.919376193	14.15442918	2.560540004	6.597972864	4.86115661	12.46548498	6.105768655	12.0982759
ENSRNA049458655	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458671	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458691	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458706	9.740754168	12.48375304	13.16775356	19.60769537	13.96073866	10.67757174	16.37420787	11.53907736	18.12495472	6.834895989	6.033952603	4.164702442	13.38623103	11.80217328	13.03979496
ENSRNA049458722	12.47500095	17.64944395	11.68107171	19.39456825	10.8083138	10.88693589	17.97169157	12.98146203	15.80664656	6.363523851	6.24945091	4.543311754	10.70898482	7.680779433	7.902906034
ENSRNA049458742	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458758	6.91073363	10.97472795	7.094996602	13.3028798	21.5770367	17.66941412	19.66133778	20.28848766	22.04824545	4.143930876	3.788981226	3.494855196	16.1391294	10.70491907	9.552963338
ENSRNA049458782	7.457036684	4.269166044	8.705952768	12.11830256	19.80035448	10.10484831	12.01413357	16.07569219	12.40146815	1.090778499	5.984085226	0.750960621	10.74691511	10.28026112	7.706966215
ENSRNA049458795	3.531735429	3.587285357	3.539718699	8.098830696	7.355658002	4.326859135	9.851149451	7.967458175	8.289707972	0.314248091	1.58032092	0.631015521	6.756859471	8.242787684	2.23915671
ENSRNA049458812	7.467480713	6.221980652	9.994499857	13.61148016	15.28907134	9.28943463	12.35029411	8.034411605	12.75158042	0.316888832	3.766693102	1.527163615	8.999146909	12.84590288	9.297536511
ENSRNA049458826	21.25359895	15.48260302	28.41293531	36.53607833	47.07822957	30.54253507	28.45937339	35.18518186	34.42926712	2.059777406	9.416732754	1.39989998	23.5263412	17.25381074	25.36899248
ENSRNA049458846	3.486623416	4.160287984	2.052561716	7.209132234	7.495698607	4.496411312	7.612170626	6.416744839	6.223646072	1.012342845	1.619853048	0.711480588	4.928391864	5.330906007	2.121585513
ENSRNA049458857	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049458874	4.774081687	5.284128271	4.764573741	8.479978674	9.435829506	7.444058727	9.889184777	6.192550963	10.16977895	0.598567793	1.915540509	1.041676416	7.285023688	6.97802132	3.846917223
ENSRNA049458957	24.24177561	27.51484851	26.97484601	33.57301493	37.51339153	48.86602468	69.9928423	49.6231309	52.49327572	1.943802627	2.310497315	0.624510207	21.92266407	14.21436677	12.87277478
ENSRNA049458986	13.00434446	10.70935921	13.05379189	16.84224099	18.67289985	25.1236982	31.9496739	22.31424367	26.11309415	0.459875256	1.471695757	1.477499758	11.56719615	7.127909528	6.939137006
ENSRNA049459026	0	0	0.39513139	0.793031157	0.418926891	0.584272051	1.300277426	1.533432207	0	0	0	0.176097355	0	0	0.183788512
ENSRNA049459041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459076	26.08694636	28.8154187	18.37764157	29.22886266	27.20459936	44.60738252	73.35384313	47.6028993	46.10809554	0.384793581	1.055501913	0.92720648	20.91842516	16.82201568	9.354460204
ENSRNA049459101	9.387580625	11.47931314	10.87401584	20.68753946	25.69976836	21.32722825	31.52367824	27.47399371	21.46893861	1.256992366	2.298648611	0.403849934	12.2388398	10.39090811	9.167371
ENSRNA049459132	9.569863744	9.75741617	8.212147382	23.44398359	17.26327898	20.51768687	36.20963042	28.16084355	23.04257809	1.414116411	1.292989844	0	13.00376728	11.1152743	10.27377784
ENSRNA049459156	22.23172619	27.3572416	19.8488899	37.76532956	25.92648481	48.21245512	85.39819378	65.01322623	59.4054156	1.76213883	0.16112023	0.707680959	20.30274826	21.00965425	13.88547976
ENSRNA049459180	9.075861174	6.80076955	7.567264177	23.0678769	15.74320217	17.03063015	27.92240408	30.6138787	18.41894949	1.584444158	2.173092174	0	17.61261609	9.067696154	8.766248711
ENSRNA049459199	0	0	0	0	0	0	0	0	0	0	0.428319617	0	0	0	0.098172746
ENSRNA049459243	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459267	67.76942137	64.40485882	0	0	0.038656344	0	0	0	0	0	0.073990835	0	0	0	0
ENSRNA049459284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459300	0.164364198	0.219194805	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459370	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459418	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459435	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459505	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459608	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459632	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459805	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459833	0.26806341	0.337626857	0.166574998	1.170109698	5.474799473	4.926215334	6.421257989	5.656410469	5.289544469	3.69703637	2.535274203	6.235918094	0.599943127	1.763163141	1.084712593
ENSRNA049459870	0.162752785	0	0.20226964	1.826803916	3.6456614	4.386677464	2.282119564	2.551156559	4.817263713	0.89785169	3.28378373	5.048124172	0.728502369	1.248907225	0.188164429
ENSRNA049459897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049459930	0.488258354	0.368977922	0	2.435738555	4.246123278	2.51236982	3.993709237	3.767861994	3.974242563	3.636299344	1.231418899	4.867834023	1.420579619	1.284590288	0.564493288
ENSRNA049460030	4.414669287	7.174570713	4.070676504	5.150572153	5.441685766	4.012812907	5.324945649	5.494798742	6.322658623	0.589215171	0.359163845	0.631015521	3.665277543	2.966154659	1.481794881
ENSRNA049460066	6.027103126	4.813905511	4.019293491	2.016686761	2.518065939	3.782062095	3.607221246	6.026553459	7.070499965	0.202740704	1.112249328	0	3.290010698	2.41723979	3.739009307
ENSRNA049460114	0.231715829	0	1.295897015	0	0.457979398	0	0	0.139698273	0	0	0	0	0	0.254015029	0.53579024
ENSRNA049460134	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460151	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460169	0.343930413	0	0	0.107233773	0.679768163	0.421361815	0	0	0	0	0	0.095247626	0.769738352	0	0
ENSRNA049460340	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460361	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460407	0	0	0	0	0.09190743	0	0	0	0	0	0	0	0	0	0
ENSRNA049460422	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460512	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460546	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460564	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460670	0	0	0	0	0	0	0	0.134019482	0	0	0	0	0	0	0
ENSRNA049460686	0	2.918469443	0	0.866957791	0.610639198	0	0	0.139698273	0.285769881	0.479361495	0	0.12834214	0.77789236	0.381022543	1.875265839
ENSRNA049460705	0.276186544	0	0.686490899	0	0	0	0.484085968	0	0.851536515	0	0	0	0	0	0
ENSRNA049460723	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460753	0	0	0	0	0	0.279152202	0	0	0.140503525	0	0	0	0	0	0
ENSRNA049460770	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460809	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460846	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460861	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049460987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049461002	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049461178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049461227	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049461250	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049461441	3.949467577	2.869828285	4.342054938	3.031141313	3.202463348	4.280333768	1.774981883	3.296879245	3.559422632	0.209498728	0	0	2.209790519	1.665209633	1.053720805
ENSRNA049461457	0.488258354	0.614963204	1.82042676	1.014891065	2.787858718	0.598183291	1.141059782	1.76618531	0	0	0	0.360580298	0.182125592	1.784153178	0.752657718
ENSRNA049461468	0	0	0	0	0.75688472	0	0	0	0.141684227	0	0	0	0	0	0.2656439
ENSRNA049461479	0	1.601764624	0	0.396515579	0	0.779029402	0.557261754	0.383358052	0.19605143	0	0	0	0	0	0
ENSRNA049461505	0	0	0	0.205423734	0.434068827	0.201796773	1.347275405	0.59582155	0.203137626	0	0	0	0.737279506	0.3611298	0.190431471
ENSRNA049461520	0	0	0	0	0.686242146	0	0	0	0	0	0	0	0	0	0.150531544
ENSRNA049461533	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049461556	4.959173089	2.025761143	3.331499952	4.513280264	10.24317321	5.583044045	8.45726662	9.696703662	4.95894794	0.739407274	3.718402164	0	1.6498436	1.616232879	0.929753651
ENSRNA049461578	0.743001844	0.561488143	0.738723902	0.926639668	4.699266869	5.097561954	2.778232513	3.046029737	3.665309347	0.409888815	0.374779665	0.493838234	1.164020089	2.280613193	0.859011525
ENSRNA049461590	0.488258354	0.491970563	0.121361784	0.852508494	6.433520118	3.110553111	4.45013315	7.535723989	2.649495042	1.212099781	1.970270238	0.324522268	1.202028909	1.819836242	0.677391946
ENSRNA049461612	6.238330041	5.349582823	5.773521762	4.634997639	3.497836181	7.968033734	5.273247148	2.720725591	3.928642251	0.732228563	2.678037216	0.441098229	1.633825701	1.164030035	0.460363458
ENSRNA049461634	9.641817607	10.51263414	12.16172825	17.22964536	10.23945518	19.39373195	7.39887185	11.27879742	10.47121007	1.786252309	1.996194846	1.27531558	1.288298926	1.735323723	3.161162414
ENSRNA049461681	0	0	0	0	0.766547078	0	0	0	0	0	0	0	0	0	0
ENSRNA049461704	0	0	0	0	0.418926891	0	0	0	0	0	0	0	0	0	0
ENSRNA049461717	1.112774854	0.200220578	2.173222643	2.775609051	0.837853783	1.363301453	4.086586196	2.30014831	2.548668592	0.219242854	1.002317708	0.35219471	1.423120907	0.522798373	0.367577025
ENSRNA049461732	0	0.315944398	3.273427935	0.469270731	3.30529474	2.151264678	1.612139509	1.209863943	1.701510577	0	0	0.277878395	0.421061002	0.549977494	1.015052151
ENSRNA049461747	6.253862325	5.312235337	17.35215294	17.59432424	28.93715219	17.64004342	18.69395813	26.83098534	19.55091603	0	4.951875996	0.644441384	9.114029635	9.087792998	13.11546108
ENSRNA049461765	3.102691386	1.587564583	1.084509559	2.055694242	5.110313853	2.732127937	6.231319377	3.741139569	4.90267619	0	0.733611259	0.322220692	1.519004939	0.956609789	0.672587748
ENSRNA049461783	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049461861	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049461913	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462071	0.139502387	0.175703773	0.086686989	0.173981325	0.275722291	1.281821337	0.08150427	0.168208125	0.344090265	0	0	0	0.078053825	0	0.403209492
ENSRNA049462239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462250	27.37180525	24.7199372	0.109381865	0.292706779	0	0	0.068561532	0.035374241	0.108543496	0.080922255	0	0	0.032829506	0	0
ENSRNA049462284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462303	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462318	0.248567889	0.834859138	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462331	0.402095115	0.31165556	0.076880768	0.887226035	0.36679798	0.075787928	0.469848146	0.783195296	0.381457534	0.298606784	0.195021093	0.27410629	0	0.406883802	0.321837802
ENSRNA049462348	1.323022637	1.296051484	0.04567379	0	0	0	0.04294311	0	0.045323718	0	0.046343722	0	0.041125134	0	0
ENSRNA049462493	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462555	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462573	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462587	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462609	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462641	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462656	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462687	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462736	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049462923	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049463024	1.350245325	0.850319492	0.209761108	4.630910339	2.22393288	1.447455864	2.56386272	0.407022129	1.665226962	0	0.425675669	0.186967562	0	0.370046585	1.170800894
ENSRNA049463047	0.692214376	0	0	0	2.964305472	0.636042992	1.617705007	2.295295677	0.640269228	0	0	0	0	0	1.200441423
ENSRNA049463067	0.494140985	0.829829866	0.614119871	1.437966135	1.736275309	2.421561273	1.15480749	0.198607183	2.640789144	0	0.830836847	0	0	1.9862139	0.761725883
ENSRNA049463085	0.85445212	0.645711364	0.212383122	1.065635618	0.675519612	1.674913214	0.599056386	0.206054953	0.632265862	0	0.215498307	0	0	0.562008251	0.790290603
ENSRNA049463137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049463218	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049463233	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049463340	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049463586	3.246918056	5.811402278	9.132474244	5.115050966	11.70900661	4.815375489	10.18395855	10.9209125	5.058126898	2.592546754	1.723986458	1.135827939	3.633405564	4.308729926	2.37087181
ENSRNA049463630	2.334113108	2.519849226	8.288121832	3.534791318	11.42342109	11.02991628	8.377048643	6.633964334	5.757217608	3.679002046	2.522907012	2.954999515	3.731353596	2.010436021	2.891307086
ENSRNA049463667	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049463738	2.330323964	1.565360883	6.75764479	3.68128668	8.392819427	6.090593504	5.809031617	4.308421741	5.55627576	0	0	1.893046564	0.869235781	2.384277429	3.771841516
ENSRNA049463761	2.796388756	2.739381545	5.213040266	5.425054055	18.83266798	12.5618491	11.436531	11.23936106	11.49574295	0.642780187	0.587722656	1.204665995	7.475427716	2.55458296	3.053395513
ENSRNA049463774	0.930015913	2.459852816	0.924661211	6.031352613	11.27397811	10.02669135	5.86830745	7.513296239	3.670296162	7.695871627	6.333011478	2.369527672	5.51580365	4.485870849	10.10711792
ENSRNA049463790	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049463813	1.103888453	1.069501224	0	0	3.244731886	1.664510026	0.09922259	3.583564397	2.094462484	2.693555069	1.284958851	0.094064426	4.561058309	4.561226387	0.294518237
ENSRNA049463828	0	0	0.105531986	0	0	0	0	0	0	0.11711109	0	0	0	0	0.098172746
ENSRNA049463846	0.679315971	0.213900245	0.633191916	3.282951966	7.384562222	5.721753214	1.786006615	1.638200867	2.618078105	1.05399981	1.070799042	0.564386553	5.986389031	1.954811309	4.712291797
ENSRNA049463865	0	0	0	0	0	0.208063753	0	0	0	0	0.214159808	0	0	0	0.098172746
ENSRNA049464122	1.367123392	0	0.339812995	0.511505097	0.180138563	0.167491321	0.479245108	0.329687924	0.16860423	0	0	0	0.152985497	0.149868867	0
ENSRNA049464139	0.546849357	0	2.208784468	1.364013591	1.981524196	0.502473964	1.597483695	0.989063773	0.67441692	0	0.172398646	0	0.152985497	0.149868867	0
ENSRNA049464241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049464595	3.338324562	5.806396763	3.161051118	15.66236536	20.31795423	20.25476444	10.03071157	12.26745766	9.018365788	3.727128526	3.006953124	1.584876193	39.13582493	48.09745034	40.98483827
ENSRNA049464622	5.077886885	7.256565807	5.461280279	23.13951627	18.01385633	26.43970144	15.63251901	9.066417924	10.95927495	1.885488549	3.817398586	0.540870447	46.00492459	54.1668905	48.88511876
ENSRNA049464727	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049464940	0	0	0	0	0	0.141941798	0	0	0	0	0	0	0	0	0
ENSRNA049464954	0	0	0	0	0.152659799	0	0	0	0	0	0	0	0	0	0
ENSRNA049464979	6.975119347	12.12356031	13.17642226	12.87461808	27.0207845	27.00370283	10.75856366	13.6248581	12.90338494	20.5864566	28.14671768	20.08947374	15.61076505	13.15175772	14.1929741
ENSRNA049464994	0	0.167174463	0	0	0	0	0	1.280341454	0	0.366114281	0	0	0	0	0
ENSRNA049465015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465074	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465110	0.588496824	0.541656332	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465132	0.341780848	0	0	0.213127124	1.013279419	0	0.499213655	0.412109906	0.421510575	0	0	0.094652328	0.286847808	0.936680419	0.296358976
ENSRNA049465220	3.2085549	2.811260361	3.987601473	3.653607833	10.84507677	4.27273779	7.987418474	9.419654986	6.881805304	0.384793581	2.814671768	0.618137654	4.058798912	2.905620891	3.225675932
ENSRNA049465281	1.302022278	1.844889612	4.045392799	2.029782129	3.43121073	2.791522023	9.508831517	5.102313117	7.42661489	0.673388767	2.052364831	0.180290149	3.096135067	3.211475721	2.446137582
ENSRNA049465355	3.645662379	0.918345051	2.831774959	3.06903058	4.443417895	3.796469951	6.709431518	6.703654465	4.271307159	0.125699237	1.034391875	0	2.039806633	3.097289918	1.475209126
ENSRNA049465372	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465399	3.906066834	5.49849453	5.425585637	7.307215666	13.32117107	6.755952458	8.591508947	11.77456873	7.509264023	0	5.070548406	1.145372711	4.371014213	3.778206731	4.648768256
ENSRNA049465410	30.07671463	27.1198773	43.04297938	40.92040773	72.20554079	41.59367814	41.0020815	58.10749669	46.50666676	2.042612594	14.65388489	1.388234147	25.37009499	21.60609499	19.36211978
ENSRNA049465428	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465449	1.942754294	1.359392346	3.219281007	4.397149076	3.887200577	4.936586314	6.30585669	5.812918669	5.058126898	1.091598633	1.45177807	1.434730028	0.644149463	1.814202074	2.162900599
ENSRNA049465483	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465575	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465590	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465606	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465791	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465819	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465834	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465846	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049465879	0	0	0	0	0.192661565	0	0	0	0	0	0	0	0	0	0
ENSRNA049466048	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466083	0	0.239152357	1.41588748	2.368079151	2.752116939	6.978805056	4.437454708	2.289499476	1.170862708	0.523746819	0.478885127	0	1.062399288	0.624453612	1.097625838
ENSRNA049466198	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466210	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466224	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466250	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466300	0.621419724	0	0.579226696	0.193751931	1.842326216	4.187283034	1.270725666	2.99716295	0.191595716	0	0	0	0.173847156	0.170305531	0
ENSRNA049466316	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466325	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466442	0	0	0	0	0	0	0.177498188	0	0	0	0	0	0	0	0
ENSRNA049466569	1.687806657	2.976118222	4.824505486	3.999422566	6.449405353	3.722029363	5.324945649	3.663199161	4.787527517	0.465552728	3.405405349	0.186967562	3.77741969	0.74009317	2.341601788
ENSRNA049466579	1.308947929	2.930888462	4.880293015	1.81384786	8.623654626	2.850916108	4.248626848	6.48853894	2.869859233	1.203503329	0.550208444	0.161110346	1.139253704	0	2.18591018
ENSRNA049466589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466617	3.740243242	1.949317326	8.976192324	5.951474394	16.99420409	13.27289716	10.0973026	12.28554058	10.65705982	0.355752556	2.114323015	0	4.618430112	3.95880026	4.920677342
ENSRNA049466632	1.519025991	1.275479238	0.629283324	3.315310811	12.00923755	4.652536704	3.697878923	7.784298217	4.527335804	0	0	0.140225671	1.699838861	1.665209633	0.731750559
ENSRNA049466642	7.21120031	5.487363974	7.468417475	17.98699241	22.1709001	18.22158331	16.85257524	23.54913746	13.15483552	1.864768894	2.083939675	0.998530056	7.060869113	4.281967628	4.342256063
ENSRNA049466657	0.227853899	0.860948486	0.849532488	1.278762741	4.203233144	1.25618491	2.12997826	1.648439622	3.372084599	0	0.287331076	0	0.764927487	0.99912578	0.790290603
ENSRNA049466664	1.70890424	0.83703325	0.35397187	0.94723166	4.878752756	2.90783544	4.881200179	2.632924397	3.629674395	0	0.478885127	0	0.637439573	0.312226806	0.548812919
ENSRNA049466676	2.420947673	1.165867741	2.654789024	5.239375121	6.567551787	5.931984298	4.32651834	5.924079893	5.181067483	0.491012643	0.808118652	0.15775388	2.629438237	1.717247434	1.646438757
ENSRNA049466686	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466693	0.069751193	0	0.086686989	0	0	0	0	0.084104062	0	0.096198395	0.175916986	0.077267207	0	0.076463708	0.161283797
ENSRNA049466701	0.20819138	0.087405938	0.086246953	3.375414343	2.194581482	2.72067121	1.702901401	1.589865626	1.283788553	0.957100786	0.175024006	0.538124912	8.154049356	6.618574329	3.449999589
ENSRNA049466709	0.138794253	0.34962375	0.431234765	0	0	1.360335605	0.081090543	0	0.770273132	0	0	0	1.242521807	0.912906804	0.080232549
ENSRNA049466850	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466858	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049466998	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467046	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467153	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467197	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467206	0.093001591	0	0	0.11598755	0.12254324	0	0.326017081	0.448554999	0	0	0.11727799	0.309068827	0	0	0
ENSRNA049467247	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467432	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467439	0.20819138	0.262217813	0.258740859	1.298236286	0.640086266	0.510125852	0.324362172	1.004125658	0.427929518	3.541272908	0.087512003	1.153124811	1.087206581	0.608604536	0.722092937
ENSRNA049467544	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467581	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467624	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467635	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467643	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467653	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467670	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467682	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467685	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467695	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467703	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467709	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467718	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467721	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467725	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467728	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467735	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467741	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467747	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467752	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467760	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467768	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467775	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467782	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467788	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467794	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467799	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467811	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467817	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467836	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467843	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467850	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467857	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467867	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467876	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467883	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467891	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467894	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467902	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467913	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467926	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467939	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467951	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467957	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467962	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467978	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467983	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049467992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468001	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468005	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468017	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468021	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468038	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468043	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468058	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468063	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468081	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468088	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468103	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468138	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468142	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468151	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468159	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468173	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468184	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468191	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468197	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468202	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468209	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468217	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468221	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468229	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468238	0.724800336	0.629578417	0	0	0	0	0	0	0	0	0	0.027686239	0	0	0
ENSRNA049468327	0	0	0	0	0.204702913	0	0	0	0	0	0	0	0	0	0
ENSRNA049468366	0	0	0	0	0	0	0	0	0	0.104170638	0	0	0	0	0
ENSRNA049468514	0	0	0	0	0.246765155	0	0	0.225813647	0	0	0	0	0.419138349	0	0
ENSRNA049468582	0	0	0	0	0.152659799	0	0	0	0	0	0	0	0.129648727	0	0.13394756
ENSRNA049468588	0	0	0	0.532817809	0	0	0	0.343424921	0	0	0	0	0	0.936680419	0
ENSRNA049468771	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468782	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468787	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468809	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468829	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468860	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468879	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468892	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468913	1.70890424	1.50665985	6.371493659	5.96755946	12.83487264	6.699652854	7.388362088	10.50880259	5.901148048	0.707058206	1.292989844	0.378609313	3.633405564	2.810041256	2.766017112
ENSRNA049468930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468958	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468983	0.138794253	0	0	0	0	0	0	0	0	0	0	0.076874987	0	0	0
ENSRNA049468991	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049468999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469005	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469023	0	0	0	0	0	0.085020975	0	0	0.085585904	0	0	0	0.465945678	0	0.080232549
ENSRNA049469029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469035	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469040	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469054	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469060	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469066	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469321	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469639	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469650	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469667	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469775	24.50905148	18.82488399	7.042756376	85.42753513	73.82881014	77.23693057	145.6772696	158.6089316	106.49148	1.758486729	4.823589054	1.72630153	147.8331361	154.5280028	119.6491784
ENSRNA049469783	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469795	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469802	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469892	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469899	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469919	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469940	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049469950	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470144	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470248	0	0	0	0	0	0	0	0	0	0	0.198159363	0	0	0	0
ENSRNA049470257	0	0	0	0	0	0	0	1.852179351	0	0	0	0	0	0	0.177593394
ENSRNA049470263	0	0.155125853	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470306	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470312	0	1.299544884	0	0	0	0	0	0	0	0	0	0.095247626	0	0	0.099407623
ENSRNA049470320	0	0	0.637149366	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470333	0	0.320850367	0	0	0.223774613	0.416127506	0	0.511937771	0	0	0.107079904	0.564386553	0	0.093086253	1.178072949
ENSRNA049470348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470528	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470554	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470569	0.107647511	0	0.535138575	0.134253306	0.992889719	1.055063442	0	0.648991977	0	0	0.678734826	0	0	0	0
ENSRNA049470615	0	0	0	0	0	0	0	0	0	0.192396791	0	0	0	0	0
ENSRNA049470636	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470674	0	0	0	0	0	0	0	0	0	0.188548855	0	0	0	0	0
ENSRNA049470683	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470723	0	0	0	0	0.783211145	0	0	0	0	0	0.107079904	0	0	0	0.098172746
ENSRNA049470774	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470793	0.891602212	1.310139	0	2.038607269	1.56642229	3.641115682	0.694558128	0.716712879	0.916327337	0.409888815	1.499118659	0.164612745	0.332577168	0.162900942	0
ENSRNA049470799	1.255521483	0.351407545	3.294105565	1.391850603	1.102889163	1.196366581	3.097162265	0.672832499	1.376361061	0	1.231418899	0	0.468322951	0.305854831	0.322567593
ENSRNA049470807	2.87815451	3.625046255	1.073093669	0.897377362	1.896195403	2.820906465	4.035748282	0.520559881	0.887390684	0.396944958	1.088833552	0	1.12726156	0.78878351	0.166376969
ENSRNA049470850	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470888	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470912	0	0	0	0	0.185709859	0	0.329378081	0	0	0	0.177730563	0	0	0	0
ENSRNA049470918	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470931	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049470937	0	0.056271143	0.055524999	0.055719509	0.058868812	0	0	0	0.275497108	0.43132091	0	0	0.049995261	0.048976754	0.206611922
ENSRNA049470983	0	0.645711364	0	0.852508494	0.675519612	0.628092455	0.599056386	0.412109906	0.210755287	1.178430343	0.215498307	0.946523282	0.382463744	0.562008251	0.395145302
ENSRNA049471008	1.876443871	0.675253714	0.66629999	2.173060868	4.5917673	3.940972267	5.324945649	6.141245652	2.975368764	0	5.239566686	1.781690884	1.349872036	1.175442094	1.239671535
ENSRNA049471037	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471190	0	0	0	0	0	0	1.4359404	0	0	0	0	0	0	0.505175956	0
ENSRNA049471198	0	0	0	0	0	0	0.183618815	1.136854912	0	0	0	0	0	0	0
ENSRNA049471337	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471617	1.550346115	0.710060607	0.175161338	3.86704884	2.599938027	1.381371723	1.976268488	3.058960124	1.39055035	0	0.888652813	0	0.315434015	0.772519933	1.629465162
ENSRNA049471642	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471654	5.146817476	0.911592514	3.897854944	5.3156412	7.099578671	5.123263947	6.765813296	5.624088124	5.058126898	2.329132913	2.332452267	0.623591809	1.349872036	2.38027024	2.510334858
ENSRNA049471660	1.53700263	1.222648737	3.820382786	4.338208906	5.436134159	3.567862467	4.915334446	4.194254661	3.491803579	0.669404218	1.734187561	0.627281702	0.90523963	0.975477832	1.122306182
ENSRNA049471800	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471804	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471872	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471974	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471983	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049471996	1.367123392	0.688758788	0.169906498	10.57110533	27.38106162	15.24171024	14.85659836	12.85782906	10.1162538	1.791214121	4.137567499	1.741602839	7.496289375	7.493443349	7.665818853
ENSRNA049472005	0.070108892	0.176604818	0	2.360792753	4.52655877	1.975538662	0.491533445	1.77524267	0.086463708	1.256992366	0.353638248	0.62130759	0.784541013	1.690828243	2.593774288
ENSRNA049472011	0	0	0	0.055000548	0.058109214	0	0	0	0.489496151	0.060822211	0.055612466	0	0.740252407	0.193379183	0.203945962
ENSRNA049472105	0	0.481649502	1.663420256	0	0.37791307	1.28839478	0.558560732	2.074958965	0.943240447	0	0.120558494	0.105904703	1.069828653	0.104803403	0.110530154
ENSRNA049472175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472180	2.042828057	5.145898994	5.272960269	4.115558248	4.348172218	4.427931484	5.141326834	1.705282368	2.906969482	3.034119503	0.594478089	1.392585978	4.571980384	3.617524376	3.633520016
ENSRNA049472213	13.67123392	14.63612426	14.32069051	12.17869278	11.0656546	9.810205965	9.813114125	6.240521428	6.744169198	4.175010358	3.078547246	2.812526324	8.086376294	7.60049254	7.902906034
ENSRNA049472224	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472261	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472265	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472360	0.162752785	0	0.20226964	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472415	3.685289144	3.892984457	4.136853854	7.413117342	8.302038135	4.951917327	7.223404533	3.870249548	7.037393946	0.655822104	3.447972916	0.395070587	2.394555612	4.300584879	3.161162414
ENSRNA049472421	5.276616601	3.474002661	6.557794643	10.17027677	7.742797896	7.933799433	7.847288325	8.386798079	5.472242551	0.165393732	2.268403234	0.531381492	2.549758291	3.680989716	3.188891909
ENSRNA049472502	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472528	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472536	0	0	0.428335708	0	0	0	0	0	0.141684227	0	0	0	0.642796208	0	0
ENSRNA049472548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472564	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472588	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472598	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472608	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472612	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472620	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472623	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472626	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472630	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472638	0.556747083	2.025761143	1.922019203	0.07715009	0.244531986	1.061030995	0.21685299	1.044260394	0.839206574	1.279743359	0.312033748	0.411159435	0.761466277	1.220651405	0.858234139
ENSRNA049472641	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472781	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472786	1.503835731	2.238466063	2.378690966	2.898528881	1.62124707	1.172439249	1.277986956	2.802347358	0.67441692	0.754195419	0.172398646	0.151443725	8.108231365	11.24016502	11.53824281
ENSRNA049472795	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049472860	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473059	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473076	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473080	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.104674252
ENSRNA049473089	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473114	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.675906437
ENSRNA049473142	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473154	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473160	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473182	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473188	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473198	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473204	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473210	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473220	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473225	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473228	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473246	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473254	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473271	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473286	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473290	0	0	0	0	0	0	0	0	0	0.793889915	0	0	0	0	0
ENSRNA049473297	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473303	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473307	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473315	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473334	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473338	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473346	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473351	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473354	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473363	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473372	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473380	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473389	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473440	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473449	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473467	0	0	0	0.202978213	0	0	0.950883152	0.196242812	1.40503525	0.673388767	0	0	0	0	0.188164429
ENSRNA049473524	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473557	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473609	0	0	0	0	0	0	0	0	0	0	0.14247822	0	0	0	0
ENSRNA049473622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473638	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473644	0.141524161	0	0.140709315	0.141202235	0.037295769	0	0	0	0	0	0.24985311	0	0.095022048	0.124115004	0
ENSRNA049473651	2.845282187	1.398495002	1.12121039	0.346196343	1.463054321	1.530377556	0.5676338	0.753094244	0.342343614	0.287130236	0.525072018	0.845624861	0.465945678	0.912906804	1.203488229
ENSRNA049473656	0.138794253	0.437029688	0.431234765	0.692392686	1.188731636	0.255062926	0.486543257	1.171479935	0.256757711	0.382840314	0.525072018	0.999374836	0.232972839	0.228226701	1.68488352
ENSRNA049473738	0.383305624	0.160924951	0.158791119	0.159347382	0.168353797	1.565339452	1.045082791	0.462179333	0.630296187	0.528641649	1.611202297	0.141536192	0.1429771	0.280128723	0
ENSRNA049473748	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473755	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473886	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473920	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473923	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473965	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049473978	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474065	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474083	0	0	0	0.768025671	0	0.301786165	0	0.371270185	0.075947851	0	0	0	0.068912386	0	0
ENSRNA049474089	0	0	0	0.84721341	1.118873064	0	0.595335538	0.102387554	0.314169373	0	0	0	0	0	0.196345492
ENSRNA049474094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474167	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474237	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474255	0	0	0	0	0	0	0	0	0	0	0	0.203280168	0	0	0
ENSRNA049474364	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474375	0	0.120412376	0.118815733	1.788479359	4.157043769	3.16242355	0.893697172	2.536060958	1.886480895	0	0	0	0.320948596	0.943230631	1.768482469
ENSRNA049474421	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474454	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474463	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474470	2.17003713	3.553120734	0.269692853	3.247651407	0.857802682	4.519607084	2.282119564	3.401542078	4.817263713	0	0.547297288	0.961547461	0.485668246	0.951548362	1.756201341
ENSRNA049474479	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474492	0	0	0	0.13750137	0.072636517	0	0	0.199408019	0	0.076027764	0	0.061066018	0	0.060430995	0
ENSRNA049474524	2.809157655	1.415257785	0.232748627	1.868511768	1.233825776	2.064961496	1.969500446	2.709763763	1.847717588	0	0.944650114	0	3.772245143	3.079497267	1.732143788
ENSRNA049474541	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474580	1.28167818	2.152371214	1.41588748	2.131271236	3.565242399	3.838342781	0.499213655	2.403974449	0.702517625	0	0.897909614	0.15775388	2.549758291	0.468340209	3.292877514
ENSRNA049474585	11.25028625	4.842835231	7.787381138	3.37451279	5.25404143	6.629864804	3.494495582	3.949386596	2.283182281	3.731696086	6.464949218	6.941170736	1.115519252	0.624453612	0.658575503
ENSRNA049474593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474599	0	0	0	0	0.111887306	0	0	0.102387554	0	0	0.107079904	0	0	0	0.098172746
ENSRNA049474645	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474652	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474661	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474668	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474675	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474679	0	0	0	0	0	0	0.094525662	0	0	0	0	0	0	0	0
ENSRNA049474685	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474764	0	0	0.146471119	0	0	0	0	0	0.145348474	0	0	0.130554935	0	0	0.136257001
ENSRNA049474772	0	0	0	0	0.152659799	0	0.541519897	0.139698273	0	0	0	0	0	0	0.13394756
ENSRNA049474778	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474799	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474807	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474812	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474823	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474832	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474838	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474843	0	0	0	0	0	0	0	0	0	0	0.428319617	0	0	0	0
ENSRNA049474847	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474852	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474860	0	0	0.104880554	0	0	0	0	0	0	0	0	0	0	0.092511646	0
ENSRNA049474866	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474872	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474877	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474882	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474888	0	0	0	0	0.583444739	0.271241006	0	0.066738446	0.068260822	0.076335569	0	0.061313249	0	0	0.447937994
ENSRNA049474894	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474898	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474903	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474907	0	0	0	0	0	0	0	0	0.074603642	0.083428697	0.076282587	0	0.067692698	0	0.139874443
ENSRNA049474911	0.062141972	0	0	0	0.16376233	0.152264838	0.217838686	0	0.689744577	0.085704025	0	0.068838057	0	0.068122212	0.0718446
ENSRNA049474917	0.677403483	0.620503413	1.071482417	0.076802567	1.866300431	0.67901887	0.14391745	2.821653408	0.683530662	0.5095915	1.475483906	0.068217894	0.620211476	1.350169973	2.634302011
ENSRNA049474924	0	0.077562927	0	0	0	0.075446541	0.071958725	0.222762111	0	0.25479575	0	0	0	0.202525496	0.213592055
ENSRNA049474946	0.683561696	0.860948486	0.509719493	0	0	0	0.159748369	0.329687924	0.84302115	0.942744274	0	0.151443725	0	0.299737734	0.158058121
ENSRNA049474953	0.820274035	0.344379394	1.529158478	0.170501699	0.900692817	1.507421892	0.638993478	0	0.16860423	0.188548855	0.344797292	0.454331175	0	0.299737734	0
ENSRNA049474986	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049474992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475115	1.176020122	0	1.096170952	1.650016441	1.355881659	2.88157112	1.545951963	1.063509434	2.175538451	0.810962817	0.185374888	0	0.822502674	1.128045235	0.509864905
ENSRNA049475128	0.138093272	0	0	0	0.36391629	0	0.161361989	0.666036211	0.170307303	0	0	0	0	0.302765388	0
ENSRNA049475135	0	0	0	0.793031157	0.628390337	0	0	0.383358052	0	0	0	0	0	0	0
ENSRNA049475138	1.139269493	1.255549875	0.70794374	1.420847491	1.125866021	2.617051896	3.161686479	0.858562303	1.229405843	0.196405057	0.179581923	0	0.956159359	0.936680419	0.493931627
ENSRNA049475171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475181	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475200	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475223	5.12671272	2.152371214	4.070676504	10.12353837	18.389145	12.21290885	12.48034137	11.84815979	10.18650556	0.196405057	0.538745768	0	3.824637436	1.717247434	6.585755029
ENSRNA049475232	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475237	2.861421053	1.201323468	3.556182507	2.973866841	7.3312206	4.284661709	7.43015672	9.008914216	6.273645765	0	0	0	1.06734068	1.219862871	5.513655373
ENSRNA049475307	3.314238526	4.000366701	5.491927194	9.300092665	15.10252601	8.289974491	15.97483695	14.65279664	10.38874548	1.142720332	0.174140046	1.376761138	1.545308055	1.665209633	3.352748015
ENSRNA049475322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475331	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475340	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475344	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475356	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475359	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475429	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475437	0	0	0	0	0	0	0	0	0	0	0	0	0	0.099912578	0
ENSRNA049475455	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475459	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475486	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475506	0.410137018	0.516569091	0.67962599	0	2.521939886	0.669965285	1.597483695	1.153907736	1.18022961	0	0.861993229	0	0.764927487	0.449606601	0.790290603
ENSRNA049475518	0.546849357	3.443793942	5.663549919	1.364013591	6.004618777	13.17598395	4.046958694	5.494798742	2.697667679	0.502796946	2.06878375	0.403849934	0.61194199	0.799300624	1.264464966
ENSRNA049475525	3.375613314	4.039017587	3.35617773	3.788926641	5.115045625	4.962705818	6.705487114	5.901820871	3.122300555	2.32776364	1.064189172	0.373935124	1.133225907	1.110139755	2.341601788
ENSRNA049475532	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475551	0.488258354	1.47591169	1.334979624	1.948590844	1.415374426	2.273096504	2.282119564	1.883930997	0.722589557	0.673388767	0.12314189	0	1.092753553	1.712787051	0.903189261
ENSRNA049475560	0.253170999	3.02926319	3.461058284	3.473182755	3.836284218	5.272874931	2.662472825	2.289499476	2.341725416	0	1.436655382	0.420677014	0	0.832604817	1.024450782
ENSRNA049475565	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475572	0.379756498	0	0	0	0.125096225	3.140462275	0.221872735	0.228949948	0.468345083	0	0.119721282	0	0.743679501	0.104075602	0.658575503
ENSRNA049475579	0	0	0	0.084826716	0	0	0	0	0	0.750443203	0	0.226035411	0.076112188	0	0
ENSRNA049475586	0	0	0	0	0	0	0	0	0	0	0	0	0.077657613	0	0
ENSRNA049475591	0.20819138	0	0.258740859	0.173098171	0.640086266	0.425104877	0.5676338	0.083677138	0.599101325	0.478550393	0.437560015	0.230624962	0.077657613	0.076075567	0.080232549
ENSRNA049475596	0	0.34962375	0	0.346196343	0.731527161	0.425104877	0.5676338	0.753094244	1.626132167	1.244231022	0	0.768749874	0.621260903	0.304302268	0.56162784
ENSRNA049475603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475606	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475610	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475617	0.069397127	0	0	0	0.091440895	0	0	0	0	0	0	0.076874987	0	0.076075567	0
ENSRNA049475622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.070248054
ENSRNA049475645	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475668	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475672	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475683	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475693	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475702	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475707	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475716	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475740	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475761	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475771	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475794	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475800	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475878	0	0.087405938	0.258740859	0.173098171	0.54864537	1.020251704	0.324362172	0.669417106	1.198202649	0.66997055	0.175024006	0.384374937	0.931891355	0.608604536	1.12325568
ENSRNA049475883	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475958	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475967	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475976	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049475996	0.768046849	2.902073547	2.481780302	4.406223678	3.440848962	2.822887439	5.384776499	3.704358702	3.599416145	0.423705292	1.743357092	0.340322978	1.375150539	0.505175956	0
ENSRNA049476001	1.996921809	1.547772558	1.527249416	5.747248276	1.416820161	1.881924959	1.7949255	3.519140767	3.03108728	0.211852646	0	1.020968934	1.375150539	0.168391985	1.77593394
ENSRNA049476004	1.228874959	0.38694314	0.190906177	6.130398161	3.440848962	0.564577488	1.7949255	3.519140767	4.736073875	0	0.193706344	1.191130423	0.859469087	0.505175956	1.77593394
ENSRNA049476008	2.611359288	1.160829419	1.145437062	4.406223678	4.857669123	4.704812398	1.61543295	2.037397286	2.462758415	1.05926323	0.193706344	0.340322978	1.375150539	1.010351912	1.598340546
ENSRNA049476010	0.921656219	0.19347157	2.481780302	4.789373564	4.250460482	1.129154975	2.33340315	1.481743481	3.599416145	0.211852646	1.355944405	0.850807445	1.031362904	0.505175956	1.243153758
ENSRNA049476041	0.434993807	0.626144353	0.308920905	0.232502317	0.327524661	0.076132419	0	0.974077959	0.613106291	0.17140805	0.156726042	0.688380569	0	0	0.718446003
ENSRNA049476045	0.06329275	0.398587262	0.314641662	0.315743887	0.583782381	0.232626835	0.369787892	0.610533194	0.156115028	0.436455683	0.399070939	0.070112836	0.141653238	0.069383735	0.87810067
ENSRNA049476075	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476098	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476112	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476121	1.692628962	0.491970563	1.779972832	0.487147711	1.372484292	1.116608809	0.456423913	0.3139885	0.963452743	0	0	0	0	0	0.451594631
ENSRNA049476127	2.658295485	3.985872618	4.090341608	2.210207207	5.170643947	2.946606579	3.106218295	4.121099056	3.590645638	0	0	0	1.983145337	0.971372286	1.170800894
ENSRNA049476131	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476138	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476145	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476156	1.885687437	3.76046465	1.171768949	6.271326855	4.762283857	8.278306688	3.305138679	6.442177835	3.875959309	0.650168465	0.594478089	0.348146495	6.330434377	5.340155031	3.451844015
ENSRNA049476166	5.408400232	5.108925079	6.161444417	9.930318725	11.48135898	10.12310184	5.441977422	6.159005183	6.855336822	1.243179263	1.136694368	0.998530056	4.707246075	4.611349754	7.121299943
ENSRNA049476173	0.522467538	0.109674966	0.108220699	0	0.344213815	0.426729481	0.203501108	0	0	0	0	0	0	0.095457877	0.100673962
ENSRNA049476180	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476213	0	0	0	0.355211873	0	0.523410379	0	0	0	0	0	0	0.637439573	1.092793822	0.164643876
ENSRNA049476216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476247	9.010585993	3.522061987	4.054586874	3.100030888	4.094058257	3.235627799	2.541451333	4.683067109	3.257127169	1.285560374	1.175445312	0	2.433860187	2.043666368	0.898057504
ENSRNA049476252	6.199745615	4.805293873	4.939142371	2.379093472	6.283903371	4.089904359	1.114523508	4.600296621	3.724977173	0	1.002317708	0	1.956791246	2.613991866	1.837885124
ENSRNA049476258	2.635418587	1.659659731	3.684719224	3.286779737	4.7747571	2.421561273	3.656890386	4.567965219	4.672165408	0	0	0	0.184319876	1.2639543	0.761725883
ENSRNA049476271	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476276	0	0	0	2.00590234	0.211927722	0	0	0	0	0	0	0	28.07733836	21.51059032	18.40912229
ENSRNA049476283	6.399300984	6.41131851	6.86856054	5.441543581	6.898923701	4.276374162	2.549176109	2.455122842	3.587324041	0	0.917014073	0	3.092260055	3.029264333	2.522204054
ENSRNA049476298	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476303	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476306	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476322	2.174969033	1.174020662	3.282284612	2.906278958	8.597522339	2.664634658	4.175241475	4.121099056	6.705850055	0	0	0	0.173847156	0.681222123	1.436892006
ENSRNA049476328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476380	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476438	0.152538175	0.312198893	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476460	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476471	0	0	0	0.173981325	0	0.940002314	0	0	0	0	0.087958493	0	0.15610765	0.076463708	0.080641898
ENSRNA049476473	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476480	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476520	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476538	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.173690243
ENSRNA049476545	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476580	0	0	0	0	0	0	0	0	0	0	0	0.153749975	0	0	0
ENSRNA049476585	2.182802055	3.038641714	3.426685665	4.584919633	2.422031103	6.19295642	3.893027492	3.463108451	3.967158352	0.316888832	1.014109681	0.636318173	1.67127014	1.763163141	2.125151203
ENSRNA049476589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476610	3.819903595	5.655249856	7.079437399	4.596859528	7.682379906	6.075665579	6.108025892	6.464469108	3.719210955	2.125795913	2.450765063	2.746773446	6.449388618	3.232465759	6.6632345
ENSRNA049476616	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476666	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476670	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476674	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476681	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476688	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476704	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476711	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476719	11.43412292	13.14903142	8.546811696	12.50345792	6.332143437	7.308712205	6.68038636	6.294042195	6.028878525	0.457088133	3.030036805	0.458920379	8.437381981	5.268117749	5.364396823
ENSRNA049476737	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476743	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476748	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476754	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476758	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476774	0	0	0	0	0	0	0	0	0	0	0	0.126203104	0	0	0.131715101
ENSRNA049476781	0	0	0	0	0.217034414	0.605390318	0.192467915	0.198607183	0.406275253	0	0	0	0	0	0.380862941
ENSRNA049476796	1.790280632	0	0	4.87147711	6.004618777	0.39878886	2.282119564	4.513584681	2.810070499	0.448925845	2.873310763	0	2.914009475	2.676229768	1.505315435
ENSRNA049476801	0.17527223	0.883024088	0.217828843	5.46479804	4.618937521	2.147324633	3.891306436	3.804091437	4.323185383	0	1.547167334	2.329903464	1.961352531	2.689954023	1.418470314
ENSRNA049476824	0	0	0	0	0.214450671	0	0	0	0	0	0	0	0	0	0
ENSRNA049476832	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476856	2.531709985	1.913218857	1.678088865	1.473471472	6.449405353	1.861014682	2.366642511	2.035110645	0.832613481	1.16388182	1.064189172	0.373935124	0.944354923	1.480186341	1.951334823
ENSRNA049476863	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476878	0	0.191321886	0.377569995	0	0	0	0	0.183159958	0.187338033	0	0.191554051	0	0	0.166520963	0
ENSRNA049476890	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476908	5.738542633	5.101916952	1.468327757	14.10322694	4.892652337	3.928808772	14.19985506	6.715865129	6.452754479	9.078278197	9.790540379	5.422059295	9.254678241	9.251164629	2.53673527
ENSRNA049476916	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476935	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476941	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476973	0.134913493	0	0	0.224344341	0	0.055095829	0.210195223	0.054224988	0	0.744271795	0.056710081	0.049817015	0.654214298	0	0.36394962
ENSRNA049476978	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476983	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049476994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477002	0	0	0	0	0	0	0	0	0	0	0	0.100962483	0	0	0
ENSRNA049477007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477011	0	0.215237121	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477025	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477038	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477060	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477077	0	0.950397679	0.60680892	0.387503861	1.403677117	0.326281795	0.570529891	2.301392979	0.656899597	1.652863338	1.903101934	0.78672065	0	0.437928507	1.385574435
ENSRNA049477080	3.597693137	4.418025123	3.353417715	2.075185151	6.044122848	3.471037252	3.310574762	6.615448485	3.771410407	6.760468809	6.464949218	2.690118802	4.730472618	4.042515491	5.667215512
ENSRNA049477082	0.448237178	0.056455638	0	0.391315374	0.649680064	0.054915187	0.314259088	0.648566409	0.055280075	0	0.565241462	0.148961041	0	0.196549334	0.414578677
ENSRNA049477087	0.877545421	0.93075512	0.229603375	0.691223103	2.00830155	0.509264153	1.619071312	4.678004334	1.13921777	2.165763873	2.038497501	1.432575778	0.671895766	0.911364732	3.470870894
ENSRNA049477092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477097	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477133	0	0	0	0	0.194744393	0	0.08635047	0	0.364549686	0	0	0	0	0	0
ENSRNA049477136	0.509486978	0.534750612	0.844255889	4.236067052	10.29363219	7.282231363	8.235474948	12.08173139	6.597556824	3.279110519	5.782314828	5.07947898	4.846124453	2.32715632	9.228238102
ENSRNA049477141	0.254743489	0	0	0	0	0	0	0	0	0	0	0	0	0	0.196345492
ENSRNA049477174	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477188	0	0	0	0	0	0	0	0.308119556	0	0	0	0	0	0	0
ENSRNA049477203	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477344	0	0	0	0.173098171	0.091440895	0	0	0	0	0.66997055	0	0	0	0	0
ENSRNA049477351	0	0	0	0.616271201	0.217034414	0	0	0	0	0	0	0	0.737279506	0.3611298	0.380862941
ENSRNA049477360	0	0.212579873	0	1.683967396	3.113506032	2.2745735	0.197220209	1.628088516	0.832613481	0	0	0	1.133225907	0	0.585400447
ENSRNA049477366	0	0	0	0.587936893	0.82822328	0.962593801	0.367237631	0	0.387595931	0.866891287	0	0	0	0	0
ENSRNA049477376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477387	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477401	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477405	0	0	0	0.009419983	0	0.009253664	0	0	0.009315151	0.020834128	0.009524787	0.008367057	0	0.016560096	0
ENSRNA049477408	0	0.015526573	0	0	0.032486666	0.030205829	0	0	0	0	0	0	0	0	0
ENSRNA049477412	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477415	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477418	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477424	0	0	0	0	0	0.31306789	0	0	0	0	0	0	0	0	0
ENSRNA049477429	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477435	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477439	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477447	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477471	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477485	0.929112985	1.504570169	3.299155293	3.145176969	13.29177749	5.366226801	7.444584209	9.76260359	4.910802814	0	0.167377326	0	1.039707264	2.037052561	1.534544861
ENSRNA049477491	0	0	0	0.559021963	3.100745762	0.961015778	1.571295438	1.080944015	0.552800754	0	0	0	0	0	0.647779183
ENSRNA049477494	0	0	0	1.217869278	1.102889163	0.170909512	0.489025621	0.336416249	0.68818053	0	0.175916986	0	0	0	0
ENSRNA049477503	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477506	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477514	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477554	0	0	0	0	0	0	0	0.531754717	0.181294871	0	0	0	0	0	0
ENSRNA049477560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477611	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477619	0.689305912	0.144697224	0	0.143278739	0	0.14074901	0	0	0	0.158444416	0	0.381790904	0	0	0.13282195
ENSRNA049477621	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477631	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477656	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477719	0	0	0.149040787	0.448688681	0	0	0	0	0	0.165393732	0.302453765	0.531381492	0.134197805	0.394391755	0.415942423
ENSRNA049477722	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477727	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477729	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477741	0.398191279	0.222899284	0.934760666	1.103570866	3.031458023	1.192494845	1.912844554	5.174713378	1.200418466	1.342419031	1.617980818	1.3723056	1.73284544	1.164030035	3.42715019
ENSRNA049477744	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477769	0	0	0.246241301	2.471039114	2.088563053	0.485482091	1.15759688	0.238904293	0.244353956	0	0	0	0	0	0
ENSRNA049477898	0	0	0	0	0.120092376	0.111660881	0	0.109895975	0.11240282	0.251398473	0	0	0.509951658	0	0.210744161
ENSRNA049477899	0	0	0	0.113667799	0.840646629	0.893287047	0.106498913	0.109895975	0	0.125699237	0.919459444	0	1.325874311	0.599475468	0.632232483
ENSRNA049477934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477941	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049477944	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478017	1.529648551	0.240824751	0.356447198	1.192319572	3.023304559	1.405521578	2.010818637	2.305509962	1.296955615	0	0	0	0.213965731	0.104803403	0.110530154
ENSRNA049478030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478041	0	0	0.723006373	1.81384786	0.574910308	1.603640311	0.679780296	0.876829586	0.179366202	0	0.366805629	0	1.302004234	3.507569227	4.371820359
ENSRNA049478044	0	0	0.913475793	1.10001096	0.968486899	0.36019639	0.687089761	0.531754717	0.181294871	0	0.556124664	0	3.783512303	3.706434345	6.798198739
ENSRNA049478060	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478109	0.015106336	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478113	0	0.00950799	0.009381916	0.009414782	0	0	0	0	0	0	0	0	0	0	0.008727671
ENSRNA049478119	0	0.00950799	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478122	0	0	0.009381916	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478126	0.045369139	0.019047533	0.046987416	0.009430404	0.009963416	0.074111204	0.02650692	0.036469903	0.009325455	0.052142936	0	0.008376312	0.033846349	0.024867622	0.008742153
ENSRNA049478131	0	0	0	0	0	0	0	0	0	0	0.009519528	0	0	0	0.008727671
ENSRNA049478136	0	0	0.009376738	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478138	0	0	0	0	0	0.009253664	0	0	0	0	0	0	0.008452237	0	0.008732493
ENSRNA049478140	0	0.00950799	0.018763832	0.028244345	0.009946911	0	0	0.018204745	0	0.031233935	0.028558583	0.008362437	0	0	0.017455342
ENSRNA049478144	0	0	0.009376738	0	0	0.00924345	0	0	0	0	0	0	0	0	0
ENSRNA049478147	0	0	0.009381916	0	0	0	0	0	0	0	0.009519528	0	0	0	0.008727671
ENSRNA049478153	0	0.00968446	0	0	0	0	0	0	0	0.010604548	0	0	0	0.00842907	0
ENSRNA049478156	0.110177842	0.10407705	0	0	0	0	0	0	0	0	0	0	0.041097514	0	0
ENSRNA049478162	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011884069
ENSRNA049478167	0	0	0	0	0	0	0	0	0	0	0	0	0	0.013513874	0.01425231
ENSRNA049478177	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478180	12.02031645	13.91952641	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478183	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478188	0	0	0	0.049349262	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478193	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478201	0	0	0.035545292	0	0	0	0.01671008	0	0	0	0	0	0	0	0
ENSRNA049478203	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478207	2.766040351	2.28251459	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478212	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478218	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478221	0.949391244	0.318869809	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478226	0	0	0	0	0	0	0	0.059296389	0	0	0	0	0	0	0
ENSRNA049478227	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478247	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478252	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478267	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478272	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478275	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478282	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478287	0	0.110378011	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478307	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478320	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478333	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478343	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478350	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478355	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478362	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478368	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478375	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478387	0	0	0	0	0	0	0	0	0	0.183057141	0	0	0	0	0
ENSRNA049478392	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478409	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478420	0	0	0	1.588525145	2.237746128	0.104031877	0.496112949	0	0.628338745	1.63955526	0.856639234	1.034708681	1.235286625	0.65160377	0.981727458
ENSRNA049478426	0	0.739464957	0.62542269	6.589942962	18.23488524	5.651547653	6.272328618	9.405207662	3.310021692	2.313482882	0.634596242	1.579474434	4.317382137	3.861651787	7.757453776
ENSRNA049478428	0.776774655	0.19567011	0.772302262	3.100030888	5.117572821	4.948607222	1.089193428	4.683067109	4.406701465	0	0	0	1.39077725	1.021833184	1.257280505
ENSRNA049478438	0.911415595	1.3392532	2.07663497	3.599480309	7.605850451	1.488811745	6.034938403	7.326398322	2.622732466	0	1.915540509	0	2.379774405	3.330419266	0.526860402
ENSRNA049478445	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478461	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478482	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478487	0	0	0.010041755	0	0.010646487	0	0.009441393	0	0	0.011143549	0	0.008950575	0.009041696	0	0
ENSRNA049478494	0.01058145	0	0	0	0.013942613	0	0	0.012758821	0	0	0	0.011721651	0.011840983	0	0
ENSRNA049478501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478513	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478524	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478530	0	0	0	0	0	0	0	0	0	0	0.009524787	0	0	0	0
ENSRNA049478534	0.015173401	0	0.037715094	0.009461803	0	0	0	0.009147834	0	0	0	0	0	0	0
ENSRNA049478539	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478543	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478557	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478584	0	0	0	0	0	0	0	0	0	0.010411312	0	0	0	0.008275476	0
ENSRNA049478590	0	0	0.009402684	0	0	0	0	0	0	0	0	0	0	0.008293795	0
ENSRNA049478600	0	0	0	0.028244345	0.009946911	0	0	0	0	0	0	0	0	0	0
ENSRNA049478607	1.312438456	2.100714305	0	0	0	0	0	0	0	0	0	0	0.030597099	0	0
ENSRNA049478615	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478628	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478633	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478640	0	0	0	0	0	0	0	0	0	0	0.110511952	0	0	0	0
ENSRNA049478649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478662	0.007548997	0.00950799	0.018763832	0.009414782	0	0.009248554	0	0	0.009310007	0	0	0	0	0	0.008727671
ENSRNA049478674	0	0	0	0	0	0	0	0.211338413	0	0	0	0	0	0	0
ENSRNA049478681	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478689	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478700	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478703	0	0	0	0	0	0	0	0	0.018620014	0.010411312	0	0	0.00844757	0	0
ENSRNA049478712	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478717	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478726	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478739	0	0	0	0	0	0	0.02646301	0	0	0	0	0	0	0	0
ENSRNA049478748	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478756	0.007548997	0	0.018763832	0	0	0	0	0	0.009310007	0	0.009519528	0	0	0	0.008727671
ENSRNA049478764	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478771	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478779	0.17527223	1.324536132	1.633716323	0	0	0.107366232	0	0	0	0	0	0	0	0	0
ENSRNA049478786	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478799	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478806	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478813	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478822	0.012338659	0	0	0.01538824	0	0	0	0.014877614	0	0	0	0	0	0	0
ENSRNA049478827	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478830	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478841	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478848	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478854	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478865	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478869	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478872	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478881	0	0	0.037527664	0	0	0	0	0	0	0	0	0	0	0	0.026183013
ENSRNA049478891	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478900	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478910	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478923	3.623700557	2.074574664	0.614119871	2.670508536	1.519240895	1.008983864	0.577403745	2.780500568	1.218825759	0.90866918	1.038546059	1.094773917	0.552959629	1.2639543	1.523451766
ENSRNA049478930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478949	0	0	0	0	0	0.018766535	0	0.018469912	0	0	0	0	0	0	0
ENSRNA049478956	0	0	0	0	0	0	0	0.009742551	0	0	0	0.008950575	0	0	0
ENSRNA049478963	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478975	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478981	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478993	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049478999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479006	0	0	0.03050386	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479014	0	0	0.035397187	0	0.037528867	0	0	0	0	0	0	0	0	0	0
ENSRNA049479027	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479033	0.015097994	0.02852397	0.009381916	0	0	0.018497109	0	0	0	0.020822623	0.009519528	0	0	0	0
ENSRNA049479040	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479045	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479053	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479057	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479065	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479077	0	0	0	0.009414782	0	0	0	0.009102372	0	0	0	0	0	0	0.017455342
ENSRNA049479084	0	0	0	0.009414782	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479090	0	0	0	0	0	0.009263901	0	0	0	0	0	0	0	0	0
ENSRNA049479097	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479113	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479127	0.398191279	1.504570169	0	0	0.524675427	1.4635164	1.240764035	0	0.982160563	0	0	0	0	0	0
ENSRNA049479136	0.820274035	1.549707274	1.359251981	2.387023784	2.16166276	2.009895856	0.958490217	0.164843962	0.33720846	0	0	0	0	0	0
ENSRNA049479153	0.546849357	0.516569091	1.868971473	1.705016989	0.900692817	2.177387178	0.638993478	1.318751698	0.16860423	0	0	0	0.152985497	0	0
ENSRNA049479158	0.820274035	0	0	1.023010193	0.180138563	1.339930571	1.916980434	0	0.16860423	0.188548855	0	0	0	0	0
ENSRNA049479169	0.956986374	1.20532788	1.868971473	0.852508494	0.54041569	2.679861142	0	0.494531887	0	0	0	0.151443725	0	0	0
ENSRNA049479178	2.187397427	4.132552731	1.189345483	1.705016989	3.422632703	1.842404535	2.076728803	0.494531887	1.51743807	0	0	0	0	0.749344335	0
ENSRNA049479185	0.820274035	0.172189697	2.378690966	1.193511892	0	2.009895856	0.958490217	0.494531887	0.50581269	0	0	0	0	0	0
ENSRNA049479186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479211	0.398191279	0.167174463	0.329915529	0.82767815	0.874459045	0.162612933	0.620382017	0.480128045	0.163693427	0	0	0	0	0	0
ENSRNA049479219	2.485678895	1.043573922	2.574340872	1.550015444	2.183497737	2.876113599	0.968171936	0.166509053	2.043687636	0	0	0	0	0	0
ENSRNA049479257	0	0	0	0	0	0	0	0	0.009315151	0	0	0	0	0	0
ENSRNA049479261	0.77950018	0.830739767	0	0	0	0	0	0.036149992	0	0	0	0	0	0	0
ENSRNA049479266	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479276	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479303	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479317	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479365	2.848173733	5.500504214	5.191587426	5.209774132	4.628560307	6.164611133	4.659327443	6.982973401	7.727693873	2.094987276	4.070523581	1.262031043	2.443518362	2.289663246	1.756201341
ENSRNA049479370	13.44146528	12.00986963	13.42118552	19.05607223	24.52306492	21.39384945	24.43210357	26.87372158	17.85221258	4.119554812	8.257750261	2.799799961	7.199317527	6.045130769	14.34477062
ENSRNA049479381	3.345089151	3.11406899	1.446012745	2.176617432	0.958183847	1.781822568	2.719121183	3.682684263	2.690493031	0.802335553	1.467222517	0.966662075	2.604008467	3.188699298	0.504440811
ENSRNA049479409	2.199968677	1.385434345	1.367063774	3.527621356	1.035279099	1.155112561	1.836188155	2.84213728	1.550383724	0	0.792637452	0	1.934299393	1.033578393	0
ENSRNA049479419	1.50615289	4.523627636	2.303816916	3.467831163	2.900536189	2.55495236	4.332159172	3.492456827	5.000972922	1.278297321	2.191508209	1.540105679	1.815082173	3.17518786	0.13394756
ENSRNA049479424	5.772298766	9.183450513	4.342054938	7.198960619	11.60892964	11.35218956	14.55485144	14.46963669	11.05294396	0.83799491	5.746621527	1.009624834	7.989242645	8.159527203	2.107441609
ENSRNA049479432	1.113952394	3.571341866	2.768846627	3.031141313	8.273030315	7.444058727	11.1232198	9.157997903	8.617549531	1.955321458	1.787837808	0.560902686	2.719742177	4.440559022	3.512402682
ENSRNA049479442	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479449	3.124853468	1.311921502	1.941788544	2.760503696	4.632134485	2.073702074	4.716380432	2.197919497	1.284603657	1.436562704	0.820945932	0	3.788212318	1.712787051	0.752657718
ENSRNA049479456	5.227236499	5.908469999	3.331499952	5.516231434	6.181225211	4.105179445	6.108025892	5.656410469	7.934316703	1.109110911	1.859201082	2.524062086	6.749360182	3.967117067	1.859507302
ENSRNA049479461	8.425295323	3.603970405	2.568354033	7.335538207	13.61512397	10.51689692	12.81702034	18.78454454	15.29201155	0	2.606026041	1.056584129	3.557802266	4.879451483	4.594712811
ENSRNA049479467	5.56387427	4.404852717	3.951313897	12.49024073	20.10849079	13.24349983	12.07400467	19.16790259	19.80119445	0.219242854	2.806489583	1.760973548	5.158813286	4.35665311	4.594712811
ENSRNA049479501	0.663652132	0	0	0.33107126	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479518	7.219640385	2.902073547	1.90906177	3.639923908	14.57300737	6.963122348	13.10295615	9.631332626	12.69267798	0.847410584	1.162238062	0.170161489	3.609770165	3.031055737	6.570955579
ENSRNA049479540	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479546	0.012553934	0	0.015602066	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479549	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479556	0	0	0	0	0	0	0	0	0	0.45433459	0	0	0	0	0
ENSRNA049479574	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479579	0.037912462	0	0	0	0	0	0	0	0	0	0	0	0	0.008312195	0.017532792
ENSRNA049479581	0.211465335	0.173121892	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479585	0	0	0	0	0	0	0	0.01833637	0.018754642	0.041946353	0	0	0	0	0
ENSRNA049479590	1.894847188	1.851262288	0	0	0	0	0	0.021352845	0	0	0	0	0.019816774	0	0
ENSRNA049479595	0.246082211	0.378817334	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479607	1.988543116	2.236229833	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479611	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479615	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479627	0	0.042515975	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479633	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479663	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479675	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479684	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479692	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479700	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479709	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479717	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479725	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479731	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479745	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479751	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479761	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479768	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479776	0.364566238	0.459172526	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479781	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479790	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479804	4.45960037	4.143602337	30.34693593	14.58838065	14.54594816	16.74913214	10.67836694	12.87017031	15.23749458	2.419878351	4.056438725	3.239437971	21.59795258	16.02875583	18.67959608
ENSRNA049479810	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479819	0.887742462	0.894491933	3.971840203	0.664292333	0.701838558	0	0.82986166	2.783079882	0.437933065	0.244868643	0	0	3.178919428	1.946348922	2.052702866
ENSRNA049479822	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479827	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479848	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479871	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479875	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479884	0	0	0	0	0	0	0	0	0	0	0	0	0	0.021078603	0
ENSRNA049479889	0	0	0	0	0.016243333	0	0	0	0	0	0	0	0	0	0
ENSRNA049479895	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479907	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479918	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049479921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049762431	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049762432	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049762433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049762434	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049762435	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049762436	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049762437	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996714	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996731	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996738	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996745	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996753	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996758	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996765	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996772	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996780	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996786	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996794	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996802	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996811	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996821	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996827	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996835	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996845	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996853	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996861	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996869	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996875	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996884	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996891	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996901	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996907	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996917	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996925	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996933	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996938	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996943	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996948	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996955	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996962	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996976	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049996999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997005	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997020	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997025	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997031	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997037	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997043	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997047	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997056	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997059	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997063	0	0.614963204	0.970894272	0	0	0	0.114105978	0	0	0	0	0	0.546376777	0.535245954	1.806378522
ENSRNA049997069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997076	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997081	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997084	0.877298433	0.276240156	0.181718179	0.364709516	0.288992348	0.089567552	0.341707742	0.61706296	0.270488069	0	1.290685049	0.161971899	0.572672985	0.320575117	0.084523059
ENSRNA049997089	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997113	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997118	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997124	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997133	68.78563245	149.2010203	141.2625749	647.2815803	242.7626502	1057.212236	84.13971712	13.29108387	28.07128017	2.86278366	0	0.713609176	406.0923938	275.8057945	316.695512
ENSRNA049997139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997143	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997154	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997159	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997164	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997176	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997182	0.11069825	0.139424856	0.48151639	1.794754725	0.729305924	1.017153773	0.646754532	2.269107173	0.819129862	0.305342275	0.069797023	0.183939747	0.247749793	0.485405237	0.383946852
ENSRNA049997187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997191	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997196	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997200	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997209	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997213	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997218	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997226	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997242	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997246	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997249	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997253	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997257	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997266	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997276	0.788725034	0	0	0.655775765	24.42263214	3.704134991	19.81494198	19.49596861	15.72558683	2.356860686	1.657679287	0.145618966	0	0	0
ENSRNA049997281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997285	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997295	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997299	0	0	0	0	0	0	0	0	0	0	0	0	0	0.192139573	0
ENSRNA049997305	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997317	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997321	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997326	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997330	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997333	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997340	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997345	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997353	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997356	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997360	5.657062312	1.187515153	1.952948248	18.22604367	11.18101427	9.625938009	17.62740629	12.50540403	9.496100307	4.551179255	3.566868534	3.481464946	16.17777674	12.23067765	13.44402406
ENSRNA049997364	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997368	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997372	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997380	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997384	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997389	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997394	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997399	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997403	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997418	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997422	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997426	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997429	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997437	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997441	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997443	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997447	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997451	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997454	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997458	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997462	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997466	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997469	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997473	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997483	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997487	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997490	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997498	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997505	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997513	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997515	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997529	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997533	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997541	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997545	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997551	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997555	1.261960054	2.384165037	3.790221869	13.3778256	3.048498764	7.215010766	5.40686789	1.521636575	3.761171283	0.435112742	0.132614343	0	21.30028849	27.66809852	7.294990186
ENSRNA049997559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ENSRNA049997563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp002	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp003	0	0	0	0	0	0	0	0	0	0.01412351	0.051655025	0	0	0	0
ZeamMp004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp005	0	0	0	0	0	0	0	0	0	0.051305811	0	0	0	0	0
ZeamMp006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp010	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp018	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp020	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp021	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp022	0.044971164	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp023	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp024	0.040688196	0	0	0	0	0	0	0	0	0	0	0.03605803	0	0	0
ZeamMp025	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp026	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp027	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp028	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp030	1.942361103	1.223205499	0	0	0	0	0	0	0	0.051516081	0	0	0	0	0.043185279
ZeamMp032	0.036750629	0.023143776	0.011418447	0.011458448	0.108954776	0	0.075150443	0.011078223	0.079316506	0.620893406	0.196960818	0.34604077	0	0.04028733	0.031866557
ZeamMp033	0.01050018	0.02645003	0	0	0	0	0	0	0	0	0	0.011631623	0	0	0
ZeamMp034	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp035	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp036	0.095436188	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp037	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp038	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp039	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp040	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp042	0.042991302	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp043	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp044	0	0.393898	0.555249992	0.055719509	0.294344058	0.164207178	0.626464194	1.239023246	0.275497108	0.492938183	0.394375987	0.494914134	0.699933648	0.342837277	0.309917884
ZeamMp045	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp046	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp047	0.182283119	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp050	0.273424678	0.057396566	0.056635499	0.511505097	0.120092376	0	0.372746195	0.604427862	0.11240282	4.273774043	0.97692566	2.725987053	0.152985497	0.249781445	0.10537208
ZeamMp051	0.289995871	0.365250873	0.102973635	0.155001544	0	0.101509892	0.387268774	0.524503516	0.332099241	3.399592989	1.123203298	2.088087726	0.069538862	0.022707404	0.191585601
ZeamMp052	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.043905034
ZeamMp053	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp054	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp055	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp056	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp057	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp058	0.331423853	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp059	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp060	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp061	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp062	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp063	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp064	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp065	0	0	0	0	0	0	0	0.170381356	0	0	0	0	0	0	0
ZeamMp066	0	0	0	0	0	0	0	0	0	0	0	0	0	0.031028751	0
ZeamMp067	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp068	0	0	0	0	0	0	0	0	0	0	0	0.047623813	0	0	0
ZeamMp069	0	0	0	0	0	0	0	0	0	0	0	0.06283972	0	0	0
ZeamMp070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp073	0.042991302	0	0.213718865	0.053616886	0.056647347	0	0.050235336	0.051837724	0	0.592920927	0.054213411	0.333366691	0	0	0.049703812
ZeamMp074	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp075	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp076	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp078	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp079	0	0.018942761	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp080	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp081	0	0.521786961	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp082	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp083	0	0.094092731	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp084	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp086	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp087	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp088	0	0	0	0.009798948	0	0.04812969	0.00459047	0.004736895	0	0	0.02476992	0.026110987	0.004396135	0	0
ZeamMp089	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp090	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp091	0.0759513	0.191321886	0.062928332	0	0.066717986	0	0	0.244213277	0	0.663412637	0.095777025	0.280451343	0.056661295	0.055506988	0.146350112
ZeamMp092	0.470174712	0.455528299	1.348464266	1.217869278	1.715605365	0.576028354	1.225582729	1.308285415	1.204315928	2.942958317	4.241553984	2.043288355	0.566612954	0.515422029	0.501771812
ZeamMp093	0	0	0	0	0.050458981	0	0	0.046174779	0	0.158444416	0	0	0.085706161	0.041980075	0.088547967
ZeamMp094	0.452475827	0.081413568	0.080334041	0	0.042585949	0	0	0.428672242	0.039859156	0.624038763	0.122268543	0.429627589	0.108500353	0	0
ZeamMp095	0.027044973	0	0	0.008432329	0.00890893	0.041417241	0	0.016305041	0.033353953	0.102573561	0.076735302	0.022469395	0	0.007411912	0.00781692
ZeamMp096	0	0	0	0	0	0	0	0	0	0	0	0	0	0.173761005	0.045813948
ZeamMp097	0	0	0	0.13140786	0	0.129087724	0	0.222332897	0.129945457	0.363292591	0.398609586	0.350158902	0.029476974	0.086629403	0.060908717
ZeamMp098	0.00733829	0.046213016	0.063840337	0.009151997	0.05801564	0.008990409	0.008574792	0.026544921	0	0.07084498	0.111045827	0.170709513	0	0	0.016968129
ZeamMp101	0	0	0	0	0	0	0.14489648	0	0	0	0	0	0	0	0
ZeamMp102	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp103	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp104	0	0	0	0	0	0	0	0	0	0.0469027	0	0	0	0	0
ZeamMp105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp106	0	0	0	0	0	0.052670227	0	0	0	0	0	0	0	0	0
ZeamMp107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp108	0	0	0	0	0.320246335	0	0	0	0	0.167598982	0	0	0	0	0
ZeamMp109	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp111	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp112	0	0	0	0	0	0	0	0	0	0.418997455	0	0	0	0	0
ZeamMp113	0.011714853	0.103284308	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp114	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp116	0.64136653	0.127547924	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp117	0.403006896	0.429498111	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp118	1.826309875	1.971637753	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp119	0.087077923	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp120	0.152785359	0.092368188	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp121	0	0	0	0	0	0	0	0	0.085153651	0	0	0	0	0	0
ZeamMp122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp123	0.386011311	0.081030446	0	0.040118047	0	0	0	0	0	0	0	0	0	0	0
ZeamMp124	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.044273983
ZeamMp125	0	0	0	0	0	0	0.040037185	0	0	0	0	0	0	0	0
ZeamMp126	0	0	0	0	0	0	0	0	0	0	0	0.040710679	0	0	0
ZeamMp127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp128	0	0	0	0	0.18961954	0	0.336312357	0	0	0	0	0.239121671	0.483112097	0	0
ZeamMp129	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp130	0.083872601	0.129112929	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp131	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp132	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp134	0.019282417	0.024286276	0.035946368	0.036072292	0	0.0118118	0	0	0.047561137	0	0	0	0.086310577	0.084552252	0.089172424
ZeamMp135	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp136	0.111988684	0.173600199	0.117767579	0.139667428	0.192965065	0.063323751	0.241585436	0.259678579	0.031872255	2.625664582	0.923370189	2.194836596	0.115679015	0.056661197	0.119514647
ZeamMp137	1.108478426	0.542940486	0.229603375	0.038401284	0.649147976	0.113169812	0.035979362	0.631159315	0.151895703	3.057548998	1.32016981	2.285299456	0.137824772	0.135016997	0.106796027
ZeamMp138	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp142	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp143	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp144	0.546849357	1.147931314	0	0	0.480369502	0.05583044	0	0	0	0	0.057466215	0	0	0	0.05268604
ZeamMp145	0	0	0	0	0	0	0	0	0	0	0.088409562	0.038831724	0	0	0
ZeamMp146	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp147	1.38815606	0.423851562	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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ZeamMp154	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp155	0.034831169	0	0	0	0.045895175	0.064009422	0.061050332	0	0.021478246	0.312246511	0	0.038584389	0.058465795	0.076366302	0.08053917
ZeamMp156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp157	0	0	0	0	0.201593916	0.02677719	0.217084115	0.17130068	0.134775564	0.361724422	0.31695994	0.048423253	0.220123018	0.239598508	0.315863551
ZeamMp158	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp159	0	0.038521185	0	0	0	0	0.107213671	0.036877844	0.075438134	0.885799989	0.617086875	0.609840504	0	0	0
ZeamMp160	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp161	0.137054977	0.129465938	0.127749246	0.149562894	0.090295019	0.461755523	0.280260297	0.681685558	0.274668545	1.441288239	0.583303689	0.89196179	0.03834223	0.03756112	0.257488167
ZeamMp162	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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ZeamMp167	0.034263744	0.010788828	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp168	0.085179028	0.05364165	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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ZeamMp172	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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ZeamMp177	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp179	0.017460069	0.043982043	0	0	0	0	0	0	0.021533107	0.048160627	0	0.038682944	0	0	0
ZeamMp180	0	0	0	0	0.054095665	0.050297694	0.047972483	0.049502691	0	0.452970222	0.10354273	0.090957192	0	0	0.047464901
ZeamMp181	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp182	0.199580057	0.055860405	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp183	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp184	0.212663639	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMp185	0	0.103885187	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMr001	0.064184197	0.02309721	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMr002	23.42045563	20.11303641	19.16709842	14.97170042	14.50947155	13.52850791	18.03015803	18.61919979	13.18644569	188.1932025	66.12982965	170.1652735	7.662195945	7.67487244	7.711563152
ZeamMr003	0	0	0	0	1.000769796	0.26585924	0.507137681	0	1.070503047	0.448925845	0.68412161	0.120193433	0	0.118943545	0.752657718
ZeamMr004	9.378133025	6.842090607	5.154175765	7.052255227	5.757477455	5.472404453	9.391710543	9.716412409	7.230791162	251.1302126	73.19934372	217.0616441	2.736325971	2.741503664	2.553987926
ZeamMt001	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt002	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt003	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt005	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt007	0	0	0	0	0	0	0	0	0	1.549716615	0	0	0	0	0
ZeamMt008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt010	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt016	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt017	0.189878249	0	0	0	0.500384898	0	0.665618206	1.373699685	1.170862708	3.404354324	1.915540509	3.996431636	0.637439573	0	0
ZeamMt018	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt019	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt020	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt021	0	0	0	0	0	0	0	0	0	0	0	0.216348179	0	0	0
ZeamMt022	0	0	0	0	0	0	0	0	0.766382863	0.857040249	0	0.172095142	0	0	0
ZeamMt023	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt024	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt025	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt026	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt027	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt028	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZeamMt030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp002	1.132832943	1.540303317	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp003	0.859993314	0.669998821	0.165278694	0.497573051	0.490649783	0.673441111	0.393673025	0.128283239	0.196814276	0.232323492	0.145342568	0.05892752	1.071493756	1.020507849	1.558030762
ZemaCp004	8.213338208	6.874239846	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp005	6.54161193	3.240128709	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp008	6.268385736	5.848637392	0	0	0	0	0	0	0	0	0	0	0	0.010539301	0
ZemaCp009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp010	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp016	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp017	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp018	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp019	1.263103134	1.809239571	0.153900813	0.030887989	0.032633798	0.060685261	0	0	0	0	0	0	0.110859056	0.054300314	0.028633718
ZemaCp020	0.017941252	0	0.234123127	0.033563327	0.08274081	0.054951221	0.020964353	0.043266132	0.077442888	0.024743944	0.011312247	0	0.110422603	0.127840897	0.082970142
ZemaCp021	7.229979477	7.009003697	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp022	6.420774264	5.716261231	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp023	1.929628223	1.71196148	0.01508269	0	0	0	0	0.007316643	0	0.025106372	0	0.00672187	0	0.013303938	0
ZemaCp024	32.35258865	34.20298272	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp026	3.609566712	2.102646466	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp027	8.373630776	10.65423751	0	0	0	0	0	0	0	0	0	0	0	0.031222681	0.032928775
ZemaCp028	7.535168404	8.483615194	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp029	10.31933359	6.166573175	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp030	0.825557604	1.247751428	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp031	0	0	0.011349799	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp032	0	0.012032823	0	0	0	0	0	0	0	0	0	0	0.085526484	0.041892066	0
ZemaCp033	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp034	0.196003354	0.216008581	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp035	6.016921134	6.385678522	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp036	6.189676001	5.382045569	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp037	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp038	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp039	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp040	4.068819619	4.988034877	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp042	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp043	0.211957115	0.266960771	0.39513139	0	0.698211486	0	0	0.127786017	0.261401907	0	0	0	0	0.232354833	0
ZemaCp044	15.98378095	23.30129235	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp045	24.41101417	32.75967727	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp046	4.139345826	6.074469871	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp047	2.121036292	2.327602665	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp048	1.002736214	0.890830784	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp050	0.207139908	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp051	3.017524604	1.706384386	0	0	0	0	0	0	0	0	0	0	0	0.067508499	0
ZemaCp052	5.255183535	4.396332692	0	0	0	0	0	0	0	0	0	0	0	0.021257995	0
ZemaCp053	10.3029589	8.056909223	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp054	8.350175228	8.980874399	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp055	11.70915868	8.968213392	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp056	0.239846209	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp057	3.502198813	3.667002809	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp058	3.82528443	3.100252454	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp059	1.176020122	0.833175954	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp060	1.896010544	1.005487282	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp061	0.445580957	0.178567093	0.025171333	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp062	0.550519487	0.616338961	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp063	0.290877317	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp064	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp065	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp066	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp067	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp071	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp072	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp074	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp075	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp076	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp078	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp080	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp081	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp082	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp083	1.19631005	0.357272263	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp084	1.063318194	0.956609428	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp085	1.471851271	1.354701551	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp086	8.586590034	10.0358067	1.017404177	0.374355027	0.491395948	0.44575202	0.180686779	0.318062203	0.179485541	0.050179336	0.103232722	0.070532673	0.712507307	0.628192856	0.189291163
ZemaCp087	23.67457581	26.80839593	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp088	1.116930876	1.406778571	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp089	2.188427275	1.84836398	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp090	1.611342488	1.902648587	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp091	1.84542827	1.628607787	0.26523512	0.156567217	0.132333196	0.076901433	0.117354174	0.04541156	0.123859857	0	0	0.055626713	0.407399396	0.165144757	0.145140607
ZemaCp092	0.427948947	0.437029688	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp093	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp095	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp096	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp097	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp098	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp099	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp102	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp103	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp104	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp109	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp111	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp112	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp157	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp158	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCp159	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCr113	0.018338342	0.011548605	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCr114	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCr115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCr116	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCr117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCr118	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCr119	0	0.005970517	0	0	0	0	0	0	0	0.006537755	0	0	0	0	0
ZemaCr120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt121	0	0	0	0.94723166	0.750577347	0.232626835	0	0.457899895	0.468345083	1.047493638	0	0	0.212479858	1.040756021	1.097625838
ZemaCt122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt123	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt124	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt125	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt129	0	0	0	0.236807915	0	0	0	0	0	0	0	0	0	0	0.439050335
ZemaCt130	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt131	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt132	0	0	0	0	0	0.226339623	0.215876175	0	0	0	0	0	0.206737159	0	0.640776165
ZemaCt133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt134	0.569634747	0.956609428	0.471962493	0.47361583	1.000769796	0.46525367	0.443745471	0.91579979	0.702517625	0	0.239442564	0	0.212479858	0.832604817	0.439050335
ZemaCt135	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt138	0	0	0.465497254	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt142	0	0	0	0.230407701	0	0	0	0	0	0	0	0	0	0	0
ZemaCt143	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt144	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt145	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt146	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt147	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt150	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt151	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt152	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt153	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt154	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
ZemaCt155	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000001	1.353885401	1.644593498	1.630264809	0.472781999	1.998015755	0.987844941	1.91248048	1.305982095	1.870082128	8.838227571	1.388598247	1.419784923	0.680085178	0.633248734	0.751332616
Zm00001d000002	0.006831347	0.012906161	0	0.296061663	0.216031256	0.184125375	0.241468491	0.166800262	0.160073972	0.141323314	0.236900075	0.211888785	0.059244852	0.02621067	0.49164862
Zm00001d000003	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000004	13.11322437	17.84648319	17.38693313	21.12630379	29.935563	28.66396666	24.45128104	28.09075683	22.93115839	30.59108972	30.78547246	24.59304808	23.3046421	16.84386246	25.48283987
Zm00001d000005	0.246082211	0.220402812	0.217480317	0.736567339	0.713348711	0.522572923	0.42812563	0.43518806	0.694649427	0.120671267	0.075855404	0.006057749	0.434478813	0.28175347	0.145413471
Zm00001d000006	11.34058697	4.421086818	5.775407973	0.77984145	1.89126766	1.009822935	0.896716419	2.381841035	1.892854141	7.918267917	8.763299147	10.16971377	0.047708575	0.031157769	0.032860316
Zm00001d000008	21.21873484	7.86712166	12.72871745	1.107401852	0.948097702	1.050337514	0.178889551	0.922978512	0.736345461	3.399369052	4.189306399	5.69821855	0	0	0.017699678
Zm00001d000009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000011	0.059581447	0.095509341	0.003365818	0.023643263	0.017842568	0.05972353	0.006329175	0.045717422	0.00334002	0	0.034151871	0.012000295	0.042428624	0.008906628	0.031311038
Zm00001d000012	0.49449144	0	0.361503186	0	0.479091924	0.017818226	0.203934089	0.070146367	0.125556341	17.51097344	27.80386671	10.92328145	0	0	0.117702856
Zm00001d000013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000016	0	0	0	0	0	0	0	0	0	0.580538643	0.023078801	0.040547182	0	0.020062767	0
Zm00001d000017	0.7708751	0.019814695	0.175967604	0	2.218046752	0.11564418	1.544172962	1.365795775	1.552167825	15.18805505	23.27084137	22.53357153	0	0	0.109131038
Zm00001d000018	0.319285718	0.091395805	0.090183916	0	1.45334722	0.10668237	0.898796559	0.752472439	0.787535681	19.21516992	51.59148434	24.24385749	0	0	0.016778994
Zm00001d000019	16.18782922	16.6193041	14.96191546	16.88051645	12.27810108	17.0824482	13.11367212	12.79385976	12.07910901	11.16284265	11.66478399	11.45246081	8.524565032	10.73687405	10.85175157
Zm00001d000020	0	0	0	0.07502825	0	0.018425888	3.321500752	3.554391265	2.726603059	0.12445469	0.151725981	0.033320952	0.706863685	3.90747211	4.486138079
Zm00001d000021	8.365978966	7.941286031	7.523223027	11.26498787	27.41511767	11.7577241	28.34142714	33.29684014	34.7861563	141.0551806	112.9511327	157.9008034	14.19492302	14.51714846	16.7730334
Zm00001d000023	2.626425121	2.710232172	2.594123471	2.984402279	2.133086684	2.784936025	2.098032175	1.633438655	2.246541026	0.658787708	1.043959893	0.757133555	1.598432902	1.55745087	1.646105807
Zm00001d000025	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000026	0	0	0	0	0	0	0.082878532	0	0	0	0	0	0	0	0.082001619
Zm00001d000027	2.577119034	2.209368213	1.458793161	2.532157362	2.552331814	2.345701552	2.147858913	1.800097868	1.854968732	0.316564416	0.769510745	0.3245518	1.685221082	1.761358101	1.570656728
Zm00001d000028	4.044848279	4.037781657	2.941533679	6.035848254	4.45691665	5.355827136	3.818274981	3.673847996	3.223956852	3.142480914	4.009270833	2.48492934	9.279934244	9.826673126	8.433850626
Zm00001d000029	24.02800361	26.05594572	23.90539526	29.2885784	31.54755716	34.23283531	35.25256173	31.08729912	33.61521	45.78383253	50.89305706	58.5725418	28.31336066	27.28748316	25.32546625
Zm00001d000030	27.40380821	28.37315368	27.5490569	18.56106548	20.39819177	18.78758512	19.1913072	20.3489378	18.58145327	6.672704847	15.21903918	6.455256933	15.8905856	13.79331524	16.24904853
Zm00001d000032	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000033	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000034	0	0.019303778	0.023809767	0.02867181	0.302923593	0.089191006	0.098499555	0.078541126	0.075607278	1.120301492	0.149785819	0.577251867	0.038589391	0.029402524	0.243643404
Zm00001d000035	2.607807626	2.239461379	2.332531397	4.50893221	6.156469685	4.114671189	3.555093772	3.918617311	4.142011429	2.07076777	2.528679559	0.645605476	3.714098782	2.328165203	3.346172642
Zm00001d000036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000037	0.008713342	0	0	0	0.045924427	0.096075328	0.040726162	0.063037844	0	2.787975419	0.241731689	0.231653882	0	0	0
Zm00001d000038	0.022157591	0.020930676	0.0688438	0.082901961	0.080288663	0.033932602	0.239493098	0.16030207	0.122969049	0.122235886	0.57279939	0.355905027	0.049590113	0.109304684	0.0064043
Zm00001d000039	0.267964274	0.197406827	0.125670486	1.790772281	0.82607921	1.647658709	0.496259728	0.280429817	0.486358356	0	0.025502758	0	0.141443692	0.188444581	0.19874172
Zm00001d000040	3.567449832	3.528230221	3.421934715	7.405327726	8.581031387	8.946559197	9.092507895	6.437864025	7.470555197	1.452915869	2.234238142	0.636541051	4.849452721	6.719164615	6.255890591
Zm00001d000041	1.287869862	0.998201143	0.914610546	4.271367611	6.638646846	4.109259126	4.861906897	6.177382436	6.196118181	2.127518135	2.552071051	0.564386553	5.083679574	4.809456394	6.283055729
Zm00001d000042	1.115925375	1.521192151	1.038729679	2.915195321	2.166261527	2.880603175	1.910326488	1.877128089	2.854435065	0.329342978	0.943936153	0.488364045	2.836681041	3.418238518	2.325477221
Zm00001d000044	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000045	6.614191542	6.027539032	7.616498167	14.21738304	20.79969827	16.53911167	18.56219298	19.73993529	19.15076259	9.240273033	13.04248898	4.652503155	9.048045095	11.43200344	10.20688804
Zm00001d000046	34.38112293	33.11952326	33.74578556	25.54711924	65.49196084	27.98155342	51.562345	66.89509438	58.07108065	50.10545806	70.88258513	44.92330698	23.47797238	20.21993163	22.55588495
Zm00001d000051	0	0	0.09664761	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000052	1.596671372	1.792309115	1.352725213	3.253687934	2.946504381	2.542464296	3.093021404	2.757612751	2.282529383	1.436896478	2.29651232	1.050910608	2.345967201	2.377102227	2.164240686
Zm00001d000053	8.987765495	10.41805153	9.119275293	10.05320751	9.094823201	9.806887845	7.934086969	8.618960122	7.854341888	8.386405152	8.031102812	6.06708298	7.967503565	7.643543139	7.135751828
Zm00001d000055	0	0	0	0.01015798	0	0	0.004758665	0	0	0	0	0	0.100258592	0.116073594	0.06120809
Zm00001d000058	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000060	7.432903879	11.6636337	9.136122349	127.7553058	46.19834402	128.9895822	111.1318941	30.39579857	54.8876653	0.014081319	0	0	158.0812056	125.6928586	167.4070402
Zm00001d000061	0	0	0	0	0	0	0	0.012394283	0	0	0	0	0.011502669	0.090146687	0
Zm00001d000062	0.062141972	0.104357392	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000064	0	0	0	0	0	0	0	0	0	0.604675628	0	0	0	0	0
Zm00001d000065	1.046146596	1.137949303	0.472783298	1.779148162	1.409780061	1.194285944	1.111293005	1.204077637	1.436801264	0	0.209876612	0.210704313	0.07981852	0.026064151	0.522279007
Zm00001d000066	0.144924741	0.30422208	0	0.1204959	0	0.078912283	0.150528499	0.2718275	0.079436622	0.288708494	0	0.142703157	0.144155946	0	0.074467901
Zm00001d000067	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000070	0.020404827	0	0.050718357	2.493905446	0.994795051	5.574711144	4.673235883	0.295242917	0.981427607	0	0	0	3.836054264	4.339486596	9.86093947
Zm00001d000071	10.61208436	8.538624898	9.17704848	32.77596958	23.30496331	40.09797374	34.37383897	23.89559082	27.05126508	2.880607505	2.997466167	1.729449948	29.29861147	28.59380801	27.61138775
Zm00001d000072	2.478850106	2.720668811	2.333880461	7.914884328	6.973882307	9.043635944	7.403841122	6.014577001	6.374611961	5.342310886	5.437700084	7.779088882	6.888209508	5.485992829	7.079050965
Zm00001d000073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000074	0.102688287	0.17244837	0.144637479	0.828175503	0.793800379	0.612261716	0.759944672	0.817203418	0.700758692	0.132182472	0.492074252	0.083419178	0.497949791	0.300188016	0.823136933
Zm00001d000076	0.756480143	0.553338255	0.80123239	0.791070822	0.873461374	0.70066725	0.665238504	0.548539521	0.528992165	0.071705212	0.150795545	0.408918216	0.413081206	0.561402677	0.489893015
Zm00001d000077	1.048211346	0.696883257	0.805129427	1.085357571	0.985504851	1.015098917	0.795980283	0.854895472	0.936118665	0.533013846	0.515407788	0.271040224	0.634717134	0.743705584	0.691122553
Zm00001d000079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000080	1.936028773	2.330403455	1.877455921	2.244247714	2.269607507	2.251803936	2.8492891	2.644679702	2.62944881	2.025512026	1.8807125	1.370943837	3.570967501	3.665166914	3.495088021
Zm00001d000081	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000082	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000083	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000085	0.792052988	0.863463428	1.158077393	2.697811691	3.525594082	3.55531724	3.367626289	3.523198609	3.012548802	0.64257156	0.948444351	0.508744744	1.996110678	1.751145476	1.893003782
Zm00001d000086	0.631163238	0.224986538	0.384805657	1.73769153	1.788832423	1.196366581	1.141059782	1.234893794	1.483364741	0.164241163	0.33038068	0.263839242	0.546376777	0.339424263	0.660870191
Zm00001d000087	0.840022918	0.823287463	0.843482918	0.915817874	0.978575715	0.81104648	0.611041576	0.764688167	0.84387875	0.023017154	0.364790624	0.295800562	0.438880064	0.579350656	0.411626438
Zm00001d000089	0.036816608	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d000092	0.100820309	0.101586842	0	0	1.780130345	0.370556021	1.625757742	2.066627845	0.920111579	9.288394915	0.584833164	0.357389322	0.090256931	0.530509264	0.279748886
Zm00001d000093	0.404118235	0.216590814	0.288520468	1.372592293	1.325547919	1.348357807	0.632965238	0.580582509	0.731678734	0.047433674	0.075898775	0.009524763	0.817846999	0.716354333	0.526860402
Zm00001d000094	0.035555875	0.044782756	0	0	0	0	0	0.021436146	0.010962564	0.07355612	0	0	0	0	0.041107444
Zm00001d000095	0.082855963	0.313072177	0.102973635	0.447782239	0.545874434	0.676732612	0.839082345	0.732639832	0.374676067	0.380906777	0.48759213	0.030594692	0.154530806	0.605530776	0.606687736
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Zm00001d000097	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d000113	24.49124793	25.50617439	30.32422116	12.55968397	7.947289558	8.419349843	5.125616133	4.341478685	6.514254339	6.478216002	6.015514245	5.790495373	5.992613737	5.14923781	4.775552844
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Zm00001d000124	8.347980557	8.580115268	9.546890433	9.372608008	13.44455213	9.252018165	15.22747616	17.7536626	16.65500848	35.75720608	35.5887263	40.35178203	12.00324809	11.4373609	13.05211918
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Zm00001d000133	9.077144146	9.160142263	9.94427369	7.352344832	7.859344932	9.994215647	17.0573957	15.38822571	18.90164679	7.838655438	10.66771316	9.509435939	40.90226472	47.48636892	45.07063416
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Zm00001d000137	1.223673971	0.89471683	1.09929447	2.835026572	1.91431192	3.20608597	1.943971107	1.613625108	2.012172506	0.537266264	0.768656383	0.50261243	2.184774452	2.78837483	2.543342204
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Zm00001d000154	2.399523358	4.393630915	3.107434469	3.218911129	13.65652235	3.87848635	10.32002741	12.3754538	13.22971244	21.9973664	20.13860287	21.26466465	0.631798515	0.442091053	0.536185365
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Zm00001d000165	2.606648601	2.640242022	2.174803169	4.819514688	4.491454845	5.225729226	2.044779129	1.538543648	2.090692451	0.351957862	0.459729722	0.323079947	1.162689781	0.979143264	2.002069529
Zm00001d000166	6.958165292	6.593185421	6.441633395	4.623720348	5.364382957	4.270254296	5.378205155	5.142235697	5.304080984	8.336855386	8.214881688	12.54647959	3.074722679	3.009255982	3.284053423
Zm00001d000168	0.324402161	0.14175423	0.074051258	3.14581827	4.13489971	3.512045625	0.765863854	0.662568952	0.898133913	0.191744598	0.358989916	0.073338366	1.948435149	2.431286704	1.500212671
Zm00001d000169	3.679122904	5.353017529	3.593845755	3.660991345	3.594883757	3.294541316	4.48199366	4.860925866	3.872956713	1.238363984	2.464911591	0.816133244	4.176313428	4.202284667	5.20117157
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Zm00001d000178	21.70142472	25.31499015	22.32821171	22.33548607	25.14694368	22.77742588	27.80640828	29.15063133	27.03280025	96.30113149	72.53415978	155.1615531	19.95601392	21.23315501	19.43391456
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Zm00001d000295	13.49684246	12.71288448	14.51462542	16.9381278	24.65677049	16.92393947	18.29665322	21.12322129	18.40503848	5.808791547	8.76987313	4.144652393	14.16904723	13.11569829	16.17239449
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Zm00001d000526	37.8139206	38.73107877	35.6299879	25.72844593	32.53176211	26.9069616	31.99273276	36.53078463	30.72899195	72.78527897	73.58308777	82.4572304	16.40504863	19.49776455	18.51111953
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Zm00001d000530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d000533	0.157745007	0.728494872	0	0.918086071	0.969976879	0.322098695	0.276487563	0.570613715	0.259391123	0	0	0	0.676666623	0.230567488	0.820686396
Zm00001d000534	31.25176283	45.7939211	42.91192203	10.06100934	10.4212392	20.18201211	13.49279617	8.473797068	12.31786275	0	1.082834469	0	4.855076944	4.780940716	4.362926637
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Zm00001d000545	1.021766362	1.595778957	1.117471733	2.089856399	1.265547455	2.077993972	1.265570042	1.010254477	1.00809704	0.704592133	0.618470478	0.769669156	1.280596092	1.993771175	2.52798489
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Zm00001d000551	1.539145541	2.622756976	2.700500624	4.008483649	15.80686069	8.43002677	12.64233785	17.73983037	15.35303418	47.82398107	39.5603515	34.55123398	7.345330176	6.649810654	7.013174892
Zm00001d000552	0.211301915	0.425816871	1.129208562	0.632463798	0.111368509	0.232986382	0	0.152869208	0.026059386	0	0	0	0.023645363	0	0.19543508
Zm00001d000553	1.375721652	1.407840291	0.587726878	0.241275989	0.028323673	0.158010681	0.200941345	0	0.132550495	0	0.027106705	0	0	0.023564287	0.099407623
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Zm00001d000556	49.72278411	53.06904686	64.33972503	12.86430807	8.263499174	13.647441	3.964126206	2.756121274	5.075968616	10.70438737	6.412499894	6.234032707	0.259023064	0.333041927	0.819560626
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Zm00001d000565	141.8882796	131.5869414	0.139840739	0.456074503	0	0.758191167	0	0	0.138768914	0	0	0	0	0.061674431	0
Zm00001d000566	0.119573475	0.150603234	0	0.323108176	0.446407518	1.001041425	0.582173358	0.937159552	0.466979646	0.109941023	0.226178981	0.022076345	0.022301093	0.043693547	0.138243254
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Zm00001d000570	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d000576	6.29290257	7.307483365	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d000618	65.26778845	64.51927205	85.26030872	43.39576372	27.34633612	50.95368511	19.15055755	5.809260115	19.55199654	0	0.103854606	0	1.105919259	0.45141225	1.285412427
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Zm00001d001234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001237	0	0	0	0	0	0	0	0	0	0.533628834	0	0	0	0	0
Zm00001d001238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001239	0	0.12568591	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001240	2.03013837	1.969868675	1.478773465	4.122943728	2.771984173	4.418344413	3.712411637	3.401894241	2.639877804	0.490616132	1.515932462	0.394066221	3.301302121	3.415584766	2.843486155
Zm00001d001241	0	0	0	0.02841695	0	0	0	0	0	0	0	0	0	0	0.10537208
Zm00001d001242	0	0	0	0	0	0	0	0	0	0.079556479	0.290968179	0	0.258203371	0.189707427	0.20007357
Zm00001d001243	0	0	0	0	0.035671003	0	0.189800043	0	0	0	0	0	0	0.029677003	0
Zm00001d001244	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001245	0	0	0	0.334973868	0.176953402	0.032905957	0.188308491	0.129543389	0.066249206	0	0.372570747	0.119012751	0.03005609	0.029443785	0.062105352
Zm00001d001246	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001247	0	0.960715048	0.218763731	0.439060169	0.154625376	0	0.068561532	0	0.07236233	0	0.29596334	0	0	0.064321402	0
Zm00001d001248	2.375240907	2.626235434	2.974490408	2.012553209	1.863502379	2.22137031	3.072084028	3.913404409	1.788904297	1.775460039	3.086713154	2.490586461	5.70144891	4.929373874	7.106326646
Zm00001d001249	0.126585499	0.318869809	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001250	3.202439727	3.467381572	2.769708659	2.475778093	2.714416707	3.625154627	3.873350876	4.267877927	5.035030429	1.575545226	6.470853281	1.389962957	5.490712374	4.167586301	4.005582511
Zm00001d001251	0.11160191	0	0	0	0	0.068363805	0	0	0.275272212	0	0	0	0	0	0
Zm00001d001252	0	0	0	0	0.037528867	0.802562581	0	0	0.140503525	0.078562023	0.035916385	0.094652328	0.191231872	0.031222681	0.131715101
Zm00001d001253	0	0	0	0.018532793	0.176222508	0.436933882	0	0.017917822	0.183265467	0.368899933	0.206128816	0.312764215	0	0.016290094	0
Zm00001d001254	0	0	0	0.033107126	0	0	0	0	0	0	0	0	2.138826372	1.105828533	1.565235758
Zm00001d001255	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001256	0.561831531	0.786254325	0.543080129	0.077854657	0.082255052	0	0	0	0.076988233	0.172190735	0.078720843	0.484066701	3.283250402	3.832263265	5.268604023
Zm00001d001257	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001258	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001259	0	0	0	0	0	0	0.040037185	0	0	0	0	0	1.303635818	1.051711347	2.059905332
Zm00001d001260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001261	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001263	0.284817373	0.025623467	0	0.431328702	0.241257004	0.174470126	0.451669497	0.564198085	0.150539491	0.168347192	0.153927362	0.022536269	0.022765699	0.133811488	0.729137164
Zm00001d001264	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001265	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001266	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001267	5.169598875	5.119549055	3.815849882	2.922679057	2.168405505	2.863951986	2.140397124	2.559253348	2.151478902	0.521296281	1.723253159	0.914717523	1.054174844	0.605595166	0.813485011
Zm00001d001268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001269	0	0	0	0	0.026259266	0	0	0.024029732	0	0.027485256	0	0	0	0	0
Zm00001d001270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001271	0	0	0.243593545	0.24444688	0.38739476	0.180098195	0.22902992	0.590838574	0.785611107	0	0.061791629	0.054280905	0.219334047	0	0
Zm00001d001272	0.117652615	0.266731028	0	0.088038743	0.031004916	0.144140552	0	0.028372455	0.058039322	0	0.089018234	0.052132091	0.184319876	0.206359886	0.217635967
Zm00001d001273	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001274	0	0	0	0	0	0	0	0	0	0.157311321	0	0	0	0	0
Zm00001d001275	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001276	4.885644724	4.480170803	6.071893643	6.787998669	7.510479285	7.823262345	9.264403873	10.38671988	9.408010323	30.26238674	22.10377622	20.9362642	2.685638827	3.80544772	2.972880013
Zm00001d001277	0.04056746	0.459853791	0.201669433	0.050593976	0	0	0	0	0.050030929	0	0	0	0	0	0
Zm00001d001278	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001281	0	0	0	0	0.028368278	0	0.025157224	0.025959679	0	0	0	0	0	0	0.149346256
Zm00001d001282	0.152325726	0	0	0.332454566	0.501778728	0.653169498	0.355985224	0.183670153	0.093929933	0	0	0	0.553986481	0.50095443	0.176109327
Zm00001d001283	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001285	0	0	0	0	0.023578346	0	0	0	0	0	0	0	0	0	0
Zm00001d001286	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001287	0	0	0	0	0	0	0	0	0	0.415916592	0.25352742	0.222711361	0	0	0.232438413
Zm00001d001288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001290	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001291	0	0	0.1233441	0.123776188	0	0.638351678	0.086977334	0.239337876	0.367196145	0	0	0	1.055072396	0.707185216	2.495654537
Zm00001d001292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001293	0.172507684	0	0	0.053786025	0	0	0	0	0	0	0	0.047774046	0	0	0
Zm00001d001294	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001295	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001296	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001297	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001298	0.21270661	0.121774892	0.312416474	1.953414089	1.070130079	1.871543761	1.468690809	0.792743241	0.715435205	0.693390414	0.780305045	1.927855058	0.043277368	0.084791438	0.603616585
Zm00001d001299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001303	3.788414219	5.038252756	3.567744011	2.553123546	1.240196649	3.71882624	0.604899162	0.993035917	0.754511184	0.097357412	0.029672745	0.104264183	0.342308342	0.515899714	0.435271933
Zm00001d001304	1.486003687	1.122976286	1.994554537	5.337444486	5.090872441	8.156099127	6.598302218	7.310471369	4.398371216	3.688999334	4.04762038	4.279931363	3.857895153	2.606415078	3.642208868
Zm00001d001305	0	0	0	0	0.136727562	0	0	0	0	0	0	0	0	0	0
Zm00001d001306	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.064777918
Zm00001d001307	0.525068728	0.367403337	1.401789027	1.940275378	4.023009166	2.882852046	2.47689506	1.946237392	2.182501412	0.321847263	0.588558677	0.107712465	1.632135464	0.362414045	1.191618833
Zm00001d001308	0.01919039	0.033838514	0	0.04308016	0.005057231	0	0.017939177	0	0	0.026466712	0.033879577	0.017006595	0.038654393	0.004207436	0.013312026
Zm00001d001309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001310	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.056115309
Zm00001d001311	0	0	0.021028032	0.232118649	0	0.373124231	0.098854189	0.081605922	0	0	0	0	0.075735395	0.12983689	0.176054837
Zm00001d001312	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001313	0.004680327	0.011789777	0	0.099230705	0.030835084	0.074542526	0.125786118	0.011286817	0.08080997	0.245287795	0.047216336	0.025923267	0.062849229	0.035915168	0.027055481
Zm00001d001314	0	0.017936427	0.017698593	0.124324155	0.037528867	0	0.183045007	0.017171246	0	0.491012643	0	0	0.063743957	0	0.082321938
Zm00001d001315	0	0	0	0	0	0	0	0	0	0	0	0	0.051568145	0	0.017759339
Zm00001d001316	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001317	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001318	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001319	1.125793148	0.548374832	0.525643396	0.108599808	0.172106908	0.076201693	0.08721476	0.037498627	0.130403636	0.154407615	1.098080547	0.392733955	0	0.040910519	0
Zm00001d001320	0.203488793	0.107913637	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001321	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001323	0	0	0	0	0	0.070080051	0.022280107	0	0	0	0	0	0.362727121	0.522555324	0.551109207
Zm00001d001324	0.092373202	0.155125853	0	0	0.243430491	0.377232706	0.323814262	0.297016148	0	0	0	0	0.068912386	0.337542493	0
Zm00001d001325	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001326	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001328	16.05748566	16.09190988	18.04098083	10.91210873	5.698929094	7.85686562	1.916980434	0.839205626	3.31077397	0.27425288	1.003046666	1.817324702	0.50067981	0	0.287378401
Zm00001d001329	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001330	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001331	0	0	0	0	0.027418351	0	0.02431482	0	0.025662744	0	0	0	0	0	0.024057553
Zm00001d001332	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001333	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001334	0.026911878	0.067791219	0.36790777	0.97333647	1.59571562	1.088034174	0.377358353	0.454294384	0.763365608	0	0.033936741	0	0.451728831	0.177010473	0.404479443
Zm00001d001335	0.00444304	0	0	0	0	0	0	0.005357295	0	0	0	0	0	0	0
Zm00001d001336	0	0	0.074520394	0.074781447	1.264130269	0	0.140130149	0.072299983	0	0	0	0	0	0.197195878	0.138647474
Zm00001d001337	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001338	3.969067912	4.033054617	5.576173973	3.060900064	1.56642229	3.782062095	0.716963229	0.277437244	0.449295984	0	0.411048665	0	0.064369775	0	0.110840197
Zm00001d001339	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001340	1.857224231	1.949317326	1.699064976	0.772083165	1.699420409	1.358891852	0.874094852	0.964181666	0.604430258	1.067257669	2.114323015	1.543011539	0.923686022	0.876591486	1.133246903
Zm00001d001341	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001342	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001343	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001344	0	0	0	0	0	0	0	0	0	0	0	0	0	0.01643299	0
Zm00001d001345	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001346	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001347	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001349	64.14591349	63.39018938	0.481151144	0.452659378	0.510126905	0.35573378	0.480658811	1.050333211	0.656512046	12.74790488	3.173355604	4.208259265	0.514464505	0.450932874	0.167849332
Zm00001d001350	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001351	0.112520444	0	0	0	0.024710365	0.183803919	0.043826713	0	0	0.181048283	0.023648648	0	0	0	0
Zm00001d001352	0.138513008	0.052337294	0.172144374	1.312880356	0.620538111	1.221821189	0.874003237	0.935284892	0.649134827	0.07641291	0.017466935	0	1.813505897	1.898035296	1.617413393
Zm00001d001353	0.088120292	0.443951337	0.281612979	0.14129975	0.514207685	0.092536642	0.867877882	1.138425154	0.822838323	1.61464489	0.74610832	0.669364531	0.098609437	0.055200319	0.320191405
Zm00001d001354	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001355	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001356	0	0.027506341	0.135708065	0.272366931	0.201432898	0.133779011	0.025518909	0.157997408	0.242402248	0	0	0	0	0	0.025248901
Zm00001d001357	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001358	0.538080635	0.251005389	0	0	0	0	0	0	0	0.027485256	0	0.022076345	0	0.284008057	0
Zm00001d001359	0	0.139424856	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001360	31.61684867	31.89568459	27.31995296	4.336581671	3.37480435	5.236701362	1.526132066	0.899892598	2.342887563	4.772204267	3.358137393	5.749600483	0.037961662	0.148753218	0.235322264
Zm00001d001361	0	0	0	0	0	0.050754946	0.048408597	0	0	0	0	0	0	0	0
Zm00001d001362	0.793211524	0.264455166	0.144971414	0.698300473	0.491845907	0.514478461	0.845085231	0.140651845	0.143860264	0	0.058839128	0	0.05221348	0.12787446	0.350640882
Zm00001d001363	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001364	0	0	0.178848945	0	0.063206513	0	0.056052059	0	0.029579689	0	0	0	0	0	0.027729495
Zm00001d001365	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001366	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001367	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001368	0.148960176	0.208462103	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001369	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001370	0	0.061060176	0.120501062	0	0.127757846	0.059394086	0	0.058455306	0	0	0	0	0.054250176	0.053144988	0.056048979
Zm00001d001371	0.116848153	0	0.726096143	0	0	0	0	0.070446138	0	0	0	0	0	0	0
Zm00001d001372	31.71226864	30.11354064	33.43821938	7.162628445	3.207947018	4.741763436	1.458889219	0.451627294	1.308799958	0	1.338254328	0.484066701	0.069856392	0	0
Zm00001d001373	222.6199606	227.2735189	5.784316792	4.659543976	1.673345968	2.697102895	0.649956601	0.343424921	0.909140456	0.207958296	0.595789438	0.178169088	0.026247512	0	0.019369868
Zm00001d001374	1.337039992	2.147108693	2.160180409	2.751372158	3.523492681	2.538988245	1.249864993	0.926995387	2.061176405	3.411397374	3.540705684	5.517143043	2.206881259	1.172568152	1.893605847
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Zm00001d001389	0.274924265	0.157394604	0	0	0	0	0	0	0	0	0	0	0	0	0.028895452
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Zm00001d001399	20.58623224	19.46299028	19.84069423	58.93858726	69.17320831	56.86060213	71.29930452	67.02236452	71.11835196	21.31210282	46.84794168	31.08993119	14.29180647	11.13864095	14.5617417
Zm00001d001400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001516	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001517	0	0	0	0.124001236	0.131009864	1.644460246	0.406632213	0.059943259	0.67441692	0.41137932	0.626904167	0.770986237	0.27815545	0.10899554	1.494367687
Zm00001d001518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001520	0.399717418	0.152730677	0.340482797	0.347276785	0.42608333	0.231098407	0.330622447	0.29784553	0.437573396	0.390229233	0.345476918	0.318409935	0.201032191	0.152625981	0.160965892
Zm00001d001521	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001523	0	0.033565243	0	0.199417192	0.175573648	0.359143184	0.217980231	0.192799956	0.032866322	0	0	0	0.089465203	0.058428408	0
Zm00001d001524	0	0	0	0	0.049899879	0	0	0	0.233523864	0	0	0	0	0.041514922	0.043783413
Zm00001d001525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001526	0.42391423	0.133480385	0.263420926	0	0	0.064919117	0	0	0.19605143	0.292323806	0	0	0.177890113	0.058088708	0.122525675
Zm00001d001527	1.71521016	1.080156772	1.37931474	1.698725413	1.130020508	0.803463903	1.120007018	1.642356819	1.990898656	0.069575223	1.908472094	0.670599521	1.241948688	0.497719484	1.574748804
Zm00001d001528	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001529	0	0	0	0	0	0	0	0	0	1.517059752	0	0	0	0	0
Zm00001d001530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001531	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001532	0	0	0	0	0.032633798	0	0	0	0	0	0	0	0	0	0
Zm00001d001533	0.025746203	0	0	0	0	0.126170487	0.060168877	0	0.031752209	0	0	0	0	0.169343353	0
Zm00001d001534	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001535	0	0	0	0	0.180590038	0	0	0	0.042256699	0	0	0	0	0	0
Zm00001d001536	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001538	0	0.020498773	0	0	0	0	0	0	0	0	0	0.018029015	0	0	0
Zm00001d001539	0	0.741486734	0.3251799	0.407898801	0.517144201	1.041812047	0.076434627	0.867599801	0.08067188	0.270644289	1.814722587	0.724611125	0	0	0.605007161
Zm00001d001540	0	0.0768704	0	0	0.080419001	0	0.142632473	0.367955273	0.150539491	0.168347192	0.538745768	0.743696865	0.068297097	0	0.141123322
Zm00001d001541	0.313711889	0.270346143	0.205201084	0.123551956	0.174046921	0.242741045	0.192932813	0	0.122176978	0.113858004	0.08328437	0.512128539	0.018476509	0.054300314	0.11453487
Zm00001d001542	0	0	0	0	0.178355013	0	0	0	0	0.311136724	0.170691729	0	0	0	0
Zm00001d001543	0.050447358	0.222385218	0.752353495	0	0.033235897	0.030902458	0.029473869	0	0	0.034787612	0.063615736	0	0	0	0
Zm00001d001544	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001545	0.105264554	0.016572637	0	0	0	0.128963481	0	0	0.032455097	0	0	0	0	0	0
Zm00001d001546	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001547	0.324286448	0.38694314	0.233329772	0.425722095	0.157424462	0.125461664	0	0	0.021049217	0.941567315	0.774825374	0.321416146	0.038198626	0.074840882	0.019732599
Zm00001d001548	0	0.351407545	0.086686989	0	0.919074303	1.281821337	0	0.084104062	0	0	0.087958493	0	0	0.611709661	0.645135186
Zm00001d001549	0	0.064977244	0	0.064340264	0.135953633	0	0	0.062205269	0.381745426	0	0	0	0.057730376	0.226217158	0.238578295
Zm00001d001550	0	0	0	0	0.045720448	0	0	0	0.042792952	0	0	0	0	0	0
Zm00001d001551	9.147663873	10.76185607	9.838335797	8.901191632	5.165738212	6.404079934	5.84373631	4.333214449	4.308086023	3.500631313	4.183202435	3.201475807	8.6616789	6.777158323	7.031261987
Zm00001d001552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001553	0	0	0	0	0	0	0	0	0	0.589215171	0.119721282	1.367200296	0	0	0
Zm00001d001554	0.468192942	0.353814446	1.163743134	0.408736949	0.740295466	0.573600416	0.875333531	0.508080706	0.692894096	0.129143051	0	0.414914315	0.261961468	0.564574499	0.378906454
Zm00001d001555	0.048138148	0.424411225	0.717914778	0.960572951	0.697719787	0.707709809	0.224997703	0.232174595	0.415573806	0.066390442	0.728444982	0.319951532	0.107736266	0.422165823	0.77915975
Zm00001d001556	0.056963475	0.358728536	1.76985935	0.497296622	0.375288674	0.977032708	0.465932744	1.44238467	0.491762337	0.078562023	0	0.063101552	0.127487915	0.936680419	0.395145302
Zm00001d001557	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001558	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001561	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001563	0	0	0	0.155709314	0.082255052	0.076480055	0.291777844	0.602169725	0.307952931	0	0	0	0	0	0
Zm00001d001564	0	0	0	0.020517653	0	0	0	0	0.142025224	0	0	0	0	0.036069523	0
Zm00001d001565	0	0	0	0	0	0	0	0.013155943	0	0	0.055035482	0.01208649	0.036628611	0.059804017	0.012614375
Zm00001d001566	10.07354078	10.45093122	9.246870976	4.143210375	3.489806434	3.995033757	3.667235806	2.455122842	2.832097927	1.520214731	1.583055874	1.52630854	1.21634606	1.309044975	1.592970981
Zm00001d001567	0	0.025100539	0	0	0	0	0	0	0	0	0	0.022076345	0	0	0
Zm00001d001568	0	0	0	0.318694764	0.925945886	0.469601836	0.149297542	0	0.157574047	0	0.16112023	0.070768096	1.644236655	0.490225266	0.738589349
Zm00001d001569	0	0	0	0	0	0	0.026317689	0	0.027776644	0	0	0	0	0	0
Zm00001d001570	13.67123392	14.30809057	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001571	0.609796045	1.114897319	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001572	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001573	0	0	0	0	0	0	0	0	0.024867881	0.222476525	0	0.178694661	0	0	0
Zm00001d001574	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001575	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001578	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001579	0	0	0	0.156423577	0.165264737	0.384154407	0	0.226849489	0	0.864903004	0	0.069469599	0.210530501	0.274988747	0.725037251
Zm00001d001580	23.72221078	27.95832713	25.75237855	21.26815616	17.51172793	23.57717555	18.81357104	15.56540549	18.38784807	9.854469766	13.39543485	8.653927151	19.08320839	19.94770285	21.86378882
Zm00001d001581	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001584	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001585	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001586	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001587	0.154118685	0.04567366	0.011267009	0	0	0	0.03178018	0	0	0	0	0	0	0	0.031443923
Zm00001d001588	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001590	0	0	0	0	0	0	0	0	0	0.150437916	0	0	0	0	0
Zm00001d001591	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001594	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001597	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001599	0.154914832	0	0	0	0	0	0.090508991	0.046698006	0.047763238	0.534132733	0.586057719	0.772234293	0	0	0
Zm00001d001600	6.321660798	10.09834314	9.900566587	3.269017535	4.401882186	5.729966257	6.786302914	4.399970421	8.81052179	6.663004645	9.462482063	11.61448118	0.460106759	0.225366717	0.475362769
Zm00001d001601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001602	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001603	6.369186627	6.563466102	4.997249928	0.882597029	0.042385544	0.315277781	0	0	0.039671584	0	0	0	0	0	0.037190146
Zm00001d001604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001605	0	0.042833258	0	0	0	0	0	0	0	0	0	0	0	0	0.03931794
Zm00001d001606	0.100063926	0.141784746	0.186539613	0.218391929	0.065924451	0.091944001	0.43846762	0.150817898	0.030851643	0.051751744	0.173502754	0.124702061	0.069984217	0.054846795	0.057843777
Zm00001d001607	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001608	0	0.094092731	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001609	0.647764201	0.085880148	0.974526046	2.210994599	1.841815735	2.46433615	2.748787405	2.795358961	0.925010738	0	0.085984362	0	2.746871775	3.139397712	2.246711441
Zm00001d001610	0.379756498	0.250540565	0.382064875	0.699147178	1.715605365	1.329296201	1.500282306	1.678966282	1.873380333	0.074820974	1.003378362	0.32051582	0.182125592	0.059471773	0.020907159
Zm00001d001611	0	0.026946744	0	0	0.056381397	0	0	0	0	0	0	0	0	0	0.02473523
Zm00001d001612	0	0	0	0	0.090295019	0	0.160148741	0.619714144	0.253540195	0.141766056	0	0	0	0	0.039613564
Zm00001d001613	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001616	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001621	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001622	0	0	0.218529257	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001623	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001624	0	0	0	0	0	0	0.092876959	0	0	0.109621427	0	0	0	0.087133062	0
Zm00001d001625	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001627	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001629	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001630	0.017527223	0.022075602	0	0.087436769	0.184757501	0	0	0.021133841	0	0.02417293	0	0	0.039227051	0.153711658	0.020263862
Zm00001d001631	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.018464734
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Zm00001d001633	0.032396289	0	0.161048813	0	0.042686863	0	0	0	0	0	0	0	0.253767413	0.142055798	0
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Zm00001d001640	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001645	0	0	0	0	0	0	0	0	0	0	0	0	0.026934066	0.026385364	0
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Zm00001d001649	7.83595115	7.297063384	11.75877285	3.95064912	1.537768223	3.548977693	0.681852797	0.703602278	1.028074573	0	0.473045065	0.207773403	0.25653056	0.205612775	0.216848031
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Zm00001d001653	1.338240503	1.297485746	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001663	0	0	0	0.032291988	0.170585761	0.063443682	0.121021492	0.187322684	0.127730477	0	0.032651259	0	0.028974526	0	0
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Zm00001d001665	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001666	0.165711926	0.521786961	0.875275897	0.258335907	0	0.203019783	0.338860178	0.149858147	0.306553145	3.371024981	0.992598264	0.458920379	1.158981041	0.590392506	0.910031604
Zm00001d001667	0	0	0	0	0	0.038196424	0	0.075185388	0	0.064497898	0.137604392	0.103610302	0	0	0
Zm00001d001668	0.175835806	0.387565235	0	0.438589579	0	0	0	0	0	0.121253283	0.055433648	0.048695732	0.393531826	0.048189346	0.406580375
Zm00001d001669	0	0	0	0	0	0	0	0	0	0	0	0	0.033185574	0	0
Zm00001d001670	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001672	0.160601867	0.075854492	0.249495591	0.350517443	0.793561953	0.221354169	0.70373731	1.403957388	0.495166608	3.986936138	1.797401447	4.825739847	0.539155938	0.132043055	0.34814564
Zm00001d001673	1.042520438	1.283216114	1.118968268	2.74812097	2.622467819	3.338215244	5.869437492	5.628121415	7.597417641	3.463809119	3.615292226	6.246725578	2.015060278	2.389590254	3.068025913
Zm00001d001674	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001675	0.161471267	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001676	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001677	0	0.222339638	0.292521947	0.391395578	0.594431414	0.624788286	0.252113639	0.591262418	0.507989789	0.270514856	0.19787506	0	0.395084498	0.494545759	0.521569121
Zm00001d001678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001679	0.084390333	0	0	0	0	0	0.049305052	0	0	0	0	0	0	0	0
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Zm00001d001684	0	0	0	0	0.186672086	0	0	0	0	0	0	0	0	0	0
Zm00001d001685	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001686	0	0.071152767	0.280837186	0.211365742	0.148874846	0	0.066011723	0	0.348355847	0	0	0	0	0.123858568	0.065313273
Zm00001d001687	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001688	43.41841392	43.01938036	31.71218994	7.275479658	5.046226855	7.528925846	6.920694834	5.262119968	5.876434073	1.289747867	8.142607049	1.825217534	6.428380837	6.297421447	4.376202039
Zm00001d001689	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001690	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001691	0.282366277	0.266731028	0.555632264	0.792348687	0.620098325	0.288281104	0.302449581	0.964663462	0.580393218	0.162262354	0.029672745	0.208528365	0	0.206359886	0.217635967
Zm00001d001692	0	0	0	0.030230798	0	0	0	0	0	0	0	0	0.027125088	0	0
Zm00001d001693	1.547052301	1.673184019	0.773252203	0	0	0	0	0.04055202	0	0	0.127231473	0	0	0	0
Zm00001d001694	0	0	0	0.022200742	0.164188795	0	0.166404552	0.064392173	0.219536758	0.122753161	0.044895481	0.276069291	0	0	0
Zm00001d001695	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001697	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001698	0	0	0	0	0	0	0	0	0	0	0	0	0	0.024978144	0
Zm00001d001699	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001700	5.782259593	4.855184902	5.208609024	7.155481133	5.079316867	5.162027609	8.301677562	5.16150767	5.2792472	1.11274734	2.260965847	0.620671005	3.511142564	2.899102673	3.264807083
Zm00001d001701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001702	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001703	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001704	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001705	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001706	0	0	0.047360696	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001707	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001708	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001709	6.970039144	9.042153796	6.113168958	11.8469498	10.16805437	11.71097367	12.40289598	12.53438431	11.1011088	6.344469843	3.716678744	3.882606792	10.26217357	9.168962001	9.232528244
Zm00001d001710	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001711	60.97960454	54.32027495	75.35780989	33.18036658	19.56900939	29.88334367	11.32029813	8.835162005	10.06773459	13.63248915	12.09271077	12.96532611	4.567552622	5.768334089	6.822652692
Zm00001d001712	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001713	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001714	0.7006034	1.335543357	1.035441259	2.337904181	2.470044012	2.946176982	2.920607309	2.077673208	2.335238642	0.339492398	0.405924789	0.209755852	3.030045171	2.573925139	3.108622318
Zm00001d001715	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001716	0.070470278	0.177515152	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001717	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001718	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001719	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001720	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001721	0.96922927	0.899498418	1.838540459	3.117381808	3.226362328	3.187334847	1.907443218	1.845268234	1.13241647	0.844248604	2.187146999	0.678106232	0.970430394	1.230266819	1.297492036
Zm00001d001722	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001723	0.056029647	0	0.017408453	0	0	0	0.016367661	0.101338501	0.017275024	0	0	0	0	0	0
Zm00001d001724	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001725	0	0	0	0	0	0	0	0.021718572	0	0	0	0	0	0	0.062473565
Zm00001d001726	0	0	0	0.067126653	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001727	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001728	0.044971164	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001729	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001730	0.016294677	0	0	0	0.042941255	0	0.114241981	0.314362741	0.14067099	0.292149596	0.719183862	0.108303022	0.018234267	0	0
Zm00001d001731	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001732	0.869548447	0.243377664	0.120075263	0	0	0	0	0	0	0	0	0	0.324350878	0.211828787	0
Zm00001d001733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.033066552
Zm00001d001734	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001735	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001736	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001737	0.030930393	0	0.038440384	0.038575045	0	0.075787928	0	0	0	0	0	0	0	0	0
Zm00001d001738	0.01591529	0	0	0.079395436	0	0	0	0.076760867	0	0	0	0	0.142477762	0.244256593	0.276003703
Zm00001d001739	0	0	0	0	0	0	0	0	0	0.038956375	0	0.031290026	0.031608574	0	0.09796991
Zm00001d001740	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.553203422
Zm00001d001741	1.051633379	1.616383076	0.044304171	0	0	0	0	0	0	0	0	0	0	0	0.041214634
Zm00001d001742	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001743	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001745	0	0	0	0	0	0	0	0	0	0	0	0	0.046500151	0	0.24020991
Zm00001d001746	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001747	3.728518342	3.278796444	4.028495581	7.687238757	10.57816133	7.572089221	6.240783967	6.824621042	5.17826259	0.833876999	1.461364442	0.483726886	2.894320222	2.135723412	2.621357038
Zm00001d001748	0	0	0	0	0	0	0	0.038970204	0	0	0	0	0	0	0.149463944
Zm00001d001749	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001750	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d001753	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001754	21.92811777	30.17581821	26.29905853	16.71254276	11.11746249	18.13107373	3.954167561	6.093242169	7.178199889	4.853732897	7.169052598	2.848941364	5.755890003	2.473083614	4.32964489
Zm00001d001755	0	0	0	0	0	0	0	0	0	0	0	0.019617063	0	0	0.02047385
Zm00001d001756	28.28531156	16.84787123	33.4686506	25.42827061	34.24185621	25.26808727	16.59455045	25.29502179	22.31099077	57.05228281	88.13137669	52.8094714	24.13478106	14.53469615	17.64528158
Zm00001d001757	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.331590463
Zm00001d001758	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001759	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001760	0.282366277	0.414914933	0.17546282	0.146731238	0.434068827	0.02882811	0.742376244	0.936291008	0.464314575	0.194714824	0.356072935	0.208528365	0.921599382	0.515899714	0.489680925
Zm00001d001761	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001762	0.814456489	0.732722115	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001763	2.133100328	2.808768109	3.133027615	5.038466278	6.345306367	5.187083475	6.042491517	5.942956086	6.756126945	4.56885523	7.193465954	3.956154049	2.748675604	2.49781445	3.026644864
Zm00001d001765	64.1641446	60.79897895	57.78484443	24.81266379	39.61124349	27.49779637	33.08006957	31.86102929	34.6737938	28.06835423	33.9733513	29.56084461	19.14531459	20.71618606	20.20921143
Zm00001d001766	75.2940287	73.36458463	69.59631535	57.10713952	64.10700367	57.38725081	52.58383829	49.59408095	54.11187038	60.35174884	39.04755653	44.64030317	30.90764697	27.8122032	29.50080522
Zm00001d001767	0.28327782	0.49640273	0.596968775	0.906270291	1.444354246	0.392322014	0.733978995	1.069258134	0.850615935	0.067945533	0.217439733	0	0.055129909	0.067508499	0.313268347
Zm00001d001769	0.255103602	0.146047241	0.201754959	0.130153969	1.222314255	0.511423882	1.002661522	1.999379695	1.81617788	0.639690771	0.497163186	0.667945183	0.077855215	0.038134572	0.080436703
Zm00001d001770	0.021311355	0.02684173	0	0	0	0	0	0	0.052565621	3.835639214	0	0	0	0	0
Zm00001d001771	2.649033131	2.613176975	4.178594757	7.589404888	5.44321133	5.185876278	6.970050809	10.31950008	9.938054204	0.485423881	3.655879142	1.108124818	8.654667369	7.523904501	8.031408572
Zm00001d001772	0.237198065	0.054318516	0.026799132	0.753004348	0.880803701	0.184927326	0.151181422	0.416009999	0.132968636	0.475833072	0.353498801	0.047774046	0.048260409	0.118193113	0.398884847
Zm00001d001773	0.530749942	0.284104644	0.571668578	1.075633493	1.171396028	1.219202436	0.542658648	0.255985448	0.343644985	0.121998612	0.217520129	0.029397035	0.133633401	0.30545903	0.16363183
Zm00001d001774	8.028409182	3.601730801	6.157685147	6.045753752	27.82677359	8.61812168	14.29515611	19.84028002	13.37140929	8.668185609	15.67786343	7.995686607	2.498420876	2.045190355	2.634302011
Zm00001d001775	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001776	0.731382885	1.558919069	0.908964802	0.070165308	0.074131096	0.137852939	0.394440418	0.474859151	0.277537827	1.008697577	0.425675669	0.747870248	0.062956995	0.308372154	0.715489435
Zm00001d001777	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001779	3.436164057	7.25009251	3.595228788	3.479626507	2.128382595	2.194837938	1.887467309	2.266383154	1.883441452	0	0	0	7.115222384	6.390756197	3.242653174
Zm00001d001780	4.978859838	5.241416765	4.771447201	6.278030361	7.87038276	6.995254094	8.324915029	8.969520567	8.200010264	15.50555544	16.55601827	21.85682506	4.577691947	4.070884717	5.174711109
Zm00001d001781	43.01159958	37.08895382	46.32152705	43.81710326	36.05412594	47.6277863	21.04212394	17.21757318	24.44184487	18.38489567	22.66629312	12.56849684	15.39575461	19.02294465	21.04351519
Zm00001d001784	41.59718063	37.81640947	40.20549723	55.25387005	38.09925275	59.13327267	23.21890942	19.20085275	23.016926	3.956508276	5.324226109	1.651786925	52.58819797	52.57403407	47.71725007
Zm00001d001785	0.148453675	0.11898597	0.139771716	0.157092714	0.60461117	0.198410252	0.162954901	0.211547039	0.216372654	0.099268894	0.073747364	0.139533541	0.050340736	0.108493421	0.052009911
Zm00001d001786	0.122673086	0.177397162	0.050819491	0.458977654	0.25143967	0.395210496	0.695481436	0.925843457	0.784466341	0.162920247	0.252095062	0.040264201	0.732133986	0.946330499	1.019052024
Zm00001d001787	24.60079104	24.0036181	25.59678322	29.74513333	34.48087065	29.37470076	28.14696814	28.75810428	28.66271909	5.246576831	15.04740354	4.19762499	13.55251961	13.37416737	15.29899527
Zm00001d001788	5.601798396	6.583862426	5.291254115	24.21861984	18.7268123	26.20635917	17.02494948	14.41199473	17.20908417	7.780028755	10.06012914	8.289791419	33.86129293	37.25992072	33.44935824
Zm00001d001789	19.44030072	20.11322207	21.23228714	20.87134271	24.41452443	20.05144329	20.71063967	24.98379768	23.62850769	32.61494021	26.16546823	30.72911331	23.83752751	21.10918935	25.21083074
Zm00001d001790	12.6935183	13.65678875	10.9829062	8.739651231	10.01322708	9.197113993	11.35596144	10.03332035	10.9504773	36.60440476	26.17199822	49.16575448	6.982487253	6.472237442	8.300719598
Zm00001d001791	0.041962044	0	0	0	0	0	0	0	0	0	0	0.00929673	0	0.009200053	0.01940554
Zm00001d001792	0.057401962	0.084347647	0.023779776	0	0	0.011720876	0	0	0	0.118750154	0	0	0.010705773	0.010487674	0
Zm00001d001793	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001796	0.842245661	0.584215044	0	0	0	0	0	0	0	0	0	0	0.027318839	0.053524595	0.028224664
Zm00001d001797	4.943841049	4.714566615	5.00315074	9.248616138	11.41985431	10.50683566	8.382368317	9.464841523	8.31200189	1.488909776	4.033237691	0.972369305	5.283927144	3.62782202	4.7009168
Zm00001d001798	22.83635719	23.67608335	24.61408603	18.23919489	19.67302731	17.96124038	18.97011888	20.19338538	19.18982354	13.91788258	18.04514773	9.714317896	13.7485651	12.39376091	12.40548276
Zm00001d001799	3.338077334	2.691300865	4.359964557	8.472051755	11.976553	9.142994369	9.006031716	9.267665996	6.634038908	1.700751723	3.244204688	1.389608053	5.11537822	3.962318412	5.8995255
Zm00001d001800	2.085442462	2.644862932	3.257741108	5.599102399	6.812443549	4.932477472	8.850465809	9.307397445	9.698315345	7.430103179	8.747770269	3.657750989	4.910445522	4.397635186	4.487243257
Zm00001d001802	1.925525904	1.050923034	1.169935195	2.454797542	5.187088521	3.486126094	4.974949222	5.340015679	6.728337815	1.917946098	6.717881503	2.891413845	3.208146582	3.400780237	2.473523015
Zm00001d001803	0.712170244	1.019645134	1.180116368	2.300178751	2.831207161	2.580231398	1.963069901	1.10825638	1.598962644	0.008394873	0.391466204	0.033714097	0.769695513	0.700633617	1.372276649
Zm00001d001804	0.069706738	0.065846921	0.086631739	0.608546535	0.947191298	0.571114448	1.323600257	0.977086583	1.058477798	0.438625443	0.840567011	0.386089803	0.492400741	0.611319789	1.234042051
Zm00001d001806	35.5820848	39.70184475	36.85047077	32.12177271	16.72317542	28.62270909	20.41403721	16.33154849	16.91253445	4.301817087	6.210032704	3.591416241	44.98005747	41.27183943	38.5397126
Zm00001d001807	6.545554751	6.576019658	6.883321679	6.102022369	9.172788332	8.126480444	7.968233322	6.757414625	6.304097309	2.717277332	3.216083625	1.818779726	7.459420972	6.815493711	7.744721366
Zm00001d001808	12.52476298	11.8711481	14.25553463	16.20951676	19.44099708	14.78694978	13.16762793	13.58069727	13.85496201	0.850178149	1.714541947	0.408444939	4.448377296	4.193549418	6.027922428
Zm00001d001809	6.855099053	6.841129711	6.650339825	17.53287468	18.94484036	18.12075971	21.61747839	21.24836481	20.46124295	27.39923317	34.07027009	42.13548294	19.03380272	19.27536311	18.66485313
Zm00001d001810	5.911884939	11.40175021	10.1025485	2.764892414	2.43430491	3.168754728	4.533399674	4.232480112	5.69608885	6.115097995	6.29022086	6.139610479	5.581903285	2.430305951	2.99028877
Zm00001d001811	1.694298221	1.597853111	1.36920987	1.686280538	4.563950169	1.963268236	3.774274664	4.44817041	4.292305488	2.198585548	2.673336754	2.311412166	1.569082025	1.610312612	1.360573566
Zm00001d001812	2.700854402	3.735724751	3.893690569	29.18861698	18.67384676	23.41509421	12.31393681	15.8330731	12.96023894	2.912212916	2.910465644	2.07799939	34.04806545	42.69970736	44.39707269
Zm00001d001813	2.965221969	3.479175387	4.102194547	5.878026605	9.973425023	7.848765687	10.93255108	9.343039641	9.123105593	9.190680482	9.141457874	7.978456525	4.339828324	4.311296174	4.222100484
Zm00001d001814	21.59061072	19.00345691	21.2087461	27.28290912	39.38528372	26.07579504	31.48018913	37.82614354	34.88138555	15.64678432	20.6531711	8.843001739	19.03740645	18.80025539	17.34605362
Zm00001d001815	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001816	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001817	0.029416318	0	0.045698359	0	0.07752063	0.036039015	0	0.070938768	0	0	0.037094921	0	0.032917805	0	0
Zm00001d001818	0.031675704	0.111707867	0.102353312	0.260730123	1.360638824	0.535537589	0.903118678	1.138171936	1.414150399	0.541706627	0.918713821	0.610546992	0.028356904	0	0.073242873
Zm00001d001819	0.317935673	0.444934618	0.197565695	0.892160052	1.640796991	1.071165427	1.506670668	2.044576276	1.437710488	0.913511894	1.414381655	1.056584129	0.869684998	0.871330622	0.755574996
Zm00001d001820	5.008457474	7.756713629	9.624961022	32.09920043	4.827322422	15.48783385	6.04746202	6.732433194	4.804191084	0.11512481	0.152047652	0.071920358	30.22345784	37.10118695	25.01693321
Zm00001d001823	0	0	0	0	0	0	0	0	0	0.230192831	0	0	0	0	0
Zm00001d001824	20.20965014	16.40614878	21.2330356	12.45403713	19.89356308	7.282231363	14.56587617	13.94518488	14.55651426	14.1938641	21.39456486	28.14407613	3.325771684	2.829822085	3.966178929
Zm00001d001825	0.043650172	0.021991021	0.0867977	0.119764923	0.425614741	0.133693583	0.867088851	0.815798664	0.495261467	0	0.126601815	0.033847576	0.869457808	0.626846155	0.91342656
Zm00001d001826	32.78791191	45.16123879	30.59749255	10.97750664	6.624695321	10.23656126	7.524501703	6.53122548	5.951782617	13.80837241	11.73546103	4.133184912	27.74373457	29.53158917	27.8808529
Zm00001d001827	7.007043091	7.108897527	7.328882152	9.129056478	9.876562609	10.36976049	10.97706664	10.2523643	10.6553645	3.694139006	8.106519395	4.718967486	5.716574074	6.004150847	6.322324828
Zm00001d001828	0.426953768	0.512142715	0.41872007	1.44167572	2.353626863	1.224070842	2.667563595	3.362018351	2.432170642	1.606290435	2.274475442	1.595837852	1.508078836	1.365917653	2.303545162
Zm00001d001829	0	0	0	0.805853801	0.403295291	0.291651555	0.119215201	0.779113254	1.048533768	0.0938054	0.385967117	0	0.266392657	0.037280813	0.707722928
Zm00001d001830	6.775005578	6.531333339	8.788267115	9.121420934	8.075176976	9.455421393	7.365737627	6.074053387	6.19599781	1.448946865	3.651793975	0.925074971	7.943187897	6.260531981	6.18217477
Zm00001d001831	4.030864441	3.599739328	4.017914659	5.734862173	9.611921831	5.747375153	7.229869602	7.767364561	7.214988557	5.815368454	7.27327117	3.539401778	3.760171849	4.053057409	5.16124379
Zm00001d001832	1.04885128	0.022776415	0.539385707	0.969784795	18.7763476	3.699874427	15.53109148	11.38208311	11.21797985	45.89019748	21.84628342	25.38084653	0.688030015	0.555069878	7.923813193
Zm00001d001833	0	0	0	0	0.040209501	0	0	0	0	0.014028933	0	0	0	0	0
Zm00001d001834	4.150644944	5.161257931	5.211549061	6.358540737	7.572577339	6.452635495	6.401097777	6.41733483	6.935779007	4.143359352	5.741337763	2.648454995	5.59840272	5.371357517	6.705407952
Zm00001d001835	0	0	0	0	0	0.012006546	0.125966456	0.011816771	0.012086325	0.162192563	0	0	0	0	0.011330331
Zm00001d001836	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001837	22.62125782	26.65535424	18.40653724	21.42108208	15.44408304	22.67520219	18.38911315	16.86856648	16.6937239	4.44740943	6.184923169	3.133687251	9.734458559	9.578483378	9.18657015
Zm00001d001838	0	0	0	0	0.092168679	0.066653738	0	0.009371459	0	0	0	0	0.008697299	0	0.071885444
Zm00001d001839	0.302618459	0.156943734	0.575204289	0.466215583	0.844399515	1.461187309	0.769621051	0.794170131	0.900100707	0.024550632	0.134686442	0	1.593598932	2.107530942	1.811082633
Zm00001d001840	0	0	0	0.048164322	0	0	0	0.046566091	0	0	0	0	0	0	0.044649187
Zm00001d001841	5.536540434	5.239709109	4.612846088	13.38554061	17.70819135	10.38294617	20.38418108	22.56348352	19.09194957	17.34052251	11.81827821	5.687705515	8.324210891	9.222699507	9.065098098
Zm00001d001842	0.273881147	0.114984773	0.10400509	1.167040009	0.98239172	0.99730503	0.14223561	0.293545175	0.225180941	0	0.14390538	0.008427586	0.229861348	0.133439169	0.263869984
Zm00001d001843	12.35352463	16.11944514	15.92617531	56.67640809	39.4568564	57.5322599	53.39059963	51.65772841	53.70958843	6.860452309	6.584382014	3.266075518	35.07607249	41.38547508	38.96227891
Zm00001d001844	0.143907725	0.175405464	0.259619436	1.152116743	1.437438451	1.393391298	0.547863678	0.811625621	0.681287041	0.921936676	1.814722587	2.154666242	1.64154218	1.536855614	2.039459622
Zm00001d001845	0.076948784	0.010768586	0	0.725085399	0.563285063	0.796081327	0.359658618	0.484531972	0.200342737	0	0.150943155	0.009471152	0.334865066	0.018745324	0.227350643
Zm00001d001846	5.64545502	5.511523897	5.755186675	10.90899016	16.44247526	12.10674166	13.74409116	14.6521524	16.63506384	3.495084295	7.143355778	2.706064452	6.543452863	4.765439879	6.293415147
Zm00001d001847	13.44619303	14.90215718	14.14519472	10.06414572	5.808010218	8.106352196	4.739001549	4.996344105	4.479822535	2.206315102	2.699030508	1.444256674	14.03119807	14.13148916	13.00041476
Zm00001d001848	4.580310412	4.398955082	4.504241462	4.325979043	3.737464708	3.805405581	4.287597208	4.314855863	4.724113575	6.055817538	6.323680694	8.453833774	3.319845956	3.013738738	2.77877555
Zm00001d001849	6.882299222	5.123693426	7.865427619	16.49292043	47.16994184	17.67237698	28.72353609	35.53392533	34.97098467	53.4099122	49.07895107	49.9690418	7.09703454	7.493443349	10.08487912
Zm00001d001850	0.631235588	0.355677382	1.844266559	0.455776109	0.751489349	0.786917508	0.478792197	0.607565839	0.293640417	0.404742378	0.796008328	0.318958028	0.185887603	0.248870942	2.624699453
Zm00001d001851	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001852	0	0	0	0	0	0	0	0	0	0.02752538	0	0	0.044667299	0.021878667	0
Zm00001d001855	4.046194793	4.154172962	3.55051246	4.641010368	6.268498884	5.099847856	3.058858913	3.193389762	3.387206055	2.866280798	3.973672823	2.336172262	2.689251794	2.513495796	3.118635565
Zm00001d001856	75.03079068	75.96455185	3.709930884	6.860225371	6.814859289	4.3228869	8.653689887	11.62319793	9.240967853	10.36186052	10.86162224	6.368364693	3.865924003	3.993071382	4.684352546
Zm00001d001857	97.67144841	107.8183589	147.123255	552.4255043	173.100238	403.7742259	256.1770688	213.6016068	217.3216041	0.175024253	0.843807718	0.690123304	320.7273176	372.3577369	309.6205195
Zm00001d001858	2.492797784	2.350656486	1.922092598	0.17904713	0.378333975	0.223854749	0.503264553	0.393422344	0.434588469	0.494996994	0.608949871	0.093974627	0.401632571	0.350528615	1.282571862
Zm00001d001859	21.33212659	19.91205857	19.81379126	12.73564519	15.04266844	13.24611243	13.47146311	12.98648776	14.50099185	18.19381481	16.99282994	20.23712949	12.70992319	12.39159656	11.81098945
Zm00001d001860	30.20919203	33.61733721	22.84763307	27.22068425	18.57187094	24.47847747	11.50848063	10.40913026	11.47687252	5.271580374	8.393992842	4.414602631	118.3541497	118.9427894	105.6315351
Zm00001d001861	7.960637103	8.980391787	6.941980782	5.371971334	3.461864786	4.612079863	3.152469312	2.434860193	2.363204017	1.676988028	2.419810256	1.888160798	8.227868028	8.381588213	7.68481909
Zm00001d001862	21.79472074	18.62029055	21.02521876	3.82060663	26.74967295	8.458591814	25.76988747	26.13245422	27.49921833	191.8069454	149.1046482	361.7428378	3.956815542	3.040817591	3.25983861
Zm00001d001864	0.948227187	1.036988079	1.284663865	2.244252437	1.372855501	1.868396997	1.484379007	1.072010862	1.163346893	0.346772146	0.696308991	0.471498074	2.052311758	1.697036575	1.814466946
Zm00001d001865	0.663482617	0.637739619	0.867976999	2.482400213	1.97853339	2.502743882	0.67326899	0.547374587	0.732125647	0.457525957	1.188956178	0.580244158	3.614599876	6.048347633	5.712700914
Zm00001d001866	0.548620688	0.601130129	0.501433608	1.273316628	1.280452267	1.64266277	1.46323412	1.670094489	0.986078365	0.396980673	0.620473802	0.253450899	5.417949595	4.919215645	4.875141603
Zm00001d001867	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001868	25.2950071	26.51883779	26.01693244	16.07501276	17.10041786	16.16646775	16.53998448	18.2727977	17.36742864	36.80927231	33.75801313	35.53034094	18.21212968	18.09737262	18.16363663
Zm00001d001869	8.499224943	10.42819531	8.979797221	5.409491651	8.044742265	7.02252769	5.055490568	6.183303644	4.563825341	3.589243261	7.491378906	6.301032098	2.064382616	1.91398794	3.173857845
Zm00001d001870	25.20388825	25.83550574	28.20642675	17.59476991	15.44677115	17.70936084	12.70398581	14.75630227	15.32765727	45.46173863	37.21890502	45.59435984	16.50138412	15.24464642	14.22652536
Zm00001d001871	0.094212179	0.052738039	0.078058115	0.091386822	1.062072693	0.282144645	0.599362183	1.035008033	0.645498583	1.862389148	1.333251396	0.475435891	0.210852906	0.183606575	0.532508217
Zm00001d001872	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001873	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001875	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001876	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001877	4.175940543	4.049066817	3.825470536	2.883028726	4.208691888	3.857375886	4.235752221	4.820437078	4.414365293	2.348290283	3.818891215	2.019249669	2.97162739	2.602268509	2.816308332
Zm00001d001878	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001879	0.441543906	0.502607765	0.261747848	1.131301813	0.572061654	0.964206796	1.146302489	0.56136052	0.660746307	0.435700732	0.430996615	0.188281388	1.759333221	2.21765418	1.950095462
Zm00001d001880	10.84988509	8.967219684	11.62518141	11.04403894	14.07176589	10.1530981	9.580477006	9.513155716	9.029589415	1.018477194	4.051288583	1.153657186	8.171940007	6.531680999	9.128841597
Zm00001d001881	7.754945765	7.63919562	7.804013116	29.08455946	20.36908984	24.88703188	15.73007438	17.05127536	16.67098004	2.522972419	4.584383465	1.046750977	49.32310777	53.40067052	53.14885938
Zm00001d001882	16.27581078	17.32104455	17.7512696	9.448693901	9.750754612	7.984255139	10.03488838	9.590063707	10.40162645	9.126812925	13.20125362	6.878739928	7.048841195	5.894270239	6.287430557
Zm00001d001883	89.12181016	84.30214251	82.65196952	193.2278391	186.8584843	223.4292682	105.2806405	89.63121446	88.49520973	102.7972787	88.3430528	77.94606872	54.56848896	44.51066219	48.34597608
Zm00001d001884	7.717532231	8.020968689	8.145359028	8.081271105	9.997731037	7.123499159	5.264681439	5.018450186	5.239782882	4.937777842	6.863947894	3.030245655	9.508786238	9.50164546	8.668511237
Zm00001d001885	0.183506496	0	0	0.228861341	0.241796729	0.140512853	0.026803418	0.082975149	0.169735802	0.442899995	0	0	0.308024492	0.528061444	0.716035111
Zm00001d001886	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001887	0	0	0	0	0	0.337608486	0	0.03691914	0	0	0	0	0	0.184608907	0
Zm00001d001888	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001889	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001890	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001891	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001892	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001893	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001894	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001895	9.885222276	9.501111023	8.135968564	8.260396955	9.624406675	8.781166171	8.691456402	8.838164511	8.621687441	18.50521164	18.11640698	24.45694665	6.270524557	6.426966624	6.965887169
Zm00001d001896	40.67534476	32.66226488	43.97344357	62.72493259	91.20509935	67.99338319	46.126518	53.05702545	42.55344236	12.9884273	16.58968701	2.855744964	32.09359876	27.96021408	38.14071916
Zm00001d001897	1.382747659	1.210247585	1.252453611	3.8094951	4.436555473	4.383487153	3.952631085	3.852638889	3.372084599	1.648455702	2.837189142	1.099048748	2.16802305	2.218059231	1.941856911
Zm00001d001898	5.807109779	6.130272087	5.67141596	8.335638611	10.19951217	8.130307891	9.973179456	9.657871955	10.1162538	8.2490124	9.142715221	8.336416167	6.951632673	6.702468774	6.439404917
Zm00001d001899	1.455492585	1.789550718	4.306882068	8.017253521	18.08235008	7.472363133	9.374333976	12.57744807	9.509364046	0.716915798	1.00511251	0.191943885	4.304534909	3.096150231	7.29190823
Zm00001d001900	0.007172736	0.009034087	0	0.053673148	0.226827152	0.07030066	0.159245489	0.302704023	0.141535555	6.885099842	4.54965996	18.98211224	0.104344778	0.031452018	0.339999105
Zm00001d001901	5.571144471	6.100099168	7.294961568	12.30172667	15.7882536	9.409239418	10.99156017	12.24233658	12.02671811	3.127465647	7.190141473	1.68500527	7.738037789	6.127744118	6.689149135
Zm00001d001902	1.148146918	1.3417379	0.912052195	1.180964148	1.481659179	0.928090439	1.687385375	2.069469656	1.956101023	10.36610587	9.627456843	8.693263184	1.284813269	1.051028418	1.122144233
Zm00001d001903	8.710823962	8.335021413	9.699779496	15.06908891	16.44973374	12.75154145	12.89914477	14.97701436	13.69202136	4.800719585	9.950525865	3.678100539	13.8097647	13.49071261	15.26215578
Zm00001d001904	0.132730426	0.367783819	0.857780376	1.390499292	1.119307578	1.691174507	1.05464943	1.216324382	0.752989765	0.146445713	0	0	0.356471062	1.280433038	0.398981664
Zm00001d001905	3.739664884	4.787336871	2.793679332	6.93220659	7.700990898	8.837733399	7.402390813	8.254518289	7.636335078	6.39769657	3.143891598	1.561975641	9.421528393	7.661457774	8.150979318
Zm00001d001906	0.16813488	0.051765145	0.139305683	0.00465979	0.044308474	0.068662744	0	0.009010329	0.050687251	0	0	0.004138938	0	0.016383588	0
Zm00001d001907	4.119392518	3.956147467	6.207506691	3.275173876	10.31301756	4.699850637	16.2455969	14.74592883	14.32024627	4.083449776	5.292086491	2.11051519	3.11156944	3.640882079	5.625797516
Zm00001d001908	25.66108622	21.26950334	24.5448137	16.01001799	19.37654434	16.65921488	18.430705	19.58175716	16.39139219	9.321619813	9.482346209	4.863346566	26.7220642	25.03665845	23.30373756
Zm00001d001909	20.23222785	23.18083359	21.8805811	57.15356436	50.14668114	62.24951374	56.11613651	45.19060558	58.32794982	12.86374218	26.20610533	16.261671	60.94834939	56.38966646	66.8139039
Zm00001d001910	1.398336255	1.698309341	1.163743134	3.503459566	2.730867718	3.319234405	3.282500743	1.565641285	2.663792857	1.119239778	1.369742665	0.940472448	2.47291626	2.956317376	2.526043025
Zm00001d001911	0.019255259	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001913	137.5705777	144.7334522	132.3551538	76.77613427	88.77212435	74.85154989	85.07721509	104.3240703	95.07336009	139.5526107	124.2887283	119.3486166	109.1010313	105.2347306	103.2864292
Zm00001d001914	33.46961338	34.43793942	33.45059299	38.31244989	28.85797618	35.48786776	25.70489618	20.62694918	20.69052382	9.842375149	13.3317268	5.740957115	37.22912579	37.49913392	36.96001772
Zm00001d001915	51.27677295	49.71309318	38.85632132	81.85043926	187.2729316	77.47458392	217.4411249	298.8281423	226.7354155	57.11451671	101.5092309	39.70589482	23.63143808	19.72403997	30.362623
Zm00001d001916	0	0	0	0	0.06120223	0	0.009045774	0.009334313	0	0	0	0	0	0.050918075	0.017900127
Zm00001d001917	2.206235675	2.094170288	1.176905113	1.528389102	1.866110071	1.871584712	1.879740661	2.055715544	1.817403294	0.852066686	1.937063436	1.43608817	0.876469574	0.98074453	1.057754061
Zm00001d001918	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001920	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001923	1.400600461	1.567654212	0.98501674	1.066973796	1.17063675	1.102470083	1.232048434	1.361049458	1.025105249	0.755694971	0.965187061	0.458007917	0.672393354	0.583415849	0.678148069
Zm00001d001924	1.296183613	1.075496186	1.839474573	2.271899639	3.813952285	2.226422113	3.888813607	5.000231654	3.953180536	3.708167741	5.168646139	2.313858325	1.744485493	1.387319108	1.822579226
Zm00001d001926	0.015207157	0	0	0	0	0	0	0	0	0.083892705	0	0	0	0	0
Zm00001d001927	0	0	0	0	0	0.012261444	0	0	0	0.055211963	0	0	0	0	0
Zm00001d001928	0.039996644	0.038381654	0.028404541	0.225657027	0.220844157	0.175004863	0.407271547	0.314622776	0.368777711	0.070922528	0.096070574	0.02320815	0.221656335	0.160767662	0.347912832
Zm00001d001929	4.199703617	4.660500489	4.278697479	6.685526916	8.075378686	6.151410438	11.19457644	10.75674435	9.400664485	3.967516089	6.745912265	4.866165482	6.977370715	6.849827254	8.296832346
Zm00001d001930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001931	0	0	0	0	0.042890134	0	0	0	0	0	0	0	0	0	0
Zm00001d001932	59.51962046	54.98082418	71.59193086	95.94767279	89.31395382	107.2792514	126.5727785	132.6446155	140.885908	26.86522845	45.29556192	24.75338102	85.65493398	87.63297436	93.89702755
Zm00001d001933	47.41323471	51.13512217	48.26211677	19.33440317	20.58521222	21.4907126	18.02583276	18.04870496	18.83688406	13.1863912	20.4981165	11.42470207	12.50479545	10.48125968	14.20506396
Zm00001d001934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001935	7.057065328	6.541825441	6.900887732	11.03810195	10.96264938	11.22438494	9.17430395	8.809331958	9.0509098	1.302425825	3.51259356	0.912311597	5.029884628	5.124030606	6.178443272
Zm00001d001936	4.10622962	3.101046678	3.522942781	1.969658251	1.931580566	2.490540383	1.457419959	1.406251811	1.478283533	0.078189691	0.091918709	0.017943569	1.286963308	1.535978317	1.067454133
Zm00001d001937	11.10060469	11.91604223	9.593121567	7.929186563	8.930263572	8.385366385	9.563476027	9.235003508	9.306501214	3.958699197	5.496123967	3.085905155	7.14221693	6.621753138	7.904944442
Zm00001d001939	0.392147262	0.500084814	0.609202214	3.668017903	4.714992872	3.345022087	3.528325407	3.960037817	3.355157677	0.554356619	1.310452238	0.304082058	2.616496317	2.305261525	4.726442189
Zm00001d001940	13.3201894	16.85051815	15.60909906	15.42055308	14.05646136	14.24034629	13.85549339	14.20338847	11.95382344	3.49662641	7.648499122	3.110969532	12.91974529	11.73723366	14.63334099
Zm00001d001941	5.694558975	6.568617959	4.747779681	6.709433676	4.477541474	6.503326031	5.709478616	5.098000088	3.926158154	3.226346182	0.433026426	0.031699367	10.53526503	8.861947656	8.41984128
Zm00001d001942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001943	5.879049521	4.687288486	7.853185919	9.552623271	6.725295698	3.507223787	2.749499516	3.948509617	3.823303274	1.492598187	4.208710556	3.163456771	0.296907503	0.153083623	0.40362135
Zm00001d001944	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001945	0	0	0	0	0.003503278	0.009771956	0	0.003205834	0	0	0	0	0	0.002914603	0.012295459
Zm00001d001946	13.34039979	15.09876917	13.59251981	24.14935094	24.39883886	19.12142914	19.10158439	17.37607887	20.3525106	4.737206104	11.49733318	2.145003652	15.75587294	14.97621988	19.07947137
Zm00001d001947	13.46340519	16.00832481	13.11629732	18.71873758	15.33531142	14.51326224	17.98592093	17.18919226	25.35871696	34.36873901	30.38474945	43.46183105	10.99605975	11.9823897	12.99755852
Zm00001d001948	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001949	2.294954974	1.718175292	1.628066583	3.058712033	2.907135316	3.034875167	2.963631494	3.396640721	2.963936031	1.806700122	2.372344478	0.965617412	1.548592391	1.452259554	1.366496721
Zm00001d001950	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001951	93.73698136	99.58874315	124.5605913	75.46487996	82.91145794	75.64839812	78.7104549	88.86290415	72.28022396	31.21669782	60.35855458	25.90924658	47.55045925	43.00872563	59.35030095
Zm00001d001952	23.23650143	22.52552556	20.70993282	6.407348116	7.455865825	7.43293574	8.628918277	7.155348679	8.030272439	14.47395953	13.0796283	11.43323752	5.914829655	5.732750086	6.541964801
Zm00001d001953	1.784794584	2.247955382	1.036347818	2.896430679	5.301027813	2.509233279	5.94462231	7.082381043	6.102769479	3.591406759	3.542058854	1.592225361	0.544330422	0.424989296	1.268524243
Zm00001d001954	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001955	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001957	0	0	0	0	0	0	0	0	0	2.503847696	0	0	0	0	0
Zm00001d001959	21.27543269	24.02945773	25.41835016	54.56902631	39.70218087	40.43123837	52.78054337	49.22355529	43.13248509	12.04461341	15.22425852	8.099602216	31.57894671	32.05404275	29.81086246
Zm00001d001960	0.44072878	0.054421522	1.772096846	1.379533341	26.49699348	5.113673086	24.91145559	16.15095711	36.26802747	114.6906214	44.49454303	46.61058772	1.856714002	1.127332185	1.718457444
Zm00001d001961	0.307650834	0.04843592	0.262865186	0.023980548	0.076007833	0.282685774	0.202213126	0.185478439	0.071141025	0.822083615	0.048494696	0.362101734	0	0	0.022230397
Zm00001d001962	21.32213831	22.49359923	21.48648098	6.74604446	6.740659442	6.885093536	6.070489605	6.232197895	6.172993797	5.270603883	6.268788718	4.481473048	5.591279196	5.872847144	5.696316712
Zm00001d001963	0	0	0.078660416	0	0	0	0	0	0	0.174582273	0	0	0	0	0
Zm00001d001964	0	0	0	0	0	0	0	0	0	0	0	0	0	0.034934468	0.036843385
Zm00001d001965	0.081376392	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001966	27.891005	25.90285752	26.69210101	27.23817263	38.96330406	28.40115184	30.26344111	34.01687443	30.31753838	57.51903955	49.82533702	72.60885267	22.14512293	19.92700861	20.04020864
Zm00001d001967	8.332673567	8.384167759	7.986307479	9.587784926	12.03405003	10.20866525	10.92494014	10.42195299	9.179176568	7.784782265	10.24062204	7.952881572	10.76798749	9.242945619	9.775219861
Zm00001d001968	21.99007399	24.57374375	20.24326785	21.36946445	16.43221511	19.70237962	18.67084218	16.25305709	17.35792378	11.20844578	13.00279099	12.10895852	15.90961093	15.25653202	13.34308568
Zm00001d001970	0.302015477	0.177515152	0.150138289	0.527324842	0.636719517	0.715353213	0.258797064	0.55838161	0.422131356	0.27768609	0.126950402	0.133823616	0.540744026	0.331079971	0.442283401
Zm00001d001971	0	0	0	0	0.011244604	0	0	0	0	0	0	0	0	0	0
Zm00001d001972	7.921483196	6.434693108	7.897997348	14.14187268	21.55564319	14.45921173	15.24681704	18.73812227	16.92628402	2.332310054	7.228172389	1.400065688	5.796716114	6.888503912	6.050662433
Zm00001d001973	2.433994863	2.069856658	3.510738546	5.162689517	7.374093235	4.984472071	3.321603524	3.556088075	3.505740974	0.073508325	0.492887616	0.078723184	1.182928798	1.080925551	1.396744926
Zm00001d001974	3.497292398	2.847581554	3.847043113	6.388306547	7.709418488	5.123200301	3.637680894	3.295814362	4.078958922	0.225332934	0.840833189	0.210338507	1.793725309	1.621643102	2.501565864
Zm00001d001975	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001976	0.574475835	0	0.344947091	0	0.518812671	0.055355961	0.218730062	0.22570703	0.382105904	0.178044244	0.203492264	0.035751588	0	0.007075962	0
Zm00001d001977	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001978	6.502524529	7.215274239	6.79212566	5.688120965	5.090295702	5.961991774	5.126841441	4.612717648	4.816184093	4.719456193	5.268993638	6.165583688	4.489546871	4.531477172	4.448136265
Zm00001d001979	45.04343228	44.62645644	44.33149882	17.27353456	27.1289463	17.80052416	22.88970905	25.78836222	26.10052381	24.17583297	25.73746159	16.22729435	9.995831902	10.94566288	11.05198977
Zm00001d001980	2.89834043	3.387538786	4.018385205	4.310980454	5.091984957	4.746380484	4.050438061	4.577698099	4.789892896	2.289904416	3.446748494	1.839266832	4.00935004	4.140553214	4.153515956
Zm00001d001981	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001982	5.385637605	6.56353072	6.422303018	10.19747003	12.46892129	8.361209503	13.65631994	19.74446821	18.33940747	50.79091162	31.92262006	40.11930263	11.98020403	11.95126531	10.99096342
Zm00001d001983	23.09382154	23.5510443	21.25508244	12.76118186	21.23460786	15.92726271	15.87572628	18.22302121	17.20276661	44.56899327	30.12357612	28.18749537	13.63322538	12.8314123	13.12247906
Zm00001d001984	64.45723063	53.82947987	47.69429525	8.747323862	10.15275219	8.846126618	23.82899297	27.9237765	13.53756591	7.697275983	28.43049618	11.39381102	5.774843595	4.610147629	5.290579431
Zm00001d001986	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001987	4.874156214	4.522997977	5.874329285	8.203210107	7.695239597	9.250869097	6.99653053	5.592602603	5.656517315	0.366114281	0.762496707	0.179706686	3.061360278	2.740320707	2.76218075
Zm00001d001988	26.25964506	26.33312779	25.52747308	29.28155484	38.48529041	31.44699233	35.6674744	34.91862159	36.13872242	32.97960256	42.58836051	34.56890614	22.75032066	21.65411648	23.63150897
Zm00001d001989	0.759512996	1.828812143	0.583012492	29.92137656	25.93171148	29.77623491	47.37635467	45.11660732	31.1862726	0	0.4225457	0	24.12271324	16.77453822	23.08888234
Zm00001d001990	0.217003713	0.614963204	0.269692853	2.841694981	1.572638251	3.589099743	2.472296194	4.121099056	0.869783726	0.448925845	4.65202695	1.021644178	3.824637436	1.724681406	2.257973153
Zm00001d001991	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d001993	1.702149678	1.817179808	2.316906785	0.727833339	0.968333779	1.105575125	0.543018173	1.23795861	0.299888947	0.007452524	0.640532518	0.005985918	0.247921162	0.159939107	0.193668053
Zm00001d001994	2.770637243	3.187540673	2.693012847	4.858215376	4.642409435	5.714767407	5.866137948	5.315295334	5.293744425	1.106427037	2.61778948	1.575820976	3.896363849	4.478839703	4.714014126
Zm00001d001995	10.33542085	11.50618105	10.03134324	23.47516076	16.51709355	23.0410823	12.45083839	9.684221071	9.747277893	2.438226853	5.104371842	1.816615779	54.91006678	53.72128023	43.90297829
Zm00001d001996	0.274717466	0.10176696	0.160668083	0.82630847	0.042585949	0.376162542	0.642014724	0.292276529	0.338802826	1.203503329	1.752515785	0.859255178	0.958419783	1.098329758	0.74731972
Zm00001d001997	3.793878022	3.608182165	4.838761096	3.627989223	4.06623456	3.9027104	3.773990606	2.907442053	3.94228337	3.27977377	4.853942455	4.484498657	3.280028869	2.631192891	2.838907993
Zm00001d001999	34.5427716	39.94983184	30.0220586	15.8586126	15.75021036	13.35204184	12.87918402	13.395389	12.18068919	49.66449995	31.57981367	56.39742957	21.19064992	22.32504264	22.30445394
Zm00001d002000	28.43020634	38.48228599	30.14798671	723.8006179	246.5984038	696.3029534	309.2806784	157.8729042	260.1237086	11.69311154	10.11843823	17.18700586	277.3789642	272.2304673	315.9353574
Zm00001d002001	20.99089284	25.57567177	30.16647314	53.97748083	19.69390511	36.24639476	14.87122127	17.05380542	8.823330168	1.497970177	0.803931509	0	108.7808796	92.66503348	99.55750711
Zm00001d002003	3.846044531	3.503914731	4.192819007	7.807297286	8.019261738	8.117191697	7.724511992	8.099806983	8.391885386	1.837828445	5.549110803	4.546891984	4.682207532	4.75852049	5.061653947
Zm00001d002004	0	0	0	0	0	0	0	0	0	0	0.111090549	0.006099224	0	0	0
Zm00001d002005	0	0	0	0	0	0	0.0099346	0.041005961	0	0	0	0	0	0.009320203	0.009829485
Zm00001d002006	70.9017777	63.95799803	53.00124794	77.94318203	98.1908849	84.44147032	111.0654094	121.3431325	112.9041716	117.4583834	138.2706201	169.621466	147.1066779	142.9396555	128.2111662
Zm00001d002007	0	0	0.147424293	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002011	0.266495788	0	0.33120175	0.265889589	0.070229459	0.130597522	0	0.32133326	0.098598965	0.036754163	0.268847791	0	0.059643469	0.116856816	0.770263746
Zm00001d002012	12.75215937	14.15276662	10.61320699	9.197130455	6.999381551	7.881944534	11.74300739	9.716492853	9.809945992	3.138708428	4.960169121	1.551404307	8.968537566	8.725858402	8.228636055
Zm00001d002013	0.118708254	0.311486427	0.209002204	0.703226978	0.052138513	0.593854902	0.092473731	0.10735135	0.292800399	0.013643188	0	0.054791507	0.52028353	0.140976503	0.251612059
Zm00001d002014	1.571406198	0.039583838	0.351530685	0	11.01536962	0.654563785	11.49453785	9.776952244	6.124015708	5.331381413	4.953984075	7.032559191	0.738550677	0	0.181676001
Zm00001d002015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002016	0.471421859	0.554173738	0.039058965	0.195978964	1.946324707	0.462045024	1.909635681	1.174750076	1.395345351	8.928980253	3.329077298	6.649598047	0	0.137810452	0.145340801
Zm00001d002017	0	0	0	0	0	0	0	0	0	0.087291137	0	0	0	0	0
Zm00001d002018	2.375087249	0.899861411	1.367891294	0.891039952	5.928288877	1.395761011	5.821338888	6.565818835	5.143857863	4.846877342	5.892722074	15.2513243	0.38894618	0.296350867	0.781360766
Zm00001d002019	0.184865365	0.1884884	0.109405343	1.339420944	3.537814669	2.038368302	3.682544512	4.691631121	4.006114672	24.14833692	9.091725107	4.007944046	2.413486599	2.808231828	3.765711826
Zm00001d002020	7.135424722	4.556481751	7.327838711	10.61065641	46.35144319	14.54529896	29.55189135	37.32285812	34.04129263	69.64913839	48.82947999	45.02720113	6.009079481	5.054057308	8.688575055
Zm00001d002021	23.66918681	21.11497902	24.91961964	61.0706085	86.8668183	70.04182529	54.21762843	53.04978421	52.18215763	70.39157248	63.5959449	71.28563224	17.15291941	14.71439785	18.20063208
Zm00001d002022	7.955161788	8.655744775	8.280617165	11.6076878	12.49677675	11.06609327	7.585265862	6.964452375	7.08641062	1.894869089	2.9710891	0.961403947	3.245423687	3.08685129	3.695886404
Zm00001d002023	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002024	130.1952458	121.042225	117.8726327	81.04505679	70.62311056	67.14518948	78.49765478	78.22772646	78.32240134	38.30944558	53.32626751	36.80239342	46.44445076	45.84191564	44.51229989
Zm00001d002025	0.019040716	0	0	0	0	0	0.005562269	0	0	0.065650715	0.03601643	0.00527311	0.021307172	0	0.005503416
Zm00001d002026	0	0.006495273	0	0.012863199	0	0	0	0	0	0	0	0	0.00577086	0	0.059622075
Zm00001d002027	18.8587377	17.2529993	16.59890223	18.4092414	21.88244471	19.31998048	17.0903394	18.02641484	18.75971966	3.415740124	11.2547469	4.639086442	12.25496475	12.72601907	12.64048475
Zm00001d002028	55.29344758	57.17515462	62.11418546	141.4101627	177.1184361	111.8514002	133.1789448	166.360331	167.3034258	70.24423955	133.4426907	60.68983704	99.93993253	105.5308075	117.8400677
Zm00001d002029	15.83459401	17.38926721	16.1815712	16.94399667	17.22863695	14.27050599	17.2855928	17.77054142	15.54493944	9.282405162	15.27590931	9.818878883	18.77294566	17.01258677	18.77012554
Zm00001d002031	0	0	0	0	0	0	0.290451581	0	0	0	0	0	0	0	0
Zm00001d002032	2.413353283	2.749740103	2.170953983	3.683473837	3.053730803	3.207696773	3.858461007	3.110475309	3.037041939	0.735773558	1.754855815	1.13921759	2.538344425	2.469131878	2.197986128
Zm00001d002033	35.27001623	35.61448952	37.29157384	24.1819584	20.90804931	25.20875843	23.45336172	23.79049981	22.91647521	26.06257024	58.05520418	61.38854602	18.2085232	15.84486175	16.01013466
Zm00001d002034	7.917793222	7.981914206	9.927338639	8.845503853	12.11524164	9.233006781	8.806174354	7.125089257	8.977503132	3.135322643	4.555408408	2.164713839	9.261024134	9.53323032	8.613987557
Zm00001d002035	2.433088302	1.500096926	1.55421625	0	0.381127016	0.041690435	9.314512894	8.975635779	12.14957674	667.3127642	387.1513584	694.8788472	0	0.046630015	2.31136642
Zm00001d002036	14.64536772	14.34493963	11.51781967	9.103409398	9.248695393	8.860936669	8.38893341	9.992005911	8.779927445	9.459649721	11.77089827	6.230700844	7.354354075	6.575505682	6.888526197
Zm00001d002037	0	0	0	0	0.053493263	0	0	0	0	0.097983815	0	0.134916459	0.124932478	0.233648568	0.17601127
Zm00001d002038	0	0.083994974	0.145042132	6.050731021	6.773502888	5.208571579	29.22226271	33.45126258	25.88691774	28.28999282	14.82207869	2.788780792	82.48157125	80.74642126	82.74278367
Zm00001d002039	0.664061478	0.942595875	1.080746804	3.122139821	6.576377003	2.653775369	6.053687247	7.91174761	7.871230627	42.55796242	26.12563904	33.48225766	1.757504944	1.62926062	1.998576083
Zm00001d002040	0	0.007358534	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002042	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002043	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002044	0	0	0	0	0	0	0	0	0	0.293951444	0	0	0	0	0
Zm00001d002046	0.151077042	0.077984464	0.196993041	1.569109837	2.878300957	1.492857429	2.344133683	2.666769172	2.907812082	0.208360148	0.390395484	0.307277123	0.67069729	0.475127749	0.879055128
Zm00001d002047	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002048	0.023409647	0.014742269	0	0	0.046268467	0	0	0	0	0.064571526	0	0	0	0.051324954	0
Zm00001d002049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002050	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002051	6.262727158	5.821651664	7.136072898	6.129942031	40.2309458	13.07229884	21.76381358	26.44568137	19.70260859	0.287312541	1.830709429	0.223559785	1.602705211	1.727060277	4.523472883
Zm00001d002052	0.402257185	0.902243475	0.198600904	1.38133178	1.916831145	4.057327051	3.992099519	3.116155514	0.468911401	3.427470114	3.585558292	4.779541991	12.73337574	14.05058382	22.80725804
Zm00001d002053	3.716751152	3.889406594	3.676966584	7.441192268	8.007963184	6.041165784	6.842243057	6.07202512	5.366753217	0.637563756	1.189224202	0.614514665	6.435323225	5.000133524	6.078610322
Zm00001d002054	0.33083413	0.355409339	0.628835436	4.210967225	2.30782501	2.777614084	1.182479034	1.231929967	1.272031913	0.080519084	0.184055494	0	7.436946246	7.488109938	9.190995345
Zm00001d002055	0.572747505	0.250913948	2.166385215	0.931703272	0.131248498	0.091525312	0.116392255	0.360314672	0.030711153	0.034344054	0.125609214	0	0	0.027298519	0
Zm00001d002056	0	0	0.004630867	0.004647089	0.014729237	0	0.069664048	0.004492885	0.027572237	0.020555885	0.018795164	0.004127657	0	0.008169467	0.1120063
Zm00001d002057	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002058	4.987468671	5.070029971	4.40498327	7.325258173	5.148404618	7.05117785	7.159093595	5.61690538	5.578510324	1.478129912	2.681756712	1.233985909	8.40475881	7.891243429	7.141885453
Zm00001d002062	0	0	0	0	0	0	0	0	0	0.474336742	0	0	0	0	0
Zm00001d002063	12.22863691	14.63191277	14.68723532	27.5352499	16.44031892	24.95398303	20.79742923	20.33190729	17.82656883	0.303048474	1.072220788	0	48.85700373	46.68870783	52.96217252
Zm00001d002064	0.139564305	0.259851296	0.17345093	1.051919048	0.751576784	0.780585386	1.921518337	2.282792553	1.347037789	5.665671315	3.703548361	1.982951572	1.330899134	1.869203357	1.86611008
Zm00001d002065	284.1342382	302.1355833	309.7351372	373.2021807	281.0672277	397.9296352	327.4478413	319.5830205	386.3016466	1348.676495	840.456078	1233.049221	142.4004886	125.8233111	172.8958849
Zm00001d002066	32.97100165	32.62721443	30.99782232	47.58147608	47.17914753	54.01927438	64.08952442	59.69052204	73.0952862	272.4979879	281.8752065	375.8598881	19.07765578	17.84153178	17.43657046
Zm00001d002067	9.337343203	13.14038917	0.105907879	0.334019357	0.112285836	0.089487794	0	0.044036677	0.315288409	0.587641133	0.322383932	1.321592615	0.054491718	0.013345402	0
Zm00001d002068	0.116216053	0.365936373	0.091912325	0.032940823	0.07656585	0.064718439	0.037035943	0.025478201	0.110752392	0.007285504	0	0	0.011822681	0	0.061073462
Zm00001d002069	60.46076707	109.2536954	61.96977295	137.9874214	94.95676205	103.351234	93.80572859	84.78602244	82.21089972	219.1697735	237.6829392	104.0735367	96.35714471	94.56841684	122.525675
Zm00001d002071	688.118774	876.0741688	593.3401415	366.077177	157.2503694	187.5902799	244.9474999	147.7777638	187.5143514	2.144281094	12.03410155	2.197418757	241.8370746	160.4478458	176.0953415
Zm00001d002072	0.43709096	0.611686313	0.482860384	1.059957275	0.12798477	0.208248535	1.191728511	0.849107443	0.179684792	65.17159353	30.98888624	90.38204556	0.326079213	0.026619692	0.336891199
Zm00001d002074	0	0.055189005	0.054457211	0.765071726	0	0.429464927	0.0512014	0	0.054039817	0	0	0.194158622	0	0.048034893	0.050659654
Zm00001d002075	6.55609359	6.742496194	6.182884112	6.901762284	10.17883332	7.042799056	5.542694356	6.74083117	5.613176759	69.94453802	63.04905452	65.4004191	24.04418909	22.04390894	25.10910914
Zm00001d002079	104.7947812	89.74735729	91.53460719	53.73386873	63.6299721	61.85483185	84.86237493	87.41725271	84.146617	114.8433934	96.14801946	84.76059874	31.14131667	28.74954813	31.71574675
Zm00001d002080	12.47430909	12.1343195	10.66214863	15.83353327	13.11839031	14.08334162	17.89084725	16.3092078	17.35104765	11.97991332	12.52856556	8.978558907	26.17631411	27.01204301	24.51260682
Zm00001d002081	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002082	0.920739539	0.701676686	0.759002598	0.049420782	0.128999483	0.119942634	0.098055265	0.143342576	0.120739602	0.109303684	0.161669659	0.061971857	0.091295693	0.127765445	0.17247604
Zm00001d002083	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002084	5.664447921	6.79575338	5.929736765	7.627109329	7.091454775	7.576190769	8.109892224	6.692664867	7.37362499	2.520269693	3.333040486	1.721410343	6.236708779	5.734981977	4.889264533
Zm00001d002085	11.2578896	11.68637146	9.700770207	15.6149704	26.47057772	15.74208956	24.78059123	32.07281517	31.1500167	11.27302677	9.80159689	6.308334102	16.94687834	17.27204451	20.89195361
Zm00001d002086	1.680663582	1.20761819	1.581958925	2.762663561	3.470626089	2.869158064	3.00051351	3.136088278	3.092096922	1.694735777	2.821195091	0.927829352	1.393580106	1.570572568	2.045008333
Zm00001d002087	2.024825866	2.648599552	2.649862221	4.874084967	5.059566357	4.686409562	5.096896585	5.741888193	5.469708959	15.32884694	12.5268966	17.61979101	7.982326812	6.707193405	7.812651576
Zm00001d002088	0	0	0	0	0.03063581	0	0.10867236	0.11213875	0	4.906118162	1.641891865	10.63711879	0	0	0
Zm00001d002089	8.637852826	10.30507659	8.515873723	24.96205649	12.32418382	20.89643475	12.56226198	12.76150394	11.02420528	11.28652725	10.99137388	18.04985557	48.49961626	49.79729381	44.72310363
Zm00001d002090	0.731779741	0.643032064	0.902407954	0.488158391	4.125995309	0.966028783	2.525482522	3.604679175	3.379080625	1.916782964	2.56809601	1.721808327	2.443959192	2.039709061	2.997201708
Zm00001d002091	1.037971859	1.859091995	1.21151573	6.96969993	3.270991811	5.79256937	2.674770621	2.707742913	3.003141163	0.005443096	0.119444789	0.008743864	9.354020889	7.640543277	7.779708308
Zm00001d002093	0	0	0	0	0	0	0	0	0	0	0	0	0	0.035180485	0.111308536
Zm00001d002094	0	0	0	0	0	0	0	0	0	0	0	0	0.149985782	0.073465131	0
Zm00001d002095	6.982244086	6.789093267	6.386679377	9.439419896	8.868926201	9.555046269	8.933833738	8.292712095	9.162150187	4.082978267	5.344534117	2.413199298	8.954105213	7.876152407	8.952321545
Zm00001d002096	0	0	0	0	0	0	0	0.02667378	0	0.061019047	0.027896221	0	0	0	0
Zm00001d002097	0	0	0	0	0	0	0	0	0	0	0	0	0	0.034611748	0.03650303
Zm00001d002098	0.741039782	0.454705246	0.472290473	0.888646797	1.226794941	0.814759729	0.499560572	0.53840627	0.363219675	0.104822157	0.167726271	0.252581612	0.75482768	0.447836086	0.955598089
Zm00001d002099	23.79495791	21.1042757	19.99668779	14.58008117	17.37644295	15.83007719	17.13403665	16.70841494	17.91960341	23.09965201	19.66228658	20.80215476	11.3876128	10.72138818	10.65068567
Zm00001d002100	0.135358752	0.014207071	0	0.900339004	0.431024615	0.621873718	0.909458539	0.829660206	0.695562005	0.32669356	0.213364661	0.137448925	0.23982875	0.234942943	0.339068576
Zm00001d002101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002102	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002103	0.781149417	0.933117055	0.981941612	3.447439393	3.474185127	3.301564357	2.9815511	3.028076713	2.978453898	0.16360657	0.685868876	0.158683667	2.239178695	2.249995924	2.137459196
Zm00001d002104	21.95998966	22.97504093	25.82341207	55.25186924	32.47302414	44.53661827	24.95973094	21.54966828	24.65039917	2.24077762	6.738173954	1.573628793	51.41323867	59.21891837	58.60254694
Zm00001d002105	85.85872463	86.96642604	109.2435851	187.7413151	234.9807481	184.0336741	180.6537117	210.3490363	205.9885753	113.8741973	176.5489836	80.50823216	118.2332363	107.7575656	141.8425283
Zm00001d002106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002109	0	0	0	0	0	0	0	0	0	0.130936705	0	0	0	0	0
Zm00001d002110	0	0	0	0	0	0	0	0	0	0.479575401	0	0	0	0	0
Zm00001d002111	67.37380549	72.15470063	65.6429175	21.95081752	24.74478229	25.01337458	24.52663589	21.32113524	22.59498603	20.61618018	23.8054657	13.85664743	15.22526328	14.57407425	12.75822435
Zm00001d002112	0	0	0.1083933	0.135966267	0.057460467	0.053426259	0.101912835	0.131454515	0.026890627	0.060143175	0.027495797	0.048307408	0	0	0.050417263
Zm00001d002113	2.62709107	2.87076035	2.519994605	3.695403282	3.728753199	3.84593583	3.906804879	3.485333531	2.82741098	2.500512582	2.424443444	1.6214988	2.876862716	3.025933062	3.066365186
Zm00001d002115	0.020761175	0.078446331	0	0.362494121	0.314592783	0.114458762	0.351761785	0.500665033	0.166427866	0.171798501	0.261805081	0.298977741	0.325253905	0.17069347	0.372042653
Zm00001d002116	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002119	0.018080653	0.019926068	0	0.011274703	0.023823913	0	0.015845433	0.021801152	0.025085767	0.018702151	0.002850035	0	0.010116416	0.069372264	0.041807405
Zm00001d002120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002121	0	0	0	0	0	0	0	0	0	0	0	0	0.180437823	0.025251705	0.173104934
Zm00001d002122	65.00537698	69.62498844	64.48534595	42.52095064	31.22622522	38.4450055	29.071854	25.12052292	23.47235358	10.91781053	20.27162998	10.86645846	56.76961842	49.19408826	54.92325995
Zm00001d002123	0	0	0	0	0	0	0	0	0	0	0	0.011877939	0	0	0
Zm00001d002124	0	0	0	0	0	0	0	0	0	0.146540561	0	0	0	0	0.02047385
Zm00001d002125	2.153183998	2.161719672	2.171710765	3.670987973	3.703365707	3.926606262	2.164119587	1.791633964	2.010348264	0.304173954	0.579416338	0.147215203	2.002891828	1.951239954	1.972866098
Zm00001d002126	9.847160902	9.12770878	9.599674142	15.02346785	13.33954763	11.86926359	14.13251888	12.782286	12.70714733	10.71972245	5.659419379	4.259115386	10.04426786	10.59770744	12.887693
Zm00001d002127	0.031356041	0.118479149	0.03896938	0.234635365	0.144606645	0	0.109918603	0.094520621	0.135347432	0.194603176	0.57334412	0.138939197	0.087721042	0.15468117	0.108755588
Zm00001d002128	2.404085684	0.79399704	1.228319736	0.559677323	1.450118954	0.687244578	1.392101852	1.198162445	1.739410579	4.560833965	8.515509507	4.195920325	0.286959901	0.550514791	0.82765878
Zm00001d002129	3.550743961	3.880683832	4.659921934	8.537480559	5.359629737	10.22543345	28.81684055	26.24260751	24.4142112	1.202847111	1.632491721	1.648760294	22.78933364	28.76981049	28.95721295
Zm00001d002130	72.83418654	89.08217849	93.94968582	49.06804616	21.07658693	38.67061944	39.67657282	42.56657762	35.60462677	8.49189499	8.996792619	7.693046968	93.26700868	91.54377288	77.99800807
Zm00001d002131	2.637743956	1.634113988	2.77180796	5.482799728	10.73767122	7.671759347	11.0382991	11.76533378	8.873210847	14.41844184	9.884189026	7.340566442	3.227694025	3.091412707	4.946289424
Zm00001d002132	0	0	0	0.122884107	0.032457399	0	0	0	0	0	0	0	0	0	0
Zm00001d002133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002134	0.346107188	0.072653881	0.119484176	0.983202483	0.734742382	0.117785739	0.718980003	0.324587267	0.237136751	0	0.315215527	0.021300102	0.473372847	0.147550221	0.333455951
Zm00001d002135	89.4981533	92.07449077	92.05735321	64.02229877	59.35576122	61.10223465	61.65433586	60.52894154	57.36656116	29.28967403	52.9410011	32.33789648	63.9127566	67.33655191	68.52856731
Zm00001d002136	0.101915482	0.018337561	0.072377635	3.758663649	1.880040384	5.0122536	0.66349163	0.017555268	0.107734332	0.060239251	0	0	1.384852746	1.707770902	1.767423075
Zm00001d002137	8.151321995	8.476152126	5.939209428	7.072802774	5.081342217	7.096147796	8.37618663	7.676914614	6.471865906	0.083428697	1.239592033	0.117268371	5.432339013	6.34953275	6.294349939
Zm00001d002138	0	0	0	0.077325033	0.163390987	0	0	0.037379583	0	0	0	0	0.242834123	0	0
Zm00001d002139	0.030860573	0	0	0.298281753	0.142321664	0.64274322	0.081136305	0.241870374	0.076119291	0.021280909	0.077832346	0	3.945506339	3.746721675	3.871175191
Zm00001d002140	4.00854081	4.747617163	4.766238512	4.952501335	6.418517396	5.835774434	6.048086417	6.043147999	5.533410427	3.711489804	4.191722904	2.830481146	3.478373965	3.330419266	2.834855868
Zm00001d002141	25.32315079	24.63292142	27.10219801	41.40493574	36.01694912	42.72950201	30.2735378	25.70171099	27.98048448	6.840754342	7.802027625	4.946172333	28.07963976	27.63834077	28.88791704
Zm00001d002143	4.469441859	4.60403665	3.034942246	4.376042123	5.689287465	6.132263615	10.37419145	12.35720087	9.44034039	49.5289392	30.01674647	22.53733543	6.998633888	6.82280234	6.219446761
Zm00001d002144	0	0	0	0.036667032	0.348655284	0.432235668	0.515317321	0.141801258	0	1.013703521	0.037074978	0.227979801	0.263200856	0.99912578	0.849774842
Zm00001d002145	3.451608797	3.806404008	3.133237913	4.572500476	4.202185217	4.569716679	5.111204375	4.276928863	3.972350967	1.085883457	1.895482493	1.286258515	5.624597696	5.553604902	3.806635367
Zm00001d002146	2.158947161	2.394166139	2.245081252	0.730048711	0.81277989	1.164419407	5.560302363	5.464440738	5.806444015	0.130213298	0.34130487	0.244039152	1.197400302	1.518008782	1.753775649
Zm00001d002147	1.589678363	1.854216658	1.365780238	6.387348779	3.415164876	4.945143158	2.334038361	3.108533767	2.864055676	0.562405583	0.63625385	0.512979251	4.671549063	5.515901677	6.432597935
Zm00001d002148	22.58421368	22.66117767	21.80629777	25.29708507	34.89824502	25.30051246	32.34827827	33.68596388	31.96252932	44.73059205	44.26332473	44.60952723	25.03754974	22.91660858	24.3002984
Zm00001d002149	1.811232464	1.937566585	1.711583204	2.455315824	3.071887355	2.61389671	4.324868784	3.765022848	3.943509518	4.056389295	3.734341732	3.714580854	1.30749829	1.202564653	1.166644668
Zm00001d002150	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002153	0.492926216	0.51266531	0.297023104	1.238826875	1.800893586	1.445704932	1.919947626	1.670502868	2.040198685	3.471235405	3.263377808	3.028047168	2.348479912	2.644503908	3.207789775
Zm00001d002154	1.680454114	1.777318738	2.017757518	4.655207316	4.028626027	3.755077349	2.983092471	2.726054426	2.970690511	0.345289246	0.813201159	0.592496261	2.504479564	1.971083323	2.591907584
Zm00001d002155	13.78316215	13.85573235	16.61307976	15.07593969	21.13204433	14.96647597	17.46955853	22.32623489	17.1167803	22.40533761	20.72816466	15.09123437	13.92078562	12.2524372	15.54700345
Zm00001d002156	29.89158333	28.17812648	33.11406843	33.53200078	46.12297798	31.09057653	35.8435404	42.73923146	39.44636463	8.681103526	17.27578096	4.843044127	20.06341055	16.8446362	17.76507419
Zm00001d002157	0.831791143	0.608887124	1.245804272	2.48260404	2.126440659	2.630388926	0.947026215	1.062956387	1.209952352	0.254928249	0.564800556	0.015750777	0.723956332	0.904045167	0.402748201
Zm00001d002158	53.14884198	38.37186134	55.55369752	4.342365364	13.15618721	7.841353996	11.96617	30.74617723	24.75387945	5.508168794	16.01305774	4.76452169	1.432448478	1.57165853	1.243153758
Zm00001d002159	215.4431331	189.9582084	312.2785024	56.95482281	90.64419196	85.2899069	144.6799063	173.5538028	155.6898634	136.5976278	151.4295907	119.1679525	69.33172544	44.74808014	43.15771381
Zm00001d002160	78.98935154	48.39735108	99.56660598	3.367934792	8.599207137	6.75479403	9.795270392	17.50195155	6.938445677	0.853513335	2.128378343	0	0.062956995	0.986790894	1.235845388
Zm00001d002161	16.09883621	11.69387974	14.82050446	0.849852705	2.02024557	0.626135781	1.293912027	1.078418445	1.785839196	3.759229505	0.268533716	0	0.905521636	0.326816844	0.19695716
Zm00001d002163	2.247012032	1.59555233	1.94484167	4.553860888	6.450244573	6.243177555	5.894279461	6.351849111	3.372084599	3.47846944	2.941981083	2.933626877	8.736530295	9.90956827	8.356867513
Zm00001d002164	5.111022182	5.468139883	3.618567523	7.895487851	8.003761316	7.896497027	9.014144521	7.748653315	7.16147308	3.880117153	3.919402347	1.783469019	7.249252913	6.706706583	6.675668331
Zm00001d002166	6.290626902	6.288903297	5.997881879	7.858839515	8.798331721	8.136047334	7.734736762	8.114670262	8.296451366	3.437620789	4.524466283	3.205884711	5.543783129	5.345180148	4.769626151
Zm00001d002167	0.095317368	0.463059942	0.042307395	0.093402325	0.2242761	0.058388409	0.310268247	0.262699541	0.335865	0.300476263	0.978757252	0.475147146	0.083806796	0.156735369	0.251885451
Zm00001d002168	0.434007426	0.124775143	0.662506357	1.670893115	3.567961882	1.826337389	2.419928716	3.981738219	3.868937644	0.572543107	0.975616905	0.491225333	1.668164845	1.173921077	1.794379631
Zm00001d002169	10.9046838	9.782118489	8.92690172	10.93225239	13.83342554	11.34418013	12.04920613	12.4252006	12.46106199	4.910225874	7.102533239	5.689683244	6.230447348	6.834526221	6.997239672
Zm00001d002172	0.582817524	0.322986764	0.389067254	1.295895982	1.926451383	1.615750627	1.774549488	2.296973116	2.854566134	5.070838874	5.354647342	4.084000091	1.926760102	1.843697389	1.763474282
Zm00001d002173	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002174	1.34231287	1.273995432	1.581261029	3.633772828	4.970784925	4.48150348	2.847074244	4.226571577	3.153973962	1.079176787	0.537492288	0.084566063	3.566576744	4.672505392	3.773095203
Zm00001d002175	15.55394654	16.34332055	15.60944994	27.31571389	54.55644165	31.52741242	45.87280573	53.76091508	52.57773333	22.01136409	43.34923633	18.99511311	24.64009181	23.1312082	23.2100195
Zm00001d002176	0	0	0.060321833	0	0.223840818	0.079285833	0.103978229	0.087786725	0.009976582	0.334702109	0.112212136	0.241951514	0	0	0
Zm00001d002178	0.867719287	0.215764807	0.805331805	0.287962553	4.278965601	0.652445082	1.810278445	3.188210656	3.922310334	25.95307446	14.830698	23.74997346	0	0.004082508	0
Zm00001d002179	0	0	0	0.186953617	0.197520354	0.012243518	0.221872735	0.313299928	0.172548189	0.13782811	0	0.077493134	0.033549451	0.010955327	0.011553956
Zm00001d002181	1.75221463	1.147100082	2.257627973	6.697840089	15.22242602	8.162321453	19.60127531	21.00238607	23.93545205	9.570799946	5.417886479	10.60983375	1.966323374	1.752630124	2.643839673
Zm00001d002182	0.171715982	0.299460343	0.082080434	1.81209535	2.192991205	1.9581111	2.932578763	3.376514009	3.583858028	0.710473946	0.716245582	0.92183137	0.665154337	0.781924523	1.175891333
Zm00001d002184	1.948440206	1.43356427	1.454514702	5.798340935	7.142841433	6.042607878	5.530329254	7.257476419	6.193786622	9.746716439	11.53108534	7.58643308	5.540867029	5.061422695	5.345427506
Zm00001d002185	3.407824619	2.637894743	3.794082127	7.432125335	7.355219495	7.001909182	3.779829969	3.718486003	3.217763298	0.091795937	0.11750638	0.029492449	1.544254778	1.289037642	1.508246916
Zm00001d002186	0.054143501	0.090925253	0.061682227	0.799050866	1.789495299	0.906553687	0.84882797	1.049996195	0.779029445	0.093341017	0.153622556	0.05497957	0.217108132	0.479778221	1.043287925
Zm00001d002187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d002189	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002190	16.75562724	15.6552747	16.74956214	14.81229729	14.68458384	13.80808197	10.40999485	8.794796709	10.68205586	0.729046654	1.981453041	0.564086241	5.665727539	5.459926442	6.537629256
Zm00001d002191	5.267336448	4.438459223	7.379590112	1.793287623	1.600140917	1.706859787	3.360374421	3.503495655	3.307766909	1.767324416	3.090962096	1.378261695	4.426991779	3.977446225	4.961388421
Zm00001d002192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d002199	0.239930395	0.145052746	0.077528412	0.269307703	0.290852015	0.299826514	0.213072588	0.694323463	0.449769094	1.654517856	0.605119852	0.403991685	0.273859613	0.673331519	0.42718411
Zm00001d002200	3.298655524	3.593867532	2.377132191	3.144113896	6.172637926	4.625219058	5.730423162	6.298854154	5.993957716	2.22280072	3.368890968	1.236558857	4.133415504	4.681683414	3.356922472
Zm00001d002202	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d002208	0.022399619	0.028212403	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d002212	0	0	0	0	0	0	0	0	0.049335546	0	0.012611459	0.188335284	0	0	0
Zm00001d002213	0.959384837	0.992572189	0.638746231	0.769180596	0.270885058	0.545711072	0.440409039	1.156799735	0.802877285	3.496896055	4.450391107	3.833537905	2.914009475	3.30537852	2.81256305
Zm00001d002214	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002215	0.09339256	0.135724932	0.062498449	0.367344701	0.056796184	0.237638764	0.260231185	0.329168185	0.301237195	0.00990798	0.090593088	0.007958157	0.426076267	0.417396214	0.631235795
Zm00001d002216	0.731699844	0.616002578	0.382887882	1.263153431	0.842338071	1.042692451	0.863991181	0.510784108	0.688665165	0.021244941	0.174826796	0.068256327	1.073053207	0.924543151	1.175418137
Zm00001d002217	0	0	0	0.009649219	0	0	0.009040655	0	0	0	0	0	0	0	0
Zm00001d002218	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002220	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002221	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002224	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002225	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002226	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002227	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002228	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002229	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002231	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002232	0.079948736	0.251739323	0.298081575	1.495628937	0.790081418	1.150890658	1.144396214	0.843499807	0.912040425	0.179176543	0.050408961	0.044281791	1.476175853	1.533745715	1.571338042
Zm00001d002234	4.381850083	4.761025524	3.816771309	4.994712049	6.995008719	6.431870119	5.079779925	5.379426038	4.725866096	16.1075002	10.69368782	10.52788658	9.609486217	9.099045808	11.94332422
Zm00001d002235	9.60359852	11.55103615	9.527341567	10.25383516	9.385897303	10.32183151	11.45933021	9.869256519	10.05171374	8.890606396	12.17589297	9.704184286	8.123573473	8.572063003	7.385379445
Zm00001d002236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002238	52.79246144	46.87068389	55.43128924	8.005838352	8.019457635	9.96044735	0.707633973	0.292082325	0.42944599	0.083521087	0.019091766	0.117398237	0.271070649	0.315338701	0.157533011
Zm00001d002239	0.13761818	0.140419733	0	0.004345099	0	0	0	0	0.017186976	0.062465217	0	0	0	0.003819288	0
Zm00001d002240	24.59759575	23.40843097	29.20543035	72.5184363	35.32769234	57.76497968	32.65322889	27.1821715	32.65068961	1.90502729	6.610103518	1.549747965	35.29367499	40.3209374	35.83947413
Zm00001d002241	7.47991103	7.327425483	8.964391896	12.53325371	12.93019135	15.24516656	15.76100756	13.6527208	14.56597614	20.8423776	17.04756269	19.71386807	9.052850686	8.826632657	8.594906172
Zm00001d002242	0	0	0	0	0	0	0	0.010816533	0.01106327	0	0	0	0	0	0
Zm00001d002243	2.395608324	2.709962242	2.527003074	2.983088133	4.720234393	2.934947978	3.74531737	3.873699383	3.396705011	5.909359729	5.678246365	5.459017999	3.392323091	2.844995798	3.226984346
Zm00001d002244	32.8581776	35.68138151	32.74901063	15.7867978	18.27402506	15.36082103	18.42247288	19.09291607	19.57079555	15.70549802	21.07214845	16.67545193	14.06409848	13.39644158	15.34429228
Zm00001d002246	9.26317432	9.275478762	10.11433546	15.02980869	20.5727867	13.83982437	16.99713664	19.82880432	19.48671251	12.53014542	17.02163845	11.25177888	12.20548853	11.37190629	12.9103029
Zm00001d002247	0	0	0	0	0	0	0.029419589	0	0	0	0	0	0	0.02760016	0
Zm00001d002249	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002250	1.892391706	1.911404949	2.255217792	3.234372908	2.808038124	2.940394375	2.772909597	2.768888866	2.713493058	0.668866523	0.924853287	0.295540808	2.026994384	1.92412822	2.000546017
Zm00001d002251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.065584282
Zm00001d002252	9.370057313	10.39285528	7.645476462	0.475553269	1.761860995	1.090032772	1.26539244	1.495794972	0.476531107	4.165043503	5.571380558	6.358496307	2.372441519	1.538259847	4.255637017
Zm00001d002253	24.6016166	24.99662028	37.42867772	54.73351637	89.54714089	49.72145747	59.53906621	77.36517359	62.55461285	6.011702619	17.53135988	5.633413931	24.01946216	20.67031958	28.09922146
Zm00001d002254	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002255	0.034786855	0	0	0.086769312	0	0	0.16259376	0.041945029	0	0	0	0	0	0.152538287	0
Zm00001d002256	6.614025431	4.504963006	9.569962521	5.127667371	3.494231117	5.966657008	12.20065507	8.390313723	11.88487534	0.225886577	0.242986111	0.197442489	8.169468689	9.877720779	10.35063486
Zm00001d002257	25.36283397	28.63656612	23.43369902	21.29743443	22.52700528	26.37237902	25.62844809	25.31152453	26.79538192	157.4146407	88.05307178	216.8359315	28.37085892	27.74991279	28.50144821
Zm00001d002258	15.99030028	16.40225969	18.00359693	82.2743705	59.33417764	98.19426972	78.99546347	55.86016744	62.92114378	3.390898378	2.492852619	0.803110664	86.05182279	94.20610862	91.1229014
Zm00001d002259	4.182332071	4.284929253	5.046624414	7.183149203	10.253361	6.845610311	8.749642207	9.888614489	8.10169451	7.162426582	8.627867177	5.790085349	5.891279512	4.971102952	6.125419037
Zm00001d002260	0.176575624	0.101089842	0.17289898	4.931536417	3.222047884	6.489878988	0.669004913	0.483886386	0.508122337	0.206628882	0.546547566	0.746845768	1.389144243	0.598302326	1.540370726
Zm00001d002261	9.306985671	10.65157338	11.14124932	20.87345208	30.24087798	22.66002333	21.20321623	31.26056486	28.0473185	61.9269555	66.77594064	56.36636057	12.1498845	10.60384787	18.82229261
Zm00001d002262	0	0	0	0.025486054	0.915502414	0.200288576	0.501452281	0.492807062	0.655263076	0.169102112	0.360774446	0.271647937	0	0	0.165382189
Zm00001d002263	0.113737387	0.028650532	0.113082527	0.198587669	0.599462773	0.111475089	0.637930261	0.877704957	0.420809226	3.074507117	0.143426494	0.226787608	0	0.074809751	0.236692693
Zm00001d002266	1.684607023	2.006777814	2.360829188	4.374569654	7.935875958	7.331804502	12.00693798	10.91975838	8.844276172	18.09126669	8.400812943	12.3647505	11.29759339	11.95205829	15.1009859
Zm00001d002267	43.87235957	44.49994473	43.2410299	42.65157528	41.54422592	51.46333545	43.25293276	38.53943964	42.81478579	10.86373003	23.33903957	13.11583182	10.58227904	10.24410405	10.09277059
Zm00001d002268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002269	0	0	0	0.014400481	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002271	0	0	0	0	0	0.012274923	0	0.006040453	0	0.006909082	0	0	0	0	0.005791796
Zm00001d002272	8.168913713	7.336874627	7.362432904	13.28346301	12.96916617	15.6215797	14.72744447	12.15936103	16.71684934	7.743105286	11.22640925	17.53622955	13.6123664	14.59439593	13.5050303
Zm00001d002274	0.52527067	0.286088801	0.158791119	0.309842132	0.177706786	0.086963303	0.124414618	0.162618654	0.148819933	0.342638106	0.008951124	0	1.278850732	0.754791282	2.24859424
Zm00001d002275	21.96688557	23.03018202	22.90663504	33.88589589	29.14333509	31.40647063	20.88854452	14.93125474	17.97093409	8.206368407	8.692208863	4.935621846	32.94319218	33.85111776	35.30848221
Zm00001d002276	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.25784359
Zm00001d002277	1.17010561	1.335194433	1.640647965	1.085124199	6.66789415	2.81806905	4.370584505	6.475582131	4.797881891	12.73084075	6.103946201	6.469870921	3.55884332	1.600647738	4.162466968
Zm00001d002278	0	0	0	0	0	0	0	0.04055202	0.020738528	0.139150446	0	0	0.112904426	0.03686811	0.11664806
Zm00001d002279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002282	1.061895219	1.10895004	1.558470996	1.989851989	2.327317114	2.314282895	1.995295794	1.962428122	2.2309459	1.508685216	2.139842676	1.465965802	1.612259341	1.286930162	1.912490922
Zm00001d002283	9.038491256	8.096164627	6.559031963	4.246457406	8.034859691	4.474862472	7.776430061	6.960769576	4.911791152	8.644787119	6.421036355	9.355221814	2.771058067	2.007677275	2.499107644
Zm00001d002284	0.491535256	0.577817776	0.44797974	0.040868097	0.440415471	0.232849871	0.35227349	0.568972449	0.46879412	0.578481626	0.809926524	0.47190039	0.674720315	0.488546642	0.492510923
Zm00001d002285	7.982205101	4.375412718	3.723147377	0.07302	0.758613507	0.298878161	0.330671143	0.929526982	0.481382527	100.788178	49.55384344	75.88400789	0.22931445	0.256734676	0.609217596
Zm00001d002286	0	0	0	0	0	0	0	0	0.016290264	0	0	0.014632244	0	0	0
Zm00001d002287	3.58605503	3.003027066	2.871603018	0.10391571	0.084453147	0.0903024	0.10485125	0.050233744	0.04742735	0.004419804	0.032329798	0.003550017	0.279720319	0.154576422	0.440902868
Zm00001d002288	0.418928618	0.252673703	0.300654571	2.501967096	1.103999827	2.746944416	3.192209541	1.401564979	2.088451187	0	0.119049561	0.065361988	2.462822208	2.367371831	2.687738436
Zm00001d002289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002290	21.23657905	18.53196305	21.58071636	7.354975245	16.8364801	7.188625339	11.62439116	10.98959748	14.3258496	9.817685471	43.68183553	22.13915895	3.166366505	1.665209633	2.617084351
Zm00001d002291	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002292	7.810747556	6.709165629	7.596954824	11.05417331	27.03996177	13.23050679	20.87839762	24.69734594	21.71273068	28.99156097	34.03313224	23.75377094	10.98802863	10.34935469	13.24255582
Zm00001d002294	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002295	0.068527488	0.057540417	0.014194361	0	0.105344189	0	0.026691457	0	0	8.915509762	0.63371265	0.556685372	0	0	0
Zm00001d002296	4.661696914	4.615753528	5.965656903	9.774202723	10.3631368	9.488536031	8.596856886	8.091935216	8.515595138	3.284645817	4.237211821	0.818061986	6.81771967	8.601521738	7.950931797
Zm00001d002299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002301	8.147338451	6.793181138	6.642351752	17.37532211	16.1029705	21.44048619	17.19341807	19.43154692	14.2680576	69.01472387	46.56201804	43.82662272	21.09704655	20.45290259	20.53436848
Zm00001d002302	1.608146889	1.470338976	1.761737428	4.971934524	4.353043412	4.407410315	4.700119032	3.868542594	4.010655368	3.669118	3.920654652	2.612767143	2.150594852	2.372307073	2.419303793
Zm00001d002304	0.079948736	0.251739323	0	0.797668767	0	0.195896282	0.04671005	0.144599967	0.345096377	0	0.352862725	0	0	0	0
Zm00001d002305	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002307	27.98278036	30.63193872	17.71662657	14.3182199	10.55372191	10.80367192	14.78033394	10.70063518	10.88931181	4.477454318	5.01471821	3.061228955	9.252039944	8.706432947	8.195125239
Zm00001d002308	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002309	2.121814083	1.184373578	1.977747591	2.676305326	1.11196644	1.861014682	1.352367149	0.930336295	1.278656418	2.9595852	2.371621582	8.253282376	2.185507106	2.669621793	2.703992541
Zm00001d002311	0	0	0	0	0	0.451155074	0	0	0.056769101	0.253937852	0.464373457	0.560902686	0.309061611	0	0
Zm00001d002312	0.527083717	0.262779457	0.245647948	1.246237317	1.253976612	1.587467945	1.475587349	1.032757354	1.408420877	5.871012535	3.581829964	10.0638106	2.277374473	2.73254882	3.580111649
Zm00001d002313	18.71259937	20.62780128	14.08329279	14.15217147	8.527600893	17.6240254	9.647158779	6.000460588	7.114673335	1.710431727	1.569570117	0.80346761	4.108338232	3.835681007	4.632782643
Zm00001d002314	4.57374005	4.863493273	4.566042988	6.01587347	6.668749373	5.266637527	5.227597466	5.951861525	4.685163245	12.47800465	10.66854508	8.748851398	3.579916577	3.616579606	5.042256318
Zm00001d002315	3.012226991	3.220140545	3.021458627	7.635183183	9.009990705	8.593825363	11.57510287	10.94102055	12.33144164	1.961779993	4.437462593	1.874380005	3.745309696	4.132732102	3.181584748
Zm00001d002316	0.93754841	1.2012051	1.235500987	2.308299677	6.75719293	2.099211358	6.308714798	6.802310709	6.105237413	5.250163206	6.736949741	8.581661871	0.592406153	0.531606977	2.279998903
Zm00001d002317	8.408225615	9.666790014	9.139054236	7.09416052	4.350490872	6.179068904	3.758668243	3.575003437	3.782424121	1.736047687	1.883364577	1.260617794	4.897743996	4.805425784	5.520332771
Zm00001d002318	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002319	0.025411215	0.021337013	0	0	0.022322003	0.041509621	0.079181348	0.081707044	0.052231794	2.827064614	0.875879117	4.729097737	0.161137141	0.018571111	0.048964721
Zm00001d002320	0.471103331	0.11634439	0.390325738	0.126724236	0.152144057	0.169754718	0.156510227	0.022276211	0.091137422	0.764387249	0.535833629	1.41211041	0.118873866	0.156957259	0.080097021
Zm00001d002322	0	0	0	0	0	0	0	0	0	0.063165446	0	0	0	0	0
Zm00001d002323	26.33393419	27.48755904	29.0131403	14.59446626	10.07667039	10.35543532	11.53352229	14.94019049	12.17571865	2.73771171	6.96746618	4.456164479	14.16229078	11.06592805	12.61450809
Zm00001d002324	0.378140513	0.219816635	0.469954142	0	0.153309416	0.249455159	0.339890148	0.280585468	0.466352125	0.361050999	0.550208444	0.322220692	0.162750529	0.095660979	0.437182036
Zm00001d002325	5.947946102	5.405406527	5.161057185	5.17638647	12.46353118	5.438942247	13.30506262	16.27166003	12.60383935	9.690541242	22.81313263	16.75188939	11.23637635	15.17787945	18.64111825
Zm00001d002326	270.4210325	265.3096123	268.9111869	84.46399278	122.5727659	94.71890296	99.45376264	118.6624502	121.7034214	338.7793722	413.4590059	292.6482766	51.49183448	51.83035703	53.77645629
Zm00001d002328	0	0	0	0	0	0	0	0	0	0.104285871	0	0	0	0	0
Zm00001d002330	1.276983388	1.358700754	1.457378688	1.389620073	1.391179991	1.388091995	1.180070373	1.479368892	1.338128809	0.730943363	0.818314695	0.286615109	0.966666605	0.793719427	0.759894811
Zm00001d002331	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002332	29.55949858	26.92164051	28.81037991	21.33231613	27.49085213	22.86804124	25.55462819	28.12005283	25.35637699	22.24054579	20.73885729	21.57641555	14.90392609	13.48849771	12.8475557
Zm00001d002333	9.791729781	14.31738676	10.25000701	6.504848124	3.326209986	5.478796335	1.259426979	1.010799769	0.81620305	0.073889593	0.309983734	0.129170536	7.638694963	7.783645858	6.999300365
Zm00001d002334	51.68335093	50.28901193	50.05233313	32.16535759	37.36440213	31.97760976	24.80248582	26.78804328	24.60988847	7.127163174	17.00658837	6.696311374	35.0377523	33.60438104	35.48201286
Zm00001d002336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002338	25.29303241	26.9711394	20.71181948	10.34854918	9.523962067	11.15792276	8.615314259	7.449621109	6.824310148	11.01649251	5.112076846	1.234806242	5.274783331	5.38103208	6.778872964
Zm00001d002339	85.02878936	72.49780006	98.03800204	97.69551366	152.1239109	80.3573305	97.48322915	119.0097617	104.9028387	11.76804922	32.93408613	5.500714615	39.26627768	35.98575438	50.50592822
Zm00001d002340	6.724824827	6.470905693	6.666892724	9.530871444	9.349822905	10.85884179	9.104392561	9.413441493	8.979938821	3.667214817	4.704735	2.112106231	7.231202933	7.292902649	7.88205404
Zm00001d002341	14.33982711	13.32270649	16.20932791	36.36539884	26.08721968	33.80390537	29.01123673	28.73338554	30.25030637	5.009619209	5.801151512	2.27718302	40.45740564	41.01156075	39.54914144
Zm00001d002342	0.084217047	0.114910989	0.008722099	0.122537155	0.823014997	0.197756694	0.459235559	0.126933236	0.086552479	0.261335682	0.123900464	0.155486371	0	0.030773895	0.219074397
Zm00001d002343	2.52539551	3.15390326	4.661503285	1.714319498	1.474243893	1.827652766	0.610106789	0.565326137	0.420524969	0.014695936	0.080622905	0	0.69159461	0.397158338	0.529734933
Zm00001d002344	3.147563158	3.403749827	3.477156229	15.16672089	14.6624412	15.1715976	13.5971868	15.29598626	15.13517041	4.472554231	7.056316665	2.676679793	9.35701996	12.19862871	14.92362721
Zm00001d002345	0.5667432	0.444313516	0.366549551	3.685548567	3.703356251	3.960560433	1.736689127	2.168632498	2.153911905	0.510453753	0.510486684	0.18578122	1.727881887	1.274265747	1.711627703
Zm00001d002346	0.036330677	0.096093108	0.072242997	0.448569444	0.382967979	0.454002519	0.186790546	0.140180887	0.188184365	0	0.02748849	0	0.170751818	0.262857965	0.961873761
Zm00001d002347	21.95167933	19.42104044	30.29948909	195.607544	244.4189139	106.5042505	228.1592609	260.207512	123.9825066	1.60752132	29.39657193	10.03348303	49.91729286	59.49501203	230.23706
Zm00001d002348	0	0	0	0.013446506	0.056826045	0	0.100787615	0.039000937	0	0.089218701	0	0	0.012065102	0	0
Zm00001d002349	0.395519975	0.67576334	0.658254104	2.311960143	1.803651527	2.616656869	1.559304839	1.123841856	0.924672255	0.085380614	0.585504835	0.087627816	2.432373192	2.043494991	2.596527115
Zm00001d002350	0	0.129119216	0.063703561	0.68492916	0.443833632	1.130364568	1.052439713	0.75932409	0.894044926	0	0.009233993	0	2.277984376	4.976898636	8.423558119
Zm00001d002351	0.356116027	0.266076795	0.157529203	25.07466485	22.17334722	29.63819938	78.32959786	44.22767146	53.87147073	1.223694555	2.816225119	0.200587715	10.73262496	16.44256664	13.0493901
Zm00001d002352	9.525898061	10.91677406	11.73473666	11.7236237	15.17246705	12.46566343	11.64475098	14.01047459	10.27633745	3.98464655	6.705858504	2.643887392	7.56727652	6.242623556	7.963418332
Zm00001d002353	15.18306074	14.41714684	18.17167438	56.87430287	34.94631212	56.91529735	36.12634928	30.57295603	24.65137675	0.163826019	0.217881385	0.071774277	58.81361896	52.47777941	59.49028002
Zm00001d002355	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002356	2.765795785	2.251711424	2.953759112	6.374140434	8.466512475	6.261598629	5.62805794	7.975911712	6.406960738	1.058774339	2.135090921	0.454331175	6.401854662	5.003314483	6.127791756
Zm00001d002357	3.518143895	4.312808779	4.722572856	2.987240883	3.786172801	4.032973415	2.434640984	3.320560764	1.706051546	5.429170649	3.607342058	3.656027468	3.492579595	3.50567712	5.054700674
Zm00001d002358	41.00625961	41.16805388	47.38328726	104.7049355	59.46435753	76.95300774	46.60269527	46.59960239	46.34092308	8.631986224	13.17624925	4.666148527	104.1667176	111.4104109	115.2525055
Zm00001d002359	14.54867454	14.61240282	11.89070108	9.11921566	8.992330226	10.26121872	9.289743107	9.607437411	9.198084895	12.33360094	14.56866352	14.6632871	8.033598245	7.02950569	7.505839443
Zm00001d002360	0	0	0	0.030638221	0.064739825	0	0	0	0	0	0	0	0	0	0
Zm00001d002361	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002362	10.52507463	11.7088994	12.634865	13.86156669	10.16262232	11.73309334	8.721846043	8.948672236	10.31770301	7.845591311	9.215491248	9.597991931	16.6654851	19.3194594	18.1212609
Zm00001d002364	8.521531457	4.092400873	7.0349925	2.803465901	26.19952498	8.08665124	37.53728503	42.55388981	29.43643357	27.42272583	31.38737677	33.63906959	1.555009541	0.761665393	2.622488998
Zm00001d002365	0	0	0	0	0	0	0	0.104414228	0.013349504	0	0.054599729	0.023981588	0	0.071196611	0.050057995
Zm00001d002366	21.57670563	23.29413172	20.73363943	15.02116071	17.31072599	15.32360623	17.93062906	17.68651423	17.00809616	23.32807424	19.11419106	19.03138968	13.77510315	13.24336275	12.43518954
Zm00001d002367	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002369	2.279915747	2.455393868	2.022451965	2.771296495	6.062669472	1.993703342	4.469093358	5.81685039	4.971532581	13.29525762	8.333469283	9.315390465	3.059709949	2.798155885	3.199363772
Zm00001d002370	0	0	0	0	0	0	0	0	0	0.012757027	0.01166432	0.010246531	0	0	0
Zm00001d002371	17.12540207	15.92144097	15.05510145	16.55891942	17.6066282	15.85822085	21.42016036	19.44369608	21.55383862	25.01448238	27.57155647	27.71769243	17.84830804	17.85671607	16.35228961
Zm00001d002372	0.111625889	0.303385371	0.262854917	0.747364559	0.619298885	0.950101178	1.112128743	0.708396916	0.492698222	0.316003667	1.437272767	0.344929842	1.492381088	1.603667722	1.582618914
Zm00001d002373	12.20916719	11.32776685	11.54323709	10.39201613	13.62130516	8.643994086	10.67233948	10.5921481	12.64438201	2.790372447	5.255729739	1.360876607	5.702587879	5.815856409	5.979345369
Zm00001d002374	0	0	0.10113482	1.116380171	7.720224142	1.861014682	4.627631338	4.088391921	3.579494564	2.094987276	1.641891865	1.262031043	0	0.446038295	0.219525168
Zm00001d002375	0	0	0	0.103964451	0	0	0	0	0	0	0	0	0.02332096	0	0
Zm00001d002377	31.29688876	35.19698821	23.93670645	33.00896416	26.80322584	24.61798769	17.12278719	15.90704418	16.58552479	21.16620297	29.47225642	17.24775759	30.44928741	25.58449801	23.65145067
Zm00001d002378	0	0	0	0	0.113489358	0	0	0	0	0	0	0.034695011	0	0	0
Zm00001d002379	0	0	0	0	0	0	0	0	0	0.026169168	0	0	0	0	0
Zm00001d002380	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002382	6.658659421	4.763235704	5.969348102	8.373752074	13.57034961	10.69119899	13.10952781	13.07656431	11.18624218	7.279770875	10.62189881	9.246804372	4.265941756	4.040473522	4.810718688
Zm00001d002383	0.858027234	0.624397786	0.473937232	1.022534596	1.130576757	1.635201185	0.155960751	0.80467764	0.117576172	0	0.096177766	0	0.832138689	0.543457537	0.683375417
Zm00001d002384	20.60286958	20.00625444	22.60495142	64.72221679	48.75188141	70.98495064	54.77392254	51.00790431	50.58126898	0.403582833	1.545245387	0.182340271	87.11475183	90.26215909	87.74075877
Zm00001d002385	2.356240316	1.952012235	3.288512856	6.018631398	5.495471378	6.082173328	6.934698804	5.575828032	4.910501075	7.333420899	12.1711855	6.211286423	5.640018339	4.862105178	7.108973539
Zm00001d002386	8.461832286	8.698753708	8.691069691	8.559460286	11.86050564	9.078878652	9.123877209	9.870696933	10.37751266	12.30020611	11.94178408	9.718220611	8.235308028	7.791281824	7.789096904
Zm00001d002387	5.64020955	6.089026971	6.320193388	5.123287763	5.099574787	5.534495836	5.186034024	5.892972564	5.554979943	7.924517088	5.196944685	3.804383434	9.090442602	9.759576459	9.727828298
Zm00001d002388	38.26596917	35.83923659	38.26911659	27.32372067	33.82132993	23.55755453	30.43295078	34.94041567	34.64252139	18.46740325	28.68350671	16.02203652	17.79486057	15.17168185	17.13758004
Zm00001d002389	4.803406513	0.69806634	0.9184135	0.691223103	4.381748837	2.489735858	0	0	0.455687108	1.528774499	0.232971143	0.613961048	0.620211476	2.227780455	1.067960275
Zm00001d002390	9.497609657	10.42238612	9.135723499	8.883162224	9.330125309	8.880068387	11.406789	9.945662145	10.48207104	5.601395744	10.04180151	6.483223727	7.259895929	6.276149632	6.320126523
Zm00001d002391	1.284600853	1.330399269	1.507621035	3.245364328	2.79087915	3.413857315	3.346037276	2.938667013	2.842864078	0.102430967	0.208127138	0.091414723	2.810377448	2.25858715	3.431483143
Zm00001d002392	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002393	91.32144413	63.74039665	91.66008421	3.58950945	67.70997752	7.566493903	44.14099683	53.57428773	64.18792614	456.2386106	245.7436837	246.2953214	1.67747256	0.394391755	0
Zm00001d002394	15.27236942	3.102517065	14.38847817	0	8.682354177	1.659823905	6.332367799	13.81125089	16.70852729	386.4402205	188.2406835	112.9006149	0.068912386	0.405050992	0.071197352
Zm00001d002395	38.74233928	32.22794567	49.25950583	65.35450945	103.7995281	57.0525556	63.99997669	79.61833578	67.18944943	3.518588866	20.81000976	2.683058123	29.69364183	25.54851158	43.62155221
Zm00001d002396	1.467142115	1.798543773	2.175312364	7.957747867	2.123713781	5.29638709	0.14432973	0.076283015	0.111461589	0.174505331	0.182352027	0.04004682	8.906736101	8.1968825	6.3703901
Zm00001d002397	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002398	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002399	2.476607074	1.393971005	0.315685596	0.090511851	0.239069095	0.155599104	0.084803381	0.043754204	0.123068781	0	0	0	0.030454976	0.049724243	0.031464788
Zm00001d002400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002401	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002402	37.73196528	34.99241444	21.00951539	16.47118285	10.35691271	22.41716397	13.19701109	8.261500684	6.396694438	0.684427927	2.180217066	2.926020451	5.616036704	6.273784537	7.440206618
Zm00001d002403	6.824952971	7.252920159	6.679631418	13.27306517	16.74923303	13.63969887	11.61353201	11.23819212	11.28412085	0.176488788	1.53303008	0.023626166	7.016807527	6.920621627	9.296086037
Zm00001d002405	8.047415853	5.04257781	8.070974664	13.27608723	20.78386166	17.74981486	19.62041678	23.5560569	16.59620481	81.32900654	58.57501492	75.14338018	8.88544564	6.708136358	8.591797942
Zm00001d002406	0.255619461	0.666111014	0.197183556	1.824840878	2.07896859	2.332567725	2.69852178	2.274442806	2.369808003	0.243131986	0.733611259	0.078114107	1.025821517	1.024248865	1.895474561
Zm00001d002407	0.033756133	0	0.335617773	2.2312568	1.200923755	1.8196588	1.06498913	0.722464279	0.84302115	0.128027	0.06385135	0.093483781	0.661048446	0.508814055	0.839073974
Zm00001d002408	0.026040446	0.032798038	0.064726285	0.081191285	0	0.031903109	0.121713043	0.172693675	0.160575457	7.811309701	0.016418919	0	0.087420284	0.171278705	0
Zm00001d002409	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002410	0.058978576	0	0.029319499	0	0.55953307	0	0.330799039	0.071114738	0.160021271	0.325364719	0.743738765	0.091467306	0.052799136	0.78878351	0.354573869
Zm00001d002411	0	0	0	0.026682582	0.028190698	0	0.099998979	0	0.079156915	0	0.053958888	0	0	0	0.02473523
Zm00001d002412	0.038838733	0.081529213	0	0	0.034117152	0.095165523	0.030255373	0.202932908	0.063865239	0.160695047	0.016325629	0.15775388	0.072436315	0.070960638	0
Zm00001d002413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002415	6.653439452	6.304976163	5.630736768	7.448336092	12.31538266	7.025707802	9.755201705	10.10457196	7.463130456	17.19443207	27.86745202	21.25125738	9.430855694	7.519492399	11.17212672
Zm00001d002416	70.62399686	66.23926025	66.12546363	70.26181492	82.19351236	84.80302698	117.8533135	110.3314256	111.8743984	171.593387	155.5524383	219.2526785	142.8035883	148.9026204	135.6179013
Zm00001d002418	7.571427705	9.08057844	7.242298046	8.004681761	8.443817105	8.993498151	10.31248568	9.181556695	10.03981751	40.73132352	26.07699917	61.16506297	7.756534077	7.80076538	8.521973951
Zm00001d002419	7.234066135	7.784223354	8.17619998	5.709156626	6.63852607	5.705986725	6.104374222	6.309765653	5.689300764	3.81005458	5.046903362	2.432515793	4.74611744	4.610603097	4.749933161
Zm00001d002420	1.744292371	1.782859255	1.498173526	1.697044297	2.105828228	1.902039053	2.507739935	2.852009768	2.162459061	1.083179794	2.176576089	1.39607442	1.236556125	1.011139316	1.457048808
Zm00001d002421	6.379909163	5.981690281	7.08967273	3.512745844	2.365675108	3.591982554	1.090651519	0.807669213	0.683896676	0.075722432	0.221556493	0.012164155	3.244029825	3.93631482	3.605502512
Zm00001d002422	0	0	0	0	0	0	0	0	0	0	0	0	0.006543434	0	0.033801993
Zm00001d002423	0.134109046	0.496796587	0.186279484	3.915734342	1.839845684	4.001235259	3.207872624	2.235333591	2.052827035	0.076159376	0.139271843	0.043694093	18.2558574	17.96177938	16.73610222
Zm00001d002424	0.654599213	0.907510288	0.257522766	0.569709431	0.912172539	0.490415512	0.814425032	0.868795254	0.813110306	2.331692694	2.393270901	4.715987859	0.210796414	0.423329214	0.457350401
Zm00001d002425	2.038922076	1.865662748	1.66766097	1.401830411	1.366251691	1.451804952	1.679954172	1.628477639	0.838185464	0.540771094	1.450390137	1.100355938	0.838543836	0.792805351	1.390186148
Zm00001d002426	52.2508881	58.52632996	71.48621218	139.2852157	51.64803648	94.13310464	35.96840142	29.84365963	30.07414718	0.211363701	0.784405312	0.119836776	120.053011	121.9753703	113.3766065
Zm00001d002427	0	0	0	0	0	0	0	0	0	0.115745153	0.116414064	0.139450944	0	0	0
Zm00001d002428	28.60283106	36.34285798	30.97752955	15.64473289	14.80965629	18.56574083	33.47438718	31.10938116	26.69871754	8.895743152	4.506298659	2.15174924	18.20228749	18.54667866	19.78297953
Zm00001d002429	6.853084465	6.11610764	8.560450878	1.858962304	2.255568041	2.304075673	1.524004888	1.242648267	1.062752386	0.200754743	0.602073635	0.154797675	3.081862875	3.095672934	3.554288234
Zm00001d002430	0.450700019	0.054062699	0.213383356	0.347962651	0.509025768	0.026293771	0.702190635	0.129390865	0.926396868	0.355194075	0.622475487	0.380392402	0	0	0.124064459
Zm00001d002431	0.013964488	0.017588325	0.034710214	0	0.276003927	0.068433635	0.244762568	0.269407906	0.499440518	0.13481532	0.545899696	0.170161489	0	0.015308362	0
Zm00001d002432	0	0	0	0	0	0	0.092162521	0.042267683	0.010807963	0.954830739	0.198921514	1.689180011	0	0	0.12158317
Zm00001d002433	5.226198685	5.407161409	5.262375032	9.133844952	9.985885944	8.727609145	9.116697885	9.719506349	10.13946287	5.682960896	6.872214444	5.159596945	7.107442095	6.309363256	6.962353696
Zm00001d002434	1.143352897	0.102861229	0.595450888	0.067901911	5.244177211	0.933842493	7.882446427	5.888691125	4.082491908	160.2702811	56.29904005	127.5540957	0.006092612	0.041779453	0.793123186
Zm00001d002435	0.162494856	0	0.242338903	0	3.16884002	0.703410462	1.924069109	3.383089241	1.282567835	0.194226237	0.519108442	0.060001476	0	0	0.200390644
Zm00001d002436	1.521179111	1.025083952	2.745477069	1.703808614	13.96680285	5.234845692	19.45058106	10.15233191	5.986585344	38.71197963	13.11011672	48.45984543	0.455378518	0.5416947	6.698707029
Zm00001d002437	0.010089472	0.050830907	0.012539225	0.075498907	0.053177436	0.024721966	0.117895476	0.072993636	0.012443117	2.170746964	0.089062031	0.145296563	0.090323541	0	0.093318448
Zm00001d002439	0.174117604	0.408355013	0.417864026	1.302911533	1.408197816	0.838559975	1.936343872	1.469623379	1.021843818	2.517296964	0.794987168	0.997652998	1.108590561	1.066260714	0.992635541
Zm00001d002440	6.643677136	7.658605772	7.455275745	14.48402676	21.0555071	18.54256223	17.65545439	19.57020608	18.88670371	16.56773352	15.51006911	13.73256093	13.86090991	14.39212444	14.31458607
Zm00001d002441	0.006259006	0.00197081	0.001944678	0.060496196	0.010308948	0.055594006	0.020112534	0.067922429	0.028946589	0.015106352	0.033544431	0.013866886	0.047277194	0.022299362	0.041608524
Zm00001d002444	2.914101485	4.64525078	5.220274571	7.694581248	7.694511488	7.684239639	9.550318842	7.590234065	8.38107621	2.323499627	3.387683631	1.803201723	5.910513807	5.964805864	5.803799436
Zm00001d002446	6.045700499	5.780839907	6.307329574	17.3656753	25.10919325	22.13820335	15.77575477	18.86243224	14.16708503	8.615714289	10.5014734	5.009996346	23.53711921	25.47997127	24.99204499
Zm00001d002447	1.537580584	1.504030772	1.26480292	1.819365904	2.287539718	1.667578954	2.116969635	2.09711609	1.449397967	1.751214301	0.886031298	0.998223217	2.104916847	2.424704877	1.886934928
Zm00001d002448	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002449	0	0	0	0	0	0	0	0.010057594	0	0	0	0	0	0	0
Zm00001d002450	56.34067401	54.29715116	59.80708714	54.92049167	93.45188356	48.38638172	62.10661609	71.54227962	65.79311729	6.138312719	23.56114826	3.786093129	23.32178917	19.91590721	31.91017837
Zm00001d002451	85.64420596	105.952067	46.77201337	32.84639469	16.56023565	44.13969449	18.99357529	5.842783953	9.833811573	3.312605009	2.465353464	0.711584408	55.64671669	48.95614266	51.55051883
Zm00001d002452	0	0	0	0	0	0	0	0	0	0	0.104657015	0.05850475	0	0	0
Zm00001d002454	31.22651626	33.7099672	31.54859092	34.24450694	20.04473078	24.42503091	6.942840635	7.080670757	6.538878816	6.430217429	7.249683752	1.98054928	132.4523256	122.1929702	108.5112656
Zm00001d002455	5.241719546	4.178252366	4.348317947	4.492840975	3.961340918	4.024554499	3.588660054	3.484379486	2.549040254	9.838497118	10.26221323	10.01968911	9.454648752	8.700917633	8.015269627
Zm00001d002456	12.59582362	13.54888785	12.82101786	5.200181348	6.351093482	5.451554548	6.110017712	6.743616637	5.781624089	13.27302231	15.90403899	10.98198845	2.839203297	2.541346779	2.650432923
Zm00001d002457	1.448700714	1.532346584	1.71304905	2.499639104	2.205400106	2.455505483	2.087247214	1.79768107	2.003476189	1.386959169	2.217060774	0.662176782	0.967963796	0.724674563	0.739881121
Zm00001d002458	0	0	0	0	0	0	0	0	0	2.27478096	0	0	0	0	0
Zm00001d002459	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002461	0.171965207	0.270738517	0	0	0.056647347	0.210680907	0	0	0	0	0	0	0	0	0
Zm00001d002462	5.4252002	5.958337202	4.12926314	7.014951143	8.18244439	7.352435292	8.283834301	8.258511221	7.242779431	10.59362814	10.69138889	13.98412824	6.559224816	6.248861879	6.672435426
Zm00001d002463	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002465	0	0	0	0	0	0	0	0	0	0	0	0	0.019414403	0.019018892	0
Zm00001d002467	6.126868329	6.492156532	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002468	0	0	0	0	0	0.214732463	0	0.898188256	0.378278721	2.598589987	1.491911358	2.863839674	0	0	0.151978962
Zm00001d002469	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002470	6.811116541	7.282575004	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002471	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002472	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002473	0	0	0	0	0.011024392	0.010250387	0.078212176	0.161413917	0.123821956	0	0	0.018536564	0	0	0
Zm00001d002474	0	0	0	0	0	0	0	0	0.009623529	0	0	0	0	0	0
Zm00001d002475	3.599606804	2.724810367	3.140558931	7.312074187	11.59402455	4.655011458	8.74154974	10.71924169	8.284476458	4.926841753	6.029367533	4.400326322	4.852000152	4.842837058	5.801069323
Zm00001d002476	0.097842273	0.067217839	0.011054424	0.299515021	0.656327882	0.490377974	1.30958325	1.233380329	0.416848454	1.202198294	0.628127792	0.640458174	0.069674592	0.185264052	0.452476077
Zm00001d002477	0	0.025932183	0.153529968	0	0.16277581	0	0.264643383	0.099303592	0.15235322	0	0	0	0	0	0.023803934
Zm00001d002478	22.76564672	19.90455932	20.87193249	9.555884895	12.09674086	9.413553193	10.36256654	9.784161131	9.575710893	9.757904501	15.71889976	10.13402477	4.597397974	5.005466688	4.706259915
Zm00001d002479	0.220741129	0	0.128024272	0	4.110804674	0.234379675	3.164015068	2.359983528	3.067181363	17.77920311	13.21289944	13.90543569	0	0	0
Zm00001d002480	0.164430649	0.118343434	0	0	0	0	0	0	0	2.316364798	0	0	0.013143084	0	0
Zm00001d002481	0.988326236	1.073582632	0.954325665	2.533927425	2.861109672	2.390161022	3.215574543	2.675779446	2.69150531	0.876617895	1.774487539	0.602356123	1.784351139	1.627170714	1.558917772
Zm00001d002482	0	0	0	0	0	0	0	0.018438922	0	0	0	0	0.068449887	0	0
Zm00001d002483	2.545503486	2.318025809	3.082672767	2.895056616	3.678047365	2.764204827	1.854787998	2.036025664	1.962069854	0.089761423	0.214301411	0.028037717	0.764725179	0.527176919	0.710655396
Zm00001d002485	0.248653191	0.395906304	0.303196221	0.924477297	1.632003456	1.638127199	3.623667544	4.418089723	4.027060537	3.759330291	4.360254014	5.52972284	2.703758792	2.509814931	3.650415759
Zm00001d002486	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002488	0	0.331772056	0.032737283	0.032851965	0	0	0.153900163	0.095285527	0	0.036329259	0.033217465	0	0	0	0
Zm00001d002489	189.7483918	170.8089845	187.0097427	62.49469161	90.79747598	69.02773542	71.06632235	83.33960159	72.05624115	33.38651691	74.84317619	31.02137538	54.53339899	52.0816659	50.17219338
Zm00001d002490	148.9968142	159.0668019	189.9017775	136.6156341	75.28951084	116.8229414	48.59849409	50.14867038	39.03324139	6.736305586	8.852066912	4.948430516	216.2533778	228.5971084	178.3332602
Zm00001d002491	22.9869314	21.6471077	22.08367008	10.62668246	8.247129966	10.7271264	4.409107331	4.144725341	3.880244768	0.200748167	0.946004035	0.396904112	6.80353195	6.898141134	5.941742621
Zm00001d002492	0.025746203	0.162137191	0	0	0	0	0.030084439	0	0	0	0	0	0	0	0
Zm00001d002494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002495	0	0	0.018269516	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002496	0	0	0.06310362	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002497	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002498	0	0	0	0	0.086605079	0	0	0.013208651	0	0.105756569	0.138139941	0.072809483	0	0	0
Zm00001d002499	11.03682985	12.70400889	12.00483216	10.44163506	10.39779125	10.19832771	9.860403096	10.68258497	9.917459544	6.992814987	7.652891932	4.310782674	7.740137354	7.681356359	7.920290342
Zm00001d002500	184.6926084	156.620054	221.0737417	110.7281148	104.7702449	111.596708	56.98303908	74.33767953	56.91200252	321.5444264	515.1482907	545.3714838	61.66312004	53.68865542	72.97319365
Zm00001d002501	19.2161031	21.75939078	21.58476958	36.08158856	28.52026192	32.52513034	30.11122897	27.46171483	23.90600758	0.674141157	3.159036638	0.524553685	42.25476533	35.29872309	37.54542621
Zm00001d002503	6.560595382	7.777029798	3.972019192	25.74398623	20.31380846	20.36307531	37.21587582	37.95369098	29.50574024	0.859542963	1.286557058	0.597028313	32.97229613	29.86922503	35.73487946
Zm00001d002504	4.035146629	3.894766959	4.268586885	8.413096964	8.659370182	8.457074108	8.630084328	8.350470009	8.935470479	8.328348433	9.24979598	7.000231302	10.54444377	9.535991126	10.40743947
Zm00001d002505	0	0	0	0	0.010858262	0	0	0	0	0	0	0	0	0	0
Zm00001d002506	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002507	0.008260564	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002510	0.011105795	0	0	0.027701332	0.005853406	0	0	0	0.00547861	0	0.002800953	0	0	0	0.002567963
Zm00001d002511	56.79965814	50.31390453	51.95659259	27.28027182	36.24748956	30.11194736	32.08888816	31.61843668	32.69967004	23.16809458	42.2695939	34.43282605	21.09799998	22.13096254	20.14466244
Zm00001d002512	4.224791038	3.985872618	3.79536505	4.084936535	6.046317518	8.064396954	7.784035133	5.990856961	6.654403057	0.872911365	1.636190851	0.736184775	16.71508213	16.98166907	18.36693902
Zm00001d002514	11.19344329	8.233047577	10.72399967	46.06431653	89.89142976	50.6489976	64.75554498	97.06961106	92.92257102	20.51698752	41.82308474	9.334401677	14.53254338	14.29989965	16.80900183
Zm00001d002515	0.171043141	0.092326915	0.197389139	0.01523697	0	0.059871786	0	0.058925456	0.180808826	0	0	0	0	0.013393107	0
Zm00001d002517	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002519	0	0	0	0.057119497	0	0	0.01337926	0.055224108	0	0.063165446	0	0	0.012812856	0.025103663	0
Zm00001d002520	694.6159941	615.4503036	635.663385	275.6725488	353.2618294	294.3535598	267.0908382	314.1827993	283.0659134	298.9401646	492.5594313	269.8997082	131.5776259	110.3489908	137.2445266
Zm00001d002521	23.09967111	14.51407409	10.41572399	6.401979497	10.35279099	11.48695269	5.937008368	4.35794383	4.328154562	0.650168465	6.869524584	3.365416114	5.392592247	3.904629485	10.65832538
Zm00001d002522	6.03142673	2.926099428	2.887299959	4.401841245	1.883801969	6.18513703	3.341142368	1.669987853	1.873380333	1.540431821	0.788751974	0	3.34968246	2.693721465	3.30579076
Zm00001d002523	2.88061307	2.01999303	2.593105999	4.757735333	12.04343242	8.260107306	6.240739263	7.82914946	4.685584522	5.583451283	15.4530449	5.950806968	11.20383541	13.74082437	15.78781001
Zm00001d002524	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002526	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002528	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002529	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002530	0	0.138490373	0.349226939	0.182843645	0.402454342	0.733429379	0.099931956	0.147313639	0.090404413	0.101098582	0	0	1.216774734	0.790193311	1.624368533
Zm00001d002531	0	0	0	0	0	0.052177982	0.278688744	0.16433043	0.021009873	0.082233145	0.150378881	0.226457907	0.104849874	0.093376241	0.108326438
Zm00001d002532	0.764849152	0.815470332	0.733918256	1.468541825	3.220275644	2.479900126	20.84668418	17.03344715	17.94408796	1.417918789	2.570502837	0.587174474	2.647290029	3.416214611	5.322071511
Zm00001d002533	0.117652615	0.118547124	0	0	0	0	0	0	0	5.062585432	0	0	0	0	0
Zm00001d002534	0.052088523	0.03532614	0.099593492	0.019988476	0.065994491	0.088360017	0.19664219	0.379257064	0.486738472	3.520094389	3.784483755	5.916602744	0.085191221	0.026354431	0.088015952
Zm00001d002535	90.5653772	89.1296095	96.31289776	34.91691879	20.53303547	40.26850734	29.92986693	27.06346277	30.00638498	256.9249051	193.799857	304.657195	50.64347502	42.11831952	49.08279955
Zm00001d002536	0.065853728	0.049765808	0.270082583	0.016425983	0.763593139	0.209767551	0.654075694	0.635236849	0.933982969	4.913532297	6.278100974	9.986823686	0	0	0.21318051
Zm00001d002537	5.737761758	6.669078818	7.029839225	10.80708058	6.98885239	8.756486133	5.617060976	4.467020788	4.412906481	0.71032946	1.56104524	0.580550962	5.055700511	4.110745525	5.620308588
Zm00001d002538	34.82813461	34.45828079	34.79420124	16.33513027	21.58896308	14.23626766	19.25850101	19.83385417	21.23238147	28.6331427	39.34721603	34.2515076	10.22915435	10.20666294	9.195939095
Zm00001d002539	0.478338884	0.343342887	0.460243334	1.533104064	1.606201637	1.298089248	0.619039957	0.471337138	0.482088844	2.028780003	2.283082142	5.498239081	0.356851047	0.332666033	0.594650567
Zm00001d002540	63.98854087	42.77898576	59.44040236	23.46035576	76.5080143	33.92210132	68.46874309	68.82775469	69.2778248	30.48476289	49.87330006	31.7532257	20.78750072	18.76577634	19.12696101
Zm00001d002541	0.170247049	0.438826914	0.334597215	0.029626707	0.062602455	0.024253015	0.064769104	0.090704758	0.44433782	3.751319528	6.90992545	8.951539039	0.062027135	0.13020753	0.022887072
Zm00001d002542	20.22023397	19.37504978	24.70036447	8.099075529	14.62009132	8.417857908	6.101818823	5.70941466	7.902415373	14.32798018	17.0121122	10.41229977	21.09811484	17.52630748	14.89795382
Zm00001d002543	0	0.441512044	0.544572108	0.327887882	0.866050785	0.697880506	0.972826609	0.052834603	0.324238904	0.060432325	0.497303786	0.048539655	0.343236693	0.28820936	0.303957924
Zm00001d002544	0.082468611	0.160997756	0.092243009	0.208273829	0.105947881	0.300580112	0.096364572	0.049719186	0.048310668	0.017060672	0.02859878	0.013703248	0.143041786	0.119786608	0.174004567
Zm00001d002545	11.20501058	11.56488387	7.029303477	1.150235091	0.845973126	1.479517076	0.08335733	0.159744429	0.006284168	31.68717058	31.88378981	37.15818273	35.91709461	36.1126435	37.44380973
Zm00001d002546	0.493116646	0.685332128	0.739642713	0.084826716	0.268863527	0.437477332	0.377514803	0.143520863	0.209706754	0	0.171540941	0.075345137	0.076112188	0.186404063	0.157271762
Zm00001d002547	0	0	0	0	0	0	0.038586563	0	0	0.045543202	0	0	0	0	0.15271316
Zm00001d002548	0.923732022	0.982463737	1.109749646	2.393680007	1.365915533	0.968230611	1.858933729	1.930604963	1.417693225	0.042465958	0	0	0.803977839	0.641330737	1.257819879
Zm00001d002549	612.9313947	607.6930781	550.6843765	32.27000239	44.47715204	35.50686426	71.67047254	68.64778544	72.02368314	13.80381848	11.20424468	8.817129839	53.35258257	44.03303848	43.16790453
Zm00001d002550	0.41496571	0.532153589	0.515720605	7.565307168	5.626844748	14.17020947	100.3540668	82.46746787	90.53637734	12.465868	2.797196571	4.479792311	21.09882771	29.56022796	29.49197053
Zm00001d002551	0	0	0	0	0.05060072	0	0.014957712	0	0.015786913	0	0	0	0.014324485	0	0.01479945
Zm00001d002553	0.01258282	0.043582298	0.066461354	0.72578956	1.036231956	0.743806374	1.04759055	1.077213191	0.803062025	0.039046012	0.055535689	0.013938677	0.211208694	0.237941827	0.523708453
Zm00001d002554	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002555	0	0	0	0	0	0	0	0	0	0.210669112	0	0	0	0	0
Zm00001d002556	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002557	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002558	0	0.19456463	0.047996186	0	0	0.023656966	0	0	0	0	0	0	0.021608121	0.148175433	0
Zm00001d002560	0.009293837	0	0	0	0	0	0	0	0	0.179448264	0	0	0	0	0
Zm00001d002562	2.300768635	2.939824097	2.403555331	5.364565647	5.213766548	5.637512768	5.545736079	6.312317579	5.524187371	2.912543286	2.789213863	1.797624705	3.532348071	3.009561801	3.405317234
Zm00001d002564	0.093931026	0	0.106125233	0.0106497	1.620234423	0.230156719	3.592093255	0.875186558	1.158430062	57.01218028	33.32753334	73.60297473	0.095556213	0	0
Zm00001d002565	0.12519445	1.072243535	0.746841748	4.87147711	2.507423225	2.33138103	3.891306436	3.260649803	2.068953005	5.801503226	5.936070588	9.791141937	7.76135216	4.638798264	11.08722715
Zm00001d002566	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002567	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002568	0	0	0	0	0	0	0.137417952	0	0	96.8289603	29.43753221	181.6673331	0	0.193379183	0.305918943
Zm00001d002569	0	0	0	0	0	0	0	0	0	0.122207591	0	0	0	0	0
Zm00001d002570	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.133624015
Zm00001d002571	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002572	0.194100026	0.202955978	0	0.027404506	0	0.040380978	0.064190344	0.030911003	0.013549764	0.040406934	0	0	0.168025861	0.136499906	0.287917284
Zm00001d002573	4.089685361	3.881626719	3.294661251	7.277289391	12.28829836	8.687717577	15.47989008	16.86304422	14.22147858	62.33594352	42.30765912	68.99912029	17.01473321	16.59605562	17.68866255
Zm00001d002576	7.517049181	8.609484856	4.393220965	13.51796958	11.72864789	11.16608809	4.478926247	9.08952689	4.044400531	5.668213238	11.5469498	5.873751957	25.75970759	26.4488203	27.67248094
Zm00001d002577	0	0	0	0	0	0	0	0.008545566	0	0	0	0	0	0	0
Zm00001d002579	0.369992799	0.497074453	0.352534907	1.561201843	3.177003981	1.888715847	3.213701975	3.621064935	2.258703486	2.27925544	4.152497829	1.974164933	1.704439236	1.514236635	1.433003259
Zm00001d002580	2.35584656	2.130408242	2.591940958	3.28172275	4.446021939	3.783509313	3.824587876	4.465925712	4.316182264	4.292853392	4.532061339	3.826658412	2.538700666	2.523302352	2.808354109
Zm00001d002582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002584	29.56887337	24.58859605	33.24953532	4.061749758	9.237253381	5.320047354	7.138150561	9.229486985	7.965018131	4.643935456	9.8844984	3.791188813	3.97391669	2.460834694	3.424947164
Zm00001d002585	5.949814919	4.751682899	6.787638574	8.921058834	11.54166478	8.086915086	8.433242378	8.583210212	8.864554947	1.446129976	4.710345514	0.981251303	6.183313139	5.106772868	5.194572116
Zm00001d002586	3.140688874	3.955709258	3.444050626	3.225707816	0.730291473	2.489735858	1.511133225	0.891048445	2.961966202	0	0	0	0.620211476	0.202525496	1.922328495
Zm00001d002587	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002589	1.103746614	1.025851759	1.248755995	1.661347288	0.180539763	0.531570452	1.058466368	0.954553011	0.535102512	0.440927166	0.115188405	0	8.041108552	15.42915006	14.70574163
Zm00001d002590	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002591	10.87749075	11.45216245	16.29945019	71.42682333	54.41650261	104.4562716	95.69788794	75.46640807	81.74992228	6.457396921	8.693328118	6.390151506	66.02836702	66.12946033	65.9148719
Zm00001d002592	5.765869818	1.635463167	6.396578279	0.075517485	1.117000934	0.140125613	3.128929678	1.216859958	0.904422296	16.57225663	12.2002585	11.89489101	0.045172883	0.059003491	0.684503672
Zm00001d002593	0.958200995	0.56093386	1.023128959	0.908893558	2.791880991	1.851829022	3.847838317	2.961658552	2.94599691	0.130290423	1.089191839	0.702651045	0.709804381	1.227948269	0.967384352
Zm00001d002594	1.454142971	1.802655958	1.679142941	0.856792457	1.05608873	1.080136662	0.709100803	1.42202078	0.62132212	1.989711534	1.155099804	0.646870183	1.883489793	1.60663442	1.720900812
Zm00001d002595	1.661791592	1.844889612	2.107862564	6.110712516	4.164857761	6.202216223	3.633374569	2.984956459	3.380535939	0.850596338	0.399671046	0.208757015	3.220747315	3.850014753	4.070293709
Zm00001d002596	3.679108823	4.581193777	4.676325621	26.95699643	52.27874513	28.58108786	37.0792087	35.53975333	41.45498498	9.859894245	24.04091208	12.78240616	2.245658678	4.262325575	3.576850438
Zm00001d002597	6.106124241	5.724532311	4.44726713	6.709245594	7.697620645	5.112273533	5.233741047	6.522811154	4.91669779	1.863130977	2.718098983	0.917840758	3.755770447	2.698561066	3.755355437
Zm00001d002598	21.1190587	22.19641123	20.12851528	18.50348888	19.30453412	18.65267773	22.01350292	20.79131383	22.27575342	80.438971	56.27713669	114.9064064	21.64853457	23.36436197	20.4528575
Zm00001d002599	0	0	0	0	0	0.004751527	0.018127475	0	0.004783099	0	0	0.025777655	0	0	0
Zm00001d002600	2.532412555	2.795364862	2.607417598	4.225281451	2.756942352	3.565029651	3.431254002	2.89111653	2.928992589	0.59125907	1.38263379	0.682936183	3.211697761	3.029817389	3.230464989
Zm00001d002601	755.9520002	885.807785	746.6972765	232.1059192	174.1339445	284.0396539	190.1267479	153.5480973	171.9578879	225.8464972	287.1991867	191.1170158	155.0754633	130.0829007	145.0334406
Zm00001d002602	1.698860302	2.616820754	2.574989321	11.7175181	12.35711219	10.80044793	10.41516448	9.605517196	10.85805578	1.844327589	4.045795256	1.506807845	5.985830547	5.278756482	4.903650344
Zm00001d002603	11.47154411	12.14138533	11.33212517	10.94821616	10.61331021	11.83486444	13.1446307	13.97833895	11.35996557	12.83202943	12.196911	10.79501265	9.642475453	8.918549553	9.08331643
Zm00001d002606	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002607	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002608	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002609	0.085982603	0.108295407	0.01187327	0.369360773	0.062941497	0.397952825	0.178614529	0.069116965	0.082475864	0	0.012047425	0	0	0.125676199	0.055226457
Zm00001d002610	0.743335028	0.762499219	0.952390681	2.131271236	6.563344515	2.168749733	7.539693223	9.813020623	10.1786298	11.23472156	4.870455016	3.870983109	1.535000227	1.041689434	1.949147228
Zm00001d002611	6.355696984	5.064402856	7.72478118	9.356563816	11.18431459	8.250616133	10.39122221	8.614426414	8.580579596	6.454309946	4.65836189	1.310404908	9.527483921	10.18084523	9.915372808
Zm00001d002612	0	0	0	0	0	0	0	0	0.025089915	0	0	0	0	0	0
Zm00001d002613	0	0.007673338	0	0	0	0.007463963	0	0.007345988	0.007513557	0.428520125	0.460958946	0.121478924	0.06135782	0.006678648	0.049305118
Zm00001d002614	0.516708054	0.654185267	0.688990915	0.033563327	1.769471321	0.092318051	1.383647295	2.128693686	1.749102937	37.46480592	25.27608492	24.04020078	0.045172883	0.09735576	0.47604119
Zm00001d002615	5.976777034	6.289846177	5.490987118	4.707621367	4.138068332	5.269583168	4.40251412	4.122509908	4.199232362	3.747093812	6.046641993	4.171053642	3.435757834	3.77622342	3.592967892
Zm00001d002616	0.128973905	0.034809238	0.137390699	0.620423972	0.776877901	0.609469768	0.807353619	1.232997292	0.874833269	0.038116345	0	0.061230617	2.041181165	1.807717466	1.736083132
Zm00001d002617	6.97547411	7.239092919	8.297941882	9.401145574	8.97048816	9.535253239	8.712204453	8.62996538	8.589051455	6.351073437	5.958524459	4.131397426	7.025908928	6.978057984	7.185788795
Zm00001d002618	0	0	0	0	0	0	0.02387868	0	0	0.028183685	0.103078413	0	0.182942299	0.560048083	0.567024648
Zm00001d002620	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002621	1.286439565	1.212480643	1.370699581	1.878628141	2.317892355	1.896368304	1.92199786	2.096040249	2.207912535	0.276996798	0.598242515	0.118914779	1.522879952	1.116044754	1.38521048
Zm00001d002622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002623	4.73327431	1.634137723	5.305223386	2.916607854	5.255360546	2.609999501	4.098991554	3.138505432	3.526169308	37.85336412	20.36061335	28.14173967	0.609432562	0.553118841	0.453711067
Zm00001d002624	10.53684253	9.969619796	8.063736758	2.509185932	1.310742742	1.63593621	1.08907443	1.040067608	1.061029569	1.894140413	1.760150055	1.064722355	14.09261687	14.2869092	14.00298591
Zm00001d002625	19.32610527	20.67343381	15.13497074	8.324779565	11.18598618	7.546407327	12.95145572	18.50610761	16.15083122	5.773791424	12.94436514	5.368764127	18.85359616	17.36667893	17.19336077
Zm00001d002626	0.067982267	0.205497401	0.076039706	0.644362462	1.271987866	0.791232	2.470499399	4.533004034	4.502261138	0.365659142	1.037306621	0.067776903	0.753135965	0.789960214	0.911722626
Zm00001d002627	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002628	0	0	0	0	0	0	0	0	0	12.78694582	0	0	0	0	0
Zm00001d002629	0	0	0	0	0.057736719	0	0	0.035223069	0	0	0.009209329	0.088989368	0	0	0
Zm00001d002630	1.020609877	0.518331418	0.859250198	0.913585262	1.789455927	1.835245062	2.019696423	1.955102984	1.055679706	0.681091589	0.965266349	0.528822159	3.417075229	2.057200582	6.832373911
Zm00001d002631	3.703408012	3.988937472	3.712746926	2.966555647	2.342720037	3.01602654	2.547575998	2.224649785	2.447374071	0.802571626	0.88600324	0.531746308	1.158344488	1.190602023	1.342470896
Zm00001d002632	4.600986502	2.251620265	2.619343115	7.146285933	12.65805046	6.778038331	8.839483074	9.552554454	10.24621714	15.83135602	13.81087569	13.60179362	6.391066549	7.086022823	7.364442375
Zm00001d002634	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002635	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002636	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002637	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002638	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002639	16.9327609	17.42436498	18.48816892	18.29305835	19.17180468	18.6693441	18.25090716	18.23224473	20.1453563	20.07939097	21.91256479	16.6698494	15.49117562	13.41768319	14.71647843
Zm00001d002640	5.382121793	5.443337667	5.226967924	4.324842715	4.378190919	3.910894715	6.034812873	4.906070305	6.005681081	1.566795647	2.212896338	1.12993727	2.748112896	2.778686089	2.584000629
Zm00001d002641	0.169758699	0.232817195	0.309432363	1.044464049	0.482158958	1.210892003	1.723554428	1.510159919	1.158456216	1.586848806	1.15122716	1.817826171	1.621038384	1.443273581	1.705318024
Zm00001d002642	3.154390376	3.163349259	1.869547986	7.669683788	7.788831724	4.936244468	4.4989725	4.226973147	3.78399217	4.204191625	3.910933894	3.553018079	8.654099638	8.209007256	5.501004879
Zm00001d002644	0.571574127	0.522923907	0.527559328	2.468246029	2.122019028	2.014092833	1.929685465	1.735317756	2.123912743	0.274747753	0.575209972	0.14849446	1.716737708	1.767485208	1.872675541
Zm00001d002645	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002647	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002649	0.081961834	0.082584987	0.142607372	0.112441168	0.086397392	0.030124338	0.038308962	0.039530926	0.010108167	0	0	0.00907936	0.146748679	0.233608546	0.132662691
Zm00001d002650	15.32219575	20.05014262	13.57621047	36.07751538	13.70492182	31.49116901	23.75573756	13.73316862	18.21520849	14.76805476	4.070412368	8.553440306	36.56824733	37.20386148	35.74232715
Zm00001d002652	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002654	5.79299177	7.455685421	5.509402456	16.67797773	9.46735417	16.7352478	12.30446477	7.891466278	11.13235168	2.60498556	4.130136112	2.814200198	15.61770987	14.32222925	15.31884107
Zm00001d002655	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002656	4.721524923	5.21786961	4.170039184	5.277151818	4.750357672	4.548573011	4.925851874	4.911381526	5.354929626	2.551493872	3.421652512	1.786636591	4.420052887	3.910526994	3.392966366
Zm00001d002658	2.865215639	4.044430187	2.941729302	4.061760713	2.628692911	3.166449551	3.36071522	3.982067707	4.673911021	2.211338415	3.629589567	1.554443073	7.15506647	5.666588605	5.85297974
Zm00001d002659	44.65125065	40.63744978	42.585862	81.6755418	81.62361607	70.7406471	71.86306473	78.55768646	73.41204948	28.25435362	42.85240325	16.687271	70.77281618	63.77209355	65.17747825
Zm00001d002661	0.853310458	0.969573595	1.076712296	1.305042589	1.27909039	1.320364873	1.122111089	1.217686837	0.997658165	0.842153694	1.592688386	0.627281702	0.636587869	0.552103289	0.699932888
Zm00001d002662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002663	9.074093723	8.809216495	9.422653381	10.2800658	13.23655524	12.30723775	13.8721661	11.92753749	12.28196381	16.4053619	13.73295196	13.25826019	9.836649934	10.04249502	8.889080634
Zm00001d002664	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002665	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002666	0	0	0	0	0.003425339	0.003184851	0	0	0.003206013	0.010755782	0	0.005759411	0.01163609	0	0.003005479
Zm00001d002668	0.577237249	0.881631305	0.568966189	2.978918301	2.574656971	3.145796717	1.097034423	0.964023172	0.920552093	4.209292562	2.254862171	1.712515795	3.28913251	3.309407157	3.478736119
Zm00001d002669	0.009425187	0	0.035140951	0.005877342	0	0	0.038546659	0.01136463	0	0	0	0	0.08965024	0.036162774	0.081726019
Zm00001d002670	0	0.037473275	0.018488193	0	0	0.018225389	0	0	0	0	0	0	0	0	0
Zm00001d002671	0.062001061	0	0.019263775	0	0.714835569	0.113939674	0.23545678	0.074759167	0.22939351	0.085509685	0.234555981	0.188875394	0.138762356	0	0
Zm00001d002673	18.55226333	13.76604104	11.10476419	4.052241968	9.231504093	4.362771288	2.101729211	1.862693048	1.216454922	0.430111446	0.621915539	0.168717147	10.14492689	8.690009104	7.74778268
Zm00001d002674	1.142407977	0.616657318	1.029736349	2.536388909	4.730911764	2.307042994	4.224750267	4.465470052	4.071892789	1.333173721	3.055366266	0.792680655	2.837747519	2.174405967	2.743157467
Zm00001d002675	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002676	1.268361636	1.357564535	1.582554103	4.182824956	4.102165303	3.568480297	3.198482205	3.191698279	2.9491829	0.082969793	0.467821774	0.133283807	1.548368071	1.555294806	2.231476951
Zm00001d002677	17.22844668	18.96266285	15.62853016	24.98773139	25.71598337	21.5547903	29.72532951	33.61796698	32.51144856	30.78835731	31.47305798	28.11613463	23.13071867	20.55163788	26.52086329
Zm00001d002678	3.890504815	4.196450103	4.111795263	3.648755764	3.91650149	4.009496287	3.975070412	4.37207094	3.556330542	2.015337219	2.698328264	1.623904258	3.303511539	3.220858519	3.510203682
Zm00001d002679	2.575119781	2.214329334	2.349770711	1.387060128	1.116002363	1.860432387	1.644468509	1.201772316	1.160604837	1.297895747	1.537347123	1.175157817	2.158837902	1.280168983	1.696305863
Zm00001d002680	6.543661559	5.464120639	9.739786518	11.3025835	14.85364221	15.57852565	19.92766459	20.7727831	19.16362938	2.928397322	6.012349525	2.079477906	15.07714468	19.49406194	21.91501229
Zm00001d002681	0	0	0	0.014498444	0	0	0	0.014017344	0	0.81768636	0	0	0	0	0
Zm00001d002682	3.89996122	4.494830702	3.764634002	6.249730111	6.476259408	6.623728691	7.909385859	7.195416406	7.339785547	5.07659871	8.043922747	7.439029406	4.908209981	4.011730125	4.965952678
Zm00001d002683	0.082078703	0.116300734	0.063754783	0.025591249	0.027037683	0	0	0.049484116	0.050612902	0.007075004	0	0.011365383	0	0.005623597	0.005930886
Zm00001d002684	3.237430651	2.773446115	3.237423326	3.231235074	3.42621325	3.805577315	3.640598551	3.468615244	3.686411882	1.163084094	2.345519616	1.531045199	2.070914033	2.449878326	2.209997027
Zm00001d002685	10.29493728	12.08348752	8.529718906	24.52831457	22.51124286	24.79594865	26.969664	25.02691735	26.94027102	3.842223628	5.095182649	2.432092212	13.8326968	15.00711192	17.00031339
Zm00001d002687	0	0.010688374	0.042186592	0.010583594	0.011181785	0.197537871	0.733791393	0.194415598	0.104658119	0.690526532	0	0.009400604	0	0	0.117734168
Zm00001d002688	9.384390539	10.7985902	7.883425574	6.485673532	6.086255191	4.990340208	4.741157856	4.491842998	5.857497257	8.890212132	12.29281637	12.37133584	4.699756965	4.630024586	4.567545923
Zm00001d002690	42.45846911	57.871088	43.8263489	61.18939473	72.9101446	66.4426392	242.0113149	254.838574	197.1614956	16.52344026	21.93713897	6.706638008	157.3298017	157.9602774	164.0918275
Zm00001d002691	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002693	0.702289414	1.009026383	0.87927259	3.159601497	2.920054337	3.479842521	4.24901485	4.114826455	3.111607744	0.846604447	0.951210184	0.593557979	2.963075274	3.068091721	2.971107748
Zm00001d002694	1.60376247	1.32779586	1.463509618	4.704298992	6.255837446	5.583044045	6.783954548	7.153605909	6.297877443	6.893350258	5.718336269	6.017165235	4.212644133	3.516201473	3.829354524
Zm00001d002695	7.54701601	8.091057818	5.437835869	2.501443302	1.978201069	1.906357887	0.948036791	1.015571922	0.774652223	1.456938593	1.752189508	1.009449125	2.177900051	2.245685598	3.408179804
Zm00001d002696	0.141086005	0.142158677	0.245478944	1.363661678	2.100687064	1.140807762	2.481127926	2.083940699	1.948779541	0.136206603	0.195705377	0.336020649	1.27882614	0.78878351	1.720859828
Zm00001d002698	0	0	0	0	0.102441003	0	0.041928706	0.028844088	0.007375513	0.923773917	0.188537452	0.351116248	0	0	0
Zm00001d002699	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002700	74.75280199	79.72330319	92.53928812	105.481632	45.0070967	108.0754398	5.1295348	4.738633777	4.53736154	2.018107009	3.63776959	0.370504526	17.02957831	13.01613401	20.78440119
Zm00001d002701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002703	8.536451547	9.419458186	8.83168173	9.884515488	11.96125295	10.94503767	13.18373758	10.9396992	12.75708721	19.22472341	16.36315516	14.97384017	9.0190869	8.857124831	9.163122434
Zm00001d002704	29.14329535	27.23966619	24.28777761	26.86430833	39.17880231	26.14169925	49.02062418	55.4018145	47.4391317	170.6922162	99.65678602	131.9568113	37.15454648	37.36882761	54.58059542
Zm00001d002705	0.111347401	0.070121232	0.188200714	0.633236477	1.041687408	0.96309556	3.153852807	3.071860121	3.205100771	9.223199399	6.015277721	5.395136454	1.263457358	1.401282451	0.901129536
Zm00001d002706	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002707	3.892096638	1.662776045	3.974207776	4.305228877	94.6178448	19.87611603	63.19087863	82.9172205	63.5703073	79.15545273	36.18151837	53.60111245	0.010943169	0.075041636	0.158284241
Zm00001d002708	2.339184511	2.553383341	1.948035889	5.385838981	5.806162526	7.367854557	7.58325837	7.748003724	7.978989297	16.27398861	13.65978156	14.60397665	17.0391569	15.18852367	13.09214969
Zm00001d002709	0	3.538144461	0.930994507	1.868511768	0.740295466	1.147200831	0	0	0	2.582861025	0.944650114	1.244742946	1.466984222	1.026499089	0.649553921
Zm00001d002710	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002711	5.953759035	5.657836805	7.072373099	16.96510133	15.8568158	18.93380154	19.14020022	17.60058841	20.08108826	20.73634234	27.72140734	19.76432365	14.2081328	11.68613974	13.72165296
Zm00001d002712	0	0	0	0	0.00586007	0.016345932	0.020787036	0.005362523	0.02742424	0	0.005608284	0	0.009953513	0.00487537	0.015425321
Zm00001d002713	1.599452645	1.058724013	1.20429029	1.557957453	3.030512124	1.587663251	2.605630962	2.71689878	3.023645456	0.772873188	1.045286409	0.206925671	1.424032384	1.177449681	1.214793413
Zm00001d002714	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002715	2.225808379	2.120072026	2.257842627	6.519817268	6.837839697	6.436499793	6.596732524	7.075385398	7.796154729	3.131117758	4.623999115	2.943446113	4.176606421	4.133519374	4.152204834
Zm00001d002716	32.64552152	35.08405461	31.20796644	25.19138609	27.5108425	20.82643025	23.77493323	25.53071123	25.02966172	15.81263379	20.61182684	14.61872356	15.90130686	15.73904283	15.19048261
Zm00001d002717	0	0	0	0.009627425	0.03051472	0	0	0	0	0	0	0	0	0	0
Zm00001d002718	19.14351453	18.27627487	17.23382157	15.97961444	10.54550777	11.1196916	3.385249381	3.782430713	2.444216445	31.18977594	21.62544417	44.49620807	14.16139993	14.23269896	14.24420367
Zm00001d002719	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002720	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002721	7.719826119	11.65064617	9.171569645	4.792709446	1.523559988	3.458154147	0	0.041005961	0	0	0	0	0.342504845	0.186404063	0.078635881
Zm00001d002722	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002723	0	0	0	0	0	0	0	0.021215439	0.021699386	0	0	0	0	0	0
Zm00001d002724	0	0	0	0	0	0	0	0.140892275	0	0	0.110511952	0	0	0	0
Zm00001d002725	1.479371418	1.363017392	1.974492351	3.266453599	8.460823889	4.298356226	5.327187732	6.611110486	6.918097772	1.579840931	1.596955877	0.978804708	1.004873162	0.744611634	1.247827269
Zm00001d002726	2.25014382	2.936122191	0	0	0.002737668	0	0	0	0	0	0	0	0	0	0
Zm00001d002727	0.079541725	0.30054929	0.234779888	0.545605436	0.497837484	0.280167301	0.546048972	0.563466635	0.52727141	0.027425288	0.125380833	0	0.967980966	0.392383943	0.758678979
Zm00001d002728	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002729	0.0602257	0	0.018712169	0.075110881	0.119034293	0.036892362	0.404648954	0.308628564	0.092843739	0.249183509	0.132906445	0.216824717	0.016848623	0.099032291	0.052221846
Zm00001d002730	3.702625853	4.304742428	6.118656609	19.41824904	13.88568092	22.54818681	14.78623301	12.83755063	14.13398555	3.460470054	4.805954313	3.11000507	10.62399288	9.723634823	7.777463082
Zm00001d002731	0.162752785	0.13044674	0.091940745	0.092262824	0.740829589	0.018126766	0	0.12488179	0.018247211	0.122434321	0.44778869	0.180290149	0.314580568	0.064878297	0.410540573
Zm00001d002732	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002733	0	0	0	0.095519159	0	0.023458168	0.357979539	0.415573014	0.637579021	0.132037013	0.048290937	0.021210606	2.721170613	3.46335617	3.320548754
Zm00001d002734	14.73806431	16.19047634	20.6081195	34.14961772	42.65708946	35.01504502	31.54953347	30.71370164	31.91785278	3.487608876	15.64542624	3.837157969	20.73705153	25.41129151	26.90642575
Zm00001d002735	3.607556586	3.009484083	3.260714141	5.708710068	8.340205587	6.302449309	6.574975728	7.654680221	6.003419976	1.718779828	3.255368535	0.980906924	4.734266765	4.812444427	6.54874119
Zm00001d002736	0	0.007112338	0	0	0.252982699	0.01383654	0.224347153	0.769408002	0.383033154	0	0.049846779	0.075065043	0.429699043	0.235234075	0.443946807
Zm00001d002737	4.032522236	3.570212499	4.306429213	5.365724004	7.489989332	6.083571513	6.680493518	6.957443011	7.675986709	2.615545819	2.72225126	2.494728769	2.785402804	2.579370096	2.924410534
Zm00001d002738	0	0	0	0	0	0	0	0	0.017822857	0	0	0	0	0	0
Zm00001d002739	8.50324332	13.51037519	6.706655429	2.220503204	2.008791547	2.970206403	1.4469961	1.509742408	1.160681293	2.315112751	1.748971769	1.9631594	4.748462904	4.503909388	4.851824357
Zm00001d002740	0.169828993	0.178250204	0.914610546	1.976831291	1.56642229	1.560478149	1.058374291	0.716712879	0.733061869	0.89785169	0	0	0.918546465	0.868805026	1.505315435
Zm00001d002741	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002742	4.323254104	4.361136434	4.797941853	4.212905878	3.723388062	5.247817601	4.38319762	4.523011191	3.748805841	1.694744074	1.856986869	0.870746309	3.524010913	3.288607234	3.531575186
Zm00001d002743	0	0.134944904	0	0	0	0	0	0.025837612	0	0	0	0	0	0	0.099096
Zm00001d002744	0	0	0	0	0.027170221	0	0	0.124316714	0.025430502	0	0.130014062	0.091368763	0	0.090418623	0.095359349
Zm00001d002745	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002746	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002747	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002748	0	0	0	0.075276688	0	0.295790413	0	0.036389396	0	0.083244528	0.076114192	0	2.971903703	4.598625278	5.408169692
Zm00001d002750	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002751	1.321960334	1.445777223	1.169349605	4.459094671	4.996272609	5.002837816	4.991449397	5.264115518	5.14631631	3.192224246	3.150161078	1.224682567	3.237649034	2.877729793	2.986025749
Zm00001d002753	0	0	0	0	0	0	0	0	0	0.138131029	0	0	0	0	0
Zm00001d002754	0.380120598	0.759417648	0.21177224	0.179819625	0.466322264	0.128468895	0.22974358	0.521558078	0.549620692	0.397706118	0.743810073	0.116160096	0.60138115	0.689712907	0.591013107
Zm00001d002755	0	0.01084318	0.010699402	0.064421297	0.533155697	0.073831187	0.865136006	1.775082969	1.645696199	10.89973859	4.657368958	10.27108892	0.009633847	0	0.199065643
Zm00001d002756	2.424199013	2.345658735	2.224042434	6.332178771	4.195007639	4.958456926	5.884186517	6.385508127	4.183027318	4.677848302	3.319395539	3.296263728	8.941618116	7.687337622	9.262157757
Zm00001d002757	0.162752785	0.161832422	0.085166164	1.281967661	0.677212644	1.815538759	0.980911041	0.588728437	0.507080391	0.248090598	0.421274886	0.189779104	0.843529059	0.723051551	1.029952666
Zm00001d002758	5.883822194	4.269483927	6.21177143	12.03541404	9.027047886	14.06777442	5.983129549	4.93427199	6.352475082	2.148024929	2.426161136	4.533162882	0.865740715	0.647237102	1.38874596
Zm00001d002759	34.61422233	30.45539244	40.26679755	79.58140644	55.9092633	87.7942239	64.85979811	51.15219393	62.69387961	1.839218891	1.734563062	1.793168034	12.20129734	9.258769881	12.28586742
Zm00001d002760	0	0	0	0	0.01681966	0	0	0	0.015742692	0.93306156	0.33803656	1.046389884	0	0	0
Zm00001d002761	6.561615437	2.833501345	3.692061023	1.025168443	0.760078326	1.554771759	0.050553281	0	0.017785256	0.934788626	0.963832092	1.198130737	0.613233007	0.347796949	1.483878981
Zm00001d002762	126.3938127	128.0968354	139.2828741	62.74056562	99.71956183	77.66413056	85.16109506	76.55432104	88.79822777	195.1031722	184.2818382	143.979713	22.21932225	20.05388173	19.66318287
Zm00001d002768	0.029025974	0.036558322	0	0	0	0.03556079	0	0	0	0	0	0	0	0	0
Zm00001d002769	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002770	3.783460628	4.94638604	4.277678788	6.887315954	4.455358057	5.981243078	5.675858255	5.669982136	5.757758255	3.361963969	4.289425633	3.464415208	8.588306644	8.893615098	8.356170489
Zm00001d002771	0.033142385	0.125228871	0	0.578672433	0.305689683	0.761324188	0.116180632	0.169839234	0.122621258	0	0.010448403	0	0.398689478	0.081746655	0.08621352
Zm00001d002772	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.03612757
Zm00001d002773	0	0	0	0	0	0	0.092518361	0	0.01627454	0	0	0.01461812	0	0.115728855	0
Zm00001d002774	0	0	0	0	0	0	0	0	0	0	0	0	0.033113744	0	0.068423429
Zm00001d002775	23.8508406	25.41006707	21.91720425	23.86287276	27.34176574	22.07593496	37.73753329	40.59683109	39.06483535	15.89226579	26.75343996	17.64662845	18.5945116	20.47344673	21.89941348
Zm00001d002776	1.476096996	1.185363857	1.403575415	1.247874753	5.090872441	0.703949032	7.894810724	12.04077637	14.74676127	131.3557022	126.0259086	153.6166134	0.144116773	0	1.088081266
Zm00001d002777	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002778	8.448657773	8.310128637	9.381485332	9.287876503	15.40823594	10.37405681	14.44178584	14.37512717	11.70927846	16.76572571	16.78429097	12.00596987	6.454186494	8.372368323	7.225095364
Zm00001d002781	29.08626832	30.27460759	26.50672098	28.75923151	24.65110141	29.42870597	35.61599117	29.62215267	30.7469448	15.83330499	18.609768	17.23518334	26.99544328	28.66314155	26.68370966
Zm00001d002782	10.00158692	10.34648619	7.601080154	5.578695936	8.201045119	6.582115085	9.879175481	8.415718073	9.554239697	13.04956548	11.78057413	13.28453729	4.227230851	4.246284565	4.090100492
Zm00001d002783	0.030290769	0	0.100387886	0	0	0	0	0.066960251	0.012452306	0.222805146	0.006366272	0.285215287	0.011298781	0	0.204284868
Zm00001d002784	0.041553902	0.052337294	0.180751593	0.207296898	0.068441703	0.254546081	0.060694669	0.187892054	0.281861175	0.014327421	0.170302614	0.023015764	0.151125491	0.250540659	0.756661216
Zm00001d002787	10.46288754	11.32488292	9.942958714	10.92077399	9.141560873	9.438599126	9.587290037	8.020434935	9.476112176	2.141960085	4.084482117	2.071315523	10.38197546	8.837558748	8.576247804
Zm00001d002788	25.32139089	23.3153281	25.34198608	20.13268648	20.25286672	33.02512494	23.21014445	15.95664719	15.08229929	14.98448526	17.7268664	17.88233817	42.88491769	36.52171636	41.15166702
Zm00001d002789	13.05153177	14.60138172	13.60942592	23.55355143	9.499844632	18.95272166	5.483899251	4.556217862	4.389861377	0.010422822	0.257311412	0.041858409	30.26728001	29.21987252	31.69899734
Zm00001d002790	2.638562644	2.318991679	1.807771501	4.303224213	4.680164158	4.079233666	3.783365414	3.85160336	4.535447826	7.957841382	6.386489247	6.878939089	8.863316731	10.0548289	8.726998392
Zm00001d002791	2.226620623	2.7737314	2.521497259	5.935634732	5.814260345	5.279942387	5.570777299	5.738673304	5.431949235	0.780794743	1.554218027	0.273060808	5.2864416	4.670967461	4.95125597
Zm00001d002793	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002794	0	0.039432755	0.051879847	0.195230953	0.35752692	0.242926344	0.280474236	0.062917543	0.244540486	0.129537381	0.013160202	0	0.140139387	0.320330403	0.422292689
Zm00001d002796	1.631792113	1.992588198	2.353629551	0.988595488	2.661435833	1.247448706	3.770867625	3.891149327	3.43998441	1.157274631	2.317051183	1.22712771	1.284157742	1.058026208	1.430268778
Zm00001d002797	6.369331388	6.982206572	7.179374506	11.50947043	16.66132377	17.70123818	22.17634281	23.62555224	25.91760901	31.32804872	31.10688971	22.26100801	7.674639593	6.42497985	8.602973978
Zm00001d002798	0.607610396	0.409975469	0.026969285	6.008155103	7.948971524	19.62041193	11.86702173	7.718883947	5.138414627	0.239427117	1.17668917	0.024038687	29.18866158	26.3103122	36.00212749
Zm00001d002799	0.280702141	1.139201798	0.801080065	1.54294313	0.643841253	0.522216287	5.648896715	9.639924484	4.949143176	81.15486833	54.18430442	54.62339075	4.141660615	4.775289374	8.24546546
Zm00001d002801	0.740335923	1.544558745	0.366907719	2.718963969	1.717600255	2.826763829	3.141894842	3.833580517	2.806336186	4.485082395	6.168549552	5.519394235	2.663269125	1.468814477	1.932404931
Zm00001d002802	1.019855977	0.894280769	1.716713431	0.772812233	2.109271185	1.107119216	1.825264656	4.59197062	2.467767294	2.314575178	2.116319542	1.158351439	0.99678936	1.004786549	1.761176416
Zm00001d002803	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002804	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002805	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002806	2.43810054	4.019367346	2.125814255	8.81960235	5.163635755	6.881062689	1.968887467	2.678137202	1.149216507	1.285160262	1.110691556	0.749441404	11.27036018	9.305583244	12.41147334
Zm00001d002809	0	0	0	0.021339387	0	0	0	0	0	0	0.021576802	0	0	0	0
Zm00001d002810	30.50620523	28.63891989	26.27125677	23.02379114	21.96130125	21.88105756	23.17229096	19.99012755	24.34788944	27.22806346	19.31266019	20.38176055	16.07979437	15.46158447	17.05229499
Zm00001d002811	39.49670655	36.53276061	36.44963811	22.23968238	32.06209545	27.18375189	27.15864659	28.89176932	25.59117679	24.81215545	27.7113153	16.3929059	13.43736254	10.03132969	12.91089729
Zm00001d002812	1.494450582	1.90485323	1.396695301	3.31013355	3.961945664	2.80494867	3.98847044	4.115693155	3.789356108	0.939858743	1.31918509	0.456913731	1.966669709	1.723459205	2.377437408
Zm00001d002813	0	0.095660943	0	0.757785328	0.500384898	0.651355139	0.266247282	0.183159958	0.28100705	0.83799491	0	0	0	0.416302408	0.351240268
Zm00001d002814	0.893372504	1.131239251	0.985267181	0.262861764	0.119924061	0.173125227	0.159524475	0.077974544	0.064984111	0.026425908	0.02114209	0.018572286	0.391308385	0.341327132	0.387668831
Zm00001d002815	62.78640764	57.71543552	72.58968229	183.4843446	110.1239234	181.941553	79.82197939	60.81988019	63.38270126	4.723990917	11.09886707	4.866655656	468.3722664	452.9533458	422.3319872
Zm00001d002816	15.29166628	10.29853911	17.33787012	0	0.368130579	0.091275924	0.065292249	0.044916611	0.091882414	95.37900519	78.80074341	275.4460124	0	0	0
Zm00001d002817	0.104205891	0.094790009	0.143897097	0.465693821	0.495829202	0.510665896	0.544558278	0.513065053	0.374834727	0.203599229	0.379620139	0.378368824	0.664027673	0.780600069	0.970502964
Zm00001d002818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002819	11.18089244	11.31183671	10.80772469	13.85193043	8.807942257	10.58427858	9.215995972	8.279990601	9.382519674	4.739264672	7.157526103	3.213207841	9.603841566	8.333683558	9.500617342
Zm00001d002820	2.167390744	1.819891108	0.046045121	0.115516056	0.146454117	2.632654916	0.129876723	0.067009741	0	0.051097251	0	0.2052083	12.74879145	15.25088335	7.710152229
Zm00001d002821	0	0	0	0	0	0.048974071	0	0	0	0	0	0	0.044732602	0.043821306	0.046215825
Zm00001d002822	19.99029968	22.78552244	18.64307825	71.58066917	38.133704	55.37259678	50.69073981	50.89997235	47.9073693	3.105209877	4.504214026	1.324042057	124.7212842	127.7618125	133.2219463
Zm00001d002823	2.618031718	2.163429637	2.809290058	5.526771556	9.061617594	4.756409313	14.78101448	19.29467396	18.17555174	3.293660519	2.13384592	2.383770919	0.821734339	1.546988305	2.701974413
Zm00001d002824	24.93247468	23.1352311	23.18788034	20.09406239	18.389145	17.72079653	14.80232488	17.7524267	15.00145328	3.2512591	4.044737459	2.359027257	18.86821135	17.1484569	20.08655284
Zm00001d002825	8.147287609	7.911055507	8.110981007	6.663131913	4.215410998	4.75560382	4.760052819	4.153244915	3.919193489	4.985808252	6.19935848	5.800223795	7.983408564	7.306399522	5.375455587
Zm00001d002826	73.75337927	68.13838108	75.1132263	9.683988483	13.98841357	10.57347448	13.05950358	17.68158701	11.08329482	11.79747025	10.94747453	7.276067242	3.988448723	3.042031006	2.913920661
Zm00001d002827	6.040548801	6.076553949	5.410658241	3.139474325	3.325568484	3.476083239	3.173491195	3.138188982	3.033702325	2.005212884	2.574287785	1.901454045	2.405605589	2.182102217	2.255804891
Zm00001d002828	0	0	0	0	0	0	0.007665469	0	0	0	0	0	0	0	0.030337451
Zm00001d002829	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002830	1.873693939	1.30007814	2.000950546	1.847043435	3.902879008	2.082473138	4.509925244	2.989783804	3.04414695	40.2242715	21.43487471	40.99607119	6.641717534	6.543310401	8.89198537
Zm00001d002833	0.059569647	0	0.018508333	0	0	0	0	0	0	0.020539091	0.150238471	0.032994276	0	0.016325585	0.258264903
Zm00001d002834	26.92273698	21.54888607	17.83521422	16.50177261	12.64130269	16.60220992	14.90050581	15.7372964	13.70525612	72.66297974	38.13437882	93.36815628	33.07975888	27.10347785	26.1350489
Zm00001d002835	1.065387712	0.450414467	0.578700605	0.39024912	0.490840772	0.292082958	0.221993647	0.184158105	0.381312019	3.15446858	3.71103352	2.682245813	0.233438361	0.187846536	0.357461145
Zm00001d002836	8.760762856	7.068293116	8.260603806	3.970587508	6.984708631	4.577136876	8.33421375	9.725296217	5.785861432	2.451529109	4.3670054	1.670205931	7.928108435	7.71092197	9.145132035
Zm00001d002837	0.315863817	0.234618663	0.13085216	1.222198197	1.84620684	1.091471881	0.899057767	1.279298522	0.849014191	0.659027396	0.367674837	0.206351047	0.679734142	0.692522016	1.610544832
Zm00001d002838	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002839	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002841	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002842	93.52884458	105.7598268	72.83182396	101.0688931	104.0886201	123.8161306	120.0666156	108.2989948	90.90660304	32.93450168	41.53945759	15.65577636	47.27327641	44.60302615	55.46267283
Zm00001d002843	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002844	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002845	0	0	0.07811793	0	0	0.038503752	0	0	0	0	0.237791236	0	0	0	0.0363352
Zm00001d002846	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002847	20.83647352	17.23258155	23.41083204	7.332246971	136.4638618	14.60418399	121.0930526	145.3884654	87.60755758	1062.625574	453.7968465	734.9869263	6.24035705	3.506813014	36.00976315
Zm00001d002848	1.698860302	1.546960335	1.961556962	7.358343679	9.778302366	7.55890724	17.8660645	18.92729793	19.38736296	3.300792295	2.359444103	1.424155938	6.795073732	5.832428199	7.166363155
Zm00001d002849	17.05229177	19.31733878	22.89779322	22.12244265	10.71792169	15.5484775	8.130562174	4.726708595	6.587046976	0.202740704	0.432541405	0.488528146	14.69538112	12.30106471	9.574129891
Zm00001d002850	3.639221279	3.285598461	3.582245355	2.430000655	3.309966534	1.65715795	3.236362727	3.320178745	2.303662035	7.106670619	3.43172805	3.478389447	2.054222227	3.15977941	4.765945689
Zm00001d002851	0.013285942	0.117135848	0.165118073	0.579937751	0.367629721	0.211602252	0.170770852	0.080099107	0	0.018323504	0.016753999	0.014717563	4.742699095	4.966499868	3.809369673
Zm00001d002852	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002853	9.153912353	10.17114714	8.838102436	15.48212445	15.23745681	13.21178362	18.50084715	19.69019484	26.54398109	22.898645	28.71430735	13.25063782	6.58988784	6.575489729	6.975011215
Zm00001d002854	19.24578626	19.62995128	21.71652585	50.40849659	58.26809347	51.8319879	49.81368267	53.96027525	53.5641442	68.801602	81.81188338	66.49482766	60.96262207	64.18697832	62.95408591
Zm00001d002856	80.35074276	74.95847087	73.26995084	17.97952925	14.42619102	18.66281704	18.20193686	15.29212857	18.52172253	18.61771711	13.46299697	24.14527316	18.31335829	13.73012471	13.27091768
Zm00001d002857	15.10054147	14.21470955	11.99611388	11.2510286	14.24721156	11.47309866	13.07919441	12.67944394	13.9416125	12.23711509	11.82095263	8.50264499	6.698957628	7.3255658	6.974730377
Zm00001d002859	3.055131684	2.613701657	2.961125186	13.63534317	11.40582189	13.25335403	15.77276593	14.83943188	12.09732388	6.717798272	7.571971442	8.045780479	10.91217708	11.04795794	11.18513897
Zm00001d002860	0	0	0	0	0.011562167	0	0.051267128	0.042321942	0.010821838	0	0	0	0.009819352	0	0.081159497
Zm00001d002862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002863	0	0	0	0	0	0	0	0	0	0.924701322	0	0	0	0	0
Zm00001d002864	6.665768063	5.683147997	8.563032578	7.034294187	24.53363931	8.166477928	17.71237196	21.30683563	21.86400844	16.1499652	23.66541186	17.59388424	5.164067424	5.613934586	6.772860868
Zm00001d002865	3.905205898	3.529566196	3.632561222	4.227780719	6.64650551	4.190051791	4.5033759	4.730589351	4.556067576	3.445162016	4.916990251	3.017525403	4.366678845	3.987033777	4.044643556
Zm00001d002866	0.014731933	0.024739899	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002867	0	0.114032912	0.125023177	0	0.106041833	0	0.30562602	0.157687381	0.062032461	0.554963517	0.317142468	0.156012668	0.022514422	0	0.104674252
Zm00001d002868	5.738542633	4.8539071	7.656280446	13.19107794	13.56599057	10.95930868	9.302219869	9.4632645	8.915902695	4.694323341	7.910472842	3.89515754	10.51381814	8.665257536	7.577683564
Zm00001d002869	0.006180485	0.046706066	0.061449005	0.053956234	0.097724356	0.045431642	0.014443795	0.05961807	0.007622253	0	0	0	0.048413132	0	0.035727423
Zm00001d002870	0	0	0	0.08236797	0	0	0.463038752	0	0	0	0	0	0.29562415	0.144800838	0.15271316
Zm00001d002871	1.661314502	1.768603037	2.02167225	21.68115635	17.91613197	33.62547287	25.61173678	23.73991529	13.55541422	0.177297296	0.461392397	0.093111874	83.41444338	75.54691747	79.8865185
Zm00001d002872	0	0	0	0.769180596	1.17383525	1.511199892	3.523272309	2.107028089	2.704428751	0	0.172830723	0	0.728502369	1.201955825	0.752657718
Zm00001d002873	16.29717347	18.62171089	23.31452388	35.25995521	22.49712551	35.73899271	16.67925801	15.24005839	13.91173915	3.1706646	6.262013592	1.561975641	46.83322852	43.10130046	47.33474511
Zm00001d002874	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002875	4.014330487	5.504966991	4.023855856	7.388095019	7.58322053	8.278042529	9.429713028	8.111010546	7.111545045	3.66852739	3.657084336	3.187632744	8.069103351	8.196724805	7.590606784
Zm00001d002876	0.656664424	0.448581029	0.714667765	1.781361033	3.837415799	1.73627367	2.995552871	4.088667069	4.213961894	6.211623061	8.842155782	4.833048054	0.697464412	0.475838736	1.089464387
Zm00001d002878	24.24526794	20.47990734	30.85381708	24.08147888	29.36417997	25.96856593	22.56269006	26.72514503	20.79949527	26.39683968	27.52275726	14.98354732	21.63458628	17.53333116	24.17030377
Zm00001d002879	2.257787266	2.164132805	2.228281935	1.138748444	1.924977969	1.423727079	1.328811574	1.151005201	1.658402262	0.515160806	0.6071112	0.09195126	0.640922849	0.636965433	0.652577547
Zm00001d002880	26.69225062	27.05688107	34.06418073	29.08925326	24.40657852	20.80364766	16.03328147	18.4042253	19.05022183	20.2690019	21.06627355	15.36599748	22.93849623	24.06126383	28.60466477
Zm00001d002881	24.98535854	21.40825928	26.97509767	1.657655406	2.872899501	0.938528956	0.451396255	0.734218797	1.178937623	0.379264938	2.146726432	0.217591559	0.395652149	0.172263066	0.355782168
Zm00001d002882	6.079808906	6.173630604	6.810073439	8.566670723	10.3103698	8.932870472	10.76678035	11.32464619	12.15869528	8.569008932	11.38111385	7.609123751	5.584592549	6.445579727	6.810634469
Zm00001d002884	69.09801951	50.10853667	55.47644711	38.01262682	72.66985143	37.15970246	113.706165	144.5515427	94.15696686	208.456106	201.2119389	147.3582665	39.3018557	35.96852808	37.54186681
Zm00001d002885	0	0	0	0	0	0	0.016640455	0	0	0	0	0	0	0	0
Zm00001d002886	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002887	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002888	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002889	6.904825701	7.605150232	7.055544947	8.701466011	8.19148067	8.611732796	9.127808522	8.277271296	7.951489289	1.759604867	4.105693355	1.17332776	9.89747701	9.781609983	9.847612332
Zm00001d002890	0.647706514	0.757518126	0.402485781	1.75983141	1.066810443	1.473696905	1.432599591	2.175605593	1.283788553	0.957100786	0.9918027	1.383749773	2.743902323	3.524834604	5.108138926
Zm00001d002891	3.006841549	3.332833502	3.125993931	4.661627116	4.369926857	4.696639667	5.430624001	5.97718126	4.637305227	4.904119176	5.78016473	5.873173651	6.043695113	6.448945175	6.233018115
Zm00001d002893	0.42819924	0.392231656	0.251569985	0.534031517	0.389821492	0.705829031	0.718685717	0.535085754	0.508885204	14.76393368	3.681633951	6.830491476	0.705684812	0.708377902	0.837095969
Zm00001d002896	259.8456739	229.9675166	247.4621568	169.4930225	129.6960263	165.5965052	56.42176454	56.3052911	56.38223445	29.65706171	31.58107004	23.41208392	75.95289331	68.86812751	66.32371375
Zm00001d002897	7.38397904	2.024360201	4.476789459	0.153286451	0.884497787	0.069498474	0.375618573	0.421799903	0.629642352	5.059263879	3.672115	4.555879698	0	0	0
Zm00001d002898	2.458202709	0.012688998	2.216171707	0	18.01385633	1.900785813	14.23255554	12.02619916	4.67171632	3.001219797	2.960124132	1.093698236	0	0	0
Zm00001d002899	0.148307271	0	0.016756065	0.975256266	1.314620679	0.214732463	1.244587888	1.967072922	1.779157062	0.11156737	0.034003678	0	0	0	0.015587586
Zm00001d002900	0	0	0	0	0.183502781	0	0.108487857	0	0	0	0	0	0.155842612	0.127223147	0.134174975
Zm00001d002901	18.38681895	9.100267084	11.80316635	4.90913104	3.759413495	1.893380154	3.34931364	4.98513625	9.22028929	1.420947892	5.563395913	2.57527494	0.339967772	0.289601675	0.167984476
Zm00001d002902	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002905	0.087974478	0.05065334	0.259280002	0.012539195	0.24839846	0.14165473	0.126294905	0.036369324	0.111596843	0.027732871	0.015848377	0.019490827	0.486605829	0.30861028	0.264447306
Zm00001d002906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002907	0	0	0	0	0	0	0	0	0	0	0.09498548	0	0	0	0
Zm00001d002912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002915	0	0.018201871	0	0.036046871	0	0.035410427	0	0	0	0	0	0	0	0	0
Zm00001d002916	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002917	0.023550791	0.177973847	0.014634496	0.044057287	0.015515811	0.100985293	0	0.085190678	0.029044656	4.61222005	0.103944059	0	0.052708182	0.103268814	0
Zm00001d002919	28.33769177	31.15028173	28.14415419	16.99573129	19.63579359	18.12884992	18.99434636	16.18965606	19.34749688	11.64283159	18.63798897	14.29334775	15.36693407	14.51794835	13.1210445
Zm00001d002922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002925	3.116222531	3.053807683	3.640677096	6.419529002	9.293672934	7.450551582	8.109337203	8.650773422	8.767223877	4.311489296	4.924601526	2.547178224	5.346374994	5.100203774	5.914255018
Zm00001d002928	0.408281194	0.716807789	0.415156148	1.558431818	2.445319864	2.637419902	2.515494687	2.327208879	1.419022026	1.60394501	2.355854798	0.370043491	4.831849648	4.5164102	4.148131674
Zm00001d002929	0	0	0	0.069841966	0.046118424	0.120065463	0.00817964	0.050643306	0.008633089	0	0	0	0.054833512	0.015347554	0.06474475
Zm00001d002930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002933	6.648397807	6.086070346	4.952535411	4.547275449	4.815452733	4.348671685	5.735419834	5.893850924	4.960545816	14.01790284	9.939255177	18.6953891	3.181430967	3.359930355	3.026394801
Zm00001d002934	1.038847562	1.465444231	1.308297246	2.107518466	0.985560529	1.985459432	1.8289327	2.50522739	1.093279708	0.324754867	0.069867739	0.368252219	32.45710554	26.19288709	28.98532912
Zm00001d002936	10.61671553	10.35678771	10.63898108	8.820292642	11.43698165	9.438723514	9.557964774	9.852913733	10.70974475	10.38125809	10.96633963	9.279975329	7.969434224	7.001552157	7.21042014
Zm00001d002937	11.72585946	9.964815525	14.20170837	16.49297479	19.59154048	14.56908637	15.46769927	15.42853294	15.06890466	0.908414651	3.834300414	0.743785242	7.59642274	6.436944801	8.170025734
Zm00001d002938	3.595783913	3.717926794	2.603542351	4.235680678	3.901508519	4.57754059	4.350030227	3.969377001	4.138213272	0.756696897	1.469534062	0.592715077	3.587421118	3.216091441	3.035345004
Zm00001d002939	4.510310497	4.958314852	3.707890062	20.37477289	13.41931706	19.95942459	16.06645237	16.09131826	13.38960848	1.912237103	1.488258759	0.56682831	20.7059152	19.62816221	28.93040881
Zm00001d002940	0.118705013	0.17207686	0.175362211	0.122904239	0.177069361	0.181101363	0.274796507	0.205244776	0.17678032	0.355228019	0.56769541	0.245624653	0.1779484	0.527880184	1.097913551
Zm00001d002941	0.852269054	1.143825275	1.007110563	1.32428504	3.212486387	1.763066541	3.11823593	3.411436112	3.4634083	1.628245093	2.290426567	2.445386671	2.071597181	1.554592744	2.374506259
Zm00001d002942	26.85229974	26.27744987	33.78193074	30.18791487	37.21376187	29.78594033	35.417484	30.56168374	37.30396065	13.49586979	17.01509451	6.160422718	18.17076769	19.30514219	18.35081571
Zm00001d002943	9.649870838	11.26322158	10.08473065	18.69645342	14.18686342	16.42311496	12.72013525	12.55381026	13.01074516	4.259190421	6.790859707	3.37058771	21.20129406	23.07431666	22.70580097
Zm00001d002944	21.16446354	22.90490095	23.16665817	31.89259547	35.25020352	29.63977985	32.55610296	34.64037709	41.66444621	19.94323301	28.69724728	20.7437739	14.07339288	13.66199292	12.43587814
Zm00001d002945	12.2744482	13.10102634	11.80211908	10.6204669	13.66498007	11.19772775	11.56209863	12.08837929	12.5115477	13.05432162	14.59917289	11.51521589	7.475878097	6.724200622	7.667456761
Zm00001d002946	13.42416343	13.39137946	12.9988706	17.13233938	15.88691908	16.61796423	16.84094257	14.17062254	16.36273581	7.087619604	8.422608539	4.616296682	14.1649825	14.445192	13.93006208
Zm00001d002949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002950	1.19743892	1.086460521	0.867517609	2.593975618	1.899343922	2.864525712	1.956237816	1.652545325	2.040188171	3.283364243	0.715644026	0.653804376	2.698996945	3.14793054	2.34561138
Zm00001d002951	1.445113653	1.781604808	2.157090321	2.14557507	0.805989098	1.030427592	4.020512655	4.683486176	3.356996972	0.337447615	0.125345772	0.110110091	8.25676762	9.22850238	8.159264284
Zm00001d002952	0.134141298	0	0.0138926	0	0	0	0.013062009	0.013478656	0	0.092501482	0	0	0	0	0
Zm00001d002953	10.36511853	11.47931314	13.43704981	30.0018603	30.297815	26.29747544	22.19307413	26.03744502	26.80280751	8.106094559	15.56220165	8.281563183	18.34270561	21.77832991	21.90086378
Zm00001d002954	4.267585786	3.9881018	4.131464986	2.326907684	6.942726391	2.779643205	5.55477613	7.630922629	5.852462936	1.461396899	3.484653479	0.943646312	1.004403266	0.542078881	0.999273225
Zm00001d002955	0.074098829	0	0.046045121	0.046206422	0	0	0	0	0	0	0.186882001	0.12312498	0	0	0
Zm00001d002956	161.541534	159.9024483	142.0288551	38.68086943	29.13253319	35.51381259	27.60128355	23.21869664	24.16760454	64.7780857	35.17636667	47.30262712	42.11856502	38.42552567	34.47519933
Zm00001d002957	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002958	5.922849117	6.029194142	5.865219352	0.236105221	0.195996459	0.033133793	0.410826667	0.407626019	0.316862549	0	0.255784341	0.19473476	0.105924677	0.133414422	0.125070719
Zm00001d002959	0	0	0	0	0	0	0.087581343	0.144599967	0	0.620226496	0.113420162	0.09963403	0	0	0
Zm00001d002960	0.506341997	0.07502819	0.96243332	0.03714634	0.706425738	0.36490484	0.522053495	0.071827435	0.073465895	7.106525466	0.901430828	2.078639365	0.233311216	0.587721047	0.309917884
Zm00001d002961	2.474350931	3.011824997	2.345063638	5.150572153	5.605874561	5.205025438	6.496711033	6.145875155	6.849546842	2.618734095	4.856194493	3.950420087	6.381035723	7.272282695	6.880741973
Zm00001d002962	4.763804841	4.97856552	4.819381711	13.81182755	13.73040196	15.80563666	13.12389396	11.56208648	11.44760524	11.07231062	7.726140707	7.421195504	17.43394054	16.06271506	15.81369134
Zm00001d002963	0.374554354	0	0	0.934255884	1.480590931	3.212162327	1.313000297	1.129068235	1.385788191	2.06628882	0.236162528	0.829828631	1.466984222	1.026499089	2.165179735
Zm00001d002964	2.496602288	3.194926021	2.754343613	9.823828352	6.966296003	11.31874945	7.503805246	5.714805332	7.788066481	3.572116977	3.165131388	5.767876251	11.35439239	9.659516818	9.616231366
Zm00001d002965	0.911415595	2.582845457	2.860092709	0.824091544	0.150115469	0.809541387	0.346121467	0.576953868	0.084302115	4.148074807	0.143665538	0.908662351	4.258096346	6.794055304	7.665818853
Zm00001d002966	0.262347772	0.48646343	0.470956177	0.045442883	0	0.062496762	0.042576858	0.008786992	0	0.090455208	0.02756908	0.113017705	0	0.055921219	0.050551638
Zm00001d002967	4.134910003	6.046500166	4.242996387	6.274412573	7.235884436	6.896521086	10.09906847	10.06206097	10.87191684	19.22079868	28.91196623	32.2434837	5.699844147	4.840144295	5.891730753
Zm00001d002968	0.22084849	0.071783094	0.070831265	1.252774338	1.464388529	0.968813792	0.116543886	0.137441553	0.263581391	0.049126851	0.24256193	0.142052478	0.247136551	0.328008985	0.403587697
Zm00001d002969	33.31925088	29.38262652	36.02889064	32.39532278	27.92147731	24.93043899	20.52152131	24.66319281	18.13576268	4.44781914	10.41022592	3.261864849	9.571400353	9.664620525	10.59799963
Zm00001d002970	0.743496628	1.127546296	0.716586782	0.009461803	0.14994886	0	0.017730119	0.109774004	0.08420855	0.544092145	0.191341449	0.243721866	0.288651882	0.18296976	0.201739
Zm00001d002971	19.69241829	20.31753534	20.31338981	37.74293975	14.84625957	28.73639104	11.51185867	9.386759724	7.744434227	0.263379666	0.396644378	0.248880403	76.61845579	75.26692811	70.92484775
Zm00001d002972	0	0	0	0	0	0	0	0	0	0	0	0	0.029556704	0.046327316	0.030536731
Zm00001d002973	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002974	93.45800689	88.89255019	63.46985022	11.6846474	17.2359128	13.95662196	14.39149028	11.78123751	14.38358209	92.81275666	58.2859988	75.95773953	10.22972052	7.740130157	7.620359659
Zm00001d002975	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002976	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002977	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002978	15.32899723	15.50577257	15.1747039	16.02967779	14.45729239	15.23891113	13.01952316	11.27576267	11.82785212	7.276681417	9.045401159	6.350865893	11.71323086	10.15240712	10.39387253
Zm00001d002979	0.202287062	0.04246355	0.467888834	0.455512142	1.636277127	0.922475835	1.4182346	1.612530334	0.935535185	2.882867818	0.481837563	0.311228371	0.245229527	0.252553372	0.415771464
Zm00001d002980	13.4293671	10.74916306	13.27618168	11.17525878	31.83156163	16.32581793	24.09010795	27.94153766	25.16279641	17.61589554	29.53434256	15.39316381	8.822120725	8.030042073	8.52874695
Zm00001d002982	0	0	0	0	0	0	0	0	0	0	0.084405702	0	0	0	0
Zm00001d002984	2.921203829	1.986804198	8.737356926	0.218591922	0.949448268	0.381746601	2.139080731	2.606507095	0.672495504	36.85028901	13.40878356	10.93760237	0	0	4.503080362
Zm00001d002987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002988	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002989	0.121236816	0.080840233	0.035452582	0.213460656	0.112762794	0.27958906	0.29166369	0.232174595	0.131928192	12.53058117	5.656690047	19.5051934	0.806026878	1.10232187	0.890468286
Zm00001d002990	0	0	0	0	0	0	0	0	0	0	0	0	0.045261981	0	0
Zm00001d002991	0	0	0	0	0	0	0	0	0	0	0	0	0	0.029129031	0
Zm00001d002992	5.756309019	6.793153907	5.34292436	22.08000771	16.97015214	23.14210031	14.49110596	15.40536454	11.90147506	4.861741813	4.979049788	2.726121014	44.12965123	50.58157116	41.87386744
Zm00001d002993	3.200677118	2.69426232	4.637447934	24.05076905	6.908843722	16.09887171	4.81124501	4.188975982	3.431591974	0.044364436	0.081128774	0.017816909	58.09849244	57.40859187	60.50836761
Zm00001d002994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002996	0.38288464	0.170203984	0.279911858	0.224713936	0.638052572	0.248339686	2.197526994	1.154179307	0.694416104	1.211434158	0.667441215	0.673637657	0.415858436	0.03703514	0.442666895
Zm00001d002997	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002998	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d002999	0.074421524	0.421803831	0.138736933	0.046407648	0	0	0	0	0	0	0	0	0.041640037	0.048950093	0.404394756
Zm00001d003000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003001	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003002	2.09169879	1.721896971	2.021887321	1.508940035	1.360046153	2.185761744	1.118238586	1.302267302	1.272961936	0.433662366	0.508576005	0.212021215	0.680785464	0.681903345	0.671747013
Zm00001d003003	1.76535453	1.887364548	1.632735112	2.07366931	1.541726443	2.489735858	1.415188258	0.990053827	1.291113473	0.25479575	0.465942286	0.181914385	0.803977839	0.855107649	0.261056956
Zm00001d003004	0	0.020186365	0	0.35312974	0.253418846	0.098177797	0.143580012	0.470246551	0.283313087	0.265250441	0.296425964	0.18346055	0.04782665	0.146413508	0.247062322
Zm00001d003005	13.3542198	9.183450513	12.45980982	49.81614854	39.21277132	44.51870773	47.64668759	44.48397938	43.7393582	7.487302352	9.444447553	3.292254895	19.24513214	17.15889926	16.63046313
Zm00001d003006	0.112151222	0	0	0.013987014	0.029555138	0.137400592	0.235887666	0.27045769	0.152144916	0	0	0	1.342858755	1.733511915	3.591640642
Zm00001d003007	7.656668322	6.975702015	7.716435817	13.41473921	14.03211552	14.43972799	8.469956193	8.70497967	10.90475119	7.638439749	10.58652665	8.018875283	5.480077521	5.198010454	5.482044271
Zm00001d003009	192.3086905	233.5264595	174.9883856	98.00007556	80.07240282	95.90764311	95.84902169	106.3317811	100.3726803	28.80890611	35.81543038	19.72861501	35.61392121	28.13754223	23.69447863
Zm00001d003010	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003012	0.079682462	0.2293951	0.028294171	0	0	0	0	0	0	0.141293896	0.014354592	0	0.165596292	1.472483456	1.934599812
Zm00001d003013	0.083297693	0	0	0	0	0	0	0	0	0	0	0.011534176	0	0	0
Zm00001d003014	9.992836388	9.439510806	11.66969643	14.20310308	17.2987505	12.51699478	13.2066705	15.3729719	13.06762463	1.889052799	4.812388159	1.803583116	7.258858197	5.968312787	7.937764473
Zm00001d003015	0.257224978	0	0.272068051	0.641599667	7.1608324	1.6695492	5.69159523	8.031028905	3.435530546	0.762347251	1.173249391	0.709324093	3.760332083	5.531589086	10.35793209
Zm00001d003016	0.222577976	0.51706747	0.405710161	0.203565704	0.247657938	0.533257463	0.358335706	0.310126123	0.237900324	0	0.012474576	0	3.719473744	8.740543183	17.39554281
Zm00001d003017	0.451941617	0.540761032	0.739537923	1.507742296	2.401847511	2.191690844	1.87033215	2.334154176	1.778937192	8.004236511	4.445320454	5.331820406	0.623742524	0.747280025	1.04065815
Zm00001d003018	0	0	0	0	0	0.043617532	0	0	0.043907352	0	0	0	0.23903984	0.039028351	0.164643876
Zm00001d003019	2.401922323	2.133654943	1.826662741	7.440074132	5.450437558	6.203137079	2.844531243	3.795320475	3.911884703	2.463059151	5.420676788	4.707924499	5.139828966	5.497166346	4.107636931
Zm00001d003020	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003021	0.65202085	0.347183569	0.21740653	1.454454197	1.117571544	1.162502773	0.706138586	0.990725636	0.830272866	4.196473156	1.524113658	1.87322793	1.346557112	1.127357898	0.882526924
Zm00001d003022	0.092843694	0.263108196	0.201926228	0.144738284	0.244670375	0.113746228	0.325463571	0.223896723	0.114502024	0	0	0.025712008	0.233763918	0.40711407	0.10733998
Zm00001d003023	1.132653527	0.579965298	0.420983966	1.287178911	1.33203506	1.199608767	0.803998762	1.282757894	0.907316607	3.182628754	3.036832514	3.183660192	1.000950409	1.189435452	0.917875265
Zm00001d003024	1.815334234	0.950988927	1.337689229	3.5262396	3.704377036	3.621433975	6.870493917	6.915310755	5.725807574	0.022156152	0.202583603	0.017795972	4.098788886	3.751124403	3.101728103
Zm00001d003025	0.343177501	0.462389146	0.654630989	0.826131991	1.114692803	1.51553735	0.932564912	1.770653185	0.629928238	1.122707717	0.432757838	0.318270526	3.259761037	3.560807289	4.216728614
Zm00001d003027	0	0	0	0	0	0	0	0	0	0.064461147	0	0.012943908	0.013075684	0	0
Zm00001d003028	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003031	8.988836303	9.874002944	9.684670361	13.47496239	12.73354469	11.69298787	9.12063347	8.453404439	8.809571015	0.771871875	1.287602386	0.634170599	5.077206197	4.299363122	4.54417097
Zm00001d003032	0	0	0	0.921630805	0.486860982	0.452679247	0	0	0	0	0	0	0	0	0
Zm00001d003033	0.394145953	0.321496414	0.242590277	2.631025666	2.408772112	2.350029248	0.991299602	0.787557645	0.768487155	0.077656036	0.213013154	0.008316514	0.579681457	0.843578191	1.150065952
Zm00001d003034	1.128403387	0.871686655	0.860128271	2.458076583	2.491278003	2.50069581	2.168264736	1.614575859	2.152394425	0.366584347	0.455344919	0.238887754	2.087696444	1.577856377	1.739451071
Zm00001d003035	6.740512724	7.17207521	9.160176391	4.818526272	7.174214086	6.189896659	6.973363607	7.8408389	5.952462379	16.14961931	9.174606194	10.66690586	5.627205689	3.857494316	4.013301847
Zm00001d003036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003037	0.438984575	0.487080948	0.259795868	0.638729606	1.211941404	0.486595582	0.83049611	2.079453652	1.005438068	4.641646121	2.83376979	5.731241892	0.374276446	0.561435358	1.123807739
Zm00001d003038	0.007264205	0	0	0.009059601	0.009571656	0	0.059417566	0	0.044793897	0.040074146	0	0.064375654	0	0.007963277	0.016796825
Zm00001d003039	0.31736793	0.081995094	0.05056741	0.375509694	0.54684921	0.279152202	0.342317935	0.245303515	0.351258812	0.415256407	0.24628378	0.243391701	0.163913033	0.30330604	0.225797315
Zm00001d003040	3.718645134	2.708417543	3.968264242	1.511597521	1.94048214	1.357174673	1.355348416	1.702392365	1.810874793	1.539785691	1.835193719	1.698749125	0.802116526	0.776251202	0.748352716
Zm00001d003041	6.597560648	5.225657475	5.874876408	18.11050383	22.98783159	22.70715675	19.94867698	19.76487309	16.69265759	18.19824768	22.08589617	18.12050542	27.17205104	29.9737734	27.95505567
Zm00001d003043	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.416939887
Zm00001d003044	0.279718341	0.308268	0.152090215	3.837378389	1.604814993	2.78438258	2.029199237	1.454505549	1.351133642	0.160740712	0.154321038	0.038732411	12.28579187	16.21982324	20.75102352
Zm00001d003045	0.033528471	0	0	0	0	0	0	0	0	0.127163544	0	0	0	0	0
Zm00001d003046	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003047	0.205113099	0.101089842	0.260456797	1.985293754	2.5205298	1.600618303	0.411615173	0.419368201	0.274957974	0	0.157441686	0.054334018	0.793369018	0.601235181	0.701105819
Zm00001d003048	2.556528027	0.541246251	1.656520461	0.890205993	5.134476898	1.222499255	5.87673144	4.17159734	4.388021648	19.87949834	14.14458788	40.7050396	0.220064381	0.263488152	0.496826272
Zm00001d003049	1.849530448	2.269877499	1.796348323	2.601796896	1.559122053	2.051824443	1.535796575	1.330165661	1.499702072	1.340680273	2.975081824	2.504568664	4.249370808	3.779648922	4.781731694
Zm00001d003050	0.834992548	1.31905151	1.178440511	6.248198902	3.449858614	5.53969743	2.70381557	2.05628338	2.513354981	0.107351832	0.472936244	0	2.438899235	2.459028511	2.830647503
Zm00001d003051	0.090239168	0.028414141	0.280373758	0.028135594	0	0.13819416	0.606305693	0.299221714	0.306047282	0.528932431	0.711215535	0.899665694	0.277696448	0.272039198	0.495561765
Zm00001d003052	0	0	0	0.183476079	0	0	0.245577816	0.050682233	0.012959587	2.057950606	1.166109211	6.937775572	0.141108837	0.103675619	0.048595886
Zm00001d003053	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003057	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003058	2.747368544	1.838618242	1.946739114	4.428748387	2.679925837	4.039082854	1.284120067	2.215059841	0.940623478	38.32054711	25.35821713	33.24130716	7.938359646	8.432933248	6.011328645
Zm00001d003059	16.76660764	9.173760924	16.03735114	1.295271099	8.497102043	2.403425614	5.591986121	8.463190515	4.596014014	298.1674518	172.2188855	207.4718878	6.540243957	6.183765068	7.604683165
Zm00001d003060	0	0	0	0	0	0	0	0	0	0.190453389	0	0	0	0	0
Zm00001d003061	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003062	0.044483408	0	0	0.166433329	0.312604882	0.127162608	0.103957724	0.196668502	0.146294343	0.204499843	0.037396669	0.016425567	0.165927871	0.032509516	0.445717043
Zm00001d003064	1.788581752	0.958606525	0.733069092	1.364488195	11.11920011	2.412714232	9.493744435	9.796572287	5.491077217	31.18863104	14.93641712	16.22987729	0.26615431	0.281590773	0.59395536
Zm00001d003066	12.85408636	11.29435539	12.83129631	14.89674406	14.27813457	11.85671412	13.29299062	15.22493352	13.88093037	12.46539207	14.89223229	8.036592691	12.38037524	10.48458914	14.27780737
Zm00001d003067	6.760085281	7.348980167	7.31020359	6.488013541	5.94656307	6.049582947	5.174170255	5.054607682	4.378120888	1.992263453	4.536179838	2.405528783	5.09247305	4.450525746	5.523301731
Zm00001d003068	5.333768969	10.25071137	3.252652659	6.349053568	3.375779215	4.180518441	2.193636738	1.95735561	1.130383771	4.949788193	4.289077779	5.712780262	20.51340273	19.52653332	14.96317588
Zm00001d003069	0	0	0	0	0	0	0	0	0	0	0.007776213	0.006831021	0.05520451	0	0.028517478
Zm00001d003070	0.04361834	0.015696417	0.030976572	0	0	0	0	0.007513398	0	0.249221367	0.086435055	0.434865756	0	0	0
Zm00001d003071	6.703832224	5.311467606	5.027409358	7.674720225	11.29452182	8.381585821	9.118913631	10.21120604	10.89638401	7.3333335	7.861262642	4.671524799	5.232027071	5.150564582	5.948708817
Zm00001d003072	0.582293297	0.382643771	0.667040324	0.789359717	0.747241448	0.992541164	1.011739673	0.714323836	0.836776549	0.810061747	1.225945926	0.616992954	1.246548498	1.049082069	1.082990827
Zm00001d003074	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003075	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003076	8.76909142	8.554808108	9.304601064	10.08683719	9.433734238	9.605999573	7.655747458	7.110758118	7.95660411	1.832985936	3.419338065	1.709013215	3.475244568	4.107300165	3.46693191
Zm00001d003079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003080	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003081	23.51127432	18.1952072	24.26580378	24.32319052	30.05551623	24.69863923	20.77073832	23.99672366	19.50055403	21.57316541	20.16282218	14.09767722	42.02144846	39.48219233	46.9565756
Zm00001d003082	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003083	7.471001172	7.492626248	8.804824287	14.64096985	14.19886871	15.25499777	11.58542823	10.88856952	11.2345413	1.065683007	2.617970583	0.299071708	15.59545725	14.93585882	16.98976803
Zm00001d003084	43.14632446	42.43952962	46.31277274	47.84686426	68.18052355	49.88986157	61.80084704	80.82497065	63.03970962	77.46292855	68.56313959	65.77481987	30.92366952	22.93559672	32.00092985
Zm00001d003085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003086	0	0	0	0.338167157	0.08067626	0.814417174	0.388383752	0.537878572	0.097084969	5.006255583	0.242659642	4.708998747	0.097879397	0.067119774	0.131462288
Zm00001d003087	0.49070767	0.379764511	0.314478382	1.77993038	1.372617837	1.537003044	1.231065535	1.077858809	1.08203026	0.136984119	0.159545538	0.019647603	1.386687436	1.364918846	1.367048268
Zm00001d003088	0	0.134628379	0.106274588	0.799851597	0.112674629	0.432151181	0.137391092	0.10310803	0.171372556	0.014741896	0	0	0.693757533	0.222635533	0.296590688
Zm00001d003089	1.679478235	1.557717126	1.078563477	1.371550546	1.226849634	1.782097328	2.442823949	1.673435237	1.798271792	0.014537306	0.212673734	0.093411704	0.727379004	0.519976794	0.645881295
Zm00001d003090	0.036554101	0.023020013	0	0	0	0	0	0	0	0	0.046095895	0	0	0	0
Zm00001d003091	13.92093682	11.82526504	14.77177951	12.6435963	53.33417555	13.44519374	53.68712326	75.28626988	81.57673153	452.3967181	386.2044549	432.14709	3.073681227	2.107744796	3.666371019
Zm00001d003092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003093	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003096	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003098	0.005466307	0.027539336	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003099	0.035371886	0	0.087920568	0.110285704	0.151474859	0.18417545	0.061998074	0.117288718	0	1.134220149	1.92916984	2.174677036	0.128642398	0.135715662	0.582749863
Zm00001d003100	0	0	0	0	0	0	0	0	0	0	0	0	0	0.021974907	0.046351355
Zm00001d003101	13.77201707	14.99757664	10.69352542	2.231039554	2.393658388	1.265599737	1.896018244	1.917002215	1.982482468	19.83828626	22.07249157	33.01283415	4.158746936	3.706671941	5.126839152
Zm00001d003102	4.41225558	6.12878583	4.847614761	5.141541343	5.648412578	6.635779045	4.659327443	6.181648584	4.750924276	2.529963448	3.737739001	1.294116578	1.653021265	1.566426011	1.864103542
Zm00001d003103	5.982804864	6.510819642	5.217857891	9.719578611	6.730705116	10.46954709	10.14908067	8.057631936	9.471178112	2.617728823	4.356843576	1.511530462	4.82545427	3.777884427	6.532664489
Zm00001d003104	1.306430931	1.360415214	1.137823799	1.860251793	1.233454421	1.802201577	1.730907841	0.545758791	0.926118043	0.283745455	0.376189671	0.227906283	2.912365	3.033463147	2.747285619
Zm00001d003106	21.71794982	19.55514278	23.19433871	27.67080644	37.17065087	28.6325946	34.16167247	36.68534627	36.50624707	16.921244	25.6121372	14.76364807	29.55318408	32.62309136	38.17740641
Zm00001d003107	0.124567052	0.294173742	0.019351537	0.466063869	0.800159905	0.228917523	0.964312481	0.431823591	0.192032153	0.107374063	0.471249146	0.103492295	0.19166748	0.392594982	0.540061916
Zm00001d003108	1.630546446	1.543586157	1.238627996	2.068683672	2.835256625	2.938217152	3.370270855	3.392847136	3.496301007	4.677293849	8.797571286	5.875173881	2.400004326	2.420602257	2.333006264
Zm00001d003109	6.968745081	7.139100925	6.293540303	8.659187403	9.506188603	7.841353996	8.938728989	8.723764744	8.92276318	2.994184062	3.990350678	1.474732904	4.881784413	4.771106252	4.540471107
Zm00001d003110	7.133481833	6.897207421	5.467382268	1.685966519	4.226714893	2.732260661	3.10572249	3.425807484	2.59970768	0.242269478	0.414141998	0.194592496	0.888854287	0.854001365	0.529803757
Zm00001d003112	58.21890711	60.67440692	53.85388013	22.80429615	21.0607189	26.29028448	38.32737328	31.21961047	37.58418848	63.63787104	50.50644865	46.04933184	26.88170254	28.24001038	25.97731998
Zm00001d003114	13.72477162	14.74329127	12.00038899	2.613564503	3.575057641	3.230357093	3.150282531	3.176992727	2.327445804	0.58278737	0.723350961	0.372784554	5.980342173	5.83126137	5.561877366
Zm00001d003115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.043743022
Zm00001d003116	6.754348066	5.459118535	4.95280059	2.507598742	8.463577589	3.591733752	2.511235927	2.642148933	2.412874273	2.324688655	2.262210324	0.773556676	5.820320114	7.021597291	7.934225345
Zm00001d003117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003118	0	0	0	0	0	0	0	0.01899124	0	0.021722218	0	0	0	0	0.254932453
Zm00001d003119	3.188003679	2.671086714	3.09348773	5.049357791	5.12154213	5.12048512	4.803312847	4.753118529	5.935752039	0.997110539	2.140330707	0.728424868	2.615894051	3.33251598	3.104642008
Zm00001d003120	0	0.045194146	0	0	0	0	0.013976235	0.028844088	0	8.050029849	0.030165992	0	0	0	0
Zm00001d003121	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003123	6.015215484	5.84666485	4.933663388	8.852896413	6.993960533	9.43821988	7.345223328	6.231109456	7.123735001	1.256699429	2.249900761	0.921156194	5.084067102	4.320386587	4.681702899
Zm00001d003124	0.339959636	0.389950025	0.369689981	0.900963684	0.719914329	0.602433261	0.368868349	0.475792964	0.494133178	0.13396011	0.015310715	0	0.305699262	0.086514	0.112297066
Zm00001d003125	0.483476716	0.515257527	0.342031578	1.42857789	2.420795709	1.403354923	3.476569521	4.565047703	4.595795386	6.288381285	7.681963597	3.386472853	2.846628951	3.326795306	3.095806499
Zm00001d003126	0	0	0	0	0	0	0	0	0	0	1.197212818	0.210338507	0.637439573	0.208151204	0.219525168
Zm00001d003127	42.79643067	33.55632817	45.49416379	52.91008719	78.41071383	46.58938595	57.39439419	61.62526685	53.61614512	4.02740354	16.39855919	2.544254582	19.11706776	14.78306504	27.80558459
Zm00001d003128	1.70890424	1.965533435	1.120910921	3.130304628	4.652015849	3.99827373	4.763330288	4.342894318	5.773816729	0.99020883	2.207361133	0.466688563	3.479357668	3.349933442	2.846967018
Zm00001d003129	0.380591127	0.129299956	0.597473398	2.095359706	7.848894544	2.843671335	8.923672654	13.19959346	13.69214571	1.498721667	2.958562841	0.851524242	2.476908054	2.330378536	2.556141402
Zm00001d003131	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003132	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003134	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003135	0	0	0	0	0	0	0	0	0.026890627	0.030071588	0	0	0	0	0
Zm00001d003136	0	0	0	0	0	0	0	0	0.014841922	0	0	0	0	0	0
Zm00001d003138	1.108478426	0.629628463	0	0	0.028638881	0	0	0	0	0	0	0	0	0	0
Zm00001d003139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003140	0	0	0	0	0	0	0.008015473	0	0	2.894929733	0	0.030395128	0	0	0
Zm00001d003141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003142	0.573184878	0.731684265	0.346551496	0.685870857	0.244947621	0.436521291	0.651664737	0.233490032	1.079449178	0.950756265	0.322331746	0.08580381	0.138683737	0.331155004	0.214923224
Zm00001d003143	1.121895013	1.282982057	0.846447766	2.122294204	1.431166218	1.88777437	1.737858079	1.223460635	1.579516751	0.115018909	0.272933223	0.079186262	1.76872122	1.665209633	1.707991892
Zm00001d003144	0.526403538	0.326699202	0.018962779	2.112242028	0.341780756	2.336653479	0.998427309	0.165579873	0.451618473	0	0.00962046	0	5.310099298	5.118289431	4.12785717
Zm00001d003145	0	0	0	0	0	0	0	0	0	0.093110546	0	0	0	0	0
Zm00001d003146	0.145882069	0.104993718	0	0	0	0	0	0	0	0.977234918	0	0	0	0	0
Zm00001d003147	23.96591839	21.09534462	25.69939715	30.85162877	38.37862376	29.30688275	28.67131421	32.10289105	31.45995403	21.93687492	26.93131211	19.0626392	26.26459013	24.66357472	25.04692634
Zm00001d003148	8.734026774	10.49360176	9.070572588	11.4783283	11.932633	13.34670784	14.86177176	13.79900881	12.50881235	25.68261144	18.67792983	20.83651645	7.011209746	5.941807877	6.793862302
Zm00001d003149	0.159724498	0.193722723	0.183801923	0.664004885	0.389741591	0.78273746	0.235025727	0.363783733	0.175097426	0	0.067139239	0.013106337	0.304514621	0.239945828	0.341969106
Zm00001d003150	0	0.023915236	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003151	0.66688946	0.713381973	0.380345317	0.535488129	0.541679609	0.542821857	0.688524546	0.506703793	0.495729109	0.069296271	0.24192259	0.111318475	0.383358246	0.335489946	0.369664833
Zm00001d003152	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003153	1.24326757	1.41168267	0.321903457	0.546216259	0.490215174	0.473106729	0.544784312	0.556483235	0.627256522	0.129899314	0.558231922	0.07303521	0.389973366	0.309753084	0.397459277
Zm00001d003154	0	0.04320946	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003155	3.511962984	4.269166044	1.187707266	1.825965163	1.643826421	1.83409918	1.705302842	1.277200121	1.724361443	1.038836666	1.412909012	0.818755677	1.55935631	1.465659718	1.572961325
Zm00001d003156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003157	655.0362527	691.1808942	690.1202151	358.3297426	314.7587377	359.5209066	510.8406939	515.2462943	420.6481491	519.1282026	799.9414743	766.6112353	379.516197	403.8537951	481.8953598
Zm00001d003158	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003159	65.26807912	64.21662822	71.96039897	82.04140569	107.7016681	87.0954871	80.09971185	99.02273779	85.05587506	46.760116	86.15875851	45.25494846	74.44094323	64.4965077	75.6819472
Zm00001d003160	0.200279223	0.329024899	0.097398629	1.009978216	1.067062827	0.938804859	0.610503323	1.448946929	0.95578194	3.314616811	6.292001531	4.610834434	0.253351779	0.143186816	0.151010943
Zm00001d003161	1.496240601	1.961049328	1.519719228	5.711806912	3.882986809	5.061959934	0.931865489	0.558637872	0.861754953	0	0	0	0.212479858	0.066608385	0.676137516
Zm00001d003162	111.9232169	110.1135906	96.25302619	144.8500649	125.2527888	181.9087342	188.1309537	156.7437731	160.2611674	28.04193169	52.19484845	18.58864745	144.6456264	135.5430146	136.7839987
Zm00001d003163	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003164	0	0	0	0.100295117	0	0	0	0	0	0	0	0	0.074992891	0.088158157	0
Zm00001d003166	5.147180952	5.366092482	5.287259823	8.08004661	11.52886805	10.27658616	9.281651027	10.51276071	11.67846248	2.935822847	4.531064973	1.368982826	7.118579418	7.471428714	7.533210769
Zm00001d003167	0.052989279	1.00110289	0.329276158	1.751277139	1.361512397	2.077411738	1.733703235	1.533432207	0.980257151	1.132754748	1.536887152	0.234796473	1.660307724	0.92941933	0.918942562
Zm00001d003168	0.045156842	0	0	0.126714723	0.089251146	0.11064662	0.079148655	0.068061091	0.097459092	0	0.04270817	0	0.025265978	0.061878145	0.130518679
Zm00001d003169	0	0	0	0.053616886	0.08497102	0	0	0	0	0.118584185	0.054213411	0.095247626	0	0	0.074555717
Zm00001d003171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003172	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003173	0.044243475	0	0	0	0	0	0.077547752	0	0	0	0	0	0	0	0
Zm00001d003174	4.216361863	3.642755699	1.761137868	1.839737957	3.36707595	1.024585823	2.266608131	3.137217293	2.650108967	0.464563873	0.6884228	0.308806236	0.571908402	0.458392456	0.456582507
Zm00001d003175	0	0	0	0.062454835	0	0	0.131660744	0.090573606	0.061759791	0	0	0	0	0.041172766	0.072370934
Zm00001d003176	3.76299517	3.696072949	3.96738307	8.155427341	9.819565099	9.107594339	10.794739	9.962559959	11.3886186	11.98425256	9.369794431	9.903187844	6.728395296	7.68516894	7.232446729
Zm00001d003179	18.94148855	21.25347632	18.31264549	13.92958176	13.33120933	15.19417292	16.45507077	15.55159219	14.32614191	10.48605037	13.82542633	8.529589117	15.78550624	15.781947	16.28096469
Zm00001d003180	0.072822624	0.140637892	0.259445291	0.811336209	1.138659953	0.541253915	0.65238148	0.965882591	0.957978579	0.850344622	0.887706095	0.989547068	0.260770734	0.180949626	0.196450079
Zm00001d003181	5.299459097	8.091621105	5.344176803	4.50825294	7.328945725	3.861955279	5.491767255	8.021855306	5.852552844	4.150595092	6.992442986	1.195608356	9.304381131	7.355719244	7.909508295
Zm00001d003182	15.53935284	18.18152081	14.17646346	13.2730101	12.12112486	12.20640686	12.17130434	11.60392281	13.68382156	2.381258829	3.605023442	1.285547149	7.253349672	7.788216483	7.624749921
Zm00001d003183	0.501162028	0.425703429	0.521452166	0.566885444	0.184284975	0.271298815	0.149806655	0.351329843	0.574950486	0.016074071	0.029394484	0.090375625	0.104337935	0.178871623	0
Zm00001d003184	0	0.014856747	0	0	0	0	0	0.05689179	0.014547388	0	0	0	0	0.064654386	0
Zm00001d003185	0	0	0	0	0.03318997	0.023144816	0.073582851	0.174638928	0.163090227	0.156327931	0.134996637	0.027903035	0.042280653	0.006903218	0.094645581
Zm00001d003186	0	0	0	0.044927984	0	0.066202103	0.05261804	0.086874288	0.011106998	0	0.045427838	0.00997653	0	0	0
Zm00001d003187	0	0	0.012205927	0.012248685	0.051763955	0.012032423	0.045904704	0.118422387	0.024224746	0.609532936	0.297239044	0.217591559	0	0	0
Zm00001d003188	0	0	0.096446451	0	0.06816975	0	1.299750215	0.140359097	0.063804817	2.533012052	1.696259145	0.802350862	0	0	0
Zm00001d003189	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003190	10.7680302	4.196093576	45.82595613	2.32974471	44.96409047	2.536422099	74.74388462	46.48341494	71.21290931	1032.374722	1167.014297	506.5126992	0.079887988	0	0.151317609
Zm00001d003191	0	0	0	0	0.127757846	0	0.037765572	0.662493465	0.039859156	9.717175026	0	0	0	0	0
Zm00001d003192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003193	8.277251817	13.32225974	17.83615602	1.828246889	1.2806059	1.597517935	1.145115682	0.917969932	1.248550281	0.368608543	1.501338918	0.610081357	3.153966417	1.908874787	2.200453694
Zm00001d003194	0	0	0	0.037956745	0	0	0	0	0	0.235056453	0	0	0	0	0
Zm00001d003195	2893.744513	3070.173325	2956.793997	1851.210675	1580.756465	1995.070611	1676.242519	1225.600009	1479.464144	10.87128533	27.25762373	9.209415718	384.5311152	293.9657573	336.1582959
Zm00001d003196	10.33448019	10.40454543	12.32325783	11.28815595	9.994842223	10.49303337	6.49569704	4.658633716	5.256386813	0.391257505	1.115821275	0.336707887	5.056684674	5.012906272	5.833469178
Zm00001d003197	3.719229557	4.838813611	2.539708484	3.593533563	5.142969446	4.932106174	13.30042478	11.06351854	8.720039396	241.4778159	139.3362448	415.5760697	1.532141753	0.828871163	2.716993106
Zm00001d003198	12.93545857	13.80925217	11.59021879	6.283482422	6.140840368	6.027019673	6.328633969	6.041162222	6.492290307	5.144309893	7.0939952	7.01023446	4.63368648	4.606202537	4.621392861
Zm00001d003199	0.782834142	1.364656936	1.029309072	4.372201241	3.744789221	5.094238114	4.04342346	2.688119384	2.82639456	0.665006335	0.987178968	0.320482572	2.755008543	3.121749844	3.226746696
Zm00001d003200	20.95244588	14.86260585	18.5145453	12.91966179	31.49718199	18.2513659	26.56564425	22.33738573	22.50394877	15.01940254	14.06766573	12.3507504	8.508624754	7.981920239	8.16231719
Zm00001d003202	1.537750503	1.565360883	1.138818589	3.060623716	4.024667439	3.393699346	3.704488383	3.75915353	2.584918471	2.614699066	1.925870851	1.831792361	2.557615789	1.789651339	2.179692111
Zm00001d003203	14.35343665	13.38834802	13.32566865	10.08434501	10.46809186	9.543342485	9.540439402	9.159818578	10.33078005	3.156225364	5.682643235	2.827150257	6.207622272	5.979857178	5.715859275
Zm00001d003205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003207	8.222393519	8.617220242	7.892332367	6.544323967	7.762305028	6.200038131	6.631064394	7.811204465	6.895655478	20.16608776	15.861295	24.94399254	6.66098581	6.76497024	6.310963956
Zm00001d003208	0	0	0	0	0	0.065811914	0	0	0	0	0	0	0	0	0
Zm00001d003209	30.80365532	9.891993288	26.54718088	43.7131276	121.1874062	42.6056748	86.73578805	97.232611	77.43180233	0.705326378	5.447198361	0.596872397	13.23421638	12.94458551	19.53290069
Zm00001d003210	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003211	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003212	3.643218905	3.794636221	2.878844677	17.96438811	18.22635222	16.96467056	34.46795918	23.76758255	26.18111796	3.386802487	3.993362734	2.046317359	66.00114276	68.34502487	69.24894928
Zm00001d003213	0.071204343	0.047830471	0.064894843	0.142084749	0.25644726	0.348940253	1.09827004	0.938694785	0.556159786	1.217711354	0.844035037	4.148927054	1.901694725	1.706839874	2.03609593
Zm00001d003214	60.50995616	59.78267797	51.50300889	20.17249246	17.97931394	18.7693055	17.32266595	15.78266354	17.68485403	9.93180641	15.83819582	8.99079143	11.89267894	12.3257444	11.67781283
Zm00001d003216	0	0	0	0	0	0	0	0	0	0	0	0	0.015739249	0	0
Zm00001d003217	0	0	0	0	0	0	0.020402091	0	0	0	0	0	0	0	0
Zm00001d003218	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003219	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003220	3.902862514	3.340677881	3.972383249	4.972383425	11.82205502	5.063211806	6.395176727	8.965672434	7.69023395	9.388773987	10.01298123	8.274119848	2.786118165	2.790831239	3.708336548
Zm00001d003222	23.59108371	23.71326814	20.64266736	21.78229018	17.81177134	22.36349234	22.08950418	18.78488859	19.96240793	19.11293979	19.6187106	23.73422527	13.60633861	14.07899812	12.90849359
Zm00001d003223	8.95641094	7.020041498	8.713153721	11.65094942	12.05542693	10.73662316	12.69794732	13.33545387	10.74311568	3.916014678	4.309966145	2.155160704	11.70927461	12.2392908	11.08433231
Zm00001d003224	3.227705523	3.576247556	3.277486284	5.619493862	4.626043578	5.03465037	5.898401335	4.584417885	4.998267408	1.896645286	3.21334754	2.527049142	5.458594968	5.232108374	4.610807899
Zm00001d003226	1.00961897	0.500309047	0.514244847	4.272863398	3.663835186	2.919945554	4.138759209	3.612198204	8.654744975	12.78297321	9.371306533	8.268900731	3.407909386	3.338483236	3.712260946
Zm00001d003227	0.858613768	0.772448013	0.953845757	2.067349489	2.004105011	2.374332241	1.212138359	0.929650646	1.106451753	0.091833587	0.00883869	0.11646531	0.301970861	0.284293672	0.441638943
Zm00001d003228	0.117098363	0.221228733	0.345634203	0.839729994	2.468708362	0.869735448	3.67729116	3.176864369	2.590439721	18.31992353	5.795843124	20.73027865	2.031070844	2.471071254	1.903804987
Zm00001d003229	0.018965247	0	0	0	0	0	0.022160892	0.016334122	0	0.022419602	0	0.003001263	0.003031817	0.005940106	0
Zm00001d003230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003231	0	0	0	0	0	0	0	0.174438055	0	0.049880649	0.045608107	0	0	0	0
Zm00001d003232	0	0.033962465	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003234	0	0.061716737	0	0.06111172	0.161414483	0.030016366	0.05725748	0.088625786	0	0.371691291	0.278062332	0.841354029	0	0	0.14162914
Zm00001d003235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003237	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003239	0.613906877	0.08921746	0.293448182	1.590171285	1.586712734	0.954613749	1.876146654	1.224229771	1.718074191	0.032564569	1.071908679	0.523121676	2.219478719	2.277799706	2.047384983
Zm00001d003240	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003242	13.11594416	15.03687444	15.78984835	18.06126851	27.93537915	19.11659679	19.97179047	22.8987145	22.07879924	15.02570484	16.48360732	13.79109796	10.71271314	12.36935572	11.5943528
Zm00001d003245	11.71616927	12.15087982	10.88532527	6.046914125	9.910899635	6.924368199	9.644714351	9.215146096	11.10876544	4.971100853	6.338317347	3.606928035	7.43049686	8.44814622	6.328900308
Zm00001d003246	2.36392321	2.829884209	2.319387413	2.820397481	2.497638538	2.555408275	3.523358042	3.503375429	3.493031959	1.090111152	1.578167475	0.535079543	1.924603421	1.540408055	1.726116521
Zm00001d003247	454.3986148	505.069577	531.053111	56.06377903	82.16791132	66.23018022	191.5223413	302.6804931	344.0327402	1535.07635	1753.088684	1408.952999	0.888433157	0.171429412	7.037167538
Zm00001d003248	20.51849588	24.00486692	20.10704946	7.648855315	10.88401087	9.273369581	8.989814546	8.546424619	7.353097592	7.077273882	6.970348428	5.615715646	9.052293489	7.863647535	10.30384569
Zm00001d003249	0.267407998	0.589402386	0.149550951	0.083374914	0.299496878	0.065522277	0.273407967	0.306311519	0.272075285	0.756039418	0.733431892	0.636878257	0.501223879	0.168556672	0.077290035
Zm00001d003250	14.19175123	14.31218395	13.33756493	11.57521332	8.169778067	9.265477351	10.97934622	9.299008509	9.062713368	10.07670112	8.045591897	14.3218618	11.85080827	11.66392638	12.58447075
Zm00001d003251	1.433517906	1.045301693	2.353561307	8.365121981	6.700518304	9.603944972	4.081870589	3.92095738	4.978105023	11.15476669	1.836254892	34.33393062	2.254256502	2.340667183	2.869819079
Zm00001d003252	0.940574701	1.106655188	0.938045499	14.72339132	13.75520117	16.05678409	13.5189093	11.29918552	12.25865409	1.409311939	1.576578782	0.887566566	4.340075551	3.937664455	6.734922753
Zm00001d003254	3.587786592	3.401218238	3.313152833	6.194400018	6.539449952	6.64976783	7.293933701	8.276936233	6.646578663	11.57040458	11.85815917	13.59546788	4.638138571	4.434164567	4.862985169
Zm00001d003255	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003256	13.11367952	13.29343787	14.55846458	12.82934887	12.0631126	12.30227854	10.72372823	11.87253007	11.61388843	6.382363358	9.091005262	6.003397261	9.352579962	10.9590081	10.53291065
Zm00001d003257	11.31976533	11.03806524	13.18897281	7.992107751	13.01330034	8.447214113	9.805673173	11.93306577	11.35292018	10.35524073	13.05237728	16.54419636	4.452733743	4.532378837	5.560166016
Zm00001d003258	11.86323757	10.87790457	12.59174806	10.8493197	12.23219644	9.252063835	8.255561719	8.594357137	8.644611586	1.419391176	2.744698684	1.340346296	4.069756621	3.910616926	5.201607532
Zm00001d003259	4.602583745	4.088057818	4.916796954	7.227298423	8.601276825	6.536496442	6.20176572	6.332400017	6.494028828	1.129679302	2.483917721	0.827122852	4.252541645	4.016253517	4.544935975
Zm00001d003261	0.548977175	0.541359048	0.595003299	1.823107659	1.839235759	1.863911203	1.561431534	1.616368813	2.128218373	0.205422877	0.480301286	0.084855628	1.01672852	1.1849554	1.34318652
Zm00001d003262	12.19812443	13.9552034	8.809518971	15.09776779	13.89475618	14.80737642	17.11670829	16.39646381	15.00169926	35.71163588	34.23449638	51.7289111	12.37702727	11.54395327	14.92896047
Zm00001d003264	1.325873979	1.595723486	1.318240067	0.091865139	0.407641145	0.216583605	0.103285584	0.071053432	0	0	0	0	0.247282593	0.258394598	0.630188628
Zm00001d003265	126.286565	112.9919746	109.444038	30.87284446	42.7916432	26.90386198	40.21593941	41.51791493	46.80108105	68.28130756	100.6840191	73.33682951	19.85013534	18.56211374	21.13981381
Zm00001d003266	0	0.037906373	0.028052806	0.004691846	0.03965626	0.059917093	0.021979688	0.058970047	0.004639632	0.031130796	0	0.012502234	0.008419675	0.041240745	0.013048276
Zm00001d003267	1.510433304	1.786730638	1.522761079	8.243276408	8.085059435	7.461165455	6.658770642	5.877501712	5.168105617	1.019903652	2.465449964	0.366763131	13.57046537	14.17886117	14.80555032
Zm00001d003268	11.25543355	10.21728022	17.65594628	15.85186477	19.62352823	12.93180985	12.78307736	13.32323189	12.59453284	1.022252828	3.184874581	0.288898672	4.915196705	4.213181	6.871402235
Zm00001d003269	0	0	0	0	0.228989699	0	0.135379974	0	0	0	0	0	0	0	0
Zm00001d003270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003271	67.71996947	51.22955105	100.1692805	77.95119035	130.7168871	72.59111973	174.5007267	197.2161116	233.6572167	83.76482735	69.69041432	19.23194359	97.12285097	100.5531757	126.2993897
Zm00001d003272	0.050410155	0.228570394	0.250599554	0.502954864	1.07604894	0.543482164	1.272332146	1.325073148	0.385452148	0.083428697	0.22884776	0.122852579	0.146667512	0.165784145	0.093249629
Zm00001d003273	0	0.120623255	0.014877977	0.059720385	0.126191638	0.01466649	0.013988474	0.288693454	0.044291829	0	0.015096204	0	0	0.052493474	0.013840466
Zm00001d003274	0.010104386	0	0.01255776	0.075610509	0.186396148	0.086654786	0.082648824	0.097468714	0.01246151	0	0	0	0.033921396	0.011076782	0.058410244
Zm00001d003275	0.812474282	0.695853768	0.471214534	1.715825337	1.17047244	2.057143804	1.113934748	1.46295751	0.721444407	0.851607348	1.584646824	1.32003247	1.236491342	0.914413848	1.365161264
Zm00001d003276	6.069681022	5.378652801	6.860917766	15.81556456	11.61570017	13.55334107	15.81441311	16.60637379	16.0227487	0.587969473	1.430580729	0.440243387	59.45572742	62.83878022	69.08777263
Zm00001d003277	3.512033777	2.864433871	2.448527221	6.388472175	4.825140088	5.876888469	10.70994708	8.799940842	13.72286308	1.417660563	2.068567711	1.807645967	4.390185328	4.281967628	3.649399591
Zm00001d003278	0.015989747	0.010069573	0	0	0	0	0	0	0	0.077183742	0	0	0	0	0
Zm00001d003279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003280	0.043747949	0.018366901	0	0	0.02882217	0	0	0	0.017984451	0.120671267	0.009194594	0	0	0.007993006	0
Zm00001d003281	0	0	0	0	0	0	0	0	0	0.02163498	0	0.017377364	0	0.008598329	0
Zm00001d003282	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003283	0.174289061	0.052684252	0.121299896	0.199976495	4.354190668	0.333103597	8.439536501	10.2890877	12.81082624	396.8179393	230.0172447	367.5502912	0	0.191061789	0.894668608
Zm00001d003284	9.021350286	8.657852748	7.640224294	3.867419153	4.722733869	4.563668026	3.956314956	4.097946814	4.215105749	1.774265909	2.453613686	1.49600309	2.18806505	2.154014146	2.064523206
Zm00001d003285	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003286	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003287	0.030414314	0.03830694	0.094497496	0.606902599	0.2003766	0.298093564	1.350486772	1.63193689	1.706672405	0.125839058	0.402710963	0.101074789	0.357363231	0.583471673	0.404375615
Zm00001d003288	14.83835957	13.56537979	16.06119855	13.02963666	14.84855377	14.45159267	13.24064397	14.57840926	14.84108514	9.29851377	11.80998597	8.240597228	11.76079974	13.682599	12.72063284
Zm00001d003289	0.555462141	0.455923416	0	0	0	0	0	0	0.003848533	0	0	0	0	0	0
Zm00001d003290	0	0.006375035	0.176134096	0.145188414	0.0466853	0.062010856	0.059144158	0.067133787	0.081149759	0.07678776	0.095741566	0.028034751	0.050976286	0.033291862	0.087777557
Zm00001d003291	6.463380393	6.762565662	6.728970201	8.285932395	8.025975593	6.992624472	7.460196132	8.323804034	7.34513477	1.018972772	1.557562023	0.83718891	4.089711318	3.765269802	3.801480378
Zm00001d003292	4.945441826	6.845438095	4.729038509	25.46704886	15.86623883	17.31857226	19.16835603	17.79208858	15.00317785	18.92326222	19.60780609	24.9339805	26.48466069	23.07138134	25.34948463
Zm00001d003293	0.036800091	0.139049554	0.011433815	0.022947739	0.145468557	0.022542574	0.096752041	0.288421468	0.249615953	0.114195134	0.487264006	0.336315137	0.051475605	0.05042694	0.308457974
Zm00001d003294	0.10729962	0.071546966	0.203950551	0.8816339	1.247496976	1.11351571	0.309761381	0.304420983	0.428127084	0.409131864	0.310413074	0.223739575	0.466160796	0.34595768	0.664048429
Zm00001d003295	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003296	0.099066912	0.031193786	0.030780163	0.2779919	0.717943549	0.637195244	0.086819766	0.17917822	0.33598669	0.580675821	0	0.027435457	0.110859056	0	0.057267435
Zm00001d003297	0	0	0	0.079385168	0	0	0.008264272	0.017055764	0	0	0	0	0	0.031012699	0.02453049
Zm00001d003298	0	0	0	0	0	0	0	0	0	0.251246203	0	0	0	0	0
Zm00001d003300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003301	0.512871612	0.275880328	0.478048762	0.053302602	0.823611251	0.078542237	0.599290483	0.785891496	0.744520437	12.26783288	9.667528594	11.03722342	0	0	0.926483709
Zm00001d003302	5.478176273	3.954124616	5.512357358	5.949677915	7.498003942	6.095570834	6.436062067	5.419958116	6.218744956	1.561396128	3.371893971	1.084982286	2.537950639	2.65363017	2.695297836
Zm00001d003303	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003304	0.042000719	0	0	0.026190737	0	0	0.04907784	0.025321653	0	0	0	0.023263245	0	0	0
Zm00001d003306	43.21628945	48.56387198	38.07164112	49.28762073	30.22324784	65.19754768	64.22476114	72.59239671	62.32111907	0.488830364	11.52516873	1.121805371	374.5594929	434.0368909	521.4161781
Zm00001d003307	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003308	0.368938846	0.271063241	0.407571808	0.511249472	1.107298515	0.878889992	0.993936632	1.33456881	0.947924831	0.197877359	0.219698424	0.011352603	0.275236277	0.179752764	0.639815481
Zm00001d003309	69.31071658	78.3703573	58.18869151	7.969532472	16.77356948	7.38702996	13.84630456	15.31104995	18.61644455	60.23982324	83.99920054	72.9696754	8.405894381	5.583748904	7.044560926
Zm00001d003310	1.487499037	1.126272233	1.528089884	0.718466278	0.827051265	0.547770359	0.894188986	1.244105375	0.657450456	0.320177301	0.325280464	0.047623813	0.731251434	0.546691464	0.795260985
Zm00001d003311	475.8152231	383.5622689	284.0574898	18.01249687	27.40354904	28.37120589	81.99567703	88.13569615	63.99347798	93.09756207	46.96890065	92.30424656	6.826444508	4.378638876	3.452929728
Zm00001d003312	50.89227079	47.97073673	39.56180618	17.52017457	15.70005308	17.9574273	20.53773759	17.56724219	18.640409	8.625695413	11.39549993	7.745391691	14.31154654	13.20252424	13.46970377
Zm00001d003313	10.18338838	12.87894251	9.818367277	16.43873961	10.46501695	13.33409392	8.871272158	9.728496133	10.46866428	1.8545789	5.405121477	1.893046564	9.232423975	10.05779794	9.117492003
Zm00001d003314	21.63975574	19.78417935	18.82576649	15.46263079	8.050885511	13.28702102	7.942796024	7.52081392	7.127217914	2.879144525	2.504114408	1.635705039	23.64580314	24.39206513	22.60496028
Zm00001d003315	0	0	0	0	0	0	0.071958725	0	0	0.679455333	0.271799667	0.136435788	0	0	0.106796027
Zm00001d003316	0	0	0	0	0	0.014063083	0	0	0	0	0	0	0	0	0
Zm00001d003317	17.70093492	25.08757902	13.37740574	16.96584659	5.149361503	7.703606768	5.561961034	5.967644924	6.670790502	2.237968604	11.28861558	3.460286895	22.16852164	20.9460642	13.71087753
Zm00001d003319	0.01820404	0.027513667	0	0.045406578	0.028783792	0.042374635	0.080831399	0.048289842	0.060616701	0.005021274	0	0.002016561	0.036667629	0.031929452	0.025255625
Zm00001d003320	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003321	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003322	0	0	0	0.010159493	0.010733714	0.019960235	0	0	0	0	0.005136262	0	0	0	0
Zm00001d003324	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003328	12.90865837	14.58057919	14.12461945	12.23762193	12.02134364	10.69333033	10.51032619	13.1387728	11.34226036	7.526748641	10.10293139	7.399165872	7.896025675	7.25171937	7.828550736
Zm00001d003329	5.521020928	6.197904301	5.134749141	3.419895674	3.215032404	3.534236413	3.153058604	2.865445037	3.151969182	1.185976581	2.061946208	1.210673861	2.15841964	2.004546403	2.058575606
Zm00001d003331	0	0	0	0	0	0	0.005723697	0	0	0	0	0	0.010962773	0	0
Zm00001d003332	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003333	4.590494473	5.250258841	3.656582536	3.96305961	5.676945174	3.561761216	4.998947101	4.832311922	4.623390207	8.305281243	6.588427102	7.515369034	5.7578273	5.740202511	5.309933454
Zm00001d003334	2.426898668	2.643923435	2.102503468	1.717720387	1.768123896	2.072616934	3.658636126	3.946216006	3.107735887	84.88668561	31.29646942	161.1278817	1.932761387	1.47101609	2.298934117
Zm00001d003335	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003336	0.519506889	0.562486344	0.600336291	0.250069158	0.0960739	0.279152202	0.053249456	0	0.044961128	0	0	0	0.020398066	0	0
Zm00001d003341	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003342	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003343	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003344	0	0	0	0	0	0	0	0	0	0.878543051	0	0	0	0	0
Zm00001d003345	9.836619528	7.597727212	10.84990494	7.164095773	14.75858074	7.037606518	6.907080277	8.333575032	7.607751839	1.484142871	3.574118267	0.789119189	3.443021728	2.641812622	5.291968121
Zm00001d003346	38.50730888	41.70817108	45.30839935	28.89056564	36.02771266	28.56657536	28.66595741	30.95403291	30.62976844	7.122956739	13.69611464	3.870228532	38.16138242	28.30856376	29.24075233
Zm00001d003347	9.778729818	11.88288274	12.19728068	15.45171646	22.86133503	15.93493821	21.05017577	20.26207036	23.15381005	42.76720119	36.51499095	55.24015044	13.93071066	13.64691332	15.06491463
Zm00001d003348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003349	0.231564874	0.056087849	0.099619445	0.622025742	0.868420435	0.971122319	0.718087133	0.880599668	0.845767147	0.073699878	0.190930096	0.029598122	0.857117445	0.702967975	1.266524355
Zm00001d003352	5.389101483	4.334845522	5.096161747	3.735070661	11.27166808	4.611231118	6.450162197	8.114392669	8.017543802	2.098172115	3.823800916	1.176463113	1.760565849	1.642679433	1.653146656
Zm00001d003353	8.066028013	1.262724446	2.491961964	1.818684788	5.284064524	2.065726297	3.301466303	3.18698327	3.259681779	6.913458011	3.792770208	7.420742532	0.101990332	0.049956289	0.158058121
Zm00001d003354	0.525402171	0.441163986	0.33485711	0.604854273	0.31952051	0.670097324	0.393546436	0.246908576	0.159499469	0.438485709	0.275212659	0.140280944	0.358795313	0.463725111	0.629242026
Zm00001d003355	3.299953015	1.731792931	1.855300835	15.53133291	23.50083556	12.89875693	17.35197806	19.84759201	13.85655453	0	0.346778885	0	0.527536198	1.162775692	0.545028002
Zm00001d003356	54.15474933	17.04407713	42.26482959	31.77030732	190.733971	57.09861112	215.4464159	309.2917186	200.4724533	20.56105241	61.65281211	26.79281416	4.223699329	5.134011972	5.385359791
Zm00001d003357	9.579842747	6.870829763	9.797527962	8.13098126	6.179936113	9.372993652	4.66418597	2.687237341	2.174215131	0.183502535	0.209730713	0.257933352	4.652843596	3.682908897	2.576616566
Zm00001d003358	41.81589813	19.70931657	35.03443896	16.16243377	31.17439269	19.43453018	14.65460249	15.05393209	15.94076356	0.3739812	0.541417235	0.087612072	6.928599389	5.957597109	3.957984345
Zm00001d003359	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003363	0.857429305	1.079935383	1.095216099	0.029704129	0.219681175	0.233437382	0	0.459495365	0	0	0	0	0	0	0
Zm00001d003364	0	0	0.034888398	0.24507431	0.998714827	0.791026774	0.754458418	1.353954515	0.934766778	0.154865589	0.212400796	0.186583645	0	0	0.032455466
Zm00001d003365	2.294253049	1.880232325	1.328004809	18.36322895	1.594329813	2.329476998	1.983083207	1.762125114	0.620153489	0	0	0	0	0.05167892	0.0726704
Zm00001d003366	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003367	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003368	0.081563121	0.071120114	0	0	0	0	0.01466254	0	0.003868844	0.017305999	0.007911824	0.013900296	0	0	0
Zm00001d003369	1.249469103	1.500230291	1.407831221	3.583446089	4.368936706	2.894764658	4.209585412	5.152839361	3.891328067	3.788410491	5.113103506	5.541806301	6.419732823	6.123731443	8.127739777
Zm00001d003370	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.024020991
Zm00001d003372	1.440030602	1.112189167	1.468883599	2.885934684	3.526395857	2.330121066	2.386436391	3.106863681	2.797970162	0.174871412	0.765201012	0.336095713	1.636777598	1.459471577	2.157003833
Zm00001d003373	4.011972953	3.666239963	3.976679189	16.82582555	7.240018812	13.04936371	7.191224448	5.764280498	7.435258306	0.127804248	0.68052097	0.102653243	18.69009427	19.42080613	20.84753841
Zm00001d003374	0	0	0	0.034654817	0	0	0.129876723	0.167524352	0	0	0	0.030781245	0.27985152	0	0.321256343
Zm00001d003375	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003376	2.018508246	2.257642183	1.99362159	1.624757865	2.146771857	1.784522919	2.600725464	2.255958703	2.621011795	1.307502966	2.616659125	2.500299389	0.930910604	0.633200265	1.023476235
Zm00001d003377	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003378	2.125175786	1.876426187	1.841334439	4.761205293	3.944139617	3.633675902	2.227260921	1.545412146	1.631326984	0.517451785	1.008421566	0.737196018	1.685537332	1.432040255	1.845911145
Zm00001d003379	0	0	0	0	0	0	0.016317505	0	0	0.096296657	0.052829003	0.154692263	0	0	0
Zm00001d003380	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003381	0.200066838	0.615963144	0.49728731	2.897142688	2.519010804	2.818756384	1.974126192	2.050498067	1.713457621	0.015329175	0.182209951	0.012312498	7.562209955	5.568298554	3.238263936
Zm00001d003382	2.264724735	2.781809301	2.014761428	4.28686511	3.761452525	4.491921314	2.293106944	1.878304063	1.984286586	11.91878906	11.30674428	11.99289557	2.989873488	3.174825499	3.007275584
Zm00001d003383	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003386	0.404564711	0.499936586	0.142300249	0.628314468	0.694001165	0.504998959	0.508411896	0.220896432	0.903741266	0.56848901	0.952957339	0.245218762	0.538139941	0.778213547	0.838387575
Zm00001d003389	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003390	0	0	0	0	0	0	0.077173125	0	0	0	0	0	0	0	0
Zm00001d003392	0	0	0	0.051511087	0.253971791	0.06746881	0	0	0.016979278	0.0189878	0.138891155	0	0.123251156	0.226388017	0.206924025
Zm00001d003393	10.6483956	12.37696359	9.254537271	23.88074642	25.41091752	21.65257606	26.27602225	27.93965462	27.25205504	18.95656823	21.47678045	14.31598234	19.21158404	17.93115181	20.50615372
Zm00001d003394	31.37138127	29.86493407	30.37932135	26.63282215	24.53955152	26.7088665	23.16676995	21.61116826	22.53620895	22.7971708	20.94487916	19.82792627	27.77261477	29.1707486	26.73271884
Zm00001d003395	3.8024849	3.429851457	7.092048542	9.739995834	11.1292084	11.62267712	16.9385012	19.16060792	15.50885872	84.73248133	47.74116345	101.5040838	10.95673461	12.23827954	22.06414575
Zm00001d003396	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003397	0	0	0	0	0	0	0.010979269	0	0	0	0	0	0	0	0
Zm00001d003398	20.52941067	19.52998655	19.9626116	24.59050904	19.83704091	30.32901155	25.99206144	21.2175397	25.18861873	62.53848156	34.30903743	93.99840454	28.29137747	32.38090812	30.44661929
Zm00001d003399	0.045335706	0.139578973	0.081384837	0.672206403	0.398242955	0.425825393	0.488545124	0.309765736	0.19258405	0.06947268	0.101635163	0.027900465	0.38894618	0.42519907	0.524142626
Zm00001d003400	0.44677235	0.225084571	0.129558331	1.281548717	2.001539592	1.021733551	1.148517689	0.628490052	1.469317908	0.22593	0.075119236	0	0.816589257	0.277534939	1.015841952
Zm00001d003401	27.88274624	24.77784453	30.32456688	49.78467495	89.29004407	64.89450128	93.53277697	112.6881249	114.596851	101.6703758	156.8574488	108.7887609	54.9399721	59.98356335	57.23434378
Zm00001d003403	0	0	0	0	0	0	0	0	0.043176499	0	0	0	0	0	0
Zm00001d003404	2.74460378	4.330831776	3.900126421	15.77140714	7.396598584	11.44524029	7.14026803	7.680230059	4.866531183	0.714200208	0.692206684	0.22946019	67.10500229	73.8671855	71.65301471
Zm00001d003405	0.016140772	0	0.020059799	0.020130071	0.08507134	0.098873271	0.150883938	0.038924194	0	0	0	0	0.307054717	0.212328973	0.541167119
Zm00001d003406	0	0.06574407	0.005897483	0.005918143	0.181326565	0.093018436	0.094263182	0.068661144	0.140454756	0.353406392	0.197471548	0.057823012	0	0.005201974	0
Zm00001d003408	3.207943047	3.096393676	3.427938109	0.11217217	0.395040709	0.367305529	0.385357909	0.397649909	0.184873059	1.116407693	0.037806721	0.033211343	0.033549451	0.065731959	0.138647474
Zm00001d003409	0.051687085	0.390600447	0.064236861	0.38677134	0	0.031661875	0.332179974	0	0.254978042	0.24949754	0.065179072	0.143141517	0.433796307	0.254975388	0.149393309
Zm00001d003410	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003411	0.319893405	0.572551949	0.774204484	1.784808424	0.554613803	1.402636681	0.314775112	0.487223534	0.041528135	0.023220302	0.106156802	0	4.314492477	5.75850819	5.995308026
Zm00001d003412	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003414	1.298287989	1.569351605	0.508961465	2.705858701	6.877182882	5.049292224	4.367880848	5.347710439	3.578407175	31.66515185	35.73233882	36.53374759	6.445086922	3.639263118	10.53720805
Zm00001d003415	5.15454946	4.829794444	5.697301706	5.534361858	5.811383131	4.744589278	4.436396912	4.695793442	4.347403466	0.726628483	1.376723393	0.348976403	4.497785781	4.322796879	3.133532071
Zm00001d003417	0	0	0	0	0	0	0	0	0	0.020015802	0	0	0	0	0
Zm00001d003418	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003419	0	0	0.057207575	0	0.060652715	0	0	0.388521123	0	0	0.232186728	0	0	0	0
Zm00001d003420	0.813763924	0	0.5056741	0	1.072253353	0.099697215	0.285264946	1.76618531	0.501798303	0	1.231418899	0.450725372	0.273188388	0.089207659	0.094082215
Zm00001d003422	0.504266825	1.05854322	0.457593612	1.826803916	0.495697452	1.206172865	0.299294369	0.415005291	0.256657493	3.179278115	0.545054267	2.810752978	2.534829964	1.684708575	1.989607491
Zm00001d003423	0.183917945	0.057911333	0.123810789	0.86015431	1.85793137	0.873133009	0.868586987	0.831611917	0.661563683	0.042275528	0.07730881	0	0.574553157	0.285624522	0.956854094
Zm00001d003424	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003425	0	0.09110566	0	0.315743887	0.238278523	0	0.12678442	0	0.089208587	3.940571305	0.319256751	0.480773731	1.416532384	2.022040269	1.296243847
Zm00001d003426	24.53752744	25.41916296	25.01834207	30.28218246	20.71818839	29.74053571	19.1058517	17.37804573	17.66899207	11.36954312	14.27788618	10.1741385	44.7728199	50.80417097	45.28187194
Zm00001d003427	1.167372915	0.888721017	1.95376352	6.179473336	10.68525899	5.669914939	6.098932057	9.052342064	7.198472816	0.415022147	1.720715136	0.327601227	4.093160368	3.623015874	5.710486941
Zm00001d003428	5.402799155	6.861909222	6.489386527	10.17077243	13.47681215	10.61564713	12.44104949	15.14597797	13.07485992	8.279278631	10.35534534	6.311200808	11.30597048	9.424231155	8.734446272
Zm00001d003429	211.9186388	181.8898386	321.6800158	1953.16755	850.2463696	1841.00581	1147.904526	879.6111158	914.5437084	6.765341077	4.904759774	3.740542114	4508.080928	4863.547017	4376.218836
Zm00001d003430	15.11616108	13.392532	17.65830402	23.2418305	15.86586262	18.39454146	18.49660999	17.14332534	19.7161857	10.11725563	13.85262831	10.61952951	27.1145028	27.7399556	22.98053706
Zm00001d003431	0	0	0.007969348	0.135953512	0.04224638	0.062848526	0.164843533	0.286080047	0.015816532	0.229937628	0.129379847	0.13496392	0.25832448	0.126530938	0.066722471
Zm00001d003432	4.21034378	2.158609971	3.607435057	6.647095216	33.11677791	12.50116384	25.0851244	31.28451718	28.35727665	20.39880002	20.41299908	11.66555651	8.148140625	7.091621025	6.9637201
Zm00001d003434	24.27304357	19.52477445	20.5563091	27.78462061	65.95879706	24.77220076	76.56427515	96.74286898	93.10862505	15.99085225	36.78833195	9.262181192	9.336090317	10.0045706	9.308686122
Zm00001d003435	1.584581983	1.656078468	2.514029557	3.363781975	5.24200998	5.555507453	5.810822318	6.097803782	6.049794194	2.441138072	7.014988054	4.052193386	2.131610507	1.829471989	2.358203774
Zm00001d003436	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003438	10.38081979	9.214624367	8.730552191	7.989429979	18.35916987	15.70565585	35.39472659	32.6703529	30.46188244	57.19716859	48.94726195	40.75594179	15.51849695	15.49762192	24.60926224
Zm00001d003439	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003440	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003441	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003442	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003443	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003445	26.2988622	25.85036165	23.02168192	41.80111625	35.43183446	35.94883704	44.8352294	40.98029291	38.99777227	29.72163246	63.4979745	72.6583063	36.18321117	34.149509	30.76703876
Zm00001d003446	4.746535206	3.636600588	2.743870637	3.572596573	2.749343187	2.153990385	1.768094481	2.077301963	1.246150997	19.97321849	3.322464663	0.903849283	7.069784352	5.167319028	5.677475732
Zm00001d003447	0.198133825	0	0	1.420847491	1.109549122	0.303426307	0.057879844	0.477808586	0.366530935	2.186073679	2.123751434	0.713321894	0	0	0.057267435
Zm00001d003448	0.606113819	0.586381706	0.731445834	1.646953656	1.848069647	1.76136729	1.440438286	1.662915104	1.556402294	0.347294956	0.365548639	0.077846421	1.956143542	1.274318702	1.76033889
Zm00001d003451	0.034199459	0	0	0.213260411	0.09012561	0.010474754	0.239772412	0	0.010544355	0	0	0	0.08610816	0.271807201	0.148272158
Zm00001d003452	0	0	0.065015241	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003457	4.113468613	3.916172757	4.270216399	45.94492682	95.44155562	53.31560026	56.32190301	69.74504279	58.28036479	7.241610886	2.532581876	1.206188961	78.99737855	77.33498791	95.00272175
Zm00001d003459	6.985667089	7.076576577	9.261976148	23.87023784	8.589533933	14.68612927	31.83278485	29.97345704	24.46817483	2.115426176	0.861993229	0.480187421	217.3326902	220.7093217	200.2904795
Zm00001d003460	4.795774053	4.900197393	5.543426673	6.091143318	8.541797238	6.428429357	8.229015049	9.479591927	8.01041122	6.057766602	8.092116443	7.477219702	4.294428755	4.273280494	4.349367688
Zm00001d003462	14.03521778	16.64133654	14.71075426	16.87767083	15.77891036	14.45705175	14.9795995	15.9577382	15.55863315	8.784890735	11.02506782	9.185005482	16.82188777	15.61732549	17.83414045
Zm00001d003463	13.33981007	13.4099249	11.79048119	2.11835444	1.555742138	1.954065416	3.993709237	1.523557833	4.623843276	4.656585355	2.403132638	1.560329289	0.579490521	0.272488849	0.598705003
Zm00001d003464	0.008336118	0.272983666	0.248643655	2.245632131	2.537317568	1.960874006	2.065039898	2.010292223	2.539344195	0.218440746	0.672775203	0.21239059	0.652986879	0.667099225	1.387827401
Zm00001d003467	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003468	1.832300442	2.549302009	1.950614855	6.111489466	8.609219649	4.994286673	12.07448715	12.32262139	7.795208553	2.125459818	1.755331666	1.376761138	38.66360754	36.45900801	48.09893356
Zm00001d003469	0.279297079	0.153338127	0.106803456	1.232542401	0.953064164	1.166911773	0.410040341	0.535375886	0.415107324	8.661987727	2.691188918	12.89929267	0.809404675	0.675155713	0.794844399
Zm00001d003470	197.8222073	202.4320932	213.2564731	288.2821782	238.376952	317.070687	317.566535	286.7822764	328.1592075	277.612386	279.0487293	321.6106665	173.7682403	179.3123967	180.4690318
Zm00001d003471	2.857331848	4.244762094	3.833367389	1.726946468	2.71269755	1.059162697	1.515298038	2.12901366	0.71381212	0.282924327	0.535858599	0.137971239	1.541332986	0.803155772	2.17689909
Zm00001d003472	2.54425603	3.005088169	2.859993563	3.480751084	3.478571233	3.76663758	4.663809117	4.031196276	3.323950884	2.224196026	2.90194327	1.83543432	3.349776715	2.696267254	3.052186171
Zm00001d003473	0.077614467	0.069825506	0	0.165938393	0.116878224	0.081504293	0.194341082	0.14706274	0.068371545	0.061167512	0.097874333	0.012282541	0.186113744	0.097238519	0.076913927
Zm00001d003474	0	0	0	0	0	0	0	0.01914564	0	0	0	0	0	0	0
Zm00001d003475	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003476	5.49543196	5.895164507	5.402691831	5.266234738	5.967644523	5.841569237	6.736187403	4.68140612	5.191016932	4.370060897	4.951153227	3.204191131	4.536811304	4.592041146	4.597700506
Zm00001d003477	213.8324843	214.8586498	184.0741941	73.91948004	53.79839128	70.31852671	51.80624692	46.27499252	46.3559501	19.23994545	26.00003114	13.6713477	75.06827317	70.09961923	72.80849672
Zm00001d003479	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003480	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003481	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003482	2.922473918	2.245952571	2.277732033	0.679535756	0	0	0.057879844	0	0.122176978	0	0	0	0	0	0.22906974
Zm00001d003483	1.905179612	4.869478928	3.417210824	4.142869253	6.675885501	2.000662031	8.415534319	28.56790464	31.23352478	30.59708063	58.12624071	5.782537336	1.140167566	0.191256849	6.164186024
Zm00001d003485	0	0	0	0	0.148262192	0.137852939	0	0	0	0.543144849	0.993243227	0.124645041	0	0	0.065044494
Zm00001d003488	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003489	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003490	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003491	3.693318096	4.045269936	3.627633281	3.835359566	3.96383331	3.682498006	4.48675976	4.151027154	3.875325982	5.483937282	5.31781589	4.786919489	3.413565293	3.324977405	4.123629619
Zm00001d003492	4.274189386	3.517645054	4.132601606	5.205497691	13.10375892	6.408527984	7.284237164	8.967809233	6.955400231	7.78881274	9.583107569	4.982601115	4.109542708	3.509908567	4.691792973
Zm00001d003493	28.21766825	32.53739089	29.55547905	31.33392148	36.2265411	31.40924448	39.77840194	41.10182238	35.20962506	29.42694048	30.94041921	21.64675762	41.08319153	41.98313294	36.18239981
Zm00001d003494	0.01591529	0.180408297	0.158236552	0	0.094368281	0.038996815	0.120880606	0.134331518	0.078511865	0.351196936	0.582021039	0.387865187	0	0	0
Zm00001d003495	3.439261801	3.437436169	3.350033343	2.916890602	11.54882186	3.351887859	10.67020801	14.22222985	14.9492292	70.83867499	65.49451077	78.14869002	1.157982535	1.049543204	2.260474292
Zm00001d003496	0.141986109	0.166058313	0.063021698	0.151781928	1.175978752	0.099401378	0.841404617	2.201180505	2.238884062	6.210362875	9.911643212	15.62746452	0.079443508	0.122296553	0.03517614
Zm00001d003497	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003499	6.911763507	5.149460522	5.896497988	2.22075906	1.821452482	2.124140151	1.656345562	1.356042877	0.765726151	2.536604131	1.462507792	0.376338306	1.651771438	1.078747629	1.232501198
Zm00001d003500	6.105772441	4.842835231	7.931182211	6.74902558	9.827872139	8.298235387	6.562579501	7.737792759	7.727693873	1.067952498	2.985549465	0.463402024	5.338556421	4.322389849	5.85514783
Zm00001d003501	0.152325726	0.143891112	0.378621722	0.649077962	0.702490219	0.590962879	1.245948286	1.28569107	1.315019064	0.420164579	0.288131441	0.056246509	0.113638253	0.125238608	0.557679534
Zm00001d003502	5.573188681	6.191469252	6.442224992	1.885691095	3.063799251	2.362477765	2.640186765	2.695044654	2.639414392	2.236394254	3.447972916	1.801681361	2.348593033	1.790952979	2.282905358
Zm00001d003504	0.757758924	0.344644505	0.431633135	0.61690376	9.596296059	1.985655388	11.52303481	9.987082239	8.384783106	11.27809548	6.755266414	8.090988857	18.63149014	26.44337515	42.72071299
Zm00001d003505	0.091446381	0.057588527	0.018941639	0.608255782	0.481976089	0.112034329	0.783604042	1.102635199	0.112778749	0.063059818	0.15375576	0.253250377	0.443436224	0.300740201	0.68720922
Zm00001d003508	4.763941326	4.406278409	4.219306882	3.847101082	6.894488849	3.920802627	10.05270113	10.63012467	9.289365228	128.6361346	64.67826365	100.5917934	2.25359144	2.107635157	5.683620895
Zm00001d003509	4.205656788	5.160666621	3.626182858	6.645230864	3.499148416	3.644454762	4.195142675	3.504394362	2.4317242	2.247810441	1.674401187	1.956963518	7.818266773	5.847322197	7.194642259
Zm00001d003510	0	0.05133861	0.060789445	0.213508389	0.300768025	0.099875564	0.095258419	0.196593873	0.19102447	0	0.030840545	0	0.100348269	0.241291557	0.150800831
Zm00001d003511	3.831428615	4.140229978	4.626434886	5.823664714	6.224533159	5.787518588	4.731400752	5.945407237	5.584343922	0.465367397	2.607941298	0.771687771	3.629751452	2.350650223	2.894376414
Zm00001d003512	3.741600862	2.697870963	5.07655851	24.60884844	23.20651451	27.73439289	63.70532143	62.69409641	69.59190787	4.755705934	7.677672485	3.592956394	13.34752012	13.37291429	14.40440606
Zm00001d003513	2.96526133	2.4536489	4.306583356	13.07251361	7.58717278	15.94652555	34.85052701	26.79493913	44.52172226	0.618192967	0.152180394	0.095487847	2.411499014	3.590805136	3.9464701
Zm00001d003514	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003515	0	0	0	0	0	0	0	0	0	0.210199392	0.03843894	0.008441679	0	0	0
Zm00001d003516	0.393953002	0.657110215	0.919665232	1.161907995	1.536228402	1.115304359	1.580065648	1.392957158	1.122715083	0.212925109	0.288673745	0.064870755	1.38806935	1.184711059	1.009405444
Zm00001d003517	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003518	10.07551212	9.479082139	10.2874893	5.826642531	6.294156559	6.448798272	5.800543535	4.814346952	5.915775812	2.579417211	3.25589406	2.113296913	4.725086323	4.910771642	4.971252673
Zm00001d003519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003520	0	0	0	0	0	0	0	0	0	0	0	0.008455819	0	0	0
Zm00001d003521	0.084001437	0	0	0	0	0	0	0	0	0	0	0	0.258500841	0.552511952	0.679819874
Zm00001d003522	0.081997586	0	0	0	0	0	0	0	0.073546011	16.67536764	2.368836355	22.0889839	0	0.008171694	0
Zm00001d003523	0.288828886	1.050923034	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003524	14.95486886	11.54065298	19.46791243	31.32806024	139.6967683	33.33205151	114.3725158	172.2178983	168.3468189	246.711139	290.5904197	188.5069757	15.69561134	9.255260564	27.79892443
Zm00001d003525	2.312479488	2.85557889	2.75022434	3.891457179	2.719072654	3.706320699	2.649252999	2.414546617	2.285449592	0.464974832	1.235495095	0.293262427	2.640911517	2.49781445	2.362239043
Zm00001d003528	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003529	0.280435568	0.220756022	0.087131537	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003530	1.093256994	1.182239439	1.084217553	1.941901417	2.808299089	5.682258075	3.187225142	0.812236001	2.478672847	0.12184094	0.125330195	0.195726947	7.71106223	11.18568926	10.78829661
Zm00001d003531	0	0	0	0	0	0	0	0.052165811	0.008892628	0.586729031	0.100020311	0.31950153	0	0	0
Zm00001d003533	2.608240568	1.331792694	2.978702374	2.956168675	12.55687117	4.717609245	11.18187104	15.71409734	10.67700006	25.64215815	10.80616713	11.3619398	9.017417816	9.427780482	9.886909838
Zm00001d003534	0.21301867	0.325790189	0.189100164	2.258174977	1.49363639	2.19966343	2.391336193	1.632845035	1.529353894	0.094431814	0.057562152	0	2.724282648	2.793882607	2.665086843
Zm00001d003535	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003538	0.258557616	0.162827137	0.361503186	1.289847367	1.575680105	0.791921141	1.510622879	2.0264506	1.355211305	0.445741974	1.059660707	0.572836785	0.25316749	0.566879875	0.597855776
Zm00001d003539	7.700602573	8.13499548	9.17297951	10.09533264	14.92446038	8.480842287	9.122686074	11.35319457	11.36152869	2.987521739	8.079233129	1.798325598	5.655138312	4.613439742	5.96013218
Zm00001d003540	8.800786045	10.52825157	9.544043525	14.63461144	12.35747559	12.33635333	11.48811804	11.08975123	10.49061944	3.108634807	5.42762928	1.907162073	10.93839969	11.51022698	11.61537308
Zm00001d003543	0.033263343	0.010473826	0.093014506	0.736351619	0.756056014	0.652034341	0.136038757	0.150405075	0.348694879	0	0.062919214	0	0.102362559	0.227902778	0.221127541
Zm00001d003544	0	0	0	0.232502317	0.245643495	0.437761408	0.835048295	0.899148885	0.038319143	2.506842729	0.881583984	1.066989882	0.034769431	0.119213871	0.233494951
Zm00001d003545	0	0	0	0	0.368704662	0	0.794070842	0.771199823	0.098598965	7.277324223	0.957770254	2.612625668	0	0	0
Zm00001d003546	1.676110769	2.90042347	2.42723568	5.416791712	6.08783844	5.017597154	6.131067485	6.62539166	6.399051798	2.47244234	3.639118536	2.115045628	7.861301681	6.998141124	8.475824596
Zm00001d003547	0	0	0	0	0	0	1.313000297	0.225813647	0	0	0	0	0	0.205299818	0
Zm00001d003548	0	0	0	0	0	0	0	0	0	0.258286103	0	0	0	0.205299818	0
Zm00001d003549	0.838219005	0.87730502	0.513534319	1.398761778	2.05339295	1.54763138	2.041689005	2.078343565	2.344152074	1.22117134	1.712076362	0.640824053	1.215428823	1.151841897	1.419520255
Zm00001d003550	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003551	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003552	0.43954078	0.381795337	0.188366405	0.378052547	0.499275397	0.35280877	0.407340632	0.383783061	0.373845299	3.407257577	0.248468115	0	0.254410472	0.182766911	0.227799952
Zm00001d003553	0	0	0	0.009347681	0.009876018	0.009182638	0.008758134	0.054224988	0.027730959	0.093033974	0.037806721	0.008302836	0.075486265	0.041082475	0
Zm00001d003554	0	0	0	0.027193253	0	0.026713129	0.101912835	0.157745418	0.026890627	0.060143175	0	0.144922225	0	0	0.756258951
Zm00001d003555	0.082003974	0.12541666	0.080075899	0.058441028	0.046308114	0.093289939	0.082132838	0.02118817	0.057790653	0.153488785	0.007386403	0.051908732	0.124538323	0.109158986	0.406319076
Zm00001d003556	4.66579554	4.872432119	5.295738195	9.042955135	8.71047747	8.812995968	8.666710745	8.287715001	9.135987984	3.92758052	4.177630096	2.492281317	8.418088671	8.842494891	8.267762973
Zm00001d003559	4.225654121	4.549538226	3.601886293	6.048358138	4.52262776	7.801143169	44.20425868	44.1539495	33.2838447	0.131291272	0.200075798	0.017575674	185.1982658	249.5881905	226.6437276
Zm00001d003563	0.088966815	0.024900896	0.012285358	0.024656789	0.156302441	0.084775072	0.358076605	0.369498397	0.572986176	0	0	0	0.597340337	1.224525088	1.257150635
Zm00001d003566	3.017642804	3.855815355	2.782857542	3.447123278	6.062244677	4.98294718	4.47663377	5.526438658	5.641715436	5.657671972	7.11433951	3.40094354	3.464930652	2.512197259	3.175319891
Zm00001d003567	3.787360389	3.503283665	3.70685321	5.181593535	8.102201536	4.84363898	6.438993779	5.43151891	5.555417685	5.995443433	6.750350047	5.028745576	2.985321607	3.298457469	3.165207407
Zm00001d003569	0.152210094	0.296277819	0.103182084	0.043143142	0.127628537	0.389908946	0.218279655	0.200215339	0.025597808	0.009541946	0.07852165	0.145618966	0.07742181	0.212364791	0.247965675
Zm00001d003571	0.149475224	0.043445676	0.071449326	0.014339924	0.106052981	0.042260216	0.120919708	0.055456337	0.12762305	0.031715535	0.086996794	0	0.102933892	0.239487676	0.332334148
Zm00001d003572	4.810889911	5.449041048	5.100267377	11.72854363	18.56111273	11.2791624	16.74902434	21.73674815	20.40934386	2.393513492	3.610083758	1.588379034	8.736495496	9.778062787	8.740356837
Zm00001d003573	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003574	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003575	0.882828759	0.444770435	0.438872872	3.004227351	8.45853586	5.176161684	5.482139617	6.675876331	5.055016119	0	0.127231473	0.08382494	0.987913729	1.396379665	0.262458134
Zm00001d003577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003578	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003579	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003581	0.087449257	0	0	0	0	0	0	0.046863955	0	0.013400771	0.171540941	0	0	0	0
Zm00001d003583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003584	63.20604724	59.43175479	60.32665369	45.62582342	112.5438927	70.84406364	94.56968807	97.86416052	89.2234397	80.44618686	84.89134582	37.81305656	54.81039951	51.38812362	47.64228179
Zm00001d003588	0	0	0.022385573	0	0.023733671	0	0	0.043437144	0.044427992	1.415979542	0	0	0.120937152	0	0.124947131
Zm00001d003589	13.22762456	14.8951707	18.46918712	36.09958536	25.69232901	31.83076218	24.94006624	24.17954579	23.9975047	5.951247041	12.44677539	4.813587429	51.58183587	50.90678476	44.38682327
Zm00001d003590	2.004334845	2.703283577	2.8023674	10.19677234	10.82812134	7.919259788	8.333848964	9.133382637	8.837045162	3.121364671	4.507429469	2.275818961	9.093151437	8.12972229	8.525676272
Zm00001d003592	0.015660062	0.019723906	0	0	0	0	0	0	0	0.086391228	0	0	0	0	0
Zm00001d003593	30.86775458	38.95024805	31.13171465	9.615294967	12.16029715	10.18291052	5.157494528	5.183772398	4.73647103	84.51099616	45.32241129	120.075507	18.05677884	17.56324877	19.28507888
Zm00001d003594	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003598	0.038801988	0	0.048223225	0.080653595	0.059648531	0.071306617	0.007556687	0.101370459	0	0	0	0.007163847	2.446031132	3.154760918	3.282285477
Zm00001d003599	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003600	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.013282195
Zm00001d003601	11.98924156	12.29139546	9.61995204	10.37526332	13.4749319	15.67346199	15.87263573	10.37170304	10.17267647	1.948585606	2.019236107	0.972608569	27.26183495	28.87114566	32.93396078
Zm00001d003602	52.26501963	51.85757114	49.95518598	27.02250547	30.18952111	26.89356713	30.10313369	31.0477762	29.90800073	41.49856371	41.84264455	39.75218915	18.15106674	16.37464881	19.13623357
Zm00001d003603	1.366396585	1.025265608	1.454276773	0.235674863	2.729372171	0.765776376	2.462893522	2.523926695	1.532765727	1.293078271	0.989848684	0.547483961	0.707588425	1.203094041	0.865496355
Zm00001d003604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003605	0.030584416	0	0	0	0	0	0	0	0	0.021090476	0	0	0	0	0
Zm00001d003606	0.301517262	0.129674866	0.036558687	0.84379539	1.298470548	0.964043646	2.663905032	2.59813238	2.521354272	0.638976754	1.826924864	1.018314451	0.320948596	0.153174205	0.374102061
Zm00001d003607	12.84156183	13.78812236	11.65255625	10.31068276	9.239115357	10.79428494	12.87767468	11.51783002	10.56719314	4.951685823	8.073663756	4.408297477	10.87002219	9.392962824	9.439346413
Zm00001d003610	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003611	17.96160847	17.12849134	17.25540712	14.31608756	12.57608053	14.76436453	12.3335351	10.34045656	12.11298735	6.474000362	7.837437984	5.301490795	9.119809505	8.241565706	9.831736335
Zm00001d003612	20.95278478	25.0513697	23.71706427	37.08678597	25.67658699	27.21172674	27.6383238	25.80934959	26.56382997	5.476173175	13.92746879	8.783465382	27.12450643	29.65233883	28.73013561
Zm00001d003613	12.98705585	14.07483863	13.48987115	20.24035046	18.67983298	15.53334752	15.57150473	14.87906278	14.68635583	7.166216621	9.684793177	4.404021764	13.93975159	15.169324	17.88664937
Zm00001d003614	0.575987551	0.526312994	0.835145527	1.302883696	3.154843075	1.577365604	2.850528526	3.622345639	2.924980445	4.400252086	4.00198426	4.284962897	1.447074718	1.411404447	1.273082756
Zm00001d003615	38.00057699	38.65465253	27.45270347	27.96641094	30.29293032	38.52173536	83.77009297	64.28956144	64.41524392	116.7850948	101.9332564	136.8537414	53.97556998	58.05952446	59.29274464
Zm00001d003616	52.16393172	55.92434877	40.60382487	39.50497768	34.39179226	39.15581341	47.12161609	40.82816403	34.48058775	51.87871091	42.63355766	35.36486573	36.2790392	33.52699021	32.61147187
Zm00001d003617	4.894996891	4.547948215	5.615553733	4.069885185	3.600226936	3.714143708	2.504529522	2.770682416	2.917234205	0.625833063	2.191508209	0.545454095	1.674629386	1.905112716	1.808292059
Zm00001d003618	69.3242194	61.92110712	66.14567983	37.57443508	34.9734335	31.85239579	26.23613033	27.57324947	27.99512431	21.00739409	34.7413167	16.70914511	35.49396187	32.75674297	35.95137023
Zm00001d003619	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003620	0.166082765	0.176153143	0	0	0	0	0	0.010539895	0	0.132611087	0	0	0	0	0
Zm00001d003621	21.8878406	24.57647971	19.89623322	10.44647158	8.374881667	11.93713946	7.191408495	6.347629871	7.142662979	7.691832633	6.734099716	7.72668422	4.438546099	4.268584901	4.732982291
Zm00001d003622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003623	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003624	0.29547139	0.415087383	0.494324806	0.524402565	7.097728928	1.280897886	7.250424749	8.714942643	8.016759728	45.06051186	20.53593179	30.06214594	0.089018993	0.087205492	0.289050595
Zm00001d003625	0.168780666	0.135278101	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003626	3.660780647	2.094566616	2.684146881	1.360242621	1.337521718	1.058396975	1.198743689	1.796877314	1.078747443	19.1378577	5.133830132	27.45366108	0.797554726	0.757630923	1.011272336
Zm00001d003627	0	0	0	0	0.024475348	0.045513946	0.043409883	0	0	0	0	0	0	0	0
Zm00001d003628	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003629	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003630	9.109282067	9.944645609	6.723572631	14.71602898	16.62669306	20.38557473	20.9466846	20.08099176	22.75706291	72.83833837	56.71638872	69.00002878	9.162767762	7.357198925	9.534201077
Zm00001d003631	0	0.120834875	0	0	0	0	0.02802603	0.17351996	0	0.363866211	0	0.185983522	0.161037366	0.394391755	0.305024443
Zm00001d003632	44.07521361	52.46208618	44.27336191	49.84120875	41.97823577	49.3492233	55.27800722	52.91130526	45.54701141	1.658194562	1.619704137	0.786130019	86.33737533	81.78815345	74.34359654
Zm00001d003634	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003635	0.092303905	0.051669827	0.076477043	0.537214655	0.027027541	0.565424566	0.09587299	0.136030276	0.012648479	0	0	0	8.056700616	7.083074734	9.663718557
Zm00001d003636	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003637	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003638	0	0	0	0	0	0	0.168510938	0	0	0	0	0	0	0	0.033345595
Zm00001d003639	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003640	1.142278657	1.274973897	1.383725218	1.414092273	1.179988476	1.113364568	1.490872263	1.40490364	1.169749368	0.760304416	1.000270361	0.906688969	1.068123785	1.277276486	1.116064561
Zm00001d003641	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003643	4.860459602	4.021160581	5.051594368	18.6963522	32.19137031	16.00187214	22.17768406	32.37698596	29.61886786	7.281705513	10.84627242	3.700315487	7.182693101	7.449041629	8.847728889
Zm00001d003644	0.147897054	0.074510755	0.064332413	0.81850038	0.716169542	0.724776509	0.581099546	0.510470147	0.633833346	0.413048201	0.356686853	0.352242336	0.614424513	0.533002191	0.363352002
Zm00001d003645	0	0	0	0	0	0	0	0	0	0	0	0	0.067767662	0.082983869	0
Zm00001d003646	4.391900867	4.403063258	4.454351078	8.144122855	6.296799829	7.950432136	7.638415085	5.90131563	5.818269107	1.937915241	3.458244931	1.541507629	4.54246909	4.18948223	4.010312794
Zm00001d003647	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003648	0	0.002334143	0.013819154	0.002311261	0.002441895	0.002270453	0.002165492	0.002234566	0.002285539	0	0	0	0.004147634	0.030473539	0.00642774
Zm00001d003649	1.568830122	1.55775743	0.964557227	2.370667216	2.76715583	2.715250929	2.017465747	1.851617062	1.873380333	2.461323849	2.391808778	1.540183604	2.442937816	2.993737537	3.464419039
Zm00001d003650	0	0	0	0.059511937	0.125751179	0.146152985	0.055758593	0	0	0.065811119	0	0	0.213592318	0	0.027584314
Zm00001d003651	0	0	0	0	0	0	0	0	0	0	0	0	0	0.044603829	0
Zm00001d003652	9.399298331	10.40080787	9.665088137	7.879785626	6.320951869	8.466944316	6.775178089	6.154216392	6.65053581	12.57590023	9.705210947	10.90751972	4.777523522	4.569033735	5.332733094
Zm00001d003653	75.29061476	76.69702533	94.20598817	104.6223075	134.5179296	112.9456537	100.4105113	124.4075397	95.92158721	40.66294581	69.25025122	29.52240329	125.0426042	99.05790413	124.4660093
Zm00001d003654	9.652451565	10.86634011	14.48879033	12.48874364	13.3889396	13.83113339	9.245415343	8.87347758	8.6484694	2.491611081	3.840379758	1.347800143	3.094366858	3.265750931	4.450180097
Zm00001d003655	2.225593294	2.247235474	2.163865052	3.431304324	2.755975552	3.501600727	2.832744066	2.841747653	3.344579076	1.614212898	2.488666448	2.261949942	1.964095118	1.782318762	1.84612405
Zm00001d003656	0	0.017099275	0.025308813	0.033863297	0.017888636	0.008316352	0	0	0.00837161	0.018723819	0	0	0	0	0
Zm00001d003657	0.511415564	0.460092711	0.715037365	0.296128535	9.470210375	1.286673477	7.277781429	5.792112501	4.595225506	12.19207024	4.84835203	8.841804661	0.306584163	0.080090243	0.644057806
Zm00001d003658	0.312238301	0.344863413	0.441780774	1.611558573	3.487573731	1.747889053	2.026323309	2.496407158	2.014245895	0.271626952	0.569412252	0.186244918	1.048214055	0.826753764	1.221812598
Zm00001d003659	0.167988799	0.242358153	0.193593194	0.449490627	1.034307658	0.797043151	1.092113518	0.843370584	0.904044128	0.32857039	0.747214863	0.203007674	1.435520754	1.001134746	1.292432354
Zm00001d003660	8.334812325	10.72251769	8.916763971	10.63966215	12.04059327	11.93867643	9.301275821	9.727084979	9.31065134	2.28917017	3.803573256	1.146701835	9.446754607	8.21735302	10.60598878
Zm00001d003661	0	0	0	0	0	0	0	0	0	0	0.163604883	0	0	0	0
Zm00001d003662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003663	16.58122111	22.45077687	22.55019459	35.48086271	36.73443323	26.61965575	22.69546952	28.23537651	24.12250836	4.123522535	7.555032475	2.022620703	24.53131391	21.22933784	27.74592887
Zm00001d003664	19.91567322	22.40333849	22.58446379	25.26784192	26.05698245	23.98204672	19.76365052	20.19592255	21.92695292	23.66395918	21.28322185	22.43462747	10.69239009	9.468408337	9.355595007
Zm00001d003666	0	0	0	0	0.014669264	0	0	0	0	0	0.014038978	0	0	0	0
Zm00001d003667	2.92970735	3.512547839	2.694540333	2.802805257	4.916033888	2.33802891	3.688281466	3.26715372	3.371541678	1.906435048	2.550867099	1.906762084	1.48280904	1.438123406	1.649036584
Zm00001d003668	1.316358016	1.531566391	0.828991115	1.494466531	3.422321583	1.106484118	4.276510755	6.44144153	13.17675545	32.92277932	31.47987362	9.965467924	0.944599574	0.931827152	0.934972476
Zm00001d003669	6.793744881	7.238295844	10.42075839	1.644962791	3.324149598	1.744166899	2.20173863	2.625386229	2.724004021	3.103981914	2.521297194	0.208727952	2.74108778	1.950819861	2.142135326
Zm00001d003670	0.092651435	0.151271069	0.072500263	0.145508478	0.049737053	0.025224597	0.048116979	0.144817738	0.114264915	0.298157075	0.406763873	0.212872706	0.245759835	0.2407532	0.376895619
Zm00001d003671	1.404020869	1.382104474	1.334001243	2.22913192	3.352736667	2.776845251	7.307102074	8.50509332	8.492263527	14.02385804	9.891923701	18.32400067	2.488092212	2.889164979	3.429301672
Zm00001d003672	28.18673689	22.08803915	41.01318273	53.71819505	105.1361257	52.96935721	64.50511084	78.56431094	62.82014591	4.923106611	17.33325496	2.805728819	14.60240772	13.65544064	21.90209495
Zm00001d003673	0.182518627	0.200220578	0.109758719	0.74163099	0.97749608	1.226249984	0.440305583	0.489846399	0.413886353	0	0.007424576	0	0.863096476	1.348948889	1.43627319
Zm00001d003674	0.064184197	0.141470408	0.009971039	3.071832251	1.723156445	2.378691301	0.759367249	1.180220856	0.841042227	3.596148934	2.549557438	1.804171139	3.707923148	5.769599574	5.611805341
Zm00001d003675	0.339933384	0.409532253	0.16531443	3.022949039	1.772173974	3.277397748	0.77715423	0.980153289	0.984284153	1.732611099	2.031508367	2.472216486	6.102880925	7.242311735	8.321546462
Zm00001d003676	2.498501114	3.50850783	2.810907053	55.20259499	11.78135408	39.02165162	23.04991212	25.98995263	10.73500771	0	0	0	103.5273267	134.0094939	113.7564212
Zm00001d003677	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003678	9.154989979	11.23244619	9.007886296	6.401452672	5.999238294	6.088319537	6.441466511	6.065942697	6.657550537	8.785430513	6.678645269	3.971552888	6.241881407	6.853322442	6.651848628
Zm00001d003679	1.610896176	1.690774746	1.886865692	3.66249739	3.121274724	3.586188876	2.904011027	2.681507624	2.980022625	1.241918943	1.650880324	0.971198029	3.331436015	3.318264452	3.807239403
Zm00001d003680	18.40123673	15.3836889	20.53668938	20.95115742	28.86036915	17.45012818	19.40693082	21.88413985	18.930341	2.819815463	8.061945602	1.369078319	9.288405202	7.894877815	12.021943
Zm00001d003682	0.740276422	0.842150484	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003683	22.39803824	19.05565981	26.85466587	28.81478711	46.42571084	25.81227364	28.54170868	34.73628605	31.50089029	3.519578624	8.686976208	1.396647687	10.25002833	9.924649414	14.2779169
Zm00001d003684	17.02957183	15.31554215	13.32122591	12.75708719	14.41846024	14.81192443	12.60654994	13.46422537	14.08199096	24.81820137	19.71026483	24.42940745	13.59175146	11.07526325	13.33059278
Zm00001d003685	5.897395025	4.849549402	6.188513548	10.68801499	8.552032803	8.767668099	7.061960006	7.150094619	7.713919017	2.17340926	4.015464596	1.313772066	7.453838854	6.856745549	7.137502776
Zm00001d003689	0	0	6.405205265	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003690	0	0	2.924972616	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003691	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003693	0.099790029	0.059146311	0	0	0	0	0	0	0	0.0485742	0	0	0	0	0
Zm00001d003695	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003696	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003699	0	0	0	0	0	0	0	0	0	0	0	0	0	0.01561134	0
Zm00001d003701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003702	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003703	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003705	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003706	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003707	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003709	0.127174269	0	0.263420926	0.317212463	0.307213054	0.025967647	0.27243908	0.383358052	0	0.087697142	0.106913889	0.070438942	0.118593409	0.116177416	0
Zm00001d003710	3.813105304	3.7827588	3.57524549	5.512019168	4.442357419	4.913271154	4.448732323	3.866359571	3.925504471	0.568529823	0.980255061	0.244632337	3.571748422	3.634554043	3.050184711
Zm00001d003712	522.2579361	540.0831683	532.047451	724.4095989	1019.207942	946.9691735	798.0792966	936.7745597	799.7175749	486.4618381	597.7942905	574.9511009	417.1968566	436.7376768	687.1886358
Zm00001d003713	3.384219782	3.727637148	4.064145779	3.612056202	3.72769584	3.893016342	3.714527264	3.8284269	4.201818747	2.789949679	3.724168781	3.18163806	2.199893441	2.209266628	2.154139045
Zm00001d003714	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003715	18.86630281	22.00897401	23.89503198	65.82915592	28.54377417	53.30791964	24.26722958	20.06600595	15.80281464	0.188548855	0.3761425	0.178978948	248.7961422	233.0324637	196.0351764
Zm00001d003716	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003717	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003718	0	0	0	0	0.01723814	0	0	0	0.048403128	0.162386574	0.478426864	0.014492223	0	0	0
Zm00001d003719	0	0	0	3.566702205	2.077844621	4.928141518	6.745972201	4.15735506	4.417002309	1.271737144	1.381885528	1.421172787	2.213279924	3.281586139	4.650585956
Zm00001d003722	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003723	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003724	4.230344081	5.11154321	4.616327481	6.005091281	2.855026286	4.318958601	1.768283838	1.886893153	1.378525151	0.308318882	0.346965828	0.095247626	4.714647406	3.167040208	4.970381154
Zm00001d003725	3.160017573	3.142147758	2.521726606	6.596051124	7.670133474	15.20055058	5.519286731	5.093718542	4.348430261	0	0	0	0.521118483	0.510502223	0.115370891
Zm00001d003726	0	0.039200842	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003727	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003728	0.038719933	0.046817183	0.00192485	0	0	0.007589955	0.007239079	0.003734994	0	0	0	0	0.003466308	0.001697846	0
Zm00001d003729	23.79681116	24.34702201	29.00274254	25.5327357	25.65065328	32.03636994	18.34516812	17.4504394	18.64737556	3.173827357	6.835756779	2.133808097	10.64412813	11.23082158	10.70144134
Zm00001d003730	0.083744159	0	0.026019372	0.02611052	0	0	0	0	0	0.057748501	0.105604071	0.023191995	0	0.091803288	0.145229514
Zm00001d003731	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003732	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003735	0.112985404	0.106729151	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003736	0	0	0	0	0	0	0	0	0	0.01468449	0	0	0	0	0
Zm00001d003739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003740	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003741	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003742	2.896414828	3.265074097	1.957291845	2.508664859	3.508258875	2.693615775	3.657768483	3.332602487	2.725936652	3.741944767	3.160887632	4.642201441	2.268390609	2.046968557	1.690099665
Zm00001d003743	0.793162306	1.10797168	0.806518185	1.312935023	1.520156652	0.936396628	1.870471415	1.373699685	1.458391019	0.437560634	0.891090047	0.2715763	1.258741435	1.391187795	1.133750233
Zm00001d003744	0.067125535	0.018787747	0	0	0.009827527	0	0	0	0.009198267	1.676675578	0.047026363	0.008262069	0	0	0
Zm00001d003745	0.142091518	0.127831995	0.201819151	0.063289421	3.864888255	1.044489309	2.514228235	4.038493507	3.041635329	3.919352588	4.13398386	3.148050708	0	0.011126122	0.046936339
Zm00001d003746	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003747	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003749	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003750	0.258692367	0.248509826	0.359648135	2.97475703	2.386056018	2.750338567	9.632037672	8.316214003	8.181468887	0.737747283	0.276457097	2.511109875	4.514004415	4.638340495	4.907000027
Zm00001d003751	0	0	0	0	0	0.084307712	0	0	0	0	0	0	0	0.100583132	0.013259909
Zm00001d003753	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003754	0.251050365	0.160873106	0.186108921	0.197746816	0.09285493	0.129503599	0.133809846	0.138078061	0.038022861	0.097190131	0.133297922	0.029273916	0.152788351	0.086908492	0.157854438
Zm00001d003755	0.083171005	0.039282821	0	0.038897726	0	0.025473965	0.04859266	0	0	0	0.013110163	0	0.058169391	0.011396872	0.060098145
Zm00001d003756	22.75858353	26.80081992	30.84302656	53.17647102	47.04795418	45.83350747	41.76010317	41.71521915	36.22015575	4.813541353	14.84656573	5.149086655	98.52266036	103.8855723	117.8183827
Zm00001d003757	0.168989294	0.021284264	0.126012236	0.021075612	0	0	0	0.081505049	0	0	0	0	1.45610424	1.53759159	1.973284325
Zm00001d003758	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003759	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003760	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003761	0.108501857	0.034164622	0.067423213	0.135318809	0.178708892	0	0.221872735	0.032707135	0	0	0.136824322	0	0	0.029735886	0
Zm00001d003762	0	0	0.05385309	0	0	0	0	0.013062121	0	0.01494048	0	0	0.012122464	0	0
Zm00001d003763	0.207139908	0.304375727	0.600679537	0.215279923	0.818811651	1.522648376	0.968171936	1.415326949	0.808959689	0.857040249	1.567260416	0.458920379	0.115898104	0.529839429	0.678532336
Zm00001d003765	0.060559176	0.076274506	0.037631561	0.859117087	0.98747053	0.788303561	0.141526795	0.164296308	0.205387213	0.114841495	0	0	0.194832029	0.257249993	0.227547682
Zm00001d003767	725.1894721	698.7726574	835.1326109	1704.714681	653.9498293	1664.776623	1005.640534	596.672791	676.9479762	3.187055112	0.713233168	1.020365524	2007.401194	2019.544985	1547.979384
Zm00001d003768	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003769	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003770	2.218577434	1.434914143	0.596163149	8.076396262	9.876017725	8.888793809	4.69435998	5.277898791	6.137785564	2.15011852	5.671008086	1.793412535	5.166615484	5.718680451	6.863049977
Zm00001d003772	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003773	24.44214088	21.98416014	24.24502792	23.35494382	25.98799007	21.39918749	20.46199115	20.55787369	20.75205841	18.97779141	25.05016175	15.30591249	28.79753675	28.15758476	25.29398251
Zm00001d003774	1.332210295	1.041469942	1.404469032	5.935475807	8.988769036	5.616812457	3.736050577	4.37035908	3.943163442	3.25652256	3.458400253	2.870102856	1.413676472	1.500703036	1.487105974
Zm00001d003775	1.061488042	2.051523834	0.978042757	1.91728818	1.808620113	2.354295682	1.26173411	1.500587608	1.489675927	0.933909991	0.53081243	0.324377457	1.843198764	2.447657533	1.10027072
Zm00001d003776	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003777	0	0	0	0	0	0	0	0.325617703	0	0.046555273	0	0	0	0.037004659	0
Zm00001d003778	1.527961438	1.410797939	1.534869621	6.368739928	4.904612984	7.072637729	4.255481775	4.003353369	3.96007414	0.530788793	1.789179223	0.604502264	8.619897146	10.82456228	11.11055613
Zm00001d003779	0	0.012811733	0	0	0	0	0	0	0.012544958	0	0	0	0.01138285	0	0
Zm00001d003780	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003781	0.008315836	0	0.010334945	0.591155525	0.635525345	2.424752706	1.729635631	1.66448283	1.025573175	1.743274084	0.40897489	0.073695243	28.51262556	29.34476173	34.84200909
Zm00001d003782	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003783	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003784	0.072874381	0.33042799	0.054341097	0.009088577	0	0	0.008515372	0	0	0.010050579	0	0.056508853	0	0	0
Zm00001d003785	0.04046454	0.029122993	0.043105243	0.497446817	0.190421314	0.467417641	0.385017212	0.202134245	0.22100343	0.03188987	0.0437375	0.038421241	0.705091722	0.735086197	0.828719111
Zm00001d003786	1.695765561	1.787207261	1.85930483	3.583070043	3.314697295	3.112024807	3.643671164	3.210697368	3.305541669	0.420393398	0.737841462	0.178534376	2.654310143	2.358264591	2.67345873
Zm00001d003788	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003789	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003790	0	0	0.059149346	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003791	1.034125186	0.835085755	1.260616431	3.103957819	2.497034736	2.455084515	2.619110075	2.535602025	2.51411302	0.102360942	0.311977282	0.08769814	2.148330547	2.109988753	2.122314976
Zm00001d003792	0	0.069152489	0.136471082	0.410847467	0	0	0.256623887	0.066202394	0	0	0	0	0	0	0
Zm00001d003793	0.529463973	0.418032791	0.30445673	0.118267074	0.166602139	0.203313165	0.064638069	0.066699869	0.019491818	0.054493889	0	0	0	0.017325881	0.118771998
Zm00001d003794	0	0	0	0	0	0	0	0	0	0.197897821	0	0	0	0	0
Zm00001d003796	15.45328192	17.18546977	20.79205972	25.72452674	21.44840481	24.04836482	13.23984541	14.67239547	13.39977197	3.283097765	9.257203549	2.563347099	25.8051413	23.15094949	31.04273791
Zm00001d003797	0.525816689	0.662268066	0.5082673	6.849213544	2.578906782	2.541000815	1.12643081	1.514591961	1.26092907	3.907957034	1.620841969	0.744274718	7.747342499	10.05530432	15.43430794
Zm00001d003799	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003800	13.69850971	13.26062974	13.22415679	33.39731791	57.83522085	35.97109114	27.25744181	29.78227205	27.58366697	13.48389727	14.53789511	5.39503583	21.22330399	19.79092974	20.02793655
Zm00001d003801	0	0	0	0	0	0	0	0	0	0.010987696	0	0	0	0	0
Zm00001d003802	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003803	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003804	0	0	0	0	0.081326665	0	0.82939334	0.204659547	0.019029823	1.915281821	0.194580864	1.999877635	0.051800959	0	0
Zm00001d003806	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003807	1.313284496	1.508778921	1.558073649	1.39806597	1.745646556	1.38280458	1.004325192	1.194017448	1.159598712	0.307618385	0.283693974	0.044730214	0.781065198	0.596524464	0.862539393
Zm00001d003808	0.049265708	0.015512585	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003809	0.07857031	0.024739899	0	0.489947411	0.362347685	0.52942659	0.160666464	0.521058501	0.266472203	0.027090353	0.148619522	0	0.241787424	0.258394598	0.363352002
Zm00001d003810	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003811	0	0	0	0	0	0	0	0	0	0.017555759	0	0	0	0	0
Zm00001d003812	11.15361911	12.44148255	10.43139616	11.53715992	9.301740436	10.55466877	8.962328224	7.226105779	8.278060234	1.401571481	2.24661435	0.648581264	8.671830125	7.766223942	7.798952238
Zm00001d003813	12.33077926	11.83583185	11.96672047	13.18149684	13.68609208	10.72185204	11.25947183	11.54246224	10.75847319	3.658699545	9.000483716	2.495556251	7.586447153	6.601000404	8.016500166
Zm00001d003814	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003817	1.282973959	1.462306794	1.227691909	16.73989026	9.885927221	16.68040242	13.19883495	13.44044438	18.16594014	8.34593593	13.5888888	8.389523043	31.9891174	36.33217064	29.56434143
Zm00001d003818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003819	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003822	20.63830505	21.81345442	24.07689431	45.20754179	60.90502146	54.09244958	66.37621554	75.1902448	61.50406705	36.46335426	66.53510236	47.90863997	30.06385677	23.79528525	34.7651876
Zm00001d003823	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003824	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003826	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003828	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003829	0.013208922	0	0	0.164735941	0.052214076	0	0.0617385	0.302612105	0.146612374	0.182172807	0.099941244	0.043896732	0.251280527	0.202721173	0.015271316
Zm00001d003830	0.779078904	0.147860005	0.464225403	3.008070565	46.92602543	11.59756456	47.82474605	55.72009028	37.60361319	8.095384088	7.119350791	5.710173243	7.070055776	8.259751764	12.86921311
Zm00001d003833	1.954695573	2.842961808	4.048835687	36.4510866	81.36130685	60.02603866	152.8553973	234.8219779	136.3039643	42.47564415	62.31294032	16.0208128	62.56130342	69.96006259	110.5868775
Zm00001d003835	0	0	0	0.314772367	0.387990752	0.051535791	0.491533445	0.355048534	0.311269348	0	0	0	0	0	0.048633268
Zm00001d003836	5.473297047	5.206360352	5.236821387	4.566237182	4.430501459	4.678510265	3.87287673	3.935275538	3.439223508	1.957993183	2.920984278	1.679094981	2.577132233	2.542183202	2.298522349
Zm00001d003839	51.5627394	51.27203421	53.26709049	53.74365989	42.40871425	62.67495946	42.30459736	35.22758727	45.46087813	12.56992366	15.98331468	8.506751519	37.72601553	39.45527315	36.75734527
Zm00001d003840	2.110908053	6.615462478	0.694440726	0.185832914	0.229059027	0.212977157	0.652922491	0.344360684	0.964765348	10.05251388	11.55587653	11.67808562	0.986554979	1.279534378	0.947487372
Zm00001d003841	0.05639948	0.085242424	0.210280319	0.253220345	0.074314589	0.013819416	0	0.013600987	0.02782248	0.093341017	0.014224311	0.012495357	0.15147079	0.173115853	0.091287693
Zm00001d003846	5.655526736	6.567377255	6.193511949	12.73840054	8.17211368	8.362166651	5.38801874	5.989444527	5.277307405	1.67499723	2.164555103	0.905881921	14.6688493	14.19249738	16.3721441
Zm00001d003847	12.10041306	14.18468135	13.41725809	17.61199497	13.04843232	22.15780604	15.51252791	13.05526394	16.58505219	9.886659151	11.68754143	11.6294895	22.08865105	22.70363037	20.45244908
Zm00001d003848	12.74275975	13.07536737	11.60270574	5.570937861	1.444961738	3.932015512	1.793965647	1.295832217	1.118017354	0.010082826	0.156726042	0.040492975	20.83711562	27.08859735	23.80169347
Zm00001d003849	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003850	46.30579231	48.33602342	42.28421141	33.88969938	34.22261793	41.59118742	42.72748084	45.14258129	38.70838361	72.9478308	116.4667035	67.30254772	31.17460137	32.92589178	30.38577873
Zm00001d003851	14.91599133	14.55507818	13.9884439	17.03701389	18.06250486	17.98334673	20.33833408	17.89625423	19.70952225	39.31738274	39.18876624	42.73377337	20.49840404	19.97673362	18.39133071
Zm00001d003852	3.583721513	4.021474588	3.546591939	8.92053117	11.28052168	10.69631739	14.59621024	16.29767976	13.06819193	11.70548716	14.58042484	10.75789569	15.13351685	15.75482318	13.65744926
Zm00001d003855	5.386742141	6.027131276	4.361720791	3.357432044	4.771905191	4.076440843	4.484271503	5.035416405	4.045730903	10.25510435	7.951809563	13.21203018	3.912769436	3.345006896	3.374274487
Zm00001d003856	0	0	0	0	0	0.012434397	0	0	0	0	0	0	0	0	0
Zm00001d003857	61.51743278	47.79816239	87.66741009	158.2296231	305.9477963	144.0532387	207.6801714	228.9382441	219.9165533	60.87606569	175.2627767	84.38270181	67.06644012	51.82822479	60.52522285
Zm00001d003859	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003860	0	0	0	0	0	0	0	0	0.043793306	0	0	0	0	0	0
Zm00001d003861	9.066375313	8.277743238	9.651045353	18.47138981	133.0333914	43.67067296	83.10683851	124.6721584	79.4494952	51.85464181	38.5965094	25.37426713	7.077834941	6.874718669	9.553919431
Zm00001d003863	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003864	6.975309405	6.826594259	6.400428689	7.264905493	7.976162544	7.353416663	7.187588422	7.079980804	7.609012421	1.637600749	2.70694059	1.965260875	5.88285513	4.634909102	6.460141173
Zm00001d003865	0.302770087	0.352006195	0	0	0	0	0	0	0	0	0	0	0	0.051062646	0.053852852
Zm00001d003866	139.7834879	136.1475862	145.0907026	411.4202151	570.1229887	453.9253902	836.2845145	837.1744908	818.2182134	98.65170738	134.9009689	50.89464933	370.6134019	347.7272991	379.0069857
Zm00001d003867	43.67269405	50.47211764	44.30039138	53.02759258	26.60762265	42.85626562	23.8303531	20.59793363	23.17148041	6.746243431	2.040314248	0.277878395	115.1882548	106.5993877	100.374157
Zm00001d003869	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003870	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003871	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003872	0.150141678	0.220621332	0.145130626	1.914113032	2.209142845	1.073007245	1.403524418	1.599157413	1.02870183	0.046015584	0.262963157	0.064680053	0.989412003	1.014975243	1.340456301
Zm00001d003875	0.411784154	0.492711483	0.383824919	1.771779702	2.55015436	1.412577409	1.635977278	1.092339509	1.853630841	0.170375471	0.051927303	0	0.691199537	1.579942875	1.73768717
Zm00001d003877	0.705262067	0.13665849	0.5056741	2.266590044	0.965028018	0.864042531	1.267844202	1.602649633	1.271222369	1.608650944	1.402449301	1.262031043	3.308614925	1.992304383	2.947909394
Zm00001d003878	30.36854012	31.51379262	27.20111909	21.06619308	20.20165907	21.21380616	22.76120301	21.43318184	21.83344997	37.31324341	37.28052735	38.14757556	20.59915137	18.69815044	18.81406862
Zm00001d003879	19.32089922	18.9898079	18.3480127	17.28865518	18.14468412	17.64718477	15.38041775	15.60349421	16.41899526	9.306567255	14.07569325	9.496973134	11.41390051	11.39100139	11.39979847
Zm00001d003881	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003884	27.58911381	33.37284851	32.63839592	4.423669507	3.807052111	3.395872151	4.528948619	4.43265981	4.519288638	20.62050621	23.06054051	24.36890869	5.217804337	2.72957043	3.163878189
Zm00001d003885	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003886	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003888	0.455218315	0.79529076	0.529246877	2.106089728	2.128382595	1.277323718	1.595767815	2.195558681	1.865331438	0.931605513	1.7221347	0.406669509	4.223122755	2.752693475	2.767290405
Zm00001d003889	3.174403722	3.934304652	4.361101495	4.679942773	3.661570204	4.274259239	3.069349236	3.216169293	2.388976849	6.196375571	3.977446502	2.774970335	12.10946037	10.69538947	12.44062805
Zm00001d003890	14.37484021	14.25124782	12.41507083	5.673186389	5.508725664	4.410304093	5.649987215	5.563853663	5.589870939	3.05785396	5.045059114	4.295890229	2.938859646	2.609924614	3.26331847
Zm00001d003894	37.30055875	39.11465678	34.17238461	31.89835907	24.13552859	28.48451281	23.09239785	24.10398781	25.41230765	31.65570933	33.79789009	41.92450566	28.10517077	28.72931402	28.91559996
Zm00001d003895	1.183418336	1.369198397	1.197126807	2.771617953	1.912895665	3.017709766	0.932602459	1.327379666	0.814595172	0.170804197	0.034705314	0.320112554	5.089250821	4.042763599	8.85348205
Zm00001d003896	35.85880621	28.13894601	38.92310769	51.47004058	91.98679859	44.23327775	55.12157007	63.33023287	56.05395501	4.565313352	17.48540988	2.974382008	15.51644513	14.00948104	23.96938367
Zm00001d003897	0.126147487	0.05958121	0.195970585	0.058997128	0.207772276	0.115910949	0.22110501	0.142598583	0.281979393	0.206599091	0.328094309	0.14847424	0.141163089	0.043214783	0.236996029
Zm00001d003900	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003902	4.184762975	4.299300276	4.01138286	2.225575273	2.209031687	2.519780941	1.784799261	1.83391513	1.918379355	1.18885893	1.462991037	1.318670868	3.191227191	3.358313107	3.039771379
Zm00001d003903	0	0	0	0	0.064258703	0.179241604	0.379900998	0.254812308	0.100240327	1.50211335	1.045461467	0.216090928	0	0	0.018794069
Zm00001d003904	11.03625022	10.51891516	12.92523026	9.757423955	13.0496418	9.568563606	9.64816885	9.89607813	12.01931144	5.60668377	10.16184757	3.853568056	5.690252661	5.045090572	5.237305385
Zm00001d003905	15.70791681	15.80810441	21.67336142	18.70121055	21.8715723	16.96746347	16.21282335	21.02758178	23.07711527	3.265371229	5.168748971	2.030530393	7.293163379	7.284129289	8.653461356
Zm00001d003906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003907	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003908	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003910	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003911	68.3918504	72.71307146	63.33715814	43.03790122	37.59004672	46.36358841	38.08816776	29.7685493	34.44183979	6.499465645	13.40493787	5.38155779	40.09381015	37.23704272	34.93398616
Zm00001d003912	1.391867707	1.597234747	1.23009229	0.38575045	0.36679798	0.113681892	0.867411961	0.261065099	1.296955615	0.255948672	4.680506221	5.036703076	0.034612103	0.440790785	0.286078046
Zm00001d003913	19.72761028	20.62300846	24.2723568	54.76721236	27.63164398	41.42570343	19.10986988	16.22273914	16.66578608	4.897372853	9.055282406	3.409122817	58.89831273	56.83338852	51.61407318
Zm00001d003914	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003915	0	0	0	0	0	0	0	0	0.079156915	0	0	0	0	0	0.07420569
Zm00001d003917	15.85788378	16.43040446	15.86994046	12.58659158	15.24344097	12.86809605	12.81371918	12.29287511	12.30246175	7.784245272	10.3639514	7.458318795	8.804770256	7.339784224	7.470758063
Zm00001d003920	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003922	12.9041153	13.04503437	13.20647535	10.26189438	8.559069859	10.6214714	8.696246702	6.981392255	8.762063745	5.667533776	6.804269757	5.974601381	5.924490172	5.661482752	5.861685829
Zm00001d003923	13.15685839	11.75510806	13.30908558	17.34387182	49.62384629	21.20595016	28.68373942	33.69362764	29.78470916	25.16263956	24.75006851	16.01623802	14.02944974	14.64720205	14.86004272
Zm00001d003924	4.196276619	6.520091801	3.519004339	4.128038836	5.735909503	5.573434675	11.75887309	9.183217863	3.172816261	50.62585432	15.47928174	58.22285727	14.32428754	16.9129123	11.97904632
Zm00001d003925	0.883974158	0.671420833	0.813471385	3.93853875	2.498466747	3.166296944	2.85433908	2.00156045	2.380099199	0.595613362	0.280807271	0.702651045	1.683897627	1.294523777	2.301438579
Zm00001d003927	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003928	22.6236871	25.12025501	21.27028385	11.43553061	11.47656976	11.69737777	11.46151608	12.58486163	11.96999385	12.70677363	15.93760599	12.53074694	10.78712258	9.689102826	10.63918103
Zm00001d003929	0	0.052859462	0.104317113	0.013085318	0.152073998	0.257085681	0	0.101208879	0.012939695	0	0.105847212	0.034868087	0	0	0
Zm00001d003930	6.398754222	7.54139087	4.66284749	0.705082213	1.218982759	0.913016601	0.360334668	0.402814193	1.07754583	0.17720757	1.134201617	0.740138506	2.415560486	1.549396181	1.010145884
Zm00001d003931	28.55033713	29.99996074	25.19435121	30.20480293	56.41368063	33.6113704	51.89799308	60.86332225	44.17677516	9.98449479	13.36889893	8.744021497	35.94341316	34.41839314	39.06534981
Zm00001d003934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.010016357
Zm00001d003935	2.911900888	3.214522829	2.732653118	4.247914666	5.691405992	4.429649222	4.579380164	4.487858959	4.358791577	0.539204	0.496962466	0.058900557	3.962012883	3.449281176	3.532893707
Zm00001d003936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003937	1.776091928	1.701293076	1.487044902	7.484587396	4.631254687	4.935983556	4.014189797	3.815362819	3.233742667	0.244952358	0.51866943	0.067308322	2.568064248	2.382530706	2.020982466
Zm00001d003938	0	0.012414542	0	0.098342725	0	0	0.011517546	0	0	0	0	0.010918798	0	0	0
Zm00001d003939	14.24107817	14.29531236	12.64769221	8.549122819	10.04818515	9.554212557	9.970319346	8.827245643	10.20885487	23.78299825	26.33216536	28.3355907	5.804709018	5.601939138	5.187220658
Zm00001d003941	35.7999378	43.06384117	31.36165697	38.18290565	29.23141982	49.50370026	48.42494839	39.22397195	48.39047035	266.6237975	179.6871966	272.2439202	33.36425749	31.09646309	32.8731613
Zm00001d003943	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003945	14.93662944	16.09395536	13.50617894	4.424998718	5.173671079	4.704043916	13.10458494	15.12316205	13.18846154	9.761081824	21.58894113	12.71879924	13.52158571	12.07654754	11.42407379
Zm00001d003947	3.827536409	4.36351299	4.048267774	8.364053789	8.432519618	8.075418486	7.767827953	7.679564428	9.510199318	5.433958955	7.92189027	5.358734393	7.295923293	7.741496365	8.247281779
Zm00001d003948	18.00571378	16.81400073	17.06749575	20.20418141	20.47436497	20.49136247	20.33883582	18.95966513	20.30723945	15.72519622	20.86561629	17.24718679	10.17827529	11.05545554	10.46572088
Zm00001d003949	0.052001651	0.235786577	0.14864395	0.512348201	0.232967332	0.675316853	0.267361288	0.275889477	0.173157634	0.609610219	0.144266649	0.581811192	2.030883933	2.109223309	3.144328533
Zm00001d003950	60.54593454	61.32095824	55.23337601	28.28803299	25.3396469	26.08978554	29.51669484	25.75219514	31.682953	91.98935705	74.09342966	109.6126716	15.73975873	17.59963623	15.12973715
Zm00001d003953	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003954	0.478079465	0.451607141	0.719845955	0.366916904	0.254398778	0.630767585	0.268574932	0.19954212	0.249448087	0.532552246	0	0	1.358042076	1.642812732	1.434959401
Zm00001d003957	11.96854388	12.11589323	13.6234119	11.45461413	9.547343855	11.3437304	10.19485049	10.29525473	8.936024187	6.924885215	10.57900781	6.99394658	8.316847952	7.370823367	6.336693748
Zm00001d003958	11.38036518	11.90481798	12.47022977	13.87940417	12.10021663	13.51652546	11.51433053	10.91228971	11.88501679	5.584365434	6.716830356	4.682080536	7.886590038	7.369093279	8.076815583
Zm00001d003961	12.14750506	9.915567698	10.52052617	11.87705333	10.20599291	15.66017927	10.53449	16.63750207	7.412322183	0	1.014109681	0.281319613	15.20382188	15.86846827	15.85474647
Zm00001d003962	232.60628	255.086737	237.8690966	385.8209871	315.9287279	431.6490625	256.2059564	276.3883767	213.8062211	29.8086761	43.7564182	17.09150612	296.1362129	233.2958696	291.8806629
Zm00001d003964	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003965	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003966	277.90038	262.1280657	322.2661039	195.4680191	173.5442052	185.9851548	107.7350611	148.7520516	104.1733278	13.35554389	47.46093672	18.47974027	112.4170218	78.19051305	84.25062326
Zm00001d003967	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003968	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003969	0	0	0	0.025448015	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003970	0	0	0	0	0	0	0	0	0	0.193383441	0	0	0.013075684	0	0
Zm00001d003972	0.182770507	0.199506779	0.212004542	0.151962298	0.01605513	0.074639626	0	0.058767901	0	0	0	0.013497658	0	0	0
Zm00001d003973	0	0	0	0	0	0	0	0	0	0	0	0	0	1.620203967	0
Zm00001d003974	21.96511583	22.69077564	17.93457474	58.19791321	42.75288569	45.92984234	38.05561157	37.5477914	44.73632235	2.388285495	10.26729713	1.649053896	91.11136293	93.35165204	84.43816048
Zm00001d003975	19.47802078	22.34732357	22.09434621	52.02041629	38.957262	53.94331459	34.17066526	29.7938641	31.25845003	15.27149526	14.16131733	14.38135885	40.63677276	42.77188647	48.62706468
Zm00001d003978	0.121198882	0.183180529	0.27112739	0	0.031939462	0	0	0	0	0	0	0	0	0	0
Zm00001d003980	0.036119508	0	0	0	0.071389127	0	0	0	0.007424229	0	0	0	0	0	0
Zm00001d003981	48.47726254	37.51114137	39.37728014	122.3047619	236.8751187	189.1201219	215.0942613	183.9675925	179.6674996	127.9756794	150.3171395	67.05657856	130.7403621	103.3347805	99.48120037
Zm00001d003982	0	0	0.065702435	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003983	3.886697908	3.322834238	1.088244096	1.275239979	2.047029128	1.349620151	1.452257904	1.648439622	1.323752219	0.60771945	0.534293324	0.156450129	0.733318913	0.61309991	0.99276175
Zm00001d003984	15.20037327	17.3259673	15.30138853	14.36361405	15.91903593	15.78269309	19.23645479	14.81620167	18.072757	13.98424929	18.56365356	18.43136682	9.62864782	7.589896903	6.833049692
Zm00001d003986	2.215025705	1.259924613	1.645784192	4.021939029	4.51287899	4.178529132	3.601295995	3.440471547	3.818562699	1.727817032	2.47485164	1.335026567	5.858225146	6.104414826	5.77710692
Zm00001d003988	0	0	0	0	0	0	0	0	0	1.972652253	0	0	0	0	0
Zm00001d003990	0.124526529	0.17924757	0	0	0	0	0	0	0	0.024534659	0	0	0	0	0
Zm00001d003992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003993	2.681916702	1.800753497	2.938232665	0.897377362	0.627960815	1.087605983	0.458607759	0.732389443	0.841292467	3.389497527	1.614396068	1.11797145	1.014326265	1.628786729	2.322795348
Zm00001d003994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d003995	0	0	0	0	0	0	0	0	0	0.044928242	0	0	0	0	0
Zm00001d003996	0.005557412	0.062996231	0.172669205	0.027723853	0.029290823	0.020425771	0.006493836	0	0.00685383	0	0	0	0.006218923	0.073106764	0.025700507
Zm00001d003999	0	0.163212983	0	0	0	0	0.201893674	0	0.026635739	0	0	0.143548555	0.024168325	0	0
Zm00001d004000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004001	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004002	0	0	0	0.065076984	0.103132765	0	0.12194532	0.125835086	0	0.071965212	0.06580101	0.057802949	0	0	0.030163763
Zm00001d004004	5.114592832	5.281705249	6.59743315	5.078774009	5.589405776	7.156987313	4.163654311	4.354920279	3.916162079	1.470948513	1.864595283	0.402775865	4.692640259	5.314498829	5.352677491
Zm00001d004006	472.5708593	458.5855824	465.2259926	140.1601067	144.3422722	159.35775	102.6050807	96.415929	120.500906	11.85939354	41.6379052	6.879560793	18.63184116	18.56032731	16.35812205
Zm00001d004007	0	0.154035512	0.010856645	0	0	0	0.010207564	0	0.010773433	0	0	0	0	0	0
Zm00001d004008	0.193617829	0.35436251	0.086475978	0.026410973	0	0	0.042420457	0	0.003731008	0.271203265	0.053409627	0.030161397	0.003385384	0.003316417	0.038473984
Zm00001d004009	11.91026511	9.901073598	15.9488012	16.95153797	31.83860531	16.27759853	18.80262336	22.25679567	17.77074279	1.708792167	5.784297025	1.179777573	6.944231797	5.906902509	8.789811417
Zm00001d004010	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004012	1.793180179	2.018438484	2.399660578	5.282779206	6.358105242	5.36249002	3.712200685	3.111307421	3.839631573	0.053551185	0.658791624	0.156409734	2.20807883	1.841920493	1.709949718
Zm00001d004013	0.653799195	0.565362317	0.109147643	0.693689995	0.951481348	0.585801195	0.478903035	0.176492465	0.361036895	0.148039786	0.049221598	0.09728719	1.146572251	1.519013498	1.240998806
Zm00001d004014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004015	0.126585499	0	0.065550346	0.999855641	0.138995805	1.227752741	2.4036213	1.004835881	1.31396815	0.523746819	0.159628376	0.128540199	2.644193783	3.59639025	3.183114931
Zm00001d004016	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004018	0	0	0	0	0	0	0	0	0	0.030758378	0	0	0	0	0
Zm00001d004019	0.32096171	0.458881173	0.37733042	0.508475879	0.651516377	0.531381096	0.537224847	0.512522471	0.385136566	0.430695354	0.514133017	0.30749995	0.553310492	0.59909509	0.3510174
Zm00001d004020	0.016915192	0.009468776	0.051387723	0.037503811	0.108964762	0.142761368	0.14494628	0.106511771	0.071854978	0.119236284	0.087692465	0.102017357	0.021031825	0.057689418	0.134720972
Zm00001d004021	36.60912952	37.73913725	39.44567751	26.15068597	13.62023284	23.85540034	13.76391227	14.64240754	10.71110253	1.89297489	4.322189532	0.919142291	68.62219591	69.6809474	64.72045226
Zm00001d004022	21.46611106	18.0154813	20.2580824	32.14187431	51.5417251	34.31656906	48.25662804	45.41776735	44.70115265	49.16577988	49.56013045	52.33624369	11.16380657	10.74943017	14.63927085
Zm00001d004023	58.4623773	57.56167316	57.89168399	38.55326075	40.33685619	37.21324967	29.79712206	30.24843032	31.05329988	41.90608916	45.83376564	34.72543857	24.11171883	21.06786419	20.55593121
Zm00001d004024	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004025	4.076285343	4.388116644	5.62891047	7.32583752	8.924295797	6.624529326	5.927462435	5.545209739	6.65135953	0.422841469	1.511343888	0.208408796	3.703777334	3.620685166	4.519398864
Zm00001d004027	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004033	16.20758925	18.53540471	19.1382956	15.18177716	12.32140428	13.59052924	11.24426597	10.28384352	11.69573685	6.275351795	9.19107969	7.16308751	7.017683369	6.928188703	6.79118225
Zm00001d004035	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004036	0.372443197	0.679376917	0.542679278	1.193271636	0.92226883	1.447552989	0.667806711	0.650394215	0.601875128	0.159411902	0.01619527	0.042680242	1.968906825	1.999190147	2.182672028
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Zm00001d004040	0.848686586	0.801692922	0	0	0	0	0	0	0	0.012722595	0	0	0	0	0
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Zm00001d004042	1.461635138	1.148854088	1.802866373	5.701664528	4.431061123	6.206872922	1.374041442	6.612310061	5.299377324	9.2910328	8.273471989	8.375665828	2.828510001	3.180496856	2.0074906
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Zm00001d004052	24.44992256	19.95587963	30.17181699	33.51704449	57.11340554	29.49610322	33.01746563	41.78360643	34.767967	3.989296824	13.31099018	2.38324599	14.79128204	13.66961824	18.41793048
Zm00001d004053	0.45667533	0.336336563	0.618060437	0.796398593	1.134630724	0.891390472	0.585630965	0.772305046	0.661052678	0.181476605	0.041483043	0.012861463	0.407095167	0.294858776	0.445202633
Zm00001d004055	13.36211472	13.07583877	13.99699005	7.208497593	16.33082112	7.224135063	7.387680568	8.769642531	7.257750342	8.035849232	9.782005073	5.782514249	8.954611881	7.576561748	8.853682272
Zm00001d004057	0.116618137	0.067791219	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004071	0.040399627	0.10176696	0.120501062	1.037924053	0.958183847	0.692930999	0.179386467	0.233821223	0.378661982	0	0.020378091	0.035802299	0.217000706	0.150577467	0.457733328
Zm00001d004072	0.649174718	0.380484991	0.5671538	1.138281205	3.938149127	1.189054515	1.637289353	2.72027413	3.725622382	2.313646033	1.458944816	1.025288971	1.251503364	1.190777552	0.691086282
Zm00001d004073	0.327120275	0.319055902	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004075	1.78369526	1.436099043	2.644704772	1.999276733	8.746612322	1.279351546	9.840816155	12.92480117	15.00173887	56.22990828	64.2544416	56.92583294	0.79587831	0.915796545	1.279083058
Zm00001d004078	5.145389269	3.975417871	6.48755001	6.195826762	17.82928813	5.720332013	13.36692299	19.4682521	20.8451951	0.978805531	1.966569252	0.579292938	2.027266838	1.62767417	2.267227141
Zm00001d004079	7.283187118	4.04850776	7.155288514	11.08768488	39.35169805	12.11321163	21.39487091	30.41763589	27.89998567	1.767645514	4.976984715	0.946523282	3.187197864	2.587022109	4.421864091
Zm00001d004080	0	0	0	0	0	0	0	0	0	0	0	0	0	0.01643299	0.017330934
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Zm00001d004086	38.52014572	34.81384651	35.05817168	14.80483061	36.28142895	16.90246926	30.72343641	39.17946286	34.31452286	44.44176177	41.80060123	34.38412464	16.84995197	11.49346452	16.56271011
Zm00001d004087	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004088	9.803343665	12.48906754	11.69418178	14.41897083	14.14050656	13.47512482	15.90909688	12.53288972	13.77281467	2.269569549	7.413851229	2.492900825	9.711116453	9.775397291	8.911095693
Zm00001d004089	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004090	1.291007728	1.395674901	1.457391952	2.717024908	3.274602252	2.537248032	1.175406063	1.170739138	1.154323668	0.011128203	0.067833423	0.032773578	0.571852145	0.468800902	0.70275694
Zm00001d004091	3.272222318	3.780838684	3.838404902	7.885271266	9.271837817	8.616630097	7.20568837	7.58599877	7.434146954	2.49549955	4.406131718	2.691735581	8.568584276	9.492201565	9.065098098
Zm00001d004092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004095	1.256051104	0.928281587	0.774061492	2.990576495	0.711253249	1.080999416	1.419176859	0.400532027	0.806535041	0.458129336	1.217393626	0.620953771	2.172231437	3.197657678	1.884216017
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Zm00001d004102	3.241531825	3.16996792	5.68383484	17.50207267	10.51668547	28.68708806	46.47121264	17.06300326	30.44779826	0	0.321086303	0.043393618	4.493127074	5.625450308	10.38247111
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Zm00001d004114	0.184390438	0.132708822	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004115	27.43726068	30.64392915	31.16697771	35.12492625	31.80875093	38.69849559	15.97483695	12.57284458	15.95115519	6.914426418	11.06379599	5.460374682	6.612085059	5.669153597	5.771922127
Zm00001d004116	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004118	6.987023724	7.483366646	7.134567548	10.96792229	8.874627751	11.25069939	7.605646316	6.80284013	8.239553881	6.163336314	5.530905494	5.525983443	6.609515663	7.753765816	7.340913416
Zm00001d004119	26.08528438	24.4822209	25.06848287	20.9540621	26.20258253	24.73084812	22.82034601	23.99627299	26.64649874	22.23837573	27.39379822	22.55868743	16.9502919	17.65952956	17.182789
Zm00001d004120	6.865272565	7.675701249	6.394528704	10.9476145	14.18444652	12.64359649	12.16305373	15.46529581	11.90470214	13.57878955	19.27798306	11.0051297	7.566310937	7.63973617	7.251473433
Zm00001d004121	5.634205495	7.044123973	5.148681744	10.85010811	9.71656493	10.15098917	12.24737499	9.540968724	12.46649458	9.31317071	11.44100104	9.49965185	7.232041698	7.039295268	5.987050026
Zm00001d004123	29.25359612	28.66096389	31.50671853	46.92676796	41.09923398	48.12380683	34.32824195	36.06631554	38.30319762	18.78132937	31.18420238	14.94743659	68.44559219	65.34594422	61.96947125
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Zm00001d004137	9.782604885	9.312299946	11.31265201	17.07191755	17.30157375	16.47140418	15.28205065	15.43309545	13.24747521	0.21644639	2.55079629	0.676088059	9.542080134	6.461183296	8.870608814
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Zm00001d004388	14.23733056	14.90171706	12.20653305	19.55650956	6.116506083	20.04347489	5.490316632	3.310530919	4.258740384	0.62459248	4.390276073	4.23289915	1.171938593	0.620575019	0.589036475
Zm00001d004389	0	0.102113979	0	0.695151478	0.333837219	0.422142693	0.603941204	0.537667483	0.424947651	1.076224005	1.84028206	2.840271495	0.419604404	0.622139107	0.128883568
Zm00001d004390	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004392	1.978196385	3.037637868	4.59707372	31.14317453	15.97859407	26.37697816	10.70266578	11.73022447	9.59155877	3.475727156	4.408211161	2.221374759	54.9777417	60.17034491	61.95439716
Zm00001d004394	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004396	5.991248854	6.389940242	6.782000768	5.560421257	7.429003168	5.506172864	5.731334106	5.968190136	6.451444309	3.372418542	4.618547513	3.052307967	3.560834749	3.651407748	4.139025269
Zm00001d004397	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004400	10.61395376	10.54519182	11.63434486	24.66570689	19.61002082	23.24080903	16.19630847	15.98757898	15.99656769	4.511988871	8.240634486	2.072195636	28.54991562	30.84100735	34.9842929
Zm00001d004401	5.634278303	1.800577676	1.507957492	0.089895448	0.253270388	0.294360846	0.196526992	0.101397868	0.400027611	24.35560779	19.84553831	33.46932942	0.053773461	0	0.013889114
Zm00001d004405	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004407	14.46269644	14.57265575	13.12688684	14.4937096	15.46295623	13.95877276	14.98347889	11.50680886	12.99116307	3.329642418	7.61110223	4.408961428	6.830506175	7.55898367	7.142568136
Zm00001d004409	5.969590588	6.791545823	4.630121288	5.733204535	6.688810398	5.965627143	4.926105099	5.713715026	5.400709198	4.55221538	5.041458407	4.380404162	4.266527817	3.964658473	4.622098031
Zm00001d004410	15.1366037	14.19883373	19.49475283	14.91111081	17.53114642	14.79064653	8.600338527	8.894747293	9.590520753	4.064938771	2.939806384	2.361120197	3.652272533	3.468341623	6.295372164
Zm00001d004411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004412	0	0	0	0	0	0.015062169	0	0	0	0	0	0	0	0	0
Zm00001d004413	44.48052705	36.00942297	50.2298544	38.72411466	116.6320867	45.80352628	86.24745737	107.7610987	84.99455738	15.57310294	13.01418721	2.428628187	171.5152924	149.3999162	146.765311
Zm00001d004414	0.021428266	0.134944904	0.133155562	0.160346425	0.43764071	0.223146745	0.225350364	0.142106864	0.145348474	0.059106224	0.351282507	0.059343152	0.143873509	0.11745209	0
Zm00001d004415	0	0.017481188	0.086246953	0	0	0	0.016218109	0	0	0.478550393	0.070009602	0.076874987	0.031063045	0.106505794	0
Zm00001d004416	0.036231185	0.045633312	0.020012544	0.005020663	0.058348769	0.004932018	0.004704016	0	0.039718311	0.322021012	0.25890256	0.080270526	0.05405848	0.097088194	0.088430633
Zm00001d004417	0	0	0.038659044	0.096986177	0.348390851	0.247711852	0.109043256	0.187535793	0.40280874	0.042900763	0.098065214	0.017229093	0.104426961	0.017049928	0.035963167
Zm00001d004418	0	0	0	0	0	0	0	0	0	0.195822253	0	0	0	0	0
Zm00001d004419	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004423	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004424	0	0.012532001	0	0.049636594	0.039331564	0.04876021	0	0	0	0.027445248	0	0	0.178149051	0.054537433	0.046014009
Zm00001d004425	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004426	0.024326039	0	0	0	0	0	0.028424977	0	0	0.637442748	0	0	0	0	0
Zm00001d004428	16.51842722	16.56696053	16.99064976	10.05108982	9.161952746	7.927730357	9.884602208	8.951509482	10.34550912	7.739914266	12.01746154	5.565100743	7.464954996	6.306874007	7.127577904
Zm00001d004429	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004431	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004432	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004433	0	0	0	0	0	0	0	0	0	0.287765339	0	0	0	0	0
Zm00001d004434	0.05223012	0.016446007	0	0	0	0	0	0	0	0.009004243	0.008232982	0	0	0	0
Zm00001d004435	1.941595447	1.865598475	2.301076285	4.368637965	2.86164482	3.543557238	1.906221393	1.061952319	1.407092402	0	0.997034628	0.044346625	2.34070051	2.007760078	2.094327954
Zm00001d004436	0.028393009	0.143044401	0.123504204	0.123936853	0.130941842	0.104355963	0.016588616	0.034235506	0	0	0	0	0.063545378	0.015562707	0.065652387
Zm00001d004437	5.215832155	5.734405284	6.808695877	85.71883214	45.52083365	83.71501268	9.602440874	6.952705087	8.530479338	0.448515117	0.53628124	0.277115691	31.56288168	26.34017324	26.68044215
Zm00001d004438	6.404962588	7.44381617	6.457433218	1.391494145	0.805810203	0.797850071	0.951889721	1.345320368	1.22919594	9.644739101	10.14611801	12.18117448	1.008236333	1.19240041	1.273748215
Zm00001d004439	1.215220793	1.976992819	1.541744145	5.651815573	2.518603987	3.722029363	2.544140699	2.182656167	2.544674952	2.548901186	2.889273601	2.313723579	11.04895259	10.08839503	11.81045402
Zm00001d004440	2.71613919	2.394691152	2.218268369	10.33172546	4.959349283	10.29192178	1.851388388	1.68430917	1.611071639	0.23189547	0.937835585	0.351028502	20.19061201	22.4448833	20.31428164
Zm00001d004442	0	0	0	0	0	0	0	0	0	0.024841746	0	0	0.010078096	0.029618353	0.041649044
Zm00001d004443	0.606968102	0.50965238	0.754341744	2.919796534	4.862090891	2.573157721	5.775258178	4.333107676	4.467596227	0.930121201	1.142034722	0.971203593	4.851548545	5.692693397	6.3601964
Zm00001d004446	0	0.020947652	0	0.041484598	0	0	0.155472866	0.18048609	0.512786587	0.137626901	0.272649926	0.055271433	0.260559241	0.072928889	0.115370891
Zm00001d004448	0.006649433	0.125624779	0	0.588794777	0.113900843	0.260686881	0.077698623	0.120265537	0	0.119218634	0.033540593	0.04419564	23.08920227	19.79785227	11.15478274
Zm00001d004449	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004451	9.154603385	7.437779816	10.99197854	12.25796237	9.379996196	9.31608533	10.08273732	8.404766123	7.615457329	1.357402998	1.241134235	0.687022816	7.634187545	9.148799671	8.214657752
Zm00001d004452	6.758115634	6.963075431	7.422974724	53.93421086	12.58110601	26.9783829	4.105400274	9.083238736	2.281191017	4.674529433	3.752895691	2.26650473	48.92529401	72.54423463	84.23792963
Zm00001d004454	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004455	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004456	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004457	2.342083899	1.543533142	3.350745669	4.109702303	3.516649244	4.304059852	3.94597566	3.67779358	2.922025499	0	0.068684719	0.030168073	2.011363114	1.612135223	1.511312708
Zm00001d004458	1.227633886	1.228222909	1.196248425	2.133239169	2.029261747	2.462880233	2.017136614	1.917852192	1.802025819	0.156688799	0.362148587	0.069918617	0.9005379	0.944464466	1.131071501
Zm00001d004459	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004460	0.157944607	0.173354869	0.143014216	0.816066887	0.740295466	0.721492571	0.806783315	0.954946868	0.692894096	0.133810872	0.045525307	0.079983483	0.775153453	0.69505119	0.868680544
Zm00001d004461	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004462	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004463	15.4330858	16.48830396	15.60973031	12.30337809	12.15348861	12.69534578	11.61708506	10.33698219	12.35572983	11.08687586	13.68661005	11.86660532	11.09436814	10.47803439	11.06832686
Zm00001d004465	4.196268112	2.876053509	6.892085693	7.803873852	13.3443209	9.083043457	9.997267808	11.94314173	9.820007753	3.762797103	5.553405402	1.938216873	6.902599451	5.981750873	7.131472691
Zm00001d004466	15.9691799	17.39256614	14.78449377	9.507551711	11.02186238	9.753101452	11.05715292	11.67919329	12.81017016	10.49423663	13.87160319	12.56195822	6.913997799	6.444908342	6.126709702
Zm00001d004467	0.360909026	0.345470353	0.40368492	0.009002202	0	0.008843259	0	0	0	0	0.036409429	0.031983891	0.169624892	0.015825646	0.066761614
Zm00001d004468	0.084470552	0.151402538	0.173621183	0.652347279	0.603601175	0.589085446	0.447963584	0.17236536	0.280472816	0.089614475	0.114713928	0.035989478	0.301753714	0.249306575	0.360588868
Zm00001d004469	4.424112834	3.273278946	3.3350347	4.763796361	3.121764669	4.916632952	5.02833064	3.468864988	4.680966243	3.584262051	3.627840646	5.543563414	2.083091654	2.835715078	2.431663395
Zm00001d004470	0	0	0	0	0	0	0	0	0	0.02992839	0	0	0	0	0
Zm00001d004471	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004472	65.3787786	71.20813123	77.98631294	107.5585645	72.98244551	118.0575921	90.84414276	74.03387337	82.90691324	25.74014009	30.7322411	40.06493939	57.18848567	58.13974202	58.05658925
Zm00001d004473	62.33333559	70.20622117	75.78295289	177.7048117	111.7451329	154.6151392	118.3188334	98.56314061	117.0621478	16.26169302	19.21418332	10.43094589	87.86816352	78.15353464	72.93191421
Zm00001d004475	0	0	0	0	0	0	0	0	0	6.284961829	0	0	0	0	0
Zm00001d004477	7.64198303	7.267746956	6.978302579	7.999186846	8.24660306	7.694812328	9.880540385	10.17786585	8.603560002	8.652025374	10.97082291	9.014507449	6.655862551	6.560817824	6.397590599
Zm00001d004478	158.953392	154.4081883	163.0634028	171.8333354	119.2096138	155.4360501	122.432977	98.52771587	110.5179641	25.16872156	42.31203109	27.03413511	213.14886	221.7278903	192.1709198
Zm00001d004479	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004480	34.88624577	42.17427042	26.18079401	23.20459326	15.81369067	19.47063779	12.75199634	8.17928057	9.266797371	2.302886777	5.75288829	4.161812294	20.10332873	15.6569656	13.18587375
Zm00001d004481	1.705573043	1.890842028	1.295366843	2.149274177	1.381179368	1.407551065	1.557001652	1.381733017	1.164928511	0.18785461	0.448079651	0.213208623	1.729660595	1.587305089	1.632959142
Zm00001d004482	11.53510362	8.878531258	13.80490293	17.09457137	19.98412187	14.96081334	20.71736667	21.93626685	19.71440085	10.36036676	12.52583911	2.800131376	14.10335055	10.65473976	12.1836468
Zm00001d004483	0.304651452	1.422923217	0.520604867	1.519792302	1.689321717	0.917547629	2.744052772	2.387711988	2.285628373	0.280109719	0.736335906	0.267170917	1.193201651	1.349793881	1.086007514
Zm00001d004484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004485	0	0	0	0	0	0	0	0	0.056769101	0.158711157	0	0	0	0	0
Zm00001d004486	0.012854945	0	0	0	0	0	0	0	0	0	0	0	0.014385096	0	0
Zm00001d004488	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004489	1.886291566	2.088930969	2.540250925	6.343741124	4.147573072	4.743560276	4.43555917	4.337628396	3.529093237	2.738428477	2.768982948	2.38066172	6.593864456	6.158643744	5.826747465
Zm00001d004491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004493	0.553043443	0.222899284	0.522366255	0.855267421	1.078499489	0.758860356	0.516985014	0.800213409	0.518362519	0.122038094	0	0	0.024754935	0.121253129	0.025575748
Zm00001d004494	0	0	0	0	0	0	0	0	0	0.008692893	0	0	0	0	0
Zm00001d004495	1.496850429	0.97755708	2.742205435	6.347143534	5.449447211	9.440913896	3.161281602	1.35030334	2.625467328	0	0	0	0.781677724	1.203326669	1.256260813
Zm00001d004496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004497	0.633075897	0.423913674	1.145325159	8.63502156	3.009348801	8.757459475	0.402648294	0.077300803	0.395320586	0	0	0	8.546024564	7.528582591	6.086997966
Zm00001d004498	5.759065872	5.145898994	6.413893193	7.87697907	7.544823472	7.933799433	6.536185555	5.803943498	6.004336965	2.171030372	3.653780535	1.429232978	5.213661841	5.050027762	4.895690127
Zm00001d004499	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004500	0	0	0	0	0.011037902	0	0.009788503	0.010100733	0	0.323490682	0	0	0	0.009183141	0
Zm00001d004501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004502	0	0	0	0	0.007668734	0.057042596	0	0.007017623	0	0.008026771	0.014678471	0	0.02605117	0.031900568	0.026914963
Zm00001d004503	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004505	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004506	5.580714457	4.736887952	8.726201705	19.9060497	9.511475999	24.44091328	1.470783657	1.014846357	1.281130311	0.135947594	0.583267742	0.025198623	10.91177758	9.500838323	7.521567807
Zm00001d004507	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004508	0	0	0	0	0	0	0	0	0	0	0	0	0	0.150244478	0
Zm00001d004509	0	0	0	0.017806966	0	0	0	0	0	0	0	0	0	0.00782605	0
Zm00001d004510	0	0	0	0	0	0	0	0	0	1.99793515	0	0	0	0	0
Zm00001d004511	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004512	4.661404649	5.745248053	6.496668319	3.961486135	3.272853586	4.013917687	2.007553791	2.079619397	1.75749173	1.515370728	2.426848935	1.453210611	3.688642048	3.715696702	3.087253112
Zm00001d004513	3.042164126	2.060309857	3.799208635	8.917414245	5.12034357	6.474759255	5.647844357	5.301424666	4.965928592	1.602716308	2.856198463	1.664487071	76.60042666	78.09084872	68.51181994
Zm00001d004514	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004516	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004517	10.64219497	11.20354382	10.95663319	8.03405979	6.733688987	8.032796512	6.810690253	5.711091832	7.154089757	3.328937814	4.615593267	2.967508015	3.214688022	3.298850169	3.30298012
Zm00001d004519	0	0	0	0	0	0	0	0	0	0.173978182	0	0	0	0	0
Zm00001d004521	6.23870393	5.657346515	6.565656974	2.698336745	2.172734016	2.586357664	1.210896732	0.903370241	1.044871284	0.082082728	0.088296361	0.058173006	0.148871931	0.27632672	0.3116639
Zm00001d004523	0.107647511	0.569446242	0.053513858	0.456461241	0.567365554	1.186946372	0.704402259	1.090306522	1.062073889	0.059385466	0	0	0.048184409	0.566433513	0.547602938
Zm00001d004524	23.26104447	21.20001097	26.50617639	0.019135993	7.177237932	0.545145715	9.233491614	7.400402346	8.117981442	350.4977198	204.672601	367.0343211	0	0	3.228572162
Zm00001d004525	4.690409408	3.640513624	2.988602622	3.26631607	7.309697884	3.617019131	8.824831557	10.4383951	13.03731768	54.79803709	49.47979246	65.11394438	3.596837714	3.9672706	3.77115335
Zm00001d004526	0.583528277	0.404225813	0.688950127	0.467840027	0.472314526	0.995756331	0.623408271	0.864425656	0.637406235	0.034490644	0.110377182	0.170835909	0.4664192	0.612269152	0.563804882
Zm00001d004527	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004528	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004531	0	0	0.12312065	0	0	0	0	0	0	0.204944407	0	0	0	0	0
Zm00001d004532	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004534	0	0	0	0	0.012775785	0	0.011329672	0	0	0	0	0	0	0	0
Zm00001d004535	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004538	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004539	0.377137487	0.158335354	0	0.235174757	0.041411164	0	0.146895052	0	0.50387471	0	0.396318726	0	0	0.034452613	0.181676001
Zm00001d004541	2.40266015	2.023590297	2.667401525	2.902091785	4.185752293	2.677348323	3.232629088	3.326909758	3.706944223	1.289769805	2.272373649	1.198242012	1.691338148	1.59531782	1.806701147
Zm00001d004543	20.79873528	19.84702366	20.23093236	19.07198749	31.76072592	20.81318872	25.40948531	30.5099255	28.00990064	23.59308666	30.0031342	21.97812861	10.44768241	9.534358099	12.17585638
Zm00001d004544	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004545	1.399921554	0.836263596	1.103547176	1.406713841	17.33925902	3.743808353	12.00215953	13.88007383	12.46033601	20.28913658	19.06573672	17.20024988	1.611315947	1.736339126	2.136420473
Zm00001d004546	4.563174399	4.630117608	4.909672706	2.474840713	2.699066099	2.240686573	2.820974551	2.38169203	2.695412104	2.459332889	2.72147695	1.914572846	1.647536126	1.944786635	1.670447028
Zm00001d004547	0.055528976	0.032638177	0.059810032	0.143123549	0.23901407	0.222233272	0.549364823	0.374949711	0.424592293	1.179387638	1.377135134	1.299963739	0.240269668	0.28407313	0.350954939
Zm00001d004548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004549	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004550	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004551	3.796489561	3.928363179	4.249166036	4.209732211	4.90997146	4.695685894	3.720864677	4.043782862	4.028596645	1.11460739	2.059629839	0.750517576	2.466721915	1.814341682	2.391852977
Zm00001d004552	16.4982364	16.8624782	18.78337733	18.62802297	18.61147242	16.69899754	19.39773167	18.24837876	18.98427274	15.01242067	19.40721099	14.53617995	14.17663066	14.61305565	14.26426243
Zm00001d004553	1.49885683	1.319511336	1.360025455	2.2444647	2.713012505	3.285015673	3.296779704	3.308135661	3.537106948	1.180218553	1.654660751	1.206494017	1.857183581	1.864832639	2.050678197
Zm00001d004554	1.835281049	1.735685124	1.576617052	2.232664733	1.951571812	2.635049521	2.656202281	2.135284485	1.556591101	1.083512025	2.135696837	1.148489861	1.549311444	0.981242229	1.444337043
Zm00001d004555	0	0	0	0	0	0	0	0	0	0.009794746	0	0	0	0.023356187	0
Zm00001d004556	13.01416686	8.75631328	18.2814123	13.56083279	7.875825558	21.65701737	1.312661021	1.55898941	2.300336781	0.146161903	0	0	0.40321759	0.255590316	0.4901027
Zm00001d004557	0.903164463	1.065916158	1.064254059	2.190197991	1.829153506	2.1802149	1.895717132	1.415713989	1.691405292	1.905326084	1.818052761	1.104238564	2.987091435	3.182925778	3.012656619
Zm00001d004558	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004559	3.887935902	2.944876096	2.888055006	6.103996489	7.367591867	7.303655292	4.154543762	4.088768258	4.234946728	5.588915454	4.46324946	4.520737768	11.33188864	11.20685212	8.863902715
Zm00001d004560	0.039493213	0	0	0	0.008673017	0	0	0	0	0.009077942	0.008300368	0	0	0	0
Zm00001d004561	0.488258354	0.642916077	0.827466709	1.928293023	2.290723072	1.785486488	1.772100419	2.060549528	2.171418113	0.183651482	1.110142795	0.065560054	0.645718009	0.462257869	0.915163361
Zm00001d004562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004564	8.954611749	8.89041978	7.938017706	31.33881498	23.90724067	28.69043215	28.30076484	23.11009253	28.09592921	6.354391217	12.25893838	5.441061097	19.42739016	19.00869059	20.82907321
Zm00001d004566	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004568	222.609824	200.54187	212.1696716	72.45608208	91.87971947	75.91817681	82.44300274	74.71821806	78.71021589	90.20025619	111.1206012	70.03955195	53.94212263	45.53804434	47.07325604
Zm00001d004571	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004572	0	0	0	0.155709314	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004573	25.09676083	27.50072915	26.77373858	20.45037668	20.88984377	18.65090679	17.37436157	16.97845306	18.13345781	12.75829139	18.829708	12.14168425	10.907381	10.22736245	9.601916957
Zm00001d004574	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004575	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004578	2.479050418	1.469352082	3.216896354	4.819514688	1.393071556	6.610324149	0.212997826	0	0.044961128	0	0	0	0	0.039965031	0
Zm00001d004579	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004580	0	0	0	0	0	0	0	0	0	0.249733583	0	0	0.014473557	0	0
Zm00001d004581	0.156370323	0.225084571	0.138812498	0.501475585	0	0.259994698	0.078308024	0	0.151523409	0	0.014084857	0	0	0.012244188	0
Zm00001d004582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004583	271.0931501	274.79162	312.6806397	265.2248649	139.3630125	252.8815997	51.59831056	25.68498947	57.29058459	5.310549142	12.16145486	7.161292429	13.36152407	11.30793518	5.350287806
Zm00001d004585	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004586	3.431033831	3.931141233	4.433160135	10.04725323	6.373061388	8.934722228	8.309741055	7.135037172	7.782450636	1.276795728	2.577879143	0.89158412	8.735987776	8.08579404	7.147127845
Zm00001d004587	0.476903509	0.200220578	0.414887959	0.812856936	0.23040979	0.19475735	0.297206269	0.153343221	0.117630858	0	0.461066146	0.123268148	0.302413193	0.331105636	0.367577025
Zm00001d004588	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004590	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004591	66.52038616	68.79597644	60.00931924	32.97289234	35.13955849	35.99508965	32.47784426	28.20227765	29.74534602	12.82875909	25.25980158	13.48411358	21.03994283	18.25548844	17.94198041
Zm00001d004592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004594	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004595	0.061188387	0.027523929	0	0	0	0	0	0	0	0.024111107	0	0	0	0	0
Zm00001d004599	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004600	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004602	0	0	0	0.552551802	1.000769796	0.310169114	0.96144852	1.144749738	1.951437847	12.04617684	10.29603024	18.57990146	0	0.069383735	0.146350112
Zm00001d004603	0	0	0	0	0	0	0	0	0	0.462129546	0	0	0	0	0
Zm00001d004604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004605	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004607	0.093273526	0.067130486	0	0	0	0	0	0	0	0.018377081	0	0	0	0	0
Zm00001d004610	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004611	0.232503978	0.878518863	1.936009411	2.667713656	2.818494528	3.218795802	2.417960014	1.822254685	2.5520028	0.705454899	0.674348444	0.180290149	0.572394718	0.356830636	1.236509107
Zm00001d004614	0	0	0	0	0	0	0	0	0	0	0	0	0	0.217201257	0
Zm00001d004616	22.1994051	21.91085889	23.87339096	22.10388461	24.33904316	22.13667349	24.58584263	25.30067779	25.14222664	53.53762834	43.56150245	50.49573117	23.45426341	22.27958721	21.99989992
Zm00001d004617	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004619	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004620	11.2368974	10.16704123	15.10279978	20.49906465	29.88195968	19.31399211	18.921762	20.32371073	18.82987411	7.238449627	16.68730482	6.82791154	15.15689651	14.64530524	14.69129968
Zm00001d004621	0.050580675	0.100110289	0.008980259	0.207269507	0.447490089	0.309841239	0.211083998	0.322369271	0.240608573	0.119587012	0.200463542	0.008004425	0.315350655	0.293083937	0.392639095
Zm00001d004622	0	0	0	0	0	0.19939443	0.06339221	0	0	0	0	0	0	0	0
Zm00001d004623	0	0	0	0	0	0	0.019649246	0	0	0	0	0	0	0	0
Zm00001d004624	0.018083643	0.056941037	0.157320831	0.575104937	0.011913926	1.118824303	0.496572313	0.021804757	0.133812881	0.012470162	0.057010134	0.020032239	2.145034753	2.805085275	1.547129753
Zm00001d004625	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004626	0.02630095	0.119254119	0.052299037	0.013120562	0	0	0.006146532	0	0	0	0	0	0	0	0
Zm00001d004630	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004633	0.946470041	5.143615311	1.916893819	2.131271236	0.450346408	1.438707504	0.153604201	0.042267683	0.216159269	0	0	0	0.970869503	1.133623481	0.688971295
Zm00001d004635	0.513397778	0.829633874	0.593910289	0.628206543	0.472257452	0.747658473	0.490488617	0.805921119	0.250875448	0.204847599	0.264664903	0.325493127	1.000873472	0.92384918	1.519358883
Zm00001d004637	0	0	0	0	0	0	0	0	0	3.990451955	0	0	0	0	0
Zm00001d004639	4.693721991	4.659706196	6.826827788	8.601772364	9.668606546	10.40856862	9.089131367	8.229840994	11.96913087	1.385141512	3.566868534	0.942266056	7.2134841	6.246408549	6.161186114
Zm00001d004640	1.096391605	0.690454642	0.01792893	0	0.012672428	0.070696302	0	0.01739472	0.011861008	0	0	0	0.021524516	0.021086017	0.011119108
Zm00001d004641	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004642	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004651	10.57868773	9.943590382	9.854068917	11.8934917	9.199901713	12.91026777	12.80693206	13.33864448	12.18117257	6.519825873	7.524724152	5.455596078	28.11975586	29.04035993	28.13072283
Zm00001d004652	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004655	1.803913742	1.455124201	3.652548873	17.54309548	31.72788928	13.62030982	21.83661922	28.45971743	25.60934523	25.87130692	34.47972916	25.05725682	8.630241924	8.26556242	9.162449991
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Zm00001d004661	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004667	12.59025263	12.07842278	13.65684352	5.145481231	7.33804034	6.188754502	6.246515475	6.185437588	7.174570477	4.896763662	5.469391327	4.768552557	3.241737042	3.461006285	3.41419218
Zm00001d004669	14.72183911	14.52198208	13.24965022	10.01872517	9.387353758	10.96521204	10.74256243	9.441297721	11.10730643	6.828167368	8.437892265	5.910865768	9.414262035	9.732391617	9.513157909
Zm00001d004670	0.014559355	0	0.018094409	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004676	4.290688058	5.257551478	5.727835389	7.392922698	7.054234318	6.178737734	7.525036701	7.755711958	8.104868488	2.557501493	4.128957351	3.205931299	6.433726085	6.600354188	7.014838274
Zm00001d004677	0.524772712	0.603974451	0.438540927	0.541633458	0.560325114	0.50990078	0.771782328	0.436383752	0.513288854	0.187176229	0.205372311	0.170386719	0.5973623	0.505844621	0.491643393
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Zm00001d004682	0.105001797	0.013225015	0	0.929771169	1.093006644	0.231554822	0.17177244	0.088625786	0.129496336	0.13033331	0.158892761	0.151211093	0.094000306	0.34531997	0.145675687
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Zm00001d004982	5.170649365	4.489203651	4.023496221	4.202939938	6.175250704	4.642463553	3.321786122	3.498379984	3.175113487	0.24663585	0.427691724	0.112711839	1.297305977	0.78753825	1.286851186
Zm00001d004983	0.794839181	0.38663284	0.572259254	4.272797185	3.820902165	3.693673887	1.646164032	1.896961394	2.095722185	0.559447284	2.191273886	0.534364387	1.975193672	1.850826425	2.85189071
Zm00001d004984	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004985	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004990	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004991	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d004992	5.848010472	6.713768632	6.689063374	11.60702417	10.67193129	8.379849706	7.952142809	9.745034235	9.5311918	1.689207406	3.404465371	0.821713588	7.258365557	7.195596705	6.322324828
Zm00001d004993	2.415329492	2.265764944	2.023390292	2.953803016	2.851495023	3.057609272	2.68922151	2.75480476	2.611072613	0.845489842	1.668646535	0.653126577	2.582872035	2.423755261	2.513592755
Zm00001d004994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d004996	0	0	0	0	0	0.016566896	0	0	0	0	0	0	0	0	0
Zm00001d004997	2.766680337	2.847133741	3.206359138	5.822308193	9.83574686	5.755632754	7.235188553	9.308765805	7.648401804	6.818121782	9.134277639	4.62714473	5.521115724	4.568253027	5.6985009
Zm00001d004998	1.04413701	1.455371167	1.159239851	0.868134923	0.926374485	1.048952776	0.699509154	0.37769747	0.815549992	0.086402225	0.122891092	0.030843936	0.490737594	0.297601111	0.563343607
Zm00001d004999	8.669562974	10.47137345	9.144561089	10.06375881	9.255900163	8.442651971	5.766526508	4.583466267	6.4974313	0.459875256	1.794067208	0.492499919	7.288577358	4.922522135	5.885416201
Zm00001d005001	8.696558944	13.42742611	7.890675421	4.247373281	4.142866425	5.841334339	4.128727877	2.940499505	4.927623624	2.868492365	2.308362651	0.65347159	0.782621539	0.906679978	1.631204804
Zm00001d005002	0.026978261	0.076453245	0.226318472	1.354256217	1.021999742	1.090718028	1.213677795	0.813241057	0.748612762	0.334867231	0.408245437	0.156897791	10.82295034	12.24385021	10.39425135
Zm00001d005003	0.220503773	0.21821275	0.195744813	0	0.020753291	0.115777411	0.05521257	0.208903639	0.116546703	0.086888873	0	0	0.158625516	0.569777951	0.254932453
Zm00001d005004	9.778131131	11.09832034	8.171075837	5.907858401	6.899432527	6.843073899	6.023038424	6.264398831	5.858899063	2.828545715	5.155366076	2.030642714	5.961001461	5.894278373	6.205866471
Zm00001d005005	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005006	1.911294502	1.464302411	1.739915158	3.332602217	5.726577658	3.557139817	6.344414318	6.539446588	7.086482327	1.746133651	3.008916703	0.741710141	2.159234314	2.382154297	2.779739879
Zm00001d005007	1.378808207	0.70641927	1.452192287	0.757785328	1.139337922	0.458095922	0.245766722	0.11271382	0.63406719	0	0.029469854	0	0.679935544	0.409897756	0.594406608
Zm00001d005008	0.529751181	0.561388109	0.721943696	0.241490915	0.789490229	0.237227152	0.230529448	0.259908973	0.15319465	0.27712953	0.861532516	0.449231788	0.441540185	0.428540053	0.456180573
Zm00001d005009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005010	1.40709776	1.067374731	1.132709984	2.911490998	5.0143834	3.291057542	2.466290617	3.065519298	2.662172052	0.948257399	1.814722587	0.63765779	8.4097291	8.483804868	8.947383674
Zm00001d005011	0.272585952	0.026409463	0.156355673	0.366107942	0.110514456	0.4367105	0.245012837	0.151696898	0.387893167	0.925393153	0.343739631	0.812964782	0.5631368	0.298818293	0.775745378
Zm00001d005012	1.436674254	1.468299098	0.64686655	0.5789048	0.433150726	0.538851073	0.471260357	0.524828823	0.44295445	0.12803607	0.264844853	0.178704607	0.514322835	0.363702694	0.436362172
Zm00001d005013	0.609763247	0.674690768	0.467437634	0.433539126	0.319128343	0.27228685	0.382890006	0.388231924	0.263553923	0.102173202	0.172470509	0.123099318	0.353926432	0.315480525	0.260245759
Zm00001d005014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005015	0.36132526	0.23995681	0.138799157	0.45062919	0.94354173	0.56340185	0.660180672	1.275342524	0.834513968	0.443964146	1.201239964	0.64041556	0.727802222	0.568939956	0.782315542
Zm00001d005016	0	0	0	0	0	0	0	0	0	0.186550104	0.067010074	0.021405474	0.010811696	0	0
Zm00001d005017	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005018	11.37744112	13.95529052	9.924245632	24.41241898	78.39419234	39.0556123	73.40404157	81.47016243	79.688426	31.01983671	47.13912763	34.40750743	23.5495249	19.53938868	20.92451439
Zm00001d005019	12.93243668	12.0308937	13.9026219	15.73326918	21.76540377	15.4298658	22.03818954	22.79157918	24.61802266	46.93775469	41.18582994	46.25924442	10.84118488	11.65561849	11.30943525
Zm00001d005020	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005022	0	0	0	0	0	0	0	0	0	0	0	0	0	0.014396625	0
Zm00001d005023	76.33870216	58.89889192	75.64070026	112.2946312	231.0367748	99.10839932	142.7728716	180.9964579	157.7411386	25.64601874	51.21821065	13.85693145	47.88069596	45.46357576	55.01978429
Zm00001d005024	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005026	2.42874435	2.587655225	2.50588354	6.505735214	9.459790475	7.541787989	9.049432774	10.94048196	10.60605379	27.11311466	29.25961374	20.17839578	7.119380971	6.3464023	7.832265534
Zm00001d005027	12.04109681	11.71511066	13.60840952	16.04788869	19.73461883	15.84286647	18.86140568	20.0851962	20.66162056	27.92336748	31.57186957	25.24062086	19.85132457	20.21778069	21.13248688
Zm00001d005028	0.043958952	0.055366462	0.081948471	0.41117773	4.32969698	0.350062247	3.929501693	4.783655175	1.639960758	35.51205522	14.59290788	47.98964345	0.848553	0.277088741	6.695870547
Zm00001d005029	5.407235131	7.337165465	4.707017576	7.448889386	7.939756582	7.454482333	11.96220018	13.75711999	11.54296085	6.08457959	6.803841428	3.190692874	22.58859542	23.01949637	26.16369236
Zm00001d005030	29.47322489	28.82850441	33.61676523	16.88198079	13.79803644	15.41498425	17.14488049	15.00466251	16.41968197	22.97924638	38.83752477	37.31752655	11.37487731	11.64579038	10.94908165
Zm00001d005031	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005032	0	0	0	0.040070905	0.028223825	0	0.112631048	0.135594329	0.079249932	0.044312304	0	0	0.431451462	0.581160119	0.272407259
Zm00001d005035	0.542970993	0.439633269	0.692020385	1.478717875	1.679103123	1.170911973	1.311004856	1.369524306	1.393931628	0.680074897	0.492567559	0.242432711	0.880402863	0.980904641	1.348378294
Zm00001d005036	3.460222842	4.517184262	3.819831504	4.576236073	4.185037329	4.480936649	3.711325756	4.400596395	3.6056489	0.386348303	0.442813261	0.078672065	2.891933646	2.975751241	5.519489929
Zm00001d005037	9.270910472	7.467194482	9.225881072	13.11229281	74.57825041	19.48578395	39.46608981	52.85537365	52.75613927	19.78141548	39.01207685	9.674537724	8.72054924	6.130999104	5.281548996
Zm00001d005038	5.20708524	2.628647651	4.991085241	0.184041926	0.208332957	0.012913749	0.049267038	0.101677078	0.298989768	4.957221242	4.306643118	3.876585717	0	0	0.048745758
Zm00001d005039	4.229537994	3.641094637	4.30075822	12.41465495	13.88568092	10.74735979	15.70858967	17.10256108	14.82312188	37.78833299	27.96090537	22.55880489	7.601466905	6.057200041	11.01467529
Zm00001d005040	0.035882504	0.011298537	0.078041042	0.078314429	0.224582198	0.197824395	0.094339588	0.086532264	0.044253079	0.655714521	0.520363367	0.655858652	0.020076837	0.088505236	0.09334141
Zm00001d005043	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005044	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005045	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005047	1.18880295	1.105151265	1.74127777	5.17153186	3.282027654	4.195952357	3.075900282	2.081880269	2.670439667	0.03903703	0.321239713	0.047032213	4.956983509	5.33694516	5.890364746
Zm00001d005049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005050	0	0	0	0	0	0	0	0.02073509	0	0	0	0	0	0	0
Zm00001d005051	2.637029121	3.627462953	2.733606761	5.577300016	6.853271564	6.14134845	93.47764589	100.9211369	84.57188174	0.083799491	0.390770264	0.215386631	24.34849184	27.80900087	28.08517185
Zm00001d005052	5.254129504	5.090190481	6.16250077	3.751795313	4.02572744	4.142440439	5.487416208	5.409306823	5.192015487	0.605764153	0.581745279	0.306008739	3.879506957	4.281967628	3.826098779
Zm00001d005053	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005055	0	0	0	0	0	0	0.186840198	0	0	1.019928016	0	0.531381492	0	0	0
Zm00001d005056	0	0	0	0.014585261	0.061638516	0	0.054661546	0	0.014422945	0	0	0	0	0	0
Zm00001d005057	0	0	0	0	0	0	0.011467938	0.011833737	0.012103678	0	0	0	0	0	0
Zm00001d005059	35.89998742	39.96187736	31.29776512	45.08568413	39.3886872	41.54684052	46.70942258	37.42363599	35.85574519	11.3044951	18.94456707	8.544543061	30.43966475	29.75919605	30.14065818
Zm00001d005060	0	0	0	0	0	0	0	0	0	0.060822211	0	0	0	0	0
Zm00001d005061	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005062	7.610338466	9.268039765	7.97478635	17.63740041	15.78466866	17.5875949	22.79469125	18.14141803	23.43038358	17.38243748	19.26970847	25.69145453	13.83425123	14.57875362	14.12205315
Zm00001d005063	3.560710193	3.998652886	3.35740669	4.590604995	4.408717435	4.496171822	3.063084581	2.827150777	4.175817146	2.063743791	3.287281768	3.258762448	2.167464305	2.247035209	1.873125531
Zm00001d005064	6.300811952	6.045318755	6.64657239	7.712371388	8.278557248	9.602395281	7.425515925	6.296800925	6.573458801	6.049430715	8.738945162	4.769332304	3.88247219	3.438805692	3.72023716
Zm00001d005065	12.88319329	12.26267274	12.57396542	10.18952139	9.787372294	9.804066189	8.239902881	7.18472011	6.520951995	0.757280637	1.654103779	0.675836631	5.188649077	4.330535874	4.866943991
Zm00001d005071	0.075489972	0.03803196	0	0	0	0.009248554	0	0	0	0	0	0	0.447721224	0.074479282	0.209464103
Zm00001d005072	2.749960846	2.797257915	2.46722462	0.45728425	0.400307918	0.38503752	0.269307596	0.075790327	0.077519186	0.028896376	0.066053121	0	0.580289818	0.287105109	0.327016801
Zm00001d005073	0.182948386	0.251371821	0.372058024	0.497815179	0.482122676	0.957675438	0.660759679	0.28075614	0.307671952	0	0	0	0.781677724	0.674592224	1.038338019
Zm00001d005074	0	0	0	0	0	0	0	0	0	0	0	0	0.012942935	0	0
Zm00001d005075	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005076	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005080	9.675842302	9.574992977	9.022166731	17.27926778	12.76330596	20.43653797	15.66111922	11.70519918	15.20923428	0.492078407	0.534569444	0.262189395	21.63143778	24.24622678	21.93618001
Zm00001d005081	1.967572128	2.093621628	4.932769284	5.901981884	7.844743886	4.592503973	6.956783832	6.933263425	5.334252933	0.818760536	1.604205761	0.244264073	3.245722092	2.212704116	3.235681131
Zm00001d005082	0.051227106	0.177432006	0.103455947	0.439231543	0.573743433	0.572686954	0.665929971	0.193025717	0.355371913	0.052987969	0.072673902	0.028373532	0.988852396	0.765138478	0.621868016
Zm00001d005083	0.097008249	0.008727303	0	1.019726329	0.520420583	1.748768991	0.089063967	0	0.076910191	0	0	0	3.101581296	2.840899962	2.619615077
Zm00001d005085	4.7612391	4.926961835	4.216337495	9.282660707	11.82325379	9.347275622	10.49084978	11.66125153	12.4463742	5.979056607	8.089132625	4.693526954	6.983630009	7.10108754	6.62363769
Zm00001d005086	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005087	0	0	0.013961093	0	0.14801854	0	0	0	0.041562259	0	0	0	0.100565652	0.135460767	0.038962561
Zm00001d005088	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005089	1.926301076	1.691396381	3.707299585	6.671805608	14.25734362	7.363145045	8.656252227	10.08707015	8.94606985	1.047493638	1.665687399	0.268257806	2.906970805	2.389213822	3.576033165
Zm00001d005090	7.716644476	7.971110512	7.844277338	10.89233918	14.25779472	11.82941318	12.82478512	14.01317236	13.64691615	9.371145498	12.28967704	7.65508653	7.772987952	7.32563795	7.580418702
Zm00001d005092	8.061008338	7.289239878	7.706342222	6.536512213	7.684096383	5.824212254	6.038005326	7.832758465	6.582119776	3.105151227	4.607847175	2.085213278	4.840685826	5.810250891	6.921443622
Zm00001d005094	15.47088775	17.72124332	18.26145378	22.03642002	14.12006091	18.59065975	12.46204558	13.36506022	13.50599329	12.73445145	11.94025026	10.69281051	23.45701345	25.73664313	23.71462903
Zm00001d005095	0	0	0	0	0	0	0	0	0	0.119083487	0	0	0	0	0
Zm00001d005097	0.018753407	0.165339901	0.04661358	0.444380285	0.148262192	0.137852939	0.723140767	0.655757875	0.878869786	0.724193133	3.074324274	0.99716033	0.356756304	0.22613958	0.498674455
Zm00001d005099	1.968216804	2.469060442	2.025375468	7.80586528	6.193073556	6.250180031	14.38333289	12.39296244	13.35046451	0.787203684	1.270776082	0.109015063	23.3685017	23.59582392	21.98159294
Zm00001d005100	22.07228527	24.0175972	23.12180126	10.77218384	9.619918309	10.17761472	9.505543813	8.695048143	9.70751627	8.857019233	9.12265462	8.290659966	7.391639087	7.485253794	6.550029025
Zm00001d005101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005102	8.910466968	9.893386092	8.008595578	7.364620312	7.963866594	8.289493271	8.334697538	7.676195885	8.461041202	8.266729557	8.973696273	8.049101686	5.688002038	5.961870003	5.266463184
Zm00001d005103	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005104	0	0.031165556	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005105	7.158969003	8.44145323	8.239593961	10.37223368	9.86203514	10.28883175	6.330749144	6.592667891	7.378875164	2.432486053	4.722000619	1.883653346	7.145733457	6.489525203	5.76705614
Zm00001d005106	23.2076366	25.12855763	23.42155128	22.13988406	21.28910294	22.84704606	22.48206948	23.60265823	20.44178907	17.94840061	20.80387505	15.09142016	22.58675745	22.41482792	24.51006172
Zm00001d005107	10.31433127	10.51834287	9.72755186	11.42212997	11.26145971	11.94581699	11.93313038	12.16347595	12.55622881	12.93196663	14.53564214	16.52512757	7.801436163	7.844358848	7.883255211
Zm00001d005108	7.788252356	8.615253355	7.576065268	9.521820168	9.619459628	10.456284	9.576874613	9.954145459	9.864900757	10.73812574	9.261012682	9.817206304	9.053563861	8.951966159	9.639692084
Zm00001d005109	1.051633379	0.063073149	0.373420874	2.061009547	3.497195551	3.926536471	1.521413043	1.690707305	1.667514362	4.903651537	2.273388736	1.553268976	0.8966183	2.195880835	4.16856582
Zm00001d005110	18.94083161	19.0186112	19.63300833	22.73831185	35.50055131	24.63354802	34.66112197	40.61832414	39.68402235	16.47437737	23.51021666	14.67585932	17.61379849	15.92669983	16.74411697
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Zm00001d005114	3.532780631	4.475878977	7.975733143	19.29224116	11.7062522	18.61868358	9.135457215	9.35124006	7.966163158	0.893733104	1.054425968	0.416817592	7.321782982	5.270617646	7.661226951
Zm00001d005117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005118	2.689558731	2.240967608	3.106038878	20.59024753	23.06253398	16.37400024	10.54029799	9.519439466	9.899885172	15.21402079	13.87955199	9.790671819	9.890345719	7.892609823	18.16902973
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Zm00001d005127	12.36663328	10.82908751	14.33832071	13.12335599	8.862892698	12.33342909	5.818364616	5.020953446	6.149732823	6.782799188	7.200239362	8.156142035	6.123078197	5.095675869	4.991433403
Zm00001d005135	7.901354391	9.511568349	7.854437	9.718453917	9.248522215	8.943166111	8.931446978	8.815628492	9.023788837	4.741379418	8.179181352	3.36400563	7.668510266	5.935711622	8.386487041
Zm00001d005136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005137	3.339399666	3.687658942	3.665798588	4.6033876	4.581696916	5.188432922	4.764276395	5.204793451	4.804806924	3.240409971	3.87502592	4.022567053	3.588799164	3.849568961	3.475140752
Zm00001d005139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005140	0.763493816	0.641082191	0.850607262	1.8057834	3.037579605	1.728493484	2.148071334	2.207651835	2.139168072	0.569088356	0.956558544	0.533734437	1.429486755	1.205343318	1.485454957
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Zm00001d005143	0.143791295	0.139312053	0	0.055178543	0.306060666	0.067755389	0.116321628	0.213390242	0.422874687	1.555985695	2.440919338	2.548567543	0	0	0.089515117
Zm00001d005144	2.401703256	2.409013251	2.522260606	6.054978853	8.731278933	6.387437315	7.16200957	7.465806637	8.145407055	2.982609071	7.736012365	3.485131831	2.848716437	2.969381168	3.354651687
Zm00001d005145	0	0	0	0.09394033	0	0	0.396070338	0.181646239	0.046447446	0	0	0	0.252868591	0.289003325	0.43542182
Zm00001d005146	25.69249133	27.80764649	25.53479834	50.41558854	14.33861553	28.5409062	75.42142846	48.12685794	42.49020393	0.921071992	2.972390445	1.218512731	6.726086526	3.186866712	9.765085043
Zm00001d005147	0	0	0.070209297	0	0.186093557	0.13842258	0.198035169	0.204352019	0	1.636167749	0.641151989	3.129002586	0.347694312	0	0.130626546
Zm00001d005148	0.066244622	0	0	0	0	0	0.048379276	0.009984492	0.061273494	1.11918763	1.973552032	2.284039222	0	0.00907746	0.009573478
Zm00001d005149	0.179432559	0.302930771	0.222999313	1.97117295	2.002098525	2.184262694	1.235696687	0.800973176	1.162950148	0.078978856	0.231084474	0.093039988	1.213289061	1.025352483	1.21379456
Zm00001d005151	7.364974503	8.522520362	8.004659909	12.77106742	11.9065945	12.28963775	12.74345967	11.68551993	12.14422076	1.543160791	3.621219936	1.027667858	6.462557533	5.445895374	5.948159787
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Zm00001d005157	5.420778637	6.021124156	5.770515573	5.487540871	5.660417634	5.244509565	6.270661643	6.519839064	6.433925497	4.271191753	6.037951246	4.091355773	6.177545601	6.24039793	5.907540097
Zm00001d005158	54.01036822	42.5942935	45.45744014	150.8715691	395.574014	173.1478265	325.0143636	440.4695741	418.0904233	51.52014762	135.366963	29.90681458	15.91921459	8.758783564	13.24083379
Zm00001d005159	16.31690974	15.23309021	15.67163255	22.1875989	20.60451146	19.34966759	14.55177831	16.25883481	12.38282951	2.321978358	3.302582268	2.998425052	24.85533717	26.57546231	27.12279117
Zm00001d005160	5.706799481	5.213082573	4.910141902	8.642402626	6.982435137	6.876363881	5.569209211	8.09096512	6.071299106	0.389206352	1.621179926	0.486287191	4.175521605	5.224786189	3.84269743
Zm00001d005161	8.121969386	8.279799987	8.095654233	19.42861262	10.62305094	18.77405457	10.1284661	6.465706834	9.103521606	1.155222743	1.829613637	0.347956042	21.93517444	20.50448776	15.80581207
Zm00001d005162	0	0	0	0	0	0	0	0	0	0.071623497	0	0	0	0	0
Zm00001d005163	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005165	0	0	0.011605635	0	0	0	0	0	0	0.02575804	0	0	0	0	0
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Zm00001d005168	0.153433055	0.256933995	0.264361595	1.080721137	0.657054318	1.356421235	0.770117124	0.496150683	0.778404939	0.050497717	0.116530139	0.030902941	0.618497675	0.718667185	0.719637152
Zm00001d005169	2.839586275	2.581403332	2.817544935	3.355770455	12.86919552	4.320546648	10.36892683	12.31497607	12.20050709	31.99329815	29.98927867	35.79348345	1.780986947	1.330494129	2.051843275
Zm00001d005170	7.240004849	7.983563648	7.459900392	13.87225155	9.257298941	10.90543992	10.44114432	10.3277151	9.680021897	6.578379505	9.510801985	6.51434698	13.30308673	13.6623151	13.5357685
Zm00001d005171	0	0	0	0	0	0	0	0	0	0.50709961	0	0	0	0	0
Zm00001d005172	0	0	0	0.063115383	0.028578302	0	0	0	0	0	0	0.032034633	0	0	0
Zm00001d005173	1.116193517	1.205629287	0.917724518	3.020766533	2.64644676	3.114023442	3.611215954	2.860757935	2.738395783	1.110358973	1.17044842	1.052797089	2.92275369	2.732043112	2.766708789
Zm00001d005174	0.679944967	0.737955845	1.348464266	0.902125391	0.381245637	1.054574986	0.752254227	0.91579979	0.63338097	0.03990452	0.018243243	0	5.172366819	5.780656298	6.531396416
Zm00001d005175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005176	0.073108203	0.036832021	0	0	0	0	0	0	0	0	0	0.01619719	0	0	0
Zm00001d005177	11.02944959	9.122449332	10.67045637	10.35090829	22.33602154	14.40263536	16.4378757	18.82034931	14.93274178	5.616994871	9.133519238	2.804513429	8.129664116	6.757372425	8.551936965
Zm00001d005178	3.829425469	3.448454015	3.011874314	4.822037221	5.216461779	6.096774756	5.015104428	6.848050935	6.296991538	4.31187503	3.919211434	1.475500434	3.415779036	3.082553151	4.491502753
Zm00001d005179	22.87550158	25.81224085	23.64612085	21.97898547	26.4610319	21.59092457	23.21014445	24.63346216	22.19479411	7.740800444	13.40878356	4.591796563	11.94208827	10.37228034	9.95676862
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Zm00001d005183	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005185	17.36647121	16.25355467	15.63992865	13.42611704	15.34569518	13.18906556	12.56598053	14.91182621	14.09503144	4.30743409	6.953652492	1.520773809	6.887547919	5.229733685	5.317101633
Zm00001d005188	20.13113435	20.74519489	20.2291158	17.76059363	29.304456	21.0997489	24.72700825	30.732877	25.11126829	29.43568559	27.26588512	21.26656566	13.73885717	11.86461864	14.1243427
Zm00001d005189	0	0	0	0	0.021868111	0	0	0.005002852	0	0	0	0	0	0	0
Zm00001d005190	89.58411552	90.0715424	73.47537224	36.5004136	29.21182093	37.33300734	37.94090226	30.4453907	37.49129666	24.30115524	34.1182944	43.82040566	10.41115948	10.43845386	7.574166183
Zm00001d005191	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005193	357.4491543	314.6851122	369.7798372	161.057242	183.0349088	129.2146282	145.7155715	172.1326512	157.4961866	127.2150215	186.8328069	134.6809834	104.9750487	114.2529715	115.7543296
Zm00001d005194	1.436638141	1.128474851	0.671946601	1.406398194	0.753121677	1.040906517	0.974735814	0.856816075	0.743001691	0.234354509	0.448041678	0.684491413	0.570454397	0.931388439	0.339333818
Zm00001d005195	17.54088395	19.05548858	16.24614058	10.29750145	8.854097574	10.36865909	8.146779611	6.362614243	6.545478403	2.207881426	5.606250947	3.027180186	8.403790332	8.109629909	7.877854869
Zm00001d005196	1.035699539	1.043573922	0.441315578	2.325023166	2.534417016	2.356479629	1.348525197	1.819706077	1.569260149	3.428160997	2.462837797	10.03068829	0.728502369	1.167809353	2.257973153
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Zm00001d005203	25.71939897	26.65402161	26.28119911	26.82092934	21.87984376	28.94770097	19.3849905	19.62696948	19.67049349	19.32841001	16.1771332	16.82131787	26.4231801	25.42296077	27.02866036
Zm00001d005205	6.125136437	6.336225136	4.442358393	7.011593426	8.931337419	6.098457408	6.559067979	6.065917268	6.574367649	0.88857756	2.270453437	0.488843529	4.187595282	4.063584515	4.244814603
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Zm00001d005246	54.06404845	58.70975191	52.66082277	11.17684658	5.340869143	9.228527818	7.980574071	4.167006758	4.941100826	2.827424987	4.121612869	6.203093455	18.98226224	18.03049608	19.44913979
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Zm00001d005251	0	0	0	0	0.01845682	0.017160996	0	0.01688975	0.138200188	0.618192967	0.017663796	0	0	0	0
Zm00001d005252	0.096588052	0.050688754	0.050016632	0.050191845	0.010605744	0.044375092	0.037621047	0.019410534	0.044669946	0.011100904	0.05582529	0.062414252	0.171134793	0.21617823	0.372229899
Zm00001d005253	4.569708456	4.266562894	6.451549381	10.3586398	13.30069658	10.22216989	8.996914822	9.685953436	9.934938827	5.372179124	6.947550748	2.594019461	10.27818309	10.18510149	11.49513605
Zm00001d005256	19.72977689	17.55074177	18.00550552	19.11984369	20.63436915	17.41070672	21.73070305	21.75686207	19.19944121	42.8866904	27.20510422	27.2686245	14.70901026	17.13818354	19.6735156
Zm00001d005257	8.555288374	8.117403588	6.308409563	6.741032514	5.508737793	7.202428333	6.855088672	6.00545398	7.090938474	5.676830959	6.451371466	11.10269254	6.058831582	6.36369379	5.747568025
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Zm00001d005261	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005264	18.22369011	17.71376769	19.73052127	16.80807822	14.26858194	17.10019576	14.97573457	13.2298704	14.84264418	10.82339268	13.24753624	9.527950389	8.611252645	9.129942472	9.484555924
Zm00001d005265	0.130825205	0	0.16258995	0	0.1723814	0	0	0	0	0	0.027495797	0.024153704	0.097598403	0.047805061	0.100834527
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Zm00001d005267	0	0	0	0	0.052672095	0	0	0	0	0	0	0	0	0	0
Zm00001d005269	0.957253628	1.11080256	0.978313581	1.911970357	2.538650803	1.869282918	2.293880976	2.460794887	2.495953857	0.583037156	0.958961723	0.304125483	0.668818773	0.878918182	1.030874894
Zm00001d005270	8.119214395	8.725515649	9.373098788	16.78974501	12.7699305	14.19086397	12.61624589	11.41911005	11.80078123	5.183822964	8.612187517	2.61250631	17.91016201	16.60272354	15.39398049
Zm00001d005271	1.517999622	1.365107509	1.986069195	5.418421106	9.441045874	5.726392473	8.070171008	9.66045022	9.797272821	3.133987723	4.900159707	1.893046564	2.456726569	2.052258359	2.894172345
Zm00001d005275	2.62091013	2.299827849	2.416056701	5.958234382	4.884586259	3.538820664	3.430405401	2.87551644	3.319668776	0.694710807	0.734455946	0.409778646	2.756733489	2.260543647	2.584254823
Zm00001d005276	65.07360912	56.54953516	67.06276694	78.87415691	105.2478717	73.26561757	85.61105716	86.0661068	87.62804786	35.52751853	61.81935374	35.12358933	56.70613886	63.01091816	86.03609991
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Zm00001d005279	5.426749343	4.907187297	4.085537919	2.863387309	2.268920836	0.873682465	1.686910263	1.1744608	1.222702431	0	0.02193367	0	6.014315358	5.014696186	5.811551766
Zm00001d005281	6.514284539	6.696265999	6.446696474	11.99132827	11.09644752	10.55256677	13.38063266	12.16705436	12.50121107	6.751154052	8.956730621	6.342514985	9.377133055	7.964642779	9.634983731
Zm00001d005282	0.080419023	0.081030446	0	0.100295117	0.127156633	0.019704861	0.037587852	0.058180222	0.019835792	0	0.101410968	0.017816909	0.197981232	0.105789788	0.446281753
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Zm00001d005295	14.23738821	13.1158751	13.20725999	22.65253392	28.80015727	22.94619732	11.04031501	12.62348876	12.61383988	1.497638562	6.811677655	1.120663003	6.408150165	6.206382136	7.489787389
Zm00001d005296	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005297	0.361283239	0.423155963	0.314588701	1.650201596	1.594897901	1.071312946	1.664437649	1.53440012	1.992260048	1.094922655	4.683578763	1.572812294	1.210287558	0.787057507	1.463254778
Zm00001d005298	0	0	0	0	0.025407414	0	0	0	0	0	0	0	0.048549699	0.021138063	0
Zm00001d005299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005300	0.892294988	1.08371138	0.47526293	1.291679537	2.28847359	2.615831825	1.191596229	1.613856973	1.395209828	5.933355572	1.486888087	0.829586839	1.569082025	1.29257531	2.210603087
Zm00001d005301	0.184388005	0.135206691	0.207183905	0.500873351	0.381078346	0.479651821	0.268583864	0.278673858	0.2118261	0.245592504	0.23251919	0.162286117	0.322223496	0.351655355	0.430735756
Zm00001d005302	18.69775963	15.7335812	13.86004427	14.75111013	13.0502393	14.0978876	11.4258884	11.87318321	12.24286996	6.821868115	8.61993229	7.67365609	9.468700387	10.31760542	9.86208542
Zm00001d005303	21.2471868	19.2669402	20.79520057	17.5373176	20.45560164	16.80477709	16.87707026	16.51725549	17.21891704	1.32798529	3.940540475	1.63015837	7.573036252	6.343286928	7.792632927
Zm00001d005304	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005305	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005306	16.73710689	11.40923186	17.77898271	17.09180644	62.52428441	23.14338771	47.93751437	59.61085082	51.51452805	152.9801148	105.6634598	163.0439323	8.374663983	7.484293846	10.47287833
Zm00001d005307	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005308	1.176118157	0.821044571	1.002782597	0.983554315	1.183304334	1.094641513	1.470175058	1.681969071	1.793422786	11.57447288	8.226157457	10.03396738	1.188583558	1.48919381	1.681245098
Zm00001d005309	0	0	0	0	0	0	0.080074371	0	0	0.189021408	0	0	0	0	0
Zm00001d005310	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005312	0.440684463	0.214448707	0.398315599	2.897904332	5.846255205	1.816023118	4.9387408	7.922171373	6.670057448	1.629946145	2.892255669	0.62130759	1.120772875	1.581034201	2.246393803
Zm00001d005313	0.466618784	0.359642261	0.199075366	1.433152334	2.09228693	1.860066636	2.099596502	2.057400446	1.597574466	0.182497618	0.184430543	0.038574561	1.114463889	1.213914919	0.917912672
Zm00001d005315	25.80514033	8.7996542	18.15065396	64.46881505	340.9972362	118.3369908	285.7827758	434.7345739	256.4273971	155.7231807	138.6112807	141.6515807	30.70461942	35.40576747	43.19620527
Zm00001d005317	0.832029312	0.817204034	0.474334164	1.837343824	3.178324177	3.460178051	3.050471377	2.6599612	1.468579557	0.252661782	0.221394129	0.169116388	3.536348182	4.0500576	5.683385244
Zm00001d005322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005323	2.586101493	2.859687549	2.037276967	3.100761167	3.089302099	2.947373782	3.033149253	3.168731995	2.776309935	2.36740965	3.472340216	1.61968083	4.076009367	4.314246301	3.842543711
Zm00001d005324	50.70611975	50.29658938	51.17363934	37.82024994	22.21684369	32.50414877	14.78473448	12.62476682	14.34826828	19.11729486	13.81729629	16.14862481	22.71925439	20.10929783	18.54255317
Zm00001d005325	2.8226677	3.069716823	3.860230542	4.184784649	2.061287043	3.277607947	1.152413611	1.298522091	1.188338271	0.984956704	1.429507842	1.356212464	2.080399799	1.826759822	1.454763797
Zm00001d005327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005328	11.55786987	11.98632073	12.8306731	23.63940981	19.86453576	24.58093948	19.91677943	17.35491163	17.37036378	20.21265448	16.70189473	12.57062894	17.48720449	15.59125467	15.669228
Zm00001d005329	131.6842454	133.92532	137.3447442	133.7432361	127.0434588	167.9529684	178.791586	157.0206183	195.9642962	435.4975101	305.4173425	633.4156632	101.1865319	96.50470712	87.18382471
Zm00001d005330	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005334	30.68642566	26.35678078	24.61221175	32.90668052	63.46108764	35.45257096	43.97567474	51.14864516	39.94331843	11.55411738	24.18349197	12.33016327	17.8505118	13.89881541	23.08714122
Zm00001d005336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005339	3.589508811	4.520999631	0.193258575	0.016161298	0.085373727	0.031751909	0.030284051	0	0.031962887	0.017871929	0.016341104	0	0.101506965	0.213083697	0.104872687
Zm00001d005342	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005343	34.92514676	35.35534355	36.17476454	28.0442685	59.28330587	32.51436716	57.39593056	73.84198801	73.69525051	309.4184589	256.4194339	258.6646412	48.16326214	44.15194148	51.01261067
Zm00001d005344	19.69469837	21.42994547	15.66167814	23.51572936	24.3811303	20.39745795	45.662727	47.08661694	39.59695381	25.87412998	21.64371118	13.21009127	54.33257221	51.35605432	52.36262097
Zm00001d005345	0	0	0	0	0	0	0	0	0	0	0	0	0.01341978	0	0
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Zm00001d005347	19.20687134	18.33244743	21.57093951	48.03356182	70.07463839	51.18882102	74.63932003	85.54794439	87.51778637	42.96753167	46.4229805	26.56979953	45.48240055	51.43793937	59.41519042
Zm00001d005348	12.69640802	13.519317	13.14482033	7.605884064	8.276789962	8.006786447	7.66681534	7.428746481	8.041410621	3.804810828	6.018891805	3.542348112	6.605370998	6.319828344	5.665014022
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Zm00001d005356	13.61911048	13.54727764	12.22475399	9.992365358	7.417470254	7.225115823	3.84579408	2.855140523	4.550293896	1.709879321	4.671477467	1.695080911	6.370229455	6.007815147	5.285821683
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Zm00001d005359	158.5949117	157.6510387	157.9248837	340.1187191	207.9382488	415.1072253	279.9112939	194.2618706	240.4465984	27.80799149	31.49799158	22.26413255	176.9556308	152.9557886	149.5214911
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Zm00001d005369	0.583305981	0.091834505	0.317158795	1.000276633	0.384295602	0.401979171	0.212997826	0.483542289	0.179844512	1.156432976	0.689594583	0.403849934	0.285572929	0.359685281	1.34876263
Zm00001d005370	0.573721079	0.759660428	1.048203644	3.577600209	4.852369478	3.934964687	5.351684975	4.990254811	5.339940281	2.596942621	3.679239392	2.053290104	1.882138652	1.596522722	1.865176532
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Zm00001d005373	7.798146175	7.834025064	6.653536795	6.695472151	5.652563561	6.333278296	4.644298918	4.1881332	4.658208635	1.860769835	3.113974083	1.832840422	3.532148776	3.498395621	3.81043248
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Zm00001d005378	1.332068946	1.379725137	0.762400951	0.568338996	0.415704377	0.547567781	0.880664088	0.887621335	1.026756529	1.559153992	1.779242434	0.514520348	0.725700437	0.806986207	0.62817971
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Zm00001d005675	3.596787373	3.70216519	4.701088641	10.34943595	11.78247703	8.349265264	10.90729048	11.4544143	10.78608631	4.077630069	6.428056255	2.100843216	10.95394649	10.95340687	12.8014344
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Zm00001d005684	9.059626809	11.50874728	7.803113222	18.54631015	14.05183437	16.92091811	24.03962643	21.48137559	20.60718366	39.86921939	15.44220349	33.96481494	25.03557542	24.20104667	25.79364431
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Zm00001d005686	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005693	41.22689839	51.28769146	39.01556611	91.10042039	38.73154685	77.73817469	27.37208904	20.5331953	24.22247904	0.882099906	2.419630117	0.029521194	217.7284828	215.3671126	195.4929387
Zm00001d005694	21.27050291	28.38549503	33.49519101	72.61421126	48.34781604	52.36956165	36.52013133	39.23465968	35.30581763	5.497200945	9.2775838	3.363123597	51.606552	52.10699572	65.5488991
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Zm00001d005696	0.050822431	0.066920633	0.083259352	0.161339898	0.158283293	0.150000676	0.151164392	0.161557111	0.088319215	0.015930116	0.052436222	0.012795178	0.031021054	0.060778182	0.101490513
Zm00001d005697	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005699	0.648572895	1.107087316	0.922713189	1.681602273	2.901107948	2.195579119	2.1539106	1.769860269	1.568166683	16.60689352	13.03213234	10.04898126	1.566143669	2.217161141	2.811895406
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Zm00001d005706	0	0	0	0	0	0	0	0	0	0.271572425	0	0	0	0	0
Zm00001d005707	0.569473331	0.546479061	0.510345388	3.290214138	3.154594279	3.849120477	2.326740207	2.396286558	1.87284948	0.977739882	0.820713304	0.381935153	2.288930084	2.199832052	2.230460303
Zm00001d005708	5.131862238	5.455515156	4.681022748	6.451614003	6.513835264	7.599477086	6.154747769	5.911107213	5.84272084	3.757990521	4.259871833	2.359992617	3.59578483	3.980589364	3.959958082
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Zm00001d005710	0	0	0	0	0	0	0	0	0	0	0	0	0	0.18910898	0
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Zm00001d005714	0.075047945	0	0	0	0	0	0	0	0	0	0.063091911	0	0	0	0
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Zm00001d005716	2.696619535	3.001471785	3.413717703	6.866995028	9.800198903	6.699652854	8.529683581	9.663788246	9.342839898	3.840169337	6.326555809	4.890659748	6.470304066	5.596020997	5.162265226
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Zm00001d005804	324.3500248	374.7039131	334.3854265	484.9826101	362.3787432	504.6141309	303.9656475	233.2542066	282.2247471	150.6295852	150.465707	90.36142267	364.2754678	304.067279	259.5226532
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Zm00001d005813	16.76963892	12.09278511	13.78648134	3.606583222	21.59243439	8.238660966	20.06911525	23.71649843	15.63386732	27.27469445	22.53627513	6.449282308	22.54973701	27.33198867	37.95340772
Zm00001d005814	17.02597062	16.05958771	15.32124427	67.92855713	33.79956485	62.15139306	18.33321687	14.2563307	13.95925295	3.093893928	3.98107596	2.296204112	216.3771938	244.5366575	240.0985627
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Zm00001d005818	213.2902102	238.3523776	171.6694929	48.4858048	88.34816837	65.69953012	142.1364554	173.6503175	202.1496946	129.7662614	237.6298478	123.2904008	7.406643449	6.08559596	15.94992568
Zm00001d005819	28.30820622	24.06094443	32.6310492	34.25089315	64.73853886	45.21895939	88.23188089	106.2934247	106.782679	208.610786	172.47476	190.5917609	11.04332399	10.85143231	25.64519177
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Zm00001d005834	14.71250174	14.93545043	14.1436502	14.22375284	10.03998086	14.73803562	13.21216353	9.586355869	10.10718905	1.858456455	4.031903813	2.266227787	19.78118932	16.31636858	18.90749024
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Zm00001d005899	3.473135928	4.342956852	3.899420662	5.199634054	6.199024189	5.427068663	5.409755489	4.282499803	5.075735695	0.969820481	2.363166816	1.008306786	3.746746648	3.302593309	3.677017899
Zm00001d005901	0.393953002	0.482774852	0.224954086	1.540358027	1.865921255	2.178430737	2.314111894	1.566274408	1.89088856	1.600609438	1.584348926	0.943574612	3.324217585	2.929679565	3.680636923
Zm00001d005902	4.904692072	5.115911238	5.687222019	11.77655412	14.16763762	13.02710277	11.99642928	12.34463667	14.2294688	8.530998344	11.99164388	7.812196341	9.303820221	9.818994734	8.962682706
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Zm00001d005909	0.460366266	0.393458117	0.408674678	4.480411449	5.0369472	4.965316983	5.504258311	6.225015532	6.255490672	4.535149846	4.343658003	2.741104105	3.118585907	2.730623373	4.676163282
Zm00001d005910	1.958987787	1.609903672	0.966947547	3.136260924	5.492029369	2.825564974	6.737355014	8.661008992	8.018981668	19.60218278	21.95279504	26.14866758	3.886826663	3.853335706	5.766551354
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Zm00001d005912	3.42774975	5.048493738	4.704798885	4.30469676	6.685770994	5.154328621	5.111204375	6.578415247	5.129727299	3.202807773	5.415664266	1.52412824	4.102752433	2.763724889	3.916972624
Zm00001d005913	0	0	0	0	0	0	0	0	0	0	0	0.090324289	0	0	0.020948724
Zm00001d005914	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005917	0.293863546	0.226492704	0.196234646	0.760338022	0.647273631	0.838262629	1.245391523	1.41204164	1.206247779	1.385232203	0.448004181	0.291518239	1.492062599	1.14913889	2.743325098
Zm00001d005918	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005919	0.103668125	0	0.016104881	0	0	0.079379773	0	0	0.095888662	0	0	0.014354855	0	0	0
Zm00001d005920	217.7883604	208.4660775	215.3309754	29.29736055	41.51429712	33.72179892	66.98314615	66.75473324	71.75725306	305.5066622	424.299527	470.1757406	60.54521379	53.38274752	57.74621044
Zm00001d005921	0	0	0	0	0	0	0	0	0	42.17040663	0	0	0	0	0
Zm00001d005922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005924	11.29149908	14.9494207	12.31700398	9.380036155	13.79427824	9.982290786	11.29453013	11.21789141	12.2225989	47.74500014	34.93665967	64.03813106	8.810912604	9.704975341	10.66552648
Zm00001d005925	38.22365402	38.5353514	38.88431559	110.5059786	122.8177372	124.1213237	99.01790771	92.16459571	114.2999043	116.0691359	116.0770637	189.4035585	44.27837398	50.63732575	50.92697162
Zm00001d005926	0.431409993	0.637045669	0.64708677	0.742118385	1.862150546	1.111748705	2.694341379	2.744409818	2.751973285	0.861703145	3.620559156	1.120584691	0.632584211	0.570773705	1.771489274
Zm00001d005927	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005928	0.071916012	0.135867725	0.241319065	0.125566743	0.037903959	0.035242782	0.117647405	0.086714341	0.106430866	0.416572957	0.65295647	1.967732778	0.072428694	0.157673716	0.332578897
Zm00001d005929	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005931	0.01587832	0.019998803	0.019733623	1.405995426	0.732270583	1.069921333	3.042826085	1.340194815	1.566589825	0	0	0	8.546576571	8.355058787	10.90435815
Zm00001d005932	3.022785389	3.300405537	2.634587471	2.496938016	4.008826606	5.771416673	5.458738254	7.987772758	5.652417472	1.448293429	1.126222309	0.423998943	13.33269159	14.900817	32.06548809
Zm00001d005933	0.090939472	0.139991624	0.301386248	2.595960825	1.57105325	2.054956345	0.720225465	0.450792801	0.635537009	1.031235422	0.038225864	0	6.365915378	5.206087767	6.027937197
Zm00001d005934	37.23853529	34.68029758	25.66817999	35.35738983	33.26285133	38.0784559	30.87897437	24.26255637	26.04777145	11.4620517	17.28608406	7.927449688	35.50863121	33.22829839	32.88286908
Zm00001d005935	6.108423667	6.370611726	6.547224374	24.38617679	22.05952146	20.39196938	20.01575315	21.58949293	27.24373314	4.279122947	8.579176109	4.33207819	27.34208891	28.29084877	25.67043237
Zm00001d005936	7.61055154	5.098679695	9.745905698	3.476388276	30.09929463	7.439335339	24.82722121	33.13614673	34.26289004	58.68622987	41.43693339	44.4593677	1.876725646	1.382039467	1.912209074
Zm00001d005937	0.548678284	1.151770549	0.151533108	0	0.120494022	0	0	0.147018027	0	0.357338967	0	0.050650075	0	0	0
Zm00001d005939	0	0	0	0	0.208923591	0.010791967	0.113223715	0.021242779	0.065182048	0.036446299	0	0.019515944	0	0	0.010184157
Zm00001d005940	2.176704842	0.897823374	1.249777775	1.476411359	8.939837453	3.898773775	7.808928676	9.623572098	7.362698682	2.229581431	3.114090995	1.508796889	3.276225737	3.237390795	3.281839936
Zm00001d005941	2.63255992	2.24842745	0	0	0	0	0	0	0	0.763544949	0	0	0	0	0
Zm00001d005942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005944	34.29963261	39.32223651	29.39195381	11.17428577	11.71434518	14.01197506	14.52749778	13.59509054	14.19073705	33.92602172	35.15122262	36.13619115	20.3764765	17.95634604	15.33739257
Zm00001d005945	0.062001061	0.624724525	0.423803055	3.015676306	7.434289914	6.076782634	4.817807968	2.130636247	3.096812387	0	0	0.137363923	7.146261332	8.054177206	4.65930968
Zm00001d005946	0	0	0	0	0	0.043960977	0	0	0	0.148463665	0	0	0.200768369	0	0.248910426
Zm00001d005948	0.685193108	0.780812469	0.094617779	0.447617825	0.014330832	0.119922187	0.203339213	0.104912625	0.160958692	0	0.013715087	0	0.304267099	0.47690968	0.339504317
Zm00001d005949	0.48652078	0.531071426	0.161239855	1.294437571	0.10684375	1.172240565	0.96644921	0.469306654	0.640016057	0.380229007	0.163604883	0	1.39737643	2.133364655	1.649954285
Zm00001d005950	12.21188395	12.51108474	12.65533714	31.15715568	17.5349165	35.18647045	17.88294247	11.17929887	17.64322835	0.02992839	0.923564174	0.114183761	66.81580893	69.11809413	67.00535331
Zm00001d005951	4.97079921	8.574659973	7.643883329	37.72493769	27.46202277	51.27116358	11.853688	8.549659885	8.358223174	0.720298996	1.007272987	0.183774408	32.94173116	30.33750009	25.99967289
Zm00001d005952	8.351580399	8.065606108	8.095679219	9.109465766	11.1739176	8.104418775	10.49959041	8.496997248	10.27715299	3.573304911	5.236840585	2.798859168	5.058391448	5.267568376	4.9180719
Zm00001d005953	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005957	0	0	0	0	0	0	0	0.015926953	0	0.054651842	0	0	0	0	0
Zm00001d005958	7.640393702	8.076661976	7.091533958	6.366723158	6.497600606	6.896496166	6.66089784	6.471473742	6.45045564	1.547994349	2.119508252	0.978277866	4.223917152	4.069163027	3.566929458
Zm00001d005959	3.298031981	3.985482802	4.680390886	6.461555825	9.821735848	7.726168532	8.20223902	9.095302563	8.299670325	0.230499823	1.095932712	0.111083417	2.418841606	1.709995222	2.808204589
Zm00001d005960	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005961	0.985977043	1.686680564	1.024194173	3.505470881	2.113574101	2.506059598	1.513224598	1.472771676	1.742304206	0.243550727	0.167016987	0.146716203	3.145342305	2.919942403	3.572896162
Zm00001d005962	0	0	0	0.137779151	0.145566516	0.033836631	0.096817194	0	0.204368764	0	0	0	0.030906161	0.181659233	0.031930933
Zm00001d005963	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d005964	0.02505036	0.007887755	0.007783165	0.015620861	0	0	0.080496201	0	0.00772351	0.302300042	0.173741191	0.131810846	0.09811255	0.020595813	0.057923269
Zm00001d005965	0.275259743	0.028890889	0.057015603	0	0	0	0	0	0	0	0.173555684	0	0	0	0.026519819
Zm00001d005966	116.3659488	107.3019365	92.11467028	15.42253239	20.75775098	14.68716282	8.816576678	9.433167793	8.232319209	6.963619679	11.46626361	5.01652402	9.90375599	8.9592969	13.72805274
Zm00001d005968	0	0.008639724	0	0	0	0	0	0	0	0.009460555	0	0	0	0	0
Zm00001d005969	5.279573421	4.482461152	3.555955941	3.407101035	8.211591618	4.55703165	8.468312362	8.861308177	6.854380678	10.61668437	7.181629368	5.544542346	3.057078318	3.488919725	4.431790196
Zm00001d005970	1.227621005	0.913659617	1.063360393	0.672727791	0.75976809	0.752001851	0.239079192	1.009248748	0.252332861	0.153917433	0.046911196	0	1.186418143	1.080687068	1.161243336
Zm00001d005971	0	0	0	0	0	0	0	0	0	0	0	0	0	0.018366283	0
Zm00001d005972	4.400358844	4.504742435	3.707701901	6.660656461	4.320978662	6.226974022	4.090500926	3.554591043	4.204203569	1.201120687	2.099038977	0.919775091	6.457075407	6.291075535	5.211572482
Zm00001d005973	74.39170867	63.97434258	63.09709478	209.8624035	455.8733869	177.6930655	392.4817753	546.9073093	684.8972054	16.78727588	88.28573833	12.42526927	36.22974735	33.32027708	35.78759153
Zm00001d005974	0	0	0	0	0	0	0	0	0	0.012347666	0	0	0	0	0
Zm00001d005975	40.13615634	38.32093344	39.90793663	18.17340743	19.10929354	17.28668874	16.60897321	15.46804409	14.06933946	19.82629428	18.89978397	11.56293307	12.85646706	10.32880029	14.68445378
Zm00001d005976	5.099283174	5.08014444	6.090660945	5.22582277	6.301407577	5.739511522	3.10135688	2.88529432	2.955406629	0.927131949	2.841832454	0.895157815	3.971776354	3.405937054	4.7437571
Zm00001d005977	3.498362889	3.420603411	4.919851445	19.74834492	53.79895813	28.87392476	23.07476448	47.06655892	38.65975778	127.0324103	162.0663364	155.1660793	3.09061611	0.857835266	11.01617205
Zm00001d005978	104.8032797	103.7092435	100.9152371	57.87802972	63.85705229	50.52713139	62.96553686	73.78401985	65.29453999	333.8771163	195.9369995	268.5833915	72.05329483	51.78141438	46.36151557
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Zm00001d005981	2.428035889	2.291966934	1.998899971	5.085476765	2.513245416	4.686220228	1.987819077	1.647196455	1.697486025	0.355484266	0.481052028	0.079947668	8.272292735	8.917536656	7.634707866
Zm00001d005982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005984	0.148600369	0.499100571	0.030780163	1.081079612	0.326337977	0.970964182	0.72349805	0.44794555	0.366530935	8.539350311	2.21744635	3.01790032	0.249432876	0.271501571	0.34360461
Zm00001d005985	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d005989	7.857030989	7.125090915	8.202382641	3.26631607	4.693265251	3.465337683	3.611170038	5.810591773	1.356585758	3.250842325	7.001630826	4.583928845	11.01964503	9.07252145	11.86949872
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Zm00001d005996	1033.07634	1043.069456	1108.857274	868.5446154	434.6995178	1016.39201	471.0256903	297.6767318	357.0771741	58.65095084	92.01747914	69.62640974	971.5954476	926.5129665	800.5873358
Zm00001d005997	18.39909423	14.82563094	18.02234006	14.21117101	20.28695205	14.05560472	15.93694597	15.48344617	16.42851463	8.658220659	11.61319151	7.938582367	13.61483839	11.43923183	16.36816307
Zm00001d005998	22.72661117	20.78556966	30.1654935	17.29596141	34.15525567	18.66803878	29.8164635	40.04782755	32.53114998	107.3927355	104.5379345	100.265398	15.0664018	15.81696464	20.30291338
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Zm00001d006002	13.12758251	15.20505513	16.41435871	62.57711474	27.83193475	42.99923396	18.53454766	20.76455524	18.8126825	10.07799142	20.48620165	11.74353097	95.9424839	94.00546593	92.61651283
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Zm00001d006009	0	0.021741123	0	0	0	0	0	0	0	0	0	0	0	0.018922837	0
Zm00001d006010	308.3571959	230.9875837	237.1161665	55.92626795	155.482474	48.04872271	86.83312291	69.67276164	64.80548872	15.40236047	134.243193	26.62927709	14.74851827	10.38806779	32.51028235
Zm00001d006011	8.488842616	8.188720558	8.229180615	8.450303496	7.026081181	8.411296621	6.60613558	5.427663043	7.315691055	2.215094629	3.251377969	1.726989848	4.414149222	4.202150249	5.100246376
Zm00001d006012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006013	6.753655126	6.771968903	0.937134159	0.449764673	0.907172621	0.682818336	0.191544808	0.197654631	0.889518719	0	0.702824215	0.472126721	0.146748679	0.107819329	0.18951813
Zm00001d006014	1.554224276	1.458812061	0.147637797	0.172847486	0.117396602	0.048513055	0.057837932	0.083555955	0.061044254	0.013653067	0.024967219	0.076763655	0	0	0.011445193
Zm00001d006016	425.7492292	355.1146778	305.2723327	36.80170414	163.4961322	65.82477856	206.5881692	233.3932725	194.0683256	202.8258052	160.5152001	150.4154036	100.9200627	99.14164761	93.66407152
Zm00001d006017	0	0.052297554	0	0.077677312	0.246203048	0.343376285	0.121297167	0.137682884	0.128021435	0	0	0	0.162626952	0.079656953	0.288033022
Zm00001d006019	69.28829919	64.33633229	70.2537624	57.4539058	59.30925728	61.71801417	57.14634854	49.35328324	51.73084328	24.45421511	37.53588697	26.84684219	42.55778384	48.2986485	46.076337
Zm00001d006020	0.020904027	0	0	0	0	0	0	0	0	3.892063518	0	0	0	0	0
Zm00001d006021	0	0.342666064	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006022	64.70635183	59.24581676	56.4547476	10.62396604	10.6130268	11.42063417	9.58166512	10.85598536	9.532032453	1.222606556	1.930096288	0.705816753	9.524780971	7.706023303	8.839724683
Zm00001d006024	0.008587458	0.010815936	0	0.010709906	0	0.136770551	0.080275563	0.02070904	0.063544308	0	0.043316243	0	0.009609642	0	0.039713096
Zm00001d006025	0	0	0.039568351	0.023824178	0.184585393	0.070210614	0.141370238	0.238014105	0.235590447	0.895760745	0.49784425	0.359740567	0.092632113	0	0.073618128
Zm00001d006026	14.03692536	20.79739757	14.96295904	10.94578808	7.487240697	4.790389644	0.131480139	0.033918511	0	36.39070491	26.92398604	30.00829369	27.16594327	25.7799121	26.99346506
Zm00001d006027	0	0	0	0	0	0	0	0	0	0	0	0.016231911	0	0	0
Zm00001d006028	0.008459922	0	0.105140159	0.042203391	0.100324695	0.165832991	0.108739608	0.051003701	0.03130029	0.011667627	0	0	0	0.102014699	0.088027419
Zm00001d006029	0.198133825	0.249550286	0.451442385	0.988415646	1.65344575	1.577816795	5.093426273	3.145573193	3.013698796	22.17953921	12.45101331	35.77583652	1.367261692	1.84621068	2.023449371
Zm00001d006030	9.995048223	11.20615675	9.300600484	7.800469419	8.968120406	9.155273754	9.010483825	8.38747775	7.944805665	5.417179202	7.036403797	3.760882168	6.627573842	6.950440208	6.494436686
Zm00001d006031	6.481729434	4.69181736	5.663549919	8.346995067	7.755284197	9.021103866	9.068367931	7.381296402	9.126986471	3.921679179	3.945909059	2.008245583	7.545061318	7.173559755	7.651678322
Zm00001d006032	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006033	8.384280325	10.29176917	8.943098263	6.755025082	4.005119193	5.552966493	4.868278062	4.557930756	4.114453835	0.667113741	1.877609014	1.11135174	8.119279822	7.814216842	7.652056658
Zm00001d006034	11.17561231	10.0642269	10.24793614	11.75118375	23.62544551	13.10289682	19.53770967	24.16912203	24.70818352	72.59473728	69.00961065	68.89312733	3.760661683	3.273499374	6.42194934
Zm00001d006035	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006036	19.53670622	18.39873599	27.27927812	14.61363664	31.39641779	16.13162743	24.77272431	26.89134784	24.30321331	3.481848347	6.384093409	5.020124788	2.914960212	3.178295711	4.269889851
Zm00001d006037	28.86600803	29.35923885	36.07672883	34.56902943	25.30772832	29.21765398	16.11725749	13.47164625	18.01284418	0.042024262	1.191164492	0.045005565	12.55935919	9.653514686	10.99126307
Zm00001d006040	3.24151553	3.867821815	3.074431216	6.397359916	5.23780598	4.194250227	3.761130496	4.525666185	4.425510362	3.168624682	3.965742559	3.811291752	8.979306859	6.707940968	8.593259723
Zm00001d006041	9.031356793	10.58993201	7.16438094	4.792985707	8.540679913	5.440453445	13.66650861	15.68193333	17.25924685	29.15170845	34.05124435	45.31111111	4.641486638	4.284903499	7.068454523
Zm00001d006042	0	0	0	0	0	0	0	0	0	0.023716837	0	0.019049525	0	0	0
Zm00001d006043	2.488865662	0.927175292	1.481236133	6.208010574	5.542725025	5.883669494	6.226090298	9.0030164	7.176487736	2.368947151	6.144464555	3.689013818	3.13816405	2.305674877	3.809605986
Zm00001d006044	2.698269853	1.812523128	2.757254566	8.300740602	6.636683911	5.729966257	5.745336095	6.50699851	3.623511959	3.721358977	9.224839819	3.520402383	4.361428655	5.455752614	4.228747966
Zm00001d006045	0.229383119	0.07704237	0.057015603	1.125234925	1.531379285	0.936752357	0.875578311	1.438235912	1.056133879	0	0.250691543	0	0.496261681	0	0.229838431
Zm00001d006046	13.83475868	14.26805946	14.16997064	14.94746797	13.12496482	14.83553774	16.15932671	14.42767119	14.52381663	11.10140195	14.58402238	8.613771787	10.16222494	10.07882811	9.964604557
Zm00001d006047	0.029337412	0.073901158	0	0	0	0	0	0	0	0.040461128	0	0	0	0	0
Zm00001d006049	24.82036089	22.0729379	26.02791777	43.55142532	62.98638041	43.4322323	54.85153066	62.75439115	55.85741859	30.41162995	38.81941921	18.57796732	33.5644906	32.00217099	31.29823304
Zm00001d006050	1.192933925	0.983941126	1.1020962	0.342320013	0.33384753	0.413878169	0.25905141	0.420065695	0.23435337	1.26669887	1.530953225	0.362529381	0.401660766	0.335613679	0.353952548
Zm00001d006051	7.040843336	7.065212361	8.423386023	7.612854915	6.68412529	6.060117093	6.972850308	8.718075602	5.827813645	7.692909398	7.671009798	4.558467785	10.28147339	9.449007087	9.052751485
Zm00001d006052	0.079402452	0.276491827	0.145120001	0.233005396	0.523121895	0.309003463	0.23468329	0.30975121	0.420502521	0.115950782	0.241487683	0.046566229	0.162027688	0.143366186	0.405000309
Zm00001d006053	0.131816305	0.011858795	0.093612395	0.37576132	0.719561754	0.322986019	2.761490409	2.202460653	1.753391097	2.869786289	2.647720249	3.254162689	0.010536191	0.061929284	0.021771091
Zm00001d006054	0.193330581	0.40003667	0.291758632	1.274457143	0.236545588	0.89667071	0.435677371	0	0.153276573	0	0	0	2.673382935	1.725762711	2.011648809
Zm00001d006055	4.034439385	4.558421719	3.265655257	3.447133168	4.385059315	4.4947807	1.947974224	2.144615465	2.262323303	0.059829646	0.109409839	0.07551591	0.520122951	0.883180087	0.917109676
Zm00001d006056	0	0	0.108700023	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006057	2.489673022	2.61005272	2.011212424	2.118714201	2.730541693	2.431180937	2.293120676	2.119043971	1.851305149	0.717030996	1.763692627	0.324464328	1.122603811	1.107761309	1.396871447
Zm00001d006058	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006059	450.9156165	431.9696133	413.8238564	141.6351602	132.1222653	131.3143481	158.6632344	166.5306718	178.6653938	175.2709948	133.9017169	131.5724333	73.0989174	58.73622491	57.93652352
Zm00001d006060	9.61258635	11.03090247	13.18545215	11.10037102	11.63394888	11.16608809	9.277053748	10.21689141	11.02074524	5.646645393	7.811813638	6.783416856	6.175195861	5.346884057	6.626915998
Zm00001d006061	5.06464598	6.003708568	6.494177787	8.262638537	9.42752149	8.429604724	9.482123903	10.78812786	8.625584783	2.628335818	5.77246244	2.72399644	7.403206881	6.594022788	7.009011094
Zm00001d006063	1.18783762	0.919323799	1.376221935	0.920695329	1.872329363	1.400861234	0.334025214	0.96711135	0.640052598	0.183726046	0.188987553	0.092231258	0.344729805	0.447233525	0.308030442
Zm00001d006064	18.92940081	17.78662805	23.23507659	32.58060546	45.24359276	27.95612165	27.75603538	33.45185168	24.58039689	3.223057348	7.767411514	2.108007896	19.20257526	17.6219437	19.6269974
Zm00001d006065	0.036398386	0.00916878	0.009047204	1.625122689	0.757771379	1.2486041	0.671997933	0.719765969	0.278313692	0.160638002	0.082619159	0	7.592251524	7.046550029	6.716207684
Zm00001d006066	0	0	0.007358445	0.007384223	0.007801584	0	0.027674035	0	0.102228637	0.089824054	0.007466377	0.006558845	0.006625617	0	0
Zm00001d006067	0	0	0	0	0	0	0	0.12704737	0	0	0.132869862	0	0	0	0
Zm00001d006068	0.056884468	0.143292397	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006069	4.156455734	0.958711867	2.215630518	1.561370869	28.55823084	6.822357119	37.68423075	52.06170852	39.47685853	26.43827899	27.86164195	29.60086877	1.490627924	2.053148581	3.265376559
Zm00001d006070	23.03710795	21.98691972	21.68318932	19.76547671	20.90847887	24.65510699	20.00865517	20.22117471	19.38827694	19.774636	24.49940583	20.29389373	21.8064694	21.37297759	20.55662646
Zm00001d006071	7.158028144	7.441616892	7.684619287	8.721458015	10.53827061	8.92266381	9.520652368	9.679685681	8.100400664	3.357341584	7.349792358	3.881610652	7.752756836	6.679712938	6.842442958
Zm00001d006072	0.03731911	0.015667852	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006073	0.329767875	0.213605413	0.140515367	0.528778529	0.422102767	0.60024457	0.297257476	0.284017854	0.336976063	0.142938484	0.10693231	0.052185984	0.126521431	0.320188482	0.239647047
Zm00001d006074	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006078	11.68784247	16.02940358	6.191756647	5.271123333	22.12064223	10.03790821	18.51315301	21.69449037	23.23768143	24.26060395	24.44547292	14.96127993	9.749852946	9.34415561	7.971152201
Zm00001d006079	3.670447475	3.83116755	4.166804588	5.91381665	7.134288712	5.975030327	6.101637351	5.130742855	6.46073069	3.248913519	4.99082359	3.216073174	3.751832224	3.178924299	2.770413042
Zm00001d006080	0.257201217	0.168202671	0.153678091	0.801925501	0.821181584	0.787766707	0.693552979	0.70374774	0.793001082	0.341079694	0.249491528	0.032874904	2.042389601	1.800161499	1.51539081
Zm00001d006081	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006082	0	0	0	0.698676983	0.155403505	0.180616091	0.40195492	0.154059778	0.266663771	0	0	0	0.692889025	1.885481792	1.386275394
Zm00001d006084	15.11791393	16.42061344	15.82775085	9.072271439	8.962894925	8.103822329	8.575673391	9.207969	9.295700803	5.489058288	8.18356606	5.705709815	9.58059313	9.227062872	9.257654317
Zm00001d006085	14.77398081	15.08663091	14.63620605	12.40853884	16.83094022	13.57078079	15.75181699	16.93614028	17.39221503	22.90078904	27.08102823	27.12518428	10.62750857	9.818193096	10.57943316
Zm00001d006086	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006087	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006088	0	0	0	0	0	0	0	0	0	6.761998779	0	0	0	0	0
Zm00001d006089	0	0	0	0.026060634	0	0.019200381	0	0.003149483	0	0.014409542	0.026350576	0.011573842	0	0.002863372	0.015099171
Zm00001d006090	10.22270357	11.22135105	13.00071066	14.96200301	14.40096492	14.78252055	16.0556086	15.83613345	12.2001263	7.690251046	10.77975802	5.768474475	10.86368926	10.93705945	11.8987574
Zm00001d006091	0	0	0	0	0	0.008017775	0.007647122	0.007891047	0.00807105	0.108309538	0.008252688	0	0.124497533	0.028696767	0
Zm00001d006092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006093	0	0	0	0	0	0	0	0	0	0.258286103	0	0	0	0	0
Zm00001d006094	0	0	0	0	0	0.004456927	0	0	0	0.436502139	0.16973789	0.757621616	0	0	0
Zm00001d006096	40.28294538	41.99281032	39.26013168	29.10680449	27.06090444	21.07630213	19.53270709	21.23880449	20.27756886	197.1154398	90.55728421	208.7326265	29.20012724	25.35086959	27.91538746
Zm00001d006097	0.059917753	0.025155544	0.012410993	0.846903983	0.894771534	1.003235088	0.91018063	1.059625177	0.960637687	0.330545838	0.566686564	0.265496669	0.681673875	0.525471557	0.42718411
Zm00001d006098	1.724374103	1.792560214	1.958487691	3.93069698	5.392198395	4.508215409	4.540825711	3.327719093	3.306962869	1.837697046	1.550235258	1.009929489	26.5624186	31.05007968	29.83740504
Zm00001d006099	0.346224057	0.459327573	0.4245511	0.800261224	0.495738407	0.817237749	0.261617286	0.197601238	0.278966985	0.124150014	0.096051922	0.109945639	0.359023875	0.425088125	0.64312016
Zm00001d006100	27.3202201	19.64279539	29.8891658	50.30424411	82.03706581	45.0414009	50.99209548	64.82431811	55.82185611	3.022304671	13.11576353	2.550760871	19.85450516	17.60867729	26.63452953
Zm00001d006101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006102	6.071944529	4.554634376	4.731514459	5.186949273	8.44461173	7.475653171	6.740751297	6.152308887	6.652757266	7.868249036	10.95194026	10.17227431	4.540971502	4.407425059	4.440515658
Zm00001d006103	5.993384728	6.222696975	4.598129637	2.785423793	3.586917487	5.610682877	2.583389473	1.84973423	1.45604313	3.401761518	5.48110106	2.982225171	9.180812856	7.443981677	11.82392982
Zm00001d006104	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006106	0.010647378	0.147514538	0.119093339	3.996963501	4.419287184	4.917774778	1.878660731	2.066968686	1.431297591	2.217358028	1.047281493	2.700982325	0.190636134	0.175080452	0.664730414
Zm00001d006107	9.670599152	8.8088624	9.357376792	20.43148779	24.43816636	19.18216396	7.688100476	9.12714991	9.470233379	18.10862897	19.83854733	15.55885008	8.966560524	7.780560547	10.12902988
Zm00001d006108	7.759129394	8.906246022	6.832610738	5.380531028	4.970939356	5.769956574	4.041178047	3.869653234	4.3052863	0.799315668	1.553910139	0.669016456	3.767055732	3.464678442	3.290790112
Zm00001d006109	4.881166247	4.598389589	5.153912626	9.527308282	20.73292898	10.2099209	21.28432557	25.43238489	23.66332226	16.69300457	18.16566282	10.83624913	3.397210611	3.763035412	6.079158488
Zm00001d006110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006111	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006112	5.959255812	6.291546626	5.724057931	15.77505034	22.40184697	17.61999157	22.99511786	26.14725811	24.79827171	40.99997535	30.40306603	31.37819063	22.39210807	21.4769345	19.74600739
Zm00001d006113	11.22136417	11.59225087	10.41766824	11.47261958	12.70337655	11.18766697	8.245620336	8.062642145	8.128074613	0.490253523	1.677948872	0.276706736	3.891830645	3.307015055	5.087183364
Zm00001d006115	0.575630902	0.557699424	0.165091334	0.138058056	0.350066844	0.081372302	1.125352886	2.095587212	4.109301475	4.916010629	5.960665729	0.993274635	0.049549959	0.084945917	0.383946852
Zm00001d006116	0.103884756	0	0.025821656	0.103648449	0.438026902	0.076363824	0.449140552	0.375784108	0.192178074	0.702043609	0.288204423	0.322220692	0.511501663	0.489693106	0.444388333
Zm00001d006117	0.08866956	0.060916166	0.076805217	0.217818601	1.398481378	0.348940253	0.979589058	1.072392915	2.004826241	0.163053255	0.243960348	0.101200602	0.06614939	0.017673215	0.018638929
Zm00001d006118	5.555523055	5.597761476	5.796562834	5.695684069	6.947247435	6.526778623	7.651729688	7.574875521	7.351686293	3.233764352	4.954596434	2.51782213	4.358857498	4.084806572	3.966106119
Zm00001d006119	34.71923781	26.97638588	40.06961568	54.70262838	69.2032314	50.94527691	62.10217864	72.15357598	70.35714012	41.48074807	69.21087301	38.42884526	45.67254538	47.17747042	58.81079241
Zm00001d006120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006122	0.172398915	0.021713707	0.021425788	0	0.090864345	0	0	0	0	0	0	0	0	0	0
Zm00001d006124	10.9963033	12.14738331	11.25621686	11.1889517	9.769717659	9.929293602	11.03643304	10.76953045	11.14180643	7.795240516	10.57982511	8.011290926	7.556730454	7.11517608	6.752253466
Zm00001d006125	41.53913715	41.76755162	44.45414382	29.90889119	36.79842878	26.0285643	30.14251323	35.82576903	33.61080697	31.16046702	39.91797506	24.73178166	25.37185153	25.43097525	22.16710699
Zm00001d006126	12.50135719	11.2565802	15.80722142	16.65996699	13.56864601	12.56601555	9.203413525	11.46526663	10.1162538	4.240004099	12.07648225	3.722049762	13.8219733	15.2254839	13.72982481
Zm00001d006127	9.210135951	10.57183138	8.946317313	10.79286576	10.71164394	11.63161023	10.35184183	9.949612494	9.665799334	6.636745612	9.162097679	4.535446818	8.45260322	7.545331013	7.770658905
Zm00001d006128	5.697304032	6.636026111	5.64928405	6.771394086	6.251660187	7.270614034	6.210201097	4.830440204	5.907990369	1.271768095	1.896240353	1.224943649	5.46774364	5.633190271	6.272779601
Zm00001d006130	1.686963957	1.682595471	1.484561052	2.742377539	2.492644885	4.312722326	4.12474392	2.921806321	3.198910497	0.134485631	0.30741556	0.027004944	7.114589468	7.541546766	7.237754171
Zm00001d006131	11.69495011	14.20857841	9.576022669	10.64765711	14.30079615	10.5679048	14.09480512	14.56121667	14.89337365	27.95525368	24.91570905	24.05070587	11.3906549	10.19006344	10.60709769
Zm00001d006132	0	0	0	0.005928432	0.012527021	0	0	0	0.005862456	0.013111881	0	0	0.090429536	0.005211018	0.038470335
Zm00001d006133	2.408501652	2.875108558	2.711939037	5.56836275	12.32134515	7.604136807	10.17716153	10.9946525	9.166982511	1.032075148	1.839764757	0.675714873	8.465572835	8.617115167	10.64384033
Zm00001d006134	0.017131872	0	0	0.064098383	0	0.104944437	0.040037185	0	0.084513398	0	0	0.132845373	0	0.075122239	0
Zm00001d006135	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006136	0.071577141	0	0	0	0.062875589	0	0	0	0.029424822	1.085883457	0	0	0	0.183085876	0
Zm00001d006137	2.342703955	3.621245278	2.148009047	5.485884499	2.579575592	4.465766207	1.962157924	1.412383859	2.252770718	0.316319229	0.04131783	0.07259136	8.093840278	6.833445643	6.84697551
Zm00001d006140	0.206670203	0.299347168	0.102740135	0.850575368	0.789723104	1.341956165	0.784855935	1.557482637	0.790133202	0.256529054	0.078185327	0.045787974	1.283551793	0.815612882	0.752657718
Zm00001d006141	0	0.23268878	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006142	3.036493607	1.88573995	0.24838857	0.341090857	0.924024433	0.489715584	1.429909745	0.972406035	0.812967305	0.251462951	0.362572171	0.236934271	0.164795868	0.149907305	0.267551576
Zm00001d006143	0.683693683	1.014054019	0.344471563	0.668311351	0.789562732	0.646809505	1.039490259	1.040818221	1.32825885	0.808222548	0.7356652	1.658014909	0.298349783	0.234396181	0.30213852
Zm00001d006144	0	0	0	0	0	0	0	0	0	0	0.016560869	0	0	0	0.015183297
Zm00001d006145	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.022044368
Zm00001d006146	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006147	0.206927348	0.132521573	0.126405552	0.31055979	0.365083286	0.266404872	1.04504449	0.266423028	0.627183513	0.149949064	0.061918446	0.077703297	0.15698871	0	0.008109703
Zm00001d006148	1.538673625	1.808324232	1.61706377	1.46802621	2.851614323	1.442106744	2.93591598	3.707397993	3.258162822	1.583373588	2.842247944	2.906082293	0.821041859	0.708839236	0.948958987
Zm00001d006149	0	0	0	0	0	0	0	0	0.016196372	0	0	0	0	0	0
Zm00001d006150	0	0	0	0.019463664	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006151	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006152	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006153	5.324937266	5.333185165	5.331620253	4.156716224	7.415960797	4.996790336	10.76692307	8.550819287	7.668507406	36.45891776	20.08510882	26.89251009	4.296296021	4.446658691	6.114539834
Zm00001d006154	0.159642859	0.127954127	0.39680923	2.579245445	2.55291913	2.222549381	0.763129154	0.402485258	0.778586412	0.050039505	0.155561411	0.016076829	0.828265432	0.676159963	1.115803081
Zm00001d006155	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006157	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006158	0.579394044	0.48132377	0.873279564	5.996002034	19.97929963	9.046645761	23.69576806	39.03338547	23.21538856	344.8284828	215.0552629	178.9466704	14.33290639	15.09499769	19.0410865
Zm00001d006159	47.95782058	47.21095293	58.7031444	105.9095209	75.5438229	111.0582666	42.39671012	30.85809198	39.57292931	10.87398158	15.85337812	5.913516887	97.182216	89.25523634	89.06449658
Zm00001d006160	44.8798957	42.56242872	53.00825777	23.78643738	30.64058209	24.32265275	25.23359878	27.37843199	27.28902489	3.671178081	7.925775172	2.061237847	10.81020396	10.27267508	12.23232412
Zm00001d006161	0	0.069106233	0	0	0	0.056017164	0	0	0	0	0	0	2.210359027	2.34577357	2.188497056
Zm00001d006162	1.251667825	1.393010573	0.844838938	0.746870109	1.101873611	0.931976176	1.002367433	0.962782416	0.964783478	2.165261119	1.176991544	1.010023266	0.561470058	0.650575192	0.854536801
Zm00001d006165	12.65243099	10.09208497	11.4468728	8.155922151	11.31988555	8.78781253	9.266370677	12.36744732	11.63080539	12.30409446	14.13217499	10.37076869	2.049050469	1.62999372	1.528054339
Zm00001d006166	5.980784577	5.387154298	4.952770623	9.310439898	14.80711733	12.23946371	15.70467949	18.86131851	17.20558519	24.51051202	23.73070812	26.64250314	6.454394819	6.362923859	7.505474623
Zm00001d006167	2.740959338	2.771192616	3.035699834	6.022905074	8.731757419	6.336892054	5.512320987	6.726856725	6.585959009	2.443008894	4.105401467	1.39215863	5.84649978	5.310410753	6.161076227
Zm00001d006168	0.726540126	1.327510389	1.055556834	1.437863628	1.415759667	1.048910221	1.064191982	1.20507188	1.295661248	1.895838037	1.939914902	1.05421156	1.717651543	1.697616408	1.660241238
Zm00001d006169	0.017196521	0	0	0.085787018	0.045317878	0	0	0.02073509	0.084832317	0	0	0	0	0	0
Zm00001d006170	2.373605889	0.9965218	1.806542841	0.458954775	0.290937114	0.563564338	0.150503174	0.399352802	0.204231234	0	0.672888389	0.020382736	1.482497418	1.593491318	0.276548529
Zm00001d006171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006172	1.286615851	0.78655723	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006173	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006175	7.766448677	7.307632927	8.72953183	7.349947921	11.81359835	7.304132811	8.274351636	10.81056895	8.63445221	2.315512253	4.00391174	1.745967759	5.585184828	4.457252853	5.942034612
Zm00001d006176	16.7534548	18.03166445	17.32716916	16.82024766	17.31546831	16.81265602	15.38916025	15.67163838	15.57439832	48.51577361	44.84689593	60.33497588	8.825838433	8.747087264	9.191749117
Zm00001d006177	0.132466614	0.203205233	0.07387239	1.037836428	1.103208841	0.78440035	1.645110538	1.462094274	1.304850127	1.182822009	1.180020545	2.206751424	1.294200295	1.092832608	1.299807154
Zm00001d006178	0	0	0	0	0	0	0	0.228949948	0	0	0	0	0	0	0
Zm00001d006179	0.095292058	0.14402484	0.078952833	0.62591237	0.652918584	1.01958007	0.712632132	0.237461098	0.344729838	0.035046256	0.064088716	0.358904739	0.718008143	0.327315834	0.69774728
Zm00001d006180	0	0	0.023451552	0.011766853	0.012431923	0	0.011024732	0.011376395	0	0	0.071386603	0.020903206	0	0.020685834	0
Zm00001d006181	0.069538321	0.005838918	0.109468411	0.317992317	0.280989282	0.261261471	0.276268798	0.240362509	0.234410764	0	0.005846004	0	0.041501661	0.050820233	0.06967635
Zm00001d006182	5.725559505	5.11826925	5.48605975	20.15903277	25.18176308	17.59215588	15.97483695	18.87956491	18.8939213	6.911667424	10.96933454	4.386546645	5.244801954	4.013582193	5.538788845
Zm00001d006183	13.24371097	15.16083018	14.07425609	10.14242211	14.94686898	12.07008341	12.88866275	12.25733423	12.93530715	7.232728831	10.84230538	9.976973693	4.603385712	4.697071509	5.228329774
Zm00001d006184	1.321610962	1.554337215	1.229157121	4.562721519	3.967200114	5.179149053	3.824960959	3.292657889	3.238237451	1.122602017	1.026445202	0.261778526	4.946074021	5.871942804	4.836861824
Zm00001d006185	13.0424383	13.18247533	15.20083354	59.35938225	67.93949969	59.30534695	53.43511855	60.10445656	57.76070726	17.12045982	24.5297183	11.3133406	48.12006745	57.22366902	56.78601473
Zm00001d006186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006190	0.003607186	0.013629791	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006191	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006192	10.69809263	11.0960854	11.20825388	8.57387406	9.84198484	10.3396016	8.301307868	9.21390327	8.324069956	4.424171909	10.51098955	4.379791822	8.130820219	6.58142182	6.416399863
Zm00001d006193	0	0.048687002	0.048041422	7.440366312	2.15622974	16.22818835	1.48305508	0.419489819	1.199775623	0.008885431	0	0	19.66029461	16.4700376	26.94138655
Zm00001d006194	16.24003265	18.86409421	18.21715101	18.66106704	16.98121488	18.40270887	14.0924517	15.88941802	15.21375748	12.83012908	17.56928874	12.45954214	13.57705689	11.31175843	13.37285798
Zm00001d006195	0.806449192	0.447403005	0.274427629	0.167628075	0.4427563	0.023524062	0.684315347	0.833480708	0.982735329	2.648158074	4.878978529	2.180194077	0.064460182	0.326259472	0.466182659
Zm00001d006196	43.62506105	46.88461041	37.67215227	47.44672744	56.74027406	55.57951712	69.34395514	82.23676319	67.69428259	24.15120163	46.94150393	22.74491902	20.34076839	22.28387273	33.50595367
Zm00001d006197	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006198	31.03476353	28.11465197	36.30320826	39.62176784	41.67454327	35.10375103	80.13284466	86.29752247	81.25544527	21.19953446	33.61996907	24.07013611	49.50230215	47.49406517	50.75467373
Zm00001d006199	188.6287135	248.6289568	167.3671078	328.5051272	336.4778732	251.9153553	618.9907585	708.7444059	657.1717752	150.1399581	226.8227249	62.52993055	173.3544735	155.9645032	245.4904993
Zm00001d006203	22.08266289	21.4477198	25.18603585	31.71898167	34.07293801	25.68895967	35.06833365	40.10689549	40.75915341	17.082957	23.46089567	9.482924846	19.70701034	19.37557003	21.44371077
Zm00001d006204	20.06756499	21.79001152	22.27662968	20.56260729	20.5022569	20.52145919	18.83399695	17.89027266	18.70342419	12.37741131	16.32868855	8.704603301	24.05501696	24.41107311	20.88455649
Zm00001d006205	0.04976787	0.050146253	0.05566649	0.111722992	0.39345882	0.06097245	0.261691905	0.282040998	0.233234828	0.01372762	0.081586545	0.011026118	0.061261029	0.185494775	0.408522991
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Zm00001d006211	0.218390318	0.187043121	0.607972132	0.664575312	34.12848819	2.536450042	102.0654279	144.9573552	157.0982033	997.6101839	1092.390525	883.5797863	0.175957761	0.095762854	1.41393846
Zm00001d006212	51.78239478	53.08567444	73.31726815	54.28556232	38.88382467	57.86182461	14.53728832	13.26714554	16.2955627	4.979981441	6.595070907	6.996971485	1.740232382	1.033377073	1.52085531
Zm00001d006213	128.5788203	144.7265302	185.9651708	307.7303869	234.8642028	272.8624438	178.8912121	210.0195544	192.756608	61.41760167	68.85034525	21.08710097	72.20011768	63.74169533	84.33100996
Zm00001d006214	8.083665101	8.998543209	8.136193069	5.666820312	4.84155213	8.185344823	4.584615196	3.253024984	3.683609178	11.19680609	2.645037532	2.502905589	11.30944175	11.98568617	12.08188441
Zm00001d006215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006218	0	0	0	0	0	0	0	0	0	0	0	0	0	0.033527711	0
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Zm00001d006220	9.80852823	10.22769095	8.68135389	11.05045986	14.39793626	10.29501096	13.94883117	15.64714131	12.922222	14.0551473	20.75285402	15.96883805	11.91593245	10.67952419	13.21477414
Zm00001d006221	4.502346949	4.223110144	5.520350174	17.52438447	22.14725067	15.99743278	14.84387504	18.12033188	17.38264849	9.820749456	11.28982282	7.00738349	16.20756598	17.20365755	17.93390181
Zm00001d006222	0.018228312	0	0	0	0	0	0.031949674	0	0	0	0	0	0	0	0
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Zm00001d006227	22.18961055	27.46892665	26.39576603	17.99871898	21.44626011	18.61273515	20.85171693	21.74610545	19.70957653	15.69492206	16.5924705	9.141387582	13.44740395	12.19378125	13.81634615
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Zm00001d006235	28.27410502	29.13034892	32.80999482	50.32637308	60.56481174	48.74767221	45.39284096	47.74205087	48.77765797	17.33095655	30.62739809	14.28035126	27.20280953	25.17606957	27.57876242
Zm00001d006236	0.56953246	0.661673464	0.448487253	1.42977722	2.073421064	1.446638994	0.938008921	1.083370267	0.696336378	2.447850998	2.126734955	1.764894552	1.40925768	0.858469538	1.430441602
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Zm00001d006238	11.39362991	11.03653291	12.09633867	24.67622043	24.304292	25.84191089	30.61898374	30.98011272	27.39732255	11.3732793	7.55526277	4.325188047	33.77985071	31.62190045	36.44351991
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Zm00001d006244	6.909118218	6.80783087	10.63847962	11.07062313	11.39834582	11.30462516	8.747181191	8.030859699	10.43142796	3.290637583	7.614630013	4.459385124	7.453139619	6.718687006	5.935350438
Zm00001d006246	1.63903422	1.873699643	1.758401998	2.596011812	3.674888067	3.245679353	3.656931371	3.605084098	3.751946769	2.473298437	4.240213712	3.2088268	1.970958815	2.157396808	2.685910995
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Zm00001d006251	52.4955479	51.29654853	52.42519866	79.33991701	86.84022824	72.08680164	89.23523569	111.8809021	101.9449598	62.08901781	112.7414984	72.37328885	63.67203506	58.31112605	78.51130854
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Zm00001d006257	5.05025168	7.882397488	4.513735254	9.020951181	4.296929376	6.669676779	3.908831748	3.420420022	3.569166725	0.543079755	0.501383086	0.186340154	6.934829177	7.246176483	6.103978319
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Zm00001d006268	0	0.016336783	0	0	0	0.063564069	0	0	0.015996606	0	0	0	0.058059012	0	0
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Zm00001d006270	22.07486634	22.14095827	20.59377131	11.25073855	18.00271087	13.03401141	19.99263817	23.18269613	23.34379679	48.71064151	54.54090491	59.48587713	8.502349456	8.285094054	8.566676797
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Zm00001d006287	38.19237705	32.52959501	52.11908868	80.49417783	127.1296358	69.42888658	71.87659121	85.92885268	67.61351795	3.530787473	21.58826354	3.434010583	38.35356165	30.22196388	51.02156405
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Zm00001d006293	0.580081123	0.619164679	0.458216013	1.676814622	2.040404439	3.21913381	4.150240811	2.960789613	3.05257928	2.315333834	2.650140995	1.524784	4.538404725	4.278888184	5.140725285
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Zm00001d006295	4.12481495	4.337039531	3.928973939	2.910224603	4.141449285	3.357007191	3.133328147	3.118430797	2.814588297	5.011802358	5.594178994	5.031892261	2.996580885	2.437577767	3.396640214
Zm00001d006296	14.04705863	13.41985394	15.41350983	18.95545485	20.09435705	16.68335547	14.77715192	15.55747998	15.89129479	1.477560644	4.976233671	0.846160049	11.29776871	10.75727801	12.15484441
Zm00001d006297	1.430824482	0.722085827	1.023092889	0.67222892	1.452730349	0.414225849	1.20813283	1.465279664	1.281150421	0.567673972	2.273931959	1.194179912	0.383834581	0.983010848	2.232075253
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Zm00001d006308	4.589930235	4.255976036	3.954569356	7.471521407	6.65084191	7.175735292	9.871165982	7.91115205	8.282617681	8.611886419	8.477894271	11.01125334	16.17297767	16.63837679	15.6267555
Zm00001d006309	8.687848653	9.947195137	8.518161773	18.8147708	21.66505194	19.05889149	18.02751761	20.23326698	19.64329926	3.086727221	6.562271034	2.002965397	20.3281536	24.09585197	25.70144011
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Zm00001d006339	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006341	1.575189463	3.005546734	1.519370228	1.246143113	0.526630366	1.094526262	0.728002028	1.091400266	0.289947085	0.0972737	0.133412538	0	0.355168395	0.283500866	0.801842573
Zm00001d006342	97.41909434	114.7394061	86.0488497	36.11302233	27.28776053	29.90978666	27.48037474	32.30015859	27.31160563	7.589017871	20.51212177	5.843538433	26.8738955	27.32398584	31.7349144
Zm00001d006343	0.038492447	0	0.007973088	0.056007128	0.008453241	0.007859752	0.029985616	0	0.007911977	0	0	0	0.179476182	0.112524724	0.14092465
Zm00001d006344	26.5082058	27.22880436	23.4727444	27.92801399	28.32460915	24.64915867	26.51111963	22.27416696	22.22914681	21.82650887	27.76017653	24.53534267	21.81947322	22.44079135	21.39713169
Zm00001d006345	3.709572619	3.28105368	3.600152921	4.79536028	4.627034743	5.36176486	4.018061123	3.605961674	4.433571595	1.738903311	2.29952462	2.146991835	3.789655996	3.084191622	2.44556391
Zm00001d006346	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006347	2.405444956	3.127749562	2.763668979	14.46027066	8.813108192	15.05301749	15.6614066	12.25896555	11.39679225	0.763742197	0.905638456	0.555932662	12.16137878	11.60060913	13.11482255
Zm00001d006348	34.55041589	30.85466221	29.7217721	18.5146747	19.49823835	21.26391217	19.31036505	22.07896087	18.87378356	22.60742904	27.73788268	32.71057555	13.49306447	11.94136713	14.00668681
Zm00001d006350	14.10176449	13.82749861	13.30621328	11.29927004	10.85807583	11.77066082	10.12769359	9.403391769	9.622550803	8.526366724	11.02970342	9.584463379	8.376167291	7.741844786	8.479250563
Zm00001d006351	0.386369443	0.16712674	0.329821348	1.961523969	4.021363303	1.133184218	2.594827926	2.376425947	3.364383578	0.139944911	0.718532752	0.518790951	0.227098084	0.256698031	0.839246659
Zm00001d006353	0.308726932	0.245139971	0.38368674	1.155092511	1.299969014	1.529375836	1.662575078	1.497110114	1.994777586	1.101488156	1.210260498	0.847549566	1.261736061	1.655399856	1.590668372
Zm00001d006354	0.798768723	1.083440791	0.954530885	0.734370613	1.065988502	0.62730832	3.404375365	3.389488213	2.822700029	4.717252249	2.627949395	9.143344005	4.641133069	5.175247017	5.185727106
Zm00001d006355	2.132319075	1.803656108	2.07310374	1.903731199	2.2497881	1.894218397	2.201999107	2.172619704	2.411404382	2.897412619	3.616650728	2.902489811	2.249657243	2.065818339	2.210539472
Zm00001d006357	11.22882143	12.0875323	10.17879018	12.21689679	12.40433871	12.48816317	12.4486392	13.26193009	14.06110257	10.75464203	13.4674076	10.74126497	7.90093426	8.806372597	8.453146623
Zm00001d006358	0	0	0	0.027981679	0	0.03665018	0.043694849	0.099194944	0.036893705	0.08251591	0.132033974	0.008284668	0.041845049	0.008198516	0
Zm00001d006360	2.177431076	3.02901052	2.975383198	11.02451555	17.2145093	8.547100709	9.405153607	11.41629342	6.199077868	4.661429692	5.12278068	2.796068776	26.59668632	16.97009595	34.98069185
Zm00001d006361	6.946379272	8.649343582	8.082357697	12.01800169	14.53201141	10.89469012	10.55744433	14.25213424	12.37211595	0.676506308	1.995354697	0.368092388	4.975569998	4.093640348	5.250310259
Zm00001d006362	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006366	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006367	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006368	14.89461056	16.93648102	17.91556954	34.22748496	49.66236156	38.19451608	38.31101836	37.68915647	34.22376688	208.4160832	106.2803583	152.2003791	34.36184327	34.26532037	34.39325848
Zm00001d006369	1.652363857	1.476576066	2.283011007	3.707059219	3.259766034	1.66247294	2.416180605	2.882821487	3.460883586	0.611096896	1.175709873	0.357902119	1.580471378	1.386362915	1.515479618
Zm00001d006370	2.758826757	2.987270607	2.731087939	2.967136769	2.827882988	2.402364451	2.855022516	2.937243819	2.583470154	1.651984466	2.088769317	1.255765761	2.418045297	2.11139555	2.190715667
Zm00001d006371	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006372	0	0	0	0	0	0	0	0	0	0.068688107	0	0.165512268	0	0	0
Zm00001d006373	3.157051972	3.129043994	2.926967628	3.159838558	3.391091341	3.332527314	2.878054518	2.995556753	2.904533553	1.40727295	1.533664266	1.162795044	3.446384781	3.333826594	2.842982469
Zm00001d006374	4.816952074	2.531995139	3.377367447	10.03563971	23.49505824	11.35939104	20.41265316	25.4282723	20.59650043	0.61441582	1.502782493	1.085706543	7.546453662	9.712479323	8.504878918
Zm00001d006375	0.009751237	0	0	0.024322639	0.012848685	0	0	0	0.072155876	0.161382757	0	0.334861304	0	0	0
Zm00001d006376	0	0	0	0	0	0	0	0	0	0.067945533	0	0	0	0	0
Zm00001d006377	8.209935739	7.95697653	7.690504627	13.46963421	11.14014799	12.35028112	11.52710603	13.42176893	12.01526986	13.77399003	9.717839455	12.44229763	20.58862721	21.77831272	21.69555678
Zm00001d006381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006382	6.341551325	7.136498883	6.765947216	7.417525875	5.368722507	6.298164051	4.527178174	4.094705924	3.895019951	2.311577909	2.180614161	2.255028936	5.469266526	5.07675645	5.11555903
Zm00001d006383	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006384	3.182881511	3.277076645	4.144060916	7.044379133	10.64455147	7.594672997	8.583670703	8.894020136	9.844592879	6.716965857	9.702998431	7.896788477	3.301682576	3.145806225	3.487091576
Zm00001d006386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006387	1.553063572	1.830468901	1.151008061	4.984442577	4.31806874	4.398938299	4.545211555	3.779642699	3.00482786	0.196507405	0.826507317	0.063134435	4.424541484	3.818961749	4.439464672
Zm00001d006388	27.42370607	20.2008626	33.24571111	47.32941895	83.50905723	42.69749049	52.52168379	67.25297815	51.29690663	5.153882111	16.37640787	2.931168874	22.03874271	19.46514147	29.88076696
Zm00001d006389	3.780584929	4.175556804	3.569234178	4.900421436	7.354297438	6.446644816	10.01926329	9.432461163	10.20454604	9.505292723	11.26407265	10.08404744	5.718853641	5.937403049	6.462396475
Zm00001d006390	2.896086936	3.146976811	3.511048081	7.613263812	7.089565472	8.731115609	6.519325982	7.069632026	6.880733372	2.192883878	4.833606892	3.003712513	5.544334227	4.964503486	5.514800473
Zm00001d006392	0	0.013255558	0	0	0.01386748	0	0	0	0	0.116119387	0	0	0	0	0
Zm00001d006396	0.262547702	0.094479944	0.04661358	0.046776872	0.988414613	0.275705879	0.810794194	0.339185108	0.462563045	0.129320202	0.165540538	0	0	0.082232574	0.780533929
Zm00001d006397	40.23681945	26.88450365	40.12760525	8.991808235	154.9965629	29.31968661	70.5970445	124.0956315	93.9767028	9.041982506	18.74521658	5.300005627	2.809504977	2.004483114	3.231264422
Zm00001d006398	0.017067708	0	0.275753367	0	0.449784178	0.020910277	0.53847765	0.905509905	0.547279648	0.141235097	0.667210739	0.037813664	0	0	0
Zm00001d006399	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006400	0.066486244	0.08373967	0.092957962	0.165837519	0.438026902	0.203636865	0.194222942	0.140292734	0.102494973	0.011461936	0.010480161	0.009206305	0.678902208	0.373533346	0.422769441
Zm00001d006401	2.326224516	1.911477984	2.504536179	5.073162468	4.212521453	4.419698198	6.308534336	7.004743437	5.185462213	11.90654279	6.259059115	5.691197314	3.313061728	4.568341259	4.429654338
Zm00001d006402	4.169334245	5.02265677	1.624345101	1.182681213	0.86873707	0.973207487	1.32020641	1.260756881	1.278770132	1.484116225	0.893674731	1.201704511	0.984801481	0.940859363	0.957012203
Zm00001d006403	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006408	0.448073945	1.009560861	0.272246391	0.95620035	1.102085893	1.189395763	0.954068922	0.636324108	0.976259015	0.034331547	0.219736074	0.033090399	0.941534926	0.649468142	0.817343523
Zm00001d006409	9.262806809	8.969310421	8.238415631	10.05166318	8.37341334	9.976632223	8.375526133	8.782716032	7.642475119	5.68273307	6.678031132	4.708495022	5.879259178	5.718747456	6.278285528
Zm00001d006410	8.465043722	8.736443715	8.851877972	5.056200112	5.093855015	4.714510212	4.486208464	5.070067094	4.486276869	3.21428286	4.472698621	2.461482034	3.012111155	2.91917644	2.843048355
Zm00001d006413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006416	0	0	0.046045121	0	0	0.060520803	0	0	0.015230734	0.510972506	0.0778675	0.068402767	0.082918969	0	0.01427806
Zm00001d006417	0.188531595	0.128904817	0.294558152	0.127641146	0.269711009	0.052794743	1.164438469	1.123640877	0.657676074	14.51633028	2.907274248	20.02541929	2.905398336	4.068544104	4.596016275
Zm00001d006419	0.710869487	0.589615957	1.055855216	1.167671749	2.124652681	1.285126816	1.661302003	1.588857467	1.667866828	5.236803959	3.596648983	2.323993753	0.999207751	0.893321084	1.192702369
Zm00001d006420	0.04638605	0.233693605	0.015722378	0.231402676	2.044756055	0.129157404	2.907203516	4.367703997	0.728087359	9.543759125	10.61405605	10.47773829	0.556825685	0.143304592	0.697171846
Zm00001d006421	4.663468899	4.913324691	5.288918212	22.53453063	31.33149331	22.18010883	34.9125814	41.69205271	36.65119188	20.34664685	22.38275544	8.623060355	41.51046182	39.45963683	48.03244835
Zm00001d006422	4.190163483	4.348644793	3.853220355	6.603165632	8.037583508	6.403418875	7.460068784	7.779874064	7.665474115	7.195825862	7.787088591	6.171961799	5.462887932	5.230930261	4.971661767
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Zm00001d006433	3.172093362	3.633582933	3.750967394	5.421865413	10.06794352	5.975356257	7.221193618	8.57238578	7.842396837	3.341863094	5.09206914	2.284117682	5.181232525	4.866356995	5.371854059
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Zm00001d006439	23.69121885	24.8182348	32.88032921	42.74486549	64.56279681	43.83814006	49.68705853	57.3200853	56.38349861	21.82675885	30.44904278	13.95085804	39.05015106	38.07089169	44.81542862
Zm00001d006440	47.39361092	47.6950223	47.0225003	33.53703032	29.85305158	32.53975936	29.33903683	30.29433289	27.85202619	20.10075403	25.31564775	21.01449213	22.05879385	20.12398474	19.47052248
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Zm00001d006455	22.15660984	19.37233418	20.81687822	15.27197958	16.90825278	14.99460837	13.22513036	12.30053932	11.32846141	1.766285996	4.447200877	1.195056622	6.078473157	4.924163973	6.622832191
Zm00001d006456	0.026614991	0	0.027564325	0.005532177	0.046758874	0	0.114031931	0.07488045	0.087529775	0.12235487	0.178999243	0.27025973	0.019855353	0	0
Zm00001d006457	11.71198065	11.02233411	11.31244495	9.010390336	8.22527596	9.788107474	8.489811833	7.717217341	8.061054147	5.869633937	8.060597512	5.881104852	6.364245415	6.5806274	5.81706738
Zm00001d006458	47.50753787	48.21311519	43.11377376	47.9536028	39.40531072	40.40728128	39.0717887	40.38677075	31.2620343	4.39947328	14.36655382	3.975397785	37.86391062	25.54015275	27.85774377
Zm00001d006459	9.004377598	8.874763101	8.097131313	8.883281789	10.55601889	9.692915124	9.492424121	10.05378862	10.26108656	9.548916795	10.1539744	9.281761082	6.542236959	7.419278551	6.345937619
Zm00001d006460	0.711462173	0.808237354	0.114426825	0.942978784	0.749964631	0.970766026	1.13453944	0.733387424	0.753557681	0.507927527	0.48553088	0.194713361	0.886691455	0.730993045	0.961251428
Zm00001d006461	4.703840778	4.745219537	5.153299396	7.923845769	10.61150526	7.06700031	8.290243553	9.105730487	7.780676245	3.558830811	6.543136537	2.321355102	6.860336208	6.24402699	7.287555422
Zm00001d006462	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006463	6.861509449	5.707044886	5.34175731	5.71568195	5.697564408	4.314170398	6.504905197	6.11920769	6.721816364	7.874057291	9.207654946	7.830328971	5.287851001	6.96833463	6.525884528
Zm00001d006464	46.14810071	41.27905932	32.78405733	2.428434991	2.903282692	1.870780126	1.892072142	2.520852196	1.693625698	0.508827494	0.801253076	0.420046314	2.500062852	2.269378646	3.400500797
Zm00001d006465	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006466	25.81820383	26.52117174	26.42338979	43.19376371	26.08903331	39.06205644	31.39881745	28.81927202	29.59294933	8.452190045	6.202388062	4.055906662	56.42878866	55.69264908	56.75558265
Zm00001d006467	11.83433285	11.10520174	16.98093526	7.954796242	10.95868676	5.343633923	12.22088727	11.89440139	5.832221791	31.97460855	9.975267556	10.50321547	14.84370436	13.72726843	15.41721863
Zm00001d006470	10.50672495	10.95487752	11.0223606	25.92433614	17.71514941	22.77428525	16.96414157	16.38956213	17.52228732	2.271519199	6.837604497	3.459374432	28.08099283	29.51732	27.73906646
Zm00001d006471	4.821174971	5.116857831	5.60069918	2.803151646	3.953719392	2.691701876	2.081390593	2.520425563	2.335373017	4.231305991	4.697916242	2.950444954	4.263221014	4.102452339	3.995303914
Zm00001d006472	8.133175838	7.370617962	6.616051789	6.965978875	8.085849603	7.692480974	7.423957762	7.791484817	7.835514602	12.44117175	9.643842965	11.05616754	5.914192368	5.880366085	5.376535115
Zm00001d006473	0	0	0	0	0.006859808	0	0	0.006277379	0.006420572	0.014360157	0	0	0	0	0.012037938
Zm00001d006474	106.7420281	110.4816205	104.1879466	93.15263807	104.0470145	115.3082941	101.6700413	104.3104601	99.47251915	272.9956179	202.8733593	264.0978547	114.3602675	111.3412573	116.4001136
Zm00001d006475	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006476	0.008769233	0.025771389	0	0.003645536	0	0.02864936	0.010246849	0.038770228	0.003604965	0.024188436	0	0.012952211	0.026168142	0.012817521	0.003379477
Zm00001d006478	1.38667118	1.438761097	0.774372777	2.399822839	1.513228324	3.158236712	1.520393329	0.935441609	1.34099879	0.025274645	0.123251936	0.006766922	1.209938921	1.125020985	1.129995501
Zm00001d006479	30.40503953	28.26215934	28.54295374	21.80944959	23.57403876	20.7847498	16.43395628	18.25614432	18.45353383	17.2069388	18.78059264	16.31895574	16.13575385	15.53561916	14.66704687
Zm00001d006480	56.7841486	61.5026419	48.48311654	29.95966247	28.29095522	29.58672586	30.51794261	26.83678769	28.40761921	22.89478546	24.14577885	29.02387614	10.66426372	10.98621119	12.28720373
Zm00001d006481	4.033629828	4.256265599	3.300548517	6.173006327	5.497471921	6.40352518	5.459868259	5.104965047	4.889142929	0.541440968	0.922177441	0.187599209	6.942922914	7.535636161	7.146434173
Zm00001d006483	0.061336543	0.017167467	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006485	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006486	0	0.04575457	0	0.120816084	0	0	0	0.05840353	0.074669721	1.18573682	0.305400613	2.776691861	0	0	0
Zm00001d006487	0	0	0	0	0	0	0	0	0	0.016895059	0	0	0	0	0
Zm00001d006488	3.421328365	2.943716758	3.228398435	7.392504142	8.255577824	8.202072431	9.139054505	8.700569583	8.855628967	1.019445405	2.29036306	0.475698622	4.529694183	4.715235722	5.225196369
Zm00001d006489	5.383491078	6.780526933	5.194032827	6.301789906	20.06724928	19.35262418	32.19798742	27.16081865	22.42232419	17.64999643	12.3269498	13.57500749	5.575119164	3.675540434	5.623484087
Zm00001d006490	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006493	0	0	0	0	0.025919218	0.060248677	0.14940495	0.005929639	0.012129801	0.135646658	0.037208341	0.05447616	0.022012302	0.043127732	0.039798807
Zm00001d006494	0.422874833	0.662517884	0.269184191	1.054782294	1.814296356	0.574941918	0.548362943	0.665345302	0.655082448	0.526315174	0.546265041	0.108541335	1.477340149	1.26633822	1.043386312
Zm00001d006495	0	0	0	0	2.634679667	0.39878886	0.652034161	2.130636247	0.630832153	4.040332604	0.996862918	1.030229423	0	0	0
Zm00001d006496	3.049510153	3.043007578	2.892804592	3.913454942	6.284467658	3.921065686	5.0739043	5.391179153	4.950932399	1.70161278	2.809837842	1.489142233	2.905570466	2.810041256	3.670422954
Zm00001d006497	11.67979085	12.80517381	13.92666925	11.99195282	12.61570405	11.84721946	10.64456635	10.17636727	10.16683507	1.156432976	2.833084413	0.610823025	5.706359055	4.511052896	4.783892453
Zm00001d006499	0.794520609	0.781111944	0.585030571	0.903916822	0.781070834	1.217508421	1.388230502	0.888938109	1.050512783	0.463729193	0.562203636	0.452482618	0.811054468	0.80818336	0.86386293
Zm00001d006500	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006502	2.599013558	2.714582551	2.967455058	7.167923043	8.018532648	7.766212737	8.172598191	8.407806421	8.729894441	3.75932029	7.354254442	2.785441003	7.330062474	5.304477672	8.452567196
Zm00001d006503	0.017774085	0	0	0.044334136	0.003903327	0.003629281	0.010384509	0.057150669	0	0.004085566	0	0	0.003314962	0.003247429	0.020549268
Zm00001d006504	1.67092859	1.645368217	1.940128895	3.229331322	2.623556512	3.953940424	2.457667223	2.186648115	2.279759759	0.041899746	0.088409562	0.082841012	2.390234952	2.351788374	2.553246565
Zm00001d006505	0.135664026	0.085434672	0.091965628	0.615251958	0.219383907	0.475956394	0.713355371	0.847641484	0.555169544	0.034018738	0.054433492	0	1.718240364	1.399316891	1.176345959
Zm00001d006506	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006507	1.951230395	1.843981247	2.111282734	4.473465917	5.621014992	4.768678315	5.627767522	5.335514509	5.286004107	3.216749296	4.443657857	2.860541559	3.208853861	3.265237501	3.087619861
Zm00001d006508	0.087013974	0.113809592	0.141415445	0.642772622	0.427746405	0.282910677	0.258100181	0.347039921	0.165095941	0.032309473	0.029541996	0.096390131	0.670364848	0.564989119	0.835754078
Zm00001d006509	4.943722974	4.856374138	4.98087509	5.896226099	15.39979175	8.634280521	12.59105054	13.49424828	11.41457543	19.58304373	15.1113617	14.8785263	6.069290068	5.252864326	8.453196156
Zm00001d006510	32.95894033	28.1476147	43.00954145	51.82161106	97.18176367	48.59926532	66.53234675	78.28567506	62.23632153	7.467740623	25.99763097	3.837319481	26.41963572	23.65089254	33.69184787
Zm00001d006511	0.235936923	0.107309015	0.10588612	2.108793783	54.51652685	19.4148617	116.5642345	123.6566789	71.34561542	6.055979518	2.669451706	3.753423102	0.982744806	1.120783473	2.295858608
Zm00001d006512	1.252198834	1.471603716	1.594919137	3.959461518	5.732255158	3.848487104	6.045818327	6.319499709	5.825851938	5.890913434	5.52822978	4.355001693	1.792422028	2.049870142	2.563254286
Zm00001d006513	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006514	0	0	0	0	0	0	0	0	0	0.062745043	0	0	0	0	0
Zm00001d006515	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006516	0	0	0	0.30860036	0.489063973	0.378939641	0.987885844	0.944807023	0.55947105	0.028438741	0.026002812	0.022842191	0.092298943	0.045209311	0.357597558
Zm00001d006517	4.395860592	4.054309299	3.973835144	4.58424379	5.99045694	4.740320416	5.758225425	6.784262126	6.302776049	4.002216259	4.906313662	2.541921016	3.487876907	3.293109145	3.584887407
Zm00001d006520	282.8136612	335.9235556	329.0330813	742.978203	362.8156947	733.9727381	496.0260602	360.1916657	527.0620106	38.44076038	36.26206593	23.78365456	627.1652236	639.6956605	543.3114157
Zm00001d006521	83.87524307	81.09014801	64.52648185	79.58478688	56.54959574	58.72409133	57.01588146	64.26234138	43.89878426	71.4914408	50.86110455	53.18999127	184.2666784	159.6621273	181.1243261
Zm00001d006522	0	0	0	0	0	0	0	0	0	0.015786954	0	0	0	0	0
Zm00001d006523	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006524	0	0	0	0	0	0	0	0	0	0.123234546	0	0.024745707	0.02499763	0	0
Zm00001d006525	0.501880834	0.316060384	0.162172134	0.275406562	2.155843305	1.832320623	1.231540293	1.343441983	0.916058224	4.360711401	1.70879715	1.845789895	1.156938784	0.715233213	0.881968955
Zm00001d006526	0.51784977	0	0.180203861	0	4.230526865	0.43141704	5.179719859	4.133587235	3.716956887	34.46730203	16.43011337	30.57557027	0.01158981	0	0.287378401
Zm00001d006527	1.837531441	1.203476378	2.062932833	6.622982657	21.16950948	7.901808306	14.88694483	19.88171803	19.76114093	18.30579608	16.27437037	14.96795957	1.850631018	2.135228481	4.001023216
Zm00001d006529	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006531	0.225284861	0.014934059	0.279984688	0.754170567	8.046085004	1.031386281	4.946241796	8.306534438	10.68947893	7.604095187	4.859458793	4.59716425	0	0	0
Zm00001d006533	4.299791568	3.881140778	3.829677659	4.496394584	5.276046745	4.725734814	4.87128192	4.875936068	4.566262599	3.09504724	4.528904919	3.492657174	3.810204842	4.045806859	3.74384402
Zm00001d006534	22.26202797	17.04211755	20.89326399	11.28718062	41.17452876	15.56058494	34.97758417	44.08152268	41.07268309	14.17197275	29.19992003	19.44305528	6.513668239	6.073117486	7.349481242
Zm00001d006535	6.932621931	3.616472352	5.513522106	6.363568609	36.53046456	11.75766892	30.21163582	44.04156569	33.760724	16.91053116	9.027686892	5.938829146	1.744063618	1.006687754	0.411220276
Zm00001d006536	10.99693838	6.566305303	9.948953125	6.72917281	51.33871609	13.89040236	23.99659514	33.20975095	21.40534355	1.264558098	2.95731125	0.905016242	1.624566546	0.618547344	0.971724474
Zm00001d006537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006538	3.122902208	0.609936257	1.967582056	1.355031667	37.96653371	7.18797905	16.27953411	27.35421608	10.50522268	9.821323184	5.276870448	2.434653892	0.486329919	0.095284475	0.509633359
Zm00001d006539	0.071859311	0.120676091	0.126518198	0.843919929	0.576001538	1.738740392	12.2452758	13.04743932	10.25066453	0.074329378	0.007551408	0.053068322	2.405685221	2.277901745	1.862358058
Zm00001d006540	844.8884917	1030.232359	981.9123165	1939.26727	545.1605027	1439.18398	744.0776676	598.1937399	460.7874781	3.353890691	3.204216564	1.605959685	2941.979148	3051.634313	2425.083763
Zm00001d006541	2.108628814	1.613249552	2.414859717	3.933818674	6.831258455	4.312714712	5.966382697	8.793779248	6.436834528	1.369953439	3.768816795	0.955572262	3.402927891	2.426175412	3.485539182
Zm00001d006545	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006546	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006547	17.11722221	22.30961918	18.79177871	22.93438635	26.28877267	24.06824641	19.58752092	19.76574247	18.03211317	32.1798929	30.98708286	25.65089243	32.65132172	28.08496671	33.36161982
Zm00001d006548	157.244229	174.4813549	149.2853671	87.74904282	81.75519411	94.9731009	84.84803507	72.43875704	76.35568851	170.0162751	154.4641347	205.2349091	86.37422957	77.24010837	83.35201749
Zm00001d006549	0.015228937	0.010960515	0.024334158	0.078684743	0.097465168	0.090622294	0.07118005	0.083943456	0.077809081	0.240036734	0.172837598	0.185569173	0.131464304	0.164560023	0.103125126
Zm00001d006551	50.55554464	52.39061928	42.89818312	23.17498819	21.7545978	23.8860331	19.55926638	19.1873393	18.06084146	24.6923743	26.27824019	24.74234323	22.22167986	19.60258913	23.49558687
Zm00001d006552	27.17172986	25.31168799	7.753729677	7.81348425	7.816640857	8.894307838	8.059688987	7.029028899	7.36126025	2.933836521	4.183089354	3.132320198	6.923047043	6.529905139	7.493006359
Zm00001d006553	1.540192378	2.098131204	1.072934598	1.57207318	1.052098932	1.251343403	1.605535051	1.187580279	1.369628195	2.331007189	3.332461223	3.012710927	3.805361173	2.297130277	2.005599634
Zm00001d006554	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.053398014
Zm00001d006555	17.0890424	13.06660755	21.08795246	32.1388158	64.6824974	32.53481862	42.51709922	56.60128969	42.85979208	8.593155774	15.71421285	3.953619373	18.54779925	13.16326111	20.17688842
Zm00001d006556	0	0	0	0	0	0	0	0	0	0.058194091	0.053209459	0	0	0	0
Zm00001d006557	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006559	0	0	0	0	0	0	0	0	0	0.129320202	0	0	0	0	0
Zm00001d006560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006561	16.67436577	17.06503256	14.90750496	31.59616412	20.820613	25.99003262	17.03574566	15.20017123	12.66146708	2.11906759	6.120922546	2.649781653	34.54385179	32.0026495	32.92372859
Zm00001d006562	11.17560435	12.40758426	13.18169705	16.76349769	18.48980289	14.45601637	11.58783209	11.16557182	13.29665064	1.449214577	5.010465046	1.467148979	8.292328405	7.847417055	8.896305752
Zm00001d006563	0	0	0	0	0	0	0	0	0	0.099445599	0	0	0	0	0
Zm00001d006564	0.065938427	0	0.068290393	0.479707352	0.651626636	0.646268764	0.346720738	0.172264591	0.20330092	0.197036585	0	0	0.664084957	0.204804722	0.406580375
Zm00001d006565	17.05699456	17.19997471	17.38425554	14.58621814	17.36802033	13.07226805	15.18182243	17.67549159	18.49717669	14.13336424	17.2113375	8.795931747	12.26077925	13.49894428	12.3709031
Zm00001d006566	2.008128718	1.959746553	2.313901718	8.873386079	9.28729947	8.195343837	8.950881403	10.10230508	8.545019825	3.044660497	5.601278959	2.931644096	5.640224079	4.679757423	5.458232767
Zm00001d006567	3.623103949	4.022783748	3.733532455	5.609624261	10.86377451	6.091972298	9.581044677	12.48893285	11.07403575	12.55474717	15.73599471	14.63696975	4.063605124	3.768209061	4.226969361
Zm00001d006568	30.59465565	30.01309405	39.49515208	34.67618986	31.4515054	39.00752359	11.89316055	12.97450276	11.95827358	9.330538045	9.240162367	13.09843673	8.244592887	5.039643251	5.129345767
Zm00001d006570	0.176024471	0.036950579	0.121535406	0.414667937	1.262773906	0.599039061	1.474072937	1.497509528	1.471367386	1.186859744	1.023539886	0.595808647	0.251692878	0.257285609	0.350486534
Zm00001d006571	0	0	0	0.006487888	0	0	0	0	0	0.007174614	0	0	0.023285464	0.028513864	0.006014388
Zm00001d006572	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006573	39.90586411	39.00939536	39.5475253	22.61976661	22.07499689	23.64629959	21.50042299	20.22151774	24.09581183	26.07520976	24.62449521	44.24410643	15.41431995	16.53684692	15.62390693
Zm00001d006574	6.144783331	3.755200841	8.404949082	16.56647712	17.1674606	20.25338318	11.1880507	12.26100038	13.79625038	28.8172186	24.59126074	52.15947449	4.380701744	4.171881581	5.843106057
Zm00001d006575	0.017046426	0.021470037	0	0.021259563	0	0.083536819	0	0	0.021022971	0	0	0	0	0	0
Zm00001d006576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006578	14.2390941	15.74382433	13.31198883	15.75768556	18.20091611	17.98401104	16.30660926	15.31183014	14.75943571	25.59017168	34.78406737	33.08015326	21.96287126	19.36000732	19.25256236
Zm00001d006579	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006580	7.50469591	7.257233426	6.931923294	7.690638702	7.10965368	7.877459099	7.160844438	6.863928248	7.067738163	2.598283116	4.431469305	2.696870399	5.062906499	5.132962771	5.172660262
Zm00001d006581	0.020104756	0.063305036	0.012493125	2.758115717	1.258320847	3.645399347	4.369587753	4.605934239	3.496058297	0.221822182	0.329585646	0.077948976	3.149701418	3.361029738	3.312247382
Zm00001d006582	5.067288231	5.016907403	4.78925059	2.897091564	4.679046981	3.609270307	3.265667406	3.543537229	3.038074112	5.011743797	3.606020147	5.006898711	2.414075684	2.463597814	2.061084556
Zm00001d006585	0	0	0	0	0.020995171	0	0	0	0	0	0.120558494	0	0.285287641	0.069868936	0.092108462
Zm00001d006586	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006587	123.7823806	172.416438	232.012521	2087.476996	491.6485111	1399.45421	434.9709283	351.6373258	326.5645833	1.212204102	0.280431569	0.164230221	1261.828175	1191.358818	1053.933018
Zm00001d006588	97.78371557	101.9736626	119.4421306	129.1496752	113.9178147	101.113668	314.0713226	415.5441548	495.3677108	468.6595239	555.0911114	650.3507895	152.8291443	152.0485636	140.4132676
Zm00001d006589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006590	0.715902925	0.822587437	0.959967809	3.250262059	2.647879663	4.208440642	3.309440268	4.528097815	3.035960411	7.673600616	2.71624876	1.412176215	3.54881379	2.567803738	3.80443065
Zm00001d006591	0.796632052	0.016183242	0.590840264	0.224344341	5.129885778	1.432491564	4.474155461	5.94925578	3.597101522	1.807517218	2.754489642	1.024807163	0.028756672	0.070427099	0.430797509
Zm00001d006592	0	0	0	0	0.129996901	0	1.037540956	1.665433845	1.807715455	0.291570394	0.941971982	0.343480614	0	0.061801595	0.032589303
Zm00001d006593	9.042869531	9.949179107	8.952754688	31.87957831	18.98084417	31.20363593	17.13750415	13.70759113	16.48007095	2.626582105	4.473905249	1.985002556	27.7026431	27.35791634	27.40316076
Zm00001d006594	20.76425905	16.69063312	20.9717225	23.75609444	26.35500041	21.79489579	19.80701541	22.1171397	19.51764447	1.656705419	6.660310305	1.330677083	12.546091	10.43020427	12.01418072
Zm00001d006595	4.08737562	3.859529039	3.250593776	6.385538387	10.19916186	8.034617216	7.764684249	10.76460749	8.593876034	14.77509558	13.33305446	14.48685122	5.945535923	4.882773181	7.922433158
Zm00001d006596	16.89076632	13.39143308	15.00954585	37.84138796	45.59854385	36.27856248	34.9317658	39.27471312	37.3524707	4.895122481	10.15973639	3.357683969	38.62861843	40.42413552	38.23898934
Zm00001d006597	3.942429873	4.365320098	3.251728596	5.07924524	4.10664445	4.51816814	4.544476239	4.025633025	3.668483462	1.44503777	1.784077781	1.07213895	5.604058491	5.103782805	5.488747036
Zm00001d006598	0	0	0	0	0	0	0	0.451627294	0	0	0	0	0	0	0
Zm00001d006599	0	0	0	0	0	0.229440166	0	0	0	0	0	0	0	0	0
Zm00001d006600	0	0	0	1.152038506	0.730291473	0.67901887	0.647628525	0.668286333	0.227843554	0	0	0	0	0	0.42718411
Zm00001d006601	0.451030445	0.542826758	0.373694643	0.925009217	0.739571814	1.141986282	0.772975981	1.196448113	0.296664334	0.055292919	0	0	3.028305301	2.41723979	3.708108403
Zm00001d006602	61.6450292	62.45128844	56.58722406	31.82786459	41.82062268	29.62409461	35.29194896	43.14300523	39.6785003	48.2147401	53.00874285	35.1588842	24.08291655	23.29035356	25.88576816
Zm00001d006603	0	0	0	0	0.081143497	0	0.215876175	0.445524222	0.303791405	0	0.155314095	0	0.068912386	0	0
Zm00001d006604	1.834667756	2.285923829	2.476270744	7.331819085	11.51535116	7.009016334	5.509359351	10.39492229	7.104247496	13.14128382	12.23955754	6.730832229	4.635924165	3.135784374	3.945751065
Zm00001d006605	0.036215189	0	0.011252086	0.395202613	0.787360608	0.155289967	0.338539591	0.480340022	0.535960466	0.624333956	0.947621695	0.812380247	0.739598763	0.764231971	0.826926592
Zm00001d006606	2.227775865	2.295131927	1.964036916	2.680707805	1.956183253	2.594996029	2.377413672	2.281163424	1.927518759	1.005753917	1.207119735	1.208850613	3.575829068	3.144288896	3.354333382
Zm00001d006607	7.154814577	6.850601071	7.539278511	9.689496498	10.85541984	8.136019007	10.8295445	10.99023895	11.66805831	5.896829117	8.718549307	6.09593701	4.931040841	5.423692361	5.600121367
Zm00001d006608	0.06641895	0.097597399	0.013757611	0.027611611	0.18961954	0.271241006	0.362182538	0.240258407	0.232086794	0.519081868	0.237309877	0.318828895	0.37162469	0.473270106	0.691104333
Zm00001d006609	0	0	0	0	0	0	0	0	0	0.040159501	0	0	0	0	0
Zm00001d006610	0.821224927	1.562391498	2.503206698	17.15798	5.752132436	17.50636448	2.151527202	2.553700332	1.51919714	0.41131429	0.495993575	0.541041446	65.49404429	69.35758694	59.10064475
Zm00001d006611	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006612	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006613	15.00801324	13.44876939	14.79929421	16.2165833	19.54292692	16.04078552	15.94608799	17.41393027	16.28391183	4.925796418	9.545527899	3.906466815	9.526031575	8.954372617	10.40130524
Zm00001d006614	1.319571274	1.736869988	1.108085854	3.269184748	3.610603378	2.847352463	3.660321335	4.708803617	4.002517807	10.2390226	10.81614113	12.8463786	1.543158061	1.511720745	2.144092768
Zm00001d006615	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006616	0	0	0	0	0	0.089209758	0	0	0	0	0	0	0	0	0.021046354
Zm00001d006617	0	0	0.023998093	0	0.0508866	0	0.112816645	0	0	0.053262388	0.024350091	0.19251321	0	0	0
Zm00001d006618	4.3480377	5.371054773	5.507672398	3.806307039	6.390236496	5.787926395	6.350852609	5.041099763	3.763947641	4.38217522	5.430293736	4.260802053	2.853857903	2.749887468	2.223447569
Zm00001d006619	2.635091287	3.164937304	3.030125814	6.860724097	10.98907877	7.654844294	8.515151538	9.499204978	8.836436294	4.224318606	4.487674635	4.175423123	3.79993784	3.313047482	4.106527428
Zm00001d006620	9.194456881	10.22771402	10.42891571	18.10172221	20.67228887	16.28182889	16.54955575	17.47684886	16.94707715	3.114793858	8.113622023	2.446227572	24.78994074	23.91079647	24.89241328
Zm00001d006621	0.659028518	0.848225109	0.944589255	1.019890528	1.565595536	1.261194327	1.000535178	1.438469481	1.352630698	2.673651953	2.141334341	1.571987999	0.963561015	0.943931288	1.112302046
Zm00001d006622	0	0	0	0	0	0	0	0	0	13.64522686	0	0	0	0	0
Zm00001d006623	0	0	0	0	0	0	0	0	0.101568813	0	0.017309101	0	0	0.1203766	0
Zm00001d006624	13.57302103	16.72417173	19.09006912	33.58589499	18.37620402	24.32955832	7.711990251	8.668518704	7.776143364	1.029433403	0.990796815	0.239350715	63.12849837	63.32820946	52.77687823
Zm00001d006625	6.414542956	5.971538696	5.729247098	7.25314227	6.697551784	9.007683262	9.811744853	8.136697977	8.383002313	8.077432942	10.00256943	11.70659995	3.02605314	3.378044262	3.350832159
Zm00001d006626	8.632225462	8.810328204	5.892558158	16.40051334	8.572690571	12.77674854	3.043417615	3.678866032	2.740146505	0.219924792	1.715942975	0.62414599	48.29868738	38.39952696	38.19942761
Zm00001d006627	0	0.164696028	0.048753658	0	0	0	0	0.015766998	0	0.009017162	0.049468765	0.028970583	0	0	0.037794864
Zm00001d006628	73.35198242	66.95492913	65.38952452	31.41341033	33.23955254	32.24767025	30.78776552	29.71072046	35.86542544	65.47203296	57.70447997	48.75625902	27.554591	29.63938573	25.62196556
Zm00001d006629	20.79897126	21.25144638	23.59812466	19.44010823	26.62047658	24.23613735	14.90984782	17.01978687	22.24999411	12.10258034	13.29090415	4.620975203	11.58505562	10.70857887	10.44264336
Zm00001d006630	0.04974976	0.087724009	0.24731659	0.905867832	0.707968153	1.194625145	1.069639737	0.539881972	0.404944657	0.096058369	0.062736043	0.011022105	1.647878721	2.116052416	2.323707451
Zm00001d006631	0.678825703	0.50702509	0.539541418	6.959855721	3.317794555	5.222015793	3.938369155	2.978993082	3.708903673	0.424561509	0.875928454	0.008743864	2.393710728	2.28437534	2.04416969
Zm00001d006632	0.244318866	0.09365407	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006633	0.016064905	0	0.019965511	0	0	0	0	0.038741237	0	5.1402273	5.206398586	8.809006339	0	0	0
Zm00001d006634	0.049295315	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006636	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006639	0	0.019478473	0.019220192	0	0.264909652	0.018946982	0.234924073	0.410245155	0.019072877	0.170632448	0.019502109	0.017131643	0.605711811	0.864628079	1.090672552
Zm00001d006640	0.15023334	0.247440816	0.014362341	0.799902307	0.738522428	0.566327376	1.573177096	2.08319293	1.959685682	0.159381957	0.051005517	0	0.866443646	1.064157635	1.255914061
Zm00001d006641	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006645	1.736994555	1.862952395	1.233893859	2.432784951	2.368839097	1.911414028	3.336162391	2.378710369	2.530653627	3.858875108	4.956867558	4.882846056	2.044753617	1.459919036	1.554600217
Zm00001d006646	0.59764957	1.223205499	0.603493024	0.931703272	2.756218455	1.8762689	3.011649589	2.477163367	2.902203958	82.63179322	26.00110724	145.0301248	1.00318359	0.368530001	2.763857848
Zm00001d006647	0.662956298	0.485200326	0.467632562	2.13965107	3.42334098	2.046994196	3.658719209	3.94826135	3.546655165	3.644948374	4.524617146	6.87749027	0.696755706	0.83969778	1.362034264
Zm00001d006649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006650	22.27904787	5.739656571	21.01806303	24.62802317	392.702068	64.63924328	226.9610168	151.9006585	142.5017973	169.4146377	127.7027006	120.0331747	30.37045431	50.95541478	22.36229708
Zm00001d006651	0.821734897	1.103976687	0.7640497	2.550693269	4.651841795	2.774121618	5.234853069	4.205502688	3.678364767	1.729343905	2.632802115	1.375535171	3.19457695	3.89685745	5.453920015
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Zm00001d006658	0.015687015	0.019757854	0.014621902	0.183414048	0.211866928	0.091289016	0.183302776	0.222250896	0.14268	0.075722432	0.042036388	0.008688682	0.078994233	0.047290807	0.074812363
Zm00001d006659	0.932129585	1.337079087	1.351528958	2.825548987	2.456434954	2.886687546	2.949898868	2.57568691	3.720150149	1.839065535	2.791682617	1.993435397	2.274500294	2.412661684	2.724107762
Zm00001d006660	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006666	0	0	0	0	0	0	0	0	0	0.014230102	0	0	0	0	0
Zm00001d006667	13.42102053	11.27145175	13.48401254	20.23047805	29.72146	20.06243398	20.04319496	26.72295229	23.24873747	15.88127621	22.52326545	14.30105271	17.78277686	16.52175866	17.94156627
Zm00001d006668	0	0	0	0.073970368	0	0.133217971	0.115508582	0.250305366	0.121911952	0.449899654	0.536018928	1.434499493	0	0.010836505	0
Zm00001d006669	0	0	0	0	0	0	0.027342468	0.007053657	0.007214558	0.217835647	0.073769211	0.15552629	0.006546234	0	0
Zm00001d006670	9.986045865	8.975534382	11.15372586	11.46826903	15.67021686	12.43366697	20.8786772	21.23627575	18.45184047	28.955717	28.64514914	41.23493265	14.17977825	12.89687869	13.81664524
Zm00001d006672	0.092641469	0	0.03289574	0.099032933	0.104630337	0.064856272	0.479399754	0.462775886	0.37540148	0.456313782	0.483984582	0.733028679	1.940087141	2.538920786	1.820805069
Zm00001d006673	12.50171833	12.93780994	12.1361784	15.97240946	12.64689618	18.06195918	30.71100133	34.1566693	26.05443368	79.32082672	76.44241682	129.8152892	22.957495	25.36339527	22.02023375
Zm00001d006675	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006676	1.479922352	2.216303032	1.771962153	8.215593411	7.954633587	7.849428261	5.219501181	4.526408468	5.341916196	0.821400952	3.766597476	0.829691696	6.301184845	5.945293007	7.031760617
Zm00001d006677	1.498073909	1.477796634	1.458201358	0.901503235	2.457062396	1.475977161	1.983083207	2.273709824	0.994829556	0.939132227	2.219384865	0.62666369	1.570885568	1.469978159	2.301229343
Zm00001d006678	3.139669583	3.859424246	3.679354499	14.27510775	20.69729976	14.66992953	13.40784591	15.77954618	10.0116029	6.150593679	4.351579611	2.903541765	54.96927184	57.60132384	64.29150316
Zm00001d006679	14.74510728	11.36660085	13.12797183	24.60942194	42.02779623	26.35078719	30.89996784	30.62810779	26.8824418	34.09259505	29.27131086	35.06997442	21.43414636	20.4201991	19.90052018
Zm00001d006680	24.80883155	22.60925588	22.58648332	16.29032536	19.29636458	16.30309546	12.26763294	10.98362488	10.99592804	0.420136035	1.602183067	0.71606544	3.774750861	2.761170973	4.836234888
Zm00001d006681	8.13126725	7.143117315	7.902813062	2.917975388	3.864184396	3.155064511	3.797558238	4.115785249	3.656286782	7.39740965	10.08403754	9.401546927	2.994792882	2.903917913	2.769861569
Zm00001d006682	2.668923482	3.655358075	3.003807704	8.967341909	6.48006982	7.991565435	5.752031734	4.787788801	4.592019642	8.841847323	9.002386624	14.34838843	6.537127741	6.85407105	5.745115991
Zm00001d006683	1.089736037	2.006800214	1.077305691	4.386094427	7.342604482	5.694300358	13.94904241	15.38941821	11.5864501	0.296030811	1.676097945	0.173757897	8.582338595	8.38034848	12.46521169
Zm00001d006684	5.259711141	7.079752598	4.241425049	17.46327973	11.48019625	18.12644697	22.00351991	20.96253617	18.2468895	0.138435283	0.822754183	0.033357649	24.8348704	22.65638745	23.89439578
Zm00001d006685	4.668771061	5.289487428	5.108299927	11.33892017	9.860525932	14.0397137	12.39877051	7.811233505	8.87100687	2.464690913	7.324125475	2.177622192	7.224315157	6.513908271	7.51550868
Zm00001d006687	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.017660125
Zm00001d006688	13.57652968	17.01448912	16.62914657	28.52381216	30.9381966	35.48727551	40.5575895	41.45160891	33.63741985	52.29175317	42.79683355	16.59061888	25.02573254	19.52522151	24.04892237
Zm00001d006689	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006691	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006692	0.07088788	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006696	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006699	1.176622592	1.082066403	0.905239536	1.211214254	2.559345708	1.006778434	1.789530915	2.184407696	1.266835061	0.824257289	2.166758936	0.599981971	0.982283932	0.57326889	0.626186544
Zm00001d006700	2.935859812	2.539323546	4.120119553	10.4530308	6.045699407	10.30030247	4.845275517	4.285567092	4.97289557	0.738142609	0.648706421	0.489270872	4.111012797	4.038655519	4.601768166
Zm00001d006701	22.88392128	17.21896971	23.84813723	13.59917454	13.58883096	17.06097784	13.61459077	10.40546573	9.630187548	3.918192419	4.027812205	3.902063549	13.19442489	12.89862381	17.25823804
Zm00001d006702	9.962548123	10.09484001	9.292989518	7.11343813	7.103058521	8.599230652	6.686969213	5.77182606	7.120058369	2.76892976	3.875381215	2.034893717	3.898936591	3.996272055	3.721164821
Zm00001d006704	1.38505008	1.502560735	1.235972961	3.396193689	3.18884063	3.038166023	3.463791527	3.389002471	3.618963724	1.038990724	1.364441358	0.978734034	6.111300156	6.562319262	6.062266665
Zm00001d006705	10.24209569	9.085147003	8.504711978	3.664373528	3.980962725	4.839666357	4.077555066	3.788678911	4.070720911	0	0.047623935	0	2.856856251	2.599935041	2.977780064
Zm00001d006707	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006708	26.93670062	27.04714877	21.205986	34.86591057	74.42711265	38.4567212	51.23132641	71.2316604	57.27924524	24.83851353	33.06275399	11.65217703	35.84797159	34.37631394	36.36299078
Zm00001d006710	5.687293256	5.799428275	5.52231039	5.195886246	4.364003562	4.291706919	3.458514987	3.930234233	3.878960018	6.983386608	7.31595788	7.294117483	5.290975549	4.306316992	5.048417091
Zm00001d006711	28.66928293	20.370845	23.00208358	10.3474004	65.92540296	15.76146832	36.09057143	37.9505633	28.81185305	97.00769093	68.34526167	50.53085473	3.984388877	5.670713886	7.922323494
Zm00001d006712	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006713	0	0	0	0	0	0	0.051037818	0	0	0	0.018359813	0	0	0	0
Zm00001d006714	12.33970583	9.663876926	11.64932688	25.36973205	31.26802449	23.45201529	26.34230586	27.96147826	26.32307119	15.20027412	23.95626312	14.32654719	22.57163077	21.95282632	26.62753489
Zm00001d006715	0.189878249	0.358728536	1.41588748	1.598453427	12.88491113	2.675208605	6.656182062	9.959322719	8.313125227	7.725265581	2.993032045	4.469693277	1.593598932	0.52037801	3.237996222
Zm00001d006716	0	0	0	0	0	0	0	0	0	0.463102451	0	0	0	0	0
Zm00001d006717	6.440957341	6.668945533	6.269818566	5.692731881	4.818993413	5.674813826	3.63676173	3.295524456	3.291021542	0.457135091	0.595088812	0.208480164	2.040016187	2.063121859	2.127143395
Zm00001d006718	1.788759578	3.701273863	2.276006042	0.53115794	0.056117932	0.31306789	0.099531694	0.66759237	0	0	0.053706743	0.047178731	0.381272268	0.093376241	0.837067929
Zm00001d006719	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006720	0.08565936	0.258931875	0.149040787	0.170929021	0.022573755	0	0.020018593	0.020657138	0	0	0.02160384	0.075911642	2.8181539	1.727811499	2.119325678
Zm00001d006721	0.038816678	0.097779499	0	0.009682095	0	0	0.009071458	0	0	0.042827679	0.048949076	0.042999354	0.034749687	0.008510441	0.008975475
Zm00001d006722	2.522622524	2.607471577	1.877261919	5.71845294	7.951152514	5.983845861	7.310974173	8.03417853	6.58152238	3.79635664	4.67013718	2.004527153	1.964872626	1.571815935	2.623959827
Zm00001d006723	0	0.025971297	0.025626923	0.102866787	0.108680883	0	0.07228433	0.049726685	0.076291507	0.455019861	0.598064684	0.593896961	0	0	0.047679674
Zm00001d006725	58.47209637	50.22854711	55.18728551	55.95154684	75.81173935	57.2325748	68.76231186	70.35349622	76.62895443	68.43146795	70.52075504	62.19104573	42.20490322	43.36388374	42.87055876
Zm00001d006726	0.699046912	1.047626636	0.890771929	3.067927009	4.174084509	3.252258667	2.812398479	2.656708518	3.208391172	2.282112353	2.577610821	2.989665772	5.555007383	6.043255931	5.994955257
Zm00001d006727	0.505506173	0.480357524	0.00841399	0.011257953	0.029735649	0	0.005273964	0.019047668	0.002783167	0.018674367	0.019920609	0.002499896	0	0	0
Zm00001d006728	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006729	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006730	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006731	3.246089972	3.122338043	3.202267322	4.591935578	5.163880264	5.023458146	4.188251054	4.738055227	4.115130019	9.247116753	6.977726368	8.342730077	5.150238629	5.167628364	5.099299227
Zm00001d006732	0	0	0	0	0	0	0	0	0	0	0	0	0.006866494	0	0
Zm00001d006733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006734	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006736	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006737	12.04341827	11.13422327	13.09977594	17.00996907	20.58347215	18.41762806	19.32705737	19.80751058	19.40464244	5.968213089	8.856199223	3.726952859	9.955554918	9.743905705	10.66298374
Zm00001d006738	11.65242477	7.390179574	12.41285811	16.63790326	31.27535246	19.2947688	29.77693053	30.64133236	29.09078164	0.162822845	0.431740996	0.039234126	17.92757513	20.4549002	21.51801617
Zm00001d006739	0	0	0	0	0.018362749	0.017073529	0.048852712	0.084018329	0.017186976	0	0	0	0.015594852	0.06110861	0.257791023
Zm00001d006741	0	0	0	0	0	0	0	0	0	28.79270051	0	0	0	0	0
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Zm00001d006745	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006748	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006750	0	0	0	0	0	0	0.019844518	0	0	0	0	0	0	0	0
Zm00001d006751	11.3083046	11.57851708	10.18599941	9.834369594	10.86465343	9.988823988	11.53080823	12.0641359	12.87220442	10.409759	15.04054029	10.85159729	6.557600582	5.910877454	7.014398245
Zm00001d006752	11.40131271	9.840341617	10.32676784	6.09395255	6.540583236	7.063268658	4.706655818	3.510104037	4.412788469	0.820087682	1.212789263	0.343669573	1.556471211	1.513426153	1.924913573
Zm00001d006753	12.41911226	7.851417007	22.44715953	0.134042216	3.356355307	0.829556073	20.40182596	30.90824292	7.243884565	20.86340513	29.35656186	24.23456781	0.090203713	0.153167867	0.136685482
Zm00001d006754	0.024632854	0.031025171	0	0	0	0	0	0	0	0	0	0	0.137824772	0.081010198	0.028478941
Zm00001d006755	0.078774036	0.009921619	0.039160241	0.152277518	3.20211736	0.641784666	2.609545534	3.086965585	4.10945487	6.703235001	4.023131752	1.963401795	0	0.025906459	0.086519859
Zm00001d006756	13.95767882	18.56368925	16.27866062	37.25056164	31.77301136	32.66878344	38.18746737	36.04587975	33.65661581	12.06712671	18.32351321	18.77902192	53.15153283	47.41565487	60.00187324
Zm00001d006757	0.041926407	0.056868501	0.016032696	0.422332587	0.314466942	0.438583078	0.177121334	0.190548576	0.147165759	0.031135692	0.00813393	0.003572629	0.24902098	0.2757672	0.313207882
Zm00001d006758	8.116791534	7.858480676	6.90474637	3.540673786	3.781494202	3.928971271	5.873655668	5.860219051	6.374829873	5.554597404	6.662242363	8.186589582	2.248195522	2.445306366	2.394161317
Zm00001d006759	14.35691942	12.58750249	13.07669182	9.955392137	15.44330382	8.995317303	11.19231253	16.40757148	15.88007883	13.85453303	22.39728523	15.09395849	5.001057207	4.047723283	4.079485006
Zm00001d006760	385.8529329	352.7584149	402.4964726	492.8248913	567.4709177	450.4331615	381.2274186	444.9368629	383.7277532	346.9407084	322.118464	232.3633217	456.9673884	426.4958474	464.8057163
Zm00001d006761	19.47281512	16.8962581	21.06203705	27.38983114	22.42688941	26.50264282	17.30072703	16.15338425	14.2422047	4.316178605	6.16203995	6.122624497	6.082555923	5.216319333	9.077233437
Zm00001d006762	4.715220198	4.919357211	5.176612978	5.320329215	4.281480301	5.145731955	5.09339348	4.36859849	4.869462109	0.408611541	0.774084571	0.184478192	2.509308868	2.481539738	3.279817943
Zm00001d006763	5.769930575	5.992124761	6.707333339	10.59464899	7.522490116	8.523778826	8.601151074	8.389052422	8.533476894	22.72874559	14.15857475	15.06848201	10.77542618	11.85766481	10.74548805
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Zm00001d006769	4.016615896	4.161637783	4.467741985	6.903812425	6.026198718	7.012664488	5.956475592	5.257826289	6.226086119	7.340925766	1.600586409	0.376454902	3.111025839	2.917483185	2.736076483
Zm00001d006770	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006771	48.33549938	46.31850515	52.13908813	36.29768689	35.26116558	34.77099468	31.69718407	27.39716673	29.24181569	16.48226464	25.03710424	14.07644108	21.80857091	17.72005753	17.15098756
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Zm00001d006778	0.088582509	0.029752	0	0.022095253	0.050578862	0.007235046	0.034502888	0.053405171	0.0182078	0	0	0	0.019825334	0.058264354	0.034137823
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Zm00001d006780	5.666161523	7.511205247	5.446905967	13.13093449	14.78343675	10.44506328	14.62935147	14.45674896	16.12375949	7.169422153	8.524642637	5.599086311	12.32152015	12.19936259	11.84257195
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Zm00001d006789	19.60568477	20.17419773	19.30702208	11.95281806	13.42001131	13.71806082	14.64820689	15.87122232	15.1335423	9.949377289	13.9708522	9.524185829	9.864653097	9.925571329	10.12611109
Zm00001d006790	11.42229374	11.18824387	12.173166	4.600095797	3.636071925	3.487484795	13.35094105	13.53384167	11.83135853	1.229359258	2.61203544	1.191725541	4.737085288	5.509169068	5.239648418
Zm00001d006791	0	0	0	0	0	0.026048417	0	0	0	0	0	0	0	0	0
Zm00001d006793	4.997002229	4.60610612	3.562151699	2.651131795	3.199218405	2.320439824	4.508741747	6.171019368	5.59736224	27.04571452	23.46501833	21.16529291	2.254760464	1.949289243	1.659784981
Zm00001d006794	4.604301579	4.713655785	6.631928921	4.660085293	5.81794669	4.592270685	4.035094825	5.69409196	4.091346167	2.442342679	4.697044279	1.549747965	1.446624523	1.119486787	1.624258753
Zm00001d006795	1.391168276	0.746299567	2.209211369	15.06883733	64.94945687	22.14630851	61.48104647	86.69839798	83.23245246	137.97702	56.82008131	85.91006795	4.449264153	2.739437204	2.908984256
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Zm00001d006797	0.555516998	0.50366727	0.604710445	3.658170455	3.304270765	3.909739778	3.314663574	2.904959162	2.888622902	0.203763172	0.519183242	0.085105263	1.410817268	1.632577283	1.676235977
Zm00001d006798	11.49524169	12.06524954	10.48471673	8.958669578	8.288483108	8.343923674	8.834967452	8.07331297	8.661556489	5.208722481	5.317675024	5.50528141	4.987562321	4.779023695	4.658463821
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Zm00001d006808	2.950894753	3.606888009	4.518460591	18.37008286	32.22150622	22.36268462	22.40550902	25.23704012	26.94903675	1.408106202	4.03519599	0.220683024	9.140117152	8.885667797	10.99785102
Zm00001d006810	0.072654919	0.030503046	0	0	0.015955586	0	0.084897273	0.116807059	0.119471554	0	0	0	0.054202125	0.079646874	0.027999667
Zm00001d006812	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006813	0.243339115	0	0.164957765	0.579374705	0.174891809	0.623349578	0.025849251	0.613496947	0.109128951	0	0	0.024505457	0.86642272	0.970025029	1.687999347
Zm00001d006815	0.174155846	0	0	0.434399233	0.382459795	0.604533432	0.27133481	0.209992309	0	0.920726892	0	0	0.519695957	0.254554339	0.738275723
Zm00001d006816	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006821	13.07860943	12.84344677	16.48270806	42.3323351	53.50303816	43.03700768	40.49824135	42.28284592	39.03855788	11.07618833	16.6213941	8.013614156	17.60819627	14.29242708	19.4205942
Zm00001d006822	3.279216934	3.656812124	4.168839837	7.452857765	6.834122814	6.929881475	4.128205287	4.395838993	5.133448376	0.246214999	1.018988559	0.156127552	2.996623146	2.976776808	3.62827576
Zm00001d006823	166.9117175	173.2130638	173.5157077	53.24909269	29.11365201	42.41229625	31.89454601	24.31574857	30.56598156	3.2316464	10.50388988	2.915059433	37.65977353	29.76689919	20.6117971
Zm00001d006825	2.923611849	2.303618921	2.485456535	0.270729049	1.996130026	0.707311323	1.235891102	1.887908892	1.458198745	1.025552893	1.869593422	0.951639624	0.480663894	0.415177267	0.667475172
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Zm00001d006827	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006829	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006833	15.1596755	12.95595857	17.09201083	33.12132181	23.03785504	35.87137024	30.59163407	23.66328317	24.26593317	0.224965077	0.077135859	0.079053399	92.85227172	93.03939729	93.01973814
Zm00001d006834	4.234452984	4.76978974	4.632781942	18.39676036	10.61761777	17.25252899	12.42724417	8.63992649	11.19336147	0.30223226	0.371337875	0.17953756	21.51095131	18.6504035	16.68464583
Zm00001d006835	0.245188459	0.488128155	0.157275323	2.436443137	1.589304652	2.621139857	4.523970313	4.658737377	4.248026737	3.577901324	6.268588307	4.209934043	3.119895161	3.038995538	2.857573776
Zm00001d006836	21.38475119	21.79305387	20.70210892	23.63816089	20.83161103	20.61007368	20.42885296	18.31197473	19.5995477	8.599566322	12.51829903	4.064543447	16.64200088	15.73540848	16.82078463
Zm00001d006837	3.984707633	4.490798898	3.922850424	9.227373064	7.413164371	7.796049683	8.208717471	6.984707229	6.477591398	4.193070211	7.304811479	2.696559864	8.273763142	6.859531814	6.773085334
Zm00001d006838	0.906251767	0.731684265	0.84712588	2.695182662	3.561946662	3.112586595	3.357883574	3.306218846	2.607872792	0.437988841	0.537219576	0.180188002	1.534188841	1.83408925	1.961174415
Zm00001d006839	5.968195015	6.534217407	5.8079756	5.134720257	5.435875286	6.518636126	6.294881105	5.724999782	5.794170865	5.998761381	6.835234712	4.376879974	4.560769839	5.314111616	6.017148857
Zm00001d006840	0	0	0	0.126297555	0	0.248135291	0	0	0.062446011	0	0	0	0	0	0
Zm00001d006841	13.27856054	15.31876595	22.38450682	80.54690989	31.28937403	63.90749737	7.72781228	7.750033599	8.474815791	4.075961639	4.847490267	3.044900294	3.388114191	2.299575208	4.253113452
Zm00001d006842	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006844	7.58658872	6.293265314	10.77348293	32.97939435	48.80570764	31.97693306	39.87490659	43.03625243	38.11097343	2.821708641	6.867610415	1.244563485	9.482189353	8.673206922	12.90033191
Zm00001d006845	0.040300152	0.044786639	0.038300407	0.218781441	0.290495689	0.374655461	0.185592869	0.091468819	0.154951	0	0.005978798	0.00262604	0.066319359	0.101350543	0.131555224
Zm00001d006846	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006848	0	0	0	0	0.028015329	0.052096834	0	0.025636697	0.013110749	0	0	0.011776339	0.118962284	0	0.012290678
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Zm00001d006852	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d006853	21.41685562	22.21940116	24.77583912	82.94934043	53.796179	70.28412909	74.23600699	97.15076363	81.99489919	10.82258752	15.10489683	10.08061948	147.377608	141.7583165	155.2688597
Zm00001d006854	0.067263144	0.444770435	0.041797416	0.440410292	0.221572649	0.206016385	0	0.425796212	0.103692638	0	0.021205245	0.074511058	0.018817404	0.22120866	0.349944179
Zm00001d006855	0.191909032	0.138120078	0.176039486	0.786404894	0.969328499	1.097202506	0.411117127	0.655629395	0.59732782	0.14494063	0.184383578	0.05567784	0.761859596	0.886590557	0.908622886
Zm00001d006856	4.400584911	4.856632483	4.784454945	9.594623988	6.194325139	8.244192786	8.879785739	6.174100784	7.650494134	0.89785169	2.960141583	1.213491387	7.278018858	7.315028032	6.375879319
Zm00001d006857	0.052089911	0.035785874	0.047081814	0.100399338	0.006239645	0.069618838	0.083000538	0.097067799	0.064241307	0.006530961	0.071658599	0.073439978	0.180169966	0.207646508	0.218992893
Zm00001d006858	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006860	50.10540905	55.64356715	38.2498864	37.91593022	41.59286602	37.90655098	40.81958688	39.96393033	38.20588462	22.82224	14.57077928	6.053485988	95.38715745	89.2885171	93.22203445
Zm00001d006861	10.31137011	11.27068328	10.10036863	9.023431832	7.422500411	9.157161486	7.223668301	7.067296415	5.803845593	2.981797976	4.24858727	3.656175651	6.363848104	6.366327023	6.347620987
Zm00001d006862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d006865	0	0	0	0	0	0	0	0	0	0.030884333	0	0	0	0	0
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Zm00001d006868	9.112053974	8.903351036	8.260214411	45.48022715	52.3880831	55.16861281	47.02555784	49.65087977	44.78744282	3.835334179	5.932167425	1.131636692	16.52638538	18.11145902	23.67955609
Zm00001d006869	0	0	0	0	0	0.107538569	0.17949255	0	0	0.211852646	0.138361674	0.024308784	0	0.024055998	0
Zm00001d006871	14.52164926	10.53475549	20.96405368	35.97988606	83.38855226	31.71784471	43.93709091	58.46119732	50.91316707	5.834622044	16.88692247	2.945401584	13.07002085	10.32561091	19.82571545
Zm00001d006872	17.31888955	16.66822628	19.22943958	16.31372187	17.42783968	17.11543355	16.2455969	16.43482587	17.01252632	32.3079339	47.15748633	26.88974836	10.24224941	9.574727779	9.350403859
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Zm00001d006874	0.19081361	0.424112554	0.055798521	1.97378814	1.641656858	1.416388021	2.596894676	3.085749047	1.67496813	0.851411085	1.075722256	0.285977478	1.921739007	1.894893721	1.803783151
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Zm00001d006881	20.98924285	16.87416228	16.97657105	9.338623639	12.19747792	10.38349042	1.259719914	1.661871184	1.401736589	1.838357845	2.295156671	2.227421175	0.773272919	0.74303167	0.814192501
Zm00001d006882	228.3237005	172.426384	226.8339323	82.73140852	90.00737837	95.48732032	50.33995011	59.47978019	64.95028927	45.2258078	55.98512724	47.30664816	162.2382286	129.5773434	127.9130152
Zm00001d006883	16.66140829	12.15359944	13.27445225	7.246729321	41.96351059	14.38153753	36.13029025	45.23368706	38.37477364	47.84854894	46.28582553	39.70516003	2.8346883	2.046919578	3.094738753
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Zm00001d006885	5.417634146	6.357023594	5.530721009	9.542027951	10.14690735	12.52290551	8.165060211	7.272331695	6.108750102	1.646848065	1.115397628	0.483787072	8.357598344	7.423750993	8.526062798
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Zm00001d006900	1.054598004	0.141211438	0.470269137	0.913245901	36.5309188	8.142773875	21.77605272	27.53595453	21.56163781	2.860607947	3.773153345	1.525304561	3.344352366	5.822685863	11.64574826
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Zm00001d007039	7.088787959	6.684157019	7.145153695	9.544258249	9.889463555	8.794668538	7.624183785	7.326398322	7.872940133	1.794440578	2.634878506	0.859104114	3.657881092	4.328139806	4.601692121
Zm00001d007041	0.058991301	0.092874702	0	0	0	0	0	0	0	0.020339682	0	0	0	0	0
Zm00001d007042	26.65398844	23.57801368	23.16758621	20.1167472	27.46573107	21.87428624	29.32934093	30.69971729	33.22756743	69.41491654	76.00423752	87.09648481	15.33523691	15.52598334	17.96631875
Zm00001d007043	19.53537166	19.41297823	19.71651619	13.95853475	11.71806698	11.45697664	10.64302395	10.20017192	10.85468553	2.062025134	4.433362132	1.57420225	7.757789218	7.588150268	9.026068589
Zm00001d007044	17.36874927	18.15339083	16.46271272	9.916707124	13.41776082	10.17408989	10.95517265	11.96110676	10.29334358	24.96106284	25.62213572	27.23335959	6.494351533	5.843901991	6.045636651
Zm00001d007045	0	0.011276339	0.011126817	0.133989547	0.27132855	0.285184961	0.439386478	0.323858472	0.121456878	0	0	0.109095021	0.731364854	1.344599527	2.432459618
Zm00001d007046	0.114723641	0.072247425	0.059407866	0.691545352	0.906991368	0.890163666	0.692615308	0.276661195	0.754592358	0	0.084390945	0.148266584	0.5563109	0.241047828	0.464226648
Zm00001d007047	0.811207597	0	0.237216751	0	0	0	0	0	0	0.559394508	0.782262616	0.50216942	0	0	0
Zm00001d007048	16.68610077	17.55428649	19.37828317	20.28970216	24.64105926	18.80310466	22.65063723	25.96726205	25.30838231	18.31900979	25.62388293	17.12908239	17.44839858	18.41020713	18.09349539
Zm00001d007049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007050	2.927055193	3.537059696	2.72614411	2.787968505	7.603191277	3.568925958	5.648741527	7.749435119	6.625276077	12.54423143	15.83037131	7.908813853	1.407122613	0.911312988	1.348784167
Zm00001d007053	5.42797041	5.950080797	6.016969571	8.87087622	12.15443504	8.492149679	10.26775791	10.90387519	11.21836257	3.456238759	5.258024221	2.090915706	5.537072607	4.933280957	5.387784613
Zm00001d007054	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007055	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007056	0.009634414	0.00606729	0.035921035	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007057	0.081497669	0.3336015	0	0	0.026846284	0	0	0	0	0	0	0	0	0	0
Zm00001d007058	2.880983441	2.724841875	2.498330257	8.218403098	8.725406329	8.395967554	7.411168704	7.090202269	7.699383255	3.884395516	5.557966957	2.604939247	4.183267681	4.504609743	4.666862537
Zm00001d007059	44.71538138	45.67889473	50.23813383	59.98714256	91.62529582	59.17841205	63.6870576	79.68370933	71.44674262	64.45739922	74.60107514	47.14377756	73.39237818	69.80603041	97.43416709
Zm00001d007060	17.09367358	16.13986761	16.32875114	14.2026991	15.13359204	15.25691609	15.35792251	13.88218463	12.6338942	17.63493863	19.33060696	17.26827842	13.38623103	12.65660858	12.62537427
Zm00001d007061	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007062	6.290946286	8.826722854	6.599953591	11.04977809	15.78903742	13.81302929	14.99895049	17.33816973	17.08433299	5.083056778	5.735174073	3.147535589	9.040975613	7.115288174	8.522124436
Zm00001d007063	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007064	0.215410669	0.265144386	0.197742567	0.201488131	0.148368378	0.347878125	0.163037727	0.070837155	0.111698416	0	0.015434078	0	0.180788591	0.222723652	0.172632862
Zm00001d007065	53.99930049	57.21085387	52.03365013	27.2457922	24.17390306	27.16780361	20.44908349	21.03802317	21.36108191	37.16071061	35.49773532	50.62109875	18.8934769	19.46931449	19.1875207
Zm00001d007067	10.93064318	11.41006438	12.29161159	14.28891267	18.94171622	15.00038284	14.77394433	16.04838203	14.5836791	7.629447862	11.60790882	4.785762266	8.817076001	8.067187272	7.400493911
Zm00001d007068	40.8201757	36.43143996	38.53390031	23.66163617	32.90397519	27.83336569	30.84322665	30.36029092	34.50505171	60.25365579	54.7701259	71.0897365	22.56884133	22.95009091	21.03978927
Zm00001d007069	2.606221851	2.447512417	2.798627092	14.91177065	15.89014919	16.91718363	16.06833516	16.62222562	16.42340534	8.339660888	9.54246685	3.545505271	15.05551258	13.40800064	14.74856711
Zm00001d007070	9.763268172	9.015474176	9.639323416	10.29475498	15.15896223	11.60306917	15.75738657	15.53876727	16.7702603	66.9316353	62.84965702	68.07973391	12.19719085	12.55343013	15.52150723
Zm00001d007071	0.064563088	0	0.060179397	0.241560848	0.297749691	0.079098617	0.433791322	0.661711301	0.019906048	0.1558255	0.081416126	0.089400074	0.307054717	0.353881622	0.858403017
Zm00001d007072	21.78073667	19.22625643	20.48040256	201.8572452	246.3369854	222.3610001	257.028919	244.1154759	248.1062721	35.0482566	50.59852404	19.22770848	149.7583648	148.0504739	151.4901227
Zm00001d007073	26.43256874	33.72167612	22.75785866	93.29837831	71.51590883	112.8406589	85.40291367	83.33625712	56.91211001	62.23262536	40.71400077	62.55978175	153.7406671	141.6979798	152.3774961
Zm00001d007075	8.919824264	9.964239616	9.716188198	9.912001747	12.3408359	11.09942488	11.40719167	11.89231442	12.18516071	6.671574086	8.410407283	5.453911552	8.484334304	8.08780602	8.533116452
Zm00001d007076	8.199414018	11.53168227	6.924413222	10.87933589	9.379477505	11.06420772	19.5215617	16.27382912	18.13213373	6.594622357	11.11572777	5.987738525	16.58273458	18.07724837	15.59429877
Zm00001d007077	32.28958824	35.76247556	33.83403494	12.11799723	16.14025914	10.79711118	16.35560229	16.80586874	15.34426361	33.01137047	30.10905927	26.6462199	12.04988696	11.04125997	13.56251696
Zm00001d007078	0	0.322737029	0	0.009399212	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007079	5.542107905	6.13260229	3.829431061	1.927980749	4.281755082	2.911772202	24.14658046	29.22810254	22.5670277	80.59738357	43.13944575	65.88966996	16.9696221	16.35876325	21.65396253
Zm00001d007080	3.873303925	4.236540544	3.715879909	3.771270879	4.868609819	3.839968784	6.496135932	5.238750338	6.196297112	6.267389708	6.523192003	4.262442218	3.597701819	3.091423662	3.53040661
Zm00001d007081	3.422014496	3.699768781	3.746891997	4.762968944	4.766156917	5.276615588	6.617191874	6.406315934	6.344963514	4.079115024	8.583865628	5.222068888	1.543786708	1.722588257	1.470489038
Zm00001d007082	0	0	0	0	0	0	0.005340969	0	0.005637052	0.334105293	0	0.005063314	0.066493195	0.135287844	0.058129031
Zm00001d007083	0.264726521	0.023816002	0.117501036	0.023582531	0.049830861	0.185329263	0.265142522	0.957599781	0.303161133	1.486484748	1.430694156	0.81691636	0.232758018	0.124372504	0.371644267
Zm00001d007084	89.48905471	99.32873493	93.78502217	89.26017156	117.3575987	97.2817786	92.54729177	119.4710697	105.8367146	396.8159996	308.1199064	368.3381295	87.0199686	80.46177537	94.60013263
Zm00001d007085	0.762731271	0.535052731	0.395968532	1.059615078	0.648804147	1.182848315	0.92509649	1.315492072	0.988287506	0.213049554	0.036525137	0.074866248	1.026385753	1.545258092	1.785967465
Zm00001d007086	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007087	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007088	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007089	22.92792271	23.87874778	21.07351622	13.13138084	10.11414427	14.01115282	11.04972647	8.802696328	10.82256881	8.465794268	9.474786081	10.58752721	10.02341773	10.96087583	9.306757041
Zm00001d007090	11.32064627	12.6181699	11.5912496	12.11033806	10.75847309	12.86306867	10.15949117	10.26854089	9.936320429	2.429522794	5.976032109	3.519719778	10.35826708	10.63891246	11.64507261
Zm00001d007091	0.484973436	0.600294357	0.696252926	1.512094577	0.815306036	1.413688217	0.957513163	1.875289112	1.577764354	3.690252817	5.672811709	3.297490285	1.721671653	1.915754936	1.343735705
Zm00001d007092	14.36007182	14.65679883	17.66459277	62.06642031	29.14892233	48.34049478	27.18188379	26.8472285	29.02494344	4.176049894	5.81438829	2.951594043	76.96180803	93.84477402	89.85997273
Zm00001d007093	0.030540494	0.024728056	0.027111297	0.010882508	0.080483162	0.045434059	0.040784648	0.060498023	0.037664899	0.048137573	0.030259855	0.012082633	0.122056405	0.090873096	0.126103495
Zm00001d007094	0	0	0	0	0.02985722	0	0	0	0.018630302	0	0	0	0	0	0.008732493
Zm00001d007095	1.959855783	2.158444007	1.851325669	3.016938565	3.756214567	2.887160625	3.869760986	3.295550394	3.737699576	2.472439639	3.824132261	2.805869904	1.580624043	1.417542421	1.216811812
Zm00001d007096	11.85453791	13.28878602	10.75523803	16.3402775	13.73157959	14.62156225	15.96488006	13.58082456	13.15289543	6.031118942	8.781112774	7.209718104	15.54456232	14.95886335	12.83064675
Zm00001d007097	312.6725125	307.4303551	297.0885904	264.810451	574.4168437	363.4212733	572.3650955	608.1368507	584.9161744	90.42488831	199.1563523	75.12239783	477.9203196	464.6247103	446.3824758
Zm00001d007098	0	0	0	0	0	0	0.437666766	0	0.230964699	0	0	0.829828631	0	0	0
Zm00001d007099	0	0	0	0	0	0.229440166	0	0	0	0.258286103	0.236162528	0	0	0	0
Zm00001d007100	0.521404802	0.420295218	0.272161438	1.339563309	1.112984258	0.855981581	0.073111382	0.314347754	0.308657629	0	0.236702946	0	0.361750604	0.205769611	0.614871408
Zm00001d007101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007102	86.99538587	90.77137483	76.37024809	35.86926017	27.9356653	34.63549486	14.69927963	13.90563136	15.36762074	11.59355262	17.7455423	12.19117874	30.16498402	26.78264923	25.77351865
Zm00001d007103	6.848838657	8.726054283	8.106435087	6.892621869	11.9976232	8.131590263	8.116164742	9.777978418	9.381395902	2.929740427	4.912972369	2.489887164	4.527423812	4.483504467	5.513181386
Zm00001d007104	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007105	0.030825781	0	0	1.26867104	0.528027356	2.237623628	1.602886684	0.343812097	0.41818411	0.085027668	0.009718075	0.264642361	1.741999464	1.174282554	2.218515899
Zm00001d007106	0.072389287	0.013024939	0.051408925	0.270842336	0.204393226	0.468772987	0.32626369	0.236916436	0.331596821	0.156886339	0.247774151	0.057278262	0.300879193	0.45346102	0.585843261
Zm00001d007107	0.0317198	0.023970723	0.059132192	0.213621618	0.083590981	0.151558272	0.181616476	0.16828618	0.089974415	0.065620251	0.023999811	0.035137755	0.205873755	0.19472521	0.198031056
Zm00001d007108	0	0	0.031997457	0.214063652	0.124389466	0.210284145	0.100281462	0.093132182	0.158761045	0	0	0	0.086432484	0.056447784	0.049610207
Zm00001d007109	0.088201509	0.092575106	0	0	0	0	0	0	0	20.82147032	0	0	0	0	0
Zm00001d007110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007111	7.457580358	7.208466323	6.533150103	5.86239437	9.243330479	7.363463603	8.092240239	8.588327167	8.393333932	11.95132505	8.808469742	5.750356668	3.566984696	3.481205966	3.70599968
Zm00001d007112	0.064335218	0.07090164	0	0	0	0.009852431	0	0	0	0	0	0	0	0	0
Zm00001d007113	96.68477932	111.4990006	109.0842343	82.74526891	101.3279419	86.37959678	149.4992805	173.6548425	199.5074515	402.4149551	436.7277881	333.15584	50.36458043	45.7059757	60.1711403
Zm00001d007114	0.691367458	0.758421178	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007116	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007117	106.862884	100.5477445	135.3615872	128.9915573	80.97842758	120.6774034	53.69402892	46.91570987	70.21929428	22.40379237	44.86348658	22.73631476	43.36394738	40.3746616	41.41440881
Zm00001d007118	15.68674895	15.60043199	16.94021577	17.82057664	18.76839451	17.40097831	17.18137971	17.54457342	16.43780025	10.95722567	12.42953297	8.556170883	22.66021996	20.96285834	22.82250832
Zm00001d007119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007121	4.965606685	4.98766206	4.00974171	3.393783384	2.97224275	3.390545361	3.431296561	2.939616759	3.386291185	6.706447976	5.499753747	8.122881204	3.813278958	4.091661242	3.802171658
Zm00001d007122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007123	2.383059124	4.265249378	2.390121984	2.346353654	11.34817861	4.251308768	7.425612282	11.59452945	4.795166173	0.0576602	0.948983371	0.185252263	4.070256354	0.549977494	4.785245856
Zm00001d007124	6.248069171	8.735829497	3.72227023	5.236582575	9.365694696	5.600600787	14.8026791	6.358760808	9.73804305	2.885548512	5.077989462	2.031949352	13.06951577	17.17051065	13.23778181
Zm00001d007125	0.626809981	0.704121438	0.294757245	2.017709076	2.589352335	2.552841701	1.088743534	0.827283825	0.898386851	0.175231278	0.32044358	0.197045739	0.862557637	0.232138889	0.744263765
Zm00001d007127	0	0.065973064	0.13019655	0.598824613	0.368099235	0.44921044	0.061206272	0.210528687	0.075365875	0.024080314	0.044035414	0	0.078153511	0.153122725	0.242234668
Zm00001d007129	0.516694714	0.405403252	0.200013845	0.485940406	0.468762061	0.778305397	0.475088088	0.428961984	0.49097886	0.233641704	0.213629053	0.281493913	0.417060836	0.297137778	0.567990768
Zm00001d007130	0	0	0	0.061243426	0.142350876	0.553491436	0.091809408	0.011842239	0.096898983	0	0.049539841	0	1.98925108	1.464236057	3.224749014
Zm00001d007131	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007132	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007133	14.0709776	13.92957589	13.28119016	10.43141833	13.15799085	10.04668076	8.034128524	9.589502566	8.451339847	1.338901643	3.043741059	0.801289551	3.672333578	3.689336631	3.899735309
Zm00001d007135	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007138	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007139	17.218934	17.26221173	11.86472462	10.41907251	11.85542763	10.11453534	13.88604611	14.75674981	13.32631123	24.77682842	22.64878911	26.02915256	15.44454294	16.0532565	16.76109386
Zm00001d007140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007141	0.225669995	0.715164876	0.569973874	2.351434505	2.820060576	2.470452397	2.483840463	1.887191261	2.011040868	0.100398751	0.100978973	0.040320481	1.474460865	0.989549494	1.716925273
Zm00001d007142	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007143	0	0	0	0	0	0	0	0	0	0.013343868	0	0.032153657	0	0	0
Zm00001d007144	2.534861959	2.909385723	2.273982026	5.155231446	4.829860101	5.332315967	5.334416429	4.537057031	5.015394835	0.821600168	1.61743505	0.653181029	3.632470237	3.991616333	3.781025742
Zm00001d007145	22.27384436	20.05023113	21.53044392	17.72408964	24.23682488	17.5567978	18.36159124	21.70988467	18.64642828	3.383445854	7.277539673	2.645775752	8.610725232	8.482696345	8.633846751
Zm00001d007146	1.523951896	1.591376204	1.61848508	3.980907116	7.177795206	4.243294522	5.219180616	6.575049001	6.239791728	11.18911729	10.12588722	10.50345414	3.801382648	3.383743774	4.215737471
Zm00001d007147	0.023151963	0	0	0	0	0	0	0	0	0.638607468	0	0	0	0	0
Zm00001d007151	1.428291529	1.263167662	1.512681059	1.471511369	2.094729603	1.544435078	2.024519422	2.081608971	1.868700073	1.961284931	2.686020237	2.105009307	0.840846931	0.537798796	0.796931701
Zm00001d007152	2.115354497	3.592994564	3.545352204	4.311537213	3.918133207	4.116939641	5.918175669	6.019501009	5.098377245	10.91949602	11.8438327	14.39451853	3.746859663	3.153739199	3.10246709
Zm00001d007153	2.193946521	1.732207731	2.319681524	1.163903813	5.954280655	1.384060021	22.80479718	31.25125656	30.14684016	971.6475718	391.7888267	761.2087598	1.319156385	0.610244488	4.334767621
Zm00001d007154	20.94216556	16.80405478	24.3016006	46.77791876	86.22467204	44.04935267	51.88385081	63.38406397	54.58598219	6.912376262	15.84524559	3.779576617	18.8006274	16.48299587	20.51218985
Zm00001d007155	0.137730346	0.150845114	0.178613926	1.501131909	1.585976839	1.900142454	0.545789436	0.505434838	0.620357219	0	0.226542242	0.00663354	0.167526826	0.229759542	0.470781963
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Zm00001d007157	0.706347086	0.60266394	0.821214738	1.292971216	1.681293257	1.423676232	1.317924048	0.728060833	1.278582077	0	0	0	7.27955992	7.068814893	8.482452477
Zm00001d007158	34.82082577	34.17245694	37.76683842	22.25223041	26.62764822	21.96118563	25.55973912	27.60644163	28.60962981	53.40375057	55.61307021	73.33428072	16.82009932	15.48156787	16.80118351
Zm00001d007159	0.026649579	0	0.033120175	0	0	0	0	0	0	0.624820767	0.268847791	0.619945074	0	0	0
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Zm00001d007163	0.951690013	1.240349513	0	0.020641852	0	0	0	0	0	0.125547058	0	0	0	0	0
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Zm00001d007167	0.23571093	0.222659091	0.134265192	1.139127729	3.519948938	5.053617455	4.096994821	6.465862312	5.305219304	23.31124851	10.65106576	8.638384897	15.22161738	16.53725429	21.17660884
Zm00001d007168	0	0	0	0	0	0.023859163	0	0	0	0	0	0	0.087171224	0.042697683	0.045030804
Zm00001d007169	0.008953002	0	0.094577946	0	0	0	0.026153957	0.032385847	0.005520767	0.08643366	0.16935034	0.029753188	0	0	0.02587723
Zm00001d007172	2.546889403	3.253905947	2.09199649	0.675434995	1.36936167	1.183557517	1.684712462	1.764924649	1.471225347	12.30412495	9.515150098	20.00873199	0.016379604	0.088252545	0.203072532
Zm00001d007173	0.281156482	0.302475475	0.222028628	0.504053866	0.6097235	0.624324977	0.756306548	0.550892419	0.563458866	0.149449606	0.254830903	0.162214787	0.714456693	0.895745799	0.836340099
Zm00001d007174	3.917975575	3.884767557	3.349782574	13.72330747	22.99329629	11.67673236	18.18274124	25.73174045	18.33399655	19.23811487	19.02692371	8.618748586	13.05973759	11.57523769	16.41619912
Zm00001d007175	1.64487369	1.849497996	1.70472381	2.789640618	2.24985716	1.966384372	0.924438941	1.166672506	0.940589792	1.460036928	2.461812469	1.759067415	1.974417328	1.796928963	1.816154925
Zm00001d007179	5.06704291	4.622608354	5.397716437	8.198135492	11.03825598	7.554846092	6.387191533	7.015540122	6.538601362	1.50018837	2.846995381	1.23530228	4.654367023	3.658790599	4.089425905
Zm00001d007180	19.05665451	26.81613251	15.14829014	11.43227735	14.29596246	8.501785772	15.71542367	28.4526378	18.12340911	8.987923411	9.834579637	4.299764224	20.70793742	16.48636043	23.20780054
Zm00001d007181	0.335079263	0.731524857	0.111049998	0.585054849	1.295113854	0.903139478	2.375343402	2.478046491	0.854041034	2.033370003	1.042279395	1.459996697	31.39702366	26.32500523	31.4566652
Zm00001d007182	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007183	7.572146069	7.352865868	7.818866944	6.426061278	6.414838033	7.464537568	5.688731482	5.298285994	5.808252091	3.29665123	4.647886462	4.022760115	27.96667484	34.11503752	22.12523808
Zm00001d007184	0.398836646	0.146514734	0.123918839	0.386875816	0.416041252	0.271460813	0.330112109	0.594453511	0.327917465	0	0.062868226	0	4.450712608	2.119296377	2.222292053
Zm00001d007185	0.782056555	1.551844545	0.605171551	4.379860154	6.795297126	7.330569974	7.715854867	8.362294901	6.687755478	0.020350659	0.288416515	0.098074728	6.563597975	6.357092793	8.828394761
Zm00001d007186	7.865249641	6.476926264	7.400529873	8.539352868	28.98045087	13.23812159	22.95965059	26.84404607	29.26235757	21.93162412	21.82033069	19.4595682	4.192698779	3.705962359	4.688837137
Zm00001d007187	0.052010129	0	0.083106439	0.231659917	2.339843295	0.546167352	4.384398184	9.792089714	8.091170383	21.84707383	2.679674603	1.325132595	0.033257717	0.008145047	0.575537722
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Zm00001d007189	0.397334032	0.166814561	0.530386268	2.606161597	6.06925407	4.092629704	4.092584708	6.370181103	4.265015505	0.040591788	0.148459544	0	2.914793654	2.371444935	2.364916983
Zm00001d007190	0	0	0	0	0	0	0	0	0	0.050079377	0.091579626	0	0	0	0
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Zm00001d007192	22.20598995	20.93334746	27.52485261	30.35742153	40.30814805	26.19245235	24.2513239	28.47875691	26.51100797	2.091994437	5.960067469	0.98077841	11.12423117	9.477421684	14.36823583
Zm00001d007193	13.89192504	16.00471781	18.75178762	20.17917303	21.59520075	18.62753948	16.59917212	18.8373092	16.91772265	7.096613653	11.77642406	3.049461585	15.55850811	13.93003742	15.88638545
Zm00001d007194	43.95969156	41.62700422	41.13224638	31.34475676	37.30141967	33.55465865	35.28448834	41.9602813	38.48945047	30.53602666	36.10503626	21.82421359	18.13161451	14.68412131	16.65730363
Zm00001d007195	0.723957578	0.676388266	0.250036213	0.304255639	3.064234194	0.844249418	4.840579214	9.086474257	6.132661388	4.142394308	7.161635518	8.142513148	0.095726731	0.121562233	0.639192168
Zm00001d007196	0	0.035429979	0	0	0.009266387	0	0.016435017	0	0	0	0	0	0.05508737	0	0
Zm00001d007197	26.85263502	28.61396687	23.03569283	9.468922724	8.945612638	8.959675485	7.933043357	5.983050296	7.037761658	1.47272126	4.194148352	1.861167959	3.634159255	2.545246971	2.825904773
Zm00001d007199	0.15714062	0.113096681	0.306891868	0	0.354952834	0	0.131156297	0.162407845	0.276854236	0.247683225	0.056616961	0.099470427	0.025120771	0	0
Zm00001d007200	0.763623804	0.376513518	0.606940292	1.011419474	0.822888869	1.483090505	0.401186639	0.463947068	0.313919978	0.106132718	0.309787564	0.144263345	1.023436214	0.911737424	0.831524644
Zm00001d007201	24.09460564	17.66292105	21.77807041	15.16617321	14.92861022	10.79594152	7.001862235	9.92706734	8.849393284	13.12550039	25.272435	10.4588208	6.085610948	7.231241833	7.801026951
Zm00001d007202	5.215390376	4.804824658	6.382159031	2.862624773	4.32404921	2.907407101	1.885212596	1.691485585	2.17034906	0.138870934	0.505017794	0.185058452	0.676065807	0.74507957	1.378444608
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Zm00001d007208	5.245857698	4.828321787	5.369564122	18.40377116	25.77860763	18.4794496	22.28347485	27.38171465	30.28869881	18.90286229	19.24021528	12.62416396	13.943869	14.80384075	11.7115839
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Zm00001d007214	5.308160773	5.4127065	5.550871962	5.234669959	5.568262187	4.903724969	5.503373148	5.999975003	5.518919611	5.508390629	6.02943955	4.836684416	3.428156697	3.430506212	3.512034891
Zm00001d007215	263.8250226	244.6511241	264.4452703	80.24520028	111.5616006	86.43241613	104.45532	121.1882519	103.8773518	164.9117678	166.888568	211.1869913	57.3510403	58.57768003	70.03543847
Zm00001d007216	1.448302109	1.10378011	1.352831762	3.485965908	3.233256264	3.650451876	2.651693582	2.480445586	2.810070499	1.603046944	2.908209275	1.808740847	2.085227428	1.618017457	1.845077927
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Zm00001d007520	0.023290007	0.00977795	0.067538074	0.009682095	0	0.009511148	0.018142915	0	0	0.021413839	0	0	0	0	0
Zm00001d007521	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007522	11.69411601	13.05257102	8.838185524	5.591003018	5.109311269	3.933792805	3.710149912	4.191940071	3.534640247	3.614557644	4.835021811	2.475957764	11.8083537	11.34657416	11.40546454
Zm00001d007523	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007527	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007528	0.053612682	0.022508457	0	0	0	0	0	0	0.022039769	0	0	0	0.019998104	0	0
Zm00001d007529	4.099489676	4.034339075	3.591329453	5.292510322	5.781613678	5.275861429	6.687311386	6.83259706	7.158528974	4.633754526	7.1220165	5.791108059	4.152563709	4.789481902	4.985969144
Zm00001d007530	5.542828883	5.576829434	2.470271773	2.418463814	2.76808667	2.633137794	3.53108098	3.819079976	4.165281804	4.970023006	3.443897298	2.166039095	2.043423311	1.842359594	2.391423103
Zm00001d007531	1.571213387	2.140927113	1.111862561	2.984651416	1.584040536	2.603137101	1.306735129	1.368643122	1.44813449	1.241569146	1.840329102	2.099771895	1.827066064	1.900177864	1.861788906
Zm00001d007532	0.992767365	0.911745749	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007533	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007534	1.745513157	2.832941032	2.373158449	3.33113859	2.68587061	3.351261657	2.292875055	1.963437082	2.282730791	1.114813281	2.275012121	3.529793765	1.566561006	1.367697886	1.103833491
Zm00001d007535	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007536	0.022485582	0.028320674	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007538	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007540	12.63944268	11.80419936	13.14371019	0.965103956	2.03930449	1.632777032	0.452118027	1.140429928	0.954363566	2.668144172	1.192695034	0.761981007	0.384869176	0.659800043	3.081636315
Zm00001d007541	0.059526418	0.274903725	0.419217773	0.296955063	0	0.194474684	0.092742159	0.28710124	0.048941721	1.860859525	0.250215741	0.461584648	0.088815964	0.02175165	1.491114346
Zm00001d007542	0.124472539	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007543	0.103832156	0.239757806	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007546	0	0.070569548	0	0	0	0	0	0	0	0.051516081	0	0	0	0	0
Zm00001d007548	2.415530901	3.450836466	2.091691442	4.358427885	2.527097228	4.658245338	2.7898795	2.561992051	2.827310195	2.490849903	2.679406356	2.985516381	1.532983512	1.336254111	1.777749824
Zm00001d007549	0.252219553	0.494155605	0.162534401	0.821344023	0.861612534	0.806842375	0.289260799	0.242169128	0.184329872	0.180367883	0.435855818	0.067262331	0.470402964	0.865317339	0.577800441
Zm00001d007550	0.234900926	0.335306398	0.564408755	3.144418501	1.960270735	2.647629135	0.494067122	0.226589639	1.293984354	0	0.256721924	0.156127552	1.366880733	0.806854152	0.923363592
Zm00001d007551	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007553	0.16649676	0.09320146	0.321879698	0.023071948	0.170631927	0.135987541	0.021616829	0.133838129	0.182521494	0.051028107	0.069985918	0	0.124210147	0.04055991	0.021388108
Zm00001d007554	0.365335365	0.586074637	0.009558734	0.033572768	0.020268755	0.047114296	0.035949	0.023184805	0.02845641	0.068948948	0.009698939	0.042600204	0.043033895	0	0.013338238
Zm00001d007555	0.055915067	0.063382711	0.027796564	0.139469692	0.117882086	0.191810102	0.130673513	0.026968337	0.075854664	0.053981267	0.042306416	0.086716243	0.075084907	0.06129606	0.019393634
Zm00001d007558	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007559	1.119770993	1.522622831	0.990082688	2.508195326	1.849833657	2.689143464	2.974939073	1.672622111	1.800094061	1.644232068	2.529075489	4.31991066	0.9849922	0.952711624	0.882394561
Zm00001d007560	0.186510695	0.099837137	0.17384703	1.023475409	0.645107406	0.794041394	0.762782119	0.292356277	0.782066005	0.585195968	0.482151738	0.439042177	0.516560854	0.725831484	0.571424311
Zm00001d007561	0.029784823	0	0.407183328	1.597292604	0.706425738	1.861014682	0.38283923	0.035913717	0.440795372	0	0.262917325	0	1.299876776	0.391814031	0.688706408
Zm00001d007562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007564	0	0	10.7059363	12.87012824	14.8372193	13.90358065	13.26083239	13.32931824	13.66963327	12.40773109	16.79496485	10.81275629	16.64745413	16.43723057	15.6358571
Zm00001d007565	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007567	0	0.040610778	0.160289149	0.020106332	0.446097857	0.671545392	0.320250269	0.019439146	0.119295446	0.755974182	0.386270551	0.232166088	0.07216297	0	0.298222869
Zm00001d007569	0	0	0	0	0	0	0	0	0	0.459216409	0	0	0	0	0
Zm00001d007570	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007571	0.773746747	0.819643611	0.598621093	4.128339485	3.510946511	4.030338392	6.185159883	5.047882952	5.0492796	0.388687669	0.936949162	0.227052062	4.937050724	4.948818284	5.556915937
Zm00001d007572	1.71227486	1.822652284	1.954874232	6.529733043	3.35169056	5.638103651	1.176319354	0.558150168	1.086338891	0.049585498	0.238025744	0.084633245	4.159073188	4.17780405	4.852935067
Zm00001d007573	8.935196363	10.34426184	12.7171717	22.91689501	11.80711855	12.01176657	8.185330199	7.421446267	8.457799847	1.692444139	3.546302204	1.161139361	20.76282838	21.6780867	18.88716954
Zm00001d007575	1.797252317	1.882132583	1.656400124	7.0139916	6.332788488	6.494308989	4.849082707	3.408885482	3.723239642	0.738042046	2.011741952	0.525690922	4.99406129	3.951490806	3.256884466
Zm00001d007576	0.022559792	0	0	0	0.297258355	0	0.342694522	0	0.166934881	0	0	0.024990714	0	0.123654181	0
Zm00001d007577	11.11759574	10.58296257	12.44940435	19.50402198	22.21393744	19.72382489	20.9433886	21.14271642	21.19722471	6.936552359	12.39822282	5.783480842	15.11116593	14.62630981	15.183536
Zm00001d007578	0.153732751	0.394169186	0.136471082	0.301288143	0.390661945	0.430499782	0.404182622	0.529619156	0.365647728	0.355895429	0.339258379	0.054738696	0.270335819	0.25279086	0.285647206
Zm00001d007579	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007580	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007581	2.791931315	1.874470121	4.029006398	68.07118458	109.8921244	98.14850088	194.4481419	232.0474375	215.7991861	53.62106674	30.98811102	22.04560556	18.28079868	36.37323725	39.46784634
Zm00001d007582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007585	7.499340427	7.042441392	6.492485835	7.370487269	6.470401638	6.862283266	7.280541956	6.420114187	6.829347257	4.137806292	5.701323901	3.442889416	6.331001417	6.151013513	5.93213477
Zm00001d007586	0	0	0	0	0	0.057855379	0	0	0	0	0	0	0.026422366	0	0
Zm00001d007587	0	0	0	0	0	0	0	0	0.049735761	0	0	0	0	0	0
Zm00001d007589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007590	0	0	0	0.060141693	0.285934227	0.029539916	0.112697262	0	0.356834349	0	0	0	0	0	0
Zm00001d007592	0	0	0.036111902	0	0.019143312	0.035598581	0.050929342	0	0.008958779	0	0	0	0	0	0.067187299
Zm00001d007593	0	0	0	0.035082654	0.222393288	0.275705879	0.032870035	0.067837022	0	0	0.070945945	0	0.314784974	0	0
Zm00001d007594	17.33394561	18.82403537	14.0170167	8.714291013	8.664242249	7.328409114	8.504042878	8.336275199	8.253802506	6.976427191	8.209979898	5.656331903	7.02840792	6.6809013	7.456895485
Zm00001d007595	5.605557353	6.398261706	6.005692395	8.156508006	7.365095034	7.624984669	7.789553001	6.5587017	6.316255681	3.97014532	8.452730986	6.552887523	6.737582845	6.512763687	6.381056403
Zm00001d007596	5.454059385	4.142421824	5.407280692	8.01075101	9.373726145	7.755631321	9.192157309	8.080586385	8.455642	5.01943784	8.333901354	6.829815056	6.114804951	6.114559355	5.447402802
Zm00001d007597	22.42678848	20.07650033	27.00500624	72.81026969	49.69073497	78.36271015	192.2394578	180.679771	202.4761432	19.54532539	14.43259407	8.589873931	142.4308689	159.519558	161.0813594
Zm00001d007598	0	0	0	0	0	0	0	0.891048445	0.227843554	0	0	0	0	0	0.213592055
Zm00001d007599	52.3672954	52.15834559	47.70281749	27.83176457	24.38381073	25.20644223	32.68071168	26.57390967	26.70662945	6.245742098	11.46634779	3.559675703	32.9439909	30.35565455	27.57592277
Zm00001d007600	18.02433282	18.16487446	19.58332266	14.7606252	17.99553094	13.23914107	20.10261781	19.51967162	14.78503013	5.869374322	11.54001108	4.313758193	16.34127897	15.20033168	17.49412363
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Zm00001d007604	0	0	0	0	0	0	0	0	0	1.955473931	0	0	0	0	0
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Zm00001d007606	0	0.122642234	0.133117626	1.007951639	0.57736719	1.419620174	0.284452225	0.504863987	0.708522049	0.134294056	0.012279106	0.03235977	0.991572669	0.843279237	0.945646876
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Zm00001d007609	9.393874288	9.556307999	9.574441167	34.60908312	35.04485946	34.58345953	34.87771306	41.70987894	40.07404886	19.99614454	27.9100621	13.58216529	21.49361465	19.59921926	25.89835533
Zm00001d007610	3.404827113	3.055129189	2.332411497	4.560897316	6.323909412	5.679982412	6.197508637	7.173350935	6.531927302	6.271321108	7.94174988	5.743850455	2.697790921	2.398877686	2.487078405
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Zm00001d007636	28.44177084	24.84771309	22.33496923	12.31886535	19.04342242	14.39884004	17.79459567	18.80403732	20.34947387	37.88813804	34.96220074	38.80111208	8.586966826	8.447476539	8.261137881
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Zm00001d007639	25.59688376	28.15021988	24.51347735	39.34582407	21.47882209	30.47936456	19.0388054	16.90172271	18.16415961	0.954677746	3.301856287	0.404238892	54.42057032	60.47542833	60.75277462
Zm00001d007640	17.35285266	17.56600727	15.78119527	10.25788523	12.34397188	11.90825947	12.32364137	11.43021814	11.12701157	12.95262716	13.18864426	9.559398088	6.297859243	7.069286179	5.889901667
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Zm00001d007650	34.44635052	40.02598242	33.82742193	20.0548602	18.72081522	17.39381571	18.36804837	18.12039479	17.96748473	22.67566794	21.10419649	24.67104006	15.20618114	15.46759816	13.80771885
Zm00001d007651	7.116532726	4.009897056	7.215207431	4.204151479	0.987060621	4.818243491	1.750667063	0.677440941	0.230964699	0.774858308	2.125462756	3.734228839	2.30526092	0.410599636	2.814733656
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Zm00001d007753	267.4671886	285.002141	403.2533137	62.83223814	423.9230606	31.97945128	834.9166041	657.2997286	794.9314294	9124.767213	6980.191014	10162.99294	23.58365855	41.76446428	78.33896612
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Zm00001d007908	45.54420785	42.41991081	50.39403601	31.74744947	30.65331626	32.63557816	46.32547469	44.11858815	51.18752326	28.08993144	17.87651653	4.017894749	35.31006379	38.3046764	40.45919241
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Zm00001d007912	17.60307812	20.95344074	15.93582858	10.12397247	8.365567955	12.07400368	7.868980299	7.615001352	7.406827504	7.155455157	5.581816999	4.397469744	9.126281671	8.281005833	7.824353441
Zm00001d007913	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007915	9.085368341	6.798392969	6.633115319	8.552011933	21.21151497	11.34243187	18.73990664	20.10825591	18.03202535	4.216443122	7.558096032	3.463210897	7.045257589	8.123025134	6.719716691
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Zm00001d007922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d007929	7.291738473	7.511316338	8.221530931	8.010406642	7.09760658	7.070673121	6.45374711	6.405194357	8.005448231	4.852800758	5.908351229	5.080204852	7.868023995	7.442421266	7.024008178
Zm00001d007930	6.079850021	6.624313872	5.495947948	13.38504911	13.91946153	12.1711737	13.80152374	12.01267345	13.92214953	17.63819127	15.73057927	17.55950467	23.04528763	23.00083639	22.43216978
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Zm00001d007937	75.67899036	70.49630025	62.40564477	85.16141627	42.23057093	69.58047364	48.24982378	31.50396489	46.36746379	1.687107927	2.446879885	1.845735003	119.669495	129.7029266	119.6774539
Zm00001d007938	9.200041322	11.05960211	10.00781079	8.429754806	6.531975043	8.276710226	6.772094467	6.623583255	6.994988909	16.35321956	13.92358959	24.99515986	8.765094464	8.963133646	8.602937289
Zm00001d007939	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d007943	47.16530303	44.4940922	39.74954423	8.92897429	8.281109734	10.07469383	9.050167755	7.218537909	8.855734681	12.8377685	13.93272651	16.14349207	6.656918203	6.416789656	5.602192854
Zm00001d007945	7.823989832	7.922119803	6.629353961	9.867519217	9.156049492	11.54198841	9.571384095	9.26110119	8.455024482	6.11153573	7.849276092	4.769530122	8.144592156	7.82979364	7.98722696
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Zm00001d007947	15.78853059	17.8432073	16.6949888	14.78538514	14.27315995	16.87057306	14.9740931	14.50990213	14.65996176	5.244151735	7.419941716	4.81387247	10.66195332	11.83129513	10.53415201
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Zm00001d007949	0	0	0.002699071	0	0.002861613	0	0.01015081	0.002618649	0	0	0	0	0	0	0
Zm00001d007951	75.66869007	69.74742725	69.15961471	37.05088217	32.35594167	37.97768333	25.50292027	25.6962647	25.198375	28.34681142	31.73219944	24.36358697	29.40418932	32.6595219	30.62781504
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Zm00001d007953	0	0.009193257	0.009071356	0.072825072	0.009617649	0	0	0	0	0	0	0	0	0	0.059071375
Zm00001d007954	2.486371542	2.530225718	2.357795907	10.64883358	7.07101587	8.696604926	7.953290548	5.236544222	6.865697047	0.304732498	0.810270433	0.303843996	11.16910654	9.733263217	9.718974168
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Zm00001d007960	24.70983158	23.65022904	25.32652785	26.56088777	36.37257252	27.00986173	30.99622079	31.5332144	31.25254082	5.060526698	15.57023806	3.780408304	14.75299335	13.76048231	17.55014718
Zm00001d007961	17.754683	19.68573223	14.47705176	12.64394621	11.25022675	13.95761011	13.11791386	14.35438997	11.9822669	5.931874085	11.6708072	8.210291841	12.21878552	12.12422295	12.57953208
Zm00001d007962	84.3400962	97.47583782	94.49760379	55.90897963	60.20048204	57.79108119	49.94274506	57.08942932	56.40599756	26.83557577	18.18738034	16.77663536	33.17415712	28.14453883	24.48152191
Zm00001d007963	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d007964	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d007966	4.010653024	3.902164653	3.936134228	13.43106126	17.79016855	15.05927014	17.39440919	18.27548313	18.00538769	4.163147009	6.34202236	2.92074239	19.01484472	17.81328442	20.39974037
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Zm00001d008229	30.84509785	46.25241499	26.89979513	35.70579373	16.3045123	19.48767637	16.14974392	15.87074352	11.61769292	9.702696546	18.82542877	8.533909183	47.95034497	46.67813543	51.01700801
Zm00001d008230	367.729722	383.3279977	439.2895727	779.1519832	260.5341169	514.616131	347.7620114	267.5804271	307.4914843	0.848255099	1.187940555	0.482964044	555.0167483	613.9588089	515.0930532
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Zm00001d008284	21.34623428	21.81894268	21.52962804	12.1277825	16.6372259	11.79331446	14.33665968	17.04966781	15.58845771	16.53343159	20.35339989	14.43216166	10.76694144	9.421867046	11.24783295
Zm00001d008285	0.040492363	0.133875736	0.062905034	0.167282304	0.220087841	0.043407599	0.026614871	0.024412286	0.037453735	0.080278113	0.15637789	0.039248651	0.402146254	0.460537429	0.670035351
Zm00001d008286	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008287	1.416436362	1.625428453	1.90378731	10.01026858	11.87559677	9.717838752	10.54363759	11.04441896	11.72336395	3.487357945	4.472044688	1.592309313	7.913447834	8.200805999	11.69363226
Zm00001d008288	2.62527318	2.620278	1.169646179	2.100383247	3.328647365	0.91027892	4.514627833	4.360003349	3.665309347	2.937536507	2.123751434	1.207160128	2.993194515	4.289724816	4.065987887
Zm00001d008289	3.677890653	3.848086583	3.720159239	6.849007422	6.22458996	6.069487487	3.84345087	3.27123167	3.58671516	0.1546794	0.424290868	0.049267407	2.458154528	2.06467152	2.586608849
Zm00001d008290	1.409494705	1.43763694	1.902179005	0.053922106	0.136727562	0.07415808	0	0.031279689	0.021328808	0	0	0	0.096765021	0.094793717	0.009997351
Zm00001d008291	0.031127582	0	0	0	0	0	0.014549032	0	0	0	0	0	0	0	0
Zm00001d008292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008293	10.13562044	11.18071829	10.05762076	9.187599573	8.881590907	9.477190373	8.286668791	7.47109116	8.695516805	3.225230893	5.104417194	4.208391249	5.004535219	5.265142598	4.527547966
Zm00001d008294	2.34588258	2.255344534	2.373560895	3.574626304	3.324692174	3.689581308	2.034643277	1.240798695	1.548735431	0.03207295	0.131965793	0.096604545	1.151538722	1.564652641	2.36599866
Zm00001d008295	0.419557266	0.668020249	0.634566826	0.962589209	0.907472786	0.96983973	0.897254884	0.692020108	0.820078478	0.201977638	0.419267118	0.302536683	1.598950914	1.549021005	1.629087752
Zm00001d008296	0.196579834	0.011254229	0.044419999	0.078007313	0.682878214	0.251784339	0.814403452	0.764962178	0.308556761	0.271116	0.450715414	0.118779392	2.149796206	1.675004984	1.590911803
Zm00001d008297	7.930979516	6.758358295	8.874426597	16.70432466	21.81393961	15.81484992	14.95413236	19.4769996	16.48422694	2.772777277	4.965640508	1.674175055	12.67638452	11.41496137	14.26690947
Zm00001d008298	2.268442064	1.475184997	1.915735497	4.50809514	5.206368127	3.315190112	3.374300862	2.767690356	3.071568936	0.668415438	0.840347904	0.268437918	2.063910699	2.162066865	1.758795435
Zm00001d008299	0	0	0	0	0	0	0.034013138	0.011699359	0.083763634	0	0	0	0.021715472	0.010636541	0.078524262
Zm00001d008300	0	0	0	0	0	0	0	0	0	0	0	0	0.280006734	0.087278042	0.013149594
Zm00001d008303	7.574548747	7.227251128	6.470506769	12.37031556	9.463573125	12.00549681	10.46137705	8.3406626	8.027369223	1.186671114	2.245401943	1.043602593	9.508102158	8.458508023	7.467693552
Zm00001d008304	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008305	3.442796519	4.168361474	2.926090779	10.67886351	8.531338944	14.85788163	9.771772723	9.601390815	7.656357802	3.139928127	2.941000456	1.058014652	29.11819826	24.06911048	21.77632597
Zm00001d008306	6.757080715	6.035784527	5.204376351	7.547463019	8.91125518	8.169422784	12.24518176	11.51727922	10.64330192	6.490691123	9.376722357	5.581060758	9.723682604	9.869967872	9.837087893
Zm00001d008307	1.462552339	1.593865178	1.108646342	1.901650207	1.612773177	1.65203883	2.169571938	2.588975735	1.931656959	1.630847455	2.943072481	1.838467073	2.542020026	2.1832187	2.470407653
Zm00001d008308	1.565408464	1.652420212	1.009804157	2.268397738	1.944789288	1.835646434	1.742076003	1.869549844	1.875423277	1.357058279	2.434637364	1.601967431	2.077065914	1.756914199	1.223786976
Zm00001d008310	2.420577781	2.284681479	2.475044867	2.372999835	2.245883387	2.254969738	2.202591155	1.962428122	2.123975364	0.542792158	0.929161533	0.203236168	2.821290992	2.627571045	2.665092554
Zm00001d008311	0.159367527	0.310925396	0.411659171	1.13018269	0.942896708	1.35141569	0.854425565	1.156733632	0.813154115	0.568878831	0.673832421	0.308079807	0.674884594	0.661135802	0.632232483
Zm00001d008312	0	0.178620018	0.070500621	0.424485557	0.411104605	0.347492368	1.027427273	0.8720998	1.119364182	1.056186531	1.520112541	0.76978657	1.190239866	1.352550978	1.295289578
Zm00001d008313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008314	5.870372794	5.544739374	5.281925481	8.330552803	6.146472858	7.882209029	5.141967651	4.01378453	4.759391887	0.374566853	0.867778418	0.26629702	2.918018683	2.576939847	2.405877971
Zm00001d008315	0.936385885	0	0	0	0	0.229440166	0	0.225813647	0	0	0	0	0	0.205299818	0
Zm00001d008316	0.252170323	0.533130156	0.447711456	2.25763119	1.981761533	2.140534673	0.89450668	0.988195031	1.310625766	0.012420873	0.045427838	0.03990612	1.138824849	1.026769576	1.322357136
Zm00001d008317	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008318	0.03934168	0	0	0	0	0	0	0.094874223	0	3.770977097	0	0	0	0	0.090968703
Zm00001d008319	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008320	15.77320716	17.03894358	14.47235542	29.8115824	23.48670075	30.81490085	28.81561917	22.71420033	23.31528973	10.4072938	10.54430832	6.212359451	35.50844203	39.33827333	30.62497597
Zm00001d008321	0.007846884	0.002470795	0.004876065	0.100309509	0.010339421	0.079311431	0.135243992	0.120634841	0.159676843	0.048699661	0.034633104	0.023904161	0.024147517	0.030107105	0.043092327
Zm00001d008322	3.160827317	2.861912942	3.009376387	4.044278215	6.175994154	4.340433451	5.695310019	6.980021954	6.124262052	3.242343901	4.415919264	3.19086971	3.533398106	3.71122689	3.555786478
Zm00001d008323	8.177165678	8.202604049	7.909824969	3.446965753	5.400609701	4.993956858	6.485353891	7.130434599	7.625094482	3.551921322	4.605595592	3.640713117	6.589874152	5.909663396	5.547855598
Zm00001d008324	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008325	0	0	0	0	0.055598322	0	0	0.050877766	0	0	0	0	0.188870985	0	0
Zm00001d008326	0.019899904	0.008354667	0.020609716	0.082727656	0.441387552	0.121900525	0.019377531	0.019995629	0.044993851	0.009148416	0.025094417	0.003674035	0.048248701	0.007271658	0.126538525
Zm00001d008327	2.629683694	1.926323096	3.229387197	5.498485152	12.18402954	6.347844599	6.473820909	5.541843251	6.110940983	0.021523842	0.177121896	0.198813109	1.178826607	0.624453612	1.217913601
Zm00001d008329	9.771878541	2.781070709	7.648711746	7.265364488	34.4801305	13.5834886	26.13066112	17.95722888	27.9848258	10.95008813	13.38903572	5.152209206	16.66543048	14.42037208	20.69420755
Zm00001d008330	0.985541817	1.262512259	1.172490926	2.258648506	2.119930104	3.230116056	3.041419973	2.559499599	2.44128121	0.325284531	0.308044407	0.037324393	4.581081439	4.432350965	5.083569871
Zm00001d008331	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008332	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008333	9.372400863	9.972008721	8.730164543	8.589892085	13.18360322	10.28445328	10.3168522	12.41171367	12.32780064	38.28310543	26.87250488	40.47221045	8.41050195	7.493443349	9.710688963
Zm00001d008334	0	0.007673338	0	0	0	0	0	0	0	0	0	0.026995316	0	0	0
Zm00001d008338	6.989313549	6.648250854	5.348408031	7.342067251	6.832418822	6.740736349	6.527079643	6.585521908	5.751613749	16.54245347	16.52724697	21.16703803	6.702453431	6.24595437	5.517495605
Zm00001d008339	0.121847005	0.184160104	0	0.03039246	0.064220522	0.208990954	0.085426936	0.02938395	0	0	0	0.053990633	0	0.160287558	0
Zm00001d008340	129.9558828	123.2382411	109.6282456	29.72439633	32.97747908	27.85231269	12.76486971	13.87372189	17.24565332	134.9584902	99.9750269	207.375993	16.57223182	15.40905252	15.17259018
Zm00001d008341	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008342	4.75398875	5.287924341	5.908271212	5.551830009	6.940523864	6.625556899	3.122653313	2.374295753	2.5672249	0.164883258	1.223817547	0.062322521	2.195625195	1.711465456	3.008307853
Zm00001d008343	0.136712339	0.114793131	0.037756999	0.113667799	0	0	0	0	0	0	0.019155405	0	0	0	0.10537208
Zm00001d008345	41.56900133	44.54125543	35.52658598	22.86153022	23.02433293	20.80885555	22.44235372	21.36785312	23.05374394	8.715702032	14.4008052	7.308079099	18.13536692	17.6071106	15.4568979
Zm00001d008346	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008347	0	0	0.025626923	0	0.006792555	0	0	0	0	0.014219371	0	0	0.005768684	0	0.077479471
Zm00001d008348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d008354	5.278615319	4.478127887	5.875933041	6.257649156	5.804464818	5.984325336	5.990563856	5.780986176	5.936273929	3.895366967	4.974419259	3.833419293	4.525820966	4.714624774	4.785648654
Zm00001d008355	0	0	0	0.710423745	0	0.348940253	0	0.206054953	0.140503525	0.314248091	0.215498307	0.063101552	0.254975829	0.062445361	0
Zm00001d008356	0.806479	1.033583693	0.615443976	1.64105128	1.910913608	1.802752644	1.293693134	1.313633645	1.251990013	0.775660231	1.467507231	0.599505561	1.2468417	1.008173491	1.218662871
Zm00001d008357	20.76948121	17.31608057	18.84123515	23.85341004	42.89799555	26.4550092	38.05919032	39.76708064	37.35204742	40.36819684	43.80153116	45.26763445	29.99313841	30.01075197	29.92908792
Zm00001d008358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008359	0.280915765	0	0	0	0.041127526	0.803040582	0	0	0.038494116	0	0	0	1.187558656	1.334448816	0.938244552
Zm00001d008360	8.750251354	6.468832541	9.569446415	14.61590486	16.3029214	12.80756383	10.87216671	12.20623169	10.76088703	0.39922625	2.899384364	0.384793494	5.145791687	4.42444084	6.674202555
Zm00001d008362	0	0	0	0	0	0	0	0	0.023680369	0	0	0.085080744	0	0	0
Zm00001d008363	1.533246907	1.437655668	1.821122376	4.863565846	4.890655301	5.25770426	5.057375778	4.664384946	5.460148448	5.032532484	5.447981661	5.726158427	4.31714902	4.552760766	4.309303367
Zm00001d008367	0.160182568	0.342098736	0.502016142	1.259436899	0.908493009	0.802047081	5.248991254	6.398935264	1.425792265	8.39489043	0.324949052	0.038574561	0.958594813	0.626044172	1.409076471
Zm00001d008368	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008369	5.531069426	5.884372504	7.559455109	9.629576165	13.48593589	9.920839709	9.29490125	11.36259585	9.018822075	1.440811653	3.250028777	0.628567827	4.076843939	4.051923983	5.7631743
Zm00001d008370	0.212830565	0.315365746	0.155592031	2.26398776	1.616628132	2.285366931	1.550670986	1.403890887	1.343275458	0.103598272	0.126299374	0	1.176811519	0.796006803	1.38952194
Zm00001d008371	0	0	0	0	0	0	0	0	0	2.111409349	0	0	0	0	0
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Zm00001d008374	14.97142443	17.35462845	15.31740062	19.89986063	17.81111175	21.54671697	22.6542426	15.84431556	17.87565387	2.960333737	2.52243376	0.323852648	18.32037921	17.85438331	18.6965768
Zm00001d008375	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d008377	59.15315698	55.94166669	57.9291234	152.3591783	153.1595937	157.4760557	160.5345035	177.4100619	179.1400374	52.97575068	80.50072328	22.65328145	91.16628808	87.06866302	97.21234832
Zm00001d008379	103.3377175	98.75530622	115.0571161	247.3415422	183.519826	185.9910861	163.2553228	154.7625467	200.3981705	111.4313504	141.4853552	111.3234616	115.4722362	113.5371847	99.83099529
Zm00001d008380	5.901252052	5.213177281	5.755226087	6.858911267	9.827703394	6.647437334	8.744020464	9.833317892	7.45982744	0.271293316	1.633032736	0.354095041	3.586170833	3.306459416	4.122019335
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Zm00001d008387	73.75016805	63.24626615	86.11910568	100.838593	174.3217782	87.75125534	110.5342653	137.880081	116.9681212	19.21638178	45.38729232	8.557869433	32.68116025	30.89627601	45.53541217
Zm00001d008388	11.39986466	11.41068289	10.91721422	9.635652963	14.30678835	10.69878484	10.80739441	12.60449428	13.23155914	5.980404207	8.158828297	4.222125251	9.156023164	8.111216212	8.852846282
Zm00001d008389	53.87730741	47.93605909	39.69987809	38.59978219	71.29230432	44.03075389	57.92663378	58.45457876	52.86165266	78.02097387	86.92965529	85.55717018	40.49091479	37.80213551	44.92954119
Zm00001d008390	12.6373594	13.97619017	11.25848855	15.4269403	11.49562662	13.85103218	13.96332114	10.51556015	11.64466806	13.09828499	11.28439007	13.61918669	9.712295164	9.37872474	8.641748449
Zm00001d008391	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d008393	0	0	0.006235101	0.025027772	0.085937663	0.073757646	0	0	0	0	0	0.038902975	0	0	0
Zm00001d008394	49.54945935	54.18456559	49.31645006	67.00935357	36.16628079	61.57453384	33.01466303	25.10700348	27.37657144	7.203533173	8.719393047	3.203617263	103.5398001	102.1894319	83.62895693
Zm00001d008395	8.410780869	6.195085842	8.458388683	15.80847273	20.9704784	13.83623959	21.16665896	22.09267451	20.94724292	16.14961931	22.50551887	11.12782154	7.665903731	9.464544752	10.9781673
Zm00001d008396	11.56694268	12.05244008	12.43056792	7.001117006	5.036509271	4.674745598	6.497315563	6.656387954	5.371026127	5.244101126	3.518511086	2.832654187	12.65315999	13.11078836	11.8947782
Zm00001d008397	761.8006853	742.3173911	882.5926075	2474.876667	1664.834814	2396.370309	988.0019639	785.3590057	687.1468777	39.33780325	45.31522638	24.29789887	1098.884383	826.8668653	1225.807377
Zm00001d008398	0.315196931	0.191952031	0.090398694	0.449257073	0.282964047	0.530438692	0.619242476	0.626465527	0.662114407	0.119425421	0.301380962	0.04604319	0.399227419	0.330341815	0.460518973
Zm00001d008399	31.60299567	26.97467255	37.64316492	24.24686846	38.42597532	36.97808396	76.04022387	88.48430236	85.54022365	468.2540456	312.1393272	567.4664192	15.43555168	13.55530349	15.34343309
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Zm00001d008405	32.31382563	34.3299835	32.08161349	34.31413501	53.1756992	41.72406584	55.61980848	62.54424524	57.06469183	175.5060814	126.6598619	155.827206	31.47632649	30.11471591	33.41186815
Zm00001d008406	2.48036437	2.303576278	1.940898903	6.645087592	17.77176419	8.379681869	13.53518561	16.50453599	13.87354293	7.221755162	19.83058339	4.736663853	5.981106803	5.163472265	5.146302891
Zm00001d008407	25.18717437	24.39732648	26.95416403	24.36059893	38.09526609	25.03531228	30.02131297	34.92604266	35.95629785	28.87931669	46.76142688	26.143023	12.26104086	12.54509183	12.81355081
Zm00001d008408	5.874152532	5.358118706	4.828749208	6.718226863	5.275734417	9.778395062	6.0328864	5.08189479	5.051629626	12.44277125	9.151411738	15.04224283	16.89030637	17.64352172	16.8108059
Zm00001d008409	0.748698462	0.546933321	0.576900485	0.989768898	0.723448045	0.990638702	0.559906662	0.391195967	0.492454852	0.247818867	0.365064675	0.127170707	0.854573973	0.968484464	1.044487764
Zm00001d008410	0.025223679	0.158846584	0.125392249	0.975194219	0.299123076	0.309024578	0.442108034	0.577866288	1.057664911	0.20872567	0.159039341	0.055883293	0.931461516	0.525370567	1.020670521
Zm00001d008411	2.840439507	2.691313548	2.843398917	4.856095118	6.700449244	5.912702787	4.559915567	5.454893351	5.648534511	3.107751886	5.15508423	2.730482067	4.226785926	4.864704618	4.736253759
Zm00001d008412	13.67570164	14.64737848	13.40373481	9.934788532	8.824434849	10.27936933	10.83261002	8.409196898	10.23747252	4.072901734	6.349453393	3.721754291	7.364301887	7.513034051	6.337820722
Zm00001d008413	9.659753114	10.02046029	8.548125393	6.938309237	6.723523086	7.54998498	6.798581246	6.039425506	7.252684409	6.840061499	5.927084617	8.42179695	5.614973115	5.760416052	5.160026315
Zm00001d008414	0.02611506	0.032892015	0	0	0	0	0	0	0	0	0.008232982	0	0	0	0
Zm00001d008415	0	0	0.03351213	0	0	0	0	0.032513602	0	0	0.034003678	0.029870557	0	0	0
Zm00001d008417	6.024910632	6.580891192	5.616441659	7.699840093	7.814701764	8.594348886	7.94274483	8.056621588	7.77131787	7.398102207	7.5308515	7.345226996	7.044836259	6.658450451	7.196823938
Zm00001d008419	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d008421	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008422	147.814099	161.4432518	145.7840327	57.95633523	38.49978125	45.54045056	34.81866311	31.98031881	38.9369136	16.31240093	24.16769799	12.83566895	47.88555606	49.88773323	39.18917187
Zm00001d008423	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008424	3.102236179	4.338425859	3.890920836	5.736755126	5.036738129	5.303454985	6.024938505	4.746680603	5.523393657	6.176769997	6.717881503	8.073838659	4.213685063	4.362380166	3.289785611
Zm00001d008425	0.099066912	0.11784319	0.095760506	2.395535141	1.704209435	2.420667648	2.778232513	2.54831246	2.246698877	1.419429785	1.686508492	1.219353665	1.724474206	1.399741431	2.44977361
Zm00001d008427	0.568333617	0.739416698	0.776183178	2.508065191	1.761062245	2.32605581	2.130951297	3.780341208	3.43524379	8.268931049	1.575136097	0.933983686	2.124604442	1.697920467	2.245595045
Zm00001d008428	11.13026723	9.726986547	10.93365396	12.47852165	17.93701477	12.40109418	14.08141477	17.58938317	14.37913588	11.55881462	14.08289974	9.560981064	9.499830707	9.014050684	10.43125806
Zm00001d008429	13.1361064	15.75686397	11.52239466	10.48928853	10.57663512	12.09052502	13.0997964	12.26813251	12.86050282	9.526041864	10.39354785	9.29174766	12.88107155	12.85454929	13.47348503
Zm00001d008430	2.567733178	2.891062075	2.678662483	4.803548147	4.234332763	6.529968988	5.882595051	5.300901461	6.285473569	10.19473034	8.418784183	11.20528416	5.668386957	6.081758803	6.351111736
Zm00001d008431	21.74805501	15.24785081	37.4241417	1.009549533	0.924395259	1.366376569	0.504468535	0.563939871	0.510249643	14.95986309	23.88628606	5.539652051	0.241556049	0.335232992	0.894276209
Zm00001d008432	135.3868013	124.5134471	136.4549445	18.30786303	32.87015077	20.3664352	31.03248744	41.75629188	44.35637517	282.357287	317.4953768	429.0348909	13.01249269	12.74740135	17.50658957
Zm00001d008433	1.309842805	1.609390958	1.314248912	0.104908751	0.485577141	0.166853353	0.205945744	0.299452847	0.123501487	0.386710221	0.348535205	0.749897145	0.210674432	0.201991441	0.305650043
Zm00001d008434	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008435	0.271965352	0.877240087	0.618291476	1.075459527	0.742929543	0.902063885	0.930121511	1.263723728	0.245421004	0	0	0.00734807	2.523778221	1.265268455	6.48797526
Zm00001d008437	0.122064589	0.13665849	0.134846427	0.693508894	1.018640685	0.33232405	0.269416893	0.932153358	0.602157964	1.459008996	1.727407066	1.412272834	0.151771327	0.297358863	0.925141778
Zm00001d008438	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008439	24.56911629	22.53954711	24.63228561	31.74527302	29.93269691	31.76472594	30.81935047	28.03029813	28.11128109	16.39246725	19.12152086	15.25266874	19.68025707	17.55896812	18.93485127
Zm00001d008440	5.459506726	8.008165043	9.172437872	30.2475898	7.830180771	20.27236782	4.988034544	3.643634005	2.867795859	0.108450451	0.099161095	0.01244402	47.88182085	47.86690928	46.66416004
Zm00001d008441	0	0	0	0	0	0	0	0	0	0.051516081	0	0	0	0	0
Zm00001d008443	4.66980813	4.498754879	4.421829554	4.766652035	4.620972295	4.705195032	3.654020651	3.301348075	4.833587887	2.747407916	3.014493434	1.909083895	3.291961738	2.818611358	2.935135552
Zm00001d008444	0	0	0	0	0.013383251	0	0	0	0	0	0	0	0	0	0
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Zm00001d008449	5.172899321	3.847121161	3.949178052	24.60754248	11.58729137	8.26894091	8.606263509	21.56337236	14.67312488	2.547957498	5.001113869	3.356320395	1.130163134	1.215152976	0.598057754
Zm00001d008450	0	0	0	0	0	0	0	0	0.044961128	0	0.091945944	0	0.040796133	0	0.168595329
Zm00001d008451	0	0.279983247	0.046045121	0.18482569	0.195272155	0.272343612	0.043292241	0.044673161	0	0.204389003	0.093441	0	0.290216391	0.081229738	0
Zm00001d008452	1.702041171	3.215590729	2.86589273	4.416610272	4.521550284	1.984334932	3.432344485	5.494798742	3.995039987	5.717043591	11.94327968	3.862119095	7.034875284	8.456456149	9.4263578
Zm00001d008453	0	0	0	0	0	0	0	0	0	0	0.077135859	0	0	0	0
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Zm00001d008455	10.8015225	14.09845238	11.22003142	15.42740274	23.26300482	18.39784071	27.55503166	39.44864312	31.04999671	30.69142703	45.22373864	24.65156334	6.392679522	6.008432412	10.82914504
Zm00001d008456	19.72712271	21.07086851	16.10773893	16.90970588	25.53675324	18.19265683	21.85657349	21.20616244	18.99735874	5.63973761	13.42699212	7.255478847	9.694898444	9.858294292	9.735899449
Zm00001d008457	4.279489468	2.746003207	4.147040994	7.1186623	28.50669904	9.50109399	23.36759144	30.26323165	29.69117636	12.31469678	13.7977258	6.258905223	2.530343888	3.017664158	3.657267006
Zm00001d008458	17.22147958	17.1077663	20.6463538	17.17766946	13.61142169	19.79494644	32.92163032	26.71570401	31.94998579	0.717793057	2.32052562	0.272825202	31.52270855	35.65371176	36.95186112
Zm00001d008460	0.602404432	0.618224943	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d008463	0	0	0.043903488	0.264343719	0.651664053	1.341661747	0.908130266	1.107478816	0.304968891	0.097441269	0.044547454	1.721840803	0.158124545	0.077451611	0
Zm00001d008465	3.942216503	2.155516423	5.851139492	2.798785802	5.6243945	2.259868291	1.47064987	3.789885542	3.523196037	11.39742469	11.29450456	12.65104669	0.521626148	0.218999806	3.279725252
Zm00001d008466	0	0	0	0	0	0.017231617	0	0	0	3.336461218	0	0	0	0	0
Zm00001d008467	190.1818704	174.2463929	179.7093883	79.60526853	87.57991596	60.50858229	61.66760462	77.20300234	72.33106169	42.26527551	89.43668483	45.8086357	57.46555335	48.15562687	50.03660313
Zm00001d008468	51.22845748	47.14610854	55.53384261	16.7830654	29.91334889	15.78704099	18.17155082	27.68202134	32.23877225	28.51206574	43.31722284	44.24687427	8.927482684	6.495621911	10.99116087
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Zm00001d008489	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d008497	3.877647217	6.025817883	5.12313485	8.94401803	4.146796603	7.259821825	2.934309268	3.436870778	2.40116234	0.445284748	0.867750817	0.357655744	24.06456036	26.90274867	23.82560269
Zm00001d008498	4.000759364	2.310770827	3.942419164	9.772478324	54.36909365	14.22588626	41.63139326	54.09165515	41.34088132	12.84744145	11.5678745	7.486958187	11.17919999	10.06911176	11.56355948
Zm00001d008499	13.48322088	12.0600446	16.8905084	32.82743907	25.55207126	45.95316901	46.29250393	51.84974137	48.41160748	10.94620562	14.53025915	11.21695174	35.04540079	40.20548878	43.70664143
Zm00001d008500	70.76679781	72.49435799	66.75191263	28.10806992	39.03002205	33.29598007	44.23949411	42.62450763	34.47427069	14.77876894	26.27621872	11.39486	22.43048236	21.10472209	21.30348583
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Zm00001d008502	39.98811029	40.90916184	34.09267304	20.47758932	22.14667843	22.20205425	22.05993507	20.36237145	21.78469803	26.09197554	25.99163851	27.20030781	20.23464409	18.31609314	17.07211894
Zm00001d008503	0.827365742	0.533440704	0.422318023	2.321672989	2.58916739	2.38928542	2.497506929	2.511851442	1.615588082	0.699586889	0.589980956	0.392793523	1.835164649	1.21471524	2.214863435
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Zm00001d008513	11.388701	12.73690661	10.37903846	8.308408814	13.72747421	11.04620678	11.97062716	12.54750054	11.06788503	13.42646315	15.5324985	9.443664368	8.735324416	7.493443349	8.657872518
Zm00001d008514	0.18409174	0.01220338	0.024083132	0.604187452	0.153200763	1.115817449	0.430222398	0.514042122	0.489920158	0.935394744	0.085527323	0.010733078	0.119265802	0.021242929	0.649707371
Zm00001d008515	0	0	0	0.034637217	0	0	0	0.008371964	0	0	0	0	0.015539411	0.060891363	0
Zm00001d008516	1.128149738	1.863987848	1.100547855	2.708057151	2.79718266	2.184669409	2.09784904	2.574315648	2.513354981	0.501904671	0.397725359	0.403133252	4.927571923	2.859077764	3.197626577
Zm00001d008517	1.788025525	2.135641056	2.25661553	4.949677571	4.979835917	5.015116956	5.414924454	5.253391565	6.49003778	3.166907092	3.845322955	2.758640347	4.311926491	4.51278001	4.476265804
Zm00001d008518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008520	5.102999895	5.158257501	5.438265324	7.570843243	8.44034989	7.628266471	9.159793187	8.948744852	9.50640871	10.12512583	10.23068745	12.54325765	9.151768888	9.427458793	8.519444803
Zm00001d008523	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008524	0	0	0	0.102557413	0.487593104	0.100746659	0.216200801	0.594925578	0.608496469	0.113412845	0.466642951	0.409922865	0.023005338	0.270440061	0.213913246
Zm00001d008525	0.012958516	0	0.016104881	0.113129089	0.461018124	0.174635501	0.13627823	0.625000805	0.303647428	0.732749104	0.473892012	0.76080734	0.17401194	0.298317176	0.31461806
Zm00001d008526	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008527	0.397547998	1.001426348	0.988147643	5.701753096	9.254291297	4.112872511	8.51647204	10.54575267	6.945731605	7.584598523	7.408407073	3.327358097	6.673034622	6.706571269	12.23099189
Zm00001d008528	4.799649708	4.376831416	4.857374751	5.088537544	10.84925438	7.843642621	14.36015546	18.63367755	16.89067495	27.9778534	27.44767913	33.18718953	3.797187885	3.773612022	5.615222709
Zm00001d008529	722.8153967	835.7492957	758.5111498	732.2085	520.9655128	615.3080261	721.4416812	734.965842	834.3528758	2897.263002	2438.467158	2724.616009	483.5815666	399.86607	413.734197
Zm00001d008530	15.41988012	19.95531761	18.40653724	16.0919239	15.53520556	16.99257882	15.91291898	18.20950746	17.57927824	7.454257052	9.922945311	4.916051155	11.85934089	11.42895333	11.31830922
Zm00001d008531	12.83473496	13.04840882	13.13823275	12.38902901	17.83500714	13.60891156	15.77565865	16.21796636	15.41224074	6.138394951	10.2818218	3.381345699	7.386115797	7.114532222	7.776999658
Zm00001d008532	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008534	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008535	8.39813316	9.859694063	9.098520186	2.171299692	4.125940525	1.580541099	1.653831035	2.42395382	1.351614303	8.239835434	5.085878511	5.383432465	3.342834736	2.787300046	3.004769587
Zm00001d008537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008538	0	0	0	0	0	0	0	0	0	0.047613347	0	0	0	0	0
Zm00001d008539	0.264178433	0.540692286	0.041040217	0	0.478629033	0.647309455	0.964664067	1.114886701	0.69233621	0	0	0	0.997731505	0.724004188	1.107170411
Zm00001d008540	19.90085647	22.19537408	18.10528458	147.616985	134.5290122	142.9021699	135.0780096	149.7040381	133.2690881	88.85866245	86.84123275	82.46164538	121.0863937	108.3360586	109.3235335
Zm00001d008541	0	0	0	0	0	0	0	0	0	0.072939596	0	0	0	0	0
Zm00001d008542	0	0	0	0	0	0	0	0	0	0.051728081	0	0	0	0	0.130088988
Zm00001d008543	0	0	0	0	0	0	0.036347752	0	0	0.021450382	0	0	0	0.017049928	0
Zm00001d008544	0.017894285	0	0.044478141	0.022316976	0	0	0	0	0.022068616	0	0	0	0.02002428	0.039232688	0
Zm00001d008545	32.48665402	34.08581325	29.46435786	61.75020627	88.2642122	70.01068729	81.21358825	67.69052683	62.26978308	1.002509249	3.314002598	1.424623999	20.80477624	21.42297301	22.75519774
Zm00001d008546	35.92070854	35.2397699	35.29549342	71.5515022	102.8225801	72.76023936	79.47071609	71.02471901	66.49686954	1.57744109	4.66714566	0.86061154	22.88141418	21.90664102	25.31175429
Zm00001d008547	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008548	199.5013569	164.3198587	433.4659237	31.61019469	169.9864243	16.89302502	603.7500232	466.3781241	614.0438588	6195.12575	7667.888909	5301.857464	0.473151023	0.077251993	0.869048086
Zm00001d008549	8.312006161	7.192319413	10.1308029	23.52306978	23.16720185	20.92446289	17.94065894	17.82280581	18.39513324	1.620575314	5.424023363	0.951026247	19.05889737	22.11195589	23.21494313
Zm00001d008550	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008552	0	0.094870357	0.015602066	0.18788066	0.827082476	0.430648026	0.982841208	1.059603063	0.774124104	1.194662166	1.060671191	0.514547092	0.182627316	0.110096505	0.609590548
Zm00001d008553	0	0	0	0	0	0	0.042599565	0	0	1.646659999	0.310317562	0.959143593	0	0	0
Zm00001d008557	0.098001677	0.061716737	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008558	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008559	4.535611254	5.341820348	6.448671913	22.90184327	14.07408291	18.63143703	10.68572539	12.46868194	9.145020817	1.446471699	2.308703265	0.336315137	32.05900667	30.87137294	32.41999676
Zm00001d008560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008562	0	0	0	0	0.022239329	0	0	0	0.020815337	0.093110546	0.489527019	0	0	0	0
Zm00001d008563	0	0	0	0	0	0	0.008434444	0	0	0.009955061	0	0	0	0	0
Zm00001d008564	3.621215355	2.973267192	4.244101951	6.488497174	8.667186533	5.938711562	7.471885178	9.243974078	8.295949956	4.267241476	6.5028827	2.437317287	5.642382136	4.962129293	7.035109982
Zm00001d008565	0.213669616	0.16876871	0.153028369	0.252929672	0.310172361	0.168600535	0.143879326	0.349338198	0.477898082	0.199786866	0.214642023	0.104305612	0.409312192	0.321572933	0.259592145
Zm00001d008566	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008567	8.741983745	9.309542826	8.749821059	15.26853658	21.44445522	12.83662088	16.19132903	18.14224206	26.34290768	33.71554773	64.02236443	66.73461726	13.69449353	14.4096457	14.30076506
Zm00001d008568	0	0	0	0	0.055299636	0	0.073560262	0.01265111	0.051758781	0	0.013230901	0	0	0	0
Zm00001d008569	0.079584505	0.126385756	0.120409565	0.958020176	1.094235768	0.852081893	1.099760985	1.193251663	0.687048368	0.104987973	0.209444065	0.026831336	0.538217771	0.568978235	1.256144012
Zm00001d008570	1.005910188	0.585483363	1.145969131	1.777247363	9.980921512	3.146297397	8.432648043	12.91002045	6.484778075	0.451928693	1.556777069	0.447408998	0.27288383	0.309094096	0.731261093
Zm00001d008571	0.034831169	0.219349933	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008572	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008573	0.553043443	0.835872316	1.484619882	2.096784646	7.17056417	4.038221178	9.486675016	9.522539567	6.465890372	7.932476094	5.328178212	7.180098943	2.500248421	2.012801935	2.838907993
Zm00001d008574	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.035359759
Zm00001d008575	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008577	0	0.03679267	0	0	0	0	0.273074136	0.035223069	0.036026545	0.241729301	0	0	0.065378418	0.640465244	1.046966184
Zm00001d008578	0	0	0	0	0	0.126218027	0.024076619	0	0.050822677	0	0	0	0	0	0
Zm00001d008579	0	0	0	1.933931307	1.250962245	2.869064301	3.512984977	2.442132774	1.01474768	0	0	0	0	0.312226806	0.036587528
Zm00001d008580	1.057443508	1.268432391	0.750967945	3.171394399	4.180010861	3.76315676	4.383518794	4.098330553	4.316019883	0.52085319	1.873208122	1.143497741	2.479322979	2.180412614	2.474206309
Zm00001d008581	17.70087231	17.19239723	18.27543654	6.012289844	12.6208191	6.978805056	8.190801815	9.825768583	9.262824979	4.881029383	7.562394301	3.762722183	4.715872394	4.382739243	4.896630822
Zm00001d008582	12.07038686	10.74673402	12.8325165	1.896681662	5.35775118	1.96125669	3.554120632	4.748432636	4.600091988	1.87665722	2.583960968	1.489610411	2.81249685	2.281376195	3.146356032
Zm00001d008583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008584	0.772386097	0.92418199	1.631870316	0.674300504	2.417113491	1.348447079	2.098389599	1.164152276	2.619557245	0.213049554	0.511351916	0.106951783	0.453770543	0.486862139	0.491141053
Zm00001d008585	13.62798421	11.00358077	14.05047721	4.967797047	10.5655456	6.9783635	7.742312624	9.407735144	9.05694345	1.354020565	3.337803582	1.758299498	2.342454311	2.3848162	1.975101477
Zm00001d008586	0	0.023931855	0.047229047	0.11848624	0.068850736	0.075656261	0.244229613	0.217653599	0.263627184	0.17688739	0	0	0	0	0
Zm00001d008587	0.899319485	3.308665271	2.764779706	0	0.051973042	0.038659278	0.092180248	0.08560852	0.272413066	6.103629981	17.43882436	19.13801258	0	0.017295888	0.036481967
Zm00001d008588	0.219426644	0.13217632	0.047426796	2.2487663	2.426150922	1.823352835	1.259704519	0.954783592	1.317772069	1.315763118	0.685744788	0.475573456	1.014209509	1.307299956	1.147107087
Zm00001d008589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008590	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008591	15.6060278	13.8419735	11.96791098	23.90943363	20.01323909	24.46191496	16.4281459	14.55411132	16.145793	8.777274278	8.118341403	4.498705485	12.02892435	11.59007438	13.50079781
Zm00001d008592	0.617908878	0.229308313	0.363399692	0.729345443	1.12677471	0.763782055	0.838066507	0.478965508	0.836897509	0.015217825	0.173929223	0.085561427	0.11112748	0.060479769	0.159461381
Zm00001d008594	139.7984616	114.9384392	167.3973299	182.5519244	327.5937586	173.3570512	211.5486319	248.1353736	203.6767554	16.26929992	71.76002704	11.7576563	73.39430827	55.33133275	90.63332743
Zm00001d008595	0.974618102	1.171738056	1.145189614	5.569206496	12.98211811	8.065201022	13.60397651	20.17014911	14.27071447	7.576169152	11.13943291	9.216180033	13.15695108	14.51095835	12.72250071
Zm00001d008596	10.58246669	10.58417347	10.86344768	17.17493674	30.60666648	19.99324714	28.04820446	32.83685697	30.5014421	33.88964096	32.09066949	31.20648084	14.58487397	14.08554867	15.32871004
Zm00001d008597	0.328438052	0.317638652	0.34987181	1.8652052	3.299835544	2.428660087	2.432890226	2.390272812	2.126539837	0.954472968	1.434806404	3.138023134	2.415215061	2.494599759	3.953148192
Zm00001d008598	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008599	2.387040843	3.575897149	2.112594017	7.397428205	3.788628514	6.801565563	5.747560383	3.772222946	4.058990721	0.149641948	0.022804054	0.020032239	3.824637436	3.370067115	3.784195747
Zm00001d008600	131.3061163	189.6314796	108.495676	28.24927216	28.71774198	57.65966761	34.96769433	46.06586709	22.12275999	491.6713927	161.6906554	521.1639498	98.91003357	95.66163912	107.3109922
Zm00001d008601	15.97312543	9.983472922	8.63214563	6.141056796	7.965131203	4.880054605	5.285963617	8.640430232	3.727560574	0.855785432	3.281379788	1.640825133	1.791923835	1.470163117	2.38359977
Zm00001d008602	43.51862462	35.82286301	35.42824517	15.60548882	17.54123472	15.73337832	17.74065763	15.43506692	14.98220813	4.281883672	6.970095787	3.120066423	13.60748425	13.35605559	13.33806593
Zm00001d008604	7.3742338	7.169974576	7.287149271	12.26061223	25.00706385	10.11814965	21.0098272	26.12053431	26.23032495	34.2552564	27.32866426	29.27491612	8.771429867	4.925222855	20.6558979
Zm00001d008605	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008606	5.423885908	5.420432067	4.813072456	6.783400922	7.266991356	6.67605378	8.74854808	8.581420949	8.358318704	10.57048085	12.85478964	11.84821135	5.360448465	5.023413265	4.623947246
Zm00001d008609	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008610	81.38856082	82.75931322	84.73671544	165.2577214	89.1662931	148.6503265	25.42129958	18.34711899	24.4956018	0.256311103	1.933442757	0.29593931	75.38792568	77.32826077	122.2969673
Zm00001d008611	3.145462033	3.67606506	2.920340127	2.462235575	4.384661794	3.102028552	3.058549146	2.671933682	2.930054472	2.112649666	3.417966081	1.78338681	2.654466885	3.020202079	2.983201952
Zm00001d008612	2.417374696	4.834477757	5.37935745	30.39289542	8.006158369	15.18828111	5.744833837	7.36578756	2.115106827	0.630748857	0.86508281	0.18093635	107.9306287	103.3504301	104.8810994
Zm00001d008613	7.616214228	7.441636752	9.326097974	17.57727293	19.95730708	16.83367034	24.02776737	25.05420221	21.26434421	16.49951178	26.16978813	16.4820458	17.59574523	16.40520405	17.78029206
Zm00001d008614	7.147185137	7.570955836	6.265888791	7.202362279	7.418689911	7.838624685	7.270315987	6.405538865	7.141615633	2.439329107	4.615553063	2.855258078	4.113422215	3.774321834	3.50027422
Zm00001d008615	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008617	39.63035576	41.39982707	32.39037352	15.72956342	15.70139797	16.88644972	16.16439812	15.80154745	17.16234643	21.34039466	22.00453913	21.30667814	10.77334765	11.26845742	10.90890891
Zm00001d008618	8.518550011	8.01342123	8.515408389	9.466558356	14.47313888	11.37538153	7.687991439	6.691740717	7.277143055	0.267445184	1.018904526	0.230157637	2.521341532	2.318133775	3.389628728
Zm00001d008619	41.82682744	38.75956319	47.06298933	63.47566514	64.3789323	62.63956476	42.90235622	42.83788195	41.60006327	61.0011001	64.73400132	57.6970898	95.9409051	89.3433945	96.01256037
Zm00001d008620	465.9481551	356.9300301	388.3577087	327.4557132	291.3961973	385.4046912	173.2245354	207.6965168	115.333029	64.76328758	141.4963234	103.341787	852.1882454	796.4772341	757.7065675
Zm00001d008621	1.261164868	0.813750932	1.002095033	1.192544964	3.916055724	2.387305412	3.068135036	3.496312394	3.123481008	1.404314722	3.669581761	1.626087635	1.07003089	1.116225588	0.920262782
Zm00001d008622	5.275207741	4.875859764	4.938542111	8.001872316	8.559956846	8.223596576	9.480711415	9.546058093	9.408641959	1.661307512	2.926272335	1.343576091	8.137328667	8.970275511	8.660061099
Zm00001d008623	1.46602765	1.73161522	1.23790265	2.729426888	2.070345725	2.913266185	2.458928212	1.480127932	1.704208994	0.290223994	0.83147628	0.411827472	1.789671289	2.037724461	2.262607269
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Zm00001d008625	23.12350955	23.91613988	26.04804717	82.14056324	52.99444974	85.05171304	47.96225857	38.57784977	44.22275407	9.739314667	14.22533249	9.060858036	110.1481122	124.1588487	121.4716994
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Zm00001d008808	2.143769831	1.030295987	1.600907164	2.919870909	22.48634748	8.155698454	26.35738228	29.98708942	21.38281981	3.501251087	6.343416472	3.322596171	7.238928628	7.792356495	8.305117208
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Zm00001d008812	370.3858309	399.640626	382.6258461	43.54766346	46.29418487	44.82639322	23.64613068	14.93309421	23.28132287	0.331660255	1.637559696	0.319670132	8.826603899	6.999152891	7.117480896
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Zm00001d008826	81.90850802	76.98656633	90.85075786	148.8264605	132.070895	170.3060495	78.42564153	63.34022256	75.59912646	25.93722321	29.1218994	32.32051978	44.13080822	37.18258282	34.80351278
Zm00001d008827	0.67718816	0.652233701	0.594078663	1.768607366	1.375183671	1.805704805	1.647754161	1.815589095	1.503289463	39.68755616	5.796854232	51.76092354	4.858805135	5.737986341	4.808061713
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Zm00001d008889	0	0	0	0.054184862	0	0	0	0.034924568	0	0	0	0	0	0	0
Zm00001d008890	1.767298251	2.537830859	2.196403468	2.463816233	2.840389862	3.158131955	3.216012873	3.535763867	3.276294629	2.856565607	2.789323499	2.026315796	3.300304679	3.726669233	3.481313074
Zm00001d008891	4.546791116	3.783249929	5.880887049	4.477433627	19.52517686	6.320308326	11.0104971	14.99596316	16.32758796	5.745845464	11.65539377	5.543820337	1.974192085	2.058018678	1.795844712
Zm00001d008892	7.501362919	8.054415188	7.295025204	7.577853283	15.14745395	10.61467633	9.028302912	13.00209579	12.02663917	4.371022835	7.567567443	2.991480991	9.50650622	8.531629602	6.873034878
Zm00001d008893	14.74782516	12.60309703	13.23327845	12.26802947	26.65156845	14.21056356	20.14518273	25.091136	22.48965807	3.976407888	11.0190073	3.0305082	12.08040821	11.91514077	12.94985358
Zm00001d008894	0.443770122	0.441260613	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008895	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008896	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008898	0	0	0	0	0	0	0	0	0	0	0	0	0.077265403	0	0
Zm00001d008899	0.097147011	0.144603751	0.186589823	0	0.069821149	0	0	0	0	0	0.011136863	0.009783186	0	0	0
Zm00001d008900	14.82905829	11.49800909	12.39708647	15.07857044	15.54941996	13.17562023	17.82209008	17.4240605	19.41420042	9.888066981	12.27006648	6.412926472	10.8883815	9.983121596	9.65338685
Zm00001d008901	0.803009335	0.847041829	1.272427515	0.763627286	1.388733418	1.1190683	0.879671638	1.56129744	1.213158189	1.467413995	0.860727453	0.300218838	1.258030522	1.320430546	1.021227212
Zm00001d008902	2.495000191	2.023228941	2.879915134	2.27619768	4.56651258	2.495620688	2.012829455	1.838010179	2.453191546	3.98780828	3.447972916	2.438243975	3.671651939	3.896590542	3.659045494
Zm00001d008903	0.08979464	0.320440597	0.334791128	1.325191091	1.469110341	1.338463761	0.577087706	0.59549543	0.590622371	0.020640269	0.226467843	0	0.92946854	0.680849259	0.942984956
Zm00001d008904	1.867632378	1.926489072	1.275835883	4.720161627	5.20424438	4.884321705	6.431365297	6.308413392	6.299778073	8.756490847	8.911075962	9.321370417	4.041474541	4.36138289	4.671198983
Zm00001d008905	0.131752254	0.214749055	0.385275505	1.739813254	1.000769796	2.012934248	2.997545935	1.728805727	1.041828859	0	0	0	10.05159816	9.192636853	12.34717065
Zm00001d008906	17.2738681	17.87816804	13.74419599	5.271649093	5.962354507	5.897419744	5.487665019	4.909944627	4.851170633	0.339873472	0.568249614	0.163793213	5.087260233	4.641432379	4.23568629
Zm00001d008907	6.118594202	6.080824968	6.178418093	15.46041046	15.85135376	14.5725258	14.54119773	13.47762698	13.68681191	5.32903232	5.194061765	2.426982775	14.59424588	15.23142797	14.82025153
Zm00001d008909	14.61444308	13.77517577	12.49932296	1.784320104	1.843278322	1.3892691	1.275510237	1.086181147	1.895163825	32.6964177	16.86566597	25.21714121	0.960606612	0.813241914	1.12723621
Zm00001d008910	1.650595172	1.401018533	0.758112981	0.179004408	0.141841388	0.791297581	0.167714824	0.086532264	0.265518472	0	0	0.039749009	0.040153674	0.118006982	0.082970142
Zm00001d008911	549.8023434	605.1434716	632.2334045	144.4035722	89.01246875	160.0323745	51.50287432	37.84817373	48.5130571	17.49733373	9.608351193	22.45405632	50.17924316	37.68702442	42.10668335
Zm00001d008912	0	0	0	0.021527992	0	0.021147894	0	0	0.021288413	0	0	0	0	0.05676851	0.039913667
Zm00001d008913	1.237988396	0.981252763	0.90192364	1.091423833	1.04061309	1.019853479	1.521413043	1.02947049	1.105601508	0.544598566	0.726739022	0.118223049	1.433119414	1.181635876	1.567008691
Zm00001d008914	0	0	0	0	0	0	0	0	0	0	0	0	0	0.10743288	0.028325828
Zm00001d008915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008916	34.82010407	36.38815423	42.07767267	39.30488058	47.17440829	34.60870397	50.04272127	52.82292713	40.87022425	21.51123676	41.50425962	21.23140622	40.7397844	28.21426322	42.1124468
Zm00001d008917	2.771196065	4.653775598	2.984843876	6.681823334	4.381748837	2.489735858	1.7270094	1.782096889	1.594904878	1.019182999	1.164855715	1.432575778	1.240422952	0.810101984	0.42718411
Zm00001d008918	0	0.060417438	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008919	0	0.148207095	0.013294718	0	0	0	0.012499872	0.051594354	0.092349735	0	0	0	0.011970696	0	0
Zm00001d008920	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008922	2.432928001	2.677559622	2.512701725	2.216457182	2.389733129	2.365408459	2.426326586	2.208796144	1.96073819	1.205793971	1.663610838	0.899323225	0.93177311	0.944168157	1.245452264
Zm00001d008923	35.58344941	22.83018642	28.13556547	6.462372083	56.61137787	15.92924455	49.19802931	56.20833286	52.89220808	155.7703616	131.1917527	124.3533021	2.631778488	1.676854456	3.868555401
Zm00001d008924	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008925	24.64779721	14.82194839	19.43545164	22.40692824	114.6552431	33.06331448	83.79818683	131.4681477	95.39884292	213.0385337	147.6801001	144.222909	24.57276636	24.61447803	33.43511289
Zm00001d008926	100.5776829	105.3414143	94.61821984	24.71039114	14.75047656	23.69759456	13.92010249	10.18329549	14.41688343	6.114174822	6.683570689	4.142754076	20.37035156	20.74272	17.9819746
Zm00001d008927	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008928	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008929	0.222513573	0.381149069	0.276540523	1.08783636	2.533198546	1.450282926	2.683273394	2.693739227	2.722255796	0	0.078567091	0	3.396357723	2.400243573	2.737204434
Zm00001d008930	0.344312558	0.411342054	0.226541997	1.057742021	1.140877568	1.191049396	0.807616757	0.625796523	0.764963636	0.087291137	0.268175671	0.061699295	0.762094422	0.99912578	0.954202729
Zm00001d008931	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008932	22.96409881	20.22009733	24.15337465	17.97882838	27.31512855	20.06976618	22.77893417	21.65597151	22.24179983	16.16426457	19.90659745	15.27634962	12.21550867	12.1135838	12.50002131
Zm00001d008933	0.142014203	0.381583816	0.152962913	0.507726666	0.486523821	0.649550831	1.637310158	1.267152341	0.677219206	0.652869996	0.310413074	0.136341304	10.76407655	8.676618615	8.647224054
Zm00001d008934	0.071204343	0.153740801	0.05056741	0.126861383	0.455707675	0.162007975	0.463555536	0.613258788	0.589613007	0.196405057	0.423300246	0	0.045531398	0	0.129363045
Zm00001d008935	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008938	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008939	0.012682035	0	0	0	0	0	0	0.045874943	0.031280933	0.017490617	0.175916986	0	0.056766418	0	0.029324327
Zm00001d008940	19.56441036	22.20852406	16.85695665	29.80134039	16.56559898	26.67369486	17.96417689	13.71537859	14.92807893	3.115603725	4.305542642	2.030993509	43.06413524	47.15511357	42.74544797
Zm00001d008941	2.591047964	2.919680112	2.171737187	4.455942765	2.405272494	4.41200888	2.563760454	2.017276385	2.566001633	0.317751505	0.442506247	0.192396747	5.37452292	5.723537492	4.839684743
Zm00001d008942	0	0	0	0	0	0	0	0	0.045323718	0	0	0	0	0	0
Zm00001d008944	3.266776027	2.789980362	3.031065178	3.118423052	3.46420314	3.412875533	2.902138955	2.461867685	3.44935004	3.070476442	4.620340139	2.906182778	3.949830151	4.02879892	3.550487245
Zm00001d008945	0	0	0	0.145107829	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008946	0.026341491	0	0	0	0	0	0	0	0	0	0	0	0	0	0.030454359
Zm00001d008949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008950	0.021228624	0	0.052765993	0.529508382	0	0.416127506	0.024805647	0.17917822	0.104723124	0	0	0	0	0.023271563	0
Zm00001d008951	37.1969894	40.16151853	38.13774231	30.31141313	32.04145314	33.54518061	31.77068413	32.47626147	33.73658868	17.83379925	29.79550825	22.59636534	29.95430328	29.38605235	29.54550491
Zm00001d008952	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008953	6.733592827	5.782489829	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008954	3.745205058	4.00575567	4.233404858	3.226897631	3.027890646	2.880176091	3.57608666	3.345400318	2.847073751	2.078759644	2.568397073	1.81826316	3.270642703	3.560014398	3.946351735
Zm00001d008956	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008957	55.40029095	57.31699086	44.12553808	15.78437015	18.82754125	18.92891633	21.52602134	17.92936119	17.5089008	4.486046099	11.51123337	4.910407009	20.94313988	23.02993859	24.27422122
Zm00001d008958	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008959	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008960	0.407161606	0.029585859	0.175161338	0	0.010317214	0	0.036597565	0.01888247	0.038626399	0	0	0.216843822	0.008762056	0.01716711	0
Zm00001d008961	0	1.434914143	0	4.197958495	4.435229778	4.250726716	8.289972204	12.17597448	6.067197669	18.99772553	3.918151041	14.91491233	4.520026061	7.152832288	4.131064518
Zm00001d008962	60.55451733	64.10138814	66.18450777	97.25307099	69.42907596	100.8543448	61.51312438	51.54691342	62.193546	3.558480177	7.155006409	1.801611399	48.35874311	41.39490709	47.02158403
Zm00001d008963	7.859679426	9.168402724	9.778638624	33.29146779	17.55282755	31.25040946	8.775191332	7.41900729	6.146371429	0.965106498	0.785586838	0.151254657	76.29220594	76.54351247	70.82029902
Zm00001d008965	5.240727542	6.408139519	4.986457565	2.709089855	4.807400147	3.378247631	3.523951691	4.087723399	4.213480178	35.79737804	21.92049114	33.05713399	2.330477111	2.548868891	2.584521526
Zm00001d008966	0.488664222	0.264797124	0.586127984	0.24802824	2.283552029	0.49425951	0.743633308	1.19898975	1.23334765	7.789591094	8.462294293	9.97035996	0.114452991	0.124579274	0.190510619
Zm00001d008967	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008968	0.657002039	0.369732478	0.48643987	2.353551058	9.798948433	2.723018415	6.22332605	5.511653953	4.654718005	0.366301456	0.475947182	0.650371826	1.42348469	0.781524767	1.228263515
Zm00001d008969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008970	0.28726566	0.164460074	0.210963177	1.677332854	1.961394099	1.903674044	3.219379748	2.078261988	2.737604498	0.144067893	0.197591571	0.231432627	0.292235907	0.314910704	0.166059153
Zm00001d008971	0.038294773	0	0	0	0	0	0	0	0	1.478814548	0	0	0	0	0
Zm00001d008974	2.679042277	3.558314406	2.703975139	1.91358795	4.909952527	1.362607543	6.241949354	7.096904551	7.188707666	227.6245973	131.0086384	189.0258705	11.05601843	7.876125136	7.874748412
Zm00001d008975	5.952375646	5.54814693	5.774708897	5.711277057	11.45532768	5.561128269	7.457014172	8.606181346	7.230623011	2.615136227	6.090629292	1.570417431	7.671794818	6.240859263	6.67494386
Zm00001d008976	1.130101999	0.629808695	1.702793721	1.958212635	21.59817888	4.080073885	12.69105554	16.90645465	10.87848799	2.703407136	2.459234523	1.008147695	1.745847667	1.041517364	3.064038185
Zm00001d008977	33.81622614	33.88794776	27.46511778	16.8140496	17.80865046	16.44235777	22.32623515	19.97126762	22.91616572	7.311163994	8.795141993	5.219514583	20.49260729	20.58395495	18.90907515
Zm00001d008978	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008980	36.55358289	49.61139323	31.85746829	1.481309086	0.862365463	1.529397704	1.982692529	0.628394537	1.808609204	0	0.993431913	0.080555173	1.736005645	1.461487178	0.812710195
Zm00001d008981	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008982	2.284912522	0.818804154	1.508959804	2.599256668	11.47596022	4.333691532	5.954257408	5.959743251	4.19741999	0.263704692	0.578680769	0.190628465	0.770276631	0.985151993	0.519491725
Zm00001d008983	0.110022911	0.147514538	0.114682475	0.194757911	0.051441438	0.200015597	0.008294308	0.029956068	0.135688762	0.048948301	0.076084553	0	0	0	0.032826193
Zm00001d008984	5.513206644	6.566691319	5.237167265	9.88499513	8.979137582	10.51665656	13.34029503	10.22836187	10.98970798	8.671152983	9.369954168	8.768409449	6.006604304	5.472687568	5.266978412
Zm00001d008985	4.901172059	5.05861864	3.794865935	16.0548554	12.35595095	12.74251867	10.42013476	10.52240013	10.84801327	20.07518899	16.04751354	13.33781031	13.26974461	11.04046666	13.36874841
Zm00001d008986	0	0.099531617	0	0	0	0	0	0	0	0	0	0.029179909	0	0	0
Zm00001d008987	2.219987137	2.146487203	1.616387675	7.541600567	7.298123314	10.00918613	3.581018671	3.262630636	2.848480429	22.6382332	9.727468697	11.28582818	5.344873312	5.088494609	10.75901368
Zm00001d008989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d008992	32.37488728	33.60497339	29.97443426	12.53954293	26.42849217	15.60973539	24.02866631	29.36789259	28.59772426	58.40311468	59.65540442	45.13549571	7.5625484	6.762790143	8.100030675
Zm00001d008993	5.164524417	5.680029809	5.71932962	8.637801932	10.54291807	10.95517979	9.530589447	9.723391837	8.537124595	1.808664811	2.716697495	0.937839582	14.72887898	15.22952383	14.54339427
Zm00001d008994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d008996	1.827343148	1.432072729	2.077569549	3.848949242	8.052728845	4.129241487	4.286317637	5.81034164	4.924578993	0.345361764	0.990012025	0.239910852	2.506841567	1.832554958	2.550838977
Zm00001d008997	91.00940847	95.10433755	88.87376042	24.12117891	21.76042389	19.76261802	23.26239119	22.48806782	23.72130607	21.91211668	26.22265651	19.25276169	17.00156885	16.56642137	14.18432402
Zm00001d008998	0.079483918	0.200220578	0.098782847	0.297386684	0.471292753	0.925097414	0.479864288	0.479197565	0.098025715	1.662591647	0.835264757	3.38987408	0.163065937	0.24687701	0.750469759
Zm00001d008999	1.201238127	1.440917968	0.947874463	2.401767306	2.236029586	1.752001269	2.205730625	1.747300018	2.02231015	3.050441724	1.394577609	3.548472221	7.915985991	7.796525438	7.627351431
Zm00001d009000	44.20932905	35.2238675	59.03252032	98.03258121	159.0102781	79.43675531	85.77360585	99.02037732	83.92899358	4.668083682	17.14448497	3.058199706	30.76637805	29.14462337	47.87652618
Zm00001d009002	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009003	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009004	4.990579671	4.385000338	5.467965462	7.990460972	6.613985809	6.994182084	6.508392257	5.650795147	7.008506338	1.765648175	3.426057834	1.732618889	4.352955997	4.886614116	4.725000176
Zm00001d009005	2.163714975	2.20999375	2.421502052	4.698865717	6.276481438	4.929124516	6.446538532	6.428265536	7.069429326	5.430058556	5.362005125	5.32139861	3.460242846	3.71131958	3.845666086
Zm00001d009007	0.384798406	0.384066239	0.550414039	0.688164053	0.851424967	0.800542694	1.306492241	1.068027796	1.271471091	0.100132159	0.531020789	0.104554882	0.584968445	0.565092382	0.730273845
Zm00001d009008	0.04161715	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009010	0.069256504	0.314023764	0.017214437	0.604615953	0.857802682	1.74788309	2.249749074	1.954077364	2.340301875	182.1301704	47.4227278	61.66690287	5.130516682	6.453320007	7.926927025
Zm00001d009011	0.024143459	0	0.007501391	0.052693682	0	0.044368562	0.042317449	0.036389396	0.066995058	0.033297811	0.030445677	0.006686257	0	0	0
Zm00001d009012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009013	2.628510661	1.810055095	2.470862465	6.212725302	6.779724795	6.039175095	8.40506127	10.18153884	8.54041034	4.12835728	5.173837355	2.251859312	8.27421563	8.48114122	8.049256146
Zm00001d009014	43.66323556	42.32098126	41.72621336	19.1069801	19.51600058	17.44471244	19.48677375	19.45636878	20.60039158	11.82003698	15.85908439	11.63031904	11.55206904	12.43308959	12.13307064
Zm00001d009015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009016	9.529298397	10.89070703	9.870674195	14.84900272	12.58438063	12.4245254	16.91453324	16.98210314	15.9300717	7.292649618	9.207756928	4.76957073	24.99851517	26.2055973	23.54004598
Zm00001d009017	8.070648798	8.732891027	7.507636249	18.56781905	11.81372351	18.89501281	16.18120097	13.81527173	13.54264024	4.154013879	4.640211295	2.570067818	22.83006017	24.07025016	22.94374029
Zm00001d009019	0.023210923	0	0	0	0	0	0	0	0	0.192070141	0	0	0	0	0
Zm00001d009020	0.44677235	0.434091673	0.237964282	2.356139256	2.943440577	2.236345374	1.670571184	1.816207987	1.43258496	0.281678962	0.837042911	0.113123231	1.571279619	1.763163141	1.889023291
Zm00001d009021	0.398646615	0.285506073	0.291434816	1.930207912	2.111401114	1.924857381	0.812899079	0.980204235	0.877243278	0.21560761	0.197139675	0.112565376	1.312054009	0.925433827	1.545336686
Zm00001d009022	20.77695125	19.95097646	19.41788544	209.2454892	139.0735413	192.1517457	212.0526077	152.8789962	184.5012002	1.845371771	1.87594879	2.982842976	110.1774583	99.12299531	152.3795584
Zm00001d009023	35.3514059	33.70271441	41.27958886	38.33740163	41.51955443	31.35277339	29.82151458	31.61738166	33.13051521	2.866071406	11.40981644	1.926995307	18.2119371	17.71293868	20.51651097
Zm00001d009024	1.876443871	1.398739837	1.903714258	2.387978976	1.665146383	1.782820788	3.13232097	2.539612864	3.164281066	2.218221822	2.221383111	0.975687865	1.414151657	1.385342468	2.036603236
Zm00001d009025	0.10868345	0.108068848	0.199053637	0.285358492	0.173355103	0.301344218	0.33420161	0.282786713	0.162255117	0.02366722	0.08655999	0.082375248	0.179229871	0.181849253	0.277759041
Zm00001d009026	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009027	3.893132838	2.535039351	3.0207523	6.853073887	10.16778034	7.832757667	17.01649723	16.79510568	17.22116562	6.819647832	6.938101385	3.479425371	2.906958255	2.389656412	1.924395866
Zm00001d009028	19.31320862	21.97569801	26.10130137	305.8212673	74.8874746	231.1493087	101.3025314	60.27309838	59.04461438	1.175122004	1.074466574	0.527204433	911.4018669	1039.068371	854.3835707
Zm00001d009029	2.931798869	2.998697949	3.306182854	15.36183988	18.36127382	17.16858363	19.85588542	17.69439077	15.49664094	1.66622045	2.645033915	1.499615471	10.42362327	9.046488603	8.653613862
Zm00001d009030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009031	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009032	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009033	2.814665807	2.442829613	2.528020552	2.684369307	2.337438105	3.028173544	2.722355431	3.294027273	3.908817788	1.663666366	2.550187581	4.428025874	1.376340115	1.477945574	0.902407955
Zm00001d009034	1.08820619	0.756640226	1.356692184	1.352882281	2.322690578	1.158665638	1.636593465	1.620499968	1.617245847	1.032106726	1.575721458	1.707425803	0.858562679	1.025468079	1.057689621
Zm00001d009036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009037	0	0	0	0	0	0	0	0	0.012367814	0.048407922	0.034776914	0.024995297	0	0	0
Zm00001d009041	8.630149379	10.41249903	0	0	0	0	0	0	0	1.308133383	0	0	0	0	0
Zm00001d009046	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009047	0.017207343	0	0	0	0	0	0.02010678	0	0	0	0	0	0	0	0
Zm00001d009049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009051	4.999765548	5.542868345	5.9548182	3.377557463	2.195974867	2.871279795	0.69985	0.690774699	0.545956554	0	0.032837837	0.028846424	0.029140095	0.028546451	0.481700939
Zm00001d009054	18.48273004	18.86829631	18.06012142	19.97118969	21.80987969	20.81036122	25.98643427	21.66340194	21.3546901	35.30517966	32.22448689	39.86277363	18.1455705	17.43958463	16.86126312
Zm00001d009055	23.77957963	24.57060288	22.95331115	17.15115806	15.81769517	17.3360958	18.13530354	18.41272885	16.34445743	6.309779052	10.07502451	3.96175589	16.61244296	15.59346355	16.27390127
Zm00001d009057	0	0	0	0.010511819	0	0	0.315163244	0.863855536	0.311845062	0	0	0.009336851	0	0.009239758	0
Zm00001d009059	0	0	0	0	0	0	0	0	0	0.137340477	0	0	0	0	0
Zm00001d009060	0	0	0	0	0	0	0.022019072	0	0	0	0	0	0	0	0
Zm00001d009063	0.504616811	0.567121092	0.781511999	0.048410477	0.276192005	0.066578038	0.81643119	1.656864357	1.598915752	3.212075892	5.687882635	3.525947036	0	0	0.053852852
Zm00001d009066	0.242853685	0.089963269	0.266311125	0.035632539	0.696460485	0.140013644	0.300467153	0.327276414	0.546157903	0.059106224	0.216173851	0.269022291	0.031971891	0.156602787	0
Zm00001d009068	0.038152281	0	0	0	0.016757076	0.015580588	0	0	0	0.140315427	0.016037083	0	0	0.06970645	0.014703081
Zm00001d009070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009071	0.592914232	1.32122203	0.864411706	1.23716829	0.180288804	0.894032074	0.452997878	0.274969078	0	0.456039766	0.057514144	0.063154181	2.386012346	2.862382864	5.101625747
Zm00001d009074	10.57100586	11.07020565	12.54214513	11.20634549	15.06027885	11.13456773	13.013611	14.1073238	13.00128595	14.19328006	14.9322939	12.33352568	11.0195623	9.765626007	11.34032623
Zm00001d009075	4.888167392	5.872867571	4.726292415	5.631774917	5.350230454	7.087254701	4.427603648	4.402492635	5.467019094	8.193915926	6.906383692	9.663260902	7.157848199	7.359856906	6.799742225
Zm00001d009076	0	0	0.229603375	0	0	0	0.215876175	0	0	0	0	0.204653683	0	0	0
Zm00001d009077	16.88604529	17.59987419	15.56446491	8.519918225	7.767793199	7.983752985	8.20525716	7.717694596	7.714920825	7.616231016	7.298209339	10.49550907	4.88626407	4.605061549	3.922715177
Zm00001d009078	0	0	0	0	0	0	0	0	0	0	0	0	0.074992891	0.073465131	0
Zm00001d009079	0	0	0	0	0	0	0	0	0	0	0	0	0.430945063	0	0
Zm00001d009081	0.740236016	0.407894376	0.488732734	0	0	0	0	0	0	0.159516798	0	0.230624962	0	0	0.026744183
Zm00001d009082	1.396099032	0.364949262	0.294635545	0.492779476	1.631312616	1.549052683	3.570483788	3.970230305	3.086204594	31.4611384	14.01777043	19.63807842	1.414894774	0.519776417	1.64453536
Zm00001d009083	2.013592593	2.536127322	2.700064496	6.542507049	8.657822422	8.342106509	12.66222541	14.72733849	13.98500202	41.36381855	27.89784288	35.3368692	4.358307776	2.004060431	6.06502091
Zm00001d009084	32.26665357	11.65714913	34.86307607	4.490362325	168.8642055	41.12683878	208.1059704	277.4511585	206.399787	426.9879412	252.3617048	212.854097	2.96253868	2.426227204	20.72752892
Zm00001d009085	2.613173126	3.087977594	1.498437377	3.756070635	3.363472806	2.960455459	5.075400226	5.279873034	3.658276281	3.151757611	1.768517474	1.665322144	4.352465629	3.616761587	3.312804891
Zm00001d009086	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009087	0	0	0	0.025147743	0.159414658	0.049407469	0.023561706	0	0	0.278095656	0.127137644	0	0	0.022104553	0
Zm00001d009088	0.402095115	0.409975469	0.452132136	0.405956426	4.793603225	2.111235143	6.309389383	7.780450319	7.249509607	7.129998713	7.678259015	2.927063595	3.471099522	2.98058531	4.338850372
Zm00001d009089	0	0	0.011395473	0.011435392	0.048326912	0	0.010714176	0.033167799	0.022616262	0.012645798	0.057813094	0	0	0	0
Zm00001d009090	0.59764957	0.357552377	0.557070484	0.81989888	5.21712779	1.555930308	3.736191374	7.260340632	6.578328972	8.263179322	9.307642735	5.759826924	1.62181347	1.326708003	2.763857848
Zm00001d009091	0.16922836	0.274041958	0.165249467	0.015075305	0.573385347	0.088854812	0.579105495	0.524702267	0.357780859	2.684028791	1.265171318	0.803414988	0.040579708	0.13251005	0.083850462
Zm00001d009097	0	0	0.06050083	0	0	0	0	0	0	0	0	0	0.04539629	0	0
Zm00001d009100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009102	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009103	6.808329068	5.70528737	7.037045558	1.684597623	6.328220986	4.229072286	5.564089915	6.004795032	3.987944361	6.228510076	4.129308881	4.821412008	2.168057948	1.869621594	2.318816741
Zm00001d009104	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009106	1.356273206	0.911056599	1.146194626	6.247218331	16.20293956	8.042242017	15.84805253	19.29720987	18.84531406	0.84797104	1.710304026	0.480773731	0.283306477	0.495598105	0.313607382
Zm00001d009108	24.94855979	23.99999857	21.11285381	10.81522731	10.64109657	10.14135216	10.8296363	10.89685826	11.50113242	5.926957674	8.462324527	5.804277792	8.219473984	8.378744673	8.8143523
Zm00001d009109	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009110	0	0	0	0	0	0	0	0	0	0.133250074	0.0243673	0.010702737	0	0	0
Zm00001d009111	0	0.009833792	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009112	26.47582861	15.60895511	29.67305235	5.458216033	33.22999805	8.016224889	25.26606541	37.72340436	24.71615098	149.1657501	82.67484979	115.6348443	3.176085605	3.206386219	8.090772264
Zm00001d009113	0	0	0	0	0	0	0	0	0	0.005060356	0	0	0	0	0
Zm00001d009114	0	0	0.014904079	0	0	0	0	0	0	0.04961812	0	0	0	0	0
Zm00001d009115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009116	2.137112429	2.058359598	1.952948248	10.30849352	7.661065336	8.932870472	13.77141116	18.22757376	19.22475817	7.628643323	6.380731488	1.427400628	4.079613265	5.340155031	3.342838415
Zm00001d009117	4.293903258	3.907851282	4.940543546	10.20937224	15.75071734	8.909112838	11.94471091	13.77875064	10.98404456	1.776600152	3.021779709	0.552378329	5.177016834	4.008650546	4.868254173
Zm00001d009118	19.3352362	19.79004616	20.83185869	4.392525365	5.190112129	3.628098023	5.660904365	7.176172489	4.64503767	42.84480288	39.28368722	38.04406513	2.895624557	1.765017151	9.174351485
Zm00001d009119	0.204048267	0	0.084530596	0	0.089621176	0.208322539	0.0397384	0.164023843	0	0.375221602	0	0	0.418617033	0.447369752	0.82567675
Zm00001d009121	0	0	0	0	0	0	0.193634387	0	0.076638286	0	0	0	0.162257346	0.181659233	0.287378401
Zm00001d009122	12.18200518	12.39679581	11.26091478	10.53894057	10.72110147	8.339613789	7.280685287	8.737555595	9.098717417	1.581732881	3.568853436	1.965734496	3.128668354	3.014891231	3.140052815
Zm00001d009123	0.062001061	0.078090566	0.061644081	0.193312584	0.294103777	0.508930546	0.159386128	0.007475917	0.061171603	0.059856779	0.007818533	0.006868196	0.041628707	0.061170966	0.136195206
Zm00001d009124	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009125	11.66978449	12.37897042	12.00588564	21.17708979	23.30936046	22.08152224	22.00866664	20.13972984	26.74366528	5.907103495	9.18696668	4.552475829	10.201024	10.04586549	11.67772764
Zm00001d009126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009127	2.568384824	2.120217185	2.999707291	14.51078288	29.24295555	16.73396769	22.2157986	26.05116669	23.93584722	7.297839335	7.101981335	4.538512723	8.130600906	9.695002758	13.08684032
Zm00001d009128	0	0	0	0	0.027928459	0	0.099068756	0	0	0	0.026728472	0	0	0	0
Zm00001d009129	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009130	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009131	4.254897402	4.530338555	3.842041503	3.32927687	2.854143471	3.641560738	3.319446639	2.793154379	3.01143384	1.201296753	1.677890563	0.890845442	2.286017059	1.957798033	1.767739409
Zm00001d009132	1.023589822	1.253894205	2.091156893	6.19052322	12.37875256	7.111939184	8.814833106	12.24072089	9.839569932	4.737894302	7.514812766	2.656089949	5.742840212	2.99737734	7.4246789
Zm00001d009133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009134	0.066526686	0.027930202	0	0.290392188	0.409073785	0.529777902	0.647803607	0.49466558	0.396554961	0	0.027964095	0	0.272966824	0.109393334	0.166646843
Zm00001d009135	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009137	0	0	0	0	0	0	0	0	0	0.122264195	0	0	0	0	0
Zm00001d009138	0.03100053	0	0	0	0.040847747	0	0.012074707	0.024919722	0.012744084	0	0	0.011446994	0	0	0.047787792
Zm00001d009139	0	0	0	0.117948908	0.069230808	0.321851117	0.024557782	0.012670558	0.051838349	0.01449261	0	0	0.01175907	0.011519513	0.109340745
Zm00001d009140	0.096480126	0.012151708	0.095924628	0	0.177977409	0.082740949	0.022547406	0.57003205	0.226074832	7.611146435	1.569472499	3.868922266	0.269910899	0.222106295	0.30116932
Zm00001d009141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009328	2.623772167	1.195761786	1.555330944	2.012867278	11.4065012	1.596666005	12.08197895	12.33207672	11.52767557	35.75762374	34.12056531	38.90306298	0.019316351	0.11353702	0.608683419
Zm00001d009329	0	0	0	0	0	0	0	0.086532264	0	0	0	0	0	0	0
Zm00001d009330	6.318820865	6.625851301	9.100318092	13.14220156	13.0549252	12.83665782	16.57393317	15.6031239	16.86378633	1.895643783	2.008394358	2.434942	2.740494249	2.466423604	2.601195882
Zm00001d009331	30.02310194	35.75093276	37.57191613	6.314877736	3.532128692	3.649048395	2.053410414	1.616117277	2.571306339	0	0.037559618	0	2.733074246	1.926418987	2.031683904
Zm00001d009333	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009335	14.52149069	10.72310634	32.71603836	0.725539144	0.206378059	0.137063274	0.32681745	0.040469058	0.579490807	0.092577179	0	0	0	0	0
Zm00001d009336	8.637960679	10.35648847	8.423068166	4.951385909	3.742854717	3.663236676	5.454348946	3.725513606	6.289367994	3.871780859	4.671312031	6.771724284	2.937024131	2.421939163	3.264870051
Zm00001d009337	8.721060895	10.59286825	8.806878632	5.332581542	6.5970166	5.100006918	6.341251134	6.581837956	7.698664219	9.982571086	8.851459397	8.104116697	3.14900417	3.231934502	4.461712963
Zm00001d009338	0.017941252	0	0.334461609	0	0.023640231	0.021980488	0.020964353	0.021633066	0.022126539	0	0	0.019874505	0	0	0
Zm00001d009339	7.285746232	7.417458249	6.852919309	19.914656	17.55761683	21.05837487	15.15215645	13.60710714	14.7430841	2.821467668	6.334867926	2.397272981	19.11511492	20.26614248	21.55368336
Zm00001d009341	0	0.008622418	0.008508087	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009352	7.959257486	8.192997141	7.937148298	13.38161348	11.93987012	12.63340075	12.09550831	11.0094343	12.04779684	6.607151207	8.377204955	6.626346386	7.754210773	7.895618528	7.421694187
Zm00001d009353	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009354	89.0548482	80.62626407	76.13811359	159.251621	128.686255	183.5526041	122.3206714	111.4755884	94.7230335	45.59501055	36.62733721	35.47162406	187.1847195	164.6198205	164.7331283
Zm00001d009356	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009359	13.63370504	13.06615937	13.06614281	13.25232812	15.53430199	15.00853605	19.33894967	17.18902336	18.75804707	18.07111378	17.15197507	21.2852671	9.9950525	9.838450327	9.725223191
Zm00001d009361	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009362	0	0	0	0	0	0	0	0	0	0	0	0	0	0.008677989	0
Zm00001d009363	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009364	10.3640402	10.55996058	12.33057028	12.71981955	13.55732906	12.81680709	12.688735	14.53122585	15.08466808	14.79017347	18.15718047	13.1838284	10.27176351	9.306174297	10.84644591
Zm00001d009365	69.0397313	69.99192318	62.8654041	3.638948295	8.222991825	2.147921112	3.187571632	3.792937465	1.959243598	177.3755894	83.37390065	181.4379963	8.37878905	6.445748955	11.129926
Zm00001d009369	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009370	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009371	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009372	14.92246463	12.38784093	15.39737802	22.52464304	30.0140847	35.89817743	54.09633457	46.91807898	39.91860088	33.50879499	34.19520026	35.92386038	12.93433276	10.86071459	13.26834487
Zm00001d009373	0.249239241	0.883620323	0.195031091	0.138151275	0.072979837	0.056546699	0	0	0.034153456	0.050924741	0.011640692	0	0.340885984	0.637524552	0.288154575
Zm00001d009374	0	0	0	0.022809592	0.102419919	0.050415448	0	0	0.005638937	0.063059818	0	0	0	0.035086357	0.047576023
Zm00001d009376	0	0	0	0	0	0	0	0	0	0	0	0	0	0.00970025	0
Zm00001d009377	1.979461474	3.37855292	1.195553163	6.760080889	3.21763063	5.552824592	3.696477832	1.249155871	2.2358883	0.331682695	2.659464901	0.737750217	2.277186024	2.859473646	3.229604361
Zm00001d009382	0.35741788	0.300112762	0.037016666	0.780073132	0.706425738	0.693319195	0.313232097	0.215482304	0.220397686	0	0.150238471	0	0.599943127	0.783628063	1.446283457
Zm00001d009383	2.039011359	2.078038849	1.586223848	1.908842549	2.454259743	1.817932368	2.479585697	2.214601998	1.695640263	1.35955531	1.092621398	1.275920569	1.312133678	1.256964691	1.613572465
Zm00001d009385	0	0	0	0.013661995	0.072170899	0.013420779	0	0.079251905	0.013509954	0.030216163	0.013813994	0.279103019	0.012258453	0	0
Zm00001d009386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009387	3.336178579	2.145666008	3.705126115	11.70317995	19.02397912	12.34878901	13.35383566	14.58432563	11.8180535	0.646117571	2.14826973	0.770585933	4.051017845	5.306883037	5.531213569
Zm00001d009390	0	0	0	0	0	0.010468208	0	0	0	0	0	0	0	0	0
Zm00001d009391	0.230235647	0.089994615	0.256537104	1.534713317	0.899646716	1.575702326	0.389630169	0.440349725	0.411229829	0.043797643	0.010011536	0.008794641	0.364251184	0.409049753	0.605797675
Zm00001d009392	0.056106295	0	0	0	0.123213792	0	0.087413608	0	0	0	0	0	0	0	0.021622178
Zm00001d009393	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009394	8.623173697	9.726196281	7.748873738	9.327655701	9.233043517	9.23304669	8.739372096	7.690419159	7.160388845	1.222806381	3.841099535	1.869284474	5.392898812	5.204651029	5.918912888
Zm00001d009395	4.396617482	4.16327202	4.187836208	7.244321008	5.497186204	5.661678468	5.249946415	4.295230002	5.343091794	1.416329426	1.21407497	0.888754256	6.284615506	4.292019195	4.971781261
Zm00001d009396	3.836378917	3.301126942	3.380661488	2.789277868	3.540673304	2.269008526	2.840400401	2.527241877	1.809933524	0.592956786	0.849742342	0.315984791	1.716287256	1.80368337	1.926139179
Zm00001d009397	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009398	0.097477604	0.629213688	0.136288634	0.319120827	0.690370608	0.31348643	1.466495727	2.262564188	0.826491323	2.1846124	1.183127961	0.688380569	0.286336493	0.374004303	7.621162504
Zm00001d009399	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009401	27.17050263	30.43100937	30.30228191	21.17101059	27.62772036	23.28024026	23.7541376	25.38567397	25.79811353	20.17625212	24.02428568	20.19249669	15.50472966	13.73461315	13.71825198
Zm00001d009402	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009403	11.24217641	11.61005703	11.70768007	9.165922763	11.79722937	9.900682891	10.88035592	11.1898635	8.891088663	11.29575144	10.81909497	8.676104072	6.90002927	6.383935792	5.976685201
Zm00001d009404	5.034136649	3.932883272	5.224065079	8.287930311	6.158470649	8.570749167	1.485215441	1.098155239	1.481149897	1.794388809	2.082414096	0.920192473	19.0615898	17.8065279	18.72167198
Zm00001d009407	31.97219851	25.63439801	30.65602666	37.73720943	42.05873988	45.8368223	43.2348116	41.57801533	42.4986473	153.420099	94.74817274	164.3318443	25.85362392	25.50819198	30.3516776
Zm00001d009409	3.549739721	3.766472095	3.234445698	7.048453602	8.290771884	9.61514019	7.215292571	5.362459478	6.00767299	0.914440174	1.126193727	0.154891306	4.623382239	5.058259681	4.724535049
Zm00001d009410	4.64585222	3.857496461	4.266050588	7.731624656	7.07687213	6.652523262	4.253041006	5.726722065	5.328185622	2.571120748	1.716523313	1.475101219	4.967061605	3.811599972	5.080439594
Zm00001d009411	0.246628793	0.344211486	0.331363233	2.286102739	2.757850262	2.482562735	1.674592854	2.113796298	1.627676135	0.202246456	0.991859591	0.140294041	3.371499017	3.814312461	3.45246407
Zm00001d009412	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009415	1.975796044	2.047010385	1.188157326	1.669247401	5.038840932	1.210310248	4.617435388	1.690707305	3.85156516	0.87901564	5.826993856	0.847237623	6.561615741	6.148466338	4.605423097
Zm00001d009416	14.1230132	23.30498487	11.98621987	3.013176575	3.882296623	1.708603997	8.148084938	6.939551859	7.533895907	5.445160895	8.818091653	4.068962156	1.978260743	1.679564889	1.339860506
Zm00001d009417	6.863347658	5.442777782	10.54017657	16.00110602	26.99033511	13.60654649	17.62740629	20.65843705	18.04031061	0.560929656	4.610119298	0.527339543	7.013128281	5.644148676	9.783786984
Zm00001d009418	138.9676883	116.7711054	111.3541046	11.32373413	15.58784822	17.20898996	15.01067519	16.23469176	16.70877895	24.99555352	31.76623568	20.52107282	15.73668573	15.80983527	14.45530363
Zm00001d009419	0	0	0	0.028182099	0	0	0.105618757	0.108987744	0	1.246603999	0.541417235	3.955059268	0.202294873	0.222945422	0.130626546
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Zm00001d009421	0	0.04843592	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009425	0.018301518	0.59932157	0.682355412	4.199774109	0.940482459	2.735467363	1.090651519	2.206746483	0.09028339	0	0	0	21.85214535	17.41448147	12.80122664
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Zm00001d009440	13.08823887	14.41400322	13.00563595	14.35268032	17.16117486	17.42766841	15.27317034	13.75691404	15.07012648	5.893659301	9.211748537	3.778020435	12.52589148	11.04364188	12.02454957
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Zm00001d009446	21.28132965	24.40060897	32.33524313	37.99192206	34.28252789	32.83819995	27.96252247	30.39733491	26.74411923	10.09309141	16.90016282	10.56873287	32.70724428	33.09911759	31.24827214
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Zm00001d009469	0.030739143	0.009679016	0	0	0.010125833	0	0.035918689	0	0	0	0	0	0.068796176	0	0
Zm00001d009472	4.058525853	3.944174259	3.54334918	4.420414415	3.951757657	3.779291354	3.222274803	2.75209578	3.112693476	2.245396619	2.632640289	1.233985909	2.667439443	3.441433242	2.791909824
Zm00001d009473	0	0	0.013752044	0	0.342635066	0.027113124	0.258597118	0.186792025	0.197876271	0.106826547	0	0.012257687	0	0.00606511	0.025586098
Zm00001d009474	0.004879098	0	0	0.018255	0	0	0.011402453	0	0.006017282	0	0	0.005404844	0	0.053486391	0.028204518
Zm00001d009475	7.952001564	10.0306138	6.217539081	6.686049152	6.182921867	8.308739784	9.403528474	8.119824865	7.612959553	1.251503316	1.204532023	0.502607996	7.161591846	6.780093721	6.418954246
Zm00001d009476	38.73884377	32.18473014	38.52403382	38.39731312	45.28200396	36.02822203	41.75652049	46.7235431	42.68220167	7.782590051	17.37912035	4.538418581	21.3042809	20.94290306	25.85361021
Zm00001d009477	0	0	0	0	0	0	0	0	0	0.110694044	0	0	0	0	0
Zm00001d009478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009480	65.207643	59.94027714	65.72292247	69.55694306	98.51668852	63.4690598	65.3274014	78.66303926	73.38115917	2.356860686	10.40922127	1.032570853	28.31390684	24.14932425	36.71259076
Zm00001d009481	103.3942766	119.5562232	84.60435343	32.53870426	22.81089695	26.72327308	29.03379753	25.53254591	23.38367009	8.677672199	12.78941714	9.763875109	30.21812629	28.3129059	30.26699671
Zm00001d009482	14.93358239	17.09972477	13.7666622	17.32568048	14.90343054	21.07173826	19.72147461	18.28809055	18.58071546	48.94783984	32.36255281	60.33976676	24.05672227	23.49052647	22.60683554
Zm00001d009483	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009484	0	0	0	0	0	0	0.011426922	0	0	0	0	0	0	0	0
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Zm00001d009488	34.91339021	32.99730849	43.40550675	48.58430436	66.49736518	58.41065204	55.87303529	57.04228654	68.37465031	17.76983231	32.17497524	11.81247648	50.60914663	48.83509207	52.75600841
Zm00001d009489	0	0	0	0	0	0	0	0	0	0.488152375	0	0	0	0	0
Zm00001d009490	0	0.044841067	0	0.088802968	0	0	0	0	0	0	0	0	0	0	0.123482907
Zm00001d009491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009492	0	0	0	0	0	0	0	0	0.019491818	0	0	0	0	0	0
Zm00001d009493	0.252936798	0.223002383	0.220045418	0.315451802	1.39978162	0.759211355	0.709335961	0.808208141	0.670673625	0.81977763	0.558182479	0.392268668	0.311348838	0.38818948	0.292429455
Zm00001d009494	0.063799092	0	0.101943899	0	0.372286364	0	0.915890652	1.714377207	0.78681974	0.527936794	5.114493159	0.141347477	0.010199033	0	0.010537208
Zm00001d009495	7.775220666	6.301787884	10.07177692	15.43889954	18.44717933	13.38203856	11.36354381	14.55838429	13.26816792	1.490248681	3.880450619	0.728595241	6.492683483	6.463416772	6.273440873
Zm00001d009496	5.232200636	5.766229055	6.358383589	10.23536433	19.40381438	9.873716783	12.68372471	16.33176293	14.06336208	6.692320466	11.44003359	5.690825166	8.581825358	8.45325168	9.244448726
Zm00001d009497	2.167078157	3.331094362	3.550457917	3.76341742	2.870795239	4.030982542	4.266672831	5.970571327	3.129538204	2.702737122	1.436900252	1.21062054	1.530637242	1.404940802	1.681068132
Zm00001d009498	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009499	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009500	0.065917232	0.049813799	0.122883195	0.427487384	0.503762617	0.581454925	0.469848146	0.651745656	0.552800754	0	0	0.065718106	0.00737635	0.014452157	0.114313973
Zm00001d009501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009502	32.10337678	30.95380285	28.01014465	12.74677237	15.63502972	12.77143622	14.92005538	17.59037808	13.9336403	3.915551299	11.25456548	2.677279912	8.341701245	6.687439326	6.901366292
Zm00001d009503	7.719132078	10.05025579	7.651571523	3.444830242	2.965546416	5.024739641	4.738114904	2.422196996	3.406493625	0.205223243	1.09068531	0.453300946	6.93117968	6.49431757	7.483568163
Zm00001d009504	5.29833658	5.690389132	6.242058451	16.18668489	20.48013108	14.88731873	18.95726359	18.18943463	19.88516841	11.19154791	13.72529991	10.4190683	10.5907986	9.834742387	9.734480824
Zm00001d009506	1.181974879	1.384596718	0.965611292	0.391720953	0.795049282	0.46581625	0.869247476	0.388688907	0.703367102	0.011399568	0.135500749	0.045781054	1.424411524	2.383041839	3.335083683
Zm00001d009507	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009508	2.697534772	3.327191462	2.588768001	5.723203552	5.436756406	6.228369627	7.637706632	7.217336351	4.773674928	1.287811793	1.056734256	2.555005054	13.90533681	11.02362945	16.62701305
Zm00001d009509	12.74471957	9.594907821	16.53005985	26.01178026	53.41759505	26.86419537	28.79801179	41.06203517	25.64612534	3.606280808	6.387058263	2.622895842	10.437113	7.516013962	11.83055512
Zm00001d009510	0.007544831	0.076021941	0.093767383	0.178782135	0	0	0.105793622	0.072778791	0.009304869	0.811634143	0.038057096	3.393275519	0.050657449	0.148876358	0.113397106
Zm00001d009511	13.06165715	12.53189309	13.20273072	13.95404051	11.96389523	14.93027636	9.139146201	7.522006044	9.54272053	0.793247609	0.743899227	0.179706686	1.826364083	1.578985186	2.057426814
Zm00001d009512	0	0	0	0.028941515	0.045865961	0.003553815	0.040674314	0.013990576	0.039351719	0.032004898	0.003657939	0.003213319	0.02921429	0.019079423	0.010060988
Zm00001d009513	6.241164708	5.892635628	6.122207473	5.983435665	6.109261031	6.424363855	5.69613612	5.09205337	5.551005486	2.789737029	3.823226418	2.820325652	3.596583709	3.254456346	3.189247233
Zm00001d009514	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009515	0	0	0	0	0	0	0	0	0	0.099012902	0	0	0	0	0
Zm00001d009517	6.052417458	5.731873985	6.871133952	10.81385351	10.18546182	9.969991874	9.238329435	9.538598087	8.018702868	1.105727183	3.290184325	0.728983355	4.584378974	4.257291883	4.934628107
Zm00001d009518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009519	0.008961805	0.011287427	0	0.011176775	0	0	0	0	0	0	0	0	0	0	0.005180535
Zm00001d009520	17.03220249	16.52174462	16.73879992	14.63380452	16.50293273	15.38667562	14.79664941	14.65478319	14.39170596	13.56515622	16.10549894	12.87764431	10.5861982	9.807037211	9.891489765
Zm00001d009521	0.072334571	0.637739619	0.80907856	0.090212539	0.095311409	0	0.929752415	0.348876111	0.089208587	0	0	0.080128955	0.323778831	0.23788709	0.167257271
Zm00001d009522	8.019233857	8.285906902	7.446237779	16.68399174	17.30055598	15.87233193	5.446454476	4.491721387	6.664959157	0.531479994	1.781838353	0.31508426	6.848411195	5.62259709	8.719716457
Zm00001d009524	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009525	0	0	0	0	0	0	0	0	0	0	0.064933577	0.014260238	0	0	0
Zm00001d009527	0	0	0	0	0	0.073461106	0	0	0	0	0	0	0	0	0
Zm00001d009529	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009530	0.243899948	0.032336093	0.159536617	0.080047746	0.016914419	0.094361308	0.029999694	0	0.015831383	0	0	0.014220068	0.603323089	0.126649747	0.326505038
Zm00001d009532	14.89011502	15.78059794	15.18923147	14.11945795	11.98029963	13.84325861	9.867188444	7.864844464	7.123359434	7.451087276	6.32820732	2.408502617	26.64036614	24.3762615	23.60080694
Zm00001d009533	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009538	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009539	8.185615633	9.195433095	9.726171531	7.660118078	9.349153828	8.182248267	8.957914831	9.670386929	8.659006381	9.880117447	8.213229848	9.086623509	5.237916823	5.462860997	5.299401708
Zm00001d009540	0.783247777	0.179364268	0.796436707	0.888029682	1.313510357	0.915968164	1.081629585	1.116130994	0.965961734	0.638316436	0	0.394384701	0.517919653	0.195141754	0.288126783
Zm00001d009541	9.134172395	8.529650687	7.977064454	7.497414869	10.02235052	8.239690187	9.792286582	10.45862132	10.08004791	6.165335908	8.009932201	4.419880314	5.024853088	5.887966712	6.795959216
Zm00001d009542	6.979387107	6.782232812	6.4324066	5.379116694	6.527009129	4.931866824	6.422006632	5.610368122	7.180992776	2.775958284	3.090319894	3.525482512	3.45168044	3.983130499	4.268778116
Zm00001d009543	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009547	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009548	0.191333497	0.286887199	0.203819857	0.80677245	0.786342945	0.714391507	0.766536661	0.609719421	0.741611408	0.38325492	0.551491836	0.378483152	0.509781731	0.624245531	0.610954415
Zm00001d009549	0.059809681	0.027753347	0.101716991	0.070666143	0.074660238	0.100271111	0.147131816	0.030364994	0.085408544	0.707655154	0.254052805	0.219685809	0.531909052	0.414097721	0.60049712
Zm00001d009552	12.75656221	13.96979095	12.28359414	10.32202555	9.95764322	11.57044627	9.722911478	9.674343611	9.320051944	17.53216536	15.20736349	15.21815153	15.77554253	15.94090742	16.37048869
Zm00001d009553	0	0.533921541	0.658552316	0.06608593	0.139642297	0	0	0	0.522803814	0.438485709	0.534569444	0.234796473	0.237186818	0	0
Zm00001d009554	73.89795534	62.63070548	120.5239362	26.14421564	42.72870955	26.06744033	42.56752231	46.30600362	40.57385162	14.3371394	31.99937665	8.218390336	15.34039479	13.56034497	17.68210376
Zm00001d009555	52.67415128	54.38126225	37.83747233	5.755414489	8.716382095	6.933780508	15.56381004	14.88913207	13.5906405	36.73227115	15.5119058	40.44315149	27.50683944	29.40399545	27.08353819
Zm00001d009556	2.951537919	3.13590508	2.374190132	10.21881043	12.59776973	11.29179902	30.70130915	32.73953926	30.22593712	24.12426408	21.57837355	25.59499249	12.38068065	12.49568898	14.17289374
Zm00001d009557	0.288422657	0.363269403	0.04779367	0	0.025335944	0	0.022468125	0.185478439	0.023713675	11.11138821	6.619526062	37.99938195	0.021516948	0	0
Zm00001d009558	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009560	2.037539671	2.235154722	1.933230982	1.940003304	0.60623555	1.046820758	0.460812604	0.184921111	0.216159269	0	0	0	0.465821226	1.008732759	1.190501871
Zm00001d009562	28.44727066	31.9621938	24.71319716	14.67563079	14.33386435	15.68073298	19.0269466	16.18686226	18.26963689	14.99534786	16.47962032	18.64818796	15.29227406	15.47256573	13.86554368
Zm00001d009564	5.019623399	5.998017105	3.619073382	3.401004761	3.057956782	2.715143221	2.077339786	2.167850872	2.301628794	1.436721195	1.475963693	1.194084094	2.209940549	2.433880982	2.576175312
Zm00001d009566	0	0.132965017	0	0	0.231838563	0.086224618	0.164477086	0	0	0	0	0	0.019689253	0.019288142	0
Zm00001d009567	4.524872475	4.279390588	12.60790265	9.55934142	12.83672919	9.27219329	1.900422299	1.203807498	0.794366219	0.044416691	0.142142582	0.071351578	7.586206646	11.7211929	15.71272719
Zm00001d009568	0.438829731	0.850319492	0.25171333	1.431372287	0.667179864	1.8196588	2.327198469	2.889857116	0.999136177	32.54213569	11.11013495	43.52604841	1.208774301	1.443181682	3.629482771
Zm00001d009569	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009571	15.79885051	16.6993614	17.7032961	4.472069611	4.444489131	4.05615726	4.371932981	4.245459419	4.195106196	7.060293996	6.612595619	5.489799109	7.101964827	6.687069772	6.443515719
Zm00001d009572	6.433521845	5.509456441	6.844718084	11.06285533	17.16293442	10.2256288	15.22023235	16.76354375	13.41921367	14.83855961	14.24363143	10.12324366	7.185682456	5.903925063	6.691408853
Zm00001d009573	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009578	157.6104544	159.8600645	147.0997444	52.4326212	54.54700828	54.00702203	57.57037199	61.03481835	64.28154536	151.5162515	167.4453289	166.0611891	18.66388729	13.38895826	19.01664482
Zm00001d009579	37.55720111	31.47064527	46.35562179	59.25738289	101.9199066	50.54234968	61.02588655	77.46629471	64.6634336	4.387614861	14.35571113	1.904952518	19.55135414	17.77689831	26.16408639
Zm00001d009580	33.83201505	34.60930952	33.01082536	17.59612946	24.34325977	15.96639468	22.43804445	27.6332977	29.19020009	71.68283162	84.64020057	75.95122347	12.02832751	11.72492045	13.17264995
Zm00001d009581	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009583	0.379756498	0	0	1.894463321	0.864301188	1.480352588	1.089193428	0.749290737	0.085153651	0	0	0.038243365	0.540857819	0.491993755	0.279395668
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Zm00001d009586	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009588	0	0	0	0.019779779	0.048761405	0.012953698	0.049419449	0.031872382	0.052159081	0.007291139	0.006666614	0	0.02366365	0.005795393	0
Zm00001d009589	429.8558024	582.9203844	458.534628	2005.488842	455.7866832	1623.784284	986.0958562	998.1942285	603.4467934	0.094510704	0.086415361	0.037955821	382.4445725	517.0475911	473.2038297
Zm00001d009591	4.511194351	4.870170838	4.206838223	10.43688889	8.792575641	7.983625226	6.876125469	7.129407063	8.129270309	1.186520254	2.28812848	1.244125797	4.586064111	4.986483584	4.56813287
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Zm00001d009600	8.348816028	9.033414017	4.242329902	2.540044837	1.871993718	3.432065156	6.141254098	3.564069486	3.847628961	0.223554926	0.711814746	0.259835098	4.04177057	3.882082382	3.201288761
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Zm00001d009613	22.16229798	22.1535685	26.53181685	48.54394988	35.22790471	61.80784684	56.79852471	47.11609718	52.72497564	15.02112219	11.7338937	10.68205488	31.91700464	30.57113165	33.66111642
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Zm00001d009618	24.31963656	22.67106834	29.24843315	54.23708016	37.26714299	47.98732647	18.8347276	16.08797788	19.75496455	0.176331594	2.510548082	0.404659252	10.23991105	9.580795305	12.94450608
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Zm00001d009627	10.89012311	11.5147929	10.77968169	8.35022369	9.930650778	7.647468311	10.51224168	10.85682067	10.11435883	6.442130023	10.37588928	4.736073787	7.2817486	6.986019959	8.775578715
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Zm00001d009638	55.57695946	63.6409864	78.48635845	95.43258209	95.97169415	69.92663676	58.56684903	67.93285934	67.63301593	22.77741485	44.75028678	29.89491974	98.4749202	118.265314	129.0098032
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Zm00001d009646	73.23875315	63.73912738	73.56665787	2.674536453	5.500028964	1.888382545	2.39398817	2.735855676	4.215105749	3.868684487	13.15928039	10.17048546	0.085706161	0.062970112	0.055342479
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Zm00001d009653	16.48421127	13.61403844	9.957927302	20.24132346	32.64538691	15.58362564	20.87174258	24.79087063	20.50154614	1.097134908	5.832803613	0.581427619	4.616179077	3.829882264	7.092230011
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Zm00001d009708	26.97649561	20.71901437	26.77337868	32.29011302	59.99987265	35.09414347	50.46859785	59.31091745	57.79514325	23.83380715	32.79015985	26.20031416	20.62250059	19.72638762	20.90469246
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Zm00001d009718	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009719	5.138621461	4.49223121	5.20967658	7.411180116	9.469827783	8.111949013	7.347311767	7.804241593	8.452241667	1.699896035	3.318824105	0.798113708	4.997348566	5.639664681	6.973557328
Zm00001d009721	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009722	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009723	8.281482315	10.8152913	8.259109291	15.31467593	8.497102043	12.89034499	9.891073324	9.085243202	9.744554303	9.221480737	11.11089584	9.264084875	24.90002287	25.72476034	29.28077698
Zm00001d009724	0.042715932	0.002690044	0.156608082	0.015982037	1.03000647	0.09419915	0.409291245	0.414620808	0.429346813	0.22092117	0.843005408	0.033123139	0	0	0.083955259
Zm00001d009725	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009726	1.019429851	1.29082354	1.280464557	5.899243508	3.137828225	4.739314979	7.369580775	4.759463774	5.112774919	0.251198514	0.527925859	0.23488985	8.000633492	7.244605601	7.074743084
Zm00001d009727	14.36688314	15.42312625	15.18182923	11.90004639	11.42199407	13.7873585	11.50695581	10.05363754	10.97661605	2.156982569	6.457949994	3.14255294	6.547845542	6.468537168	6.639467791
Zm00001d009728	0.015768436	0.019860403	0	0.078662837	0.145440593	0.038636983	0.22110501	0.076052578	0.544511931	0.152230909	0.238614043	0.017467558	0	0	0
Zm00001d009729	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009730	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009731	0.209681502	0.135820094	0.029782033	0.201732948	0.134196125	0.16147279	0.126006602	0.043341971	0.096049737	0.123936583	0.226641515	0.092910261	0.087152124	0.032837175	0.090041874
Zm00001d009732	0.071257362	0.012821273	0.075907594	0	0	0	0.035684669	0.024548617	0.062771493	0	0.128368314	0.011276525	0	0.178548166	0.058845168
Zm00001d009733	0.163522409	0.09339914	0.158327334	1.031547135	0.829288796	1.00634563	0.677653028	0.73824417	0.539345937	0.07080416	0.045557361	0.016850484	0.646837152	0.612815673	0.710052475
Zm00001d009734	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009735	0.254334621	0.192201238	0.379305379	0.83217069	0.843721877	0.934784131	0.416066009	0.375219349	0.402229395	0.033013588	0.064144823	0.013258369	0.562520542	0.518259597	0.467013489
Zm00001d009736	13.76147309	13.66720203	19.2616772	2.672881418	2.496970184	3.952352963	0.474500107	0.489635531	1.140721688	0.311136724	0.284486214	0.39985142	0.025245132	0.32150087	0.130410991
Zm00001d009737	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009738	0	0	0	0.026070596	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009740	32.92525468	34.6870885	32.8431263	34.30136	35.80567692	27.35871101	23.17464288	25.07112352	27.97420664	2.97070543	8.564498642	1.744930381	20.84898821	18.25573069	21.41323307
Zm00001d009741	0.199249517	0.074145944	0.275767419	0.152485786	0.650384346	0.355066067	0.137577264	0.158346304	0.173127894	0.006245408	0.022841821	0.02508177	0.410461255	0.322672287	0.240830525
Zm00001d009743	16.96550715	15.10487934	17.53653409	39.91089681	34.83919087	45.90396111	24.01266369	20.57002971	25.00527449	1.687528477	4.421238937	1.998396832	18.97617014	19.99971226	19.12476056
Zm00001d009745	10.98705166	10.78607203	11.64757205	7.289483618	5.948983659	6.608388004	8.658763376	7.207604968	6.589066696	1.231203641	1.751369433	0.987240697	14.73662419	16.43333782	16.39857361
Zm00001d009746	2.611246007	1.879356576	1.09010806	3.973343425	8.967074501	4.681357728	9.177284648	8.947282907	6.950572606	2.906099607	3.102158523	1.96564127	6.882090962	6.37716344	6.900472526
Zm00001d009747	0.891281953	1.549336176	1.190077839	4.630003029	2.581727254	5.071666088	2.650996649	2.513515157	2.107552874	0.203177645	0.863850973	0.097916202	1.747463656	1.663415226	1.720244633
Zm00001d009748	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009749	23.8130037	23.66634738	20.97287777	17.97851722	19.22705289	18.71895803	16.91957098	17.15824321	19.38284848	10.51564982	14.08591381	11.91962843	13.04567234	12.72215696	12.70502367
Zm00001d009750	7.780054859	7.462741877	7.58188691	4.803229363	3.898651032	4.443317041	4.171758662	3.913479849	4.652033895	4.95510034	4.675822484	5.30105296	4.91791889	4.739124559	3.974905395
Zm00001d009751	11.79625089	12.13616757	11.62030814	7.456545686	4.5566385	7.636752345	6.500206133	4.858480086	6.163778615	3.681925867	3.93025069	7.407124977	6.05828128	6.030146056	5.390628912
Zm00001d009752	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009753	3.514133813	3.546113796	3.703903954	5.378474643	5.835388434	6.022862795	3.82419696	3.422821152	4.122072854	0.87712031	1.949363295	0.557950566	3.015554542	2.679319473	3.204098406
Zm00001d009754	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009755	0.050974027	0	0.088690938	0	0.671657581	0.17486044	0.262077862	0.368778439	0.364617649	0.421809519	0.282831485	0.259746881	0	0.011175904	0
Zm00001d009756	9.312797807	9.293828524	9.018114102	13.31953442	15.41955309	15.36052887	14.09745226	16.44917316	15.7436001	24.14875718	20.98253604	19.4158622	12.66379951	13.11672819	12.67842276
Zm00001d009757	0	0	0	0.019802752	0	0	0	0	0	0	0	0	0.035536701	0	0
Zm00001d009759	0.158660355	0.0222037	0.05477321	0.032979052	0.046457399	0.010798925	0.21629373	0.085025899	0.108706789	84.79227999	20.04092575	129.1812046	0.059182011	0.067639076	0.203814469
Zm00001d009760	5.631275864	5.593953593	4.559594132	2.756676002	2.210222324	2.748497658	2.39453585	1.90798542	2.838094774	0.581202272	1.229558187	0.887884034	1.585797087	1.752772787	1.604941933
Zm00001d009761	28.66845372	28.42664266	27.58312612	35.81382456	38.93792667	33.39061574	33.58775972	33.58521159	32.45988534	23.49837613	27.11136168	18.64399234	27.73225275	27.75835865	29.91237236
Zm00001d009762	4.177321476	4.158593765	3.946130846	6.788493566	13.87178134	7.418211301	14.24916012	18.99012621	18.14837197	31.91945892	27.62901137	24.03701718	10.58857957	12.61627576	13.13492253
Zm00001d009763	81.1960447	88.71707212	82.22450098	43.76860139	35.25060763	38.34715543	33.30305145	36.91853604	35.70133227	17.10071475	25.59994444	12.66491444	49.52150094	44.04150592	39.62954128
Zm00001d009765	0.015146503	0.019077077	0.003764824	0.204012669	0.071847865	0.155874928	0.081413971	0.032873824	0.089663229	0.004177905	0	0	0.332208703	0.278949365	0.273178228
Zm00001d009766	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009767	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009768	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009769	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009770	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009771	2.139309812	2.377472316	2.119671738	6.508182747	5.747076373	7.597138665	9.179430397	9.659481689	8.426909417	62.06307488	27.40956143	102.9170744	17.65055945	17.88681699	16.87067681
Zm00001d009772	0.104360564	0.262885034	0.021616603	4.555388901	2.406431189	3.814369787	3.536414286	1.887526285	2.187993824	0	0	0	9.731901873	6.864222916	5.369149901
Zm00001d009773	10.23198971	12.39525834	9.74446324	71.0285126	50.4011381	74.5248841	40.4324793	30.2577698	31.50020491	10.06469845	7.676845621	2.4378746	44.96814134	40.72046776	47.4064217
Zm00001d009774	7.159740341	8.834927842	11.12268296	42.26945868	37.92726297	33.72348261	36.29103086	41.6368083	35.91640001	6.725309473	10.11454192	4.619408743	67.21401049	68.05085992	79.76733607
Zm00001d009775	0	0.021537173	0.085006378	0.75707446	0.292908233	1.089374448	2.227885328	1.659779732	2.098326564	0.660333701	0.053908269	0.388317244	3.415623677	2.830543954	2.975327975
Zm00001d009776	14.85471387	15.76263894	17.39639662	28.89197942	27.60332214	23.99875649	25.21004119	23.7178477	21.87660854	15.72178511	24.30735135	9.25238281	20.73295995	16.1798727	13.43100846
Zm00001d009777	0	0	0.01388125	0.167158528	0.088303217	0.041051794	0.182718723	0.13467644	0.137748554	0	0	0.061864267	0.649938388	0.820360628	0.581096032
Zm00001d009778	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009779	2.179052121	2.43065575	3.111471257	9.186420486	12.00414674	9.152026843	7.306845726	6.813177753	7.919181296	0.783289011	2.024350356	0.2118543	5.81721031	5.62881798	8.328369818
Zm00001d009780	0.871064799	1.068874906	0.823861443	1.996974688	2.295511324	2.342289034	2.51840367	2.621903265	2.989772829	2.919437645	3.311475511	1.709905728	1.46212422	1.635954369	1.673513014
Zm00001d009783	3.123401716	2.416829592	4.951582013	17.54221677	33.51900552	14.76076774	18.09131075	23.14446711	23.58763593	4.942502776	12.84509368	4.966453601	6.659250665	5.828961836	7.115034335
Zm00001d009786	0	0	0	0	0	0	0	0	0	1.788762854	0	0	0	0	0
Zm00001d009787	6.841905476	8.395633806	7.659078547	3.968438805	3.181840309	4.098683669	3.674065535	3.396968495	3.303836337	0.936673244	1.506703896	0.640884209	3.377784672	3.667444215	3.867843616
Zm00001d009789	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009791	0	0	0.093227159	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009792	6.067915145	6.43584133	7.129050706	7.567640542	8.966465774	6.410719038	5.468475182	7.40538914	6.301829259	0.118584185	0.743498203	0.081640822	7.491203604	4.901371751	5.723038871
Zm00001d009793	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009794	0	0	0	0	0	0	0	0	0	0.132083261	0	0	0	0	0
Zm00001d009795	1.046267902	1.604251837	1.251307835	1.872190349	2.865114239	2.3370018	3.628711853	3.214237862	3.856055037	0.246769797	0.871936363	0.131018307	2.297497377	2.337129847	3.555255865
Zm00001d009796	0	0	0.084112128	0.042203391	0	0.041458248	0	0	0	0	0	0	0	0	0
Zm00001d009797	655.7672866	595.2877697	604.268012	37.43522149	54.19044384	32.80615137	43.17166679	67.09557968	70.71623694	356.8144238	425.1550075	454.7483758	3.329436446	2.167524936	2.198880191
Zm00001d009798	0	0	0	0	0	0	0	0	0	0	0.062766497	0	0	0	0
Zm00001d009799	2.682921333	2.536810669	3.054064461	3.957036015	6.332516048	4.153937208	5.979205183	7.323272726	6.82856722	2.520419846	4.422741141	3.859316773	5.82180306	5.728775803	4.810073639
Zm00001d009800	15.10744068	15.30702294	19.8148934	47.3754388	41.14201895	51.7508092	66.56536114	66.55136561	66.51122981	15.45749588	18.12249063	13.18084017	62.81153236	68.53710553	66.19734722
Zm00001d009801	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009805	0.474568868	0.482774852	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009808	5.667098845	3.849199867	5.138687434	6.854232352	7.794348606	6.491992982	6.51197173	5.997141019	5.922791046	7.355412434	9.931543778	18.8617138	3.362423895	3.200080378	3.295764195
Zm00001d009809	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009811	0.24827975	0.459083814	0.059086495	1.073870824	0.320184463	1.307312477	0.395050064	0.216564711	0.397405642	0.13113908	0.053291699	0	0.916257809	0.613836936	0.543553815
Zm00001d009813	2.232427591	2.265021487	2.466193405	7.043754761	10.00001585	8.48560358	9.77107089	11.23308647	10.37745505	2.296006641	4.860366567	1.241775136	4.174272819	4.235651858	5.316400152
Zm00001d009814	4.104662686	3.492635548	3.491789942	17.62961104	23.51875971	17.10768995	21.69021212	26.70939768	24.00252886	2.724548612	5.213017655	3.181250314	8.363643866	9.055496432	2.643466027
Zm00001d009815	0	0	0	0	0	0	0	0	0	0.777521051	0	0	0	0	0
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Zm00001d009824	0.546608206	0.640364448	0.459544253	0.674187226	0.836745348	0.642587607	0.71620245	0.504006235	0.666684372	0.448991834	0.430806553	0.166959862	0.476744458	0.462626225	0.346180508
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Zm00001d009840	14.01853066	14.44005649	13.72556076	15.3125405	19.5482105	17.09452667	17.34028924	16.06070881	19.97451188	12.12663286	16.19393137	11.17497183	14.11892457	14.40461077	13.77930478
Zm00001d009841	6.475847647	13.14079267	8.495324878	5.384264175	5.925610635	6.170732892	4.624294906	4.121099056	6.433582458	5.457993167	2.722083881	2.789752832	6.844088044	2.957938164	6.031165132
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Zm00001d009844	1.891681582	1.294320461	1.010289196	2.110548329	2.344361258	2.035702298	2.377705724	2.922065748	2.477990365	0.521788155	0.857480175	0.572020054	1.76213662	1.160166622	1.394978178
Zm00001d009847	17.32019853	14.51550828	15.84152369	14.68209074	10.61686219	10.64014916	10.74635771	11.06923225	9.855609577	6.922566652	10.05658767	4.645737462	12.08363712	11.22206492	13.38149065
Zm00001d009848	16.39260933	13.62348209	20.1613998	33.44676904	51.5823808	31.22299548	35.00068512	39.04374143	36.13595702	2.605702063	12.81106278	1.176311382	13.52897977	11.65590751	16.65084372
Zm00001d009849	11.76549532	11.4668395	13.01332907	15.631528	20.09431412	15.78193605	14.80437389	16.98082169	15.54655582	16.4080236	16.9026676	12.56780743	14.03039924	13.64686082	15.07955929
Zm00001d009850	46.96168202	46.52034729	43.5797819	27.73445552	34.33663346	27.40839636	33.0687118	33.51080977	33.77307032	13.76491997	21.28180567	9.969955029	22.92048625	20.7538207	21.64684483
Zm00001d009851	0	0	0.011105	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009856	5.304872045	5.80547832	4.495649404	7.220370108	6.723269982	7.057964146	8.054035809	7.400105311	8.170063186	10.24516922	8.296415232	7.733229418	3.741701178	3.271741112	3.157207665
Zm00001d009858	44.345002	29.93190273	39.00341778	10.23302774	178.7552599	36.26463745	114.6679416	147.3977994	124.3953473	149.0757355	104.127007	95.51154884	26.3442208	34.57721007	56.91041643
Zm00001d009859	1.50672402	1.533943429	1.633256121	3.926341939	3.139739043	3.803940221	3.594338313	3.656749867	3.888583472	1.752707665	2.907709554	1.701075645	2.50486818	2.279695442	2.543400041
Zm00001d009860	0.062568576	0.078805353	0	0	0	0.012775844	0	0	0.051442938	0	0	0	0	0	0
Zm00001d009861	0.148369981	0.080088231	0	0	0.027928459	0	0	0.025557203	0	0	0	0	0	0	0
Zm00001d009862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009863	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009865	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009866	1.601414903	1.63702723	2.018274749	2.865722511	3.373186543	3.181264322	2.965014076	2.366083682	2.673884364	1.073200329	1.78833819	0.930712108	1.344026024	1.291919703	1.398369432
Zm00001d009868	19.65363889	15.60078642	25.26403581	39.32179964	52.70164136	32.36180284	35.71732412	39.75754053	37.95430488	2.243977663	8.257119465	2.291438076	15.09871383	13.17606185	17.74426072
Zm00001d009870	28.7774256	24.93464545	30.08382604	36.81405002	58.99194172	37.49376335	41.84553663	46.51493942	44.39696879	10.32700789	23.20801617	10.76290902	20.28517626	20.2094163	23.99829023
Zm00001d009871	0	0	0	0	0	0	0	0	0	0.21487049	0	0	0	0	0
Zm00001d009872	0.356036204	0.458938969	0.356060412	1.134365321	1.374404094	1.254055061	1.309839123	1.344912083	1.10801966	1.373356868	1.371472442	1.170877224	0.964913616	0.917813407	0.993691949
Zm00001d009873	5.066169694	5.614978228	4.525567429	8.064329124	5.305865622	7.302569635	6.72124637	5.759094725	6.370074475	5.504826924	6.085444829	7.1198524	5.036217695	5.077016182	5.477059264
Zm00001d009874	3.423944582	3.493255974	4.270540334	9.336268968	10.25205109	7.86337173	9.952007937	10.29904827	9.5047986	9.56284587	13.07691703	9.461834174	8.198594432	7.130206419	8.413686317
Zm00001d009875	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009876	0	0	0	0	0	0.073947603	0.070529081	0.291115165	0.018609738	0.99893433	0.856284665	1.771858153	0.016885816	0	0
Zm00001d009877	25.9042411	33.67468722	35.86914949	113.0833372	23.57132265	63.00722579	21.64911414	23.67439883	16.00345114	2.763600237	4.095996195	6.435463261	442.8351483	492.379459	398.4335085
Zm00001d009878	13.47262035	13.00803523	13.78176191	14.2841617	15.20055431	15.87720395	14.01182732	14.16939627	16.85021693	10.50029942	14.30741788	11.88998254	14.46509365	13.80753121	12.77285661
Zm00001d009879	3.053166669	3.683660187	4.038684022	6.67303498	6.353145571	5.67563184	3.647102078	3.526512625	3.942486969	0.041691289	0.257311412	0.016743364	2.562443655	2.187141011	2.813417074
Zm00001d009880	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009881	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009883	39.10018659	43.42334428	30.94660868	26.31323951	14.41821058	21.08102391	15.4182817	12.45671627	12.20219568	5.79157368	12.63941996	9.084780287	29.83368487	31.65874362	30.08226213
Zm00001d009886	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009887	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009888	0.443970642	0.048205402	0.209291318	0.429595546	1.92645384	1.172251689	0.966003578	2.049012297	0.698584155	0.295597309	0.70465292	0.76315427	1.370530772	0.981783731	1.336325656
Zm00001d009889	0	0	0.006142679	0	0.006512602	0.030276812	0	0	0	0	0	0	0	0	0.022857284
Zm00001d009890	7.631405203	8.558084946	7.240045531	8.143364722	12.30050637	8.887039514	12.99445692	15.26651919	12.56982281	5.642394836	8.233965173	2.260354107	12.25025662	11.17305956	10.99329616
Zm00001d009891	0.190500801	0.183480825	0.167121145	0.405290924	2.731609362	1.153218934	2.841425916	2.823966239	3.164784316	3.508245086	4.663242059	3.624718667	0.188096923	0.233402334	0.738468269
Zm00001d009893	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009894	0.718357119	0.508935065	0.195294825	1.539834719	1.094437905	1.127609881	1.495181783	0.541359482	0.442966778	0.743049674	0	0.149205641	0.251207713	0.344526131	0.467166859
Zm00001d009895	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009896	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009898	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009899	1.295685592	1.040900833	1.584169188	0.227102673	1.495002421	0.283156435	0.40919152	0.287125754	0.250487842	0.241481628	0.85669409	0.03103355	0.438892821	0.222653542	0.089069638
Zm00001d009902	0	0.06522337	0	0.355211873	0.307054369	0	0.695873579	1.123936106	0.159663097	108.4870116	4.571176214	15.77538804	0.173847156	0.11353702	1.107604255
Zm00001d009903	2.154777412	2.551113117	2.008472783	2.776234015	2.762794406	2.96886896	2.812253061	2.903955834	2.902740137	2.667755985	4.182464722	4.559102444	2.357475355	2.22949927	2.324496853
Zm00001d009904	1.150438802	0.984745	1.277074982	2.841694981	2.457772882	2.531527324	2.545010788	2.733931727	2.534573391	3.851079552	2.943735047	2.140503632	1.049900473	0.96729089	1.071799348
Zm00001d009905	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009907	1.82908447	3.24886221	1.981756747	9.373206601	11.40156601	8.20219078	25.01719748	28.91131242	25.11711384	745.8999166	352.4857389	647.5193373	24.81094131	20.53948966	21.29582398
Zm00001d009908	2.403160173	1.682036217	2.0833104	2.871333621	17.5968477	6.616993693	13.35367952	12.09806235	9.907803897	12.79215965	18.05997516	8.830043705	3.595995921	3.293988834	8.093894606
Zm00001d009909	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009910	6.078261672	5.723350728	7.747157062	21.38536933	28.12106265	16.43984418	17.3136372	22.71287548	18.87217801	7.15092958	12.80745622	6.281472691	10.93063995	6.663203887	10.14804979
Zm00001d009912	7.131118801	7.068451661	6.325207948	8.619503533	9.943339775	8.323702322	11.01516088	11.8435587	10.25239012	8.272168409	9.509950308	9.246778359	5.662485722	6.007605172	6.070470873
Zm00001d009913	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009914	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009915	0	0	0	0	0	0	0	0	0	0.223355011	0	0	0	0	0
Zm00001d009916	0	0	0	0	0	0	0	0	0	0.173207609	0	0	0	0	0
Zm00001d009917	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009918	1.579787031	1.668326843	1.600896777	6.380552464	4.41939942	5.583044045	13.10646622	12.48418274	12.19945273	2.89946239	2.712405361	2.11348132	16.98478989	18.71695628	18.70003188
Zm00001d009919	0.679930997	0.748289365	0.746571283	3.910589423	4.12292028	3.323946551	3.964783289	4.457393475	4.225282247	2.795002339	3.662742837	2.032899835	3.324165806	2.185436882	2.739877611
Zm00001d009920	0.136712339	0.229586263	0.622990491	0.227335598	0	0	0	0.109895975	0.22480564	0	0.344797292	0	0.61194199	0.149868867	0.210744161
Zm00001d009921	0.259282023	0.178127273	0.205059566	0.76431796	0.31058373	0.462045024	0.35805669	0.056842746	0.116278779	0.780202158	0.26751514	0.522219742	0.527536198	0.749344335	0.926547604
Zm00001d009923	0	0.181252313	0	0	0.505652108	0.352613308	0.224208238	0.231359947	0.177478137	0.595417436	0.302453765	0.584519641	0	0.052585567	0.05545899
Zm00001d009924	0	0	0	0	0	0	0	0	0	0.33430648	0.061134272	0	0	0	0
Zm00001d009925	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009926	0.175379299	0.026296533	0.020758277	0.291633938	0.50069057	0.34275866	0.49280957	0.876079702	0.59222622	0.224600041	0.452849222	0.333046677	0.261673423	0.247187502	0.347592691
Zm00001d009927	2.757005081	3.681296973	2.703149747	4.46021091	7.351195592	5.01876492	9.094829882	10.26697591	8.849216064	7.828925103	8.289894454	8.560802251	5.599160061	6.408186037	8.021308669
Zm00001d009928	16.66727029	14.36135346	14.85778096	13.54339736	6.847820562	11.21360336	5.698824812	6.48853894	5.058126898	1.470948513	2.848857055	1.009624834	19.1286122	18.84521285	20.27852059
Zm00001d009929	50.03494231	56.4124726	72.46614475	315.7678821	103.7758396	264.4469092	147.3860072	106.7437224	109.6161884	1.083413253	0.655082899	0.350889076	468.2575569	521.5269896	468.7543894
Zm00001d009930	4.355054251	5.027197617	5.07890227	11.87788909	10.50713216	9.811872847	10.50150776	10.46064916	11.14774009	2.650908536	5.546454216	2.023725523	10.17319647	8.84596479	11.01101537
Zm00001d009931	0.024154124	0.030422208	0.015009408	0	0	0.014796053	0	0	0	0	0.015229562	0.013378421	0.01351462	0.013239299	0.027925463
Zm00001d009932	0.122749575	0.173928987	0	0.019135993	0	0	0.322723979	0.629034199	0.77584438	0.44439124	0.29023341	0.747870248	0.01717009	0.016820299	0.14191526
Zm00001d009936	1.108807742	0.659907039	0.636013627	0.410298206	4.704153213	2.194405012	4.755432746	4.348824673	2.734934924	1.041892068	2.366255923	1.714202593	0.518132701	0.547649157	0.831143415
Zm00001d009938	7.84415061	5.378142395	10.62831844	14.93177087	31.84675722	16.1421748	50.44685352	58.85455701	46.62437938	136.3278174	63.1880455	48.98727572	21.39684999	19.1894218	82.3975121
Zm00001d009939	13.76683696	2.133019225	7.162891306	9.368225212	129.8581292	34.23448986	110.1960531	122.7519375	99.47818003	28.4989428	26.78120821	14.25174716	0.427931461	0.673736165	1.342151874
Zm00001d009940	1.69776918	2.142746455	1.912452081	2.274227336	2.200235934	2.21481433	1.794031133	1.697511608	2.039966855	5.779081421	5.063810997	20.20023624	2.636737397	2.290062156	2.330382922
Zm00001d009941	14.76717251	15.05274473	16.30466097	29.790408	32.57040144	26.72608738	33.4452701	36.44122232	34.76660657	27.69207874	36.79989818	26.53145191	28.56505105	26.21170529	27.25554603
Zm00001d009942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009943	7.735040245	7.816505988	10.5818959	12.33893873	16.31518128	10.87224367	10.47472861	13.41164693	11.79490117	20.46747438	30.01853613	22.68334743	6.475044081	5.78441241	10.32923683
Zm00001d009944	0.649583483	0.377608985	0.70794374	0.822595916	0.697905253	1.946719305	0.373680396	0.072299983	0.073949224	0.110262488	0.02520448	0.033211343	0	0.065731959	0.023107912
Zm00001d009945	0.148600369	0.187162714	0.984965203	3.027022915	7.701576257	1.881243102	6.0484437	7.525485233	10.29341042	5.635971205	7.433130018	3.703786756	0	0.027150157	0
Zm00001d009946	0.38459735	0.370870117	0.171773602	1.041746644	1.567799364	1.03807808	1.165636454	1.137604487	0.726295144	0.464120258	0.606236996	0.386098288	0.685913	0.322794483	0.264009169
Zm00001d009948	6.464609246	6.52518942	7.394017631	12.33324471	15.78058832	11.94544703	16.31791232	18.16759404	18.18042097	1.899476945	4.422721995	0.957980612	5.04774484	5.37795739	6.066815019
Zm00001d009949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009950	2.917292594	2.992306313	3.116137298	7.783152864	6.976914788	7.353733328	7.951770302	8.11344969	9.06982587	0.573272669	0.947350996	0.863884011	4.913885643	5.534905994	5.332532691
Zm00001d009952	13.63829119	13.41558283	20.44336814	3.382644146	2.517599198	2.017967727	2.887018726	2.648095779	2.681416669	2.680574081	5.123493891	1.690817494	8.552442267	9.569939699	6.652406043
Zm00001d009953	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009954	11.5814168	12.73071208	12.37564988	15.30569453	18.58433168	15.90249513	15.30354356	15.27969005	16.79881365	8.887747482	12.86165293	7.286269358	9.931945206	9.30063188	8.692234043
Zm00001d009957	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009958	0.411030562	0.495186057	0.244309997	0.512619487	0.518045542	0.61304013	0.960578431	1.163604439	0.925670282	0.246469091	0.135214624	0.336541611	0.999905212	0.724855958	0.847108882
Zm00001d009959	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009960	46.41299042	36.44435232	40.95119834	2.076310086	48.14018148	11.45403879	27.02142907	32.97666465	25.77374117	12.76801701	24.6001506	15.57830869	2.505922905	1.724851812	1.102028922
Zm00001d009961	3.102691386	2.198166346	5.72380045	6.832160274	12.07311648	5.701832216	13.02912233	11.1649634	11.71859187	3.543648691	4.340533281	1.879620702	5.208016934	4.942483911	5.380701981
Zm00001d009962	0	0	0	0	0	0	0	0	0	0.123638593	0	0	0	0	0
Zm00001d009964	2.331383684	2.184671464	2.966989316	3.907815199	2.998213468	3.724568265	3.181891125	3.980543154	3.28927761	0.488735094	2.257881309	0.640485059	4.591652038	4.150529331	6.188633102
Zm00001d009965	0.985314156	0.61274712	0.619929113	3.801727069	2.896822842	2.934870451	3.77063719	2.658294526	3.15183583	0.314248091	1.327935515	0.504812417	2.632453154	3.537445329	4.07960825
Zm00001d009967	43.66504927	55.51835085	51.31833471	89.60029162	54.63481152	103.8130997	44.79300857	44.41222067	43.89174413	46.11709837	31.22641441	37.12073326	117.9019963	143.1392613	139.5422687
Zm00001d009968	0.012983128	0.024528447	0	0	0	0	0	0	0	0.071623497	0	0	0	0	0
Zm00001d009969	0.016121738	0.243664666	0.040072287	0	0.04248551	0	0	0	0.019882574	0	0	0	0.108244456	0.106039293	0.018638929
Zm00001d009971	0.358775476	0.118915537	0.328548476	0.541649043	0.534941866	0.520518609	0.05516173	0.159379522	0	0.01302133	0.107153854	0	0.137348858	0.041400239	0.545780803
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Zm00001d009976	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009977	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009978	19.75743108	20.21274407	20.39630602	20.95868059	27.72897043	22.72169088	29.63217263	32.5854344	28.49280785	61.4297598	51.127749	55.46228118	23.32901772	17.89132211	23.22736724
Zm00001d009979	0	0	0	0	0	0	0	0	0.086834797	0.016184451	0	0	0	0	0.013567221
Zm00001d009980	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009981	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d009983	117.0113716	123.0763621	119.4532102	77.89833757	45.18001581	67.40791073	43.40671485	35.48483187	34.73838731	9.711919962	14.79603816	10.34599764	76.66452191	72.42610193	63.0846008
Zm00001d009984	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009986	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009990	6.239615912	4.726412569	6.145165036	13.9392939	26.81718332	14.49548142	18.93250321	27.07770575	23.02200922	4.444800776	10.35505321	3.480434372	12.66370802	12.87355822	19.21707721
Zm00001d009991	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009996	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d009999	1.986885996	0.367338021	1.38190618	2.909895661	65.49838162	17.39676524	46.43352606	44.02432752	39.11618135	0.050279695	0.367783778	0	0	0	0
Zm00001d010000	9.886327493	11.92573087	11.70466983	32.99523617	24.11855209	30.84631835	26.43243854	22.51341151	23.88559924	2.479068277	5.411401938	1.07973767	41.70271338	39.34057758	36.71924304
Zm00001d010001	0.020713991	0.052178696	0.128717044	1.033343629	0.682343043	1.015098917	0.556698863	0.374645369	0.510921909	0.399952116	0.130605035	0.481866398	1.41395687	1.1126628	1.412943806
Zm00001d010002	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010005	32.26903862	32.52472057	49.64535199	15.25810999	12.06333322	25.70212169	1.535119466	0.990053827	3.341705458	1.189046832	0.310628191	0.272871577	0.459415908	0.270033995	0.332254308
Zm00001d010007	21.04012596	26.37799615	20.21405317	38.9674982	44.26809375	39.58615804	47.89618667	65.4407148	59.69905092	25.67473768	20.51054811	9.8277311	8.381652254	6.111673654	6.894024413
Zm00001d010008	0	0	0	0.38710396	0	0.034569932	0.065943599	0.102070565	0.034799635	0	0	0	1.957709152	1.391970901	2.332539862
Zm00001d010009	8.385079232	6.489376166	10.20790337	13.63909277	19.60088313	12.56313001	12.92549518	16.21713621	13.59046026	1.995653221	6.180826335	1.653882223	5.564385331	5.340998166	7.397642235
Zm00001d010010	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010016	9.50079078	6.746421879	13.57308341	32.67001094	61.56308384	29.44270701	31.91921663	40.27598429	31.67959363	2.444484677	4.716721768	1.328200449	12.0754997	9.400735413	16.34824223
Zm00001d010017	0.017239891	0	0.021425788	0.086003379	0.113580431	0.084484904	0.080579253	0.145511694	0.063784702	0	0	0	0	0	0
Zm00001d010018	0.041047506	0	0.003000821	0.021079334	0.003181536	0.085786795	0.014107062	0.002911409	0	0	0	0	0.013509846	0.013234623	0.033498719
Zm00001d010019	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010020	0.020904027	0	0.207836694	0	0	0	0	0	0	0	0	0.023156533	0	0	0.096671633
Zm00001d010021	1.823675484	2.213183925	2.132684615	5.982169379	4.780889151	5.030945896	4.598592479	4.59639024	4.369340744	2.200755508	2.439452816	1.224035666	7.511098995	7.486501762	7.511238158
Zm00001d010022	3.46337926	1.147931314	2.491961964	4.092040773	3.842956017	2.233217618	2.555973912	1.098959748	0.67441692	1.508390839	0	0.605774901	3.671651939	3.596852808	2.107441609
Zm00001d010023	10.5257147	11.17299803	9.64510739	9.757564157	8.209021271	10.01032413	6.021889474	6.117632742	5.798201448	2.377884666	4.019630068	1.965833652	6.399885467	6.050534848	7.307331756
Zm00001d010025	0.064184197	0	0	0.40023873	0.338288382	0.078634423	1.424985455	0.928698379	2.45386438	12.39288248	4.289731562	11.16275345	0.861890126	0.351804852	0.964673976
Zm00001d010026	6.794005568	7.870984495	7.146039743	13.70995952	13.52783788	13.18982569	13.66745873	12.32452645	13.46407879	14.97330419	13.91973571	14.62475376	15.24775213	13.31154021	12.55193155
Zm00001d010029	4.3920923	3.599315887	4.315650939	6.351578149	8.200286352	6.644758595	6.474557582	6.483192418	6.798143113	2.108959181	3.590543442	1.956532882	3.448586957	3.48399424	3.439450721
Zm00001d010030	4.887301015	4.491905142	6.675875267	9.637052544	13.63367548	10.16815268	10.31547442	11.22850178	10.09996353	1.062674705	3.581227908	0.487741466	6.405189909	3.499353577	7.457492651
Zm00001d010031	0.399912452	0.306368882	0.389411756	1.27516349	0.67361827	1.288006241	0.645545281	0.47226105	0.493202965	0.022744132	0.077984912	0.00456706	0.405992876	0.357045853	0.44328725
Zm00001d010032	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010033	4.910003849	6.987407999	5.863620976	2.177603219	2.398584131	1.547474165	1.895564891	2.650344502	1.420307372	9.401824692	10.95449729	4.890370291	12.01435021	11.02975131	13.33615393
Zm00001d010034	0	0	0	0	0	0	0	0.006076077	0	0	0	0	0	0	0
Zm00001d010036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010037	2.283636389	2.118665177	0	0	0	0	0	0	0	0.239025394	0	0	0	0	0
Zm00001d010038	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.020289874
Zm00001d010039	0.026872204	0.00846141	0.058444495	11.70471122	14.87138999	12.01657637	51.54338054	56.22515685	51.60863628	0.0092653	0.440527252	0.029767808	0.390921173	0.235666032	0.862135204
Zm00001d010040	0	0	0.448029304	2.732177325	3.90970107	3.906998368	3.013508795	3.978992192	3.385764455	0.229471223	1.049078981	0.030718808	1.17919856	0.455990468	1.3144793
Zm00001d010042	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010043	0.015642144	0.177312045	0.116640616	3.062787954	3.215287858	3.027875146	1.53533902	1.301399702	2.025565692	0.172584764	0.059175737	0	1.680389903	1.320355007	2.549907897
Zm00001d010044	0.014315428	0.252424687	0.124538794	2.481647764	2.621912073	2.806137321	1.722940529	1.760637084	2.030312717	0.078973342	0.144417714	0.031715963	1.986408553	1.789010559	2.681195346
Zm00001d010045	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010048	13.10878103	13.5855043	16.58476828	29.12218798	24.22965281	31.19762037	25.92863383	21.37392848	21.13426612	17.61624337	18.246572	27.20359416	7.857383877	7.229904864	8.128403685
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Zm00001d010050	1.923552294	1.614077854	1.757325869	2.500649217	2.893765217	2.631293028	2.646595238	3.293192835	2.969269424	0.808166914	1.015243609	0.409231087	3.201690526	2.474539995	2.44775062
Zm00001d010052	41.34256306	39.1716768	37.60130049	13.41748764	23.02802253	17.439818	26.29535017	33.98844582	33.19938961	740.2000405	456.530572	713.3988262	13.72137967	16.22291859	20.09673699
Zm00001d010053	4.853676658	4.756229822	4.626546268	3.188759473	5.798618329	3.06350525	3.338399566	4.265713197	3.602795739	7.174540821	8.070730566	8.692947015	3.898865844	3.143691192	4.322506927
Zm00001d010054	8.183948278	9.455640412	8.217012975	20.69457046	21.18743148	22.15566757	30.40891643	32.16817573	32.63544419	25.61499907	37.12199019	32.56473778	22.16800163	23.70777839	25.91935917
Zm00001d010055	17.96409044	20.22527843	15.97231765	16.41703654	20.372674	17.40382134	19.59649379	19.01880503	18.62884521	34.49154296	25.39370281	33.91944802	13.66404671	11.07174561	12.20188098
Zm00001d010056	6.745126929	6.722099772	6.610473873	6.920283409	8.878155562	6.228264783	5.912846718	5.84176975	6.454903799	2.715662617	5.550350895	1.59182311	3.266687945	2.759698093	3.745353932
Zm00001d010059	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010060	0.531923736	0.729956323	0.759744501	1.217869278	2.657096114	2.023123975	1.799720307	1.79969018	1.625336944	0.405128201	1.051211255	0.12312498	2.14108623	2.993896065	2.441548206
Zm00001d010061	58.3892497	55.72472671	52.4250023	62.52691429	54.68219724	76.83894827	65.69837685	56.80905388	53.43654807	10.80843139	14.62687918	5.321688902	43.56394817	42.2069307	33.03026603
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Zm00001d010067	55.12154196	59.38997937	53.95633486	65.03567795	56.27082866	75.45467311	71.32876298	58.60021892	67.30707782	61.1937002	58.67059702	46.52133593	53.83501637	57.10572197	50.35144923
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Zm00001d010069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010079	35.44292508	39.77501487	38.10127671	33.98644418	24.27117449	35.27723021	28.90837227	25.32672767	25.38636836	3.022827332	3.71975702	1.810850154	46.713207	43.06852811	37.88326901
Zm00001d010082	115.0940706	105.284946	108.0294126	64.91900152	52.55264722	59.619631	44.37248074	46.58744963	53.16561787	31.65162383	42.12628144	29.93614031	28.58460109	26.49602476	31.50735607
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Zm00001d010098	4.301458513	1.976129342	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010109	13.06159816	13.34406379	13.56483134	9.585984403	8.849473717	8.813765533	7.826486783	8.762372393	8.927281746	5.673225544	8.280243107	5.187228038	6.137551512	6.802936422	5.78843962
Zm00001d010112	0.052105703	0.270712721	0.348069528	0.016245993	0.154478044	0.071816193	0.175045855	0.062827618	0.240977937	2.407388904	3.507109183	2.034641758	0.211366338	0.371280661	0.301206519
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Zm00001d010116	0.602136429	0.922137017	0.731329269	1.681122857	1.812204766	2.55679945	1.942885575	1.270569078	1.679291379	0.084931917	0.094914169	0.022739298	0.987744203	0.540067989	0.973030473
Zm00001d010117	0.414978433	0.319407533	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010118	1.61353081	0.535631263	0.559618839	0.015599424	0	0.015324	0	0.03016358	0	0.172505814	0.26814062	0.221692553	0	0	0
Zm00001d010119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010120	17.42724231	16.63765409	19.84879747	16.9211523	16.4829931	15.93994822	15.65868767	16.40763536	14.27934543	40.33277308	33.54648853	36.62681478	13.51757771	11.68069924	13.66218331
Zm00001d010121	4.80732214	3.96467607	4.501376381	8.098009397	5.206316858	8.310022206	4.486189759	2.652113844	3.873998925	0.690255923	1.137698192	0.408518719	1.296986876	1.371632212	1.286696647
Zm00001d010126	4.039883249	3.638208171	3.245695684	5.024388315	5.428631101	4.604147707	5.540113868	5.014052119	4.944776198	2.484392852	3.485126056	2.176404905	3.153601259	3.14026005	3.441438819
Zm00001d010127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010128	58.26451355	60.38777646	72.34286724	89.86109174	101.5887165	94.04308784	87.28245505	105.3723112	87.5111985	98.72706655	93.40430155	77.34610796	160.0493293	153.5514454	167.1229847
Zm00001d010129	0	0	0	0	0.010142937	0	0	0	0	0	0	0	0	0	0
Zm00001d010130	0	0	0	0	0	0	0	0	0	2.030526129	0	0	0	0	0
Zm00001d010131	0.240937039	0.205570417	0.115911198	0.339258639	0.276506038	0.361834577	0.2270443	0.393601274	0.182119407	0.203662777	0.019601893	0.198021926	0.086972995	0.187442585	0.215656333
Zm00001d010135	0.707895608	0.600113458	0.955909098	3.921921079	7.121235711	3.785962653	4.18360181	4.637134114	4.339974453	0.21591355	0.39483882	0.045240844	2.151775107	1.846778421	3.135980139
Zm00001d010136	0	0.259210297	0	0.476671416	0.116218428	0.252137473	0.549671809	0.212701887	0.290071793	0	0.074149955	0	0.032900107	0.257838911	0.339909937
Zm00001d010137	132.5833234	115.2985806	117.4826402	66.56573175	95.87413816	70.78775415	78.9675893	89.98136178	93.14476343	185.572415	154.697702	190.9099797	11.27681749	8.544382893	16.0945027
Zm00001d010138	0	0	0	0	0	0	0	0	0	0.033195221	0	0	0	0	0
Zm00001d010140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010141	18.24092664	17.53475013	16.55559506	17.52214691	16.56152812	18.53416075	14.51554388	12.79964883	14.56180477	1.67671473	3.793963278	1.304826559	7.871606737	6.969680181	8.170893852
Zm00001d010143	1.969224368	1.909253636	2.024792458	5.141553821	3.696107309	3.349826427	3.592269034	2.562341382	2.778038607	0.039077483	0.23224688	0.172630153	1.997530848	1.506453896	3.472364931
Zm00001d010144	0	0	0	0.040023873	0.021143024	0	0	0.019347883	0	0	0.020234583	0	0	0	0
Zm00001d010145	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010146	7.143527634	7.568848924	5.408435058	3.321711025	4.686036951	4.319314481	3.495994722	4.065408528	4.183460811	2.944306442	4.174066312	3.865680672	2.687583063	2.734094195	2.853827179
Zm00001d010148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010149	9.458987226	10.15631896	3.237256124	2.414944512	2.907941107	2.495796174	2.603582273	2.584282528	3.447979402	1.792567693	2.595680038	2.291930648	1.775035457	1.686533622	1.784823947
Zm00001d010151	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010152	7.266561184	7.222391032	5.308901813	4.885954011	6.993704782	4.269944321	6.656464642	7.533624511	5.508000634	41.32385749	35.74591323	51.80783431	3.627357263	3.706160689	4.71725149
Zm00001d010154	0	0	0	0	0	0	0	0	0	17.86567846	0	0	0	0	0
Zm00001d010155	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011621921
Zm00001d010157	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010158	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010159	7.785859677	8.045814547	6.651496519	9.266729104	22.30325441	8.044089918	23.42498512	27.19555772	25.24527013	76.76390373	80.09192693	70.80503491	10.55119709	9.200469906	12.4178398
Zm00001d010161	0	0	0	0	0	0	0	0	0	0	0	0	0.059182011	0	0
Zm00001d010162	2.590044317	2.001385624	2.201041674	1.929384304	2.121447494	1.689492591	2.012191444	1.74719407	1.951078135	1.515728121	2.621730558	3.939242825	1.402171226	0.897831922	1.448663779
Zm00001d010163	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010168	10.65241012	13.73158344	9.630424546	8.20134754	7.82880676	8.339230346	9.256867542	9.459400365	8.726632436	7.504827837	7.20146242	3.706217746	6.110813119	6.450052503	5.179682436
Zm00001d010169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010170	0.108934135	0	0.022563944	0.090571952	0.191382272	0.111216017	0.212149229	0.306482798	0.201519	1.201905051	0.641057381	2.292773528	0.020316799	0	0.419809085
Zm00001d010171	361.6952456	200.6204359	366.678764	31.46768426	92.87697667	36.3528141	57.1626904	83.71864157	65.2435742	644.8151114	761.0150856	736.4268252	28.30175991	24.23225672	22.72445231
Zm00001d010172	205.9637932	218.1374257	291.1866577	35.30743145	35.39005403	33.64648668	34.05137811	40.99217114	29.4933063	483.352498	375.4222074	566.0153385	74.16411991	76.72932317	71.69031456
Zm00001d010173	6.498887061	5.778533555	6.298258099	7.149732569	8.102907666	7.147258972	6.413542913	6.161347604	7.225895569	1.573175482	4.262195584	1.459417672	3.26884037	2.860797338	3.192306871
Zm00001d010174	0.068477011	0.076100338	0.070085179	0.070330695	0.063690712	0.059219088	0.028240725	0.10199538	0.074515717	0.155550028	0.20318049	0.066931523	0	0.022078501	0.088482743
Zm00001d010175	51.98552007	43.93853338	53.96154608	0.760198657	3.714640756	1.240182555	4.311679718	6.273520219	4.899724835	13.34553598	19.46347769	8.994985586	0.523756082	0.429560447	0.45303283
Zm00001d010176	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010177	0	0	0	0	0	0	0	0.009759856	0	0	0	0	0	0	0
Zm00001d010178	0.399938584	0.453351714	0.281658748	0.09975721	0.588458495	0.097995897	0.334918571	0.337564428	0.312382289	0	0.033622359	0	0	0	0
Zm00001d010179	0	0	0	0	0	0	0	0	0	0	0.030047694	0	0	0	0
Zm00001d010180	0.517594041	0.637739619	1.146694058	2.638215587	3.232115786	3.143047018	1.985350106	1.777329963	1.457073592	0	0.851351337	0.199432066	1.649473265	1.813228267	3.070100122
Zm00001d010181	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010182	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010183	11.11586309	11.15746324	12.9679414	10.99496937	8.305454009	7.722341296	10.15223283	10.32200511	8.771621932	10.27914318	7.62635754	3.30251114	3.145496209	3.128104077	6.154911242
Zm00001d010184	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010185	0.648855473	1.178340091	0.281302148	0.357564269	0	0	0.035264541	0	0.037219477	0	0	0.016715643	0	0	0
Zm00001d010189	6.618680766	5.646793428	6.999259576	10.58871783	12.48751459	11.89219649	10.73604474	9.426982035	9.012509865	5.59662749	6.908819409	4.174833245	4.66477248	3.786357187	4.514541219
Zm00001d010190	1.612242634	1.157732222	3.282078555	7.387800399	33.81683382	10.99329377	21.08098814	27.409487	21.25097071	9.357013608	15.06878238	6.626673139	6.269629778	9.156875811	11.15853221
Zm00001d010191	10.77127521	7.335710804	9.631063498	10.66775335	10.59638608	11.97219605	10.67836694	9.079640701	9.55724512	16.70388251	15.97991013	20.89437491	7.990151649	8.495240589	9.861023572
Zm00001d010192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010193	0	0	0	0	0	0	0	0	0	0.861937622	0.407189182	3.784650807	0	0	0
Zm00001d010195	2.510914213	1.899092645	2.752061866	6.42036854	9.476601854	6.569802637	8.37444152	7.797187878	9.040983627	1.366043849	2.458291719	0.573068088	2.506222962	2.199275482	2.917547221
Zm00001d010196	0	0	0	0	0	0	0	0.009990543	0	0.011427203	0	0.018356815	0	0	0.00957928
Zm00001d010197	7.968568878	5.750265917	6.595261458	5.641368595	17.03713461	7.636696106	11.88023918	15.6109162	12.70505072	14.99794033	13.72390945	10.51614777	3.619619903	3.915243352	3.418262499
Zm00001d010198	16.51359505	17.58135874	15.39777634	25.39039967	27.96283566	21.65209875	23.89093919	29.17359664	26.2261299	28.835469	27.80587852	22.25295553	24.30400983	22.10756947	23.38615051
Zm00001d010199	10.79244011	11.49716192	8.959529658	7.491167489	9.27101402	8.501058847	9.378386063	9.186883636	9.310309099	21.11227848	16.94883177	17.80859798	6.53127779	6.737774029	6.168549935
Zm00001d010200	0.532113895	0.574456646	0.770320305	2.056521774	2.026366217	1.984392473	1.072732849	0.839026155	0.735570208	0.008064536	0.08848519	0.00647749	0.523474756	0.455119314	0.696321062
Zm00001d010201	1.367123392	0.482131152	1.245980982	0.136401359	1.633256307	0.357314819	0.894590869	0.923126189	1.079067072	2.815662899	4.321459388	2.584639576	0.122388398	0.019982516	0
Zm00001d010202	0	0.014171992	0	0.420991849	0.333589932	0.592767639	0.157776167	0.027134809	0.145707359	0	0	0.006232252	0.176279586	0.178855849	0.234160179
Zm00001d010203	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010204	56.34782486	53.33563877	70.89691737	118.3379943	62.73906694	111.5520193	37.36361585	22.69856973	34.59752537	1.330521167	2.945343624	0.703081361	88.46737958	81.14070227	74.15670231
Zm00001d010205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010206	0.191876967	0.181252313	0.462026441	1.076852835	1.659170978	1.013763261	1.457353546	1.720739606	1.286716492	0.595417436	0.635152906	0.265690746	0.28181539	0.210342269	0.415942423
Zm00001d010207	0.051126529	0.123268615	0.14705018	0.346140857	0.265617285	0.329291624	0.233844712	0.11977123	0.111694222	0.008058504	0.029473003	0.003236323	0.272984059	0.220984118	0.192527255
Zm00001d010209	0.143691648	0.103417236	0.025511486	1.587253052	1.62286994	1.911312376	2.686459066	2.029610346	3.265757607	0.141553194	0	0.136435788	4.203655561	5.243160061	4.437968254
Zm00001d010210	0.061388567	0.054123389	0.061035114	1.332164149	1.415547758	1.680929965	2.471186048	3.182887461	2.683888618	0.579954942	0.135472667	0.08840451	4.427442888	5.212098675	5.475610243
Zm00001d010211	4.781911717	4.298402601	3.841037905	1.330867458	1.419353923	1.615711568	1.964504986	1.128901951	1.291225325	0.152727349	1.726525466	0.379166911	4.134438701	3.91777966	3.538267208
Zm00001d010212	0.504030745	0.447403005	0.620445075	0.161641358	0.11385162	0.088215232	0.134619412	0.237310479	0.088801385	0.092685533	0.084746525	0.319052792	0.155778772	0.057884745	0.099896284
Zm00001d010213	22.51291053	23.27029769	20.30792122	22.49082812	24.82812779	22.86016387	25.3219197	23.02183219	23.15607819	24.11216594	26.96950139	23.05381905	13.20771683	10.48807751	11.41798749
Zm00001d010214	5.395291126	6.120972377	4.717285009	3.643343193	6.019503801	4.259942878	7.943857937	8.483293645	7.406214563	41.00026165	16.99199345	33.02178995	5.961655974	5.758471587	5.516753444
Zm00001d010215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010216	3.664361177	4.0340935	3.097898086	3.368283065	3.600386904	4.079206238	4.461536196	4.451114269	4.061677015	2.11509139	3.091994243	2.094754372	3.027310638	2.955719548	3.101537577
Zm00001d010217	0	0	0	0	0	0	0	0	0.029894367	0	0	0	0	0	0
Zm00001d010218	0.458031144	0.075246772	0	0	0.262401403	0.109790378	0.139619842	0.348177342	0.135079864	2.76025636	4.218932629	3.739215064	0.02228485	0	0.011511881
Zm00001d010219	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010220	0.885111088	0.684998015	1.563881959	5.120370832	6.337167867	3.788805241	5.084035472	6.10771311	4.971325969	0.161781389	1.385106125	0.141756997	2.028668843	1.706774928	4.364475407
Zm00001d010221	0.145245513	0.068601473	0	0	0	0	0	0	0	0.100158754	0.011447453	0	0	0	0
Zm00001d010222	0.885442611	0.874331105	0.589830846	1.793359838	1.325371813	1.978653952	1.663700636	1.110347932	1.406491245	0.117232449	0.080393151	0.039234126	2.259112268	2.034489282	2.579705079
Zm00001d010223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010224	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010225	3.365226811	3.873126344	4.200341001	7.932625459	9.41307612	5.908845024	5.856027762	7.118460757	6.270109559	1.180305829	2.807765743	1.245293231	4.122898287	3.490314727	4.662085682
Zm00001d010227	113.6317875	107.1807903	107.2663327	113.2205591	182.65745	140.395646	183.8798499	166.2110096	174.9421977	85.98261489	122.5053089	120.9303814	80.64150798	87.08179505	75.57512684
Zm00001d010228	0.025721983	0	0.015983678	0.024059506	0.669376599	0.204834165	0.007514034	0.124059426	0.214125786	0.035474855	0.097308737	0	0.014391862	0	0.193297796
Zm00001d010229	0.268227765	0.253375397	0.343771577	1.421718642	3.059373515	1.365809058	2.017667941	1.778818967	2.160532438	0.057801611	0.729338232	0.148565273	1.031784471	1.488581021	0.988468934
Zm00001d010230	2.569924476	2.883866579	2.121357622	4.257577945	5.454929706	3.718127865	4.457920956	4.842027403	4.66185001	1.52841839	3.369263075	1.400492869	6.90982715	7.205435394	6.612447816
Zm00001d010231	0.381459442	0.403234468	0.440216137	3.754945237	15.06988778	9.688959845	21.94450696	24.26253435	17.77611114	1.737993929	7.773830316	5.787610224	13.7435402	20.2737406	17.28637643
Zm00001d010232	0.097774917	0.072439923	0.050035569	0.050210849	0.970035175	0.126833983	0.577970542	1.282967312	0.631290554	4.561026148	0.950114539	1.229644045	0.019308224	0.037829752	0.08644323
Zm00001d010233	0.275815076	0.034739011	0.159965768	0.091729226	0.545140239	0.157691896	0.247088937	0.509940973	0.283463736	0.342355016	0.185499552	0.213874797	0.020576395	0.050393029	0.148810605
Zm00001d010234	2.555043718	1.340134867	2.087944671	3.03812551	19.89548802	7.306841054	19.20579475	21.15202096	21.13380209	7.221430795	11.79337382	3.380924944	2.420507871	3.10787973	3.46384412
Zm00001d010235	5.837240958	6.876167261	4.819925929	6.957185529	4.216591491	7.611979493	4.971028438	3.819860781	3.874379362	0.792025036	0.466908036	0.19670734	5.183369348	5.60170354	5.00579263
Zm00001d010236	32.9096198	26.64946214	40.37468834	49.83219755	142.6715992	57.69385335	81.33579998	118.2585487	82.58565438	65.38466088	80.55637754	46.33085097	30.32109473	24.46956888	41.08289039
Zm00001d010237	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010240	8.487308977	10.89030908	11.66097723	61.48733027	28.6202681	53.77032158	30.2289491	28.24182585	28.84923905	4.802918428	12.03277302	5.125278908	126.6528409	124.8143701	115.5986939
Zm00001d010241	7.364287471	7.558123069	7.5472374	5.584104147	4.705111728	6.252516932	4.784864663	5.432357847	4.958611512	2.660662267	3.728091476	2.481252349	3.967347788	3.243430704	3.578826172
Zm00001d010243	35.71261106	39.01599883	41.52788346	7.529525137	12.81598055	5.720721152	13.52518083	22.14740309	15.70389738	4.86336332	5.038067002	4.824907797	3.52976743	3.143507981	5.268604023
Zm00001d010244	10.24299166	8.951160879	10.32183825	4.431705736	12.79745833	5.456433365	8.185971833	10.85540266	8.455946988	11.27346184	10.98449287	7.119770419	2.935613558	2.65358744	3.143240429
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Zm00001d010256	1.532121043	0.98959596	2.343537897	2.449737053	9.36927585	2.310225122	5.967611504	9.426421979	5.135646085	2.058866806	5.053063756	1.697214161	3.297101238	3.359129777	6.449498028
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Zm00001d010259	5.269095444	5.248881925	6.331611322	7.960890625	11.01850282	8.089052147	6.995726226	8.805702997	8.081322161	2.103772091	3.61455684	1.490968306	9.006201846	9.787243055	9.14057172
Zm00001d010260	1.228429715	1.387499588	1.152409288	1.571580876	2.349633434	1.097189525	1.870676559	1.643661537	0.879674243	0.513727315	1.039388937	0.526760783	1.489945714	1.815802504	1.640139339
Zm00001d010261	14.6126662	16.00745538	18.44045071	21.64452704	37.99629277	22.03965142	23.69919673	28.08269896	22.71613877	7.000017366	12.28469392	4.806297864	29.65811665	29.05391957	28.18072182
Zm00001d010262	10.60805519	10.3831682	12.58330076	15.81948093	19.36828162	12.16515913	14.22120823	15.8522878	14.54053021	6.492885378	9.734690451	4.998781604	8.385445687	8.135738494	9.685516418
Zm00001d010263	9.493912445	5.022199499	7.551399892	7.577853283	14.51116204	7.909312397	12.42487318	7.326398322	8.430211497	3.928101143	7.901604599	3.996431636	4.249597151	4.9956289	2.634302011
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Zm00001d010265	0.054794525	0	0	0.35307633	0.120333042	0.413973206	0.362821948	0.176185932	0.078839653	1.108370022	0.023032551	0	0.623387799	0.310349691	0.601824508
Zm00001d010266	3.573635615	3.018117285	3.408458614	4.154575337	4.736165874	4.335768248	5.616280062	4.125274435	5.423692301	6.141687623	8.017323042	10.50286017	2.836509223	2.786315815	2.322029129
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Zm00001d010270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010271	30.16971057	24.84802432	22.10899915	15.65219058	21.14289545	17.13568969	22.6742751	21.1649035	23.92613321	31.7435424	27.28118261	30.4727034	19.49833382	20.88060619	18.80570048
Zm00001d010272	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010274	13.99834297	12.38408659	14.28840708	13.1985833	27.50884464	13.40166308	27.84635547	37.31900257	34.58700424	72.73925562	74.58880186	66.47111286	13.74823929	15.65132995	18.9758729
Zm00001d010275	0.030179324	0	0	0	0.298242654	0.036973802	0.176322704	0.018194698	0.018609738	0.520278297	0.228342577	0	0.016885816	0.06616727	0.069782835
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Zm00001d010279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010280	0.865844815	0.80355192	0.377569995	2.00813112	0.64049267	1.619082773	1.082738949	0.842535807	0.89922256	1.068443511	1.321722951	0.639429062	0.764927487	1.099038358	0.930786711
Zm00001d010281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010282	82.58883028	85.68546383	81.68487451	52.37890807	50.21297561	45.56536235	62.89804317	71.19881511	67.1987464	177.3011278	191.4891875	220.3789885	38.05900019	34.41153308	37.4192352
Zm00001d010284	0.980951389	0.641215039	2.021594113	5.900195029	14.03804608	3.909652097	15.69915856	13.16056701	23.56783923	439.3821952	367.6115356	766.1594451	0.097265984	0.068060339	0.086135216
Zm00001d010285	0	0	0	0	0	0	0	0	0	0.206064322	0	0.041378067	0	0	0
Zm00001d010287	0	0	0	0.010053166	0.775360561	0	4.483503766	12.44105375	13.19208804	124.9469681	52.0448742	30.02979055	0.009020371	0	0.382098051
Zm00001d010290	45.28947863	44.28747354	46.95152803	63.13123603	75.44692296	65.18720871	75.91334554	90.90160881	75.69844233	59.9205157	80.98479596	47.20930938	46.49374069	39.62582183	51.41767259
Zm00001d010292	13.77280327	16.3831802	15.35806627	15.32741869	13.47247304	14.31847552	12.19278045	11.29985358	12.75179094	4.53862028	9.153608138	8.701075838	9.183676221	9.211850616	9.918753785
Zm00001d010293	0	0	0	0	0	0	0.018091548	0	0	0	0	0	0	0	0
Zm00001d010294	7.818353521	7.583240528	6.756063643	6.934873466	7.31044579	6.431422895	6.650125481	6.239771455	7.456019632	8.561044456	7.012028633	9.301593674	5.025274302	5.372914795	5.012125119
Zm00001d010295	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010305	4.715907114	5.840074863	5.273444538	7.241448376	5.499201767	6.843632169	5.842842278	5.588662228	5.458326772	5.480618319	7.702008656	8.261704802	6.118155381	5.522788527	6.469082195
Zm00001d010308	60.54090273	66.3160534	49.81803883	67.14302195	48.56998054	56.6604331	31.90696043	30.74736579	32.83725163	12.65394721	22.19978284	9.029933344	14.30864358	9.521080962	14.67320308
Zm00001d010309	5.653788837	5.802718632	5.207558733	4.531925265	5.818838184	4.806707957	6.193636792	6.437564598	7.482488855	3.084199867	3.559500914	4.166466201	2.198569819	2.305269555	2.586835024
Zm00001d010313	0	0	0.090980722	0.188305089	0.512442365	0.936112807	0.93560792	0.75581067	0.603770167	0	0.0057697	0	2.58047827	2.873991325	2.792994904
Zm00001d010314	15.44274388	18.51564925	15.89559431	21.89685997	14.0297877	18.20360223	31.76543222	30.62026924	26.41161241	7.508695916	6.818752409	1.808283285	75.57940247	79.21494862	73.09920005
Zm00001d010315	9.912969022	10.35807182	8.396564548	8.459014077	6.231143602	8.575005876	6.984211823	4.958094556	7.033183059	23.84474691	16.51089378	41.95512454	8.400776461	7.7974855	7.713755104
Zm00001d010316	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010321	30.06724348	30.38668702	22.95752329	19.84416255	7.905361411	22.66242819	7.312755096	1.519744496	4.964233256	0.185886161	1.336744096	0.706172446	95.62306952	100.9188917	71.72208354
Zm00001d010322	11.52952626	10.56516418	11.50454788	18.78634907	23.54813943	21.00565658	24.97024122	25.65195862	23.15556787	18.36259083	28.73310763	18.96671197	15.5781577	13.73471862	17.33274431
Zm00001d010324	9.548557925	8.897958504	9.444153371	7.495431827	8.174079743	8.072211604	7.543442486	7.465076576	8.097382368	4.020743113	5.122702618	3.94540406	4.192199995	4.213845416	4.589843609
Zm00001d010325	0.262908345	0.158368451	0.38356818	2.993758927	2.470127457	2.744841052	1.495971353	1.254247539	1.635291862	1.103546809	0.389194267	0.164612745	5.807309017	4.573757228	6.356685289
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Zm00001d010337	0.774612658	1.098294125	0.973950433	1.242888461	1.166901561	1.037802422	1.16714763	0.999550865	1.259783097	0.362353664	0.742605167	0.228319731	0.841470927	0.814396759	0.759391236
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Zm00001d010375	0.237416508	0.083063047	0.245884946	0.238521431	11.77461424	1.454338536	9.555618821	7.307843768	9.947080233	6.084861741	3.709107382	3.864627622	0.177117797	0.036147821	0.182990588
Zm00001d010376	0.061123252	0.128308269	0.151928314	0.203280714	0.026846284	0	0	0.049133819	0	0	0.025692794	0	0	0.245686667	0.094222427
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Zm00001d010381	13.35954698	12.22384406	10.44550952	12.92166963	12.3349598	14.08928568	10.16009677	9.421506333	10.72333506	4.461729977	6.993529971	4.690945575	22.9839061	23.78814799	23.48505095
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Zm00001d010388	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010390	1.391682495	1.615352448	2.136548772	4.662421705	9.456375678	5.24873003	3.50744923	4.639321093	4.677841909	1.166669561	2.546407144	0.7859355	0.916080823	1.106815984	2.05065426
Zm00001d010392	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010395	3.911589551	4.063499793	3.747552054	8.717940335	7.52969933	8.955834149	8.357016244	8.170158335	7.49400292	4.250831509	5.318210153	2.476046509	7.330718952	5.894585257	6.513294793
Zm00001d010396	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010398	0.011898376	0.059944194	0.073936683	0	0.094067135	0	0	0	0.014673997	0.098458932	0	0	0	0	0
Zm00001d010399	142.9856348	130.6938633	148.3025996	50.86674554	140.6502715	83.3952271	114.7484008	125.7140973	120.5243647	367.0023217	275.5673076	377.7739599	27.71634547	22.71193909	27.69587136
Zm00001d010400	0.014700252	0	0	0	0	0	0	0	0	0	0	0	0.008225027	0	0
Zm00001d010401	41.22984775	41.82235924	45.66656852	17.50506572	25.24075917	21.81359304	20.06325866	20.45889492	19.77600997	14.55105293	22.92970131	10.80458197	8.208609201	5.272066862	9.386653215
Zm00001d010402	1.428024434	0.819950939	1.148369569	2.540501504	1.687934311	2.830114493	1.030634642	1.316725966	0.984172156	0.810962817	0.105928507	0.23263245	2.091506801	1.703578519	1.213964061
Zm00001d010403	18.0234994	21.79779686	17.33710911	10.88429488	10.47247495	10.10663404	12.21214127	10.94157802	10.29306722	16.75989821	14.65711333	15.95106402	8.817516187	8.338521646	7.452345016
Zm00001d010404	0	0.011335727	0	0.011224602	0	0	0	0	0	0.024825392	0	0	0	0	0.010405406
Zm00001d010405	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010409	0	0	0	0.026311991	0	0	0.024652526	0.012719442	0	0	0	0	0.011804437	0	0
Zm00001d010410	10.49354724	8.592525923	14.56978896	27.48402303	34.82126923	25.60208773	5.653602833	6.678182844	5.978088258	6.846192826	17.99828279	3.231727556	6.840651593	7.016185303	8.624182422
Zm00001d010411	3.085734413	2.651052138	2.653995366	6.384256437	4.994873467	6.784775499	10.43498318	15.75750581	4.612043958	0.112734741	0	0.124505305	9.993223077	7.851874123	11.48224913
Zm00001d010413	11.14790499	9.566691792	10.20394112	14.52885338	19.48219378	14.79280002	17.72847692	17.54491641	20.48841533	8.66782993	12.35918462	7.22219139	8.898672361	8.560592059	8.786491406
Zm00001d010414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010415	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010416	4.981890327	4.523627636	4.895610947	3.82526113	4.515516172	2.39806932	1.795565973	3.080714549	1.970308129	0.773706273	0.722813234	0.202645484	7.894925091	7.058943958	6.767876711
Zm00001d010418	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010419	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010420	0	0	0.026589436	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010421	13.14947585	12.28660618	11.90511222	8.53970773	18.27649403	11.14693528	15.63917356	19.59465966	17.24361443	15.32161578	17.23986458	6.766910875	10.71292098	9.562816213	9.990466119
Zm00001d010422	0.031070986	0	0	0.077500772	0.368465243	0.266463466	2.995281928	2.378998092	1.973435873	0	0	0.086047571	0.173847156	0.272488849	0.466989902
Zm00001d010424	2.422254175	3.031091572	3.127292759	8.202461316	6.176769544	7.548634093	3.8471511	3.648495953	4.002416926	0.345961202	1.057721049	0.217092496	5.833449301	4.95839084	4.613049509
Zm00001d010425	14.59980224	15.26974433	14.60565972	9.061898697	9.785650835	9.489673846	10.65365877	11.429679	10.91501842	13.76430653	14.205141	12.97140043	7.485833454	6.989780467	7.049656098
Zm00001d010426	1.248179252	1.491940806	2.183903782	16.23215243	14.29241161	19.24980815	22.01473234	19.34098333	13.3651903	0.16201835	0.203693352	0.032533561	29.34276082	26.61473614	34.76373202
Zm00001d010427	0.17106862	0.16159617	0.035434098	0.586710747	0.187840003	0.489025756	0.466418597	0.257837272	0.334043834	0.294914789	0.053930755	0.015791838	0.303099526	0.328180001	0.626299123
Zm00001d010428	0.053264548	0.012778456	0.044131558	0.379595619	0.157078154	0.459901958	0.45049633	0.125391511	0.168917039	0.692628446	0.022389435	0.002809717	0.377496682	0.230781372	0.240459479
Zm00001d010430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010431	11.95338254	10.21718971	12.11288032	30.7825493	42.29955269	31.56904486	32.39574264	34.73806011	34.50060377	24.87660284	15.40455613	5.576723561	26.95268057	24.88660156	31.10131432
Zm00001d010433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010434	0	0	0	0.0994179	0	0.341819023	0.139721606	0.144178393	0.024577876	0	0	0.022076345	0.847441531	2.337604777	0.161283797
Zm00001d010435	0	0	0	0	0	0	0	0	0	0	0	0	0.023866692	0	0
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Zm00001d010439	0.012682035	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010440	0.012519445	0	0	0.062454835	0.016496205	0.19939443	0.131660744	0	0.185279374	0.017266379	0	0	0.210144914	0.480348933	0.275009551
Zm00001d010441	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010442	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010445	70.00520232	65.93710574	83.0909103	86.16394662	77.591215	94.5931967	66.52983896	56.56507533	65.92273495	33.85952409	31.74447537	31.50908736	10.666106	8.888618988	11.359933
Zm00001d010446	0.089706259	0.007532358	0.066892322	1.603581157	0.362483548	1.699824434	0.181691059	0.050477154	0.081130644	0	0	0	1.037303242	0.635926513	0.995641705
Zm00001d010447	6.652426613	6.473594279	7.324453149	7.918015341	7.30347391	7.617905428	6.880433218	7.270300326	6.78419011	4.273389053	5.115197186	3.449809206	4.240486223	4.068033181	4.490012464
Zm00001d010448	26.447636	20.98738714	31.15596529	35.29389475	53.40878506	40.18183254	42.32504184	41.6129982	45.90705012	45.91500544	43.89042097	50.16740837	12.42596383	12.29023183	13.13755772
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Zm00001d010450	0	0	0	0	0	0	0	0	0.06539272	0.109692288	0.04457625	0.048947552	0	0	0
Zm00001d010451	0	0.014230553	0.182544171	0.112728396	0.416849568	0.373740965	0.765735986	0.953642757	0.975396372	0.04674765	0.299204261	0.100128083	0.290798879	0.148630281	0.209002474
Zm00001d010452	1.325625549	0.987259646	0.974168789	5.304816769	4.541435955	6.199720917	5.320455813	6.338014063	5.686483303	9.316157584	9.332203255	7.495570545	0.748158419	0.530732919	1.839124844
Zm00001d010453	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010455	8.459166791	8.467670812	6.612992001	4.366727888	5.116050058	3.978141373	4.481782098	3.845191255	5.043792851	4.793869663	6.174106656	4.0516427	3.003620686	3.388374224	3.308974471
Zm00001d010456	24.31392835	25.52181538	27.12518996	28.57488354	21.36281201	27.04116245	26.86023465	22.3749065	21.63809276	25.53342614	27.78620835	21.55183502	27.81282331	25.44544599	24.89338073
Zm00001d010457	0.358910676	0.287667752	0.973211442	0.04069253	0.257954983	0	0.114378308	0.039342234	0	0.359997814	0.082290523	0	0.073024104	0.107304678	0.339504317
Zm00001d010458	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010459	41.34714649	49.63339385	42.90986712	0.793910349	0.319536254	1.101753703	0.295174371	0.755382532	0.261691709	10.34022545	6.154364074	17.80834935	3.10946133	3.622107872	3.00228655
Zm00001d010460	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010462	0.084792958	0.575061011	0.308036589	0.959885518	4.408925714	1.678109613	4.976893381	5.827737406	4.746016015	5.244464808	6.588326111	9.176218079	0.437935584	0.600619505	0.595734329
Zm00001d010463	5.715508655	6.123035842	5.143733468	5.096206472	19.57199864	4.885498898	18.31617538	28.35062666	28.61653725	73.75241127	68.91803625	119.437502	6.079721595	5.170872009	5.628114725
Zm00001d010464	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d010466	4.440631755	4.662237008	3.53171737	4.490855557	3.912591891	3.218137919	5.008327259	5.662207843	5.517956616	15.99190779	15.81662269	16.19368776	5.908923882	5.435047854	7.533974303
Zm00001d010469	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010470	3.211331743	3.25492217	2.790780444	2.737662996	2.780813846	2.92480321	3.039755305	2.73860341	3.217655892	3.380441607	2.999698041	4.462783493	2.14976141	2.146646216	2.111035173
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Zm00001d010478	40.21651855	37.78479011	39.52717514	30.3291896	67.03279514	35.54138897	79.69216582	101.0829364	95.67046989	166.117607	221.5299489	150.3271829	15.55489274	14.04267266	19.34411048
Zm00001d010480	3.919812949	3.501838997	4.103687217	2.772744797	5.058160066	3.136390552	3.953025035	3.859284465	4.181534801	5.542267691	4.869567232	4.392681489	1.450797827	1.446224851	1.329105145
Zm00001d010481	7.775966383	6.400172605	8.135734407	8.502531808	12.58110601	12.91632809	10.50197614	8.024150543	11.44100132	7.357395791	9.48648633	5.528897902	7.062425742	8.643230953	8.948263976
Zm00001d010482	18.08389745	21.34182161	11.28721568	13.3279497	9.302930499	13.93795151	14.06235647	11.41525091	12.50679264	4.094077247	9.105562278	10.5050753	11.61756066	10.25511144	9.702394028
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Zm00001d010491	26.79561848	23.66471234	28.00572005	25.27285559	34.57300879	27.68347123	28.07954359	33.26737774	31.13770194	23.70735035	31.00573381	16.32163317	28.66890492	27.92650812	32.98344934
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Zm00001d010510	0	0	0.013903969	0	0	0	0	0	0	0.339449657	0	0	0	0	0
Zm00001d010511	0	0	0	0	0	0	0	0	0	0.030509523	0	0	0	0	0
Zm00001d010512	0.295336761	0.383977025	0.207203046	1.770366072	2.548301627	1.984217744	1.341441012	1.286587022	1.016325149	0.052557172	0.012013843	0.021107139	0.57036405	0.365533822	0.429565624
Zm00001d010514	0.206099004	0.105755816	0.180246982	0.085679246	0.231333722	0.018703665	0.11595359	0.128856252	0.037655886	0	0	0.016911639	0.025625711	0.041839438	0.088251324
Zm00001d010515	0	0.082584987	0	0.286213883	0	0.160663138	0.038308962	0.039530926	0	0.452155527	0	0	0	0	0.227421756
Zm00001d010516	1.146398839	0.883576669	1.212098919	2.68876271	2.232004727	2.620327305	2.919056564	2.578910548	2.679942078	1.014718493	0.409959233	0.151633267	3.312451947	2.588473548	2.828824938
Zm00001d010517	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010519	2.16322026	3.626100661	2.461123787	6.486801109	8.498683818	6.586627879	8.949254206	11.73758056	12.06417701	7.963145353	15.82577447	5.841023256	2.696603009	2.816035139	3.291728168
Zm00001d010520	0.805437037	0.578415003	0.93075394	0.378892664	5.222621913	1.090641162	3.17845593	4.089152552	3.433078377	8.808690687	4.713120601	4.445479891	0.22928059	0.092941933	0.416587295
Zm00001d010521	0.19275369	0.314707018	0.301661667	0.578726393	1.044145197	1.478121844	0.759117578	0.912452219	1.003701421	0.886130388	1.593449624	1.368133914	3.45914989	3.513896672	4.498259832
Zm00001d010522	12.54026716	12.14519018	12.21840895	25.0530367	24.89722865	26.68578488	22.06962898	21.34497159	23.68163805	13.99354117	14.77120562	11.3411275	18.11598997	19.10776396	18.30884002
Zm00001d010523	5.30883292	5.458243378	5.400330796	13.80790912	9.236931438	12.34656829	8.278413972	7.832473589	7.336608984	6.092368514	5.963807427	4.604673019	42.39266159	44.33301724	43.91131208
Zm00001d010524	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010525	0.117733671	0.148285995	0.087791852	0.722415052	0.92458305	0.93467427	0.324669438	0.017035201	0.267164815	0.279283526	0.029693187	0.026084004	0.505911394	0.459467074	0.707804192
Zm00001d010526	0.023571093	0.004241126	0.016739556	0.020997746	0.013310731	0.024752412	0.011804067	0.077143726	0.016611254	0.009288121	0.025477632	0.018650705	0.071594198	0.059061622	0.031144457
Zm00001d010527	29.48884099	27.63291736	31.07725187	17.59081719	18.12531097	21.24406551	10.72402047	10.55613308	10.92732751	0.364556951	2.013317519	0.187401361	7.43038611	6.305387753	6.332104139
Zm00001d010528	80.1750252	58.38418741	96.6616849	69.98648287	113.4588441	65.11695012	66.6879727	79.73624408	63.11095989	6.911890689	31.91452903	4.582337153	34.34861418	25.96232077	35.51380717
Zm00001d010529	0.222157551	0.40177596	0.424766244	4.035206873	4.991339358	5.094527691	11.27557241	10.4675916	10.98737565	0.817045038	0.682411306	1.072726386	1.026277712	1.092793822	1.211778925
Zm00001d010530	20.68992262	19.19131152	21.97513374	16.8956154	21.57654732	15.45861392	19.45678534	21.69392729	20.39645732	3.03760207	6.662955491	1.740947644	9.965804346	11.12129499	9.723146856
Zm00001d010532	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010534	97.08096646	97.27237996	95.66474537	55.37426256	53.56799946	56.70825981	53.03678172	52.93674662	48.03260039	25.43217112	38.51514741	23.05344067	42.83284554	42.68762369	42.61496247
Zm00001d010535	204.2849941	193.4666993	229.4602265	212.8759829	134.3754564	143.0449448	50.87647589	41.37433354	55.21404724	9.836453381	19.9177225	7.057099136	141.8086245	135.4198064	119.5806617
Zm00001d010536	40.03512923	39.9298845	44.51550236	39.125653	23.9679099	34.52084286	29.71319672	22.50553885	23.00116653	3.215254156	4.863456534	1.594144475	57.36150968	62.23501898	58.68115702
Zm00001d010537	10.40678864	9.119983157	9.461940369	15.02819461	24.3793296	16.65518668	16.85806111	20.80362504	18.40055779	23.3722018	26.43998462	19.81631436	11.04486644	12.18885417	13.34881885
Zm00001d010538	32.19098685	31.41238402	31.31416263	27.30450333	36.24881296	27.60144449	38.1311515	42.40366006	40.31035239	42.17988917	51.08479253	37.54786932	17.77912855	16.60368908	19.85936982
Zm00001d010540	0	0	0	0	0	0	0	0	0	0.337901174	0.061791629	0	0	0.214865759	0.169954968
Zm00001d010541	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010542	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010543	0.294005031	0.299088804	0.379443791	0.592313594	0.819488915	0.249366732	1.162767288	1.158952588	1.031986188	3.602546358	3.336747983	3.908225165	0.113884986	0.347090842	0.352983396
Zm00001d010544	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010545	0	0	0	0	0	0	0	0	0	0	0	0	0	0.010931354	0.011528674
Zm00001d010546	3.399042762	3.600815819	2.747950635	4.011206117	3.610081735	4.300236718	3.870723204	3.600673799	4.055114864	2.570097783	2.454900745	2.028167338	3.022093558	3.080379434	3.135504853
Zm00001d010547	2.416168858	1.752713919	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010550	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010551	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010553	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010554	0.143907725	0.018125231	0	0.035895094	0	0.088153327	0.033631236	0	0	9.54652623	0.072588903	0	0.016103737	0	0
Zm00001d010555	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010556	7.840164726	7.467821498	6.793609255	8.179293666	7.764787058	8.298789963	7.725740178	7.817872781	7.990946187	4.094539875	5.510839707	2.584702579	5.80437956	5.335425187	5.703407694
Zm00001d010558	0	0.0034124	0.016835761	0.168947383	0.010709784	0.049789335	0.088643566	0.032668245	0.080192262	0	0.006833081	0	0.400199874	0.614800941	0.538763313
Zm00001d010560	4.694901795	6.434015024	8.221816858	7.917932552	3.216132398	5.032909949	2.867678047	2.621421058	3.668170076	0	0.605497683	0.073874988	0.71641989	0.687203585	0.771015223
Zm00001d010563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010564	10.74942045	11.1798528	10.31915211	5.274844829	4.76192376	5.223787298	5.022426998	4.370355869	4.945724078	1.031098085	3.244759053	1.474930193	3.636177041	3.342003333	3.347472469
Zm00001d010565	0.189878249	0	0.078660416	1.105103604	0.917372313	2.481352909	0.517703049	0.763166492	0.858632653	0.174582273	0.478885127	0.350564179	2.408105052	1.873360837	1.756201341
Zm00001d010566	43.7581764	34.26617913	51.71343648	59.52677766	108.3975943	56.72149985	64.994879	79.77050093	73.20198612	6.841361192	22.72136766	3.587818925	28.67047415	27.05861838	39.96781406
Zm00001d010567	2.272202943	2.515627019	2.405948693	5.499819506	4.508280622	4.782907251	4.742903462	2.877276432	4.165516269	0.778394203	1.744268652	0.492394572	3.648745019	3.667379333	3.911727179
Zm00001d010568	0	0	0	0	0	0	0	0	0	0.134007715	0	0	0.043492679	0	0
Zm00001d010569	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010570	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010572	17.90368745	18.50934983	15.61813253	10.22670113	7.535073684	11.96468849	9.861656717	7.844120728	9.817431084	13.53339693	9.281870387	15.81755163	10.34869842	10.64391369	9.507356968
Zm00001d010573	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010574	5.343124174	5.13185451	5.100904676	10.10725136	13.72671585	8.795122879	11.03937968	15.13469129	11.32004382	5.392991263	7.942383027	4.397819966	4.759919953	4.057585045	4.762449925
Zm00001d010575	2.0594487	2.31793823	0.980229794	0.437183843	1.096997661	0.590514274	0.665618206	0.369842223	0.216159269	1.14821418	0.221023905	0	0.686473386	0.096069787	0.658575503
Zm00001d010576	1.052735142	0.947088434	1.370644349	3.349300004	3.010172954	2.658453136	3.464422471	2.711419809	3.082392679	8.355805721	4.298677601	4.236299069	2.852951131	2.268837222	2.276898019
Zm00001d010577	0.700284918	0.710874896	1.000214091	2.91990677	2.960993204	2.829937463	2.149519345	2.167672898	2.333131928	0.418036452	1.502557005	0.439974125	2.549758291	2.314488619	2.308035249
Zm00001d010578	0.347008215	0.212925756	0.348327672	0.83225691	1.699973425	1.291748883	1.840251311	1.561002051	1.399091397	4.644695188	1.638151792	1.995922834	1.807150523	1.536241233	1.568751279
Zm00001d010579	0.961620691	0.663951798	0.4391651	2.470829704	5.434688859	2.157515326	8.285254417	11.41334891	16.71753805	58.43416629	83.08738124	99.70259142	2.158651299	1.5431413	3.850992347
Zm00001d010581	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010583	12.3371769	11.51760943	11.93171568	28.72505686	38.94238166	24.32046626	35.02739478	37.56077605	36.28014289	30.49176227	51.15883084	28.0404562	20.52991371	18.9992225	20.80197785
Zm00001d010584	0	0	0	0	0.014717203	0	0	0	0	1.417197275	1.225382531	0.482541281	0	0	0
Zm00001d010585	17.17337424	20.06890731	15.95905777	12.77699174	4.005298801	14.6641972	4.63256985	3.962287643	2.91680176	4.709800893	1.816231921	3.144756034	26.28788781	29.69954703	28.41277667
Zm00001d010586	0	0	0	0	0.125270211	0.163065264	0.244399453	0.710731965	0.023449823	0.524475257	1.822294448	0.589766941	0	0	0.131898293
Zm00001d010587	0	0	0	0	0	0	0	0	0	0	0	0	0.556843765	0.057421022	0.181676001
Zm00001d010588	0	0	0	0	0.029470522	0	0	0.026968337	0	0	0	0	0	0	0.006464545
Zm00001d010589	18.15899422	17.40484672	16.94062822	15.40204257	14.51361732	14.88355167	13.38813617	13.31369783	12.66599981	7.271805688	11.53835883	7.661358225	9.195644474	8.942126706	9.167060778
Zm00001d010590	9.739272711	10.68612246	10.78702649	17.47620677	15.82757494	15.10069639	13.34359149	13.10513703	13.00857725	5.422822751	9.872701644	6.711096234	9.361682659	9.889358179	11.07454655
Zm00001d010591	0	0	0	0	0	0	0	0	0	0	0	0	0.067993554	0	0
Zm00001d010592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010594	2.661333537	3.948883721	3.896522344	3.796504495	7.75796746	5.449050988	7.454923909	10.17636727	8.969745033	38.08686868	24.3197023	31.50029483	2.77413702	2.317971809	2.760748508
Zm00001d010595	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010596	0	0	0	0	0.048424345	0	0	0.088625786	0	0	0.023171861	0	0	0	0
Zm00001d010599	4.62881101	4.46455615	4.518897195	6.496990782	6.085762274	5.178451605	8.158221601	6.957032087	6.196843913	1.817169688	5.184247962	1.488799318	10.93435104	11.13890228	10.17496218
Zm00001d010601	0.022094924	0	0	0	0	0	0	0	0	0	0	0	0	0	0.006386187
Zm00001d010602	17.5684635	19.81609938	13.41996519	9.695194641	9.917130559	9.608225121	12.79432642	12.03385788	11.17246732	25.7749792	21.67767789	30.73036072	9.591398457	9.915908947	10.47363515
Zm00001d010603	7.16112253	5.827508457	7.960755116	15.58582706	18.65720834	13.41639666	16.5046147	18.16647747	16.81741171	16.11323122	15.61263246	6.194254404	10.61532023	12.34888879	12.94302468
Zm00001d010604	3.204990339	2.806465666	3.203397126	5.908977259	7.454009516	6.04564308	6.146606824	6.342668952	6.194563745	3.648427358	4.499215465	2.975525436	3.745886529	4.149185204	3.979880737
Zm00001d010606	89.60383082	103.8985783	71.23383358	44.91500578	21.95979509	35.41089687	26.35599537	17.65755174	21.96348973	2.512794237	5.509479115	2.362530308	46.40070216	39.8406643	31.98800391
Zm00001d010607	23.69519519	22.88764113	25.34588683	18.28525286	27.81644953	18.86989975	20.29312326	22.86263434	23.08626823	8.894442446	14.83359373	5.342449432	9.865672539	9.64703602	10.09040064
Zm00001d010608	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010609	0	0	0	0	0	0	0	0.03323467	0	0	0	0	0	0	0
Zm00001d010610	0.088774246	0.111811492	0.008486838	0.076649115	0.089979302	0.301183195	0.303218683	0.271720817	0.202122953	0	0.060279247	0.068081595	0.129907765	0.329382125	0.30790543
Zm00001d010611	0	0.004872374	0	0	0.056070294	0	0	0.004664515	0	0	0	0	0.125539882	0.063611573	0.10733998
Zm00001d010612	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010613	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010614	30.76027632	22.51931813	37.21828686	62.22886463	108.9298791	53.50804276	70.04607166	83.15568761	68.34643181	7.066660492	26.83509703	4.170372132	31.09347506	25.7345542	42.38114168
Zm00001d010615	8.313705345	9.575799897	7.240150055	10.49823396	10.28057749	10.06859687	10.3020984	12.68995372	12.66937302	9.361683789	14.26634323	9.737725891	7.343691919	7.013520852	7.617258828
Zm00001d010616	0	0	0.014194361	0.014244085	0	0	0.026691457	0.027542851	0.253540195	0.031503568	0.115220482	0.01265194	0	0.012520373	0
Zm00001d010617	0	0.110732924	0	0.109647395	0.130325327	0.026927865	0.128415088	0.159013468	0.135533947	0.303133207	0	0.012173933	0	0	0.012705637
Zm00001d010618	182.2550136	166.0985814	188.4240603	56.37071586	69.3652503	51.6345492	87.97420118	90.01787472	84.07929	176.6046587	171.3581782	207.2377284	53.10012046	50.57248992	54.57531057
Zm00001d010619	1.157030933	0.790001728	1.104959851	2.491071591	3.594747277	2.708211566	3.045536844	3.458418985	3.026614907	1.259791903	2.242334279	2.745549939	1.655923202	1.181594185	1.330645203
Zm00001d010620	0.631634086	0.902638128	0.618939707	1.469450448	1.296421468	1.376539069	1.149677293	1.083825252	0.621685966	0.142395848	0.20678647	0.060550579	0.8971162	1.105207993	1.221773123
Zm00001d010621	0.029463866	0	0	0.220476335	0	0.216583605	0	0	0.072674237	0	0	0	0.890217334	0.322993248	0.647220753
Zm00001d010622	3.408536075	3.554974485	3.166732605	5.652552252	4.882214453	5.202863889	2.973070577	3.090265272	2.918326064	0.404106336	1.510709783	0.18488789	4.39117353	4.431824878	4.764041565
Zm00001d010623	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010624	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010625	1.9001454	1.752795612	2.234007129	3.537979787	2.356788381	2.694069215	2.199471841	1.683398375	2.282895773	2.626765449	2.969869004	2.752174711	3.359192163	3.310317225	3.315868568
Zm00001d010627	0.361354201	0.252848307	0.024949559	0.475702244	0.132260325	0.6394676	1.548222083	1.258720417	1.237916519	0.138435283	0	0.622676109	7.885155595	9.617135811	7.427106993
Zm00001d010628	0	0	0.037260197	0	0	0	0	0	0	0	0	0	0	0	0.034661869
Zm00001d010629	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010630	0	0	0.006994916	0	0	0.096536785	0	0.006786495	0.013882604	0	0	0	0.006298291	0	0
Zm00001d010631	107.1051417	95.06958429	116.8922379	103.1449166	138.979631	89.48096956	98.59217551	120.8356196	100.1577249	23.63526554	48.84628298	7.388618106	49.46531084	41.82703833	53.54817543
Zm00001d010632	12.58270113	13.10593646	5.250821585	18.61482785	25.62294814	24.43429398	40.96112038	64.24687759	42.57199922	170.9407837	122.540306	49.66373173	70.81514929	62.1723208	99.10094855
Zm00001d010633	1.103667322	0.851980272	0.486711321	1.864862331	0.8913106	1.482996074	1.747247791	1.502484031	2.502719038	0.196405057	0.089790961	0	1.474079012	1.287935576	0.699736472
Zm00001d010634	2.115874896	1.745356058	1.99998929	5.8537368	3.975810253	4.791986033	5.623839056	2.012264171	2.692154734	5.959582333	4.021069232	5.199430346	12.4472669	11.63831801	7.881372231
Zm00001d010635	6.740981156	7.096636079	5.808305188	9.242317862	16.78607486	12.25415738	14.3926646	12.18335568	15.13667368	16.74651171	15.01832718	14.5476294	7.820344918	6.591676471	7.79349413
Zm00001d010637	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010638	10.68567074	9.400819677	11.15488408	8.389579101	9.87214103	10.2092153	8.313097596	7.040329556	9.566280082	3.557279708	7.422553997	2.836299206	6.523293153	5.779324657	5.144808213
Zm00001d010639	9.194177613	8.3797677	9.272206355	11.92150989	16.52262946	11.16481488	13.74892466	15.4318008	15.85302714	11.12373746	16.0997139	11.81848181	6.41945987	6.005007966	5.623048307
Zm00001d010640	21.30915334	22.84544996	23.67523403	31.29866866	20.85547874	27.53777499	23.71475795	18.75970725	19.0134911	27.10500439	25.22038405	27.68647257	14.00571456	12.86198539	15.33089565
Zm00001d010644	8.514364067	6.95089292	8.207983007	8.261810261	8.530090792	6.293240089	6.155010706	7.551307977	7.326845581	5.309868486	8.556550435	6.180240254	3.183448219	2.68882379	3.114674731
Zm00001d010645	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010646	13.12689689	12.85929183	13.13978274	13.48173208	14.62993641	13.67974039	12.37866385	14.28815967	14.18375554	3.821025798	7.524290054	3.331916567	9.129149899	10.18251465	9.859470316
Zm00001d010648	0	0	0	0	0	0	0	0	0	0.019026121	0	0	0	0	0
Zm00001d010649	1.0197657	1.204123756	2.138683186	1.351295515	3.44320797	2.850085422	5.175996121	1.882833135	2.318799433	74.62842787	12.33715251	8.437074664	4.635924165	6.812221227	5.379134177
Zm00001d010650	107.810871	91.38137435	108.2532919	197.6722912	311.1867345	221.3138249	234.5778689	279.656336	251.8217563	300.6858054	310.5191983	223.091663	154.1932777	136.3280834	168.1331705
Zm00001d010651	9.498487824	8.09084119	9.041209208	7.497966275	9.151617774	5.751208022	5.741959465	6.818846631	5.789422354	1.438726202	3.288729187	1.186005076	2.181118538	1.7454607	2.126484756
Zm00001d010652	0.559914017	0.411374703	0.966476095	1.454792652	1.946890047	2.381844729	0.399825271	0.450085904	0.517896952	0.042900763	0.078452171	0.223978206	0.643966258	0.221649064	0.287705339
Zm00001d010653	2.471920524	2.626263523	5.036588673	10.12943672	9.062321327	10.11540452	12.90955458	14.01072299	10.39000236	0.672560491	3.774533697	1.117665868	10.50011163	12.27708062	11.43150984
Zm00001d010654	9.050509607	10.3249688	8.985744005	22.65418289	24.58874616	25.99702353	29.12358542	30.06790708	28.76005114	13.92171712	21.67022084	14.27011637	15.07063839	13.68913953	16.07071395
Zm00001d010655	0	0	0	0	0	0	0.044467187	0.298256299	0.516255123	0.091847041	0.743821575	0.284549797	0	0.020858576	0
Zm00001d010656	0	0	0.009476101	0	0.010046769	0	0	0.018387503	0.009403471	0	0	0	0	0	0
Zm00001d010657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010658	0.055015026	0.02309721	0.011395473	0	0.036245184	0	0.053570882	0	0.011308131	0	0	0.030471574	0	0	0
Zm00001d010659	0.025258631	0.039766674	0	0	0.033281952	0	0.007378678	0	0	0	0	0	0	0.103835243	0.007300606
Zm00001d010661	4.06363641	4.021415432	3.895945167	5.755789834	6.807784346	7.5388875	2.67943125	3.219882065	3.472316413	0.040031604	0.366026849	0.032153657	5.034554587	4.518339514	4.127632451
Zm00001d010662	556.5111888	637.2971058	541.6203045	172.1126371	101.7517372	141.8802145	87.30012935	69.42634601	89.78207105	126.9106238	105.8759635	124.6806541	92.25383966	80.30388497	64.40599612
Zm00001d010666	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010667	0.232503978	0.14641981	0.03852755	0.328631392	0.459537151	0.731112911	0.479969591	0.411175416	0.410996706	0.138953238	0.136824322	0.01717049	0.390269126	0.229391123	0.546572866
Zm00001d010670	0.150521005	0.189581763	0.178934559	0.620302973	1.698769601	0.56926203	0.726476549	0.718085235	0.790962879	0.216619077	0.544677387	0.391477317	0.358845829	0.286967673	0.476671211
Zm00001d010671	0	0	0	0.253429445	2.841161486	1.618206821	11.37102349	23.14077092	7.044900112	1.214435234	0.113888453	0.275124852	0.707447387	0.556903304	3.993871588
Zm00001d010672	7.720350126	8.781939868	9.961390189	56.53615654	19.94292107	42.02767594	14.94102624	12.56014474	11.05409859	0	0.013281868	0.023334935	194.2962963	238.2891893	207.3021145
Zm00001d010673	0.27681793	0.236184431	0.188661689	0.222732461	0.494175027	0.754859646	0.563449507	0.559888049	0.572659697	1.773418361	0.675631532	0.514374507	1.069199754	1.008262136	0.681374002
Zm00001d010675	1.44124454	1.172134685	1.136121761	0.873050868	2.105233812	0.988804186	1.443509363	1.588857467	1.472747792	1.431153959	1.516277246	1.030912105	1.01375932	1.525773405	0.866463192
Zm00001d010676	0.243339115	0	0.109971843	0.882856693	0.408080888	0.569145267	0.775477522	0.666844507	0.163693427	0	0.55792442	0	2.450738551	1.867298181	2.071635562
Zm00001d010678	0.495071262	0.77799996	0.39513139	2.163842158	2.669162765	2.359346188	4.065357177	4.008829913	3.590541907	6.044838702	5.355240326	5.247701174	2.526039609	2.658803155	3.029884905
Zm00001d010679	3.178702537	3.861867693	3.962154264	4.326860671	4.163696559	3.974759752	4.196407785	3.572749799	4.082118873	1.474250305	3.015202653	1.391869628	2.046102332	3.022047112	3.002887478
Zm00001d010680	0.021944196	0	0	0.218942791	0.520464549	0.053769285	0.461552271	0.37043587	0.270632793	0.030264664	0.6364637	0.340322978	0.02455626	0.240559979	0.659632606
Zm00001d010681	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010682	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010684	2.496878643	2.387426743	1.53261482	1.104427493	1.097739461	1.066995034	0.734032925	0.726560647	0.731099712	0.11102984	0.447608904	0.118906565	0.843549584	0.759506749	0.685369795
Zm00001d010687	0	0	0	0	0	0.043685791	0.008333248	0	0	0	0	0	0	0.007817886	0.016490153
Zm00001d010689	0	0.047731032	0.011774532	2.315892791	2.40933768	3.91161298	2.944772438	2.970161482	2.371909818	0	0.083630667	0.010495061	1.346442008	1.786378733	2.22354806
Zm00001d010690	0	0.047731032	0	1.595130239	1.148492573	2.216967594	4.649640692	5.072121915	3.318336889	0.143730936	0	0	12.28760856	15.85930422	17.64598977
Zm00001d010692	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010693	2.698630343	2.467247163	2.894198856	12.36906112	11.49782213	16.2959993	9.283973377	9.497522875	9.224239434	12.05352399	7.065235083	10.51608232	2.284052016	2.462774969	2.296435621
Zm00001d010695	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010696	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010697	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010698	0.03514456	0.162303913	0.014559254	0.306815396	1.204010963	0.889842496	1.012971666	1.63855181	1.054679416	0.177723856	0.192046478	0.168703378	3.644384601	4.148041477	6.17604996
Zm00001d010699	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010700	0.05834097	0.17145489	0.060421941	0.248597783	0.582951965	0.148907647	1.329342762	1.313124024	1.456999569	1.220337539	1.342649482	0.366222379	0.750782313	0.778124274	0.859989063
Zm00001d010701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.658575503
Zm00001d010702	13.42895889	17.59676989	18.30975505	58.96337232	52.26298571	69.47002907	73.75386746	65.2837734	74.79767399	17.47060275	20.55690182	20.84427981	25.53631341	27.77316725	32.94544794
Zm00001d010703	0	0	0	0.067111974	0.291499097	0.106215795	0.199117801	0.295587249	0.372381964	0.387570355	0.640887159	0.195389892	0.080289787	0.242516863	0.100233665
Zm00001d010704	0.20031112	0.441512044	0.031118406	0.062454835	0.428901341	0.981634118	1.053285953	1.268030479	0.463198434	6.215896314	0.631496871	0.665686704	1.765217278	0.796006803	1.360573566
Zm00001d010705	0.706181575	0.375231785	0.411395878	2.13299139	3.896459642	3.379566613	3.274906041	2.714137877	3.538103292	1.065247768	1.071404013	0.440030194	2.284287089	1.693433525	1.951807301
Zm00001d010706	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010707	0	0.047435178	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010708	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010709	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010710	4.113336245	4.566135431	4.217454774	7.293891056	7.582966327	7.133041229	8.022374354	7.232213223	6.901428614	8.558447063	9.763440813	8.075479819	5.6469893	5.074881218	5.430005459
Zm00001d010711	12.09045238	13.0096862	12.23613847	11.96392597	12.43089241	10.75340268	11.15876942	11.59303895	11.83078256	7.96404878	10.49501788	6.924512459	8.868958617	7.738740861	8.987782259
Zm00001d010712	0	0	0	0.010088858	0	0	0	0	0	0.011156737	0	0	0	0	0
Zm00001d010713	2.345198372	3.423186133	3.366498423	5.895005546	4.719055448	4.476829201	4.875299308	5.129453081	5.123147147	2.58251756	3.473190803	0.906245696	3.946700333	2.521065382	3.236828535
Zm00001d010714	8.08610982	7.624139788	8.186543169	9.009086461	8.598383211	9.07642967	4.386002094	3.882176822	4.517722232	0.504080747	0.688765993	0.21381361	2.692985927	2.998277723	2.881984958
Zm00001d010715	95.55872716	105.7305158	142.6568736	407.7084483	158.5430045	332.6074003	222.2230608	170.386961	163.6003325	0.744271795	0.504089608	0.24354985	571.3247875	508.4586151	480.8525487
Zm00001d010716	15.7580174	16.71448338	15.48906472	11.91291711	11.37214272	13.41101839	11.77022288	11.50568721	11.82709681	14.96524128	14.71021481	15.2283659	11.16310864	11.36394146	10.78240712
Zm00001d010717	0	0	0	0	0	0.047447966	0	0	0	0	0	0.007150318	0	0	0
Zm00001d010718	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010719	5.470598223	5.937836927	4.857674221	4.454717797	3.587320631	4.586028042	4.667378686	3.431379157	4.368062082	0.89775296	1.454033003	0.496263801	3.625288619	3.553082002	3.698566976
Zm00001d010720	18.50456234	16.74088633	16.11792318	10.78555402	17.01771758	12.38164673	13.77192098	15.06556342	15.39752188	22.02208744	22.25386499	25.7860799	10.82791848	10.08025905	9.34378756
Zm00001d010721	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010722	0.075479552	0.059416735	0.304870182	0.011766853	0.21134269	0	0.088197858	0.056881975	0.290897567	1.743654006	2.046415947	3.490835348	0.063348032	0.031028751	0.207253574
Zm00001d010723	6.370365544	7.044709374	3.748871861	13.5942267	15.53476167	14.90760452	17.28914664	18.59272214	18.82768252	108.7716767	97.30143465	123.2731534	8.856452881	9.449473064	10.332296
Zm00001d010724	12.94525551	14.68132919	12.11445493	13.43870789	12.97298603	12.44192691	12.06691144	12.31411938	13.87262727	40.93850136	43.54197301	72.79419151	10.65239114	10.97190333	10.44918841
Zm00001d010725	0.658401358	1.237965143	0.619542096	2.827031952	2.726555482	1.982009444	2.648734575	2.409999448	2.847770103	7.874038865	10.38424592	17.21259263	1.220936891	1.9745365	1.527840795
Zm00001d010726	0.642272735	0.38521185	1.102301662	0.152574227	1.57167874	0.824342074	1.215088269	1.253846693	0.754381342	20.28903785	10.56761274	14.94109235	0.205349661	0.100583132	0.459676861
Zm00001d010727	3.104023974	3.474085698	2.606042486	4.452353324	3.594848734	5.137996554	2.880564331	2.773076	3.281247796	0.072558658	0.028432982	0	2.876362844	2.53763667	2.928289537
Zm00001d010728	0.323962889	0.204016229	0.429463501	2.787823986	1.522498126	2.487232892	1.413255717	0.546875704	0.78575431	0.014893274	0.108940692	0.047849518	1.160079602	1.49158588	0.861454212
Zm00001d010730	5.844947836	5.198964285	4.268182548	12.95236336	11.46534093	19.05517207	16.32211601	8.859367536	12.05479518	0.660376424	1.124338994	0.329225489	8.942630527	8.000246281	6.948448784
Zm00001d010731	2.586057001	1.839007924	2.834784285	3.515125354	5.714278549	5.784769335	2.58890822	2.478790718	2.714510185	0.841557057	1.135889058	0.965634804	1.064883112	0.342420897	0.965817422
Zm00001d010732	1.513600898	0.937818886	1.107426279	0.715498201	0.723771013	0.508455797	0.62758288	0.48570096	0.270971084	0.488206856	0.461782087	0.81130567	0.163913033	0.147192637	0.8326276
Zm00001d010733	41.57936416	39.09690752	43.3652567	50.97612391	65.48970549	56.31321413	61.91641824	60.68035765	60.44199057	109.938621	98.20551404	100.3710714	47.95110292	45.86642266	47.97589354
Zm00001d010734	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010735	0	0	0	0.043384656	0.160428746	0.191783956	0	0	0.02145092	0.023988404	0.10966835	0	0.019463804	0	0.201091757
Zm00001d010736	0	0	0	0	0.027607443	0	0	0	0	0	0	0	0	0	0
Zm00001d010737	0	0	0	0	0	0	0	0	0	0.086292382	0	0	0	0	0
Zm00001d010738	0	0.117669497	0	0	0	0	0	0	0	0.028633084	0	0	0	0	0
Zm00001d010739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010740	1.625999653	1.562911179	1.302882376	0.13341291	0.225525588	0.157268846	0	0.051594354	0.026385638	0.29506863	0.836362757	0.402901929	1.125245443	0.633248734	0.519439833
Zm00001d010741	0	0	0	0	0	0	0	0	0	0.034157401	0	0	0	0	0
Zm00001d010742	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010743	0.205515281	0.191321886	0.455304993	0.156014626	1.200923755	0.175154323	1.106753409	1.400634973	0.837511208	2.464690913	0.65353735	0.237558785	0.739929857	0.793423413	1.787193129
Zm00001d010744	23.49921139	24.77629278	22.67348532	29.18462677	31.32488978	26.93295935	41.8259068	42.73593755	40.50201498	30.60441117	43.2072883	30.47783481	28.20652021	23.39610084	25.70911316
Zm00001d010749	0.288828886	1.212603501	0.179478695	0	0	0	0	0.077391532	0	0	0	0	0	0	0
Zm00001d010750	0.11370828	0.066099692	0.010870537	0.010908618	0.0576259	0	0	0	0.053936094	0	0	0.038757191	0.068515578	0	0.010112484
Zm00001d010751	36.54370171	29.53912426	29.20155197	1.031698178	5.7751429	3.538298615	9.242341971	11.30458595	5.60224246	9.487490149	9.754615521	5.482198543	0.373531469	0.238644693	0.553706792
Zm00001d010752	0.454662596	0.572649222	0.662479463	0.625694308	0.516452303	0.672270212	1.062546494	0.396986606	0.715407856	0.021622575	0.079081948	0.0173674	0.087721042	0.343735933	0.199385244
Zm00001d010753	0	0	0	0	0.034509303	0	0	0	0	0	0	0	0	0	0.060558667
Zm00001d010754	0.068375163	0.167453165	0.207721197	1.345442692	0.925969275	1.265841606	1.62455969	1.167969168	1.24145932	0.005238923	0.009580364	0	2.839519653	2.44853831	2.53402433
Zm00001d010755	10.30606601	9.380987279	8.231258493	5.240146024	3.563928731	7.298137665	2.934610204	1.548730029	1.388116595	0.118800035	0.062760638	0.053011665	18.95503594	19.94964042	12.72741882
Zm00001d010756	0.544868019	1.154170071	0.461702439	1.266407546	2.186464446	0.940621551	1.186536802	1.732056125	1.130137049	0.785620229	0.406011304	0.493838234	0.637439573	0.733054241	1.002180113
Zm00001d010758	0.545864338	0.568624037	0.321348224	0.952065926	1.665646277	0.799493248	2.474637005	1.92012781	1.963927986	0.198114978	0.191496544	0.022732472	1.938153105	1.439748947	1.447244876
Zm00001d010759	15.6507791	16.72551507	13.4285075	10.18381188	39.50550091	14.52601957	37.75651508	46.19609078	35.57727265	35.03652929	29.27916669	16.10374453	5.584086031	4.860000966	8.53466172
Zm00001d010762	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010763	0.047902011	0.012066552	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010764	0	0	0	0	0	0	0	0	0	0.07327028	0	0	0	0	0
Zm00001d010765	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010768	0.298498557	0.195499219	0.059355982	0	0.094395754	0	0.041855468	0.05758741	0	0.164671489	0	0	0	0.052355936	0
Zm00001d010770	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010771	0.074098829	0.046663875	0	2.171701855	1.220450971	1.043983846	2.164612053	0.759443729	1.736303723	0	0.093441	0	1.782757829	2.802425968	1.713367162
Zm00001d010772	0	0.041929309	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010773	0	0	0	0	0	0	0	0	0	0	0	0	0	0.003788394	0
Zm00001d010774	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010775	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010776	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010777	0	0	0	0	0	0	0	0	0	0.251398473	0	0	0	0	0
Zm00001d010778	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010779	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010780	0	0	0	0	0	0	0	0	0	0	0	0	0.012964873	0	0
Zm00001d010782	0.204688844	0.191275684	0.13129698	0.452914438	0.47851345	0.46109661	0.474500107	0.457789318	0.671811107	0.091064407	0.112406748	0.029257421	0.262303075	0.184576484	0.267183493
Zm00001d010783	8.375278274	8.088841162	9.57492357	5.917499803	9.583182114	7.765373269	6.91636236	8.018264597	8.378492408	7.535344243	11.84579652	9.58302976	4.210117984	3.257447766	4.363567749
Zm00001d010784	1.679338423	2.234295378	2.077288206	4.690271647	3.199693051	3.84437981	3.998315591	3.184701693	3.140667028	2.816271823	2.366255923	1.484742403	3.211460269	3.258394628	2.907758968
Zm00001d010785	0	0	0	0.44316447	0.640711716	0.469708904	0.72116227	0.326981868	0.172986556	0.012896638	0.047167892	0.062152008	0.313923729	0.3382813	0.216221779
Zm00001d010786	0.639411831	0.613593575	0.113523272	0.037973652	0.040119947	0.149212758	0.035578701	0.036713577	0.262857374	0	0.307169079	0	0.272579951	0.233648568	0.704045081
Zm00001d010787	0	0.032427438	0.127989829	0	0	0	0	0	0	0	0	0	0	0.028223892	0
Zm00001d010788	0.720486636	1.519988104	0.425325883	2.156543227	2.420834448	2.184669409	2.420429841	4.148247271	2.221399604	3.502686236	2.089680555	2.115024356	0.947341025	1.322953108	1.915856008
Zm00001d010789	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010790	2.091764104	2.026270512	1.743068921	4.330065774	4.633687459	4.234662399	5.239923258	4.90345505	5.044984502	1.147317648	1.818487099	0.934861316	3.000469902	2.781071759	3.386108092
Zm00001d010791	194.7036331	150.5139153	256.3487367	72.521137	50.61502023	79.5128637	28.32494866	12.92322911	22.59892294	0.128090255	0.152254239	0.020576593	102.9742058	108.3698519	107.0435737
Zm00001d010792	1.541364609	2.110167857	4.91396243	11.70109698	9.536747469	12.72605628	8.45726662	7.595751202	7.273123645	1.756092276	1.859201082	0.593896961	3.374680091	4.334442722	5.810960319
Zm00001d010793	0.304831567	0.430474243	0.424766244	0.334091167	0.109543721	0.169754718	0.097144279	0.222762111	0.091137422	1.121101299	0.396050943	0.532099575	0.186063443	0.121515298	0.277669671
Zm00001d010795	0.197148575	0.094186309	0.059141993	0.110219895	1.155538273	0.341479074	0.746710429	0.950865222	0.469509541	0.206269259	0.248610678	0.052715369	0.471660907	0.275740829	0.345825823
Zm00001d010796	26.7477942	23.35283346	26.70737208	27.94853855	46.24711193	32.14084834	38.80334707	39.49009206	42.03525788	28.48089158	28.89887556	18.00821219	15.96400864	14.36243309	14.80709317
Zm00001d010797	0	0	0.018836641	0	0.379449302	0	0.070841849	0.694464586	0.448614359	0.334454731	0.152903455	0.436534019	0	0	0
Zm00001d010798	15.62242137	16.90974436	14.42117531	7.719311319	3.711739773	6.316544161	5.239384141	5.764864464	3.999968026	6.62950605	2.199793685	1.316901958	9.93393542	7.521773948	5.572370418
Zm00001d010799	19.56821629	24.61973379	19.13540542	23.90593401	12.15713457	22.46281391	11.04172074	9.546536114	10.55333742	1.741522674	4.676207111	1.907034593	29.40072275	33.84507818	29.21252766
Zm00001d010800	0.58716197	0.342171834	0.642595087	0.699494149	4.030022987	1.524600489	5.253263689	6.604325411	4.950047264	1.716278038	1.171426696	0.854297937	0.617826047	0.528383826	1.347546798
Zm00001d010801	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010802	1.235474473	1.900464064	0.818068322	1.376643346	1.174236561	0.893287047	0.662659903	1.160013068	0.924200964	0.237431891	1.021621605	0.639429062	5.371490799	6.12797145	7.165301471
Zm00001d010803	3.756861317	2.945091741	4.572170288	8.126534792	10.84528637	6.684374284	8.287971279	10.63873234	9.151153188	5.030836036	9.573334151	5.456809253	4.622708874	5.263353596	5.857341987
Zm00001d010804	22.59083677	22.37383676	24.02187726	22.61000789	28.15313796	23.58828798	29.10449602	31.47492103	27.79452654	27.77860944	38.68809841	36.54402933	18.50811977	15.92503911	19.48610723
Zm00001d010805	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.064579416
Zm00001d010806	8.277359173	7.370927385	7.008229022	6.487705968	7.282794937	6.699652854	6.857035275	6.870105093	6.763888991	6.858326767	8.623292887	7.108703512	4.544832322	3.99650312	4.504502387
Zm00001d010808	5.535956842	4.111060258	5.770409351	6.619623287	9.359884712	8.569040751	7.674413686	7.189493564	7.708321108	2.763923707	4.26617839	2.121091361	3.852392425	4.034931034	3.55573421
Zm00001d010809	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010811	7.03732369	9.410720647	6.757693485	10.359107	8.123272413	10.079049	8.142533536	7.375364162	7.764724436	3.195582105	5.382837919	3.762221167	7.697504853	7.106014374	7.330867187
Zm00001d010812	5.316590969	3.64787062	3.184173621	0.783044839	11.64896043	2.506166438	10.88655555	8.474200726	7.168802073	6.773792193	3.396891836	4.812545044	0.453290363	0.122115373	0.433196331
Zm00001d010813	0	0	0	0.065746156	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010814	1.737590882	2.064624666	5.296845248	2.330598761	13.04600626	2.932102268	91.97981658	108.0775522	59.11256215	10795.66537	7211.637933	16810.83457	7.814367136	3.629917402	162.4549413
Zm00001d010815	0	0	0	0	0	0	0	0	0	0.107435245	0	0.201349682	0	0	0
Zm00001d010816	0.740124019	0.712404557	0.912350031	1.545922094	1.823585808	1.761902544	2.524192986	2.967481539	2.953542408	2.232378607	3.346294137	4.006059807	0.935958809	1.154359671	1.767023004
Zm00001d010817	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.016120155
Zm00001d010819	1.228874959	3.031054593	2.036332555	16.34772843	16.19223041	12.10705057	7.598517949	6.112191859	10.22991957	0.918028132	3.293007841	0	5.84438979	6.286634121	6.748548973
Zm00001d010820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010821	4.529640722	4.354222226	4.31818557	14.08870998	11.98951795	14.83311209	13.58779235	10.15951294	12.68300018	4.15213406	4.887930954	3.716325676	20.82232824	22.92739372	20.76873901
Zm00001d010822	0.868198598	1.545479077	2.114839555	16.38606505	8.343420333	20.26630806	21.06081383	11.98992071	12.00644855	0.09579112	0.423332831	0.089763427	13.4331889	13.55291701	13.16927949
Zm00001d010823	4.726830285	4.927202644	5.523543436	5.542893021	6.441798945	6.431938991	7.28145294	6.257706796	7.588046786	5.982738808	6.305131645	6.425973167	4.512372783	4.587926033	3.586147676
Zm00001d010824	8.763611488	7.1151364	7.657521636	18.66438715	38.12399969	19.67279721	24.79723211	29.37603943	28.46651299	14.22483964	24.04060011	7.990374059	13.7747297	13.9966289	15.07319553
Zm00001d010825	9.402320363	8.065068634	8.07222252	15.11330112	29.07216657	17.81762741	19.22880485	23.00620268	19.74754635	7.945007706	10.37093141	4.245848142	8.903464877	7.975673895	11.00303873
Zm00001d010826	0	0	0	0	0.260441296	0	0.025662389	0.23832862	0.081255051	0.090866918	0.692364039	0.693356814	0	0	0.012695431
Zm00001d010827	0	0	0	0	0	0.248637589	0	0.444922975	0.045507215	0.356232654	0.069797023	0.183939747	0	0	0
Zm00001d010828	1.084136077	0.420145662	0.870606698	0.124808076	4.754368751	0.742438147	6.821300852	7.648920737	8.48163613	165.3157101	79.53193322	302.24694	0.031107259	0.036568247	0.649201716
Zm00001d010829	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010832	0	0	0	0	0	0	0	0	0	0.11813838	0	0	0	0.075122239	0
Zm00001d010834	10.23784091	10.67201665	9.708091355	7.87620966	8.991132079	8.324630037	7.799709937	8.534187593	7.699849435	8.108063699	10.11050634	6.390277143	6.455333337	6.034705693	6.408810506
Zm00001d010835	23.17015635	23.57196689	22.57948266	19.81688611	19.45559857	19.57748163	17.83646043	17.83997322	17.06802715	4.029672096	8.225704956	3.143422967	11.36963459	10.01761996	11.80917973
Zm00001d010837	0	0	0	0.017231096	0.16384508	0	0.016144353	0.016659319	0.025559004	0.057164888	0.017422804	0	0.046382667	0.007572959	0
Zm00001d010838	8.775774723	7.898500333	9.550608121	12.38829137	21.23909917	12.4950153	22.63748581	27.34053225	29.23955383	8.609656245	12.93288939	3.867542738	9.363859039	8.257868174	9.345282361
Zm00001d010840	0	0.008545394	0	0	0.071519033	0	0.079279588	0.032723367	0.058572189	53.08375452	11.86684475	27.3350287	0	0	0.007844075
Zm00001d010841	0	0	0	0	0	0	0	0	0	0	0	0	0.008081643	0	0.091845712
Zm00001d010842	4.661615237	4.296983594	4.916514414	5.855670339	6.924546445	5.28024418	5.098964833	5.534413873	5.602644246	0.580815742	1.04518268	0.245664899	2.356322589	2.276395866	2.369706381
Zm00001d010845	166.6319132	166.7865032	224.7648138	43.42893847	26.85513984	56.85078988	2.901177285	0.435794383	4.748050154	0	0.019815936	0.069629299	0.175845399	0.172263066	0.236178801
Zm00001d010849	0	0.027945312	0.016085278	0.479636913	0.54085422	0.396415759	0.820995137	0.954195508	0.720569876	0.334053286	0.557252858	0.485422814	0.999350761	1.023583687	1.002559624
Zm00001d010850	14.77827042	14.23714813	13.56765544	17.79871393	21.26513772	14.92715337	12.02398703	11.0887719	12.28754729	1.057713088	3.405924466	0.716587382	6.365689235	5.66577424	8.712472018
Zm00001d010851	7.086335091	7.62639489	6.784501668	10.77287551	10.11019895	11.54473052	13.7306211	11.82997847	13.54667896	10.36040074	9.783175748	9.369597943	12.03768239	11.99988091	10.54450023
Zm00001d010852	41.42714012	41.89910436	42.18328548	37.91363663	26.82361184	33.74018358	15.84144291	14.67635818	19.85504112	7.531741663	8.839759044	5.680421377	20.1805514	22.87098349	22.42634631
Zm00001d010854	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.005265094
Zm00001d010855	112.0737135	100.0314094	123.1046125	149.984616	293.8018474	180.1961833	282.3955291	292.6471327	274.2932357	445.7630393	265.8006445	498.2727106	101.2572002	101.5275271	124.965094
Zm00001d010856	0.217003713	0.060737107	0.179795236	0	0.254163758	0.26585924	0.056348631	0	0.148680979	0.199522598	0.182432429	0.186967562	0.026981569	0.132159495	0.027876212
Zm00001d010858	11.411663	11.27027258	10.38121039	14.34449777	15.78633646	14.48628546	14.65883841	16.07843295	16.93937399	16.06883581	17.13222755	12.6386959	16.43944055	16.12792785	16.0826742
Zm00001d010859	26.81107712	28.06448685	32.6304528	34.53713741	49.07661919	44.55091595	38.77990453	42.92932868	45.14482517	53.78306116	50.76013131	39.31917917	42.63862583	36.27567982	43.18672856
Zm00001d010860	1.477971235	1.396132679	5.740084377	0.921630805	0	0.226339623	0.215876175	0.668286333	0	1.273978749	0.931884572	0.613961048	0	0	0
Zm00001d010862	4.112846165	3.823329316	3.694419647	4.829265557	4.155918114	4.222432174	3.633594107	3.986072523	3.433262413	1.061959432	1.741259	0.344469887	2.680249576	2.808265799	3.423950624
Zm00001d010863	1.712686675	2.469653026	1.624603961	9.653460507	8.213489163	9.223514996	9.688148127	8.384493697	8.433943331	0.600952525	0.747900278	0.194416469	12.29843574	10.62151643	12.59427256
Zm00001d010866	2.168766414	2.759068344	2.184318295	3.108694802	2.680262361	3.481786584	2.525699533	2.658915122	2.167576339	1.219520142	2.124582726	1.358438525	3.298329862	3.071573798	3.336174866
Zm00001d010867	29.21437525	28.42454539	32.07311885	54.21079656	57.29330101	49.113609	43.74647657	46.81568528	48.0911142	26.72559153	40.67723945	17.93249033	43.81661555	44.15367389	46.84194254
Zm00001d010868	3.320455896	2.900592141	3.04947037	5.237770412	5.964158865	5.360748264	4.887859758	3.781565933	5.117512768	0.277192803	0.596663001	0.102044777	2.675489098	1.992131341	2.33819517
Zm00001d010869	7.183593488	7.611066821	6.801322922	8.878620872	9.545957142	9.283353098	8.989068916	9.509126504	10.50897982	9.139492542	12.235295	5.223623894	4.969084447	5.050212379	6.044437692
Zm00001d010870	2.231069425	0.38862258	1.666617554	2.308877172	27.95900618	4.434449046	25.50149752	33.04033931	31.36448479	74.15927616	40.91474806	58.04028182	0.013279991	0.091066152	0.301847105
Zm00001d010871	220.8094352	232.8373556	249.8902875	401.9169295	333.4696885	468.69971	416.2341656	401.3296877	344.1887792	33.20479318	62.26591667	27.13821645	604.72599	596.7898673	589.1449601
Zm00001d010872	18.31739763	18.15112446	22.48386735	32.69017535	43.20616669	32.66710433	33.12676714	37.75298564	36.12947785	10.88763312	19.4693809	6.900368229	26.8472294	20.86895802	32.03945063
Zm00001d010873	0.255537083	0.160924951	0	0.132789485	0.420884494	0.443512845	0.099531694	0.256766296	0.105049364	0	0	0.023589365	0.214465651	0.280128723	0.024619645
Zm00001d010874	0.380284671	0.886094408	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010875	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010876	0	0	0	0	0	0.066862803	0	0	0	0	0	0.030228288	0.030536027	0	0
Zm00001d010877	0.303938945	0.197091443	0.411395878	0.499157516	0.888202469	0.670997589	1.068974341	0.725705315	0.905556507	0.153561691	0.189740971	0.16001098	0.481552413	0.537720126	0.358353212
Zm00001d010879	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010880	3.7532761	3.242978722	4.744582022	13.06706247	15.41062247	11.27123778	7.44643794	7.42723249	8.024120179	0.273160239	2.510114292	0.394927498	5.258357011	4.554146302	7.45924416
Zm00001d010881	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010882	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010883	0	0	0	0	0	0	0	0	0	0	0.066307171	0	0	0	0
Zm00001d010884	2.084732222	1.510783166	2.115693935	1.469842232	5.279923407	1.938022186	2.227908295	2.94319105	2.034878637	0.375652891	0.336870917	0.290122079	0.10550724	0.143552555	0.060558667
Zm00001d010885	0.116103897	0.146233288	0.360735664	0.361999361	5.163207228	0.355607901	4.137855855	2.659902576	1.933042127	18.21437982	4.062898022	4.983816857	0	0.190915754	0
Zm00001d010886	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010887	25.41094298	26.00186688	23.80562129	12.91424982	17.80241996	15.26619927	17.42162337	16.92391643	17.6837765	5.450731277	8.343884611	3.168884786	10.48353018	10.12445527	10.01118744
Zm00001d010888	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010889	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010892	3.558906009	3.766489811	4.420495749	6.91729494	7.209287617	9.317233291	8.981397785	8.031675678	8.147284886	4.407126486	4.405970737	2.167979671	8.074108374	9.311721703	10.63735377
Zm00001d010894	0.449436589	0.494979557	0.322146876	0.969826177	0.749200141	0.850261754	0.840266653	0.741041665	0.832708964	0.689039393	0.688012944	0.511759377	0.874871193	0.87996399	0.69361897
Zm00001d010895	0	0	0.013813536	0	0	0	0	0.013401948	0.013707661	0	0	0	0.012437845	0	0
Zm00001d010896	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010898	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010899	25.5203308	27.18577625	22.99496163	12.03770562	8.122012908	11.78689878	7.421668346	6.478254724	7.255246757	2.541747701	2.809848454	1.63785293	11.5816896	11.33433244	10.09982965
Zm00001d010901	11.54299434	12.97101808	13.37061026	22.30243198	26.43854244	17.94234208	20.91692041	20.64898973	18.36184589	7.512104771	12.53188045	4.545309693	15.9544902	14.28499425	17.75547358
Zm00001d010902	0.61350768	0.661300444	0.620614424	1.309635257	1.932607421	1.216593192	2.444073363	2.790408127	2.998346982	10.6966351	5.509128089	8.408271945	2.966468944	3.140645845	4.061146871
Zm00001d010903	0	0	0	0.086111969	0.36391629	0.422957882	0	0.083254526	0.510921909	0	0	0	0.386327014	3.406110613	2.235165343
Zm00001d010904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010905	0	0	0	0	0	0	0	0	0	0	0.016465964	0	0	0	0
Zm00001d010906	0.009526992	0.095994256	0	0	0	0.093374953	0.011132291	0.045949537	0.011749424	0	0	0.021107139	0.085288082	0.083550588	0.154203045
Zm00001d010907	0	0	0	0	0	0	0	0	0.007698823	0.008609537	0.05510459	0	0.069856392	0.027373309	0.079389924
Zm00001d010908	22.97369887	24.61885752	27.53374578	33.41927238	31.51184234	33.46365863	32.3787501	36.78336348	39.5500005	32.29483485	53.86864022	38.1216815	41.37562317	43.49500038	41.82226582
Zm00001d010909	0.042195166	0	0	0	0	0	0	0	0	0	0	0	0.023608873	0	0
Zm00001d010910	7.684365128	7.793365464	9.584178267	15.29734868	15.50057464	12.31027669	11.86915455	14.26153372	13.60764446	11.90702381	11.46255349	6.510664819	8.762453726	8.393857103	9.253469416
Zm00001d010911	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010913	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010914	5.893701237	6.620942422	5.663549919	5.761704391	5.106289983	5.022541592	5.220123885	4.640292638	5.277179638	1.608356373	2.273761667	0.983787978	3.513446464	3.500873796	2.831356099
Zm00001d010915	15.75667638	15.67635015	16.55868408	13.36559928	12.41996511	11.52770172	10.43392801	13.2214437	11.21646784	1.552218176	5.123954909	0.980900641	5.611937739	5.951209246	6.687810312
Zm00001d010918	3.307095771	3.868420573	2.556586797	1.977605912	3.256423349	3.194061248	5.408408747	4.866083525	5.488006022	3.467565147	2.945368714	3.10166877	2.062186956	1.558197729	1.742438008
Zm00001d010919	17.95212535	16.51302265	14.27497252	15.2772764	24.60716322	17.48557645	23.0652726	27.30748466	24.87488431	40.99229114	35.36067292	31.67450461	14.38045496	13.14357978	13.03533402
Zm00001d010920	32.94582737	22.13289765	33.17317113	61.37260212	219.8261669	85.04389053	180.6291605	244.1975032	188.2070705	46.0355924	73.84897951	37.34959751	56.28033714	61.32039138	80.20776741
Zm00001d010921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010923	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010924	0.37577999	0.135227511	0.111195352	1.372494042	1.237863164	1.589413717	0.77365048	1.014092438	0.794470193	0.172754186	0.101543705	0.039644954	10.8932082	10.22011514	11.0682061
Zm00001d010925	0.014021778	0	0	0	0.01847575	0	0.18022893	0.253606096	0.259391123	1.624420903	0.74264032	1.988184289	0	0.030742332	0
Zm00001d010926	0.048479553	0.152650441	0.030125266	0	0.127757846	0.237576342	0.028324179	0	0.418521138	0	0	0	0.217000706	0.079717482	0.196171426
Zm00001d010927	13.7743516	12.98087475	11.80374636	9.990492557	10.12608994	11.18381908	12.37273001	12.25695678	12.06132681	6.624284897	7.897897469	4.851730297	6.443732147	7.068051369	7.178185394
Zm00001d010928	1.456010952	2.40392477	1.484225088	3.169277689	2.493341901	2.60556902	2.440511588	2.294796283	3.591330626	1.15069704	3.520865842	1.878699582	1.617118342	1.339075636	1.563558593
Zm00001d010929	0.023734781	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010931	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010933	0.111450277	0.10917825	0	0	0.016316899	0	0.014469961	0.059726073	0	0.426967516	0.23423729	0.521273692	0	0	0
Zm00001d010935	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010936	0.024212945	0.08005277	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010939	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010940	9.456759642	12.34045006	10.37511771	8.82175566	8.001558639	8.75947718	8.244400421	7.60901546	7.622062529	9.334592026	7.618141078	7.741230468	10.53219265	10.15034381	10.03041193
Zm00001d010941	0	0	0	0.016308149	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010942	0.265649569	0.171373632	0.072471966	1.406032967	0.793975658	1.30182828	0.40883469	0.218750282	0.367573203	0.053615788	0.220604902	0.007177428	0.435029851	0.198878117	0.389527122
Zm00001d010943	0.084390333	0.124004926	0.209761108	0.859525025	0.537450446	0.964970576	0.131480139	0.101755532	0.086730571	0.038796061	0.088682431	0.093483781	0.110174741	0.030837215	0.048783371
Zm00001d010944	7.760348692	7.230476459	6.003730677	15.22336597	14.15374426	13.25066622	12.01570528	12.11353359	13.25659882	0.612171607	1.651220796	0.245850203	6.241940751	6.528378676	7.201565889
Zm00001d010945	1.871621318	1.707541534	1.886193238	1.129695328	7.003192939	1.932874836	5.173071377	5.9673659	7.398167176	54.57906079	33.37528852	44.60911483	1.154607528	1.144237949	2.087560085
Zm00001d010946	7.790905045	8.564922305	8.636034193	10.81962126	14.61994137	11.83362597	12.82451972	14.31719299	13.22129443	7.026665398	10.23505418	3.511738554	10.80875797	9.952471861	11.90344542
Zm00001d010948	0	0	0.010180138	0	0	0	0.009571502	0	0	0	0.04131783	0	0.045831485	0	0.009470229
Zm00001d010950	9.041085866	9.750906587	8.438844423	15.54986162	19.90189446	14.53512875	16.68705103	15.52382718	13.85363657	15.70625971	23.75285214	7.776519793	24.52434705	25.07387614	28.66310151
Zm00001d010951	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010952	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010954	20.31317507	21.9254881	20.28966758	21.46900558	25.24942196	22.02510876	26.07892132	29.19111832	23.81534748	11.98856469	13.51892714	6.512080181	22.79483912	22.63019892	22.49693918
Zm00001d010955	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010956	8.207312671	3.320938417	4.782763727	16.52745007	37.55397028	22.00540939	47.51489964	46.14528308	37.68689867	24.13089023	20.74741785	9.505330798	9.900566474	8.679696366	12.91600919
Zm00001d010957	0.700565718	0.959464979	1.183428341	3.902028929	2.607976215	3.024843266	3.099595229	2.632582681	1.15758128	0.365841062	0.180117988	0.180828329	5.282185832	4.928523437	5.795464425
Zm00001d010958	4.848168857	5.208675126	3.293341803	8.988268707	8.623373221	7.907262822	8.808445336	8.121167303	7.563669934	1.938093956	3.088492627	1.545571057	7.716669365	5.534804706	6.4522992
Zm00001d010961	0.883458061	0.380296264	0.34745705	0.418409077	8.767480177	1.397473601	3.600055279	5.35321497	5.296034708	23.27363779	18.67123166	19.72794538	0.325367929	0.490368481	0.885642639
Zm00001d010962	0.159932113	0.18651397	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010965	5.813989425	3.860230982	3.78596	2.432429128	4.136333858	4.027984223	4.883611839	5.218565653	5.612504937	12.39913665	7.565864483	20.02102508	0	0.122175707	0.214752881
Zm00001d010967	18.72669198	17.35891187	17.50997527	18.82145962	25.27032142	21.21458097	23.89734001	22.38208215	25.52894436	28.99854738	24.65970736	29.7348784	13.98222577	13.46966301	12.35422484
Zm00001d010968	4.016055018	3.878854669	6.206630048	2.88062231	3.235365368	4.588803325	3.622908227	4.76717699	2.925552848	20.46199901	3.07011287	3.065755775	1.001274945	0.364977454	0.914186999
Zm00001d010969	1.931318853	3.006844286	2.533595909	5.140698703	7.316288281	6.211090857	11.31507418	11.36334442	9.626650932	16.12962081	11.36545683	6.537139215	5.112857371	6.929842313	5.023953346
Zm00001d010970	8.834559693	8.836021993	8.028129683	3.257371276	6.036068333	3.73665013	7.249336782	8.512518365	9.200799479	18.36111744	23.8421372	18.84595253	2.129091098	1.797903106	2.17800503
Zm00001d010971	1.273068343	1.24046782	1.16891892	0.541087161	1.752564202	0.690605865	1.202645821	1.962700871	1.804381613	5.372135545	4.788185692	2.438114176	0.29413473	0.208295854	0.530887827
Zm00001d010972	0.057547946	0.104192661	0.129631371	0.363342215	0.303311446	0.586065397	0.302601489	0.212506029	0.306069241	0	0.036284903	0.035858814	0.112696499	0.134057918	0.02910831
Zm00001d010973	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010974	34.14041849	35.36200488	31.31709725	16.7335939	19.34525898	18.12549829	18.21759077	17.17552448	17.3754455	23.9435363	23.81529927	23.02677531	14.25946521	14.36751968	14.10178346
Zm00001d010975	1.889329323	1.980551023	1.657742938	4.185706942	3.937792915	3.292318677	4.2188196	4.155294156	4.153597768	1.084358221	2.130936051	0.515645302	3.352986868	3.10886777	3.604358289
Zm00001d010976	0.165668272	0.235876297	0.125326184	1.104937248	0.958587718	0.855988313	0.538666789	0.703496362	0.417513109	0	0.154413961	0.023937364	3.095175502	4.287607733	5.812674828
Zm00001d010978	0.021394732	0.4850414	0	0.13341291	0	0	0	0.025797177	0	0	0	0	0.023941392	0.140721941	0
Zm00001d010979	0	0	0	0	0	0	0	0	0	4.631024505	0	0	0	0	0
Zm00001d010982	17.57971788	20.52211365	16.28621069	58.00856066	48.45682764	65.78387479	63.09862886	58.68485859	57.68643486	5.00541205	9.164012175	2.802083776	34.93295084	35.7236928	42.86935291
Zm00001d010983	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d010984	0	0	0	0	0.070366626	0	0.020800569	0	0.010976838	0	0	0	0	0.009757088	0
Zm00001d010985	0.084967271	0.096314933	0.073918302	3.136637841	1.063590026	2.18602719	3.901871299	1.444561757	2.556832325	0.175775812	0.085717164	0.131772042	1.930146425	2.123685623	1.836971322
Zm00001d010986	0	0.01511762	0	0.089816523	0.253048026	0.205871686	0.070126589	0.057890768	0	0	0.015135965	0	0.147747188	0.381580083	0.138769202
Zm00001d010987	10.96138859	12.20452104	9.86399394	23.68123643	42.30590965	23.43619757	29.80368828	34.17666742	34.62365868	27.11773572	21.76644246	7.746463912	25.89759196	23.11035652	30.40150325
Zm00001d010988	7.041199425	9.10577095	7.473330908	16.17415865	32.16760059	15.57375444	19.03768163	23.11533756	22.90313099	15.71240457	15.23070743	6.072931334	15.29854974	13.09005016	18.49953443
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Zm00001d011113	67.87886967	68.88446686	83.54654162	88.4227763	98.37991362	96.7690507	82.47955715	97.64024417	87.20328501	68.2913608	76.62066497	42.0416845	93.52335373	78.18595255	87.85824215
Zm00001d011115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011117	0.156626248	0.169089719	0.148309	0.344166004	0.17689548	0.566528201	0.270169092	0.152883107	0.239154936	0	0	0.008262069	3.455318928	3.221403906	2.103992441
Zm00001d011118	0.071702276	0.075257735	0	0	0.188956535	0	0.027928037	0	0	0.230741606	0.045209435	0	0.026745716	0.013100425	0.110530154
Zm00001d011119	102.915232	100.6931391	96.58082635	24.56558507	31.72697686	24.89929933	27.66489046	27.3105632	26.64145616	41.52419716	46.37024669	38.25861309	19.25026517	19.26770696	18.3427042
Zm00001d011120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011121	23.57480495	25.17313945	20.77006594	17.22917429	22.82464342	15.11158575	16.94967936	22.06572723	16.95999242	3.723963603	9.083734421	3.756281372	7.659313291	8.693180999	8.068846319
Zm00001d011122	7.095972797	7.239940215	7.118561997	9.231794748	11.01818397	8.843641837	12.71783136	10.5135731	11.72296774	11.82830755	14.39445004	9.002927948	8.386210241	8.752610454	8.782318282
Zm00001d011123	0	0.310601483	0.057465557	2.595008945	9.910667293	6.231356939	5.240899157	21.72520765	5.018209324	0.318853757	2.157412591	0.665874327	13.4875602	10.18837957	13.7031223
Zm00001d011124	13.26594891	14.39347698	17.11834566	14.7151153	12.47055273	17.08481412	6.90353079	6.586875652	8.180297085	0.157452071	1.17331855	0.227639837	4.445841596	3.554301313	5.002424029
Zm00001d011125	5.15035094	6.136622241	5.875529818	4.703016755	3.796247998	4.797147691	4.991324156	5.780939604	4.280270117	2.914913134	5.835462706	2.575405904	8.340136964	7.987315531	6.468936917
Zm00001d011126	0.413583547	0.144697224	0.285557139	0.229245982	0.121101555	0.422247029	0.080545396	0.249343808	0.595073753	0.126755533	0.318720186	0.050905454	0.411389573	0.277068494	0.18595073
Zm00001d011127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011129	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011130	18.82653835	19.18389719	15.14653376	25.51308132	31.10500718	22.17409771	25.58304004	29.26316241	29.5907295	19.44536452	37.9336188	32.30929409	15.20010348	13.21880697	16.28046108
Zm00001d011131	24.9362349	26.06970108	22.56989114	13.67596814	17.38289814	15.35581554	20.45114853	19.08263731	26.30934656	80.47172667	88.75058132	77.45908919	3.590202567	3.09711494	3.792287659
Zm00001d011132	19.61302799	18.312578	17.73121357	11.31723605	21.53586809	15.99823705	20.45097432	20.42587079	23.64238642	103.2205188	85.12585686	50.9401621	5.791729916	6.47627607	6.16092052
Zm00001d011133	39.81081824	14.45111502	35.50499568	18.72345221	195.7749564	65.94793651	192.7251903	213.9903348	153.1987673	32.22239313	26.66199023	4.99687418	0.828347871	1.267926117	1.791860251
Zm00001d011134	0.010824413	0.109067108	0.094168288	0.107997909	0.185415782	0	0.392098136	0.274087348	0.120145532	0.074643252	0.204748986	0.011990794	0	0	0.087601492
Zm00001d011135	0.190761404	0.146828424	0.131710463	0.885551459	0.837853783	0.532336758	1.188825075	1.55898941	1.097888009	1.914720929	1.817536111	1.796193019	0.925028589	0.685446756	0.83317459
Zm00001d011136	4.848246335	5.124341758	5.682978907	7.676963285	9.624899223	6.981199158	7.494198808	8.630981042	6.962516014	2.894532163	3.555906888	0.84424032	4.854599833	4.292984698	5.096899947
Zm00001d011137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011138	0.262132804	0.298411348	0.150359732	2.79768643	2.424431254	2.365382599	1.82014182	2.248977361	1.865091039	0.062571523	0.266989053	0.055842082	1.822061787	1.127332185	2.511911874
Zm00001d011139	23.85508565	19.38777124	24.38352789	41.19373106	61.99425111	38.5805391	41.61384052	48.53039805	40.0059655	4.449848928	12.4473577	4.017304923	18.1597289	18.43806544	23.19593412
Zm00001d011140	3.628762579	4.016133634	3.290488956	4.78177569	4.173697162	4.616830911	4.38420068	3.925462712	4.695271027	4.048078685	4.518268226	5.081925673	3.021887112	3.000207724	2.7747348
Zm00001d011142	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011143	0.085216952	0.153330095	0.090778182	0.288471263	0.641633351	0.596585294	0.213377163	0.205504494	0.450412012	0.15110772	0.061406463	0.013485639	0.653900612	0.573852296	0.943000364
Zm00001d011144	11.63284943	8.211102523	13.28895935	11.35216967	36.60656409	16.20015672	46.92865019	64.47560117	52.42334605	19.23052909	28.19759342	17.88904671	40.93050295	38.30517249	53.64427605
Zm00001d011145	6.979625745	5.779963148	5.834570036	4.837267299	6.704595404	7.010170472	5.833507874	6.262681431	6.571302501	3.786866046	6.138069763	4.38165834	4.952690613	3.999309653	3.640664578
Zm00001d011146	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011147	15.66503698	18.4597991	14.77997042	25.104754	11.2090796	16.88802971	6.409121029	6.589987396	5.472284844	2.447846157	0.744415085	0.324800669	71.27803002	78.90722273	72.05497741
Zm00001d011148	0.554239213	0.23268878	0	1.612853908	0	0	0	0.222762111	0	0	0	0	1.033685794	0.202525496	1.067960275
Zm00001d011149	7.618499587	5.783807775	6.317036448	7.44669813	8.406466287	8.088256117	8.30145373	7.636361328	9.121921159	5.495312778	9.120919808	4.530367846	5.191046366	4.44482879	4.944382237
Zm00001d011150	8.92629768	8.162982317	9.071470581	8.332363608	9.653702262	8.563884715	10.13297503	9.623204711	11.31128112	5.340546022	7.55390343	6.212817714	6.693115513	6.506939504	5.948197893
Zm00001d011152	66.92786258	68.21981892	54.35004187	34.30657104	16.69563642	28.72220391	17.7863168	12.89541368	13.88295489	5.316655795	11.55232534	7.743917122	40.05518384	39.29355946	35.28228143
Zm00001d011154	237.8624344	273.9657881	225.0599463	191.4116164	114.1064627	239.4099728	164.343416	112.0870472	113.5408547	4.444505717	3.204502347	0.58187101	404.0532858	391.2153249	380.8002553
Zm00001d011155	16.08170995	16.34266871	14.00852009	9.995751771	11.39806818	9.574288516	11.6762583	11.02813043	10.48920325	9.489776065	11.34010728	8.517382017	7.804068854	7.633072729	7.676475347
Zm00001d011156	0	0	0	0.009322127	0.019698039	0	0.017468384	0	0.036873533	0	0	0	0	0	0
Zm00001d011157	0.843426931	0.395758578	1.096170952	1.47126466	6.580868482	2.221961481	3.903528706	5.50366132	6.241075931	3.573304911	3.100395001	1.972432388	0.265257113	0.338413571	0.497118283
Zm00001d011158	3.84660285	3.390995547	4.230235191	4.119874779	4.418860028	4.4449759	4.035966148	3.758912203	3.793686193	2.943658434	2.907435594	2.367636731	3.121815916	3.375366622	3.355023378
Zm00001d011159	39.61463109	40.51522285	40.79946517	42.2613397	55.27539477	38.3569972	60.51386663	65.8180365	60.11875242	35.03575014	56.98462893	37.36669512	32.9516708	33.7053995	35.64904753
Zm00001d011160	6.737121039	6.436733017	5.882723938	5.489186023	5.777189824	5.716356748	5.346868027	4.39086223	4.893618037	1.886264789	2.583495557	1.296842109	3.552236334	3.880918787	3.676526891
Zm00001d011162	147.6419828	145.0123976	143.713213	114.9550845	154.6417801	134.9977051	176.6242044	180.9741727	183.7287992	821.1412349	491.9612207	770.1937059	112.4313293	118.727807	121.7910694
Zm00001d011163	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011164	8.322996577	4.783047142	4.601634309	5.60445399	33.23389698	6.707407082	43.19122582	72.23370846	61.82155098	144.1176664	171.3211543	176.3688382	1.062399288	0.832604817	4.683203576
Zm00001d011165	3.594049065	3.900429603	2.737903966	3.854343193	5.41576804	4.642254855	4.582101021	4.318426083	3.826974464	0.581619396	4.611584402	3.053975673	2.31027823	1.966511376	2.24861691
Zm00001d011166	17.0015018	19.31152025	18.16656939	33.52425774	24.03156419	33.92726112	24.2713054	23.06917139	22.73170926	4.387485614	10.58818931	4.159544277	28.22103046	29.22238725	29.44963023
Zm00001d011167	15.13385046	16.59476303	16.26956117	18.90443239	19.62252078	18.156	17.74040248	15.69734282	17.42690936	2.967435558	7.956860575	3.294001449	12.91787357	12.8799769	14.17072806
Zm00001d011168	2.882232371	2.747033139	2.643203943	4.046335302	5.520539989	4.387807498	5.656151535	5.951011842	4.794399115	3.774717086	5.427455242	4.334320272	5.037380222	5.416767919	5.540320071
Zm00001d011169	0	0	0	0	0	0	0	0.007816214	0	0	0	0	0	0	0
Zm00001d011171	0	0	0	0	0	0	0	0	0	0.038558048	0	0	0	0	0
Zm00001d011172	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011173	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011174	3.535295647	3.844000465	4.075101153	14.6391693	10.17149583	14.36434359	18.09649498	15.18045473	14.36429006	5.266110595	3.067483717	2.851401388	17.19294048	15.88258735	18.71383452
Zm00001d011177	3.410293143	3.965032727	3.455830912	4.313572176	4.044645484	4.358129911	4.139094694	3.560275168	4.619830048	2.218086333	2.874714775	1.753831559	3.418158745	3.394293665	3.496741468
Zm00001d011178	3.716662958	3.534816318	4.011306024	7.60006579	7.385251512	7.189611568	7.600111219	8.337199601	7.602603294	24.23182521	25.05810205	24.31767288	6.910493555	5.923870756	6.875779535
Zm00001d011179	15.23222196	14.99921303	14.58129427	17.72526869	25.24593861	14.79043989	18.2842747	24.4533723	19.45313997	23.33422292	24.9549421	16.44126629	10.38216497	10.65366163	11.99262352
Zm00001d011180	14.87153571	15.06339556	15.47994838	11.30334923	13.03793061	11.38729129	11.52351519	11.3882157	11.41277516	8.967995198	12.92027797	8.439832599	9.80063343	8.67823257	9.866872266
Zm00001d011181	0	0	0	0	0.082537715	0.249414339	0	0	0	0	0	0	0	0.01716711	0.325893032
Zm00001d011182	0	0	0	0	0	0.224282975	0	0	0	0	0	0	0.014632759	0	0.128502537
Zm00001d011183	160.6974693	161.5268532	207.3268104	1981.6569	1150.247833	2264.985257	201.0590943	64.94595455	138.7017388	5.244140124	6.734894019	1.404043029	838.1829632	728.1102605	911.334264
Zm00001d011185	20.29652421	19.82389077	32.15153723	58.8449453	105.0346392	53.72606231	54.39636786	87.28276463	64.84778075	49.2160857	61.17941687	40.77331062	28.75342811	19.02181773	34.44856477
Zm00001d011187	1.067899943	1.358340998	1.24834627	3.639479419	1.421046671	5.725534728	3.434651718	1.644614937	1.251817949	0.539544287	0.439996544	0.351377553	3.58504298	1.819753451	2.261465764
Zm00001d011188	58.84401558	60.54209802	57.61239972	42.88601683	46.51612974	36.70424808	44.29703695	52.644491	47.43988013	46.34130152	50.57779776	35.70059867	47.49899069	48.59285316	50.86848688
Zm00001d011189	52.3304454	49.02623321	47.57381932	36.98939634	46.38568005	41.45410203	60.52688221	80.72775151	57.09126564	80.70938481	52.29425589	58.17963108	59.83432789	48.41597009	57.77902412
Zm00001d011190	0	0	0	0	0	0	0	0	0.021533107	0	0	0	0	0	0
Zm00001d011192	6.125443441	6.096649723	6.79078031	9.124060043	9.511116957	8.052393174	6.531982396	6.983368961	6.785339547	0.77313283	1.111993108	0.418641949	4.468684883	4.163599484	4.984601871
Zm00001d011193	2.357381166	2.60171284	1.489376449	2.576207907	4.435938093	3.834720564	5.767155669	6.825718852	5.445119306	15.14697548	22.0817412	16.97846607	4.261360742	2.644744712	2.880413272
Zm00001d011195	4.177786294	4.531307819	3.320490099	3.186037457	1.580162836	2.829106774	3.389194293	2.757487741	1.953635304	5.36183402	8.004474048	3.423085424	4.849846247	4.940597492	4.37223198
Zm00001d011196	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011197	14.69390212	15.11173429	12.18859757	22.6855312	25.51822027	20.51834215	21.97977566	19.26533193	19.46732408	24.16021946	35.45638503	24.37793673	17.87943185	18.14843964	16.37966941
Zm00001d011198	0.22362319	0.312103341	0.398100989	0.309043751	0.390220584	0.74045677	0.416673466	0.14575063	0.156529126	0.041677466	0.36583267	0.060256124	0.290821237	0.278271106	0.412264771
Zm00001d011199	0.985600585	1.468284239	1.376374341	4.222890914	4.300982752	4.446959501	2.470527109	2.280980408	2.143495637	0.043848571	0.066821181	0.06456903	1.429050577	1.045596746	1.464181816
Zm00001d011202	0.511180329	0.629526105	0.741179154	1.289211018	5.216309872	2.386768726	4.254204605	5.66372899	4.490042019	2.3500065	4.161346623	1.352737886	4.372830172	3.256394576	3.644464353
Zm00001d011204	4.497330825	4.104641171	5.184274538	7.376891143	13.48355396	7.166791939	10.30081858	11.49388771	11.19339167	4.157513486	8.280888469	2.797828057	3.537447736	3.411794231	4.898106243
Zm00001d011207	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011208	0.06138463	0	0.010898428	0.109366067	14.9287379	3.115617908	4.365157498	4.218905769	2.822687878	0.10884796	0.575030762	0.223425637	0.058878318	0	0.304152894
Zm00001d011210	13.82770012	15.49871499	17.24182293	27.36401848	9.934680423	20.17563556	11.24409124	9.342730049	11.94782478	0.651873723	0.776903769	0.205824805	28.813363	33.61865285	28.59291754
Zm00001d011211	0.005110742	0.06436998	0	0.101982325	0.370378354	0.275499744	0.095550427	0.172546951	0.214300703	0.077534109	0.083782519	0.056614477	0.263077865	0.252115851	0.189078873
Zm00001d011212	0.131138934	0.082584987	0.013581654	0.081775395	1.353559149	0.41504644	1.123729538	1.344051491	1.037771839	0.075359255	0.248055605	0.084740694	0.195664905	0.203658732	0.012634542
Zm00001d011213	18.2408176	17.87578552	17.31237172	20.3254495	23.13030564	20.78933168	20.09129466	19.94503374	21.54747253	30.50724611	26.70665081	31.75996014	20.01322355	20.57201078	19.24110382
Zm00001d011214	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011217	15.80371272	20.99021842	21.09309297	19.89186487	22.26712796	22.74374674	17.81808737	14.00116987	19.81459967	2.276284252	4.733595296	1.278210928	15.62544183	18.20522455	17.89974444
Zm00001d011218	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011219	0	0	0	0	0	0	0	0.00850588	0	0	0	0.007814434	0	0.007733172	0.016311468
Zm00001d011220	10.19901193	10.67195557	9.979898415	9.408091494	10.77997209	9.991756106	9.802128833	10.40193498	9.259179663	2.722816391	5.886546756	3.307424303	7.269604927	7.646428052	7.4928845
Zm00001d011222	7.634319634	7.90289225	7.763160966	7.031720839	6.220151924	7.355339575	5.677353718	6.080335343	6.203273968	2.368757346	3.716127101	2.35560253	4.218612988	3.818868306	3.873886637
Zm00001d011223	27.5648119	28.21434862	24.01524538	6.40339143	6.391391782	7.405030386	5.644009373	4.592913307	5.011583039	1.690604969	5.947070769	1.993107018	4.972928967	4.368101794	5.848116642
Zm00001d011224	14.41784257	14.66955915	14.26884664	7.759482655	11.98008892	7.480194934	9.71285596	8.382235459	8.020977929	3.981492809	10.18909472	5.201283279	5.569860344	4.801623894	5.696997797
Zm00001d011225	3.609341957	3.430927963	2.295747819	4.650046333	3.207947018	4.411508651	4.90385717	3.417997474	4.304342109	4.44956513	6.730632062	3.168436591	3.172115234	3.536755952	4.035107689
Zm00001d011226	18.3122096	20.25761143	19.27183713	17.27985336	19.38895987	17.65916581	16.66346934	18.24608742	18.01120175	19.89626443	29.59497184	15.83120755	14.06889532	15.1416682	14.49280119
Zm00001d011227	0.035099445	0	0	0.010943626	0	0	0	0.031741456	0.032465513	0.024203961	0	0	0	0.028857933	0.060869623
Zm00001d011228	19.24658845	11.04530343	18.64352095	8.865508896	15.09062221	6.87326323	14.76688411	12.38780668	8.279799907	11.02137741	13.99548905	16.05149083	1.540253309	1.839936387	1.853187821
Zm00001d011229	0.117098363	0.497764649	0	0.03651	0	0.107596138	0.085518399	0.229440204	0.054155534	0	0.110748595	0	0.278453261	0.224642841	0.152304399
Zm00001d011231	26.02836308	22.2367969	23.17035145	13.10643253	18.05377623	14.5684972	16.99704951	18.38398316	16.66893343	27.54589087	30.69268966	25.06582431	14.8408646	14.81252403	14.48793134
Zm00001d011233	8.827118295	9.496294906	9.119604547	7.76570465	7.656029366	8.286650968	8.446522768	7.706767926	7.286730986	8.815016621	9.110016789	9.306052417	8.02215814	7.702957564	7.067519335
Zm00001d011235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011236	70.10657041	78.9107751	68.00010598	57.02209134	70.18643802	75.90721473	59.03284117	59.67860885	52.25614544	24.931736	32.15824629	11.46693107	49.20526927	47.30959819	52.54647456
Zm00001d011237	0	0	0	0	0.017506177	0	0.093147737	0	0	16.23462443	10.72255912	10.77325625	0	0	0
Zm00001d011238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011239	4.372274811	3.263933736	4.697875509	3.504320631	3.231979139	2.40817015	2.738543477	3.261428931	2.926617202	5.867895237	6.345117594	5.573873509	3.525011462	3.167735192	4.413973324
Zm00001d011241	0.012473754	0.015710739	0.015502418	0	0.049308001	0.213948768	0.174906974	0.105283553	0.030767195	0.017203363	0.062919214	0	0.097709716	0.013674167	0.057685446
Zm00001d011242	0.163056089	0.121938287	0.234310116	1.620496952	4.28357821	1.417090196	3.161624457	3.661833824	3.154652383	0.808166914	1.028094794	0.660414306	1.214532648	1.307093361	2.162032437
Zm00001d011243	12.78109215	12.89307376	12.06461371	12.18018893	13.53252229	11.77994858	11.0979979	13.28472226	12.25176929	13.29570549	14.24300851	12.80946004	10.27107793	9.159675839	9.330089311
Zm00001d011244	0.401843649	0.45228063	0	0	0	0	0	0	0.042177418	0.117916732	0	0	0	0.009372662	0
Zm00001d011245	2.003904053	2.05783397	2.334261892	8.037439635	8.372119132	6.894688714	6.551478074	9.210382773	7.663828634	6.490394697	6.691673688	3.318149034	4.172331749	4.293995627	5.134063573
Zm00001d011246	0.229929652	0.313730352	0.214317937	0.083637834	0.100988683	0.117373035	0.0671682	0	0.011815293	0.515305209	0.531572559	0.530636738	0.450272662	0.451602052	0.431973841
Zm00001d011248	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011250	0	0	0.014774478	0.014826235	0.015664223	0	0	0	0	0	0	0	0	0	0
Zm00001d011251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011252	8.921263758	8.675283388	8.660137178	13.90275463	18.00326617	14.86842418	17.31781266	16.93018237	17.84171745	15.79553899	22.71283746	17.91327307	16.17994767	12.61682643	13.85447725
Zm00001d011253	31.05577162	30.63053143	31.2426893	65.6394579	51.87310682	62.47712487	63.45118863	50.73965265	50.70166986	9.521212257	27.86254064	14.41438363	50.72985049	49.61229007	44.80530506
Zm00001d011254	0	0.019544801	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011255	2.051334244	2.223912517	2.597810647	8.776060853	15.78992345	9.432322276	11.45394292	12.57072191	13.22574491	6.840043927	11.90254658	4.041375761	4.067990435	4.582884632	4.72823438
Zm00001d011256	13.74337764	19.19528945	18.69419775	53.15244253	27.04454948	56.74376164	40.31644206	33.03403412	29.27218557	1.442722108	1.091706464	0.139855683	222.4344548	231.5849656	228.5170112
Zm00001d011257	0.621419724	0.282634604	0.471962493	0.043055985	0.022744768	0	0.020170249	0.020813632	0.106442064	1.095106985	0.587722656	1.931289929	0.135214455	0	0.199568334
Zm00001d011258	12.38160522	11.96304035	10.62687912	10.77351911	10.78134118	10.66928674	11.06107962	8.882180554	9.15331627	4.742961568	8.728718601	3.825776244	8.891157146	8.754906433	7.742312222
Zm00001d011259	0.024211158	0	0.040119598	0	0.063803505	0	0.1225932	0.097310485	0	3.784333569	1.475667275	1.045980864	0.009031021	0	0.009330468
Zm00001d011260	0	0.049910057	0.295489561	0	0.261070382	0	0	0.047780859	0.048870791	0.710473946	0.699588708	2.546010452	0.620810714	0	0.320697636
Zm00001d011262	0	0.163990188	0	0	0	0	0.076070652	0.3139885	0.481726371	0.628496183	0.24628378	2.812526324	0	0	0
Zm00001d011263	4.398570914	5.689746513	6.316089366	8.488019356	14.34581747	8.823637002	5.649072776	7.095457506	5.986671933	0.232270328	0.462228253	0.120716013	1.729401276	1.335787728	2.966453135
Zm00001d011266	12.63242013	11.89445287	11.0877625	6.741087078	7.092818685	6.308998574	6.952072479	6.905896996	7.42653333	7.194123312	9.814323558	7.267575758	5.05392968	5.578215447	6.493163755
Zm00001d011268	0	0	0	0	0	0	0	0	0	5.006557769	0.380037095	2.003063299	0.015329208	0	0
Zm00001d011269	0.95791639	0.421689054	0.705054174	3.270848917	11.97247458	4.865224096	4.107815215	5.427515492	4.714036633	0.692628446	0.97340732	0.154534413	2.33120758	1.835128984	1.967662319
Zm00001d011270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011272	6.882997936	7.294306284	8.062745019	10.89101761	6.692164435	9.524366528	6.837536849	4.54848043	6.007452768	2.571120748	4.074417475	2.468883976	6.690821343	6.20691242	6.196333417
Zm00001d011274	0.073108203	0.138120078	0	0	0	0.268702655	0.021356734	0	0	0	0.092191789	0	0.020452607	0.120215669	0.126784589
Zm00001d011275	149.8139384	151.761051	160.1070658	208.6402368	256.302412	213.9554708	263.8300374	323.3978259	328.3715277	763.0439841	833.449155	684.6186294	262.3567083	229.9303933	233.655656
Zm00001d011276	1.461453578	1.079323174	1.287920973	2.24518758	3.571260147	2.278793488	3.345556232	2.915607496	2.49055811	3.151642666	2.54660779	1.427603629	1.665148272	1.237983838	2.058288452
Zm00001d011277	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011278	19.69971952	16.08543252	23.24008415	30.92904381	59.14267146	35.96600474	46.62248652	57.37672291	42.91744035	22.93321495	31.54336769	17.10665276	35.80851769	26.8103971	34.23766815
Zm00001d011280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011282	11.53797999	13.8501891	12.46878178	17.94825804	15.44554414	18.65289488	13.73519644	14.56502494	12.54014827	7.937720107	9.401700407	6.063746777	18.47943633	17.11176014	16.63209611
Zm00001d011283	13.40157589	14.45336813	13.62337321	9.662118815	10.01083124	9.863843941	9.617912164	9.176348306	9.021434846	2.131062511	3.988810246	1.986691322	5.51303405	5.048807166	4.874365964
Zm00001d011284	0	0	0	0	0	0	0	0	0	2.257704735	0	0	0	0	0.025575748
Zm00001d011285	1831.188698	2448.559152	2499.228406	6217.435598	1723.801427	4794.718226	2340.66526	1477.541014	1423.846816	0.640354601	1.995053511	0.152396201	3013.275483	2954.094457	1972.843688
Zm00001d011286	1.60603816	2.223420361	2.045476281	9.733495042	14.98822803	11.38290533	10.74811845	10.94691943	10.82013553	5.693077074	7.213962752	2.528963177	6.357067273	6.373064441	9.406759998
Zm00001d011287	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011288	0.754541833	1.187935289	0.925724416	2.458144075	2.89662045	3.297679828	2.413322263	2.411568314	1.864101251	0.21346412	0.326316206	0.369701646	3.902442726	3.475642749	3.659969573
Zm00001d011289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011290	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011291	0	0	0	0	0	0	0	0	0	0.33329343	0	0	0	0	0
Zm00001d011292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011294	0	0	0	0	0	0	0	0	0	0.099761299	0	0	0	0	0
Zm00001d011297	27.91723443	31.2966409	18.24071258	4.940965147	6.829577663	10.68826	22.46311532	8.811479063	10.82256881	0.099087236	0.452999445	0.011369649	3.514531698	4.309292497	3.832790764
Zm00001d011298	11.03897013	10.6866388	9.414509895	8.393312797	8.964556863	7.913064443	9.17372189	8.796109276	9.336685852	4.409610315	6.98631609	3.333186827	5.937441181	5.388430366	5.024293756
Zm00001d011299	0.206771332	0.275748625	0.226743547	0.030338381	0	0.014901363	0	0	0.015000376	1.509732824	0.782235848	0.646734769	0	0	0
Zm00001d011300	0	0.019347157	0	0	0	0	0.017949255	0	0	0	0	0	0	0	0
Zm00001d011301	0.131648919	0.095660943	0.226541997	1.717646744	0.994097997	1.482608363	1.11232198	0.805903815	0.724373729	1.277942238	0.740675663	2.064121883	0.668603285	0.482910794	0.66735651
Zm00001d011302	3.521378434	2.034969148	3.930160398	10.0406556	11.95465011	10.624702	11.56965464	11.57237917	12.17697216	8.45613046	11.33651701	8.505324362	7.355666342	6.191552182	8.349939103
Zm00001d011303	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011304	0.888173667	0.595920628	0.134109561	0.07246581	0.043749499	0.040677917	0.048496773	0	0.092133459	0	0	0	0	0	0
Zm00001d011308	9.006930583	8.81206097	8.620256127	14.70577153	14.17266638	13.97813601	11.51127957	12.71480268	10.09145906	10.41177868	11.82705416	6.88178104	17.1883706	14.53507614	14.22523086
Zm00001d011309	12.28237023	13.46469573	12.43762901	13.70018908	12.15207314	14.2089168	13.07757384	12.15802755	12.90291012	9.84745892	9.762988103	10.09094081	10.64806406	10.56901485	9.684149805
Zm00001d011311	1.504133579	1.903840333	1.425141646	3.612481528	1.873990501	2.727663676	0.469848146	0.341180314	0.348963003	0.061617273	0.018779809	0.041242845	9.007479452	8.677048236	7.687685282
Zm00001d011312	0.027968973	0.119771884	0.104279765	1.458054626	0.781288368	0.82923281	0.437935383	0.634015239	0.572592107	0.077147649	0.134025134	0.10534138	1.721399828	1.232554921	2.852030737
Zm00001d011314	57.44947883	55.90202909	83.91780752	92.28817717	156.7854199	100.8659647	118.6828606	140.9621361	123.4407146	38.75436296	81.61476057	34.06435037	131.7116139	110.9278705	143.6095944
Zm00001d011315	0.168491026	0.0080588	0.185545317	0.031919195	11.70198093	1.586072263	8.475884627	7.653285985	8.067225792	18.28717989	5.497392075	39.47932367	0.007160008	0.021042431	1.72113211
Zm00001d011316	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011319	0.0759513	0	0	0.034731828	0.106748778	0.031016911	0.011833213	0.064105985	0.021856104	0.034916455	0.060658783	0.033654161	0.022664518	0	0.023416018
Zm00001d011321	19.87733825	16.59428151	23.10728367	33.62452108	50.95826707	34.65122779	38.16128491	44.69954883	40.30817404	18.74964892	28.43374874	9.720573986	28.71857989	28.59358569	30.02369139
Zm00001d011323	0	0	0	0	0	0	0	0	0	0	0	0	0.01087317	0	0
Zm00001d011324	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011325	6.360574084	5.819432339	7.817936135	9.741172408	14.10009237	10.09603868	11.17186841	11.31116581	12.35855438	1.696525907	3.997832532	0.997069149	4.622019784	4.385336269	4.809961829
Zm00001d011326	0	0	0	0	0	0	0	0	0	0	0.014475117	0	0	0.062917241	0
Zm00001d011327	0	0	0	0	0.015515811	0	0.220152792	0.056793785	0	0	0.103944059	0.300017716	0	0.012908602	0
Zm00001d011328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011329	4.373949647	4.417850034	4.341763153	8.037560766	8.185585411	7.21394872	7.25081471	6.564883195	6.540905984	1.447386882	2.407008398	0.600781393	7.353707837	6.478103009	6.139918753
Zm00001d011330	19.45177436	17.13843197	21.52043009	36.38113892	62.24806855	37.9323189	45.81744629	57.27132608	48.01040935	16.38558336	26.15814813	10.54014327	32.12838557	29.55318724	41.78412059
Zm00001d011331	31.00857865	31.84405617	30.00592313	63.0273374	72.4980735	82.86883645	97.70933924	94.13365152	76.28620874	80.15340742	69.16206357	38.45958704	78.27431061	75.03050328	84.19634506
Zm00001d011333	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011334	0.245971127	0.129916777	0.147916278	5.135831788	4.851090736	7.00877787	11.79337934	13.79599498	8.327463708	5.110407151	1.730990466	2.461070403	10.21087186	10.03764785	13.73261791
Zm00001d011335	0.488564472	0.356254546	0.12782934	2.608301851	3.501125682	1.837679074	2.543955226	2.7077817	2.209296806	2.316963984	1.805051652	1.148883432	2.724005096	2.677907655	2.507128811
Zm00001d011336	16.58981195	18.72989054	19.8269701	21.61147804	20.51015852	21.7496756	17.67574254	17.15470875	19.01646424	4.348023352	7.572995624	4.051464022	10.12536438	8.379505939	10.17356443
Zm00001d011340	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011342	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011345	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011346	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011347	18.79611423	20.43898721	16.48781689	9.404468571	10.75113922	9.249199067	16.19751857	16.89447342	19.5614172	133.3872962	90.64331115	227.2175521	5.334643338	4.885281532	6.806362993
Zm00001d011348	15.78009447	15.42787121	17.49273752	22.67309825	40.21178213	23.24288549	31.09050713	39.97368659	34.50806432	8.045642624	16.91381513	4.940717274	14.67467272	12.38278227	17.18835355
Zm00001d011349	2.602052478	1.549074999	2.713928755	8.973773624	16.12868532	7.862046724	10.59774985	14.05309911	12.77429845	2.538601473	3.787705866	1.492193375	3.576527541	2.696538978	4.410924298
Zm00001d011350	0	0	0	0	0	0	0.010482176	0.086532264	0	0	0	0	0	0	0
Zm00001d011351	11.78248234	13.07079584	10.71931188	5.824079604	6.103436317	5.450243108	6.276381105	6.036603679	6.603335351	4.758700873	6.136829129	3.931128089	5.706014197	5.465415603	4.795733879
Zm00001d011352	0.00435945	0.005490743	0.054179368	0	0	0	0	0	0	0	0	0	0	0	0.005040119
Zm00001d011353	15.74423785	15.37033655	15.54263644	19.70157981	22.1709001	19.65033765	23.27711438	23.3718999	21.57238404	29.00751613	28.16385182	25.30208114	18.45646842	17.30085537	18.32494537
Zm00001d011355	7.67387545	9.420523284	8.687108968	5.436286051	4.287578959	5.272615593	5.133496935	3.696125073	4.659172073	3.087303574	3.300943971	2.133634422	3.219176437	2.86120886	3.191558206
Zm00001d011357	128.4963396	127.6780342	116.3862451	28.67877553	32.54599052	37.51875217	19.62132727	15.67930448	15.92600399	0.783715365	2.55582336	0.844559742	4.350574763	2.990109712	4.390807509
Zm00001d011358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011359	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011360	2.130803292	2.519151014	1.931397634	2.561777396	2.76646713	2.746272912	1.703053066	1.606646265	1.825494676	0.054856275	0.111063134	0.050355353	1.185860153	1.248907225	1.284304347
Zm00001d011361	0	0	0	0.236807915	0.250192449	0	0	0.228949948	0	0	0	0	0	0	0.219525168
Zm00001d011362	16.04447991	17.60488794	17.75917548	45.92568172	28.6063562	43.25152826	20.73994724	16.41722265	22.35689341	5.662612308	12.49784804	4.529734892	30.70307966	35.07322344	37.23447415
Zm00001d011363	14.8672238	14.43895113	15.94535018	27.56403709	22.72231451	27.86955521	26.24599812	27.95078279	27.56907003	16.02531163	24.52940903	16.63080453	32.25643721	31.01304897	39.03113763
Zm00001d011364	0.164317715	0.610528373	0.388007627	1.577960434	1.158342925	1.610493475	1.084829673	1.485973217	1.033511506	0.69119472	1.34686442	0.755398389	1.774411118	1.792301955	1.994723879
Zm00001d011365	0.253384285	0.014506293	0.143139425	0.014364086	2.504032262	0.204601867	2.456114358	2.610839503	2.265574952	18.24333276	18.45987185	17.9576279	0	0	0.086552467
Zm00001d011366	27.84587502	34.5612256	22.78357501	22.88082805	12.85475667	18.05685503	8.371402792	8.46982104	7.749011318	12.59992347	11.1268543	16.45072309	41.8636755	42.40578681	35.79884404
Zm00001d011367	0	0	0	0	0	0	0	0	0	0	0.013080322	0	0	0	0
Zm00001d011368	0	0	0	0	0	0	0	0	0	0	0.039270762	0	0	0	0
Zm00001d011369	5.475211619	9.265244145	5.489607968	4.618627101	2.179809396	4.856013739	1.256006836	0.99230395	1.13921777	0.521173125	0.561248663	0.418609805	18.75669858	15.06973804	9.601933745
Zm00001d011370	1.659171423	1.599285113	1.53599682	5.986034876	5.342809401	6.274442688	5.539262347	4.582968362	5.345223884	0.677141398	1.62257549	0.187546409	4.821648186	3.906798328	4.247506154
Zm00001d011371	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011372	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011373	1.682874172	1.957948735	1.977126619	3.998304097	6.72887407	4.755377048	6.006832951	5.985301499	6.2890632	0.447494625	1.367952414	0.265549571	2.815301662	2.667697686	3.65890832
Zm00001d011374	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011375	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011377	9.209562752	9.111351379	9.37415159	8.567080435	8.651975331	6.978805056	9.712123777	10.07605336	7.052861671	1.726042473	1.932053789	0.696292989	10.04202834	11.24016502	10.04408747
Zm00001d011378	1.158470665	0.991541795	1.431796328	0.726388324	2.513169095	0.964486542	1.024603306	1.288808132	1.704986595	9.762876099	6.674797756	5.345906777	0.472707998	0.168391985	0.362586513
Zm00001d011379	0.639919665	0.781276782	0.737399075	1.021297838	0.762422901	0.54969354	1.071482966	0.886893628	0.780127176	0.38548367	0.664736529	0.179255485	0.606344959	0.529486492	0.462042211
Zm00001d011380	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011382	0.012327533	0	0	0	0	0	0	0	0	0.004250425	0	0	0.006897453	0	0
Zm00001d011383	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011384	7.721582067	8.963299302	7.376341096	10.22291535	10.1363533	9.354099085	9.78016888	9.727357098	10.78427477	5.324667345	6.848713326	5.521552044	5.884057594	5.906317835	5.446259796
Zm00001d011385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011386	5.397448542	5.953003603	6.524017084	10.68789069	5.792257665	7.821500174	3.827965259	3.313536159	4.356572668	1.258806862	1.679813582	0.633975897	13.95143818	13.42383717	14.9216905
Zm00001d011387	5.807249807	6.366108763	7.217267153	20.40320231	9.989985222	13.06004108	6.471615361	7.423651397	7.675885788	1.390478281	3.559854043	0.833908418	26.09929578	26.56967229	27.24443319
Zm00001d011388	0	0	0	0	0.039809627	0	0.070607014	0	0	0	0	0	0.016904475	0	0.017464986
Zm00001d011390	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011391	0.0140506	0	0	0	0	0	0	0	0	0	0	0	0	0.015402761	0
Zm00001d011392	7.842994242	9.467379348	6.037954219	13.90515306	12.41393453	11.80162971	8.139388061	9.541919131	9.873759483	1.745034548	4.080638698	1.596971884	16.68977549	14.44076667	11.15734364
Zm00001d011393	0.145495986	0.176465594	0.113851417	0.228500503	0.511232817	0.092427217	0.560410125	0.42884121	0.299061504	3.039672118	3.146258297	1.008828914	0.34371988	0.354439575	1.13388167
Zm00001d011394	0.074300184	0.031193786	0	0	0	0	0	0.014931518	0	0	0	0	0	0	0
Zm00001d011395	1.130703557	1.217938821	0.752301117	0.40833044	0.416360366	0.303172818	0.618352085	0.390190387	0.455433314	0.225775571	0.537695581	0.240386865	0.536791219	0.191979055	0.286097963
Zm00001d011396	8.088297896	7.187556362	6.650186443	19.26823497	18.11574466	17.01438988	14.43879493	17.80836922	13.71339834	1.919615038	5.655611684	1.798822527	21.736401	20.71716691	20.57973947
Zm00001d011397	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011398	0.152410635	0.019196176	0.018941639	0	0.060247011	0	0	0.05513176	0	0.105099696	0.55736463	0.084416792	0.204662873	0	0.123345245
Zm00001d011399	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011401	20.27594731	21.42219814	23.03321353	32.00302761	26.86578956	29.12149934	37.05062566	36.55144325	38.674737	5.191402505	10.38347484	3.272111079	18.12619756	17.94796693	18.32426523
Zm00001d011402	0	0.070138369	0.034604175	0.104176191	0	0	0.130141238	0	0.103016841	0	0	0	0.062315885	0	0
Zm00001d011403	0.045156842	0.35547006	0.014030264	0.098555895	0.104126337	0.207462413	0.277020294	0.204183273	0.11138182	0.996459679	0.398609586	0.500227003	0.113696901	0.024751258	0.026103736
Zm00001d011405	0.029915173	0.113034812	0.006196444	0.186544528	0.065696048	0.134383992	0.069911759	0.048094519	0.104532163	0	0	0	0.340339728	0.256886825	0.599491049
Zm00001d011406	0	0	0	0.014647912	0.077379108	0	0.164689041	0.05664741	0.086909397	0.016198355	0.01481088	0	0	0	0.027157753
Zm00001d011407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011410	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011411	7.437821786	7.082199191	6.786748943	5.133457787	6.808915974	5.866549281	6.236211838	5.793596274	6.229120691	4.945543734	6.578399613	4.656546367	3.419387968	3.413646457	3.054568506
Zm00001d011412	86.29966412	83.36851169	102.0146929	114.4492654	167.7540371	97.84284689	108.0298349	129.1277704	102.0758109	50.98675283	67.09180632	36.72510335	66.35745952	58.94842102	77.71190934
Zm00001d011413	0.620157531	0.361400177	0.264580193	0.565645446	0.817148527	0.28349919	0.118973058	0.223214573	0.068491901	0.459563898	0.957121798	0.471659537	0.973638237	0.71027899	1.348363115
Zm00001d011414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011417	0.311812228	1.335277428	0.404744318	3.482624665	5.213336019	3.709767229	7.060343547	6.007238158	7.101374307	0.926976124	1.240780928	0.98250364	2.520034803	1.207762283	5.583705531
Zm00001d011418	77.07501276	71.15791098	75.61862675	21.43939033	38.34274641	23.677488	34.76612105	46.07024632	46.89093544	163.5377357	165.9042711	248.2399856	18.18622781	15.82350407	22.62960644
Zm00001d011419	0.036087727	0.03030175	0.082224878	0.300046984	0.499284183	0.257905686	0.231926801	0.174054338	0.237366272	0.223969163	0.098600193	0.086615417	0	0.006593439	0.027814891
Zm00001d011420	0.074340587	0	0	0	0	0	0	0	0	0.410111702	0.206240903	0.17293737	0	0	0
Zm00001d011421	0	0	0	0	0	0	0	0	0	0	0.005928427	0	0	0	0
Zm00001d011422	0.007879674	0.456525998	0.088135935	0.363605928	1.194002005	0.75298692	1.951968549	2.137745908	1.875539849	4.053528695	7.730613627	4.364372483	0.749496673	0.906987379	0.974767661
Zm00001d011424	10.64568237	11.83440431	10.05706645	8.32088379	7.009653426	8.887746678	8.441662552	7.882472493	8.191118063	7.267650937	8.41092585	7.662318085	6.82758201	6.47266128	6.717179795
Zm00001d011425	1.108753346	0.115305601	0.581525215	0.025372277	8.149125483	2.654438352	5.622096634	4.83247925	3.073514608	0.014028933	0.01282728	0	0.125211345	0.133811488	0.505691904
Zm00001d011426	2.598463911	1.358990515	2.626695189	0.750953388	15.27157551	3.094356366	10.00611277	11.62629896	9.120477115	24.60108322	16.1900827	31.2780759	1.315955653	1.382178141	2.25196613
Zm00001d011427	10.17320826	11.56808276	10.1238548	11.32976965	9.538472562	10.22308309	11.17003251	8.938832141	9.069539706	5.379436193	5.748960404	4.859102021	8.239756137	8.136958428	7.462247456
Zm00001d011428	5.435230225	4.139255979	1.959505592	0.597378215	1.323645891	0.472724897	0.45087131	0.449209824	0.664571417	1.972652253	1.484893446	0.405323839	2.531146916	2.085766227	1.569044118
Zm00001d011429	0.138093272	0.16477483	0.01806555	0	0	0	0	0	0.053781254	0	0.036661062	0	0	0	0.016805754
Zm00001d011430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011431	0.06223627	0.104515749	0.128912365	0	0.027335139	0	0	0.012507129	0.051169721	0.400559024	0.117722899	1.849957492	0.150896166	0.022741861	0.047969081
Zm00001d011433	2.393868593	3.798302142	6.025753693	0.758044489	1.472404809	0.973786752	1.262033972	1.775849799	1.170542362	3.082296601	5.306387867	2.517156307	6.320331085	6.350462592	3.983886284
Zm00001d011434	1.386936775	0.499100571	0.295489561	0.444787041	4.803695021	1.990476573	2.685624762	2.914632376	3.127730642	9.126857612	9.544388797	11.58873723	0.266061735	0.043440251	0
Zm00001d011435	0	0	0	0	0	0	0	0	0	0.192642508	0.022017707	0	0	0	0
Zm00001d011436	1.162414923	1.224373693	1.30402278	4.920045261	4.744055467	4.247146373	9.904639312	7.559999623	8.227226721	2.362180913	3.145723973	2.39871363	12.58187725	13.96069656	13.94455579
Zm00001d011437	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011438	0.721990207	0.425340819	0.549952888	0	4.91008009	0.827469901	2.612579808	4.774015942	3.001557416	6.922023547	5.594879391	4.179537219	0.013031133	0.051062646	0.053852852
Zm00001d011441	0	0	0	0	0	0	0	0	0.014597769	0	0	0	0	0	0
Zm00001d011442	0	0	0	0	0.065564536	0.015240339	0	0.029998901	0	0	0	0	0	0	0
Zm00001d011443	0.006946765	0.262484294	0.034533841	0.034654817	0.512589408	0	0.235401561	0.753859583	0.668248472	8.411884886	1.095011724	3.247421342	0.077736533	0.091383455	0.040157043
Zm00001d011444	0.033600575	0.005290006	0	0.052381474	0.088547374	0.010291325	0.058893408	0.025321653	0.025899267	0.046340732	0	0.023263245	0.24910081	0.105898124	0.208801818
Zm00001d011445	2.769150273	2.934269216	3.292559012	5.443886909	3.302447977	5.09274596	3.248036673	2.981490305	2.551623535	0.893156679	1.543156134	1.155276648	4.406979956	3.923051547	3.792228057
Zm00001d011446	0.29485565	0.244561905	0.518389104	1.820717773	4.207339406	0.969176504	4.966401176	8.766819876	7.654153101	55.65216331	42.52379012	68.21739182	0.008047633	0.070953172	0.249434173
Zm00001d011447	4.386555787	4.206274923	3.711160072	4.87934996	5.229034626	5.305418782	6.442363384	6.625317379	6.891729339	6.907676222	8.427044695	8.445755234	3.271196614	3.169156424	3.43860904
Zm00001d011448	17.61449275	18.69853748	19.76060706	33.00748169	28.7569086	33.18708671	24.93795958	25.26637601	25.592133	11.43728771	12.54754658	7.526464743	45.83880372	51.93551401	46.91822802
Zm00001d011449	0	0	0	0	0	0	0	0	0	0	0	0	0	0.202525496	0
Zm00001d011450	0.35054446	0.253133572	0.383378764	0.314772367	0.080061584	0.509631713	0.141998551	0.090171056	0.121049191	0.070907262	0.005893971	0.020710253	1.171581245	1.147713716	2.247937716
Zm00001d011451	0.327971521	0.326116851	0.536321015	1.205567568	1.774091911	0.676732612	1.81532238	2.331126739	0.787671276	20.3785126	8.315187209	13.21308259	3.901902839	4.314406777	5.987050026
Zm00001d011454	16.50783219	28.80264025	15.90034068	80.673745	26.91482063	38.90814438	30.42907444	48.58930053	17.79811497	8.933384246	6.121534803	3.417607059	977.5200614	1045.828231	888.692349
Zm00001d011455	0.05223012	0.016446007	0.210963177	0.113993495	0.206462537	0	0.106804067	0.834453677	0.161035559	5.384537498	4.462276314	9.647847629	0.862095926	0.400795442	3.049449893
Zm00001d011457	21.38425843	24.04487771	21.44372154	14.22035065	12.87318569	12.21936685	14.68731278	14.91960876	13.98156868	17.23392817	19.5762522	22.79341081	13.00605065	15.24636116	15.75863054
Zm00001d011458	4.186613071	4.892524938	4.228664738	3.144480161	2.701367563	3.816034841	3.341224776	2.931715824	2.009411107	4.027931338	3.197607085	2.713316938	2.322352855	2.45641421	2.370248061
Zm00001d011459	0.703865509	0.860948486	0.91682219	1.688135632	3.210390237	1.55053847	3.748550848	6.275495395	5.30852922	22.66319899	29.84544873	18.84049907	1.832796554	1.483850168	1.838794968
Zm00001d011461	11.50916977	34.71300284	18.02203105	99.46840323	135.219027	232.9092576	168.6289498	378.0351313	151.285936	198.3076135	236.951749	226.101127	364.2814417	269.7160792	508.1846318
Zm00001d011463	0	0.019522641	0	0.251306359	0	0.113939674	0.10867236	0.018689792	0	1.368154956	4.222007652	0.841354029	0.450977657	0.03398387	0.035840844
Zm00001d011465	0	0	0	0	0	0.030494551	0	0	0	0	0	0	0	0.006821523	0
Zm00001d011466	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011467	19.17552777	23.70074227	25.80576592	112.7376209	69.57888861	101.0978712	105.836563	87.60202053	84.71603698	2.345288538	6.630717146	3.023917262	261.4524655	225.9316095	229.559372
Zm00001d011468	0.313081693	0.56958424	0.47556526	3.861234402	0.733388553	4.134009713	3.089281445	1.300295885	2.230895663	0	0	0	58.35248363	59.9475468	62.57975465
Zm00001d011470	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.133331237
Zm00001d011471	7.177815123	6.153136104	5.995479584	5.38499464	17.28069164	9.509580516	11.0595025	13.60616831	10.33447173	2.7319248	3.199584147	1.522450147	16.94857648	15.23697313	20.05157355
Zm00001d011472	1.662717639	0.93075512	0.229603375	0	1.947443928	1.810716988	1.29525705	2.450383223	0.911374216	0	0	0.818614731	2.894320222	1.620203967	1.495144385
Zm00001d011473	0.015031593	0.042597781	0.014010981	0.093733754	0.019806329	0	0	0.01812468	0	0	0.009477661	0	0	0.481986186	0.656041128
Zm00001d011474	104.2950451	104.308842	117.9027948	44.43731838	103.7252315	45.14555498	88.04153527	118.6844238	116.9660882	245.999931	346.4182779	278.2796991	29.54822732	26.14264957	42.57197178
Zm00001d011475	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011476	0.122543273	0.067525371	0.07614857	1.404131638	0.988996034	1.379340293	0.241636189	0.230873897	0.236140378	0	0.067607312	0	0.46281327	0.293860524	0.274498697
Zm00001d011477	0	0	0.024220456	0.036457954	0.115555743	0.131318926	0.58069614	1.268934278	0.120174077	0.05375591	0.196605726	0.237474124	0.425262609	0.288414783	1.002649518
Zm00001d011478	19.05980708	16.15136309	18.46548029	11.64365012	14.18451575	9.108916857	11.91391737	12.41075004	10.94658109	4.074926535	7.054754151	1.649918352	7.249534202	6.87618008	7.39191211
Zm00001d011479	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011482	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011483	4.151424494	3.970850381	4.083298614	6.792849221	9.152276824	7.306492832	7.681116291	7.934706772	8.692055651	3.876980618	5.187215891	2.493841665	3.644787229	3.677157347	4.237372835
Zm00001d011486	216.0956018	146.4277704	208.3671502	25.74963157	42.94667111	25.38254843	47.97533987	52.21432504	48.78410117	35.83285283	55.68868075	26.78488793	1.641117154	1.032051516	2.130192399
Zm00001d011487	248.065441	249.2796275	249.4975313	298.3430818	272.2230376	296.7163217	264.1696093	260.0396638	299.6232878	165.938426	211.2138207	165.155615	33.14337926	26.53885257	38.81372677
Zm00001d011488	0	0	0	0	0	0.030676066	0	0	0	0	0	0	0	0	0
Zm00001d011490	6.703655243	7.215307545	7.439921129	13.70441772	11.40645729	13.48908075	11.87500371	8.854325931	11.79808386	6.684641436	6.335248896	6.170566498	5.07287818	5.282681843	4.264661535
Zm00001d011491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011492	10.08610095	9.759949726	8.239646963	9.175071355	8.974399131	8.512349859	9.218224531	7.944526431	8.819246137	6.964655734	7.004559746	8.198137449	6.571868982	6.705609418	5.885952488
Zm00001d011495	0	0	0	0	0	0	0	0	0.073747066	5.236895477	1.112249328	15.50041845	0.008364434	0	0.008641778
Zm00001d011496	3.203723203	4.390393162	2.654397751	34.69087624	28.71331705	24.01902073	28.51219977	33.83127744	29.81946587	2.556594642	4.586286745	2.745405776	20.16883235	19.62542201	9.655871927
Zm00001d011497	0	0	0	0	0.037528867	0.139576101	0.066561821	0	0.035125881	0	0	0	0	0.01561134	0
Zm00001d011498	0	0	0	0.071682396	0.010819133	0	0.038377987	0.009900538	0.070884661	0.317079155	0.10354273	0.318350173	0	0	0
Zm00001d011499	0	0	0	0	0	0	0.017516269	0	0	0	0.359163845	0	0	0	0
Zm00001d011500	12.11909969	10.65402745	12.15433924	24.48257966	35.55304696	29.73325116	35.01056491	39.53788333	32.2618764	25.74299102	24.30069396	12.17363191	32.13491727	30.34917687	33.16443977
Zm00001d011501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011503	0.540670268	0.778258518	0.534814641	0.701822974	0.697873369	0.270365329	0.464159911	0.505574703	0.204121344	0	0	0	0.493899911	0.29030289	0.727143897
Zm00001d011504	29.91639569	30.14014386	34.31946737	48.93096092	63.90606912	49.67077217	51.55945223	58.56882037	55.10700921	24.17969177	44.23569341	20.39887508	40.7933895	40.97813076	44.27157797
Zm00001d011505	0.759512996	0.239152357	0	0.47361583	2.50192449	1.861014682	1.331236412	0	0.468345083	0.523746819	0	0.210338507	1.062399288	1.248907225	0.658575503
Zm00001d011506	0.23507099	0.249324448	0.138385383	0.54005063	0.260834119	0.197048613	0.303594186	0.402786152	0.625590355	0	0.06240675	0	0	0.108502347	0.143039023
Zm00001d011507	4.781564573	5.287269846	3.68270241	5.571401983	9.110456075	4.125402004	11.93522301	10.31289813	9.772954544	1.733782573	5.29368584	1.367718372	3.994202643	2.28863787	3.477797729
Zm00001d011508	0	0	0.020299462	0	0.010760966	0	0	0	0.020143875	0	0	0	0.027416756	0.01790548	0
Zm00001d011509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011510	33.53663828	30.71668341	39.82737142	75.06923139	67.78673899	96.63693584	52.19456205	44.20318192	55.58346083	28.7201905	37.07796468	32.67165104	55.53881092	55.54381705	59.14819531
Zm00001d011511	0.13330564	0.279831577	0.515425995	0.73890227	0.429366023	1.106930726	0.761530689	0.946557963	0.584543376	0.081711313	0.410917682	0.098446625	0.530393924	0.308505793	0.376736582
Zm00001d011512	22.20380474	23.79047511	21.05117742	6.521988061	6.506403353	6.611807756	6.968045137	6.660041901	6.708797681	7.957289084	11.84185803	7.781348046	8.475717507	8.426193641	8.563323707
Zm00001d011513	10.58571238	14.27739572	14.7842251	27.87229161	8.544072134	19.21497659	5.824159304	6.261781066	3.863846936	1.401022741	2.933171404	1.093760237	71.12763232	77.49469331	68.31623216
Zm00001d011514	24.38684363	22.55818513	27.82017673	40.42990327	46.4388217	44.26041119	35.11437028	43.17747538	35.68136029	30.62903878	35.11824266	23.77966503	46.10648196	38.29982156	48.71076278
Zm00001d011515	0.115438646	0.24924926	0.225448911	2.509192673	0.369403568	3.798355659	0.11562005	0.477232219	0	0	0	0	28.67786044	26.61121498	27.13108634
Zm00001d011517	5.376712739	5.889186702	5.0364735	12.68512138	11.49180547	11.4094372	13.53112442	13.88840664	14.14890206	4.9435822	6.644891024	4.365261683	11.09323697	12.38895945	12.28988995
Zm00001d011518	8.819466476	9.362202363	8.842521291	15.88585409	15.38586487	16.41120345	12.07410077	12.25456667	13.45868219	1.628952859	3.531808781	0.720787518	15.95544557	17.91758674	16.95874508
Zm00001d011519	8.474566056	8.475223884	7.228478186	8.267504404	7.058060667	8.847982083	8.481766498	7.916848187	7.633203198	1.791765434	2.688477907	0.996340297	7.969858517	7.770978288	7.891352078
Zm00001d011520	0	0.3219932	0.060518788	0.425115545	0.240612507	0.178975588	0.227602307	0.66055016	0.075068669	2.249826051	0.138164542	0.188798945	0.163475153	0.12010862	0.281492646
Zm00001d011522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011523	0	0	0	0	0	0	0	0	0	0.073940727	0	0	0	0	0
Zm00001d011524	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011525	26.03841864	29.86635901	24.56021747	17.66306872	18.8551488	15.71564479	18.40293982	22.46599712	18.21097485	14.79358691	12.65785698	11.27790662	16.7838038	16.0431377	17.57294928
Zm00001d011526	6.848720379	5.930367204	5.352326089	7.103329563	11.7291499	8.230084736	7.737333167	8.363329459	8.284770149	2.505952831	4.241116846	1.296706656	7.663938019	8.321792039	9.877370098
Zm00001d011527	4.110137093	2.942358838	4.185173252	2.199606979	11.1847633	3.563376282	9.346273899	12.46745169	9.959797212	19.11804307	15.77665465	10.83699535	1.592757348	1.345484358	2.223903396
Zm00001d011528	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011529	0.241663226	0.782680441	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011530	2.771196065	3.490331698	8.265721503	9.90753115	8.520067183	5.658490586	4.533399674	12.029154	9.797272821	10.19182999	13.97826858	9.004762036	10.75033225	10.32880029	17.72814056
Zm00001d011531	20.46012303	21.54893524	20.06024957	29.46315978	28.09387555	19.46432348	25.38969447	29.1857523	25.46351969	16.4980248	24.90015597	18.27233617	28.7968307	24.14147423	25.2676898
Zm00001d011532	9.304135034	8.61862929	8.495324878	9.507529676	11.62816908	10.22026172	11.4827094	11.02169668	11.95361906	7.81030838	9.306597103	6.325570357	7.91738541	7.823743826	7.499996327
Zm00001d011533	0.011336015	0	0.126795894	0.197929004	0.179242352	0.305539724	0.105969068	0.259704418	0.0279609	0	0.028590157	0.012557523	0.050741459	0.136696313	0.117953821
Zm00001d011534	45.68672309	37.18078416	55.59551104	44.19087173	63.42710697	40.26091165	46.36943822	59.77417127	47.16815238	6.841153141	20.80607551	4.623724352	25.43553127	19.89409739	26.69853432
Zm00001d011535	0	0.040137459	0	0	0	0	0	0	0	0	0	0	0	0	0.110530154
Zm00001d011536	27.28848469	28.79460483	31.53249905	22.01542173	20.68125855	20.75040556	24.12783863	25.74364741	23.71777173	29.72482934	29.4422169	31.93324747	18.3038917	14.40989896	15.61857639
Zm00001d011537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011540	0.239846209	0	0.223561181	1.570410384	0.395040709	0.587688847	0.700650743	0.21689995	1.331086026	0.413484331	0.075613441	0.066422686	0.603890122	0.78878351	0.415942423
Zm00001d011541	6.832069676	6.892353557	6.789206182	5.285228237	5.658737778	5.574352228	5.905245902	5.631669701	5.876795076	7.266681346	7.515042163	7.34034454	6.224215361	6.426654926	5.883775743
Zm00001d011543	148.7031506	145.8231497	161.9421305	75.94429837	26.00750508	61.4134845	19.33620889	15.282409	10.78364554	26.35755867	10.48758429	19.30907496	40.47741287	34.37617137	37.40708856
Zm00001d011544	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011545	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011546	0	0	0	0	0	0	0	0	0	0.035508259	0	0	0	0	0
Zm00001d011548	0	0	0	0.158606231	0	0.285644114	0.916385995	0.715601697	0.339822479	0	0	0	1.73146377	1.347658029	0.58812324
Zm00001d011550	0	0.056774747	0.008003132	0.200779203	0.322433604	0.165676766	0.63959545	0.427056897	0.579750767	0	0.064964162	0	0.410747685	0.360024127	0.610492977
Zm00001d011551	0	0	0	0.084094549	0	0.027536592	0.059093108	0.013550675	0.048509232	0.030998579	0	0	0.03772762	0.03695903	0.058467862
Zm00001d011552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011553	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011555	0.204753503	0.73398834	0.371915144	0.667863797	0.103766454	0.578887055	1.085847212	0.531754717	0.718704667	15.05349728	6.971419894	31.70198717	1.286629184	1.623003859	2.512905605
Zm00001d011558	1.962378075	1.702673241	1.409112898	1.876334485	2.844293105	3.57955934	1.885387455	1.656326893	1.774781368	0.270644289	0.879865497	0.144922225	2.147164876	1.601469552	2.041899167
Zm00001d011559	1.103592996	1.018519433	0.827658652	1.554330031	1.504288629	2.098012376	1.10056288	1.53716708	1.267171666	0.157452071	0.431896399	0.337244204	1.203017482	1.314090274	1.495887572
Zm00001d011560	2.783931222	3.050159816	2.615325103	4.155604126	3.995570478	3.925148316	3.786766742	3.383842648	3.745662553	2.502195823	3.106409362	1.700856843	4.30798552	4.787721718	4.424886192
Zm00001d011561	8.099829052	9.274331513	6.84697826	8.32039439	8.732219779	10.11904089	11.43429277	10.05537473	9.037449314	6.680575909	6.723659061	4.550191093	10.18579626	9.278059644	10.83123786
Zm00001d011562	0.69112083	1.523321175	0.402622032	0.942742411	0.832393835	1.210541541	0.555207603	0.514323579	0.359582481	0.223399117	0.163411039	0.215322832	1.879087271	1.385044031	1.279696475
Zm00001d011563	0.468248963	0.401758791	0.645471887	1.19856115	1.49531712	1.480517064	2.413189548	2.17704485	1.951834789	0.468129074	0.417717329	0.219713451	1.297379256	1.396474785	1.607530991
Zm00001d011564	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011565	43.67528567	45.02948245	40.27225374	33.15848207	45.33316845	40.09489171	43.14970888	45.2250321	40.85468277	57.39789714	55.10167527	52.83572662	27.25325404	27.89288289	28.17106367
Zm00001d011566	0	0	0	0	0	0	0	0.145024014	0	0.442343355	0	0	0	0	0
Zm00001d011567	0	0	0	0.038487968	0	0.018904212	0.07212116	0.018605413	0.019029823	0.085123637	0.233497037	0.085464856	0.017266986	0.08457611	0
Zm00001d011569	91.1240994	83.01610557	115.5385883	211.9403621	129.1798254	227.1293551	117.7098618	73.77977851	103.574246	4.406697374	4.535647642	1.827769097	301.5748599	307.2311773	273.6545227
Zm00001d011570	0.34545775	0.310174085	0.212542529	1.373568852	1.910901947	1.466649049	1.31091982	1.64967688	1.219079871	0.533050303	0.560716136	0.371315613	3.077316486	2.703413888	2.823455046
Zm00001d011571	9.864054854	9.336023662	10.69980792	9.658165853	22.99236937	13.85160295	16.12649679	19.17962978	15.57988454	9.884892496	12.60255923	7.779862252	8.181819326	8.773968479	9.103347457
Zm00001d011572	3.282668677	2.636693421	3.297969399	5.276849846	4.888735273	5.6472631	5.638853301	6.067585095	5.151459218	1.884133057	1.759928663	0.800223853	5.829066402	5.026155748	4.982637378
Zm00001d011573	4.028041736	5.313715855	4.756383216	6.426698862	6.591403712	7.519265051	6.326551885	6.128658699	6.98697911	2.327421574	2.508077286	1.591216216	5.721500235	6.243618485	6.654467535
Zm00001d011574	0.059182831	0.149081989	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011576	0.816834731	0.541477035	1.148738899	2.680844322	4.333522042	4.029272353	6.178946367	4.613557434	7.449337833	0.919027437	1.002948097	0.476238129	2.694084232	3.275435929	5.293455929
Zm00001d011577	0.621752211	0.119768115	0.672717005	1.569090006	1.918008245	1.469693778	2.444517585	1.481743481	1.587712385	1.008822123	0.17525812	0.056720496	3.167757491	3.287653048	2.756926022
Zm00001d011578	13.34544628	14.0706139	13.25462083	12.12645315	12.22257323	11.73455228	12.85669828	12.13117287	12.74759018	6.686622084	8.530296946	5.098430435	11.40762743	10.57783294	11.30307315
Zm00001d011579	2.594415663	3.418757586	2.730259838	10.642999	6.195791147	8.88892272	6.948193057	6.335066285	7.122038793	0.571933102	1.737384197	0.698562182	11.07217676	10.78650081	12.9014099
Zm00001d011580	8.838905629	8.36274153	7.901044833	5.296323958	8.665525341	5.873809667	7.763426153	8.966089164	9.077090592	41.54466293	27.40314992	44.69573361	6.119419898	5.902385578	6.244391702
Zm00001d011581	36.48900911	35.99376511	38.62138559	103.3222985	135.4971183	100.0016712	108.6613275	137.7493049	105.3562472	34.93417869	46.74891197	19.04962187	138.1528934	143.8893274	203.7264873
Zm00001d011582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011584	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011585	22.40020122	32.45630247	29.70601898	29.15601222	10.2367428	19.14497678	9.005320958	9.09964395	6.149998244	2.807391922	4.853615971	1.782270107	49.38706078	54.39323898	51.86731698
Zm00001d011586	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011587	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011588	11.24357015	11.50969631	9.084028816	13.42352162	12.68251771	13.07367292	10.97020805	10.48718566	9.574253674	7.512918759	11.54855221	4.992249842	12.12546267	13.06844981	13.61520866
Zm00001d011589	0.26806341	0.385859265	0.571114278	1.01887103	2.035178913	0.985243067	2.640099103	2.062473477	1.668725338	0.96827143	0.627782184	0.707020192	1.457004738	0.657687838	1.977571258
Zm00001d011590	0	0	0	0	0	0	0	0	0	0	0	0	0.097754311	0.063841903	0.033665201
Zm00001d011592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011594	0.162752785	0.068329245	0.033711607	0.033829702	0.285934227	0.13292962	0.12678442	0.327071354	0.03345322	0	0	0	0.39460545	0.148679432	0.031360738
Zm00001d011595	6.976517537	7.114873075	5.937730853	6.235822345	4.89862432	6.171649767	5.359183197	4.439065852	4.994677122	1.410194253	2.712474911	0.920748064	4.260044346	4.375898839	4.514878807
Zm00001d011596	27.75775441	36.41508722	36.6238307	85.08511266	44.88142455	77.93536028	29.65923555	27.96138169	28.39434541	11.59243263	11.86680837	6.83612927	163.0698999	179.7151699	172.1354721
Zm00001d011597	0	0	0	0.019196318	0	0	0	0	0	0	0	0.003410127	0	0.003374665	0.021354396
Zm00001d011598	0.481725013	0.714256995	0.583532574	4.205505775	2.675563853	4.064017788	1.417927098	1.095528563	1.406288626	1.79129822	0.369096119	0.499858861	0.552712993	0.274068847	0.789585616
Zm00001d011599	0.752516808	0.502913067	0.217584147	0.746974416	0.667779442	1.046115195	0.262000247	0.16665869	0.21212844	1.270830296	0.112324438	0.047634513	0.082490495	0.053873329	0.060368188
Zm00001d011600	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011601	11.05323913	11.07812286	11.76631391	12.50925729	12.15628944	11.39681593	10.16086568	8.89540633	9.657466777	1.17041381	2.468701697	0.837061406	4.821124605	4.590371249	4.408423774
Zm00001d011602	6.39783865	5.954187997	5.184469303	3.615008697	4.335137884	3.770842863	5.045604238	5.84790712	5.129990996	57.7969211	40.45998382	78.61832726	4.179931624	3.528060541	3.928132967
Zm00001d011603	0	0.04460873	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011604	8.807052577	9.447154931	8.086393836	9.866188023	7.935026227	8.064079288	10.19941966	10.19554166	7.931167843	3.141837227	4.85555383	4.454592161	8.777394067	8.575556738	8.262276198
Zm00001d011605	12.87581667	13.96301908	16.74351303	14.73548016	16.3107281	17.56121127	15.62629505	17.16375316	17.14653926	15.70097737	16.71744444	11.21601407	14.40845231	12.97046922	16.66794727
Zm00001d011606	41.64468179	42.14508404	39.07032586	19.11586355	17.68475703	19.61581052	21.29722253	18.68759918	20.61348831	28.4636252	25.99241121	34.46800937	16.68130328	14.5833936	15.04591726
Zm00001d011607	1.069258519	0.897823374	1.55035724	4.794368069	2.415265653	1.65308008	0.743707493	1.289282386	1.601269223	0.807564928	1.284161235	0.253816299	1.082578939	0.474445203	0.529803757
Zm00001d011609	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011610	1.052319375	1.044595031	1.028896707	3.501605883	4.668953413	3.579994975	2.903884255	2.175696566	2.610267704	2.338924151	1.585662691	1.300723449	4.906579881	3.853444993	4.088065548
Zm00001d011611	3.728518342	3.685377197	3.741915945	2.88034366	3.034546068	3.085261276	3.727843125	4.417078731	3.536223291	7.108260336	7.050615102	8.708646567	6.610754853	6.386680898	8.281928729
Zm00001d011612	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011613	0.246011921	0.18812499	0.196549933	1.44641544	1.944940786	1.506991323	0.287464932	0.264852124	0.184207706	0.157527964	0.232671694	0	0.442438778	0.558637165	0.660268499
Zm00001d011614	8.178033303	6.949825125	4.33978042	4.991796726	6.771473705	4.368900129	7.621729435	7.139928244	7.384052721	2.760082634	6.3247455	3.42116849	0.995327333	1.200756585	1.133067251
Zm00001d011615	0	0	0	0	0	0	0.005550673	0	0	0	0	0	0	0	0
Zm00001d011616	0.083216206	0.044919051	0.118195824	0.014826235	0.046992669	0.101951239	0.138911626	0.129008318	0.117289899	0.114768868	0.149911866	0.052676078	0.146333954	0.156384905	0.12369766
Zm00001d011617	2.345124944	2.540503728	2.369567928	3.763271044	3.702063608	3.302869963	4.102826976	3.748055877	3.601216506	4.287033835	4.698057656	4.479625512	2.780563211	2.98384677	3.368451752
Zm00001d011618	0	0	0	0	0	0	0	0	0	0	0	0	0	0.057256492	0.060385146
Zm00001d011619	2.924673958	3.08176567	2.567575193	2.679632481	5.359181437	3.781210119	3.866708234	3.834084273	3.620227487	1.278465297	2.79553126	0.65672049	2.906925484	2.351424799	2.903616987
Zm00001d011620	0.227853899	0.135939235	0.074520394	0.134606604	1.422146552	0.778687722	1.569457665	0.997739772	1.552933697	1.256992366	1.224937746	0.518096954	0.56363078	0.35495258	0.762561109
Zm00001d011622	10.3586754	9.660167142	8.616978878	6.516704141	8.22277411	7.866212608	8.421660335	8.119990892	9.129969263	15.50970241	16.3069762	19.299431	7.815036627	8.132536921	8.036106706
Zm00001d011623	3.944137661	5.118699573	4.951466157	8.425376347	7.988601004	6.986967401	7.053217483	8.033331494	7.542820813	2.517660148	5.158516985	2.228850146	5.218803519	3.622561307	4.929687975
Zm00001d011624	13.58670128	17.46094512	11.9001403	23.11692511	15.66466315	20.53392759	18.49812485	21.53442205	17.65653066	1.430809185	3.333621931	0.766157126	18.81575427	17.52261064	17.84039946
Zm00001d011625	10.8003299	9.320869135	9.697202763	24.91207813	41.86533478	23.12878948	27.36519832	31.85255764	27.97838028	13.51988766	12.00050227	12.080094	6.061456832	6.366859565	7.288129386
Zm00001d011626	11.74100663	6.708452106	11.83212977	19.65656528	33.25487915	17.2292028	23.02954201	29.41642256	32.12787609	5.484329748	10.85269607	6.205655829	6.496199467	7.000244318	5.855868803
Zm00001d011627	0.457341159	0.329155932	0.507486552	4.583379002	5.595702086	5.643076777	3.301848019	3.170833682	4.129494282	0.202740704	0.144180468	0.126655445	0.475223767	0.680408237	0.623168218
Zm00001d011628	0.699487528	0.409039025	0.783945009	2.032934829	3.859524266	2.303101312	3.991884792	5.723225734	6.346728437	10.33616381	10.3722712	15.46261881	1.251000642	1.280286803	1.400789192
Zm00001d011629	1.371609967	0.879919221	1.481603776	3.517147093	6.832259621	2.819005362	5.886648777	7.403681005	8.276072609	3.739154506	5.188932518	4.593721996	2.940649506	3.021266423	2.7121084
Zm00001d011630	0	1.534363638	0.33644851	3.657627203	2.913131882	2.211106553	2.003444898	3.209832928	4.229016989	0.062227345	4.893162884	0.549795702	1.413727369	0.593540067	0.156493189
Zm00001d011631	0.306529909	0.283122073	0.114286882	1.567392299	1.211694372	1.752525037	1.026783242	0.924013241	1.423937069	1.620561906	0.502507264	0.769669156	0.537393003	0.593650968	0.413455473
Zm00001d011632	4.63730822	4.658418449	5.464129147	7.334374722	7.875776389	8.600640034	8.643661776	8.068067166	9.023888363	2.722008116	2.640613061	1.270918585	6.571912214	6.798628767	7.02171346
Zm00001d011634	12.36253461	11.79720181	12.9535552	11.54748258	12.81601197	12.00211315	14.02508762	14.15685583	14.5028459	15.05812393	14.68777523	12.39508643	11.84656929	13.28581101	11.95838021
Zm00001d011635	0.77950018	1.737001331	1.713969054	1.383456767	0.158016284	0.661149953	0.280260297	0.325349925	0.332771506	0.248090598	0.264647044	0.066422686	1.610373657	1.183175266	1.178503531
Zm00001d011636	3.609461292	3.765643844	3.072608157	9.465234498	6.843581868	7.936271021	8.689116919	9.57481519	8.453847604	10.2468373	9.691381818	12.07303715	13.05380927	12.95595345	11.20440042
Zm00001d011637	0.013403171	0.101288057	0.049972499	0	0.105963861	0.098524307	0.109631234	0.032322346	0.082649132	1.478814548	0.912698713	1.974707397	0.179982938	0.587721047	0.790290603
Zm00001d011638	2.915074964	1.994247836	2.576689188	3.516128861	28.89142033	6.640721228	24.30964762	35.34250254	29.38695651	56.04253062	63.97480942	63.7622734	1.709530074	1.516021606	2.299167646
Zm00001d011639	5.634613652	6.602018765	9.429950111	5.417418511	21.23801124	8.415820088	14.05995502	18.10847467	19.61512265	2.445871845	3.227166769	1.72829867	0.28888887	0.123045047	1.271732006
Zm00001d011640	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011641	0.038912431	0.005445594	0.037613709	0.053922106	0.062666799	0.07415808	0.060625567	0.104265631	0.090647435	2.075110737	0.507054841	0.665739336	0	0.033177801	0.004998676
Zm00001d011642	17.03454432	16.77182562	15.54315477	63.99056926	88.28020617	90.21639601	49.91135845	48.62709137	46.57163764	5.600631133	7.068737185	1.75246953	116.6662525	106.1986495	89.31904005
Zm00001d011643	1.182489125	0.770803652	0.923871952	1.901650207	5.207343901	2.185774452	3.567471175	4.369157118	3.036070099	2.040943598	1.068226308	0.593671659	0.634537723	0.678465533	0.667569705
Zm00001d011644	0.615016555	0.272630081	0.623431733	1.448343157	24.19352808	6.562426991	18.74503989	20.84267339	18.17823942	22.01553103	9.228678451	12.41161065	1.749394354	1.499065319	4.528430701
Zm00001d011645	0.098638051	0.124234991	0.098070128	0	0.311928248	0.410873371	0.115258564	0.071361023	0.267625762	0.217661016	0.223894345	0.043706703	0.33113744	0.086504397	0.250885906
Zm00001d011646	10.80326052	11.05382645	10.32191119	9.046921887	9.619210886	10.52552352	10.19618169	9.786184163	9.418187683	16.96417719	13.06114625	15.44250842	11.44450107	10.92092728	10.20498294
Zm00001d011648	16.03593615	18.29214079	15.58666049	10.17279044	10.19271423	10.81421557	11.54484015	11.16275291	9.599106369	11.22314612	8.233604792	7.720660498	11.94529619	10.46353364	14.83178443
Zm00001d011649	14.44811624	18.48384205	13.64668265	51.10324654	61.95618085	64.16438146	67.50835461	76.97287718	65.89936638	66.99168253	69.29398099	60.913332	55.79782904	55.96973834	60.22200607
Zm00001d011650	40.52206679	35.03333948	43.54588382	74.07272975	95.12711407	80.13174005	42.51118435	46.94518925	40.11054986	49.81027839	48.23823796	37.43152653	41.55788617	37.87142738	52.20508883
Zm00001d011651	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011652	15.81871668	15.97373645	14.21316715	13.09301643	13.17259457	13.7970483	13.80939487	11.53297819	11.73651039	5.99322798	7.761708288	5.10925181	9.450315038	9.099001174	8.415943661
Zm00001d011653	0	0	0	0	0.062985512	0	0	0	0.353715168	0	0	0	0	0	0
Zm00001d011654	0	0	0.074357329	0.062181509	0.354758659	0.268767985	0.384514675	0.492968815	0.233660129	1.402770474	0.389814589	0.784281873	0.145062835	0.120244897	0.103758066
Zm00001d011655	0.455707797	0.418516625	0.530957805	0.011840396	0.362779051	0.011631342	0.088749094	0.26329244	0.011708627	6.677771943	0.598606409	2.545095937	0.053119964	0.01040756	0
Zm00001d011656	1.194667376	0.655267346	0.478947139	0.060078118	7.654936834	1.42822057	5.482555034	4.716465728	3.279405741	62.6503066	12.81751736	27.37513425	0.064687314	0.052807916	0.089109582
Zm00001d011657	0.01264684	0.127429933	0.062870119	0.06309036	0	0	0.014777833	0	0.062388244	0.017442077	0.015948071	0.23816312	0	0.01386391	0.058485891
Zm00001d011658	15.78774347	14.70627561	16.51239443	12.49082816	15.34513687	12.12140896	10.72089057	12.32055985	10.54088667	7.653686849	10.61209442	7.628276526	7.705936168	6.061363065	7.504833731
Zm00001d011659	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011660	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011661	0	0	0	0	0.048101085	0	0	0	0	0	0.046034351	0	0	0	0.010551276
Zm00001d011662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011663	1.089846234	1.155592702	1.209567947	2.149446704	2.117312739	2.428220491	2.369275039	2.096458252	1.869212635	1.845639514	1.732296367	1.094976878	2.127162089	1.900450594	2.191833042
Zm00001d011666	0	0	0	0	0	0	0	0	0	1.086175087	0	0	0	0	0
Zm00001d011667	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011668	0.582770978	1.155151008	0.724269486	1.763399821	3.008603538	1.287494434	3.23738834	3.870550057	3.157647353	0.882793381	1.927587933	0.45507199	1.496713462	1.392911203	1.645748426
Zm00001d011669	0	0	0	0.017292262	0	0	0	0	0	0	0	0	0	0.182396187	0.432816355
Zm00001d011670	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011673	0.167151509	0.033241254	0.393605786	0.098746158	3.48917037	0.301786165	1.860647032	1.994251281	2.647325103	0.084931917	0.676725701	0.009745413	0.315028051	0.135016997	0.355986758
Zm00001d011676	24.43686499	24.31031652	25.09907194	19.91066939	28.91753348	20.73267427	25.99875176	28.71454773	29.10047316	22.17962785	34.88908367	21.58765751	14.55416722	13.76763434	15.83042213
Zm00001d011677	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011679	0.087467907	0.121182768	0.086964298	2.14899774	10.61469077	4.704330779	12.14210256	10.5571853	13.67819345	3.944688134	0.750038894	2.790517776	2.25122613	0.978030994	1.739347201
Zm00001d011680	5.828622202	5.610675524	5.748397109	12.44704974	11.75061165	12.60889723	10.18620221	10.8352492	11.45603647	8.903695924	12.96218283	9.391968847	11.91797134	10.87063817	13.92628198
Zm00001d011681	0	0.765287543	0	0.075778533	0	0	0	0	0.074935213	0	0	0	0.067993554	0	0.140496107
Zm00001d011682	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011683	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011684	5.086862528	5.419212765	5.42543982	6.230930169	7.73599311	6.331884676	7.368818405	7.070753785	6.836004693	11.82642605	8.480546151	11.57158948	5.025736342	5.022839134	4.866844942
Zm00001d011685	0.617766999	0.752776413	0.436938091	1.722555738	1.211071164	2.178248632	3.069375358	2.797865928	2.700640862	0.817368291	0.753689892	0.350512663	3.34409886	3.606322846	4.360824711
Zm00001d011686	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011687	0	0	0.007571591	0.007598115	0.01605513	0	0.042713468	0	0.007513557	0.117632975	0	0.033744146	0.109080569	0.053429186	0.443746061
Zm00001d011688	12.48563933	12.61526532	12.52135686	12.76768749	15.14875216	14.18764197	15.37125369	16.82843904	16.55100177	16.75839048	21.94220979	17.95635388	9.70541317	9.416014457	9.401585948
Zm00001d011691	1.630624271	1.726180924	1.230846133	1.711754214	1.826957769	1.691336334	1.377020191	1.078373352	1.601407072	0.40011099	0.461714506	0.199472198	0.926913449	0.83784439	0.881313391
Zm00001d011692	11.41369529	10.32873682	10.72681574	13.42275279	16.14606017	16.47898484	12.35534624	12.53421833	13.85610799	6.429776617	8.474280592	5.54828394	9.599781215	8.679041913	8.691982674
Zm00001d011693	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011694	0.379756498	0.043482247	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011696	36.14177113	38.15008095	35.90543543	47.4039009	44.18775563	42.77336809	47.36020492	40.02497037	41.92771162	22.80216801	30.9780216	16.78861867	77.61331782	78.60914026	69.8329515
Zm00001d011697	17.15549979	15.52098798	16.77826663	7.234481806	16.27501881	8.25825265	13.00174229	13.45080942	12.25893255	15.71240457	19.89767704	14.37663696	3.006589985	2.362516167	2.568444461
Zm00001d011698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011699	3.662632877	3.036422917	2.724459063	3.07388605	4.380149075	3.613996748	3.656890386	3.95408847	3.663864099	6.129386651	5.052998644	5.095674958	3.183706957	3.020358327	3.375830617
Zm00001d011700	0.696020043	0.674338323	0.537435826	0.791000501	1.131462282	0.817400032	1.407633622	1.162027027	1.135202452	0.621964139	0.807591186	0.472192365	0.633695011	0.783318223	0.847547687
Zm00001d011701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011702	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011703	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011704	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011705	28.1442239	27.7405876	28.04132207	27.61056644	25.29300826	22.7314177	18.92440957	17.18294045	20.11385308	1.398243494	6.907686943	0.785009094	12.32913771	12.63933804	13.40174985
Zm00001d011706	1.791437432	2.055481167	1.960102296	3.961903883	4.395945622	3.089141921	3.778993687	4.199960985	4.901107103	2.312618541	3.493845346	3.160252694	2.877365288	2.44182189	3.036144691
Zm00001d011707	0	0	0	0	0	0	0	0	0	0	0	0.006834103	0	0	0
Zm00001d011708	8.766355476	6.5371431	9.587026771	6.517547002	19.32993716	12.1057002	21.46651279	18.94684028	18.93910528	5.473205506	8.15323015	4.534420733	20.39806633	16.78570415	15.30060346
Zm00001d011709	18.92551866	23.14461187	22.44048081	21.97359876	13.43281001	16.22700989	14.10084049	13.90152528	14.22554967	53.15407217	36.32534223	25.10189062	38.93035382	44.63485821	44.6426669
Zm00001d011710	24.19764726	34.29123894	23.7398642	17.63121934	44.41115805	15.60755124	51.61624633	74.96099242	70.60189906	472.8379589	427.5633294	347.5464146	18.80141257	15.86471286	30.18085308
Zm00001d011711	0.926007224	0.699785715	0.753280038	2.204763347	1.996609692	2.640257282	3.87566857	2.13160296	2.450159992	0.30186393	1.019105295	0.373014101	0.678260826	0.535245954	0.291979287
Zm00001d011712	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011713	2.159273746	2.442141876	2.17286138	3.41587975	2.9357439	2.878936541	4.577018998	3.70380834	4.112016305	4.986309144	5.065564781	5.111009376	3.680393967	3.446127547	3.215353769
Zm00001d011714	0	0	0	0	0	0	0	0	0	0.009166206	0	0	0	0	0
Zm00001d011716	0.359944725	0.528910332	0.335505273	1.799786339	3.473661716	2.057913846	2.398951624	2.246410895	2.437403909	0.436668484	0.592594077	0.317507566	0.898817769	1.132602359	1.04806945
Zm00001d011717	7.154862807	7.332253586	7.281707039	15.76203892	19.32530466	13.89625798	21.43875783	20.28848766	18.041579	14.52965763	14.46917206	13.27212866	14.96231788	11.34309694	13.83008556
Zm00001d011718	20.46443416	21.54220507	18.70998997	25.52235454	20.35264818	22.61732449	26.77214918	21.82707166	20.95682171	9.233943918	12.04733258	6.852918923	36.30758441	36.63381708	35.2858153
Zm00001d011719	1.0099755	0.916088023	0.93341722	3.22417554	3.409012279	3.397286741	3.351089838	2.774011451	2.888477844	1.226644278	1.991419951	1.053121755	1.289439714	1.250171118	1.316198894
Zm00001d011720	9.956974866	9.865940195	10.86964927	9.147154014	10.54459557	9.911888889	12.04894196	11.72215326	11.02620595	42.15308611	34.20281532	33.45453745	9.035903406	8.975625123	9.843270756
Zm00001d011721	0.279998558	0.383325238	0.191642829	0.92108368	1.481103652	1.32740228	1.228104117	1.23791993	1.281171946	1.298407074	0.593595812	0.067428195	1.802767661	1.903944051	2.139344109
Zm00001d011722	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011723	0	0	0	0	0	0	0	0	0	0	0	0	0.04199053	0	0
Zm00001d011729	0	0	0	0.006463294	0	0	0	0	0	0	0	0	0	0.005681155	0
Zm00001d011730	6.218918374	7.227715682	7.131877676	5.991037852	7.424514385	5.789823454	7.342660098	6.778483918	6.853049422	3.223057348	4.780665202	3.178448552	5.317444641	4.739442802	4.548111165
Zm00001d011731	0	0	0	0	0	0	0	0	0	0	0	0	0.078133553	0	0.048434562
Zm00001d011732	40.82204895	43.66698534	46.67664949	45.42993864	59.38680206	50.39610365	51.72413328	55.9545113	54.92243397	37.09302238	48.23134077	30.98934918	54.38134014	53.38553145	57.8610896
Zm00001d011733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011734	10.38886307	27.61457147	9.74289007	26.92655034	29.75015667	70.86171288	56.19120968	62.22955638	14.07000334	379.6908059	80.23167747	241.3391671	255.5820653	314.4276777	348.3542031
Zm00001d011735	12.46968925	14.69056794	12.29227072	1.26094504	3.456034601	2.064469663	23.98793844	29.96520471	14.81837819	33.70841264	20.2148037	7.953636155	40.32061503	48.51060861	61.2581098
Zm00001d011736	0.053092171	0.044579857	0.010997184	0.320035551	1.609004643	0.596247422	1.096008231	1.365697551	1.14585399	0.951897131	0.424022559	0.450900411	0.287157244	0.300707759	0.675199739
Zm00001d011737	0	0	0	0.076507173	0.473441096	0.139576101	0.522254285	0.570613715	0.453934465	0.688928508	0.419945419	0.252406209	0	0	0
Zm00001d011738	0.193488102	0.185502209	0.502469575	1.476672931	2.123306259	1.602736979	1.643376763	1.577404202	1.524347495	0.378372227	0.830310335	0.329503669	0.668947993	0.854765401	1.14186475
Zm00001d011739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011740	7.563735142	6.789037343	6.307339775	8.701279068	6.286234443	4.300452846	3.568306186	4.62558972	4.047573724	3.387284674	7.208401247	5.152457422	10.8111373	9.983315623	8.443168291
Zm00001d011741	38.46080808	32.61062019	46.77629902	58.94487304	116.7775809	55.10122654	72.55510128	89.57082643	72.1385241	6.560730562	18.66479216	2.673445352	20.82476057	17.21962696	29.40203612
Zm00001d011742	4.219678931	5.187766516	4.077029845	6.111465809	5.891069896	6.518919698	6.280705125	5.769538679	5.528273309	3.56147837	4.628608941	3.781239163	5.107688884	4.789078859	4.750186896
Zm00001d011743	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011744	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011745	0.082623473	0.044599101	0.117353937	0.040481733	0.447138674	0.032536626	0.179298839	0.21348236	0.487653072	0.113951391	0.628866202	0.042494462	0.158499976	0.18761913	0.143286015
Zm00001d011746	0.281397611	0.584795198	0.250633942	1.637752167	0.333704371	0.827401382	1.934517133	1.000939325	1.127884214	0.155237479	0.337108844	0.207813002	55.00655227	57.44373416	53.89158359
Zm00001d011747	0.155575919	0	0	0.072760327	0.025624262	0.333553129	0.022723808	0.164140503	0.023983532	0	0	0	0.021761806	0.021318473	0.089933497
Zm00001d011748	0	0	0	0.101087964	0.035600507	0	0	0	0	1.304191684	0.357744225	1.017606058	0.060468576	0	0
Zm00001d011750	29.10168878	30.08155886	32.39711134	22.46085629	24.39826561	20.97751173	20.91362242	17.82364107	21.44785542	6.846975863	12.93459851	6.490445363	15.13171714	13.25448758	13.30652881
Zm00001d011751	0.353013082	0.282940817	0.757798933	0	2.748593102	0	2.399975504	3.908272344	0.831147612	20.58103697	14.32608465	18.9837909	0	0.035180485	0.07420569
Zm00001d011752	4.256611294	4.478193588	2.364998867	0.874367686	3.761134838	0.245408529	9.479573574	8.091242103	9.263968678	467.2282063	271.4173552	285.4131743	0.616425081	0.60386723	1.042141455
Zm00001d011753	0.523169072	0.624252678	0.342208454	0.480770148	0.707492847	0.472281671	1.190471233	1.643459442	2.22428541	35.50718616	44.89656576	30.6242699	0.585442991	0.286758154	0.286510189
Zm00001d011754	0.978458094	1.051428142	0.897546394	0.755417922	1.667854917	1.141661946	1.615178061	1.58242713	1.110939544	2.977369023	2.981845365	2.920485356	0.868988909	0.727849368	0.915758495
Zm00001d011755	0.083107805	0	0	0	1.569596398	0.152727649	0.534113089	0.551150026	0.239154936	0.649509733	0.279470956	0.383596062	0	0	0
Zm00001d011756	8.961442231	8.883732854	10.41150477	7.073104908	13.13144121	7.580439475	12.50984746	13.93479342	13.79940715	20.94138635	24.7154457	23.99508847	4.540832662	4.042678883	4.548791063
Zm00001d011757	0.162390306	0.012783199	0	0	0	0.186515948	0	0.073427155	0.062585089	0.727879766	0.729526564	0.483450644	0.045429992	0	0.398958879
Zm00001d011758	115.6532597	116.4965289	108.1100322	46.64709518	38.83271666	45.66224261	37.84077115	31.82337187	41.80876761	16.79497543	20.58825184	16.2220382	21.56141356	22.47092012	18.94183338
Zm00001d011759	0	0	0	0.026620093	0.021093509	0.058837701	0.049882395	0	0.019742884	0.02943776	0.01345813	0.029555762	0.017913993	0.099444603	0.086370558
Zm00001d011760	16.67078778	15.49831959	19.67273639	116.4498207	83.35158722	158.5406628	144.2131008	106.9038759	125.2017652	11.25012718	7.290427889	4.649684248	73.57926677	73.46938664	75.32081769
Zm00001d011761	5.565376328	4.419987501	6.073822826	12.33787884	10.35442136	11.73758079	9.433958828	11.04584345	10.30211673	0.786857426	2.239824926	0.679708058	22.55030325	23.51879149	19.96261619
Zm00001d011762	0.034191235	0.036438759	0.055567727	0.16072688	0.100500545	0.128889051	0.098344514	0.142708317	0.071360005	0.105192705	0.033166342	0.037875499	0.22662338	0.089379278	0.060814975
Zm00001d011763	2.170699737	2.352821052	2.308653173	2.720217944	2.915219498	3.33704083	3.292523646	3.095543108	3.24337908	1.46809032	2.052991507	0.959528946	1.658316079	1.441486812	2.12352895
Zm00001d011764	0.270772216	0.180959261	0.343384191	1.936579522	1.75478552	1.123830208	2.40849401	2.14550347	1.383454272	0.304848593	0.285705112	0.232613644	1.916956516	1.696171494	1.450250339
Zm00001d011765	0	0	0	0.008559322	0	0.050449193	0	0	0	0.255563207	0.18174556	0.04561558	0.007679995	0.045141225	0.007934645
Zm00001d011766	39.21120642	37.80838684	42.52832008	58.91473509	80.64215197	56.92326753	61.84173695	78.54329966	67.98888623	47.63440136	61.70332871	33.83676739	58.27723412	51.23812887	63.03088545
Zm00001d011767	5.691477193	4.705348185	7.665626921	14.94763332	32.15363767	12.42553176	20.52406707	24.71304255	22.68755373	10.94339786	21.78084831	10.98601965	5.186716471	4.26788684	5.462646657
Zm00001d011768	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011769	0	0	0	0	0	0	0	0.018224871	0.0093203	0	0.076240418	0	0.00845691	0.132554001	0.043686601
Zm00001d011770	9.216562194	8.822303583	7.820789719	9.687306261	9.114876368	9.648001957	9.411392704	7.896457967	9.775256478	12.16034187	10.02753172	13.04571415	6.211096601	6.892845268	6.55319624
Zm00001d011771	2.099866164	2.018391761	3.035516246	2.935882123	4.441573307	3.655833207	2.724891347	2.705200027	1.853692423	0.106697008	0.306610364	0.11018541	0.581270686	0.932894322	0.74109709
Zm00001d011773	1.115442788	0.906963548	1.412597269	2.865907719	3.74881699	2.936395745	3.196617257	3.430525008	3.195339654	0.350516849	0.81458694	0.234614601	2.069827025	2.372053072	2.313941504
Zm00001d011774	0	0	0	0.039391998	0.048554869	0.006449416	0	0.050779811	0.006492269	0	0.086298899	0.011662975	0.035345128	0.046166767	0.006086181
Zm00001d011775	3.730632734	3.222331862	4.416759583	6.381485837	5.87181843	5.778707038	4.913661994	6.130467871	5.679421152	3.387335671	4.569531986	4.245989436	4.091412079	3.798989653	3.872128169
Zm00001d011776	0.809013443	0.750446901	1.080173255	3.545017329	3.342034921	2.989082757	3.887785188	3.794289255	3.004449626	0.515160806	1.160353407	0.381485593	2.589518616	1.931536644	2.449974602
Zm00001d011778	0	0	0	0.025448015	0.268863527	0.062496762	0.739134247	0.393657223	0.440384183	0.08442486	0.012865571	0	0	0.044736975	0
Zm00001d011779	1.854727342	1.900112667	1.968536934	5.2178852	5.960802497	5.624615483	6.787224097	5.965313898	5.448565584	1.257928324	2.35427488	0.857015868	7.875962244	7.55258743	7.607503292
Zm00001d011780	37.02804422	41.91928488	46.23161125	88.45777794	51.78277823	77.61306308	37.73867437	28.22500695	32.46292101	7.494669215	11.12214461	5.867850918	83.58091691	84.8755784	78.76150114
Zm00001d011781	0.032511852	0	0	0	0	0	0	0.009800473	0	0	0.010249622	0	0	0	0.009397035
Zm00001d011782	0.008280578	0.010429418	0.051455632	0	0.05455438	0.020289682	0	0	0	0.045681128	0.010442074	0	0.064863627	0.108929522	0.201043037
Zm00001d011783	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011784	0	0	0	0	0	0.4878388	0.051698501	0	0	0	0	0	0	0	0
Zm00001d011785	6.255625218	9.313897253	7.697279208	24.80024711	23.2542509	19.08385965	0.024204298	0.049952716	0.076638286	4.91369743	7.705697047	5.805342797	5.586288619	5.358947365	5.939153626
Zm00001d011786	5.822637551	2.873176976	4.678872045	7.480587955	12.14936868	7.250791158	9.953982416	13.17597598	8.951566467	13.46463234	10.21919627	6.379368119	3.998687448	5.071408568	8.188775448
Zm00001d011787	0	0	0	0	0	0.014463845	0.027590392	0	0	0	0	0	0	0.012942044	0.095544633
Zm00001d011788	0.217398086	0.078232484	0.115792706	0.580991704	0.531985762	0.319610881	0.152417799	0.074895031	0.09192416	0.308394311	0.039163709	0.041284069	0.208521805	0.122564271	0.337516205
Zm00001d011789	217.6089123	301.3744859	289.5752097	273.2868588	230.1325745	213.0655031	240.371991	327.9173782	283.5048904	792.3241879	717.3486368	900.2114171	526.1945628	408.753458	360.7432688
Zm00001d011790	3.222670743	3.494409342	3.52491151	8.587733956	6.843025129	7.773339448	9.418742192	8.386634597	8.282480261	2.920428843	4.521931693	1.857732524	11.79605531	12.97056164	10.41807624
Zm00001d011791	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011792	2.017502481	2.240137807	2.151049251	7.899360262	10.82930082	9.034774577	10.763628	8.84715945	10.75138429	3.031426249	4.552663268	0.652825378	7.800775074	8.00270649	9.636941727
Zm00001d011793	0	0	0	0	0	0	0	0	0.100559183	1.105803423	0	0	0	0	0
Zm00001d011794	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011795	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011796	0.307408522	0.365908425	0.327469899	1.655724429	1.820525634	1.361617117	1.413143471	1.340095468	1.204018346	0.363400313	0.404691657	0.288143485	1.772923111	1.529425304	1.679391942
Zm00001d011797	36.59934005	37.67346937	40.60508414	110.7340407	58.41858592	94.05560162	64.72741709	53.52978342	55.42454384	37.97447239	40.34426193	19.83814672	155.5958332	148.1047518	139.8967988
Zm00001d011799	16.85891565	16.12399782	23.4309958	14.96673267	25.33619693	20.1741417	86.28802202	125.4006251	118.8849028	448.4265408	342.045792	494.6091637	25.21780893	33.18791867	55.18238628
Zm00001d011800	0	0	0.026969285	0.108255047	0	0.026585924	0	0	0.053525152	0.179570338	0	0	0.291400948	0.214098381	0.275974496
Zm00001d011802	0.276745626	0.400846461	0.292349237	0.845605592	1.194238451	0.805246737	1.018638388	0.85091519	1.023912328	0.124045299	0.314086602	0.022992468	0.356140328	0.379222842	0.311956817
Zm00001d011803	1.01950801	1.059747911	1.373906988	6.18126105	5.163001051	6.102221995	4.77235695	3.739721516	4.908155481	0.372693154	1.26239799	0.25852927	3.958654381	4.140581905	3.969204379
Zm00001d011805	13.93743319	15.48988819	13.22860325	8.337746498	7.866969246	8.567914881	8.082956442	7.483319788	8.488836056	6.382863876	6.459554267	4.77711222	4.800212549	4.53150093	4.335057218
Zm00001d011807	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011808	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011810	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011811	4.903812167	5.078348314	3.114952455	4.262542472	3.681092381	4.745587438	2.627744918	1.839563057	2.663458125	9.659713071	6.533658823	9.580461743	2.959936798	2.780176083	3.653662355
Zm00001d011812	0.282675889	0.11867711	0.127749246	0.245710468	0.462761973	0.535216628	0.160148741	0.082628553	0.137334273	0.307159789	0.064811521	0.123356418	0.095855575	0.056341679	0.703140762
Zm00001d011813	2426.037309	2084.147414	3062.157446	1785.74803	2403.538752	2142.441947	1685.052268	1683.339723	1432.85661	949.795332	1030.862293	1003.561111	4697.614326	4782.572717	4601.361822
Zm00001d011816	11.77074849	9.941445518	13.04775234	13.68601081	22.71926947	13.61336412	14.36302605	19.29339648	13.83613187	3.27635342	8.349351456	2.139227508	5.728380734	5.594880348	8.310455
Zm00001d011817	9.461193013	9.657554441	9.576719763	11.50578446	13.81830002	10.6602314	14.6961396	13.88207909	15.5295836	23.57122705	22.12720807	21.80318222	7.517464133	7.539262069	7.134140856
Zm00001d011819	19.71800779	20.68286663	23.7426592	31.38241866	13.57308079	30.59518165	40.74408346	32.916978	38.37695741	5.824948906	3.715821733	5.780294853	41.40294536	51.62972373	46.00506234
Zm00001d011820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011821	31.18930771	30.48309776	31.46416622	11.6846429	23.56174795	13.52254068	22.16146284	22.45860694	23.70014716	52.30438032	46.65433897	43.87463626	9.636222981	9.059932501	11.0283158
Zm00001d011822	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011823	0	0.005872773	0.069538812	0.040706408	0.362488923	0.239926177	0.419530165	0.337334166	0.322027179	1.34402151	0.629149219	0.645650261	0.307849398	0.066449361	0.247976588
Zm00001d011824	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011825	30.69247849	25.25582839	32.59349848	26.40090483	31.27726747	25.42662883	30.42115974	34.21906754	30.08119808	34.62962632	37.0144117	34.56521895	20.02913981	15.9836808	19.66043835
Zm00001d011826	74.69479892	66.45414056	85.98605348	239.8810552	134.2773033	234.0885857	85.81476773	66.44842435	59.5239248	3.21364556	4.294555062	1.389888777	772.8958618	756.114335	713.5787241
Zm00001d011827	4.172624841	4.129814732	3.887436649	5.911830106	6.062967546	4.231671193	4.459406781	3.880822963	2.882059938	1.199250667	1.644792734	0.488312365	23.83978953	23.00328237	25.44707818
Zm00001d011828	20.76677311	22.15082277	21.57183236	14.99572966	19.10803131	14.91293098	16.96093799	19.66730927	19.00856578	13.03547639	15.83513487	11.68921197	10.08571057	10.42051184	10.79478424
Zm00001d011829	0.664373275	0.400199417	0.528233301	2.254142593	1.299520574	2.072787255	1.109028825	0.75630191	0.865159043	0.102441273	0.02601851	0.004571196	0.669571299	0.637836108	0.935085773
Zm00001d011830	1.495966773	1.546548829	2.106367712	6.308886391	8.101108065	7.05561164	6.375788814	6.631294117	5.940073123	0.763259121	2.976902613	0.440633229	5.883313248	5.38428314	6.078389461
Zm00001d011831	6.156721728	6.50688219	6.480468042	6.938717012	14.2849365	9.586213261	10.45523352	11.91769936	11.88509447	26.86852323	25.10239696	33.48036901	7.987857618	8.458795554	9.32476779
Zm00001d011832	0.04868673	0	0.145219229	0	0.102643056	0	0.307208403	0	0.048035393	1.477234618	2.345309213	3.570361326	0.010896403	0.010674421	0.135092411
Zm00001d011833	317.8756633	397.9127296	439.8811453	829.7142145	489.3251088	1039.126179	567.5277009	426.093464	524.402387	39.10642916	36.71452642	36.54496729	1489.538284	1480.552829	1300.883628
Zm00001d011834	0.00360909	0	0.017941552	0.072017613	0.047555059	0.061902811	0.075909996	0.043517413	0.106824222	0.029865183	0.027307072	0.003997986	0.294824216	0.395641148	0.091797219
Zm00001d011835	1.286585186	0.969723378	1.391231418	4.472589952	14.69674385	6.379439731	17.38942977	21.40711699	20.48988048	2.47998679	3.391762909	1.565498307	3.695685229	3.276125659	3.47271084
Zm00001d011837	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011838	14.61704256	10.58046126	13.07959453	16.43893738	52.94261046	18.98234975	36.83254859	42.39289067	40.23172632	66.52572803	72.14720687	46.0046033	11.44985799	9.925277795	13.24109539
Zm00001d011839	3.895622805	1.657440935	4.59487396	2.383637196	19.73404888	4.51676367	12.41131335	14.01614438	10.44599163	28.93771195	24.57569695	24.00654925	0.888227487	0.755641346	1.376518393
Zm00001d011840	0.052514343	0	0.087019973	0.021831203	0	0	0	0	0.02158825	0	0	0.019391002	0	0.019189356	0
Zm00001d011841	0.989365613	0.75521797	0.223561181	1.682582555	2.64677275	1.542683223	0.980911041	1.229099719	0.628568401	0.909665528	0.68052097	0.863494924	2.24781323	1.281773205	1.109179794
Zm00001d011842	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011843	0.327174829	1.044911837	0.464701532	2.113055242	4.52655877	3.492981403	5.079178927	6.128813981	1.397829941	14.48764278	6.733861635	8.672418449	1.359871088	0.94788856	2.499209601
Zm00001d011844	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.309917884
Zm00001d011845	13.87484804	11.32055668	16.43031982	17.08644684	110.516925	33.14189976	94.38749405	138.7845869	121.2156794	585.4843111	413.2799026	451.8339651	61.17792393	59.40546792	63.59317154
Zm00001d011846	0	0.06342162	0.015645166	0.408199279	1.924131984	0.817407001	5.472043595	8.378809131	5.63566625	1.475750706	1.698587026	0.627529248	1.394619176	1.255807265	2.401435535
Zm00001d011847	0.019558275	0.031671925	0	0.006969209	0.176714716	0.69488531	0.022853844	0.020213852	0.106820583	0	0	0.00309511	0.062532392	0.410431804	0.232580926
Zm00001d011848	0	0	0	0	0	0	0	0	0	0.025652905	0	0	0	0	0
Zm00001d011849	2.566215066	2.486274901	2.638801389	1.744347368	3.838134559	1.731245037	1.797485615	2.452775983	1.537893839	4.206575085	4.814654908	4.386774571	5.425476173	4.718533794	6.139746685
Zm00001d011850	65.85520598	68.78323258	66.34319813	53.26048456	56.81080132	51.18720167	58.140548	69.67539957	59.21235408	50.7676125	76.8969517	57.91180112	61.27651247	64.2212862	65.33716934
Zm00001d011851	1.981233264	2.294646116	1.922110861	2.204393404	2.407733612	2.420625667	2.526686358	2.618199904	2.164227034	1.591013651	1.612312146	1.326060436	2.257594968	1.735135644	2.334545033
Zm00001d011852	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011853	0.311353153	0.071300082	0	0	0	0	0	0	0	0	0	0	0	0	0.098172746
Zm00001d011854	8.004035684	8.115240079	7.949183804	12.0865212	14.06327937	12.41690123	13.97240093	14.03176191	14.16333533	5.468768119	9.181497434	3.383144064	11.01916612	12.08037803	11.37094113
Zm00001d011855	3.600610337	3.216642089	3.563452974	10.06313629	11.69650675	9.2220779	8.92777415	8.929797674	9.178190656	4.048522893	5.196422616	2.800752503	9.566066502	9.581511846	10.15929477
Zm00001d011856	0	0	0	0	0	0.106007165	0	0	0.035570513	0	0	0.031950153	0	0.063235809	0
Zm00001d011857	0	0	0	0	0.009195435	0	0	0	0	0	0	0	0	0	0
Zm00001d011866	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011867	0.008735613	0	0	0	0	0	0	0	0	0	0	0	0	0	0.01009956
Zm00001d011868	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011869	0	0.063773962	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011871	0	0	0.018448045	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011872	0.034092853	0	0	0.028346085	0.097331726	0.069614016	0.092954163	0.04110822	0.0490536	0.61909225	0.472913991	0.874924264	0.006358499	0.024915855	0
Zm00001d011873	19.836915	19.59301371	18.10548475	14.1471094	18.04377968	14.20337534	18.36310161	19.78401374	17.61662137	13.13891107	17.72670461	9.71051128	8.602257622	8.090927205	7.850395031
Zm00001d011874	1.429671521	0.920800519	0.979259077	4.102982058	5.662109328	4.68736853	4.081509143	4.652458828	3.977176428	6.889931416	4.824703635	7.828641763	1.899819903	1.718638819	1.690461184
Zm00001d011876	4.140313721	3.45928327	3.426150513	8.167210313	5.725543541	6.152229945	6.490525956	5.362989476	7.393813682	2.007041783	2.610534217	1.271491545	11.29615555	11.68392966	11.24416466
Zm00001d011877	3.160654627	2.763829156	3.02159298	5.1935766	4.493196267	5.155341629	2.27275382	2.112227697	1.914384553	0.146161903	0.110058415	0.013811557	1.234766669	1.428298824	1.304538069
Zm00001d011878	0.030825781	0	0	0.06727801	0.081234978	0.103855949	0.06303487	0.009292219	0.019008369	0	0.077744598	0	0.068990078	0.059136532	0.124735834
Zm00001d011879	7.965266567	10.71771818	9.099937867	3.352445949	31.81216606	8.930176603	27.71027205	26.70511958	17.34854139	27.72509699	11.68733883	25.46592917	5.960713592	5.260776875	7.778976266
Zm00001d011880	23.68504856	25.44699113	25.70038272	15.17589434	16.52869824	16.27944251	15.2670343	14.8387302	14.5720201	14.21254408	18.40014711	10.60021138	16.7829295	13.70926091	14.69772093
Zm00001d011881	0.546849357	0.140302716	0.427912661	1.048269704	5.724403234	1.873421446	4.887116785	4.420260321	3.934098699	7.374355212	6.38513503	6.439162832	1.280545275	0.477360095	1.21763293
Zm00001d011882	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011883	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011885	13.56390333	13.76334723	13.5933535	11.86317022	12.41435781	11.9002666	11.14632882	10.68088578	10.6349724	14.38633314	13.41630286	13.32749367	10.06266238	9.103908603	10.34590447
Zm00001d011886	0.8212402	0.162251776	0.840526843	1.004132502	8.571964614	0.907491258	7.996826505	8.057743738	9.889859424	8.661254817	10.49824498	6.457317845	0.162175439	0.035304798	0.316488581
Zm00001d011887	37.21197507	47.19884711	38.03112562	46.31573546	11.72134487	28.72590881	10.98543582	12.28426239	7.529449173	7.10286782	5.620668178	4.252871734	99.25196108	101.6234098	90.72103092
Zm00001d011888	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011889	0.657973825	0.585963967	0.379956193	0.804018706	0.569227351	0.553690319	0.644585059	0.609049156	0.795070992	9.615349963	3.528431205	8.540336469	0.371865575	1.173013495	0.822178849
Zm00001d011890	16.28034355	15.02818089	14.49454057	4.588329471	6.199734536	8.10244058	3.633635681	2.459456828	2.816500866	1.92432012	1.775272096	1.067383692	16.32078694	16.01573476	11.21959475
Zm00001d011891	27.46881936	29.92896707	27.39650672	36.94728742	33.36392614	32.2392414	23.75063559	22.44640521	25.36854772	0.743507499	3.282266269	0.391906128	23.22589438	22.92818218	27.13184992
Zm00001d011892	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011895	0	0	0	0	0.022811975	0	0	0	0	0	0	0	0	0	0
Zm00001d011896	0	0.030359629	0.049928445	0	0	0.01968749	0.009388679	0.019376311	0.014863729	0	0	0	0.071929708	0.008808044	0.10682741
Zm00001d011897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011898	0.369492809	0.519671608	0.413286075	0.890909778	1.476811645	1.124153463	1.26647356	1.240042419	1.070864704	0.271782133	0.551365038	0.150079367	0.737362533	0.938368131	1.530743061
Zm00001d011899	0.826413104	0.356869839	0.088034455	0.853980875	0.248896115	0.202493825	0.303494312	0.455527357	0.232959212	0	0	0	0.475602583	0.543565839	1.064640191
Zm00001d011900	1.936517278	1.62906743	1.149473134	1.838390411	2.027986997	0.796734615	1.595795023	1.812238063	1.167397152	0.109621427	0.027335937	0.024013276	5.635882226	8.396458721	12.50597287
Zm00001d011901	0.667366198	0.583813107	0.704473427	4.764018056	5.728671223	4.871479608	3.719631152	3.38711246	3.371395856	0.704747558	0.739454976	0.312414547	21.29173161	29.9156135	32.07650096
Zm00001d011902	0	0	0	0	0	0.025111143	0	0	0	0	0	0	0.068809069	0.112345478	0.497634263
Zm00001d011903	0	0	0	0	0.014029483	0.130444954	0.062207309	0.012838315	0.013131171	0	0	0	0.023829517	0	0
Zm00001d011904	4.853288042	4.029238913	3.856877495	8.942814105	6.755196124	8.190325614	10.23987048	10.0554817	8.834861649	3.111056105	2.922157046	2.816853288	14.57186863	15.15174245	16.68303464
Zm00001d011906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011907	0	0	0	0	0	0	0.180506632	0	0	0	0	0	0	0	0
Zm00001d011908	15.70546566	15.42548403	14.03866378	12.66264258	15.59361393	13.80978772	15.57633992	13.92336311	14.53611961	13.5078545	16.45520554	10.29287112	13.1895593	12.65850824	12.19503137
Zm00001d011909	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011911	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011912	0	0	0	0	0.178169323	0.043594826	0.09147486	0.188785381	0.430068051	0.186487675	0.017948844	0.07883588	0.015927694	0.210643384	0.394939604
Zm00001d011913	9.764717389	10.05067654	10.21082106	27.04157729	15.57495522	29.78823316	38.79130335	27.0817792	30.53743663	2.426866449	3.977514232	2.33982822	36.69820199	40.68855194	37.39095399
Zm00001d011914	0	0	0	0	0	0	0	0	0	0	0	0.022238432	0	0	0
Zm00001d011915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011917	0.205775863	0.583144788	0.063934712	2.855061373	3.135054959	3.277346645	5.13959947	4.311065052	4.663183782	0.780446812	1.508285424	0.455898326	1.122565268	0.719032193	1.159786775
Zm00001d011918	9.255248472	7.805826843	8.558136892	2.048541668	2.880219173	1.470579993	2.19986202	2.490941574	2.181570443	10.54270399	8.95453225	7.80313094	3.421671939	3.12342232	4.061012713
Zm00001d011919	7.085935328	7.728326312	8.838328606	27.21623362	39.27528113	35.52703239	41.36957775	46.17178774	45.87934821	114.5810506	85.76225591	86.65709493	19.59363554	21.71339547	26.22429101
Zm00001d011920	15.21749147	16.11893123	12.88143785	10.70915169	10.53352616	10.44910003	10.34615418	10.3860293	11.31538818	23.13841064	18.98183264	30.6540265	11.0999256	11.95336107	11.71010783
Zm00001d011921	0.145826495	0.734676041	0.634317591	0.363736958	0.04803695	0.178657409	0.042599565	0.17583356	0.044961128	0.050279695	0.045972972	0.403849934	0.244776796	0	0.252892993
Zm00001d011922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011923	0.040367817	0.124283902	0.111487203	0.833489276	0.726937116	0.895704901	0.885743912	0.773382106	0.951441193	0.086603805	0.333711289	0.099372523	0.978745801	0.786713213	1.20306706
Zm00001d011924	0	0	0	0	0.018570986	0.017267147	0.016468904	0	0	0	0	0	0	0	0
Zm00001d011925	0	0	0	0.526753216	0.966597169	0.762562113	2.155953604	1.045351956	1.014366912	0.214608453	0	0.024624996	0.37313536	0.633591958	0.848116745
Zm00001d011926	0	0	0	0	0	0	0	0	0	0.112231461	0	0	0	0	0
Zm00001d011927	5.036501003	4.951017873	5.807736139	9.715596618	10.70310371	11.70119078	7.111224684	6.887527588	8.427055297	5.026087033	4.789209853	3.957608392	1.924489972	1.66084555	2.077064783
Zm00001d011928	0.009800168	0.135776822	0.21923419	0.48889376	0.258263173	0.300163658	0.927571178	0.626288889	0.265899144	0.216256751	0.296599821	0.043424724	0	0	0.011330331
Zm00001d011929	24.32414347	23.26555979	21.1182484	38.14253691	43.77545988	52.49511544	67.4059201	63.13771419	64.26023707	74.65132659	59.4154131	49.36286432	34.64866347	29.86691503	34.2439137
Zm00001d011930	0.060923502	0	0.151431816	0.334317057	2.071111824	1.985414059	1.082074517	1.013746292	1.713091106	1.932541739	0.307305964	0.323943797	0	0.013357297	0.774794709
Zm00001d011931	15.58470312	16.45791028	7.314114881	9.490633238	9.811414383	7.76536651	9.318654886	9.008737716	9.617893228	3.958484246	3.98453592	2.286995481	7.747884309	6.147935566	7.044210904
Zm00001d011932	2.556833825	1.807334607	3.112790795	34.59926332	23.42259691	42.02199564	75.65690908	69.2407559	60.75973045	2.734678048	1.195385012	1.290932517	44.1439069	43.66408466	54.7773945
Zm00001d011933	0.042789465	0.053893489	0.132947181	0.480286476	0.732958161	0.943613078	0.574994131	0.077391532	0.3430133	0.029506863	0	0	0.167589747	0.257990225	0.395763682
Zm00001d011938	21.14066183	15.26187844	17.70212263	20.02502505	65.19471434	31.37748682	96.35868747	112.6954187	91.58084195	159.2420089	162.3606788	125.141136	22.22331703	21.35220448	25.87551687
Zm00001d011939	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011940	0	0	0	0	0	0	0	0	0.049299482	0	0	0	0	0	0.046215825
Zm00001d011941	0.009917471	0.024982183	0.104766429	3.048869697	2.54820601	2.976813473	2.114913125	2.206290246	2.31165756	0.041033483	0.175087489	0	2.469298018	1.924322775	3.898422999
Zm00001d011942	0.017923611	0.056437134	0.066826548	0.011176775	0.023616986	0	0	0.032417692	0.033157174	0	0	0	0.010028548	0.009824246	0.01036107
Zm00001d011943	9.318062662	9.182853254	9.582655742	10.64526736	15.22086508	11.94748187	11.79411739	10.36064029	13.16727103	3.364841687	6.260887345	2.403243297	9.424288709	9.965265974	8.626585255
Zm00001d011944	0	0	0	0	0	0	0	0.012085334	0	0	0	0	0	0.010987454	0.011587839
Zm00001d011945	1.69966692	1.861510239	1.749359048	4.151727339	4.460573948	4.496613853	4.399762042	4.064878142	4.309498078	1.620986294	2.480587979	1.789257911	2.705303391	2.353153381	2.461394157
Zm00001d011947	0	0	0	0.022642988	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011948	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011950	0.229126825	0.064130241	0	0	0	0	0.0297483	0	0.031397436	2.141802634	0	0.028201811	0	0	0
Zm00001d011952	0.131138934	0	0.020372482	0.265770034	0.367188918	0.301243384	0.153235846	0.31624741	0.101081673	2.554678729	0.082685202	0.19974592	0.03668717	0.089849441	0.454843513
Zm00001d011953	17.67881836	17.28661752	15.72751895	24.28966481	27.91630561	30.16261058	24.98331254	20.28542201	20.41695828	7.749363633	7.033489629	6.3753735	29.17774175	29.54350618	28.96538059
Zm00001d011954	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011955	0.295914154	0.049693996	0.049035064	1.820653061	1.117742889	0.845915764	0.737654809	0.713610226	0.510921909	0	1.293611772	0.196680163	1.986824642	2.205862112	1.915856008
Zm00001d011956	0.834311022	0.756987244	0.773977538	1.760494765	1.154033023	1.198961736	1.31679784	1.163323985	1.087454614	0.689846136	1.014696296	0.497147153	1.533173532	1.402243774	1.405722982
Zm00001d011957	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011958	43.52657627	42.13686607	38.52948949	43.73847373	208.0331052	62.51298989	130.7815973	214.6097653	202.0422242	99.28039265	162.766453	79.04677587	31.73528481	29.02274558	36.03863496
Zm00001d011959	0.312405414	0.452203502	0.295539951	0.837388971	1.480675094	0.925429538	1.966888178	2.440050464	2.16793297	5.382516764	6.761884129	5.511270625	0.558303146	0.98140595	1.040423509
Zm00001d011960	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011961	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011962	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011963	4.678763789	4.18874006	4.824145779	6.123358416	8.269957561	6.322982024	5.905445604	6.376497217	6.641734487	1.672089306	2.234171573	0.80136807	4.598559661	4.633378494	4.534200375
Zm00001d011964	1.715430334	1.465444231	1.195741309	1.702226453	4.029285922	1.663034396	3.904379134	3.831070808	3.670108442	9.422299566	9.348840913	8.642124196	2.20339178	2.55913559	2.474777994
Zm00001d011965	31.01569973	30.61831032	37.88128851	59.97897841	156.8679944	61.23466814	126.036347	153.3557264	160.1540179	339.7010685	384.8600374	367.7136285	45.88657536	47.55625376	56.20156783
Zm00001d011966	8.877270802	9.133475596	9.391409612	10.08164691	11.24451677	10.24827773	9.231289794	9.379360815	8.366304761	6.00726371	7.897403853	5.05796457	6.342088848	5.609127186	6.528413172
Zm00001d011967	1.774703633	1.354407409	1.542055671	0.300113001	4.557961448	0.67254491	3.365435947	4.814749392	3.060472821	9.873405381	6.87508351	4.373374901	0.833089343	0.329744482	1.051981991
Zm00001d011968	0.131454172	0.075257735	0.089111799	0	0.724333384	0.073204249	0.754056989	1.138345544	0.781120995	4.136867357	4.731920873	6.036568065	0.120355724	0.026200851	0.331590463
Zm00001d011969	3.369969792	4.29804765	2.933067065	11.69381792	12.10262198	10.13283422	23.22935077	26.30325121	27.29657906	186.305622	176.8895903	231.7701364	16.4524839	17.83043285	18.42372651
Zm00001d011970	2.144507282	2.663500762	3.525837449	8.757249566	4.140439745	7.316342033	2.218727354	2.127887748	1.441768197	0.43132091	0.657293312	0.824856891	6.249407576	5.591512739	7.300287927
Zm00001d011971	21.44792456	20.64552313	20.83959545	19.2587964	33.61534392	22.52433352	30.78005192	42.3457112	38.62703916	75.90330308	70.15697082	77.7120492	9.209765241	7.91547708	10.54380204
Zm00001d011972	1.785393438	0.995090601	1.410272062	5.752621058	16.5237583	8.085133473	11.34530205	13.59378963	9.643397741	0.026706637	0.29302886	0.068643048	1.690208045	1.26093636	1.665654983
Zm00001d011975	0.833157363	1.052717385	1.063569684	0.823294808	1.03116701	0.864197822	0.611186811	0.648334898	0.748476722	0.049560155	0.194686944	0.070768096	0.278507477	0.300554776	0.27389355
Zm00001d011976	0	0	0	0.0568339	0.180138563	0.018610147	0.141998551	0.036631992	0.05620141	7.58385394	0	0	0.016998389	0.033304193	0
Zm00001d011977	0	0	0	0	0	0	0	0	0	0.322305735	0	0	0	0	0
Zm00001d011978	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011979	13.78819315	15.15116568	12.38228594	10.45376386	11.27863755	10.44432574	9.971618754	9.48531798	10.49769683	4.558389615	6.560544157	3.949245431	5.269177304	5.442006387	5.413841206
Zm00001d011980	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011981	9.154398109	8.779891834	7.993469511	7.870906683	7.235163368	8.032851131	7.128843955	6.864315419	7.821819255	4.713721371	5.816616917	4.542389442	6.587134391	6.284087389	6.098040162
Zm00001d011982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011983	9.880774064	10.36193161	9.843615149	10.10360067	10.19526159	10.83290643	9.608091448	9.138204811	10.94295841	6.365044407	8.230645025	6.011338832	7.945375835	8.013149904	7.923300631
Zm00001d011984	5.248777309	3.886567449	3.228223454	4.481758942	5.121082014	6.035669402	5.768057198	5.704778551	5.744586977	12.14119948	8.250506621	7.95079557	2.955898361	2.660172389	3.646626642
Zm00001d011985	17.42072846	20.05247106	19.12344229	46.42034649	40.81620612	49.3463355	26.00123778	22.6399619	22.03593258	13.40526668	10.7476371	5.223850013	21.64067005	21.35789444	20.45752258
Zm00001d011986	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011987	0.953114347	0.262598667	0.518233326	0.408609736	0.353212869	0.510866775	0.174017832	0.430964607	0.220397686	0	0	0	0	0	0
Zm00001d011988	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011990	14.1489921	15.79948475	12.8191103	19.55575041	18.61108992	20.92140699	18.9092828	16.38099947	16.40718582	2.821474799	7.98656809	2.279798013	17.42334832	13.14709864	12.63331932
Zm00001d011991	12.46703197	12.87705334	12.20744438	15.75447477	18.04496834	19.67082876	17.87857399	17.82250784	12.87099648	3.191327768	5.151116705	2.824857049	14.18881039	12.45024612	13.48544242
Zm00001d011992	58.49783028	49.60327055	67.08968491	69.8431271	106.7775466	58.3453713	67.51933378	85.67349047	70.9375228	5.172119963	20.59293916	4.279327279	25.02505889	23.6765311	31.5681219
Zm00001d011993	37.47828361	48.29929982	47.81831459	142.8373982	79.49388946	147.8778955	39.51231829	41.13363938	34.84604627	17.08539675	11.19962006	4.611216657	366.5430422	412.272219	401.704961
Zm00001d011994	12.25441044	13.56589475	13.81930764	8.797998677	7.711846253	7.670248249	8.225784191	7.513235393	7.904180937	3.826222014	6.894074984	2.834947649	8.649532737	8.806727235	8.361729119
Zm00001d011996	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d011997	0.064814519	0.093296145	0.005753691	0.121250785	0.164705087	0.192844732	0.140652137	0.161885368	0.062805504	0.031924967	0.023352339	0.030770821	0.238311307	0.157329322	0.315795094
Zm00001d011999	0.306160277	0.133480385	0.453669373	0.631487774	0.620632432	0.764602931	0.894370716	0.667326979	0.464714501	0	0.178189815	0.052176994	0.619321135	0.542161276	0.66708423
Zm00001d012002	0	0	0.014147086	0.070983222	0.044997143	0	0	0	0	0.047097965	0	0	0	0.012478673	0.013160543
Zm00001d012003	19.64738894	18.65481865	21.09718465	24.05906708	34.39649049	22.42310524	22.90593884	25.98842923	22.13273768	1.326597806	4.279080394	0.94713991	9.079465028	7.439744407	10.96624746
Zm00001d012004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012005	133.6711054	135.6922622	120.9133504	37.0467977	33.11093199	39.09066407	33.34504612	30.57934918	36.57447435	37.52809424	45.46499687	38.60324029	31.70587582	29.6315927	28.86696176
Zm00001d012006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012007	56.0486376	59.83853615	50.01216283	19.37879516	22.21945096	20.15644575	24.2049907	23.48599176	25.80000372	65.01126765	40.3167516	54.42119705	16.71518342	16.60506324	16.03185157
Zm00001d012009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012010	658.2319376	604.7206502	641.3498321	63.41715966	67.7521152	35.40580432	30.39656475	43.13417012	41.49537437	213.5839528	190.2131725	204.9538414	60.59925538	43.46197143	47.68086641
Zm00001d012013	4.050209633	5.298144527	4.680376492	2.410419028	0.505586404	0.504911468	0.099635158	0.17135547	0.122684991	0.176397058	0.250892	0.015742591	4.818566084	5.561661696	6.259890227
Zm00001d012014	0	0	0	0	0.124233492	0	0.036723763	0	0	0	0	0	0	0	0
Zm00001d012015	2.513456849	1.154552403	2.082487713	1.180112696	24.36481217	4.468045343	17.89826721	24.23336979	18.63520436	14.40964572	16.84211716	6.52944107	1.191235308	1.501930246	1.948661762
Zm00001d012016	0.36005644	0.343554863	1.084798069	2.517383423	5.003050282	3.675986702	2.677346975	1.828676038	1.426340652	0.57181616	1.403404778	0.386767694	1.684916093	1.770198908	2.396731279
Zm00001d012017	16.07578458	13.31621139	22.3204456	24.79462602	35.34178159	18.25245406	19.30594529	21.87956126	21.0487783	3.213706683	8.174477947	2.75976326	13.16257816	12.11994826	13.71365562
Zm00001d012019	0.010404288	0.065521194	0.012930479	0.090830433	0.23305598	0.675573823	0.060787051	0.313630065	0.076988233	0.530921433	0.223042388	0.414914315	0.104784587	0.422005181	0.421007171
Zm00001d012020	1.408428259	1.816562927	1.523183559	1.722751192	3.238746829	2.463839645	2.579394178	2.947432906	2.947859989	6.4997525	5.259909154	6.015743812	2.59901068	1.440047558	2.301589276
Zm00001d012021	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012022	0	0	0	0	1.907349494	0.29557292	3.821431584	5.11770471	6.31439371	2.69883655	5.712817871	2.306299867	0	0	0
Zm00001d012023	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012024	0.369815228	0.15025279	1.022997237	0.818289131	12.85805801	1.870758214	12.07173542	13.83768688	16.49261272	35.81770131	17.87169208	17.86665937	0	0	0
Zm00001d012025	0	0	0	0	0.025919218	0	0	0	0	0.217034653	0	0	0	0	0
Zm00001d012027	8.059384703	7.97973737	7.339439243	10.71413489	13.11648311	12.51258695	11.13335823	11.15964113	12.47067604	7.893976353	11.04056801	7.308805866	7.78230574	8.597336794	8.165662501
Zm00001d012028	0	0.956609428	0	0.236807915	1.000769796	2.326268352	2.440600089	1.831599581	0.936690166	0.523746819	0.478885127	0.841354029	1.274879145	0	1.317151006
Zm00001d012029	55.41870247	61.56997701	67.11786616	61.55400315	40.52608808	51.50594701	36.36306105	33.21093612	38.54083132	8.830903993	19.09047151	11.57646102	40.86527864	41.20970484	46.08689045
Zm00001d012030	11.85563369	13.49482552	13.02284366	17.39129091	18.84650785	18.32640467	15.33011259	15.96694881	15.94731971	7.850240352	9.729016369	7.55912626	7.055591931	6.544808058	6.995121381
Zm00001d012031	8.453653222	10.39635907	8.378750952	25.99931566	20.70203043	19.40658449	8.275129946	9.528716171	7.79396912	2.506438465	3.385873918	0.857228633	19.02478313	13.393084	21.33649073
Zm00001d012032	5.539617992	6.833525596	5.429895198	9.299622465	5.877112842	8.06463218	5.192488333	4.605529781	4.462526638	1.557179607	1.859175446	1.026776052	12.33188876	12.79784197	12.15462873
Zm00001d012033	1.635749871	1.423849928	1.495321741	4.44727909	5.0961827	3.794272954	4.37492211	5.123706245	4.388820556	0.792095694	0.485888233	0.136907382	7.415383192	8.057294577	7.783133196
Zm00001d012034	3.169988905	2.872034149	3.069025898	2.747772703	3.221540281	3.239967912	3.642737608	3.129627877	3.283095433	1.623172309	3.312810258	1.978895717	1.86185271	1.8008839	1.599614596
Zm00001d012035	0.528073413	0.270970911	0.60767703	0.500040748	2.705944084	0.970443278	1.965430583	2.924270575	1.857299815	3.762884872	3.798196202	5.492272436	0.755078635	0.804017527	0.700973067
Zm00001d012036	154.605043	180.1606037	129.4363965	105.7227131	36.89002772	129.3321992	62.47077216	30.7185553	42.80738116	1.423290935	1.423807859	1.250745126	537.1030296	565.9343267	473.7170661
Zm00001d012038	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012040	2.978225728	2.935172068	2.326412044	1.374506003	1.291454931	1.875902799	1.263240953	0.776034653	0.824863771	2.419226845	1.830077932	1.588994162	3.055002703	2.80370065	2.694283042
Zm00001d012041	0.019958006	0.226234639	0.124019341	1.120084153	0.762630414	0.929148936	0.792911615	0.385036992	0.861481467	0.02752538	0.22650917	0	0.469006635	0.787632002	0.438409386
Zm00001d012042	148.0853187	109.5713919	56.62149783	63.6272718	75.4845154	56.91392366	59.16021199	61.86233243	56.66686047	44.67838749	50.69670932	27.01276828	54.04605089	40.08853253	47.88633545
Zm00001d012043	0	0	0	0	0	0.2837233	0	0	0.038081136	0.021292925	0.009734537	0	0	0.008462387	0.008924795
Zm00001d012044	91.16480987	101.6446324	89.35261345	94.38486901	101.8334327	89.66340252	87.45408186	88.98209799	96.30226297	76.3334267	83.95638134	50.6679708	84.94207531	65.72055672	89.59314902
Zm00001d012045	0.197473379	0.6696266	0.434205494	2.387023784	0.10007698	0.986337781	0.141998551	0.164843962	0.11240282	0	0	0	33.01087067	37.40060836	34.79034857
Zm00001d012047	8.05931192	9.204478397	10.85081462	4.301583244	5.039680039	4.211688514	5.865864358	4.790220052	4.913528766	0.188391862	1.076594374	0.214366638	8.547316302	6.950621059	5.698515092
Zm00001d012048	0	0	0.006399491	0.077062915	0.0339244	0.069393768	0.006016888	0	0	0	0	0	0	0	0
Zm00001d012049	9.61035843	9.327839871	10.4835924	8.521528379	6.324013393	7.298484988	8.45726662	7.499471875	7.867494001	3.598710934	5.653122053	3.632880349	21.29478983	22.09268425	20.70515223
Zm00001d012050	8.924786755	10.15596069	10.90954589	13.75898428	13.32928779	12.64043082	9.486397812	8.441071525	9.356856729	1.895598407	2.773168565	1.400752954	7.895364144	6.870663875	6.440974355
Zm00001d012051	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012052	126.0037203	108.9886932	132.0323065	160.0329715	222.9977158	153.7101506	75.4387334	80.8591264	74.88235269	4.915890008	16.46154112	3.845918528	47.89861963	41.07015904	58.88824564
Zm00001d012053	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012054	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012059	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012060	22.64911996	22.52174369	22.36827288	13.77256441	15.32751814	14.88233566	13.97100303	12.54094455	13.94013225	17.50026264	20.54054545	16.5264803	12.64878152	11.61701975	11.05486118
Zm00001d012061	6.415906778	6.54843536	6.353178453	5.660844607	6.940833915	6.285979911	5.915483775	6.573288043	6.976225382	5.596629514	8.875646046	8.34272608	3.145200293	3.039768672	3.205870126
Zm00001d012063	0.859826033	0.46025548	0.534297162	2.010633241	1.557802041	0.131675567	0.125588341	0.25918862	0.424161585	0	0.162640232	0	4.714647406	3.251871642	1.839041027
Zm00001d012064	0.035976931	0.022656539	0	0	0	0	0	0	0.022184767	5.706083765	0	0	0	0	0.083188485
Zm00001d012065	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012066	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012067	17.12002766	18.23704045	16.6490955	13.79067742	13.37015825	11.73825658	4.9807237	4.600296621	4.060590638	6.926587809	7.073984639	3.11602777	16.71564048	15.39449221	16.6655685
Zm00001d012068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.168865514
Zm00001d012069	21.87082059	22.74016185	15.38369096	0.74729695	0.477876235	0.212503407	0.571187942	0.285197167	0.914002169	2.500936368	1.153301206	2.655068768	0.564652355	1.434730791	1.731894056
Zm00001d012070	0	0	0	0.009535889	0.010074864	0	0	0	0	0	0	0	0	0	0.00883994
Zm00001d012073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012074	13.73786377	13.16026706	12.60936568	10.85560218	16.24998294	13.2983805	13.95055544	13.63596267	14.55210633	20.85148169	23.09087755	23.14935099	8.913421761	7.138193709	7.857386416
Zm00001d012078	0.551646281	0.362504626	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012079	0	0	0	0	0	0	0	0	0.04742735	0	0	0	0	0	0.022230397
Zm00001d012080	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012081	0	0	0	0.337627126	0	1.050275612	0.579944576	0.544039479	1.057254247	0	0	0	0	0	0
Zm00001d012082	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012083	49.7906992	53.75277418	49.05256004	71.78162215	41.24413566	76.6036282	48.12785006	31.82786765	37.46313558	4.379973398	3.346481271	1.26504305	159.3629358	165.4280453	138.4800384
Zm00001d012084	10.86233625	11.83256364	10.91301336	11.51142891	12.56218486	12.80405659	12.74438635	11.08367779	10.50167948	5.549147232	6.04711585	3.006448778	9.118247141	8.523315018	8.425865573
Zm00001d012085	3.590246424	3.909352114	3.747614209	4.573180539	4.532593863	4.640499093	5.438608784	4.24371908	4.980331932	6.171133283	5.824680422	4.816289232	4.819142125	4.604638539	4.87669622
Zm00001d012086	5.61648345	5.625499723	5.683862618	14.34282305	22.81833448	15.79890423	20.70947235	23.12222777	24.30385721	1.266418784	4.603667783	0.730801152	7.507113585	7.96987682	9.188706527
Zm00001d012087	6.313548455	6.329987847	7.214970416	11.53751313	10.89636523	10.7453699	6.767344369	6.689441849	5.554324683	0.028800742	0.245782183	0.03855492	5.756429868	6.867717937	6.896935307
Zm00001d012088	1575.261932	1038.575752	2402.23941	938.237945	2573.516401	1585.584509	1589.580354	2269.58324	1661.609476	4327.824715	3285.97868	2932.535038	5672.004417	6730.111254	6176.412226
Zm00001d012089	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012090	12.00614774	6.254753955	6.280731641	1.566575438	1.501154694	1.181028548	1.297102145	1.690707305	3.458548307	1.53095224	3.020660033	0.647195407	15.98502313	19.40609688	4.762007482
Zm00001d012091	14.97780872	9.097823935	7.287364931	7.233405406	6.732451356	4.15149429	14.52257904	13.346341	20.63338478	10.73864107	21.79429656	19.75711069	1.913804591	1.898106085	1.326361852
Zm00001d012092	3.876452984	1.736256991	4.598682307	7.394008472	12.34611533	8.571390592	5.098867593	5.498964624	4.767958891	0.071474168	0.300619322	0.149262201	1.994958723	1.283941014	1.809459911
Zm00001d012094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012095	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012096	0	0	0	0	0.154625376	0.119807812	0	0.011791414	0	0.10789634	0.172645282	0.086663076	0	0	0.011306017
Zm00001d012097	0.65234245	0.492976638	0.891806429	1.673636308	1.891025136	1.541331178	2.003660531	1.707994701	2.562968185	0.462696576	0.775617629	0.464551304	1.178415897	1.501753473	1.206715032
Zm00001d012098	7.473502875	7.349802164	7.399153926	17.91446421	12.61800075	15.21508144	17.23552397	14.29090802	13.14064073	8.3087485	11.98647267	11.51530629	14.80504814	13.8041658	14.18517005
Zm00001d012099	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012100	9.587411419	9.218946639	10.4712892	20.72414659	20.55022972	21.63185269	23.16071751	17.933433	19.08028032	4.059190633	9.719635826	3.955443852	11.72234267	11.55348481	12.71043036
Zm00001d012101	12.95557271	10.02120177	9.476309275	8.879476465	18.77656772	11.91393233	17.21691434	18.10237969	17.28874783	17.66466177	15.22921063	10.55675852	5.641266611	4.787958414	6.552293918
Zm00001d012102	7.42401757	7.447524626	7.294604146	6.939654693	9.514225926	7.288809362	10.20284485	10.5370503	9.173790195	9.086812506	7.896261035	8.489539321	3.966892814	3.822372803	5.181820429
Zm00001d012103	13.21522212	7.363148489	14.53102934	30.99513872	115.7741774	38.13528217	75.35561845	99.83011937	82.81740794	41.52099866	29.16630859	11.55781331	13.55335161	14.77693031	21.59459848
Zm00001d012104	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012108	3.011626883	3.559827285	3.154828576	4.21180721	4.119997538	5.554418293	9.050749957	7.929776393	7.493178284	3.500980385	3.292653133	2.595702742	2.98070993	3.106602407	2.946404813
Zm00001d012109	0	0	0	0	0	0	0.087894564	0	0	0	0.379419303	0.187481916	0	0	0
Zm00001d012110	0	0	0	0	0	0	0	0	0	0.025342588	0	0	0	0	0
Zm00001d012112	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012113	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012118	7.339702166	7.123406838	7.930805721	16.1727908	13.53958813	13.70198451	12.47953227	11.77552291	13.82035483	1.543228066	3.199294156	0.852944805	9.608084321	9.995306121	9.247809006
Zm00001d012119	0.040302648	0.09064524	0.103754231	1.170426486	0.914158639	0.895826398	0.874596253	0.426948986	0.663908002	0.007940571	0.054453141	0.019133762	0.44455672	0.441811779	0.682289213
Zm00001d012120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012121	18.93672077	18.93687156	20.36775493	17.59081719	25.95499949	18.7958165	24.30201414	29.3480898	29.37860248	33.21842934	61.23951896	47.89276041	14.47032199	12.88895438	14.93789818
Zm00001d012122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012126	10.31826831	10.60222868	11.96788782	16.69140467	17.16256336	16.38514617	17.77124842	18.025366	17.39548989	18.36709093	20.02892856	19.1407316	18.84481585	19.88256856	18.55915291
Zm00001d012127	26.6981913	28.61911518	33.02435487	39.9797087	53.95874666	39.87063523	40.85518645	46.47841832	42.0735383	37.34134217	35.15347099	20.7669384	44.2954561	37.69115873	46.7088998
Zm00001d012128	7.642973294	7.554954777	5.960849127	2.59556392	2.167021212	2.300624449	1.642207648	1.377305196	1.032571837	0.197951554	0.460031382	0.059623514	5.320361788	4.477709368	3.367204933
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Zm00001d012132	0	0	0	0	0	0	0	0	0	0.04446907	0	0	0	0	0
Zm00001d012137	5.127800501	5.258307269	5.610375278	3.85555242	5.796310869	4.141971887	4.736015473	4.90019926	4.196324246	4.251650658	6.869608674	4.477760047	2.653631321	2.091581737	2.696344771
Zm00001d012138	0	0.009907347	0.14663967	0.922161087	2.964305472	2.071958233	5.413796871	5.984841207	5.151256968	0.151880551	0.119032437	0.18298724	0.035209551	0	0.109131038
Zm00001d012140	3.694738603	3.231868161	3.354564183	5.088819935	8.628175288	6.210062838	7.061697153	7.084063608	6.528009929	5.869187431	5.941122563	5.048124172	2.126106144	1.798426404	2.010175073
Zm00001d012141	27.02785786	29.09933835	26.71584175	69.61320408	35.52272171	54.86567175	11.23585812	8.221506402	10.4478186	0.32345201	0.339026626	0.082375248	63.74182358	75.91265706	87.86444316
Zm00001d012142	16.95452624	20.23401822	14.02922727	4.91647469	6.293997995	6.753465327	7.377936743	9.453701931	6.608744114	66.22683874	19.99547346	60.26122204	12.14053586	12.92844684	14.73939583
Zm00001d012144	0.037162715	0.105314799	0.086598623	1.158693163	1.248666902	0.921970576	1.574142954	1.898814244	1.541098806	0.153760534	0.052721298	0.036021273	2.068917023	2.09806229	3.598333023
Zm00001d012145	0.054343349	0.078223599	0.038593185	0.532515243	0.849034682	1.274493871	0.444501426	0.224659574	0.382973833	0	0	0.034399483	0.156373592	0.085104411	0.260288785
Zm00001d012146	0.111389739	0.210443682	0.179966144	0.912244288	0.79746295	0.964371541	1.232171019	1.052100248	1.002833415	0.040966617	0.004682201	0	1.192472509	1.029788793	1.931726081
Zm00001d012147	0	0	0	0.061641974	0	0.012110725	0	0	0	0	0	0	0.077433007	0.075855536	0.262858769
Zm00001d012148	0	0	0	0	0	0	0	0	0	0.007602776	0	0	0	0	0
Zm00001d012152	0	0	0	0	0	0	0.082102686	0	0	0.055374113	0	0	0	0.242078933	0.255306803
Zm00001d012153	6.702965384	6.908046067	6.338689929	3.430291605	5.928520638	4.033058352	7.629961726	6.756970334	7.071361565	4.211546699	3.830322388	2.710992624	3.841299223	3.484080195	4.212796643
Zm00001d012154	0	0	0	0	0.018803608	0	0	0.068828377	0.105597639	0	0	0	0	0	0
Zm00001d012155	4.665851346	4.77291942	4.271374126	4.237106703	7.125789174	5.690513613	7.644551425	7.669448638	7.854133522	7.149975824	6.766522402	5.617556465	4.143418574	4.243640103	4.16214647
Zm00001d012156	8.51001406	8.727583779	7.958983757	6.641678173	6.195956207	6.385990143	8.144621649	7.40723402	7.714106797	7.33825653	8.730830286	8.166374171	6.51462483	6.258049903	6.045181084
Zm00001d012158	0.050562174	0.019594845	0.058005063	0.135819276	0.199869245	0.304962861	0.504468535	0.393937207	0.604385006	0.675879252	1.520443249	1.749250424	0.343836538	0.179075175	0.323760589
Zm00001d012159	1.008968926	1.174189562	0.828633329	3.061230329	2.340168647	3.679459757	3.592097561	3.806280527	3.718461869	1.839104065	1.889911784	2.222307577	5.797206161	6.177158739	4.986641615
Zm00001d012160	4.107751149	4.239442951	5.580942715	26.08258194	25.30768147	22.48527015	17.8388786	18.8503014	16.18167784	1.353063544	3.309168872	0.362263287	17.45855502	16.20227599	22.77733711
Zm00001d012161	38.39314107	29.11085859	51.65444894	82.58338099	144.6821146	73.06351509	92.97827932	104.5521959	88.71030168	6.258386937	25.39204861	4.204991382	37.96067206	37.07115737	65.09454949
Zm00001d012162	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012163	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012164	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012165	0	0	0	0	0.18532774	0.034463235	0.164350174	0.067837022	0	0	0	0	0	0	0
Zm00001d012166	0	0	0	0.023890943	0	0	0	0.023098173	0.03150009	0	0	0	0	0	0
Zm00001d012167	0.052739436	0.029522451	0	0.00730826	0.061770618	0	0.184878096	0.014131501	0	0.266700052	0.07389569	0.233689417	0.10491933	0.398279887	0.718138054
Zm00001d012168	8.337978293	8.177249655	9.345173295	40.26985085	24.72634575	39.63359159	19.14722926	15.71197751	16.23340838	2.517256932	5.129003966	1.554424252	62.75875873	68.99318351	62.62957516
Zm00001d012169	5.977037052	5.739656571	6.012391762	4.694974316	8.332496346	5.663957727	7.119220814	6.131876857	7.595335479	5.100838585	5.767442619	5.871187895	4.545221301	3.855322303	4.046898742
Zm00001d012170	69.99231267	66.21080241	62.66401895	125.2961851	123.4125359	79.31263376	114.1401181	127.6639662	129.8291375	4.632356791	18.37067273	4.025719276	43.95032156	47.91837134	46.93544079
Zm00001d012171	0.142573703	0.219477018	0.078751563	5.275081529	3.861603037	5.531289292	2.184276663	1.776418133	1.562959258	0.131088427	0.239720017	0.01754852	2.907256267	3.351644418	3.846141987
Zm00001d012172	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012173	8.677666706	7.089439996	8.489252452	10.83459688	31.70129684	16.59349331	22.54062054	28.59730496	24.3566225	28.81468561	29.37801084	24.29161681	8.354604721	7.616637915	11.04938113
Zm00001d012175	3.507518056	4.284054202	3.052663875	5.88089039	4.808134666	7.566521061	3.236307079	2.187762752	3.284821781	1.296491202	1.338399838	0.352715515	2.641191398	3.030619972	2.845630491
Zm00001d012176	0.007109326	0.008954222	0	0.62065101	0.992963479	0.365815678	0.390440633	0.505761507	0.587440635	0.039219731	0.340673351	0.118130831	0.365955948	0.568924976	0.410967552
Zm00001d012177	0.832712012	0.949233874	0.504348509	2.464847227	0.999998193	3.073472204	8.609414824	7.314394778	9.268682803	2.391386787	3.568931102	2.066733952	6.434355348	7.45877823	7.738389101
Zm00001d012178	2.273348693	3.830795843	2.5415019	13.96896986	5.156586057	9.805300589	3.444839554	4.480952049	3.162129445	0.085899251	0.274895335	0.068994863	21.37382804	26.05920314	26.27101186
Zm00001d012179	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012180	0.004987681	0	0	0.329682234	0.210304051	0.769934567	0.396311168	0.378882511	0.246047764	0	0	0	1.367436953	0.902165744	1.297449002
Zm00001d012181	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012184	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012185	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012188	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012194	2.387040843	2.869828285	3.416109475	0.135318809	1.906228183	1.595155441	4.099362921	2.529351802	2.007193214	5.137706892	6.339526922	6.610638796	0.5261406	0.317182787	0.209071588
Zm00001d012195	10.11939374	9.10599494	8.867668991	9.375626866	9.827628655	8.958950436	9.65952511	8.817345732	8.707329176	5.654290918	9.932309525	7.441179575	7.472821011	8.012020744	8.313091469
Zm00001d012196	6.332487793	7.77184462	7.158497106	7.710081053	6.77424631	7.297633714	7.277876224	6.289731555	6.07659915	0.909245747	2.034654068	1.178749807	5.526633453	4.659628479	5.816859772
Zm00001d012197	4.190970229	3.968007819	5.148681744	16.26915435	34.36469985	13.19628592	27.64918925	31.98135504	28.75420976	5.620589542	9.488607637	2.582761204	8.075133023	6.843905977	10.11393753
Zm00001d012198	8.905759474	12.197105	10.57654073	10.04870022	7.422414904	7.307717474	7.022070184	7.299902948	6.364947365	1.17018188	1.608946764	0.551218412	8.231090927	7.280144215	8.511389234
Zm00001d012199	55.62157071	62.30852669	49.06651921	10.58802621	9.640780101	10.17381101	8.58565136	9.311260659	8.731891276	20.85149169	24.50551457	19.92320072	10.63592137	10.01053055	9.098277082
Zm00001d012201	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012203	13.56319974	14.44810102	16.83197271	33.99010161	33.51716084	34.16004751	33.02843444	31.44114366	33.58760989	14.52042905	25.07954438	15.3510845	23.50833183	19.25039757	19.84810309
Zm00001d012204	18.98594024	18.72865606	24.20008179	6.487244125	7.598897211	6.857585117	6.487712938	6.599212385	5.913001944	8.359155186	8.15649507	6.15044409	7.073523	7.363284284	5.582367042
Zm00001d012205	22.51906713	24.33763468	23.46327824	83.60242031	51.07825063	73.71551661	41.07815215	38.33276265	44.47453569	5.836035984	10.95838434	4.075650035	126.3510093	135.1414935	135.8775258
Zm00001d012206	54.4721974	53.75815933	46.17115143	37.28415528	32.0147979	36.68073655	47.95067765	38.7066044	37.07636015	21.58814898	24.22899887	23.14447102	31.611991	29.6178195	39.30093812
Zm00001d012207	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012208	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012209	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012211	1.507741798	1.328320521	1.854408059	2.991086946	5.368129186	3.340255494	5.408623367	6.358267115	5.694005708	1.298293543	3.078547246	1.324050854	2.307895504	2.427875645	4.240473581
Zm00001d012212	0.072334571	0.253071277	0.049943121	4.239989337	2.213342724	2.737365511	5.869649084	2.946064934	4.282012189	0.221691775	0.050675675	0	0.12591399	0.264318989	0.418143176
Zm00001d012213	2.237262787	2.47086783	2.662894426	6.302281399	4.975534916	6.344419887	5.104924488	4.046444504	4.578018375	0.433666204	1.652753148	0.718224872	4.169500938	3.935087287	4.381745581
Zm00001d012216	1.786262045	2.028366288	1.852889788	0.359597204	0.528184059	0.628954036	0.353352875	0.77164612	0.277537827	0.465552728	0.682854718	0.296031973	0.865658679	0.686128043	0.650444941
Zm00001d012217	0.017731821	0	0.022037159	0	0	0	0	0.02138054	0	0.024455104	0.08944158	0	0.079369908	0	0.082001619
Zm00001d012219	5.042991187	5.805819759	4.586332931	12.43139188	10.00192984	12.30844004	12.04634679	9.912806952	11.12690739	4.111487997	7.005247567	7.666747661	9.611192635	10.89824518	10.32464189
Zm00001d012220	0	0	0	0.09199732	0	0.31128483	0.555479942	0.434840188	0.596381869	0.259989428	0	0	0.045858962	0.089849441	0.198994037
Zm00001d012221	0	0	0	0	0	0	0	0	0	0	0	0.064307314	0	0	0.067115975
Zm00001d012222	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012223	6.961425861	6.347874501	7.599833299	9.899178389	11.88532741	9.892543743	13.46234168	12.57705189	11.74493492	9.44321649	11.24966066	10.5495378	8.924865049	8.985445176	9.079747033
Zm00001d012224	0.43029284	0.703591253	0.44720466	1.39338771	0.951587846	1.189980674	0.793890296	0.80707701	0.778937267	0.114524429	0.111061156	0.050174619	6.64542194	6.47693907	6.033729842
Zm00001d012225	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012226	0.473793462	0.519745313	1.044701774	2.477945316	3.282569683	2.789961641	2.696702492	3.169721801	2.610585338	0.126472122	0.433646678	0.10158327	0.855145318	0.89636494	1.599134703
Zm00001d012227	0	0	0	0.173538625	0	0.383567911	0	0.041945029	0	0	0	0	0	0	0
Zm00001d012228	4.703074562	3.775854945	5.290090329	5.88138053	10.95959657	7.16852436	13.18234601	13.50028468	12.57058598	38.57187616	18.80030022	20.37306722	9.369469502	8.992132019	10.91412218
Zm00001d012229	0.289741712	0.595413342	0.729659805	0.503992752	0.542525511	0.112096813	1.630449058	2.748931663	3.451073753	26.75227478	17.11486835	20.06016995	0.238906521	0.108661197	0.299719805
Zm00001d012230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012231	28.71119208	35.43599446	35.66245865	45.14102355	36.95582704	42.74558957	60.78481576	59.41331567	44.76698963	33.84606493	18.67315543	9.513999829	52.55069751	46.14522081	48.74075654
Zm00001d012232	4.496425797	4.169220719	5.183735477	0.65460084	0.714652606	0.711634485	0.58469457	0.396604363	0.530799086	4.087557719	1.654709296	5.585626003	0.246687646	0.260841642	0.194184535
Zm00001d012233	0.54196108	0.575527165	0.548085476	0.576511768	0.679107681	0.761620078	0.6146556	0.63426165	1.055005092	0.337086954	0.294813075	0.294294064	0.285398518	0.215512945	0.325576385
Zm00001d012234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012237	1.221484818	1.321501685	0.895269059	6.015409307	6.603017212	7.021972923	3.513366202	3.474374462	2.916293095	0.950303507	0.908400654	0.12143254	3.434725945	2.077220264	3.802085377
Zm00001d012238	0.03796159	0.047812763	0.056614531	0.148344684	0.170067877	0.275948308	0.224747799	0.256329005	0.146693795	0.048864938	0.095741566	0.036445176	0.328513841	0.32736998	0.459369214
Zm00001d012239	0.004578444	0.017299702	0.068281245	0.399702576	1.019538419	0.325334784	0.347744274	0.623823434	0.598528077	0.359922462	0.33486676	0.147081984	0.230554166	0.210800148	0.333478285
Zm00001d012240	0.44374595	0.393659765	0.671377636	1.198276122	2.328632853	1.612038966	1.857644037	2.424039072	2.241394081	0.814224521	1.649538271	0.718107418	0.906772635	0.706409844	0.874383055
Zm00001d012241	0.301186188	0.758690236	0.309216806	1.763810678	1.828993076	2.534830342	1.637267771	1.673703065	1.08203864	23.80338991	27.44507177	42.27078688	15.23993461	15.27399181	23.99637177
Zm00001d012242	0.043366325	0.054620047	0.013473949	0.392113344	0.64284182	0.026564841	0.950129081	1.372610312	1.591110497	3.648368008	5.810422242	1.849510997	0.38822648	0.344662739	1.391312561
Zm00001d012243	4.04256917	4.589080253	6.381280899	5.473864065	5.174487149	6.663633215	3.055095545	3.291814914	4.092084229	2.012925563	3.707497759	4.559596026	3.40751108	3.625859685	2.464347043
Zm00001d012244	7.879294378	7.910778382	8.764090315	14.01303509	15.07762253	13.90385315	15.71115326	16.32567439	15.4457245	9.816470641	11.85685322	5.405728566	9.543180618	10.57534096	9.783515036
Zm00001d012245	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012246	0.011459542	0	0	0	0	0	0	0.055270398	0	0	0	0	0.012823596	0	0.026497589
Zm00001d012247	13.52937254	12.5668038	14.54848872	13.85899666	12.15000686	13.65292439	10.33882606	11.5492138	10.54262422	6.637615336	8.156138854	5.47688491	15.46317672	15.01568548	15.17406555
Zm00001d012248	0.03797565	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012249	0	0.016588603	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012252	0	0.049765808	0	0.13140786	0.034708779	0.161359654	0	0.063523685	0.016243182	0.01816463	0.066434931	0.014589954	0.088430923	0.043314701	0.21318051
Zm00001d012253	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012254	0.430233448	0.848470971	0.274383164	0.550688717	1.372484292	0.561772134	0.635024574	0.771319575	0.586449495	0.687051728	0.678172727	0.269651353	0.443436224	0.403373762	0.68720922
Zm00001d012255	66.83714361	58.90607783	73.07191776	8.672818321	34.19143781	12.78807336	14.41155015	24.19727886	27.43041295	85.99057866	67.3602456	67.67882681	3.025401275	2.856827536	4.801357795
Zm00001d012257	2.215928698	1.919540797	1.846809756	4.166171946	4.326458364	3.320697502	2.650433817	1.545232968	1.785738714	0.055744879	0.128924205	0.065845098	0.364504577	0.297131319	0.538772029
Zm00001d012258	0.283794077	0.302448969	0.332352031	0.211000106	0.215734806	0.113666765	0.255087217	0.460641811	0.464418837	2.943018054	1.947657356	1.148674961	0.079393671	0.13162136	0.15143293
Zm00001d012259	0	0	0	0	0	0	0	0.009017722	0	0	0	0.008284668	0	0.237756955	0
Zm00001d012260	30.40096825	32.72708025	26.93453644	36.62507647	32.82909843	39.70403246	32.69721434	31.03504597	28.66271909	28.30650116	26.58917576	20.87205186	30.23424927	30.21394786	32.93890707
Zm00001d012261	0	0	0	0	0	0.011417268	0	0.011236807	0	0	0	0	0.020856919	0.12259212	0.129290896
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Zm00001d012265	0.862058519	1.545619685	1.449499052	3.65541476	4.343103344	3.665425801	4.372933853	4.598021499	4.115043891	4.433975296	5.141265253	3.842266617	3.665750421	3.046295961	3.564515481
Zm00001d012266	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012267	12.66370739	13.27789935	12.40958781	18.96052445	21.97496195	17.89317112	20.51172893	19.88201893	22.16403119	12.13310186	14.69881803	8.72911106	15.98602202	17.95014171	19.37608837
Zm00001d012268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012270	6.111179165	4.363362366	6.599091913	8.742123814	13.12910429	10.30334416	11.08496679	11.49710998	11.35008937	6.943599036	7.33893584	5.030191226	5.027054534	5.820839357	5.371543
Zm00001d012273	6.760618028	6.93616805	5.898791412	7.963872455	10.71513868	8.348313509	10.99209	11.42022434	11.37682147	3.088300209	5.63403098	2.160090751	6.246508164	4.146058781	6.317370028
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Zm00001d012275	4.799382568	5.074135854	5.012296101	4.860554516	9.508915834	6.099860102	6.278387231	8.912767722	8.743441649	16.96456545	16.72079114	19.29670527	3.160654896	3.067463357	3.604656692
Zm00001d012276	10.83164765	15.430735	12.57934203	4.74091826	7.121055434	8.360538319	3.050471377	3.976135773	2.485288482	5.937551878	7.85467867	4.008058387	7.354579191	5.221561865	9.875323118
Zm00001d012277	50.85342184	43.27495063	46.73121613	64.11197649	91.7207967	70.49936498	82.0215364	79.32409785	78.87817466	59.1668152	81.64327386	55.2312548	40.76452064	45.45940804	42.07491702
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Zm00001d012285	17.3254142	12.10155628	16.73658397	0.143412644	0.892275127	0.046960184	2.791864027	4.128802045	2.032705202	17.00463971	13.85633976	14.0262366	0.07148855	0	0.14771787
Zm00001d012286	3.781104944	3.842726729	4.103005204	5.177515469	5.651405908	5.42747935	5.617570372	5.171575286	5.2199452	3.808920365	5.417480665	2.344330111	3.907524316	4.678568861	3.845428478
Zm00001d012287	33.28133307	32.64784851	43.92755859	93.41720555	49.8279318	96.80500875	73.07301653	72.16003645	56.73699273	8.447362062	16.96249052	13.34504113	414.0075355	412.8998574	426.4048162
Zm00001d012288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012290	0	0.108295407	0.026714858	0	0.708091837	0.237016021	0.653059372	0.933079032	1.484565547	0.029646046	1.246908444	0.047623813	0.048108647	0.023564287	0.024851906
Zm00001d012291	0.049713578	0.020871478	0	0	4.825529999	0.933891004	1.723346047	1.678411252	2.064124512	0.022854407	0.501523333	0.018356815	0.018543697	0.018165923	0.03831712
Zm00001d012292	6.020070729	3.890395462	6.825638548	7.714341995	33.06866421	11.70991198	20.41280318	26.86909079	28.81334535	208.0666499	252.7552941	224.1803569	0.352704317	0.596020278	5.584416598
Zm00001d012293	1.559805212	1.849016882	3.268894584	0.152574227	0.322395639	0	0.929185147	0.626923346	0.150876268	166.6991218	91.48312927	273.7845062	0	0	0.353597585
Zm00001d012294	0.012009869	0	0	0.184730977	0.047474292	0.068664085	0.145013161	0.111022288	0.024685832	2.363072032	1.554869192	3.649727256	0.228470289	0.215038784	0.24993085
Zm00001d012295	2.425136164	2.421417616	2.654789024	3.366677234	3.659064567	3.276446344	3.575250732	3.201932355	2.851395065	2.472393072	2.854824389	2.196954775	1.670935351	1.75857157	1.980568976
Zm00001d012296	0	0	0	0	0.057308133	0	0.516683486	0.026221203	0	1.109698987	2.714867328	0.409524389	0	0	0.117328403
Zm00001d012297	5.227236499	6.229215513	6.896204901	15.27828949	13.03355487	14.00687227	15.09778708	12.58955359	13.14121204	3.493699369	4.817020986	2.553756934	15.01357676	12.22459778	13.18700595
Zm00001d012299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012302	1.880515721	2.324924181	1.534176813	4.172615415	4.256438627	6.233221326	3.855530268	4.326284579	3.457453829	1.432016619	2.487777927	1.060745079	4.441097985	4.477095267	5.962192401
Zm00001d012304	28.66494703	23.69067121	23.09388377	4.443759619	12.4864993	5.283768117	10.24633719	13.85379942	10.71047203	3.845327847	3.037955188	1.604948905	1.178261687	0.812597677	1.743216488
Zm00001d012306	7.768994377	10.14812773	13.20357722	11.5893223	14.79451253	13.18405582	14.83606845	15.68996749	14.28734639	9.257067272	15.09353606	7.90670051	11.7811121	12.639543	11.44175753
Zm00001d012307	0.379471609	0.779353218	0.543836751	2.25544883	0.927945587	1.357018958	0.794946875	0.564731754	0.775773401	0	0.02155522	0.01514816	3.798814678	3.916303226	3.648103161
Zm00001d012308	0	0	0	0	0	0	0	0	0	0.463483064	0	0	0	0	0
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Zm00001d012313	3.890838504	2.629277376	4.228342337	2.681053354	8.170027108	9.022112112	26.97764862	37.2425248	33.41409365	88.73680024	117.2848487	154.012069	2.435441642	2.580588028	4.662663209
Zm00001d012314	2.650326902	3.359667438	3.134197528	5.542773674	5.291887641	5.539330891	4.727911342	4.305664407	3.902240086	0.318873729	0.696505647	0.132803768	2.5585423	2.436014468	2.484972646
Zm00001d012315	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012321	24.47390718	16.24020722	19.41107214	1.076852835	18.49422583	3.737701066	17.0622469	15.96383634	21.38019954	59.15803018	39.34318569	104.650271	0.053679122	0.494304333	0.887343835
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Zm00001d012379	0.955782796	0.775789935	0.835894214	3.090398478	5.280084248	4.2675158	4.831333391	4.908610994	4.191094271	2.304377511	2.526608843	1.474439168	2.551078725	3.197616427	3.339601929
Zm00001d012380	1.377173033	1.60797893	1.309108054	5.087662999	6.704312988	4.819992558	5.975885098	5.767070283	5.223839196	1.894215286	2.806817048	1.154485245	4.223449344	3.753862173	4.144023148
Zm00001d012381	0	0	0	0.003285197	0.013883512	0	0	0	0.006497273	0.025430481	0.056469691	0.008753973	0.002947697	0.002887647	0.006090872
Zm00001d012382	1.977842593	2.150852251	2.793804794	1.804887426	1.500095305	0.780128949	1.589592103	2.082361979	1.451638395	2.18221681	1.946632557	1.31457856	1.543890341	1.121107968	0.970434474
Zm00001d012383	0.026190103	0	0.006509827	0.019597896	0.027607443	0.134763132	0.055085645	0	0.038759593	0.079465035	0.019815936	0.249504988	0.029307567	0.126326248	0.151396667
Zm00001d012384	0	0	0	0	0	0	0	0	0	0.259470901	0	0	0	0	0
Zm00001d012385	0	0	0	0	0	0	0	0	0	0.022366412	0	0	0.036295492	0	0
Zm00001d012386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012387	0.516870848	1.095851255	0.706605472	0.666106196	0.578895194	0.928748348	0.775086607	1.028327175	0.701189614	0.237616704	0.152084502	0.209940892	0.655514419	0.934909756	0.96607673
Zm00001d012390	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012391	0.361809593	0.423150484	0.392558596	0.812936056	0.65078414	0.671935358	0.684492068	0.564368113	0.648069189	0.178212528	0.260716289	0.197217201	0.170305217	0.119618083	0.567694573
Zm00001d012392	0	0.056133561	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012393	4.432818586	4.776809618	3.897677212	5.619380235	7.004795348	4.964176685	8.749703225	8.862683685	6.566270247	8.650670638	10.2499017	12.16397437	7.309206339	7.302442719	7.954436542
Zm00001d012394	2.133409115	5.056015947	1.093029061	1.943936567	1.388329055	1.408207288	2.207987018	2.498908472	0.719521236	0.156123256	0.087846444	0.20256804	75.11880254	89.84495389	109.7245514
Zm00001d012395	3.800829001	7.172198954	2.999341147	3.759492005	3.340751538	2.10402321	3.939579624	5.029784369	3.661916664	2.474508938	1.903509015	1.001280827	33.00946585	32.14872985	32.06097946
Zm00001d012396	25.23052015	23.94005341	21.91286236	11.25954615	11.15952735	11.67303902	12.0502013	12.29850001	11.59154081	20.73740943	23.25755316	26.87173645	7.162174822	6.32701113	7.269182437
Zm00001d012397	0	0	0	0	0	0	0	0.09514803	0	0	0	0	0	0	0
Zm00001d012398	0.096959106	0.125420903	0.052108567	0.081704859	0.082869954	0.089893751	3.095756211	3.990759523	2.595154239	0.101195475	0.089222991	0.113212675	0.085040817	0.126398891	0.181780472
Zm00001d012399	0.065971062	0.127831995	0.006306848	0.234170856	0.160479789	0.167864353	0.225331776	0.379373632	0.219047812	0.090984971	0.070392914	0.050593672	0.193077465	0.116824284	0.158410143
Zm00001d012400	0.811514828	0.957210314	0.581652269	1.194154486	1.357828367	1.267757803	2.232664084	1.863813644	2.139325028	0.651393657	0.633500049	0.532716621	1.287692001	1.327356171	1.677878291
Zm00001d012401	0.075740908	0.009539595	0.150609638	1.313004772	1.217557048	1.753787243	3.876442428	6.000137573	4.885319239	19.79501828	11.75749213	18.79412434	2.288425724	3.36270865	2.276737473
Zm00001d012402	4.275196862	4.94675556	4.437420555	1.781186132	3.578009952	1.427417447	1.94333068	2.651098774	2.062649686	5.960994724	4.940909643	4.163401379	2.618102327	1.99825156	2.150894014
Zm00001d012403	714.8228106	943.4109911	98.22291888	3.404542779	2.755742917	2.589237818	0.951801879	0.90252733	2.280636927	1.761003797	8.106345342	4.633543926	0.049270692	0.217201257	0.07635658
Zm00001d012404	6.555766076	8.367975425	6.241068845	4.853933883	5.729198431	6.355527395	5.056477957	5.45522286	5.624401909	5.074665919	6.214977716	5.143805069	3.746346905	3.49391028	3.690818891
Zm00001d012405	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012407	0.47877761	0.468685549	0.624482966	0.484782916	1.289827092	0.572049069	0.8807209	0.768776454	1.128315408	0.281123466	0.905630889	0.275686393	0.188314326	0.150700317	0.479545269
Zm00001d012408	0	0	0	0	0	0	0	0	0.030795293	0.008609537	0.031488337	0.027660954	0	0.218986472	0.151562581
Zm00001d012409	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012412	0	0	0	0	0	0	0.14391745	0	0	0	0	0	0	0	0
Zm00001d012413	0.163195881	0.198333683	0.110305789	0.846259741	0.403661283	1.255746451	0.866488538	0.220942693	0.501398967	0.063178674	0.256341442	0.13003545	1.134175206	0.831732979	1.317426849
Zm00001d012414	1.519025991	2.755035154	2.265419968	14.17058564	5.764434026	12.13381572	13.13486594	10.98959748	9.29196645	0	0	0	95.46295041	80.19649594	96.23983349
Zm00001d012415	0.125424164	0.487080948	0.441652975	5.29233102	3.443015354	6.172080802	3.65174025	1.424110683	1.546827798	0	0	0	1.918166788	1.122870716	0.761289113
Zm00001d012416	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012417	0.266807844	0.174743643	0.291798825	1.929956779	0.956239056	1.712830843	0.935294903	0.694892581	1.092439585	0	0	0	0.764330354	0.503072699	0.99943074
Zm00001d012418	1.099149039	0.44620586	0.767683843	0.385186562	0.873761802	0.779029402	0.976534883	1.073402545	0.873829232	2.267597524	2.176461309	2.958435561	1.087670979	0.527777405	0.661638645
Zm00001d012419	0.225204435	0	0	0.198257789	0.192008159	0.162297792	0.077397466	0.431277808	0.130700953	0.036540476	0.283990017	0.220121694	0.029648352	0.159743947	0
Zm00001d012420	0.120114675	0.096272195	0.067854033	2.301500568	7.136479824	4.294306242	17.43579448	16.64897686	14.02566338	13.35805385	7.628502378	19.49898442	0.708718758	0.897776759	4.84147678
Zm00001d012421	8.73229803	8.507396103	10.04664507	18.9775804	21.68782861	18.20557841	18.33633458	21.87928953	17.9800084	10.28448299	13.49206793	5.590847403	18.85410202	18.86096729	20.49132948
Zm00001d012422	0	0	0.69824588	2.33563971	0.740295466	0.229440166	0	2.032322822	0.461929397	0	0.708487585	1.037285789	0	0	0.216517974
Zm00001d012423	43.02806232	50.49234114	52.16211556	56.95745158	78.45164967	75.61383565	56.29779494	71.59165317	52.49537498	18.94597189	42.84980834	14.08353483	50.99516582	44.63485821	37.14747619
Zm00001d012424	0	0	0.031639944	0.031750782	0	0.187141141	0.148741499	0.0306972	0	0	0	0	0	0	0
Zm00001d012425	13.20233844	13.01111859	17.19096824	19.11519582	31.62561272	19.5316782	23.23456992	26.96161698	22.55284876	6.547677275	12.82365061	5.989574982	13.69162812	10.98717096	16.41568263
Zm00001d012426	0	0	0	0.133117787	0.011720141	0	0.394953679	0.268126159	0.263272708	17.97163776	11.48576534	13.81419015	0.607164303	0.848314341	1.223742119
Zm00001d012427	0.482514138	2.295862628	2.09884497	0.23402194	1.024317321	0.131365742	10.9631234	4.040293192	4.429993493	440.0952095	266.2713986	474.2564185	0	0	1.487605842
Zm00001d012428	20.17472486	17.87076122	21.36310228	27.17912674	44.77511917	22.84789805	55.28015611	64.39624729	54.16291816	48.96411364	38.30269348	43.47803895	19.94429578	22.35755612	24.95443041
Zm00001d012429	0	0.079107058	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012430	0.214956508	0	0	0	0.424855102	0.026335113	2.813178834	1.710644891	2.438929112	8.004432517	3.740725333	4.810005107	0.144325941	0.023564287	1.366854817
Zm00001d012431	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012432	0	0.107786978	0.132947181	2.001193649	0.986674447	1.703745835	0.524994641	0.309566126	0.712412239	0	0.107917775	0	1.508307721	0.797424331	1.236761508
Zm00001d012433	0.893544701	1.266100714	0.980941653	4.262542472	4.709504923	3.795010331	2.775584415	3.717069737	2.213160099	1.068032729	2.112728502	0.445422721	7.007669028	5.248675462	6.336098956
Zm00001d012434	0	0	0	0	0	0	0	0	0	0.952266944	0	0	0	0	0
Zm00001d012435	0	0	0	0	0	0	0	0	0	0.047374084	0.014438748	0	0	0	0
Zm00001d012437	10.37268082	7.912800484	9.14493027	23.18924368	36.41553882	22.87928963	25.5217885	28.63659032	30.79186382	16.76923	22.103375	16.67342572	6.564633818	6.464277039	7.943975331
Zm00001d012438	0.202128459	0.35487124	0.26643044	0.27500274	0.121060862	0.127569555	0.021471555	0.007385482	0	0.836305405	0.054067676	0.013570226	5.229746172	4.109307643	3.292877514
Zm00001d012439	67.96180709	75.94007155	79.50752771	75.52350892	92.89838088	89.06028914	69.48030044	86.33174177	80.24912868	91.97799907	71.50123323	53.34508139	66.58791844	55.91261576	53.04065781
Zm00001d012440	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012441	3.073041461	2.516513445	3.859671033	1.408433414	2.403755253	1.782671728	2.588456503	2.108012543	1.633813825	1.063301723	3.382245076	1.768246831	2.381664615	1.523686654	1.506511079
Zm00001d012442	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012443	10.66356246	3.673380205	12.91289382	7.161071352	26.66050737	13.62262747	10.11739673	22.30888289	4.608515619	4.273774043	8.160202568	0.706737384	17.7463177	21.780942	13.90911462
Zm00001d012444	0	0	0	0.138619267	0	0	0	0	0	0	0	0	0.435324586	0.487378429	0
Zm00001d012445	0.008157061	0.071916938	0.111513811	0	0.069862808	0.049967578	0.038126103	0	0.035209714	0.089999453	0.113149469	0.040662098	0.07758811	0.02682617	0.047153377
Zm00001d012446	3.585046369	2.985343778	3.642565251	4.00309945	7.841118759	4.542999928	6.008979028	6.626308779	6.621973662	1.296951003	2.721493215	0.823188741	2.703844801	2.653639915	2.84837299
Zm00001d012447	0.04038227	0.032366484	0.077562042	0.004578456	0.101581897	0.004497619	0	0.022132648	0.027165021	0.202522938	0.004629394	0.020333475	0.016432384	0.036219651	0.059420346
Zm00001d012448	9.532408309	6.934763144	10.42713848	10.62716068	51.17909319	20.25956668	38.95234215	53.7210666	37.9244035	91.35579447	96.40154413	97.00696696	9.158172929	8.294112639	11.36719361
Zm00001d012449	0	0	0	0	0.040299455	0	0	0	0	0.253085711	0.077135859	0.372680308	0	0	0
Zm00001d012450	0.059595614	0.300243587	0	0.089190078	0.455450596	0.438076691	0.710302253	0.80481795	0.42628794	11.44115109	4.614331671	7.803246867	0.586866773	0.666374212	0.702786762
Zm00001d012451	6.604385524	6.610094796	6.496614844	8.58016911	6.38119122	7.575624189	6.666807666	6.572455964	8.491091018	6.514287688	7.594451938	5.727347264	7.006747413	6.738687558	7.449337501
Zm00001d012452	0.114537818	0.20773556	0.130960102	0.114277278	0.428613874	0.207680258	0.123130446	0.176776367	0.135606619	0.88461259	0.306204029	0.213158058	0.199947534	0.170762114	0.233061572
Zm00001d012453	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012454	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012456	0	0	0.003975351	0	0.514199923	0.031350739	1.667004511	1.40776898	1.207133701	8.465728883	3.759371499	4.702054826	0.107383363	0.101689217	0.085057014
Zm00001d012457	0.158698294	0.229077202	0.079778713	0.71829984	1.069036733	0.55269733	1.091797908	1.49213134	1.231490397	1.964921547	1.394119739	0.632085458	1.281031556	0.850305949	1.727568868
Zm00001d012458	29.06936055	28.06115351	26.77856474	37.57563756	38.83752949	32.71289827	39.28739804	37.701155	41.38467462	51.07959886	62.06351249	46.30265089	23.30649875	22.75998966	21.44750384
Zm00001d012459	2.882823049	2.765090027	2.769765289	4.881354396	10.03691752	5.827556923	10.83127631	10.93612012	12.11543777	2.798413661	1.859612319	0.87206038	3.151526063	2.905000747	3.730325476
Zm00001d012460	34.75479807	35.21498907	29.20302653	19.75990912	17.79000854	18.41418647	20.54056863	15.61112213	19.0768684	13.1207313	16.80012964	16.56075268	25.76439869	23.80846814	23.85860972
Zm00001d012463	7.462019431	7.001986538	6.539356607	5.917756558	6.747458213	5.381594002	5.837311554	5.098266874	5.726363594	2.883307231	3.821207098	2.714884649	3.618729121	3.648010794	2.833458865
Zm00001d012464	1.358594102	2.701014857	1.98375679	4.642448218	4.447271126	3.784229052	2.840445607	3.386500294	2.532068872	2.100588846	3.034646394	1.019073195	20.81393599	22.48033005	20.06718297
Zm00001d012465	31.3882639	37.27976938	30.96994858	39.74214395	38.45885099	37.97831669	35.31348103	42.55118538	39.88929343	73.16615319	64.8947748	64.30817695	53.44542134	54.83007329	60.06208586
Zm00001d012466	0	0	0	0	0	0	0	0.006978999	0	0	0	0	0.02590779	0	0
Zm00001d012467	0	0	0	0.037017303	0.007821909	0.050909216	0.013873067	0.035788963	0.036605347	0	0	0	0.146143332	0.084598145	0.048041982
Zm00001d012468	0.018326051	0.092326915	0.09110268	0	0	0	0	0	0.022601103	3.361527841	2.703839351	3.207521256	0	0	0
Zm00001d012469	35.49897697	38.01482685	77.77121084	144.6381561	159.4269797	133.4266613	126.8726181	148.5984703	127.2676856	126.3823846	142.7077679	63.46735824	197.9573212	184.5486676	238.1561732
Zm00001d012471	0.667847634	0.841156566	0.830003005	1.616826455	2.639961704	1.925187602	3.442852791	3.268457872	2.713171516	0.70434917	0.396318726	0.130554935	0.659420248	0.818249561	1.407989006
Zm00001d012472	4.452351953	5.302492971	4.986750126	7.041731358	4.979536123	1.759593658	2.643242883	4.978872136	1.948413951	0.284742197	0.690500157	0	4.912009734	5.205556838	6.756128468
Zm00001d012473	0	0	0	0.027193253	0.574604668	0.400696941	0.687911639	0.762436189	0.564703162	0.030071588	0	0.024153704	1.561574456	0.932198694	1.260431584
Zm00001d012474	0	0.014999103	0	0	0	0	0	0	0	0	0	0	0	0	0.110145032
Zm00001d012475	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012476	0	0	0	0.096484389	0.014562535	0.203101845	0.154970124	0.039978326	0.327122192	0.01524243	0.125431513	0.012242823	0.061837307	0.024231021	0.281105793
Zm00001d012477	0	0	0	0.031750782	0.159340442	0.046785285	0.304920072	0.115114499	0.290426281	0.035111519	0.040130039	0.056403622	0.049855609	0.041862812	0
Zm00001d012478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012479	3.61730126	3.592173206	3.29426518	5.25852229	4.282063805	4.857279159	4.709208977	3.942778622	4.04203107	2.85374993	4.012371355	4.957962499	2.715485537	2.806419402	2.354428644
Zm00001d012480	12.49941387	16.79259522	15.24304007	10.65229661	9.058396326	11.61273161	15.18370217	18.80791112	15.73639479	2.729469137	6.009324225	3.83657437	22.52529324	22.95134649	24.98823622
Zm00001d012481	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012482	1.474052619	0.692411067	1.111186992	3.224689665	6.280571208	2.064961496	6.550883203	8.406095114	7.733592165	3.274401235	5.104157874	5.179736777	0.520542788	0.27814814	0.104766761
Zm00001d012483	0	0	0	0	0	0	0	0	0	0.65926173	0	0	0	0	0
Zm00001d012484	0	0.2279286	0.020446029	1.107953278	0.802060992	0.22170933	1.172641461	1.190209114	0.405786354	0.113446964	0.414918522	0.10934565	0.810031515	0.468903796	1.483578028
Zm00001d012485	40.83821526	52.26385326	35.71567513	11.3459362	6.151430972	4.719651537	3.73983041	3.170592917	5.499905708	4.09137185	15.59245291	7.803610043	1.851535972	2.024512201	1.581225291
Zm00001d012486	0.179412519	0.03389561	0	0	0	0	0.010482176	0	0	0.037115916	0	0	0	0	0
Zm00001d012488	0.026558978	0.058539479	0	0.173896827	0.096237212	0.130153528	0.612924778	1.088818789	0.941694339	0.091573023	0.041864654	0.044131246	0.564686635	0.720593387	1.120761808
Zm00001d012489	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012490	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012492	0.105978558	0.143748107	0.060789445	0.355847314	0.837853783	0.229713798	0.219094365	0.049148468	0.030161758	0	0	0	0.01824514	0.008936724	0.009425052
Zm00001d012493	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012494	22.73734838	20.61608572	27.49039366	23.19576325	34.56273037	23.49250762	13.86570938	14.86243756	16.10712096	9.238136664	16.27920948	5.443459197	8.985593977	7.260213687	6.86346759
Zm00001d012495	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012497	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012498	0	0.126843239	0	0.047099917	0.331746894	0.21591883	0.176517535	0.030358004	0.077626257	0	0	0	0.563482495	0.455402634	0.291083095
Zm00001d012499	0.335039205	0.494029017	0.457010902	0.69301348	1.205948541	0.690789072	1.136285473	1.073998319	0.82639252	0.800177447	0.288533298	0.144835601	0.402352773	0.770395849	0.642435876
Zm00001d012500	0.926438929	0.630731491	1.026907403	2.591875642	4.651929931	4.079916802	1.111801839	1.026500864	0.401438643	0	0	0	1.513043381	2.278226366	1.186883324
Zm00001d012501	11.81171439	11.36743848	11.26710461	12.80930136	14.31948918	14.21547105	15.37916506	15.63223676	15.94595937	9.483368251	13.26592969	7.912292928	9.963504643	10.92899661	9.463395107
Zm00001d012503	3.82961194	3.842583021	4.389052047	7.497918122	10.70443643	7.098553891	9.159505667	9.285514329	9.853032003	4.791067948	6.474041973	4.49432152	5.651784903	5.231006633	5.779903148
Zm00001d012504	1.834943025	1.407264634	2.562709299	18.20572957	17.5231134	17.95106321	13.77763346	11.96077121	14.51900877	0.689048971	3.58543363	0.45282177	10.97836128	13.02514804	17.43365318
Zm00001d012505	0.032824091	0.082684128	0.020396938	0	0.28112861	0	0.268484655	0.118735147	0.182165435	0.022634917	0	0	0.073462424	0.071965842	0.018974564
Zm00001d012506	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012507	0	0	0	0.016145994	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012508	0	0	0	0	0	0	0	0	0	0.133407209	0	0	0	0	0
Zm00001d012509	0	0	0	0	0	0	0	0	0	0.325478035	0	0	0	0	0
Zm00001d012510	4.262766688	3.946013892	4.401050249	3.232428041	38.35450244	6.432131994	51.60759825	60.20238871	61.73959059	59.05245385	69.72567452	38.42884526	1.338623103	0.676491413	3.7977854
Zm00001d012511	14.42073922	13.07021089	13.41661661	13.80863171	15.97087309	14.97175364	14.30593634	14.85922869	15.67820981	18.76172017	19.68995357	19.94068437	10.25182816	10.47671538	10.96737407
Zm00001d012512	0.167232219	0.115846279	0.17666119	0.688263739	0.881411931	0.819529401	0.615544176	0.766247164	0.680604231	0.184512641	0.695921139	0.250090555	0.879549649	0.669139284	1.691753585
Zm00001d012513	31.46214771	34.70698583	33.10901169	90.16038496	103.4791501	86.8487365	103.8186111	110.4601729	101.1437205	61.8886364	68.6516036	45.33170434	114.5683803	105.142377	105.8424915
Zm00001d012514	0.366804366	0.117455455	0.108171485	0.472969697	0.999404489	0.944471298	0.762782119	0.689660961	0.866406457	0.574478093	0.83102576	0.282364381	0.459165204	0.38165787	0.402512722
Zm00001d012515	23.80832723	25.46864413	18.33760346	9.042981099	10.86574703	9.099808541	11.9484347	13.97018844	13.09025516	14.85807219	22.97410648	15.80991581	6.710005877	7.102789905	6.510278474
Zm00001d012516	0.470759285	0.726028238	0.52536092	0.838729369	4.025584198	0.564974239	2.705506468	2.803389941	3.056914359	4.37253142	4.664334409	2.447790357	0.548296583	0.421275803	0.622013686
Zm00001d012517	0	0	0	0.392488677	0.780559787	0.32885906	0.162235988	0.078125101	0.079907218	0	0	0	0.14500995	0.101468427	0.25683107
Zm00001d012518	12.54602948	11.8779004	10.09475333	45.67323029	41.31418644	50.62649199	32.06471902	23.6115233	25.71127776	23.75773765	13.30236465	7.934435909	75.9340054	74.38707292	72.01238554
Zm00001d012520	0.748505561	1.220023619	0.109440578	3.377086789	2.552688176	3.749000591	1.286218756	0.159269529	0.461557473	0.364345613	0.444183306	0.14632244	1.872286281	1.568675741	1.196253087
Zm00001d012521	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.026151244
Zm00001d012522	1.48828506	0.744993805	1.055246217	1.308805783	4.022633654	2.571395024	4.82700935	3.577562614	2.059018858	2.342058351	2.009111922	1.807179135	1.430569202	1.474634351	1.544182617
Zm00001d012524	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.017765993
Zm00001d012525	5.046428628	5.44218742	5.055383485	7.846977267	7.227035575	6.542694793	4.568493639	4.591291566	5.354012025	6.746608913	6.173011416	5.121530899	6.187109231	6.05733974	6.266534986
Zm00001d012526	0	0	0	0	0	0	0	0	0.230964699	0	0	0	0	0	0
Zm00001d012527	136.4115721	109.5700439	118.447483	7.888545267	87.76350804	22.93514494	68.84089735	86.8837577	67.1157238	64.40828882	36.5714994	29.39017893	8.852760786	7.723242279	10.6109685
Zm00001d012528	11.60501334	10.52705194	10.98599967	2.354085956	2.026558837	3.292727113	0.816895071	0.66499553	0.775962649	0.021426006	0.391815104	0.051628543	1.147391231	1.175108162	1.095630155
Zm00001d012529	8.984447845	9.965437879	10.31690308	15.2761326	9.434201797	11.97123296	7.891427993	8.106652792	8.579513156	0.745370236	2.04457597	0.502896621	9.928091106	9.540987642	8.897642468
Zm00001d012530	15.35351971	14.37596225	11.9887295	9.003127089	12.37400411	10.67039726	17.14433436	16.07357015	16.78163597	20.61702432	11.70807003	12.19570185	19.34956759	17.34463679	18.53859266
Zm00001d012531	0	0	0	0	0	0	0.024767189	0	0	0.146161903	0	0	0	0	0.44109243
Zm00001d012532	114.2781409	136.0274769	93.97781633	76.70609424	86.41164585	58.3862225	123.3829469	90.50823548	125.3211044	347.7408183	267.699217	312.5387555	46.67222536	36.66842329	33.8581355
Zm00001d012533	0	0	0	0	0	0	0	0	0	0.021413839	0	0	0	0	0
Zm00001d012534	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012535	0	0.075604697	0	0.131011185	0	0.073541744	0.140283969	0	0.018507599	0	0	0	0	0.032902056	0
Zm00001d012536	8.777472767	8.614860185	9.239660315	5.162954669	5.694702969	6.403362275	6.692475916	5.98652891	5.954659276	2.907694099	3.397742301	2.452096112	2.36243994	2.264407855	2.200642721
Zm00001d012537	19.71559375	20.24785626	20.64010424	29.25453463	34.11928485	25.14652548	31.20071734	36.59937363	32.24406535	21.65416614	22.76614499	12.4253756	36.39347896	34.25768631	33.12241046
Zm00001d012538	0.129738875	0	0	1.23376081	0.769275003	1.211977533	0.189499845	0.293316659	0.020000502	0	0	0	0.308511679	0.408894892	0.299991688
Zm00001d012539	0.105978558	0.18353553	0	30.54822105	29.37724826	41.56446453	22.97156786	24.91827336	21.59833256	0.164432141	0.050115885	0	26.60939612	31.49860199	27.49169832
Zm00001d012540	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012542	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012543	0.48667823	0	0	2.262320276	2.040404439	3.523280223	3.412101096	1.226993894	1.254982941	0.122038094	0.055792442	0.049010914	4.406378405	1.940050058	3.682907667
Zm00001d012544	7.078804362	8.495085357	7.901780963	15.25964626	14.2844553	15.90198357	11.47613662	14.57664355	9.402233312	4.461164504	6.295912826	3.563763614	9.672250696	8.858515541	10.76529592
Zm00001d012545	3.901134932	2.261076831	4.462190845	3.745870657	6.277555994	4.99090301	5.405626644	6.993380217	5.109219089	4.428041288	4.353501157	3.518389574	4.056433644	2.914116858	2.873784013
Zm00001d012546	3.620874925	3.789614255	4.827050705	9.181409474	13.09961603	9.544902916	9.798791199	9.456111809	10.10919923	4.165430768	7.335959112	3.947675346	6.893948985	5.505642896	7.208508433
Zm00001d012548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012549	10.11219369	8.452948768	10.89648282	15.72561123	23.49245065	14.60358215	16.17287212	18.3644348	15.84322392	4.254036147	7.82205426	4.605891806	10.72162825	8.880659308	12.47483515
Zm00001d012550	21.27981574	19.57660794	19.60637649	32.32331253	39.59857928	25.92236254	49.26300195	60.55882074	53.63635925	23.17044511	37.38044207	22.14916062	46.77104309	48.68696367	46.15770868
Zm00001d012551	0.017594896	0	0.087467952	0.548589765	0.463677126	0.064668464	0.123357814	0.021215439	0.564184038	0.048532524	0.11093864	0.136435788	0.590677596	0.462915419	0.264447306
Zm00001d012552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012553	0.07859084	0.053992066	0.004439679	0.334142342	0.197695836	0.26697075	0.534303405	0.59442035	0.519866714	0.768581692	2.522687265	2.037980623	0.143911103	0.168391985	0.384097341
Zm00001d012555	0	0	0.21699425	0.174203524	0.092024809	0.12834584	0.040804181	0.021052869	0.043066215	0	0	0	0	0	0.100931112
Zm00001d012556	0.342519036	0.163635997	0.286235568	1.141588049	2.606756748	0.759679859	2.463506173	2.321344782	1.019636812	0	0.253198875	0.085043993	0.72692893	0.49848392	2.259923885
Zm00001d012557	137.5224864	144.4161367	145.6161612	102.111573	104.5637642	88.42921429	100.8929285	119.1913427	107.9067072	11.03359965	47.90447556	9.310984583	106.1266062	100.1901129	106.9672967
Zm00001d012559	32.16622508	33.32444323	28.94300996	20.35371891	24.96781611	17.59338394	34.98988137	40.28483257	37.41877992	35.85534407	43.75034235	31.51012545	25.68441054	25.17590606	24.83770468
Zm00001d012560	0.027590785	0	0.008572477	0	0	0	0	0	0	0.028539181	0	0.007640955	0	0	0
Zm00001d012561	15.66262479	12.38582191	16.07298782	31.40747333	44.9314518	33.89574777	30.02798729	35.57230184	37.07361423	86.80653498	52.98930553	29.16097261	27.80530195	30.48887098	37.45796379
Zm00001d012562	0.631174235	0.381583816	1.004064252	3.809917925	11.49360547	5.33559611	7.095010685	8.691219062	7.317081078	1.880265589	3.756794128	0.587316386	1.907021436	1.826656551	2.933488667
Zm00001d012563	0.513048514	0.836241355	1.500278124	0.075276688	0.87484512	0.22184281	0.634761733	0.509451539	0.521072675	0.041622264	0.532799347	0.401175431	0.371487963	0.13233454	0.488479843
Zm00001d012564	32.03571348	36.99906108	35.83154291	33.26254922	26.93705475	30.33972939	32.07696343	29.60842748	29.58970649	10.92982406	12.95851707	3.891681383	46.00739163	48.00580441	44.73065806
Zm00001d012566	0.016121738	0	0	0.08042533	0	0	0.037676502	0.077756586	0	1.356306621	0.304950435	0.482191106	0	0.088366077	0
Zm00001d012567	0.655661219	0.175703773	0.294735761	0.086990663	1.470518884	0.418728303	1.540430706	1.126994436	1.445179114	4.463605544	4.309966145	4.319236855	0.226356093	0.611709661	0.419337871
Zm00001d012568	0.183506496	0	0.057015603	0	0	0	0	0	0	0.063271428	0.028925947	0.01270501	0	0	0
Zm00001d012569	0.059440147	0	0	0	0	0	0.243095345	0.167233005	0.073306187	0.915418353	0.974427128	2.414320256	0	0.07602044	0.091627896
Zm00001d012570	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012571	0.069426495	0.167598943	0.071902877	0.317480946	0.952912417	0.602486767	0.676040497	1.241736152	0.392434729	0.390981544	0.342900396	0.288403201	0.381978178	0.317115673	1.999973681
Zm00001d012572	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012573	0.03268024	0.020580442	0.006769183	0.067928964	0.37319543	0.166824025	0.171840876	0.216727122	0.1007595	0.300476263	0.192317214	0.012067229	0.158471033	0.185097007	0.302262542
Zm00001d012574	0	0.007039644	0.0138926	0.013941267	0.014729237	0.095865842	0.124089085	0.040435968	0.006893059	0	0.014096373	0.018574455	0.200144559	0.355371802	0.684961602
Zm00001d012575	0	0	0	0	0	0	0	0	0	0	0	0.006307527	0	0	0.092162169
Zm00001d012576	3.400388457	2.896156985	5.455713225	5.996237116	8.336687843	6.573308738	6.855663971	7.628864308	8.937227275	10.87855778	11.49324305	12.68978003	4.163825466	3.773456692	6.170872602
Zm00001d012577	0	0	0	0	0.277136251	0	0.081922241	0	0	0	0.353638248	0.077663449	0	0	1.377942591
Zm00001d012578	0.66499369	0.511239151	0.837189312	1.087850384	1.75245349	0.888772646	2.472416331	3.35311155	2.460364947	28.28828366	18.03488045	11.94903428	0.927770547	1.344370127	1.507692749
Zm00001d012580	0.20819138	0.11654125	0.618103164	0	0.167641641	0.1133613	0.55411871	1.045964227	0.684687228	3.206287633	1.823166728	2.946874516	0.012942935	0.038037783	0.213953463
Zm00001d012581	0.006791472	0.034215538	0	0	0.760644703	0.124807244	0.492021804	0.40944849	0.561176523	0.00936656	0.034257058	0.01504657	0.10639826	0.014890101	0.054963082
Zm00001d012582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012584	0.054904554	0.034576244	0.034117771	0	0.217034414	0.033632795	0.064155972	0.331011972	0	0	0.034618202	0.030410387	0.737279506	0.3611298	1.174327403
Zm00001d012585	31.05215528	32.9674489	20.66493627	12.94028045	14.11829787	13.49620151	16.32689947	14.41817025	11.5421904	8.570402493	15.91006786	17.96047484	21.17774448	18.57878516	28.17179176
Zm00001d012586	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012587	0.023476647	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012588	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012590	15.11523203	16.69559677	13.32397458	22.43988924	22.27093028	17.76731646	22.31136042	31.79133558	21.20364746	7.120728029	8.986737919	4.959897077	20.58794194	17.87949249	32.70457923
Zm00001d012591	0.032686752	0.020584542	0	0.305741241	1.249018132	0.310354511	13.95053005	21.59820474	17.13252785	38.02533391	44.07346133	21.58050453	1.188769556	1.433294604	3.401131109
Zm00001d012593	0	0	0	0.161029382	0.10007698	0.158186248	0.097624004	0.091579979	0.093669017	0.073324555	0.03831081	0.00841354	0	0.066608385	0.008781007
Zm00001d012594	0	0	0	0	0.19369738	0	0.08588622	0.044312893	0.045323718	0.304111056	0.23171861	0.610660182	0.246750802	0.564022618	1.274662264
Zm00001d012595	0	0	0	0	0	0	0	0.011407887	0	0.091338546	0.011930702	0.010480535	0	0	0.218765565
Zm00001d012596	34.43805234	44.72309583	34.43742434	92.42183811	53.15498098	108.3260425	110.5372946	81.13125659	128.735176	147.0849792	129.1639966	252.1351684	59.96210101	62.52918052	74.39693198
Zm00001d012597	48.89160299	54.85763357	47.5527641	50.44314808	37.82327485	53.38785868	60.71040539	51.60255499	59.95170342	130.2267118	99.75156559	137.6620198	39.42096668	43.38606801	46.31034808
Zm00001d012598	21.65802911	19.33884287	32.56047863	34.59540858	67.78733393	33.55662362	42.48824229	47.00254673	38.77309818	4.24837141	13.29531949	3.130892343	14.46343727	12.91552837	19.91789326
Zm00001d012599	3.186735657	2.780055655	3.634730321	13.21345154	24.83040136	16.59702095	18.92478161	21.6243341	17.81318151	9.741373732	13.72578522	5.684870409	12.25736478	11.20613829	16.20454598
Zm00001d012600	0.996145185	1.29791229	0.659755701	2.652162104	1.649967197	2.987910507	4.480835946	4.2924193	3.739486233	1.757147848	1.909852517	0.850962914	5.681919115	5.347080179	4.899151891
Zm00001d012601	9.606813025	6.841050129	10.25561742	10.56803323	13.82685189	11.25662394	13.15405493	13.85580331	11.20990286	1.036169383	2.99756204	0.613961048	4.782519605	5.265662894	6.806466819
Zm00001d012602	0.053770832	0	0	0	0.01771274	0	0.031415609	0.081044229	0.033157174	0.593270733	0.237323603	0.268041991	0	0.014736368	2.673156023
Zm00001d012603	13.71232981	10.59363467	15.79892082	23.32012214	135.5732213	28.01032218	139.1955732	176.7034778	217.512972	192.5163157	270.9664487	168.4090643	1.609566857	0.765862948	20.46203326
Zm00001d012604	9.699761761	9.816421985	9.395141221	2.615952856	2.356953165	2.034941287	3.247221529	2.837267575	2.074724948	29.32492704	20.59653603	28.38980112	2.7761387	2.742927083	2.671231479
Zm00001d012605	2.543485381	3.213063562	1.335920413	2.199717377	1.775452064	3.848776211	4.033513648	3.660156637	3.55693309	13.05016991	13.91789732	14.12971633	6.336276417	6.779782078	5.347370528
Zm00001d012606	1.626093902	1.390665689	2.993947094	6.434498768	9.60209963	5.521556776	4.69158207	5.494798742	6.300995084	0.166122339	0.518968023	0.022238432	1.460213999	0.78125474	1.717518492
Zm00001d012607	11.87739408	11.22827448	11.18072578	15.1010948	43.54840815	15.40054396	36.65002353	37.85184421	23.1118522	71.80225278	45.58453259	53.30638477	32.4371835	29.63113086	47.98305175
Zm00001d012608	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012609	0.445663488	0.666561339	0.308405941	0.312644345	0.066730344	0.362965079	0.245584639	0.174034189	0.234215915	0.055876675	0.102181083	0.002805033	1.89567138	2.323397697	2.040498428
Zm00001d012610	1.723838484	0.967357849	0.869683695	8.748589043	10.32254689	7.067673735	6.102746699	7.552775798	6.735749511	2.895319494	3.74498931	1.266757751	4.182749556	3.517521472	6.886677169
Zm00001d012611	0.641805665	0.915488209	0.365183649	0.433969256	0.692840628	1.098924959	1.201726988	0.671310254	1.049008218	8.318331832	2.574278421	21.56873868	0.571099708	0.466221023	0.902933834
Zm00001d012612	1.198872531	1.655835154	1.151334513	6.600887893	3.132454339	4.130951872	2.188879004	1.535915343	0.940890571	0	0.120258149	0.03772888	6.341999695	4.891086591	5.512739635
Zm00001d012613	0	0	0	0	0	0	0	0	0	3.90101079	3.096240047	4.482386118	0	0	0
Zm00001d012614	0	0	0	0	0	0.039271119	0	0.006441734	0	0	0	0	0.053804982	0.00585654	0
Zm00001d012615	0.043232996	0.229908942	0.011940021	0	0	0	0.005613084	0.011584256	0	0	0.006057577	0	0.005375457	0	0.005553694
Zm00001d012617	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012618	79.91922259	76.22478492	75.8756898	53.85941515	59.51306741	52.46496063	59.19647523	53.40738964	60.50843392	62.23286969	73.5245315	115.0689239	42.41653979	43.44329618	38.97289798
Zm00001d012619	0.611358186	0.862939885	0.379898877	0.262917038	0.597221143	0.542377448	1.059241309	0.775287718	0.610979091	0.639641451	1.541884573	0.969146429	0.153339358	0.103995359	0.109677956
Zm00001d012620	3.488338638	3.789511057	3.248394436	3.367398204	3.82668713	2.998903848	3.659203365	3.735902859	3.444536526	1.510588058	2.797972681	1.437593992	13.49904808	13.78982777	13.76629056
Zm00001d012621	0.525816689	0.28096221	0.257434087	0.5564158	1.952550861	1.386000445	4.245061567	7.58897029	6.465127232	0.395557038	0.763537126	0.070603135	0.035660955	0.052401702	0.257903693
Zm00001d012623	0	0	0	0	0	0	0	0	0	5.751418306	0	0	0	0	0
Zm00001d012624	13.03752586	13.8853801	13.00400676	10.19638588	10.70374687	10.97614825	10.95106832	11.01121215	11.30003259	8.314912289	9.781964413	9.447924507	8.312873458	8.044736439	8.422148638
Zm00001d012625	4.71791602	4.448233842	4.89730493	6.243371032	7.85898634	6.789966802	5.935748239	6.044278616	7.347507864	4.380988098	6.380440077	3.021450791	3.112204973	2.630051685	2.696285588
Zm00001d012626	7.696398355	6.632492037	4.719624932	3.978372973	2.001539592	2.977623491	9.170739729	7.265345003	7.056399253	14.73474384	10.5354728	19.46332319	21.30464705	20.37106451	24.99659909
Zm00001d012627	1.116961043	1.278924151	2.042090248	3.188991937	8.100761861	5.043965518	7.14067661	6.244258124	4.98640464	4.519570795	6.064800436	1.472511575	5.857040989	5.757959846	8.228413981
Zm00001d012628	0.377788848	0.862435443	1.056413456	1.796304599	4.417906043	2.921696625	3.973016443	2.989398279	4.018546413	2.051567851	1.875840187	0.889306849	4.465379805	3.856729047	4.476948496
Zm00001d012629	0.117979497	0.177589879	0.1788113	0.735694554	1.023729996	0.909550851	0.65567106	0.575965012	0.798483514	0.182556248	0.214092193	0.153005658	0.782476866	0.55203224	0.76184613
Zm00001d012630	0	0	0	0	0	0	0	0	0	0	0	0	0.328186711	0.420424214	0.469479566
Zm00001d012632	3.509085264	5.850362113	2.999832821	19.47868073	18.8691136	14.71140389	14.12611695	16.19090549	14.13373738	17.09248521	13.53099164	17.6834142	39.35858347	32.10840414	34.47261683
Zm00001d012633	70.68962665	59.65233826	66.62541065	29.68054659	63.97444304	34.78349035	48.82815386	56.84805801	53.03610676	181.555946	129.2099442	226.3610662	31.22920878	31.93467446	34.37939054
Zm00001d012634	4.219169741	4.113496164	4.316833859	4.833352507	6.237208753	4.946621159	5.053857507	4.732911232	5.488634142	2.825997066	3.791407372	1.764648623	3.248371906	3.09215607	3.271115889
Zm00001d012635	108.2081833	108.273128	122.7490859	104.2683466	102.7821015	105.8281479	100.1213618	122.0995395	108.5069262	205.1269876	205.9531586	241.9306736	175.8101674	174.3331498	183.5623112
Zm00001d012636	1.408691333	0.908940546	1.334569618	1.605653667	1.080222804	0.608287738	0.748820482	1.009390816	0.854413327	0.151284976	0.553306465	0.3709348	0.064605362	0.164551965	0.640776165
Zm00001d012637	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012639	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012640	6.616981863	6.952547366	6.943964294	5.956839014	5.498215034	4.606240276	5.458869925	5.556386152	5.399667998	2.0256889	4.307609685	1.852680891	5.434790977	4.543591402	5.223954836
Zm00001d012641	0.054684936	0.077485364	0.008495325	0.153451529	0.063048497	0.19261502	0.127798696	0.074179783	0.033720846	0.358242824	0.163778714	0.128727166	0.29832172	0.337204951	0.363533678
Zm00001d012642	0.111536873	0	0.138618355	0	0.902792334	0.175690197	0.335136439	0.499527158	0.471620224	0.593335557	0.401861645	0.405968028	0	0	0
Zm00001d012643	2.569421946	2.751267941	2.954035929	2.962400051	2.960033183	2.789248003	3.29795889	3.537440549	3.592625917	1.74220634	2.515860606	1.163189324	2.553022266	2.576007408	2.518114363
Zm00001d012644	36.800345	33.79554477	33.27852325	28.84562399	33.09114727	37.66856724	45.37216463	40.80322569	41.98012862	9.236294269	11.92668653	5.699098821	14.51687202	14.31837188	16.44676146
Zm00001d012645	3.609685447	4.5010991	4.307278754	13.87943654	13.0363434	12.66469465	10.70594336	10.23767766	10.13104364	2.348590999	4.763646792	1.341738267	13.36610136	12.18670524	11.28590441
Zm00001d012646	25.685877	27.67334418	24.66244824	28.81565701	15.16472599	24.48278753	10.73818759	8.68374444	9.41947101	11.35141065	17.81159478	15.76251017	50.14958271	55.99054993	61.73137316
Zm00001d012647	9.171529231	10.30041246	8.000273572	5.409442388	6.680678373	6.524931692	7.83226718	7.678882414	7.568995647	26.55283334	20.58861525	46.71330731	4.127306586	3.849150037	5.384210082
Zm00001d012648	0.119312587	0.050091548	0.049427345	0.161201606	0.458534525	0.280167301	0.441486403	0.167841125	0.245242516	0.082275864	0.238223583	0.099126802	0.33378654	0.512279036	1.000076836
Zm00001d012649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012651	17.55361566	16.95504412	16.03193868	17.81408183	19.36406116	19.48846299	19.45125422	19.06659068	19.90762425	10.2071083	11.45258984	6.644953748	18.94216594	18.5941397	19.37589696
Zm00001d012652	27.69320781	24.83449842	28.84525257	43.75227643	44.48709193	44.83872518	45.60802584	47.84428218	51.20189805	48.83552047	50.03695219	64.59797044	40.60557626	42.01009066	43.0979449
Zm00001d012653	0.561831531	0.513686159	0.874100398	1.323529169	2.155082356	1.065622105	1.891693021	2.333407685	1.806657198	1.756345497	2.314392779	1.240132787	0.684592637	0.583963926	1.515625815
Zm00001d012654	0.903951773	1.248205569	1.123433924	4.302620972	4.059537535	4.059010184	4.22991588	3.384876022	3.615504719	1.721358972	2.954359566	0.858961984	3.545068852	3.35920815	4.314598381
Zm00001d012655	0.115071477	0.09350513	0.078425481	0.476830708	0.298356024	0.368362667	0.66796766	0.429677447	0.764510084	0.107508171	0.360431597	0.065791464	0.04984594	0.162768251	0.690941011
Zm00001d012656	2.125102018	2.550958476	3.346643134	8.84082883	9.613455314	7.763626904	10.30923821	9.574270535	10.60636037	3.745583312	5.73694708	3.161451501	5.176781984	5.357265335	4.949294688
Zm00001d012657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012658	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012659	8.327024297	9.054047347	6.895114592	12.64192596	10.04190609	12.44917312	11.86785159	9.147341323	10.03041892	45.19001827	32.34198595	51.00624663	11.10396556	11.11754504	10.77094248
Zm00001d012660	33.47812132	32.69800298	30.27769387	30.34918715	27.63869812	28.89069632	29.48785381	23.04695748	29.18522696	32.01316143	36.3849119	44.13312747	15.3709322	15.00714609	13.67985289
Zm00001d012661	3.00796162	2.920585772	2.764661793	3.899163364	3.625710736	3.818470344	3.30854865	3.277053653	4.210632697	1.033783958	1.637390746	0.782128895	2.797789253	2.73549117	2.426502454
Zm00001d012662	7.161862315	8.863855999	9.595855601	21.57427746	34.67667344	19.44231645	30.46110954	38.30748895	35.68470208	25.13270531	41.05242753	23.73192011	15.81139886	17.25195026	20.54755569
Zm00001d012663	0.07852518	0	0.07807306	0	0.010346845	0	0.027527002	0	0	0	0	0	0	0	0
Zm00001d012664	7.987789573	7.146847522	7.640698591	5.213876068	7.440766772	3.816257955	5.129827721	6.743117443	5.784888636	2.110340281	5.455653348	1.029131244	3.343054175	3.155134042	4.770175128
Zm00001d012665	12.86180622	12.93716552	14.19408337	18.06974784	20.57355172	17.01688025	17.12873281	18.95363971	17.47933728	2.50058872	5.175021517	1.013211423	11.00517344	11.44646764	13.60666119
Zm00001d012666	1.074767037	1.2481114	1.078382386	1.733915582	1.422659407	1.57041989	0.869888344	0.784688172	0.966753428	0.142788531	0.099472713	0.005461368	1.599920457	1.313311745	0.849284529
Zm00001d012667	10.1218326	11.86528688	10.25622291	12.23907237	9.843014324	11.7866717	11.26495622	9.67241076	9.441747951	12.04286198	9.392816514	20.32229418	10.09615526	10.00904287	10.36422777
Zm00001d012668	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012669	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012671	0	0	0	0	0.107134235	0	0	0	0	0	0	0.012866927	0	0	0.026857795
Zm00001d012672	10.80752469	10.54661895	12.77355762	39.00226361	29.01493204	36.97497806	13.69509459	11.8278665	14.70337456	1.326626886	2.37048138	0.719931345	9.352977003	8.620298277	10.42644762
Zm00001d012673	1.391551013	1.966993328	1.466769604	5.076370597	1.985466197	4.458813333	2.758152936	1.671274863	2.10882223	0.219550965	0.166134009	0.124657553	12.12274159	13.30496145	11.71235743
Zm00001d012674	12.41062068	16.7448508	7.956773867	4.843922331	6.201995787	3.510703897	5.203330028	7.293949493	5.72210727	1.303945122	2.057008389	0.746712924	3.618098851	3.64995469	5.846632298
Zm00001d012675	30.84562876	35.55346443	33.77222167	63.53548648	113.4749075	68.99696778	129.7876004	136.9225094	119.9817723	63.66850582	73.24602617	77.36620269	64.14538501	67.81796757	98.87356345
Zm00001d012676	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012677	6.471572544	6.858198264	5.047454557	3.258264074	3.463828915	3.378052252	2.840507899	3.0308353	2.844980093	5.747919071	5.644812525	5.128833081	4.637326411	4.269247081	4.290807576
Zm00001d012678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012679	18.55477577	17.54002999	18.40792672	26.80507572	37.70712027	25.01685879	30.22520671	31.83640017	32.86045149	36.02596864	32.38184574	30.00636713	35.13111521	38.9159001	33.69011169
Zm00001d012680	0	0	0	0	0	0	0	0	0.007308376	0	0	0.026258123	0	0	0
Zm00001d012681	0.62033868	0.541681129	0.667507406	2.234467031	3.311332245	2.231437001	2.864725037	3.097097348	3.197076439	3.176192655	3.62641976	3.826709379	2.464002431	2.276929148	2.518206359
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Zm00001d012683	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012684	8.281993882	10.03192148	7.682728586	18.6810557	19.94577715	25.0994241	21.53130197	25.84944452	13.09737207	0.054651842	0.449735598	0.175586928	59.50914133	53.64871036	60.97836482
Zm00001d012685	1.510082126	1.691076394	1.316515254	2.951454278	3.461918692	2.875675301	2.456798994	2.36045994	2.342828442	0.244234268	0.381664454	0.131969332	1.711448688	1.56010455	1.805421303
Zm00001d012686	46.95150635	43.40722365	57.92036424	4.109854383	4.261486908	5.812198838	41.66571279	33.94063372	28.37332377	1.646284777	1.029245647	0.745916855	20.23061951	21.46256386	26.00881762
Zm00001d012687	0.474217127	0.6789573	0.46342715	0.581313234	1.623543529	0.888851068	2.344365339	3.592063808	3.389079985	20.19647236	18.22631399	22.50328937	0.512521827	0.222159601	0.941882071
Zm00001d012688	3.671797479	5.222716581	3.273239069	5.137086727	5.463815066	5.371086799	7.161578761	7.17697057	7.613066603	4.96501831	6.210807434	8.257230571	2.934899487	2.850898076	2.489606909
Zm00001d012689	38.82554324	36.60678669	46.64447689	137.8963635	74.77568059	135.4500101	95.07084591	75.1032304	82.16669606	18.92049052	15.16436244	11.25552529	207.5790695	214.499164	195.8072835
Zm00001d012690	0.911415595	0.433181628	0.470181503	5.522539303	4.531787756	3.70798397	6.118663963	7.122503275	4.135575452	2.905312543	1.507132815	1.87637823	5.186112146	3.770285962	6.342206352
Zm00001d012691	0.094939124	0.019929363	0.117990623	0.13813795	0.54208364	0.271397974	0.277340919	0.114474974	0.234172542	0.349164546	0.239442564	0.280451343	0.070826619	0.19080527	0.310993987
Zm00001d012692	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012693	0.70543567	0.792072607	1.264104342	0.088660883	0.605265573	0.381880213	0.28115713	0.171437721	0.222557584	0.512852885	0.399964858	0.236252211	0.373284614	0.143874112	1.29607659
Zm00001d012694	10.97626062	10.26827119	10.60337726	9.677808167	9.689473985	9.117036264	9.700421049	8.515713354	8.292422008	10.63680761	11.3310056	8.911101807	6.364924114	6.680633001	6.176714077
Zm00001d012695	0	0	0	0	0	0	0	0	0	1.815655639	0	0	0	0	0
Zm00001d012696	0	0	0	0	0	0	0	0	0	0.012133131	0	0	0	0	0
Zm00001d012697	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012699	4.756949814	4.392110781	4.65241046	4.533808504	4.542193564	4.116702756	4.22863331	4.502446028	3.964258382	2.844123593	3.887420445	2.565739066	2.881305809	2.863851242	3.561337085
Zm00001d012700	0.506341997	0.584594651	0.498182632	0.052623981	6.782995285	1.680082699	3.549963766	2.82371602	6.895080391	1.16388182	4.709037084	1.004950645	0	0	0.024391685
Zm00001d012701	8.02182265	9.037271994	7.73594253	9.702206534	8.028647578	11.26018434	9.197996006	9.302056297	9.827879521	29.06147518	25.5563236	58.54122424	6.952149947	7.508411526	8.161403086
Zm00001d012702	0.047217333	0.022873233	0.022569939	0.081536413	0.191433117	0.262539531	0.250402598	0.293425756	0.3493924	0.921705348	0.769473233	1.066221763	0.560892631	0.700768347	0.852438855
Zm00001d012703	0.061032294	0	0.05056741	0.22835049	0.777383681	0.373864557	0.713162364	0.490607031	0.476708388	0.336694384	0.69267313	0.405652835	0.068297097	0.780567016	0.776178271
Zm00001d012706	4.104200659	5.561406367	6.120855192	6.177597785	4.773858406	5.444334876	6.251023154	6.689320207	6.737187656	22.68051442	17.16847798	13.76476094	4.339340197	4.592255138	5.464949515
Zm00001d012707	4.632818882	6.383579261	2.820008581	9.280771143	4.303864566	7.995661416	2.776789525	3.824288598	1.977168717	12.44370212	12.00263887	14.36477993	20.06257181	21.53932516	20.49793449
Zm00001d012708	13.02592507	14.58794466	16.49457239	29.02262494	16.97948404	25.7635069	15.8038168	11.70352024	12.7581303	1.688223323	2.894283835	1.134906748	34.54271086	31.7459454	32.85762976
Zm00001d012709	1.871600474	2.620538128	3.424105927	0.663522942	0.550805892	0.314264467	0.854803645	0.355119029	0.18746822	0.851680025	0.958435835	0.831414474	0.999349323	1.437241393	2.658100431
Zm00001d012710	0.14051135	0.216302246	0.206966423	1.966578407	3.997745809	2.155008246	4.475629994	5.158040996	5.173011395	0.452172739	0.826883493	0.415072258	0.978361765	1.095349161	1.293585685
Zm00001d012711	0	0	0	0	0	0	0	0	0	0.089359647	0	0	0	0	0
Zm00001d012712	0	0	0	0.048575983	0.020528611	0.104980315	0	0.009392818	0.057642472	0.139665818	0.039293139	0	0.409704751	0.196409341	0.261178661
Zm00001d012713	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012714	0	0	0	0	0	0	0	0	0	0.081622881	0	0	0	0	0
Zm00001d012715	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012716	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012717	0	0.238427967	0.003676038	0	0	0	0.010368782	0	0.003647863	0.024476268	0	0	0.006619883	0.006485022	0
Zm00001d012718	0.043662564	0	0.006029329	0.048403605	0.172595501	0.005943624	0.011337713	0.070196151	0.005983117	0	0.024471064	0.005374156	0.054288679	0	0.084133137
Zm00001d012719	0	0	0	0	0	0	0	0	0	0	0	0	0.019638703	0	0
Zm00001d012720	9.994935723	7.644836693	10.42283556	19.5814276	17.10559467	14.37985714	13.1781218	7.549576422	9.776211652	0.184851818	0.772654995	0.021210606	15.89849287	11.81739105	11.44482471
Zm00001d012721	0	0.093496668	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012722	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012725	3.225683151	3.317708291	3.223447975	6.942395357	5.27624786	6.956092969	4.100050607	3.322483707	2.768501409	0.125513291	0.184894997	0.033604377	5.267363096	4.190120689	3.998215775
Zm00001d012726	0	0	0	0	0	0	0	0	0.069384457	0	0	0	0	0	0
Zm00001d012728	33.08402038	30.23107567	28.46672393	23.16937932	28.13309796	24.45537572	26.82889469	25.38435335	29.47379338	32.64089181	31.98175502	51.5097717	17.56298065	17.37222711	16.58095221
Zm00001d012729	2.205974051	1.550072857	3.138400274	5.285190665	7.802179812	4.38108934	4.510941219	5.249807715	3.701417702	0.160126416	0.549040273	0.064307314	2.046302832	1.78824423	2.543695445
Zm00001d012730	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012731	4.207619632	4.659302933	2.991898563	2.901126247	2.679055318	3.373179206	3.617333334	2.370722617	3.291112777	0.024341448	0.574217023	0.07038438	5.257518645	5.908849984	5.235955818
Zm00001d012732	0.308017402	0.328264587	1.104245002	4.846148806	6.743488678	5.645937956	5.772536401	4.142525914	4.514619329	0.441145501	1.28477327	0.328084327	1.272669649	0.818174924	1.013544275
Zm00001d012733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012734	19.23034935	16.99191986	17.23890943	13.25246633	16.58224907	13.34677814	12.11491555	13.10644618	12.8045479	14.13780437	16.07251808	12.80741125	11.88554471	13.52344872	12.73026916
Zm00001d012735	9.65130754	10.22222047	10.60900718	10.26866715	11.35119714	10.68497518	10.16557401	11.25129624	9.319157023	9.775828649	9.674425441	8.845876714	10.00814651	9.995236478	10.12095644
Zm00001d012736	0.496774488	0.575634162	0.493914237	2.106489012	3.979805468	1.436335459	4.458094032	6.181648584	6.028581478	13.70267841	12.12804427	8.628770386	2.868478077	2.483292273	3.5149553
Zm00001d012737	2.625389184	2.62115464	2.31781112	6.069381318	7.772957913	6.452534511	8.2212422	7.431490101	7.492424504	2.814985831	5.18810913	1.924080115	4.057519341	4.00995739	4.451168387
Zm00001d012738	0.107193028	0.103853858	0.204953556	0.154253648	0.195566595	0.222244214	0.356495155	0.397693516	0.213551799	0.932509415	0.540695391	1.991238364	0.525945317	0.198860982	0.381322366
Zm00001d012739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012740	0	0	0	0.301772918	0.371967535	0.197629878	0.141370238	0	0	0	0	0	0.451284653	0	0
Zm00001d012741	0.327454705	0.077330702	0.178045731	0.382863096	0.539337016	0.501471022	0.215229839	0.444190317	0.429082621	0.254032888	0.103232722	0.136027298	0.38933435	0.358967346	0.496889302
Zm00001d012742	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012743	7.64213144	8.641686261	8.082257399	19.49087765	28.73886906	22.51821437	21.5206746	15.6492466	15.22081709	0.2243866	1.676505022	0.056643352	11.82373464	9.345783817	18.16512914
Zm00001d012744	0.174661525	0.133325356	0.203914109	0.363050462	0.550946438	0.45390602	0.606091375	1.065773972	0.659273218	0.138692537	0.126812786	0.211071394	0.01776835	0.081229738	0.110145032
Zm00001d012745	9.603986792	9.628481856	8.461124698	15.3410345	14.07604474	13.30355785	16.1291832	15.123969	12.32629958	1.404248718	2.748384208	0.609676832	8.271317354	7.288308829	7.578390569
Zm00001d012746	27.79387651	28.60352437	34.16830352	85.6663803	92.6325741	96.68936892	108.3576204	107.7187904	100.7781415	45.31398186	57.85926249	27.07413766	18.82250814	15.49351888	17.84366834
Zm00001d012747	5.077526547	4.342865608	4.884028103	2.950748958	5.959196384	4.629188181	4.173499837	4.632054511	4.837261579	3.56920895	4.303604571	3.861535575	1.606065462	1.529104861	1.673899655
Zm00001d012748	243.6110895	232.8673848	236.2964664	72.26938109	59.07667766	88.65037898	71.42447195	50.16496325	67.68952548	108.5216882	64.7069056	133.1758693	37.86689724	38.13154131	32.96931218
Zm00001d012749	3.645209839	3.094968737	3.273273141	2.878380219	4.364827155	3.185162665	5.060549142	4.935496983	3.231441547	5.223945432	3.244244626	4.699718382	2.60546304	3.117927273	2.982228692
Zm00001d012750	8.30018238	9.300757363	8.469791485	6.764429787	10.95991173	7.551132994	9.534144851	10.63806248	10.83005273	15.72994525	14.54544178	17.69986345	5.603118477	6.254724719	5.286701418
Zm00001d012751	12.5359867	13.61760068	11.07835474	8.70687958	7.962628204	8.382844837	9.457211762	8.725253079	8.848090926	7.170767775	9.363722522	7.472735146	8.413014081	8.114634035	9.156254923
Zm00001d012752	0.003011285	0.015170898	0	0.180266113	0.079356195	0.177083335	0.137228776	0.043571091	0.126267485	0.037377526	0	0	0.168486231	0.115537673	0.362071466
Zm00001d012753	0	0	0	0	0	0	0	0	0	1.328142877	0	0	0	0	0
Zm00001d012754	0	0	0	0	0	0	0	0	0	0.636451831	0	0	0	0	0
Zm00001d012755	5.80579969	5.748652898	5.080276338	5.725310596	5.449332714	6.275905679	5.558642324	4.906106492	5.495260491	3.940994412	4.169294191	4.012993418	3.757637518	4.012716114	3.815196017
Zm00001d012757	0.907633787	0.622618348	1.420083945	3.476738851	2.242388755	3.71320416	1.75183452	2.081313809	1.649063304	8.740083254	9.125784867	5.826139752	1.405616604	1.163771285	1.574022779
Zm00001d012758	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012761	3.127427482	3.631018325	3.071032952	5.300841238	5.511417564	5.290029495	7.090737229	7.7048743	7.475885366	9.687035777	14.89469119	18.75136357	3.474488233	3.520101889	3.931923595
Zm00001d012762	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012765	16.84543698	16.93574947	15.73103305	10.79911833	11.20337334	11.23928652	9.733416744	8.755002334	8.886387423	0.966340972	2.576733037	0.844763568	10.76551105	8.62773096	9.475951693
Zm00001d012766	0	0	0.013263583	0	0	0	0.09976479	0	0	0	0.02691626	0.094578439	0	0	0
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Zm00001d012769	0.055888692	0.027073852	0.010685943	0.042893509	0.022658939	0	0.015070601	0.010367545	0.047718178	0	0	0.004762381	0	0	0
Zm00001d012770	94.53308054	88.43493146	90.93685461	75.04541924	74.33797888	82.00982962	43.14205575	42.60671672	46.32165488	9.630223091	15.74646215	7.116137496	40.92676165	40.70548617	42.03653695
Zm00001d012771	0.579991742	0.323507916	0.525165538	3.534035213	3.307999072	2.618955207	2.672154544	1.928174831	1.675823861	0.011427203	0.208968056	0.027535223	2.716651561	3.315280997	4.799219301
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Zm00001d012775	0	0	0	0.060461595	0.766547078	0	0.28324179	0	1.19577468	0.401167776	0	0	0.108500353	0.31886993	0.224195916
Zm00001d012776	7.731017265	8.815782416	9.960971982	26.33788224	46.40150692	33.19057255	41.86376999	46.71456694	42.36652615	11.32497914	19.60828048	7.027859769	23.14333324	22.89929254	24.95853871
Zm00001d012778	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012780	0	0	0	0.063501564	0.033545356	0.452257758	0.371853746	0.752081392	0.156987179	0	0	0	3.589603851	4.758406298	7.167067484
Zm00001d012781	0	0	0	0	0.062548112	0.697880506	0.332809103	0.286187434	0.702517625	0	0	0	4.037117294	4.215061884	7.683380867
Zm00001d012782	1.726892706	1.147931314	2.098494286	0.514496354	19.50553005	2.715122472	13.87848992	23.5871466	22.71720151	16.79077171	15.63081055	9.979344415	0.697828585	0.504821447	0.643324281
Zm00001d012784	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d012786	0	0	0	0	0.032253995	0	0	0	0	0	0	0	0	0	0
Zm00001d012787	3.432864905	4.162515255	4.097965084	10.92393869	7.528919028	9.568956272	6.236871914	5.981947749	5.617046207	1.142091081	1.775250373	0.579589146	15.61446143	16.49300279	17.83376042
Zm00001d012788	0.057201816	0	0	0	0	0	0.011140054	0	0.117576172	0.065742279	0	0.021121858	0	0	0
Zm00001d012789	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012790	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012791	0	0	0.012823132	0.102944422	0.244716539	0.872218956	1.615568416	0.534965311	0.216322408	0	0	0	0.531119463	0.328014879	1.407611943
Zm00001d012792	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012794	12.7479705	14.39645629	11.84604909	7.211454226	6.842295461	7.339029997	7.126377801	6.862400838	5.981868526	5.607445335	6.876268117	5.051325265	9.012271854	9.189803068	10.69924184
Zm00001d012795	0.021228624	0.05013287	0.07914899	0.44346327	0.538457662	0.594932294	0.396890359	0.399951384	0.392711716	0.054895823	0.076963681	0.00881854	0.377118753	0.293803485	0.469388441
Zm00001d012796	0.023250398	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012797	8.319138302	8.673276001	6.919403774	18.83718756	16.67913708	15.74278525	24.18069082	22.36485981	20.41739759	12.34978489	19.24882091	27.21825053	18.25397482	17.18959361	16.97054051
Zm00001d012798	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012799	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012800	26.90175043	25.90775245	24.65879827	24.89100459	19.13972235	24.47356742	21.74469582	18.64255073	21.15317543	12.4789571	20.47233919	14.30744667	14.72485413	13.10366607	14.53718768
Zm00001d012801	2.939587267	2.783238639	2.830836042	2.100178419	1.517082065	2.104748368	1.422163037	1.355480857	1.506592837	0.459494059	0.937446217	0.657796021	1.052536164	1.175198509	1.283960198
Zm00001d012802	0	0	0	0	0.039853664	0	0	0	0	0	0	0	0	0	0
Zm00001d012803	0	0	0	0	0	0	0	0	0	0.006450525	0	0	0	0	0
Zm00001d012805	0	0.015077907	0	0	0	0	0	0	0	0.049531223	0	0	0	0	0
Zm00001d012806	4.753361041	5.709871119	5.387279191	8.520660924	6.833486755	7.614032045	9.715884226	9.418432924	7.997107741	5.45001101	7.228754842	5.902139989	11.10673124	9.534988632	9.604881128
Zm00001d012807	0	0	0	0	0	0	0.003500183	0	0	0	0	0	0.013408019	0	0
Zm00001d012808	0	0	0	0	0	0.073676534	0	0	0	0	0	0	0	0.432173175	0.957928004
Zm00001d012809	9.622916294	8.912744323	8.023644154	4.366879332	6.78611543	6.809647155	7.896814921	8.404581717	7.81115716	25.22614828	22.10819649	27.07000078	3.772120027	2.97948255	3.774522285
Zm00001d012810	123.1729629	131.2597305	128.8786594	106.5841177	52.67532737	82.46065492	61.62323117	49.82898377	49.26554987	7.290665935	13.71026495	1.434101036	204.843624	204.4156155	182.3800849
Zm00001d012811	4.448913866	4.687758421	4.649840595	4.071253276	3.796694752	3.269447972	3.609360047	3.568412101	3.468304912	0.985540707	1.435537362	0.540168929	2.283869099	2.10710573	2.078741043
Zm00001d012812	7.080556121	9.740658049	7.418611506	11.74956963	9.180253259	11.37540593	7.685306428	7.285074908	6.360418363	12.0173308	10.37023042	9.295650017	12.27335544	13.95262245	15.84252099
Zm00001d012813	0.191876967	0	0.155002419	0.071790189	0.252826054	0.082276439	0.112104119	0.150383966	0.08282313	0.608648935	0.254061162	0.085021039	0.386489678	0.294479177	1.231189572
Zm00001d012814	5.58609558	4.221424833	5.005847348	7.406740467	7.631676768	5.511004767	7.351860445	8.224472955	3.408343573	0.48657769	2.187423678	0.42339106	11.08733605	12.311808	10.06133413
Zm00001d012815	13.91027365	14.67144225	14.30931879	13.24340701	12.48976858	15.3862236	10.87191324	9.707354603	10.83587373	1.618789765	2.937076234	1.262879752	5.044646195	4.951954942	4.939094827
Zm00001d012816	28.04866403	25.98429955	29.17290813	40.11494716	41.99256575	44.0801663	34.98947731	31.18571206	30.46786372	27.02117364	29.53230665	18.4406973	30.05675336	23.0923773	23.78199008
Zm00001d012817	16.16987797	16.45735453	13.87114803	11.23397382	14.29307232	12.17133887	13.86174564	13.6917132	13.8738803	30.14893435	26.19250863	31.08182609	9.307442323	9.3961182	10.20963784
Zm00001d012818	0	0.127233766	0	0.083990985	0.088738209	0.06188103	0.039346889	0.182708825	0.062292203	0	0.02123136	0.018650705	0	0	0
Zm00001d012819	0.736623563	0.518927854	1.070643683	2.740483927	16.71422651	4.145219003	10.02256893	14.33163946	10.5473879	2.548422878	3.18032205	0.926641971	1.64861084	0.670646071	1.688840194
Zm00001d012820	189.5874069	184.2655829	181.1902223	112.8221307	90.36491387	92.59667908	71.88676627	69.43646112	64.06591801	48.45746828	66.94122472	32.44275863	173.6904275	156.2801063	145.6244458
Zm00001d012821	59.57779835	54.98792386	59.97798725	24.97500908	33.63007892	26.37547545	30.11490315	26.15138601	25.52530003	26.37478718	24.50278765	22.27551213	23.7762724	22.98690435	23.75493393
Zm00001d012822	3.825893757	4.541308498	3.656120837	5.001031953	4.04725353	4.968182209	4.523442023	3.3143423	4.517447256	1.568813028	2.427506864	1.888450777	4.808019165	4.068389018	4.046511145
Zm00001d012823	8.144564889	9.368375618	8.48671766	8.646008134	8.468520099	8.663051626	8.918070069	7.916518552	8.515623974	13.00929789	10.92556767	13.38750255	6.843272252	6.415359301	6.469653572
Zm00001d012824	2.405124486	1.721896971	4.153269941	8.84082883	11.34205769	6.8237205	11.15280283	12.48540381	11.02172096	3.072648005	5.3954391	2.664287757	5.354492411	3.940996132	9.71764742
Zm00001d012825	10.57978911	9.69386637	8.997977375	11.81625716	13.40222469	12.52996001	12.83040507	13.92530718	12.91941024	6.439600608	6.645477969	4.258523027	11.16695547	11.42234306	12.27797704
Zm00001d012826	9.205070221	7.651921204	10.30455367	10.69781233	13.76420344	10.93496956	10.28604214	11.23898735	9.653748428	0.470196646	1.582112261	0.256812302	4.127937861	3.311317111	4.674736437
Zm00001d012827	10.23221232	7.763938516	8.244094022	10.48906034	17.19175628	10.16321928	15.08831807	16.26171544	14.98909456	5.362524934	9.227324379	2.521297505	5.283836458	4.984685572	5.337851831
Zm00001d012828	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012829	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012830	4.32207171	5.018982203	4.127026286	8.85640364	10.48788795	8.762625183	7.665056293	9.523496474	7.497721735	0.84551056	3.182546002	0.66780118	8.403911855	7.336629886	8.871573142
Zm00001d012831	3.800716484	3.658137964	4.124286352	8.468486869	7.205542532	7.943675531	5.621021466	4.404958991	5.281999735	0.77453679	0.894183848	0.182235188	3.193016814	3.078219467	3.154603986
Zm00001d012832	24.02321942	23.85027526	27.7224183	23.96540158	21.76744128	24.78871556	24.69784094	21.40671361	19.3698813	11.01476101	16.88704875	5.001164877	18.89904564	17.23143438	19.4962854
Zm00001d012833	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012834	4.206533514	4.852874934	5.800735743	7.333526426	13.72708921	6.913471562	8.288090528	11.21262696	10.40323972	12.15229772	19.8357198	11.67430353	3.991143747	3.635117199	3.714753868
Zm00001d012836	1.701813351	1.286064128	0.39480348	1.896035489	1.450078061	1.056376799	1.299198358	1.203839724	0.769562875	0.266002534	0.844109552	0.540421592	1.612378272	1.504907295	0.74766082
Zm00001d012837	0.392331216	0.304087765	0	1.392618732	1.113439243	0.554607024	0.458439029	0.363893956	0.521072675	0.499467165	0.380570962	0.200587715	2.026297979	2.878276253	0.767611182
Zm00001d012838	24.45191721	26.80603899	23.41702707	19.88073842	18.1549202	18.61160415	16.40016542	15.09025778	17.50737736	11.2066234	14.60730891	9.167266996	19.93483694	18.12040177	16.74648687
Zm00001d012839	12.48829035	12.36257902	10.16089241	4.864807509	5.998041976	6.19149189	5.87901995	6.490843859	6.860511657	16.33539367	18.14623205	20.58506713	5.29500736	4.095540232	5.661008266
Zm00001d012840	6.885511975	7.329773769	6.25170225	2.330680157	2.462411682	2.456243001	2.263190238	2.33538062	2.769047572	3.353091778	5.428212172	7.923913555	2.329805684	1.839796974	2.155338009
Zm00001d012841	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012842	0	0.016436588	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012844	50.36560176	47.3665398	53.53189274	31.58835731	38.19298421	30.4084828	35.88337749	38.46588451	38.57631004	34.92403246	48.69758075	40.11109682	24.18013685	22.46156517	24.38818331
Zm00001d012845	3.710215657	3.525904036	4.515747726	16.39255464	21.48777673	18.75761853	23.34611515	29.52394667	26.61487529	58.27032282	53.85946473	63.0626115	11.22179736	9.217040417	15.18510697
Zm00001d012846	2.942246194	2.472101046	3.449830407	6.089009495	9.702068679	6.56992237	4.728374975	6.247198569	5.802037678	0.229492382	1.278086779	0.192708475	1.925543606	1.687320301	2.33917274
Zm00001d012847	2.658699052	2.598399255	2.563945022	4.276131874	4.192385267	6.300948752	5.211769334	3.713806588	3.171407938	1.182187294	0.842756398	0.09656348	26.04492741	21.27787527	23.24680542
Zm00001d012848	6.376158481	5.928616458	6.316140033	2.736447019	3.064085302	2.596230358	2.103682232	2.193397029	3.099172402	0.258640404	1.016891875	0.103870868	0.734498273	0.863442032	0.498674455
Zm00001d012849	20.95020648	27.25364519	27.27056853	24.85726607	20.28084696	31.34179324	12.77368376	11.42577705	10.65813767	18.76362273	13.58494653	7.652819412	20.18579216	16.20556868	19.41682044
Zm00001d012850	4.181008432	1.325454673	1.897014293	1.35975696	51.86791365	8.781098401	37.76575531	45.93224968	38.84211178	84.89928673	52.12608153	69.80904584	3.872379096	4.240395127	5.776465298
Zm00001d012851	2.407227235	1.859191082	2.337860722	5.098057441	7.316258925	5.063691111	6.9569265	6.918700077	7.837389316	2.918017992	5.011588541	2.536640468	2.32527791	2.647185414	2.844346026
Zm00001d012852	9.75542141	7.758847131	8.232495466	7.47859248	19.09253036	11.30817155	19.61780126	20.39985162	16.75104899	14.63982127	18.63350633	17.58530681	7.985171174	7.007341735	6.32547968
Zm00001d012853	0.196237807	0.401638648	0.091456847	1.753964845	1.680718653	1.90331047	1.0796391	0.887317979	1.684025502	0.135322145	0.164974781	0.226440977	0.27449551	0.170305531	0.226877685
Zm00001d012854	8.072187883	7.677321398	8.889526234	12.57837012	12.12634175	12.604088	13.71880752	11.41824352	10.7602834	5.756636187	10.46913095	5.173733179	13.01456989	11.52992494	12.52134944
Zm00001d012855	5.268897845	6.007717454	5.054518256	6.189720229	5.238723525	5.981832905	5.072073427	4.92332242	5.095182773	0.643789261	0.933713231	0.285294302	3.13416129	3.3055849	3.238082378
Zm00001d012856	1.871415193	2.229127394	1.786164146	2.501789415	3.138372444	2.970917754	4.011511804	3.484257597	3.707789901	1.470849165	2.251044725	1.794596892	2.918204047	2.819783846	2.824143984
Zm00001d012857	70.74669727	75.22313611	60.33447177	37.79078297	40.91426915	34.06817803	39.7408042	49.6868994	39.18693775	12.40359196	28.30401208	12.78253748	37.0317447	34.81830577	44.11584408
Zm00001d012858	8.206615968	8.871857534	8.513387227	10.27118668	14.69450648	10.17293142	16.23523472	19.53360063	15.55795233	13.30933093	16.23797309	8.661593635	10.38696715	11.76858289	11.38108084
Zm00001d012859	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012860	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012861	17.9008972	16.74767826	15.39621928	14.65014597	24.02727953	14.69437546	19.98806578	24.98441481	22.08501155	74.66387205	73.85504059	80.00018482	6.168770058	5.559651517	6.133829317
Zm00001d012862	3.401392493	4.672775162	3.98243856	6.223885261	4.481833611	5.631312437	3.176552592	3.056184891	3.328354395	1.720666783	1.821695585	1.549352231	7.509662747	6.766413783	6.733792173
Zm00001d012863	15.04365624	15.07660953	15.52207809	12.76449734	12.82963605	12.28594286	12.98419887	11.56463456	11.82516876	6.939036344	9.916263193	6.101773345	10.7831057	10.55181383	10.08079991
Zm00001d012864	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012865	37.1426955	41.39999531	36.23077558	28.63955505	27.73002037	28.12364476	27.93804104	25.09650123	25.74808783	18.21254239	23.0603411	17.86924737	24.15248398	24.90171199	26.36881499
Zm00001d012866	12.85679355	13.81716162	12.51347937	7.147937666	6.66847106	6.83145539	7.006973369	7.184803342	6.049943967	2.580857143	4.58583264	1.951269942	4.900283598	4.235695326	4.191233624
Zm00001d012867	62.70745991	88.14501646	50.55049446	1.413798637	2.132043946	1.69746697	2.151111992	3.212763261	2.103071897	0.093539474	0.134400078	0.021466155	6.277718145	6.245421247	7.62846068
Zm00001d012868	6.325586379	9.297483425	9.234211854	18.55570365	10.10048456	24.04036582	17.60405873	13.99536156	16.89764247	0.682605126	0.372959543	0.294195316	60.80920236	76.14529454	73.44643357
Zm00001d012869	6.121208858	7.339674138	6.410908381	11.82753531	9.663225138	11.70050723	10.0938875	7.846108889	8.114016809	0.668521531	1.688961142	0.899372777	9.558978582	9.361314753	9.896000719
Zm00001d012870	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012871	0	0.00916878	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012872	0.011800806	0.009908773	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012873	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011150957	0
Zm00001d012874	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012875	2.100043085	1.935374661	2.083322177	4.83746305	4.276450226	5.048699571	3.672689012	3.565255996	4.065796826	2.279797121	3.693417855	1.490709692	3.600578295	3.389404894	3.924535762
Zm00001d012876	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012877	0	0	0	0	0	0.026713129	0.127391044	0	0	0	0.054991594	0	0	0	0
Zm00001d012878	52.85902278	40.81317927	66.15294402	93.32193577	150.9326661	79.05930164	95.83551802	110.1653732	91.25721761	5.944946987	30.74903995	4.224550237	33.44213833	25.99585081	40.1491676
Zm00001d012879	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012880	0.99099554	0.945577689	0.74643162	1.807074568	1.800396404	2.474199091	2.570360915	1.665639157	1.425867733	0.010354138	0	0.008316514	1.680236106	1.547245854	1.102327366
Zm00001d012881	153.772222	164.2567546	169.4029579	155.1129061	99.12878731	127.675468	95.01692421	99.05441863	121.2633117	23.65538844	54.87804221	18.25213104	111.486378	113.7442115	105.1544282
Zm00001d012882	13.90410663	14.1291634	11.90592961	5.843626507	11.88226764	6.010995439	8.444847726	9.101516858	6.877864182	10.91423768	9.999627767	6.035510573	7.930085257	6.668174258	6.972196689
Zm00001d012883	3.73665477	3.334825012	3.429645614	4.288122377	3.734460123	3.956559855	2.814987635	2.203315371	2.170790958	0.308590597	0.253942359	0.123931035	6.510021168	5.281794221	4.647753794
Zm00001d012884	4.020152236	3.876235383	3.936240337	3.350410892	3.486091012	3.540845737	3.380330091	3.344043025	3.038427112	1.457291964	1.853122738	0.983947906	5.583833873	6.631392148	6.224343239
Zm00001d012885	0.338489973	0.355274478	0.794610855	0.164169449	0.17344841	0.207348266	0.131841846	0	0.301493121	0	0.094854826	0	0.568171724	0.700899791	2.369784753
Zm00001d012886	21.03105464	17.53588326	21.36860859	38.51978565	61.1697514	41.89851919	43.80829519	46.41925072	40.88393981	6.130729636	23.45361945	2.253073825	15.65051025	16.22813192	22.54510004
Zm00001d012887	0	0.082733788	0.010204594	0.13312445	0.010819133	0.090535849	0.211078927	0.445524222	0.030379141	0	0	0	0.955585089	0.612077054	2.088455649
Zm00001d012888	19.68129328	18.61645131	17.86070235	14.4967628	18.72744871	15.09849303	19.69458159	19.62200594	16.84413273	8.634991034	10.84362497	4.71158256	10.73115663	8.789410847	11.05643279
Zm00001d012889	0	0	0	0	0	0	0	0	0	0	0	0	0.023392278	0.022915729	0
Zm00001d012890	4.117966515	2.495313517	5.3627544	11.13823693	19.43528354	10.87804029	13.78102398	16.2592679	12.8819772	3.318917627	5.245209178	1.068608986	5.176899231	4.366437399	8.634434514
Zm00001d012891	0.045025022	0.046398421	0.030522125	0.148040397	0.377535911	0.090264784	0.124355018	0.138192543	0.161536987	0.084677629	0.041293089	0.058945162	0.137412123	0.183970765	0.212952558
Zm00001d012892	7.222139066	6.984508499	8.418553288	6.753152751	11.32086917	6.547427331	10.35291524	10.71294224	11.03567578	6.221674064	12.11642432	4.371652071	4.676861063	5.076890098	4.999256335
Zm00001d012893	4.243905382	3.644464454	3.831442576	3.323602492	2.541803611	3.680695094	2.69238825	1.934019834	2.154362907	0.10346292	0.270287921	0.067273147	1.263219681	1.558604888	1.27619439
Zm00001d012894	1.360007076	1.523714497	1.365934249	2.416015976	1.77117153	2.034307547	0.563600378	0.743656973	0.370558747	0.283532113	0.558376181	0.271530103	1.336079243	1.031486129	1.316389206
Zm00001d012895	0.950577984	1.013408113	0.960148697	0.497296622	0.436273083	0.584474923	0.253766941	0.171712461	0.302960726	0.039281011	0.148155086	0.055213858	2.003950657	1.576745371	2.519051298
Zm00001d012896	14.89415348	14.0451895	13.21494981	9.878536809	7.88910927	8.989462732	6.387166776	5.305569155	5.324344104	2.123573847	4.1111308	2.046802783	4.460006055	4.554169816	4.590771926
Zm00001d012897	0	0	0	0	0	0	0.01043425	0	0	1.243855933	0	0	0	0.009788953	0
Zm00001d012898	7.828258763	8.053359802	6.213676186	5.920772933	5.144316427	4.514700503	6.10597216	5.884425073	4.986885674	0.586067349	1.147091524	0.213301021	3.804204696	4.068805082	3.377638325
Zm00001d012899	17.91604959	9.051942322	12.64293531	17.76211488	70.70535044	23.90427531	41.75008243	61.86060896	46.88064081	64.98273702	59.01054289	30.93732629	4.537150192	4.605178247	5.770644449
Zm00001d012900	48.80059742	28.82380218	39.65610897	62.8280117	156.9855651	81.83099845	57.81747647	91.28685027	76.07302184	49.68618432	53.50184614	21.73804564	42.30672504	46.15246023	29.25489272
Zm00001d012902	0.01677452	0.02112757	0.062542269	0.115062496	0.353646259	0.482950436	0.098005135	0.182036277	0.248251627	0.370157261	0.137495852	0	0.722692227	0.570053359	0.494537678
Zm00001d012904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012907	0.027787061	0	0	0	0.219681175	0	0	0	0	0	0	0	0	0	0
Zm00001d012908	0	0.111449642	0	0	0	0	0	0	0	0.183057141	0	0.098021829	0	0	0
Zm00001d012909	11.90214271	17.0418058	10.42164904	6.848406187	9.823147615	5.885725895	17.60582545	21.74870479	16.94716043	99.97491516	87.80937753	84.35181763	5.581821474	5.272395044	7.805957049
Zm00001d012910	0.293145367	0.402782917	0.430562275	1.130030753	0.596950405	0.391792565	1.214461288	0.867599801	0.690192754	7.424340873	4.570412442	4.575785068	0.029821734	0.292142041	0.462158248
Zm00001d012911	7.724745077	7.881255796	6.243628095	7.527724775	7.811270836	6.341614323	7.967233233	7.106399443	6.925129885	2.065712889	4.528443692	1.29223574	5.564969708	5.424865336	6.099582003
Zm00001d012912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012913	16.89103986	17.46672467	15.18286006	6.285945505	6.759459153	6.714027977	7.258540075	7.288254446	7.169350633	12.94354691	13.84541945	16.21095839	6.536108909	6.839906892	7.846050595
Zm00001d012914	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012915	3.378151914	4.521181991	3.614255105	5.297495843	5.310487943	5.679013861	4.935929422	4.222045617	5.079139028	1.928432637	3.51168707	1.301622047	3.109675131	3.406988854	2.513171665
Zm00001d012916	4.529051664	4.677149419	3.960305202	5.187054553	4.483153256	4.707474407	4.683070282	4.038305348	4.783687049	0.483161272	1.031988614	0.409810818	4.465997302	5.063220435	3.846145741
Zm00001d012917	7.241808121	6.570396337	7.276555859	2.069757465	1.697400724	1.236990234	1.966342409	1.812164101	1.44558805	0.280102289	0.907361294	0.147844044	2.266211316	2.461767892	1.737565928
Zm00001d012918	4.103756081	4.898240948	5.376913012	9.521909884	9.567568836	10.84455152	7.220737818	5.935916965	6.551927028	1.722057604	1.81525043	1.656278088	2.305017094	2.231904011	2.831989597
Zm00001d012919	0	0	0	0	0.067467627	0	0	0	0	0	0	0	0	0	0
Zm00001d012920	0	0	0	0	0	0	0	0	0	0.032175573	0	0	0	0	0
Zm00001d012921	32.22391192	34.54844623	28.94556435	11.94705603	13.8309422	12.10745316	14.39972175	14.07040355	14.26348503	9.944467024	17.71260299	10.47029255	8.8988647	7.371030039	7.515599088
Zm00001d012922	27.59242697	33.64766581	23.62841479	43.96144549	18.32304939	28.37977949	4.530177642	5.080638538	4.642907526	0.640221858	0.746203094	0.627248265	55.79403926	57.62122408	58.00968937
Zm00001d012923	9.617230112	9.133930378	9.195573578	9.424697621	8.660194065	8.617307113	9.707535088	8.538962039	8.539025369	6.963840178	8.395454887	7.383567487	9.055799147	8.531936857	8.871083608
Zm00001d012924	9.662457759	11.922936	9.253473393	20.23603828	14.36084722	20.61944952	23.91770408	18.94720443	24.31662599	15.7825157	14.16965762	9.635682433	10.96497649	9.983296638	11.07666272
Zm00001d012925	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012928	0	0	0.015732083	0.015787194	0.150115469	0.170593012	0.029583031	0.091579979	0.140503525	0.069832909	0	0	0.113322591	0.235904698	0.146350112
Zm00001d012929	4.061743411	3.676707542	4.309222764	12.2728276	13.7758138	10.75342831	9.916746608	13.0441744	11.38689437	2.705266178	4.464042229	2.070462523	10.62029758	10.26637939	11.35422345
Zm00001d012930	16.02719899	12.30821985	14.94929742	16.69840667	24.83463688	17.60285004	17.85536994	18.02480704	15.22348872	5.468832077	13.18096442	4.962355072	13.72042265	10.96734548	14.06026729
Zm00001d012931	0	0	0	0.050991162	0.134683038	0.012522716	0.125409935	0.006162391	0.006302962	0.014097111	0.051558474	0.039630134	0.062909924	0.056025745	0.088630722
Zm00001d012932	53.75674912	56.07090899	45.90494078	19.56009337	16.57366223	18.73649743	22.76616991	20.46951993	20.77597808	15.62467033	19.58081066	10.93546696	11.87190757	12.37178908	10.80130685
Zm00001d012933	3.009711945	3.806805804	2.948004529	5.089602951	3.327186151	2.20301085	2.473715423	2.906297469	2.107552874	0.54524389	1.785097918	0.5368341	3.881721577	3.383233751	3.420660821
Zm00001d012934	8.190588144	8.479385974	7.65711949	8.411417144	8.910854265	8.203352717	9.996697966	8.659802817	8.33279572	5.23746819	6.214013411	5.061585836	7.662873583	7.313600709	7.24257433
Zm00001d012935	0.22360946	0.312929936	0.239304926	0	0.032737585	0	0	0	0	0.274128276	0.093992901	0.027522712	0	0	0.014362392
Zm00001d012936	6.124353421	4.677222879	8.206874636	7.93682607	12.44988318	8.603880582	7.03382744	7.31235539	8.033169773	1.424958487	2.700219754	0.497624508	3.636128472	4.300727618	5.522512651
Zm00001d012937	3.682028088	2.383174112	2.648168603	14.7753966	15.56558907	13.4494278	9.620755918	7.337817272	8.451234469	1.363570272	6.190874064	1.775026205	9.862032691	10.44597215	14.11092449
Zm00001d012938	3.763067366	4.196830046	4.811698032	7.42691689	9.644052644	8.189573171	7.644449153	8.088769257	9.122790302	4.108858143	5.160406226	2.277857966	8.562479443	8.763739157	8.854236247
Zm00001d012939	2.948021438	2.345080364	1.628359876	1.397554909	0.567902154	0.528030647	0.261882573	0.810708011	0.425231349	1.735695637	2.152265565	0.763902775	0.63663574	0.415777437	0.91685669
Zm00001d012941	0	0	0	0	0	0	0	0	0	0.029506863	0	0	0	0	0
Zm00001d012942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012943	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012944	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012946	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012948	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012950	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012952	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012953	2.58033223	2.793806344	2.57994256	0.88718954	1.388958648	1.426132348	1.057936222	0.670604577	0.869340637	0.151623961	0.383289326	0.07163847	2.981552741	3.012973911	2.011240987
Zm00001d012954	2.232600701	1.110901272	2.74042738	8.318832888	11.76711583	7.800503071	9.146882446	11.6653691	11.42157687	3.687346557	5.283184307	1.862513555	6.816490915	8.127968794	8.444637497
Zm00001d012955	2.202020886	3.726493445	3.687647242	4.771502767	6.452724656	4.489350715	4.947430846	5.433289801	4.382871152	0.539381052	1.286557058	0.348471258	5.413479356	5.992890639	6.526778118
Zm00001d012956	0	0	0.471962493	0	0	0	0	0	0	0.196405057	0	0	0.637439573	0.156113403	1.317151006
Zm00001d012957	0.051981878	0.052377094	0.064603231	0	0.0273975	0	0	0.05014265	0	0	0.013110163	0	0	0	0.012019629
Zm00001d012958	0.973311073	1.148166836	1.070194804	1.224365913	1.001591109	1.109965055	1.153701807	1.180355823	0.975510727	0.092843096	0.16270697	0.049714805	0.969891644	0.980881587	1.196623852
Zm00001d012960	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012961	0.073501258	0.009257511	0.036539032	0.650839818	0.813528996	0.594324044	0.04294311	0.203839308	0.172230127	0.030411106	0.111224933	0.008142136	0.197400642	0.112804524	0.399394176
Zm00001d012962	4.877035153	2.564676089	4.378678001	4.428615555	10.87118684	6.233341789	8.369932833	10.26260707	8.375469864	10.65178596	11.67748944	9.594304178	4.141287614	4.330626351	5.978497098
Zm00001d012963	6.042347832	5.909720469	5.139147149	7.051613471	4.877826117	6.513551386	4.621526903	4.592566356	4.15612896	3.095925641	4.576013438	3.265700081	4.728070312	4.853777709	4.683203576
Zm00001d012964	1.564985293	1.511896436	1.245415687	1.579507316	2.441366368	2.139354214	2.543716239	2.822811456	2.550625437	2.058393612	3.973880201	2.567363213	1.204892018	1.042444084	1.42479092
Zm00001d012965	6.348274663	7.591853438	6.949271383	6.0139436	4.765391637	5.122154856	4.046159452	3.154612411	5.124556332	0.707500393	1.326143429	0.468822038	2.841569277	2.54467776	2.743034928
Zm00001d012966	107.8158281	98.83798115	108.6159025	114.0382587	158.2298191	129.6926042	145.0179952	168.2771195	163.7390999	188.9835064	193.0097399	128.317859	139.328684	135.5133833	141.5612755
Zm00001d012967	0	0.225970731	0.35675905	0	0.047280463	0	0.041928706	0.302862923	0	0.395903107	0.497738872	0.158996037	0	0	0
Zm00001d012968	1.941936636	1.924089419	2.059472698	0.581255792	4.94698706	1.205429964	3.539878642	5.682121426	4.247038368	13.85548403	18.12144856	7.715598876	0	0.028384255	0.269417251
Zm00001d012969	2.821716764	2.96027548	2.645226751	2.45853753	2.70207845	2.835842396	2.182344431	1.904299327	1.967715243	0.99189208	1.401249657	0.464738446	1.633174564	1.802332938	1.89894472
Zm00001d012970	11.5609475	10.37304642	9.739321137	8.0093831	12.19711674	7.239090902	13.0624449	12.64697733	13.01284211	9.934801989	10.59420965	9.104314057	4.12939578	3.863953267	4.444354332
Zm00001d012971	0.002310501	0	0	0.002881557	0	0	0	0	0	0	0	0	0	0.002532852	0
Zm00001d012972	2.860090778	2.636879881	5.701464897	16.62213215	14.68242349	22.3555362	18.74202628	18.8708402	14.9839073	19.48601136	25.82373021	20.74588938	28.03667275	28.89521921	30.03765624
Zm00001d012973	41.0918231	46.13043981	40.227386	127.0643613	100.6545668	114.914998	62.6517891	54.83809144	53.45556967	0.341183642	4.071891825	0.014423212	215.7969717	218.7086332	209.5248554
Zm00001d012974	7.125478783	7.237128278	6.808412615	6.782901372	6.462225538	7.276402602	4.781296992	4.351296687	4.391692263	0.542655934	1.387233654	0.397178707	3.144643996	2.524187831	2.585402332
Zm00001d012975	0	0	0.017643458	0	0.018705977	0	0.066354463	0.119824272	0.122557592	0.156634563	0.107413486	0.078631218	0	0	0.016413097
Zm00001d012976	0.095269923	0.019998803	0.197336234	1.386192674	0.606738483	0.875390181	1.243105779	1.301903535	0.979118641	0.021898822	0.800922861	0.228660677	0.426440411	0.800693134	0.385507611
Zm00001d012978	8.589890339	5.739656571	17.31642918	24.59449284	64.21753798	25.17310567	37.74585367	46.2438372	34.342543	1.668573937	7.450265962	1.317873124	8.326201852	5.282988084	12.51876266
Zm00001d012979	3.284524347	3.478082662	3.749941506	5.880398778	3.65192865	4.408479049	4.204679588	3.63820822	3.576641773	2.226708611	2.007370606	1.69217106	6.582311391	5.72560694	5.596950692
Zm00001d012980	0.180860964	0.350453929	0.103742095	1.382289892	0.727153631	1.414699424	1.761133653	1.140711272	1.098100819	0.051166582	0.03508792	0	0.280231237	0.249103612	0.353861464
Zm00001d012981	1.535201486	1.666889614	0.953976463	7.89787637	8.867421049	5.601960458	11.95406482	11.39386148	10.87032112	0.310293372	0.292059661	0.007330287	0.836755141	0.689135642	1.162867103
Zm00001d012982	2.711311221	3.476808144	3.104941987	11.1352218	11.0846198	13.49765292	22.2441708	21.55119986	20.07289424	0.67782692	0.785038771	0.05444352	39.54340539	43.42515523	43.81874922
Zm00001d012983	0	0	0	0	0	0	0	0	0	0	0	0	0.186676086	0.182873109	0.055104516
Zm00001d012984	16.81998088	16.16568167	16.69240963	20.35137299	17.94678346	19.68023026	16.08530125	15.96706677	16.84248637	4.623458622	8.023873142	3.496094506	15.33109985	13.89475719	13.39290352
Zm00001d012985	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012988	10.86828747	11.00629622	10.72374678	19.99753594	18.48457016	29.96327156	19.66751283	21.88531398	17.50433865	6.386026541	7.952862153	5.662016659	32.41139986	32.33853843	27.21141314
Zm00001d012989	0	0	0	0.100590973	0	0	0	0.097253075	0	0	0	0	0	0	0.046624814
Zm00001d012990	0	0	0	0	0.034312107	0	0	0	0	0	0	0	0	0	0
Zm00001d012991	3.362721168	3.499300082	3.393367331	5.17359745	6.9051012	6.373355816	7.444475522	7.531763377	8.282520336	3.514645788	5.146588866	4.11774109	4.867233065	5.114655797	4.7627885
Zm00001d012992	64.04259961	52.55509967	72.52370221	72.21376024	104.2099297	63.4378707	69.32591454	83.65935947	70.4877226	4.221959091	25.15791943	2.890147426	29.37087985	21.39349475	33.36112242
Zm00001d012993	6.10509301	5.465817994	5.209601261	6.637852398	7.127619998	7.59677558	9.582869747	8.462409512	7.464920104	3.034533097	4.671871699	2.475892962	5.878068732	6.206401553	6.726519258
Zm00001d012994	0	0.006940334	0.027393228	0.068722974	0.079867964	0.027003841	0.251115938	0.099663822	0.067958174	1.770732897	0.020846269	0.012208281	0.006166284	0.066447301	0.152897819
Zm00001d012995	1.115744755	0.592589911	1.236291133	1.844167834	1.966114113	2.470373471	2.27763162	1.264289976	1.409179896	0.074158842	0.864535982	0.134020996	2.632493811	1.768364212	2.129199856
Zm00001d012996	2.539595178	2.394183775	3.553105845	4.238835339	6.973105676	3.511914803	8.014072818	7.857134352	8.805304334	2.569214096	6.74061446	1.667734014	3.786348519	3.225764823	4.852507376
Zm00001d012997	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d012998	25.030714	28.5978807	37.51482628	124.1066788	57.07013765	82.50860135	28.78265083	36.04459816	32.99989496	10.60930874	17.27337258	6.740643938	237.8485897	272.3127508	258.4073629
Zm00001d012999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013002	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013003	0.484862955	0.311330468	0.378095127	0.355705909	0.238013401	0.232950377	2.732830243	1.04317111	0.457271555	17.59614487	15.86115496	10.67899425	1.51070519	1.82385617	1.857567621
Zm00001d013004	0.414279816	0.469608265	1.879268837	1.808351352	1.200923755	0.507549459	1.113397727	0.774267095	0.28100705	0.114272033	0.496299132	0.137676114	0.254975829	0.022707404	0.0718446
Zm00001d013005	57.78709046	64.42670196	51.06598261	28.99295578	28.71250431	27.57147002	26.95442914	27.82561521	28.10459302	8.465458789	18.89169526	7.307644295	25.78686714	26.09097224	25.19307576
Zm00001d013006	3.075419842	2.942126864	3.066777031	6.597213037	6.06779719	6.989560773	2.81950664	2.301170902	3.210676282	0.030735587	0.697463401	0.118946613	3.024342822	4.033222621	5.710517164
Zm00001d013007	40.93353424	43.89558307	40.11201481	48.94425234	64.82312256	44.40025997	80.00533078	82.72486096	78.35680554	72.19843758	84.11679039	77.2434043	62.23483528	62.68947916	65.98524906
Zm00001d013008	12.34821128	13.90683814	15.44789064	23.12060074	26.45045332	18.22993952	17.31084482	21.80194339	16.98128624	9.168385176	11.90518725	4.631970566	15.62755081	15.00479218	19.20491144
Zm00001d013009	76.46150676	72.51245515	71.89682073	73.27668432	85.02723535	82.12615172	84.75199755	84.47728752	93.05409027	109.5790291	112.1249208	113.0625673	45.46744555	44.27423781	51.47948969
Zm00001d013010	6.745932346	6.611294961	6.300709961	5.929375925	7.315836993	5.362450237	5.719237357	5.446736862	5.682860111	0.858720467	1.8355217	0.612078395	2.277132951	2.210401929	2.45751655
Zm00001d013011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013012	11.80244172	12.12918862	10.5619009	22.60377739	18.6823058	22.26311855	19.45049129	14.65976753	13.82843446	9.155353529	15.45737303	9.760026943	19.02493294	18.89878259	18.3223099
Zm00001d013013	8.195264626	10.24546352	9.383762818	33.44770169	13.23642895	27.79119498	5.770814304	6.140803789	5.814137663	0.902147631	0.642223253	0.144922225	56.70815808	65.80195947	54.97462386
Zm00001d013014	3.32132889	3.306777024	2.896605549	1.587913132	1.401389134	1.522648376	1.093631869	0.996611641	1.086802105	0.896853855	1.276033542	0.679965158	0.999727412	0.896081912	0.952072699
Zm00001d013015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013017	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013018	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013019	12.43783675	12.48007377	12.68247931	14.44649722	17.97964198	14.76404981	12.25799454	13.60706287	13.89824042	3.412859614	5.743347099	3.181324977	8.96991891	8.585080776	8.853055991
Zm00001d013020	0.583159274	0.547403866	0	0	0.02174711	0.026960374	0.006428506	0	0	0	0.05550057	0.036565889	0	0.036185642	0
Zm00001d013021	0.539299168	0.356605882	1.13941241	0.386739554	0.373068031	0.231250345	0.850730962	1.398084887	0.598594899	5.83869235	3.434371445	10.06637779	0.392270506	0.133019704	0.218226202
Zm00001d013022	0.105887354	0.711282742	0.160840919	3.037336632	0.899142571	2.075623948	2.089651649	2.17049279	1.407453555	0	0	0	16.58878888	14.89660425	21.55956293
Zm00001d013023	5.963363754	6.306575774	6.580084225	7.602168381	6.704934248	7.561410657	7.440660662	6.617062324	6.620601366	0.943445721	2.190258093	0.754964999	6.539447045	6.68778668	6.377010115
Zm00001d013024	4.557077974	1.913218857	1.179906233	0.710423745	2.251732041	3.722029363	0.443745471	4.121099056	0.234172542	1.571240457	0	0	2.549758291	0.208151204	3.512402682
Zm00001d013025	13.67123392	12.17347615	13.43254291	7.667040679	8.24660306	7.477291132	7.792919648	7.921073511	5.665759026	1.714080499	4.00211142	1.044863363	5.550691344	4.610414009	6.29923192
Zm00001d013026	2.603825876	3.950472393	4.149211412	5.578389476	5.954193695	6.014384364	6.664678364	5.415431477	4.683765474	1.976057867	2.860763555	1.571921769	6.428782577	6.272643879	6.302149454
Zm00001d013027	20.83894563	21.09672352	19.8797481	25.82548506	24.84198305	29.30250496	22.62023977	23.95910221	25.27356929	14.81864229	23.32093017	23.45998192	24.54271391	26.01468693	25.62845236
Zm00001d013028	4.007391525	2.210996111	4.076874455	5.572818173	7.032646894	6.169589528	9.551750756	9.492959694	9.796977304	41.37803663	30.54429963	44.90276987	4.246290072	4.723493473	5.022599166
Zm00001d013029	4.459238149	6.014553417	4.875516755	8.834832043	4.016301577	7.745263415	2.763607218	2.987881892	2.909850046	0.163481666	0.234894934	0.037517025	5.87433991	6.026931315	6.519408033
Zm00001d013030	77.42260746	72.87260306	88.96369447	66.19215168	49.04295964	63.9200082	37.8670546	32.86810242	40.34878714	3.899308778	14.80281566	3.336783647	18.20207031	14.64033129	15.59203363
Zm00001d013031	46.62054603	52.41353497	47.41997589	51.92242148	42.48007931	48.39629392	36.92718634	44.05350629	39.55800974	8.209783693	25.54989251	7.703262717	63.53685307	59.64820818	57.43550085
Zm00001d013032	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013033	11.50119679	9.264007096	16.09640503	3.931367493	20.40667434	9.417014141	91.05790518	89.62443662	74.68167311	28.16418985	29.72688429	24.11459817	10.51855175	13.57208453	17.72046767
Zm00001d013034	44.54959839	39.45234818	56.69140787	70.67488978	136.4109496	58.36568256	90.48727977	105.6596098	90.6268541	6.365617805	22.09017199	4.90360729	27.66726864	23.7156756	34.88824855
Zm00001d013035	0.116236783	0.078831124	0.03889292	0.641193439	0.883609696	0.613441072	0.114926885	0.226404396	0.170919919	0.332950888	0.264968488	0.831999536	0.260145385	0.333259743	0.387650721
Zm00001d013036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013037	0	0	0.011914902	0.251089458	0.442135324	0.082218741	0.078417853	0.046239541	0.08276505	0	0.084627666	0	0.128739549	0.105097382	0.476612846
Zm00001d013038	0.061582135	0	0	0.230407701	0.081143497	0	0.161907131	0.445524222	0.284804442	0	0.368870976	0.017054474	0.241193352	0.202525496	0.195792717
Zm00001d013039	236.0066458	264.0242022	309.1294589	744.9317544	239.75404	631.2373343	291.2767738	208.6400585	193.930435	46.80572839	27.08428796	72.14344544	660.1829863	732.2285093	600.1095595
Zm00001d013040	7.921949867	7.876332195	8.297187668	5.946443267	7.132588205	6.483437335	7.235032825	8.383765428	7.556859267	11.12680279	9.163840511	8.712600496	4.721501431	4.297451149	4.686590453
Zm00001d013041	5.809248047	5.998199659	7.034792298	9.709124519	17.57432906	10.59395182	12.41887662	14.63423314	13.19593917	9.547762958	13.38289788	7.458489767	8.556621291	7.825360134	9.522645785
Zm00001d013042	0.21849004	0.825567041	0.329727221	4.476642778	5.3260146	6.443444669	3.48309801	2.860306194	2.829317557	0.086095368	0.098401054	0	4.348560373	2.857089131	4.348402635
Zm00001d013043	9.921381227	8.986818013	8.69390077	7.186229382	8.355587122	6.410916902	8.139115246	6.749089908	7.407994471	4.200686686	6.340592999	3.52889323	7.822487087	6.69428869	7.845178452
Zm00001d013045	1.162759586	0.95414394	1.138548695	2.263102446	3.946334505	4.2304509	2.737955302	1.826878963	1.933734081	0.315867927	0.68870593	0.117095664	1.912318718	1.931299832	1.996094823
Zm00001d013046	6.694645483	3.596414911	5.188895231	2.506277715	23.12792612	6.526208572	15.38603208	16.20230256	17.83698106	7.024044659	7.84455444	5.555373156	1.295577052	1.236303071	1.484178931
Zm00001d013047	9.092975013	8.951623343	9.598947143	13.34533399	16.75795187	15.5775103	16.16417385	15.66841287	15.89260415	9.074707841	11.39041018	7.58802397	11.10682533	11.77565976	13.15742943
Zm00001d013048	1.654615846	1.685627733	1.513669764	2.328502137	3.1412284	2.339441971	2.879442295	3.12782311	2.998314172	1.477920927	2.113312129	1.357031998	1.848926937	1.829373083	2.494218272
Zm00001d013049	15.06129329	13.87497051	14.59364655	9.608598535	13.61342015	11.49107972	14.39522038	14.67421342	15.8189683	29.83998908	24.51005658	31.0355697	7.995378311	8.045832412	8.296645125
Zm00001d013050	0	0.053144968	0.052440277	0.052623981	0.27799161	0.620338227	0.049305052	0.254388831	0.052038343	0	0	0	0.236088731	0	0.048783371
Zm00001d013052	2.23162789	2.601836967	2.092598408	2.50110948	2.966988101	1.84733075	2.249397997	2.115093486	1.748029149	4.866224122	2.528936017	3.58008512	2.277909061	2.220483581	2.969400723
Zm00001d013053	0	0	0.012746174	0.153489901	0.135137707	0.226169826	0.395476083	0.346258885	0.543884613	13.56476758	3.867006384	6.373588133	0.137721378	0.134915709	0.367577025
Zm00001d013054	0.075845958	0.286584794	0.14139237	0.141887683	0.024984544	0.092921676	0.022156501	0	0.093539101	0.209208161	0.07173314	0.16803742	0.297059218	0.249435007	0.263064833
Zm00001d013055	1.559344472	1.086993784	0.999449986	3.265706858	3.230605511	2.703410854	3.529590947	4.588196367	4.426768161	1.136162397	2.312664761	0.81479766	1.733981965	2.085692984	2.449107179
Zm00001d013056	8.471987065	7.6642443	8.09628019	12.6790737	16.84657475	11.5120662	10.33798871	9.249733366	9.260351169	0.421487253	1.019561884	0.252834742	3.099536394	2.595352196	4.061029247
Zm00001d013057	24.92858846	13.50617315	23.77861479	4.814002401	24.65362599	6.391654167	13.51816959	17.30258025	16.18820109	13.07108416	23.93100812	13.81354076	1.381724184	1.402353109	2.597863334
Zm00001d013058	6.441714805	5.438146436	6.512811941	9.309468754	9.227728378	8.889144626	6.682883079	6.04060492	6.430686644	0.288135786	0.724502427	0.12535934	2.410946235	2.533599757	4.579206935
Zm00001d013059	8.945034861	9.449942837	8.906554804	14.90772216	15.99374658	14.76950498	16.39047914	15.54347567	15.37093827	10.11577156	13.03247528	7.034588524	12.22526303	11.73136492	11.86551685
Zm00001d013060	8.829245344	8.798301709	9.860694605	7.255391441	7.176059952	8.996833334	4.685254961	3.787903813	4.249599249	0.536947639	0.835188202	0.713842763	1.772728841	1.633595179	2.504095922
Zm00001d013061	16.72943767	12.13834965	16.78856518	17.12036729	39.71948194	18.84852015	24.78072831	30.22390671	28.55319576	10.17784303	24.47966133	7.73152778	24.1375563	20.89662885	26.86843442
Zm00001d013063	0	0.005270575	0	0.020875629	0	0.051267622	0.044007815	0	0.005160827	0.086569722	0	0.004635559	0.009365503	0.004587354	0
Zm00001d013065	1.076226913	1.332825389	0.744320296	3.476302753	3.791453951	3.332172533	3.793760685	3.339230461	3.19881543	0.416099251	0.829058046	0.174589275	3.008311659	2.576796725	3.425633841
Zm00001d013066	72.14701323	91.55514131	90.09053964	37.85992738	29.22602059	48.74046859	24.65732576	15.75499816	21.23716997	59.31780345	74.75693491	65.84898256	36.8248277	33.60997231	30.72575267
Zm00001d013067	148.1562373	212.1553957	202.5787262	102.0410248	75.26495671	123.9919702	49.65533186	45.48423292	45.56103068	50.95056134	94.73623819	54.79199944	110.945181	93.90258785	98.86877951
Zm00001d013069	4.737755074	5.638517248	3.418089599	6.634794449	6.665920404	7.968750091	6.544756988	5.615829551	5.941999293	6.783328846	9.088269287	5.848707741	3.032752152	2.464803686	3.156520472
Zm00001d013070	0	0	0	0	0	0	0.042261473	0.010902378	0	0	0	0	0	0	0.010453579
Zm00001d013071	0	0.159928511	0	0.052786904	0	0	0	0	0.013049863	8.887480852	2.415182267	23.79495062	0.106568845	0	0.012233601
Zm00001d013072	60.29364703	61.50003058	53.38088	20.23904027	22.15731499	21.58692822	23.7815446	22.48889349	22.32798098	22.42394752	26.45786155	23.18482368	13.59101931	15.07730532	15.97269093
Zm00001d013073	2.312170559	2.758635676	2.857898345	2.8626669	3.046623918	3.322014215	1.606325855	1.627149812	1.130249758	0.144948382	0.450611467	0.097795763	6.252082599	5.769859209	4.967263202
Zm00001d013074	78.61734518	86.32912026	70.39625596	15.09126904	13.39125299	15.05269698	11.25362663	9.301286305	10.66679822	5.429864981	6.828185215	2.495444602	17.81361745	18.36828177	15.69231606
Zm00001d013075	2.411890232	2.561840791	1.63413103	2.774770279	3.490486334	3.226528627	3.201275321	3.012801792	3.093415642	1.890540626	2.324257585	1.836717016	1.620252554	1.06098112	1.484511471
Zm00001d013076	8.365353435	5.394784502	10.86526529	12.74319871	23.62454855	12.87762826	12.92874603	16.79771093	13.48006842	0.63581772	2.452267678	0.324986535	2.692019483	3.785773955	4.864817694
Zm00001d013077	5.674182691	5.192490866	3.966688659	2.34412193	3.39950207	2.856693743	2.911108419	3.121558818	2.044681647	13.90272685	7.826138266	20.22196045	5.625342221	5.16085398	5.145601594
Zm00001d013078	22.53906133	21.91152677	21.62098449	13.92686549	15.3090731	14.44801263	17.06621094	16.9051691	14.86046291	10.65895553	14.7677819	12.75674622	11.74956185	10.10377196	9.920164332
Zm00001d013079	6.073157261	5.995742121	5.850320721	8.814491318	14.65919055	9.194964877	14.98318849	18.2111807	15.89556853	6.693392908	10.50110083	6.125318466	6.172838694	5.131300684	6.74544841
Zm00001d013080	12.23262695	7.439045085	9.516984864	4.290402226	37.34637404	11.12229951	29.55866889	36.38418696	27.42849205	10.5242302	24.71047256	11.53149933	2.029807581	1.469302618	2.15909459
Zm00001d013081	4.166685791	3.43244701	2.9484049	3.689053781	2.997363244	3.219218148	1.965054078	1.683743931	2.120283836	1.014705534	1.940786512	1.555188171	7.409841227	6.411194255	6.63132368
Zm00001d013082	7.97331937	9.805575599	6.777563177	2.884691741	5.0300039	4.308236189	4.636438234	3.310483974	2.875780538	3.397510314	9.912329291	2.478927551	4.861024747	3.050975559	5.978814744
Zm00001d013083	13.20780226	13.91221694	12.11256785	10.95382322	12.81280334	12.15515499	13.22014878	13.00773138	12.18870667	13.25816635	14.87176527	12.41012692	9.751839005	9.581888651	10.06353841
Zm00001d013084	0	0	0	0	0	0	0	0	0	0.3903703	0	0	0	0	0
Zm00001d013085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013086	38.43776078	30.67757529	43.35247556	49.05495805	79.08165268	40.54157631	46.22074459	55.68192955	45.820276	4.462354818	13.55373813	2.445866155	21.2346046	18.29024314	27.11631954
Zm00001d013087	6.882117756	4.070470731	6.819376433	1.797807029	6.647970789	3.418190232	6.085652171	7.092775927	6.222298962	6.733887673	8.854488271	2.678596499	0.780538252	0.254879025	0.510732023
Zm00001d013088	0.024239776	0	0	0	0	0	0	0.058455306	0	0	0	0	0	0	0
Zm00001d013089	0	0.019723906	0	0.273427696	0.309516432	0.556385833	0.347676864	0.321001988	0.366950787	0.129586842	0	0.086737529	0.17524112	0.171671096	0.651786065
Zm00001d013090	0	0	0	0.010908618	0	0	0.005110313	0	0.005393609	0.138727564	0.005514992	0.033912542	0.019575879	0.00479427	0.020224967
Zm00001d013091	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013092	10.33875081	11.17663279	9.102984863	15.49580657	18.17555153	17.41627849	17.23848464	20.65057883	15.72535946	15.35364167	15.12175499	8.542870442	18.43979474	17.37890312	20.00000512
Zm00001d013093	32.54815026	32.13040651	31.98701807	35.73917311	22.99180739	30.86670007	7.906215514	6.535865047	7.89261021	10.22032379	13.52739836	9.447737012	28.92868094	31.82289482	27.26575622
Zm00001d013094	9.057261297	9.479795246	9.908361195	10.05980624	11.01290129	9.22112913	8.827014214	8.384934528	9.268818924	10.93477048	12.87956053	9.618475818	9.802655112	8.896766409	10.01947169
Zm00001d013095	1.863940658	1.606280106	1.645941981	3.233502234	2.80687459	3.142071943	2.006066147	2.95722126	2.177768629	0.396232857	0.362293412	0.256158018	3.614880283	3.14179224	3.57271303
Zm00001d013096	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013097	0.133318771	0.129752875	0.16568896	0.13603859	0.798486539	0.170757996	1.11880507	0.591859971	0.448415505	1.746751359	0.917014073	1.107633628	0.23056325	0.132862471	0.26623265
Zm00001d013098	0.654506501	0.41089264	1.545756354	1.062933783	3.041265528	1.576241965	3.373656841	2.979729787	2.24302719	5.047653907	1.252172118	0.241677533	1.232097966	0.918659274	2.868855076
Zm00001d013099	2.10429777	0.337626857	2.08218747	0.518191438	16.31843456	2.2167969	11.3076787	10.74717989	11.12457321	47.06327299	28.86832226	34.10453301	0	0.058772105	1.193183852
Zm00001d013100	2.656048405	3.498133886	2.21180056	6.339165727	7.905489218	7.457823628	9.271392055	8.916855354	8.230679864	2.073293621	5.321575556	2.419515135	6.163173147	6.266706075	8.12892603
Zm00001d013101	4.642205673	3.833931491	3.353080925	4.397392414	6.730093959	4.491331003	5.347407005	6.123910981	5.379689048	12.24232547	16.93340118	19.96739202	4.715401142	4.538059998	4.95747224
Zm00001d013103	0	0	0	0	0	0	0	0	0	0	0	0.25668428	0.172864969	0	0.044649187
Zm00001d013104	0.373530981	0	0.185690161	0.124227103	0.59061824	0.274575937	0.407372891	0.660576898	0.368533836	0.343440537	0.533839158	0.13792689	1.058916011	0.737060002	0.431852789
Zm00001d013105	0	0.007036767	0	0	0	0	0.006528335	0	0.006890242	0.04623184	0	0	0.018755884	0.116367326	0
Zm00001d013106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013107	11.89556151	10.24895381	10.63335983	9.476317582	10.27189273	9.869076802	12.98904377	12.66646848	10.82485447	11.93943646	11.62067605	17.05274469	9.288982158	9.505937991	9.285427787
Zm00001d013108	0.164866457	0.479192107	0.512241296	2.238032504	4.11912392	1.709095116	4.438277983	4.839806498	3.706790584	3.323217293	3.190494419	3.687753047	3.966553482	5.255142089	8.196149301
Zm00001d013109	0.085634111	0.20936846	0.075124465	0.213598296	2.860711893	0.469025071	1.80702835	1.931480471	1.932052893	2.285651188	1.880250522	1.328062144	0.38894618	0.745478889	1.217175653
Zm00001d013110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013111	0	0	0.01102573	0	0	0	0	0	0	4.661720552	0	0	0	0	0
Zm00001d013112	0.185918866	0.199821226	0.113989853	0.105114375	0.215578335	0.054666252	0.028966159	0.002989011	0	0.372653222	0.71897894	0.15103182	0.59918164	0.505450757	0.596121289
Zm00001d013113	3.793459502	3.536869454	3.444050626	9.154865993	17.64059624	8.087869211	15.06815701	17.07842852	13.85288808	45.1158341	35.62905347	34.45003658	4.520652537	3.645458927	5.055011968
Zm00001d013114	0.093319003	0.37219616	0.077318088	0.077588941	0.860730337	0.323930883	0.508868526	0.262550111	0.40280874	0.300305343	0.843360838	0.413498226	0.278471895	0.017049928	0.305686923
Zm00001d013115	1.054018035	0.741860373	0.539385707	0.927900402	12.00923755	2.164853813	8.730012935	7.887092071	8.334630868	67.68091547	43.47104175	37.53469197	0.242834123	0.271870961	0.358408437
Zm00001d013116	6.496495885	7.001487684	6.46239694	8.288737744	7.197657089	9.197359037	5.23688721	5.391904894	6.474369628	3.218903115	3.500799349	1.23747791	8.047364567	8.215088186	8.4026034
Zm00001d013117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013118	0.324347187	0.306387361	0.685269385	6.128352877	3.226681264	7.212259745	4.301646485	1.701236621	1.480037131	0	0.122703662	0.017964855	7.386132558	7.431220214	9.243493891
Zm00001d013119	5.272849383	6.160364382	4.225423369	2.916084902	3.631065281	3.639209338	2.36974021	2.574787892	2.368698169	0.279697254	0.586696962	0.039644954	2.162622215	1.752393384	2.248121612
Zm00001d013120	0.240212666	0.355165915	0.363436358	2.149181078	1.472484818	1.688988114	0.988511683	1.347464015	0.759942671	1.325171478	0.605831758	0.497485117	2.150445495	2.072289146	2.427019271
Zm00001d013122	1.801045349	2.025210888	1.802213427	3.047402359	3.293039606	3.257470762	3.213192112	3.34926752	3.274535499	0.504469977	1.667089988	0.569739398	3.636080681	3.213947317	3.692244569
Zm00001d013123	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013124	0	0	0	0	0	0	0.030958986	0.031946504	0	0	0.267284722	0	0	0	0
Zm00001d013125	11.04639909	11.09725828	10.78667645	11.81506578	9.93915736	9.608678728	10.0127008	8.62592492	8.945949715	8.567764432	8.775814098	5.232645832	10.18333631	9.779822948	9.474973145
Zm00001d013126	10.55771631	11.95079501	11.64189627	16.20311275	18.20879231	16.55964368	16.62703147	14.84649753	14.85342724	3.394435852	9.811373989	4.000259735	10.80605875	9.008349998	9.788252531
Zm00001d013127	0.054179263	0	0.007481572	0	0.007932125	0	0	0	0.037121143	0.008302459	0.01518262	0.006668592	0	0.006599246	0.027839387
Zm00001d013128	0.883915986	0.87208144	1.034452275	2.866192352	3.338775096	3.501434951	2.909210608	3.339511304	2.925138041	2.661627154	3.371805411	2.317350105	1.524909323	1.219299511	2.026822884
Zm00001d013129	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013130	4.515038509	4.913654334	5.235126401	80.45876601	62.33946468	71.29197018	76.04258178	55.86040787	67.43132271	0.278300893	7.909556566	0.484321876	12.60766092	10.81157325	9.18603469
Zm00001d013131	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013132	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013133	0	0.133480385	0.263420926	0	0	0	0	0	0	0	0	0	10.37692328	20.91193493	23.52492959
Zm00001d013135	47.41657837	50.00592003	43.37993798	44.0349194	28.03385632	39.97349728	48.24852413	42.13804788	42.24950495	40.29406075	33.5048874	30.10258188	72.0545708	73.46982687	72.51049864
Zm00001d013136	0.405547923	0.383091832	0.152531204	1.524000353	1.905446942	1.784743588	0.841765413	0.836444773	1.197734967	1.096556572	1.016088818	1.530988478	0.901670965	0.719510954	1.085801297
Zm00001d013138	4.857350553	4.98326772	2.700064496	6.564535693	7.377768032	7.747014605	6.212436591	5.942049802	5.620140998	0.121801586	0.868675347	0.078265491	2.016087951	2.439725742	4.186293894
Zm00001d013139	20.74585847	19.52400662	18.53525428	18.22545632	21.00116917	19.86135849	20.3794873	23.69734882	22.06508903	20.53129389	19.89215144	12.95063224	19.2416325	18.71489348	21.31652976
Zm00001d013140	0	0.06615411	0.009325274	0.093579418	0.039547434	0.04596359	0.035070992	0	0.037015199	0.103484553	0.160854938	0.340789941	0.033586278	0.057578599	0.069399833
Zm00001d013141	113.4413235	122.7445491	117.1077705	144.5614309	209.053288	153.5469916	322.795064	300.1069813	319.6100926	908.8736522	745.464211	1253.84165	276.3200474	260.0388828	299.708876
Zm00001d013142	0	0	0.057207575	0	0	0	0.10757466	0	0.056769101	0	0.522420139	0	0.051510269	0.50460898	0.266091112
Zm00001d013143	0	0	0	0	0	0	0.071958725	0	0	0	0	0	0.068912386	0	0
Zm00001d013144	0	0	0	0	0	0	0	0	0	0.674483708	0	0	0	0	0
Zm00001d013146	2029.210103	1984.196813	2451.223296	4695.797289	1973.174426	3997.267844	2350.814954	1498.311344	1800.374782	18.6390928	25.0828931	7.756345294	3896.55594	3898.670267	3247.970014
Zm00001d013147	17.4844187	17.49562411	20.85613177	20.71003926	25.22634508	18.35300147	14.59911192	17.24717034	17.01212346	4.822779192	10.99096765	2.394290256	11.42475244	10.22883912	12.84984079
Zm00001d013148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013150	0	0.078690763	0	0	0.007483945	0	0.039820948	0	0	0.007833355	0.057299093	0.006291804	0	0	0
Zm00001d013151	0.065727086	0.013797251	0.027228605	0.601127784	15.21362546	3.918867455	9.856269591	12.53500963	13.03710592	22.79809471	30.48748488	19.99833806	0.012258453	0.012008723	0.063324568
Zm00001d013153	0.265905958	0.311812329	0.284886817	2.527221693	2.923778157	0.820044699	1.360700397	1.879508624	2.080696064	1.391037829	2.081271378	0.853204085	0.543811627	0.50257836	0.349826826
Zm00001d013154	0.964636943	0.764589288	0.847465499	1.731981977	3.873417404	2.409470651	3.779934047	3.885464439	3.333112818	1.037936214	1.279357347	0.584955994	3.191850707	3.06301334	4.92249135
Zm00001d013155	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013156	33.34651395	31.26290369	36.42524913	42.43626828	51.0645277	43.08384257	47.81450814	54.93957916	49.74276287	38.84943123	49.91250771	25.64230786	43.51951641	38.14948129	48.33651939
Zm00001d013157	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013158	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013159	67.06863033	59.68859764	77.14145579	145.8842122	201.8126322	139.0979094	167.5373612	183.7059744	148.9431138	87.37425243	104.7623806	47.68483923	111.0378611	112.8434217	135.7529962
Zm00001d013160	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013163	4.036863593	5.647926899	7.396234141	7.006919131	8.924673113	6.895951663	11.82916008	16.93602352	11.59956042	10.73322248	17.8958716	9.47387687	29.37461264	44.25351628	12.24529428
Zm00001d013164	0.058366516	0.124406349	0.027899261	0.117587379	0.236635223	0.077007504	0.750214018	0.411433206	0.393133016	1.486099349	0.985135119	1.308036115	0.065314005	0.15749766	0.077861143
Zm00001d013165	0.520808911	0.27331698	1.186648554	1.786208274	2.115913283	2.499076858	3.169610506	2.852062204	1.498704266	0.568639404	2.654391848	2.067327042	2.136940282	2.307504777	1.655846979
Zm00001d013166	1.526032569	1.278715002	0.07053314	0.149424921	0.265887178	0.162237904	0.081053139	0.068431534	0.163315905	0.008696903	0.063615736	0.062868705	0.239921906	0.22120866	0.189553097
Zm00001d013167	0	0.029209448	0	0	0	0	0	0	0.014300613	0.623698502	0	0	0	0	0
Zm00001d013168	0	0.047319306	0.005187985	0.072886222	0.121009111	0.051142388	0.063411567	0.055367438	0.061778649	0	0	0	0.107440197	0.160165201	0.164090873
Zm00001d013169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013170	0	0	0	0	0	0	0	0.033965102	0	0	0	0	0	0	0.314813565
Zm00001d013172	0.219618216	0.172881222	0.170588853	0.034237289	0.072344805	0.302695159	0.032077986	0	0.033856271	0	0	0	0.153599897	0.4213181	0.476078677
Zm00001d013173	20.908946	18.23185028	19.15612473	6.792714741	10.70877199	9.464304611	12.75708904	13.22277772	16.65004339	69.68913557	49.76820087	76.16728529	4.281412317	4.060618143	3.761276134
Zm00001d013175	1.297901954	1.997981718	1.469655359	0.791358096	0.684070494	0.706714436	0.674043753	0.417326487	0.569128202	0	0.436452268	0.127800612	0.4518559	0.063235809	0.366801546
Zm00001d013176	3.553362686	3.540596776	2.695474663	2.521087885	2.608090096	2.495923811	3.352439791	3.040441198	3.044874234	0.2323282	0.783328464	0.139955695	0.971991031	1.090689868	1.308528916
Zm00001d013177	0	0	0	0	0	0	0	0	0	0.173882264	0.394014547	1.15374129	0	0	0
Zm00001d013178	0	0	0	0	0	0	0	0	0	0	0.030730596	0	0	0	0
Zm00001d013179	0.096276295	0.173229072	0.564075897	0.720429714	0.743026267	1.230067048	0.642850581	1.061369576	0.966845182	1.422652325	0.832508551	0.44183783	2.108552631	1.643431238	2.019454862
Zm00001d013181	2.091773496	2.032402982	1.81976358	10.17419974	8.367091738	10.69015647	1.152283321	1.603400289	1.750535721	1.463056688	2.11023479	0.993073608	3.460983385	5.012008011	3.938497434
Zm00001d013182	4.86530346	4.496026696	4.235970093	7.214307038	5.362363052	8.410791088	3.455037484	2.865160492	2.280765045	0.370721303	0.881314351	0.404961593	7.399613129	6.140910712	6.743730277
Zm00001d013183	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013184	21.83817399	19.3325912	24.48488889	69.42851502	58.65559275	67.21582978	66.95835912	66.31529611	63.20589013	20.1046774	28.780134	17.93282081	52.59345947	55.10317671	64.41321121
Zm00001d013185	0.694242348	0.179364268	0.82962157	1.354245264	13.06473695	3.314932402	12.44914051	12.25597688	7.321550871	5.634370077	5.084413187	2.474763998	1.872478745	1.629433645	2.037467962
Zm00001d013186	0.319625023	0.414767956	0.535659875	0.954278017	1.193266431	0.688239223	1.01858684	0.870058462	0.710729839	0.113543412	0.091603956	0.021458551	0.216770099	0.392854983	0.419920618
Zm00001d013187	0.302460927	0.253967105	0.338309398	0.578398093	0.265691096	0.457019092	0.341644743	0.413325569	0.509791551	0.166857394	0.177992702	0.022336833	0.361027723	0.198940974	0.524529162
Zm00001d013188	0.649383611	0.373077677	0.67962599	2.529108533	2.642032262	2.037811076	1.184800407	1.978127547	1.573639479	0.691345801	1.479755043	0.151443725	0.777676279	1.036592997	1.119578355
Zm00001d013190	0.018676549	0.141139096	0.789183185	0.302803564	0	0.549151873	0.043647095	0.180157336	0	0	0	0	0.167197265	0.266160556	0.583001265
Zm00001d013191	86.89343594	106.32957	82.74542424	588.9533259	112.7647052	292.683987	97.06744146	72.73623419	55.34410034	0.213049554	0.048700182	0	2561.902055	2303.238938	2110.968895
Zm00001d013192	10.44108407	11.25363058	11.17061493	9.742091401	8.301816183	11.21948596	7.339484067	6.586751308	7.029655638	4.702033079	5.184783928	3.792798926	7.673661509	6.991756919	7.245030399
Zm00001d013193	792.3508871	721.8452852	983.935901	873.2426344	553.8054908	743.4573223	35.41605126	33.76028701	42.37679722	45.54421092	47.15095003	14.48713751	104.7449182	71.93152083	77.68636901
Zm00001d013194	0.058175463	0.054954159	0	0	0	0	0	0	0	0	0	0	0	0	2.791239153
Zm00001d013195	23.52874301	17.69388219	20.61907063	32.26633805	48.5479816	38.11780426	52.85291799	43.06207524	42.47657393	42.07804231	40.21276529	45.13476505	20.55478906	20.33091052	20.09667279
Zm00001d013196	16.15919745	17.49329153	16.45969195	16.70540542	14.83494051	15.29179343	15.95525994	15.51472586	17.12903267	21.10776702	22.44774034	21.18541817	14.67985839	14.19713654	15.65085313
Zm00001d013197	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013198	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013199	0	0	0	0	0	0	0	0	0	0.10073848	0	0	0	0	0
Zm00001d013200	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013201	3.244569481	3.386796023	3.186217606	2.378507518	3.761427367	2.673128817	3.489110242	3.875672291	4.213237075	4.792434319	5.388253818	4.010450059	1.650353379	1.38418859	1.389752945
Zm00001d013202	127.106007	140.1715999	122.2840388	70.96287363	64.13261018	47.63204721	90.09101279	91.69914621	116.6627186	46.17422835	53.94047415	59.12906927	20.11605012	23.20676015	20.98871987
Zm00001d013203	0.375958933	0.60266394	0.424766244	0.021312712	0	0.125618491	0.139779823	0.267871439	0.33720846	1.131293129	2.06878375	1.836255167	0	0	0.098786325
Zm00001d013204	10.45764118	11.56599213	10.10737274	8.295584954	8.504243402	7.027377173	6.91228992	9.286678898	9.000343989	0.519964012	2.196016893	0.397751084	5.826105615	5.520448745	6.050419196
Zm00001d013206	0	0	0.005271688	0.095222792	0.08383737	0.098738291	0.198260465	0.158552989	0.073237953	0	0	0	0.128160361	0.032549863	0.122601707
Zm00001d013207	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013208	15.3220999	7.407405838	14.40465149	13.66158266	49.35116866	19.17196257	50.73768968	53.62094168	42.64944735	13.06797724	24.59120306	10.68678362	7.408731637	6.352931846	6.123509581
Zm00001d013209	3.635125782	2.670765052	2.831774959	4.172199568	7.549159445	5.308732632	7.725788196	6.924081651	6.269868281	2.216084807	5.730012794	3.12225021	4.347853733	4.187087806	3.943839428
Zm00001d013210	2.14723335	1.361952407	1.51667947	2.716467745	3.908090865	3.898668045	3.555980654	5.811448161	3.562597853	1.23568741	2.435009121	0.701603698	2.350963577	1.625696184	3.393338184
Zm00001d013211	4.342627245	4.495465684	4.440109724	10.36880794	10.27398539	9.667959626	14.75723048	15.1041633	12.28552975	2.307894619	4.550547484	1.671756766	8.639181032	8.005510943	8.905853058
Zm00001d013212	5.29105613	3.177229751	4.025150021	4.865763885	10.56324648	7.123946741	12.45262896	17.02571338	16.80769298	24.97277249	13.42525811	11.99472194	12.97805041	8.811680061	10.33124229
Zm00001d013213	0	0	0	0	0	0	0	0	0	1.743570056	0	0	0	0	0
Zm00001d013214	0	0	0	0	0	0	0	0	0	3.059236387	0	0	0	0	0
Zm00001d013215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013216	0	0	0	0	0	0.0216677	0.082664098	0	0.043623345	0	0	0.03918337	0	0.029081928	0.020447364
Zm00001d013217	47.87002017	43.65754525	45.46619662	35.23632929	50.31004939	38.55039498	49.10496518	55.2541785	54.21682961	81.62075504	91.93202166	124.3563042	24.74084059	19.58915899	26.5951217
Zm00001d013218	4.744226966	4.021884609	4.06449835	6.625759037	5.11378981	5.71774788	5.715842584	6.727461498	5.868258106	2.468170328	4.823268068	3.537314935	6.227797714	6.447130931	5.809528461
Zm00001d013219	1.292098328	1.102434036	1.71978528	4.865536285	7.370303413	4.473243826	3.730708873	4.764392567	4.16370202	0.172453221	0.735847878	0.009234373	1.352615679	1.206261612	1.474566614
Zm00001d013220	20.77365154	14.11352968	22.11299908	12.44914827	48.48951906	20.36721519	25.38128535	30.3951855	31.3154559	33.58605779	42.5427883	25.92683962	10.94371358	9.621460236	9.913201109
Zm00001d013221	3.936346422	3.337009634	6.190391772	13.55705645	18.87165901	13.03946832	9.393840996	7.667161035	7.263238699	0.020880272	0.152734127	0.318652356	1.507830484	0.863032235	3.378207895
Zm00001d013222	0	0	0.216818036	0	0.062693235	0	0.203855228	0.267728013	0.019559655	0	0	0	0	0.017386179	0.110017253
Zm00001d013223	3.515003657	3.105719897	4.964155558	7.073794674	9.519203783	5.386212925	3.54719792	3.275045608	3.060754622	0.35623761	0.574214422	0.197637896	1.510783935	2.285689966	3.605104389
Zm00001d013224	0	0	0	0	0	0	0	0	0	0.057943717	0.010596106	0	0	0	0.009714697
Zm00001d013225	3.058885019	3.231930444	0.446071134	0.300649547	1.905854706	0.170641628	0.82628467	1.879686247	2.054698884	0.857040249	0.999804059	0.089014729	0.167852427	0.11745209	1.628890507
Zm00001d013226	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.050538168
Zm00001d013228	2.255889494	1.971794544	0.695839732	0.691497944	0.77355725	1.125488402	0.914662632	0.956947057	0.636874825	0.314872839	0.712900961	0.228821533	0.590043469	0.518433059	0.603323244
Zm00001d013229	0	0	0	0	0	0	0.064466654	0.013304597	0	0	0	0	0	0	0.165839836
Zm00001d013230	31.57258058	22.35377458	30.94634788	122.4222587	157.3990989	161.7580609	89.6166862	94.75447785	83.1680058	2.1137764	1.417328179	0.271647937	89.61885867	88.43159229	110.8533187
Zm00001d013231	0.833862912	0.829829866	0.818826494	0.603432217	1.763404611	0.819799389	1.780328214	3.11565019	1.015688132	3.56368694	0.908727802	0.04561558	0.25343983	0.112853062	2.749354358
Zm00001d013232	0	0	0	0.07735009	0.385260699	0.282227761	0.320946173	0.309816909	0.437081607	0.097757021	0.055864759	0	0.089233278	0.009712824	0.122922712
Zm00001d013234	1.127989597	0.539868687	0.981308154	2.588474636	3.329293579	2.266384216	3.400584103	2.366571735	2.97700538	0.808955483	1.337085207	0.999628549	1.211766316	1.434388496	1.695342879
Zm00001d013237	0.023571093	0.207815152	0	0	0	0	0	0.028421373	0	0	0	0	0	0	0
Zm00001d013238	0.031602482	0.039803444	0.015710263	0.16553563	0.424737251	0.232304191	0.073855002	0.243874563	0.226052828	0	0.079703489	0.056012473	0.04950987	0.097002503	0.007307356
Zm00001d013239	4.384133838	6.234116548	3.739877366	6.127708115	7.06881497	7.754816397	5.371425251	5.061053718	4.811779162	3.277243853	2.590886669	1.258678399	3.762223998	3.378448083	3.119173539
Zm00001d013240	15.6464469	19.25048223	18.65219595	45.23404692	30.77698608	34.68179916	24.05800366	22.01732922	26.72137701	6.173934112	10.69197911	4.146787174	51.07881719	62.16012187	62.88419616
Zm00001d013241	6.927293298	7.130067928	6.804092977	12.13020259	12.17407516	13.64289116	10.63873257	10.29411164	10.83985284	7.843031787	10.84175055	9.238321121	10.52496622	10.04674152	10.08233276
Zm00001d013242	3.341857181	3.641713134	4.687075795	6.885394276	7.564439287	6.802329526	7.62630147	9.309578558	7.919876855	1.199199613	2.615703591	0.464195326	5.427761327	4.697039586	7.230704832
Zm00001d013243	1.84249115	2.704749667	1.90455661	13.63007681	9.119846881	13.7074848	14.76435428	14.46639492	12.0515966	3.563100594	1.973811929	0.996781156	25.87553381	23.9862027	24.64995654
Zm00001d013244	0	0	0	0	0.223427675	0	1.33742821	0.281129238	0.026140191	3.975603761	1.069138889	4.555051578	0	0	0.024505135
Zm00001d013245	5.457124559	1.527393017	4.745136419	20.47674595	128.9557421	36.8411264	100.9525559	108.6393681	89.87551883	63.34614334	76.03222328	52.66421433	9.647734073	8.007546531	20.69104574
Zm00001d013246	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013247	6.591095293	6.481336469	6.924645841	6.058018561	7.211334769	6.694940478	5.521848784	5.002298694	5.184173469	0.159144934	0.491973627	0.08521753	2.742424914	2.228757266	2.595126298
Zm00001d013248	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013249	16.08621237	18.15982659	15.65530677	22.46130165	21.20942815	23.24318187	23.95029821	24.23304954	22.57731792	24.3589314	25.53719461	23.61207182	23.79519938	23.51236117	23.62590322
Zm00001d013250	0.011114824	0.111993299	0.013813536	0.04158578	0.014645412	0.013617181	0.064938362	0.093813637	0.054830644	0.076645876	0	0	0.161691989	0.182766911	0.308406089
Zm00001d013251	7.626567935	7.829258728	7.954543771	8.795086065	11.89061385	11.45495678	13.27980331	12.09579403	15.78186348	13.61643188	13.60159902	16.70677407	6.792959059	7.058734344	8.822309653
Zm00001d013252	7.315119627	6.384459761	8.405711747	15.87212545	27.73810842	15.23411306	17.72735071	22.25741262	19.27477154	3.401039471	8.251675689	3.618354826	7.136902558	6.797849452	9.274243632
Zm00001d013253	4.924524698	4.555910544	4.633187717	9.637352914	10.36453646	9.053218099	10.09754686	11.04748434	11.01256153	14.34743717	12.3640844	22.22565529	9.186568364	9.740261858	9.997112091
Zm00001d013254	14.88989361	18.0046956	13.93149138	21.90527663	21.37193991	24.01874131	35.75831914	34.75309568	32.80834344	27.98553219	26.13726905	21.61032852	36.25761701	38.88002372	37.67788027
Zm00001d013255	0	0	0	0	0	0	0	0	0	0	0	0	0	0.071822141	0.050497802
Zm00001d013256	0.609937881	0.985493084	0.781003279	3.365468414	2.922482325	3.253211334	4.290672745	4.078383744	3.297622163	0.050982115	0.326306585	0.013649727	2.419914809	2.498940099	3.632701287
Zm00001d013257	7.900613636	6.830508427	9.556067101	19.29212593	24.74168334	19.3401581	24.35941988	23.697458	21.96512565	10.08371776	17.75420308	9.571912794	17.25946883	17.76898279	22.14560188
Zm00001d013258	0	0	0	0.003412764	0	0	0.009592576	0	0	0.007547993	0	0	0	0.005999554	0.044291707
Zm00001d013259	0	0	0	0	0.001486292	0	0	0	0	0.001555684	0	0	0	0	0
Zm00001d013260	0	0	0	0	0	0	0	0.033710422	0	0	0	0	0	0	0
Zm00001d013261	6.829100643	10.04576689	5.425993964	73.04429311	93.4694185	178.396619	392.4723525	266.6889307	354.824307	134.2309674	40.4454783	4.388836267	613.8816534	649.1650694	613.5186423
Zm00001d013262	0.534939386	0.680114344	0.605240938	3.741722406	3.394637747	3.428347645	3.364209848	3.276798585	3.301755038	1.586900661	1.718258928	1.162801581	4.099943564	3.53234668	3.141908379
Zm00001d013263	0.082855963	0.089449193	0	0.191906674	0.280735423	0.043504239	0.331944664	0.199810863	0.613106291	23.11559987	26.55386934	26.02734151	0.013245498	0.155707914	0.232639658
Zm00001d013264	12.79179782	14.87779401	11.82390246	7.65263473	8.664559551	8.301104962	7.823933301	9.977397715	7.173074695	8.738302191	7.006845546	6.797254915	6.821721743	7.318158125	8.781006705
Zm00001d013265	6.329105346	6.919427866	5.971656748	3.792480505	3.705114494	4.282104263	4.296060265	3.28671869	3.452060342	3.284383108	3.850844735	2.972866908	2.732542786	2.413806487	2.158129773
Zm00001d013266	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013267	4.136704527	5.072703412	4.480618921	8.018129902	7.055647867	6.841839225	6.726953823	6.602071697	6.111416194	2.979380938	3.455942595	1.648410372	5.657795241	6.310931066	6.230658424
Zm00001d013268	0	0.005423298	0.085622172	0.069811719	0.073757522	0.068579124	0.050314447	0.025959679	0.021241478	0.285050237	0.358371988	0.30050251	0.159008549	0.165209775	0.144368047
Zm00001d013269	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013270	0	0	0	0	0	0	0	0	0	0	0	0.009019876	0	0	0
Zm00001d013271	12.9868167	12.21921881	8.303940838	7.692848866	16.07494313	10.18783256	14.23539913	18.09363641	12.94601941	38.74808757	30.60669325	37.07433372	8.443880397	8.506324303	9.980015255
Zm00001d013272	3.260090584	3.537901227	3.674956212	4.531767247	4.64394337	5.051942407	4.789568283	4.984840622	4.459601442	3.951797345	3.759970465	3.650422351	4.306784306	3.736096787	4.168431489
Zm00001d013273	2.965511183	3.387338304	3.059850918	4.573447803	3.993092886	5.073685786	3.085659881	3.567898541	3.416949588	1.841139923	2.707424682	1.496806597	3.180382758	2.834298364	3.349675544
Zm00001d013274	7.659149363	7.427103925	7.212569094	6.38297306	6.581432178	6.085282712	6.521336577	5.895669105	5.745922384	2.082504428	3.44997726	1.498810883	4.504412409	4.375622058	4.352857705
Zm00001d013275	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013276	1.938385667	1.841814796	1.092256056	1.674570257	1.222368822	1.444612647	2.287824863	1.751467099	1.695074669	1.777746346	2.228868206	1.422489275	2.043449144	2.563828117	2.478125535
Zm00001d013277	0.541889688	1.347672134	1.044436985	2.749103643	0.80478431	1.479684834	0.343429481	0.758603387	0.266187397	0	0	0.010174251	9.918105814	9.957696302	11.00088767
Zm00001d013278	0.765478959	0.698816193	0.672439613	3.269237005	2.619537617	3.257056813	2.21524174	1.847646828	1.899981202	0.07215364	0.192711477	0.05490407	1.4019819	1.288902441	1.782730062
Zm00001d013279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013281	0.487015967	0	0	0	0.825062122	0.042618657	0.28453908	0.209725143	0.300312878	0.095953616	0	0.115605897	0	0	0.080436703
Zm00001d013282	10.14057327	10.41666446	16.40960159	22.65983663	36.13392644	19.51431904	22.90731336	37.07045236	26.84147529	2.534736964	8.335311884	1.500150108	11.78060493	10.37417747	14.68747631
Zm00001d013283	5.363452656	4.409980601	5.202026643	9.150324002	10.82089624	7.224160019	9.019552875	9.028997001	9.166260231	1.404787743	3.020488497	1.357528153	4.496954378	3.628955103	5.612075298
Zm00001d013284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013286	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013287	0.481439932	0.721377602	0.907818566	7.898773299	8.881148355	12.33557819	24.23868703	19.51704471	18.83617384	83.07826592	30.21948333	48.2836066	13.65444331	11.30158669	14.08799764
Zm00001d013288	0	0	0	0	0	0	0	0	0	0.045161402	0	0	0	0	0
Zm00001d013289	1.465230103	1.572655202	1.235107811	0.68327801	2.081750405	1.545353291	4.287747475	4.916129349	5.452531947	90.25041179	37.53245448	126.9135113	1.996082912	1.55036759	2.739870498
Zm00001d013290	41.65300407	42.44352157	40.75005657	18.53234892	24.59085783	18.02941652	20.10262755	23.00205768	21.6769647	42.51957539	48.53621347	45.39226042	14.00074112	11.51420582	13.57423608
Zm00001d013294	0.026140027	0	0.016243451	0	0.0861083	0.016012555	0.076361553	0.189113532	0.032237902	0.072102813	0	0.014478368	0	0.014327808	0.030221438
Zm00001d013295	11.03558688	15.54722508	17.08491134	41.54944312	16.07755416	29.3864801	7.85447947	10.75715454	7.167433631	0.797606113	1.135774712	0.094521049	68.46154057	70.77718337	73.72391954
Zm00001d013296	35.27569579	33.269933	38.37527783	32.03118826	53.74563388	32.03371377	41.372034	33.09109322	30.23617987	11.5107727	14.9284254	5.874764537	38.74497575	34.90586489	42.71003484
Zm00001d013298	5.876774762	4.752747296	9.251319098	10.36382875	8.232576875	12.10080587	8.288603183	8.67730661	7.120540631	1.336620841	1.196129368	1.416215831	1.430633611	1.695349174	1.811827628
Zm00001d013299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.014012245
Zm00001d013300	57.596229	59.94054482	58.84358637	55.9553455	49.05551756	60.56571721	48.15032933	39.11755493	42.84684786	47.74335572	34.93568545	45.86127582	18.97494542	15.0073886	17.39143845
Zm00001d013301	0.102984813	0.122226498	0.152603257	0.313685582	0.138307169	0.152860398	0.164307319	0.152832299	0.134336269	0.095599159	0.159836496	0.162347322	0.210540667	0.145461598	0.15798943
Zm00001d013302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013303	0	0	0.107687217	0.060035809	0.038057443	0.058975817	0.02249977	0.208957135	0.154355985	0.451455005	0.121407497	0.106650511	0.140057146	0.105541456	0.022261707
Zm00001d013304	6.4843422	7.425680688	7.740184889	6.985833495	11.19611209	6.839228955	8.031793021	10.4630126	10.12796242	5.957620067	7.937520984	4.154185516	3.835261429	4.079763601	3.545331457
Zm00001d013306	6.735826932	5.676813615	7.193121795	9.147353917	12.75433623	11.96075494	14.14803078	12.37332417	10.7890298	53.51392681	25.06282016	55.5477897	8.524009469	11.3039778	11.92165874
Zm00001d013307	0.091728623	0.563798794	0.250801325	0.269983903	0.46895976	0.283197886	0.904640525	0.875982408	0.823563335	0.086026048	0.203584015	0.130064391	0.97720205	0.836627062	0.72538751
Zm00001d013308	0	0	0	0	0	0	0	0	0	0.681758571	0	0	0	0	0
Zm00001d013309	49.63072193	39.96888121	53.49480332	34.25534132	38.81167228	35.37619727	38.92051184	44.45791709	40.66938395	12.45565162	26.85239513	7.709862371	30.68981797	32.28992861	34.29382255
Zm00001d013310	6.413443508	5.656691758	5.804952611	7.774518989	8.959585573	6.008558572	6.86435175	6.28183299	6.702073529	0.891952533	2.967703364	1.263689428	7.277365319	6.06565191	5.171678325
Zm00001d013311	0.169828993	0.178250204	0.175886643	0	0.037295769	0	0	0.102387554	0.034907708	0.35133327	0.428319617	0.156774043	0.221718112	0.310287509	0
Zm00001d013312	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013313	7.578062248	0.38694314	2.99086344	0.319291571	16.39463329	1.944655791	6.162577549	4.383491131	3.599416145	19.49044342	26.15035639	5.84221112	0.171893817	0.056130662	0.651175778
Zm00001d013314	1.93166131	1.960017902	1.759036264	2.546275773	3.198469287	2.350377088	2.901555515	3.273534751	3.134761619	1.496901111	2.175097173	0.961856939	1.936733044	2.247791825	2.480839294
Zm00001d013316	0.254941425	0.240824751	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013317	10.4717436	10.66703795	9.655479377	13.35095902	19.47202642	14.14822065	19.41435305	21.4678398	20.34206321	48.36236596	44.83693855	52.37984789	9.089832145	8.954169641	9.556597826
Zm00001d013318	5.263535252	5.637107629	5.608010002	4.14572911	4.593000983	4.563035998	4.107447329	4.654782491	3.766642053	3.310496417	3.812038837	3.055729113	3.17726463	2.872956384	2.959873996
Zm00001d013319	0.906226567	1.575546232	1.222995123	5.449952635	5.450308707	5.939505174	10.47232093	13.93699055	14.28919135	6.164834457	16.3775208	7.211899233	6.613403163	7.654953109	13.97390624
Zm00001d013320	42.93465981	54.21775956	52.98726357	89.46672173	54.271673	74.69868419	52.38463868	53.42388266	47.73530342	20.59242512	33.66177938	18.22575488	99.25911244	108.6686027	106.3431188
Zm00001d013321	0	0	0	0.010908618	0	0	0.010220625	0	0	0	0	0	0	0	0.010112484
Zm00001d013322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013323	0	0	0	0.072170031	0.152498255	0	0.287378019	0.069775222	0.07136687	0.159618078	0.456081074	0.62500585	0.016188942	0	0.050177181
Zm00001d013324	22.92182933	25.81126997	22.04375717	49.95938003	21.35774583	30.25541833	38.55005563	37.50940458	30.25453148	7.45163139	6.021908785	3.536709749	109.7464826	100.3014593	91.80621381
Zm00001d013325	9.306032914	8.357745533	9.30014513	14.13867889	19.02516055	14.00658418	20.29084553	27.0883938	23.0129984	35.30604873	30.85028399	22.17632092	15.06594022	17.35323723	12.27492306
Zm00001d013326	92.61646437	123.9146603	93.20182149	194.8152883	182.8045144	342.7896379	208.2252606	129.6407703	228.1404124	467.147391	350.09086	568.1548549	226.1349946	209.8993288	245.1540478
Zm00001d013327	0.040288509	0.050743526	0.075106016	0.318225175	0.132715052	0.427777442	0.35307842	0.647716944	0.836396229	21.79980375	17.0027741	30.23667695	0.097682292	0.272355014	0.170789718
Zm00001d013329	14.7388562	13.10164869	14.74793096	19.18291401	23.82758882	19.99015287	17.3658732	20.10709007	18.02562154	1.081517274	3.764890952	1.454780774	7.221084641	7.125762301	7.842828656
Zm00001d013330	10.98581297	10.00765591	9.182278373	9.007636921	11.6410298	9.311343674	10.04347902	10.40827444	10.49231849	3.684580048	6.697292406	3.530965559	4.881309504	4.564739075	4.068612002
Zm00001d013331	11.2580209	10.20485266	9.770980691	9.846064559	8.791107203	9.525065559	11.6493819	11.12565081	10.9754351	10.82800532	9.170726686	7.185109644	18.74438922	17.94356483	16.67689916
Zm00001d013332	4.828332615	4.407236295	5.461280279	13.29507295	20.33707193	13.2264972	14.80208106	16.97500326	13.78272673	1.084904125	2.702280361	1.231982685	5.403059235	6.690574419	6.773919458
Zm00001d013333	1.475625249	0.109326792	0.593324277	1.353188086	9.149895279	3.668857515	11.51202536	8.216032404	7.386471026	2.753411849	5.254053967	2.596178145	1.845539334	0.523351599	0.652303355
Zm00001d013334	0.91175998	0.787264438	0.921276494	1.997185968	3.389722446	2.044197876	2.182090896	2.612962107	2.408176797	1.278840712	1.442898169	0.643771739	1.384471061	1.237345454	1.603574737
Zm00001d013335	1.147185316	1.270025559	1.126050545	3.335308487	7.904530223	4.789302882	5.703469311	7.233398878	7.055965369	5.582900352	8.495539895	7.00963474	1.398210586	1.193504072	1.698005465
Zm00001d013336	4.599078692	4.745135432	4.29855609	3.889324467	4.402464734	3.746042456	5.172804345	4.838967924	5.006328364	3.854969675	4.721763218	3.6267399	2.446357955	2.527742181	2.194847022
Zm00001d013337	0	0	0	0	0	0	0	0	0	0.137226241	0.050188834	0.02204421	0	0	0
Zm00001d013338	0	0	0	0	0	0	0	0	0	0.049152465	0	0	0	0	0
Zm00001d013339	8.165791071	9.959079779	9.505579729	6.370772937	13.79033731	9.506264185	12.25097293	12.58605928	9.649174511	3.732757735	5.160310817	1.698625566	8.352181212	7.382054327	8.223294117
Zm00001d013340	0	0	0	0	0	0	0	0	0	0	0.052044874	0	0	0	0
Zm00001d013342	0.233032396	0.076093932	0.203801986	2.228147201	1.592133767	1.247725753	2.04728024	1.966888186	1.064420644	1.547433784	1.904656756	1.634903851	1.284537321	1.636825378	3.023460263
Zm00001d013343	0.106037271	0.152633527	0.301219275	0.765132277	0.678638355	0.491802772	1.203644224	0.977191355	0.96211832	4.90958237	4.307578352	11.77988865	0.805186829	0.780480526	0.963235085
Zm00001d013344	2.091773496	3.026649503	2.444920457	3.975267296	3.839018562	4.11863905	3.710003116	2.927556707	3.117182029	2.696008216	4.914460486	5.061916861	2.67515624	3.985583712	3.973045657
Zm00001d013346	0.196614102	0.214618031	0.130321379	1.405862522	0.699483395	1.27665964	0.903658082	0.537362868	0.832513695	0	0.471079713	0.021780018	2.801556089	2.313412041	2.992950991
Zm00001d013348	11.97629892	12.56234098	17.37259216	36.43486576	34.24841486	39.23723802	35.5951578	35.05741486	36.17870057	20.84569424	20.57509724	18.44559813	54.2014695	60.10068256	59.30409596
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Zm00001d013357	0	0	0	0	0	0	0	0	0.028928378	0	0	0	0	0	0.022599102
Zm00001d013358	4.920161278	4.669400361	5.22839855	4.011545652	5.399039326	3.992626281	3.859622925	3.967835042	3.97343388	0.608693359	1.048550648	0.269876473	1.679205486	1.538555646	1.77774565
Zm00001d013359	0.23325328	0.816064915	0.773034302	0.95351661	5.361470036	1.92099051	5.057436531	4.765631136	4.634618643	0.55402981	0.833396297	0.244032543	0.725049751	0.326728336	1.168581366
Zm00001d013360	17.50830773	19.81251018	17.92065038	19.37338791	18.25860981	16.9441919	19.68328124	17.29709744	17.87492826	14.08260857	19.82985976	15.57942048	18.01855587	17.66311647	18.8184882
Zm00001d013361	0.813279829	0.594110793	0.909671908	3.96586343	4.832985845	4.443850644	2.822442935	1.980873312	2.657948896	0.370143499	1.548613654	0.189192042	3.048788914	3.637507301	4.2687916
Zm00001d013362	11.3087193	11.16906143	11.29926913	16.25421601	18.30892359	15.98094917	16.87759186	15.4043375	17.79941461	23.67284148	21.67337603	25.0421688	7.818423457	7.683694573	9.126205986
Zm00001d013364	0.347728841	0.466779299	0.31274623	1.934406824	1.344407618	2.292635557	4.116674849	1.96400437	2.578719313	0.189306079	0.098084906	0.121641546	5.693436184	9.198778516	7.934644613
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Zm00001d013368	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013371	25.29594718	23.88776129	24.09596499	24.21005411	22.96805877	24.66451834	23.72590013	24.15272502	23.03817589	14.19449604	18.27515671	12.83119812	21.16365955	20.92816337	20.61358519
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Zm00001d013375	3.397157069	3.33585025	2.791137705	5.904458378	6.2721962	5.142388378	3.885118956	3.809837798	4.132331769	0.961257379	2.636761765	0.834999391	3.628205906	3.073217325	3.515718772
Zm00001d013376	0.004391659	0.055313105	0.027289833	0.465552342	1.168904266	0.360485658	3.4997876	2.975981586	3.385083319	4.548672984	4.075984687	7.968674006	0.761733123	0.476614771	0.944388386
Zm00001d013377	0	0	0	0.01953055	0.061903286	0	1.207719632	0.207707169	0.057939598	85.35453315	23.69740836	161.2103709	0	0	0.072420674
Zm00001d013378	0.762245057	0.37163244	0.244469781	1.39529268	1.92774182	1.385719565	3.031196579	2.54974474	2.016579369	0.254337484	0.961215471	0.10895232	1.843530275	1.266877113	1.506669136
Zm00001d013379	0	0	0	0	0	0.010716015	0	0	0	0.048253066	0	0	0	0.009588539	0
Zm00001d013380	4.319153796	4.52217478	4.140387817	4.976761584	5.13119317	5.004809882	4.971285466	5.634236932	5.265299653	10.07532188	8.113369975	11.93198558	3.633312688	3.273604805	3.582983382
Zm00001d013381	0.219996868	0.237503031	0.195294825	0.352762136	2.443258675	0.577556281	1.211884182	2.008443678	2.093018027	0.780202158	0.634109962	1.148883432	0	0	0
Zm00001d013383	9.342135109	10.22346745	9.004390525	5.652145377	6.645023418	6.666504489	6.437358704	5.763648158	6.275154682	4.509002301	5.051593085	3.70491796	7.22454878	7.49756289	7.820357813
Zm00001d013384	0.471421859	1.088555556	0.351530685	0.058793689	0.82822328	0.09625938	0.036723763	0.151580655	0.019379797	0.281739668	0.079263745	0.034814649	0.281352639	0.413431357	0.199843601
Zm00001d013385	0.839461732	0.845844126	0.993605249	0.119650315	0.76901258	0.538714776	0.588546624	0.559119872	1.064868821	0.143341235	0.574662153	0.09741994	0.259449089	0.105171135	0.01848633
Zm00001d013386	12.21296897	12.03032017	11.00994104	11.27584568	13.16212436	9.870821872	9.457103473	6.945425609	8.542614317	3.720697402	6.620107999	1.534629748	4.487574592	6.274509898	6.659515485
Zm00001d013387	0.314574412	0.385499322	0.49661725	0.784647122	0.604942936	0.656215998	0.466926204	0.53307749	0.58717891	0.164159451	0.203704868	0.113017705	0.332990822	0.298246501	0.235907643
Zm00001d013388	0	0.016352298	0	0	0.008553588	0	0	0	0	0.035811748	0	0	0	0	0
Zm00001d013389	0.87901453	1.200846672	0.950829013	2.610163786	4.547127538	2.737866301	4.016126724	3.875052829	3.93189997	2.498376559	2.917786232	0.994340499	2.651679229	2.541576125	2.583668209
Zm00001d013390	2.556094727	2.692598097	3.128589899	2.144553946	5.531733785	1.70812679	8.996593726	9.236865647	10.18312233	25.13628643	25.4935108	21.08199619	2.938361679	3.430426191	3.268624026
Zm00001d013391	10.41627577	10.72509096	9.536555887	6.488976852	7.276799021	6.246417424	7.616411623	7.311029791	7.879481468	2.844901061	4.616068026	1.331996803	4.793117698	4.208184848	4.179990755
Zm00001d013392	9.238875976	10.62138553	11.44633247	18.46802612	42.91090197	28.24432598	22.29750926	31.80620872	24.7759479	9.348053751	13.77374444	5.627329998	16.20035899	13.92991679	18.55103206
Zm00001d013393	1.416817746	1.930974948	1.314048705	2.940593878	4.458185635	3.614081876	4.410685839	4.666116797	3.220823263	0.189569614	0.999992145	0.117125851	1.514473602	1.587937724	1.9925347
Zm00001d013395	0	0	0	0	0	0	0	0	0	0	0	0.020355339	0	0	0.021244371
Zm00001d013397	7.151855467	5.499653138	6.575562851	14.56242268	20.80247822	16.12327488	13.97087609	17.5843337	16.78542111	12.84950381	12.83787069	6.898504206	14.12802014	14.38687789	14.87771278
Zm00001d013398	1.234744531	1.353292887	0.87793631	4.812249425	4.05174884	6.123651436	8.844080377	9.476917326	8.265487434	0.008187097	0.26948985	0.019727797	11.02053583	11.05632675	10.96043503
Zm00001d013399	1.167686646	1.353569804	1.412676851	6.843265465	6.08631427	7.95045728	4.491790888	2.728709579	2.994859716	0.213774212	0.860038596	0.217492878	11.39007672	10.68226316	9.569505266
Zm00001d013400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013402	18.90310998	19.72455056	24.29608458	7.210801014	6.668591045	6.976120901	8.701678011	11.74249058	10.76202961	15.96622034	26.60022695	21.2336723	7.323200014	7.152395607	6.213406571
Zm00001d013403	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013404	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013405	5.320420031	5.706986546	4.506708368	7.425655384	6.535845418	7.594174727	7.80686047	6.305301662	7.288177642	10.29368199	10.22223878	14.39318799	6.956374221	6.722041554	6.421030826
Zm00001d013406	1.723152093	2.474329635	2.308195185	1.363010148	2.376521507	1.232157832	14.68995551	16.54098807	11.07214634	17.31986293	14.52579075	15.52316751	1.875741754	3.62360723	4.52702023
Zm00001d013407	0	0	0	0	0.031603257	0	0.168156178	0.08675998	0	0	0.151226882	0	0	0	0.249565454
Zm00001d013409	0	0	0	0	0	0	0	0.113999974	0	0	0	0	0	0	0
Zm00001d013410	0.042083834	0.045432638	0.052301912	0.074978759	0.60204621	0.257792271	0.569024535	0.318959294	0.126045379	0	0.060650359	0.039958767	2.045188708	2.194649635	3.683852417
Zm00001d013411	182.3464469	179.3395417	184.5076896	118.7541015	119.0176189	140.7057443	111.1312309	87.69075702	120.9283146	124.2284367	181.53127	198.2405939	79.71573391	77.4669591	63.94369107
Zm00001d013412	41.17486253	50.23171224	40.74858113	32.59930901	22.78050254	34.6661245	26.46045227	21.9833295	21.74897303	4.880421826	6.070922967	2.860223853	51.25992627	42.99849434	49.23706694
Zm00001d013415	28.00044167	25.61279339	24.24503075	8.58986887	5.156231885	8.046937392	7.31973953	4.51430271	7.483503254	7.455984832	10.15080121	13.24333392	9.955037155	9.191226039	6.503826976
Zm00001d013416	0.541106997	1.217011187	0.507798095	0.895202781	0.96762637	1.251449695	1.038751514	1.478003216	0.830763976	0.144686116	0.153181349	0.030582335	0.315115524	0.296590246	0.485154167
Zm00001d013417	2.040328093	1.743638095	1.810619747	2.841694981	2.811253336	2.969164333	2.134012309	2.093851339	2.137356652	0.247589405	0.239442564	0	0.84605616	0.828820249	1.069686271
Zm00001d013418	3.985701225	3.264758783	3.689101323	3.667263859	2.552422049	3.926911714	2.589193756	1.512329929	2.182745892	0.019220067	0.421770387	0.015437689	1.263183006	1.374943734	1.450074502
Zm00001d013419	2.800673003	3.233503176	2.208896029	2.80997547	3.217182483	2.232484454	3.073294305	2.835792391	3.044396798	3.355005887	3.984525497	2.993076905	2.19985712	2.67658121	2.252042823
Zm00001d013420	28.05178449	26.20601691	27.78952474	28.60300272	29.26278082	31.22228585	25.56565938	25.18986798	24.16070497	5.741481497	10.42484708	3.975514712	21.6296358	21.98508704	27.84322175
Zm00001d013421	8.523410078	8.204771385	8.008748433	5.692508188	5.679003319	5.592001279	5.687175227	5.477167429	5.753588915	4.755315255	6.010304145	5.583469924	4.334548187	4.150066813	3.778382798
Zm00001d013422	0	0.014067786	0.055524999	0.111439019	0.088303217	0.082103589	0.24797541	0.121208796	0.068874277	0	0	0.024745707	0.02499763	0.012244188	0.012913245
Zm00001d013423	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013424	17.43769449	16.62278051	18.35066081	16.81530157	19.5630748	18.16463958	17.3070646	17.93276462	20.63926687	11.46315264	13.34388625	8.970475306	15.412463	16.27020164	16.48841602
Zm00001d013425	7.125073053	9.815373614	7.111721478	19.64657198	7.290624264	18.71319975	5.086450527	2.402855802	4.640735319	0	0.056155911	0	37.15006135	32.39022581	25.42058537
Zm00001d013426	2.527038626	2.292080317	2.743136205	4.466189476	6.683229729	3.680946008	5.926743461	5.572649267	6.205302301	1.938294653	3.544538879	1.372224857	1.754166495	1.733244557	2.09355402
Zm00001d013427	1.914571052	2.258713175	1.878500952	3.730890566	3.377468399	3.310089916	3.048520652	2.502180609	2.856349444	2.881542444	3.407072166	2.241220624	3.363460954	3.24316021	2.746858276
Zm00001d013428	25.36675404	27.33557729	25.57732221	77.6534404	62.13811947	73.3864125	50.52858104	54.13972025	56.75979818	1.994968529	5.153421885	1.17246755	164.1254737	197.0598337	184.5574994
Zm00001d013429	1.949451513	2.486921348	2.874621623	3.963519547	1.841856929	2.795361805	1.560128505	1.496520152	1.306470191	0.051870386	0.126473101	0.097212845	3.366943548	4.012994879	4.13081746
Zm00001d013430	0.71309667	0.51609991	0.337299781	2.780856825	4.29836276	3.611918724	4.035682826	3.548412266	3.517783856	0.058715097	0.288561377	0.011790091	0.744382529	0.653379257	1.058232649
Zm00001d013431	12.07980706	14.45699015	12.28746348	16.98765781	14.48043263	17.79307438	15.02308223	13.94601074	14.24868011	9.021310929	9.402125963	8.453641486	18.63590523	19.87719987	20.76052126
Zm00001d013432	4.957393301	5.129927987	4.234646109	5.329266583	5.526211969	5.794047753	5.477242358	4.546258407	5.292921349	4.834092193	4.443506124	3.27431956	3.521218804	3.378045282	3.223589183
Zm00001d013433	0.048652078	0.081703296	0	0	0	0	0	0.078217776	0	0	0	0	0	0	0
Zm00001d013434	0.057082396	0.071895489	0.082765865	0.118651147	0.025071477	0.034966873	0.100051171	0.114713961	0.023466142	0	0.071982733	0	0.010646172	0.020858576	0
Zm00001d013435	2.343597369	1.936451249	1.433080731	1.482866761	1.342023429	0.932645034	1.709155512	1.435464325	1.471897774	0.76318867	1.029752331	0.614655093	1.340568685	1.346049008	1.433433782
Zm00001d013439	10.26530314	10.67396602	5.321571883	4.173662351	4.70692206	4.365542694	3.993709237	4.142581762	4.566669738	1.593082201	3.239027555	1.789430636	2.718117657	2.415349681	2.210891176
Zm00001d013440	15.71406198	14.73084273	13.1963503	9.79894821	17.54058588	19.77442694	14.50588642	18.21674657	16.83273757	2.848357085	6.256174174	1.467188799	8.942994596	8.120973088	6.670104601
Zm00001d013441	3.870935654	3.974932049	3.690174431	7.309649781	11.17315139	8.709325537	10.27029824	12.23974656	12.65374184	5.803435772	6.810952496	4.782433426	5.136888122	5.950822433	5.196647739
Zm00001d013442	3.811697995	4.360061931	3.699619223	5.311197158	5.026175191	5.370673705	6.380409329	5.922994223	6.832917389	2.932809884	3.826551622	2.777584103	5.408832381	5.352569589	5.388308093
Zm00001d013443	491.1095157	535.3738778	403.3244034	254.3308166	129.392622	226.9001908	242.1176905	174.055529	185.4331774	13.12919531	9.676638364	1.941344579	237.9414762	214.7685213	205.9870082
Zm00001d013444	4.716521836	4.263357197	4.704897025	3.925972924	4.965521627	4.125909145	5.269556144	5.084312595	5.588253673	2.579360221	3.20343583	2.36295174	2.261629576	2.04076755	2.371494577
Zm00001d013445	25.73576511	27.07377644	17.71139359	6.948122082	15.42076296	10.35464428	14.19738638	14.20317589	13.29604984	76.44226869	61.75420198	73.17322687	5.425772163	5.825917708	7.902906034
Zm00001d013446	33.01457553	38.06824445	44.77709921	84.06360356	54.73842997	81.96383811	42.23907564	39.32979254	40.35739547	4.595194528	9.236832667	3.500488425	63.70943443	67.0206616	87.46697936
Zm00001d013447	1.034925185	1.206937129	0.778076484	3.043534998	1.818221013	2.504543123	1.239169595	1.155448334	1.355136801	0.035242777	0.354464505	0.467069433	0.357442751	0.210096543	1.004481515
Zm00001d013448	0	0	0	0	0	0	0.021158724	0	0	0	0	0.040117543	0	0	0
Zm00001d013449	6.438986807	6.048691922	7.416201018	14.7595825	15.44313873	15.52337233	8.033347174	7.152142638	6.530879999	0.364678914	0.441585658	0.102915234	4.318461507	2.9926768	4.80040607
Zm00001d013450	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013451	4.648954546	6.109956995	7.102274293	6.852151607	8.425836025	6.933780508	7.579458928	7.245158018	7.999636179	3.44659197	4.981950114	2.585128104	5.140641715	5.217209214	4.20638547
Zm00001d013452	2.517564741	2.817471099	3.157897275	5.001318362	4.452113295	4.722032977	4.526507391	3.853251113	4.455419645	1.198585936	1.607022725	1.239006531	2.725653817	2.670126621	2.83855804
Zm00001d013453	9.882969102	9.183450513	9.0847964	13.46228833	12.25432403	14.90330941	12.43936283	10.69056082	11.43908971	1.949620812	4.01090727	1.229407111	7.34052863	7.449264318	7.089318883
Zm00001d013454	0.027730698	0	0	0	0	0	0	0	0	0	0	0	0	0	0.010686824
Zm00001d013455	139.2372067	131.7483872	166.6308227	350.9416499	207.0782043	339.2981849	138.6644631	117.3362293	122.7165382	18.61707612	21.32462529	5.866738902	667.3199834	685.0087357	629.1425177
Zm00001d013456	9.628134578	10.13943266	10.75146034	17.35204175	17.56498647	15.61787928	32.81912404	34.92530112	31.91871553	4.401533923	4.86107657	2.065593104	27.94869481	30.0327382	31.60125967
Zm00001d013457	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013458	0	0	0	0	0	0.024924304	0	0	0	11.50372478	0	0.270435223	0	0	0
Zm00001d013459	1.220035054	0.631888797	1.133654696	2.573878857	1.141829092	1.969664413	1.78534458	1.801047461	1.448393301	0.927805041	1.049633123	0.530495117	1.505612068	1.337445268	1.647811934
Zm00001d013460	1.329147742	0	0	0.94723166	1.000769796	0.697880506	0.887490942	1.602649633	0.234172542	0	1.436655382	0.210338507	0.424959715	0	0.219525168
Zm00001d013461	0.044750357	0.154998909	0.166847624	0	0.191636769	0	0.013072698	0.188855603	0.0275948	5.107174383	4.415775461	4.089724165	0.062596357	0.012264228	0
Zm00001d013463	0.988672518	1.32689156	1.027294769	3.395884459	3.085954048	3.782702634	1.278365731	0.371314201	1.359227936	0.122942348	0.194165635	0.017954206	0.244849344	0.31981501	0.243598763
Zm00001d013465	62.0155707	66.37280178	51.91285852	77.75167993	57.18775902	86.71555471	74.74488406	55.17620589	65.80772127	9.517801619	12.57647203	8.451172735	17.54689891	16.71061808	18.28020437
Zm00001d013466	5.431307812	6.388926522	5.420696898	5.584271641	4.980470998	5.533913258	4.996928997	4.568155882	5.26584731	2.645717531	3.516932374	2.166251045	4.168548834	4.440914267	4.471148118
Zm00001d013467	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013468	0.30816306	0.414596094	0.478732447	0.716246891	0.62753188	0.712181336	0.687441754	0.287125754	0.397325542	0	0.035327591	0	1.967180321	2.165113755	2.809742207
Zm00001d013469	0.391994274	0.410703667	0.047423788	0.060568987	0.178264501	0.131749073	0.251316897	0.234236536	0.179684792	0.210508744	0.139983676	0.092226577	0.081519803	0.095070329	0.144381942
Zm00001d013470	0.551348521	0.842417823	0.253368244	0.822887065	0.924975066	0.643487557	0.763947613	0.727769201	0.619276537	0.437680439	0.623081861	0.285910801	0.721491878	0.580187269	0.6525282
Zm00001d013471	0.345516158	0.458702062	0.301746512	2.375843345	2.282493408	1.601692964	0.982059648	0.686849843	0.691000942	0.148108732	0.535801802	0.16034001	1.139031368	1.039049863	1.354938125
Zm00001d013472	0	0	0.943924986	0	1.501154694	0.46525367	0.221872735	0	0	0	0.239442564	0	0.84991943	0	0
Zm00001d013473	0	0	0	0	0.135442529	0	0	0	0.126770098	0	0.129623042	0	0	0	0.415942423
Zm00001d013475	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013476	0	0	0	0	0	0	0	0	0	0.057193788	0	0	0	0	0
Zm00001d013477	5.561761078	5.480529863	4.947615843	4.30209955	4.68983769	4.789067127	5.336965843	5.672583803	5.015415518	5.301310918	6.451436658	5.625486756	3.12724305	2.789132162	3.334007512
Zm00001d013478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013480	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013481	0.270511478	0.235876297	0.400844857	1.154844079	0.795132167	0.650080471	0.717287199	1.129068235	1.25747447	0.789207536	2.191063459	0.9796588	1.094416801	0.741360453	0.805928013
Zm00001d013482	0.785703099	0.226193362	0.306891868	3.359639386	1.064858502	0.825080401	0.708244003	1.109786938	1.162787793	0.123841612	0.537861128	0.348146495	0.025120771	0.098436037	0.103814858
Zm00001d013483	0	0.108980821	0	0	0	0	0	0	0.026677884	0	0	0.023962615	0	0	0
Zm00001d013484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013485	20.29656415	22.4964891	19.72670578	24.58773075	25.27960469	26.15103768	24.83289314	21.7120722	20.87541928	4.339559667	7.510111915	2.122397819	18.45935911	16.03989621	17.27653898
Zm00001d013486	2.125158017	1.917873891	2.480386826	4.010177832	3.866721256	3.128859234	3.744304848	3.030383734	3.450483971	6.203405146	5.923727462	4.683742135	2.812385463	2.580872351	3.388485799
Zm00001d013487	16.62933717	14.60088075	14.20855506	23.63093721	34.97427077	21.45064291	25.41026696	25.25679422	25.04413708	4.741286993	9.577702545	5.668069245	39.81201542	38.03689373	43.90503352
Zm00001d013488	0.153825417	0.258324909	0.135415399	0.911260838	1.241461266	0.573223931	0.262128126	0.123652292	0.363609685	0.238669437	0.331380426	0.021300102	0.523579058	0.407519657	0.444607934
Zm00001d013489	0.061721146	0.129563354	0.140629908	0.769759363	0.637058877	0.844388151	1.189999141	1.57525833	1.370147241	0.72355091	0.181608807	0.022790628	1.139621087	0.890868359	1.236873179
Zm00001d013490	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013493	0.551528997	0.980933971	0.216018041	1.563279635	1.418205804	1.21216213	6.335253186	4.441517027	4.641769265	6.080585319	7.191004639	5.072809375	1.41015972	0.993018654	1.356440107
Zm00001d013494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013495	0.02763261	0.034803375	0	0	0.018205009	0.135414914	0	0.074966936	0.051118008	0	0	0.03826269	0	0	0
Zm00001d013496	7.780734418	8.314739867	7.738506642	6.311175046	6.606557107	6.396159974	6.647369262	5.724484863	6.518385587	2.69966868	4.346650177	3.288394108	4.132084175	3.778611683	3.719014604
Zm00001d013497	7.304727928	6.269116869	7.003721491	10.00671735	11.38308747	10.68093052	9.873929967	10.54149224	10.94725325	5.184253273	8.666028185	4.406985406	5.447210894	5.630100484	5.895483379
Zm00001d013498	9.800676785	15.45234814	10.41504764	10.29653117	11.22941693	10.31050472	13.6512243	16.65566268	16.31300666	64.54737421	78.51974686	108.7247938	14.44421515	13.19624569	17.46850139
Zm00001d013499	3.788541293	3.594702364	4.823761079	4.301346669	5.069784593	4.292595043	5.043128591	4.766511113	4.648908485	3.514380754	3.806549331	3.423315188	1.756229133	1.58632993	2.372944784
Zm00001d013500	0	0	0	0	0	0	0	0	0	0	0.272926616	0	0	0	0
Zm00001d013501	0.163447716	0.147045002	0.072547608	0.16016385	0.076916551	0.157335998	0.381977314	0.450470264	0.057593247	0.112710673	0.088334063	0	0.535645209	0.345555885	1.403761277
Zm00001d013502	0.039626765	0.049910057	0.04924826	0.395366258	2.55848974	1.796283736	3.426486766	3.774687831	1.319511365	0	0.49970622	0	0	0.086880503	0
Zm00001d013503	8.795191012	10.35098816	8.267720729	10.3180365	7.691783932	8.172634133	9.91338676	6.768208229	6.939537797	1.553349575	3.238969869	1.06000464	5.830458677	5.295098951	5.282719506
Zm00001d013504	4.713448296	6.752537142	5.191587426	10.16881047	7.358601442	6.73249429	7.413159629	7.326398322	6.308883768	1.386388639	4.225457005	1.385759577	16.17346681	17.14186387	19.03412336
Zm00001d013505	20.19188472	19.17030999	22.76704749	28.2612405	44.50746072	33.56083886	37.36082664	42.00133833	40.01988322	39.49429313	47.83364668	30.32646451	33.35960225	31.89612624	36.3553361
Zm00001d013506	5.464874446	6.119514716	7.27528153	31.68555727	23.37867125	34.11901305	25.98686249	21.85191637	25.48590743	0.948359561	2.304733716	0.811842603	17.23238363	16.35564273	18.8707379
Zm00001d013507	2.142262732	2.272519527	2.106894766	8.253152409	2.966396597	3.973577999	2.10195223	2.215008584	3.260488498	0.58639596	0.192470577	0.06038426	2.580257792	2.485863185	2.514561011
Zm00001d013508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013509	27.28289819	27.79794457	33.20394952	68.42355758	72.33014644	71.44836758	66.61402597	68.12832165	56.31160883	9.694450925	21.10850522	10.16223689	84.3919999	72.68150281	104.0979736
Zm00001d013510	0.355912675	0.052738039	0.104077487	0.039165781	0.248276733	0.012824757	0.232405744	0.189330738	0.064549858	0.02887425	0.092403562	0.034787992	0.046856201	0.034426233	0.21784427
Zm00001d013511	30.30491746	30.99678238	33.61702831	24.15875909	14.59315467	20.94923993	16.33567745	14.55953373	13.68456997	4.706502809	12.38867757	8.656412008	31.82707478	32.22869165	29.22138839
Zm00001d013512	16.97972521	17.51756456	11.89672856	9.185409442	9.093700113	9.623489793	9.277101842	8.258079034	10.31117198	12.84602603	8.88899376	11.07669327	7.616850201	7.721567444	6.754776718
Zm00001d013514	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013516	0.107285468	0.366771776	0.457147527	0.229374483	0.84818606	0.337986971	0.519361291	0.665289534	0.604858224	0.42275528	0.289908037	0.30560393	1.046201272	0.890476452	1.045451695
Zm00001d013517	8.609565998	8.04346336	8.965654283	35.07379238	41.76222748	38.13470223	44.69085008	45.20375089	41.36345987	8.089985468	10.49901788	6.524132796	27.18271728	25.38436346	37.08076326
Zm00001d013518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013519	0	0.005923278	0.005844737	0.041056481	0.012393434	0.023046621	0.0439624	0.011341174	0.034799635	0	0.011860932	0	0	0.005155448	0.032622935
Zm00001d013520	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013521	0.003857572	0.019434503	0	0.033676972	0.030497499	0.103973168	0.063106015	0.032559473	0.014272367	0	0.034051651	0	0.01295024	0.03805925	0.129336498
Zm00001d013522	4.980267033	4.286507937	3.925177803	4.166708183	8.522684715	5.484808666	7.479908991	9.6790101	8.383514334	26.83549684	18.46446232	22.20089017	5.413563057	4.873546082	7.622222829
Zm00001d013523	9.794316839	11.81169922	10.97545256	9.202002136	7.77553321	10.51945493	8.58349448	7.932193049	6.96561953	2.690338884	3.911133457	2.106650027	5.626212921	5.261068286	4.840824831
Zm00001d013524	2.006394986	2.486736453	2.002801025	4.305800123	3.353867865	3.791762935	3.460591142	3.146319186	3.691919321	0.01471888	0.201871951	0.02364461	4.854692015	4.153274612	4.145786772
Zm00001d013525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013526	4.213855012	4.915035025	5.554221898	9.431549671	9.656795134	7.743823433	7.512217628	8.377829221	7.347089387	2.404594573	3.693477317	1.619872756	7.450781031	7.389104265	8.513130424
Zm00001d013527	1.249554474	0.814044043	0.497249993	3.446882611	1.873570829	4.358846634	0.604181136	1.276594395	0.599717882	1.129085894	0.94698941	0.995532817	6.791701958	6.997479292	8.917011491
Zm00001d013528	20.14581477	22.23106418	23.61141938	21.23266461	28.70165489	20.3663156	18.97480633	21.55354154	20.18501344	1.958518035	4.674188636	2.01747216	9.624439746	8.293799388	11.01026932
Zm00001d013529	2.223234642	1.813842926	1.402140999	6.952496458	13.93887718	7.756636921	19.54203355	14.80394807	14.24132816	11.14817986	1.564977998	2.286359151	7.159127162	7.231536592	7.158651777
Zm00001d013530	0.82223173	1.471215073	1.078642681	5.477214479	2.31299635	4.373162424	8.029357187	6.664574512	5.673793896	0.143999125	0.246871569	0.043372905	16.83935833	15.51625644	17.32226468
Zm00001d013531	1.416708178	1.529442165	1.697807341	2.284293671	3.480101038	2.727467853	2.021981583	1.84244547	1.946873418	0.279124878	0.459389434	0.515648509	0.622812906	0.488099937	0.783855965
Zm00001d013532	0	0	0.022806241	1.956764463	1.075995445	3.675816247	11.80422515	5.089142459	8.045477013	48.75696227	11.22326755	62.84406393	0.215617144	0.090524819	0.891065915
Zm00001d013533	0	0	0	0	0	0	0	0.099754289	0	0	0	0	0	0	0.02391197
Zm00001d013534	18.7844054	18.80169593	18.95628753	30.23635515	16.85765794	23.01346682	14.84824385	13.31030091	13.92120504	2.002024291	4.931530201	1.080026566	66.60081799	71.24115159	67.44397622
Zm00001d013536	0.090872308	0.012717112	0.075290915	4.407355584	2.022234979	2.399801798	1.769738214	2.069680471	2.378390541	7.672852218	16.75602791	8.847266366	15.03867778	16.2708445	22.91492547
Zm00001d013537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013538	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013540	3.388184461	3.597087547	3.394635474	2.850461779	2.376442337	2.376915182	2.842004928	2.886646144	2.898001308	2.902882325	3.42923118	2.774354712	2.386816487	2.166460484	2.166420253
Zm00001d013541	0.337283732	0.311527413	0.558902953	0.056086085	0.237024425	0.027547915	0.236469626	0.081337481	0.166385753	0.031011325	0.765586092	0.124542537	0.503241768	0.073948454	0.519928029
Zm00001d013542	0	0	0	0.183994639	0.274145572	0.185380544	0.41550489	0.966987272	0.284583786	0	0.0047703	0.062857108	0.668835324	0.39395524	3.05269973
Zm00001d013543	22.82016237	23.72091517	21.83661152	22.08891879	20.13510029	23.87157191	20.12585665	15.9744644	17.16293007	7.811809639	10.24650231	10.52204393	7.843306798	8.202762899	7.852382197
Zm00001d013544	6.34506344	7.109367783	6.610432991	9.601740923	6.497633543	9.224882397	7.476784388	5.579175156	6.81866997	4.32817412	5.013661652	5.654816625	5.813065361	5.511473375	5.329694073
Zm00001d013546	11.57613663	11.83196153	9.713228092	9.133159505	9.057814765	11.10694567	10.09144891	8.073396032	8.2635124	5.992018692	7.110226635	5.406412646	10.16121895	9.578483378	11.24043274
Zm00001d013547	34.95275963	36.42515676	31.85790993	25.69757358	20.77081168	25.18116559	25.84409055	26.48678096	19.16738043	12.24450143	13.05268183	14.32873673	23.12120182	20.77097106	27.0660974
Zm00001d013548	7.785812464	7.744226655	6.476990088	5.1078291	4.321383325	4.585534443	4.404306221	4.525750677	4.096621837	1.459311507	4.016217971	2.361752356	2.297433346	2.637276558	2.397955316
Zm00001d013549	1.236982523	1.038656043	1.809560247	1.960528488	3.820092059	1.610189894	3.869493964	7.690646684	5.03746851	10.18270441	5.963270783	7.736333556	0.692111581	0.904015786	1.266252616
Zm00001d013550	0.784415061	0.235231827	0.185690161	0.279510982	22.49271132	5.033892172	10.78083259	12.2056595	9.397612817	5.048575895	5.935035347	2.358549818	0.376193846	0.040947778	0.086370558
Zm00001d013551	4.310007481	5.808809059	5.049430048	4.313898405	5.498205145	5.818473613	11.51599692	9.632448397	8.091648787	0.946530396	4.39651165	0.669028505	6.973435325	6.22948905	16.25015217
Zm00001d013552	0.302126716	0.126843239	0.125161324	0.34539939	1.094764749	0.678602039	0.264776303	0.425012057	0.434707039	0.069447092	0.190495741	0.111560755	0.112696499	0.690003992	0.669491119
Zm00001d013553	5.953601869	8.239184432	8.403977299	3.391700461	4.116069323	3.106693864	3.650164356	4.298350629	4.169782031	39.1289559	35.96272826	31.306512	5.839768989	6.244536125	7.902906034
Zm00001d013554	0.089514032	0.020498773	0.010113482	0.761168298	0.353843606	0.817517164	0.684635869	0.372861343	0.33118688	0	0.041047297	0.009014507	0.774033767	0.722582037	0.89378104
Zm00001d013555	1.578646465	2.55639994	1.92328743	6.692046201	5.973878408	5.640208319	5.988292121	4.866553834	4.833704886	0.332480916	0.912006488	0.198134566	4.490359311	2.66831373	2.679255971
Zm00001d013557	8.764971505	11.70756331	11.0249706	21.79643444	17.55957867	20.14444602	19.07373839	15.62100399	13.88409226	4.279382351	10.43421484	4.245124788	14.52694491	12.74830226	13.53688851
Zm00001d013559	0	0	0	0	0.098436373	0	0.130941286	0	0.115166824	0.077274121	0.023551728	0	0	0.081895556	0
Zm00001d013560	0	0.022806582	0	0.135498039	0	0	0.021158724	0	0.044663372	0.099893433	0	0	0	0	0.062804551
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Zm00001d013562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013566	0	0	0	0	0.025854117	0.006009735	0	0	0	0	0	0	0	0.032264557	0
Zm00001d013567	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013568	3904.68692	3720.273344	5015.665487	6691.590415	7364.354868	6254.8305	5053.581322	5567.905862	5220.084639	390.4196124	1093.276652	241.8140488	984.579209	702.5716583	1172.058694
Zm00001d013569	5.63792339	6.714662334	6.262579237	3.406390779	2.713625793	4.258860522	3.840105036	3.786479902	2.972189951	1.389943481	1.565585993	0.954613225	1.569082025	1.809314313	2.077045817
Zm00001d013570	0	0	0	0	0	0	0.027879297	0.201380059	0	0	0	0	0	0	0.165505886
Zm00001d013571	102.196938	101.8768215	88.07272221	71.19497643	89.01041201	56.04517291	75.79352973	108.440531	85.94166264	76.84255217	129.1238333	44.47697792	69.53179757	54.73802667	75.95507077
Zm00001d013572	0.627045129	0.358512043	0.353758248	0.637966526	7.637135831	2.350134714	4.825229869	7.21254512	9.417212723	5.291202022	5.217738133	3.64671372	0.461633969	0.511019371	1.335433729
Zm00001d013573	2.576531807	3.540165104	0.999449986	1.2658607	0.823020278	0.813064667	3.913880669	3.680981681	3.302755618	0.053840335	0.787658005	0.216224622	6.81488795	5.623292154	5.668789251
Zm00001d013574	0.231715829	0.314296709	0.1550646	1.444929651	1.456139625	1.026348384	1.895319638	1.332506605	1.450831705	1.179966758	2.045407662	1.579595569	1.296487267	1.250535526	0.86550731
Zm00001d013575	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013581	0	0	0	0	0	0	0.026361117	0	0	0.062227345	0.085345864	0.299888565	0	0	0
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Zm00001d013590	3.778630663	4.296343841	3.708992912	4.457512439	4.65087858	5.486221257	4.657740233	4.534727685	5.021942596	5.056035843	5.613326815	4.980275982	3.472270016	3.018169899	3.477758346
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Zm00001d013607	16.13075666	13.71205124	16.6619101	20.92783921	24.26306243	19.72827173	18.46378812	21.59869974	22.75527557	4.83212442	9.152460354	3.526490002	13.82374047	15.06319468	14.39477046
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Zm00001d013610	7.980041519	1.817990769	8.098107576	2.263069306	148.8656393	21.9279739	145.2192191	139.508216	154.4140097	163.6080787	130.4041039	104.9598668	0.046149471	0.045209311	1.430390232
Zm00001d013611	2.725311337	2.574404785	3.206568704	8.1211185	24.4747084	10.01663785	21.31283393	23.5818446	22.43923943	54.62371236	47.91668244	47.3014184	4.824542648	4.799721884	5.216951042
Zm00001d013612	1.211630776	0.695202125	1.129363721	2.333799719	5.694187969	2.960580225	4.923804987	5.267539709	6.541611679	6.034306039	8.344060503	2.430854476	2.892487987	2.309648221	5.12074069
Zm00001d013614	3.214659838	2.867953806	2.730045617	4.699654926	7.518520049	6.563996918	8.368268604	6.546383347	5.374191	0.566508643	1.948070916	0.385780881	6.575078858	4.199460741	6.02912753
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Zm00001d013620	7.85888582	7.960805523	7.306073111	5.574925929	7.736121643	6.431740647	7.741583973	7.937605022	8.008933416	9.124807791	7.941938719	8.508581271	5.192899897	4.832506323	5.140158189
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Zm00001d013626	18.91499488	18.68582544	20.700081	19.15224563	23.95935429	17.55217272	17.29467579	18.89777958	16.66554653	2.138931787	6.841333247	2.126435867	8.939435104	6.806972084	10.02748865
Zm00001d013627	3.955661031	4.748149373	3.773674356	8.458006306	12.31204558	10.21960637	15.64916967	15.18734073	15.10563648	17.24992742	24.09634863	18.93588209	11.32617953	10.35574574	12.57229114
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Zm00001d013630	10.81963749	11.82418521	8.692212236	9.308075577	4.406823222	5.420105421	2.824735117	2.221502324	2.633988828	0.987251515	2.264119554	0.545977378	13.17119776	10.53584567	7.109223626
Zm00001d013631	9.656812052	9.226944528	9.374746195	9.701754313	11.59687706	10.81667566	10.25178136	9.926327903	10.660396	10.70314541	9.739706985	9.21675445	10.65102009	10.63176638	9.940123355
Zm00001d013632	16.26789635	19.76947621	18.35134673	26.89842535	18.79262687	24.48863189	15.74840411	15.28107035	14.30327876	6.414135388	8.357241228	3.681445622	47.29431183	48.74190153	49.15372315
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Zm00001d013639	4.85153532	5.669014644	5.053629158	6.872530016	6.928406281	7.111939184	5.570712372	5.714590691	5.395335358	1.082947269	1.803555064	0.63684028	5.162279863	4.457638095	5.349659469
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Zm00001d013695	1.519025991	1.6740665	4.719624932	1.657655406	2.001539592	5.583044045	3.549963766	2.060549528	0.702517625	0.26187341	0.718327691	2.9447391	3.187197864	3.330419266	4.390503352
Zm00001d013697	2.700983441	2.656162238	3.323718347	4.214835184	5.99585291	4.336028368	2.487565851	2.687237341	2.748536109	0.091751268	0.268455312	0.081064768	0.967791468	0.714703113	0.876818772
Zm00001d013698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013699	0.662791129	0.981757577	0.458266074	1.990835815	1.851202033	1.360974206	3.741460617	3.917084251	3.396261375	0.411987938	0.341383457	0.113750835	12.9585872	15.4013414	13.58252952
Zm00001d013700	6.470794707	8.101621985	9.020316865	11.20713414	9.259931765	10.93868882	9.243866324	6.99197705	7.790841524	4.819647694	6.779722026	2.95655587	15.29854974	12.22946794	12.7645252
Zm00001d013701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013702	0.275132397	0.227037075	0.294771856	1.881316455	1.31259883	1.325052785	1.019906315	1.612977007	1.474263218	0.026169168	0.717829198	0.304779183	1.762358957	1.643253365	1.524641136
Zm00001d013703	0.049931461	0.006288886	0	0.006227235	0.059212822	0.08564202	0	0.006020598	0.104684876	0	0.018889552	0.022124722	0.005587491	0.021894648	0.057727582
Zm00001d013704	0	0	0	0.024710391	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013705	0.118815721	0.028059158	0.027687099	0.41676135	0.283759823	0.418500857	0.321058646	0.196988983	0.412123321	0	0.028093207	0.032904666	0.290846953	0.561702978	0.489370607
Zm00001d013706	9.244358175	9.905007339	12.62162553	24.53600638	14.75992482	23.43815062	9.478403256	7.200802922	7.58451409	0.257384151	0.738851339	0.293271976	13.72498463	13.15991384	16.87960375
Zm00001d013707	1.059695304	0.469341594	0.62231511	0.29046286	0.184128003	1.383872076	1.04775336	0.491442818	0.818606568	2.055728571	5.139652984	4.282735669	2.189230287	1.77442696	0.902035271
Zm00001d013708	0.429635877	0.499502747	0.19167534	0.412171714	0.420952324	0.418390891	0.476284421	0.332078893	0.380412445	0.243092802	0.625136105	0.427117678	0.727328312	0.458905475	0.382090542
Zm00001d013709	2.677145383	1.985601532	2.591794031	2.967266248	5.528465593	4.167005634	4.013049233	4.405484826	3.730317557	4.99334891	5.969250932	4.528644081	1.481699733	1.374402745	1.77958901
Zm00001d013711	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013712	4.696096575	4.199230314	4.44015922	5.16225387	4.704376869	4.684204473	5.293020389	4.71190377	5.277244016	1.815335474	3.505124998	1.303201162	2.889216501	3.253193004	3.076991099
Zm00001d013713	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.022857284
Zm00001d013716	2.077361589	2.201816775	1.439008809	3.289224581	4.906071029	4.158309307	5.32347182	7.975290507	6.981232438	4.27405237	3.950901708	1.856893724	2.121387606	1.630181697	2.99229877
Zm00001d013717	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013718	0	0	0.009402684	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013722	0	0	0	0	0	0	0	0.081044229	0	0	0	0.014891222	0	0	0
Zm00001d013723	0	0	0	0	0	0	0.009458163	0	0	0	0	0.008966473	0	0	0
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Zm00001d013725	3.807487357	3.312913413	3.218537573	12.36238565	8.942745779	20.14073193	19.27605028	10.28806439	13.33615406	1.018880391	0.737096348	0.197848097	13.51795844	10.48370103	21.66259754
Zm00001d013726	0	0	0	0	0.019773717	0	0	0	0	0	0	0	0	0	0
Zm00001d013727	0.06734598	0.02827417	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013728	0	0.015682122	0.03094836	0.263982594	0.311715182	0.457626561	0.145490318	0.210183558	0	0	0	0	0.529458006	0.76435852	0.647779183
Zm00001d013729	13.57725817	16.17061345	12.98074518	7.249810371	5.619379733	6.738030571	6.536348997	6.253818404	5.535516944	3.931444208	5.88581956	3.618786231	6.500005751	6.019283136	5.308269454
Zm00001d013730	4.4661637	4.179500545	6.200245422	13.91792754	24.15324211	13.85318909	11.75206209	11.67473448	10.28724063	0.532889532	3.281736483	0.541320048	7.948124348	6.64007532	11.78538107
Zm00001d013732	0.926605855	0.727023166	0.358691495	5.797057761	6.605080654	8.169854453	7.827670105	6.300702557	5.207997325	1.550290584	2.681756712	0.58894782	5.541474685	4.279588757	5.338852077
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Zm00001d013734	0	0	0	0	0.071483557	0	0	0	0	0	0	0	0	0.059471773	0
Zm00001d013735	0	0.012396666	0	0.073650842	0.142658329	0.325577083	0.115009625	0.189885054	0.242770669	0.013574432	0.099293676	0	0.264337793	0.064738171	0.147930567
Zm00001d013736	11.5747084	13.66989213	10.57307692	17.36965039	14.55853576	17.23640965	15.06896602	14.29785649	12.15480198	10.28279258	14.78309887	7.027048588	43.90412205	45.20452955	39.88863223
Zm00001d013737	17.02965567	16.47615017	18.10028476	24.31360355	30.11303724	23.10155912	26.62791875	30.32180732	31.37715627	39.00893923	46.72013631	51.24950028	11.25621275	10.59588155	13.21096934
Zm00001d013738	0.717987594	0.799705236	0.532726624	2.258654682	2.961713788	2.041536388	2.992738413	2.623031498	2.676257618	0.535755124	1.847972942	0.471870513	2.428341229	2.340691495	2.623461262
Zm00001d013739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013740	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013742	2.346321611	1.457899037	1.34784712	2.861203185	4.31453157	3.091754368	3.155974653	3.508120936	4.449814154	5.278217371	9.402367029	2.345009627	1.797083647	1.817631568	3.19492006
Zm00001d013743	1.039333573	0.453130782	0.223561181	3.365165109	3.186661719	2.767034987	6.375921764	8.314498096	9.09575451	118.3943467	118.0577861	136.8750159	14.0684032	11.10870111	8.180200983
Zm00001d013744	0	0	0	0	0	0	0	0	0	0.214395413	0.054453141	0.019133762	0.057985659	0	0
Zm00001d013745	46.50971158	46.50398653	42.20664585	39.94327405	43.13593457	43.78904461	45.37767508	46.96481319	47.7503611	111.7311752	91.43154875	121.1870657	55.60309764	60.35238325	55.93147798
Zm00001d013746	0.095187007	0.112395364	0.125692361	0.60840467	0.478174602	0.466468432	0.354532935	0.272587927	0.322827942	0.049229466	0.300084675	0.039541443	0.505957259	0.560866952	0.467708973
Zm00001d013747	3.41274506	3.443793942	2.655575629	4.786677324	5.20400294	5.843586101	6.176936953	6.141963927	6.806615209	2.974881932	5.389053965	1.245203962	5.473481131	4.9956289	4.683203576
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Zm00001d013751	22.95725478	8.301525056	18.42415325	29.07544523	171.9020567	49.57664967	119.3392368	158.6655183	131.5991414	57.42969397	99.18284455	37.79027325	8.71993543	7.522578044	11.97112049
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Zm00001d013756	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013758	28.42782868	23.8548818	34.76740739	32.97979759	60.65233225	31.54331825	35.93918365	45.58776243	35.13031353	3.241612804	14.55689932	2.141869719	15.84550105	14.20681215	20.63398074
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Zm00001d013768	9.014926229	9.628191363	9.633153929	8.763254942	8.37784937	8.491548502	7.363914156	6.786099021	7.211051905	5.507733599	5.815089902	3.926088355	8.271524842	8.115331417	6.792473058
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Zm00001d013778	5.782269335	5.954223171	5.487525655	6.110786816	7.540684045	5.587897811	4.371293136	4.25634921	4.525673201	0.663875559	1.412612247	0.730721734	2.034929894	2.117251979	2.961227995
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Zm00001d013810	22.78114282	25.91671583	31.4714971	10.78943649	12.33101349	19.05935726	18.49091099	20.2252634	13.2856362	87.21043492	71.26506929	88.60798756	49.06086642	52.85915444	78.04211775
Zm00001d013811	0	0	0	0	0	0	0	0.010837867	0	0	0	0	0	0	0
Zm00001d013812	95.87784838	96.92925647	116.0179261	88.0286861	95.95020978	72.36001467	60.53884838	67.85150356	67.77847945	12.19329673	32.20906035	11.49535392	35.92580783	34.81972053	36.20931978
Zm00001d013814	0.042325802	0.115503925	0.070136841	0.439890864	0.390393171	0.518548983	0.379175696	0.663458672	0.513294611	0.165393732	0.791717207	0.125030939	2.983927659	2.86900669	2.275449725
Zm00001d013815	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013816	1.667890538	1.079055435	1.41588748	2.046020386	1.957505721	2.110390649	2.289726629	1.604481233	1.944568785	0.050279695	0.67810134	0.131251228	2.050005666	1.99825156	1.506820751
Zm00001d013817	0.58820172	0.157148355	0.531650058	2.245198381	5.002544196	1.222883181	5.97754655	8.53234068	6.528742672	7.645201286	5.978883935	2.606332688	0.738000444	0.312633882	0.59761219
Zm00001d013818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013819	2.020609541	2.022732452	2.220905094	1.517351015	1.951949974	1.819676466	2.035807927	2.215758228	2.283107257	2.008180883	3.110196273	1.701396827	0.908371813	0.631655769	0.807957644
Zm00001d013820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013821	0.778565186	0.691677258	0.843772946	1.413141199	0.952597148	1.058885811	0.698560667	0.782310329	0.751574788	0.095872299	0.149022558	0.100106869	1.317231063	1.077023722	1.446633647
Zm00001d013822	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013823	0.05682817	0.010225041	0.010089459	0.202496079	0.096273579	0.169082688	0.113834943	0.215354345	0.120145532	0.055982439	0	0	0.499655722	0.338183904	0.854114548
Zm00001d013824	10.05169981	12.87793097	10.05686014	21.06112891	16.31271644	19.98315512	23.24837148	18.15229466	18.26782761	7.917144158	9.114161123	4.430942043	10.69350568	9.136188097	10.04855169
Zm00001d013825	47.14749026	56.6700269	41.91504877	47.72129124	40.25881534	53.12136845	40.75717894	42.86870411	34.93024342	27.15527811	15.56679755	23.13191076	105.4975941	85.64236379	95.19055876
Zm00001d013827	13.76540368	17.63758324	12.48826526	11.58554899	8.247835354	8.917487693	8.692952197	7.741254143	7.569428152	2.261363899	3.073557705	1.288621648	14.59189064	13.43840367	13.99339521
Zm00001d013828	7.319522723	8.505647335	6.953960218	7.014084046	6.267537323	6.139299089	7.334016648	6.150313536	6.719413464	4.315761675	5.130373964	5.015034737	7.280248502	6.49536542	6.299117552
Zm00001d013829	3.672158222	3.640895027	3.628633732	4.187353404	3.369841698	3.823047421	3.432249774	3.191051643	3.648049733	1.67437207	2.295777258	1.48932848	2.976551809	2.961297167	2.943621598
Zm00001d013830	10.60537368	7.6047166	11.00309813	6.203608723	20.39440599	6.285715492	16.60542262	25.08495078	26.9400237	71.87076773	78.57551551	72.95810123	1.242788366	0.754488575	4.114213096
Zm00001d013831	12.52706744	12.47776667	12.89656904	22.5941695	19.66265936	21.3948459	25.64860041	19.27694881	17.87076945	8.304730851	12.78060252	10.1281581	18.51298586	17.79100709	18.19966325
Zm00001d013832	0	0	0	0	0	0	0	0	0	0	0.203420231	0	0	0	0
Zm00001d013834	1.533884128	1.595082925	1.632588325	2.040526661	4.570834661	3.295859143	8.070142026	7.511876761	7.78994227	56.6080509	24.07431032	36.64101635	9.64741687	9.476748264	11.94075446
Zm00001d013835	0.069654272	0.039877188	0	0	0	0	0	0	0	0	0	0	0	0	0.007320895
Zm00001d013836	3.411560201	3.511867109	3.121682451	2.103997198	2.646917189	2.08790027	2.799977134	2.981581264	2.670080698	1.488656978	1.696015014	1.266645416	1.713046018	1.590815556	1.565772288
Zm00001d013838	3.805911275	3.63853229	3.928698776	5.882464748	8.268722972	5.901308232	6.923160793	8.249745913	8.28739198	1.001449962	1.922118601	0.419521308	3.894685741	3.479098698	4.259029488
Zm00001d013839	6.843464971	6.424988698	8.017401894	7.458225863	13.64999446	8.845695502	17.31371536	18.64194062	13.06634388	3.182167814	3.958637102	1.582247875	9.765779171	7.175122564	10.47066999
Zm00001d013840	6.167245524	6.834017757	6.781157103	12.51103577	14.80338682	13.15365177	15.73343941	14.91654698	14.90461393	7.097816892	8.811486341	6.01063318	8.900356274	8.918862796	8.01530292
Zm00001d013841	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013842	8.798409039	8.196504903	9.451827146	13.409544	18.0378588	12.96635013	13.86756332	14.90843962	14.439756	5.099989012	7.345032245	7.27959012	4.239971148	3.804133133	5.528348658
Zm00001d013844	0	0.009358136	0.009234049	0	0.088111254	0	0.112865696	0.197096042	0.073306187	0	0.037477966	0	0.049886575	0.016290094	0.051540692
Zm00001d013845	3.332514856	3.431574685	3.574969357	7.527886953	3.756171344	6.903693139	5.243071855	4.341898332	4.089973692	2.548921834	1.205057359	1.083660008	11.21290512	12.71270862	11.8557611
Zm00001d013847	0.035589814	0.059767337	0.026538675	1.571266958	1.003548747	1.70340011	2.836212808	2.076999594	1.980997287	0.412307458	0.825790112	0.583486758	1.935550636	2.114602375	1.772050433
Zm00001d013849	2.051254881	3.72702901	2.341584407	2.283462597	4.694914487	2.615452142	4.96689151	6.948271485	4.975206785	26.49847479	26.68610324	42.09622191	2.88627821	2.744195147	4.817720433
Zm00001d013850	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013851	0	0	0.100092193	0.150664241	0.159179879	0	0	0.121387307	0	0	0	0	0.022531001	0.044143996	0
Zm00001d013852	0.434993807	0.547876309	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013853	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013854	0	0	0	0	0	0	0	0.013380192	0.054741633	0	0	0	0	0.024329362	0
Zm00001d013855	0.007306913	0.009203084	0.009081053	0.054677188	0.096279296	0.071615744	0.264681959	0.185019947	0.189240451	0.020154875	0.009214252	0.016188533	0.130826721	0.056070661	0.143612403
Zm00001d013856	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013857	2.418416986	2.406204976	0.892077734	3.048280238	6.445992209	3.319160272	14.8264036	12.99133757	10.48215312	4.665492666	8.100044074	8.175677677	1.552922255	2.606765969	2.13638063
Zm00001d013858	0.060112209	0.054079679	0.010672519	1.874233499	7.298327471	3.13520187	5.077429331	6.150585024	5.221223955	4.322885177	2.263273679	1.874020971	2.315923674	3.784377169	5.649187856
Zm00001d013859	0.897976491	1.010466796	0.693392617	2.729957198	3.09889843	2.746618183	3.169270601	3.135325287	3.121463477	0.533575848	1.337797058	0.543609439	2.538365269	2.281292554	2.857946954
Zm00001d013860	0.901609569	0.658705357	0.778611166	1.729136575	2.526749324	1.671909783	2.530383617	2.611096832	2.418709814	0.518424825	1.679675987	0.63969057	1.011978186	1.185454078	1.410839571
Zm00001d013861	6.942624114	6.18890959	9.011321443	14.64798565	10.89629632	11.6415383	8.582598686	9.46536715	9.248422382	1.806385397	2.871511571	1.071580522	15.84458439	16.33824029	18.53743645
Zm00001d013862	8.661319794	4.907781963	8.557094085	18.51302983	46.82904096	21.7909213	61.42917184	68.79818298	62.61158534	5.620821412	5.89147093	4.375204081	12.64373597	11.28193652	15.0396554
Zm00001d013863	5.784078856	6.055810873	5.449075932	5.807994091	5.49652728	5.717587415	5.499581482	5.621241836	5.575334656	5.042545928	4.348231835	2.549215812	5.311110946	5.29523991	5.547356039
Zm00001d013864	0	0.015682122	0.03094836	0.124227103	0.065624249	0.030508437	0.058196127	0.030026223	0.092133459	0	0.125609214	0.055170756	0.013933105	0.081895556	0.028790186
Zm00001d013865	5.450475468	5.6663743	5.570245966	14.85920901	19.55705325	14.86588952	15.85640735	16.47081764	15.9854587	6.290138898	12.02814275	3.3619509	15.84672677	13.67213922	16.20942012
Zm00001d013867	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013868	0.053525223	0.089886954	0.022173768	0.022251445	0.035263667	0.071040365	0.03648413	0.053782696	0.027504768	1.304155211	0.838088033	3.221576143	0.079861924	0.039117486	0.324882923
Zm00001d013869	9.009795383	10.64684387	9.857170851	23.60125297	26.58533504	18.41125975	40.68908851	45.17479576	29.47356386	126.3709119	88.3926899	125.0470453	51.15087625	43.05393151	68.4918523
Zm00001d013870	1.87277177	2.358762974	3.258480775	2.802767653	5.182068259	3.212162327	8.096835165	7.000223054	5.312188067	11.36458851	20.30997745	25.10231609	15.08898057	13.54978797	9.310272863
Zm00001d013871	0	0.235876297	0.930994507	1.634947797	0.246765155	0	1.969500446	2.258136469	1.61675289	4.132577641	1.653137699	6.016257574	2.933968444	2.463597814	1.948661762
Zm00001d013872	0	0	0	0	0	0	0	0	0	0.332644331	0	0	0	0	0
Zm00001d013873	0.067387475	0.042437387	0	0.189096154	0.277477762	0.196077332	0.561038636	0.314859078	0.363595074	0.209111484	0.201822198	0.05598659	0.622122171	0.831065806	0.886216203
Zm00001d013874	0.395408067	0.52291882	0.601982529	1.750632049	0.586134154	1.974048111	1.097331533	1.132333797	0.975295618	0.245399811	0.037396669	0	6.028712662	6.491066618	5.497176866
Zm00001d013875	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013878	0.939603706	0.976333334	1.48887137	0.732395614	0.897597652	0.201450043	0.411722602	0.339884458	0.492486582	0.323967105	0.770165772	0.520425172	1.366880733	0.721018604	0.29873528
Zm00001d013879	4.174130245	3.955057469	13.46877838	1.337268226	24.16985205	5.207713353	39.10926469	39.71031023	32.5401441	356.7111949	179.2559589	200.6099093	5.356635065	1.763163141	54.6340955
Zm00001d013884	0	0	0	0	0.020705582	0.019251876	0	0.075790327	0.019379797	0	0	0	0	0	0
Zm00001d013885	2.812090109	3.505071415	3.41022294	15.99439424	15.55217632	15.81928708	15.84976705	14.34905095	13.95635014	6.092610684	10.20894472	6.219432698	25.56654434	29.86710517	33.83906242
Zm00001d013886	5.437245034	3.699618635	4.941851843	20.24585887	36.33652163	20.26166442	30.37957564	34.33464242	27.48730674	9.944605316	12.71809438	6.620254271	14.53799327	12.62324057	15.7696845
Zm00001d013887	2.858193049	2.930155006	3.151275952	4.132709561	3.12466863	4.639363499	6.106211806	4.075721589	5.08971156	0.585086537	0.345142434	0.134270141	7.055315734	8.452492656	9.111000779
Zm00001d013890	4.954288945	5.407532147	4.925141653	4.305472308	5.284416378	5.48387626	5.388326251	4.844800575	4.631136146	11.40753372	8.608883119	12.94246228	4.067660544	3.60332947	3.664193019
Zm00001d013891	1.341482263	1.674355261	1.295189996	1.889888427	2.322965294	2.088417104	2.871432899	2.74010128	2.778176436	3.223680011	4.890387409	3.958285242	0.74257631	0.738305937	1.124715276
Zm00001d013892	11.92098522	11.89445463	11.56117801	8.529381861	9.111343159	7.509250521	8.595331876	8.533001473	8.591677242	8.496102633	10.4012691	11.03386616	6.546607225	6.322592826	6.1661787
Zm00001d013893	0	0	0	0	0	0	0	0	0	0.152055528	0	0	0	0	0
Zm00001d013894	0	0	0	0	0	0	0	0	0	0.469193738	0	0	0	0	0
Zm00001d013895	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013896	2.955942469	2.124030914	2.084092174	3.095734241	4.256912688	3.110718927	2.092338311	3.735549248	2.6172798	1.881568614	3.572224192	1.122971489	1.473664875	1.526730662	1.96066553
Zm00001d013898	0	0	0	0.011344092	0.11985267	0	0	0.010967662	0.100960617	0.06272417	0.057351512	0.020152192	0	0	0.042064703
Zm00001d013899	0	0.034420729	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013907	8228.579454	7995.045744	9137.583117	265.8889036	1897.645243	353.1131466	3985.639474	5201.648396	5399.159372	15253.99112	26757.57319	16963.10236	6.098390964	4.841124913	9.179320411
Zm00001d013908	0.841486508	0.857452435	0.453907078	0.444565233	1.428326715	0.425977073	0.925236335	0.725750293	0.958510903	1.970514854	2.925508116	7.276031078	0.405432821	0.493263636	1.121506648
Zm00001d013909	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013911	0.953553582	1.056883753	0.988694645	5.354935779	8.766408362	6.482027622	9.136664416	9.644915767	10.99388283	4.711842646	5.180891946	3.953592665	7.127941272	7.550189234	7.861958335
Zm00001d013912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013914	123.5832404	122.6703153	147.4964164	116.0146473	124.6838383	104.5810035	83.63377999	90.20943727	93.27011582	56.72719857	80.99763962	44.37562257	57.7915905	53.39724373	63.79552768
Zm00001d013915	1.10409015	1.267905133	0.988767029	1.508595792	7.776765767	1.800233323	7.788207324	8.516285461	6.147446389	3.650055029	3.890230725	3.39939003	3.40674356	3.835717439	4.580306585
Zm00001d013916	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013919	0	0	0	0	0.009015944	0	0	0.033001794	0.00843865	0.084931917	0.008628561	0.007579766	0.007656932	0	0
Zm00001d013920	16.02197862	16.90900888	14.63942164	15.14469431	14.40297832	14.65117221	12.4072332	12.15078972	12.60500778	11.57173077	15.01578304	9.731814102	10.28126801	10.00437214	9.392202971
Zm00001d013921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013924	0	0	0	0	0	0	0	0	0	0.046440605	0	0	0	0	0
Zm00001d013926	0.752042376	0.501827897	0.278535242	0.403738085	0.485619442	0.012203375	0.081474578	0.330288449	0.472951756	0.219801944	0.584082844	0.182063495	0.139331054	0.054597037	0.028790186
Zm00001d013927	20.42168168	19.95239176	19.15466422	13.59607456	18.74538349	10.74355961	20.56751042	24.26637008	24.56315431	16.17500328	31.70321198	21.88141686	6.134951421	6.3073561	8.067018066
Zm00001d013929	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d013933	14.1898992	15.38244395	14.53387721	5.235878941	8.639430022	7.697167381	4.745567168	4.731741508	4.453468923	5.182731587	3.072817667	1.149107721	10.17348083	8.410679436	10.09218637
Zm00001d013934	21.21036292	20.24749818	21.66242596	36.27417096	318.1064399	82.88376217	207.0103295	249.6081963	236.0200227	114.0126831	90.4364632	29.241899	36.78936962	31.64281992	43.04716559
Zm00001d013935	9.708144213	10.18255375	9.799496523	7.658847022	6.22793967	7.29463419	6.635359803	6.237752065	6.655481537	6.153888589	5.329157537	4.860376766	8.277630322	7.860692398	7.588840831
Zm00001d013936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013937	304.5606058	334.3582641	403.5610967	616.171635	234.969929	435.1152921	210.3881229	182.2788101	185.0190922	5.39034564	16.55648256	4.629721087	299.1992044	312.3393204	294.4912324
Zm00001d013940	5.003776721	5.143942627	5.24834733	8.024160128	9.095958757	7.349015143	6.908393244	7.074440225	6.254374373	0.559123458	1.524227456	0.241178914	3.927551898	3.802274385	5.307662867
Zm00001d013941	0.467806234	0.355553947	0.441055215	2.504715222	2.051135264	2.055350728	0.73512524	0.593243758	0.815666481	0	0.13222315	0.017869466	0.956723465	1.600369612	0.960471176
Zm00001d013943	6.184605821	6.498111189	7.524430606	3.673905654	3.602771266	3.848312503	3.004790759	2.865145058	2.007193214	0.673388767	6.0749999	1.640640356	6.028357102	3.746721675	4.083168118
Zm00001d013944	0	0	0	0	0	0	0	0	0	0.02988096	0.109285988	0	0	0	0.100195322
Zm00001d013945	0.228998893	0.115369981	1.109941944	0.456955977	18.43629182	6.929707935	12.09485142	8.090331816	7.568833103	1.800215197	4.707031703	2.130866484	0	0.050207326	0.026475397
Zm00001d013947	0.017131872	0.086310625	0.021291541	0	0	0.020988887	0	0.206571381	0	0.259904437	0.216038403	0.01897791	0	0.056341679	0
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Zm00001d013951	0.762336464	0.661447411	1.579056669	2.640980466	3.102758401	2.86416386	2.157691732	1.246032428	2.674267836	0.02336417	0.534072633	0.112597565	2.104261489	2.358531116	1.527699308
Zm00001d013953	0.896097686	1.389093355	0.285557139	0	0.030275389	0	0	0	0	0	0	0	0.051423697	0	0
Zm00001d013954	0.476753681	0.340809014	0.51244184	2.265856696	3.310746451	2.73100835	2.363854289	2.889818754	2.923956485	0	0.877429489	0.071368391	1.47073711	1.836282065	2.279254709
Zm00001d013955	0	0	0	0.011504838	0.085085691	0.067810252	0	0.011123074	0.011376804	0	0	0	0	0	0
Zm00001d013956	36.96777145	44.10968169	58.05260831	0.338355399	1.196779066	0.115610921	5.968166004	16.76885518	10.27045611	83.56992816	219.4921844	175.4604263	0.013199784	0.142239649	0.968259411
Zm00001d013957	15.01253109	18.00594273	11.30639216	8.104285503	10.04428918	9.145169039	8.079899249	8.789668919	8.147663275	4.285723514	6.156344085	4.189850775	4.614736212	4.502458953	4.738854076
Zm00001d013958	1.936758139	1.626236028	1.67209569	1.231401158	8.02045508	2.080348555	7.575369108	10.19154338	7.861506753	10.16817039	9.878716053	7.872669839	2.731883883	2.337240664	3.449681206
Zm00001d013959	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013960	0	0	0	0.023213301	0	0	0.038061218	0	0	0.006417592	0.023471565	0	0	0	0
Zm00001d013962	12.3458025	11.34085078	12.55931507	12.35497062	12.37273974	12.37316407	11.33580828	9.964168496	10.97423982	5.689935857	6.928903243	4.68737975	6.434164754	6.084798787	6.050381406
Zm00001d013963	12.35543792	12.37222798	12.4020113	13.50645069	12.29695109	12.1423391	14.34786227	13.41387397	13.04138505	9.8596072	11.73641061	8.720343933	13.45485396	13.73098497	12.58957029
Zm00001d013964	9.064622491	9.534288856	8.38668901	8.110822503	10.23933394	9.499028263	10.2345183	10.59259476	12.21949454	11.46483126	10.79144976	12.3217481	8.006306244	7.843201255	8.398100914
Zm00001d013966	4.98880115	3.74588113	4.133397836	8.814239871	10.61869426	8.697794933	8.538597059	8.926637956	9.228863113	4.983864468	10.62620893	3.046587219	9.035985522	8.378633733	8.873438355
Zm00001d013967	0.551434764	0.776683324	0.390561416	2.255443898	1.070362144	1.770075985	1.29332206	1.153454933	1.116390593	0.07087278	0.044863028	0.019704981	2.231637515	1.956506967	1.885180708
Zm00001d013968	0	0	0	0	0	0	0	0	0	0.014155319	0	0	0	0	0
Zm00001d013969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013971	19.66863188	21.01071175	22.78625136	22.48325511	22.80510655	20.30723793	18.80285212	18.84744439	19.30649472	15.10996004	16.03396732	13.15651015	13.4093506	14.52097312	13.75842709
Zm00001d013973	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013974	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013975	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013976	0.984023126	0.752051437	0.807382378	4.313180642	4.028255783	5.038785034	4.208604842	3.404010541	2.969131093	0.685153071	0.957770254	0.423322782	3.217933944	2.309300152	3.11477219
Zm00001d013977	0.014196505	0.01788055	0.052930373	0.460336882	0.841768987	0.173926606	1.509564031	1.027065185	0.682820869	0.195793203	0.340142707	0.015726244	0.063545378	0	0.656523866
Zm00001d013979	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013980	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013981	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013982	3.327456205	3.453211793	2.52459062	10.60001446	9.261453938	11.06938997	22.28031042	16.45434263	16.81431427	4.417233883	5.201818757	2.899105039	16.4839433	17.10445045	14.73960414
Zm00001d013983	2.1751431	1.340860947	1.741898546	3.9640451	4.99543915	4.288153157	4.55528964	5.485563786	4.515004029	7.140561674	6.345429148	4.768144176	2.236930803	1.855519306	2.47934307
Zm00001d013984	50.78325769	56.03765825	47.96108613	12.94225576	9.998702278	13.3697326	10.59775299	9.551953511	11.39634691	10.39893845	13.10561776	9.898536899	12.73242061	12.6197765	11.54357061
Zm00001d013985	3.807959215	3.903447006	3.515212516	4.886379391	4.440382232	4.19874396	4.31585516	3.914745521	4.707128236	0.974467596	1.723708888	0.921682951	2.261160629	2.292310798	2.598250543
Zm00001d013986	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013988	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d013989	8.606892638	9.533739732	8.245275179	6.09886201	5.942278199	6.15073021	6.331458977	5.427165021	5.71518352	6.94823619	7.639199332	5.930992083	7.415940468	6.988961292	5.887212459
Zm00001d013990	0.107225364	0.427660686	0.02221	1.470995049	1.153828706	1.094714519	0.584699914	0.538705759	0.396715835	0.345056728	0.31550079	0.316745046	0.759927961	0.587721047	0.37190146
Zm00001d013991	0.133508144	0.089682134	0.199109177	0.133204452	0.070366626	0.141756978	0.072801991	0.021464058	0.021953676	0	0	0	0.189239873	0.029271263	0.113192665
Zm00001d013992	4.815077024	6.423763432	4.455235931	9.724083779	4.294125466	6.677693325	17.97407161	16.31739102	22.91932351	245.5292627	241.9745474	312.481293	11.95256181	12.87907665	16.75717501
Zm00001d013993	53.75889845	45.76378581	50.51765382	73.33700523	90.39038426	75.47559009	94.56761765	94.96892798	97.40575923	93.06448825	95.44923242	58.12091626	44.66849284	35.50369416	43.19128325
Zm00001d013994	0	0	0	0	0	0	0	0	0.017636426	0	0	0	0	0	0
Zm00001d013995	0.007043397	0	0	0.008784219	0	0	0	0	0	0	0	0	0	0	0.008143128
Zm00001d013996	4.449797735	4.905438318	3.669423847	3.490311133	3.693731714	3.142962359	4.518300863	3.700693523	3.859892129	6.227065558	6.228937765	6.897897409	2.547148508	1.994160973	2.254121271
Zm00001d013997	0.112820862	0.100304678	0.065983106	7.076648181	11.01818397	3.235997374	8.514743189	7.746065799	15.37081281	0.512559994	0.83688663	0.014703274	0.170809051	0.087302253	0.115090865
Zm00001d013999	103.9699733	94.21207582	99.8324584	48.18612773	56.19608506	37.8858724	40.67338882	48.72225862	38.17695545	9.702455658	22.03765653	4.462023407	37.71083586	37.79073764	42.20723561
Zm00001d014000	0.011674837	0	0	0	0	0.11442618	0.013642047	0	0	0	0	0	0.013064517	0	0.14847475
Zm00001d014001	0.926115846	0.255507292	1.501754204	0.341003398	5.334425842	1.264289329	2.370459676	2.594963019	4.579508439	4.768461362	3.403482943	4.181800927	0	0	0
Zm00001d014003	21.67300306	20.15651567	20.47910158	11.0754426	9.615207285	12.34266125	8.886463407	7.403894806	9.594024259	2.464891458	3.787439737	1.199391585	4.966738282	4.690769528	4.492674545
Zm00001d014005	18.0648586	15.02027774	17.57569365	23.14126358	35.56250547	22.68462085	26.72404574	32.04642308	25.95585922	12.33547745	21.39524083	10.58150562	18.30558176	15.6104444	19.13931906
Zm00001d014006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d014013	2.568443506	3.056509508	2.011902739	7.041889349	4.587873001	8.23606718	6.404025043	3.36230794	3.004018033	0.083152747	0.31932715	0.113541051	3.811987037	3.390638534	3.401647757
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Zm00001d014017	14.49520232	15.00222669	13.12409685	11.88878553	8.997356509	11.84415629	7.287746323	7.702895336	6.127805169	4.141949187	7.474882836	4.232699226	10.48393101	10.34543401	8.700755209
Zm00001d014018	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014019	40.84206509	38.95885887	40.37134192	37.39496867	39.52822186	38.24324221	39.79757414	39.83429153	37.6690564	22.1380233	29.2757744	24.01441166	23.92486082	26.07980065	22.65614765
Zm00001d014020	0	0	0	0	0.027799161	0	0	0	0	0	0	0	0	0	0
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Zm00001d014030	14.9089588	15.30575086	15.00491127	46.00037604	43.12947166	44.82977589	62.08492187	45.27442815	55.90999526	7.557472619	9.152026876	3.814138263	35.25591711	36.54826773	32.36614027
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Zm00001d014035	0.138794253	0.168984813	0.143744922	2.481073791	2.212869661	2.295566333	1.827240233	1.305363356	1.928535693	0.006380672	0.163355739	0	2.806028413	3.387898584	3.909999534
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Zm00001d014037	4.56519888	4.232160753	4.341407971	6.228746093	6.879589272	6.242753979	6.295771929	6.501111438	6.677143527	4.223287578	5.79231091	4.255786656	4.500436978	4.172497174	3.685495042
Zm00001d014038	4.249089017	5.701959674	4.866813235	1.535237755	0.728950542	1.309413084	1.353799741	1.08964653	1.000194584	0.878829408	0.913128421	1.062031208	2.751794223	2.829092383	2.595233973
Zm00001d014039	8.745500421	6.648793199	9.113271691	21.43151878	29.91696194	23.15957496	20.40565508	22.56939089	20.47091466	11.30524065	14.67322261	8.596567675	10.16089946	10.65688884	14.31226491
Zm00001d014040	6.215319439	7.571682393	5.952480456	6.858555923	6.384143214	6.979435197	6.656783071	5.507202351	6.234169947	3.438994915	3.992799336	3.275013289	5.076493933	4.438554255	4.438471832
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Zm00001d014181	1.304749978	1.122279218	0.81472855	2.222554734	4.386055336	2.44842993	3.949086787	3.77575556	4.364243568	1.518573179	2.552270455	0.958861574	1.082578939	1.011684624	0.94923173
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Zm00001d014194	5.375807237	3.794010276	3.542118509	8.322794792	8.945864245	6.813206292	8.908002298	7.711344675	7.715786794	2.045275714	2.542149523	0.25668428	4.27840798	3.429202889	5.465060444
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Zm00001d014338	29.02688921	27.84309047	30.31378581	20.11170946	18.39237098	19.45266922	19.10267035	15.13037705	16.47393765	16.69386709	18.19489051	16.38832288	13.57435789	13.78450037	14.97551631
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Zm00001d014344	3.627574749	3.190666861	2.994750321	8.593385881	10.07345968	8.403496946	13.66168525	11.60390023	12.60101294	6.337625235	6.599427764	6.302641468	16.99089207	14.37331111	12.25778193
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Zm00001d014352	0.239846209	0.050347865	0	0.132944794	0.228245743	0.081623451	0.155700165	0.208866619	0.624460111	0.220524976	0.016802987	0.236169552	0.223663008	0.219106531	0.138647474
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Zm00001d014359	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d014367	14.32456946	13.44507852	11.1808835	6.579370692	11.03293041	6.739214111	8.502948093	10.05090899	9.025258011	9.171107442	13.95382612	6.546894353	6.609343243	6.618762376	7.041204937
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Zm00001d014456	13.08879082	13.3829093	11.98393758	12.6463834	11.37857493	13.45877008	21.54712475	18.01578688	19.96812818	3.157356564	9.08408249	3.835379548	11.89484874	11.4308266	11.41946541
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Zm00001d014488	42.70734793	51.17646913	58.87942801	167.761493	73.6437006	128.4785549	32.80546873	33.9070784	29.95735871	13.59403574	16.66263697	11.18925737	357.0742978	369.3531608	372.2656831
Zm00001d014489	28.78599328	32.60704007	23.32643112	8.634705224	3.634843414	5.955799211	6.166350266	4.292301984	5.269924497	4.513236684	6.236874847	3.595103268	6.166329398	5.147573102	7.242376302
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Zm00001d014498	0	0	0	0	0	0	0	0.080608294	0	0	0	0	0	0	0
Zm00001d014499	0.978651171	1.28907041	0.960946585	0.535729382	3.898080386	0.828304076	4.425815482	5.972215681	6.569115626	32.63028543	29.68930777	36.17270615	0.881965573	0.847619002	1.014854054
Zm00001d014500	8.800559118	9.236947312	8.20178723	4.475422061	3.5201293	4.262663855	2.780753412	2.314229261	3.14052304	0.481774077	0.958604549	0.424341448	2.440927144	2.395552012	2.225847518
Zm00001d014503	2.497451393	2.120333212	2.092218035	6.552433353	7.044661001	4.600911804	5.66360931	5.576588709	4.905265147	3.138228572	3.989197352	2.828042499	3.063850287	2.534994367	4.149293019
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Zm00001d014517	0.19255259	0	0.189449733	0.920549078	0.613147692	1.72995731	1.115613613	0.541740721	0.425468421	0	0.010117291	0	0.861890126	0.518912157	0.510164122
Zm00001d014518	6.468110672	6.233390469	9.561046637	157.0571205	105.6296378	207.0528915	164.6725128	114.4454319	115.0618114	0.743382582	1.730165621	0.271404525	176.5639075	167.6490086	177.9995037
Zm00001d014519	379.0297557	385.9409176	378.8613031	219.856315	240.3981132	251.5983212	246.9207031	275.8626054	218.1584681	231.5705352	275.8815893	204.064654	261.5508403	233.666104	258.870318
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Zm00001d014525	23.17265522	23.0648715	18.32016631	13.97296211	17.49094674	13.4796339	16.74770453	17.23337174	17.12286963	29.05571962	28.76453636	38.07436691	12.21566993	11.30479085	12.86674226
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Zm00001d014581	11.22501025	11.57870113	10.56705634	32.10746277	18.3517786	26.82761424	27.59290018	17.15043244	20.48553559	8.51598724	9.428439648	4.217696819	41.78954497	41.43560594	37.79254055
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Zm00001d014595	16.78068819	20.0387555	16.32081368	15.07240189	12.07297119	14.62850661	11.86909796	11.56032336	14.39335579	6.647097612	9.515255053	9.805378414	9.08170163	8.351297744	8.963417307
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Zm00001d014600	178.1921058	174.6266794	282.7503894	466.0966896	316.7126249	456.9848438	476.8851893	456.6927045	464.6370287	26.93833329	26.21599242	10.38828858	243.4808444	261.5273658	273.0421378
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Zm00001d014608	1.23870698	0.887428198	0.981587829	0.517316044	1.182954821	0.633487541	1.799327021	2.171884291	1.338462507	33.46232794	39.31634952	33.8262086	1.882115846	1.688049167	2.35839008
Zm00001d014609	12.0234537	12.01239216	11.14835841	6.272740589	10.37948981	8.014613273	9.848028428	11.23733413	10.50038967	42.77627762	34.18436629	45.40580578	7.164154043	7.815524022	7.225921298
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Zm00001d014611	2.711172972	4.795156122	5.113922712	7.409989444	11.04647167	8.763259008	24.67000136	30.97489924	18.33067085	97.19149832	110.1314556	77.27677002	13.4265753	13.06873383	19.38490594
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Zm00001d014613	0	0.078895623	0	0	0.041268858	0	0	0	0	0.129586842	0.236974084	0	0	0.034334219	0
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Zm00001d014626	4.948862958	5.364927861	5.143689487	6.44386942	11.36879664	6.857003029	9.073404481	11.10681038	9.431083407	1.12536162	1.835055614	0.499265028	3.889741155	3.403615294	4.005092651
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Zm00001d014630	0.172215156	0	0.378667582	0.13217186	0.069821149	0.259676467	0	0.191679026	0	0	0	0.01467478	0	0.029044354	0.030631419
Zm00001d014632	2.659144509	2.392287392	2.816399624	2.739136203	3.526826551	3.546686236	3.214355566	3.206322996	3.096372795	0.463694086	1.035162741	0.309562389	2.052184891	1.589155664	1.8880146
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Zm00001d014641	2.423142549	2.20896121	2.541665648	4.312780959	6.312198977	4.714964214	4.576653196	6.112527703	4.448216765	6.393224997	5.056297545	2.629326688	5.672807657	5.006951721	5.294875394
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Zm00001d014654	3.957836431	4.917787867	3.797286588	3.646644963	4.002559034	4.169872294	3.537048098	3.401406082	3.737510607	10.1673304	7.701488361	11.13394746	2.981785943	2.574410631	2.854739966
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Zm00001d014667	144.74253	123.4026163	129.4643523	25.29936211	44.10188451	24.71716587	24.09150168	35.8762345	38.60436657	54.21542315	69.85213739	33.9645636	14.5559017	10.30651593	10.71623828
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Zm00001d014703	0.024186172	0.083772077	0.067631954	0.098032821	0.127475321	0.02963137	0.035326928	0.196850375	0.111855969	0	0.060999079	0.006698086	0.087961586	0.159082389	0.097868805
Zm00001d014704	1.094267164	1.700418007	1.942797789	2.109116649	1.348230411	1.793306247	1.394892208	2.210485564	0.560845671	0	0	0	14.82146399	14.30141579	17.0873644
Zm00001d014705	11.39622755	11.49711053	10.72123171	8.881948964	9.328105449	8.404861656	8.544680228	8.595739427	9.637016967	3.858674239	6.539566203	2.958435561	7.202573032	7.450844964	7.327035362
Zm00001d014707	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014708	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014710	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014711	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014712	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014714	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014715	50.70012412	45.7051191	60.49128013	139.4805582	124.508204	124.0673849	121.1229447	130.8159037	147.8491271	58.5918932	81.78255793	35.16089511	122.5297537	142.7436441	134.2664237
Zm00001d014716	163.9241178	181.1856426	172.0320942	47.04741391	31.79752612	44.8175032	90.36472604	92.84976627	107.4203758	163.5422299	173.5522693	224.5345205	206.0916851	228.6465711	189.5252195
Zm00001d014717	2.835891646	2.195578666	2.381217457	2.091656529	15.94460666	2.826805201	24.47891372	37.03780327	42.7715712	84.6437164	104.8427304	69.47269771	0.65402722	0.662988668	3.319808111
Zm00001d014718	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014719	2.249170833	2.619924973	2.398240095	3.961042297	3.207119554	3.603266088	3.081806017	2.917546393	2.644876163	0.685596276	1.38923356	0.677632512	3.711216877	3.42517027	3.504673409
Zm00001d014721	0	0	0	0	0	0.036831517	0	0	0	0	0	0	0.042052088	0.0411954	0.008689286
Zm00001d014722	0.471421859	0.733465241	0.413565511	1.706169806	4.835362382	2.751885807	5.821796562	5.606255106	5.483342434	1.759279376	0.699385987	0.276469275	4.540948842	5.451619367	6.90368803
Zm00001d014723	0.104078079	0.037869499	0.031618533	1.433587284	0.993489623	1.207093603	0.710773493	0.437836273	0.507723785	0.012759185	0.046665172	0.020496529	0.300225304	0.474124144	0.62303404
Zm00001d014724	0.022559792	0	0	0	0	0	0	0	0	0	0	0	0	0	0.234739783
Zm00001d014725	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.131715101
Zm00001d014726	51.47398974	46.95789196	52.30972405	20.96796468	32.0718042	21.68774876	30.33251043	36.10321166	33.12030066	12.73487445	25.73513797	17.44401344	19.37925557	18.86806491	21.63034271
Zm00001d014727	6.364880972	6.730596308	5.990398823	5.465646118	4.595193225	6.092070369	5.593517108	5.420184598	5.08592779	3.529576041	4.740544722	2.115217888	5.876067603	5.67641053	4.484190136
Zm00001d014728	0.066352825	0.028928641	0.044403415	0.636556651	0.453961285	0.609684668	0.304169007	0.267713734	0.412304538	0.045755742	0.119073173	0.014135125	0.211329603	0.134286086	0.460277522
Zm00001d014729	25.32630607	27.13292197	27.71707006	23.9735722	23.18146764	19.86210215	21.251374	22.11240221	21.47575091	11.59861137	12.32911528	7.097968532	15.82395448	13.85151649	15.72598474
Zm00001d014730	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014731	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014732	47.38928116	45.82181885	49.72085629	106.9179299	151.6701094	112.4433028	142.6225348	157.7176912	157.3505984	93.99078307	113.7448864	66.29709868	44.95084569	41.80427699	47.17966073
Zm00001d014733	2081.397496	2050.697298	2137.062034	1139.973403	1131.138984	1279.549246	1029.593903	1054.63196	1066.221035	535.3836811	744.5496697	485.722872	395.3196678	327.6964638	365.9687467
Zm00001d014734	1.704170433	2.527992783	1.160949291	9.178438637	11.85953792	10.53200276	13.68850294	11.23313427	10.29061828	1.027182127	1.17797782	0.433495427	5.127768751	5.161688586	5.210226139
Zm00001d014735	8.802640588	8.119628779	7.865912761	7.390965988	7.852950058	8.124323201	7.689892858	7.665277983	7.432941287	5.371674293	6.753397627	4.946872397	5.329130509	5.656123429	5.576999592
Zm00001d014736	0.19994492	0.031478921	0.186369102	1.92217028	2.371110888	2.000505727	0.691172104	0.44199478	0.328783386	0.080429128	0.178597013	0	0.559361965	0.420107732	0.549013582
Zm00001d014737	5.394799287	7.901448437	3.910080421	3.287489563	2.813497948	4.954131689	2.638552889	1.492367592	1.642929953	0.156363943	0.095313695	0.010466049	10.27656555	9.280062531	7.984829732
Zm00001d014738	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014739	0.024427458	0.003418497	0	0.00676997	0.007152613	0.00665044	0	0.006545323	0	0.187163842	0.006845291	0	0.012148938	0.014876798	0.003137942
Zm00001d014741	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014742	19.16724803	21.53135822	23.42878821	19.94738644	27.52739088	19.15886518	21.61190197	19.99794427	20.46410133	20.46240681	17.54607887	15.2161043	13.79496226	12.3604104	14.50503772
Zm00001d014743	0	0	0	1.871360109	1.391314107	2.655350217	1.818274124	1.541224037	1.439304402	0.076645876	0.280323001	0.430937429	1.305973759	2.193202932	2.120291863
Zm00001d014744	16.51940765	17.86968659	24.08655096	115.4686408	98.76201465	151.1154741	174.39197	126.4762106	153.3775689	0.182702379	0.985612413	0.176097355	71.08192444	72.34948598	70.59010448
Zm00001d014745	0.019228177	0.702320846	0.262865186	2.326113191	1.44414882	1.649000351	1.303151256	2.133002043	0.901119654	0.106075305	0.145484089	0	1.742872756	1.222558971	2.600956416
Zm00001d014748	4.242446755	1.073788757	2.913763989	1.075920149	10.41781298	2.735567238	10.7210487	12.53156773	3.517282006	2.253627738	3.404457296	3.32793932	0.908599836	0.445044891	1.10300396
Zm00001d014749	5.112189455	6.170537305	7.773342594	18.42674168	29.82747599	13.38032652	25.41039928	33.08553747	26.67576839	1.92287784	9.889724016	1.265606202	6.999194855	6.283453913	7.611864169
Zm00001d014750	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014751	5.359642721	6.296522803	6.04281216	11.12553927	6.055277306	8.897838453	6.098487714	5.3368939	5.703116979	0.999164773	2.645294275	0.70271805	8.498298	8.716338534	8.321699631
Zm00001d014752	5.790943851	9.655884339	5.111507147	10.25882665	9.147830772	8.828062425	6.709047046	7.577664691	8.156305709	17.8565522	18.89953867	11.18970484	21.83403128	20.63176701	18.24040165
Zm00001d014753	38.82586894	34.73954558	31.41556711	17.09541981	32.70987394	16.95805178	27.72278631	34.83247419	28.57501625	33.52646835	35.81572716	31.04837518	16.17147655	13.78968582	17.98708125
Zm00001d014755	2.267146292	1.80799182	1.798177099	5.654973012	9.021939712	6.643822414	5.418132198	6.140437594	6.336708975	18.94915991	13.49019403	12.36790422	15.43878645	11.7896842	16.08241378
Zm00001d014756	0.056687908	0.005949886	0.070451899	0.100156492	0.305003096	0.179413648	0.22631939	0.176577845	0.16895379	0.006515164	0.071485271	0.026165122	0.629069599	0.466074569	0.568004304
Zm00001d014757	0.869024172	1.868725395	1.949314856	0.105737488	3.323486672	1.038705869	5.721220674	6.363743659	4.731374515	26.80609301	32.47509374	31.36880881	0.592967044	0	0.367577025
Zm00001d014758	0	0	0	0	0.147137683	0	0	0	0	0	0	0	0	0.017487616	0
Zm00001d014759	3.886709696	2.694674446	4.40498327	6.955259703	9.566043685	8.143031377	8.058251084	7.1630162	7.6782208	1.131096417	1.888561065	0.608302913	3.726876751	3.260058296	3.850450827
Zm00001d014760	13.29013742	12.59524496	10.35985984	6.834507054	11.82914137	8.534137898	13.44389066	11.78454014	9.852103204	10.59838835	10.06165703	10.43112743	16.14606997	16.16616536	18.51633595
Zm00001d014761	4.945080612	5.018099745	5.323736924	4.647389163	4.968393136	5.713846791	4.86547891	5.347224147	6.178943589	11.11181251	12.64585114	18.04055347	4.475918554	4.66449007	4.564116399
Zm00001d014762	0.070160291	0.012623878	0.137021369	0.062500623	0	0.085955957	0.058558786	0	0.098888111	0	0.050556788	0	0.112159456	0.021974907	0.046351355
Zm00001d014763	12.11184496	10.67955542	12.59708576	7.480858725	8.697552149	7.945796969	9.027905262	10.32010807	9.506524955	5.413295055	8.804285994	4.701331455	4.481493509	4.176514116	3.933526788
Zm00001d014764	7.256054048	8.327813544	7.499518429	15.10258084	11.92167721	15.27117544	14.41587922	11.34708299	12.05036401	2.45688076	2.820131147	1.817664452	6.438032431	6.390930746	6.090068924
Zm00001d014765	0.248175517	0.326168329	0.536405675	0.094199834	1.848304122	0.198292803	0.479119024	0.520422927	0.785134141	1.383981334	2.313162572	0.334682266	0.229417873	0.165600958	0.199599837
Zm00001d014766	6.504267485	6.399150324	6.954879972	9.387286831	12.28952497	8.98098288	9.942447891	10.2694533	10.29182014	1.015523455	2.692761613	0.507531335	4.037498766	3.094240521	4.360550188
Zm00001d014768	0	0	0	0	0	0	0	0	0	0.71657522	0	0	0	0	0
Zm00001d014769	4.30490122	4.229436331	4.440255488	5.454106468	7.048620685	6.571687332	6.59867417	6.044082443	6.175935021	3.48690849	6.795005532	3.709046607	3.206086648	2.766233639	3.571966812
Zm00001d014770	21.73196146	22.86205562	19.9363586	10.6766243	9.527445594	9.152598175	10.00326293	9.357638237	8.868064472	4.81371985	9.04241617	3.83317695	5.763535566	4.484006335	5.099022035
Zm00001d014771	27.5161907	27.21738804	25.40149074	28.37298989	28.71269365	29.9263499	30.50223011	32.24930775	31.75534917	100.243405	88.72339147	144.5492705	25.83848982	26.86875544	24.92253461
Zm00001d014772	67.75124775	62.97658581	80.31357704	77.68497126	119.674861	86.37131477	91.52713154	111.3061444	107.4292439	100.4958245	101.5212253	72.29475425	127.6297469	107.6744338	136.8171874
Zm00001d014773	39.34474593	37.67301858	37.60744251	18.31232532	24.22902667	15.55276555	16.91534683	18.02579431	18.69244298	25.70304519	32.47960634	30.09862087	15.48398671	13.70878424	13.09624429
Zm00001d014774	2.684306204	3.774020759	4.422223909	5.021625377	3.824859906	5.047683657	2.698945055	2.747399371	2.579105801	0.731810624	4.054123406	1.452200104	5.448798539	5.200928717	5.593380983
Zm00001d014775	29.4017961	31.26677128	25.9109744	21.3150557	22.03454114	20.26654196	13.19087691	13.61163449	13.79236362	7.069286367	14.58611962	4.878835785	24.07902579	20.83663357	21.44515898
Zm00001d014778	14.44690677	18.95918474	12.38148413	54.4758974	53.65829545	84.13172223	193.850681	206.8148718	207.6462733	90.5636255	84.79323465	115.5698215	446.6145772	532.1673403	570.6346549
Zm00001d014779	3.256759913	3.410738329	4.344031744	6.17436344	7.419319536	6.445346659	5.854652285	6.401009005	6.429323603	0.180980576	1.233567972	0.198224771	2.923544847	2.314728574	4.441074595
Zm00001d014780	12.52387407	10.12684403	11.56110061	7.495910712	27.44525561	12.0347218	21.46135293	23.80606479	18.84144106	10.06648825	11.29661882	5.113303309	8.41469618	7.97236581	9.010027151
Zm00001d014781	12.85393189	13.35094028	14.37433594	71.56747034	46.40526033	48.88197803	62.04719278	69.46142322	61.63828551	2.356860686	2.810847486	0.493838234	109.7504656	113.4333562	100.7906857
Zm00001d014782	0	0	0	0	0.016549248	0	0	0	0	0	0	0	0	0	0
Zm00001d014783	14.9112726	15.172095	13.83182473	15.61891619	19.20124855	17.66443682	21.41078146	20.99787035	20.98291515	19.41787643	23.39765283	25.24630889	14.85036688	15.09664981	15.09343744
Zm00001d014785	41.55229272	40.24920038	39.77686258	25.80475482	44.01152948	23.01218581	30.12457762	38.81355539	34.60095343	14.54661224	23.20533315	8.596395298	10.65273277	8.880935815	11.25502507
Zm00001d014786	10.0236688	10.60458469	9.63394671	9.639219217	11.77105852	10.46908176	9.918406072	11.00565744	11.33414656	19.07531838	27.25266276	21.22109151	8.700052089	9.323783374	9.212907578
Zm00001d014787	8.844451332	9.892122396	10.67983699	8.716464401	11.14837129	9.186386248	8.21563043	7.207718145	7.974291896	0.644529249	1.319377391	1.104921056	3.239233747	2.829157183	3.999838156
Zm00001d014788	16.96335787	13.27678566	17.79684903	3.387785831	11.75281255	4.718764985	9.351817359	8.486628661	7.610190925	3.243129769	4.897921194	2.964201026	7.903343314	6.000088091	6.065456945
Zm00001d014789	39.10528078	32.11439825	31.86824916	5.618478148	18.82158424	7.772334159	15.00850798	18.36713183	15.27708378	44.50518655	41.26190939	51.32046033	6.697969114	6.288913539	7.227615417
Zm00001d014790	1117.388562	1108.104232	1626.044092	572.0700766	640.385717	763.1722879	1112.222617	1013.182165	1276.930356	144.3622148	196.3502134	191.6745773	274.0892844	174.5419349	216.3747301
Zm00001d014791	0.016878067	0	0.356593884	0.16839674	0.244632617	0.641016168	0.946657004	1.098959748	0.35386073	0.395719819	0.532094586	0.261754587	0.132209689	0.129516305	3.258729155
Zm00001d014792	16.33661819	14.49964798	21.45604423	68.31182139	109.1933253	52.52527838	74.44510682	97.09431483	101.6171449	17.21241546	56.54164771	20.79827159	22.41067554	18.6281451	20.65292777
Zm00001d014793	5.961666558	4.731314278	5.130655725	11.63504872	8.790131207	10.38770808	9.762677785	9.770057906	10.62538692	13.19075765	15.52072835	14.34431032	15.9824174	16.19089729	14.14074215
Zm00001d014794	0.309447547	0.179884768	0.374721237	0.781754742	0.930489387	1.302602267	1.437086319	1.301147932	1.546109596	1.652401456	1.821041993	2.46985994	0.754716615	1.069870612	1.064117353
Zm00001d014795	7.814464258	8.691675642	7.47142534	20.15297527	14.91839653	20.01701173	16.6992329	13.88780875	14.86855918	7.289955725	10.1628796	7.237853451	23.29468911	24.44758248	20.16278413
Zm00001d014796	62.49326227	55.86375294	68.32692095	51.05080106	73.97503054	54.84007591	60.89952461	67.52282898	68.54819147	39.00841805	72.30885371	52.63628888	22.39612253	20.02146787	24.77168207
Zm00001d014797	20.94771762	22.17794502	20.96164453	17.68710152	19.2964521	16.83469603	18.36698207	18.51073484	18.06089373	9.559884467	11.50975633	6.455216254	19.87053013	18.34601648	20.3578052
Zm00001d014802	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014804	6.101329098	2.493042319	5.563622209	9.936347059	40.39329175	10.35195453	26.93422171	35.38114312	32.81964019	23.84502124	28.76292923	18.34300231	2.437288413	2.146539039	5.003396659
Zm00001d014806	0	0.014604724	0	0	0	0	0.14904428	0.195743467	0	101.1830878	27.43170988	123.4799432	0.012975869	0	1.488078999
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Zm00001d014808	17.2139457	17.23327118	15.48068337	19.01858651	22.20312524	20.42169931	20.95038832	23.6039029	25.72474837	20.60882832	25.80252157	28.15042001	18.83093914	18.0863342	17.56493069
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Zm00001d014853	7.82365599	7.441236173	8.633154633	8.235885896	11.80996923	7.584046557	10.97975519	10.75862143	9.586567942	9.649919268	9.408185685	11.34711097	7.513889476	5.725079137	5.42013467
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Zm00001d014861	18.64469465	17.51032284	18.9312062	22.99320711	28.60576001	24.37267959	26.71933388	27.72502512	27.38748913	11.1980792	21.11956338	9.212185988	25.40698236	21.59278177	22.74592752
Zm00001d014862	15.29233846	15.48023641	15.39277354	11.75476601	12.62411052	11.61868686	12.79406941	12.24973799	14.17174754	7.039157248	9.378486332	6.286597302	10.38125589	10.70263535	9.944314473
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Zm00001d014864	5.49677473	5.361981105	4.786098523	6.078625708	4.562928837	6.339900368	8.757332491	7.367915654	7.621326767	4.825755242	5.497483226	3.7827603	10.50091916	12.29228141	10.12907675
Zm00001d014865	4.053512208	4.277508714	3.590179472	25.46379231	19.44220091	29.40104932	14.37802701	12.29898647	13.13420551	0.445328379	1.039772516	0.274655427	15.70504854	15.79596367	19.63227184
Zm00001d014866	0.530226054	0.568550887	0.543202115	2.850631129	1.812715102	3.722029363	1.599158206	1.114511066	1.988257429	0.039528062	0.108426821	0.007937302	2.229033978	2.175769191	2.352647079
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Zm00001d014872	0.020328972	0	0.025264907	0.006338353	0.060269408	0.049811545	0.10689482	0.226737048	0.144159751	0.084111013	0.089724202	0.045039026	0.079620705	0.044570667	0.076384965
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Zm00001d014876	27.37516632	27.38932267	27.90188979	9.24689314	11.620036	9.06159696	12.38708954	12.18094765	13.23508928	15.51999244	14.35761982	21.88164419	5.999036667	6.536375962	6.41154204
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Zm00001d014880	4.701532669	3.785424584	2.088474394	1.948035374	2.325163668	2.482767591	1.97454085	1.905949575	1.980186509	0.881471271	1.30527595	0.694189025	1.569976599	1.373940354	1.777027446
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Zm00001d014883	120.9108736	123.4875224	142.359527	131.0542644	191.6148465	146.6787903	154.9590693	165.1040711	168.7705063	58.75881473	77.49438142	24.88217417	113.0040805	107.1843218	115.9716388
Zm00001d014884	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d014895	12.69747866	14.09654784	13.71443928	14.30791916	17.1414992	12.906719	14.32879065	15.18498995	16.82764381	8.707637995	11.60598165	6.525623929	10.43697455	10.25348858	10.61822052
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Zm00001d014933	0	0	0	0	0	0	0	0	0	11.22992236	0.997526756	36.10837497	0	0	0
Zm00001d014937	78.31495638	68.92535865	73.87026748	64.37908974	67.34490542	71.85762724	69.38495991	66.57706579	66.47270215	98.44634175	87.71028804	79.39915992	40.18067376	37.61794693	42.10341318
Zm00001d014938	0.321332421	0.588682725	0.348526149	0.466329433	0.331023856	0.808825612	0.259420429	0.408587599	0.35306014	0	0	0	1.36640893	0.608441981	1.526544243
Zm00001d014940	0	0.047435178	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014943	9.293988599	8.592061787	9.544039456	7.837458838	8.905375636	9.522164887	8.33610312	7.410591538	9.117496736	6.576588418	6.618832079	5.80556171	2.85714459	2.909423076	2.360133545
Zm00001d014944	1.349015797	0.307888862	1.282737796	4.29077123	27.06850332	7.276444159	21.3914704	26.61520397	20.09851748	20.37826034	14.49975365	15.25469576	2.411294596	2.391946818	3.862479903
Zm00001d014945	4.441658531	0.075192007	3.917494791	2.174082798	84.29540805	15.0230207	64.31790247	63.51891366	51.3911583	14.96863835	10.78056161	6.361959109	0.106889431	0.013088984	0.938685782
Zm00001d014946	4.240825907	3.688545184	3.64815958	4.328120048	10.49201699	5.103163671	6.745227976	8.7962723	8.858770744	0.548620414	1.931556734	0.359615535	0.5628229	0.746838167	1.099534753
Zm00001d014947	0.390763933	0.145571	0.08892047	0.981551648	2.762994872	2.346496773	0.109328594	1.035251937	0.400468984	2.406199154	1.311728827	0.938902322	31.0035827	52.97900648	62.23697578
Zm00001d014948	5.295289347	5.495415866	5.192500312	10.02563181	10.47033622	9.492254769	10.86103518	10.18716556	9.726539958	5.160476395	5.518757424	2.665643905	8.403845508	8.174665472	9.095220678
Zm00001d014949	124.403761	247.2835373	80.87216134	17.83024302	5.857446748	10.3450522	7.178235557	8.915580311	4.077357195	0.030808636	0	0	16.54843126	13.1747468	10.04650473
Zm00001d014950	13.2539343	14.08111646	11.54125685	7.029796696	7.369677897	7.294838415	7.205051744	6.661348269	6.867069775	5.291393831	6.487529906	3.767119541	6.683967747	6.725322733	5.667049703
Zm00001d014951	6.39579174	7.166876804	4.839829857	14.65034705	7.77541788	14.52639208	14.56151357	14.42937096	12.43060677	62.83276852	32.83893776	71.53990448	45.31118721	43.3333976	44.28169869
Zm00001d014952	1.46968408	1.957609086	1.681982342	1.674687993	1.044887258	1.165832863	1.791455033	0.968920428	1.082300935	1.881113865	0.973325688	0.948719392	1.620960027	1.970433673	2.99491412
Zm00001d014953	35.95855704	30.5509197	38.39817425	18.12995593	65.75333565	21.55659499	38.0687381	45.72357298	41.64300593	53.31945911	74.42726011	56.2461067	7.946182375	7.516405893	10.14704074
Zm00001d014954	70.67814694	79.80808434	47.41873424	34.25793811	57.87120454	34.00141555	47.54613516	47.65333259	42.59424018	43.72242076	42.07881447	38.18901561	29.6160833	26.64912609	30.9815831
Zm00001d014957	232.3048716	240.9627761	161.3858135	112.4395084	130.3880562	114.5340654	143.7449209	134.4437832	129.8806196	61.24742205	125.6400161	74.37469153	69.12204446	57.19174912	71.96126737
Zm00001d014958	28.16776543	27.99777359	36.59010007	62.7857962	58.1904296	78.99787519	50.75469849	49.04216042	49.09879085	40.48109272	34.11773725	30.30861953	33.97000809	32.22573997	32.4931819
Zm00001d014960	6.686553662	6.048096059	6.8809485	7.462769062	7.169065876	7.657118819	5.971901663	5.096810982	4.9504513	2.936898051	7.250410337	2.653803595	8.6143703	7.855276284	7.952145324
Zm00001d014961	7.922967896	7.291782101	7.903647049	14.37462732	20.68573098	16.87154626	16.68910309	16.83874696	16.96190447	1.613122189	4.350731087	0.976636233	10.36565537	9.329755778	10.15893768
Zm00001d014962	2.744299162	2.063744164	2.392433403	6.011438574	5.006792421	5.886827324	5.826117005	6.175588145	5.894949363	2.058787128	3.619103925	1.308429243	6.906845252	6.479624543	7.077749669
Zm00001d014963	0	0	0	0	0	0	0.02032422	0	0	0	0	0	0	0	0.160873405
Zm00001d014964	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014965	0	0	0	0	0.00924736	0	0	0.11847102	0.424107149	1.897103468	2.478009283	1.181696418	0	0.769347366	1.111599719
Zm00001d014966	4.883620185	3.564436405	4.53625097	6.696988172	9.198158063	7.28996197	6.308534336	7.752216059	6.013908839	0.390308139	1.50071008	0.426035957	2.541638041	1.909157541	2.542017546
Zm00001d014967	0.17134714	0.244375757	0.200424216	0.82336089	0.703886746	0.838151207	0.661017583	0.721600609	0.619971318	0.344048228	0.443269949	0.152127602	1.057405982	1.165692782	1.428946792
Zm00001d014968	3.213425187	3.374751409	1.785398384	3.170754027	3.418460811	3.861621547	4.191116918	3.772094815	3.898936392	2.105125479	2.139340264	0.984148646	2.506571925	3.004629895	2.223631356
Zm00001d014969	44.51559526	33.11723697	50.55394486	73.85117	127.895773	71.11715439	85.02959522	105.5383052	90.32892319	4.747829341	21.98020361	3.462823238	27.49753804	25.93967654	40.1206865
Zm00001d014970	0	0.195226414	0	0	0	0	0.0905603	0.261657083	0.095580629	0	0	0	0.017345294	0.16991935	0.107522531
Zm00001d014971	0	0	0	0	0	0	0.00459311	0	0	0	0	0	0	0	0
Zm00001d014972	41.9363801	46.12457856	36.82384168	49.80529664	43.27092676	39.58017347	46.26932337	43.37339235	39.42646442	31.81313853	40.37930259	24.93351064	37.53379933	32.08219472	34.10569714
Zm00001d014973	0.320909214	0.236827935	0.289772681	0.891123862	1.02077418	0.73102759	1.104440405	1.02781858	1.004884921	0.207462521	0.218146095	0.083317656	1.096961847	0.862989625	1.249276545
Zm00001d014974	3.983527176	4.504310074	3.540093075	2.578714219	3.31190766	2.911095414	2.618825729	3.042334364	2.356833322	1.176560808	2.017851239	0.979725844	2.076482162	1.590358856	2.042245769
Zm00001d014975	0	0	0	0.109295961	0.230946876	0.13420779	0.153604201	0.079251905	0.081059726	0	0	0.024269828	0	0.024017447	0.025329827
Zm00001d014976	0	0	0.010828967	0.010866902	0.045924427	0	0.061089243	0.010506307	0	0	0	0	0	0	0
Zm00001d014977	49.96656024	49.30886781	47.65062752	21.24495212	18.48590348	20.89065251	19.13131554	18.24502473	21.5592294	15.51570681	19.11543852	15.41144913	14.84635714	14.0804518	11.59524738
Zm00001d014978	0	0	0	0	0	0	0	0	0	0.051282553	0	0	0	0	0
Zm00001d014983	1.248308488	1.515420877	1.252336121	2.879209106	3.7652725	3.178465669	6.625427425	6.301790636	6.324977163	138.0409933	64.55940487	243.1513143	3.256621975	2.835802544	7.998540761
Zm00001d014984	2.437506823	1.156830006	3.051292398	4.747172623	12.7190859	7.703735194	9.009065023	10.77662079	10.29270008	45.61469389	23.57673987	37.31307285	7.095838964	5.14085067	3.634928357
Zm00001d014985	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014986	3.951486216	4.29292817	4.132927082	6.750616157	5.737476991	7.316102207	5.450319929	4.055023367	4.956082738	2.658149391	3.404144862	2.163481788	3.655034129	3.602221503	2.760252317
Zm00001d014987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014988	3.576071533	3.121468401	3.163776162	7.248421976	7.640359754	6.36136989	4.131423349	3.646056111	4.343842969	0.083593088	0.152865794	0.141745359	1.544927437	1.749700565	1.736303493
Zm00001d014989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014990	0.273206114	0.289047453	0.135816545	0.068146163	0.18719435	0.107108759	0.855566807	0.184477656	0.188685789	0.015071851	0.082685202	0.07263488	5.038371299	8.134369359	8.806275789
Zm00001d014991	12.71984686	13.48684072	14.06547446	32.12897182	22.36878282	33.67431532	17.45709801	16.31112783	20.85705824	14.63150048	18.00219277	16.84049832	52.75476704	62.55490657	59.59117693
Zm00001d014992	17.39391734	9.134946373	16.99064976	32.25924162	24.61047978	26.42116619	25.72473743	32.81400939	26.5967236	13.10104719	21.36771948	7.96323813	20.03894544	18.57529619	23.00376404
Zm00001d014993	17.79870669	7.595798493	22.36358793	77.5260509	233.9078465	77.63629148	140.1896789	186.5477616	179.5695408	67.27459141	162.2700539	92.06501398	22.42448521	19.25522834	17.61650176
Zm00001d014994	2.228026139	3.084764496	2.371972075	5.005741908	3.162408571	5.870726363	3.263882204	2.202528675	2.626548819	0.090376923	0.774709313	0.03629568	6.040589743	4.94773791	5.738958726
Zm00001d014995	34.11874785	35.87285357	36.44435377	33.50831998	27.44298425	29.7180782	30.7432409	27.0733313	26.85666336	7.790733933	14.42641446	3.891262382	31.7790187	31.83412478	30.25331216
Zm00001d014996	0.210003593	0.068770079	0.067858202	1.220488351	0.603228983	1.02398688	0.2453892	0.131672597	0.233093405	0.005792592	0.047667828	0.074442384	1.358304417	1.666744389	0.767225286
Zm00001d014997	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d014998	23.9147835	23.35794002	20.08363534	14.03730368	16.02388376	13.91603821	15.0906995	13.72539415	15.57874603	5.276350484	10.28873892	5.503678387	9.109761006	8.424502436	8.101400896
Zm00001d015000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015003	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015004	30.15737573	32.33351387	31.61836147	64.57713351	39.47648227	60.13956897	46.35684172	43.12143383	48.74398027	47.14288948	49.32199668	67.85335355	85.67556275	95.92148856	93.69297148
Zm00001d015005	0.119541791	0.041062726	0	0.013553394	0.057277763	0.039942286	0.063492993	0	0.040207686	0	0	0.012038452	0.024322019	0.011913264	0.037692716
Zm00001d015006	13.87791714	14.48020445	9.413087534	12.0237261	13.99123455	10.30796982	12.51320299	13.82093315	9.877287172	8.218948508	11.0172237	6.200845439	9.550149794	8.510663533	8.920949678
Zm00001d015007	0.185394334	0.144934045	0.282051937	1.028511534	1.827919955	0.994687763	3.055276274	5.46139571	5.073501144	2.913976924	3.732549591	7.74746015	0.575886488	0.669276446	0.635632377
Zm00001d015008	0.003799676	0.05742847	0	0.090037028	0.095125978	0.051206352	0.039959292	0.096212429	0.070290813	0.057644175	0.14853691	0.088391279	3.767235985	4.244479585	3.189277255
Zm00001d015009	9.543494896	11.4452499	9.465859026	5.198531026	5.625989255	6.47351472	5.866130778	6.334508342	4.727922769	12.51863688	9.336128445	9.549493055	4.289949409	3.357596278	4.197685995
Zm00001d015010	0.010773234	0.013568928	0.120501062	0.161230921	0.141953163	0.013198686	0.327301624	0.103920544	0.119577468	0	0.027170787	0.059670498	0	0.035429992	0
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Zm00001d015013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015026	12.71734025	14.17315032	12.89696363	10.63253985	12.0681545	10.61828328	9.38287643	9.268822407	10.22010922	5.914955899	6.874331393	4.639486156	6.646467237	6.617268044	7.16409525
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Zm00001d015029	15.59519648	17.15683541	12.87518791	12.78955008	16.19378244	14.8981906	24.50627896	21.56280968	23.99397138	24.06825707	25.21825928	24.12716451	17.92076395	19.13075749	16.71124199
Zm00001d015030	59.6891535	56.09822976	58.31925727	35.60299869	15.50546388	24.40531592	10.47468745	8.74583419	10.06474134	1.362603358	4.325159915	1.085554317	55.60330712	52.78871079	47.3245701
Zm00001d015031	12.65237502	12.27259901	12.29404738	6.468899144	2.807037233	5.764606453	2.446011619	3.082448075	2.26176406	0.970847762	0.724167753	0.328333279	10.65508749	9.605416543	7.603066781
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Zm00001d015037	20.65729463	21.54610576	17.5413671	8.43979998	10.01250358	7.62725585	5.062853487	6.451276314	6.8615647	6.345321606	12.61083331	5.387493864	14.40475692	14.52510588	14.83810929
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Zm00001d015181	0.591612313	0.592519291	0.735257523	3.129123983	3.738016069	3.344586865	3.481481671	3.614019089	4.237082317	0.078643944	0.651663286	0.094751027	3.960234592	3.391193341	4.000897685
Zm00001d015182	2.235840641	1.525360179	3.429969329	4.284327186	6.812736125	3.894815224	6.858021995	9.576114332	5.227592819	11.94892232	13.62742277	16.60205062	12.87475907	11.20825087	14.19022651
Zm00001d015183	3.785880163	3.075227367	2.909435677	3.307390814	12.54945242	3.971616951	7.100521172	9.912690439	6.749808135	25.13564333	25.31780782	9.476629089	14.82782514	19.30250859	19.99778831
Zm00001d015184	4.962424532	5.306474943	5.236112189	6.34211171	5.567624957	6.12479495	4.592945034	4.176639475	3.893197403	0.745386309	1.827766416	0.870835437	4.934572649	3.245138989	3.933701656
Zm00001d015186	21.05215229	18.30900228	16.08121714	11.47793217	36.34293197	14.14581875	31.11105662	35.1152424	29.98083451	48.15128244	55.25984385	50.35133631	16.87328466	15.11029904	15.05741541
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Zm00001d015193	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015194	2.465875844	2.952136936	3.54107232	6.965684447	12.16997305	6.010045502	9.356835663	10.94757225	10.30538282	1.862655991	3.669926558	1.679490642	6.454837432	6.886899496	9.046283772
Zm00001d015195	10.53642869	9.858560861	11.62771289	14.40757455	17.44016664	14.22431604	11.99525973	14.50113553	14.6290719	5.711175504	9.870524024	5.4768396	12.11541201	10.82916583	10.05621023
Zm00001d015196	3.915637921	3.595684663	4.077663425	4.279950078	4.605230355	4.39362614	2.846591555	2.629963569	2.855209121	0.118067619	0.272233092	0.127818009	0.893421977	0.77117386	1.297427808
Zm00001d015197	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015198	27.31306734	28.4761026	28.9023741	25.11691693	12.64843891	27.87920059	7.231619737	2.711949056	8.158269191	0.081096282	0.741499552	0	11.10378611	10.36190123	9.823397178
Zm00001d015200	10.29246132	10.90935359	10.52751871	11.34874886	10.76145034	12.84348108	10.58231585	8.869776649	10.80522032	4.492391815	6.262577711	3.411327565	17.15747885	17.26439899	13.20326877
Zm00001d015201	21.6387385	20.70243299	21.2046734	1.798308055	8.274183109	1.971550111	3.203018063	4.919209673	4.102824314	21.02679454	17.39501095	15.98390936	1.007787834	1.025021049	0.807928479
Zm00001d015202	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015203	7.281277657	7.699274751	6.765935383	5.749621593	6.19184941	6.305762503	6.175259805	6.443192351	7.142446906	4.570701374	5.744811567	4.090968029	5.033664556	4.545628942	4.654624971
Zm00001d015204	420.1836016	426.6864003	470.3521082	601.7514329	479.0024564	544.0974077	396.5319757	477.8574687	495.7385466	205.0491437	376.97506	157.2192447	687.4501056	688.5761805	658.5755029
Zm00001d015205	104.795499	101.1137981	111.5622613	147.7573546	205.8205571	187.7788533	306.0883844	312.6509204	377.8398398	393.0665216	398.5342003	624.406023	48.97277689	46.92289004	51.056472
Zm00001d015206	5.221651845	5.739656571	6.292833243	5.288710104	9.882601737	11.20485923	11.94414892	10.07379769	15.33830147	11.60972116	10.85472955	8.764104465	0.566612954	0.381610541	1.097625838
Zm00001d015208	10.09715987	9.437125839	9.936110731	8.561730482	9.108999645	8.548013509	7.19772841	7.430539682	7.59344959	1.049949661	2.101929562	1.25463344	3.422594658	3.03661616	3.480490465
Zm00001d015209	10.67734248	10.1176291	9.94200885	9.043373927	7.920362932	8.883704143	8.815398087	7.881028052	9.636827445	10.34668093	9.436653726	13.58092695	6.71026044	7.028333073	5.63475104
Zm00001d015210	4.952118789	5.464224135	4.927113087	11.47235373	9.787714508	8.936327465	6.017353443	5.222610569	5.359143738	0.184851818	0.880674197	0.046886602	7.499289091	7.972899993	8.384094328
Zm00001d015211	4.178979801	5.353670932	4.76331753	4.690658091	16.26753489	6.758165106	10.21273419	15.39023543	12.4133944	2.519473781	4.426655185	1.111028202	4.636329049	3.835072317	5.038533978
Zm00001d015212	4.06642039	4.159349933	4.159681374	9.853401033	7.813623631	8.499582915	8.67601473	7.100994343	6.68722319	0.935883474	1.096994555	0.625952325	10.39696178	8.852582543	8.938143959
Zm00001d015213	0	0	0	0	0.00913945	0	0	0	0	0.009566152	0	0	0	0	0.040095921
Zm00001d015215	0.730756379	1.99417912	2.21370381	2.297405965	1.163478471	2.797739221	11.42076316	7.049006849	7.266128841	0	0	0	25.86102284	29.72343565	29.46428664
Zm00001d015216	0	0	0	0	0	0	0.012790102	0	0	0	0	0	0	0	0
Zm00001d015217	1.408437561	0.75687779	0.011669402	0.093682252	0.012372154	0.149545823	0.054858643	0	0	0	0.082883964	0.010401355	0.157608686	0.349968508	0.455936887
Zm00001d015219	0	0	0	0.100590973	0	0	0	0	0	0	0	0	0.056410582	0.088418211	0.058281018
Zm00001d015220	0	0	0	0	0	0	0	0	0	0.170324169	0	0.273611066	0	0	0
Zm00001d015221	0.009931881	0.037527722	0.037030112	0.061933054	0.045803485	0.194686607	0.174081042	0.053890144	0.079616963	0	0.00626221	0	0.116697982	0.103432927	0.321513068
Zm00001d015223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015224	1.871202408	1.214466439	0.166109704	0.083345803	0.050318034	0.198837463	0.200801023	0	0	0.223835931	0.252819243	0.095181112	0.299133654	0.261642575	0.728480165
Zm00001d015225	0.220045821	0.375491551	0.273473594	0.424926352	0.654709212	0.626135781	1.343677874	0.958594173	1.103018327	2.359308101	2.157220853	0.770585933	0.826089914	1.034920006	0.992992347
Zm00001d015226	1.879353087	2.367052167	1.86150788	16.60959702	16.31022031	17.68396742	35.28498869	36.34234331	33.93868091	72.43783912	33.41059027	77.81937773	32.52621894	29.23798309	31.27672063
Zm00001d015227	0.0602257	0.028445435	0.093560847	0.06572202	0.317424781	0.48882379	0.800501191	0.417556292	0.157834356	0.228418216	0.351252748	0.233503541	0.151637608	0.156801127	0.043518205
Zm00001d015228	3.587689124	3.333669145	3.738297287	6.566419268	7.651349474	5.839200393	4.447634479	5.380204399	4.108153118	0.458756338	1.72578415	0.400059893	3.397905209	3.776674611	4.47199549
Zm00001d015229	5.079631963	4.628479573	5.604510679	9.686730918	9.92572873	9.2662734	7.553254998	5.241129701	7.105732997	0.701968931	2.310629653	0.699144524	6.743664519	6.271504337	7.190879504
Zm00001d015231	3.029194688	2.723408475	2.712064356	2.081562286	3.236454508	2.020394583	2.154041425	2.228757653	2.273453538	0.913884756	1.8157146	0.645733085	1.627979783	1.349038271	0.938902102
Zm00001d015232	0	0	0.943924986	0.236807915	0	0	0	0.228949948	0.468345083	0	0	0	1.274879145	0	0
Zm00001d015233	1.522989728	1.071433282	1.16294893	1.485301833	2.563593765	1.896128166	2.481839381	2.107699798	1.837657504	0.124891855	0.29759702	0.130712167	1.685849821	1.627439925	1.560911188
Zm00001d015234	3.84095125	4.596573155	4.048449998	5.510323853	6.570513056	6.112930644	11.67842603	11.78346705	11.49386915	0.653781315	1.394823451	0.666500502	4.760606722	4.520383474	4.763876676
Zm00001d015238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015240	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015243	0.002751305	0.041583344	0.071805926	0.058332237	0.029001982	0.111233922	0.096446993	0.076301291	0.217159805	0.542613931	0.294906116	0.362684711	0.052339574	0.039209001	0.127235356
Zm00001d015244	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015245	3.787720351	3.87928992	4.149935922	4.074692252	4.102150854	4.067878981	3.033458993	2.530616562	2.494096921	0.904252447	1.048860847	1.006026042	1.769793344	1.640253073	2.147306128
Zm00001d015246	24.93526587	30.8121369	27.35990861	18.7528155	14.9071551	17.82536288	18.83208873	17.48859171	19.7541312	24.66607133	21.94905707	27.18825597	15.1623735	15.0744318	14.68027997
Zm00001d015247	24.36160272	21.97275586	21.92126969	19.44388001	17.10963139	21.1498845	20.02179564	16.58782773	18.5266295	14.93602693	15.38742423	17.17550012	15.3465452	16.13881995	15.16118287
Zm00001d015248	42.12343643	44.59515573	39.71104052	42.19790239	29.79597486	34.08551603	31.98361958	25.65134585	27.95261798	8.830464856	12.72291749	7.7137826	27.7038336	28.09483945	25.37460905
Zm00001d015249	18.96883706	20.60126733	18.65178917	10.13876174	14.70059347	8.950317485	12.26639266	14.85803392	15.77653866	23.30766871	20.24144815	22.89234167	5.750615574	6.10180387	6.167089173
Zm00001d015251	11.39128756	10.97589669	11.20816179	17.21867064	27.53816826	19.93550193	20.70117845	26.79859843	20.45328645	11.35485692	14.92914771	13.77866628	10.39432039	10.01594281	12.48649391
Zm00001d015252	0.006727969	0.008473902	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015257	0.3676004	0.639372755	0.456854859	0.327468052	0.046130234	0.643372553	0.470449744	0.021106781	0	0.506981556	0.463555898	0.542948054	0.078353648	0.019189356	0.647613299
Zm00001d015258	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015260	13.65746909	15.72799972	13.99008596	9.297595661	11.14711649	8.927698905	10.01402888	9.543423106	9.007390698	5.490166011	6.561285553	3.854709396	5.788557183	5.779276687	6.540665284
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Zm00001d015268	1.156129718	2.608934805	1.640393951	16.20907623	3.148299063	9.407370199	5.189851891	2.985546039	3.089295263	0.159449349	0.157940972	0.074707969	27.94491962	30.42792148	33.79480889
Zm00001d015269	31.2502666	33.68464131	29.29543601	23.29971486	26.38446885	23.99240152	27.23230407	26.9753525	27.34149588	28.16807308	29.40918075	26.80146564	23.33899357	22.09713002	23.73908694
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Zm00001d015290	38.30103302	40.00288266	33.40664394	31.31951537	29.87416309	33.47938137	34.23693916	31.50681669	34.13269398	15.24120958	14.60302697	11.71255868	29.84395781	30.79605279	27.35278639
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Zm00001d015293	10.1297259	9.919677194	9.342678457	8.233545988	9.379115279	9.658554824	5.761230025	5.707763298	5.780304606	6.512431236	6.657171988	7.080177575	2.413151121	2.342635325	2.466139102
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Zm00001d015356	381.398373	350.2850739	391.1059012	15.17807331	55.4984157	13.00183516	58.34493282	111.9751755	100.4061081	552.3012235	643.6860654	518.0644881	59.27059149	59.25747763	76.90171374
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Zm00001d015421	14.13466558	13.21362199	15.15355437	12.6755208	41.51293718	19.09851362	49.04489684	55.56137524	40.07676231	53.95296279	45.01912036	36.99794104	27.73588621	28.33581442	33.55155432
Zm00001d015423	4.478384319	4.442151789	4.18764837	8.422480572	8.483762793	8.028364749	9.161915905	7.927347007	8.664016421	7.153214012	6.314968711	3.65335203	7.91745981	7.16798244	6.939338737
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Zm00001d015427	40.60438338	33.07176368	42.45118929	68.50697002	99.02227612	70.75756121	96.61428334	113.4412716	94.7010585	112.197859	103.5424202	53.66276908	70.51532135	72.35435569	87.07393475
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Zm00001d015430	0.317252528	0.170191793	0.328568646	0.483588832	1.331492604	0.71977362	1.050343813	1.367206047	1.007133131	5.979761705	4.067333758	7.289083462	0.302420837	0.173891681	0.35999486
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Zm00001d015434	7.106632611	8.369278964	6.362137574	4.356431072	6.295591493	5.53385423	28.73594018	28.75692029	20.27707259	0.747550526	0.91135848	0.489245514	0.673944923	0.594193746	1.763937911
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Zm00001d015445	3.100961628	3.006051418	3.128574565	2.927697218	4.206485088	3.404251769	3.048399915	2.961834811	2.841402919	1.669849686	2.202352882	2.740364316	1.993344009	1.346384852	1.752284995
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Zm00001d015449	7.34497739	6.441075108	8.647253192	8.702955568	12.85936987	9.472869814	9.630136431	11.91495107	11.30728815	2.73971883	3.815379866	2.00871707	2.906952448	2.8588994	3.804230476
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Zm00001d015460	17.26040016	18.82000427	22.45801472	27.21499314	34.61550515	24.50533918	24.61027752	29.8131651	23.63840526	4.760987493	12.16376954	4.279631248	18.10165685	15.65631008	26.12209415
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Zm00001d015464	148.4214347	144.2597599	140.0271698	70.06864687	49.41063423	64.40300658	34.88078783	26.98544517	31.11570571	15.09395428	24.5594874	13.81804219	58.9220867	52.94568132	47.88587353
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Zm00001d015469	0.984612184	1.159826975	1.12684102	1.333977022	1.367373032	1.592469299	1.299507462	1.661251329	1.288555643	0.424967626	0.473426333	0.15301309	1.692352524	1.331736305	2.43638813
Zm00001d015470	9.927919871	11.86000465	6.732689444	38.36288224	56.89069933	86.73657713	94.11026393	82.702328	57.4344001	1.507108194	3.811534686	0.386336034	15.32456769	11.21467712	13.22527132
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Zm00001d015475	16.26448824	16.26764542	13.67387467	11.7749792	8.691768616	13.23273975	9.414268551	10.83780746	7.66947418	43.19609124	24.57395062	47.66433265	7.860580808	9.466854766	8.645167927
Zm00001d015476	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015566	7.933227951	7.15403935	6.933121522	9.957226929	9.040340193	7.917448789	10.66682276	7.984492925	10.45399836	6.175049936	8.78895057	4.24556071	7.912763408	6.719081159	6.215109992
Zm00001d015567	0.009376704	0.153529908	0.151494134	0.304049669	0.049420731	0.195291664	0.076696748	0.079143192	0.115640761	0.01293202	0	0.051935434	0.010492832	0.020558144	0
Zm00001d015568	3.967510582	3.902597951	3.883577087	6.185133859	9.628594154	6.705029783	10.08748131	9.573121275	10.58715486	10.80448494	10.82541737	9.349158377	2.995863674	2.675026968	2.679123201
Zm00001d015569	92.50639016	101.0053858	88.9909794	144.2023542	57.65606872	101.163965	87.28246219	68.27925705	83.31414109	41.14706291	66.24005973	48.07296229	455.0175346	490.6508891	411.1382202
Zm00001d015570	32.07204661	32.16077812	31.4371797	31.0448709	23.99545788	27.0257319	28.83048556	25.48486077	28.0778151	39.02879986	42.0877384	47.29804507	42.0765096	41.31985916	36.1632739
Zm00001d015571	51.62228409	54.17817528	44.79248893	26.8983112	28.35784536	27.91522023	24.83537404	26.08360941	28.73780599	38.43495887	32.15316174	27.5807432	20.50129541	17.91954334	21.13840723
Zm00001d015572	0.035054446	0.088302409	0.283177496	0.021859192	0.069284063	0.021473246	0.163844482	0.169070731	0.043231854	0	0.02210239	0	0.019613525	0.019213957	0.202638616
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Zm00001d015575	0.09670192	0.167470086	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015578	3.903385938	3.852700155	5.550823119	2.480875783	2.435641522	2.138187081	12.80618363	18.41907828	10.93555232	45.47430858	44.71478946	66.7620485	2.824509184	4.8036212	6.183468002
Zm00001d015579	4.316203852	5.067296801	5.161921212	22.87970416	12.98713261	27.58821336	42.69845704	30.05654912	34.08214077	5.710336747	5.155540455	2.250021059	31.59514774	33.97741313	34.87063205
Zm00001d015581	5.827684165	6.518280223	5.192852741	6.618939945	5.776024711	6.771498997	7.323584767	5.992718842	6.834573611	7.036461286	7.718652506	6.804817248	4.347577139	3.961681042	4.432407352
Zm00001d015582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015585	2.589248849	2.942298697	3.532567752	8.151933077	8.688501412	7.035199441	7.059587035	7.007255971	8.458596048	3.777325543	3.366707561	2.141628436	5.485843595	5.651620573	4.989208355
Zm00001d015586	3.414525283	2.315711585	4.374153828	5.22478789	8.738710324	5.212986371	5.693241602	7.300006397	3.708969131	0.905614096	0.910847792	0.523724698	4.217755789	2.332253262	4.570172366
Zm00001d015587	0.549121584	0.429281793	0.941310236	2.408749762	0.773448125	1.577480589	0.730151827	0.479463048	0.537104888	0	0.023877929	0	0.317836906	0.332119373	0.350267303
Zm00001d015588	0.284817373	0.358728536	0.035397187	0.106563562	0.037528867	0.034894025	0.166404552	0.068684984	0.035125881	0	0	0	0.031871979	0.124890722	0.06585755
Zm00001d015589	41.21096549	32.35308299	33.46966138	12.82506505	38.12970593	16.87522347	24.94439722	29.05969473	25.87239313	0.165601253	2.368588672	0.123511194	4.165351687	4.024082501	3.242472112
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Zm00001d015597	0.005653943	0	0	0	0	0	0.006606632	0	0	0	0	0	0.006326944	0	0.013073459
Zm00001d015599	39.40025952	39.20668635	42.30952516	60.07133025	73.67114493	50.15515099	65.01796344	72.04627933	74.91015629	53.90924772	65.94824673	41.95384392	30.48876987	28.8535891	31.92251737
Zm00001d015600	0.179983332	0.141681045	0.139802384	1.169101062	1.047432129	0.716638676	0.876293853	0.741481344	0.915623629	0	0.009456865	0.00830739	0.268542837	0.263072065	0.459521689
Zm00001d015602	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015603	2.907005998	3.765995806	4.459271382	5.303576538	3.0643255	4.375532696	1.960459941	1.802667874	2.560817587	0.572748648	0.942641441	0.754458412	4.963199006	6.063952941	6.068817271
Zm00001d015605	2.033673372	2.785421571	2.681216789	7.859665417	6.235565653	8.185096247	4.454521841	3.738825162	4.234178625	4.287140252	2.710793186	1.20778084	8.298251813	10.01951362	11.11234412
Zm00001d015606	0	0	0	0	0	0	0	0	0	0.111238262	0	0	0	0	0
Zm00001d015609	0.016050759	0.005053998	0	0	0	0	0	0	0.019795037	0.005534161	0	0.017780302	0	0	0
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Zm00001d015611	0	0	0	0	0	0	0	0	0	0.065016847	0	0	0	0	0
Zm00001d015612	10.71408658	12.14686016	14.34971181	22.81386862	29.35083765	23.63084077	23.99698333	26.66171911	25.60218579	6.496737716	11.18717299	2.321039701	24.37790644	24.28853051	30.76979284
Zm00001d015613	26.23541419	26.83547658	29.71179819	66.78713718	52.23555255	68.15906471	40.41962279	40.6918804	42.55198014	14.90456886	33.92574894	18.60928037	132.9872647	143.4638029	151.3944878
Zm00001d015614	0.149412393	0.207004007	0.464225403	0.093170327	0.767803712	0.658982248	0.261882573	1.243085617	0.184266918	0	0.018841382	0	0.434712889	0.835334668	0.570045681
Zm00001d015616	0.619762604	0.284686966	0.797427829	1.309453047	6.926928221	1.911634281	2.615613303	4.668381011	5.089599688	3.449187052	2.160729694	1.801170704	0.057114586	0.111902087	0.033719066
Zm00001d015618	1.488063374	0.210586666	0.761912545	7.221820836	29.79299435	12.0377986	32.09945834	36.62452484	30.40787253	1.26057938	0.759031951	1.308849153	21.22962223	22.48949447	24.89109336
Zm00001d015622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015623	0.157460011	0.046663875	0.126624084	0.219480507	0.378339801	0.170214757	1.547697618	0.815285179	1.256535589	7.792330722	4.660369897	6.515363514	0.238392035	0.11169089	0.096376903
Zm00001d015625	0.033022304	0.249550286	0.041040217	0	0	0	0	0	0	0.227716008	0	0	0	0	0
Zm00001d015626	0	0	0	0	0.171560536	0	10.87810326	2.511907996	0.642301828	11.85164231	1.888175644	17.59631854	0.291400948	0	0.225797315
Zm00001d015627	0	0	0	0	0	0	0.005868787	0	0	0.166244398	0	0.005563693	0	0	0
Zm00001d015628	3.633550544	4.793852697	5.870523504	16.27979676	8.246875091	10.18302718	10.6145096	12.40984779	9.029568727	1.49085141	2.268101785	0.493072594	37.09262991	35.59012164	37.0202575
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Zm00001d015635	9.976022914	8.042550937	9.588138492	8.577305984	9.71037891	8.772133523	9.19837472	9.895686555	9.437189287	5.428359068	8.514328219	4.452862975	4.849616841	4.773770955	5.119340356
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Zm00001d015638	0.110847843	0.023268878	0.011480169	0	0.121715245	0	0.140319514	0.278452639	0.193667021	1.108361512	0.512536515	0.286515156	0.35145317	0.091136473	0.266990069
Zm00001d015639	11.30671233	11.12735307	11.5408187	10.4821013	10.59305388	11.40310411	8.188359819	10.03059959	10.41846893	11.11726739	9.595773681	10.40580313	7.745492166	8.058986244	8.449647961
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Zm00001d015651	5.345981492	5.891623038	5.54820267	20.21018101	10.00362151	15.40738224	9.229182785	8.471614353	9.179945174	0.755219446	1.661955716	1.069256444	32.96510312	36.99410729	34.59466267
Zm00001d015653	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015658	26.97011381	27.99634354	27.57974896	6.833726302	17.07107506	6.659401268	9.529448796	16.01341348	26.38689965	51.91764463	54.06734566	57.22106037	1.964913866	1.700781535	3.237131604
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Zm00001d015692	11.53237548	13.59045119	13.94188055	16.40779439	15.85127332	16.01114355	15.82182127	17.15808802	16.80659023	8.283627851	14.90598764	7.601198465	9.192806711	11.41721317	11.30428449
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Zm00001d015702	6.816477233	8.072253001	5.60691442	10.09370057	5.465404011	6.656105111	5.032073639	3.306769883	6.01242684	5.049338333	4.496156683	4.340377163	15.13332541	13.78793576	13.64041582
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Zm00001d015705	50.40720284	51.56238597	59.50613657	69.60462766	45.10880583	65.05038053	29.83041373	23.63316458	32.54848355	1.742308723	3.23346042	0.277115691	93.98880287	96.17385481	91.01718313
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Zm00001d015730	0.28121209	0.299697258	0.53767879	1.699621365	2.508258476	2.279154056	0.101106563	0.260829054	0.613591343	0	0.272782667	0.119813074	0.992469208	0.545408851	1.050386245
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Zm00001d015741	16.16598464	14.97457846	19.70135822	15.87674839	16.64262431	17.76211406	13.05972072	11.63705552	13.04529078	7.294225772	8.71880534	5.369224875	5.998180088	4.610147629	7.136513687
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Zm00001d015744	4.234531546	3.645054627	2.592729021	8.580442638	8.316786916	9.070633897	6.172096094	6.358267115	5.682181516	0.244868643	0.503762277	0.118008098	7.341317053	5.84877851	3.98224356
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Zm00001d015755	1.898782489	0.239152357	0.235981247	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015756	0.079330177	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015759	0.165711926	0.156536088	0.34324545	0.051667181	0.181958145	0.135346522	0.129089591	0.183159958	0.102184382	0.057136017	0.313452083	0.091784076	0.216343128	0.121106155	0.127723734
Zm00001d015760	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015765	4.781722662	5.118919064	5.113718362	4.231095143	4.518566242	4.574838405	4.304420351	4.12386304	4.263165304	4.271118426	4.489186736	3.590567192	3.650207292	3.598461058	3.336605868
Zm00001d015766	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015769	0.803298667	0.66814184	0.960668667	2.041483756	2.436463938	2.859607926	1.895019461	3.307844475	2.000072351	0.146323945	0.917420732	0.386164709	1.39077725	1.545211156	2.172861083
Zm00001d015770	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d015772	0.310005304	0.2830783	0.115582651	2.116772792	1.827936668	2.411723108	1.919878363	2.345568851	0.841109537	0.042754842	0.127051156	0.120193433	2.133471223	2.70171767	1.953325981
Zm00001d015773	0.26522676	0.668108172	0.059931745	0.511204388	0.190622818	0.354478987	0.084522947	0.407022129	0.178417175	0.199522598	0.395270264	0.080128955	0.188870985	0.079295697	0.306638329
Zm00001d015774	0	0	0	0.088000877	0.023243686	0	0	0	0	0	0.044489973	0	0	0.019337918	0.326313539
Zm00001d015775	0.112785666	0.131907252	0	0.050236211	0.07430583	0.187527113	0.056481451	0.009713846	0.09935429	0.044442865	0.223498539	0.017848406	0.045075279	0.026494202	0.055883838
Zm00001d015776	39.25368595	47.34656886	33.66092965	25.24267674	15.72991486	24.23070156	17.35627603	12.78666105	15.3475892	19.89693052	23.091106	20.45179565	27.75224564	26.37808992	27.47004919
Zm00001d015777	0.343005869	0.884606568	0.040598924	0.040741147	0.215219311	0	0.286287401	0.23633543	0.040287749	0.833489561	0.88568002	0.651370861	0.347278907	0.143243839	0.264374395
Zm00001d015778	20.3729039	20.72371576	16.43754074	12.81996023	12.30339555	12.13306285	16.32826254	10.71173155	13.20484456	15.64883985	12.87541087	12.03317083	15.54030938	15.39897872	14.02740844
Zm00001d015779	24.37506823	22.40114938	38.41296922	11.00136361	8.173181509	14.27456815	1.121807975	0.593829139	1.714488978	0	0.094335784	0.013811557	0.125569492	0.082007588	0.180184816
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Zm00001d015785	12.58524591	12.88718367	12.48384611	9.033281407	8.037454255	14.88785764	6.935884812	5.438032707	5.668002034	10.85281207	8.122929353	10.18434209	2.972997521	2.464686937	2.773685016
Zm00001d015788	7.25470473	6.918459097	7.901046509	10.58164057	13.92490991	10.28488408	10.06770179	11.25699284	10.74997035	5.293976171	7.362887578	3.541848606	7.393360282	7.640985135	8.415260276
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Zm00001d015791	6.611253165	7.786842612	5.837050354	9.401844226	8.593043063	7.904222095	8.832185563	11.81922793	9.752235912	38.46616681	29.31154219	41.34601482	10.7792845	8.504593619	9.407397993
Zm00001d015792	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015796	0.826413104	0.267652379	0.352137819	2.473599776	8.586915971	2.574564352	5.242174473	7.544671847	6.755817158	3.712360873	3.781455616	0.915462933	1.083316994	1.837770217	0.76435706
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Zm00001d015800	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d015806	74.79187972	73.56131278	100.8805381	64.81384308	60.97751639	77.59291826	60.07408071	42.29873644	52.43935642	3.899241624	16.30164066	3.440966272	39.81785804	37.74248609	33.31048013
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Zm00001d015857	3.02173432	2.62880755	3.207870071	6.632471684	4.620741793	6.008314978	5.995763998	4.496720064	4.138267883	2.270933473	2.098863722	1.745152302	5.552696278	4.927329286	4.800398001
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Zm00001d016472	7.082008921	6.481496838	6.684272098	7.058875689	6.799256792	8.081326885	4.697029813	6.196503215	5.026871737	8.631304427	7.607911403	8.336423387	8.334637297	6.582808627	7.618043304
Zm00001d016473	0.052901403	0	0.018784577	0.442983961	0.687095681	0.361092401	0.150122846	0.173136279	0.186406003	0	0	0	0.101482917	0.248538751	0.166009082
Zm00001d016474	89.48744369	105.0115804	82.80991404	44.0222366	45.50914792	42.96974064	45.53870871	43.16696894	45.69182781	123.809799	111.2550372	108.1406281	43.49993627	42.82381545	41.87890854
Zm00001d016475	5.026938187	5.839476685	5.058499865	9.608812097	6.907176382	8.669323051	7.779051036	7.631285706	6.23451666	2.857510595	2.662720285	2.063146401	9.084107799	8.743902012	8.652291327
Zm00001d016476	0	0	0	0	0	0	0	0	0	0.876971418	0.162538007	0.295082054	0	0	0
Zm00001d016477	2.790677547	3.004018902	2.564212862	2.424741993	5.71610275	2.34412233	6.367268129	6.495947174	7.128027909	9.041346249	15.42748282	10.68554888	1.16428821	1.213063064	1.641235565
Zm00001d016478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016479	6.301682025	5.700012422	6.080046632	5.959333121	7.126863424	5.551286761	5.693824566	5.503728836	6.237243326	2.074133162	3.971560474	2.036683515	3.483935859	3.455584846	3.634774863
Zm00001d016480	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016483	9.202159081	7.535803171	7.431926836	2.523012575	7.845960691	3.324106494	6.612199844	7.989064062	8.124228949	40.26294532	30.09555699	48.20265612	2.47382319	1.942227988	2.798562816
Zm00001d016484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016486	4.678330603	4.573059707	4.458004925	5.523767775	5.223530155	5.566538372	5.336752624	4.434826479	4.78521983	1.226334015	2.624842649	0.641742319	4.187407925	4.139024388	3.940744472
Zm00001d016487	0.120984371	0.152380263	0.07875986	0.215552085	0.167005832	0.063523889	0.161565987	0.263972632	0.22025837	0.01589118	0.079915091	0.063819522	0.380368493	0.176836421	0.11989238
Zm00001d016488	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016489	0	0	0	0	0	0	0	0	0	0.70934642	0	0	0	0	0
Zm00001d016490	1.445329582	1.645839248	1.931594505	5.173078336	6.378548693	4.378303187	3.470275948	4.13005148	4.248680088	0.122877603	0.449409938	0.241257202	1.99401807	2.116178788	2.357709838
Zm00001d016491	29.09346332	27.45421936	36.74332632	57.89778543	78.56289395	48.1846954	48.50159855	65.36915744	51.99322559	5.479991348	16.87185433	4.67511007	24.3671482	23.87073908	28.41931727
Zm00001d016492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016493	1.598600786	1.707400177	1.30330522	4.115008261	3.016351995	3.932677424	2.689869645	2.744829306	1.813796674	0	0.09676257	0.042500578	3.148438675	2.327243398	3.326761193
Zm00001d016494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016495	0.012468066	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016496	11.57395039	11.11832098	11.05350122	5.460569563	6.378548693	6.069329665	6.314249713	6.536121933	6.686962011	5.681626298	5.478521153	5.296692197	2.962541132	2.744056011	2.696160557
Zm00001d016500	0.066770373	0.021024383	0.082982416	0	0	0	0.078021182	0	0.020586597	0	0	0	0.018679548	0	0
Zm00001d016501	24.88240736	25.10420264	21.12709207	45.51777944	41.97880837	44.24756801	20.20216149	20.38738697	18.08151213	17.98304398	16.49072283	12.07331313	30.57153088	32.9628015	35.18664347
Zm00001d016502	1.787089401	1.913218857	0.111049998	0.94723166	1.118507419	1.149450245	0.783080243	0.377094031	0.220397686	0.369703637	0.112678853	1.28677675	0.699933648	0.587721047	0.309917884
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Zm00001d016508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016510	0.148600369	0	0.338581789	0	3.067576984	0.273083676	2.980811967	2.598084188	3.451499635	3.757314137	3.747796648	0.713321894	0	0	0
Zm00001d016511	0	0	0	0.007209374	0	0.014164171	0	0	0	0	0	0	0	0	0
Zm00001d016512	1.376584454	1.638483277	1.275768511	5.651924827	6.438862834	5.98100497	8.435156119	9.268907912	10.09291757	0.53498291	1.097624596	0.403500583	2.42447605	2.909219183	2.351729823
Zm00001d016516	4.209043379	4.641210959	3.578579573	4.590625991	3.759156475	4.24224737	4.610875521	3.845703415	4.542053092	0.911244466	2.036690446	1.19049587	3.527977015	3.509757177	3.312524755
Zm00001d016518	0.182789549	0.162950833	0	0.053291033	0.028151538	0.020358383	0.033286689	0.008587114	0.01756599	0.006547972	0.005987104	0.028926567	0.029221054	0.033830444	0.005489082
Zm00001d016519	7.791019794	8.403389079	9.971346575	17.97180069	22.89637646	18.6956529	16.75815907	19.24028177	17.42677697	11.96084048	15.28290698	8.805955601	16.79887084	14.48346618	18.85102451
Zm00001d016520	7.974886454	8.761944484	7.867024809	8.773733254	9.46665679	8.426907106	8.786160321	8.860362971	8.22823768	8.072247849	4.166300607	1.979811199	4.748924817	4.347758277	5.548498612
Zm00001d016521	0.929112985	1.035552925	0.815624503	3.517632137	3.492978075	3.640722897	3.132067546	3.423135138	4.487928127	5.893422944	6.690443671	13.99670027	2.586890693	2.760529562	2.723817128
Zm00001d016522	0	0	0	0	0.158016284	0	0.420390446	0.072299983	0	4.052146442	1.209815058	5.114546858	0.26839561	0	0.138647474
Zm00001d016524	0	0.018396335	0	0.018215993	0	0.017894372	0	0.035223069	0.090066362	0.020144108	0	0	0.016344604	0	0.016886551
Zm00001d016525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016527	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d016529	0.041872079	0.065922549	0.013009686	0.600541971	0.206897278	0.179546593	0.085623169	0.265063033	0.23237949	0	0	0	0.01171405	0.103278699	0.012102459
Zm00001d016530	7.311464029	7.266353725	7.277271153	4.504032251	4.157043769	4.839132876	5.347947574	5.584263815	5.470743663	36.27819053	21.6221528	30.2107461	6.473734208	6.528595601	7.098041207
Zm00001d016531	2.372419653	2.036562583	1.894255668	4.380315094	4.331009569	3.759015113	4.638355469	2.916531567	4.478677557	2.412840411	3.559952647	2.473898952	3.655930695	3.704950178	3.792475509
Zm00001d016532	0	0	0	0	0	0	0	0	0	0.301410248	0	0	0	0	0
Zm00001d016533	0	0	0	0	0	0	0	0	0	2.540281643	0	0	0	0	0
Zm00001d016535	6.07386186	6.773218344	5.855818034	12.38182079	12.17763277	10.87766515	26.97448482	34.53815563	24.5875984	29.27725392	21.22220968	24.49923583	40.46494634	41.41026111	51.45345907
Zm00001d016536	0	0	0	0	0	0	0	0.074759167	0	0	0.039092663	0	0	0	0.609294343
Zm00001d016537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016538	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d016541	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016542	48.34415295	62.57095307	77.24452806	104.3102986	51.70643947	82.06792774	71.20097781	53.47715745	64.77354423	3.317063187	6.152948301	2.281854108	94.86903701	105.1478962	121.4972019
Zm00001d016543	4.320287512	3.879967694	3.837009088	5.792713226	7.380145986	6.079562576	7.203242741	8.870194721	7.846856867	3.315972866	5.150856367	2.447766429	6.493189112	6.293518996	7.269173125
Zm00001d016544	6.439955367	6.31227172	5.484981521	6.731808252	9.833446279	7.740069533	9.49093254	10.22808302	9.656063428	9.38751475	10.71711111	6.082692678	2.192192187	1.876005582	2.551244019
Zm00001d016545	0.395857859	0.30271198	0.298698083	0.846337285	1.005944407	0.588904336	0.363439931	0.392079745	0.592817355	2.203311334	1.390599211	4.07190988	0.680287114	0.216976643	1.209545081
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Zm00001d016548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d016550	10.52028136	10.82002826	15.45996059	15.98773438	59.41056371	19.01252837	41.34028751	61.45759133	60.3279099	47.37785414	119.5141963	52.19805872	27.42712972	28.9498945	30.41313538
Zm00001d016551	0.767636129	0.847136478	1.562776341	0.501475585	19.60331424	2.767637342	26.20898383	40.29421131	43.7469371	29.9863259	79.56151408	14.54507649	0.842647392	0.96172535	1.901768832
Zm00001d016552	2.104490424	2.060147779	1.47229039	1.736526543	2.015924374	1.688670201	1.94956429	2.160685747	1.891460184	1.930657679	1.490345583	0.68932291	1.657604671	1.597165133	1.669292815
Zm00001d016553	14.95213107	17.82493894	16.64120769	32.70546756	53.45702429	32.70214464	41.09796946	47.56215419	40.06276926	20.7248627	49.15094847	28.93211934	32.58982649	33.55610509	43.51655023
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Zm00001d016558	67.34420638	135.925689	55.65193607	6.031270059	6.602943779	5.281043086	17.89636538	26.12864797	18.0604531	70.09186256	129.7345824	96.81619497	0	0.085334586	0.236243454
Zm00001d016559	6.83147165	6.925179329	6.664373719	5.504857761	6.552280793	5.141546808	4.564792705	5.232221337	5.8198622	0.766086918	2.728686874	0.407768429	2.491928721	2.550224626	2.14514296
Zm00001d016560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016561	63.0817738	71.26740242	85.79229322	442.6203053	505.3331487	547.293401	781.8302145	788.6562527	745.1370273	1662.197821	1198.064169	1735.619877	303.0907124	288.3588015	350.0694673
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Zm00001d016567	1.692628962	3.197808661	3.236314239	14.37085748	10.89409407	9.650690421	13.46450543	12.40254573	12.84603657	6.284961829	6.157094493	3.245222682	29.21294499	28.61781698	42.97675567
Zm00001d016568	1.653778297	1.041469942	0.822128214	6.084435625	7.626834333	5.200335381	4.219160565	4.686088443	6.18668747	0.038013882	0.764671413	0.3358631	7.094085567	11.33081152	13.03342165
Zm00001d016569	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d016571	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.101319308
Zm00001d016572	12.23675226	12.67071083	13.96767831	21.64718193	21.5804684	17.36041433	14.43711314	15.58196577	16.39891507	1.849361487	5.646999438	3.834455632	17.44118422	18.27552379	20.03848163
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Zm00001d016582	0.027957534	0.070425234	0.104237115	0.139469692	0	0	0.065336756	0.067420843	0.206876356	0.154232192	0	0	0.093856133	0.03064803	0.032322724
Zm00001d016584	6.128484171	5.046939398	8.118684859	11.33878293	20.853479	10.43726707	14.63704272	21.68144725	18.2723796	33.15859172	31.08271151	31.78080143	8.44057917	8.453194714	9.576920613
Zm00001d016585	0.545370386	0.570472965	0.901802573	0.974130734	1.814783363	1.115476346	1.112514	1.415495822	1.538983843	2.026995803	1.696011019	2.216874002	0.299971564	0.501589514	0.609148944
Zm00001d016586	17.61433971	15.26644332	11.71421724	2.479044851	6.049694935	3.242621393	3.55347025	5.190858867	3.130935918	16.09109152	14.15426258	29.26555748	1.190760292	1.409276584	1.055386108
Zm00001d016587	11.48848937	10.53993992	10.8423816	15.29224446	8.60121068	11.9708512	7.739560643	8.753725923	7.982963039	3.321781627	5.27205068	1.993478464	20.0075628	18.70735507	17.54619178
Zm00001d016588	3718.894558	3637.687216	3379.050966	264.1054693	267.5609622	435.051709	212.8902888	312.4688477	165.3636473	1523.195075	991.6043558	3195.968819	218.8672743	195.4505018	203.6704363
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Zm00001d016591	7.959183706	7.948851684	7.850442163	6.134693917	6.481430718	5.471635843	7.857608546	7.630094941	7.269995186	3.347411268	3.688430192	1.903561326	5.576842244	5.290577572	6.951826004
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Zm00001d016729	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016730	1.376508679	1.431630586	0.868324587	0.013005469	2.267190156	0.204413512	2.339564221	3.520694846	2.057717528	11.57756126	7.206289695	5.77588578	0	0.011431645	0.012056302
Zm00001d016731	21.87583684	22.30959155	21.2440992	30.11654667	28.15585378	31.88382136	39.87180012	37.62889084	43.8336542	37.81252239	33.94538731	42.44138183	24.27133675	24.69058956	24.95767873
Zm00001d016732	0.743182696	0.656626026	0.758203437	1.597804967	2.747752527	2.201508646	2.203425786	2.139962187	2.106697883	0.336557794	0.356686853	0.11058771	0.794407451	0.869421825	1.16058904
Zm00001d016733	0	0	0	0.030070846	0.285934227	0	0.112697262	0.029073009	0.178417175	0	0	0	1.37606003	2.4845985	2.648240117
Zm00001d016734	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016735	0	0	0	0	0.024838134	0	0	0	0	0	0.023770927	0	0.005273544	0.005166111	0.005448401
Zm00001d016736	39.55366707	40.13580238	45.18468103	138.5947062	79.25513813	102.798476	44.16344486	47.73272985	45.20666813	2.425507113	11.24217706	1.482580157	335.4046124	404.2821815	384.3651241
Zm00001d016737	0.862045643	0.881716181	0.992259698	2.056410672	3.582950688	2.083895407	3.339640056	3.648471953	2.632880273	4.085358175	3.939706675	3.646698248	2.518466293	2.454475308	2.755816577
Zm00001d016738	0	0	0	0	0	0	0	0.030358004	0	0.416682552	0	0	0	0	0
Zm00001d016740	4.907622433	4.572803312	4.263221642	2.466965973	3.695150016	2.055296434	6.758584863	9.117742967	22.17176504	68.89285081	136.3717493	76.60944485	3.082125406	3.568306357	3.734340214
Zm00001d016741	6.607763062	7.015135809	5.506229088	0.505190219	0.433666912	0.310169114	0.118332126	0.213686618	0.156115028	0	0.223479726	0.252406209	0.141653238	0.111013976	0.204890156
Zm00001d016742	0	0.034232544	0	0	0	0	0	0	0	0	0	0.180648579	0	0	0
Zm00001d016743	0	0	0	0	0	0	0.282116326	0	0.037219477	5.286027498	1.370055463	1.972445868	0	0	0
Zm00001d016744	24.86486516	26.3195371	25.25902372	17.54259357	18.87227836	16.28958916	25.4097948	26.30362141	24.7610833	66.14865601	57.61973512	66.35094038	11.38830671	9.782054567	10.98988955
Zm00001d016745	4.528235708	3.995963435	3.709983649	8.776880701	3.572368133	7.349830135	4.869966116	3.808104191	4.606381388	0.159112958	0.090927556	0	4.760624657	5.216954231	4.384945753
Zm00001d016746	0.006046543	0.007615643	0.015029323	0	0.055770453	0.062966662	0.02472885	0.025517641	0.018642661	0.033356719	0.038124424	0.056933731	0.047363931	0.029827948	0.038448459
Zm00001d016747	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016748	6.329274963	4.105448797	4.916275971	6.255675757	11.65479825	9.537700244	7.173885111	11.27578492	7.903323279	26.23098652	27.19668452	36.44114636	4.037117294	3.295727399	3.823396669
Zm00001d016749	0	0	0	0	0	0	0	0	0	0	0	0	0.026422366	0	0
Zm00001d016755	3.367298995	3.831150075	4.184889103	3.821589802	5.575717436	6.655648566	5.338061279	3.803050361	2.671643381	1.424178542	1.203110418	0.770895809	9.206762695	9.093028958	10.79674519
Zm00001d016756	0	0	0.06864909	0.36167027	0.218349774	0.389121252	0.290451581	0.166509053	0.272491685	0.114272033	0	0	2.487945969	1.680347903	2.187268943
Zm00001d016757	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016758	0	0	0	0	0	0	0	0.017462284	0	0	0	0	0.243091362	0.031751879	0.23440823
Zm00001d016759	0	0	0	0	0	0	0	0	0	1.175236765	0	0	0	0	0
Zm00001d016760	4.397068213	1.644508343	5.798775128	5.220417184	78.43111605	12.46775285	42.76410003	64.64105935	45.93991659	47.16369529	32.88165183	32.60719532	3.223009075	2.631124772	2.219917425
Zm00001d016761	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016762	0	0.009455777	0	0	0	0	0	0	0	0	0	0.033266057	0	0.008230031	0
Zm00001d016764	1.152864595	0.999987899	0.797492709	1.20721171	6.362889587	3.064678115	5.579119666	10.1371824	6.813917964	7.514954358	8.818801054	3.349352076	2.190723114	2.205707271	2.087322835
Zm00001d016765	0	0	0	0.06162712	0.094048246	0.026906236	0.282286275	0.622302508	0.426589016	0.340750943	1.495506325	0.364924639	0.024575984	0.02407532	0.3237335
Zm00001d016766	2.267566889	2.211103655	1.949970237	2.344512392	2.448111026	2.177656024	2.222288714	1.944788319	2.124467424	3.112216251	3.163870279	3.168244865	1.796699662	1.367182548	1.543371162
Zm00001d016767	3.061137484	3.00067152	3.752747363	6.236181691	13.03130032	7.347896874	10.4718536	12.24221118	12.65812912	19.71453072	23.14368852	24.19723957	3.720012096	4.281967628	4.724128227
Zm00001d016768	81.93913083	77.20741423	70.77380419	22.78172417	40.9927909	32.05856889	25.18712185	28.5516661	25.39949921	39.14024654	47.7887933	41.96176823	15.5331522	14.44256878	13.79022022
Zm00001d016770	13.27110024	13.14521346	11.769133	9.656218165	12.26260318	10.91553197	11.21745258	11.3219658	10.89759047	4.442394971	7.652817936	4.724305475	6.686585645	6.19945362	6.445687263
Zm00001d016771	12.09705657	10.35996103	10.16090206	9.816228513	16.38812448	11.62361971	14.49169597	19.01519565	20.65576717	7.745367897	12.18772584	5.097872283	3.546914801	2.82947446	4.123611759
Zm00001d016772	18.86774378	20.5084962	18.17708512	9.659516536	10.30041324	12.98664593	10.1237109	8.22047954	8.541281478	11.22846935	11.79988096	10.5152626	7.619040584	7.582298409	6.653434725
Zm00001d016773	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016777	0	0	0	0	0.015515811	0	0	0	0	0	0	0.065221243	0	0	0
Zm00001d016782	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016783	8.494998146	8.450384758	8.816441736	15.03436862	22.03122622	16.13009659	16.67931317	19.74181261	19.09455296	33.15640719	32.97730501	32.80432644	2.34200814	1.674301496	5.423497883
Zm00001d016784	15.0011398	13.50642234	15.40567807	9.12230505	8.304028145	9.022037056	7.033567048	7.090384583	7.625439946	2.231104417	4.49300282	1.90197927	4.84778001	4.950296514	4.182372776
Zm00001d016785	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016786	3.169427203	3.67131186	3.265470223	10.0764968	9.109709928	8.812156006	7.051955049	6.009626732	7.827691877	0.385024689	1.822352052	0.100052912	4.364451128	3.735470258	3.00927473
Zm00001d016787	9.397707465	6.887587885	9.665791862	19.70241854	25.59301959	16.9724539	28.96770433	29.42769993	27.40130967	14.46937879	32.64081027	15.54822245	21.10066639	18.58373951	25.4063794
Zm00001d016788	0	0	0	0	0.127757846	0	0	0.029227653	0.029894367	0.50145972	0.397372765	0.644441384	0	0.106289977	0.728636727
Zm00001d016789	0	0	0	0	0	0	0	0	0	0.174582273	0	0	0	0	0
Zm00001d016791	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016792	15.436926	12.794774	15.35503051	7.978942126	23.52477572	11.10297043	16.34150844	20.83844538	21.43509069	42.86434398	33.98952404	55.20250893	3.993660468	4.29737039	4.066517596
Zm00001d016793	16.67325061	17.93118987	13.47676842	22.94098284	23.67879777	22.09785134	25.20603835	22.81143638	26.30595194	23.37363541	22.6614035	19.65820617	23.58061135	22.26154338	20.6994607
Zm00001d016794	0	0	0	0	0	0	0	0	0	0	0	0.00366337	0	0.003625275	0
Zm00001d016796	0	0.007383778	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016797	0.863446353	0.643758214	0.749315407	3.372901121	8.062099766	4.191842689	7.494546917	7.069442519	7.004266467	0.708341433	1.974293022	0.560699091	1.185568193	1.112456744	2.386648937
Zm00001d016798	0.233297507	0.068562451	0.067653327	1.794244271	1.393563402	1.915003162	0.363477519	0.103144686	0.297311213	0.182328244	0.147097821	0.051687278	0.652668504	0.528547768	0.979996311
Zm00001d016799	182.1805935	189.582326	150.6882141	34.36488857	21.60544755	38.99468234	32.56933398	20.1419116	34.51874033	7.108979322	25.14425556	8.200754085	31.61779404	30.8690335	23.3224628
Zm00001d016800	17.04027989	18.24630124	16.91719256	23.62550561	21.91569032	22.60010436	18.76508084	20.81039212	19.1784578	12.68404748	22.36039505	9.42185562	14.59083473	12.945871	14.82179264
Zm00001d016801	3.50426232	2.940001152	3.337960703	6.569922123	7.586780132	6.68694272	6.296995171	5.788997494	7.513266065	2.742384272	3.699448175	2.234624949	3.921382059	4.49227506	4.031414967
Zm00001d016802	173.0326961	191.2602754	190.1311353	219.8579698	101.8782501	148.8351575	91.88976078	80.74415586	86.21212264	4.152628603	13.34379398	1.384678108	257.6472837	272.961278	218.9182228
Zm00001d016803	15.2468614	14.93603872	16.81397056	24.15686981	26.94273486	24.73182076	23.32547683	24.85515549	22.42699246	13.92059136	21.70669258	12.44095766	20.45551322	15.76610091	20.31197513
Zm00001d016804	4.824205599	5.635299178	5.034175062	8.079920508	6.762729191	8.134596684	7.50526885	7.068509101	7.526492825	10.20220713	8.127185615	15.70829388	5.396215728	5.277564029	4.945207529
Zm00001d016805	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016806	4.614130593	3.655774999	3.846605109	6.41271387	7.517519595	6.814983341	4.533287063	6.06233664	6.253396322	13.5239789	10.23420234	17.80668526	5.195282151	4.510919992	3.14137423
Zm00001d016807	0.507996034	0.548419615	0.450956404	0.584815954	1.279873827	0.704434712	1.382876861	2.50395892	1.266769225	0.769901408	1.788046388	1.218228414	0.187405673	0.30597972	0.406601127
Zm00001d016808	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016809	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016810	1.242839447	1.182528058	0.83106439	3.967702577	3.319747239	5.25479195	2.454631567	1.75920434	2.374120827	0.279469647	0.826218806	0.202024732	2.03325587	2.20656731	2.077246053
Zm00001d016811	11.66475929	8.943584268	7.886704589	3.528791379	4.409361848	5.116401558	2.1538213	1.484415779	2.105455807	10.71257673	7.118949055	4.859761329	2.732427542	2.4679898	4.340700628
Zm00001d016812	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016813	0	0	0	0	0	0	0.023051713	0	0	0	0	0	0	0	0
Zm00001d016814	0	0	0	0.018392848	0.077729693	0	0.241259673	0.284520323	0	1.24072062	0.409144575	0.016336971	0	0	0.017050498
Zm00001d016815	0.09006083	0.098307688	0.21639387	1.407743495	1.637623303	1.48586943	0.378849888	0.180988101	0.340614606	0.057964075	0.280138335	0.10641632	0.712185451	0.434402513	0.395665915
Zm00001d016816	16.12659966	15.94950022	16.22776582	15.51905707	16.37623303	16.96267429	17.63076517	19.07036304	17.38380641	11.75817415	13.77086744	11.75283898	8.022410232	8.09989719	10.51384395
Zm00001d016817	5.095921653	5.662093644	4.974739794	14.86129673	11.5020907	19.20114472	13.74411647	11.47224872	11.56306036	0.191096812	0.427113762	0.102326841	12.73156336	12.42156375	14.45306239
Zm00001d016818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016821	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016822	3.02478253	2.492965542	2.700790667	5.974762382	6.88514715	5.559857982	7.329711812	7.124431878	7.419745076	4.706296062	6.406623025	3.400598039	6.200042357	6.357032565	6.156638812
Zm00001d016823	0.021195712	0.026696077	0	0.026434372	0.027928459	0.129838234	0.024767189	0.255572034	0.052280381	0.029232381	0.053456944	0	0.023718682	0.1394129	0.34307189
Zm00001d016824	2.922063797	2.946392241	4.043159832	4.684744624	6.634358005	4.571213616	5.42292073	5.454358641	5.258218395	1.260461526	2.341999389	1.332853392	1.970374392	1.810743134	2.268359414
Zm00001d016825	29.16881801	31.03846715	24.52601386	14.42132773	18.07413436	18.03819018	23.41742508	21.97495188	23.85630507	59.54940667	66.1149916	75.78423322	8.789282633	8.394199603	9.153945214
Zm00001d016826	45.95798244	51.40681517	74.56390449	251.6912152	140.8141972	256.7592086	144.5044074	100.5584083	129.7530156	13.25456002	12.72019057	5.56503449	269.4300144	243.4797693	262.9366282
Zm00001d016827	13.84578039	13.42818204	12.59934656	7.448417901	7.378346261	8.264754642	6.978655478	6.717761195	5.951764225	4.944690466	5.609797205	3.820060838	3.763928905	3.894108242	4.183249778
Zm00001d016828	12.976927	13.51283113	12.5529468	11.64167182	10.57887492	11.7736745	8.583013967	8.059481105	9.119986964	4.772619139	5.843904116	4.565897074	5.617484409	5.811118502	6.3452595
Zm00001d016831	2.652627477	2.672795299	2.688072947	3.142829822	2.433214922	2.987345209	2.217402741	2.70639341	2.164173698	0.281416201	0.720471953	0.135621246	2.271948805	1.308556525	1.427241239
Zm00001d016832	33.06043648	29.82526652	35.7919819	10.08075738	20.74880678	13.66826987	16.9892974	20.57541427	22.66926946	23.60301358	31.76161912	26.90613336	15.48838576	12.77714136	17.50176417
Zm00001d016834	10.61465723	12.73923775	14.94164186	18.43636256	12.25332775	14.11647722	11.3858594	11.81605095	10.80620607	1.175236765	4.34500652	1.744270547	24.39890657	24.4501512	19.93931035
Zm00001d016835	7.35928307	8.199122435	7.430235382	7.214874468	7.588659313	7.366772605	7.365462812	7.896018012	7.3732855	4.087153091	6.156125939	3.468649738	6.454414097	6.344142222	6.60875389
Zm00001d016836	4.009628672	4.039484026	4.399115022	4.76681473	4.996712389	4.768403499	4.60346371	4.192685162	4.17425722	2.447790948	2.840211736	1.642094149	3.583368481	3.29388148	3.479648515
Zm00001d016837	3.169931423	3.436501631	2.698356235	4.458858615	4.777629445	4.610666337	3.923940891	4.057831786	4.016511566	3.68314068	4.070396825	2.421175489	2.980342142	3.871678512	3.455691045
Zm00001d016838	12.64239842	12.12633544	10.97104514	16.45877347	26.79484421	20.75875714	26.02280655	25.26518331	24.9486222	14.20101626	20.37390004	15.68373543	22.47166969	21.22020625	21.35669187
Zm00001d016839	0.234096471	0.491408953	0.678850162	2.861158645	2.405960263	2.657681926	1.641250371	1.975869411	1.443529366	0.645715256	1.003690746	0.691523859	1.746409788	0.992282453	1.678014295
Zm00001d016840	0	0.115563555	0.019005201	0.152574227	2.941860206	0.449641131	0.821971476	0.405656283	0.792100409	0.885799989	3.046866447	0.440440364	0.102674831	0.184402409	0.035359759
Zm00001d016841	0.503578876	0.117455455	0.28974505	0.19771684	1.929178338	0.251351233	2.255655695	2.091471827	0.943079595	0.758825541	0.011759798	0.144625658	1.377495611	4.38565784	4.981094936
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Zm00001d016844	0	0	0	0	0.066717986	0.012406765	0.011833213	0.024421328	0	0	0	0.033654161	0.011332259	0	0.117080089
Zm00001d016845	14.2629555	15.20051519	14.26356621	13.74468159	18.07882966	12.8525802	15.816385	17.68839631	19.21692936	13.44834483	20.44221995	10.61061988	9.256381315	8.216435629	8.679656943
Zm00001d016846	0.004043547	0.05092863	0.020101331	0.020171748	0.005327967	0.009907798	0.00944977	0	0.024934077	0.005576719	0	0.004479258	0.054298313	0.008865357	0.060773605
Zm00001d016847	0.024789182	0.031222067	0	0	0	0	0.00724154	0	0	0.008547092	0	0	0	0	0
Zm00001d016848	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d016850	17.21177111	15.83245855	21.72362727	12.11508263	24.03154283	13.9241969	21.64164527	31.01362467	24.070593	33.50383895	39.35716636	27.22361632	18.66123424	15.00319452	17.00973682
Zm00001d016851	1.067527082	0.813238494	0.513571277	1.245478405	1.610810831	1.001994681	1.30776373	1.079582624	1.199765616	1.42480243	2.399250675	1.27792564	3.150268115	3.123840993	3.005891212
Zm00001d016852	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d016854	33.48512707	34.85707242	34.27323508	48.46017644	33.67022917	51.5760074	28.35853787	24.02794295	26.20801146	4.432949881	4.778977352	1.877867497	83.31400931	90.3762486	81.13831247
Zm00001d016855	2.959802445	3.594521955	2.748127428	5.005723508	6.369092215	5.454328332	10.98845503	10.65013135	11.30911658	14.93244443	12.69390605	16.52187758	9.699368714	10.37636752	11.99954933
Zm00001d016856	19.39052488	19.15679589	16.35806506	16.65774763	17.74863286	17.9566343	21.9251866	19.00908375	20.27302511	9.371602415	13.45870626	5.635890195	16.85973192	18.16231099	16.51197798
Zm00001d016857	1.57581201	1.341041255	3.969777981	0.318694764	3.310958017	0.156533945	5.623540732	8.473287779	9.086770025	17.03400869	28.03491997	9.388567385	1.23913487	2.894663475	4.776211124
Zm00001d016858	10.1677763	10.54096833	9.610462989	10.58005769	13.6447438	11.00785743	12.21941585	11.63054805	11.5186064	9.596191718	14.35455312	8.105311543	11.34155612	11.63361551	11.07632833
Zm00001d016860	66.62035349	71.92648372	67.05955268	43.1792196	57.2507304	50.61007446	56.68236929	60.0966571	61.56709578	56.88014175	69.26488899	51.52962183	35.44565561	28.513437	31.86053456
Zm00001d016861	24.27305071	26.06698185	24.58448433	24.66615011	23.11762535	26.37134657	20.64703835	20.28020205	17.46856162	6.416377653	9.678836675	2.818294101	24.94311378	24.61515839	26.25764284
Zm00001d016863	0.608150975	1.021291205	0.952322896	6.098014497	2.729857825	4.803206042	2.847235174	2.209652163	2.380059711	0.095057252	0.812911764	0.233543111	7.740013602	8.431234896	7.059179412
Zm00001d016864	251.1754154	272.8025005	285.7594084	289.6021503	392.3311945	264.1272455	275.1743972	380.9188422	313.4881589	177.9198753	237.3861745	124.0502278	353.5914806	324.1281574	384.6855731
Zm00001d016865	8.814348186	9.808393383	9.873952161	15.9191005	8.266226836	13.96679275	7.602060565	4.970623862	5.971399811	0.692586254	1.465010422	0.124542537	17.98250584	16.58088671	19.30666079
Zm00001d016866	43.927477	36.75294421	46.79290462	25.59746714	45.16136676	32.27633697	40.76538642	39.72060873	47.55008298	57.90090681	87.22347327	56.90780104	24.79337661	21.07067239	22.48560029
Zm00001d016867	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d016874	0.168419057	0.101450812	0.045502544	2.958893971	1.302555225	1.812171768	1.839630393	1.845334125	1.327521253	0.040396112	0.009233993	0.008111608	3.580860331	5.410370453	5.697542326
Zm00001d016875	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d016876	36.2870055	36.23247225	31.32519298	20.39251088	19.65283416	23.71754691	19.47635208	15.48906047	18.65942594	5.801503226	9.12614833	4.096120606	7.035561338	8.540913925	6.981227167
Zm00001d016877	15.63709093	15.52307644	15.85273362	19.16604783	14.89129686	19.88340834	22.8032144	17.89146879	15.14449025	3.639748085	7.652100103	2.555550713	33.88181766	37.1670854	33.31362885
Zm00001d016878	2.246446888	2.344366768	2.143773297	7.334374722	3.414598354	4.924480751	3.074968614	2.737725429	3.077225089	0.232366546	0.404691657	0.053325255	4.497989098	4.089731406	3.960728729
Zm00001d016879	0.089674164	0.533921541	0.121578889	2.297756944	0.569310904	1.448195683	0.809696566	0.589781618	0.452426377	0.06745934	0.277564904	0.063214435	0.912256991	0.670254325	0.377002077
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Zm00001d016881	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d016885	0.5203062	0.446382557	0.168688194	1.156740704	0.844554765	1.191747405	0.881127245	0.972879424	0.762578426	0.103998265	0.142635394	0.008353212	1.257299455	1.289550097	1.264116244
Zm00001d016889	0	0	0	0	0	0.011647519	0	0	0	0	0	0	0	0	0
Zm00001d016890	4.968502656	5.39155886	4.734587217	6.568604388	6.699846864	7.699290926	5.471739465	5.085813032	5.500069068	3.001708165	4.027783661	2.24051824	2.959195701	2.644137143	2.792251202
Zm00001d016891	4.005640658	2.961507214	4.106484888	5.353280187	21.42015507	6.426175576	17.23777178	23.44199231	19.42838674	13.14792111	15.33174146	8.214808066	2.028946094	1.349255046	2.616450981
Zm00001d016892	9.682176998	10.15415164	9.249395264	12.61454968	12.18784519	10.10641684	10.4613309	10.42922141	10.88205771	5.911068915	10.15019411	4.740660518	11.95424921	10.99604435	12.05211827
Zm00001d016893	40.1259593	45.17184262	42.69728218	90.43602014	39.595392	67.6672189	31.37914401	21.17638346	25.19939844	8.652025374	8.489327255	1.85207153	190.4205851	172.7871255	155.8172534
Zm00001d016894	4.360142884	5.863676808	3.920919175	4.140966066	3.215091903	3.213748776	3.914318301	3.718606236	3.460977062	11.04078212	9.342605957	13.29877483	8.931867202	6.0297284	6.045005912
Zm00001d016895	2.965501487	3.786460006	4.091280837	20.05303563	21.09682478	13.44930312	15.2754411	24.65278361	17.90056849	0	0.188695035	0.06027611	13.53274699	10.9456466	19.06133754
Zm00001d016896	1.728066265	1.649931858	1.64537383	2.833004782	3.525647722	3.030551431	4.991118781	5.099912594	3.050688157	20.51742126	3.831081018	1.358516597	2.970819293	3.628323742	5.639178618
Zm00001d016897	1.193342841	1.211809652	1.705553494	3.199813661	5.945653617	3.801221478	8.331666188	10.45900317	7.80932849	0.648040254	1.47662779	0.495724141	15.92451332	16.21330951	18.10813167
Zm00001d016898	9.068933036	12.34245234	9.53292181	18.50138664	11.33085314	19.24871636	10.84093897	6.964971993	7.767378074	0.035982606	0.105281616	0.005780295	20.5596159	19.99204924	16.02902392
Zm00001d016899	0.750822916	0.82745621	1.399687394	4.330821184	3.050401301	1.418118739	2.412675603	2.715964595	2.623589848	0.172584764	0.74955933	0.207931888	0.070016246	0.034294935	0.506364689
Zm00001d016900	0.180478336	0.303084175	0.074766336	0.225084751	1.12958175	0.036851776	0.931426137	1.976676775	1.891928653	0.72598569	0.701732662	0.39985142	0	0.016487224	0
Zm00001d016901	0.510707014	0.527784512	0.911375849	0.620600053	0.983515144	0.930507341	0.933395645	0.789482578	1.08203864	0.325084233	1.403628821	0.710799093	0.820611864	0.689052262	1.059776671
Zm00001d016902	19.29259378	12.54212822	16.49885062	23.70933616	63.36991807	30.25071248	43.74394289	56.21819664	42.78616462	22.71258608	23.75437328	12.02182148	58.02772675	64.64803346	59.89537904
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Zm00001d016909	0	0.075126395	0	0.297559684	1.729078705	0.526150748	8.140754605	7.738747966	13.06462096	202.0236814	280.0500166	226.9805779	0.253640877	0.156930751	0.248258828
Zm00001d016910	0.014652984	0.129188412	0.109264629	0	0	0	0	0	0	0	0	0	1.803687537	2.618287816	2.998530264
Zm00001d016911	20.40599752	18.891468	17.50593995	12.81557851	15.94669249	12.27354437	13.89287049	15.36291681	14.80124019	20.80219333	21.97376182	19.02356629	8.934603847	9.17639702	10.08592188
Zm00001d016912	1.887495383	1.716944247	1.840789475	4.446448906	4.974104145	3.73362725	4.31152119	4.923192161	4.364634908	3.516083631	5.991803366	3.506582898	5.20708069	5.208769346	6.114712531
Zm00001d016913	0	0.004048664	0.02396988	0.068152572	0.033884517	0	0.078878809	0.027131619	0.00396436	0	0.028375042	0	0.312949407	0.288954787	0.196968737
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Zm00001d016918	27.6581313	23.83582503	24.61262348	17.18139714	28.95685317	18.56308432	26.87355748	29.48885394	30.22640978	66.38080629	60.98874578	62.93365137	7.216138362	7.069130724	8.298268568
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Zm00001d016928	14.33978328	13.63399534	12.57755859	14.50387804	22.79293505	16.00854093	28.59565981	31.4820592	35.67102669	123.2607082	147.4096766	188.3933333	9.335923183	8.364569853	11.03398418
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Zm00001d016949	25.92305011	25.02866636	23.83023736	36.08797342	49.84161706	36.42707426	43.34156582	49.66337223	44.05514897	132.4306711	92.43268013	144.2163561	27.5318163	22.20734486	31.38130265
Zm00001d016950	11.8556076	13.76156394	8.555765925	15.36537049	26.13077183	10.73798116	16.83356336	29.60675749	20.27249279	108.8664692	154.1093982	138.0592125	3.337865399	1.836337896	18.39221768
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Zm00001d017090	8.229946788	4.940102421	9.523780461	19.22738893	33.51831974	18.77680485	19.02144764	26.92724756	20.21573105	1.156933272	2.230032234	0.100460183	5.454706791	4.250012646	5.425875785
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Zm00001d017092	63.96776988	66.3578135	80.21071305	233.6535417	119.2324908	186.9337302	115.9726634	100.3767695	111.1069137	8.271894543	13.05543143	3.427700818	343.1312465	425.6530454	400.3627543
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Zm00001d017099	31.09923253	31.6629815	26.46890479	22.94492559	24.39066222	22.966613	28.81411706	29.94892372	30.6669264	114.9342916	87.87344198	150.9639448	19.38659196	18.68200064	21.74931991
Zm00001d017100	11.12220439	11.73915675	10.32429824	8.313530186	11.0789445	9.065425643	11.7373802	12.62034761	11.00281125	22.21866787	24.48384524	20.93397167	5.550982838	5.975656702	5.613130443
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Zm00001d017103	35.15267449	36.25582769	30.98048421	22.1643797	18.88477785	25.87150109	23.03623503	19.26568064	17.42604153	27.85909326	24.86895118	25.66399585	35.8349848	35.56335719	31.57263595
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Zm00001d017114	3.708556019	3.479304013	3.850944412	7.634202578	6.329675474	7.333349941	8.41347748	8.217682354	9.197506179	23.37512276	26.77084662	34.33685412	6.804411477	6.121948562	6.519153104
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Zm00001d017118	69.95175128	81.05552144	77.24661454	137.2154256	64.45806947	104.9375334	46.3284396	41.07252746	39.54969249	8.635570894	11.75237453	2.262952215	256.8966019	255.7974013	236.9334552
Zm00001d017119	19.79229235	19.15045319	18.26393473	35.6547944	51.73717114	39.05465894	42.0683415	53.41888591	45.26158421	15.48890593	16.85309912	7.221588612	24.16367595	24.47262024	26.97173181
Zm00001d017120	171.071452	172.5545058	169.4835312	39.32917895	51.72304829	41.21634952	51.14824648	60.28853598	50.74201454	36.73107458	76.29187954	50.87963711	24.39826975	24.02029616	41.13027261
Zm00001d017121	1.794227562	0.442141876	2.553041048	4.515903294	82.06026802	9.931606169	54.36609987	77.7972575	64.68373406	4.357334449	12.16545841	3.146976124	0.094570208	0.206666531	0.691457304
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Zm00001d017126	53.21769467	53.08095272	48.07581579	43.68029634	50.33985798	46.11827008	47.06727528	44.90020676	50.29387541	50.94032982	50.62577657	61.91600783	43.80948336	43.96721117	40.7269078
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Zm00001d017129	13.89304658	15.21565468	14.55669043	16.50364683	17.1798155	18.49231447	20.53275442	17.521602	16.72698079	3.820222148	9.414726205	5.825219661	13.34309602	12.02153516	12.60336815
Zm00001d017130	3.315543345	3.389560967	3.005694996	8.592211596	6.004618777	6.558977729	10.2641472	11.37033944	11.04556845	4.691451822	6.633501699	5.135571992	11.9176104	12.96503374	12.64464966
Zm00001d017131	10.01972913	8.995807894	11.52677628	17.68772966	13.89530371	15.44284298	12.52727598	13.4023777	14.8969763	3.102192697	3.812662359	1.100232191	10.47689144	9.126629721	15.31610208
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Zm00001d017135	10.54994764	3.02707915	5.754063274	0.324394404	1.000769796	0.420640305	0.437666766	0.589624523	0.282290187	3.343370105	3.634278911	4.425752698	0.558851132	0.490438454	0.22854675
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Zm00001d017139	36.31157464	36.00233284	44.58732934	139.0358106	213.3606568	176.9269418	211.3506472	226.8489285	255.3343292	98.23069048	131.9361083	95.15308466	172.9691099	196.9923442	185.1028616
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Zm00001d017147	19.98739122	25.63515007	18.88339053	108.7058759	68.13531151	130.1456744	165.6113278	152.1319019	136.9072171	7.538697737	6.833417826	2.014018452	240.8662858	233.0991505	226.2223914
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Zm00001d017152	20.05373233	10.10962237	18.14910315	8.218311053	59.41502045	15.44853665	37.01744887	59.25640916	54.49301485	85.41834485	85.20345951	87.40999098	3.520404913	2.838425511	7.274265782
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Zm00001d017449	140.3453327	154.0696529	175.2273634	312.3680347	206.6364599	315.3849255	157.4886419	148.1169502	153.7427941	86.84347501	104.7360538	109.4035414	450.4253305	530.1412039	485.0174335
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Zm00001d017459	1.314031221	1.195297412	1.58359454	3.906640867	4.722078844	4.545031487	6.056479445	8.786343231	10.61551875	33.3804696	37.4255701	44.54356945	3.223092519	3.201082596	3.176507862
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Zm00001d017462	7.455572798	3.528976125	4.702947812	6.888348965	57.69101927	18.64302694	63.07144105	55.97704866	48.75422668	25.98376445	18.92526948	10.06057255	2.342534119	4.430752134	3.946798773
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Zm00001d017467	20.45566519	20.68855108	31.86469713	57.51095425	62.73579917	48.7537706	43.8465232	52.76353373	45.70333857	22.15352781	33.24747199	19.51551884	57.78873556	56.38701347	74.53155902
Zm00001d017468	27.86576866	32.17817033	27.303498	21.5836737	21.03053084	19.51966527	20.18966064	23.24491416	21.43567107	25.20858237	32.0522431	25.44420208	12.46471039	11.21711616	13.61266111
Zm00001d017469	27.96294744	26.66205068	29.85573327	29.31545851	35.5235427	28.41777865	28.57828244	29.24047591	32.10112305	20.92293268	28.23321242	21.53662657	24.56794335	22.58235878	24.65324091
Zm00001d017470	35.14734566	40.62184186	29.88881483	14.11521804	15.57111049	15.26608205	18.07184341	15.76990227	12.9350242	38.41026207	47.46033308	50.76881288	25.66177787	22.99535928	23.45915265
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Zm00001d017475	1.610952287	1.51221948	1.437831123	2.562768463	1.799169907	2.183773686	2.016012633	1.711295254	1.584423514	0.148427143	0.288391339	0.16764988	0.797857945	0.973318103	0.874860447
Zm00001d017476	28.72546165	29.38361498	23.85641259	15.28765923	20.96139722	15.85103052	19.5071392	22.46215406	21.57649488	51.04056065	43.07583632	46.66375478	11.43374199	11.54876731	12.67785147
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Zm00001d017502	50.93236238	38.73005797	42.44174622	21.59021512	25.9801013	29.05802514	15.98420635	15.66259348	15.11999223	125.3932824	110.466581	174.8042528	25.2583094	22.59899455	19.40267722
Zm00001d017503	0.455611065	0.672530339	0.811482954	1.009763829	0.695929071	0.796392613	0.640892418	0.741815326	0.586947436	0.208120154	0.365949153	0.077152397	1.061903156	1.040269996	1.580245698
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Zm00001d017555	8.159079725	7.06859901	7.449659474	5.320379026	10.2114475	4.368369792	10.43731862	10.16702282	12.08162047	1.066310889	3.395209525	1.037837904	5.333626125	4.307608153	4.711246711
Zm00001d017556	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017557	1882.820438	1966.276437	1795.803117	1371.062044	1096.945391	983.0025679	1290.12488	1059.366741	1130.699683	699.8225164	1068.128392	637.0312999	419.0436478	346.9020087	344.2114069
Zm00001d017558	100.2428058	100.8748707	89.5739354	10.91597279	11.00563272	8.841137737	9.6090379	9.495261282	11.86120409	12.33846614	13.49560693	6.549690852	15.99196843	15.46805209	15.85058774
Zm00001d017559	0.007195386	0.045313078	0.017884894	0.008973774	0.237024425	0	0.067262471	0.04337999	0.257343298	0.307632342	0.244987549	0.03188289	0.23350418	0.063102681	0.124782727
Zm00001d017560	54.8403632	56.18355933	54.68179057	20.18882443	22.49136991	21.43398517	18.51498778	19.7191477	22.26437106	15.96542787	39.36628165	13.40610705	22.40340496	19.56160994	24.88412307
Zm00001d017561	0	0	0.012223489	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017562	0	0	0	0	0	0	0	0	0	0	0	0	0	0.041572501	0
Zm00001d017563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011014503
Zm00001d017564	2.299793343	2.172448669	2.18930902	4.887266088	4.648002139	4.432892837	4.993241525	4.368039221	4.334394907	0.321949033	0.714125616	0.150845133	3.262884365	3.563680252	3.765906528
Zm00001d017566	13.83353587	14.69097693	15.41059329	25.11307175	27.30949094	24.70281578	22.03098803	20.75716216	21.70437515	1.872804217	5.300900189	1.22856999	14.44493063	13.41525038	15.6807166
Zm00001d017567	0	0	0	0	0	0	0	0	0.067712542	0	0	0	0	0	0.190431471
Zm00001d017568	5.202140218	5.293348792	5.337407561	9.180634578	8.367125682	8.160870244	7.41452777	6.68754902	7.226726132	3.21508306	3.403387059	2.211600607	9.849100819	9.330628943	9.0992425
Zm00001d017569	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017570	0	0	0	0.078451702	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017571	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017573	3.206003259	3.779429879	3.297939388	5.255157467	3.049028372	3.94151021	1.626703298	1.404076337	1.311826523	0.432380666	0.814222378	0.256333906	5.625756622	4.598760756	6.627826191
Zm00001d017574	6.393672872	4.566805558	6.206117467	8.995795155	18.78745752	10.84464808	13.47193659	16.46105824	14.64843734	14.09444956	15.46624944	10.71326777	5.508633061	5.841986037	5.825549422
Zm00001d017575	13.40748021	12.59587013	9.615287322	11.11550464	14.53851427	7.634049776	7.948893948	8.016929032	6.641163398	8.639296404	10.98972075	6.160010042	20.41446349	16.90241321	15.90745716
Zm00001d017576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017579	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017580	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017582	0	0.013348039	0.013171046	0	0	0	0	0.012778602	0	0	0	0	0	0	0
Zm00001d017583	0.005849908	0.058943842	0.050891976	0.065661758	0.046248668	0.114670995	0.041013702	0.021160971	0.007214558	0.016135974	0	0	0.307673016	0.076954489	0.101449371
Zm00001d017584	23.87760131	23.6815713	20.91556783	33.22218212	35.83480548	34.47195171	38.06752323	38.10493018	39.07731898	67.40068702	63.71980544	108.003085	35.73822355	35.94254367	32.69973461
Zm00001d017585	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017586	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017588	2.24065354	2.549443655	0	0	0	0	0	0	0.013349504	0	0	0	0	0.023732204	0
Zm00001d017589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017590	0.368410522	0.01008727	0.179163266	0.019976766	1.466857663	0.421917213	0.842258539	2.153497574	0.582756272	0.474961966	0.646368678	0.115334999	0	0.035118657	0.00925941
Zm00001d017591	0.016333613	0	0	0	0.021521931	0	0.019085827	0.196946191	0.080575498	0.022526745	0.02059721	0.090468175	0	0.05371644	0.377677708
Zm00001d017592	0	0	0.024411853	0	0.284701752	0	0.022952352	0.402636115	0	0	0.792637452	0.087036624	0	0.086131533	0.136257001
Zm00001d017593	0.545658828	1.162093021	1.023384564	1.670372231	2.287681319	1.762426821	1.820064877	1.937933373	1.456016209	1.121988832	1.463762087	0.516535202	1.343341451	1.305098987	1.342002912
Zm00001d017595	11.76389956	13.23534108	13.95062674	5.876369248	6.883549604	6.14390227	6.138114689	5.742277362	5.891062644	3.844618627	4.498015336	3.207921272	3.980745087	3.786271868	4.01819114
Zm00001d017597	2.585310423	3.498064076	2.04888959	5.169373193	2.31421587	4.274787064	1.811466608	1.982193585	1.114786447	0.019378094	0.059060858	0.046693852	15.59728813	14.27835968	10.10943855
Zm00001d017598	0	0.008665813	0	0.102970326	0.117856131	0.126440353	0.112555469	0.049776737	0.016970733	0	0	0	2.155809728	1.561291166	1.455693814
Zm00001d017601	6.676649124	7.35254456	7.397737685	11.05837892	18.51424123	11.25264691	17.27511437	21.84076011	20.45469921	6.711267379	14.16609028	5.253571086	8.607904928	8.326048166	8.954584744
Zm00001d017602	0	0	0.067356392	0	0.089265889	0.232396283	0.237485188	0.09802416	0	8.128716736	4.425297251	9.95115855	0.015162091	0	0.046994486
Zm00001d017603	1.68847909	1.692169666	1.940499175	3.690807027	4.270216939	3.43657492	2.036632599	2.462808201	1.500197	0.676071591	1.23632495	1.236890982	1.980887915	1.462863443	1.553293616
Zm00001d017604	16.89287679	19.61366086	17.79704925	8.515675357	12.46654296	8.041801853	14.58188759	18.98616718	15.72522895	1.394345836	4.852279766	0.693699183	10.83225128	9.064916017	11.81946763
Zm00001d017606	0.093319003	0.058767815	0.038659044	0.019397235	0.040987159	0	4.688859992	3.88199092	7.250557329	65.70251905	89.23934453	93.450599	0.017404493	0.017049928	0.107889502
Zm00001d017607	0.121904525	0.266435671	0.138135364	1.480096048	1.440919533	1.146478754	0.615867042	0.583633226	0.623477483	0.034614267	0.126597484	0.023830641	0.670038764	0.448073717	1.272589642
Zm00001d017608	13.94520654	12.1291941	15.86701961	44.88055741	69.47428158	46.84050881	64.1234437	73.28784173	63.48844651	26.26081245	30.97302324	15.2050714	33.64761191	32.40651453	39.87879237
Zm00001d017609	3.976182554	4.338976917	3.64057776	4.435911047	2.873375856	3.425180396	5.089007362	4.26624115	3.961299108	1.593732652	2.456122493	1.135569855	8.67647811	8.482693653	8.881566291
Zm00001d017611	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017612	1.298767222	0.344379394	1.161027733	0.341003398	16.24249379	2.763606802	16.50733151	18.65484173	10.56586508	1.288417175	7.556807308	0.681496763	0.356966161	0.574497323	0.10537208
Zm00001d017613	8.500189793	5.655603023	8.004799843	12.24901326	43.33123851	15.34753112	28.90843925	34.66551273	42.92706022	7.289503845	11.93806522	6.431605901	2.285180861	2.96602402	2.255138877
Zm00001d017614	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017615	2.11683622	0.185150212	0.876936762	1.173345024	8.328987336	2.665453286	5.531072578	5.388447798	3.589638444	0.324385127	1.149324305	1.042193377	0.065800214	0.322298639	0.101972981
Zm00001d017616	11.08374049	9.663376599	9.743225708	11.80025882	44.71235903	21.21241311	36.5375508	36.19737476	37.24534119	8.397703234	11.16857517	5.63279392	9.47876246	8.98930963	8.944720389
Zm00001d017617	8.52884318	8.477841357	14.18485438	16.99802869	27.35131397	15.28934539	17.31828654	20.41645404	16.2932528	3.459612016	6.721965547	2.084087961	5.403616194	4.903965984	8.289592568
Zm00001d017618	2.682535261	3.107284526	3.440974773	2.458771544	3.435266534	2.441756852	4.582222734	6.365133294	4.225070538	1.218361395	1.222685431	0.823452879	1.410504586	2.04312955	2.055129229
Zm00001d017619	25.88948646	25.28776228	40.95813637	7.495485312	18.18790325	6.311267181	18.52155008	27.79253277	19.79267047	2.094987276	10.2439775	2.048514157	10.12512713	9.556855286	10.53720805
Zm00001d017620	0.620235165	0.676154739	0.725487142	1.475557973	1.229310058	1.877333148	1.662649823	1.822521885	1.471992705	0.596628096	0.795281591	0.236721034	3.756105999	4.330941715	4.416950151
Zm00001d017621	6.015913154	5.961103175	10.78968269	31.68238033	35.42662465	26.9837426	33.6154546	35.90813735	38.43262218	9.968119855	17.16795691	6.869449472	66.09164921	79.41956017	76.07886185
Zm00001d017622	1040.09045	989.901539	881.7089198	106.1732191	114.5496505	106.4766257	171.0419355	162.0059893	197.4769323	38.8148192	45.27832566	30.37195587	156.8241445	123.5457455	107.6879504
Zm00001d017623	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017625	15.06756631	13.45933016	13.47564822	9.595718331	8.748782751	7.951255537	5.519185459	4.913535508	6.13266037	0.235808886	1.509274231	0.299888565	2.814167827	2.272633679	2.347397832
Zm00001d017626	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d017630	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017634	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017638	0.044941597	0.06792493	0.02234142	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017639	0	0	0	0	0	0	0	0	0	1.397454454	0.078631081	2.003132511	0.017444184	0	0
Zm00001d017640	7.136359045	8.080763055	8.822367633	7.72805592	7.430096562	7.169426863	7.299226598	6.685926058	6.884801507	0.423414019	1.216745713	0.395613764	5.209359514	4.82849741	4.961952918
Zm00001d017641	0.07986382	0.018288869	0.105270445	0.253534125	0.098854584	0.169003458	0.127255738	0.093379479	0.062678152	0	0.039673967	0.021447155	0.18686492	0.132650794	0.13710122
Zm00001d017642	3.26477228	4.248051351	3.363820474	0.142209494	0.158155016	0.088230722	0.056101271	0.079599806	0.022204245	13.35071567	10.07298497	13.01698041	5.782287678	7.947392069	8.707767404
Zm00001d017643	4.255446694	3.858096523	5.433056608	0.129630093	0.241688591	0.037453337	0	0.051605892	0	0.615566476	1.117969751	0.596021816	3.879372856	3.887475083	2.057017581
Zm00001d017644	0.259697795	0.420544715	0.184430391	1.249266179	0.684379888	1.227209139	0.238430402	0.424970866	0.366033606	0	0	0	3.632627144	2.684218513	3.452830045
Zm00001d017645	4.336574201	1.419484958	2.984020925	4.797270022	21.2098631	7.083862337	27.45496171	30.84177358	23.87049134	2.905950093	6.797079225	0.759932671	40.46713158	34.19051392	34.67081357
Zm00001d017646	0.15360937	0	0	0.344834897	0.70841008	0.225830995	0.43078212	0.444523044	0.303108728	0.296593704	0.116223806	0.527500616	0.739143415	0.791442331	0.461742824
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Zm00001d017649	8.836285339	9.671088002	7.102459959	19.52221349	35.06355639	22.41160973	41.69042813	39.63626165	39.5466019	77.71891822	69.85882795	67.81108262	16.37649634	14.60104544	17.90468684
Zm00001d017650	0.25794781	0.369188887	0.859732706	0.467929191	1.714869685	0.459667434	1.767370469	2.134771724	1.706286375	1.09959881	1.212409001	0.54550913	0.03936162	0.154238971	0.13555585
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Zm00001d017654	3.932185245	3.69125219	4.310402363	5.298825252	6.238331484	4.840866933	5.286682567	6.027827123	6.552344026	2.48011368	3.599380908	1.583962315	3.994112388	4.208892133	3.78582325
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Zm00001d017657	85.89692236	83.07397668	76.2293947	9.831267548	17.82423679	8.795743075	10.53778718	16.73503617	11.39804034	21.45708021	21.85732539	17.97840714	10.127461	7.747606925	9.113760643
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Zm00001d017659	15.69730321	19.36537868	15.10802928	35.80063372	16.51685996	23.15184747	13.56312334	16.09625947	12.75040298	5.666911566	7.712570996	2.412192298	48.75618139	47.36852555	50.83254242
Zm00001d017660	4.906378787	4.805106943	4.658905642	3.751960641	3.414072295	3.571563607	3.248361019	2.905661476	3.086853654	1.337850151	1.944333527	0.993977582	3.07656392	2.857176981	2.901150829
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Zm00001d017671	0.160460492	0.134733722	0.319073235	1.827756866	2.678116356	2.254186798	1.687482776	2.695805016	2.031694164	1.711398057	0.984749698	1.267956071	3.028586139	3.260058296	2.250905944
Zm00001d017675	13.755287	13.9212697	15.38194391	22.37015834	28.92849231	25.28073741	26.3464495	29.36077213	27.72925393	19.44609308	24.31493965	15.25610474	15.51488337	16.10641128	15.24704527
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Zm00001d017685	20.80918516	22.46442398	17.07958276	14.08725107	10.78191296	13.7859253	16.32184335	12.70950832	14.61442579	8.877241295	12.73250402	10.17815981	10.69817454	11.43725768	10.10148994
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Zm00001d017691	11.17112438	11.04613151	12.62585294	11.729725	12.94174003	11.88726504	11.16383743	12.87170562	12.94508529	16.61090782	20.36756135	18.57328705	7.982334736	6.612501533	6.962356985
Zm00001d017692	1.118645498	1.851569154	1.131889774	1.648224243	1.682684625	2.110317879	1.937570738	1.844199288	1.660403713	2.641868459	2.683976021	1.650418583	1.401351588	1.39993366	1.899902102
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Zm00001d017699	12.21501279	10.26863576	14.22832968	1.935618445	4.569737906	1.690171708	3.25765771	3.280706747	2.38668917	31.8300064	33.47699002	25.19463234	7.933375481	11.27954892	5.083999818
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Zm00001d017702	0.327907825	0.116487495	0.564265121	0.136317471	0.066471795	0.082406554	0.049123115	0.010138005	0.031107792	0	0.063615736	0.046569411	0.206991448	0.193557577	0.038882687
Zm00001d017703	7.601487759	7.112665209	6.334569355	5.02282854	5.138530814	4.955715529	3.934562223	3.709785242	4.228676598	0.625258598	0.8936311	0.40469508	2.541549153	1.819078006	2.218716697
Zm00001d017704	44.22756694	40.46989332	45.66674124	37.2665493	46.01687785	40.942323	51.22794935	53.54884885	53.5301084	137.5320351	111.6689171	172.2906083	26.45767708	26.64335413	30.76604571
Zm00001d017706	0.05814797	0	0.016059215	3.585692627	1.481290643	3.474890835	12.24536178	11.3895025	10.90031127	0	0	0.007157076	2.696767039	3.109283205	3.077502161
Zm00001d017707	1.684586068	1.61497452	2.324400015	2.459371206	4.223818189	2.26969158	1.999437872	1.524753338	1.76129257	0.182938734	0.178420332	0.239998141	0.564047436	0.547709637	0.874124794
Zm00001d017708	32.93146773	33.74447028	34.65266257	40.7986208	46.64986503	39.78555247	42.21921193	45.75797827	41.63858262	28.75513311	33.48411388	18.7693553	44.91914606	39.33488348	44.90724265
Zm00001d017709	1.096568238	1.122976286	0.891563331	10.40392675	10.49232861	5.876007376	9.855540336	12.25826166	9.946891227	0.127206874	0.465243722	0	0.951858792	1.2470348	2.263051053
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Zm00001d017714	3.837849626	1.455333361	1.604550365	2.183656945	3.417894258	3.09125854	1.191740747	1.443006655	1.294159247	0.065044883	0.475787552	0.052244493	1.504126495	1.712602404	1.124604998
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Zm00001d017718	0.021253376	0	0	0	0	0.013019147	0	0	0	0	0.020100891	0.005885881	0	0	0.006142951
Zm00001d017719	20.73879796	16.9783853	21.22983383	24.80952864	41.63681763	19.55736986	23.21293672	28.2307624	21.26903659	1.994628604	8.258617763	1.209131538	11.11511399	10.3203112	14.73316215
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Zm00001d017726	3.804560492	3.851611646	3.588156955	5.776866771	4.219034772	5.862196247	4.781941323	5.129683825	4.204013365	2.815828293	3.96970566	3.18828895	5.424946258	5.81727839	6.571890281
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Zm00001d017729	14.58842442	14.03252973	7.877886059	7.768853032	10.07782272	7.472497639	9.249686619	9.234456775	8.986360374	12.02060441	14.60215887	12.89219039	7.081922767	6.359511929	7.163573416
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Zm00001d017754	20.38608831	21.31421468	21.01743375	15.2854773	14.91247073	14.38471298	16.10263564	15.35246768	16.53164475	35.88398956	26.60685767	57.17757843	13.52391797	13.82290517	14.29108841
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Zm00001d017783	8.866025736	11.85247245	8.42283328	4.565648905	4.779783902	4.559901882	3.998577635	3.804606687	3.802330257	0.79679321	1.569170933	1.347670695	0.870295394	1.260579255	2.305683272
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Zm00001d017787	31.10104499	29.21105573	32.37112935	57.95879566	40.10883806	51.52879595	58.78203823	47.73640309	55.62441624	41.35790281	34.74351781	55.97288321	50.96999545	53.42314696	50.73306806
Zm00001d017788	0.058927732	0.018554924	0.009154445	0	0.009705742	0	0.154928376	0.150988543	0.109011356	0.386037526	0.269372884	0.179513036	0.008242753	0.056523818	0.161805188
Zm00001d017789	0	0	0	0	0	0	0	0	0	0	0	0	0	0.021048998	0.022199174
Zm00001d017790	7.2247478	7.035055132	7.249914531	20.15957115	25.55517351	17.93886898	23.20174051	24.9466631	21.8973151	7.750925217	9.336450591	5.348214173	20.44687782	20.30213518	19.34121789
Zm00001d017791	13.33684358	12.15887546	12.82881389	8.473710805	15.44044828	8.953453123	11.84097273	12.52837487	12.6766952	59.33841664	50.36900527	89.01949133	7.500139772	8.399244194	8.875011101
Zm00001d017792	0	0	0.229603375	0	0	0	0	0	0	1.019182999	0.931884572	0.613961048	0	0	0
Zm00001d017793	4.869806689	5.701341106	4.995114922	6.128045038	5.70478868	6.856186799	5.489883886	5.03555388	6.095864549	2.854664905	3.922126735	2.673012078	6.082654358	5.954736291	7.23395511
Zm00001d017794	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017796	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017797	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017798	1.606853196	1.784029147	1.530915266	1.440935438	1.476763702	1.61871756	1.430959756	1.558347649	1.43735195	2.267838094	1.953536037	1.890250336	1.288061057	1.369344153	1.329102365
Zm00001d017799	0	0	0	0.166655796	0	0	0.228211956	0.123942829	0.228186176	7.726250067	0.80366286	1.753558923	0	0.022536672	0
Zm00001d017800	0	0	0	0	0.014117442	0	0.162753041	0.090431641	0.158561972	0.709274689	0.081065194	0.284847132	0	0	0
Zm00001d017801	0.077994	0.04210017	0.110778483	0.333499655	6.768042191	0.900931313	8.046005896	17.69352064	10.74559966	28.93541106	35.19630055	24.03104587	0.024936511	0	0.05152669
Zm00001d017802	7.870400964	8.98050133	8.223098998	13.99809528	12.51017536	12.77931021	9.240692975	8.205768508	10.38639317	1.343801231	3.295576323	1.121185589	14.60546628	14.52320402	14.19030089
Zm00001d017803	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017804	0	0	0.013915356	0	0.059013452	0	0.052333618	0.054002936	0.069043501	0	0	0	0	0	0
Zm00001d017805	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017806	1.105204957	0.886691131	0.846710121	1.680470786	8.248869981	3.032650171	5.059582909	5.805136212	5.04132249	0.741249651	1.995089533	0.511520888	0.53367034	0.365129023	0.498854534
Zm00001d017807	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.038025209
Zm00001d017808	3.961889415	4.079099016	3.967393267	4.205961877	4.59902252	4.652626861	4.54743445	4.334720604	4.392760143	3.436298769	4.087389655	3.778389616	3.290648235	3.094376083	3.294089891
Zm00001d017809	4.046357895	3.014894431	5.554309515	12.1369766	22.45891167	10.53295938	13.57622076	17.42181949	17.97622751	5.229456101	11.31455695	4.794626749	3.917486965	3.952311657	4.042124869
Zm00001d017810	6.22896742	6.901450195	6.461462357	8.811051948	10.53484295	8.536695869	10.40492543	10.01007614	8.386581881	16.39366697	17.12090059	16.73515575	8.594987407	8.06367471	8.231625722
Zm00001d017811	3.993220456	5.856079625	3.526794777	7.158996281	5.541788121	9.671236541	7.258343765	5.048973286	5.905138006	1.109110911	1.025766114	0.430063317	4.665075007	3.860719292	4.071679782
Zm00001d017812	15.66840977	17.0006476	17.56200016	12.82992387	8.848040788	10.54438197	7.908160738	6.87001298	7.454277421	0.800345194	3.221782852	0.500916401	11.93354349	11.64086183	10.57786982
Zm00001d017813	0.576845313	0.435923284	0.573524042	0.28776658	0.380039163	0.141342887	0.43812844	0.62598973	0.355705126	0.159112958	0	0.127800612	0.903711799	1.075008751	0.866985472
Zm00001d017814	0	0	0	0	0	0	0	0	0	0	0	0	0.15336892	0.150244478	0.039613564
Zm00001d017815	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017816	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017817	6.64306437	7.679822172	6.461233006	5.483270597	7.822918829	5.229189141	16.38733274	22.0565865	15.6334908	3.629344155	3.682694077	2.986214299	5.458637468	4.714185018	4.897575571
Zm00001d017818	17.37454514	17.11834321	18.38074073	25.8067714	24.62120755	24.89051159	19.21483482	18.95507232	22.96355995	3.752828703	9.055521856	3.363102319	10.78629272	9.6804263	9.187909319
Zm00001d017820	5.920103662	3.137389181	5.186450115	0.806917647	13.51252356	3.345070403	6.698393533	7.138297466	8.56985059	20.80015999	32.79082619	18.73515843	0.695059525	0.673807021	1.585817396
Zm00001d017821	11.94286036	7.536858849	14.49294307	5.451542742	17.86820957	6.500214456	9.364154698	11.23192598	11.95906519	40.81414021	43.57168273	48.19372349	3.27785906	3.222098022	3.984853759
Zm00001d017822	0.029980776	0	0	0	0	0	0.140130149	0	0	0	0.226840323	0	0.134197805	0.460123714	2.322345194
Zm00001d017823	7.286515177	7.757622898	7.766833959	15.80177354	23.63427457	16.9038075	18.4827599	21.6819829	20.17467501	4.029672096	9.529687677	3.516371455	8.527225946	8.946657297	10.39471941
Zm00001d017824	0	0	0.235981247	0	0	0	0.221872735	0	0	0	0	0.210338507	0	0	0.658575503
Zm00001d017825	9.08611239	3.885305986	5.17561331	2.500691583	10.34642005	4.827185774	8.175839628	9.992080173	9.199738496	2.12721785	2.988243194	0.838765247	2.039806633	1.137466273	1.831853091
Zm00001d017826	0	0	0	0.044382221	0.031260488	0.043598609	0	0	0.036573586	0	0	0	0.033185574	0.006501903	0.329144893
Zm00001d017827	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017828	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017829	10.67466794	10.73773987	11.11293198	7.83257104	10.59638608	9.494693602	9.20678628	8.94059165	8.50695712	7.394072739	7.780877256	4.756478342	6.958268949	7.724333761	7.255399027
Zm00001d017830	0.121928508	0.107498585	0.102284848	2.623103059	8.414499222	3.312481651	5.474542785	5.891747413	4.586335798	0.256443259	0.922534559	0.128313524	0.607166523	0.671653116	1.300411294
Zm00001d017831	0.829883209	1.265291704	1.212325382	3.59524349	4.930309986	2.978812637	5.90337425	5.582575079	4.776222062	0.160638002	1.193387857	0.056448673	4.097534889	3.216035857	5.234938822
Zm00001d017832	4.112215092	3.844092477	3.58407263	3.919579284	4.540646642	4.202874342	4.117199356	4.448678729	4.279932533	2.936441612	3.310098655	2.321793876	2.434591938	2.731946644	2.359229193
Zm00001d017833	6.840177078	5.846868301	7.775574205	16.94780062	21.94349677	17.16255301	18.75631289	21.48799881	17.04038748	9.974599193	15.08919435	8.779492805	14.68619952	14.75693447	17.2187399
Zm00001d017834	0	0.028367331	0	0.056178484	0.014838432	0	0	0	0	0	0	0	0	0	0
Zm00001d017835	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017836	8.927696128	9.616977765	9.00977172	10.86913449	14.66021286	10.53331264	15.70031029	16.78791416	16.66036069	18.30713718	28.85067354	20.32468979	7.110946199	6.12598192	6.247305425
Zm00001d017837	5.221651845	4.035696026	7.521902236	1.983266289	32.46247026	6.978805056	35.08362628	38.23464124	27.48600207	129.9219453	107.5695717	96.7820056	17.84830804	25.60259811	22.63853291
Zm00001d017838	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017840	1162.043138	1095.727067	1308.294628	681.3622873	490.2895038	504.6179681	644.6203535	760.3781805	553.6563128	168.4952911	209.2036832	167.4467992	318.8906464	296.6347789	313.0202576
Zm00001d017841	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017842	0	0	0	0.067838872	0	0	0	0.010931297	0	0	0	0	0	0	0
Zm00001d017843	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017844	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017845	1.403562021	1.971767509	1.559852347	8.634488797	6.775201641	7.275042586	7.049113638	7.38787353	6.041790273	1.74961425	1.855029851	0.239200356	9.016025862	6.79070187	12.7944382
Zm00001d017846	2.622559302	3.039065336	3.027192303	3.919661249	3.438027229	3.843450648	3.492059715	3.421896832	3.643336908	1.138180038	2.252021903	1.233000634	3.928611269	3.514281811	3.834115851
Zm00001d017847	31.68275278	31.67956078	36.14224623	44.61185228	72.70252501	47.38540878	55.46215236	60.86423189	53.83876818	34.54288244	40.48857516	21.36385754	54.19845439	50.28609751	62.04164873
Zm00001d017848	13.18143532	14.28770977	5.135862246	4.318249426	3.935203631	4.11557652	3.558162759	2.999357808	4.038447418	0.310141199	0.807997258	0.344655616	2.444045013	2.662721983	2.489468823
Zm00001d017849	6.649379162	4.978037157	5.734987229	2.511932193	19.54076242	4.343619535	15.03182185	17.33273549	14.30839126	18.62657204	16.43962869	8.1911036	1.404811329	0.839326147	2.687466532
Zm00001d017850	127.4485479	91.72313866	178.1735898	274.5586312	423.7020327	214.0889069	265.9452706	339.9230123	272.6355563	29.94268382	156.0851023	14.71490523	110.3778947	84.70946258	173.7695697
Zm00001d017851	12.13944301	6.221980652	19.84622114	4.155083418	149.3081257	10.97842274	117.8647634	153.6696656	152.5939123	314.8818691	207.8924846	149.3650858	1.756976301	2.01504359	4.604494272
Zm00001d017852	8.91010768	6.510655214	15.80722142	3.138588487	117.2244979	5.49971503	247.3318039	153.7723528	146.123666	1387.475678	559.9954022	476.4073006	7.687330966	9.394764796	46.39516975
Zm00001d017853	11.23185689	11.64812657	8.656347376	3.176012038	4.532898488	3.415509298	5.257078695	5.036898847	5.030577188	4.732206553	5.52126382	5.770698808	3.589659711	2.99737734	3.243807183
Zm00001d017855	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017857	52.41781222	40.72683167	54.3939138	69.08052298	159.0291395	78.72763412	123.5648836	144.0154816	134.4272402	72.65176567	102.4372715	57.33009956	77.05992943	78.64361287	83.98619379
Zm00001d017859	0.992467072	1.468768741	1.182047624	2.599299946	2.092353548	2.046778398	2.551335121	2.253765001	2.3051758	2.041757109	1.668710425	1.740732473	1.656648762	1.387171001	1.587274533
Zm00001d017860	1.685069377	1.591763337	1.653323038	8.516789369	9.068279281	8.735843164	12.68452833	10.60818752	11.02517443	13.45467015	11.58084967	15.65033112	7.711302726	8.234766808	8.049018796
Zm00001d017861	1.795212535	3.710485056	2.745963597	6.314877736	3.517857465	6.598142962	2.205280521	1.637339019	1.816611232	0	0	0	0.36057188	0.227074041	0.478964002
Zm00001d017862	1.917500226	2.30687487	2.220081592	2.233498933	2.270353709	2.354740707	3.540569221	3.577163058	3.602988175	1.178820164	1.454239321	0.751457452	2.510116002	3.480249574	3.628591987
Zm00001d017863	9.709757467	9.847252682	4.685021371	6.620053211	3.663640529	5.83576711	4.618800482	3.210700062	3.294688969	0.17430401	0.384695735	0.149657491	3.964845694	3.100570439	2.781258611
Zm00001d017864	0.4266781	0.309190563	0.414051747	2.704409161	5.029092853	2.742589828	3.148524939	4.320194479	3.669070246	3.111580076	1.894247626	1.100702577	0.778335793	0.589479939	1.310956623
Zm00001d017865	0.012360971	0	0	0	0.020359241	0.018929851	0.007221897	0.007452259	0.019055632	0	0.015587581	0.006846461	0.013832323	0	0
Zm00001d017866	1.439686689	1.803567974	1.074507494	3.879852323	3.275246606	7.353162188	2.836864043	1.200726772	0.961548686	0.516353442	0.637612157	0.354879424	10.16303996	9.135146353	6.889941794
Zm00001d017867	1.394783659	1.20821871	1.04591602	2.935888056	7.90190254	3.907890494	5.432682389	6.464608248	6.125784334	3.603774927	6.018738775	4.485289836	1.817649475	1.690298887	2.544715331
Zm00001d017868	0	0	0.003840563	0.015416067	0.130299142	0.015143881	0.032498538	0.026082905	0.076222527	0.025571725	0.042865848	0.003423231	0.020748485	0	0.071454847
Zm00001d017869	0.257740872	0.372974073	0.231721657	0.91645518	0.606965075	2.207015606	0.845839742	0.55543092	0.277287342	0.714715876	0.34230778	0.455606875	10.90474244	7.757953183	7.779274532
Zm00001d017871	0.015015084	0.009455777	0.018660791	0.009363081	0	0.055186597	0.096498191	0	0	0	0	0	0.050407083	0	0.034718972
Zm00001d017872	33.97537694	35.04874747	33.23827748	23.72879311	21.44216908	23.83167619	23.92327778	22.12460912	22.55651184	23.17225791	27.82387303	24.4845392	21.04411995	20.6013435	20.17851608
Zm00001d017873	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017874	4.780224867	5.40151307	5.290890934	6.053005989	6.271082349	5.087532867	5.341242346	6.432319874	4.96653623	4.717327891	7.676818046	5.306903299	6.30904232	4.196786941	5.441939886
Zm00001d017876	4.658346373	5.077622109	3.832635104	3.63255824	6.728985486	5.258104974	6.161722823	6.843786369	6.51817411	15.6093179	17.92702673	18.04504069	3.620926589	3.50222661	3.994661145
Zm00001d017877	14.84185946	15.24431722	14.00299728	20.57839057	21.58541092	20.3260365	22.67580066	22.34047378	26.33044651	17.43260055	22.81074845	17.45230696	15.04903211	14.81119944	14.20267415
Zm00001d017878	0.036750629	0.077145922	0.010149731	0.4583379	0.269024139	0.090049098	0.023857283	0.014770964	0.095683404	0	0.072090234	0.022617044	0.19648675	0.09848014	0.118024284
Zm00001d017879	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017880	3.35635064	5.149893694	1.184669157	14.54113571	11.57514218	21.18073737	21.87819871	18.85572955	16.9717946	93.61018192	62.50004484	101.6868198	43.68928958	43.55821749	42.7887984
Zm00001d017881	5.146285306	5.009234508	4.056306814	3.341468774	3.892533475	3.823866512	3.773135324	4.313046403	3.836400651	11.15264797	8.415897242	9.516786902	5.443464633	4.371334222	5.286036411
Zm00001d017882	26.90676405	25.11919454	25.16414333	23.97071389	33.13553007	23.31583938	32.74697484	34.39618455	32.72726724	14.59184463	26.86018589	8.050285811	26.67816853	26.90970757	26.39371023
Zm00001d017883	7.566317881	6.603380798	7.299085814	9.513485069	10.18243355	8.567072736	7.962335512	8.71119896	9.748590258	3.647346269	5.868613618	3.062735806	6.543344037	6.436398144	5.648478248
Zm00001d017885	94.47305445	87.929529	80.01452385	21.40406174	14.04460939	15.04540212	3.274045967	2.950572581	2.743063083	16.51580974	18.6344567	13.57188107	45.36460993	44.87923421	42.3937356
Zm00001d017886	0.124567052	0.117669497	0.058054612	0.252451263	0.194910746	0.095382301	0.254724052	0.394273714	0.076812861	0	0.147265358	0.034497432	0.731821286	0.63156584	1.431164077
Zm00001d017887	5.811704462	4.654165035	5.647436053	6.380615877	8.586353612	5.853085841	4.652086408	4.805994682	5.330433312	0.186182133	0.499162606	0.167285119	1.625870977	1.600273425	1.931086663
Zm00001d017888	27.16968763	24.87184514	30.67085169	2.603764754	8.660690274	4.780426339	4.508958717	4.262158266	4.048632378	4.855207479	14.05334933	7.001979499	3.738034272	3.275175345	3.886947992
Zm00001d017889	8.627477717	4.286830878	4.52455583	1.454348749	3.135560291	1.335749095	2.48152807	2.091986483	1.999398289	6.930020324	7.257002635	5.020117935	2.705360739	2.078625062	2.214129014
Zm00001d017890	9.267751399	10.14697644	7.666343734	11.28953896	9.998449205	10.25252666	9.848037564	9.203302486	9.20242712	2.393376331	4.011232422	2.136430915	7.173144417	6.998497241	6.925514829
Zm00001d017893	0.01861298	0	0.005783067	0	0.006131333	0.017102586	0.010874634	0	0.045909933	0	0	0.015463961	0	0	0.010759573
Zm00001d017894	1.588637657	1.465444231	2.530522304	5.078774009	5.827723297	4.312924369	3.564488986	2.787868429	3.47694484	0.792049199	1.721164876	1.115379318	1.619159111	1.365417392	1.379667175
Zm00001d017895	3.954527555	4.459841917	3.442021501	11.83427835	10.35398744	12.1661779	13.09154721	8.752082564	11.03205787	2.326418569	4.283596536	2.445131524	9.2560906	10.14238321	8.107059963
Zm00001d017896	0	0.009717252	0.057530417	0.019243984	0	0	0	0.02790812	0	0.010640455	0.009729043	0	0.215837327	0.355219662	0.160555653
Zm00001d017897	3.681025947	2.702801242	4.624733003	8.129152133	11.22556597	8.22194317	6.649138483	7.200415282	6.769940568	0.432298962	0.516891883	0.213677214	1.843740563	1.356837479	2.555319412
Zm00001d017898	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017899	0	0	0	0	0	0	0	0	0.025202426	0	0	0	0.34301681	0.313626926	0.141756162
Zm00001d017900	10.50701699	9.114803458	10.85670533	21.88388361	21.78419835	34.68535669	19.7960604	15.11526033	17.68197184	1.044013593	1.565524801	0.670847066	17.4332311	14.09066092	14.89562134
Zm00001d017901	0	0	0	0	0	0	0	0	0	10.44316882	0	0	0	0	0
Zm00001d017902	0	0	0	0	0	0	0	0	0	0.471372137	0	0	0	0	0
Zm00001d017903	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017905	13.70239935	10.93849444	15.04111472	21.04063518	22.38043701	21.21641586	20.58763181	20.94370098	23.62509119	16.92068371	20.59351605	17.64158288	4.080388268	3.655615981	4.612030269
Zm00001d017906	0.023687782	0.004262121	0.033644851	0.054864408	0.026753252	0.024874949	0.079083351	0.114248291	0.050080464	0.004667051	0.01280188	0.026240249	0.068161855	0.074192508	0.054772616
Zm00001d017907	16.74461209	15.40363647	20.88927947	173.568086	99.50910094	199.0420121	97.58272492	71.25348322	88.79822777	10.11440369	12.508925	4.836807346	120.6094968	135.7881641	136.4936019
Zm00001d017908	0.569063398	0.362686423	0.911734967	6.216385911	3.956905252	6.157028012	3.172535322	2.50490073	2.705785034	0.624083471	0.415001755	0.243039077	3.460203578	3.923347471	4.779791714
Zm00001d017910	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017911	0.308954439	0.453984136	0.191984743	0.963286434	1.764068793	1.10399176	2.677515044	4.159904132	5.778902043	1.31380558	2.532409486	0.114081902	0.288108281	0.028223892	0.029766124
Zm00001d017912	13.55756531	7.405588636	13.98550082	8.595966224	54.17772815	16.19209373	38.83225671	50.38767826	44.20922704	30.66947359	30.5834937	19.39120714	1.295115322	1.325370933	3.034524766
Zm00001d017913	10.58379002	10.02700867	7.608878032	7.75649171	5.149098159	4.00533488	3.579345671	2.441230419	2.7261754	1.655306234	6.008217659	0.998284088	31.40657049	30.66929253	26.30408571
Zm00001d017914	17.33755161	13.65810629	21.72364473	35.93576883	51.71116454	34.24161574	24.88997258	23.09994712	20.90437714	1.495571653	3.2721556	0.672129847	8.118777107	6.085326988	12.71629073
Zm00001d017915	8.665135686	8.374844807	9.106798297	11.42635424	15.50878477	12.39506005	12.41370977	15.50523922	13.65564658	5.099119974	7.54168779	3.9263188	6.179288436	5.833470225	7.488707605
Zm00001d017916	0.359296555	0.22626767	0.223267408	0.022404954	0.307726849	0.220093721	0.209919014	0.476552848	0.08862246	0.64418794	0.634318276	0.497515523	0.201032191	0.03938735	0.207697925
Zm00001d017917	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017918	1.162703834	0.67431883	0.692261442	0.849810683	1.311135113	0.563163066	0.650873499	0.736842078	0.873700717	4.303508277	3.655287743	1.677383032	0.865384736	1.831862338	1.187936825
Zm00001d017919	0	0	0	0	0	0	0	0	0	0.087697142	0.106913889	0.011739824	0	0	0.024505135
Zm00001d017920	100.2700459	92.8633115	78.23891445	129.3596747	84.71610736	134.9323428	104.255068	98.67310759	84.63790956	121.8551326	114.5439011	66.43521905	244.9451762	240.7013396	239.4066922
Zm00001d017921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017923	0.207139908	0.217411234	0.858113624	0.129167954	0.36391629	0.084591576	1.331236412	1.540208738	1.660496204	0	0.217675058	0.22946019	0.579490521	1.324598572	1.796115008
Zm00001d017925	16.77130072	14.08616404	14.11426507	6.018819678	20.5518636	11.2788143	22.56042538	21.89019556	24.80244164	5.685331568	12.38959871	13.25594621	1.907651421	1.509661984	1.886737718
Zm00001d017926	0	0	0	0	0.035947829	0.003713777	0.01416837	0.018275384	0.041122983	0.07107163	0.152903455	0.020147724	0.013568559	0.036553382	0.024532303
Zm00001d017927	3.882730957	2.94368416	3.435609326	10.31159171	17.45092332	9.806247399	11.67278987	14.74201979	13.0947219	1.299739349	3.707838522	0.445422721	6.08848533	4.504330837	6.798823574
Zm00001d017928	0	0	0	0	0	0	0	0.008703483	0	0	0	0	0	0	0
Zm00001d017930	1.786388515	2.361966957	1.963335078	8.758313783	6.56177204	7.889107197	6.680886468	6.852992729	6.241614405	0.779157311	0.996066406	0.27524687	9.038056555	9.355693763	9.476834709
Zm00001d017931	1.016578933	1.170006916	0.773292393	6.186151382	5.484988306	4.960319902	0.983066889	1.384266606	1.46988303	0.169210511	0.453099005	0.009707931	2.196714835	1.373797947	1.8744072
Zm00001d017932	0.213788843	0.283439831	0.265697404	2.357554355	2.357368853	2.426211733	7.796772272	6.932943597	4.981803996	0.139665818	0.198648645	0.037393512	0.994720518	1.221153731	0.650444941
Zm00001d017933	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017935	16.48412055	18.25229837	13.46659353	22.51037363	18.14338074	21.13095708	26.87359877	20.08124042	19.87720775	15.01716543	23.35200683	19.05192217	20.48550273	19.52108306	16.9641473
Zm00001d017936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017937	17.29911258	18.14291443	17.04866661	12.53395416	12.02095388	11.48745355	9.577109565	9.826308384	8.611152622	4.120482291	8.014434607	3.427799437	12.87316991	12.03337342	12.34395372
Zm00001d017938	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017939	127.735332	130.0138212	125.2915151	93.14617434	57.4053055	91.73071204	39.94801907	29.98085469	37.00759055	7.596120076	9.056235292	5.510811339	52.5508323	51.41875765	50.01209756
Zm00001d017940	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017941	1.119694416	1.301777779	1.440215443	3.046765753	2.238835523	3.194422108	3.989134541	2.190366509	3.215647685	0.637135306	0.67142657	0.130106293	4.459886495	4.798207139	3.105036392
Zm00001d017942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017943	0	0	0	0	0.104126337	0	0	0	0	0	0	0	0	0	0
Zm00001d017944	0	0	0.013614303	0	0	0.053683116	0	0.013208651	0.013509954	0	0	0.048539655	0.061292267	0.048034893	0.113984222
Zm00001d017945	3.879057789	3.94960631	3.921542433	4.398732431	5.609465038	5.559082483	6.444784005	6.147256961	6.223160419	2.814296212	4.735413447	2.960988427	3.224587023	3.173189172	3.354118441
Zm00001d017946	10.16518835	9.944840615	10.33043842	9.518933087	9.72450312	9.751183927	9.050689187	9.249614824	10.96709644	6.993572894	9.447501425	8.100620393	5.850353029	5.256594588	5.142149025
Zm00001d017947	0.221268526	0.935597198	1.080330331	2.109096159	2.978013243	1.762047427	1.495909587	2.05816739	2.280542763	0.67572422	0.717497254	0.03501589	0.848936864	1.21281164	2.156168583
Zm00001d017948	0	0	0	0	0.246765155	0	0	0	0	0	0	0	0	0	0
Zm00001d017949	0	0	0	0.031151346	0.054853399	0.051002229	0.048644449	0.010039218	0	0	0	0.009223126	0.009317022	0.009127215	0
Zm00001d017950	0	0	0	0	0	0	0.118332126	0	0	0	0	0	0	0	0
Zm00001d017951	5.065334307	4.231504844	5.347718685	25.88144881	24.58601941	25.13952914	27.38974879	38.64017263	39.21881001	17.74996781	11.60187484	13.59844413	6.926281028	5.283656653	5.467795101
Zm00001d017952	0	0	0	0	0.015955586	0	0	0	0	0.300609335	0.091620184	0.469488962	0	0	0
Zm00001d017953	24.45664234	30.71756502	23.86177962	70.72124482	59.08596088	75.90082907	78.42089467	80.23109122	66.67476442	148.2661358	184.3207412	166.6742064	67.27230083	56.12360058	85.45473519
Zm00001d017954	2.758640484	2.010611787	1.952743268	2.661991887	3.989423968	2.698495705	3.613306074	3.715585504	3.756100531	3.27029108	3.523971269	2.53532135	1.172179618	1.132569764	1.148834937
Zm00001d017955	15.19572403	12.22257802	9.004636921	4.088769757	2.548723078	2.148869471	1.28335021	1.482409732	0.667139039	1.062565489	1.240278027	0.254222081	5.081172997	5.408936327	4.965375014
Zm00001d017956	45.74209846	41.47225537	35.55687355	63.50013146	84.60643299	61.20359562	73.38816072	80.39758159	73.61117007	87.37514602	89.69914503	80.6940751	45.16714687	39.9650312	49.55656867
Zm00001d017957	11.37925086	11.22823966	10.51588129	11.80156215	16.17765246	14.00247893	15.84807832	17.60459731	17.6048201	7.434540808	10.9121503	5.71264835	6.281276375	6.433841492	6.560296362
Zm00001d017958	319.6112795	311.4692981	310.7703343	217.5309538	367.4146923	239.9968709	292.2556096	367.2464571	304.536554	391.0105191	281.024738	419.3006432	205.1924811	212.720553	249.8059834
Zm00001d017959	15.84550368	13.93147699	12.84177016	9.76579498	12.41239838	10.95667158	12.30170302	11.3399785	11.27611935	1.421542379	2.722424227	0.721431099	7.287756255	7.858840062	7.203323955
Zm00001d017960	22.149833	22.23648552	19.73335405	16.41268579	13.51306493	16.06326263	12.54285417	10.70262877	11.35702083	0.167847645	2.169051211	0.152791889	9.978104552	9.525789706	10.29957368
Zm00001d017961	0.268480386	0.24775496	0.237862489	0.842065555	0.644477847	0.820684678	0.47834433	0.650657677	0.485192029	0.003666126	0.030168925	0.029446573	0.594927075	0.536182608	0.875881089
Zm00001d017962	0.133427959	0.077562927	0.038267229	0.200540036	0.202858742	0.217956674	0.107938087	0.08662971	0.215185579	0	0.069028487	0.015159532	0.191423295	0.255032106	0.181948788
Zm00001d017964	0.773486232	0.626763685	0.336115722	2.512834138	1.596480245	1.494334044	1.611704618	1.943560861	1.550958792	0.234986703	0.607061503	0.200726599	1.661504216	1.538712996	1.141270308
Zm00001d017965	0.006188879	0.062359329	0.123064914	0	0.065238049	0.015164447	0.007231705	0.201484245	0.045795626	0.238993569	0.054630626	0.013711519	0	0	0.050086322
Zm00001d017966	28.47694786	28.24716746	33.78254214	29.69366088	61.8154156	31.37362569	76.70316063	109.9763228	123.8690992	329.0144777	309.6999398	342.0147955	15.36566091	13.60352392	17.68078411
Zm00001d017967	3.448831575	3.692096263	3.998142279	4.397594768	5.593273082	4.038838508	4.191376983	4.217792081	3.797132426	3.920162867	1.930959314	0.801440505	3.340580737	2.807955823	3.470294755
Zm00001d017968	15.09779746	11.27967291	14.03575415	4.497291187	9.189677432	7.670617036	6.389934779	2.580166366	3.469826182	0.054651842	0.949441817	0	6.828917857	5.256270407	6.917906152
Zm00001d017969	4.401723043	2.543711435	6.886361833	3.745870657	25.72433271	7.296023468	24.02276617	24.28950807	17.88226681	16.1409247	21.74573828	18.93046564	0.057949052	0	0.0598705
Zm00001d017970	0	0	0	0	0	0.164207178	0.039154012	0	0.041324566	0.046212955	0.21127285	0	0.037496445	0	0
Zm00001d017971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017972	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017973	0	0	0	0	0	0	0.183618815	0.252634425	0	0	0.264212484	0	0	0	0
Zm00001d017974	2.115786202	2.459852816	2.494658893	2.841694981	1.715605365	1.262831391	3.296394926	3.205299266	2.408631856	0.149641948	2.599662119	1.201934327	0	0	0
Zm00001d017975	1.012683994	0.992039407	2.377292559	3.85909195	2.816981648	1.240676454	3.878664115	3.798873204	1.734611419	0.077592121	2.483108067	1.371095454	0	0	0
Zm00001d017976	0.975798153	0.532153589	1.08770164	4.654608556	7.608501496	2.095182092	5.524778047	8.92753173	6.674692841	9.073653501	7.712904831	9.672785388	0.056286055	0.055139392	0.023260945
Zm00001d017977	1.126454834	1.414107013	1.123653216	2.375331975	4.15497811	2.796440004	6.308534336	7.821096515	8.984304542	36.51137806	36.51234634	45.00006935	2.585349171	2.337702479	3.583564655
Zm00001d017978	1.315129885	1.463805031	1.223934949	1.083277013	0.886588007	1.071644696	1.422368033	1.3939825	0.799644223	5.981258975	3.910788073	4.024947326	1.937131802	1.381341682	2.531758712
Zm00001d017979	0.696018852	0.592727045	0.91907767	3.383400793	6.992940467	3.798472547	5.577560948	5.974818765	6.315952496	1.625327126	4.109241659	0.994438114	1.694921768	1.93351214	2.075741591
Zm00001d017980	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d017981	0.001528366	0.001924983	0.007597831	0.026685565	0.0563877	0.035576692	0.030360227	0.03685723	0.035813084	0.002107869	0.001927319	0.006772218	0.029074941	0.008377242	0.014135997
Zm00001d017982	8.655275037	12.68596296	10.43828349	15.86752554	6.903542691	10.3975598	5.031175214	6.697061884	4.790816496	1.822874574	3.305769427	2.153631978	24.21382673	26.84715724	26.37970563
Zm00001d017983	1.149032515	1.038586505	0.711210455	1.331868907	3.86520121	2.141945705	3.001205359	2.428650334	2.856380165	4.946766265	3.250231556	3.763631139	1.068982382	1.027446418	1.192989771
Zm00001d017984	13.79742993	8.900882805	8.866505227	4.564199323	8.214318487	3.473512326	5.485513241	4.351880603	2.977810092	97.12876702	51.10426319	99.74782709	7.898758914	7.544168197	8.481641923
Zm00001d017985	25.90339059	22.06661411	27.29133662	57.50834361	66.97505273	64.68458279	55.16633117	58.91493745	62.17594915	30.32322447	29.68612233	30.47673376	23.63906991	24.18440009	26.01602135
Zm00001d017986	0	0	0	0.023229114	0.012271019	0.028523726	0.038087145	0	0.068911811	0.006421964	0.023487554	0.015474495	0.041685422	0	0.549112
Zm00001d017987	0.034659466	0.2425207	0.134010759	0.076845836	0.329831172	0.287801989	0.553494351	0.645445373	0.631672185	1.094114482	1.199506071	0.089586429	0.922222435	1.317157366	4.888670888
Zm00001d017988	5.261081013	4.503055813	4.961246188	5.752291468	8.336166282	5.987220077	6.960978483	7.576998196	7.177506013	1.737235725	3.475442046	1.295691033	4.848691727	5.087339441	5.529570554
Zm00001d017989	0.009029877	0	0.202002441	0.315326788	0.392640197	0.13275402	0.43260787	0.141543693	0.289544913	1.731062802	0.81986146	1.460421656	0.04041889	0.089089815	0.177476093
Zm00001d017990	0.398836646	0.223260547	0.02753752	0	0.116783509	0	0	0	0.081979366	0.397266631	0	0.17181622	0	0	0.179320396
Zm00001d017991	12.43289751	3.743254285	10.28057431	2.347487158	56.84807559	9.345530249	42.25228613	49.27401046	36.53091649	153.230102	90.00958283	172.6787692	0.886872449	0.597303455	4.581394803
Zm00001d017992	13.38919978	13.53586761	14.11275468	2.591773924	20.5760878	5.237513632	26.08703015	33.43415	27.33182577	38.30346443	45.52372493	32.78814201	5.149348991	5.744159614	7.345154794
Zm00001d017994	7.441950864	5.514571999	7.821092745	5.030675709	7.686584821	4.879298997	2.819088873	3.26301774	2.739228386	0.07041974	0	0.056561615	3.028284357	3.414379416	4.2650604
Zm00001d017995	4.863125277	4.841643882	5.621752502	3.741390292	4.715065962	3.564083468	4.330693805	4.797303994	3.911286318	2.898967633	3.774533697	1.888855317	3.673157331	3.653629697	4.032134592
Zm00001d017996	0	0	0	0	0	0	0	0	0.123859857	0.242395222	0.015830913	0.027813356	0	0.013762063	0.014514061
Zm00001d017997	12.2657036	12.47080193	13.47335844	11.39735405	14.593413	12.85134645	13.95053005	12.56939318	14.40140135	10.34219959	13.66754755	9.492766673	11.15309693	9.895704826	10.26322804
Zm00001d017998	3.143907452	2.909825892	2.738040248	0.683194961	3.954261146	2.100936435	5.844452542	7.308848152	5.213806762	21.18711	17.93066055	5.72531156	1.292647496	1.187984921	1.404349156
Zm00001d017999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018001	0.314402509	0.313603708	0.149477857	0.923693414	1.320663954	1.215016531	1.780187109	1.450240137	1.76957673	0.192070141	0.415097835	0.212708427	0.349465251	0.215122776	0.275668585
Zm00001d018002	0	0.072653881	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018003	0.687178425	1.161597163	0.067423213	1.443400625	0.691007716	0.974817214	1.310105676	1.395504442	1.115107341	1.247016236	1.094594577	1.282063282	0.910627961	0.75330912	0.543586129
Zm00001d018004	11.94050858	13.88950822	13.46358675	17.41717464	20.68208897	16.79801687	19.08704524	21.9571436	19.29014466	9.327699642	16.81217002	8.81257722	14.8799466	11.70081632	14.43339935
Zm00001d018005	7.884362294	7.688954069	8.42066805	8.372126627	10.16783579	8.675081437	8.142428792	8.305576421	8.562946428	3.124070188	4.85127643	2.658999129	4.666309754	4.661794306	4.65608781
Zm00001d018006	0.225517457	0.153535174	0.037874832	0.592917187	0.963737298	0.694457998	0.413080938	0.455654287	0.405912992	0	0	0	5.681538982	5.886512341	6.278635111
Zm00001d018007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018009	0.832739585	0.913712145	0.409527993	0.987584579	1.225157643	1.345688867	1.164085652	1.004094389	1.184514022	0.760959504	0.518613266	0.31975226	0.997607224	0.789667797	0.773752385
Zm00001d018010	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018011	34.01989147	31.4247945	33.05002151	2.000608647	2.32578413	1.706874611	4.138021101	3.393255739	3.888233967	81.06911786	38.1824853	214.0380054	1.608739092	1.210877163	0.917674026
Zm00001d018012	2.333211602	1.92615038	2.314035773	0.017286418	0.042614733	0.03962282	0.086379652	0.061280283	0.125356305	1.363617943	0.873937035	3.326746244	0.051701756	0.045583636	0.021366424
Zm00001d018013	15.42949432	15.71427574	13.3878435	14.46170914	14.56761129	14.13195103	16.964638	14.94216315	14.72113457	5.575944905	9.643429558	5.86185537	8.648155743	8.520069135	8.603262309
Zm00001d018014	0.041041783	0.010882585	0.013422855	0.180496347	0.142312027	0.240823357	0.15144418	0.151065726	0.141191724	0.092352891	0.089890272	0.014357124	0.186125506	0.116030565	0.067428808
Zm00001d018016	0.491113666	0.244546771	0.340664657	1.267723575	3.551604089	1.553177667	1.414647215	1.308285415	1.140930879	1.653937323	2.203591713	0.872983879	4.562725363	3.317898893	4.17262875
Zm00001d018017	25.36773405	23.46881798	30.0797429	41.07827967	38.52963715	38.98825758	23.96225542	27.53504703	31.94113467	162.1520152	89.90270122	115.5459533	4.50457298	4.35729854	5.385684112
Zm00001d018019	1.233954089	1.338740273	0.941394356	5.546257228	4.716764884	4.363156405	3.047924655	2.401212319	2.312846228	0.3706948	0.724105125	0.203007674	2.392534589	2.290221292	2.620177068
Zm00001d018021	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018022	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018024	0.884901686	1.202197158	1.019438985	3.639436263	3.904093954	5.877422731	5.059666539	4.29793167	4.181384903	0.301678168	1.084544208	0.170718381	10.78686835	13.77158643	13.81140596
Zm00001d018025	21.27726272	21.65626475	18.92590762	14.36393983	13.90486608	16.16829527	15.50203908	15.03061539	16.30596962	8.827130245	8.395736742	5.405793956	19.10832312	18.84449789	17.60139012
Zm00001d018026	2.118078495	1.212603501	3.350268966	0.960572951	2.029730291	1.887226156	2.699972442	1.160872974	2.849648957	0.796685302	0.242814994	0.213301021	2.154725316	2.321912024	0.890468286
Zm00001d018027	0	0	0	0	0	0	0	0.016803666	0	0.499721736	0	0	0	0	0
Zm00001d018028	0.3525859	0.558685373	0.141353159	0.950383846	1.33380467	1.560651247	2.405528692	2.770256271	2.861502738	5.631367628	4.360165418	2.582858873	4.200101011	4.388838701	10.33558094
Zm00001d018029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018030	299.1496032	289.9306276	326.098369	557.4852655	345.215585	549.550622	203.1926456	181.487279	153.6056942	15.71515872	20.45817409	6.941723773	1356.663592	1360.339084	1238.657579
Zm00001d018031	0	0	0	0	0	0	0.080275563	0.011833737	0	0	0	0	0	0	0
Zm00001d018032	0.237593074	0.161756409	0.215475596	0.368392586	0.287680186	0.58216805	0.750344619	0.317454319	0.617713947	0.044281084	0.25102668	0.035566868	0.179644783	0.492758135	0.319234344
Zm00001d018033	0.570313692	0.569518962	0.460711897	3.246441763	2.334930722	2.924610081	4.345955344	4.071979878	3.75792503	0.275294812	0.42637329	0.297833309	4.87310777	3.925349645	5.232496189
Zm00001d018034	182.1576713	178.4678496	247.3762242	733.9236049	322.2051449	618.8051554	418.6394489	415.573481	434.790526	3.09304863	4.513357806	0.714678254	467.8434027	519.9018353	513.6622532
Zm00001d018035	0.153825417	0.02421796	0.143381011	0.119902742	0.228023498	0.400471514	0	0	0.0948547	0	0	0	0	0	0.111151984
Zm00001d018036	18.76042579	27.35788401	16.82673464	29.80660105	29.26802206	30.42257534	30.12154884	35.09103508	32.79537367	41.0780589	39.67577617	42.48082137	25.74696047	26.7530386	27.64176781
Zm00001d018037	48.45077664	27.70426412	31.64389867	54.46052867	35.62516839	59.28865279	31.64847236	14.93035049	18.21443741	0.974344641	1.083511042	0.179786545	62.92490084	68.61314888	55.86118358
Zm00001d018038	0.101939607	0.092728503	0.035191901	1.327850844	0.888007002	1.325221308	0.595582156	0.382405215	0.54478583	0	0.121407497	0.050188476	0.456294773	0.310416046	0.255354876
Zm00001d018040	13.54492041	12.505397	13.05877829	8.770542911	10.52808105	9.634169903	9.580096674	8.97538892	9.223600547	10.12832267	9.790494647	8.33688921	7.23180263	6.427551751	6.99273035
Zm00001d018041	46.63253192	48.40246469	44.04723772	19.24149756	29.97357125	23.64447932	28.0739918	27.56462956	29.66507413	23.86989626	26.3633668	21.98275928	12.52273041	11.15518783	12.79673307
Zm00001d018042	1.316988051	1.602202984	1.422862295	3.508956693	1.498689744	2.768603123	2.474482133	2.472208301	2.445545755	1.372577871	1.868359708	1.268247945	3.659259025	3.642133385	4.126640589
Zm00001d018043	4.857718534	3.60721472	4.522973894	7.038457476	9.284919775	7.508677292	9.620648332	10.33454624	9.887285089	13.71198269	12.87003779	16.27786336	5.536280733	5.43505922	4.994197563
Zm00001d018045	2.841071056	3.335012421	1.906681394	2.905473671	0.598964467	1.517585538	1.15528746	0.43848768	0.868949481	0	0	0	3.802382688	2.728286107	3.061308572
Zm00001d018046	0.283646162	0.209202436	0.317582238	2.269106721	2.094321241	1.699958645	2.269322632	1.934990809	2.139855554	1.349798344	1.58542306	0.880355113	7.057349677	5.86309418	6.19528746
Zm00001d018047	4.665376262	4.914064944	4.919744113	10.1618586	6.290016542	8.875608482	7.076616326	5.556653887	5.9681047	2.153945642	2.810417782	1.69533626	5.606597968	4.9956289	5.176345791
Zm00001d018048	0.428901456	0.742779086	0.755139989	0.044575608	0.141285148	0.415991517	0	0.043096461	0.132238612	0.024646909	0	0.098982827	0.219979147	0	0.103305961
Zm00001d018049	1.068837196	1.044864245	0.96313746	1.624906812	2.480888717	1.653566593	2.923300959	3.737759235	3.018006094	1.657020562	2.462837797	2.177885794	0.608217024	0.846700656	0.628384007
Zm00001d018050	12.15951094	12.41752623	10.87281205	9.71152136	7.981341709	10.24782427	8.997972431	8.204657736	8.105972594	3.501894217	4.606603491	1.946695657	7.300876725	7.425183238	7.36698022
Zm00001d018051	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018055	0.226195134	0.170936165	0.067467835	0.090272243	0.059609055	0.033254399	0.137440689	0	0.156218347	0.012478415	0.011409573	0	0.030374354	0.029755566	0.020920995
Zm00001d018056	0	0	0	0	0.082569242	0.012795365	0	0	0	0	0.079021534	0	0.151933649	0.148838447	0.108672505
Zm00001d018057	6.324449123	6.981004583	6.832383718	4.737547204	6.358996938	5.832725634	4.795964612	5.027499142	5.784954517	3.068757022	3.911831442	2.753522275	3.465727178	3.417098067	3.064983352
Zm00001d018058	1.253799231	0.652923896	0.704198006	0.315743887	0.826032213	0.546488438	0.662096417	0.450631643	0.550119622	0.282657013	0.608108098	0.053419303	0.431705107	0.819388867	1.142924682
Zm00001d018059	3.416025586	4.278544204	1.678088865	3.569536523	2.656190257	2.950247062	3.82218321	3.138656558	3.289409598	1.662219952	2.131376059	4.352920843	1.574811589	1.610484434	1.470372015
Zm00001d018060	8.097337719	8.069015254	7.916537519	8.104022656	8.330594783	9.294860371	8.322053996	7.2702564	7.043418574	6.978149962	7.174238921	5.835985607	5.322035977	5.143404831	5.428686089
Zm00001d018061	16.73155011	18.69881454	16.43599164	16.22094777	20.1620777	14.75173397	32.31152896	38.9760974	29.93539459	25.24871407	33.44602642	34.41535953	22.02542705	22.62510677	27.37848859
Zm00001d018064	0.077847587	0	0.014884494	0.007468318	2.627513867	0.036682287	4.359318186	1.523525012	1.942308913	102.2028944	26.87546125	40.54419834	0	0	0
Zm00001d018065	2.34829018	1.874173574	2.542818331	7.698673648	7.32195861	4.87092108	3.545435751	5.326590617	3.397891369	1.459008996	1.011522667	0.193168017	15.61076505	13.4958444	18.30571092
Zm00001d018066	10.87413089	8.312606068	10.76074485	18.52001212	13.25157247	17.44219967	8.703531854	9.113786878	6.841068181	1.408698341	3.547052598	0.313331845	41.13023891	45.02956532	40.42291018
Zm00001d018069	397.4906687	386.5163107	424.2431048	677.7613716	422.2766241	609.6728941	302.1960119	247.3321458	262.6795218	31.95486616	65.98229295	14.59698556	1288.436896	1435.992524	1321.340498
Zm00001d018070	5.586871729	5.709352154	5.194079308	7.687880192	7.894139786	8.109268304	9.252585075	8.738296626	8.483623608	3.115934085	3.722864104	2.294844198	5.807633192	5.349068325	4.973740229
Zm00001d018072	24.64904764	24.81788459	21.43739384	16.0601144	25.83654715	17.6244497	26.01957059	24.19671433	24.74866735	30.79657364	36.84654591	30.52743692	14.53711218	11.25725915	13.70142979
Zm00001d018073	0	0.151708984	0	0	0	0	0	0	0	0	0	0	0.112324154	0	0
Zm00001d018074	2.502601066	2.396588825	2.304833477	2.020569805	4.769175277	2.956226045	4.551579867	4.863021579	4.888927495	3.755763876	6.11176238	5.185592001	1.265235582	0.974941192	2.215842539
Zm00001d018075	0	0	0	0	0	0.130343441	0.062158899	0	0	0	0	0	0	0.029157367	0
Zm00001d018076	0.585491817	0.774300565	0.745842227	2.446169984	3.240179725	1.918797793	1.470916464	1.694327663	0.794281169	0.28262141	0.258413388	0.40536329	3.11212468	2.743851847	4.839895344
Zm00001d018077	61.29964166	64.61485957	67.77433698	257.4843292	138.0064321	240.2874109	96.63080041	80.79332887	84.41109278	1.375379458	3.51801484	0.573332662	731.7311882	771.3057285	678.9056009
Zm00001d018078	0	0	0	0	0	0	0	0	0	0	0	0	0	0.005884133	0.024822634
Zm00001d018080	0.075777951	0.218956576	0.105256715	0.272402453	0.53448351	0.393197755	0.713580914	0.730967684	0.197905193	0.565585088	0.640803574	1.219647868	2.389307247	2.848827827	2.34484659
Zm00001d018081	30.9135114	35.12602691	34.77618371	85.84910101	94.19526239	91.12442064	182.8075639	197.2182882	158.0377075	115.0405294	128.1059723	134.7642505	91.89567454	96.4068735	105.2488383
Zm00001d018082	0.036167286	0.068329245	0.011237202	1.635102271	0.726749495	1.661620252	0.348657156	0.414290381	0.167266101	0.049880649	0.022804054	0	0.961218403	0.931724438	0.386782438
Zm00001d018083	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018084	0	0	0	0	0	0	0	0	0	0.203177645	0	0	0	0	0
Zm00001d018085	12.4952138	11.66446335	15.43774091	16.0876603	18.35282675	16.20883755	17.13430092	20.38393082	18.26545824	15.35760834	22.15229911	13.92305215	14.22929627	7.45315602	8.922635845
Zm00001d018086	14.34162718	12.21310461	12.97359596	12.95932352	15.77395476	12.6425148	17.98917716	18.41864237	15.62025178	15.4207207	19.29294828	11.11294586	10.26154913	9.317591555	9.27311216
Zm00001d018087	0.041178415	0.1555931	0.187647738	0.205423734	0.578758436	0.52130833	1.15480749	1.042687713	0.440131524	0.170375471	0.294254717	0.228077899	1.02911931	0.99310695	3.253204291
Zm00001d018088	0.012946244	0	0	0.064583977	0.144997897	0.150678746	0.219351454	0.452696487	0.143696787	0.187477555	0	0	0.181090788	0.305130742	0.426577314
Zm00001d018089	0.872168033	0.494324489	0.569064824	0.135966267	4.510646641	1.602787764	16.30605366	27.23737558	25.38475169	239.9411982	245.2625073	363.6340163	0.805186829	1.051711347	1.714186955
Zm00001d018090	3.618856038	3.234465291	3.47808595	15.14456266	42.82352826	12.66365755	35.42028553	46.55064205	44.2073679	3.07593426	11.08083845	2.476550329	3.095706537	3.943608225	9.836793629
Zm00001d018091	0	0	0.013110069	0	0	0	0	0	0	0.014548523	0	0	0	0	0
Zm00001d018093	0	0	0	0	0	0.043363449	0	0	0	0	0	0	0	0	0
Zm00001d018094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018095	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018096	0.449817332	0.343974718	0.379344707	5.870387517	5.313135063	4.329975405	3.923314832	5.171955102	4.933308256	4.497698888	0.405167205	0.338123476	6.004366175	6.28709583	8.80370731
Zm00001d018097	0	0	0	0.123551956	0	0	0.057879844	0	0.030544245	0	0.015615819	0	0	0	0
Zm00001d018098	8.095953239	7.1440739	8.49686808	8.037273543	10.89666514	8.847679609	5.066678531	4.883932832	5.142352445	0.496631861	1.672313839	0.629983888	0.85316163	0.686048219	1.093917239
Zm00001d018099	62.12216273	65.3437825	63.9474836	63.11989434	39.18606724	47.99560733	30.97546347	31.06103488	29.99355913	12.97498357	17.38323144	7.818820183	46.84982074	44.93988825	42.87175914
Zm00001d018100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018102	1.072253641	1.174941463	1.046090985	1.745135035	1.497622566	2.180671321	1.67892404	2.146203744	2.353847289	1.190445711	1.507643059	1.342207133	1.517856112	1.25184583	1.276861681
Zm00001d018103	7.80980447	7.933526494	5.379865844	0.799809202	1.775963574	1.171873288	3.575366011	3.614050693	3.150228109	50.22722625	30.02498379	77.66043858	1.04909554	0.890693525	1.595975458
Zm00001d018104	0.159553713	0.010576763	0.010436517	0.020946155	0.044260089	0	0.078500427	0	0.010356525	0.092653	0	0.02790732	0	0.036822817	0
Zm00001d018105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018106	9.691744777	6.870942264	18.04914351	0.045784559	0.164465928	0.044976187	0.068635175	0.017706118	0.036220028	2.166995432	0.898102505	0.130134243	0.065729537	0.185122661	0.084886209
Zm00001d018107	0.101268399	0.145769056	0.143836188	0.072170031	1.35342201	0.035447899	0.287378019	0.645420805	0.231942327	1.077422028	2.991891842	1.330140655	0.84182496	1.807941887	0.551948993
Zm00001d018108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018111	6.501328778	7.70062524	6.744686261	7.372113927	8.93705992	7.490505636	9.994375224	10.68566932	7.665379493	1.093774133	2.314153829	0.52609456	8.952102465	7.506079848	10.70957047
Zm00001d018112	13.57390312	13.182979	12.80967205	8.378798345	9.000351365	8.340933272	9.859606375	9.527126405	9.535157071	7.981832684	10.20922247	6.433179051	6.009945062	6.749297095	8.073140228
Zm00001d018113	5.561432161	5.492491004	6.10200062	3.945442723	4.294824099	4.177659425	5.456990388	5.092675452	5.011014793	3.977612228	4.183279103	4.337955016	3.567872736	3.317527841	3.374532273
Zm00001d018117	0.693468387	0	0.153900813	0	1.827492671	0	1.852155008	1.284110575	1.313402516	0.580675821	1.905129963	1.152289213	0	0	0
Zm00001d018118	0	0	0	0	0	0	0	0	0	0.024874519	0.090975539	1.278680529	0	0	0
Zm00001d018119	0.271551907	0.188701038	0.081462019	0.023356397	0	0.160608116	0.065650015	0	0	16.20745293	1.45239955	3.474907392	0.136219963	0.010264991	0.010825899
Zm00001d018121	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018122	8.886302048	7.994521652	10.38317485	4.018968616	5.632904281	4.719001514	7.632422097	8.307612383	5.60675971	38.81712139	29.74560762	31.863279	5.087374875	3.722932966	3.788377178
Zm00001d018123	0.151996424	0.074448912	0.062967201	0.28434502	0.111265326	0.268979268	0.286145937	0.142545736	0.145797358	0.011646007	0.031945395	0	0.198437026	0.055541273	0.136677807
Zm00001d018124	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018125	0.990669125	1.164568	0.564302981	4.046326549	2.327877569	3.165747801	3.472790641	2.677718952	2.820251914	0.500975218	0.999412439	2.167401139	2.364993197	2.452564188	2.090261379
Zm00001d018126	2.752532841	2.672849575	2.553680903	4.153015685	11.28005998	5.341328305	8.56939511	8.825331453	9.364923437	2.435671585	6.753949059	2.436106385	2.250895387	1.793573206	2.598139471
Zm00001d018127	8.463144808	10.07650551	8.539190583	9.478837992	7.926923583	9.830385642	9.751707695	6.97016639	8.686551835	4.759695705	8.150113835	6.212407543	7.592223482	7.171006028	5.622262469
Zm00001d018128	2.324433729	2.47879718	2.13389677	17.53500884	17.19213421	16.33238833	16.56159044	14.8144722	15.39212786	0	0.306395698	0	8.338072136	5.877558646	13.33381302
Zm00001d018129	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018130	2.453548538	2.580587443	2.791457444	9.215013136	8.291503373	10.99142186	10.66884483	9.536121308	8.430211497	0.950161895	1.301548412	0.286545827	11.93103458	12.91488925	15.84134406
Zm00001d018131	19.0070239	23.5215653	23.50172787	34.11757958	23.07740745	37.020832	33.45185775	26.15168623	25.82764493	9.170070696	10.73787319	6.737637924	27.89007603	26.07930436	27.39247916
Zm00001d018133	0.045445413	0.118424826	0.064269996	0.646905804	0.770193536	0.804434476	0.763584022	0.795498717	0.707349245	0.012967597	0.003952284	0.015623493	0.345462437	0.432908694	0.599693236
Zm00001d018134	52.00043366	46.51498342	52.64543234	77.30337376	106.8174216	90.14479585	82.28945181	96.00040788	91.76978036	39.3657835	73.90212966	34.393117	52.50838498	46.04189722	59.49490114
Zm00001d018135	19.4013183	19.75540109	20.91256132	33.21999691	35.02922252	34.84633413	28.63826123	28.01220862	31.12201086	11.99726199	17.89437728	7.267458944	21.69908195	18.77628174	21.85450553
Zm00001d018136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018139	0.018856874	0	0	0	0	0	0	0.022737098	0	0	0	0	0	0	0
Zm00001d018140	0	0	0	0	0	0	0	0	0	0.147633332	0	0	0	0	0
Zm00001d018141	9.848519506	10.47835758	10.43943528	14.51585472	19.64424951	14.27188743	11.4022015	10.48014594	10.01203926	1.262542001	3.564681344	0.345456621	6.168951626	5.26029798	7.838938436
Zm00001d018142	0.621419724	1.088946701	0.41972949	1.229903559	0.765410892	0.231707362	1.625897436	0.504956801	2.199185608	5.458973762	1.294693387	0.374119874	0.952380073	0.56274871	0.593498872
Zm00001d018144	0.840974957	0.638242568	0.743675916	3.496091617	5.334544994	3.559851033	4.774813252	5.850140616	5.558088968	3.01113116	4.670262999	2.10802977	1.652919018	1.778806347	2.062982569
Zm00001d018145	44.2823397	45.01707621	53.32700816	97.98736722	59.0180588	98.32182387	101.001577	94.15871311	131.1514486	20.86245603	35.17428486	34.97732654	45.59848316	56.83156819	65.14496212
Zm00001d018146	4.957758233	4.845606049	5.131316211	10.63440694	9.064902729	9.178817649	8.694852036	9.411469781	8.297811162	6.711348914	6.995372446	7.057495945	12.28728783	12.32829634	13.30512424
Zm00001d018147	17.84910024	17.82011021	18.07135584	17.64541733	23.69110708	17.44601138	19.63430462	21.7348065	22.87566716	7.06043775	14.60977524	5.410256465	17.09106275	19.02926073	21.19535966
Zm00001d018148	17.06334459	15.87036619	18.48105763	13.11880239	13.92800671	11.10312143	12.43154605	13.28253982	11.40930879	4.713721371	9.484085903	4.611632232	10.01690757	8.554544977	10.16087919
Zm00001d018149	191.0393371	180.4923712	157.0677448	29.67349566	46.67881462	30.47732989	58.21811487	87.13352128	76.8099561	212.9573612	225.3720479	291.3116426	57.05524589	47.20596821	57.30325321
Zm00001d018150	22.43818393	36.76113375	16.20854048	7.144833095	3.145276502	3.775201211	3.499249998	4.919153159	2.756545347	2.543913121	1.231418899	0.697121909	20.3494995	13.84502866	11.86690335
Zm00001d018151	0.032010694	0.020158794	0.013260995	0.08317156	0.098417166	0.065362467	0.084160117	0.083628156	0.085535804	0.040469023	0.080733024	0.138884977	0.02089558	0.023394165	0.055513096
Zm00001d018152	0	0	0	0	0	0	0	0	0	1.152119912	0	0	0	0	0
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Zm00001d018154	0.025340563	0	0	0.031603651	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018155	17.55991199	13.55570249	13.81386004	12.16043044	16.00481331	13.87650685	18.07836515	15.9359463	14.2689428	6.237839341	5.752007301	2.831586051	9.556216874	9.66352207	9.117598246
Zm00001d018156	0.015714062	0	0.009764741	0.009798948	0.010352791	0	0.055085645	0.009473791	0.106588881	0.032508423	0.089171713	0.069629299	0.589082088	0.55124181	0.345184402
Zm00001d018157	39.82827062	42.33578129	34.31174975	186.999189	84.05493092	126.7450534	59.01886681	42.25295402	41.83680325	18.48817783	18.55311196	24.76608082	747.0998418	777.3141891	646.1554307
Zm00001d018158	0	0	0	0	0	0	0.0898725	0.023184805	0	0	0.024247348	0.127800612	0	0	0
Zm00001d018159	0	0.098902755	0	0	0.041387378	0	0.229391685	0.094683494	0.048421663	37.01665628	14.08103816	46.79010899	0	0.008608206	0.172493067
Zm00001d018160	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018161	0.531559554	1.128372851	1.328670296	3.26254889	4.894984114	0.497571422	6.804484939	9.362042417	34.05967494	22.75930476	26.82007766	6.966808326	0.36090943	0.373199013	0.952906101
Zm00001d018162	0	0.103885187	0.051253845	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018163	0.029025974	0	0	0	0	0	0	0	0	0	0	0	0	0.031819292	0
Zm00001d018164	1.847464043	0.69806634	0.9184135	0.921630805	0.973721964	0.905358494	0	0.222762111	0	0.25479575	0.232971143	0	1.447160111	0.810101984	0
Zm00001d018165	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d018177	22.01035126	23.93479028	21.43628175	61.92710927	37.39753166	61.81977307	28.98459786	27.83342453	24.42900208	20.59699674	31.78732185	26.69768368	26.38155471	23.06240455	27.73448299
Zm00001d018178	2.028783449	2.497186164	2.14890174	10.69589072	14.69258321	16.55141894	29.80353223	24.36984939	28.76412804	6.624116598	9.351584778	2.698575653	8.952102465	8.078934426	7.86292506
Zm00001d018179	0.047027717	0.22298949	0.175338555	0.35880568	0.302539473	0.281298658	0.374965821	0.293530325	0.262697809	0.064858975	0.202329451	0.076610545	0.486012204	0.409394922	1.311287525
Zm00001d018180	9.637421	9.949365726	9.280929045	8.156253095	7.745551922	8.063760971	7.317569355	5.668306842	7.287630033	3.603189107	4.906485962	4.058580044	3.952465179	3.914966917	3.652481075
Zm00001d018181	0.504739649	1.289606381	0.752750306	0.14388329	0.20902154	0.530035827	0.387575158	0.295606261	0	0.198891197	0.218226134	0.079875382	6.842389337	11.20854712	20.97437931
Zm00001d018182	0	0.032172963	0	0.03822908	0	0.03129509	0	0	0	0.147964348	0	0.118845973	0.131489777	0.050404327	0.141756162
Zm00001d018183	6.777391944	5.680988871	3.000620144	6.971108642	17.48193099	10.70004182	14.09704521	17.90724019	16.20936748	6.788187052	8.360502187	5.718914096	8.07930225	7.710459596	9.469126481
Zm00001d018184	0	0.05449041	0	0	0	0	0	0	0	0	0	0	0.145239396	0.679784945	2.634302011
Zm00001d018185	0	0	0	0.038618731	0	0.012645626	0.006030516	0	0.012729651	0	0	0	0.069302604	0.113151277	0.179001269
Zm00001d018187	9.700544657	8.725544088	7.724915514	13.09060225	27.5395659	14.23470973	21.19210906	26.56492774	19.5465198	8.664928992	10.82773358	7.896973658	13.32998636	11.59830754	14.88574335
Zm00001d018189	0	0	0	0	0	0	0	0	0	0.034018738	0	0	0	0	0
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Zm00001d018191	0	0	0	0	0.047845568	0	0	0	0	0	0	0	0.040633598	0.019902904	0.083961817
Zm00001d018192	10.04517188	9.751244496	13.33674658	31.35031237	33.63877831	28.51554754	24.90700384	32.90970859	28.52372636	6.555282767	12.35832586	6.296584988	30.04876437	24.7095623	33.0845672
Zm00001d018193	0.415944545	0.286653342	0.234084727	0.303418637	0.237840813	0.365365684	0.082533601	0.160869538	0.145181599	0.227297701	0.059379557	0.052162018	0.465455302	0.352733843	0.136100563
Zm00001d018194	9.814178571	9.585008235	12.35213777	6.469988421	9.835702544	7.693137498	7.033787523	8.561857507	8.911022039	0.616547586	3.277540795	0.748581151	5.037469232	4.478970702	4.399184196
Zm00001d018195	0.098947411	0.446571591	0.594365311	0.102835765	0.26075546	0.161632156	0.105985046	0.029827014	0.0610148	0	0	0	2.519001255	1.997648951	1.925677948
Zm00001d018197	191.1364564	193.6791903	208.7905044	473.5013793	295.9685187	419.513835	247.063933	232.8781317	255.6940778	14.10369415	26.95613166	9.161261911	716.5874751	767.2023184	714.7041445
Zm00001d018198	12.43670778	15.74086417	13.10761386	7.470141321	10.52314461	9.018763457	8.120987345	9.776698764	10.31925555	24.88760804	18.41225225	29.00560979	4.076202217	3.943038195	4.951430537
Zm00001d018199	8.868784555	8.811002079	7.977384357	5.060315015	4.103072836	5.550503405	4.642146624	4.126818039	4.587520032	4.120199789	5.687608205	6.135369344	3.728039599	3.467684673	3.331079646
Zm00001d018200	30.55383151	29.81539722	24.54521718	26.00436984	48.5406934	30.54749435	38.24847706	35.23677985	29.16626864	19.23451405	20.10353336	16.74520384	115.1241537	108.8058033	106.3444738
Zm00001d018201	0.023224067	0.058501596	0.134693713	0	0.285610406	0.01896844	0.171869707	0.009334313	0.143208576	0.074736239	0.019524195	0	0.017325651	0.033945383	0.035800254
Zm00001d018202	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018203	0.041808055	0.008776233	0.112578209	0	0.211171608	0.051220588	0.732790686	0.436895313	1.606982212	96.30214447	30.69258256	67.85636023	0.023392278	0.030554305	0.032223878
Zm00001d018204	23.18587014	25.84675964	21.65073583	13.53379892	18.71602649	18.17357994	21.49979827	23.30713711	25.64313802	222.9580187	107.678899	248.5673445	16.49120777	16.30394832	18.40464155
Zm00001d018206	0	0	0	0.11959037	0.541498687	0.100696185	6.082603247	5.805877027	7.729101723	51.2936013	8.723578771	4.840736305	2.069443102	2.147419637	5.099670828
Zm00001d018207	6.191317276	7.09426624	6.086856485	6.346731132	4.987636215	7.178199487	7.499233103	6.797689165	7.176233057	3.241985096	2.278759714	1.332660173	12.28502835	12.04027495	12.69236971
Zm00001d018208	45.78839301	47.51339302	48.44244242	34.24402098	41.50945733	31.09880995	31.5906888	32.81444417	28.85847681	4.960882792	13.20431576	5.828030996	14.15259096	14.70623339	18.89889702
Zm00001d018209	0	0	0	0	0	0	0	0	0	0	0.019999843	0.017568878	0.017747738	0	0.018336209
Zm00001d018210	0.047885233	0	0.014877977	0.209021347	0.063095819	0.117331924	0.055953895	0.259824109	0.118111545	0.231145706	0.105673426	0.053045088	0.013396278	0.013123368	0.290649784
Zm00001d018211	28.14725732	24.01930797	33.05706894	33.69377834	42.16208848	27.80705395	39.47284599	30.67178642	65.84610798	6.996820396	18.7942786	11.39777663	53.78432019	47.06016434	33.34296123
Zm00001d018213	0	0	0	0	0	0	0	0	0.018859534	0	0	0	0.068449887	0	0
Zm00001d018214	1.645387445	2.488877628	1.643933074	4.32541183	1.732305948	1.67985396	0.433535398	0.418188223	0.477463306	0	0.040684046	0	56.75355799	50.15080906	50.33614959
Zm00001d018215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018217	1.221434247	1.442019207	0.903485574	2.488700793	2.435457863	2.242833194	1.523542038	1.650214046	1.255910949	2.98755559	2.427313549	3.286442948	1.818040788	1.684209872	2.15734873
Zm00001d018218	2.79924805	2.522103692	2.54077968	3.177293928	3.826563039	3.776261386	4.152967581	4.070533424	5.158979122	1.344711925	3.741473678	2.322756521	2.287743252	1.98829095	2.072694681
Zm00001d018219	4.630049598	5.176719877	5.550188231	1.958926644	2.206661344	2.601546545	2.18710738	2.811190069	2.625582284	0.166055837	1.035220051	0.278879558	0.826783113	0.785941616	0.708667315
Zm00001d018220	9.488244437	6.755416689	9.437237232	8.634147863	34.83703133	8.106722803	33.19291814	42.45874337	28.09471337	161.3519891	118.1243173	247.896264	2.364914406	1.821433991	4.212636479
Zm00001d018225	0.018695705	0.052981445	0.046470153	0.099095004	0.061585834	0.188964568	0.076460758	0.061992601	0.011528494	0	0	0	0.84207402	1.193827214	1.172602126
Zm00001d018226	12.17915226	13.29870762	12.82099114	9.425271291	7.619801081	9.95790431	8.727488132	6.374287605	7.853185335	5.748536664	6.767150517	6.077343144	6.812834966	7.434021219	5.627027419
Zm00001d018227	0.205128841	0.19756982	0.164957765	0.316022566	0.302085852	0.147829939	0.197394278	0.072746674	0.059524883	0.183057141	0.060864482	0.013366613	0.391578061	0.291007509	0.44641305
Zm00001d018228	0.152801431	0.13584986	0	0.011209842	0	0	0	0	0	0.049585498	0.034003678	0	0	0	0
Zm00001d018229	0.240751289	0.064977244	0.42743773	0.621955883	1.200923755	1.179813081	1.486965955	1.161165017	0.975571645	5.715757738	5.096060599	4.38139079	0.230921506	0.282771447	1.192891477
Zm00001d018230	15.70961841	14.71801396	17.83144669	39.79833999	36.66444923	42.69091134	37.62710631	35.15117396	42.83370957	12.11753566	21.79358202	14.74532414	49.42532749	51.17309064	49.14429228
Zm00001d018231	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018233	6.418174703	6.4844975	5.641933316	2.6247717	4.269369076	2.922422183	3.443503566	3.763068277	3.943904834	3.01225815	4.239465063	3.737924005	0.987092904	1.026909539	1.614479532
Zm00001d018234	52.10500265	52.53759718	69.37099504	168.6673772	81.84072999	149.3833531	12.93201086	7.820639479	11.83500591	1.496419483	3.770270208	0.534193034	121.2012089	107.1549183	107.7415585
Zm00001d018235	0	0	0	0.294985638	0	0.347732847	0	0	0.038893709	0	0	0	0.176453861	0	0
Zm00001d018237	0.077006575	0.038796026	0.057422399	0.204883754	0.128525449	0.025158291	0.011997624	0.04333112	0.025325457	0	0.34311409	0.210417493	0.028724277	0.022511283	0
Zm00001d018238	138.4383896	142.2724571	127.5293168	89.76999981	60.50306094	70.86171288	0.988409644	1.033720499	1.099592804	17.73557372	32.31753879	39.16517073	122.7337666	104.9332686	93.52653178
Zm00001d018239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018240	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018241	0.269162932	0.155380367	0.069690934	0.461571457	0.738878438	0.412201775	0.930445794	1.041262108	1.203327974	20.26242821	12.14851819	22.32521527	0.464353028	0.479482019	1.024330725
Zm00001d018242	25.09843126	25.68765742	31.43939128	74.03553478	64.85424714	58.64732458	51.20462576	50.30187049	54.89083804	18.96908831	32.48529298	21.25348947	38.35293604	36.65478406	40.783016
Zm00001d018243	5.598078724	5.7777396	5.644760891	6.933197044	7.521425321	5.659777826	6.518641996	7.585947267	7.079779513	2.698661335	5.580486971	2.497744851	4.538811441	4.041487456	3.767925815
Zm00001d018244	18.13836957	15.63301198	20.38132767	7.590316857	15.95964464	4.554588563	8.582971606	6.72389846	5.398293327	1.61258889	2.306209955	1.394876416	6.642791337	4.92989694	6.135150737
Zm00001d018246	1.293538847	1.309714835	1.352513479	1.313780796	1.074197382	0.93235254	1.049904298	0.999337335	0.804810559	0.782504454	0.832690343	0.995324199	0.892776557	0.919167414	1.52013405
Zm00001d018247	2.926123751	5.336873653	1.649384713	18.32643991	8.280053261	21.76407696	17.13324618	9.485757828	8.972505804	0	0.584743945	0.053138149	51.01305886	45.60921543	46.49311971
Zm00001d018250	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018252	0	0	0	0	0	0	0	0	0	0.21582075	0	0	0	0	0
Zm00001d018253	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018254	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018255	2.381957301	2.168127958	1.890614029	4.668201711	3.547384592	2.059922547	2.958736272	3.016909997	2.456240246	1.090436276	1.577586437	0.598679441	5.274975791	4.981000411	4.269652016
Zm00001d018256	0	0	0	0.052462061	0.295612001	0.343571941	0.344073411	0.253606096	0.103756449	0	0	0	0.502106248	0.44576381	0.761921197
Zm00001d018257	12.53886149	13.50177606	12.17024252	14.15295472	12.38018882	13.61731175	14.31537053	12.09112772	12.39013748	10.08378369	10.35388125	9.001608319	10.77507927	9.852413958	9.288198039
Zm00001d018258	8.647137548	9.479394375	8.064097018	4.963524236	5.598862312	5.809226614	5.69671127	5.595983987	4.835391126	6.279929833	5.615033556	4.949505893	3.696639162	4.106094979	5.196049988
Zm00001d018259	12.79923089	10.1080006	12.83942073	14.72766026	20.38973792	17.6725978	20.39598101	22.31185305	18.50089658	21.81051618	20.52009827	17.64933359	10.53532561	10.92017474	12.18329082
Zm00001d018260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018261	0.288828886	0.376325224	0.408468753	0.078667612	0.004374419	0.065076764	0.081464686	0.048036123	0.049131879	0.045786512	0	0.003677604	0.022290262	0	0.057573381
Zm00001d018262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018263	0	0	0	0	0	0	0	0	0	0.022446292	0	0	0	0	0
Zm00001d018265	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018266	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018267	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018270	4.676373208	3.050131633	4.685030823	6.248753361	8.283858888	6.386885465	6.286781382	7.508599328	6.046800917	0.559394508	1.022958806	0.105719878	3.51092372	2.680900326	3.048066725
Zm00001d018274	5.717061458	7.248215329	6.061106357	17.52498474	9.958408033	14.6135696	8.503981096	7.690188987	8.878399957	1.397301065	2.813133254	0.955019118	20.19267728	24.9999896	23.67052224
Zm00001d018275	1.991083573	1.776342133	1.793487622	2.760918599	2.612037935	3.297936749	2.760264065	2.96150523	2.732885554	3.306078611	3.141278423	3.049673226	2.03508335	1.720787534	2.135374802
Zm00001d018276	0.138192978	0.024864938	0.417098983	1.18181683	1.482728969	1.136764203	1.83393435	1.499663483	1.39996292	0.217818172	0.460559559	0.13121478	0.563340099	0.411192559	0.456485547
Zm00001d018277	0.498379507	0.430781944	0.601170238	7.586655292	16.91937614	9.326357351	11.09331958	10.12158424	8.49649622	9.622865073	8.73083921	5.58036028	1.689511033	1.960400476	2.818834962
Zm00001d018278	2.237729333	1.567697242	1.944203703	3.969890302	8.415428405	4.516432645	6.588626781	7.381072937	5.955671804	40.28003894	18.20049385	58.6712581	3.097766043	2.714043163	3.83743099
Zm00001d018279	0	0	0	0	0	0	0	0	0	0	0	0.042208396	0	0	0
Zm00001d018280	0.489423649	0.178080037	0.216269209	1.858292183	1.13213576	1.692235307	1.563170203	1.534347143	1.502281126	0.119999271	0.109720697	0.012048029	2.835769364	2.646848725	2.376530216
Zm00001d018281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018282	1.395023869	2.159692205	2.282757365	23.43673437	23.34448729	25.52248706	30.29921243	33.33324339	34.91082482	14.53397423	15.40739598	5.267047924	29.36775174	29.85907784	38.51994676
Zm00001d018283	0	0	0	0	0	0	0.148258348	0	0	0	0	0	0	0	0
Zm00001d018284	0	0	0	0	0.403295291	0.166658031	0.0397384	0.246035765	0.167765403	2.485843111	0	0.150690274	0	0.223684876	0.235907643
Zm00001d018286	9.516503612	9.881788271	9.73246371	7.724208861	8.495363739	7.267725707	7.920767068	6.243215475	7.129939307	5.278352868	6.649993524	5.955835328	5.468768253	5.183889477	4.803435216
Zm00001d018287	0.846005945	0.941972074	0.59357991	1.466060647	1.409886115	1.521823651	1.559628631	1.363841042	1.42919767	1.450179412	1.645782604	2.13067069	1.019212793	1.235885443	1.08297101
Zm00001d018288	0	0	0	0.190238995	0.226115351	0.046720034	0.356481717	0.160935528	0.235152343	0	0	0.042243717	0.021336889	0	0
Zm00001d018289	2.241767907	2.108054166	2.666312316	4.33923819	4.327201623	3.815235441	4.830084256	4.397062098	4.613081788	0.870871172	1.554178109	0.547793107	2.07158993	1.979347678	2.533151851
Zm00001d018290	54.43792988	55.29548168	48.12905186	37.35500692	40.40028266	40.2084429	40.49552147	37.85065999	38.55513852	120.0906611	81.70314455	111.2926983	44.00886816	38.59152757	40.17879643
Zm00001d018291	2.089114992	2.209012562	1.859622551	2.340319371	2.720393973	2.409190358	2.632217452	2.795051633	2.536122239	0.37777432	0.654743661	0.244556255	1.81624529	1.45656046	1.592870415
Zm00001d018292	0.620924569	0.747756055	0.588918936	0.142650824	1.901861326	0.473780232	2.208473474	2.462808201	1.686042299	91.6077006	33.03735005	86.23845273	0.499793259	0.471698824	0.642307901
Zm00001d018293	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018294	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018295	5.929169439	6.047971126	5.876845159	7.989415582	8.13747841	7.795235333	7.485533111	7.077344346	7.151893996	0.601711905	1.633430182	0.459284241	3.79355515	4.215340382	3.981999433
Zm00001d018296	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018297	69.47676255	64.13360522	68.64222502	23.75843345	30.23965391	23.44878499	26.11493017	23.61862672	19.48069857	2.312041696	3.934080573	1.866978382	11.11527418	11.39003389	9.732234448
Zm00001d018298	1.410037579	2.10411177	2.057163872	2.331973908	2.504168369	2.08425299	4.065345277	4.047177997	4.404123944	0.5284441	0.850396908	0.203735953	1.9894975	2.083378868	1.931427708
Zm00001d018301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018303	17.88296894	18.88581221	16.50142949	14.49309618	12.50882693	14.21945399	11.7758337	12.03497785	12.17548299	14.19861806	13.81077299	14.81264628	12.70690353	12.47715898	12.24315243
Zm00001d018304	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018305	43.66439411	44.01814597	42.4139613	56.84587726	73.13739562	64.17264957	69.90884915	65.24277368	68.09905304	209.2514794	211.4744611	235.0170432	38.28667613	36.57495215	49.04964862
Zm00001d018306	0.098638051	0	0	0.344447876	0.025994021	0	0.507137681	0.023787008	0.145977688	29.46586	18.43396775	42.48291511	0.022075829	0	0.228078096
Zm00001d018307	2.322189159	2.309057241	0.032549137	0	0.034509303	0	0	0	0	0.084281097	0	0.038682944	0	0	0.080744889
Zm00001d018309	22.8828889	22.31602698	24.90833238	22.24217648	34.02675969	22.93433333	28.60675667	30.32607125	29.92082686	37.55504155	33.54497683	38.20270054	20.45486047	19.87124133	21.57317316
Zm00001d018310	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018312	0	0	0	0	0.144689609	0	0	0	0	0	0	0	0	0	0
Zm00001d018313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018314	0	0	0.019274702	0.048355558	0	0	0	0.009350196	0	0	0	0	0.034710266	0.051004719	0.008965293
Zm00001d018315	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018316	4.861157647	4.486977265	4.839747549	5.061356574	5.493900685	5.045492308	5.197801232	5.635927414	5.940753069	3.540766441	4.995288588	3.273983475	3.840433564	3.928545029	3.790294118
Zm00001d018317	0.139859171	0.022019143	0.021727174	0	0	0	0.02042818	0.168638325	0	0.096444427	0	0.019366205	0.078253451	0.095824084	0
Zm00001d018318	19.14411633	22.78542316	18.15245021	4.668955028	4.036491723	4.688681612	14.32094131	12.84883276	11.59120252	5.589883386	12.92851482	12.01340112	13.64591347	15.95393781	16.47305582
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Zm00001d018321	0	0	0	0	0	0	0	0	0	0.923214732	0	0.114081902	0	0	0
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Zm00001d018324	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d018326	3.599708651	5.739656571	3.537735664	8.071368938	11.10097589	7.616085294	13.96120204	14.49888071	12.21632889	8.520788585	9.577702545	5.585459518	12.74164927	14.86094647	11.49647769
Zm00001d018327	0.076035784	0.153227762	0	0	0	0	0	0	0	0.031459764	0	0	0	0	0
Zm00001d018328	19.30276332	18.66493537	18.48498268	13.34784728	14.18283496	14.49788233	14.64128534	14.82571785	14.26328951	20.3820141	18.8931783	24.85182123	15.77365999	16.39062739	16.31238344
Zm00001d018329	0	0.005733923	0.005657892	0	0.029993101	0.005577467	0	0.005489309	0.016843579	0.069065515	0	0	0.025472111	0.024953191	0.089476792
Zm00001d018330	4.238532227	4.219780406	3.723690921	4.585037461	4.473836029	4.228604906	4.223610262	3.700855402	3.68128479	0.116292468	0.510390728	0.056044142	2.868478077	2.7792294	3.425025888
Zm00001d018331	18.78598387	21.76367056	18.00823858	12.71358273	11.34914983	13.32721974	13.17085338	11.65917368	10.79731522	3.905899275	4.809461833	1.476350548	9.912127512	9.535343521	9.765426539
Zm00001d018332	0.399794508	0.306504229	0.550872942	0.56364198	1.379955301	0.532394537	3.148251401	4.464305653	5.155666536	1.809973114	1.479581512	2.243254161	0.131297153	0.095275821	0.211012113
Zm00001d018333	13.23022637	12.12444591	12.73442348	13.11419317	25.03235983	16.48742695	25.76586605	26.4714145	26.03847583	8.115963813	9.697423826	6.404298659	14.0725067	14.76027047	15.96514485
Zm00001d018334	27.80836719	28.33153163	34.7774535	34.15481316	37.50488725	26.48824411	22.1674255	28.52730976	24.31204764	6.305041579	12.63155147	5.402944401	25.57904483	24.67489546	25.45089228
Zm00001d018335	5.246885962	5.731105235	4.865320148	3.078785146	4.031110281	1.542157875	2.232478703	3.011005628	2.28087963	17.67505058	24.70910269	19.18317269	12.25342721	10.43187346	11.43048447
Zm00001d018336	15.62856917	21.91562702	12.49972912	26.6643626	18.13950364	16.56467033	33.57413419	34.4574714	31.5483025	4.561442561	11.67678053	4.781262982	44.63761871	44.36096456	45.86238568
Zm00001d018337	11.26008155	11.1148905	15.46239025	24.14688963	37.48915427	25.0203085	29.72390296	31.63143403	30.24171109	5.220841307	9.638513354	2.697674822	10.17205159	6.951589421	10.23056972
Zm00001d018338	19.65624187	18.7765077	21.77112742	22.98918458	20.96665237	19.6955062	22.21787667	18.4615352	16.78458901	7.622989684	11.00215246	4.162621131	19.2206667	17.9827661	17.20392738
Zm00001d018339	6.302056284	5.437035503	5.344923105	6.152123155	8.489593558	6.615783857	8.130933209	8.234914874	8.54195215	6.086879085	7.093988459	5.290493609	4.249346807	4.02593245	5.107209378
Zm00001d018340	0	0.016540797	0	0	0	0	0.030691329	0.007917577	0	0	0.016560869	0	0.088176079	0.071983125	2.816501574
Zm00001d018341	5.683248174	4.971890364	5.236146799	3.628165705	4.720067942	4.385967071	4.933443572	4.666352162	4.297701343	5.85035799	5.413457072	6.680691616	3.664219445	3.055625968	3.304502572
Zm00001d018342	625.7985277	607.2352986	586.5172296	111.40361	103.8818418	100.2516602	116.7296795	102.0969057	138.8591805	369.9328532	268.2912216	384.3202069	55.02542892	47.26670686	42.80825746
Zm00001d018343	1.660002881	2.077462703	1.892230135	1.740620592	1.365319351	1.502629024	0.716582013	0.229481154	0.43031242	4.50592391	2.599979577	3.712889472	1.455314477	1.402485144	1.919189865
Zm00001d018344	0.98226769	1.439984511	0.920577019	4.81983601	3.2887488	8.127965182	4.252430095	3.359011245	3.59450714	0.355333531	0.487345995	0.071351578	2.793021449	2.48898825	2.531908647
Zm00001d018345	0.349515049	0.324212765	0.181969301	0.927760151	0.74370559	1.177560335	1.388036446	0.899821939	1.132959845	0.146565874	0.515200652	0.303462984	3.755266745	3.435411755	4.455879305
Zm00001d018346	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018347	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d018349	1.724897451	1.7636761	2.26738307	3.300700132	4.704832147	4.418055305	3.88988664	4.156810487	3.32533126	0.568587535	1.535752235	0.514436224	2.31731932	2.161020751	2.580428937
Zm00001d018350	0.238210894	0.587010331	0.836660783	1.097927606	1.364686086	0.964343971	0.338860178	0.686849843	0.357645336	0.714200208	0.248149566	0.344190284	6.212138381	5.586021406	7.316175132
Zm00001d018351	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018352	0	0	0	0	0	0	0	0	0.007598208	0	0	0	0	0	0
Zm00001d018355	1.971120344	1.907312788	1.786378465	2.94438198	3.532770081	3.166124306	2.590435699	2.855658979	2.899368182	8.973788788	6.60856258	9.946830468	2.014063658	1.924047375	2.178429519
Zm00001d018356	0.009772147	0.012308056	0	0.073124388	0.115886138	0.107749957	0.36540013	1.1900815	0.976193183	1.37469501	1.022808263	0.866011295	0.503025939	1.06054452	1.34445435
Zm00001d018358	310.7147767	281.1552187	332.9596238	131.1421866	188.4731997	139.6312968	204.7432389	270.6765565	304.3460536	550.9205542	604.9121639	635.082967	100.8509438	94.49220951	101.9603794
Zm00001d018359	118.8235447	126.9851503	121.6631791	101.7929017	98.03236053	102.4174305	109.7079862	106.5936372	114.2544889	199.5891603	155.5108094	243.396477	126.6351808	127.1900351	120.5411242
Zm00001d018360	13.49876809	15.74019356	11.9536352	9.695681274	7.770168985	7.99667444	9.619006624	8.598120302	9.825020872	9.89858617	9.519148905	10.03011571	7.845981116	7.751587201	9.248815796
Zm00001d018361	0.707895608	1.281670885	0.934760666	4.028033662	3.322944372	4.986796623	2.584925072	4.747932893	2.946481688	1.708533313	1.450603492	1.274283771	1.435786222	0.630516269	1.841453833
Zm00001d018362	5.831362678	8.896150676	7.676223805	51.54064294	9.937895176	25.20959797	21.47540413	17.88649336	13.32976475	0.157694324	0.304696991	0.167288319	132.2864655	130.4405453	124.852696
Zm00001d018363	733.9499582	736.5892599	805.9501227	493.1558661	480.2551285	538.8435081	617.6936953	725.8367481	640.5890235	595.7545246	698.5702587	567.6014664	695.3797944	694.3924171	830.1312853
Zm00001d018364	15.08857817	16.53021092	13.77282874	23.67537876	19.05792474	25.47235361	38.56130029	33.4666885	31.83523134	101.4469798	66.17293327	140.5645024	63.26730858	62.06406222	60.65561023
Zm00001d018365	0.330200361	0.321278853	0.231443146	0.866560832	0.923787504	0.634611119	0.952711773	1.013292213	1.026756529	1.016558043	0.789371089	1.161484614	0.894867092	0.645039995	0.908255226
Zm00001d018366	61.42161608	68.92119193	66.3864927	109.6034276	62.20706045	90.57754352	59.10689671	55.96018718	55.8279664	9.266183854	17.02436627	4.403824113	150.8014282	163.4655228	151.3406506
Zm00001d018367	0.198634479	0.43509715	0.2897963	0.064624775	0.307248339	0.010580627	0.242195886	0.301988307	0.20236768	4.085423703	1.437562934	2.630892256	0.009664277	0.028402186	0.109831922
Zm00001d018368	0	0	0	0	0	0	0	0	0	0	0.031690928	0	0	0	0
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Zm00001d018370	90.40493591	96.31615478	82.40077218	94.04064021	96.61678377	94.58288453	122.9551834	139.7410118	168.7197123	263.4690437	248.4823404	246.1548329	69.71667875	78.54086696	92.60473729
Zm00001d018371	9.196273087	10.60071812	9.519561521	6.743416624	5.715709941	5.961608243	6.181606049	6.195046176	7.244688535	10.58857864	10.31573543	11.987771	6.422946763	6.559373038	6.768046966
Zm00001d018372	0	0	0	0	0	0	0.013480875	0.013910883	0	0	0	0	0.103281348	0.063235809	0.346794189
Zm00001d018373	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d018375	1.821042095	1.665884619	1.705735449	3.260856944	3.596709396	2.672533983	2.965603494	3.226614853	2.737572887	0.280232454	0.667162454	0.178368942	2.595519516	2.605684171	2.694877661
Zm00001d018376	0.083872601	0.105637851	0	0	0	0.020551082	0	0	0	0.161943802	0	0	0	0	0
Zm00001d018377	0.269022492	0.211221709	0.138947302	0.814817728	0.787214268	0.843235122	1.016543419	1.200626865	0.853146883	0.130100155	0.299593864	0.135459504	1.129895445	1.187307661	1.793452737
Zm00001d018378	22.15879165	19.01261239	21.94625594	38.07871275	29.42263201	39.15109637	33.41403395	30.564818	39.62199404	20.34756392	19.96950981	16.0908958	20.1430905	24.60347233	20.81098589
Zm00001d018379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018380	43.05958604	38.75431001	30.22701764	21.41633981	26.01352673	25.08297908	22.85325134	21.40923205	22.06155834	23.64245771	32.01156919	25.13425844	28.1341239	28.30586488	27.93128648
Zm00001d018382	6.004965735	6.48259436	5.750317397	4.375339556	4.260415011	4.522615589	5.044978103	4.720896899	5.045798595	11.99766825	9.007108915	17.51990866	4.265429564	4.374219281	4.391726334
Zm00001d018383	45.68142199	35.71825735	48.29057207	66.38958411	102.8074562	60.4137892	69.35357892	87.39981853	67.77429516	6.580612537	22.68127859	4.182512591	30.50424031	22.71911959	41.58919291
Zm00001d018384	1.30470686	1.734576625	1.121032561	0.025110707	0.530599597	0.019733882	0.183510645	0.058265907	0.004966251	0.488727518	0	0	0	0	0.055867377
Zm00001d018386	28.50970631	34.09036611	47.7601325	95.96650448	54.84251241	74.63095293	59.70301174	58.83751353	63.48183813	3.965389173	4.448693915	1.408682768	237.3987719	291.8804519	258.9333485
Zm00001d018388	203.0232061	192.9112132	200.743858	146.6493615	220.563359	216.7715763	299.6644611	243.869552	289.8355391	151.0370354	157.6022266	195.7638704	60.23051081	52.21808948	49.42946215
Zm00001d018389	7.847536087	5.618274105	8.076119522	16.47496275	32.74422022	18.58765721	27.46931932	27.2498856	31.46260202	10.77557655	16.33707207	9.486203126	9.082069562	9.191353474	12.35973119
Zm00001d018390	0.549647563	0.465717748	0.571323018	1.458238214	2.409748325	1.273325835	6.270824153	4.362099001	2.957968946	4.672372938	5.633201365	3.775022681	12.42448009	9.574955391	12.66313599
Zm00001d018391	37.28393684	35.87717126	30.17530308	10.75682734	14.14126869	12.2468579	12.94116681	12.04777337	12.14221034	13.40203495	14.44436665	16.7545064	9.989323856	10.63262239	9.792099553
Zm00001d018392	3.344268333	3.793032305	3.586914949	3.488218178	3.507459857	3.580237769	2.803344403	2.415967066	2.203452106	1.227063976	1.806081051	1.068386068	2.884329749	2.534819108	2.927002235
Zm00001d018393	602.2052733	526.8159629	625.5269275	44.59543412	71.94491087	58.77609559	31.91700552	34.82286564	39.85817788	43.18501379	38.35781731	30.75329633	49.21189928	34.29514564	48.93660424
Zm00001d018394	9.401929902	7.74555731	8.642302817	6.290568734	7.923915176	6.360613328	2.929641378	4.228047994	1.874190618	9.133854561	5.271879004	12.40633285	17.07191105	19.49851003	21.54157173
Zm00001d018395	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.09360464
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Zm00001d018400	26.99192338	22.41900045	36.74046486	30.21426117	43.11008353	36.12277216	27.3984383	44.19321039	46.78647293	93.89840407	122.6928254	92.41950406	31.99183907	24.93544682	27.01848217
Zm00001d018401	40.04406193	37.41747945	53.16842663	96.97498536	68.21343584	94.70673759	54.52980057	48.89762804	61.1487172	8.972193999	19.66801452	3.900361533	46.44202601	51.66254253	53.42809713
Zm00001d018402	0	0	0	0	0	0	0	0	0	0.094510704	0	0	0	0	0
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Zm00001d018404	1.412614363	1.711342436	1.24975007	9.167079081	9.748304039	10.42787474	8.658865211	8.011243349	5.920341174	3.046170203	5.69126878	3.3749937	8.841543635	6.666671141	6.456577347
Zm00001d018405	11.51860965	10.75370932	11.39569696	10.51921912	12.34105979	10.56171618	9.492995461	11.5552997	10.28728307	2.326530155	4.058741775	1.238147034	4.14601121	4.957811875	5.719287032
Zm00001d018406	1.902834207	2.296419336	1.853974876	3.423263983	3.634221258	3.679610503	5.113187384	5.252302774	4.170133718	13.22219419	6.387612289	11.14896095	6.491867617	6.999210422	6.239539779
Zm00001d018407	1.962701899	5.071924247	2.200934003	4.994067912	5.008803287	4.974989743	8.791432545	8.949449436	8.165897936	6.518314372	5.00695737	4.360879544	9.681507966	9.236967297	10.98060541
Zm00001d018408	0	0	0	0	0	0	0	0.011715989	0.023966486	0.013400771	0	0.021527182	0	0.021303322	0
Zm00001d018409	52.56242838	48.58755803	46.1847249	32.39799662	43.21253879	35.8622296	41.75336369	45.06711566	43.62733603	54.88910469	63.46216747	68.5890452	29.62144708	30.71802548	34.46212344
Zm00001d018410	36.08078231	22.42608083	39.32372031	75.26097326	140.7061699	77.50070935	91.45731394	120.3190982	99.04774264	16.03637168	37.82698809	7.988526395	34.01430132	25.95666975	46.22249509
Zm00001d018411	3.375548097	3.087172313	4.52996458	5.771232156	9.125257206	5.857018772	6.388700248	7.78359049	6.397579359	1.675666021	2.378142061	0.596880215	2.772418791	2.744893468	3.548368165
Zm00001d018412	198.2328918	201.8861811	145.4670485	211.1502923	132.2321483	195.8920237	90.00315744	107.0888494	85.09626533	22.61219962	42.22517557	19.47917479	407.5178903	378.6360904	388.5595467
Zm00001d018413	14.21926062	12.653842	14.67390133	26.09616426	20.65480513	21.0540403	16.44324	16.82408903	16.92783703	7.500200501	11.90211688	6.514843866	26.51915923	27.65521568	27.45680538
Zm00001d018414	57.2549157	33.7037973	28.94337429	3.337339454	5.969708202	4.46318928	10.1855065	9.63187105	4.574533371	35.17020791	39.20732768	62.92545479	7.515857287	5.881481699	6.447913644
Zm00001d018415	7.422793134	5.679190172	7.572817963	8.02767318	25.03546484	11.79497231	18.75813512	21.07972224	21.12335004	11.76520407	18.59502411	13.79438793	3.012599342	3.461314999	4.124369114
Zm00001d018416	1.82251229	2.283411309	2.205574199	1.903080544	2.237550384	2.174222541	3.068644326	3.201133627	3.020481656	5.317367985	6.267396536	3.942411879	1.814628539	1.504981275	2.577154802
Zm00001d018417	0	0	0	0	0.016012317	0	0.809391739	0.776598222	2.397926826	53.21267681	72.6372961	68.74872038	0	0	0.140496107
Zm00001d018418	11.07702079	11.22681348	11.7473107	23.26346226	22.49662163	17.4529696	16.31048684	19.74231038	22.09678549	53.91531601	33.42699941	22.72153066	22.73185691	20.56637768	25.28099685
Zm00001d018419	3.368275024	2.6785064	3.85778038	6.688279202	7.553636374	5.955246981	6.791235031	8.377577212	6.744169198	5.264794111	5.346856551	2.794758599	4.079613265	3.735861612	3.726201106
Zm00001d018420	7.221007827	7.572989011	7.386142995	8.221521088	6.08607185	7.185299585	7.124005286	5.782466247	7.004330027	0.519528426	1.359311069	0.250373263	8.988465429	9.377127922	9.35350303
Zm00001d018421	4.076402213	2.839878531	4.613376201	5.51286708	17.29880762	7.160363235	13.00969763	14.60739919	12.55576785	8.896863595	13.78932143	8.003995612	2.973609278	2.418681305	2.969112666
Zm00001d018422	0	0	0	0	0	0	0	0	0	3.346414931	0	0.054854353	0	0	0
Zm00001d018423	13.79431019	12.47747862	13.47986388	25.14887876	24.09140917	21.58622788	25.04428925	23.78200404	30.17914525	4.262421955	9.735916665	4.116118394	10.42784828	11.07633295	10.20895549
Zm00001d018424	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018425	0	0	0	0	0	0.905358494	0	0	0	0	0	0	0	0	0
Zm00001d018428	6.60203366	5.789614897	5.121295139	6.090131603	13.86172633	5.512851035	26.3054375	26.17203463	21.9859481	28.90839309	44.8336517	43.23127615	13.75488563	12.99636532	14.74597683
Zm00001d018429	0.097512367	0.135098906	0.157545255	0.304032987	0.552493454	1.218553123	4.979317936	4.985295292	3.006494828	4.787688469	3.61520698	2.290019239	3.600942522	5.01344498	5.862355404
Zm00001d018430	0.009861433	0.004140171	0.016341091	0.02049792	0.056306836	0.032217614	0.149800106	0.134760633	0.056755451	0.090670284	0.024871168	0.07282699	0.172885751	0.104501013	0.17481783
Zm00001d018431	0.976867343	0.779026996	0.311139367	0.544870779	0.957289313	0.469095981	0.889084283	0.929281942	0.447996877	3.181973493	0.346654369	0.277329622	0.263673389	0.408977878	0.408624226
Zm00001d018432	11.35407563	12.1429175	12.59899876	30.58090398	18.14470759	22.90332294	13.21888747	15.41670228	15.45198572	2.065819778	3.02636848	0.751718248	27.85595498	31.66115895	30.0712272
Zm00001d018433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018434	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018435	0	0.010410502	0	0.051542231	0	0.151896603	0.115899663	0	0.020387452	0.045598272	0.156347019	0.018312421	0.166489659	0.126853938	0.152897819
Zm00001d018436	0	0	0	0.018532793	0	0	0	0	0	0	0	0	0	0	0.017180231
Zm00001d018437	0	0	0	0	0	0.168615424	0	0.027658383	0	0	0	0	0	0	0
Zm00001d018438	0.347961747	0.265262092	0.210533838	0.628104048	3.951465471	1.671547681	7.265180367	7.204332577	5.307701813	19.75153443	17.43039222	20.88056987	0.901722959	1.074076944	1.519178856
Zm00001d018439	15.02565957	14.37716309	12.9483399	13.83828982	16.60243487	16.24653851	16.41234737	16.22136823	16.41873532	6.977969051	13.2080601	6.499204399	7.92799339	6.999115222	9.165790042
Zm00001d018440	25.88868775	25.40480185	24.11141832	25.24107719	33.00036316	29.07001165	30.83050267	29.87539032	26.09217253	31.60827342	29.68448743	26.05741493	24.43429755	23.66153171	25.64654494
Zm00001d018441	0.032777588	0.033777404	0.033329522	0.115203851	0.26698828	0.259195375	0.323814262	0.27665617	0.271942306	0.032876871	0.221698346	0.128733768	0.386798555	0.12412853	0.292827817
Zm00001d018443	12.4093506	11.79131928	10.86632945	10.008655	13.63690328	9.306431318	12.92090971	14.090821	13.67410446	7.511687322	12.10124022	6.480973718	7.015788774	6.413578292	6.827464973
Zm00001d018444	0.906335836	0.57076667	0.568182479	1.355410982	1.072693703	1.11038541	0.974704044	1.005794783	1.182059576	0.674771496	1.233947479	1.670367869	0.973829655	0.835291426	1.173033281
Zm00001d018445	1.357828731	1.343720959	0.768421346	0.493915651	1.09158751	0.683233886	3.381017811	3.805590734	4.530335354	41.0092366	12.27633277	10.79758395	1.234556335	1.643551571	1.616556599
Zm00001d018447	31.89954581	27.80962929	29.3493616	6.677206786	12.80766592	6.518636126	7.468503005	7.0761798	7.360439668	13.05074041	18.47502185	23.77859582	5.173826477	4.331364948	5.230217108
Zm00001d018448	0.225462628	0.154893281	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018449	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018450	6.873984537	6.727962455	7.558578029	7.946249735	10.10119737	7.584569884	7.07196747	7.39305621	7.702126963	3.127118433	5.162907119	3.674354367	3.684061409	3.454337637	3.66598683
Zm00001d018451	0.132335101	0.051285092	0	0	0.52311273	0.1995429	0.249792685	0.122743084	0.364074659	0.252708815	0.26957346	0.022553049	0.148087228	0.033477781	0
Zm00001d018452	5.690758899	7.095132579	4.941219095	8.841713886	12.40898442	9.706750018	23.63201177	24.51288633	19.38889568	8.522355388	9.338763364	6.176611635	11.18177112	14.05217548	14.82002561
Zm00001d018453	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018454	16.41724934	13.34037826	18.6653379	15.0834071	37.38715146	16.3165864	42.44218517	46.31240271	44.68133044	139.6695255	129.031853	116.5030287	17.86440407	19.92159329	23.69511195
Zm00001d018455	0.039200671	0.09874678	0.036539032	0.097778752	0.206610539	0.36019639	0.904668186	0.744456604	0	0	0	0.021712362	0.197400642	0.128919455	1.019729811
Zm00001d018456	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018457	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018458	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018459	0	0	0	0	0	0	0	0	0	0	0	0	0	0.05698436	0
Zm00001d018460	1.603069298	1.823816107	1.65566207	4.427732591	4.900217865	4.831681108	5.426467978	5.710482431	5.546606443	4.273774043	5.089250989	3.166636396	5.293965438	5.085270091	5.784631781
Zm00001d018461	8.728714472	2.539024725	5.481265004	13.62992623	90.90525403	26.87884678	90.7313344	103.0891695	84.36521536	63.5928997	66.7399548	46.35130181	10.55783149	10.82510903	10.13890789
Zm00001d018462	3.572757077	4.075806693	3.184821009	3.601049394	3.871330066	3.468107134	4.592591529	4.203736614	4.567895768	3.727415243	4.20851097	2.221482716	2.797620583	2.613232206	2.893827842
Zm00001d018463	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.010419125
Zm00001d018464	36.40725133	44.56784252	41.76791365	133.0578263	61.12610837	118.1330988	70.11274591	55.13253645	53.01077739	0.102139141	0.429595759	0.278932105	308.3246179	298.1789679	278.9563148
Zm00001d018465	0.227096909	0.161522483	0.122855978	0.553122572	0.429488074	0.310957114	0.511993992	0.512217901	0.484362357	0.11422737	0.316698704	0.195334881	0.254128733	0.339745722	0.441710206
Zm00001d018466	9.646910017	7.208045775	11.21872785	30.28807374	39.30939815	25.94249588	27.83767131	28.71698488	24.0509625	1.635902253	6.891426864	1.075786357	32.54601041	33.08900306	34.50763007
Zm00001d018467	2.754277896	2.869828285	2.645064523	91.21528615	44.86967877	156.4172615	141.0525438	73.42500297	93.47344396	0.241729301	0.378898123	0	242.5912888	270.1482397	245.3664159
Zm00001d018468	17.86878832	19.89473174	21.76056577	70.34359707	51.46376646	61.56793346	57.93606337	49.98803077	54.39329085	9.034632629	12.43531216	6.222226822	93.54686975	98.07504646	96.78360812
Zm00001d018469	1.239181886	1.013476734	1.290049334	4.606255431	7.061346861	4.377053954	4.588416969	6.946926249	6.261875756	0.477198397	1.50176572	0.347634213	9.076479189	8.794541518	10.09376462
Zm00001d018470	0.180615895	0.524968589	0.250370347	0.996325984	1.006872051	0.68085903	3.928770875	3.325358385	2.621590161	3.458645153	2.776949732	1.24664042	19.30975486	25.64067455	24.74476981
Zm00001d018471	5.619518118	5.109289664	7.311326485	7.742113108	11.31506197	7.293456383	5.427545758	7.188763672	5.143674324	0.181646296	0.719711752	0.12644627	2.279552692	1.453448871	3.319525078
Zm00001d018472	0	0	0.004986983	0	0.010574615	0.009832188	0.028132968	0.038707124	0	0.298844677	0.050601305	0.075566285	0	0	0.009278434
Zm00001d018473	0.471109453	0.593364099	0.30400765	0.559299807	0.232783432	0.327434989	0.047638679	0.049158239	0.033519728	0.118702062	0.142808686	0.125450402	0.38525175	0.213530858	0.759391236
Zm00001d018474	0.008854426	0.301108926	0.077030148	0	0.011667005	0	0	0	0	0.354139689	1.284057271	1.618407685	0.287343227	0.106771861	0.102369249
Zm00001d018475	5.033614521	5.123557701	6.016541257	0.783237259	0.981364288	0.634085335	1.497180009	1.484052292	0.790089074	7.360021089	7.879716498	6.890479738	1.730445377	1.439183949	1.065396381
Zm00001d018476	0	0	0	0	0	0	0	0	0	0	0.239442564	0.420677014	0	0	0
Zm00001d018477	0.456036828	0.455028369	0.436727171	0.620453836	0.619104376	0.609499104	0.479821817	0.592724139	0.374946591	4.010577086	3.226406425	5.589749624	1.643627583	1.504099098	1.547486005
Zm00001d018478	8.738314465	6.013325763	10.02798658	23.13637744	30.8974778	23.20272815	23.73580799	29.86734677	22.1618962	8.406946363	15.46255895	5.523012141	10.38960788	13.38390784	17.72043363
Zm00001d018479	27.29025909	27.59919968	31.57127827	45.2345751	59.66291423	45.13950505	47.92451084	55.36167112	51.99780207	17.07534638	33.50158082	15.31787596	52.09686171	58.05885567	57.86841505
Zm00001d018481	6.511391334	7.187618593	6.401245042	7.999207253	9.788310727	9.648553877	12.33937393	12.04426394	12.90532991	20.07588876	13.81434713	20.12240108	6.260035715	6.160129763	6.556945385
Zm00001d018482	3.179808553	2.838560616	2.849213649	2.031320571	3.387731389	2.725403547	3.473448678	3.62328747	3.070977092	3.045720488	3.017588803	2.830153935	3.851813922	3.120197397	4.481183573
Zm00001d018483	0.106723138	0.080650912	0.026527166	0.412611449	0.632805258	0.614527096	0.411529757	0.154420574	0.460667295	0.01471888	0.16149756	0	0.262738559	0	0.123386511
Zm00001d018484	7.841368561	9.153274882	7.077886591	10.45171057	10.52945746	12.4991698	12.2829524	11.61551103	10.40310875	1.665893497	3.625469879	0.906782436	8.696546898	7.884667299	7.865396805
Zm00001d018485	1.11401307	1.506272965	0.590447984	0.623163789	1.187252364	0.652302929	1.636726853	2.567970652	1.495112405	2.801684602	5.330000074	2.567919366	2.969880238	2.604072584	5.085512931
Zm00001d018487	686.7982321	718.4976262	660.8002848	120.0746294	192.8629122	145.234519	230.0099233	289.088939	309.1456922	1204.24899	1028.980519	1472.311945	113.072068	117.0986012	150.1018681
Zm00001d018488	6.972561409	9.243867951	7.390499945	17.24122442	9.964201006	19.46197968	12.38931327	12.59978808	11.78798334	2.746603013	2.885994308	1.84612215	54.20206045	57.90688752	63.92632515
Zm00001d018489	12.46848607	9.956031852	12.38174916	7.258405655	7.439740273	6.53265271	7.57360305	7.025607775	6.625503464	3.096403482	5.072531025	2.242788305	3.813421491	3.911533479	4.496081439
Zm00001d018490	0.757926354	0.686213159	0.707147403	3.389211015	3.106036934	3.052147813	2.148632255	2.050284859	1.91281675	0.342375391	0.8449556	0.328537729	1.194776663	1.531682459	1.435044805
Zm00001d018491	0.302126716	0.729348625	0.59451629	4.929791293	4.578107134	2.868635891	5.354365239	6.587686889	5.371736976	0.104170638	0.603236514	0.055780378	0.422611871	0.82800479	0.727707738
Zm00001d018493	0	0	0	0	0	0	0	0	0	0.037299477	0	0	0	0	0
Zm00001d018494	6.794314139	7.282947914	7.776687124	11.89906116	14.24509636	12.68835312	12.15004593	11.18050439	11.07897886	5.212151124	7.513143401	2.184724434	10.3877615	9.927114528	10.38599434
Zm00001d018495	4.416246992	3.253029846	3.75478499	4.72235026	10.68226932	6.40666512	8.066594051	10.83260323	8.60225663	5.574009878	7.127151013	3.302621178	3.49681137	4.281967628	5.078135539
Zm00001d018496	46.35688742	43.86315302	41.40049158	25.95278176	23.49593104	24.05423765	19.43385803	20.08770529	21.57040213	26.52014403	28.38984909	30.3433334	21.30137925	20.8365572	24.53075055
Zm00001d018497	0.282296866	0.213332368	0.270647518	0.583427642	0.712052138	0.434785731	1.032002741	0.651595603	0.721168535	1.034515841	0.772996878	1.496567785	1.245545643	1.007967601	0.988446064
Zm00001d018498	11.9936159	14.49256184	12.13137437	44.61222086	43.45252331	46.27766148	85.42308901	77.73196241	72.48897348	40.16342504	38.42928745	25.90504492	147.7623409	153.8139554	162.7896973
Zm00001d018499	7.935314022	6.57122473	7.151914271	6.350954505	19.98154905	7.379416535	13.46325381	18.26242068	14.02466629	7.798752909	13.29234531	6.672383503	2.894698169	2.7535322	3.416887161
Zm00001d018500	0.307877654	0.286213438	0.332524781	0.292549832	1.125262339	0.408624939	0.518218571	0.680589013	0.813639716	1.248567484	0.998340683	0.79172993	0.061522318	0.068304846	0.220349123
Zm00001d018501	20.03496411	18.50954338	22.55366329	10.77826321	17.21442484	9.629925084	12.39861605	14.4522961	12.35433361	7.177500786	8.466915741	6.407234525	4.873206674	4.906949097	4.426874386
Zm00001d018502	19.64158291	17.36427747	26.86004265	5.683389962	16.87373884	6.925801474	6.088861903	10.06220529	10.01902773	30.52316905	21.68925298	25.01696979	2.872512505	1.781141949	1.989620507
Zm00001d018503	29.10988802	21.23793259	32.02220992	47.75477352	40.11890994	51.46466387	39.40683049	30.53817917	37.47938892	15.29735992	24.32375024	15.78993976	15.46960271	16.48452807	17.7056022
Zm00001d018504	12.37266834	12.68819656	13.04120079	15.30994606	20.00122573	17.54953314	16.596866	19.10050394	17.70593093	5.528541644	9.398014674	3.252242829	10.6683692	10.53945071	10.00568516
Zm00001d018505	0	0	0	0	0	0	0	0	0.013286385	0	0	0	0	0	0
Zm00001d018506	13.67123392	11.89674271	7.094147918	4.317900166	5.825260034	4.296043632	4.533119316	4.934614714	5.123816858	3.428160997	5.92200543	2.714186243	3.377601892	2.958450361	2.699304269
Zm00001d018507	11.80442272	12.22770779	10.57118455	10.76576435	12.3421425	11.95138279	11.55196115	12.50715484	12.55587968	15.23490234	14.86215567	12.86908862	8.031476834	8.011470576	8.530378382
Zm00001d018508	0.111148243	0	0	0	0	0	0	0	0	0	0	0	0	0	0.042834179
Zm00001d018509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.016013994
Zm00001d018510	0	0	0.306137833	0	0	0	0	0	0.030379141	0.135891067	0.124251276	0	0	0	0
Zm00001d018511	18.51579879	19.17426007	15.89428123	19.59478789	12.5785291	16.82158692	13.14727929	9.032545877	10.72162443	21.34938548	22.67781754	22.47088582	21.34848092	19.36841702	19.45812841
Zm00001d018512	20.86501587	22.44992762	21.37563908	20.21500075	22.86374073	19.46596461	22.93822741	22.14459025	24.80192658	23.18499297	31.45266264	24.86918697	11.03473989	10.291998	10.03501669
Zm00001d018513	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018514	12.30993189	12.27267543	13.5513371	11.29790163	12.97493288	11.9707194	11.82022819	11.84630374	11.3378475	3.162037789	7.041634829	1.736171104	5.527120985	5.124896729	6.559437894
Zm00001d018515	2.773676499	2.106348359	2.931753091	6.901461108	6.87052601	6.73796514	6.474138296	6.574085416	6.623438173	1.125105051	3.01761926	0.376538352	4.077584616	4.501282728	4.810122818
Zm00001d018516	5.631389119	6.551515888	6.576424741	8.225959156	8.144422617	8.662288732	3.707610183	3.259524254	3.697461183	0.330787465	0.283550404	0.011070448	2.723097122	2.908639195	4.402057309
Zm00001d018517	0.799326177	0.740600848	1.381632137	2.841694981	3.547083269	2.825290434	2.275984834	2.392896226	1.903596145	0.101370352	0.382335706	0.01017767	1.120659894	1.248907225	2.188170219
Zm00001d018518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018520	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018521	71.50272344	73.31727977	70.72695077	84.03298015	114.1592403	83.8785903	92.23566571	129.7164989	113.2726037	320.8323372	219.5346248	212.3817955	75.4607037	71.72295777	82.47874155
Zm00001d018522	65.3622851	67.89990486	59.56420277	34.08778904	33.18341956	31.71053946	34.41910029	29.94129384	34.39724868	19.11859018	23.0139819	16.49326399	26.03062034	24.88805034	23.47311435
Zm00001d018523	22.92283614	23.08299951	22.85155325	22.56214282	27.94653319	24.25804028	27.27182999	26.35089868	24.95737577	26.17599183	29.25981116	21.29524943	20.8355944	17.72533979	21.3459459
Zm00001d018524	14.64626881	14.57994704	13.29270648	6.693660885	7.724129161	6.818744884	5.762438474	6.035583183	5.475160123	3.306655616	5.98331307	1.27707802	6.168502607	6.354725858	5.605529708
Zm00001d018525	6.805961355	6.95357526	8.612035777	13.96807121	11.0453725	11.0994791	13.04091895	13.06355623	12.66055624	6.025928695	7.335979975	4.473229336	15.01094143	14.29335037	15.30866614
Zm00001d018526	0.116045235	0.111359545	0.130485992	1.385240156	1.08490889	0.920728363	0.929820744	1.152708386	0.872325846	0.053348504	0.027873669	0.018364235	1.366604484	1.18126229	0.856094914
Zm00001d018527	8.116350249	8.089923527	7.257933166	7.92442335	12.79467584	8.070276937	10.16029914	11.28647287	11.10177615	12.15886928	13.80823277	10.81399112	5.587716747	5.483353806	5.573234208
Zm00001d018528	0.546849357	0.719783959	0.618398424	2.857055494	2.025341685	2.323753467	1.128312808	0.974212966	1.209089793	0.231014813	0.627468945	0.332903324	1.218370989	0.702088386	0.768931398
Zm00001d018529	204.979271	226.2181484	222.0096781	54.8677138	66.55249793	62.5031256	99.41520592	92.57946809	97.73982808	123.8736439	108.1992806	99.41707205	52.77600222	52.33671269	58.72498844
Zm00001d018530	1.007815321	1.352130634	0.844086767	14.07185495	8.371824256	19.16487235	9.318654886	7.502513666	7.322395243	0.332377789	0.027627988	0.024269828	22.01618216	18.78164327	18.31346495
Zm00001d018531	0	0	0	0	0.07238114	0.075711798	0.05616467	0	0	0	0	0	0	0	0
Zm00001d018532	0.703411763	0.671174029	0.837777117	1.651517138	1.734329571	1.76272293	1.26403894	1.281869829	1.439264329	0.595301393	0.631669176	0.37189455	1.53552	1.305620416	1.019630441
Zm00001d018533	0.574614741	0.578983514	1.034064427	2.981199846	2.810500786	2.74834448	2.454774877	3.076274346	2.522827247	0.234576585	0.324624215	0.066199342	1.851875558	1.491633646	2.051460477
Zm00001d018534	1.605827476	1.407582445	1.685580333	5.0203278	5.346970054	4.42655635	2.370868658	1.687688185	2.03395579	0.044892584	0.410472966	0.060096716	1.384154501	1.677103988	2.283061743
Zm00001d018535	47.44186981	43.69923386	51.74269712	41.40453858	43.32640627	47.21082206	62.42775343	59.37853577	57.22206727	40.278636	34.27954495	37.25951752	46.36699331	46.57559633	46.91578092
Zm00001d018536	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018541	0.460600624	0.803254418	0.603888329	0.334564607	0.340135754	0.359662963	0.331207282	0.23801979	0.174784096	0.034903527	0.095741566	0	1.46132019	1.009853158	1.205478447
Zm00001d018542	24.70663835	23.35545215	27.12691052	29.90767505	33.05536217	25.26098617	24.47463437	26.41263201	27.09324565	13.58680629	18.29047643	13.19600527	19.240407	17.76955526	18.62787616
Zm00001d018543	0.764730455	0.853344426	0.992093877	1.263285404	0.724796967	1.34782025	0.728979311	0.59046169	0.504654466	0.074013289	0.558307685	0.118895957	0.705624964	1.051582335	0.589421844
Zm00001d018544	15.00396427	15.38697241	16.91050518	27.48759045	21.54487429	27.56408538	18.00099551	20.60549528	19.95326788	8.488651275	17.4928605	8.72309507	37.26816521	41.1982289	39.16660349
Zm00001d018545	8.41529153	9.606564276	11.04257459	13.68702162	16.19437111	13.44536361	10.72873766	11.44580235	11.50182214	6.58076384	7.019934282	4.404761969	8.203452904	6.879226681	6.703469741
Zm00001d018546	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018547	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018549	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018550	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018551	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018552	0.010841581	0.013655012	0	0.175774947	0.11428299	0.31877809	0.139352265	0.509826687	0.173818794	0.134570951	0.095701072	0.180147175	0.400358558	0.380317505	0.564045633
Zm00001d018553	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018554	0.910627173	1.146938294	0.705494108	1.194691835	0.88822648	0.898309855	1.050248796	1.483025266	0.758427332	0.554555455	1.386944123	0.458523389	2.487999439	1.503874444	1.832161607
Zm00001d018555	3.66001538	3.856567145	2.527043271	9.412648467	10.52778305	8.660312416	7.603072003	7.686949421	6.932982334	1.781563983	1.99095549	1.0069749	23.40959187	23.71940336	24.90487099
Zm00001d018557	28.28666817	30.54818655	28.57851736	22.42281335	21.59070838	19.80976491	18.80203831	21.32298159	20.2810268	15.59936569	20.73744862	14.27275395	16.48721404	17.55298672	17.9208344
Zm00001d018560	27.81096161	27.65213855	26.36116231	8.552473308	7.619911384	9.492011915	7.465644511	5.663090928	10.42536757	2.184727575	2.544070828	2.254302612	5.671833285	5.305916409	4.421158827
Zm00001d018561	2.700490651	2.933602247	2.684942184	1.136677992	0.400307918	0.496270582	0.118332126	0.366319916	0.124892022	0.139665818	0.127702701	0	0.151096788	0	0.078053393
Zm00001d018562	6.858749336	7.201278083	6.106763428	4.339474992	4.668565699	4.532090323	6.912968781	5.899238243	7.728882566	1.861029306	2.586465865	1.985937174	4.734957232	5.190044238	4.107460751
Zm00001d018563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018564	0.374554354	0	0.930994507	0.233563971	0	0.229440166	0	0.225813647	0.230964699	0	0	0	1.047845873	0	0
Zm00001d018565	14.56802107	17.3811861	15.05207946	17.34167663	25.70714319	17.81275462	28.66106475	31.44458973	27.9085299	12.23001818	15.97063519	7.857530331	17.72197668	17.29296382	17.34999469
Zm00001d018566	0	0	0	0	0	0	0	0.232174595	0	0	0	0	0	0	0
Zm00001d018567	30.48528024	33.80177059	31.97255274	24.74934348	23.45646645	25.43997902	26.41487817	25.3897597	26.60569211	55.41912154	50.98357325	62.09441407	17.68502302	17.64465971	17.4928035
Zm00001d018568	0	0.03830694	0.075597997	0.037931412	0.04007532	0	0.017769563	0	0.075018567	26.3632826	0.1534137	0.741215118	0.017017297	0.166706192	0
Zm00001d018570	0	0	0.006394674	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018571	41.81192951	42.09790741	40.5161648	39.06211303	33.95753825	48.10524605	42.31333086	42.48665978	39.3149437	8.282869064	12.8619935	4.561557986	75.41518637	74.15661546	78.56030596
Zm00001d018572	0.043608402	0.109849887	0	0	0.114920934	0	0	0	0.107562507	0	0	0	0	0	0
Zm00001d018573	13.97247952	16.52708629	13.44496653	29.62508455	40.17218382	32.59730642	34.87960187	35.63962787	32.9340991	13.49046894	22.83751342	6.065600916	31.67781363	33.16929234	35.82172703
Zm00001d018574	0.782870235	0.36519554	0.270264842	1.102927214	1.146162651	1.296592413	0.406570612	0.961444106	0.661543638	0.439880679	0.621585785	0.17665758	0.876056931	0.572139895	1.35765724
Zm00001d018575	14.21284191	11.93775216	13.9507891	43.02308043	27.76320861	40.76514013	28.53014011	21.02418841	24.39105282	29.92685977	24.44425527	22.67301265	88.8195674	95.82031202	90.85564561
Zm00001d018576	0.038949384	0	0.222669484	0.320601485	0.205286112	0.248135291	0.254869193	0.140892275	0.096070786	0.204126965	0.176819124	0.138068353	1.673687493	1.895777121	1.098751608
Zm00001d018577	0	0	0	0	0	0	0	0	0.028007347	0	0	0	0	0.074685482	0
Zm00001d018579	0	0	0	0	0	0	0	0	0.05564496	0	0	0	0	0	0
Zm00001d018580	0.368476602	0.492511785	0.925233403	1.472429413	1.02058702	1.750459354	1.274120659	1.57771449	1.354027369	0.093341017	0.009482874	0.074972141	1.26225658	1.566286289	1.12153452
Zm00001d018581	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018585	0	0	0	0	0	0	0	0	0	0	0	0	0.039736493	0	0
Zm00001d018586	0.44360936	0.304760526	0.250599554	0.201181946	0.425105754	0.296444817	0	0.048626538	0.596829133	0	0.152565173	0.223368326	0.180513861	0.442091053	0.792621844
Zm00001d018587	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018588	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018591	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018594	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018595	35.93838995	39.62420513	36.22151703	54.26970019	37.45278906	61.72403701	35.70807188	34.00798183	36.24956209	25.54382508	23.40558459	23.16271561	60.97988061	67.37615195	66.0692062
Zm00001d018596	16.5827004	16.26236028	16.76834858	27.71339006	24.59500553	31.23268118	29.58624693	23.52543664	25.94903265	7.666438945	9.019003229	6.572316252	17.55268389	15.80139141	14.25004675
Zm00001d018597	19.28422021	16.79899484	18.51013876	5.059603259	6.480594655	5.855387657	5.844452542	4.590167241	5.106103712	2.222730403	5.956863778	2.462499596	4.135583569	5.391623873	10.89059002
Zm00001d018598	41.11668657	47.37648729	34.00049799	38.19751807	35.88523018	43.45942421	50.3493166	49.19862738	48.48562319	154.4751296	119.7310218	169.6226763	27.42790839	24.86524893	25.52742831
Zm00001d018599	16.92432874	23.87489676	18.74771494	16.57084784	8.807979953	17.33770606	9.479044816	7.696028358	7.566876585	2.991036051	2.752147056	2.797755565	17.61790819	15.27278112	15.6153806
Zm00001d018600	0	0	0	0.009720735	0	0.009549106	0.009107661	0.037592694	0	0	0	0.008634192	0	0	0.009011295
Zm00001d018601	0	0	0	0	0.040053044	0	0	0	0	0	0	0	0.008503919	0.041653382	0.043929439
Zm00001d018602	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018603	0.0284521	0.02866842	0.010608106	0.085162139	0.101222502	0.122002003	0.106388092	0.147519051	0.122812654	0.054936191	0.125576537	0.044125123	0.159194066	0.187141145	0.174340903
Zm00001d018604	7.901973206	8.154904056	7.876865227	8.947929156	7.464942063	9.212022674	7.3675948	6.573977215	5.961845571	0.693859786	2.220494558	1.144914562	3.58598006	3.812663976	3.945130692
Zm00001d018605	0	0	0	0	0	0	0	0	0	0.021232979	0	0	0	0	0
Zm00001d018606	0.14932173	0.229864887	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018607	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018608	0	0	0	0	0	0	0	0.026290903	0.107562507	0	0	0	0	0	0
Zm00001d018609	0.707953367	1.408688558	0.473194771	2.203612035	1.473718447	1.639928081	0.931517907	0.88232408	0.84375485	0.795876367	0.187552922	0.112034087	3.541700811	2.426075654	3.789818299
Zm00001d018610	4.653139771	4.497293889	3.651460976	7.758046452	7.770501522	7.560790753	6.636333293	6.525956346	5.651925857	1.231141623	2.747741913	0.965502412	4.263143425	3.791027381	3.469964912
Zm00001d018611	0	0	0	0	0	0	0	0	0	0.014753432	0	0	0	0	0
Zm00001d018613	41.73451102	43.28850723	36.01083348	8.918649662	10.79513514	9.166811849	9.879493637	11.33198277	10.11242575	28.3180022	26.3316751	34.67274288	11.0378033	10.13429611	11.71679585
Zm00001d018614	5.845371716	5.230946178	4.200927767	9.040967223	7.360796428	8.374566068	6.268854108	6.237066787	5.601246881	1.331136475	3.287798135	1.471855275	8.275804721	6.055215225	7.081699417
Zm00001d018615	0	0	0	0	0	0	0	0	0	0.005246212	0	0	0	0	0
Zm00001d018616	12.89739049	14.69830076	12.80102304	13.54473483	17.07624507	14.98377143	16.54648043	17.54617581	16.64102907	18.0697764	19.35979588	14.01125421	8.450532683	7.868846822	8.669030302
Zm00001d018617	0.051347357	0.080840233	0	0.176105041	0	0.078634423	0.119998775	0	0	0	0	0	0.387850557	0.816187257	0.341346176
Zm00001d018618	0	0	0	0	0	0	0	0	0	0	0	0	0	0.027298519	0.009596729
Zm00001d018619	1.128884731	1.791142158	1.685399574	2.760939038	1.207363025	1.526730543	0.505370177	0.309358642	0.551466918	0.101098582	0.591609294	0.048721842	3.847195619	2.780409007	2.389940484
Zm00001d018620	0	0	0	0	0	0	0	0	0	0	0	0	0	0.014779967	0.031175172
Zm00001d018621	0	0	0	0	0	0.089487794	0	0	0	0	0	0	0.013622929	0	0.042223897
Zm00001d018622	0.453440594	0.314110559	0	1.951014465	0.687095681	3.583147671	0.105969068	0	0.111843602	0	0	0	2.359477821	1.192986006	1.572717619
Zm00001d018623	64.20067321	60.82716504	63.73121116	266.7055948	139.8777094	234.402286	24.84974636	9.684319621	15.78376763	0.457525957	0.66053121	0	943.6841049	993.6325022	843.4409268
Zm00001d018624	0.004402974	0	0.005472029	0.02745599	0.046412512	0.043153964	0.005144875	0.005308984	0	0	0	0	0.039416553	0.082053808	0.07635658
Zm00001d018625	3.546473413	5.635942037	2.739902178	4.243286633	1.99249773	5.484452302	2.339914515	2.139248134	1.299441225	1.48929075	0.925123465	1.011697986	18.46716107	18.85413946	20.93810313
Zm00001d018626	17.56031786	16.19759604	14.45788209	18.35805559	20.97327558	15.33429861	15.55314094	19.59185849	16.57767056	26.32071747	29.99843517	25.9288589	31.63759092	30.24372353	26.69316957
Zm00001d018627	104.3697774	83.50702652	95.64048355	55.27193801	111.803288	50.91630552	97.63706177	130.7577304	123.0022346	187.4589771	204.0246927	192.6112706	49.15955422	42.97605923	37.0767972
Zm00001d018628	1.729352667	2.619638127	2.93342842	17.77880962	10.46959171	19.12550473	15.51061092	16.28714704	14.35297547	0.64461147	1.119854451	0.258878163	24.34692276	25.87479584	26.15389074
Zm00001d018629	8.898180688	10.74485472	5.287769356	41.37292408	25.07141774	40.74828355	40.53015504	35.70317097	39.39425847	0.059573098	0.78982002	0.023924759	46.93488721	45.81299489	47.84192089
Zm00001d018630	1.700402229	2.184496157	2.324591385	7.931297932	4.66030114	9.749494825	8.504017679	3.649530508	4.529665879	0	0	0.037672568	6.850096901	6.896950347	6.644731939
Zm00001d018631	2.959377329	0.937553464	1.805115512	6.543823502	32.41537228	8.452417279	23.23034058	27.34264394	18.20388299	3.205080136	2.587124432	2.393333771	4.774447796	6.34902637	6.611993097
Zm00001d018632	3.370118129	3.113429989	3.299347104	9.754283237	15.55266084	12.13338293	15.05535505	13.98298494	10.92006466	1.096214272	1.703940104	0.299365503	14.88940248	15.32670564	19.38968806
Zm00001d018633	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018634	15.41364609	15.60874932	17.29817283	11.5210801	17.06289861	13.02289233	12.01124618	11.93440451	11.53273277	0.895820351	2.379257329	0.536791484	4.591872397	3.967117067	3.993172732
Zm00001d018635	0.031121508	0.100793969	0.016576244	0.47685028	0.790852229	0.697199647	0.940307476	0.830920785	0.855358045	0.00613167	0.112129201	0.039399994	0.07960221	0.053611627	0.107942131
Zm00001d018636	22.82357234	23.25679026	20.89131003	10.22867335	9.946486235	8.679797424	8.385618222	11.33949669	8.532631327	11.74579586	20.93773248	14.00235867	13.05536063	12.50686146	15.64027152
Zm00001d018637	2.041735017	1.97623609	2.711273897	3.474216286	4.757751334	3.303224914	3.670159962	3.638842784	3.849474644	1.153357357	1.636517423	0.799355178	1.683842014	1.560623022	1.872251471
Zm00001d018638	0.27668818	0.24126216	0.273331677	0.831715604	2.327685639	1.408074419	2.611351136	3.490209476	3.981054729	0.371814037	1.207774633	0.275066444	0.635124016	0.482193552	1.000679332
Zm00001d018639	82.65386815	78.19518412	81.06038838	81.7103938	74.40180892	86.14486885	80.83100341	71.59694013	70.06063915	2.643017504	8.69924251	1.330562766	196.259169	195.0323083	177.4938802
Zm00001d018641	2.690944233	2.272488461	1.358226904	0.257166967	0.950957725	0.581040783	1.469781378	1.976635746	1.46225388	0.327045525	1.118120931	0.651002438	0.473032081	0.632930358	0.810554465
Zm00001d018642	15.05243754	15.52156269	13.83250544	13.06984577	12.67772626	12.69122567	16.60944303	14.62494986	12.31249134	15.16528308	13.11379596	9.469874917	13.40029909	12.0615405	11.24778485
Zm00001d018643	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018645	5.361268204	5.465334749	9.224090493	0.647739297	1.280396651	0.903139478	1.84023857	1.878736334	2.74808365	0.739407274	1.436655382	0.408304161	0.318719786	0.367325654	0.348657619
Zm00001d018647	0.040387693	0	0.008365657	0.369378373	0.470080938	0.461817528	0.361813146	0.4058197	0.722233777	0.306357076	0.263139243	0.335547397	0.045195125	0.081169746	0.194557017
Zm00001d018648	0	0	0	0	0	0	0	0	0	0.04508042	0.082438085	0	0	0	0
Zm00001d018649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018650	0	0.046982182	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018651	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018652	27.05941952	24.32521118	23.96748661	122.7165091	52.87296824	110.6667985	44.38557181	25.21009112	29.06648491	4.801554689	10.08930653	5.393027065	64.65722473	55.94483793	44.12319518
Zm00001d018653	38.05969928	39.8136517	37.35747063	33.72848631	26.7515952	34.60089292	29.26569483	28.86100874	30.45907595	18.71781443	24.08428578	27.9339052	22.72539013	23.61221527	21.14889151
Zm00001d018654	0	0	0	0	0	0	0	0	0	0.766689621	0	0	0	0	0
Zm00001d018655	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018656	0.070470278	0	0.131371003	1.318312105	1.934477699	0.70507515	2.017440749	2.45000047	2.404493314	3.207274335	6.679706981	4.475656482	0.722869619	0.721018604	0.977679097
Zm00001d018657	10.90206869	10.23646316	10.15154243	4.742130179	4.861644543	5.025281158	4.929835715	4.427550004	4.880146682	7.345663437	6.666303924	6.404409715	4.094204511	4.062885385	3.726604737
Zm00001d018658	0.369492809	2.326887799	0.688810125	0.230407701	0.486860982	0	0.215876175	0.222762111	0	1.528774499	0	0.204653683	0	0.202525496	0.213592055
Zm00001d018659	12.62341278	11.11519718	11.64532623	12.43223159	14.17973155	14.17300979	13.98935747	13.91484508	13.3241872	5.175085089	10.97244618	6.074218805	9.784416849	10.8928511	11.62721701
Zm00001d018660	14.48635979	12.49996337	12.67189673	10.14806137	6.33122984	13.2451296	6.692387236	4.33663771	6.31384041	1.725734812	4.652599437	2.962340649	14.53042172	15.23771325	11.3666274
Zm00001d018661	0	0	0	0	0	0.014628063	0	0	0	0	0	0	0	0	0
Zm00001d018662	0	0	5.311776632	12.46109725	24.31684126	14.07898064	23.91264413	25.73340529	26.07605792	14.32659001	21.23751434	7.431089619	6.018063047	7.043526461	8.933719865
Zm00001d018664	8.999820657	8.94378385	8.292330258	8.708420103	8.985406234	8.184462417	8.087619064	8.375136792	9.185606793	4.482822236	5.355274541	3.039730684	7.603580279	7.918698498	7.544112212
Zm00001d018665	6.794760399	4.251304246	5.686985298	3.033754366	7.329776024	5.051692267	7.601818961	6.601337523	6.186031057	0.06068239	0.42009785	0.069629299	5.880270155	5.381498166	6.242387387
Zm00001d018666	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018667	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018668	266.7259348	266.3869937	281.486436	174.709014	180.5735269	164.6702072	192.0273245	211.9769091	162.6464833	158.0790046	203.4974121	150.8104799	166.2208152	141.6251967	154.1113219
Zm00001d018669	12.23337074	11.9796769	11.67748819	9.421705238	11.09402288	10.08904416	10.23809151	10.67591803	11.70651979	7.926899269	11.88270756	8.121574349	7.283589628	7.029844492	6.227205486
Zm00001d018670	0	0	0	0	0.08886328	0	0	0	0.011881905	0	0.157940972	0	0.043124876	0	0.055693489
Zm00001d018671	0.030139405	0	0	0	0	0	0	0	0	0	0	0	0	0	0.027876212
Zm00001d018673	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018674	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018675	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018677	0.42309428	0.599499913	0.482004248	3.748618911	5.574887839	5.194282758	7.570280565	8.74703939	6.685467532	0.753709155	1.244916075	0.488213169	2.968964199	2.956793894	4.178196614
Zm00001d018678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018679	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018680	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018681	0.164922822	0.054663396	0.118664855	0.173208075	1.555482197	0.223321762	0.770849275	1.507144798	1.209668443	3.567464047	2.101621587	2.913488808	0	0.057092902	0
Zm00001d018682	4.652017098	1.6740665	1.494547895	0.434147844	1.66794966	0.542795949	0.739575785	2.060549528	1.170862708	9.514733879	8.061232975	14.3380749	0.283306477	0	0.109762584
Zm00001d018683	9.652144319	2.311806119	2.753114544	0.276275901	4.503464083	1.977328099	1.516130358	2.213182826	2.302696659	12.74450593	6.784205969	19.91204534	0.531199644	0.624453612	1.024450782
Zm00001d018685	0.047370873	0.023865516	0.211941577	0.047263118	3.233256264	1.079465896	3.42080708	4.283886753	4.498449656	6.820686226	5.47183505	4.260994623	0.275649545	0.249262149	0.361463478
Zm00001d018686	0.060358649	0.088692265	0.225041719	0.062730574	4.122376246	0.887371239	2.785898717	3.784497147	3.597882758	6.576317675	2.663996734	2.384765061	0.056286055	0.011027878	0.011630472
Zm00001d018687	0.692925555	0.418680428	0.541140557	0.875864891	2.350438103	0.891948646	2.344252614	2.531935516	2.531950508	2.389146449	2.417713885	1.61816583	0.597272148	0.420864626	0.544001409
Zm00001d018690	0	0	0	0	0	0	0	0	0	0.757892456	0.050705484	0.059389696	0	0	0
Zm00001d018691	2.167720365	2.049391018	1.760201754	3.815894091	11.19722505	4.761813367	9.879258595	11.34157747	12.96699198	5.599058521	5.43986237	3.754654633	1.125160242	1.078534353	1.493708614
Zm00001d018692	0.258295918	0.104568642	0.091717408	0.046019352	0.121550987	0.056508543	0.269481055	0.155723041	0.307173698	0.076335569	0	0.030656625	0.05161454	0.091013482	0.063991142
Zm00001d018693	42.48554099	40.46091521	50.51645526	100.3420636	61.71470524	78.27902904	37.73460421	37.38801357	42.40217017	6.129843622	21.78091827	6.7537457	80.92607314	90.46977647	83.4614136
Zm00001d018694	10.06784308	8.81725523	11.58336906	15.02498002	23.44110792	12.44185155	13.24007979	15.65147424	14.28558464	0.739407274	3.191845215	0.302659028	7.98385854	6.996140925	9.750493418
Zm00001d018696	0.006041199	0.038044564	0.030032081	0.323975831	0.565171807	0.185032392	0.077650555	0.284088136	0.201162802	0.058322668	0.030472584	0.013384333	0.236610358	0.125828921	0.132704564
Zm00001d018698	0.754581093	0.860948486	1.279815176	2.380380861	4.702318341	1.555276555	4.501999504	6.336858809	3.426826232	5.019807175	5.093596353	4.523643738	1.301370141	0.846661781	2.083493409
Zm00001d018699	64.2740965	45.22550242	67.24312526	22.71504718	32.56576633	25.26009179	28.09906173	27.00863616	25.9771338	28.19020338	28.75182627	13.87823062	6.295494412	6.460145515	9.129958763
Zm00001d018700	12.28429715	5.260520022	13.21823303	6.197366098	47.32683878	10.15628534	25.35600207	35.80697545	34.94261577	32.76924446	40.10642119	19.26188597	0.07981852	0.069504402	0.018325579
Zm00001d018701	1.536957158	0.696889162	1.700020043	0.843403569	17.37592887	2.5420268	12.02378115	17.76311836	24.3855359	67.83095397	43.82162318	54.64402876	0	0	0
Zm00001d018702	0.086526797	0	0.107535758	0	0.133013707	0	0	0	0.017785256	0	0	0	0	0	0
Zm00001d018703	1.24695092	0.95208859	1.148233892	0.854120042	1.021579754	0.672814854	0.581314955	0.584276804	0.637445104	0.008910626	0.057031688	0.028628303	0.260277784	0.099157095	0.418301265
Zm00001d018704	112.0526673	166.3343217	185.9836715	12.3751233	10.67756807	4.164770759	23.51135277	9.992557389	8.543520792	26.96451365	35.05902569	12.98670654	1.357129413	1.329481885	3.080433804
Zm00001d018705	1.879794664	2.094974648	4.700746433	4.48987807	4.113163862	4.592053727	3.101780841	3.173246273	2.515013097	0	0.90509289	0.063101552	2.078053007	1.448732381	1.844011408
Zm00001d018707	0.590451963	0.095343132	0.940789023	0.320988802	0.239386795	0.129838234	0.017690849	0.127786017	0.298745036	0.187922447	0.22910119	0.318652356	0.016941916	0.016596774	0.017503668
Zm00001d018708	0.753928341	0.44313525	0.458081243	0.094026672	0.320099163	0.102629486	0.117462036	0.111108063	0.061986849	0.080872671	0.158454638	0.05567784	0.243726895	0.33977623	0.116219206
Zm00001d018709	4.081538251	3.158556915	3.991252306	0.494670348	1.137983437	0.815119205	1.554874162	2.699830921	1.696298991	9.740661477	15.36824615	9.971049194	0.193290053	0.455848215	0.680456112
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Zm00001d018713	0	0	0.007006454	0.021092994	0	0	0.013175123	0	0	0.007775211	0	0.006245102	0	0.012360319	0
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Zm00001d018718	11.10252609	11.4433654	10.36938054	12.44650537	8.461623537	11.06118747	7.826224921	6.183082509	6.84038038	0.590445266	0.707830209	0.337244204	5.237916823	4.317725187	4.30067677
Zm00001d018719	0.132344956	0.100013377	0.13158296	0.949065604	1.3253176	1.013379243	1.600576596	1.069171875	1.003790914	0.045631378	0.033378247	0.036651434	3.517333557	3.148261775	2.417539503
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Zm00001d018725	44.83898619	48.7242379	49.56639674	25.05669735	24.80740312	22.6989455	23.04885234	22.98189547	19.77305081	7.661230842	17.36570301	11.60700083	26.01870139	20.6388756	43.30254109
Zm00001d018727	1.231502257	0.903161467	1.259284189	0.933190598	1.17079796	0.9358124	0.72861286	1.221762548	1.307307598	0.494483884	1.041861828	1.018834639	0.017444184	0.290509776	0.090112954
Zm00001d018728	0	0	0	0	0	0	0	0	0	0.165555092	0	0	0	0	0
Zm00001d018729	0	0	0	0	0	0	0.024767189	0	0	0	0	0	0	0	0
Zm00001d018730	54.0615482	52.88917233	49.3901725	13.82154367	25.91987434	13.96998545	20.97266434	25.23292316	22.8400537	10.68722135	17.64383861	10.53104561	3.303866664	3.046732508	3.293294598
Zm00001d018731	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018732	7.695049234	7.364538531	7.865779571	5.73071211	5.864627665	5.713206604	5.404753328	4.954926759	5.578025037	3.349188651	6.071992271	3.413053145	4.292765416	4.417450368	4.465810904
Zm00001d018733	2.262190725	2.725693412	2.601931342	3.830553862	3.71182376	3.680302577	3.49942056	3.684964806	3.262454046	1.602242511	2.705808342	1.266558509	2.795587005	2.731914548	3.356077137
Zm00001d018734	48.11914571	20.88177687	59.69083533	63.8259649	220.4722197	44.73781347	358.0325298	406.145157	647.9800723	1356.766135	1274.12429	664.7582462	0.536791219	1.216041245	2.495654537
Zm00001d018735	0	0	0	0	0.098034592	0	0	0	0	0.102611622	0.070366794	0	0	0	0.279558581
Zm00001d018737	0.214450728	0.033762686	0.033315	0.033431706	0	0.394097227	0	0	0.264477223	0.517585092	1.690182802	1.5441321	0	0	0
Zm00001d018738	106.7023135	32.79303785	319.7833674	629.3314738	5832.718258	822.7840947	4713.323691	5453.219198	5878.01637	2010.268035	2755.820385	981.7062451	0.124378453	0.121844607	0.385507611
Zm00001d018739	0	0	0.140735804	0.051355933	0.868137654	0.113510685	0.421023564	0.173781286	0.038088305	0.099385692	0.428400249	0.627214223	0	0	0
Zm00001d018740	0	0	0	0	0	0	0	0	0	0	0	0	0.081592265	0	0
Zm00001d018741	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d018744	0	0.252292597	0	0.187364504	0	0.368112794	0	0.060382404	0.061759791	0	0	0	0.784541013	1.537116585	5.210707275
Zm00001d018746	3.065937848	2.61424199	1.584838578	9.673465277	3.074555484	3.639851092	6.372497597	3.61912445	4.099036104	2.07211964	2.424957385	1.968655718	7.245083469	2.427793851	6.469756863
Zm00001d018748	0	0	0	0	0	0	0	0	0.023814157	0	0	0	0.043216242	0.063503757	0.13394756
Zm00001d018749	0.3074845	0.287975849	0.440933817	0.678466968	0.21816089	0.328414356	0.055276252	0.009506572	0.038893709	0	0	0	6.925814043	7.519372219	5.359756342
Zm00001d018750	0	0.061223003	0	0	0	0	0	0	0	0	0	0	0	0.066608385	0.028099221
Zm00001d018751	0	0	0	0	0	0	0.016877799	0	0.026720163	0	0	0	0	0.213759081	0.050097661
Zm00001d018752	0.138509216	0.433774702	0.097700889	0.42018491	1.139430671	0.463215319	0.266830519	0.212148582	0.281622618	0.041303145	0.018882656	0	0.234588934	0.225706125	0.32027111
Zm00001d018753	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018754	12.54872412	12.39435931	10.76520128	10.35376379	14.08199169	10.12511683	12.44430507	12.66642283	12.25740639	10.49500468	8.705453343	5.994539514	4.904119436	4.18381784	5.834577907
Zm00001d018755	37.44277084	35.20937256	41.20555719	20.8839359	27.80498872	19.73650904	23.0777653	24.32946391	22.74660617	6.199958118	21.26201388	7.476173752	12.220735	11.02163265	12.14495619
Zm00001d018756	8.115645619	8.019452593	8.749528615	15.0341025	9.545952824	12.43251217	7.995128337	7.367061247	6.705110303	0.327594535	0.565787062	0.204653683	13.07612529	12.41191968	11.60262556
Zm00001d018758	19.8045423	16.95818302	22.64492657	29.05438282	44.46318202	30.0908477	44.85116931	56.40322065	52.9208856	91.76610251	96.56582354	84.33239611	38.7567435	40.64801935	50.89173874
Zm00001d018759	0	0	0	0.008072997	0.008529288	0	0.015127687	0	0	0	0.016325629	0.014341262	0	0	0
Zm00001d018760	0.724495703	1.642509035	0.432194588	1.337268226	2.272017916	1.748584542	1.997912835	1.100706902	1.429606613	0.799359215	1.361282365	1.44461423	0.786411937	0.802159807	0.577954972
Zm00001d018761	0.395593152	0.512905481	0	0.014510783	0	0	0	0	0	0	0	0	0.065100212	0.012754797	0
Zm00001d018762	0.013113893	0.165169973	0.008148993	0.425232055	0.838054707	0.996111456	2.175949014	1.676111271	2.199537196	0.235120874	0.777240897	1.016888322	0.183435848	0.043127732	0.128872329
Zm00001d018763	0	0	0	0	0	0	0	0	0	0.048511712	0	0	0	0	0
Zm00001d018764	0	0.01410235	0.013915356	0	0.265560536	0.068587765	0.222417877	0.459024956	0.179513103	0	0.282389264	0.086822774	0	0	0.012944973
Zm00001d018765	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018766	0	0	0	0.035800882	0.009456093	0	0.008385741	0	0	0	0	0	0	0	0
Zm00001d018767	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018768	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018769	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018770	21.16987447	20.30061419	20.93589861	14.51658814	12.76030515	13.74336855	12.75326222	11.64190295	13.03076127	7.817203502	9.419429602	8.823501165	8.790920404	8.256981666	8.749461612
Zm00001d018771	0	0	0	0	0.021677324	0	0	0	0	0	0	0	0	0	0
Zm00001d018772	0	0	0	0	0	0	0	0	0	0	0	0.034458185	0	0	0
Zm00001d018773	0	0	0	0	0.077312688	0.011980781	0.079988454	0	0	0.283227894	0	0	0	0	0
Zm00001d018774	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018775	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018776	2.614829379	2.411693047	2.408958302	2.597142917	3.077237936	2.868396984	2.948883413	2.922362842	2.814907109	1.354890652	1.554109996	1.140389497	1.408730484	1.338114884	1.370426477
Zm00001d018779	729.1020276	828.1212293	802.9627188	1809.317954	944.4369324	1808.657583	920.0059215	707.5318246	808.8872422	179.0724202	193.1965522	123.6959068	1993.751978	1959.354636	1732.291188
Zm00001d018780	0	0	0	0	0	0.008162345	0	0	0	0	0	0.007380298	0	0.138767469	0
Zm00001d018781	22.62824925	22.47796539	21.35688405	106.794537	80.01228469	134.5706134	198.6493271	176.5237931	170.1822991	24.52063925	21.52859936	23.32581514	159.1526468	160.0693014	159.122223
Zm00001d018784	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018785	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018786	1.82906787	0.962929642	1.760003597	2.514477626	10.53712833	3.541109578	10.03044859	10.89883866	10.42736401	3.759409683	6.199517135	2.755146581	1.949319694	1.842418115	1.77526346
Zm00001d018787	16.37848532	16.88867636	15.53841651	17.44456028	12.04819559	14.59938457	5.763558944	5.928802591	5.245993389	1.308406722	2.995700023	1.277339177	32.62108252	27.55557899	27.52306852
Zm00001d018788	0.007458393	0	0	0	0	0	0	0	0	0	0.009405273	0	0	0.065409216	0.01724584
Zm00001d018789	0.387202704	0.350131556	0.14189722	0.532430868	0.869950215	0.644665217	0.342235069	0.167597347	0.281619266	0.184851818	0.964030191	0.483916043	1.344317007	1.991721326	1.124887133
Zm00001d018790	3.315543345	5.057224963	4.254351671	10.14954995	13.27635396	11.75076908	12.54087593	11.47417816	10.60746297	6.383937605	13.94121333	7.429089824	13.63618765	12.59134497	16.25385084
Zm00001d018791	0.136420011	0.638194173	0.460188661	0.449648101	0.192592904	0.692408884	0.466834152	0.740211662	0.192278523	14.07060948	3.551190922	10.36250721	5.419372219	5.608065229	11.06294188
Zm00001d018792	3.731883252	3.907792935	3.025250267	3.622380415	2.20618817	2.960907258	2.027702667	1.748464387	1.825941653	0.996945689	0.669935811	0.475145944	2.90913655	2.594480943	2.529836141
Zm00001d018793	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018794	1.70890424	2.129534384	1.656250341	3.086668686	9.837142366	4.142855628	7.124056928	7.61911417	7.077352623	5.513928713	4.852999015	2.013558812	1.968115816	1.977712502	2.263962471
Zm00001d018795	0.380118675	0.506551746	0.392638447	1.420951727	0.918467475	1.216465469	1.120383253	0.996489068	1.073644425	1.907481996	0.499577911	0.211094621	1.090909717	1.303972388	1.574667507
Zm00001d018796	112.6918534	110.555441	125.1869486	216.8319502	84.51360633	213.9232028	220.0645763	176.8413674	152.5710707	0.418507972	1.530642182	1.008445366	619.3589269	620.3625659	546.1498941
Zm00001d018797	1347.101786	1381.822319	1425.903573	3437.793127	1429.822047	3934.85707	3791.681785	2828.218702	2613.053334	5.382953418	6.970439074	8.670620684	7656.758885	7148.929979	6284.542107
Zm00001d018798	39.3852027	40.36597582	37.72103629	18.09892948	18.93584163	19.28629698	18.77969127	17.40755268	19.83624702	12.64926102	22.25711229	18.55420254	11.21846831	10.54276055	11.41631641
Zm00001d018799	21.09426388	16.61531195	17.21583579	20.85529544	65.33969949	26.12263105	49.46120957	55.6057658	49.57930285	76.83023239	77.87790045	76.22689081	25.77010945	21.34301821	33.46993894
Zm00001d018800	0	0	0.066129857	0.056881301	0.025040112	0	0.062176179	0.077907905	0.192181635	0.005241836	0.052721298	0.050523345	0	0.012499488	0.004394165
Zm00001d018801	18.27679145	23.6913484	27.1729895	4.474158055	1.21369954	7.958807469	1.529505665	0.233821223	0.777253542	0.267445184	0.611342716	1.396289664	7.052522932	9.247227963	6.389583602
Zm00001d018802	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018803	12.35138857	14.77920215	10.62527665	22.29133642	28.84639626	15.75963009	43.68143456	56.57109079	53.42373223	103.0951087	73.4226125	64.99278022	33.64652223	23.6032668	27.81579991
Zm00001d018804	0.57450342	0.466040491	0.701892939	2.076623255	3.874775365	2.242761283	0.841978586	0.680979331	1.18887598	1.128070072	2.946985398	1.628775107	1.133225907	0.661814085	1.587335827
Zm00001d018806	1.238110226	0.995922145	0.788759235	3.529411118	6.155419705	4.180909696	5.203371548	5.356801513	5.889599813	0.832255219	1.548176576	0.368812725	1.420413294	1.72223736	1.611856025
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Zm00001d018810	845.1681691	804.2935221	761.6691818	786.336621	559.4688072	780.2639573	619.216937	474.6000327	578.7968406	155.2468666	322.0974459	181.7415714	1081.25994	1010.389962	1040.381484
Zm00001d018811	0.12316427	0	0.133935302	0	0.791149096	0.150893082	0.773556294	0.594032296	0.056960888	18.68502165	3.281010264	10.76137281	0.120596676	0	0.266990069
Zm00001d018812	13.27361331	15.53800808	14.62295931	7.265942402	4.373622174	6.180319622	3.834122474	3.606222239	4.110634235	0.524541579	1.294951892	0.371523554	6.736159612	6.55723672	6.235980482
Zm00001d018813	3.293070944	2.653369218	2.824884996	9.098955219	17.32719676	8.218349507	15.11973619	20.12085671	14.1392355	7.340101406	6.180065	2.702158924	9.305687193	11.91171854	14.97257786
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Zm00001d018821	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d018826	74.70119204	77.32058887	86.96529941	116.6590571	130.2126002	118.6062945	131.7732962	143.7257944	141.9018375	138.9081815	155.859924	117.3870023	69.70355978	58.69266394	71.76897442
Zm00001d018827	3.561272046	3.124924133	2.496157186	3.220587645	4.64801972	4.528469059	3.904960143	4.375487887	3.330453925	7.379010739	5.76790531	7.628276526	3.41856482	2.164772523	2.848948842
Zm00001d018828	7.217461844	5.297761159	5.261937841	3.232376635	8.566357728	4.522992846	8.993070293	9.499401703	9.047532339	4.818773917	6.79115939	2.169743674	1.704758799	1.791486022	1.944275001
Zm00001d018829	1.440989226	2.150464774	1.038401092	1.313874916	0.781823703	0.652756257	1.811141833	0.919855591	1.538196252	1.503046673	2.489014993	2.065751432	1.056941435	1.048683835	0.601992842
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Zm00001d018833	2.947092342	2.932838487	0	0	0	0	0	0	0.011217846	0.06272417	0	0	0.010178676	0	0
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Zm00001d018838	37.76480706	40.52161327	42.46769135	94.89647656	55.48116214	89.0469107	44.73290304	38.55025994	38.9332165	32.35664891	44.64961773	30.76648549	167.6888355	159.1036889	147.6206339
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Zm00001d018847	0.034036267	0	0.056400497	0	0.313934426	0.013899695	0.54354217	0.738719831	1.399205228	5.742525289	0.157376357	0.37703832	0	0	0
Zm00001d018848	18.83863484	22.34366308	18.92906714	7.882320602	8.452930599	8.092090625	6.418461274	6.394244964	6.991723028	9.015927385	6.807010023	3.801117308	7.40644075	7.612386895	6.523033552
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Zm00001d018854	7.469982928	8.919295864	6.564569224	2.551067085	4.247585442	1.887449549	6.625926689	12.20719493	15.29572465	1.303415379	12.11361697	1.864364041	1.187955567	1.91593722	2.409787636
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Zm00001d018857	978.3035264	972.9851862	840.5637659	28.43422455	42.83538076	27.1176425	23.48479069	26.78923156	24.06923607	0.9742646	11.79018094	2.270888685	8.292526964	5.603000194	9.015878617
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Zm00001d018859	15.39545194	14.74156401	13.82710694	12.80601874	11.74816717	12.39369071	12.87583522	12.79414556	14.62206614	9.799784491	12.5937411	9.818961735	8.215417686	9.117478699	8.225527157
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Zm00001d018864	13.64385495	14.33381524	13.59932514	8.365737561	9.445850566	9.347312727	8.659257411	8.148661819	8.767870169	4.68854796	7.871874081	6.126495156	6.076526768	6.32290547	5.91399043
Zm00001d018867	8.60687454	7.528640437	6.062835442	10.25962604	16.25368979	11.64256309	15.91556112	13.08965043	12.55408119	8.593723317	10.70428203	11.57603242	5.071133372	4.708310725	3.792612915
Zm00001d018868	72.69709153	67.50182044	64.5967058	18.30609758	23.64318643	20.9551084	27.17148606	23.7331151	25.66698322	4.755808169	5.368216761	2.433917011	18.72194174	22.48033005	20.71866772
Zm00001d018869	40.67742084	44.12806307	39.06287085	26.58650628	22.8299747	26.76010766	16.06297398	15.21869776	16.98832965	2.492312449	5.924964953	1.385623048	8.648076741	6.928420495	7.597690353
Zm00001d018870	21.19437212	25.44309058	23.43260227	52.28180055	36.40715145	44.79665198	29.35870508	28.61114795	30.91521478	10.48486523	14.42556336	6.818556345	51.11600744	52.91578479	53.06890877
Zm00001d018871	0.204238789	0.171493007	0.111049998	0.811912852	0.953114092	0.828855278	1.133601875	1.190283201	0.876343181	0.410781819	0.665341801	0.193252186	1.37606003	1.459973712	1.569266744
Zm00001d018872	7.365104577	8.088565227	6.693457434	9.797612583	11.57905293	11.13360695	12.54938155	12.62908614	10.80961627	38.63120321	22.15162121	47.89508502	17.43465044	16.72572428	22.72873674
Zm00001d018873	6.539370318	5.859424685	8.416235176	11.45618156	18.23360803	10.70546455	11.10802466	14.52108611	12.18388833	0.895834046	2.745095612	0.831360417	6.168532417	5.965887482	6.291880246
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Zm00001d018882	5.575515854	3.500320863	7.572852732	11.92650772	17.21778945	12.32922227	8.834568918	8.720911639	10.17586135	1.404593742	1.719632957	1.109057583	3.38036137	2.327508919	2.793956679
Zm00001d018883	0.039470754	0.140101853	0.138244132	0.523587894	0.222218175	0.769317093	0.218029271	0.155758075	0.141609852	0.108873355	0.113122471	0.151046235	1.826992161	1.577359991	2.401985614
Zm00001d018884	40.84802845	43.52896154	36.67382849	33.68113844	38.68927987	42.78620646	45.81922762	44.66844957	42.02335678	41.35024467	38.9654688	33.26926766	32.00003105	28.53655506	30.24505311
Zm00001d018887	11.64235455	12.53012405	11.92408984	11.48501966	11.57617212	11.83202677	10.7532883	9.884540871	10.17237726	11.65463795	13.70102969	11.38453523	9.272491316	8.654009009	8.439996736
Zm00001d018888	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018890	4.131654555	3.930120856	3.39409736	4.431155702	4.585410027	4.873016885	4.622465675	4.694922975	4.775341323	2.144295719	3.024477825	2.252485785	4.018289965	3.557014248	3.466899839
Zm00001d018891	4.587869041	5.175170827	5.064029995	15.87679733	7.316438645	12.46125371	3.130204537	3.865335151	3.497820486	0.698329092	1.62648372	0.382778184	27.85974637	34.44808667	31.92805681
Zm00001d018893	0	0	0.00862032	0	0.00913945	0	0	0.008363468	0	0	0.00874676	0	0	0	0
Zm00001d018894	2.91076293	2.73118331	2.8620419	3.327662485	4.871211684	2.892966816	3.435375368	4.535147059	4.317825299	1.068094197	2.384393412	1.026243285	1.739809419	1.60825505	1.898859851
Zm00001d018895	29.80606583	25.27488363	29.7695733	84.35650888	70.24184757	121.8492278	114.121424	81.72467164	103.8727582	80.77930634	59.05601665	93.72342212	57.09128843	56.19448549	55.56103989
Zm00001d018896	24.91390771	22.95488466	22.65604568	19.53989482	25.80537763	17.64991662	18.71888489	18.39181495	17.67926362	0.909557709	3.118684759	0.582475866	6.40763899	4.992372297	6.06885483
Zm00001d018897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018901	27.27163243	24.26714902	23.71428123	120.7425891	86.21916987	148.3556548	198.4438942	194.7165922	194.7575415	21.66357957	37.97459808	14.7324142	333.7342957	403.3452655	390.3646578
Zm00001d018902	13.41363328	13.02430818	12.48572647	15.1340337	13.5406982	13.60444313	14.44830475	13.42269141	14.38695583	9.960353369	13.50417387	7.184914282	10.37748193	11.36623238	8.573004393
Zm00001d018903	20.0975325	16.32537049	25.40966932	30.29723302	50.32014358	26.63646912	35.0744923	40.06761178	37.52369589	2.662641014	11.36420215	1.518971495	11.75637056	9.72203229	13.66051223
Zm00001d018904	42.32458658	45.16476134	40.65889137	27.25302384	30.84053237	29.62697922	30.62592298	29.72460083	29.79389929	23.68160225	31.51032958	22.71431782	27.06562012	27.738381	27.23333467
Zm00001d018905	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018906	86.51382913	82.46863142	85.79839092	29.66156815	30.41874706	32.50283781	37.41909481	28.74120505	30.27905422	1.157115065	5.245462673	0.645690301	17.85819082	17.68801163	21.00294278
Zm00001d018907	3.514808053	3.507035567	4.325666257	3.861668973	3.759151989	3.900674345	3.618118329	3.710594476	3.607586334	0.855132536	1.645318183	0.627855177	3.367043085	3.327639284	3.461094629
Zm00001d018908	63.74547895	64.58801776	63.26518409	85.85262013	55.70166948	70.08362348	45.857179	45.50986252	45.88679827	30.27872787	38.77279348	31.71409774	60.29428429	52.77735002	51.75628658
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Zm00001d018911	34.34647787	34.32290664	29.10047821	30.17773284	29.566793	30.39320595	25.13285412	26.4369795	26.35717064	10.29736543	16.95193365	9.200443428	25.31446874	24.73618502	21.8047612
Zm00001d018912	3.298594059	3.57136025	3.193399724	4.851114926	4.125687188	4.738908386	3.898154937	3.632839698	4.279504885	2.299111145	3.135876204	2.215557524	2.983415654	2.771429178	2.813516562
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Zm00001d018917	1.455733242	2.311806119	1.651868726	14.83996268	9.340518097	16.67158986	27.06847372	18.54494575	21.30970128	0.814717274	1.223817547	0.140225671	5.170343201	4.093640348	4.927120429
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Zm00001d018927	41.45399915	36.28183876	48.23593482	53.16852493	103.1373046	50.77333534	70.3047172	96.01298091	81.68209755	56.98972634	79.24507801	52.72485246	26.80325624	30.09444076	31.12803246
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Zm00001d018936	18.24950761	15.93755801	19.83559576	64.71134245	51.43225292	75.55472297	41.70440822	29.60619468	37.45142463	6.038574621	6.071181547	3.481696272	224.6701305	232.5307583	193.8706251
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Zm00001d018938	149.4896474	135.8915705	152.7105592	39.71102112	45.16907259	36.14098448	31.48416692	33.09766833	29.95810767	24.57701491	31.07341619	20.37547773	31.54306525	28.3440693	31.99356985
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Zm00001d018947	7.011893615	7.121121189	5.20916769	15.03085655	12.90390855	14.46152383	14.922054	13.38274765	14.8152714	9.760599745	16.31777058	18.22531936	8.986254148	8.073165328	8.469016782
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Zm00001d018960	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018961	5.084505436	4.554471885	4.162270029	7.041396983	7.160016416	5.310465789	2.394849192	3.115086937	3.176461081	1.451208877	2.614201177	0.591509093	7.363690228	6.030048324	7.335494631
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Zm00001d018963	1.271431446	1.213671874	1.272427515	2.144832923	2.204338758	1.524884277	1.227630642	0.790734621	1.138883198	0.101519207	0.185647098	0.037064054	1.070823599	1.210394667	1.44673855
Zm00001d018964	0.292328594	0.288414674	0.351196609	0.224824051	0.725433273	0.471554326	0.694558128	1.122066885	0.6249052	0.309096483	1.087475421	0.464153969	0.245343813	0.277732754	0.737904983
Zm00001d018965	19.66349554	17.88983866	26.95702656	4.797666851	24.93476434	6.870044458	43.58502592	79.38913766	54.61390262	52.42229525	76.53455033	52.61194348	3.725296204	3.454769336	8.672669609
Zm00001d018966	39.27345839	17.77621792	70.89518151	5.352318702	44.11160072	3.722029363	48.38979736	61.90095281	50.85409136	301.4544313	424.8966408	290.1119386	0.676634886	0.501179598	2.09721131
Zm00001d018967	28.32030239	29.51159451	25.99042038	14.76070713	18.22049301	16.89605435	19.04692098	21.43416432	16.76940857	1.742995487	3.280460062	1.563487851	20.06773327	20.24544344	23.43142315
Zm00001d018968	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018969	33.71864169	29.32870415	33.82810513	37.76193363	58.66315672	42.01011831	56.09524712	62.95147706	60.94628312	132.2623852	68.73336174	127.1258352	56.75511159	58.15403413	58.01510364
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Zm00001d018973	6.829222557	5.122200532	4.35494671	1.626863731	4.330740016	3.023931246	5.574007654	4.471912914	2.586631778	2.451664249	2.564208109	2.280864336	11.76371178	8.15937143	10.82306308
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Zm00001d018976	1.224686972	1.185615525	1.325880444	2.77014862	2.543339015	2.362445401	2.479888445	2.114148466	2.375797537	1.001887085	2.057560691	1.164951732	1.491762884	1.282088652	1.380727497
Zm00001d018977	0.856075936	0.798447094	0.921860605	0.790619812	0.979088352	0.841912856	0.847012449	0.662571228	0.594376371	0.648562196	0.265379899	0.306513811	0.332893186	0.431492462	0.385983818
Zm00001d018978	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d018979	13.33147544	11.00383863	12.98930147	22.61921946	37.5839393	24.69753685	21.55185103	29.78896217	24.04356179	2.209033921	5.34537813	1.469631416	10.5188845	8.743828571	13.20580275
Zm00001d018980	0	0	0	0	0	0	0.005912227	0.012201626	0.012479958	0.006978122	0	0	0	0	0
Zm00001d018981	158.7957645	234.8145595	208.6270707	86.61372729	81.21984349	101.6523099	54.10960592	46.25513345	54.96132891	29.18503923	51.00186416	21.81495791	70.28925686	60.18464159	61.7887491
Zm00001d018982	0.116848153	0.08176149	0.322709397	1.619199419	1.676503248	1.558798622	0.288244921	0.532259707	0.432318538	0.125341119	0.245582117	0.086292721	0.392270506	0.341581463	0.330225893
Zm00001d018983	22.81853225	19.96009055	24.1232902	19.76441915	52.10553433	30.1890418	105.5371955	141.1996768	94.20718771	88.43131746	102.3873816	71.57934128	84.02148957	89.50350396	125.5652028
Zm00001d018984	32.05668643	28.83022898	34.17659434	61.89668953	59.3560017	49.63775367	50.31155545	53.17954644	50.58126898	30.12447221	37.2869868	23.61593722	45.3974206	51.59278812	52.32268823
Zm00001d018986	19.70422696	22.79573119	19.56241199	12.92283327	11.04689464	11.25929417	16.48155131	16.38349007	16.025377	8.509355664	11.0711206	9.236634544	14.94950103	13.4439963	13.55412153
Zm00001d018987	0.031486029	0.023794062	0.03913093	0.070682418	0.132759881	0.115724082	0.198673698	0.197417919	0.038831006	1.554594427	0.809979819	2.071800385	0.021140327	0.138064364	0.189291163
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Zm00001d018989	0.348813376	0.55270767	0.43350629	0.60342165	0.355829261	0.716835285	0.381292405	0.393454725	0.666090785	0.093110546	0.099324323	0.012464504	0.339967772	0.234362837	0.026017798
Zm00001d018990	0.765139018	0.510191695	1.132709984	1.066512684	0.859920714	0.578982345	1.314801395	0.990420514	0.763229024	0.155184243	0.851351337	0.112180537	0.843623731	0.493395447	0.780533929
Zm00001d018994	1.207625663	0.70310793	1.161027733	1.719225464	2.35681287	1.409718621	2.58259864	1.620965629	1.854646529	0.54993416	0.919459444	0.454331175	0.828671445	1.398776092	1.448866106
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Zm00001d019000	0	0.014171992	0.013984074	0.280661233	0.19274085	0.52384117	0.644252684	0.461291746	0.124892022	0	0.042567567	0	0.050365596	0.345376813	0.195133482
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Zm00001d019002	1.557482345	2.106962539	2.795929707	22.08608504	29.87107822	30.03536353	99.48885795	102.9405334	53.00006384	71.04393561	76.37914687	106.0106076	19.55890537	18.71779942	38.21405196
Zm00001d019004	12.63692458	12.8380604	1.161045011	0.166444611	0.285759771	0.081752933	0.214427342	0.251439845	0.226314403	0.11503896	0.231407578	0.221760183	0.196015586	0.201166264	0.202514981
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Zm00001d019034	138.4323258	94.38050065	187.6023364	303.2320746	382.2395455	257.5586389	478.7478373	559.058356	494.3318571	602.1580354	425.6972009	466.7059545	171.1215214	149.94662	329.5850073
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Zm00001d019040	59.67356793	62.03105119	54.22460702	15.20169891	12.94286898	14.74085035	12.00185118	13.01399702	14.16700479	34.19107755	45.8473048	48.03482869	9.228461716	8.004486187	7.656855587
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Zm00001d019091	92.80496573	98.56897438	86.01177169	32.0031144	64.7175126	32.26749737	49.23873465	58.9461996	52.31848509	50.14917625	82.12344437	46.2435592	34.31176333	31.2186905	34.85610793
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Zm00001d019093	112.1274628	117.2984884	124.7915172	36.24753299	60.09745452	43.91954926	54.36900216	61.38106556	55.92550125	53.54626497	60.12793751	59.70470872	23.44580302	21.83255106	21.74353443
Zm00001d019094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019101	0.138093272	0	0	0.02870399	0	0	0	0.027751509	0.02838455	0.253937852	0	0.15297346	0	0.025230449	0
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Zm00001d019105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019107	0	0.207457466	0.204706624	0.376610178	0.361724023	0.336327955	0.705715688	0.496517959	0.981831861	0.340750943	0.103854606	0.121641546	0.890879403	0.45141225	0.317385785
Zm00001d019108	11.73198527	10.88233484	8.945866076	7.73199548	6.690961831	7.324564107	5.105182673	4.056056713	5.444391074	0.340094003	0.934579464	0.317703727	2.880944423	2.841352698	2.826174024
Zm00001d019110	0	0	0	0.074650481	0	0	0	0	0	0	0	0	0.066981391	0.039370105	0
Zm00001d019111	11.101123	10.51088788	11.80699055	5.197606136	5.406826937	4.874129856	6.507536099	6.719183244	6.993243628	14.51379031	17.73815118	17.30304419	3.476943124	3.457942731	3.869456463
Zm00001d019114	4.386864535	5.664134774	3.757270171	6.281641537	5.053972425	5.104362	4.7802462	4.645857001	5.946948858	3.105133942	5.488072341	4.248909267	3.26620141	3.403219178	3.414753117
Zm00001d019115	8.510276836	9.156737179	8.669221854	4.933931945	4.554893429	5.33943999	4.218306977	4.260511371	4.379495781	3.030757288	3.779694508	3.47038142	2.978289096	2.946678326	2.952734123
Zm00001d019116	0	0	0.01753421	0.38710396	1.059638608	1.400082253	1.549674585	3.028093424	0.869990867	0.116748517	0.124539785	0.031257735	0.031575954	0.09279806	0.212049078
Zm00001d019117	38.25724175	33.6749127	29.62697494	133.0139915	181.3625476	183.7085387	325.242489	262.8250707	269.6173402	92.22740515	112.7721422	169.6975035	48.9802165	49.45451239	67.180538
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Zm00001d019124	4.744401807	5.585226349	5.790535343	25.20145938	20.40134302	28.78731007	26.27450761	27.83127883	28.32332642	15.82983659	20.63286234	16.83085346	52.51587368	64.34952473	67.83819888
Zm00001d019125	0.360140976	0.249034686	0.219404052	2.421899132	1.274740866	2.050384461	0.511590853	0.280984027	0.583496044	0.019478187	0	0	1.327560102	1.068280147	2.032875623
Zm00001d019126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019131	0	0	0	0	0	0	0.036978789	0	0.039028757	0.829265797	0	0	0	0	0
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Zm00001d019142	42.38610362	40.35488268	40.51952896	56.21947908	67.41865407	60.78835601	76.25568885	90.37777081	90.31284492	87.18867896	103.3726243	109.6943739	39.12254613	37.49614896	48.43454123
Zm00001d019143	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019147	70.65779589	61.60177005	77.90802223	65.59597705	102.4248495	56.21337722	71.25798274	84.61904407	77.08748347	6.921785708	25.30215511	4.402845634	21.34404056	21.2946956	30.15793293
Zm00001d019148	10.14002189	12.69228804	10.00011188	11.01863965	10.51038172	12.44856375	11.31041289	10.03032175	9.802971818	4.754626559	7.753098874	3.130919279	9.738280517	8.790164787	8.810590495
Zm00001d019149	0.46872802	0.459172526	0.440947815	2.322070756	5.099636947	3.062698448	6.823537496	7.669169101	7.779880896	0.466882879	1.013868227	0.068510257	3.008714783	4.07500586	6.762629592
Zm00001d019150	0.184599664	0.013676704	0.121458179	0.216682064	0.214621005	0.146338724	0.253770245	0.130932456	0.013391917	0.25459337	0.109546399	0.01202889	0.206572951	0.05951901	0.338964993
Zm00001d019155	0.34036267	0.071448007	0.16450145	0	0.249154306	0.231661579	0.06628563	0	0.023320087	0	0	0	0	0	0
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Zm00001d019161	1.402943219	1.654224164	0	0	0	0	0	0	0.036813151	0.452846595	0	0	0	0	0
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Zm00001d019164	13.60273505	13.96929359	13.80534632	30.05670867	39.18671878	28.77074305	29.16158127	31.89506977	29.27870532	3.259257867	7.342238777	1.808472041	8.125158779	6.927133017	9.595678809
Zm00001d019165	11.19544191	10.31365523	10.76525024	5.329674068	5.479179511	5.502054637	5.030914958	5.577079303	5.404487483	4.314477774	4.412824485	2.409493053	3.586604315	2.763141488	3.720319827
Zm00001d019166	1.666618074	2.185108756	1.519708514	3.053935083	2.584507878	2.551343397	2.386252602	2.155507883	1.955885619	1.112887679	1.635928126	0.708227182	3.042344966	2.286308255	2.55476463
Zm00001d019169	1.408638134	1.615517996	1.241829689	2.981548032	3.523548024	3.248103949	2.760050363	3.006891961	2.835375846	3.305034377	2.556193534	3.539501513	3.947186028	3.148030861	3.710641954
Zm00001d019170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019173	7.9703931	7.72353213	5.951905634	9.176158121	7.25333835	5.422899361	2.537415836	3.59949706	2.224681127	4.063028389	5.532333739	3.296032311	12.67108279	11.4779455	12.07112933
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Zm00001d019178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019181	31.83469736	32.46655673	28.39834345	15.4399986	15.78834109	13.53147868	12.77160315	15.09825683	12.68348767	21.31846043	24.81157742	22.92227146	15.23917633	15.81087465	14.21091771
Zm00001d019182	8.264171077	8.036492434	8.578153396	9.699587956	11.62997168	9.024225072	9.446756059	9.783024466	10.57082052	6.466130715	7.498135252	5.55957041	7.114247168	5.93376523	7.356838343
Zm00001d019184	2.529716513	3.283031908	2.389011496	3.950883011	2.006042493	2.948525511	1.123090337	1.325797897	1.327592362	0.021209095	0.475114378	0.136282317	5.472372125	6.330231671	6.107195102
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Zm00001d019186	21.18276077	21.07396293	25.67616848	52.5978655	63.11571304	46.15385851	48.38646975	60.77083384	48.47371611	25.08121894	34.97827002	18.91633843	43.02717116	42.13663854	47.71232076
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Zm00001d019228	23.65948457	18.8146932	35.25071587	19.90411355	54.15803789	18.43367129	20.69154527	35.59776943	31.92821481	30.25992398	19.12237853	15.8406655	1.692511969	0.516789197	4.63273802
Zm00001d019230	0.876020814	0.651980407	0.8412846	1.464990325	0.996883311	1.14642118	1.101178081	0.856228348	0.892129178	0.622394278	0.661140438	0.264658937	2.071988048	1.91337437	2.010253768
Zm00001d019233	48.14550943	46.11231311	45.84732679	26.55306831	30.30368355	28.60302089	26.16778729	28.24896108	23.70773157	38.54278205	40.13358449	34.56056463	29.21932016	23.70907649	28.22754203
Zm00001d019234	91.74741377	114.7848371	90.36717692	56.94066851	36.53532855	49.59388981	21.64221046	18.91417717	22.85415718	2.520342352	6.502318866	1.575715059	13.25358464	9.659178422	10.52959446
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Zm00001d019262	3.316001419	4.616149327	3.910807197	10.91606621	13.03130032	10.25681863	10.8085067	12.30749892	12.99915784	5.660112625	10.33058036	5.653508502	9.599322122	8.702250265	9.72195017
Zm00001d019263	33.34390782	35.67828894	35.59397135	20.96592924	32.31807954	23.81783366	29.2962264	32.73130539	27.51963957	60.33563355	57.75354634	64.20957262	18.63052202	17.61594225	17.70786742
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Zm00001d019269	2.377154569	2.78484476	3.083344944	12.19533791	10.12168085	11.22967629	2.12270043	1.664711236	2.22757297	0.286330835	1.060310578	0.068994863	3.287387682	3.118000726	3.360385254
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Zm00001d019283	13.1439149	7.494351579	17.44373375	91.01543068	190.3035251	74.12687336	151.8902711	194.5080257	205.9701388	19.21402616	83.83499862	24.70696202	40.98554327	36.72500903	39.12314816
Zm00001d019287	36.5483155	37.74084039	32.71640205	39.63506963	49.06389709	42.51875596	45.31025181	44.35640352	43.58153603	24.65930697	39.3707169	28.35887865	32.65947944	30.99903325	32.14166478
Zm00001d019288	10.0554586	10.18995725	9.36230103	6.024776549	6.293532399	6.370111241	6.814886004	6.759461278	5.818215229	8.205313328	7.703255458	11.3153479	3.155355188	2.985435597	2.606045631
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Zm00001d019299	12.96805309	13.61272343	13.07010199	16.43967787	13.22244697	15.75436981	13.46898017	10.69916481	11.70982489	3.868493129	6.682345919	2.913537992	5.486436425	5.421513716	5.4931822
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Zm00001d019302	5.742445076	5.042935253	7.267676774	10.90685241	16.59079639	11.94061443	3.170343363	6.098273748	4.190740976	18.52792215	8.138279041	6.623839231	2.505542829	1.472699849	1.827261511
Zm00001d019303	0.021394732	0	0	0.026682582	0	0	0.199997959	0	0	0	0.107917775	0	0.430945063	0.445619479	0.123676151
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Zm00001d019537	0.403198257	0.141719915	0	0.11694218	0.247103653	0.137852939	0.076696748	0.067837022	0.023128152	0.129320202	0.118243241	0.155806302	0.04197133	0.030837215	0.086725992
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Zm00001d019553	82.16099864	73.02637969	117.2742242	215.3208751	291.3315853	210.3189068	352.69526	453.992085	357.2542397	734.910618	545.8916078	478.8482866	149.3477315	129.7561721	168.663975
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Zm00001d019561	9.526666848	9.507929817	8.975590042	11.36580923	11.30980971	10.71315113	10.88908185	10.73245404	11.26235941	9.631932107	11.19781469	9.146114639	8.609516893	8.052731948	8.579141034
Zm00001d019562	8.201627513	7.701932321	10.58025809	15.74555778	22.7501002	14.34958207	15.97483695	19.53706219	15.83795534	2.77029453	7.949843944	1.861457265	9.514116406	7.789277295	9.983972459
Zm00001d019563	101.1069236	135.2676239	90.15236181	127.274275	101.8596721	118.9353711	212.270043	210.6673294	170.9086158	3.650718146	3.102390209	0.379471749	213.7847453	188.218	238.6953654
Zm00001d019564	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.035359759
Zm00001d019565	0.108072995	0.068059169	0.013431344	0.094348766	0.284804053	0	2.462524273	1.941640346	0.999629822	0	0	0	0.326530311	0.071084048	0.52477795
Zm00001d019567	7.143527634	7.290915103	7.102397736	11.52038506	12.23643935	9.687335884	12.69351909	11.64303301	11.3921777	8.866892093	9.474159814	5.484718695	6.422634397	8.398057231	11.07830792
Zm00001d019568	2.787578265	2.748938944	2.75704692	2.953946823	2.958512382	2.915518493	3.406533826	3.158541089	3.653414063	2.280758152	2.613813266	2.320929077	3.021595221	2.908453344	2.660640714
Zm00001d019570	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d019573	12.17027007	12.96711948	11.76482962	17.27993833	9.674504688	13.52942184	6.82555459	6.742725685	7.477928391	4.035528404	2.828895734	2.010846133	19.82808469	22.34073756	21.38765058
Zm00001d019576	4.284432283	4.104426778	4.372712331	9.893308452	10.65777065	11.99320573	10.78642837	12.28893736	9.46297245	4.816680148	3.847453159	2.631927987	3.893647988	2.462233047	3.542423218
Zm00001d019577	13.68263612	12.5803315	15.60192275	17.36301704	19.86181657	17.97842624	15.45522173	18.36793441	15.83389182	2.972121232	11.02833706	1.919887091	8.2936258	6.687226342	10.09779153
Zm00001d019578	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d019579	4.679302752	5.351269377	4.419074014	5.944904215	6.085882072	5.922367834	5.298740208	5.041856424	5.202502568	4.671965966	4.11058779	3.942604853	4.912551038	4.318317993	3.928117665
Zm00001d019582	2.657964398	2.116717288	2.74042738	2.081101817	1.821802384	2.190383453	1.281329555	0.589241713	0.9260738	0.969867693	0.961945365	0.501731609	2.640900479	1.711667095	1.750076838
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Zm00001d019586	3.850850183	3.49427888	4.49762959	6.741512198	12.25319484	8.804255845	8.474190993	8.944726831	9.162889565	4.450147841	5.372338952	2.505561107	3.806215099	3.95465492	4.101235844
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Zm00001d019591	16.44372192	16.94804187	16.66588675	10.11683157	8.406466287	10.88303166	10.18628589	8.328654736	9.031527282	10.67124987	11.52539199	13.48343376	2.783337547	2.50305462	2.730094812
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Zm00001d019595	7.15759475	7.902495062	7.748132903	14.29968396	17.14282368	14.56385562	25.33067101	22.88163378	22.52507532	15.30240185	14.20725814	11.95010303	25.85257218	28.11837309	27.05238197
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Zm00001d019641	10.8318504	10.98999762	9.829905387	5.42172111	4.010167865	5.931896026	2.400468795	2.047517973	2.153937165	2.685378327	3.872754806	2.716256037	6.594669559	5.721025052	5.673778732
Zm00001d019642	1.924099589	1.988588085	1.750551793	2.020760875	1.801385633	1.680552652	1.651271025	1.687291735	1.822288142	0.272983191	0.71397419	0.260054882	1.632875511	1.584472196	1.649764896
Zm00001d019643	0.150198954	0.25223485	0.245001358	1.209785458	1.195701153	1.613958487	1.667321046	1.007400731	1.092126278	0.021578033	0.201243555	0.006932649	0.623287218	0.631171241	0.506480588
Zm00001d019644	14.325259	15.95234797	16.37884652	24.07547137	21.83160777	25.44248313	22.35162371	21.73328576	20.91074066	32.85056437	28.1921448	24.33694431	22.59369152	24.66206304	24.39981585
Zm00001d019645	11.04215047	11.70006916	13.02616481	22.95215177	36.81293204	23.66351745	23.38879974	33.8141461	28.87887836	3.964360538	12.20051955	2.990042779	9.689081505	9.376411165	11.10459617
Zm00001d019648	34.78743123	37.85221513	47.48643883	122.7319943	67.11448187	108.6587984	52.5617778	44.28179809	51.07262988	7.326469789	11.2009863	4.006768271	164.3151663	187.6872051	185.3254045
Zm00001d019650	0.714606058	0.545931345	0.436777629	2.520269328	5.078456498	2.583413697	3.518023218	3.397169916	4.507670929	0.25042907	0.701708284	0.038931549	1.219164633	1.592436976	1.246045167
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Zm00001d019670	4.72371109	6.44727575	3.626910782	9.433935876	7.488156461	11.22884992	11.29191069	10.27143849	9.381018551	12.50781162	12.3586083	22.87090228	13.26126295	14.07415845	12.84966637
Zm00001d019671	5.284842837	6.09646266	6.592299262	5.01332255	5.258063816	4.78717603	4.388942341	4.452377115	4.162398103	1.623446732	2.617700052	0.903576352	3.14278889	2.950258868	2.930766868
Zm00001d019672	34.50894719	28.02041441	36.74454168	69.01770124	68.48055548	70.11773661	40.50154692	26.21864763	27.29821632	6.77169653	8.911991951	4.676722974	34.57353764	28.22554508	29.45419964
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Zm00001d019679	1.299210135	3.254124946	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d019680	0.06957371	0.350513378	0	0	0	0.085237314	0.2032422	0	0	0	0	0	0	0	0
Zm00001d019681	11.68505142	13.84058628	12.50695839	6.924801267	5.259652939	7.357569865	5.335705289	4.356756974	5.069369452	2.922145316	3.911975737	3.102928618	4.862521469	3.909490953	3.589762127
Zm00001d019682	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019688	9.797717643	12.14893974	13.16775356	26.14359383	31.47421009	25.49590114	30.39656475	29.07664334	30.62976844	17.12652098	26.81756712	22.96896498	27.91985328	29.47421051	26.60645032
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Zm00001d019693	0.077994	0.084200341	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019697	1.523055238	1.183363002	1.601963842	3.576958717	4.304733934	3.651125018	2.214982215	1.832482918	2.130422389	0.045466326	0.083143789	0.010955659	0.830039473	0.704712541	0.766088311
Zm00001d019698	14.75024913	14.97728122	17.82013632	20.39361248	29.0801391	15.2091387	41.62036445	38.93751199	41.63660194	712.3280618	440.8579854	623.5686141	35.38956625	30.32741027	53.07614842
Zm00001d019699	9.945382616	9.754952798	9.55268291	5.11017252	5.218606448	4.516754517	5.164968741	5.370988899	4.806064781	5.576892095	7.090788365	4.387318218	3.031257711	2.755100058	2.860422356
Zm00001d019700	0.909749387	1.001029683	0.767219468	0.916407668	1.103225205	0.765499641	0.835247416	0.7805226	0.903126862	0.741096962	1.03060982	0.282399634	1.099146261	1.035656887	0.754171289
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Zm00001d019703	0.65374189	0.621154109	0.570156032	6.036217862	3.762961599	5.009283227	4.335452813	3.837600631	5.056712433	0.490353565	1.373982496	0.457380378	6.507017383	7.172834616	6.543765315
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Zm00001d019706	1.936935065	2.073434652	1.993169043	3.155024866	3.503351822	2.881226887	3.041917345	3.199993294	3.047404132	1.121697882	2.057415448	0.794215689	1.798324328	1.713349728	1.874945811
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Zm00001d019712	1.027318156	1.194379402	1.211279462	3.515160266	6.959110201	2.936745712	5.571185911	8.607459301	6.318597827	5.921669237	7.507147197	4.406166184	2.97717442	2.699949723	3.456569691
Zm00001d019718	31.33603617	29.7320382	28.37864798	19.02102286	19.90240578	20.68127606	18.35102237	18.72958281	22.48056399	24.58231038	22.32222609	26.39409009	14.07850411	16.92067853	15.46590213
Zm00001d019719	0.094225296	0.269720704	0.41518505	1.121721703	1.659170978	1.185872137	0.500464817	0.299528503	0.443695342	0	0.259246084	0.037955821	1.006483536	1.201955825	1.604349345
Zm00001d019721	6.612873623	7.330632048	8.908766419	5.786811785	6.758054861	4.961655732	7.578413973	8.360790891	10.15692431	15.52755275	12.62165287	16.80429316	2.725640898	2.140530792	2.190606624
Zm00001d019723	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d019725	8.619387481	2.722237116	3.171587955	0.844389366	20.86176124	3.445535754	16.88768477	18.24273182	13.39199312	93.26883354	40.35770204	47.59659933	0.874202843	0.856393526	3.161162414
Zm00001d019726	9.661005304	3.279803755	4.854471359	0.227335598	17.84229579	3.732663733	11.3497413	17.99154102	13.13507239	66.40511098	38.32175612	43.38502145	0.786782558	0.913486427	0.752657718
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Zm00001d020147	0.698817573	0.942146651	0.672775908	1.301164873	0.54469544	1.591710181	0.195516363	0.213620685	0.218493603	0	0.01241171	0.087224608	13.01863628	14.93293822	14.09892092
Zm00001d020148	11.61788906	6.150589181	9.705164919	19.319103	30.74271357	15.44569773	20.12705138	25.65664782	25.24471116	3.726957909	10.89398447	4.513847995	4.714572528	3.650502363	4.501888885
Zm00001d020149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020150	0	0	0	0.024374796	0.012876238	0.167611044	0.068512524	0	0	0	0	0	0.229642276	0.160688564	0.192064907
Zm00001d020152	28.01464588	25.53487182	28.28181906	17.83439657	30.18499479	19.80408883	22.94245021	31.20400776	24.56193263	21.81544641	30.93878949	20.03236586	11.65892649	11.62345376	13.11092738
Zm00001d020156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020157	7.969661031	8.410115423	7.787301941	5.556230549	5.936773772	6.15140405	6.208365987	5.585774266	6.54310408	8.321123531	8.601610474	9.836472404	4.57125253	4.349030551	4.248950263
Zm00001d020158	8.745800915	10.53816853	8.122550807	11.60304094	11.51000828	11.41107155	13.06025931	11.25608888	11.52583189	7.838058631	8.931815906	7.834502179	10.32858208	10.89116324	9.33260805
Zm00001d020160	15.34600559	18.11316388	9.818830885	7.651008324	7.435812866	12.53397105	4.573355451	9.614068637	8.172029254	1.104680375	3.328602349	2.27871384	4.400115506	3.751710652	5.514144823
Zm00001d020161	0	1.179381487	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020162	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020163	0	0	0	0.87203159	0	0	0.207307044	0.025167017	0.630657043	0.431791271	0.013160202	0.138727076	0	0.137284458	0.241310108
Zm00001d020169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020170	213.0204688	209.373076	199.7256139	19.81488397	37.58928535	14.62956317	130.314856	155.8107173	144.4750333	510.7528713	440.850825	530.9204402	65.62272654	74.8242358	74.99197212
Zm00001d020171	29.29421042	21.93057147	31.74657426	3.775153279	6.881697924	4.107024469	3.864369017	4.031213882	5.426983475	0.573248336	1.891485473	0.100094993	3.741218378	3.447082995	2.329607463
Zm00001d020172	13.8804875	8.401834943	9.291269046	5.923273305	13.81953542	7.162662258	8.054103786	7.806386153	8.164323565	0.629662224	2.350890625	0.126437247	4.967061605	4.233308905	3.211013769
Zm00001d020175	26.76295504	25.32842668	24.49216427	28.6140616	48.31957884	31.16085442	39.04227285	44.2351717	40.22740064	40.84446704	41.66419241	35.04090156	19.9685447	19.94951392	19.53429568
Zm00001d020176	0.351546015	0.403415862	0.417484537	0.935323605	1.41022761	0.957093265	1.141059782	1.507144798	1.300661202	0.980454045	1.605770244	0.917316278	0.786782558	0.796445979	0.505785986
Zm00001d020177	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020178	10.40922947	10.06641569	7.579106829	6.225567924	5.375716076	6.175241512	4.376473009	4.002882072	4.517858508	4.54076962	6.509515245	5.698082787	5.517955901	5.052283797	4.945247405
Zm00001d020179	0	0.03182804	0	0	0	0	0.029528349	0	0.031165292	0.034851914	0	0.027993295	0	0	0
Zm00001d020180	1.205506092	1.40988657	0.921973243	3.44472909	3.796524953	4.154823475	2.213567523	1.565378711	1.952345492	0.822160704	0.492806207	0.271483422	1.512065963	1.248907225	1.692385885
Zm00001d020181	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020182	1.628106421	1.505818183	1.667052731	2.612379389	3.406815346	2.578163603	2.697492908	3.316803506	3.050819518	0.998712384	1.875363868	0.602975372	1.511907867	1.417174498	1.640702853
Zm00001d020183	0.028105327	0.045512695	0.004989912	0.210310466	0.269811064	0.137731483	0.051607403	0.043571091	0.084178323	0	0.116451361	0	0.107831188	0.167254536	0.246022919
Zm00001d020184	0	0	0	0	0.021292974	0.019798029	0	0.155880815	0.019929578	0.022287099	0	0	0.180833921	0.212579953	0.130780951
Zm00001d020185	0.797587113	0.967357849	0.943517067	1.738911017	1.599761226	1.653922512	1.556752693	1.296525546	1.227736074	0.301482611	0.629545617	0.261786906	1.788356831	1.703349698	1.885222183
Zm00001d020186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020187	0.346107188	0.452689564	0.397055106	0.730484396	1.069956413	0.619734198	0.762187936	0.802550936	0.558183429	0.128514312	0.671465027	0.162208469	0.655439327	0.715051069	0.784904007
Zm00001d020188	17.60438763	16.65561793	18.95436283	26.33923826	29.36540449	26.66638143	13.04914668	12.07018913	12.28556427	0.697335736	2.133525204	0.710902266	4.907287294	5.239014803	5.632085239
Zm00001d020189	0.293122511	0.443026665	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020190	0.034092853	0.257640445	0	0	0	0	0	0	0	0.094039329	0	0	0	0	0
Zm00001d020191	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020193	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020194	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020195	0	0	0	0	0	0	0	0	0	0	0	0	0.549178709	0.076855829	0.24316634
Zm00001d020198	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020199	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020201	38.90502815	32.44602776	43.51761107	60.26731001	97.35509158	49.97470274	64.07730227	83.74977311	63.61306122	6.947387111	22.67625718	3.153455459	24.1604346	18.85239904	35.20077598
Zm00001d020202	0.01157925	0	0.014390725	0.081833114	0.040686293	0.052015938	0.112752943	0.088425615	0.057121704	0.324717113	0.613275815	0.354879424	0.008638368	0.008462387	0.089247951
Zm00001d020203	0.013882949	0	0.004313442	0	0	0	0.016222226	0	0	0	0.017506844	0.003844725	0	0.003804744	0
Zm00001d020204	7.118816053	7.641325456	6.2347318	6.210153023	6.872473834	5.902245072	6.896334085	6.642150183	7.288620357	5.742616046	7.697534233	5.955208984	5.372963671	5.751359692	5.524924602
Zm00001d020205	9.777480619	10.6580136	9.580528111	7.29119107	6.636683911	6.781378334	7.584544297	6.741973456	6.997445289	15.19554916	13.58679021	16.87551378	7.049578432	5.747438183	5.810195719
Zm00001d020206	0	0.012670324	0	0	0	0	0	0.048519194	0	0	0	0	0.078800477	0.011027878	0.011630472
Zm00001d020208	11.21994296	11.86195691	10.19438985	14.14161149	9.097193676	10.0129888	8.109230956	7.901017798	6.931507231	16.81329985	17.73189557	19.07399074	26.9341134	26.78701928	23.25761541
Zm00001d020209	11.31302574	10.20996602	9.025045019	13.6768991	10.28763357	12.45448287	13.15410525	9.88487396	9.702603559	2.626059226	6.871834133	3.344823533	12.96275718	13.18776161	12.42082609
Zm00001d020210	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020211	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020213	17.76994691	18.44052927	14.22492203	11.66503362	13.64168858	10.80799197	13.10278171	12.33526248	11.61714276	12.0660273	15.30896624	7.196888396	20.72143217	17.89614872	18.32491137
Zm00001d020214	18.18078044	23.75185131	19.36092293	17.58368237	18.17825919	18.9328521	19.39057783	16.87125298	18.79486527	18.33865003	19.17288721	14.27559495	20.48449881	18.38678016	19.37087789
Zm00001d020219	7.798032345	8.060384137	8.638447078	22.80537163	32.104117	20.28640372	19.92529302	24.94479934	25.16889859	12.89891985	17.97634496	10.77054652	16.06255674	18.03476137	18.41158373
Zm00001d020220	21.67194244	27.64713995	23.32940984	39.72705041	17.07478404	27.11294236	19.6897469	21.39384696	16.16491144	3.247895052	4.329503616	0.459960543	41.56822628	42.29073876	45.18914629
Zm00001d020222	1.910227205	2.122886677	1.194776284	4.484428244	3.76728137	3.196866316	2.173744936	2.785034979	2.64839521	0.223847956	1.180812642	0.221287635	1.229472491	2.052998178	2.29509052
Zm00001d020223	0	0	0	0.040936782	0	0	0.038354951	0	0.020240604	0	0	0	0	0	0
Zm00001d020224	6.171310523	5.638606279	5.731352981	7.984762658	9.920306796	6.900170633	8.234915948	7.719805274	7.527822661	1.805820018	3.67864716	0.959854596	4.481828658	3.767829966	4.507995696
Zm00001d020225	1.178145665	1.195070194	1.390501412	1.493985389	1.40130924	1.322299905	1.986460349	1.787636953	1.638259724	3.342407404	2.457852296	2.163481788	1.411289002	1.100829734	1.52207502
Zm00001d020227	23.11016426	25.17971046	22.84387135	27.64167832	24.98102886	27.79323009	32.05080111	27.764611	26.3321452	16.9951939	36.02522652	32.81538427	17.86965582	17.97997945	15.41849382
Zm00001d020228	5.638329113	6.417254916	6.227282897	5.380802071	5.330489122	5.725204889	4.961320889	4.254653192	4.657431661	4.86648086	4.682432355	4.241826561	2.750433712	3.23790762	3.573381895
Zm00001d020229	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020230	4.138228895	4.157030678	3.931169944	6.719772837	7.872231823	5.628201019	6.260726539	7.098795139	7.409494713	1.090625729	2.640910628	0.456558289	5.860694424	5.153578931	6.322324828
Zm00001d020231	0	0	0	0	0	0	0	0	0	0	0	0	0.039531136	0	0
Zm00001d020232	0.040328124	0.067724561	0.011137758	0.011176775	0.053138219	0.054897188	0.104718695	0.075641281	0.044209565	0.030899517	0.011301124	0.004963741	0.035099917	0	0.062166419
Zm00001d020233	53.37898574	47.62270105	53.93613	34.77754612	33.75447086	35.17401957	43.7320197	35.84465242	35.78919351	111.252356	54.26786935	42.57022963	14.2755698	13.67581667	13.14369691
Zm00001d020234	24.11571698	26.86824742	26.31264186	16.67363059	22.15368667	13.3276393	14.99363578	18.5435237	17.95419785	11.19061526	17.50161546	10.73379612	17.27289674	17.74844553	17.42020833
Zm00001d020236	17.56142243	21.11073685	22.84758918	30.02493331	28.4120986	33.36209246	26.98838307	36.26567169	31.28088234	44.27065795	32.32124205	33.46536951	46.94042824	40.35493394	46.38941591
Zm00001d020237	6.039602416	6.652060388	7.903845081	18.46839104	16.68196307	17.00712863	17.41188328	17.8961837	18.64723307	10.52527803	12.90599844	10.23621482	18.2677692	18.79132128	17.40294896
Zm00001d020238	0.040511361	0.003401614	0.046991129	0.17178164	0.135228475	0.205145435	0.157791752	0.156311936	0.129900533	0.793380207	0.670931119	1.66342772	0.039289045	0.035527981	0.05308155
Zm00001d020242	4.187039202	4.874602548	4.758614379	4.685962467	5.248445749	4.255622733	3.901169128	4.560361881	4.134421677	1.13972711	2.091154237	0.433306649	2.783516103	2.726810133	2.805746611
Zm00001d020243	0	0	0	0	0	0	0	0	0.035235994	0	0	0	0	0	0.008258
Zm00001d020245	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020246	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020248	0.020604723	0.012975863	0	0	0	0	0	0	0	0.02841731	0	0	0	0	0
Zm00001d020249	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020250	0	0.031536575	0	0.218591922	0.065984822	0	0.204805602	0.362294423	0.061759791	0.483458602	0.757796245	0.55473892	0.084057966	0	0
Zm00001d020251	17.03863225	13.66343024	15.76271194	4.602037005	21.30842592	5.434821637	12.79400658	13.71268359	11.96145053	78.58983242	65.27246663	94.28377048	4.332332671	4.376701425	4.359420143
Zm00001d020252	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020253	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020254	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020255	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020256	0.094476007	0.132992042	0.524914383	2.01691034	2.401847511	1.790659249	1.155902836	0.50927403	1.028074573	0.061316701	0.189218026	0.067718739	0.851992404	0.615315267	1.028020297
Zm00001d020257	0	0	0	0.059304939	0.266291789	0	0.069455813	0.028668515	0.029322475	0.032791105	0.179894239	0.01316902	0.359183342	2.202420741	1.250720781
Zm00001d020259	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020260	0	0	0.018220536	0.009142182	0.096589042	0.053884607	0.188443117	0.10606582	0.045202206	0.374064752	0.009243895	0.324812279	0	0	0
Zm00001d020261	0	0	0	0	0.038760315	0	0.025779726	0	0.00906962	0	0	0	0	0	0
Zm00001d020262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020264	23.69743664	19.735038	13.99022338	71.97911054	78.24301032	79.0596154	70.62559493	66.14306906	56.64121326	14.10199191	23.48394296	4.593653159	101.2522437	100.4349741	98.91767567
Zm00001d020265	0.025177226	0	0	1.224597837	1.725083847	0.77113868	4.17758167	3.976898537	1.552525138	0	0.126997161	0	0.845223743	0.524403034	1.397198857
Zm00001d020266	0	0	0	0.033431706	0.247249008	0.131365742	0	0	0	0	0.101410968	0	0	0	0
Zm00001d020267	16.15691282	15.3250763	15.04559221	46.0029275	97.08477901	42.22059571	98.01844399	121.6811156	113.8220475	138.8193589	182.7309552	187.7664233	23.86642441	20.0666171	26.32528071
Zm00001d020268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020269	0	0	0	0.095787471	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020271	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020272	7.284313868	7.523365228	6.648136289	13.97239563	14.79907582	24.17028607	16.24518034	16.32377903	12.61505495	0.80254128	1.228892911	0.613541245	8.888849672	7.285932611	9.370009616
Zm00001d020273	0.156242673	0.278783319	0	0.016238257	0.154404483	0	0	0	0.064230183	0	0	0	0.05828019	0.057092902	0.075265772
Zm00001d020274	6.705752044	7.642962376	9.566410744	9.187656312	12.19590964	9.314715972	8.663383077	10.61948151	9.23100879	0.130258276	2.114042116	1.072399435	3.197106251	3.313163208	4.203963832
Zm00001d020275	1.682949659	1.472765595	2.87931075	2.535037249	9.662108391	4.739562571	9.168611454	11.72750811	8.167399148	2.637573909	2.825077729	1.198475523	3.656487909	3.498138222	3.019655543
Zm00001d020277	9.925528516	7.247742653	13.42217275	4.163070867	6.07987113	3.785564437	4.356146117	4.302755108	4.77979148	2.281490033	2.696988322	1.040602952	4.495684454	5.077666021	4.747208033
Zm00001d020278	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020279	0.060993395	0.076821407	0.194921412	0.217338048	0.160735493	0.064050218	0.061089243	0.031518922	0.236411285	0.048068542	0.230743885	0.077217961	0.136507136	0.152829947	0.080590501
Zm00001d020280	0.494507627	0.249133674	0.63348555	3.0836423	10.68601605	3.206289068	7.68072294	10.09061539	10.1894376	6.473825456	6.638834886	3.236193125	3.890616157	2.91064188	4.899186045
Zm00001d020281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020282	0	0	0	0	0.093443635	0	0.036829595	0.057006558	0.009717823	0.054336846	0.238476513	0.008728745	0	0.05182785	0.009109978
Zm00001d020283	10.25661667	9.260622366	6.988217757	6.447543234	6.273733344	5.801986949	5.764962167	6.449077515	5.722468495	3.855480786	6.301967305	5.18952821	3.263976299	4.128040687	3.423854715
Zm00001d020284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020285	0.180635219	0.203562229	0.295386818	0.829980453	1.37797232	1.281227076	1.210888197	1.169268717	1.500788695	0.131118814	0.719326756	0.389667443	0.638326137	1.052625561	0.97824567
Zm00001d020287	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020288	0	0	0	0	0	0	0	0	0.009629025	0	0	0	0	0	0
Zm00001d020289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020290	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020291	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020292	8.60781395	8.906857824	6.886763572	8.039052218	9.850273499	7.764682979	9.320316854	9.164857826	8.826638422	5.508168794	7.461281383	4.537639705	6.468300683	7.640006744	5.959245
Zm00001d020296	0.194304064	0.068523472	0.096592665	0.474962095	0.32771086	0.523707941	0.299698476	0.140571884	0.364238814	0.128629122	0.245023658	0.008609649	0.104367593	0.187442585	0.197684972
Zm00001d020297	38.86970508	38.87660717	37.85408889	37.26138714	40.04222921	33.08352386	31.74681882	31.4302488	33.04642907	26.82780849	39.85418853	31.48106388	16.8624015	16.50936408	16.70900133
Zm00001d020298	0.505356896	0.217749617	0.652850842	1.26881128	1.340525301	1.523388964	1.212098523	0.954106591	0.918466622	0.091706641	0.528264333	0.559811435	0.46133759	0.379045773	0.591949187
Zm00001d020302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020303	6.399562329	6.358487468	6.243643981	5.775304625	8.529471955	9.074327653	10.26236156	8.145928054	9.604230169	6.572951993	4.879206957	8.409004685	8.095998023	8.092649511	10.35259389
Zm00001d020304	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020305	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020306	0.483675424	0.198919506	0.748324646	7.620256433	10.01492374	22.96505554	23.18369839	15.65124985	12.49010397	0	0.547692449	0.010934565	50.33609472	41.73604476	42.65857438
Zm00001d020307	0	0.025173932	0	0	0	0	0.023355025	0.024099994	0	0.192959354	0.100817922	0	0.089465203	0	0.046215825
Zm00001d020308	0	0	0	0.088038743	0.031004916	0	0	0	0	0.129809883	0	0	0	0	0.108817983
Zm00001d020309	0.04948863	0	0.010250769	0.066863411	1.407417433	0.389044698	0.573455685	0.865244327	0.645934757	0.341264896	0.124813499	0.150758459	0.212287568	0.15823259	0.37190146
Zm00001d020310	2.076986351	2.093460617	2.045482825	2.211584908	2.879644626	2.890072384	2.081608067	2.108773416	2.421052409	1.189181592	1.412150748	1.105340953	0.895095632	0.811467685	0.931044463
Zm00001d020311	8.701357466	10.65154384	14.54026999	17.53789823	24.39063265	16.54950005	25.0570744	31.2201497	25.46144927	30.96785721	39.61675675	31.84108834	15.06150428	12.82548826	14.80735195
Zm00001d020312	0.004139871	0.003476122	0.015435132	0.00688409	0.038184211	0.025359542	0.004837439	0.009983484	0.00170187	0.009515941	0.00174017	0.010700576	0.010809513	0.006051029	0.063816744
Zm00001d020313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020315	47.81196562	54.93969996	41.47080268	46.32635716	33.07462146	50.23722693	50.68882689	48.96276037	50.49937258	94.40035562	83.00675539	120.0423699	49.12812969	43.14075886	40.53658177
Zm00001d020316	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020317	0.533275082	0.854842468	0.060250531	2.176617432	0.958183847	2.435157509	0.679780296	0	0.29894367	0.33430648	0	0	12.26053987	6.377398595	1.681469369
Zm00001d020319	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020320	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020322	0	0	0	0	0	0	0	0	0	0	0	0.353808061	0.007008039	0.006865271	0
Zm00001d020323	0.022338618	0.056271143	0.01388125	0.26466767	0.132454826	0.930507341	0.274078085	0.094273508	0.068874277	0	0	0	1.199886255	1.420325864	1.25258478
Zm00001d020325	6.645924684	7.802784838	5.70237935	15.52495064	11.16235694	16.20777919	10.21179587	10.0047315	9.533872878	6.260339059	5.11623797	2.541367115	29.70306083	32.53764171	29.87778383
Zm00001d020326	0	0	0.065348653	0	0	0.042946493	0	0.021133841	0	0.169210511	0	0	0.019613525	0.019213957	0
Zm00001d020327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020329	6.539535623	5.431595907	6.415490162	9.215440221	11.01412182	8.611135731	9.747358138	7.605794868	8.927662772	0.840362128	1.785673356	0.351752532	5.181147261	4.990924918	4.673281535
Zm00001d020330	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020331	0	0.159434905	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020332	0	0.032844959	0.024307081	0.113830414	0.060132091	0.479231249	0.106651272	0.235828272	0.032161036	0.10789634	0.180866486	0.368318073	0.116727132	0.46454346	0.444703344
Zm00001d020333	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020335	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020337	0	0.058211527	0	0	0	0.090597064	0.064806641	0	0	0	0.011656433	0.010239603	0.248252329	0.222928673	0.384725649
Zm00001d020339	2.542429554	1.922749212	1.897253958	4.883610304	7.619808884	4.929487208	6.054390259	6.630709814	6.061073605	4.140404492	4.100640268	5.525904292	4.077073033	4.721895809	4.035107689
Zm00001d020340	0.374449671	0.615994445	0.047486444	0.409814033	0.241661572	0.308955484	0.294672789	0.018428615	0.169640924	0	0.096365928	0	0.051308719	0.150790364	0.194369964
Zm00001d020342	0	0	0	0	0	0	0	0	0	0.031424809	0	0	0	0	0
Zm00001d020343	3.418878217	3.950392738	4.429800077	9.493662669	15.45414091	9.981329448	14.009857	18.80614217	17.77336609	58.44129295	52.43724695	60.20302827	9.322778201	8.832647153	10.76971921
Zm00001d020344	7.755687616	7.891435335	8.29188605	20.07724381	13.87855323	14.89580125	9.524221533	9.474103858	9.815522883	2.755833799	4.14269248	1.513186684	15.32381572	16.21207397	16.58892415
Zm00001d020345	5.420573063	4.461099595	3.59923848	7.877637547	5.847525626	9.291365147	6.92229409	5.40966216	4.723659274	0.87641454	1.287406702	0.538534964	14.98379675	14.65189914	14.79411163
Zm00001d020346	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020348	2.489160238	3.746050367	2.681064247	7.482334124	8.006158369	6.505731997	14.30426576	20.39386088	12.07464467	4.911776891	14.03656575	5.55717871	15.34140283	9.795350784	9.666486373
Zm00001d020350	0	0	0	0	0	0	0	0	0.150371666	14.65089764	5.170037427	0.135066867	0	0	0
Zm00001d020351	0.515581815	0.418953034	0.361723079	2.789839233	6.399082784	1.141060097	12.63217034	23.6436778	32.76706294	110.617622	127.8518424	128.1283925	0.316393365	0.410225001	0.451869323
Zm00001d020352	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020353	0	0.003987719	0	0	0	0.042668007	0	0	0	0	0	0	0.141718849	0.357491739	0.208645504
Zm00001d020354	4.822796806	4.367493775	5.151683891	14.51501343	33.82193433	18.65355241	26.17451418	23.26078068	23.34898228	20.44903032	22.41685015	10.94986701	12.17639674	11.53509647	14.83810929
Zm00001d020355	0.009256083	0.052461316	0.05176569	0.352085431	0.396378017	0.255149271	0.178459587	0.16741093	0.125568485	0.038296992	0	0	0.740586531	0.897995581	1.246700817
Zm00001d020356	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020357	4.526286906	4.776768239	3.837656412	6.964895652	5.508484252	6.373077112	4.206501467	3.491000513	5.103695609	0.680668646	1.813846756	0.482397966	5.800453996	5.841413947	6.258247211
Zm00001d020358	22.20967361	21.55945733	19.42940257	14.93659604	11.59254693	13.31188438	9.882416926	10.04120695	9.350234579	5.848816791	10.37868479	4.67984465	12.7669392	10.88015974	12.40278136
Zm00001d020359	11.74729681	12.7395907	12.31753958	6.541825439	6.172522396	6.595234703	4.584115485	4.813458811	5.182174475	0.509941895	1.224927348	0.149256937	2.240608134	2.205267307	2.814832908
Zm00001d020360	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020361	18.12404497	22.52602767	19.57469205	27.07833172	24.77814424	22.58765868	25.95104737	20.72197318	26.25505976	10.58208243	17.75033163	9.702182122	15.2779595	14.40193419	12.48722972
Zm00001d020362	0.27688575	0.668415702	0.014338101	0.647474806	0.927295558	1.738517513	0.876256879	0.222574126	1.308994865	0.047733887	0.189129316	0.10224049	1.626681239	1.593542383	1.373838517
Zm00001d020363	2.508609512	2.726385006	2.758629481	5.656698429	4.864526785	4.596038271	4.238878237	5.015547593	4.11188444	1.328254261	2.093536054	0.883972096	3.813090393	3.810821911	3.944825287
Zm00001d020364	4.601842983	3.788849917	4.361712315	3.092925382	5.09625798	3.115097267	1.893546488	2.882340401	2.407054494	3.531432383	3.104756228	1.626507592	2.624898515	2.335873631	2.13228375
Zm00001d020365	35.29076918	33.22271333	35.01118238	47.39015631	42.70216939	49.85178515	60.46253028	60.97443999	61.44890077	76.69120041	88.95652378	111.7727095	34.41085293	32.78434777	34.74669842
Zm00001d020366	0.326939515	0.433454241	0.160390023	0.40774478	0.600839764	0.358382941	0.64341697	0.456459052	0.318321391	1.388308119	0.477378251	0.962606434	0.73171163	0.528172218	0.537138988
Zm00001d020367	1.658112264	1.943944088	1.779701329	2.881200808	1.951645029	3.384352442	2.358700757	1.845209261	2.19444144	1.979491813	1.595059379	3.020162496	2.141503608	1.87156471	1.807136231
Zm00001d020371	17.7535335	19.98121071	15.71672135	44.93693423	35.36024196	46.28280236	25.58480861	21.99596201	21.89503056	9.969911113	11.00976531	6.199026064	10.67697391	7.277851693	7.103658345
Zm00001d020374	1.645591011	2.217489062	1.91320049	5.023193555	4.103463794	4.660816579	4.54614758	4.437798951	4.380818529	1.897385338	2.50746453	2.702514623	4.232409006	4.417749161	4.14004364
Zm00001d020375	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020378	11.62123445	18.59199689	9.935354873	15.34002246	19.94713881	17.89989999	23.99430123	28.90142889	23.33739592	97.782533	95.97780176	117.0536957	0.936019593	0.443443488	2.290812281
Zm00001d020380	16.89603675	17.46206105	16.32101827	11.9150599	21.31992879	16.03975713	20.90824248	21.50728872	19.32006117	12.20022002	13.88316154	11.65225838	11.01495582	9.388843726	10.84092757
Zm00001d020381	12.26991568	14.20417217	11.85762364	18.02852686	13.10178957	17.99771874	14.66645158	14.60878076	13.50322254	11.66062315	14.50888064	11.69065343	30.60460246	35.16295535	33.44103642
Zm00001d020382	0.045662104	0.057511589	0	0	0	0	0	0	0	0	0	0	0.020438944	0	0.021116649
Zm00001d020383	0	0	0	0	0.089994286	0.041837965	0.332531993	0.384315649	0.210579804	0	0	0	0.089167234	0.099829387	0.131605429
Zm00001d020384	1.102899372	1.515388189	0.52042111	1.3681327	1.468774308	1.560747429	1.461029091	1.479186547	1.745686591	3.302451901	3.205514079	5.043768586	1.273779163	1.241364213	1.172821258
Zm00001d020385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020387	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020390	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020391	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020392	0.271180427	0.164887535	0.534589527	0.116622229	0.480533787	0.378058386	0.437068042	0.52993613	0.253713616	2.875950385	1.403244791	0.735465423	0.355780227	0.246022764	0.648665338
Zm00001d020393	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020394	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020395	0.377216321	0.043191396	0.937611107	3.87763061	6.687418236	5.293622029	7.145934588	23.34830034	0.451114997	5.56502891	0.735144727	0.316562971	3.683931711	0.601480403	9.779515829
Zm00001d020396	102.2156837	112.196147	92.37393203	40.99305825	34.19994189	39.1720049	40.56885356	30.61576013	48.86155074	45.07095929	42.62906595	40.80309367	15.99930888	13.26269627	11.97958486
Zm00001d020399	3.677713964	4.011031418	3.855708015	3.41310885	3.551875489	3.055823026	3.485942779	2.739967272	2.934230512	18.51485148	13.76805536	48.00497522	2.06003916	1.603646428	1.995323435
Zm00001d020400	0.03737863	0	0.046454271	0	0.123129572	0.045793936	0.131030788	0.123942829	0.184392869	9.150354542	0.117839129	0.269141275	0	0	0
Zm00001d020401	0.047469562	0.039858726	0.629283324	0.572285795	4.336669117	0.426482531	6.397330537	12.32513884	7.083719383	8.336303536	6.325274389	5.223406261	0.40725306	0.017345934	0.420756571
Zm00001d020402	1206.737703	1456.24794	1229.365126	836.8582771	503.8360821	851.8555237	479.274474	348.5863959	434.4864886	353.7717209	491.2727587	642.2717248	227.1440924	199.1823361	184.3817709
Zm00001d020403	2.172065202	1.761234181	3.184644113	5.479779418	3.909549297	6.113520193	2.745415903	3.123989939	3.589186619	3.034794652	1.924491633	1.926464832	3.352018688	3.237043025	1.764407889
Zm00001d020404	0.017174917	0.064895614	0	0	0	0	0	0	0	0.047374084	0	0	0	0	0
Zm00001d020405	0.014466914	0	0	0	1.601231674	0.336755038	1.166416666	1.901374803	0.874244155	0	0	0.016025791	0	0	0
Zm00001d020407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020408	0.020231201	0	0	0.012615738	0.273240144	0.074357967	0.236401583	0.256139342	0.081089715	0.055804323	0.006378048	0.028014008	0	0.022178153	0.076017594
Zm00001d020409	41.43130079	42.83617503	47.93456221	59.36396155	42.50440212	64.11135005	60.60358774	55.43775916	54.39744885	28.73080447	27.91873913	44.20458057	73.06072555	68.14267963	56.6777267
Zm00001d020411	0.690778788	0.566174268	0.743180759	1.427276665	1.385681256	1.803752691	1.479419289	1.504232235	1.541088437	1.089203792	1.063515025	1.322562849	1.033748158	1.062418816	1.065640723
Zm00001d020412	0.22395171	0.307710553	0.126512656	0	0.093892029	0.137185743	0.01189489	0.135017393	0.075325791	0.084236272	0.102694651	0	0.056956626	0	0.011769034
Zm00001d020413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020414	0.821418072	0.844377929	0.887210498	6.275033235	5.251905896	7.535007059	10.36559713	7.987000347	10.50002242	1.748218671	3.162324951	2.800758432	3.848321384	4.474745752	4.282779873
Zm00001d020415	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020416	0.174476893	0.058601145	0.072280132	1.295928965	0.822527189	0.916784601	0.946891923	0.575037078	0.612063002	0.181811148	0.400927083	0.463866203	0.590074522	0.901083375	0.64101847
Zm00001d020417	0.182713032	0.081221555	0.467510017	0.08042533	1.91184796	0.329188918	1.117736233	1.542172288	0.888088318	0.266814417	0.311727111	0.357178597	0.180407426	0.106039293	0.273370963
Zm00001d020418	0	0	0	0	0.094362789	0.035095091	0.100418043	0.284958133	0.097152778	0.059261033	0	0.079331443	0	0	0
Zm00001d020419	12.09209674	12.46027263	12.09516201	12.66271441	14.24539612	12.77233285	13.97926373	13.72348024	13.54243601	8.61476693	14.45936022	7.37620026	11.16221458	10.92199422	10.99814046
Zm00001d020420	0	0	0	0.007387422	0.007804964	0	0	0.007142286	0	0.008169361	0	0	0.05965639	0	0.041089633
Zm00001d020421	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020423	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020424	2.035301042	2.00601308	2.095970153	1.85912311	1.823282365	2.356449087	1.224692639	1.154641786	1.243884859	0.088499282	0.134864749	0.032807643	0.631532382	0.652936934	0.684810729
Zm00001d020425	1.207377996	1.029394928	2.193086585	2.432429128	4.992971048	4.505880656	3.733249939	4.770620103	3.459135696	3.355964672	4.216271229	2.921876219	3.242627392	3.400557172	4.015878882
Zm00001d020426	5.913960741	4.923851451	6.929894227	17.500371	18.29722036	18.82865922	17.15948778	14.49330342	21.6628019	2.679935971	7.699827158	1.897300602	14.5851904	14.47329114	14.60705666
Zm00001d020427	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020428	0.094284372	0.290281482	0.091137585	2.194964399	2.774547987	2.964788907	2.203425786	1.894758187	1.757101553	0.245619198	0.317054981	0.011604883	1.277809902	0.574210218	1.065832538
Zm00001d020429	1.721448427	0.602809781	0.661973367	1.434486343	7.496449529	2.298158729	5.926294678	7.176436753	4.760142009	4.428928494	6.152227225	2.693663096	0.621962497	0.939324915	0.705058811
Zm00001d020430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020431	3.962452175	4.362009027	4.0829498	8.310329053	4.884595065	7.438264455	5.706267826	4.57718446	5.015653713	0.976632902	1.551734202	0.565824277	9.296910926	9.247498727	8.831212291
Zm00001d020432	25.93296298	26.62914879	24.5362859	18.24744579	17.26081114	17.39423727	23.37698662	18.16070989	21.07354889	9.033341097	11.96425548	8.856150202	12.53920587	12.076094	11.06184123
Zm00001d020433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020434	382.0456593	375.6866119	390.9037601	325.7615792	284.9464547	374.2982046	276.7296055	262.213333	280.5354297	220.2373687	284.5180448	249.599734	749.8607337	733.0998074	614.8608268
Zm00001d020435	0.179766389	0.045283287	0.279267747	1.804784584	1.883105297	1.20029941	0.441119758	0.249270949	0.576424718	0.049585498	0.215356625	0	0.502910905	0.3448659	0.415668956
Zm00001d020436	0.014330434	0.270738517	0.249338676	1.018720842	1.699420409	1.149966619	0.368392466	0.233269758	0.618568978	0	0.009035568	0.031749209	0.192434588	0.329900022	0.364494618
Zm00001d020437	4.135763217	6.075372332	5.47120294	13.29698784	6.004618777	12.64085444	5.666545936	4.883113599	4.071951214	0.450619905	0.780673113	0.228594302	36.77424976	37.76883962	33.41090212
Zm00001d020438	26.54828828	27.98975678	27.5128675	70.72106254	52.34109085	65.45887481	52.73850476	43.04069014	46.0076169	9.857740959	14.02974457	5.671284728	37.6195147	34.79320792	35.57127519
Zm00001d020439	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020441	8.139563237	8.882434671	8.289903267	10.30248041	9.669985209	9.517575085	11.19783708	9.770171433	10.80842807	5.856057932	8.856158269	5.659812512	6.395632295	6.639810899	6.26372187
Zm00001d020442	5.067099782	4.630100867	5.630622303	6.269902589	42.83527465	9.153595469	16.46244098	20.3658965	14.65484441	6.001773141	8.219005207	1.849022226	1.000631887	0.718847763	0.413524153
Zm00001d020443	1.098004614	0.433863804	2.060283514	3.222079349	11.99978146	3.217943497	19.42137657	15.67964617	31.46393897	18.37980176	23.7828683	7.154821661	0.602305108	1.038461441	1.792155069
Zm00001d020444	5.725704613	5.682634214	6.076755206	3.694821043	3.85891365	3.203187021	3.85856043	3.894636922	4.239969769	4.273227695	3.826918092	1.546879403	2.341566291	2.531160001	2.090430283
Zm00001d020445	6.678905218	7.697781765	6.278749937	13.94167821	10.51136049	14.50006745	7.472945013	7.774300403	6.976092047	1.831970315	2.616092988	0.677859468	19.50732107	19.37987696	18.98077869
Zm00001d020446	0	0	0.014338101	0	0	0	0	0.125197946	0.170738461	0.159112958	0.014548409	0.012780061	0.09037118	0.050588647	0.20007357
Zm00001d020447	0.009144638	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020448	0.005834927	0.029396449	0.06526498	0.603996628	0.392106988	0.52899521	0.286360714	0.232174595	0.151117748	0	0.036790151	0.006463667	0.287296709	0.281443882	0.411504283
Zm00001d020449	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020450	37.48349276	37.31126324	45.59123193	39.06378752	65.07807293	37.23162746	43.66325714	48.77052184	44.05067883	3.628589411	13.35512043	2.268888939	13.60285178	12.35824884	16.36411725
Zm00001d020452	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020453	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020454	27.34872327	25.05436911	23.37331892	22.88568902	23.82065651	18.645911	18.04707043	20.25947758	18.03691099	34.43572428	27.13967243	30.23677395	21.13306872	20.50025065	27.00475967
Zm00001d020457	1.335695268	2.078151517	1.952948248	2.197764099	0.946540891	3.520343043	1.718147488	1.691748381	1.232001352	0.541807054	0.990796815	0.335712691	7.9758449	6.361428919	7.825044891
Zm00001d020458	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020459	0	0	0	0	0	0.598183291	0	0	0	0	0	0	0	0	0
Zm00001d020460	40.85401978	43.50381207	36.10322253	27.25269742	19.93986613	29.66086203	27.34237591	23.3862189	25.5102896	12.04476512	13.3984572	8.517859114	29.34627467	28.73496515	28.06135189
Zm00001d020461	0.725857929	0.577402577	0.834271425	0.435613123	2.7110674	0.581706386	1.568786383	2.777012059	2.059596581	2.800006946	4.184366333	2.327578211	0.519112466	0.418795237	0.656209363
Zm00001d020463	10.8643078	12.0106654	10.13053865	11.93980733	24.09827985	13.11836243	24.03546732	30.58150134	30.39048746	18.98450202	29.13868954	21.5088957	17.57019508	16.03088614	16.44326004
Zm00001d020464	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020468	0	0	0	0.080998432	0	0	0	0	0	0	0	0	0.012112866	0	0
Zm00001d020470	12.00822442	8.269457808	11.54183159	4.323147341	17.82887992	5.702113705	15.015842	14.88283166	13.79731297	6.731760063	8.769725742	5.694092667	3.903184493	3.148903524	2.983877634
Zm00001d020471	19.2358831	18.07032546	18.70036347	17.42418127	18.39646261	15.80436911	23.22247363	19.83063682	22.17333484	14.19368469	16.65759896	10.94170368	11.39401041	11.67850015	10.10977603
Zm00001d020472	10.59196007	10.8640718	16.1837668	9.554572813	9.288012762	6.863280739	6.155839475	6.486397429	6.497096514	0.665165567	4.374293998	0.801398274	5.064920133	4.616042443	5.382983486
Zm00001d020473	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020475	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020476	9.076969109	10.359484	8.344072803	8.499787955	9.488010382	7.069922986	5.830578471	6.493482489	6.816714045	1.790374883	3.849554331	1.101000376	3.915430016	3.468774963	4.983286446
Zm00001d020477	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020479	0.962511906	0.83438293	0.764246958	0.514987748	0.755470289	0.804336854	0.642187057	0.576703127	0.740070718	0.581789165	0.790441423	0.727272126	0.249324474	0.179113161	0.357193493
Zm00001d020480	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020483	0.056128233	0.010099102	0.019930381	0.200001993	0.084522493	0.098235379	0.093694058	0.03867307	0.069221678	0	0	0	0.116645834	0.298858738	0.305918943
Zm00001d020484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020485	7.675619495	6.561456328	6.493607968	10.50498066	16.05406249	10.83878449	12.85010841	13.82682164	12.85916139	13.20054553	14.13979874	8.758808456	8.468532046	8.380491322	10.77183021
Zm00001d020486	39.5489267	39.97260826	39.26053712	35.88654805	45.78521817	37.24687956	38.85308558	43.21266725	42.03062589	65.81252886	61.11942467	53.61829031	26.95458765	23.28319898	26.02314058
Zm00001d020487	0.051427839	0	0.053262225	0	0.112939538	0.010501023	0.180280292	0.072345313	0.063424789	0.059106224	0.010808693	0.066464331	0.009591567	0.056377003	0
Zm00001d020488	0.04267815	0.0477807	0	0	0	0.011619238	0.011082093	0	0	0.098100341	0	0	0.021225875	0	0.016447255
Zm00001d020489	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020490	0.145298138	0.3493704	0.426818255	0.593049387	0.835425221	0.323654727	0.200650126	0.844128502	0.733061869	0.218607368	0.016656874	0.029264488	0.339967772	0.159280921	0.259612372
Zm00001d020491	0	0.004862742	0	0.019260288	0	0	0	0.004655294	0	0.591045549	0.092504215	0.996509121	0	0	0
Zm00001d020492	0.086199457	1.053114793	0.814179938	8.396079875	0.897285404	0.337939614	0.523765146	0.706771087	1.892279504	0.760852882	2.424016268	2.387196172	0.028937988	0.198439231	0.149487504
Zm00001d020493	0.032192859	0.054062699	0.040009379	0	0	0	0	0	0	0	0	0	0	0.011763647	0.012406446
Zm00001d020494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020495	0.013535875	0.392115152	0.504672765	2.278983104	0.285368021	0.215582889	0.458683437	0.799738035	1.485720442	0.59738251	2.440891718	2.159197665	0	0	0
Zm00001d020496	5.997702623	7.68990547	9.41489051	16.68349957	17.53606946	14.19173777	12.98599649	17.76060755	14.03222301	7.149988833	6.834154203	1.834694591	7.227056833	8.734293108	10.11798579
Zm00001d020497	0.451602322	0.659284876	0.191336146	5.184173276	5.328422969	10.99004616	10.69786378	16.1750044	8.31628972	0.084931917	0.621256381	0.477525259	16.11401298	21.24267424	32.94064137
Zm00001d020498	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020500	94.30513499	95.20992397	95.1091531	38.91357985	28.11642593	40.55903516	54.00218581	35.39581555	43.46650995	14.80551411	22.29467387	19.8515789	31.22598283	30.14979388	25.72422434
Zm00001d020501	0	0.121963082	0	0.483069849	1.113541666	0.690241118	0.133723683	0.0636873	0.510263928	0	0.288626194	0	0.462995388	0.414962091	0.753142365
Zm00001d020502	0.096806534	0	0.053471754	0.55000548	0.935416615	0.975165836	0.816966484	0.674420617	0.88878705	0	0.135640162	0	0.156476119	0.235828272	0.298457506
Zm00001d020503	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020504	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020505	0	0.010708314	0.014088433	0	0.003734216	0	0	0	0	0	0.00357377	0	0	0	0
Zm00001d020506	16.5653024	15.09720093	17.15169857	20.05347785	22.33945848	23.11274395	17.50165786	17.03127193	18.33870653	12.03376578	16.04151696	7.560223878	6.803383496	7.256683686	7.528360725
Zm00001d020507	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020510	9.143502355	10.39157694	10.09226881	13.72483776	14.79887185	13.46710348	13.66752379	14.37140094	13.54624601	3.457596296	5.180946731	4.207544158	9.270142378	8.925033416	8.918336157
Zm00001d020511	70.76117501	68.01736013	66.36423122	88.17006949	128.0627585	96.55567425	118.7367702	137.2717548	121.4172512	127.4966292	130.8478151	94.47068123	114.9190214	114.9464603	130.9518221
Zm00001d020512	0.011105795	0.090920636	0.037956366	0	0.007316757	0.020409178	0.012977122	0.036825418	0	1.66569358	0.140047641	0.298335527	0.003106935	0.063916454	0.006419907
Zm00001d020513	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020514	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020515	0.05949188	0.112395364	0.022181005	0.237426213	0.164617486	0.255099924	0.104274393	0.129120597	0.198098965	0.443065194	0.300084675	0.072492645	0.019971997	0.045651961	0.075658805
Zm00001d020516	0.047634961	0.046663875	0.006577874	0.151821102	0.013948011	0.090781204	0.055661453	0.057436921	0.124021695	0.087595287	0.166858929	0.070357131	0.023691134	0.023208497	0
Zm00001d020517	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020519	21.02812815	23.21463974	18.42079797	16.84164263	13.62054892	13.92949406	18.05501356	16.72158178	18.55859509	4.89684436	7.962584936	4.630473611	19.96515772	18.0381737	18.06865855
Zm00001d020521	1.273995096	0.685005335	0.629626258	0.929164571	2.149882581	0.465507215	1.453840747	1.769714472	1.304730281	4.685464731	1.061637437	3.466286897	0.725326337	0.473699961	1.136984846
Zm00001d020522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020524	1.477482272	1.469726793	1.427754203	1.624541992	1.779931106	2.175835648	2.202089346	1.69788554	1.721741475	0.465758089	0.707237497	0.554469748	1.410408865	1.275901691	1.174803411
Zm00001d020526	0	0	0	0.012860773	0.010190754	0.018950555	0.003012415	0.01554252	0.015897061	0	0.006501929	0	0.040388402	0.002826115	0.065571915
Zm00001d020527	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020528	0	0	0	0	0	0	0	0	0	0	0	0	0.00978794	0	0.040449935
Zm00001d020529	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020530	317.5113523	316.6047343	320.9670445	100.0799244	124.0264361	92.24857258	98.81752587	106.653833	111.1646663	74.92589552	139.8344572	65.95441925	36.13622957	30.11732595	39.70629928
Zm00001d020531	1.200173837	0.776117083	0.966187368	0.41553087	1.005490408	0.557426567	0.925167444	0.617732877	1.166444358	0.316224495	0.646043143	0.142871439	0.797801729	2.10900371	2.323653189
Zm00001d020532	10.21528906	9.73908637	9.877980678	5.11701905	6.023101636	5.767785018	6.158825172	6.602638119	6.448349541	9.902623581	12.30471289	16.42631247	3.820222695	3.961520262	4.859116523
Zm00001d020533	0.02142267	0.058460853	0.031061517	0.200380686	0.098796287	0.153099928	0.304560746	0.146374895	0.334654518	0.024621162	0.256639405	0.126565662	0.147831376	0.136991652	0.169244788
Zm00001d020534	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020535	0.131454172	0.105962891	0.071883518	0.918086071	0.408775971	0.322098695	0.522254285	0.760818287	0.570660471	0.043511274	0.066307171	0.029123793	0.135333325	0.080698621	0.036474951
Zm00001d020536	0.367590386	0.630442827	0.641523389	0.692541225	0.741989506	1.063589054	1.763812089	1.584312681	1.552933697	2.448546342	3.067275678	2.070655052	4.314751158	3.652410603	4.331226534
Zm00001d020537	3.376350347	2.314242897	3.388237288	24.92584273	17.76038625	15.63577401	19.85034324	20.38754293	20.21451005	2.140729356	4.207497275	1.910498231	25.3045881	25.26173915	25.99791505
Zm00001d020538	1.216121624	1.483205545	1.340107586	3.442895683	2.222020529	2.962448427	3.848644928	3.502170466	2.687168972	0.645734403	0.710553351	0.404149304	6.205608911	5.79255947	6.673825467
Zm00001d020539	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020540	0.036711154	0.073980536	0.018249892	0.201452061	0.009674466	0.089952375	0.128690953	0.097383651	0.144880112	2.278383047	2.499872952	3.61122524	0.246485764	0.096585736	0.246170005
Zm00001d020541	3.692642564	3.304317752	4.086263778	6.930555064	6.908406758	6.122436813	6.175839026	5.814451982	5.554752023	0.738644998	1.698596378	0.524142495	4.271877808	3.979581255	4.511290691
Zm00001d020542	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020543	0.057978091	0	0.014411068	0.433846562	1.879308167	0.596661196	1.083958402	1.300295885	1.573067455	0.175914962	0.365561166	0.269747093	0.077855215	0.203384383	0.522838567
Zm00001d020544	0.047945209	0.043133692	0.042561748	0.384397618	3.230942167	0.923048364	4.858079172	4.286273367	4.029269423	23.7669799	46.35588838	40.61514332	0.137962873	0.172694586	1.25908022
Zm00001d020547	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020549	0.23728075	0.1598532	0.147446607	1.751470529	1.806838869	1.602237867	0.741516145	0.795110131	0.881301626	0.190261206	0.556685839	0.165044625	1.102236581	1.234036281	1.496049619
Zm00001d020550	1.473778408	1.367747949	1.566513807	1.741293946	1.303130032	1.544246225	6.684506241	5.892294821	8.633493193	0.427912295	1.662852186	0.665922763	0.954803105	0.765287831	0.672587748
Zm00001d020551	0.569634747	0.684845386	1.834217871	1.033343629	3.036426541	2.506025452	4.387029086	3.933776372	4.534431942	0.92846027	1.436655382	1.376761138	3.621815754	4.002179971	4.939316272
Zm00001d020552	54.8738877	39.98160772	54.25957093	135.3617146	152.0047275	127.3070214	102.0311537	93.65281367	91.53975997	259.3696442	111.9469906	166.5511602	57.61209953	51.19910399	52.77599201
Zm00001d020553	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020554	12.9724255	13.63435148	13.40619112	44.21001299	33.53322884	36.3001637	27.6441881	21.96898159	24.49148805	4.433351327	11.79232373	19.0571379	12.09950356	10.26518169	10.194455
Zm00001d020555	1.289739049	1.179216654	1.30605973	11.10465292	13.82195266	16.69060966	15.23805202	11.79596208	13.14900913	1.633826555	1.180647609	0.645567242	11.2574234	10.44159751	9.443724192
Zm00001d020556	0.150416999	0.115775469	0.218095137	0.031265593	0.154152805	0.644984917	2.314203152	1.571861743	0.638964686	0.10372492	0.042151258	0.009256951	2.450012245	3.389454816	5.758107575
Zm00001d020557	0.640917943	1.02970583	0.834166267	5.544924204	2.93248824	8.056153257	6.598686801	5.087100496	2.576675939	0.278403625	0.089094907	0.061494314	45.13326303	40.36335377	41.18613045
Zm00001d020558	0	0	0	0	0	0	0	0	0	0	0.068412161	0	0	0	0.501771812
Zm00001d020559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020560	0.529441541	0.869327546	0.799235755	1.738896077	0.814495126	0.85239906	0.307706713	0.34760284	0.229044676	0.141449871	0.122342916	0.042988892	3.474123219	2.707485006	3.602135597
Zm00001d020561	0.195006189	0.150641424	0.14864395	0.943628649	1.082612895	1.092611701	0.814236649	0.852749291	0.846548435	0.068132907	0.121315137	0.063365575	0.477170437	0.390491342	0.417840981
Zm00001d020562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020563	0	0	0	0.005677712	0	0	0	0	0.016843579	0	0	0	0	0.004990638	0
Zm00001d020568	0.014892412	0.018757048	0.023135416	0.213591453	0.269815386	0.296485182	0.13486382	0.345669529	0.087240751	0	0.004694952	0.004124284	0.249976303	0.257127958	0.413223845
Zm00001d020569	1.172075683	0.87897882	0.878443279	1.216275208	2.52288302	1.348261291	1.672757796	0.992516003	0.662058495	0.074037508	0.191804776	0	0.150182098	0.068657203	0.175850003
Zm00001d020571	9.893991941	10.97213751	9.727067689	7.336771921	6.949963239	7.306248679	6.391922936	6.216268894	5.408555105	4.153471974	4.028356658	2.153384642	5.297848745	4.742272487	4.317829184
Zm00001d020572	4.017550772	3.834527434	4.538024142	5.551218102	3.960763337	5.063691111	4.491867472	4.600296621	2.899184786	2.723926374	2.551354166	1.803663816	3.654833237	3.147351823	2.63987136
Zm00001d020573	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020574	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020575	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020577	0	0.040420117	0	0	0.042286048	0	0	0.038695766	0	0	0.080938331	0	0	0	0
Zm00001d020578	1.064176401	1.340334114	1.023918629	3.692597998	4.692875315	4.363396005	5.385114527	7.440226545	4.26538008	0.650984747	1.439360947	0.028520476	1.834289392	1.552314065	3.472714516
Zm00001d020580	129.6068953	157.9915993	133.6895862	119.1268449	179.6645145	139.9066761	186.4781953	215.3093507	172.7084119	58.09454848	78.14649142	28.49533249	53.44427575	42.62717555	62.5300109
Zm00001d020581	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.595581324
Zm00001d020582	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020583	3.157097906	1.745287421	2.503324572	11.83000293	55.92389463	21.21206703	47.85774037	72.94819019	46.89910764	4.452668882	7.04366463	1.060264324	6.154588978	7.939761292	10.98314005
Zm00001d020584	101.482621	115.2346435	103.5231577	98.53030867	95.72748011	116.0092133	91.08729144	88.28662209	81.97840283	4.411559745	9.0619801	1.990125875	58.10506874	50.48467282	54.30714916
Zm00001d020585	17.00140629	18.87463988	22.38191362	58.58263499	38.68360174	60.98401957	56.98715873	50.08720391	38.15211101	22.66212198	34.97703295	25.96871569	9.953864097	10.08732759	13.1208504
Zm00001d020586	0.008075153	0.010170685	0	0.01007098	0.010640199	0.039572669	0.009435816	0.009736796	0	0.066821803	0.050915135	0	0.054218133	0.044261331	0.009335979
Zm00001d020587	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020588	0	0	0	0	0.049762034	0	0.088258768	0	0	0	0	0	0	0	0
Zm00001d020589	9.911232312	9.84534577	11.57987589	15.17855896	9.669681625	15.94097136	15.74359685	17.61782274	7.769217833	1.387392056	0.873431016	0.310560112	38.91995345	39.15753509	39.33340205
Zm00001d020590	0	0	0	0	0	0.005960545	0	0	0	0.053679389	0	0	0.016332971	0.03200047	0.022499377
Zm00001d020591	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020593	15.28254307	15.88785585	15.71093685	14.96440999	11.92176752	15.61792109	12.547691	10.41292104	12.90278687	26.88561225	15.02816204	23.21919852	11.0212363	12.35469223	11.04915484
Zm00001d020594	0	0.009585621	0.025222713	0.012655535	0	0	0.005928683	0.030588971	0.009386021	0.461837982	0	0.002810238	0.005677695	0	0
Zm00001d020595	250.6468334	214.6574541	293.8857311	218.3494438	218.1843846	282.5907658	283.2888718	235.2210534	269.0316832	8.907164446	37.75263943	10.21325784	133.0517911	121.8801117	144.9476706
Zm00001d020597	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020598	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020599	0	0	0	0	0	0	0	0	0	0.018323504	0	0	0	0	0
Zm00001d020600	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020602	3.640861757	3.747293768	3.261052253	3.629513297	3.621747836	3.102806852	2.187715337	2.25749825	2.027409548	2.10010094	1.937934418	1.334665923	8.498320799	7.945899461	7.844020044
Zm00001d020603	3.574935521	4.017561201	3.280082229	4.974194049	5.354965933	6.391649456	7.357922652	6.250737179	5.656080372	1.912861697	2.479012674	2.71164361	4.973482902	4.996492299	6.09176649
Zm00001d020604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020605	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.033345595
Zm00001d020606	0.226774022	0.306024343	0.161048813	0.666653562	0.704333245	0.734262902	0.359623107	0.957032482	1.098724247	0.960616204	1.797521425	0.628024927	0	0	0
Zm00001d020607	18.60100972	18.51519327	20.84354803	166.7620705	195.1054662	164.6271575	138.8593401	180.0721127	148.3278476	184.2907348	436.2679114	156.3557939	172.0091587	164.2986204	209.8676924
Zm00001d020608	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020609	0.635438125	0.487501489	0.722842177	1.554004886	2.372756246	1.60010634	2.50808568	3.184570717	2.603729213	0.78788015	1.312892034	0.967588978	2.633527791	2.704673572	3.168341435
Zm00001d020610	0.817413089	1.775947549	0.685721291	11.41775203	9.558922268	46.24162489	22.08777904	25.62596723	8.19078845	8.821493508	6.648557641	4.346367	145.0046397	161.3162498	191.1109325
Zm00001d020612	2.969059416	3.977757294	2.962608728	2.510126812	3.427852066	3.095376025	5.087262093	5.968117349	5.268056989	5.241569575	4.47759469	4.261454861	1.473548644	1.247929224	2.170153262
Zm00001d020613	10.46486881	10.33456169	7.891317477	6.376102312	5.871552433	6.634697771	2.610845928	3.135536124	2.272965611	0.522295997	0.875524055	0	0.861691168	0.664238746	1.123774265
Zm00001d020614	9.373549777	9.377989972	6.352261034	5.172399532	3.157668218	7.507858066	2.200931611	1.396802009	0.730691035	0.463444792	0.44605083	0.293875275	20.87965069	18.67059753	20.04864002
Zm00001d020615	13.01211457	10.94431904	11.12686183	5.617171276	12.7812255	6.096711014	9.871152763	12.67622916	10.1948319	5.46178081	10.86755626	3.833248166	5.458060335	4.895274763	4.362632741
Zm00001d020616	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.019298916
Zm00001d020617	1.583210188	1.706627149	1.710587065	1.832203963	1.841792301	2.079443635	2.841637663	2.192760061	1.9877181	4.691591224	1.690711811	0.971704653	2.338275991	2.353183566	2.069514256
Zm00001d020618	0.429945208	0.470604563	0.407114034	2.936382684	4.262357619	2.646250004	3.558602765	3.641255624	4.090435829	0.557669769	1.34898229	0.436584307	0.589947819	0.510597787	1.639165085
Zm00001d020620	6.539426251	5.281264287	4.24405355	0	0.061219563	0	0.054290015	0	0	0	0.732364681	0.25733853	0	0.063665619	0.013428897
Zm00001d020622	16.95250483	18.63324751	15.95893884	12.84348048	9.84458112	13.73011311	8.92426174	7.459860995	7.899450339	1.874039433	2.225920515	0.590480488	7.617494568	7.926908753	8.70860339
Zm00001d020623	549.1306711	616.9466663	638.3393322	401.9146624	202.7162225	484.6231838	167.200699	70.95719398	116.2568265	5.557712896	5.354647342	2.674706473	107.6861376	87.00061146	92.00484273
Zm00001d020624	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020626	0	0	0	0.266408904	0.187644337	0	0.208005689	0.128784346	0.043907352	0.196405057	0.314268365	0	0.039839973	0	0.164643876
Zm00001d020627	0	0	0	0	0.057506325	0	0.006374636	0	0.006728022	0	0	0	0.042733379	0.047843214	0.063071876
Zm00001d020628	3.04799025	1.915144593	3.924865746	11.33531677	14.89520179	6.482175446	9.366222972	10.0300126	12.26983978	1.138694644	2.819806738	1.57769759	0.323371459	0.233816551	1.240919317
Zm00001d020629	0	0	0	0	0.003661353	0	0	0	0	0	0	0	0	0	0
Zm00001d020630	0.587108205	0.598614489	0.48643987	2.545321885	5.452046497	5.617295849	2.972822418	2.865385847	2.930748373	0.771160961	0.88138367	0.185820522	1.689410401	1.440457413	2.682786098
Zm00001d020631	0.483937484	0.328203643	0.821195461	1.125845118	1.1894786	1.858480965	0.913469233	0.998714271	1.124793365	4.94154589	1.654745341	2.432996537	0	0.08161681	0.67785307
Zm00001d020635	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020636	80.48138976	76.19855407	77.32518493	631.6496524	462.8433306	781.8245486	257.2867775	241.2365407	248.9408647	368.5582438	249.944004	209.6850698	70.95748665	52.25123527	145.9831221
Zm00001d020638	0.040718493	0.051285092	0.177117719	0.349128572	1.991852319	0.180835753	2.825036318	1.699991718	1.33075565	15.74516312	18.44652673	18.43711769	0.011391325	0.022318521	1.600588564
Zm00001d020639	9.500506786	7.205350281	7.977564186	7.668803003	25.17155818	15.3120258	28.22928286	30.26348806	25.04665493	115.8769775	84.91968706	139.2694441	4.974502896	4.704770016	5.413907709
Zm00001d020640	3.62141105	4.472282046	4.568177079	8.572484145	8.29867885	8.900055122	7.809779302	7.993426446	6.762917881	5.870623598	5.354080263	3.458305876	10.62027997	9.802780935	8.693824351
Zm00001d020641	8.249698533	9.557133072	7.878568271	11.72615119	13.41547146	12.18594157	13.79248217	14.09087734	12.74074119	11.64263421	11.8296963	11.58585875	17.73485275	15.957934	21.1978026
Zm00001d020642	48.17819217	49.83078974	55.20862448	64.9370671	76.18379488	71.32028278	79.03122904	72.44435899	84.79057006	43.25991574	38.90340885	32.56862729	34.8154787	31.95858612	39.72303933
Zm00001d020643	7.03203033	7.068096187	6.137449738	10.39591981	11.41010287	9.334454758	8.635592313	9.020353223	9.061079866	1.506247562	2.716353781	0.76510881	5.931992133	4.902562242	8.16492218
Zm00001d020644	6.921975581	7.212221522	7.413801497	7.307215666	9.575878924	7.65023528	8.352247112	9.323536057	10.0769292	7.054548991	7.991657342	6.063636031	6.630858296	4.748032132	4.884594983
Zm00001d020645	0.15714062	0.158335354	1.328004809	0.705524271	0.745400952	0.038503752	0.881370314	0.60632262	0.193797965	0	0.079263745	0.069629299	0.07033816	0.241168292	0.254346401
Zm00001d020646	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020647	32.90734488	33.58178286	28.38289618	24.83188008	22.65267499	23.34934673	27.9426276	25.35355189	27.87756767	22.08715157	22.69009264	20.47721464	21.78695136	20.9427144	21.01381248
Zm00001d020650	0	0	0.011725776	0.011766853	0	0	0	0	0	0	0	0	0.010558005	0.020685834	0.021816166
Zm00001d020651	0	0	0	0	0	0	0	0	0	0.122038094	0	0.016336971	0.01650329	0	0
Zm00001d020652	0	0	0	0	0.451758152	0.157515349	0.41731549	0.533977307	0.704719874	58.14082243	12.26786602	21.04703808	0	0	0.941412004
Zm00001d020653	0.32550557	0.409975469	0.096318876	0.270637617	0.531020708	0.208889403	0.633922101	1.177456873	0.22939351	0.128264527	0	0	2.861973592	3.568306357	4.426344196
Zm00001d020655	0	0.170063898	0	0.294694294	0	0	0.197220209	0.040702213	0	0.232776364	0	0	0	0	0
Zm00001d020656	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020658	8.556405096	6.466094329	9.121544932	17.07388361	17.01169464	16.37641153	17.06352542	16.43854255	15.03133677	5.90034664	11.43729542	2.422257078	9.255728983	7.962434936	9.078999144
Zm00001d020659	21.7763226	20.41677837	19.90333257	34.66867877	44.86308029	34.37559976	39.13835052	39.915788	38.5381097	17.01428952	25.36722931	7.716418377	20.43449144	22.37328086	21.90233958
Zm00001d020661	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020664	6.853341118	7.763666839	6.481019959	8.82963998	6.085060947	7.848592169	7.133678268	5.219346428	5.77072386	0.890867537	1.877461484	0.798450063	4.762340248	4.335014188	4.583275669
Zm00001d020665	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020666	0.013045071	0.035599015	0.091870562	0.246750232	0.23777832	0.199774954	0.383619653	0.424693414	0.453150682	0.176914479	0.5017327	0.546719555	0.141112577	0.169222162	0.366992456
Zm00001d020667	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020669	24.85780642	27.62224409	26.76218594	52.78364095	48.73253233	46.40119783	38.60640088	44.45996182	47.22022682	14.02346579	23.92975063	7.835647507	56.15312958	64.59145725	62.69272163
Zm00001d020670	25.74307609	23.26228919	26.22029482	7.559501552	21.14144838	15.81307781	13.6417013	13.89258728	10.31475952	5.001743095	4.406314121	2.685812711	17.8749076	19.84478216	19.40981989
Zm00001d020673	0.753345257	0.95882894	1.478304793	0.306586581	1.347904563	0.55377061	4.364355106	4.216716204	2.689452624	23.82015115	10.28991917	21.75905494	2.023242078	1.773390305	2.768767543
Zm00001d020674	0	0.014837544	0	0.146920895	0.419107386	0.295870064	0.330371466	0.703125905	0.523029063	1.242911452	0.401099822	0.306671912	0.230697648	0.116227471	0.394975054
Zm00001d020675	0.085982603	0	0	0	0	0	0	0	0	0	0	0	0	0.011782144	0
Zm00001d020677	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020679	0.212256278	0.425309767	0.011990579	1.455942524	1.830624779	1.90304183	1.702329131	0.965564493	1.475435745	0.319348801	0.462325232	0.128251567	1.198404391	1.110531477	1.684317306
Zm00001d020680	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020681	0	0.024633719	0	0.365883474	0.721585089	1.150154996	1.211253731	1.108392879	1.423125832	1.051989319	0.838562798	1.018291142	0	0	0
Zm00001d020682	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020683	0	0.067360273	0	0.008337491	0	0.040951423	0	0.032243318	0	0	0.008430252	0	0.097252394	0.065956959	0.030916014
Zm00001d020684	3.221762797	3.165339284	3.11162556	6.869557045	5.626995896	7.072370238	5.177746046	6.413763009	4.765662063	0.716668073	2.692611883	0.858215996	8.458078643	9.021132215	9.896382678
Zm00001d020685	88.92416196	102.9837844	62.21365441	8.326827154	7.181603853	7.606237619	3.743655886	4.115833149	3.50738163	2.418899186	15.0457801	3.510336282	16.46754192	16.47676631	16.38747242
Zm00001d020686	119.7522707	89.57577236	106.8098191	31.44630389	72.55311273	60.94697677	86.42989613	113.8023176	66.89634137	13.46777535	42.25160881	6.776188241	81.28643176	57.42280173	59.61262139
Zm00001d020687	9.504136658	6.986928095	10.3495929	33.14946491	76.62817347	28.4815771	43.1627806	61.1032187	56.17439007	8.720384537	26.41511943	7.288229273	9.679274742	8.790385468	9.361904072
Zm00001d020688	7.242393649	7.952357293	6.605032667	7.532513604	9.927429233	8.927092419	8.79339343	9.148520027	8.342964807	4.134415381	5.910173498	3.379565665	4.631126313	4.236267456	5.72526181
Zm00001d020689	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020691	0.360801354	0.385278152	0.17546282	0.342372889	0.54775352	0.163359292	0.192467915	0.57690658	0.029019661	0.02163498	0.039563659	0.008688682	0.052662822	0.1203766	0.117886149
Zm00001d020692	2.178878504	1.320568079	1.985126844	1.07265898	16.95612241	3.843569567	16.51084106	16.62267157	14.56724383	70.27935447	56.51246202	98.27055383	1.558270495	0.897956063	1.676230519
Zm00001d020693	4.539550751	3.752852373	4.530839935	7.760013217	13.25635068	8.825504241	12.41121948	12.84937552	10.82957939	2.876578683	10.67545461	3.727845542	14.43555463	12.60435599	15.92739524
Zm00001d020694	44.14074406	31.83272597	36.55196838	16.80696828	44.58957102	24.21499592	36.58831733	37.04160558	35.3527769	64.90191606	41.47930739	54.91474455	23.66871909	24.69057136	33.80978343
Zm00001d020695	0.130714835	0.145266899	0.592474851	0.537013225	0.607891665	0.744196535	0.287511126	0.370852558	0.606899365	0.148463665	0.135746965	0.008517645	0.894853303	0.581605839	0.568938117
Zm00001d020696	16.45144689	17.06956433	18.78738333	22.26508085	24.83255032	22.6985256	21.81379579	22.89400148	26.21411753	12.82214013	18.79182636	8.656273661	20.89861541	19.18061421	21.14584511
Zm00001d020697	3.146722582	3.927603252	2.827370955	2.952180789	4.855990302	3.577315936	6.608563963	7.955921662	7.682898814	5.209773957	7.400004081	2.276758958	8.430460539	7.878021313	9.422853229
Zm00001d020702	4.353610277	1.673281364	4.540508504	1.141902382	54.11253625	6.884410188	49.24613229	54.02076268	56.85826165	137.6790423	109.2575003	91.12477329	0.090405087	0.127924837	3.570058668
Zm00001d020703	3.359964775	2.591081167	3.906974282	3.989664477	8.012785984	5.157845326	8.816135181	8.618221867	9.912787324	16.75296117	15.85078057	17.01095264	1.649181411	0.887744208	2.000441263
Zm00001d020704	0	0	0	0	0	0	0	0	0	0	0.122822869	0.078468251	0	0	0
Zm00001d020705	0	0	0	0.187107488	0.617759133	0.367607838	1.073754473	0.949718301	0.71697272	0	0	0	1.86772418	2.528651665	2.666824259
Zm00001d020706	24.27099729	21.00714305	23.39046116	21.26724524	29.61477981	25.46984693	27.26372172	29.6938924	31.68635495	29.99183785	34.5716751	31.45990984	12.94257308	14.12763853	13.90911462
Zm00001d020707	2.635801197	2.53984803	1.815493354	7.168596398	10.73299454	11.74968154	11.44770546	14.53154092	14.1188908	8.299653425	15.15746514	6.015534727	6.165617609	6.910329872	6.755561953
Zm00001d020708	0.214966598	0.460681189	0.490459967	0.492178103	0.257884355	0.20047072	0.131217858	0.081242037	0.015827668	0.026549944	0.052597569	0.010662548	0.531374176	0.942615732	0.723335685
Zm00001d020711	7.314545537	8.524736018	8.254287867	31.58279876	24.27228933	34.56508797	35.96419575	33.99966378	34.08207103	2.40189624	3.583735602	0.824302847	28.7545411	28.29024357	31.60247196
Zm00001d020712	0	0	0	0	0	0	0	0	0	0.045346045	0	0	0	0	0
Zm00001d020713	0.204048267	0.128499774	0.197238057	0.21206679	0.014936863	0.263875216	0.119215201	0.082011922	0.069902251	0	0.100065549	0.050230091	0.063426823	0.024853875	0.301437544
Zm00001d020714	4.213456295	1.143809478	3.45710408	1.132596563	13.51847746	2.165058373	11.3764548	13.28813987	8.71777706	13.7998354	10.83294902	9.924050212	0.384523692	0.484315908	1.986367765
Zm00001d020717	4.827676928	4.605599361	11.5175713	24.42394278	21.36483118	21.88036915	43.1144312	72.9800516	33.21583069	0.128803737	0.380490968	0.413824157	15.64423426	23.9018398	26.83582701
Zm00001d020718	0.521931344	0.233261905	0.376640019	0.860907593	0.820828429	0.4125402	0.255754779	0.284213728	0.768270506	0	0.042462721	0	0.075362314	0.073827028	0.019465286
Zm00001d020719	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020720	0	0	0	0	0	0	0	0	0	1.096936258	0	0	0	0	0
Zm00001d020721	0	0	0.010278675	0.041258729	0	0	0.009664148	0	0	0	0	0	0.055530126	0.054398863	0.066933263
Zm00001d020722	0	0	0	0	0	0	0	0	0	0.067945533	0	0	0	0	0
Zm00001d020723	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020725	0.224855821	0.24544584	0.35397187	1.701277916	1.066609914	1.634509605	1.138557458	1.030274764	0.942852602	0	0.01890336	0	3.153648412	1.69259795	2.634302011
Zm00001d020726	0	0	0	0.009435623	0.059813579	0	0.017681059	0.072980171	0.009330616	0.772142516	0.305299207	0.821332876	0.03386508	0.024881384	0.034987963
Zm00001d020727	13.87594066	15.86536799	14.17678586	18.72283403	15.03751244	18.29281102	13.05082523	11.33076157	13.73949275	10.85488438	11.04223674	10.24156029	9.591462	9.256777185	8.50988023
Zm00001d020728	0.120105451	0.037818315	0.037316852	0.18147672	0.16586504	0.157049642	0.112004685	0.146212333	0.158093171	0.071673412	0.144175249	0.066523684	0.325666036	0.345617509	0.332458794
Zm00001d020729	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020730	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020731	0.482336809	0.294260232	0.365289603	1.240695934	1.14200302	2.142116128	1.73486377	1.435796364	1.031701738	0.519704672	0.161564332	0.066788853	0.851793564	1.421027846	1.646801809
Zm00001d020732	0.058611935	0.147643899	0.018210771	1.827456579	0.733683323	1.059162697	1.198540821	3.144933042	2.927533253	0.202088805	0	0.32463821	41.53400483	46.61516099	59.64872915
Zm00001d020735	0	0	0	0	0	0	0.020246942	0	0.021369357	0	0	0	0.116338781	0	0
Zm00001d020736	0	0.181948767	0	0	0.017304377	0.209163033	0	0.269197633	0.210552833	0	0	0	0.822976739	0.259139251	0.835081329
Zm00001d020737	3.446650746	2.23410683	2.957233344	4.550309052	20.6171246	12.54418124	15.09858007	13.09361852	16.48693261	0.735897429	2.218632362	0.543152601	3.098440455	4.410697668	5.08520325
Zm00001d020738	1.7191372	2.062152061	1.136101331	6.176857953	6.705756897	7.873095046	7.126499118	6.284470417	6.865321938	5.569906291	5.333690639	3.763421912	5.969793364	6.745594712	7.019547276
Zm00001d020739	0.07752016	0.125533194	0.068815916	0.04833989	0.014592026	0	0.064701648	0.040059286	0.013657694	0.015273297	0.013965058	0.049070466	0.006196253	0.024280092	0
Zm00001d020740	25.40123523	29.63466187	22.46598503	36.95061993	28.02760124	35.70786781	26.80169019	24.56888863	28.52518694	10.00657065	13.5071648	6.512232693	31.49067037	29.94358833	29.74930791
Zm00001d020741	11.40468724	9.636581295	11.7742222	6.835024244	15.78582673	11.22485697	22.26668062	24.36509442	22.21434679	20.01264161	16.68032512	6.057749006	5.676567142	6.809830974	6.211406848
Zm00001d020742	0.173452795	0.039720807	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020743	0.133609159	0.15199595	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020744	0.446470477	0.23268878	0.172202531	0.65282182	0.852006718	0.471540882	0.647628525	0.798230898	0.360752294	0	0.194142619	0.170544736	1.412703918	0.489436615	0.605177489
Zm00001d020745	0.004386023	0.011048425	0	0	0.005779229	0.005373478	0.005125068	0	0.010818366	0.024196196	0.005530916	0.004858637	0.004908101	0.009616225	0
Zm00001d020746	0	0	0	0	0	0	0	0.059726073	0	0	0	0	0	0	0
Zm00001d020747	0.042391423	0.053392154	0	0	0	0	0	0.025557203	0	0	0	0	0	0	0
Zm00001d020748	19.44955715	19.716452	19.20472876	28.7196346	30.43474197	31.68575195	29.65074552	28.36436903	24.42611989	1.92287784	5.860577194	1.312798297	17.47415087	16.75304672	24.61766424
Zm00001d020750	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020751	0	0	0	0	0	0	0.043826713	0.067837022	0.046256305	0.530212829	0.023648648	0.124645041	0	0	0
Zm00001d020752	0.394013568	0.222011744	0.251283785	0.943998788	4.139703047	1.422755252	5.221960352	7.113857757	6.515271533	16.06633587	26.11803527	23.46028128	0.377097358	0.221649064	0.431558009
Zm00001d020754	0	0	0	0	0	0	0	0	0	0.024313199	0	0.624912857	0	0	0
Zm00001d020755	0.18021172	0.148709284	0.154460452	0.666506641	0.360277127	0.228397256	0.668038636	0.412109906	0.55945949	0.282823282	0.399651406	0.364841701	1.467269998	1.260260927	1.695532567
Zm00001d020757	6.08222907	5.438787476	2.991633223	0.893758905	0.920062555	0.36019639	0.536788876	0.354503145	0.249280448	0.050685176	0.880530718	0.468172806	1.830068451	1.812929843	1.295906635
Zm00001d020760	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020761	0.495749068	0.216137695	0.189574893	0.285358492	0.376858919	0.070080051	0.133680644	0.459815794	0.540850389	0.36815676	0.288533298	0.168974868	0.234705784	0.041804426	0.198399315
Zm00001d020762	2.066702029	2.576988664	3.056519004	4.136889292	6.004618777	5.570384081	3.912204967	4.44817041	3.835969253	0.570064565	0.71669883	0.721160596	2.139252988	2.061688117	2.437177371
Zm00001d020763	0.051687085	0	0	0	0	0	0.01509909	0	0	0	0	0	0	0	0
Zm00001d020764	20.73693136	30.14721896	19.49958392	48.76237511	33.49481972	54.68473434	64.75793023	46.64314502	49.69339655	66.00233529	28.63951445	27.54269703	29.00246238	26.50775074	28.30802064
Zm00001d020765	14.83399351	13.2248788	13.69542709	13.51269907	15.29784964	14.47202719	14.22501589	13.25549387	14.34005049	11.14041881	14.26287766	10.08974303	9.877027606	9.975163634	8.819480188
Zm00001d020768	0.109151568	0.068738402	0.152610627	0.374355027	0.197756906	0	0.255087217	0.50999629	0	0	0	0	0.183216165	0.508537074	0.110419845
Zm00001d020769	0	0.04555283	0	0.090212539	0.052421275	0.039878886	0.004226147	0.021804757	0.044604294	0.01995226	0	0	0	0.051542203	0
Zm00001d020770	5.570899815	8.345073711	5.523552056	9.195597242	11.52347064	10.66424143	13.0431253	13.96543231	13.79144712	25.81777578	18.77660157	30.84460589	13.24728352	12.80901702	14.51530007
Zm00001d020771	4.52646939	5.490204882	4.491009359	13.00824893	19.45866583	14.0557711	18.73303677	20.4312726	20.10460553	21.63357861	27.01434331	28.82875811	17.0333122	19.10813251	18.84707263
Zm00001d020772	0	0	0	0	0	0.079317121	0.012608395	0	0.026614717	0	0.20410258	0.215152885	0.012074625	0.047314559	0.149699878
Zm00001d020773	0.737699306	0.314707018	0.87245286	0.652922084	4.123276079	1.268211049	4.254395219	6.499070052	5.66416299	8.122861893	19.58052505	9.344960934	2.995799558	2.621726916	3.796696372
Zm00001d020774	0	0.083790607	0.02066989	0.269649889	0.306805339	0.590906122	0.310945731	0.2005401	0.041022927	0.160564718	0.020973071	0	5.341464449	3.664676675	4.384093859
Zm00001d020775	38.76302264	42.64138744	48.96126539	32.96117995	12.8378225	22.6149854	13.61000301	11.89180025	13.47361314	14.45815673	17.65392246	11.31529318	55.32864148	57.8991208	47.60379294
Zm00001d020776	4.454142445	4.739831249	4.768049874	4.073241198	4.141393846	4.225757304	4.158839634	4.228386474	4.20542327	2.609510376	3.339728743	2.029299533	2.811372082	2.742623217	3.064947861
Zm00001d020779	0	0.058172195	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020780	28.07915609	17.89702241	42.83756566	32.12145995	154.1538089	39.74664517	149.7496114	188.8445599	182.7565021	523.1888794	493.5960813	400.3920994	12.42908083	9.970550529	22.84881641
Zm00001d020781	0.234397495	0.088567354	0.131089454	0.065774337	1.011493862	0.574338007	0.677886351	1.151717353	0.751600511	27.84186905	18.32613123	31.43122663	0.459022067	0.488214054	0.968808884
Zm00001d020782	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020783	1.30441131	1.132134094	1.345742595	5.949310043	13.03938775	6.863558734	9.863362629	11.56932396	10.15750254	8.130088237	11.98882326	6.418990919	3.663230719	3.244867212	4.355057087
Zm00001d020784	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020785	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020786	0.041585502	0.026188547	0	0.064829543	0	0.012736983	0	0	0	0	0.026220326	0.011516633	0	0	0.024039258
Zm00001d020787	1.598974728	1.275479238	1.639448661	1.811372824	4.442013306	1.828365301	2.584622742	1.99226621	2.481407283	5.513124411	2.957325698	4.147727755	0.447326016	0.803390613	0.831884846
Zm00001d020788	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020789	0.913699844	0.546633959	0.922633445	0.626739745	8.261994257	1.721088766	6.192417998	7.57428398	6.577959514	17.43722492	10.7875176	12.41155341	0.345080069	0.187805598	0.805475803
Zm00001d020790	0	0	0.04410292	0	0.058448593	0.043476008	0.124398471	0.064183243	0	0.318122662	0.078312169	0	0	0	0
Zm00001d020791	5.891470971	3.741875554	6.226775878	1.287397726	8.675181271	3.42385574	5.707400309	8.014513082	7.436595409	1.979242123	3.397174052	1.129552646	2.761064227	1.807810458	2.619747857
Zm00001d020792	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020793	9.145072351	1.448542907	3.158370443	4.441835303	3.373015161	3.408914274	2.449330495	0.693373518	1.71578253	0.793082022	0.093567786	0	9.61089353	13.88879731	8.921598128
Zm00001d020794	1.19300862	0.527940109	0.761373456	0.764040632	2.03930449	0.237016021	1.507060089	1.49681428	1.25260218	1.200664878	1.951682783	0.785792914	0.360814852	0.494850033	0.782835032
Zm00001d020797	0	0	0	0	0	0	0	0	0.016290264	0	0	0.014632244	0	0	0.061085264
Zm00001d020799	5.867342058	5.721086856	7.559632182	4.907110365	3.664092876	5.053719008	4.208871797	4.964564962	5.331584033	3.527500028	5.366692969	3.370150136	6.481816266	6.737669136	6.449945254
Zm00001d020803	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020804	42.18319551	46.96760661	42.48122392	130.0871652	142.550365	144.6845713	114.5483165	114.6410772	102.8421903	7.452120414	9.492659598	0.926537138	106.8827753	93.26436151	99.93517777
Zm00001d020805	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.062971363
Zm00001d020806	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020807	11.39200047	11.49855612	9.186654273	7.805350554	12.92978716	10.28124112	9.55763637	10.99294695	10.05664365	5.545554555	8.533233794	5.151209914	7.600315783	6.805992436	7.510289855
Zm00001d020808	40.10028306	37.48815692	30.09772243	23.38309013	30.43747856	37.08368289	25.70719915	16.15833124	18.23149036	3.978173641	3.963274363	1.065098726	17.51768004	11.36368332	26.18554096
Zm00001d020810	11.52741575	10.45328001	11.34949869	9.875409847	10.61168242	11.16498407	6.949701658	5.499145033	6.178043071	0.454873646	0.879550141	0.242573497	2.438329265	2.34716517	3.716256783
Zm00001d020811	1.447191368	1.359227511	2.255942947	0.558208545	3.977595778	1.529295077	4.550126348	6.782048792	4.691969295	0.823057933	1.574101859	0.760248602	3.483773059	4.737578953	5.318434399
Zm00001d020814	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020817	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020820	0.091753248	0.07704237	0	0.228861341	0.08059891	0.074940189	0.142951561	0.258144907	0	0	0	0	0.068449887	0.167638554	0.035359759
Zm00001d020821	2.520468802	2.813634736	2.731811585	2.355801189	2.861550261	2.009341555	2.797579002	2.820895714	2.864318964	2.274962052	3.123715121	1.64349437	0.778428689	0.698506302	0.858727241
Zm00001d020822	1.444927162	1.306588488	1.657624366	0.36965138	0.683452544	0.817030836	0.346337928	0.268038963	0.091384406	0	0.467205002	0	0	0	0.042834179
Zm00001d020823	1.906532622	2.957680172	2.860670622	0.289968876	0.551444582	0.626668209	0.489025621	0.028034687	0.22939351	0	0	0	0.468322951	1.682201568	1.102105944
Zm00001d020824	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020825	0.47518249	0.598494104	0.45502025	3.808357034	3.387220848	3.025341816	1.165116313	1.155316659	1.152849436	0.042974098	0.373284817	0.017258544	1.830595696	2.433767925	2.440669556
Zm00001d020826	1.36774228	1.465444231	1.138350459	1.404767279	1.940831963	2.191262647	2.422621266	2.873016092	1.709703373	10.85713641	11.22269138	14.51364265	2.763296219	2.150675909	2.940782599
Zm00001d020827	77.57932355	78.23335623	76.73582233	116.7543818	86.81880388	119.4355103	79.50333028	70.37323847	89.43200097	11.77186836	16.26356553	14.74485513	34.77823672	36.77928544	49.93035462
Zm00001d020828	21.99005079	20.6663735	23.11725722	16.09400208	13.76530531	16.0907543	12.29928484	11.55981245	12.10627857	2.272863554	4.210574892	1.357278669	8.419013224	7.744795747	7.803498411
Zm00001d020830	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020832	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020834	7.144495526	8.045155343	6.105588018	5.59101838	4.874261893	4.932902106	4.242647355	3.356351437	2.999282247	12.60135408	8.596839062	12.29347617	8.085088176	7.149486403	7.111062797
Zm00001d020835	1.378428303	1.431947773	1.588582645	2.055569251	2.320710114	1.809951321	2.091049414	2.179434833	1.888519471	10.86078256	2.638953148	2.695305539	2.486984689	2.339148544	2.688265349
Zm00001d020837	0.839461732	1.122038127	0.702620855	2.3930063	1.331851533	1.951966527	1.561450228	1.693885326	1.584626221	0.661574929	0.237642244	0.512403581	1.610373657	1.446103103	1.604349345
Zm00001d020838	0.088605024	0.091904528	0.058298074	1.092042905	1.112559941	0.785414889	1.248509941	1.420310159	1.105601508	0.050318032	0.170886954	0.034642103	1.25981195	1.06845132	1.422101277
Zm00001d020839	0	0.062728487	0.139267621	0.062113551	0.016406062	0.015254219	0.014549032	0	0	0.068688107	0	0.027585378	0.027866211	0.040947778	0.014395093
Zm00001d020840	1.507732118	1.280220796	0.484244045	1.880378092	3.102758401	2.096235868	5.206173627	6.945098781	5.244072084	2.219596185	4.443484303	1.651430956	0.872036293	0.891413335	1.351426311
Zm00001d020843	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020845	0	0	0.05385309	0.013510436	0.014274054	0	0.050633398	0	0.200401224	0	0.081964491	0	0.012122464	0.011875505	0
Zm00001d020846	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020847	0	0.499100571	0	1.482623468	0.261070382	0.323654727	0.308692501	0.477808586	0.651610551	0.364345613	0.916128069	0.731612199	1.404214711	3.330419266	0.916278961
Zm00001d020848	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020850	0	0.171333032	0	0.763440443	0.089621176	0	0.397384004	0.328047686	0.083882701	1.031859405	0.257311412	0.678106232	0	0.372808127	0.629087048
Zm00001d020851	0.005083188	0	0	0.012679063	0.003348923	0.021796603	0.044547788	0.030645838	0.028210412	0.010515831	0.003205032	0.005630925	0.011376501	0.027861846	0.047014871
Zm00001d020852	196.0444592	246.1943225	249.3772775	26.92736128	28.04765767	29.17181617	258.5074056	349.3693366	223.4130177	127.2962567	232.85059	131.8713598	203.8626686	243.9451549	317.6722195
Zm00001d020853	23.5341677	23.69890001	22.68421849	19.29942669	21.56782681	16.96614091	16.76511157	16.7853481	16.91007088	1.254771531	4.690705204	0.936489466	7.063641343	7.767055533	9.690135668
Zm00001d020855	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020856	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020857	0	0	0	0	0	0	0	0	0	0	0.068141757	0.08978877	0	0	0
Zm00001d020858	0.023490093	0.047337374	0.023354845	0.099605803	0.099045258	0.138137172	0.164689041	0.05664741	0.133261075	0.077752105	0.011848704	0.041634014	0.184003176	0.345058903	0.184672718
Zm00001d020860	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020861	12.43600758	14.92486502	9.132799486	46.92060534	40.27600343	47.93894022	50.175177	38.3710295	35.96718106	18.85488549	24.15693123	6.586526484	52.22123642	40.16393832	49.13598545
Zm00001d020862	0	0	0	0.021544314	0	0	0	0.016663529	0	0	0	0	0.069591583	0.166647211	0.255641135
Zm00001d020863	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020864	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020866	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020867	10.73311786	12.66019942	9.05084054	7.573321074	7.304661837	12.02758651	5.821770722	5.461935113	6.574758249	0.323269568	1.017344481	0.265690746	4.648123966	2.910133103	3.724575332
Zm00001d020868	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020869	0.473936109	0.734676041	0.407775594	0.227335598	0.192147801	0.044664352	1.576183912	2.857295346	0.539533536	15.9386632	15.58483758	14.6193676	0.122388398	0.239790187	1.601655623
Zm00001d020870	0.237198065	0.135796291	0.080397396	1.03089881	1.629013296	1.734794443	0.226772133	0.27734	0.49641624	0	0.163153293	0.095548092	0.265432251	0.433374747	0.324093938
Zm00001d020871	0	0	0.031118406	0.031227417	0.197954465	0.030676066	0.029257943	0.211338413	0.185279374	0.276262058	0.094724531	0.443791136	0.308212541	0.494073188	0.69476097
Zm00001d020872	202.8685401	199.0407342	190.4775524	324.8677963	384.3646203	303.5379119	375.2556526	424.9311027	450.1280744	725.588007	734.9070242	907.9080335	197.5916138	160.6640191	212.0764516
Zm00001d020874	17.14005447	17.04763668	18.68126167	27.65350937	30.05296761	29.47069518	30.51909148	31.98464939	33.49715879	32.70681628	38.25362986	47.96973715	16.18652527	13.69448519	17.24746989
Zm00001d020875	0	0	0	0	0	0.058563399	0.055856073	0.072047186	0.103166924	0.115370803	0.165767929	0.026476176	0	0	0
Zm00001d020876	9.51759947	13.09611781	10.92256056	11.44110997	4.766241665	9.301328912	13.37129209	12.17258232	10.38086406	3.528177767	6.070374852	7.038933704	10.94292643	10.71999642	9.731546264
Zm00001d020877	398.6827405	440.1913262	460.9884724	979.5460844	475.4100116	1037.486512	636.5583947	387.8912089	479.0000604	86.42671833	68.10212451	72.9058279	1063.968653	1073.40133	921.333601
Zm00001d020878	0.636271264	0.952999582	0.491553389	0	0.135953633	0	0	0	0.021208079	0.023716837	0.108426821	0.03809905	0	0	0.079526098
Zm00001d020879	13.60108906	11.47636822	16.94706164	18.4936168	21.09164707	19.0178704	15.55681915	16.77196394	17.67359886	4.188899649	7.217921753	2.750696701	5.43180935	5.159672127	5.23075874
Zm00001d020881	1.752597814	1.773260375	0.917108936	7.998321882	6.064323793	7.755990165	6.160750329	6.503609448	5.58621259	1.801123649	1.952953409	0.414103936	11.69122125	11.85752257	12.30900066
Zm00001d020882	0.516066446	0.239469115	0.438831351	1.400146401	1.431564741	1.974401007	1.174309206	1.83402554	1.976354219	0.012486679	0.639359216	0.100293858	7.507434014	7.830896427	6.416531654
Zm00001d020883	4.030628533	3.626136823	5.765780062	14.77271037	17.75372844	16.48711202	14.78297186	14.65940892	16.65752982	9.279961689	20.16504016	14.77988701	19.66167404	18.75615183	17.25134963
Zm00001d020886	0.329625893	0.062274755	0.081932006	0.215824935	1.856762768	0.3937409	2.099164831	2.603322369	5.538836969	5.023423378	2.649888769	2.346054091	0.202874077	0.054202122	0.06669119
Zm00001d020887	0.092146797	0.126610071	0.15616406	0.041789632	0.220758043	0.010262949	0.156616049	0.040402932	0.216953972	0.415916592	0.200709208	0.0927964	0.074992891	0.073465131	0
Zm00001d020888	0.039626765	0.299460343	0	0.197683129	0	0	0	0.047780859	0	0	0	0	0	0	0
Zm00001d020891	0.011666534	0.012245036	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020892	0.3185404	0.1965075	0.298932021	1.589079076	1.190644807	3.177795398	2.210498123	2.853219318	2.429247821	0.098622796	0.319712182	0.144026367	3.884653145	4.126204184	4.186323025
Zm00001d020895	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020896	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020898	15.6116371	16.9669562	24.39875811	24.70475603	23.83249134	24.08614135	38.21346292	36.41379561	38.42087541	1.642903569	8.050746836	2.989699135	5.779914982	5.616256724	6.057639343
Zm00001d020899	1.322115215	0.850319492	2.132571266	3.788926641	1.48262192	3.997735242	0.690270732	0.067837022	0.312230055	0	0.248310807	0	0.598091451	0.770930386	0.650444941
Zm00001d020900	3.027912853	3.427076496	3.845577888	8.225051614	5.334200175	5.996351917	1.58972892	1.000266761	1.227700703	0.022882143	0.21968274	0.009189546	2.376473747	2.682725471	4.430998286
Zm00001d020901	6.127796633	5.658737737	5.443285459	6.390705388	7.312382127	6.440721205	10.51527916	10.54616696	11.40967857	12.09022555	13.33428515	14.31242594	7.742241266	8.393239415	8.475357663
Zm00001d020902	23.68769131	25.92028907	21.69139619	22.08565339	34.32240093	24.92270862	41.10858041	44.9584433	44.32043191	45.47798379	55.30548557	54.02502488	26.15032103	31.04283798	31.92774038
Zm00001d020903	0.068527488	0.086310625	0	0.876011235	0.338606322	1.217355468	0.920855263	0.66102842	1.246572627	0.283532113	0.194434563	0.094889552	0.996897978	2.854645086	4.159424229
Zm00001d020904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020905	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020908	5.778255731	6.388114503	8.080209408	15.45287728	13.72484292	10.90544178	10.87860045	11.30769041	9.881162931	1.120847534	2.618441928	0.579756558	10.15618008	10.98945069	12.64268192
Zm00001d020909	1.293055183	1.043573922	1.825441709	0.344447876	0.281208042	0.307605733	0.146692718	0.317880919	0.495439427	0.051941833	0.158309133	0	0.014048255	0.17890682	0.203196849
Zm00001d020910	789.7355468	514.87871	628.3147934	134.1601554	348.0031263	130.4676574	335.7772508	336.7507066	376.6382844	157.6155486	646.4518938	214.4528823	36.80815796	59.67324438	70.28458029
Zm00001d020911	6.608559754	6.472165189	5.272448133	3.114934883	4.109804635	3.718775841	3.923889145	2.939525201	2.328624854	2.488713032	3.37563782	2.396093903	2.594334485	1.95196339	2.998130436
Zm00001d020913	6.659756569	7.241982787	6.604307372	4.386509031	3.536277166	4.487043788	3.037720672	2.590668534	4.101948547	1.24433808	2.62261922	2.557942114	1.736915883	2.631925293	2.90834014
Zm00001d020915	45.72002144	47.32921682	35.4435565	2.129648028	6.379621625	2.015508665	4.854501098	6.591247539	2.773687256	6.404629799	11.43634581	7.404940712	0.943779535	0.66202546	2.214980518
Zm00001d020916	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020917	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020918	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020919	0	0	0	0	0	0	0	0	0	1.175805776	0	0	0	0	0
Zm00001d020920	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020921	74.96359208	88.75448015	53.23228982	2.693026335	0.55648186	0.751082159	2.507261404	0.123201766	1.722165777	23.8903706	15.25560513	25.41417371	0.121961533	0.052271154	0.007875342
Zm00001d020922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020923	0.517374678	0.750367946	0.428663182	0.527929572	0.495794211	0.528212309	0.714470919	0.311918048	0.560725077	0.367583777	0.504147416	0.164990297	1.070196714	1.039801199	1.613207883
Zm00001d020925	121.6693318	124.8082464	146.4143237	57.90678446	43.22712803	56.3716539	21.35411878	15.27890466	20.04325795	4.521324581	5.482746048	1.80290149	22.79171697	18.32580193	16.77351485
Zm00001d020926	642.2979107	643.5764919	670.8198608	312.0319708	357.1283631	302.4375811	260.7599909	283.283679	271.7886479	131.2943855	136.832665	82.30904899	209.6087883	208.445662	183.5979999
Zm00001d020927	0.186003183	0.195226414	0.372432988	0.012887506	0.013615916	0.126599638	0.07244824	0.498394444	0.063720419	0	0	0	0.023127059	0.011327957	0
Zm00001d020929	0	0.03145975	0.024144244	0	0.003656893	0.02380104	0.019457779	0.013385624	0.027381929	0.007655252	0.00349977	0	0.105592913	0.045636074	0.14759792
Zm00001d020930	35.67092069	34.19054043	42.23250586	81.28227541	106.944331	83.45688254	82.53665756	99.66428062	89.92225597	54.18070542	67.67142246	22.58600384	92.23091197	80.70524619	98.78632543
Zm00001d020931	2.799737725	2.990120489	3.286215492	9.321440183	10.33369722	7.331506342	8.934429766	8.785097389	11.46912606	6.762920004	8.888337367	4.652133593	4.653690581	4.783239887	5.90588427
Zm00001d020932	11.93082914	12.98365861	10.13958131	7.287572613	5.89393456	5.40294585	6.432264416	5.868293126	4.341364677	3.117138326	4.498651299	1.858151697	11.69422553	9.927949138	14.83160591
Zm00001d020933	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020935	0	0	0	0	0	0	0	0	0	0	0.006370977	0	0	0	0
Zm00001d020936	26.39463846	19.99100126	23.73899243	16.3288936	42.24048215	19.28807226	24.7694446	29.56924893	26.71713326	10.95621724	18.6579498	6.006140686	5.94144617	4.869417359	6.064157039
Zm00001d020937	0.789631614	0.534381819	0.505325359	0.926000606	3.315481316	1.270623817	1.439112466	2.088970901	1.475287012	0.089398164	0.63163297	0.091388455	0.329710124	0.264854463	1.314880056
Zm00001d020938	0	0	0	0	0.060247011	0	0.013356887	0.11026352	0.014097344	0.567538359	0.014414602	0.006331259	0.01279143	0	0.006607781
Zm00001d020939	10.4663381	10.53838583	9.163809459	10.87297719	15.71044519	12.33761209	16.25417836	13.79104405	13.33171152	14.79541834	19.82113392	21.127641	8.919974086	9.491694909	9.01708623
Zm00001d020940	0	0	0	0	0	0	0	0	0	0	0	0	0.030354265	0	0.031360738
Zm00001d020941	0.060187822	0.021659081	0	0.064340264	0	0.147476635	0	0	0.01060404	0	0	0	0.105839023	0.01885143	0.12922991
Zm00001d020942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020943	10.20219685	10.4492355	10.04699783	8.279701811	8.864757526	8.622281711	7.852864535	8.287022376	7.30640694	2.298400287	5.236674611	2.282001217	6.82235366	6.552165879	7.136620809
Zm00001d020944	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020946	9.004633697	9.853976746	8.430226603	6.057531621	5.170121078	5.842652676	5.672708557	5.655566103	5.244290399	6.738109547	5.995821938	6.870618321	4.23627553	4.069062411	4.778629354
Zm00001d020947	12.91255281	14.13854067	13.08881745	14.42946104	18.38215715	17.35452245	14.89001779	16.68300341	14.56435225	17.86361002	21.7968788	20.12614675	10.91955632	11.05823221	10.92961229
Zm00001d020948	10.68728423	9.796728886	9.790958901	15.69549885	12.94694514	15.23482704	10.88331357	13.75957822	13.08799958	6.009456652	7.242317541	5.864122325	15.25663591	16.7935251	16.98944366
Zm00001d020949	0	0.445798569	0	0	0	0	0.051698501	0	0.163693427	1.037323797	0.055792442	0.588130971	0	0.388010012	0
Zm00001d020950	10.07879289	11.64689436	12.13322556	14.47812479	20.05192037	16.07672172	33.75704596	34.2723031	30.04929402	49.52274667	47.12649113	50.59178458	18.35081514	14.4946167	17.03643491
Zm00001d020951	0.010404288	0.052416955	0	0	0.630622063	0.038240028	0.571398277	1.216884653	1.526933285	10.23099951	6.888073748	6.362019504	0.069856392	0.011405545	0
Zm00001d020953	0.111083735	0.159897571	0.502915344	0.336451408	3.06329652	0.592975659	4.301987431	6.056078242	7.241272789	85.60752708	45.33594104	78.98278086	0.097669209	0.078283215	1.568655754
Zm00001d020954	39.30479752	40.95484116	40.96241139	123.2387858	124.5958396	122.4004865	246.9258651	244.7093356	195.8463023	42.2052645	34.67926463	19.631594	55.03228311	48.77676551	59.6559643
Zm00001d020955	1.97254814	1.238774799	0.903180023	3.277830422	7.199782706	3.561366225	5.631417341	5.191728307	4.919308068	2.923939076	1.729498805	1.186369709	4.121192058	3.959365351	4.845346865
Zm00001d020956	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020957	109.7105316	120.7586105	108.7624413	128.865743	75.92988098	113.454777	87.18594618	75.53636775	78.93994766	27.11394352	66.37065243	30.26888356	104.5618256	103.4046045	113.8951271
Zm00001d020958	0	0	0	0	0	0	0	0	0	0.014165955	0	0	0.045976107	0	0
Zm00001d020960	0	0	0	0.003414815	0	0	0	0	0	0	0	0	0	0	0.006331188
Zm00001d020961	4.904584786	4.297281869	4.897940051	8.855056457	35.05989716	12.39493834	28.16591702	30.21663156	21.3604319	9.291286724	12.88757063	5.301842717	1.095909976	0.432896785	1.999695461
Zm00001d020962	0	0	0.011137758	0.02235355	0	0.021958875	0	0.021611794	0.011052391	0	0.005650562	0.009927481	0	0	0
Zm00001d020963	8.563548175	10.11126304	6.095614552	4.90060553	6.210137687	5.711972073	7.246317791	6.682128449	6.361767852	5.971361671	9.064258697	5.064777777	4.674732108	3.306385313	6.335360549
Zm00001d020964	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020965	2.890582514	3.476611514	2.290381414	4.06536709	5.239289165	3.67104266	4.506699087	4.267550661	3.913010618	19.73455554	13.11557694	26.19672776	3.590011078	4.284517937	4.433911545
Zm00001d020966	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020967	0.484795529	0.219816635	2.241319755	0.77390842	0.3321704	0.45139505	1.223604532	0.187056978	0.095661974	0	0.17117596	0.107406897	0	0	1.188238354
Zm00001d020968	1.519025991	0.981783361	2.583373647	1.719973278	0.184352331	2.620112776	0.49045552	0.120499972	0.246497412	0.441049953	1.890336029	0.199268059	0	0.372481102	1.848632991
Zm00001d020969	0.651315208	0.474506872	0.38488861	0.593291759	0.689928173	0.747100476	0.843137121	0.623650675	0.531564013	0.136501973	0.406638562	0.297087177	0.603796102	0.717494576	0.64965505
Zm00001d020970	1.859123471	2.833173829	1.953094976	2.331428189	0.581965306	1.270970958	1.33223659	0.71832831	1.064068769	0.014165955	0.012952565	0.011378191	2.919482821	2.375832527	4.310676019
Zm00001d020971	15.3699052	19.86110204	19.03817566	38.47774117	22.94879003	32.9717197	19.2630706	21.22242628	22.42587699	0.762098665	1.174272213	0.022671216	48.80420585	48.88686544	54.5276855
Zm00001d020972	7.903526529	7.229960698	6.524632254	6.311543223	10.33861529	8.10923932	8.38009928	7.479809795	8.712651212	6.124747944	7.775517947	6.292690837	4.49039734	4.502615268	4.679579465
Zm00001d020973	1.998167374	2.60396339	2.410998344	0.919388849	1.310961772	0.89297015	0.761014937	0.982447292	0.957007589	0.366930672	0.594116558	0.257881065	0.790823066	0.844588385	0.666452242
Zm00001d020974	9.530646729	8.638202284	11.9240584	13.3421276	21.01816859	15.1736634	13.41715792	18.5408219	15.15076036	2.226360728	3.231755802	1.454829648	6.215354766	6.848577311	11.69355943
Zm00001d020975	6.941686879	6.843056067	7.411438601	7.650528815	7.96647267	7.183356239	7.216219449	6.494283685	6.824110859	1.90174276	3.678333176	1.272910621	4.352173634	4.366868711	4.448791069
Zm00001d020976	0.073402598	0.011556356	0	0.331848944	0.132988201	0.517087301	0.343083747	0.48678754	0.656311768	0.151851427	0.10413341	0.498036412	0.051337415	0.181049638	0.095471348
Zm00001d020977	0	0.35692588	0.010672519	0.096389151	1.233360766	0.273541103	2.809644689	4.628470548	4.98822816	13.47792694	6.280855186	2.140379281	0.240241045	0.658971149	0.337561313
Zm00001d020978	1.294264018	1.308372472	1.373636285	1.711681656	1.351597381	1.45471059	1.396598864	1.151974681	1.393649226	0.487145959	0.611424313	0.421599464	1.184328572	1.178776006	0.977974262
Zm00001d020979	0	0	0	0.016505489	0	0.016214068	0.046393525	0	0	0	0	0	0	0	0
Zm00001d020980	7.849552727	9.992962027	7.560734131	4.309962598	3.985760548	2.6293446	2.369567903	3.168508792	3.522140279	5.04583771	8.172420354	5.176043264	1.484469907	1.102249393	1.680222297
Zm00001d020982	0.179884657	0.302087188	0.11923263	0.044868868	0.584660249	0.484843299	0.51848155	1.344779692	1.020499287	0.479641824	0.967852047	0.943202148	0.147617585	0.065731959	0.332753938
Zm00001d020983	39.27113429	44.55383472	43.628366	28.7462308	36.77915974	25.94853959	33.52309353	38.92838877	32.27510868	13.19623503	26.2493419	9.406006568	18.93262008	17.97384442	20.14645803
Zm00001d020984	28.29050545	30.56562414	15.72433432	23.63597757	3.350600627	3.62554124	4.783133292	7.125788906	11.13465394	2.798294735	6.75963582	2.7481687	1.507050915	3.88512941	5.306163741
Zm00001d020985	0.380804759	0.699993248	0.387992253	0.017114349	0.009040831	0.021015222	0.02004371	0.053775948	0.046540691	0.009462929	0.038935704	0	0.003839034	0.015043299	0.031730614
Zm00001d020986	0.139727512	0.277874713	0.255910809	0.93551228	0.242251968	0.819887587	0.274983745	0.079806114	0.29022783	0	0.00927373	0	0.090523963	0.016123601	0.178548711
Zm00001d020989	2.199285457	2.572150445	2.221448307	3.780689844	3.043334734	3.126157892	3.041172376	3.092104137	3.838102502	0.655822104	2.125536099	0.813657281	3.054958847	2.708809956	2.959908285
Zm00001d020992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020993	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020995	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020996	0	0	0	0	0	0	0	0	0	0.014192612	0	0	0	0	0
Zm00001d020997	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d020998	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021000	10.28673741	10.86075366	10.73566814	35.99480309	26.59188315	37.56544423	35.73096362	28.4303427	25.61538505	1.482417897	4.650426666	1.010749451	32.10806737	28.78433795	26.24471979
Zm00001d021001	0.872631952	1.119436565	1.084509559	0.584462088	0.383273539	0.494950713	0.37765572	0.272791427	0.239154936	0	0.081512362	0	0.379751235	0.283439938	0.18682993
Zm00001d021004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021005	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021006	250.5927013	242.4098078	232.0423775	48.72608959	50.65978555	57.17431444	66.6756438	67.69939305	68.52289011	54.89995932	28.42334551	46.5309438	47.61602518	44.52888176	38.48627102
Zm00001d021007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021009	0	0	0	0	0	0	0	0	0	0.713939551	0	0	0	0	0
Zm00001d021010	1.28167818	3.497603223	4.73437376	2.708490529	2.157909873	3.707490186	3.161686479	3.391321098	1.317220546	1.522139193	1.661132785	0.788769402	5.258876475	3.395466518	5.145121116
Zm00001d021011	6.458479473	6.056327278	8.475795396	15.3451529	15.67412557	14.24638825	19.0045474	16.18123492	14.51546761	16.88270781	19.18182634	12.9510496	5.978743578	4.754460608	6.049810826
Zm00001d021012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021014	0.394455025	0.270624201	0.310877476	0.407956211	0.101415095	0.451829743	0.10867236	0.077337069	0.035595545	0.07518955	0.016176275	0.035525153	0.592132467	0.580069506	0.422674777
Zm00001d021015	1.346925188	1.655010535	1.791013047	1.684072225	1.34266625	1.711336459	1.359080999	1.335389336	1.3322645	0.489838907	1.163347436	0.631015521	1.606296931	1.566109757	1.529679355
Zm00001d021016	1.491260776	0.802062858	1.031861394	0.683615302	0.541690255	0.325897029	0.08477213	0.204111038	0.019882574	0	0.010165014	0	2.54374471	2.889570726	2.89835351
Zm00001d021017	0	0	0	0	0	0.020450711	0	0	0	0	0.063149687	0	0	0	0
Zm00001d021018	30.95473216	22.94755655	39.06047157	39.93718674	50.68894192	28.18441232	31.57995732	41.33021233	33.76962253	3.163693418	10.07459782	1.796294908	19.22276791	14.23537454	20.5460315
Zm00001d021019	7.963378681	8.25196416	8.933916286	38.80779408	40.09144456	40.53816324	45.27996713	49.07391805	45.78427995	31.39306691	28.05589634	16.5381307	40.65877194	46.33151449	35.84247282
Zm00001d021020	13.27193502	14.96781095	17.5341615	28.10076678	46.9763291	24.52967474	28.79469914	37.16440373	29.33572902	3.22552283	6.210187658	1.411228037	15.21343959	11.81858798	14.04716817
Zm00001d021021	3.252218682	2.555699427	3.623742783	7.071821296	12.29245977	7.792790265	8.186028982	11.65443855	9.798148918	6.592684902	6.567146569	2.403067569	6.321779592	6.262144404	6.928464147
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Zm00001d021024	0.006485405	0.0980207	0.120901208	0.55000548	0.700728757	0.389329922	0.234924073	0.10165899	0.295937216	0.187833299	0.188100989	0.122132036	0.406413086	0.263052565	0.329912586
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Zm00001d021026	1.531477024	1.505483691	1.311436764	0.442559054	1.181236481	0.697880506	0.894765457	1.97047086	0.898301225	1.339418095	2.602465896	1.603400095	2.497509146	2.323786394	3.130932719
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Zm00001d021032	19.11006116	17.84171726	15.99210343	12.53326231	21.67851969	12.9934497	19.05136522	19.79319908	18.93367573	48.07484364	46.62245476	46.39162213	10.36041027	8.631687909	9.217675212
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Zm00001d021038	1.625768358	1.272031997	1.714371867	1.93542469	4.31683404	2.082324536	2.15876175	2.584040489	3.402463739	2.751794098	2.391837068	1.146060623	3.114839858	2.430305951	2.392231016
Zm00001d021039	0.03365641	0	0.008365657	0	0	0	0	0	0	0.176387407	0	0	0	0	0.023346842
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Zm00001d021047	0.920507022	2.633657878	0.974526046	1.303919892	2.201194414	1.642890766	1.938758266	1.740247981	2.004189932	0.658275304	0.343937448	0.088121868	3.255551733	3.014818438	3.36349783
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Zm00001d021051	20.04571799	20.28239752	21.18774479	24.97759676	27.44968584	23.62823998	24.94483468	25.38073704	24.67732545	14.95795975	20.16448446	11.65375491	23.48914235	22.05411568	23.88120216
Zm00001d021053	0.149575863	0.062797118	0.049571553	1.05708566	0.880327042	0.916254493	0.256343117	0.108212667	0.430426553	0	0.088022649	0	0.357077748	0.109313543	0.265159502
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Zm00001d021058	220.0364722	219.086891	187.0352827	57.11113816	49.11094707	47.02466366	8.441987005	8.264534693	9.366901664	127.4876403	103.3457465	149.7610171	83.08480674	73.79721716	72.68960185
Zm00001d021059	0.344559554	0.517969008	0.207203046	0.457443582	0.644398113	0.735327752	0.285728791	0.21443117	0.301568541	0	0	0.147749976	0.099502763	0.024368921	0.064251269
Zm00001d021060	19.88248255	19.44538454	20.71932141	46.15478966	34.06178765	36.89577506	29.48617591	29.84008142	31.52079079	11.94366412	18.83501219	9.575267557	80.90265096	79.07671653	82.85395437
Zm00001d021061	106.1421036	90.95563556	123.4401954	121.8598541	170.6770511	103.8045016	129.8894997	141.2525209	125.926735	6.435499836	41.45531166	5.013577556	52.36056247	45.02476141	74.54015563
Zm00001d021062	0.964636943	0.251371821	0.372058024	1.825322324	1.27105069	3.382428144	1.943410821	1.2032406	0.205114635	0	0	0	1.637800946	0.218786667	1.038338019
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Zm00001d021064	0	0	0	0	0	0	0	0.023465333	0	0	0	0	0	0.010666823	0.112496883
Zm00001d021065	5.96665016	6.595730045	5.601173692	4.49090717	5.010387518	5.368351666	4.881614352	4.575750828	4.755665325	3.424641325	3.980905821	2.22769564	3.829635096	3.527807379	3.593705264
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Zm00001d021070	5.308120564	4.388312397	5.2565042	8.662415927	12.29198292	7.222674081	4.368171028	4.766244262	4.77746806	16.10570144	14.39859817	13.70562585	7.140587035	6.988928163	9.995331796
Zm00001d021071	7.480605795	7.251559631	5.693675184	5.070887714	5.153362692	5.8412792	4.466599877	4.311714184	4.488054317	1.591589547	1.678534456	1.523543488	3.212553924	3.833371112	3.871034917
Zm00001d021072	0.315905679	0.225118789	0.245380317	0.370655867	0.668194124	0.534709296	0.585274507	0.651557163	0.525446445	4.161947967	1.921073387	5.80634045	0.569800044	0.56274871	0.795336545
Zm00001d021073	0.037739776	0.005941673	0.046903105	0.147085662	1.783980941	0.115590974	9.82854875	16.7688061	15.20230686	180.1428811	128.7338404	138.6143827	0.369530187	0.258572924	0.785381966
Zm00001d021075	0	0	0	0	0	0	0	0	0	0.040374487	0	0	0	0.004584548	0
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Zm00001d021082	0.020925358	0	0	0	0	0	0	0	0.05161354	0	0	0	0	0.007646371	0
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Zm00001d021086	0.632439503	0.982423869	0.759797753	0.013145852	0.027777728	0.129137488	0.19706815	0.063548174	0.090996886	0.276208808	0.305718493	0.175146945	0.802082793	0.785742711	0.877423646
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Zm00001d021090	7.324846007	8.318508231	7.971756148	17.10948956	15.11301664	16.84902756	16.4274044	19.49124186	18.43585019	2.099152261	2.921865717	0.233337747	12.87298445	10.99435625	12.77348431
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Zm00001d021119	9.553454161	11.36090312	14.44141498	63.09074491	63.33904323	76.809786	102.7398928	79.28710157	80.00163199	214.9145762	140.5120096	97.8646848	59.16280865	57.56403593	94.55029665
Zm00001d021120	1.112187017	1.10063145	1.552764082	6.178772605	11.96165737	6.680187407	6.16883561	6.896799688	6.279238358	0.866547827	3.132864984	0.92002263	3.652902528	3.150967198	4.993066887
Zm00001d021122	9.783886256	10.78248583	12.03278178	43.01581732	65.705493	47.96423462	65.19230584	66.88556935	58.17653941	5.280974316	13.05382717	3.354663986	47.88332023	41.8004859	52.65237503
Zm00001d021123	6.955432269	6.23752341	4.268662119	8.230059532	12.07130777	5.555442479	11.44444499	13.88393642	10.04047661	33.12527971	31.19446957	33.13384512	12.61700619	11.15428511	15.37958792
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Zm00001d021157	0	0	0	0.236807915	0.500384898	0	0	0	0	0	0	0	0	0	0
Zm00001d021158	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021159	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021160	1.608380461	1.282982057	0.866189988	0.066863411	14.55237021	2.692997716	14.78455498	12.79964883	8.661629068	11.75657566	16.36096952	15.85704887	0	0	2.541326646
Zm00001d021162	18.63140089	18.78764704	18.28654677	16.56250613	17.84211406	16.39427764	17.53170665	16.48439622	15.69948285	11.64448966	17.58685338	10.98929573	11.68459149	10.96233609	11.91296111
Zm00001d021163	0	0	0	0	0	0	0	0	0	0.029323306	0	0	0	0	0
Zm00001d021164	0	0	0	0.01953055	0	0	0	0.03776494	0.019313199	0	0	0	0.017524112	0.01716711	0
Zm00001d021166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021167	0	0	0	0.19386788	0	0	0	0	0.040360079	0.090268752	0.515854715	0.19938731	0	0	0
Zm00001d021168	0.065569467	0.06193874	0.193538576	0.102219244	0.118796415	0.140580246	2.758245228	3.192122291	1.880119111	158.6387667	115.5525695	84.35633395	0.082546132	0.089849441	21.49135598
Zm00001d021169	38.15000665	33.31190326	35.62480923	27.88074442	34.17478875	27.32002513	25.34427469	25.45648927	27.08808422	22.21999448	40.69218717	16.88267413	31.64965639	26.71198164	31.09481284
Zm00001d021170	1.736102414	1.557755678	1.685117215	3.836216813	4.484602196	3.7712906	3.495248292	3.41894497	3.734206601	3.379917485	5.490531507	4.112753869	3.416479613	3.434756409	3.39736252
Zm00001d021171	0	0	0.051022972	0.153605134	0.324573988	0.050297694	0	0.198010765	0	0	0	0.409307365	0.413474317	0.090011332	0.142394703
Zm00001d021172	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021173	0	0.081398766	0.086497853	0.06820068	0.045853452	0.036543561	0.023236126	0.029971629	0.006131063	0.020568966	0.031345208	0.011014089	0.05563109	0.032698662	0
Zm00001d021174	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021176	0.13459724	0	0.04779367	0.023980548	1.963535676	0.32980007	0.634724534	0.562231517	0.29049252	0.059667359	0.054556533	0.026625127	0	0	0.005557599
Zm00001d021177	107.8212714	156.3726258	102.5453375	195.33761	31.14962413	132.6294109	19.98975172	9.36547113	11.697851	8.009154897	0	0	232.0776458	226.0765227	181.3891778
Zm00001d021178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021179	0	0	0	0	0	0	0	0	0	0.035408236	0	0	0	0	0
Zm00001d021180	39.44818564	43.80534317	32.48556143	32.0130425	34.07022346	32.76102599	36.18509318	36.30195097	34.44558907	24.30127607	39.65524559	25.79438689	32.12274578	26.93825886	27.5895124
Zm00001d021181	2.348444679	2.553753602	2.046661048	2.159897104	2.210664116	2.555112905	1.479360696	1.197932936	1.263399433	0.642446968	1.321081097	0.672321924	2.846443018	2.9812738	2.84249865
Zm00001d021182	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021183	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021184	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021185	0.032192859	0.013515675	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021186	0	0	0	0	0	0	0	0	0	0.359568734	0	0	0	0	0
Zm00001d021187	87.73704986	86.66434756	95.42089941	74.31529948	75.3965167	78.43416547	114.5588502	111.0398337	105.055087	191.3122817	201.9590881	258.200748	60.26160256	59.56850102	66.7595681
Zm00001d021188	8.288858361	9.129217538	8.591072712	8.931793488	8.162832844	8.652554597	8.859288917	7.171997616	8.220660154	4.413155226	5.552317047	5.854795241	6.05139485	5.916546131	5.964089038
Zm00001d021189	6.325870463	5.178320965	5.639317126	8.504241215	10.29520518	10.20714226	9.129873195	9.632691193	9.275293823	8.297993612	9.188974275	9.432833492	5.657471024	5.496413215	5.275044859
Zm00001d021191	0	0.028714235	0	0.04738791	0.040053044	0.111722949	0.062158899	0.018326177	0	0.10480759	0.009583026	0.050509302	0.085039187	0.074976087	0.008785888
Zm00001d021192	0.229411632	0.524381303	0.380151269	1.38817418	2.37348511	0.811952956	2.303394762	3.268192912	2.902633418	3.175683012	4.660870785	1.94834376	0.741632617	0.59612228	0.766223332
Zm00001d021193	0	0.105962891	0	0.146893771	0.0443418	0.010307158	0.029492007	0.010144244	0.124507739	0.301678168	0.137918917	0.055917683	0.056486953	0.036890798	0.019453307
Zm00001d021195	2.515830621	3.647568732	4.33311837	16.55581585	16.08456166	17.23475786	16.3245819	16.13324932	19.98309305	25.39273335	31.60301803	30.38731787	13.54238486	13.13347882	14.7770314
Zm00001d021196	16.62717639	16.97570417	17.89862674	16.82499872	23.01524642	15.2727805	19.47301224	20.21059881	18.24301911	2.600074811	4.918867996	2.237236849	7.325073419	7.585500393	7.902906034
Zm00001d021197	0.302795879	0.400441156	0.206973585	2.973866841	2.264200104	3.644744701	2.839381318	4.235193714	3.407560572	0.062640816	0.038183532	0	20.66066602	19.93272528	24.45262399
Zm00001d021198	0	0	0	0	0	0	0	0	0	0	0.019725246	0	0	0	0
Zm00001d021199	13.88953706	13.21495779	12.51407138	12.04742543	13.78904971	12.58692265	14.41242775	13.80280283	14.63928943	15.99466334	20.30243533	13.02839232	11.06930995	8.974183652	9.780043396
Zm00001d021200	0.019067272	0	0.011848431	0.130789309	0.60297427	0.467200339	0.100260483	0.206917107	0.176364257	0	0	0	0.085347558	0.052255532	0.209421499
Zm00001d021201	4.895202142	4.320891941	4.419410358	6.652338063	9.168369562	7.09342153	10.53446938	11.60572956	12.43974519	10.19374176	15.97508085	11.92485189	4.189723711	3.910709076	5.5475172
Zm00001d021202	4.341514949	4.551238052	3.933934674	5.164574281	4.432455105	5.634009592	4.277632688	3.684479156	3.472360974	2.109765195	2.682551543	2.825692742	5.275143086	5.468244414	4.798583332
Zm00001d021203	3.701597632	3.180640013	3.087350317	6.688754973	9.364604013	5.210169262	6.420692588	7.99423788	7.263575731	2.83617411	5.393940783	2.287146511	6.369793275	5.500602218	7.57005199
Zm00001d021204	0.074046022	0.014725459	0.150145423	0.179833605	0.37486075	0.272149524	0.154830233	0.159768949	0.297989232	0.032248949	0.009828885	0	0.117748245	0.11534947	0.049562125
Zm00001d021205	0	0	0	0	0.145861185	0.022603417	0	0	0.022753607	0	0	0	0.082583264	0	0.149312665
Zm00001d021207	0.190672719	0.072045898	0.426543509	0.095119497	0.226115351	0	0.356481717	0.114953949	0.32921328	0.105187646	0.048088883	0.084487434	0.021336889	0.020902213	0
Zm00001d021208	6.233244584	5.827620656	7.811792992	2.504175654	1.817489975	1.989360522	1.34653798	0.6736918	2.110244513	1.950505395	1.76141656	1.063780956	2.911218278	5.32101469	2.018622231
Zm00001d021214	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021215	0.740309701	0.66846488	0.953884776	2.196189512	2.359768558	2.304131058	2.700106822	4.171146248	1.728671679	0.833323627	1.40376361	0.578881052	5.86601768	4.532168205	5.431182885
Zm00001d021216	0	0	0	0	0	0	0	0	0.008708896	0	0	0.031290026	0.276575021	0.139340889	0.008164159
Zm00001d021217	0.035009562	0.198426027	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021218	0.015823187	0.019929363	0	0	0	0	0	0	0	0.240050625	0	0	0	0	0
Zm00001d021219	0	0	0	0	0	0	0	0	0	0.367388165	0	0	0.04258469	0.083434303	0
Zm00001d021220	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021221	0.840280719	0.91050552	0.755876711	0.459107014	1.493831988	0.500022872	1.430721982	1.772273623	1.05932804	2.711424508	1.947684213	3.141164485	1.641795582	1.643440063	2.988455004
Zm00001d021223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021224	109.5890343	118.0770145	104.9776077	31.98909707	30.48115767	28.34112408	43.14707204	39.91246847	45.04501069	101.0179934	124.3385921	115.4873515	36.5845916	35.1019563	35.90164831
Zm00001d021225	6.096692416	7.229121168	5.790862777	8.719541426	8.831255847	7.546799041	10.61468505	11.85786651	8.85102536	4.282084737	6.987131893	2.393061178	17.82217828	19.44579514	20.54494316
Zm00001d021226	0	0	0.142379747	0.166691605	0.176113121	0.397674925	0.490846945	0.96696179	0.329673075	0.158001834	0.337092324	0.507632598	0.192300206	0.293039684	0.57395407
Zm00001d021227	18.5886481	18.49910798	18.96206163	23.34415181	28.10068693	24.1987891	29.47827669	33.37966266	29.40249098	75.69503232	54.97938764	73.50910509	20.40683215	20.04906674	21.5249757
Zm00001d021229	0	0	0	0	0	0	0	0.019981086	0	0	0	0	0	0	0
Zm00001d021230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021231	4.296491925	5.235335282	3.428145976	5.176085977	7.3445616	5.045763656	22.86681681	21.62666952	22.51191764	20.66060674	16.83110907	34.92851327	8.356948373	8.876473108	11.00013978
Zm00001d021232	0.072452524	0.168469333	0.076191255	0.952251641	0.866545066	1.126623238	0.755434605	0.994574252	0.872920391	0.192161491	0.189757988	0.061738168	0.461513527	0.494878851	0.57346811
Zm00001d021233	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021236	1.828175219	2.071357053	1.520063805	5.269524796	5.49240333	6.231424799	6.837725745	5.524938549	5.239582936	0.991423901	0.981501653	0.232020839	8.735827819	7.514703355	9.127131501
Zm00001d021237	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021240	5.153934204	5.089500782	5.449036701	5.975103783	5.541253505	5.282646631	4.800933299	4.189662474	4.858189139	2.576278158	4.509826522	2.573203118	3.492943216	2.440342613	3.289846901
Zm00001d021241	5.734672474	5.931950433	0.776862058	2.118687869	1.095721317	1.561535181	1.881973102	2.041593491	1.141313818	0.396100162	0.897145225	0.43667695	3.978505179	3.786334138	3.804419684
Zm00001d021242	11.94254717	14.06036975	14.32782308	28.4675588	16.18520128	22.01399736	11.93489599	11.80182953	12.77668742	2.182667064	3.31594902	1.968903283	30.67883707	31.8154389	26.29141313
Zm00001d021243	5.818849563	5.863090045	6.074614026	6.982014013	6.634135261	8.404582434	8.359592095	8.168343291	6.254673046	2.584943978	4.757955458	7.042947433	5.099516582	4.364460732	3.427425198
Zm00001d021244	0	0.016244311	0	0.018382932	0.004855487	0	0.027988259	0.035545868	0.056807355	0.365916915	0.411247443	0.618429228	0.053606778	0.050494901	0.036212777
Zm00001d021245	38.82344125	45.54462565	66.21905591	155.2011799	86.69286251	152.1101812	152.4886006	130.9258067	153.1561984	2.961500338	4.819941197	3.488755972	31.20583759	30.94674405	30.28757705
Zm00001d021246	92.88020368	112.6609297	84.96462137	14.08293818	10.6588012	10.65038523	11.05621245	10.77995657	10.3374481	54.96186499	54.4775105	67.03462881	28.90750062	27.65652385	23.61350237
Zm00001d021247	5.906179835	6.687373616	6.347066421	4.010698541	2.53732276	3.27224261	4.399561208	4.31394078	3.958095204	0.849613557	1.453179069	2.26437837	4.150638516	3.995243784	3.488883364
Zm00001d021248	17.06800048	24.67749441	20.90582147	11.71918009	21.24589388	13.41992909	23.72340562	24.09592482	21.33132672	14.00435426	24.22981847	17.48862015	5.17352012	4.2772601	7.444162149
Zm00001d021249	8.191859325	9.984848838	7.225131335	8.229445272	18.78192866	9.664791994	20.57021358	25.59345429	14.42577408	45.68477654	37.03777615	65.27835839	10.91511082	8.094111634	17.61193386
Zm00001d021250	12.50680706	10.24809344	11.43429637	6.113678161	22.52205592	10.70817281	19.01526333	20.66182997	20.67219055	66.49767184	46.95189197	47.34407938	4.086047987	4.570133694	5.850311092
Zm00001d021251	0	0.127547924	0.041952222	0.357843072	0.433666912	0.496270582	0.266247282	0.172984405	0.437122078	0.011638818	0.053209459	0.14957405	0.169983886	0.129516305	0.087810067
Zm00001d021253	1.342446075	1.454598885	1.692931167	2.314391291	2.328144609	2.055850154	1.164952008	1.368740481	1.180838289	0.245045443	0.19916089	0.13121478	1.204001388	0.779101691	1.266747393
Zm00001d021254	2.879838626	2.539017184	2.475524745	1.257063432	1.054058299	1.597488905	1.037569866	0.723422889	0.720193609	0.16549051	0.040350766	0.00886154	0.734043932	0.885708342	0.924857348
Zm00001d021255	0	0	0	0	0	0	0	0	0	0	0	0	0	0.006622575	0
Zm00001d021256	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021257	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021258	0.007692353	0.002422137	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021259	0	0	0	0	0	0	0	0	0	1.140062843	0	0	0	0	0
Zm00001d021260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021261	3.521952229	4.067956042	3.980397569	6.922625367	5.13968754	6.747374956	5.487201611	5.551334067	5.831424494	1.156512564	1.262119093	0.215748876	5.527335147	5.568930198	5.704353228
Zm00001d021262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021263	0.016857255	0.021231775	0.062850739	0.073582731	0.177695254	0.010326222	0.246221285	0.213423132	0.291055391	0.069746802	0.170060316	0.028010553	0.075455239	0.07391806	0.097446437
Zm00001d021264	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021265	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021266	0.069751193	0	0.115582651	0.11598755	0.520808771	0.227879349	0.679202251	0.252312187	0.172045133	0.448925845	0.029319498	0.103022942	0	0	0
Zm00001d021267	2.280348787	2.45724773	1.758894375	8.202318952	8.041133644	7.791428425	7.663861411	7.589718039	7.910158736	4.118422167	5.025441065	2.826789151	6.38350924	5.598754867	5.708003088
Zm00001d021268	21.82437342	23.12782251	16.66958684	11.93383017	14.36479095	12.76124353	16.71139406	17.21952803	19.43472794	54.45541757	47.15878301	38.49623943	7.759128404	8.020193335	8.506226903
Zm00001d021269	3.075184126	2.924128715	2.597818232	2.015803374	1.831235836	1.65148923	1.627709911	2.005094617	1.781351542	1.407081006	1.734319436	1.3384144	1.233377027	0.982804416	1.231549348
Zm00001d021270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021272	0.453190075	0.348818908	1.126451918	1.350197615	1.293812886	0.647756491	0.264776303	0.880382119	0.807313072	0.312511914	0.126997161	0	0.732527244	0.358802076	0.727707738
Zm00001d021273	1.17182005	0.368977922	0.849532488	0.568338996	0.772022414	0.319031088	0.418388587	0.667225561	0.602157964	0.493818429	0.287331076	0.07211606	0.145700474	0.142732254	0.526860402
Zm00001d021275	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021278	5.63295954	7.612597136	9.197945733	9.807052604	7.530604601	8.500499392	30.1359894	31.45668994	26.38085733	2.466729379	2.035081759	1.446116774	15.36756576	12.10219272	14.97392722
Zm00001d021279	0	0	0	0	0	0	0	0	0	0.065926173	0	0.013238088	0	0	0
Zm00001d021280	0.008400144	0.047610055	0.083517787	0.277621814	0.12728685	0.493983621	0.132510168	0.065836298	0.103597069	0	0.005296425	0.009305298	0.286700932	0.285464509	0.330198224
Zm00001d021281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021282	107.5220318	116.9979995	97.50629998	42.64275212	50.28868226	42.12815247	37.37202709	41.57954414	37.83314428	58.95984008	63.17779642	49.97335117	46.22214267	38.41151245	42.59859106
Zm00001d021283	8.956419797	10.41926035	9.019038691	3.01544187	3.349721642	3.965117941	2.696106893	2.178205969	2.922246128	1.972188628	2.182206204	1.878698056	0.788505343	0.798947219	1.038279722
Zm00001d021284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021285	0.016692593	0.021024383	0.082982416	0	0.043989881	0	0	0.030191202	0	0	0	0	0.018679548	0.009149503	0.144741869
Zm00001d021286	0	0	0	0	0.0221709	0	0.039322676	0.060865463	0	0.058015032	0.021218295	0.065237297	0	0	0
Zm00001d021287	0.989008541	0.907660732	0.996804772	2.636120223	3.087068013	3.066118146	2.987794824	3.817515667	3.343079019	4.482921604	5.749156428	5.197318843	1.724207966	1.963434208	2.157873328
Zm00001d021288	26.33133135	24.04972237	27.99926146	12.5583464	50.72728369	29.48502479	85.60598748	102.6143589	103.3576908	1123.39851	530.2417518	1988.115455	11.8292576	7.621692991	20.5784717
Zm00001d021289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.0239482
Zm00001d021290	0	0	0	0	0.027047832	0	0.119931208	0	0.101263802	0.056621278	0.025885683	0.022739298	0	0	0
Zm00001d021291	7.891097284	5.821430653	9.558467191	21.744383	19.03350858	33.52406193	16.2516439	13.41221764	13.17281411	0.609861525	0.511155015	0.973858379	0.553740345	0.698272349	1.223322382
Zm00001d021292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021294	0.634816832	0.613943365	0.788952228	3.124450701	2.61395096	3.124838085	0.887490942	0.779113254	1.090475119	0	0.357376961	0.138132751	0.558156044	0.584066065	1.166432234
Zm00001d021295	3.813498817	4.532188026	4.564504393	15.28487452	7.579256568	16.27737142	16.46202603	10.95117232	13.50340404	0.75815099	0.86065369	0.711914947	24.08005994	27.04218931	24.49164003
Zm00001d021296	0.040112983	0.055115401	0.049852533	1.355281575	1.359808307	1.112439024	2.126285313	2.484311514	1.632524286	0.115674144	0.082773423	0.048474919	1.016094662	0.719562445	1.108809969
Zm00001d021297	12.56626302	12.79163494	12.95381515	22.10464119	29.86674905	23.89488338	29.36735688	34.68116667	38.50871224	43.30435864	36.24252519	43.7367178	20.81299851	23.31157993	21.00582564
Zm00001d021298	0.1305753	0	0	0	0.361309439	0	0.122061791	0.110210863	0.209346226	0	0.098795786	0.115716313	0.014611795	0.114512983	0
Zm00001d021299	92.98228908	72.40321496	82.00916238	86.47200138	173.1952171	96.63159291	127.7187291	156.3764287	156.5156248	41.1729132	98.77904696	23.18016201	16.22341394	14.01161375	24.8620494
Zm00001d021300	18.69782902	29.15049822	26.46422417	20.94243089	11.82727941	20.13279519	6.099483198	8.658470744	5.858571222	0.952266944	2.437960648	0.703677915	19.34725685	19.0439429	23.8524073
Zm00001d021301	130.5712922	138.8576539	113.3318034	83.65566483	78.90732159	75.64724978	77.69969582	82.55471591	87.09817822	138.3173578	179.4188667	185.9192388	65.18895066	63.17995622	53.73248842
Zm00001d021302	8.55770041	8.476690745	10.13324099	4.426907862	4.422424883	3.057039541	3.018381788	1.949311636	3.099023764	1.64798485	3.523314227	4.029415309	1.455131981	1.309907835	1.767487982
Zm00001d021303	1.311246414	1.370010669	0.712959145	0.427415703	0.539924849	0.228189811	0.609394325	0.754599064	0.58804745	13.88171678	3.654663391	3.548817538	0.19175294	0.106174129	0.241178604
Zm00001d021304	4.277430146	4.085226608	3.025128652	0.884192042	1.852764826	2.200404567	3.161830303	3.234190098	2.113017575	0.105926323	0.11175366	0.013089345	2.102393612	2.985719433	5.252666154
Zm00001d021305	2.674247638	2.061958129	2.162446333	4.660736094	4.359466171	4.693957407	5.919202907	4.919481256	4.947133518	2.494282657	2.669747054	1.357771329	7.903451404	10.27001076	10.50417605
Zm00001d021306	11.84363805	10.87919968	12.18149646	25.88722582	31.44016598	26.38082126	30.8282141	30.5804632	33.00311327	12.95481303	24.47571514	10.45063495	24.94154899	24.01931207	22.85291424
Zm00001d021309	20.08926503	24.56332939	17.85716978	16.89064711	15.89885577	17.34830307	19.21024696	16.00658764	16.6006036	16.55812453	18.07165405	17.43367043	14.80459547	14.98413732	15.13310093
Zm00001d021310	60.50289057	68.86378687	64.75298892	127.4212837	77.41910164	105.9641372	71.44925318	74.05244568	71.55023606	5.759743811	17.72413044	5.221830692	463.9951299	570.9961734	476.138989
Zm00001d021311	0.017239891	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021312	0	0	0	0	0	0	0	0	0	0.04834586	0	0	0	0	0
Zm00001d021313	6.178534699	6.571371511	7.276483432	9.833813909	11.77232648	8.002096128	10.09600527	11.09208297	9.954180864	1.609563395	3.648321414	1.249356413	5.618979533	5.042216544	5.12498354
Zm00001d021314	18.72735148	19.47077827	17.67592407	23.41012081	18.8064484	20.56896599	22.30854155	18.74490619	19.34971546	16.55045069	17.5896345	12.76036472	19.67383774	19.81155788	18.56439183
Zm00001d021315	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021316	0	0	0	0.029600989	0	0	0	0	0	0.098202529	0	0	0	0	0
Zm00001d021318	13.12078983	14.88443397	12.07913736	36.61373376	26.6759013	40.09056854	58.12372885	47.07737676	47.07341434	4.762524074	5.876003145	2.45893838	24.12318567	23.84355795	25.31267685
Zm00001d021320	0.100523779	0.278542157	0.199889997	0.100295117	0.768237991	0.615776917	0.563817775	1.284813235	0.02479474	0.277277728	2.078924846	0.801760898	0.24747654	0.418751246	0.90650981
Zm00001d021321	0.498950143	0.013965101	0.151579195	0	0.701269346	0.054336195	0.051824289	0.30749482	0.054697236	4.35818521	0.852904898	0.356193676	0.099260663	0.060774074	0.012818988
Zm00001d021324	8.243702851	1.818632756	4.670837798	0.319291571	13.74990232	3.262003262	8.531879209	13.63204002	7.628236321	3.163666179	5.83701782	2.053281966	0.286489696	0.213296515	0.118395596
Zm00001d021325	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021329	0	0	0	0	0	0	0	0	0	0.358166074	0	0	0	0.010167494	0.010723075
Zm00001d021330	0.019485795	0.014725459	0	0	0	0	0	0	0	0	0	0	0	0	0.004505648
Zm00001d021331	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021332	10.5448433	12.67894403	11.48559008	10.69083674	11.2635831	12.74310884	12.97824532	11.91460733	13.00471629	14.43590052	14.47334499	11.42284328	11.94049466	9.180860632	10.67773487
Zm00001d021334	3.875787247	4.404852717	4.647497774	48.63924433	35.86812146	61.11671139	94.38068119	106.3362215	81.70676747	10.00165022	3.703802579	1.643575312	47.35265397	48.67833742	53.66624563
Zm00001d021335	3.4692665	3.491461804	3.659714991	3.424111339	3.980721044	4.217787767	2.416785677	2.345764009	2.17817995	0.018314605	0.24700146	0.062519265	0.969626392	0.851610366	1.297320175
Zm00001d021336	75.19955557	69.62513747	74.11995091	20.31126749	14.73222834	11.171527	11.43060666	9.983243695	13.33722696	17.25379682	27.77020563	20.00562019	5.628594532	5.467695147	3.528655885
Zm00001d021337	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021338	1.058914267	1.691348388	1.57334446	2.567485556	3.796083095	2.609124867	3.449348177	4.130015324	3.523835702	6.420941098	3.782177128	5.393257715	1.727789478	1.977931823	2.564768293
Zm00001d021339	0	0.050868448	0	0	0	0	0	0	0	0	0	0	0.022597562	0	0
Zm00001d021340	4.283454296	6.861270682	5.972695657	45.32441449	11.30782466	26.36708356	7.533984238	10.401726	3.552469037	0.782189573	0.489341134	0.165331578	105.2693876	96.92392664	92.2120739
Zm00001d021341	0	0	0	0.041926647	0.059061824	0.054915187	0	0	0	0.061819297	0	0	0	0	0
Zm00001d021342	1.510285911	1.723878441	1.65702827	2.913636626	3.435899524	2.823645406	3.249197273	2.916543061	2.968520965	10.43093924	8.684408193	18.30308082	2.838770019	3.194845525	2.937443785
Zm00001d021343	1.066550164	0.897943769	0.850595732	1.529322706	1.683397504	1.586171462	1.172954236	1.127843546	1.083231181	0.330373463	0.4171515	0.101088844	1.097768275	1.306741477	0.56048979
Zm00001d021344	0.506786254	0.570314636	0.335415328	0.482446132	0.233125142	0.536383701	0.63773203	0.527905648	0.676783814	0.417710777	0.529410187	0.24913971	0.493285109	0.470086597	0.464570918
Zm00001d021345	0.021288125	0.016087483	0	0.11150843	0.10098082	0.067810252	0.144276011	0.0770059	0.168026638	0.041103768	0.005369002	0.014149211	0.195341183	0.065343013	0.211663008
Zm00001d021346	3.744632954	4.065202466	3.690027662	3.50951633	2.861195981	3.583282726	2.684048779	2.618267148	3.379371654	0.570434137	2.151490393	0.908171447	3.553958071	3.335817029	3.202149933
Zm00001d021347	5.593575484	5.356398604	5.629004992	5.944296789	6.144373146	6.202286972	5.425803368	5.43217744	5.991810034	6.077144471	6.123887691	6.381055835	5.375365231	5.366893134	4.663095118
Zm00001d021348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021350	3.255597753	2.802921381	3.989478128	6.580144665	7.207042437	5.431962504	5.214101652	5.600028026	5.004780015	0.918410325	1.456991053	0.529611695	4.604850735	3.400438489	4.264015912
Zm00001d021351	5.393001883	4.767127772	6.226906057	8.995834717	5.688944794	8.095836183	12.21374164	11.91128555	12.14792201	1.825586492	2.647271187	1.40045351	13.20396767	14.01194551	12.96028766
Zm00001d021352	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021353	0	0	0	0	0	0	0	0	0	0.125198443	0	0	0	0	0
Zm00001d021354	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021355	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021356	12.18634334	10.64093634	9.290767283	13.15481272	17.54158294	10.72697227	16.9919614	16.48439622	15.09228875	8.332870739	13.55944405	6.012372609	8.651988807	5.94985015	6.393362185
Zm00001d021357	0	0	0.016641185	0.016699481	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021358	0.84782846	0.567291638	0.263420926	0.198257789	0	0.324595584	0.061917973	0.063893009	0.098025715	0	0	0.058699118	0.474373636	0.116177416	0.061262837
Zm00001d021359	6.308425587	6.414910285	7.862339887	13.23895544	17.70773851	13.6401429	16.35071546	17.90657943	14.41400868	9.858763653	16.00039719	8.532319678	13.43872605	11.14710919	14.87605842
Zm00001d021360	2.378329015	2.68129942	3.493211446	12.25869879	10.25606419	7.192753825	23.00998412	21.6382768	17.33218666	28.87871147	22.12659019	18.33169179	27.45177722	26.71020561	35.74574773
Zm00001d021361	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021362	18.94468214	17.60565727	14.28606152	10.43956901	16.49088829	12.34612382	14.01227442	19.38059794	13.66429261	15.70410211	21.69216778	13.27383245	10.72111049	10.15623894	10.86780077
Zm00001d021363	2.98248996	3.610247732	4.805324196	5.546038278	7.542052193	5.699737324	7.022250337	6.750957827	6.684700691	5.344885892	4.965891757	3.719323361	2.877846066	2.829007352	3.468813099
Zm00001d021365	0	0	0	0.025310644	0.046189375	0.061029226	0.105636574	0.135701507	0.059159379	0	0.006979702	0.0081751	0.020645816	0.028315306	0.068257218
Zm00001d021366	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021367	0	0	0	0	0	0.075446541	0.023986242	0.012375673	0	0.099087236	0.025885683	0	0	0	0
Zm00001d021368	18.26973988	18.78433059	24.151998	47.16274265	32.57381624	39.94875648	20.25239659	20.13548564	20.62266614	11.87390309	14.17658286	6.420713306	55.39086482	64.65417237	72.9418633
Zm00001d021370	269.32176	290.4604234	317.2421773	480.5521834	225.3874119	407.1196184	224.0457313	176.4745159	182.0467416	14.66965609	20.96898591	7.22058984	717.5245064	678.4324294	570.9245481
Zm00001d021371	1.329657893	1.90602244	1.86248928	11.17743539	12.03182344	11.03408705	16.00058897	15.7137662	12.85595928	2.532897029	2.89029433	1.44852139	11.41842321	9.905357679	13.02854149
Zm00001d021372	1.958476654	2.524297121	2.17828843	3.602014708	3.845767544	3.286340307	3.873497253	4.373786289	4.229203092	0.945897265	2.210239049	0.43052564	2.097794447	1.779379524	1.524194809
Zm00001d021375	22.19863437	21.95338773	24.1210486	25.55943835	29.71116564	25.42512043	26.81638677	29.13364721	25.91312506	21.70935423	27.82686862	17.86417819	25.57894811	24.7353143	26.67340753
Zm00001d021376	12.9036263	14.90938084	13.18795949	15.30836672	10.97126732	12.87423544	11.03746208	10.36970077	10.44846593	6.48917816	7.802080643	6.361659991	15.33036373	15.18167337	13.6118158
Zm00001d021378	0	0.003899223	0	0.019304993	0.008158449	0.003792829	0	0.00373288	0.015272122	0	0.003903955	0.020576593	0.003464346	0.030543927	0.007158429
Zm00001d021379	1.869295514	1.093911017	2.12771797	4.43081539	6.287189072	4.462056378	3.712844457	4.352742533	3.878999277	0.542232001	0.590437192	0.249436724	2.659747864	3.028722462	2.838847815
Zm00001d021381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021382	0.02068787	0.056455638	0	0	0	0	0	0	0	0.052308636	0	0	0	0	0
Zm00001d021383	0	0.047046365	0	0	0	0	0	0	0	0.02575804	0	0	0.041799316	0	0
Zm00001d021384	13.23989716	14.87635759	11.8352859	5.459564356	5.223978027	5.573049784	5.254645405	5.621441004	5.66667159	4.691571416	4.957087936	3.602252849	3.892246825	3.672105826	3.798487841
Zm00001d021385	13.3578666	13.06002595	14.52604644	16.7001835	20.52211481	18.88646579	27.59389386	29.16209815	28.46602377	11.68835186	11.52469907	12.67298501	17.93117736	19.00150602	21.22402065
Zm00001d021386	0	0	0	0.191574943	0.60720864	0	0.987209025	0.123478623	0.599902691	0.388396517	1.452797577	0.623925459	0	0	0.029598899
Zm00001d021387	3.024147854	3.112811458	3.654739307	4.473881343	4.61682359	4.445993885	4.374497684	3.80989478	3.70389155	1.553262878	2.906186173	2.241043683	2.847327336	2.023401179	2.724724277
Zm00001d021388	27.10801452	26.2156189	27.07884805	26.88780602	36.39842464	30.24929009	30.17807422	28.47704577	31.33699807	28.37574039	34.03296438	24.75389242	24.66774542	21.80637706	20.9439057
Zm00001d021389	11.88095329	9.463600417	10.50116547	9.641465114	20.33707193	9.620781256	11.15702898	13.9659468	10.65485064	14.64620569	12.17736466	8.293346853	16.71002308	16.80077576	18.00106375
Zm00001d021390	7.934299388	9.572434695	7.868909042	7.359683936	7.268225379	7.597472945	7.451394533	7.129125791	7.277779934	7.107682598	6.663129102	5.9410608	10.25395753	10.31202105	10.64633406
Zm00001d021391	0	0	0.067781847	0	0.215591366	0	0.021243134	0.263048876	0.134524652	0.476386734	1.192118295	0.503469831	0.203438162	0	0.042036734
Zm00001d021392	39.48520553	31.51801439	35.32303827	33.6751485	64.66570122	38.0997507	62.35232493	69.82231169	75.33932154	51.52571574	82.67396406	55.0069291	16.63383464	16.1703898	16.38391326
Zm00001d021393	3.331558699	3.567018208	3.558117237	4.925604634	6.567763815	5.614586667	6.528323197	5.327160814	6.534604618	3.579232499	4.058348536	3.142956405	2.258768927	2.071633679	2.357477054
Zm00001d021394	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021395	0.119194378	0.05004192	0.107734635	1.090129752	0.599668665	0.907152467	1.017156065	1.158480686	1.05127076	0.448332812	1.115922542	0.484139782	1.422744917	1.381882023	1.741353668
Zm00001d021396	3.191113071	3.637193972	4.138697676	7.423739326	5.378761816	7.250086547	18.97634895	15.52436206	17.87352907	2.57092268	1.98814246	1.053491132	6.233266282	7.18691701	8.127555316
Zm00001d021398	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021400	19.73138173	21.80793883	15.53736789	16.70220724	18.05710689	19.04133029	20.16511531	16.7564976	15.12479122	18.0230523	16.03431583	20.24855329	18.00747662	19.61518994	16.43671633
Zm00001d021401	47.33465403	43.25741172	67.76440481	65.00038255	119.0289913	57.81381241	70.03178785	89.62407152	64.8491561	30.251794	61.99404114	18.64540455	34.7989281	23.74380565	32.36587816
Zm00001d021403	19.85050358	22.11448007	21.03338984	52.58000868	33.80023815	55.29959364	57.93590749	44.37275181	52.75298623	19.34060853	26.24335358	19.08120003	73.71966266	66.59512605	69.68623373
Zm00001d021404	6.650685439	7.505262349	6.347375335	8.055265633	6.383667858	7.742417794	7.763322565	6.540902711	6.580295347	5.513511103	5.870421489	3.846792017	8.528149474	8.502079846	7.343314826
Zm00001d021407	1.777787516	1.695944791	2.584627408	7.195374884	6.408715098	6.510616032	5.420133952	4.593443743	4.479565591	0.284178085	0.429032732	0.026541137	2.943884967	3.424973757	3.157838373
Zm00001d021408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021409	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021410	5.893464476	8.836714662	5.371237665	1.990019828	2.514544168	2.426413864	2.642172445	3.886643567	2.531535652	5.78363936	2.487393951	0.977056291	1.830442316	1.740412649	2.910865097
Zm00001d021411	0.035602172	0.056051334	0.12167783	1.376446006	1.290054815	0.921420355	0.150804125	0.246836662	0.109768379	0.012275316	0.151522247	0.029578853	0.408359726	0.400040595	0.288126783
Zm00001d021412	0.6986461	1.329920425	0.957080735	3.703114714	1.788832423	2.276014471	3.107764447	3.178176276	2.310719992	0.416077612	0.500576788	0.202276753	9.66598265	9.564801674	11.08793321
Zm00001d021413	81.29231531	70.08523792	69.76788288	14.64638983	38.54418397	17.76175011	28.32893004	33.27413758	27.37053488	208.7085935	235.4813816	208.428956	34.07636833	34.39619661	35.96259376
Zm00001d021414	11.53176069	11.29068593	10.84848999	0.66706455	3.636600104	2.123129426	0.999989793	2.347543124	0.897111709	0.97372648	2.832841598	1.422006809	0.718241772	1.055414556	1.53358427
Zm00001d021415	0	0	0	0.064401019	0	0	0.015084832	0	0	0	0.211631954	0.243110796	0	0	0
Zm00001d021416	35.76440941	41.01311562	28.07400188	41.76931914	25.07498398	37.42759654	44.89805439	50.01657943	52.53764718	6.0144698	8.772690584	1.50165719	92.28188487	95.39754124	96.94898314
Zm00001d021417	11.95124729	11.92597902	12.09840041	17.64725755	16.82227829	15.72810852	17.9639217	23.66825761	15.48272306	16.77620161	15.00382508	10.29267341	18.79082569	15.68666351	18.47086469
Zm00001d021418	22.63235367	22.50887707	22.63306703	29.79538394	39.74699146	32.60247735	39.40062397	38.42258523	35.79694285	69.06422606	66.32201635	67.15135325	79.06153506	74.20745765	78.12474771
Zm00001d021419	0	0	0	0	0	0	0	0	0	0.151444863	0	0	0	0	0
Zm00001d021420	51.73250962	54.53093922	51.59386178	29.44461988	28.15489258	28.544641	35.43466761	31.29139049	32.93089938	22.69211694	25.02683123	21.95157949	28.44679089	27.94407059	25.45591988
Zm00001d021421	11.7480348	14.57684326	13.012219	39.54271046	42.08161695	41.16253883	37.47858463	43.08643829	38.0801072	10.23563209	15.04262694	7.40644757	121.9419287	146.6022314	129.9456857
Zm00001d021422	172.2113162	194.6492228	179.5509485	146.9032753	196.4119504	188.1647671	116.9172849	108.0245579	128.1636502	274.7165924	353.8336457	219.7397239	151.2487056	109.9038358	128.2408762
Zm00001d021423	0.050261889	0.105508393	0.062465624	0.062684448	0.088303217	0	0.019577006	0.020201466	0.020662283	0	0	0	0.431209123	0	0.329287751
Zm00001d021424	0.18887889	0.056641348	0.12295865	0.246778775	0.059256106	0.220383318	0.262744029	0.151829965	0.055461918	0.01240453	0.170130243	0.009963403	0.322074731	0.12817732	0.457536665
Zm00001d021425	0.072636537	0	0.006448064	0	0.068363781	0.025425628	0.024250227	0.075071254	0.038391855	0.114488868	0.08505436	0	0	0	0
Zm00001d021426	9.409081661	8.855127778	8.217468045	6.264780584	9.690125917	8.193903891	9.816131541	9.670386929	8.99926544	24.40507098	11.22930637	16.94652123	6.057672098	5.850830507	6.181535409
Zm00001d021427	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021429	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021430	0.66593961	0.713676141	0.585634132	0.896099229	0.64399344	0.720444083	0.894190417	0.723144002	1.080642408	1.43137074	0.920801769	1.443040195	0.732133986	0.58700952	0.438987801
Zm00001d021431	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021433	0.105978558	0.144603751	0.043903488	0.165214824	0.116368581	0.119018381	0.072237635	0.138434852	0.021783492	0.121801586	0.022273727	0.097831864	0.326131874	0.242036284	0.336945606
Zm00001d021434	0	0	0.008863145	0	0.018793799	0	0.041666241	0.085990591	0	0.590137261	0.161876663	0.774203707	0	0.007817886	0.02473523
Zm00001d021435	1337.943046	1467.24709	2032.746911	14516.02807	5393.917891	11135.84221	6201.910195	4056.32782	5837.484045	0.97831953	4.879206957	2.089494793	3013.886463	2982.531839	2103.813231
Zm00001d021436	27.54142551	29.1397949	31.72058936	24.10419028	27.95705561	27.57861258	29.94036488	38.1265921	33.77342527	59.34781003	58.0098146	60.79788633	10.67081796	9.26943616	13.76847247
Zm00001d021437	0	0	0	0	0	0.020500774	0.019553044	0	0	0	0	0.018536564	0	0	0
Zm00001d021438	5.455393139	5.498048851	4.881468334	5.406222587	6.257379937	5.812327168	5.543629249	5.57660016	4.985422816	5.88489239	6.133072974	5.364279792	4.170189895	3.92623606	4.611380831
Zm00001d021439	2.297063694	0.839949742	1.933895094	7.023376213	7.12743367	6.627027891	4.415808587	5.36077926	6.168447437	2.40157078	1.495056007	2.503541256	3.524056174	3.086730052	3.126895071
Zm00001d021440	0.069397127	0.029135313	0.114995937	0.346196343	0.152401492	0.085020975	0	0.111569518	0	0	0.175024006	0.102499983	0.129429355	0	0.026744183
Zm00001d021441	0.434835684	0.416234637	0.47556526	1.344924342	1.283429968	1.193322391	1.280425862	1.1744608	0.793684034	0.263872443	0.789612118	0.211944145	0.330884664	0.667355006	0.945131256
Zm00001d021442	0.217216545	0.233053925	0.049992104	8.812710406	6.416862122	13.74624732	7.818206784	3.799365548	5.288312352	2.995774273	2.661391413	1.990335344	6.301874159	6.605636409	6.055070806
Zm00001d021443	0	0	0	0.741311734	0.870234605	0	0	0	0.325805275	0	0	0.29264488	0	0	0
Zm00001d021444	5.487093886	5.105170725	11.00924755	127.3446645	57.44214391	109.0022885	0.851266821	0.51396927	0.697738593	0.106887106	0.019546332	0	17.35396714	14.68952784	13.41343575
Zm00001d021445	57.81715909	53.07248481	71.626351	70.82024742	121.945553	65.03268151	86.65595514	91.17515109	78.14419768	5.819095386	21.07352719	2.530865488	31.09193129	22.05617288	37.46957335
Zm00001d021446	2.885202528	2.913271812	3.487395164	4.372617032	6.135618919	6.786157722	3.058406005	1.695412078	2.589869071	0.184687213	0.606388825	0.033714097	3.215011344	2.802534467	5.130203472
Zm00001d021447	0	0	0	0.045895477	0	0.067627721	0.043000907	0	0	0	0	0.030574103	0	0	0.010636482
Zm00001d021448	0	0	0	0.004804218	0.0456818	0	0.009002444	0	0.019003013	0	0	0.01706889	0	0	0.057896748
Zm00001d021449	0	0	0	0.018512671	0	0	0.0173451	0	0	0	0	0	0	0	0.068646306
Zm00001d021450	23.24815682	25.01344309	21.32848059	10.35922542	9.094775428	8.619605006	10.32911144	14.81042139	7.699883364	15.12285135	10.17775138	8.636549788	251.2982087	237.7781783	244.3417133
Zm00001d021451	0.492164421	0.344379394	0.951476386	0.06820068	0	0	0	0	0	0.452517252	0.41375675	0	0	0	0
Zm00001d021452	4.388337115	4.57277356	3.374086579	4.3791592	6.763693226	5.577777022	5.643940035	5.501278457	4.720123136	5.434120298	7.326942447	6.061320792	3.063318098	3.403861295	3.25435706
Zm00001d021453	0.061123252	0.089815788	0.044312425	0.139755491	0.067115709	0.106086157	0.23212319	0.171968366	0.075381921	0.519844086	0.783630208	0.818157233	0.467392354	0.117259546	0.235556067
Zm00001d021454	0.121522079	0.382643771	0.302055996	0.833563861	0.040030792	0.483863817	0.319496739	0.769271824	0.5620141	0	0.191554051	0.033654161	2.753738954	2.397901872	2.177689663
Zm00001d021455	0.35741788	0.150056381	0.185083331	0	0	0	0.034803566	0	0	0.123234546	0	0.164971378	0.066660347	0	0
Zm00001d021456	8.483616856	8.158253993	10.65032343	0.857870183	0.793062857	1.123631506	1.239138296	2.591886199	1.449218748	0	0	0	1.411186979	0.911152441	1.159755603
Zm00001d021457	2.595002735	3.86629644	3.34306766	0.749891731	0.416987415	0.232626835	1.553109148	1.869757905	0.897661409	0.26187341	0	0	1.204052526	0.485686143	0.658575503
Zm00001d021458	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021459	233.8779812	207.6104544	209.9004699	51.3451463	71.52076749	64.74036691	38.00406415	57.770658	49.31096314	148.2562229	159.0948234	116.6254988	94.69033872	88.17627174	86.93196638
Zm00001d021460	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021461	1.672809395	1.874898741	1.31173261	1.136264053	1.18736635	0.445260978	0.471216968	1.104562602	1.473598514	12.73700385	3.97408386	4.274176511	0.19499244	0.267428058	0.299308896
Zm00001d021462	0.08979464	0.084822511	0.111597043	0.027996995	0.147897014	0.1375134	0	0.027067974	0.055370847	0.030960403	0.198159363	0	0.025120771	0.049218019	0
Zm00001d021463	0	0.081995094	0	0	0.085780268	0	0	0	0	0.538711014	0.328378373	0	0	0	0
Zm00001d021464	0.009824818	0.037123183	0.006105156	0.269567903	0.051782555	0.156477699	0.017220449	0.035539482	0.0484669	0	0	0	0.120937152	0.145399188	0.079511811
Zm00001d021465	5.388544832	5.59868255	3.974420996	9.153249097	8.406466287	8.717384562	8.108864603	10.0448777	6.62585044	0.418997455	0.887197709	0.017712716	11.46943905	10.34182825	13.16226689
Zm00001d021467	20.18558861	20.5150881	21.17565371	23.05136176	26.06601921	23.25342633	23.13748254	22.77843842	25.426559	20.17440406	24.82185648	20.18383781	12.55898097	13.08974735	11.8855369
Zm00001d021468	0.569634747	0.717457071	0.235981247	0.236807915	0.500384898	0.232626835	0.443745471	0	1.170862708	0	0	0.841354029	0.424959715	0	0
Zm00001d021469	0	0	0	0.021177944	0.00813634	0.039716777	0.00541153	0.037227634	0.026653785	0.012774313	0	0.001710069	0.001727479	0.001692286	0.026771362
Zm00001d021470	0	0	0	0	0	0	0.009474992	0.078217776	0	0	0	0	0.009073873	0	0.00937474
Zm00001d021473	6.757956799	6.797062671	5.749342165	7.015296008	6.753691291	7.80929685	6.626229984	5.07127449	5.472407285	1.722099142	2.607678336	0.907515306	7.102289523	7.551868504	8.189868316
Zm00001d021474	0.561831531	0.235876297	0	0.467127942	0	0	1.094166914	0	0	0	0	0	0	0	0
Zm00001d021475	0.749108708	0.235876297	0.465497254	0	0.246765155	0.458880332	0.218833383	0	0.461929397	0	0	0	0.419138349	0.205299818	0
Zm00001d021476	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021477	0	0.055189005	0	0.218591922	0.923787504	0.751563621	1.331236412	0.686849843	0.270199086	1.389943481	1.768191239	0.776634488	0.392270506	0	0.101319308
Zm00001d021478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021480	14.21808328	15.37309616	13.36144697	16.27268214	13.92110817	17.78087867	18.05795569	16.52395878	15.99716934	11.97662326	18.67422131	11.75203307	15.37198278	15.46646707	13.32746074
Zm00001d021481	0	0	0	0.086901987	0	0.005691176	0	0	0.005728992	0	0	0.020583585	0	0.005092384	0
Zm00001d021482	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021485	1.278047364	1.130045699	1.123083553	0.936498157	0.893038203	1.162475177	1.189187579	0.988441133	0.936690166	0.783394676	1.055446541	1.825714408	0.662118536	0.662781738	0.609446641
Zm00001d021486	22.71726675	21.58128934	24.70395024	15.86967032	32.93800324	18.85759881	29.08400684	34.57702623	27.84423908	28.6754474	41.73647782	27.63162853	14.94948763	11.89753633	11.75176428
Zm00001d021487	0.244637145	0.028662455	0.226259173	0.227051784	0.47976979	0.153342034	0.551773394	0.644832811	0.940198369	0.015692789	0.014348618	0	0.006366438	0.031183701	0.006577533
Zm00001d021488	0.793242359	0.837507382	0.642258238	1.500847627	1.299969014	1.407936563	1.22038802	1.067585798	1.419520149	0.608061335	0.872702635	0.566462784	1.061556782	1.170664821	1.126002208
Zm00001d021489	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021490	1.603442234	1.623034603	1.382413935	1.701352537	2.062993065	1.162205669	2.614242583	2.70269192	2.645279751	3.068188304	3.260594591	2.496938299	2.273410524	2.452566967	2.673933819
Zm00001d021491	0.489918663	0.567509857	0.524430204	1.065914361	1.705732668	1.546545552	2.097663654	2.746680721	2.941643248	3.624991062	3.440757697	4.191144682	0.556238141	0.486103571	0.458918425
Zm00001d021492	0.051506263	0.097308494	0.077729022	0.3257702	0.479917055	0.378613321	0.47718162	0.714205542	0.530858313	0.071035629	0.190213791	0.122263503	0.144092907	0.125025158	0.182898256
Zm00001d021494	97.54369828	96.25824044	71.20601737	39.75600588	34.21168162	40.26327959	37.3317653	34.05703064	35.82085965	28.175024	32.04652551	32.71184463	38.93045585	37.43553715	32.59852362
Zm00001d021495	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021497	0.078721117	0.380073228	0.391339342	0.343621466	0.25931655	0.546516788	0.214633126	0.379678992	0.113265797	0	0.016544976	0	0	0.014382809	0.015168726
Zm00001d021498	3.063184875	3.434183035	3.158333678	2.905989286	3.13487423	2.799590809	2.608071656	2.822704347	2.68711416	3.683402327	2.814601633	2.843815192	3.554362549	3.262370233	3.424881435
Zm00001d021499	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021500	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021501	0	0	0	0	0	0	0	0	0	0.060143175	0	0	0	0	0
Zm00001d021502	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021503	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021504	1.031070715	1.154344338	1.186497888	1.00014963	2.918445998	2.152123124	4.953091903	4.788763149	4.050269211	2.475362061	4.526668353	3.04579559	2.777669646	1.46519842	3.002221287
Zm00001d021505	1.08798405	0.885863394	0.464374672	1.644710921	3.779434487	1.97919809	3.608463973	3.962085588	3.442562251	2.803982166	4.54555915	1.680002739	1.365063522	1.277017677	2.0074906
Zm00001d021506	19.96485522	20.58125374	21.13274899	20.25842671	28.35317032	22.09101511	29.19897712	35.22198507	39.66688865	157.2653644	128.5543038	171.8751863	17.71553956	18.92426995	20.21086383
Zm00001d021507	21.74167201	24.77309836	26.74657123	26.29942871	19.80555709	23.85400593	14.67795502	14.35737736	14.82992044	7.460857913	9.565344219	8.671374585	39.7351042	45.99201574	40.54275773
Zm00001d021508	16.94594039	14.28487069	12.80502718	17.51502359	40.09705508	18.95081942	24.31223968	26.30761968	23.88696734	2.735518926	7.419688553	1.430383772	7.775893833	5.691222797	8.818627376
Zm00001d021509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021510	0	0	0	0	0.026413279	0	0.140541088	0	0	0.138232298	0	0	0	0	0.046351355
Zm00001d021511	20.42016733	12.82064593	16.32887626	25.74513877	51.82247075	28.68895731	38.37433658	50.60291559	42.3648672	3.535291029	7.854757141	2.208554325	10.62861201	9.353229108	12.02616136
Zm00001d021512	10.70029115	9.149183907	9.677062608	17.0705283	25.80014408	23.65877411	29.29832782	31.05955492	29.71460817	30.66310929	28.252793	30.88547851	27.19945143	28.04113607	29.99801586
Zm00001d021513	1.814905836	2.006384297	1.713839454	2.431502488	3.863841648	3.009988963	2.815275613	1.949459032	2.58037778	0.043721474	1.15931843	0.307277123	1.756007449	1.311895589	2.391488087
Zm00001d021514	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021515	176.1161331	182.2790649	179.2327991	254.4248048	124.1809906	252.4458463	67.03970035	39.08977908	45.12124596	0.769952589	1.588097687	0.01438212	713.6853363	730.215773	690.3072092
Zm00001d021516	7.14848767	7.115391819	6.531905947	10.91453541	13.26493415	10.42384934	10.89534003	11.67211494	11.6411363	1.844930571	3.044789281	1.143849582	6.091707823	5.785815712	5.398977048
Zm00001d021517	4.185333216	4.310796918	5.209510052	5.571480736	6.06373598	4.892034374	4.980434398	6.035777521	5.778232166	2.713759889	5.067695777	1.817608703	3.751121199	4.552978238	5.416806668
Zm00001d021518	9.213852078	11.95728031	8.297480333	23.9809376	11.37784151	20.03512983	8.083244948	6.293619166	7.888821768	0.971352604	2.007464824	0.427505223	33.87921602	34.80722945	39.45318087
Zm00001d021519	77.97890552	86.621248	58.68814491	8.634984749	4.724075767	7.871783648	3.289110075	2.416497126	3.558387615	0.236120113	0.317492902	0.039046264	1.76370021	1.3137676	1.094472438
Zm00001d021520	65.09298896	60.10521799	59.86487126	40.869869	43.3625278	44.73403154	42.31711878	40.1566064	36.83778846	43.82804894	51.46408873	38.46339852	26.2294948	25.77697751	28.83759316
Zm00001d021521	0.241257069	0.430474243	0.224876247	1.479352975	2.516641693	1.40397137	2.161301469	2.084791287	1.537273861	0.637738774	0.785935003	0.623591809	0.944910425	1.256253738	1.534093524
Zm00001d021522	14.45104503	15.06917413	15.83173428	11.06526781	11.4176377	9.988014576	10.48209285	9.968226836	10.39737294	4.542620995	5.982721254	3.552010785	8.54326671	7.442630211	7.685394859
Zm00001d021524	19.18089437	19.54618341	16.15182566	10.14891065	10.38824278	11.24232714	10.44852781	11.43402973	8.790325574	4.680712118	8.300004831	4.136068124	9.416964444	8.228094658	7.67600187
Zm00001d021525	0.665379806	0.7308561	0.817320447	5.42286105	3.557915031	6.597281249	7.693597195	6.175817941	4.026654501	0.320116901	0.263427472	0.077136023	37.97364979	41.46626433	43.87521686
Zm00001d021526	170.6367161	200.4375721	173.9965055	215.2516145	144.4929049	200.936301	153.3448823	133.8505004	114.0536991	21.27422922	26.32598621	12.73540552	402.4994901	388.0379911	398.1455566
Zm00001d021528	0.586926348	0.104538411	0.213672525	1.190406484	1.203006884	0.566536126	3.976390463	2.509116685	1.454997474	0.204411161	0.209330533	0.15761706	1.519240196	0.909871699	2.069971919
Zm00001d021529	1.910062385	1.250222223	1.850466805	3.620113078	2.79422854	2.929716182	3.409371142	2.538850904	2.188701775	1.306774242	0.644835419	0.39985142	2.827454738	2.852289768	3.947105984
Zm00001d021532	0.504676398	0.516065613	0.422282231	0.380139022	0.57939304	0.483618947	0.992588553	1.43997467	1.047614002	18.59990348	11.13407921	37.60077576	1.643923109	1.396804133	1.704208538
Zm00001d021533	0	0	0	0	0	0.013335296	0	0	0	0	0	0.024115243	0.012180374	0	0
Zm00001d021534	2.008730588	1.932196849	1.990844888	1.839261972	2.925995263	1.931394034	2.77306531	3.587119079	2.905888154	1.285826041	1.913165381	0.863783181	1.270927257	0.594643986	1.126886787
Zm00001d021535	1.663632816	1.958133967	1.02463535	0.749135183	1.074701315	0.638508806	0.271809631	0.429595508	0.061733188	0.040609273	0.040843961	0.140255873	1.350938056	0.700442475	0.895310914
Zm00001d021536	4.709450066	3.793108248	4.516199682	5.811142476	8.042713602	6.070913306	7.002176353	7.744285049	7.072945078	4.259434653	6.868819324	3.204190082	5.532237573	5.141609626	6.679387848
Zm00001d021537	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021538	0	0	0	0	0	0	0	0	0	0.689812884	0	0	0	0	0
Zm00001d021540	0	0.041292493	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021541	7.193539409	6.555229948	6.459586863	6.89884184	5.674179797	6.458905575	6.421097192	5.717072941	6.598761032	2.413967372	3.232032107	1.99178041	4.644539178	4.903820114	5.028974497
Zm00001d021542	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021544	0.134031705	0.101288057	0	0.702065819	0.388534156	0.394097227	0.297570492	0.096967037	0.082649132	0.018485182	0.067607312	0	0.554947393	1.38114446	0.774794709
Zm00001d021545	3.324795384	2.739187908	2.694459796	3.138378623	3.11966834	3.588507776	2.972062688	2.528531831	2.869859233	1.072890564	1.00658289	0.914207544	1.271725065	1.171661602	1.247415648
Zm00001d021546	23.29004967	19.64068527	18.50845605	7.700584295	10.58621605	6.785593399	7.692570985	8.287835976	8.990358441	6.713007402	15.84298371	8.173153421	6.740058738	6.622112727	7.873733255
Zm00001d021548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021549	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021550	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021551	26.06360406	24.97771496	28.68711155	39.39060988	68.8751134	43.31824293	49.56619369	57.10898534	53.39133948	29.93430436	39.57900399	22.73651183	26.96898493	26.28135204	30.87235361
Zm00001d021552	0.004125919	0.007794916	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021553	15.50203531	16.10292538	16.783802	13.19107794	12.5435992	13.7106236	12.52896163	10.68998397	12.14517095	7.167572209	8.70565864	7.914960121	8.834964942	8.845141292	8.404290677
Zm00001d021554	37.53593173	35.44489672	42.592545	58.08025707	67.99967404	49.12099278	37.10334936	41.82152376	45.30622436	16.72314405	26.06143271	13.59450983	31.38737545	31.53673332	31.88891909
Zm00001d021557	146.4646658	152.7518464	150.9944857	59.87176684	51.74394366	55.30186823	44.521587	44.24017448	43.22076874	51.69288131	56.53678141	47.99202861	27.62992515	25.79596935	25.83382564
Zm00001d021558	1.854195694	2.695547215	2.052176995	24.88496455	14.85353066	25.04458624	21.17043169	16.43990393	19.3746966	0.737910498	0.325719439	0.02043775	7.958962114	6.967587676	7.465633231
Zm00001d021559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021564	0	0	0	0.19991824	0.150869819	0.028055498	0.026758521	0	0.084725744	0	0	0	0.076877134	0.225932965	0.052950794
Zm00001d021565	19.70110154	21.05134219	19.31294679	16.79894598	13.14543529	17.64536332	15.43903881	11.97180075	13.35954804	2.46378302	4.15454666	3.05940988	18.95264305	18.4590328	18.86707734
Zm00001d021566	0.016366855	0.039166817	0.048817861	0.204120315	0.118611529	0.100258183	0.221846173	0.203267426	0.207904174	0.318273537	0.068109126	0.083400112	0.148351793	0.1363586	0.293295926
Zm00001d021567	27.08389455	27.04764447	26.20284492	30.48689446	32.47211638	30.89085815	37.90731192	36.26247395	39.9842233	33.86015565	32.51495313	30.49439121	32.62256219	33.92036868	30.06323712
Zm00001d021568	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021569	7.669600311	9.918893973	11.25453067	5.670725026	11.8319424	4.936095209	37.96582419	49.7286939	38.57702353	4.747859743	3.275094051	1.248672497	2.906298308	3.189409871	9.633180169
Zm00001d021570	2.01547918	2.145675279	0.807540388	0.636508243	1.506862507	0.729481731	1.3749514	1.304848509	1.244279402	0.622413261	1.370607969	0.562744571	0.610778602	0.707124105	0.551810238
Zm00001d021571	0.219324608	0.100450966	0.132158676	0.737707885	0.919521106	0.407125234	1.009591057	1.498581475	1.303260698	0.494975117	1.039252896	0.368117951	0.342116329	0.255002934	0.315040493
Zm00001d021572	1.519025991	0.882107137	1.623198108	3.145635358	10.62499522	4.643840374	21.69790937	27.58240614	26.61834174	18.6786716	16.59538366	7.076809586	2.181724643	2.375906579	4.081390032
Zm00001d021573	0	0	0	0.012283984	0.038934848	0.217207765	0.540934681	1.104502053	0.898898632	0.135842114	0.211151079	0	0.02204402	0.010797469	0.159424617
Zm00001d021574	3.816327651	4.463547155	4.874458478	6.537021656	9.606203359	5.856127721	7.853242472	8.923618312	8.563495474	3.030693056	4.131094032	1.40918486	5.076840866	5.921202436	7.923730556
Zm00001d021576	0.184497084	0.185899808	0.321010927	0.701795117	1.130424183	0.271241006	2.39299177	5.060998841	5.051300816	1.272259479	1.08185385	0.204377497	0.061937448	0.070788264	0.159977855
Zm00001d021577	25.95923835	23.0660211	28.8711526	32.51702531	64.55277275	38.31523574	59.9471532	78.68643188	76.95269982	158.7312189	125.2190025	119.0874532	16.5495746	13.93790849	17.19689879
Zm00001d021578	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021579	0.414014762	0.56184738	0.728325997	1.778104729	3.476762631	1.121609616	3.188835015	3.455781934	3.70720753	3.606916673	5.511315207	3.71100107	0.887439866	1.125055261	1.119114866
Zm00001d021580	8.191030516	9.291606782	9.976094568	7.41883195	7.969299182	6.599229792	7.087764916	7.405623829	6.3253664	0.411819769	1.794127235	0.337262257	5.575617059	5.06409148	4.887278935
Zm00001d021581	0	0	0	0	0	0	0	0	0	0.159787165	0	0	0	0	0
Zm00001d021582	16.629175	16.18280453	17.07106527	28.41694981	44.54136078	27.72270147	30.23229792	40.51438829	31.79426622	121.708987	57.4429024	85.85906933	20.36703479	19.00973593	23.64994057
Zm00001d021583	0.038046106	0.005324357	0.047283812	0.026360807	0.094692504	0.010358152	0.004939653	0.081555454	0.0938428	11.18816489	3.694256696	16.04816469	0	0.004634164	0
Zm00001d021584	3.35367785	3.341911239	3.598802297	5.089339302	4.159755474	5.280979961	4.334372129	3.810368093	4.399974551	4.260635456	4.373968175	5.055678634	4.788391477	5.096266065	5.005386094
Zm00001d021585	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021586	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021587	11.76536487	13.10796432	11.92702582	14.85105357	14.751193	14.15678567	14.90517169	14.67491256	14.78757187	19.73450418	16.24634878	14.87839012	12.68721661	13.01276331	12.02352115
Zm00001d021588	2.815826813	3.513399017	2.771814373	6.555864167	3.554225744	5.416466215	5.896390731	4.640698649	4.22727641	1.578801768	1.775423975	1.042177704	4.130166702	4.392210779	4.092168861
Zm00001d021589	0.195303342	0	0	1.705016989	2.058726438	1.196366581	0	0.235491375	0.722589557	0	0.24628378	0	0.218550711	0	1.128986576
Zm00001d021590	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021591	1.779911341	2.512093458	1.647292913	8.422752437	9.697209825	10.93410565	10.8268978	11.02003958	8.764929036	6.946536758	10.23567214	6.096903432	6.540377222	6.82228545	6.085894398
Zm00001d021592	5.00536382	5.232996333	5.091660513	4.304195981	5.891176468	4.522811251	5.947634733	5.799070985	5.39313856	10.3793995	11.84328156	11.26208549	5.650995248	5.223442595	5.560350826
Zm00001d021593	1.17182005	0	0.485447136	2.679312411	0.772022414	0.239273316	2.053907608	2.354913746	0.240863186	2.693555069	3.940540475	2.812526324	2.404057817	4.281967628	0.903189261
Zm00001d021595	21.57863751	26.71840132	24.07502056	60.87366113	26.06883274	46.2595078	28.53577146	30.65216998	24.65420738	13.31448359	11.65342763	5.523034808	81.96540067	83.70724522	77.74403497
Zm00001d021596	75.36845261	65.97467073	79.86112065	52.82840908	69.81712309	53.48567295	167.4578957	170.8740396	112.4922059	106.9724244	100.3031087	89.30061407	92.87101719	88.56564754	81.96711885
Zm00001d021598	3.596603308	3.789657904	3.113863692	8.081101141	7.744510062	7.138334539	12.36779582	12.39162582	10.05378596	5.105295802	6.873449446	8.501175204	7.684032151	7.443679133	8.31448695
Zm00001d021599	0	0	0	0.059639148	0.00700111	0	0.02483457	0.025626733	0.006552827	0	0.006700297	0	0.011891605	0.099019461	0.073715408
Zm00001d021600	4.513430414	4.220992575	4.093826116	4.700151591	7.564633472	4.496848706	5.154407133	4.731677935	4.864845186	3.13777801	3.797827097	2.094193386	5.925268893	5.714843955	5.88519312
Zm00001d021601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021602	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021605	1.577450068	1.207665297	1.781071128	0.115725135	0.217361766	0.202101142	0.048189553	0.174043399	0.076291507	0	0	0	0	0	0.023839837
Zm00001d021606	0	0.052257875	0.025782473	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021607	1.94491659	1.695474	1.776196442	1.330000464	2.816104778	1.56353791	1.884499627	2.624433926	2.118333196	0.650999882	1.372354949	0.518045991	1.276509426	1.111559372	0.960071705
Zm00001d021608	0	0	0	0	0.027211263	0	0	0	0	1.110786305	0	0	0	0	0
Zm00001d021609	22.22649694	23.4100059	19.87661569	11.07939521	13.51731194	11.24641405	9.577315293	9.535114509	11.11388966	22.99511177	18.11883519	22.62876837	8.090558644	8.233471908	7.937127307
Zm00001d021610	0	0	0	0	0.006818265	0	0	0.012478725	0	0	0.019575925	0	0	0	0
Zm00001d021611	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021613	0.215483547	0.58803837	0.215730667	1.507939718	0.938550308	1.51064852	0.832314184	0.757820317	0.465064207	0.049531223	0.030192407	0	2.230480326	1.148294734	1.813101034
Zm00001d021614	14.23191337	14.53549391	13.32076232	18.91485012	23.29611495	20.19512583	24.34988817	23.27871675	22.23086532	35.58328013	30.01362617	40.68173888	24.27063155	24.37033729	24.66484549
Zm00001d021615	100.9194461	101.2544744	91.90442639	330.7167647	313.8613168	388.3141007	356.4024902	382.4594641	462.7781821	341.9666709	483.5021583	416.429895	75.32429821	64.5971197	122.2259985
Zm00001d021616	0	0	0	0	0.152015665	0	0	0	0	0	0	0	0	0.031617904	0.333455951
Zm00001d021617	7.194537261	7.155099902	7.023470165	5.592858087	4.194376774	4.766173884	5.073620781	4.749191833	4.598900038	4.479194035	4.126040353	4.1635856	3.330480741	3.292104708	2.940471626
Zm00001d021620	223.0816254	242.8034164	271.3312374	1337.506892	713.9158136	1243.390434	614.12894	514.2521089	565.96381	54.24271223	27.28048941	5.735229962	2298.777083	2511.649567	2218.257914
Zm00001d021621	0.514263326	0.438873371	0.280738456	0.716292952	1.285573153	0.789025736	1.067048346	0.906946039	0.94838027	2.462503061	2.569767123	1.267133295	0.704556167	0.640150021	0.605671828
Zm00001d021622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021623	18.50597659	20.2601134	18.99119559	24.2661331	26.82425622	23.78942193	22.44632297	22.91120694	23.22559709	6.605807966	12.76842996	3.828178149	17.90604237	18.87397547	16.83393817
Zm00001d021624	4.684298131	5.309313131	5.298929852	5.037726813	4.121675423	5.817155281	4.865626614	3.715375539	3.999931709	0.812117903	1.426178405	0.992253213	3.521316145	3.669874603	3.576839422
Zm00001d021626	20.19565325	20.07753493	19.231175	36.09443342	34.50063536	35.24680004	22.36351782	23.53619838	21.27404236	3.241145935	9.472453066	1.777145754	35.63457329	37.64367146	44.73144067
Zm00001d021627	139.8950603	129.7648282	124.6879958	12.02833854	20.7778872	25.31570765	27.75170087	22.58972816	17.81198126	51.90912918	34.66216159	34.72254721	9.686383348	8.458207661	10.59296047
Zm00001d021628	0.038294773	0	0.190371426	0.238797898	2.270654159	0.797577721	1.029191176	1.200544263	0.330596529	1.584444158	5.794912464	1.993796942	0.299971564	0.251880449	1.195397551
Zm00001d021629	4.168935686	3.268164073	2.268993185	0	0.350427279	0.149703074	1.612601837	1.551370623	1.839399459	9.392746581	11.48417898	5.099879388	0.084455716	0.18122944	0.178667171
Zm00001d021630	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021632	0.85445212	0.179364268	1.002920298	2.308877172	18.51424123	5.81567088	9.873336725	15.33964649	7.961866414	8.641822514	3.9508023	1.945631191	1.752958825	1.300945026	1.372032298
Zm00001d021633	15.54963187	14.92158564	15.74084053	11.40067688	10.3459303	12.4092311	9.954719468	8.731959829	9.214200682	1.599354103	3.522614256	1.749614938	6.525623936	6.098044025	5.635206689
Zm00001d021634	90.82330885	94.33334521	114.4154899	301.1521091	202.8097911	337.8695659	41.06458829	30.2744632	21.21958139	0.028016175	0.153698644	0.090011129	88.04053962	77.47307404	102.5616364
Zm00001d021635	0.498476973	0.709480112	0.716740948	1.212691939	0.977861397	1.207712111	1.055237758	0.940656358	1.072384654	0.675150412	0.546849858	0.378856932	0.795444542	0.970373959	0.790807471
Zm00001d021636	0.012029242	0.015150875	0.004983326	0.047507439	0.010566861	0.056493627	0.077308934	0.021756792	0.004945131	0.024885463	0	0.017767265	0.024678699	0.052747511	0.050993968
Zm00001d021637	0	0.032381701	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021638	0.724592858	0.230905724	0.509936487	3.832477522	14.5974353	4.812969004	12.25145541	13.48436243	11.63864448	0.614047995	0.91373484	0.270780607	1.299302118	1.464236057	1.04968356
Zm00001d021639	0.102515948	0.092228011	0.036402035	3.972589127	7.853925577	5.741534315	6.52854879	9.323793473	6.736944592	1.181586289	2.188456296	1.776442196	1.474953912	1.091706798	2.175733102
Zm00001d021641	1.416350198	1.598982026	1.524113876	3.457425479	3.349386216	3.861928761	3.246097632	3.120545843	3.205930083	1.663549593	1.97120372	1.527511989	2.077819454	1.906102246	1.860486196
Zm00001d021642	0.580578185	0.731240372	0.515388769	3.01696636	2.313205009	3.200794715	2.358267133	2.816848293	2.778815923	0	0.400927083	0.107189694	1.37671479	1.000136018	1.901811563
Zm00001d021643	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021644	0.091141559	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021645	7.641161047	9.546768841	8.886243307	35.11454741	18.60016591	20.17039145	9.430711823	13.43173026	11.59981964	1.185043308	2.321867284	0.186967562	68.09657496	60.51943697	73.51210462
Zm00001d021646	1.229306598	1.158213101	1.24132601	4.060419804	10.53497393	4.800594247	7.039140482	7.217351561	7.876488438	5.973693961	7.669226727	6.423192768	1.714168377	1.600285759	1.987523962
Zm00001d021647	1.192029556	0.297936372	1.668801732	2.701417926	57.95908618	10.96435978	41.29881511	45.70050679	57.89174247	35.85786619	21.46867615	22.41469893	0.007785521	0.002542305	0.002681223
Zm00001d021648	0.889519725	0.823890643	0.581661884	2.287009775	2.81658094	1.914665555	2.82078202	2.395930262	1.843001192	0.207611352	0.735153384	0.251648232	1.430314861	1.461183948	1.468247608
Zm00001d021649	12.12153053	10.29772912	9.895531519	13.25136982	39.63048393	15.19970102	26.15294153	35.80389382	31.99635973	14.08896003	34.47972916	13.80259098	14.79025917	13.47355286	13.31395114
Zm00001d021651	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021652	23.19966968	16.28882774	30.89209047	48.67947054	86.77030138	42.98723241	51.37625427	64.460722	53.09145054	6.831480248	18.48913013	2.793428395	19.16853861	16.80347903	25.15602237
Zm00001d021653	3.81250245	1.754025155	3.315875671	34.71940797	41.814312	17.38260915	11.06074187	10.39107175	8.383447843	56.06071852	37.30522386	26.14943595	99.86874758	107.916165	117.2085055
Zm00001d021654	0.445644849	1.502812288	0.017866088	0.591646274	0.530376422	1.109563958	0.739109175	0.606681249	0.585061997	0.49565945	0.45320359	1.162501781	2.525628086	3.51427522	3.589963624
Zm00001d021655	0	0	0	1.873645042	0.336522591	0.165650757	0.14921551	0.15397513	0.129695561	0	0	0	0.218550711	0.39525855	0.303957924
Zm00001d021656	0.063460635	0.02283683	0	0	0	0	0.105933932	0.3935267	0.849729541	40.42297399	19.24051199	29.42507392	0.030434781	0.039753015	0.020962615
Zm00001d021658	0.009863805	0.024846998	0	0	0	0	0	0	0.012164807	0	0	0	0	0	0.011403905
Zm00001d021659	20.65193924	14.73060438	15.4816202	7.030018865	8.582546332	6.497442949	9.142906831	8.657844111	8.335033737	4.234756758	6.760476777	4.299606588	8.398887689	8.342843145	7.095127441
Zm00001d021660	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021661	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021662	1.522385076	1.25926125	1.459945264	1.206519682	2.259201062	1.399508908	1.526579743	2.023120497	1.925459773	0.619462357	1.078342501	0.495164289	1.292801155	1.105492985	1.168396785
Zm00001d021664	0.062760064	0	0.038999196	0.039135815	0	0	0.036667568	0.012612392	0.012900094	0.086556475	0.039571227	0.579356255	0	0	0
Zm00001d021665	15.53052173	12.76499621	14.99708019	13.04906335	30.07113083	14.69457193	27.0507239	30.15545549	23.46970881	11.11181251	13.37813491	7.794303721	7.22091548	6.074684742	6.238027163
Zm00001d021666	47.61641236	91.36577168	197.7219096	1.124997689	87.94541974	2.962123423	406.9306762	727.0519181	891.6966164	2694.647642	3431.768003	3023.517867	0.008273959	0.008105401	0.282093996
Zm00001d021667	1.115234272	0.738647787	1.624984787	0.131893016	0.620730633	0.494700105	0.943661254	1.379495887	1.11454273	4.799907557	12.9238366	4.238720296	0.914470273	0.779908309	0.822524679
Zm00001d021668	834.9537176	837.2478505	826.3657692	271.0393546	301.9615476	262.0379433	423.2542161	417.1617776	420.9207806	515.9786381	624.4632925	595.4099308	277.0840755	267.3364268	284.0358517
Zm00001d021669	0.05399157	0.025053583	0.113012013	0.421735651	0.67023078	0.407326639	0.358612012	0.400888455	0.399519481	0.082301516	0.05016797	0	0.349790163	0.295937276	0.397527179
Zm00001d021672	22.15719873	20.12157666	23.72266774	48.30321859	38.55348377	44.87764707	28.1431452	23.65858206	29.04588034	5.680971799	11.06094502	5.308582725	68.19574085	67.5501896	58.59791611
Zm00001d021673	31.4312956	26.60251834	24.25454222	7.367550474	18.88975944	8.313101363	7.840860337	9.815021239	8.801450169	25.06488905	22.52253868	20.77141001	13.13710327	8.854637646	10.42603567
Zm00001d021674	0.134031705	1.659998714	0.72182499	0	0.029434406	0	0.104410699	0.026935288	0	0	0	0	0	0.122441885	0.103305961
Zm00001d021675	19.82724457	21.33123286	19.23402329	15.16666874	18.75298352	15.08391069	18.52946632	18.99044068	18.06663947	29.73537437	25.34740742	31.37219304	14.91226338	13.36284742	13.61910582
Zm00001d021676	7.330646232	7.853335955	8.213892698	7.855163014	9.353882255	5.793806108	7.402823131	8.292997485	8.137946846	6.202647228	6.654215836	6.562950339	3.854103056	3.688990986	4.261967815
Zm00001d021677	1.307770721	0	0.512595026	0.100368918	7.794074704	0.246492011	7.546611715	4.209040096	3.262907467	22.0597998	12.55884175	21.08399764	0	0.022055757	0
Zm00001d021679	10.15935732	8.899100554	8.469345292	12.82673331	27.21359336	14.44420569	20.37158106	19.81152207	29.49285001	17.00975908	33.42530319	17.08952128	15.57925708	13.38278568	11.89061091
Zm00001d021680	6.764469626	7.044750619	8.515729982	2.006705343	3.288358081	1.300773272	4.041672118	3.90663033	3.928249072	32.592232	23.58921423	28.00920777	2.645705961	1.967853818	3.416788838
Zm00001d021681	5.149240648	4.361490445	5.615553733	7.417305544	8.718570766	7.633314457	7.280434165	8.645770901	8.239698243	0.355082589	1.948007297	0.342245707	3.039542369	3.415090943	3.76541474
Zm00001d021682	4.842788191	3.805446284	5.632480288	1.449798928	4.305819891	1.719542562	7.505419083	11.85946374	10.19421343	6.752886103	14.21343067	3.892910803	1.192951175	1.221501737	2.149144509
Zm00001d021683	0.979790864	0.238150042	0.484226397	0.28583688	7.496965355	1.586464318	3.916714004	3.198774288	2.395508548	7.191092117	3.25144135	5.617254684	0.224412926	0.282652934	0.119239152
Zm00001d021684	1.21465452	1.064484303	1.409289682	0.799806043	3.508756732	0.561946651	4.481291632	5.991532645	5.211593936	21.39698561	21.82430822	25.282963	0.384958847	0.414362509	2.322506713
Zm00001d021685	0	0	0	0	0	0	0.003724606	0	0	0.685792058	0	0	0	0.003494261	0
Zm00001d021686	0.625240906	0.701464562	0.901118242	9.691468586	10.12846726	9.185630883	14.12686388	12.68956404	10.68517968	0.362315248	0.861330667	0.372498017	4.362614877	3.985751574	3.583946626
Zm00001d021687	0	0	0	0.030410529	0	0.049789335	0	0.034301657	0.030072098	0	0	0	0.031834081	0.022275396	0.070477759
Zm00001d021688	0.22315588	0.007396465	0	0.585916491	2.267207863	0.604350129	1.948820315	3.172254944	3.288072182	4.535539464	6.079866332	9.471738136	0.026286168	0.045063663	0.488839549
Zm00001d021689	0.027652172	0.125380847	0.00687324	0.689731792	0.196753285	0.359103561	0.135708566	0.186716462	0.334207414	0.083901189	0.006974055	0.018379093	0.69932691	0.945774403	0.524302828
Zm00001d021690	0.038692171	0	0	0.096510396	0	0	0	0	0.039765149	0	0.04879207	0	0.07216297	0.113108579	0
Zm00001d021691	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021692	4.230238365	1.721896971	3.077814423	6.910909024	22.21462856	7.379228297	8.190377468	9.978464436	6.11535834	0.108183769	0.480455242	0.01241342	1.975017692	1.977777671	1.340902909
Zm00001d021693	0.158783205	0.279983247	0.019733623	0.23763303	1.778371415	0.155624921	1.873935577	1.167884053	1.174942369	0	0	0	0	0.017406372	0
Zm00001d021694	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021695	0.836751605	0.226992068	1.391889387	13.99173546	38.30912855	9.69935618	44.32189931	67.29576255	36.70555364	12.03729977	19.26092215	4.848480843	4.652948745	3.838449324	4.479801726
Zm00001d021696	23.51096367	23.44170367	23.49206107	30.97879023	34.8007385	39.72559887	29.28142564	22.05547851	23.03404426	7.860973949	10.61317477	5.446717924	13.92466697	10.8191668	12.21950417
Zm00001d021697	0.07857031	0.115452862	0.056960991	0.269471076	0.655676763	0.328886215	0.642665854	0.457899895	0.532944405	0	0.173389443	0.007253052	0.959822805	0.430657664	0.416340835
Zm00001d021698	100.6790013	91.2560022	108.9058117	58.38391506	90.92369381	87.09990058	98.86929718	88.56833703	99.80748421	12.56992366	20.95359035	8.430167836	62.1516181	57.72617031	55.45570163
Zm00001d021699	50.95386705	43.31831094	52.76166203	34.12366422	30.56934169	41.44894669	32.09172101	23.08040976	25.54434811	1.186490742	1.344284926	0.30040137	13.32083025	10.8865073	12.87600696
Zm00001d021700	0	0	0	0	0	0	0	0	0	0	0	0	0	0.014410468	0
Zm00001d021701	21.83990916	23.19066427	20.01898575	24.25086457	15.42147324	22.58769307	17.01058153	12.66192754	14.21539859	7.780696451	11.64666163	8.190206036	19.30503493	17.75715536	16.48498375
Zm00001d021702	10.03340927	10.3906117	10.11924693	11.52038506	9.949668066	11.55155133	8.40739576	7.144588438	7.46498335	3.497650747	4.481517623	3.159108665	6.412610778	5.597068251	6.066014362
Zm00001d021703	821.2365684	866.5374591	985.9442916	1470.322824	740.0728469	1375.187694	845.3891338	591.4318101	667.5761754	45.98972068	46.59700868	21.54187594	2059.827408	2192.502834	1801.994605
Zm00001d021704	2.331270096	1.871855112	2.323021237	2.928226497	4.497978743	2.835723955	3.079193602	3.548863621	3.60414645	0.602851089	1.580145931	0.710180684	2.678643759	2.003423648	2.392048903
Zm00001d021705	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021706	5.777310781	6.074712665	4.527965037	4.197630657	12.20735949	7.524356315	7.217058317	8.723341657	6.846872282	4.761576411	7.329130247	5.36203037	6.270852243	5.534497499	5.736627223
Zm00001d021707	56.15026748	57.2329495	50.83633405	41.54642309	43.81249208	41.71049553	47.05017541	48.21262978	48.71643315	221.4212835	127.5592717	196.8250375	38.08065461	31.90480897	34.26094498
Zm00001d021708	8.265526193	8.013981423	8.72132764	11.02937341	9.720722808	9.629226624	10.84821607	10.0494345	8.890556286	2.185920636	2.602152621	2.374922601	12.18828732	12.57790519	13.26519708
Zm00001d021709	54.93109363	65.81128382	58.13767344	81.64953238	101.9205029	80.45151004	103.3939239	111.8062165	101.7229952	50.81940049	63.1332437	26.38728618	76.75761281	69.17423812	71.73912209
Zm00001d021710	13.36798009	14.81963354	14.21883373	7.481582914	8.238642097	8.28168421	8.146876919	7.648839628	8.156514371	4.231798255	5.663186005	4.532012263	6.50319477	6.295157289	6.065428588
Zm00001d021711	82.96193109	81.08293235	84.50366158	32.22049745	64.68702323	35.65884692	46.12800217	56.23232847	51.67803299	37.43952454	55.10294092	23.92710674	11.7058363	9.517581851	9.096619515
Zm00001d021713	0.020496603	0.017210365	0	0.004260412	0.004501213	0	0.01197514	0.008238079	0	0	0	0.003784201	0	0.003744849	0
Zm00001d021714	10.03749376	9.493676315	9.315775124	13.82330779	11.71176409	12.61895371	5.032985089	4.638387026	3.796293405	1.311917999	1.828106987	1.479453034	14.88979361	13.70634837	12.66488532
Zm00001d021715	3.919613887	4.459016434	5.637360093	17.06002548	9.454671415	11.20158721	6.833167249	6.450830199	6.081447369	0.948193663	1.464890227	0.385174792	24.06205425	26.41330494	24.58580363
Zm00001d021716	4.89483787	5.557338068	7.056116899	15.03758121	9.515554697	15.46174786	8.100182029	7.763827398	7.775630369	0.680254692	1.636096952	0.415727873	22.45587125	25.23086455	23.90086719
Zm00001d021717	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021718	4.350860053	8.749995736	12.23881373	18.96009248	20.24554328	12.1145429	12.79883079	17.38932599	12.83293323	5.441061168	9.233814708	3.628807361	14.39062394	10.48414997	16.86109626
Zm00001d021719	25.42284341	24.32501637	30.74786866	25.5448732	30.44251843	25.26098617	23.56943156	28.53927187	28.22889067	15.58921394	18.02628748	19.31096395	14.84057463	14.03618612	14.9608827
Zm00001d021720	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021721	17.75208585	18.29575353	17.28815141	14.91297516	17.20778883	14.15622869	15.51752505	18.1383337	18.2100066	16.80065672	19.20917652	13.5617477	14.21430011	15.7074902	14.2375311
Zm00001d021724	2.77485441	1.591191921	2.621494641	1.308305115	2.021356816	2.376939544	0.052722234	0.176812831	0.292136042	0.015556836	0.071121554	0.012495357	0.176715921	0.222577525	0.117369892
Zm00001d021725	0.009863805	0	0	0	0	0	0	0	0	0.013603813	0	0	0	0	0
Zm00001d021726	6.125014645	2.714060237	6.695180907	2.185517023	31.50353347	7.067404421	16.69985255	19.92685983	18.31845405	43.62468905	36.88516871	33.80432	1.459015324	1.32358889	2.229584039
Zm00001d021727	2.697839947	1.892969699	3.190460009	0.628684994	3.148888508	0.960687675	2.541575288	2.859021264	2.060782326	6.456623469	3.996540816	5.217026926	0.38651167	0.138151567	0.20506004
Zm00001d021728	5.011440933	5.763854111	0.150423122	0.017970247	0.087335307	0.017652964	0.070714919	0.017373942	0.063972937	0	0	0	0.016124104	0.053705117	0.046644471
Zm00001d021729	9.953079217	10.64726543	8.09208303	5.747186835	7.244828684	5.994878596	7.11131292	7.909126604	6.48893765	13.88416199	11.47849867	11.76870257	11.07893692	10.78594412	11.64905585
Zm00001d021730	167.1143294	153.1859579	174.2892447	52.27513806	71.82203025	56.28418608	67.21097477	66.4035749	73.24056538	32.04664282	61.0400859	36.79957656	54.04046017	58.04108771	56.93071061
Zm00001d021731	0.406549813	0.291166252	0.421051087	1.252665543	0.913822449	0.8447813	0.950106921	0.773757374	0.948706017	0.241870251	0.371938769	0.075059572	0.59766929	0.681619337	0.801810875
Zm00001d021732	0.020276209	0.070229391	0.088197663	0.164369454	0.7347142	0.223570173	0.456085445	0.464521362	0.731431031	2.495807979	1.553313716	1.016363154	1.350038873	0.566801054	0.193397033
Zm00001d021733	0	0	0	0	0	0.018029206	0	0	0.036298004	0	0	0	0	0.032264557	0
Zm00001d021734	0	0	0	0.163943941	0	0	0.01536042	0	0.016211945	0.362593952	0	0	0.117681152	0.201746552	0
Zm00001d021736	0.096676779	0.07162633	0.063608922	0.631225091	0.389650802	0.222950178	0.385416199	0.10285605	0.189364152	0	0.294024313	0.056696902	0.038182736	0.006234146	0.013149594
Zm00001d021737	4.138289671	4.17114099	4.218557134	6.995998768	13.63563974	9.566110534	13.03227327	16.33157836	17.83222488	16.65856872	24.3414936	23.31781661	4.963858341	6.324574919	6.587347714
Zm00001d021738	0	0.024528447	0	0.437183843	0.307929168	0.023859163	0.136537068	0.023482046	0.096070786	0.080576434	0.663071715	0.345170884	0.392270506	0.106744207	0
Zm00001d021739	60.60017456	56.94503448	55.66301369	37.86633796	32.85280455	38.37603725	46.80071369	37.20834972	38.55450735	50.18936613	51.38053438	62.43330575	40.30623961	36.97974615	36.76465364
Zm00001d021740	6.479942582	4.605724419	5.912193574	6.889377588	6.546499008	8.279245803	5.27299496	5.535004586	6.07249381	19.02350641	11.95577601	22.13787137	6.890566308	7.420336585	6.84918523
Zm00001d021741	23.24544299	21.79019309	22.86164316	17.17662037	18.17744516	16.9899627	15.58797848	14.21146071	17.48053542	14.61703095	16.58492194	20.86792302	11.67015146	11.36662468	10.50929808
Zm00001d021742	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021744	4.849949309	4.308431153	5.008383476	5.566507906	6.128107081	6.702523314	6.639071054	6.003314821	6.501448456	0.72705214	2.348876151	0.428247038	4.181865783	3.942565738	3.95483901
Zm00001d021745	0.400971945	0.733489632	0.142379747	0.964430001	0.717031991	1.23981006	0.613558682	0.437435095	0.200158653	0.013166819	0.060195058	0	5.288255673	4.971208926	5.198699361
Zm00001d021746	2.266671596	2.466258683	2.227073015	4.158939009	3.080494529	5.655739931	0.970693217	1.030274764	0.775696544	0.523746819	0.269372884	0.276069291	1.341279101	1.222888324	2.222692322
Zm00001d021747	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021748	13.61855094	13.6192429	12.86575213	15.70323932	18.77744947	19.02430326	15.42849137	16.54791991	14.09908204	5.031602389	11.26902516	4.231086733	16.83872166	15.75933221	17.13819025
Zm00001d021751	0	0	0	0	0	0	0	0	0	0.118584185	0	0	0	0	0
Zm00001d021752	50.03988323	36.23296715	44.91791742	26.31349991	64.68295902	37.77562124	48.98186354	52.60822756	52.69230926	39.89373454	68.28431746	34.70759393	14.42940985	11.85394127	18.72635649
Zm00001d021753	0.074706196	0.02613687	0.01031612	0.07246581	0.032812124	0.00508474	0.145490318	0.11009615	0.081896408	17.28078302	14.23571089	30.29334259	0.15326416	0.104644321	0.004798364
Zm00001d021754	5.266925098	5.17047101	5.054744507	5.435333306	5.964797893	5.889577617	5.649337002	5.249888681	5.611473292	3.870427604	4.95340341	3.830470531	3.53442744	3.342232907	4.33172857
Zm00001d021755	0	0	0	1.444332573	1.352279848	2.376254284	1.463259858	0.999054317	1.532765727	0.012985458	0.07123911	0.052150043	0.990401981	0.753472954	1.458663097
Zm00001d021756	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021757	0.640976285	0.674603181	0.709307793	2.901923584	2.406475348	1.774956199	3.262683461	2.382138183	4.169083399	4.456389119	6.366680882	7.810488844	2.426937564	1.443823381	1.806958605
Zm00001d021758	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021759	11.23583899	13.52770507	8.649225691	14.44528282	12.08538308	15.32302849	15.10663929	13.69717947	11.98352528	7.742344282	13.07564608	11.84297247	14.58720413	13.12257591	12.90426203
Zm00001d021760	0.013020223	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021761	0	0	0	0.084887048	0.550921637	0.154863953	2.363276021	5.346290668	2.302419072	1.046003604	1.986385535	0.301594901	0.097928128	0.06395542	0.449667484
Zm00001d021762	15.95189051	16.68287725	15.2615827	31.70761147	24.43422241	32.65769444	27.02805824	23.60056913	24.46014897	5.756347474	6.440915949	2.84308852	28.3222222	28.10041256	27.79237587
Zm00001d021763	543.4860726	651.7618586	767.8603889	2498.057468	871.0175973	1842.854554	939.2828563	816.44128	794.6341423	0.205804795	0.492153985	0.152588136	2308.077171	2394.894428	2076.546621
Zm00001d021764	71.40037149	82.72686688	71.1999369	73.02408287	49.10052135	59.04577655	62.07226624	67.09299425	82.93263223	145.2713583	142.7392735	164.6682266	50.76548111	55.63957532	48.365305
Zm00001d021765	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021766	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021767	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021768	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021770	35.31706448	38.16557698	36.24614318	31.79069453	19.22593087	25.00226593	26.55699808	20.27316549	19.53467223	1.69554872	8.714223078	2.430958804	17.63166615	14.89538701	12.05841526
Zm00001d021772	389.2669214	392.3762325	430.265633	43.81976029	36.98497073	38.67673991	40.82458331	27.39435894	33.80229731	0.455432017	10.07740876	0.951095858	27.56695196	22.299329	17.63836999
Zm00001d021773	264.9023508	393.2782866	542.0826351	463.0117563	513.8238068	611.4520835	448.4710719	94.41063292	405.3070515	133.1269187	36.94256696	38.28707164	62.25383879	37.24014271	78.61851977
Zm00001d021774	0.346420407	0.685642233	0.399779994	0.972091134	0.815106621	0.666933768	0.925239425	1.253112473	0.946014684	2.730119165	4.540091034	1.754280255	1.204501202	2.27854929	2.116977544
Zm00001d021775	206.9493835	146.4491371	179.7853586	10.01293399	18.60935571	11.61121168	22.92548307	28.17653725	18.55712088	84.43908852	109.1466973	152.7615874	30.29960703	30.12677516	29.49854766
Zm00001d021776	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021777	0.588953249	0.986421271	0.607365115	0.539166692	0.652197365	0.544999258	0.673549496	0.76302659	0.656799246	1.252959851	0.43455204	0.770405751	1.752812757	1.634683334	0.999634311
Zm00001d021778	0.970488828	1.009754397	1.284786787	2.420703132	3.030108549	2.197031221	2.268032406	4.222854588	2.549878786	1.891307958	2.527449283	0.794612138	3.16358899	2.012128307	4.219761555
Zm00001d021779	1.396582555	1.319250672	1.545837248	1.006953369	1.063867014	0.842135135	2.027134138	3.460012935	1.93767032	0.812580859	1.82992976	0.930659763	1.452934892	1.25588436	2.560718156
Zm00001d021781	13.37531977	8.721296348	15.51959783	0.885723111	8.232677692	1.646946203	10.27447769	24.90499689	20.603708	73.84538638	83.77913165	40.48801631	1.37185511	0.880491179	1.05567576
Zm00001d021782	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021783	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021784	151.690642	153.873222	210.3269753	734.6111956	314.815801	812.5132394	669.5534373	465.62385	467.1397299	2.744595734	1.870993055	1.891416033	234.2878678	308.8253897	286.0702231
Zm00001d021785	8.709735046	9.504438744	9.504767712	19.14375379	18.25499372	18.78637577	18.48286787	17.77568755	19.63566367	5.219291553	8.137010947	4.727767258	12.86888418	11.51446641	13.47059541
Zm00001d021787	18.77603108	18.54390087	15.11068225	11.68544301	20.37773846	13.5971183	18.16643402	18.94255254	16.72968306	24.75933814	36.04792442	24.60678242	11.43398916	10.49931311	12.61919443
Zm00001d021788	57.71733172	56.57530634	49.10117028	92.64227946	155.1682922	101.4837043	140.238675	150.9549816	125.8971372	49.08287743	73.45282728	29.73291434	113.7137948	111.7320234	125.4292076
Zm00001d021789	0.006968009	0.017552467	0	0	0	0	0	0	0	0.365181268	0	0	0	0	0
Zm00001d021790	2.130662115	2.675798335	2.033965752	6.123272877	6.322887985	5.296367638	5.799628351	5.326835461	5.293477179	0.840392426	1.308370991	0.476611031	3.13757337	2.51398762	2.998844031
Zm00001d021791	0.236050082	0.86714236	0.366704671	0.797310103	0.336949831	0.240994707	0.861951634	1.019897896	0.50945163	1.614195232	1.599958655	1.187580291	2.82858078	2.878776078	3.115678063
Zm00001d021793	0.064690381	0.018106172	0.026799132	0.116536387	0.009471008	0.228957642	0.016797936	0.05200125	0.070916606	0	0.009064072	0	0.072390614	0.18122944	0.074790909
Zm00001d021796	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021797	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021798	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021799	3.132431544	3.987595393	3.817889128	5.719678798	5.609422846	6.260358328	5.060790683	4.764767769	5.171578664	1.268722648	2.849319465	0.792178621	4.192824537	4.453372521	4.215400763
Zm00001d021800	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021801	0	0	0	0	0	0	0	0	0	0	0	0	0.10550724	0	0
Zm00001d021802	157.2712191	150.071528	143.3766972	43.48133212	50.52889965	39.21688786	55.31844589	58.36157388	54.95679014	62.64687758	86.02436233	65.08951406	29.44929239	28.36046954	28.3404684
Zm00001d021803	0.243044159	0.612230034	0.453083994	1.591349189	5.524249275	2.828742316	5.821940577	8.64515002	2.322991613	2.765383205	5.133648564	1.413474768	4.215600374	3.530244422	6.884309257
Zm00001d021804	0.083872601	0.030182243	0.007445508	0.104602269	1.468263487	0.682589522	0.798041811	0.527327311	0.480248683	2.288695565	0.407954727	1.154741813	0.033520048	0	0.048484086
Zm00001d021805	35.41599704	37.22312006	33.59870004	8.192517405	11.11797159	8.324100874	13.83675221	15.91452652	15.82302304	9.262993218	16.27207009	10.13947681	16.25925791	15.46220819	16.58783131
Zm00001d021806	2.129938618	1.727355884	1.794868232	7.106167952	9.559663114	7.65013576	9.716578814	9.813740416	10.28959238	7.247773576	7.882084825	5.744298904	3.182001345	3.439585523	5.086064074
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Zm00001d021809	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021810	6.674487277	7.55378873	5.404890511	6.221843499	7.083871426	7.110408996	10.27755546	9.8207696	8.458872688	6.312027621	5.071927522	4.053831355	6.633301374	6.078656788	7.508835471
Zm00001d021811	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021812	0.012577032	0	0	0.094113173	0.232009189	0.046225756	0.690724321	0.743086858	0.449818093	0.156112207	0.396501025	0.125390389	0.365926673	0.09651169	0.174489186
Zm00001d021813	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021814	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d021816	0.92778833	0.171846005	0.576529034	0.476451853	0.898895026	0	1.020348867	0.493544797	0.269228311	1.354842071	2.133476255	0.665022346	0.977152878	0.478623128	0.378582325
Zm00001d021817	3.480282911	3.623430095	4.181381483	4.636916465	5.597707473	5.510860239	6.488219554	7.503597212	6.727632002	4.051740885	7.509294559	5.462236899	4.658452731	5.051309115	5.581008987
Zm00001d021818	0	0.010316938	0	0	0	0	0	0.039507241	0	0	0	0	0	0	0
Zm00001d021820	0.137399336	0	0.048788657	0	0.051726795	0.048095139	0.172019063	0.059168687	0.084725744	0.582024462	0.160888901	0.500101318	0	0	0
Zm00001d021821	8.073901499	9.501986427	7.463432014	12.9884802	13.31704981	11.88223772	13.54933814	13.17888641	13.84143626	1.737413532	5.569108087	1.609585142	9.619664002	8.780275506	9.971729604
Zm00001d021822	0.897735811	0.963788486	0.72786711	2.788379878	3.565594452	3.823285322	3.981221091	4.211304476	4.34954627	0.860792145	2.204848222	1.30228344	0.995027626	1.054424486	1.650763362
Zm00001d021823	2.863389244	3.219550567	2.954810923	3.434271293	5.819448256	3.763418432	4.558221846	4.601571112	4.944280869	0.8883822	1.936841372	1.026060318	1.557389909	1.522226483	1.656140345
Zm00001d021824	0.124002122	0.239849594	0.165118073	0.983132569	1.213761619	1.058011262	1.019450236	0.79565113	1.021347295	0.482518935	0.781853269	0.637761071	0.18832034	0.267016122	0.174084098
Zm00001d021825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021826	1.13675455	1.583790444	1.262734088	1.367526503	2.081070967	2.415621706	1.645678567	1.431316229	2.02225824	0.707578484	1.890169111	0.546044336	0.652918238	0.452143013	0.418697008
Zm00001d021827	0	0	0.117990623	0	0.031274056	0	0	0	0	0	0.119721282	0.315507761	0	0	0
Zm00001d021828	0.224958395	0.266504093	0.3598541	0.583339146	0.639788315	0.518464501	0.569972188	0.623066133	0.607063128	0.036861946	0.103922286	0.049346277	0.458607552	0.280790481	0.309009034
Zm00001d021829	0.914065059	1.422996251	0.952548886	2.159593777	3.583321089	2.691824807	3.350204593	3.771969402	3.500918396	1.746112734	2.126345424	1.635189723	2.979659398	3.037209597	3.091585334
Zm00001d021830	0.383426075	0.547857863	0.584641731	2.905320016	3.438893148	3.682993232	3.185178425	3.570388907	3.023988192	0.586576687	1.369275127	0.349787534	1.63333562	1.253911095	1.829048722
Zm00001d021831	6.748914564	7.845070929	5.749753114	16.53978936	17.34667647	16.47720305	14.75909593	14.87024682	15.67993676	9.106976653	12.32418528	8.93602498	8.778619869	9.13964374	10.23247905
Zm00001d021832	0	0	0	0	0	0	0	0	0	0.177457746	0	0	0	0	0
Zm00001d021833	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021834	20.57268347	18.53181251	25.85415083	51.46523992	41.63716391	40.85121393	33.07791278	33.88165227	33.35549172	5.023934174	12.88147185	2.831973351	38.60244013	40.94330845	43.54843727
Zm00001d021835	9.738088633	8.946702114	8.286254491	7.623819464	18.85679242	10.14817434	16.20739957	16.82722596	14.63963938	10.20843367	9.417686856	8.829405397	6.230778492	5.651900426	5.714198263
Zm00001d021836	0.068424594	0.448141354	0	0.017067237	0.414733429	0.352083859	0.975440494	0.594032296	0.286914105	0	0.017257122	0	0	0.060007554	0.379719209
Zm00001d021838	2.153174782	2.280896118	1.87849687	3.063250861	2.743179165	3.576933303	2.524315825	2.471584832	3.015971362	0.599816435	0.516971167	0.260633269	1.448076547	1.731210119	1.45075511
Zm00001d021839	10.34941876	8.198973821	8.711730933	20.88116821	26.32070321	26.8358074	21.02501401	20.40361257	14.09623869	11.04691854	11.41817288	10.05997835	21.98354633	22.12303327	31.04381247
Zm00001d021840	0.624315435	0.385140049	0.855074638	2.399418129	3.206567157	2.294615493	3.186034582	3.364476024	3.221236453	1.370625413	2.072639824	0.875070919	2.238464408	2.4023714	2.003346171
Zm00001d021841	1.939625865	2.009536511	5.851470912	17.26476013	13.89169241	28.38153855	38.84042164	24.50026395	27.35478239	0.172584764	0.532581629	0.155948916	15.24603756	20.42263393	27.6872978
Zm00001d021842	10.20869662	7.476134656	8.724221238	5.906525365	11.05238144	5.53146858	8.09194974	9.022637195	9.033760126	23.9496236	22.2167308	26.21993363	5.335060073	5.399432621	6.485371696
Zm00001d021843	0.09279118	0.467483341	0.576605761	7.136383323	4.401575755	3.751502447	6.397163212	6.228267352	2.517619723	1.066452799	0.624067496	0.171316431	3.841943488	3.356791365	6.329476779
Zm00001d021844	4.855626822	5.513149906	5.170851904	9.721646243	10.95049159	10.15399855	11.20164014	10.47098847	9.326658949	1.843702838	6.299052387	2.481863536	8.468627605	7.690102535	7.04716757
Zm00001d021845	52.4570309	60.26639399	64.9105749	85.66131648	66.98485835	83.8076945	36.3871286	34.92249867	33.783292	7.43720483	26.49831037	9.339029717	28.10400249	24.72836305	21.63054652
Zm00001d021846	42.64143686	42.99151141	43.96841772	23.40734516	30.80224918	22.8788922	26.49792768	27.86792873	29.29587059	35.54408821	37.25461632	35.24108791	18.4934589	19.94880003	18.79267379
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Zm00001d021850	50.32072074	49.05428373	44.84956278	78.57097634	28.5782098	62.4801362	34.80853226	44.35040097	25.46392784	0.68397408	2.251397067	0.457810536	58.97433686	75.35123929	74.04076899
Zm00001d021851	5.181252217	2.99958116	3.750595558	3.015522068	9.294383319	17.46186116	13.36193144	16.24326809	11.72606546	0.25072986	0.848238018	0.020138793	1.098566072	1.594349649	1.408230597
Zm00001d021853	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d021858	88.51506211	84.48473833	73.14252231	70.10003451	60.87567125	71.68888039	62.40852015	56.82586681	64.71454499	46.382601	51.39209355	49.91889074	52.00716874	52.3711808	49.30643772
Zm00001d021859	0.174604601	0.231489622	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021860	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d021862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d021864	7.842018796	8.566757884	6.078127394	6.543654944	7.040154769	5.887825606	6.533959364	6.012918722	6.519642473	5.208876553	5.161977649	4.096120606	4.998285483	3.861385613	4.379608803
Zm00001d021866	7.542749749	8.577513294	7.733675062	9.624074673	11.43903768	9.39195367	8.449290418	10.14424383	9.490137293	5.03130366	8.405005596	3.623401594	7.085216938	7.433813827	6.926048153
Zm00001d021867	12.92445019	12.72985284	12.56105764	10.20258459	10.44378759	9.637768771	9.45995931	9.925427895	10.69605978	13.03807724	13.18405535	10.71668819	6.72338499	6.828289781	5.867086044
Zm00001d021868	6.098584265	6.880307136	5.938944524	9.480327019	13.88806119	10.63493168	10.44725066	13.24327815	11.75120391	13.12799638	19.15945486	14.41863796	7.471384759	7.540970474	8.053278454
Zm00001d021869	0.17588722	0.080556583	0.11923263	0.678018452	1.053441891	0.568099219	0.112104119	0.250639943	0.138038551	0	0	0	0.357860813	0.280456359	0.406699258
Zm00001d021870	0	0	0	0	0	0	0	0	0	0	0	0	0.59556398	0.856914446	0.903738646
Zm00001d021871	4.028335204	3.880736079	3.975830953	4.658671905	4.490933576	4.02650255	4.595988148	4.288511539	4.414484707	1.474185537	3.09396568	2.347082774	5.665656569	6.542689268	6.262514298
Zm00001d021873	2.613149607	2.849759556	2.877981078	3.96115058	6.760444917	4.984395966	5.324945649	6.045559455	5.554638189	5.625700098	5.786807691	7.095615094	4.790454971	4.471611882	4.556298584
Zm00001d021874	9.859859615	15.44489404	13.69549344	35.1336834	25.98362307	24.97143337	29.33560967	23.47777644	27.89633623	49.1369743	82.64686596	65.07490978	25.12670897	25.70478143	27.68411932
Zm00001d021875	16.40251729	15.74465764	13.78648821	14.69098814	13.23055272	14.34083929	13.92026977	12.99456379	12.40776071	12.85374599	14.99145739	16.55047936	20.65414754	19.35625721	19.5973797
Zm00001d021876	0.502050963	0.389129259	0.575954229	0.866957791	1.882804193	0.425825393	0.902533161	0.558793092	1.905132542	4.047941517	1.899307115	4.620317038	0	0.084671676	0.491141053
Zm00001d021877	1.396837429	1.311621703	1.290778592	1.804415704	1.734423705	1.653479224	1.677633699	1.215485645	1.681590024	1.685181721	1.551342679	1.876511727	2.29027649	2.225353276	2.077261915
Zm00001d021878	12.16674406	12.81948176	10.86100865	12.67749474	13.89968691	13.99233718	13.20790347	14.30750945	14.12295719	52.77563641	33.06094605	81.80376528	11.78988714	12.91214704	12.36231298
Zm00001d021879	0.012806777	0.354864013	0	0.07986028	0.210935086	0.258885883	1.616189593	1.660021166	1.753168105	50.93910046	25.69426187	55.32129332	0.100318359	0.063176572	0.170273385
Zm00001d021880	0.008305731	0	0.010322387	0	0	0.010175657	0.029115742	0	0.01024327	0	0	0	0	0	0.067217913
Zm00001d021881	26.97362871	27.93417997	28.46553794	58.84985661	54.52756865	64.70750518	55.33610039	58.1437682	60.74524799	50.02673951	60.93807949	49.8672505	49.14346165	48.71898153	54.79254976
Zm00001d021882	44.86190094	33.92774773	51.34951926	45.59341725	328.786237	73.94431669	372.8645276	235.2994928	264.0217349	575.8421693	229.2263476	309.506102	11.55890425	17.31818019	14.51793109
Zm00001d021883	0.080747861	0	0.046317082	0.410567471	0.973943164	0.471806539	0.058063923	0	0.007660347	0	0	0.006880678	0.2849798	0.047663883	0.028724783
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Zm00001d021890	97.999905	101.3661792	94.38980844	51.66377626	43.66450961	53.23383767	54.68550347	41.6984166	43.34035701	35.34535355	43.51115804	39.91650875	59.7826121	58.24437015	50.21878694
Zm00001d021891	25.40608748	22.62691709	33.58691683	22.66356073	20.44585493	17.63776444	10.33710434	12.35353616	9.760036428	10.03926636	7.921681025	9.003404787	11.39238285	10.57104419	14.74260728
Zm00001d021892	0.176973902	0.130024583	0	0	0.019432423	0.018068104	0.086164169	0.03556504	0.018188159	0	0	0	0.264052639	0.161670838	0.204605981
Zm00001d021893	10.06603394	8.01131199	9.36465779	14.82853843	23.42001255	17.88680904	18.83293208	18.5810797	19.11346953	4.164397571	6.22625076	2.413686896	10.29977833	9.228329346	8.574784616
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Zm00001d021897	1.022335674	0.446043692	1.652560753	4.433377507	17.51200403	4.404219496	9.954993699	12.89908033	14.15748128	4.211477354	6.277467797	2.82013975	0.014954594	0.021974907	0.084977484
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Zm00001d021899	1.466104019	1.809069763	1.886822292	10.3767501	6.560299339	11.05059779	11.20064779	10.69646179	9.407693832	0.574781485	1.004172842	0.288542753	12.75850746	17.11621573	19.88417621
Zm00001d021900	0.193959897	0.259098856	0.292186582	0.087963043	0.139402156	0.417648179	0.741737915	0.63074431	0.260952377	118.2361822	27.6386307	195.5421065	0.637987672	0.663649755	0.930952817
Zm00001d021901	163.834948	112.6533472	232.9259105	37.44057773	117.4324348	29.26200717	121.6563241	146.8653664	206.1211361	994.7054719	1240.715751	985.1591448	6.083633817	3.637168409	5.615222709
Zm00001d021902	2.62856232	2.593937955	2.660577464	7.130992757	8.10534269	6.780991553	6.665417597	7.547860313	6.717433146	2.345181495	5.288144785	3.054390294	4.677505051	4.359416498	5.224220342
Zm00001d021903	0.003596747	0.018120463	0.004470047	0.278113795	0.350703859	0.436244168	0.037825186	0.086737155	0.048793647	0.947456756	0.004535613	0.007968625	0.060373124	0.02365728	0.191283177
Zm00001d021904	7.24164592	7.412218968	6.868686851	4.551477915	4.657670749	4.945149076	4.45419982	4.193095895	4.106119786	0.915733432	2.566101436	0.756689472	6.767283011	6.880771881	6.776286306
Zm00001d021905	27.74547474	24.0518942	24.8117425	20.80043401	10.45702318	15.19195659	11.77283902	2.915607496	6.11716027	0.085509685	0.078185327	0	49.50347049	44.38293431	52.90108529
Zm00001d021906	485.7567341	464.8554476	605.8552202	1712.572995	579.1291587	1401.063523	1262.11739	735.5381047	922.1290322	1.879276066	0.7384456	0.623738571	2068.227826	2043.25337	1492.008769
Zm00001d021907	0	0	0	0	0	0	0	0	0	0	0	0	0	0.009245458	0
Zm00001d021908	10.13547858	9.661050474	10.81103383	11.97280251	21.59008527	13.17719624	14.59353077	17.53264787	16.65122038	5.366221771	8.115236759	4.151636824	7.474281768	6.740902897	8.463678351
Zm00001d021909	1.908897069	1.13959283	1.659296707	4.926522049	4.652489125	6.056183371	5.9309322	5.907241262	5.674573357	1.947881632	3.047239986	3.190218907	6.593563813	5.721386125	5.906449546
Zm00001d021910	0.023150181	0.015904221	0	0	0	0	0	0	0	0.133516738	0	0	0	0	0
Zm00001d021911	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021913	9.650830208	7.736228734	8.431711145	7.497896356	10.21480076	9.70286688	10.04816157	12.16411539	10.8691767	17.67404855	15.36213937	18.83510455	8.102295236	6.243685949	5.272190547
Zm00001d021914	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021915	1.600402384	1.490431654	1.588659464	1.776059363	3.122937891	2.197492783	4.595935233	4.170159759	3.658945962	18.84553286	9.782939028	13.29639849	4.917390989	3.828495362	4.312101507
Zm00001d021916	0	0	0	0	0	0	0	0.018626436	0	0	0	0.017112285	0	0	0
Zm00001d021918	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021920	0	0.468543394	0	0	0	0	0	0	0	0	0.234555981	0.206045885	0	0	0
Zm00001d021922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021923	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021924	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021926	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021927	0.940595794	1.313708861	1.21527127	1.405361414	5.141557086	2.783915696	3.231966331	2.706225811	2.27408975	0.55228888	2.383986723	0.474551182	3.011771714	1.653866243	2.454853646
Zm00001d021928	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021929	0.138841238	0	0.609684792	0	28.72216091	3.027771347	14.89326369	27.29914229	15.57049219	266.0492	102.4820657	234.0149045	0.341809168	0.436314237	1.819220076
Zm00001d021930	8.13395427	6.470650568	9.168539303	14.32107037	35.70482278	20.62039381	32.81874521	29.63044303	27.82499996	11.02240004	14.19849224	7.686483408	10.69936309	10.78301785	7.932728321
Zm00001d021931	13.87266786	11.58226662	14.67225873	16.16543974	17.62149815	19.91440695	12.46467098	11.32048222	11.76233225	0.205338279	0.530117553	0.194034241	3.871189718	4.089951143	4.728580548
Zm00001d021932	4.764728078	4.638731065	5.576364729	8.446343395	5.856721763	9.163549201	3.841240042	3.608499297	4.438319477	13.09044543	10.01058639	17.94664095	2.746014317	2.939238555	2.530487154
Zm00001d021933	15.41556999	18.60582453	18.80623753	9.259302785	7.72843278	11.45993251	9.41419817	9.67505233	9.492391255	3.443196791	4.784268639	2.717291719	8.588659506	8.84393633	8.394474352
Zm00001d021934	0.0108073	0	0.067156718	0	0	0	0	0.221529435	0	0.3428161	0.204425272	0.011971836	0.193499443	0.011847341	0.099957705
Zm00001d021935	42.70538609	22.2160105	49.46532172	4.2539521	17.78877389	8.688485715	28.54995043	45.10120176	26.84347877	16.44577678	24.06354335	4.053149274	20.04042187	14.3042917	22.81999953
Zm00001d021936	41.91261449	21.82101223	46.82475188	16.8888627	57.57787475	26.36760253	42.22676862	59.01320276	44.99834746	79.16554568	119.5618045	54.13719162	19.39456637	13.74625038	29.43589504
Zm00001d021938	8.560996176	8.292571303	9.746170259	21.9963629	17.12184679	18.16568888	20.77008818	18.10249647	15.6265533	6.329028169	6.731252998	5.017154085	19.59581985	18.28373908	17.68283883
Zm00001d021940	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021942	0.055996862	0.171282905	0.079534932	0.17958049	0.21081166	0.117606545	0.158907097	0.279723517	0.138119322	0.297882919	0.232016902	0.407630858	0.214842126	0.00876939	0.101734308
Zm00001d021943	1.585717963	1.944474219	1.825011593	1.340476905	2.170344136	1.138954666	1.409256598	1.578758797	1.349660162	0.111658501	0.355570007	0.061851634	0.209312402	0.128537725	0.367952333
Zm00001d021945	0.265909835	0.742636326	0.373578768	1.009312382	0.708367289	1.430581265	0.722751608	0.42517893	0.570331433	0.015944935	0.007289583	0.044824781	0.582185825	0.716075348	0.982433139
Zm00001d021946	9.301656472	9.189611146	9.878284742	2.04358029	3.534024289	2.756565575	2.724390797	2.398445247	2.453156357	0.078702563	0.657931624	0.036122534	1.605572305	1.313698476	3.072566926
Zm00001d021947	14.22060498	15.5704254	11.40918027	11.37426792	10.81859839	12.43128384	12.07408625	9.176096713	11.28470999	4.769615301	5.553553215	4.269954833	4.562018128	4.722481865	4.862525847
Zm00001d021948	3.897500898	5.966221962	4.570584145	1.91939047	3.212997767	2.007936893	2.078597205	2.409999448	1.084588614	68.45922237	28.73310763	40.30750024	5.088333431	4.360219961	5.753870183
Zm00001d021949	9.16519522	6.584534018	7.761328809	2.598445891	8.358429337	3.470420178	6.613582496	6.870696347	6.879052582	125.7545442	51.69200996	88.30986501	1.603288013	1.516672934	2.775500599
Zm00001d021950	2.988692328	3.38600335	3.310001486	8.198647671	5.691334319	6.814635455	6.236400877	5.512402216	6.533253151	2.450703651	3.697826026	2.185595179	11.45232397	11.31275597	10.41905629
Zm00001d021951	27.47896466	32.04918062	32.93668258	17.83861705	12.5992868	17.78770155	17.69572059	18.94449529	15.00870024	12.39488268	15.03845255	5.960659492	56.39481159	55.97046966	50.1167998
Zm00001d021952	21.54975966	20.94010683	19.86482685	15.58734673	18.97615056	15.01389222	8.779372147	10.40698426	8.385859919	31.77326716	23.82603705	22.1864138	13.91790361	11.1476721	13.11927177
Zm00001d021954	6.119008355	6.659632715	7.207262278	6.898656504	7.13250073	5.639155041	6.640726709	6.018475627	5.761350571	3.335788959	3.27411048	2.275198574	8.445881041	6.855896878	6.537597194
Zm00001d021955	82.71458195	69.17197224	69.8729234	52.14284759	211.5913283	73.42146018	154.9305615	199.404502	159.8617884	615.7766172	452.455229	668.0951954	77.18077874	65.08194316	87.47555251
Zm00001d021956	25.51907126	24.95255164	26.41877395	12.8193585	13.01311147	12.46833658	11.80770361	10.71178973	10.48546777	32.4346138	26.17529067	37.74349664	12.00063037	11.26340771	9.662920468
Zm00001d021957	0.625208868	0.559966495	0.949680627	0	0.20137441	0.017021476	0.324691808	0.569582796	0.068538305	0	0.140161501	0	0.062189227	0.015230576	0
Zm00001d021958	4.111601221	4.220177797	5.152294009	6.122005184	8.144712092	5.838955325	7.200382541	9.655733804	7.670519847	6.043910907	7.969472791	5.921747157	9.080383361	8.026185814	8.546079865
Zm00001d021959	0.465913522	0.134130241	0.314335292	0.099611509	4.332446459	1.076380449	4.028707663	3.980652642	4.826644947	17.01896674	10.99523982	15.23284986	0.193652528	0.058371516	0.184683296
Zm00001d021960	4.176998279	4.059280519	4.96705378	7.29892379	10.48636403	7.355363559	7.769888779	8.172051746	8.631101644	2.158282636	3.54334238	1.920435323	3.014139801	2.869829368	2.999741354
Zm00001d021961	0.175047809	0.330710046	0.282814913	2.335938768	1.349309341	2.069515046	2.270431372	2.121231524	1.554353976	0.084496926	0.011037045	0.009695501	1.988223814	1.813394101	1.74046074
Zm00001d021962	19.82984089	23.80673848	23.51142229	51.96080128	31.32281568	48.06010958	44.05201642	38.74886429	39.80110236	20.81266114	14.18295568	28.93397688	90.42884775	92.72836886	86.2123727
Zm00001d021963	0	0.036174306	0	0.107459054	0	0	0	0	0.035421057	0	0	0.031815909	0.128559242	0.062970112	0
Zm00001d021964	0.025990939	0.032735684	0.323016155	0	0.136987501	0.127369826	0	0.031339156	0	0	0	0.057583165	0	0	0.090147217
Zm00001d021965	0	0	0.077523877	0.051863635	0	0	0.036444495	0	0	0	0	0	0.046535513	0.079778104	0.697138479
Zm00001d021966	15.19567148	15.64245556	13.70994717	13.80656792	13.29701116	14.46977037	15.23499769	15.08084414	13.35259007	10.7473519	13.28458393	8.961454488	13.17299421	11.79943698	11.17161779
Zm00001d021967	0	0.155968929	0.646383415	1.297295535	0.391605572	1.213705227	1.30229649	0.895891099	1.40503525	0.204944407	0.374779665	0.192048202	4.766939413	4.072523559	4.065987887
Zm00001d021968	0.394995523	0.064490523	0.209087718	1.587335238	2.072219963	1.532424609	1.73509465	2.099136598	1.407290523	1.210586548	0.645687812	0.243087841	1.800792372	1.675901188	1.885872708
Zm00001d021970	0	0	0	0	0	0.019844943	0	0	0	0.089359647	0	0.197379263	0	0	0
Zm00001d021971	0.433830857	0.350263827	0.207371641	0.707533494	0.894097019	1.785302123	1.520794079	2.561854906	1.234693303	0.184099777	0.056110218	0	1.941882636	1.499908107	1.51756373
Zm00001d021972	8.28328041	9.151858338	7.726343633	6.631639932	6.258953307	7.919015602	6.999939303	5.614122473	7.188608643	7.370067042	6.479312682	6.375549642	5.447086299	5.887130079	5.172316914
Zm00001d021973	0	0	0	0	0	0.009414914	0.008979672	0	0	0.052992933	0	0	0.068796176	0.008424332	0.035538644
Zm00001d021974	14.36219881	14.17301478	15.93767928	15.03943986	23.21641412	15.88245021	24.41401074	28.82289737	26.88334593	9.348029868	13.61970048	7.70886832	5.375663689	4.238168922	6.057943615
Zm00001d021976	0.034713247	0	0	0.014430952	0	0	0.006760405	0.062784412	0.007135177	0	0	0	0.032371032	0.006342313	0
Zm00001d021977	18.000458	3.042017982	9.231586368	3.01219668	84.06466287	17.8099105	69.54379018	83.63083685	78.40096693	349.6952761	243.5418203	320.3034787	0.662937156	0.399650312	1.159092885
Zm00001d021978	0.548139096	0.69038322	0.981771035	4.644562787	4.694648879	6.113038203	5.208776434	5.005580222	3.837336837	3.112834868	2.825874029	2.37523767	4.465083799	4.798277994	5.051149848
Zm00001d021979	6.450866295	7.84409667	6.000204911	8.487713889	8.939016906	10.09412014	9.336161941	10.36525423	7.78423527	30.05937556	13.43095184	68.0766498	22.07465647	24.82572657	24.08148362
Zm00001d021980	0.244027837	0.171546398	0.232748627	1.302296081	0.770206394	0.716131428	0.145888922	0.205285134	0.174973256	0	0.064407962	0.044006064	0.36198312	0.105760512	0.288690631
Zm00001d021981	0	0	0.021866988	0.109717953	0.3709417	0.021556155	0.082238543	0.106077196	0.021699386	0	0	0	0.05906776	0	0.040684201
Zm00001d021982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021984	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021985	9.916133271	7.249412389	9.875615937	20.65853605	52.88570804	30.525529	35.02475508	39.6305916	40.11072487	5.985453329	16.42477155	5.284902979	12.88178072	11.6914587	12.4963775
Zm00001d021986	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021988	0	0	0	0	0	0	0	0.012612392	0	0	0	0	0	0	0
Zm00001d021990	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021991	1.810128533	0.203987794	0.047360696	0	0.03765963	0	0	0	0	0.065696465	0	0	0	0	0.03304351
Zm00001d021992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021993	9.049767703	9.956712617	2.670730887	2.463270747	1.934373834	1.212847788	1.732347207	1.735199603	1.530600039	1.385311261	1.27274168	0.813120672	1.291541289	1.138177549	1.272951308
Zm00001d021994	0	0	0	0	0	0	0.006296743	0	0	0	0	0	0	0	0
Zm00001d021995	1.150161171	0.905395157	0.860902904	0.489010609	0.671644739	0.064050218	1.114878678	1.969932627	1.30563505	3.082395237	2.142621793	1.795317583	0.819042816	0.730718185	1.420407586
Zm00001d021997	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d021998	0.398868969	0.025118847	0.272643541	0.062181509	0.367897868	0.195467625	0.081563719	0.372732519	0.122979015	0.783901147	0.289217276	0.265109366	0.133904155	0.109313543	0.138344088
Zm00001d021999	43.51076442	45.932715	47.53903243	28.06480011	32.29100216	23.12029985	24.45286194	29.4782926	26.93488911	10.83952738	17.93651859	10.70550471	16.77400255	15.85089364	17.79005464
Zm00001d022000	6.491950136	6.763715468	2.675515152	6.782782686	6.617597947	6.187217726	5.659591222	5.498167717	4.722503518	2.560611364	4.856969819	2.669532249	4.180290417	3.756676177	3.692222194
Zm00001d022001	0.525816689	0.521786961	0.653486529	0.655775765	1.469661938	2.557268426	0.595798115	0.768503321	0.58952528	0.21975391	0.401861645	0.22946019	0.8736934	0.89082893	0.626337541
Zm00001d022002	0.114499447	0	0.142300249	0	0.844870984	0.112221991	0.026758521	0.469404918	0.028241915	0	0	0	0	0	0
Zm00001d022003	7.911911758	8.047056197	8.004389018	11.016923	4.382768228	8.34651057	2.863161731	1.256348456	2.499409439	0.102643849	0.231019961	0.031709323	2.152559763	2.259329653	2.210695658
Zm00001d022004	0	1.628821459	3.214447251	8.064269541	0.730291473	3.621433975	0.215876175	2.004859	0	0	0	0	0	0	0.213592055
Zm00001d022005	24.70614174	28.22393107	30.98570286	18.17745385	14.27544354	17.93341421	7.217281707	7.280986762	7.323214028	6.319589717	14.01035827	17.13302749	20.0328117	18.16592327	17.64909777
Zm00001d022006	0.311837373	0.312422986	0.44040046	0.185616157	0.0653691	0.008682806	0.091095493	0.017091131	0	0.283458621	0.277053293	0.07850893	0.190339655	0.139846532	0.30317006
Zm00001d022009	0.13249654	0	0	0.195288289	0.682463279	0.19184028	0.394092894	0.740708553	0.683329919	5.614935061	4.10111316	8.312726059	0.336972461	0.026408611	0.041777477
Zm00001d022010	4.597251276	4.458373929	4.57319778	4.635280083	4.984354389	4.048560306	4.867634804	4.968991895	5.259742365	5.22242527	4.853537874	3.434561945	3.004023489	2.844802182	2.588979881
Zm00001d022016	30.69109803	28.40195561	28.99724268	13.31903855	11.59354673	14.55784057	12.34781325	10.69140512	12.54763659	6.526478402	9.735036467	9.262545231	9.576739559	9.557492427	9.226625408
Zm00001d022017	5.557367561	2.05218058	6.947621229	0	0.983099703	0.47048124	8.03870206	6.588466549	4.485738542	32.02758036	17.74488469	25.05627924	0	0	0.012685242
Zm00001d022020	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022021	0.392148552	0.31266024	0.532075611	1.206972552	1.886714426	1.20770058	1.034160497	1.275371708	1.078179681	0.843508035	1.029855068	0.553965205	1.091028153	0.749344335	0.91507333
Zm00001d022022	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022023	0	0	0	0.261305286	0	0	0.061206272	0.126317212	0.129198644	0	0	0	0	0.229684087	0
Zm00001d022024	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022025	2.073879796	2.887012886	3.323520312	13.91920057	10.71482872	10.76491127	20.05623242	20.59726953	13.46141556	15.50541481	15.72578466	33.7649982	20.61181852	21.44829893	25.90134074
Zm00001d022026	0	0.006532234	0.025782473	0.071150178	0.109340554	0.076247946	0.078783339	0.162592679	0.108735657	0.972786201	0.804439812	1.683346414	0	0.051169188	0.059961351
Zm00001d022027	5.441234973	6.298656865	7.374775891	9.610333486	9.241771384	9.581942157	8.734707626	7.205602644	6.930357918	3.26779457	4.852017102	2.090480869	10.55881501	10.86089565	10.87255631
Zm00001d022028	0.419067974	0.268235207	0.446111281	1.053854722	1.260517334	1.041560353	0.875003632	0.867708796	0.838784863	0.241607829	0.461317984	0.454711687	0.787990628	0.758758209	0.911415545
Zm00001d022029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022031	2.857739111	3.345086473	2.887525017	4.951163983	6.195848674	4.742516279	5.309528899	5.894102298	5.413494239	2.320013414	3.244328887	1.490760468	3.361783224	2.286650055	3.551045213
Zm00001d022032	4.136726816	5.150846974	7.924087516	1.455143809	3.928884182	3.407582055	6.527648891	10.55854	8.081375159	88.45541967	60.66648898	87.06708647	4.866521427	7.157530372	4.987006222
Zm00001d022033	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022034	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022035	0	0	0	0.048645278	0	0.047786397	0	0	0	0	0	0	0.032735841	0.064137889	0.01127376
Zm00001d022036	0	0	0	0.07387422	0.015609927	0.116111835	0.096901091	0.014284572	0	0	0	0	0.636334825	1.311677259	0.356110151
Zm00001d022037	0.343153462	0.1555931	0.341177706	1.574915291	3.237430003	0.7399215	1.876562172	2.317083807	2.132945078	0.321820335	0.623127635	0.258488286	0.307199794	0.466459325	0.285647206
Zm00001d022038	0.331353636	0.563264602	0.319654597	0.323664242	0.247308875	0.218590369	0.222023158	0.201165513	0.137169543	0.418642373	0.280513051	0.043636328	0.508223008	0.378482393	0.69384836
Zm00001d022040	11.55621361	13.7177792	9.704659361	9.695194641	8.307566684	9.770327079	9.728988933	8.675317543	10.35758926	9.294349433	9.170931884	10.96927688	12.27483638	13.65569853	10.86882018
Zm00001d022041	5.050967751	4.948545771	4.333903226	4.402717589	10.88970325	4.104662923	8.492199567	9.776562131	10.5299296	11.99121113	14.39038167	8.57906833	3.053585279	2.429958467	3.376305867
Zm00001d022042	393.2482105	382.0698057	407.071941	367.3364379	403.4194027	324.7639803	383.9447175	408.5466119	392.5923948	397.6095397	401.8281568	343.5936879	420.5710403	399.5292058	380.5688306
Zm00001d022043	7.063470859	5.700072732	5.59519673	11.46476941	12.878872	10.38638711	11.75160419	12.51487782	13.01353338	4.280275728	5.845701208	4.743495989	11.13980605	9.853447347	10.28286164
Zm00001d022044	3.984147076	2.966445334	3.968357965	3.663858179	9.329111813	4.119000144	8.336158997	8.081776582	8.248392102	32.95885559	13.55338118	34.36362485	3.255267423	2.928789273	3.130398866
Zm00001d022045	1.269163672	1.311404183	1.508408293	3.642082256	3.912879113	3.653258203	4.827006838	4.067240619	3.533166603	0.887938501	0.893458507	1.027141984	1.909733339	1.897843696	2.728087437
Zm00001d022046	0.54484433	0.702703052	0.452325603	0.834433629	1.510487555	1.236226395	1.464296389	1.390123641	1.51321826	0.985876365	0.533163355	0.671151851	0.568238816	0.616390366	0.768495565
Zm00001d022048	20.81209494	22.44990165	20.57730925	18.51523861	20.63427521	17.83703246	18.93634258	17.80047116	20.33973897	2.921359118	7.24354256	1.260323288	13.10417049	11.31621486	14.84334719
Zm00001d022049	8.637031781	7.713197021	8.429626352	7.171011368	8.063906537	7.368223209	6.685483518	6.079908185	6.624812247	0.319669385	1.584508672	0.288292636	2.989633308	2.49632854	2.378864041
Zm00001d022050	25.63509168	27.31939665	25.59992087	12.99980166	11.44188609	11.02796807	11.41808018	8.598418299	10.26199218	6.210029348	9.794092963	6.166084309	12.33459823	10.90402099	12.80482778
Zm00001d022051	0	0	0	0.033695988	0.142402026	0	0	0	0	0.03726262	0.017035439	0	0	0.029618353	0
Zm00001d022052	0.122690561	0.320096232	0.108914422	1.978256891	1.605080788	1.556810359	1.648685095	1.405400447	1.167260053	0	0.066307171	0.038831724	1.951545769	1.99825156	1.671768584
Zm00001d022053	0.124425337	0.019589272	0.019329522	0	0	0	0	0.018753579	0	0.085801527	0	0.103374556	0.017404493	0.017049928	0.179815837
Zm00001d022054	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022055	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022057	0.042991302	0	0	0	0	0	0	0	0	0	0	0	0	0.047128575	0
Zm00001d022058	4.424650067	4.140401834	4.889047366	9.210006297	15.04747201	10.28807091	8.037482066	7.861788969	7.301379758	0.150409343	0.982328466	0.155326898	2.371057282	2.160502755	3.107125449
Zm00001d022059	0.050849435	0.064045052	0	0.009059601	0.39243789	0.142394322	0.704522565	0.656923335	0.824207713	0.691279011	0.824435607	0.217267831	0.040644394	0.063706213	0.344334907
Zm00001d022060	11.98783571	13.646676	21.20027343	32.85338705	41.24366509	32.41082062	57.48556997	74.43812057	50.77000506	164.5018405	64.81674459	69.11032681	42.24226422	48.30474899	64.86280639
Zm00001d022062	275.5937457	292.2415083	270.8442459	58.9040506	38.96628587	48.39469911	27.0769024	25.56462789	24.03787681	7.310218172	16.54641751	6.142354439	24.11871921	17.86704817	15.34664881
Zm00001d022063	28.36653031	33.59956262	37.73578766	25.35175073	36.90479181	28.35433605	26.8042208	36.73489046	32.83677887	3.319024786	18.5312402	4.197316727	13.69420745	10.32804177	15.68741647
Zm00001d022064	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022065	4.699169492	4.25680543	7.530377064	9.455439425	11.31382513	9.027371886	5.846766604	4.540245731	4.831568876	0.251958381	0.217578098	0	2.94159197	1.735675074	3.203405119
Zm00001d022066	1.951199583	1.422788108	1.574094625	2.620229551	2.689392635	3.182072991	3.119968155	2.321745947	2.643840977	2.195310611	2.12598017	2.507472006	1.077362658	1.243043811	1.172449909
Zm00001d022067	0.155134569	0	0.060250531	0.350677253	0.242739908	0.296970428	0.453186864	0.233821223	0.657676074	0.066861296	0.073361126	0.311480002	0.141050459	0.297611934	0.145727345
Zm00001d022069	28.28268281	22.25450484	27.98088417	13.44787253	21.70814781	19.21895459	14.30213097	11.56154679	13.22509016	6.06300221	7.712008815	6.990432171	7.156384794	6.119181124	10.25321266
Zm00001d022071	7.964295635	7.59189634	9.491899067	7.864664463	15.13514799	9.045569369	5.042080011	4.23967871	3.843788332	0.342209077	0.572372662	0.254752614	1.896234585	1.612135223	4.9117663
Zm00001d022072	0	0	0	0.008555028	0.054231379	0	0	0.020677868	0.00422991	0	0	0	0	0.033838931	0.003965332
Zm00001d022073	0.316741174	0.021564145	0.148947462	0.010676374	1.624292618	0.304148298	1.310396769	0.918667041	1.309137415	4.155867058	0.982359222	1.194859697	0.009579555	0	0.168252226
Zm00001d022074	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022075	0	0	0	0	0	0	0	0	0	0	0	0	0.008401181	0	0
Zm00001d022076	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022077	4.037598757	5.080617892	3.812696178	3.826052475	3.734034255	3.813975714	3.540655277	3.649043823	3.695052679	9.586171423	6.937820193	13.24244331	3.179632337	2.432318349	3.389764278
Zm00001d022078	0.426393261	0.648928033	0.618243266	0.664723972	2.411211439	1.523637751	1.380541465	1.178221952	0.547772027	7.534603362	3.506223271	4.300253924	0.208752141	0.223975565	0.297835315
Zm00001d022079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022081	0.797858024	0.733740256	0.456441726	0.83710885	1.710440272	0.581836457	3.729188431	4.474227044	4.412292261	7.047657521	17.27180504	12.56302509	0.283437698	0.36790412	1.281156606
Zm00001d022082	0	0.009845037	0	0	0.020599035	0	0.009133698	0	0.009640036	0	0.039427935	0.025976625	0.05248216	0.128532476	0.262074643
Zm00001d022083	58.05484413	63.16934478	53.21309021	24.47184318	33.77041162	26.44236442	25.25947013	26.67672695	25.24198529	23.92223311	30.0454029	25.7067296	11.8049815	9.402325456	11.21912959
Zm00001d022084	1.978397488	0.894491933	2.521803303	0	0	0	0	0	0	2.763517539	0	0.112388664	0	0	0
Zm00001d022085	0.260569897	0.831411498	0.161918517	0.27080956	0.080112449	0.117052385	0.050745988	0.07331053	0.010711832	0.059894808	0	0.009621584	0.291586082	0.361818103	0.602508719
Zm00001d022086	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022088	0	0.003788552	0	0	0	0	0	0	0.022257984	0	0.00379315	0	0	0	0.006955253
Zm00001d022089	3.708210508	5.458300856	8.106649884	20.28190143	38.02925225	33.66247145	15.87042625	23.21821821	25.67633044	82.50552832	25.80345744	14.64945838	52.5450189	69.64494407	45.91949977
Zm00001d022090	0	0	0	0.726945228	0	0.129838234	0	0	0	0.073080951	0	0	0	0	0
Zm00001d022091	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022092	2.636216618	2.953253526	3.45739966	1.255632666	16.66979922	2.872670919	8.389885296	10.98959748	9.949610081	18.30677835	16.32107335	7.777633171	0.281659346	0.217832656	0.581996956
Zm00001d022094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022096	11.59117394	11.00600813	10.98505037	13.14902765	13.61325883	12.50835303	9.969584654	9.323926785	10.56795386	1.02924462	2.496209583	0.814970104	4.027492771	4.142716648	4.154915368
Zm00001d022097	0.265947747	0.25839939	0.228531416	0.640613319	0.652792037	0.698190813	0.715635759	0.544226954	0.564138208	0.014671432	0.091986827	0.015151106	0.418346291	0.474795766	0.697521942
Zm00001d022098	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022099	2.471537864	2.002712027	1.138437974	6.466562536	2.231805209	5.1242604	4.018953922	3.646990315	2.728361749	1.38253269	0.741030842	0.842417687	12.82293108	11.78488436	13.54783892
Zm00001d022101	66.20993288	60.95144978	84.8619012	20.57020496	20.78372886	15.21829748	14.32582152	19.86990126	19.7973999	21.04448509	43.95238594	34.7669197	40.18748067	32.76165662	36.04744882
Zm00001d022102	0.357885705	0.255429743	0.237216751	0.714143241	1.28894958	1.242300377	1.630938851	1.093206032	1.324116989	0.032905559	0.300870237	0	1.121359667	0.928506942	1.213709827
Zm00001d022103	7.220698457	8.217663282	7.68236513	8.099354994	8.118421844	8.356024593	8.861809918	8.690297936	8.249786307	4.865627275	5.560015366	5.077928595	7.666210536	6.99388046	7.461587543
Zm00001d022104	0.051850445	0	0.021479962	0.053888021	0.239121987	0.105873149	0.545285206	0.395958949	0.746036416	7.818460732	3.3455363	14.57956975	0.183737323	0.227361113	0.049955158
Zm00001d022105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022106	22.50955453	21.2303065	21.30312902	31.93221034	35.01065363	38.98475516	33.33101788	28.80996207	37.65723162	81.0683352	70.87110149	97.7682482	16.40353147	15.29943113	15.93444533
Zm00001d022107	545.1175733	548.2229131	592.6079663	444.4106588	365.5458549	495.3844756	448.5786861	328.3297868	354.9023538	46.58380049	54.32954234	31.92639602	821.7731798	785.7079859	761.7066632
Zm00001d022108	9.499488989	10.455863	9.969017672	17.67747967	13.11287815	18.39782838	13.56456221	11.55796379	12.46098714	3.121689932	4.679272587	2.458486163	18.85101272	17.13201636	16.3159238
Zm00001d022109	0	0	0.019182218	0.096247078	0.020337405	0.184368093	0.225442237	0.148885317	0.090417171	0	0	0	0.272031791	0.308789932	0.419346976
Zm00001d022110	5.291467909	5.938773338	4.520102265	7.201100392	6.027629619	7.935399634	5.725551685	4.771098948	5.447841395	0.85946029	1.213536252	0.354325779	4.467991132	3.956804092	5.342989316
Zm00001d022111	7.916002862	6.835995466	10.52529389	15.40901121	18.3444477	12.88491289	13.93460496	16.33004795	14.43555317	0.762669525	2.511725589	0.340322978	5.7412535	5.085437959	6.807746771
Zm00001d022112	31.42078665	34.25927307	39.9313325	84.85279099	76.5413662	80.00914871	55.73581244	60.91315803	59.96274948	20.42001217	33.8312777	14.26045972	92.26751792	95.46121995	98.31994122
Zm00001d022113	1.799534703	1.96112418	1.698769537	4.16544752	2.527765964	3.634657782	3.113857106	2.244354416	2.3307314	0.199990961	0.401693941	0.165900794	3.665693192	2.725836113	2.841803109
Zm00001d022114	11.00201019	10.88401303	11.37463563	10.88294217	9.726906436	11.79535205	9.918828617	9.961793402	10.75508997	5.780054823	8.551027955	6.234493881	8.884409584	9.943338098	9.103187527
Zm00001d022115	8.396679404	8.151484318	8.792044984	11.04458882	14.50497781	10.01257899	12.62278223	14.06178345	13.17758476	9.959351119	9.560204324	6.607861624	8.200055546	8.592696458	8.922087898
Zm00001d022116	0	0.084097532	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022118	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022119	2.304949871	2.658144429	0.044759351	0	0.03796387	0	0.050500011	0	0.053299546	0.019868162	1.053648204	0	0	0.015792294	0.058293301
Zm00001d022120	0.064486952	0.121832333	0.013357429	0	0.056647347	0	0	0	0	0.355752556	0.108426821	0	0.048108647	0.047128575	0
Zm00001d022121	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022122	21.69844238	24.53171734	17.56959041	11.73725275	15.82550638	12.74588278	18.19948091	18.91838856	18.76710787	88.13844247	65.13689082	77.3148262	7.902361992	5.34347269	10.2093838
Zm00001d022124	135.5574633	115.4221349	148.9203297	235.1210642	373.6847	193.1503799	248.448834	289.2672817	251.9824861	27.98099444	98.28297228	19.1552109	78.09944573	65.08004224	130.1994748
Zm00001d022125	1.900595169	1.749978823	2.007248599	3.207927747	3.661527679	3.654295535	3.269313289	2.944110543	3.38348584	1.867488658	2.338422364	4.132473964	1.639999664	1.687067994	1.983585405
Zm00001d022126	6.488999591	5.949478922	4.768602172	16.57767107	11.98091388	13.16426482	13.49760693	14.90982536	13.90786071	6.214552468	9.504288551	8.661580978	29.87546978	26.35076423	29.02081296
Zm00001d022127	11.32632972	8.191548698	8.137916388	14.07052855	7.520347788	12.57540018	10.39139879	9.442518226	9.548783249	15.07170458	43.90865186	44.06081194	6.931381761	6.256661437	5.933573463
Zm00001d022129	0.08935447	0	0.111049998	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022130	49.2807086	50.29558033	44.65491282	55.34018816	98.11393117	81.41939232	77.34824898	96.54643174	92.40808757	255.6690241	240.2161473	268.262496	34.29098009	33.72049507	41.27073151
Zm00001d022131	0.14770841	0.13780688	0.2651602	0.354785448	0.699217313	0.462461031	0.747921538	0.903706396	0.613964983	0.264074026	0.572592541	0.442392634	0.177534191	0.10195161	0.683084315
Zm00001d022132	1.374886496	1.37916434	1.383727453	0.853527632	1.391686151	1.116275094	2.119793068	2.202189215	2.282657387	3.871281031	2.145966407	2.964603705	0.777272402	0.786072509	0.845558984
Zm00001d022133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022134	212.0073482	177.8667568	225.026332	228.9042523	258.5864897	181.556658	230.1207426	266.6268114	221.689102	39.54464238	168.1320686	39.94455301	98.51649987	93.12740753	118.3844716
Zm00001d022135	0	0	0	0	0	0	0	0	0.143188306	0	0	0	0.194885984	0	0.033557987
Zm00001d022136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022139	15.51896359	12.56452499	14.63321237	14.72124661	152.5544411	40.36167571	111.2840906	117.5476105	79.05368711	257.3535987	116.3535936	155.2978645	23.53623038	21.62378261	31.10029305
Zm00001d022141	1.132086205	1.577862714	1.535514795	3.518971591	3.536137413	4.421376621	3.619351456	3.603146716	2.813614094	3.415912419	2.637793488	2.011610641	5.568955056	4.699544967	6.145597379
Zm00001d022142	4.218716734	3.636022567	3.359657179	4.75860455	5.378544781	4.154208128	5.064166321	4.87413822	4.701207991	3.172267463	4.875095987	4.453992654	3.448014371	3.413285149	3.096241227
Zm00001d022143	0.271066052	0.328107058	0.330319057	1.14589786	1.308074542	1.022156384	1.32455195	1.417738725	1.263392067	0.004855127	0.146495566	0.01754852	0.835146787	1.036173318	1.09889771
Zm00001d022144	0.027308332	0.030095578	0.046665954	4.90857575	4.42137847	5.980339314	4.168215883	1.819251718	3.068975871	0.009415673	0.004304585	0	3.804583158	2.765370604	4.633214324
Zm00001d022145	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022146	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022147	0	0	0	0.037847214	0	0	0.017730119	0.009147834	0	0	0	0	0	0	0
Zm00001d022148	20.00914236	21.40865451	18.00069299	14.98372072	13.65566528	15.37524019	13.4424204	13.20270997	13.6825829	60.13578915	32.72396415	72.67903012	19.69776405	20.97473498	21.1011233
Zm00001d022149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022150	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022151	1.172133036	1.020996602	0.789629556	0.956339657	1.024826762	1.368919453	1.228833611	1.373699685	0.702517625	0.634539415	0.897909614	0.53393621	1.005193172	0.936680419	1.380475573
Zm00001d022152	8.357224134	9.165407412	12.12586729	22.12031386	31.16075742	22.75434349	21.75672356	25.69296931	29.3230976	3.195879061	9.879599541	2.599119157	14.02475376	15.71904132	16.8734094
Zm00001d022153	0.555410291	0.386980303	0.651101542	1.080782955	1.223184443	0.99735516	1.027962039	1.032253778	0.9877889	0.409258944	0.771588253	0.775254567	0.481936642	0.297952895	0.98368865
Zm00001d022154	138.7885369	133.1644646	113.4022003	54.13483798	64.4279366	73.24781338	80.75824908	68.8653155	87.31832964	93.44937452	66.96256281	72.9151835	20.8312299	18.13085392	20.50483728
Zm00001d022155	0	0.006965603	0	0.110357087	0.109307381	0.06097985	0.387738761	0.533475606	0.218257903	3.317910674	2.134060907	1.807277464	0.068076071	0.430448607	0.447575584
Zm00001d022156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022159	24.74499915	28.01084924	22.76044231	14.90147123	16.65350258	16.07239952	15.75200372	15.23161383	16.24407276	18.72791656	19.47051565	15.68342185	12.74511215	12.30525041	13.54023631
Zm00001d022160	25.07127898	31.25798453	27.65091227	26.99151894	37.78551638	29.95933474	36.66482738	40.28041981	32.97300465	22.91476809	33.13112685	26.07518977	24.30495403	19.85762488	21.37608616
Zm00001d022161	6.622759815	7.902690629	5.230667123	12.3441782	10.07144126	11.96027907	23.31218244	18.52015499	21.4364826	9.560881423	9.071365404	8.161669972	15.19027975	15.05052528	15.66598712
Zm00001d022162	0	0	0	0	0.036172402	0	0	0	0	0	0	0	0	0	0
Zm00001d022163	10.76413245	9.928946137	7.616498167	26.89811284	30.60975204	24.22527732	28.75164619	23.84237385	24.289345	33.3572543	33.17518002	37.1646383	11.29806691	7.96716678	11.26391205
Zm00001d022164	12.77312366	11.61337811	10.09517438	16.75148078	13.85883545	15.6243729	13.45617652	15.11270194	15.55589392	3.578299435	10.57042792	4.753343198	19.25160566	18.70626004	17.00566934
Zm00001d022166	0.56894428	0.967045168	0.604111991	2.2871339	0.982573982	1.861014682	0.664811396	0.293055933	0.313365437	0	0	0	2.75682957	2.712777875	3.173934787
Zm00001d022167	0.076977668	0.135735122	0.057400844	1.95846546	1.176580706	1.772993717	0.665618206	0.538341769	0.930361179	1.528774499	1.708455048	2.217081562	4.668814168	4.523069409	2.972489432
Zm00001d022168	2.777451587	2.40987838	2.761460006	4.438945659	5.516658786	5.230165415	4.279188829	5.457587915	4.579844019	0.198621819	0.207552922	0.011395314	3.292238696	2.695158707	3.341936186
Zm00001d022169	4.736376022	4.828415901	4.948680315	5.259734458	5.283093977	5.535548987	3.122261837	3.132455982	3.600141363	0.184458684	0.560973901	0.186808508	1.36326932	1.308404294	1.596716447
Zm00001d022170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022171	0.035695128	0	0	0	0	0	0	0	0	0	0	0	0	0.078260505	0
Zm00001d022172	14.39472877	14.01186264	13.17213259	17.92904462	19.38810929	17.64702375	19.46624461	18.0705237	18.03080287	14.09904839	15.48625636	9.992163309	16.63388708	17.42804969	16.06652649
Zm00001d022174	14.66785046	13.3055675	18.28753469	30.67860757	57.82664172	36.98886385	39.45757325	46.95084036	35.44159242	10.25214185	18.3192043	4.208213289	16.29571079	11.60648258	21.07893462
Zm00001d022175	0.062461377	0.108171711	0.019406796	0.75951642	0.421797892	0.583493467	0.866710171	0.658999278	0.75106396	0.33381008	0.511977703	0.190277667	0.31453329	0.171180887	1.218609154
Zm00001d022176	4.780101048	4.800624418	5.154230677	4.813811215	4.879017978	5.255558069	2.75749394	2.463922121	2.984831067	0.373100207	0.654871181	0.371920102	1.62175439	1.416605015	1.474464447
Zm00001d022177	7.888140046	8.507511262	9.142177026	8.943405524	15.14870828	10.00413476	11.9203098	13.55569639	11.29733927	10.27288177	10.32641635	6.995623852	7.299815614	8.621897593	9.333719817
Zm00001d022179	16.0479626	12.25352302	14.22741244	8.429467107	26.17007109	13.43687755	25.02315811	27.69942967	25.77833268	5.298066996	10.70622051	3.500012892	7.360282197	7.754431046	7.856253697
Zm00001d022180	26.42733218	26.78428309	10.85321097	16.02715969	23.22684577	14.00090719	16.95940853	24.36999311	17.9064574	1.947055522	7.40258675	1.464986239	5.682318477	6.270024027	5.754605863
Zm00001d022181	4.003765932	1.266961589	2.710747181	0.989555756	32.01637069	7.2316554	29.52125041	30.12265216	19.32111125	10.81477404	6.886735608	4.718365696	6.776239615	9.59335438	12.55483518
Zm00001d022182	3.550237993	5.018059186	3.571818374	7.709825377	5.316537977	12.35127675	8.375924401	3.88667545	5.990801575	0.124352089	0.41216494	0.043697695	6.905157449	5.485719451	7.290479681
Zm00001d022183	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022184	2.37292614	2.702977804	2.167048715	3.221689077	3.17686226	3.619240762	2.76889434	2.551727032	1.817560134	0.239796872	0.709975043	0.220121694	2.92592176	2.207370909	3.42114658
Zm00001d022185	15.91720019	17.23069127	14.19550089	10.09004835	12.00515	9.816884117	9.62405085	8.734074242	10.23026346	13.28013718	13.41791139	14.00347583	9.161078461	9.008455381	8.292043908
Zm00001d022187	0	0.070425234	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022188	30.86166265	32.78316224	31.79030129	23.48735097	19.21949075	20.8265747	14.52186698	14.35059843	14.66555057	3.554647448	11.23401815	2.962787268	25.20753931	22.06331322	23.31541339
Zm00001d022189	16.51799916	17.11861189	15.073125	12.47896574	12.57342992	11.16115781	14.78420092	14.03007867	12.08995361	20.21688622	25.98159033	32.28142562	19.65142216	19.00227121	17.71803059
Zm00001d022190	2.953022539	3.923453092	2.808464333	4.053415429	5.207825439	5.685991186	6.569829222	6.985649635	5.135295117	5.525468582	5.977470334	8.93602751	9.893431577	10.72818297	9.435606612
Zm00001d022191	0	0	0	0.173728077	2.123904458	0.511982205	4.06928161	5.038898409	6.430030312	23.71269441	12.97381367	19.06824196	0.022268631	0	0.138042027
Zm00001d022192	0.432401073	0.347623884	0.354448279	0.080317086	0.060611899	0.090170294	0.161253401	0.244048935	0.079423258	0.050753393	0.127616763	0.020382736	0	0.020170776	0
Zm00001d022193	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022194	1.384544817	1.870873973	2.461422098	3.476359252	3.829907751	2.493834563	3.482107316	3.593178252	3.098427834	0.088520589	0.670631888	0.20314383	1.282574593	1.176033363	1.81273901
Zm00001d022195	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022196	0	0	0	0	0.04351173	0	0	0	0	0.364345613	0	0.21948366	0	0	0
Zm00001d022197	10.04821541	10.05331151	9.92000669	16.55596206	16.78309596	15.46607232	16.66939508	17.2011091	13.64891385	4.567332509	11.92156267	4.765930895	9.312160714	9.02936652	11.19169302
Zm00001d022198	0.004104243	0	0.020403062	0.040949072	0.070303252	0.005028259	0.028774849	0.064334179	0.03037002	0	0	0	0.00918556	0.004499215	0.023725326
Zm00001d022199	4.918059293	5.634615055	4.534243325	3.795653771	4.054470805	4.629915794	4.834777203	4.69181668	4.135662346	6.767363979	6.814008207	9.026228033	2.887543806	2.34157312	3.384801055
Zm00001d022200	17.47104465	18.56308799	17.40260519	37.36719669	30.32847367	36.44001013	80.51657913	73.36579893	68.40884812	48.52540605	51.16905992	49.6781989	80.63629443	86.79277436	84.60923173
Zm00001d022201	0.328307838	0.128732669	0.207860237	1.533510975	1.624267064	1.510229857	2.048427212	2.001730035	2.295676081	0.085432195	0.328080794	0.006861972	0.890740209	0.960871984	0.923855803
Zm00001d022202	10.16239422	10.6553915	9.162373909	8.280331553	8.287246254	8.707694777	8.288569845	8.478829881	8.78304982	8.954603173	8.771996125	8.140558591	8.175807456	8.517279435	7.790827464
Zm00001d022203	11.90623873	11.89377412	14.20224991	23.40512015	8.238284405	12.02125895	5.453117208	6.913587038	5.386480869	0.866417057	1.14429444	0.397664049	42.23560232	42.11850799	36.67271203
Zm00001d022204	0.423034408	0.5588043	0.871972969	0.79781927	1.672229682	1.580106805	1.145365668	2.301594945	1.259759907	0.910726544	0.455392649	0.262883447	1.316252582	1.922845841	2.32613838
Zm00001d022205	13.13115569	12.67733108	12.60273431	10.51896291	12.32787888	10.15218622	10.86339148	11.26498539	11.42916645	14.43762458	12.42503605	14.34369716	7.438799542	7.758541581	7.887373593
Zm00001d022206	0.394633556	0.710060607	0.483445292	4.070947779	1.857098591	3.446522448	2.608674405	2.399584275	2.892344728	0.824172314	0.469208685	0.424666941	6.76921397	8.151630332	8.499290284
Zm00001d022208	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022209	14.43675645	15.22773158	15.77038398	27.26159239	37.06929291	28.46231097	34.06928099	38.61743218	34.20315876	7.723273239	17.50218753	10.31439613	22.45897869	19.73927134	18.23007539
Zm00001d022210	1.683011752	2.315429639	2.12383122	0.516671815	3.138777997	0.919933394	2.844005063	3.559131003	1.564698346	2.428280706	4.865037543	7.371408591	0.840261255	0.652837868	2.155338009
Zm00001d022211	0	0.019814695	0.215071516	0	0.393858769	0.09637015	0.330894206	0.322479558	0.194020978	0	0.158709916	0.069709425	0.070419101	0.517383891	0.20007357
Zm00001d022212	7.875922808	7.227420227	8.324119582	7.192114747	10.17739069	8.683010822	9.014292982	9.256005663	8.799289555	8.30715594	9.356729838	7.89317539	4.571491585	3.915962056	4.876845419
Zm00001d022214	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022215	0.267555714	0.271764042	0	0	0	0	0	0.010406816	0.063865239	0	0	0	0.009658175	0	0.0598705
Zm00001d022216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022217	0	0	0	0.018532793	0	0	0	0.107506932	0	0.204944407	0.131172883	0	0	0	0.017180231
Zm00001d022218	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022221	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022222	0	0	0.013869918	0	0.088231133	0.082036566	0.104325466	0.01345665	0.068818053	0.184700919	0.098513512	0.086539272	0	0.048936773	0
Zm00001d022223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022224	0.107128415	0.093412132	0.215071516	1.284672234	1.422432296	0.898536926	0.279246698	0.149045174	0.640269228	0.352321549	0.135092369	0.410787681	0.147544784	0.207774801	0.333455951
Zm00001d022225	2.772047431	2.924617634	3.10954617	4.32147163	4.18623521	3.385110971	4.658889248	5.491181363	4.906061201	14.73387036	7.649551499	17.45740373	4.431442981	4.242502489	4.55756793
Zm00001d022226	0	0	0.014135316	0.014184834	0.089919416	0.097540703	0.053160855	0	0	0.078431304	0.014342649	0.062996558	0	0	0
Zm00001d022227	1.528008995	1.252473847	1.929157157	7.269764925	8.074809638	8.211135742	10.33499209	8.90995751	6.451031152	0.189552367	0.407802829	0.053735207	4.61399194	4.360466148	4.411793789
Zm00001d022228	0.014390773	0	0.053654683	0	0.018961954	0	0.016815618	0.069407984	0.230721578	5.180131697	12.03161075	18.18918846	0.112726156	0.205083713	0.066550788
Zm00001d022229	4.580751106	4.308469478	6.369654844	20.3568695	17.01568594	29.51037567	24.5500741	17.22655086	22.53895507	0.359140676	0.403009821	0.209792173	48.25334781	56.76851022	46.11739106
Zm00001d022230	4.972596294	4.435579144	3.716440081	12.96390595	9.971795906	19.86195041	25.72529797	14.91562708	18.17934996	7.233812568	5.325718007	4.369004328	14.91741996	16.37580594	16.46734083
Zm00001d022231	16.65246983	14.38762183	14.26878843	11.7077031	12.81437345	12.7539263	11.70210357	10.9120421	11.81538464	7.132123232	8.528683889	5.995760749	7.741044578	6.060328919	6.402636646
Zm00001d022233	32.47340008	28.63450889	23.76593355	2.694347834	8.028397698	2.522708791	9.229905792	9.381860074	10.15788447	25.5122895	19.70878346	13.33078716	5.60946824	3.866986815	2.341601788
Zm00001d022234	9.516251062	1.012880571	4.664099933	6.129146038	99.57659471	24.00161582	87.47006309	85.81582741	77.30448844	11.73809047	13.09891672	4.15727873	0.224978673	0.024488377	0.671488748
Zm00001d022235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022236	21.36895066	18.66205668	24.59427658	8.143571785	11.46203063	9.716949725	6.642100635	6.236976603	5.981403113	0.153416481	0.406799083	0.147870195	2.551832952	1.963294352	2.469256239
Zm00001d022237	285.4137934	267.8251504	368.2150766	724.4184249	397.6742312	615.0711862	74.35310081	65.42083267	67.60025395	0.901369917	7.930878142	0.189898088	626.1135304	690.2424432	745.1895363
Zm00001d022238	15.43017706	16.34809014	16.91526977	30.72661494	42.62906374	31.5662437	40.90805628	47.1567821	43.47505699	42.69535737	40.98100906	31.36376704	20.22612167	17.26085087	21.14921437
Zm00001d022239	88.20174884	92.01854847	84.05754605	46.40611456	37.90741941	35.09125238	31.42007332	30.36174935	30.62365959	26.63252575	35.84767494	25.38328524	35.77698889	33.19921206	34.30892033
Zm00001d022240	1.109006122	1.760751544	1.133195292	2.683417197	2.22278947	2.47337941	2.381852296	2.238883292	2.523525178	0.861691425	1.474818464	1.040337501	2.460178094	2.465708866	3.117370247
Zm00001d022241	9.992786808	11.02509571	7.859703449	14.75637005	16.48462248	18.60479138	44.90193378	56.68734817	44.79535404	41.07380809	37.53081311	14.53423952	40.30452458	37.98474953	38.8322649
Zm00001d022242	2.774569244	4.727961487	3.149951921	10.40491407	14.26940305	11.03278507	15.01006449	15.37308861	14.12534033	20.92044878	20.87185852	17.44155262	21.32557672	19.52294581	21.13361389
Zm00001d022243	2.715212306	3.596099326	3.158785827	6.465379736	9.471659102	7.229150397	15.94212844	17.64545935	15.32765727	14.36121499	17.72698606	12.7071332	5.713463295	4.903571856	5.805820404
Zm00001d022244	37.16145185	37.39194934	37.06227067	19.8539756	29.4626628	21.48355349	21.9955755	26.91718744	23.30485134	13.19003989	21.68391856	11.46933812	11.92606945	11.39003389	11.95621873
Zm00001d022245	0.715915573	0.780315848	1.035180574	1.759962148	1.024957586	1.51804823	0.876765975	0.664024017	0.602764367	1.120280205	0.529522527	0.160136869	1.140073193	1.071569945	1.034620125
Zm00001d022246	4.536833291	4.222510565	4.362770129	6.226228186	9.122965889	7.135680905	7.32387016	8.260505971	7.505172741	2.454234317	3.95957796	3.01407325	2.208808826	2.223731745	3.075497861
Zm00001d022247	2.208068709	2.623279464	2.948549185	9.306306931	9.935477461	8.595201829	9.981985745	10.5080945	9.47312426	1.133884866	3.623728695	0.87604904	5.301043869	5.218801325	7.549855249
Zm00001d022248	19.43381799	19.87189237	15.90403843	50.55573629	46.86744598	54.33730076	42.39833178	44.42161425	37.88693888	13.42862484	18.1920664	8.276575677	32.64283579	24.92005579	31.42783563
Zm00001d022249	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022250	1.252326771	1.263870355	1.466603355	6.167295743	4.072422012	5.163414193	7.025926526	6.746696517	4.385888072	10.6287082	5.122355536	4.312989236	19.38594853	19.55423502	22.8687733
Zm00001d022251	1.021586711	0.709572928	0.774848313	1.283446854	2.405146752	1.454045537	2.791207774	4.419991955	3.409140474	1.719731314	1.458757772	1.381299911	1.336521654	1.284590288	2.266657665
Zm00001d022252	2.681396079	2.18296205	2.569364886	6.22297275	8.131325711	5.875050897	7.165518108	7.028594183	7.083486409	2.701211565	4.057591777	1.687491196	4.113822643	3.817012644	3.684129021
Zm00001d022253	0	0	0	0	0	0	0.063581441	0	0	0.112566481	0.017154094	0	0	0	0
Zm00001d022254	0	0.014579991	0	1.487017357	1.952390864	2.212417115	22.07530389	13.32988856	14.50481775	5.300441982	2.817352975	1.295158022	2.085577061	3.261329282	4.015024234
Zm00001d022255	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022256	0.014065055	0.017714989	0	0	0.18532774	0.103389705	0	0	0	0	0	0	0.094435492	0.046255823	0.032522247
Zm00001d022257	21.84514938	20.31786562	23.74596833	17.64076312	28.44507283	21.49135629	23.06006207	24.45350946	23.11960111	2.584027981	12.60535279	2.565876367	4.29695712	2.832611869	4.784590702
Zm00001d022258	0.21016895	0.213058118	0.197491617	1.233851814	0.763241757	1.75215893	2.222221413	1.631751257	1.403454782	0.197951554	0.206852518	0.096533308	1.824124042	1.348651222	2.293531785
Zm00001d022259	0	0	0.056447341	0	0.00997445	0.00927416	0.468807507	0.44725106	0.364095513	0.05220068	0	0.008385588	0.042354789	0.066387095	0.428839862
Zm00001d022260	0	0	0	0	0	0	0	0	0	0.018199696	0	0	0	0	0
Zm00001d022262	0.007326492	0	0	0	0.193074559	0.05385573	0.402367276	0.326861018	0.162640736	0.191984365	0.092389414	0.340870121	0	0.008031558	0
Zm00001d022263	0.056029647	0.054887426	0.116056351	0.807476169	0.771084925	0.419491014	0.298255152	0.120104891	0.161233553	0	0.015701152	0	0.195063476	0.102369445	0.352679777
Zm00001d022264	15.25777218	25.99851847	9.879748192	11.38782952	6.960909915	12.79964542	5.423555754	2.665994945	3.684314654	0.675051456	1.979391859	0.224361074	96.64528277	135.2705292	198.5288049
Zm00001d022265	0.289903398	0.124914401	0.379255575	0.466215583	1.598327654	0.785115569	0.98951278	0.827899364	0.771514891	0	0	0	0.008537137	0.04181609	0.396909343
Zm00001d022266	1.494721575	2.586671894	1.042093185	3.122075552	4.723633438	4.406882766	3.25176681	3.736463144	3.821695879	3.301699947	5.102999916	2.813487872	2.284583429	1.691852987	3.020666307
Zm00001d022267	1.421618779	1.397159194	1.140383929	2.076537155	2.08037761	2.084735211	2.26270339	1.895952299	1.915293049	0.810994759	0.874623664	0.45096682	1.761972564	1.96928683	2.149112307
Zm00001d022268	3.152601483	2.926283924	2.005453742	3.270278486	4.281982242	3.642707426	3.797297307	3.350926446	2.948270688	0.906683018	2.779103853	1.216515169	3.076429675	2.710742895	3.351177641
Zm00001d022269	24.40540079	24.31622175	17.79916213	15.26043897	13.61439107	14.69797879	14.78985954	14.82326742	12.25890797	2.757642454	4.487914362	1.261147886	13.71409533	12.62715996	14.54488654
Zm00001d022270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022271	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022272	6.753619374	8.687724449	5.972358529	2.646464028	6.561208304	3.446022824	27.31575173	23.17762435	20.15160698	6.305523318	4.787806812	3.677368535	10.25464403	13.60859432	14.87504451
Zm00001d022273	6.267147111	6.367614907	5.321883819	3.483836689	3.137382612	3.099788258	3.147053768	3.435653814	2.870409436	1.372023876	1.63643568	1.060725478	2.596686358	2.237306194	2.192558116
Zm00001d022274	29.31616185	37.74886764	27.97589251	56.46608845	44.25557237	60.51366595	357.828395	416.479758	325.0588831	36.94712781	25.02837839	14.34333228	67.9533591	79.46687092	91.64813744
Zm00001d022275	0.761160529	1.008486295	1.203965059	2.14514068	5.470585437	2.821798834	10.84625589	12.62254201	9.606661836	1.608732095	2.680094638	0.383263223	1.803082869	2.308175609	4.537170927
Zm00001d022276	0.017826231	0.007484068	0.029539324	0	0.025446065	0.016379679	0.005207488	0.023285575	0.010992344	0.02048776	0.044958899	0.011519136	0.024935157	0.021170219	0.020609556
Zm00001d022277	2.121633607	1.35758344	2.136548772	5.351575279	30.87704416	6.209882823	15.83932186	27.03802914	19.16569041	30.44631209	55.96073807	18.99092222	9.863136861	8.929312734	8.81781332
Zm00001d022278	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022282	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022283	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022286	17.33602133	17.08018424	17.19606756	12.36350562	12.98719937	12.16616366	12.08102594	11.43324369	11.60735624	6.951363423	7.800583529	5.290849431	8.076596787	7.828753071	7.507541086
Zm00001d022287	0	0	0	0	0	0	0	0	0.234172542	0	0	1.262031043	0	0	0
Zm00001d022289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022290	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022291	0	0	0	0	0	0	0	0	0	0.419160871	0	0	0	0	0
Zm00001d022292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022293	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022294	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022295	0	0	0	0	0.071720729	0.011114222	0.010600423	0.065631305	0	0.012511536	0	0	0	0	0.146835679
Zm00001d022296	6.130598171	6.691976271	7.314360433	7.441927663	5.331455237	5.25757511	5.51597509	4.21350038	4.15840029	4.171185429	2.911965168	1.924172891	4.779367559	4.278767354	4.087302673
Zm00001d022297	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022301	53.37448062	52.70521429	56.34205101	43.99473888	55.25493755	44.45462661	42.73061956	47.72360824	45.84200501	9.989181559	21.68381931	7.434866817	20.96614719	17.35528071	24.42530285
Zm00001d022302	32.43769321	31.33737118	30.59455358	55.82002855	59.6841002	47.13323616	52.01856453	52.10394586	46.86745722	38.2308859	47.60455069	27.42222226	103.0409858	107.7198171	102.3803606
Zm00001d022303	0	0.037802348	0	0	0.06920801	0	0	0.009047418	0.055522798	0	0.037848221	0	0	0.074029627	0
Zm00001d022304	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022305	1.225088072	1.337493832	0.987325959	4.05321002	3.813537967	4.122560796	3.769448906	3.273657243	3.302148976	2.132287969	2.614144991	1.570439725	5.471678524	5.351412292	5.458277891
Zm00001d022306	2.957008058	2.060813967	3.77297774	4.560643856	5.636635651	5.63939777	3.501334126	3.636788208	3.221349743	0.027188011	0.509613877	0.076431584	1.941272354	1.609982782	2.928690484
Zm00001d022307	2.267891608	2.353527402	4.207964659	10.43725353	24.726964	13.6967202	15.8442016	18.06350895	12.52713671	0.704855532	0.966721378	1.326901797	2.680820633	1.785820611	7.625935029
Zm00001d022308	5.997959458	5.072513766	6.134939781	5.746829889	6.788526785	5.897352761	7.493171517	9.572230082	7.982209479	14.22008835	20.01765397	13.74422548	4.332299819	3.040290532	5.392616299
Zm00001d022309	0	0	0	0	0	0	0	0	0	0.015531207	0	0	0	0	0
Zm00001d022310	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022311	0	0	0	0	0	0	0	0	0	1.336172987	0	0	0	0	0
Zm00001d022312	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022313	0.094719866	0.079533347	0.140140628	0.585027274	0.754787118	0.591275862	0.374204363	0.467719589	0.461700795	0.018662044	0.062566318	0.029978962	0.540067576	0.276893981	0.391103895
Zm00001d022314	2.171397655	2.635923786	1.340432661	4.445159234	4.79993037	4.725460477	13.82983533	14.57241296	10.86149506	10.95435353	13.18660488	11.96357954	15.91400864	15.04952781	18.76217608
Zm00001d022315	0.032016941	0.112911277	0.039790749	0.119790421	0.033749614	0.24319583	0.29181201	0.061768229	0.102662997	0.04415664	0	0	0.852706051	1.410943432	1.406606226
Zm00001d022316	85.21973158	93.71782994	84.03882145	62.60609255	66.01953249	54.71092381	59.51736127	63.50499171	62.46552547	29.52622692	54.32353162	31.09066059	42.85453127	39.41863429	41.16096893
Zm00001d022317	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022318	0.050964525	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022319	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022320	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022321	3.643444148	4.704178522	4.54875929	5.524317289	4.515794833	5.304486326	4.830845125	4.097277674	3.826551735	1.210337949	3.26754963	1.925873961	5.752664279	5.886239954	5.217312472
Zm00001d022322	9.342990566	8.243036194	10.0270023	12.86712964	17.85878727	13.54508964	12.24661101	14.04051156	13.19160785	3.345367057	7.708882536	3.389558267	6.796916649	5.999055077	6.901342142
Zm00001d022323	3.126367447	3.487175068	2.074439796	0	0.034910574	0	0	0.015973252	0.049012858	0.968322607	2.188393663	1.056584129	0.311307698	0.24687701	0.168472803
Zm00001d022324	27.52488608	26.60069153	31.62603524	27.02243382	35.33333125	29.30166927	33.06282043	38.43100528	34.1582921	16.45085264	22.74793102	11.88872535	34.69107759	31.55134042	36.25143257
Zm00001d022326	36.27007674	38.28115976	39.89325074	20.47349834	10.21838634	13.1413756	12.19132293	15.37579648	18.73380333	1.488543591	5.494576723	0.59042388	74.9121968	76.30750109	67.67537273
Zm00001d022327	4.951685284	5.996177535	2.847594931	0.968398848	5.115666835	0.577018519	13.52060222	27.27446191	41.00505108	264.6530714	178.1292153	161.3848635	0.555533929	1.45124415	7.25536811
Zm00001d022329	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022330	1.915828708	1.696635947	2.425641262	4.816010325	6.21629901	3.836127045	4.645190161	5.255371339	4.529831183	2.700042721	3.265268855	1.95314986	1.828992372	1.85736323	2.675255688
Zm00001d022331	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022332	0.16750805	0.519328021	0.57649707	2.346206224	3.107008208	1.357611087	1.866993197	2.423718955	2.14529416	0.142166903	0.42246605	0.085642069	0.865139477	0.861640046	1.549297319
Zm00001d022333	5.029982292	4.824560382	5.978785245	10.87350457	15.07385902	12.68825765	12.16197492	12.13002741	12.47035059	8.87602628	9.270493218	4.228994589	10.14611365	8.582113421	10.90004587
Zm00001d022334	0.465091217	0.269768997	0.403090616	0.396870561	2.007811202	0.539810884	2.095177809	1.173240376	1.086795394	1.43479433	1.898391534	2.454012019	0.212289634	0.127462331	0.721661966
Zm00001d022335	16.99949723	18.25808917	15.99031712	12.50780788	12.101154	12.37078968	10.43043519	10.25846736	11.61914932	1.470869783	3.806269778	0.922839302	8.880995024	8.130948539	7.593489931
Zm00001d022337	26.99583412	30.7356863	29.88010819	29.75998212	28.51889425	25.70125448	18.79392582	19.41012578	20.96437991	3.556803956	18.42882076	5.037884569	24.51491744	23.28591321	25.2476207
Zm00001d022338	14.64750906	14.19887005	13.9027144	12.87163398	10.40694957	12.1236812	10.85187654	9.717733043	11.57025152	5.561468243	7.585711008	6.617467631	9.104447391	8.107031974	8.385799856
Zm00001d022339	0	0	0	0	0	0	0	0.028945384	0	0	0	0	0	0	0
Zm00001d022340	8.353458064	8.712458414	7.395306212	6.844893995	7.006949836	7.995685544	7.8171199	8.117900793	6.95284214	1.804107608	5.414913264	2.795762997	6.388317964	6.967382584	4.61927529
Zm00001d022341	31.57829643	28.9658507	28.24369522	24.20852717	29.50421836	24.98086876	30.76450265	36.07543108	33.61540844	33.13271804	41.70792707	35.23068353	24.88297375	27.50719938	29.40114673
Zm00001d022342	0.409718937	0.305412918	0.062351008	1.397383954	2.038265089	2.161508795	3.663953428	3.992551012	3.299899302	0.392089362	0.474491686	0.120413971	2.58250748	2.575727928	2.416790836
Zm00001d022343	6.984311024	7.352804059	4.885079627	4.055596841	2.998523374	3.75165775	3.973564424	3.445509047	3.635728035	0.912429042	2.549021591	1.308183502	3.713708482	3.49158552	3.79199968
Zm00001d022344	0	0.027230843	0	0	0	0.017658547	0.004210553	0.004344859	0.017775881	0.203756011	0	0.015966655	0.024193806	0	0.020830011
Zm00001d022346	0.049006693	0.041149408	0.054815097	0.036671413	0.012914702	0.014009311	0.062990754	0.015757578	0.03223405	0.108141296	0.012359803	0.010857478	0.053012061	0.034024477	0.037772284
Zm00001d022347	10.72363728	12.29547581	7.954554712	3.641104041	4.327764252	3.490835548	3.247451454	3.918005879	3.687135624	1.384111204	2.637309879	1.376054381	2.897928571	2.515765888	2.95344743
Zm00001d022349	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022350	0.057555012	0.077323468	0.095372718	0.717801146	0.586474133	0.521794462	0.789102246	0.730994837	0.742937527	0.814945935	2.656381043	2.027467216	0.420785258	0.353325423	0.443609657
Zm00001d022351	0	0	0	0.18333516	0.239273234	0.010594011	0.141459657	0.145971883	0.405247359	0.059629619	0.228992509	0.124526782	0.009676502	0	0.08997616
Zm00001d022352	5.626134039	3.993796819	5.303244556	7.344340905	11.38848174	8.269120902	7.008178966	7.548520737	5.988858002	0.237404125	1.405237471	0.301080965	2.220266663	1.747973531	2.911872601
Zm00001d022353	24.14345946	24.77048255	21.44147486	17.22581549	25.66212351	23.45371483	24.19147494	27.86214726	25.85512989	83.81336514	81.2392147	151.0648372	13.66625415	14.90969155	16.79440223
Zm00001d022354	20.66409782	17.70827738	21.63491397	26.46352484	42.82861377	30.61986132	34.97603002	41.7351899	33.85773711	25.51405343	33.84985589	20.00122811	23.53782281	22.10515088	31.63301225
Zm00001d022355	3.332961548	2.827812976	3.471673184	10.62515361	8.439336893	10.06440531	11.50066237	8.194979918	9.240499171	4.776731014	6.9573992	3.06550634	9.046691733	9.549251168	8.642388649
Zm00001d022356	1.446613051	1.865543847	0.460201781	0.080047746	0.260221832	0.024195207	0.028845859	0.005953195	0.097423896	0.027237104	0.012452051	0.021877028	0.071824177	0.027061912	0.01712439
Zm00001d022357	8.467358155	8.194819721	0.084390644	0.10521628	0.13827614	0.060502584	0.113006824	0.08187614	0.040603066	0.053919751	0.036327228	0.022794059	0.126643624	0.051881155	0.071368808
Zm00001d022358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022359	1.87277177	1.887010379	3.491229402	6.072663247	7.649719812	3.67104266	9.628668845	5.87115482	6.697976258	2.582861025	0.708487585	3.734228839	8.382766984	4.311296174	5.196431365
Zm00001d022360	1.147782716	7.591484229	1.777483359	0.89185504	6.073242991	3.607505383	0.603883946	1.572357794	3.85381097	0.082878618	0.750218283	0.019970601	1.27095644	1.218713863	0.715603799
Zm00001d022361	0	0	0	0	0.085780268	0	0.032601708	0.179422	0	0	0	0	0	0	0.021504506
Zm00001d022362	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022363	3.74554354	2.830515569	0.930994507	5.138407363	6.16912888	9.17760665	6.565001485	12.19393693	13.62691721	2.841147128	3.07011287	1.86711442	5.658367714	5.132495445	6.71205718
Zm00001d022364	11.20134801	11.96765961	11.25513208	9.457663296	16.0631846	12.20558303	13.51241733	17.66835838	16.51576241	14.62555758	13.74426773	11.10308416	8.426880716	8.304888044	9.44855727
Zm00001d022366	7.703576483	7.788488595	7.091711793	7.038303173	7.211054166	7.836475642	6.920257005	6.287775817	6.62035987	4.69208777	5.274818332	5.1819857	7.099276016	7.79149974	6.86718607
Zm00001d022367	0.377337667	0.594072734	0.216441398	1.067898114	0.831850053	1.182396271	1.416028541	0.988713786	1.145506445	0.570450357	0.722903026	0.426035957	0.876986928	1.105720409	1.057076603
Zm00001d022368	0	0	0	0	0	0	0	0	0.041630674	0	0	0	0	0	0
Zm00001d022369	2.427749937	2.726115775	2.526344686	3.10659875	3.781799576	3.606612043	3.476803881	3.816302824	3.896862017	0.922407726	2.291122219	1.009235919	1.043082937	0.669675985	1.071580479
Zm00001d022370	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022371	6.16941023	11.12675438	10.21387135	94.03427028	101.296591	116.5854824	41.59214304	27.56849885	42.21319664	1.883944332	5.633665821	0.124032535	107.8416197	109.4251392	120.6083137
Zm00001d022372	0	0	0	0	0	0	0.19402636	0.088984595	0	0.02544519	0	0	0	0	0
Zm00001d022373	36.56819067	37.46450033	35.25053198	40.7898289	34.7498936	43.77064475	29.63317212	26.1390991	23.04151969	5.231550147	9.437013129	3.336895639	45.30022545	42.84386819	41.89085911
Zm00001d022374	0.392111589	0.2579897	0.465497254	1.766327531	1.974121242	2.781962016	3.06366736	3.97290885	2.316864632	0.500429324	0.22140237	0.330634845	1.794436057	1.642398542	1.420899201
Zm00001d022376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022377	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022378	11.73592966	11.6847054	10.94188009	12.79043135	16.38097289	14.71085464	15.02908289	15.64944128	16.21493121	8.7762906	11.16134372	6.357807222	11.06382423	11.15587488	11.34333704
Zm00001d022379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022380	42.19955848	36.82768491	26.08601617	9.507529676	16.40667212	9.650986918	16.78644576	14.86046872	15.38748641	92.65061759	51.11075094	96.61809404	3.895727351	3.639937786	5.180467524
Zm00001d022381	9.762469526	10.60726587	11.27625305	15.55710252	9.459762675	13.20497876	6.239894874	7.021806348	6.359919226	2.609474483	2.931253218	1.526987836	28.30231703	31.41036171	27.08600972
Zm00001d022382	0.120984371	0.253967105	0.225539599	0.100590973	0.159414658	0.024703735	0	0.024313269	0.447621849	0.111238262	0.381412933	0.714778644	0.022564233	0.044209105	0.023312407
Zm00001d022383	0.465944456	0.920301247	0.776489803	0.832037725	1.47906179	0.687609607	1.979840365	2.119604782	1.214577334	2.409803335	2.109913713	1.243457387	2.121177695	2.22887858	1.873190741
Zm00001d022384	43.24688891	49.73055906	46.22576228	25.69812839	21.85895538	27.42857191	26.0290068	25.17349458	22.93572984	27.9005718	28.33869298	17.02572559	37.81062295	34.37623565	35.16983029
Zm00001d022385	0	0	0	0	0	0.038001434	0	0	0	0	0	0.008590115	0	0	0
Zm00001d022386	9.097822334	8.239184432	10.07868292	13.63809885	17.9600515	14.73803562	10.03914484	9.473111809	11.240282	0.439271526	0.998964674	0.551855868	4.377542012	3.885489144	4.248874212
Zm00001d022387	10.65847222	11.66521998	9.694982531	10.20636021	7.358770733	8.829609085	10.40165711	9.802814101	9.102637933	11.79750213	12.63961011	13.61091025	13.67306436	14.04099117	14.10250676
Zm00001d022388	22.83162109	25.19418093	24.43534508	75.80736162	44.31452169	68.60671081	72.87458227	49.43527085	69.12773428	15.95378354	17.73124236	13.16536152	150.8976519	142.9292868	115.2373506
Zm00001d022389	0	0	0	1.921145903	0	0.23590327	2.024979331	0.464349189	0	0	0	0.853204085	0.861890126	0.211082911	1.5583195
Zm00001d022390	0	0	0	0.050407006	0	0	0.070841849	0	0	0	0	0	0.15829985	0.13292139	0.257005074
Zm00001d022391	1.004676725	1.516337178	0.800799616	1.210694234	1.267952058	2.674667612	1.773330737	0.557147035	0.742381416	0	0.053456944	0.009391859	2.424049277	2.244547682	2.176055987
Zm00001d022392	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022393	7.497946096	8.294162972	7.32559308	9.841196805	13.31204775	10.07898633	11.54602262	12.48748421	11.92814348	2.596152522	7.257207714	2.513530533	5.631455029	6.433869765	6.660863779
Zm00001d022394	0.123205379	0.080462475	0.136106674	0.865028646	1.142400769	0.866527197	0.303927138	0.269604611	0.196967558	0	0.155365936	0.040438912	0.561695752	0.375172397	0.395672866
Zm00001d022395	3.214682912	4.065590071	3.34764094	9.742167483	6.179171648	8.634242535	39.50366656	45.02859783	43.03328892	14.33604665	11.4319903	12.93337239	15.93598932	19.80340875	20.21673637
Zm00001d022396	0.057898291	0.048615408	0.035978083	0.192555298	0.178008815	0.263044426	0.225513844	0.168712719	0.211238756	0.026617096	0.069969452	0.106895165	0.040493779	0.03173507	0.08088381
Zm00001d022397	0	0	0.012920646	0	0	0	0	0	0	1.41949328	0	0	0	0	0
Zm00001d022398	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022399	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022400	7.0146252	8.310617233	6.725896676	7.699574282	6.790850833	7.119911224	7.019393945	7.183060596	7.105610665	6.418928737	5.034418433	3.767646877	5.035850266	4.709642836	4.687838293
Zm00001d022401	0.048984877	0.089740559	0.07748179	0.199936846	0.258179048	0.130937841	0.286194147	0.118129224	0.142791856	0.749282094	0.443631694	0.764618156	0.438525204	0.390537764	0.406729366
Zm00001d022403	21.06531632	23.40879543	19.43374972	33.82174223	26.69700603	32.92353915	51.05683181	47.54078323	43.61119216	74.89579512	60.50854431	92.3757232	49.29532696	43.44238073	61.62200588
Zm00001d022404	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022405	10.57875376	10.15847952	9.296561139	8.448951534	8.200601117	9.507348801	10.05951941	9.138050184	9.57052109	13.9409516	11.60527151	16.5677654	7.357699376	8.309544782	8.131851036
Zm00001d022406	5.983094594	6.477098017	5.05242659	4.667938606	5.478743757	5.161338585	16.58416574	13.559812	12.88330941	5.999496812	7.012752945	5.229273922	22.20497157	24.87409501	23.53618289
Zm00001d022407	1.768287013	1.585352127	1.624885424	2.116712507	3.020143124	2.310653958	2.488506676	2.379393099	2.876837841	1.024782906	1.658959348	0.625205756	1.476693991	1.33978405	1.295635323
Zm00001d022414	11.18363038	10.4527079	10.30752929	12.06647718	11.8209394	10.80944765	10.58186063	10.45351956	10.39823997	6.671841012	8.783454041	7.317141656	6.698668123	5.947177261	6.045738414
Zm00001d022415	0.569634747	0.51816344	0.432632285	0.197339929	0.208493708	0.038771139	0.406766682	0.152633298	0.312230055	0.043645568	0.039907094	0	0	0	0.439050335
Zm00001d022416	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022417	7.878397303	7.449839957	7.643625216	8.211918557	6.212942285	7.915246755	6.8789604	6.173238178	6.589328579	5.427994457	5.97458062	5.095772282	5.385713941	6.015782199	5.586467505
Zm00001d022418	14.67570885	14.17788227	16.58038916	15.56217645	16.68409943	16.89934857	17.4626624	15.70538198	14.98768888	4.169017453	12.08396165	6.096406597	15.82099073	12.49510354	16.6072796
Zm00001d022419	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022420	167.5500416	107.1309685	235.6421668	261.3255812	304.3991936	271.9159267	426.5384862	523.6063073	472.5010774	1003.885359	1066.026189	950.4686608	480.1219617	522.1887238	576.0681408
Zm00001d022421	14.21877857	7.793964676	14.59273224	143.6419907	98.7040227	139.6683828	91.66489402	97.63834687	97.02514237	32.62746236	51.63191484	42.04416705	381.4911721	481.8574665	350.5614567
Zm00001d022422	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022423	0.008235683	0.04667793	0	0	0	0	0	0	0	0.113583648	0	0	0	0	0
Zm00001d022424	61.39713178	45.49873594	44.89543217	25.101639	32.24980668	25.22838028	60.12751129	86.09662778	115.7514873	263.2482449	215.4264745	135.0478385	4.270845137	3.902835078	5.301532798
Zm00001d022425	3.425665511	3.432484274	3.325591874	5.235438044	8.737755599	5.913076205	7.418200146	8.217836936	9.700972442	2.594481779	5.939119194	2.193322916	2.235748649	2.072078588	1.894621151
Zm00001d022427	7.311721033	7.459966008	6.56641405	28.27404335	19.99325166	29.32888011	19.12802956	14.60674184	14.61773661	1.649861742	2.761326059	1.275676337	20.82249177	20.45105208	24.10416148
Zm00001d022428	0	0.011775667	0.005809762	0.110772176	0.040037636	0.120270739	0.065548998	0.169099636	0.046121862	0	0.002947489	0	0.525732347	0.312600475	0.413453453
Zm00001d022429	8.190588144	9.148664716	7.578859528	5.814280155	4.646483184	5.260919322	4.297392501	3.992221049	4.392565958	2.678536459	2.440746888	3.792518014	3.849671427	3.87176378	3.960712988
Zm00001d022430	0.02267203	0.114222021	0.169061192	0	0.358484703	0.111105354	0.953721609	2.214321881	0.363491706	0.281416201	1.372327529	0.226035411	0.025370729	0.0994155	0.83878273
Zm00001d022431	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022432	0.349112204	0.216922669	0.208261284	1.021733027	0.864812306	0.84401483	0.826753564	0.757709735	0.774993907	0.282470195	0.199576233	0.087658949	0.890722508	1.178743898	1.393839062
Zm00001d022433	89.60789498	91.9791666	78.95803063	28.28634559	28.79012176	23.19301618	23.45897109	27.21330644	23.23463777	7.365844812	13.3292652	7.510441225	24.29169278	24.67448136	21.88677312
Zm00001d022434	23.81771163	20.24689784	18.77283338	11.79009103	23.46802967	12.8294366	22.62808548	27.12769304	22.25516389	30.53843286	29.47264641	21.67867868	12.67574858	12.00800353	11.14557043
Zm00001d022435	3.865200442	2.664541298	3.108751488	4.015709112	6.74095159	4.099665919	5.107283637	4.540227865	4.200747724	1.679048197	3.305356031	1.068581029	1.600578197	1.33459867	1.607501081
Zm00001d022436	4.73513015	5.815149152	5.534285143	6.415524917	5.094053763	6.254737158	6.338436272	5.805143274	5.683190936	5.203024492	6.144550058	4.495466864	6.476484695	6.636359629	6.895043485
Zm00001d022437	2.033157865	2.373127236	2.112939777	10.61263779	4.722863615	2.662682545	9.492739648	6.086546298	10.36483696	0.894398414	5.072498617	1.883338633	0.421690794	0.537990805	0.851082188
Zm00001d022438	14.07959545	11.80729352	19.59441167	41.76184468	66.51090071	39.41484082	48.96183792	65.76631845	53.93145693	24.14404817	43.25638749	19.53034014	49.67061605	39.78337196	55.83351796
Zm00001d022439	0	0.006577147	0.03893961	0.01302534	0.068807702	0.012795365	0.073223088	0.15111746	0.077282306	0.093626246	0.072436406	0.069416528	0.111028436	0.057245557	0.054336252
Zm00001d022440	20.87408601	24.03191692	17.33931654	16.95188668	13.39928534	16.78388938	15.52546408	12.60370253	13.17111208	2.830189175	5.66049508	1.896101977	16.85062765	16.35529969	17.15788868
Zm00001d022441	0.135024533	0.042515975	0.041952222	0.16839674	0.17791463	0.041355882	0.591660628	0.529128768	0.624460111	0.279331637	1.106756738	0.373935124	0.339967772	0.148018634	0.039026696
Zm00001d022442	0.912492282	1.24082357	1.043725679	1.691924714	1.478987614	1.483975086	1.547473869	1.538413824	1.2747396	1.414394836	1.405257715	2.298939005	0.840381055	0.478022376	0.392111109
Zm00001d022443	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022444	0.054836791	0.132821426	0.104848193	0	0	0	0	0	0	0	0.047873737	0	0	0	0
Zm00001d022445	135.4660455	143.9444611	126.5845907	91.06060715	59.93937965	72.60129649	75.79833696	81.93633743	79.33489753	52.99071763	60.32515149	55.54339625	75.42125497	76.16737359	71.82463239
Zm00001d022446	0.073798834	0.023237476	0	0	0	0.090413669	0.107792422	0	0	0	0	0	0.309687242	0.2224774	0.063991142
Zm00001d022447	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022448	0	0	0	0	0	0	0	0.025205499	0	0	0.026360649	0.023156533	0.327491891	0.252073018	0.217511175
Zm00001d022449	6.929195925	7.115639187	6.280211515	13.13639323	16.49979773	16.19456043	9.99380917	11.74532912	8.851587876	6.200922224	7.623741452	2.767548495	11.52383594	10.5113376	10.28560327
Zm00001d022450	63.26474399	56.30450716	61.84796991	106.8024653	140.6701509	157.9186242	144.2801092	163.7984917	134.5725355	144.6931699	141.3262055	134.5459113	84.80766846	91.6012662	91.61776022
Zm00001d022451	6.242572566	4.625796277	2.883496877	16.14186555	44.14354443	27.76226011	41.2865649	35.66601101	33.64385776	114.3202988	97.43016314	85.26489183	27.69805924	23.32434041	20.80978301
Zm00001d022452	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022453	0.011016305	0.013875076	0	0.027478114	0.319343142	0.539859215	0.090107864	0.09298209	0.013586159	0	0.013891913	0	1.393018631	1.352563505	0.82786284
Zm00001d022454	0	0	0.004156225	0.20853926	0.132195619	0.180274416	0.11332443	0.080647731	0.008248739	0	0	0	0.149692268	0.175971272	0.146922911
Zm00001d022455	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022456	17.32908915	5.0332373	19.54777096	44.93489589	349.7098009	152.5347385	283.2194337	328.4309204	200.7123398	1.109852791	4.001493652	0.273510407	91.0238127	87.56552195	88.3010986
Zm00001d022457	228.23226	81.75531394	262.8744393	14.61980034	489.5374653	121.29276	258.6608977	355.9951314	190.8287699	11.99730406	28.07019832	2.002929502	1.94463564	1.750855977	1.92782131
Zm00001d022458	0.401158704	0.256640443	0.245323774	0.047648356	1.392780694	0.405661328	0.171132394	0.368537969	0.125648238	0	0.064237968	0	0	0	0.044170877
Zm00001d022459	0	0	0.022037159	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022460	0	0	0	0	0.007269514	0	0	0	0	0	0	0	0.024694996	0.042335838	0.051027642
Zm00001d022461	0	0	0	0	0.064798044	0	0	0.014824097	0.151622509	0.101734994	0	0.02723808	0.123819198	0	0.369560354
Zm00001d022462	35.02597143	28.48406955	39.33400696	46.37795936	71.38311894	43.90442101	47.64394291	58.44632251	49.35976743	3.746140804	15.21498477	1.928372351	17.63279608	18.86932936	22.20794671
Zm00001d022463	87.34953838	74.23847769	98.26465808	120.1186543	170.8248298	108.7267264	127.5654863	137.8312108	129.5709149	20.7816621	65.60376692	12.58346281	69.42042646	56.02761901	75.93327477
Zm00001d022464	1754.808465	1916.112017	1959.03573	2574.575653	1076.242484	2229.994885	1280.021691	958.8200438	882.7733665	137.2472152	161.7463718	58.73061536	3928.949499	3659.196632	3520.027166
Zm00001d022465	1.758665919	3.34478328	1.791126366	1.269492929	1.148690433	1.154473907	2.113883695	1.853203409	1.280223788	0.952126543	0.92140817	0.68102228	0.975543349	1.132440757	1.042845691
Zm00001d022466	14.76168831	12.42898605	17.65145947	18.23030689	20.1750441	15.88793747	13.31060903	17.67970511	14.40415834	1.80221384	6.045885271	1.607280142	7.563554587	8.298605687	9.627271161
Zm00001d022467	0	0	0	0	0	0	0.154988023	0.011423698	0.011684285	5.148180791	6.296194479	2.182972615	0	0	0
Zm00001d022468	0.060927679	0.072803323	0.067954833	0.161714558	0.757524755	0.122493939	2.369482157	2.689946042	2.959388609	26.94755488	26.44588528	39.00917619	0.075172853	0.080491792	0.279956676
Zm00001d022469	6.933885468	6.961099496	6.979822575	22.86787651	24.93924436	27.01349355	31.95663309	36.39062421	34.10645793	56.1170018	40.04109693	43.87117888	19.69717437	18.84867868	23.54518596
Zm00001d022470	0	0	0	0	0	0	0	0	0	0.20740374	0	0	0	0	0
Zm00001d022471	0	0	0	0	0	0	0	0	0	0.078562023	0	0	0	0	0
Zm00001d022472	0	0	0	0	0.279284594	0.216397056	0	0.170381356	0	0	0.623664352	0	0	0	0
Zm00001d022473	0.074300184	0.109716074	0.1337345	1.217412805	1.286221751	1.170807025	0.335303924	0.206981737	0.442364921	0.123673349	0.200313269	0.116364182	0.725362272	0.502746012	0.841238873
Zm00001d022474	0	0	0	0	0	0.227707234	0.048262347	0	0	0.0854451	0	0	1.247917955	0.701802851	1.456426792
Zm00001d022475	3.654589869	3.085001519	3.446544982	6.528560152	7.333869202	6.514711413	11.45408612	10.66861903	8.674935357	2.525177896	4.814266725	2.368078196	5.168539424	5.057907443	5.07249748
Zm00001d022476	0.243694009	0.214853455	0.151431816	0.364709516	0	0.059711701	0.455610323	0.264455554	0.450813449	0.134437686	0.061461193	0.161971899	0.190890995	0.160287558	0.253569178
Zm00001d022477	0.421951664	0.318869809	0.891484709	19.7866169	11.56445098	15.30167627	4.683979969	2.035110645	3.22637724	0.232776364	0.053209459	0	7.035444173	7.447187526	4.536853464
Zm00001d022478	0.347205941	0.236874716	0.161815712	0.667572789	0.114373691	0.017723949	0	0.017443806	0	0	0	0	4.75954881	5.138361154	4.315237581
Zm00001d022479	0.226720297	0	0.394476114	0.537235867	1.643054889	1.416593265	0.847752541	0.492071529	0.223687204	0	0.057180314	0	1.141682817	0.845031754	1.048478413
Zm00001d022480	0.114681432	0.068419747	0.180033375	1.671142479	1.582674353	1.456767784	0.246851785	0.320226682	0.506184885	0.008324453	0.137005546	0.080235086	1.229287441	0.767540334	0.893220285
Zm00001d022481	7.721506136	8.180612212	7.067731012	7.170022868	7.474745056	7.543687252	8.471154235	7.707255945	9.374646105	9.702198722	9.569585847	12.14241856	5.880044078	5.81136822	5.318698232
Zm00001d022483	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022485	16.89282643	14.6441705	18.31768982	18.45584144	24.02649195	17.05101903	23.10379456	26.60282235	23.11836371	17.66544178	17.5045621	9.760942365	24.23461852	23.0405875	20.96538624
Zm00001d022486	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022487	12.71382516	14.34618589	9.326484367	9.166002761	11.16821989	8.107200931	8.670174121	11.22161267	11.30394992	9.417733739	12.81893123	6.145090392	7.83046264	7.269643291	6.283257939
Zm00001d022488	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022489	8.072385484	7.48577718	9.265514551	7.169199999	8.264270157	7.57605332	7.160272755	8.25508158	7.046589446	6.071287863	7.649810954	4.394176081	9.669950845	8.849232435	9.629254012
Zm00001d022490	34.27328838	35.90882634	35.10927673	38.3351777	41.16258164	37.11402399	38.86172034	41.31047856	46.49531689	22.68013384	42.84354461	16.02322422	30.63971383	30.75303584	33.00582297
Zm00001d022491	4.713770403	4.690129763	4.051802865	6.567733005	5.092175518	6.783517943	6.735706088	5.446041218	6.163364894	1.320529137	2.062446167	0.935874708	3.056801019	3.089516653	2.860123179
Zm00001d022492	4.209821153	4.070917028	3.930623156	7.129223047	6.412904696	7.670958524	7.203971019	6.512592647	6.246065259	4.081909558	3.846800577	5.042206089	6.456597782	6.161080425	6.411267264
Zm00001d022493	1.300944891	2.956504936	1.792559242	5.495276103	4.665566431	4.649841813	6.074007098	6.41779762	4.115701103	23.30922542	8.395250563	11.29092233	8.449964381	8.160009473	11.33283919
Zm00001d022494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022496	0	0	0	0	0	0	0	0.011384252	0	0	0	0	0.073957077	0.041400239	0.098240545
Zm00001d022498	7.425180044	6.978245432	8.59243112	10.30569673	14.67564603	10.66328537	10.34186708	11.18563637	11.93720284	1.90050976	5.649086212	2.077302222	6.252957637	6.41627709	8.507873902
Zm00001d022499	2.954654477	2.956110704	2.82066996	5.066760724	8.335823714	7.035365307	7.155613239	7.075002301	6.442959027	4.592540735	7.609578571	4.117685599	5.606135222	4.277303176	3.822320566
Zm00001d022500	0	0.010164681	0	0.070455247	0.021267835	0.306507141	0.273477138	0.243276213	0.218966532	0.211477464	0.050885078	0.151980126	0.496706161	0.389269784	0.643802263
Zm00001d022501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022502	2.274346846	2.37100561	2.510674109	3.557966118	3.802673264	3.892506742	4.42722798	4.333798368	4.667759208	2.249367572	2.594243203	1.451818417	3.755381389	3.989440451	4.150804912
Zm00001d022504	9.038351555	10.644454	9.050725228	7.578586151	8.912851933	10.03004122	9.968051063	9.310335972	8.081262704	67.65876896	19.24729175	24.85786173	10.16155122	9.670455325	10.40676679
Zm00001d022505	10.7768405	8.419807866	13.2108921	24.55371053	36.23098562	23.3101839	37.28892622	40.66623486	39.66412245	10.74961499	18.20329602	6.575310581	15.38075582	14.6325487	17.51294169
Zm00001d022506	1.820663733	0.798501568	1.798059249	0.141915802	12.18773395	1.692837374	8.395812046	9.91807906	8.921389099	22.17298662	16.50189178	13.97387999	0.127336324	0.017820317	0.413469519
Zm00001d022507	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022509	0	0	0.033120175	0.033236199	3.616817158	0.620338227	2.273222412	1.317466365	1.150321257	0.588066604	0.336059738	0.915157014	0.178930406	0.029214204	0.400537148
Zm00001d022510	4.033097266	4.268039387	4.993719594	9.480392878	8.467170716	8.039991443	6.572837906	6.407029032	6.859173301	4.939934066	3.198089373	1.768995523	29.68775817	34.58666776	30.85887474
Zm00001d022512	0.150627446	0.108409043	0.053485781	0.670914345	0.255180546	0.711794178	0.49449915	0.328650082	0.229995277	0.178062927	0	0.007945631	15.58750451	18.21858157	19.6370215
Zm00001d022513	160.5274044	146.3805031	169.2223103	131.5189838	163.2530917	123.4264905	144.4882903	151.7154498	136.2286974	44.92271374	110.0857274	35.3368692	70.35507552	65.21139738	93.72693331
Zm00001d022514	2.072197306	2.001691405	2.12792338	3.28519651	1.573464651	2.17297668	0.841320893	1.312822821	0.682213647	0	0.110724885	0	2.692230334	2.878021274	2.872861153
Zm00001d022516	156.6946962	127.8535575	127.1627246	222.83178	232.4580529	206.2355402	321.6066231	404.8526243	338.2688639	629.9903436	806.9557745	779.2017778	458.5716232	499.0539014	580.8785047
Zm00001d022517	16.68868259	12.940767	22.00823375	1.271930059	5.20869212	2.622860396	7.03207989	10.10202827	4.313856685	68.20074793	35.59574999	150.8461667	0.792280011	0.692981814	3.001350257
Zm00001d022518	135.4157503	120.4674656	140.8109767	59.14520237	42.17811884	58.59654649	16.56874212	16.00912532	19.25260744	10.81509365	15.86643076	13.51273299	21.65940351	18.03429613	15.03830678
Zm00001d022519	0	0	0	0	0	0	0	0	0	0	0	0	0	0.113108579	0
Zm00001d022520	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022523	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022524	0.047834968	0	0.023779776	0	0.088241424	0.011720876	0	0	0	0	0	0.010597881	0.074940412	0.052438372	0.066364501
Zm00001d022525	3.935855714	4.66996843	4.259810187	21.85314911	19.43058002	24.10182551	27.33539783	25.46517072	23.6913856	1.779441052	3.212958556	2.035611558	25.11353924	24.53763385	22.96287664
Zm00001d022526	1.862605579	1.887763577	2.694632053	3.41184879	7.458637693	3.931009724	6.554869232	8.053579422	10.92921512	11.36912467	29.42429255	17.98142367	2.076173595	1.842453873	2.203897159
Zm00001d022527	7.198494216	6.744116464	6.408483892	8.490637756	6.869712244	7.967331352	5.813887991	5.592797103	6.453334536	1.090257416	2.164291206	0.52120106	3.82836775	3.833903299	4.06321907
Zm00001d022528	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022529	0.253797659	0	0.063084096	0.031652543	0.26753252	0.196926677	1.206021106	1.417902893	0.626005804	27.36058568	15.44760143	63.09842831	3.834104361	5.202749652	5.09580946
Zm00001d022530	0	0	0	0	0	0	0.046812709	0	0	0.013813103	0.025259875	0	0	0	0
Zm00001d022531	14.96417232	14.73623454	16.14770279	33.36017736	34.15650588	31.31698195	29.29958467	40.50816747	33.74698618	17.80251978	22.131175	11.99809978	34.24977648	36.52617968	37.02725897
Zm00001d022532	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022533	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022534	16.64324129	17.49787885	16.75889324	12.70404815	10.27388737	13.32219973	12.62461539	12.00142743	12.40455673	9.45155385	11.43445409	10.10915915	10.29032886	9.390760208	9.661353157
Zm00001d022535	1.695303205	1.679899484	1.718694738	3.628906505	2.367931821	3.044514904	2.116307026	2.018756611	1.969574445	0.2468804	0.606382913	0.264394693	2.513754002	2.501020887	1.878842359
Zm00001d022536	5.750998771	5.87443549	5.123983271	6.371650202	6.435678293	5.275892343	6.302049061	6.370353724	6.238526187	3.9278376	6.974598015	3.703538263	3.695053947	3.710272521	2.804855614
Zm00001d022537	0.926195307	1.340287372	1.328638197	4.079752362	3.48592463	3.802505674	1.945763924	1.592006554	1.847051744	0.013589107	0.484579977	0.14189322	1.582228388	1.366372013	1.509383855
Zm00001d022538	0	0	0.020821875	0	0	0	0	0	0	4.344017734	0.25352742	1.057878962	0	0	0
Zm00001d022539	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022540	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022541	2.110203653	2.43064612	2.376001153	3.126614267	3.255802529	4.087848872	2.086423295	2.392194703	2.291060117	1.380535811	1.262285599	0.48949489	1.604531273	1.680587559	2.29371943
Zm00001d022542	45.24949184	46.46628221	39.09662471	18.16778773	29.09402558	22.1236631	37.00877813	37.3977175	34.95453548	36.81157711	28.22502219	24.13057221	7.369423353	7.773305182	7.920976704
Zm00001d022543	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022544	10.84695883	9.007267746	10.00670769	21.921647	21.09429273	19.0973907	16.51779476	19.71474259	19.86002029	8.030599129	8.734376426	5.404683128	15.27417606	17.8441848	19.23893854
Zm00001d022545	0	0	0	0	0	0	0	0.013010573	0	0.625023828	0.054427355	2.294964106	0	0	0.149699878
Zm00001d022546	46.00544635	35.25390518	43.57079746	49.2134612	92.30186166	38.73872785	38.74334696	55.67239284	42.59151811	35.99152503	36.73159483	11.42728473	62.48611782	58.54537149	74.41983204
Zm00001d022547	0.357987017	0.097488859	0.432882796	0.108599808	0.203978557	0.118535967	0.339168513	0.349987181	0.167053023	0.46703538	0.268419689	0.010717886	0.173231986	0.381831508	0.380323857
Zm00001d022548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022549	0.328200152	0.171049368	0.450083437	2.342986921	1.47630114	0.859640888	1.256299263	0.655009122	1.032840481	30.1241134	2.683025282	11.93496907	0.797854829	0.595505432	0.43178129
Zm00001d022550	0.649722008	0.488723233	0.482242864	3.421288215	2.080808487	2.763883191	0.337422299	0.326423688	0.389514723	0.012445469	0.102415037	0.049981427	0.878530579	0.544078395	1.043287925
Zm00001d022551	4.904186685	5.540351778	4.577150677	5.548109047	5.291664881	5.72688052	3.967986663	3.337501672	3.951882959	0.612480178	1.646259821	0.424093322	2.42480514	2.228517737	2.248488527
Zm00001d022552	0	0	0	0	0	0.027776339	0.317907203	0.027337307	0.0279609	0.031268467	0	0.025115046	0.152224376	0.0994155	0.366967444
Zm00001d022553	0	0	0	0	0	0	0	0	0	0	0	0	0.143471098	0.073972787	1.068803679
Zm00001d022554	8.978797195	10.13674496	9.995324486	13.48398336	12.18016111	13.03861895	11.61866235	10.62917133	12.51316047	1.532348367	3.428058881	1.174563545	11.69480721	9.991257799	10.48504365
Zm00001d022555	0	0.01403339	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022556	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022557	34.10296813	24.22008927	46.33530675	151.6871799	149.999996	112.9952898	183.2278688	226.4491097	213.4418383	227.225543	240.6160953	252.1149706	118.956031	136.5014424	124.3043169
Zm00001d022558	4.735135987	4.983238254	4.399565599	13.77563395	13.25390356	12.16807811	15.67861481	15.80755347	15.69917532	11.23801122	16.22374011	8.314360804	12.54278449	11.66198137	13.24129289
Zm00001d022559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022560	2.363305307	1.400072164	3.062026209	4.128655528	6.059461586	4.357983144	2.818460874	2.522784631	2.828224218	0.180610398	0.506941886	0.239530062	0.773617909	0.844660801	1.542202202
Zm00001d022561	0.570920604	1.535325742	0.709541807	6.158074902	3.598704933	3.081386612	16.64195768	19.94500311	15.60445469	283.2701814	121.3795432	242.0364727	10.79186636	8.981982886	12.66605708
Zm00001d022562	0	0	0	0.050024948	0.088087317	0.032761139	0.046869937	0.112851612	0.074202351	0.009219993	0.109593271	0.044433367	0.007480953	0	0.038645017
Zm00001d022563	0	0	0	0.03381293	0.008931015	0	0.063360781	0.073554569	0.016718317	0.037391939	0.188040169	0.097608747	0.007584804	0	0.039181488
Zm00001d022564	0.058700017	0.073932888	0.134962224	0.201322315	0.243639534	0.280470654	0.16118878	0.212336577	0.206321192	0.327875853	0.103631646	0.143055472	0.397407582	0.321745099	0.329146366
Zm00001d022565	0.671899197	0.714716594	0.748505833	2.787422732	4.22479289	3.548581089	3.620474888	4.491546718	4.448026031	0.917057074	1.330195816	0.393360325	2.232255922	2.118085592	2.773161323
Zm00001d022566	0.328109614	0.688758788	0.090616799	0.818408155	0.432332552	1.116608809	1.661383043	1.450626868	0.989144816	4.173214654	4.275486416	4.644274238	0.367165194	0.31972025	1.222316133
Zm00001d022567	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022569	8.385770533	10.35020037	6.429521834	80.89513663	123.119294	107.0846153	166.3390809	200.3349574	228.2376113	46.49326271	52.4496973	26.64747514	88.25925625	91.64112686	111.5475753
Zm00001d022570	0	0	0	0	0	0	0	0.041293578	0	0	0.004318603	0.037936805	0	0	0.071268692
Zm00001d022571	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022572	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.0227095
Zm00001d022573	27.57046248	27.08876829	27.53765594	32.07833074	47.41015554	32.56718219	40.82019793	49.45318867	41.00029977	43.73075664	48.53570275	53.29060545	23.72739865	24.68809563	32.59765689
Zm00001d022574	0.596997114	0.50128005	0.420438204	0.421911045	1.442157348	0.63388273	1.069639737	1.703627557	1.767031231	24.23415412	11.46814864	35.02825026	1.046625674	0.654449201	0.897273174
Zm00001d022575	4.190311135	5.173774937	4.318884143	6.209418007	5.545513116	3.437447641	3.642819961	4.731939359	4.082235212	8.257706386	10.5335457	9.029743236	10.44528749	10.86574415	10.55840967
Zm00001d022576	0	0	0	0	0.064075847	0.023830873	0	0.003909034	0.003998203	0.160961792	0	0.032321402	0	0	0
Zm00001d022577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022578	2.919715538	3.213255604	2.143962321	3.969618937	4.610181241	4.504802126	5.356491536	4.916998519	5.978058745	0.094944625	0.306395698	0.008971785	2.456106031	2.432705542	2.228544593
Zm00001d022579	0.089647436	0.009409273	0	0.037268131	0	0	0	0	0	0	0.065944837	0.132409814	0.008359863	0.090085111	0.129555837
Zm00001d022580	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022581	9.385749992	7.767529966	11.12756087	5.91169868	15.65313364	6.877236672	11.44065537	12.26152488	11.56412944	4.538334307	11.58596102	4.861956932	5.14821134	5.388765319	8.665353011
Zm00001d022582	10.49639761	7.923990327	8.64026881	11.40179607	20.31894695	13.68507289	18.79882471	17.44533496	14.92666832	15.05710049	12.59082053	11.70638463	6.844469649	7.734938206	6.247415766
Zm00001d022583	0.026003298	0.008187813	0.040396219	0.15404338	0.06852632	0.207074387	0.075962135	0.156770292	0.104225154	0.062759961	0.073779734	0.144026367	0.123668733	0.064137889	0.060126722
Zm00001d022584	21.14337392	22.0392728	17.43096381	16.97777531	17.56285056	17.35484746	19.00374088	17.85045307	18.71432895	20.82595258	21.97767217	20.39057828	11.90733389	11.27637053	11.04786923
Zm00001d022585	4.872329816	6.25370858	5.562102762	6.582060642	6.253111339	5.307167872	5.486108303	5.834193352	5.186220291	4.064456476	5.462662464	2.525621111	4.667994796	4.461815558	5.14494315
Zm00001d022586	21.43068837	23.58362385	20.32961432	10.82577506	8.301233351	9.76694076	8.720386945	8.544502225	9.855900184	7.039300761	8.874581353	7.888819706	9.455975303	9.913546432	8.140884224
Zm00001d022587	8.260265597	7.709479536	8.400373844	10.79507798	8.858885296	8.831560797	7.562052993	7.684047944	7.925839869	3.037111732	5.474592105	2.529040512	6.06510552	6.286412698	5.808973666
Zm00001d022588	6.886330245	7.06643388	8.598157784	30.43864768	22.22717142	28.24004395	16.29919912	14.86878379	18.63139284	3.136345653	6.570131913	2.229374634	30.68073077	30.45363467	31.17960272
Zm00001d022589	2.111025844	2.55448747	1.893819459	4.353521639	3.15657825	4.122184299	5.745889969	5.338425023	4.873750731	5.803031949	8.885685143	12.02770455	4.083644504	4.15446767	3.923339913
Zm00001d022590	1.342618025	1.329134054	0.031098766	0.37772088	0.304702947	0.328766732	0.615037272	0.796960837	0.44375135	0.014280398	0.016321508	0.016249327	0.678798313	0.719832162	0.763156162
Zm00001d022591	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022592	0.50451008	0.224270228	0.233590699	0.1603851	3.010999141	0.739288756	1.444902039	3.125117085	2.415603294	0.450225196	0.349288139	0.175332822	0.055349312	0.086754771	0.011436912
Zm00001d022593	0.883372038	0.013245361	0.614277337	0.026231031	44.13394801	14.3398339	25.42456742	35.36537005	23.90289198	0.188548855	0.822208926	0.128144691	0	0.046113498	0
Zm00001d022594	2.392530951	2.721887736	1.680642548	2.889804331	4.235329356	4.113207074	8.0436358	9.717546871	9.43567899	4.346989007	8.54942495	7.144387262	4.292440722	3.560704106	5.291654792
Zm00001d022595	23.95614378	19.36913788	28.12065574	21.13383391	25.14933473	23.07505819	19.96445846	22.8115698	20.76058225	3.763257594	13.42838991	3.627208975	13.38818836	10.52303406	12.44080807
Zm00001d022596	0	0	0	0	0	0	0.192758214	0	0.025430502	0	0	0	0	0	0.047679674
Zm00001d022597	0.86935026	1.183252278	0.74933122	5.123794643	15.35334832	5.153579119	11.01034916	14.54008282	16.08224963	137.9404084	79.23264942	208.4486966	0.392270506	0.737815961	2.966629342
Zm00001d022598	0.099588106	0.104526324	0.165024522	0.986715619	1.232028215	1.145529474	0.833975705	0.433624344	0.498102339	0.015260935	0.041861266	0	0.111442289	0.0606511	0.307033177
Zm00001d022599	57.02988018	57.53247743	50.91005255	47.49098625	31.28089199	43.3067269	22.02723419	18.69132359	25.55167929	1.700030659	6.191487492	0.993073608	26.02239655	23.87710425	29.25562726
Zm00001d022600	65.00783566	55.92536965	55.72292917	37.91274762	72.76097547	43.78689824	54.1101071	53.46599906	54.71069336	36.69084062	42.84751668	27.02260619	25.62146804	25.17380869	23.79099923
Zm00001d022601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022602	14.05214998	12.6644865	16.68585566	25.2954238	23.23237425	21.77387178	21.82821232	24.33021382	27.86474487	8.016924592	17.62151044	4.184933474	27.73592034	26.21561135	22.84603447
Zm00001d022603	5.142139138	3.281448591	4.618321047	5.728993894	10.11811389	5.795838101	6.152795775	6.977347249	5.732882041	0.661906712	1.158546567	0.091139654	1.964106687	2.465245154	3.281648042
Zm00001d022604	18.33905498	18.57891264	22.11055394	30.16409156	50.56137074	36.63236676	44.17828541	49.77366296	46.40201468	59.77204888	51.88717444	39.47105595	27.41842147	27.71572486	29.24939463
Zm00001d022605	0	0	0.253591787	0	0.62734823	0.041664508	0.0397384	0.082011922	0.167765403	0	0	0.037672568	0	0.335527314	0.03931794
Zm00001d022606	0	0	0.081587754	0.081873565	0	0.040214003	0	0.019789191	0.040481208	0	0	0.018180519	0	0.017991461	0.075898257
Zm00001d022607	1.271184908	0.876052845	0.924052881	6.820067954	10.08143889	5.818119584	7.763210236	9.08087792	8.666849013	4.002528322	6.381774432	4.862140649	6.012061654	5.232263953	4.408989682
Zm00001d022608	2.094316686	1.245627596	1.644839498	2.031509603	6.707286932	5.915650924	5.880099557	11.90734578	3.318274738	10.12948635	4.62175093	11.16494697	7.551624555	6.473059574	10.18970438
Zm00001d022609	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022611	1.203068585	1.166298215	0.960538066	1.982366419	3.766096897	2.83171994	2.854170868	2.716628498	2.976426673	1.035761709	2.096367533	1.187318805	2.194831937	1.582615235	2.57950853
Zm00001d022613	0.165944016	0.064309878	0.015864285	0	0	0	0	0.015391593	0	0	0	0	0.114274881	0.153926941	0.029515989
Zm00001d022614	0.144463354	0.132965017	0.14846534	1.420558759	1.376388941	0.976834164	0.353842151	0.472322672	0.335769448	0.264374537	0.112106415	0.095402469	0.662180674	0.469006412	0.568508176
Zm00001d022615	3.402360758	3.536212141	3.206145208	4.633407749	3.974243445	3.964907551	3.379986688	3.287566027	3.162520019	1.352864665	1.845736914	0.710159841	3.094282943	2.468179363	2.745924978
Zm00001d022616	1.083045804	1.878433059	1.279815176	3.742180144	4.339701752	2.653758598	3.744750739	3.682228767	4.039932523	0.232625211	1.365755506	0.354024293	2.334518955	2.209106026	3.120108356
Zm00001d022617	0	0.180303348	0	0.208291779	0.974571634	0.409228359	0.724861711	0.258917218	0.470797152	0	0.030087024	0	0.02669904	0	0.055168629
Zm00001d022618	2.534839417	1.170634529	1.155112159	4.109744287	6.190175599	4.037182653	5.64747017	6.500027683	8.211380297	0.862337161	2.024458758	0.187198671	2.458357808	2.037771986	2.930620285
Zm00001d022619	2.075781628	3.450222929	2.939266106	7.140488073	5.436664792	7.598081722	5.079739689	6.554778586	5.602654561	2.17059976	3.883528922	1.413600421	11.6619312	14.56721657	13.7698425
Zm00001d022621	2.761580575	2.647601024	2.545092569	3.749846947	3.930347898	4.082301961	3.929069703	3.90530047	3.381716069	2.570032788	7.574926217	1.271242948	3.274792702	3.117710007	3.202796257
Zm00001d022622	9.490104495	8.837082906	10.70240564	33.29212753	47.16937312	36.84961751	42.99517419	39.39274813	42.05884004	4.30551396	5.602563102	2.036276159	27.07578335	27.29607988	23.93924955
Zm00001d022623	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d022624	0	0	0.05056741	0.456700979	0.053612668	0.598183291	0.522985733	0.147182109	0.100359661	0	0	0	0.774033767	0.356830636	0.611534396
Zm00001d022625	0.04259732	0.044183573	0.202417931	0.312503114	0.260831131	0.396011372	0.60608344	0.477370712	0.438815994	0.812114752	0.173788957	0.172095142	0.34208634	0.217002208	0.333150364
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Zm00001d023227	2.141826648	0.941303678	1.064747385	0.04546712	0.480369502	0.156325233	0.08519913	0.285729535	0.101162538	1.344981831	0.907966201	3.452916933	0.040796133	0	0.126446497
Zm00001d023228	1.434045516	0.531821326	0.950525861	0.824687704	5.763174315	1.766662539	3.649263452	3.794485145	4.018597322	2.593096139	2.139913261	2.665268356	0.525999088	0.096069787	0.359223002
Zm00001d023229	0.03371451	0.014154517	0.104751232	0.175196978	0.377602414	0.440585473	0.157581622	0.08130405	0.194036927	0	0	0	0.03772762	0.061598383	0.064964291
Zm00001d023230	11.95474264	12.81255249	11.78573574	11.37283575	10.08020978	12.68900687	10.99316164	9.90059102	12.24933235	10.85553876	13.71902561	14.80281057	8.251055865	8.035057884	7.909923355
Zm00001d023232	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023233	0	0.004113466	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023235	3.718372714	3.648249241	4.072712335	6.117816059	7.787065909	5.860642525	6.64482086	5.780242832	5.830765948	0.517722273	1.119471726	0.382121459	3.059709949	3.136402263	2.82686509
Zm00001d023237	14.36589083	12.80789984	14.11291091	13.15161305	14.07292799	13.09671024	9.503731508	9.225212566	8.769323745	2.27536021	4.173093543	2.308528203	5.193085693	4.346937497	8.12041721
Zm00001d023238	70.91758843	72.01414345	63.66196121	45.32696807	40.86817065	48.07779511	51.75521154	49.98117529	56.76533569	111.9642435	94.3305969	142.8799431	18.82398085	18.81432007	18.30571092
Zm00001d023239	17.46736179	18.45704133	15.3590973	14.89671891	12.87556145	13.79386899	13.47357345	13.90334838	14.56344957	13.1288512	16.71793869	17.34367354	12.316997	12.56941822	11.7160395
Zm00001d023240	6.957611276	8.217919339	7.492710255	4.898120192	3.297873525	4.474149287	4.874302581	3.720140081	2.649911041	2.138406702	2.739322179	1.360116357	5.76888318	4.736788024	4.176665365
Zm00001d023241	22.79469003	23.96599458	22.97205197	26.63654091	18.69397131	22.74805599	16.85508307	20.60549528	14.96792654	10.87041867	14.46037621	10.58560732	32.34550517	31.70185319	28.14402251
Zm00001d023242	4.752780709	4.507214976	6.84490389	12.691742	6.538771981	8.717084107	3.773197684	6.725229135	3.913411063	12.74343487	11.70477513	8.145132866	40.27992392	45.94139706	43.23164344
Zm00001d023243	29.96212197	35.03815739	33.35138221	13.12344327	13.35704036	13.43170379	10.40633646	11.81110477	14.09508261	125.8030784	194.477344	185.5742524	15.44959325	13.90582576	15.33765685
Zm00001d023244	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023246	0	0	0	0	0	0	0	0.0811595	0	0	0	0	0.00836901	0.008198516	0.017293011
Zm00001d023247	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023248	0.602217405	0.679249298	0.547364785	0.807108634	0.473737182	0.858929853	0.462125461	0.812840051	0.676190534	0	0.034003678	0.009956852	0	0	0.05195862
Zm00001d023249	6.023829791	5.751275309	3.955313202	1.265532178	2.005591292	2.237738301	1.735457995	2.94761471	2.150215888	2.46818339	3.082701831	2.728439583	1.372946772	1.324751793	1.813082356
Zm00001d023250	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023252	26.02846376	24.57840666	23.62707942	20.29284023	18.08753263	20.68808959	17.70626099	17.56312972	14.92957701	3.084643842	8.849092044	2.291786434	11.85715819	9.102464928	9.955399013
Zm00001d023253	0.108501857	0.037960692	0.037457341	0.18794279	1.612351338	0.782807763	1.331236412	1.722575796	1.092805194	0.307597338	0.114020268	0.333870646	0.290051869	0.178415318	0.132412006
Zm00001d023254	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023256	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023257	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023258	7.418123932	6.994473948	6.749076503	11.17800411	9.092755142	12.38058637	10.12508043	10.27750268	9.176146356	1.48867868	2.065216557	1.781205806	25.75304467	27.56232498	23.11702217
Zm00001d023259	1.147867754	0.893437108	2.276105911	2.139313769	3.228898776	1.659112145	2.848343569	3.188020025	2.672217984	0.604779346	0.536712765	0.200020014	2.208186897	1.894568696	1.625314637
Zm00001d023260	3.135094632	3.274656352	3.595141178	6.441035374	7.802900102	5.591290787	7.090751112	6.714286941	6.593496289	6.391722628	6.983800386	5.721083118	4.033664888	4.178397141	3.86973907
Zm00001d023261	0.047469562	0	0	0	0.093822168	0	0.013867046	0.057237487	0.014635784	0	0.02993032	0	0	0.01300945	0.013720323
Zm00001d023262	4.732030903	4.777302709	5.14729218	9.030688456	7.973206769	8.611320887	7.167712415	6.446498922	6.796043922	1.805214392	3.863004539	1.80044426	4.359069939	4.113531819	4.779815781
Zm00001d023263	0.570749492	0.707628892	0.531996861	10.82179733	3.560468668	11.97459153	0.604396962	0.193554555	0.329949569	0	0.067475008	0.039515649	0.409158865	0.078209454	0.113414177
Zm00001d023264	2.451799484	2.087522153	1.163993581	2.782577941	3.876726613	3.027820156	2.824818729	2.974049965	2.406904	1.399914381	2.535274203	1.102692834	1.821778521	2.327590366	2.307376439
Zm00001d023265	7.770228332	8.416664757	7.64778816	16.33451671	11.15250964	17.89547054	18.65190438	13.66255675	12.63013362	3.437288442	3.650477198	3.588635179	7.099389647	6.837400306	7.228343186
Zm00001d023266	0	0	0	0	0.037065548	0	0	0	0	0.193980303	0	0	0	0	0
Zm00001d023267	2.387394673	1.426257397	1.712085692	3.55292958	3.938787109	3.184328725	2.948559502	3.002294242	3.538132137	0.184459992	0.238935022	0.074079761	2.102833431	2.331239183	3.059106298
Zm00001d023268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023269	3.728518342	2.843738937	2.780288142	0.594172587	3.111484275	2.004820362	2.178386857	0.799243453	1.200666486	0.028568008	0.130605035	0.045892038	0.579490521	0.317903657	0.526860402
Zm00001d023270	4.464894338	4.50792728	4.463096506	3.763933722	4.02948472	2.92164574	2.973914237	3.900002273	2.916344054	2.647754368	3.01230117	2.401965855	2.673097522	2.601066234	2.747829539
Zm00001d023271	0.383162386	0.135126444	0.323812832	2.226843937	2.271926947	1.258062616	0.304453171	0.646809269	0.472545488	0.58128851	1.285258963	2.1731835	0.411620173	0.445238226	0.487286807
Zm00001d023272	8.779090643	8.977105017	8.921772138	6.925188769	6.269767533	7.465766042	6.721343602	5.582926112	6.374019524	2.211060306	3.892525142	2.558234974	5.292832978	4.978980272	5.649400856
Zm00001d023273	0	0	0.025821656	0	0	0.005090922	0	0.035073183	0.025623743	0	0	0.027618916	0.032550106	0.022776424	0
Zm00001d023275	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023276	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023277	16.11827743	11.10555933	17.49658861	21.99338013	45.29400263	26.41715212	33.80538958	30.96218401	31.51950149	15.86870598	19.47946741	8.811091077	32.63957603	38.20773373	40.45067284
Zm00001d023278	1.207147101	1.409697049	1.420135749	8.221792165	6.640341382	8.399693355	6.43649667	4.967222694	5.665911542	0.01616364	0.295582762	0.084387845	9.921434104	9.751433351	11.54440796
Zm00001d023279	0.042906972	0.006755186	0.08665298	0.026755857	0.141340575	0.065708639	0.056403897	0.084071067	0.046301672	0.118351576	0.101450753	0.017823899	0.138041053	0.094072259	0.229429206
Zm00001d023280	0	0	0	0	0	0	0	0	0	0	0	0	0	0.117268284	0.04947046
Zm00001d023281	2.773157457	2.800464918	2.820900739	3.747417054	4.16674698	4.494684657	3.507463635	3.444333975	3.199176715	0.587751117	1.436979903	0.301040158	1.790072005	1.76714589	1.845856074
Zm00001d023282	1.654938843	1.374496705	1.594736425	1.390934912	0.805883046	1.586759887	0.350325372	0.245819944	0.192267982	0.281169345	0.347821829	0.212552597	6.347556166	6.49431757	6.807590988
Zm00001d023283	0	0	0	0	0	0	0	0	0.036913898	0	0	0	0	0	0
Zm00001d023284	0	0	0	0	0	0	0	0	0	0	0	0	0.106982865	0.052401702	0.055265077
Zm00001d023285	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023286	0	0	0.057207575	0.057407979	0	0	0	0.111006035	0	0	0	0	0.154530806	0.050460898	0
Zm00001d023287	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023288	0.273424678	0	0	0	0	0	0	0	0.11240282	0	0.459729722	0.252406209	0	0	0
Zm00001d023289	0	0.115952658	0.11441515	0.114815959	0.060652715	0.112788769	0	0	0.227076404	0.44439124	0.174140046	0.356938073	0	0.050460898	0
Zm00001d023290	0	0	0.021080211	0.021154057	0.044699395	0.228586171	0.039639794	0.020452104	0.020918639	0	0.02138941	0.281843161	0.664329083	0.018594152	0.176491698
Zm00001d023291	12.97180898	13.50454006	11.58697792	8.102427778	10.57458971	9.160785878	12.35185178	12.66759773	13.09884128	35.35291029	39.24433308	53.34876795	6.479290847	6.457956979	7.361040114
Zm00001d023292	12.70322384	14.13440109	14.33787688	19.1676357	9.821716172	16.27400598	10.59398948	8.034164075	9.968626238	1.048663499	2.110217956	1.072317643	20.03471011	21.1697725	17.24623452
Zm00001d023293	15.67634823	14.96137146	22.61644268	29.43996	63.68898983	25.97976496	36.77762462	47.40179714	33.87071642	8.966545542	18.12101321	5.519282428	10.13103961	8.226135588	9.518611268
Zm00001d023294	95.59289309	95.96959473	101.3806726	9.410563379	17.89442745	14.47273075	29.78733409	38.03250753	33.99098536	40.56404645	31.97471016	46.14431736	3.87957698	3.303739112	4.820336056
Zm00001d023295	1.58298498	1.450018502	3.636595211	17.34929567	9.607390043	7.052266162	14.06906693	8.791677987	5.324344104	0.529259943	3.085028399	1.487868177	6.495173751	3.733575283	4.658555136
Zm00001d023296	4.819266021	5.621718422	5.516142455	12.41003233	8.02809305	7.456805403	10.59883018	7.21850958	6.39772215	0.206628882	1.747602711	1.348471525	4.428895223	4.8450757	5.961461538
Zm00001d023298	0	0	0	0.013861927	0	0	0.012987672	0	0	0	0	0	0	0	0
Zm00001d023299	0.067257628	0.141185386	0.044580255	1.985178849	0.951207238	2.191834609	2.226731946	2.254507454	1.227620172	4.978085541	4.150233061	20.48886081	7.837433487	7.353356019	8.330580517
Zm00001d023300	1.487751927	2.218208451	1.40922448	8.44484885	8.964542621	8.630729265	4.031297089	4.014435316	3.471263558	0.022182218	0.801146648	0.178169088	9.026144349	8.921605494	8.814064613
Zm00001d023301	0.962505958	0.511340776	0.498891284	0.483571718	0.625105458	0.676224554	0.964779942	0.929550538	0.438809808	0.018873759	0.189828339	0.106116724	0.684019241	0.595074914	1.08114497
Zm00001d023302	1.157146761	1.039852189	1.502739351	3.064652505	2.998026493	2.612323034	1.815495022	1.442286688	1.988295246	0.080691379	0.286921189	0.216039551	0.865681132	0.641378889	0.57120386
Zm00001d023303	1.421742866	1.800996533	1.573726201	2.875286767	3.655063472	3.180405309	3.473206357	3.682658022	3.322636104	1.4388735	2.20818855	1.964712101	2.367005901	2.91530042	2.343791674
Zm00001d023304	3.710144792	3.21105602	3.344305295	4.36426735	7.152280866	3.905183079	6.153770347	6.336135402	6.024886105	7.709199219	10.76990907	11.0600296	3.447423987	3.421504651	3.004272621
Zm00001d023305	28.22398406	26.17906707	26.0625804	56.7631787	92.67762284	75.88266312	123.6604177	141.4040459	107.7998991	43.95918437	78.08644545	48.68812974	105.3938551	102.3312761	104.2754479
Zm00001d023306	0.010876081	0	0	0.081385059	0.014330832	0.013324687	0.063543504	0.393422344	0.067066122	0.074999544	0	0.072288174	0.012170684	0.011922742	0.100593872
Zm00001d023308	0	0	0	0	0	0	0.110936368	0.190791623	0	0	0	0	0	0.277534939	0.036587528
Zm00001d023309	0.736666018	0.450404648	0.488875614	2.818652202	6.116135369	4.473152998	4.993442363	6.579960408	5.98031221	0.660882724	1.745181165	0.467443358	2.100899455	1.736644208	2.641881745
Zm00001d023311	3.198388734	3.42088843	2.859617744	8.327859149	9.875149504	7.292831102	20.51289792	19.23974065	13.10445254	2.731722854	4.525173631	3.66419655	9.70795768	10.15739352	9.537727352
Zm00001d023312	0.292290716	0.200804312	0.082559037	0.745634252	0.770271796	1.367276093	1.521413043	0.945169463	0.22939351	0	0	0.014717563	0.475756649	0.233032252	0.168963977
Zm00001d023313	1.856744328	1.809994026	2.212735782	4.393392613	2.186798373	3.396568191	2.37765015	1.295750215	1.717410528	0.008769714	0.200463542	0.035219471	1.963906851	2.091193493	1.213004182
Zm00001d023314	63.80128253	67.14570353	55.6688837	217.9470754	110.0663943	182.4447533	262.1409301	201.7277988	206.5239697	12.65452891	13.99081318	4.718054514	90.65861738	99.09358306	98.91550755
Zm00001d023315	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023316	0.782506767	1.637186808	1.486882784	2.467999993	2.011007613	3.161260039	2.274562877	1.910443271	2.009851748	0.338924148	1.011231413	0.14327694	2.460504689	2.403289778	2.6392865
Zm00001d023317	11.54093977	7.204139446	8.225850577	6.916392137	14.92743501	12.22349259	13.85546173	13.12568618	14.52205917	6.736070457	13.73521047	7.037452104	9.843637356	12.52319382	10.75190457
Zm00001d023318	5.192057355	3.297439857	3.981080133	4.352895616	7.535721694	6.073822855	7.260384124	7.250462305	7.8415683	2.772201056	6.63333526	3.353351811	4.223633278	5.858340374	4.537765871
Zm00001d023320	8.326396194	7.164715789	6.59854572	7.392752163	6.960907033	8.141245904	7.214242162	6.132784963	6.506458427	2.328457415	3.884945511	2.509997725	4.797523699	5.60478878	5.151174984
Zm00001d023321	0.115191243	0.031847663	0.024441954	0.028031516	0.018509922	0.082609776	0.019697703	0.050815032	0.045044287	2.758873503	0.088573081	0.028010553	0.03772762	0.03695903	0.022737502
Zm00001d023322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023323	14.66756923	14.11510746	13.00944585	12.61775487	11.46970815	13.94936946	13.28092533	10.85172061	11.37611935	5.607762989	4.510355715	1.774294566	7.818631512	8.372747772	7.695855729
Zm00001d023324	1.213423129	1.494348456	0.871315372	1.614217267	0.923787504	0.991072907	1.323359274	0.48770403	0.76487126	0.223134739	0.204022066	0.119482229	0.603493087	0.798118227	0.467627576
Zm00001d023325	0	0	0.014761642	0	0.01173796	0.018189761	0	0.003580451	0.010986375	0.102383175	0.003744541	0	0.016614411	0.006510376	0.006866122
Zm00001d023326	2.643153043	1.748095823	0.844629625	1.259082587	1.257000468	1.326924949	1.445781413	0.901625554	0.632487012	0.511930915	0.710036395	0.67339222	0.706333881	0.80988947	0.721461516
Zm00001d023327	2.625266396	2.662678647	2.082814893	2.746336089	2.166301309	2.874491517	2.949469964	1.774652162	1.981405688	1.415213977	1.263296473	1.254943894	1.06446559	1.36095136	1.099760653
Zm00001d023329	0.042756009	0	0	0.00888724	0	0	0	0.004296168	0.004394168	1.518415328	0	0.023681583	0.015948449	0	0.01647726
Zm00001d023330	0.511508752	0.198229897	0.444548659	1.400772722	3.9496629	2.322616439	2.883997251	2.902668409	3.207097728	0.019733004	0.626986179	0.071323575	0.556383677	0.45486103	0.785741573
Zm00001d023331	0.184390438	0.165886028	0	1.452056857	1.436943453	1.310240394	0.2831763	0.476427637	0.43531728	0.014531704	0.146156848	0.03501589	0.477526986	0.450472895	0.505542351
Zm00001d023332	0	0.013786205	0.027206805	0.122859511	0.057690493	0.013410034	0.204641626	0.343149961	0.134991377	0.211343792	0.179438142	0.048500793	0.685923768	0.743944736	0.126547735
Zm00001d023333	6.688936165	7.174723902	6.816575401	4.954687993	3.700081091	5.716555507	4.887785064	4.160255437	4.314554705	0.927949419	1.74110301	0.824557487	2.959429074	3.187133373	2.726827405
Zm00001d023334	0.275852178	0.097282315	0.095992372	0.233940991	0.014539029	0.351474928	0.180506632	0.146350572	0.095256627	0	0	0.012223061	0.123474978	0.072575723	0
Zm00001d023335	0.943637358	1.478396389	1.630415886	0.775007722	1.334359728	0.817718572	6.158649261	11.26711257	5.279526392	2.158471739	5.746621527	2.931991312	2.137676143	1.00921796	2.660911123
Zm00001d023336	0	0	0	0.59122513	0.342545366	0.39343599	0.500330464	0.479411971	0.150876268	0.063271428	0.077135859	0	0.479149209	0.033527711	0.353597585
Zm00001d023337	0.782407883	0.860070862	0.643304054	1.936672857	2.098599835	2.385415935	3.017236569	3.334327415	2.759737214	1.44425073	1.619297023	1.715788818	1.419131526	1.490613604	1.528332491
Zm00001d023338	0	0	0	0	0	0.226339623	0	0.668286333	0.911374216	0	0	0	0	0	0
Zm00001d023339	0	0	0.008332835	0.041810127	0.132519787	0.057500699	0.313385717	0.428481118	0.107496566	0.961700878	0.12682588	0.482777937	0.067526703	0.147002322	0.069765723
Zm00001d023340	13.23467351	15.07745079	16.89070476	40.16103041	19.14918341	29.69804101	13.31683887	12.6611245	13.3041489	1.235866444	2.448350516	0.559959992	62.60835064	72.5793513	70.900357
Zm00001d023341	1.577450068	2.124776711	0.871315372	24.37299926	13.07736686	19.29908014	15.33481944	12.09912415	9.916306473	0.332377789	1.160375501	0.024269828	43.44395857	36.89079803	39.13458277
Zm00001d023342	3.139651943	5.597373223	6.67546576	9.537887364	9.495610891	8.813271119	9.250162835	9.059478749	8.927034065	1.675597868	4.410760489	1.792107692	7.341586547	7.065847424	10.12074683
Zm00001d023343	76.34368654	64.56159154	142.5368589	1376.621643	1335.80134	1322.698648	1372.631666	1361.845053	855.0589684	11.43417113	79.93028124	11.41704358	1250.987175	1208.521276	1347.857271
Zm00001d023344	0	0	0	0	0	0	0	0	0	0.002218222	0	0	0	0	0
Zm00001d023345	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023346	0	0	0.742120334	0	0.20705582	0	0.110171289	0.227370982	0	3.250842325	3.844291642	18.41694956	0	0.034452613	0.327016801
Zm00001d023347	0.025107868	0.126493809	0.031204132	0.156567217	0.049624949	0.215324013	0.058677087	0.242194986	0.030964964	0.779127499	1.377289457	2.878682379	0.11238604	0.151382694	0.232224971
Zm00001d023348	0.032092098	0	0.039884154	0.160095492	0.042286048	0.314537693	0.449995407	0.232174595	0.474941493	0.48686324	1.578297462	3.412816341	0.035912089	0.035180485	0.445234143
Zm00001d023349	0.01050018	0	0	0.157144423	0.138355271	0.218690665	0.11042514	0.303859838	0.194244505	0.89785169	1.324106343	1.919217715	0.364251184	0.161149319	0.109256765
Zm00001d023350	0.556688502	0.505481118	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023351	0.018766279	0	0.034984179	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023352	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023353	0.180163548	0.106784308	0.026342093	0.079303116	0.083785378	0.025967647	0.061917973	0.012778602	0.013070095	1.578548552	0.053456944	0.035219471	0.284624181	0.325296766	0.710648915
Zm00001d023354	0.101679225	0.081496138	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023356	0	0	0	0	0	0	0	0	0	0.015291878	0	0	0	0	0
Zm00001d023359	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023360	0.010573267	0	0	0	0	0	0.123548623	0	0	0.058329112	0.013333229	0	0.07099095	0.09272629	0.097793114
Zm00001d023361	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023362	0	0	0	0	0	0	0	0	0	0.058829596	0	0	0	0	0
Zm00001d023364	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023365	0	0	0	0	0	0.012893866	0	0	0	0.130634311	0	0	0.023554349	0.069223495	0.170347474
Zm00001d023366	37.88230181	37.44748002	35.93393604	20.12545991	32.83611162	17.59126727	29.22132984	38.9284345	33.41135698	26.10792204	33.06256551	20.18443903	17.31312333	17.16375292	17.98809897
Zm00001d023367	7.703345528	7.60744279	7.364607348	4.451239016	4.053249702	4.573971441	3.948046774	3.291079985	4.095239065	3.645498967	3.527829222	4.331086306	2.915290922	2.710908559	2.9934197
Zm00001d023368	1.590801562	1.357291276	1.15922075	2.635265825	3.758687179	2.496282665	3.558977805	4.728026208	4.102491972	3.209785098	4.396565156	1.805688045	1.455878768	1.419601323	1.671667914
Zm00001d023369	0	0	0	0.099273187	0	0	0	0	0	0	0.025094417	0	0	0	0.046014009
Zm00001d023370	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023371	69.41095394	71.21043579	63.87720684	56.28471812	72.02843827	71.22458662	91.60103134	91.43592063	100.2279527	326.733274	255.3049609	357.9063317	46.18213893	46.75684127	48.8263438
Zm00001d023372	0.340834087	0.292150109	0.329458583	0.938703951	1.896195403	0.991724929	0.625054216	0.439507794	0.63635253	0.084873099	0.173114984	0.005243896	1.070050917	1.645028769	1.87721383
Zm00001d023373	4.787921209	5.377790468	5.597502689	5.747597356	6.033066315	5.096765792	5.414212231	5.923328964	5.155209509	3.586825883	5.811543271	6.540117139	4.560573503	3.93241925	3.951453017
Zm00001d023374	3.391674006	4.930155304	5.557689173	24.35117721	16.4221477	31.12179438	21.51241849	13.40320067	18.72266173	7.689333078	1.58190771	0.913551783	35.10737711	38.42856759	33.61252983
Zm00001d023375	0	0	0	0	0	0	0.038171653	0	0	0	0	0	0	0	0.037767771
Zm00001d023376	442.6960597	444.0095138	477.6319825	977.062859	1136.613614	1259.241156	2819.167428	2157.825988	2312.719595	322.8125877	419.3122479	200.4774598	844.7756033	849.3826456	1016.459343
Zm00001d023377	0.904714009	1.421928494	0.961009602	3.105291122	3.555902635	3.012570147	7.5988902	4.503372951	4.911265748	0.42658112	0.438797458	0.479686007	2.595907762	2.890570342	4.255410942
Zm00001d023378	1.35850846	1.293718035	1.021250882	0.520678964	0.672354308	0.560198797	1.285420714	1.398337053	1.103323851	0.658047385	0.852383028	0.345024483	0.704489688	0.370495018	0.574617501
Zm00001d023379	23.41873376	26.68515495	23.89310122	33.74980174	59.58201493	41.61112515	46.82755452	50.17166976	47.10103365	60.72017398	47.04101207	36.472282	83.87782167	90.99973515	87.88083503
Zm00001d023381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023382	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023384	5.344942142	5.497215281	6.792921858	20.09843209	58.02302054	16.43652554	95.22132672	117.2853456	71.8803888	134.2438212	153.5838231	161.8573408	17.34236386	10.17282781	33.86294315
Zm00001d023385	2.173173022	2.090163953	2.283425473	3.301622492	3.87870606	2.057335595	6.533061931	8.289840876	4.288200068	4.332264151	4.907880524	3.829862991	1.016955619	0.519776417	3.28907072
Zm00001d023387	5.535779283	9.437690334	10.94699582	0.724727579	1.974673289	0.599521508	2.501652318	3.20837242	1.69735802	0.717076182	0.848494454	0.271040224	1.437447627	1.877551801	2.616622132
Zm00001d023389	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023390	0.572702797	0.875890141	0.86427602	1.734607349	4.560060579	3.778828734	6.931033386	6.954817079	7.305174296	1.117075801	2.424517161	1.232576099	1.409920204	1.470885349	1.267491812
Zm00001d023391	6.913447729	6.73387976	6.306685692	4.327901025	3.686454886	4.442194298	4.265938696	3.818914322	4.323251015	2.590507267	3.310828707	2.473864403	3.553481268	3.478814295	3.157803049
Zm00001d023392	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023393	0	0	0	0	0	0	0.023772079	0	0	0.088849907	0.00855152	0.199070373	0	0	0
Zm00001d023394	0	0.0222037	0	0.087944139	0.313587441	0.172782794	0.968171936	1.115964928	0.826171597	0.060782996	0.022230644	0.039057054	0.207137037	0.251230854	0.478964002
Zm00001d023395	24.05641162	26.45317909	30.37897354	39.60974841	66.84733761	61.33752471	195.2298951	204.0177655	146.0089692	4.425126185	6.665299118	3.485609547	146.6891555	125.7743031	233.5210171
Zm00001d023396	6.707064883	6.054094012	5.432006586	8.183523895	6.421947146	6.669523589	6.139144207	5.944087273	5.666094727	4.301318929	5.751320318	3.132891452	12.19630908	13.08748569	10.4812049
Zm00001d023397	0	0	0	0.233563971	0.246765155	0	2.407167211	1.580695528	1.154823493	0	0	0	0	0.205299818	0.216517974
Zm00001d023398	0	0	0	0	0	0	0	0.01069027	0	0	0	0	0	0	0
Zm00001d023399	0	0	0	0	0	0	0	0	0	0.013752652	0	0	0	0	0
Zm00001d023400	0	0	0	0	0.010780285	0	0	0	0	0.011283594	0.010317094	0.099693655	0	0	0
Zm00001d023401	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023402	27.71174368	44.02313219	28.40421601	15.55840517	6.314898549	14.00514631	2.345102312	3.126517898	1.079146275	20.9916987	10.9128444	28.08334022	11.40878343	11.77478239	13.25349362
Zm00001d023404	0.37666518	1.692785376	1.723534916	0.010676374	0.315834676	0.188781702	0.140042403	0.299340946	0.327284354	195.8570415	23.32833272	309.2695184	0.105375108	0.197072399	0.118766277
Zm00001d023405	0	0	0	0	0	0	0	0	0	0	0	0.538466578	0	0	0
Zm00001d023406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d023410	0	0	0	0.087101762	0.046012404	0	0	0	0	10.08965136	0.03302656	0	0.048845944	0	0
Zm00001d023411	31.50252766	51.38514509	31.36405296	14.98348263	8.358702274	23.53760614	3.449112523	3.111637924	1.415679456	38.65013458	12.27687326	55.2999057	12.48802072	14.44758585	14.03963231
Zm00001d023412	0.451722015	0.217538004	0.214653495	0	0	0.130216771	0	0	0	0.018323504	0	0.088305379	0	0	0
Zm00001d023413	0	0	0	0	0	0	0.01082306	0	0	0.178840377	0.0467205	0.153906225	0	0	0
Zm00001d023416	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d023421	1.08772688	0.161176004	0.980739534	1.32996645	1.686164399	1.672300244	1.894052431	4.088953198	1.9727484	3.706264542	6.07832979	3.354915596	0.047733385	0.374087656	0.246580531
Zm00001d023422	0.781758146	0.808515082	0.995268187	2.901144667	2.663136361	2.990082166	1.448206976	1.3411294	1.316853121	0.447047494	0.360666623	0.41539655	1.586042117	1.212328352	1.374098957
Zm00001d023423	45.15997625	40.38263288	47.77016296	65.38828039	69.4684438	89.62050611	42.88043023	41.21691878	41.50631103	33.76792006	36.69516129	31.39253051	36.82141954	36.45934772	44.1736637
Zm00001d023424	0	0	0	0.048610606	0	0.047752337	0.136634386	0	0.060087038	0.282218528	0.417787167	0.701628092	0	0.010682029	0
Zm00001d023425	2.379582844	3.162538044	2.417368868	5.217125154	4.2737974	5.52114777	4.06750283	3.301752681	4.062452251	0.299615697	1.114921028	0.335795399	3.29602901	2.580890318	3.574706942
Zm00001d023426	1.162942626	1.098547905	1.028816941	2.244754509	2.418418699	2.425361342	2.593317686	2.341533555	2.26630361	1.674289344	1.718389099	1.086657898	1.778208055	1.698189434	1.703743379
Zm00001d023427	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d023429	11.18555503	11.06246657	11.87360796	20.96417537	20.33763465	20.44091647	17.04577574	15.09465028	17.45126565	2.413118914	6.339086824	1.799788303	15.3840165	16.72229054	17.44338732
Zm00001d023430	0.139312846	0.01169767	0.173138415	0.347489875	0.048950697	0.500653406	0.607738362	0.470342827	0.320714568	0.179326357	0	0.03086489	1.205592235	1.537377644	2.383756983
Zm00001d023431	22.61588482	26.97392251	25.5143329	41.62127785	24.6885184	34.36886771	17.62793166	17.49059685	16.53881264	3.308821106	3.280260356	0.873852682	71.86743612	82.23133923	77.12964945
Zm00001d023432	0	0	0	0	0	0.114720083	0	0	0.038494116	0	0	0	0	0	0.009021582
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Zm00001d023434	2.178977358	2.672773909	1.923202969	13.4953904	7.473913758	12.49040565	11.11524235	9.91258949	9.654574299	10.97710562	8.817225788	3.945225632	24.74634326	27.0425055	23.7777822
Zm00001d023435	0	0	0	0	0.017870889	0	0	0	0	0	0	0	0	0.014867943	0
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Zm00001d023437	23.47288008	21.96490701	20.68090822	92.55106585	72.18914887	113.9390196	83.68810055	66.41916927	74.59606687	8.501855692	8.673600451	7.086231775	104.7159353	108.6405733	98.79768018
Zm00001d023439	3.543019917	3.469493897	2.708821366	8.420979428	8.68918036	6.636019788	8.247524367	8.790186861	9.69989057	2.571120748	5.274883939	3.174770086	5.85371917	5.114249667	6.294444833
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Zm00001d023442	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d023445	7.666746566	6.27018314	7.936699297	10.2914487	14.19205803	10.76433058	11.4063507	12.06674165	12.98001547	2.000115024	5.636109574	0.817345167	6.282655044	7.37258136	6.765515092
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Zm00001d023452	35.62216547	38.75408514	39.78737585	19.34234504	15.550372	16.06141943	15.12848797	13.01284788	12.9188804	9.17770916	17.43966434	10.81669255	14.04731074	10.50074578	11.93286474
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Zm00001d023461	128.6022852	122.1541599	122.1982889	51.63215288	56.21273058	59.39475671	55.17486057	57.71090882	63.72668352	18.64183593	19.15540509	6.958996033	33.79510141	32.34458033	36.10630893
Zm00001d023462	227.4180978	241.2620931	204.1418879	12.15856271	19.33955138	12.09549684	9.229067548	8.096232384	9.050616672	3.747232259	37.62103467	12.91533067	3.624449802	2.949013518	1.990499749
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Zm00001d023470	2.42318781	0.972194638	1.422251019	1.690648868	2.393414057	3.138109869	1.14875232	1.444699894	0.947214775	0	0.096853172	0.008508074	1.353663812	1.258730091	0.745892255
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Zm00001d023481	1.026000237	1.352997941	1.078944404	1.525656638	1.565668719	1.450373854	1.572891258	1.459170416	1.189638569	1.94112195	3.483359424	2.705393037	1.476864488	1.081478354	1.211542362
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Zm00001d023496	0.174155846	0	0	0	0	0	0	0.139994872	0.286376611	30.66420867	14.34825247	70.73804572	0	0	0.033557987
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Zm00001d023499	2.052057702	2.411693047	3.207070436	3.860254327	3.553938523	3.565076318	3.087506137	3.161164336	3.444875582	1.239954819	3.176220031	2.873781531	1.843198764	1.3843309	1.975726509
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Zm00001d023506	8.041430225	7.884236205	1.12705807	2.372110515	1.728949522	2.015598525	1.4910473	1.43216357	2.414994547	1.339266888	1.877308412	0.857899588	2.483151749	2.577726917	2.041255448
Zm00001d023507	19.163026	18.17266797	18.0247733	6.714217843	8.69445409	7.166548929	6.806077823	7.023175507	7.501502866	0.550842668	1.091263491	0.239655317	6.145491681	6.877731327	6.176099421
Zm00001d023510	116.2770996	111.8987046	112.7612789	35.9596202	43.75651483	32.70866233	38.56782063	45.39488732	45.56328595	61.0000438	77.01293792	59.61113486	38.90931152	37.09611289	36.38347407
Zm00001d023511	0.575894469	0.654383922	0.474555694	3.380367931	2.713625793	3.013923502	1.477526128	1.192552474	2.061233031	0.284895248	0.244705038	0.069342365	1.772222109	1.708669775	1.917829761
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Zm00001d023520	17.27609707	17.55421563	16.89167004	14.12003951	15.73278239	15.04931219	16.02381698	14.11395875	15.52151465	19.54861115	19.45992993	18.93104607	9.597066619	10.65371664	10.50409249
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Zm00001d023877	4.074505306	3.628014361	5.37913584	10.57259443	8.829936127	10.07507839	8.336214041	8.278190244	7.491476156	4.549049882	6.060301741	2.992501556	8.467647075	9.784015552	7.937416541
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Zm00001d024317	0.429724458	0.339848086	0.471962493	2.068953363	1.88302738	1.873258199	4.437454708	4.89229888	4.128831654	0.330787465	0.02520448	0.044281791	10.81410644	10.38564955	14.89304953
Zm00001d024318	0.087546324	0.083801338	0.056577471	0.310082495	0.26762389	0.420444403	0.679257924	0.667145134	0.436194345	1.883556696	2.274213693	4.348576227	0.45848625	0.418435105	0.323889592
Zm00001d024319	11.70082476	12.89890792	14.11856483	27.16801981	32.96663921	24.19981369	26.36416596	31.82485748	30.12075567	18.62003816	21.91794171	13.23111549	15.74770645	15.84023256	18.0135634
Zm00001d024320	0.276861581	0.114231992	0.035594937	0.136925247	0.081766806	0.023392643	0.105978318	0.172671748	0.07653125	0.032917049	0	0.031727037	0.048075052	0.130821288	0.027593946
Zm00001d024321	1.403617446	1.25518157	1.6223105	3.798651812	7.305414015	3.714386593	3.969107332	4.383427744	4.050656038	2.110043653	1.840806896	1.725898716	3.486938443	2.569620204	4.186755148
Zm00001d024322	0.394707541	1.242839021	1.226359234	4.452734655	5.55545438	4.791746464	2.955973766	2.96373003	3.47386668	0	0.135746965	0.019874505	2.409220432	1.730769068	3.941081749
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Zm00001d024324	2.071399079	0.675253714	1.120595438	2.644143993	8.990873035	1.910774433	8.314888394	7.874898731	7.904262473	4.201177693	10.87863113	7.234744802	0.136350711	0.213716744	0.309917884
Zm00001d024325	10.17038831	11.22830775	8.660442952	7.522621116	9.908496291	7.560711251	10.8517114	11.40611284	11.55160176	6.816343441	8.175951327	4.297528449	7.2478552	5.78211275	6.174865356
Zm00001d024327	13.59137499	13.96164046	13.42532357	18.08061152	16.0267066	16.8055772	14.43154782	10.21062242	14.08002522	1.54617686	3.89262276	0.653273314	10.24944402	9.905958362	10.9195399
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Zm00001d024338	4.368554063	4.432755727	4.881106229	4.82710834	4.127392957	4.944054147	3.786420258	3.187260633	4.420009935	1.835211613	1.895571635	1.81639407	1.925538962	1.914269299	1.890522896
Zm00001d024339	7.646486119	8.281709378	7.852212676	5.260665382	5.142276789	5.972864113	5.358603251	5.216949151	5.886153846	7.632861183	7.179264494	14.3941662	3.712759904	4.132794274	3.501302188
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Zm00001d024342	26.24304724	23.93153668	27.2713897	19.79756647	22.40826792	19.16260947	19.1650286	19.55458422	21.22548318	18.64068948	20.75483846	21.138737	13.31819936	12.41962629	14.18034141
Zm00001d024343	12.99332149	12.37076735	15.17489209	7.929859577	12.38741389	9.259993258	17.39067459	19.29834702	15.24597383	7.710675598	8.474997549	7.660661503	16.71984562	16.77642945	18.37329935
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Zm00001d024358	1.519025991	2.391523571	4.719624932	1.657655406	4.003079185	3.489402528	4.215581972	6.639548479	1.873380333	5.4993416	3.831081018	4.837785664	1.912318718	2.914116858	1.097625838
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Zm00001d024365	8.304264296	10.61443338	8.40345042	12.09000871	11.26677748	14.88342131	16.70620115	14.47584326	16.60514622	2.773177101	3.331134612	0.900800816	5.54255317	5.602523975	7.23625859
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Zm00001d024371	43.67692915	36.1523823	33.09866836	0.811912852	4.055067226	0.725070655	1.590568181	1.427220452	0.364944221	9.305008421	15.59797272	3.868043196	0.529819905	0.25951319	0.136846858
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Zm00001d024382	15.09662132	15.94785855	9.297014593	13.54671032	8.019867544	8.374566068	7.719955451	5.281530297	6.197552745	5.280515874	12.52973415	11.99793896	23.39024843	22.44611341	18.71677594
Zm00001d024384	1.188020328	1.144908454	0.592827148	0.639802293	0.54551507	0.727743727	0.567900721	0.477494032	0.665981158	0.062063481	0.828512254	0.27915894	0.090643152	0.394651394	0.176891906
Zm00001d024386	0.009765167	0.073795584	0	0.012178693	0	0.011963666	0	0	0.048172637	0	0	0	0.775855023	1.241770612	2.009596106
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Zm00001d024391	0.569634747	0.717457071	1.179906233	2.604887066	4.503464083	2.093641517	3.328091031	2.976349318	1.170862708	0	0.957770254	0.420677014	1.699838861	0	0.658575503
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Zm00001d024398	0.194486173	0.288183594	0.319907631	0.841807551	0.474842238	0.742848538	0.641667091	0.441423163	0.627856756	0.055223514	0.108199987	0.082375248	0.339256542	0.313533195	0.310825593
Zm00001d024400	0.005758734	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d024406	28.72818006	23.90222866	20.329974	5.184600485	14.91876853	8.747229082	11.93669831	15.62859321	13.55711392	42.38270613	32.49789059	44.37544505	2.203066805	2.417538584	2.090509136
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Zm00001d024409	25.39503586	24.86269973	24.97701317	17.89235482	11.30314949	14.43798675	7.809241516	8.46808372	8.838558262	0.877250886	3.164487571	0.651526542	37.65646852	37.59139108	36.54275544
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Zm00001d024463	4.570505828	4.634006336	4.733184076	4.906764667	4.182222507	4.875652829	2.798783588	2.244468436	2.686903505	0.125004766	0.433906966	0.150607019	1.468811038	1.000965791	1.207024568
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Zm00001d024468	24.23359543	29.40823086	22.60031243	18.34799443	13.98601976	15.96824967	15.10845664	13.80234888	13.860519	9.59787225	11.49871082	10.30278435	16.23014554	16.02784077	14.81324918
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Zm00001d024493	14.3042829	14.22382743	13.02018602	19.39415917	17.88852	20.08449194	19.52011626	18.35510626	21.28992472	9.626486639	14.80775317	11.41641517	18.48819459	20.11795371	18.36932669
Zm00001d024494	0.105978558	0	0	0	0.523658614	0.064919117	0.030958986	0.287518539	0.032675238	0.219242854	0.267284722	0.117398237	0	0.058088708	0
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Zm00001d024500	173.8098021	162.6609704	234.9488287	31.99126928	34.83148001	40.32440797	9.069048059	10.00225083	10.36213497	4.075404936	4.803816432	2.464904381	2.529838304	1.834332487	1.52295585
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Zm00001d024507	12.46710805	13.945331	19.21713662	64.48297333	20.47117078	66.01604766	33.35669498	19.28196293	23.21703789	0.010126147	0.101846676	0.056933731	41.86971509	41.54796409	42.22240023
Zm00001d024509	0.495018055	0.275063414	0.542832261	1.616043791	3.740896682	1.587510927	2.722016945	4.195708943	2.872915526	0.722871009	1.523864494	0.580614921	1.02642027	0.845905213	0.94262564
Zm00001d024510	14.89755723	15.96484082	15.04538753	14.90201406	17.47523604	14.48909079	14.83581842	15.14053668	14.50780583	3.536796817	7.485440818	2.465362968	11.91277308	11.21431236	10.46988625
Zm00001d024511	42.25550551	33.93571947	48.21096868	81.31510188	129.3094654	75.18964568	87.72847957	102.4917335	93.82825397	8.233299995	27.02348773	5.28791007	37.58343721	32.90870538	43.57135527
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Zm00001d024519	28.48570691	33.53799327	31.59960296	74.3014506	36.17255739	71.96156208	36.74512214	30.70666142	29.20635589	5.088949259	8.261827357	3.86017107	243.9690194	267.8720218	250.0207496
Zm00001d024520	0.038456354	0	0	0.383688774	0.380039163	0.353357218	0.0898725	0.197070841	0.225279913	0	0	0	0	0.010539301	0.155612777
Zm00001d024521	1.239694345	1.103873216	1.17522841	5.098511366	2.757920644	3.609787651	3.463123657	3.128628554	3.576884338	1.089464071	1.38151593	0.811191611	4.961866197	4.374072373	4.11977725
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Zm00001d024533	27.7058371	28.80596872	24.97593637	28.72617741	20.54300627	26.52731528	27.93848125	22.81423943	25.78621916	23.05861699	22.18325289	31.49158137	18.31711913	19.78100336	17.88162228
Zm00001d024534	37.80962247	38.31431433	38.55463917	21.8342306	24.42988455	21.74017314	22.54198036	24.32770601	22.42555446	9.781164086	15.73993074	8.078645697	15.62298881	14.14749065	17.62790677
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Zm00001d024713	13.903181	14.55781158	14.83714425	13.64451149	15.05777583	13.90985097	15.29384518	14.82279541	14.12727487	7.15861991	14.6221777	13.30908357	9.086649307	9.313920605	9.996376153
Zm00001d024715	3.474523206	2.977603496	3.991689768	10.77362263	9.392377493	9.815430273	8.531539558	9.206787237	9.15911188	6.175180836	2.958631782	0.991989466	6.854284733	7.035328909	7.46807365
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Zm00001d024718	13.56540918	14.07840291	14.94388063	22.18089348	14.19669664	25.75168937	23.31692456	17.89597732	18.05949517	8.948545071	4.003451862	1.28950632	44.25995524	46.34551513	42.80645184
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Zm00001d024723	0.350966294	0.296997873	0.327136457	0.800188478	0.592513526	0.692001849	0.26272295	0.423185463	0.270524236	0.294962107	0.449495065	0.601401075	4.872462293	4.857362396	4.697997089
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Zm00001d024732	15.97138661	17.51985036	16.98216716	14.89655382	22.77138504	17.21740543	23.08096761	24.40974498	20.9850397	68.50074971	56.70305934	61.3411354	13.78626175	12.32321637	16.68961185
Zm00001d024733	0.053310704	0.067145029	0.228210634	0.236397503	0.343418405	0.188681731	0.380682856	0.214268582	0.255682324	0.155217861	0.216618749	0.01968506	0.178969169	0.266231523	0.13011717
Zm00001d024734	4.83152807	5.538331754	3.564550611	0.665757792	1.669053532	1.141734355	3.034267508	3.53470839	3.648814242	24.48265078	31.61592637	18.10108323	6.894978409	10.81118895	10.92075963
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Zm00001d024745	0.195303342	0.081995094	0	0	0.285934227	0.053171848	0	0	0.133812881	1.032529443	1.29983106	0.901450745	0	0.011894355	0
Zm00001d024749	0.234049322	0	0	0.085851812	0.32653516	0.202406431	0.096524695	0.215807806	0.135834224	1.879792209	1.579886885	1.891140173	0.184876734	0	0
Zm00001d024750	0.229768637	0	0	0	0.353212869	0.234581683	0.111868606	0.092349559	0.047228076	22.86881069	1.183127961	1.484742403	0.171412322	0	0
Zm00001d024751	0	0	0	0	0	0	0	0	0	2.710389789	0	0.011831541	0	0	0
Zm00001d024752	3.100416686	0.521786961	1.89338619	1.366680284	17.32711107	3.258140073	5.933957029	9.829405374	6.378283186	17.04865012	31.66540132	26.11404997	0.463592417	0.688547092	0.618018067
Zm00001d024753	0.241257069	0	0	0	0.353212869	0	0.062646419	0.500996356	0.214887744	1.571240457	0.33803656	1.083861954	0	0.014693026	0.046487683
Zm00001d024754	100.0954162	83.71534269	96.49379899	148.5392522	233.1089566	143.9247033	211.3120392	239.382702	201.0541898	50.40602552	71.90496282	46.84101147	133.8046524	151.4755014	155.7679988
Zm00001d024755	7.105070741	6.001632597	6.798903676	9.396164681	14.70166127	11.16319232	15.95826554	15.67642141	15.39125751	33.66594569	22.15787574	37.28751884	9.093432577	8.853767609	9.767959066
Zm00001d024756	0.145842052	0.113886934	0	0	0.01921683	0.003573529	0	0.017585232	0.032375466	0.004022805	0.00367823	0	0	0	0.003372266
Zm00001d024757	2.345554839	1.569964885	2.032214971	3.577192506	4.291536361	3.514033605	3.414229858	2.634271161	3.223316161	0.480614728	1.166226133	0.534507265	1.049900473	1.19013512	1.286159217
Zm00001d024759	6.006934833	5.610675524	4.521462088	5.727082493	7.414337082	5.566535931	6.660118302	7.330730905	6.451031152	2.742934258	5.189290994	2.274790431	4.49638038	3.571682637	4.907185888
Zm00001d024760	1.347405266	1.158969115	2.940689381	0.860705691	0.519630471	1.40918179	0.576015755	1.030274764	0.526888219	0.045324244	0.372977839	0.036404742	0.29420288	0.720523399	0.68390533
Zm00001d024761	0	0	0	0	0	0	0	0	0	0	0.135480272	0	0.03005609	0	0.031052676
Zm00001d024762	6.823388665	6.938413108	6.664042861	9.592626886	9.24056047	8.044976705	13.81008937	14.64132867	11.16739108	11.0464669	8.627642426	5.804439734	24.29568432	23.52592679	29.48391867
Zm00001d024763	0.065451748	0.051522949	0.244030876	4.275296937	9.098560588	3.638500877	10.37264996	14.68896827	11.66406283	5.303289155	3.198299234	5.419709613	0.769047384	3.345367288	4.190290094
Zm00001d024764	0.502376668	0.404542059	0.276353942	0.760067814	2.181195857	1.352038377	1.587860299	1.380319925	1.493061554	0.374826037	0.903535071	0.437909567	0.165887889	0.225706125	0.266604059
Zm00001d024765	111.7442512	115.8016599	121.7701656	101.3409351	92.40350591	112.5168972	104.4108407	94.04157928	108.4717715	167.0077238	186.4572057	227.3402514	106.7473434	116.8651803	107.2521929
Zm00001d024767	257.4194936	257.6564218	262.115481	211.5846471	251.3703979	220.7284704	342.7286273	417.5459079	418.9109863	716.797451	779.4330604	844.3355974	141.0130429	146.7781861	214.6084872
Zm00001d024768	6.161993964	3.857345934	6.871285927	13.91925555	18.34367384	10.47158988	12.90374552	16.83947207	17.08740769	22.8654831	17.38840407	31.98504524	1.64766287	1.250924846	2.08531177
Zm00001d024770	8.41206068	9.161480536	10.27568483	14.03171876	21.90967598	13.31916632	12.93273881	15.14356017	13.18178525	11.83617692	14.15483618	9.202561289	4.406567917	3.542355038	5.97444571
Zm00001d024771	0	0	0.025246136	0.202676611	0.508563552	0.323534499	0.545945393	0.563359752	0.601263227	15.49294454	12.06534356	19.12736499	0.068195616	0.20041899	0.399255283
Zm00001d024772	0	0	0	0	0	0	0	0	0	1.355914424	0.397663091	2.363097475	0	0	0
Zm00001d024775	0.048025412	0	0.009947687	0	0.010546754	0	0	0	0.009871442	0	0	0	0	0	0
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Zm00001d024777	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d024778	104.7355548	65.66556246	107.6074485	58.76047249	567.996227	104.3745353	319.7674989	445.9168877	339.9709021	820.5603553	992.9967197	779.4645967	85.56815959	69.85413292	99.38908945
Zm00001d024779	0	0	0	0	0	0	0.032272398	0	0	0	0	0	0	0	0
Zm00001d024781	0.051492406	0.016213719	0.303975843	0.94723166	0.407092798	0.977821273	1.534306374	1.319372579	1.111327316	0	0	0.014260238	1.930325486	1.806329094	2.232459332
Zm00001d024783	1.015157575	0.874827968	1.220139479	0.899569295	2.57843669	0.949144762	7.054837617	7.328187867	4.92551683	0.322384461	0.311614553	0.096178233	1.681569952	1.544813431	2.200613796
Zm00001d024784	0	0	0	0	0	0	0	0	0	0	0	0	0	0.140902354	0.094564688
Zm00001d024786	14.18428243	12.88571906	12.67735015	11.14094986	5.785907497	12.86688296	12.04284066	9.643189845	8.597699143	2.684636013	3.291938822	2.390336942	25.9028425	28.7496789	24.38910074
Zm00001d024787	35.67409525	34.99451218	35.12545101	24.47876242	29.81687465	22.88484115	20.63281971	25.49808628	22.85524006	20.51817841	26.79434845	18.14265233	19.73873489	18.32739814	17.41300239
Zm00001d024788	4.139463398	4.232774598	4.439662042	8.62538006	8.700190673	8.524945273	8.862819756	8.247301641	8.278833087	1.576104979	2.604660655	1.603521796	9.415949502	8.463183077	10.10006072
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Zm00001d024800	0.664573871	0.597880893	0	13.61645512	18.70188557	22.73927314	6.767118429	16.02649633	5.678684134	0.458278467	0.359163845	1.31461567	23.79774405	14.9868867	21.0195348
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Zm00001d024965	1.854324147	2.171241926	2.628775104	9.685797901	6.229133919	10.28356978	7.287129077	6.235845606	5.321598181	1.298157407	1.622627791	0.554538653	29.41755685	29.65301228	31.09400213
Zm00001d024966	16.11161306	15.07866787	20.11883481	62.44823905	53.23347076	57.05662302	35.9209885	44.98545512	43.34862024	15.94735642	31.83735739	13.89885403	64.89730588	70.95660562	79.19155
Zm00001d024967	3.371307685	3.252960123	2.672848814	2.273839266	2.652550557	2.520915296	2.442864097	2.49275096	3.347711538	2.062921144	2.377322596	3.311758332	2.699361456	2.495690458	2.495418742
Zm00001d024968	0	0.022867158	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d024969	0	0	0	0	0	0	0	0	0	0.52085319	0	0	0	0	0
Zm00001d024970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d024973	0.620157531	0.415804504	0.333601112	1.82391797	1.130185525	1.251176424	1.229388264	0.874257078	1.210023587	0.340417702	0.525249767	0.533180346	1.111742951	1.08232989	0.781194503
Zm00001d024974	0	0	0	0.06806455	0.071911602	0	0	0.131611946	0.235574772	0	0	0	0.030536027	0.029913946	0
Zm00001d024975	0.87145301	0.900918828	0.519610881	2.808189366	1.626158733	1.518160098	1.865889209	1.810003712	1.925840504	0.833672166	1.283143937	0.373866234	1.335945575	1.640053555	1.578251684
Zm00001d024977	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d024978	0.030721874	0	0.012727078	0.421464874	0.40480576	0.58966982	0.58634233	0.456870907	0.846178532	0.162420362	0	0.00567205	0.068757527	0.016839199	0.023679119
Zm00001d024979	0	0.017642387	0	0	0	0.040042324	0.027279435	0.0337795	0.011516682	0	0.005887932	0.005172258	0	0.040947778	0
Zm00001d024980	0	0	0	0	0	0	0	0	0	0	0	0	0.048108647	0.109966674	0.033135874
Zm00001d024981	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d024985	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d024990	0	0	0	0	0	0.002976565	0	0	0	0	0	0	0.019031429	0.002663388	0.019662464
Zm00001d024992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d024994	0.284520997	0.412108536	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d024995	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d024996	112.7708433	70.99644162	255.2991597	59.44461939	510.2668836	29.20784619	501.9679369	529.79469	580.8125025	3846.837825	2737.10451	3683.999169	1.921739007	1.937959487	19.75726509
Zm00001d024998	1.638826566	1.372268152	1.853755756	2.47750791	2.538445002	2.440702794	2.374190828	2.490890458	2.822874233	0.451417605	0.735525661	0.504352394	1.271182619	1.34461091	1.377492693
Zm00001d024999	0.425257276	0.51577559	0.234893775	1.473228965	1.224444151	1.543698814	1.601164533	1.78517655	1.670502739	0	0.456816688	0	0.775502522	0.707905939	0.691959515
Zm00001d025000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025002	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025003	11.02768626	12.30821985	10.41983213	12.76693546	14.49415867	12.01980599	14.15246477	14.93731697	13.45014326	21.65413426	22.47040602	23.07801426	17.09328252	17.00575129	18.76620486
Zm00001d025005	0	0	0	0	0	0.042467374	0.00810083	0	0	0	0	0	0.015515771	0.075998411	0.256483766
Zm00001d025006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025008	10.37713866	10.35370788	9.610594433	7.424331134	8.982598267	7.809022708	11.45251682	10.50869127	12.16938148	27.85959579	30.76351848	25.65788882	3.876293804	4.242641075	3.133837401
Zm00001d025010	8.602459167	8.087292151	8.490040073	6.740518173	9.844586492	8.507412994	9.50788507	10.37773498	10.34175868	8.492029295	10.01413596	7.619291615	5.029725375	4.729143563	5.03426176
Zm00001d025011	13.47618389	14.29330819	14.35353637	28.67495065	31.62744079	42.95540503	70.16358347	68.20392212	58.59962838	30.15314371	37.28968547	30.24946002	65.89686602	68.4226215	71.17740532
Zm00001d025012	0.400444027	0.094273034	0.265115531	0.655775765	13.85188131	1.542864211	14.35242674	19.02722603	28.01839523	9.662290071	9.103667883	6.22896789	0.069101032	0.049231492	0.088699465
Zm00001d025015	4.162162633	4.309194075	4.020124782	6.312265584	10.37613028	6.751615001	10.31508603	11.61237922	15.15520131	18.91728014	15.34294463	17.96651929	3.499523478	2.687410707	3.684208935
Zm00001d025016	4.236435379	4.813013221	4.781946727	1.2489763	1.033083809	1.130061927	1.370371555	2.272066178	1.178198233	8.959478115	6.920870937	17.95429223	1.673624478	1.73342304	2.772682214
Zm00001d025017	5.600990108	5.992504878	6.019972192	8.863083906	9.250665051	7.979290766	8.454901116	8.921699656	8.859945375	4.853145477	6.943683657	7.014636986	7.423021934	7.611338934	6.952965787
Zm00001d025018	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025019	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025020	7.805469223	7.357027469	7.820947436	10.32870385	14.66537549	9.986910684	12.92217414	14.51562405	13.17523356	6.217235947	9.719097507	4.202236985	7.393749526	6.656352516	7.658778908
Zm00001d025021	0.400543169	0.368546369	0.411352573	1.824667304	1.36526069	2.089233851	1.589075886	1.142339738	1.34883384	0.059541744	0.281282001	0.077050316	1.696260252	1.338302689	1.353199349
Zm00001d025022	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025023	6.887012577	8.149161522	5.216427557	10.77565039	10.89559898	9.039214168	14.6402641	16.00928205	13.47988706	19.28805955	18.29125148	12.24707819	17.59908354	16.96510566	18.44671634
Zm00001d025024	23.62667663	26.39295073	22.54142809	10.6845468	10.41478111	10.72697227	11.88967739	10.97709332	14.33771428	5.982825988	11.4482901	4.590052315	6.481920024	6.701574709	6.881182014
Zm00001d025025	353.8343414	353.2143457	393.6359458	156.6928804	198.9211972	180.1140912	163.8234249	192.2806489	211.1886543	537.4282442	725.6126902	737.6381713	64.04320145	56.26987237	74.07728799
Zm00001d025027	5.695561841	5.553630858	5.396301331	3.79433886	4.274985706	4.722294963	4.401696281	3.923386984	4.614151815	6.697932919	5.621510369	7.129835115	3.834056797	3.608309634	3.824162589
Zm00001d025028	0.034720594	0	0.118664855	0.064953028	0.160123167	0	0.040571014	0.198859383	0.503136432	0.371112032	0.875675661	0.432696358	0	0	0
Zm00001d025029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025031	0.949439547	1.187062018	1.067588525	7.776890004	4.252571527	3.85174649	3.811853741	4.86019212	3.813003318	3.016973536	2.070011723	1.209700577	1.272608946	1.361057886	2.32402935
Zm00001d025033	2.600366527	2.172638363	4.06367706	6.132923631	4.749415982	4.163626068	2.918190554	2.980229826	2.032141378	0.106524777	0.519468613	0.370766182	0.172864969	0.366910597	1.101346604
Zm00001d025034	1.469063634	1.541372919	1.381224564	1.937302054	1.959271984	2.050211465	1.015033557	1.102861867	0.976776514	0.059901524	0.08054506	0.116037988	0.488890302	0.515340526	0.700051852
Zm00001d025035	5.126001566	3.475322643	5.338302358	5.967204692	10.41250372	5.290300163	9.120880688	12.5399402	13.59779433	6.732206303	9.405519128	9.005954359	3.838961921	3.280525345	3.196681093
Zm00001d025036	0.636496792	0.869416831	0.33424229	4.427453951	3.283837416	3.382775539	0.848499536	0.71342305	1.558898126	0.037091578	0.678289754	0.456813859	5.226586503	4.923560811	4.45672078
Zm00001d025037	3.885166358	3.972033441	1.868769444	4.652810926	2.795253569	4.391419305	4.321373847	1.097653019	2.736560926	0.044839204	0.163993956	0.009003789	2.719540056	2.655227251	2.095538699
Zm00001d025038	0	0	0.080220254	0	0	0	0	0.015566002	0	0.48071946	1.286071107	0.514822862	0	0	0
Zm00001d025039	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025040	0	0	0	0	0	0	0	0.209325666	0	0	0	0	0.097133649	0.285464509	0.250885906
Zm00001d025041	0.036071857	0.159014232	0	0.123714953	0.166354874	0.243061284	0.200212336	0.456691716	0.567204204	1.181539658	0.568597117	2.647268283	0.111005308	0.128515519	0.208519948
Zm00001d025043	5.973790582	4.813558137	5.46697267	8.409924321	10.94688192	3.943744996	16.23259229	25.39772266	31.01621904	8.171629544	26.08297711	11.97911342	2.22733107	1.675831984	1.719957036
Zm00001d025044	1.060869514	0.882484162	0.980338769	2.04526218	2.301047351	2.055702265	2.527203221	2.858883614	3.214633178	1.668536837	2.144681319	1.878946051	1.384437965	1.194618984	1.584974151
Zm00001d025046	0	0	0	0	0	0.46525367	0	1.144749738	0.234172542	0	0	0.210338507	0	0	0
Zm00001d025047	0	0	0	0	0	0.01470512	0.014025318	0	0	0.049661683	0.075679827	2.805498332	0	0	0.01387692
Zm00001d025048	4.536854255	5.527391165	4.18063818	7.566643441	9.042458454	7.697332914	8.593958141	9.046909763	8.139227866	10.86852127	8.993972744	7.97543878	5.499330751	5.172988506	5.237428851
Zm00001d025050	28.3938598	25.71777249	26.03204694	4.012034925	6.157629035	3.845071656	5.420295916	5.767268101	5.480798659	2.662018956	5.323144596	3.379322793	1.868417921	2.153762873	2.391191495
Zm00001d025051	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025052	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025055	0.094034942	0.027331698	0.026969285	0	0.476557046	0.008861975	0.422614734	1.037906429	0.749352133	0.369116806	0.565540531	0.248399761	0	0	0.016725727
Zm00001d025056	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025057	3.994053323	1.763034441	4.743464676	2.548796727	36.93762759	6.013681572	35.79890082	53.26766671	56.86508534	282.6817098	296.172636	270.2624403	0.918957254	1.033225636	2.330413247
Zm00001d025059	0	0	0	0	0.06849375	0	0.12148165	0.17236536	0.57697265	7.115389294	13.37236644	13.58962705	0.058169391	0.07123045	0.075122681
Zm00001d025060	5.775887269	5.10649049	5.361318717	6.095768394	7.861351771	6.132987426	5.023936277	5.062493335	5.391352301	0.580639798	1.843621882	0.412070039	2.378196828	2.294975689	2.880451725
Zm00001d025062	59.22906741	64.64451271	64.10108772	60.57169728	70.23868697	63.97502317	59.58795714	67.24884369	61.23878068	10.82013315	19.76217431	4.130283413	54.97916315	47.1533438	56.62252562
Zm00001d025063	7.129643795	7.227778743	6.779123086	8.310124332	9.10044418	8.63541728	9.037085156	7.291081214	7.837520864	6.594455647	6.832530133	4.335306875	7.088797004	7.317833137	6.507999748
Zm00001d025065	1.740550615	0.964581174	1.502413937	2.541738289	8.489863771	2.504615592	7.750754223	11.76802731	9.858664001	10.22179209	10.35988159	6.878069184	0.417877053	0.3399803	0.329287751
Zm00001d025066	0.019067272	0	0	0	0	0	0	0.137944738	0.047030469	0	0.024044442	0.190096726	0	0	0
Zm00001d025067	0	0	0.06167205	0.007736012	0.016346512	0	0.007248111	0.007479309	0.00764992	0.350748777	0.195552003	0.645903365	0	0	0.007171421
Zm00001d025068	0.187277177	0.94350519	0	0	1.480590931	0.229440166	0.875333531	0.451627294	1.61675289	1.03314441	0.236162528	0.414914315	0.209569175	0.410599636	0
Zm00001d025069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025071	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025074	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025075	14.8073787	14.95679569	13.5981119	7.683332179	7.588942217	9.003921828	9.770676466	8.735011933	9.438322362	20.95964094	19.52842587	20.78924422	4.703695629	4.21326354	4.638567996
Zm00001d025078	0	0	0.011856699	0	0	0	0	0	0.011765822	0.013157631	0	0	0.021351779	0	0
Zm00001d025079	4.219084978	4.902929142	5.605610789	8.910276334	8.169967236	8.810072061	8.184890883	7.363873505	7.186881072	2.346814391	4.056438725	0.929577853	7.83838738	7.218747643	9.445758108
Zm00001d025080	4.130457908	4.909238173	5.27794652	10.30265585	7.358851948	9.871297024	7.88545143	7.575807627	8.071479093	2.166305992	3.264570101	1.15999449	9.406980588	9.916854816	10.79503335
Zm00001d025081	0.069326744	0.139707665	0.292942237	0	0	0.135895595	0	0	0	0.019122602	0.104907898	0.061437617	0.093094623	0.015199682	0.128241883
Zm00001d025082	0	0	0	0	0.022303578	0.034562798	0.23405147	0.394591408	0.330528309	0.210103965	0.16720463	0.115629753	0.006313888	0.015463152	0.061970786
Zm00001d025085	5.130726117	5.071063414	6.097161303	5.710085077	7.141237549	6.954548054	5.867694924	5.040555163	6.422641169	1.762387136	2.882758004	1.195046774	3.794097823	3.308518905	3.355672642
Zm00001d025086	0	0	0.041040217	0	0	0	0.096466407	0	0.122176978	0	0	0	0	0.036200209	0.019089145
Zm00001d025088	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025089	0.130825205	0.178506066	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025090	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025091	0	0	0	0	0.007747895	0	0.123676157	0.177251572	0.094273333	0.056767397	0.126054924	0.013027417	0.039480128	0.012891946	0.027192795
Zm00001d025093	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025095	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025098	5.816851486	5.660436361	5.080283199	5.752028116	5.546403011	5.461528554	6.154605396	5.941820856	6.213854633	7.674576481	8.412870877	8.698718546	4.214968715	3.580145462	3.316388704
Zm00001d025099	84.71772666	65.86774558	89.79797221	91.07118855	97.59314132	172.8725686	143.0357389	106.4534503	91.27650681	7.004324929	7.373677019	6.203718861	99.93209301	79.35827354	82.71073545
Zm00001d025100	7.660196896	8.20273754	8.631785215	9.722624434	12.18133844	9.622178587	9.288046931	9.309140923	9.858700879	2.330879544	4.436210823	2.4111749	5.767673715	5.617132338	6.138131112
Zm00001d025101	0	0	0	0	0	0	0	0	0	0.184851818	0	0	0	0	0
Zm00001d025103	0	0.031629261	0	8.951025998	10.54227521	21.21023456	5.821836243	3.209673034	4.45357977	0.187024948	0.069668814	0.172474485	6.721919726	6.403287741	7.937746179
Zm00001d025104	0.399620684	0.40619108	0.758044374	2.255868631	2.521939886	1.984127961	1.966133778	2.426164983	2.637143084	1.817804344	1.891964626	0.776634488	1.812289739	2.444015369	2.374924583
Zm00001d025105	5.352082231	3.862198814	5.328324223	9.206737633	6.958623629	9.618141299	7.829826625	6.504746174	8.158833972	1.546766307	3.831081018	1.887149223	4.321085702	6.489648757	5.990780275
Zm00001d025106	3.118613744	2.816649359	3.430699887	4.15087203	4.563893952	4.585944486	3.991157346	3.328478727	3.232029967	0.638536058	1.085064959	0.483845767	2.605152401	2.346189931	2.080509448
Zm00001d025107	8.314243324	8.6247499	7.907882201	12.68181962	11.73775213	13.70518525	11.92447935	9.192096831	12.21184892	4.111969707	7.657067513	3.35646554	9.276780164	8.888499292	9.920669277
Zm00001d025108	2.411213409	2.746316688	2.322772372	3.007160765	2.44745221	2.558306259	2.750098513	2.017078019	2.44725127	1.35246014	2.909681786	2.78605334	1.923615116	2.124723178	1.907368039
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Zm00001d025117	13.12309482	13.21203965	11.88811186	13.91358203	12.15085592	15.61672226	13.55098197	13.65924027	14.38172873	6.848236709	10.85623548	4.48854437	12.98933469	11.62897576	11.27033927
Zm00001d025118	7.505775486	10.36713055	6.329849909	11.09146	12.27934151	8.84786911	10.6498913	13.9936743	12.03760304	10.91713093	11.79151061	5.502280671	7.940423743	6.948937085	5.542060979
Zm00001d025119	0.577657771	1.455124201	0.957219705	1.200716189	1.014865145	0	0.67499311	1.160872974	0	1.06224707	0.971259976	0.213301021	0.430945063	0.211082911	0.667851214
Zm00001d025120	0.056260222	0.141719915	0	0.666570428	0.259458836	0.275705879	0.131480139	0.203511065	0.173461142	0	0.212837834	0.186967562	0.346263472	0.555069878	0.715489435
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Zm00001d025125	4.225573756	3.746642941	3.6749902	4.128864289	3.511915735	3.980152641	4.679341182	4.423552818	4.039305994	11.29586253	8.533537883	14.13572695	3.200181599	3.0671514	3.520919662
Zm00001d025126	3.851647947	4.780085503	4.821907826	9.572025199	12.38104057	9.575871211	14.39219056	16.24623157	14.84204418	23.4664519	21.75887965	12.47183619	8.430779736	6.867056444	10.84712593
Zm00001d025127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025128	10.36043799	11.81999613	10.6825023	15.6965802	11.84172482	14.33829104	17.06052849	13.58819128	13.85311799	5.75802854	7.582572877	4.011382243	14.18390545	14.37086539	14.69173569
Zm00001d025129	0.565446256	1.218621937	0.562190617	2.585733485	2.268288895	4.32583284	2.9071854	5.621057904	3.207819448	3.847228472	0.982418754	0.570697861	15.63601775	17.08064293	31.40824053
Zm00001d025130	0.396764582	0.388676135	0.7305188	5.424776374	2.736608773	5.22697746	4.006587554	3.413823367	3.382958394	0.114845236	0.17913152	0.103096767	7.37794624	8.199561444	8.806176198
Zm00001d025131	15.69077023	13.21816754	16.60778584	14.66809808	22.28955383	15.9188046	18.25467096	17.92894772	18.97958482	9.649320464	15.06437841	5.869676678	8.7026302	8.007515327	9.980535312
Zm00001d025132	44.54776223	43.14503749	60.91205729	88.07321315	129.2831186	86.7460721	90.85009312	120.5117765	82.00817987	64.21777324	95.26882082	70.63939742	78.43542171	66.67635307	104.2968551
Zm00001d025133	0.027618654	0.023190532	0.04576606	0	0.485221719	0.022557754	0.096817194	0.077704225	0.181661123	6.348446291	2.228992592	9.463958043	0	0	0
Zm00001d025134	21.09554102	21.24285706	20.91684023	11.71870514	10.7912188	11.44424687	10.08897176	9.749845739	10.66026745	16.00540457	13.53012385	16.95882284	10.20992181	9.966368545	10.99094547
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Zm00001d025136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.003164327
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Zm00001d025142	0.921656219	1.676753605	0.222723873	19.98765234	1.754158294	4.14023491	1.944502625	0.123478623	1.199805382	0	0	0.085080744	0.429734543	0.982286581	0
Zm00001d025143	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025144	26.69873057	28.76241309	20.64506325	27.99738591	21.27015199	26.01930224	19.23227577	17.68158701	19.96204111	8.208571454	14.67383526	8.007299913	12.3072132	11.60795973	11.04388545
Zm00001d025145	0.408096535	0.171333032	2.028734299	0.084826716	4.212195261	0.999948187	6.914481664	7.217049094	3.523073462	15.00886407	18.95527399	23.88440839	0	0	0
Zm00001d025146	1.321900481	0.087628345	1.513162192	0.303692593	9.76323511	0.639279852	11.17832102	11.78655303	6.73558883	12.90576131	11.01070231	16.60871388	0	0	0
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Zm00001d025149	0.06201864	0	0	0.082181142	0.010214832	0.01899533	0.031705092	0.032716409	0.028682319	0.058804576	0.043991716	0.13310903	0.082413509	0.076485387	0.053776508
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Zm00001d025153	3.670956442	3.576970687	3.922227337	3.97475298	3.410994998	4.395313656	3.466786726	2.726900122	2.663302486	1.624711242	2.150669185	1.267772767	2.899625034	2.861008944	3.22444319
Zm00001d025154	0.069706738	0.021948974	0	0	0.080367747	0.010675036	0	0	0.010745967	0	0	0	0	0	0
Zm00001d025155	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025156	5.249643015	5.076717514	5.38811892	7.169017733	7.336950603	8.620627279	6.733061976	5.812127544	6.047203384	2.999206708	3.563254685	3.114800021	6.355020664	5.891501559	7.62266114
Zm00001d025160	29.12332594	24.1065576	32.68464466	37.80202139	74.59158667	36.71586071	38.02431584	47.1757392	37.95813651	5.383565987	10.57075907	1.295242386	10.12522437	9.42596295	14.74515889
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Zm00001d025165	14.29943894	13.34117626	16.31040536	19.79619361	32.82324595	21.74034303	19.58698161	23.78912867	23.36526317	3.311185531	7.388513392	2.604446229	8.157370474	6.593411937	7.183806304
Zm00001d025166	6.160444975	6.068403703	5.690030573	8.599822684	15.20281037	10.69947482	19.35466803	18.53651568	15.16551197	48.06838719	50.72207966	75.19964283	19.56354579	19.16499597	32.43378502
Zm00001d025167	1.360418626	1.318459317	1.061747612	1.421521837	1.541764954	1.399073211	1.546685685	1.452587992	1.499059915	1.291593959	1.887357426	1.305755896	1.34567215	1.311145126	1.110232647
Zm00001d025168	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025171	11.51317481	10.8634511	10.99111416	14.08607019	19.04534359	14.226178	21.37669695	20.45986965	20.30904704	28.74190694	31.81615452	29.76921922	13.40448117	12.81442595	13.88155535
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Zm00001d025175	13.13969294	13.3092192	15.72229643	8.352727083	4.790621201	8.257348191	4.12414142	3.717321077	7.814006302	0	0.857971488	0.730133045	4.020925205	4.451781274	2.900600038
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Zm00001d025180	4.294735023	3.913790634	3.878758753	5.09812772	6.414363234	5.249169699	4.721099455	5.178472859	4.94098252	1.14626475	2.177441953	0.819224121	2.266311215	2.112295694	2.333612452
Zm00001d025182	0.008480914	0.010681743	0.063240632	0.55000548	0.905162756	0.280537573	0.495497424	0.306781567	0.324238904	0.093572633	0.320841152	0.009394772	1.736746032	1.534017559	1.049145094
Zm00001d025183	0.01813161	0.04567366	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025185	12.19416997	14.56583196	5.98688334	6.583521706	11.62219951	7.917023784	10.67931089	13.90396588	11.63358836	13.31069264	10.6995108	8.218308964	9.231721546	8.79525088	9.751283689
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Zm00001d025195	37.56264612	41.73255159	40.37758498	73.84813368	49.56438972	73.22042784	58.18849898	51.21708321	61.82428451	0.504386528	1.836347443	0.331467297	26.71293462	22.2980965	22.65550981
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Zm00001d025200	0	0	0.124298507	0.124733938	10.13722922	1.35727351	10.1404705	10.88137128	10.56978684	21.27408295	8.071788031	9.042306831	0	0	0
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Zm00001d025206	15.1362405	16.05144355	14.45292824	17.89904036	16.65577043	19.35402324	15.74759887	14.21769404	16.93237359	9.574956072	14.81206004	8.437476389	13.55035132	12.96163174	10.89694203
Zm00001d025207	0.065334451	0.020572246	0	0.203705733	0	0.060032732	0	0.196946191	0.161150996	0.540641878	0	0	0.164500535	0.05371644	0.113303312
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Zm00001d025222	11.40862877	12.11348499	10.77262642	17.08196507	13.97438552	16.21815732	15.66204294	15.21636575	16.47526648	9.001120157	12.32911528	11.57891418	11.21893648	11.619204	10.87616719
Zm00001d025225	27.64129263	24.08773905	31.10310201	40.15641104	149.5740694	60.17789278	61.58605173	62.28939885	43.48699264	5.821317103	13.84841581	4.137806698	7.732873505	9.172302242	8.248388265
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Zm00001d025231	0	0	0	0	0	0	0	0	0	0.346491004	0	0	0	0	0
Zm00001d025232	5.173014392	4.912044926	4.587634176	12.79160986	15.99423992	11.99198218	12.96494086	13.62491049	14.02497347	3.617131566	5.991805939	1.598860879	6.43673021	5.712846253	7.467274029
Zm00001d025233	0	0	0	0	0.265467356	0.176306654	0.016815618	0.017351996	0.017747814	0.039694496	0	0	0.032207473	0.141981032	0.083188485
Zm00001d025234	0	0.017899137	0.008830899	0.053171008	0.121715245	0.078348331	0.041514649	0.077109962	0.070105709	2.538157662	0.241931572	6.249808616	0.127222867	0.031157769	0.008215079
Zm00001d025235	2.982561439	3.072399486	3.167664436	4.881048489	4.606366697	5.123952227	4.668530431	4.495962527	4.355588825	4.291812094	3.831359804	5.018736169	2.867782284	2.423290805	3.353933051
Zm00001d025236	4.547662523	4.749447224	5.248144914	6.481882767	6.289962231	6.471255598	5.495475934	5.006624473	5.538857967	1.246603999	2.689276396	0.782250646	3.461138837	3.452557576	3.690199925
Zm00001d025237	0.061701249	0.333055507	0.038341247	0.890434404	0.371659189	0.383361825	0.324440596	0.217878867	0.331555707	0	0.011115322	0.019528527	0.715115962	0.734367111	1.110788856
Zm00001d025238	9.820968041	10.78430711	11.09593453	13.8489135	12.14811989	13.48286147	11.8887562	10.73541632	11.18675684	5.575231445	8.944401397	5.412138568	7.520919693	7.12981594	7.074982545
Zm00001d025239	46.1587898	47.02815384	51.2916658	49.91299733	53.53311337	48.78409857	44.20993182	45.70874921	39.72623859	8.033600402	18.30577019	4.803860099	40.15869308	37.68879706	47.79983489
Zm00001d025240	22.40139502	23.52874842	20.27753141	26.05732808	23.91460056	24.30431172	21.32355468	23.01560232	25.36590424	10.03419408	13.70915571	8.879289838	37.72845471	38.6826711	36.09228961
Zm00001d025241	24.40496994	25.74903989	18.4656926	4.070577726	4.564552852	2.453752402	0.260035327	0.286218491	0.393379375	1.207203737	3.358172211	2.678820098	7.495708312	5.554011728	7.761399849
Zm00001d025243	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025245	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025247	0	0.196563581	0.038791438	0.155709314	0	0	0.03647223	0.150542431	0	0	0	0	0.174640979	0.444816272	0
Zm00001d025248	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025249	0.590202406	0.72984644	0.973561564	2.703402133	0.791817861	2.800286613	0.351095318	0.517563461	0.555838121	0.103598272	0.121788682	0.118872626	17.06376702	20.24523706	24.45310486
Zm00001d025250	0	0.037760898	0	0	0	0.183652765	0.070065074	0	0.221847671	0	0	0	0.167747256	0.328659796	0.069323737
Zm00001d025251	0	0.011908001	0	0	0.311442883	0.046332316	0.06628563	0.672599846	0.676282527	0.078236039	0.321906185	0.136152727	0	0	0.010930714
Zm00001d025252	2.379640717	2.518798598	2.498822354	4.269838463	4.404441238	3.841604764	4.151985271	4.20845876	3.789432792	3.500380321	3.813426267	2.817511305	4.92897317	4.309593226	5.159000411
Zm00001d025253	0.192063713	0.233161404	0.264580193	1.356394693	2.521573999	1.649965285	3.293390556	2.031252615	2.636938193	0.485095226	0.726595511	0.392195158	0.927027896	1.050198222	1.04337622
Zm00001d025255	20.61098067	15.33207524	20.53071634	18.57504994	22.78509395	18.92199252	20.93606395	17.24583762	20.19108149	0.370612	7.853245438	0.506052743	16.73443328	16.89430864	14.6873664
Zm00001d025256	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025258	6.347811116	6.574805858	7.168668491	12.62960916	16.02298296	10.98240128	13.18405218	16.00315574	15.61815828	12.65147089	15.74196161	10.25999658	8.025003851	9.215754703	9.221277755
Zm00001d025260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025261	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025263	6.409988397	6.724104251	6.999562101	4.33807769	8.756532341	5.05387567	7.417352353	8.337336475	8.341126186	5.125242811	5.826967723	5.140863243	3.80536191	3.506117698	3.20690188
Zm00001d025264	0.149005274	0.062557565	0.077160081	1.022081029	0.801706594	0.82148332	0.33371594	0.404249499	1.010706556	0	0.125266954	0.055020427	0.555805622	0.421974103	0.416320209
Zm00001d025265	0	0	0	0	0	0	0	0	0	0.095226694	0	0	0	0	0
Zm00001d025266	0.054641223	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025267	16.03571596	17.64667181	13.39557207	27.98298351	17.51669378	26.94961555	17.51794447	16.54505638	18.00823468	7.753572964	14.35333712	6.980064977	26.02301608	24.00383601	24.07950762
Zm00001d025268	1.889203196	1.6882824	1.673349801	3.104110771	4.0856169	3.332191894	4.36601159	4.367876868	4.319581939	3.498844729	2.94957104	1.757265422	1.768443895	1.489155445	1.511588959
Zm00001d025271	9.381703355	10.49047914	9.623674092	9.84610388	11.94566604	9.148346956	9.694066117	11.28046748	10.74263717	14.20921591	9.8477956	6.13645893	9.519261222	8.769997221	7.880087249
Zm00001d025273	36.76510981	37.46346565	36.72999175	40.52524398	31.36849855	35.79334286	29.98325814	33.73073307	33.82862447	37.79321334	44.66088505	50.44235271	34.53645724	36.88871948	39.07281718
Zm00001d025274	7.507511035	7.672018877	5.630215311	4.265051325	4.177433428	4.436203332	4.720051882	3.648106522	3.929798414	0.876713333	1.085736027	0.472425982	3.430693027	3.210845649	2.744387616
Zm00001d025275	0.066852	0.112267121	0.01384731	0.152854009	0.205537073	0.49141708	0.117174843	0.268694315	0.219858817	0.199766513	0.168605033	0.061713009	0.236896858	0.256499283	0.064408362
Zm00001d025277	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025278	47.91564028	61.56751496	44.17121888	10.16953892	9.879330844	9.163684035	11.69806758	14.10431073	15.16079476	74.49245581	82.0913532	116.0919133	6.498298634	5.976517061	8.216111158
Zm00001d025279	0	0	0	0	0	0	0	0	0	0.503191606	0.009021384	0.071323575	0	0	0
Zm00001d025280	0	0	0.036976387	0	0.006533862	0	0.017382848	0.005979106	0	0.006838914	0	0	0.011097969	0	0.01146595
Zm00001d025281	9.339603384	8.786555973	5.657253588	1.971337041	6.959216314	2.187907755	7.53898642	9.511285871	9.625155317	75.80733003	69.63027017	75.4861525	1.037478082	0.549824637	1.010377092
Zm00001d025282	0	0	0	0	0	0	0	0	0.025546095	3.171048923	2.455374652	7.663970333	0	0	0
Zm00001d025283	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025285	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025286	68.81651656	70.12988369	70.1047248	40.30889811	56.15752706	40.23988833	47.67431763	53.5194258	55.05713695	53.27206486	87.95436002	70.43259856	32.5258908	29.98550941	31.52498304
Zm00001d025287	2.505060407	3.289393824	4.835545545	0	0	0	0	0.128533304	0	1.029116557	0.033605974	0.14760597	0	0	0
Zm00001d025288	0	0	0	0	0	0	0	0	0	0.046670509	0	0	0	0	0
Zm00001d025289	0.227984924	0.237639605	0	0	0	0	0	0.056875433	0	0	0	0	0	0	0
Zm00001d025291	11.97686471	12.80438574	9.620465111	11.72587625	9.565073167	10.80654819	6.327821197	6.649841491	8.460941308	0.297829297	2.136653933	0.349627069	9.666155367	7.630018866	7.048278286
Zm00001d025293	0.379756498	0.239152357	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025294	13.0157638	13.95601426	13.13736694	15.15570657	14.28496065	12.22406219	8.692548263	7.778025616	10.13678399	0.961398271	2.610907954	0.357287327	9.873036669	8.622592347	9.779395139
Zm00001d025295	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025296	40.38700683	47.69566907	29.36584287	5.557950116	7.141316559	2.289142847	5.505758744	6.758882323	6.240360293	5.714086688	20.0204879	2.956880881	2.389586717	1.475788503	2.576159522
Zm00001d025297	0.029237027	0.003682414	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025298	0	0	0	0.020818278	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025299	0	0	0	0	0	0	0	0.091579979	0	0	0	0	0	0.104075602	0
Zm00001d025300	7.423572047	7.71183176	6.791176687	5.131629291	4.249491613	5.316628032	4.549901204	3.605114029	4.269962024	0.530249584	0.943872915	0.505189988	3.375521447	3.111712601	2.875073669
Zm00001d025301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025303	0.18960312	0.213855968	0.189918254	0.448224296	0.369151682	0.384838267	1.101142766	1.016839179	0.628208681	0.542502398	0.203409704	0.253921377	0.782186253	0.719718012	0.76558891
Zm00001d025304	5.910076654	6.522422132	6.225285376	6.920199458	5.160249872	7.213329337	7.182161603	5.496591498	5.583467974	2.675978854	4.522300529	2.243244738	6.60358281	6.444605765	7.142267444
Zm00001d025305	54.84059825	42.9707061	71.242972	129.505325	255.4043789	120.6352096	168.1549297	193.5202832	192.9099486	73.19802573	180.7027984	80.9924041	61.60317011	50.63638699	51.36888922
Zm00001d025306	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025307	1.016361761	1.074116461	1.085281837	1.00166561	1.023645756	0.672684649	1.194444121	0.912082594	0.857248595	3.935317906	2.636988472	6.897629182	0.676522067	0.95729099	0.840770606
Zm00001d025308	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025310	0.681857053	0.246905426	0.180075465	1.626356604	3.908243144	2.725388708	2.201021799	2.713142521	1.650303248	0.070529497	0.214960905	0.028324886	4.787950107	4.765157242	4.493422882
Zm00001d025312	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025314	0	0	0	0.035082654	0	0	0	0	0.034692228	0.232776364	0	0	0.84991943	1.017628109	0.682967188
Zm00001d025316	0	0	0	0	0	0	0	0	0	1.226334015	0	0	0	0	0
Zm00001d025317	0.081741309	0.205906962	0	0	0	0	0	0	0.050404852	1.437367952	0	0	0	0	0
Zm00001d025318	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025319	0	0	0.054941471	0	0.174750425	0.216641968	0.090399239	0.146587194	0.027260183	0	0	0.012242823	0.44522861	0.424042873	0.472768833
Zm00001d025321	0	0	0	0	0	0	0	0	0	0.041993063	0	0	0	0	0
Zm00001d025322	0.351671612	0.221465848	0.054632314	1.60816179	7.510600335	2.118325393	60.71465361	75.90242892	66.55620353	18.69321444	37.56553558	15.32292353	15.03619519	17.89431059	28.1726318
Zm00001d025323	4.81585744	3.535127011	4.124407336	5.043232778	14.63028644	6.495841262	23.17223618	24.45142579	23.7150661	49.91102916	47.59923921	68.29852116	14.10044179	12.08770737	13.38932286
Zm00001d025324	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025326	0.630633525	0.737550597	0.755762016	1.404462099	1.919103859	1.710784501	1.807147947	1.873844052	1.583268716	2.578180388	2.982184153	3.6093672	1.713840828	2.485469403	2.673360855
Zm00001d025327	0.42315724	0.027331698	0.283177496	1.502038776	2.115913283	2.086995036	0.93820471	0.902716936	0.976834031	0.40403326	1.436655382	1.610591998	0.388534597	0.273570154	1.016087919
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Zm00001d025332	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025333	0.195303342	0	0.229238925	0	11.59463292	2.060409112	11.56273912	10.84568609	6.155392522	11.71696455	4.241553984	3.762054442	0.752785781	1.118069325	1.49277114
Zm00001d025334	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025338	0.043771293	0.165390317	0.435192737	0.072786211	2.826079915	0.32175494	5.915974836	11.9806551	3.220934596	0.08049044	0.625566057	0.016162617	0.914321009	0.847710774	3.474917061
Zm00001d025339	12.71184908	11.85062864	13.89805342	19.89809665	38.2794447	21.56695633	23.02221567	28.3897935	22.78252332	22.29369684	29.59636109	16.89903848	16.69644354	12.66983514	17.87974721
Zm00001d025340	5.603055128	6.341637494	5.363123612	9.092506894	6.652555656	8.844136331	7.162578164	6.496674107	6.328609761	2.327388043	2.420118142	1.343994334	17.59117227	17.9129267	16.84189293
Zm00001d025342	1.034240361	1.387010424	0.822212147	1.535298605	2.00276565	1.210657024	1.374863456	1.211716721	1.182553405	0.184795202	0.158406106	0.134513569	1.279174297	1.455082108	1.253814801
Zm00001d025343	0	0	0	0	0	0	0	0	0	0.2473158	0.086145482	2.421586111	0	0.009360954	0
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Zm00001d025349	0.115612972	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025353	0.134213197	0.215674299	0.304842396	1.483376324	3.808278022	1.924959499	2.682301668	3.091521838	3.190581061	0.94785054	0.951285689	0.325547615	0.647365849	0.626567538	1.075480104
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Zm00001d025358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025359	18.82274977	18.18383941	19.981104	21.98698189	27.08201109	22.83580922	22.8954075	23.31680443	25.21784009	18.04083109	22.22209993	15.61737331	18.15982545	21.21513173	18.96813603
Zm00001d025360	8.568486416	9.566094284	14.68124105	14.34642126	85.50266219	21.60945203	76.1346598	112.7411781	115.0219148	36.85550431	137.2866023	16.54935206	2.591016516	2.958576339	2.267716295
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Zm00001d025493	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025495	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025497	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025500	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025502	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025503	0	0	0.13052996	0.043662407	0	0.064337255	0	0	0	0	0	0	0.039176824	0	0
Zm00001d025504	0	0	0	0	0.015705193	0	0	0.114973993	0.088197505	0.016438435	0.015030396	0.026406927	0	0	0
Zm00001d025506	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025507	4.854413374	4.941253958	5.004042747	5.745193931	8.186632487	6.058627317	8.37949082	8.599472068	7.703183742	2.440513044	5.301369021	3.584236782	6.562132801	8.089885676	6.865657078
Zm00001d025508	0.585312767	0.236958299	0.025979587	0.756047289	9.475178253	4.814735232	7.254627788	6.855895678	6.96072509	0.518941802	0.606294932	0.903104783	0.865514282	1.420775192	0.870044701
Zm00001d025509	545.5348151	546.3456825	653.1597858	511.8077623	401.687678	556.561768	570.0606386	593.5845753	461.7161989	19.21747944	35.21930915	17.31745555	1205.666032	1156.850199	1310.66657
Zm00001d025511	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025513	13.3145209	16.18457772	15.87718485	16.91567219	14.18809801	14.19814174	17.88445035	18.62496709	15.8168774	8.821065964	12.2813113	6.781885264	16.05048089	14.213898	14.89467606
Zm00001d025514	2.052424431	1.372844065	2.39223737	4.280619412	5.6379245	4.375515435	4.552625288	6.305735961	5.219723828	10.82676631	7.808386502	9.492528659	3.010401646	2.555016307	2.466725548
Zm00001d025517	1.776170087	2.39656872	2.27736777	3.386347093	5.25075874	3.891038415	4.294752923	5.123012771	4.35065713	2.333213254	3.392975663	2.442892093	2.680296469	2.606415078	2.919622605
Zm00001d025518	0.656876104	0	0	0	0.054095665	0.201190776	0.047972483	0	0	0.113242555	0.10354273	0	0	0.225028329	0.094929802
Zm00001d025519	0.308954439	0	0	0.616503318	10.05519212	1.987185169	3.429626011	2.421436734	1.409798081	0.085219821	0.038960146	0	0.5531679	0.254015029	0.732246661
Zm00001d025520	0.572327146	0.999886155	0.504786353	1.54268924	1.569066487	1.741638318	0.916854248	0.734618603	1.206755461	0.458322672	0.058203459	0	0.836720141	0.910749361	0.875136117
Zm00001d025522	12.66887447	11.6087978	10.85779917	11.06596709	13.19974115	13.5446344	6.992889579	6.608061654	7.343976003	0.106339918	0.628264045	0.249668614	2.754402666	2.743803118	4.100596797
Zm00001d025524	0	0	0.005753691	0.005773847	0.122003768	0.10209427	0.119013347	0.094898319	0.022838365	4.750435083	0.1926568	0.425663027	0.046626125	0.101502788	0.032114755
Zm00001d025526	131.1057951	142.1607365	123.8627996	138.9663512	106.2269962	125.2690114	91.99728357	79.38158244	84.18919097	23.42046827	41.9760948	17.64112636	161.7185181	157.4897105	145.3792699
Zm00001d025528	217.5763044	204.5282742	104.3551539	62.03501216	45.73964544	55.71199987	10.34215852	9.048128725	13.73583839	7.461955412	14.44432448	5.997186287	6.830442473	6.877669048	6.313074901
Zm00001d025531	0.022229649	0.027998325	0	0	0	0	0	0	0	0.122633402	0	0.049249992	0	0	0
Zm00001d025532	0	0	0	0	0	0	0	0	0	0	0.099941244	0	0	0	0
Zm00001d025533	1.012683994	1.492310708	2.366105299	0.795674595	12.96997656	2.307658205	29.44103283	30.68539831	41.31428094	170.0431339	219.5337126	139.1487383	0.668603285	0.632779661	9.179079009
Zm00001d025534	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025538	5.264500803	5.412918786	5.694359983	4.57807165	5.011820918	5.447454283	5.465647536	4.762443596	5.922604386	5.553527569	5.754437021	6.349631997	3.664875041	3.598949283	3.921511951
Zm00001d025539	4.969871584	5.955858881	3.865436312	5.703778805	5.530711645	6.72969614	6.89138706	6.470556724	5.882246229	8.635481185	14.94121597	15.96837126	4.340306041	3.839689657	4.436967872
Zm00001d025540	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025541	0.229768637	0.361743061	0.142778569	0.573114954	1.072253353	0.504350618	2.382801309	3.647807568	4.250526805	26.05090271	25.69077859	31.35988062	0.214265403	0.692671234	0.774794709
Zm00001d025542	19.41444278	18.46133637	19.69448883	38.74516016	45.69664701	44.36317669	47.96759874	51.20944937	49.83090626	44.44819936	44.00059841	45.92329278	22.82919122	21.65670816	28.31830254
Zm00001d025544	38.4329076	35.19932244	53.57255893	93.80493126	59.64792224	131.1160803	83.48754072	63.77891397	109.1626366	15.55207391	17.21054508	38.53058041	20.18992279	22.65874537	24.97210784
Zm00001d025545	67.99422797	58.11102365	78.24537498	148.5336676	113.3960961	177.285635	152.6030987	133.3452135	150.4281771	37.45580363	40.34913034	58.21403945	33.88703378	35.72350327	44.59103693
Zm00001d025547	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025548	1.576857798	0.923206756	1.136792741	2.48896375	2.142670904	2.252586593	2.026094436	2.287539553	2.199185608	0.692351055	0.994234137	0.822210808	2.801919564	2.316063139	2.770200899
Zm00001d025549	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025550	0.021979476	0	0	0	0	0	0.051366035	0	0.094873763	0.01515666	0	0.012173933	0	0.012047337	0
Zm00001d025551	15.88266734	15.36721973	11.94501057	7.779472873	9.971525559	7.074097977	8.832138768	9.595669288	8.55058935	4.593827521	7.292901215	3.405963296	5.263356472	4.801688822	5.938640679
Zm00001d025552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025554	0	0	0	0	0	0	0	0	0	0.157730702	0	0	0	0	0
Zm00001d025556	0	0	0	0	0	0	0	0	0	0.112282873	0	0	0	0	0
Zm00001d025557	0	0	0	0	0.021808543	0	0.135379974	0	0.040824269	0.342401068	0.020871507	0	0	0	0.038270731
Zm00001d025558	0	0.534750612	0.035177329	0.141202235	0.037295769	0.138709169	0	0.307162663	0.244353956	0.15614812	0	0	0.031674016	0.155143755	0
Zm00001d025559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025561	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025564	0	0	0	0	0.027460147	0	0.048703771	0.025128653	0.051403729	0	0.026280281	0	0	0.022845864	0.144565354
Zm00001d025565	0.164713662	0.180397797	0.124604032	0	0	0	0	0.008635095	0	0	0	0	0	0	0
Zm00001d025566	1.08252427	0.461811448	1.453861473	0.174203524	3.450930331	0.12834584	32.99018052	55.34799192	51.5287257	735.6054174	400.0837539	624.6134942	0	0	4.824507132
Zm00001d025567	0.41116493	0.949416876	0.255498493	1.367432171	2.121932951	1.301311018	1.921784896	1.528628221	1.943808165	1.086873098	0.64811521	0.075911642	2.223849336	2.028300455	1.624156127
Zm00001d025568	0.079773794	0.075356541	0.012392888	0	0.473011545	0.280984711	0.314602916	0.757488667	0.270553834	0.343816293	0.440113246	0.30929426	0.055793398	0.120244897	0.080700718
Zm00001d025570	5.167523774	4.1924859	4.547319109	5.344851499	5.617277187	5.167725644	5.003373307	5.018170577	5.169665793	3.027754051	4.060335935	2.273942291	4.035659156	4.183822062	3.666184792
Zm00001d025571	0.097525015	0.133999764	0.132222955	3.184467527	3.235952142	3.606168527	3.874571348	4.981665785	3.225567304	0	0.067081185	0.019642507	1.160784903	1.098260828	1.619531976
Zm00001d025572	0.4851083	0.555450636	0.904341035	2.025853519	0.95880203	1.350736463	1.253938814	1.010333962	1.006186534	0.060822211	0.064881211	0.032568543	5.453192732	8.049408501	12.27924647
Zm00001d025573	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025574	29.61328297	30.76066793	32.26495591	60.55989155	86.6863405	68.01850949	103.0837275	147.1861005	163.0145711	414.2705958	434.4328994	438.6015628	23.99020038	21.68272286	25.39645736
Zm00001d025575	0.763226117	1.099776492	0.817244626	0.715241317	0.44885496	0.734309846	0.566840926	0.46533779	0.502542177	0.112992532	0.209347039	0.071649767	1.24974748	1.214833585	1.061863419
Zm00001d025576	0.250848329	1.184791494	0.597530496	0	0.027544123	0	0	0	0	0	0.026360649	0	0	0.091662916	0
Zm00001d025577	0	0	0	0	0.080061584	0.669965285	0.070999275	0.21979195	0	0	0	0	0	0.066608385	0.421488322
Zm00001d025578	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025579	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025580	0.767651798	0.752822508	0.757405733	2.177861391	2.918661677	2.886048486	2.040506391	2.868694757	2.233120748	1.171863864	1.167551909	1.090550614	0.859027011	0.404703756	0.860410687
Zm00001d025581	17.90717553	18.35534467	18.29250603	8.534620832	12.64395397	11.33470351	17.32394231	15.09225762	15.37994961	24.74967351	31.55820848	30.27180502	11.83327422	8.935134911	12.85327223
Zm00001d025583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025584	6.773531429	7.280136604	7.469095806	4.792940581	5.07202131	4.944112574	3.815969226	3.623273285	4.663032518	1.524146057	1.933808606	0.646490017	3.04303578	2.531844619	2.828106247
Zm00001d025585	7.89727954	8.21068038	8.217548588	7.11585201	6.102786931	7.575901729	6.246291831	6.827324867	6.898837928	1.977964826	2.873310763	1.994490477	5.592794071	5.145361646	4.651301644
Zm00001d025586	0	0	0	0	0	0	0.01868402	0.057839987	0.029579689	0	0	0	0	0	0
Zm00001d025587	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025588	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025589	0.059656293	0.075137322	0	0.037200371	0.078605919	0	0.011618063	0.011988652	0	3.921816181	0	0	0.011126218	0.010899554	0
Zm00001d025590	0.034566963	0.112471146	0.028639949	0.003592535	0.064524981	0.063523889	0.057221287	0.038206565	0.017762772	0.246313295	0.083547595	0.13083002	0.061245774	0.135785109	0.219802696
Zm00001d025591	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025594	0	0	0	0	0	0	0	0	0	0.125699237	0	0	0	0	0
Zm00001d025596	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025597	0	0	0	0	0	0	0.212997826	0	0	0	0	0	0	0.039965031	0.168595329
Zm00001d025598	0.035602172	0	0.011061621	0.044401484	0.046911084	0.010904383	0.062401707	0.042928115	0	0	0	0	0.02987998	0	0.051451211
Zm00001d025599	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025600	0	0	0	0	0	0	0	0	0	0.475333248	0	0	0	0	0
Zm00001d025601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025602	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025604	0.316463748	0.531449682	0	0	0	0	0.049305052	0	0.026019171	0	0	0	0	0.023127912	0.024391685
Zm00001d025605	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025606	0	0	0	0.033301113	0	0.021808766	0	0.021464058	0	0.012275316	0	0	0	0	0
Zm00001d025607	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025609	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025610	0.162109493	0.034029584	0	0	0.142402026	0.430313671	0.410420712	0.325778582	0.033320994	0	0	0	0.181405728	0.088855059	0.374841393
Zm00001d025611	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025612	23.12593238	21.99161893	23.03895171	36.76442882	38.10811726	34.63611292	40.84869991	39.91194847	40.36421918	19.77713532	20.05071207	11.6051985	30.2021641	25.53472272	29.78622465
Zm00001d025613	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025614	0	0	0.096537783	0	0	0	0.015127687	0.015610224	0.01596631	0.142840042	0.065302517	0.100388833	0	0.028384255	0.02993525
Zm00001d025615	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025616	48.33941956	57.30992938	59.02915048	128.8306547	66.00548867	118.8240318	35.34558263	36.49375768	29.18231703	14.65700532	18.99637908	9.505713063	287.2855964	323.9618213	314.9829945
Zm00001d025617	45.89576945	43.31121198	50.40649183	55.05502558	80.25824844	68.96076908	88.91646566	98.61030262	110.6793694	120.9332235	136.0838228	101.3184922	53.22974004	57.16076174	53.08264671
Zm00001d025618	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.0681285
Zm00001d025619	55.13479169	53.85419339	59.90363112	37.87710293	63.35210148	40.77056001	36.20621151	42.22968921	39.79655219	7.369445611	16.58956471	6.040732857	13.08848638	13.8442268	17.91156231
Zm00001d025620	0.332768371	0.3692274	0	0	0.005219895	0	0	0.004776701	0	0.043708804	0	0	0	0.008685533	0
Zm00001d025621	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025622	0.91876572	0.416587977	0.274042738	1.993769866	2.227519869	1.80098195	1.610366628	1.750359277	2.039567298	2.483573626	1.297624216	0.122132036	0.781377541	0.463304293	0.424887421
Zm00001d025623	3.452624865	4.918661552	3.930349795	4.342148528	3.75416106	4.251265287	7.668735394	9.697526811	5.732257563	4.617686301	3.534318588	2.873316857	5.051898006	4.153835745	6.125087614
Zm00001d025624	10.19500136	10.13024856	8.567934493	9.107996734	9.917885287	11.02293311	8.71561617	8.876213352	8.226061076	3.867668818	5.697505103	2.858446379	5.034138164	3.437163474	4.086545428
Zm00001d025625	1.083336366	1.082674237	0.958559482	3.921098501	2.93248824	3.621044071	1.823140306	1.526332984	1.916947317	0.617128035	1.165658372	1.578354069	1.811843747	1.729752642	1.837885124
Zm00001d025626	18.71265937	18.97746893	17.91712696	16.34893832	24.59840363	17.14386677	24.13204343	27.22515347	27.55011816	22.97612432	35.770329	21.83476998	14.98041909	13.64333031	13.98712112
Zm00001d025627	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025628	10.22138749	9.471401788	8.294647913	7.428682943	10.93529561	8.195582091	10.52410518	11.61386596	10.37418603	16.41583956	13.45187784	13.27616908	5.36911982	5.602521949	5.351574165
Zm00001d025629	0.592498688	0.750494371	0.079493313	0.470233693	0.199611804	0.494926337	0.05507208	0.028414374	0	0	0	0	0.218496894	1.096061401	2.214604055
Zm00001d025630	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025631	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025632	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025633	0.121192913	0.127202436	0.100412606	0.545806965	0.141946172	0.482553179	0.06687324	0.016236785	0.004151791	0	0	0	0.222264081	1.38391591	2.350827503
Zm00001d025634	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025635	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025636	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025638	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025639	8.458129797	9.105521618	7.888613344	8.006547438	5.562294909	7.956576973	5.291616668	4.132342626	4.827314175	4.339256265	4.977454081	3.385670183	5.774705344	5.847074557	5.590757471
Zm00001d025640	4.072425663	4.272949648	4.358507397	16.37857284	10.94490335	15.91621124	13.77249606	12.98623041	13.26585719	1.828858907	3.471740332	1.744846464	22.09288351	20.70566424	19.93042083
Zm00001d025641	0	0	0	0	0	0	0	0	0	1.28874403	0	0	0	0	0
Zm00001d025642	0	0	0	0	0	0	0	0	0	1.457609601	0	0	0	0	0
Zm00001d025644	40.99628618	47.80366199	40.87135069	43.13584381	37.43516471	45.66716664	35.07002421	30.94586654	35.86151116	2.09765605	6.676329723	1.453345303	49.57249813	49.24990071	51.21620038
Zm00001d025645	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025646	0.028481737	0.017936427	0	0.035521187	0.018764434	0.017447013	0.099842731	0.017171246	0	0.117843034	0.125707346	0	0.175295882	0.140502063	0.164643876
Zm00001d025647	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025650	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025651	3.846019689	3.586733891	3.597943127	5.111119336	4.700771886	3.649791668	4.052033968	4.434695372	4.516416152	1.608679699	3.458573909	1.885771212	2.528199996	2.505494125	2.903604216
Zm00001d025652	1.498969965	1.77922764	1.784896042	13.50702322	13.27772189	12.11475688	8.62017608	10.14424383	6.184736104	3.203815215	5.076952084	3.121027401	40.72294786	47.19750886	47.96183846
Zm00001d025653	1.207353328	1.208148163	1.207170999	3.973844376	3.991117793	3.525547734	2.885229515	3.170637521	3.504191499	1.160172237	2.686335694	1.739692195	2.658114553	2.394982779	2.38241656
Zm00001d025654	5.595997304	2.899567439	4.885912236	0.795085642	6.603525054	3.644888858	10.69817448	11.78677036	7.73133386	0.024423427	0.893257232	0.235404754	2.893249045	3.746721675	3.112025174
Zm00001d025655	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025656	0.76918832	0.329024899	0.56515254	3.541560412	3.486758462	2.038818632	0.780087579	0.962464748	0.930723987	0.086735142	0.213515662	0.123255686	1.033978415	1.500809956	1.756201341
Zm00001d025657	1.545531483	1.299145663	1.215109137	3.469535676	4.413815375	3.622323981	4.189027039	4.86550992	4.425394878	5.792235649	7.084063303	4.161073598	2.729601159	3.012846724	2.757956886
Zm00001d025658	6.291222328	6.061296752	6.492662135	5.624136548	9.228645192	7.055202054	6.909475523	7.311280863	7.363312446	4.250949421	5.931352193	3.486758225	2.713687147	2.588959721	2.753314787
Zm00001d025659	0.283540165	0.289556666	0.552386595	0.344061724	0.545262467	0.253490229	0.456679756	0.49896715	0.39693821	1.067457082	1.169295748	0.908322791	0.368743071	0.445238226	0.354390405
Zm00001d025660	35.25675485	37.76571903	31.19471245	28.91575797	41.20190544	33.05280863	41.72151565	44.3821909	46.05227238	304.0183131	146.8445203	398.9092165	31.42441468	30.73108948	32.39630984
Zm00001d025661	3.197170417	2.957216479	3.166345204	4.257350581	3.88362067	2.182895418	4.280711484	5.059765955	4.312653872	0.321520581	2.078863086	0.737850062	0.913068133	1.533372086	2.175464999
Zm00001d025662	0	0	0	0.065326321	0.069018607	0.25669168	0.183618815	0	0.322996609	0	0.066053121	0	0.293075666	0.229684087	0.242234668
Zm00001d025663	12.20512116	10.60095474	12.64822538	12.38556372	19.95272541	14.46784134	13.86778409	16.37471531	15.88377227	12.61174141	17.91461466	11.78356656	7.155290389	6.211785916	6.879085331
Zm00001d025664	0	0	0	0	0.048004947	0	0.074499573	0.05491138	0	0.288915634	0.183769376	0.020179044	0.040768953	0	0.263254698
Zm00001d025665	12.24121793	13.35565423	10.35333605	11.2090297	21.51847963	12.88361667	37.52916591	40.91231415	35.31545808	195.0470305	170.9852516	163.2213842	15.71925003	14.91755646	17.162569
Zm00001d025666	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025667	8.867621333	9.70907885	7.476643981	6.000366536	4.621513615	6.015862295	6.744535175	7.088382314	7.062006508	105.8733893	49.1235182	224.8090457	3.643324451	2.624585847	4.513427652
Zm00001d025668	1.953370031	2.332662908	1.745333894	2.262776769	2.819128154	2.10735375	2.296279561	2.486012874	2.868189848	11.62750435	8.946782532	15.3636292	2.852987043	2.368661686	3.707637061
Zm00001d025669	0	0	0.004549036	0.004564972	0.024114935	0.017937491	0.136866073	0.185366705	0.063198373	0.07067427	0.138472808	0.0446019	0.086015942	0.088276173	0.143881556
Zm00001d025670	0	0.005309581	0	0.04206024	0.005554689	0.025823515	0.019703777	0	0.00519902	0	0	0	0.037739253	0.023106517	0.024369121
Zm00001d025671	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025672	0	0	0	0	0	0	0	0	0	0.091086403	0	0	0	0	0
Zm00001d025673	2.822950055	2.597141649	2.233549438	2.002818234	1.988614521	1.815519397	1.73650211	1.68290884	2.099775926	0.655166685	0.935681457	0.4587087	1.201961704	1.30420939	1.441089569
Zm00001d025674	1.072427426	1.049324572	0.688437997	0.005526797	0.046713404	0.010858433	0	0	0.005465291	0	0.055882867	0	0.099180225	0.140881593	0.061481279
Zm00001d025675	15.31837054	13.20812536	14.35220883	13.80903987	12.39507651	12.09659543	13.22682283	11.61852023	12.23339928	8.304226673	11.65479466	6.710558638	7.495674975	7.583725799	6.62278337
Zm00001d025676	0	0	0	0.125599778	0.033174689	0	0.088258768	0.15179002	0.34155553	0	0.095247871	0.251011699	0.084522374	0.082800479	0.116433238
Zm00001d025677	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025679	8.419744065	8.593085837	10.226753	12.99601838	16.02375411	13.94697574	15.59448369	14.50103554	14.1574028	4.531158194	5.669999906	2.201943686	9.689081505	8.164284945	10.76300536
Zm00001d025680	0.724197206	1.033746269	0.460017592	3.381934816	3.78513638	3.332081614	3.704582553	4.259358412	3.751171214	0.088781097	0.416029693	0.08022328	4.574257369	4.851552492	5.079442843
Zm00001d025681	16.19202127	15.38829343	15.02716943	13.07442406	23.57437387	15.39853442	17.14813006	20.81080941	19.61420549	12.84107763	13.54750529	7.451622429	13.93134499	16.46479232	15.65156942
Zm00001d025682	0	0	0	0	0	0	0	0.050308432	0	0.019180962	0	0.015406279	0	0	0
Zm00001d025683	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025684	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011027878	0.069782835
Zm00001d025685	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025686	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025687	0.005717789	0	0	0.606133183	0.986957415	0.385279075	0.420917912	0.482604657	0.190393735	0.055200418	0.043261894	0.114010333	0.153561353	0.10028866	0.099158169
Zm00001d025689	14.15357867	14.2902034	13.52810028	13.17145825	15.83208332	11.58062691	14.56999347	16.54516019	17.87258109	27.27454999	23.05003484	33.36706403	8.112501102	7.087005927	7.61575463
Zm00001d025690	2.468693302	1.882620707	2.569100865	4.159666337	9.150976159	5.376865914	6.591536385	7.650217033	7.256012222	20.45582371	12.95872345	16.63723157	4.381817825	3.961349232	5.533642841
Zm00001d025691	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025692	9.449712757	9.186177191	8.725364554	9.339119182	12.57974765	10.41549357	9.88087302	11.0418046	11.02135014	7.264281296	9.164564592	5.849109195	7.565696097	7.383088602	7.576277614
Zm00001d025694	6.54368489	6.854287702	6.859238943	8.476998243	8.883545588	8.070895259	9.718776709	10.91875399	8.532107688	2.309381623	3.47297836	1.037285789	6.952765557	6.074459315	8.507882725
Zm00001d025695	0.911415595	1.057087829	0.920836174	3.630827544	2.894312648	3.092765406	1.800521191	1.241271083	1.835643175	0.144689769	0.512648251	0.261485569	1.959094859	2.206702262	2.471316419
Zm00001d025696	0.184595221	0.05636324	0.013903969	0.4046276	0.331679024	0.29468604	0.535980618	0.472139008	0.717464808	0.231442948	0.246888404	0.198289656	0.419395594	0.386323184	0.924808153
Zm00001d025697	0	0	0.004629605	0.041812406	0.304321279	0.03651037	0.113173232	0.273991327	0.284835484	0.061650852	0.056370129	0.012379596	0.012505626	0	0.008613522
Zm00001d025698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025699	0	0	0.025004635	0.301106753	0.318125498	0.566931625	0.434929336	0.388153553	0.372194768	0.083244528	0.139542686	0.144868906	0.33771633	0.110278784	0.139565669
Zm00001d025700	0	0	0	0	0	0	0	0	0	0	0	0	0	0.010209051	0
Zm00001d025701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025703	0.043807257	0.186747515	0.071195722	0.046229201	0.062162679	0.103211315	0.287444688	0.365687863	0.137144185	0.501929414	0	0.018664497	0.049021727	0	0.175317117
Zm00001d025704	0.013324789	0.050347865	0.016560087	0.016618099	0.526720945	0.310169114	0.342540363	0.417733238	0.542294307	0.826968662	0.067211948	0.14760597	0.014910867	0.014607102	0.292700223
Zm00001d025705	10.13056304	10.75060184	10.01393361	5.13733877	5.115699723	4.608748124	4.440064975	4.910302993	4.854259039	1.860841639	3.214164295	1.714877476	4.01711919	4.003849633	4.243292358
Zm00001d025706	10.10505858	9.446588569	7.358943766	6.952691551	5.392480269	6.77071576	7.775613034	6.284858195	6.547447704	3.040632682	5.452009816	3.108597383	5.327897996	5.16342551	5.181673609
Zm00001d025707	925.4704018	784.1445258	863.60954	29.02384447	59.97075286	38.7691909	58.07936951	63.46285456	67.13456116	154.9606292	107.6516921	146.6397628	6.640262484	4.914041996	4.815212848
Zm00001d025709	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025710	0.200913257	0.339318374	0.085123496	0.045558236	0.006016652	0.033565395	0.160068506	0.011011621	0.152047903	0.006297557	0.069097654	0.005058241	0.040877888	0.055062042	0.010558325
Zm00001d025711	10.4506067	11.72766367	15.84704833	69.84011896	61.25865887	95.85120329	74.06282579	62.97884712	61.06499354	0.271945464	0.718327691	0.145618966	8.973187831	6.148466338	7.801586726
Zm00001d025712	4.648812278	4.239418062	3.943788167	4.271783041	3.746145719	4.211921739	3.92568384	3.826279025	4.281680661	1.54739692	1.775241552	1.486765589	2.276541701	2.715183871	2.219862426
Zm00001d025713	9.563559167	8.612538948	8.902160231	10.41518004	10.51181045	10.29664633	9.03861828	7.958589309	9.390161086	2.78910509	4.458269343	2.299322964	5.616885061	4.577406686	5.012556222
Zm00001d025714	14.76239013	13.66309569	13.1527773	13.31776152	14.04955164	12.8360261	13.03487277	14.54918814	14.1559615	8.10153739	14.84191364	6.988356321	15.1325833	16.25853652	15.62821867
Zm00001d025715	10.46867294	9.41519886	11.06042297	9.995273223	14.66342749	10.12440183	15.37307735	17.30910116	16.62225339	20.53062869	17.40221763	17.06973123	5.46569729	5.804220982	6.149288863
Zm00001d025716	3.705692285	4.710953081	5.433995014	14.39384196	12.42374259	13.33353964	18.07918532	20.32623144	20.86463998	268.8283958	49.45952283	436.2519214	2.441567154	1.898275706	2.722723802
Zm00001d025717	7.363040423	7.820227268	5.496974921	7.938944649	7.451874105	6.672782589	14.98632527	14.45060708	14.30366672	78.32915758	38.08837919	94.22136727	7.538246437	7.470545127	9.315648595
Zm00001d025718	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025720	2.341323982	2.480444538	2.696458193	7.112662429	5.661138665	6.864398416	5.805992361	5.818698633	5.84557393	0.263060837	0.300660352	0.089799209	4.274202423	4.647137173	5.09953825
Zm00001d025721	0.039116549	0	0.012153541	0.317099011	0.347907097	0.131788593	0.159976908	0.165079791	0.168845438	0.080922255	0.061659029	0.010832884	0.612817443	0.739696125	1.288885963
Zm00001d025722	0.629527272	0.510974798	0.534625203	0.741501376	0.986176837	0.904084646	0.968543453	1.02895694	1.000669771	1.292685933	1.596528774	1.402471949	0.500950209	0.54058609	0.574168666
Zm00001d025723	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025725	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025726	8.559819448	9.647700776	10.36080696	22.2217854	29.32113213	25.5779269	25.00957886	27.04864594	26.93761104	16.73011166	20.65333961	12.28137634	10.86769016	10.37007326	8.897531912
Zm00001d025727	0.280385986	0.219194805	0.388517922	0.819951593	1.316429859	1.180572963	1.615559889	2.374343728	1.764740172	0.617828638	1.479328314	0.535515294	0.634734737	0.484017793	0.521643963
Zm00001d025733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025734	1.627788617	1.938125571	1.970275628	2.122307347	1.75700942	1.601784617	2.618747054	2.563615796	2.460007641	1.291482242	1.412198	1.307275096	2.855647579	3.001579551	3.002566142
Zm00001d025735	0.121943613	0.204784575	0.328362409	4.216072732	2.035262261	4.075234826	2.818157559	2.597640238	0.977536913	0.495197686	0.743244905	0.547839045	5.31431287	5.243182363	7.119664604
Zm00001d025737	0	0	0	0	0.097372196	0	0.17270094	0	0	0	0	0	0	0	0.042718411
Zm00001d025738	0	0.00613867	0.018171818	0.091177379	0.160551304	0.149279253	0.079731807	0.01763037	0.09016269	0.040331306	0.012292239	0	0.087264455	0	0.09015793
Zm00001d025739	44.52587068	46.46467051	41.04195318	22.63167046	16.7866664	20.70370493	20.61149185	18.01521681	17.89115161	19.73036332	19.06337123	19.84949936	12.36390503	12.57415377	11.26922097
Zm00001d025740	0.235768183	0.133837025	0.15269712	0.948382051	0.726329888	1.309987988	0.939011548	0.896892095	1.093449827	0.141972662	0.301498725	0.139782889	0.665154337	0.749890372	0.729439955
Zm00001d025741	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025743	0	0	0	0	0	0	0	0	0	0.056367371	0	0	0	0	0
Zm00001d025744	0	0	0	0	0	0	0	0	0	0.423026277	0	0	0	0	0
Zm00001d025745	4.674965197	4.482221704	6.029826389	12.72215586	17.06729153	11.61742552	10.26677071	12.33997648	10.49517034	1.32609138	2.787366949	0.710083756	4.959352019	4.749280183	7.347083217
Zm00001d025746	11.20480941	11.41047168	12.0403505	10.02048965	11.7571696	11.79386666	10.86544382	10.09164686	10.46509013	26.95843447	17.96357704	26.93594292	4.679016714	4.433901512	5.158018631
Zm00001d025747	6.23258445	5.972387851	7.550365453	49.33805324	27.00597859	45.69530351	55.06723246	36.42825752	33.57302858	0.185965994	0.056679007	0.107877722	206.8112443	208.1083193	176.7306307
Zm00001d025748	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025749	11.77209619	12.54778055	13.39066644	15.97356889	16.13495551	15.65236951	17.20022201	15.32015683	18.19316925	13.5899806	13.09520116	8.415114381	15.48459385	13.96346039	13.82454096
Zm00001d025750	3.636672024	3.803543439	3.431649668	5.845142328	5.977430982	5.565890449	5.685739994	5.589873688	5.534711947	6.357120996	6.598764467	5.088940182	6.239156283	6.473152389	6.489482025
Zm00001d025751	4.921644211	3.865936426	5.042386379	3.094697502	8.081054689	3.760450312	7.434311216	9.068190439	6.765924582	9.691005658	9.550514228	9.887809668	2.375387724	2.268982416	3.011602042
Zm00001d025752	2.534327706	3.217429348	3.714351793	1.750349789	1.769455607	1.026719326	1.286009769	1.424427148	0.585258405	21.6956511	10.23696538	14.92067425	9.084220085	7.604129366	7.62274393
Zm00001d025753	0.068642179	0	0	0.114143397	2.14055866	0	4.398093185	3.738302407	4.599579829	107.3702893	116.2933459	54.10152826	0	0	1.693007485
Zm00001d025754	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025756	5.13694568	5.464702962	5.150608646	4.402925607	4.07199447	3.247024868	4.376340062	4.984802451	4.846109603	6.534290404	6.503661488	4.500236443	2.645183377	2.871738769	3.703008366
Zm00001d025757	23.5128328	21.87837681	22.57691642	20.49620062	22.73066681	20.67767471	27.51998816	29.87054084	26.55820491	45.20026745	41.95891861	33.3261977	23.63712591	24.84566515	26.78116612
Zm00001d025759	0	0	0	0	0	0	0	0	0	0	0	0	0	0.10743288	0.014162914
Zm00001d025760	0	0	0	0	0.031004916	0	0.027495416	0.028372455	0	0	0	0	0	0	0.054408992
Zm00001d025761	5.946986755	3.800472601	5.764684739	2.021663001	25.09072846	5.610959265	25.68525569	45.32031505	29.28896337	34.9084737	31.6351515	24.42570938	1.671912936	2.044639542	6.87552825
Zm00001d025762	0.901921682	0.239152357	0.265478902	0.532817809	0.781851403	0.26170519	0.526947747	0.543756125	0.146357838	0.589215171	0.089790961	0.15775388	0.159359893	0.182132304	0.329287751
Zm00001d025763	49.33489324	49.84176865	49.16860955	28.0804603	25.10234131	22.23946137	27.83197224	31.1596746	23.62893937	13.58640846	20.76252283	11.56876976	23.72655946	26.45699493	26.15662185
Zm00001d025764	0	0	0	0.032554024	0.008598499	0.015989625	0	0.062947575	0.032191738	0.179998907	0.032916209	0.036144087	0.043814462	0.007153645	0.00754454
Zm00001d025765	3.163998622	3.500900835	2.927732727	9.957200871	8.948483786	9.841775552	11.18353762	9.852605963	8.241792927	4.553991808	7.159453495	4.105467964	7.202561632	6.623620437	7.270445638
Zm00001d025767	11.66206324	10.79278955	12.10692104	20.12504985	22.28139485	20.63163843	18.79653972	17.76065685	20.22938095	1.381118177	4.71558651	1.425270107	9.362116673	9.49794813	10.96221366
Zm00001d025769	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025770	21.59422653	23.67457503	15.93096663	39.09471329	30.62481812	46.82010378	63.45155979	51.59026877	52.60168407	4.386700758	4.107606137	0.955146129	73.24435309	73.45359886	70.53357481
Zm00001d025771	0.914724676	0.821652082	0.934133234	1.459169103	1.504269123	2.458508503	1.367141129	1.068749755	0.297331111	0.068456534	0.071534708	0.14138937	6.895456291	8.239678372	7.870113893
Zm00001d025772	26.11278013	24.91739797	30.45281802	38.47564792	53.73180691	35.71375794	42.30373488	52.26600232	43.35537341	23.11968101	35.46030347	11.93921431	34.05748574	26.08828425	32.13430311
Zm00001d025773	247.5210063	197.1558559	215.4076703	77.96650455	164.4081536	92.07435666	192.8855313	217.6830304	202.9187528	317.2872983	318.728404	353.4279423	101.0985148	107.4353384	125.9394243
Zm00001d025774	0.288948583	0.421019152	0.38023004	0.395693955	0.470316183	0.152706551	0.642171232	0.751464395	0.691745494	4.063216101	3.729469254	2.792890911	0.48818414	0.372653627	0.373365639
Zm00001d025775	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025776	25.10542244	27.14862102	21.0847282	10.41279839	10.94428537	9.698494565	9.903640008	9.827989198	9.40250034	1.627222896	2.547987375	0.787395457	7.530165024	6.993089386	7.074863359
Zm00001d025777	24.05240696	22.65564769	24.2938438	24.93237957	33.64161497	27.52349189	29.20514453	31.48789915	31.8192114	34.91553876	33.75622009	28.51610864	17.06916878	17.39461604	18.18963946
Zm00001d025778	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025780	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025781	0.773545568	0.457316748	0.333534695	0.807225133	0.124807319	0.696268772	0.202913633	0	0.116815864	0	0	0	0.264986427	0.224976359	0.182515151
Zm00001d025782	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025783	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025784	30.39859214	26.98752736	33.60893086	30.31022687	46.69841278	26.75456235	35.36070671	36.47830699	33.44634943	4.899672809	13.12691004	4.219940995	12.26183073	11.62727152	15.44951324
Zm00001d025785	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025786	0.904905483	1.098734258	0.558264206	1.664421346	0.874958736	1.451591452	2.274512499	1.585641923	2.015221987	0.323226608	0.706013502	0.194713361	1.194743885	0.99912578	1.113933422
Zm00001d025788	11.15311701	10.41356036	10.94699582	9.256169782	8.744981708	12.51501148	10.10191031	10.39955198	9.040003082	5.146076128	4.988118909	3.421882828	4.597550744	4.503889142	3.736347819
Zm00001d025789	2.529516672	2.983484851	1.980139668	3.541567879	2.92427907	3.931623839	3.143563211	2.329169021	3.018739101	0.525043222	0.981477439	0.212421067	2.130057978	1.69715363	1.842055243
Zm00001d025790	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025791	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025793	0.362376338	0.423578774	0.463322448	2.477541848	2.761849826	2.874565012	2.351749452	2.458199437	2.173464139	0.046741707	0.233415405	0.049095029	0.951054008	1.097437928	1.501009613
Zm00001d025794	0.899193547	0.703712683	1.074121536	3.059449386	3.220868309	2.074924415	1.887193381	2.894769452	3.412997503	2.275589628	2.267823821	1.41192745	2.784218823	2.440393428	3.189423125
Zm00001d025795	0.136326509	0.068033559	0.134262896	0.192476048	0.288086131	0.32458337	0.285533304	0.272930737	0.247434242	1.081983081	0.220566471	0.042740468	0.48644495	0.276333941	0.4371504
Zm00001d025796	0	0	0	0.068889575	0.254741403	0.203019783	0	0.432923537	0.034061461	0.152362711	0	0	0	0	0
Zm00001d025797	0	0	0	0	0	0	0	0	0	0.015329175	0	0	0	0	0
Zm00001d025798	23.34902846	23.24560911	22.5070219	12.61936916	15.31177788	10.51779383	11.96536307	13.62673938	14.43673719	9.197958939	15.87315163	12.27491246	7.895863339	7.458934071	8.00689164
Zm00001d025799	19.5418505	15.60637109	23.16103141	11.02376575	27.61749739	14.15223236	18.11922193	20.68697383	19.32252431	4.237934719	6.506060584	3.997526009	2.430362741	2.526405458	2.828927862
Zm00001d025801	56.93666833	54.96962442	59.67304326	55.49269825	72.49798027	58.61616693	70.4495837	72.66253409	73.8883243	82.48523086	96.40603857	105.8743607	42.97886691	47.52243243	64.20222418
Zm00001d025802	0	0	0	0	0.250192449	0.697880506	0.221872735	0	0	0	0.239442564	0	0	0	0
Zm00001d025803	0.242275032	0.274008921	0.27652052	1.615603801	0.807854678	1.084301863	0.49108902	1.687191368	0.64636703	0.368232845	0.299281555	0.268381285	0.503496574	0.476978673	3.761383125
Zm00001d025804	0	0	0	0	0	0	0	0	0	0.011448018	0.010467434	0	0	0	0
Zm00001d025805	0.031302196	0.039425231	0	0	0	0	0	0	0	0.129512665	0	0	0	0	0
Zm00001d025806	0.019391821	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025807	3.205900158	3.202791788	1.616667104	2.480595619	3.16265372	3.249064306	3.863772718	3.653079826	4.150417201	13.09077685	13.14420614	18.36104096	1.324183864	1.269607345	0.989682524
Zm00001d025808	8.959460231	8.126444451	8.339116641	6.286295545	7.431458882	7.446690997	6.100715666	6.046610214	6.772786606	9.956375174	11.11934689	12.0169632	3.325144475	2.861711039	4.225316098
Zm00001d025809	0	0	0.270305792	0	0	0	0	0.037464537	0	0	0	0	0	0	0
Zm00001d025810	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025811	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025812	4.283100313	3.210155412	3.317534481	4.974925466	6.070858366	4.739274564	6.044532899	5.700891579	5.551942928	31.5634735	15.55676694	20.23147834	3.484997818	3.504931032	5.736472334
Zm00001d025814	36.6267547	30.4584442	37.87782186	49.01355503	127.8743615	63.69136647	119.4207811	149.2680394	163.0440371	306.9575357	292.2195357	225.1597997	9.111136293	5.048915608	12.51820316
Zm00001d025815	0.091855995	0.057846483	0.038052967	0.019093135	0	0	0.017888955	0	0.075522611	0.443395963	0.366805629	0.237425773	0	0	0
Zm00001d025816	0.309885698	0.338400297	0.407660876	1.580851295	1.453010596	1.827581937	1.427218975	1.395231028	1.475846045	2.107364221	2.515099607	2.908727443	0.700922221	0.636048242	0.867090004
Zm00001d025817	2.007003253	1.982610214	1.746016685	3.231875898	3.894187134	3.729261286	3.963819646	3.914688223	4.011266438	0.553597674	1.141384241	0.257201491	2.221680583	2.057784961	2.236199376
Zm00001d025818	0	0.051216448	0.050537328	0.081142986	0.075013084	0.039855163	0.057019049	0.009806304	0.030089987	0.157030575	0.051278598	0.009009145	0.318530185	0.303125608	0.366702362
Zm00001d025819	3.189954581	3.263404736	4.013029657	11.22063561	11.87198912	10.60778369	8.793767387	8.854475687	8.173290766	10.66647807	12.00222953	7.788534436	14.54090728	16.41420924	17.4767122
Zm00001d025820	0.98517177	0.749804847	0.982118483	1.103826027	0.999612837	1.229560567	0.954181012	0.806750798	1.211741383	0.366925517	0.700888521	0.382256801	0.353723694	0.274326442	0.4842243
Zm00001d025821	0.005141495	0	0.006389865	0	0.04064804	0	0.030039182	0	0.012681777	0	0.00648359	0.011391029	0.092055959	0	0.065386962
Zm00001d025822	56.38286195	55.19656886	61.15906261	29.8651798	51.37999279	35.32739862	41.45931987	61.27818383	48.34284024	41.26272584	75.27212822	55.74555964	17.03478772	13.70321332	14.68891314
Zm00001d025823	0	0	0	0	0	0	0	0	0	0	0	0.015421968	0	0	0
Zm00001d025824	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025825	0.496650295	0.174880161	0.165924314	0.146524897	0.239246529	0.366387265	0.318248705	0.412109906	0.210755287	12.32932746	4.283028857	15.39875065	0.543815635	0.614696525	1.055778853
Zm00001d025827	6.19372863	7.507490695	8.213047398	32.5682384	22.53683846	34.97427852	32.87280807	26.07687643	33.21907668	1.47635769	1.977528529	0.726369788	31.24687898	33.57218508	31.28737893
Zm00001d025828	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025830	3.826427994	3.935423202	3.822994422	4.145242875	4.383700334	4.468414886	4.751938317	4.287239101	4.826918292	3.850041752	3.33820549	3.967911985	2.391540806	2.327802104	2.490332218
Zm00001d025831	46.5662136	48.73532042	54.01369552	44.13454129	68.09646825	62.09598086	43.27185292	57.1172767	46.96590774	24.78718413	23.72352775	24.90677697	37.29085372	31.32529625	39.12915132
Zm00001d025832	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025833	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.009915817
Zm00001d025834	1.022883689	1.428720269	1.010475093	2.338776301	1.511954368	3.116864877	2.405802783	0.869680376	1.35853768	0.352681311	0.396888969	0.065371392	11.26296108	10.94725585	14.45644298
Zm00001d025835	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025837	9.970391892	10.75436696	8.459853793	8.886970943	8.518034361	9.97721441	9.415926858	8.345440678	8.318747323	8.672984903	8.523955313	8.915893631	8.17093732	8.698026101	9.057819234
Zm00001d025838	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025841	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025842	0.884209159	1.242164482	2.831774959	10.6881662	7.886663468	11.08275907	7.033696865	6.232906035	6.29120261	4.31504842	3.516589292	3.352858592	10.88404285	12.6381955	15.80581207
Zm00001d025843	0.028246351	0.094870357	0	0.011742541	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d025845	5.331781229	6.385367935	6.824577652	14.57789525	13.79561164	13.76220357	17.39925991	18.7784747	15.69424374	2.356860686	5.689155311	0.858181109	22.96057341	24.85325378	26.7118224
Zm00001d025846	47.56590716	53.60317965	34.36706945	18.95211381	17.45370186	15.61654028	22.47200657	26.5654263	18.49986195	21.55375853	42.9890404	19.82372947	14.12057652	12.78249764	8.753268086
Zm00001d025847	1.516511047	2.42319938	1.434640956	1.129150324	0.912622523	0.843002677	1.147860801	1.828567131	0.960262502	2.366225695	4.207211985	2.392008506	3.155959103	2.788950439	2.794802531
Zm00001d025848	22.93686457	30.62551402	30.1237041	130.5034412	60.38447615	132.8135407	20.02479561	12.46313224	15.50209033	0.679838125	0.650744184	0.068256327	128.059635	133.0919972	131.0769316
Zm00001d025850	0	0	0	0	0	0	0.045512356	0	0	0	0	0	0.174342447	0.128093049	0.045030804
Zm00001d025851	0	0	0	0	0.099249897	0	0	0.075685933	0	0	0	0	0.05619302	0.041286189	0.101598425
Zm00001d025853	2.486298147	3.320249765	2.39579167	8.0450976	5.627647194	6.25067263	4.115092527	3.999950653	4.301214037	1.606470064	4.818915809	3.365416114	8.560175069	7.67639239	10.48995599
Zm00001d025855	4.768898675	6.452188307	5.355748293	7.066846729	5.248029941	6.347997734	6.861046246	5.95767581	5.155546963	1.307868916	3.321238214	1.295242386	5.907620754	4.827012135	5.685299965
Zm00001d025857	28.11347278	22.73756661	37.01951749	43.22347056	61.32640223	36.07859824	38.51979253	47.93399397	39.79709197	7.391530073	20.37007383	3.999614199	18.70758009	15.77024529	25.04579849
Zm00001d025859	0.759512996	1.169189301	1.258566649	2.657511047	2.140535397	3.282623119	2.662472825	3.561443629	3.304434754	3.287966142	5.746621527	2.337094524	6.327177981	5.226908015	6.341838176
Zm00001d025860	134.221332	130.4895234	134.1587532	162.5979492	106.9922667	157.5369872	203.4523044	167.6885365	171.3510513	51.17898981	56.05265724	43.37978086	148.6648459	147.579873	137.8053358
Zm00001d025861	1.133127879	1.566415708	0.160289149	0.045957331	0	0	0	0	0	0.076232691	0.580857971	0.377588803	0	0	0
Zm00001d025862	0.179766389	0.13584986	0.089365679	0.067259053	0.343459457	0.110119212	0.346594096	0.054189337	0.188446542	0.061981872	0	0.009956852	0.37215407	0.453252326	0.166267583
Zm00001d025863	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025864	0.830039202	0.53296811	0.434879726	0.619083549	4.943087957	0.817517164	4.0127269	4.101474775	1.605754571	1.616133042	1.139062481	0.640030029	0.218550711	0.240860679	0.536268624
Zm00001d025865	13.39275782	10.53856412	11.90391804	9.086424027	19.19998898	10.94128527	14.43864941	13.00166732	14.89563661	13.42439265	14.21819244	10.66777922	7.71812197	7.986853404	7.24027488
Zm00001d025866	16.89389836	14.53640592	20.24742194	27.17457745	38.49616932	22.54165418	22.46380008	28.77374219	24.75429151	7.64345684	15.74930533	5.929281246	16.63374128	13.32439356	20.756409
Zm00001d025867	3.573054847	4.247586519	4.796801189	11.91486365	15.94937524	11.1543836	15.76273219	17.31379981	14.89278453	3.188596986	6.577893823	0.878394772	3.346223669	4.147314558	3.932123757
Zm00001d025868	0	0	0	0	0	0.062206619	0	0.007652923	0	0	0	0	0.007102391	0	0.036689443
Zm00001d025869	0.160193305	0.074334128	0.078587649	0.893780105	1.060945593	0.661081996	2.01963711	1.585917861	1.726074756	5.6686751	8.925603648	11.83810802	0.424566598	0.517585973	0.799307178
Zm00001d025870	0.162690308	0.284228675	0.189147349	1.525024792	1.023435983	1.330929118	0.576443253	0.29741521	0.349505889	0.094093478	0.218393678	0.034881472	1.039479196	0.816943536	0.964730948
Zm00001d025871	0.185649564	0.177707998	0.239954858	0.870568153	0.782785718	1.009860764	0.86772607	1.522187593	0.943304491	0.040966617	0.009364402	0	0.756202079	0.431453012	0.369174318
Zm00001d025872	0.025177226	0.126843239	0	0	0	0	0	0.030358004	0	0	0	0	0	0.02760016	0
Zm00001d025873	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025874	0.470820556	0.131777829	0.195045724	1.739813254	3.285690632	1.324548715	3.688068224	3.448266557	2.45164314	0.577190372	0.813616058	0.560187249	0.819565165	0.936680419	1.491875119
Zm00001d025875	0.873808641	1.393120527	0.955380387	1.365668947	0.838023252	1.693884722	1.337698725	1.040277432	1.432317487	0.045764285	0.020922166	0.12865365	3.985544513	4.237796846	4.021786323
Zm00001d025877	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025878	0.029005447	0	0	0.096464893	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025881	0.067180511	0.035255876	0.041746068	0.013964103	0.022130045	0.171469412	0.196251068	0.006750367	0	0	0	0	0.018794287	0.018411409	0.084142325
Zm00001d025884	0.103657207	0	0.014313943	0	0.015175953	0.028220947	0.013458161	0.027774888	0.284084633	1.080145083	0.537384153	2.296535006	0	0.025251705	0.013315764
Zm00001d025885	1.527642134	1.123188609	1.146844765	0.048355558	0.091959562	0.294511115	0.262773835	0.065451375	0.334721954	0	0.078229675	0.01718023	0.668172621	0.901083375	0.448264664
Zm00001d025886	0.040150467	0.252848307	0.024949559	0.05007392	0.10580826	0.024594908	0.492616117	0.823009503	0.321858295	1.467413995	1.164513613	1.534451841	0	0	0.092838837
Zm00001d025887	248.1350796	236.9258716	236.7698613	53.05707818	89.62325166	56.90959114	114.0121051	136.7862559	141.7649144	204.5122563	280.8294075	267.5183247	33.51750954	31.54787532	37.10957235
Zm00001d025888	0.028878821	0.007274596	0.035890684	0	0.060883334	0	0	0.055714056	0.028492477	0.007965731	0.138385056	0.012796259	0.006463266	0	0.106841146
Zm00001d025889	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025891	5.726902587	4.925988781	7.182509667	12.73863267	10.76690263	9.540374115	11.3027582	12.48435116	13.56585758	0.433445643	2.113699872	0.889707708	5.685667913	3.828068122	3.472030237
Zm00001d025892	29.94785802	27.43717187	22.95739509	10.55151067	15.20640539	12.8405397	28.50573943	27.7113672	25.13032456	54.48742331	49.87730147	79.40935138	27.27366506	28.35984864	32.37937235
Zm00001d025893	8.103010986	9.211363736	8.144888116	23.0691834	18.45188323	25.82551811	23.01541858	19.50498468	24.83306765	14.87595611	26.77681094	27.1849049	22.86478863	21.94345721	23.36212952
Zm00001d025894	39.41810207	39.86830732	37.50853646	26.95764382	25.0324162	25.30462377	23.28192651	22.69828087	25.87469931	30.03109896	40.19067511	57.02738138	16.23690132	15.51163242	16.46520527
Zm00001d025895	0	0	0	0	0	0	0	0.228949948	0	0.785620229	0	0.631015521	0.212479858	0	0
Zm00001d025896	0	0	0	0	0	0.026841558	0.0256007	0.026417302	0	0	0	0	0.122584533	0.21615702	0.050659654
Zm00001d025897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025899	0.004702867	0.088849173	0.01753421	0.011730423	0.043377019	0.011523311	0.087924799	0.124752913	0.040599574	0.097290431	0.077096058	0.140659807	0.068414567	0.041243582	0.059808714
Zm00001d025900	49.13568377	37.76548716	52.62083089	1.481997889	3.511561867	1.10247452	2.561366262	3.324701011	1.493961531	10.21505188	5.746621527	9.648946201	0.477676237	0.64500525	1.120411995
Zm00001d025901	420.1268589	329.4179244	359.6099412	17.12687374	19.04421187	8.675964332	9.465809554	8.464673897	11.73511446	21.94485708	21.04016892	20.9451733	16.06544363	12.55007286	7.801326265
Zm00001d025902	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025903	18.22831189	21.49903303	14.46501263	13.99203131	21.84235405	15.37051807	31.60950538	36.39797889	33.65180249	68.40879828	52.46086556	77.19784974	7.448802476	5.879376518	8.278310252
Zm00001d025904	3.367470011	3.515503212	3.839938619	7.291134101	10.31977143	8.242716627	8.202417549	9.786825387	8.751321636	2.00135656	3.274611149	1.184476063	6.355618939	5.815125159	6.285399111
Zm00001d025905	4.551144278	3.363080022	4.10017416	1.879662826	10.42207921	4.2090918	6.531378648	9.873466489	7.273984573	1.824930323	3.007997205	1.643269587	0.657359559	0.702510314	0.78205841
Zm00001d025906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025907	0.283613766	0.251371821	0.117492008	1.342790944	1.647060241	1.383428125	1.288788229	1.285567589	1.003982161	0.318714929	0.47686141	0.116360911	0.822818657	0.673632633	0.67400889
Zm00001d025908	0	0	0	0.039249931	0	0	0	0	0.007762626	0	0	0	0	0	0
Zm00001d025910	0	0	0	0	0	0	0.026296028	0	0	0.031036849	0.028378378	0.174503058	0.012591399	0	0
Zm00001d025911	1.897025983	1.937996899	1.294076623	2.959989407	6.176814135	3.703092119	8.965218392	10.18138934	10.43443384	6.633803373	13.39637951	8.998830045	3.170097264	2.597172471	4.113507674
Zm00001d025912	0	0	0	0	0	0	0	0	0	0.013516047	0	0	0	0	0
Zm00001d025913	42.28123338	63.25025519	51.3470188	38.88040948	41.15748632	50.0625274	35.82877338	36.28022745	39.48986489	27.17933824	36.95344041	20.29279054	33.40014503	28.88201344	36.11261698
Zm00001d025914	12.14087191	13.75441811	10.8703095	11.51033283	10.96135919	12.11956433	13.70057773	11.00063755	9.185155811	3.355347015	9.203831263	4.685887937	11.26753118	10.92614587	11.05136573
Zm00001d025915	4.01077636	4.163815387	4.267144048	3.494705072	3.592515077	3.411811196	2.804375931	3.018967393	2.706520534	2.755324085	3.855316862	2.416680669	1.879957797	2.166379004	1.93479338
Zm00001d025916	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025917	0	0.016685048	0.065855232	0.363472614	0.069821149	0.081148896	0	0	0	0	0	0	1.823373661	1.408651172	1.822569415
Zm00001d025918	0	0	0	0	0.065984822	0	0	0	0	0	0	0	0	0.054897021	0
Zm00001d025919	8.02334407	8.999054306	7.665012583	9.601328698	9.985056111	10.04947928	12.66782885	12.1880106	11.08134136	7.77657381	10.05528753	9.179134382	7.600817928	7.086559548	7.337901893
Zm00001d025920	4.733919805	5.165690914	3.846142109	2.349700029	3.575884913	2.024895079	4.29969492	4.387637801	3.757945026	2.054338269	3.851094128	3.285047968	1.666856913	1.05877508	2.225395431
Zm00001d025921	6.331438818	6.835260531	5.206378273	4.118163857	5.194879113	4.633979578	6.184623484	6.981994982	5.027704483	2.751535995	3.356288926	2.286757103	2.905707454	2.960372681	4.162847623
Zm00001d025922	0.354234401	0.153367342	0.110060889	3.147723671	3.66111574	3.336264377	8.394873829	10.41119762	5.515474405	1.95419056	1.856600801	0.66218309	1.932448389	1.322729271	5.208878957
Zm00001d025923	30.17642804	28.91861516	27.8829281	161.0275642	87.07849744	197.9837433	242.9187058	180.3475211	182.8109971	1.82758487	2.299751609	2.209159906	74.87773867	74.64677732	75.08519169
Zm00001d025924	0.088364393	0.286187862	0.188262047	4.959190687	3.542891411	4.562321311	4.985683184	3.531283402	4.82615986	7.799620219	0.429802718	1.132681601	0.353152118	0.512017366	0.934046143
Zm00001d025926	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025927	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025928	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025929	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025931	5.603812914	5.895053386	5.416233329	13.07427874	9.408110118	11.23435238	11.72883225	10.71125833	9.875741213	5.329867193	8.923574738	11.41449212	8.983165891	7.600336719	7.780968911
Zm00001d025932	0.156822521	0.255612236	0.171970139	0.563737061	0.182326481	0.474671761	0.355714993	0.266953785	0.216159269	0.089058164	0.151226882	0.061313249	0.433562139	0.56630611	0.853215226
Zm00001d025933	4.668597123	5.439585537	4.441382306	5.831954661	12.9944225	8.253465557	21.2523971	24.72659434	22.17736395	16.43248362	24.52701535	11.05084357	7.232351103	7.001660082	9.669851655
Zm00001d025938	6.886909734	8.346764208	7.420128683	9.979339053	8.732079432	10.28911169	9.17414348	7.421689146	9.497166729	6.602511176	5.502267935	4.295577397	3.849510016	4.978135452	3.218091802
Zm00001d025939	0.873914292	0.872967605	0.624197272	2.82499141	2.686857337	2.652048476	2.50597185	2.149875334	1.951151081	0.595709093	0.221673498	0.662079474	1.663618929	1.392976611	2.125248794
Zm00001d025940	9.356553712	9.586447676	11.72877004	11.40708765	11.49820617	10.77012752	11.08419538	12.1976738	9.685774912	12.52534946	14.28504145	12.08327594	7.179106677	8.503198127	8.220516915
Zm00001d025941	6.328561805	6.071101528	5.663549919	6.499876971	7.915948134	6.392978604	7.349924981	6.733063247	7.361593139	2.142198257	4.192605565	2.090350009	2.995068189	3.461759745	3.591555418
Zm00001d025943	10.87656179	11.0719512	13.75571092	1.840519826	5.060416079	2.541198543	4.209264304	4.812911265	2.37178071	94.84335937	25.72425182	101.9107499	1.631931996	1.216530115	3.170566637
Zm00001d025944	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025945	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025946	7.897955802	8.781849839	5.615504874	5.478965349	4.067940749	5.106581345	4.390776358	4.150465558	4.082087481	4.104312534	5.194774261	4.332102487	6.774552907	5.962716204	6.141043373
Zm00001d025947	0.233032396	0.13044674	0.611405957	3.390658784	2.217614889	6.851917692	3.207069539	3.652792345	2.075620255	0	0.032651259	0	0.724363151	0.539300847	0.478964002
Zm00001d025948	0.243419499	0.369156691	0.358087822	7.186844865	3.619790171	5.294965464	8.492436939	7.499441887	5.691618082	0.006851339	0.144083171	0.055030423	32.29261463	36.16566663	42.47811994
Zm00001d025949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025950	2.427444741	3.000757566	2.374361248	6.769611225	5.619612394	6.835958985	5.666372497	4.099079209	5.065749778	0.705217665	1.785633323	0.491740826	4.596481654	3.46798899	4.372096803
Zm00001d025951	3.735309814	4.314325947	3.180803688	7.310419936	6.050191172	7.966091989	6.792781305	6.612441473	6.498821209	1.659962596	3.023343991	2.432110826	10.4931765	10.47808138	11.23616978
Zm00001d025952	1.330973495	1.862628935	1.409080328	6.844659546	1.883660458	4.529512897	1.382437813	0.772706073	0.385033698	0.022662122	0.020720991	0	21.10905662	22.3001992	19.43430979
Zm00001d025953	8.456885085	8.625253143	8.573120894	32.73414026	26.60837936	37.8235896	29.0165651	22.71133161	23.8392794	5.24897911	7.901604599	4.146673427	22.0932353	19.52961518	20.78493235
Zm00001d025954	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025955	0.06329275	0.068329245	0.213506842	1.059997334	0.881630535	1.40683848	0.781837258	0.556021301	0.613309038	0	0.296452698	0	0.738620457	0.664101461	0.982636465
Zm00001d025957	0.508272758	0.377536991	0.502106904	0.926462997	1.717240832	1.820210737	1.446720219	2.577160134	2.668093629	3.217373214	5.932879994	3.089509741	0.816700463	0.685767933	1.039657801
Zm00001d025958	0	0	0	0.026921321	0.037923908	0.017630665	0.210195223	0.104111976	0.070991255	0.158777983	0.009073613	0	0.3301266	0.378616085	0.366029332
Zm00001d025959	0.077677465	0.016305843	0	5.505784026	1.739974759	3.568707131	1.875833126	0.983444093	1.516799417	0	0.016325629	0.057365047	14.60316112	12.91483608	13.97976181
Zm00001d025960	1.62430502	2.203674525	1.109033978	3.813936058	1.512714741	1.922434308	1.552376894	1.299649867	1.094350887	0.034570747	0.018965748	0.005553492	2.086930878	1.824586133	2.185108599
Zm00001d025962	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d025963	9.499851599	7.30261733	9.003324986	6.791834003	13.68854216	7.781335537	10.67928382	11.54564887	11.44192459	3.827640046	4.329791196	1.97838169	4.306675457	3.561740936	5.375236303
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Zm00001d026012	769.52981	764.5642527	786.6369451	25.49964432	20.110813	23.87958307	17.58648901	16.283367	18.54272684	8.863050383	18.92180259	12.92812288	22.26939669	16.44902199	12.94955113
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Zm00001d026205	0.89920418	0.48238283	1.448654669	1.536799722	7.372296866	1.550467774	3.521858085	3.031843885	3.98407072	8.864781726	11.78022415	23.31606195	2.701936313	2.884199876	3.619357697
Zm00001d026206	0	0	0	0.047927393	0.02531814	0.011770297	0	0.023168512	0.059242526	0.834755998	0.181727315	1.883734318	0.03225274	0.052659475	0.044429549
Zm00001d026207	0	0	0	0	0.007185423	0	0	0	0	0.007520896	0	0.012081669	0	0	0
Zm00001d026211	10.69619195	10.35116112	11.73189728	17.57244695	14.1742724	17.8073096	15.39374843	13.85446703	16.13952425	10.37199189	13.52124669	9.171671676	10.59280566	11.11344119	9.794156681
Zm00001d026212	24.87493259	24.14312077	22.65044151	20.35385244	26.59643685	20.17231243	23.79794887	25.1586671	23.11455468	28.53881473	31.89432147	26.65087983	13.83671088	12.94819276	15.73239423
Zm00001d026213	3.767925446	3.42979478	3.42230364	5.250204752	6.092491247	5.286870367	5.51001998	5.856651342	5.5755911	3.912771968	4.492176096	2.822640162	3.784214439	3.902073549	3.684810253
Zm00001d026214	4.919407012	5.898921321	5.482219612	5.019215788	5.764305859	4.543298916	5.077736326	5.682454622	5.239266982	0.848503385	1.398324128	0.449859518	5.428780993	4.747713485	5.268604023
Zm00001d026215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026218	0	0	0	0	0	0	0	0	0	0.071195288	0.010849506	0.009530757	0	0.037726587	0.019894037
Zm00001d026220	0.202946792	0.23237476	0.068788056	0.345145139	0.024310197	0.180827337	0.021558484	0	0	0	0.093062697	0.122626498	0.103229081	0	0
Zm00001d026221	0.029368924	0	0	0	0.038697865	0	0	0	0	0.131639909	0	0.056933731	0	0	0
Zm00001d026222	12.86191679	16.63089015	10.6191561	10.07404163	2.341965384	4.751689126	2.815237659	3.798317163	1.66608005	0	0.015701152	0.010344517	9.460578576	8.779886037	5.88759302
Zm00001d026223	3.371828994	6.6662379	4.419092762	1.733051648	1.777151746	6.03369334	2.435625364	1.478421186	2.595849878	14.71188374	0.463852859	1.245053047	12.60015084	12.70189052	8.103727264
Zm00001d026224	71.13344459	73.38384946	62.566427	46.54037789	63.00984081	61.07802262	49.36430302	45.77426763	43.89981381	8.847499913	24.8609206	12.24115947	38.91390765	38.33555568	34.07633589
Zm00001d026225	0	0.306115017	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026226	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026231	0	0	0	0	0	0.012101974	0.046170049	0.047642764	0	0	0	0	0.044215462	0	0.011420384
Zm00001d026235	12.09240376	13.7842146	9.454114825	23.58383079	32.6707998	21.84860544	25.24108095	26.26254202	31.86221668	11.67914167	21.04077961	8.943527076	17.18577242	19.66783031	18.70976704
Zm00001d026236	6.551238443	5.385902699	6.649653372	13.00436686	15.82110648	11.79407301	14.12874639	18.74496828	16.62661127	9.61628212	13.14904926	4.900336253	8.863258404	10.22987798	11.81173937
Zm00001d026237	0	0	0	0	0.121101555	0.009383267	0.11634335	0.166229206	0.01889123	0.073940727	0.057949125	0.008484242	0.068564929	0.008396015	0.008854797
Zm00001d026238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026239	4.194720011	4.376804195	3.989434502	4.36394216	4.72169362	4.607855955	4.739670786	4.876331306	4.931859413	3.841579091	5.263095222	4.276450565	3.453967729	2.891742896	3.046274352
Zm00001d026240	0.321109429	0.980763395	0.638521189	0.780923812	2.305942854	2.035860453	2.298200266	2.681255287	1.267254341	2.181099495	4.191018166	4.47305894	4.141298551	4.250538036	3.851680569
Zm00001d026241	0.029432151	0.018534951	0	0	0	0.108175234	0.034391468	0	0	0.020295894	0.797970051	0.537959411	0	0.096793671	0.085068956
Zm00001d026242	0	0	0	0	0	0	0.050416528	0	0.015203267	0.561056106	0.303135581	1.843543994	0	0.006756937	0.007126155
Zm00001d026243	22.81899044	23.72567716	30.59882915	54.8434036	40.892284	53.68984476	26.63454381	26.20791105	28.12660426	3.875243745	9.342894353	3.712813907	30.25869839	32.47388998	36.18584072
Zm00001d026244	12.30411053	18.55205124	14.45118705	17.07767016	9.994784803	13.31826152	8.897812408	8.268785848	8.983160854	2.66604026	5.181228118	2.483351407	31.62522783	32.92280594	29.66563975
Zm00001d026245	10.65024965	9.931540583	8.251389208	7.599139387	6.769251879	6.984032626	9.572935999	10.14582689	8.503883758	27.07006031	17.04615824	36.98176359	10.06533797	8.718962799	8.899402301
Zm00001d026246	27.7450647	29.5949699	30.2456463	21.92225487	20.03237929	22.60526743	26.3124342	24.33783081	25.4862945	45.95378379	44.09137315	60.10505518	21.12093267	20.9375073	19.36774077
Zm00001d026248	5.298378409	4.586517532	4.800987229	10.59696236	11.21925854	14.1439528	21.63798394	16.13184595	12.43497172	7.563949524	4.569737274	3.925955286	62.2451687	64.25032762	63.88907963
Zm00001d026249	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026250	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026252	28.19161281	19.05049056	26.92384795	15.44840703	34.13961437	21.20949885	29.4939148	37.39705417	36.56146073	76.22468069	55.72170516	52.61728805	7.38796424	5.410638443	7.154338848
Zm00001d026253	0.001524616	0.080650912	0.020842773	0.243383712	0.150667918	0.196125669	0.245848946	0.329062889	0.302724222	2.087978286	0.563318872	0.863028254	0.233734952	0.155434422	0.322567593
Zm00001d026254	41.17035132	31.29906474	54.01610735	75.73117124	113.318415	66.17651895	80.77276932	94.04691471	75.64358525	4.890485923	25.12351099	3.959622397	35.82410399	30.69189505	49.12973251
Zm00001d026255	0.119923105	0.075521797	0.074520394	0.897377362	2.923301247	1.542683223	9.528850109	3.976499089	6.211734787	219.4774828	127.3330349	388.9048293	0	0	0.069323737
Zm00001d026256	0	0	0	0	0	0	0	0	0.021783492	0	0	0	0	0	0
Zm00001d026257	8.93608682	8.79971079	9.117527478	10.42613703	10.8974986	12.07870106	11.47782884	10.2960028	10.94133833	6.036803557	8.362462954	6.961825908	5.586724897	5.800979876	5.626455196
Zm00001d026258	0.229064402	0.408132506	0.166643071	3.156406603	2.91519702	3.819377087	2.826769268	2.506005474	1.901706885	0.09246368	0.42271838	0.099023278	9.465469683	9.486999386	10.11520298
Zm00001d026259	17.25613526	25.59886831	20.19999471	27.46971815	18.69437979	21.43888913	2.449474999	2.161287505	1.536171873	26.2292407	28.12013467	13.5962811	49.36332051	39.83181443	50.26248238
Zm00001d026260	0.933415281	0.950012122	1.277228154	5.479571839	7.367046072	5.128699771	8.395052244	8.208092465	7.62788792	8.17911929	8.41780974	5.13864226	3.35513022	2.832004797	3.651687616
Zm00001d026261	0.218457862	0.284024243	0.297774274	1.18208652	1.337110985	1.402955656	1.548076983	2.005318304	1.012494474	0.656033387	0.66648961	0.331771047	1.837403139	1.236031893	1.735380397
Zm00001d026262	0.134031705	0	0.133259998	0.200590234	1.942670781	0.131365742	1.00234271	1.131282094	0.826491323	6.358902556	3.988831413	4.45422721	2.219789571	3.026763392	2.107441609
Zm00001d026263	0.598488884	0.77214363	0.840893174	3.637920025	4.850219913	3.5169122	2.24962837	2.524148226	2.522939809	0.723151056	1.320748947	0.891794527	2.080306425	1.802780947	2.16153091
Zm00001d026264	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026265	10.89715663	11.55603863	11.11744658	8.304470063	9.84201782	7.982748324	8.161266314	8.647598431	8.593470092	3.690193526	5.864803975	2.382610792	4.902877125	5.324390082	5.073570866
Zm00001d026266	0.531832899	1.044170932	0.729003851	1.092459398	0.608019178	0.689895603	0.484362905	0.21689995	0.366530935	26.2436707	2.584007162	7.138994824	0.498865753	0.531571496	0.886138205
Zm00001d026267	8.656548648	8.21473394	8.61443326	11.19664434	12.81925812	10.04694057	12.55468429	12.06190569	14.3304012	30.83656148	28.53494827	34.16235301	10.67826019	11.77257148	11.55339579
Zm00001d026268	0	0	0.010303608	0	0	0	0.009687591	0	0	0.194380263	0	0	0.046387355	0	0.009585089
Zm00001d026269	38.00626994	30.0162408	33.32609479	20.29284023	31.6229222	18.39321873	31.02562548	34.71691861	29.28778122	64.44702313	48.68259744	65.52827967	9.921934103	10.73118881	9.613701644
Zm00001d026270	5.005831405	5.015795477	4.088257888	3.704922221	3.390457075	3.997993245	3.971093934	3.790825737	4.008375829	4.500633478	4.90936541	6.854867145	2.946942061	3.312678766	3.06134262
Zm00001d026271	9.870263055	7.129528565	9.39692139	11.03546123	28.91910568	13.920056	23.25783436	21.38782649	13.48329791	83.67736174	44.2464088	67.82143506	10.15329759	10.48410011	14.86077099
Zm00001d026273	0.802083918	0.57727295	0.961231102	0.1607664	0.217034414	0.245665636	0.133890724	0.03454038	0.12364899	1.155590153	0.162555035	0.047598866	0.088152984	0.054954535	0.190431471
Zm00001d026275	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026276	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026277	9.332067625	8.233816957	7.819964323	6.033293827	4.457702642	4.925626426	4.755211476	4.9167446	4.797107798	0.788907342	2.102171174	0.742282454	5.916414635	7.085850197	5.791370471
Zm00001d026278	104.9876318	110.4315607	123.8971638	73.41279831	76.71495004	67.20381978	66.27184833	71.71120387	62.55884671	6.347189173	36.7840675	6.335145928	43.28277811	36.79948417	43.87677781
Zm00001d026279	0.029784823	0	0.333149995	0.668634113	0.313966995	0.401395324	0.104410699	0.071827435	0.293863582	0	0	0	0	0	0.137741282
Zm00001d026280	1.784615187	1.480322818	2.065582684	4.415418467	6.546174584	4.779156374	5.253328501	5.546964552	5.411164236	0.760758829	1.886746783	0.702903366	2.569930429	2.509671164	2.971926162
Zm00001d026281	0	0	0	0	0	0	0	0	0	0.017984439	0	0	0	0	0.018091353
Zm00001d026282	7.42634929	15.66005064	8.87988691	5.227315459	4.262538021	4.170051416	6.015216382	7.360316833	2.775378271	0	0.106418917	0	22.38121166	30.59051771	66.8332177
Zm00001d026283	28.47400823	23.81918537	28.57518368	33.32533205	60.42096723	33.03237932	41.75783362	52.79703838	48.6252769	35.70148263	44.31604267	32.3436124	25.6359687	26.11012554	30.75377816
Zm00001d026284	3.377787304	2.379201904	2.626189424	6.009486107	7.108512393	7.452775423	8.137065659	11.07967615	7.877410743	15.65352905	10.92127253	4.770300008	4.317272235	4.317065724	6.792427435
Zm00001d026285	111.5486323	106.9850559	113.8117393	67.08684935	87.80623437	86.43898846	89.4613805	97.06031431	91.68535835	145.0729811	127.622027	125.6232767	60.89767289	58.10780694	65.85565919
Zm00001d026286	42.42796734	37.9125208	50.4728625	74.27602744	128.6046704	71.55280587	82.73047743	100.7590298	84.34518119	11.99199613	27.56616916	5.84112452	30.81202164	27.4281081	47.05408421
Zm00001d026287	1.044499843	0.86678855	0.582328589	1.698321099	2.321671594	1.632457363	2.92007016	2.724839505	2.835151457	2.497380405	2.246537155	0.956998906	1.796937832	2.081363415	1.929877803
Zm00001d026288	66.4548286	67.89809327	48.49448687	24.71372074	32.08338897	32.97435013	31.28854012	31.4218929	29.44488693	41.08514027	65.77365081	62.4577827	7.207545813	6.700104785	8.549438289
Zm00001d026289	24.64478888	25.50928549	19.6696072	14.46584099	15.77797412	18.23462532	25.96004709	32.48532236	29.5195862	67.93863829	49.98023622	39.38176457	13.38892317	14.19569723	14.27418364
Zm00001d026290	7.567835778	11.60227745	6.962996065	16.22535172	15.06341822	19.67762587	36.96182039	40.46480677	34.24518534	12.17032691	19.75376329	21.81124556	34.57239645	36.85096259	35.6859627
Zm00001d026291	1.839554411	2.441046602	1.599600272	8.957111965	11.80068919	8.659937913	7.481443953	7.950534483	8.89794276	0.728989675	2.120149358	0.651690997	3.188033302	2.700782334	2.340834553
Zm00001d026293	1.287563498	1.626531859	1.552420908	5.2535806	8.340967494	7.340988754	10.73821623	12.5405612	10.20536708	12.83319588	12.52883046	11.05279478	5.118154118	4.268123763	5.781096852
Zm00001d026294	0.010404288	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026295	1.520242463	1.690181445	1.44034681	1.841363731	1.900100164	1.751367895	1.162337982	1.388000872	1.220987044	5.918980182	3.828232142	19.15526628	0.581068358	0.569230796	0.931242789
Zm00001d026296	2.999428001	3.071018572	3.449972108	2.9015636	2.888891235	3.121069664	2.637327785	2.416074783	2.60592444	0.366413503	1.512323754	0.173282867	3.639865631	3.043105581	3.157717631
Zm00001d026297	0.363355054	0.514852915	0.620920755	0.084967624	1.974941059	1.613703761	2.25558329	1.725111233	0.784205721	11.36930803	1.231418899	5.30807741	2.083855613	3.858749898	1.785374121
Zm00001d026298	0.011261313	0.014183665	0.013995593	0.028089242	0.014838432	0.055186597	0.039476533	0	0	0.015531207	0	0	0	0.03703514	0
Zm00001d026300	0.574381703	0.346770918	0.790537176	0.355211873	0.075057735	0.203548481	0.155310915	0.360596167	0.09952333	0.019640506	0.221484371	0.068360015	0.366527754	0.286207906	0.082321938
Zm00001d026301	5.467752178	5.882836724	5.413235755	7.836235889	6.476782401	7.629756504	7.030141097	6.235285448	6.3820907	3.461159836	5.740388748	5.933735977	7.587051921	7.184602951	6.514326015
Zm00001d026302	9.692802401	9.605919823	10.05857783	4.649401031	8.579455305	5.843369163	6.863460337	8.633376541	7.307119208	12.26117033	19.6083722	18.93361809	3.72591657	3.138386349	3.329617363
Zm00001d026303	0.10302837	0.132412871	0.180306803	2.375800356	2.828690759	2.766620719	2.523247854	2.119494808	2.266381067	0.89025682	0.644307458	0.160713889	2.656423049	2.40407918	2.669145133
Zm00001d026304	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026305	0.643911444	0.718477636	0.751917486	1.312380707	1.500442909	1.596289976	1.58309195	1.511134789	1.260467848	0.44403002	0.217984695	0.064627479	1.063910524	0.94985642	1.339009842
Zm00001d026306	9.386746818	9.382985372	8.700583725	6.055350037	13.08254731	8.254732962	9.439506046	10.91612727	12.45844064	13.44123786	9.087022217	10.59004796	5.856728403	4.619462614	4.727283694
Zm00001d026307	6.350096503	5.149598419	6.955051022	16.63586669	19.61321741	14.08805507	13.37705972	16.05302885	13.53561061	2.484615751	5.429751742	3.481790316	8.721603126	9.580402338	12.88099825
Zm00001d026308	0.255196367	0.596924283	0	0.272802718	0	0	0.170398261	0	0.089922256	10.10621862	10.52781064	15.14437251	0.203980663	0	0
Zm00001d026310	2.403049314	2.760053433	2.831774959	3.21437629	3.510897318	2.364403899	3.404473448	3.42298938	3.470360289	2.094987276	4.176506355	2.910257378	0.975317379	1.474120003	1.453904389
Zm00001d026311	1.268465003	1.010470863	0.902754587	2.697469383	9.164067277	3.659306823	7.740384913	10.00044656	7.420725426	14.99718489	11.99681298	12.00380676	3.008755223	2.650337616	3.396808145
Zm00001d026312	29.11909374	32.76583669	25.76197412	22.56514808	32.41336519	21.7003215	28.7501439	33.11003683	28.13481509	52.72097934	70.19043758	69.17966666	18.43363277	17.1324567	19.1577051
Zm00001d026313	4.837692593	4.861769257	5.231230132	7.296156694	8.250387093	7.495284159	9.220436536	8.854983557	7.521164855	17.80620286	20.69370805	24.96414868	6.160227607	5.890135663	6.4227931
Zm00001d026314	0.923732022	0	1.148016875	0.230407701	0.730291473	1.131698117	0	0	0.227843554	0	1.397826858	0.204653683	0	0.202525496	0.85436822
Zm00001d026317	0	0.010329316	0	0	0	0.01004747	0	0	0.010114231	0	0	0	0.073418355	0.008990334	0.009481591
Zm00001d026318	0.063410176	0.03194614	0	0	0.016710442	0	0	0.015291648	0.015640467	0	0	0	0.014191605	0	0.04398649
Zm00001d026319	7.722591479	10.24796813	9.289005749	6.135701274	8.991345244	7.722566979	7.641941896	8.484615704	8.021827549	4.20809728	4.742454097	2.069905586	4.486339415	4.304192374	5.49648482
Zm00001d026320	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026321	2.385107625	2.99126868	2.863309202	1.329077831	1.123358524	1.206136464	0.545540089	0.917839433	0.826123176	3.821368773	1.56144282	0.134916459	3.05516695	3.093061991	3.215139203
Zm00001d026322	11.35118751	10.74741063	10.80038427	3.155017055	3.21244226	3.87012545	2.779897321	3.184665234	1.778184592	5.097869326	4.702532572	4.806123972	3.014239667	2.909726325	3.932510289
Zm00001d026323	0	0	0	0	0	0	0	0	0	3.598989966	0	0	0	0	0
Zm00001d026325	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026326	35.86783318	35.30142758	34.82331401	28.23588606	28.34392616	26.63062602	25.34297142	26.61816665	25.53433972	14.31636438	22.68135576	17.13681798	18.93590405	18.65624244	18.16502768
Zm00001d026328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026329	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026330	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026331	7.954338507	9.127089156	8.940804506	12.51997278	14.10904913	14.13942267	13.36038468	12.63032897	14.39668383	5.683545141	7.010532774	5.351618611	11.56844243	11.55802318	11.38187402
Zm00001d026333	17.43630636	16.37183323	16.85436112	11.78011738	16.0776076	11.99309515	16.54719742	18.13283585	16.87845553	6.372346325	15.08257671	7.628876422	8.156499516	6.868321872	6.02649412
Zm00001d026334	1.921240786	2.160797971	1.897575143	1.616129847	2.62431412	1.981043034	4.559066386	4.453130734	2.963515519	5.45482366	5.012455991	5.71697722	3.262723879	2.637296773	5.181752937
Zm00001d026335	39.01203703	40.40626757	33.45668782	34.10033977	41.28474444	36.95152159	42.27603762	47.18740513	45.30818849	358.6747589	220.4264359	658.7952884	66.37498276	68.02315009	69.28424195
Zm00001d026336	0	0	0	0	0.009006928	0	0.055911929	0.156601764	0.050581269	0.27339584	0.034479729	0.045433118	0.038246374	0.029973773	0
Zm00001d026337	3.239628891	3.113601523	5.497339285	19.21951341	16.78578811	25.37099673	35.36827736	29.20676838	38.85334807	12.81279859	5.744526513	10.17262354	39.39808801	50.56366859	43.23693433
Zm00001d026338	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026339	0	0	0	0	0	0	0	0	0.027370817	0	0	0.02458502	0	0	0
Zm00001d026341	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026343	35.96128923	25.620496	42.10726244	72.44263002	118.4824415	59.51201297	81.72633975	101.3352377	86.5827519	9.427442743	21.48736745	4.828640512	27.01265668	22.51653026	37.79650712
Zm00001d026344	0.622151093	0.540414899	0.766545595	0.274247534	0.332150352	0.689940712	0.632977062	0.944182757	0.324111701	1.723494829	1.359440087	0.813958036	0.798237394	0.717300972	1.754823388
Zm00001d026345	1.494976611	2.123841993	1.588963563	1.481531699	1.372926458	1.424539589	1.711589673	1.747977214	1.899591103	1.457851971	2.164504353	1.728555037	1.408187569	0.998757913	1.175542724
Zm00001d026346	8.4605949	8.031022933	7.417731695	9.853035806	13.02598831	10.19380745	11.93179295	13.50439088	12.75580661	9.543901059	11.60924897	7.966879907	7.241344275	6.958358663	7.405253922
Zm00001d026347	10.37961149	11.20401248	9.774046862	9.533891145	11.95428838	9.402557926	12.0781664	12.53625589	11.67833022	17.676827	15.4500522	12.63066474	8.293754642	8.559881643	9.257048659
Zm00001d026348	6.267461784	5.61293688	6.193128613	10.46629476	10.39500887	12.44221244	20.34544169	16.32740198	15.84587806	13.67183255	13.26200838	11.05998114	14.93429856	15.0971798	13.67100109
Zm00001d026350	1.531013795	1.831254577	1.50048955	5.093906449	3.696191491	4.544484555	3.367863032	3.103601093	2.895608158	0.113370225	0.732094963	0.261796744	1.810989541	1.627662629	1.77600068
Zm00001d026351	3.527947577	3.505447542	2.846259742	3.94639482	3.671878132	4.000943584	4.845564353	5.611440249	3.898164293	11.66495345	7.649914334	8.734158573	9.429540891	8.574339014	11.84829544
Zm00001d026352	1.068695277	0.711107894	1.403357502	4.576889261	5.234114597	5.163080555	2.968775008	4.230508766	5.023311866	0.222476525	0.305130347	0.178694661	4.806181557	7.272397823	5.664914945
Zm00001d026353	0.085289736	0.093994896	0.105998335	0.766747957	1.025483373	0.657426294	0.660254503	0.81415006	0.552225968	0.156838143	0.425730994	0.074796745	0.63230294	0.350616013	0.723114875
Zm00001d026354	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026355	0.016112238	0.010146712	0	0	0	0	0	0	0	0	0	0.017848406	0	0	0
Zm00001d026357	0	0.015184277	0	0.240566771	0.015885235	0.103389705	0	0.058146018	0.014868098	0	0	0.013354826	0	0.013215949	0
Zm00001d026358	6.221639389	5.980240978	5.64998453	5.009550913	4.372225409	5.148435826	5.216533582	5.093382307	6.151866913	4.704312746	4.927641932	4.709567341	3.407820662	3.320447951	3.009729484
Zm00001d026359	2.472038519	2.927658578	2.115424547	3.788585788	4.774093266	3.772924331	4.989621616	4.739486356	4.595815192	1.825104065	3.405788289	1.035419495	4.508640605	3.739980542	3.930124555
Zm00001d026360	12.40276892	15.94408817	9.283550898	7.638220436	5.689474774	3.892956673	17.96607717	22.63321506	16.51278541	4.347049512	7.254638422	0.837411414	60.0471662	56.18326785	56.46837451
Zm00001d026361	30.33273773	32.97678325	25.69105563	23.76047815	28.25289537	22.50779498	29.22682312	33.63202712	30.04534778	22.60655253	32.28533528	18.70058581	30.41803819	28.81165929	28.81352134
Zm00001d026362	5.291230677	5.340272717	4.861570269	4.195014989	3.685750034	4.294439924	4.144580534	3.736409576	4.160657636	2.382709755	2.817287156	2.140808203	3.972850293	3.827993483	3.578747115
Zm00001d026363	28.50199794	27.67755049	27.05487868	21.41184125	21.55009215	19.12058928	19.05616665	19.19045306	19.78966201	29.95889123	31.31948039	25.94846317	18.89820851	18.90274902	17.94640768
Zm00001d026364	0.179669741	0.185150212	0.050748655	0.06111172	0.064565793	0.040021821	0.076343307	0.049236548	0.090647435	0.067580235	0.082388839	0.063327723	0.009138919	0.00895274	0.047209713
Zm00001d026366	0.188489156	0.077519278	0.29162342	0.076759347	0.187538741	0.047127552	0.098887567	0.185530627	0.246691614	2.774649721	1.440697743	5.812302788	0.030132203	0.008433814	0.031131312
Zm00001d026367	0	0	0.185690161	0.279510982	0.196872747	0	0.349176764	0.450393339	0.276400377	6.078897506	0.423931096	0.41378067	0	0	0
Zm00001d026368	112.5892264	114.2932258	117.1989443	46.54879714	35.7952758	33.94850976	34.21707011	32.15343522	29.87739473	40.46704455	47.69695867	39.3428	24.74088045	23.38276624	25.01737136
Zm00001d026369	13.32185075	15.91511966	11.97306081	9.529697414	4.688888302	7.617565538	10.32732005	9.806382421	7.995335466	9.851298427	1.582836597	0.45870319	14.40800473	11.4972756	13.52432949
Zm00001d026370	6.040167928	8.543427427	5.812018938	8.786724379	7.187114035	12.2084467	9.458247451	11.86792209	8.570355678	8.354498492	10.33950958	5.1514106	32.55343577	36.50897591	41.75806616
Zm00001d026371	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.012111733
Zm00001d026372	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026373	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026374	1.926871642	2.3717451	1.966739452	3.262073854	2.40516981	3.284956463	2.849326625	2.107352925	2.268350444	1.133818827	1.486022107	0.84453912	2.316612076	2.162493407	2.315178646
Zm00001d026375	0.237073421	0.129391102	0.176781327	0.650468909	0.312379012	0.580894756	0.701784745	0.400199215	0.360598642	0	0	0.07003178	0.212234216	0.485124656	0.264952919
Zm00001d026376	0	0	0	0	0	0	0	0	0	0.203323711	0	0	0	0	0.034088739
Zm00001d026377	85.72612777	89.10227135	74.7607985	18.12067142	16.79031244	20.85993511	11.24256504	21.39584305	12.69343489	16.97154932	14.29767308	8.004388669	53.23057035	49.08376477	55.63609762
Zm00001d026379	0.339808744	0.129925648	0.128202861	0.143787496	0.463738867	0.163551224	0.41833794	0.431681925	0.591199919	0.669503257	0.726936145	0.457087142	0.190128448	0.232818923	0.322710766
Zm00001d026381	53.64611222	54.07395709	54.92395075	48.06486406	53.38329002	50.19882004	55.45788813	53.39261515	58.66918651	72.9259724	77.65938998	93.95835755	46.66767582	47.3251805	43.43847888
Zm00001d026382	0.623128933	0.51420106	0.700989479	3.108557496	2.066815736	3.567005744	1.845423207	0.932712399	1.199110633	0.548236356	0.257412516	0.011901275	5.428129831	5.564875415	5.601902745
Zm00001d026383	0.73708835	0.618910336	0.654325408	7.02580813	3.098660781	9.983543459	2.433479655	1.340194815	1.269762279	0.371127399	0.044261527	0.012960524	19.65834184	20.46989403	16.36716526
Zm00001d026385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026386	11.3365214	12.0762728	11.07402904	14.79082534	16.03853105	13.55329105	15.71638427	15.29907754	13.76025277	3.694472939	8.836869466	3.67525219	13.22417012	11.93100893	12.28664436
Zm00001d026387	0.488894568	0.580862884	0.388666955	1.224393262	0.931076692	1.253699336	1.401585521	1.057273422	1.120447974	0.29209103	0.589055746	0.431944605	0.80180614	0.835377353	0.787201296
Zm00001d026388	0.154477219	0.162137191	0.191984743	0	0.0339244	0.157713109	0	0	0	0.035508259	0	0	0	0.028223892	0
Zm00001d026390	2.72313196	2.239865979	1.726692048	1.663431208	1.830676456	2.72343612	0.454568531	1.340194815	1.507842707	6.898128836	1.191372756	1.600624737	8.457734818	12.12353843	19.33963184
Zm00001d026391	12.36228599	11.93171354	12.10214076	18.9629549	18.68458502	17.29987729	23.90818199	22.93307927	21.04291671	5.279003238	8.895036512	3.471195634	21.33511483	21.60343774	17.47199535
Zm00001d026392	0.684776622	0.767884253	0.656126239	1.534487741	1.487329227	1.539870122	1.631296971	1.46758803	1.443855904	0.554465852	0.95544895	0.315660697	1.122239713	0.932291385	1.230958381
Zm00001d026393	0.017261659	0.19567011	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026394	4.946540708	5.191821938	4.410512117	5.617567954	8.208390604	5.39129413	7.847064475	6.807054991	6.854596888	9.796408154	11.69749598	11.38851975	2.071169474	1.167109787	1.65380302
Zm00001d026395	0.039974368	0.012586966	0.086940459	0.211880766	0.276528496	0.195896282	0.432067958	0.192799956	0.332771506	0.509964008	0.453680647	0.642085969	0.044732602	0.087642612	0.127093518
Zm00001d026396	2.902499229	3.331646709	3.71502048	4.254430211	5.854789	4.363487162	5.056953037	5.908448213	5.775826866	2.248711232	3.485157652	2.385823118	3.691191639	4.341728648	4.057571548
Zm00001d026397	14.3259865	17.55983054	16.37221614	14.23025035	18.85358271	17.55129364	11.96582614	9.631687449	11.73554346	0.81873066	2.785239935	0.464195326	6.193665733	4.210874935	5.531024913
Zm00001d026398	10.18958706	8.547635108	9.099518242	11.52601283	18.68031725	16.29190008	25.87303872	37.40963195	25.77512941	41.79364164	45.47138133	51.34072837	20.81020398	22.38343207	24.44677686
Zm00001d026399	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d026402	7.695981691	7.419582236	8.331678261	12.42331436	10.32924696	12.12878991	8.060615314	7.050647871	7.810598047	1.054350245	1.399308253	0.994141528	4.869671155	5.384292005	6.500276929
Zm00001d026403	2.658295485	3.348133	2.831774959	3.078502896	1.751347143	1.628387846	0.887490942	3.434249214	0.702517625	0.26187341	0	0	0.637439573	0.416302408	0.87810067
Zm00001d026404	0.349201377	0.593757576	0.455687925	2.30819669	0.644173662	1.090939641	0.775279443	0.800009012	0.753658755	0.168562195	0.198159363	0.464195326	0.547074576	0.459368175	2.6242089
Zm00001d026405	132.3711112	156.7517132	128.5179646	112.0333783	27.30374744	68.11367704	38.64381775	31.31955609	27.35642339	1.084452089	3.9162573	1.119907682	123.8968098	147.1597826	118.2876723
Zm00001d026406	0.466305653	0.293656848	0	0.026434372	0	0.025967647	0	0	0	0	0	0	0.047437364	0.092941933	0
Zm00001d026407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d026413	5.738542633	2.078558758	10.34821467	0.140330616	0.271814019	0	0.043826713	0.045224681	0.115640761	0	0.023648648	0.124645041	0	0	0
Zm00001d026414	102.917049	62.43598418	72.95785005	223.8346303	472.1792021	348.9179206	618.2261899	680.4758762	566.9485836	272.000578	420.8940539	240.0988818	261.6052006	250.5207981	270.3426096
Zm00001d026415	0	0	0	0.008084481	0.00427071	0.015883482	0	0	0.023983532	0.008940202	0	0	0.145078708	0.209631654	0.123658558
Zm00001d026420	0	0	0	0	0	0	0	0	0	3.845297982	0	0	0	0	0
Zm00001d026421	0.03011285	0.023704529	0.037424339	0.178388341	0.076876314	0.089925131	0.087967164	0.086234452	0.081238272	0.070082862	0.056959905	0.014593971	0.136895062	0.121727191	0.154489628
Zm00001d026422	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d026425	4.426875746	4.568298087	4.634864321	11.30878615	11.71513378	11.09772429	9.497964281	11.84185198	9.806572558	4.848399125	6.262644684	1.638064782	7.732532286	5.179141798	7.150248317
Zm00001d026426	0.464127341	0.250530044	0.655297577	0.830851235	6.45669862	1.156579794	7.994797152	9.886830715	16.45546133	1.106037162	1.66028257	0.461676021	0.395713065	0.238821058	0.865121815
Zm00001d026427	0	0	0	0	0	0	0	0	0	0	0.093188457	0.063670035	0	0.009001133	0
Zm00001d026429	0.676112994	0.534033428	0.59816202	5.030729086	6.266345664	4.527741084	4.947780597	5.907023794	4.501294823	0.750718408	0.903178153	0.266581578	3.654724792	3.090338749	3.696413719
Zm00001d026430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026431	0.03339878	0	0.06918017	0.26380556	0.616109093	0.654689204	0.351238272	0.429560814	0.302059695	0	0.154428754	0	1.146145421	0.646828172	0.746528583
Zm00001d026432	0	0	0	0	0.112235865	0	0	0	0	0	0	0	0	0	0.04923929
Zm00001d026434	0	0	0	0	0	0	0	0	0	0	0	0	0.019638703	0	0.067632914
Zm00001d026435	0.072170918	0.168813429	0.076880768	0.46290054	0.01358511	0.328414356	0.518037699	0.348086798	0.063576256	0	0	0	0.761466277	0.62162803	0.381437395
Zm00001d026436	0	0.027998325	0	0.221790828	0	0.027234361	0	0	0.027415322	0	0	0	0	0.121844607	0
Zm00001d026437	9.841507155	10.27809837	10.90279479	23.50646386	14.27319398	24.22350055	40.10620709	32.99564	35.71169398	2.963349266	1.698716298	0.715287953	92.57615892	106.6290139	107.4743736
Zm00001d026438	0	0	0	0	0.143270331	0	0.330338622	0.104884812	0.107277347	6.968109853	0.210242251	0.09635868	0.064893106	0	0
Zm00001d026439	10.1621251	11.55203606	9.861429808	22.90458362	12.30024379	17.387548	15.32207991	15.51319011	13.0080362	34.57226706	19.00553543	69.71272395	37.95804249	36.78441223	32.34258662
Zm00001d026440	0	0	0	0	0	0	0	0	0	0.266814417	0.108426821	0.238119065	0	0	0
Zm00001d026441	0	0	0	0	0	0	0	0	0	0.105629611	0	0	0	0	0
Zm00001d026442	0.335784693	0.265836725	0.083462841	1.076852835	1.554880231	1.292915463	2.118767848	2.371439457	1.43165697	1.098214383	0.955753896	0.733306459	1.22388398	2.061354241	1.652677894
Zm00001d026443	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026444	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026445	9.72954247	9.554273868	7.48808277	7.504281892	6.216608848	6.652347274	7.261289522	7.264967798	7.524937241	4.365635445	7.029847693	5.845665413	20.281043	22.1518443	17.43800978
Zm00001d026446	0.047414684	0.11943794	0.098211848	0.039422358	0.187427407	0.251721061	0.258552274	0.343027898	0.175426366	0.087190222	0.318887669	0.332650957	0.459840802	0.138607045	0.730904604
Zm00001d026447	95.39627208	84.97955984	69.14362365	16.56533093	25.46982846	20.37414178	21.19883576	25.31253259	20.7226052	5.867950143	5.447034622	1.937905488	7.298834159	6.93705814	6.417209639
Zm00001d026448	76.77822495	72.46457931	63.04748667	38.65153568	26.83721134	27.41968377	21.24726834	23.6590644	18.02435752	3.632137704	8.432912063	2.071025301	52.03116228	45.25625944	48.2383824
Zm00001d026449	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.015330565
Zm00001d026450	0	0	0	0.043274543	0	0	0	0.125515707	0	0	0	0	0	0	0
Zm00001d026451	31.44521478	27.60584067	28.98505608	24.62229971	29.67841788	27.00439129	28.74827153	29.00124895	26.69142492	19.78528769	26.14625988	18.25560312	16.85459559	14.45864799	16.56983924
Zm00001d026452	26.65059468	25.5030879	26.80089347	18.27724422	12.91101566	14.00256068	16.70454524	13.30994464	14.7106221	14.82119161	11.80106406	10.48609691	11.54303983	9.456070477	11.40116907
Zm00001d026453	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026454	62.88767603	59.48371355	102.0468722	143.3764286	46.12638969	89.48096956	25.26928754	13.03765883	21.56090456	8.28472241	4.336087152	4.267959527	29.94807011	22.7528189	15.99739767
Zm00001d026456	0.534032575	0.269046402	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026457	101.6276357	120.4602871	91.42758058	16.332268	13.61468299	12.20042046	29.1246501	29.2554653	34.35976728	140.8757654	55.38533337	48.23881182	5.153195704	4.038571574	9.084182515
Zm00001d026458	420.8025716	442.8392003	392.723721	235.3033831	227.5567478	263.4407603	309.5076178	321.5635674	420.3962496	1480.380627	1106.839301	763.219997	93.62778475	82.79375579	126.6042562
Zm00001d026459	0	0	0	0	0	0	0	0	0	0	0	0	0	0.033830444	0
Zm00001d026460	2.784204056	1.926007753	2.521339737	1.398053146	4.527546778	2.709418434	4.655767988	5.906174049	4.102402386	3.91549761	5.89259186	1.930165124	2.897452603	2.143846092	5.339039906
Zm00001d026462	0	0	0	0	0	0	0	0	0	0.369703637	0.25352742	0	0	0	0
Zm00001d026463	3.879674491	3.468170862	3.444050626	6.045459207	5.79596407	6.96263794	5.006271296	4.603750297	3.819091952	1.128381178	2.185491198	0.808869317	2.018148454	1.56233954	1.993525847
Zm00001d026464	2.324415611	3.081694803	1.216332868	4.386509031	5.118030769	5.35822348	4.681663625	4.499096956	4.111378314	5.947514214	6.556548051	3.184722632	3.901643559	3.620992759	2.828780683
Zm00001d026465	28.61915895	23.60629181	28.42793539	19.88080769	16.91573539	18.50876859	16.01627621	16.8478654	14.76107072	65.27067362	55.92334801	62.79709329	11.96501361	9.408110457	8.897175665
Zm00001d026467	0.227654202	0.150911216	0.014891016	0.029886363	0.094726677	0.293586891	0.294015404	0.274499148	0.236430121	0.611420476	0.846128323	0.33182236	0	0.05253948	0.290904517
Zm00001d026468	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026469	0	0	0	0.006128745	0.006475146	0.048164291	0	0	0.012121081	0.013554914	0.006196932	0	0.093485027	0.188548179	0.159080783
Zm00001d026470	0	0	0	0.263662421	0.68093615	0	0.439170775	0.028323705	0.086909397	0	0	0.104085034	0.210289344	0.412010631	0.841890334
Zm00001d026471	0.90952076	0.548906865	0.188392513	2.09139298	8.975719128	3.377683611	2.822996134	3.861209927	2.290119825	0.30052832	0.322575429	0.262376516	3.0427469	2.326446722	2.825987189
Zm00001d026472	3.140014001	3.113567126	3.81707748	17.01902802	27.00433349	17.93457299	19.11144877	20.66194869	17.65340179	4.167015788	3.251170809	0.58779528	10.46448745	9.813331291	12.89003669
Zm00001d026473	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026474	0	0	0	0	0	0	0.041439266	0	0	0	0	0	0	0	0
Zm00001d026475	14.14776802	13.79118101	13.00949441	15.6502334	16.36735358	13.14891202	13.5371585	13.92427117	14.64675785	4.761187195	8.179254109	3.642391685	11.00879374	9.507560191	9.751610622
Zm00001d026476	13.33588068	13.13597608	16.75447556	21.24649134	30.6073536	19.24164403	19.78894356	22.60370603	21.25819481	7.338450933	11.26300229	5.361826082	17.87541094	18.17297872	16.72340214
Zm00001d026477	9.170369902	10.38424709	9.389569602	12.75958437	17.06575863	12.39656161	16.1806531	17.54178348	15.07177615	18.96859368	17.70772275	14.31408893	16.74956351	16.06735578	18.1844828
Zm00001d026478	0.430737507	0.377402076	0.325848078	0.467127942	0.370147733	0.642432465	0.503316781	0.632278211	1.108630553	0.619886646	0	0	0.901147451	1.313918834	1.125893462
Zm00001d026479	17.39665934	17.49035953	18.90042416	12.94851143	18.02879939	16.32536728	14.49728048	14.3443647	15.21004563	9.360969692	11.89843827	7.079099056	6.637197442	5.81200293	6.627820822
Zm00001d026480	1.553199804	0.736018953	0.458690207	0.632908443	3.039458323	1.620276	3.198561279	3.39330091	3.41380893	10.98631123	9.269578481	1.822775994	1.565993281	1.180069819	1.226772815
Zm00001d026482	0	0	0	0	0	0	0	0	0	0.114793823	0	0	0	0	0
Zm00001d026483	53.49028503	56.20578626	40.40687221	20.12867278	31.17502162	21.31443378	32.89725537	36.82278323	33.63790988	66.6795169	68.87465575	91.02837102	25.22312976	23.29558893	25.73475246
Zm00001d026484	0.096959106	0	0.120501062	0.120923191	0.051103139	0	0	0	0.023915494	0	0	0	0	0.021257995	0
Zm00001d026485	3.197372002	3.018136807	3.2149144	4.546133802	4.337619322	4.252882381	4.488555407	4.031382352	4.154216123	1.285124443	1.908135571	0.873536034	3.009907956	3.102575222	2.969820437
Zm00001d026486	1.498217416	2.018052767	1.370630802	3.607265775	1.837029489	2.370881718	1.094166914	2.057413227	0.590243119	0	0.026240281	0	1.606697005	1.84769836	2.213294841
Zm00001d026487	98.30073287	106.6574505	88.34701843	24.44489712	16.78879082	23.34705801	24.51570358	22.76651643	22.4709487	11.82260998	15.89783919	13.54443239	23.46475594	25.17258514	23.48562495
Zm00001d026488	1.164462185	1.537156182	2.463018024	0.544600021	1.209775773	0.356656376	0.536419586	1.336572667	1.201356921	1.961155165	3.261596002	1.897697784	0.075177149	0.012274272	0.310679353
Zm00001d026489	30.75157961	27.61753327	29.60033469	16.09570745	73.43052886	24.09374733	61.37914451	69.99227099	66.12603556	66.00009533	66.21043835	47.89937668	15.79163277	16.85548071	18.51384772
Zm00001d026490	167.4409425	111.4054285	128.7338733	97.83666144	389.2844434	168.6935337	270.7055226	325.2578298	323.8990948	95.47211771	133.7650824	67.13282165	49.85497062	44.8318764	56.85032354
Zm00001d026491	0	0	0	0.053786025	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026492	5.410180248	5.766858734	5.63670845	5.090809018	3.699528156	5.06707552	4.492134244	4.375005633	4.195128944	5.39136536	4.711684948	5.275409383	2.827694029	3.066037642	2.447029357
Zm00001d026493	0.251309447	0.063305036	0.416437494	0.313422241	0.97133539	0.287362561	0.724349224	0.646446911	0.681855342	0.34659716	0.29578199	0.03711856	0.318719786	0.459157068	0.290548016
Zm00001d026494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026495	3.29240052	3.417097865	3.810822736	5.066587951	5.930142885	5.375302871	5.366224298	5.085883486	6.108091224	0.867227291	2.868856018	1.275727504	2.213743632	2.091193493	2.907942686
Zm00001d026496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026497	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d026500	0	0	0	0.023324446	0	0.022912629	0	0	0	0	0.235839461	0.414346717	0.355780227	0.41003794	1.729774235
Zm00001d026501	2.031963625	2.472998322	2.746651464	8.690233549	4.202631479	6.595600129	4.068407873	4.09632291	5.127393165	0.916294535	2.928013072	2.076407788	54.69461472	53.19243537	45.3717608
Zm00001d026505	0	0	0	0.869589721	0.689054614	1.128812184	1.19302061	1.831599581	0.798489978	0.27475243	0	0	0	0	0
Zm00001d026506	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026507	0	0	0	0	0	0	0	0	0	0.054731163	0	0	0	0	0
Zm00001d026508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026509	0	0	0	0.052623981	0	0.103389705	0	0	0	0	0	0	0	0.046255823	0.048783371
Zm00001d026510	1.133818443	1.34566111	1.219424624	2.284233286	2.556990771	2.003484705	3.082863271	2.366181276	3.307547095	2.947015594	2.859562865	2.801829684	2.122765276	1.983910041	3.352748015
Zm00001d026511	3.378612833	4.090600536	3.727955278	3.322756583	3.224626671	3.284442863	3.552390262	3.038477226	3.481695916	2.815273401	4.078543189	4.496039505	3.348554748	3.46586694	3.008230048
Zm00001d026512	2.884393284	3.102068725	0	0	0	0	0	0.095285527	0	0.308798703	0	0.248029222	0	0	0
Zm00001d026513	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026514	9.862186025	12.97311145	9.155868497	7.776301384	10.04444329	7.946492496	12.11051354	13.51744226	13.49197996	1.676442302	3.97174706	1.662719085	4.306503204	4.655753499	4.728088491
Zm00001d026515	25.83112863	27.75545098	26.11097129	25.06089587	33.8890493	24.52062513	28.2622164	28.70171441	31.88976074	30.5171716	32.83560039	19.2532194	22.12900383	21.21732461	23.63796418
Zm00001d026516	4.688942357	4.249788269	4.800762314	6.587895428	7.466168539	5.944160085	7.069715075	6.790168317	6.198895944	5.584255446	5.663478917	2.835542088	4.413794352	4.272857059	4.721565988
Zm00001d026517	12.5648249	11.20125081	13.3508158	15.10689933	23.7494359	14.67601077	16.59217873	18.25701122	17.3325715	23.05248671	22.32830403	23.35057829	11.48569361	10.32420646	11.75587702
Zm00001d026518	9.453665429	9.811018419	8.789496674	13.3825048	14.49803547	13.8140796	14.03036571	18.36980985	15.99351772	15.74867665	18.86797351	10.74249299	7.496770966	6.117417551	7.662418862
Zm00001d026519	0	0.044551021	0.065940426	0	0	0	0	0	0	0.024391831	0	0	0	0.038775903	0.449841999
Zm00001d026520	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d026522	0.556306568	0.210201054	0.950646731	4.561744334	3.243593663	1.158637828	0.146259952	0.804934912	1.217792505	1.630381756	1.595958979	0	1.680817266	1.555099128	0.514533048
Zm00001d026523	5.483695893	4.431251935	0.026990707	0.176054177	0.071540335	0.079821122	0	0.144025702	0.254446415	0	0.178012899	0	0.121513501	0.11903802	0.037662777
Zm00001d026524	1.276459014	1.156946482	0.21497768	0.081828913	0.133610627	0.029230597	0.006969824	0.02876858	0.073562055	0	0	0	0.02002428	0.013077563	0.04827255
Zm00001d026528	27.79615923	32.52048778	25.07248537	4.438576674	3.360992368	3.767319544	2.580006852	2.188194189	2.524089873	7.536392281	1.729071964	0.714778644	4.738488859	2.387291687	2.599333401
Zm00001d026529	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026530	0.091141559	0.191321886	0.339812995	0.303114131	1.361046923	1.302710277	2.094478622	1.318751698	0.861754953	0	0	0.033654161	16.28445628	15.98601248	13.69837046
Zm00001d026531	5.185166185	5.110257611	5.10232289	5.617636456	8.599169848	5.518451483	7.119570189	6.310173806	5.741703404	0.673388767	0.927900156	0.472309404	4.486445926	3.844724455	3.204095706
Zm00001d026532	3.885699163	3.69405475	4.010704611	5.802871923	6.37835436	5.905587063	3.358391479	3.689273911	3.170574495	5.362140914	8.047743439	7.758952646	4.540688577	3.617096641	4.597055422
Zm00001d026533	0	0	0.01547418	0.015528388	0.065624249	0	0.014549032	0	0	0.085860134	0.015701152	0	0	0.068246296	0.014395093
Zm00001d026535	4.330210455	5.26342244	2.284216742	1.763245082	2.772695539	1.796563957	2.685524537	3.350003562	3.154740041	2.716228092	4.146191578	2.050572806	1.37606003	1.25431375	1.953869024
Zm00001d026536	24.60949221	23.56701387	19.41562859	7.982111146	5.828751281	7.599792173	9.19425762	6.912564107	6.45101261	6.784603145	7.694221291	8.413540286	8.86903372	8.465396253	8.15641627
Zm00001d026537	0	0	0	0	0.018419076	0	0	0.421380272	0	0	0	0	1.924050735	1.685641653	1.729265738
Zm00001d026540	0.041927114	0	0	0.014939908	0.00394608	0.014676129	0	0	0.003693411	0	0	0.003317497	0.020107623	0.062376965	0.013849562
Zm00001d026541	15.81726496	17.5577776	17.40668665	7.611816114	7.018078702	7.748396064	7.788344205	8.130476144	7.689296538	2.65468873	4.198777687	2.503092615	6.936858804	6.618607593	6.779843305
Zm00001d026542	231.9457577	226.5263279	209.0682493	71.51942858	44.38078034	61.95810994	31.29009578	19.04979909	21.02197931	14.49191289	12.88296595	6.404063151	46.43706796	36.98442684	42.01018471
Zm00001d026543	20.52727857	18.62440299	23.34389608	20.17741434	28.71315837	20.10896925	20.43251465	23.81524184	23.59955359	12.38562425	21.61262067	11.91127244	9.806616123	10.51377408	9.680100443
Zm00001d026544	1.333778919	1.592404719	1.623090526	2.157262348	2.581253803	2.246834799	1.940033552	2.094054398	1.696323045	0.565263335	1.01617088	0.330898383	0.583023999	0.517839581	0.987863254
Zm00001d026546	0	0	0	0	0	0	0	0.032513602	0.399063266	0	0	0	0	0	0
Zm00001d026547	12.93049216	10.93371841	12.38766955	24.48935998	31.83247045	23.84999994	29.06448471	32.29500059	26.70101208	5.21556243	19.66524477	3.930051042	14.49872062	13.22037154	17.60875641
Zm00001d026548	0.164261307	0.173391616	0.188590574	1.707163137	0.570985033	0.98321373	1.049268384	0.916742941	1.132517256	3.206128828	3.655506244	12.05449768	1.845139196	1.411398072	1.640447597
Zm00001d026549	4.437576728	5.776366878	4.977113904	3.080699068	3.974915532	3.749405978	3.351292945	3.59525367	3.547860035	3.280159163	4.283778311	2.634646194	1.78083534	2.243000632	1.779227966
Zm00001d026551	2.029790189	2.61292226	2.624647315	1.600780142	2.104238676	1.444521221	1.334143042	1.880588871	1.214833971	1.564379145	1.722104377	1.281319727	1.561587774	1.636123002	1.432186028
Zm00001d026552	2.247038448	2.327602665	2.870923922	1.676207178	1.217526388	0.694664466	0.883401122	1.1901177	0.958272889	0.434444366	0.979838693	0.884003311	0.564001834	1.082002573	0.922612686
Zm00001d026553	2.567989331	2.474143208	1.809616066	0.825434251	0.634880297	0.778425971	0.59395211	0.670356934	0.43750904	0.204468162	0.694401982	0.539613583	0.574732504	0.563024016	0.514209223
Zm00001d026554	19.38878229	21.16533495	22.79842328	14.47844984	19.07245709	10.85986824	8.292520649	11.57621165	8.669659228	0.554012306	1.924921217	0.415320696	2.20263155	1.673364431	2.740086911
Zm00001d026555	16.70236551	21.08898872	19.64826088	15.05645222	10.65512079	13.15003996	6.622825341	8.949387472	7.74529682	0.472445878	4.633949933	1.287904117	12.71975093	12.88166723	15.07372814
Zm00001d026556	2.714907715	3.082176842	2.218583211	3.678124244	2.763823441	3.781768137	2.337993003	2.668176212	2.779493018	1.815731627	1.266257736	0.815719738	4.856748518	4.916807769	4.549115661
Zm00001d026557	0.440774455	0.191119643	0.54779579	0.414539014	0.875938046	0.752471581	0.388394556	0.52276098	0.552508576	0.259105192	0.774518229	0.144079654	0.0566014	0.221793249	0.250620699
Zm00001d026558	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026559	334.2199084	348.5503344	319.6900927	191.4900377	126.3672987	172.0062267	158.977879	133.6949906	137.3952798	59.25243756	116.2905549	89.74623326	135.0142107	131.9103039	120.4155543
Zm00001d026560	12.65014591	16.34373162	18.64741436	25.893619	24.42335085	34.90560836	26.11653841	20.26349536	22.57967436	2.268845141	2.771969927	1.39818377	43.21364207	47.44811017	49.4833411
Zm00001d026561	0	0	0	1.152038506	1.704013437	1.358037741	1.079380875	2.450383223	0.455687108	0	0	0.409307365	3.514531698	3.847984423	2.349512605
Zm00001d026562	10.56844644	14.33492028	12.25886325	18.82446903	14.88955023	14.84016267	12.90336186	11.79557391	13.9528773	5.904998824	2.648343915	0.69042729	15.72308829	12.07565796	13.25244501
Zm00001d026563	17.28634606	17.5075558	14.33289449	11.49378305	21.43548267	13.38059159	15.05263966	16.45369903	12.77875635	7.689422572	10.46591407	5.330142282	5.72627281	5.749159516	7.682154469
Zm00001d026564	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026565	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026567	2.651478314	3.194085547	2.727115906	9.926427663	5.078880296	6.709085664	12.30866529	10.14826082	8.818932971	4.081575	9.909432897	7.404270828	19.52570974	18.78504172	19.11607542
Zm00001d026568	0.190777685	0.262329714	0.24144951	1.951459721	1.254581724	1.706863293	0.35176955	0.217372015	0.358319065	0.096555552	0.116977701	0.06010441	1.120313718	0.83846748	1.098778127
Zm00001d026569	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026571	0	0.037616537	0	0.004655972	0.009838261	0	0	0	0	0	0.009415546	0	0	0.004092541	0.004316169
Zm00001d026572	1.998718409	1.069892124	1.751229251	2.268370555	6.610347864	2.632356293	5.324945649	5.314048783	4.917623373	4.989377592	5.3307476	4.450319993	0.402593414	0.668274919	0.762561109
Zm00001d026573	39.48345569	35.71957865	45.72029389	54.77367076	86.66097815	60.18267706	84.63940599	91.81621375	97.47432044	24.63990717	53.39460331	15.67786746	62.60236094	59.75169544	62.25334617
Zm00001d026574	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026575	5.710541644	5.49877918	6.941098228	12.63389637	14.05671412	12.6634422	9.448723231	11.22019887	9.850909435	4.747721985	6.149827103	2.830259781	9.008588637	8.520413618	9.659683179
Zm00001d026576	0	0.013286242	0	0	0	0.012923713	0.012326263	0.127194415	0.013009586	0.436455683	0.013302365	0.04674189	0	0.011563956	0
Zm00001d026577	0.63012105	0.803685868	0.911983534	0.935073494	2.249104583	0.928335795	0.74561666	0.711695053	0.747603353	8.074379199	0.865010708	1.634602634	2.945461736	2.605654747	2.508273561
Zm00001d026578	30.64828034	25.1572066	44.19488784	71.76483935	119.725992	65.00934337	77.36514255	96.76433716	74.26206648	6.391486605	19.6748737	3.40534478	28.38442789	24.63945779	32.4867482
Zm00001d026579	0	0	0	0	0	0	0	0	0	0.17269254	0	0	0	0	0
Zm00001d026580	1.832805642	1.896206651	2.242951712	2.676480157	3.591682025	2.663593175	2.780845419	3.061226796	3.626951458	2.140841991	4.398405943	1.481289514	1.810293506	1.650402708	1.324358398
Zm00001d026581	0	0	0	0	0.010142937	0	0	0	0.009493481	0	0	0	0	0.008438562	0.017799338
Zm00001d026582	7.634585176	7.155935465	6.25197069	7.32566823	10.5535724	9.117763489	8.264039027	9.336400459	9.196594361	12.93722662	15.64772701	17.28053761	3.118210897	3.49261501	3.124669918
Zm00001d026583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026584	24.04472289	24.99170136	24.23256605	24.44722837	36.05935292	25.30021131	32.47343904	31.73342786	34.19467521	165.6315584	98.49332469	152.6939339	12.4770959	11.6350186	14.63980954
Zm00001d026585	16.84272339	16.0206189	14.00296513	11.37293268	11.87644131	13.8790365	10.3270675	9.463358922	9.452371382	6.698062475	7.756072698	4.002742442	10.88832755	10.96550587	10.92180147
Zm00001d026586	44.40538021	31.66684376	42.51559377	48.95406193	73.63232635	68.7188208	18.28312761	19.7296042	15.88076539	27.19399195	17.48370059	42.31856387	84.9081207	83.97468854	69.9419268
Zm00001d026587	18.73365123	18.25551759	16.96373388	12.12756638	11.45039185	13.8702714	9.78102888	9.485872362	10.16967296	4.853732897	5.933244483	4.720246008	11.0876618	10.83210623	10.19083645
Zm00001d026588	0.392978789	0.341590897	0.495274001	2.271055017	2.822413927	1.349424006	1.274106429	1.635091933	1.058042739	0.045801341	0.21637077	0.018393975	0.860930532	0.345851232	1.395006895
Zm00001d026589	5.630778	5.048007308	5.531128788	14.93423154	18.53224069	12.65222212	15.68751974	16.51404442	15.64744292	1.729494892	7.25562646	1.225713603	5.888290729	2.884167045	5.458122153
Zm00001d026590	1.125573357	1.226341923	0.83251089	1.245376708	0.551243691	1.336269558	0.843843846	0.456398584	0.733996557	0.291924457	0.857282883	0.375161141	1.067275875	1.127428817	0.932802024
Zm00001d026591	0	0	0	0.008866443	0	0	0.049843485	0	0.035071083	0.039219731	0	0.039376944	0.03977782	0	0
Zm00001d026592	0.360768673	0.430474243	0.416900202	1.72869778	1.484475198	1.403515239	0.502911534	0.358688251	0.569819851	1.510136662	0.215498307	0.105169254	0.658687558	0.388548914	0.526860402
Zm00001d026593	21.9119777	25.72138709	19.60077152	11.85529369	9.72511044	7.859962154	6.544190703	7.048375708	4.958222417	8.689522938	11.70973977	9.33921436	21.63843887	20.79745726	21.66795305
Zm00001d026594	21.39994656	18.12750831	17.50293065	10.78130508	10.53071333	9.286369743	6.114322014	9.001529597	4.970576963	10.18542809	12.66278161	15.22047489	13.69694278	17.10814621	16.98396724
Zm00001d026595	0	0.061277472	0	0	0	0	0.018949985	0.09777222	0.280007025	12.70412213	17.17851275	23.80343248	0	0	0.037498961
Zm00001d026597	13.08322386	14.33062641	8.988601807	17.9851792	28.80280039	16.02873936	40.09168757	39.27894842	40.93638185	263.5426413	206.878375	428.7485849	15.24919958	13.60100255	13.4944245
Zm00001d026598	4.377303338	6.018740789	5.175133687	4.364217797	4.495200846	4.225698475	3.957069703	4.733592677	4.454864057	4.186130539	5.045428258	2.63984475	3.087780682	3.327363836	3.625186254
Zm00001d026599	143.3441844	159.092703	217.3636692	918.1370163	166.9251475	509.1463826	283.1312565	279.0434515	185.9368057	0.204389003	0.171308501	0.013680553	600.0154781	716.5139824	572.6644178
Zm00001d026600	17.1781115	15.74079551	15.11534043	8.11995827	10.78806317	8.550016864	9.648572955	12.00320113	10.51945655	6.2817503	10.54477154	7.196865835	4.463705623	4.188976507	3.561759388
Zm00001d026602	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026603	74.54521616	67.0318282	88.26406889	197.4881092	50.62557168	134.9184866	106.1683741	73.05158764	100.637327	0.698805442	1.242618707	0.578502634	151.2288427	170.9554643	132.6099726
Zm00001d026604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026605	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026606	36.48486483	36.6109249	37.75274515	151.2422112	59.13619202	126.3969718	0.692992927	0.111443805	0.6364216	63.67108935	67.50256836	59.24649169	101.6340837	86.57776688	74.19381755
Zm00001d026607	22.51322643	20.03445311	25.99953033	30.28795656	26.37134102	27.65497637	18.09822205	19.04169877	19.79534003	1.503721748	6.114941042	1.599369275	15.40440278	12.33443698	15.06329577
Zm00001d026608	7.55980377	6.629525806	7.990434769	12.02763922	6.935567424	13.82055864	4.678246824	3.790985178	3.340135477	5.781515274	5.033862268	3.861097558	14.42886475	13.64439211	14.79837874
Zm00001d026609	3.200804767	4.099754693	3.89930917	8.806999128	15.32130902	10.06941872	9.699008147	9.692214447	10.43740471	1.783233217	3.694256696	0.791273432	6.465458523	6.056208845	8.310595631
Zm00001d026610	5.768875609	4.006441967	5.934762169	6.070821052	9.651367532	6.963864516	5.057948375	6.240853106	6.079251108	1.274696484	2.758378333	1.663747966	4.206023817	4.415854503	5.129097325
Zm00001d026611	3.004445213	4.190457231	3.834173175	1.056205214	2.338081648	1.30929794	1.531510917	1.920748233	0.94497946	0.8899061	1.474796675	0.826462807	5.799007794	5.526138163	6.177787903
Zm00001d026612	6.350966237	6.364061907	6.715059501	7.070955535	6.051817478	6.717031297	5.223653648	4.721674253	4.914199691	0.607648408	1.764369099	0.538064485	3.874542311	3.409216327	3.747078227
Zm00001d026613	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026614	2.83416304	3.0493186	2.238753921	7.728292043	5.494036295	6.073473072	3.132100849	1.63338009	2.411170822	0.152376095	0.236245509	0.063855401	1.612637008	1.448135574	1.688322863
Zm00001d026617	0	0	0	0	0	0	0	0	0	0	0.011115322	0	0	0.009662725	0
Zm00001d026618	0.087263195	0.048848141	0.030125266	0.193477105	0.594073985	0.308849245	0.657120952	0.526097752	0.484288746	0.33430648	0.366805629	0.322220692	0.1844506	0.233837948	0.414762444
Zm00001d026619	5.517050308	4.033224688	3.927722157	1.466961953	7.390865733	2.882122554	6.960255045	7.924219863	6.442684598	7.822525975	5.616416385	11.01746145	1.391203085	1.693252049	1.892245107
Zm00001d026620	0	0	0	0	0	0.039878886	0.038035326	0.15699425	0.120431593	0.044892584	0	0	0	0	0
Zm00001d026621	10.57852299	10.15210749	9.05783791	4.382605237	4.577182489	4.391676292	4.275819062	4.183696491	4.241834778	2.610933118	5.819503027	4.004403468	3.921085306	4.015804915	3.797031096
Zm00001d026623	0	0.013665849	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d026625	3.043308128	2.025761143	1.763735269	2.694202162	4.15544552	3.535283946	5.269669397	5.913087919	5.328438178	6.263214556	7.8344944	3.02188748	4.728963474	3.40532489	3.518479503
Zm00001d026627	0.025066435	0.012628507	0.056074752	0.006252354	0.033028706	0.061419626	0.052722234	0.060448831	0	0	0.063219159	0.02776746	0.005610029	0.021982965	0.011592088
Zm00001d026628	9.706089563	13.58827948	8.434859933	5.491246885	11.55515161	4.589619838	13.31710162	13.52189797	13.44033719	0.654217557	0.337435072	0.080841846	4.967945424	2.173365242	4.499875322
Zm00001d026629	0.371929694	0.511032902	0.574292366	2.234935706	3.653263526	2.941108941	3.239744344	4.144881161	4.475726467	0.994816712	1.478108752	0.28715628	0.693668785	1.050194039	0.964245749
Zm00001d026630	19.38566503	18.33826782	19.81600346	34.66739002	49.15345529	36.9164545	39.15827379	47.34747215	45.06308066	20.32280174	27.69063661	17.39943025	23.33520286	24.43440258	24.38372066
Zm00001d026631	17.38199741	14.26714633	9.46621915	17.05016989	20.58726438	23.92733162	12.32344565	17.42636172	12.28402247	4.579043618	9.11249985	15.36072069	13.33159335	9.848525545	9.031892611
Zm00001d026632	5056.163671	4885.397158	4974.236277	925.1105962	1005.209301	868.163349	933.0866228	952.7278675	1217.584532	2317.709626	1934.775128	2101.97438	321.9213626	242.2504405	197.1369017
Zm00001d026633	195.3097075	208.5358666	181.2483655	22.96326661	23.77969952	18.47427091	24.43087841	20.24550358	24.76305933	5.334433051	13.51991988	3.998351283	9.803438331	7.08311138	6.20280239
Zm00001d026634	14.40076614	14.0974021	13.21494981	6.780184516	10.03403401	7.786877221	14.77205317	14.77329662	16.33045356	16.1258889	11.48064081	8.93385133	9.684608245	8.808082534	7.625611086
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Zm00001d027324	11.72541022	11.78065688	11.51991142	14.77728014	18.44979461	14.61255293	16.56455611	20.28432677	19.77192344	10.58750543	16.29230845	9.591021806	8.59680605	9.792498159	10.83326988
Zm00001d027325	3.172578269	3.113393048	3.176603645	2.292929776	9.136178877	3.282527741	8.449175754	13.34161466	10.09275013	13.24248415	14.99917697	8.680538243	5.055609305	3.809704696	5.372291187
Zm00001d027326	23.12901569	23.08352772	22.94941508	23.03843805	21.97034097	19.71583064	17.24409272	14.35710825	17.61129203	4.246166013	7.41593365	1.946695657	13.5178481	13.58376219	15.38187075
Zm00001d027327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027329	5.645671559	5.333058164	4.487920117	4.793897299	6.899870835	5.675021706	8.430432898	7.454640467	9.096850957	13.22223436	16.15586431	22.72071703	3.402478115	3.357852704	3.337361197
Zm00001d027330	0.163282924	0.112175698	0.073792181	0.018512671	0	0.018185811	0.104070599	0.035796734	0.091533241	0	0.187186369	0	0.382048474	0.520717019	0.411877839
Zm00001d027332	0.874590722	3.594532398	4.576605995	39.55409782	16.55819117	57.24030006	18.71799077	6.327344006	3.973837069	0	0	0	424.3931022	233.0284269	471.3005781
Zm00001d027333	6.559182582	7.227105258	6.883266341	6.073026532	6.970185615	5.919710018	6.597886713	6.642671271	7.22186101	4.04710033	5.076251105	3.687341238	4.036049556	4.242519015	4.122597548
Zm00001d027334	6.699107435	6.427393578	6.010614429	6.551172202	6.711770047	6.596057857	6.774220484	6.877433824	6.951581454	5.693258815	6.858172763	6.069500887	6.002101338	5.59421504	5.425525813
Zm00001d027335	0.290716656	0.299584394	0.234612673	0.320190984	1.059638608	0.309912138	1.385279978	1.889263859	1.462074792	0.364496543	0.552285085	0.037641357	0.346446031	0.211082911	0.253172356
Zm00001d027337	0.019779938	0.041521509	0.008194188	0.057560255	0.112939538	0.072699392	0.026965001	0.023850103	0.012197075	0.209145101	0.083143789	0.032866977	0.003689064	0.018069552	0.083850462
Zm00001d027338	0.512671272	0.119576179	0.684345615	0.236807915	2.101616572	0.488516354	0.576869112	1.511069654	0.913272912	1.93786323	1.292989844	0.799286327	0.021247986	0.291411686	0.263430201
Zm00001d027339	16.15835295	13.8070997	15.23842748	13.11855481	14.56972389	11.4895553	10.36605874	11.7472812	10.3155311	2.774705048	5.333770386	1.123105262	8.384952525	7.259001901	8.516457256
Zm00001d027340	11.22446349	11.29705071	11.26545662	7.706248239	6.27816851	9.011679599	8.100346518	7.197125865	7.192922826	1.715811505	2.238164645	1.323773136	8.06469779	8.295591572	8.443836542
Zm00001d027341	1.565408464	0.438141723	1.188913151	3.687695777	19.5952254	8.182782112	17.66174721	22.388159	21.00045052	68.10307875	55.84312369	84.604249	3.668927006	2.98403024	3.89112549
Zm00001d027342	30.01860424	23.24753517	36.31893924	45.58155037	74.27189534	40.22414619	45.49433431	53.56506827	46.4887502	4.218095187	13.51805936	1.897281568	19.28575566	18.80904572	23.7087181
Zm00001d027343	0.067637521	0.234271697	0.094567624	1.940155386	1.214292109	0.807935873	0.622396245	0.744193522	0.886293107	0	0.053308177	0.09365722	0.397364928	0.333659815	0.293243267
Zm00001d027344	3.166087725	2.895661437	4.50488586	1.248764488	4.385533763	1.274688452	2.228895008	3.149841668	2.883656633	5.145748207	6.433206423	4.343782788	1.420937313	1.416518342	1.804345977
Zm00001d027345	26.89582241	27.39381545	33.18486281	27.85184001	42.6293816	33.7123867	37.94023775	49.75758804	40.06745408	64.46549626	63.15569709	71.61309105	6.584461041	6.130999104	10.12559836
Zm00001d027346	0.279638876	0.19567011	0.212383122	0.213127124	0.245643495	0.456794513	0.254145133	0.187322684	0.268234002	0	0.117544531	0	0.452002606	0.153274978	1.490775457
Zm00001d027347	25.86362772	28.48064155	25.85555373	20.14245525	19.62885521	18.8612361	20.88186358	17.90897368	20.49319491	9.122616552	20.74662128	9.07682997	16.70159134	15.99570418	14.17505368
Zm00001d027348	3.469902314	2.978231342	3.310305519	3.016829264	3.629034012	2.297594667	3.673471452	3.89988698	3.486051673	4.473193508	4.775522462	3.934124603	2.646071228	2.512711952	2.639539192
Zm00001d027349	3.047523695	3.489424883	3.853685954	8.531729592	6.19182435	7.362829715	6.393670127	4.747454719	5.118577363	2.564440777	1.390745116	0.30099883	10.11755219	9.514278423	10.2620744
Zm00001d027350	0	0	0	0.063858314	0.044978418	0	0	0.123478623	0	0	0	0	0	0	0.157860795
Zm00001d027351	8.280765805	7.840733677	6.933895114	12.2474525	10.27547067	13.51648282	9.200604158	8.057576921	7.951663131	8.036034348	6.866322254	6.231544505	13.78700233	13.74985923	13.68640738
Zm00001d027352	5.192949319	5.389270559	5.037925219	9.780717609	11.60776595	12.07495573	12.89441781	9.328379259	8.854989596	1.169295224	3.02365842	0.983210231	12.4078354	9.686292082	12.52825026
Zm00001d027353	11.95999192	15.52298364	8.297759183	5.469582542	14.34208534	12.01767415	49.67278301	57.6390106	39.29101309	40.18592556	25.27019822	9.343518474	2.929954808	1.240364768	3.675770249
Zm00001d027354	6.986239758	6.003762609	6.904172001	8.851060323	12.37504064	10.36101531	8.329070852	9.080840435	9.058516308	0.311600505	1.435724302	0.387688084	4.119602994	3.297503587	4.758133316
Zm00001d027355	1.096278192	0.270738517	1.068594324	0.201063324	5.29652694	1.185080104	7.397153272	10.75632773	8.841118033	8.612176468	9.771967266	3.524162158	0.926091455	1.496332241	1.068631948
Zm00001d027359	26.09002588	29.4204913	21.46335391	14.29316118	16.62205728	15.46429253	13.77080315	15.42910375	15.66009487	9.333792649	15.40360969	13.07999061	12.68124819	12.86126314	13.29363002
Zm00001d027360	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027361	100.4223183	95.99421323	97.04766829	59.69392812	45.60927639	54.84590365	14.0967916	13.81380587	14.47941702	15.05687629	22.1214033	12.19149128	45.22668039	42.80125922	41.99020755
Zm00001d027362	50.33458906	51.33992613	46.80527448	16.92686162	16.62817507	17.79526465	13.64320394	14.88039186	15.13114884	40.66010808	36.02122921	39.2698259	16.72681672	16.89842912	17.02164377
Zm00001d027363	1.410160766	2.225894946	2.093958175	5.150453194	1.206554342	3.197255632	0.492191895	0.430603786	0.293617547	0	0.092377037	0.010143585	51.58265199	52.80041797	55.42091506
Zm00001d027365	6.30791224	6.017880498	4.870449571	7.560847328	9.378848	8.29939043	8.843042595	8.85875991	8.203186053	1.038090643	1.217417128	0.81567536	9.027151435	8.484497198	9.761578728
Zm00001d027366	116.2433588	113.1038281	97.43737579	87.82490555	80.65067948	89.42923045	86.89913035	105.3677127	87.60647765	44.68242253	74.80955087	30.98093934	121.1594286	117.5079856	122.4403143
Zm00001d027367	22.96103741	24.10778665	24.26715929	23.82885984	15.74444474	19.8753977	17.94746135	18.97882306	18.43093349	2.577238095	9.702807439	4.350899313	25.06079348	26.34204746	25.52508908
Zm00001d027368	0.018155689	0.160070104	0.135383663	0.317001831	0.669837951	0.155702424	0.403083535	0.56918234	0.335865	0	0.183159252	0	0.182851192	0.09951452	0.419809085
Zm00001d027369	59.09845735	55.18480061	59.99213793	28.54185948	18.3217855	26.25462251	17.16856103	14.60046523	16.35399271	7.422240636	14.63388749	10.48826385	26.58846851	24.82809264	22.27094887
Zm00001d027370	0.234148205	0.237831073	0.234677483	1.799216822	0.676763663	1.332527639	0.688418388	0.865203117	0.698636312	0.041668255	0.076198296	0.209176416	0.388802922	0.281521629	0.375497193
Zm00001d027371	5.939513838	5.419126767	7.293194193	11.64382165	18.90048248	11.04190301	13.32118443	15.81347428	15.77522776	6.513992619	9.717311271	8.055974778	5.958687383	5.333714528	6.627519874
Zm00001d027373	2.849696007	2.466426447	2.597181096	3.271518434	4.255544895	2.524454977	2.757815251	3.36560094	3.487431159	0.55425906	2.054778087	0.404713322	2.477531038	2.258846632	2.728635648
Zm00001d027374	21.79205985	22.46648631	20.74684712	19.42803449	18.7396212	21.68043653	19.39094361	18.39168174	19.21182496	23.72443236	25.45017199	28.84940384	21.36739592	18.99680783	19.16944563
Zm00001d027375	5.209135754	3.875652347	2.786248031	2.549301928	2.143127602	2.881281573	5.624580855	4.399372626	5.014756035	2.030992488	2.383646871	0.560000913	5.189700958	3.951526397	6.403640903
Zm00001d027376	5.823712801	5.77189599	5.683047554	4.423961456	4.406360943	4.324608315	4.555969081	4.354819659	4.710775912	1.537361563	2.764500843	1.377509513	4.357550317	3.81800375	3.356479751
Zm00001d027377	3.987443227	2.152371214	2.359812466	0	0.750577347	0.46525367	0.665618206	0.228949948	0	0	0	0.420677014	0	0	0
Zm00001d027378	2.734246784	2.705838098	1.699064976	0	0.514681609	1.196366581	0.228211956	0.470982749	2.167768671	0	0	0.432696358	0	0	0
Zm00001d027379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027380	0.03365641	0.008478075	0	0	0	0	0	0.008116394	0	0	0	0	0	0	0
Zm00001d027381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027382	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027383	0.407389507	0.435545665	0.482755814	1.022064931	0.705324243	1.033037256	1.018492723	0.776811465	0.94642707	0.222129628	0.358417143	0.440792547	1.012481982	0.877610482	0.980332765
Zm00001d027384	4.793621216	4.277381777	5.030600219	4.307696523	4.608417695	3.894528076	3.909096753	4.845783848	4.634830262	1.048603271	2.501971872	1.243314481	2.131100944	2.49252247	2.879872538
Zm00001d027385	21.15842615	19.97937647	20.50951049	13.04618718	17.40506916	15.7186396	15.35190137	18.11283745	15.73542077	15.17867298	18.43500251	14.34384676	11.45402685	12.48041431	11.84751078
Zm00001d027386	1.133278902	1.533889043	0.509772047	1.191877016	0.936074192	1.212278664	1.017883208	0.800510426	0.89699745	0.519048812	1.018501124	0.674540564	0.780779681	1.056916229	1.266224969
Zm00001d027387	13.36702311	17.30326373	14.77513557	2.746845349	7.912628482	3.473562784	11.57411418	15.63339936	10.62499286	82.36740362	124.4308517	100.1739246	12.48666677	11.8321037	8.018970075
Zm00001d027388	3.020728806	3.289154585	2.603699	1.130196578	1.232594589	1.325127346	0.38713076	0.469975659	0.853235946	0.309096483	0.319484304	0.269856959	0.152658372	0.245686667	0.292908848
Zm00001d027389	59.29439386	63.20219534	74.86301617	108.7683251	130.9282968	110.1849037	95.97143423	117.411849	103.5527129	55.26431953	78.27294838	42.47387234	118.9887202	115.76078	121.1173339
Zm00001d027391	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027392	5.64641389	5.259706231	5.403458696	8.985452283	8.237600419	8.204193445	9.103386889	8.323572095	10.96747186	11.09152389	9.75206401	14.14305424	6.143449034	6.081066593	5.360026322
Zm00001d027393	0.158599001	0.213073098	0.249669254	1.305465444	1.212069219	1.347184642	0.172968072	0.165736389	0.651988515	0	0.013333229	0.081988096	0.922882351	0.428859093	0.684551799
Zm00001d027394	16.2928176	20.08424993	14.00180329	10.83536945	9.249587086	14.46636611	7.01272557	7.367036031	6.012036726	2.211191008	7.841269627	1.848045457	13.50442505	11.85175351	15.95610505
Zm00001d027395	0.012856154	0.012953899	0.006391066	0.003206727	0.016939869	0.018900657	0.006008966	0.003100319	0.009513122	0.007092302	0.042151258	0.019938049	0.014386449	0.005637347	0.401313641
Zm00001d027396	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027397	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027399	9.11854197	8.733779633	6.655625073	5.743560597	7.177802234	6.238608408	6.488336085	6.933283109	6.166468468	6.787032889	7.74881305	4.955810063	5.830823579	5.712037664	6.29798479
Zm00001d027400	0	0	0	0	0	0	0	0.095654137	0	0	0	0	0	0	0
Zm00001d027401	2.120275124	2.406926019	2.276869744	5.874614491	3.85249404	6.051455394	6.041602594	4.406154139	5.173776009	0.530931793	1.620671746	0.870391373	4.831469789	5.667964804	4.882112926
Zm00001d027402	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027403	0.416556078	0.696671602	0.534670797	0.536543808	0.512882023	0.769690388	1.340545758	1.506815439	1.322220984	2.373342229	1.593094379	2.579535978	0.962845788	1.040548077	0.986876378
Zm00001d027404	3.963650129	5.140306683	3.590161865	6.451415633	4.226838525	7.983615809	5.966032472	4.556497728	4.57758413	7.528056244	6.057249717	8.911737635	3.83403458	3.608636109	4.155336342
Zm00001d027405	25.10860609	23.37664049	20.73462113	26.63392551	23.91755714	27.63372221	22.3588054	23.82618614	18.16706642	9.224985989	13.89169293	10.11038875	25.86897627	27.24506854	23.49472718
Zm00001d027406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027409	1.736691301	1.504909954	2.12383122	2.685748305	4.21055585	3.727703189	3.522906116	5.930362057	0.925267116	1.51375605	0.683287316	0.492499919	1.756845652	1.035679162	3.9353902
Zm00001d027411	0.138000342	0.127462091	0.171507232	1.296547239	2.242640256	1.08204353	2.569304193	2.751097082	2.7911602	7.016656577	4.9422492	1.824254832	3.675358182	3.025616426	4.403503497
Zm00001d027412	10.63678409	10.86750958	9.137963872	12.76437902	10.03427757	10.7576534	10.56718228	11.44956048	10.80514421	11.73456176	16.08086491	15.53043371	10.63134931	11.00649469	9.490233853
Zm00001d027414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027415	3.472306565	4.785226207	4.303781897	9.395070833	8.054943047	6.04342262	3.074883194	4.735039553	4.12869128	27.69391836	27.21071109	44.18086077	11.18989595	10.77758572	12.75986286
Zm00001d027416	0.963650876	1.225065039	1.376712727	5.155486151	5.328209152	4.94309038	2.304670153	2.790836515	2.676786523	1.155141206	1.430976902	0.359155079	6.077091895	6.693747814	6.559724376
Zm00001d027417	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027419	0	0	0	0	0	0	0.010941669	0	0	0	0	0	0	0.051324954	0
Zm00001d027421	11.55642229	10.49979091	15.78672148	43.37413477	22.04090605	34.88566743	7.333757481	10.39734373	8.379731189	4.741947248	9.617848603	3.869220922	114.4337628	144.4843568	149.5400184
Zm00001d027422	22.62824925	27.5472265	29.75676409	61.59412551	30.35547296	58.36358203	18.80160029	18.68331296	12.92836427	4.824934398	6.304596575	3.641795568	175.7250841	180.2098327	160.1521756
Zm00001d027423	80.46636192	74.59111135	73.63819905	15.81675334	6.745614285	1.306669883	4.316604877	4.477676421	7.449676259	36.73359605	113.37962	55.23936726	0.043400141	0.085031981	0.325084078
Zm00001d027424	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027425	1.153722443	1.025730132	1.246418322	2.510973723	2.563472109	1.431944557	2.220440657	1.773004558	2.362133172	11.87660189	9.480499165	9.748197862	2.02518033	2.455104991	2.266691196
Zm00001d027427	129.4587169	125.8595196	123.9461788	59.69092749	76.36449527	59.16420056	65.55142176	79.66469902	73.87048636	84.35526555	108.9584247	76.7841477	64.1933751	51.64545848	56.54273418
Zm00001d027428	0.029784823	0	0	0	0	0.072980968	0.006960713	0.007182743	0.036732948	0.575094546	0.052583465	0.455321004	0	0	0
Zm00001d027429	6.776457411	6.394456101	6.911224173	5.94274214	7.35577611	5.561080851	4.926936336	5.512091578	5.611297346	0.311528399	1.668373992	0.655342634	1.745310553	2.54694534	2.375224316
Zm00001d027430	10.66913027	11.80783504	10.73487392	7.957371526	8.189017792	8.969127995	7.437926284	6.867742401	7.441969863	12.34854911	11.64188984	10.12680936	9.362678765	9.930771373	9.907991165
Zm00001d027431	1.147340612	1.126036166	0.981476226	1.36587192	1.727759517	1.204842203	1.123026685	1.284615074	1.130153694	0.719259937	1.155587653	0.330122562	1.158854722	2.156151547	2.782167465
Zm00001d027434	69.46331219	42.08251455	52.01620468	8.642204693	38.03359399	17.31833619	31.49919042	36.54458339	29.96595786	110.8389147	72.66172859	75.30574822	1.758835437	1.798859864	3.245734366
Zm00001d027435	38.82146496	38.93010958	35.01577447	84.63523268	84.24745835	89.75163266	80.16823484	72.2629249	66.28384346	52.8871195	63.76613982	54.50901937	74.27242823	66.59482787	73.94882057
Zm00001d027436	18.70561183	13.2326995	19.48345913	17.92181199	25.79290734	21.04431689	21.20018885	21.5612614	24.51979221	5.689379411	6.627961237	3.008732362	7.363142396	4.808759988	6.451083729
Zm00001d027437	0.651011139	0.04555283	0.134846427	0	0.905458387	0.487408607	1.056536835	0.741361735	1.204315928	0.299283897	0.228040537	0.801289551	0	0	0
Zm00001d027439	3.63606853	3.963383906	4.769305195	7.729410348	8.55816192	6.770175516	7.99302368	9.879069738	9.276190616	6.576054797	6.533001315	5.398835956	5.056573284	6.425956332	4.836023903
Zm00001d027440	0.200511431	1.216807193	0.203887797	0	0.360277127	0.022332176	0.255597391	0.21979195	0.202325076	11.63974931	9.240567415	26.31082318	0.346767128	0.399650312	0.48471157
Zm00001d027441	0	0.149974695	0.064743902	0.00928153	0.215734806	0.291764958	0.521769307	0.161523752	0.137673568	0.256598877	0.234619823	0.032976315	0.049968045	0	0.051624863
Zm00001d027442	81.43904839	93.70730387	108.4848999	213.7675055	116.5403475	181.42272	66.27432355	65.98917925	61.68962279	26.83649194	33.68383557	9.894797379	394.4823226	453.1481031	400.5252143
Zm00001d027443	1.003981241	0.524640483	0.915902213	0.466215583	8.289188577	1.230014391	6.889148434	5.550605291	3.701389736	31.69977622	11.2732552	10.96783853	0.490031672	0.222461599	0.493931627
Zm00001d027444	18.84501269	18.58313834	22.48473609	10.42373528	12.38490904	9.163330026	10.38554514	10.4982231	9.700046143	5.628898149	4.771591217	2.054608852	4.457958902	3.332684087	4.165081385
Zm00001d027445	7.726495176	8.04950131	9.163775533	9.457548558	8.570295107	8.290922411	6.818005928	7.758307797	7.191863743	2.048545415	4.006536129	1.084639591	8.049906809	8.422593816	8.786568366
Zm00001d027446	8.33112157	9.968424524	7.502364828	12.42567326	11.20242314	11.57882062	11.80956977	10.2430514	9.272390468	6.451346932	10.50581158	5.121248847	20.30381952	17.38987902	20.49544862
Zm00001d027447	8.039521871	7.934147859	8.248050992	7.187651785	7.020693883	8.093623545	8.527268662	8.77893721	7.906182564	6.190392842	8.781529442	5.334524902	9.879527191	8.813206189	9.864011972
Zm00001d027448	2.382819947	2.351026376	1.937530235	3.264372724	4.067201734	3.717770749	5.404149646	5.048424931	4.070422485	1.87685931	3.537394029	1.137849499	5.274557197	4.201129567	5.630293086
Zm00001d027449	6.807544611	6.682515966	5.669364652	13.32153931	30.12789729	10.23175936	26.55365608	30.80246523	30.24143632	71.50918582	38.07284262	100.382001	11.10479946	9.939967975	19.48950749
Zm00001d027450	2.198354672	3.195033612	2.437453038	2.167516125	2.068605829	2.134886854	1.422914421	1.570999876	1.612513935	0.660349584	1.178546055	1.463692511	1.707852918	1.461088971	2.062553351
Zm00001d027451	1.163749664	1.323441474	1.670981257	7.003251598	2.828622068	5.467691895	1.26742508	1.498581475	1.86718734	0.14024295	0.07123911	0	9.065338981	12.07621036	13.74191264
Zm00001d027453	0	0.023143776	0	0	0	0.090049098	0.193243995	0.288033805	0.022661859	0.152055528	0	0	0	0.12086199	0
Zm00001d027454	1.478648582	1.688753216	1.790948416	8.329734692	18.98802455	13.67871378	60.6194546	91.65384739	70.62523656	66.0007403	96.39154348	59.30042107	9.156693844	8.434416529	14.21219215
Zm00001d027455	8.478344954	11.21782537	9.308089445	29.66302335	33.83240215	42.8743445	72.15058761	90.78621634	57.71526345	33.66176879	30.87663673	35.66172002	54.62523172	65.18783634	75.24862693
Zm00001d027456	185.1549992	219.5674568	216.4742118	331.9005127	75.93236705	175.975424	38.9588473	49.70800098	26.80426343	1.659050566	1.619440311	0.73831067	686.7975572	737.885871	633.0218337
Zm00001d027457	1.05724209	1.60710384	0.453083994	23.00636257	38.86189272	26.5306253	23.00376521	31.8698327	32.10224538	92.01184117	114.0129711	82.10269153	13.25874311	15.86611739	20.44218361
Zm00001d027458	4.191467133	4.588436055	5.598638172	7.254871714	9.49727669	7.486718089	5.721646471	8.690913769	6.763493465	1.458687416	3.778938798	0.715994689	5.808188657	4.186880955	6.951839979
Zm00001d027459	0	0	0	0	0	0	0	0	0	0.062692886	0	0	0	0	0
Zm00001d027460	8.604273097	7.335120547	8.406213079	8.425724979	7.159353157	8.64786193	6.777203554	6.50345935	6.877794928	7.790276113	7.424393896	6.927932648	7.66710535	7.388639946	9.302954656
Zm00001d027461	0.713695506	0.669182698	0.571611187	0.336256251	0.417954903	0.485763693	0.111193761	0.305974872	0.12713776	0.524962009	0.559995601	0.606126278	1.260089364	1.008398409	1.439392398
Zm00001d027462	4.050580514	5.080574115	3.448209852	2.889681847	2.510988877	3.471189497	2.476909014	1.452570377	1.822188792	0.028945173	0.201140575	0.260388351	0.892454545	1.0629324	0.868664526
Zm00001d027463	0.603537142	0.686956934	0.277806569	0.105936307	0.282755103	0.20265464	0.44403569	0.371950078	0.424543025	0.653570262	1.505246515	1.188570766	0.040022367	0.053909664	0.062024115
Zm00001d027464	0	0.09601656	0.1421151	0	0	0.093396648	0	0.015320071	0	0	0	0	0	0	0
Zm00001d027465	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027466	8.722931393	7.718080039	7.425163159	7.164307795	9.69857321	8.540756766	8.759282899	7.893735897	8.539316909	9.102078023	9.385983218	8.702460824	5.273313739	5.010714923	5.905018659
Zm00001d027467	0.022541194	0	0	0	0	0	0	0	0	0	0.014212584	0	0	0	0
Zm00001d027468	30.38051982	29.52510105	34.27538669	66.74413237	100.2379074	60.78691171	70.09840512	86.15881243	76.29082521	43.97367765	68.57442505	50.68418138	47.14276719	46.89364213	58.34295008
Zm00001d027469	10.8462359	11.20892247	9.677757677	10.18628993	8.968354597	9.28913324	8.688669346	9.301152902	9.062026063	4.521942558	8.601474191	3.923916647	8.926883952	8.761070811	10.27208557
Zm00001d027470	0	0	0.538135682	0.02634248	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027471	2.574227252	3.665785749	2.190482411	3.470772496	2.322397084	2.883862446	2.235664204	1.957434666	1.887680946	0.703659848	0.745744778	0.218366694	5.891044601	7.220145585	4.155896303
Zm00001d027472	1.297615318	1.830275046	1.270077376	5.942879321	4.628650395	8.727979269	4.530383689	4.575173776	4.009298338	11.94079382	4.325485251	1.670832399	11.32793378	14.00042447	11.96533894
Zm00001d027474	0	0.021577656	0.010645771	0	0.022573755	0	0	0	0	0	0	0	0	0	0.019806782
Zm00001d027475	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027476	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027477	0.09279118	0.019478473	0.038440384	0.655775765	0.468686307	0.492621533	0.162639743	0.111885042	0.11443726	0.021329056	0	0	0.640323915	0.322116343	0.33971768
Zm00001d027478	5.376796268	6.325871495	9.220535539	28.69418835	22.1603385	27.85564506	20.16336127	22.59065885	19.22499451	3.995166284	8.882735104	2.470194907	42.98052924	43.72698345	39.49043595
Zm00001d027479	4.167046452	5.058250628	4.709721799	4.74505004	5.958199857	4.106358182	3.740105393	3.813893991	3.649522813	0.707969195	1.323214344	0.535195936	2.204815838	1.713023493	2.565935256
Zm00001d027480	25.86289707	27.97150816	18.82333528	13.61799283	11.61282874	11.35339801	16.56265562	12.84498407	15.46147015	33.16609727	23.67060772	42.86534876	15.09986728	14.43001465	13.19431787
Zm00001d027481	4.338355219	4.725989357	3.404463838	8.445634012	3.727004758	10.27113602	6.364625159	3.502742161	3.818343698	0.746815129	0.570377626	0.472820577	84.83352375	81.6806276	70.6474135
Zm00001d027483	3.568505503	4.099754693	4.794539614	0.781842005	5.559832201	2.215493669	19.29940619	19.36262414	13.3218157	8.7789943	12.55743223	8.01289551	4.371014213	3.674033953	5.101346752
Zm00001d027484	11.25521095	9.732639689	14.07715651	13.49212108	19.63351382	13.84110252	14.94997858	15.86323367	16.40604002	1.537889539	5.912455346	1.119665032	6.118690179	5.52223705	6.709836748
Zm00001d027485	0.246822679	0.431769551	0.477169702	1.641741534	2.13203114	1.663153542	0.865236906	0.644825931	0.710268571	0.075646481	0.103750439	0.015189942	0.767229175	0.841791028	2.045085012
Zm00001d027486	26.01899102	21.15574755	21.04145863	42.78345925	16.12156658	36.66352251	12.56105871	6.85859534	5.825614742	0.718466285	3.497686223	0.631665383	38.56148352	34.58868496	28.25024392
Zm00001d027487	6.562014329	7.323525354	7.079898149	11.79308041	10.07967002	11.44315097	12.5828483	12.35927397	12.57810599	2.426653827	4.476866884	1.988530527	10.61140865	11.59496359	11.557325
Zm00001d027488	232.3319522	254.0408795	390.1956733	1247.699715	437.4726066	1122.596719	759.2706528	606.6223161	635.8585588	26.15706657	19.86706412	5.881077923	2662.807847	2880.789914	2773.060375
Zm00001d027489	0.083079747	0.058132916	0.011472417	0.09210085	0.048653224	0.101784058	0.129438247	0.144697604	0.170767282	0.483785043	0.023281384	0.224967046	0.06197927	0.060716624	0.181430658
Zm00001d027490	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027493	70.948269	72.71986903	85.99243225	114.5020583	146.4796452	109.7657192	119.4937345	150.8297049	130.7069489	46.87774281	81.71801254	34.13272949	143.2075253	138.5484969	175.9423729
Zm00001d027494	0	0	0	0	0	0	0	0	0	0.352427766	0	0	0	0	0
Zm00001d027495	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027497	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027498	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027499	0.23611803	0.18834797	0.332574607	8.549624623	3.982337842	11.96642083	4.570808269	1.898030653	2.310178856	0.217097127	0.416853375	0.653902095	1.277081009	1.199296057	1.019142747
Zm00001d027500	0	0.100991025	0	0.650006477	0.158479674	0.540294585	0.140541088	0	0.024722028	0.221171677	0.176948757	0	0.112159456	0.659247215	0.695270326
Zm00001d027501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027502	32.48985769	35.08748063	32.23990908	28.28750605	34.4763414	30.43454402	29.83485562	32.4994858	27.31268522	5.448458012	9.889915197	4.839731857	25.79520594	22.49633028	27.61798479
Zm00001d027503	13.91723874	15.74982187	14.85737165	13.4822512	13.11886585	13.19341262	13.44909443	12.12499666	13.26403273	8.093190838	12.14737729	6.840381763	9.127784128	9.566033423	9.705267136
Zm00001d027504	0.028727785	0	0	0.250796335	0.130382803	0.344133464	0.220059626	0.165498258	0.12597094	0	0.060377765	0.003535926	0.232175049	0.1924536	0.424391405
Zm00001d027505	4.013120956	4.160371333	4.148095884	8.565051082	6.008949551	8.764151002	6.838128906	4.797298144	6.128851922	0.394368322	1.834028147	0.666286854	4.225996792	3.194103873	3.739131885
Zm00001d027506	4.036801686	4.168668383	3.462579422	6.695790033	10.32329959	8.471111827	9.778572561	10.36021927	9.662295216	6.380790551	10.62986072	8.222679015	4.517310709	4.598059326	4.702361344
Zm00001d027508	0.664881687	0.91717532	0.464311411	1.010848423	1.835594438	1.605868621	1.354050561	1.840083136	1.171405025	0.113531038	0.175672543	0.049101717	1.686454303	1.291135214	1.822902828
Zm00001d027509	2.482360231	2.275938587	2.325155674	2.458502467	2.453155335	3.119497908	2.81532507	3.301280953	2.419887145	1.686618595	2.278700392	1.324374365	1.593173405	1.750804521	1.23449934
Zm00001d027510	6.42854619	6.538680687	5.532145048	23.90276459	22.86213321	27.05164033	40.65573353	36.42375871	36.57220909	13.23584769	25.81757498	17.77189577	12.58906182	11.86123799	13.55249573
Zm00001d027511	5.440962732	5.374654563	4.294933722	89.95839501	30.79634368	71.93161994	68.51317192	67.41392987	43.05796418	0.829335186	0.237539205	0.088281981	226.1866663	220.6495423	246.041295
Zm00001d027512	0.628435753	0.30549785	0.479574792	3.148781374	6.101467467	2.660950831	3.401094318	2.884769339	1.971581721	0.243288845	0.347577915	0.097705629	0.937653049	0.942723518	2.192419093
Zm00001d027513	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027514	9.147241343	9.810272771	7.758435789	9.420919242	10.02911298	10.26580357	13.12414958	13.34751074	14.30913239	12.82449223	12.06197633	12.38979807	6.500568329	7.307324199	7.20532434
Zm00001d027515	0.387862621	0.351265121	0.162974349	1.200099772	1.708420311	1.090662211	1.402815998	1.398568067	1.414526166	0.2139706	0.204959211	0.042965661	0.51877006	0.526424013	0.792212413
Zm00001d027516	17.91598879	18.22028052	16.24962453	25.5664022	25.53365928	27.27169178	29.06325476	27.25146292	26.40240693	36.80912224	33.29818081	33.10374262	22.0661325	18.48849574	18.53038611
Zm00001d027517	19.15651137	19.21760012	17.11390782	43.91941082	33.52467124	37.32102936	26.94862282	30.70586752	30.88882181	21.64313585	27.42793187	22.66585217	38.80982541	40.41943271	42.13413184
Zm00001d027518	14.49222186	16.42470914	17.62650523	37.08300657	12.98126461	24.53332409	6.673561127	10.60223569	5.590793003	1.591752735	1.380389505	0.14498529	60.42194843	62.89535915	61.72382833
Zm00001d027519	13.66477609	11.3871316	11.59730227	3.914209997	23.34058003	7.009792665	11.72645093	16.02498225	14.84545511	13.2616554	23.9257072	6.581399487	6.872423622	6.307659919	9.384934233
Zm00001d027520	112.504899	128.8520655	88.91021318	37.47031717	44.69423598	35.73091161	53.74170121	47.33160142	48.53184065	13.06745639	25.87740654	10.10140475	20.07250985	17.32141195	18.20332289
Zm00001d027522	0.012693811	0	0	0	0	0	0	0	0	0	0	0	0	0.027830802	0
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Zm00001d027884	11.0210282	14.02250851	13.52116528	22.18701352	20.58491495	19.99089965	38.53698493	31.53405802	33.77215586	15.28588403	17.09821018	16.48552054	41.2818748	45.05643752	39.65402151
Zm00001d027885	5.648593656	8.086582012	9.098500212	27.75575132	11.80377583	19.31379822	7.024008718	6.684006681	4.860532548	7.59679304	6.872349781	8.80938692	61.74384747	71.26783846	76.31138008
Zm00001d027886	0.909914086	0.890734183	0.92370913	0.578638385	0.667729436	0.68983246	0.894801411	0.955932038	0.880519619	0.15220583	0.320939818	0.109777989	0.516672603	0.424669607	0.447874741
Zm00001d027887	0.883732411	1.153295479	0.502838544	3.505642407	4.798083228	4.382950465	5.772838274	6.560378871	4.911057788	18.89893896	10.74134865	10.82751867	7.422894463	7.213314626	9.934026744
Zm00001d027888	0.08893174	0.142557999	0.020095387	1.11920098	1.384861811	0.832008929	1.993312002	4.016304698	2.54252387	39.29309075	23.62197885	56.90558425	1.320868281	1.090116537	2.187202853
Zm00001d027889	0	0	0	0	0	0	0	0	0	0.114503353	0	0	0	0	0
Zm00001d027890	0	0	0	0	0	0	0	0	0	0.707398301	0.049754299	0.568187136	0	0	0.02280781
Zm00001d027892	0.69858503	0.35951695	0.690828616	1.536388935	6.869019941	3.110553111	4.818783233	5.823882842	3.890866845	23.10241463	16.87043891	28.58292285	1.042318774	1.045788248	3.47380485
Zm00001d027893	9.583877538	8.271185052	8.69851602	5.854927358	11.82800475	6.066314372	8.63332589	9.429712989	8.507024358	5.288172609	8.173227371	4.890010943	3.38031737	3.166363875	3.627415868
Zm00001d027894	17.21173296	24.59222084	9.976561011	24.04511138	43.69514894	51.19221924	66.35701501	82.16837503	60.69752278	86.24901463	59.98588778	45.70493961	35.10821031	30.81918752	41.74355495
Zm00001d027895	15.32455245	17.32189099	14.97132733	14.56872314	13.15607467	15.12171438	19.73871638	17.89819557	18.09319788	7.097446469	10.07216442	6.871174852	20.15351069	19.37420716	18.69497566
Zm00001d027896	58.13847038	53.2168158	60.6068909	63.65594785	89.59853628	57.6298536	74.90640008	89.28569314	77.369955	67.81517611	95.88548375	67.13389523	49.82689677	48.42017663	55.14135656
Zm00001d027897	0	0	0	0	0	0	0	0	0	0.060529327	0	0	0	0	0
Zm00001d027898	1.244467266	1.150186582	1.290710787	2.41181185	1.804924701	2.237605079	1.025235115	0.76646505	0.839156613	0.259300979	0.395150793	0.119012751	0.330616989	0.844055178	0.631404411
Zm00001d027899	0.220949235	0	0.034324545	0	0.618657692	0.067673261	3.0336054	0.432923537	0.136245842	152.6293457	27.44447129	69.60292418	0.309061611	0.030276539	1.021789871
Zm00001d027900	4.259379412	0.735483631	2.71793476	0.785393085	30.95848676	6.130126251	47.13513448	39.80277581	30.02115518	560.5617462	260.4750059	585.0243198	1.101905593	1.69449724	7.505775078
Zm00001d027901	11.01711158	3.784388948	4.138748018	13.61515398	43.91289886	14.29504684	58.36959654	55.55181145	44.34353007	583.085607	200.6265559	425.2351191	1.961352531	2.964439127	5.992313367
Zm00001d027902	0	0	0.150359732	0.339494533	0.159414658	0.037055602	0.03534256	0	0	0	0	0	0	0	0.069937222
Zm00001d027903	0.109545144	0.179364268	0.14975733	2.869018971	2.396073839	2.737838907	1.024028009	0.686849843	1.040266483	0.060432325	0.331535857	0.060674569	0.649698026	0.468340209	0.89920886
Zm00001d027904	20.7206495	26.56897499	27.22046755	31.97462354	21.26135867	39.50088547	38.83370441	29.8179956	19.05769793	0.016381308	0.044934486	0.006578789	66.06554432	55.68325019	58.30023904
Zm00001d027907	1.945126399	1.802564209	1.395414844	5.54204481	6.751289128	6.180420071	5.40502002	5.825312952	5.431611109	16.80473021	6.112224978	22.67714311	2.645613866	2.323010778	2.961875714
Zm00001d027908	0.029687804	0	0.101464249	0.10181969	0.293385282	0.027278717	0.867254992	0.116339387	0.338672992	0.276374543	0.430528649	0.172655713	0	0	0
Zm00001d027909	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027910	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027911	0	0.01721897	0	0	0	0	0	0	0	1.960908091	0	0	0	0.014986887	0
Zm00001d027912	0	0	0	0.025222145	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027914	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027916	5.268055596	4.847481974	4.753860554	7.970488168	8.901493005	10.00576633	14.91107406	11.52104607	12.72863252	9.165117048	9.45198486	8.198479153	14.68202788	15.45280028	15.29320753
Zm00001d027918	0.258282249	0.408228954	0.36505193	0.877930585	0.590563543	0.921372892	0.49708698	0.528209029	0.546503801	0.03143063	0.415110649	0.095371118	0.334363562	0.421931242	0.450841833
Zm00001d027919	0	0	0	0.00956263	0	0	0.008959527	0	0.00945621	0.031724429	0	0	0	0	0.035458917
Zm00001d027920	0.101240624	0.009445403	0	0.074822468	0.079051481	0.027563026	0.052577631	0.022606139	0.023121809	0	0.033099027	0.016614781	0.050351782	0.049326012	0.034680882
Zm00001d027921	1.408315221	1.556437816	1.854028557	6.477120726	9.146286174	6.690105303	10.24444959	11.63170141	9.102980819	8.329621642	8.7392636	9.600890882	9.318660594	11.00828323	12.38851312
Zm00001d027922	8.583577658	7.573673612	9.656609047	7.271504104	11.65191224	7.742591483	8.121747633	8.658039932	8.557446255	5.496292621	7.1293791	4.251395648	5.363398423	5.215359019	4.696077842
Zm00001d027924	0.071204343	0.012811733	0.025283705	0	0	0.049848608	0	0.049060703	0.05017983	0.561157306	0.064136401	0.135217612	0	0	0
Zm00001d027925	6.263874017	4.34616482	8.048864429	7.042187118	12.18702049	2.777058178	13.52717503	16.92365475	14.37691139	91.76230353	46.58974506	122.6122476	1.472103232	1.641790697	2.959933718
Zm00001d027927	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027928	85.51222786	60.98385106	74.62559893	1.149214882	3.708735127	0.533673328	3.269360013	3.131227224	5.909412961	49.95620395	30.99372713	31.88484311	0.393712677	0.312226806	0.755424842
Zm00001d027929	496.2613381	458.5181674	471.181526	72.71777124	76.43664554	49.17443354	89.46602495	121.5836086	91.47832107	177.1253737	125.6207722	141.561241	135.7434837	129.8538066	117.3336994
Zm00001d027930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027931	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027932	0	0	0.07387239	0	0	0	0.121547672	0.035835644	0	0.040988881	0.299823732	0.065845098	0.016628858	0.016290094	0.085901153
Zm00001d027933	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027934	10.18979183	12.22999911	10.10184192	10.6881662	5.784723521	8.953144336	6.880069029	7.145182977	7.069495716	5.227958708	8.8520431	7.174876592	24.81100389	24.92356846	24.34712796
Zm00001d027935	0.126585499	0.09110566	0.179795236	0.022553135	0.119139261	0.06646481	0	0.021804757	0.022302147	0.074820974	0	0	0.040472354	0	0.020907159
Zm00001d027936	61.15873846	62.0892192	59.21075457	55.72346819	33.89356663	47.22481768	18.70730018	17.93373479	22.09523994	22.61246657	38.03181494	40.74992881	44.64024426	48.96159983	45.62349057
Zm00001d027937	2.344358128	2.665594182	2.05467285	3.031240812	2.273019424	2.641243132	0.616675691	0.61470175	0.754911271	0.923433861	1.534746348	1.580852961	0.85773119	0.794997666	0.979561882
Zm00001d027938	7.899074578	8.305248815	5.013762182	10.07047666	7.076576879	7.717360562	10.60101617	12.00584525	13.20049639	5.295635575	12.86462589	9.375749666	9.864370074	13.28117403	11.56239763
Zm00001d027939	0	0	0.071389285	0	0	0	0	0.011543695	0	0	0	0	0	0.010495019	0.011068496
Zm00001d027940	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027941	5.151355227	4.221076588	4.97469181	9.855960273	10.27749797	9.335409698	9.665026743	7.606592866	7.68497023	2.080539088	2.334677586	0.446260507	5.783715045	5.045741791	4.885432821
Zm00001d027943	12.92680235	16.77131175	11.68998441	8.694365033	8.075812766	9.15459218	9.725519976	8.442980421	8.093693331	17.07168035	15.48235126	27.47688303	7.397169805	6.758671729	6.707358939
Zm00001d027944	17.17946061	17.99336782	16.22652001	34.41608366	41.50811869	34.65032098	29.28720107	34.84400154	28.45753934	5.736274685	13.40878356	5.528897902	30.27332066	29.14116858	34.53862637
Zm00001d027945	0.019756118	0	0	0.147833843	0.208252674	0.072611845	0.346275367	0.381142109	0.219282958	0.108987777	0	0	0.287400501	0.151601455	0.137044613
Zm00001d027946	1.363114233	0.070693717	1.096170952	0.330003288	31.19936525	7.966889244	19.03863266	29.9426247	18.57118732	24.8044036	9.504676074	17.36495499	0.107673077	0.06152974	0.018540542
Zm00001d027947	0.663317588	0	0.471070315	0.053718242	7.185110937	1.846942737	8.455490256	7.530678805	3.049112413	9.825450722	2.628889243	7.262046304	0	0	0.009959554
Zm00001d027948	1.302788174	0	0.829543488	0.010029512	11.10501261	1.753732659	15.26066777	7.340404672	3.629949892	104.0235123	13.9845725	120.112691	0	0	0.046487683
Zm00001d027949	0.327351537	0	0.117767579	0	5.334916494	0.759885012	2.617175555	3.001884379	1.370506973	1.6870786	0.619201185	1.250102583	0	0	0
Zm00001d027950	0.801402304	0.889981416	0.6372163	4.030137855	3.201958705	4.143734235	3.353054336	3.065172951	3.544249019	2.994914051	3.520779152	4.534243268	2.569847783	3.032329423	3.347464768
Zm00001d027951	0	0	0	0.01516919	0	0	0	0	0.015000376	0	0	0	0.013610809	0	0
Zm00001d027954	0.003391524	0.093976019	0.075869932	0.135352378	0.06703246	0.116342272	0.324965673	0.408940616	0.472643959	0.233873549	0.059875491	0.142765109	0.318798854	0.189613302	0.345053699
Zm00001d027955	5.599183902	4.098986229	0.175161338	0	0	0.062789624	0.059886924	0	0.363439296	0	0	0	0	0	0
Zm00001d027956	0	0	0	0	0	0	0	0.003802629	0	0	0	0	0	0	0
Zm00001d027957	26.77092796	25.8644474	13.25441156	9.601412557	12.83261337	10.9933685	12.64229362	13.14203328	12.87087474	7.220349124	10.27040428	5.191632718	8.135349195	6.328075069	5.834670592
Zm00001d027958	0.09842501	0.061983332	0.012232289	0	0	0	0.011500963	0	0	0	0	0	0	0	0
Zm00001d027960	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027962	13.8572371	12.91197467	13.50538827	14.29323504	15.63840275	13.73411306	17.01976349	16.82943853	15.06056622	12.48112514	13.72152487	9.937751509	9.718701931	10.30495506	9.792821292
Zm00001d027963	0.586554591	0.722531025	0.544726159	1.495205846	0.866295778	0.955513903	0.655262053	0.520723502	0.707485925	0.071116966	0.06502542	0.049981427	1.146850264	0.819650569	1.266849624
Zm00001d027965	0	0	0	0.013155995	0.013899581	0	0.012326263	0	0	0.116388182	0	0.04674189	0.047217746	0	0.134154269
Zm00001d027966	19.71135684	18.92136013	16.69318215	16.03172514	23.67217372	13.64424667	12.86541966	15.55067656	13.73490689	11.26244447	20.00960595	7.611177948	27.83989433	25.66755158	28.43743943
Zm00001d027967	16.48896916	15.65808982	15.36940455	10.39604824	14.00886728	10.03669368	9.008710531	8.682620912	8.446299687	0.737643421	1.809527771	0.534677274	2.992559826	3.532214709	3.664897264
Zm00001d027968	0.263753709	0.073821949	0.072843086	0.018274566	0	0.01795191	0.068488047	0	0.018071193	0	0	0	0	0	0.016940849
Zm00001d027969	9.593666801	10.07264106	8.710762716	5.940454724	5.233018446	6.105001607	5.127426848	4.916617799	5.590359782	4.817202007	4.704747298	3.969522319	5.15645668	4.416083003	4.32835164
Zm00001d027971	6.066715671	6.848211996	6.389870443	11.1489986	10.14810262	11.08672467	13.55590305	12.00671258	12.18681378	7.061842153	7.660978142	4.431928545	7.904565876	8.317814744	9.495209723
Zm00001d027973	0.26053505	0.276332513	0.0681671	0.35913096	0.596245997	0.201594369	0.945351434	1.074709884	0.591890476	0.586260231	0.570627413	0.531647982	0.583094173	1.112366716	1.52192373
Zm00001d027974	0	0	0	0	0.008107046	0	0	0	0.030351797	7.348483722	0	0	0	0	0
Zm00001d027975	0.021752162	0	0	0.04069253	0.114646659	0.246506718	0.177921812	0.216382289	0.228024814	0.142499135	0.294874374	0.222888537	0.012170684	0.053652339	0.056584053
Zm00001d027976	3.715076185	3.709178694	3.016816586	8.498191931	10.09880003	7.751851601	15.81645641	15.42951373	12.89415855	33.9965736	16.82809675	43.8633989	11.55492085	11.1979532	12.52925797
Zm00001d027977	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027978	1.620816393	0.059171717	0.364919454	0	14.50084483	1.093585947	4.117226018	4.871677235	5.258018511	1.76562072	5.376349521	0.806659017	0	0	0
Zm00001d027979	1.222985782	0	0.379982582	0	9.227545149	0.838348467	3.045256458	3.774382522	2.352199587	0.421674755	3.176247681	0.080640961	0	0	0
Zm00001d027980	0.043068694	0.046495868	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d027983	0.050215735	0	0.124816527	0	0.264666392	0.061521147	0.102684902	0.272469359	0.340614606	0.779127499	0.284956439	0.264226885	0	0	0.101598425
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Zm00001d027988	4.384461384	2.435005818	1.930755654	9.687596526	45.71698387	12.01200385	65.3516057	26.10029402	24.65198211	107.1776445	35.08921932	100.7712666	6.335763026	9.537109718	6.146704693
Zm00001d027989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d027992	42.72900639	33.9542605	31.65860769	19.38099835	70.09886415	25.06096737	55.79226762	71.12368708	50.01294012	52.08044212	86.39302924	49.09158956	15.12665593	11.14193637	18.58810858
Zm00001d027993	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d027996	1.771930213	1.188453652	2.264823176	4.940776311	48.52731687	11.48083293	46.35059382	52.84907852	52.60665173	152.5378117	71.38466582	66.3942696	6.077506063	4.342880761	7.961199335
Zm00001d027997	0	0	0.08192213	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d027998	6.168727501	4.899706829	5.318211509	6.723034467	6.71248034	8.714995583	6.450543917	7.505090964	6.054216929	2.912543286	3.620838767	0.841354029	3.606975143	3.39134157	3.426734324
Zm00001d027999	9.288705192	13.78938117	11.4038598	31.6990489	6.114308336	16.04837292	2.842899681	5.138624398	1.480378919	0.066664298	0.040636098	0.008924203	112.1022193	110.3218554	101.4850491
Zm00001d028000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028001	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028002	0.563144605	0.694191592	0.699877773	3.108181715	5.336269448	3.963423029	3.122163575	2.976148661	2.689392625	1.503763873	1.888679292	0.517642882	1.233537753	1.405431093	1.496080371
Zm00001d028003	0.141524161	0	0	0.035300559	0.037295769	0.104031877	0.396890359	0.238904293	0.104723124	0	0	0.125419234	0.095022048	0	0.065448497
Zm00001d028004	8.601214706	2.917432072	6.119854889	2.397259273	18.56878555	4.40557741	9.507930206	13.05991265	12.25909903	22.58565074	15.36744643	7.069766316	0.870059701	0.876010755	1.017514758
Zm00001d028005	37.70982023	45.18875769	45.46087954	12.03348529	11.51270177	12.87321117	10.96733998	9.404559385	9.435352099	5.064228858	6.652819537	3.698721749	15.26912946	12.35457455	17.65995541
Zm00001d028006	12.4863338	11.19854859	13.68846175	12.61690181	27.81916618	14.69260705	22.37316297	27.77344761	22.4289015	8.808437967	14.84575338	6.095535359	5.087797404	3.941069024	5.624918018
Zm00001d028007	0.441238985	0.542187448	0.646456105	0.867943573	1.607113921	1.26134897	2.833636782	2.2103192	1.371485471	3.596825439	2.135191835	1.116654074	0.445588828	0.306737644	0.667734385
Zm00001d028008	0.024632854	0.031025171	0	0	0	0	0	0	0	0.826670655	0.289919645	1.1824435	0.009188318	0	0
Zm00001d028009	14.20972089	13.53261012	10.55026445	5.562242632	6.953448713	7.319013718	7.905989741	10.22063121	10.03187355	57.03646545	63.59896289	84.76076517	5.756451526	4.097434269	4.021033747
Zm00001d028010	15.54627205	14.18359667	14.61237002	8.631691491	11.16873626	7.236111544	8.538386025	9.641942124	10.16114238	4.464630004	9.82651418	2.718533993	4.400107288	3.37945529	4.469493449
Zm00001d028011	2.90174594	2.793068426	2.594775675	0.559021963	0.388564632	0.737019619	0.689164666	0.568917903	0.465516424	0.195218832	0.416493709	0.13066758	7.22028189	3.168064919	3.504826317
Zm00001d028012	9.989976688	9.13153995	10.983678	7.39483216	54.43035726	13.94326519	36.67809429	45.94623079	38.17421568	92.93733894	95.05845167	90.6950243	6.147721429	4.882675317	5.750521554
Zm00001d028013	0	0.006564609	0.025910255	0.052002043	0.103014809	0.18517912	0.182708772	0.144544839	0.167125809	0.028753161	0.302338456	0.121247359	0.239130972	0.159982016	0.072310234
Zm00001d028014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028015	0.165111521	0	0	0	0.087023461	0	0.115759688	0	0.101814149	0.045543202	0	0.018290305	0	0	0
Zm00001d028016	0	0	0	0	0	0	0	0	0	0.023292014	0	0	0	0	0
Zm00001d028017	0	0	0	0.018881694	0.0199489	0	0.159217644	0.146041163	0.074686259	0.313204078	0.267284722	0.872101186	0	0	0
Zm00001d028018	5.345091964	4.208693408	4.178734854	6.156045111	5.645316031	5.868991027	4.852397227	3.694778464	4.445953325	1.176040018	3.444475986	1.098197398	4.67024693	3.24513216	4.73693455
Zm00001d028019	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028020	25.03708928	24.289458	25.13310001	10.97919598	10.26331926	11.07609482	10.70271159	9.773451699	10.76990442	10.68014902	11.57162227	11.54527593	7.881645901	7.464020861	7.535442952
Zm00001d028021	0.029752413	0	0	0	0	0	0	0	0	0.389818089	0	0	0	0	0
Zm00001d028022	7.255381607	8.187498838	6.659058412	6.724010659	5.784731329	7.004754416	6.596932666	6.32443596	7.117789839	6.738187245	7.174373692	10.52000637	4.751887564	4.179441643	4.18816917
Zm00001d028024	14.00417112	13.72013797	12.67186968	14.59774819	19.63153901	14.28902369	20.14482863	20.00959816	17.66879944	17.29081964	16.91186107	17.6569092	13.7500664	15.31764752	20.06399888
Zm00001d028025	0	0.015387819	0	0.167606674	0.354159821	0.179615358	0.042827981	0	0.045202206	0	0	0.013533845	0.328119029	0.227682818	0.508497975
Zm00001d028026	0.378376337	0.349000644	0.503497029	1.060571093	1.125551269	1.477313723	1.112030864	1.050724724	0.940356273	0.268828392	0.607275073	0.198989519	1.274522735	1.522989465	1.508997714
Zm00001d028028	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028032	0.213100769	0.103231233	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028033	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028034	36.50722675	34.94427557	36.42700275	28.47304743	26.6299842	28.69360885	27.54780643	24.48083684	23.59696461	21.97604173	25.54250962	19.82502065	22.41459324	23.55434403	23.27156373
Zm00001d028035	0.009906691	0.162207686	0.492482602	0.012355196	0.104428153	0	1.423844163	0.095561717	0.134394676	0	0.049970622	0	0.221718112	0.456122639	0.515406915
Zm00001d028036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028038	6.412697315	6.401003861	6.567119405	9.254028598	6.189328114	8.67438543	4.650304464	4.386098474	5.312469046	0.891298028	1.815668741	0.571138136	6.870255916	8.162826367	8.776428495
Zm00001d028039	0	0.070517002	0	0.019043377	0.006706573	0.081064303	0.107054008	0.061371542	0.037662896	0.014039379	0.083439404	0.14659482	0.011391325	0.01115926	0.082383235
Zm00001d028040	10.27763088	9.841153369	9.16917501	8.138678827	8.694364794	8.161050219	7.466991775	7.045561701	6.728646146	8.058727614	9.694371442	7.432755066	5.850720157	4.452548846	5.613749825
Zm00001d028041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028042	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028045	9.880032893	10.66266526	7.3892626	7.942642788	8.713760345	9.769877269	7.621896907	8.274072549	7.123433627	9.916588177	9.089403304	9.158367716	13.028172	14.71400268	15.63007874
Zm00001d028046	0.19048879	0.009227744	0.091053857	0.118784678	0.308919294	0.125663371	0.10273207	0.070672653	0.144569543	0.01010444	0.036955765	0.016231911	0.024595739	0.040157789	0.033881698
Zm00001d028047	0.567252871	0.614765403	0.732308481	1.261350619	1.153025864	1.190594468	1.10986323	0.933179072	1.155120649	0.297166095	0.648782295	0.165618741	0.644615637	0.578458155	0.518556716
Zm00001d028050	7.760129821	7.656109948	7.173989479	7.170295451	7.301474311	6.647267572	5.678291578	5.78277636	6.021579641	1.314901143	2.215096717	0.742496708	4.946487978	4.567009852	4.335575669
Zm00001d028051	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028053	11.68361743	10.9123014	9.770019478	11.04367947	13.24597637	12.92477298	12.92279447	13.39645248	13.87488677	16.746231	17.20773063	9.061218224	7.841754296	6.438914043	7.983923711
Zm00001d028054	26.07377733	25.76646628	21.80919803	12.54892504	20.80240129	13.9687762	23.36799149	26.29590886	22.16808415	34.71561516	35.3279305	52.16933444	24.98559144	24.56050992	25.80772995
Zm00001d028055	17.77453506	15.1760411	15.07080233	14.85869325	19.34962958	14.77377545	21.78489417	23.35289465	23.0282896	8.388826169	11.52976819	8.203201779	12.71637927	12.56315997	11.75389838
Zm00001d028056	111.3095826	113.9474521	114.2290887	116.9863407	103.1926095	115.0655476	149.4326494	155.1737162	156.681557	436.7405398	407.1320634	401.3017674	180.006674	170.1580719	166.5827651
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Zm00001d028063	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028064	6.83561696	12.23093484	7.124386207	17.79442333	16.89394727	22.06631694	29.16041665	31.66050704	18.62229259	39.18125013	15.98564163	12.88072953	33.43016426	28.28873984	43.65414762
Zm00001d028066	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028071	2.346306358	2.778878096	2.957416852	5.478333474	3.232130244	4.891628547	3.458228964	4.34815132	3.559513972	0.478037077	1.159971386	0.265820288	9.107522788	10.88759687	10.26491549
Zm00001d028072	0	0	0	0	0	0	0	0	0	0	0	0.112042213	0	0	0
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Zm00001d028074	13.46090724	14.03027162	12.50821623	9.890070054	8.96073879	14.6304385	8.620040222	8.228108885	5.207036617	7.294853131	7.013825248	3.494855196	14.82782514	12.45064433	13.34713019
Zm00001d028075	1.540487897	1.516759062	1.379582673	1.353188086	0.933213907	1.42424593	1.574355987	1.096947002	1.033741267	0.37986033	0.669085971	0.377750788	1.49703234	1.267859768	1.487395013
Zm00001d028076	0.049569376	0	0.012320993	0.006182078	0	0	0	0	0	0.047855039	0	0	0	0	0
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Zm00001d028085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028088	5.284955488	4.65890196	4.831076316	5.182547335	9.385188143	6.74289502	9.474920503	10.6311588	10.24684227	16.42419543	13.76815347	14.89935169	3.791723173	3.44878959	3.305346242
Zm00001d028089	1.069160601	1.20863922	0.827749604	0.464507833	0.300230939	0.461674796	0.168964622	0.052834603	0.059443799	0	0.071832769	0.063101552	1.353333247	1.032750205	0.856148154
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Zm00001d028093	4.446384441	3.434107997	5.200155397	4.128486546	18.36390826	7.019132593	16.33428099	15.03026258	14.66179969	6.744562719	7.114584871	5.986499593	2.480000138	2.467797247	3.402836554
Zm00001d028094	161.9826303	154.4535927	152.118539	231.5974742	185.2950402	195.3462835	250.3948868	208.1628824	281.0175992	83.51537499	61.80786738	49.9387638	80.55608948	76.07374633	74.57880824
Zm00001d028096	3.436683058	3.562086401	4.05343533	3.898150173	3.310697695	3.335397089	2.815975234	2.091956181	2.897594232	0.087464678	0.232302129	0.095342305	1.05437321	0.984890389	1.113773813
Zm00001d028097	13.03639862	13.01066754	10.57503578	9.375857168	8.570339794	9.70153397	10.39177784	9.004307673	10.54205674	9.876734311	7.907163958	7.673971246	7.222411061	7.594169879	7.210798174
Zm00001d028098	3.865378638	4.678112945	3.778107918	5.799377512	6.579040216	6.124257498	6.106028238	4.674784134	5.577129715	5.034382689	5.490075923	3.811848864	3.070117126	3.434494869	3.575124158
Zm00001d028100	6.031358265	6.649518697	5.976959373	12.49803871	11.28741551	13.44949892	12.31909357	9.93330125	10.12544047	1.894156723	5.433507464	2.839086351	9.546941055	9.127889277	7.094180251
Zm00001d028102	1.906375647	1.556011805	1.80451201	2.390831404	4.242681821	2.209441476	3.32688113	3.355950828	3.152299287	4.577854565	3.062079297	1.458987848	2.252474086	2.140427859	1.929039645
Zm00001d028103	0.006427472	0	0.111833144	0.024048194	3.404593439	0.141741598	6.616751928	6.06055376	3.590865828	23.97859203	18.24491545	22.7201188	0.014385096	0	0.170913812
Zm00001d028104	7.833870634	8.159410605	7.684472622	4.548628796	5.69881863	4.739467744	4.471876785	4.759070209	5.04391069	1.309985298	3.314240408	0.730403126	2.832682567	1.870201713	2.393527696
Zm00001d028105	13.41509839	13.95260778	14.00634359	13.71600318	15.03967162	13.17964496	14.59060049	13.00993332	12.73416022	6.623496072	13.45476551	7.066782725	6.843145202	6.896775729	7.421698641
Zm00001d028107	0.133844248	0.056192442	0.158420977	0.731289338	0.831408754	0.65591007	0.633035497	0.491842125	0.573804605	0.087901564	0.112521261	0.049422195	0.520649945	0.384279146	0.582125479
Zm00001d028108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028109	14.0326889	13.74405715	12.46435886	9.289717729	10.26693351	9.966518386	9.142225964	9.693133925	9.66032268	9.932258954	10.5008546	7.399860733	7.920634691	7.287799991	7.098862047
Zm00001d028110	0.067763241	0	0.147378622	0.021127844	0.133932017	0.041509621	0.475088088	0.3676817	0.208927175	0.443919237	1.068145265	0.356558956	0.170615796	0	0.215444774
Zm00001d028111	2.186181005	2.523689827	2.070289256	4.981043205	6.144123019	5.3774401	5.76847177	6.196927004	5.704873722	4.538966501	6.412752396	4.278303951	6.25781014	5.193182193	6.055118316
Zm00001d028112	3.673604787	4.223227919	5.055829053	10.60831129	9.778486484	10.10384977	9.852830002	12.50079101	11.03757177	5.389538953	6.389165322	2.649240999	14.48465034	17.08153723	15.49226124
Zm00001d028113	5.228218017	6.094590582	5.03221848	6.506533504	10.96368148	6.091832437	8.279878874	9.000024302	10.74183174	4.449077942	5.807407597	2.600050936	3.174231233	3.231509337	3.806770035
Zm00001d028114	1.113725334	1.604358414	1.578852107	2.782227523	2.037441648	2.666341663	1.715285183	1.277191636	1.772570629	0.540187302	0.536866735	0.328241258	2.439230652	1.982570214	2.303537633
Zm00001d028115	0.121522079	0.025509585	0	0.025259511	0	0	0	0.024421328	0	0	0	0	0	0	0
Zm00001d028116	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028117	38.26544118	30.05475066	40.24152183	57.4132429	85.77098678	45.91703992	56.75797706	65.02700037	51.0997558	6.37801935	26.78265978	4.959005806	24.24593618	21.16599033	33.05178925
Zm00001d028118	0.853643745	0.276937072	0.594753114	0.112915032	1.789455927	0.491223364	2.418139935	2.120981917	1.547266822	3.514108269	6.312041242	2.650623382	0.796045635	0.907436848	1.046742521
Zm00001d028119	1.230285514	1.824673191	0.630323462	2.520732187	1.574765035	1.710287873	1.956880853	1.749858773	1.644239598	0.051941833	0.481259764	0.136285446	1.97799431	1.833106803	1.94488413
Zm00001d028120	0.310069223	0.03550303	0	0.01171833	2.7237446	0.529525827	1.119885477	1.880694002	1.436902028	2.13818289	0.639830026	2.081700689	0	0.041201063	0.086904809
Zm00001d028122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028125	0	0	0	0.014839138	0.015677856	0	0.097322766	0.071733665	0.05869599	3.856308172	1.08030483	6.840669569	0.053258659	0.05217367	0.233854487
Zm00001d028126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028128	0.214031059	0.139600258	0.289748291	1.949544166	1.883472817	1.601398711	1.062905002	1.29958058	0.85786888	0.04216916	0.115671443	0.012701459	0.872492074	0.691315713	1.033983792
Zm00001d028129	0	0	0	0.037472901	1.095348041	0.687143882	1.708663879	2.149613574	2.198648566	13.30201811	16.65888746	7.566638868	0.033623186	0.032938213	0.01157935
Zm00001d028130	0.831112187	1.06447112	1.120147581	1.320171297	1.372589998	1.530779174	0.702118527	0.497680478	0.45709095	0.085193568	0.152251833	0.031103661	2.136581193	2.203863396	1.847095311
Zm00001d028135	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028138	0	0	0	0	0	0	0	0	0	0.038322938	0	0	0.031094613	0.030461152	0
Zm00001d028139	4.428369681	4.741675684	4.161434517	4.033049894	8.768439335	4.405332194	8.368107439	9.275200877	8.973376051	44.4329605	54.21503751	49.7104337	1.512301475	1.322761403	2.029784339
Zm00001d028140	9.953493868	10.39609074	8.868957792	16.9058261	23.06502645	15.49026695	13.42506429	14.30939536	11.40158689	6.307023433	17.11883311	7.098436012	15.59548629	14.15135926	16.01468508
Zm00001d028141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028142	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028143	15.05976382	13.67753117	13.8197329	20.80221743	22.20667096	20.93818719	20.75444326	16.7704141	19.67168269	6.18389177	11.84830304	4.101734409	17.12427595	16.81347297	16.28072221
Zm00001d028144	10.64109353	8.56962613	10.9043001	23.87813144	69.47010335	35.55313465	116.0209512	155.3329998	133.4198056	12.77724011	36.02612905	9.018263494	45.61234276	39.59209362	40.55727472
Zm00001d028150	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028151	0.060881299	0.008520025	0.184955119	0.244658549	0.28522682	0.52211545	4.047064086	2.724289134	1.067854598	0.02798845	0.187667996	0	12.09652771	11.8723432	19.3017042
Zm00001d028152	0.307602763	0.229586263	0.566354992	2.685401757	4.038106127	3.433572088	6.376622415	5.041477845	3.807645526	1.995475381	1.178057413	1.287271664	2.167294547	2.522792594	2.884560703
Zm00001d028153	9.073504047	9.707750988	11.68580817	61.56921293	36.73476857	56.55260047	25.50843723	25.77800766	23.47825182	9.82270573	11.67266478	7.119611343	127.3696385	152.0614178	153.6449011
Zm00001d028154	0.535275825	0.18221132	0.3056519	1.136677992	15.40232372	5.512148248	20.26860265	17.32169889	20.41092477	155.5079127	80.94526893	164.6970543	1.537949445	2.172702093	4.2650604
Zm00001d028156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028157	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028158	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028159	0.101834145	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028160	0	0	0	0	0	0	0	0	0	0.397293461	0.030271931	0.372293618	0.161178751	0.157895207	0.194276882
Zm00001d028161	1.738885016	0.528652579	2.719994369	17.83537508	12.64130269	15.0595267	8.232646234	8.206048121	6.507531682	4.010798009	2.117176352	3.321134323	10.13193426	7.263381492	9.982618149
Zm00001d028162	8.756979565	9.416139293	6.668702472	3.410033977	1.758109101	2.223158079	1.06498913	0.777192254	1.068333109	0.639820438	0.507359378	0.245584419	4.143931492	4.563574508	4.157925337
Zm00001d028164	24.10614628	20.13893888	22.17690153	9.217255252	6.399578285	6.294552228	5.215491474	7.042152139	3.667820693	2.189724625	2.492368226	2.671925949	23.57936804	19.03781291	18.42116227
Zm00001d028165	0	0.011486971	0.328705032	0.045497451	1.550225128	0.033520611	5.59492288	2.089416466	3.453068619	23.47112496	15.57223258	13.88149956	0	0	0.031632713
Zm00001d028167	5.657062312	0.890636364	1.705342309	0.692925623	24.7024988	5.156752505	19.57507729	21.16377225	16.15444469	12.81760688	17.45217818	12.25351323	0.480434752	0.295308112	1.674014579
Zm00001d028168	0	0	0	0	0	0	0	0	0	0.009336413	0	0	0.007575415	0	0.007826597
Zm00001d028169	0	0.033177206	0.026189826	0.183971005	0.124951605	0.21944913	0.073872078	0.038114211	0.006497273	0	0	0	0.141489477	0.161708219	0.383724917
Zm00001d028170	0.022284	0	0.041541931	0.13895819	0.01468122	0.232058065	0.273407967	0.080608294	0.013741176	0	0	0	0.43638895	0.354213296	0.734255328
Zm00001d028171	6.464452238	5.298144527	4.612846088	5.207631074	15.40551514	6.063034257	8.288603183	11.92197284	7.501998165	3.355771474	3.250351542	1.930165124	9.379880047	7.369117743	9.55977472
Zm00001d028172	0	0	0	0	0	0	0	0	0	0	0	0	0	0.239101575	0.242080083
Zm00001d028173	12.56580412	11.15255051	11.03270739	8.131186629	9.935860525	8.637134971	9.160488184	9.901518525	9.856113607	6.051609285	7.937165376	5.597919873	5.3141002	5.366591442	5.418576662
Zm00001d028174	15.87369481	16.48594179	15.67167611	14.45991035	10.73613808	14.24654895	11.96112583	9.64571098	11.00571852	1.668295377	3.82788312	1.163006904	11.58245795	11.00873146	10.09302691
Zm00001d028175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028176	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028177	8.925512861	9.137967723	8.775655528	7.711395582	6.785822875	7.836731724	7.36297334	6.100493884	7.232732608	2.838825455	4.785566194	3.766838013	7.673701889	7.240855371	7.187858948
Zm00001d028178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028179	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028180	3.835047437	3.156278678	4.457287339	1.227359168	0.755311972	0.88872946	3.888494634	6.006559218	1.682914206	0.020988741	0.025587925	0.028097166	34.26421012	47.64662161	44.36184137
Zm00001d028181	18.47597918	22.04360857	19.45306276	33.31784405	32.35097145	29.85714859	30.30974498	24.92568125	29.13920931	12.66101006	20.86273467	11.4131503	44.49143452	39.89263078	43.5996072
Zm00001d028182	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028183	6.925536965	6.769632173	7.89438976	12.70828001	16.94974667	12.59614554	13.02490429	14.1154547	13.55864247	1.460095376	3.316181447	0.729215256	6.960099698	6.602562395	7.610641701
Zm00001d028184	1.449024793	1.296051484	2.544682567	10.37153191	11.20677698	9.570932649	10.94435834	12.12907188	9.414383654	1.201962746	2.913033954	0.942161424	7.473024299	6.399930111	7.235225801
Zm00001d028185	1.617939312	1.450486854	0.886850452	2.220487241	1.545374755	2.492894085	1.411729777	1.354531783	1.097888009	0.126673649	0.329651157	0.242623022	4.285175174	5.522299853	4.778501323
Zm00001d028186	3.61836105	5.073131003	4.273807263	12.06175334	6.955699141	9.841919252	4.785240448	4.97846353	4.829124026	3.125717577	4.640685747	5.027409669	22.99490674	25.92110276	23.20607123
Zm00001d028187	2.304515816	2.598737014	1.807908443	2.425159886	2.772490917	2.345969648	3.369285643	3.244079062	3.020596953	8.74674248	5.180382761	4.805584004	3.563017286	3.856560421	4.85243579
Zm00001d028188	2.565517342	2.36466883	2.170024817	3.462641988	5.694820539	3.791217314	5.248182396	5.515643957	5.875989602	7.701224092	6.867169123	9.085091453	1.930697097	1.595720612	2.2905236
Zm00001d028189	2.391764127	2.305291222	2.337522656	3.70412315	6.835648152	4.505413367	5.523947725	6.38389554	6.030976767	3.236690814	4.651577425	2.655707213	3.229344792	2.671174056	5.8679483
Zm00001d028191	5.41522902	5.084760691	5.022591579	7.32303215	10.23236057	6.649933723	8.669090552	9.807043394	9.535471137	9.14176266	11.04012355	8.335492602	5.284007441	5.139287987	6.299842844
Zm00001d028193	14.00949125	13.73375557	13.3297778	18.13411539	19.70381605	19.47734129	21.70052593	18.16115955	21.62305794	27.05773257	27.42975017	29.71107309	21.9121496	21.84171357	18.08163174
Zm00001d028194	6.89318005	7.781765961	8.250897987	15.17764246	17.91272591	16.2554735	15.66094542	17.09750008	18.32165965	12.42437717	16.34460144	9.777419448	12.70048024	13.25156298	15.19576318
Zm00001d028195	0.007405869	0	0.009204036	0.036945114	0.185408055	0.417367323	0.233651461	0.133946882	0.045667451	0	0.009339038	0	0.331496202	0.422165823	0.376736582
Zm00001d028196	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028198	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028200	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028201	115.7233587	109.9574793	106.9405511	57.81057303	95.05997048	58.39670517	74.39327834	82.61411844	85.61224946	59.46107341	98.01373099	66.09934734	34.22741883	31.59518792	31.26206344
Zm00001d028202	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028203	7.823402614	7.780439706	7.468130192	5.754077079	6.063132821	6.661855095	5.131038153	5.751255562	5.737602594	4.085749003	4.938307151	4.163294611	5.172749798	5.453620266	4.949069505
Zm00001d028204	0.244192374	0.356592694	0.307881305	0.979844089	0.694813511	0.828134672	0.430075859	0.482199527	0.52811576	0.019523568	0.107107624	0.035283291	0.554438769	0.492708934	0.507357157
Zm00001d028205	4.662261539	4.361874036	4.676595461	6.955839648	7.172279785	7.480570267	3.954532632	2.891665581	4.961809421	0.119679019	0.616775305	0.052432911	2.53357402	1.798772322	3.146569627
Zm00001d028206	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028207	30.68030111	28.32577534	32.24847828	41.65811927	49.24582711	41.80997488	41.5627877	43.39799324	45.86928322	28.22821929	37.72219376	30.47596023	45.0243411	47.81908617	48.21296052
Zm00001d028208	16.68555494	17.76806876	16.51997948	19.10420871	14.85149469	18.14916428	14.97142474	14.02594061	13.77835179	12.81488432	15.60722802	13.61261765	17.24751944	15.91617505	15.07521647
Zm00001d028209	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028211	1.676070764	1.709293883	2.448332421	5.678190154	4.680636046	5.064582041	4.20928915	4.139951293	5.622711968	0.819402617	1.553638299	0.381034075	2.841359193	3.009717869	3.203099152
Zm00001d028212	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028214	11.75021744	4.566857892	11.54926485	13.84577613	45.74127336	20.37745701	35.79373595	40.59330827	36.73163581	10.86253356	8.720868265	4.965368038	6.592349305	6.817805015	10.61432462
Zm00001d028215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028217	0.422129328	0.060417438	0.310004838	0.406811071	0.948097702	0.317351977	0.17936659	0.150383966	0.011831876	1.164371876	1.633250329	1.27531558	1.717731901	0.609992581	1.56394351
Zm00001d028218	14.52780327	15.44221585	13.94736877	15.30592242	18.36138028	14.43982701	17.20193062	18.83305799	18.73446647	11.75009766	19.68090735	16.29427266	13.6062323	13.92056308	14.04619157
Zm00001d028219	0.802589852	0.64249887	0.355028502	1.102747306	2.357036923	1.558252592	0.468913124	0.598687027	0.369083886	0.966195624	0.506045776	0.082879651	6.971876401	10.04345094	10.37993628
Zm00001d028220	4.85551257	5.119340131	4.484876211	4.260829919	5.218156052	3.869325423	4.428540576	4.943994288	4.233734179	2.454392486	3.106500307	2.537245214	2.689078149	2.104426236	2.355948685
Zm00001d028221	2.792198065	2.952771299	3.085488901	23.68626684	10.38660213	18.83873966	7.895078376	5.629786572	6.57036715	0	0.240826625	0.131309588	28.72531161	28.24840446	28.4824388
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Zm00001d028225	0.161678509	0.104185185	0.31308403	0.562711877	0.956181043	0.585021942	0.276791729	0.217615792	0.306047282	0.005185612	0.018965748	0.058311665	0.117810614	0.070070702	0.121716925
Zm00001d028226	0.061086836	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028227	5.919671467	6.267978835	6.127443073	7.847145783	8.960371479	8.417854083	7.644419987	8.491266525	10.02239856	4.438207637	6.124778927	3.868890394	3.956940998	3.831637434	3.60737023
Zm00001d028228	0.030882588	0.063463091	0.024240613	0.056759572	0.09209319	0.013939356	0.294388269	0.295939107	0.380867955	0.421438411	0.360743808	0.6932093	0.05820397	0.010690919	0.04885877
Zm00001d028229	0.028141692	0.007088913	0.041969493	0.105291292	0.756448475	0.144805177	0.414332947	0.637930525	0.492832455	0.248397009	0.113560244	0.199514171	2.160313941	3.911768698	4.040926017
Zm00001d028230	50.02337836	19.26004759	45.95763556	20.97586754	183.0910783	47.73094143	174.4062565	232.4460691	200.7788518	414.2464329	314.480359	278.6342918	58.12702632	59.12875103	83.32361514
Zm00001d028231	0.083259646	0.010486583	0.010347533	0.799551207	0.625328752	0.703830766	1.128551209	0.933647289	0.811189657	0.539695261	0.650957128	0.027669377	0.288827675	0.538505673	0.481297566
Zm00001d028232	0.93684697	1.116371446	1.20614789	7.968873	6.035418011	6.532642632	6.253588202	5.959274959	5.963760616	2.332682796	4.531035397	3.209712107	8.970713002	7.770181101	10.25075338
Zm00001d028233	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028235	17.69182781	19.51381241	18.74179624	26.58644882	25.56030969	25.20926685	19.97741715	23.30956605	20.45571533	7.144921066	7.559194287	2.509485095	21.31330609	16.67798809	24.74441658
Zm00001d028237	0.332882639	0.432167436	0.324601288	1.951236898	1.012203952	1.794437831	0.894638743	0.648384193	0.754755777	0.010594616	0.006458087	0.039711784	0.338121159	0.58667528	0.506235974
Zm00001d028238	4.266270022	4.13166579	5.190304368	7.957884414	8.108683934	7.103223301	4.996565112	5.273874654	5.022664283	0.299455185	0.883083634	0.268693975	2.449431559	2.427408176	3.055322951
Zm00001d028239	0	0.239152357	0.943924986	0	1.000769796	0.232626835	0	0	0	0	0	0	0.637439573	0	0.219525168
Zm00001d028240	22.2394429	31.48855154	30.81868352	109.4755958	50.47446873	103.3637036	20.71983802	20.15666271	17.49477554	2.818898721	3.823494719	0.67474927	210.7110153	229.403236	208.574122
Zm00001d028241	20.27536584	21.96962171	24.87674815	21.13439883	19.77218095	30.71230305	24.63052549	19.53006903	14.03076037	0.816919839	1.133297871	0.633529528	48.9355503	41.41545532	48.39349233
Zm00001d028243	0	0	0	0.124738326	0.304761172	0.229754899	0.547833915	0.444709363	0.292956595	1.508735693	0.070945945	0	0.46867985	0.212434151	0.448084293
Zm00001d028244	1.258123392	1.323450224	1.001191188	1.320960077	1.508231259	1.733615849	1.651835466	1.478156046	1.55161507	3.592050842	2.399235099	3.777557153	1.169575539	1.116567599	1.161382174
Zm00001d028245	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028248	0	0	0.006859366	0.055067162	1.338130628	0.283998203	0.831955578	1.064797495	0.367566751	0.06850786	0	0	0.006176241	0	0.012762061
Zm00001d028249	0	0	0	0	0	0	0	0	0	0.008300632	0.053127472	0.01666781	0	0	0
Zm00001d028250	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028252	0.041353932	0.059187989	0.00700838	0.037508967	0.019814499	0.057572983	0.04832207	0.040797351	0.078819522	0.207395963	0.327114164	0.35190416	0.075724982	0.086546025	0.032598265
Zm00001d028254	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028255	0.008233203	0.025924375	0.025580623	0.2515683	0.450210803	0.428689019	0.77445009	0.69491583	0.72599834	0.261163725	0.638513503	0.259930513	0.087525578	0.108306318	0.118983831
Zm00001d028256	3.034502856	3.910476299	3.938019757	3.553446621	4.141503418	3.874215143	3.19496739	2.511174378	3.561173455	0.748909003	1.168121665	0.396301337	1.887297726	2.577184255	2.060664284
Zm00001d028257	8.810350749	9.074123721	9.641519505	10.52780331	13.21016131	11.87061508	11.62613133	17.19087035	13.15380619	15.99672427	19.48378346	12.86069729	10.21117487	7.707541731	8.956626839
Zm00001d028258	6.590235839	8.642598259	8.168581614	8.656240096	9.006928165	10.60778369	4.915334446	5.748404837	4.90681541	1.643759247	2.265495025	0.757218626	23.7127521	22.46111609	25.00560525
Zm00001d028260	5.600264498	5.578300763	7.540027302	20.63367279	41.3812282	15.43745311	41.00635856	62.09784602	43.32474155	146.0180891	124.4755149	69.80197399	129.5461532	123.6167368	163.4430995
Zm00001d028261	6.75441527	7.151774739	5.371739704	5.854208896	5.537965278	5.899472475	6.161755485	5.112592904	5.890409694	7.251048705	6.279584279	9.001657228	5.246218003	5.963009163	5.395285786
Zm00001d028262	5.038022532	5.062225511	5.341210503	7.517154437	6.913087049	6.564891693	7.152619184	6.06627131	6.643030823	3.308145534	4.591885315	3.390392332	5.347993385	5.174610383	5.379703668
Zm00001d028263	0.119494297	0.082092823	0.114756077	0.806106562	0.894609472	0.79852835	0.387153379	0.189927489	0.38182126	0.044946092	0.047945591	0.036101007	0.516637556	0.3989358	0.470971754
Zm00001d028264	4.166813166	4.608187208	3.617076317	3.016753953	2.765205173	2.746979457	2.032750409	1.781287009	1.695918128	0.331321963	0.940166317	0.180472223	2.280414	1.71027893	1.956970874
Zm00001d028265	24.61208845	24.33549439	20.48490785	11.22851358	11.13954454	11.85468985	10.87283103	9.93726969	10.25934084	15.91064311	18.32253783	15.22148672	13.21690832	12.15061309	10.8203862
Zm00001d028266	0	0	0	0	0	0.010442102	0	0	0	0	0	0	0	0	0
Zm00001d028267	11.28139511	9.743042123	9.255754405	18.66090996	29.08212709	26.46304735	24.65741632	26.06521069	26.34623995	3.721420493	7.895370662	1.329310159	16.47448588	15.77840836	18.4982477
Zm00001d028268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028269	0.949236141	0.949420402	0.857721087	0.95682623	1.149225763	1.090431164	1.212271159	1.106859475	1.001268381	1.999153844	1.477260084	4.026705811	0.618590273	0.588849249	0.689454635
Zm00001d028270	0.015741202	0.049565255	0.014672409	0.004907936	0.010370671	0	0.036787189	0	0	0.244234268	0	0.75852643	0.105689463	0	0
Zm00001d028271	0	0	0.017941552	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028272	21.2240638	24.02607111	25.97178386	66.42020432	38.79562992	59.84212551	34.13419909	24.54215927	33.6034686	7.425693339	13.63929614	6.988551812	64.56429224	62.9508861	57.07698023
Zm00001d028273	50.87603469	54.79801472	44.30812063	71.50892146	66.84246026	77.12100394	107.6645727	78.90913715	88.4822696	22.71654114	15.39579946	4.960221512	76.16292924	71.21877916	77.79709821
Zm00001d028274	0.203083826	0.197651914	0.08030692	0.230252125	0.827104815	0.463682929	0.625618192	0.434092811	0.364303535	0	0.011640692	0.030677324	0.309896349	0.34406087	0.917825684
Zm00001d028275	0.086709729	0.084942063	0.011973678	1.189546736	1.129833131	1.42822057	0.405281276	0.336890409	0.213874287	0	0.048597222	0	0.280311694	0.200670083	0.256190048
Zm00001d028276	0	0	0	0	0	0	0	0	0	0.026187341	0	0	0	0	0
Zm00001d028277	0	0	0	0	0	0	0.006326668	0	0	0	0	0	0	0	0
Zm00001d028278	0.275378981	0	0.055200292	0	0.152163829	0	0.010380011	0.074977761	0.065732643	0	0	0.059042388	0	0.038952272	0
Zm00001d028279	8.789029019	8.866534229	8.221919696	16.14444159	20.25598424	16.53481598	20.34794082	20.54956722	21.82244744	6.535970385	11.9255209	5.872187869	10.8495725	11.1283009	11.7302537
Zm00001d028280	25.38255512	21.61014057	20.59345749	7.957546706	20.13947869	10.57218908	18.1524565	20.78694557	21.7065326	34.63481078	33.51419958	32.42250657	5.712033367	5.020263914	7.003773013
Zm00001d028281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028282	0.452877314	1.913218857	0.175886643	0.953115087	0.273502305	0.416127506	0.716607593	0.102387554	0.360712983	0	0	0.041806411	2.787313411	1.799667554	1.145348701
Zm00001d028284	0.03613542	0	0	0.112666321	0.111098673	0.051649306	0.211121193	0.210593608	0.118839986	0.008306117	0	0	0.35045136	0.165053818	0.278516512
Zm00001d028285	8.041301267	7.727945674	7.911191927	10.29636567	8.811710739	10.18342227	9.545502347	7.909553346	9.116977606	5.545140089	8.053001018	5.85174932	9.175699679	9.089580386	8.009223156
Zm00001d028286	0.972939724	1.47771378	1.244736246	1.489993915	1.008625132	0.666108866	0.267501194	0.414050769	0.202925028	1.8943684	2.183174897	3.05106406	0.480331232	0.407806441	0.529341691
Zm00001d028287	0.019255259	0.07275621	0.011965246	0.024014324	0.190287215	0	3.802461189	3.552271299	5.129368122	186.8890938	124.321277	319.0023425	0.37707693	0.538261424	0.545411825
Zm00001d028288	0.166047376	0.046474952	0.114646759	0.506212871	0.024310197	0.384258092	0.517403626	0.289199934	0.341304109	2.340957442	1.512268823	6.662706396	0.392270506	0.586531328	0.277294949
Zm00001d028290	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028293	41.69374599	43.47568339	38.39167972	14.77876361	21.90707399	18.95170526	30.29647465	34.08094726	30.93487558	116.4496701	122.7194477	179.7236112	14.3013887	13.30739568	15.36299629
Zm00001d028294	8.668354841	9.208405542	7.510359675	17.43318095	13.79756967	17.33171064	9.932181233	5.829264752	9.309885741	0.915418353	1.961346912	0.362148038	19.79942742	17.15889926	19.51674186
Zm00001d028295	0	0	0.005678693	0	0	0	0	0	0	2.306446553	0	0	0	0	0
Zm00001d028296	32.91328249	33.84130153	32.66255192	26.58550398	25.16696768	28.7393286	23.67995581	21.56794184	25.96248087	21.62497261	22.16212668	26.30062198	16.39054602	16.37860036	13.9765878
Zm00001d028297	0.488131104	0.587877256	0.540229156	1.470838215	1.197167934	1.16549864	2.86023273	1.954756394	1.656601373	3.198991517	3.329356178	3.982452923	2.149053509	1.847484339	2.302697145
Zm00001d028298	19.68447155	22.75423043	22.41980829	61.16071527	50.43533019	55.98627132	43.5118273	43.0593372	39.28689516	17.05831796	23.18006816	12.30206968	87.21204056	90.15210959	91.24471683
Zm00001d028299	0.111677881	0.089865283	0.0693968	2.820416121	1.132252826	2.192931528	4.512972998	3.979895072	3.286386057	21.6700692	12.20130193	29.84888125	10.27540441	8.753402851	7.219673178
Zm00001d028300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028302	0	0.014555342	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028303	182.2484907	178.3131605	162.6764338	5.078774009	38.49161398	7.432745568	48.82279195	76.04200204	64.02519289	803.0519236	613.779353	811.3900616	2.836509223	2.042285979	9.888641289
Zm00001d028304	21.60879175	22.66901058	16.50074898	14.68147001	19.0762725	10.55875827	15.16876719	17.72666724	12.62874409	19.10200063	24.45891666	20.62254658	23.09820355	25.77037398	27.63427693
Zm00001d028305	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028307	38.95425306	33.24585691	43.31526544	7.869309178	8.04849863	7.80552504	8.366308838	7.005868396	5.090550789	66.72937357	29.53984489	93.89510959	4.030579452	3.958075205	8.855307531
Zm00001d028308	3.299606127	4.34592098	4.000741665	9.334309342	7.475949206	9.058581398	6.829566054	6.659259402	6.290091581	1.318038353	2.689368132	0.802350862	5.921292984	6.594671263	6.664260718
Zm00001d028309	3.244021608	3.088713494	3.215744445	9.982055675	9.248639514	9.178902922	9.397626538	9.639180843	7.858671735	2.396807477	3.29943736	1.09090819	7.40078148	7.228844361	7.925230628
Zm00001d028311	7.592474316	5.378419444	7.158647887	4.351966439	3.810623454	3.933508305	1.89910649	1.930864593	1.758750417	15.80030614	9.001700853	13.62640511	10.22577888	9.825319077	9.643755965
Zm00001d028312	0	0	0	0	0	0	0	0	0	0.090128516	0.016481706	0.072391838	0	0	0
Zm00001d028313	0.053560172	0.033729617	0	0	0	0	0	0	0	0.036934154	0	0	0	0	0
Zm00001d028314	0	0.322855682	0	0.02664089	0.197026554	0	0.074882048	0	0.052688822	0	0.107749154	0.260293903	0	0.187336084	0.098786325
Zm00001d028315	0	0	0	0	0	0	0.313232097	0	0	0.046212955	0.04225457	0.03711856	0	0.036732565	0.116219206
Zm00001d028317	0.179137293	0.236630137	0.103171092	0.844607329	0.834774422	1.220454499	0.709652392	1.28018801	0.377190671	0.072310203	0.148762015	0.033880028	2.23928916	2.423574519	3.389485426
Zm00001d028318	0	0	0	0	0	0	0	0	0	10.36750114	0	0	0	0	0
Zm00001d028319	0.138426187	0.049813799	0.057345491	0.641231076	0.286623558	0.637985265	0.238775287	0.270236004	0.243882686	0.181821461	0.232746484	0.138738225	2.500582625	2.196727848	2.545391143
Zm00001d028320	0	0	0	0.022309676	0.005892658	0	0.036579607	0.010784688	0	0.345395351	0.174823619	0.217975921	0	0.024512409	0
Zm00001d028323	0	0	0	0	0	0	0.04358755	0.037481574	0	0.0171486	0	0	0	0	0
Zm00001d028325	0.189559126	0.289394449	0.149917498	5.380116632	2.94428156	5.883308599	3.154694691	2.618109989	1.95524233	0.705077651	1.043084244	0.267253633	13.14518245	11.59279765	13.77363623
Zm00001d028326	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028328	2.576341955	1.64862476	2.272305743	3.938641068	6.378766755	4.021828081	4.22434898	5.235925245	4.919758685	6.991781244	5.50208444	4.303947812	1.557755065	2.163760238	2.065805225
Zm00001d028330	8.67764315	8.917512606	7.999530734	25.33514206	26.94993578	24.27795415	29.77902554	26.23449204	23.65208032	5.116797774	14.44237831	6.811316996	16.43982699	15.37097083	16.08655473
Zm00001d028331	1.494928128	1.004846391	1.212930238	6.452982144	13.20675926	6.424454649	13.28671991	14.90600361	14.62510346	19.80564175	20.23852658	15.52190928	11.51941791	13.37356745	13.28046419
Zm00001d028332	4.273335383	4.764997908	4.257279788	8.359944933	10.63157408	8.290293705	7.985409061	8.464063571	8.438694729	1.344744663	2.537187617	0.493382702	5.524797021	5.016365472	5.904812811
Zm00001d028333	0	0	0	0	0	0	0	0	0	0	0.078244469	0	0	0	0
Zm00001d028335	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028336	0	0	0	0	0	0	0	0	0	0.008860379	0	0	0	0	0
Zm00001d028337	0	0	0	0.026682582	0.239620937	0.148531688	0.129165348	0.146184004	0.030783245	0	0.026979444	0	0.01995116	0.015635771	0.07420569
Zm00001d028338	13.46191359	14.84621216	14.99079337	25.73025637	15.13508695	19.16934166	7.551741103	7.492907375	8.454413061	1.17279192	6.252544187	0.652150013	46.21772397	52.10273625	57.97481116
Zm00001d028339	19.24283552	19.35030798	18.21034937	6.395415765	6.94420395	7.818499917	6.72656314	6.433086224	6.556596464	7.684157164	7.963340104	8.8851286	4.730245649	4.662044559	4.500953499
Zm00001d028340	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.064120941
Zm00001d028341	1.624236588	2.010911023	1.486037618	1.887758951	1.648386247	1.473381694	0.888388303	0.650041914	1.074020878	0.171581364	0.174316123	0.068907661	0.866247508	0.333378673	0.559356342
Zm00001d028343	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028344	46.2059932	51.52086761	31.17189749	73.67559301	56.35937895	77.82864221	80.95600214	51.61141662	60.96203732	0.500101364	1.527459785	0.299126997	30.45033011	28.99269052	29.6849563
Zm00001d028347	0.517226391	0.162862138	0.262967924	0.029321014	0.805434677	0.259229904	0.56317138	0.99218206	1.101798923	5.609450024	7.115335338	9.636144162	0.591947325	0.747411374	0.271811042
Zm00001d028348	0.062283526	0.065371943	0.051604099	0	0	0	0	0.087616381	0.012802144	0	0.117812286	0.011499144	0	0	0
Zm00001d028349	3.169998964	2.917212385	3.610360609	0.734393534	16.97932043	2.897732121	14.89685082	26.43656939	29.27879628	15.3085969	27.846156	5.08798732	0.043929791	0.010758713	0.022693198
Zm00001d028351	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028352	1.958390717	2.072993915	2.454607737	4.718547472	4.062863055	4.267684994	4.771514846	4.627287084	3.843827004	3.034251611	2.706043968	1.874006474	5.683917141	5.303192764	5.250940309
Zm00001d028354	1.858163975	1.592412893	1.809373258	7.095610167	9.743132009	7.627465592	7.789691627	7.260525754	8.363273807	5.063782884	7.287285121	4.654365771	7.052624287	7.706941735	7.249559763
Zm00001d028355	3.438504552	4.390390417	3.538493883	3.543514979	3.377598062	2.984706938	5.379070313	5.803762339	5.0428125	19.46244992	24.34608904	33.16434171	4.086009718	3.545772934	4.310365272
Zm00001d028356	0	0	0	0	0.034509303	0.19251876	0	0	0.193797965	0.03612047	0	0	0.146537833	0.516789197	0.454190002
Zm00001d028357	0	0	0	0.329471882	0.493132943	0.539424545	1.337667506	1.167976544	1.303221101	2.398608621	0.860605156	1.438837324	1.083955215	1.375607958	1.807105728
Zm00001d028358	1.108478426	1.270092924	0.988570087	1.420847491	1.264486161	1.150559753	0.971442787	0.822982244	1.227823596	0.530824479	0.850991814	0.667966881	0.786749743	0.933867565	0.768338087
Zm00001d028359	25.00421542	24.58156366	22.43937537	29.02644439	48.91072577	32.77054336	41.2811821	41.46678292	46.06383841	24.90795389	34.76507864	21.70867467	16.30086852	15.57085849	16.54159987
Zm00001d028360	26.87884452	32.35856012	28.02262665	28.3887444	37.75608928	26.55755691	29.20131485	39.17259748	32.66096828	18.68333566	22.5586979	9.858247452	32.63437535	30.51920186	44.92040552
Zm00001d028361	0.167474819	0.155425903	0.076682494	0.428727676	0.301973091	0.097190322	0.257492536	0.712091907	0.119577468	0.024313199	0.022230644	0	0.147955027	0.173929053	0.03057217
Zm00001d028362	2.417013732	2.663708022	3.754839725	7.1905873	6.668112564	8.359143294	7.501995252	9.319907258	8.197332727	0.34723546	0.952478706	0.474133209	1.465054488	1.021205908	0.989682524
Zm00001d028363	0.158967836	0.125137861	0.018521784	0.947920055	0.471292753	1.588489639	0.795258961	0.844585708	0.612660719	0.952336149	0.714151367	0.68237725	1.623247284	2.243676352	3.204812185
Zm00001d028365	0.513057029	0.485862577	0.541744758	1.217181992	0.909842066	1.01137536	0.531893555	0.455832627	0.632741608	0	0.082696867	0.004273243	1.010118691	0.888049155	1.016852469
Zm00001d028366	20.45566054	19.17899223	19.1452304	0.604374469	0.998271619	0.46827329	1.036809188	1.40730492	0.303033064	2.673383663	2.702604832	4.173586434	3.116229803	2.491579266	1.925420941
Zm00001d028367	221.3418205	271.7059783	168.7943201	28.21949064	22.03205288	65.20017147	22.36155424	19.92072051	6.75775262	177.6783393	86.83301379	185.3927415	93.08543561	92.49459732	90.56109543
Zm00001d028368	6.812549636	8.396426738	5.294049474	10.66354832	18.15569772	34.4402852	21.40160945	29.37152263	13.81644337	144.1158008	104.2924541	161.2304991	36.61154621	41.85033322	49.8798715
Zm00001d028369	4.265336353	3.669845247	5.163284975	4.766862732	19.41525844	6.9154642	11.12024711	11.80223992	10.82127635	10.01570295	15.77992467	12.1989516	3.427916535	3.418807622	5.859934377
Zm00001d028370	31.1616837	26.38147735	26.57412533	13.9136126	20.32121839	16.87008748	19.66040366	18.11341296	19.48144656	19.67185886	23.35998374	25.26364537	8.070842663	7.536165375	7.881879679
Zm00001d028371	27.50817977	21.9933204	26.18104667	25.00691583	12.03653128	22.02764651	7.624353998	5.120153373	3.244354122	1.342696391	1.61950243	0.849002702	49.21033501	41.91786795	45.0705126
Zm00001d028372	8.289228475	9.652924227	8.125835933	8.072231024	7.655192169	8.073674834	8.274399815	7.546492547	7.098362715	5.315800618	7.483351911	6.951259174	5.649180824	5.832957106	6.398949187
Zm00001d028373	7.930430393	9.229581707	9.305110263	8.553220537	5.703863264	7.303154878	3.240866746	3.01141853	3.060472821	0.311136724	0.431749666	0.14112403	3.05614593	3.523416772	4.032000982
Zm00001d028374	2.390431526	0.307481602	1.66872453	1.72531481	11.27206337	2.866294934	10.91138417	14.5219681	13.13457059	14.81455288	11.77544322	15.65143856	0.352868335	0.144962446	0.011760277
Zm00001d028375	4.858073877	5.331739102	4.75827972	9.148981516	10.63697989	7.562553981	12.46754778	15.40866416	13.97833748	6.989010393	10.99069834	6.505878391	6.523608795	5.78489867	7.637735872
Zm00001d028376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028377	11.58540719	10.02298237	14.06025577	34.86378022	47.79796041	32.44276341	23.73707115	25.17765991	20.74698816	0.375221602	3.63094992	1.431557601	21.61586133	17.32315096	28.36134106
Zm00001d028378	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028380	7.215136554	8.093882519	6.937230359	10.92359605	9.877841369	10.67326168	10.09514025	8.74094622	9.829111222	10.00967408	12.44324599	11.09138698	10.88458889	11.20977988	10.06720781
Zm00001d028382	0.099066912	0.124775143	0	0	0	0	0	0	0.02036283	0	0	0	0	0	0
Zm00001d028384	15.65914293	13.45890898	12.17952189	17.31984094	16.37790407	15.38185604	15.54286432	16.89650613	14.96792654	5.002316557	6.165890342	3.021147782	10.24846725	9.09918121	12.63658547
Zm00001d028385	12.17352184	12.3404165	12.43352459	11.43732389	11.91850397	13.12452232	12.19018858	13.13058221	12.05615783	15.3036955	13.20203337	13.2646069	12.54101299	11.89730725	11.31058111
Zm00001d028386	27.39059058	27.14811641	25.95083881	5.368757494	18.67676624	7.712640366	20.15641027	25.30948259	20.71808778	96.66975208	88.37292503	76.93825857	24.70287424	23.50423415	27.53498909
Zm00001d028388	0.184746404	0.198216368	0.493222065	1.510450485	1.424519169	1.265825302	1.031408392	0.767291716	0.843865015	0.169863833	0.336513873	0.295610875	0.673809999	0.735092541	0.656597799
Zm00001d028389	12.78464288	23.76262487	17.47546726	5.594932531	7.032646894	7.147165334	8.64008691	5.6872236	4.242441065	5.673584219	3.935429528	4.576704015	8.750532344	6.317429542	11.60322909
Zm00001d028390	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028391	1.352792958	1.59555233	1.453288281	3.760330969	2.205470041	3.314712943	3.496379407	2.05277387	2.014767528	0	0.036142274	0.012699683	4.996884801	5.611442273	4.711921334
Zm00001d028392	68.3561696	86.59250664	79.78075811	8.327973153	22.49128883	7.648447622	39.46000186	47.18221694	40.10441655	96.1635489	129.0166359	181.484441	36.38932497	35.04159347	43.58018703
Zm00001d028393	0	0	0	0	0	0	0	0	0	0.663237178	0	0	0	0	0
Zm00001d028394	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028395	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028396	21.82524668	22.47523468	22.62164118	16.50127106	17.85851983	15.56480144	15.37790427	15.45619445	18.06231575	9.018260836	12.29932276	10.27327368	15.67672602	15.80537146	14.53371452
Zm00001d028397	60.58446831	62.968988	53.12151008	20.75775168	13.37296097	20.98971136	14.69116657	10.61462655	13.31045201	23.35102824	27.15391031	44.49951261	29.13551438	29.76003617	26.07074292
Zm00001d028398	0.013264457	0	0	0.005514285	0.116519122	0	0.196327233	0.239908742	0.136322954	0.951281415	0.234176686	0.58775055	0.029686707	0.004846988	0
Zm00001d028399	3.4158039	2.050117801	2.222237475	2.180021722	1.405186447	2.171001878	5.481102413	6.487407547	3.243530054	4.578253719	2.032382863	5.897867067	42.89874858	47.588859	51.04211217
Zm00001d028400	43.82309337	25.99515915	33.50373597	0.298191603	9.113818631	0.910165207	1.376969081	1.873928865	3.907068664	28.51197861	35.03967479	16.35516557	0.019111243	0.074887629	0.691072358
Zm00001d028401	0.152083651	0.171026715	0.02700143	0	0.007156876	0	0.006346777	0.072041461	0.026794474	1.947663975	0.273974805	1.678696834	0.267435911	0.214353564	0.025118494
Zm00001d028402	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028404	19.19175333	16.56370237	19.14591188	27.79213738	42.73054292	26.27453709	20.60179818	24.01215433	31.97420598	26.22941786	11.5904375	5.12283214	10.73809411	9.695533467	10.759982
Zm00001d028405	0.098442729	0.06199449	0.07646557	0.015346688	0	0.015075726	0	0.01483744	0.151758983	0.016971094	0.03103486	0	0	0	0.028453307
Zm00001d028406	7.633937189	1.46633562	5.456851017	3.308396711	20.32585371	6.856548617	21.73705003	26.47129321	23.69074034	60.52142987	61.82861409	75.14151253	2.010028434	1.814106115	4.528307472
Zm00001d028408	0.42391423	0.233590674	0.31281235	1.156503771	4.904935687	1.671667258	4.442614539	5.638558011	5.260713376	2.448211875	2.322036024	2.171867376	0.281659346	0.130699593	25.42407755
Zm00001d028409	83.81980471	84.87493784	92.97123049	84.73712281	37.84670141	59.38576655	1.04070599	0.483255915	0.885584107	0.046062424	1.214371569	0.104826683	45.35995083	45.72953132	42.24322086
Zm00001d028410	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.042120752
Zm00001d028412	0.758927403	1.096597454	0.63927811	0.578417483	0.599998916	0.795486923	0.798126009	0.815958549	0.413385853	0.197707357	0.241916373	0.231193967	2.012284184	2.107639271	2.988114972
Zm00001d028413	0	0	0	0	0	0	0	0	0	0.775051347	0.386544049	1.448789	0	0.044803847	0.011813014
Zm00001d028414	1.748162212	1.668043011	2.069162993	5.710131625	3.948788877	3.551019988	2.445082987	2.491137653	2.277300421	2.233570713	1.832302242	1.789827585	6.732547494	8.536676675	9.707472179
Zm00001d028415	5.562897244	5.913962844	5.857044303	4.348841235	3.751258585	4.674739699	4.242052689	3.98402707	4.269966127	1.768923638	2.443249066	2.190075563	3.998861701	4.442967134	3.580022148
Zm00001d028416	5.196306106	4.548223335	4.843488392	2.169846281	5.023094554	3.107305057	3.198581606	2.787802303	2.117089313	6.707988105	3.773658141	5.781929552	2.4747654	2.38196559	3.727954543
Zm00001d028417	18.211923	19.94734042	18.92802234	11.88858895	13.20457207	13.26253471	14.47772403	13.57948781	15.50145935	50.85673576	33.88889818	69.14125307	8.883968489	8.500072613	8.850853511
Zm00001d028419	0.02516178	0.073946496	0.239745365	0.2719659	1.712974068	1.171411695	1.0192534	1.3349327	0.620629067	0.335455018	0.475947182	0.130074365	0.431738214	0.165499362	0.271510882
Zm00001d028422	0.131961717	0.332412543	0.131201929	1.755487247	2.098138993	1.217922736	0.442032168	0.880440725	0.683530662	0	0.05546932	0.009745413	1.023841167	0.491847633	0.650947215
Zm00001d028423	0.181232496	0.44660152	0.450472558	1.955610264	0.913671099	1.969350407	1.289035834	1.130630058	0.845450605	0.163010537	0.059619128	0	6.207595977	4.612678673	5.402217036
Zm00001d028424	2.545800647	3.17061913	3.30091427	7.214727283	6.30133596	8.446441407	7.162709727	6.27650353	6.0908004	7.404649436	6.707630016	8.649425759	9.521308073	9.300055049	8.209156489
Zm00001d028425	4.269812313	4.247555175	4.399246121	5.533866027	5.475949554	5.375079654	4.623090349	3.808715669	4.071271716	0.299595732	0.669116911	0.094676984	2.21966455	1.983156667	2.13269358
Zm00001d028426	1.76882954	1.603217252	2.03394719	8.865263665	25.41979485	10.16694599	13.25119486	16.16547199	12.41595841	0.866367169	2.584937374	0.146499371	3.107806961	1.884687082	4.969179127
Zm00001d028427	0.721537346	0.741372307	0.436565306	2.522004296	2.101616572	1.826120656	1.708420062	2.060549528	2.529063449	0.340435432	0.850021101	0.168270806	1.529854974	1.914991078	1.383008556
Zm00001d028428	0.796007402	1.070710383	0.633907792	5.021559362	7.250348054	5.254815339	16.10126302	15.9532427	12.43801696	3.229525326	2.621550917	3.501440564	9.841576942	10.88646094	14.24220714
Zm00001d028429	0.082289233	0.113065738	0.097620696	0.569116478	0.611140406	1.154796525	1.870651221	1.632654291	0.784205721	0.082538486	0.099052574	0	0.435307571	0.463342872	0.635692031
Zm00001d028431	0	0	0	0	0	0	0	0.010156744	0	0	0	0	0	0	0
Zm00001d028432	801.4529327	831.5502446	893.0221049	622.7239554	294.3971832	492.0341256	286.1833595	214.6768728	245.8925917	11.72681902	8.713373291	1.251770628	519.2178529	492.9832812	430.0337406
Zm00001d028433	0.014330434	0.144393876	0.089049527	0	0.037764898	0.122897196	0	0	0	0	0	0	0	0	0
Zm00001d028434	0	0	0	0	0	0	0	0	0	2.78186835	0	0	0	0	0
Zm00001d028436	46.3922588	46.12640484	43.6190141	36.0192399	34.59868697	36.66877074	41.44906098	38.31651983	48.27050479	41.46129124	45.29842522	46.53683512	40.34061311	43.56877897	40.76074786
Zm00001d028437	0	0	0	0	0	0	0	0	0	0.06092047	0	0.008155289	0	0	0
Zm00001d028438	4.629797303	4.029971635	4.510573847	8.522336689	10.90297075	7.877815534	8.77792056	9.530871899	10.25920322	4.312553595	6.894278534	4.39635959	5.328846873	5.266185204	4.894094936
Zm00001d028439	4.744172084	6.152036588	4.235205951	6.183394944	5.353091226	5.214661374	3.224637175	3.440291881	3.864877021	4.478726464	3.985560091	2.07994559	5.675268454	5.61825127	5.469459895
Zm00001d028440	0.864746724	0.086440611	0.272942165	0.667627134	6.456773805	2.135682511	3.496500456	4.733471205	3.79190236	0.09465304	0.657745837	0.13684674	0.844799434	0.4213181	0.507817255
Zm00001d028441	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028443	4.389389298	2.499640164	2.555811447	6.225759566	12.22290777	7.863219737	11.87938744	13.92474877	13.27425943	3.133585902	3.896920461	3.570226112	2.301278004	2.2301554	2.288103809
Zm00001d028445	0.094392869	0.198146947	0	0	0	0	0	0	0	0	0	0	0	0	0.072754026
Zm00001d028447	0.077384343	0.054147703	0.053429716	0.11795715	0.407860898	0.558304405	0.703294708	0.839771128	1.028591843	5.016111044	1.062582848	1.514437251	0.307895341	0.094257149	0.228637533
Zm00001d028450	22.39265506	24.65579071	26.28122793	25.10656517	30.61195694	26.19799865	24.37764866	26.84531688	27.04014347	21.51642207	30.56041374	22.19524431	20.38291175	19.32929815	18.90591191
Zm00001d028451	0.027535214	0.086701761	0.102662536	0.06868145	0.725633689	0.371078456	0.434361125	0.498018013	0.441461226	1.215219206	1.250020393	0.762556521	0.200283129	0.648978981	1.034620125
Zm00001d028452	0	0	0	0	0	0	0	0.009457485	0	0	0	0	0	0	0
Zm00001d028453	2.220361662	2.43954687	2.074496688	2.834603018	3.126228858	3.254006858	2.12527587	2.167750319	2.052122899	0.282334626	0.714880159	0.238402485	2.044114153	1.530624635	2.120994939
Zm00001d028454	3.147830331	2.537024669	2.817497102	3.734799118	8.053253418	3.040178606	4.90431969	5.63332308	6.101867369	4.584325098	8.199801136	6.083201733	1.534140283	1.368550438	1.221961941
Zm00001d028455	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028456	36.24553298	33.51521534	28.18657746	22.29994971	32.5345625	27.67942409	33.19022663	38.26895254	41.37771383	36.27981372	94.3573333	41.58856521	11.16474543	8.53476654	8.548920152
Zm00001d028457	0.251494369	0.240736148	0.287553307	0.865681915	0.755548058	1.158512451	0.246851785	0.181946978	0.322568799	0.235859495	0.266399673	0.222875239	0.101314899	0.011027878	0.302392284
Zm00001d028458	20.70498471	15.53450528	19.57618342	36.69493084	56.45647002	35.13676633	56.78012698	66.11676312	50.64235747	60.80017421	62.27588763	51.41404727	39.52125351	33.17749193	38.99912326
Zm00001d028461	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028463	0.694971679	0.88838387	1.495383438	5.601459454	8.870252472	6.595447328	6.242064513	7.82946285	7.483571663	0.801118048	2.027449932	0.769858087	5.072432654	4.798532767	7.063447123
Zm00001d028464	1.18146466	1.285424495	1.571368301	3.393785169	3.318992228	2.923933399	2.682656179	2.684917904	2.926319896	0.626182032	1.630512064	0.568556329	2.171464067	2.852171925	3.010304833
Zm00001d028465	19.32133798	12.64418809	16.6614951	20.02293936	21.68642298	12.97903228	13.94113999	19.10000153	18.43136647	8.81865954	12.19831747	3.115493608	6.364987025	6.069412602	6.488548312
Zm00001d028467	6.190747436	5.523065757	3.490741459	8.864658557	7.288625308	2.422830435	5.994750134	5.287447846	4.135575452	0.039528062	2.204678699	0.317492086	1.828128586	0.94257149	0.76212511
Zm00001d028469	0	0	0	3.404672289	0.906357551	0.632042722	1.054942063	0.725728136	0.371141387	0	0	0	1.683802645	3.063357344	4.125416358
Zm00001d028470	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028471	27.63408129	17.2687715	14.01759318	444.3215096	281.0838898	768.9280716	1688.423602	761.5540751	1041.853448	3.960480285	3.621244151	1.828713095	1605.899718	1745.609278	1602.489914
Zm00001d028472	51.22984976	49.84862219	46.9268086	39.64204348	37.70616172	43.68658023	42.15982989	35.19821843	31.46683494	14.20138929	23.23003255	17.89103029	67.27261934	72.28639212	65.27224105
Zm00001d028473	0	0	0	0.324765141	0.110288916	0.04557587	0.130406832	0.145780375	0.068818053	0.076958716	0.070366794	0.103022942	0.104071767	0.091756449	0.215045062
Zm00001d028474	2.759062555	4.205292933	2.380373208	0.948169513	1.08796558	0.807053892	1.28115029	1.863335217	1.060036495	0.454259617	0.674232328	0.287393208	12.19844759	10.51307844	9.945142148
Zm00001d028475	6.870492557	7.1072176	6.215457079	13.33566859	14.30998689	13.36512381	14.67076863	12.85110073	13.20446393	12.24605573	15.65661171	13.40586036	14.79119988	16.35558707	15.58807894
Zm00001d028477	22.12254216	19.99978728	23.46890285	38.73215063	108.8537842	44.83751629	65.38577647	78.04964929	67.25235033	31.92222858	45.395237	26.12606724	34.54854309	34.54196881	40.43583152
Zm00001d028478	1.662717639	0.46537756	0	0.460815402	4.381748837	0	1.079380875	0.445524222	2.961966202	1.019182999	0.698913429	1.023268413	0.620211476	0.405050992	0.213592055
Zm00001d028480	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028481	20.41538946	19.72684334	18.99568805	24.71320961	28.57956193	26.59875338	30.00143758	31.14281743	34.40872462	25.94356145	31.38646107	26.77753605	24.51324981	23.9448306	23.25974845
Zm00001d028482	2.724391106	2.544719005	2.309748474	4.433746546	7.930920269	5.192058468	2.706344673	3.352902425	3.090788149	19.27237265	12.7567896	11.17501844	4.781781511	4.020683816	4.858944287
Zm00001d028484	0	0.009045952	0.062482032	0.152273648	0.189270883	0.1847816	0.083923493	0.268461404	0.168294214	0	0.009056929	0	0.128593011	0.106289977	0.228347692
Zm00001d028485	0.976370194	0.787964856	0.622013284	1.621876625	1.797331502	1.593240776	1.071380663	0.954685213	1.052353483	0.175394284	0.367300941	0.124972316	0.826328268	0.926421203	0.789697737
Zm00001d028486	0	0	0.017302087	0.173626985	0.018344049	0.255842141	0.146408893	0.016786554	0.103016841	0.595215326	1.106019825	2.159075511	0.140210741	0.228923931	0.225337443
Zm00001d028488	0	0	0	0	0	0	0	0	0	0.091306952	0	0	0	0	0
Zm00001d028489	0	0	0	0	0	0	0.135379974	0	0	0	0	0	0	0	0
Zm00001d028490	5.233299619	5.340359009	5.912955733	7.934931702	10.18603939	8.124878868	8.280308733	9.261880607	9.926732935	4.306641938	6.602312772	3.713433357	4.605817667	5.220757481	5.243326279
Zm00001d028493	6.501065819	6.313384166	6.120439367	4.822984597	4.516539258	5.380424238	4.797089154	4.064692474	4.67490368	4.567089641	4.368957801	4.667054657	3.648554999	3.443689436	2.900900805
Zm00001d028494	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028495	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028497	0.109369871	0.055100703	0	0.036373696	0	0	0	0	0	0	0	0.008076999	0	0	0
Zm00001d028498	0.009553623	0.12032823	0.01187327	0.095318909	0.050353197	0	0.033490224	0.034558483	0.023564532	0	0	0	0.021381621	0.041892066	0
Zm00001d028499	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028500	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028501	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028502	0	0	0	0	0	0	0	0	0	0.038322938	0	0	0	0	0
Zm00001d028503	0.151902599	0.191321886	0.094392499	1.515570657	1.000769796	0.977032708	1.553109148	0.549479874	1.030359183	2.932982187	1.771874971	8.119066376	0.169983886	0.582823372	0.658575503
Zm00001d028504	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028505	15.94184755	17.03929351	19.04430221	42.22511638	16.79204694	34.83819484	13.78003326	7.181463051	9.207257079	0.147559973	0.209876612	0.01316902	88.33249592	81.77627307	80.11485091
Zm00001d028508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028509	56.21620201	58.81644852	59.7890149	49.26825883	51.7771358	47.8450229	49.08304052	56.87847271	51.0024399	42.78433322	52.51143281	33.1077217	40.79202345	37.6181725	45.0612112
Zm00001d028510	13.11054632	15.68639126	14.45539574	1.547310356	2.625055853	2.031526498	1.547300961	1.179511772	2.133299594	0.065811119	0.842436664	0.105719878	9.344663893	11.25978137	11.76471003
Zm00001d028511	8.665804992	8.578015524	9.27421394	7.844740059	8.770986702	8.170495009	6.860956472	6.889001407	7.310634217	0.829890634	1.919333081	0.555862592	3.571836241	3.396358119	4.13079097
Zm00001d028512	0	0	0	0	0	0.048050789	0.006547064	0	0.041460057	0	0.007065518	0.01241342	0.106588256	0.049137333	0.064777918
Zm00001d028513	17.97988516	18.50965909	16.68672842	12.62061127	18.52020834	14.35232277	13.67522243	18.07105446	15.78330909	16.38158705	21.86555227	15.18307193	5.994321024	6.548784392	7.566325709
Zm00001d028514	6.006190635	4.80742631	4.123253916	5.849849082	11.23724777	7.224616144	6.410594515	8.922516481	7.503497491	5.20678846	9.724883672	7.004776332	3.433299486	3.745296524	3.487018258
Zm00001d028515	50.39640718	52.31257253	48.53811186	40.12895832	55.8707185	39.67858773	41.72575272	49.07956229	45.56747139	19.70959471	42.7948769	18.45334239	34.63325359	32.12058038	37.63015639
Zm00001d028517	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028520	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028521	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028522	1.189164508	0.576060422	1.570911656	1.721610828	2.311997376	2.659077547	2.380678256	2.486697241	2.358818302	1.020732852	0.639678674	0.313204784	3.312824641	3.22710334	3.624568826
Zm00001d028523	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028524	0	0	0	0	0	0	0.022659343	0	0.167408455	0	0	0	0	0	0
Zm00001d028525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028526	0	0.050793421	0	0.010059097	0.021255288	0.227274359	0.03769873	0.19450615	0.009947152	0	0	0	0.180513861	0.132627316	0.19582422
Zm00001d028527	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028528	1.93823771	1.636174828	1.761584683	2.310261114	4.129150185	2.737141723	4.062864375	4.13180321	3.908552603	1.444724992	1.339634499	0.514646425	2.629231277	2.822205937	2.771148869
Zm00001d028529	35.6174416	42.43867283	34.61498342	25.43615088	20.28133475	22.25409165	20.00888668	18.16229514	22.51986568	7.19327799	14.40004229	4.612738171	18.71011445	16.75689974	18.24975659
Zm00001d028530	2.745727176	2.397883116	2.913022526	4.748752704	4.24819425	4.66490874	4.20331609	3.483756235	3.586821967	0.475000614	0.820371443	0.360327967	2.35527008	2.328263714	2.732005305
Zm00001d028531	16.13043813	14.48838753	16.7694697	24.03165957	32.53153226	24.2020004	29.52981694	46.58548898	40.16571774	29.76617425	35.88748142	23.08396663	15.33475933	12.29102069	15.22595387
Zm00001d028532	11.87184307	12.64721603	10.79587428	18.1980255	17.61869609	17.96540799	18.19826357	20.91099279	17.14100492	12.46533276	14.9446935	9.828949786	19.78859309	17.32221095	16.94163064
Zm00001d028533	22.21643245	21.25925115	17.20614749	14.4348644	13.9584182	15.38822366	13.89804483	14.43283046	17.02080752	8.908055291	12.34054516	8.973776024	12.00599623	12.56332357	10.26782639
Zm00001d028534	1.819650776	1.216028934	1.513291504	1.626254157	5.268259744	2.891716233	5.253273898	6.234377834	4.687186386	1.312761219	1.816230333	1.089649933	0.950757329	0.889052601	1.234418689
Zm00001d028535	19.03762361	17.9217848	17.4701948	8.484365909	16.84056999	9.338204803	17.13323806	17.49364497	17.16790791	15.14613033	17.65158518	13.67793957	6.217734503	6.878479913	7.082760771
Zm00001d028536	139.9077151	138.326125	160.4223303	109.3684679	104.868629	126.5854633	89.64465884	65.453089	94.17767414	10.79746766	21.12456465	6.507099177	45.23902849	43.54482405	47.29208104
Zm00001d028537	0	0	0	0	0.038906817	0.144700926	0	0	0.048554134	0	0	0	0.506647436	0.604222934	0.534825894
Zm00001d028538	0.001556734	0.009803558	0.007738852	0.038829811	0.254351877	0.102989426	0.094590244	0.198969028	0.138231662	0.203964259	0.078523637	0.094846332	0.026130522	0.01706546	0.136784527
Zm00001d028539	9.582640599	10.36356682	8.278310349	16.01972348	22.37983148	17.03089324	29.13292695	26.70369482	26.81910274	25.98567395	18.06694843	16.22948332	12.26743522	12.69916879	14.73239555
Zm00001d028540	15.02892888	14.95081577	12.58479851	11.19431844	12.80847302	11.97851726	12.76885243	12.49403548	11.48834339	13.978622	18.40504163	12.87793883	6.910724195	5.808710569	6.300523707
Zm00001d028541	0	0	0	0.034867423	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028542	47.23777624	53.63920197	43.96195594	42.96998991	36.66171532	42.29117833	25.36603878	30.07915714	27.38095941	73.42017057	88.76338087	95.4948285	92.92375242	101.1648882	97.20717981
Zm00001d028543	15.98153961	15.39304601	13.29390932	12.00066879	11.85702922	12.82897193	11.53400775	12.48691273	13.91857479	9.168556482	12.35997051	13.96071856	8.16310449	7.984142006	7.559011095
Zm00001d028546	9.648064473	10.46687372	9.906278952	11.12667155	15.36983648	11.98555057	13.62082134	13.29425392	14.38080504	13.73329856	15.8657813	20.06497439	7.036266782	7.084393596	7.682615971
Zm00001d028547	8.946616316	10.42422921	9.869568609	5.43265217	5.651405908	7.019856851	3.758785164	6.262454448	4.876298807	14.78814548	0.802836831	0.408304161	16.16096799	15.61134031	17.16170281
Zm00001d028548	69.24334542	70.08487034	81.98892266	335.706962	200.624534	314.3491374	10.29867148	7.996685828	9.793394633	11.49345679	25.2362273	7.233854531	61.78010088	36.03230206	56.00974468
Zm00001d028549	7.356562927	9.403369986	7.797813994	16.22458271	8.03986851	14.16095045	6.578269699	5.608165116	4.955189579	0.84152331	2.337362693	0.644034368	16.83806696	16.21107871	16.79076373
Zm00001d028550	26.35063322	26.99889434	13.59251981	13.69585542	20.21554988	17.31838369	14.77411391	13.59693336	14.8878637	3.302685824	8.248092074	3.335721266	6.609373452	6.62165713	7.747947093
Zm00001d028552	1.450908234	1.209703403	1.066677563	3.644505671	2.18104987	2.879148274	2.292353284	2.094430014	1.38613343	0	0.180387223	0.090549312	3.818920489	4.18915966	4.465319105
Zm00001d028554	3.838442042	3.771712598	2.545080393	3.959335649	4.298375955	3.763354115	4.503256633	4.43595909	4.264284626	1.6108615	3.218281081	1.310954339	2.850125	2.628486715	2.5579598
Zm00001d028555	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028556	2.24598843	2.275363855	2.396895234	2.587972215	3.184592458	2.84137063	2.624437499	3.179133558	2.67960294	1.750810795	4.2483952	2.163481788	1.420579619	1.659262456	1.270109898
Zm00001d028557	40.98504089	39.7083159	51.18566813	38.96160414	59.59300899	42.27663541	162.0926852	190.5554733	170.5836507	65.7351668	106.6919921	88.92953336	31.75170702	29.9737734	39.06719587
Zm00001d028558	3.80207369	4.574998788	3.230638027	3.238888181	3.412230746	3.30222141	2.934036432	2.802258398	2.64780523	1.305833947	1.640562756	0.8118408	3.332711592	2.523426147	2.746611703
Zm00001d028560	0.07723861	0.176034665	0.061709382	0.327976095	0.654256283	0.385270594	0.373906595	0.532183897	0.32659415	0.060871301	0.06261452	0.077412719	1.352051007	1.139035645	1.024805141
Zm00001d028561	0.028481737	0	0	1.633974614	0.825635082	1.081714784	2.462787363	2.747399371	2.037301112	6.559928909	2.262732226	7.414432377	0.637439573	0.093668042	8.100478685
Zm00001d028562	138.6574709	122.2860344	165.9423945	266.6747745	196.7433789	305.3582505	205.8201009	145.647366	175.7440449	0.661128824	1.011374389	0.183815715	571.3384215	601.062077	474.909764
Zm00001d028563	0.430076949	0.311878384	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028564	0.812999826	0.215573956	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028565	0.425647916	0.109038331	0.286913347	0.062982158	2.8993278	0.69824878	2.672307817	2.879332533	1.895129339	4.029672096	4.348630749	3.404486908	0.19375472	0.166081594	0.892465378
Zm00001d028566	6.827072439	7.870504072	4.668888964	4.173739503	6.098440945	4.459456431	5.364882742	7.562216768	9.620978871	0.985953387	2.162166349	0.567913969	2.80473412	2.682028265	3.450935635
Zm00001d028567	0	0	0	0.047519983	0	0	0.071236731	0.05513176	0	0.042039878	0.13453629	0.050650075	0	0.008353894	0
Zm00001d028568	85.3866933	82.31798986	87.10754681	41.95083447	35.98603322	36.79228609	41.49317899	39.96379076	40.14980876	30.21493218	44.9225717	33.8137887	27.24855066	24.52273548	20.65507325
Zm00001d028569	2.758097293	2.418589349	2.834941784	5.232125494	9.399759968	6.46214559	8.628770125	9.051485737	7.768389928	3.504453106	4.866184098	2.577693465	4.427717148	4.669365505	4.768964545
Zm00001d028570	34.29857703	37.14627907	31.21671921	33.94428737	34.1713695	34.43508014	39.61759563	35.69570274	33.92088491	67.20009017	70.67760076	83.78174896	27.96782331	28.27695301	27.20742837
Zm00001d028571	2.848904972	3.109287642	2.973545464	7.850227984	5.873580883	7.41061302	8.462493856	8.951090633	6.716753876	12.12618438	4.913029444	10.74427455	5.943980817	5.617677684	6.168121783
Zm00001d028572	12.81009815	16.92123537	28.16152981	6.745662108	10.31588067	3.123654532	9.325779659	12.07317451	11.86268543	13.53763701	14.01759265	5.904372487	5.668462236	5.694893546	5.836893135
Zm00001d028574	6.168914409	5.733221978	6.152443802	0.258046293	1.050135122	0.356764025	2.122217689	2.430154825	1.427087372	78.06176244	25.92744208	93.54026947	0.488798955	0.789667797	1.3998421
Zm00001d028575	31.87011819	30.08554302	35.92487937	35.73614943	31.70704601	32.37032456	30.01913548	33.04482749	29.55240193	30.43916015	29.46998991	24.49085334	36.39756438	37.34278688	42.45989368
Zm00001d028576	1.874234238	1.800334794	3.213849585	1.449819218	0.562688788	1.002767998	2.259347872	2.574569475	1.163040024	0.253579805	0.112190008	0.072272494	3.557493563	3.608556233	5.019459625
Zm00001d028577	25.34666727	18.3501429	29.64062257	5.517451569	11.48328554	3.891829973	6.801937873	10.32781515	6.748271491	17.89149718	30.85138783	13.54150097	2.084473931	2.807762228	3.807239403
Zm00001d028579	19.75454875	19.85827962	19.84966353	10.98623064	12.09324971	11.18352421	11.8159912	10.76376503	10.56066969	5.69061878	8.862216458	5.90450801	7.138049131	7.602966506	7.455683494
Zm00001d028580	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028585	99.95271821	102.6543684	97.97640107	73.71477704	36.82300525	64.03870308	38.10168557	30.11909629	32.78814174	5.546144507	11.37097451	5.123309	144.3597194	143.2363725	126.8332345
Zm00001d028586	6.857303562	7.014326494	7.638245782	12.23587699	8.852621655	9.017537193	4.743796759	4.790516162	5.632622276	0.251238956	0.443029515	0.240234336	4.14982869	4.150873124	6.453705626
Zm00001d028587	0.25926483	0.113034812	0.161107547	2.064426113	2.404475353	1.624824635	0.151475478	0.456897926	0.307447538	0.027505303	0.289217276	0	0.669520777	0.568430422	0.968408617
Zm00001d028588	7.006864149	7.387261536	7.386853469	1.076759163	1.203430903	0.786754641	0.61698222	0.636662485	0.888780127	0.42315244	1.20571078	0.908978517	0.199615733	0.078219659	0.19798512
Zm00001d028589	5.12671272	3.348133	0.943924986	0	1.501154694	0	0.887490942	0	2.107552874	0	0	0.631015521	0	0	0
Zm00001d028590	9.979837426	8.866637928	7.937089671	7.98526475	21.32823372	14.4078556	13.81813853	15.83447379	14.80574779	24.71183916	19.99989069	19.54112583	6.744521931	6.607122093	8.025651289
Zm00001d028591	0	0	0	0	0	0.012270426	0	0	0	0	0.05051975	0	0.033623186	0.010979404	0.220007641
Zm00001d028592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028593	4.005046278	4.224926437	3.801369105	6.227843265	5.845039909	6.355974741	5.14393699	5.032936796	5.231107752	1.176973692	1.481051407	0.748794686	5.115275286	5.622398162	5.128585498
Zm00001d028594	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028595	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028596	9.263124321	9.261912386	11.33551522	11.31188834	10.62630158	11.6970165	9.257334933	11.54887492	10.54715911	9.119264823	12.64171348	6.593315226	9.592849914	8.105834708	8.630959785
Zm00001d028597	12.80112206	11.50991444	12.15558981	13.69240567	14.77244266	13.04322619	10.50794007	9.881848987	10.09040976	0.954995866	2.26341441	0.555108623	5.622892492	5.02392803	6.84163608
Zm00001d028598	1.549406511	2.927224851	1.585793977	1.818684788	3.722863642	5.471383164	6.176936953	4.285943018	5.226731128	4.02237557	3.218108055	2.423099602	3.110705115	1.99825156	1.685953287
Zm00001d028599	0	0	0	0	0.025660764	0	0.037926963	0	0	0	0	0	0	0.853953658	1.951334823
Zm00001d028601	5.117903935	7.655340916	6.83129217	49.37078832	63.55919927	96.35067764	332.3116049	247.0322728	241.7167601	307.9104849	205.4120978	290.6411955	227.0237752	240.6303026	271.6623949
Zm00001d028603	7.049908127	6.733847084	6.064718038	3.531820905	3.130979791	3.492725769	4.193394699	3.92158553	3.914026767	1.088645174	1.005658767	0.655054208	3.247906394	3.443415634	3.430864763
Zm00001d028604	0	0	0	0	0	0	0	0	0	0	0	0	0.029591005	0	0.03057217
Zm00001d028605	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028606	28.44498671	28.76678843	28.64842783	22.86372781	47.89942507	27.09577344	39.51968534	45.7468583	42.29246749	26.10489307	32.61671154	21.36333581	18.00787355	17.53465744	20.73110706
Zm00001d028608	12.1955725	13.17884471	9.91681808	7.517849443	12.2519748	8.121531669	18.34826032	22.09025883	21.77555777	109.8918831	69.77133775	110.7631446	32.50662883	34.61130762	32.93234317
Zm00001d028609	0.019282417	0.072858828	0	0	0	0	0	0	0	0	0	0.053400467	0	0	0
Zm00001d028611	0.315775783	0.163767375	0.23854626	0.208493925	0.726101999	0.235155388	0.629443304	1.015343246	0.748333992	4.645406569	8.026531154	7.366420326	0.097001674	0.08823801	0.307812463
Zm00001d028612	10.34303091	10.65383444	12.77798678	15.17273545	18.6885326	12.50852789	17.15948778	16.95361499	17.41612233	29.65937043	25.6725474	22.15502586	9.075993557	8.217528887	10.07546522
Zm00001d028613	20.60520508	30.92807749	20.88179377	21.32293428	13.16480268	17.53236493	27.89850122	30.23127581	20.73185106	3.798106429	5.00245471	1.906665604	35.63241352	32.9927146	38.98387941
Zm00001d028615	0.018600318	0	0.061644081	0.061860027	0.049017296	0.037979891	0	0.037379583	0.084110954	0.145366464	0.046911196	0.123627531	0	0	0.014336337
Zm00001d028616	27.48845005	33.9966631	33.21930561	22.91258815	10.46400197	23.37545724	15.01958776	7.225675014	9.451918924	0.100666767	0.368176499	0.16979809	3.610229038	2.848548673	3.299558206
Zm00001d028617	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028618	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028620	18.41344319	17.13825579	13.17660286	14.4926444	21.68230311	17.36850108	26.7911328	29.18253269	26.98545826	6.059096013	10.42473061	2.042912751	15.39416568	17.34419909	16.95008701
Zm00001d028621	0	0	0	0	0	0	0	0	0	0.006980705	0	0	0	0	0
Zm00001d028622	22.88745208	18.56872098	23.92580299	28.64924962	46.70894102	23.71699618	31.17150435	39.1435187	32.91841824	3.431040192	12.13354411	2.687998929	16.9089234	16.99241073	23.07152971
Zm00001d028623	6.365188265	6.26767273	5.023218783	4.901125613	6.30400637	4.877322185	7.299363699	6.312844622	5.931932528	3.680939723	3.991157788	3.750642818	6.456761515	6.602369093	6.163970718
Zm00001d028624	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028625	12.39970095	10.18826902	9.291061114	12.81012104	9.601052714	10.17542922	5.658632877	5.491174204	4.715580046	14.35259753	15.17017108	12.02758873	32.45391555	34.17524229	28.33786095
Zm00001d028627	0.052649168	0.044207881	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028630	12.224857	6.488307428	11.45022049	20.28723113	155.2063419	49.69718337	308.3297877	338.8618494	285.7800972	250.2143499	196.9675349	237.7520162	17.9665577	30.29957528	23.95305916
Zm00001d028631	15.72191901	16.27083657	15.9045386	22.20838584	27.56804089	21.99648682	19.9179929	21.75314312	20.64868259	12.33920987	17.78542991	6.498661117	16.11189036	14.20908625	16.28598864
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Zm00001d028642	0.752388108	0.732263878	0.244393336	1.631442147	1.68985519	1.717859706	0.959089648	1.123701806	0.959536268	0.023583346	0.280323001	0.161009589	1.463838719	0.965384196	0.968711434
Zm00001d028643	51.94556859	65.70509479	38.54183596	69.42463057	41.97610842	58.63241761	70.07189715	49.782465	48.886807	49.85598934	46.62942149	31.8012916	96.5947757	92.11977111	84.44565886
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Zm00001d028655	18.52828762	17.65306139	17.86318546	39.99068791	37.4573838	43.96060731	39.62386027	36.201027	37.38102185	23.0008477	26.0690576	21.38736081	17.21265401	16.19031551	17.56201341
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Zm00001d028661	17.68214525	19.73410012	22.35723451	32.16330424	30.65279173	33.5609951	20.80119218	17.36932636	20.62823288	1.624203619	3.637374674	1.058782598	20.32166907	19.23410677	28.63200164
Zm00001d028662	10.5848695	10.69088032	9.017476554	11.35125457	13.60265834	10.3043929	11.34291349	11.4602739	11.80065118	1.72545196	6.697477147	1.415444768	7.116437579	7.272660921	7.555949184
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Zm00001d028670	227.2859024	217.2099564	207.6834072	236.1195147	145.8034277	157.1816926	141.9662164	142.0850643	117.0692074	13.82932636	31.71936733	4.951324092	1069.299688	1105.624158	989.7802584
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Zm00001d028676	5.914201508	6.93616805	5.139804707	5.732384703	9.741035163	5.224259083	10.12824694	11.35563031	9.698707271	11.46660747	14.99706088	11.78555008	7.529380282	6.001801805	7.333104032
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Zm00001d028678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028679	45.32539861	49.90189876	49.64537162	44.57307874	48.90761994	41.61515138	55.70917177	61.34731457	62.20847607	48.80514589	63.31008731	31.82648132	54.73350374	50.25218394	70.40881361
Zm00001d028680	3.921206628	4.137891946	4.536693733	5.000502021	11.99372174	4.284661709	9.721121709	11.06768894	12.55455269	3.865170323	6.0287554	2.908867417	4.117826697	3.633771409	4.458573172
Zm00001d028685	0.278406693	0.166099386	0.072843086	0.146196526	0.135152191	0	0	0	0	0.040417761	0.018477883	0.016231911	0.229560232	0.032126231	0.135526792
Zm00001d028686	2.273190304	1.327127165	1.449124275	4.562721519	5.877760634	5.648572731	10.83113945	10.22213146	7.698010029	0.62702084	1.085922612	0.355501702	4.393245506	4.462058207	4.600752809
Zm00001d028687	19.54320001	17.57287739	17.21450548	19.74135612	35.58151964	21.74959767	32.21065937	34.38049964	37.94594804	30.51063288	39.65395993	39.57888975	9.517753873	9.256722641	10.61217632
Zm00001d028688	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028690	12.93311566	13.60002193	10.64641027	12.65021212	12.97899758	15.14236876	13.6473607	12.65609513	12.0212969	19.15585549	18.66707716	19.41987299	8.331604556	8.567620831	8.961573885
Zm00001d028691	10.99290822	10.84294648	11.13811163	21.4365968	28.05818096	24.57380743	29.16396498	27.9649176	28.82061541	31.27597259	31.34352129	29.55516401	15.11740438	16.58398227	19.15752894
Zm00001d028692	3.413439743	4.658732751	5.176103356	20.74788462	17.18492728	18.8186883	21.08651251	26.24018078	16.73111425	41.58197157	15.79280309	11.29859236	27.10978628	28.30714475	43.31614113
Zm00001d028693	2.647943442	2.519849226	3.047103615	4.660053606	7.779298071	4.001048064	9.52301973	9.874082387	5.720932623	12.37605468	17.0667239	7.615642133	4.38982776	3.913362094	41.04522216
Zm00001d028694	0	0	0	0	0	0	0.009045774	0	0	0	0	0	0	0.016972692	0.008950063
Zm00001d028695	8.658604161	10.45163756	9.417275575	8.971623114	8.713994863	7.402646213	5.283016943	5.965082783	6.383987618	7.294084423	8.221544457	6.26306128	7.955664862	6.372377022	7.537657039
Zm00001d028696	0.175609941	0.287535782	0.261898262	1.335979914	0.740453953	0.494836274	0.441180468	0.78345878	1.093707593	0.193756049	0.243594747	0.038906545	0.658319096	1.174309684	1.563323737
Zm00001d028697	0.252321431	0.134824148	0.199554611	1.706924166	1.239208237	1.648684148	0.330575485	0.147511376	0.55635624	0.137088094	0	0.033880028	0.444924266	0.335277107	0.539236318
Zm00001d028698	3.549626523	4.219743823	3.480277031	7.135963333	6.372497248	5.804552528	6.211290173	6.28165311	6.549398487	3.632496853	5.045658835	3.465403565	6.792454454	5.993095308	6.107652791
Zm00001d028699	7.016215264	6.892238911	7.09915728	4.933568192	5.919468447	4.440704316	5.465182253	5.198421904	5.704108666	6.359763856	7.366269478	6.125756148	3.920519712	3.788784136	3.460815101
Zm00001d028701	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028702	20.90533976	24.09111457	19.98750577	132.7823395	117.7228399	128.2848327	136.0607189	143.1604515	142.2928972	10.25886146	19.86836411	7.71932889	156.2784588	176.6167634	169.1151013
Zm00001d028703	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028704	19.89833899	22.78831006	29.92270217	59.22024882	52.23751068	68.04024301	59.75157855	55.82438336	57.46052169	1.692463756	4.220441626	0.741490049	85.41311972	96.24738735	100.3340756
Zm00001d028705	4.515365589	3.716985834	5.093306906	7.933336103	11.11610204	9.747969351	8.541846454	11.68116254	9.787018992	0.776631439	1.867323242	0.288794289	5.192871576	4.584089677	6.317502307
Zm00001d028707	10.43288078	8.784140277	10.89794063	15.12744786	28.16008567	18.0083151	42.77748701	48.42045502	40.51129081	75.61079078	77.44566851	43.40001264	13.34515497	10.70364163	13.13693091
Zm00001d028708	6.83561696	7.916767684	16.11182305	201.6623542	113.8807009	27.24140456	217.3128681	186.4442056	194.8638543	52.44692285	63.21283679	20.01842344	42.64250935	30.49056259	282.9603712
Zm00001d028709	14.7249911	12.65776838	16.36157824	44.78610764	66.14377607	42.55215394	56.0866793	66.6977203	55.56391839	8.142315072	14.0715825	5.377755975	41.19434465	43.81053887	74.6613149
Zm00001d028710	0	0	0	0	0	0	0.037765572	0	0	0	0	0	0	0	0.074731972
Zm00001d028711	5.610207578	4.451733633	4.993593404	10.85388863	32.17230804	14.22654943	25.51103535	31.9736978	26.58600845	13.26740113	12.46736548	6.648748909	7.136213753	7.913807245	11.43993837
Zm00001d028712	3.055494936	3.397497315	3.397654089	7.463776931	6.606678298	5.849647885	5.679892314	6.223488618	6.174206152	2.579641944	4.632866563	2.426153502	8.929331373	9.654065091	10.06870734
Zm00001d028713	21.93041895	15.13847489	20.79729806	26.04628259	77.33817736	34.96266927	64.6655968	72.48330143	67.99449273	26.84560198	43.85855045	24.50501078	13.35720372	14.12243361	16.72709802
Zm00001d028714	0	0	0	0	0	0	0	0	0	0.071910318	0.026300327	0	0	0	0
Zm00001d028715	0.326992695	0.633969054	0.739716544	4.265979082	8.288019897	4.654287188	6.1306281	7.46471584	6.74688789	1.165445757	2.05710827	0.500606778	1.249868079	1.055244374	1.592899631
Zm00001d028718	0	0	0	0	1.166022404	0.243382369	24.7747141	28.26518666	51.71717595	528.2854969	503.121649	281.2211948	0	0	4.113269455
Zm00001d028719	0	0	0	0	0	0	0	0.023684477	0	0.189632469	0.099079681	0.10879578	0	0	0
Zm00001d028720	1.070345716	1.66981112	1.647669772	2.229870973	20.70631884	5.140970273	41.75629088	49.02787952	50.08625657	721.8200378	445.2302394	945.0142344	5.920702081	8.400123328	12.4590298
Zm00001d028721	0.217003713	0	0.185413837	0.270637617	34.70526686	4.602688097	29.23965691	33.45939948	38.01958479	39.6551163	44.7757594	31.47565518	0	0	0.125442953
Zm00001d028722	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028723	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028724	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028725	0.023080305	0.00968991	0.009561424	0.028784755	0.070960605	0.094255105	0.080908009	0.074212251	0.037952556	0.053052576	0.048508342	0.085224381	0.103310409	0.489161187	0.569258285
Zm00001d028726	45.49103087	44.05186418	52.06218263	45.87916547	74.51731902	51.4756661	68.7583607	76.44638749	71.75515019	63.87092458	94.30205925	61.94048359	33.18510415	27.41351359	35.78699283
Zm00001d028727	5.103689673	4.340287889	4.194128232	9.662503925	19.02375962	11.73385528	20.27228331	23.21856939	23.19132498	35.8005192	35.80587259	37.64702772	6.269679448	6.174519161	7.77582758
Zm00001d028728	14.77343151	16.21543578	13.64863268	10.89753452	9.693711906	9.891668128	7.789575666	10.24770625	8.671776567	5.146403906	8.716220995	4.545518317	7.571258956	8.123052723	9.273152491
Zm00001d028730	13.24951538	13.48502186	12.2971001	12.42652805	11.27110071	12.02976341	10.45130907	10.54940642	10.19232753	4.010569565	6.024427816	3.542053977	10.96677806	9.473754806	10.86467653
Zm00001d028731	8.864355275	8.400484049	8.222569733	9.826879433	12.94966336	10.26982808	11.49637835	11.96635497	11.06423999	19.38642494	14.3373032	14.07703224	8.050607227	8.567288403	9.122070082
Zm00001d028732	0	0	0	0	0	0	0	0	0	0.02701273	0	0	0	0	0
Zm00001d028733	64.31680188	62.55117421	57.79262322	12.97711628	25.35852699	14.530455	19.7981814	24.65627473	23.00800426	48.64848316	72.50497156	69.9959705	10.28375796	8.452415669	11.76031908
Zm00001d028735	0	0	5.76689937	10.49560336	19.24107769	9.862019408	14.36180597	18.00850099	14.70671933	26.90605921	21.81199412	20.81890626	8.542620843	9.51722002	9.556555472
Zm00001d028736	11.20794853	10.06101963	12.24551334	11.71787737	16.2286994	12.67501891	16.77666274	14.42649863	17.35950887	8.080665208	9.074780712	8.712399632	8.387621868	7.522375563	7.526577176
Zm00001d028737	0	0	0	0	0.035321287	0	0	0	0	0	0.202821936	0	0.119988625	0.058772105	0.123967153
Zm00001d028738	0.016733456	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028740	0.37391409	0	0.029043846	0.466329433	0.554272502	0.458095922	2.321130155	1.859778036	1.873380333	0.064461147	0.265228686	0.543644142	0.915297848	1.562735194	1.323905626
Zm00001d028741	0	0	0.20330692	0.408038254	0.800615837	0.028630995	1.06498913	0.732639832	1.325776851	0.805764337	1.001975035	1.139063916	0.915297848	0.819795512	1.377942591
Zm00001d028742	16.01866199	15.60806781	14.60633724	45.03267916	26.88205828	34.35817408	28.5779171	28.97229023	25.08384665	32.79437869	45.60253968	41.23450657	192.1089421	223.1789374	215.1411761
Zm00001d028743	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028744	30.79498663	37.34079891	24.16882542	9.269659051	12.73288152	7.563758385	16.13707294	10.58037077	10.45643024	29.09294788	11.94067804	9.351162988	16.21004086	13.28221712	17.17557777
Zm00001d028745	151.5228426	157.6066023	153.146699	101.8531435	77.42368504	90.83066494	68.47185547	57.72524982	57.49954038	10.12766947	24.04836182	5.871187895	114.6421214	104.4466542	89.4946841
Zm00001d028746	0	0	0.007554758	0	0	0.029789475	0.007103084	0	0	0.025151026	0.022996707	0	0.040814272	0.0066638	0.084335147
Zm00001d028747	0	0	0	0	0	0	0	0	0	0	0	0	0.149985782	0	0
Zm00001d028748	2.612337692	2.663534896	2.605026828	4.007850064	4.313600113	4.188553062	4.547280702	4.342340953	3.55925217	0.80349148	2.40793377	1.279256216	3.737634765	3.550123904	3.473251697
Zm00001d028749	0.002171761	0.024618066	0.002699071	0.029793784	0.020031294	0.015964224	0.015226215	0.039279737	0.005356767	0.002995216	0.00547732	0.014434668	0.0243027	0.035711406	0.150651108
Zm00001d028750	398.142093	522.332207	375.5844085	108.3096169	316.7395501	53.98970931	609.7643144	1102.770174	1068.431682	2534.235324	4490.366218	3463.742202	1.695207147	1.966943804	3.818661226
Zm00001d028751	0	0	0.006823554	0	0.00723448	0.013453118	0	0	0	0.007572243	0	0	0.233471843	0.77642907	0.641119285
Zm00001d028752	5.91208953	6.569141823	6.021049748	9.063213229	14.81205795	11.79673094	14.92223141	13.49967996	15.34802625	18.40595964	18.21354464	13.24922955	4.506549537	4.248774081	3.474478068
Zm00001d028753	7.880552037	7.644345152	6.547352295	8.492505001	11.78358627	7.819817742	12.71881923	12.36854698	12.21038277	22.1695023	17.11907572	17.67164997	12.2193512	11.50267419	12.22181901
Zm00001d028754	0.077994	0.070166951	0.263098896	0.305708018	0.117449756	0.313960912	0.468699373	0.510519198	0.206117641	0	0	0	2.555992419	4.433773327	7.394079974
Zm00001d028755	11.78591797	10.75337549	11.65513051	21.99458479	30.59090653	21.13109578	30.93000345	37.2035546	29.61535292	11.96817199	17.53874324	7.596054457	31.06726769	29.81433843	34.71922864
Zm00001d028756	0.944472119	1.026000786	1.276499593	3.607333007	1.415596655	2.849377401	1.82096587	1.39505253	1.077436357	0	0	0	8.547635307	7.622863787	8.81740466
Zm00001d028757	2.165964193	2.594964798	2.152555407	2.527171192	2.177772308	2.385468447	2.570612735	2.447862315	2.661927119	0.546442996	1.222921666	0.472347252	1.558146524	1.671184716	2.03298604
Zm00001d028758	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028760	0	0.03159444	0	0.375416585	0.363582421	0.829773519	0.351739529	0.151232993	0.185619336	0	0.189796674	0	0.336848802	0.357485371	0.493025331
Zm00001d028761	0.120416036	0.171886368	0.089792042	0.230272406	0.22213211	0.167196269	0.046902046	0.116155464	0.138605944	0.398576558	0.364436362	0.489101872	0.035933176	0.079202572	0.074249264
Zm00001d028762	1.248112336	1.463774767	1.527129425	2.789004848	3.51841977	2.771344459	3.817996071	4.292056025	4.495936176	6.286936989	5.694248169	8.812006823	1.81736386	1.737951349	1.738539982
Zm00001d028763	0	0	0	0.027063762	0.028593423	0	0	0.039248562	0	0	0	0.07211606	0.012141706	0.011894355	0
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Zm00001d028769	0.003536274	0.008907899	0.008789783	0.008820574	0.097850746	0.082315962	0.016528543	0.072486998	0.013083618	0.097542087	0.017837418	0	0.110801705	0.054272223	0.028618904
Zm00001d028770	0.381522807	0.376414687	0.252884089	0.380654956	0.360277127	0.327192349	0.832177553	0.552035595	0.352892574	0.131545713	0.200463542	0.070438942	10.59513515	10.78358778	9.681978835
Zm00001d028771	0.08723668	0.015696417	0.080539087	0.363695511	0.827619288	0.4183466	0.535892434	0.63413083	0.713148247	0.481255053	0.732340647	0.358936814	0.340277679	0.431709772	0.501405889
Zm00001d028772	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028773	8.806714343	7.194868737	9.188632132	23.63647055	36.69416654	24.09396375	28.87290987	32.32304896	31.2991095	19.53193796	24.70609538	11.832056	17.66241706	17.79183176	18.81562394
Zm00001d028774	0.590631985	0.25251759	0.383855345	1.250210634	1.692145838	1.666283062	1.025732693	0.770970573	0.95562445	0.351240435	0.1844932	0.066027783	1.461335905	1.645409281	1.033673798
Zm00001d028775	6.083995009	6.321076327	9.208785063	25.06596404	26.57628674	25.92852663	34.24562449	37.67861994	32.33405795	57.28293781	37.95755466	50.19277748	38.8490445	41.39235374	47.59533712
Zm00001d028776	6.10168756	5.292567533	6.438562013	31.19283712	29.35310484	35.8255121	41.70273224	46.85038927	49.97784332	39.17846731	43.77110881	73.42629453	23.31821056	26.97639606	27.81822924
Zm00001d028777	0	0	0	0	0	0	0	0.023515544	0	0	0	0	0	0	0.067642562
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Zm00001d028779	15.72191901	14.26304658	19.65251822	15.31673595	17.6836023	12.81308608	12.67337065	16.1547083	13.43213699	1.885488549	4.022635069	1.413474768	7.343303878	7.168727471	7.112615431
Zm00001d028780	58.51236915	54.68796373	55.09234092	28.20941029	33.64947882	30.62832871	36.19766425	44.4368696	36.6729987	35.11457606	60.01668212	44.19944675	16.90289204	17.48470115	20.17164967
Zm00001d028782	11.44267579	12.4050642	13.1248202	14.21947501	18.84288112	15.13545231	14.44262678	16.47730616	15.09823685	3.860183007	7.385335536	3.536943774	8.435587429	8.59892768	8.987218733
Zm00001d028783	0.088949274	0.105242126	0.113896311	0.40003356	0.298336737	0.356645558	0.566930333	0.529762734	0.365663748	0.078066363	0.115566916	0.029858779	0.392115825	0.307302093	0.311628787
Zm00001d028784	13.10341909	11.21158475	13.79879606	12.44172141	24.35611501	14.576561	17.41410341	20.04460448	20.13554669	17.44528702	22.96812629	14.8830958	9.237782434	8.6761146	8.998708341
Zm00001d028785	8.377576736	5.551053291	8.797112618	11.56867655	35.38778881	13.29815642	29.84996176	40.24476485	31.01060037	71.9533241	45.05943291	50.88024975	6.847663474	7.067528275	12.40882582
Zm00001d028786	107.4056884	91.10817371	117.4795926	131.9887557	201.4089684	114.8056593	138.8640441	157.8486809	135.7817509	13.97521959	56.72259916	6.801278617	63.17384005	52.31863682	75.44981841
Zm00001d028787	5.607438958	5.708406172	7.647334192	19.36065873	20.60750292	21.83568043	12.68902657	14.40016222	14.24925041	1.277524001	4.223923264	0.458087493	21.2217632	25.01441041	28.05459928
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Zm00001d028793	166.7973019	147.5169653	180.1572666	102.7639199	113.8975652	154.4305351	79.22362577	64.94305119	63.72883865	43.53971294	38.97821569	40.15657146	67.0321071	66.59331556	83.08183267
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Zm00001d028801	21.56249169	19.7469051	22.90636736	28.79310679	33.89610912	28.88267912	29.0981687	29.28575647	28.78377869	19.55069353	24.35571723	16.18315619	25.4668999	24.01027897	26.05137657
Zm00001d028802	5.478830985	5.159180906	5.684962206	6.865191277	11.78221983	8.152932939	10.94684006	9.800269589	8.908295325	4.29492193	5.328389147	3.42108226	4.858518634	4.532895788	4.571435249
Zm00001d028803	0	0.003995121	0.011826438	0.015823824	0.04179549	0.019430548	0.025945211	0.015298744	0.082150553	0.074369618	0.091999277	0.260019389	0.102936878	0.104317077	0.003667242
Zm00001d028804	23.10393561	23.42119729	21.15447675	23.28974686	23.65800046	24.14574723	20.58599465	24.07589449	19.10663066	2.51191731	9.342985821	2.241765668	15.70114316	14.62946917	17.69055117
Zm00001d028806	0.80739929	0.288586085	0.244079566	2.081944128	5.189945838	3.996800087	8.210530722	5.249221144	4.521230747	17.16953259	9.039577837	8.89565696	4.712881246	4.784321372	6.420716954
Zm00001d028807	80.04472879	71.08269453	105.4967494	134.1011675	182.6598956	104.420812	128.8223782	141.0486112	118.7337714	9.952072777	44.3933781	7.559416972	43.16100122	37.88422118	54.40077982
Zm00001d028808	0.103963756	0.065471368	0.236878514	4.602897574	124.2933256	35.91829097	58.59464908	74.21112217	47.48271216	0	1.769872029	0.115166331	2.094098064	1.253655922	4.287000992
Zm00001d028809	3.589203006	1.351104998	1.944652539	1.911228483	15.16564778	5.741147947	9.283312327	11.57311593	10.06651804	19.51119123	13.28334109	10.16772621	1.44411089	1.317431338	2.256641015
Zm00001d028810	13.67123392	13.20184927	19.39355902	44.41967979	43.59032272	43.4395643	52.44300593	59.33831937	55.25637514	124.110499	115.83154	229.6784068	49.12401803	51.11062418	59.79982907
Zm00001d028811	0.345849668	0.166552534	0.35397187	0.317153458	0.857802682	0.26170519	0.832022758	0.183977636	0.426528558	0.336694384	0.436127527	0.292971492	1.206582048	0.892076589	1.328911283
Zm00001d028812	1.941024827	1.918566031	2.203371014	3.297573382	3.057690165	3.354819647	3.086623051	3.14822175	2.849339232	0.137011465	0.224853833	0.087474483	3.08137363	2.471286515	3.351409379
Zm00001d028813	5.679093277	4.001119314	5.727267919	9.229667905	14.22556807	9.798713391	7.182109731	6.776363658	6.318098794	0.342667759	0.358075941	0.235914068	1.972725151	1.582345458	3.29658218
Zm00001d028814	1.909046178	0.213298048	0.669676511	2.188873161	61.7502012	14.14622647	43.30116276	49.100482	11.48711251	22.46449194	6.930891504	8.987707562	4.169199367	3.021005314	4.805821237
Zm00001d028815	0.925817196	0.194345031	0.556127362	1.327834901	97.38868152	10.47293364	33.31997594	37.48990789	10.44737271	23.62180913	2.685215928	2.615224599	3.194392441	0.659693658	5.637287374
Zm00001d028816	2.600423805	0.363915934	2.2868394	2.465541808	138.6004941	20.95970373	69.99430783	73.80388744	33.15820673	101.3004415	36.55081412	198.5445767	1.004020506	0.116694335	1.406523877
Zm00001d028818	25.61079812	26.96034142	25.27076221	12.41620255	10.44087676	13.04376615	11.7238348	9.997197711	11.07581401	5.040048009	6.385413917	4.402087752	6.837405995	6.901037476	6.33233506
Zm00001d028819	0.008037175	0	0.009988624	0.050118077	0.105901566	0.009846639	0	0.058146018	0.227977501	0	0.050675675	0.008903217	0.233840267	0.308372154	0.371682823
Zm00001d028820	61.94654986	50.50127358	73.32206573	152.0947082	184.3700061	162.1919795	118.4404737	123.8621411	107.1922003	75.60031745	62.11640565	80.96358691	37.10961731	31.48252038	58.7679187
Zm00001d028821	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028822	0	0	0	0	0	0.054601898	0	0	0	0	0	0	0.049873023	0	0.025763345
Zm00001d028823	0.663652132	0.404004953	0.288676088	1.365668947	1.122222441	1.084086222	0.814251398	1.226993894	0.982160563	0.88477618	1.408759161	0.551372786	1.386276352	1.067027532	1.048605655
Zm00001d028824	0.731082028	1.289120727	1.22659771	3.768665002	1.750009216	2.313828414	1.765490001	1.425121599	1.217196312	2.436683062	2.396986519	3.792841958	6.122146912	5.249417534	6.592798617
Zm00001d028825	1.059737534	1.935768127	2.233584963	5.982244557	5.993730982	6.476432326	5.344256422	5.15604415	4.081353526	0.598296457	1.8990422	0.610992363	4.590951918	4.796347239	5.466833458
Zm00001d028826	0.600333625	0.266361308	0.373048198	1.752662174	3.514679553	2.356913803	3.332076769	3.068203489	3.011991733	29.42077191	13.79017112	41.95686437	1.702383529	1.660223976	1.798266044
Zm00001d028827	1.304429864	1.563334713	1.234712529	3.827460474	3.680715837	4.385497615	3.695362615	4.172917609	4.311753883	27.07600604	15.87546701	43.25443378	2.404542767	2.180968904	2.62455977
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Zm00001d028830	0.275629716	0.339442055	0.22075665	0.06111172	0.064565793	0.116313418	0.089464813	0.073854822	0.026438835	0.016895059	0.01158593	0.016962783	0.150792157	0.100718325	0.23722881
Zm00001d028831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028832	0	0	0	0	0	0	0	0	0	0	0	0	0	0.019438245	0
Zm00001d028834	19.63481744	21.04540743	19.48447626	20.6286006	23.07948122	21.43613207	24.49913266	30.23269925	27.05993814	61.81505667	49.56756675	64.12987374	8.667079622	9.31283906	10.51552655
Zm00001d028835	2.596674619	2.01429457	1.688379032	4.804073025	7.228201471	5.182750321	6.691346797	6.738904117	6.298799534	2.158232175	3.209433909	1.257268662	3.194414161	2.469537305	3.459385283
Zm00001d028836	1.240388087	2.513222404	1.10590028	2.488584954	3.33984713	2.015181578	3.970077821	3.70655063	2.59391123	0.185945616	0.816088264	0.179223343	2.595020272	1.064157635	2.119911678
Zm00001d028837	1.210880719	1.106933767	1.359251981	2.460095941	2.830748852	2.392733162	2.30494076	2.449110296	2.504977131	0.430968811	1.009763497	0.216348179	1.180173837	1.113311583	1.399943355
Zm00001d028838	0	0	0	0	0.759204673	0	0.285629269	0.105264344	0.129198644	0.313044076	1.431150955	0.464195326	0.136768644	0	0.403724446
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Zm00001d028841	0	0	0	0	0.016914419	0.015726885	0.014999847	0	0.015831383	0	0	0	0	0.014072194	0.014841138
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Zm00001d028859	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d028862	0	0	0	0	0	0	0	0	0.019582373	0.635065829	0.140161501	0.24624996	0	0	0
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Zm00001d028867	7.358130089	8.834864041	6.013444626	9.51595869	2.980302932	5.980580166	6.79139665	6.9217203	3.195535667	38.93385778	11.87835696	86.48943214	66.09614267	60.54388365	76.52992147
Zm00001d028868	3.434670533	4.051522285	3.488402853	6.794185344	11.03391428	6.057655759	7.511507772	8.514331409	7.620783221	1.30946643	4.049896082	0.591981165	24.94215169	27.39159254	25.67319759
Zm00001d028870	1.059785575	0.106784308	0.842946965	0.343646835	36.58628185	4.778046997	19.7146825	29.79969922	20.70303103	5.437222791	5.987177777	1.244421307	0.616685726	0.278825799	0.24505135
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Zm00001d028895	11.86539883	13.6467359	13.83543197	32.78878824	27.67163478	30.92147471	13.41787004	13.70497588	15.83857918	1.289222939	5.06345673	0.847237623	18.94785415	20.33186028	24.66050554
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Zm00001d028900	0	0	0	0	0	0.011173537	0	0	0	0	0	0	0.010205837	0.019995846	0
Zm00001d028901	9.228447657	7.589577899	10.13636416	19.06088896	15.25506403	21.16432492	28.1051427	23.97010657	26.05538153	1.026253105	1.720306658	0.840456105	30.29504701	37.05135863	32.08394296
Zm00001d028902	1.757826474	1.92927252	1.849179798	2.200700605	1.787159488	1.913832226	0.993499238	0.923484191	1.052736184	0.265234075	0.097857079	0.179400267	0.611639945	0.440138084	0.565607786
Zm00001d028903	9.329533696	8.018978402	7.834305363	12.66724437	31.5528008	13.48618881	26.72907877	31.63863944	32.71991021	40.55702169	43.68094795	36.73055881	6.225231193	6.374825581	5.830386008
Zm00001d028904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028905	56.20362351	61.25920636	46.81506501	27.21498622	19.7101745	26.05959138	16.89947132	14.06604869	20.11464978	1.662184918	3.419572427	0.391083529	13.62974089	12.39454232	11.18933268
Zm00001d028906	0	0	0.046741815	0.023452778	0.099113377	0	0	0.158721834	0.208726007	0	0.094854826	0	0.29460756	0.0206147	0.304376023
Zm00001d028907	6.734822694	7.472487986	6.363950183	9.074705638	8.478591511	8.608019153	8.414686473	7.464197064	7.400366481	5.398126724	5.080481027	4.655293069	5.883297626	5.613428663	5.321341099
Zm00001d028909	17.77611254	16.86545793	15.69709302	34.84418807	43.22400942	37.68196537	40.12157509	45.09589318	51.63414399	65.41951713	59.86023125	65.85016723	21.8812448	18.87142619	26.43315876
Zm00001d028910	7.323979443	6.503475231	6.721615547	9.632309667	9.343079248	8.754984616	10.77594567	10.44820337	11.71491962	3.68733845	5.856921364	3.239455243	6.078310551	6.085526184	5.986590368
Zm00001d028912	0.254941425	0.173928987	0.422455938	1.192319572	3.499195091	1.652789263	2.904515809	4.777528976	4.270783136	1.479676328	1.460097311	0.882539191	0.225852716	0.116448226	0.368433848
Zm00001d028915	11.74214803	11.95546436	13.4929099	22.9382686	15.33567786	24.29177704	18.00554953	16.1354115	17.83435106	3.80565607	6.972574792	5.302488892	30.7700307	34.04531384	29.53426288
Zm00001d028916	0.174433607	0.082387415	0.16258995	0.734217842	1.063018635	1.255517082	1.783474619	0.525818061	1.102515698	0.330787465	0.467428545	0.096614817	0.878385631	0.023902531	0.30250358
Zm00001d028917	0	0	0	0	0.073227058	0	0	0.067009741	0	0	0	0.06156249	0	0	0
Zm00001d028918	86.3614432	85.96077427	97.72931022	105.0510467	135.1540166	97.17850191	99.900482	117.5911379	105.6261427	78.06216216	104.5706135	51.46391327	118.0830219	103.2744862	115.7920782
Zm00001d028919	0	0	0.068708578	0	0	0.009675986	0.009228675	0.076184385	0	0.152494741	0.318703447	0.323709869	0	0	0.063917207
Zm00001d028920	4.564000994	4.571234268	4.136348839	4.247972444	3.779967954	4.109357903	3.515920247	2.513666952	3.032058598	1.67209106	2.232735975	1.854941183	2.986500026	2.948426627	2.236105202
Zm00001d028921	7.652481474	7.127353241	7.792040276	7.884300935	7.443896987	7.199748175	3.995092579	3.522990118	3.977120907	0.130619227	0.585211891	0.089177116	2.289218389	1.957068336	2.140655531
Zm00001d028922	23.4401933	22.56855254	24.90862246	24.00266634	25.6391392	24.68464328	24.03980317	31.30434856	30.80710299	196.8230376	162.3560062	192.230608	4.247946822	3.579392357	5.769888678
Zm00001d028923	16.88233334	17.09223809	17.51803953	15.0641661	17.64493255	15.5378349	16.77741276	15.87249544	16.34786614	15.25284816	16.52820297	17.14585279	13.04170769	12.047059	12.70534397
Zm00001d028924	38.66356358	35.64740495	52.41662559	95.13112348	95.29696269	118.9002624	107.6898897	90.25283109	97.54736409	76.25598788	85.03618971	73.62236546	91.79129847	88.43925284	92.6436785
Zm00001d028925	0	0	0	0.071339623	0	0	0	0	0	0	0.036066662	0	0	0	0
Zm00001d028926	2.201655769	2.107475127	1.959657763	4.212856394	4.420578241	4.351691693	6.56879415	5.943990111	5.21587012	7.834031408	6.488746577	8.601167396	4.79135561	4.785689894	5.151434148
Zm00001d028928	0.031141763	0.156892663	0.141911274	0.27187059	0.287236889	0.228917523	0.157686318	0.137682884	0.025604287	0	0	0	0.046464844	0.011379565	0.072008255
Zm00001d028929	0.082221746	0.367162285	0.06502709	0.689837382	0.640186256	0.650185009	0.759874694	0.504716341	0.866528027	0.010308849	0.292201095	0.182163037	0.418221699	0.352343427	0.414805347
Zm00001d028930	0.608998427	0.432686846	0.669534456	0.0973739	0.884746799	0.334791333	0.401423658	0.649585003	0.471822231	2.228989889	2.126676613	2.715781251	0.795070261	0.256771331	0.487443662
Zm00001d028931	4.280246134	1.310388883	2.155022332	5.998290741	16.30626781	15.47449858	32.77081037	25.22178648	13.3600281	1.296430711	0.932195615	0.363950207	9.007557326	7.123273251	20.59609156
Zm00001d028935	0.309391432	0.422152959	0.392523262	2.339273662	1.367388434	2.226900171	0.346460396	0.256475755	0.365666882	0	0.03251271	0.028560816	0.555392895	0.240242408	0.394959
Zm00001d028936	23.50303994	23.22677822	24.40529201	12.5422422	18.04222461	15.40099552	17.6827329	17.50259253	18.7751062	39.32307613	34.3319158	39.84705678	10.02771082	8.965908246	10.29106329
Zm00001d028939	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028940	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028941	8.655751654	3.124546772	6.266768253	4.472727012	37.80422709	10.07590789	22.24503922	14.89122973	12.17142962	57.90346489	34.54773652	74.55691084	6.397026718	7.094384236	11.62833906
Zm00001d028946	17.984529	19.27059164	15.28642045	16.5215628	15.29808954	13.77603391	13.94520721	12.1653842	13.13985549	16.14986848	17.56474957	12.17073584	9.448830724	8.071964508	7.965360611
Zm00001d028947	0.046980185	0	0	0	0	0	0	0	0	0	0	0	0	0	0.009052584
Zm00001d028948	76.84890583	58.17924615	86.21181543	61.45524196	208.0388122	75.70946091	114.4863315	129.6272976	114.6168149	45.80403999	64.63498051	20.49844361	59.28831905	57.70203684	66.09703229
Zm00001d028949	80.51750081	81.52150859	60.47356055	55.48558789	50.47125512	44.99408169	101.4618022	82.21847006	77.60182676	4.309508361	14.86988653	1.273400692	34.83903971	43.11042717	38.399105
Zm00001d028950	0.413682871	0.645091084	0.758948332	5.13470534	2.543743401	2.896103539	1.196961846	1.94772405	0.753131287	0.054336846	0.273254338	0	37.23234945	37.2080775	41.42762558
Zm00001d028951	5.992711491	4.682861695	6.299742604	13.42124859	16.41634373	13.82086326	16.73040356	17.11091466	16.51865766	11.62505608	12.75517008	6.421009293	9.018908549	8.278229646	9.117710847
Zm00001d028952	4.363727189	4.639590717	3.58373861	11.54139761	7.331169523	9.920419887	7.993261501	5.904798355	7.342773828	7.181499909	5.528022902	4.756389124	9.064978269	9.388274062	10.36377192
Zm00001d028953	11.86645056	9.802878796	9.616819912	3.629491609	7.728717237	4.394574273	3.690556391	3.69946846	5.703608439	7.062803639	3.21469422	2.798959937	15.34904001	13.15680482	12.31079752
Zm00001d028954	7.589233116	8.168315601	7.756600976	11.64918439	11.63627987	9.089785219	8.285086243	9.150887656	9.75234094	12.83830324	11.57801464	15.73227517	17.60283441	19.39684792	21.37711539
Zm00001d028955	6.466710648	7.525327504	6.02314039	8.894956353	16.54606063	10.03175533	10.92036473	11.63501829	10.97265623	2.414223433	4.816216137	1.266037491	3.545378195	3.74275689	5.302055477
Zm00001d028956	0	0.688758788	0	1.364013591	0.720554253	0.669965285	1.06498913	0.439583899	0	0	0.459729722	0.605774901	0	0	0
Zm00001d028957	0.48312861	0.789408354	0.162279367	0.928232745	0.309693805	0.079986304	0.274639031	0.566798724	0.611935123	0.252118813	0.526910856	0.216968088	3.462995501	4.194038016	3.049449893
Zm00001d028958	14.76973859	15.12199537	17.79058619	25.46287141	36.08425333	27.53670876	28.63035749	35.02804848	33.31865134	20.81967581	21.30903538	12.28281813	25.10383492	22.41917828	22.71155294
Zm00001d028960	9.554778598	7.896187345	8.156910029	5.184884278	5.339809666	4.986837172	5.613749509	5.228639611	5.13979605	5.857109555	11.39114299	8.389308283	5.802404878	5.622535014	5.997754383
Zm00001d028962	3.524392944	1.879409376	3.514697819	3.739694227	18.65052069	4.631256911	21.53779992	23.5099705	20.90902768	56.93705024	33.5836863	39.32499225	3.037445947	2.959988017	8.543682199
Zm00001d028963	46.43029978	41.97506851	50.52853967	56.38893671	81.03030036	61.25453662	58.55545216	68.20590039	57.18143457	28.74083968	44.84818864	19.16849997	72.93579054	60.51644404	70.57304464
Zm00001d028964	14.80108796	12.63235286	15.13280376	21.23412766	17.32674166	22.92490877	14.57335729	12.25064157	14.00926437	1.618187883	4.712741112	1.338250337	9.18107499	7.221907259	6.782532197
Zm00001d028965	0	0	0	0	0	0	0	0	0.022052123	0.049321449	0	0	0	0	0
Zm00001d028966	18.74072886	11.27112247	16.05199221	10.52315173	57.69560737	18.28197682	47.38072454	51.57353093	39.60599922	47.42656045	41.66621289	58.91684876	8.485914312	7.907422642	8.246894132
Zm00001d028967	0.021862314	0	0	0	0.057613613	0.008928109	0.004257686	0.065902437	0.008987432	0.035177025	0.059733006	0.028254426	0.02854207	0	0.324373009
Zm00001d028968	2.580514033	4.944402949	2.183537318	2.533559381	23.54823388	5.414880068	66.17688479	80.43590929	66.56142893	310.1590801	64.94374689	295.6801887	8.202234502	7.914761449	14.47279177
Zm00001d028971	2.906976204	3.500069571	3.429957793	3.391006287	3.510871162	3.241013811	2.626393081	2.812005414	2.802230526	0.597434594	1.199026054	0.54927776	1.902410331	1.526165624	1.568611879
Zm00001d028972	1.176710275	0.781455589	0.877451396	3.788926641	3.100976833	2.725993337	2.574973718	1.934788289	2.031694164	0.324575493	0.620527207	0.189600908	3.447560506	2.368819337	3.537137912
Zm00001d028973	0.127292681	0.064130241	0.221479606	0.889021894	0.536725701	1.091656657	0.773455793	0.828824391	0.910525637	0	0.032104031	0.028201811	0.911645422	1.172158736	1.383376475
Zm00001d028974	244.1201353	244.2277016	213.0473655	103.9674454	110.4738658	115.081357	101.1904024	103.4090597	97.72800736	187.7923317	194.2854698	215.6203408	97.96108396	98.03921716	111.0309514
Zm00001d028975	0.348907931	0.12058102	0.193015473	0.729660243	1.628703786	0.7141709	1.17089141	1.146673687	1.023274972	0.234732468	0.321939581	0.139047304	0.330921011	0.317182787	0.383707856
Zm00001d028976	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028977	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028980	0.007812134	0.019678823	0.019417885	0.06820068	0.247047173	0.153134922	0.173441087	0.310848615	0.067441692	0.193935965	0.029554054	0.051923563	0.052452171	0.068511482	0.081287033
Zm00001d028981	3.915496312	4.206642852	5.355106296	4.682375739	5.827193772	4.628815776	5.062709044	5.679444354	5.362903954	7.865305649	7.381378867	10.40919694	4.783382008	4.231523436	5.070191936
Zm00001d028982	1.997623221	0.94350519	0.620663005	0.544982599	1.151570724	0	1.458889219	1.957051607	0.846870561	5.854484991	10.54859294	13.69217241	0.628707524	0	0.938244552
Zm00001d028983	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d028984	26.35293091	24.40173993	24.72544079	8.151605031	12.43242021	7.773724185	9.595044922	12.89446105	8.242873464	32.20294727	29.38986438	27.56756571	14.63804093	11.10456938	11.44039731
Zm00001d028986	0.026005065	0.004679068	0.018468098	0.041698785	0.112586602	0	0.130229649	0.147822031	0.02748982	1.286026157	0.721450855	0.600836518	0.008314429	0	0.034360461
Zm00001d028987	5.031156306	3.298996364	5.170106688	4.135054205	14.84757166	5.285378498	13.40584496	13.20109321	14.09420275	46.21776221	31.32618653	45.77119088	2.088878704	1.9846094	3.446174023
Zm00001d028988	1.050330239	0.88904222	1.326407602	0.373258572	5.290314684	1.694976197	3.998658071	5.331384653	6.219065566	10.59954529	7.968363678	10.80311084	0.941546432	1.163789632	1.599514233
Zm00001d028989	14.5523568	14.56645212	13.39609611	9.663405534	11.70900661	11.14349774	6.33453072	7.175000207	6.783152835	15.92311427	16.07891416	13.53801855	10.31546721	9.659178422	9.903757389
Zm00001d028992	21.49220484	26.79124764	19.91211895	14.23970232	12.49442007	10.6211368	23.6576286	24.64667645	23.30160592	38.51418108	26.24426702	34.63528763	51.87859855	48.12854112	47.37656791
Zm00001d028994	5.444945031	6.152692144	4.972000666	2.852028417	3.375227818	3.39791006	2.861712418	3.126514193	2.975178948	0.530462807	1.326397237	0.37969623	1.847537778	1.718113901	1.92392277
Zm00001d028995	24.29425515	29.58130694	21.13886859	29.04421359	27.89436616	31.70571501	34.71009723	31.30565102	27.83755458	286.2074925	121.2460264	381.9606595	13.75505058	11.89594574	17.38286913
Zm00001d028996	0	0	0	0	0	0	0	0	0	0.012017135	0	0	0	0	0
Zm00001d028998	760.1400983	814.748528	876.0920777	608.4800097	416.22165	370.2176932	25.62392835	31.35560785	33.81918935	71.72921439	129.8073537	47.30776119	27.71189017	25.26305399	50.0397874
Zm00001d028999	14.04884974	12.79289858	15.1804847	14.40710522	36.71820997	18.32585427	57.81198039	82.87729985	82.20169024	194.415764	169.4443511	127.0027226	3.277028694	0.988424884	4.588496739
Zm00001d029000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029002	0.0121847	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029003	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029004	0.857083517	1.224695749	0.736286406	2.502891928	1.802970662	2.380101047	2.015889015	2.083817209	2.130115033	0.64287445	0.806499018	0.335357127	0.782987808	0.615387634	0.814744529
Zm00001d029008	0.825040938	0.785129598	0.736742524	1.288099558	1.530010149	1.392641295	1.742449806	1.274832609	1.635543938	0.41300375	1.078936541	0.934252752	1.477195684	1.319810764	1.363666397
Zm00001d029009	0.150993003	0.119146564	0.151480177	1.243312455	1.375908654	1.37737374	0.990588692	1.28102294	1.346141556	0.180645609	0.263816956	0.135019688	0.767472156	0.787733898	0.776093766
Zm00001d029010	0.293769298	0.28716691	0.179824067	3.10599631	2.097187251	3.233796519	1.895666989	1.358720279	1.454603523	0.036282653	0.204578252	0.004857079	6.167503858	5.359326065	4.896861597
Zm00001d029011	0.137803282	0.267577438	0.149854534	0.293598053	0.27236406	0.154758886	0.288499785	0.366935321	0.169949665	0.40386357	0.810947011	0.41979361	0.771031487	0.61684792	0.776682071
Zm00001d029012	0.63658385	0.703165098	0.583842048	7.820321945	16.2734738	10.05948872	7.83228435	9.321729041	13.14911475	1.05166692	1.678482831	0.060336145	8.757810225	10.2400441	8.658562388
Zm00001d029014	2.379301766	2.327385706	2.369238251	3.964590145	4.721891727	4.312722326	3.61199951	4.609046591	4.864508631	1.546584758	1.942866336	0.432079102	1.996886308	1.699654055	2.31112088
Zm00001d029015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029017	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029018	0	0	0	0	0	0	0	0	0	0.631631944	0	0	0	0	0
Zm00001d029020	19.66521217	17.81014981	19.57210207	20.33370694	21.73179116	21.85847671	20.58950966	22.05292155	20.42014135	12.18052389	16.00844568	9.126068204	17.50216879	18.85485193	17.20924842
Zm00001d029023	0.284645486	0.535170151	0.256346556	0.951804897	0.619667961	0.83391877	1.099053357	0.955040457	0.946300144	0.324299479	0.50980891	0.228490835	0.74784703	0.615032164	1.39743601
Zm00001d029024	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029025	0.045226199	0.048825056	0.144532937	0.024173209	0.255394939	0.063323751	0.226486346	0.436260014	0.207169659	1.63955526	1.808719252	1.660441599	0.086759261	0.042495898	0.194211301
Zm00001d029027	45.50913352	52.31986635	63.93151875	77.72819383	27.6487389	43.2235668	12.40086198	12.74495983	10.66715628	1.863906474	4.431057806	1.071610126	115.5430531	129.1741754	131.0023862
Zm00001d029028	110.044994	61.89111159	74.97461321	47.03080371	164.7934264	58.13455387	140.7870551	187.3173984	117.3985009	355.8818068	195.7804022	327.7274264	11.92585359	10.57275958	28.79612675
Zm00001d029030	6.86072944	5.516143126	6.678910815	3.507749866	4.883991907	3.962689601	3.967299698	4.614661985	4.596044769	13.52121105	9.17094927	17.63690701	2.135727003	1.971089434	3.286586933
Zm00001d029031	2.652627477	2.423138595	1.801019225	4.232680005	2.249674412	6.014994453	1.338129808	0.723043879	1.114441605	0.993571486	0.708919195	0.945658351	2.632860373	2.679653516	2.724973997
Zm00001d029033	5.895566226	6.794846576	6.33870201	10.99536988	11.29342663	13.12867341	17.10483439	15.47816737	15.67989068	70.8022953	55.78040206	89.03368445	15.86984209	16.39140283	17.53678969
Zm00001d029034	19.64893944	21.0048908	22.90642255	21.31403984	19.44441795	18.15228273	20.36779273	21.68999503	23.00914779	41.42672597	39.26350971	43.04190083	15.47483325	15.64965154	17.04133335
Zm00001d029035	0.243679031	0.275164851	0.428160197	0.576373291	0.55359116	0.59708031	0.37310621	0.233030801	0.632136326	0	0.042384424	0.037232631	0.216267145	0.165804524	0.320585002
Zm00001d029036	27.87976524	27.80851076	25.42414549	38.70413382	36.51280195	36.74081824	36.68166708	39.75930793	37.96662936	17.66101719	27.49093398	13.65638832	43.49063705	41.18666971	46.30159649
Zm00001d029038	0	0	0	0.015291632	0	0	0	0	0	0	0.061847048	0	0.109765379	0	0.127580546
Zm00001d029039	36.90055385	34.27818755	44.59904817	62.72067133	80.94894617	52.90017479	54.23398919	64.11326802	65.20704347	34.48607286	45.5616832	30.68015028	54.92878894	57.80230655	61.4321324
Zm00001d029040	0.198060224	0.108737922	0.183034488	0.55736068	0.368039412	0.236429057	0.540011204	0.496001521	0.306894772	0.196113222	0.352226059	0.045005565	3.233608769	2.883806579	2.636259145
Zm00001d029041	10.95240319	10.59085784	12.33150182	10.09377049	10.39651575	11.26338358	11.6843118	11.56695973	11.31229815	15.45308144	14.62428287	16.40963788	6.727911677	6.47562557	7.469481665
Zm00001d029042	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029044	17.35311819	17.16162412	16.29276561	16.29305755	19.74165072	16.84953768	15.69818569	15.22537484	16.25398682	6.522182857	9.530919806	4.902418989	10.48888135	10.88079918	10.32080224
Zm00001d029045	1.139269493	0.717457071	1.179906233	3.552118726	3.002309388	5.81567088	1.996854619	2.976349318	1.170862708	0	1.197212818	0	0.637439573	0.832604817	0.219525168
Zm00001d029046	10.34721342	10.58191948	11.76442565	11.42118378	11.00527449	8.978475427	8.162424665	7.451466066	7.456460201	1.479994202	1.738288835	2.110096575	2.632743404	2.285811054	3.079796608
Zm00001d029047	5.065703362	5.700831385	6.353136606	11.82170742	15.59711574	13.66492517	14.95427239	14.07461414	15.60587066	7.170666709	5.895632006	1.861033376	19.27697756	20.12331686	21.37140617
Zm00001d029048	11.96958104	10.83796538	12.82109144	18.42479462	29.84898542	16.8912747	19.00259954	24.52840853	19.06634821	6.160507139	12.28980445	4.551879999	12.6910883	13.00488683	12.93304425
Zm00001d029049	314.9447222	368.3785431	397.3758592	384.8419437	131.329089	262.8601614	123.4079509	100.7058436	123.9717652	2.242003927	4.267958678	0.649466268	437.2462697	441.4266238	386.8880744
Zm00001d029050	84.633377	93.70520801	86.27054854	53.35650695	58.31152012	59.52765629	59.568392	64.35833904	59.8399309	76.67653431	66.93324214	76.07336159	42.13333922	45.12348059	40.65801238
Zm00001d029051	3.842839134	2.141310725	2.680436524	2.129080823	4.785798419	2.814473899	4.088113464	3.371423277	3.595619498	1.58900371	2.365387381	2.241304874	0.951245899	0.839450488	0.666020858
Zm00001d029052	0.398744323	0.179364268	0.389369057	0.319690685	0.525404143	0.069788051	1.13155095	1.098959748	0.667391744	102.8769689	17.85044312	176.2426351	0.637439573	0.437117529	1.547652432
Zm00001d029053	0.640399255	0.95135694	0.696768238	1.211182281	0.587273971	1.296132223	0.920992659	0.755204837	0.891045004	0.093821496	0.136073056	0.02598554	1.160253773	1.206048363	1.025153906
Zm00001d029055	4.97197952	4.871099236	4.70026479	6.480173372	6.686483941	6.451641693	6.778717079	6.442438495	6.751760184	1.44076226	2.477314207	1.181851982	3.949000334	4.245284939	4.170868367
Zm00001d029056	8.822515991	7.990783942	10.04130999	15.11777666	18.73518343	13.29990078	21.0180193	22.1658256	23.81677914	12.03288187	13.44919003	10.60160221	11.56826339	11.23614637	12.84469461
Zm00001d029057	0	0	0.229603375	0	0.486860982	0	0	0	0.911374216	0	0	0	0	0.202525496	0
Zm00001d029059	0	0	0	0	0	0	0.004165538	0	0	0	0	0	0	0.039079235	0.032971707
Zm00001d029060	8.377085793	8.73445405	7.729028077	5.568484722	3.319816447	4.879736786	3.93780973	2.879855639	3.120358221	0.987217954	3.834060085	1.703643772	4.639529083	4.199280591	3.740463043
Zm00001d029061	8.723549264	9.378188861	7.140118291	11.1536528	4.825140088	6.290894272	4.801959916	7.408166161	3.883918868	2.300744955	2.49362327	1.253016535	39.84907957	41.71350131	38.96885333
Zm00001d029062	0.052380207	0.08246633	0.040686422	0.065326321	0.043136629	0.06417292	0.022952352	0.007894826	0	0.018060235	0	0	0.197826074	0.244039343	0.234664834
Zm00001d029063	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029064	9.37314345	8.796873885	9.491753552	5.752112936	7.177225708	5.80245025	6.644914039	7.325290946	6.269141561	7.409719205	7.358733007	9.082961025	4.865197803	4.240545934	3.793777141
Zm00001d029065	34.42929703	39.85009141	44.71137136	38.43708511	46.96843005	38.35778036	35.8584106	45.10092545	39.78668482	11.7797447	21.49147528	5.375226995	17.41430662	12.01559872	23.38771031
Zm00001d029066	15.23264141	13.82494557	12.42752463	13.03917047	23.16273859	14.84628011	19.78737832	21.93066603	21.79130142	8.068770746	12.35027633	5.736136278	4.771968347	4.058071087	4.676388396
Zm00001d029067	0	0.081995094	0.10113482	0.284169498	0.321676006	0.079757772	0.152141304	0.176618531	0.060215796	0.40403326	0.102618242	0.108174089	0.23676327	0.356830636	0.376328859
Zm00001d029068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029074	26.17372343	26.55478906	32.96835864	34.73324822	21.37076919	21.44039637	16.30427678	17.87509332	17.75812831	7.755459084	8.584379513	5.491041703	13.62930416	13.46403469	12.81296051
Zm00001d029075	205.4006876	216.198089	171.686839	222.8691531	172.6840821	177.0295515	137.5145987	114.5146098	136.4580476	4.2520129	8.063596493	2.472315938	14.43895014	14.38376977	13.44154102
Zm00001d029076	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029077	4.063500901	4.490973115	4.352102319	5.423365585	5.449569982	4.170341023	4.211231527	4.904787672	4.187556038	0.328625455	1.368243221	0.32051582	3.823447073	3.642937601	4.230625079
Zm00001d029078	0.404022089	0.536373657	0.678540326	6.346149494	1.683403507	8.387943969	4.26165778	1.105981855	2.504823224	0	0	0	33.08983443	36.36594392	39.18629446
Zm00001d029079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029080	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029084	9.005811385	7.518633919	7.014985577	10.30722071	16.54621538	8.862617033	13.00126625	16.23108425	15.83383882	24.73712868	34.45973512	26.29298423	4.471133123	4.527786588	5.705490295
Zm00001d029085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029088	0	0	0.006969093	0	0.014777569	0	0.006552435	0.027045769	0	0	0.028285258	0	0	0	0.006483106
Zm00001d029089	0	0.079625293	0	0	0	0.116178951	0.01846802	0	0	0	0	0	0	0	0.07309046
Zm00001d029090	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029093	4.148045094	3.712129208	3.620804766	6.590979769	9.106123409	7.240125951	7.837874296	7.938108204	8.15168028	6.094613315	6.673802203	5.662460869	3.723545698	3.20617042	3.446641839
Zm00001d029094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029095	10.76115305	11.17415548	11.71345225	7.931861675	5.154864282	7.228710664	5.583074367	4.90085353	5.371870501	2.771476522	3.363054115	2.800347224	11.18085956	10.79782337	9.59903403
Zm00001d029096	0.011939942	0	0.011129247	0.003722745	0.062930502	0.02559911	0.045343424	0.147567739	0.044175781	0.07410217	0.191972291	0.347196313	0.016701474	0.039266952	0.10353152
Zm00001d029098	0.070108892	0.279624294	0.188784997	0.02914559	0	0	0	0.028178455	0.014410618	0.09669172	0.279963613	0.20710253	0.431497557	0.49956289	1.580581207
Zm00001d029099	0.829931419	0.85524684	2.400444999	32.83945524	23.30269274	30.46641254	23.94462315	19.90499942	4.484946956	0	0	0	48.69869477	26.33457354	73.23708506
Zm00001d029100	34.75304324	38.67562979	43.66755779	36.17185574	30.9209808	35.42884959	32.24826898	28.86053171	28.6784765	23.90635013	30.61284365	13.7290106	26.97501295	28.94663475	32.89184568
Zm00001d029101	47.00060118	55.15270668	54.56393227	22.6000574	14.96117262	14.78195219	7.558563791	5.338067905	9.674940712	0.316357139	0.723148682	0.990990819	28.10723485	17.32544452	19.57162635
Zm00001d029102	263.216998	280.5737283	236.1635342	214.8386607	184.9606281	207.8109339	189.8500938	150.3925365	161.2378692	14.02399704	37.47939967	9.30959037	161.1174226	140.5844477	135.8604745
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Zm00001d029105	8.330285392	8.624545179	10.58076615	41.73563451	34.91431979	33.49826427	25.01948224	24.27002943	24.14530547	1.396250995	3.166505739	1.033172935	84.61034655	95.09463619	92.09765598
Zm00001d029106	39.78279835	40.20515737	33.67534544	23.74333382	39.48775709	26.18936928	31.46064828	37.45104424	34.56083105	19.73764723	26.97738713	13.79901409	12.11211711	12.21620176	12.4947506
Zm00001d029107	7.553643952	6.547549407	6.38934098	21.56345015	17.52188126	15.65832731	8.188781965	8.900188718	9.953316936	0.356499936	0.398400232	0.031815909	2.281926538	0.850096514	2.523617053
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Zm00001d029121	4.543495029	4.586437401	5.47172124	10.59369721	7.792743973	9.458119867	6.89119101	6.961368789	7.108743579	1.931214392	3.05977816	1.114130101	8.895999933	9.124924648	10.31093146
Zm00001d029122	0.031212863	0	0	0	0	0	0	0	0	0.043047684	0	0.034576193	0	0	0.036086329
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Zm00001d029124	12.51295223	10.96355453	15.48570132	25.89261999	51.05852988	23.82289911	29.36581067	38.28019611	33.74248966	4.187285223	9.471966676	1.846874697	8.857055115	7.387630927	11.62609797
Zm00001d029125	0	0	0	0	0	0	0	0	0	8.045965626	1.068816081	2.377739646	0	0	0
Zm00001d029126	59.3183755	62.61189689	43.58790473	125.0468676	167.1393751	186.0240097	350.1684259	287.1314508	287.0737643	99.56398719	172.8459504	63.76190136	314.9020402	321.804912	331.8622477
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Zm00001d029130	0.934733682	0.770941961	0.753224658	2.384165794	3.269828796	3.040259318	3.392979264	3.079462638	3.428608293	2.461864183	2.81374058	2.615360317	2.453031686	2.065902997	2.126498757
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Zm00001d029134	0.35825798	0.654451739	0.489428599	0.890196907	0.511695859	0.47242001	0.719011465	0.675995444	0.768989086	0.094293286	0.510402072	0.242358432	0.670210521	0.41072284	0.398386141
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Zm00001d029138	2.915287467	2.816735065	4.351062206	9.479695234	8.664892918	7.714059883	4.744231031	5.746264702	4.695307669	0.183591874	0.537172022	0.309670714	6.613978663	7.092139178	7.695137327
Zm00001d029139	0.603996741	0.351108983	0.815608931	1.368938874	1.599361076	1.216695665	1.370822882	2.822095021	1.496953443	0.04004861	0.747011974	0.012866927	1.306290781	1.005916779	1.349604174
Zm00001d029140	5.361378746	6.7881794	4.974581991	4.085009775	6.819266025	4.289159198	7.180442175	9.911030802	8.524073646	52.43601968	35.61009554	49.44871817	3.337291882	2.743990802	3.656519823
Zm00001d029141	8.395958605	15.51195441	5.528223612	4.342722477	6.071777706	3.627417534	6.683930253	6.561912681	4.722975633	93.78556156	52.8414558	112.0698965	3.266594252	3.184808663	5.118608179
Zm00001d029142	6.142009921	6.820109767	6.013310787	5.977701269	5.058124459	5.91025184	3.851176577	2.742592864	3.106022641	0.336458768	0.576069653	0.323235383	2.237506576	2.131619819	2.552268114
Zm00001d029143	3.554329211	3.90956285	3.456868941	2.744117508	2.507885628	3.106473001	2.216550607	1.617249805	1.768355507	0.255450446	0.583924402	0.240555321	1.518776838	1.379311693	1.436220718
Zm00001d029144	14.80704441	12.46628693	14.15809319	13.38412453	22.31968012	15.75518695	11.79042617	10.41478967	10.01945645	0.666140034	1.47036107	0.685530525	2.753147787	2.581235799	3.839115269
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Zm00001d029149	155.4147688	158.3249484	160.8611157	41.1110073	50.92129393	52.71295764	39.55252933	35.54134349	41.29730613	34.15165478	53.96163479	16.89599059	22.5456768	19.84705029	22.53224786
Zm00001d029150	53.10922962	50.44330016	68.4275173	36.06549202	12.09885873	27.13748275	12.10696598	9.335690399	13.96646979	0.187610801	0.243016333	0.012557523	23.29032946	21.79684848	18.54496192
Zm00001d029151	340.7643994	344.3055353	301.6289756	87.15723102	88.10151124	90.23074072	72.52402385	77.8071044	76.82895065	262.4317533	183.8310867	317.6507234	87.53027832	91.40415199	82.58163921
Zm00001d029152	0.343886274	0.380090194	0	0	0	0	0.01640127	0	0	0.009679099	0	0	0	0	0
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Zm00001d029164	135.2993294	130.2201785	100.7942914	1.834914394	10.84478298	1.945290786	63.43976271	99.48600982	84.46380257	223.887953	258.3775336	278.0852121	8.778123642	10.8988281	17.63312225
Zm00001d029165	31.60423326	31.71761935	27.62689725	18.87723172	19.89840631	19.55129528	17.1386116	18.30668653	18.43863286	29.69983868	24.09637997	24.84934313	18.603192	16.70710961	20.39157288
Zm00001d029166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029173	46.87807099	45.66433604	41.05564379	41.70545152	64.24726098	39.91474834	44.70655808	44.96148719	45.30480567	6.680597915	12.68184283	4.058473929	24.7775972	22.14339465	30.41765992
Zm00001d029174	20.40241316	16.26848937	19.46095122	19.87365785	28.55227302	20.1666485	16.14017533	15.73695194	15.58903575	0.548269218	1.716339401	0.895675062	4.124350276	4.394873133	6.543559457
Zm00001d029176	0	0	0	0	0	0	0	0	0	0.155184243	0	0	0	0	0
Zm00001d029177	42.22096954	39.7148174	39.96509205	19.06167335	19.24621788	18.11712408	17.99329802	18.11269784	15.66577522	2.533728067	6.956119879	2.161971504	9.472819284	8.13947494	10.95097276
Zm00001d029179	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029180	9.90038548	10.7318118	9.681160288	9.741254236	7.435367556	9.667456921	8.415554808	7.915455474	8.60436997	6.874505987	7.938904697	8.555175261	8.405233361	8.221449571	7.39325464
Zm00001d029181	0	0	0	0	0	0	0	0	0	0.09510661	0	0	0	0	0
Zm00001d029182	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029184	0.050354453	0.147983779	0.031290331	0.638465539	0.387038043	0.452401359	0.245163244	0.080954678	0.486457876	0	0.052915484	0	0.234784373	0.349602022	0.213460936
Zm00001d029185	0.140217784	0	0	0.043718384	0.369515002	0.171785971	0.04096112	0	0.389086684	0	0	0	0	0	0
Zm00001d029188	13.89929144	14.86463337	13.73119833	13.49995578	11.85362187	15.15754049	11.35417365	8.612937438	9.924395543	3.937228098	5.428220691	3.676694549	5.099516582	5.093845017	5.08027144
Zm00001d029189	4.249264791	4.043504761	4.061617066	6.298215789	5.285331989	6.301916207	6.187614945	5.445505033	5.614209451	9.352819185	7.378116187	8.383349218	4.64204016	4.436751155	4.086990984
Zm00001d029190	0.260735548	0.164198694	0.194425744	0.065035613	0.103067201	0.223605706	0.081245197	0.209591815	0.021437283	1.186671114	0.449354385	0.462129613	1.225440094	1.152837438	1.979494582
Zm00001d029191	2.156542782	1.885198125	2.223266295	3.229912135	4.069877265	3.188970416	3.363729172	3.625379818	3.934773386	3.2820629	4.871865693	3.108868788	1.344362355	1.370949299	1.024626473
Zm00001d029192	0	0.06522337	0.064358522	0	0	0	0	0	0.031932619	0	0	0.028682524	0.028974526	0	0
Zm00001d029193	0	0	0.006600874	0.039743986	0.020995171	0.058563399	0	0.025616777	0.019650843	0	0	0	0.011886985	0.011644823	0.049124513
Zm00001d029194	0	0	0	0	0	0	0	0	0	0	0	0.008155289	0	0.016140966	0
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Zm00001d029196	6.048978501	5.249963649	6.202935625	11.34422679	18.03768418	13.15449366	15.81635642	16.87143066	17.24513503	7.419746603	9.50358937	6.795937005	7.816223332	8.563935257	9.345499993
Zm00001d029197	0.486358516	0.756141527	1.029450152	1.838650894	4.836405007	2.48583562	5.789657415	6.469140486	6.129358887	7.493742703	8.691804988	3.922889156	13.68280519	13.52901834	17.21155411
Zm00001d029198	0.788725034	1.086533546	1.112969245	4.897825244	6.97170882	4.338266797	2.064056457	1.991204111	2.219009997	0.169965915	0.787397661	0.027303556	2.693795117	2.242629079	3.45752139
Zm00001d029199	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029201	4.819986318	5.831638246	5.77246434	36.268043	18.61046909	27.80785399	13.72197533	12.64508172	14.10439231	3.102192697	4.623083344	1.359110354	98.9338906	110.3041266	110.8939828
Zm00001d029202	24.38838212	25.15065593	22.28421903	20.42022022	12.91445646	18.432462	16.9381437	16.20827569	16.63448768	5.558559205	9.38518591	4.10952822	10.07090461	10.84478233	10.9872898
Zm00001d029203	5.816508325	5.093319352	4.507035958	8.964522311	10.19975688	7.039682817	6.707911312	7.399023206	6.531575442	2.452181776	2.392526805	2.11973176	1.546839883	1.313283886	1.71093842
Zm00001d029205	0.532716073	0.499795145	0.472900788	0.921997258	1.167498442	0.95233634	1.086161876	1.186352174	0.938552373	0.187424309	0.671772059	0.216778294	0.948935889	0.798506091	1.043246443
Zm00001d029206	1.173593337	0.792371078	1.283239334	3.641544745	3.665221284	3.677481757	3.721748022	2.864189356	3.635811397	0.124506054	0.725739244	0.087503597	2.415062021	2.211230704	2.24073316
Zm00001d029207	0.133161369	0	0	0.110715389	0.13159473	0.135950748	0.220432003	0.521827478	0.027370817	1.438603276	1.399339657	1.917631585	0.086923578	0.109482127	0.064146965
Zm00001d029208	6.294946692	8.881875337	5.778740765	7.956745947	11.79551383	7.958203461	18.02358722	27.67888451	21.33748447	164.1653335	117.0849786	234.3270791	14.44286815	12.43826924	17.32388441
Zm00001d029209	3.107945816	3.773618788	2.553809319	2.737092712	1.547202384	2.500381689	1.328514047	0.927036598	0.850491685	0	0.129269605	0.030970087	0.84991943	0.587420576	0.684164326
Zm00001d029211	0	0.063943124	0.126190502	0.117587379	0.095564225	0.062198369	0.016949429	0.15741068	0.071556172	0.010002592	0.009145817	0	0.146086947	0.111308442	0.184471016
Zm00001d029212	24.34448551	27.57826088	23.1248872	7.835546053	6.600977705	7.178199487	6.107652582	5.906930476	5.813938964	1.719800456	4.150388501	1.518528374	8.613183179	7.78994222	9.710038052
Zm00001d029213	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029227	51.27155633	53.26351711	46.20869584	17.00597938	21.04858807	18.99199648	21.86102957	21.83203405	24.01973004	71.47752701	47.63862364	87.3663477	12.81377449	11.76292576	11.65465279
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Zm00001d029232	0	0	0	0	0	0	0.011780853	0	0	0.375429136	0.22884776	0	0	0.011052276	0.093249629
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Zm00001d029238	76.31835045	81.25134655	85.79541234	130.8447362	115.918161	116.0609007	102.1043482	111.3054214	108.2451692	57.42913076	75.90240254	32.27796868	105.4595195	100.0240047	128.4638431
Zm00001d029241	0.179167168	0.588682725	0.087131537	1.330981923	0.112907362	0.935279173	0.846529821	0.05635691	0.384283145	0.333049259	0.343814963	0.20710253	0.33125065	0.469674512	0.306209465
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Zm00001d029246	57.61298923	51.12912462	53.00952528	3.560284516	6.812136474	3.805454159	5.6064945	8.336936022	5.458642694	47.80905446	36.22353155	46.53558144	4.208566558	3.175382507	3.924201617
Zm00001d029247	8.642557327	5.526598453	8.715113936	1.949869447	7.997152567	1.07390386	9.643602357	13.7648108	14.32535377	38.12688317	33.37436102	46.8867956	0.068834869	0	1.043053215
Zm00001d029248	7.06299715	7.8308724	7.682882166	2.826925257	5.589538581	3.412505092	4.475279166	5.072121915	5.275454596	3.13594769	4.327887002	1.967823871	1.415354394	1.199574091	1.19940154
Zm00001d029249	15.3720646	16.73087293	20.04093963	18.54038158	15.8862355	15.53580918	10.45282638	12.68130324	10.58091112	1.172862955	3.380099433	1.108997357	12.2508859	11.93050587	16.57743439
Zm00001d029250	0	0	0	0	0	0	0	0	0	0.031777897	0	0	0	0	0
Zm00001d029251	0.451272216	0.50279683	0.395465822	4.834368948	2.172640311	4.295376248	1.859111367	1.409161252	1.405629848	0.41491919	0.30642163	0.160224	6.033960373	7.00825637	6.494897807
Zm00001d029252	0	0.017917762	0	0.070968449	0.056234723	0.087144288	0.083115697	0	0.017544665	0	0	0	0.143274659	0.311901908	0.13157804
Zm00001d029254	0.945599229	0.964530695	0.868981113	8.728557501	5.957821943	11.81331872	3.797233527	3.597179498	3.695660179	0.07347252	0.100768814	0.066390333	0.894216254	1.014699099	1.539777113
Zm00001d029255	0.324910495	0.325282182	0.50733811	1.932560389	3.073662262	1.95967908	1.67438876	1.295848332	1.520623159	0	0.283654079	0.055372477	0.689879757	0.56623216	0.780177195
Zm00001d029256	14.94711479	14.91579542	14.78859379	6.317675798	5.986327221	7.393552097	4.676101538	4.026374265	4.785913478	0.913764874	1.604152451	0.520050455	4.444247766	4.142041796	4.123255322
Zm00001d029257	136.4104508	133.895143	150.5307251	58.43851603	49.97850676	56.50850731	32.50400578	25.84462121	32.97622163	3.98510198	11.91019036	3.726375571	12.76487826	10.61374153	11.56766057
Zm00001d029258	118.3204399	94.73867324	123.4944321	29.67992536	75.42211756	42.63155171	61.58732011	63.42030958	63.1185066	1.149557121	9.56787926	0.681712495	3.547868801	2.894902901	4.845314469
Zm00001d029260	2.303305715	2.768907214	1.591515466	1.068361029	0.915665971	0.878151429	0.781377894	0.748332565	0.835474925	0.644972106	0.507054841	0.121038783	0.611355089	0.680350995	0.646785149
Zm00001d029261	0.019255259	0	0	0	0	0	0	0	0	0	0.024281499	0	0	0	0
Zm00001d029262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029263	0.462908598	0.174910528	0.728718613	3.21374534	6.526464878	3.005769762	3.263482492	3.776898909	2.683205014	0	0.27241321	0.102557827	0.466208627	0.236813108	1.141729089
Zm00001d029264	4.910805126	5.454141685	4.069499616	2.758115717	2.2298482	2.630170622	2.247099826	1.926692858	1.903804796	1.482833066	1.62257549	1.32658506	3.222085861	2.794230282	3.112653528
Zm00001d029266	2.74848195	3.027283822	2.776205487	3.789685337	3.946167166	3.709359259	3.326758195	3.894991499	3.916317716	0.347346709	0.718040015	0.10310546	2.211764701	2.310753456	2.297761226
Zm00001d029269	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029272	13.32661387	15.23121698	10.39101611	6.925563133	7.404721809	7.429398772	7.250681508	7.536263642	7.469104601	9.605675691	7.395215471	3.698246224	6.076035297	6.81085527	6.777800248
Zm00001d029273	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029274	0	0	0	0	0	0	0	0	0.048310668	0	0	0	0	0	0.04528886
Zm00001d029275	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029281	8.206411098	8.411549057	7.795340902	10.23467993	9.386310439	9.517127271	10.07441471	8.924091663	9.840669773	2.496476699	4.906663925	1.679884248	9.6402172	7.213020818	7.922799236
Zm00001d029283	0	0	0	0.210495925	0	0	0	0	0	0	0	0	0	0	0.195133482
Zm00001d029285	10.58670011	10.49577346	10.00999521	19.1440504	19.48377525	21.6146491	33.67034177	38.39633539	37.6143586	105.3442684	116.0297047	205.6755316	16.29098932	15.65949279	17.4824792
Zm00001d029286	0.098171095	0.050374645	0.122007325	0.52148126	0.560537551	0.427637416	1.236350413	1.543220072	1.098617988	0.095277347	0.330125066	0.157082587	1.074153493	1.052270768	1.122380804
Zm00001d029287	9.944873286	9.028001481	9.837468218	9.768326497	11.68085996	9.857562142	10.99656745	13.3077157	13.81617995	5.630278305	7.557405914	3.602046935	4.873756733	3.408475968	4.294461092
Zm00001d029288	0	0.008696449	0.034324545	0.129167954	0.145566516	0.245315572	0.540562664	0.407947179	0.28100705	0.019045339	0.148019039	0.053540711	0.231796208	0.045414808	0.343257535
Zm00001d029289	0.12850246	0.341681906	0.177448039	2.751176238	4.599882896	7.950371337	6.990555281	4.897974649	10.1250582	0.049229466	0.35109907	0	0.535249521	0.751300848	0.255864321
Zm00001d029290	6.53806178	10.36013145	5.430523715	39.824398	26.7039039	42.34723927	86.11361122	72.39569362	74.84137673	2.799562603	3.341059027	8.822929008	28.81819836	27.61447818	24.14698302
Zm00001d029293	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029295	0	0	0	0	0	0	0	0	0	2.47470372	0	0	0	0	0
Zm00001d029297	1.814636059	1.916905213	1.444077918	2.602605679	3.470877906	2.312821714	2.544482699	2.879740381	2.884067217	0.452097447	0.87841742	0.418245355	1.005492351	0.786081619	1.011761466
Zm00001d029299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029301	0.837698157	0.8862705	0.208218747	1.796954179	2.516641693	2.545211256	1.487852461	1.535311413	1.900930044	2.911416141	2.493019633	2.598299206	1.424864927	1.212174659	1.627068889
Zm00001d029303	5.430685002	3.593147671	4.634784409	9.216308047	13.20185825	11.01168587	10.26164888	12.23637457	11.55113832	3.590842427	6.111429053	2.189318465	5.855950217	4.738154626	5.493786345
Zm00001d029304	0	0	0	0	0	0	0	0	0	0.840945597	0	0	0	0	0
Zm00001d029305	0	0	0	0	0	0	0	0	0	0.229937628	0.035040375	0	0	0	0
Zm00001d029307	0.006479258	0	0	0	0	0	0	0	0	0.017871929	0	0	0	0	0
Zm00001d029309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029310	0	0	0	0	0	0	0	0	0	0	0	0.028149391	0	0	0
Zm00001d029311	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029312	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029313	4.431228436	3.55391526	4.338213383	1.833884552	4.564557588	2.142330855	3.382269257	4.400630969	4.974805041	16.23310635	9.989766491	7.49147497	0.711560453	0.4429264	0.528391973
Zm00001d029314	0.398981812	0.779417331	0.263107143	2.944937026	2.027765841	3.182235349	3.215899278	3.387204704	2.229311438	0.314435255	0.164286976	0.081178888	7.981852041	8.97070943	7.4369217
Zm00001d029316	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029318	0.135896957	0.182573569	0.04503817	0.39546451	0.214877014	0.332984734	0.571664145	0.021848106	0.145252153	0	0	0	0.658983256	0.446925051	0.565615541
Zm00001d029319	0.454697359	0.152718135	0.150693124	0.151221019	1.437913144	0.70561754	1.062627735	0.767566121	1.607534787	0.58529578	0.191129319	0.06715908	0.407056756	0.232612432	0.140184586
Zm00001d029320	0.102242134	0.073585341	0.018152404	0.41896785	2.040030738	0.375781811	0.853356675	1.796376512	1.26092907	0.402882168	0.257861222	0.048539655	0.277858275	0.208151204	0.472823438
Zm00001d029321	5.559997006	5.322937319	4.539192306	11.97283626	23.83796189	14.84906042	36.31715626	43.15115631	34.35203596	10.30976155	10.61967835	7.980216714	9.814327715	9.325362852	9.467349713
Zm00001d029324	12.94611574	14.00910594	15.49922486	19.15499855	23.43924544	20.8377075	32.20733256	34.08854517	31.30474319	18.99524443	18.21843009	25.54908254	47.26226906	48.47030633	50.77077847
Zm00001d029325	25.83477786	26.15684288	31.45947007	60.96213313	43.58576515	43.23387093	19.29961645	18.17930927	18.56603792	0.187610801	1.057835803	0.276265502	45.93370533	49.47163843	67.49579781
Zm00001d029328	19.96283984	21.03843886	17.97772265	12.63470065	10.78338113	11.94187804	12.99282859	12.41658401	11.49309111	12.24829294	16.24145319	14.00254585	12.40377772	11.9136333	11.18007177
Zm00001d029329	45.14033705	50.4850696	43.98430158	13.37405523	12.66095622	13.63415714	12.74144373	11.12176923	11.31611845	13.11932777	13.76053726	10.47533892	13.20279652	12.42825717	12.16152686
Zm00001d029330	0.065101114	0	0.40453928	0.405956426	0.042890134	0.079757772	0.038035326	0.196242812	0.160575457	0.359140676	0.164189186	0	0.182125592	0.071366127	0.978455033
Zm00001d029331	41.77749092	40.57532014	46.46122242	13.63127484	14.6201675	12.67972411	16.44529555	16.53437057	15.64828345	8.868083862	15.29114017	7.82470178	8.315149385	7.06181582	8.652467066
Zm00001d029332	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029333	51.95723739	66.10333288	47.33467311	4.906478512	3.783308072	4.082369531	4.358646559	3.92977316	3.677734124	5.026348434	5.408896349	2.025573774	2.294218772	2.073535724	2.367377526
Zm00001d029336	2.11134244	2.762087292	1.831472201	3.409064115	3.422427767	3.382219515	3.761992319	4.013265975	3.673232086	1.919809159	2.569308601	1.744445639	3.189373425	3.785084013	3.89301287
Zm00001d029337	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029338	0	0	0	0	0	0	0	0	0	0.179570338	0	0	0	0	0
Zm00001d029339	83.16276338	87.14665934	73.5950519	10.27457046	10.65747712	17.1629748	11.68783541	7.206973504	13.38881908	6.03045754	7.951399449	7.275951105	12.36904022	10.79014698	13.24563935
Zm00001d029340	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.008889658
Zm00001d029341	0.51050164	0.115736167	0.723276353	1.68082332	9.444157688	0.925642851	6.036794246	10.95676822	9.192015524	2.281173599	2.330407385	1.278053842	0	0.011192596	0.011804191
Zm00001d029342	37.25546513	36.71525039	33.60304461	10.1896134	10.71503624	12.05639211	10.97743166	9.166455157	10.25416227	8.037578988	9.856631019	8.044199187	5.900941269	5.192521266	4.741222321
Zm00001d029343	9.117344945	9.169794227	8.418040607	19.53193009	17.52222554	17.89777801	17.02566597	17.78792091	18.02849989	29.99101099	26.8189076	36.31893954	12.3330506	10.44572369	13.06274601
Zm00001d029347	0.010372712	0	0	0.155236752	0.177678401	0.076247946	0.012120514	0.250142583	0	0	0	0.045961677	0.011607397	0.136451169	0.01199227
Zm00001d029348	0	0	0	0	0	0	0	0	0	0.096567915	0	0	0	0	0
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Zm00001d029350	2.220363523	1.966137676	1.952117206	1.523632203	0.996511201	2.161944715	2.84374757	0.80668322	0.406563391	0	0.158949106	0.042962759	0.553351799	0.457046899	0.504440811
Zm00001d029351	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029353	0	0	0	0	0	0	0	0	0	0.161258889	0	0	0	0	0
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Zm00001d029356	0.426201537	0.151405809	0.244469781	0	1.072767623	0.455212224	2.451773536	2.081962113	1.212980072	9.615840879	5.126482513	4.33993409	0	0.017969888	0.025269084
Zm00001d029357	0	0	0	0.020971919	0	0	0	0.04055202	0.082954111	0.046383482	0	0	0	0.11060433	0.11664806
Zm00001d029358	0.124851451	0	0	0	0	0	0	0	0.025662744	0	0.157441686	0.092203181	0.093141855	0.091244363	0.240575526
Zm00001d029359	15.38961452	4.583237779	19.12625823	0.147074786	16.11590844	2.002052763	44.13503936	39.78396797	23.72717567	987.9472068	744.9894654	1633.586045	0.113113122	0	0.185034152
Zm00001d029360	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029361	31.7290652	31.68785937	44.10234843	36.94612352	41.72994056	38.05306423	35.60434882	43.73701675	34.78826845	61.90913479	66.75176343	51.99204722	36.49639637	29.2190381	34.18148999
Zm00001d029362	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029365	1.734522183	2.644229352	2.683715062	6.389917416	15.41880719	6.865000776	10.85821641	9.727903293	6.781157329	1.054770559	2.496155895	0.581411011	7.036773521	4.904301132	9.893802655
Zm00001d029366	15.07430373	20.8774531	10.18141989	0.477231218	0.511844094	0.277021269	2.567626465	1.775672876	0.643527595	8.835728779	8.55413128	17.13536296	0.810991823	0.934297008	1.467969823
Zm00001d029368	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029371	1.854891034	1.070777639	0.992544238	0.621174531	7.479371253	1.167810092	7.977384029	10.59267421	7.815949856	173.436522	63.18756899	153.60313	1.047450956	0.819006999	1.965798235
Zm00001d029372	1.565181963	0.364373206	0.967996866	2.211063811	1.866872794	3.153526235	2.747706626	3.20206937	1.939451804	0.890056993	1.655700505	0.895679112	4.158748466	4.814018951	4.30521848
Zm00001d029373	7.961532894	4.14275027	8.521528842	13.31617216	10.60161563	16.37715881	14.93021467	10.4641849	6.594391227	4.268811211	4.296671987	4.064035807	13.91120439	13.7017681	11.10599627
Zm00001d029374	0.677403483	0.358728536	0.746210969	1.497650058	1.379439449	1.810716988	0.773556294	0.714695107	0.930361179	0.74315427	0.718327691	0.622488285	0.413474317	0.607576488	0.436083779
Zm00001d029375	11.01649884	10.07746154	11.16420415	11.19247605	9.580863998	11.29295529	8.732470857	7.798196021	9.093322047	1.602949902	3.081971659	1.210490922	6.16998558	5.498922833	6.437358388
Zm00001d029376	20.76217104	22.17417407	21.41860347	15.70410384	22.38733928	15.82494403	22.19932775	25.7061425	21.02543411	9.731553799	12.82013699	7.122226123	21.81796568	20.59742748	22.43405584
Zm00001d029377	0.064895098	0.05449041	0	0.013489058	0	0	0	0.013041453	0	0	0	0	0.108929547	0.011856714	0.012504598
Zm00001d029378	3.531450776	3.33590649	5.316313243	23.87613642	31.91807448	28.66956963	104.8296863	88.62541142	87.05331603	2.967932195	4.317421401	2.773897176	10.11474363	11.27689053	12.67988844
Zm00001d029380	0.884927955	0.750628799	0.886566269	3.828968138	5.235202632	4.447259655	3.228731906	3.342608746	3.26294844	0.199259028	0.204965365	0.130037545	2.657541997	2.544009169	3.058852666
Zm00001d029383	1.395965658	0.566700269	0.702566952	2.446015933	2.569064742	2.487634815	3.558951016	4.604502237	4.296917928	61.71991629	46.54036016	78.80185732	2.388381184	2.112076016	2.294176942
Zm00001d029384	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029385	0.021909029	0	0.054457211	0	0	0	0.0256007	0.105669207	0	2.840319288	0.027627988	0	0	0	0
Zm00001d029386	0	0	0	0	0	0	0.009374904	0	0	0.143845957	0.010117291	0.044437713	0.053868133	0.035180485	0.009275711
Zm00001d029387	51.94951992	37.86112066	16.19160253	10.57708273	19.34621937	22.17702532	16.33681487	10.0287712	26.26737127	16.13023765	18.92773503	13.31202646	65.84459183	126.1743364	72.41345965
Zm00001d029388	489.0662947	536.1876915	528.7153164	455.1100275	423.4895917	404.6287515	370.0787086	457.9619833	463.8574376	782.2942883	760.0475138	944.9023685	629.170865	621.3395764	525.1736552
Zm00001d029389	12.41083079	11.03126458	12.52002792	10.00521409	9.722148571	9.366439303	7.482157817	9.551187853	10.01867665	15.18795284	13.93343026	13.57490188	8.792033299	8.219591292	7.700812879
Zm00001d029390	1.710987423	0.899080702	2.119516244	3.412112421	4.977416621	3.532222502	3.502001029	4.337117658	3.387842004	0.149398727	0.742554102	0.218458035	1.687751425	1.519393836	1.779036954
Zm00001d029391	0.018301518	0.00768361	0.045490361	0.076082864	2.08996102	0.627812182	0.791256984	0.617889015	0.203137626	0.050481621	0.092315205	0.033789318	0.88063941	0.3009415	0.190431471
Zm00001d029392	13.35445135	13.62807033	13.396013	7.822534119	8.943409631	8.433625067	11.89985335	11.58192417	11.48941176	11.18832113	10.62945509	11.67791933	8.137854388	8.183450122	8.213417152
Zm00001d029393	17.88388158	18.50371842	19.77303329	27.54131124	45.69794174	26.42208054	30.10761421	38.46359119	36.00811267	8.239877281	17.23986458	4.828002478	20.42771468	21.65256596	24.09161084
Zm00001d029394	252.8897488	261.8210753	253.3785898	103.1803754	90.45570395	115.9749355	87.90170436	87.0340007	74.17508774	143.0940374	122.2212764	116.4685883	135.1732654	120.5380728	132.7731498
Zm00001d029395	0	0	0	0	0	0	0	0	0	0	0	0	0.013279991	0	0.096042261
Zm00001d029396	9.974163282	11.21910731	11.04347451	21.1217181	7.501816817	15.40708254	7.368467227	8.142266348	6.82593825	1.620108769	1.590393411	0.886149367	33.08099687	29.64986072	27.70391414
Zm00001d029397	8.20189436	4.752265156	10.32476365	9.801737515	87.56116428	20.23680724	68.68389054	112.6518748	110.6673928	337.346104	210.3562189	253.3402365	1.173898619	0.672369607	6.416220741
Zm00001d029398	0	0	0	0	0	0	0	0	0	0.302023337	0	0	0	0	0
Zm00001d029400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029402	0.808151759	0.805813854	0.903936046	1.15067649	3.354304282	1.105607737	3.344485568	3.150712185	2.591355652	0.69660907	1.528657943	0.350633255	0.685797058	0.317456221	0.981050404
Zm00001d029403	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029408	15.95160896	13.79182586	16.57991689	14.93435509	23.18140899	11.6204696	16.978896	23.84326448	20.06675646	17.51787507	27.32539374	14.60742458	4.992677395	4.311296174	5.476631096
Zm00001d029409	7.357901715	8.255274312	7.518112865	11.08046305	11.58573799	10.81451101	8.570882292	9.522472378	10.07944683	3.229552174	5.645295706	2.021792804	5.857379247	6.467892329	5.454398623
Zm00001d029410	32.99304389	22.50690868	27.02420352	23.04634961	51.05743539	23.52437271	44.97044083	58.26240647	55.12810843	15.54464417	19.03311412	3.158897734	18.80113461	19.47387974	24.95700321
Zm00001d029412	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029415	0	0	0	0	0	0	0	0	0	0.014015029	0	0	0	0	0
Zm00001d029416	24.42449696	23.33673278	24.48235479	23.50482357	38.480192	22.25861829	28.5751036	35.83564397	34.44650319	38.74484374	58.08706239	35.5363998	11.6301228	11.73544971	15.4517952
Zm00001d029417	0.278216179	0.360148038	0.364977214	0.106021407	0.234210682	0.123085765	0.099334769	0.205006623	0.142965712	0.085267995	0.47753158	0.102731753	0.242147763	0.127079311	0.187632591
Zm00001d029418	7.324290854	6.631135144	8.567625516	15.86754108	30.95317101	15.50185634	18.70075593	25.30880918	19.60831321	2.543403702	6.389754064	1.353326906	8.35886718	6.683513728	10.3309478
Zm00001d029419	2.409957564	2.032892173	1.660878571	1.237326166	2.312095289	1.809613789	2.084990904	2.21398877	1.839899937	11.2169465	8.692290238	15.02954922	0.878227064	0.856277577	1.125623768
Zm00001d029420	21.41603894	24.26248961	17.37968187	12.49702444	13.62972767	13.26314091	13.20071425	13.2443451	12.56615524	45.19448625	34.98978433	48.14874081	9.174406858	9.137875348	10.22681177
Zm00001d029422	15.95156321	15.21469633	14.87373189	8.120313259	7.12951593	7.506935079	7.197552532	6.729571116	7.454619618	6.090959752	6.184600651	7.018870144	5.367972444	5.258615762	5.246131585
Zm00001d029424	1.946464919	3.880059318	1.676207599	1.720308621	0.969355498	0.826190374	0	0.110881589	0	15.5573943	18.05160708	8.658778007	31.5746974	27.92399741	26.96910983
Zm00001d029425	0	3.637810503	0.717914778	0.240143238	0	1.887226156	0	0	0	1.593370604	0	0.853204085	1.723780253	3.166243669	3.339256071
Zm00001d029426	17.42503969	18.83888487	16.30609497	19.31367955	14.51196847	17.15402655	19.09643079	15.46823481	15.76334068	16.32140269	18.17409576	16.09623477	15.76391659	16.03451959	15.34411933
Zm00001d029427	0.04809581	0.075721063	0.164377438	0.089974511	0.031686643	0.176771843	0	0	0	0.762818586	0.651991361	0.1198763	0.148007078	0.303164814	0.236322608
Zm00001d029428	0.170814168	0.176723027	0.21228835	1.962937899	1.157516873	1.748905364	0.349293624	0.205963005	0.353609942	0	0.18463041	0.040547182	0.552959629	0.4815064	0.27506768
Zm00001d029429	1.860533633	1.641376609	2.266438592	5.080296423	3.639490158	4.232469541	3.447806536	3.622021113	3.224505357	3.131177026	2.945660315	2.583077926	3.797122059	3.445726049	3.75245898
Zm00001d029430	0	0	0.235981247	1.894463321	1.501154694	1.395761011	1.774981883	2.518449423	2.341725416	3.142480914	0.957770254	0	2.762238148	1.040756021	3.73192785
Zm00001d029431	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029432	0.031573289	0	0.013079792	0.045939642	0.097072359	0.058022398	0.141424654	0.184005962	0.33097828	0.007257462	0.046450751	0.081609398	0.005888587	0.017305874	0.079089899
Zm00001d029435	2.87650891	2.923975989	4.041229445	5.400682743	4.851072803	5.429821567	5.261009767	4.95757142	5.784021611	1.325986801	3.124663849	1.151630386	2.895265847	2.519236529	2.928006352
Zm00001d029437	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029438	126.1820395	130.4800016	143.1456601	45.4671197	55.6683183	62.0807806	43.59666657	47.63618351	49.84236598	20.88310026	18.86540294	10.73983389	12.10881228	7.901452881	8.711038524
Zm00001d029441	0	0	0	0	0	0	0	0.047278383	0	0.009012852	0	0.028956735	0	0	0
Zm00001d029442	1.216544151	1.596531728	0.95156097	0.880624829	2.241923625	0.823386085	1.153130732	1.015529077	0.986235072	0.305057264	1.577013126	0.556016166	0.523596911	0.923274289	0.777012541
Zm00001d029443	2.194125581	2.372757549	2.515498795	9.167234199	9.564705125	9.028274506	34.39558195	30.86401787	32.77352762	7.052216909	7.482784695	9.001740491	14.84680856	16.86357682	17.04823749
Zm00001d029444	23.77070402	19.85610922	19.51628688	99.84333717	86.33668079	79.97333362	89.66057134	94.97091339	76.55543414	20.04393232	23.21945725	34.72290815	168.7664339	170.9315186	177.7797871
Zm00001d029446	0	0	0	0	0	0	0	0	0	0	0	0.0346355	0	0	0
Zm00001d029447	7.618145501	8.551508527	8.037664279	42.82635264	52.67688291	50.05001606	42.5188842	59.61024089	59.18178778	78.56202286	87.62146661	34.69947979	18.801248	18.39299731	16.3646034
Zm00001d029448	27.45824399	31.91038424	24.23295918	36.85580124	54.63906458	40.16482075	66.34574131	72.67326974	68.77434362	72.18613533	47.2058395	33.73016207	27.98436199	26.53641406	31.60046972
Zm00001d029449	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029454	1.567242713	2.055254779	1.814059405	3.063842175	4.498738517	3.343675119	3.62493021	4.320018843	4.321257415	2.280194703	2.347190377	0.750862121	3.856743522	3.573735574	3.30047912
Zm00001d029455	4.315016095	4.414100781	5.114198657	7.809739093	11.52387576	9.232008167	15.38454274	17.38539094	16.23740505	14.97940094	18.64665876	11.99658146	7.9142613	7.84532945	8.760727244
Zm00001d029457	21.26028777	25.12439003	20.8116581	26.48459722	25.1153188	20.77636791	29.96879411	36.37556767	30.79837267	29.30468202	35.36087779	39.11286608	14.93818391	16.34569776	20.68102699
Zm00001d029458	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029460	4.048718678	5.991195305	3.948690182	2.354870741	2.631506237	6.361556163	2.460931057	2.648887043	0.313474	111.8022094	28.02336553	93.25956886	15.44076734	13.73300375	15.28105071
Zm00001d029461	5.741537697	8.483667749	4.156028803	2.088260195	3.86727535	4.277614122	5.18598569	6.618995561	4.159373662	54.74083664	19.71727031	42.16606432	3.795360462	4.484593793	4.575656103
Zm00001d029462	8.224871857	8.689307894	7.003798376	5.407375439	4.811648159	6.275686596	4.003700857	3.148895703	4.210763476	1.073854405	1.316775529	1.132206216	2.460826324	2.520972994	2.177224444
Zm00001d029464	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029474	0	0.021782378	0	0.172550739	0.182303416	0.116534126	0.111146873	0.344076582	0.074650829	1.025629445	0.239896914	0.287369497	0.096765021	0.113752461	0.239936426
Zm00001d029475	176.6789454	168.0474854	203.8144825	90.34566826	68.26610279	75.03683469	50.47497025	50.28896712	59.529843	37.68943129	52.8168451	30.43577777	53.91624813	54.41840413	53.82842363
Zm00001d029476	28.72940462	27.538608	66.19545557	29.31815231	18.24421255	25.63059862	14.32696374	13.1959489	14.17252947	25.68636573	19.73839568	16.07395037	18.68953264	18.09158701	17.32845211
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Zm00001d029483	42.16287795	37.23290262	48.26329496	65.13659104	97.92750014	62.86993077	59.4078719	82.42198112	62.01703415	15.22053799	37.67784897	9.45974573	38.73415421	35.49068531	54.40406328
Zm00001d029486	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029488	1.173055659	1.116611717	0.752452658	3.917022026	2.193858343	3.218694432	3.669980335	3.350328058	2.286724036	0.469694656	0.913460599	0.652723054	4.470394726	3.976354676	3.524902336
Zm00001d029489	1.940890204	2.373184427	1.989578676	6.449027988	4.312125194	4.738355516	7.664610888	7.294131801	4.944559282	5.763928724	3.894601532	1.977399935	9.971800818	9.986080982	10.87570903
Zm00001d029490	19.95129103	21.14976482	19.79734139	11.13891441	9.990901825	10.47113575	10.57045155	10.47982361	10.47520919	28.02301861	18.24719777	53.67485687	6.965773233	7.750793929	7.454644853
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Zm00001d029497	92.67439479	93.43900004	109.3837437	79.21870599	89.53705408	100.9642761	71.85045982	79.15007824	78.64365483	8.62753851	14.26206979	5.426733484	44.47010255	36.00258918	42.41226239
Zm00001d029498	67.46456739	75.26713894	77.37448875	57.12218752	51.41636126	55.14267416	51.14005773	49.37355391	49.48167618	32.39639744	42.75264324	30.65455113	61.12029294	59.44074386	64.40677527
Zm00001d029499	0.036343555	0.091549684	0.052695857	0.052880456	0.079813276	0.022262914	0.106168611	0.146073516	0.067232524	0.08353959	0.106937574	0.046969698	0.48803526	1.02922793	1.20451913
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Zm00001d029505	71.80973991	80.89569776	83.73418871	81.09662269	33.25427888	55.63015188	21.61020544	21.51102826	16.45718418	0.789143189	0.953475321	0.135823969	75.34935936	71.23811615	70.2401783
Zm00001d029506	31.59477308	28.22302467	21.59002947	0	0.325090825	0	0.169584256	0.384985899	0.214782459	0.40031604	0.201314767	0.498381686	0	0.079548231	0
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Zm00001d029530	3.76541275	3.408708741	3.882809649	4.429510146	5.151336397	4.542536451	4.133310175	3.868461858	3.864895838	0.202028459	0.493605819	0.146309589	1.443056598	1.197792631	1.779646151
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Zm00001d029540	4.380104072	4.863257112	3.404128415	5.161701916	4.340496715	4.523596146	4.173479026	4.51029376	4.449484974	30.15450353	20.89173351	36.77155233	2.808559883	2.923302701	3.027238499
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Zm00001d029557	10.14490834	10.71649843	12.12594841	17.74003346	12.24375343	17.76565715	11.27081078	13.30701612	12.00458327	2.982663818	3.008135966	1.765921493	26.41030897	29.22000753	27.54803379
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Zm00001d029559	149.984148	136.5397983	130.1262645	54.52431486	35.88417596	49.69131632	29.27659361	23.57728384	19.83842599	12.09416957	15.91196	16.99468098	26.02581969	22.15193213	23.57228015
Zm00001d029560	29.4887736	26.27033688	33.53672699	6.10854795	5.039770607	8.720111732	3.317149973	3.4063697	2.958068174	0.575576846	0.884837062	0.304817964	4.423800698	4.761013654	5.715754918
Zm00001d029561	17.69903359	18.43262784	16.46421361	11.226729	10.75478467	11.29860825	10.0960738	9.142731807	11.56003635	8.144599927	8.899506104	7.381475279	8.196740641	8.591866192	8.434157736
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Zm00001d029567	11.14366828	12.82510647	11.17439941	16.21284811	13.57327162	14.41860773	11.51388104	11.85733652	10.25263083	5.392297534	7.113415477	3.171787214	8.662058016	9.401980438	8.789462176
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Zm00001d029571	1.783204424	2.093002396	1.501277608	4.216708682	3.907634099	3.53932105	6.997859851	7.583284659	7.551325493	1.269333104	1.821509769	1.784189749	7.581328999	9.115446281	9.94606033
Zm00001d029572	3.508090214	3.552089349	3.034807881	7.206109537	9.494095349	6.00440586	14.16636484	14.88779433	11.34632239	3.628676075	4.402128943	3.124122129	10.91104114	12.93208085	15.88533817
Zm00001d029573	0.053922826	0.004527733	0	0.076216905	0.156312716	0.044041894	0.201628234	0.398781081	0.155170866	0.158652731	0.199462015	0.023893304	0.551117885	0.595061765	0.548610884
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Zm00001d029590	9.568242008	9.089491722	7.507730764	17.05016989	16.16545945	15.78551065	19.61323398	17.53055897	15.24038235	1.341984732	1.032755826	0.332349812	36.29549168	40.56948452	43.26442627
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Zm00001d029688	5.022198933	4.044958458	7.377066237	4.081267883	18.99152209	4.423019098	16.57656228	24.85011047	14.71616507	77.67998994	46.65027755	39.55079545	12.08269421	10.76822074	29.4286424
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Zm00001d029750	5.857536157	6.7018841	6.340877832	9.822281531	8.896325203	8.68307918	7.842425293	8.783463659	8.727271806	10.79651078	7.21165718	5.162670502	9.307366489	9.949916503	9.738338029
Zm00001d029752	0.275340088	0.105545348	0.193413701	0	0.236609321	0	0.125896263	0	0.088583658	0.231145706	0	0.026522544	0.468869738	0.511811367	0.166085591
Zm00001d029753	10.13544082	10.42573235	8.807208038	10.3515552	10.98598471	9.920992788	11.5018826	9.22222934	10.17168532	20.91084286	16.30466097	19.56735912	8.885733003	9.640879444	8.435540249
Zm00001d029754	2.410670224	3.067549594	2.42149962	3.455906094	3.18296098	3.659781281	3.351201934	2.747898807	3.356146733	2.125073441	1.980657047	1.783958078	1.921704758	1.942492313	1.677984775
Zm00001d029755	33.7320582	35.45696798	33.82660467	39.35251654	38.15985347	43.30883332	53.76659841	42.04896822	47.58784032	23.71881649	50.69932861	47.54735468	29.80779647	29.15506639	27.03057694
Zm00001d029756	62.64150591	58.63308336	57.22734926	55.28969881	59.22562089	60.58769663	80.15669793	70.57547773	61.07159647	90.18212913	97.09203477	74.30968636	41.96033097	41.3705538	38.70136942
Zm00001d029757	2.821048269	3.160227576	3.135179419	3.585948428	6.415649229	5.533195438	5.6419067	4.578998951	4.081292868	3.236007132	3.882390139	2.554110444	1.684661728	1.308378998	1.677799495
Zm00001d029758	0.785316745	0.665820688	0.56584864	2.031233918	1.264271544	2.100192921	1.742449806	1.525377746	1.624238335	0.914508304	1.310137228	1.604477553	3.050135533	2.874105674	3.324378444
Zm00001d029760	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029761	1.836919659	1.692550332	1.683576076	3.50734767	2.470390127	3.850375204	5.236302083	5.096246158	3.074036693	2.877182288	3.478038475	1.374578401	6.300116205	6.587577229	8.88332997
Zm00001d029762	5.979257108	7.167807288	6.878873829	50.76983109	38.70454222	57.9218313	44.77789201	38.10508658	45.1479548	12.78352816	16.41871499	11.43623665	33.01086224	34.17500931	33.16044472
Zm00001d029763	0.791770304	0.531860068	0.590408679	1.601882113	3.17618831	2.414289317	2.097082843	2.651929895	1.28026378	0.994916737	0.754382749	0.740651423	3.051834248	2.584611091	3.376788679
Zm00001d029764	0.043400743	0.100216226	0.008989762	1.091571723	0.791084696	0.903921417	0.287378019	0.078497125	0.178417175	0	0.036486486	0.024038687	0.291400948	0.285464509	0.217434452
Zm00001d029766	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029768	0.12783142	0.241506219	0.096157713	1.132762271	0.27481769	0.947908561	1.10062853	1.180354159	0.887827392	0.009278979	0	0.007452939	19.37916685	15.76499524	12.79944083
Zm00001d029769	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029771	9.099165559	8.892691595	10.74956679	5.832952856	5.392305678	4.866798263	4.116323117	3.235424259	3.678973877	1.736634189	3.137957807	1.560933132	8.102192464	6.260969114	7.608280152
Zm00001d029772	4.72938284	3.964638624	4.228485634	5.869415141	5.489549898	5.699620021	5.977041138	6.251418884	4.529097825	2.851641823	4.164030497	2.598131628	11.88831998	12.20433268	12.64821756
Zm00001d029773	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029775	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029776	7.426826341	23.34148636	3.534516173	2.36138588	1.150687261	2.527992244	2.582703995	6.262020499	1.410595027	0.085267995	0.331348443	0.419487989	7.177951548	7.929748983	9.828373813
Zm00001d029777	0	0.119576179	0.10113482	0.016914851	0.017870889	0.016616203	0.015848053	0	0	0	0	0	1.24452488	0.936680419	0.392009228
Zm00001d029778	14.77465773	25.08646066	14.92202072	2.822257943	4.435696497	3.620195455	4.414387228	4.803250884	4.843623569	1.03173108	1.650876225	0.290042702	1.883542376	1.619649862	2.118973437
Zm00001d029782	20.37460194	21.60873124	19.01774864	13.56247895	18.52573737	13.99811587	21.30300203	22.56721152	23.83293166	27.45015976	28.59065813	33.34691941	10.56901018	11.23261419	9.909689913
Zm00001d029783	466.51324	512.9874621	400.5321577	38.05010623	27.95479585	24.82406242	39.30255518	35.20803123	43.98637946	57.09062658	73.97773303	37.89307519	22.49786727	20.46723399	12.84401951
Zm00001d029784	0.46441559	0.621491476	0.360735664	0.470599169	0.592812682	0.675655012	0.576586472	0.227491668	0.393767841	0.60047406	0.384328191	0.852071914	1.997581336	1.400048864	1.761794339
Zm00001d029785	10.23070497	9.091877645	9.4473176	10.42764426	15.13129717	12.56582563	17.61328176	17.25930374	15.85968564	11.89845338	12.77027006	6.428807706	6.690391413	6.888559508	7.51263907
Zm00001d029787	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029792	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029794	1.622010804	1.112666475	1.457884142	1.011450756	0.896876322	1.188762556	0.693822367	0.785802786	0.857309644	2.776301994	2.209770778	4.475932131	0.956159359	1.460586416	1.188784594
Zm00001d029796	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029797	0.018083643	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029798	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029799	0.054794525	0.017253477	0	0	0.072199825	0	0.016006851	0	0	0	0.034548827	0	0.107304457	0.105118444	0.031674974
Zm00001d029800	0	0	0	0	0	0	0	0.018563509	0	0	0	0	0	0	0
Zm00001d029801	0	0.003308795	0.019589527	0.06880353	0.027692323	0.028966601	0.104370572	0.123537943	0.058318143	0	0.013251241	0.005820282	0.338073255	0.354225032	0.361431905
Zm00001d029802	2.848173733	3.856331758	4.070676504	4.750958796	3.940531072	3.838342781	3.452894444	1.33077157	1.273313195	0	0.628536729	0	2.470078344	1.405020628	1.728760695
Zm00001d029803	0.236259277	0.148784717	0.163751693	1.416597697	0.74833235	1.168932452	0.583992045	0.180786	0.117669951	0	0	0	20.75396479	19.50935035	13.99358038
Zm00001d029804	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029805	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029806	0.400666713	0.21409021	0.286698353	0.863108067	0.879895291	1.219741417	2.426018755	1.961730989	1.796847921	0.050235041	0.061242858	0	0.516292087	0.346055998	0.659745264
Zm00001d029807	0	0	0	0	0	0	0	0	0	0.042370529	0	0	0	0	0
Zm00001d029808	12.3925663	12.72394719	12.13073617	7.247141396	7.541354972	7.644943399	7.649705713	7.582188654	8.295198501	4.614071913	5.649065172	5.093398828	4.189705327	3.494700037	3.746412854
Zm00001d029809	53.64906367	48.33068018	61.48323384	59.11482715	53.62159565	63.76105922	39.10576239	37.88254253	36.20568768	23.21929695	44.19778771	29.05298441	59.81847594	52.52273615	54.51096885
Zm00001d029810	1.888788897	4.021535689	3.141034593	7.437014891	7.27664986	7.437936968	16.2586005	18.11114585	15.76227702	0.186067949	0.521732744	0.139487642	5.133066033	5.324288696	6.01036801
Zm00001d029811	17.35430515	17.42456935	16.3439907	10.344618	10.74109792	9.886987701	9.584902169	9.3001519	9.625539993	2.406108521	5.107631521	1.717869121	7.306770027	7.202653011	7.112615431
Zm00001d029812	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029814	0	0	0.097487335	4.667833395	3.396054882	6.603551276	1.401071765	1.094455815	0.870661187	0	0	0	2.232083487	3.316770007	3.640519009
Zm00001d029815	1.787776743	0.993402099	1.26340729	2.142200832	1.408775944	1.803752691	1.761328176	2.071116449	1.18887598	0.145037581	0.309433467	0.155326898	0.568792234	0.922269951	0.830818327
Zm00001d029816	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029818	5.536246459	5.765958459	5.438622784	5.749946973	4.833656968	4.684753863	4.866740041	4.434448068	5.225243107	1.472037903	3.054721423	1.53448581	4.328357506	3.639890507	3.959500783
Zm00001d029819	0	0	0	0.230407701	0	0	0	0	0	0.25479575	0	0	0	0	0
Zm00001d029820	23.84981684	26.26835525	24.18377155	29.82742615	26.20994181	34.15029861	31.87193746	27.83496589	31.17742452	5.275697885	6.921113518	2.542485897	10.57126065	8.897324464	9.652697882
Zm00001d029822	19.56588427	20.43161025	17.70584207	42.84849292	28.30163321	44.83584518	29.31446189	21.86667349	26.70046508	8.901908392	11.00291698	6.460909776	46.57442448	52.37737877	47.32752829
Zm00001d029823	132.7326286	110.9493795	121.1640906	12.60118136	10.51487541	8.513510603	6.312831494	6.091518967	7.349415152	6.853736655	7.254784642	5.801916469	12.62188041	9.267908818	12.70663323
Zm00001d029825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029826	6.665883808	7.346242157	4.544902926	13.75944861	17.87153467	14.95323196	15.81256434	20.09384641	14.59587408	5.086137281	12.72558853	4.683474119	13.53731716	8.576017558	16.82266454
Zm00001d029827	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029828	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d029831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d029832	6.389028683	6.881507024	7.400283002	6.352417621	5.672403259	5.914937776	7.484385056	6.034899619	5.59698562	1.919891224	2.810737192	1.80056695	4.160052962	4.410502266	5.088745852
Zm00001d029833	13.77527093	13.2588008	12.82918565	9.870645137	8.996773793	10.11179285	9.846947127	10.11922632	9.722780566	7.583405183	11.8852054	6.189216501	7.515606597	7.256897223	7.354959336
Zm00001d029834	0.102791232	0.194198907	0.191623869	0.747814469	0.361180077	0.776588833	0.440409039	0.640371282	0.802877285	0	0.086415361	0.01897791	0.249224495	1.014150228	0.336715295
Zm00001d029835	1.409743546	1.321359786	0.957506641	0.449764673	0.561583051	0.321326276	0.76617923	0.632494819	0.44475936	0	0.082685202	0.21790464	3.246814514	4.186983934	3.297615468
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Zm00001d029840	1.545526794	1.910548628	1.470230684	3.212523286	3.00440451	3.062297711	2.898435175	4.049202701	3.423854216	0.197364468	1.14290798	0.200797682	4.622660181	3.942816668	5.106832511
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Zm00001d029847	0.601026383	0.191914214	0.315615785	1.045180693	2.732752199	0.88153327	1.889284122	3.592883883	4.311674735	11.25455703	13.74919231	9.180396713	0	0.037119224	0.107655686
Zm00001d029848	61.94896156	57.70716882	73.02600937	20.23447043	35.42921555	18.69680368	30.33329221	38.21741093	39.59419747	80.66360146	94.37014218	99.59530961	22.87658798	20.47918648	22.96676393
Zm00001d029849	2.710805231	2.58530585	2.099086648	4.209131849	5.044988561	3.96544632	5.562572373	6.660435318	5.730097593	17.2218178	12.07434789	18.30375029	4.308076989	4.381745287	4.141685642
Zm00001d029850	0	0.094846603	0.051048522	0.042689459	0.225511471	0.243227257	0.215984275	0.454001899	0.118200261	0.056649631	0.05179729	0.015167123	0.337073705	0.592871332	0.862710824
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Zm00001d029853	454.9659475	413.9360231	384.8342657	49.69926264	95.13829704	84.25982008	127.7392543	141.9881552	113.2628322	868.5788015	528.5020812	999.1200401	56.29154746	48.05562647	57.70224136
Zm00001d029855	10.27811549	9.213659232	10.59066301	15.04426755	17.5305124	14.30330943	21.64598649	26.81053504	32.05916343	63.78360642	61.39811421	84.82567784	22.2057897	20.8022318	19.40249067
Zm00001d029856	5.695590477	6.76173495	6.841417776	13.49285869	20.08455211	13.48833764	15.84746283	19.12409024	18.86574905	12.8037827	13.72316131	8.009913968	15.9694496	16.27147699	17.66470159
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Zm00001d029861	0.028321586	0.076438161	0.025141536	0.338076763	0.570429899	0.525424092	0.439674411	0.365886273	0.329324628	0.039060136	0.362246341	0.049301006	0.276179797	0.283859352	0.215172345
Zm00001d029862	2.758231405	3.889372545	3.490038437	2.380542725	2.910133223	4.187283034	2.265437403	1.855699575	2.008953909	0.124045299	0.453680647	0.044281791	2.091249124	1.489924409	2.137481895
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Zm00001d029868	3.032379742	2.571914819	2.582223469	4.647731149	4.614453115	6.047950252	5.440273076	5.730759106	5.968514189	3.632980176	4.54493816	2.759691481	3.399042979	3.458512315	3.370096599
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Zm00001d029872	4.125948581	4.917530696	4.441705374	4.824097581	7.565501111	4.970933115	8.554753532	8.24462729	8.542018016	2.650686819	5.035280224	2.968172037	4.869564906	4.540677727	5.487546896
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Zm00001d030011	40.30987849	37.8427825	39.68681802	45.31860678	57.23122998	46.71335566	45.54448443	48.21235854	49.64092558	8.89062268	18.59135162	8.198279661	24.02182577	23.5967479	27.53688085
Zm00001d030012	4.744305349	4.024856901	5.110071766	7.712362446	9.247639847	8.164116262	8.55772079	8.784664283	10.06783136	6.422844916	5.776420521	4.216502599	4.527931356	3.951468731	4.608715047
Zm00001d030014	84.85610256	83.0287927	71.91377221	30.1231812	25.83397416	33.26563744	29.65698896	27.47986422	28.92931552	31.95527066	41.34988887	38.94498359	22.19597281	20.09993423	19.95427485
Zm00001d030015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030016	1.620816393	1.319529294	1.821677912	3.046765753	3.769910139	3.148376384	3.513366202	3.38185036	3.957274538	1.386579208	3.151755312	1.597705279	1.240707127	1.359635082	1.118899411
Zm00001d030017	0	0	0	0	0	0	0	0	0	0.206064322	0	0	0	0	0
Zm00001d030018	1.368834435	1.724052036	1.977635078	4.203859158	4.351281942	3.437869425	3.37890794	3.301005502	2.848757327	0.401167776	1.639836931	0.360129008	3.580511642	2.288360672	6.44892958
Zm00001d030019	2.848893151	3.153259167	3.480529667	4.487566815	4.873159922	4.759478063	4.200506507	4.513535112	4.765550223	1.709750919	3.670928477	1.606627041	3.102989504	2.755860954	2.846563275
Zm00001d030020	32.01130959	33.89303532	33.83343785	18.68234596	16.87373884	15.45054436	18.01803207	20.25772321	18.59003917	1.436988899	3.368865942	0.810735132	13.93087876	13.94744809	14.30109209
Zm00001d030021	0	0	0.004826889	0.164689141	0.127939321	0.228397256	0.099842731	0.051513738	0.076638286	0	0.03918151	0	0.060846505	0.144759701	0.242475526
Zm00001d030023	0.088947521	0.044811893	0	0.088745191	0.140641689	0.010897288	0.187083321	0.407551761	0.087757569	0.245346591	0.919758553	0.433540918	0.019907026	0.078005916	0.3702077
Zm00001d030024	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030026	10.23667148	10.63700447	9.904271733	10.00687565	8.565412079	8.904818413	8.321858994	7.966111411	9.785312896	6.70087842	7.4297619	6.780323642	9.308492584	8.388799632	7.281456111
Zm00001d030027	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030028	45.91288332	48.34807029	39.70902564	23.95717922	32.88081613	30.13736665	30.08669716	27.69970074	29.78037886	44.92056287	37.41001776	33.14887204	15.76082887	16.1473444	16.53714804
Zm00001d030030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030031	16.37674957	17.77383669	16.08011756	20.16160194	19.16220024	19.51816554	16.73021453	16.60564748	16.76593376	17.04534481	16.61186251	14.52374499	16.38632754	16.69292459	16.04386808
Zm00001d030032	20.41927386	20.16813917	17.51766924	10.23240135	29.52911985	16.59101491	31.21717969	39.40470979	37.49539787	93.24459215	59.88033881	62.49734308	6.684733806	6.457599866	7.354019102
Zm00001d030034	10.12424498	10.42403996	9.491253419	11.77455678	12.78626061	12.62891001	13.37547206	10.77135436	11.18987714	3.007601849	4.826278553	1.222415719	5.243256959	5.050033571	5.133598154
Zm00001d030035	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030037	0.057502561	0.081477775	0.026799132	0.457181211	0.416724332	1.03030939	0.529134978	0.771351874	0.505280815	0.069392323	0.081576646	0.095548092	0.490647494	0.827351789	1.09693333
Zm00001d030038	0.058737847	0.277427009	0.218998708	0.494473241	0.29023399	0.197895224	1.304068322	0.903012038	0.651960502	0.303784406	0.203693352	1.398943111	1.298158356	1.368297926	1.290270373
Zm00001d030040	8.371578919	8.417506634	7.567590715	9.339086764	10.95868676	10.02649591	7.434829775	8.425986407	8.473591659	2.40402485	2.710670531	2.554368149	4.425995524	4.027350914	6.524754896
Zm00001d030041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030043	0	0	0	0	0	0	0	0	0	0	0	0.008580381	0	0	0
Zm00001d030044	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030045	5.455656729	7.275621005	7.950241435	9.845872751	16.20965163	10.17005206	7.824920133	11.4281495	10.05292826	13.36660896	11.87095527	6.801932569	10.91727494	9.592545634	11.72449909
Zm00001d030046	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030047	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030048	6.596660011	7.478577947	10.34017827	40.14195188	27.87949587	41.86395898	50.64903282	47.68949798	46.41974509	6.191752649	8.473831743	3.545451616	68.47073376	76.26007443	77.37145929
Zm00001d030049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030051	20.88922084	20.46100971	18.27086988	15.51574486	14.39646291	16.89099879	16.14397233	13.87225791	15.89050983	16.13661454	16.55842296	18.80018716	10.62016847	10.79256831	11.51339196
Zm00001d030053	0.060119762	0.106009488	0.052301912	0.374893797	0.871382672	0.40510214	0.273974776	0.52193339	0.378136136	0.157538621	0.280507911	0.033298972	0.296014155	0.184535104	0.458743886
Zm00001d030055	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030056	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030057	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030059	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030061	3.271696791	3.349186998	3.080132481	4.886863736	3.710213982	4.857174502	4.228978431	3.533235506	3.970509484	3.096777137	3.538135863	3.390630779	3.072295799	3.036127039	2.886238343
Zm00001d030062	8.000043824	10.60116379	13.09584256	13.90368743	6.686531319	12.27565205	1.369031768	0.996690623	1.764050566	0.921926577	0.117832934	0.007962341	1.520202893	1.820173937	1.94456363
Zm00001d030063	9.93954507	11.72822682	14.43338359	22.57407697	13.92397568	24.65369705	1.467076863	2.396965778	4.215105749	0	0.043979246	0	2.69285697	2.370374937	3.628885424
Zm00001d030064	7.405251707	12.43592257	17.93457474	27.94333398	12.50962245	29.31098124	7.099927532	1.373699685	4.917623373	0	0.239442564	0	4.887036724	2.914116858	4.390503352
Zm00001d030065	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030067	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030068	0	0	0	0.014056199	0	0	0.026339385	0	0	0	0	0	0	0	0
Zm00001d030069	0.129192664	0.066756364	0.069988138	0.045445086	0.048013671	0.02029214	0.023224866	0.007988561	0.03676855	0.164471984	0.054305365	0.212835863	0.27431371	0.185202622	0.107235943
Zm00001d030070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030072	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030074	24.47883429	24.20481477	30.03218537	79.29456183	80.45437017	84.95784561	72.50374849	78.85437693	76.51135584	41.85600884	51.11973763	38.58284466	89.45978671	95.5114185	105.9990333
Zm00001d030075	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030076	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030079	6.690652816	7.640391128	11.8629659	17.30049864	23.15647437	23.66190608	18.13782466	24.17532171	16.88792776	12.18031754	20.5584682	7.609244265	12.32868446	10.5372727	13.79463207
Zm00001d030080	4.765246381	5.830852703	6.27658561	9.075363514	8.175106597	7.734206994	8.582310615	8.594148975	8.120461919	4.025621032	7.669770935	2.917585172	8.933016137	7.039520763	7.706706778
Zm00001d030083	1.142590979	1.087690021	0.990708441	4.77205921	4.446569007	4.18321376	4.005352704	3.300083209	4.325706191	1.172704248	1.993725836	0.809465975	5.82801895	5.447128888	5.867658125
Zm00001d030086	0.435653888	0.274353842	0.232042258	2.018077771	2.473830042	2.579722173	4.896687502	10.26835304	3.633050175	0.100139756	0.104642577	0.080432934	24.88625998	13.92939014	37.90756597
Zm00001d030087	1.621041759	1.643532656	2.081511335	6.144772173	6.935223901	6.299981066	6.959762911	6.768132177	6.590704093	2.708795356	4.075648182	1.646694379	3.300572725	2.658190728	3.888268652
Zm00001d030088	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030090	73.71313024	71.66411745	73.02409049	31.48696392	26.60884835	35.76529761	33.34179504	33.81440734	29.44842731	33.45635119	20.20196739	18.82282641	34.09553176	32.43762498	44.86779656
Zm00001d030091	5.476919598	5.664483873	6.819821667	8.236099013	7.827284261	7.755183677	6.609004192	6.210223231	7.261152892	2.52754243	4.011124116	1.458433409	5.327384041	4.272070939	6.22247301
Zm00001d030093	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030094	0.445975479	0.290956541	0.219311367	0.948343174	1.889742732	1.163516337	1.810806441	1.48943735	1.693560442	1.420422023	1.695260094	1.297276688	0.804241996	0.534617878	0.927353442
Zm00001d030095	0	0	0	0	0.005964853	0.00554607	0	0	0.005582922	0	0	0	0	0	0
Zm00001d030096	2.098961196	2.000361374	2.330345002	4.345437361	5.457626892	4.517294082	6.761100387	6.200630105	5.436062685	4.438714086	7.631772191	5.626824179	2.677637673	2.607748965	2.55610881
Zm00001d030098	12.87485136	10.99636469	12.48180419	12.91177914	18.44136964	16.92981317	16.59521897	18.68942873	18.20634673	26.4212473	24.54867448	21.46678046	14.62191486	14.06536292	14.83393366
Zm00001d030099	0.02707175	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030101	0	0	0.046645572	0	0	0.011495629	0.054820992	0.045255721	0	0.155290752	0	0.17670167	0	0.010286127	0
Zm00001d030102	1.426716703	1.212759731	2.867651	2.551850636	1.547249846	2.521181367	2.017007543	1.153943133	1.3323246	0.63564892	1.18461599	0.572344763	2.444088686	2.368552418	1.710571029
Zm00001d030103	82.3860289	89.18824057	80.52325425	57.61547869	37.77468442	59.1412122	87.81080882	79.72262848	52.28339436	13.26436698	16.11612142	10.60587614	99.24599719	97.04545234	83.92911337
Zm00001d030105	0	0	0	0	0	0	0.08946704	0.041031478	0	0.023465943	0	0	0	0.027978009	0.009835602
Zm00001d030106	48.69684744	52.17550523	35.25670221	40.28855309	19.37157398	29.38587989	19.72859393	15.71322588	16.42222212	13.2194626	14.22203169	9.332971351	36.80913865	38.02971188	36.52179233
Zm00001d030108	2.153737654	1.493027525	1.918836984	1.362796808	7.732620576	1.945349691	5.634657029	5.714394624	5.038574222	18.12827438	15.08987968	21.42097864	1.198227179	1.246010562	1.156178938
Zm00001d030109	32.71756781	41.62085266	41.47644806	71.90562198	43.11019542	64.68378501	29.53487296	28.66799431	29.54249988	10.53735969	10.67468359	5.128835459	78.71637514	95.47605291	95.71935463
Zm00001d030110	215.2773757	238.2054477	186.4213107	71.3373839	77.95276699	72.21294101	82.31167797	77.96856747	80.68742265	142.7954859	137.8148614	156.5625377	62.09172375	66.54004017	66.52407576
Zm00001d030114	0	0	0	0	0	0	0	0	0	0.114041646	0	0	0	0	0
Zm00001d030116	1.527565842	1.13744424	2.256663952	11.15510061	11.39316282	10.73451055	8.621696961	9.290573276	8.602014824	2.106765139	3.876849379	0.702409407	5.181940251	4.971054478	5.653660115
Zm00001d030117	2.620182075	3.265427348	2.9687411	6.621458559	5.053463928	6.139998258	5.997807584	5.807078719	6.544372166	0.58897768	1.146544803	0.13123902	6.320440745	6.735340052	6.058576089
Zm00001d030120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030121	0.021103011	0.079737961	0.008742295	0.05702398	0.041709469	0.051708152	0.041098114	0.127227138	0.08241524	0.179477943	0.168539968	0.10909247	0.137753857	0.27760634	0.382234714
Zm00001d030123	1.710724159	1.265291704	1.963243342	2.542091357	1.985552854	1.721289937	1.318476958	0.78998704	1.687837872	0.150598127	0.257037385	0.080640961	0.879788803	0.973589019	0.740634431
Zm00001d030124	0	0	0	0	0	0	0	0	0	1.328328527	0	0	0	0	0
Zm00001d030126	11.89755457	11.81714809	10.56614213	14.4072622	18.1637405	15.2626144	15.67453955	18.56717048	15.3380489	12.24841251	16.67671338	10.21603434	8.867972903	8.756590811	9.45913314
Zm00001d030127	35.05020335	31.05145521	35.83202082	171.3873103	79.93137764	201.2683155	128.0484283	111.0348363	94.54760651	1.939685648	1.243217668	1.557968731	675.4660738	783.7166802	661.9072373
Zm00001d030129	15.22452366	16.97442294	18.01264373	21.60827712	16.01231674	25.07472413	8.768143588	10.35611191	9.169703734	1.071121314	1.3394381	0.366906268	6.978285849	5.458882707	7.315304834
Zm00001d030130	0.14258692	0.158038103	0.070882978	5.782973766	2.45745975	4.492987886	3.665481986	3.35602226	4.389196474	0.094392418	0.215768017	0.018954158	9.114029635	10.07253837	6.732471474
Zm00001d030131	1.517643802	1.525004294	1.798524951	4.902505627	8.632663938	5.943732059	8.40653385	7.379729702	6.847469333	2.716430272	3.540002524	1.91543929	7.753678078	6.795691724	7.11429333
Zm00001d030132	0.151304852	0.071992741	0.037608423	0.733836628	0.956958428	0.671448239	0.483252569	0.575697064	0.783723548	0.273595239	0.703841004	0.268173837	0.41388108	0.239583777	0.513125232
Zm00001d030133	6.596346909	8.739483941	6.416681557	7.349009395	6.994742086	6.270865875	8.538369439	6.743102368	7.458162402	3.105815042	4.703394764	2.949358752	4.352264152	4.129879897	3.905348212
Zm00001d030134	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030138	20.78806297	19.42583134	26.3462607	33.10214945	39.90411212	35.8569237	28.05707122	34.95109326	33.05389888	17.8107067	31.26089368	15.40796128	35.09952078	29.90263311	35.2629668
Zm00001d030139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030143	0.392322379	0.252107902	0.333345105	1.707513353	1.524452263	1.490991558	0.327449074	0.41029976	0.291292813	0.005521196	0.136303468	0.004434663	0.43454153	0.535402687	0.587800332
Zm00001d030146	2.956996013	1.991929694	3.764934203	13.9804448	16.27484046	10.88181905	9.474282117	10.72325082	9.456946014	1.205791047	3.665665707	0.721748099	6.430999323	6.922659681	10.94496151
Zm00001d030147	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030148	5.634981663	3.044571928	5.700024772	7.506866367	19.98609938	7.266456038	17.72383842	21.33899301	16.4162081	41.60659449	21.21674201	35.46691455	5.660821685	5.54549906	7.579016443
Zm00001d030149	23.15256407	27.41031775	28.82525143	62.16635737	48.52075609	60.13543827	43.41354409	46.58579746	45.95988798	42.57966986	50.17475648	41.94352568	62.66875799	67.59898443	64.38964103
Zm00001d030150	1.075265589	0.464331768	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030151	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030152	27.72303752	32.21336161	24.09737407	8.94494994	12.99929247	10.72374841	11.5278802	12.17798008	11.98642491	19.62200074	17.42444557	19.87901574	8.670270162	8.087142287	7.874701516
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Zm00001d030172	0.569525892	1.000299406	0.8766435	5.258737664	15.82451702	5.857235201	21.88488555	32.102519	30.20248522	75.26100669	65.67159575	30.40739958	2.946863777	2.357005112	8.988743879
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Zm00001d030213	5.237803314	3.612093692	4.120369651	6.327979142	16.16180932	7.961436252	9.795543172	10.4879976	10.79720034	3.659708063	6.080450163	2.744001106	4.309549974	4.007558453	4.153671221
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Zm00001d030858	1.737590882	2.374318366	2.872519923	0.122663093	2.699918515	0.823398582	6.397596572	8.775865616	8.53129317	512.8574068	173.7629516	779.8443909	0.550307545	0.269548322	3.316567281
Zm00001d030859	38.25573049	39.89870596	42.17071898	65.95937739	70.35954384	73.08580088	65.27158975	68.69094392	75.11483025	16.40088737	27.33696531	14.33623463	76.61885391	77.81477658	79.87935132
Zm00001d030860	1.242462943	0.949364583	1.286780503	2.427621886	2.106437002	1.89258597	2.187405726	1.967540779	2.477220585	0.65115327	0.59537854	0.36243727	1.344010732	1.362031509	1.283234667
Zm00001d030861	0	0	0	0	0	0	0.056648358	0	0.179366202	0	0.244537086	0	0	0	0.056048979
Zm00001d030862	0.186675483	0.55321991	0.423060355	0.301288143	0.491944671	0.847546445	0.307948664	0.344252451	0.25730766	2.983463808	1.467811763	0.99746068	1.056767292	1.52878282	1.371106589
Zm00001d030863	3.14023073	2.620742135	3.139004109	6.96065522	9.19678282	6.552202342	8.72030002	9.121093385	8.848324901	5.669323906	8.326010234	4.609973283	4.391338209	5.29140234	4.561441735
Zm00001d030864	0.02179551	0.068628815	0.006771881	0.183481302	0.294367521	0.140188033	0.152808325	0.183962971	0.201599318	0.015029801	0.006871209	0.024144077	0.457310176	0.209063784	0.359079828
Zm00001d030865	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030866	0	0	0	0	0	0	0	0	0	0.138525689	0	0	0	0	0
Zm00001d030867	4.530925446	4.959409139	4.881459991	8.7391294	4.774834946	6.446132992	8.033257317	6.332420501	5.412510251	1.34581141	2.430153077	1.118988787	10.11855299	10.64886031	9.065098098
Zm00001d030868	31.33253611	33.24768806	27.97845859	33.20611318	23.78129464	28.85614141	18.86341839	15.45706058	17.95189212	3.442454405	5.447751809	1.964082545	34.33696879	34.49910939	33.44991257
Zm00001d030870	0.704395942	1.349527379	1.787840504	2.004446677	2.614492936	2.418778879	2.446074453	1.782420201	1.541664222	1.29986511	1.826574912	0.890198965	1.476565396	1.250719862	1.559935008
Zm00001d030871	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030874	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030875	0	0	0	0	0	0	0	0	0	0.178550052	0	0	0	0	0
Zm00001d030877	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030879	0.008056119	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030881	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030884	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030888	100.9763003	113.1281929	90.40063267	67.94037161	76.51468965	76.64661012	83.92741491	91.97346334	78.02005988	65.15250506	58.37489588	49.38573822	70.7370239	72.04165384	78.86818694
Zm00001d030891	68.19647515	71.94538538	81.55339302	69.58616821	56.94171752	73.53796207	77.84589158	68.97660767	72.22837377	15.6373936	8.834445587	14.77518517	52.64752314	52.99832	55.7016404
Zm00001d030892	7.150051529	8.36226519	7.493506528	12.82921899	12.11804721	13.36381828	11.24963427	11.69119152	11.45493472	1.971168681	4.517834599	1.017505931	13.58828533	12.28364842	13.26771679
Zm00001d030893	16.54717447	14.9045171	16.81180081	17.83433964	23.33778958	19.63242403	20.94967281	18.83092	20.16970764	1.798466	3.822084957	0.353164315	10.4401763	10.4265045	10.12851795
Zm00001d030894	2.057209821	2.591063382	2.079708954	2.04870093	1.284536639	2.32287234	1.076350609	1.231007691	0.804680491	0.529334236	0.90990863	0.153059352	1.400148011	0.984540002	1.934681095
Zm00001d030895	47.60454991	44.78435965	54.32556223	40.86084381	58.80855455	46.95608223	43.68315675	53.44111684	43.30699042	17.15876915	26.49970451	9.681817188	49.90400288	44.93448213	50.68903224
Zm00001d030897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030899	0.112059294	0	0	0	0	0	0	0	0	0.824257289	0	0	0	0	0
Zm00001d030900	2.63590717	2.930480941	3.0491192	2.433932297	1.910256919	1.900346471	2.2922736	2.05367339	1.887967276	1.538032928	2.115830618	0.696292989	1.270624821	1.24473957	1.711270717
Zm00001d030901	0.998811611	1.08952385	0.664996077	3.470093284	2.949431141	2.982722161	0.448087403	0.548404571	0.747885691	0.20908875	1.045862626	0.750797333	1.596717521	0.997170544	1.299107841
Zm00001d030902	114.0032184	127.5212401	113.8752683	48.01156625	30.85218351	39.38498854	26.35736696	27.78436937	24.7497841	51.18693807	57.11757086	53.03698659	62.26104345	59.03830053	57.23820228
Zm00001d030906	0	0	0	0.052623981	0	0	0.098610105	0	0	0.465552728	0	0.04674189	0.141653238	0.092511646	0.536617076
Zm00001d030907	0	0	0	0	0	0	0	0	0	0	0	0.019049525	0.057730376	0.028277145	0.009940762
Zm00001d030908	0.060074474	0	0	0	0.0678488	0.063085243	0.020056292	0	0	0	0	0	0	0.009407964	0.009922041
Zm00001d030909	0.340867809	0.413991258	0.287464243	0.971692674	1.058695029	0.730816985	0.611681201	0.939449117	0.705645486	0	0.015351616	0	0.544917177	0.707306318	0.577059924
Zm00001d030910	1.614410004	1.484672178	1.799384651	4.777882658	9.201079381	6.483028652	5.195190648	5.870731552	5.419986024	1.254636241	2.811374355	0.865798241	2.853244048	2.54229287	2.221997948
Zm00001d030911	0.101834145	0	0	0.698517202	0.335453563	0.311901902	0.178489798	0.061394399	0.282576922	0.035111519	0.288936278	0.112807244	0.227911356	0.027908541	0.264901878
Zm00001d030914	0.315797509	0.644452668	0.457058415	0.054839728	1.074510728	0.592586254	0.602559639	0.390419911	0.517644566	0.077183742	0.136104194	0.216980776	0.331021252	0.4294488	0.351240268
Zm00001d030915	3940.211456	3791.445477	3793.466908	529.8831613	817.189333	523.6060467	365.5301476	470.1904419	537.4325485	2682.327728	1132.460388	1999.623317	57.28615823	53.50458616	41.45948212
Zm00001d030916	19.91821679	18.66519609	16.69699693	12.86259026	8.875838853	12.68119556	8.496016982	8.092249087	9.018128006	11.3483771	7.18763305	13.62442488	8.674435422	8.39320186	9.810338783
Zm00001d030918	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030919	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030920	5.967961386	5.872694968	1.894101132	1.580810453	1.31226768	1.783985928	1.410581629	1.519257268	1.386425511	1.48799593	0.951427405	0.79399304	2.017855071	1.430867218	1.299705297
Zm00001d030921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030923	0.33344473	0.209987436	0	0.069309634	0	0.068085903	0	0	0	0	0	0	0	0	0
Zm00001d030924	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030926	0	0.349979059	0	0	0.073227058	0	0.259753446	0.067009741	0.068538305	0	0.210242251	0.06156249	0.248756906	0.060922304	0.128502537
Zm00001d030927	0.783701308	0.69460812	0.685397761	3.330394118	2.90669444	2.560376887	2.543763845	2.519907703	3.436519336	3.362654736	2.415777202	1.832758457	3.020732752	2.545543388	3.691378615
Zm00001d030930	0	0	0.324344268	0	0	0	0	0	0	0.027687057	0	0	0	0	0
Zm00001d030932	0.222296487	1.469912049	0.34533841	0	0.219681175	0.408515418	0	0	0.068538305	0	0.07008075	0.12312498	0.062189227	0.487378429	0.064251269
Zm00001d030933	1.556075406	1.259924613	1.726692048	3.604100952	4.832985845	3.131951538	5.584699096	2.613379889	3.152762023	2.299376279	3.714279767	3.878436864	3.544785917	3.228882094	4.883096412
Zm00001d030934	9.388883457	10.20403208	8.854356632	6.241485434	9.745843341	6.381117464	7.356963442	9.476734934	8.430211497	5.408035831	8.094914661	6.296821139	7.497145105	6.990465176	8.148490436
Zm00001d030935	6.46826432	5.774151502	6.073480237	6.2833611	5.5119482	6.227858643	6.234931135	6.25146426	6.113573811	4.348727181	6.107005422	4.775074341	7.462057188	7.178197888	7.087215446
Zm00001d030936	4.635817982	4.332634928	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030937	2.673570018	2.698673478	2.742422837	3.195428857	3.441620956	3.226124446	7.200862702	6.721792635	7.363281124	6.933289202	5.38297436	7.67458406	5.492943225	5.939671115	5.373647272
Zm00001d030938	0	0	0	0	0	0.060032732	0	0	0	0	0	0	0	0.05371644	0.226606625
Zm00001d030939	1.979753512	1.692540277	1.741622065	2.752574259	6.259919344	3.380849867	5.168032917	6.113556335	6.153646279	7.052227217	5.250701757	5.157565719	1.671216021	1.510991103	1.653438981
Zm00001d030940	0.059504827	0.037473275	0.009244097	0.881265582	0.392031694	0.628775907	0.356348376	0.278028446	0.293543817	2.37994202	1.397573353	2.620190674	0.108205194	0.163078201	0.24078495
Zm00001d030941	0.064184197	0.020210058	0	13.04778259	22.39046227	19.77655743	34.91214366	41.23033845	47.94930154	59.61861678	64.75066509	45.55754314	0.628461551	0.316624367	1.13163678
Zm00001d030942	2.108673612	1.173014646	2.657063908	11.76125686	29.33619019	17.67485538	33.63339707	40.38465193	45.38011022	110.0433805	94.72323195	74.26192949	0.996306582	0.706322852	1.984191489
Zm00001d030944	6.382654391	5.082707927	7.37967378	16.02305122	15.11644691	14.9632307	10.51837156	11.41991305	11.43664837	1.101761381	3.250649165	0.994419641	8.451066335	9.903984764	11.5115824
Zm00001d030945	0.182739969	0.230161667	0.127749246	0.811912852	0.285934227	0.601681438	0.720669336	0.605942718	0.39439586	0	0.230440963	0.050607761	1.201389871	1.051711347	0.831884846
Zm00001d030946	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030947	1.235256755	1.165607189	0	0	0	0.009732209	0	0.023945956	0.039187503	0.065734639	0.145251619	0.017599503	0	0.004354122	0.004592043
Zm00001d030949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030950	0.051492406	0.086473169	0	0	0.090465066	0.021028414	0	0.02069604	0.116424766	0.106524777	0.183978467	0.066547776	0	0	0.009922041
Zm00001d030951	0.787833819	0.653737155	0.518358806	1.271538093	1.538810778	1.215021789	1.375460537	1.318751698	1.257387478	0.306791357	0.210384788	0.246416909	0.840123749	0.802687491	1.018001455
Zm00001d030952	8.426882495	8.08920595	9.053346744	7.311055506	9.522826836	7.710057672	7.647439022	7.328323282	6.547479029	2.585982718	5.444644568	3.016141452	3.625667859	3.0084029	3.131261771
Zm00001d030953	14.69718139	13.75079493	11.43335405	12.90984545	21.87169105	12.32617547	16.78347471	19.78127547	19.44469314	40.81999279	51.56092596	48.697869	22.08406579	21.99491407	22.69322965
Zm00001d030954	5.128373463	4.375860622	5.448896423	6.337891138	7.273816623	6.462007248	7.141326527	6.127581687	6.349284655	3.142480914	6.307880481	3.046535579	5.530671045	5.607338561	5.230203119
Zm00001d030955	4.255736573	4.178527273	3.540160336	15.52916284	16.19336679	15.77741081	18.54595855	17.26593965	18.73263466	28.64107683	23.13346769	35.29592995	11.2520213	8.769619291	12.05895706
Zm00001d030958	0.045876624	0.144454444	0.028507802	0.276540787	0.251871593	0.384068466	1.0095954	0.387217361	0.348901371	0	0	0	0.265243312	0.10896506	0.459676861
Zm00001d030959	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d030960	11.19154461	10.21445126	9.550494474	8.224419297	9.510053397	9.462434124	8.902515925	9.435646733	9.22244824	8.417580859	8.051564356	5.89187417	6.417682971	6.687467296	6.381185464
Zm00001d030962	1.31935369	1.126920924	1.027166291	13.63635329	8.502380331	13.11690215	6.795729306	5.348514582	7.611971335	0.418300288	1.348209044	0.302383478	15.08642343	15.2944379	15.0782012
Zm00001d030963	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d030967	29.33698854	26.74288883	27.04543708	23.13902815	31.62713333	30.79960651	47.4795204	58.00591449	64.31626287	70.65481036	106.8526116	78.90551924	13.63379774	13.39809651	16.11939431
Zm00001d030968	8.407606024	8.7020943	8.331468464	10.34330595	11.9301708	10.3284244	12.58551694	12.29909607	12.25132368	3.000276659	7.468902756	2.749692265	8.463570825	7.974291161	7.917562759
Zm00001d030969	1.995298358	1.681167652	2.522517201	2.831683977	4.134030441	3.093573978	4.614774237	4.430129635	4.946968599	7.695677971	7.201352593	5.495265517	2.240502253	2.330623045	2.115926528
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Zm00001d030982	0.006778004	0.017073842	0.02527117	0.236690509	0.169689276	0.269879422	0.209882588	0.175713693	0.071052849	0.037391939	0	0.003754183	0.155488483	0.089163431	0.176316694
Zm00001d030984	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d030987	0.091753248	0.23112711	0.228062413	0.314684344	0.030224591	0.028102571	0.241230759	0.19360868	0.113157201	0	0.115703789	0.050820042	0.256687076	0.100583132	0.106079276
Zm00001d030988	0.44189847	0.104357392	0.789464534	2.101132047	3.056896832	2.436237402	2.097705862	1.964806823	1.805257412	2.209259309	1.741400463	0.489515071	2.936085305	3.027653879	8.876799505
Zm00001d030989	11.12222563	9.910628775	10.60562851	15.63837238	21.23694933	17.30194078	19.9893588	19.85381827	18.14911775	9.389230757	11.88921755	5.094893127	13.39398217	11.50701318	12.66661488
Zm00001d030990	0.894121879	0.312819393	0.658499143	0.351053155	1.279951035	0.500377787	0.831955578	0.798598122	0.530929751	0.296867394	0.584638121	0.788705714	0.352045755	0.096806696	0.248860182
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Zm00001d031128	10.64173983	7.701379568	9.662601129	65.63915167	195.3559023	80.52689162	116.2238137	149.1953946	123.1628833	2.466773751	4.910258769	1.322466332	15.59063473	19.25545224	26.21439692
Zm00001d031129	25.11156382	33.93796934	18.75680905	3.455580308	2.908160313	2.626170544	3.052102994	1.589088138	2.956938295	0.043797643	0.33038068	0.017589283	0.533050514	0.313314705	0.073430021
Zm00001d031130	0.137695881	0.181686971	0.374853664	1.292051243	1.814345242	1.622697694	0.390751407	0.450652559	0.557970833	0.063301774	0.165370404	0.014526976	0.256810188	0.388149584	0.485166414
Zm00001d031131	2.99058242	2.732667375	3.706293697	1.796954179	5.165738212	3.663872655	5.29558014	6.97960649	5.485836158	9.739380186	11.47211577	3.693296728	0.299971564	0.358142513	0.542356296
Zm00001d031132	67.65014344	66.50663816	68.84005042	64.33375766	90.3750423	73.58972248	99.42590826	126.5708733	114.5887686	514.3046229	300.4804422	420.0553421	50.10012607	49.11195735	67.52717832
Zm00001d031133	6.896922942	5.347146424	7.466742942	2.962753736	7.048022264	5.126135732	8.703778875	8.205237583	7.900960551	17.75572176	18.80536798	25.50095013	1.526424806	1.612938479	2.144061951
Zm00001d031134	0	0.007265388	0	0.035970823	0	0	0.02696175	0.125197946	0.02845641	0.047733887	0.029096818	0.012780061	0	0	0.006669119
Zm00001d031135	0.384966154	0.509731233	0.441634218	1.785035836	2.744349232	1.910731319	1.314896326	1.368740481	1.740823457	0.585386336	0.398321781	1.038783674	0.629615405	0.324625705	0.821673985
Zm00001d031136	129.7868362	140.5335324	135.6273031	120.2693574	135.4592365	128.6442422	134.9608642	144.6126432	141.3234954	145.0657345	145.0329246	147.6694858	204.6001412	216.6857945	215.7191483
Zm00001d031137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031138	0	0	0	0.03410034	0.144110851	0.23448785	0	0.065937585	0	0	0	0	0	0	0
Zm00001d031139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031145	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031146	0.244129177	0.204987735	0	0	0	0	0	0	0.200719321	0	0	0	0	0	0
Zm00001d031148	0	0	0	0	0	0	0.064740981	0	0	0	0	0	0.01550005	0	0
Zm00001d031149	0.65142752	1.591391828	0.711792491	0.436205178	0.247712127	0.964132966	0.515976505	0.384829205	0.307337419	0.048237635	0.055132282	0.053274096	1.976531531	2.247793368	2.04206846
Zm00001d031150	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031152	0.211957115	0.300330867	0.6256247	2.346050508	1.745528714	0.779029402	2.167129043	6.708765906	7.482629585	8.696633228	22.25145312	14.76282825	0.237186818	0.116177416	0.336945606
Zm00001d031153	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031155	0	0	0	0	45.30451133	1.662367047	3.53002015	75.13674234	5.114959785	1.235807101	3.583567357	0.056720496	0	0	0
Zm00001d031157	3.481812384	0.548169448	8.304418701	17.36946146	547.1624526	68.06295268	245.0073307	337.8375136	331.2410068	114.1532674	186.1195118	44.75247159	0	0	0
Zm00001d031158	539.844477	281.8991327	945.2950262	2553.855637	9980.808707	2049.487614	7459.609861	10687.32075	11828.66259	7205.654865	7579.268388	3088.500061	157.6770527	194.2300516	225.67689
Zm00001d031159	30.39220464	27.73957099	32.71166854	20.05424744	13.48729756	20.66953339	17.03982608	13.24186114	14.18622404	0.808066521	1.843970864	0.571381088	32.765795	33.35542988	30.43053049
Zm00001d031161	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.127878738
Zm00001d031163	12.7155434	11.96555182	15.40029273	16.99966583	13.93726088	15.7469625	10.39121503	12.11915623	10.02835586	1.42975435	1.685176336	0.574194219	14.47380565	15.23548435	13.45554025
Zm00001d031164	0.054728719	0.013786205	0.204051038	0.518740157	2.105702982	0.482761214	0.831356607	1.689353656	1.376912046	1.660558369	0.952402447	0.885139466	0.012248639	0	0
Zm00001d031167	0.029882479	0.131729823	0	0.10248736	0.009843637	0.07322025	0.008729419	0.126110135	0.046066729	0.051516081	0	0	0.033439453	0.032758222	0.095007614
Zm00001d031168	25634.35439	23968.77208	26388.21145	18854.5459	17630.76165	17139.27197	12456.69234	12855.61497	12485.04405	4089.587691	7142.458994	2377.621943	8457.938214	7673.594543	9485.780634
Zm00001d031169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031170	3.121137827	3.112108676	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031171	0.131809043	0.172654536	0	0	0	0	0	0	0	0	0.019945852	0	0	0	0
Zm00001d031173	0	0	0	0	0	0	0	0	0	0.079056124	0	0	0	0	0
Zm00001d031175	0.134219688	0.507150581	0.333617246	0.047826563	0	0.035236603	0	0	0	0	0	0	0.064369775	0.010509738	0.01108402
Zm00001d031177	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031178	20.46709351	20.82433755	18.82213507	17.53939539	15.54122929	15.69703465	13.52812869	12.48953479	12.5913822	5.366221771	7.727523635	4.821066241	20.05598941	18.74087228	17.80375497
Zm00001d031179	27.89274112	28.35431417	28.38867061	22.4641326	31.08115283	25.25853021	29.39198533	33.30791688	30.52369959	94.57799446	79.53776521	98.12686449	24.45304865	23.21760981	22.01220876
Zm00001d031180	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031182	12.83138782	15.84844274	13.25579272	19.38181705	18.07159305	19.73301866	34.73161666	33.50594425	31.10441817	21.21174617	32.99242247	22.22711725	31.65132648	29.04109589	34.28392089
Zm00001d031183	0	0.161749502	0	0.01456035	0.169216413	0.028606545	0.286482985	0.239312328	0.143983117	0.193218297	0.073611719	0.064664272	0.013064517	0.06399183	0.337442615
Zm00001d031184	12.76735069	10.53060958	13.01212295	22.49870902	32.67802863	24.93913476	38.68286963	43.61780323	40.29315964	20.51702415	25.24239125	13.60073124	19.26015767	22.31518529	22.68547683
Zm00001d031186	9.747228777	10.83351941	14.10360479	61.42759254	62.70724729	74.78458654	52.83984529	47.59845753	45.87738519	6.797283631	16.88358724	2.990622357	65.12861361	52.66918506	58.25104103
Zm00001d031187	0.05349281	0.057749479	0.180448488	0.104836148	0.332284661	0.561737243	0.500050793	0.801644758	0.320432857	0.052696717	0.115639114	0.10158327	0.179580517	0.259694515	0.256214952
Zm00001d031188	0	0	0	0	0	0	0	0	0	0.648571	0	0.00930244	0	0	0
Zm00001d031189	1.174871665	0.44841067	1.41588748	1.154438586	7.036662629	1.482996074	6.281771821	9.315400992	8.035045333	5.597544129	3.546742974	3.273393018	0	0	0
Zm00001d031190	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031191	0.493441564	0.073116644	0.144294265	2.063396356	2.715464542	2.489255307	5.562363608	2.904893602	2.648983655	0.440347644	0.915067122	0.835995086	5.684174534	6.809328564	7.886127041
Zm00001d031192	0.804190231	0.548643643	0.832874988	0.961161538	2.163428824	1.149450245	4.385249358	2.626190575	3.801860087	0	0	0.03711856	4.124609	4.077314764	3.564055663
Zm00001d031194	1.042310388	0.915902644	1.114634824	5.653159164	3.673038082	6.414561243	3.143983867	1.51983795	2.092605691	1.036350089	1.589491061	0.724996557	1.898756174	0.744029836	0.980857132
Zm00001d031195	0.066526686	0	0.082679561	0	0.153402669	0	0.583023246	0.28075614	0.184603171	0.022937817	0.125838428	0.018423811	0	0	0
Zm00001d031196	3.349177788	2.627794575	2.047066236	4.040000094	19.35223521	4.944020932	16.68055264	19.52970637	19.77206231	75.11665222	34.82591118	62.76703789	2.119678579	2.61819105	3.015164953
Zm00001d031197	0	0	0	0	0	0	0.038308962	0	0.040432669	10.17349936	2.687269059	8.280376339	0	0	0
Zm00001d031198	0	0	0	0	0	0	0.013412961	0	0	0	0	0	0	0	0
Zm00001d031199	0	0	0	0.205198981	0.098544072	0.05497527	0.174779398	0.018035444	0	0	0	0.066277341	0.217594252	0.147573283	0.121051077
Zm00001d031200	14.85711837	14.65444231	14.46012745	19.28259802	25.56139679	17.76340037	23.97532812	22.79756925	25.30443189	4.536281778	12.66890212	3.271779332	13.04508088	6.941553086	9.855997379
Zm00001d031201	6.716560865	6.34889386	8.084936197	7.821898508	7.393791179	6.995776189	7.701309827	6.641429435	7.274970553	5.28531624	6.928805252	6.415082541	7.505992366	7.431880391	6.679682655
Zm00001d031202	0.158967836	0.033370096	0	0.363472614	0.24437402	0.714110285	0.030958986	0	0.032675238	0.986592845	0	0.029349559	0	0.14522177	0.183788512
Zm00001d031203	0.349145639	0.453492419	0.677998793	1.306317884	3.349743436	1.203050193	14.31743168	10.52475417	10.58990654	45.21862002	20.47319912	20.11192008	3.736118294	6.231578588	9.435552616
Zm00001d031204	7.512410719	6.265318187	7.247661654	6.696271341	11.08773665	6.218737179	10.63671074	12.36329717	12.31144748	34.14725548	24.33779562	17.00618069	4.316917502	4.018760872	5.112110834
Zm00001d031205	22.08997709	21.59975273	22.82649609	12.85873951	20.30315407	15.17119623	15.64170124	17.37817728	15.01140212	12.43423263	13.93231451	10.02069987	10.19778206	9.074493713	10.71429312
Zm00001d031206	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031208	0.387931295	0.320117832	0	0	0	0	0	0	0	0.110694044	0	0	0	0	0
Zm00001d031209	131.4403745	143.949801	148.2926077	165.7163688	242.90447	144.8565843	258.6775366	284.5885724	282.9146277	180.6971341	108.6809717	59.36801365	106.6098595	97.19675692	106.0062364
Zm00001d031210	1.598691422	1.859795169	1.261956126	1.964817593	1.728615271	1.866026628	2.162433634	1.750079769	1.670508246	0.149663159	0.180829196	0.002146616	2.487234097	2.266620568	2.260533576
Zm00001d031211	0.440180398	0.290660945	0.265561891	1.113937326	0.439225006	0.722532115	0.629205832	0.427697683	0.505970806	0.106091885	0.172452537	0.052075054	0.564310369	0.454432013	0.864650551
Zm00001d031212	1.226152559	1.479610716	1.341367086	2.554778409	6.801149839	2.491680774	10.14084709	15.15643735	15.21241172	21.7307112	32.69278294	15.42904117	2.31696618	1.730494436	4.94886597
Zm00001d031213	3.386534416	4.321623771	4.686309933	19.93644047	17.0248603	18.57730538	18.71039726	29.15475568	14.53522741	3.142480914	2.884578649	0.682981506	108.4597184	94.18229778	95.11379851
Zm00001d031216	3.070031477	2.484667121	2.660378054	19.94421188	13.99234191	17.82901039	10.99321016	10.61363757	10.68566282	0.264629972	2.215473825	0.29225982	27.71855658	28.55396308	23.75031235
Zm00001d031217	8.750518146	7.51807308	9.08668026	4.728117286	9.119068754	5.867409616	7.639353266	8.097598146	8.644902792	12.34050654	12.93721586	16.46854091	3.277023813	3.100004012	3.770316801
Zm00001d031218	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031220	8.424050144	9.913271074	9.338203065	17.65115499	12.11114362	12.96636469	16.16253085	13.70830339	15.84791718	6.005994854	6.774411539	5.93121639	30.5571555	25.59118512	32.02430853
Zm00001d031221	2.588076359	0.205761273	1.688379032	3.538714505	113.6572369	26.54579433	71.78629559	98.3154273	65.00276287	1.636461759	4.196117983	0.781030532	0.356003988	0.254494302	1.441410535
Zm00001d031222	1.786581706	1.358820211	2.12383122	3.218434846	21.15263433	4.652536704	13.25185338	17.00473701	10.55905278	8.891792587	6.236390407	5.832113153	13.82084892	5.374085634	17.29259616
Zm00001d031223	14.78550377	14.04101723	14.54058741	12.33999364	18.45855576	13.55944631	15.99987588	18.29302904	15.30123027	7.240512451	6.066378681	4.949218917	8.272726743	7.516933767	7.896712534
Zm00001d031224	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031225	0	0	0	0	0.036318259	0	0	0.06646934	0	0	0	0	0	0	0
Zm00001d031226	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031227	30.56103188	36.38762097	34.15272984	29.03498661	34.5130947	34.73754983	34.72557045	32.72854901	36.12137707	202.1615749	119.9832728	188.3029547	40.33877691	34.22453835	37.6185415
Zm00001d031228	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031229	1.833946014	1.919885125	1.657624366	3.980353249	2.746014685	4.231052543	2.35169638	2.283117596	2.393945077	2.167983349	1.621868793	0.844285576	3.718027333	3.107037486	3.524641019
Zm00001d031230	1.134921137	0.942004704	1.750944822	1.513039885	1.478236302	1.774001591	1.422695402	1.331754657	1.501564389	0.971530359	1.875328781	1.66183477	0.681233131	0.557718112	0.723930324
Zm00001d031231	16.99149396	18.57045861	16.66062524	16.98483493	13.00577576	17.27364909	12.91411898	10.54234642	10.45978937	9.728901668	9.540242186	9.283132148	8.544789875	8.931138876	8.466802607
Zm00001d031232	10.89254686	13.12117897	11.64491752	10.39345685	9.427611038	11.34184174	11.6784394	10.82414247	10.67297948	10.81615587	9.594744137	8.664291136	9.150338735	8.453681	8.409935934
Zm00001d031233	0.02025368	0.025509585	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031236	0.385714692	0.338881457	0.4746906	0.48573977	0.277670232	0.338855274	0.323190343	0.313081018	0.255250004	0.459305633	0.230149582	0.164658055	0.35793469	0.270201233	0.352400434
Zm00001d031239	3.448493515	3.498430447	3.648465684	2.535193136	2.042648572	2.727321479	1.000023614	0.96096468	1.140478741	0.691028886	1.049530558	0.826971024	1.111971824	1.01559151	0.917518546
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Zm00001d031243	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031248	0.991425361	1.01210738	0.739287814	1.744063179	1.182589042	1.010062167	1.20725867	1.484854011	0.913809185	1.108264261	0.894893734	0.265893563	0.630627241	0.777945264	1.037633464
Zm00001d031249	0	0	0	0.227335598	0.106748778	0.024813529	0.070999275	0.293055933	0.049956809	0.139665818	0.05108108	0	0.090658073	0.022202795	0.32782425
Zm00001d031250	0	0	0	0.268669344	0.174679819	0.203019783	0.271088142	0.339678468	0.367863774	0.434233726	0.229864861	0.128497706	0.148349573	0.090829616	0.0957928
Zm00001d031251	0	0	0.031406007	0	0.033297331	0	0	0.121880933	0	0.278815312	0.127466651	0.139966474	0	0	0.058431838
Zm00001d031253	8.197307174	7.664280607	12.63537143	112.2363642	45.271783	103.5317691	56.40791904	23.4613985	44.25756339	0.224797442	0.522420139	0.278361542	169.7736228	196.3110921	160.0603473
Zm00001d031254	4.040185274	4.396000783	5.307461529	4.068685222	3.26723504	4.570428157	3.722348309	3.443832007	2.899174021	3.570095186	3.73910453	4.061183425	4.35200636	4.195459313	5.175050264
Zm00001d031256	7.523413497	8.081622828	7.529823311	12.0163449	9.482192266	12.2067217	13.53817094	11.82537973	12.39048389	9.757735546	9.420972783	14.11393401	23.80736715	25.3890219	23.87079436
Zm00001d031257	14.38407293	1.92390723	9.317963414	7.14392593	228.2258316	35.05777378	156.7437912	166.6857942	159.8757428	469.9150091	178.4342036	269.806726	0.242155815	0.41862812	4.238430052
Zm00001d031258	30.55465207	37.74174174	32.41346313	62.15687949	27.25511108	64.4977759	12.09152293	8.851986753	9.999738679	133.6474139	75.09853205	116.6301371	63.04743793	65.73516564	72.26982689
Zm00001d031259	106.7384878	119.4029343	89.88841564	97.72148987	73.67872121	102.7661099	77.33050992	68.59124098	71.94075498	233.5333454	167.5117551	268.9682958	101.1337199	104.082158	99.89605108
Zm00001d031260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031261	1.217631945	1.822113197	1.318498394	2.360561439	2.87522751	2.968761516	2.479339773	2.39852326	1.68009506	4.855049878	2.706081036	1.388901888	1.37606003	1.704857482	2.927002235
Zm00001d031262	0.042130151	0.159189242	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031263	0	0	0.007442247	0	0	0	0	0.043322986	0.007385205	4.839668373	0	0	0	0	0
Zm00001d031264	0.258809551	0.230097591	0.662219089	2.012603572	1.564677944	0.298425517	1.423148058	2.514880048	0.751021069	0.692885547	1.190280183	0.404749377	1.260682273	1.234999572	1.812916084
Zm00001d031265	5.452421581	6.176562097	5.423025903	8.376005574	5.752257135	8.20842846	7.040196327	5.724118777	6.404730851	1.496199583	3.116096023	1.399825174	6.892777887	7.311750748	6.891380516
Zm00001d031266	6.849857829	7.676790663	8.778502374	11.18917399	16.04359079	10.97417095	12.24737499	14.2006205	13.22489429	10.03629842	16.43174593	11.04277163	10.69304883	11.81778462	10.81710263
Zm00001d031267	19.99605753	19.97211267	21.97581842	21.35955348	51.61662679	27.25875241	41.91200353	40.77623726	38.2138708	131.8702403	89.85568978	46.81441745	21.89710005	19.993495	22.60578506
Zm00001d031268	3.612680371	3.514075451	3.621192553	3.382770924	3.968126989	4.186402057	3.092120764	2.968786697	3.526038388	0.146776933	0.453394293	0.070098084	1.609357221	1.790984987	1.925429242
Zm00001d031269	5.602421272	6.196156899	6.394153352	9.748860473	9.732025195	8.431425391	8.769891089	7.818496367	8.315737238	1.453892722	1.839364795	0.521459965	5.801874831	5.16764134	6.346853731
Zm00001d031270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031271	3.446018963	3.662447526	3.479037807	2.44656406	2.436159618	1.887600606	2.561045288	2.281649763	2.804717984	1.747817956	3.36040535	1.004817097	1.355014406	1.360714157	0.988490469
Zm00001d031272	0	0.02827417	0	0.083990985	0.029579403	0.05500536	0.052462519	0.108271896	0.027685424	0	0	0	0.050241543	0.024609009	0
Zm00001d031273	4.949929523	4.611517176	5.429196129	16.18786244	18.61431821	19.30963165	20.05117465	20.21706985	20.40692576	12.59159594	16.72465024	11.1232805	3.780676086	3.807013748	5.050592822
Zm00001d031274	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031275	0	0	0.011047237	0	0	0.119792232	1.194477405	0.86816391	0.745454333	0	0.011209275	0.009846796	0.009947041	0.477475584	1.233223308
Zm00001d031276	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031277	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031278	8.074158899	8.835736878	6.39205634	15.70596562	18.96064269	14.08502398	29.23196305	29.89079315	23.13352643	11.6050125	15.64225611	12.77740973	13.92316146	13.70170416	14.71274069
Zm00001d031279	0.601133537	0.630941595	0.509379906	1.624366618	1.656170669	2.053191414	2.586199453	1.768146431	1.932040476	0.52758507	2.067405479	0.776893194	0.744033399	1.238090573	1.442635745
Zm00001d031280	4.357273543	4.810471021	3.390489412	4.801649867	5.741347127	5.272351881	4.777185642	4.99442921	5.544321221	2.734435332	4.176718175	4.086171336	3.972979192	3.605614113	2.851976208
Zm00001d031281	11.28964543	10.61403828	10.09383101	10.20535015	9.15276899	9.632387549	7.608339429	9.111977813	9.178622233	2.874027771	6.622572212	2.680494744	5.210561331	4.945421574	4.518467772
Zm00001d031282	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031283	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031286	1.248514513	0.62900346	3.103315024	0.700691913	1.974121242	0.458880332	1.021222453	2.107594038	0.153976466	1.635811983	3.62115877	4.425752698	2.933968444	5.26936199	8.660718942
Zm00001d031287	0	0	0	0.007517712	0	0	0	0	0	0	0	0	0.269815692	0.118943545	0.020907159
Zm00001d031288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031289	2.934519293	2.365782886	2.226993415	1.60905227	1.922218748	1.681370088	1.2439927	1.283673106	1.211558537	7.652437718	5.263674922	9.838587726	0.986090022	0.852761942	1.030972784
Zm00001d031290	26.07144609	32.09522246	37.79552701	110.3814853	78.0600441	99.08953683	120.3003027	107.4663019	105.5210147	6.242206986	8.209459324	3.502780037	32.4703913	23.44887035	25.08859059
Zm00001d031291	3.169986165	3.422236547	4.006141727	5.910191909	5.633441247	5.526252517	4.495787446	4.785376369	5.083633016	0.339328925	1.578297462	0.418702005	3.858554409	3.174061554	3.928779056
Zm00001d031292	4.793370905	4.974369028	5.306956035	12.90340017	10.71935648	10.60778369	12.06987681	12.23101498	9.013040934	12.1509262	14.74966192	11.14326669	28.61395415	28.53059172	30.77255016
Zm00001d031293	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031296	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031300	703.0233305	538.3492957	383.4178572	17.19704859	52.32165306	26.71083779	38.0047449	63.52350247	55.70717648	779.3984322	648.32658	943.7727249	10.2081852	9.575254244	7.800786646
Zm00001d031301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031303	284.8724993	184.7197377	189.8933479	15.77599052	32.49757791	21.88193069	23.40399499	35.38827641	33.69818413	137.8079251	191.4737218	198.0045285	6.580021396	5.881950156	5.170879916
Zm00001d031305	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031306	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031308	11.19923408	12.02079018	11.91482672	8.176575181	8.440454696	6.715453922	8.565124842	7.438713391	10.12685784	8.004432517	10.57161507	10.23911978	5.77303764	6.598000433	5.194048306
Zm00001d031309	10.57479796	10.09265623	12.10452604	8.109655272	10.97893234	8.598730842	9.385353759	10.46538539	10.26437556	12.92795511	11.38280695	9.573072811	6.18452011	6.850560427	5.81462956
Zm00001d031310	6.642904708	6.881876784	8.537590176	14.53364398	19.11918416	10.86054837	17.82929563	23.75611993	19.79631755	31.61241994	26.64602618	16.32477966	26.53778281	28.08487889	32.97464607
Zm00001d031311	0	0	0	0	0.025551569	0.142545805	0.022659343	0.070146367	0	0	0.024453709	0.128888277	0.086800282	0.085031981	0.201776324
Zm00001d031312	0.070228941	0.019656358	0.048489297	0	0.195355748	0.114720083	0.009118058	0.178769137	0.048117646	0.34438147	0.196802107	0.112372627	0.096052538	0.017108318	0.48716544
Zm00001d031314	0	0	0	0	0.250192449	0	0	0	0	0	0	0	0	0	0
Zm00001d031315	6.471501175	7.536254179	6.363329563	3.071090457	6.340956567	3.550337729	10.64111874	9.640791861	11.27731752	6.937272529	12.48730444	6.362133429	4.939894152	6.073762978	8.705782265
Zm00001d031316	0.02774946	0.023300365	0.072806122	0.007690649	0.373765174	0.060438907	0.093672928	0.126402677	0.129286058	0.085046845	0.01166432	0.020493062	0.175964375	0.091259797	0.185363606
Zm00001d031317	5.539977144	4.943203472	5.296230693	8.7265324	7.471810695	7.663001631	6.666221552	6.613649164	7.917363035	2.502609235	4.34246966	1.834989329	5.63792708	6.38204778	6.929446015
Zm00001d031318	12.86125247	14.45153465	12.22436928	13.37224453	13.21998884	12.77429718	14.7303161	14.41777634	14.57005457	13.82485875	12.77612223	10.61345386	11.36249079	10.82686054	10.89074776
Zm00001d031321	0.406174341	0.436713	0.763348033	1.606175424	3.041469946	2.378862245	1.944762759	1.767891769	1.40503525	0.054651842	0.449735598	0.131690196	1.019903316	0.879665089	2.519767141
Zm00001d031322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031323	5.663926164	6.370221091	6.35322112	7.176643314	8.214127738	6.750642932	5.793653638	6.589394652	6.34915995	6.2891213	7.11957346	5.502488756	5.356011128	5.306409255	6.359982619
Zm00001d031325	0.290619676	0.244024371	0.12039433	0.392652274	1.228580104	0.296707389	1.712095014	1.985720006	1.612865973	0.23380726	0.229050459	0.308521318	0.650425498	0.358410931	1.763979026
Zm00001d031326	2.262302367	2.515360184	3.094100906	7.546353893	13.19304601	6.915813467	10.01115079	11.51819451	9.411400009	4.187486444	4.982225314	3.633210508	3.918512148	3.607294977	4.561534837
Zm00001d031327	7.873971139	8.776612059	8.1895188	4.832916606	5.238481025	4.398777918	4.93907275	5.200693419	5.441664979	6.561542791	8.420111018	7.73630262	4.192252418	3.758019742	4.018477286
Zm00001d031328	48.37737651	49.78548142	41.1052427	17.04108615	13.73352606	14.85738146	16.4514437	13.77066238	14.93813716	11.85336434	10.53496253	12.04610984	9.087843881	9.573402851	7.368186234
Zm00001d031329	7.811677246	10.99374276	6.734316893	2.968538576	2.551156096	3.123582015	2.54238466	2.257503199	2.056821875	1.520199928	1.917778813	1.87579281	3.056849739	2.88600015	3.187757844
Zm00001d031331	0	0.020821003	0.061634763	0.041233784	0.141584119	0.060758641	0.260774243	0.39865529	0.142712166	0.205192224	0.104231346	0.036624843	0	0.090609956	0.238902843
Zm00001d031332	2.044076066	1.635088629	2.252903835	13.54711357	40.82352869	19.79705777	92.94199853	93.53870275	82.57881207	26.10125549	37.15857552	22.80022934	1.653468947	2.235612933	1.757414187
Zm00001d031333	0.006253995	0	0	0	0	0	0	0	0	0	0	0	0	0.013711699	0.028921889
Zm00001d031334	17.94186699	18.36690103	17.2495549	5.326148307	5.730121918	6.986780834	1.125845652	0.941965499	1.380948931	0.035914068	0.394054048	0.028846424	0.087420284	0.171278705	1.174146039
Zm00001d031336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031337	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031339	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031340	0	0	0	0	0.006671799	0	0	0	0	0	0	0	0	0.016652096	0.005854004
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Zm00001d031344	0.011877701	0.044880025	0.014761642	0	0.015650614	0	0	0	0	0	0.059912648	0	0	0.13020753	0.714076653
Zm00001d031345	7.57651795	3.213342133	9.464160232	3.294330657	5.63675806	0.078930877	7.227070438	31.33744315	51.83666334	216.3602552	266.8360567	216.331866	0	0	0
Zm00001d031346	0	0	0	0	0	0	0	0	0.074384219	0	0	0	0	0	0
Zm00001d031348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031349	450.2991186	418.0149104	349.6596342	243.3489764	171.1015786	266.6540086	226.7929299	228.6545283	206.8074353	4.425340197	28.62124348	2.510023921	471.2940325	448.5230107	378.8296247
Zm00001d031351	1.410254899	0.85453944	1.806875196	30.78217484	42.5346675	12.64051837	30.34143083	46.67170246	47.10279816	4.852409381	8.525207759	6.259602394	0.672463725	0.520636262	4.403888084
Zm00001d031352	0.003357376	0.016914509	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031366	0.025561671	0.005365837	0	1.588657151	0.63994379	0.480187023	0.438075928	0.585609589	0.814386277	0.041129386	0.05372348	0.061351462	0	0.074724271	0.019701854
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Zm00001d031373	0.035326186	0	0	1.542005028	0.558569189	0.73574999	0.123835945	0.596334747	0.348535876	0	0.089094907	0	0	0	0
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Zm00001d031377	1.342350402	1.494777817	1.682597005	0.991539589	3.461575426	1.157546427	3.123609079	3.202404829	3.460187947	2.129418167	3.334638787	2.118808123	0.631798515	0.85891976	0.919174912
Zm00001d031379	0.221504114	0.05579705	0.209217333	0.022100026	0.058372833	0.119404053	0.031059307	0.032050025	0.054635201	2.395047022	0	0	0.039659235	0.048564118	0.030730678
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Zm00001d031384	0.008418247	0.031808442	0.010462223	1.837302789	1.109227607	0.660064321	1.386977838	1.705282368	1.453484741	0	0.095541121	0.046626763	0	0.06459865	0
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Zm00001d031640	19.07303854	12.83923177	26.54567021	29.1694544	63.26817833	28.35097	38.95188466	47.74156844	41.32272312	3.78411639	7.220319591	2.015731812	7.35609709	5.295018506	9.219139165
Zm00001d031641	5.662218138	4.920875319	6.414919594	8.642644365	7.375145174	7.406891529	8.424200749	7.987446388	6.069110893	1.900730253	3.369274533	1.620296631	8.525867951	6.734478331	8.192265885
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Zm00001d031648	28.66722587	33.40463185	26.96941799	18.30817553	24.00370723	17.99316507	23.95046877	25.51716425	25.46064859	31.01364342	38.27877458	32.91088921	16.61544409	15.12695106	14.00987376
Zm00001d031649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031651	5.209754103	5.262575142	5.627337963	8.699511233	11.12620538	8.374566068	6.516589497	6.239618008	6.899405829	0.409888815	2.050265225	0.116197232	2.660617347	1.858987225	4.123255322
Zm00001d031653	215.420822	234.6746293	204.6635908	32.71289376	34.11394402	39.9344136	32.73686071	33.2296215	28.59869217	106.6852381	96.49492015	121.1618266	47.92208462	46.19375837	42.04403174
Zm00001d031654	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031655	263.7419406	260.4011103	210.6767289	109.3238404	94.00946588	135.5977953	131.0615782	97.90085965	94.13476461	102.3774974	134.4348282	97.43066273	297.9776676	260.4975768	283.6135317
Zm00001d031656	0	0.252292597	0.093355218	0	0	0.153380331	0.438869147	0.392485624	0	0	0.031574844	0	0.784541013	0.713661271	1.881644294
Zm00001d031657	0.561313986	1.556709066	1.193973808	4.449333713	2.624205679	4.020320702	6.275153085	7.282289529	3.98712727	4.689529355	1.395251575	1.159892723	21.62211136	28.7549425	53.62619381
Zm00001d031658	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031659	2.947159444	3.062718383	3.537397572	16.27452691	29.54567747	13.94845758	22.63320136	24.55769684	26.47915611	7.572863843	8.330246041	5.120535789	15.01640436	12.17377436	13.34425117
Zm00001d031660	12.88504438	14.01668007	11.43971001	9.535021783	8.514705278	10.11050124	13.93970473	13.23619099	12.62474107	12.31999185	11.19698313	10.08122238	18.57720072	21.28034418	18.69824369
Zm00001d031661	0	0	0	0	0	0	0	0	0.288212359	0	0	0	0	0	0.315215625
Zm00001d031662	8.092430132	9.40665938	5.41633147	11.22018455	10.10300937	14.62225821	2.134204407	2.071451907	1.43848847	0.236933085	0.307854725	0.17027403	7.264787511	5.273163839	6.104890376
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Zm00001d031667	0.386333866	0.361017597	0.223031319	0.285982795	0.587872431	0.4305611	0.591229152	0.577029002	0.427274165	1.8665821	4.284035629	2.896343987	0.658242067	0.565594448	0.703120902
Zm00001d031668	1.33524969	1.529851751	1.605921527	2.009062236	2.497194954	1.593647733	1.650833812	1.713878625	1.65735727	0.891062641	2.281267525	1.011533388	1.648425965	1.086006283	1.573609519
Zm00001d031669	3.206926467	3.326065578	2.724737329	2.288836035	3.099104244	2.541697094	2.677272562	3.03756384	3.036563119	0.780816547	2.77907767	1.431096902	1.279839765	1.132971979	1.13337952
Zm00001d031670	0.051820666	0.100869223	0.117096139	0.170384193	0.186221809	0.028857912	0.060552449	0.113607141	0.133628439	0.110452465	0.213864619	0.13046496	0.057988989	0.129108259	0.108930476
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Zm00001d031672	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031673	28.09029602	30.1994238	25.41336502	1.515570657	2.401847511	1.030715824	1.365370679	1.268030479	0.749352133	3.223057348	3.123804522	1.449717711	0.62763281	0.614846634	0.864591429
Zm00001d031674	11.68008565	10.39858995	10.70896031	10.53696802	12.14812285	9.691131387	7.441837668	5.868135266	6.708827509	0.224868529	1.034267264	0.273660508	2.067819879	2.041943002	2.170657241
Zm00001d031675	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031676	6.123092291	5.113769924	5.326416326	4.494118083	12.03655256	6.151942736	9.426274986	11.94872339	10.51639849	9.660249361	10.34974454	8.345742067	3.815689753	3.498368665	3.689529305
Zm00001d031677	47.54361134	62.5406944	42.74511111	76.56817496	51.79655052	66.52711339	57.25031011	49.08949001	54.05992513	138.1679712	60.6941923	51.80874485	71.82199293	59.12536816	132.158078
Zm00001d031678	0	0	0	0	0.158336803	0.003774878	0.018001845	0.037152121	0.00379996	0.008498934	0.023312866	0.03754521	0	0	0.049871843
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Zm00001d031683	1.05328689	1.759800364	2.564626378	0	0.08497102	0	0.502353363	0.311026344	0.185570693	42.80889095	21.76668437	32.86043093	0	0	0.049703812
Zm00001d031684	17.96810481	18.31527602	19.20570162	15.0858249	19.06974685	15.94510609	19.98670858	23.60625513	20.08937717	27.18190414	30.15016236	31.95699829	15.11301908	17.67528729	16.51663434
Zm00001d031685	0	0	0.031185041	0.020862857	0.038573568	0.030741754	0.166150032	0.05546906	0.046419029	0.317228113	0.036916198	0.199207103	0.037439094	0.022922739	0.014505181
Zm00001d031687	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031688	6.708863798	5.199900787	6.402436895	10.48980651	25.37448504	14.76363899	18.01665386	23.15457245	23.30311443	5.381758705	14.89935316	4.132106938	5.521661994	4.376964923	6.165313449
Zm00001d031689	0.077501326	0.019522641	0.048159438	0.275470432	0.643352012	0.34656651	0.479969591	0.499951926	0.487461209	0.657355701	0.698781359	0.377750788	0.44230501	0.437542327	0.412169702
Zm00001d031690	0.294457346	0.291397949	0.23525515	1.547630805	1.08083138	0.566893703	1.228833611	1.420194136	2.619850342	1.42136829	1.697463589	1.025157524	0.659014451	0.853099704	0.753815653
Zm00001d031691	2.934066854	2.962745945	4.117992818	12.49977765	14.34776161	10.11765336	12.39860148	16.26328268	14.69243151	30.3753775	29.54380123	18.21247388	8.484255848	8.838242618	11.45592392
Zm00001d031693	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031694	19.04291403	21.68259963	17.35890204	15.18416417	13.73846468	15.77868886	18.20308674	13.83486559	16.57459179	23.6131141	25.03479906	23.35678225	11.15218315	10.27856006	9.656469305
Zm00001d031696	2.633393419	2.82278192	2.680901703	15.25081794	7.751864404	8.58049802	7.823741866	9.981842386	6.771809236	0	0.247293139	0.310335502	40.97377975	39.11024633	44.09756789
Zm00001d031697	0.007866072	0.009907347	0.087983802	1.373431406	0.912093991	1.30099703	0.376851735	0.331964251	0.397743005	0.444793041	0.208306764	0.156846206	1.144310395	1.017521652	1.482363272
Zm00001d031698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031701	5.024244574	2.731055157	4.699541422	10.19052707	31.63748849	12.65094023	15.41865307	22.44683741	15.05045496	1.002919441	4.91853003	1.142418816	4.157536246	3.565545578	5.136124618
Zm00001d031702	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031704	0	0	0.041746068	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031707	14.49489952	13.04898886	13.1368934	19.16507578	29.77127585	20.93394188	26.5618228	28.08092068	27.61603837	38.82346769	37.32079367	34.26939817	15.54253134	15.46490907	16.13257133
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Zm00001d031712	13.34897951	13.59700105	10.99674495	11.94465557	14.0627548	13.84496779	14.58030963	13.2276907	15.08546436	10.99805546	14.25061119	12.07980013	9.620422413	9.289714228	8.679619932
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Zm00001d031759	0.02042515	0.068601473	0	0.195295771	0.322957584	0.450424868	0.214801094	0.229862099	0.3694515	0.018779766	0.03434236	0	1.333289943	1.552426511	1.393241402
Zm00001d031760	0	0	0	0	0	0	0	0	0	0.216722822	0.011656433	0.081916822	0	0	0.010686824
Zm00001d031764	4.907044739	5.215633871	5.706483883	9.82323565	12.27245914	10.94158863	11.29400964	10.54045111	9.586100747	0.826532554	2.988849298	0.559053962	5.586945655	5.196507847	5.537764743
Zm00001d031765	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031766	0	0	0	0	0	0	0	0	0	0	0	0.008465273	0	0	0
Zm00001d031767	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031771	0	0.081606492	0.053682938	0	0	0	0	0	0.079907218	0.953169566	0	0.095699036	0	0	0
Zm00001d031772	0	0.326425966	0.228152485	0	0	0	0	0	0	0.625517528	0.136175866	0.01196238	0	0	0
Zm00001d031773	2.552325697	2.137409349	1.737871822	0.10158989	0.232552266	0.099796219	0.650415407	0.261916921	1.356200857	3.594973201	5.461287787	5.383997379	0.151922043	0.163709785	0.188351286
Zm00001d031774	0.279820577	0	0.149040787	0	0	0	0.186840198	0.192799956	0.049299482	4.410499529	2.01635843	8.989203569	0	0	0
Zm00001d031777	500.6688432	472.7178859	442.8850796	60.62471789	96.22978669	72.84994466	90.68890211	94.28119978	105.1524733	68.60429627	96.10600494	42.98340377	35.51585438	27.12304757	31.99828654
Zm00001d031778	0.571385314	0.984243505	2.830034471	0	0.044287293	0	0.559659315	0.678828855	0.290160937	1.239995542	10.10868519	1.126287077	0	0	0.019429394
Zm00001d031779	0	0	0	0	0.039547434	0	0.008767748	0	0	0.258711382	0.567723312	0.108055347	0	0.008225514	0.060724854
Zm00001d031780	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031781	0.018083643	0	0.022474404	0.04510627	0.262106375	0	0.211307367	0	0.022302147	0	0	0	0.465432069	1.685033557	1.317151006
Zm00001d031782	0.63872791	0.533741649	0.709851944	2.474036331	2.775720001	2.573316797	1.815648584	1.777293394	2.628286963	1.812643978	2.462837797	2.387994049	0.666648394	0.67326535	0.887568063
Zm00001d031783	0.973771113	0.661647383	0.812111657	2.17321753	2.549289884	2.794138257	1.871466372	2.039306749	2.117428942	3.163097003	2.358969287	1.632242586	0.903288317	0.688245031	1.066559015
Zm00001d031784	4.360652199	5.291864399	4.716370019	14.36770781	7.787887026	12.655702	6.617163063	4.540314305	5.966554861	0.934617168	2.00636355	0.535275235	22.34775219	23.97901872	22.5641593
Zm00001d031785	0.02802631	0	0.013932472	0.069906396	0.110786324	0.061804916	0.091696481	0.01351734	0.248862332	0.742135714	0.381694419	0.285625722	0.012544936	0.006144685	0.006480448
Zm00001d031789	0.007184043	0	0	0.044798134	0	0.052808614	0	0.008662321	0	0	0.063415161	0.007958157	0.008039175	0.047252402	0.008305734
Zm00001d031790	4.703362403	5.190924575	4.398835352	4.830683164	8.661233086	2.992168756	8.305131561	10.97425959	11.35401828	16.94702896	12.93290609	12.54457095	6.181340057	6.128622195	6.893672396
Zm00001d031792	0.227853899	0.444823384	0.438925119	0	0	0	0	0	0.05620141	0	0	0	0.203980663	0.137379795	0.01317151
Zm00001d031793	1.116019096	1.358775841	1.232881615	2.134170925	3.774331803	2.438309032	3.274660454	3.827669328	4.022032878	1.393807861	2.90849416	1.353034642	1.568014622	1.107874164	1.612837966
Zm00001d031794	53.30810386	97.74460986	74.76324644	0.088057688	0.151181493	0.151380148	0.041252	0.148987442	0	1.083334285	9.849761235	1.53496868	0.079011232	0.058051207	0.010203881
Zm00001d031795	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031796	0.016878067	0.021257987	0	0	0.088957315	0	0.236664251	0	0	0.442275092	2.554054012	0.112180537	0	0	0
Zm00001d031797	0	0	0	0	0	0	0	0	0	0.23627676	0	0.075911642	0	0	0
Zm00001d031798	0	0	0	0	0	0	0	0	0	0.027090353	0	0	0	0.021532883	0.0227095
Zm00001d031799	1.783689123	3.051581477	2.988026744	5.839416705	3.961187761	6.032237042	6.782466788	6.192290183	6.186890743	0.338250188	0.86222753	0.115260242	13.66847867	13.57333691	14.44820494
Zm00001d031800	1.286046545	2.218394871	1.077116856	1.011155269	0.9209538	1.746842002	1.535413776	1.078733495	1.31021692	0.154232192	0.282042774	0.216790609	0.782134445	0.582312571	1.357554411
Zm00001d031801	0.30721874	0.274084724	0.07954424	2.155218104	1.669823761	1.066424143	4.247990349	2.130006254	1.341887598	0	0	0	2.034076839	1.515527868	1.598340546
Zm00001d031802	6.756295808	4.348818289	7.225375289	5.563127103	28.92053931	8.185923965	20.18390661	26.1724953	20.90001922	5.727251905	12.43859171	4.403756103	5.200462644	5.462796926	5.987867371
Zm00001d031804	1.32972488	1.27354082	1.532084932	2.522112263	4.982556006	2.579400288	4.807017805	5.561604805	4.407283822	3.247548665	3.947527249	2.884642384	2.914009475	2.809092238	2.802448948
Zm00001d031805	5.076450831	4.157030678	5.330399924	9.27729832	14.54795505	12.08975347	15.79864389	17.41366366	15.64134829	35.58397506	10.37349695	3.229314727	5.118264804	4.224245025	5.501042436
Zm00001d031806	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031807	0.162230807	0.657170428	0.359648135	0.207795528	0.791500422	0.273959506	0.737773098	1.311138635	0.82733955	0.979631638	0.829371292	0.305995981	1.094155418	0.951700951	1.039189055
Zm00001d031808	2.513646193	3.222650204	1.911681229	0.383675612	0.62287209	0.312552411	0.447155151	0.787125396	0.296121589	0.093136097	0.113544662	0.049871699	1.183916308	1.2831802	1.778370732
Zm00001d031809	12.07979316	10.88116711	12.19672474	16.30351611	14.33918941	16.80483878	12.50358635	12.86587022	13.60796889	10.00228681	12.08892943	7.538606717	19.96274174	18.77514631	19.32794979
Zm00001d031810	0	0	0	0	0	0	0	0.082628553	0	0	0.324057605	0.037955821	0	0	0
Zm00001d031811	1.316751037	0.244872226	0.483250543	0.143278739	1.176082411	0.086614775	0.598927306	0.660654535	0.839206574	56.06494715	42.04654755	79.46145553	0	0	0.010217073
Zm00001d031813	12.39949123	2.229483193	4.207615339	0.685864785	7.597295787	1.568586228	3.84560814	5.46026198	4.493286832	51.4568905	65.39445804	45.0142914	0.153850909	0.018839581	0.178821255
Zm00001d031814	0	0	0	0	0	0	0	0	0	0.095158038	0	0	0	0	0
Zm00001d031815	0	0	0	0	0	0	0.293480123	0.040924519	0.502296614	135.3732096	59.90296541	175.6566743	0	0	0
Zm00001d031816	0.801943889	1.06554862	0.857929242	2.414280609	1.904344073	1.939789906	2.189932525	1.806412135	2.137440818	0.806214485	1.237239959	0.488108268	1.189960251	1.214021548	1.501110643
Zm00001d031817	10.85030226	10.25181002	11.38492222	20.67825547	24.1120452	18.69314747	21.31408928	21.33847958	22.35070582	8.439612901	14.70159328	5.265131121	17.07420087	18.36920396	18.75294629
Zm00001d031818	0	0	0.094392499	0	0.025019245	0	0	0	0.023417254	0.026187341	0	0.021033851	0	0	0
Zm00001d031819	0.014036174	0	0	0	0	0	0	0	0	2.051969057	0	0	0	0	0
Zm00001d031820	0	0	0	0.040644028	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031821	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031822	1.226677686	1.052394768	1.767557842	0.332578086	0.163975285	0.675192583	0.124641121	0.214361459	0.76737946	0.07355612	0.044837099	0.157548739	0.676398818	0.60415278	0.493289323
Zm00001d031823	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031824	10.74494974	10.85543743	12.75719355	17.22124182	13.99236834	16.34300769	21.41108999	19.15828658	18.56620158	14.56681788	15.53894149	10.1553401	28.94700508	30.03642761	30.32971463
Zm00001d031825	68.25826818	63.19493999	76.73168629	84.7537345	115.6941075	88.61190469	101.0132657	117.4987526	109.0882304	85.38225126	104.3562954	65.78312603	118.7887392	106.4797219	129.7774401
Zm00001d031826	0.015447722	0.019456463	0	0.655034775	0.712412397	0.43528818	0.288810611	0.26077011	0.285769881	0.404794152	0	0	1.227341279	1.049928786	0.821545034
Zm00001d031827	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031832	18.3848636	18.98496273	17.7420164	9.384515742	10.01394887	10.1499113	7.657145455	6.550513978	6.676769631	3.978251291	5.334558971	3.552920872	4.867633504	4.865823677	5.149476312
Zm00001d031833	2.271570978	1.38664486	1.870530248	6.674072616	27.37885809	14.00029394	34.78313121	45.03382455	30.61000342	119.7217958	71.9821461	83.08564003	11.44662132	17.84371423	23.94234122
Zm00001d031835	0.521561525	0.716627641	0.726767677	1.281226639	0.81218543	1.161789512	0.812592862	0.819455535	0.604246373	2.092565326	0.498261982	0.630286024	0.79587831	0.658383462	1.735898435
Zm00001d031836	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031840	0	0	0	0.073571391	0.019432423	0	0	0	0	0	0	0	0	0	0.017050498
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Zm00001d031844	5.127558294	6.483738719	7.339355387	6.707018832	7.629817426	7.500229878	6.971700242	8.205493618	9.193560683	6.381366488	6.994898048	4.675946783	2.369344913	2.039284435	2.408802631
Zm00001d031845	0.054158821	0.009744748	0	0	0	0	0	0	0	0.021341127	0	0	0	0	0
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Zm00001d031849	32.01193536	31.38515792	31.94147279	45.66018041	56.30482688	44.19152127	50.30326739	57.15460041	56.68522854	37.70099718	52.6501774	35.5459353	44.48610393	49.84935604	51.94809244
Zm00001d031850	51.75395161	43.9703206	62.12440219	66.24779665	45.36529164	56.22395897	110.6040473	119.1185225	79.15238225	5.232853681	7.873124647	4.40320963	325.7175811	328.4791055	319.5280687
Zm00001d031851	0.193444267	0.265793204	0.23167081	2.60117076	2.89649092	3.192978367	4.709843875	4.732849546	3.43107656	0.34440362	0.554407788	0.116884789	1.794735962	1.534546155	2.248678692
Zm00001d031852	17.50877327	21.50860778	28.31774959	49.59505556	79.26096785	40.72683709	49.49396851	67.32574458	59.10021955	19.97956287	28.91457989	17.05734589	20.77382018	20.82388468	26.67577405
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Zm00001d031854	8.961862853	10.30814286	8.653656769	9.226377278	8.671194339	8.907395143	8.074684614	7.601255971	7.628366188	5.319598154	5.994066027	3.236185001	7.128180312	6.539907499	6.785528575
Zm00001d031855	0.011836566	0	0.029421039	0.014762052	0.093578474	0.174016957	0.165972332	0.171266454	0.087586613	0.21221949	0.223894345	0.013112011	0.264909952	0.064878297	0.369486516
Zm00001d031856	7.463508458	6.782143663	8.55017909	11.78702642	11.46643302	11.42890166	9.24683855	9.229339107	10.12819411	23.86217126	20.73739178	23.66446211	11.6021703	13.38861842	13.73502353
Zm00001d031858	0.523400992	0.30763856	0.329578709	1.4012646	1.480464966	1.547520631	1.157951428	0.875128743	1.050011029	0.240618753	0.607223408	0.193266622	1.147976933	0.627322465	0.7664891
Zm00001d031859	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031860	135.4142962	147.1962293	143.9427907	117.7948575	63.62840533	94.50223453	61.86180746	40.02873558	52.21646893	10.04979226	22.33314161	8.275714565	89.42232989	86.98379269	72.25330065
Zm00001d031861	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031864	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d031868	16.46535472	16.71622607	24.10109199	35.30339312	46.06463018	29.87132325	30.39494524	39.98769595	32.9824333	11.74416225	17.44959529	10.09624834	19.91417059	20.71180449	21.76664144
Zm00001d031869	0.013442708	0.045149708	0.011137758	0.039118712	0.023616986	0.038428032	0.01047187	0	0	0	0.011301124	0.009927481	0.020057096	0	0.01036107
Zm00001d031870	17.92109315	13.70423619	16.95883206	37.22939717	54.34517331	34.87834257	36.31732595	42.60012508	30.81605401	12.00498327	22.14709195	8.933478169	19.4812993	17.37243983	22.67275664
Zm00001d031871	8.991323657	10.92117527	7.063291056	7.80921113	6.073093592	6.296117885	6.717182113	6.787893615	7.190937197	9.214382146	16.21040553	10.69808774	6.826141209	6.149502131	5.141886613
Zm00001d031872	4.081799903	4.401577125	4.516941653	7.496495962	6.250206457	6.29091466	4.127105115	6.045402297	4.562772958	1.580879969	1.97429942	0.381964406	7.268636109	8.029783876	9.265847566
Zm00001d031873	4.57165285	5.133871922	4.691448067	9.306702539	5.281247858	7.392474098	5.188699705	4.329057857	6.117445585	0.89785169	1.304936445	0.484361594	9.019294253	9.980606139	9.767699782
Zm00001d031874	0.347868548	0.043814172	0.994363726	0.043384656	0.412531061	0.80975448	0	0.167780114	0	0	0	0.077070598	0	0.038134572	0
Zm00001d031875	1.273301198	0.812414625	1.353421856	0.731318561	1.192093434	1.611282932	1.409544437	1.222188691	0.454570228	2.426180118	0.971855111	1.187793923	1.481109595	0.707101885	0.803849511
Zm00001d031876	0.007745742	0.00975579	0	0.019320306	0	0.037958373	0.018101798	0	0	0.021365309	0.019535257	0	0	0.016982308	0.06268594
Zm00001d031877	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031878	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031880	0	0.05380928	0	0	0.018764434	0	0.049921365	0.017171246	0.105377644	0.019640506	0.197540115	0.015775388	0	0	0
Zm00001d031882	0.243887226	0.358373007	0.269425566	0.219675132	0.23209131	0.398393629	0.126658767	0.01633736	0.116970229	0	1.452317631	0.240148623	0.090972546	0.148532078	0.375955887
Zm00001d031883	8.232677361	6.179557257	6.200967064	15.76414734	28.07268851	14.38550765	23.00998412	27.81491188	22.23442643	7.225412321	12.73065426	6.927352878	8.691511838	7.712230017	10.88332072
Zm00001d031887	0	0	0.020976111	0.021049592	0	0	0.078888084	0	0	1.74582273	0.191554051	0	0	0.351544256	0.019513348
Zm00001d031888	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031889	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031890	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031891	77.92759518	84.27525066	63.74728741	70.91468222	48.01865739	62.31493563	17.73596235	19.41907072	21.19430933	29.49935149	30.14678528	31.45369676	81.80879086	88.02655767	76.35362871
Zm00001d031892	1.529761157	1.683362174	0.600376316	12.08975533	13.72787402	11.77765829	16.59576701	24.28972871	11.87577497	20.5649281	7.594475092	3.56757892	41.26463948	38.53518688	39.44937076
Zm00001d031893	10.17987146	14.84734691	8.58064378	2.144521607	3.153070979	4.125204711	5.722215626	5.455381247	4.77349135	72.9939254	59.22235642	87.45494888	8.904033974	7.568700313	10.16681838
Zm00001d031894	4.690988493	5.620296624	5.107948503	10.83749496	10.46464981	11.67593208	10.6378548	10.92501124	10.73213182	2.85550933	6.26620756	2.560576546	8.257897105	7.249533801	8.388798991
Zm00001d031895	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031898	32.64307936	32.29018902	31.43890302	16.91473487	25.58601835	20.37727175	21.28377804	19.59866601	20.60678147	15.2563468	17.22876119	18.77928202	9.02213743	8.249544331	10.11191927
Zm00001d031899	181.3882472	202.8390844	254.4859147	615.2785453	319.42392	652.4791178	266.7129955	199.889172	276.5461789	20.63873604	28.03137497	10.72101619	1560.527809	1771.947922	1565.340509
Zm00001d031900	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031901	0.021130192	0.039920332	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031902	9.163905707	9.746763969	7.224735895	7.594398814	8.397288923	8.859120655	9.339001294	10.07779682	9.893534235	7.26612945	9.777412281	5.695672851	5.987478257	4.842924086	5.081672112
Zm00001d031903	1.375293452	1.474931669	1.438451424	0.458520505	0.484436375	0.583884088	0.238667883	0.279118263	0.5037975	0.150238131	0.309081237	0.150840364	0.396177583	0.313470738	0.22039977
Zm00001d031904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031907	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031908	10.92863404	11.958592	13.68595108	44.18806758	19.35297192	23.4863085	18.87047949	17.82732056	19.76206402	2.438462787	5.161425852	0.940740044	116.2191254	142.43647	136.1038155
Zm00001d031909	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031910	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031911	0.228682458	0.457085378	0.296564068	7.78107753	4.421582917	8.606008621	2.736053892	1.93017294	2.145872017	0.054850576	0.11284275	0.016521134	0.756582824	0.457781266	1.005824404
Zm00001d031913	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031918	0.335079263	0.225084571	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031920	0	0	0	0	0	0	0	0	0	0.061617273	0	0	0	0	0
Zm00001d031921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031922	0.12519445	0.13665849	0	0	0	0	0	0	0	0.276262058	0	0	0	0	0
Zm00001d031923	0	0.020198205	0	0.030000299	0	0	0	0	0.009888811	0.066351503	0	0	0	0.035159851	0.009270271
Zm00001d031925	0	0.141139096	0.02321127	0.081524036	0.873622814	0.091525312	0.785647719	1.339920185	1.094084825	2.665957169	5.581759434	7.179094621	0.010449829	0	0.237519034
Zm00001d031926	0.007373913	0	0	0	0	0	0.051698501	0.03556504	0	0.010169841	0.037194961	0.1143588	0.057761515	0.008083542	0.008525249
Zm00001d031927	2.705861204	2.693007333	2.644392146	3.058036041	3.930268283	3.363114901	4.541125155	3.981966745	3.783918361	1.416344369	3.528584707	1.390705376	4.202969229	4.503149616	4.116875088
Zm00001d031928	4.952416508	6.338518745	6.354064798	10.85374238	9.862216772	8.384383847	8.333883285	6.570568249	6.858812168	0.641021898	1.495603727	0.301822195	8.572927055	6.219645828	9.079540344
Zm00001d031929	2.642635423	3.254444447	3.279409489	9.506495065	10.22435946	10.2595629	6.624159193	5.858286287	6.498891567	0.043195614	0.424578566	0.013010629	3.14119707	2.429146011	3.191035942
Zm00001d031930	0.042946285	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031932	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031933	13.24983966	13.35967619	12.46429876	14.05081151	12.95316045	14.91270153	12.36977137	10.84442447	10.71316177	4.047448998	7.245905214	4.921420923	10.23608381	10.09684573	8.776366807
Zm00001d031934	0.059234116	0.029842235	0.014723267	0.960364855	0.015609927	0	0.083058078	0	0	0	0	0.013123373	11.95779191	18.74010183	28.98188764
Zm00001d031937	8.659322829	8.411185781	10.06068225	18.26102648	28.109914	18.09935008	20.62011103	26.16621051	23.47838173	11.9426338	25.64471219	12.00504002	13.52203869	11.96649687	18.80921974
Zm00001d031938	36.57045261	36.09902866	30.85927372	19.9579508	19.68439196	19.13430857	18.11215363	17.00027311	19.65355078	7.178173458	14.0274982	7.313475329	13.80075891	12.8827846	13.40975443
Zm00001d031939	26.07817371	20.67974907	28.59708621	40.1971946	74.40988743	38.1037593	45.42290259	57.38033359	47.33808034	5.370503757	15.77309435	3.249224189	14.71377164	12.23343896	18.57329088
Zm00001d031940	2.955573223	2.483615551	2.179014043	5.338827346	6.258644954	6.165153567	5.081935138	4.892603943	4.667225686	0.314038732	1.338070769	0.297640899	2.094504978	1.208136769	1.395249899
Zm00001d031941	66.81993085	61.9167485	63.37400051	37.94830068	42.35552622	36.75635796	35.3588459	38.23010116	34.91492694	42.14307266	42.26127332	37.02434414	22.43498371	21.77980985	23.52215281
Zm00001d031942	19.81676131	18.20559553	19.05363452	28.59915945	44.48169162	32.29863339	40.00247369	42.5715717	43.0481332	58.57104263	47.88589943	47.93307535	30.23185444	32.33528147	33.07792048
Zm00001d031943	0.027482936	0.023076573	0.075901942	0.08759301	0.08047289	0.033670357	0.017841006	0.095732478	0.056490137	0	0	0.03720976	0.034171431	0.020085173	0.035304472
Zm00001d031944	1.407683772	1.742932362	1.749473535	2.261453597	2.23208342	2.221525379	1.003654677	1.49596615	1.382966633	0.394866712	0.361044284	0	2.64320493	1.490842132	2.206745141
Zm00001d031945	45.23756989	43.91346714	26.21845404	25.64011177	16.86419771	26.16432476	22.71316631	19.2643092	21.86296608	4.980686149	4.306322894	3.117206008	33.46800232	34.99051654	33.68922665
Zm00001d031946	7.624148821	11.33592716	8.763729705	9.420813927	8.550294775	10.30053167	10.78682965	12.98403582	11.73168301	25.33841701	23.332719	38.22257134	18.78315696	15.07498008	18.31430245
Zm00001d031947	0	0.075521797	0	0.224344341	0.316032567	0.073461106	0.420390446	0.722999834	0.147898447	0.909665528	3.251377969	1.926257908	0.067098902	0.262927837	0.97053232
Zm00001d031948	2.866948367	4.041250407	1.083069307	2.618352782	2.07475781	2.353735338	2.296997562	2.137418996	1.850310818	1.044837914	1.180128361	1.129931452	3.163879719	3.131993345	2.576101206
Zm00001d031949	1.194573838	1.576216368	1.461054487	2.601274185	2.573408047	2.717959029	1.196451034	3.429486038	2.899712138	6.616208083	1.841150586	0.840187102	2.270381169	2.390418822	2.521037986
Zm00001d031950	0.32550557	0	0	1.217869278	1.393929359	1.196366581	0.19017663	0.392485624	0	0.89785169	4.104729662	0.721160596	0.364251184	0.089207659	0.846739932
Zm00001d031951	3.489979398	3.817780615	3.126484571	5.760540052	4.055155441	5.81040783	4.975571387	3.605184695	6.402128943	1.066452799	1.417153272	1.59324281	7.095481217	7.482141022	9.30945643
Zm00001d031952	2.812919466	3.215703356	1.48506765	5.942567354	5.398289193	5.846738308	8.481753819	9.307150963	7.762018838	12.28331302	13.40254402	22.07526612	12.62421043	12.95283584	12.31343123
Zm00001d031953	1.345390166	1.42731051	3.241214034	3.37518503	5.488703386	8.260453888	6.40928356	5.733974311	3.158936178	1.534368047	2.270807295	2.275668391	12.25852756	5.349218076	6.82007031
Zm00001d031954	7.480307603	10.50810912	7.623405265	10.85440774	8.057515488	10.32592127	14.77838591	11.72884225	11.16623021	34.19245877	46.973251	74.1045024	10.77900592	10.22683531	13.15324167
Zm00001d031956	0.378237472	0.338639738	0.453083994	0.801357985	1.399076175	1.060778369	0.979789999	1.148412937	0.972284393	0.113129313	0.350543913	0.36346494	0.300871478	0.189833898	0.358265074
Zm00001d031957	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031958	2.547341271	1.993375766	2.528928023	6.391463904	9.453798912	6.306316013	5.371913196	6.533782186	6.403986463	10.49803437	9.54179936	6.328243862	15.72866333	16.41617633	16.99081231
Zm00001d031959	0	0.052550264	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031961	3.46541027	3.29350767	3.502250925	12.9024034	15.77257801	12.16139399	17.90309025	22.27000604	18.55116179	16.78907631	13.2220317	7.762018225	9.162084109	10.21390421	10.62526271
Zm00001d031962	0.129380763	0.271592582	0.339455673	0.412359524	0.151536121	0.475527411	0.117585551	0.19067125	0.390041331	2.339512605	1.849070649	3.280484477	0.064347212	0.063036327	0.415505049
Zm00001d031963	74.28844209	72.46511913	82.49955822	56.44674772	46.76485455	62.02199066	53.76816714	51.01404091	46.96339893	7.385258279	11.43843876	4.590766873	63.95585816	53.37291803	56.89230993
Zm00001d031965	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031966	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031967	7.798459217	7.042189837	10.40572331	11.67810236	17.56128416	11.38223559	14.00758973	17.39416109	15.83963132	7.812197199	13.15711247	5.9379912	11.67554064	12.32652913	13.6836149
Zm00001d031969	16.56492922	18.97929635	21.54106135	42.58246172	17.15790635	25.28648674	6.095510139	5.150632082	6.251344739	0.271488632	0.310292739	0.207158443	42.50331423	45.37066852	46.87123104
Zm00001d031970	15.7526059	16.37874673	15.16666979	18.00418069	12.08346511	17.16322909	13.01268436	12.47322889	10.89290828	12.41453748	11.83347894	9.340836138	28.78556009	31.38763063	34.02825773
Zm00001d031971	0.123256805	0.077621201	0.051061307	0	0	0.125838709	1.128200355	0.13623468	0.304019648	17.06997521	3.147473398	2.036696229	0.827569934	0.641812578	0.593757027
Zm00001d031972	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031973	5.996490443	6.854698169	6.819214892	5.639702129	4.682847348	5.192894217	5.190984753	5.156893578	5.404132784	46.96812145	22.15922962	66.51811976	4.654066146	4.55925321	4.859928239
Zm00001d031974	0	0	0.229603375	0	0	0.67901887	0	0	0	0	0.698913429	0.204653683	0.620211476	0	0
Zm00001d031975	33.4163445	29.33789268	37.02068261	38.9003876	61.19956762	44.13224406	51.48488506	61.68354716	49.09794731	17.52785542	32.96302553	9.992621161	47.15183514	37.42326693	49.41054447
Zm00001d031976	0	0.009440225	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031977	1.037163154	1.588064146	1.137343606	1.2364385	1.473800072	1.208379187	1.170339486	1.177018994	0.978142799	1.325241114	1.48741115	0.867323677	1.450773591	1.332043853	1.346050935
Zm00001d031979	10.61465723	11.10600214	10.77455838	10.55816753	10.91083168	8.261089563	6.234082711	5.919193766	6.533985063	13.05534754	15.65136757	9.542185934	6.156733434	5.036243769	6.703549021
Zm00001d031981	17.30050125	16.57132245	16.88877069	7.853580569	9.230321587	9.285291568	9.169530284	8.392709771	9.259676297	13.05812593	13.72047004	10.89288609	7.380330621	6.980809313	6.410206694
Zm00001d031985	0.823568308	1.521354754	0.511766559	0.718983067	0.32555162	0.201796773	0.224545901	0	0.30470644	0	0.034618202	0.456155799	0.122879918	0	0
Zm00001d031986	12.83200105	10.94258953	9.857170851	13.94816697	17.11430943	14.05350209	16.03072855	17.7637196	15.95412163	7.298471894	10.64331334	4.388207176	8.758711686	9.690948047	10.25065229
Zm00001d031987	0.222582215	0.250833321	0.232948069	0	0.108052266	0.129170685	0.054755225	0.028250893	0.028895326	0.096940285	0	0.207634927	0.078655783	0.025684467	0.067719846
Zm00001d031988	11.36251561	11.4660093	8.433438406	14.59426793	19.21875665	15.42916742	15.56224182	16.28789349	17.21772997	1.323587988	4.869405459	0.97285042	5.724291792	5.622563785	6.95037034
Zm00001d031989	0	0.021297427	0	0.179253487	0.089122357	0.051790761	0.039517222	0.010194432	0	0.046641646	0	0	0.151377116	0.018536656	0.146621633
Zm00001d031990	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d031991	0.118146466	0.446417733	0.104880554	0.336793479	0.066717986	0.062033823	0	0	0	2.420874186	3.511824266	4.375040949	2.719742177	2.201777182	1.287880983
Zm00001d031992	5.86408248	7.655664376	6.606786913	16.18026326	15.02686485	19.97199721	16.06216295	16.3522327	14.1814345	23.53425029	21.71318221	29.69268372	37.93973433	36.95381757	39.0652396
Zm00001d031993	0.054904554	0.038418049	0.007581727	0.007608286	0.176842856	0.029895818	0.527504656	0.433993475	0.504082258	0.580538643	0.561584165	0.493324049	0.068266621	0.0601883	0.211590523
Zm00001d031994	0	0	0	0	0.105549939	0	0.156004267	0	0	0	0.235701274	0.059157705	0	0.029271263	0.061741453
Zm00001d031995	9.896537047	10.53434726	11.2980746	8.978372611	7.674064356	10.39712302	8.207443454	7.677230016	8.025172508	0.942140338	1.844367319	0.601506147	8.163800088	6.432552267	8.859760128
Zm00001d031996	0.635255787	0.308374579	0.296061661	2.137460794	3.383047559	1.953795181	3.154759668	3.351135728	2.986890037	1.232047212	1.8107699	0.733028679	0.97004357	1.146141384	1.553039618
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Zm00001d032020	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032029	0.231715829	0.14986735	0.202362297	0.827905638	1.501842351	0.820960668	1.346481905	1.321470151	0.710562948	0.190017169	0.086870596	0.006937413	0.574659221	0.453107889	0.999176393
Zm00001d032030	42.61326112	40.07266626	49.04613522	9.257587671	15.60981335	16.04487247	19.65459829	18.44323673	19.75782658	10.40982709	6.965283496	4.734346801	11.74660127	11.26071377	12.9740578
Zm00001d032031	6.784164031	8.098244188	6.669315544	7.61007025	9.873220392	7.176865373	8.675489929	10.4503811	9.048317331	3.521821376	5.253184273	1.794356933	5.629798066	5.201749077	5.723933615
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Zm00001d032035	46.68529502	50.29957752	48.95436327	44.85254392	33.79759907	42.7318687	40.63533562	44.50537091	39.65905459	1.848331372	7.787993398	1.599380422	72.65844823	80.62929898	91.87178182
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Zm00001d032044	3.830354526	4.080971676	3.446033105	4.113071819	4.532825875	4.276562549	4.174569726	4.238014818	3.526576581	3.129744868	3.375064238	1.980110027	4.321334844	3.871502361	3.938223483
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Zm00001d032148	1.278070722	1.786286363	1.434674889	5.645683515	4.215546596	5.182330992	4.287576865	4.991053622	3.721902784	2.808900311	2.713874943	3.580575408	62.02463895	59.24249422	77.24637828
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Zm00001d032156	5.17708342	4.662455412	6.765136314	15.67309538	19.82274149	13.28215941	17.45925977	19.52872519	16.61334269	1.642149061	4.047994847	1.192887294	17.441111	16.99345737	17.64039175
Zm00001d032157	1.898782489	3.004351486	2.33031481	6.660222612	7.239943994	6.978805056	6.323372959	7.655513872	7.361799276	3.322518883	4.758920952	1.695854214	5.32527643	4.267099685	4.555147228
Zm00001d032158	7.691992078	8.770953064	9.559630396	8.301245503	13.04078872	12.03726075	12.8230124	14.49340763	11.8895706	15.70061732	14.70497076	9.486534921	7.253325911	6.554654873	13.97978427
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Zm00001d032163	1.159735412	1.718460051	2.034808354	5.275002659	5.159657452	4.880984614	2.90161709	2.665141905	3.247566505	0.545700279	0.172054537	0	0.870276782	0.59827891	0.820261704
Zm00001d032164	1.496521902	1.686466992	0.950917023	5.964051195	3.291420663	9.208576351	4.154772408	1.872301793	3.247192577	0.21725794	0.425675669	0.124645041	4.167753058	3.404428583	2.497708574
Zm00001d032165	6.862543983	6.24030191	6.310539583	11.54268676	12.85400666	13.02605549	14.20385052	11.98527852	11.58501771	7.607739388	7.751632977	3.604991319	12.5522147	10.36515687	10.41564768
Zm00001d032166	18.87128854	16.65802262	16.58826946	24.1970612	21.31058832	21.67293749	21.23761679	18.38319926	18.39761967	3.318577243	7.993132677	3.394602512	15.8275523	14.89523907	13.78659058
Zm00001d032167	0.021830314	0.020621521	0.006782695	0	0	0.026745121	0.038263083	0	0	0	0.006882181	0.006045658	0	0	0.006309705
Zm00001d032168	2.13058191	1.3417379	3.398129951	7.617218754	5.89544389	8.352813948	7.551741103	8.477689487	8.495901457	1.763054227	1.701597023	1.966801625	6.357838855	5.294069068	6.322324828
Zm00001d032170	1.547008049	3.0133197	1.564928267	6.147034933	4.432356755	5.39939128	6.600130002	4.923628872	8.984830675	2.604951284	1.655934361	2.0126074	5.314233069	4.949616528	4.596163773
Zm00001d032172	0.037539584	0.05157954	0.050895606	0.497970513	0.661017694	0.451549244	0.634048696	0.58020466	0.55976941	0.16943981	0.322763316	0.086949717	0.599568724	0.568648721	0.469518631
Zm00001d032173	1.125580007	1.157127026	0.899816342	1.411362527	0.889870072	1.431167499	0.61140898	0.462179333	0.405190406	0.469903688	0.452671122	0.303291839	2.33529264	1.860855091	1.31539246
Zm00001d032175	84.91517753	104.4955123	76.57906936	65.08545243	30.68135423	64.93647486	44.72100076	25.49057705	37.23719089	0	0.491689542	0	62.74859708	62.44536125	55.94017801
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Zm00001d032237	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032238	2.574453141	2.826823865	2.480985654	5.356921508	5.011847141	6.73200216	14.53587811	9.754502861	10.89779588	2.988653177	3.613884367	3.184705709	8.252963898	8.014965048	9.034524281
Zm00001d032239	93.15704132	103.7815662	79.47239402	49.71760064	56.8246945	53.48916392	31.17669791	33.43057944	32.3468217	7.666799786	17.43011775	6.44085792	28.29842096	22.40399616	24.92971038
Zm00001d032240	0.196323203	0.157353509	0.110905025	2.203612035	10.13573378	2.951870546	8.654774587	10.17900707	11.7978939	0.221532597	0.337595259	0.019770721	0.019971997	0	0
Zm00001d032242	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032244	0	0	0	0.007750077	0	0	0	0	0	0	0	0	0.006953886	0	0
Zm00001d032245	4.784732176	5.141042082	3.81706388	4.542727121	4.010095975	4.917580425	4.358895036	3.481804987	3.152401612	0.324989262	0.916639017	0.322973764	3.968773641	3.966730748	3.823316504
Zm00001d032249	2.319227183	3.587285357	2.932909779	7.452200103	6.31863583	10.45396513	9.135270279	8.68374444	8.745627574	4.352977389	5.365468058	3.509218971	12.08533394	9.838330384	9.314139255
Zm00001d032250	14.63269835	16.98672927	15.74663301	21.7480009	20.40876209	20.52494805	24.94721647	26.63230488	24.99825721	3.196974803	5.912708854	1.648664831	17.90726198	18.61088339	17.38943871
Zm00001d032251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032253	0.954695106	1.42369135	1.366845567	4.162527509	7.628214021	5.015382584	19.4643125	23.99907071	19.52606529	3.865778197	3.236086312	2.673531684	3.786177395	3.390887773	4.547482243
Zm00001d032255	0	0	0	0	0	0	0	0	0	0.327341762	0	0	0	0	0
Zm00001d032256	0	0	0.02234142	0.005604921	0.189494873	0.099107291	0.115531365	0.184243745	0.099765817	0.167351055	0.079341915	0.159309639	0.075436636	0.098533114	0.270184822
Zm00001d032257	43.62776187	44.82608709	49.50627234	45.84809419	57.07027231	48.41603525	50.8298246	63.20226201	69.37786143	76.31048708	90.53770641	64.047382	41.65072197	40.96690183	41.98961613
Zm00001d032260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032261	0.052989279	0.080088231	0.036220377	0.611294851	0.397980547	0.438204038	0.154794932	0.063893009	0.163376192	0	0.050115885	0.005869912	0.19864396	0.1394129	0.143967668
Zm00001d032262	1.947272257	1.589108456	2.040596368	3.010544114	2.710049182	2.900924276	2.699498363	1.882541667	2.927304793	2.002288724	3.28378373	2.540016966	1.946970933	2.324135822	1.971563579
Zm00001d032263	10.01980309	8.849242662	11.5493404	17.48181976	21.89025579	16.64312497	18.09807477	19.25961736	21.79049605	14.29629925	23.26290588	16.73549013	20.33351548	19.23633305	17.98661399
Zm00001d032264	3.128029132	2.749835465	2.496303361	2.346626169	3.535820813	2.392733162	2.217181202	1.7613989	1.958237282	13.78530826	3.243737587	1.732544359	3.322681536	2.167093373	2.817877065
Zm00001d032265	3.77937305	2.526136275	2.831774959	8.457020393	9.941778993	4.997994519	7.604787649	8.752194403	9.658565668	2.239252867	4.301363418	2.735660105	0.244288219	0.747848638	0.347033798
Zm00001d032266	0.89425316	0.773630618	1.122606525	1.920749234	2.100723913	2.196698202	1.931546192	1.748097518	1.865953652	0.454709825	0.99668857	0.210130045	1.718370305	1.623950723	1.733574366
Zm00001d032267	3.531689324	3.526021317	3.295906428	3.316652499	3.41906055	3.346211344	2.99757159	2.386045751	2.936301914	1.34550579	1.700032512	0.992872662	1.822287795	1.41317062	1.479729337
Zm00001d032268	10.55616352	8.478002192	8.967575681	7.83245434	19.49942176	10.68179227	14.11094333	16.07153108	14.89320199	26.8828972	28.17143418	20.19558045	7.027800494	6.710682926	7.917389063
Zm00001d032269	0.401252149	0.385050336	0.415564459	0.083404046	0.214001088	0.234089897	0.122797489	0.230389884	0.223863059	1.370306143	0.361422738	0.560902686	0.042763242	0.115203182	0.110452915
Zm00001d032270	11.00127356	10.16030219	10.11578313	12.75691513	13.758023	13.19859559	14.62997013	13.41506041	14.23896929	9.338066153	12.3692923	6.604485549	10.06559871	10.79828772	10.54919577
Zm00001d032271	0	0	0	0	0.062188227	0.250562391	0	0	0	0	0	0.008713678	0	0.008623065	0.036377013
Zm00001d032272	38.05245446	39.87664022	38.43577698	45.4884058	35.54419467	44.18341598	44.84322207	40.56272779	38.26747691	13.62918689	17.34747922	15.81556505	71.0303452	71.28594048	69.99152985
Zm00001d032274	0	0.005281893	0	0	0.027628614	0	0.02940154	0.035395943	0	0.028918536	0.02644151	0.018582052	0.023464033	0.027583227	0.077574538
Zm00001d032275	1.244860324	0.335979897	1.036015229	3.576377098	1.94783975	2.982162551	2.285830328	1.541224037	2.467378975	0.505862781	0.826952854	0.406312433	1.616919892	1.303737298	1.567730953
Zm00001d032279	12.94188043	11.70200973	13.14341867	14.60040313	21.77061085	17.24160434	26.12919678	27.1275499	28.78384429	32.98890543	29.7765227	40.30083247	17.92791552	17.23105827	17.64080025
Zm00001d032280	21.14310162	21.66754602	21.76546839	12.73676175	14.87540403	13.04153785	14.27822539	16.58275181	13.90280703	17.24614526	23.56594854	18.76781725	9.739589844	8.289286378	7.902906034
Zm00001d032282	4.487504264	5.087920758	5.27985522	6.271794362	7.757875786	5.857401648	7.123639123	7.62875207	8.387309658	6.764729907	9.659039904	8.092412794	3.812472559	3.880192676	3.928830195
Zm00001d032283	1.215792162	1.147314478	0.967764038	5.492518456	4.365528858	5.607044234	4.52806367	4.384619093	3.81873632	1.474146071	2.904189976	1.501416834	13.39547921	14.50369852	14.16238131
Zm00001d032284	0.024100897	0.015177585	0.007488166	0	0.190538806	0.007381724	0.450590377	0.290601961	0.356677084	0.290842218	0.045588007	0.08676811	0.047196936	0.059445562	0.202013464
Zm00001d032285	0	0	0	0.022028643	0.721485202	0	0	0.042595339	0	0	0	0	0	0	0
Zm00001d032286	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032287	0	0	0	0	0.115031011	0.042781947	0.122412544	0.147370081	0	0	0	0	0.371229176	0.076561362	0.020186222
Zm00001d032288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032290	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032291	0	0	0	0	0.128121311	0.381203576	0.499923774	4.103512574	2.110550816	1.099644815	3.310642558	0.689359773	0	0.106592366	0.022483374
Zm00001d032292	1.977361861	2.097258595	2.269339379	15.78763135	26.36630183	18.91666688	21.04919692	20.6939064	19.21738178	1.99639964	1.503268469	0.482104592	38.60104662	38.76884601	44.27815035
Zm00001d032293	12.29505412	11.6793415	10.1151132	7.906328778	7.917380403	7.400106191	8.238175563	8.569797001	7.78434852	7.200915367	7.544923453	7.39771192	13.84007625	13.99625003	12.59639458
Zm00001d032295	5.908606802	5.870599306	9.647415831	42.16081299	58.40233776	38.16849123	74.56948603	88.64802685	84.83634891	35.36784603	38.25982621	10.53771928	73.87512614	63.13867096	66.38841723
Zm00001d032297	15.89033276	10.23156171	9.800403773	11.41620071	15.71643697	12.42834153	10.41837192	10.75069319	10.1162538	6.011702619	4.697238465	1.711972545	9.400847959	5.907874177	6.139069035
Zm00001d032298	31.63266722	24.73443163	13.88351988	18.67040702	15.23713483	11.96498776	13.22998927	4.462626602	11.42969006	1.666730209	1.609689013	0.84507272	9.187582084	7.899165697	7.571071306
Zm00001d032299	0	0	0	0	0	0	0	0	0	0	0	0	0.046570928	0.091244363	0
Zm00001d032300	5.545877911	6.768462937	5.102537899	7.559980987	8.959722043	10.20924564	14.86128699	14.28993258	14.06802589	20.32730579	9.044604007	13.2632319	13.60672899	13.01534133	13.2129299
Zm00001d032301	2.161962573	2.6777326	1.858835494	3.689318863	1.766778629	4.565789711	2.064291367	1.870120583	2.032115694	0.102948819	0.233583605	0.168440948	6.283388176	7.152487889	6.312735862
Zm00001d032303	28.71116445	28.77093673	25.02650367	24.33916656	21.42384409	21.58691368	20.98420757	19.73764588	19.03345795	18.64876188	18.44010832	12.99209403	15.56262137	13.99523424	14.19612925
Zm00001d032304	0.096050824	0.153236733	0.310367841	0.031944112	0.134998455	0.117675401	0.134682466	0.146699545	0.142148765	0.114807265	0.104973414	0.226988253	0.042993582	0.070196191	0.088838288
Zm00001d032306	0.644143933	0.399596344	0.740801888	1.534755095	5.3585522	3.250886406	4.122900956	4.799254597	3.62819229	1.166828356	1.200243737	0.777453723	0.462614373	0.600740184	1.667279754
Zm00001d032307	0	0	0	0	0.064565793	0	0	0	0	0	0	0	0.32900107	0	0.056651656
Zm00001d032308	6.040558966	6.17417978	5.460862654	9.30542651	10.58763476	10.85869406	7.959932519	8.28190588	9.932912652	0.804544322	2.005187277	0.5836785	4.990717536	4.56929856	6.004685659
Zm00001d032310	4.429367654	4.084061852	4.982220605	3.50792969	8.55134875	4.579393612	7.872766534	8.106987754	6.568995972	77.10140288	46.0692075	80.14199044	4.198474178	4.763432888	5.682745829
Zm00001d032311	35.54267179	33.86610351	33.78585976	19.27713085	12.95393453	13.12585049	10.1065295	9.768304553	12.70944316	19.83086193	23.56967757	29.01313369	6.658700872	6.434073436	5.25785177
Zm00001d032312	0	0	0.030780163	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032313	100.8543802	99.29670869	105.6383547	108.7117287	112.9589156	100.5137613	104.6415141	102.6401024	99.53950744	92.37399163	101.5258163	68.56987691	97.76864803	93.92687542	105.4496477
Zm00001d032315	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032316	16.25700727	17.59717771	17.15651333	19.21394984	39.92943261	30.98436158	49.73739655	49.37272792	39.8004738	22.06447246	25.65468561	7.863246498	30.03705496	31.88485291	34.42754673
Zm00001d032317	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032318	59.44232478	61.81168615	68.3360199	65.88985066	28.76938227	78.89884222	141.491413	77.41024161	74.17350922	0.069065515	0.378898123	0	98.62801301	84.43161811	136.2889436
Zm00001d032319	30.94784289	32.8189241	31.35903029	26.34329489	21.9749478	25.62720742	28.33521369	22.06976292	23.05320994	13.93898352	15.00859535	12.00714157	15.78567345	15.8037408	13.37528731
Zm00001d032320	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032324	6.433521845	7.347676009	6.318556689	19.46405236	16.9721777	22.47690115	21.8997017	18.90035459	20.10475165	5.094390794	2.973575845	1.781690884	8.877124578	5.902113904	7.107099943
Zm00001d032325	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032327	10.9393835	10.7750608	10.91511505	11.9993746	20.6504155	16.19131704	17.3329081	18.14583844	19.35771615	21.82936348	25.80691385	16.39202459	6.905129815	5.464105931	5.984321484
Zm00001d032328	3.562890491	3.771108706	3.87914378	3.212225478	2.784485825	3.118686704	2.609790714	2.670734244	2.600491421	2.088609842	2.271242095	2.310201929	2.530353738	2.09862036	2.258736885
Zm00001d032329	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032331	21.61449443	25.70061845	29.01243938	84.12811391	26.52653731	62.94170314	20.52286993	20.56026695	16.22910954	1.472847736	2.915974513	0.967910187	140.0967903	148.6304412	121.6710801
Zm00001d032332	0.298877469	0.376437279	0.119821225	3.9198557	0.863852067	6.484678098	0.687210898	0.139501237	0.344818242	0.093077714	0.012157873	0.010680093	28.76299973	31.50628297	27.34249436
Zm00001d032333	11.67090201	13.71262452	11.38082069	16.89532475	12.53517187	18.01672538	10.71652029	11.22469281	11.07241502	2.378265071	5.135426866	2.154749268	22.34113137	21.71056967	20.56191011
Zm00001d032334	1.170268485	1.631270815	1.073093669	2.289158857	2.236079485	1.723148053	3.074402582	2.87453821	3.358690023	0.475584996	0.873121245	0.222578663	1.953717475	2.01809517	1.933739868
Zm00001d032335	2.478745341	3.578279619	2.440776743	3.947459137	1.884294595	2.616321896	0.846644078	1.103557906	1.175761715	0.026296911	0.024044442	0.105609292	1.408234705	1.212328352	1.344706466
Zm00001d032336	1.990352527	2.120382682	1.468709488	3.573450831	2.240121655	2.336851921	2.301500622	1.979927481	2.536478558	0.148688815	0.726824743	0.064307314	2.083423972	1.73642424	1.855277304
Zm00001d032337	16.97841487	17.23363664	17.62743731	47.63590905	28.30968052	39.3048203	19.07727547	19.51730047	18.8566741	5.187502565	8.51713923	2.296165509	35.67924123	37.83742093	44.88635216
Zm00001d032338	6.039625316	6.475643344	6.628432007	10.84659652	12.15343547	11.06490016	10.35070994	10.80784836	10.76408518	1.529236294	2.757440959	2.978095909	6.335693007	6.960380094	7.80622345
Zm00001d032339	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032343	0.045241749	0.031081173	0.076672607	0	0	0.015116545	0	0	0	0	0	0	0	0	0
Zm00001d032344	7.867934624	8.207876233	13.40923874	15.07175367	5.834808858	16.71983336	1.243522293	0.283550839	1.425516813	0.021988205	0	0	0.388039017	0.375764506	0.225797315
Zm00001d032345	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032346	74.55436225	84.53504846	77.2727508	23.32663118	18.96574305	20.60916747	48.76155825	43.13612209	40.22693284	12.02291987	8.857248366	17.93518717	20.25087779	18.78019283	20.74688298
Zm00001d032347	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032350	31.00150828	33.13119063	31.16898085	42.01839181	33.90115498	39.00633302	41.90775464	36.95346537	35.84287924	25.35575793	27.47502466	23.50641205	35.18857554	31.65406457	33.02832247
Zm00001d032353	3.919817252	4.477182948	4.063071136	27.1502948	10.29925508	19.51015683	25.15096325	20.29033476	23.93778919	1.011636245	0.698969989	0.437528606	55.45956416	65.83460256	58.98687621
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Zm00001d032357	28.5970046	33.26299796	41.29727341	32.21479157	33.78127881	26.56215308	25.14627275	29.94342091	25.58817137	21.16183618	24.46032551	15.64324596	21.81393211	16.32689069	19.37606609
Zm00001d032358	7.070034552	5.503456712	8.040842477	10.45463092	8.920441886	9.00639204	7.75732823	7.100274917	6.1520885	5.043487887	5.037162079	3.136900205	6.421613473	6.352466379	5.572144996
Zm00001d032359	166.0952897	158.9077418	177.4333176	129.0106059	138.6248906	124.8711893	94.92066502	110.637572	107.2074467	207.6192932	192.4415624	204.1628777	108.1197919	98.61171559	114.8970607
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Zm00001d032362	6.838172331	7.042075837	6.955051022	7.572187598	10.35039147	7.463538507	8.754807838	10.70407336	10.07213306	13.46274066	14.33325564	15.77845465	6.210925242	5.927523786	7.031370603
Zm00001d032363	1.57048048	1.686393941	2.70248921	3.138838344	6.128425349	3.243756813	7.305135305	13.24335514	7.35005185	19.88232402	13.0758914	21.37832261	8.066098393	2.814179756	12.95424804
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Zm00001d032366	20.6325056	18.13689273	22.61255593	51.18185188	31.39179375	48.95426488	42.31569861	32.36274847	30.8384575	17.50315656	18.0638287	13.05645351	64.40014507	67.24814418	64.18205673
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Zm00001d032370	7.843791805	7.050232546	8.072003707	10.3966115	15.96264876	11.09793406	9.744107068	9.827299651	9.137087346	1.192344169	2.597882335	0.660691056	4.515781644	4.885659082	6.145826066
Zm00001d032371	0.037069506	0.084040525	0	0	0	0	0	0	0	0.439674662	0	0	0	0	0
Zm00001d032372	27.17278941	31.20175008	27.38386636	22.97540623	25.29605357	28.2418877	19.5436835	17.06894928	18.68397938	2.87503573	5.50208444	0.966662075	8.381652254	4.756476452	4.652065254
Zm00001d032373	9.348533152	11.60001025	10.29684171	28.86044718	17.77196771	25.88116466	22.35748652	18.77308362	19.61567327	1.51431434	2.000470732	0.406714843	25.70171861	26.91336532	25.60085041
Zm00001d032375	7.949224543	8.018682071	8.967040141	10.44535028	9.455151411	10.37059936	10.67360111	9.170470818	9.472395842	5.847088637	7.64008666	5.561134171	10.78671973	10.26472203	10.65174292
Zm00001d032376	9.906084943	10.95424873	8.934525923	10.794688	8.790785099	10.62567748	10.09329769	8.66034796	8.980096448	3.358592905	4.925675594	2.317145094	9.621651917	8.889789614	8.130739853
Zm00001d032377	5.758181425	6.029839951	6.031996475	3.600184571	5.95327817	4.638700164	6.093004724	4.736965904	5.421660182	3.259301766	3.114711593	4.712208102	3.190515393	3.058662007	2.027139466
Zm00001d032378	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032379	72.25814774	75.09617658	71.84764409	38.83583706	26.14292851	38.28651349	41.78948972	34.20349252	38.45855033	18.60489049	31.88512754	16.0250641	49.72829359	45.95072193	45.47617806
Zm00001d032380	22.01100778	20.29330416	26.916276	127.0951975	87.48781281	143.1480252	112.1741291	94.46578823	96.13213769	3.100646791	6.38563504	2.371867269	181.0548021	201.1317653	187.738886
Zm00001d032381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032384	6.335449866	8.027519678	5.292557799	5.192281701	7.732777352	5.240669219	11.39946553	10.18930972	11.80817081	20.60241146	20.11117304	18.98587188	4.573573408	3.634450572	4.471888293
Zm00001d032385	41.63339692	32.19198685	48.34712179	87.83755421	57.41604254	99.65811091	86.68676553	55.24788855	78.83534508	1.159898136	2.160963599	0.931638087	156.4881719	176.1409764	151.2591358
Zm00001d032386	4.118785761	4.569790263	3.629000776	6.838167923	7.048734016	5.956432341	5.650547422	7.951708752	8.637834541	1.128891233	1.372600683	0.356905594	2.819350569	2.173257668	3.191364602
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Zm00001d032393	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032396	1.078540842	1.027998192	1.086821946	2.319404773	2.465862636	1.942756478	1.968753893	3.184405753	2.365492181	1.133705268	1.955566728	0.794353015	1.252589148	0.747746586	1.132356686
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Zm00001d032398	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032400	13.01640453	11.91694091	12.98796492	29.31695878	51.43545879	29.14316246	36.29083193	44.15175528	49.24627948	25.30572607	34.91788799	19.52632194	14.02740925	12.83334579	15.35774897
Zm00001d032401	0.159586388	0	0	0	1.495313625	0.434478136	1.098140542	1.154549152	0.656047587	0.562467401	0.916776197	0.746415247	0.119054862	0.155505958	0.184503643
Zm00001d032402	11.96423481	10.51950435	13.1265555	25.6607908	28.01486018	22.4628829	25.18218444	24.6438967	24.47298856	9.77427174	14.6644556	6.297492696	23.51917514	19.21395731	25.28577516
Zm00001d032403	0.096616494	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032405	5.885338434	8.016074101	5.140862485	2.977804203	1.988679233	2.220825347	1.231704718	2.359040348	1.240895618	0.451548075	0.825741177	0.274226371	4.441226182	2.31981599	1.551037633
Zm00001d032406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032408	0.042137365	0.053072167	0.058187157	0	0.542883341	0.126192091	0.246187556	0.395173882	0.213642346	1.549716615	0.856089166	0.897252207	0.115263046	0.128312386	0.108258987
Zm00001d032409	0.694907118	0.562653056	0.502316927	3.015616147	4.213822202	3.222991713	6.93513409	7.498348283	8.919933327	13.74020441	11.3650767	16.97457936	0.722078852	0.466396889	0.836199601
Zm00001d032410	0.546849357	0.408153356	0.125856665	2.702767671	1.868103619	1.786574094	0.922990579	0.732639832	0.349697662	0	0.153243241	0.022436107	1.495858197	2.286887896	1.779617359
Zm00001d032411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032415	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032419	0	0	0	0	0.236635223	0.33003216	0	0.027067974	0	0.49536645	0	0.621690169	0	0.024609009	0
Zm00001d032420	54.49387807	59.33058042	69.63791931	124.1167646	60.68487781	105.1632233	28.22882678	28.06698829	26.69130628	0.907610947	4.296581157	0.364499649	178.2851178	219.0319528	184.6138484
Zm00001d032422	0.049758813	0.141010671	0.077300499	0.077571292	0.049173402	0.137163048	0.058143174	0.059997802	0	0	0.06274746	0	0.111363419	0.01363684	0.043145984
Zm00001d032423	4.504604976	5.307530079	6.110012224	2.537137769	2.856049852	2.892897047	1.514001376	2.409145595	1.807007247	0.334010372	0.229050459	0.093897792	4.769786989	3.610658266	3.233961548
Zm00001d032424	0.619041842	0.560055775	0.379255575	1.946416078	0.953539589	1.442049004	1.467076863	0.967196717	1.322596957	0.252520788	0.186911797	0.038633603	0.390269126	0.506572063	0.70561661
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Zm00001d032428	25.26242327	26.67874827	26.37034599	18.29966062	14.86219644	16.61094468	15.37398771	14.50834873	14.1069494	15.8855041	15.66271609	13.27383488	19.45265728	17.05981206	19.3842694
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Zm00001d032458	6.990469124	5.89568607	6.862243008	7.261496301	27.85443545	11.38290533	60.14603659	60.27207396	58.4167277	221.2794716	211.4533552	121.3314194	14.59550959	15.93751123	17.91325368
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Zm00001d032460	18.60052356	19.32224342	16.36553387	22.99702826	20.43956325	21.46945414	23.63899713	21.46974343	22.33168609	12.65316818	17.12569329	13.9185587	23.50505656	24.42675058	21.50474357
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Zm00001d032465	5.326072621	6.322764169	5.397804357	9.526956742	12.49260549	9.1857057	11.05791555	13.02146667	11.02496019	3.157361366	8.727542293	2.216567652	6.124688447	5.812821746	6.627146343
Zm00001d032466	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032467	0.202912563	0.399326756	0.598928285	0.869906627	15.32347519	2.470419304	13.20369176	23.24330451	19.51930232	30.08386181	31.2172687	42.49696369	2.341614757	1.835128984	3.856148956
Zm00001d032468	0.501496619	1.318198638	1.788489448	2.63774558	23.50133091	3.606272469	19.89848111	32.86362884	28.53095502	72.23195365	55.54150949	64.41792902	5.538709397	3.250744164	6.629870134
Zm00001d032469	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032470	6.234695991	7.540221769	6.095111862	4.240748176	6.836530334	5.058166079	5.90987288	6.468147554	5.436603489	12.63523004	16.99817095	10.25610977	3.272673432	3.1269028	3.402042677
Zm00001d032471	5.464829995	6.583045142	5.205710466	3.266870425	5.575525876	4.032059947	5.101388306	4.792917348	4.954961291	4.505298676	11.50350946	9.942933272	2.507622937	2.376214729	2.527235695
Zm00001d032472	9.864368784	10.37823617	9.02315232	13.54734587	21.34703247	15.14638072	22.77048187	24.9097543	28.21540175	88.22034175	62.21206461	109.0257457	12.84939416	12.82551256	14.94563182
Zm00001d032473	0	0.005452492	0	0	0.108379756	0.02121486	0.050585297	0.005219885	0	0.053734632	0.005459108	0.124684511	0	0.009491379	0.065065091
Zm00001d032474	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032475	22.57506319	14.70235106	17.55700475	29.11644396	53.67205399	30.87852822	48.12931645	55.62427034	35.62304756	273.7826064	148.351245	390.9578012	32.04850036	33.58599737	36.19125687
Zm00001d032476	11.23216938	9.02403177	10.04971529	2.532032325	3.971630767	2.589196808	4.445101614	4.378015014	4.947888958	4.55842898	5.557300493	4.098882373	5.551830521	4.679129349	5.343373872
Zm00001d032478	4.109612953	2.877243862	2.692747248	2.760923289	2.420466484	3.59219113	1.747462784	2.129766954	2.410706475	0.45472592	0.757306713	0.365238958	1.185934089	0.942327932	1.143572966
Zm00001d032479	1.337403318	0.499100571	1.046525528	1.400255498	1.131304987	1.598045216	1.639928914	1.114886701	1.995557311	0.341574012	0.645453867	0.29264488	0.166288584	0.108600628	0.3817829
Zm00001d032480	0.791832698	0.712368723	0.512129514	3.375772407	4.801565724	3.187482593	5.759249727	4.306207524	3.378063472	0.646325862	1.18192925	0.358022991	2.911426133	3.348134263	3.62450064
Zm00001d032481	13.06631207	7.161872358	14.78537368	15.23953238	25.6657599	15.85979769	16.44607108	15.85225124	8.604286661	35.20691007	14.69711169	16.48458247	19.08934083	13.74903175	30.25950452
Zm00001d032483	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032485	3.435619874	3.021046799	4.082871829	14.97690082	29.43549656	15.4398485	27.36164892	34.18102078	23.42105082	5.578949903	4.342409434	1.525837184	13.19909619	10.23134882	14.11265907
Zm00001d032486	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032490	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032494	0	0	0	0	0	0	0	0	0	0	0	0	0.138762356	0.13593548	0
Zm00001d032495	0.51784977	1.356646099	1.029736349	6.174228186	0.272937217	8.323811122	1.016580533	0.699338022	0.255460954	5.685033654	1.567260416	22.71655877	20.62986253	27.56678856	24.45111231
Zm00001d032496	5.508856971	4.914325965	6.4655507	5.649208831	9.061097771	5.064117043	6.664188404	7.525681163	6.111788106	5.33998397	8.388999167	4.255990964	4.893193877	4.850867647	4.882604603
Zm00001d032497	48.80312574	58.06396763	59.66483984	45.26886191	62.14082222	41.3534774	52.56835879	59.54828404	63.42263766	36.7597186	59.23697655	32.46061241	38.30567107	34.47564828	39.05505889
Zm00001d032498	5.468493568	5.365911492	5.426471085	8.591170873	6.479402587	6.647717561	8.544680228	8.715006376	8.626262927	4.969504702	7.510700693	6.409943716	5.88223308	5.692693397	4.827511593
Zm00001d032499	51.30850503	43.25588638	51.58904309	28.69217451	44.24953329	33.96464446	36.55259302	45.34206807	43.33496128	45.05998057	53.84848743	41.65619171	18.50272542	15.13203814	18.02551449
Zm00001d032500	32.48110711	32.46368068	35.1501478	25.24377097	28.64616236	25.95030044	27.80863939	29.17228644	34.25876577	21.54306956	31.52334162	34.62217964	15.48158324	15.1363073	12.40196819
Zm00001d032501	3.137973916	3.132912614	2.330418021	1.372127038	1.563133789	1.722968806	3.644364482	4.694995986	4.625112536	65.93272412	59.86298674	176.9952172	0.963519578	1.227057903	1.836084537
Zm00001d032502	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032503	2.660714316	2.559082547	2.717541999	6.141922486	6.246843313	4.895535437	6.885120808	8.224698753	7.541250766	6.124835413	7.698764721	7.363187486	3.886892681	3.489515728	4.138818447
Zm00001d032504	4.158128007	3.869606009	2.399852606	0.12310592	0.048773979	0.03023309	0.093715199	0.014877614	0.174995365	0.161661924	0.630157505	0.724414931	0	0.006763036	0.007132587
Zm00001d032505	8.918244184	8.947427252	9.908565839	6.828035324	7.710603925	7.662336617	6.180918221	5.638587868	5.318124075	1.533060782	2.416803446	0.488299861	3.803190871	3.515615478	4.387220733
Zm00001d032506	0	0	0	0	0.316032567	0	0	0	0.049299482	0	0	0	0	0	0
Zm00001d032507	2.199394123	3.321026151	4.069058717	6.795131691	8.957530022	6.736396837	8.221054115	8.588762201	8.229859122	4.56722546	8.367795331	3.793014688	9.635009848	9.452423969	10.48904896
Zm00001d032508	19.57369922	21.45291046	21.58762654	19.74230197	21.82106116	21.70775678	17.84031955	20.97151395	19.17595806	25.77041092	23.74734636	22.08139183	17.6763671	15.78799495	16.80667352
Zm00001d032509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032510	1.387117884	0.897149245	2.153598507	8.852373396	7.799417991	9.711638773	2.954517376	2.315449927	2.460738152	0.178093068	0.210114133	0.110744954	0.778445401	0.520568277	0.621252211
Zm00001d032511	0.037635881	0.059253165	0	0.234689193	0.09918159	0.288181902	0.032983146	0.068070459	0	0	0	0	0.326397138	0.505407741	0.946390674
Zm00001d032515	6.704666444	9.1702559	10.70866623	6.728611105	7.281462999	6.224773246	6.732689901	5.400060832	5.846238625	3.93713126	4.689771591	5.251209627	5.099516582	6.201470358	4.299665352
Zm00001d032516	6.868323262	7.037619703	6.554942188	5.306978086	6.251093937	5.732075188	5.704436865	6.309816737	5.269147554	4.486997427	5.617825426	3.138710295	4.65005025	4.623252633	5.023151557
Zm00001d032517	6.20564951	11.22667351	6.964530437	3.963519547	4.732663768	3.916578354	12.39313348	15.80415979	9.044793628	17.76560737	33.76831797	23.28942018	15.34063654	15.0487308	31.19854239
Zm00001d032518	0.30681317	0.306872728	0.269158808	2.656000061	2.913131882	1.658329914	0.442866767	0.598443427	0.612094564	0.074672814	0.31862456	0.10995914	0.292843526	0.929879439	0.959824891
Zm00001d032519	0	0.008042489	0	0	0	0.070407375	0	0.07699391	0	0	0	0.007073504	0.10718274	0.006999947	0
Zm00001d032520	0.024682887	0.007772047	0.003834496	0	0	0.003779989	0.021631465	0.0520834	0.068491901	0.017020885	0	0	0.017263089	0.094703865	0.139116829
Zm00001d032521	3.446772959	3.307598702	4.475644321	6.670758557	11.24593856	6.517494214	7.897165158	9.511124093	9.216078671	4.274306667	6.416249035	2.823527079	3.31684659	3.355115172	4.10772517
Zm00001d032522	0	0	0	0	0.41411164	0	0	0.063158606	0.516794575	0	0.066053121	0	0	0	0.242234668
Zm00001d032523	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032526	3.407019943	3.522061987	3.515584254	4.047262549	3.94906036	4.102691457	3.971017707	3.712631536	3.850541678	2.237827318	2.704612594	1.594270276	2.559416466	2.798214483	2.719118554
Zm00001d032527	2.239919682	2.63635073	3.311736817	18.76481974	11.60214476	8.677375236	15.86653297	17.3412123	14.69809756	1.672438995	5.337539994	2.293046234	5.125446327	6.20643387	3.643373629
Zm00001d032528	24.33016206	26.66751453	21.37330147	18.85633195	8.34858278	12.33119368	7.395131087	5.474426077	7.224619811	0.119840374	0.392645221	0.096256605	7.79512969	6.771088111	7.919649479
Zm00001d032529	1.633689808	1.24680661	1.777062753	3.526230118	3.017939016	3.000258643	2.880460425	2.863120404	2.689049952	0.464010433	0.709828783	0.200682646	3.131387962	3.064048771	3.586789819
Zm00001d032530	8.415322542	7.044543641	6.650495615	5.4578828	8.07484391	7.220537392	8.077357234	8.670880803	9.338775846	11.08040455	6.128702529	7.178351369	4.199923576	3.736676845	5.491778134
Zm00001d032531	44.59520217	45.03461063	48.37384068	65.67709699	69.27486758	63.03878497	39.70664175	43.59376105	43.76121329	27.43369518	43.25385528	21.13046321	28.89775106	26.35893287	30.65397251
Zm00001d032532	10.92542584	11.56910904	9.899837363	3.698408944	5.590769787	2.301677778	3.640776793	4.593326475	3.272276598	15.76954059	6.436702082	9.336361576	17.05804468	22.10328152	21.15907019
Zm00001d032533	0.481099141	1.009910247	0.697563333	1.10001096	3.169593489	0.098235379	2.154963342	3.383893653	1.334989504	7.022200753	6.117371303	5.196163004	1.39077725	1.757992575	3.290946208
Zm00001d032534	0	0	0	0	0	0	0	0	0	0.318592535	0	0	0	0	0
Zm00001d032535	0	0	0	0	0	0	0	0	0	1.465465396	0.010550713	6.932674811	0	0	0
Zm00001d032536	11.30730855	16.63467301	10.02192649	14.16738814	12.39548922	16.17089417	44.17709409	39.01485456	24.96476913	609.5096266	210.907284	810.4630042	19.32068248	20.42621117	26.58864993
Zm00001d032537	0.008196183	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032538	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032539	3.744428463	4.249635573	3.530656008	4.685116643	6.456886878	4.836754442	5.507252511	6.085338291	4.999399018	3.822618939	3.679959185	2.822380826	4.508950356	4.564330185	4.64904505
Zm00001d032540	3.523918018	4.52691719	2.647544396	2.316287663	1.882602941	2.209149918	1.896952657	1.721131344	1.547011325	1.036515358	1.077278467	0.699270513	1.521686874	1.330652982	1.386173157
Zm00001d032541	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032542	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032544	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032546	10.83028482	10.78495469	8.810273508	14.75463482	16.99453568	13.06432307	21.34394068	22.12125562	25.41400344	8.737629859	9.629095095	4.550699253	7.246288684	7.59579282	6.445687263
Zm00001d032547	26.28826592	30.97732304	17.0677183	11.91013263	10.62226699	12.22581452	9.704183924	10.41059217	10.92456577	9.73006826	14.38860994	19.62004716	11.81820975	11.05975763	9.866223933
Zm00001d032548	39.92125156	40.84591217	25.85449329	17.28373386	12.83178807	25.62081856	16.52192041	18.10272736	14.93571717	8.092964546	14.28783297	4.373888409	7.474633894	4.927195627	6.02641693
Zm00001d032549	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032551	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032552	20.07544244	23.77516147	21.10294616	9.787600126	5.887052819	10.15204635	13.08665564	10.56498379	10.59527102	0.27883709	0.660723825	0.167184283	16.26725608	15.74856142	17.66590035
Zm00001d032553	0.602372376	0.230905724	1.106670674	1.600494874	1.276844223	2.566916802	2.295235194	1.515806549	1.873380333	0.903011757	0.132106242	0	0.967149697	0.401947153	0.78726267
Zm00001d032554	6.520450195	7.162809122	6.702254258	6.175445753	8.010259885	5.671709191	8.249301047	8.183083987	8.222911215	2.125038323	2.879198695	1.256858785	3.377907244	2.702553339	3.797605461
Zm00001d032555	11.45478046	12.76760799	7.531788371	5.836314964	4.951356287	5.371017679	5.699469245	4.505697538	4.881253251	7.613237992	6.265305009	8.534184035	4.965775854	4.941180628	4.664760272
Zm00001d032556	44.35484157	44.60262048	33.23908695	23.69309322	28.116078	22.06851412	27.46087674	29.54346336	29.54057583	12.19891056	29.83901001	10.35252855	14.4676958	11.67809353	12.89470619
Zm00001d032557	8.365720186	10.08898416	6.593708086	2.324531722	3.141287566	3.29247366	4.517931058	3.177714935	3.111213121	5.021592837	3.18123056	1.882242874	3.492376606	3.459243347	3.147130621
Zm00001d032558	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032560	71.2194932	49.43584522	64.17811254	7.924247839	69.01319161	15.15662822	32.57634636	33.84562204	26.62467062	60.30053137	46.61870296	26.37174974	7.628931056	6.237893001	13.26258965
Zm00001d032561	7.099394903	4.670194652	5.863366454	0.545154274	5.898693859	1.329589321	3.45211471	3.453181128	1.877511271	5.820692322	5.854331081	5.426594341	0.94456316	0.512230968	0.261397112
Zm00001d032562	3.247366587	2.817101781	3.262858812	6.71266531	6.887187416	5.934731859	7.658976944	8.097977673	6.02579422	5.82307487	5.806953511	2.941426683	7.702813104	6.523163721	6.063734551
Zm00001d032563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032566	6.57753002	6.426929364	6.518886476	14.78784961	16.11595633	14.47255107	15.80250861	13.43173026	14.58084045	2.976373509	6.521516555	2.069349714	10.22653865	10.24993114	10.67361203
Zm00001d032567	12.41576613	12.91654683	10.92209346	6.203999157	6.721050083	6.954416037	6.684567289	6.328048955	7.126517024	4.307697646	5.490056175	4.196731664	5.327583638	5.288267926	5.016346945
Zm00001d032568	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032571	34.16060241	36.11139428	31.96791476	25.43716735	25.70775405	29.07180991	26.74729733	26.91186596	27.35326936	30.97473515	29.23281385	31.96714949	22.35440261	22.15452816	18.36600328
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Zm00001d032573	14.81257105	12.85953909	14.97089012	18.98417282	32.26801488	22.98066043	27.99220521	27.49393853	27.12661522	18.59824004	18.67912732	13.28911817	12.0639199	10.79817426	13.31015753
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Zm00001d032588	3.468317965	3.2126526	4.090729098	6.960752854	11.14219131	6.812070059	8.518601476	9.642965772	8.461357599	6.461049121	8.110379642	4.392241043	8.026086443	8.240942009	10.08301804
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Zm00001d032598	7.355907877	7.667236776	6.680455144	12.47086439	9.95751674	13.79207173	15.24096814	13.23998196	14.52158035	10.63754086	12.30420601	13.18453929	9.967828538	10.74573951	10.16308258
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Zm00001d032600	11.43578188	10.85044087	11.19795326	11.50270082	10.53980915	11.60701815	9.959839944	9.663266753	10.4932221	6.187087006	10.11571587	8.0859831	7.947077565	6.534882743	5.564560089
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Zm00001d032603	35.02603729	35.44044819	37.4211853	3.202518744	8.016113364	3.974121171	10.50188959	13.23863886	13.10653713	12.06977456	12.01444044	13.03089513	5.559040018	5.897414456	6.469377146
Zm00001d032604	5.925625452	7.248110063	6.886522729	11.65272548	8.753608311	10.93404282	10.00424164	8.597642906	8.851722072	0.559754413	1.32531459	0.208235122	24.50636437	25.92263059	24.7706711
Zm00001d032605	127.4343858	144.9944822	85.97108831	16.00687751	10.54469639	12.11929073	6.131548456	6.933744754	5.634570115	6.41404962	22.48485547	6.376577901	78.81666193	73.0041584	82.04548832
Zm00001d032606	69.2154121	77.92485644	58.82805673	7.989279958	7.181091739	7.260098881	12.34997722	11.43060818	12.95501371	2.742832265	7.60507452	3.58835383	4.43743712	4.824636586	4.87373078
Zm00001d032608	354.891432	351.9839865	371.9585541	110.5840671	321.195014	123.3993631	210.1925707	319.5606811	313.5001522	569.6465363	723.5304681	521.716467	65.53763582	62.07502283	127.1694753
Zm00001d032609	42.58065581	41.99965053	39.53362067	8.014567944	8.299365231	8.773611714	8.712612296	8.279349038	9.304174183	14.7148237	13.20464837	21.21479872	4.122629149	3.46927609	3.424762242
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Zm00001d032616	0.384331877	0.207457466	0.409413247	0.570621482	5.305285666	1.345311818	2.651780163	3.486659442	1.737955248	1.438726202	1.800146502	0.892038006	0.450559698	0.601883	2.073587126
Zm00001d032617	18.60209469	17.10288677	17.92609002	10.97724421	12.42753684	13.83214845	14.64659208	14.5581297	14.54921894	31.5872295	33.9373514	41.4513387	8.61188025	8.251207284	7.867387356
Zm00001d032618	12.90157476	7.541514406	13.73194689	14.52843674	37.83253605	13.32898492	24.69392734	45.0175019	34.0265216	42.02768368	18.14462847	17.3553353	0.817479757	1.043933902	0.889831023
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Zm00001d032632	1.735089981	2.110786427	1.737551457	5.974942945	5.694586828	6.321374653	4.102797897	3.300173928	3.875313746	0.860466126	0.5742793	0.227014245	2.471617797	2.051835587	3.122200718
Zm00001d032633	2.13638536	2.166506189	2.802189251	4.62135948	3.858191617	4.684757257	3.726667187	3.380531405	3.502941613	1.066567403	1.991590326	0.680366586	3.011759271	2.930271877	3.241371012
Zm00001d032634	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032636	3.185885762	4.289368348	2.958193484	2.085601138	2.20348064	2.138505264	1.797169157	2.148858794	1.911851536	4.713721371	4.00211142	2.501525817	4.808115634	4.000963503	3.245836407
Zm00001d032637	23.72282467	26.05036299	21.18703536	11.32598561	14.66674665	12.22440737	20.85849836	20.00985193	22.74369294	29.10050107	26.96506062	31.24484163	19.93553269	22.93996051	21.2231059
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Zm00001d032652	27.58515247	29.314459	22.80739798	23.76646673	27.24157986	25.00335364	28.00660341	26.99093448	28.67554612	63.56152436	59.48700525	55.04716975	21.7774791	21.23247854	23.26113171
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Zm00001d032688	147.1532904	148.7231366	86.68238571	58.24217324	47.98381199	81.72983592	96.20244728	72.69181096	69.97821579	6.59086705	12.11367476	2.157738031	134.4241597	128.0118853	111.4519563
Zm00001d032689	1.087748636	1.072892281	0.940234018	1.331953938	1.404174282	1.630207097	1.476083625	1.276545814	1.318564192	0.057699412	0.142151213	0.002574698	1.044265169	1.156757321	1.14069487
Zm00001d032691	1.242839447	1.133962214	1.860822772	5.687458244	5.196552685	3.081264824	3.922239852	7.056312772	5.467266726	4.95328774	3.245586532	3.718339136	1.040345187	0.761681429	2.160995065
Zm00001d032692	3.748158951	4.594256527	3.478056565	10.95948075	9.361114609	11.35075327	11.33092073	8.511788569	10.78174789	0.942397804	3.129912937	0.801466241	7.140447694	7.711003814	6.139927731
Zm00001d032693	1.880698846	1.002162258	1.245724132	2.487288578	3.621833548	2.506672837	2.704734298	3.065125829	2.497840444	2.094987276	1.772200743	1.717049038	1.399187089	1.404666629	1.19469479
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Zm00001d032695	123.9122628	123.3381958	134.2273634	199.7252703	208.8615985	193.7247557	254.5910111	294.3318191	289.8381187	14.25380192	35.50338513	14.6289594	235.3938331	262.2433867	246.8155954
Zm00001d032696	0	0	0	0	0	0	0	0	0	0	0	0	0.190636134	0	0
Zm00001d032699	6.4999559	6.57973924	6.324246193	4.075203383	4.408165602	4.487186105	3.89836295	3.32728996	3.673065563	1.189300292	1.538772503	0.790909308	2.899087628	2.640798402	2.572839729
Zm00001d032703	2.177988076	2.237768938	1.733459004	6.102166065	4.933754578	6.218200068	5.891933789	5.455867981	5.017170405	1.851137543	3.109457356	1.250790281	5.961479405	6.249592429	6.296728371
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Zm00001d032708	7.171880977	6.754905201	6.998358523	5.419097039	5.844810994	5.738605418	5.714288812	5.491103162	5.825334463	4.12677067	5.441290848	4.499077615	4.402301738	4.26365983	4.001567525
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Zm00001d032716	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032721	0.517414236	0.58651663	0.307232102	2.258538063	1.946829721	2.789174233	2.445265201	0.339670065	0.432500338	8.682127673	0.108745992	0.133739202	13.39427274	10.69501544	11.74468878
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Zm00001d032725	2.558974554	2.542373519	2.414269677	2.12034164	5.673594921	3.170882708	8.27073289	7.174939126	7.345812497	5.535600995	5.462974182	3.624294277	7.688501923	8.201157444	9.422695656
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Zm00001d032732	6.576401149	8.440197232	6.753306013	4.669639224	4.313711382	5.057673327	8.51467784	7.096162139	6.748905272	1.655098796	2.736102103	2.297180101	6.542708423	5.809523496	7.603217182
Zm00001d032733	0.763874157	0.745344095	0.930583291	1.174835027	1.153714297	2.426552712	0.769106549	0.637095702	1.109630312	0.091609426	0.049496078	0.013378421	0.641944446	0.509713019	0.687664527
Zm00001d032734	4.969634018	5.423400119	4.721648224	3.880413144	3.684084601	3.452885013	2.793733306	2.612644818	2.823180146	6.704170605	5.936460745	8.646289087	4.941985178	4.737375483	4.478080913
Zm00001d032735	11.70592078	12.43564917	10.41581701	7.002313268	8.263000689	8.558859176	8.217978424	6.934847454	8.567542751	4.111539762	7.060510415	3.865082782	5.753898675	5.863689023	6.030511321
Zm00001d032736	18.47787805	19.25582484	16.78594313	36.60277434	28.88530741	35.44285135	28.69521642	32.51741249	29.60269229	11.85400248	13.21785893	7.232142844	77.48137352	77.77422692	74.37214529
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Zm00001d032739	21.83164847	20.8077655	19.00217436	16.61942875	11.04478052	16.44215114	11.74521448	9.794691404	10.13713358	6.565936593	7.282374995	8.139514144	9.866854127	9.010691631	8.927592427
Zm00001d032740	15.24006404	16.82549102	17.4464347	33.47355757	41.72807356	45.09701747	33.90188944	37.56280451	36.50997707	48.16285205	46.45257103	48.30701238	11.99260382	8.837274969	15.00492144
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Zm00001d032745	0.337474532	0.438333248	0.29271626	0.412115189	1.269168587	0.305782561	1.096755327	1.216513684	1.526065542	1.052072551	1.471749818	0.981327301	0.121947812	0.042390268	0.089413182
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Zm00001d032750	0.26806341	0.073000402	0.072032431	0.460815402	0.22911105	0.292910101	0.118520253	0.314487686	0.276986281	0.329735676	0.219266958	0	0.36483028	0.889523747	0.519321859
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Zm00001d032754	13.41912399	15.01066932	12.51155558	12.14092147	7.602662751	10.41029462	8.556513671	6.611721369	7.568111076	3.951149515	5.541901145	3.36400563	12.18882777	11.87142324	12.20876431
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Zm00001d032761	6.557630452	5.859357438	6.218684113	7.27758381	7.958154813	7.079229988	7.046252376	6.938687462	7.630264421	4.089485069	4.817814085	2.653028762	6.529933642	6.4698343	7.834232885
Zm00001d032763	11.7595392	10.70515095	11.50053888	13.63322523	16.99979101	12.641993	10.99641444	11.1727162	11.00236565	1.265200602	3.621885533	0.702486093	6.000917283	6.118267414	7.189313303
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Zm00001d032775	6.068877752	6.337477586	5.896104297	6.625404022	9.245970325	6.294553664	7.055486324	8.729218331	7.594366792	2.662532652	4.33802301	2.002060262	5.649814941	4.866798209	5.081287606
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Zm00001d032781	25.52055681	24.0335443	35.61661024	4.61614056	9.85412198	4.275354779	16.38072629	23.91804621	30.33344147	262.9087414	240.519753	440.825341	1.616605963	1.54080225	2.329781486
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Zm00001d032819	4.457079397	4.336229572	4.127822433	10.03055971	10.9551352	9.240900488	10.25761474	10.66232107	12.23569882	2.147526142	3.161542564	1.060264324	3.141238271	2.873661138	4.55841602
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Zm00001d032826	0	0	0	0	0	0	0	0.068047043	0	0	0	0.031257735	0	0	0.032622935
Zm00001d032827	0	0	0	0	0	0	0	0.015179002	0	0	0	0	0	0	0.087324929
Zm00001d032828	0.698601024	0.80656636	0.500434326	2.759005489	8.87268722	3.429470987	34.86913487	47.04897049	37.31071604	13.18102357	3.254651511	0.585783039	20.61341142	19.05004548	25.25115895
Zm00001d032830	10.29104283	13.26957159	3.466252839	4.131851311	4.138796787	3.736294217	3.915216524	3.427769498	3.300507331	2.664438417	3.307018048	2.407979042	5.673813555	5.711394125	5.30898837
Zm00001d032831	11.35340978	12.88948738	5.919874376	7.888153309	4.231703319	7.748880097	6.116801791	4.014518908	4.118206766	4.05000773	3.071470126	1.903926142	4.945651857	5.20019129	4.59867377
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Zm00001d032837	1.743551743	1.542837705	1.666839414	1.739585678	2.450544223	2.38803846	2.256746096	2.393417895	1.863578474	0.924863578	1.037323441	0.683428191	0.900503255	0.872356387	1.033735256
Zm00001d032838	10.86187047	7.436324282	8.121904005	5.433570623	8.116133072	6.828492332	9.795559359	9.600802197	6.614473636	34.18742973	16.50101324	28.27504275	4.320579433	2.931500915	4.880695815
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Zm00001d032849	21.25793421	20.61116408	29.87035429	49.80693356	38.09700692	56.68865532	8.537052154	6.485814053	8.916749786	3.400575906	3.817261913	2.252326212	1.952645084	1.729895912	2.227900258
Zm00001d032850	0.008407893	0.116487495	0.219436436	0.199233227	0.631482048	0.164813108	0.658249739	0.84145442	0.176277485	18.86648136	0.11662885	0.400496936	0.997322431	0.119821357	0.408268208
Zm00001d032852	3.199996981	3.514214982	2.698534804	3.757333447	2.685806255	3.022624799	3.00658039	3.023939272	3.287062811	3.466274362	2.840795633	2.760082186	3.687202579	3.365131796	3.570977593
Zm00001d032854	1.726266112	1.424501123	2.40433723	0.828999552	3.385768352	0.91160008	5.077633224	6.10090136	5.346883054	0.957795344	4.216135242	0.835248412	1.099097551	0.53291542	0.619385959
Zm00001d032855	3.886264517	3.054232106	3.860567866	3.33255214	3.754170401	3.255297975	2.673531226	2.895744169	3.145109445	6.034668944	4.888068127	4.998789951	2.294969348	2.268354828	2.189566441
Zm00001d032857	1.418299134	0.926939189	1.150881802	0.790203952	6.088105455	2.161563577	3.377211519	4.619157017	4.093386117	18.02809372	9.342101305	16.42395051	0.709023696	0.699922338	0.490233743
Zm00001d032858	1.39561519	0.371019835	2.388653692	5.119266833	162.8182818	28.80661405	78.94876148	103.0347549	83.49214764	3.816266119	7.916575046	2.781728615	0	0	0
Zm00001d032859	13.70487678	14.89999437	13.74456141	23.74054975	35.61262828	26.80235843	34.66575356	34.96019602	38.72239429	33.7447615	44.40711427	50.87425004	24.03275533	25.05190546	23.69811018
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Zm00001d032861	0	0	0	0.015528388	0	0	0	0	0	0	0	0	0	0.027298519	0
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Zm00001d032864	0.04572319	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032865	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d032866	39.25491599	36.30875721	34.87216061	27.13281089	62.15267295	33.99621144	40.86967745	53.69457927	36.15421515	8.622288173	21.442664	4.61698708	52.02333862	48.47650271	58.96849454
Zm00001d032867	2.90126885	3.565312637	3.144740767	4.007130473	2.890372421	3.997712297	2.419624105	2.085243198	2.696881907	1.650743969	1.99142244	1.37882353	3.610742932	3.375042893	3.301646829
Zm00001d032868	0.066333013	0.008354667	0.082438863	0.082727656	0.576862939	0.073140315	0.488313793	0.527884595	1.218924321	1.564379145	1.93227012	1.138950868	0	0	0.038345007
Zm00001d032869	9.740421049	8.391310776	8.288323785	4.021580032	8.1905107	4.530101528	10.82894649	11.43946405	14.82271105	57.58458447	52.85379536	47.49222082	2.44538222	1.635995429	2.210656951
Zm00001d032870	5.07958764	5.114875376	5.359411534	2.928306875	4.305198368	2.973842039	6.120982517	7.400831977	7.031293963	23.92663988	20.51769079	19.24734717	0.72533037	0.493037395	1.452880645
Zm00001d032873	244.0608532	196.2621577	219.02798	105.8123414	318.3399178	139.6424343	221.02215	277.9388892	255.9556887	397.8816429	376.6825065	388.8055241	46.88525839	40.30137057	44.27713955
Zm00001d032874	0.010156935	0.006396348	0	0.025334576	0.006691626	0	0.005934189	0	0	0	0	0	0	0	0
Zm00001d032875	50.74695532	53.80314591	46.16820866	29.23765594	20.81023114	25.26531636	19.74772738	15.63245707	17.56520982	6.079563114	9.840120311	4.471661579	17.4059882	17.24787626	16.13616345
Zm00001d032876	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032889	0.094574255	0	0	0.052421737	0.180000102	0	0.012278891	0	0	0.01449261	0.013251241	0	0	0.023039026	0.048595886
Zm00001d032893	0	0.01818265	0.017941552	0	0.019022024	0	0	0.069627862	0.106824222	0.477842927	0.018204714	0.591701988	0	0	0
Zm00001d032894	22.33156696	22.50573579	22.4451727	19.40996114	19.1773348	17.69236993	10.34323678	9.419654986	11.55499559	0.707883069	2.83034366	0.366201817	6.527316325	5.774457459	6.733688311
Zm00001d032895	0.043143933	0.027169972	0.026809704	0.033629526	0	0.046250069	0	0.013005441	0.013302109	0.617339446	0	0.011948223	0.006034931	0	0.006235034
Zm00001d032896	34.72163989	41.11806984	46.48887421	114.5853586	56.32043033	100.2122773	31.14130865	29.07609165	25.33126202	9.677326767	11.81865415	6.167226398	232.2799083	236.1247197	235.4113841
Zm00001d032897	118.3280393	124.490204	91.78689642	76.09003077	88.30753531	83.89922851	163.8006661	162.9597434	139.943572	140.7662416	304.5217644	197.3304333	53.47946576	49.2478624	46.51893956
Zm00001d032898	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d032900	3.897587673	3.538485816	3.755892547	7.636798234	8.335644807	8.229132214	5.484848142	4.771171122	4.806806556	0.184183035	0.679864414	0.032874904	2.103273843	1.897760617	2.407469928
Zm00001d032901	0.09258172	0	0	0.030790375	0.16265333	0	0.007212116	0.11163248	0.022835787	0.280908	0.210147333	0.348696613	0.055254356	0	0.014271614
Zm00001d032902	3.764207988	3.74241121	2.43953586	7.305844191	8.621496555	8.185949715	7.123913774	10.91534345	8.534639793	4.660638924	10.24102316	5.440377063	8.105819431	7.780354469	8.098698752
Zm00001d032903	0	0	0	0	0	0	0.019722021	0	0	0	0	0	0.075548394	0	0
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Zm00001d032905	5.950770732	6.708548292	7.134570883	9.973147151	9.751976106	9.670147221	10.78326712	10.72821577	11.03326775	15.48553213	15.65413088	14.13389765	10.36218335	9.838791752	13.6500204
Zm00001d032906	0.066892888	0	0.083134678	0.125138862	0.297476527	0.092197058	0.400592242	0.43353458	0.65997986	0.484345682	1.402386538	1.194877097	0	0	0.019334327
Zm00001d032907	0	0	0	0	0	0	0.036978789	0	0	0	0.159628376	0	0	0	0
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Zm00001d032919	1.193727882	1.898586208	2.209109337	6.433206229	5.373157911	7.162949435	5.467487215	6.209227641	4.577782152	13.06262621	1.109768211	0.66600491	5.011761994	2.75093905	3.415022493
Zm00001d032921	1.976114721	1.346210359	1.722234044	6.355063321	7.524879076	5.039966124	8.030986211	9.381120033	9.280896476	2.176882233	5.626464895	1.837976119	2.684200092	2.670390721	2.543298851
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Zm00001d032923	14.54920307	16.42910872	16.74877085	19.70397678	16.50937735	25.50255393	20.31093632	16.21843475	15.80964687	6.430106471	5.781163067	9.308926225	10.03286733	10.04657163	9.710498905
Zm00001d032925	0.018625659	0.023459087	0.069444073	0.023229114	0.098168154	0.251008792	0.413517578	0.808498997	0.620206295	3.031166876	0.070462662	0	0.333483373	1.163831801	1.033622588
Zm00001d032926	7.599688173	9.36515607	11.76471847	29.84099501	16.94626845	27.12781416	13.85364705	15.55691707	11.38363143	1.343746527	2.017568548	0.431722547	110.567313	102.7720415	118.6206631
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Zm00001d032932	5.93487011	3.167369011	5.966616135	7.230640607	59.41560238	12.69348944	29.20349791	35.55998517	30.84498789	2.535004671	8.510381311	1.083911611	2.855047076	1.974860655	3.531198148
Zm00001d032933	0.090632744	0.072096175	0.063235728	0.216151258	0.155039005	0.210386866	3.658345423	5.017406946	2.18059902	0.01535057	0.01203061	0.014091065	6.25073334	7.995446533	9.23752101
Zm00001d032934	2.960685441	2.516892881	2.912682815	3.438274424	3.498343113	4.064178647	3.631546784	4.047721309	3.455863098	0.093688872	0.342655694	0.07525154	2.204511516	2.370596571	2.958272073
Zm00001d032935	0.535915247	0.856191864	0.683917236	0.058314183	0.232222826	0.145414723	0.260573505	0.034694862	0.155252514	0	0.06349858	0	0.060373124	0.03548592	0.01247499
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Zm00001d032939	17.24785506	18.20060563	18.92788901	27.66907694	22.81802028	24.89152554	18.66330033	18.46046403	15.85314275	2.407476593	6.361449445	2.170240028	26.98303366	28.49907779	27.43953161
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Zm00001d032945	2.164822623	2.620508638	3.297630729	5.33671368	7.092331605	4.953532609	3.946956017	4.844767098	4.11381855	0.789976718	0.594844372	0.261270752	1.385635744	1.385109676	2.19119391
Zm00001d032946	8.663278974	5.374590075	7.084440535	7.370332566	27.01017563	11.698746	9.38921512	17.49404122	9.90971858	26.62780647	6.761925683	3.460551552	5.42386746	4.148313751	4.114351552
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Zm00001d032979	17.65426435	18.40788476	18.43276621	26.97935269	29.86332127	30.46886583	31.00807859	28.08288181	29.66048814	13.83157312	20.29414844	13.45599687	21.70343265	20.24163545	22.0078232
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Zm00001d032991	13.55024955	12.56688992	10.92319232	10.27803057	13.37207659	11.83163577	12.46552868	12.76875668	11.81370606	5.211839767	9.683401292	4.761687142	10.10612162	10.1810969	10.2602018
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Zm00001d033205	0	0	0	0.098271873	0	0.096536785	0.061382659	0.158351549	0.016196372	1.521431682	0.298095641	1.60026991	0.41148837	0.374312252	0.926181111
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Zm00001d033209	0.79910846	1.142490881	0.483146439	0.457903457	0.654531905	0.42335879	0.126183546	0.338542103	0.026635739	0.029786549	0.299586904	0	0	0.307787563	0.299636248
Zm00001d033210	790.2857599	768.8664481	794.9425835	379.0928338	399.4997496	359.1537622	551.9456872	613.4683606	508.7212264	475.6919896	785.1526897	639.8844361	203.8129703	192.106842	219.33866
Zm00001d033211	1.048038928	1.689947711	1.086804257	1.431947862	1.451311667	1.275812799	1.435239257	0.780755095	0.996148038	1.509863877	1.372118128	1.286680087	1.680748873	1.566012575	1.582124743
Zm00001d033212	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033214	10.15272744	8.564721503	11.91112275	14.64187033	16.45286358	14.1801578	13.34466449	13.74175838	13.22242878	2.450808339	4.616220239	0.839895876	8.842402669	7.285652893	7.53309934
Zm00001d033215	0.102024134	0.137678329	0.108682195	0.627111792	0.710567894	0.571398964	0.366160975	0.632663395	0.710007152	0.190960994	0.156224786	0.056508853	1.060134044	0.958649469	1.305917308
Zm00001d033216	2.062026232	2.934756527	2.716453807	1.954468946	6.385001867	4.825164763	4.602102349	3.456004638	3.458548307	0.625652309	1.56016874	0.137053145	1.176811519	0.926790882	1.120472349
Zm00001d033217	14.05753968	13.53441172	11.70502045	10.04960265	10.02734693	10.47431797	10.65978109	9.154110188	10.11893787	6.998669354	7.707395017	8.600830291	7.923260574	7.549112337	7.460477493
Zm00001d033218	2.600066155	3.38001998	2.567475963	7.940958753	7.135488646	7.934125926	6.898762919	6.841024433	6.628644077	2.43018524	4.131182364	2.605392975	5.926771494	5.553474127	6.465747937
Zm00001d033219	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033221	4.458723773	4.184305989	4.101659653	8.381978002	8.006158369	11.4070828	6.295439341	5.731984299	6.482704605	0.753592545	1.488333633	0.617396481	1.944419992	2.395985084	2.665888367
Zm00001d033222	1.687248704	1.546386812	1.441630888	0.507277782	0.535949445	0.599831178	0.924164121	1.789215458	2.526741077	13.11011872	23.01498175	23.01277102	1.770080136	1.88265023	1.785229462
Zm00001d033223	4.072282444	5.190114984	3.500555854	2.799371864	1.941919264	2.173823532	2.390560706	1.958252743	2.164352172	0.34099261	0.397372765	0.069814483	3.027159843	3.108981815	2.82486854
Zm00001d033224	0.104973341	0.062218499	0	0.046206422	0.089499738	0.287473813	0.072153735	0.059564214	0.114230508	0.017032417	0	0	0.076009055	0.087998883	0.02141709
Zm00001d033225	0.605278952	0.650539588	0.882631156	9.672498973	11.17624735	14.99907524	16.60666344	17.90512931	15.77554336	1.691819713	2.116819264	0.393360325	14.48575785	17.66753999	19.1647804
Zm00001d033226	5.711795189	5.909900621	4.132471593	2.629771965	2.289896991	2.569146539	2.030699612	1.81607755	2.028966157	6.870848101	12.33088619	10.22886855	1.516890102	1.473287167	1.593975963
Zm00001d033227	5.644896587	6.924617927	6.028940236	1.136677992	0.658571092	1.116608809	0.927571178	1.382562264	0.87021538	10.13703521	14.19971642	14.03704205	1.151503744	0.290068775	0.237936956
Zm00001d033228	55.28901346	56.50224712	64.4301244	24.3222656	36.83205229	28.05284875	38.48821181	46.37098994	47.35818347	127.0643887	59.06457791	57.14711359	14.33794313	14.12252672	15.03390032
Zm00001d033229	0.445317066	0.448702794	0.571889405	0.185126709	1.662516599	0.272787168	2.11610218	3.937640792	4.082382549	0.696054404	3.107293725	0.67417945	0.066443213	0.032544814	0.171615766
Zm00001d033230	0	0	0	0	0	0	0	0	0	0	0.010410546	0	0	0	0
Zm00001d033231	0.173089512	0.153676982	0.021158966	0.084932353	0.314064743	0.079956422	0.387931906	0.465312969	0.269458815	0.180017587	0.261210069	0.066009096	0.196868012	0.068433273	0.219798549
Zm00001d033232	0.19994492	0.267570827	0.326145928	0.374043946	0.806836344	0.551159741	0.876133653	0.85887622	0.354469588	2.878213781	2.726230871	2.076467895	2.013703074	1.424713178	2.629486103
Zm00001d033233	1.710257292	2.385842993	1.795923787	1.889963408	1.747187174	1.51179815	2.561286209	2.460260244	2.536405676	8.039078253	9.015780329	11.85289963	1.150722269	1.091681375	1.226420889
Zm00001d033234	0	0	0	0.024082161	0.11449485	0.011828483	0.135379974	0.244471978	0.321491116	1.038616573	0.657452463	0.556149273	0.021608121	0.296350867	0.189759043
Zm00001d033235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033238	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033241	11.98775719	5.751436266	11.62059319	4.925215827	17.4315716	6.393716936	14.11424793	18.86951666	20.58892085	16.16547647	16.93027235	11.997389	1.177415322	0.861226942	1.784134764
Zm00001d033244	7.988923781	7.974416891	7.985912429	4.431307501	3.101449225	4.93090928	1.763609402	1.427185282	1.999872746	0.068146456	0.113289729	0.017415904	0.63084212	0.728785685	0.778995173
Zm00001d033246	1.134294517	1.66496588	0.805545466	4.238610543	2.629595996	3.583875435	3.263729944	3.033622512	2.908238901	1.240917292	1.338966401	0.821934129	5.86937498	6.226616682	5.304757887
Zm00001d033247	2.31746278	1.527306775	2.003824988	6.53104405	5.562754583	5.089667288	3.914989607	3.628300089	3.971393984	0.514111529	1.240318772	0.194031054	3.533140759	2.698033479	2.435258167
Zm00001d033248	3.256513727	4.05200839	1.89993028	2.296631426	2.236242603	2.226608351	1.840006815	2.167680963	2.508429593	1.33018789	2.087758357	1.485122437	1.940769469	1.692647898	1.762382181
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Zm00001d033256	29.88786275	25.7638188	21.09799902	9.293110614	10.25112845	13.56780298	11.45343039	8.378330514	8.87324063	0.424659583	1.190741397	0.147805437	24.62469268	25.45070399	22.23730617
Zm00001d033257	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033258	0	0	0	0	0.05003849	0	0.088749094	0.061053319	0.015611503	0.017458227	0	0	0	0	0.029270022
Zm00001d033259	5.912696119	6.360245124	5.343382168	13.71874262	13.05065332	14.39579634	8.986941752	9.345983151	9.133500272	0.682998047	3.245484935	0.664955983	15.9450856	16.87052943	19.30182868
Zm00001d033260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033264	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033267	14.59965883	14.30897276	12.26074881	24.36874981	19.20917702	27.75024692	46.69886239	39.87360953	34.16661145	1.720300594	3.780436868	1.475967876	23.22143787	22.28998338	22.00031384
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Zm00001d033269	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033272	2.013852163	1.876735152	2.030198353	2.941124477	3.378385932	3.595378784	5.908118493	8.521936817	6.81673155	14.35557411	12.11555914	13.17581605	2.582767758	2.126375982	3.069358187
Zm00001d033273	3.965504695	5.328466523	3.317592533	5.368071262	7.190017528	5.476285056	22.38972569	20.30692926	19.48507274	55.96544383	45.88784854	61.56046711	10.49019867	11.29364637	12.32793745
Zm00001d033274	0.117833852	0.104204291	0.205645128	0.550308069	0.46579016	0.595879632	0.096675155	0.175333758	0.163873541	0.093358135	0.06639229	0.116644718	0.190775973	0.20337972	0.330435096
Zm00001d033275	53.56067102	55.30204278	53.31887487	47.73828485	54.22674194	54.43333434	50.99837121	48.13994413	52.73689004	58.19999828	48.78444172	56.10666502	32.94127174	32.71791905	32.44431067
Zm00001d033276	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033280	1.754944449	1.628206856	1.687396806	0.369285243	0.685154599	0.380461005	0.675111968	0.8446838	0.650190638	0.01992064	0.009107166	0.048001181	0.153551212	0.023751009	0.150292983
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Zm00001d033284	39.26332621	39.65406247	57.19948449	0.927415098	1.733551028	0.714816518	1.256598053	2.179526865	1.128731247	0.220894056	1.182986523	0.202769841	1.715485913	0.765020995	1.494608171
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Zm00001d033295	16.31758738	16.42480339	14.97219381	20.48165062	18.6684479	24.71989313	24.0683078	19.35275029	20.60718366	19.17110998	24.32375024	20.18191362	21.10365982	20.88319502	17.13124704
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Zm00001d033301	44.2774521	50.73703095	46.37681528	71.36022689	84.80646887	62.55059864	80.30089157	93.59504434	80.33330088	20.23988542	51.00006684	10.03725524	47.91332107	42.85899318	66.70633207
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Zm00001d033304	0.149376903	0.204500828	0.209860757	0.453591218	0.222498938	0.389884786	1.221828384	0.767444575	0.648785873	0.080614712	0.065519675	0.05755581	0.319779662	0.334624074	0.533117652
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Zm00001d033312	6.950953579	6.1593165	8.581329292	15.28569786	16.45360106	13.88538851	7.169808709	7.695190589	7.093136333	0.190881855	0.814481791	0.136282317	4.13009217	3.809939701	5.19156032
Zm00001d033313	0	0	0	0.023087569	0.048784987	0.056699838	0	0.044642915	0	0	0	0	0.14500995	0.060881056	0.010701295
Zm00001d033314	0.054778842	0.601234775	0.048628076	0.078077481	0.670235067	0.230096835	0.329189542	0.245331598	0.337787524	0.237439886	0.236838437	0.407433033	0.227683053	0.454667999	0.470464927
Zm00001d033315	0	0.007659684	0	0.030338381	0.008013281	0.022352045	0.028424977	0	0.007500188	0	0	0	0.061248642	0.040000587	0.056248442
Zm00001d033316	308.8427123	271.4190156	321.6369512	425.6462566	332.6698445	498.0334965	244.1673334	180.8555502	271.9886841	286.4627137	286.8232354	234.068604	14.07703763	17.24072857	17.86424341
Zm00001d033317	66.88580806	62.74876262	87.57766265	121.0288947	82.50511086	105.5156997	51.48869071	54.03637893	57.00520589	17.99196166	30.85028399	10.13667954	61.75432895	62.27960239	76.2259701
Zm00001d033318	0.738745062	0.807139205	0.9512994	5.705590704	3.776342278	3.423976231	1.820049782	1.438091858	1.833131927	0.147303793	0.258149014	0.019719235	1.125479246	0.800081191	1.502375366
Zm00001d033319	0	0.014265924	0	0	0.149244874	0	0.052940636	0	0.125719807	0.156212804	0.099982645	0	0	0.012416642	0
Zm00001d033320	2.385697999	0.895045455	1.219625849	2.194576322	7.84762058	2.363120128	5.555605424	7.242525569	7.741605113	32.45933875	6.528958616	13.95418977	0.757353948	0.741925084	0.802027593
Zm00001d033321	29.96332254	31.93862887	33.62898948	18.85791482	17.29499352	15.91691782	19.8497974	17.99998038	18.24566902	10.78475844	18.99352843	14.83627104	19.50624946	17.0918524	16.77666985
Zm00001d033322	5.192255352	5.613480771	4.148325151	2.88688564	2.864691839	3.055267321	2.689869645	3.192020597	2.957277186	25.98940483	13.65158594	33.36295348	4.042881481	3.497874866	3.881221392
Zm00001d033323	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033324	5.693819769	6.068936393	4.523659523	12.61874697	10.01467639	12.9055912	9.270975104	6.358640319	7.652654747	1.111571696	1.573718225	0.801619718	23.37695985	27.02864828	23.16014871
Zm00001d033325	0	0.072884528	0	0.018042508	0.076249127	0.354478987	0.084522947	0	0.07136687	0	0	0	0.113322591	0.095154836	0
Zm00001d033326	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033328	4.600832923	4.860659717	5.473224189	15.29031078	24.81121162	17.20746172	19.8017422	19.45997615	19.08635498	1.050008025	2.747784465	0.741587132	9.151220827	9.144662983	10.54732538
Zm00001d033330	0	0	0	0	0	0	0	0	0	0	0	0	0.063348032	0.041371668	0
Zm00001d033332	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033333	0.093228093	0.17193808	0.091036117	0.294827584	0.250070582	0.183563309	0.175077365	0.092338313	0.098550938	0.004592033	0.058781808	0.003688352	0.115502933	0.131399883	0.161676597
Zm00001d033334	5.791713023	6.535333747	5.661237322	8.650402647	5.432108167	7.875306514	7.700406295	5.267064127	7.318346118	0.758352887	1.608537794	0.250447973	5.669021598	5.057844776	5.163188916
Zm00001d033335	2.00382152	2.320286699	3.193278146	7.154622115	7.686763753	8.196383811	5.834780871	5.37788813	5.341126906	3.454500296	4.075618104	4.851211527	6.962105971	5.952238689	9.266764523
Zm00001d033337	4.05502701	3.919087537	4.916180741	7.018229735	7.022350773	7.840594543	6.988185332	6.944999862	5.824262342	2.982693749	3.478584459	1.051183242	6.297223866	6.562054911	6.55705198
Zm00001d033338	0.081215251	0.231859394	0.208598076	3.099417021	1.476779509	3.880492	1.404520318	0.744246008	0.934835334	0.179214753	0.211657743	0.071973256	20.32737996	33.17295436	33.17655603
Zm00001d033339	4.389450302	6.80434326	5.151657861	7.857592743	7.923067656	5.703330333	4.768106877	3.161747043	3.668005843	8.808194008	8.860003972	4.965889884	7.532706837	7.576135052	9.02833301
Zm00001d033340	0	0	0.011840174	0	0	0	0	0	0	7.279168334	0	0.01055357	0	0.020887647	0.022029006
Zm00001d033341	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033344	15.99722963	25.53735757	14.26074823	45.19194339	13.01460921	43.90927472	23.54527631	10.10377112	14.86289384	0.566105569	0.736786206	0.147470222	15.11233532	14.56529183	13.68098421
Zm00001d033345	6.296302523	6.106916589	5.576961104	4.643902444	5.606804283	5.273226199	5.246548941	5.183654985	5.158691143	2.91115446	3.94388748	2.115295519	3.785654722	3.858458561	3.961894758
Zm00001d033346	4.139954132	4.20295218	3.991701087	7.218035307	8.381733304	6.170732892	6.433801608	5.545094382	4.951382802	1.768993833	2.222377661	0.554485035	4.305999127	2.457803692	3.701284748
Zm00001d033347	16.79676908	20.99532316	12.33527103	45.22907195	19.95252033	27.80804137	36.11298219	12.13075115	30.248717	0.537457469	2.086033643	0.229059736	24.72331076	21.58669661	18.94122912
Zm00001d033348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033351	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033353	0	0	0	0	0	0.05329875	0	0.052456313	0	0.119999271	0	0	0	0	0
Zm00001d033355	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033356	0	0	0	0	0	0	0	0	0	0.010719094	0	0	0	0	0
Zm00001d033357	0	0	0	0	0	0	0.119037533	0	0	0	0	0	0.022799627	0	0
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Zm00001d033361	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033362	0.033528471	0	0.031251962	0.135899576	0.143580706	0.071884687	0.284040632	0.171817741	0.248099419	0.312128699	0.084560954	0.018570659	0.206356894	0.082698946	0.193817438
Zm00001d033363	3.282492946	3.848428735	3.211514897	6.489081259	5.866581564	6.8237205	8.732094781	10.46327576	9.345368556	5.731114618	11.55929617	4.758002093	6.740740309	6.756540236	8.982868928
Zm00001d033364	9.399422795	9.094079743	2.234435791	3.52035333	3.619828047	3.262160007	4.516820021	4.038720432	3.862553506	2.387855697	4.690857419	4.056955131	3.102362402	2.944556645	3.082590649
Zm00001d033365	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.010190723
Zm00001d033366	40.13956689	43.62386126	40.86900532	38.73270025	25.34737674	28.47893339	26.45391729	29.1253907	28.29066455	24.51338072	29.98882795	25.21562476	48.27030034	51.06834073	49.83679732
Zm00001d033367	0.108044525	0.090721653	0.035807481	0.080849067	0.436584505	0.352984871	1.212000274	1.719657773	1.288072357	2.582861025	4.3962563	5.210366308	0.201508822	0.292157433	0.416380718
Zm00001d033368	11.20120343	12.5656705	11.27724158	9.213619288	11.31835911	9.649310642	10.3135732	10.33375396	10.82146097	3.653628644	6.667233942	3.153204391	5.944650919	5.183815145	5.619161154
Zm00001d033369	0	0.13333273	0	0	0.019926832	0.092639005	0	0	0	0	0.133494527	0	0.118462221	0.116048901	0.034968611
Zm00001d033370	13.47197313	12.93412122	15.22695629	10.41921153	10.94407411	11.66425519	9.438385712	8.461950995	9.314289845	8.458892813	10.14902799	7.273390426	9.800208546	9.382121392	9.091291833
Zm00001d033371	28.28344676	29.0978792	27.5022701	41.35745322	38.74974317	39.89844688	43.99399321	41.96739482	40.17689403	20.82390834	29.85606295	21.08710097	45.83513282	44.39153782	48.85546499
Zm00001d033374	0.302963633	0.429281793	0.8001137	3.920122162	6.137685121	2.551806835	6.593492258	5.570903987	5.604572741	1.828035989	1.910234303	0.545365215	4.449716685	4.193007082	5.297792965
Zm00001d033375	8.084136857	7.482441219	8.032316485	7.02385836	7.358713128	6.800182312	6.804046196	6.925834633	7.056194618	4.643804152	5.389316066	3.450451206	3.86685489	3.590339018	3.779709975
Zm00001d033377	3.389826422	1.953497149	3.517362581	4.606537127	6.109962966	6.601704713	5.156789471	5.45623875	4.496112799	1.940619793	1.45177807	1.363879162	2.039806633	1.051711347	1.645283362
Zm00001d033378	47.40845198	52.78944673	38.46765563	40.08314204	32.79246547	44.15899062	65.3300444	53.63218312	50.63241011	30.3923657	27.50837268	44.20009871	45.01397994	44.75011635	46.03972653
Zm00001d033379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033382	0	0	0	0	0	0	0.089120429	0.02299079	0	0	0	0	0	0	0.154310578
Zm00001d033383	61.40379203	64.03578487	71.44015785	204.688899	111.3058746	217.4576415	78.29441363	54.32391528	70.08923817	8.249365541	12.92602373	5.82266405	270.2804915	287.1176706	246.6265594
Zm00001d033384	0	0.031886981	0	0	0	0	0	0	0	0	0	0	0.028330648	0	0
Zm00001d033385	0.983914562	0.684845386	0.659674849	0.742715734	1.211158901	0.840628791	0.937916563	1.170766777	0.670585005	1.85692054	0.963212131	1.520173756	0.579490521	0.439955954	0.793284128
Zm00001d033386	106.9039201	108.5813819	105.0331076	56.563262	56.38103085	46.96040944	65.46686426	58.63497359	62.38113212	57.40809289	83.81111655	58.65439514	36.53549759	33.54207975	30.5624649
Zm00001d033388	10.39811527	10.44663466	10.33727461	11.00262679	11.73786176	10.99521117	10.38181623	11.01946052	12.22091301	7.356425573	8.970055398	7.585182	6.879096167	7.107625328	6.844965524
Zm00001d033389	17.84536417	1.929296326	14.08748551	0.859672431	90.17019961	16.04538709	65.37601339	82.65285502	57.80716455	30.84384628	40.32293256	14.76258161	0.81420853	1.007521795	2.47934307
Zm00001d033390	0	0	0	0	0.033358993	0	0	0	0	0	0	0.112180537	0	0.166520963	0.058540045
Zm00001d033391	0	0.048778951	0	0.060375956	0.012757689	0.023723983	0.05656812	0.105070514	0.167171333	0	0	0	0.368378677	0.626222603	1.522372834
Zm00001d033392	0	0	0.102973635	0.155001544	0.327524661	0.253774729	0.484085968	0.549479874	0.255460954	0	0.365694097	0.275352228	0.695388625	0.181659233	0.143689201
Zm00001d033393	53.93091175	57.04070263	66.20472275	22.02448723	16.45845679	19.17007934	14.7352528	12.3962158	13.06378153	8.140089398	18.53170685	12.93809839	26.38403368	24.29597227	24.3249584
Zm00001d033394	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033396	0.725568281	0.509835416	0.484091138	3.486235854	2.546092543	2.732260661	3.667965355	2.86404873	3.362665368	0.495072412	1.011276973	0.414566622	2.40161591	1.774983229	2.06623465
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Zm00001d033402	31.52880049	33.32892104	32.67580326	60.70631109	37.28970034	56.00077061	42.4010079	39.24590152	29.94868356	36.11189932	37.84978178	37.27055744	67.1753269	59.79513778	69.20623928
Zm00001d033403	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033405	0.162619271	0.218945062	0.181196429	0.54549354	1.182205502	0.906843906	0.976312841	1.142683742	1.466123739	2.072645328	3.691226132	1.602644835	0.48317815	0.516365251	0.959499666
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Zm00001d033415	2.461471571	2.617610598	2.308468328	2.778246209	3.132100436	3.039509965	2.307054837	2.560758939	2.36286213	0.725532411	1.326773426	0.446057528	2.769001165	3.161129546	2.530431671
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Zm00001d033420	15.2979377	14.37093759	16.2163923	16.1149285	18.42429863	14.98234605	8.452508664	9.501133014	8.892628162	0.779653493	3.113359511	0.600662876	2.194728655	2.010898722	4.414956789
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Zm00001d033422	9.454236393	10.26616474	9.213834943	10.95085538	12.72620696	11.41069907	11.60361291	10.79647264	11.80851965	4.581334718	8.247799119	2.729438346	5.769794881	5.481482071	5.121478826
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Zm00001d033468	27.77795652	24.99591053	29.74813422	44.40027175	52.27912116	41.06300313	46.90677379	59.43009287	56.43158641	34.85687021	66.60589319	31.16742876	47.89716598	45.96660585	56.83978606
Zm00001d033469	32.6238496	34.78003816	34.61891772	64.36156844	41.43584613	47.28949228	34.38292721	34.97020921	35.69347826	1.789757342	3.082624792	1.069801149	96.85704342	99.97874526	106.1396916
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Zm00001d033473	15.07519895	20.89352042	18.30238237	54.92563832	26.75182306	42.63526352	16.80092101	18.3573502	12.80802708	0.823957122	1.99645919	1.047862628	93.89721682	95.79382205	103.0083076
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Zm00001d033477	2.603092507	2.503020751	2.181601417	6.363269019	6.222393778	7.000441597	6.331062903	6.764436357	6.06067852	4.268406366	6.413895217	3.304387802	6.394158405	5.667752121	6.028306212
Zm00001d033478	0.029882479	0.112911277	0.018569016	0	0.019687275	0	0.139670706	0.072062934	0.036853384	1.11274734	1.431945036	1.539264092	0.133757812	0.147412	0.276385785
Zm00001d033479	34.2042749	32.72263976	32.22364609	53.30627826	65.70571351	49.28480261	64.14417288	82.29566391	68.02308587	35.39806087	45.97297221	9.748101849	30.01094816	33.87840288	34.39732282
Zm00001d033480	1.668880223	1.002097599	1.519390965	3.690774887	16.40935742	6.110045364	19.17774074	23.76724693	15.44242433	3.097875082	5.108334608	1.434899738	4.744830545	5.562911103	8.918112558
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Zm00001d033483	1444.774196	1304.322749	1401.924867	795.4495099	908.2431787	832.813283	981.1607776	1323.920073	851.5904736	271.4979055	501.5491956	492.0171717	1905.956945	1810.841284	2171.655981
Zm00001d033484	4.304645083	4.886238247	5.102148469	12.27811068	13.32220084	11.01959422	12.52837067	12.17506427	12.5019463	2.510320031	6.852385436	2.163481788	7.136349735	8.24351591	6.773919458
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Zm00001d033530	61.08423667	43.10848446	30.8482719	102.4219425	40.94638974	108.5723885	45.60192817	94.22995289	48.54845203	10.76466866	29.34445035	16.05733114	45.29889729	48.25564937	111.0890763
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Zm00001d033532	17.25400013	14.57999129	16.83958979	17.17288491	17.67828915	17.99007122	17.90236808	19.59005089	16.98177236	13.63426944	18.75072485	12.90028683	15.22730332	16.60486134	15.30393404
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Zm00001d033552	0.020678184	0	0.014685091	0.025788935	0.058385446	0.057905383	0.051776697	0.053428251	0.010929401	0.004074089	0.022350732	0.006544673	0.033056503	0.084195993	0.146856076
Zm00001d033553	0.561923169	0.755488966	0.573652667	0.458861202	0.308506755	0.672041511	0.369992961	0.215095694	0.283252906	0.132239451	0.075921765	0.08151432	0.334367259	0.156444422	0.237177412
Zm00001d033554	20.94906149	17.2994949	25.25422376	30.61854358	43.56741714	30.96565972	34.39010105	42.37376364	41.55312355	26.73190701	35.64876129	13.71610356	29.50008735	27.38056307	30.55215427
Zm00001d033555	6.033087299	6.024099728	5.242542668	11.30642534	15.63326411	13.39930571	12.99663726	16.48439622	14.87099255	7.230487059	12.89684265	4.342280261	15.14511296	15.26098315	14.83601593
Zm00001d033556	0.175561617	0.138990033	0.037403742	0.847660253	0.730336131	0.675987721	0.753170628	0.414302382	0.742341134	1.030775248	0.025301581	0	0.491147717	0.412407449	0.536429138
Zm00001d033557	10.47436303	10.84049808	10.52165963	5.779231277	5.150673554	5.206447482	5.121406411	5.581282364	4.934603844	3.462204942	4.422217465	3.002200885	4.058974412	3.546643789	3.465017823
Zm00001d033558	17.43547685	16.22907433	16.18524326	5.442641219	7.83961574	4.400553627	8.917874181	11.08103891	10.30500891	6.465618825	14.55347116	7.91203728	3.116799847	2.864362107	3.746208609
Zm00001d033559	19.08558399	17.53558443	22.03737741	46.97840302	54.06704828	51.9767976	18.41512321	19.30562953	20.07988142	7.893983174	20.67808368	5.376573552	19.53973185	18.90849071	24.34586894
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Zm00001d033564	1.361450681	1.000272099	1.927016985	3.537379644	4.385115787	5.74520715	4.728374975	8.139598136	7.112626574	5.293971997	13.710819	10.3685538	0.867552613	0.746235022	1.705191344
Zm00001d033566	0	0	0.054544622	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033567	2.057027129	1.257214005	2.35771824	1.932673553	6.627122619	2.830934395	4.6848352	6.091047576	6.032753205	15.09759891	10.93225781	9.17581586	1.869891316	1.438837852	1.536587619
Zm00001d033568	2.427374669	2.157483735	2.270128382	6.581122581	6.204297311	10.56269497	5.41664602	5.98097749	3.764560004	3.627662053	6.316506203	2.068411923	8.475977976	7.671434878	8.081237643
Zm00001d033569	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033570	0	0	0	0	0	0	0	0	0	0.008761564	0	0	0	0	0
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Zm00001d033572	0.122017222	0.146999353	0.032965948	0.377128321	0.223687777	0.675944797	0.210766184	0.095951084	0.111225142	0.073166028	0.013379794	0.011753491	0.819247134	0.505960086	0.257603456
Zm00001d033573	0.31240773	0.239508769	0.379820784	0.398091398	1.10069763	0.274575937	1.888728859	1.146455773	1.289868426	0.196697762	0.179849556	0.090279419	0.144397638	0.029780202	0.219852329
Zm00001d033574	19.93890645	19.5437861	22.03238559	68.90899521	124.3330262	74.35223049	118.3180802	146.7942821	136.1841881	200.0184439	147.6387216	116.9082644	41.92347386	38.04534591	63.73916499
Zm00001d033575	7.412434298	6.914309855	5.80912128	4.795877078	12.78966327	5.588459219	11.44269358	13.39856842	11.69272788	51.87379503	25.97684736	32.64633163	4.599951912	4.789698513	5.702970019
Zm00001d033576	0	0	0	0.988415646	0	0	0	0	0	0	0.24985311	0.21948366	0	0	0
Zm00001d033577	0	0.212579873	0	0	0	0.413558818	0.394440418	0	0.20815337	0.698329092	0	0.186967562	0	0	0
Zm00001d033578	12.14934184	11.4143359	9.446373827	8.857509639	9.233517553	9.554379149	6.892288142	6.376040049	6.40483993	4.731508999	2.016738875	1.600160115	4.079613265	4.797688887	4.632395235
Zm00001d033579	10.91268272	10.27015882	10.16418425	11.01819867	34.93887512	15.29009662	26.14193317	34.30219694	41.58904339	93.01743506	70.07813398	68.2506388	4.718752677	4.089754859	12.71489771
Zm00001d033580	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033584	4.164520695	3.862265782	4.32720668	4.569417148	5.997122374	5.360001087	5.424663733	5.474218971	4.539614514	0.32954856	1.126366516	0.176463766	4.634766631	4.883367576	4.709513708
Zm00001d033585	2.65154993	3.389235517	3.213785888	2.488358927	3.623526549	2.926876667	2.369766979	2.904355936	2.687306978	2.778900549	1.72150352	2.202950011	1.468895799	1.496530213	1.768004903
Zm00001d033586	8.723549264	10.30156543	9.017548312	7.82388748	10.37161425	9.512926996	8.948674896	10.06190419	11.03591323	11.63942281	10.25436101	7.958990577	6.583012314	6.215340891	6.965505059
Zm00001d033588	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033589	3.131891426	2.238244454	3.914190871	17.88402633	21.14367693	16.27489673	8.799524085	10.01368728	9.22223909	1.431709451	3.217220546	1.149958788	13.93999127	14.63970013	19.36567965
Zm00001d033590	15.13742423	16.66995908	13.59251981	19.57062978	21.98212613	17.76864453	23.29084923	23.31705901	19.10847939	7.815213404	9.794241906	1.799766009	9.489535204	10.51254081	11.40767306
Zm00001d033591	41.06900113	42.85008328	51.61339402	144.7463636	84.79871065	115.6104141	82.71734673	86.00780035	98.48002573	20.176846	26.32856622	13.5312416	149.802024	183.4125505	176.8048794
Zm00001d033592	0	0	0	0	0	0.021937305	0	0	0	0.012347666	0	0	0.050093483	0	0
Zm00001d033593	0	0	0	0	0	0	0	0	0	0.04505349	0	0	0	0	0
Zm00001d033594	78.13670482	71.77769866	91.42640781	106.2700753	61.04630132	108.8199352	56.3885556	42.75133578	56.68418931	8.061236286	18.31382336	10.14921227	56.49929978	63.34785027	65.84545841
Zm00001d033595	0.336468192	0.245348014	0.132051682	0.220857123	1.540044712	0.303740738	0.724247789	0.469762587	1.31039557	16.3148491	10.25012674	30.60261803	0.574686454	0.174717591	0.204738498
Zm00001d033596	26.20319835	26.17631254	36.21239494	36.75545882	57.51393692	38.19309676	58.48027432	62.49639781	57.01036967	57.15188774	76.24431692	62.43866715	31.20234514	30.35223013	39.84714406
Zm00001d033597	14.83285652	15.20306309	14.0647425	8.13110907	9.256674349	8.669244329	9.908180854	9.911487142	10.36996666	5.601127	7.117349639	5.390286634	6.298527291	6.653818028	6.702156407
Zm00001d033598	0.029400503	0.14812017	0.036539032	0.110001096	0.213067118	0.216117834	0.034354488	0.159526415	0.018129487	0	0.203912377	0.048852815	0.246750802	0.096689592	0
Zm00001d033600	4.069075923	3.186187309	2.876369841	7.115425228	7.23391081	7.701963124	7.572324286	8.761391694	8.762109588	1.633100318	3.895937901	1.454813738	2.879018417	2.855768962	3.273172106
Zm00001d033601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033602	2.819556441	2.786358927	2.888680009	4.161107035	5.039307244	5.053082963	6.002179615	5.439589236	5.487884904	7.438257309	8.601698695	5.76623385	4.146222498	4.2915913	4.325493255
Zm00001d033603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033605	0.15360937	0	0.159088481	0	0.016866907	0	0	0	0	0.070617549	0	0	0	0.042097996	0.088796697
Zm00001d033606	6.261633857	7.642443482	5.725311641	3.886025634	3.044872117	3.927004808	3.170578326	3.397547314	2.408631856	0.88414403	2.068031738	1.469846405	9.509458402	6.978626631	11.13473784
Zm00001d033607	8.032637442	9.720386128	10.17873027	9.409022322	13.57265212	8.393862303	18.4594026	27.76519272	14.08272658	9.492609398	15.25370507	12.71917922	13.55366907	11.18836703	19.81189347
Zm00001d033610	5.575862474	4.856041436	5.557405744	8.026742182	9.15563693	8.213876045	7.107055974	7.105723674	7.230194778	4.720031574	6.254355156	3.095101567	4.34175709	4.520810089	5.078172552
Zm00001d033611	13.58505775	14.33492796	15.87374977	20.58917408	21.16891716	22.57852391	23.16027689	20.5219971	22.81964499	13.46413705	18.59825103	11.14860381	16.25600063	12.80734397	14.36115658
Zm00001d033612	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033615	0	0	0	0	0	0.008370381	0	0	0	0	0	0.007568402	0	0	0.007898957
Zm00001d033616	13.52995878	14.92262617	12.85035038	21.06925755	17.53087066	22.01408067	17.25086079	13.99366634	13.6653952	3.709891586	5.712917002	2.091577212	14.52091085	13.51352149	12.90333436
Zm00001d033617	0	0	0	0	0	0	0.089120429	0	0	0	0	0	0	0	0
Zm00001d033618	0	0.059478306	0	0	0.015556007	0	0	0.01423523	0	0	0	0	0	0.012942044	0
Zm00001d033619	12.20703668	9.781189896	11.54157747	38.85219185	27.20198897	45.62899666	32.71533176	27.27240938	34.86815288	4.942434479	11.87408424	5.564884812	60.37948331	67.48533005	61.49302624
Zm00001d033620	9.515660614	5.658745112	8.562688688	13.68520244	19.47401032	13.65017377	16.81932172	20.6526973	18.33106782	3.887262734	6.926324448	1.641196317	12.13100861	12.0819395	12.71427878
Zm00001d033621	20.50027185	25.72073243	26.78602916	11.07686687	10.09053357	13.5250451	10.51663953	10.53478257	8.016409008	12.24932406	12.2786331	9.386887295	16.75625564	13.19826884	16.93153882
Zm00001d033622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033624	6.386769594	1.475360153	3.537451102	6.315990222	35.09874698	9.707736899	27.73593968	37.4594968	30.85046969	27.81125806	20.09200746	24.28338527	0.65663218	0.933680161	0.926477773
Zm00001d033625	2.163645891	2.369926957	2.248934273	1.979351604	1.114769931	1.548997208	1.197288948	0.863324441	1.058848476	0.978829146	0.92264689	0.706367134	1.525296617	1.435828247	1.137525783
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Zm00001d033632	9.316367124	9.726041842	9.724551951	7.094186441	6.089571583	7.098185259	6.999478397	5.961238249	6.426116202	4.765254017	4.608383951	4.590384295	4.558410321	4.398081006	4.790872083
Zm00001d033633	304.8750499	333.1675203	278.4883202	90.92405411	96.9562996	145.1291288	154.2802801	125.5728917	160.4358888	720.9684707	455.8883425	1098.89883	12.07251148	8.657299545	17.03326462
Zm00001d033634	61.33907609	67.13439013	81.12981559	53.93113155	36.66537129	53.99530587	34.9184489	36.05310426	35.3621261	7.532419486	16.91293921	8.232718308	38.9523125	36.33988456	40.50364231
Zm00001d033635	11.03397038	12.18293003	9.050402111	7.915013525	6.512788132	7.191599983	7.167303945	6.411168414	6.274133759	2.194065704	4.516479769	1.903648568	5.045570233	4.644349456	3.953911918
Zm00001d033636	0.959384837	1.309044481	1.391047348	4.486886812	3.897734995	1.763066541	6.539406938	15.90599636	9.761297523	3.08734967	0.806543372	0.88563582	12.16726763	10.42947086	17.19228681
Zm00001d033637	20.93969162	20.75739598	31.20027321	17.17239333	21.26366793	17.02928488	35.6714101	43.89930608	43.59134452	4.933357134	3.522122871	2.605483443	18.64339395	20.6092074	26.4940912
Zm00001d033638	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033640	14.92647696	12.54475837	22.31506495	15.99516935	21.46561323	15.74619009	14.22111233	13.75344835	14.77390358	1.204304063	3.681967086	1.118446673	4.580404115	4.666575499	5.426346658
Zm00001d033641	35.11413947	36.97858579	27.87702868	24.60600566	27.38943593	29.13959674	31.73172514	29.39536851	31.96579438	93.05490982	71.18957724	103.2480414	15.74691553	15.09290813	14.71961174
Zm00001d033642	11.70422809	11.34243739	12.12395861	11.81855973	11.66079783	11.01075698	11.02238352	10.78430691	12.02656563	7.4340407	8.889447926	4.321804239	8.224895981	8.446504507	8.267268952
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Zm00001d033646	30.02829772	30.62248933	29.58218895	31.1668456	34.94576053	33.83092232	36.68593209	31.8248645	27.98370277	17.29379662	21.38172245	13.4737442	22.63482486	22.56460663	23.94510558
Zm00001d033647	11.98784297	11.88165221	11.67820289	11.9615439	12.27646998	10.31906577	11.57511291	11.5693132	11.27464373	5.09374128	7.290111938	3.537921803	7.53072362	7.564829771	7.324206104
Zm00001d033648	0.064720406	0.139056007	0.127749246	0.346606071	0.185606428	0.340486395	0.462651919	0.518723691	0.422566992	0.204773192	0.21123755	0.084346269	0.102245946	0.250407464	0.233279877
Zm00001d033649	3.694266861	7.364591555	2.031094137	2.379944973	2.269462215	2.901424464	3.916522301	4.773040997	3.60863742	1.032497308	3.183883366	1.566472318	7.736882888	6.275825855	7.133546535
Zm00001d033650	5.142765621	5.565653318	5.484599153	8.335800393	8.360829134	7.68085735	7.503125808	7.756534859	8.293427536	0.684314802	3.22419329	0.575512021	8.021613615	8.638897115	8.206604388
Zm00001d033651	3.594480911	3.968940152	3.097919223	4.695206557	9.688373388	4.98617256	8.899515602	11.05802425	11.22707678	8.771774732	13.50104996	6.195101633	4.281149611	4.007301942	4.764769005
Zm00001d033652	112.4702714	102.3786255	103.6556431	33.3651749	56.22235093	33.50520836	36.53945914	45.18173443	42.75920707	35.52097829	43.83585799	23.88440839	33.19125656	30.89958025	26.62479869
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Zm00001d033654	0.874160651	1.362435268	0.840851134	5.204657698	4.652045525	4.711763157	9.694510539	8.788469345	8.009316266	0.734927653	1.197981831	0.300676593	12.442076	12.19079309	12.94230655
Zm00001d033655	11.72465089	11.38663612	11.24188679	9.842171461	11.72718574	10.21543398	12.29915887	11.42716494	11.95388522	8.89120288	10.92596188	9.497883533	8.213496615	7.661186485	7.244572211
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Zm00001d033684	20.39409215	17.32644433	17.08154935	14.45805757	18.22266608	16.15174891	18.92338019	18.52014199	21.73889581	19.05663192	19.15369707	18.84437971	7.795917235	7.242882381	7.117195805
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Zm00001d033708	26.43135595	28.03461713	25.16042903	16.20930846	16.41715997	15.33709267	14.89423318	14.8529848	15.45023767	9.593938733	14.11474418	7.685731203	10.40464513	10.50230681	9.490860829
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Zm00001d033793	0.072913248	0.321420768	0.045308399	0	0	0.044664352	0	0.04395839	0.044961128	0	0.045972972	0	0.163184531	0.479580374	1.685953287
Zm00001d033794	0.00407853	0.005136924	0	0	0	0.034977305	0	0	0	0	0	0.018072044	0.027384039	0.017884113	0.075445404
Zm00001d033795	7.66451561	8.377626984	7.677518719	8.988060096	9.530914017	9.417492983	9.110482074	8.768295864	9.384740727	4.760711303	5.938147077	4.200135451	7.349950473	6.867967718	7.760627857
Zm00001d033797	0.942606466	0.996568453	1.043210503	1.269967359	1.785973677	1.331838388	8.264787309	9.756240544	8.145951724	9.194959253	5.613584491	9.740567727	0.977813698	0.957893614	1.813651309
Zm00001d033798	8.223780915	7.639948273	6.687198299	6.025801407	6.089143253	6.40352518	5.741706598	4.786291471	5.971399811	5.49226394	6.623499023	7.944542263	5.5072482	5.558199722	6.461159663
Zm00001d033799	71.36300661	75.58479584	73.09609137	30.41972324	25.79481604	30.78568865	30.10354828	30.72503638	28.22534291	22.63737116	50.47439498	38.48796685	35.11040511	34.1420489	33.69548298
Zm00001d033800	11.07147008	10.48445946	8.776863788	10.82116253	17.19418323	16.38348827	23.70175045	24.63988	29.35718049	105.3483252	88.56175569	137.3230517	7.544655647	6.953410872	10.37646158
Zm00001d033802	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033806	0	0	0	0	0	0	0	0	0	0.108987777	0	0	0	0	0
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Zm00001d033814	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033817	13.22719734	13.36023669	12.93979403	12.92557698	11.28225228	12.61546972	11.55990529	10.10940621	12.27925568	2.087426787	3.732962528	1.031368792	8.21740495	8.144212702	8.099788676
Zm00001d033818	3.592096034	2.842543833	4.508322796	2.475737719	9.279393581	3.734897226	7.773408126	11.93943305	9.73445338	43.59275598	36.50619552	32.99823951	0.740465675	1.774592461	3.401596547
Zm00001d033820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033823	0	0	0.067024259	0	0.017765144	0.016517882	0.236314156	0	0.016627636	0	0	0	0	0.029559934	0.093525515
Zm00001d033824	0	0	0	0	0	0	0.090423605	0	0	0	0	0	0	0	0
Zm00001d033825	11.10866266	10.75855994	9.658390796	7.039396327	9.953138383	8.22323394	9.06137765	9.855295997	10.09043385	9.528502619	11.1676305	6.721040053	5.589944823	5.751475967	5.760770708
Zm00001d033826	0	0	0	0.078468895	0.035530289	0.099107291	0.094525662	0.043351469	0.022170181	0.718989716	0	0	0.040232872	0.019706623	0.041566896
Zm00001d033827	0.026436088	0.028539729	0.056322596	0.513389093	0.651882646	0.717158973	0.092671706	0.141164719	0.256166648	0.036459723	0.047623935	0.016734113	0.367672328	0.202861174	0.388595932
Zm00001d033829	0	0	0	0.050835331	0	0	0	0	0	0	0.051400908	0	0	0	0.009425052
Zm00001d033830	0.991037403	1.363435148	0.934801548	2.953672553	3.214368416	3.032277825	2.993054952	2.586027958	2.889462825	0.911202644	0.557571828	0.197045739	2.21231816	1.543259337	1.991884867
Zm00001d033831	0	0	0	0	0	0	0	0	0	0.316888832	0.144872812	0	0.042853081	0.041980075	0
Zm00001d033832	0.06679756	0.028043925	0	0.041653509	0.176031169	0.068196792	0.0520353	0.067118877	0	0.184249695	0	0	0.024916205	0	0.090098277
Zm00001d033833	0	0	0	0	0	0.072664348	0	0.214547456	0	0.040899969	0	0	0	0	0
Zm00001d033834	0.008255576	0.093581357	0.102600542	1.637063413	0.391605572	1.163134176	0.125406329	0.189132565	0.122176978	0	0	0	0.286385895	0.76925445	0.591763495
Zm00001d033835	1.511275859	0.761383014	1.647052783	1.30485994	8.669934254	2.392733162	5.243441379	8.298267487	6.222298962	10.61388962	8.883807768	7.494919051	0.208143534	0.229391123	0.241925695
Zm00001d033836	9.234465153	8.105001197	11.48756101	6.905703064	15.14880642	8.218183314	11.99398576	14.39332987	11.80121043	20.87028213	17.69500589	15.9342593	9.9396244	7.932531144	11.14447148
Zm00001d033837	0.659435989	0.698887594	0.449752494	3.500299583	4.567042399	2.522222251	3.100997761	3.83989465	3.44150987	0.62110211	0.973545294	0.498873448	3.077708243	2.697639606	3.886370262
Zm00001d033838	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033839	0.298539944	0.459570422	0.10600752	0.880580698	0.730544607	0.743115741	0.924713265	1.131338112	1.092859307	1.96718216	2.019783095	1.711287847	0.174992077	0.088310944	0.536904535
Zm00001d033840	7.660331768	4.774169096	11.07743058	8.28772759	10.49066807	6.178914175	9.785050938	11.6079217	12.12698638	9.886784501	9.079928677	4.550339305	4.028736418	3.877118021	4.49237118
Zm00001d033842	0.02069831	0	0	0.025814035	0.01363653	0.012679131	0.036278964	0	0	0	0	0	0.034743111	0.022690215	0
Zm00001d033843	8.152087578	9.146393303	8.146287319	7.036478768	7.513482996	6.411489135	7.547905352	8.078926396	7.907575495	9.904694063	9.369354136	10.98328117	4.938636748	4.483421168	4.713912404
Zm00001d033845	0	0	0.45920675	0.460815402	0	0.905358494	0	0	0	0	0	0	0	1.01262748	0.42718411
Zm00001d033846	3.053242242	4.821311519	3.398129951	3.807871275	2.041570384	6.867144175	3.248216846	4.945318867	3.259681779	0.628496183	1.551587812	0.252406209	33.09586261	40.06494378	40.25213474
Zm00001d033847	42.52245104	41.40561554	41.2732697	33.49475234	36.47710696	33.85236854	33.15876304	39.11646157	33.33587227	20.21817742	30.56522291	15.63104157	35.75914714	35.29047443	36.49037374
Zm00001d033848	0.005668007	0.007138876	0.007044216	0.07068893	0.059747451	0.243042962	0.072853734	0.082011922	0.048931576	0.078171167	0.228721255	0.100460183	0.019028047	0.111842438	0.137612792
Zm00001d033849	2.521259518	1.742532221	2.73750815	3.405493319	4.449494473	4.237463523	2.073963519	2.074268233	2.458343965	0.06276593	0.2639926	0.070579632	0.631498059	0.508875647	0.95760912
Zm00001d033850	2.213600982	3.090031207	2.71116068	7.184780326	20.58927926	7.217916009	12.56023431	12.38265717	10.03282295	5.163982887	8.174492632	3.502699374	8.245788948	7.655374947	17.61013982
Zm00001d033851	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033852	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033853	3.031730233	1.730086731	2.252624789	2.868726562	10.79546206	5.078512122	4.796250094	7.546364503	6.214900272	61.20551412	48.1014771	76.60423386	3.137930834	3.225477399	7.480039481
Zm00001d033854	20.01385215	18.69965781	17.41482687	11.55202218	13.75399155	11.73136162	13.22743087	13.46644851	13.45793819	18.46262018	16.17582301	15.01834445	6.917236084	7.233615217	7.332932229
Zm00001d033855	156.1117094	177.5832178	128.0339512	186.8689412	147.7347002	227.0555167	274.3832818	190.8243203	218.7453979	67.85891954	77.70353005	66.71838999	108.6871765	99.57309106	116.0610395
Zm00001d033856	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033857	0	0	0	0	0	0.078319255	0.042684935	0	0.011262808	0	0	0	0.010219472	0.01001128	0.084466598
Zm00001d033858	2.5392063	1.988408615	2.176998461	4.704286442	5.77510172	4.535565795	5.611618363	4.654678773	5.173857931	1.695163325	1.87016566	1.214811039	3.170897255	2.993343185	3.161162414
Zm00001d033859	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033860	4.536029115	4.347822991	4.355570723	4.856476411	5.74113666	4.267869697	3.92299691	5.304447746	4.244309715	0.94347002	1.844758412	0.60624124	2.543869704	3.126594531	3.698973725
Zm00001d033861	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033862	0.457401878	0.05600966	0.063162267	0.05546059	0.117190515	0.054481378	0.014846503	0.015320071	0.007834769	0	0	0	0.14217983	0.069641667	0.058757666
Zm00001d033863	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033866	8.465281898	7.560237009	8.324512027	8.96935486	9.587185745	8.426112432	8.724869913	10.98508801	9.845047978	9.709840494	13.35611995	9.706815703	7.790521228	7.81630406	7.043542022
Zm00001d033867	0	0	0	0	0	0	0	0	0	0.012001837	0	0	0	0	0
Zm00001d033869	0.290551951	0.279278592	0.370601421	2.088359734	2.236619746	2.182632991	1.840501349	1.760917046	1.46161385	0.063271428	0.231407578	0.177870147	1.608572345	1.01421325	1.21107173
Zm00001d033870	0.077433043	0.086690848	0.080195011	0.268253145	0.266410084	0.195002482	0.256361449	0.181546214	0.318321391	0.154256458	0.135618821	0.052419162	0.211811261	0.259370286	0.318304585
Zm00001d033871	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033873	11.07273707	10.33520968	14.50405967	26.19118353	29.2333052	28.88123785	24.09542839	23.7463255	23.04486863	8.795220758	10.26471374	6.604270637	33.58992434	36.39831134	37.66690746
Zm00001d033874	0.478245819	0.353103118	0.785655296	1.604237939	1.296534091	2.417747662	2.93546461	2.359648193	1.66773786	0.333580604	0.034659961	0.073072968	2.928069835	2.898549458	3.482744276
Zm00001d033876	0.034777022	0.038934923	0	0.053010703	0.091647658	0.331384751	0.194154321	0.060570139	0.066717332	0	0.004872771	0	0.908054111	0.707408162	1.192807186
Zm00001d033877	0	0.022420533	0	0	0	0	0	0	0.021953676	0	0.02244774	0	0	0	0.041160969
Zm00001d033878	1.80934976	1.454463382	2.943105933	0.079642678	0.574984904	0.130394178	0.509901374	0.859832267	0.321588449	9.247627759	16.4077341	4.592240634	0.01191012	0.005833743	0.030762577
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Zm00001d033883	2.694121569	1.155151008	1.353552811	0.643402637	0.830827755	0.632042722	0.401882691	1.382339306	1.201791157	6.126849581	4.04793466	10.63598489	0.128289725	0.314190497	0.695853362
Zm00001d033884	0	0	0	0	0	0.042700146	0.01018154	0.021012615	0.08596774	0.012017135	0	0	0	0.038207487	0
Zm00001d033886	1.472062501	1.794407558	1.295129486	3.121926096	5.050793406	3.973008422	5.275272649	6.071811189	6.071010519	4.020231447	5.045141607	4.577217066	2.943910692	2.867959661	3.416448184
Zm00001d033887	0.177055758	0.1911449	0.110022709	0.504722883	0.233296937	0.65075259	0.709335961	0.198239733	0.29634416	0.31395739	0.223272992	0	0.594393237	0.804106779	0.511751547
Zm00001d033889	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033893	15.3979128	17.2701405	17.44508021	55.55872594	32.81573233	58.60951884	54.52332908	42.98679848	42.58947859	0.30817792	0.35863017	0.045005565	98.83817874	96.13430888	94.67047318
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Zm00001d033896	81.82624219	82.44056806	92.40528815	133.6802793	173.1144846	128.1919994	165.4259007	154.0129583	173.7949884	123.586465	96.93155326	83.76972097	96.40597137	98.30956634	102.706471
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Zm00001d033898	27.57579234	30.3834872	28.44225923	77.54695433	44.49531941	77.57798778	42.77670397	28.17653957	30.99450047	2.939769533	1.90999946	1.213477346	72.77985221	63.33769588	59.59755867
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Zm00001d033905	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033906	15.09077099	14.5508546	16.4478175	11.51204229	39.3561515	13.26195926	24.23445712	32.7230187	30.56063891	16.72643196	23.3995819	15.03953927	4.586306446	4.556715817	5.075029115
Zm00001d033907	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033909	97.1980631	53.80465159	137.9713838	18.15018085	129.1574129	10.76987206	108.8350182	164.6312604	184.9932863	177.1953754	582.373748	240.7466702	1.776605777	0.709057005	0.883765836
Zm00001d033910	50.86869416	50.3004056	51.9622968	112.8758515	100.454319	117.7015515	117.003314	96.60186476	112.617798	13.7462075	13.86411696	10.50313267	240.3460684	229.4781718	202.9924034
Zm00001d033912	3.795620681	3.526342412	4.124097672	5.690003169	6.455978299	5.710374349	5.498437013	5.558736358	5.767936189	0.693291112	1.271826175	0.616771047	2.620370634	2.190310646	2.633688955
Zm00001d033913	12.98535507	13.16813413	13.44277171	19.48921114	26.22084715	20.42826353	16.42971366	17.24435483	19.0094125	0.779761366	2.360984844	0.605774901	7.094378322	5.547688229	8.326180324
Zm00001d033915	0	0	0	0	0	0	0	0	0	0	0	0.009859618	0	0	0
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Zm00001d033917	0.668270755	1.476523086	0.647530977	5.120701395	5.92502151	6.646921535	6.756548684	6.869636538	5.608500275	1.241891795	1.871103778	0.250942378	10.76095173	10.49827067	14.76474988
Zm00001d033919	0	0	0	0	0	0.017780395	0	0	0	0	0	0	0	0.015909646	0
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Zm00001d033922	3.896810752	5.88732546	6.76405014	27.85515229	8.439802695	17.04397129	6.705754169	7.645099129	5.171138535	0.076593983	0.11672217	0.143548555	49.97664355	51.90110052	47.72777375
Zm00001d033924	67.32653692	72.79037266	73.93420815	198.5381707	241.3153278	308.7727037	259.7637712	201.1004376	310.9654584	537.5088694	510.6558493	470.0247163	116.5420902	106.8521127	122.6548652
Zm00001d033925	394.0683231	379.5362886	400.2557241	664.1142024	555.8847913	596.5348523	423.3165039	444.2527576	506.833467	149.8287664	246.0249847	110.595021	115.3299857	102.7284857	99.39952934
Zm00001d033926	0	0	0	0	0	0	0	0.025478201	0	1.573668959	0	0	0	0	0
Zm00001d033927	0.196517349	0.189537999	0.286037875	1.097375607	1.010100983	1.041127095	1.088159057	1.116464546	0.973808425	0.373581647	0.638513503	0.256916964	0.877655729	0.805433564	1.136004364
Zm00001d033928	5.332580716	4.954229882	5.411836589	5.121698206	5.61835675	5.661402558	5.433935765	5.600838717	4.551985545	4.656752419	5.877684825	3.766904353	3.861914604	3.57289716	3.490835297
Zm00001d033929	0.328472066	0.249653662	0.204113025	0.141260728	0.007462244	0.194273281	0.112498852	0.061457981	0.146673108	0.062485122	0.207106907	0.043914916	0.050699419	0.111749777	0.104760975
Zm00001d033930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033931	12.37452032	8.395171499	11.52884861	3.197821562	18.72513306	9.129355284	15.33035855	18.8898446	13.18441661	12.40538174	17.29165816	8.352153941	3.315780095	2.907327377	6.498698696
Zm00001d033932	7.047123639	7.341920442	7.013481402	8.417832939	10.42488387	8.200867145	11.04822113	10.52624825	11.18486408	31.18332642	26.41960886	36.09211389	4.952131709	5.131518159	4.955103274
Zm00001d033933	3.69774327	3.400063226	3.538370235	10.92293423	10.1792585	11.10228187	8.874909416	8.059038154	8.103708068	0.49082559	0.492567559	0.211540441	5.721171936	6.080394032	7.255620397
Zm00001d033934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033935	4.467083751	4.172653557	4.079894812	5.384687799	4.937865889	5.073497932	5.29519969	5.575642751	5.710788434	2.283058124	2.837592187	1.974368628	4.518548839	4.195384963	3.89984474
Zm00001d033936	0.369492809	0	3.903257377	5.760192529	1.704013437	1.131698117	2.806390275	2.895907445	6.151775957	0.25479575	0.698913429	0.613961048	3.721268857	3.645458927	1.495144385
Zm00001d033937	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033938	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033939	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033941	0.026402538	0.026603275	0.00656263	0.302938515	0.354850009	0.174672293	0.166597373	0.191012702	0.097684954	0.043696142	0.199766681	0.152087171	1.55408211	1.54557696	1.45909196
Zm00001d033942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033943	0	0	0	0	0.035955801	0	0	0	0.134614156	0	0	0	0	0	0
Zm00001d033945	0.252454655	0.343610118	0.513641385	1.096898495	1.695421772	1.070048799	2.214828473	2.47450058	2.174404514	0.777781576	1.435157751	0.455571593	0.371357202	0.468688936	0.976829785
Zm00001d033946	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033950	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033952	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033953	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033955	17.75311772	18.20069642	16.26411785	8.531480356	7.648794211	9.637347598	10.65388601	10.20227073	9.739329112	3.42301747	8.872128359	4.885281456	5.830205004	6.251094527	4.849645263
Zm00001d033957	1.791314949	0.193109941	0.454142601	0.493976885	2.740799823	0.576044918	3.144206225	3.577268041	1.704951185	3.189471283	2.793824783	1.568221004	0.254499239	0.414590511	0.389975176
Zm00001d033961	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033966	7.341094893	7.620226642	7.383877369	13.26770899	17.6449719	13.20494718	19.90039415	15.22790641	14.69292834	53.66885493	28.36045982	72.00037854	10.56452753	9.258110896	10.82491339
Zm00001d033967	4.938921045	4.836922124	3.804225152	1.100766462	1.373309102	1.518465276	1.195918425	1.415212588	1.598034597	5.166963811	5.351935982	7.697002514	1.05072457	1.30723531	1.085564016
Zm00001d033968	0	0.094350519	0.116374313	0	0	0	0	0	0	0	0.023616253	0	0	0	0
Zm00001d033969	21.32766582	20.18587824	19.2426251	16.98271125	17.73233414	16.02681546	12.77670935	13.97994196	13.38160575	18.11635585	21.01524145	14.88372753	15.56184823	14.52141861	21.56219189
Zm00001d033970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d033971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d033975	1.979545183	2.103675033	1.874707961	4.878259536	4.915719931	3.550372945	3.085984861	3.798353742	3.485935001	1.109110911	1.968212872	0.743249748	3.08846462	2.483034483	2.701236939
Zm00001d033976	8.368452279	10.79519246	8.535370181	5.694871558	4.718781221	6.46279644	3.399359243	2.39773036	1.396519884	0.482481918	0.77782554	0.418127457	11.2807488	9.849967285	12.29340939
Zm00001d033977	0.151397939	0.390906843	0.545657633	1.727675022	1.556014168	1.993944302	1.114523508	0.940139984	0.793541503	0.302763942	0.420018849	0.067084707	1.135108342	0.970911265	0.901438894
Zm00001d033978	0	0.054721302	0	0.198677827	0.248072174	0.017742725	0.067689987	0.157160557	0.089303088	0.079893583	0.10957541	0.016042767	0.145854817	0.079379696	0.16743445
Zm00001d033979	20.90145819	21.69205402	23.09715889	21.20952232	27.13819324	22.09824975	26.5503575	27.24376471	23.53237809	35.46263378	39.55216604	43.71280707	18.00499709	14.40080733	17.35107303
Zm00001d033980	1.173792811	0.086964493	0.965377827	1.872935328	33.77598062	9.389664985	39.02943118	41.39831325	32.84802106	2.71396079	7.575092013	1.39588282	1.4100936	0.851527653	6.026963693
Zm00001d033981	9.696435537	9.378605052	11.59080601	13.20072709	18.32595346	15.74255191	18.97606511	19.33145762	17.26207898	42.35458575	14.62634965	9.035786958	14.69389672	15.4656232	15.89994522
Zm00001d033982	13.20221138	12.0776223	13.00321169	9.024859009	9.266694425	8.316157219	9.280762955	8.256181106	9.102403668	6.344198038	7.981358607	8.969579348	5.170650272	5.460820356	4.844533539
Zm00001d033983	629.4938345	629.3845407	618.7815338	97.91111544	136.8503389	86.53540805	95.43264005	114.279937	96.82148818	106.668548	129.9510962	90.60628718	89.42794972	76.906643	99.4570425
Zm00001d033984	8.109569844	8.862033435	7.384508067	6.693729799	6.550888041	7.256656059	6.077704582	6.527253894	6.054196732	6.93401559	7.363970123	9.549364844	4.509770993	4.329973293	4.166444072
Zm00001d033985	7.925515004	11.51685791	9.544216176	149.0600298	66.50250313	164.0949315	308.3025973	244.5836908	278.8242478	17.82195227	36.36864319	15.61492538	393.5467486	436.5681321	379.1973278
Zm00001d033986	10.44488789	10.47709659	11.58361342	15.42440875	20.66547881	16.01049341	18.05975309	20.1978061	15.96615741	15.06817726	17.9693225	9.124529566	8.934790673	8.368720403	7.940583775
Zm00001d033987	0.029655605	0	0	0.166433329	0.136764636	0.190743913	0.294546885	0.312881707	0.265158496	0.061349953	0.018698335	0.016425567	0	0	0.077143334
Zm00001d033988	7.988779984	7.927025691	8.961531731	8.542412352	5.638483486	9.821391506	4.285931864	3.920069834	4.694873883	0.996396387	1.769538946	0.831093614	14.07031252	14.88027267	12.19167821
Zm00001d033989	0.156894703	0.053893489	0.265894362	2.090135589	1.945158195	2.795890602	2.591640214	4.170543646	2.620973423	0.039342484	0.017986296	0	1.675897468	0.844331645	1.442888426
Zm00001d033990	0.009163025	0	0.159429689	0	0.108662672	0.101033639	0.40686582	0.265164551	0.135606619	0.442306295	0	0.091353454	0	0.050224151	0.222467864
Zm00001d033991	0.031573289	0.069591679	0.009809844	0.08859788	0.01040061	0.048351998	0.055340082	0.0190351	0.116815864	0.054430963	0.089583592	0.122414097	0	0.043264684	0.03650303
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Zm00001d033994	25.38943442	26.03780374	23.74731645	10.24392172	14.29062767	13.65215482	13.74936574	13.17749607	14.33221367	26.6585539	23.24849013	30.77974799	8.711028325	8.017301091	7.630668137
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Zm00001d034001	21.50284382	19.12688879	23.85280138	38.52110404	52.49467274	28.53384006	33.80824218	40.448416	40.60512951	27.02359488	48.30982551	25.93421354	21.72309307	21.0231563	23.67806971
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Zm00001d034005	186.648924	181.2659431	171.8022714	95.01936229	93.98835078	110.7762643	113.6174657	108.2873192	126.715603	14.10654077	36.70481137	11.00205027	19.77199766	20.48574789	28.13423491
Zm00001d034006	18.59317598	19.37603019	18.6378914	14.33848709	16.41458695	16.86772621	15.99223873	17.3642823	18.84400217	19.18351094	19.1741849	18.8892228	11.9322022	13.3869794	13.17151006
Zm00001d034007	219.3080114	214.8586069	246.5070288	338.849979	226.073177	331.6221054	128.9479644	108.3937996	122.2279585	43.1959247	55.38530435	11.31893549	425.9258106	422.8314677	392.3025298
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Zm00001d034011	26.8231137	23.7602543	26.10295354	13.0305209	17.20876778	15.17714655	15.06453898	15.3424604	12.41454609	13.56709079	11.5381887	7.343751588	9.62355699	9.193073517	9.147944862
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Zm00001d034017	34.49357482	40.98703474	34.71465662	70.05871088	23.24095396	76.73822463	32.0657304	28.10800895	34.79443703	1407.791161	1025.263588	1583.564193	254.3285827	213.7168471	209.6228939
Zm00001d034018	2.139616279	2.142614318	1.640529646	5.385179451	5.38129253	5.867131395	5.976080776	5.432527677	5.342445908	0.985052381	1.830661051	0.707103522	3.989343038	4.196803834	4.309698984
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Zm00001d034020	5.158654856	5.753066983	5.776026962	25.31631533	12.87906551	19.60587664	9.125812228	8.973982057	9.434746045	0.088106942	0.543780775	0.08846012	27.38011473	28.55562174	34.73216414
Zm00001d034022	0.03038052	0.229586263	0.0188785	3.01219668	3.642802058	3.573148189	1.135988405	1.520227652	1.723509906	0.356147837	0.785371609	0.30288745	3.807639048	4.279588757	3.161162414
Zm00001d034023	4.540975225	4.424258245	5.63496057	6.756377264	11.9122422	8.666259686	7.588249151	9.802432485	10.46010089	2.807769419	5.769828479	2.629815318	4.463685892	3.964224447	5.23402964
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Zm00001d034028	11.84055185	11.387173	11.08317247	11.68277107	13.11894001	13.20781211	13.52294341	14.71590579	12.47697708	14.58042241	15.84933517	11.47390792	6.774729742	6.918378785	6.745628487
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Zm00001d034031	91.41138646	65.40187619	73.47710816	17.68581218	63.08800123	30.81693391	75.35498745	83.97643077	82.86010511	67.81143026	74.02555888	50.11591694	38.34702272	37.63154665	39.86114886
Zm00001d034032	0.504499796	0.277436622	0.423883154	0.983663647	1.629111747	1.358037741	2.474273082	2.510357637	3.303731533	0.097998365	0.698913429	0.24401016	1.407402965	2.227780455	5.183714873
Zm00001d034033	17.33215012	16.76049581	13.94668017	9.011491463	9.407769015	10.16797828	10.64887857	9.402187957	10.49527662	9.398755203	11.88560462	10.06936598	6.790950001	7.17135925	6.0872517
Zm00001d034034	17.431037	16.12595819	19.05736732	14.65898752	17.84487081	15.60476523	14.16905097	14.0204996	13.62330613	8.304285868	9.935294065	7.884734283	8.785424205	6.872504485	7.359241454
Zm00001d034035	4.964789366	6.909688488	4.778419807	14.90039384	16.57900405	19.85363341	20.54596809	21.80495446	29.08088813	56.20165187	50.52210975	65.17397005	24.93161165	25.92861523	25.59121478
Zm00001d034036	14.18821335	14.8073493	13.31648124	10.27786151	10.42987144	10.64062512	10.27848753	10.41703022	10.20126433	5.762095256	7.774840889	4.339689939	9.08485307	9.067696154	8.55373359
Zm00001d034037	1.022148331	1.609249506	0.68809485	4.302379317	7.407567089	4.08292707	21.47396306	21.92784171	22.17854707	225.0251286	135.0456059	209.9689404	6.159930076	3.781737765	4.886999526
Zm00001d034038	56.47999687	57.98663562	58.27919496	28.67732432	24.61604129	27.19072174	21.65462334	18.73916677	22.46701258	5.133223975	10.2789197	4.617672549	10.13084585	9.556522009	11.06268258
Zm00001d034039	4.950348937	5.453695033	4.927893079	7.144688627	7.869042223	9.149436949	7.155987903	6.768281902	6.705168219	4.386612593	5.46798196	2.250098052	12.0455663	11.06016238	11.01766348
Zm00001d034040	20.16350939	20.2263925	23.9149214	25.61418216	27.30867718	23.99561739	25.40290853	25.21585724	21.69143461	7.275058555	14.30751318	8.142693441	16.08443415	15.63700279	16.67188396
Zm00001d034041	39.39401742	39.17488491	45.17192827	44.33728916	44.600572	42.64638463	46.06398767	44.88522346	33.72084599	13.17570311	24.47506879	13.77590512	25.86622266	26.93426425	26.69214448
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Zm00001d034044	9.833866754	7.7627516	8.666085177	7.809051247	9.278493838	8.999802874	8.595219162	7.70376306	8.563351952	11.20735476	10.13600078	14.53011764	6.33138114	6.266950109	6.03071724
Zm00001d034045	0.488905054	0.510297281	0	0	0	0	0.018513884	0.002729205	0	0.024973358	0	0.020058772	0.01013149	0	0.010467425
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Zm00001d034050	8.089675983	6.408224604	6.253984069	4.071385937	13.36613452	7.27714186	9.434178605	12.07767644	11.30247342	43.17845645	32.02980082	36.80691118	4.089711318	3.753268073	4.483069585
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Zm00001d034055	3.900113809	4.103549905	3.542755712	4.519507665	4.939676792	4.573961463	4.901739312	4.708232383	4.655745614	3.680299955	4.581467738	2.354233569	3.751236176	3.373656816	3.752497492
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Zm00001d034063	13.62514075	14.33946567	13.20985784	13.11816847	12.19549006	12.49126105	11.19208064	11.08222727	10.3913868	32.30631424	20.63436253	32.4332617	11.58480874	11.25785016	11.85169455
Zm00001d034064	7.159894207	6.947923897	8.820482866	14.26515561	19.34911522	15.17805451	15.68634259	16.44440712	15.58339365	9.188580312	11.62180628	6.739449871	10.16466984	8.648766691	9.134140452
Zm00001d034066	11.07008578	9.368813931	10.07166231	12.89583642	19.03688874	11.25667923	13.45381452	18.84424044	15.40868807	2.403122018	3.916305275	0.931412599	9.473009342	7.479715502	11.62788216
Zm00001d034067	5.944014748	7.873311513	6.796259903	9.723538913	5.260568189	10.13443865	5.70695262	5.757593464	4.593854381	1.448273813	0.874485885	0.40604477	11.23002239	12.83659426	11.62528931
Zm00001d034068	10.69210594	11.64957107	6.765244455	2.519106675	3.730193866	2.933247898	9.477370465	12.31863038	12.26300018	45.51846855	31.90309224	8.59592165	0.5410782	0.589900275	7.528723946
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Zm00001d034073	1.051633379	0.578871346	0.745458707	3.050571706	5.450346274	3.741116693	4.696875137	6.866150222	3.36247752	2.030526129	1.542255692	1.130434644	0.941449215	0.495293122	3.61147045
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Zm00001d034129	2.710434184	1.420212153	1.671211451	1.615922863	23.80929781	3.663872655	27.43219951	47.67132003	37.56453873	23.24985111	44.61874788	8.371300176	0.52510391	0.429951668	1.020252213
Zm00001d034130	0	0	0	0.062761362	2.718655618	0.78094113	4.939458786	5.076789512	2.751455532	3.678437782	1.523030981	3.289023233	0.544365574	0.128721726	0.058180903
Zm00001d034131	5.982092584	5.608784922	6.032510826	5.294623873	10.20980782	7.692598147	8.776620517	9.110268923	8.256298339	7.103849363	8.385949329	9.093200869	4.767300518	5.760432021	3.500961631
Zm00001d034132	0	0	0	0	0	0	0	0	0.019446855	0	0	0	0	0	0
Zm00001d034133	0.787715143	0.845147895	0.57288149	1.178884986	1.060995379	0.857830071	0.354541836	0.295494939	0.510921909	0	0.02207409	0.012927335	0.208943061	0.115136133	0.242854987
Zm00001d034137	17.94577306	17.9077285	19.73180792	20.18740115	19.02263228	21.88553266	16.29433369	17.11080328	16.29840889	9.729120911	10.8381282	9.278452227	13.81968994	13.58811061	13.02398914
Zm00001d034139	12.9592654	11.17738486	15.06009723	19.76779297	29.2144761	20.9342125	24.63032462	28.10411792	30.5013123	10.62261039	17.1310385	4.612620561	11.21035234	11.77822658	11.17465093
Zm00001d034143	10.11385681	12.05164357	10.00399131	57.02820355	18.09939221	40.42537447	17.6739649	19.04393923	16.22795698	1.342940562	0.605769221	0.877309329	133.4591434	127.0042578	111.7739597
Zm00001d034145	41.81404879	27.95768201	33.77830489	14.07606618	62.0046835	22.69237257	73.51860445	85.04136547	72.53809224	194.2255946	159.360612	145.8166047	15.26199407	16.32979769	18.82723373
Zm00001d034148	0	0	0	0	0	0	0	0	0	0.33127178	0.025241383	0	0	0	0
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Zm00001d034151	0.004319505	0	0	0	0.005691582	0.02116794	0	0	0	0	0	0	0	0	0
Zm00001d034152	16.96230629	17.59455699	16.28986547	12.37430533	13.92742927	12.93632157	13.12705221	13.31042265	12.89523131	9.922836819	11.4111973	8.606736392	7.996624455	7.806970327	8.390275413
Zm00001d034153	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034157	6.220071353	6.881162896	6.485609963	13.72708329	11.69556344	13.99510817	10.97375926	10.01365562	8.910439963	6.338899934	8.456968396	6.381733095	12.9695168	13.95234415	13.37596335
Zm00001d034159	7.102059019	9.789817457	7.136529636	7.402157088	7.663152592	6.56232798	6.516616954	7.090062892	6.605931859	5.43598513	7.055831673	3.73520478	4.575171127	4.512180942	4.631272891
Zm00001d034160	16.80482213	15.31778368	18.59354124	20.63654385	14.43877932	7.139741861	24.52600753	31.71316758	43.33517524	79.12200373	53.44237546	74.113236	2.907900441	3.31994625	3.412995059
Zm00001d034161	9.847076745	10.28108864	7.272163517	7.297638712	9.979966463	7.868109442	9.732656699	10.24989325	10.11120293	13.01943787	10.09989445	9.371307089	6.834364293	6.95609289	7.35986793
Zm00001d034163	0	0	0	0	0	0	0	0	0	0	0	0	0.014087062	0	0.087324929
Zm00001d034164	0.002320698	0	0	0	0	0.008529519	0.002711736	0	0	0.003200626	0	0	0	0	0.002683044
Zm00001d034165	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034167	0.369492809	0.293251613	0.44033524	1.893761927	5.015335046	2.976521076	3.270671911	3.960893428	3.370836141	0.202440459	1.570161676	0.302775311	1.348039555	1.459293299	1.737995626
Zm00001d034168	4.716387047	3.785955622	4.110893179	3.842954574	4.242453745	4.437672544	2.601238399	2.805532016	2.838507275	1.717234281	2.283845906	1.253903888	1.449632589	2.16461933	2.195655586
Zm00001d034169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034170	0	0	0	0	0.062875589	0	0	0	0.029424822	0	0	0	0	0	0
Zm00001d034171	0	0	0	0	0	0	0	0	0	0.437637574	0	0	0	0	0
Zm00001d034172	0	0	0.136883382	0	0	0	0	0	0	4.765937822	0.034722789	0	0	0	0
Zm00001d034173	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034174	0.522943374	0.282278192	0.139267621	0	0.049218187	0.183050624	0.130941286	0	0.230333647	0.309096483	0.047103455	0.910317474	0.167197265	0	0.431852789
Zm00001d034175	367.2996345	378.2069597	397.837966	248.6589142	170.627516	217.4106098	162.3263982	133.3821389	154.370384	8.741490752	30.2180089	5.495485922	101.3814341	77.57671109	61.12956795
Zm00001d034178	4.062059919	4.327664379	3.836014642	6.088914059	5.122150842	5.416563499	5.585805607	5.284135531	5.290952761	1.740245022	2.662172912	1.322511764	4.621606614	4.128443052	4.118376308
Zm00001d034179	267.7862599	311.9843834	329.7337961	846.3916255	266.0860304	610.0185328	304.8757018	313.3897926	152.0772051	3.568580021	2.435009121	1.326202113	3520.481524	3316.293208	3501.478514
Zm00001d034180	4.460985193	4.726293331	5.01582441	9.219766633	12.53501725	8.907329742	10.44815998	9.650264838	10.42477905	3.032415464	4.448599795	0.860598724	6.905671311	7.220272791	6.208215677
Zm00001d034181	0.580501625	0.709951367	0.575068146	1.133180522	1.019861405	1.350237729	1.140357591	1.014424383	0.747046434	0.081221045	0.275837833	0.279588416	0.847304294	0.986828847	1.06020524
Zm00001d034182	0	0	0	0.811912852	0.571868455	0.26585924	1.014275362	0.654142707	0	0	0.410472966	0	14.75217297	27.65437427	44.09319795
Zm00001d034183	7.667219325	6.563313502	9.208868173	4.000849657	7.64655973	5.564118472	6.65467784	7.40711288	6.648912571	22.99514848	23.10336654	31.46949272	1.953374148	1.563603622	2.274131906
Zm00001d034184	0.096959106	0.133222203	0.043818568	0.032979052	0.290358742	0.30236989	0.298691342	0.552668345	0.358732404	0.474107372	0.533535461	0.781141071	0.75950247	0.927621614	0.835639323
Zm00001d034186	0.99905171	0.662268066	0.599029318	0.010929596	0.277136251	0.075156362	0.522254285	0.422676826	0.378278721	1.752537433	1.58032092	0.922253454	0.96106274	0.64366757	0.719367088
Zm00001d034187	0.068959566	0.043427414	0.05356447	0.037626478	0.045432172	0.021121226	0.06043444	0.015590539	0.015946176	0.035664979	0.065220169	0.023871962	0.07234497	0.028348462	0.064777918
Zm00001d034188	26.78776734	25.98968088	24.89204431	12.40979906	19.4531657	8.771861337	44.81330664	50.31753904	58.56944692	43.21793976	61.64166312	27.53780096	18.73642609	20.09477692	19.28861585
Zm00001d034189	18.29025276	19.45910752	16.84218777	12.41517225	20.68970101	16.53773532	26.16461158	27.31928578	27.77877458	30.79021106	34.89817248	27.12754106	21.29914596	19.55570459	20.28668306
Zm00001d034190	0.024902065	0	0.247586882	0	0.065624249	0.030508437	0	0.060052445	0.122844612	0.412128644	0.690850675	0.41378067	0	0.054597037	0
Zm00001d034191	0.07770506	0.024467453	0.006035755	0.18776386	1.682999721	0.755644682	1.021481581	1.276589122	1.084098246	0.890834732	1.665805743	0.844641735	0.326079213	0.356703875	0.606404158
Zm00001d034192	27.28756329	30.39251883	33.64012181	80.14949338	47.06029535	65.43260355	20.08081914	22.70742131	19.58585282	6.00100271	9.935423965	2.919397111	179.02068	199.4640262	193.0499034
Zm00001d034193	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034194	5.921482154	6.448803328	5.426988866	12.1487697	6.841345226	10.47041219	5.719316843	4.669325291	5.338048979	8.689527779	12.78013127	5.352889829	14.90118482	13.97688942	18.62411763
Zm00001d034195	0	0	0	0	0	0	0	0	0	0	0	0	0.027416756	0	0
Zm00001d034196	112.7225787	102.4282713	120.3989805	92.80975808	52.83206721	78.88841236	45.93906682	47.74195135	49.73824783	8.3949133	17.01820918	6.591407847	97.4590469	94.84558297	81.21176773
Zm00001d034197	131.1313608	74.51563633	116.1117346	1.645665131	30.09910172	7.500006953	16.27815664	26.39590028	24.81043257	200.8403308	96.75601213	92.42380505	0.338891925	0.023713428	0.650239104
Zm00001d034198	9.256970356	6.426453083	9.229488757	5.051902189	9.083910457	5.471701286	6.690316329	11.50620249	9.398925259	21.11102563	15.01325339	17.3448369	3.050992827	2.433767925	2.671827681
Zm00001d034199	0	0	0.334941124	0	0.87163821	0.150081829	0.715718501	1.595264151	0.33237393	13.34709636	4.479893126	4.125348785	0.548335116	0.05371644	0.14162914
Zm00001d034200	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034206	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034209	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034217	10.84571135	5.443797985	10.97677716	23.89702259	112.2571881	40.64357395	110.6004543	134.9098525	134.5274693	8.11769002	9.851351189	2.379086502	3.154340154	3.509447695	4.329721716
Zm00001d034218	16.4479481	18.20643751	22.2685099	36.97259061	60.11075356	36.88010815	44.85169275	62.56980503	51.16544135	20.07132971	31.45193932	13.55213263	37.46956628	34.5217653	42.16771607
Zm00001d034219	0	0	0	0	0.022433196	0	0	0	0	0	0	0	0	0	0.078733809
Zm00001d034220	0.021130192	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034221	7.326861604	7.938103009	15.340946	3.59774227	5.35733189	3.943985243	2.515914688	4.940277768	3.042094669	5.693944776	9.358030468	3.079818875	7.274998426	12.31720428	3.419759033
Zm00001d034222	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034223	23.75859635	19.51483234	24.24767304	41.38278522	60.65682697	41.14419578	44.49488483	56.45672877	45.51361642	8.287627632	22.94752596	3.730478201	23.73436023	20.47361132	26.48589751
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Zm00001d034232	0	0.022019143	0	0	0	0	0	0	0	0.723333203	0.264550352	0	0	0	0
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Zm00001d034237	32.75710358	29.4715113	28.30380487	7.622499446	21.5367913	9.685393328	16.26702531	21.47668084	22.68417796	3.501716334	9.647775078	2.74867964	7.695014469	6.874041595	9.139906803
Zm00001d034238	0	0	0	0	0	0	0.04907784	0	0.025899267	1.448147887	0.529642537	2.721799669	0	0	0
Zm00001d034239	0.548034296	0.565881634	0.570650209	1.108353405	0.956315233	0.604880178	2.215362004	1.791911616	2.094613763	3.969807959	3.897491956	7.323335066	0.718241772	0.76314591	0.519439833
Zm00001d034240	0.139815563	0.274885024	0.118667546	0.578404366	0.750390124	0.56819206	0.450276023	0.493421688	0.706548033	0.249266383	0.365524692	0.098217432	0.564775595	0.340186253	0.53619118
Zm00001d034241	42.9068996	43.78598303	42.85141814	115.9766764	88.03830765	111.2195741	98.60937954	90.20964625	89.66397743	12.74322224	19.88077521	7.089644976	251.7511348	276.3390898	256.3795693
Zm00001d034242	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034244	31.61997048	30.3633366	34.13020968	35.5946579	44.31629686	36.28733974	39.23005533	45.3645961	43.31104277	36.58607929	45.44917849	40.23014294	37.48882129	34.89934966	36.58470611
Zm00001d034245	41.25599308	43.56863839	34.89265494	26.08868529	16.83007248	22.8566811	19.28706004	15.12189986	17.5373785	12.313636	27.01164479	19.27724707	33.83148548	35.59150539	33.81789339
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Zm00001d034249	0.323011274	0.450815938	0.195294825	5.835818045	0.851229482	3.550901577	2.081013242	1.126328478	0.667526325	0.132441724	0	0	63.39226647	67.43141997	68.28999008
Zm00001d034250	0.114939512	0.23989917	0.175497944	1.40071057	2.423194702	2.422046011	2.532642898	2.554032084	2.276136854	0.34874518	0.451392082	0.040016358	0.929746117	1.148406644	1.028915463
Zm00001d034251	2.593656081	3.335412129	3.524656067	6.937968065	7.417939952	6.318045854	5.239973112	5.684778485	5.164251901	0.033430648	0.79474553	0.100693966	3.139728959	2.936260603	3.95845914
Zm00001d034252	6.426191986	5.1903535	5.685673161	4.89526362	7.259490279	4.252709331	6.011364424	5.666511202	5.631117836	2.933800541	4.758920952	2.642377496	3.665277543	2.653927853	2.768075161
Zm00001d034253	0.207559219	0.145234225	0.200631829	2.065118417	2.437097297	1.780019103	0.436559309	0.433799901	0.523332967	0.006361297	0.116328371	0.025547187	0.418077776	0.535968283	0.629246229
Zm00001d034254	4.639612374	5.145642954	4.630483245	4.764342426	4.893803143	4.470768776	3.471892118	3.660829692	3.082716408	2.227787246	4.534850105	1.155909416	6.095670532	5.764684319	5.513972386
Zm00001d034255	23.63485219	22.82991639	25.33714273	37.24273268	31.15500871	37.5828459	36.44994331	32.6337907	35.02052821	21.93350379	20.64676143	21.60752799	17.31405595	15.9321003	19.08438276
Zm00001d034256	30.0291437	30.79533413	32.38233761	58.76881412	45.67214187	53.73762679	37.22408625	39.53256746	38.31429456	27.86109413	28.11958932	24.65975722	177.769269	185.9345817	167.1953675
Zm00001d034257	1.056193082	1.92754726	1.212182738	14.96006234	6.077990153	15.11845195	16.70525913	12.37791676	8.898741186	0.341870214	0.278610346	0.752144634	44.49061885	46.76830193	57.98371814
Zm00001d034258	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034264	0.005497078	0.027694362	0	0.08912433	0	0	0.012846672	0.013256451	0.006779422	0.166790302	0.069319922	0.018268242	0.012302814	0.00602609	0.044487609
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Zm00001d034270	24.07000966	17.34450291	37.07801575	8.017516095	18.25462476	8.832470652	14.49963937	17.28558195	12.39435712	74.61769384	72.81381444	90.00136813	1.840287272	1.584275994	5.838355855
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Zm00001d034283	2473.606121	2754.298649	2844.605657	3692.719758	1553.974084	3332.953776	1801.669443	1190.547832	1509.380876	26.50251603	76.25715911	19.09799189	3526.473666	3449.459651	2766.902984
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Zm00001d034317	11.17016912	12.38723681	12.11781554	15.36156984	14.89178494	15.36681036	11.83280563	11.24657569	11.14364959	0.868828974	3.995759535	0.854084282	7.375710709	7.874815294	7.815941456
Zm00001d034318	3.370195158	5.058267904	4.816247175	26.17939471	12.12198327	21.02011011	3.193032219	3.863998388	4.51381403	1.084926784	1.94222581	1.467655725	30.84728777	35.98305201	35.51760313
Zm00001d034319	2.433859646	4.159446688	2.664979479	4.186375267	2.551267541	4.722124613	2.410498229	2.509206573	1.472915841	0.062392076	0.308058467	0.33075069	3.442426812	3.431808602	3.744858187
Zm00001d034320	4.059942195	3.591633581	3.741375401	6.337840927	11.88186685	6.581224647	8.415027746	9.074743376	8.328027116	0.857040249	2.603393692	0.810759337	3.067436489	2.694611952	3.79179835
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Zm00001d034322	19.15004054	15.39234633	18.93724471	5.048329415	6.616121679	4.73808547	5.35507264	7.383392934	7.074859248	7.20059276	7.030873579	10.18193079	0.216386842	0.169582876	0.141589076
Zm00001d034324	4.944280677	5.176945142	4.713455488	1.151536528	1.504425184	0.754136668	2.56386272	2.525931448	2.412130232	7.462536376	9.36486471	9.920278873	0.344411795	0.250325631	0.516529806
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Zm00001d034336	4.405285369	4.750490558	4.73671264	4.679228376	3.756691255	4.911946788	3.840438716	4.631387209	4.004503072	2.198143782	2.746394068	1.458509446	2.802703176	2.89753711	3.078757021
Zm00001d034337	8.508455417	7.917478664	8.636468579	14.22506316	23.75693581	18.3435713	20.04924529	20.65175818	20.53231574	14.85023311	19.03584508	11.32937791	11.27297716	11.64899007	12.78233836
Zm00001d034338	8.065331009	6.784750629	7.363027389	19.99328006	15.2586416	20.34781675	11.39065213	9.520849386	12.47646742	8.404362649	5.888926794	6.121723777	58.72058059	65.71089434	54.39363585
Zm00001d034339	18.68755231	19.4436428	16.68332534	13.83398797	12.28852215	18.56686741	12.96149561	12.52302969	16.33761918	17.92919343	14.87884953	13.30513348	13.20339952	12.39225774	11.14983642
Zm00001d034340	1.028403268	0.853238499	0.862212077	0.061075235	0.064527247	0.019998964	0.181207106	0.186987181	0.281845877	7.384361122	5.897577555	5.994459091	0.155268863	0.170000506	0.009436306
Zm00001d034341	5.592777513	6.343830946	5.257075044	6.431204431	6.449937394	6.531360139	5.082902665	4.36428991	4.302500286	0.699164414	2.144672149	0.688380569	4.818921172	5.623070328	5.388345024
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Zm00001d034344	38.2536602	39.65777804	29.33825717	16.61587311	13.57270433	16.94401197	16.77860233	14.58713553	15.0418302	0.954602693	1.452919405	0.338129072	13.58107105	13.22899087	12.49553822
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Zm00001d034350	17.10835205	16.58895091	18.45110512	32.46963345	15.93235208	30.13221592	15.22917265	11.14703522	13.23386712	2.313109438	2.532409486	2.287749574	17.45936186	17.36172562	15.70163063
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Zm00001d034358	69.21002211	64.81582704	68.61837849	24.98298577	36.86203864	28.5381704	31.05284094	32.25157661	28.40833376	29.0166764	43.25088833	24.41166573	27.88093592	24.66263109	26.68686585
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Zm00001d034399	6.891673636	7.043746414	7.802748948	8.142628166	8.924375519	8.41900419	6.573341011	6.93410203	6.482275507	2.455773797	2.386802284	1.088524604	5.85226722	6.15235918	6.633408828
Zm00001d034400	13.91198521	14.06757337	14.67180007	22.49764555	25.08344523	21.65799728	26.69505772	25.94996462	26.56311925	15.7954135	22.444352	17.5922365	25.71888268	26.26004173	24.17593393
Zm00001d034401	10.00116116	10.75716389	9.291678908	14.3792775	9.293040489	10.09851131	6.188943371	5.831913457	6.440145999	2.551369587	4.936797098	2.046919237	18.71940266	20.48503448	17.72308513
Zm00001d034402	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034404	59.38350751	65.57588358	51.33577475	30.5588698	39.51862058	27.13215944	49.9085377	55.13624605	42.07885011	74.65242669	64.73255362	47.21671602	34.24975109	30.56747234	33.45619964
Zm00001d034405	0	0	0	0.057676869	0.046874464	0.026150089	0.016627465	0.012868381	0.013161923	0.04415664	0.02691626	0.027585378	0.274681221	0.249586456	0.230321487
Zm00001d034406	11.80371881	10.72963494	10.68910264	12.117617	15.77560771	14.07879894	15.50850563	16.52141208	15.55424502	15.27019917	17.77538433	15.42776272	9.515789549	8.710567007	8.32881115
Zm00001d034407	41.83632615	40.50651614	33.37275189	18.90663538	24.49161842	20.39650761	19.20184556	23.85277964	23.72053779	47.11020098	45.69305082	48.16691545	7.408180249	5.861633336	7.767039455
Zm00001d034408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034409	13.40218135	13.16308693	13.1348381	20.45810667	23.17649904	18.76809271	14.7565837	17.78206087	15.9997741	1.240758147	3.954778283	0.745110579	8.496058069	7.963511751	8.758325138
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Zm00001d034411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034412	0	0	0	0	0	0	0	0	0.019719793	0.044104995	0	0	0.017893041	0	0
Zm00001d034413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034414	0.030687394	0	0	0	0	0.112788769	1.021959266	0.074004023	0.302768539	10.49609787	1.470515946	2.090637283	0.051510269	0.050460898	1.046625042
Zm00001d034415	0.013950239	0	0	0	0	0	0	0	0	0.134677753	0.070366794	0.123627531	0.03122153	0.061170966	0.080641898
Zm00001d034416	0	0	0	0	0	0	0	0.08733455	0.022331686	0	0	0	0	0	0
Zm00001d034417	18.04039115	10.73966668	13.9545199	7.851280979	62.8627873	20.43279006	66.25989071	86.27400498	74.77105112	6.965292748	30.36230446	8.300781499	2.129179604	1.648042524	1.466518646
Zm00001d034418	0.44631176	0.029585859	0.496290457	0	2.568986384	0.431678663	2.086061182	2.124277864	2.027885927	3.466448019	0.414704646	0.494403914	0.13143084	0.128753322	0.108631011
Zm00001d034419	0.640454202	0.093075512	0.489820534	0.522257456	0.519318381	0.754465412	1.00742215	0.950451674	0.759478513	0.373700433	0.621256381	0.109148631	2.839190313	2.457309351	2.392231016
Zm00001d034420	31.6710488	28.96606361	27.94444239	10.76852835	10.24962405	9.894307179	8.42637506	9.425910775	9.79209026	21.02743912	16.84772421	12.83361735	23.88128253	26.27121862	20.49008478
Zm00001d034421	0	0	0	0	0	0	0	0	0	14.77550134	0	0.005629878	0	0	0
Zm00001d034422	47.49477427	41.61846414	58.26876358	80.75837728	144.2603432	72.4347841	84.14960791	101.0951768	83.70745275	5.789466913	26.07440099	3.424764739	31.05732557	26.4447036	41.66241542
Zm00001d034423	17.36363556	18.52388309	17.10682514	14.69909233	19.09160842	14.66861316	17.06713349	17.17946478	17.01413625	16.73841116	18.79194356	14.84234799	6.485539037	6.011833753	7.141885453
Zm00001d034424	9.200190915	10.53901618	11.37193915	23.47773088	20.84794863	18.16359396	18.67622533	18.60601766	19.05097734	11.67808681	15.69296646	14.15749806	22.93229625	24.6708616	22.00813337
Zm00001d034425	2.039991584	1.719824893	1.901480659	4.883201484	4.010304959	2.64035657	2.537519226	3.392095974	2.150667674	0.952954501	1.161771861	0.728971	2.319635701	1.388676626	2.111245655
Zm00001d034427	7.56007551	4.680027665	7.319049126	6.951223107	9.330253792	3.492981403	5.461482717	5.931564795	5.389571111	43.81746465	36.66049836	29.09790548	0.392270506	0.486753585	0.797045224
Zm00001d034428	0.831997638	0.357240036	1.182843759	1.910185008	2.624425357	2.09267626	1.693966113	2.089999521	1.717913085	0.660659888	0.54843276	0.097750676	0.479622583	0.66332002	0.896318527
Zm00001d034429	12.52969948	12.02246951	13.57900835	13.23337241	16.79621992	11.85425654	14.79339771	16.66136589	15.90846273	16.68826047	18.98098808	15.05404823	10.31663633	10.42825118	11.36887238
Zm00001d034431	0	0	0	0	0	0	0	0.059030962	0	0	0.06173631	0	0	0	0.056600938
Zm00001d034432	39.97983532	39.82665963	40.17338667	30.05383928	39.70874203	30.99195809	41.10018388	40.46169982	41.72378208	113.1596506	91.2755823	148.2272213	24.22167812	25.2715322	27.98760448
Zm00001d034433	13.19659716	12.94892143	12.27687681	16.15167984	22.80489437	18.33266757	27.54743272	30.35254606	28.28275854	22.95783949	30.1243387	25.60366017	15.44318885	15.43519252	15.45549726
Zm00001d034434	3.628232186	3.564537598	4.070231145	3.807041791	4.759574521	3.779161671	4.266388261	3.644763332	3.710933563	0.192945481	0.804006434	0.193083763	2.450950345	1.898188132	2.304185655
Zm00001d034435	0.076482428	0	0.237631465	0	1.612429098	0.468507193	0.737300167	0.922203985	0.778173369	16.77161842	2.893403846	6.036568065	0	0	0.044212062
Zm00001d034437	0	0	0	0	0	0	0	0.309566126	0	0	0	0	0	0	0
Zm00001d034438	0	0	0	0	0	0	0.071958725	0	0	0	0	0	0	0	0
Zm00001d034439	0.221217377	0.175135152	0.219943686	1.426759477	1.557369919	2.090737715	1.484485542	1.341310095	1.621344421	1.00245577	1.275255817	0.756168392	1.690408409	1.212531286	1.373783018
Zm00001d034440	4.729924601	4.042177411	6.670854799	12.38343964	22.8889543	12.37083517	12.55224246	15.32685533	13.63697975	0.65716669	1.776121364	0.349306388	4.877343896	3.656462362	6.116549519
Zm00001d034441	0	0	0	0	0	0	0	0	0	0.019681509	0	0	0	0	0
Zm00001d034442	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034443	0.805534468	0.971400297	0.816516808	4.025635598	5.337160108	4.024551182	4.706335164	4.105599728	5.509757953	2.600130468	3.335586001	1.721382919	3.254058429	3.175240935	3.659180897
Zm00001d034444	14.82134273	16.11530015	15.02528166	51.89330624	40.85365815	64.71522462	36.06937396	25.95239946	28.75643501	13.558145	20.66711858	11.93652596	27.63238304	23.45218875	30.07615717
Zm00001d034445	0	0	0	0	0	0	0.012111324	0.012497647	0	0	0	0	0	0	0
Zm00001d034446	6.429728495	5.580398619	3.455645469	3.614408933	7.532431046	4.740320416	9.685077339	10.10835618	10.48396446	11.58811636	17.35945299	16.46383227	3.625128047	4.008701104	3.968995539
Zm00001d034447	43.14683982	51.74400898	32.26240109	4.159710708	3.651836244	2.997899137	3.580352561	4.669509903	3.253996033	60.07885496	36.15675879	27.69593417	3.29186693	2.845759031	2.933607921
Zm00001d034448	24.06256439	27.19921224	16.91653569	3.216662367	3.093982958	2.721505658	2.674086665	3.604276383	2.895874178	19.43060718	18.64988622	26.20950838	2.460780902	2.075610263	2.516519697
Zm00001d034450	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034452	13.6200521	15.35310382	6.901568006	4.251903846	2.974834011	4.148963472	3.249457266	3.572533458	3.135028735	1.419606603	2.154983073	1.045742861	2.115959979	1.910765713	2.189407412
Zm00001d034453	3.834395883	6.386590339	2.471772114	0.469270731	0.25970173	0.702453772	0.397800658	0.442896622	0.17678032	3.101295057	0.677845265	0.396969135	17.68456209	22.21516233	10.08837546
Zm00001d034454	0.00506342	0	0	0	0	0	0	0	0	0.020949873	0	0	0	0	0
Zm00001d034455	2.315459757	4.842835231	0.87837464	0.098669965	0.027799161	0	0.061631315	0.114474974	0.032523964	0.821991535	0.991026166	0.344721442	0.029511091	0.052037801	0.09146882
Zm00001d034456	0	0	0	0	0.013343597	0	0	0	0	0.034916455	0	0	0	0	0
Zm00001d034457	11.66087076	11.33168988	7.110708047	1.477649613	1.455410813	1.357911188	1.616687441	1.824942942	1.640320716	6.167239591	8.925979648	9.585367451	2.121353277	2.115845061	2.023780243
Zm00001d034460	16.10505581	15.84706293	11.23482662	4.427691643	2.985010169	4.662335411	2.961359601	3.291638825	2.50243115	0.902846692	2.192233922	0.911731546	4.140000944	3.972284295	3.196963379
Zm00001d034461	4.237483275	4.78724017	2.074625362	0.149469241	0.03383943	0.461466383	0.500151439	0.309663047	0.221708756	0.637547787	0.971564065	0.445701633	23.35495572	26.67984902	13.10387926
Zm00001d034462	13.57252465	16.86153623	15.18117623	8.417367263	6.665777162	7.981535891	8.405532437	6.025433638	8.749768251	10.09110748	8.744407847	4.770203978	5.854318675	5.992049465	4.422203738
Zm00001d034463	0.020291256	0.006389228	0.012609017	0	0.04010506	0	0	0	0	7.080201897	0.818813605	5.181117424	0.005676642	0	0.017594596
Zm00001d034467	0	0	0	0.011060765	0.023371854	0.005432738	0.005181588	0.032081212	0.032813019	0	0.022367648	0.024561097	0.024811141	0	0.133295853
Zm00001d034468	0.566357217	0.842124526	0.459470966	0.824058844	0.570058745	0.491487767	0.845618527	1.479612089	0.766382863	0.694311088	1.011775712	0.304978733	0.915448316	0.750206641	0.873048308
Zm00001d034469	1.339141334	1.283870549	1.391047348	1.071867405	1.843523309	1.469222117	0.840780892	1.036299763	1.059938872	5.044508836	1.260224019	0.531381492	3.354945119	4.886075634	6.562647116
Zm00001d034471	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034476	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034477	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034479	269.7577885	375.5054958	350.6890534	153.4130988	122.1044416	166.0315923	62.45909202	52.83428572	76.90430353	213.424271	420.6863724	314.7321474	187.053793	169.3597016	156.4312264
Zm00001d034480	5.738182299	6.47733233	5.36852298	8.175636542	9.591493956	8.63917661	10.21107212	9.305026392	8.156643575	0.531350317	2.281963288	0.381519205	4.664032672	4.773790554	5.27085364
Zm00001d034482	0	0	0.781179299	0	0.759204673	0	0.612062718	1.073696306	1.356585758	15.82076598	8.454799488	5.33824625	0	0	0.060558667
Zm00001d034483	0	0	0	0	0.329924109	0	1.40438127	5.132504319	8.83165014	108.2947269	94.72453066	66.5131965	0	0	0
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Zm00001d034485	9.959849102	9.860279581	9.873675574	8.280994494	9.341225605	8.276877598	8.131412232	6.834993557	8.367633045	7.278025787	8.811892606	4.866113332	6.489310602	5.530685653	5.933464976
Zm00001d034486	7.391339584	7.471730919	8.486798289	27.70010872	17.54979914	22.96911764	15.63278624	15.80604871	15.93532786	5.172635028	8.934275756	4.84883389	27.24462372	26.41883774	36.30207422
Zm00001d034487	0.330055203	0.525101999	0.420988145	0.010832382	0.320449795	0.117052385	0.04059679	0.178039858	0.06427099	3.569730543	1.007666799	2.76139448	0.262427473	0.49511951	0.873637643
Zm00001d034488	19.001454	20.51482471	19.62378471	7.268805433	11.45089617	8.06034907	12.54359138	13.90282683	15.48518458	13.29787193	11.31512591	9.330382849	10.9477387	11.17293185	13.35629796
Zm00001d034489	9.025237352	8.240840247	8.343375978	4.408092702	6.531853596	5.492262841	7.420290116	9.193736431	10.78335996	2.197181777	2.691100813	0.746958211	5.978457651	5.686081674	6.236656469
Zm00001d034490	48.02568726	53.89847165	44.39620914	16.67690581	15.53501449	13.76990808	16.39950032	16.67772378	18.51482728	10.56993971	15.13037372	11.75198571	12.32615755	12.29182498	10.33742126
Zm00001d034491	28.44498671	29.64254893	31.22260262	71.17070914	77.20777563	55.81243063	67.59245526	77.37031131	67.71363428	42.06869611	58.80091446	48.4294235	83.4675714	71.66310231	88.10465566
Zm00001d034492	8.498185068	8.741884866	8.643159346	12.67205059	14.32506179	11.37056623	11.90839727	13.23888479	13.51017302	9.782259487	11.0478857	6.989946116	9.481881398	10.21971027	9.716320734
Zm00001d034493	6.940434745	6.421751574	7.695108077	8.721171234	8.60245494	7.108749948	5.634060786	6.418623065	6.481936989	1.36300377	3.682117846	1.252355011	5.487705412	5.293834568	5.88606364
Zm00001d034494	5.816037258	6.163989158	5.189750996	2.421522182	9.298981608	3.236862112	7.438348203	9.931260761	7.861636922	5.208937235	5.634819551	2.347279527	0.833384033	0.903878381	0.902017809
Zm00001d034495	1.839554411	2.172117739	2.442081158	2.242071269	7.29919255	2.612249966	4.36010458	5.822470226	4.833836868	9.427442743	12.3763248	8.000582116	2.374316207	1.581185294	1.836761036
Zm00001d034496	0.417928913	0.383635076	0.360941264	2.879976882	2.594742	2.134863474	0.695277878	0.691832173	1.118204219	0.087924336	0.303707459	0.117702377	0.951205165	0.962888057	0.712489974
Zm00001d034497	22.46100544	20.7576558	22.99882441	16.16927707	105.1256392	26.05634219	124.5340332	171.2787438	130.6827964	521.4858684	331.8327551	538.4858976	29.36759492	25.44845629	35.94869542
Zm00001d034498	2.879612628	3.809561066	3.068403192	2.900297107	2.862375788	3.256387473	2.814496246	2.468041681	2.586644939	2.566727765	2.786655903	1.872060353	1.613924964	1.457777989	1.597726622
Zm00001d034499	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d034501	21.88318049	22.04260028	17.88308793	44.43377607	64.92266605	60.22920243	48.44086921	51.4290961	42.96285563	23.59082642	16.65939776	21.18172506	12.51699525	8.154481113	26.86455869
Zm00001d034502	1.607010461	1.528619496	1.640210368	2.552845804	2.543694269	2.206586403	2.29205497	1.928328008	2.182950848	0.574604687	0.691813608	0.243663007	1.418945557	1.373017824	1.448043354
Zm00001d034503	10.37128091	9.941987324	13.09383674	10.4051157	8.667452926	9.899046017	7.289239955	8.394219409	6.733352567	0.801370434	1.410157327	0.182169677	6.563531767	5.264038792	7.427590916
Zm00001d034504	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034505	30.19796336	31.96464911	33.27699559	20.16763347	25.41157754	19.48324496	26.38004083	26.38456864	24.06619503	23.617077	27.98708093	17.7089883	16.32599091	14.02371917	14.8255673
Zm00001d034506	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034507	0.154914832	0.048778951	0.096264305	0	0	0	0	0	0	0	0.366286075	0.214509526	0	0.106139424	0.201490522
Zm00001d034508	0.663902449	0.349088023	0.280373758	0.016077482	1.104102462	0.157936182	1.310524106	0.715023316	0.524652484	4.471479208	2.072685275	6.062033128	0.057703158	0.014131906	0.104328793
Zm00001d034509	5.861049711	5.71483024	6.656626215	5.899909061	7.629891568	4.736903116	5.586276371	6.567980196	5.982911703	1.351930734	3.252371724	0.934713393	3.466415697	3.258669259	3.967887275
Zm00001d034510	44.0941079	41.29730481	42.9231571	8.700147916	7.013118709	8.098464134	6.529278214	6.330716222	6.986529837	7.995920729	11.23286956	12.19424418	4.452950142	4.160357489	4.036318436
Zm00001d034511	0.190235297	0.239602061	0.185306071	1.282449785	0.989102303	1.00154645	1.483935587	1.779248483	1.325245734	1.127464006	1.238365602	1.389705488	0.811243142	0.862351886	1.111578359
Zm00001d034512	1.927222403	1.270562743	2.095762966	6.027648165	6.963506137	5.109592072	6.228075198	7.479704014	6.926142926	4.713721371	3.664420555	1.467736543	4.094215405	3.79623782	4.92626081
Zm00001d034513	0.054036498	0.102088753	0.078349505	0.763775726	0.427206079	0.639953665	2.420429841	1.943812203	0.644205885	17.4140642	2.975523399	3.262325305	1.874525858	1.155115773	2.28028514
Zm00001d034514	7.701262776	2.130440212	7.048522825	14.96543296	76.85387613	25.08712805	65.45730132	82.42198112	62.41056139	42.4577989	24.94385064	21.7135472	2.761310289	1.854272736	7.017136362
Zm00001d034515	9.811486592	9.672384221	9.850492037	10.94301839	7.944707592	10.92938008	3.381288587	2.051177308	3.177077757	0.045942703	0.114820411	0.04920199	0.907077755	0.61836732	1.23498954
Zm00001d034516	1.825003813	1.515785347	1.365500883	2.740568768	2.80038325	2.65795865	3.122614135	3.244672576	3.390457953	0.844344438	2.03132748	1.015985488	2.052657449	2.217538659	2.045363047
Zm00001d034517	14.75871844	16.83850005	13.70836514	17.30850579	21.44831631	19.66754152	21.35020822	18.56575938	19.46825357	16.37899143	21.37569068	16.14826084	15.41444785	14.40974018	12.62269714
Zm00001d034518	2.650081118	1.769170349	2.827063187	1.638348271	8.579810939	2.6126974	6.465688998	7.590776465	7.784970684	13.48234116	11.83985708	9.966055457	0.948204622	1.047336508	1.301809813
Zm00001d034519	2.524634965	3.296834458	2.848885382	4.211031384	7.41506926	5.161363981	6.593843196	8.982999907	7.194969027	3.047541914	3.554745491	1.795820608	9.122511347	8.302780509	13.17349971
Zm00001d034520	21.32403288	19.90334867	23.92140753	23.77107692	28.05388934	24.32547624	25.08488128	27.7225468	26.59806632	34.25253429	36.83315171	28.19691328	30.2016604	31.14802866	35.10984103
Zm00001d034521	50.13349766	48.0341061	55.74531251	23.46508529	61.08659201	36.13086301	80.60570574	138.7912717	113.9330564	157.1396025	271.9972694	71.89828337	23.1750308	21.4230868	25.1562801
Zm00001d034522	9.905053777	9.2419539	9.462652964	7.350830819	8.767074247	7.151833281	7.195277799	6.902557097	6.874222047	8.180838744	11.68321401	9.58865459	7.045199905	6.660838533	7.743251367
Zm00001d034523	20.61665999	18.82676508	27.05539208	50.72254355	37.57408286	58.86580024	67.2835753	55.31210059	64.45387606	7.827806374	7.884295498	5.70955008	93.60377725	107.0072739	113.2035747
Zm00001d034524	2.37522639	2.260937576	3.033558764	7.262362193	13.83129561	9.749094526	9.490255417	11.8782679	11.4202705	0.784991229	2.277484112	0.933640259	4.54424496	5.267608696	6.137565135
Zm00001d034525	32.32071753	31.4354943	29.8357066	16.05216241	20.01169622	17.81207767	20.51235995	18.21104278	18.44985289	11.08290866	10.53724317	7.446216431	7.6822662	7.571932898	7.888298075
Zm00001d034526	0.264726521	0.166712017	0.82250725	0.330155433	0.049830861	0.185329263	0.596570674	0.319199927	0.373121394	1.17354059	0.190759221	0.963542373	0	0.020728751	0.08744571
Zm00001d034527	8.032815411	7.237804218	8.504924115	4.045803024	5.536462059	4.598914247	7.166113298	8.177005585	9.525662709	18.30095665	15.3502975	13.33047027	11.59923941	13.93695791	13.50191404
Zm00001d034528	35.72982555	36.3021585	40.88436909	45.81116659	81.00992666	51.24181519	61.46313867	81.73113332	69.32597674	58.10114305	85.35639588	46.20884792	64.68490416	59.59860881	67.28970284
Zm00001d034529	8.025844195	7.069129738	6.405420675	5.052406572	6.042986948	5.966543876	4.733757594	5.424577671	6.16779052	7.243769903	7.669811958	7.221398076	5.73084651	5.039520208	5.20127362
Zm00001d034530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034531	9.782878024	8.907587382	9.251709946	13.38852994	18.67471091	13.48353465	14.0586467	14.40516076	13.7190746	8.642470181	10.53863115	4.837959068	9.358222515	9.6308971	10.30049006
Zm00001d034532	23.65507151	24.17777342	25.26763098	20.24361382	20.00416128	17.75358526	18.38640022	20.57018897	17.81676013	9.753295269	17.78991048	7.999449943	16.9843279	15.61558328	15.48362565
Zm00001d034533	2.438022848	3.123099802	2.60599132	1.203785579	1.666528401	1.605592399	1.288293302	1.038426664	0.63111139	0.52789089	1.190946214	1.304277974	3.505723663	2.257610747	4.776375954
Zm00001d034534	10.54608182	10.83425999	11.88566095	19.94400606	15.025319	20.48823503	19.49223224	18.58905538	13.28982883	5.477719025	8.988981379	3.392432069	16.95940148	15.19312826	15.58830089
Zm00001d034536	0.306358183	0.385859265	0.047592856	0.811912852	1.009179626	0.703745048	0.850201406	0.230873897	0.330596529	0.052814805	0.386327498	0.763581807	0.642796208	0.503760897	0.487013817
Zm00001d034537	0.709572084	0.885484352	0.229932372	0.776365004	0.542050445	0.778657313	0.574799101	0.356930089	0.4080217	0.426268705	0.513270924	0.296570263	0.526108382	0.412789587	0.452960703
Zm00001d034538	199.2550402	190.8838122	190.6552038	319.5977327	100.6755709	277.7694857	120.483116	89.09790483	104.1039202	0.675486552	1.208401723	0.754859689	397.7146343	358.237949	359.9145898
Zm00001d034540	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034541	0	0	0.200125439	0	0.084870937	0.039456142	0.094080312	0	0	0	0	0	1.135228073	0.759053154	0.707445063
Zm00001d034542	0	0	0	0	0	0	0	0	0	0	0	0	0.149985782	0	0
Zm00001d034543	3254.482806	3292.094819	4095.822666	4980.01362	2741.258587	5358.912742	2867.909228	1997.496713	2378.752778	126.2020335	100.7382754	68.62924811	4573.679929	4610.141196	4160.590254
Zm00001d034544	0	0	0.075069145	0.150664241	0	0	0	0.121387307	0	0	0	0.022303936	0	0	0
Zm00001d034546	0	0	0	0	0	0	0.06574007	0	0.034692228	0	0	0	0	0.770930386	1.008189659
Zm00001d034547	0	0	0	0	0	0.010904383	0	0	0	0	0	0	0.069719953	0.185384666	0.123482907
Zm00001d034548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034549	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034550	13.39404743	11.04707253	16.04330723	25.40858047	38.83218704	21.35787233	23.48220058	28.49258059	29.33786854	1.638368036	5.417886479	1.173387298	8.253019232	7.444608454	9.671188413
Zm00001d034551	0.054221588	0.046562925	0.006126068	0.027663878	0.081187382	0.111721271	0.02015934	0.249628499	0.066870255	1.274667759	0.317012112	1.679067802	0.322684392	0.416077258	0.421716277
Zm00001d034552	0	0	0	0	0	0	0	0	0	1.821728066	0.312316387	13.19645504	0	0	0
Zm00001d034553	13.29041961	22.32710418	10.85382269	5.362808773	4.043500249	4.233937998	3.485688656	3.880031981	3.608474931	0.249472719	0.996454568	0.537857241	7.240887402	5.479189079	6.281232651
Zm00001d034554	0	0	0	0.379736523	0	0	0.017789351	0	0	0	0	0	0	0	0
Zm00001d034555	2.149911786	2.755555889	1.806969304	4.150822608	4.115312692	4.56928819	5.686607155	4.983123304	4.489172604	1.047757623	3.341092707	1.864421868	4.79429098	4.441678114	4.680400499
Zm00001d034558	175.4848551	182.795292	160.7678889	101.7419974	87.66462167	98.61198639	132.6996409	128.7996267	111.9158288	99.82344525	140.8258727	65.66108115	212.1733292	208.3071957	197.0976128
Zm00001d034559	0	0	0	0	0	0	0	0	0	0.04505349	0	0	0	0	0
Zm00001d034560	1.45014708	1.04568642	1.320730669	0.59364964	0.393825199	0.379737409	0.168156178	0.266953785	0.368608438	1.541978489	1.228427598	3.605219044	0.3592372	0.25483775	0.089587599
Zm00001d034561	20.47713081	23.54506945	27.00035863	30.31964993	17.13274379	23.32134594	14.39471721	15.19431304	13.32339948	5.820421172	12.19907809	4.691463225	28.5517499	28.13299275	27.14476421
Zm00001d034562	22.16237921	19.06165515	18.38261287	40.51707037	53.10075315	45.97649635	50.77102557	53.46245043	56.94385564	36.53194402	42.45084934	49.12421909	8.655861479	6.745250081	12.10726823
Zm00001d034563	0	0	0	0.093170327	0	0	0.116392255	0.240209781	0.030711153	0	0	0	0.027866211	0.163791111	0
Zm00001d034564	44.30815514	45.11583497	33.361881	117.5050716	66.30254958	126.0978227	25.38036435	19.26084211	18.11435165	1.299151789	0.804485113	1.220162714	167.3916783	153.1525414	139.3539041
Zm00001d034565	2.570617993	2.713329151	2.448723247	3.435391879	3.316999041	2.947704912	3.314891803	3.846748269	3.898674297	2.697370303	2.698307417	1.957399422	2.069421389	2.425285843	2.311544045
Zm00001d034566	0	0.072424689	0	0	0	0	0	0	0	0	0	0	0	0.015759082	0
Zm00001d034568	3.633699582	3.962199347	4.362652481	5.287091236	6.686849868	5.983795771	7.017658069	7.011615622	7.814716154	5.483229618	9.36949162	9.802223063	4.769031094	4.444429485	5.756997997
Zm00001d034569	0.464014225	0.584427633	0.331056029	1.168113462	0.668018557	1.852826685	1.214931031	0.797799189	0.657037225	0.106658686	0.010835867	0.228450622	5.336703399	4.709895254	4.887780979
Zm00001d034571	0	0.010255491	0	0	0	0.009975659	0.028543485	0.107997831	0.070293604	0	0.010267936	0.009019876	0	0.026778237	0.084724424
Zm00001d034572	1.157070579	1.143447207	0.995545884	2.131271236	2.861576136	2.551625599	4.659327443	4.335739632	4.522457209	57.03111847	15.01753829	28.27738305	1.075679279	1.22939305	1.564116819
Zm00001d034573	0	0	0.063209262	0.025372277	0.067015835	0.012462152	0.142632473	0.257568691	0.213264279	0	0.076963681	0.011268134	0.045531398	0.011150957	0.035280831
Zm00001d034575	8.952199782	9.285564854	10.48943923	13.17133788	11.78433589	12.72492056	11.1711671	10.52068616	11.32400404	7.411145668	7.139556602	5.99458031	12.57027039	11.65717618	10.86124009
Zm00001d034577	0.002905682	0	0.00361119	0.043486087	0.026800636	0.021359148	0.010185868	0.010510773	0.003583512	0.016029658	0	0.016093913	0	0.038223728	0.050390474
Zm00001d034578	0	0.071745707	0	0.106563562	0.018764434	0.226811164	0.049921365	0.120198722	0.210755287	0.157124046	0.071832769	0.015775388	0.063743957	0	0.06585755
Zm00001d034581	6.596494051	6.828968151	7.676649287	6.574633261	6.036006008	7.102835287	5.725333601	4.82534799	5.62692042	1.531438226	2.199752189	0.870786196	5.642890886	5.250733391	6.173185413
Zm00001d034582	2.853377705	3.327629424	3.219029638	3.45316863	3.134385683	3.589940479	3.293757667	3.065194126	2.85785947	3.564275612	3.629700231	3.709998776	2.296395099	2.072676952	2.321443937
Zm00001d034583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034584	0	0	0	0	0	0	0	0	0	0.190453389	0	0.122378768	0	0	0.0478964
Zm00001d034586	6.341696377	9.876715009	6.168772927	11.34650021	7.488364897	10.69792918	28.30153986	20.4547682	21.98924034	3.330300915	3.444897115	1.877848153	29.4097901	29.25183595	27.88929195
Zm00001d034588	0.093638588	0.058969074	0.019395719	0	1.028188147	0.133840097	0.711208494	0.451627294	0.288705873	0.086095368	0.137761475	0	0.838276698	0.359274681	0.360863289
Zm00001d034590	21.83605985	21.36407158	20.30823712	12.99243839	12.3006581	13.71635636	9.41438714	8.375093922	10.09668026	1.231252599	2.943730505	1.013369009	7.025196658	6.205470017	6.687270376
Zm00001d034591	4.077101714	4.234440126	3.784189685	5.956461716	4.933025272	5.93454457	6.144168057	5.548121049	6.536656299	17.94003305	12.59632236	33.22442339	5.054858093	4.519122758	5.132680274
Zm00001d034592	0	0	0	0	0	0	0	0	0	0	0	0.014639316	0	0	0.061114788
Zm00001d034593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034594	0.255238906	0.088405445	0.111024082	0.326280964	0.365742241	0.406513359	0.324343247	0.415476031	0.291171832	0.07920372	0.112652557	0.063616967	0.249917965	0.307782037	0.331977383
Zm00001d034595	0	0	0	0	0	0	0.0183408	0	0	0	0	0	0	0	0.090733709
Zm00001d034596	3.209767964	2.720098114	2.708654309	2.471039114	4.54262464	3.665389786	3.611702267	4.730305004	2.443539564	0.245933289	0.699588708	0.417018953	3.547489796	2.975657214	6.047441139
Zm00001d034597	22.61655752	23.95682743	19.91953396	8.086562509	6.662810302	7.666856259	6.847756193	5.758939404	6.3755733	4.641557848	5.516123235	3.806959533	7.757011138	7.580629769	7.26409183
Zm00001d034598	39.10042475	44.16468567	42.49824099	41.77942392	39.41963472	41.85152101	33.25042398	30.78765096	30.93222641	1.919072314	11.01070231	2.73600623	22.50015713	17.38936472	21.83856477
Zm00001d034600	7.438148546	7.735452047	8.159643348	8.084579034	19.27318367	9.82547873	14.33365309	17.01550443	17.77262825	4.665008141	8.803335105	3.065699725	3.692112005	2.888050507	3.017036468
Zm00001d034601	122.3643115	99.21215338	97.2336194	39.46265296	105.4917446	58.44149716	101.1243464	100.5384958	95.26089893	171.0556501	145.128132	62.07693288	88.66387217	88.08832881	91.30917292
Zm00001d034602	2.019973886	0.582206943	1.495240136	11.93274974	43.57033708	16.71810086	28.48315648	37.74460988	32.56896438	3.244367743	5.781223694	1.592298546	6.696215613	8.045299529	9.367085013
Zm00001d034603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034604	8.001183814	9.205674053	7.641364447	19.70354703	16.12260261	17.84661808	15.87967783	15.60064602	12.64217867	1.783001085	4.210480702	0.586379278	43.67434082	40.69782263	38.09636163
Zm00001d034605	29.878415	32.37262367	37.36995072	34.33813852	39.1179558	40.10914906	33.73208248	32.76187534	33.57975458	19.95935577	26.6893301	15.94700314	28.42073676	25.47979761	23.78587339
Zm00001d034606	22.10611058	22.85447179	20.78959607	17.88997087	19.78839046	16.58630843	18.43887531	19.93511559	19.96370241	18.39053963	19.93254596	17.39198192	16.23054176	15.10344058	14.67902054
Zm00001d034607	1.931888012	2.156790867	1.871286794	3.739770322	3.752746624	3.705006829	4.127155934	4.046477699	4.041213949	3.083233094	3.301866914	1.636847431	5.031929186	4.479000486	4.714894099
Zm00001d034608	9.448418773	9.448581857	8.046840722	9.104963817	13.57897292	10.93369742	11.42971202	11.76918949	11.92639566	6.70927651	7.364135048	3.770718131	5.474861711	4.986753417	7.485696782
Zm00001d034609	44.21653414	38.55040074	45.67495545	45.71061954	72.64658196	43.07137808	53.09412535	59.98697332	51.85694365	14.45483928	31.4937909	10.60244129	24.87931882	21.72210561	29.11900291
Zm00001d034610	8.441489552	8.054611612	8.265721503	13.44872028	12.92803161	11.4423385	12.20198564	13.20807964	12.82233416	3.833696051	8.523159661	3.324835213	7.677900018	8.736638317	9.062875195
Zm00001d034611	0.070108892	0	0	0	0.230946876	0.042946493	0.286727843	0.169070731	0.086463708	0	0	0	0	0	0
Zm00001d034613	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034615	4.368880063	3.64019517	4.076419411	2.565069806	14.80785043	4.594894657	11.56094395	13.69647474	10.66003145	12.12497061	5.98394513	6.030944807	1.308725494	0.825236632	1.46091085
Zm00001d034616	19.82083914	19.57449185	17.35857751	13.09827866	12.36434942	14.30780105	12.77318952	12.02602682	12.87193583	1.565608771	2.649316107	1.194179912	4.400389308	3.981731099	4.423550152
Zm00001d034617	9.115579144	7.894268438	8.675737774	4.675218351	7.69611351	4.796675255	4.245654667	4.514933007	4.338847142	6.736411304	7.640027433	3.987103695	5.924485223	4.764725378	5.513770169
Zm00001d034618	14.1386047	13.52942025	13.24527955	7.147502564	7.827429446	7.503160632	6.998130514	7.255228378	7.641207955	8.657819638	10.68272573	8.583602879	6.227450008	5.577036859	5.536315642
Zm00001d034619	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034620	0.523269128	0.492208921	0.70794374	1.668669727	13.03909949	3.627355651	8.738173893	9.575964667	10.8155039	9.747171906	5.4960421	3.316500182	3.750516556	3.594238816	4.977605545
Zm00001d034621	0.478224186	0.338807887	0.334315365	1.304669755	1.449300203	1.940760829	1.85802651	1.924501002	1.179566104	0.239086873	0.897045861	0.595974432	3.297850907	4.914807619	4.741052505
Zm00001d034622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034623	0	0	0	0	0.018532774	0	0	0	0	0.775921213	0	0	0	0	0
Zm00001d034624	12.04198922	11.96245886	11.21528207	9.988264169	8.682088133	10.22855054	10.11436041	10.78946618	9.737705454	8.895259232	9.492370198	10.5017534	10.71552732	10.18317825	9.223248996
Zm00001d034627	4.37151176	4.764319471	4.253206243	6.293119347	7.9842151	7.082640057	6.042166207	7.611823785	6.020636559	6.629478139	7.816665303	5.328795132	5.710500166	4.702228612	4.814769691
Zm00001d034628	26.30244759	24.9516604	31.29198194	33.30536253	51.85338276	35.43006601	41.9265966	46.92490705	41.89246204	11.82189753	27.18187237	8.956549144	18.58351441	15.88793878	18.03608003
Zm00001d034629	34.10148667	33.31110411	37.55306766	36.62232815	33.64578186	39.43666119	20.19946886	20.85856143	16.93599638	30.60221441	40.85484717	35.56992917	17.35572811	14.47635179	15.19653379
Zm00001d034630	8.508161536	8.533159636	7.606629545	11.98651128	12.21684405	13.014729	12.2643695	11.52300215	13.31046691	6.226458194	7.488948266	5.074975896	13.25060559	12.19013169	13.20654067
Zm00001d034631	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034633	2.722374774	2.637371765	2.785560935	3.882813055	3.630281572	4.090108476	3.570958461	3.386224228	3.430650524	1.129204102	2.175955359	0.972740801	2.411943836	2.477245533	2.565279276
Zm00001d034634	19.78333376	15.55963772	19.24533314	58.20760999	52.70404727	49.61235822	55.69741729	67.44800351	57.93273304	20.19528019	19.88167637	7.679847673	39.75689468	39.34945607	45.04531591
Zm00001d034635	1.594774393	1.303305811	2.087898189	7.986099163	14.83777124	11.48426691	14.77992483	13.51925995	18.67708478	37.17249908	13.55547678	13.60700968	36.87726996	57.26512095	117.1009407
Zm00001d034636	5.407628486	5.21876308	4.814987217	3.554551684	3.470134995	3.090272239	3.398755977	3.323694616	3.767611645	1.775716955	2.708488999	1.568894755	3.457891381	2.848534972	3.349262403
Zm00001d034638	15.56099412	16.1900464	16.47689361	19.35789626	21.61922138	16.91794988	21.86332976	22.03853405	20.73261517	10.49303562	18.40656528	7.414091656	11.82911622	11.04864793	14.29236858
Zm00001d034639	0.150896622	0.228065824	0.525097343	0.376383441	0.636250996	0.184869008	0.846348977	0.8369561	0.707170059	0.249733583	0.076114192	0.033431286	0.270173064	0.231585446	0.209348504
Zm00001d034640	9.408484436	8.286322727	8.088481725	4.623363437	3.781837298	4.496207617	4.042299538	3.95787665	4.272936607	1.149450047	2.215788963	0.83895825	3.835528198	4.063878803	3.751988006
Zm00001d034641	9.480817393	10.95152863	15.2004472	1.469842232	2.967800085	0.38503752	6.67148363	5.747433167	2.745471177	16.39869351	22.78832674	28.51900035	0.468921065	0.488078686	1.302011339
Zm00001d034642	1.373365965	0.786254325	0.659454443	0.2724913	2.220886397	0	1.787139293	2.4086789	0.615905863	3.917339222	16.21649362	3.181009752	0	0	0.68564025
Zm00001d034643	0.906022603	0.733589242	0.703754724	0.060533148	0.298454424	0.118928749	0.22686159	0.409671385	0.818079696	93.38188847	31.17457169	63.83935491	0.832820459	0.88679803	1.365472522
Zm00001d034644	138.2818791	137.6835908	136.5574708	130.1239806	153.5527928	144.1910639	162.5057048	173.1318416	147.4586163	314.651165	246.8590269	316.0653326	182.2259559	180.8037946	200.3821559
Zm00001d034646	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034647	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034648	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034649	14.13996194	15.02970071	14.76972911	13.55488506	10.56384003	11.76028349	9.813114125	8.901573961	10.47754858	2.356860686	4.297651956	1.12501053	9.823854443	9.077771372	9.946371738
Zm00001d034650	1.633297726	2.052181575	1.625852636	1.990292205	3.185329546	2.379974677	3.022764219	3.138188127	3.200054343	6.374630545	8.844778485	10.76845857	1.168501422	0.900638673	1.897426352
Zm00001d034651	0.692007456	0.411772891	0.636556826	0.373758208	1.19900917	0.273700445	1.464413112	2.522920745	2.425911798	3.051049624	5.373285812	2.583416276	0.756086157	1.081158427	0.573267795
Zm00001d034652	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034653	0.121522079	0.586720449	0.201370664	0.050519022	0.693867059	0.446643524	0.473328502	0.170949294	0.199827235	0	0.178783781	0.291669397	0.271974218	0.288636336	0.491736375
Zm00001d034655	4.69984841	3.521067896	3.841239191	3.991847564	11.67621255	5.871414652	12.94489328	15.84232829	13.97659112	7.65530702	13.59044363	9.053282807	4.559770965	4.733368957	5.239606626
Zm00001d034657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034658	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034659	14.9346445	13.6445491	13.83859128	14.86304465	22.02659812	14.03461762	19.66557514	23.78300476	20.69762271	58.25509447	62.91956094	68.68234045	5.570782252	5.695016946	6.420429868
Zm00001d034660	0	0	0	0	0	0	0	0	0	0	0	0.055541708	0	0	0
Zm00001d034662	12.91706093	14.60213332	12.80960831	8.289941984	7.491971616	8.732376084	8.06085607	7.292718287	8.744805653	4.405251774	7.179391956	3.44004135	7.521028512	7.440758242	7.616537887
Zm00001d034663	0.300125499	0.143382791	0.128619605	0.129070173	0	0.025358262	0.133022866	0.012478725	0.012763378	0.827845086	0.704733299	0.447108651	1.181265764	1.247961799	1.148643421
Zm00001d034664	10.76609671	7.943274718	9.597694416	12.02645912	11.52672354	14.34642925	10.86859442	10.50880259	10.80873546	15.83585918	14.34603017	17.37997036	7.886038142	6.868989737	7.780599155
Zm00001d034665	29.21910955	27.74096744	40.72740252	60.92761815	45.13434852	59.43160687	46.65123971	47.82299746	45.50447741	5.566017856	9.504191027	8.360140694	60.31354446	73.5629398	87.84765365
Zm00001d034666	3.174293207	2.367067085	3.175955487	3.572960999	3.201121158	3.130810114	3.294056906	3.16423029	2.430840532	4.045977103	1.763003754	4.10027856	1.679891045	1.557731727	1.589855363
Zm00001d034667	10.90523244	10.61976799	10.11546019	13.35040808	17.1660159	12.96112548	16.17012835	17.63306442	16.81919947	11.64024104	12.45569678	15.67201875	9.341840584	8.693493568	10.07668826
Zm00001d034668	5.198800492	5.127236639	5.99731992	18.47806873	10.77255428	15.77244577	10.7324742	9.878366472	9.884056904	3.462187409	6.812527132	2.752668205	19.82547793	18.83587621	18.64928943
Zm00001d034669	7.629036786	7.174570713	8.925147863	12.69882445	14.59604877	13.42173758	9.615805871	9.615897798	10.47503958	4.194650863	4.63064815	3.256490816	7.444383581	7.705311539	7.738262159
Zm00001d034670	6.576319522	7.241201782	5.31721773	1.878975556	1.602278915	1.966297723	2.241074248	2.398808476	2.028984847	2.003871087	2.221225194	1.797713284	2.246255342	2.195593604	1.989940368
Zm00001d034671	26.48843273	22.24432056	25.42378338	14.23759916	15.49947716	16.14423424	7.921149019	9.951780444	8.615355234	6.533415664	6.369242307	3.459036768	14.29059259	13.18026834	11.82543187
Zm00001d034672	0.131707456	0.265417645	0.335557148	0.70631725	1.015231787	0.70998248	0.654075694	0.659058231	0.479173871	0.127152407	0.058130565	0.05106484	1.009586375	0.584748469	0.944085114
Zm00001d034673	1370.090452	1396.930257	1353.051807	338.7656994	325.7717117	311.3387014	278.3528407	248.3846028	319.9918308	63.63825626	135.9653596	77.0307552	133.4950275	102.6918363	91.53609217
Zm00001d034674	4.06763854	4.839971651	3.345522231	1.097083984	2.03930449	0.591527163	1.282933204	0.73370317	0.725968866	2.243977663	0.658901452	8.887336169	0.599507755	0.290021997	0.382337012
Zm00001d034675	1.051633379	1.11118803	1.052595752	1.927716678	4.873134082	2.741081511	3.71124245	5.140204089	3.48176004	1.693727452	1.682155088	0.70366212	1.745472119	1.578381459	1.6401488
Zm00001d034676	0.176478923	0.133365514	0.26319423	0.264116229	0.620098325	0.245038938	0.687385411	0.510704186	0.493334236	0.016226235	0.178036467	0.156396274	0.197485582	0.038692479	0.380862941
Zm00001d034677	45.24002408	41.10334705	47.95747915	47.43797267	58.88400349	51.19291193	49.04103171	60.39847327	43.23882671	7.247980173	30.95760629	12.37604636	32.20097971	28.88601549	35.39312219
Zm00001d034678	0	0.03078114	0.012149195	0.182876331	0.11592757	0	0.154208294	0.058935989	0.229065454	0	0.055473286	0.005414506	0.054696281	0.021432802	0.0452079
Zm00001d034679	5.897606431	6.491062715	5.359826422	16.37784458	7.998265863	14.12052228	7.508677304	3.796091244	5.996885466	0.817838093	0.965323648	0.370248855	2.835299046	2.612067792	2.592751507
Zm00001d034680	3.758414824	4.733737378	6.422582382	15.35101206	13.43301314	13.81371723	8.344244729	10.42312339	8.111543709	1.814215786	3.613854775	0.57246769	12.66993295	10.40326843	14.82813297
Zm00001d034681	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034682	15.46342929	16.8861661	14.20646765	17.36538311	22.28268615	19.28261431	20.72701533	20.00291441	18.30560211	9.205620561	14.21202282	7.228574444	16.99553173	15.75512207	15.54016817
Zm00001d034686	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034687	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034688	14.74412505	18.44743366	17.13207015	21.16572813	21.37672844	19.378009	14.8921191	15.4259451	12.0488873	1.614211361	2.500907823	0.558234897	6.876161479	4.633282452	9.359446386
Zm00001d034689	0.056586233	0	0	0	0	0	0.044080676	0.004548674	0.013957304	0	0	0	0	0	0
Zm00001d034690	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034691	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034692	0.823455568	1.414289093	2.023527076	6.675357409	2.379653848	3.668529968	4.90944681	9.522813425	5.100826122	0	0.035400133	0	15.76975764	22.18797805	25.28280822
Zm00001d034693	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034695	0	0	0	0	0	0	0	0	0	12.49086753	0	0	0	0	0
Zm00001d034697	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034698	12.66599613	12.29268693	12.69755777	12.26335748	17.53220242	11.91248435	12.68589993	15.71306752	13.97521692	3.932302321	7.352295189	2.955987149	7.567464446	7.473407405	9.043967334
Zm00001d034699	1.11847147	1.629922758	1.700213769	10.69814581	5.931540252	7.927243066	4.104420582	4.837206194	4.149556437	0.433445643	0.629447388	0.020479206	18.09138844	23.32644569	21.25609209
Zm00001d034700	0.500989545	0.157749546	0.407105068	6.380296131	4.138489897	5.984362222	5.066015945	4.565445889	4.62206099	0	0.133642361	0.010672567	0.754685329	0.982227247	1.347782424
Zm00001d034701	8.415700269	7.660943825	7.84597216	8.823934784	8.63658531	9.826981585	10.12216869	9.26758491	10.15002797	2.353133442	4.123662917	1.538786401	5.213765108	5.139151185	5.263743687
Zm00001d034702	0	0	0	0	0.015871239	0	0	0	0.007427499	0	0	0	0	0	0
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Zm00001d034705	47.54036428	60.46095862	47.75620482	411.4196361	196.8802546	479.5267068	468.3244572	281.2591898	212.9938182	51.39820478	47.48267787	34.18178994	2652.267217	2681.128629	2911.305565
Zm00001d034706	0.112200783	0.043482247	0.042905681	0.043055985	0.125096225	0	0.040340497	0.145695421	0.063865239	0.130936705	0.141488788	0.162534301	0	0.05676851	0.02993525
Zm00001d034710	16.99701227	17.37085477	16.48582079	23.31931313	21.55139636	24.56383863	22.61989447	18.29048606	16.87607798	8.884730162	11.33317003	7.663586834	11.48456589	10.29043892	10.06758317
Zm00001d034711	0.500869534	0.361159925	0.591358024	0.949487387	1.314988413	1.064654488	0.687687614	0.848528181	0.861706909	0.119159837	0.748460873	0.119290716	0.882770319	0.711046649	0.771615482
Zm00001d034713	0.048908576	0.11995893	0.060783722	0.192621012	0.257776893	0.151376077	0.339890148	0.437638838	0.139683414	0.738432721	0.068167418	0.929592438	0.446483753	0.558727842	1.178516584
Zm00001d034714	51.20441512	56.38027789	45.83578496	97.71780851	72.17111064	106.5874817	81.77944052	81.45408997	83.5132328	59.28910092	42.90195658	34.35966351	81.64372832	83.33533971	94.71886645
Zm00001d034715	29.46494251	27.3616505	27.8781133	68.07092178	43.73226917	66.15524793	63.75345887	66.48957381	56.04743352	7.37550315	14.8782393	3.665076453	120.1064225	146.105037	155.0990417
Zm00001d034716	0	0	0	0.019733993	0	0	0	0	0	7.136050409	0	0	0	0	0
Zm00001d034717	7.874008814	7.826168606	5.934995447	8.857500928	12.51165488	9.122902597	10.18055206	10.41155001	9.90943626	4.503116436	7.604586894	2.362079222	9.420228031	7.913465763	7.992784738
Zm00001d034718	33.87899947	38.21584908	30.04877753	20.74779709	19.68159446	24.36430508	24.21043773	25.81893385	21.46843968	10.52143261	10.83367521	8.181994536	13.5232583	14.53072274	12.78897666
Zm00001d034719	9.322004429	9.640266965	8.892483738	8.612571562	10.39339943	9.54910612	10.47380986	11.71012411	11.07366436	18.02716246	16.59115816	18.85707501	6.061854089	6.348493054	6.43406489
Zm00001d034721	68.90533122	79.08712833	61.17951017	79.92792818	33.77439378	57.28226797	17.65225112	16.71092598	14.89990869	0.458416878	0.899048611	0.256141607	111.3376485	113.7535329	112.979811
Zm00001d034722	1.571406198	2.127631315	0.830003005	3.821589802	8.74810839	5.005487765	9.777701925	13.59488999	7.170524722	29.9619301	17.58664347	20.32305162	4.308212284	3.186866712	4.859833021
Zm00001d034723	16.79771153	11.7179683	15.54238231	0.413552284	10.31146592	1.369644901	51.01320073	78.27517875	73.41236152	342.6022851	525.2483759	405.277262	0.031805717	0.07270146	2.278315253
Zm00001d034724	67.73170867	84.97126163	87.78040421	229.8018003	96.94569663	159.4309723	34.37326254	50.82464741	35.39863686	9.658130575	20.50222068	5.138710413	503.5294285	527.3281553	500.1907803
Zm00001d034725	0.425063672	0.647423301	0.663409318	0.789017262	1.471847986	0.423875361	0.808560077	0.774754703	0.414500638	10.90665827	0.735467831	1.160740048	3.086258408	2.340685124	3.120019302
Zm00001d034726	1.934486091	2.567310774	2.146017491	9.699004522	14.40424219	6.744189958	7.327489312	7.013304377	6.949120209	32.40963222	39.99714071	40.01105825	21.57487785	19.11432938	22.93568931
Zm00001d034727	0.129892959	0.175870712	0.181610271	0.78973471	0.872880449	1.046323456	1.168705411	0.677387303	0.736892596	0.00895719	0.122849391	0.032375143	0.628657745	0.43785916	0.668274239
Zm00001d034728	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034729	0	0	0	0.009186514	0.407641145	0.063170218	0.576677842	0.683889283	0.535972498	0.081271058	0.148619522	0	0	0.06459865	0.195869438
Zm00001d034730	25.01067761	26.48238847	21.42730931	21.53685504	19.44686872	21.99217507	18.84671775	16.8363103	20.43710598	14.58393614	17.27473172	19.00703831	18.41326572	19.47958487	18.5336466
Zm00001d034731	0	0	0.059166511	0	0.857304828	0.087488212	0.018543049	0.468795946	0.381634647	0.076601392	0.220125955	0.483424543	0	0	0
Zm00001d034732	0.090537973	0	0.084390644	0.621032678	2.535062563	0.610067727	0.590681057	1.173558009	1.28407195	0.187300187	0.152228385	0.158798608	5.749620517	5.12796344	7.109126289
Zm00001d034733	42.04705278	44.51162238	44.78827742	29.06132509	33.66535131	29.86485465	34.86571556	41.46018778	41.96626827	58.65964373	58.11124421	60.84649441	27.04131412	24.10589183	27.38240458
Zm00001d034734	0.153399176	0.245042809	0.134846427	0.629932385	0.62116746	0.930507341	1.057994127	0.59549543	0.747506438	0.030960403	0.02830848	0.045590612	0.900160973	1.074593409	1.154940291
Zm00001d034735	3.059172483	3.366733161	2.809012484	2.637349763	3.706087757	3.420418033	3.543408326	3.763871482	3.439482336	1.06911256	2.741599147	0.983742642	3.007861725	2.995423803	3.629533643
Zm00001d034736	2.161805955	2.253451373	2.307268859	4.745490633	2.783421807	3.578098671	2.158832645	2.587698324	2.248056399	0.328180273	0.721866251	0.139258598	5.873236339	6.760094871	7.028265859
Zm00001d034737	0	0	0	0	0	0	0	0.033101197	0	0	0	0	0	0	0
Zm00001d034738	4.756762141	4.455195085	4.679740778	5.816802872	6.239541264	4.709328232	7.458257208	7.850940925	6.473276643	2.016302308	3.480348249	1.240305939	5.61824675	5.566334549	5.788043856
Zm00001d034739	10.09829797	11.76083363	12.04022618	34.10033977	37.64975097	35.00642185	35.36449995	34.32036813	33.94301847	11.37366445	15.06910564	9.523437767	29.19715899	28.62429531	27.80480703
Zm00001d034740	25.56764148	27.60400115	20.21736069	18.77036507	22.31686949	22.31560928	26.10724466	26.54868264	26.01608296	31.41548427	27.50960587	22.60421179	16.17242833	15.26483341	16.32172878
Zm00001d034741	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034742	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034743	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034744	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034745	5.608711352	8.22053377	6.016225189	81.3578314	62.79555534	47.22069121	74.78330264	113.7403212	59.39233253	2.578445878	9.009355361	3.439381304	63.2302697	64.54059754	53.99836651
Zm00001d034746	0	0	0	0	0	0.109471452	0	0	0	0	0	0	0	0.024488377	0.02582649
Zm00001d034747	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034749	0	0	0	0	0	0.015638779	0	0	0	0	0	0	0.01428436	0.013993358	0.029515989
Zm00001d034750	7.942127906	7.591750224	8.545084502	10.36356173	11.62555584	8.454833474	7.528078114	6.995774117	6.86806368	0.707811196	1.083228978	0.354820229	2.863386707	2.821014083	3.433850545
Zm00001d034751	33.8413549	33.15146468	28.79203703	30.54472142	57.05866808	41.90033302	42.16674942	44.2020017	40.89137071	14.30370623	23.39695907	4.699977677	11.07826016	10.08969384	11.53642605
Zm00001d034752	3.059900199	2.754687559	3.232639394	3.510708712	2.895489902	2.827446227	2.088055902	1.955000309	2.148502047	1.693752014	1.487770297	0.997396222	1.578881364	1.293342228	1.084829897
Zm00001d034753	1.730535939	1.453077613	1.935643643	0	0.076007833	0.353357218	0	0.278217658	0	1.35246014	0	0	0.387305057	0.379414853	1.067059043
Zm00001d034754	0.016027238	0.030279548	0	0.204881877	0.285096202	0.215991153	0.243461759	0.444479617	0.093888639	0.093942864	0.146528744	0.133156851	0.210736178	0.210835452	0.305739624
Zm00001d034755	0.280132066	0.094418593	0.304017398	0.546195918	0.837007466	0.642895981	0.765316864	0.685065817	0.671497366	0.571360166	0.303501223	0.244757536	1.695423695	2.370220465	2.659390602
Zm00001d034756	58.93820846	47.3712989	86.38801476	79.8705736	221.8506484	93.64625878	87.7551043	130.0435702	96.8162956	106.3415541	179.21797	66.02946416	237.2975049	215.2783014	267.223596
Zm00001d034757	97.25619295	102.5822577	101.4339277	15.01395218	22.99041736	16.08001652	23.99771004	32.22314443	35.89477497	66.22125919	98.94246525	98.83375637	6.768096516	5.9586417	6.334352078
Zm00001d034758	9.746086079	7.309786386	10.12049418	8.21073419	14.1817249	8.171338338	10.64317848	12.24510618	11.18005987	14.68934035	17.67452867	13.20180724	6.128098558	6.069382102	6.86927666
Zm00001d034759	5.287239403	3.902866778	5.198760108	4.718472257	6.296636711	4.734557108	5.452115433	5.673743555	5.564012799	5.490813373	5.664277406	5.93368308	3.620368915	3.642058586	3.509352397
Zm00001d034760	98.58776531	110.9666937	122.7102482	115.6365552	404.507227	171.687727	449.7664878	556.7344451	404.576686	629.0712774	401.2869568	293.1211447	123.6882747	120.548117	227.2386794
Zm00001d034761	15.04718696	17.85842553	16.24079331	28.63107107	31.48061975	27.27818829	25.17455467	25.73801585	27.58648326	14.47097239	20.96063191	7.026075946	31.79924603	32.21616011	33.87445837
Zm00001d034763	0.987016888	0.449650515	0.65248271	6.521493551	4.233671303	3.24176751	5.52125701	3.671639712	5.387047593	2.43288845	2.303945036	0.604844371	5.851519027	5.410012864	4.345991337
Zm00001d034764	4.100014052	3.695066023	4.074909497	4.233884355	3.303764679	3.666237895	2.429766889	2.99964049	2.404649769	1.00581556	2.633577902	0.722750281	5.56602146	5.766474316	6.57631881
Zm00001d034765	0.168132008	0.277938789	0.143656531	0.262108684	0.221538587	0.102992357	0.110510017	0.177387815	0.077757523	0.01449261	0.039753723	0	0.211663256	0.138234159	0.279426347
Zm00001d034766	18.97232462	23.32676752	22.85234136	22.86611705	13.67232439	19.30463626	12.43522293	12.91197605	15.46767668	1.942291411	7.187465408	3.414474658	28.01017271	28.24059602	30.24455196
Zm00001d034767	0.040834032	0	0.020299462	0	0	0.030016366	0.038171653	0.019694619	0	0.04505349	0.04119442	0	0.027416756	0.134291099	0.075535542
Zm00001d034768	42.23434765	41.17579714	39.726197	60.68827938	64.58694762	63.72602642	61.93970164	54.66855472	59.73799716	8.871165065	14.83725923	7.372299353	24.03463929	21.59601065	25.47582753
Zm00001d034769	0.018987825	0.227194739	0.082593436	0.663062162	0.237682827	0.66298648	0.366090013	0.068684984	0.245881169	0.104749364	0	0.021033851	0.254975829	0.187336084	0.87810067
Zm00001d034770	11.81129445	13.6589007	12.56666925	24.54750377	24.66842888	28.06934994	27.34600192	24.95413466	28.61416375	19.70494686	30.68935576	22.69700794	19.47640593	19.34454353	21.66039787
Zm00001d034771	2.637299332	2.773247526	2.098304402	4.46234915	7.134093342	5.163644703	6.868987882	7.821172368	7.173785745	10.53788672	11.17897469	8.395843537	3.318976237	3.107257158	3.424275992
Zm00001d034772	3.183570186	3.249067237	2.20451697	8.820982754	6.40022789	8.356597164	7.744459008	5.657083597	6.582012915	1.385023773	3.966713761	2.664553236	6.20978619	6.128677635	6.040641038
Zm00001d034773	0.546101273	0.343908287	0.041837441	0.620430259	0.808282473	0.174135984	0.603153898	0.518660894	0.272165515	0.06706252	0.042451103	0.078725876	0.058599096	0.086107967	0.056217663
Zm00001d034775	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034776	0.317935673	0.480529387	0.088323487	0.401180468	0.53228358	0.064155362	0.41084396	0.451009473	0.064581648	0.020634622	0.018867157	0.103586679	0.025113898	0.06560607	0.025946614
Zm00001d034777	8.326473912	9.915324242	7.505418492	5.476535332	4.591962823	5.488782853	8.349980508	7.690132809	7.93555198	4.712416716	7.121643478	3.38684002	11.83912125	11.98992416	10.41398717
Zm00001d034778	0	0	0	0.353205026	0.1017732	0.520453258	0.391097703	0.372528728	0.508035344	0	0	0.014260238	0.288108281	0.465694219	0.386959618
Zm00001d034779	6.987410747	6.882654083	5.915082938	14.88225788	9.232746565	22.79009777	42.13992626	33.52378287	33.99259349	0.121557285	0.03704842	0.032545213	4.443812265	5.281911358	4.732685849
Zm00001d034780	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034781	9.611000322	9.030034136	8.292818111	16.33058476	22.5401985	18.4574258	20.21981121	19.79544728	20.30630077	19.7906301	16.31016497	15.10294594	10.50392806	10.58862491	10.7348579
Zm00001d034782	7.886417032	5.82152172	7.009877158	5.737431705	24.4371807	7.511892859	36.2028793	49.62735028	46.75137892	64.92136482	51.19137813	87.3621489	3.434698173	3.150967198	6.888428398
Zm00001d034783	0	0	0	0.015486076	1.767026779	0.304253081	1.958767473	0.628832554	0.903510406	0.239753312	0.297509016	0.123795961	0.013895141	0.095284475	0.071779346
Zm00001d034784	7.026877994	7.21031982	7.590112032	11.26657451	10.78829073	11.5459234	13.32052809	12.22903369	12.88604195	5.705608314	6.274147727	5.07037539	16.93747065	17.68670914	16.9871587
Zm00001d034786	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034787	1.45520137	1.591669469	0.333149995	0.811912852	0	0	0.17898977	0	0.047228076	0	0.676073121	0.509054538	0	0.335840598	0
Zm00001d034788	1.967312824	1.602296949	1.507644894	0.589304642	1.281144983	0.450873946	0.684863399	0.454704183	0.437059818	0.11279094	0.406789759	0.125825627	0.437246686	0.328725331	0.336182111
Zm00001d034789	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034790	55.7851891	46.43814606	63.67129622	80.15623531	155.8321955	72.7325327	97.76381379	113.2032039	96.26897342	4.794435778	24.81182565	3.68236455	28.04297517	24.76429052	37.78238638
Zm00001d034792	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034793	16.36738295	14.39528014	14.84177873	18.47558602	28.49780487	17.48516045	18.56026072	27.29731208	23.00462859	22.148933	27.86464715	18.29336316	16.59392534	14.84231866	19.63444393
Zm00001d034794	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034795	86.82741396	79.91205674	87.68091437	31.55117222	56.80104453	34.10377824	32.42931054	35.13034931	32.27448617	2.287541254	15.66588185	2.310630365	7.939872325	8.053614972	16.80336026
Zm00001d034796	8.815566494	9.240042496	8.619764194	5.9027049	7.924507912	7.378693114	9.385122353	8.988656439	8.864402576	9.87438876	21.0305168	16.04363672	4.318003015	3.984543195	4.047920999
Zm00001d034797	5.868312673	6.504492883	5.957413358	6.306686267	5.38149796	6.195335432	6.474078968	5.591994474	5.467707929	2.023342664	2.392166744	2.018059073	5.905336419	6.008893252	7.262969461
Zm00001d034799	3.906066834	3.704963501	3.735745449	9.221726217	8.493305571	9.324766686	9.29752415	10.4178283	8.167541768	3.414053339	5.037162079	1.93199814	10.68470141	9.101383868	9.069060893
Zm00001d034800	0	0	0.186198901	0	0.01645101	0.091776066	0.087533353	0.045162729	0.107783526	0.017219074	0.031488337	0.013830477	0.08382767	0.013686655	0.101041721
Zm00001d034801	0	0	0	0	0	0	0	0	0	0.193383441	0	0.097079311	0.078454101	0.038427915	0.141847031
Zm00001d034802	0.076661125	0	0	0.62145479	0.303036835	0.234800918	0.552400904	0.477585311	0.535751759	0.757719697	0.644480919	0.353840479	0.471824431	0.29413516	0.177261444
Zm00001d034803	0.101185119	0.028320674	0.167670886	0.32249499	0.474048851	0.454540592	0.985290108	1.382737183	0.707139451	2.697985259	0.964071375	0.597804178	0.767443696	0.62856186	0.623913634
Zm00001d034804	6.465485627	8.004440413	5.980004033	4.439329947	3.206383414	4.452606268	8.774197598	7.843382075	7.473557312	0.200930519	0.049653988	0.08287531	9.759875485	10.66175407	9.842213621
Zm00001d034805	28.89137631	27.46253166	27.72973075	14.46624614	14.38483536	13.70439008	15.92828005	14.44861833	13.85687223	6.470419719	12.79957888	6.427393071	10.55014742	9.128624612	9.483487241
Zm00001d034807	5.834816342	5.721814928	6.739219487	16.22866652	29.47060176	17.01986725	24.62021809	29.79694251	30.43471443	2.655039827	6.361118824	1.605294071	9.411199859	9.275378122	12.97088712
Zm00001d034808	40.47167046	48.11071163	58.6439387	95.87903903	57.71179302	82.30685858	26.47811631	35.90984112	27.51888423	16.34228511	20.29671282	15.96163491	219.6554989	223.7964722	231.6212945
Zm00001d034809	3.239421422	4.355743219	3.699533088	12.67707156	11.04596057	13.65459187	10.63454563	9.121049208	10.50604648	1.002212933	3.450181032	0.572217726	5.765735847	6.051381405	6.923583385
Zm00001d034810	16.86544745	17.0137904	20.37687037	19.92639013	16.59126674	17.72746929	19.07276094	15.33665088	15.81255558	6.819477274	12.39417367	8.46032586	14.91251157	14.07296674	12.89577003
Zm00001d034812	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034813	20.41303503	23.33076682	20.87445659	13.45131718	12.65147316	13.586376	11.73352908	11.33546035	12.24036388	6.790614224	8.297653705	5.518772757	9.861157005	9.241795253	8.557429724
Zm00001d034814	26.27051024	29.13248106	25.59386667	21.38096953	24.35003882	20.60577935	21.37329096	23.2929707	23.50776812	19.35462845	27.19729051	18.51443443	9.266984578	8.598219371	9.949544869
Zm00001d034815	0	0	0	0.099475904	0	0	0.018640417	0.076940006	0.059021317	0.594027897	0.060349584	0.03534276	0	0.034975232	0.036886376
Zm00001d034817	22.18888923	18.77256096	20.46310654	14.69601109	21.86781192	17.14410483	14.89929256	15.03651863	16.30148211	16.68328726	23.0552256	19.03139362	11.10530405	11.82663069	10.71186785
Zm00001d034818	0.065457344	0.047110724	0.011621511	0.046648892	0.098571033	0.068737888	0.076486907	0.03382571	0.115324371	0.128966385	0.058959865	0.124304015	0.010464124	0.020501897	0.10811089
Zm00001d034819	14.6455842	15.5811143	22.7342998	7.168069203	4.930581308	8.137681503	0.101891639	0.07314208	0.201053297	0.036601275	0.014342649	0.016799082	0.06788042	0.04571707	0.04383198
Zm00001d034820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034822	5.920613115	9.264799976	8.20545815	6.623163105	3.073230083	3.912526929	0.167714824	0.47592745	0.35402463	1.336172987	0.85973078	0.51673712	0.682612456	0.196678303	0.041485071
Zm00001d034823	1.039210385	1.246982398	1.274080567	1.177836595	1.087122814	1.27747618	1.878909944	1.418149136	1.294624159	3.15700702	0.64638424	0.361691485	0.950757329	1.131521492	1.1243477
Zm00001d034824	15.64586273	16.85007679	14.64225311	18.31096337	19.1965214	20.26795464	16.85803457	18.39827222	18.65482876	16.30094108	19.71802065	11.25100239	13.0888767	13.61973463	13.50102537
Zm00001d034826	12.96163978	12.54404059	13.23872188	15.56299291	18.15770162	15.48368788	15.66083524	13.88212974	14.48360047	1.853059999	5.104185951	1.52560018	10.14891506	9.642975318	9.699021042
Zm00001d034827	0.272516291	0.400441156	0.376315609	0	0	0.074193276	0.035381699	0	0.018671565	0	0.019091766	0	0.033883831	0.016596774	0
Zm00001d034828	6.588546468	7.323248564	11.29980562	24.69193277	17.8944874	25.99142433	41.54419946	40.02927782	41.08458495	0.533843143	1.41242264	0.328432175	28.44055694	37.17831291	33.40167996
Zm00001d034829	2.449654563	1.951029506	3.044437901	3.87503861	11.66509932	6.200930343	10.58674965	12.3795861	10.96260705	4.036783783	4.962991319	2.933099815	2.741242115	2.81374355	4.966648456
Zm00001d034830	0	0	0	0	0	0	0	0	0	0	0	0.032187827	0	0	0
Zm00001d034832	3.964975035	4.243705864	4.213716181	2.782355643	2.725994758	3.588174479	2.796317166	2.486045834	3.338181196	0.66106327	0.813326945	0.355281748	4.657795114	3.770869146	4.429213127
Zm00001d034833	13.34059125	13.16744743	12.81872961	10.56768062	14.34758059	10.22661706	13.42750693	14.84913331	13.57058436	11.4814234	13.93605778	7.666857986	8.657367462	8.6222978	9.537263933
Zm00001d034834	49.46437509	54.1968721	50.82547815	29.26619199	23.9379534	30.18801114	24.00816013	20.90023544	23.40110433	23.08700059	19.00678557	19.65093547	21.3847544	19.67627015	16.73942485
Zm00001d034835	10.8891438	11.53655906	10.515473	10.15850017	9.128281353	9.615730977	10.68063902	10.0117829	10.02774764	7.324207485	7.948738962	6.958726548	6.622679277	6.382866531	6.001506945
Zm00001d034836	0.092165622	0.103184837	0.241814491	1.021733027	0.566728064	1.442809135	2.6325574	1.778092177	1.768134247	0	0.012913756	0.011344099	3.300361293	2.480975251	2.770456947
Zm00001d034837	0	0	0	0.096944818	0	0.035712435	0	0.058579944	0.011983243	0	0	0	0.163097545	0.117168268	0.303309826
Zm00001d034838	2.003542902	3.983123741	3.051481637	5.364924145	1.611153099	3.964683217	1.53780758	1.829625874	1.162787793	0	0.068117281	0.021759156	6.995349794	8.435506989	7.636069408
Zm00001d034839	287.0660233	360.0097314	235.8929213	27.9646643	20.51862516	22.71788714	35.16978751	45.43840569	18.06210596	136.9143346	114.2565052	160.6217314	96.81500239	82.46391877	86.65897575
Zm00001d034840	0	0	0	0	0.022759136	0	0	0	0	0	0.005445314	0.00478344	0	0	0
Zm00001d034841	2.083235645	1.778662805	1.767525469	2.523175324	5.555921989	3.006254486	3.475843644	3.69540311	3.273268933	1.754264071	4.06683985	1.531079419	1.199226976	1.13087863	2.200076405
Zm00001d034842	0.674332012	0.593103118	0.978519096	2.283379048	6.93451565	2.949213402	5.106313271	5.868790279	5.003768411	0.394866712	1.220899751	0.267081797	0.628130039	0.656631299	1.189029125
Zm00001d034843	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034844	0.085065456	0.229586263	0.0151028	0.197024185	0.192147801	0.372202936	0.198797971	0.161180763	0.029974085	0.435757353	1.057378361	0.538466578	0.203980663	0.159860125	0.056198443
Zm00001d034847	0.033344473	0.020998744	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034848	0.086081038	0	0.038902461	0.136635592	4.784447245	0.8724505	3.95941866	5.048169422	6.804005845	7.986614344	5.506493667	2.748005774	0.00875704	0	0
Zm00001d034849	13.11774267	14.45371007	14.60599716	13.46066044	19.61832936	14.28535966	15.69457665	19.71008779	18.86274044	15.44523008	22.56770397	12.07871006	4.831120972	5.925988938	5.609890114
Zm00001d034850	0	0	0	0	0	0	0	0	0	0.240572702	0	0	0	0	0
Zm00001d034851	0.087133422	0.010974487	0.108289673	1.336628997	10.76927804	3.298586252	9.692826497	10.84250918	9.649878808	0.096137083	0.461487771	0.115826941	3.42242891	2.216034235	4.271296569
Zm00001d034852	105.7786553	105.2019868	127.8469922	214.1456689	148.0615164	231.5272832	139.2373063	115.7684848	143.4101773	28.15889199	53.35611116	23.13792429	99.64088169	98.29778796	110.3302594
Zm00001d034853	15.4820728	18.0043964	18.80894736	26.77175798	20.52631524	19.7757297	23.79409924	24.19157446	24.40324381	1.68701607	4.688033351	0.571235104	32.46244898	33.29981053	30.39152636
Zm00001d034854	0.039285155	0.098959596	0.341765943	0.93090008	0	0.33690783	0	0.663165365	0.096898983	0	0	0	0.175845399	0.129197299	0
Zm00001d034855	23.22535577	23.30432748	27.72079438	37.31706801	53.83414638	34.26970348	42.56183307	50.32924162	44.60769131	4.592642612	12.23129453	3.796153606	21.28788454	18.96923037	28.34966292
Zm00001d034856	7.372746824	6.604095025	9.592008539	18.74880702	30.53424478	16.72563008	15.39203186	16.70028168	16.71058762	0.925988296	2.927067747	0.949179568	5.402434545	5.026004566	7.341053033
Zm00001d034857	28.83845335	28.91592964	36.06141156	99.12373956	101.4669979	112.6710308	100.4528209	110.175775	99.33583992	4.780111813	22.73121906	4.430098135	105.1340206	107.5223876	124.0833307
Zm00001d034858	15.74076588	15.35190751	14.45916907	13.1447227	13.81125994	12.07784714	10.60471679	9.269195226	9.167743256	1.579571531	4.20484502	1.401215803	6.846222685	7.175587852	6.201644184
Zm00001d034859	38.11639021	24.20558043	43.20944794	44.10528504	225.7391347	74.34545553	123.5965819	147.7977975	146.3391346	99.87667775	107.4416268	68.94802183	19.30647652	20.17404131	17.11875492
Zm00001d034861	0.027685771	0.097636928	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034862	6.141857139	6.237760829	5.940836561	4.324344411	4.898073144	4.557706685	3.830067022	3.637027955	3.893592114	1.450071042	2.068493943	1.050145604	3.285378827	3.413697243	3.158505417
Zm00001d034863	6.805176311	8.911945729	6.919002845	3.644568724	6.123463285	3.886859461	9.888431975	13.0097041	11.87153979	119.6692806	118.9473883	103.0881409	5.291284647	4.330698581	4.450028237
Zm00001d034865	9.65076839	11.65607793	10.06511317	50.11061403	29.66956108	43.93612922	51.5902343	52.07118155	46.74287558	2.960308108	6.157838103	1.952490055	108.5448733	118.0262578	108.3356702
Zm00001d034866	16.31669469	18.72520165	17.63244368	17.78460398	18.76592588	21.99919145	16.31360089	17.88267503	17.93305428	16.04352085	16.64578045	11.66186936	10.59442312	9.951531128	9.950643781
Zm00001d034867	65.57069571	66.2849683	58.60182536	31.67458375	32.14650708	35.82235345	27.66602324	31.59830986	31.54912874	16.82368002	31.24977795	23.48796416	33.59769326	32.7377484	31.40803639
Zm00001d034868	2.038730909	2.458288522	2.325747129	5.719532347	3.602771266	5.504047078	8.54107737	7.50577278	6.856750719	2.008390028	3.587755602	2.041721446	11.53106905	12.08481547	12.08177177
Zm00001d034869	0	0.314981153	0	0.02079289	0	0	0	0	0.020561491	0	0	0	0.27985152	0.036553382	0.231304567
Zm00001d034870	0.26806341	0.07502819	0.123388887	0.544812981	0.915737068	1.155531992	0.243624964	0.26336726	0.306107898	0	0.012519873	0	0.05555029	0.097953508	0.275482563
Zm00001d034871	24.72385486	25.53945802	29.51533316	18.39206644	15.40384567	13.8300249	11.20328978	11.75759799	12.71965915	6.153851303	11.58042866	5.902083353	10.76672067	9.066597491	8.812646972
Zm00001d034872	3.98023266	3.018768741	2.96798692	4.305707459	3.979010038	4.78092316	3.670168236	3.265579758	3.894971135	5.919002026	0.414629654	0.220456056	5.364175037	4.685773436	6.052225507
Zm00001d034873	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034874	0.168780666	0.186007389	0.078660416	1.552407443	7.839363403	3.101691136	5.793343646	4.858826665	3.330453925	4.33545978	3.112753327	4.346995814	2.596976037	2.312791157	3.536794367
Zm00001d034875	0.027900477	0.02342717	0	0.011598755	0.073525944	0.04557587	0.249946428	0.145780375	0.114696755	268.1369939	68.60762435	674.7075513	0.176922004	0.326245153	0.354824353
Zm00001d034876	6.605638765	5.060297139	8.08553823	6.123409209	8.185461267	4.922221645	5.02491831	5.245338888	5.228303036	1.291639906	1.795964814	1.147952031	3.125443483	2.751949605	3.222668614
Zm00001d034877	0.086036714	0.119199916	0.171082691	0.214602516	0.124702593	0.010540675	0.03016017	0.041496277	0	0	0.043398023	0.076246054	4.717614459	4.574348678	4.95361511
Zm00001d034878	0.181518829	0.096262584	0.189972324	0.202552682	1.598714014	0.36283934	0.591660628	0.748767124	0.860105436	0.21081633	0.216853643	0.021166139	0.609376195	0.659800043	0.673762779
Zm00001d034879	8.606231631	9.291069074	8.501224409	8.122511487	7.224306966	8.967764497	7.077740259	6.021383621	6.861255469	3.98702266	4.77089308	3.854453144	5.651964211	5.588859831	4.824065559
Zm00001d034880	13.64076312	11.71811015	14.41554385	15.99878497	22.24296376	16.96067392	15.03723508	16.25170415	15.1192649	2.479431449	4.457260679	2.036501802	10.00202361	9.508767638	10.92080626
Zm00001d034881	0	0	0	0.47361583	0.500384898	0.930507341	0.443745471	0	0.234172542	0	0.957770254	0	0	0	0
Zm00001d034882	0.570537496	0.409325746	0.924478037	2.026565359	2.312396771	2.521660147	1.080179149	0.687938353	0.99755276	0	0.009107166	0.032000787	0.347510639	0.292929111	0.258837916
Zm00001d034883	1.46780109	1.418697468	1.873740996	3.906683111	4.958243357	3.697265588	3.369100683	4.065510042	3.617338291	1.151364681	1.28843319	0.612841906	2.194669823	1.712865104	2.353873216
Zm00001d034884	4.940594437	4.659919196	4.401868006	17.13457667	43.36999404	26.92022228	42.12506509	46.78739523	35.02850256	34.44283537	23.32786956	32.93776068	18.47943633	18.35028041	24.96066361
Zm00001d034885	8.359322807	7.795031957	8.091958601	9.263575447	16.04206053	9.755656159	13.14927681	14.95485457	15.40598999	10.18259492	16.73997724	11.42826516	4.397154747	4.437943615	4.697631713
Zm00001d034886	46.29561688	44.47177204	47.40199439	36.13430702	45.58734874	37.05858544	36.46685901	35.68786812	38.47189302	24.14943359	35.35991861	31.42624576	24.66393587	23.4478193	23.34790796
Zm00001d034887	10.31119122	9.955474742	12.91050077	15.45321735	16.97361956	17.29170966	16.24483419	15.98522085	16.84854946	4.88633652	7.721516812	3.380821188	18.33671244	17.92093917	17.83162742
Zm00001d034888	0.397089782	0.226252022	0.52875466	0.271199106	0.298985167	0.231661579	0.309332942	0.877799799	0.804543006	0.195590098	0.143069416	0.020946573	0	0	0.054653569
Zm00001d034889	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034890	15.89891266	15.9313905	15.03748355	50.00875721	40.67191	37.06867079	27.33194759	30.17233238	30.84177822	4.650591174	5.175807558	1.26766511	77.36353671	74.26537605	63.04684412
Zm00001d034891	0	0	0	0	0	0	0	0	0	0	0	0	0	0.060737129	0
Zm00001d034892	4.932067653	5.619580073	6.72990869	14.9733942	6.213984843	12.7935026	3.193482049	3.632544775	2.704251945	0.113953283	0.264488857	0	22.97982995	25.43799318	26.28423513
Zm00001d034893	11.1410354	10.78113104	12.32456087	22.10160082	33.89024762	23.74876945	28.12286594	32.64894596	27.56804984	22.18966747	23.45393517	11.6973325	13.54035821	11.0052959	16.61969344
Zm00001d034894	2.962836487	3.361004493	3.072582518	4.979848686	4.85411055	4.783749257	4.069657062	4.039771303	4.476753863	1.217753637	2.103176877	0.907466886	3.244148869	2.936074682	3.947199569
Zm00001d034895	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.02621196
Zm00001d034896	11.03873406	10.71481665	10.29173735	10.69538123	12.14046667	11.60963175	13.14409207	13.95769757	13.92254657	39.38031605	40.17204121	60.44331074	10.09360902	9.321436322	10.46096422
Zm00001d034897	904.062128	922.8734167	1075.265406	722.8238688	428.5504219	730.3274175	312.6676691	218.0079241	335.8581663	15.0390158	67.97059163	15.3738327	229.2298931	217.1314418	172.8033696
Zm00001d034898	10.72319829	10.00542602	7.187813971	17.41502949	14.70760945	15.2465351	16.23779723	17.89540627	15.65313345	1.427695033	3.149999948	0.884979793	5.640946737	4.169191526	3.655500569
Zm00001d034899	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034900	26.61752141	25.17420561	11.26561662	35.92994047	29.22456734	50.34530365	29.94531544	25.76590283	28.95135264	1.857934436	1.493641712	0.607039566	76.55662576	82.36217233	59.78820645
Zm00001d034901	0	0	0	0	0.022075804	0	0	0.020201466	0	0.207958296	0	0	0	0	0.019369868
Zm00001d034902	0	0	0	0	0.015927371	0	0.032957223	0.019433417	0.024845893	0	0	0	0.090177128	0.02650201	0.027950154
Zm00001d034903	0.011622728	0.018298586	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034904	4.400806494	3.923791771	4.849101369	10.67521699	4.363976257	7.485231618	7.086183204	6.491642761	8.001240558	1.18885893	0.991673626	0.117268371	9.493900893	5.056416419	11.050081
Zm00001d034914	20.29903015	20.06285871	19.47223398	16.88555239	17.24786039	17.85702461	15.89607851	13.96839245	16.18503629	7.668996151	10.05776816	8.906807418	11.08107773	11.60036752	11.50694289
Zm00001d034915	6.485585368	6.915299467	8.2094544	9.647627218	11.18124147	8.993316011	7.706953158	8.423080295	10.19395728	4.786134063	5.643627944	2.92473617	6.479780762	6.106580754	6.856508088
Zm00001d034916	2.142855967	3.724294613	2.942254886	3.057593778	3.760592868	4.998372081	6.013798988	5.83328737	6.462585131	10.9696459	8.000429969	8.3029722	4.858676989	4.985370935	4.07857026
Zm00001d034917	0.13168439	0.165856976	0.282681563	0.141835914	0.197174434	0.351995772	0.328729132	0.353649481	0.250987032	0.181614484	0.105673426	0.072936995	0.730097164	0.997375997	1.94458546
Zm00001d034918	1.859853628	1.72882547	1.878445087	2.646222956	3.606913176	2.808103203	3.244553969	3.205913426	3.308119016	0.704484129	1.450143811	0.571650007	2.740782528	2.584441086	2.886173386
Zm00001d034919	33.34991126	29.9366151	41.64530183	85.14756322	136.052462	82.09103998	111.6005385	141.5537995	145.1991973	53.95519654	89.95899514	51.00110912	37.29823498	43.19379974	53.5600491
Zm00001d034920	0.35054446	0.160549834	0.396052442	0.13910395	6.949401451	1.600732908	6.051074602	8.395898777	7.290462624	1.758031281	3.214893162	1.606221327	0.285287641	0.541484251	0.221060309
Zm00001d034921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034924	0	0	0	0	0	0	0	0	0.013472172	0	0	0	0	0	0
Zm00001d034925	0	0	0	0	0.012406237	0	0.23104103	0.170293349	0.023223723	0.07791275	0	0	0	0	0.293909729
Zm00001d034926	0.034178085	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034927	0.421899052	0.810493899	0.593189767	0.961995246	0.732795589	1.018104977	0.771851536	0.721963114	0.830407367	0.202772303	0.341250437	0.136903617	0.557958329	0.621339131	0.714414822
Zm00001d034929	16.66219745	15.70213362	14.11845696	9.719053129	8.914528813	9.543718244	8.707069915	7.716491453	9.13711594	8.056637063	9.01978642	7.170272714	10.14671876	11.66797981	10.91672613
Zm00001d034930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034931	0.063627954	0.12435462	0.040901901	1.608971256	1.864698657	1.48917015	1.64081137	1.214305548	1.455770754	0.142221091	0.323714357	0.077775625	1.392116467	1.753400803	2.293123754
Zm00001d034932	13.89995915	14.52747684	14.28611516	13.26848785	9.721627054	12.43374866	7.200894475	8.100362963	8.647817339	3.289690823	5.768597135	5.784107858	15.95670915	16.62742066	16.74267665
Zm00001d034933	0.657456794	0.616992786	0.560747517	1.647941927	1.970398241	1.129243704	0.557349332	0.582899442	0.794928005	0.764507379	0.373896167	2.049238525	0.613096053	0.664199599	0.678137151
Zm00001d034934	0.014285511	0.161933884	0.017754075	0.053448808	0.188232564	0.122511938	0.333852392	0.275601191	0.193797965	8.333977597	1.351086566	13.79926106	0.175845399	0.23490418	0.363352002
Zm00001d034935	28.04903664	30.39756545	28.04852996	44.14712994	18.74946763	30.68492305	12.18817118	11.19908175	12.82080657	2.947485688	4.991283173	2.894075335	85.451271	101.6402097	78.57775386
Zm00001d034936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034937	106.3732474	105.1922513	98.15103632	56.76501005	59.90062125	58.90957383	70.30541877	78.90864011	75.32692011	137.8120721	161.4104089	170.6418943	21.88156206	19.51322925	27.04550065
Zm00001d034938	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034939	0	0	0	0	0	0	0.021913357	0.022612341	0	0	0	0	0	0	0
Zm00001d034940	0.193330581	0.12920439	0.201043763	0.711038831	2.783959615	1.097273592	3.26873287	1.51523238	1.88554514	20.77846471	15.91888794	18.95778233	0.682143127	0.819629157	0.554229774
Zm00001d034941	22.55665622	23.06943046	20.91941862	22.28005898	26.42959616	21.06754844	27.22781089	26.66073521	25.70653939	18.87915175	29.86468176	23.24605957	17.66782321	15.72626549	14.21234753
Zm00001d034942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034943	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034944	4.465143879	3.428820925	3.336077144	7.119557895	5.949271856	4.815011377	5.4175534	5.512955468	5.829307985	6.718897454	8.248150863	9.947877389	3.743488607	3.899196957	3.502018187
Zm00001d034945	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034946	0	0	0	0	0	0	0	0	0	0	0.05765841	0	0	0	0
Zm00001d034947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034948	0.319520893	0.160975099	0.132367169	0.749166081	0.656784416	0.626330899	0.8263705	0.734580449	0.693541862	0.170393169	0.365319661	0.193493074	0.443367132	0.467026697	0.300453268
Zm00001d034949	7.399930706	7.051039857	7.437966846	9.323571819	10.47359534	9.594491496	9.542152037	10.11703288	9.424129389	8.763404236	10.37612652	7.635271879	7.485127343	7.427230141	7.286395566
Zm00001d034950	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034951	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034953	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034954	17.91935746	15.69488011	15.46277118	15.6855141	17.70853673	16.53621944	16.06509026	14.50533736	15.53476827	17.39016981	18.93625427	16.96968295	10.99853364	11.31778073	10.63394795
Zm00001d034956	2.976394101	3.68524075	2.868347699	3.067143107	3.705802548	2.564903999	3.345284121	3.056608525	3.468518753	1.40889827	1.924376028	0.628687051	3.147210879	3.967930334	3.630670853
Zm00001d034957	7.618123727	7.57504344	7.651418433	8.936418275	10.82194775	10.22061516	9.037798008	11.21313234	10.17686837	3.068155443	4.82781449	2.335414115	14.31434787	14.09362855	13.98148939
Zm00001d034958	0.379756498	1.913218857	0.943924986	4.499350387	0.500384898	2.558895187	1.109363677	2.060549528	1.40503525	0	0.239442564	0	1.912318718	0.416302408	1.975726509
Zm00001d034961	0.214721109	0.240668597	0.139548564	0.117926247	0.051913131	0.069989169	0.041433295	0.014251639	0.026724013	0.076071584	0.032293694	0.015275304	0.057314451	0.047508863	0.054659869
Zm00001d034962	6.550270097	7.275211134	6.946152064	10.54073372	9.474247237	10.87547163	8.933705503	8.157226998	9.229493	5.366169876	7.117963355	7.038537167	12.11318329	12.41350882	12.03934342
Zm00001d034964	7.726460391	7.783206107	7.031293609	5.0970451	4.135013093	4.954570943	4.590193372	4.003927272	4.752694378	3.476896024	3.345137934	4.061581163	4.120683992	4.165439671	3.987679638
Zm00001d034965	3.117857527	3.854993219	3.814020483	11.10551364	6.291406539	9.949484462	6.399471995	4.300705164	4.610193273	0.450265922	0.421990715	0.144662663	8.119648193	7.667917553	8.266203804
Zm00001d034966	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034967	1.127761721	1.275479238	1.487396948	5.970429859	8.855296378	5.160086163	4.141624394	3.857459723	3.292607858	0.888782481	2.031633873	2.014150553	2.627023694	2.523044899	2.980220457
Zm00001d034968	0.584272372	0.586851551	0.928350352	2.278275338	1.754121796	2.595956915	2.609900329	2.889339668	2.417101484	2.147121122	2.793259098	4.100491449	3.231854842	2.176888871	17.30644502
Zm00001d034969	134.237175	145.7348333	149.3797227	301.883211	141.2457026	277.905228	91.38904183	85.12754193	69.15341005	80.01362572	93.90037916	90.96873507	578.9375043	556.4420556	548.4964462
Zm00001d034970	4.065524591	3.766113853	4.40978696	6.949090149	5.619988367	6.359444794	5.201233006	5.181122876	5.383248231	2.033799463	2.986793664	2.111064207	4.671312899	4.213041166	4.458991125
Zm00001d034971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034972	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034973	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034976	0	0	0	0	0	0	0	0	0	0	0	0	0	0.093376241	0
Zm00001d034977	67.27518832	77.52540782	61.03462866	155.51341	73.75906135	118.8019838	44.90291378	32.71322042	35.73364067	0.99390094	0.935496528	0.774828361	153.9342447	155.8868572	147.4228921
Zm00001d034978	19.45029182	20.34419255	23.67549556	27.79137761	29.44653798	23.84888135	38.12262026	63.60197373	31.3516999	71.42336598	47.15728766	56.83573057	47.72287649	36.78280389	61.92768991
Zm00001d034979	0.43467513	0.671098307	0.13941046	0.332259721	0.461893752	0.429464927	0.016384448	0	0	0.116030065	0.229864861	0.232990346	0.298125585	0.614846634	0.291799607
Zm00001d034981	0	0	0	0	0	0	0	0	0	0.150839084	0	0	0	0	0
Zm00001d034982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034983	0.01765169	0.133394213	0.109687862	0.066043266	0.127922802	0	0.082504	0.053209801	0	0.060861477	0.100167063	0.009776871	0.09876404	0.125777616	0.061223288
Zm00001d034984	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034985	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034986	12.22469257	7.555626751	28.37650011	34.68400741	95.8434327	29.23279545	106.918722	113.338774	204.8349003	230.2682228	186.0260076	73.34966314	0.396746622	0.233198444	10.2393461
Zm00001d034987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034989	3.865835809	4.3423619	4.496901059	11.33485077	5.63354683	9.179611745	6.102746699	3.97189572	5.514894912	0.765023444	1.355944405	1.002062101	10.59056908	9.439306292	8.741541506
Zm00001d034990	14.77993268	15.76095319	14.91367707	12.89183984	12.57854846	13.892691	12.33596532	14.52828719	15.48303602	41.18392697	27.50976602	35.04788893	7.307178501	6.228896857	5.362854542
Zm00001d034991	33.78476557	31.17521798	33.57676023	47.83519885	70.44704529	53.91957716	65.21473615	78.88961051	82.62945396	197.1158564	131.7618221	201.429169	30.62745376	31.86200218	35.15538756
Zm00001d034992	0	0	0	0.145727948	1.000769796	0.143154976	1.456395391	0.91579979	1.080796346	0.671470281	1.080561313	1.229671273	0.043585612	0	0.337731027
Zm00001d034994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d034995	0.855521522	0.775823416	0.12758936	0.021339387	0.879274589	0.104813092	1.959366735	3.486687061	1.603744866	99.9143744	50.48971604	161.6789707	0.134029848	0.075028219	0.375857859
Zm00001d034996	4.307946751	4.08314406	3.517420485	3.260043583	3.844222428	3.446505197	3.668427244	3.54527739	3.803947244	4.732688753	4.33448517	4.971775409	2.078157375	2.347744565	2.309354809
Zm00001d034998	5.718838151	5.772867654	5.748368229	10.62588872	6.818042287	9.109977247	6.209415859	5.58270056	6.39869695	6.597284642	5.597968281	4.206197404	13.77806761	13.09439692	13.84756987
Zm00001d035000	0.560871135	1.147931314	0.958446909	1.31155153	0.692840628	0.858929853	1.679405936	2.536060958	1.210491907	0	0.353638248	0	5.687922341	4.380782266	12.92834372
Zm00001d035001	162.2138683	235.9721059	245.5955289	1201.528859	271.2417528	802.5163642	278.1666972	248.1756783	160.3415061	14.56779232	8.068104395	8.090371189	4530.97114	5155.092021	4303.821441
Zm00001d035002	437.8073328	476.1024479	514.2421836	593.3622671	278.0700077	501.1484932	433.7723711	319.5680074	350.025616	4.928495247	4.878426908	1.307427843	1264.643425	1261.881484	1098.40918
Zm00001d035003	147.6363985	129.5696941	191.7171898	1190.085735	456.2232692	904.7699038	648.4348709	498.6237582	434.3053639	2.674451842	2.241589957	0.429627589	2925.531179	2933.886794	2850.613704
Zm00001d035004	18.81874364	18.95926629	17.10412248	15.82543225	12.72572813	15.56839041	13.90744932	11.70397025	12.5990249	15.46615495	13.3814918	21.25111934	17.83468511	16.61280154	15.01528689
Zm00001d035005	1.32569541	1.374038997	1.252845891	1.17112278	1.164532126	2.064034465	1.161806323	1.082308843	0.630137021	0.818949572	0.470178125	0.290649574	0.494498578	0.24221231	0.718446003
Zm00001d035006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035007	1.242839447	1.404536135	1.438809693	2.452421696	4.049191865	3.118300441	5.888607393	7.380000552	7.254391214	83.05072224	46.2019783	73.06263901	1.181208075	0.858526511	1.289266115
Zm00001d035008	2.223159813	2.554154365	2.507515086	3.375002308	2.951907301	2.954494869	3.474356921	3.535615928	3.472630344	3.902314059	3.537822373	4.610476724	2.510786791	2.707478153	2.815818687
Zm00001d035011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035012	12.39512698	13.16536188	13.32897232	10.76606472	11.44875152	10.54149222	12.51015028	11.58546447	11.39843284	7.635128646	9.99841151	6.070222065	8.116526392	8.959216414	8.494132361
Zm00001d035013	5.190236888	5.068106259	3.406413022	0.207802192	0.614732452	0.377646489	0.691172104	0.642901498	0.595919886	268.5528571	0.042022827	0.036914985	1.025496936	0.721489366	0.780177195
Zm00001d035014	12.86369847	10.37149257	14.91275831	19.75947309	24.54800056	17.90568618	22.04846464	22.35404813	24.11236866	10.11763822	15.96336878	10.50782585	10.16933548	10.37361875	11.00621023
Zm00001d035015	20.816345	23.81203525	21.15995956	12.20864596	14.86218666	12.34885706	11.98336008	14.23610518	10.80047219	10.99253525	9.713685577	10.0059521	7.337146831	6.056746274	5.857603914
Zm00001d035016	11.24746937	10.38184035	8.414417022	5.908227367	5.146816094	4.429623957	5.090882104	5.506875222	6.348906534	0.262448955	0.353638248	0.266274682	6.903960911	5.577537321	6.021261741
Zm00001d035018	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035019	9.671103951	9.76956021	10.23601505	13.60880765	16.02290395	11.94634647	11.6964981	12.67077338	12.10552085	4.3357838	6.536941971	3.07356558	7.802601095	6.166653269	7.036050528
Zm00001d035020	0.359271707	0.119080012	0.023500207	0.73105846	0.946786363	0.32432621	0.950094037	1.094399749	0.256520958	1.590799467	1.430694156	2.618321666	0.275077658	0.020728751	0.240475702
Zm00001d035021	0.019474692	0.073585341	0.024203205	0.097151965	0.51321528	0	0.546148272	0.751425469	0.696513201	1.128070072	0.049116423	0.539329506	0.021792806	0	0
Zm00001d035023	0.41551832	0.34317827	0.78730963	1.68207954	2.333633605	2.0529579	1.369044322	1.659117109	1.218117257	0	0.249106165	0.007545776	1.295841284	1.739882711	1.68532326
Zm00001d035024	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035027	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035028	0.192191667	0.242066116	0	12.28826677	14.38407272	15.96426184	31.30588946	24.82701475	28.42727363	0.070683732	0.064629296	0	5.104295885	2.472063785	4.547689133
Zm00001d035029	9.94829621	10.5787965	11.21041814	9.754534594	22.44832915	10.47594952	21.75548318	23.15478582	22.47165727	19.1885562	26.15122617	12.73631328	6.057191249	5.161885963	5.740356998
Zm00001d035030	42.82233242	47.82776148	37.51901271	19.21887421	25.03058507	20.69680294	24.50983482	25.27296101	27.11041386	59.935034	53.30194958	54.92730915	17.89020208	16.98655345	17.07744114
Zm00001d035031	27.5308922	28.80627027	28.49121207	13.32755568	12.95768095	12.59757521	11.27779454	11.30574976	13.0980884	7.808422276	14.81097095	6.023292328	8.022451048	7.406558095	6.767003767
Zm00001d035032	42.58139116	40.81514467	47.38559955	22.53787427	42.78560547	27.3301707	31.97358832	47.93800615	46.7700057	17.62423727	74.91082475	17.07596015	7.841651845	6.990889065	8.802039056
Zm00001d035033	0.505219288	0.56632975	0.904158745	0.025203503	0.099855079	0.061896275	0.011806975	0.012183589	0.03738453	0.048774648	0.07008075	0.06156249	0.45793885	0.26584278	1.279184347
Zm00001d035034	188.2409252	194.7488022	211.2531442	580.70458	321.8657748	533.8136565	449.728542	360.0551134	399.8046685	85.50320227	114.6789614	95.82390355	1260.005848	1337.933395	1149.151164
Zm00001d035035	0.263414912	0.126073381	0.327372828	1.208952316	1.957575139	1.297331622	1.175797247	1.378463962	1.085044563	0.748382738	1.421707522	1.248900084	1.025798711	0.641057581	0.931903371
Zm00001d035036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035037	2.014865261	1.212471121	2.003264382	0.874844961	2.094405785	1.663942166	2.145092734	2.34848658	1.674998354	0.843941381	1.778566815	1.115988149	0.509394942	0.368127675	0.28471168
Zm00001d035038	2.428683141	2.138954831	1.936601219	1.320894728	2.686839657	1.961274155	2.290248218	3.082567415	2.049374656	0.965410432	2.433231109	1.26090724	0.606220359	0.407034768	0.471500182
Zm00001d035039	12.04650557	10.60871629	11.49093983	7.072021208	7.063290813	5.70308604	7.512794702	7.243339076	7.553574962	6.309531656	5.917357741	7.55442507	4.694824687	4.493722478	4.634229496
Zm00001d035040	6.906269332	7.185694079	6.475764442	5.269251469	5.860321736	5.522452869	5.324945649	5.01347141	5.881542905	4.253311377	5.416970369	4.817240973	3.269224971	3.465959585	3.2796039
Zm00001d035041	27.05371427	30.58555976	25.29325149	14.34703995	11.6115392	13.68755674	12.67156558	11.36929023	12.53430664	12.62564431	11.24749444	11.73639508	12.34255878	12.45064433	10.88478479
Zm00001d035042	0	0	0	0	0	0	0	0	0	0.161152867	0	0	0	0	0
Zm00001d035044	21.42486835	22.32263458	21.12854488	27.8884435	24.09723577	26.36316021	23.74333636	20.83462452	20.79826259	5.920758872	8.623307361	4.634035677	20.24032873	17.80352946	19.13221144
Zm00001d035045	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035046	3.282009078	2.719389874	3.795240296	4.189958276	59.23220606	13.62859266	45.18291946	53.37752073	53.33410599	42.02215713	45.28414513	41.55474235	5.80272204	5.894675303	9.884569618
Zm00001d035047	52.78407535	56.88300776	53.64604896	34.70398274	28.78042576	32.19369717	29.40974166	29.11164534	28.54387671	12.24020084	22.0949922	13.41400488	25.68797361	27.35456533	25.60877308
Zm00001d035048	2.474028988	2.379286397	2.990414315	3.140029081	3.54198344	3.082741678	2.496288482	2.225066275	2.34461771	0.490709415	1.064658598	0.407501863	2.068374723	1.849396363	2.042833232
Zm00001d035049	0.098212887	0.098959596	0	0	0	0.264713295	0	0.047368955	0.096898983	0	0	0	0.021980675	0.107664416	0.0227095
Zm00001d035050	2.016807783	1.619013827	1.994965129	3.024648016	6.124210536	3.033307395	2.02737625	2.351641518	2.206146131	4.506308898	4.91883121	5.257391014	1.349872036	1.523678384	1.372667792
Zm00001d035051	27.76687206	30.75303441	29.21179743	28.52581263	17.52603063	24.37142543	12.78831069	11.56303091	12.38361319	5.118466271	10.33936396	4.861403595	47.906489	53.57267557	46.3003808
Zm00001d035052	26.61634003	27.38951501	32.44093841	36.09889448	26.54239454	25.73721953	22.64564798	26.59844885	21.84752613	21.53117418	24.8651893	25.46251643	38.27439368	36.20458527	43.37913807
Zm00001d035053	0.501808944	0.107907599	0.471539966	0.198435281	0.145142978	0.299894935	0.20022177	0.221366109	0.196226946	0.337598666	0.509324558	0.027116155	0.890246852	0.322010099	0.594309854
Zm00001d035054	28.31117242	26.17283396	32.85506216	32.05431939	73.90827912	35.92928116	49.89626215	69.08374967	59.90749153	56.54310802	85.58853913	58.67362609	34.60094851	27.8841732	37.50041812
Zm00001d035055	0.857968384	0.832604503	0.716683786	0.280661233	1.074900892	0.396327201	3.763618993	3.001788201	3.590645638	0	0.159628376	0.093483781	0.566612954	0.262116331	0.2764391
Zm00001d035056	0.005350776	0.003369661	0.00332498	0.010009884	0.317269485	0.062276617	0.203202427	0.21291001	0.26066016	0.018449007	0.023616253	0.011854695	0	0	0
Zm00001d035057	0	0	0	0	0	0	0	0	0	0	0	0	0.003404974	0	0
Zm00001d035058	0.089121473	0.08979906	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035059	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035060	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035061	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035062	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035063	0	0.012281719	0.036356597	0.024322639	0.10278948	0.011946599	0	0	0	0	0	0	0.283710623	0.192413667	0.124011364
Zm00001d035064	0.037353098	0.035284774	0.127661986	0.314449854	0.762881894	0.137287968	0.261882573	0.157637669	0.43763393	0.103032161	0.011775864	0	0.637439573	0.38900389	0.215926394
Zm00001d035065	14.44749921	15.49707274	13.65582327	9.185747264	8.904912287	9.637615376	8.201686034	6.893474785	8.173912966	2.534591164	4.051753568	1.857499043	6.267617474	6.097496377	6.091479882
Zm00001d035066	18.79072388	20.90147126	21.4573379	24.25649697	22.1709001	19.99135636	21.4438217	20.23275006	20.20970398	10.05700147	16.77352843	7.220140404	21.31192729	16.34242083	18.98567959
Zm00001d035067	0.893347885	1.289526366	1.060356262	0.325480482	0.595171465	0.504195608	0.457429252	0.556741723	0.594199929	0.982890506	1.341722207	3.269049574	0.808733907	0.407132752	1.06764663
Zm00001d035068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035069	0	0	0	0	0.011459196	0	0	0.010486257	0.03217638	0	0	0	0	0	0
Zm00001d035070	0.045008178	0.028343983	0	0	0	0	0	0	0	0	0.113513512	0.124645041	0	0	0
Zm00001d035072	8.133432904	9.110135814	9.462238098	12.27493592	7.923589887	8.745011585	5.367291142	4.657743168	4.797511016	1.508765687	2.707652688	0.782810508	8.907679436	9.4859842	9.768651743
Zm00001d035076	5.391472532	6.20567674	4.025953463	3.432635694	2.716256713	3.261015784	2.44850442	3.619192212	3.045213101	2.764966637	1.571155844	3.048949893	3.979904408	3.824325686	4.347580453
Zm00001d035079	58.97618411	62.61008709	78.20418513	1.326124324	5.704387838	6.094823083	9.096782151	11.81381729	11.14661298	38.07639374	16.66520243	6.18395211	9.986553306	9.117022742	10.49330301
Zm00001d035080	21.390366	17.10183386	30.01296181	35.18289024	194.067645	50.32335619	82.69966611	141.1079269	135.5715645	581.252082	648.1954526	408.9323989	20.53682868	19.88056399	26.59390602
Zm00001d035081	40.42795909	39.60215485	48.64246858	110.468153	52.23555255	85.38182268	67.04777324	65.9375849	58.02181555	89.00733859	99.48007548	120.3763491	302.5625776	314.9557809	322.4141871
Zm00001d035082	0	0	0	0	0.047845568	0	0	0.021891628	0.0111955	0.388115173	0.057237266	0.191064461	0	0	0
Zm00001d035083	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035084	0	0	0	0	0	0	0	0	0.012802144	0	0	0	0	0.079656953	0.20402339
Zm00001d035085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035086	78.04542005	88.61626319	82.04004898	48.53578712	53.60992707	52.59298839	40.33688861	49.11086096	49.56677069	36.19374983	43.49439743	35.44976655	47.01982382	47.66596073	45.44802192
Zm00001d035087	40.35307838	32.51958441	46.34228229	70.96990177	138.6220649	67.15390294	80.38881036	96.6273266	82.98949144	10.19935416	31.47143064	6.870869678	34.82730251	27.29826208	43.21669689
Zm00001d035088	5.945746144	4.660657722	6.022677104	4.893853378	5.190638414	5.025114929	5.322559386	5.861693213	5.424953489	7.118638145	6.547517469	6.087610193	3.75008143	4.130376572	3.555687949
Zm00001d035089	3.372291408	3.234771682	3.442183492	2.146090918	1.887368094	2.200976114	2.005091497	2.034079298	2.883261493	1.699939587	1.63763475	3.432248479	1.656967262	1.787475467	1.559159069
Zm00001d035090	0.156558421	0.307378038	0.240352742	0.269908381	0.364038862	0.315914921	0.521912827	0.416412838	0.596276327	0.196868121	0.313557658	0.260142472	0.515276179	0.514874518	1.022134024
Zm00001d035091	0	0	0	0.040047375	0.042310878	0.29505224	0.206369003	0.14519433	0.128705519	0.011071571	0.080985858	0.008892761	0.062883058	0.017600572	0.111373896
Zm00001d035092	12.18953749	15.45041769	15.1813115	37.74243655	16.49283759	25.78332061	8.143442401	10.26249746	8.796742432	1.259368533	4.204050153	0.887477406	44.91237761	46.79270548	44.90762862
Zm00001d035093	3.070328763	3.135341394	2.895706134	3.962522882	4.01636962	3.563855473	3.950690088	4.045086457	4.438393776	1.660966008	3.09844401	1.372088642	3.282291771	2.89918968	2.607480875
Zm00001d035094	12.12600225	8.071712155	14.08980712	24.68775342	48.64062694	27.21111235	29.55487383	34.02787323	26.83023885	2.546138611	7.599488194	1.63065522	9.483098652	7.711872097	13.37053228
Zm00001d035095	65.48123451	47.41957878	60.55057061	78.72830122	111.2667949	88.20460189	112.1812375	114.8744838	126.2457176	156.913141	170.9716324	115.1920952	63.45304525	63.7026504	60.67734566
Zm00001d035097	0	0	0	0.117874294	0.007325684	0.054490873	0	0	0	0	0	0	0.049771614	0.036568247	0.044994178
Zm00001d035098	10.16337026	11.65575177	10.0728758	15.49918204	18.01385633	15.83496997	21.17617972	20.87954578	20.43559424	12.49106592	17.01273964	11.26802121	13.44621593	14.55439185	13.98130177
Zm00001d035099	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035111	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035112	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.025700507
Zm00001d035113	1.938114171	1.321477157	1.620888065	3.265248381	2.940972458	3.165940059	3.71204241	3.098328514	2.983297442	1.306343105	1.782483778	1.162261312	2.568329989	2.870112606	2.939897892
Zm00001d035115	25.11856412	24.18162667	22.56469398	11.88866069	16.49224994	16.29275251	18.46900086	20.79189922	14.12232705	31.32890782	27.72940616	26.14983341	29.83008773	34.02472479	30.47033253
Zm00001d035118	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035119	0.988192452	2.826156985	0.443234341	0.759844528	0.636359055	1.210670964	0.963699403	0.394192084	0.934653883	0	0.018738983	0.024691912	0.099773151	0.048870283	0.214752881
Zm00001d035120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035124	5.107572993	5.027939156	5.464192962	8.006759779	16.01071551	8.736347322	8.6903113	9.574137327	9.725091983	0.693859786	1.089559441	0.387695936	2.484484479	2.313975306	3.135873114
Zm00001d035125	0.010225306	0	0.021180067	0.089267905	0.026946681	0.129449787	0.027879297	0.020548986	0.06305319	0	0.055875901	0.075514199	0.095353713	0.022418679	0.023643698
Zm00001d035126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035130	4.394683938	5.067007619	5.349370625	7.572981408	8.080425635	7.106997655	5.393414826	7.140008504	6.156965634	0.602635943	2.603080214	0.433968059	4.10284398	3.975213886	4.424698309
Zm00001d035131	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035133	6.402161426	6.008246807	7.386237025	2.00046076	2.47392737	2.584216725	0.498367243	1.11237533	0.640341599	1.483327715	1.099048674	0.683011714	0.332013287	0.259183188	0.546691364
Zm00001d035134	0.055215	0.069543496	0.041172818	0	0	0.013529186	0.012903746	0.066576721	0	0	0.013925577	0	0.098859772	0.048422897	0.344714803
Zm00001d035135	119.5600041	138.5688616	135.0206033	353.6726212	160.8945941	323.0605174	164.9069106	125.1402255	121.3208909	5.150177054	3.052892686	0.438205223	530.0310047	530.6988409	527.5189778
Zm00001d035136	9.171665765	9.535189184	9.84617159	19.51172899	30.91726982	18.6007525	23.88564717	30.35591995	26.05237496	28.24901571	28.63157722	22.89621185	22.92851802	23.20281752	34.18076674
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Zm00001d035139	171.2651554	185.4050122	168.4354734	35.31866949	43.0834235	36.98740295	34.04542755	34.81354908	43.21240358	70.91432923	87.58111923	71.16423667	15.05562381	14.28428785	14.73018025
Zm00001d035140	28.57577492	29.57663059	27.09319826	20.52496711	17.42172811	18.46197253	11.84401717	10.62635476	11.74933786	12.91883315	14.63310639	11.99713075	26.7752558	26.54178729	22.83125885
Zm00001d035141	0.017870894	0.022508457	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035143	0.015077181	0.042726972	0	0	0	0	0	0	0	0	0.004753202	0	0	0	0
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Zm00001d035147	0.055015026	0	0	0.011435392	0.012081728	0.022466978	0	0	0.045232523	0.139103783	0	0.182829447	0.071824177	0.010051567	0
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Zm00001d035149	0.07289165	0	0	0	0	0	0	0	0	1.42975435	0.428953977	0.592137788	0	0.008878487	0
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Zm00001d035155	0	0	0	0	0.05003849	0	0	0.04578999	0.093669017	0	0	0	0	0	0
Zm00001d035156	391.242573	365.3359217	364.1252064	359.2280287	588.786898	384.9281925	398.2193536	459.8598607	436.2575367	108.5005405	179.2269302	75.40648117	379.712823	406.3564986	418.3318014
Zm00001d035157	113.3288631	73.49627189	87.63455749	84.61667733	83.64670057	82.97139155	104.9823504	102.7252917	86.71202666	5.790714033	7.932902618	3.339487032	87.53176602	81.79081471	84.99193312
Zm00001d035159	0	0	0.014787337	0.118713106	0	0.014577138	0.013903252	0.028693466	0	0.08204911	0	0	0.039943994	0	0
Zm00001d035161	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035162	5.459836975	0.973483136	4.280321988	5.382640697	45.43793612	7.855653561	53.16997969	51.11579399	65.48188704	233.7630579	120.9363635	258.2146337	0.062273608	0.047448307	2.795148132
Zm00001d035163	3.688618442	2.634596459	2.425577732	7.535150216	5.155605056	4.496180963	3.993709237	4.785429232	4.894590009	0.257580403	0.247293139	0.206890335	4.33667906	3.971934453	3.271284875
Zm00001d035164	0	0	0	0	0.18961954	0.117537769	0	0	0	0	0	0	0	0	0
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Zm00001d035166	12.49731759	9.358001786	12.08494158	11.70025969	31.84488878	16.16186382	30.74370231	37.50421309	36.31475722	12.35180512	15.85204006	9.205827872	4.285783345	3.79095846	6.593766323
Zm00001d035167	7.439435842	8.016620701	6.45157439	4.545504664	5.62195587	5.612693775	5.539866451	5.369320066	4.859049148	3.100759181	3.909411671	3.072304992	3.90249782	3.769935564	3.768884556
Zm00001d035168	10.76129256	8.851518567	11.5415544	12.96125938	21.63109656	12.76124353	22.22546162	25.23256978	18.67898841	4.348631076	9.544732828	1.424943828	12.75318002	11.99466836	12.27829578
Zm00001d035169	6.584591479	7.733944023	9.275262897	21.24046588	18.95525843	16.40610612	14.09079897	18.09092637	15.33631696	2.956062555	6.854550677	3.358285995	10.52315498	10.13943323	13.80776097
Zm00001d035170	20.23637683	18.11708144	18.87765088	15.44788324	21.26995806	20.18330671	22.06596183	24.44493649	25.70001527	30.67310058	24.85982271	32.18860111	13.00789459	14.42757393	15.4575725
Zm00001d035171	13.97503912	13.392532	11.20124317	22.78407887	41.33846438	25.80607025	54.55110987	70.1624746	55.87669072	40.11202305	24.67216175	34.19262772	23.02715043	23.24632648	22.19838495
Zm00001d035172	0.146676206	0.184739224	0.069144339	0.056770821	0.239918175	0.13632294	0.189121266	0.439096015	0.243269144	0.055804323	0.031890242	0.033616809	0.090557453	0.12197984	0.052627565
Zm00001d035174	0.04050736	0	0	0	0	0	0	0	0	0.041899746	0	0	0	0	0
Zm00001d035178	642.2119885	615.6420881	730.2238494	884.827864	1026.789811	811.3766729	1205.736196	1207.505235	1657.863897	561.7076023	925.7445357	670.787916	14.57004738	12.27804338	46.27630999
Zm00001d035179	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035182	0.126002156	0.587190672	0.21923419	1.084296518	1.162184279	1.003404229	1.060081346	1.10908841	1.103308786	1.772533013	2.955405357	2.121607947	0.902402934	0.386758366	0.56813518
Zm00001d035183	3.232774667	3.25467458	2.896974507	4.233365143	6.030774552	4.541651729	6.058906733	6.808660855	6.355445693	3.370296114	3.255942066	2.334796696	2.7798236	2.611280819	3.132639169
Zm00001d035184	6.031221893	4.622718817	4.58738888	5.776038194	8.185613778	6.672349124	11.5640567	12.09247609	10.7879222	3.409823916	5.620740362	2.391622761	9.523600503	8.46686569	9.235489783
Zm00001d035185	35.34882583	42.70494753	37.20107458	37.0864745	20.21333824	29.6950083	16.51321543	17.23120313	18.61167135	2.593848887	7.181689444	1.974625367	44.94899864	46.42622858	40.78947413
Zm00001d035186	38.45372268	38.61507091	36.81867087	17.67354566	22.75762383	19.67857521	19.07667041	19.74218204	18.45150046	23.12145542	25.32318053	17.98020116	11.26227229	9.551918894	9.44912678
Zm00001d035187	0.007491087	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035189	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035193	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035194	7.641175284	8.905078057	7.946137467	9.382076161	9.071004672	10.96231475	9.457419709	8.810713479	9.966058875	4.478983004	5.823053548	3.433598841	7.623248883	8.1401092	8.834241388
Zm00001d035195	128.789074	117.1942312	112.1848381	22.09874495	17.93792859	27.53281995	19.99800453	12.4892317	27.48479913	13.51034998	21.9812815	19.96376187	35.90081168	29.10519725	17.75447383
Zm00001d035197	0.00641842	0	0	0.168100266	0.067657676	0.015726885	0.014999847	0	0	0	0	0.028440136	0	0.007036097	0.037102845
Zm00001d035198	21.99583963	20.77517877	20.1477322	14.888127	17.95731566	15.60308355	18.80277419	15.63585857	16.39472393	18.61816376	18.81991494	15.46760457	11.45710599	12.45614438	12.55138247
Zm00001d035199	8.310660781	8.036511361	6.833462132	4.504467239	5.060072003	4.386332789	3.833776773	3.808840614	4.153172475	0.727903963	1.693688799	0.894438596	2.525516855	2.353170052	1.830578062
Zm00001d035200	19.0366481	18.82518583	20.98989888	32.87246384	27.61718332	34.05683852	40.79798861	36.98432444	34.41351682	15.4921727	15.94833292	18.71636565	25.95355708	25.70732764	26.79883458
Zm00001d035201	34.62374945	29.29122258	37.81940772	55.96495157	101.7642279	53.26962273	66.85520605	76.60173287	73.83595708	8.951309271	25.26613762	6.278865189	27.55565227	23.76708295	33.49845202
Zm00001d035203	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035206	22.97691351	25.6419406	21.0837179	16.31142769	14.22064395	18.62143547	12.38949659	9.227833589	10.30034507	3.537333369	4.407071102	4.37008323	11.08283153	9.21420807	9.457463807
Zm00001d035207	7.766102578	7.08139447	5.532789748	8.685007171	10.31096154	8.757242247	10.18885704	11.72699472	9.496659609	4.280666642	7.297297177	3.620371881	6.387273294	6.545499337	5.930030502
Zm00001d035208	10.8833914	10.5937765	10.28678289	17.14719899	17.42155754	18.08885089	25.07589802	22.19634636	22.88923691	4.345624887	7.472606494	3.294128451	28.33351388	28.45755343	28.99814336
Zm00001d035209	0	0	0.019568845	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035210	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035211	42.50796102	49.77488406	42.1380426	22.13639206	25.06275663	13.71486907	26.48967528	31.1869646	39.45298255	78.99468327	85.28319483	69.04590126	15.38169404	12.71532356	9.983622841
Zm00001d035212	44.75874722	43.32219507	49.55982745	113.4788568	82.2121741	117.3775616	80.37339839	55.19642247	69.40350981	2.507298602	9.422319604	3.594774593	144.959862	155.219903	134.0131087
Zm00001d035214	23.37281387	15.8002639	29.79290678	5.913746632	2.501592009	0.289353778	1.07206547	1.182933417	4.167493258	1.16511917	3.757259523	2.324485084	0.365945376	1.234799967	0.14703081
Zm00001d035215	0.169478106	0.071152767	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035217	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035222	2.144507282	3.038641714	1.817181792	5.713782422	3.339467127	4.388810025	5.837507263	3.320386405	4.417971801	0.571360166	0.676073121	0.566901645	4.308682459	3.713328433	3.606317192
Zm00001d035223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035225	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035229	0.040663991	0.020486579	0.015161198	0.091285859	0.069655007	0.054800849	0.114038098	0.078450428	0.140419942	0.028041174	0.030767159	0.01801829	0.054605175	0.053492754	0.037610499
Zm00001d035230	13.58436349	14.63407275	11.49804098	15.83133328	16.74043837	15.04628153	16.16516463	14.41566342	14.44987801	16.50364083	22.81303764	12.97917231	8.04419375	6.392341666	7.545109653
Zm00001d035231	0	0	0.9184135	0	0.243430491	0	0	0	0	0	2.795653716	0.204653683	0	0	0
Zm00001d035232	0	0	0	0	0	0	0.022003908	0	0	0	0.02374637	0	0	0	0
Zm00001d035233	0.817937072	1.366584898	1.203245038	0.749458017	0.417903871	0.163605686	0.195052954	0.040254936	0.123519582	0	0	0	1.120772875	0.969847369	0.810554465
Zm00001d035234	0.673563488	0.980911285	0.497032094	4.882727635	4.493063473	5.905390699	4.808438219	6.827255711	4.529859604	1.785335577	1.990746487	1.795406749	1.778353358	1.834422621	4.623717156
Zm00001d035235	36.10242436	33.78508749	33.01500664	26.31059391	28.00258235	26.63985187	25.0751943	27.39066027	25.09086645	29.11337294	37.91136097	21.90550944	16.57463731	15.69716569	18.0231203
Zm00001d035236	7.245753978	5.337880611	4.601634309	4.759839093	36.5531168	10.2169706	26.27860678	37.03494352	23.71699501	2.482559922	5.933386726	2.397858981	2.256536087	1.810915476	1.817668388
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Zm00001d035254	7.593887907	7.56057787	8.289251312	9.54047391	8.027433933	9.34920213	8.01136549	7.615440611	8.767971402	5.709397049	6.747464033	5.774591755	8.080836578	8.990498126	8.073069451
Zm00001d035256	1.339346393	1.080731955	1.254389149	4.009585314	2.812060453	3.483927304	1.69678413	1.061156064	1.597517447	0.140340125	0.003468088	0	1.344893631	1.549639864	1.465797498
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Zm00001d035265	0.83541403	0.949645362	0	0	0	0	0.00704824	0	0.007438969	0	0	0	0	0	0
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Zm00001d035286	0.06204796	0.078149636	0	0	0.05450486	0.02533908	0	0	0.051014896	0	0	0	0.046289107	0.045346102	0
Zm00001d035288	36.81381574	31.7168633	49.94091111	68.78267017	110.5199049	58.50550201	67.07008028	91.02887827	76.0104531	46.81541731	85.06598161	36.58773183	55.2759231	42.83862304	51.73356188
Zm00001d035289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035297	7.645863633	6.371131557	7.121162963	11.26628776	15.85502483	11.25383731	11.75881908	12.86797662	11.83652485	4.877327942	11.85452378	5.266314214	4.648675234	4.622674286	4.440532664
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Zm00001d035308	103.2688282	96.78602975	88.6303297	64.45982138	88.98038437	73.35869888	65.79486949	79.01438579	97.45072843	25.65108675	50.78040709	9.414374854	29.32983156	31.57312026	37.14365836
Zm00001d035309	50.75843013	53.83931344	52.41417884	37.39141908	31.46140954	42.59343253	20.19145089	19.28291	18.58567558	12.34337271	12.14809062	7.519357051	26.52341589	21.88782523	23.43303533
Zm00001d035310	208.4682336	162.7147085	191.0324377	127.3199635	72.43667096	74.1156482	2.11307367	2.122329673	1.75443555	3.292122863	8.756756612	2.884642384	55.0424012	37.16324991	35.0682744
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Zm00001d035322	0.01313279	0.016540797	0.01632147	0	0.017304377	0	0	0	0.064785487	0.126785973	0.016560869	0.450985157	0.293920264	0.02879325	0.182199563
Zm00001d035323	10.20890985	9.502412615	10.1468521	7.714934565	11.93102978	9.218890384	9.75597857	9.693429329	11.20774862	45.5500562	31.4442489	48.15808182	3.645674662	3.318369993	4.086789807
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Zm00001d035337	2.099917606	2.121788771	2.339232034	27.04552916	46.59684199	40.19053142	103.8246997	107.0718475	61.67560905	19.64473983	13.01647786	12.26909356	386.8561739	446.7942651	502.4598734
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Zm00001d035346	4.764332302	4.958657453	4.428852238	6.302901444	5.393211267	5.631359838	6.319144671	6.095776545	5.479404637	3.012291593	3.12884549	2.84985246	5.210314401	4.997468571	4.967873541
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Zm00001d035356	9.2099968	9.532346869	10.086037	27.7267688	25.72535114	27.0326902	23.55042109	21.20380953	22.29373434	4.36195112	9.929881295	2.825442633	20.94469022	19.97912643	18.44368844
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Zm00001d035383	46.25994087	39.45064516	41.40065697	45.70347996	31.29439313	39.45069686	31.58729574	20.72235064	28.27069035	12.86694454	11.04785273	6.498624879	28.775155	24.67595145	17.80768241
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Zm00001d035409	167.670201	158.7830454	186.7717551	317.8294276	172.915295	261.6820128	61.62003526	57.84745686	50.66422309	1.136395312	1.102672765	0.428438583	88.83696598	74.36297779	75.04358498
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Zm00001d035487	17.45791563	17.6336949	16.95438922	9.099488532	10.60785473	9.91671177	9.609254054	8.910620276	9.029064936	13.37087306	12.90624618	11.51526374	7.758883384	8.695135789	8.228178082
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Zm00001d035492	13.19059049	17.00048953	12.48136814	17.30256468	14.41870393	19.75538662	15.72146919	13.74789059	13.678202	3.56862226	5.819536629	2.44599831	7.67556104	7.871780035	7.950954366
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Zm00001d035501	44.59681601	51.16172308	39.54490443	12.61489694	7.181995008	15.64347047	15.55719415	10.47243995	8.804887564	23.96911913	38.56997154	21.01405415	18.07828623	16.57373353	20.44424973
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Zm00001d035515	11.37812006	12.97847717	16.47742828	31.5797745	24.68423241	33.5994495	25.24523806	23.3031017	26.7945315	1.366878692	5.568954123	1.716792762	30.44487511	30.82590626	31.69026002
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Zm00001d035598	10.38264669	9.576577675	9.877851722	12.60311188	18.93182271	14.71170346	20.34275127	22.42781141	23.11494703	28.13252229	29.08577701	22.65432162	10.80538664	11.24221802	10.79991652
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Zm00001d035605	2418.713543	2281.934503	1714.47818	1488.186196	1355.252246	1400.184713	2543.474819	1593.238508	1977.246062	4848.030694	7624.516438	3092.242593	1525.691514	1208.807655	1012.008845
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Zm00001d035660	0	0	0	0	0	0	0	0	0	1.789865592	0	0	0.019894083	0	0
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Zm00001d035737	83.94884856	89.26398409	85.1048664	146.5572885	77.30988537	158.0191407	112.3049748	77.08960532	111.1396204	10.33706215	8.922807769	7.272339507	216.7906034	218.108099	175.6181751
Zm00001d035741	1.976399719	2.317608087	2.828951654	5.915711984	9.141627988	8.215925235	11.57896955	13.01659203	13.31351447	62.91854608	38.72523918	61.36264197	6.665469829	5.618214755	7.501063355
Zm00001d035744	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035746	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035748	0	0	0	0	0	0	0	0	0	1.290325782	0	0	0	0	0
Zm00001d035749	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035750	1.819365731	2.258762187	2.503375202	21.28029759	14.674786	18.61191584	12.17853539	10.07553876	13.81528956	0.412226584	2.097626109	0.475061115	13.52438333	10.72730578	14.75409454
Zm00001d035751	7.771614303	8.30838254	8.580932776	9.298255065	9.450066895	9.918425017	8.749703225	8.178683841	6.83611697	8.795966139	6.775358753	5.808185547	5.3322746	5.063737652	6.436628863
Zm00001d035752	17.0002993	15.05602545	16.38256334	24.95905571	37.30448423	25.64674128	28.39597333	33.37367236	28.04154561	14.21062948	18.21981478	11.99859408	13.79553433	13.99827803	15.32886476
Zm00001d035753	0.532991576	0.234956702	0.960485074	0.565015376	8.146617288	0.440766635	7.131067565	18.34812913	13.63952348	34.78781503	32.78262748	9.52058506	0.074554336	0.131463918	0.09243165
Zm00001d035756	0.181763794	0	0.03227094	0	0	0	0	0	0	0	0	0	0	0.014232561	0
Zm00001d035757	1.896634417	1.963341887	2.159871225	2.723255774	3.102416162	3.054136181	2.325601449	2.311447044	2.785809694	0.387313813	0.813491675	0.322364583	2.167939767	1.851609997	2.018664298
Zm00001d035758	0	0.983941126	0	0	0	0.239273316	0.456423913	0	0	0	0	0	0	0.214098381	0
Zm00001d035759	3.979420202	5.173774937	5.264708375	33.4599578	8.034349068	32.47601677	8.774910436	7.506978563	5.224356421	0.619644124	0.323753325	0	173.0962671	189.7635372	169.7826198
Zm00001d035760	0	0	0	0	0	0.187141141	0	0	0	0	0	0.028201811	0.028488919	0	0.264901878
Zm00001d035761	134.7522615	149.9556443	176.2645856	209.2912197	127.0715943	162.1297867	74.44360446	74.36558549	86.99309321	26.23362336	40.23153249	18.99533108	256.5300551	295.6160023	272.3616489
Zm00001d035762	38.51721557	37.35767777	41.04350002	40.16426976	64.81855434	43.75164603	51.52232195	57.88173214	56.06457177	79.94471446	74.61113567	73.35143905	35.94494036	35.9033677	32.29883336
Zm00001d035763	0.355469745	0.620127624	0.288116638	0.751727451	0.753486562	0.960261936	1.240939369	1.048910225	1.274334296	9.805027659	4.01762348	22.14424237	0.956159359	0.999609852	1.406492644
Zm00001d035764	0	0	0	0	0.005219895	0.004853414	0.03240332	0	0	0.021854402	0.034969299	0.030718808	0	0	0.004580067
Zm00001d035765	14.43433969	14.6613744	17.03887298	12.98522872	10.753778	14.81593051	9.17381838	8.702264043	11.16584304	8.330398791	9.084772537	7.335779307	12.09989365	10.10941364	11.58893506
Zm00001d035766	0	0	0	0	0	0	0	0.090008404	0	369.7293028	20.62866791	575.4625294	0	0	0
Zm00001d035767	2.210667613	6.447954616	2.912682815	14.6766204	8.048744318	27.70479547	34.18323772	6.493549394	17.56763831	0.74502587	0.712650937	1.408564738	66.82071727	68.92145768	59.06281264
Zm00001d035769	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035770	9.980674222	9.707088147	11.73777696	10.75756532	17.38558981	12.99996679	13.77141116	16.45516281	14.83384998	19.90630077	19.31883938	14.0223461	6.94539086	5.912068408	6.446902657
Zm00001d035772	87.40817563	93.78937527	95.89910135	45.65108505	41.89472917	46.15007219	37.20750479	37.61993261	38.76786462	56.14337858	69.71009121	50.99458577	31.99066546	28.95203778	34.25573592
Zm00001d035773	11.36634543	11.50726034	12.63181904	14.11334817	11.13942668	13.67556954	8.896516012	7.66529441	9.435884932	1.061519725	2.124815933	0.571485755	6.424832212	6.348675071	6.22900993
Zm00001d035774	6.556911548	7.347006748	6.921441371	10.06789359	10.16017576	11.50154996	11.36978738	10.28800837	10.402085	2.555794563	4.106491348	2.280322185	8.497370441	9.669650789	9.033507756
Zm00001d035775	12.50950839	10.12170712	10.21820504	13.36082082	28.47656921	16.37497281	28.35306146	24.04064706	28.96477398	78.73132866	39.87898592	90.07684379	2.958523746	2.835889205	3.489325135
Zm00001d035776	0.023864253	0	0	0.029762461	0.035375236	0.051164707	0.017428362	0.017984286	0.110367159	0.074053663	0.165514737	0.194963556	0.026704865	0.039241248	0.051731875
Zm00001d035777	0	0.024424071	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035779	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035783	9.55640402	9.662966125	5.508220491	7.673775476	5.105192757	8.433458937	4.605965646	6.086011264	4.244747843	1.85631784	1.030512299	4.355870857	11.52232544	10.78170541	10.50386245
Zm00001d035787	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035789	8.068269199	6.820042746	9.733811936	9.308713945	11.16901279	8.918814799	7.2485355	7.585910675	8.78064769	0.700986668	2.225638255	0.381269331	3.215561685	3.009661673	3.937572035
Zm00001d035791	0.013684919	0.327487912	0.085038287	0.017067237	0.19835077	0.905358494	0.079954139	0.23101256	0.033754601	0	0.138056974	0	0.091883182	0	0.12657307
Zm00001d035793	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035797	0.057714972	0.109038331	0	0	0	0	0	0	0	0.019899615	0	0	0	0	0
Zm00001d035800	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035801	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035802	7.371977489	7.292166118	7.654680263	10.08591131	11.8377892	9.699748057	9.320976136	9.700930647	10.16108753	1.12603283	3.505839942	0.755898279	5.751961271	5.58905038	6.45254708
Zm00001d035803	0	0	0	0	0	0	0	0	0	0	0.088865281	0	0	0	0
Zm00001d035807	0	0	0	0	0	0	0	0	0	6.49563094	0	0	0	0	0
Zm00001d035812	42.48365759	46.76446431	43.11162038	35.96174714	23.39550122	31.258991	14.9728783	12.81126384	16.95583685	0.582407451	1.699189671	0.407087589	14.62759236	15.11057004	15.6604627
Zm00001d035813	0	0	0	0	0	0.016616203	0	0	0	0	0	0	0	0	0
Zm00001d035814	0	0	0	0	0	0.022243203	0	0	0	0	0	0	0	0	0
Zm00001d035815	14.66003386	13.89791056	13.07247057	35.78033555	25.83119021	40.60874489	38.39654206	27.90597474	32.57207503	60.99179938	34.58815598	38.46416625	25.8984883	26.40771126	24.58681877
Zm00001d035816	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035817	90.87468619	82.91316156	80.90854019	36.15861609	37.63867698	36.34526263	34.72585063	35.74291072	39.21741518	37.83733045	51.14371666	46.72983443	33.72473112	32.26141234	35.95571625
Zm00001d035818	13.46299449	14.88230823	14.18697688	13.26474098	9.869581105	12.6826454	12.59774241	11.28760757	14.01987169	4.251378518	5.359357856	4.557641763	8.73849772	9.141551245	8.411770743
Zm00001d035819	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035820	5.073772688	5.099546172	4.86349454	6.274969586	7.991277034	5.800969556	5.58228503	7.690675562	6.831918611	4.649469903	5.223230347	3.790784694	2.805681985	2.367816672	1.929210023
Zm00001d035823	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035824	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035826	0	0	0	0	0.030792917	0	0	0.11271382	0	0.09669172	0	0	0	0	0
Zm00001d035829	6.57178613	8.313439412	7.952816412	9.428444821	7.749118548	10.68418324	6.972876198	8.976765944	8.708260578	1.58777983	2.153470804	0.286946006	4.036669968	4.638047042	3.915404674
Zm00001d035832	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035837	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035838	3.443251223	1.730442366	3.41499412	8.419314658	14.30380652	8.914860653	10.24688673	15.85038099	11.5470887	2.479674766	5.197626666	1.164951732	5.40953682	3.012252662	5.686954715
Zm00001d035841	0.112078434	0.067640701	0.118978077	0.468843271	0.350739474	0.366163777	0.26465571	0.205527058	0.239011974	0.154574638	0.185501532	0.049144847	0.480774236	0.447942813	0.291550419
Zm00001d035842	0.008023025	0.010105029	0.049855193	0	0.021143024	0.06880512	0	0	0.009894614	0	0.010117291	0.017775085	0.017956044	0.035180485	0.009275711
Zm00001d035843	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035846	0.029409538	0	0.015664397	0.010479514	0.022143646	0	0.014727877	0.005065887	0.005181445	0.081121204	0.010596106	0.041886709	0	0	0
Zm00001d035848	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035855	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035859	4558.918332	4498.566215	4966.025659	6535.862024	3196.49722	5123.767095	3154.450015	2714.360132	2563.000454	569.1113512	477.1537733	173.5454483	6397.801201	7163.859935	6677.482776
Zm00001d035861	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035867	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035872	10.39118739	10.97254884	11.98476734	13.10670449	18.77451821	13.24499509	13.751851	17.03809475	15.16143603	4.523724925	8.454482534	3.618952741	7.546501506	7.177021557	7.857399858
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Zm00001d035875	12.87156161	14.18317317	10.15171671	4.3245226	3.589674609	3.761082381	3.156957203	3.001620066	2.579767299	0.118388243	0.213646702	0.022521374	4.737191378	4.412860558	3.622382905
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Zm00001d035878	39.73847715	41.46078206	37.98513843	40.77102557	21.93227825	34.04223155	22.0558927	20.238207	21.16466995	5.297596224	7.37642242	2.230477825	45.93031362	49.40918462	39.66972319
Zm00001d035879	9.519229545	7.482811529	9.418273754	6.946365509	9.6518687	7.382024904	6.804097219	9.361508967	8.555103519	2.537262368	3.022297247	1.9631594	4.646226219	3.348921596	3.590456075
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Zm00001d035888	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035899	3.931703311	5.249936469	5.403351026	6.582016657	11.59722612	2.678262179	17.08049392	24.4511987	25.350994	6.266211942	18.721094	9.15349007	5.175583356	3.228082398	3.168706954
Zm00001d035901	0.062918236	0.033962465	0.03351213	0.022419684	0.130277725	0.066071527	0.021005703	0.075865071	0.033255272	0	0	0	0	0.009853311	0
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Zm00001d035909	0	0.022989279	0	0	0	0	0	0	0	0.100693647	0.023017176	0	0	0	0
Zm00001d035910	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035915	25.49006783	22.16778047	23.1643515	23.08280633	38.07661693	25.66708608	31.33994729	34.32151962	32.87138956	44.35935654	37.57895672	34.61240558	20.39028081	20.18653556	23.77507838
Zm00001d035916	26.73268934	20.96689889	30.13150019	17.49125367	17.94957852	17.04795697	9.006330911	8.970099641	9.686094923	2.64069315	4.075436319	3.417953832	31.30675568	30.34811134	32.93699999
Zm00001d035917	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035926	114.8841761	96.08003453	102.0651474	21.82717994	41.6951189	25.24062513	30.82950227	33.59788979	37.1839549	21.96129076	36.86538836	26.59075522	7.547221252	7.2446694	7.434567514
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Zm00001d035934	0.225150479	0.390300712	0.168492365	0.75181376	0.449788161	0.679219277	0.848672053	1.261069447	0.47473123	0.183640641	0.100746508	0.244047795	0.758560993	0.573254388	0.990837165
Zm00001d035935	0	0	0	0.02008265	0	0.098640354	0.075264249	0.01941625	0	0	0	0	0	0.017652399	0
Zm00001d035936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035937	37.90475184	44.32132025	43.90235419	60.81848087	33.28180705	37.45684764	15.64962924	18.08863737	16.28278189	1.80684851	7.267450362	0.774513589	81.74165532	94.00662347	103.9699098
Zm00001d035938	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035946	0.189878249	1.434914143	0.70794374	0.710423745	0	1.861014682	0	0	0	3.666227733	0.718327691	1.682708057	1.699838861	0.624453612	0.219525168
Zm00001d035947	5.953876241	5.342094295	5.630663275	6.060553958	7.464057434	5.94660187	6.43366515	7.076462087	6.552557589	4.050945948	5.134061704	3.467313823	3.737389382	4.357448186	4.484104295
Zm00001d035948	37.09002136	31.13116646	43.28334224	44.51134536	68.06084073	48.52361305	62.89933147	85.82380082	74.23952831	143.9172904	146.2141724	101.7043033	48.34666357	42.74244185	54.40217968
Zm00001d035949	0.980557467	0.918345051	1.2264515	6.765193844	5.714740629	8.13199243	8.255501945	7.700297271	8.666645015	0.286074125	0.57862534	0.083555159	2.693951518	3.534838104	3.786127857
Zm00001d035950	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035954	5.346670692	6.381004335	4.998663578	6.065230165	5.809277572	4.749930683	5.524536964	4.348429839	4.232991629	0.693390414	0.743728246	0.128523671	2.455990659	2.437753848	2.861589738
Zm00001d035955	20.4793986	16.25083487	33.64012181	12.46237317	7.596204477	13.99124291	2.502082895	1.456452679	2.84392677	0.757224317	1.523200887	1.216415463	1.413119053	0.601883	0.888680197
Zm00001d035957	6.490601593	6.644965178	7.771748311	7.583829508	9.594130632	7.678887078	5.425733264	6.214149366	5.868349118	0.971492522	2.664837112	0.294606616	3.305838036	2.4111395	2.235417164
Zm00001d035958	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035960	5.708611087	6.167957891	6.592491969	5.23647497	4.499355832	4.965761671	2.686275264	2.374964098	2.802380104	0.173148921	0.595526551	0.24222891	1.870101866	1.515732687	2.219523205
Zm00001d035962	0.014811738	0.018655438	0	0	0	0.036292811	0.008653758	0	0	0	0.168102688	0.049223313	0.008287405	0.032474294	0.162681706
Zm00001d035963	1.900319965	1.254823704	0.940103428	0.023009676	0.632065134	0.022603417	0.107792422	0	0	0	0	0	0	0	0.234634187
Zm00001d035964	82.11965685	77.23286648	79.11477999	49.21671152	56.4540138	54.05105346	48.76616459	42.35972152	46.77421785	29.56688765	35.13299161	31.1888388	42.85420384	44.81674242	39.87757569
Zm00001d035965	3.28642548	2.815446049	4.04758305	4.98488995	6.290707814	5.096379134	4.142905738	4.801627054	4.363444608	1.225006095	3.098881993	1.295512105	2.559421695	2.304426542	2.301983458
Zm00001d035969	1.608380461	2.563853946	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d035974	25.52555843	24.67408182	7.978479951	6.425285521	5.660585687	4.580536432	6.85983843	6.221812869	7.23016367	1.124833688	2.851247538	0.653006021	3.668760305	3.611724615	2.772785697
Zm00001d035975	64.98742057	65.99231933	26.16682005	15.91825071	13.77973819	16.84930637	18.03857186	17.65762777	18.60495241	4.555845536	8.568377671	3.224519507	7.640125022	7.986433044	7.676028349
Zm00001d035978	0.016198144	0.102008114	0.281835423	0.383830839	0.213434317	0.11906966	0.927449065	0.390625503	0.57932733	0	0	0	0.725049751	0.958876637	1.123635929
Zm00001d035980	0.041427982	0.026089348	0.283177496	0	0.136468609	0.177642311	0.096817194	0.149858147	0.025546095	0	0	0	0	0.11353702	0
Zm00001d035981	0	0.071874054	0.060789445	0	0.107417152	0	0.019051684	0	0	0	0	0	0	0.008936724	0
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Zm00001d035988	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d035989	12.18033804	11.3818807	10.40065494	5.016819534	7.737433146	3.773724216	5.020897827	6.122291191	4.735489174	5.227769175	7.271959339	8.31226619	0.739744689	0.801767601	0.894361794
Zm00001d035990	20.39389767	20.088798	20.70826201	12.5374611	14.00821107	12.81475622	11.73991222	12.67326017	12.82544997	11.42036654	11.89845355	10.0552593	6.324272273	5.992619795	6.245772461
Zm00001d035992	0	0	0	0	0	0	0	0	0	0	0	0	0	0.016881877	0.01780435
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Zm00001d035995	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d036000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d036002	0	0	0	0	0.166537963	0	0	0.12699843	0.181853561	0	0	0	0	0.254015029	0.414019731
Zm00001d036003	0.019558275	0	0.048614162	0	0.438105233	0.143769375	0.411369192	0.023582827	0	0	0.468608622	0.108328845	0.24074971	0.171523739	0.090448138
Zm00001d036004	3.313432293	3.175714174	3.146322418	6.891535732	6.752499439	7.494484424	5.973823757	5.271058434	5.111131222	0.652017747	2.147240618	0.403547651	5.171276246	5.193808789	4.618704365
Zm00001d036006	22.79383672	22.8681961	16.77019647	29.21757564	20.38453993	28.71723304	23.86602146	20.27321019	20.59503013	3.075495686	4.649490818	2.091298892	18.21931086	19.34822351	20.37616737
Zm00001d036008	8.781335646	8.980305365	7.707836898	6.952573956	8.188883191	5.896698205	10.11889251	11.0513368	11.96647999	2.568713332	2.881381861	0.836627321	6.488991605	5.185069883	5.623790811
Zm00001d036010	1.244026779	1.488719139	1.132168923	2.308919591	2.0263975	2.676180893	8.519658683	7.381954364	8.367795315	1.625654087	2.363430205	1.385310407	6.361302867	6.815149815	6.63262761
Zm00001d036013	23.92026629	21.79483345	20.25556253	28.79681649	38.1984055	31.96436239	29.41895583	30.05012204	30.71934395	13.57163994	20.70224098	9.815616762	17.58939942	16.46053301	17.91867127
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Zm00001d036018	32.67758352	35.4578784	39.13177522	30.89229387	57.93306409	32.62287409	38.90735549	42.10126283	41.03486224	48.12266069	59.10810713	34.24633367	25.74633981	24.17745136	28.72031705
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Zm00001d036036	360.034365	371.788794	415.6506851	233.5345172	311.1574852	291.2199767	306.6850611	328.3385381	273.6648082	1050.701008	737.9005312	1038.930759	232.4398017	199.7533162	251.0746253
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Zm00001d036359	2.346937906	2.269479591	3.833256348	7.037593574	10.07153694	6.748360462	6.301518702	7.89426292	6.468961543	0.566000315	1.34231591	0.284134569	2.597596157	2.087760483	3.173024186
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Zm00001d036371	296.9303806	289.1051128	359.7290511	520.0508067	544.8465175	614.9092672	653.9183558	757.4048311	899.0684591	756.2405663	936.6182073	716.5181246	338.6654762	415.2576236	456.4820498
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Zm00001d036387	19.93644322	21.05644023	20.99624731	16.19419121	21.13633957	23.06130507	32.86004452	32.97997589	32.28530794	28.97947291	29.0411016	34.79917891	12.24714294	10.40134674	11.89725135
Zm00001d036388	2.841722174	5.781719344	4.924005759	6.009020566	3.516362362	4.251445266	5.502325584	6.457578268	9.974720599	14.1191814	45.10389621	5.720758971	4.301124579	5.840991818	4.264726108
Zm00001d036389	939.8065938	1365.327156	1551.211239	20.06789907	19.18289715	15.01987071	9.660299629	18.76984349	14.27416342	3.948958317	66.82354589	10.49831133	7.355939848	3.846192162	11.14333063
Zm00001d036390	0	0	0.014891016	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d036395	8.907080953	9.872173327	9.765230854	9.406713909	10.71178075	9.600176332	11.41167058	10.8768086	11.11171092	11.64618593	10.42171695	11.56591533	6.939721327	6.24414474	6.714126687
Zm00001d036396	2.405479636	2.27745892	2.403887521	7.489774026	5.479966715	5.57185558	4.526737364	4.248283276	4.21679517	0.309839802	0.842991374	0.091048332	6.560901093	5.79052456	6.702424517
Zm00001d036398	0.180597542	0.341194908	0.15711301	0.22523342	0.59490939	0.708021438	0.464262104	0.500846913	0.690453253	0.224166406	0.501026448	0.060017328	0.161675559	0.05939321	0.208795404
Zm00001d036400	29.79627906	29.48669722	34.35472039	33.44456401	34.54305417	32.67001048	35.46062707	33.51223408	35.51187993	31.73560396	30.91177184	18.61149076	30.70917678	26.5701581	30.2221022
Zm00001d036401	9.083618827	5.565100005	14.35447162	118.1075815	208.0089704	75.28907566	125.7277309	156.3680936	155.0420186	7.969590772	39.33621679	7.213092888	16.63914431	13.8203816	15.63064456
Zm00001d036402	5.777988929	5.216169978	6.25388737	1.464815084	5.7430169	1.595804935	2.816410586	2.577364882	3.226546746	20.78950729	15.43585595	15.51434904	1.526117544	1.257043428	1.750480815
Zm00001d036403	13.77844247	13.00604739	13.63302449	15.59010201	23.75478419	14.84200072	16.82669463	19.8091976	17.76479324	6.937509622	11.90242846	3.786093129	8.378691297	6.680164993	8.165675181
Zm00001d036404	0.011178441	0.016895146	0.05279188	0.094800618	0.067754488	0.139690227	0.214216947	0.140178022	0.14889008	0.049334124	0.132505909	0.054485069	0.155112033	0.07107436	0.038771411
Zm00001d036406	14.64012159	15.2491657	13.66268209	7.963723323	13.66117788	7.701609866	10.78658075	12.37249605	10.34018129	13.03638567	9.591598765	6.465092061	5.190579378	5.319006663	5.794876411
Zm00001d036407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d036410	12.13284119	13.21011867	12.97844532	7.409829928	11.52327617	8.931632547	9.13859852	9.548888057	8.093750728	6.291929635	6.957107214	4.650766282	2.425379838	2.882732641	3.416999283
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Zm00001d036414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d036416	8.788650378	6.985981997	5.064831785	5.123170094	11.47739989	7.018683942	10.43689347	10.3694702	10.14836889	32.24185418	21.3528037	29.55316122	3.591516678	3.204339108	4.244989527
Zm00001d036417	9.080364055	9.402943736	10.2591847	7.116278533	13.55809844	8.942333259	9.967350596	10.59960647	9.707245654	21.84090813	17.42249026	26.03741164	5.736956154	5.731214087	6.822953833
Zm00001d036418	0	0.030368553	0.059931745	0.420991849	0.285934227	0.664648101	0.324004629	0.508777661	0.133812881	0.216149481	0.045608107	0.186967562	0.67453923	0.634365575	1.031419835
Zm00001d036420	6.059647254	8.293168408	6.434518325	12.04273657	10.32636041	12.52831928	13.55566122	10.66477542	10.28859067	2.362411465	6.711610021	2.496717089	10.54973002	9.314741874	9.425415958
Zm00001d036422	2.770784603	3.01567297	2.452790702	3.269186249	3.140297692	3.140250325	2.432289408	2.272904197	2.352061438	0.263411034	0.924997796	0.202374688	2.614289529	2.530687084	2.105734833
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Zm00001d036427	0.037353098	0	0	0	0	0	0	0	0	0.068688107	0.015701152	0.013792689	0	0	0
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Zm00001d036429	1.911462172	1.731958139	1.801179064	5.052429307	5.052300273	3.774846141	9.014181784	8.654996015	7.923554379	12.93715849	8.425660026	15.25182424	16.04559913	17.14484826	15.3176526
Zm00001d036430	3.008031706	4.446532363	4.880054871	9.300092665	6.859030935	8.849014475	7.408620034	7.64493738	8.352462511	5.788126901	6.200899908	4.070424233	11.02543704	10.54413372	11.62008318
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Zm00001d036432	26.95513089	27.29755533	27.14346558	21.12332702	19.95095485	19.84443215	18.56701912	18.41624433	16.77356956	10.40478871	13.08808779	7.469793526	15.25914588	13.26913665	15.1544457
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Zm00001d036440	166.9769445	167.1609049	152.807238	92.85973467	112.9554435	83.55829524	89.04551542	102.1993051	99.93657033	161.7919419	199.6945241	115.4130666	29.39913075	26.68659769	29.2751677
Zm00001d036441	127.0546785	107.0524937	108.6466319	147.8724214	150.3358224	130.7661601	105.131037	144.6291522	124.9836861	72.65185233	114.8797092	70.62742534	68.21188235	68.1972092	73.66378469
Zm00001d036442	13.79624105	13.5404367	14.01057736	42.13645476	65.93101365	42.78477394	60.89825623	67.60931918	65.11514982	74.88665241	57.95345999	27.38072337	35.22608711	32.9263022	32.89921315
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Zm00001d036480	71.94929312	70.85265358	72.83485668	55.67334417	88.73166262	57.05505539	68.10571668	74.94884009	71.08229137	17.87852112	37.20003999	16.98655559	31.36688485	32.80715159	33.37983663
Zm00001d036481	14.07012934	13.28451017	13.50109607	18.79136761	27.22897798	22.74365859	28.47201424	28.89610342	27.45329201	37.81336924	34.33927555	34.74769821	21.59710007	21.61428222	21.6903177
Zm00001d036482	1.568459269	1.576585203	1.714996638	8.605022309	11.27729009	7.390681582	6.978527779	7.037464246	7.207296095	0.499191673	2.795653716	0.501192692	1.417626231	1.711133782	2.127202507
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Zm00001d036624	8.434092187	7.647411039	8.45589638	14.29268079	13.43482537	12.85634919	5.902876202	4.431542434	4.839621595	0.181750056	0.356983986	0.14057611	3.451868418	3.654424711	5.23662749
Zm00001d036626	17.58462463	18.53191615	17.60656081	55.09336144	72.97863546	57.74263304	54.81365928	59.26140443	63.71132339	3.841682918	11.18436215	2.669195656	19.6968828	15.38029247	23.53090272
Zm00001d036628	0.11160191	0	0	0.02319751	0.024508648	0.04557587	0	0	0	0.436099392	0.023455598	0	0	0.020390322	0
Zm00001d036629	10.78244275	10.8354734	10.85185413	5.737752823	5.002108511	6.073380957	4.461378377	4.405395165	4.852869575	3.024979454	3.595386251	2.978393261	3.817985893	3.84446224	3.660534447
Zm00001d036630	264.4268613	262.0692881	286.3548673	404.3523166	308.3218448	454.1768091	315.3389047	331.8742112	406.1619208	848.5402885	822.6506987	970.8712086	367.3938148	439.985505	425.5759187
Zm00001d036631	7.3052395	7.835766404	8.153389526	11.31747918	9.306950755	11.91966343	9.503420523	7.475748045	7.877362791	2.165498645	3.296032402	1.534405543	11.27485068	10.0415261	10.54634858
Zm00001d036632	15.7297839	14.31612189	15.1292429	12.52961459	9.624211386	10.47344431	9.341963178	9.310096717	9.227265011	10.46026413	11.36675414	9.257840527	6.887791281	6.32013281	6.815712858
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Zm00001d036636	0.045119584	0	0	0.07502825	0	0	0	0	0.01854832	0	0	0	0	0.016487224	0
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Zm00001d036639	0.04557078	0	0	0	0.060046188	0	0.159748369	0	0.61821551	0	0	0	0.203980663	0	0
Zm00001d036640	69.05884829	64.51582227	77.53027406	48.40547097	48.17310937	59.85630895	33.55560989	27.77303037	30.52208093	15.10671097	25.99662119	19.29963119	20.44432045	17.68294039	20.73990155
Zm00001d036641	2.193518875	0.955717069	1.125313557	4.079634865	5.192426871	2.257695516	2.481166373	2.391160087	2.508617041	3.41217144	6.416703328	3.36934034	5.230334404	5.829787083	4.121011636
Zm00001d036642	28.71100209	30.91951218	31.50897586	56.16526551	42.44131476	48.5188998	31.5210405	28.0864171	23.31575522	0.992362394	4.003064531	0.48449489	45.50094981	43.63055457	52.78390904
Zm00001d036643	0	0	0.020924446	0.167981969	0.011092276	0	0	0	0	0	0	0	0.857246322	1.079720286	1.138719219
Zm00001d036646	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d036648	5.372165091	6.08963563	4.512421887	6.053041342	7.176251709	4.834099112	7.727665028	7.884812828	6.693907774	4.854238811	6.844553282	3.796353544	4.104488956	3.39134157	5.975367977
Zm00001d036650	54.76057183	38.43902782	50.4079443	51.88156812	127.3676813	64.61041428	99.49473137	108.9383751	102.7949441	65.09238475	67.69567848	35.25308291	19.59399317	20.89458063	20.02506757
Zm00001d036651	6.244428466	5.910295009	5.728604208	5.299377127	5.385899612	5.432150963	5.127059156	5.001009395	4.989773832	1.961927274	3.314014509	2.875384241	3.488689553	4.166962079	4.405336134
Zm00001d036652	3.72534135	4.181498268	4.490882374	1.673636308	0.930163338	1.609834786	1.461909925	1.07030589	1.043001627	0.838637545	1.595304442	0.22453313	3.081609713	3.049478991	2.62622133
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Zm00001d036655	0.428862941	0.721580388	0.248187173	0.400123719	0.284701752	0.46525367	0.195094991	0.157896516	0.230135084	0.252843292	0.057796481	0.007253052	0.600805115	0.671108193	0.73048892
Zm00001d036656	2.214206521	2.642952743	2.551214093	1.785541405	2.418184513	2.132333044	1.902547316	2.420193696	1.813274444	0.706574251	0.716852685	0.443136157	1.123045489	1.130940629	1.290104784
Zm00001d036657	1.839000476	1.999148291	2.098553192	3.170343738	3.470893495	3.050425817	3.443935206	3.516769911	3.066908292	2.417727288	3.39144877	2.523495263	3.634822733	2.985261285	3.968313023
Zm00001d036659	0	0.111090127	0	0	0	0	0	0	0	0.081096282	0	0	0	0	0
Zm00001d036660	1.423422957	1.361328802	0.501666426	0.526607811	0.552872824	0.54008468	0.384786282	0.429081021	0.425768257	0.084238999	0.210977364	0.03235977	0.386327014	0.369723118	0.49124513
Zm00001d036662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d036667	3.31323785	3.424384476	0.054720289	0	0.05801564	0	0	0	0	0	0	0	0	0	0
Zm00001d036668	8.701545012	4.92489619	7.691911265	7.417952293	31.21411169	10.3167971	18.68685128	23.20717128	20.45696824	10.96643253	15.3912008	13.25895188	4.986041822	4.033493581	4.851198793
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Zm00001d036671	20.33863659	17.7582663	18.16897222	12.6255173	22.12440073	16.52431157	23.26536656	24.96630032	22.66915933	40.02972332	33.01414783	42.55331516	28.9543022	22.19534451	29.31323983
Zm00001d036672	0.543056581	0.287706619	0.224970772	0.430016895	0.499753896	0.517470034	0.382751453	0.405354006	0.388023606	1.24827426	0.668506729	0.840293053	0.569113767	0.514997052	0.548120847
Zm00001d036673	2.60468062	2.456247756	2.672686479	3.989756412	5.236074507	4.786635222	5.84521391	6.522892497	6.45753377	13.73357805	12.1192795	15.29973735	2.593354549	2.621057859	2.856937208
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Zm00001d036680	1.954123888	2.047817168	1.071995211	2.913094352	2.675424782	3.955825178	3.790790454	2.411452714	2.485288482	0.452685693	1.501629746	0.752567925	2.989666338	2.485262618	2.391610871
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Zm00001d036737	205.579583	196.7039313	186.5266347	81.58585964	78.00392617	68.35315607	37.2248537	48.63153653	44.80355394	3.406801739	19.01218711	2.736366373	28.30946588	24.46457517	22.74855195
Zm00001d036738	68.23990114	65.14164445	70.86461645	61.15585386	49.07531094	74.97343626	40.12389946	37.24468828	42.52745956	21.24682347	33.12351019	22.36773375	85.76295428	94.93465153	115.8831509
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Zm00001d037001	11.46832538	11.57630191	11.59711821	13.39043718	13.46962462	14.15471819	13.07937767	12.15023693	12.95651093	6.171172538	11.42041321	10.16936541	9.377324698	9.469686405	8.817042218
Zm00001d037002	2.946507004	4.441051943	0.789657369	1.07978604	0.432406153	0.932408275	0.701652695	0.218893923	0.602773039	0.019259331	0.105658006	0.139223036	0.539121518	0.619988673	0.791097846
Zm00001d037003	0	0	0	0	0	0	0.017270094	0	0	0	0	0	0	0.178222436	0.034174729
Zm00001d037004	5.838668517	5.237215865	5.847397462	6.321678373	9.766281494	5.826121194	8.564970271	10.08337837	8.505434923	7.388214359	10.20865212	8.012538012	3.342144714	2.480906167	3.268155603
Zm00001d037005	4.591798568	1.454046331	5.40464478	0.757785328	22.279995	3.339192057	20.98535724	22.99442445	31.99733608	134.0432716	128.2208087	188.415225	0.223407393	0.161763222	8.520085363
Zm00001d037006	1.25274819	1.379942282	1.08544532	2.194384051	1.702904414	1.690868071	1.443987643	1.286936711	1.183616358	0.195225569	0.717583926	0.561367298	1.664814225	1.610725657	2.238802124
Zm00001d037007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037008	0.48952986	0.594144137	0.508834563	0.166505565	0.152461024	0.07633068	0.052001422	0.08585623	0.109768379	0	0.044895481	0.098596175	0.099599933	0.117085052	0.144063391
Zm00001d037009	0.913142578	0.709640154	0.965835135	9.167192241	4.91519718	10.65565346	2.058339957	1.210365426	1.932838638	2.500884858	1.44550262	0.509355968	4.326496541	3.613607451	2.605600474
Zm00001d037010	1.602634725	1.736022085	1.52416784	5.66684662	5.343618139	5.110280326	6.176035137	4.706711703	5.117466307	0.464012794	1.614954237	0.436818366	4.906547312	5.127823366	5.646426645
Zm00001d037011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037012	0	0	0	0	0	0	0	0	0	0.086888873	0	0	0	0	0
Zm00001d037013	0	0.019929363	0.019665104	0.039467986	0.083397483	0	0.018489395	0.019079162	0	0	0	0	0.070826619	0.104075602	0
Zm00001d037014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037015	1.192002096	1.000887368	1.280242716	1.633439311	1.27008352	1.748832957	1.79695421	1.543748624	1.034493122	1.024942645	1.261906126	0.741731915	1.391525784	1.306714556	1.148430909
Zm00001d037017	0.129766039	0.4134091	0.493307531	0.942471702	1.096320681	0.748146606	0.909789709	1.555479041	1.346197928	3.779399157	3.888836008	3.28931374	0.845648478	1.230079478	1.182567737
Zm00001d037018	25.23270952	28.66285287	24.26236817	96.23172016	128.1355995	98.32360902	148.2438573	172.1703606	166.6961574	391.8014167	411.6283716	490.6028825	88.23422826	89.18122702	111.2260849
Zm00001d037019	0.026341491	0	0.163686414	0	0	0.129087724	0.277020294	0.158809212	0.032486364	0.036329259	0	0	0.176861847	0.086629403	0.030454359
Zm00001d037023	7.769444414	11.04021373	10.27485559	30.62198089	13.5514074	31.91182553	5.936004986	6.15537564	4.729517561	10.6810007	7.034115967	4.992953416	2.563691396	2.183881486	6.017148857
Zm00001d037024	0.602372376	0.65973064	0.227843962	2.678379178	1.000769796	2.310225122	1.132316029	1.610544459	0.516794575	2.709035271	2.410938916	1.421598186	3.194524755	1.55036759	4.148268685
Zm00001d037025	13.77480387	15.82753782	16.36851738	24.96170705	22.27850035	29.22638966	20.19041892	21.09461562	17.85033419	15.08152772	17.42488838	8.05978916	11.30972333	9.470879789	17.53207816
Zm00001d037026	1.46190222	1.497684754	1.742965094	3.197179464	2.83410633	2.905068198	2.926063764	3.377846348	2.760468334	1.982439993	3.563522789	2.289671056	3.283572074	2.549572692	3.760400415
Zm00001d037027	0	0	0	0	0.115844735	0.107711461	0	0.106008979	0.135533947	0	0.110867296	0.194782926	0.098382957	0.072284019	0
Zm00001d037028	10.91085336	10.34783962	11.79398747	24.42431744	35.94162494	25.87410735	33.70556995	34.58375122	29.7525027	22.43663793	32.77016075	17.73176232	22.2989614	19.92879916	24.96449648
Zm00001d037029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037033	1.169515586	0.050793421	0.751798662	0	16.84481551	2.223336124	7.209882162	13.76131012	11.04133895	9.622109702	17.54499493	5.048124172	1.128211633	0.221045527	0.326373701
Zm00001d037034	7.045084283	7.835598577	6.230483414	10.47566618	10.91135526	11.00070681	12.05863586	11.38248401	11.40102147	11.29559789	15.56694616	17.42608339	10.72773687	9.269213377	10.3730687
Zm00001d037035	15.36354686	11.61265468	14.40434766	11.26233482	27.57044447	13.07291832	23.53574279	31.80848301	26.60018191	40.01759849	40.75637889	43.96279012	7.330997139	5.799363924	5.792906851
Zm00001d037036	1.859497334	1.959400002	2.031066178	6.944187965	4.355074078	4.119901468	1.670931221	2.387395315	1.71834196	0.108361411	0.277423108	0.034814649	16.09571556	18.57570056	17.79213634
Zm00001d037038	0.023409647	0.049140895	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037040	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037042	0	0	0	0	0	0	0	0	0	0.34370885	0	0	0	0	0
Zm00001d037043	36.89293976	39.68911458	41.57286643	79.86976745	88.66394534	69.84744465	70.81044746	77.97937789	60.14746643	37.50918708	78.2518676	35.92760714	65.80546397	51.49749366	58.06674221
Zm00001d037044	0	0	0.031817696	0	0.033733813	0	0.17949255	0	0	0	0.193706344	0	0.02864897	0	0
Zm00001d037045	8.869331976	9.345695895	8.266565966	7.20483338	7.349407298	7.13922682	8.231877755	7.485427263	7.188878634	1.949138957	3.854229544	2.174280725	7.863289787	7.313317232	7.67971875
Zm00001d037050	5.847577931	5.420383639	5.677869893	4.433187872	4.729301514	5.455996267	4.315158232	4.459748157	4.589900234	0.627701624	1.380351568	0.312715657	2.617450989	2.122037055	2.511079288
Zm00001d037051	10.97851343	11.94785653	10.31373566	11.31283223	10.74675719	13.63301453	11.24379838	9.795189404	10.53076253	12.1702156	9.564974701	10.11301952	9.627848582	9.012048148	12.70016129
Zm00001d037052	22.14671709	21.26392469	25.5325824	13.16392169	31.10422475	15.59632404	51.88435821	55.69341647	50.37103927	135.0404766	93.72295458	178.3334838	6.989262627	8.177383565	10.68961654
Zm00001d037053	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037054	0.162752785	0.22776415	0.427013684	0	0	0	0	0.021804757	0	0	0	0	0	0	0
Zm00001d037055	5.613674813	5.577117624	6.248950477	5.788004574	6.006744306	5.389366765	5.128912252	5.368369744	6.326388805	6.727690113	7.420770028	5.848676253	3.173433682	3.11939447	3.625545565
Zm00001d037056	72.67682611	68.5726414	64.00000103	36.62418691	44.46447355	36.2167098	44.39651258	42.25058242	42.56434249	111.5947173	107.1563025	161.1747594	29.76700207	26.94928984	32.47676854
Zm00001d037057	42.42903997	41.44110401	46.46817067	84.14520702	38.55866972	58.13606615	48.87863933	28.5710781	49.31529866	2.037786258	11.15001481	3.394131269	11.86116229	11.91789966	6.437406963
Zm00001d037058	19.86391634	20.50776312	19.63777926	33.94292332	24.37535666	31.41066327	20.74055576	17.53072259	18.69921119	12.92533408	17.3095005	14.98707378	13.4976818	12.92002812	13.20647194
Zm00001d037059	51.1317215	55.68360515	44.81686573	77.48404628	53.49729339	89.21165616	34.58957296	24.13323739	29.8715649	18.11080491	18.14344928	15.4782164	54.75828989	52.87111178	45.74597219
Zm00001d037060	94.44755636	89.12072852	87.66859798	439.7428762	328.1436561	423.693066	19.35412938	13.97019786	18.43689491	102.126462	146.8932493	109.8067434	117.4681084	101.0024732	102.8216289
Zm00001d037061	0.187277177	0.096494849	0.042317932	0.626376104	0.078516186	0.292014757	0.467507682	0.33872047	0.083987163	0	0.075142623	0.009429871	0.438190092	0.055990859	0.186992795
Zm00001d037062	0	0	0.020898708	0	0.088629059	0	0.078596984	0.04055202	0.145169694	0	0	0.018627764	0	0	0.019441343
Zm00001d037063	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037064	1.29322483	0.69806634	0.229603375	0	0	0.226339623	0	0	0	0	0	0	0.413474317	1.620203967	0
Zm00001d037065	0	0.097282315	0	0.019265729	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037066	0.026524013	0.109766159	0.018836641	0.439486086	0.189724651	0.246037695	0.181532238	0.264993066	0.271037842	0.109742959	0.100342893	0.10073862	0.669947578	0.452763484	0.534453734
Zm00001d037067	3.760916264	3.820070929	3.694029232	10.1563408	8.912013226	9.921282929	9.817037903	8.447910212	9.098830601	3.231369725	5.564947968	3.637001275	16.38463647	17.22286702	16.48959096
Zm00001d037068	0	0	0	0.100590973	0.106276439	0.024703735	0.141370238	0	0	0	0	0	0.022564233	0.088418211	0
Zm00001d037069	0.062685941	0.035887807	0.007082388	0.660969487	0.623238881	1.033293687	0.279676178	0.288597183	0.253011766	0	0	0	0.216819796	0.174919895	0.177889506
Zm00001d037070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037072	1.60618322	2.728689189	2.8781975	6.708263562	4.872600483	8.786429973	6.896241087	4.098579389	3.823538548	0	0.047103455	0.372402603	3.385744616	2.129284449	3.022969521
Zm00001d037073	0	0	0	0.077677312	2.161115642	0.775776052	7.338478628	10.72674834	6.055413877	0.057266167	0	0	0	0	0
Zm00001d037074	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037079	35.87942082	37.07645294	49.04564	106.8165205	70.7311117	106.5624589	77.92154745	75.48656199	76.93968049	2.638681937	12.59777527	2.105993344	134.7735835	151.6609216	165.9960263
Zm00001d037080	0.019007624	0.005985043	0	0.035558227	0.056352001	0.005821735	0.144367661	0.217729251	0.0644646	0	0.041946143	0.021055784	0.467943127	0.291715556	0.510928232
Zm00001d037081	11.11283221	11.2372612	10.49712257	3.154775767	2.136593397	3.024026229	6.715831558	1.772702599	6.168230658	0.318058163	0.863356423	2.187431771	0.072581417	0.05925232	0.05832403
Zm00001d037082	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037083	6.741509593	7.1332653	8.303940838	0.768217917	1.025820354	0.94331783	2.179295654	0.567360321	2.300107768	0.283177254	0.064730405	0.881368363	0.047867803	0.018757055	0.197819926
Zm00001d037084	7.363029855	7.975697835	4.874120117	5.684827703	5.700818181	6.482714942	6.61139217	6.659646034	7.481199578	4.483580156	5.682657108	7.754163918	1.517083607	1.816017892	2.007214181
Zm00001d037085	11.07217228	11.12785713	9.721997771	5.100236999	4.591036615	5.398251524	3.968924116	4.25238769	3.930843342	4.84438721	3.833854866	5.062744308	5.111120777	4.709367169	4.136192029
Zm00001d037086	0.557197307	0.404604612	0.710151924	2.449920439	4.161654062	3.190310883	2.797008257	3.098751131	2.899473865	0.991949683	1.595287947	0.677072175	1.663784886	1.66728725	1.958882095
Zm00001d037087	0	0.052060377	0	0.012887506	0.095311409	0.025319928	0.060373533	0	0.101952671	0	0	0	0	0	0
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Zm00001d037095	3.047202741	2.351184619	2.985304927	2.174067847	11.90072035	2.858787613	9.55923978	11.17165407	9.987599967	29.83463808	29.8581992	23.52243402	1.474559012	1.5047075	1.84083755
Zm00001d037096	10.09677864	10.87215937	9.926272078	8.170628694	9.297811361	9.014278618	8.838524175	9.860034331	9.246985034	9.578763135	9.755142866	8.232610934	7.979150776	7.022476595	6.849898443
Zm00001d037097	2.120581345	1.80545523	1.207307868	3.693710981	5.557134189	3.860718499	12.63867083	13.81318124	9.876642933	9.329410409	9.859887888	4.645674064	2.518825348	2.324655736	4.971845564
Zm00001d037098	5.432724953	6.824073778	4.212136204	5.349431384	3.318443617	5.571070972	6.320732183	5.249695131	5.658709412	1.512272608	1.526927744	0.607333832	9.40288303	9.526298987	9.972270879
Zm00001d037099	2.810410574	3.288381273	2.752894475	4.228840335	4.294752269	4.755196984	5.320411576	5.077057687	5.192870821	8.646505082	7.364846662	8.709718191	4.687634936	4.515572114	4.506607893
Zm00001d037100	4.476986948	4.102673317	4.688965745	4.376336709	5.477294358	4.603682481	5.294441233	5.249702602	4.791810985	9.356133943	7.898887898	9.465653967	3.566825391	3.19659124	3.503123531
Zm00001d037101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037103	8.221671834	13.88077183	14.77228599	76.44749762	23.05631067	55.92984183	9.006584629	10.67980171	6.837560265	0.093248692	0.306941209	0.014979597	421.9887802	479.017069	435.8401868
Zm00001d037104	18.81019685	18.86989244	19.04597029	13.91055527	17.12607667	13.69496691	16.89811381	15.59813836	14.21653946	12.6966366	19.03954578	15.85680939	10.82276436	9.581669946	9.361686181
Zm00001d037105	34.00124297	28.32135018	34.12500153	20.56199592	27.85426143	20.69059457	21.43489316	25.59592071	24.62796115	2.983011734	6.364168915	2.064456751	8.821402564	7.903532289	9.664349768
Zm00001d037106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.237519034
Zm00001d037107	0.518196158	0.883024088	0.719782264	0.171071939	0.441811415	0.69087836	0.480847935	0.588072106	0.404123851	1.08252687	0.84565668	0.835726242	0.920982928	0.442756407	0.669588471
Zm00001d037108	0.920659161	1.39707665	1.44747929	5.664944883	2.945064544	3.533285481	1.814585941	1.598284259	1.62790291	0.045894245	0.377668433	0.030718808	13.0704851	13.04132737	13.94630477
Zm00001d037109	18.88669717	18.83451314	18.01103287	18.88309048	22.2603371	19.13675153	20.38592678	22.2445988	19.62064612	19.40695202	18.88684459	12.80102443	28.66475435	29.64066029	27.32827947
Zm00001d037110	2.265539024	2.768610275	2.317707928	2.347935739	3.527090646	2.918935891	3.040853299	3.052349301	2.689097547	2.351970933	1.985088141	1.276431812	1.83693686	1.706235285	2.082300968
Zm00001d037111	97.61069813	75.49855951	114.2611295	142.164237	262.9435159	143.2851164	179.3352325	220.791004	188.9232012	16.92105108	45.93278605	8.013455853	44.89714249	38.04363547	59.98103042
Zm00001d037112	1.553208245	1.351433957	1.762476841	1.272680079	1.156762454	1.213438772	1.736014114	1.429492099	0.84209577	2.421538531	1.409846225	1.105489322	3.501369508	4.211463222	4.918713196
Zm00001d037113	0	0.057063694	0	0.056504291	0	0	0.119116431	0.095601304	0.013968867	0.124970243	0.271381464	0.22584814	0.063374274	0	0
Zm00001d037114	0.112102033	0.091939579	0.106920565	0.243852544	0.425956938	0.475900208	0.28939922	0.232617338	0.234708406	0	0.055888196	0.002887943	0.367585291	0.502992383	0.551575822
Zm00001d037115	6.241579256	7.416357552	5.120533097	3.24864518	3.532705131	4.439556444	3.152385205	2.723859841	2.669051049	1.635987616	1.535714851	1.003034056	4.941392036	4.930406491	5.105236456
Zm00001d037117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037118	0.121943613	0.2730461	0	1.791197233	0.053559533	1.344578496	1.044934825	0.702506479	0.217230425	0.112120231	0	0	8.50593301	7.93161298	7.143161847
Zm00001d037119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037120	0.109302608	0.142961926	0	0.020971919	0.011078632	0.00515041	0	0.005069003	0.005184632	0	0	0	0.037634809	0.023042569	0.082625709
Zm00001d037121	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037122	9.744463552	9.843757294	8.696879785	8.899482919	10.23452564	9.816124386	8.991389802	9.311478736	10.40052342	3.616787726	5.852503246	3.68479937	6.680083558	6.362428932	5.884293993
Zm00001d037123	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037124	31.03660977	29.41879293	31.92073135	36.05929546	42.92663636	33.42699137	37.52387232	40.19386824	38.45611372	27.15905845	28.90428359	15.69214769	28.15584155	27.231492	32.11606495
Zm00001d037125	0.86006449	0.99026041	0.865528648	2.585772371	2.955418846	2.662356575	3.15019774	2.410942201	3.07873145	0.437589665	1.144962543	0.289580032	1.442543152	1.548783504	1.524980554
Zm00001d037126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037130	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037134	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037135	0	0.033762686	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037138	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037140	0	0	0	0	0	0	0	0	0	0	0.030675916	0	0	0	0
Zm00001d037141	0.449289378	0.282940817	0.319073235	1.320787808	1.818300052	1.100881924	1.799981628	2.553920542	1.029039901	0.575383829	1.052198308	0.07110034	2.154725316	2.708897361	1.929347952
Zm00001d037142	22.18371317	23.93504052	20.02374622	14.06639016	15.51935943	14.94990896	15.57858611	15.54105089	15.88897284	20.01490285	17.72136861	20.78210181	12.34939572	13.53210492	13.66955778
Zm00001d037143	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037146	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037148	0	0.120272198	0	0	0.020970729	0	0.130179114	0.019190217	0.058883899	0	0	0	0	0	0.018400247
Zm00001d037149	0	0	0	0	0	0	0	0	0	0.327911052	0	0	0	0	0
Zm00001d037150	9.090086873	7.538351764	6.690566894	11.71698881	9.271215963	12.09987187	7.181176703	7.739153157	6.926230103	15.78986009	10.05658767	10.36287462	30.17513245	31.82954399	29.09790637
Zm00001d037151	0	0.048367892	0	0.131707773	0.05060072	0.176430465	0.078527991	0.069456726	0	0	0.048426586	0.042540372	1.493327538	1.094547905	3.20778068
Zm00001d037152	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.013073459
Zm00001d037153	0	0.011305955	0	0.100756093	0.059139384	0	0.052445295	0.108236351	0.055352669	0	0	0	0.090405087	0.324732279	0.342476558
Zm00001d037155	0	0.186538839	0.056635499	0.156293224	0.630484972	0.223321762	0.718867663	0.879167799	1.095927495	0.581358969	0.545929045	0.315507761	0.101990332	0.174847011	0.421488322
Zm00001d037156	19.08082189	20.03009116	20.64769444	12.24296219	11.6442963	13.67539576	10.94668637	9.772694234	10.29053982	6.952028634	7.651371858	6.145152045	6.466241453	6.294522035	5.862161547
Zm00001d037158	5.078763667	5.005289737	5.701688302	6.334013729	9.643781672	8.083195082	8.139815908	9.824034114	11.16458986	4.507396867	8.16523328	4.266259822	6.301422847	5.819823567	5.42825869
Zm00001d037159	13.69335566	15.89550521	12.43369151	13.02213622	14.45772288	13.96438565	15.32860568	16.72446025	14.89610187	22.12703187	21.83576699	23.04738244	11.3439489	12.34356849	13.33135848
Zm00001d037160	0.816311359	1.686959931	0.817521119	3.064088501	11.03805573	4.05863028	33.74626425	43.23212088	42.89878059	252.6445351	170.8495565	148.2129257	0.727235408	0.703732071	1.585162602
Zm00001d037162	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037163	51.31565592	50.87105352	54.21154578	48.7468853	78.57768365	52.08198694	75.85617301	86.93596386	90.2528525	102.267675	144.6155375	100.3429875	36.18277688	34.4272803	39.73895347
Zm00001d037164	15.78384023	18.60545869	16.71904079	36.96727183	48.04761561	40.96546172	48.83249447	53.69872589	50.45149663	14.92538892	21.19002893	9.271332848	21.35818845	19.93814944	22.01958307
Zm00001d037165	0	0	0	0	0	0	0	0	0	0	0	0	0.021247986	0	0.021952517
Zm00001d037166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037167	0.013363865	0	0	0.216668826	0.105653116	0.196470758	0.421623263	0.161137793	0.08240676	0	0	0	0.32900107	0.336948577	0.803423487
Zm00001d037168	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037169	0	0	0	0	0.041698742	0	0	0	0	0	0	0	0	0	0
Zm00001d037170	0.938051629	1.378392747	0.777208883	1.657354506	1.808252414	1.830273651	2.334315437	3.236136235	1.938841526	0.119789616	0.930996499	0.29826909	2.031383035	1.628181465	2.158989577
Zm00001d037171	0	0	0	0	0	0	0	0	0.041022927	0	0	0.294780974	0	0	0
Zm00001d037172	0	0	0	0	0.009172025	0	0.032535309	0	0.034338947	0.048001236	0.087779351	0.007710984	0	0	0.016095532
Zm00001d037173	1.104746175	1.623337212	0.514868174	4.707454312	5.398091628	8.515552028	29.90575536	18.70451693	15.21411907	0.063484463	0.638513503	0.458920379	75.56556389	83.46232525	97.76187465
Zm00001d037174	84.30343862	75.20526936	93.48591575	19.30791216	15.14351659	17.55898028	16.87890739	15.60583225	16.99011856	20.31562112	28.28474486	20.73614083	10.80985438	10.79549916	8.762672735
Zm00001d037175	0.002411152	0.006073711	0	0	0	0	0	0	0	0	0	0	0.010792628	0	0
Zm00001d037177	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037180	1.202173944	0.633827106	0.62542269	1.638768885	9.670014901	2.94565514	5.569958486	6.489256183	4.740916486	0.38558048	0.581713222	0.015485043	0.813419823	0.888792872	1.163618066
Zm00001d037181	17.54959815	7.652875428	11.58818547	18.17878633	51.23089637	32.44896876	33.76242135	37.33345528	27.44302892	12.63678495	16.46549714	4.009857498	19.56623029	18.70703588	18.02908823
Zm00001d037182	0.008603671	0	0	0	0.17004899	0.042162699	0.64341697	0.269725804	0.063664278	1.103526967	1.052402054	0.438414812	0.038511138	0.009431647	0
Zm00001d037188	1.322317589	1.417708937	1.385328757	2.167047971	1.612751326	1.700351544	2.145301844	2.609041129	2.021633453	0.648089589	1.791512706	0.690031362	1.553090182	0.814634928	1.06130153
Zm00001d037189	6.359020265	6.551101384	5.304198018	8.601183409	7.940003743	8.457402547	5.214464268	4.995030557	4.925928166	0.218343668	0.403441946	0.080380264	3.096618392	2.292324769	3.481473201
Zm00001d037190	0.311751813	0.369555353	0.763496669	2.927460423	2.09013893	2.381499673	1.274986986	1.4704391	1.87714971	0.290853364	0.855633789	0.477388	1.159447432	0.75386754	1.017678041
Zm00001d037191	8.210982242	9.485355584	8.130416425	5.075220124	9.814633102	7.017722281	6.861836519	7.527915684	8.055394257	8.354689273	12.90066732	7.863204719	2.536308172	2.428169284	2.715693407
Zm00001d037192	0.140383919	0.163212983	0.201311016	0.942742411	4.795157649	1.442065879	1.5015842	2.460940669	3.16965298	14.35711659	8.347580559	8.541139001	0.567955638	0.082865882	0.699151245
Zm00001d037194	0	0.052496859	0.086334602	0.017327408	0.219681175	0.017021476	0.081172952	0.217781657	0.154211186	2.682605659	3.76684033	4.078514956	0.015547307	0.350303246	1.268962554
Zm00001d037195	0	0	0	0	0	0.006383053	0.012175943	0.01884649	0	0	0	0.023085934	0	0	0.018070669
Zm00001d037196	0	0.018286926	0	0.065187565	0.065045785	0.035575897	0.115366282	0.094536682	0.04297474	0.024029166	0.036618234	0.009650195	0.103983346	0.073215462	0.067144486
Zm00001d037197	0.235204024	0	0.182695159	0.036667032	0	0	0	0	0	0	0	0	0.032900107	0	0.339909937
Zm00001d037198	2.159539947	0.899278384	0.901900929	1.2116131	4.110182116	2.172511574	0.834302272	1.891189293	1.017688203	1.194573224	3.734319982	3.46194132	2.750595416	2.251882376	1.793039468
Zm00001d037199	6.075402984	7.024258987	5.676617639	6.058436	6.675185341	7.713721214	6.619937046	7.112556747	5.695352853	7.787320032	9.570630868	13.46710006	4.242929579	3.879853917	5.244291129
Zm00001d037200	29.27609038	30.52812749	27.3175355	32.43182162	27.50280665	28.04327169	28.24908093	34.04002615	31.58106754	39.54048233	59.10057552	48.02664923	32.05911686	28.55299821	31.61162414
Zm00001d037201	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037203	0.346545854	0.152766525	0.42351007	2.290643863	1.963487509	1.931775696	0.485926599	0.243748994	0.334786599	0.039828655	0.094684512	0	0.35547961	0.525522432	0.454074871
Zm00001d037204	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037205	26.70691097	62.94887444	23.39365426	11.77153173	6.788604611	8.8964233	10.11265643	5.348053375	7.688086054	1.156283779	4.075497166	3.849756416	14.07284991	15.89114	12.42890267
Zm00001d037206	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037207	0.077402598	0.012186107	0.312637575	0	0.050994639	0	0.022611234	0	0.023864718	0.13343868	0	0.032153657	0	0	0
Zm00001d037208	0.094624851	0.056999298	0	0	0	0.020161459	0.043266185	0.04960697	0.015221568	0.045392442	0	0	0.036830695	0.009020094	0.147451151
Zm00001d037209	0	0	0	0	0	0	0	0	0.044021992	0	0	0	0.009985999	0	0.01031711
Zm00001d037210	0.499405805	0.864879757	2.249903392	1.868511768	0.740295466	3.288642383	4.157834274	4.215188076	3.464470478	0.086095368	0.236162528	0.276609544	9.221043682	12.45485561	13.06325107
Zm00001d037211	1.016105224	1.253933981	1.301085792	4.03213477	10.12941321	4.60223901	6.596216458	7.821425236	9.74664092	2.264851109	5.513650384	2.819672961	2.044400792	1.6427068	2.871626517
Zm00001d037212	0.002163512	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037213	7.561029372	5.80993808	6.264579706	8.617874983	10.68577056	8.773354928	8.465576859	11.16901948	8.774301763	1.526347873	5.46515435	0.484207829	5.494989296	5.464606307	7.064230292
Zm00001d037214	4.637095188	5.343902948	5.357936519	5.128437966	5.276864124	5.606954298	5.530189807	4.617042883	5.971550243	0.627150367	1.644001362	0.626961889	4.009726957	3.955853463	4.12462876
Zm00001d037215	7.990389291	6.057785561	10.25754793	4.453529273	14.41467229	6.253824644	12.47023448	14.92513538	14.20797012	21.83987731	34.34240531	34.78732233	2.218873627	1.820511295	2.790803857
Zm00001d037216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037217	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037218	5.513108318	4.201053993	5.04306776	0.066239976	0.503884093	0.169183153	0.707510261	1.139946592	0.432318538	0.629961209	3.067543892	1.6356393	0	0	0
Zm00001d037220	2.031886142	2.270338117	2.33965257	2.540731382	3.225418395	2.927096234	2.919528422	3.10268039	2.930102767	1.184176541	0.907892225	0.505107802	2.142453426	1.976035773	1.886708989
Zm00001d037221	65.08226885	55.20643359	56.65040327	17.39416454	13.28916945	17.32212876	10.62186527	5.046538844	11.19591246	0.810429288	1.209815058	0.34539797	13.43320026	11.54253204	9.899429664
Zm00001d037223	0.123487253	0.060206188	0	0	0.015746378	0.01464085	0.018618691	0.009606292	0.019650843	0.280186235	0	0.008825392	0	0	0.0598705
Zm00001d037224	0	0	0	0	0	0	0	0	0	0.189734697	0	0	0	0	0
Zm00001d037225	0	0.012764247	0	0.088473824	0.600906994	0.1614075	0.544731282	0.818720939	0.874892224	2.571756063	1.789163114	2.997440668	0.567032978	0.388836942	1.206818861
Zm00001d037227	23.87600919	25.03524534	21.71603303	15.49797235	13.28004143	15.7823826	14.3930957	12.49802417	14.18617477	4.842753319	7.22979461	4.422734786	9.517023672	9.836536304	9.659519436
Zm00001d037228	0.452576763	0.580777242	0.48817607	0.617682607	1.046401398	1.140321926	19.04807229	9.987423072	7.371827668	0.047107771	0	0.009459321	0.898228405	1.816024997	2.290411243
Zm00001d037229	0.366065592	0.602694075	0.240854503	0.811628668	1.573138661	1.518384747	1.269264259	0.631796075	0.504573387	0.250782516	0.108616578	0.005300795	1.839360111	1.243224413	1.333286912
Zm00001d037230	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037231	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037232	0.005834927	0.088189346	0.014503329	0.094601882	0.284469776	0.107228759	4.165866571	8.224609128	5.764062663	6.630996859	7.446326485	20.14078735	0.026117883	0.012792904	0.080951662
Zm00001d037233	0.312590419	0.254752746	0.18281802	0.680325093	1.179118146	0.672067844	1.26051168	1.640679651	1.152752525	0.181744021	0.343947085	0.159557388	0.617291853	0.63495216	0.733423694
Zm00001d037234	0.155458847	0.195800993	0.142062289	0.136857551	0.078321114	0.151246344	0.256452232	0.30322468	0.073306187	0.163955526	0.236399481	0.177275264	0.158613726	0.130320754	0.206162766
Zm00001d037235	0	0	0	0.100568153	0.089905817	0.326775264	0.376901779	0.104710321	0.198897912	0	0	0	0.187414176	0.129197299	0.093228474
Zm00001d037236	8.856265383	7.898715134	9.536030456	17.09557646	18.66149164	19.67075172	15.16652296	14.6845021	13.90816517	1.518935515	4.258315419	1.623331541	5.143653543	4.250608345	4.49339664
Zm00001d037237	4.70600209	5.266978971	4.464209936	6.270302128	5.274645514	5.400591625	5.408474209	5.027920417	5.296891058	6.588940374	3.37285368	2.764920298	4.61956208	3.872428676	4.20110909
Zm00001d037239	44.07571314	41.71662063	42.20327324	81.65794297	116.948001	82.80517313	126.4884566	131.3135563	142.7870397	79.36895644	118.1664914	61.37053922	65.78858994	68.77893618	76.0872846
Zm00001d037240	4.125160026	4.73022277	4.50587301	7.360055933	4.085509179	5.432781143	3.135664051	3.27393113	3.372084599	1.20741262	1.927984856	0.78532883	10.14815632	10.26827759	10.34345544
Zm00001d037241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037242	3.177817086	2.779494707	2.584937433	5.353120327	7.981926655	5.799336308	7.013971993	9.140258439	7.885887914	17.65267729	13.24644962	16.26278259	6.951641248	5.715338148	6.378455234
Zm00001d037243	18.5417617	19.16255712	17.91959181	24.92873163	13.24828587	25.55202698	13.83358896	8.198588599	10.73476667	0.964359222	0.547297288	0.026709652	16.62064664	14.59040821	16.1124504
Zm00001d037244	0	0.047830471	0	0.047361583	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037245	3.439304131	3.64143306	3.165710686	8.310617397	11.17368919	9.981007986	3.365767533	2.643723923	2.637754855	1.082080692	0.677667633	0.428614316	1.792047101	1.602371534	1.76448531
Zm00001d037246	38.52055955	42.80252743	39.71107931	25.28425952	21.15660244	22.32335342	23.23520848	23.06460875	21.03822692	9.856504612	16.52062876	9.055990138	19.34077085	18.44940698	18.94799152
Zm00001d037247	7.376966889	7.800485493	6.790653309	5.813775715	4.905407451	5.813770095	4.535909863	4.459127609	4.529052971	1.442855002	3.403816758	1.615812215	3.019324085	3.009623067	3.115712011
Zm00001d037248	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037249	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037250	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037251	0.014652984	0.498298159	0.346004657	0.56651154	0.23168947	0.592413034	0.136976094	0.070672653	0.30721028	0	0.018477883	0	0.147574435	0	0.575988864
Zm00001d037252	4.806990981	5.164668207	4.467151629	10.96733359	10.5422608	11.41036699	11.4774665	10.87754754	12.03696007	4.30030253	5.300635457	2.917338043	10.92796822	10.92194218	10.37970276
Zm00001d037254	0.232278246	0.167174463	0.109971843	1.993324877	1.588600599	1.5854761	0.620382017	0.40677515	0.429695246	0.244076188	0.209221658	0.036758186	0.804535383	0.454699232	0.549878575
Zm00001d037255	0.094068123	0.276451349	1.091142645	2.150824183	1.900544475	2.189680119	0.76943022	0.567123723	0.657401814	0.389206352	0.672196555	0.798900385	1.193006173	0.859339834	0.398770488
Zm00001d037257	13.34171427	18.47371526	14.2572885	40.72352796	28.44452538	34.24934643	33.00630549	29.67006518	30.01608937	7.683577213	12.17613754	5.47540374	52.44727031	53.2269698	49.63237624
Zm00001d037258	0.470489459	0.286074655	0.544399775	2.218950116	2.458378336	2.199648682	2.344408429	1.617140136	2.027519221	0.067125779	0.470550101	0.167738303	1.549220227	1.173814702	1.375505797
Zm00001d037260	0.189878249	0.055189005	0	0.036431987	0.009622787	0.026841558	0.008533567	0.008805767	0	0	0	0	0	0.008005816	0.05910293
Zm00001d037261	42.96224545	51.06315156	50.54230066	40.01890449	27.62124637	34.42235432	29.67280058	30.58139713	30.42628058	97.09182411	43.99137858	36.17242079	25.49758291	23.84120827	20.78373449
Zm00001d037263	10.65330149	8.875561651	11.72092285	13.96382567	19.42553823	12.99629127	15.67508835	17.15760004	17.7350807	7.991474643	12.48272755	3.978323023	5.420347095	4.482832556	5.355832566
Zm00001d037264	5.826161391	7.380570317	6.101537325	7.820213666	8.173296393	8.191986059	6.492447102	6.123163221	6.033964626	0.527409384	2.01403601	0.193120341	7.558024781	7.48419599	8.17923142
Zm00001d037265	1.44322804	1.887282518	1.663780096	1.367161012	2.140671707	1.809215456	1.651854354	1.642734034	1.478387248	0.304549636	0.947272628	0.203118928	0.840603901	0.912094922	1.034877225
Zm00001d037266	0.101132194	0.057898351	0.022852253	0.103195379	0.036342683	0.056318534	0.311546921	0.177370773	0.249448087	1.153863201	0.324624215	2.393360821	0.010288198	0.120943269	0.021258658
Zm00001d037267	3.985640585	3.623612297	4.630758577	8.255303774	12.09237112	7.904159271	8.853143419	11.0852348	8.716998756	1.521517658	2.918774541	1.455728845	5.059172305	4.381055882	6.252299078
Zm00001d037268	2.898653378	3.017897409	3.455233881	3.187533401	3.012951682	3.263189194	2.44121179	2.343783788	2.290998792	0.26486448	0.430034695	0.137188093	1.140813477	1.058546021	1.01885962
Zm00001d037269	0.561831531	0	2.560234895	0.467127942	2.467651552	0.229440166	0.875333531	0	0	0	0	0	0	0	0
Zm00001d037270	0	0	0	0	0	0	0	0.011902091	0.012173591	0	0	0	0	0	0
Zm00001d037271	0.835288074	0.652536362	0.538759969	2.432912872	1.072750918	2.448249013	1.544357787	1.364137971	1.167059442	0	0.013333229	0.005856293	7.939154585	5.19846766	4.247888394
Zm00001d037272	2.570296487	2.402264289	2.540885511	6.920267233	7.423292444	6.269921179	5.842684034	5.85184252	6.194775577	0.797256266	1.309669598	0.499265028	4.915563642	4.836904905	4.855775041
Zm00001d037273	10.64737844	11.35414929	14.39706148	35.87086624	29.61156238	40.52489914	42.01896364	41.2709027	36.04944023	13.21604123	16.93552637	11.11845417	93.14163775	96.17752835	109.7872035
Zm00001d037274	1.736770331	1.782623713	1.050237357	2.301805263	2.226968966	2.25481301	2.277792451	2.03163776	1.77747349	1.115419847	1.464440526	0.580046122	2.088539214	1.528810209	1.384581945
Zm00001d037275	39.33185691	46.14096634	40.68650112	39.35453342	35.50112003	37.129623	45.00584392	46.52173697	37.70491671	4.317562084	13.41811628	5.109611677	39.54144039	35.19454026	39.79368276
Zm00001d037277	19.29573556	22.61390216	18.04512452	20.46361731	29.71655178	22.49983516	30.14271036	34.80039203	32.35378467	79.17542003	120.2303669	134.6621232	20.90342383	19.06740039	25.50447353
Zm00001d037278	20.32179669	22.76977461	18.31395317	17.38392998	27.9398588	21.47181537	23.58633777	29.83806164	24.26889707	7.915753673	10.49039656	4.730645309	24.2954478	23.90661227	24.75870853
Zm00001d037279	23.40556364	22.71695653	21.86215435	23.88305752	32.30304312	26.88676474	28.48645736	30.74608439	31.11360765	50.72389494	51.0887616	55.00937114	21.65569147	22.80711179	22.00533485
Zm00001d037280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037281	3.891437371	0	3.436311187	0	27.18945356	1.066424143	32.96679835	16.11396035	14.33451693	243.0656024	175.4333785	211.5674512	0	0.224522647	0
Zm00001d037282	0	0.057636719	0	0.570716984	0.271338422	0.280320203	0.066840322	0.193122634	0.084654843	0.173559615	0.014426665	0	0.332855476	0.238285228	0.145492831
Zm00001d037284	0.087974478	0.088643345	0	1.206897482	0.741883401	1.164032349	0.452311986	0.445524222	0.911374216	0	0.244065007	0.019490827	0.413474317	0.732949414	0.508552512
Zm00001d037285	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037286	0	0	0	0.181660866	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037287	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037288	5.944649792	4.286346093	5.209739829	18.16134549	34.02617307	14.67338499	16.93059642	22.93021783	21.0395022	31.12264752	47.07809174	23.2343151	19.31932243	19.45413177	20.70291196
Zm00001d037289	19.83461361	23.10631572	19.88930132	9.201202008	7.854473134	8.654997431	6.312228487	6.066164843	4.201733894	7.822418124	10.60400553	8.952101765	14.32250551	13.67678874	16.75850642
Zm00001d037290	1.010369288	0.938023874	1.268635182	3.429519886	5.112503987	3.049937204	2.726372172	2.455390066	2.961011429	0.035914068	0.420324317	0.034615709	1.188915866	0.827847075	1.433060294
Zm00001d037291	5.746410895	6.329632733	6.511892131	9.192888693	10.31133236	11.75063302	8.100347203	7.999687889	8.098414866	0.857367739	2.167334905	0.954841981	6.138126569	6.60866154	5.731645263
Zm00001d037294	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037295	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037296	0.042722606	0.251109975	0.061945077	0.683782855	0.337759806	0.226811164	0.158084324	0.077270607	0.166847936	0.009820253	0.11672825	0	0.167327888	0.359060827	0.214037038
Zm00001d037297	22.68192844	20.6170549	21.400029	22.95192272	23.38718267	21.52874826	25.66129065	25.23615391	23.19706817	39.11252703	39.18260525	36.16558676	23.97645571	24.39883999	24.2193844
Zm00001d037298	0	0	0	0.048369276	0.012775785	0	0.090637373	0.011691061	0.167408455	1.805254993	0.232310232	0.945180696	0.151900494	0.095660979	0.156937141
Zm00001d037299	0	0	0	0	0	0	0	0	0	0.061084942	0	0.408865349	0	0	0
Zm00001d037300	0	0.132708822	0.032737283	0.262815721	0.208252674	0.548622825	1.169641241	0.476427637	0.259890913	0.145317036	0.199304793	0.20425936	0.412677642	0.028876468	0.030454359
Zm00001d037301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037303	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037304	0.024239776	0	0	0	0	0	0	0	0	0.367737128	0	0	0	0	0
Zm00001d037305	2.666013715	1.639058089	2.238027444	0.855359693	2.423783602	1.146197362	1.668583432	1.594580134	1.83916114	1.018658593	1.898292267	0.841570482	0.806844018	0.697871493	1.232097005
Zm00001d037306	0.77666832	0.813216229	0.418660774	1.540467094	2.133057594	2.820182413	1.093417998	1.20727611	1.396380002	0.24520385	1.298004862	0.279875467	0.670162343	0.369286736	0.735657235
Zm00001d037307	2.196661302	2.660631357	1.378091715	1.006555204	1.590545836	0.644858783	1.123486993	1.40472781	1.004008761	0.542029562	2.681560045	0.621945483	2.615203832	1.500227365	2.069035974
Zm00001d037308	0.517541395	0.849596124	0.346895444	2.342494629	1.75464615	2.172898895	1.637573673	1.500493744	1.219171378	0.665655251	0.71130024	0.373617017	2.824147422	2.326760376	2.232041517
Zm00001d037309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037310	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037311	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037313	12.99532752	13.10588886	12.1686653	8.897664454	5.781557276	8.14352778	6.724180207	5.423505942	6.353169495	4.642906109	4.977475242	4.750972913	5.376013179	5.227602927	5.701058409
Zm00001d037315	0.837719324	0.625452153	0.560809507	1.071694191	0.975797966	1.147998002	0.890574454	0.965841914	0.801482521	0.396035971	0.974711232	0.30853191	0.705492187	0.873367213	0.861182117
Zm00001d037316	0.071782135	0.041095393	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037317	0.894229208	1.501713328	1.001216839	0	0.010615119	0.09869848	0.103549326	0.116566149	0.059612574	0.477760799	0.152385368	0.026772609	0	0	0
Zm00001d037318	486.5875775	437.6187104	454.9295979	145.7491445	112.9876098	125.8019897	129.3701131	122.8068306	161.3648595	66.52390366	172.2700501	77.88937883	39.67637866	32.06285457	37.77183807
Zm00001d037319	0	0.029894045	0.117990623	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037320	0	0	0.041643749	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037321	8.611156831	8.982497404	7.566395193	5.280029915	3.605001164	5.181622372	4.909123093	3.856675329	5.346496832	6.039242772	5.714017423	7.573748499	3.217840203	3.135280197	2.823980452
Zm00001d037322	0.042413342	0.017806587	0.061496664	0.008816013	0.931430007	0.060622505	0.512119902	0.357985854	0.584099452	0.26322746	0.21393834	0.086136555	0	0.023247497	0.008172602
Zm00001d037323	108.1243034	128.7926011	161.1220892	415.6984888	129.0037307	291.9423372	112.4200655	95.0340823	77.32475002	0.227666016	0.586647423	0.132991197	913.6979068	892.5340845	869.5972631
Zm00001d037325	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037326	51.72708072	58.15412907	47.53336539	37.842199	39.55216281	37.30409709	42.32670307	38.36120364	44.56841627	21.20686654	30.3036129	15.67740426	27.69100852	26.84762674	28.95277894
Zm00001d037327	97.56660437	103.4884737	98.04091515	81.06969202	32.11539541	48.50852469	16.17499899	11.49776801	12.77609618	1.788739136	4.999149276	0.524089264	70.86989273	64.85673582	63.79851948
Zm00001d037328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037329	3.790596969	5.037557908	4.156733885	8.34259077	14.65347335	9.151411646	18.09178782	13.69498769	8.799731471	43.475791	23.97061701	28.5751616	10.37057653	12.74114527	14.98410318
Zm00001d037332	13.41846327	11.85073965	11.29058747	9.196016698	14.86071933	8.803430234	11.58326275	11.42939527	14.81157704	23.60014252	34.67056089	33.40567464	8.606713608	8.810561175	8.801728215
Zm00001d037333	10.28831652	11.16978439	10.50132259	14.41091256	12.4429933	14.41481012	11.45111481	9.979900777	12.49564638	2.332800412	3.787719914	1.416634047	7.336920994	6.992882664	7.097882983
Zm00001d037334	0.040447438	0.012735924	0.100536389	0.012611072	0.985965509	0.148660936	0.555338267	0.292622418	0.810597259	1.436429885	0.752331369	1.310570698	0.045261981	0.155189655	0.058453447
Zm00001d037336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011099587
Zm00001d037337	6.192264776	7.697892342	8.045572385	14.15832735	12.85694844	15.86241338	11.51127957	9.551253107	9.091404556	2.033370003	2.940918075	2.048944517	13.97867486	13.09148632	18.68804839
Zm00001d037338	0	0	0.008826312	0.008857231	0	0	0.041493083	0.008563323	0	0	0	0	0	0	0
Zm00001d037339	0	0	0	0	0.139642297	0	0	0	0	0.219242854	0	0	0.059296704	0.029044354	0.857679725
Zm00001d037340	2.292797679	1.357690979	2.041429758	3.307604922	4.148372422	3.857121793	2.31925042	1.712396604	1.751458208	1.085512806	2.071372966	1.478424351	5.533517993	3.713896829	4.886152166
Zm00001d037341	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037342	0	0	0	0	0	0	0	0	0	0	0	0	0.632052759	0.140721941	0.267140486
Zm00001d037343	4.369357432	3.950090353	5.261309158	8.718836874	11.38659953	9.314325612	8.849696605	8.25390578	7.831474885	6.280498077	14.64408952	12.91789161	8.561972442	5.556217938	8.161097567
Zm00001d037346	46.36644458	44.70561535	43.52290026	27.64541598	23.60577772	24.90859907	26.15872447	26.37151541	27.36294902	24.30542976	27.77267975	27.5863554	19.75151076	18.64643811	17.91662738
Zm00001d037347	1.139269493	0.956609428	0	0.236807915	0	0.46525367	0.887490942	0	0	0	0	0.631015521	0	0	0
Zm00001d037349	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037350	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037352	6.105482929	7.220614112	5.765618291	7.397150628	7.546024212	5.823544404	5.420911703	5.593825884	5.424980058	5.793215365	6.213929211	4.919424742	5.655419928	5.863001829	5.919363465
Zm00001d037353	0.949391244	1.6740665	2.595793713	0	1.000769796	3.024148858	0.887490942	0.686849843	0.936690166	0	0	0.841354029	0	1.248907225	0.219525168
Zm00001d037354	5.869412776	5.693030603	5.355298217	4.702301118	8.853276263	4.075032554	4.827489313	4.35209486	5.677209855	9.749093917	10.16045634	7.707513713	4.386992738	4.121089478	4.018862045
Zm00001d037355	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037356	2.113084911	1.375374137	1.715515121	3.195432945	3.531762289	3.324343653	3.816947556	3.385799225	3.672913723	0.775840724	1.937398336	0.858809506	3.406730994	3.570527294	3.087926632
Zm00001d037358	0	0	0	0	0	0	0	0	0	0	0	0	0	0.030276539	0
Zm00001d037359	0	0	0	0	0	0	0	0	0	0	0.012192266	0.064261835	0	0	0
Zm00001d037360	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037361	3.25842881	4.669047055	4.607136462	26.20837858	11.97812554	22.07182698	9.794589148	9.224428976	6.697577355	9.671677011	3.989882304	2.327891457	143.8962036	151.3183759	148.5309559
Zm00001d037362	1.572293094	1.548560192	1.322088864	2.159667152	2.121728267	2.079694238	1.040551926	0.962403221	1.121636208	0.069781219	0.234480023	0.044839001	0.903078714	0.893001021	1.143610755
Zm00001d037364	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037367	0.283316755	0.139106534	0.035807481	0.143731674	1.316080828	0.188258598	0.981944667	0.99010599	1.255500413	1.549716615	0.666099439	0.792592731	0.290172703	0.305317678	0.516312091
Zm00001d037368	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037369	0.35437032	0.258402001	0.533130893	3.186730252	4.595622283	3.587467592	3.595972846	3.620720044	2.93274752	0.977470189	0.834945692	0.413216167	2.588022058	2.42284594	2.393513151
Zm00001d037370	0.131138934	0.165169973	0.325959708	0	0.043198696	0.040165784	0	0	0	0	0	0	0	0	0
Zm00001d037371	0	0	0	0	0	0	0	0	0	0.419592622	0	0	0	0	0
Zm00001d037372	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037374	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037377	8.579404751	8.649739033	8.230845041	6.85584434	6.269619058	7.013663268	6.835168004	6.921604162	6.616115352	6.211855875	6.413095936	5.982450267	5.179768981	5.07082824	5.277616346
Zm00001d037381	57.64646243	58.98689876	54.18176975	61.26465326	70.35386458	57.03986561	76.59471569	82.7749216	66.65600476	60.07916912	73.86652305	50.56389362	84.874196	72.70716318	82.67196162
Zm00001d037382	0	0	0	0.071639369	0	0.129019925	0.022373721	0.011543695	0	0	0	0	3.085421797	3.536821301	6.60789202
Zm00001d037383	0	0	0	0.875972031	0.198317684	2.407367616	0.058623255	0.0100822	0.030936556	0	0	0	67.77210752	100.0684049	139.4778327
Zm00001d037384	0.031998207	0.130981045	0.019883733	0.029930082	0.484866818	0.274415272	0.570196053	0.250786601	0.088790993	0	0	0	0.984693079	1.525873777	2.191911914
Zm00001d037385	3.336178579	2.539038109	3.863917234	9.153621839	12.62653481	9.513785335	10.56694822	16.94657556	9.752082667	7.557617651	5.40647882	5.331196555	9.51592035	8.855180199	12.35906177
Zm00001d037386	1.872893748	1.252356677	1.173040951	3.220505384	8.224737269	4.156373867	5.767727713	6.091281454	8.152010857	0.949703307	2.511495687	0.552378329	2.863080738	3.273297442	2.817319086
Zm00001d037387	0	0	0	0	0.489738411	0	0.09441393	0.116910612	0.159436624	0.022287099	0.142646634	0.035802299	0	0.106289977	0.130780951
Zm00001d037388	0.368161874	0.499143376	0.512925276	1.076237139	0.75392469	0.801545088	0.745309717	0.639017761	0.607322269	0.051745826	0.204039564	0.036367275	0.852835106	0.874020837	0.794357279
Zm00001d037389	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037391	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037392	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037393	2.209297166	2.387129252	2.477552933	3.393967857	3.420298752	3.091388699	3.684185011	3.753161119	3.836788837	2.369630484	3.772870246	2.798765663	2.272258095	2.007077759	2.494674696
Zm00001d037394	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037395	0	0	0	0	0	0	0	0	0	0.188903048	0	0	0	0	0
Zm00001d037396	4.303664242	5.189353927	4.729580038	13.48102279	12.10710766	13.89069923	11.60460351	11.16871844	10.15181749	10.45485021	7.933974112	7.768206419	14.47226182	14.13911458	12.65879356
Zm00001d037397	0.01296466	0.008164519	0.12890014	0.646758459	0.837059232	0.579747106	2.552641087	3.462582991	3.157831713	0.008940202	0.008174426	0.021542493	0.007253935	0.028424631	0.082439039
Zm00001d037398	0	0	0	0	0	0.032841436	0.211431665	0.307062283	0.462835141	0	0	0	0	0	0
Zm00001d037400	0	0	0.043790334	0	0	0	0	0	0.010863675	0	0	0	0	0	0
Zm00001d037401	49.4733454	41.57664863	49.71417893	18.89219235	20.01128013	16.52923685	20.19722742	19.14401093	22.33832695	11.50619238	15.70185705	14.32271485	13.84419536	15.15282818	13.9982192
Zm00001d037402	0.369492809	0	0.45920675	0	0.486860982	0	0.8635047	0	0	0	0	0	0.826948635	0	0
Zm00001d037404	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037405	0	0	0	0	0	0	0.024022311	0	0	0	0	0	0	0.022536672	0
Zm00001d037406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037407	0	0	0	0	0	0	0	0	0	0.127397875	0	0	0	0	0
Zm00001d037408	13.59807355	13.9385809	13.25670746	7.840766673	6.596940251	7.729219557	7.559979027	5.816292496	6.421156456	4.126818496	5.919860741	3.782040942	5.984609274	6.589845828	5.777044047
Zm00001d037409	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037410	0	0	0	0	0	0	0	0	0.012773048	0.428520125	0.927295746	1.77831647	0	0	0
Zm00001d037411	0	0	0	0	0	0.027102156	0.025849251	0.01333689	0	0	0	0.122527286	0.086642272	0.097002503	0.191818108
Zm00001d037412	12.70517242	15.92846877	13.7404755	12.58377992	16.9980857	12.91153655	17.2291068	18.06106225	18.53322727	20.1737854	19.30717168	20.68974232	5.088596846	5.412822748	6.12602138
Zm00001d037413	0.324012425	0.329108748	0.01948469	1.029788548	1.36343408	0.819529401	1.233530988	1.077535074	0.979657605	0.04324515	0.17134422	0.023156533	0.66667992	0.635911477	0.960674357
Zm00001d037414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037415	0.039927669	0.080462475	0	0	0.010522112	0	0	0	0	0	0.010070014	0	0.026808206	0	0.009232367
Zm00001d037416	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037417	16.5199149	15.19501245	11.26405943	14.33246694	16.67444671	14.7953153	14.21803164	14.0036634	14.38315693	14.01943845	12.7034621	9.466918527	14.37219054	14.980214	14.24352788
Zm00001d037418	0	0.020795857	0.12312065	0.226511919	0.282826247	0.343883148	0.135052969	0.338447749	0.529433572	0	0	0.018290305	1.699838861	1.448008377	1.030813831
Zm00001d037420	21.52174598	21.29437652	26.13889043	28.66513278	21.21544564	26.63770272	11.41259094	9.818653472	10.76416525	4.857808924	8.032722929	3.524869236	9.199171615	7.486898857	7.751059805
Zm00001d037422	10.99254513	9.371717913	13.14371019	17.34712495	21.25582757	14.02648656	13.09983001	16.62794685	16.12629717	7.689728333	13.68680105	3.912479401	19.29526811	19.7069947	18.76510054
Zm00001d037425	4.380104072	3.254985137	4.153054309	15.04426755	13.72386313	19.86747427	13.06451543	12.01261541	13.31694175	5.707075561	5.031165506	4.878027469	5.687810328	4.827301027	6.156232913
Zm00001d037426	0.334123843	0	0	0	0	0	1.171271141	0.369304192	0.858473676	595.8681427	137.5326875	1181.415276	0	0.030523191	0.064382127
Zm00001d037427	18.05041527	16.24292116	14.9008907	16.69457811	16.58816075	16.0773755	16.40197163	15.44420438	14.48012798	3.912136668	9.246836457	4.300353907	13.68688434	12.6627171	12.29810511
Zm00001d037428	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037429	6.318213338	4.821311519	6.106178128	14.58445301	24.45450281	16.04824538	22.12883567	30.26027935	27.05968195	27.6847734	26.10911183	29.75752704	10.12057906	8.918350423	10.93275862
Zm00001d037430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037434	0.005710624	0.043155313	0.070971803	1.702168172	1.572638251	1.280322131	1.614833142	1.969313835	2.148048878	0	0.086415361	0.00632597	0.862700174	1.133093773	1.247827269
Zm00001d037435	3.738228025	0.627774937	1.592873415	1.332044522	20.07794403	4.230900565	20.34295643	28.46134036	21.25115815	29.65716363	16.0276866	20.38968904	0.318719786	0.546396911	2.181531353
Zm00001d037436	0	0	0	0	0	0	0	0	0	0	0.108426821	0.023811906	0	0	0
Zm00001d037437	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037438	5.656476573	6.628714992	5.397319678	5.1973183	5.431388448	6.194646924	5.111021554	4.87807045	4.59829718	2.065486523	3.402276029	2.220380149	4.657044549	4.43803023	4.304129814
Zm00001d037439	1.408926712	1.989054259	0.73119444	0.907540186	1.366849801	0.89151666	1.537781586	2.072217419	1.680313956	5.124770687	2.440524431	1.629349251	0.935585149	1.323869946	0.662304696
Zm00001d037442	0.473551777	0.1555931	0.12794164	1.258220368	0.841008353	0.479267335	0.024058489	0.049651796	0.431667456	0.624710061	0.233672863	0.13684674	0.138239907	0.1805649	0
Zm00001d037443	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037446	8.91569109	8.676611604	8.353389176	8.378853814	6.866052168	6.745919114	3.528414086	3.646470361	3.58129056	5.771132247	6.943567646	5.711611198	5.050668461	5.430200761	4.603720045
Zm00001d037448	34.14128707	38.6444706	29.30789085	23.75048017	15.22935098	19.75032244	19.3655483	15.79560961	15.12294798	6.998686025	8.838689864	5.706800204	23.74981216	22.43999108	21.86315353
Zm00001d037449	5.351058334	6.083849914	5.824185451	15.26777773	14.04321701	16.39623308	11.05551925	11.6352586	11.9826507	8.128686449	12.68541089	6.74992292	15.39772997	16.60216703	15.16538208
Zm00001d037452	15.06117728	14.7824463	14.95383438	9.14603195	15.74503983	9.861401014	12.43564697	12.54465054	12.65171346	11.38732082	17.97890278	13.2197273	7.591237886	6.521228772	7.753002657
Zm00001d037453	58.46893793	51.29595247	54.35556857	19.12849028	20.9229263	14.53845476	12.06174607	15.87647012	20.84644691	77.54218045	127.438471	77.73248967	17.27025724	16.22609744	15.9223922
Zm00001d037454	0.017923611	0	0.022275516	0.02235355	0	0.021958875	0.031415609	0.043223589	0.044209565	0.259555946	0.045204496	0.009927481	0.02507137	0.029472737	0.02072214
Zm00001d037455	0.162216355	0.544832265	0.324804775	2.405231612	5.889830415	2.406928679	2.579983555	2.803542667	2.489607614	1.392054828	1.954684712	0.668868133	1.29084665	2.163565054	1.698317315
Zm00001d037457	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037463	2.244312006	2.900620434	2.461091971	6.18343071	6.358968597	6.703247089	6.290520558	6.190492145	5.626171192	0.242766766	0.943383148	0.341235861	8.732648567	7.750728958	8.581267067
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Zm00001d037465	2.746313187	3.531940478	2.765291982	6.203071516	5.548840123	5.963459756	6.189720583	5.293047967	7.202510794	2.28322179	3.584918001	1.323294686	2.741046424	2.367742912	2.985387275
Zm00001d037466	0	0.009890276	0	0.225246357	0.031040534	0.211648999	0.165162013	0.009468349	0.009684333	0	0	0	1.528976253	2.401689482	2.877910641
Zm00001d037467	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037469	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d037473	16.78008378	18.45822788	15.74204142	15.12079883	16.32298276	17.00692281	19.07768843	19.96137813	22.03952973	29.89478267	25.24128449	31.74966976	15.68656846	16.72176584	16.79603095
Zm00001d037474	0	0	0	0.564378446	0.470745374	0.3209764	0.222645811	0.114873841	0.146867796	0	0	0	0.213220206	0.391643381	0.578261417
Zm00001d037476	4.894481122	5.882206617	5.788286023	10.93799558	6.027129063	9.575417622	5.868918541	5.036469699	6.383890244	4.60327804	0.306989154	0.063870362	6.738817601	6.545350705	6.125307676
Zm00001d037477	2.147803143	2.375841449	2.530028447	12.76433483	11.24635566	15.19320183	12.0684219	12.79117084	9.927380206	12.10627893	8.125346011	13.86165244	17.99460564	17.95560059	13.64654813
Zm00001d037478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037479	47.67298262	43.66145431	72.93861633	98.21311819	175.0815627	89.33717672	111.1451099	137.703492	113.622365	12.38871838	39.37176964	7.009155716	47.40461089	32.72553863	56.31570066
Zm00001d037480	353.7643986	334.41151	360.9427111	64.64492826	77.40431692	85.64813697	59.05088559	69.53790226	60.10759271	767.5412076	418.6491439	809.8146222	28.32857823	22.46938272	28.00365024
Zm00001d037481	7.250691465	7.46254065	7.195008582	8.020955697	11.5604203	8.287042491	10.03842777	10.46112564	10.34510409	9.987427105	11.15949959	10.57441436	6.66263074	6.651806439	7.331019594
Zm00001d037482	0.013208922	0	0	0.148262347	0.087023461	0.097096418	0.09260775	0.095561717	0.081451319	0	0	0	0.561685884	0.362002094	0.122170528
Zm00001d037483	55.84867636	58.34175975	54.08081915	41.26222498	45.1134604	38.76151582	50.18665959	46.17466914	45.21597925	28.84482481	40.3223563	23.36112833	23.86671126	19.83944269	27.08489992
Zm00001d037484	5.029207673	5.703460538	4.821670877	14.39280107	15.93658281	14.0582055	15.93166171	15.92996608	15.94904878	6.709621412	8.754537839	6.075940444	17.08108347	17.22816885	17.15856175
Zm00001d037485	57.75846856	58.11716493	68.11142224	61.35572083	90.25336486	63.59779954	78.07847314	98.49727555	82.84990336	90.91633103	91.61037529	92.45805235	66.97861414	66.35799614	71.46072989
Zm00001d037487	6.948914479	8.704617285	8.667421699	15.63717238	8.277084999	12.23025947	10.26743664	10.32172139	9.004645798	0	0.412740773	0	3.099153724	2.001011576	1.338982238
Zm00001d037489	47.97602772	43.6437886	54.70160409	59.91679213	82.89888811	52.99262001	65.76957261	72.4509317	60.13825021	10.22762569	29.09752754	8.805898555	33.9254669	27.61973558	43.9170271
Zm00001d037490	0.453346617	0.267652379	0.176068909	0.265028547	0.317342547	0.260349204	0.03310847	0.034164552	0.017471941	0.13677119	0.214381736	0.188323803	0.063413678	0.093182715	0.163790799
Zm00001d037491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037492	0.255219053	0.241087006	0.084583197	1.172398116	2.438091943	1.198599997	1.158101123	1.492520007	1.479352609	0.539716697	0.842146465	0.174344052	0.604516434	0.927937291	1.450751263
Zm00001d037493	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037494	0	0	0.116056351	0	0	0	0	0	0	0.051516081	0	0.186201301	0	0	0
Zm00001d037495	2.573924481	2.83959189	2.848638484	6.185860994	5.454493374	3.421948205	4.076034897	3.752975228	4.0471194	0.328211474	0.679170112	0.353808061	5.781632405	6.41902843	5.770605689
Zm00001d037496	0	0	0	0	0	0.112410283	0	0	0	0	0	0	0.123209797	0	0.021215855
Zm00001d037497	0.511309178	0.538422719	0.322936936	1.395584108	1.049243624	0.636692944	0.798252122	1.137029169	0.816660586	0.525994659	0.512650786	0.807823672	2.621670542	2.5682617	4.007175531
Zm00001d037498	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037499	38.15811885	35.37332339	34.24129415	35.79622507	72.48268588	37.75282576	70.0350541	81.08506758	72.6404299	87.60957885	71.43925522	72.75555855	33.25415442	31.17776965	35.03399967
Zm00001d037500	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037501	0	0	0	0	0	0	0	0	0	1.988333378	0	0	0	0	0
Zm00001d037503	8.121474176	11.38861879	7.216871172	7.158762074	11.69070812	9.584435658	12.92771794	13.45791565	13.63803967	0.056749091	0.953446235	0.074069542	3.136835821	2.813565261	4.233912037
Zm00001d037504	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037505	0.946589409	1.051510296	1.191852616	4.892489157	8.845396423	5.330824802	8.134292684	9.445315794	8.275195122	3.492755177	5.667042886	2.20031746	2.906898101	2.657152897	3.964908589
Zm00001d037506	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037507	21.65676775	22.85865775	21.76881889	34.04239527	37.84899465	30.13989963	36.46931765	34.69146087	31.62224619	6.792244219	14.57405714	9.399289823	21.25809525	20.25839995	19.47190102
Zm00001d037508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037509	17.75430069	19.02775953	18.96793443	23.61738259	30.14677295	25.58080634	26.32310929	33.03669933	29.69240301	15.28197207	22.26445951	8.718541952	18.68597322	15.58883168	17.51498845
Zm00001d037511	0	0	0	0	0	0	0.051119478	0	0	0	0	0	0	0	0
Zm00001d037512	39.02981293	37.54118265	37.58025517	76.66091598	55.09562729	80.71729214	63.73109322	57.54587939	62.97254533	26.61087407	34.80253528	40.71877806	97.99486487	102.4527778	89.6094284
Zm00001d037513	7.530945759	25.94971492	10.0508069	26.81599489	2.057920989	13.26300604	1.074989028	3.353633035	0.026385638	0	0	0	2832.673725	2879.710344	2788.822994
Zm00001d037514	0.026190103	0	0	0	0	0	0	0	0	0	0	0	0	0	0.060558667
Zm00001d037515	7.028026919	6.453924944	5.210465925	6.112801648	4.109827963	6.724466383	4.662285746	8.32767276	6.444428345	24.02252077	10.47162145	8.794954112	0.97457428	0.732692239	1.475209126
Zm00001d037517	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037518	0.465535775	0.684068036	0.36642718	1.946931998	1.553976256	1.448676355	1.693586573	1.208730983	1.442991934	0.07704607	0.442248512	0.123767857	1.392671611	1.282646149	1.460378096
Zm00001d037519	0.146113208	0.097223463	0.1644588	0.924883182	1.3658419	2.198766893	0.786017386	0.744606726	0.897590577	0.003802155	0	0.003053917	0.271480617	0.145063634	0.344228212
Zm00001d037520	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037521	33.38234291	34.75083382	37.72483847	50.25975689	63.34003316	52.19718181	59.95326371	65.70356451	69.94059624	190.2726689	111.0360841	122.2041644	34.871311	32.80775027	35.06718214
Zm00001d037522	1.960980654	1.804225718	0.483965609	3.364936885	3.7933553	3.935960858	2.71393466	2.096184667	2.847233181	0.038361924	0.157842097	0.154062793	2.427847162	1.875266596	2.669140187
Zm00001d037523	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037524	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037526	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037527	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037528	0.282260664	0.618275394	1.006627364	0.107137513	0.06468171	0.015035128	0.200760967	0.399532045	0.030270059	0	0.123805132	0.013594589	0	0	0
Zm00001d037529	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.004456107
Zm00001d037530	16.17075834	18.93409645	14.35186601	18.55854009	16.8688078	18.06623296	18.51866747	17.24056119	16.45161851	18.81781821	17.04780842	13.30839026	19.72971553	22.07766795	20.12496255
Zm00001d037531	0	0.009571412	0.037777987	0.331715367	0.160212174	0.06517172	0.230875909	0.082467797	0.074976867	0	0.038332106	0	0.008503919	0.066645411	0
Zm00001d037532	244.1394563	273.5874195	242.3083829	118.9281399	68.06664285	138.4762834	111.0851726	83.37014376	93.98101193	10.76004367	13.31228641	10.8458758	305.8387142	350.4508795	332.7777064
Zm00001d037533	0.10924502	0.334158088	0.213352908	0.330882292	0.822550517	2.256161635	1.075930799	0.639805333	0.962352911	0.172190735	0.27552295	0.017288096	7.579418481	9.700416391	13.73084816
Zm00001d037534	0	0	0	0	0	0	0	0.079634764	0	0.27325921	0	0	0	0	0.07635658
Zm00001d037535	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037536	7.452952874	9.661345646	6.699489499	11.88401764	9.481354631	10.97707734	16.44407691	12.94393594	12.54584696	23.6873534	18.61143202	22.83040923	11.6715611	10.80404856	11.1473232
Zm00001d037537	8.933373662	10.60719467	8.533477535	11.69008654	13.14633976	12.62453298	8.549407498	7.909055374	7.483705715	1.495971453	1.780764455	0.204040947	11.97775676	11.96931745	11.31014696
Zm00001d037538	23.76639631	24.36526625	23.27635319	24.81933597	22.06031864	23.50654062	19.0753718	18.66066134	20.82220712	4.690501069	9.889567637	4.457518511	14.31130343	15.11977535	15.75520233
Zm00001d037539	0.996024093	0.910521313	0	0.120212714	0	0.432997541	0.075087365	0	0	0	0	0	0.59324576	0.26416369	0
Zm00001d037540	1.317059719	1.949866429	2.938664493	1.402436509	2.537162863	1.594706102	5.876940015	6.287288025	4.530941841	7.000208189	4.137567499	16.73986415	14.65213215	12.8845009	20.09786921
Zm00001d037541	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037542	0.306905251	0	0.034674795	0	2.591789533	0.205091414	0.945449534	2.119422372	1.049475309	2.174083735	3.131322342	2.395283408	0	0	0
Zm00001d037543	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037544	8.99437612	10.0666856	6.577025712	8.71860539	10.22291727	10.2389159	11.70597371	10.93051363	12.73092871	18.67467153	14.82999104	16.49536393	7.804636489	6.338539894	6.458288802
Zm00001d037545	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037546	8.031183815	9.574032952	9.056125276	9.964691265	9.902751148	9.660287829	10.74228945	10.54810668	10.47071912	11.39875386	16.02594227	18.96807426	8.02918982	8.02202649	7.713109096
Zm00001d037547	4.244267629	1.437152698	2.915712127	2.6599329	8.276256926	3.004914502	6.85347919	11.18675875	9.311372449	11.91299317	16.89022614	18.33390495	0.501200538	0.678033876	0.912347967
Zm00001d037550	1494.907173	1513.265673	1782.078201	1590.886251	1439.942519	1403.991433	610.2155353	605.2350975	784.8496249	256.1384771	451.383538	205.2365363	107.4458872	76.49306971	72.90215283
Zm00001d037551	17.29844084	18.37226519	20.15765041	41.8818036	20.33339754	33.73306519	43.25481552	43.08538453	45.34630899	10.37703978	10.25798796	13.37517012	65.95215915	73.23809845	69.19761545
Zm00001d037552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037553	11.30807667	12.14977944	12.32137599	13.52155606	10.71587267	11.6146919	12.07011651	10.96362612	11.69186659	10.7705828	11.47772213	8.083474999	11.45067008	11.66265153	12.08114737
Zm00001d037554	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037556	0.944880098	1.19007998	1.128428683	0.672063932	1.857800518	0.551672279	2.95862261	3.284418038	1.72974102	8.9794865	2.885722473	4.399391152	0.487372805	1.035810744	1.647149962
Zm00001d037557	13.58743692	13.17420362	10.08657106	10.79198602	11.00900901	11.42576456	11.29211027	12.03863153	12.96067129	27.1487237	22.87770744	35.27953518	9.846010923	9.591391343	8.667979144
Zm00001d037558	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037561	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037565	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037566	0.105861325	0	0	0.009430404	0.009963416	0.083375105	0.070685119	0.009117476	0.093254552	0.041714348	0	0.008376312	0.033846349	0.016578414	0.017484305
Zm00001d037567	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037569	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037570	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037573	108.941306	111.4464978	121.5443973	74.7036179	95.22685389	72.10702654	103.4942415	121.5918004	127.6600052	447.1188832	300.4996667	367.8642461	63.2084281	58.4754806	83.37276836
Zm00001d037574	32.44328807	29.31790487	29.34748594	17.43767375	34.25362075	19.19171391	26.77600511	33.31221737	33.97630694	10.67729311	21.45187695	8.977629919	6.461319305	7.436674839	6.196596777
Zm00001d037575	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037576	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037577	0.149140734	0.42577816	0.197709379	1.413614085	1.008775954	1.266843449	0.987535375	1.126933269	1.091329197	0.507367828	0.514061417	0.231295871	1.079243146	1.220750044	0.862135204
Zm00001d037579	0.548741569	0.452817197	0.082307646	0.554573	0.299192077	0.498417081	0.364823266	0.330828713	0.256698482	0.143532	0.083514915	0.020961069	0.074110622	0.176316314	0.054691391
Zm00001d037580	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037581	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037582	1.023260328	1.18389783	1.21995527	2.359422987	2.641718705	2.558287807	1.765713048	2.245263716	1.870934667	0.270762063	0.907756142	0.059312164	3.05571555	3.456505636	3.72791564
Zm00001d037583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037584	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037586	29.02636373	23.68658273	33.86733784	48.99844553	73.42843266	38.00214675	53.11633285	67.68653913	65.40610432	34.37567537	53.68535879	30.26104191	23.49819927	20.49730906	20.61501952
Zm00001d037589	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037590	7.751393395	8.650678563	10.90368851	29.90917959	59.76247671	29.99216604	44.98177772	55.36864187	49.4216107	48.11829926	42.89344297	41.01298968	16.03968762	14.45804321	20.60805641
Zm00001d037591	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037592	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037593	0.977802163	0.895325981	1.174211205	3.258161029	3.462075065	3.314549624	2.737241697	2.336314164	2.611553013	0.144783017	0.616519949	0.106322931	1.919870657	2.087905453	2.146511117
Zm00001d037594	0	0	0	0	0	0.413558818	0.394440418	0	0	0	0	0	0	0	0
Zm00001d037595	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037596	17.23176886	16.53284564	15.88574298	19.18076172	19.74805608	21.53307297	20.59872982	20.02089564	20.19810954	35.61211237	31.72091118	33.89500779	29.35839001	29.09472107	27.55058349
Zm00001d037599	4.298008303	4.610982259	4.576232786	10.72587574	14.12456458	10.80706662	13.39921086	12.38762177	15.62430624	8.932494677	10.95767721	8.134395799	10.90716734	10.16817662	8.92667485
Zm00001d037601	25.65276477	27.53745343	22.59056428	26.13401508	24.60881684	23.00653262	31.42615396	26.93377473	29.60046172	16.10080109	18.28910727	11.98220485	20.28347045	18.3968244	19.23928435
Zm00001d037602	13.34241608	13.34828549	14.49156251	19.62110207	21.57996665	18.56194292	18.16195616	15.88967703	16.87602006	3.767488682	4.784421253	1.793228198	9.878249512	8.096523434	10.58594629
Zm00001d037603	39.76009403	33.94685689	44.32290077	65.12303155	84.69113754	57.60613063	54.78734693	61.76590196	54.08726308	5.35696566	19.95343171	2.760977661	18.22018614	14.80834256	24.02255192
Zm00001d037604	5.669498696	5.408561362	5.211342451	5.373532261	4.999272826	5.437723869	4.916631139	5.061863491	4.951970876	1.213663047	2.686338378	0.916226547	5.978434318	6.499764791	5.976520568
Zm00001d037605	26.78500005	28.60355066	22.91263351	25.70768333	20.39238493	23.48130758	25.04792395	24.58255592	20.92001999	31.87024818	28.37045676	22.33427364	47.32153348	47.34692167	45.42252789
Zm00001d037606	21.50013736	21.33036836	21.53851027	19.85151055	23.14494982	20.53262169	24.37639832	22.14069995	23.94870518	12.3384926	16.19511057	10.80812054	13.55295895	12.44782696	11.48113727
Zm00001d037607	75.10865932	63.07716126	56.05801842	58.53519503	83.91861976	62.31178532	77.06476533	65.78338101	63.08857996	23.70530037	20.65880873	13.55768428	37.85281953	32.32905587	34.21389067
Zm00001d037608	1.162272809	1.280901041	1.661147479	4.801588756	3.350079551	3.648854503	7.079178541	7.322505443	7.292446502	18.77473719	25.11780482	23.20742313	4.958616017	4.061271103	5.274202965
Zm00001d037609	9.896600765	9.746350263	9.895245639	10.31445345	14.78328843	13.25185973	17.20679964	20.66995773	16.25322697	32.81257627	33.92785281	35.25790618	15.92184461	14.65978113	13.6381907
Zm00001d037610	3.666749115	4.810097794	4.382335541	19.387811	21.08562789	18.38529414	30.58079327	35.05935855	24.15649293	45.91738179	44.25932672	32.32616275	11.57550936	10.37652481	12.02704466
Zm00001d037611	0.398488881	1.42847955	0.190478136	0.178402375	3.311964617	0.96388877	1.289448722	3.905495967	3.288916593	1.296449525	2.254840285	0.520658547	0	0	0
Zm00001d037612	1.863612532	1.299037777	1.776857753	1.747598058	2.671149352	2.66661521	2.360485793	3.130491479	3.219446014	3.668952743	3.668628831	3.616684175	1.257633122	1.46593897	1.513147461
Zm00001d037613	31.11190271	30.60264422	33.08107476	33.60041195	37.79759258	34.73894073	36.53504376	37.89545614	35.1952657	30.54219876	33.86782039	32.92187153	35.45265772	35.18526281	33.62800346
Zm00001d037614	0.825992444	0.840275052	1.250280191	0.422622336	0.390695567	0.557871946	0.098992018	0.076612221	0.156719656	0.073024343	0.040061653	0.645190154	0.106651392	0.127696169	0.146916921
Zm00001d037615	1.060509705	1.460290438	1.024355894	1.411710208	1.426338303	1.824362865	1.252047108	1.928038304	1.443436535	0.84877298	1.25418629	0.560000913	2.047595283	1.927573852	2.458540704
Zm00001d037616	5.939849356	6.660736707	7.846417792	12.78464035	24.61599148	13.93217929	18.99740596	26.61531107	23.33520351	10.39859487	24.00533351	10.17761264	15.4164783	14.31473481	20.86765938
Zm00001d037617	11.156867	9.795452613	10.50055048	8.125174034	17.45050416	7.832058809	12.97732473	17.908216	14.47510626	9.743328762	16.72639132	7.893567208	9.545930518	9.931741744	8.944465504
Zm00001d037619	10.23474889	8.572893238	7.097490609	1.118043927	19.24977969	4.423723424	24.15139284	41.95664176	25.82807967	13.41707698	38.66670295	20.94649702	0.585190427	1.446821485	2.46635926
Zm00001d037620	27.17506498	26.56641041	30.89524272	24.94892206	39.04227637	24.88442489	31.3465423	35.20596051	30.29714785	8.022946171	22.23590697	8.128510146	14.93950215	11.59189808	18.54763661
Zm00001d037623	1.139269493	0.499100571	0.061560325	1.915055313	4.699266869	4.91550617	11.63384865	5.136442302	6.780822291	28.76053185	6.933423799	6.803993449	3.43663074	3.909622617	7.902906034
Zm00001d037624	1.895251363	1.698123246	1.421871789	1.383614801	2.385605093	1.675385153	3.002315087	3.079502591	2.356373572	3.660472274	3.555813151	1.745293987	1.775993941	1.613127844	2.400488223
Zm00001d037625	66.04069184	70.82990869	62.62040241	32.28184896	31.85470755	31.80477267	37.10878293	30.3878311	30.07398829	74.3014408	53.48476759	50.556619	29.16775547	27.07102316	25.79233411
Zm00001d037626	2.235412066	3.195739384	2.751377563	5.566853575	6.156154897	5.459759161	5.736495077	4.151433119	4.662766822	0.515485828	1.214585622	0.183133842	3.603443894	3.687625118	3.623204028
Zm00001d037627	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037628	0	0	0	0	0.010556025	0.004907452	0.042125266	0.241494231	0.014820178	0.243074996	0.015153705	0	0.004482435	0	0.004631061
Zm00001d037629	0.090968287	0	0	0	0	0	0	0	0	1.828135285	0	0	0	0	0
Zm00001d037630	0.060278809	0.09110566	0.089897618	0.105247962	7.148355687	1.417915948	2.084899355	3.168958004	2.17074229	2.194748575	4.864864785	3.899609148	0	0	0.055752424
Zm00001d037631	1410.608729	1532.439663	1313.943581	117.4727807	138.3606649	139.3395315	151.8512043	117.5328138	150.5054708	640.7997946	294.6361037	582.4594118	41.57402501	25.18982369	19.28844863
Zm00001d037632	612.0915231	646.094008	696.4750513	23.68079151	44.13394801	23.96056403	83.73477034	112.6433742	96.61959066	930.5933481	369.7472067	1131.999778	8.669178189	4.579326491	16.1131473
Zm00001d037633	2.266960425	2.06775004	2.208466376	2.886535849	4.23487021	1.94413569	3.242819268	3.769499538	3.336911745	2.818903714	4.241956516	1.725462073	1.706203596	1.63937862	1.361185206
Zm00001d037634	0	0.20639176	0.290935784	0.437932446	0.2776108	0.114720083	0.136770864	0.112906823	0.115482349	0	0.029520316	0	0.052392294	0.410599636	0.054129493
Zm00001d037635	0	0	0.007442247	0.171771313	0.007890432	0.029345829	0.034986502	0	0.02954082	0	0	0	0.033505365	0.098468375	0.006923264
Zm00001d037636	0.203645982	0.241405052	0.189818869	1.015913737	2.478138395	1.662071601	2.880019892	2.079958866	2.197579777	0.136300377	0.090636747	0.01990498	2.902200236	3.099150283	4.722700474
Zm00001d037637	1.06006894	2.440121376	0.772302262	0.250737792	0.38532313	0.671756636	0.726128952	0.484835183	0.969248915	0.579762522	0.460958946	0.202464873	0.552220378	0.50089862	0.295830707
Zm00001d037640	6.660181154	7.014540625	7.191096281	9.300815958	13.4074199	10.14483132	12.03144509	11.56907696	12.19489297	3.598529241	4.625721948	2.650088518	14.05639032	13.6091841	12.82608828
Zm00001d037641	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037642	0.02267203	0.085666516	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037643	0	0.040017526	0	0	0.005980696	0.072290411	0.053037307	0	0	0.037559533	0.022894906	0	0.279355988	0.253762026	0.241390224
Zm00001d037644	22.18862966	31.75032246	23.46327824	14.50166566	5.837823811	14.88811745	4.162755131	0.893995033	2.252516829	0	0	0	14.38792178	10.82386262	10.51630089
Zm00001d037645	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037646	0	0	0	0.054386507	0.0861907	0.080139388	0.050956418	0.078872709	0.026890627	0	0	0	0	0.023902531	0.126043158
Zm00001d037647	0	0	0	0	0	0	0	0	0	0.045764285	0	0	0	0	0
Zm00001d037648	9.000915305	10.15677179	9.24165111	6.860296769	8.898410958	8.471260355	8.103701173	7.898773191	8.133969125	3.289193126	5.062912038	2.710325704	5.402876378	5.006914206	4.81632928
Zm00001d037649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037650	0.364142627	0.313967628	0.194387126	0.533389297	0.244735982	0.275459449	0.611121757	0.315307543	0.271261721	0.246050526	0.117110271	0.138069896	0.14221033	0.22772352	0.192133575
Zm00001d037651	0.223507912	0.180970098	0.231480242	2.229994971	1.206065897	3.57932018	2.238591398	2.874663102	1.798270105	0.293575484	0.060396567	0.212221647	3.322923611	3.756930726	3.673051695
Zm00001d037652	0	0	0	0	0	0	0	0	0	3.727709046	0	0	0	0	0
Zm00001d037653	1.8891684	2.23410683	1.881875764	3.651038488	0.988101824	2.031804004	0.522383909	0.139108829	0.302349357	0	0	0	9.488973892	10.63942484	10.37048007
Zm00001d037655	0.733911434	0.881370485	0.318176962	0.021286105	0.067467627	0.083641109	0.039887233	0.020579771	0.168393738	2.448075019	2.087723925	3.705739092	0.076397252	0	0
Zm00001d037656	4.064801032	2.692678391	6.694875367	0.841983698	6.579134771	1.154518367	4.6182399	2.204703199	2.601917129	36.06093839	23.7668915	47.14698686	0.566612954	0.616744309	0.504094829
Zm00001d037658	0	0	0.007976831	0.208124139	0.076114886	0.636938828	0.082499158	0	0.055409841	0	0	0	0.359120886	0.513635084	0.512019264
Zm00001d037659	0.409743034	0.416828085	0.783430536	1.660794646	3.447031874	2.181731333	4.244610855	2.945338807	4.159228266	0.478164243	0.675683453	0.165846154	0.925848832	0.691038003	0.974767661
Zm00001d037660	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037661	0	0	0.008263935	0	0	0	0.007769862	0	0	0	0	0	0	0	0
Zm00001d037663	28.28531156	30.79349637	38.44614327	43.71006691	57.51153894	45.20871575	46.29093655	65.50636407	50.46098059	33.18101132	51.37110658	23.55391112	54.8455737	46.81397308	55.29215114
Zm00001d037664	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037665	0.835716625	0.514852915	0.011289468	0	0	0.011128991	0	0	0	0.20045061	0	0	0	0	0
Zm00001d037666	0	0	0	0	0	0.039960438	0.032668378	0.044947229	0.005746565	0	0	0	0.14599843	0.04086404	0.107742414
Zm00001d037668	0	0	0	0.062038217	0.054620547	0	0.145313859	0.189935433	0.010224635	0	0	0.009183974	0.055664826	0.01817694	0
Zm00001d037670	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037671	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037672	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037674	0.214653916	0.158485374	0.082791471	0.073850221	0.029259106	0.090682903	0.121087015	0.089249573	0.091285452	0.17354253	0.24268353	0.245983311	0.057980427	0.008114178	0.051345356
Zm00001d037675	1.798509706	1.394607566	1.893152922	4.134825843	4.360095376	3.967725122	3.53002015	4.043924917	4.065130076	0.785620229	0.936247327	0.170161489	1.668802477	1.543593199	2.219917425
Zm00001d037677	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037679	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037680	3.505444595	6.23635762	4.65609152	32.73414026	18.33140828	20.97667751	14.41319423	21.39801433	11.8617399	0	0	0	90.34480098	89.28485786	135.9705115
Zm00001d037681	2.10429777	3.038641714	2.76514496	1.153393845	2.101616572	2.019748287	0.595140984	0.517157529	0.181828091	0.184851818	0.033803656	0	15.41853837	31.66347141	78.16129027
Zm00001d037682	0.061860787	0.116870835	0.140948075	0.23145027	0.054340441	0.08841925	0.180710825	0.111885042	0.139867762	0	0	0	0.173060517	0.372976818	0.357597558
Zm00001d037683	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037684	2357.423578	2329.70681	2527.505622	1486.369791	1648.785494	1545.476434	1442.142177	1581.112548	1592.373283	1653.956334	2145.141157	1074.264033	1558.517775	1255.453221	1293.412008
Zm00001d037685	0	0	0	0	0	0	0	0	0	0.159187589	0	0	0	0	0
Zm00001d037686	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037687	4.509532216	3.427210665	3.968121251	5.350414467	11.60925091	6.250679328	11.24392617	15.26724979	12.31379207	22.84982109	22.98187405	18.45036716	5.095423872	5.147983553	6.393362185
Zm00001d037688	0.040688196	0.133242028	0.010113482	0.395807515	0.117947869	0.568274126	0.104597147	0.196242812	0.070251762	0	0	0	5.591255681	5.423825662	4.403047648
Zm00001d037689	91.00739839	45.77320713	77.32713668	1.843261609	53.32866541	6.588099754	23.20668881	47.02667282	28.78152323	140.1922615	112.89948	92.28419275	0.155052869	0.238690763	0.640776165
Zm00001d037690	0	0	0	0	0	0	0	0	0	0	0	0	0	0.039181403	0
Zm00001d037691	0.338956213	0.365928518	0.21062789	0.43279652	0.446624537	0.148309907	0.556384522	0.369779844	0.278684678	0	0	0	4.976092627	3.742298154	4.394650227
Zm00001d037693	1.774402312	0.959942562	1.21361784	4.611565984	9.28937539	3.691228598	8.634482863	7.969372739	6.976220316	11.49688139	8.957821622	4.979965701	6.962972336	7.663155481	11.40689486
Zm00001d037694	1.278481975	0.923211593	1.567715813	1.23305468	0.831063197	0.480336707	1.294718705	0.53440686	1.892067418	0	0.924331891	0	1.888474345	1.513638183	1.990507505
Zm00001d037695	3.661582302	3.28756166	3.107945152	5.472434439	6.603332585	7.635036216	15.98258796	16.53238573	11.00304169	9.64243052	7.68307405	5.455942063	7.389474173	8.08244763	11.13539016
Zm00001d037696	1.618961912	1.570510096	1.628439966	5.988464274	4.64621743	5.935323439	6.382291317	5.24257039	5.397452995	1.358859869	1.773478892	0.887648628	5.448735869	5.452017844	5.463970919
Zm00001d037697	0	0	0	0	0	0.46525367	0	0	0	0	0	0	0	0	0
Zm00001d037700	4.782432801	4.201203309	6.116895458	14.65848741	21.64297074	15.45354793	23.24758357	26.18408521	24.98729611	4.016232102	7.138770171	3.153013481	6.967802049	7.007530244	7.539466638
Zm00001d037701	0.086472068	0.043564756	0.10746774	0.032353264	0.319030979	0.233068252	0.101042612	0.166825009	0.149301658	0	0	0	0.009676502	0.161149319	0.119968213
Zm00001d037702	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037703	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037704	0	0	0	0	0.015556007	0	0	0	0	0	0	0	0	0	0
Zm00001d037705	0	0	0	0	0	0	0	0	0	15.91421527	0	0	0	0	0
Zm00001d037708	37.87869067	37.3281211	36.81976898	12.06544725	11.46981554	2.850916108	5.765543989	5.962441188	8.23755891	5.155748829	5.637938377	4.582694283	1.543116129	2.31475949	1.058702936
Zm00001d037709	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037710	0	0	0.011823695	0.071190688	0.050142954	0	0.055583984	0.045885584	0	0.341146154	0.335919421	1.380593458	0	0	0
Zm00001d037711	0.066204523	0.277949471	0.507388249	0.013761235	0.218085428	0.108146132	0.116039978	0.146350572	0.081648538	0	0	0	1.987947142	2.540150288	2.589652825
Zm00001d037712	2.912023751	3.72601478	3.176037476	6.206885414	4.745946571	5.791013854	4.316938667	3.862919806	4.653316878	0.153239841	0.338608922	0.030770821	3.662741168	2.593396242	3.115131265
Zm00001d037713	6.672241794	9.259723196	8.349133819	8.688088479	4.227917523	5.348193244	2.336663531	1.875375861	1.974571527	0.252359844	0.469728624	0.275088984	1.857472101	1.676353484	1.488405821
Zm00001d037714	0.589147097	0.418582689	0.337935575	0.791278602	1.413241767	1.887747489	1.712220093	2.950797998	1.69535745	11.1670924	6.648301368	3.815377827	3.110423374	2.48401437	5.658655371
Zm00001d037715	6.524907098	0.13044674	3.732794265	1.033343629	60.45559359	13.32317329	49.37676875	65.31317595	37.16956887	77.99066269	43.49147655	40.15553318	0	0	1.317151006
Zm00001d037717	4.927848337	4.721960576	4.863126008	8.561009126	9.833171494	8.388139108	11.78047133	12.83485243	13.76706824	0.49505534	2.218549834	0.294542091	3.134095118	3.352010315	3.34560625
Zm00001d037719	35.39820568	35.41306387	39.13330299	30.03029922	31.172365	33.03000896	34.07965216	34.0677522	33.29782462	37.3718698	32.04513897	36.74817273	13.63161099	13.66546228	14.09493205
Zm00001d037720	0.326060094	0.014666925	0.014472444	0.101662001	0.030688001	0.014266722	0.258536543	0.014041223	0.244145818	0	0	0.090298644	0.130311327	0.089359631	0.026926426
Zm00001d037721	0.095536226	0.048131292	0.01187327	0.095318909	0.062941497	0.222385402	0.547006995	0.414701792	0.28277439	9.341798609	2.915476749	2.30710916	0.203125398	0.020946033	0.044181166
Zm00001d037722	0	0	0	0.197929004	0.089621176	0.027776339	0.158953601	0.546746143	0.279609005	0	0	0.251150456	0.025370729	0	0.498027246
Zm00001d037723	0	0	0.049680262	0.033236199	0.263360473	0.212220972	0.077850083	0.578399868	0.246497412	0	0.033605974	0.014760597	0.119286938	0.116856816	0.277294949
Zm00001d037724	3.869021436	5.487076843	8.044131599	0	0.068337846	0	0.254530786	0.037521387	0.01279243	0.343336306	0.405489986	0.080432934	0	0	0.03597681
Zm00001d037725	3.928697581	3.830871593	1.693158608	2.795595642	9.497456119	3.347885624	9.745946296	14.13493998	10.42298455	15.32642198	11.20691081	14.18797819	4.3608844	5.539764608	6.007307484
Zm00001d037727	7.141912365	6.097208947	6.37845704	12.2146299	28.50717373	13.83862721	20.81093513	22.99708391	18.39905176	15.06330196	13.98030548	11.45344894	8.18430612	6.207683124	13.09377656
Zm00001d037728	0.040091595	0.006311939	0.006228244	0.212502117	0.244322831	0.264007581	0.005855879	0	0.055624563	0.048381304	0.006319598	0	0.044863782	0.093393356	0.110084468
Zm00001d037729	0	0	0	0.40023873	0.132899007	0.584141429	0.203569351	0.154783063	0.180930092	0.012645798	0.289065469	0.345344511	0.041042387	0.080412538	0.07420569
Zm00001d037730	0	0	0	0	0	0	0.484085968	0	0	0	0.065302517	0	0	0	0
Zm00001d037731	1.860670281	2.737547871	2.15692568	3.600656995	3.146585126	3.829103108	3.431012708	3.191976909	2.83854784	2.161418713	1.837265725	0.965398052	3.457468908	3.516047408	3.532496519
Zm00001d037732	9.066465596	7.354769234	11.28100118	14.00360852	28.81518801	13.60055497	17.78903355	21.65334062	17.70997919	6.781912299	7.216687499	6.409943716	5.455296808	5.135041799	7.216762255
Zm00001d037733	13.23604713	17.76708909	16.96426676	10.43131512	14.86702584	14.78553046	10.96409617	10.53311964	9.320358053	37.90007649	18.96652804	15.42656579	18.4699106	15.66176203	15.30267675
Zm00001d037734	4.120114787	4.726440992	4.38023426	5.938183829	6.642670456	5.581029597	5.445508644	5.622181321	5.355001747	2.619206535	4.436706986	2.662491614	4.222764046	3.748749487	3.990661012
Zm00001d037735	0.690306066	1.159257392	0.473332088	1.335910003	1.892343584	1.701159677	5.034437877	7.491167872	6.057226833	1.69617368	4.322473302	0.861374641	4.945613586	4.549124634	6.054460804
Zm00001d037736	13.00859758	11.86000465	14.88849028	13.96200136	23.13769557	17.02686009	16.76950358	19.9536888	18.21527841	12.12099781	19.10898255	8.711877556	11.47391231	9.806470506	11.95516142
Zm00001d037737	0.016878067	0.223208867	0.083904443	0.052623981	0.044478658	0.423897789	0.118332126	0.203511065	0.197745702	0.70996791	0.159628376	0.271102965	0.254975829	0.314539597	0.556130425
Zm00001d037738	0	0	0	0.174873537	0.046189375	0	0.778261287	1.098959748	2.075128984	1.160300645	2.387058173	0.62130759	0.666859861	0.922269951	1.013193081
Zm00001d037739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037740	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037741	0.045457137	0	0	0.085038254	0.254559898	0.013922803	0.066395831	0.0685137	0.168183771	2.554735107	0.42992181	2.001625295	0	0.012457927	0
Zm00001d037742	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037743	0	0.184406637	0.02274518	4.770395591	9.887123287	0.7399215	1.988835122	4.810707332	3.27277287	4.215215363	6.669773579	2.189547833	31.4777389	27.5662414	24.67145498
Zm00001d037744	2.713985205	2.303473717	2.42534236	6.117845669	6.983530886	6.800252166	8.79114467	9.888066066	8.870791973	7.824336255	6.145567951	6.054205081	5.507239241	6.675126603	6.176842314
Zm00001d037745	0.425276874	0.414226563	0.535582489	3.17524939	3.309887331	3.723573133	5.234392861	5.968841935	3.055995375	0.132946103	0	0.119345947	7.531886581	7.944106678	10.92836529
Zm00001d037746	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037747	2.531709985	3.097592435	4.195222162	8.51004952	9.721763734	10.30943054	14.17168075	13.2572922	12.57841081	71.36258246	44.72635061	89.4239139	4.397995782	3.568306357	4.069926917
Zm00001d037748	4.862336785	5.382644439	5.758394056	33.17576916	22.89799601	31.05401293	17.93665903	21.45337691	15.78479792	1.232935096	3.918151041	1.062762983	62.47517803	63.56878018	63.3240828
Zm00001d037749	0	0	0	0.21009688	5.907861887	0.777921777	8.282687972	11.51563983	10.43588267	36.45873592	14.52724134	26.21196608	0	0	0.119854499
Zm00001d037751	0	0.038912926	0	1.040349349	2.58503927	2.138589753	3.08666341	3.110614881	1.600311335	2.577899597	1.012963795	1.146523117	8.314805003	10.24527283	13.18043989
Zm00001d037752	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037753	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037754	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037755	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037756	7.162913975	10.29158014	7.387239025	21.71386523	28.43353878	20.26119562	27.650447	39.27405133	48.53983087	83.06734084	58.64590147	70.38757616	24.56019241	25.79196186	31.62902184
Zm00001d037757	1.852470721	2.099874355	4.190106038	23.47286261	28.70500684	44.11966514	34.54720836	35.15777731	28.10070499	78.43427973	58.63422777	51.34311657	124.4199127	118.9203367	151.8899989
Zm00001d037758	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037759	0.552793372	0.306946851	0.37674919	0.074131173	2.427954549	0.968536771	2.028109734	1.347420213	1.158237754	2.065839627	1.806437984	2.390177053	0.598638903	0.547347166	0.377965071
Zm00001d037760	24.92687388	24.88335322	21.77485903	13.86448025	13.02279914	11.85032582	6.900408892	6.469815661	7.790022504	26.2054555	30.09198919	32.21310515	9.512707247	8.163909333	9.768704903
Zm00001d037762	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037763	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037766	7.474459667	9.836537604	6.21270254	0.557715837	1.904502334	0.753319611	0.998427309	1.357651792	1.171956972	12.21382477	12.78891823	7.934872749	10.74115467	8.955365124	7.413590591
Zm00001d037767	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037768	3.912375082	5.761903302	6.003801949	6.674678909	5.934797628	10.21394104	3.828594643	3.982664204	3.626951458	0.036540476	0.111368634	0.058699118	1.156285737	0.99718949	1.153783439
Zm00001d037769	22.48392163	41.57718917	50.08320759	82.18181885	53.11316255	97.71186009	30.1801535	32.00508929	39.28478558	1.754954726	0.861993229	0.186392277	9.190897962	5.545148079	7.866431084
Zm00001d037770	30.94016098	32.6467401	36.07488422	23.55351642	28.05253788	25.75114247	17.61683257	23.7620275	16.78734376	7.740426673	14.1334865	8.167646105	16.94681455	14.84768961	18.88867944
Zm00001d037771	4.886321406	5.03387105	4.918345982	11.1927431	7.033161132	9.167946011	5.189911142	4.101380879	4.315945599	2.255369077	1.979697368	1.695590033	16.27209382	16.75089346	15.47305813
Zm00001d037772	8.090510271	6.987191901	7.780269823	8.522132021	8.801019866	8.963425407	6.330174392	5.42152207	6.35988938	1.773156013	2.794685356	1.460930982	3.812714424	3.976430624	3.295843043
Zm00001d037773	0	0.46537756	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037774	49.0347097	42.84454216	52.07557153	48.80675519	63.63081819	94.83247291	89.96584156	75.58917399	56.14368044	0.637990083	0.916681621	0.2104656	98.50694583	95.10560577	82.01354148
Zm00001d037775	18.00692546	19.87888698	22.46252932	33.43955262	29.93132023	27.65618161	21.22421022	25.89633861	23.32113093	24.74189122	25.52102224	18.26913933	29.34448898	32.68155697	35.79602308
Zm00001d037776	1.371477288	1.72738072	2.77766461	1.040748162	0.669304641	0.89790995	0.440919067	0.542480131	0.286376611	0.190150119	0.256218794	0.080384143	0.406012467	0.2068254	0.285242893
Zm00001d037777	12.44721699	14.21491783	12.19744493	15.83754459	11.02763618	16.66706512	8.422664588	6.840963244	8.243707932	1.066623811	2.098988709	0.719554448	16.27075157	16.71366088	14.26395334
Zm00001d037778	9.579491374	11.27721256	15.51493605	30.67829863	25.03334025	28.58361282	15.24359441	12.71155906	15.17833854	1.460589721	3.358940752	1.119830362	14.49052775	12.1372674	11.96566759
Zm00001d037779	8.772984334	7.208552637	18.60015363	376.5104742	334.9146077	457.8181419	33.25548563	23.6876618	36.10371708	1.137918987	0.908747636	0.34708264	5.200805681	2.953870717	7.510477545
Zm00001d037780	0.360028888	0.422398968	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037781	0.197181258	0.063305036	0.052855528	0.212162747	1.986822389	0.648934135	0.853858649	0.825152187	0.720001095	0.042658112	0.097510546	0.004282911	0.112489336	0.076290713	0.245848321
Zm00001d037782	0	0	0	0	0.054291309	0	0	0	0.050815018	0.011365211	0	0	0	0.036134748	0.047636564
Zm00001d037783	62.03865564	59.62787474	62.04287387	14.06256881	39.17683424	20.5576145	29.91213357	36.62303513	38.39971643	60.35253687	65.72083665	56.40569062	9.893560899	9.521009113	9.931769442
Zm00001d037784	0	0.031159916	0.049194788	0.259177392	0.156472151	0.193981986	0.213922898	0.310238365	0.158657618	0.334379077	0.29949819	0.268575553	8.139293567	13.08843923	21.53777866
Zm00001d037785	4.07406603	4.374125102	4.086923987	5.418536821	5.693237004	5.246574677	5.560967242	5.192527052	4.628641001	2.612861671	3.512607307	1.881107238	3.084903777	2.730617058	3.167808165
Zm00001d037786	0.026580494	0.02231882	0.011011439	0.138125161	0.0700474	0.065129483	0.056942063	0.080125063	0.0273176	0	0	0	0.069403661	0	0
Zm00001d037787	0.549513666	0.230704832	0.144865467	2.762085986	2.238018691	2.264498985	1.712284594	1.305098361	1.437551291	0.321520581	0.419972341	0.036892503	1.285749004	1.442099938	1.097358451
Zm00001d037788	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037789	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037790	49.0701279	49.39943886	45.32355266	25.43269488	22.1588507	22.51890006	23.61497636	21.99757222	19.45433422	31.75692418	27.05332596	24.44372634	23.11667149	24.11936415	24.02060536
Zm00001d037792	0	0	0	0	0	0	0	0	0	0.072240941	0.150978562	0.008289202	0	0	0
Zm00001d037794	0.035953278	0.13584986	0.178731358	0.246616527	0.402676604	0.495536454	0.136537068	1.148813938	0.210616724	0	0.056672796	0	3.047640087	1.458290093	3.699453712
Zm00001d037795	0	0	0	0	0	0	0	0.073755688	0	8.35182847	0	0	0	0	0
Zm00001d037797	77.40811288	60.17824227	70.10817596	34.19732595	160.7311436	59.63186464	95.46737029	118.7007803	119.4615636	151.5791221	134.9083146	72.12959674	60.50672149	58.82225155	55.3652962
Zm00001d037798	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037799	4.465936414	3.845569902	4.049438192	5.228718765	5.674364744	7.006720277	5.138572552	5.192584811	5.142429013	3.393879387	3.562905347	3.558927541	3.824637436	1.673535681	3.925109997
Zm00001d037800	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037802	0	0	0	0	0	0	0	0	0.022302147	0	0	0	0	0	0
Zm00001d037803	2.046683194	1.872148923	1.638908507	3.37961271	3.294421453	3.380644457	3.625179057	3.469673585	3.915453681	9.461609667	6.80558914	13.19380098	2.158089259	2.586251148	2.361838659
Zm00001d037806	0.871206083	0.379830214	0.832874988	1.880533443	2.604944911	3.119936378	0.117462036	0.686849843	0.206622831	0	0.04225457	0	0.187482227	0.293860524	0.581096032
Zm00001d037807	8.286990836	7.842612046	6.937921975	6.216115795	7.127180858	7.554890777	6.80440362	6.590343804	7.181614662	6.996129182	7.42805144	6.756539058	6.940201749	6.131351886	5.836118076
Zm00001d037808	10.34975077	10.43077826	9.129950166	7.616128518	9.563553267	8.616276803	9.283848366	9.896235153	11.42730197	28.68567552	22.20400895	41.44775636	7.077851962	6.747915709	6.993199703
Zm00001d037810	6.022971263	5.372189489	7.609179185	2.509779327	3.488004661	2.861266483	4.092658102	5.989021739	2.629285202	14.6014463	8.874779341	14.66352371	5.003960368	4.101657832	6.923886861
Zm00001d037811	1.727279554	2.025080443	1.381632137	2.818778086	2.784399836	2.251227438	2.329663722	2.94680739	2.220862169	2.635629154	2.236084586	0.915990273	5.130360432	4.864695078	6.500777544
Zm00001d037813	5.748132444	4.388601047	6.408269957	14.7897307	18.228307	12.14493347	9.837318424	11.70320771	9.269583205	0.89785169	2.472166728	0.491700406	7.972133877	7.493443349	10.88787812
Zm00001d037814	0	0	0	0.199417192	0	0.039179256	0	0	0	0	0	0	0.089465203	0	0
Zm00001d037815	0.087603082	0.08112971	0.16651221	0.671595459	1.34441898	1.14586034	1.511377337	1.074934243	1.271045834	0.238084683	0.734302562	0.368191492	0.369056609	0.347415579	0.747692957
Zm00001d037816	0.663062437	0.471752595	0.691955377	0.220938892	0.113378585	0.192233653	0.15377481	0.262432076	0.14981494	0.502610794	0.523387225	0.26352666	0.368162063	0.32736998	0.46814697
Zm00001d037818	1.951196565	1.603271104	2.632691792	6.398323804	7.751083255	6.85639291	5.097073534	5.678260162	5.577854492	0.248265598	1.057983695	0.309795535	4.604313114	4.676134176	5.440796818
Zm00001d037819	0.079948736	0	0	0.033236199	0	0.03264938	0.653940694	0.963999779	0.427262181	0	0.033605974	0	0	0	0.03081055
Zm00001d037822	0	0	0	0	0.017608853	0	0.031231353	0.016113779	0.016481352	0.055292919	0	0	0	0	0
Zm00001d037824	0	0	0.033152487	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037826	0.081376392	0.153740801	0.10113482	0.431328702	0.268063338	0.124621519	0.237720788	0.049060703	0.150539491	0.308636518	0.102618242	0	0.956159359	0.624453612	0.376328859
Zm00001d037828	0.012228295	0	0.045592083	0.18300719	0.338364028	0.359552032	0.442951651	1.209052317	0.241294068	0.219242854	0.308405449	0.149005454	2.599932425	2.748042731	6.1357088
Zm00001d037829	0.344145591	0.38275643	0.242616374	0.838327211	0.599312753	0.705174708	0.437409049	0.611521838	0.42194493	0.09159594	0.12435645	0.035670537	1.1102878	1.855435259	2.785154872
Zm00001d037830	2.031468494	1.687320727	2.122125331	4.361830609	2.23545446	2.865514173	0.63514412	0.688504903	0.914119319	0.037861216	0.103854606	0.006082077	3.293181792	3.69556162	3.561068502
Zm00001d037831	0	0	0	0.03055586	0.258263173	0	0	0.029541929	0.030215812	0	0	0.027140453	0	0	0
Zm00001d037832	9.798170633	10.12598656	11.28206167	7.840366391	6.668349997	7.622020568	6.310536981	5.001031539	5.534107031	0.749697236	1.525196767	0.42753497	5.365137525	4.954909062	5.024551391
Zm00001d037833	0	0.011924494	0	0	0	0	0.003687635	0	0	0.147983866	0	0	0.028252169	0	0
Zm00001d037834	1.182670236	1.434914143	1.078771413	5.006795919	3.774331803	4.772173362	7.556351445	5.115395971	5.579997134	0.02992839	0.068412161	0.024038687	12.79735828	14.84415444	11.10170133
Zm00001d037835	0.014668706	0	0	0.622001906	0.077312688	0.898558591	0.651334554	0.194558325	0.253268157	0	0.055493126	0	7.074758519	7.059273885	5.698232677
Zm00001d037836	0.647831702	0.529569686	0.446296106	1.519121525	1.226920521	1.786338274	1.47391909	1.155387328	1.31527323	0.107016905	0.473322576	0.111943619	1.498353209	1.604324856	1.358181581
Zm00001d037837	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037838	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037839	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037840	0	0	0.02024303	0.013542629	0	0	0	0	0	0.082368443	0	0	0	0	0
Zm00001d037841	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037842	4.54867783	5.252976013	5.35557808	9.114376529	10.32683745	7.749368048	7.92116339	11.22762102	8.733232924	8.758398419	10.48692223	7.313964238	8.953529113	7.666103334	7.414892482
Zm00001d037843	0	0.101715433	0	0.086329974	0.121612532	0.098940021	0.08088525	0.013910883	0.014228205	0	0	0	0.129101686	0.177060265	0.06669119
Zm00001d037846	9.646260092	9.595078306	8.865637025	6.211359588	6.917712157	7.262664985	7.100434888	6.236129314	6.660312871	6.911931009	7.450814705	5.956454646	4.991652003	4.476574704	4.246809588
Zm00001d037847	1.071616911	1.349705464	1.089661623	3.968923156	6.033144282	3.819279537	6.147086902	10.14123188	6.167470644	3.985949663	5.651072	5.539746716	3.161458023	2.456283093	6.570111905
Zm00001d037848	0	0	0.006160497	0	0.006531493	0.012145854	0.005792182	0.041838569	0.012226558	0.006836434	0.006250857	0.016473212	0	0.021735876	0
Zm00001d037849	5.836651592	1.705874941	3.459508325	0.727921867	16.54474599	4.052061524	8.105459141	9.212133851	8.038001329	24.36583724	18.80626716	13.66889451	0.828985454	0.664443253	1.06410229
Zm00001d037851	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037852	9.127611886	7.654758517	8.774042886	5.003732599	12.81300542	6.058372106	7.421380944	7.674330132	6.86199302	19.31883444	11.75059667	9.234191706	4.986584374	4.029446735	4.021459075
Zm00001d037853	0	0	0	0.027367849	0	0	0.025641793	0	0	0	0	0	0	0	0
Zm00001d037854	0.166722365	0	0.290084264	0.027723853	0.424716938	0.381281057	0.467556203	0.589685719	0.370106846	1.073042263	1.275469656	0.812624867	0	0	0
Zm00001d037855	0.15023334	0.087332053	0	0	0	0	0	0	0	0	0	0	0	0	0.013360788
Zm00001d037856	16.04917659	18.13601399	18.46349362	17.03084958	13.77830371	15.93302711	12.30017191	12.74855572	14.15702373	1.944243149	6.554078829	2.119354114	13.48699343	14.18871823	13.28046419
Zm00001d037857	2.807485537	2.547704702	3.705868761	2.087775904	6.456496976	3.952282455	7.681777461	8.515536315	10.92486592	42.25514515	34.98549049	57.89245463	1.775724524	1.777781203	2.822466441
Zm00001d037858	124.4193661	106.0024558	139.281803	77.11931899	130.3895018	93.49040354	168.7606502	209.9382424	224.736962	289.3898514	337.6110887	334.137498	31.74475037	33.6365563	41.1562744
Zm00001d037859	22.67648911	21.32324619	23.6640606	40.47325866	54.67072941	32.69775428	38.04791128	47.36233695	40.32244543	16.67132338	23.08155889	10.94069559	35.94971708	31.70938711	40.32806462
Zm00001d037860	1.077329979	2.324613504	1.328529731	6.009742226	3.081172738	4.113103921	3.26913279	3.3432007	3.2649689	3.178954425	4.075643001	5.587783139	8.7473687	9.905810268	11.22917498
Zm00001d037861	0	0	0	0	0	0	0	0.008758978	0	0	0	0	0	0	0
Zm00001d037862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037864	5.02148367	4.85151612	4.81614078	3.498364782	2.887701804	3.34525952	2.7495885	3.224963679	3.181681731	3.384539771	3.470693028	4.77283451	1.887551127	2.123227416	2.165622513
Zm00001d037867	2.725107703	3.20555721	2.657101512	4.263837683	5.285743116	4.222484542	5.198739098	5.464745148	6.501329924	5.773150899	6.053946166	5.505231739	3.049483024	3.457928482	3.062546185
Zm00001d037868	0.062283526	0.052297554	0.012901025	0.129462186	0.437694307	0.279788084	0.436669803	0.913713686	0.870545758	6.098846786	6.846202867	5.864563388	0.046464844	0.250350423	0.324037149
Zm00001d037870	1.367603253	1.988431392	1.71755252	4.757769414	10.89430483	4.562066177	6.874394559	7.417689	8.054417584	5.320929425	6.269041666	3.253196202	12.88751119	14.55027329	13.99721441
Zm00001d037871	0.004808735	0.078736056	0.053786791	0.293865046	0.082370782	0.212088905	0.117999147	0.121763039	0.272803186	0.006632039	0.115215416	0	0.290580966	0.300475745	0.300215917
Zm00001d037872	1.813063842	1.170613145	1.166471266	3.14052024	5.194216444	4.263007509	5.012867455	4.410928528	5.064902688	4.956826894	3.741270009	3.114080618	2.310665082	1.992563302	2.323761386
Zm00001d037873	24.64551451	21.20006883	21.47853263	36.34079789	65.26577155	38.01150347	46.54278842	45.3293477	46.36335877	7.000017366	16.01827737	5.179113422	19.5888616	15.11152814	23.44055562
Zm00001d037874	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037875	39.94936409	44.53819414	35.09880534	43.15752733	62.22638828	42.42364072	44.48295201	56.68862165	52.65204577	5.98547707	18.58202853	4.497573717	20.19613916	20.37311343	25.89395118
Zm00001d037876	0.332508963	0.322150977	0	0	0	0	0	0	0	0.070551489	0	0	0	0	0
Zm00001d037877	37.97119516	37.61354609	40.92371554	47.52269573	77.57286584	45.90320964	57.8508758	58.84215075	61.62926854	6.930045887	19.13855283	6.395277543	25.20347589	23.66453338	28.06832055
Zm00001d037882	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037884	1.111369016	0.866805278	0.173373977	0.974295422	0.410519855	0	0	0	0	0.076958716	0.222828182	0	0	0	0.333319846
Zm00001d037886	0.608224765	0.673205422	0.544021479	1.723980777	1.189995228	0.880641932	0.990687563	0.950061259	0.590995616	0.19064596	0.418358696	0.229692202	0.360936462	0.348532249	0.623282781
Zm00001d037889	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037890	0	0	0	0	0.007911224	0	0	0	0	0	0	0	0	0	0
Zm00001d037891	0.56622376	0.807676224	0.746096396	4.645405568	4.009071818	4.036841727	0.829033454	0.913057875	1.674263561	0.047043127	0.662409966	0.10579901	1.755821578	1.907014026	1.758830385
Zm00001d037892	1.048341881	0.4850414	1.169935195	2.42811496	3.185548929	1.834803207	6.349935187	6.165525349	5.197970782	2.508083359	2.56304716	2.038209759	5.051633797	5.159804497	4.130783436
Zm00001d037893	0	0	0	0	0	0	0	0	0	0.071637103	0	0	0	0	0
Zm00001d037894	1.097797156	3.1893809	2.874221265	0.346844998	0.771471363	0	2.257685736	8.330444345	6.047367991	4.098010443	4.688357177	3.680698673	0.22931445	0.112321421	14.18123181
Zm00001d037896	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037897	1.582844377	1.329065566	1.535549685	0.774629115	2.710438569	1.202795517	1.943201954	2.826586749	2.627491419	7.516163437	8.438858969	6.458738254	0.926731885	0.65160377	0.918852778
Zm00001d037898	0	0	0	0.057119497	0	0.022444398	0.016055113	0	0	0	0	0	0	0	0
Zm00001d037899	12.72667594	12.27242932	10.27162008	14.98864935	22.45181548	16.82526455	17.97895286	22.46373631	20.79963091	8.998922618	13.32171354	7.159157916	19.79076026	22.22146564	21.9844477
Zm00001d037900	5.755315867	7.046824734	5.042083779	14.41439483	11.26332218	14.55290363	15.04875944	13.71993226	16.80224348	16.8770093	18.25117479	20.69417362	13.96824107	13.7664225	13.54783892
Zm00001d037901	0	0.024793333	0	0	0	0	0	0	0	0.013574432	0	0	0	0	0
Zm00001d037902	4.583448045	4.31564051	3.754534178	9.101645842	8.74958736	8.310961768	11.93057443	10.68951987	11.21385819	4.009646534	4.776034817	1.632196387	7.62990962	8.038174674	8.391657185
Zm00001d037903	0.675122663	0.850319492	1.153686095	5.472894038	3.33589932	4.445757295	3.648573871	4.171976822	3.22637724	1.16388182	0.532094586	0.654386467	7.932581349	4.718093961	7.51263907
Zm00001d037904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037905	14.08680533	11.00510925	19.10951489	48.59896436	79.91805942	43.47855384	54.1563159	64.9739608	57.73676417	7.97254511	20.08854057	3.104419307	22.73319181	23.11111094	31.85185277
Zm00001d037906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037908	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037909	0	0	0	0.359294768	0	0	0	0	0	0	0	0.145061039	0.117230266	0	0.030279333
Zm00001d037910	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.008894661
Zm00001d037911	0	0	0	0.008668109	0	0.068120517	0.008121422	0	0.051429862	0.134198473	0	0	0	0	0.024106475
Zm00001d037913	0.780040374	1.060026664	0.969436473	12.44201586	1.866300431	2.062205458	0.14391745	0.321767494	0.734162563	0.028310639	0.336513873	0.022739298	0.229707954	0.135016997	0.023732451
Zm00001d037914	1.744066879	3.472137925	1.748009234	20.06727814	4.040144733	2.929374962	2.859693034	2.204703199	2.046841475	1.125085759	2.341216178	2.087804441	0.409220466	0	0.032522247
Zm00001d037915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037916	20.6739128	21.32206433	19.15341067	6.597825414	7.48437208	6.600727226	4.327196159	5.87529397	6.181010466	9.830653125	10.28773996	14.97473087	0.529685022	0.305231908	0.354101696
Zm00001d037917	10.10912713	10.73848895	12.87108329	14.97288743	20.2954666	14.04179353	13.83586602	15.21177697	12.77243141	3.798270056	5.448545862	2.9229187	9.061022828	7.140917064	7.626447319
Zm00001d037918	0.440147043	0.940743711	1.002862742	2.054337542	4.393623495	2.442922199	9.592694772	18.03634182	8.742746167	156.7254872	74.87147042	114.5357812	3.656726524	3.9404546	14.78807197
Zm00001d037920	0.184832533	0.313072177	0.41189454	1.112831601	1.914759554	1.225927154	1.191596229	1.321825711	1.171190222	0.298865318	0.19289359	0.035301568	0.256758877	0.251528168	0.427383263
Zm00001d037921	0	0	0	0	0	0	0	0	0	0.631240708	0	0	0	0	0
Zm00001d037922	0	0	0	0	0	0	0	0	0	0.271782133	0	0	0	0	0
Zm00001d037923	0.049713578	0.015653609	0	0	0	0	0	0	0	0.03428161	0	0	0	0	0
Zm00001d037924	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037925	4.883158641	4.695160764	6.058797661	5.206427024	6.582802034	5.80991686	6.134036331	6.392800303	5.093873378	1.648969667	3.817543629	0.949867887	4.87877779	4.501361729	5.375651631
Zm00001d037926	11.27263739	9.806319074	13.57156721	20.91130701	41.0360494	19.36853116	24.00702795	30.77888107	28.0124965	17.03703778	25.88878767	11.96099825	9.338632664	7.350631088	8.877479649
Zm00001d037927	5.117518001	4.394079896	4.94962049	8.151580069	14.78770066	7.7501749	9.270562564	12.30311202	9.175387763	4.884009538	8.308528126	3.666777358	5.009363714	3.766880823	5.394143396
Zm00001d037929	41.12551111	39.13634975	53.62476447	63.86524601	94.22117419	52.09042359	54.37383163	68.21721144	55.69580622	2.845755951	15.39410956	2.218172034	23.05588129	18.58596804	30.22494323
Zm00001d037931	0.021000359	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037932	0.28015877	0.330200209	0.23957487	1.352730155	1.131157739	1.259570005	0.843942317	0.753094244	0.633969656	0.095710079	0.155576894	0.076874987	1.256902846	0.98052953	1.185658773
Zm00001d037934	3.955033921	2.802026171	3.784802405	5.581998724	31.02482874	10.62366602	30.29750296	34.92800348	24.92481046	14.90481425	14.05622517	8.320642469	6.989091554	7.294726192	9.183222538
Zm00001d037935	0.552281635	0.399115192	0.753889757	0.993652285	4.80767159	0.92064766	2.856427799	5.403825253	4.187191141	5.381758705	5.594393142	4.041842466	0.02026298	0.238202173	0.115141677
Zm00001d037936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037937	65.9728702	69.17275764	98.42859169	194.9010799	157.7075161	206.3480244	188.3623016	183.1915374	224.418044	237.6004535	143.8967241	208.365677	61.66312004	57.53586388	86.29610038
Zm00001d037939	0.172967733	0.192223676	0.328769705	0.13958214	0.134064919	0.386422547	0.321002677	0.24536437	0.292788293	0.04677471	0.102643699	0.018784883	0.026566571	0.007435816	0.062737036
Zm00001d037940	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037941	0.074502637	0.015639391	0	0.015486076	0.163613591	0.030425308	0.087056332	0.104805426	0.015313736	0	0.093950216	0.013755107	0.125056265	0.19056895	0.071779346
Zm00001d037942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037943	2.600756621	6.551325177	2.860378747	9.673244531	9.916718889	11.64544036	12.37108585	13.37622724	7.834135937	3.078996451	3.192567515	0.841354029	8.4219289	6.458994941	9.871980265
Zm00001d037944	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037945	0	0.144212477	0.199220349	0	0	0	0.32110225	0.027612054	0	0	0.259897456	0	0.102502846	0	1.244343664
Zm00001d037946	16.44711898	18.8554031	16.92836029	12.90543034	10.61222388	12.9042947	11.95635005	12.0030206	11.48277539	6.938980699	7.29752869	8.293956972	12.11890193	12.91594071	13.45232398
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Zm00001d037949	4.368144393	5.301805489	4.508298443	11.07459901	16.53012798	13.74002879	25.09700752	27.02748436	21.92134598	68.54047924	45.36304887	54.0894366	19.04496077	18.45814459	22.86556671
Zm00001d037950	12.95011859	12.56723365	11.60012744	12.7536018	11.15398586	14.27700323	12.1867828	11.74729316	13.18168929	9.116096614	10.49934467	9.829975398	10.17428985	11.41668142	9.880797214
Zm00001d037951	6.954321024	7.526461983	6.930112544	6.304446553	4.066660493	6.668438885	5.595590917	3.127915929	6.54849974	2.46766608	1.971521998	5.221312676	4.386750605	4.786155261	3.293714332
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Zm00001d037962	14.25606976	18.00467947	8.638961457	6.762412053	5.966700019	7.376578463	7.826335885	8.761008301	7.868655343	3.472156545	5.998306927	6.404505468	4.553102705	4.84501715	4.494787869
Zm00001d037966	4.238053247	4.770144896	4.688706388	7.267584723	7.331265443	7.644861852	8.909109452	8.59687202	8.027741541	4.436206198	5.883182218	2.558105312	10.4250233	9.121755274	8.855450692
Zm00001d037967	0.354234401	0.414788947	0.20980357	1.763691662	1.611766093	1.912249094	1.432561289	1.278041246	1.808911779	0.259540934	0.589784841	0.085838549	0.922867981	0.819121338	1.049454728
Zm00001d037968	1.968804885	1.390495535	2.218160197	1.904662316	5.746008008	1.420182133	5.568617456	7.80956591	5.355396806	1.624108575	2.181086501	0.529951124	1.523677902	3.045787203	1.552926354
Zm00001d037969	4.493074069	7.255183867	5.440826046	4.645692357	6.729895764	5.363486133	6.820716899	8.612633983	7.861882632	4.819647694	0.532692445	0.680645956	8.079009416	10.77708706	9.057263096
Zm00001d037970	1.690388388	1.401076142	1.588248543	4.075088405	7.539260032	4.689899332	5.939231922	6.12167508	6.486982376	4.398271566	4.64784112	3.227067268	1.485327647	1.681129419	1.5110719
Zm00001d037971	14.61015596	15.57668841	15.13019169	12.45859773	10.45493693	10.48238392	8.835762978	9.863849395	9.485414987	4.417346938	5.890036922	3.383971804	6.762852808	5.949524377	7.185849944
Zm00001d037972	21.273364	19.36142216	29.17902677	55.57674424	85.53122875	52.04837836	51.01641477	64.19039083	47.60285325	4.807850984	17.79598924	3.070748344	33.20560797	25.7148271	46.49482352
Zm00001d037973	3.851500127	4.683933942	5.525092936	0.46975633	0.761936492	0.233980891	0.812069709	0.812385844	1.812315549	1.558436402	1.618955075	1.069567636	0.011873147	0.029078166	0
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Zm00001d037975	1.659708938	1.886467154	1.629470112	6.975451967	4.679039175	5.92653121	5.029747971	4.219398014	4.007782732	0.195403485	0.58420992	0.137019327	3.533338352	3.133464878	3.424289274
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Zm00001d037977	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037978	6.823697837	6.049908277	6.577025712	1.925019181	2.292958173	1.474858192	2.430347905	2.601286588	1.763950095	0.846579427	1.893829936	0.73939395	3.141071024	1.972990315	2.914498041
Zm00001d037979	0.449659742	0.496796587	0.215692034	2.754787979	2.203656978	2.387210408	1.567064213	1.968995971	1.585833207	0.554875453	0.835631059	0.506851475	1.368306527	1.842012041	1.96090571
Zm00001d037980	0.049059452	0.082387415	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037981	0.234941805	0.127353702	0.195889588	1.639368086	0.93654811	1.297083106	0.889614587	0.702836994	1.001282462	0.237890659	0.307519882	0.164720171	1.138156192	1.209513806	1.028048251
Zm00001d037982	1.435084439	1.469086664	1.080330331	3.599261296	2.011720834	3.512476959	2.88470466	1.696082386	2.105116397	0.008719022	0.267068422	0.052523835	14.82456	16.06455647	14.76061848
Zm00001d037983	0	0	0	0	0	0	0	0	0	0.241729301	0	0	0	0	0
Zm00001d037984	10.73646401	13.47107338	11.67948235	32.75149161	17.53240838	26.16044692	11.55844521	10.79222177	12.25327726	0.81031259	1.761953233	0.08418937	41.67930743	48.65851497	46.97472477
Zm00001d037985	0	0	0	0	0.164698115	0	0	0	0	0	0	0	0	0	0.018063785
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Zm00001d037990	0.055619341	0.084063318	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d037992	38.59194032	35.28412879	39.58335946	37.49088784	49.09033191	39.80550889	41.00512433	44.32889636	40.29159369	12.86441901	22.20494558	10.93856392	22.37959277	21.34989059	24.88286414
Zm00001d037993	19.49193827	19.04292748	17.98775362	17.7705996	26.52392343	17.6435987	23.98100523	24.59115916	23.69760157	33.78166983	34.06492021	38.92299262	10.40552767	9.340418823	11.05664788
Zm00001d037994	0	0	0	0	0	0	0	0	0	0	0	0	0	0.081010198	0.113915763
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Zm00001d037999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038002	7.34737438	8.962458388	10.05507258	9.907941859	10.41977964	9.061250629	9.112206459	10.47537835	10.68427874	8.251112989	10.14109681	5.453053918	9.230943117	8.361667623	8.00151627
Zm00001d038003	2090.091346	2296.61767	2262.86181	1389.916352	987.9310497	1370.816048	915.4195273	737.3456998	861.4321821	115.2364945	158.6107681	30.92343352	581.1667931	404.628494	315.5274335
Zm00001d038004	37.0115841	44.15637432	32.05144819	15.0336978	17.46542511	19.74985487	27.90919991	28.62571382	29.94995513	208.2427165	127.8858807	212.7305535	7.846328792	6.317657156	9.253988331
Zm00001d038005	0	0	0	0.018603568	0.034396343	0.082237965	0.06536349	0.02248281	0.004599133	0	0.122268543	0.004131035	0.037557814	0.016352304	0.060360439
Zm00001d038006	13.03450979	12.8355012	12.84759934	9.466773185	8.741178761	8.846286322	6.863609535	7.424208688	7.412665852	0.298846027	1.336814664	0.155099645	3.734174176	3.285347755	4.224133145
Zm00001d038007	27.15279224	24.61559224	23.18307974	16.30411123	19.79217192	18.91204034	21.37934422	19.65988557	24.16600649	35.01334124	33.7897666	46.52409422	10.79225334	11.45209272	11.70675942
Zm00001d038009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038012	41.91802463	39.65053025	37.92154358	25.68803805	27.61657352	24.26994867	23.47120012	28.44039411	26.97667679	19.69125006	33.47351138	17.30111973	20.03693325	17.42444259	17.83535214
Zm00001d038013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038015	0.014990388	0	0	0	0	0	0	0	0	0	0	0	0	0.01643299	0.017330934
Zm00001d038016	0.226344932	0.019005485	0.018753477	0.09409586	0.159062749	0	0.229219515	0.090973489	0.093048692	0.249733583	0.30445677	0.050146929	0.253287247	0.215043628	0.226794213
Zm00001d038017	0	0	0	0	0	0	0	0	0	4.542313322	0	0	0	0	0
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Zm00001d038019	0.181828548	0.085880148	0	0.481883438	0.823576141	0.292378865	0.849866637	0.43848768	0.210229713	0.188078658	0.057322908	0	0.216188982	0.149495129	0.013138663
Zm00001d038020	0.773148776	0.996969072	0.495687717	6.374682009	5.029002979	7.246931498	6.747002499	4.853574472	4.215105749	0.033850782	0.147018594	0.027189179	5.101805413	5.455280571	6.093892535
Zm00001d038021	1.96614369	1.901932578	2.09445357	3.457896537	4.98349158	3.441135772	3.184568798	3.286148963	3.923580941	0.088214476	0.427840415	0.150950824	1.110980931	1.231631861	1.29571649
Zm00001d038022	28.25649494	31.78190923	30.02168295	29.81744132	23.88943602	33.5062629	22.58143141	18.5390416	21.50629886	5.411550228	7.920128809	2.45173939	35.54319222	34.64017747	35.10641449
Zm00001d038023	23.55645439	14.36005332	19.47787415	19.40564329	96.83874731	36.41715612	83.68060977	77.45994804	69.15124057	160.4577042	93.90154377	125.5600923	9.65611885	8.053789557	10.92784599
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Zm00001d038028	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038030	6.766043251	5.334375477	8.938465235	24.70756171	12.34155424	26.21047395	1.839341913	1.195433314	2.67063952	1.151443388	1.601157906	1.685919332	2.218873627	2.126002375	1.568515701
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Zm00001d038036	51.85735116	65.52198314	35.34601034	24.78779718	20.11185566	23.77838638	20.56198892	17.54363454	16.28486639	40.85225189	41.71493337	75.75227296	33.79197735	30.54556225	32.91290585
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Zm00001d038048	1.941711484	1.784284543	2.536285398	2.17451442	5.743548395	3.604704525	6.216295247	5.817319537	5.10699769	12.66556438	10.40638203	9.196365339	3.580747513	3.42091979	5.761103964
Zm00001d038049	5259.015238	5358.03068	4678.183739	664.2679286	583.2310818	474.1947023	447.461359	522.9253794	451.2035991	3187.117562	4282.360476	3819.755058	1160.844774	785.4408526	485.173675
Zm00001d038050	14.61853202	16.26989264	20.70986285	0.939773143	0.538997276	0.527531721	0.201257788	0.467274224	0.424829556	1.128323856	2.361997194	1.192470277	0.096368817	0.047202793	0.099564171
Zm00001d038051	41.01370176	40.76351124	36.51449243	11.08432804	5.927998389	6.141723402	5.739783591	7.494920245	3.940515247	7.888914478	13.60432564	5.268492252	63.51620854	58.7397386	50.62318184
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Zm00001d038058	0.03156114	0.053001831	0	0.006560281	0	0.006444453	0.043025725	0.050740735	0.168669103	0.072546693	0	0	0.11184011	0.074963266	0.030407488
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Zm00001d038060	1.481878627	1.297397586	0.797314034	0.033807343	0.571490485	0.011070147	0.464568953	0.610129669	0.546041459	0.772639062	0.296256761	0.420398973	0.020222802	0.029716233	0.208933405
Zm00001d038061	75.29181998	74.92351699	55.1988914	2.938728468	3.10482727	2.396623785	4.026178418	6.111288357	4.825096662	7.17405399	7.764947136	7.06737384	2.985082877	3.289804397	3.032659877
Zm00001d038062	28.51938276	26.26267206	26.97327209	13.42268447	17.97208507	16.59377787	17.42877863	16.17382064	18.55623945	20.49444075	24.53557539	29.34935497	7.835518087	7.484755299	7.366882843
Zm00001d038063	0.914515648	1.591095274	1.502574468	0.734587818	1.817724732	0.617173236	2.816425335	4.971484576	3.612947785	2.137742119	2.374879304	0.66106388	0.338233243	0.118943545	0.87810067
Zm00001d038064	1.627360836	1.122015984	1.795830605	3.595495035	17.18202099	3.377326285	10.08160567	16.60280646	17.13724882	19.66751267	26.37725817	19.15386262	1.444296128	1.038086046	4.338691358
Zm00001d038065	0.755286771	0.869161031	0.567255397	0.684446406	1.009520565	0.232996671	0.768265211	1.297261706	1.166022894	0.299759706	0.829103185	0.505614981	0.784385102	0.768405558	0.760136431
Zm00001d038066	11.04364215	12.95696941	10.51974272	11.79001109	10.59112546	10.04947928	12.43997941	14.34493203	11.19245101	2.527356991	5.037463977	1.321104836	18.95501163	15.93286749	20.53634589
Zm00001d038067	2.600756621	2.087147844	3.032001472	7.549149293	5.12515441	5.865015967	8.632866432	7.881428498	6.074293806	3.364676534	1.509213734	0.841354029	21.27374089	18.41822776	22.19199876
Zm00001d038068	0	0	0	0.032710158	0	0	0.007661792	0	0	0.072344884	0	0.007263488	0	0	0
Zm00001d038069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038070	0.085982603	0	0	0.026808443	0.481502449	0.158010681	0.125588341	0.699809274	0.371141387	2.490267894	1.951682783	1.309654856	0	0	0
Zm00001d038071	17.60705828	16.92899508	16.13226088	11.64935424	14.24351431	11.24220016	12.08040998	12.00307279	10.81663063	4.18829453	7.133737068	1.590948516	7.471384759	7.235048751	7.326190358
Zm00001d038072	0.40341346	0.545737838	0.482794419	0.950337338	4.203233144	1.244744246	2.601366891	2.351053232	3.270737794	1.050928043	1.37542089	0.322748922	0.835986325	0.810766002	1.191913697
Zm00001d038073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038074	0	0	0	0	0	0	0	0	0	0.068314802	0	0	0	0	0
Zm00001d038075	0	0	0	0	0	0	0	0	0	0.079556479	0	0	0	0	0
Zm00001d038076	0.816915289	0.899846221	0.813626784	1.899196521	1.500217059	1.705252054	1.051019878	1.084544911	0.982910356	0.239464504	0.373297089	0.091440101	1.382379885	1.004742352	1.217603678
Zm00001d038077	0.027436536	0.029619787	0	0	0	0	0.002289971	0	0	0	0	0	0	0	0
Zm00001d038078	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038079	0	0	0	0	0	0	0	0	0	0.056115731	0	0	0	0	0
Zm00001d038080	0.340859606	0.464123173	0.515215121	2.481695886	1.675142974	2.595889751	1.937648686	2.021671235	1.681497711	1.168901257	1.556699362	0.653126577	1.463877401	0.898809243	1.501765163
Zm00001d038081	0	0	0	0	0	0	0	0	0	0.385879802	0	0.053438153	0	0	0
Zm00001d038082	9.048245071	9.42884283	8.168487097	7.200823845	9.739050472	8.183188943	9.08952973	10.44281971	10.6322598	13.82618881	15.71385979	13.52786298	3.965143353	3.606910539	3.602829017
Zm00001d038084	112.7709259	124.9219371	134.5613653	174.4926087	103.9328868	149.6953685	106.8708761	112.9564969	111.5763286	18.19635088	28.1521073	9.474512462	236.6588155	254.262818	247.2466767
Zm00001d038085	5.440305457	6.189361622	6.340840425	35.14327113	30.18404243	31.39167239	25.06567199	23.85988897	22.80502574	1.010777366	1.836549148	0.33307211	39.21896258	48.05073983	52.338421
Zm00001d038087	0.225125109	0.190104643	0.066767149	0.315862054	0.229218232	0.344761328	0.415513162	0.249857054	0.277641696	0.059979988	0.148397038	0.039674629	0.632668318	0.493580101	0.505762325
Zm00001d038088	10.51503547	8.609484856	11.72564594	25.57525483	30.24548717	22.37353206	20.58978984	25.68309634	21.33572046	2.211375458	6.959797182	1.009624834	14.82637228	10.82386262	14.3227976
Zm00001d038089	11.20117595	14.66250052	9.249426772	12.38916508	11.49037811	13.51245774	8.570945511	8.870236775	9.64209579	10.70862703	9.804919054	12.07504957	7.342823169	8.229248863	8.207102732
Zm00001d038090	2.848173733	0.239152357	1.179906233	1.184039575	0.500384898	0.46525367	1.774981883	1.373699685	0.468345083	0	1.676097945	1.682708057	0.84991943	0.208151204	0.219525168
Zm00001d038091	7.828568733	9.2598106	8.030643714	7.454111539	7.438701242	7.164776019	7.038402414	6.595740185	6.648229303	9.108220578	7.029277584	4.712324287	12.01569124	11.5156703	14.04186951
Zm00001d038092	0.007714055	0.021860732	0.021570863	0.25494682	0.297308674	0.262258946	0.268162731	0.137195567	0.292542253	0	0.03161493	0	0.248177912	0.298088732	0.298769758
Zm00001d038093	15.16969865	14.29134693	13.20435442	12.30494268	11.14492135	12.16510092	10.67450313	8.838118016	9.891373939	7.363925233	8.497562832	6.164744573	9.646824039	9.865913528	10.00843432
Zm00001d038094	0	0	0	0	0	0	0	0	0	0	0.036837317	0	0	0	0
Zm00001d038095	0	0	0	0.053115794	0.028058966	0	0.074648771	0.02567663	0	0	0	0	0	0	0
Zm00001d038097	3.868010844	4.865063539	4.575424389	7.983546032	3.826013913	6.61545028	3.641963996	3.285958172	3.699305591	0.124915453	0.436707404	0.035411627	19.22454156	22.22918581	18.77171172
Zm00001d038098	0	0	0	0	0	0	0	0	0	0	0	0	0.178149051	0	0
Zm00001d038099	0	0.044264704	0	0	0	0	0	0	0.173371959	0	0	0.116794647	0	0	0
Zm00001d038100	14.49411849	14.09539571	13.65458611	13.74488581	11.58300683	13.90546462	10.49073975	8.74514669	10.59638041	4.844821136	6.018566257	3.929112836	9.741791328	8.666140794	8.667280093
Zm00001d038101	2.253906133	2.445347541	2.262636896	4.038418617	4.510103096	4.061767424	4.596200016	4.317534736	4.718432872	0.708795449	1.872240822	0.346050772	2.72141278	2.643878292	3.390288436
Zm00001d038104	18.1668519	20.30850322	17.33437175	14.15324164	11.96874627	14.0605897	14.18999797	11.90721362	15.52505431	8.443937213	10.82990832	8.654499274	12.48076847	12.7674879	11.1662639
Zm00001d038105	0.236197844	0.397733948	0.347789826	0.896534755	1.982369917	1.20782474	2.354975963	2.361989544	2.289217995	0.516960241	0.634556518	0.224677076	2.927553463	2.842583205	3.739966799
Zm00001d038106	2.333980967	2.52204613	2.363366119	3.485169861	2.928304615	3.343985405	3.383115188	3.702685179	3.761757211	2.452315692	2.879004095	3.398091352	3.009511014	3.062233012	2.870025795
Zm00001d038107	12.92629981	14.57126436	10.52052617	8.118625785	8.101587811	8.549144225	8.559479199	8.730435648	9.037465122	9.764067633	10.31189423	12.62187332	6.697259857	7.210409266	6.1853085
Zm00001d038108	14.48164212	14.36763259	11.47306762	18.14876331	17.17816196	19.47949968	20.9052151	17.22789348	17.09942384	8.115375969	12.71884339	5.005839626	10.30089206	8.855009731	9.023163333
Zm00001d038109	0.218934351	0.163406593	0.206588565	1.916374373	1.485128132	2.29977704	1.587061203	1.04616275	1.230030859	0.100648855	0.11759101	0.026947282	1.637834062	1.591134472	1.8515112
Zm00001d038112	0	0	0	0	0	0	0	0	0	0.24192315	0	0	0	0	0
Zm00001d038113	0.213655288	0.190754165	0.178141333	0.924183294	0.741222971	0.821718055	0.461389949	0.280446701	0.453613754	0.011189843	0.126186942	0.011983678	1.216620573	1.307461332	1.1225097
Zm00001d038114	1.934802753	2.12579873	2.271559317	3.362800745	4.127836395	2.925172128	4.223398627	4.387897098	4.889065746	3.923133355	4.94199069	3.990161382	3.468776862	3.231138475	3.964541239
Zm00001d038115	3.399724837	2.270049358	2.779334682	3.202545137	13.13708923	3.692489448	8.917170889	12.75578279	12.41486173	10.17565248	14.5717903	7.592218496	2.988208791	2.643189894	2.808528335
Zm00001d038116	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.064844357
Zm00001d038117	8.789936961	7.554567739	8.372204228	6.918909519	10.94122236	8.49593659	10.03952203	11.01131606	9.574232293	8.32198503	10.17583575	6.923711808	7.437634856	6.891203502	8.579702994
Zm00001d038118	5.251506025	5.119499937	4.652804609	9.948049941	7.637767699	9.591436696	7.671969011	8.954638486	8.763148315	2.444672187	3.738301485	1.760448668	7.28448084	7.186335015	9.834465781
Zm00001d038119	0	0	0	0	0	0	0	0	0.234172542	0	0	0	0	0.832604817	0.219525168
Zm00001d038120	0	0.029159983	0	0.014437062	0	0	0	0.013957998	0	0	0	0	0	0	0
Zm00001d038121	1.546970586	1.53004382	1.385908606	9.285566314	6.902914748	7.674020971	6.287908747	5.315516867	7.262681339	0.196336885	0.640286536	0.226035411	8.305078723	8.630074639	7.62585171
Zm00001d038122	0.315039153	0.249149079	0.245845414	5.144290271	3.398112234	3.330079326	2.157373479	1.6784755	2.358290676	0.242506566	0.452708127	0.016231911	1.41835429	1.389459485	1.482324283
Zm00001d038123	12.3903984	13.45762672	12.13976898	18.65597977	23.30786933	19.72235086	22.85945603	23.47482066	25.03290613	14.34570429	17.23136366	13.27746269	18.51215043	18.56363875	17.69190996
Zm00001d038125	0.256190073	0.479119543	0.347338666	1.510406872	0.20458667	0.770403011	0.254000815	0.131051418	0.172338225	0.074948437	0	0	3.466281288	2.893549959	2.584936897
Zm00001d038126	16.67485288	21.09211198	11.08021449	15.96502394	12.25005051	19.97629709	29.73520217	23.3828358	17.2279126	15.99459771	20.0054575	17.93030329	76.46607296	75.62694003	75.68048813
Zm00001d038127	10.58202062	12.15766814	9.624219856	7.402676331	10.30308745	7.005301438	10.30098182	9.610009312	9.271683925	12.41212609	16.50086242	12.90007481	8.403428733	7.589807287	7.201178309
Zm00001d038128	3.760711556	3.825739713	3.646904636	5.121478733	4.992530533	5.092159837	5.043253888	4.857313882	4.720016263	2.123266929	2.9875723	1.646487782	3.793474757	3.996867631	3.85005978
Zm00001d038129	0.010606078	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038130	1.859563304	2.339416068	2.278972543	3.918962222	3.051465587	3.372503149	3.231685371	2.865046195	2.580026944	0.694591184	0.773514075	0.300407893	4.417119054	4.501728561	4.026102633
Zm00001d038131	0	0.005596025	0	0	0.005854357	0.010886664	0.015575077	0	0.010959001	0.006127685	0.044822527	0	0.019887617	0.019482466	0.077051408
Zm00001d038133	23.56980493	27.34962038	22.87857529	29.67474923	15.30685606	23.98725891	13.74883508	13.54182641	10.61070336	2.601562068	3.383598194	1.16548222	64.91433813	57.16992253	58.60242344
Zm00001d038134	4.149134751	4.069787077	4.445307656	4.032635576	4.602799871	4.271554549	4.23097839	4.25446581	5.057312516	4.747873273	5.423715245	5.634945239	3.022270252	3.095826056	3.438037692
Zm00001d038135	0	0.009513243	0.018774199	0.037679933	0	0	0	0	0.027945452	0.031251191	0	0.008367057	0	0.008280048	0.008732493
Zm00001d038136	2.654608528	3.320430718	3.646135418	8.550771506	13.52094606	7.60355647	12.51460276	14.3376168	13.2873906	3.616956606	4.669250233	1.744112536	17.91574389	18.77500168	26.99740649
Zm00001d038137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038138	0	0	0	0	0	0	0	0	0	0.09172647	0	0	0	0	0
Zm00001d038139	27.71912429	28.34101852	29.5255883	31.96036947	34.70424566	30.37062021	29.04812188	32.86786758	31.74232696	8.927211087	16.21954606	5.748680179	22.30778325	20.82871396	20.17660296
Zm00001d038141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038142	1.590691204	1.554200088	1.546479043	5.467848777	5.782360436	5.376390109	5.956636714	5.921579226	5.378863707	4.971145475	4.825174477	3.73095585	5.131233842	4.544718828	4.841009491
Zm00001d038143	4.886708218	5.000228797	4.297001707	13.33226061	12.32627128	9.833703767	10.75391611	9.861045894	9.569669862	2.767506951	3.094801456	1.75911402	19.42608877	19.02242641	22.91592394
Zm00001d038144	0.05324726	0.184429082	0.033087926	0.498057543	0.385885919	0.163087947	0.295542261	0.272867318	0.410428992	4.84682548	3.995216913	4.217420194	0.17875618	0.087557274	0.169293021
Zm00001d038146	3.091071631	3.759988228	3.637097481	11.05212181	14.08029417	11.89660675	20.46295311	18.74901668	15.87767138	8.263600946	8.61993229	6.538431806	40.16395393	37.94908535	38.08233228
Zm00001d038147	94.41465705	92.74913863	103.6573513	97.94331616	157.7564508	97.16817534	142.2486058	156.2274072	145.8381161	169.6504246	167.2492482	154.9179538	87.39841236	85.77944773	100.797034
Zm00001d038148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038150	6.580016006	7.220191859	6.027077118	7.060768213	7.578715001	7.364795354	6.589899745	6.434221442	7.12716141	1.990677772	3.254235586	1.347579638	4.019654942	4.042653501	4.367852885
Zm00001d038151	1.089961702	1.189769357	1.586826059	0.051784874	2.571454055	0.165329323	2.15908958	2.866307316	3.315755168	8.489709258	3.678361387	1.989351894	0.058081054	0.091036518	0.024002752
Zm00001d038152	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038155	32.16874029	34.58324719	40.54098075	30.61116999	21.44687677	24.59366238	32.83716484	30.48801833	24.29466014	20.45927448	6.825628522	26.76357815	63.32437679	71.89911467	65.19063839
Zm00001d038156	11.43727322	13.03870304	10.30477577	8.691873242	7.859866439	9.941899031	9.621856387	7.549516765	10.47267322	29.73582715	21.53763321	41.89439927	8.403190115	8.082628818	7.551860251
Zm00001d038158	9.215675011	10.93944445	12.6448565	13.7723732	14.93723235	12.89351508	11.17711364	13.85940574	12.81225213	2.333525431	5.149200477	1.499442823	6.159812109	7.184307898	9.754742102
Zm00001d038160	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038161	443.7989527	490.9158791	410.4976681	213.9163796	108.0713101	162.3445099	161.5000423	126.5715886	130.3998178	24.58686971	50.54234757	14.12016347	358.9182409	297.1103546	282.6884537
Zm00001d038163	795.4006462	771.2505193	1014.798295	1602.224201	1114.714586	2340.63772	2038.569785	1602.419885	2075.313761	1310.104308	1321.138945	2901.698125	5058.533881	5842.936299	4705.065325
Zm00001d038164	0.054122066	0.136333885	0.215241802	0.39149242	0.199678534	0.092829711	3.351806644	4.515915355	2.976939294	1.836224002	0.682496618	0.443659369	0.193805856	0.533974585	0.237775478
Zm00001d038165	32.61655395	39.46935397	30.58316956	31.38639071	37.6059909	34.1897422	45.51362949	53.95993186	47.88978862	51.60876224	63.43953838	49.76107354	25.84612785	22.19159186	27.86318155
Zm00001d038166	3.514264823	3.026932112	4.009354278	5.64667306	5.402319376	5.581145696	3.976055983	4.299058791	4.374193385	0.237208692	0.627223907	0.24717099	1.841443934	1.747875599	2.434557248
Zm00001d038167	14.97296789	13.48997229	15.78670646	5.685906964	12.53311262	7.135812717	19.9650088	21.76991565	17.9282	58.53531765	46.47433822	65.74186864	6.307772282	6.165995458	8.966893384
Zm00001d038170	15.64409509	24.20520144	29.01593921	64.9921813	13.5071265	27.07918064	22.43311947	29.07780552	17.55733678	1.791145757	8.438657427	1.998749672	113.9847348	132.5616755	135.2606151
Zm00001d038171	7.25281424	6.342283765	6.773054576	7.197020067	9.648907253	7.41308153	8.624911967	7.612512469	8.908751032	8.940579503	8.770771908	10.55516872	5.863464648	6.166179589	5.572172757
Zm00001d038172	42.96902478	42.83546744	33.30406377	18.74252751	18.61220638	19.09885407	21.25608433	19.89207329	20.41171959	23.22414969	26.01811528	32.38966423	13.05069718	13.5344647	13.724312
Zm00001d038173	19.84915368	19.02463464	15.09871795	43.35351305	82.29898038	42.1353843	85.90144755	107.9059666	90.53591461	24.66422858	42.64303801	8.791922206	62.76540139	62.88011598	82.71993105
Zm00001d038174	0.273218476	0.194784725	0.083287499	0.565767327	0.624915076	0.214732463	0.740914383	1.000749545	0.565828675	0.234619616	0.565561168	0.485396555	0.363427087	0.254302376	0.357597558
Zm00001d038175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038176	0.170040223	0.314110559	0.295857085	1.541018671	1.628118027	2.222107083	0.741783474	0.546746143	0.54523756	0	0.200131098	0	0.317134116	0.086988563	0.353861464
Zm00001d038177	0.085982603	0.018049234	0	1.429783638	2.889014694	1.825901197	3.298787085	6.721624876	3.958841458	0.177876278	0	0.126996835	0.224507019	0.125676199	0.281654932
Zm00001d038178	0	0.398587262	0.393302078	1.531357851	2.818834926	1.333727189	4.097249847	3.067929297	2.841293505	0.715787319	0.399070939	0.238383641	0.014165324	0.055506988	0.087810067
Zm00001d038179	0	0	0	0	0	0	0	0	0	0	0	0	0.146960132	0.158362876	0.060733188
Zm00001d038180	0.057867657	0.036442264	0.125856665	0	0.266871946	0.106343696	0	0.017443806	0.017841717	0	0.182432429	0	0	0.015859139	0.083628635
Zm00001d038181	0.19741854	0.318582021	0.268354125	0.0769412	0.016257993	0.105815817	0.158594952	0.617420978	0.030433977	0.323323849	0.054458056	0	1.366928181	0.750696942	2.817371736
Zm00001d038183	0	0	0	0	0	0	0	0	0	0.063200733	0	0	0	0	0
Zm00001d038184	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038185	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.030049072
Zm00001d038186	39.56355008	29.89324879	30.67716941	10.83721281	4.327371893	8.047107993	1.681212042	2.022835643	1.690250392	0.854901214	0.889244263	0.781157318	10.80889632	10.26140412	9.267176419
Zm00001d038187	0	0	0	0	0.019153489	0.035617506	0	0	0	0	0	0	0	0	0
Zm00001d038189	9.944817534	10.04696062	10.30805463	10.36979702	7.890688548	9.140182227	5.178350791	4.734830335	5.606411442	1.64047956	3.667298075	1.969351833	7.100895964	6.788666802	7.459606692
Zm00001d038190	23.60471367	24.00839266	20.01150286	14.97184949	11.00291779	12.85536761	11.57360636	11.2900562	10.6125666	10.77212901	12.18416339	11.70430209	10.20638606	10.02007021	9.712089492
Zm00001d038191	25.624464	28.36820676	21.78566806	35.80717254	29.77370077	41.27528409	35.4032329	35.28608777	40.13103876	16.48547496	27.02564501	18.28937	13.7996503	11.90651489	14.79585603
Zm00001d038192	0.271039531	0.382340327	0.242531083	2.055214768	1.885669338	2.045492743	2.571682712	2.536060958	2.166049584	0.687807084	1.203099194	1.164951732	1.941132402	1.996666904	2.657281648
Zm00001d038193	2.169332707	2.715842846	2.653876552	8.123004366	9.727551213	7.966791703	6.585769137	6.027805761	6.712618282	0.864077242	2.1891369	0.488714714	5.874619732	5.397225189	6.256530154
Zm00001d038194	8.64591195	9.586293324	9.360647933	4.132606233	3.241154819	3.038504268	3.881469676	4.125388676	3.19157152	1.530820442	3.066004169	1.659688111	2.500090137	2.161677338	2.103524431
Zm00001d038195	12.37127507	11.4975054	12.46699023	12.17740607	17.50950642	13.26304758	11.98323744	14.54249429	15.40862746	15.0998449	27.73131941	11.96029419	13.16499606	12.97596793	11.2385753
Zm00001d038196	0.21242316	0.17668248	0.278943532	0.359898045	0.776322744	0.235695791	1.582965373	2.165057024	1.823950773	0.685431193	0.818779848	0.506144376	0.282558966	0.23725942	0.361434577
Zm00001d038197	0	0	0.167868099	0	0	0	0	0	0	0.332655002	0.364993604	0.138939197	0	0	0
Zm00001d038198	0.963876586	0.853598058	1.417837201	3.676751039	4.713071747	3.215132222	2.820124066	2.950938459	2.837157381	0.046734775	0.109203218	0.054221108	0.787890058	0.623249764	1.062136641
Zm00001d038199	0.12105579	0.121976173	0.090269096	0.13084546	0.808177734	0.88985944	2.810213347	1.965671805	1.781591332	0	0.020354031	0	4.894813437	7.581913755	9.57305973
Zm00001d038200	3.532323649	3.650731797	3.764708399	5.120857351	8.131268336	5.670748681	8.437549824	8.83707059	8.623764634	9.229635255	10.07536851	8.216857723	4.349406431	3.99902755	4.170664681
Zm00001d038201	7.415608702	6.209264836	13.59251981	0.516671815	3.711946153	1.522648376	8.277870055	10.98959748	8.838949024	2.056896598	4.806265277	1.239085024	7.602915631	8.537983938	6.992874431
Zm00001d038202	0.174155846	0	0.036073566	0	0	0	0	0	0	0	0	0	0.194885984	0	0
Zm00001d038203	12.17651235	9.872209301	18.66706053	7.047403553	9.895611744	7.235625082	10.26649521	10.85772231	11.33020425	32.12872487	31.99718866	21.64635645	10.03584863	8.35269152	11.21158936
Zm00001d038204	11.87303559	11.91883639	11.3883274	10.62947528	7.838461809	9.335252025	10.15097747	9.737179392	8.344137266	4.507053708	6.165969584	3.479112605	10.41495864	9.185656382	9.459754791
Zm00001d038205	0.418507161	0.234271697	0.189885784	3.280790707	5.73327303	3.165895238	12.49732142	13.11222382	13.21470471	0.659646139	1.407335884	0.529832275	6.355811483	5.614620819	10.23000081
Zm00001d038206	0.239472762	0.180970098	0.158729309	2.449012335	2.888948543	2.125425098	0.957619654	1.110081957	0.774437491	0	0.355668674	0.005895046	1.071910842	1.382597177	1.451993635
Zm00001d038207	12.52968589	14.14538362	13.13377226	5.055375371	4.881755066	5.326224019	4.936224617	5.093678434	4.341558921	9.861105109	8.163075879	11.33556283	3.855234536	3.274634744	4.631102936
Zm00001d038208	31.70867344	33.70170075	33.818213	25.29257313	28.63983092	26.93599522	26.22047845	24.79851579	24.7609877	18.37775488	25.75449229	13.71715416	19.39685234	19.17170672	19.00559252
Zm00001d038209	10.23508956	10.69719256	11.18885331	6.155989449	13.61186515	5.73280381	13.75944245	18.33712209	11.64128991	10.35804868	6.08112176	6.097559856	23.74804382	27.64614266	28.4318068
Zm00001d038211	0	0	0	0.141747256	0.010697064	0.129298526	0.066403717	0.019577668	0.010012128	0	0	0.008993095	0	0.026698729	0.009385874
Zm00001d038212	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038213	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038216	0.024369401	0	0	0	0.38532313	0	0.683415484	1.17535802	0.21037961	1.109110911	1.813105188	1.646714302	0	0	0
Zm00001d038217	0.868441186	0.952850649	0.767750382	1.610666016	1.067618859	1.420440479	0.564925472	0.545161761	0.441661375	0.126563573	0.141125283	0.079341834	1.427664269	1.25872182	1.371493189
Zm00001d038218	2.420707524	1.488148731	2.91534336	4.161909091	24.84119901	7.188286895	21.49060063	26.5960305	19.76763758	31.46985314	23.47586956	26.24088155	7.275195663	5.73065187	12.80057546
Zm00001d038219	0	0	0	0.921630805	3.651457364	0.452679247	7.555666124	3.564193778	1.367061324	13.50417474	7.688047718	25.99101769	0.826948635	0.202525496	0
Zm00001d038220	0.229126825	0	0.126559775	0.15875391	0.134181425	0.187141141	0.624714294	0.644641193	0.251179486	15.58951426	6.292390052	12.38059504	0	0.223268331	0.618104383
Zm00001d038221	4.175163768	4.659394503	5.550922506	6.369594716	5.898002676	7.708407403	12.16265995	8.008044757	9.172644896	443.464764	232.248403	374.2101308	5.302338264	5.385912407	11.51758749
Zm00001d038222	1.68425338	1.99377544	1.788489448	3.941813155	4.480639508	2.94497411	5.412137742	5.28271879	5.633287527	18.37708137	18.3690253	20.91281382	2.779385646	2.734449503	3.019433885
Zm00001d038223	0.008478285	0.181533324	0.010536837	0	0	0.005193529	0	0	0.031368229	0	0	0	0.037949891	0	0
Zm00001d038224	33.98828081	40.83528836	32.04102977	41.6418893	41.76932115	34.69697025	62.79978921	70.86936555	56.39702694	212.9414873	142.914904	251.4783172	83.72022158	76.05390763	91.67000117
Zm00001d038225	18.28461556	15.98239505	16.09191655	10.23668501	17.21401329	10.85136823	16.16604156	18.75656976	16.79532484	34.04071217	27.33749955	42.87787014	8.405342196	8.344050432	9.690976666
Zm00001d038226	103.3391115	112.3516357	101.6480415	32.34725431	35.20618522	27.91522023	47.73906498	55.85011855	46.72266472	45.01095797	44.15749725	26.09453241	55.0164264	42.2143069	48.76735216
Zm00001d038227	53.60521891	47.92939353	50.18033945	62.1846821	92.47965845	72.43047993	84.35349271	70.8501223	83.02800346	30.48385037	41.51770797	23.6931987	79.50465071	84.8930494	68.24788001
Zm00001d038228	0.888154408	0.978804543	0.827850684	1.928528496	1.410597798	2.08878388	1.417720448	1.472504071	1.056221394	3.127898636	3.809970073	2.872511492	1.473062214	1.399587447	2.08115971
Zm00001d038229	14.71635919	13.74007339	9.246822492	15.89569897	8.892169343	9.414146348	15.1257921	13.41795048	11.45305763	42.22615781	30.58240266	49.87664293	26.81005405	27.21863041	24.70125636
Zm00001d038230	0	0	0	0.023582531	0	0.023166158	0	0	0	0	0.023844903	0	0	0.020728751	0
Zm00001d038232	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038235	0	0	0	0	0.038409075	0.071424871	0	0	0	0	0	0	0.032619509	0	0
Zm00001d038236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038237	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038239	0.009520358	0	0	0.071240264	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038240	0	0	0	0	0	0	0	0.002739637	0.002802131	0	0	0	0.010170218	0	0.002626859
Zm00001d038241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038242	1.821579245	3.07481602	1.937120783	1.803383353	0.866050785	1.518465276	1.82130696	2.626634563	1.111676241	1.269078831	0.118405663	0	2.164492615	1.729256158	3.560649972
Zm00001d038244	0	0	0	0	0	0	0	0	0	0.008999945	0	0.014457635	0	0	0
Zm00001d038245	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038247	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038248	48.26256456	43.84963917	44.85606924	30.51630517	32.46590468	30.69745266	42.17870843	35.40533798	35.45551513	28.82088985	37.06140605	26.65594352	17.67860698	16.46645732	17.82646636
Zm00001d038249	0.166722365	0	0.069067682	0	0.036613529	0	0.324691808	0.03350487	0	0	0	0.030781245	0	0	0
Zm00001d038250	0.291497525	0.159094958	0.277743386	2.132785999	0.665757306	3.142694303	2.179935106	0.410059608	1.258240522	1.634894122	1.016992722	1.291630918	0.67413652	0.436718091	1.190771911
Zm00001d038251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038253	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038255	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038257	0.642656418	0.615761282	0.60514643	1.82671611	1.919573155	2.026318942	1.757577591	1.580695528	1.614321683	0.576385829	0.536959012	0.257683628	1.954508302	1.607821731	1.741260335
Zm00001d038258	1.274303737	1.565360883	0.87983802	1.530394996	1.077929263	1.676840617	1.636088019	1.517550861	2.289447541	0.325458323	0.535645965	0.104564137	1.197124721	0.896798744	1.182252917
Zm00001d038260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038262	0.966475406	1.519754825	0.939071902	0.891225675	3.040899483	1.471110577	5.188057586	6.165757457	7.81618581	64.04521514	64.29863803	38.02963467	1.625552844	2.221706426	5.553027376
Zm00001d038263	0.473639841	1.038440859	0.792121824	2.136740709	2.450131015	2.980170645	1.462196367	1.81201447	1.507197778	0.887098975	0.589901269	0.382171933	2.277115189	1.865348173	3.346397337
Zm00001d038264	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038266	6.534982297	6.639218847	8.520655702	6.698054066	7.163915283	7.11042173	4.956784107	4.816908923	4.936214037	0.432193611	1.153393847	0.237071802	2.936546075	2.689595954	3.310796266
Zm00001d038267	70.09199819	72.22711484	65.64783951	25.83598495	27.88057467	29.2915777	27.80421111	37.10898835	32.72078383	5.731605597	8.100659261	3.424677381	13.12924658	11.00056929	11.14756532
Zm00001d038268	5.848868994	4.089254739	9.553531819	6.331786023	7.727713688	3.509713369	9.233418562	14.1719751	15.33925561	12.84063796	18.23331429	14.61546544	2.226215039	1.88426515	2.373631847
Zm00001d038269	0.006894218	0.034733171	0.034272617	0.249346912	0.08175729	0.388532566	0.177229659	0.290950009	0.187054617	0.142623945	0.130407448	0.053459711	0.501465322	0.340095765	0.286943638
Zm00001d038270	1.948953974	2.095049579	1.889821618	6.437218187	5.28657298	9.944523884	4.67983474	3.796145554	2.29794799	3.377141369	1.242350555	0.529855331	6.966232573	9.172131181	8.12162876
Zm00001d038271	0.006009334	0.007568778	0.02987367	0.389718169	0.316727144	0.515357912	0.056175251	0.021737665	0.207512898	0.033151447	0.015155925	0	0.14794202	0.065876425	0.145899804
Zm00001d038272	15.25135537	13.79996175	10.20733785	12.26428393	19.19596799	16.00456868	14.52749778	15.87024429	14.86172764	11.13571772	23.95479913	12.41941133	13.79589795	13.85113195	12.91499462
Zm00001d038273	13.40130247	12.49258585	11.4389237	14.29758729	14.75699574	17.62452232	11.85588944	11.07256192	11.46874301	6.985724123	10.31855619	6.449403704	9.754824402	8.337652414	8.756530031
Zm00001d038274	57.4666911	56.52262623	55.8586062	155.2602347	89.87159873	152.4194	32.85542597	24.44394008	23.13586164	4.319294755	4.92680172	2.589846969	89.01419548	81.92420233	74.53376309
Zm00001d038275	0.018147656	0.030476053	0.06766188	0.181063751	0.390565912	0.229744733	0.282740477	0.094821748	0.313335295	0.016685739	0.11442388	0.026804199	0.216616634	0.285148729	0.447598218
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Zm00001d038299	0.112289396	0.028285782	0.153508951	0.413125266	0.177549303	0.488373052	0.275541335	0.297869993	0.297740529	0.046459677	0.014160053	0.006219455	1.294251026	0.990919408	2.200480612
Zm00001d038300	0.287885925	0.067459235	0.399388437	0.192044029	1.358537647	0.246069522	1.462925813	1.501516992	2.856859136	6.426542751	4.398613833	5.013514114	0.134854993	0.366965884	0.05418251
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Zm00001d038302	0.891790433	1.11667036	1.054517844	3.321489713	2.302214191	3.163135657	2.996673023	3.027533189	3.333644116	2.519557212	2.585433776	2.957900243	2.447380409	2.152644651	2.476477458
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Zm00001d038306	2.920320289	3.743254285	3.597264221	3.674327726	4.563056235	3.561960993	2.279962551	2.929174376	2.246993991	2.744472935	6.403843837	3.435396412	5.407993955	5.524466742	6.767516888
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Zm00001d038311	5.611168439	6.624743799	5.46506102	6.015363675	6.453562237	5.035175237	7.775913623	6.188067742	6.906995713	3.025004992	4.189125973	1.379977869	4.491863905	4.377011302	4.690042366
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Zm00001d038318	10.89856272	11.05951712	10.4353304	13.88083138	16.31660701	14.62539995	12.48496519	12.7937026	13.45710542	3.468672641	6.651471227	2.399108517	9.107791991	8.773862446	8.57683638
Zm00001d038319	0.432795115	0.376765166	0.38758931	1.381159013	1.702426832	0.982490991	0.803204092	0.882544491	0.894826919	0.166779713	0.545768525	0.310219921	0.925889882	0.341879631	0.927156574
Zm00001d038320	1.159613591	0.922444806	2.149114925	0	0.026806334	0.124621519	0.713162364	1.12839617	1.580664656	2.27268709	5.130912077	3.11000507	0	0	0
Zm00001d038321	0.938371525	0.922444806	0.720585592	1.636511842	1.729008532	1.560884524	0.837965777	0.487540737	0.6209754	1.273125638	1.587375924	0.878914476	2.253804203	2.366790701	2.866567479
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Zm00001d038326	2.81997984	2.46303998	3.156853038	6.799743834	6.227127324	6.922743134	5.973487877	5.659970199	5.360906715	1.143312569	2.296265974	1.126311198	5.621493532	5.592411725	6.819558719
Zm00001d038327	89.07728148	86.91314136	113.1793737	115.9894267	154.4018808	113.7382926	133.6136008	193.1124516	166.0981812	282.079763	262.5723763	208.3767656	125.2501085	110.30288	145.2089064
Zm00001d038328	4.518662142	4.318350676	3.712042202	3.994542787	4.131734522	4.053442937	6.604279272	6.091178373	7.177672171	10.64933469	10.89375356	10.29306667	4.261239883	4.211278314	3.864013066
Zm00001d038329	1.527598373	1.39928422	1.706735698	5.927147094	8.783279836	6.918941717	9.429841675	7.832879019	7.364541421	4.61795728	7.452447104	3.640802873	5.439100643	4.144229392	5.690805926
Zm00001d038330	13.95334586	11.94555449	14.50299157	18.00515811	20.78703434	16.74913214	18.69573941	19.72404173	21.52699929	12.49993063	22.19216109	12.37145924	12.62268156	11.61446902	12.6684645
Zm00001d038331	9.73274368	9.786562864	8.876950801	14.41938195	16.58893215	15.03169183	13.50996953	16.96733752	16.21827798	16.36913398	18.21634128	13.69500874	10.1442532	8.63502261	10.4034349
Zm00001d038332	3.124614125	1.867498553	2.602734338	6.153523323	9.029003969	7.389323001	5.84373631	8.898745756	6.994182823	6.215642397	6.72904028	4.25935477	6.580626177	5.67518136	5.714110981
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Zm00001d038334	18.38116686	18.59000993	20.94803307	31.19806948	27.60242312	30.87825896	9.639987813	7.864968983	9.106742577	3.351322906	2.577873168	0.636158595	7.467035095	6.323620532	6.466014028
Zm00001d038335	0.251617802	0.105637851	0.06949141	0	0.589410432	0.34251804	0.098005135	0.404525061	0	1.773670209	2.185831501	1.486564173	0	0.09194409	0.16161362
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Zm00001d038381	129.7167841	139.1180645	143.2192512	110.8868119	101.2294429	123.0200753	103.7958124	87.11743478	101.5227301	202.7619476	237.2892856	182.5181904	109.7978316	101.7370244	112.3933127
Zm00001d038382	0	0	0	0	0	0	0.028174316	0	0	0	0	0	0	0	0
Zm00001d038383	1.485875251	1.361742203	2.602932298	4.929370637	8.87458782	5.877396411	7.383357008	7.134452385	5.745221924	0.18333402	1.307517819	0.12434878	2.723855875	2.069278436	2.834663789
Zm00001d038384	6.05740826	3.152395993	6.717841519	15.65992526	21.06235509	12.62626884	15.43415016	15.0895627	14.94092868	0.638165355	2.413581041	0.605774901	5.295651835	4.841917241	6.832974141
Zm00001d038385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038387	0.261511382	0.603853348	0.433342821	7.012131505	6.585299232	13.84784782	25.22700075	10.1428963	14.62072812	0.020037073	0.018320791	0	1.398167139	1.210418054	1.091793607
Zm00001d038388	0.956734602	1.014745913	1.126451918	0.219799612	1.06159006	0.277609925	1.279752131	1.745585236	1.630151395	15.57351039	11.06462764	7.418790219	0.648004869	0.565803273	1.469969631
Zm00001d038389	40.25064201	48.95364193	40.49872687	8.523189216	9.089046034	6.763714467	12.87365112	14.39131412	15.52568637	226.6024329	109.0631326	452.6742861	9.127420273	8.551556876	11.18392128
Zm00001d038391	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038392	15.79057368	16.80541367	17.02774725	6.663712685	10.97350637	8.106384913	11.80091667	13.66501259	12.13606866	6.284961829	7.879646984	2.722459979	7.749483714	6.969883989	6.234898211
Zm00001d038393	12.10093065	12.39244032	12.15618903	8.549778817	6.064825516	9.826306799	5.419271224	3.941122359	4.906353037	3.00384205	3.706878191	2.694470021	4.105860777	3.978804702	3.69788384
Zm00001d038394	0	0	0	0	0	0	0.04643848	0	0.057181667	32.19215913	16.45471571	43.18787627	0	0	0.015315709
Zm00001d038395	0.022320382	0	0.034674795	0.048714771	0.036762972	0.041018283	0	0.006728325	0.089463469	1.008159183	0.457384162	1.464986239	0	0.006117097	0.038708111
Zm00001d038396	6.069134677	6.335847728	5.285217717	5.65105649	4.978687398	5.978539549	5.291719708	4.76168832	5.464398423	5.034659274	5.125450655	5.036080565	4.087848858	4.546398186	3.788289698
Zm00001d038397	2.863263396	1.14032912	1.547161816	2.766418293	3.459614792	2.814630649	3.14736026	3.602550168	2.889161887	0.655550654	1.155984297	0.476395824	1.874325631	1.426731764	2.643024866
Zm00001d038400	8.791921182	7.254139827	8.473193403	7.024390794	11.47067666	8.277948446	9.001080439	10.87098999	9.656937473	6.343437469	9.457223815	5.737614894	4.082270252	4.601481774	4.658802813
Zm00001d038401	43.65793219	42.09081485	47.12632895	19.99711283	5.930487681	5.651970515	3.418483627	1.492414473	2.15091816	27.31242671	18.3749997	25.30294338	54.39484354	53.28670826	47.15725823
Zm00001d038403	331.5816735	250.8138816	363.4560686	248.3551201	251.4314974	228.3730874	19.18670893	32.53269731	7.315104156	89.48588508	58.65202606	62.8211008	113.241646	98.24736836	119.8398344
Zm00001d038404	3.96802386	4.06015479	4.553365418	5.893287887	6.20932169	4.893094	4.455103675	4.901610241	4.718044503	0.865967752	2.277425293	0.566479843	2.339692977	2.057858496	2.237659947
Zm00001d038405	3.786048021	3.435548626	5.546030128	5.524636053	4.298597799	4.98597469	3.671790136	5.13081766	4.992192283	0.481529398	1.389645908	0.688929955	2.588421824	1.98549337	2.44718878
Zm00001d038406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038407	0.001944699	0.009797422	0	0.021828098	0.081997639	0.038120358	0.090895232	0.096139437	0.035975298	0.002682061	0.004904656	0.028005241	0.091399586	0.044768794	0.119161883
Zm00001d038408	3.301731966	2.187567221	2.671485811	1.73718712	2.923003103	1.264085444	2.572049219	4.686130248	3.202419965	8.917530745	6.744148282	2.7240821	2.059050091	1.526965815	2.008033986
Zm00001d038409	0.499340124	0.504689478	0.375413425	0.945665518	2.103827802	1.39471204	1.846482732	1.744328114	1.733432937	0.107693619	0.116608133	0.056908058	1.257824547	1.39213828	1.501468996
Zm00001d038411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038412	6.91131593	5.396421294	7.131180795	6.674678909	43.55842226	12.57576034	28.67686677	37.42304791	25.7107447	29.70218671	39.11902827	17.50910842	9.190989188	8.18220946	9.451980639
Zm00001d038413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038414	0	0	0	0	0	0	0	0	0	0.0463265	0	0	0	0	0
Zm00001d038415	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038418	0	0	0	0	0	0	0	0	0	0.174987336	0	0	0	0	0
Zm00001d038419	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038420	3.707453267	2.140210925	4.319656718	1.123834173	12.07708635	3.280432659	11.46217114	14.09400355	12.76438803	3.728367186	6.558291234	2.994649932	2.564163705	3.330419266	2.649185074
Zm00001d038421	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038422	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038423	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038424	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038425	0	0.014986048	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038426	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038427	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038428	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038429	0	0	0	0	0	0	0	0	0	0	0	0.012252729	0	0	0
Zm00001d038430	0.047634961	0.05999641	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038431	4.077385555	3.572962257	4.16286337	4.847900694	5.427042016	6.342986519	6.165726541	4.367916241	6.07913618	4.266017648	4.860119113	4.470933931	3.739028492	2.611145414	2.715578117
Zm00001d038432	7.802557629	8.197901246	7.639336027	5.989922394	8.46152212	7.399346925	8.161696543	6.80956304	7.411311211	12.67007627	16.16210889	13.95257463	4.564436146	4.250999733	3.30530956
Zm00001d038434	0	0	0	0	0	0	0	0	0	0.056791824	0	0	0	0	0
Zm00001d038435	0	0	0.102122613	0	0.040602231	0.100670967	0.012002131	0.012384971	0.126674853	0	0	0.045512765	0.080458188	0.02251974	0.035625422
Zm00001d038436	0.362752476	0.456888085	0.619891036	0.311031291	0.209116077	0.19443437	0	0	0.083882701	1.500886407	0.200131098	1.130177053	0.101482917	0	0.157271762
Zm00001d038437	0.113548454	0.057205879	0	0.169935248	0.149616747	0.166934872	0.066340685	0.054765436	0	0.125281631	0.057275298	0	0.07623862	0	0
Zm00001d038438	0	0	0	0.011840396	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038439	0.114643471	0.216590814	0	0.011914864	0	0	0.044653632	0.011519494	0	0.184464288	0.024094849	0	0	0	0
Zm00001d038440	9.559437637	9.971900953	9.471193942	7.180088224	6.899015044	7.205000835	6.384604757	6.038254766	5.364314752	2.606252045	3.705995675	2.248556739	3.088148626	3.043095202	3.04363588
Zm00001d038441	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038442	0	0	0.022836895	0.13750137	0.266333897	0.022512274	0.12882933	0.110782233	0.022661859	0	0.092687444	0.020355339	0	0.302154974	0.212443711
Zm00001d038443	0	0	0	0	0	0	0	0	0	3.130113369	0	0	0	0	0
Zm00001d038444	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038445	1.856393099	1.555453536	2.835033619	0.981022433	0.849905765	0.770961203	0.716937446	0.644959116	0.679073423	0.162729161	0.119032437	0.104564137	0.202454916	0.094853713	0.572937952
Zm00001d038446	0.065101114	0.040997547	0.121361784	0.16238257	0.021445067	0.159515544	0.095088315	0.078497125	0	0	0.020523648	0	0	0	0.018816443
Zm00001d038447	3.907159135	2.995022137	3.211878981	2.755871978	5.913945003	2.800889546	3.609526917	4.305488276	4.469709452	5.9158785	6.305856508	4.700853885	1.557234929	1.173469876	1.653068712
Zm00001d038448	0.927418103	1.044406782	1.288197707	2.503775945	4.054195918	2.071919777	3.212816369	1.815520095	2.260615374	4.890532947	2.834327297	1.65584919	1.782592388	1.25588436	1.702940646
Zm00001d038449	1.342043455	1.619739149	1.774004219	2.678646908	2.583954801	2.291401567	2.148060628	2.44820951	2.336241281	1.387254455	1.507310564	0.798005577	1.722728962	1.939169766	1.832289689
Zm00001d038450	1.184325349	0.032427438	0.575954229	0.032109548	6.106391976	0.157713109	2.045741831	1.893687702	1.333592779	4.189974552	1.688272991	1.140819022	0	0.14111946	0.089298373
Zm00001d038451	0.999724601	0.267570827	0.691118752	1.987108465	8.661141161	2.189328972	7.907106222	8.520956184	7.528625807	9.125833514	8.879948529	7.745225249	0.202768712	0.60961285	0.187820436
Zm00001d038452	9.497007639	9.046706344	4.436743338	2.955719106	3.681828943	3.255317218	3.300130893	3.002330472	4.159609059	2.512014524	2.653534015	3.693517811	0.877628402	1.268482573	1.015734004
Zm00001d038453	24.68960019	25.86464712	9.485279501	1.791887705	2.850351237	3.838753506	1.952868078	1.823899902	1.352349381	0.735552957	1.637888597	0.657011621	0.370437391	0.206646159	2.166089934
Zm00001d038456	0.086801485	0	4.638717076	6.946365509	15.04014036	7.763089815	8.807291058	8.216032404	6.458701719	0.818042651	1.769594565	0.705134805	2.136940282	2.23613865	5.368958385
Zm00001d038457	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038459	35.74249633	41.67900616	31.5293968	14.47185151	11.3758235	16.76615361	15.41636704	12.44705934	13.40951935	12.50477466	11.45469864	13.26056032	8.824651255	8.681428271	8.124572911
Zm00001d038460	20.28037458	22.91559621	14.6362018	19.65614507	16.42375777	22.39563521	19.07708461	16.76744148	17.18662223	17.33646303	15.7389332	17.42243774	12.91589774	10.09394908	11.61641182
Zm00001d038463	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038465	0.221449239	0.287119552	0.283312407	0.592978753	0.540673153	1.611874555	2.001611299	0.840319388	1.044237727	0	0	0	1.15887061	1.39230248	1.182235586
Zm00001d038466	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038470	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038471	10.58334228	9.080284075	8.725583327	1.572863984	4.248631831	2.476928243	6.092163211	4.891233117	5.331517495	150.1397586	69.41033447	144.9121294	3.273584111	2.793561382	3.645182527
Zm00001d038473	0.049668425	0.078196956	0.077160081	0.247777219	0.114529513	0.228189811	0.21764083	0.194638648	0.030627471	0.017125237	0.078291846	0.343877668	1.903634255	1.415655056	2.182092129
Zm00001d038475	1.209578546	0.9097114	1.239656935	3.100656688	2.846808533	3.046877538	1.61701689	1.39097195	1.546203285	0.094611549	0.225715149	0.009608265	1.724153086	1.914635716	1.91077299
Zm00001d038476	0	0	0.011914902	0.011956641	0	0	0	0.011559885	0	0	0	0.010620177	67.57753495	29.17503329	17.01397021
Zm00001d038477	16.54480538	22.55648474	18.46966598	39.05973101	33.42698606	36.16532353	45.58424811	30.41388603	30.78548572	5.244140124	14.89729275	11.80039217	38.48998184	35.66942673	34.69895898
Zm00001d038478	91.49379738	97.60188951	123.1753707	101.1478677	73.36077723	103.6504264	42.36804582	21.5279313	39.23238523	0.880501899	1.915540509	0.29264488	5.173422619	3.378686212	2.188888628
Zm00001d038479	2.712546413	2.835663663	3.640853519	10.48720767	4.431980526	11.16608809	6.307524906	4.480877545	4.014386427	0.037410487	0.64991553	0.150241791	0.212479858	0.23788709	0.501771812
Zm00001d038480	15.64065643	15.31645418	17.89364932	18.87441883	20.07978111	24.22182186	18.34313445	16.48439622	17.53248181	1.872303314	6.208762419	1.397942078	5.43472956	5.554580385	5.847045164
Zm00001d038481	0.038924741	0	0	0.048545248	0.119674465	0.18015517	0.09096712	0.114728477	0.042671112	0	0	0	0.106475196	0.180165041	0.08000411
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Zm00001d038484	0	0	0	4.446836498	6.33122984	9.881287159	16.57639985	31.81925296	15.82575269	7.652401222	5.674488202	4.562321427	11.1378563	13.06388311	13.5572865
Zm00001d038485	6.419309674	7.36885762	9.045049544	29.12157891	16.71105976	27.30500171	22.72874436	37.98402882	19.20749656	5.433980048	6.093481227	3.718153448	91.24224774	100.7764225	94.38364613
Zm00001d038486	0.39794202	0.4850414	0.686007455	2.145279591	1.167094917	1.462600271	0.86999112	0.758437009	0.918220219	0.106224707	0	0	6.004501214	7.078313624	6.826923523
Zm00001d038487	0.036371756	0.042947214	0.014125914	0.27216766	0.347457156	0.3063526	0.337346906	0.213798288	0.266335249	0.02821649	0.071665549	0.010072745	1.414365424	1.629767859	1.429724271
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Zm00001d038491	24.72496008	27.48832189	24.42618427	44.65574848	27.98817304	43.6214889	22.00669666	18.63979426	18.96375795	4.578504548	6.003475191	4.697887405	86.63735076	90.91111458	75.54946196
Zm00001d038492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038536	7.060935428	6.471122357	7.330628858	6.597409847	10.49894293	6.196088772	7.851583728	9.95362661	10.27625613	7.311562774	10.63420578	8.594423453	3.044934948	2.193126187	2.867147098
Zm00001d038537	59.60144516	47.80891403	55.90163075	22.66952165	28.38239523	19.48561006	20.63978933	21.20527965	23.30379591	35.97476742	31.50119857	61.82885605	16.76376296	15.87343493	16.68143922
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Zm00001d038606	20.20965014	23.80709725	26.34781919	47.55926615	22.2606012	28.17414401	11.71488043	11.0851592	9.969641423	0.601170262	0.949441817	0.14632244	60.51426344	59.20906252	56.12208633
Zm00001d038607	50.30656665	40.57149399	54.58107422	59.39699705	73.05619512	48.27691027	52.15314415	56.29475181	45.18152567	29.88437732	42.64894604	34.05009245	22.74784357	20.96205068	31.86988904
Zm00001d038608	23.00547602	24.58921054	25.6790502	38.60507216	38.50120619	38.43101057	34.38523142	39.47825573	31.56539419	32.56752948	34.49605479	26.67474704	61.32458435	53.31982323	58.92753988
Zm00001d038609	0.053361569	0.255394555	0.331589574	0.878463085	4.837444635	2.261982716	16.07460174	16.11121317	14.63605806	1.015602731	1.709182515	0.697515986	0.46576381	0.830654922	0.703303113
Zm00001d038610	2.551963665	1.785670933	3.675014614	4.849826101	4.590197465	4.64012994	2.674306037	3.614356506	3.946587901	0.391064292	0.791756744	0.717955438	1.33720657	0.799300624	0.561984429
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Zm00001d038612	2.282077091	2.152371214	2.928512613	1.681189111	1.972013775	2.223681363	1.438727551	2.559688855	1.282858271	1.024722037	0.977104126	0.246919117	2.137996082	2.594779296	2.491133424
Zm00001d038613	0	0	0	0	0	0	0	0	0.073465895	0	0	0	0	0	0
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Zm00001d038617	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038618	59.44014748	64.73258212	56.62234126	79.7391118	58.75279328	83.62892262	99.66113844	103.5951021	103.2498057	77.94771112	92.48188888	60.69309596	62.67683307	59.51480231	68.46387432
Zm00001d038619	1.102854487	1.231798442	0.724106839	1.583044693	2.275723098	1.427627701	1.774981883	2.157774848	2.360972474	1.578415071	1.075851519	2.489485893	1.629982469	1.642398542	1.539683367
Zm00001d038620	0.119519866	0.096497252	0.049513214	0.3516287	0.484569101	0.195237586	1.120852716	0.909025212	0.869288789	0.080305497	0.046374888	0.037343218	0.109740774	0.124302804	0.148810605
Zm00001d038621	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038622	7.569595728	6.574515708	6.778773814	6.632896278	9.102713679	6.469819137	6.050161232	6.067841218	5.558444768	0.271665588	0.993583962	0.129883126	2.424675809	2.400986651	2.781606035
Zm00001d038623	0.371857563	0.371929746	0.319424215	4.699026821	8.545773443	3.751805598	4.747721541	4.734318596	5.321149497	0.625982198	1.399877004	0.381638187	2.215230003	1.69052082	3.515212604
Zm00001d038624	0.031979495	0.140974021	0	0.139592034	0.48458327	0	0.298944317	0.17351996	0.295796895	0	0.14114509	0	0.196823447	0.105171135	0.240322289
Zm00001d038625	30.85434444	24.54750608	31.58891843	62.54222667	94.0859333	54.75703509	98.44246351	99.07076104	83.21261018	57.51981021	66.74516379	37.53774663	53.88970594	51.38104953	50.79674026
Zm00001d038626	0	0	0	0.093170327	2.756218455	0	11.95930416	3.963461387	3.132537606	4.842511573	2.543586577	2.068903349	0	0	0.345482231
Zm00001d038628	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038630	0.102024134	0	0	0	0.218451616	0	0.476860804	0.445939823	0.346016144	14.22910668	3.216392646	22.03845254	0	0	0
Zm00001d038631	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038633	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038638	6.043081661	2.944693371	2.782526699	8.525084943	11.5654179	7.646342931	10.04794092	11.61074865	10.50722013	10.60245735	9.644330041	8.186740504	5.210375638	5.864433926	6.253603906
Zm00001d038640	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038641	0.022193562	0.167717237	0.551644473	0	0.029243273	0	0.025933177	0	0	0	0	0	0.149011848	0.340611061	0.128293929
Zm00001d038642	38.67444434	35.3797905	39.96258014	10.46206076	4.610839804	8.163146447	3.483993191	3.491085316	3.026836106	3.649332675	5.718412305	4.821560394	4.076752386	3.615349947	2.782088941
Zm00001d038643	0	0.017992654	0	0	0.018823256	0	0.066770478	0	0.070471987	0	0	0	0	0	0.033032
Zm00001d038644	11.42416325	12.01951611	10.15962638	7.753248608	5.464049516	6.89384569	6.545188949	5.551011516	7.048892955	1.491673805	2.524986134	0.92183137	5.790755402	5.302265968	5.249739456
Zm00001d038645	0.884718816	0.527829453	0.509256532	0.557498743	1.202559891	0.479198603	0.522337993	0.595145095	0.401985562	0.616508517	0.305338201	0.711826774	0.343904729	0.428780137	0.764450039
Zm00001d038646	6.79835436	6.54967473	6.627485429	9.759182642	11.82738962	10.3984618	8.069663243	10.78325132	9.088901554	3.254780353	6.578506775	4.402967176	5.522674529	5.183229743	7.017359326
Zm00001d038647	0	0	0	0.135318809	0	0	0	0.130828541	0	0	0	0	0.121417061	0	0
Zm00001d038648	106.5664231	83.68805555	91.20318868	119.4345521	91.94475361	72.77707458	67.97920261	69.80622664	72.12110187	1.512945945	8.329874172	1.010495952	87.29457203	80.67574298	70.25108419
Zm00001d038649	0	0	0	0.058997128	0.077914604	0.072444343	0.055276252	0	0	0.39145091	0	0	0	0	0
Zm00001d038650	18.49001974	21.14721728	22.19168638	32.10606279	26.19507032	26.85332407	26.26000594	25.16085135	26.67642268	9.814871897	16.84928809	5.44176083	48.65228992	45.08699845	57.82695417
Zm00001d038651	0.205176496	0.183614606	0.375780563	0.565645446	0.46244102	0.244754301	1.892753193	2.044273465	1.824548144	1.928679045	7.721171577	2.069491663	0.91235427	0.74579294	1.573090301
Zm00001d038652	0	0	0	0.014114379	0	0	0	0	0	0	0	0	0	0	0.013084282
Zm00001d038653	2.357223942	2.428745728	1.863517276	1.787116542	1.506995763	2.749431953	1.1343999	0.978159698	0.733953238	0.307217249	0.222206426	0.276222748	1.052891434	0.874721014	0.803359611
Zm00001d038654	0.224118589	0	0.557070484	0.03993014	0	0.196125669	0	0	0	0	0	0	0	0	0.11104786
Zm00001d038655	16.97437726	18.02723237	15.40289861	10.81439861	11.42304151	11.31078902	11.00412094	9.814683713	11.39565522	10.38444017	11.6794187	10.84856058	9.661546318	10.12073414	8.869006427
Zm00001d038656	0	0	0	0	0.486860982	0	0	0	0	0	0	0.409307365	0	0	0
Zm00001d038657	12.46178419	12.83595924	10.0053487	4.724076921	3.558775416	4.445224214	3.823556632	3.448974081	3.545950562	1.637330626	2.203521362	0.94523899	4.998494951	5.226092105	5.708964956
Zm00001d038658	27.47440997	23.59778626	31.11799031	45.07472529	60.47413387	39.11861151	45.71863135	59.15781095	52.10834516	43.91074667	54.36892705	35.51675781	58.40025448	57.67781785	65.17110633
Zm00001d038660	5.015928583	4.393806064	5.062041859	4.985704849	5.453850296	4.712859249	4.957708018	6.048068132	5.302312335	7.489940717	7.942227269	4.752199651	2.700985334	2.387566088	2.997654013
Zm00001d038661	0	0	0	0	0.036486399	0.033924747	0	0.033388534	0.029271568	0	0	0.017528209	0	0	0.073175056
Zm00001d038662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038664	0.047169295	0	0	0	0	0	0	0	0	0.065054234	0	0	0	0	0
Zm00001d038665	0	0	0	0	0	0	0.027638126	0.019013144	0	0.173978182	0.129249273	0.069870231	0	0	0
Zm00001d038666	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038667	0	0.023268878	0.034440506	0.005760193	0.042600336	0	0.053969044	0.038983369	0.119617866	0.216576387	0.058242786	0.204653683	0.056852719	0.070883924	0.101456226
Zm00001d038668	2.657608764	2.880207411	4.670124345	7.523040601	6.742980579	7.511364864	5.300872658	5.97671147	5.320332392	1.585446971	2.322549568	1.355599348	12.83639617	13.86219267	14.10518672
Zm00001d038669	0	0	0	0	0.243430491	0.452679247	0.43175235	0	0	0.764387249	0	1.023268413	0	0	0.213592055
Zm00001d038670	0	0	0	0	0	0	0.215876175	0	0	1.019182999	0.232971143	5.320995748	0	0	0
Zm00001d038671	9.651123468	10.04954206	7.744244782	5.311626999	5.383173016	5.260368112	5.365503031	5.898538434	6.252155062	12.14754719	14.63946685	15.92918393	2.652571125	2.625390994	2.917560292
Zm00001d038672	25.53598106	26.18599806	23.11257571	14.68052617	13.68679032	12.16465991	11.71915245	12.38857999	11.65668697	17.21320244	20.20538164	20.74757594	17.46807037	17.15464544	16.29065293
Zm00001d038673	22.60602966	25.39337856	23.05873896	20.74520184	17.50617719	18.6861066	18.83136756	19.13567667	19.12158759	8.263900247	12.07963301	6.990842512	18.98566377	18.42411241	18.86252402
Zm00001d038674	0.569634747	0.239152357	0.235981247	0.94723166	1.501154694	0.697880506	1.553109148	0	0	0	0	0	0.84991943	0.208151204	1.317151006
Zm00001d038675	30.83129948	29.05792418	1.91667211	3.252041521	3.120721082	3.334909897	3.153641476	3.086455018	2.903024485	1.409318731	1.908229286	1.838454891	2.061541214	2.2054494	2.051135917
Zm00001d038676	0.485339022	0.437552295	0.8381038	1.191473008	1.804078287	1.458351191	2.572927775	2.507155928	2.079200145	8.046442162	4.11025172	6.276199222	2.669814174	2.279395697	6.916519407
Zm00001d038678	3.47343285	3.191581185	4.186213435	7.592412901	10.16333305	13.06159717	40.76761057	44.69119537	43.584041	10.24573795	9.609743683	13.89831655	12.85022849	14.9665609	14.12662317
Zm00001d038680	0.0759513	0.191321886	0	0.520977413	0.550423388	0.697880506	2.662472825	1.87738957	1.498704266	1.518865775	1.197212818	0.168270806	1.529854974	2.705965654	2.458681877
Zm00001d038681	1.082950632	0.964016172	1.335774728	3.340980281	3.937513564	3.291967603	3.187355794	2.915941441	3.143128289	3.616005436	4.415212489	6.223714732	2.633282237	2.106554652	2.344042409
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Zm00001d038683	17.35957128	15.31854831	17.10429959	47.74807888	24.76152158	50.26606879	32.05652899	20.28848766	21.25879421	0	0.21141417	0.016883358	37.6579686	33.21508446	41.6906927
Zm00001d038684	14.63778796	15.76119762	16.06007184	13.24157636	9.669510495	14.30586335	9.612923182	8.373494986	8.854211753	3.553641385	4.091652127	3.152479906	6.78262175	6.223300007	7.683655912
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Zm00001d038689	7.120794406	9.80675835	6.798407899	16.34962561	22.226958	18.94070631	31.54575893	31.24949702	28.91423994	42.6201457	47.33879377	39.5266208	16.16888443	17.23207769	19.26270902
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Zm00001d038709	67.23859544	66.27663818	64.72703637	65.53188844	87.94409842	67.07432293	76.98046137	85.25487783	80.77810645	146.5391541	139.4403167	160.5458236	55.48833022	59.1888052	63.31868513
Zm00001d038712	0.103049502	0	0.021345037	0.042839623	2.014112077	0.084166493	7.405420646	1.843104603	0.67780595	31.26689553	7.688633073	37.86093129	0.230631403	0.094138736	0.536126791
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Zm00001d038717	24.46057741	20.31230487	19.49602075	0.283284235	2.132481435	0.765277065	3.350900377	6.949807754	2.871349295	36.67206699	12.78220489	32.27025171	0.158863445	0.186752482	0.361088126
Zm00001d038718	0.176565752	0.079423292	0.156740311	1.509978145	9.256197395	3.723746167	8.031629277	5.139968565	2.644162278	1.130597377	1.256410795	1.159578338	5.052473071	3.967930334	7.275922714
Zm00001d038719	7.328274039	5.933563887	7.309040774	8.985900345	11.72523531	10.07211324	10.86576747	9.615897798	7.974524389	2.632889415	5.746621527	2.35351735	7.304712941	6.750849864	6.621353705
Zm00001d038720	1.749117256	1.467679308	1.643683217	6.535353596	5.193466685	5.655058209	6.685651649	5.898982996	5.060771901	0.962956501	2.235743289	0.863205475	5.735956162	5.373544699	5.20156409
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Zm00001d038730	2.566034893	2.213096421	2.26364456	2.618991613	5.936384472	3.386580009	5.164279186	4.385934576	4.93524137	7.033640667	8.126785694	6.314111425	1.76245048	0.898508489	1.814695508
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Zm00001d038733	10.28929449	9.396859033	10.07891117	13.89746481	10.1547376	12.1705338	6.618260785	5.964369249	6.580704827	1.592441603	0.852946823	0.105957629	3.272253519	3.325426134	4.186446975
Zm00001d038734	7.974886454	7.922886153	6.40955515	11.53483715	8.829372234	9.995449823	10.67852004	9.372176886	9.502872817	4.967147252	6.117371303	3.779308016	9.774073448	9.675673716	9.269627239
Zm00001d038735	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038746	3.509919631	2.85761625	1.723165188	5.562466771	9.54351112	4.359525882	9.630220855	10.48688185	11.20440876	8.45126782	11.57883103	10.1392111	2.766758996	2.412782469	3.923428528
Zm00001d038747	167.8216922	155.8755009	171.8929249	117.0442368	87.37164011	121.5013398	101.7982713	82.07551106	94.10829203	28.66933327	35.86118301	20.44614628	130.6581559	134.0255868	133.3605661
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Zm00001d038753	19.3905197	15.9670312	18.16897222	17.16460056	27.58497686	17.77955973	27.83981652	39.34865945	28.15728359	90.54141319	87.43349665	74.77322179	33.60889452	25.59840715	30.56851126
Zm00001d038754	1.345575037	1.483666042	1.309261978	1.57960418	2.552225879	1.487182135	2.2325604	2.57514561	2.427192242	1.621322027	2.092333827	1.0290747	0.857361807	0.727034609	1.046339223
Zm00001d038755	98.69918261	99.10946078	102.4100343	77.67299615	102.7704094	77.5422784	89.80093527	111.9310855	102.2726893	217.2320757	192.3817536	154.8091413	68.11946841	60.39982596	78.4002969
Zm00001d038756	37.07819961	38.96651548	33.35391305	27.63746453	31.6023041	29.26996038	28.87990493	30.55886565	27.90164951	42.96697341	42.2617027	39.22472369	19.74861772	17.97974651	17.53289779
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Zm00001d038763	0	0.01403339	0	0.027791638	0.01468122	0.068252372	0	0.013434716	0	0.015366655	0	0.049370408	0.997460456	1.135925398	1.85496083
Zm00001d038764	5.037782401	6.151361894	5.22145847	25.17957578	45.00930488	28.09189883	85.01938539	72.27862902	75.9430445	583.1755087	258.3676189	380.3665713	36.92308208	35.0220988	55.88721736
Zm00001d038765	3.938685347	5.895430131	3.511637424	7.249585108	13.01209664	9.114698211	12.13954206	14.00657466	13.72769304	1.876303844	3.791090611	0.737721695	5.504071133	5.871689082	4.751642877
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Zm00001d038818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038819	9.72239404	10.07760362	7.793231913	9.511458408	9.036703134	9.675738316	11.4354308	9.266228787	9.203561478	5.970713737	10.937578	9.416211781	5.672685388	4.964664258	5.277312459
Zm00001d038820	4.161131102	1.904958873	3.190904541	4.379860154	30.03929631	7.836749898	23.18204887	27.54219682	24.05772175	24.88885585	22.33832426	14.54775126	2.138329403	2.127118835	3.036626604
Zm00001d038821	0.136371411	0.150290259	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038824	0.32707806	0.281239211	0.324413142	1.180607577	1.508406649	1.040318766	0.834204736	1.171768676	1.074381682	0.919538929	0.614717969	0.522580142	0.953739816	0.817090441	0.861738546
Zm00001d038825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038829	7.695923603	8.177923949	7.511913668	9.819372993	8.964703114	8.709790313	8.024863999	7.490205281	7.752268056	2.141827958	3.108522283	1.551028415	8.628536531	8.966190059	8.259149545
Zm00001d038830	8.885166564	11.59134132	7.888515958	15.38622058	14.43801608	23.1761247	15.68293793	15.1563344	15.60709421	143.0559626	98.73545366	165.0724026	11.44214622	10.56799569	12.2678832
Zm00001d038831	1.175456586	0.999567793	0.762997415	2.829245058	1.785601312	3.063641913	3.210714764	1.751354254	1.883639809	0.330425156	0.188826556	0.406393348	1.952115055	1.969798909	2.233241793
Zm00001d038832	14.73170019	12.6590054	16.36105552	21.22004839	28.80970995	18.71864471	17.31659697	20.94756279	17.47686138	1.360085613	4.258859827	0.553697414	5.30611755	5.886647691	6.981420944
Zm00001d038833	0	0.095066775	0	0.317705029	0.074591538	0.196504656	0.143321519	0.204775108	0.081451319	0	0.023795534	0.07316122	0.812966412	0.910176694	0.643576889
Zm00001d038834	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038835	5.688701363	7.206963528	7.225431898	14.42866726	10.07852731	13.3461663	7.397743285	9.665347634	8.209040604	4.578550594	3.607854516	3.806883146	22.15909524	23.01524943	23.11563852
Zm00001d038836	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038837	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038838	8.336118244	8.993801483	8.702527924	16.91678153	15.0295083	12.24004686	9.027657511	7.76048658	7.27799207	0.728858896	3.705023819	0.627240463	15.79841032	12.8074775	15.42030446
Zm00001d038839	98.37026789	104.0236079	109.8036953	81.13798402	118.1213938	83.46437754	101.1902267	117.2531328	102.912933	71.30313183	113.5199022	66.47339081	87.35355122	74.54546086	82.69697399
Zm00001d038840	0	0	0.12794164	0	0	0	0	0	0	6.729831115	0	0	0	0	0
Zm00001d038841	10.27643582	11.21590206	9.555333997	4.989547022	5.841566965	3.335918934	4.196262713	6.44430391	6.856168417	390.8749779	29.11548494	14.34908904	5.855403184	5.986682748	5.425266957
Zm00001d038842	28.26412406	28.07096595	29.59045744	21.94403887	23.05552807	24.80719264	28.89830055	21.14852059	14.94877136	14.21338661	16.44742954	8.879335877	31.86286305	31.04535876	33.54900662
Zm00001d038843	93.68903535	75.69613694	70.14025653	36.44612708	130.910255	56.83304358	151.0495444	160.5229257	125.8610432	12.97041362	24.10584975	8.553664418	16.35094817	16.9619869	18.56410368
Zm00001d038844	3.235453141	4.393429673	2.979870956	1.648273159	2.245784519	1.415668855	3.578093432	3.343902879	3.250953192	5.099683766	5.883229012	6.49615979	1.69714498	1.076712409	1.461181781
Zm00001d038845	4.02140782	4.970457848	3.460522267	1.755686621	2.373205377	2.032215351	4.705062709	5.772502937	3.992502208	9.322158033	8.569351578	7.605152429	1.641922715	1.886481101	2.291738036
Zm00001d038846	64.94595963	60.17069051	69.55665287	25.32128387	26.11168147	27.10842195	38.05122345	34.95512921	42.34222724	85.16975618	43.00384184	39.52081916	7.849945045	7.723344457	9.621234648
Zm00001d038847	9.543618793	11.77981872	8.524976972	21.2755174	17.30650595	21.71833364	30.03994208	24.66905718	29.63079573	2.254030813	3.58035582	1.321498474	18.03520131	17.52393384	15.36446304
Zm00001d038848	3.490203532	4.54949367	3.920919175	9.123836728	5.161160621	8.533281367	11.38006779	9.850207778	13.8905826	0.567538359	1.345362899	0.489617395	7.981852041	7.702290711	5.955813243
Zm00001d038849	14.26334313	14.21548286	12.76692846	6.823102693	6.733153063	7.656604159	7.406903041	6.865645891	6.737166946	3.596467329	5.502846125	2.650602131	5.028416825	4.6903487	4.604362934
Zm00001d038850	66.56230761	67.92160832	58.75413767	43.59118413	25.39850974	42.08441269	32.86103379	17.45169576	38.29665761	20.13031784	5.549915655	0.691185706	8.416072598	9.478259233	6.840168059
Zm00001d038851	32.79158676	35.74194466	25.80200975	23.14383113	22.46546476	19.84230667	17.47468878	19.58708373	17.09189913	3.415256051	7.405964855	2.94436649	18.11706024	17.81435071	17.49279201
Zm00001d038852	30.85301633	27.38397367	41.16662393	30.76026678	38.42399666	42.26634072	43.94930324	41.03098226	43.7857709	40.60476332	52.76927444	45.81398198	30.88059346	25.68897191	24.4252622
Zm00001d038853	3.334243481	3.91005333	2.954669838	2.537723941	2.862837803	3.178854235	3.271131038	3.929654357	3.354564599	7.600731649	9.721133909	16.45423114	1.65983654	1.722209474	2.120645323
Zm00001d038854	6.076103965	6.13788312	5.60802492	4.843311204	10.39713779	6.761967373	8.782546105	8.913508366	9.0278283	7.417771691	8.970970257	7.416097953	2.888187747	2.505349335	3.063419081
Zm00001d038855	1.742974734	1.553862954	1.65805921	3.846575578	5.22647563	4.947408915	5.196431746	5.638943515	5.192585676	1.305794798	2.39693815	1.104442697	2.552433798	2.154463251	4.171208537
Zm00001d038856	0	0	0	0	0	0.325225867	0	0	0.218257903	0	0	0	0	0.048501251	0
Zm00001d038857	0.516015819	0.280831286	0.190016586	4.369801229	6.89160114	4.932642828	4.228195427	3.541149422	3.433366658	0.017572121	0.152636266	0.007057024	0.976654853	0.740265606	2.224303469
Zm00001d038859	1.869050664	1.429807687	1.582166081	5.364836966	7.024976594	5.866169944	5.211245742	6.174315668	6.135153919	3.008282441	5.460312981	3.009113163	6.01144081	6.653431017	6.445133925
Zm00001d038860	10.69280241	14.48626633	9.674425715	15.49839106	13.22860553	14.25295886	22.4719976	17.40332161	19.38277296	12.52702289	10.35568657	5.263487831	2.715100979	3.077512001	3.614298323
Zm00001d038861	0.381239094	0.28810323	0.132665419	0.06656508	0.482244899	0.289583433	0.792950635	0.441300066	0.545401302	0	0.009615095	0	0	0.008358554	0.044076442
Zm00001d038862	43.65166296	49.663396	35.546767	34.78300456	70.4043724	48.38099529	80.88368963	85.97650361	78.05570645	73.70050028	115.8971311	54.82072906	40.50093632	39.74814427	53.87547905
Zm00001d038863	14.08447021	20.3562631	16.03483655	7.229501085	3.81149605	4.42987122	3.393479217	5.660888376	2.378296443	4.147758184	6.441427152	2.187096618	18.26577476	15.43989083	27.6701244
Zm00001d038864	8.172098403	10.06536132	9.884294345	7.540699509	8.320188195	9.760550886	7.253733247	7.043063026	6.208360678	5.169340227	4.129701401	2.485168193	5.440368801	5.413514207	6.439990669
Zm00001d038865	58.76399848	51.30905116	71.03860632	105.877978	149.247669	92.77743822	105.5803909	120.1939193	103.2062256	10.57748821	54.15755439	6.954408824	54.98919279	52.35512245	83.58535893
Zm00001d038866	10.36364123	10.9503515	11.786933	7.365427784	8.875709208	10.66526829	6.793685774	9.174487996	6.590716993	14.88884721	12.57502645	17.69529072	12.35854362	11.4836498	13.09690959
Zm00001d038867	0	0	0.052806992	0.25171191	0.251942047	0.468507193	1.042646701	1.460156309	0.484720785	4.102072988	1.527074252	4.118516224	4.861776881	3.540026073	2.2597276
Zm00001d038868	10.30543267	10.21179632	4.799543669	5.667867633	5.650854658	4.731319417	4.468965311	3.910461531	4.710129873	0.66209118	1.600892614	0.685426146	4.464812801	3.449966115	3.743319518
Zm00001d038869	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038870	0.041095894	0.36232301	0.068098797	0.136674709	0.018049956	0	0.128054805	0.330348622	0.152047903	0.170034037	0	0	0.015329208	0.030033841	0.095024922
Zm00001d038871	11.11023142	11.41408977	11.31539829	16.8270616	16.24596754	17.68348455	14.9846611	14.24220046	15.30443354	9.109299014	12.53808333	6.273650184	10.28859079	10.00157935	10.06368682
Zm00001d038873	14.98577564	15.50811054	12.57961569	15.30143451	38.79907517	25.01633197	23.45024142	13.20865082	19.9947324	45.32424396	40.44737459	67.27596252	2.745893544	2.545849343	6.180477796
Zm00001d038874	4.690325867	3.781684056	5.431708694	3.423328457	34.35391055	6.018369117	18.36223948	26.90630495	23.54324173	25.45838339	40.29356263	26.9823713	0.129227516	0.428474993	1.550797675
Zm00001d038875	0.145529729	0.075474507	0.063834627	0	0.270715436	0.115366596	0.290087834	0.474816673	0.306169234	0.507676942	0.269878907	0.199143283	0.009579555	0	0.484962299
Zm00001d038876	0	0	0	0.014091049	0	0	0	0	0	3.583986497	0.170973864	0.01251601	0	0	0.026125309
Zm00001d038877	11.20028497	11.10942416	11.23900017	12.12456525	12.2494223	11.61273161	11.70304722	10.40348562	11.22779279	5.293334518	6.43621611	1.817324702	8.28388138	6.316695209	7.048221382
Zm00001d038878	0.052260069	0	0.03896938	0.013035298	0	0.051220588	0	0.025205499	0	0	0.052721298	0.011578266	0.33918803	1.099954987	1.776341265
Zm00001d038879	8.255460273	7.379558448	6.537156217	8.689459938	8.02808584	8.080979177	11.85162093	12.35246168	11.20087698	7.188321811	8.06088322	4.798151327	8.728620407	7.408066694	10.05005842
Zm00001d038880	55.53255219	48.67372263	48.17698738	59.53066816	73.31639526	74.6341328	77.24233035	73.08357066	78.54428052	115.3730443	112.0591198	109.7058345	46.35078109	47.73698086	49.80016238
Zm00001d038881	2.618521848	3.359798968	2.583943865	5.418382539	4.264399275	5.815337126	4.641182901	4.56454587	3.398693588	0.662761398	0.346281355	0.130367626	5.67385238	5.128224502	6.723706282
Zm00001d038882	0.682760334	1.037579183	0.908292648	2.074803792	1.077030097	2.776468094	2.382179672	1.708347745	1.182008552	0.375771458	0.028295206	0.007101699	7.270846502	6.49724584	7.908464937
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Zm00001d038884	4.076890005	3.035851409	3.22962764	0.176138119	1.066936394	0.242239514	0.891158259	0.590350278	0.44125074	13.36203661	3.989390151	22.73741879	0.063217148	0.175466304	0.043542182
Zm00001d038885	7.604837541	8.363089485	7.699847111	9.389673997	12.12769488	8.64216126	7.79433556	8.546786151	7.392538896	4.814570648	6.519437536	2.953973188	8.956389084	7.728719565	9.732058779
Zm00001d038886	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038889	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038891	0.031380032	0.026348844	0.025999464	0.450061868	0.117152088	0.397263272	0.220005406	0.182879683	0.1096508	0.151473831	0.105523272	0.828479445	3.113553353	4.231186834	7.685228439
Zm00001d038892	14.04820445	12.39260532	14.09368595	14.34146594	21.24021866	16.12628305	21.8790203	23.96138141	24.21793113	21.65950797	27.84196698	23.13606517	8.730970965	9.053550579	8.800554608
Zm00001d038893	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038894	309.4023166	294.1348466	315.4118852	300.3124471	189.7028947	291.3657966	228.9360474	188.5423059	230.4892697	55.75897127	79.32369911	86.48507821	226.0443379	214.6378336	190.9351414
Zm00001d038896	8.692599554	8.891763048	9.579622784	8.984281556	14.59670794	10.21814736	10.46594997	12.12201502	11.55945862	1.137033492	2.65461615	0.860072678	5.248799854	4.3082912	6.32047403
Zm00001d038897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011682049
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Zm00001d038903	3.798931009	3.731809083	4.767160723	4.49253577	11.30725874	7.094281687	10.93241989	11.34043445	12.23593647	34.13209036	28.69693286	31.26931591	5.351740873	3.962360332	5.529191452
Zm00001d038904	11.41002223	11.17378009	14.22347803	20.37808644	32.61444077	23.49973292	25.4605291	29.52148525	28.3464526	4.492672334	19.3702661	3.973238416	11.8665557	12.1281713	14.49366924
Zm00001d038905	7.361751076	5.847069401	6.625994412	7.359415315	19.21006774	9.570210423	14.95742355	18.60900751	17.51692603	10.08477425	12.05177373	8.442999105	9.087698732	9.268980032	9.818400615
Zm00001d038906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d038908	1.466751817	0.906261564	1.203790975	1.958698666	1.504193469	1.712208852	2.158543252	1.159580504	1.339618629	0.820607364	0.514753042	0.344887026	0.998741355	1.82026964	1.159839448
Zm00001d038909	3.500275709	2.515908443	3.017776264	1.908430544	7.533945275	3.176946645	6.028038339	5.944105341	5.220854842	7.114812687	5.650330952	3.613536605	0.892073611	1.155155476	2.002210778
Zm00001d038910	0	0	0	0	0	0	0	0	0	0	0.146930664	0	0	0	0
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Zm00001d038913	0.368248725	0.057976329	0.286037875	0	0.060652715	0.169183153	4.302986383	3.274678038	1.078612919	17.07732052	12.36394328	11.57499179	2.06041074	1.160600653	3.884930239
Zm00001d038914	6.887329389	7.193467033	7.212338017	6.583114066	9.963393779	6.692144137	8.217932372	9.616282696	7.927091562	1.695830272	4.545450426	1.934949248	4.385098456	4.312561681	5.345367096
Zm00001d038915	2.833885687	1.809091943	2.557040522	0.887609412	1.730626046	0.856084368	0.997954793	0.756737546	0.893690192	0.196312106	0.350834916	0.537542801	0.108603051	0.056741644	0.149605415
Zm00001d038916	2.583433766	2.806653732	2.538301373	10.60627684	9.606201892	10.62200712	10.93701426	9.703898841	10.29223941	2.746853216	3.658620779	1.689367303	13.38386605	13.88223861	12.81119123
Zm00001d038917	0.937800187	0.812726701	1.47558821	5.81572818	6.73394	6.145213364	5.519311192	6.981748684	5.400852929	1.245917543	3.34164776	1.286652165	3.552652521	3.857543524	4.336899976
Zm00001d038918	3.521709858	3.760622985	4.009793343	2.659826502	3.242494139	1.929500022	6.147117258	7.385009509	4.882778499	33.95387778	30.61799949	64.98753134	3.867473376	3.117272433	4.198023686
Zm00001d038919	0	0.027998325	0	0	0	0	0.077926034	0	0	0	0	0	0.024875691	0	0.051401015
Zm00001d038920	1.207430916	1.569820601	1.339243998	1.81350335	1.488324312	1.097521479	1.517078533	1.878563672	1.457073592	1.325034687	0.884095619	0.402699364	3.791948227	5.038326583	5.313634827
Zm00001d038921	0.073898562	0.170638439	0.122455133	0.230407701	0.405717485	0.211250315	0.11513396	0.118806459	0.060758281	0	0	0	0.316996977	0.216027196	0.42718411
Zm00001d038922	39.08969624	40.03630394	44.31931678	55.29624302	36.39167121	47.45068809	28.75173859	24.16767147	32.77719482	14.28785215	22.21644416	17.84194189	60.52271131	64.64617593	60.66113568
Zm00001d038923	20.95984411	17.28307608	24.03740472	44.14254705	74.28200771	46.58079563	47.94830062	59.1007951	54.18435268	4.324128615	13.23477318	2.244028392	21.3815174	19.96391683	23.84406199
Zm00001d038924	10.41430211	9.378631918	8.389235327	5.847176416	12.40723822	9.09054722	8.854448529	7.933412592	7.75806207	17.73192401	14.39139512	10.92547911	13.15293182	12.45308069	10.7649575
Zm00001d038925	38.18454604	36.06676088	38.20870283	8.674172279	10.50569629	7.296124332	1.100545206	1.183696708	1.228568183	6.724609397	11.20088711	7.487917094	8.687014336	9.784761215	8.753086175
Zm00001d038926	0.101043858	0.139991624	0.075346562	0.025203503	0.039942032	0.012379255	0.059034874	0.048734357	0	5.769344118	2.420971375	13.45420234	0.033921396	0.04430713	0.070092293
Zm00001d038927	18.05809846	16.75122181	17.45940707	18.4324205	22.69317724	16.79178697	19.84649735	20.12271797	19.60131519	16.74211394	20.75954831	12.0846436	9.05185838	8.791119447	9.392248258
Zm00001d038928	1.784297074	2.342286321	1.678763648	2.287982356	1.684659818	2.590111656	1.622444378	1.155271335	1.251359519	0.08664929	0.186184199	0.045238245	1.79631409	1.787268887	1.794133999
Zm00001d038929	35.15235061	35.03990878	42.84541875	53.50203136	77.43259258	52.93703806	58.25322793	63.94907149	70.44068385	22.91850084	34.76452139	20.14789167	47.9233095	49.30184818	49.74914264
Zm00001d038930	0.119636892	0.082190786	0.040550477	1.166519181	5.144768833	0.986026872	6.151011204	7.684849791	5.271397165	0.524996811	0.452597877	0.168672407	0	0	0.012574234
Zm00001d038931	1.803606699	1.479213505	1.785402889	4.466065592	7.830759789	4.551010592	6.546160414	8.054121109	6.899356217	4.761626881	6.846358494	4.295019549	2.748751891	3.017493966	3.746113848
Zm00001d038932	8.829338574	9.715564508	8.347836599	7.133838442	7.849788088	8.868898092	10.70535948	8.299435599	7.610607602	6.808708648	8.051256202	3.786093129	7.782074783	10.82386262	7.93034668
Zm00001d038933	7.217301156	5.448303445	7.129748121	11.36677992	10.57666353	11.90293654	9.352442613	12.69103263	8.900933967	0.893294067	2.683701424	0.922499849	4.348826323	4.792760721	3.7441856
Zm00001d038934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038935	0	0	0.04642254	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038936	3.718381708	4.695527556	3.572856491	2.805418024	6.1515403	4.69807217	7.670187669	9.84387349	8.932436863	20.77380468	22.18562715	24.76266017	3.878887613	3.53945622	4.915495455
Zm00001d038937	4.534969651	3.853122998	5.512430333	7.775456491	8.782983923	6.896701467	7.285068153	8.017274574	7.300389338	2.126748757	2.634594223	1.322492203	2.477084768	2.73562941	3.76694005
Zm00001d038939	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038941	0.043678064	0.330076097	0.189991291	0.735390714	0.748179336	0.802674064	1.148350899	0.868985743	1.238944821	0.361435505	0.110158879	0.120961442	0.757595914	0.67033998	1.767423075
Zm00001d038942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038943	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038944	3.183252996	4.135928999	3.331499952	11.72895674	10.95695755	11.8639686	15.90958026	16.18137424	14.87684382	5.006403417	7.521313469	6.724645802	18.46699939	18.68463162	19.55710979
Zm00001d038945	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038946	44.41934722	43.52232469	47.55567983	23.17852276	22.37308135	20.31055792	53.92218094	58.67799759	45.3761384	4.495648852	9.494195885	5.066089026	52.75549716	52.34743521	55.17972114
Zm00001d038947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038948	0.644194269	0.450758369	0.810490564	2.172185692	1.917705473	2.000671979	1.836935876	1.658988102	1.644520606	0.548425989	1.266997998	0.798772411	1.124326227	1.02586213	1.081918104
Zm00001d038949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038950	1.566495553	1.901261239	2.300817155	40.67175942	8.068706481	21.59940165	4.892293815	7.864430699	10.18650556	2.121174617	4.884628298	1.640640356	28.58916484	23.854128	15.80581207
Zm00001d038951	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038952	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038953	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038954	54.9826758	55.99029776	59.45185614	20.08268649	30.81862414	20.32592805	48.53335218	63.35473032	62.61714263	297.7657505	291.5758585	366.8273026	7.191151332	7.371045908	10.27903689
Zm00001d038955	8.072908017	6.177584913	7.90230707	16.16444678	24.91526882	18.21740021	22.4127481	22.8466774	24.61320678	14.04933837	15.28078906	10.41790236	10.9896238	12.88847927	12.93844275
Zm00001d038958	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038959	19.30414767	18.65324469	17.08146837	10.7465436	22.39495457	15.35399284	23.90888737	28.82750093	26.89406447	31.93992405	45.03866626	25.84999353	9.397193808	9.038861733	8.723118554
Zm00001d038960	8.343831379	6.679244479	9.477880247	8.236870328	11.12243442	6.944035209	7.163094148	9.532791411	7.410185907	3.539484731	5.705720306	2.344413539	3.062432111	3.066711691	3.824894024
Zm00001d038961	0.114338982	0.027245205	0.003840563	0.138744601	0.154730231	0.20444239	0.43692479	0.275733572	0.331567993	0.409147605	0.272782667	0.599065368	0.712364658	0.972250561	1.329060147
Zm00001d038963	1.06727105	1.124765414	1.136920802	1.992053837	4.754586615	2.899743535	4.055216177	5.777855289	3.563700665	6.919132167	5.182030458	9.74773207	2.737977304	1.782826671	2.686064717
Zm00001d038964	1.999248122	2.11875633	1.897677872	1.968879059	3.077615776	1.981676779	1.995909586	2.285815473	2.409771767	1.847118455	2.961699405	1.318771672	1.56388393	1.049720412	1.069678716
Zm00001d038965	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038966	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038967	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038968	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038969	0.056845047	0.011932758	0.082421724	0	0.174770609	0.139285922	0.033211719	0.125660678	0.385581399	9.786770082	6.35593067	6.895254846	0.010601906	0.07270146	0.295742845
Zm00001d038970	2.354115086	2.782741047	2.691884877	5.402629696	5.396529296	5.543643593	5.123897948	5.392037862	4.105043002	0.691922403	1.727636394	0.325972732	5.317244707	4.627214489	6.04569523
Zm00001d038971	5.382175657	5.587771508	4.291046178	11.01849419	22.80584318	10.67621097	23.07229236	26.3413611	26.32386376	19.75648864	22.19412464	20.40342109	6.683349726	5.990580059	6.149150656
Zm00001d038972	44.6869501	57.56883305	40.3477655	22.13869708	19.35255938	26.78756617	15.04022525	14.00504715	12.14497835	16.59606128	12.72729942	12.75645784	30.71350712	27.9236565	27.81250986
Zm00001d038973	7.032134309	6.850126257	7.300566679	12.06892367	16.90811068	11.23115853	6.442067114	7.518524152	5.646342122	0.190453389	0.656374021	0.15297346	1.913804591	2.131002538	2.665004832
Zm00001d038974	91.20857532	95.0335196	81.90492633	31.04969663	22.97649714	35.18138784	25.40312307	17.05003727	22.81116052	17.32985798	19.40329857	15.29284676	16.83590401	17.50674069	14.53514875
Zm00001d038975	9.333114648	5.929254836	9.660349411	13.0564364	16.48114583	11.30021527	9.674450804	7.606913573	9.518797366	0.415222703	0.465942286	0.318350173	2.021429996	2.160271957	2.468174858
Zm00001d038976	0.579443027	0.114032912	0.022504172	0.067749019	0.143156474	0.288395653	0.253904693	0.043667275	0.40197035	0.099893433	0	0.080235086	0.182366818	0.019850181	0.230283355
Zm00001d038977	8.109738761	8.152655047	8.090785598	8.374301128	9.950511116	8.978446342	8.389506207	8.567400487	6.973562708	5.874515342	8.303281716	4.306358987	5.266031409	4.343138594	5.161081492
Zm00001d038978	0	0	0	0	0	0	0	0	0	0.075269004	0	0	0	0	0
Zm00001d038979	0.078796737	0	0.032642939	0	0.103826261	0.016089464	0.061382659	0	0	0	0	0	0.029392026	0.143966251	0.045549891
Zm00001d038980	2.177990146	2.846217133	3.113469851	4.246601774	3.071921648	3.72063743	3.512791371	3.21797114	3.594031828	0.535890537	1.586015964	0.294505374	5.343622087	4.315595646	3.593842086
Zm00001d038981	9.242791651	9.059680038	7.64225431	3.455795655	3.467729863	4.286103688	4.494539965	3.890348022	4.213155214	6.613606292	6.469935296	9.902359261	2.562737162	2.885027703	2.464858245
Zm00001d038982	13.60056266	15.59529146	12.49918209	8.309298479	8.746835052	8.903014622	7.620082651	7.207883055	7.841148591	1.451927011	2.72887696	1.082512189	5.020433169	4.984943062	5.33622247
Zm00001d038983	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038984	2376.875342	2313.788452	2721.600779	3841.26469	1793.022057	3850.877127	1956.642098	1317.026115	1510.918152	184.415641	212.5046854	202.0803894	4491.367828	4418.603	3565.981963
Zm00001d038985	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d038988	2.262458966	2.047562736	2.032403058	5.137912873	5.682564418	4.095676983	4.374196708	4.409023408	4.28947247	0.226205401	0.450158779	0.09084486	2.040526395	2.406151534	2.459549443
Zm00001d038989	0	0	0	0.025343991	0	0	0	0.006125751	0.006265486	0.014013293	0	0	0	0.038984841	0.029367915
Zm00001d038990	0	0.098534877	0	0	0.077312688	0	0.022853844	0.094331309	0	0.134870426	0.024663612	0.021665769	0	0.021440467	0
Zm00001d038991	8.365772753	7.152093534	6.172954611	8.357081753	21.6275506	10.8078028	16.37037359	24.97231929	23.45464604	15.78703651	20.68086837	8.433096772	8.557602106	6.611193577	9.855670588
Zm00001d038992	0	0	0	0	0	0	0	0	0	0.072026303	0	0.025712008	0	0	0
Zm00001d038993	1.953033417	0.871197872	2.12383122	2.689461321	3.189953725	1.819474175	6.727498298	9.714019204	8.354941752	1.290661804	3.104201807	0.878914476	0.273188388	0.446038295	0.25872609
Zm00001d038994	25.96474659	24.1766348	22.88469299	14.63803345	25.18797935	15.66173693	22.12019574	25.908615	29.52207786	38.97041738	38.83981119	34.98467449	11.07365955	13.0263928	11.04262646
Zm00001d038995	19.71167239	21.37210435	20.76232014	24.60173926	28.72219995	27.40279569	28.11366716	29.60857935	25.8934351	17.80850977	18.93257274	9.293505012	26.00916728	27.27069565	28.11983855
Zm00001d038996	0	0	0	0	0.19957042	0	0.018629547	0	0.049155752	0	0	0	0	0	0
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Zm00001d038999	348.7536615	378.5259461	299.8271291	40.427892	29.98055821	32.59522173	45.8498567	46.91014132	35.40622475	10.11381697	22.47763532	12.60541042	34.66105899	34.09059627	28.21533394
Zm00001d039000	0.234512907	0.361007624	0.377809874	3.163055659	5.092862813	2.958232995	12.64590015	16.97662407	14.5252437	4.899395275	3.603504096	4.522144271	3.605947875	4.808372162	5.141407738
Zm00001d039001	0.075199306	0.113656566	0.186915839	0.562711877	0.792688947	0.700183742	0.298759327	0.217615792	0.166934881	0	0.284486214	0.083302379	0.201961053	0.263795585	0.399927038
Zm00001d039002	5.530698725	5.700993404	5.487193827	6.633270211	7.317270568	6.937648911	8.003661318	7.932120502	7.525903096	8.492846233	8.321937681	8.176575298	6.076254188	6.529619675	5.807651588
Zm00001d039003	0	0	0	0.691223103	0	0	0	0	0	0	0	0.204653683	0	0	0.213592055
Zm00001d039004	0.142606752	0.107768239	0.011815473	0	0.012527021	0.023295038	0.366599179	0.343902564	0.644870142	1.888110925	0.64739408	9.541586577	0.095748921	0.21886274	0.4506525
Zm00001d039005	20.20056335	21.83913607	19.66866993	10.43952152	10.94410618	10.96154325	9.343216444	9.215446598	9.625639485	1.774168191	2.858164159	1.393090671	5.979902286	5.478864484	6.77808546
Zm00001d039006	1.258065116	1.3392532	0.856793449	3.342027602	2.73030529	3.45003491	4.305468875	4.536731269	4.015758867	1.821027402	4.317333609	1.687022693	6.559634577	7.062196752	8.677435857
Zm00001d039007	2.578687886	2.969047732	2.795835584	4.454683336	5.013922375	4.947774263	2.628682141	2.322965245	2.051289975	0.198038185	0.513046298	0.086160544	1.559983409	1.377350638	1.148255931
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Zm00001d039011	17.06547131	17.02105052	20.46689764	2.038181228	1.739268887	1.193616313	1.211884182	1.591596877	1.62790291	12.13647801	12.28588051	11.48883432	0.246183559	1.515914976	3.233832814
Zm00001d039012	2.089372654	1.939862505	1.732130157	1.464226337	1.469796883	1.462297021	1.728396927	1.324402482	1.396757056	1.053665266	1.455892867	1.168071581	0.996959589	1.102409805	0.996152769
Zm00001d039013	2.83397615	3.307716978	2.768081541	3.803898084	4.084600858	3.45164486	2.748254624	3.527360165	2.623871299	0.469939395	0.88033351	0.230157637	2.166907046	2.83338709	2.872910522
Zm00001d039014	92.31042038	94.87205065	84.38321616	85.23239687	92.19429284	80.13843417	103.767285	103.2593997	96.01682446	173.7547077	138.4040211	159.2617616	91.42704729	87.00179681	79.76461221
Zm00001d039015	59.33265512	59.4711878	49.14625074	5.398830657	5.477464316	5.483483589	5.617123737	5.487261295	5.203834258	8.625657489	11.40653134	10.47710819	14.06739073	13.73969265	13.04503465
Zm00001d039016	10.69673951	11.29679687	11.04747687	10.40131703	14.20004407	10.00743125	13.87605084	14.64973121	12.26084317	3.644751922	12.23381185	3.333029265	14.27437905	13.34397276	17.93529805
Zm00001d039017	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039019	0	0	0	0	0	0	0	0	0	0	0	0	0.017524112	0	0
Zm00001d039020	25.97686179	21.57626726	28.65404251	37.99860281	58.18015752	37.16968891	42.81823666	48.44692697	44.06914112	8.339258453	14.98203548	5.765282766	20.48579386	18.47162894	25.19983245
Zm00001d039021	0	0	0	0	0	0	0	0	0	0.034638491	0	0.027821872	0	0	0.009679003
Zm00001d039022	0	0	0	0	0	0	0	0	0	0.036575918	0.033442996	0	0	0	0.007665282
Zm00001d039023	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039026	0.286430156	0.243756649	0.086588815	0.743410578	0.571220812	1.100169495	0.42515138	0.541390136	0.381889536	3.704782142	0.136669368	0.017151045	0.4764554	0.373399216	0.859206092
Zm00001d039027	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039028	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039029	165.2488978	158.5217483	165.4063457	242.4943693	142.989082	234.4404403	38.32539734	35.18182098	34.87305443	10.14031447	42.31539749	12.64582662	292.0829059	268.2549696	273.4220139
Zm00001d039031	0.299370086	0.041895303	1.116174072	0.663753572	2.01614937	1.996855169	1.010573627	0.6016203	1.353756591	0.504631972	0.293622998	0.110542865	2.791706158	3.026548895	3.691868512
Zm00001d039032	1.800523815	0.752577348	1.03963766	0.218591922	1.816082252	1.044380617	1.517423323	2.084565257	1.532765727	2.549145357	1.06493336	1.244380259	0.035660955	0.122270637	0.138162693
Zm00001d039033	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039036	11.85186819	13.44345417	12.27102482	5.467291484	4.516782312	5.038184233	4.194491408	4.432749555	4.786736059	2.764108688	4.796134696	4.241959855	7.423060575	8.408358908	7.495574165
Zm00001d039037	165.7691921	160.1065971	144.7420266	17.10485292	23.98188506	17.49580608	14.99626291	15.71780307	13.07520937	28.88099201	38.07920057	30.68216843	17.42307574	15.29931378	18.99434824
Zm00001d039038	10.560227	9.845036999	12.55112606	17.11840956	24.92483266	16.37565235	19.95712906	21.00841577	21.87324172	3.0400673	5.91419025	1.497985389	8.195964043	6.863634217	7.744757543
Zm00001d039039	0.029373431	0.05285135	0.031290331	0.104666482	0.287513975	0.097677566	0.161807741	0.177088357	0.196653184	0.503491417	0.037040839	0.111560755	0.33339381	0.524403034	0.805329897
Zm00001d039040	302.2097278	335.1968755	442.9705115	1860.627468	574.9666173	1464.651787	1754.457214	1372.727391	1346.315724	0.596867317	0.657689639	0.147510122	1268.177751	1406.86966	1212.223678
Zm00001d039041	17.04829505	17.43176594	16.1952166	8.589537461	7.888591926	9.363247028	6.547407002	5.519564482	6.152902256	1.792831507	2.694512129	1.942037883	3.414259066	3.466725318	3.051776451
Zm00001d039042	0	0	0	0	0	0	0.010735778	0	0	0.430823996	0	0	0.010281283	0.010071832	0
Zm00001d039043	16.84376058	17.52790307	14.40354657	30.66293536	29.73391961	35.18266708	41.2306167	32.07374733	35.62739524	51.17436696	36.2094134	27.77540842	29.01523811	26.96295173	29.7758216
Zm00001d039044	0.077001318	0	0	0	0	0	0	0.033762204	0	0.028962958	0.114755883	0.178351545	0	0.007673777	0.008093094
Zm00001d039045	1.110009051	1.084210189	1.069833787	1.440859427	1.68646708	0.860353101	1.482337811	1.556935518	1.173384865	0.73420018	0.842710862	0.150565427	1.951927639	0.881581571	1.820221937
Zm00001d039046	4.386250354	4.176596843	4.079067238	4.438777689	4.709521149	4.658179252	3.716307162	3.353220621	3.534275548	0.062364561	0.320752718	0.060527398	1.840633121	1.611049011	1.945230179
Zm00001d039047	9.75981631	10.45942896	9.585918444	11.55474331	10.80126337	11.15079208	9.872511758	9.029319967	8.951531817	1.044213815	3.471589169	1.084704568	4.897930995	4.369953264	4.611832837
Zm00001d039049	0.259580391	0.05449041	0.026883939	0.026978117	0	0.159010748	0.050553281	0	0.026677884	0	0.054556533	0.023962615	3.171060153	4.505551381	2.500919631
Zm00001d039050	2.637486909	2.417732049	1.958967609	3.65916888	5.511088466	4.129922992	4.704917731	5.965243839	5.254446892	10.65430173	5.746621527	8.125405345	0.803348503	0.821199271	0.974330881
Zm00001d039051	106.2057947	113.9077957	87.55122839	10.70070402	9.116960446	9.01651495	7.004137129	6.891181346	7.349415152	21.36077039	27.52268353	24.4456887	9.151609298	8.411890628	7.897601359
Zm00001d039052	5.485115129	5.408187042	5.551656075	3.73998154	16.92791464	4.810920932	33.35779022	38.4218374	32.97775744	77.11017757	57.60595075	37.89929089	3.720012096	4.03901911	5.620911891
Zm00001d039053	3.274017185	1.682889596	2.914253842	10.42874469	47.69882605	14.64600486	46.04268539	55.43878497	45.96511434	67.59690013	62.65491237	47.39355412	19.39796696	18.00366454	19.46825914
Zm00001d039055	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039056	0	0	0	0	0	0	0	0	0	0.03571001	0	0	0	0	0.02993525
Zm00001d039057	0.170181335	0.214344021	0.141001243	0.49523315	0.024915431	0	0	0.091199979	0	0	0	0	0.507835676	0.041457501	0.021861427
Zm00001d039058	79.58464551	84.05235816	101.2040654	73.88406951	58.47741349	76.50279273	34.18039437	35.22116491	27.41717433	0.028310639	0.20708546	0	43.78233606	42.01278899	26.79393668
Zm00001d039059	29.05594869	27.24415454	35.72859719	61.56143289	45.63767565	68.46779671	49.18230465	40.80042579	50.09360812	5.24139559	6.519198925	2.903955737	63.35746472	63.84076589	59.7353026
Zm00001d039061	0.879878723	1.199568363	0.73292999	3.689287048	1.940593058	4.16120307	6.541023202	5.046088533	4.554453363	0.456692728	0.16702983	0.04541565	12.32353765	12.89874839	13.97547351
Zm00001d039062	0.077007479	0.084867304	0.026917065	0.096040387	0.215620882	0.182792852	0.081547311	0.124771878	0.112778749	0.076335569	0.091039595	0.07730801	0.134646627	0.121351309	0.130764508
Zm00001d039064	30.62293614	31.21556048	33.18151003	29.95035583	25.19044433	27.30627742	22.19236821	26.55293674	22.29989356	11.27829545	22.58402467	11.94510209	24.55496274	22.72982472	38.87032084
Zm00001d039065	109.5800804	119.7240692	99.48341306	10.72487622	14.10590204	11.51415038	10.92827118	12.40131681	12.07615424	34.98986018	47.54096288	45.94540971	11.24402775	8.555555672	11.19265361
Zm00001d039066	11.89308909	14.13515014	8.770114073	7.47722806	4.863802543	9.021834198	5.178088108	4.759539666	4.552371616	8.519044276	7.865651528	6.187690507	6.380906856	5.444674194	5.709896699
Zm00001d039070	28.17915999	29.08932181	34.76608703	41.58193857	25.23187959	33.63364987	14.70201507	16.71281742	11.9152181	0.500764857	1.811579303	0.034975456	76.31609111	81.63180665	85.67261184
Zm00001d039071	0.10015556	0.141914586	0.140032828	0.046841126	0.197954465	0.490817059	0.27795046	0.060382404	0.061759791	0.017266379	0.26838617	0.13868473	0.378260845	0.439176167	0.173690243
Zm00001d039072	7.411707899	8.003993622	7.621350741	6.669435823	5.664339596	6.980021936	5.944719184	5.219340217	6.227723809	7.575379013	6.628404778	9.354653816	4.548217492	4.41200704	4.386675538
Zm00001d039073	2.505325654	2.62115464	2.526712552	5.690044985	5.494858986	4.736434907	5.686593012	5.395068788	4.580349104	1.015602731	3.058360051	1.17040818	3.493228572	2.562160958	2.433798931
Zm00001d039075	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039076	16.7412654	21.66972095	16.69256818	55.3582124	22.77541368	36.04491594	15.15274008	12.06927724	10.25429235	0.573364939	1.229978643	0.566806925	93.67006774	104.5225794	105.908184
Zm00001d039077	0.253170999	0.239152357	0.530957805	1.14457159	0.479535527	0.930507341	0.332809103	0.267108272	0.078057514	0	0.039907094	0.070112836	21.00009259	10.33817647	19.62920874
Zm00001d039078	0.006672149	0	0	0.133139443	0.184622246	0.122614437	0.077964065	0	0.024685832	0	0	0	0.059730795	0.080456688	0.115708727
Zm00001d039079	24.03717221	20.85233029	26.01320743	61.02359778	130.8216215	71.27194112	82.90017922	109.2969736	98.8240983	155.1127223	164.992854	166.4736771	27.46803832	26.70626005	38.55492205
Zm00001d039080	0.018375314	0	0.570922371	0.04583379	0.48424345	0.427733213	0.25765866	0.088625786	0.045323718	0.12671294	0.23171861	0.223908733	0.143937968	0.201436649	0.40364305
Zm00001d039081	86.85947758	82.01001634	76.0619094	9.287225359	24.59938171	9.412028275	24.77323852	25.00554485	31.28760487	22.57529392	32.72381703	8.413540286	2.364143703	1.847042869	3.184376569
Zm00001d039082	0	0	0	0	0	0	0	0	0	1.028448299	0.313452083	0	0	0	0
Zm00001d039083	0	0	0	0	0.172794785	0.281160491	0.114926885	0.31624741	0.566057367	9.178757203	12.27875247	27.20176262	0	0	0
Zm00001d039084	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039085	0.701088919	0.766153253	0.75599422	0.398608798	0.36679798	0.442096248	0.421658592	0.335655127	0.203444018	1.720543849	0.975105463	1.210636114	0.807615748	0.881581571	0.953593488
Zm00001d039086	0.218831882	0.101544051	0.178924281	0.143640858	0.091055719	0.056441894	0.00672908	0.041662332	0.042612695	0	0	0	1.411281548	1.003755259	0.719051265
Zm00001d039087	0	0	0	0	0	0	0	0.01370274	0	0	0	0	0	0	0
Zm00001d039088	0	0.099449495	0.07009344	0	0	0	0.065902793	0.081605922	0.01391124	15.02790378	11.89152375	55.20448661	0	0	0.208657585
Zm00001d039089	25.77578995	23.05049018	31.72965771	44.29551178	97.77303071	48.17788136	59.12326018	77.7046155	67.4524861	38.14432659	50.10818514	23.42433034	58.61832281	57.59685074	59.52982868
Zm00001d039090	21.73325997	42.51898564	10.26017046	9.305947303	14.7989188	9.426329323	12.24888348	13.78369486	12.43436295	17.0477364	16.56427026	10.21780374	5.742373488	4.747970243	6.679037678
Zm00001d039091	27.86249476	29.74107331	20.15407404	19.96013382	30.58208242	21.07473383	23.64243887	23.59628288	22.6830916	24.30940191	25.39385458	12.27164119	14.24189316	13.83924222	17.82307037
Zm00001d039093	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039095	7.216696651	6.389617681	7.587578201	4.772463348	6.23476096	6.614059148	9.434616246	7.667828906	8.332299633	22.62148282	29.07349985	42.63642157	1.990055251	2.088764697	3.42367474
Zm00001d039096	6.269086045	7.476203081	6.383066011	9.260975556	4.721727756	6.979205332	2.034077317	2.288054997	2.42244678	3.547119265	5.680701004	6.38869285	2.575350932	2.87961402	3.571832495
Zm00001d039097	1.294624424	0.891386058	1.351528958	2.152799228	3.684652431	3.468254634	1.492598402	1.748345054	2.959089389	4.261394573	14.75836892	13.93970652	0.154530806	0.227074041	0.379179835
Zm00001d039098	3.72278216	2.51661865	4.130034864	2.728027182	45.75519508	14.73923628	36.12770817	47.60186418	49.62152183	1008.272253	539.475147	1118.703148	0.353043456	0.18445399	2.164180422
Zm00001d039099	14.20902573	12.12101388	17.13135907	19.34470621	59.56134277	79.41099915	7.706287803	7.303645532	10.19305075	32.83014222	29.83959998	13.54527728	11.37097176	5.957520178	8.410131888
Zm00001d039100	1.878068498	1.043573922	0.789464534	0.482227027	3.020505203	0.879752395	3.098150196	3.296879245	3.167715835	8.532311816	5.990417591	11.96252455	0.27815545	0.75691347	0.063861867
Zm00001d039101	0	0	0	0	0	0	0	0	0	0.046990369	0	0	0	0	0
Zm00001d039102	1.31494311	0.985818877	2.425382828	3.60526493	10.78081173	4.986382849	9.706847489	14.0935296	10.69542863	27.90810913	23.21459627	30.64712331	2.055377676	1.395725326	2.256249509
Zm00001d039103	1.13236483	0	1.167034529	0.757785328	40.9769742	8.256137861	38.75914985	29.50540415	41.72528923	103.7209155	25.42444675	62.6885238	0.030906161	0.24221231	0.447033069
Zm00001d039104	174.761307	175.7247949	204.2400845	219.1485806	118.1799596	207.940874	275.6718209	225.6939089	266.1104287	27.27613617	41.97455812	21.59437209	311.1866459	328.5245786	285.0633543
Zm00001d039105	2.064303759	2.419442791	2.131996946	3.539951385	2.795579242	3.764310368	8.034879541	7.403861988	6.435365925	1.206027279	0.554375233	0.555805353	3.502464202	3.179671523	3.441810877
Zm00001d039106	36.53765969	28.74631345	47.0975124	50.16958984	67.32584589	38.66666802	44.38197378	51.93619396	42.38033102	5.14762041	15.34636481	3.104913193	22.40373394	14.73606014	25.77537763
Zm00001d039108	0	0.07502819	0	0.148585358	0	0	0.174017832	0.107741152	0.018366474	0	0	0	0.066660347	0.408139616	0.327135544
Zm00001d039109	0	0.020922199	0	0.103585479	0.218880393	0.020351315	0.17469445	0.240355717	0.122919244	0	0.041895175	0.018401425	0.037177521	0.145680551	0.230461415
Zm00001d039110	23.97075697	24.18618289	22.78514881	8.771474681	7.774766509	7.454816037	8.187488686	9.592076416	7.796727396	4.068877022	3.122441754	3.414049295	11.73183584	14.69812202	13.91764184
Zm00001d039111	20.09099586	21.44842007	17.75296788	19.9156357	15.7741107	18.24572759	18.15543256	16.69750249	16.50141779	9.162183898	14.54572605	7.76796902	17.25304127	17.31184859	16.79142164
Zm00001d039112	0.751518122	0.503478647	0.417314205	0.558368137	0.67420281	1.292915463	1.04630511	1.233919717	0.492994824	1.12467738	0.584743945	0.673083223	13.86710649	11.81422413	11.88671013
Zm00001d039113	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039115	10.56536828	12.50425181	9.371826651	12.31401158	12.43813889	11.63134176	11.63247056	12.13434722	11.05628929	8.922401167	11.01435793	5.528897902	9.971376173	7.627254838	9.470942946
Zm00001d039116	0.243242724	0.912842984	0.252947219	0.464329245	0.085032728	0.115553199	0.33063388	0.317237836	0.128565317	0	0	0	5.993876244	5.692187178	5.899918231
Zm00001d039118	3.898296144	1.301699302	2.591412098	15.46726287	11.39603378	23.72423491	19.49184349	8.52641184	8.542018016	0.025006479	0.182916335	0	117.4376736	130.3302601	106.1127595
Zm00001d039119	0	0	0.043068821	0.108049239	0.502287502	0	0.222716358	0.250713251	0.192324217	0	0.021850272	0.076777554	0.387795938	0.398890521	0.400654298
Zm00001d039120	8.149038266	8.486651739	6.626888593	15.85283537	10.64409632	16.86706192	12.55905747	10.07939736	10.84352941	0.080352486	0.198049213	0.036478941	7.971006463	6.817270122	6.009547224
Zm00001d039121	0	0.015554625	0	0	0	0	0	0	0	0	0	0.013680553	0	0.027076579	0.028556119
Zm00001d039123	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039125	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039126	0.021944196	0	0.036363081	0	0	0	0	0.008819902	0	0.010088221	0	0	0	0	0.008456828
Zm00001d039127	13.71081238	13.99713598	13.32224343	8.274385355	9.839962661	9.070000855	8.139548187	8.542348249	8.516273385	5.883712551	8.313906963	3.837435851	6.3683739	6.546915156	6.757749301
Zm00001d039129	0	0	0	0	0	0	0.086937888	0	0.137636106	0	0	0	0	0	0.043009012
Zm00001d039130	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039131	17.94922115	19.61856267	17.31263572	57.49851606	47.03918712	60.98511135	81.33986772	71.66731264	82.22914408	59.58440123	59.6881006	47.43160072	23.00969765	21.04467843	29.2007538
Zm00001d039132	0.971729862	0.379830214	0.291506246	1.901428259	2.163428824	1.867856647	1.331236412	0.545439581	1.115763286	0.184851818	0.04225457	0	0.843670023	0.220395393	1.394630477
Zm00001d039133	1.265854993	0.683292449	0.872006892	3.031141313	3.688551534	2.685178326	2.79770954	1.761824358	2.149926953	0.169594208	0.264527023	0.016025791	1.197981673	0.888111804	2.500496195
Zm00001d039134	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039135	20.54858236	12.97204434	18.11091238	15.09325173	14.91256971	15.46073736	14.4924345	20.79167436	15.91343953	11.14256969	13.68243221	11.70499121	18.75426611	19.23225631	18.25677438
Zm00001d039136	0.411402873	0.571308409	0.117990623	0.065779976	0.180694547	0.16800827	0.073957578	0.050877766	0.039028757	0	0	0	0.460373025	0.115639558	0.439050335
Zm00001d039138	29.12458095	29.67479725	27.91395304	30.40126681	35.20088327	29.1059735	28.7283099	29.65980716	31.81192417	15.54893402	21.71336677	14.35656856	17.79837397	18.32545877	18.27728391
Zm00001d039139	0.849624707	0.403026733	0.959923715	1.472452121	32.85820444	3.501231011	24.61336863	39.15543026	41.98095637	27.33121415	41.04729662	9.888456307	0.345729938	0.29030289	0.727143897
Zm00001d039140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039141	2.280439353	2.060819144	1.594201916	3.683064221	4.154154525	3.08021988	6.894894179	7.286680566	5.884976667	4.0335931	3.335820336	5.368105353	8.255347527	10.46832161	11.73242097
Zm00001d039142	1.780992012	1.612943193	1.876138745	12.5232017	14.86254896	15.21137062	60.33176634	56.70345972	49.81773866	2.093687656	1.721847517	0.74218699	22.48279426	36.93728341	48.59404753
Zm00001d039143	0	0	0	0.025508932	0.02156057	0	0	0	0	0	0	0	0	0.01345322	0
Zm00001d039144	3.799907346	4.294785429	3.674539134	7.3485312	9.805537833	7.322095544	9.982733498	9.69109647	9.288182135	6.956100775	6.911896362	5.079261406	4.087083644	4.506465546	5.910423172
Zm00001d039145	48.06485619	43.57097403	47.50876503	45.87033317	62.80506667	48.60643414	66.27398572	57.78820433	59.39121974	82.78738571	72.1822258	77.00094809	36.88535473	35.37445329	36.09705729
Zm00001d039146	0.411542284	0.986108398	0.748486773	8.813009985	9.099510393	8.104022083	9.69984593	10.71122662	10.58418624	0.650645828	1.620192853	0.26686119	8.255825303	7.988604804	10.28190124
Zm00001d039147	25.28210429	26.22721401	24.72145656	11.2072031	9.635921709	9.988383335	9.518963317	9.146130087	10.20850665	5.01801488	6.288599511	4.931824695	9.12699656	8.836760408	8.185491347
Zm00001d039148	1.905008005	0.940927307	1.067718427	2.422428508	3.469882162	2.242370149	3.426296996	4.278736725	3.431971347	0.283338443	0.847862192	0.020689033	2.758754872	2.29307556	3.84348982
Zm00001d039150	0	0	0	0.075610509	0.85475948	0.111413296	0.233778102	0.182753838	0.127107402	0.083613683	0.0840969	0.006715908	0.033921396	0	0
Zm00001d039151	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039152	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039153	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039154	9.90546251	10.22904687	10.15048637	10.59137168	12.10233242	9.668620463	11.88825075	12.30579346	11.58881787	5.06694597	7.011769212	3.330196643	7.937852167	7.931044951	8.348082653
Zm00001d039155	4.01134975	5.07099904	3.571478838	1.647031606	1.766192137	2.102731133	2.161573451	2.045639618	2.128902903	0.266042161	0.505220344	0.306832439	1.040567059	1.550741533	1.155128089
Zm00001d039156	123.0357208	118.4168689	116.8667615	31.71640503	26.56316585	28.26044981	7.694850566	7.187170784	8.838606934	25.17450248	21.53115817	18.41899264	27.24696414	25.62350341	22.89010279
Zm00001d039157	22.41259882	22.32275824	21.90210684	32.97450317	36.79425974	31.47681729	29.98065511	34.36567269	33.51055458	16.33029517	21.1292691	9.955508271	39.10502371	42.60212217	41.89757814
Zm00001d039158	14.30576377	15.20282452	15.21630975	17.30196564	21.11117551	17.33217155	21.95697526	20.17078019	20.70203836	27.4469852	24.73229518	14.48939438	11.23184665	11.16112026	12.42123417
Zm00001d039160	14.71735117	14.63160833	14.50574757	13.14842886	12.73920355	11.90337376	13.75679418	12.79011469	14.76565893	10.35147369	10.43647464	11.28935637	17.85224163	16.94136292	13.66975971
Zm00001d039161	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039162	59.83289588	57.40676048	58.3657489	47.41794582	56.56926819	47.85253826	51.93240733	54.08668015	56.00176021	77.63825626	66.17290827	57.66562803	36.24234587	35.79017614	35.30339019
Zm00001d039163	2.381119869	2.685814739	3.082887336	8.172296071	7.274353989	7.464369938	7.068447635	5.577258204	6.586222534	0.445863595	0.666388581	0.254816636	4.807320543	4.402696138	4.262322218
Zm00001d039165	10.83434327	11.31906617	10.98094059	8.042087928	7.128290127	7.713679416	6.774463961	6.830923167	6.297611305	3.681344365	4.995365402	3.024493939	5.935487136	6.010586893	6.393686037
Zm00001d039166	20.28250243	18.70245018	15.55297939	2.579384675	2.549653511	1.28839478	3.211351838	4.049243996	4.366417237	21.89100551	17.14261406	17.59077115	1.412173823	0.853099704	1.240148332
Zm00001d039167	70.42123171	75.47154538	75.28298095	121.3506992	81.30919728	117.3506753	58.6151283	51.26027354	58.40433332	12.60597506	21.85474229	9.903203442	61.40871019	63.7587436	64.26085098
Zm00001d039168	2.032210448	3.257642918	1.377620251	9.677123449	8.520067183	5.88483021	5.181028199	5.569052779	5.468245296	2.038365998	1.397826858	0	4.961691809	4.253035415	3.41747288
Zm00001d039169	0.047718094	0.270455022	0.118608375	1.755602135	2.750807031	2.0169112	2.4533781	3.250849517	3.207305596	0.263244474	0.40617482	0.013214985	0.320388476	0.496947377	0.468933342
Zm00001d039170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039173	71.99817835	71.12237708	54.30939833	276.0710816	202.8659578	180.3217425	243.1097726	260.2780433	323.5861721	28.12428801	51.637918	16.31441879	52.02844979	46.76301892	44.04775688
Zm00001d039174	0.039228792	0	0.012188414	0	0.193836331	0	0.022919422	0.011825248	0.02418999	0.175834657	0.037101574	0.010863969	0	0.010750995	0.192753806
Zm00001d039175	0.244401947	0.076956289	0	0.076201877	0	0.130998799	0.01784898	0.110509919	0	0	0	0	22.18717047	11.08527262	27.24957321
Zm00001d039176	0.093460771	0.039238062	0.122606284	0.446814175	0.246296554	0.178114584	0.485372942	0.350598628	0.275350622	0.100253854	0.09166658	0.040262289	2.713415393	3.722530916	3.889922606
Zm00001d039177	0.200892068	0	0.026280974	0.36922255	0.459750394	0.42747205	0.284161833	0.203983248	0.195596554	0	0	0.011712585	1.159518852	1.147487845	1.589138104
Zm00001d039179	2.715357342	2.726089045	2.875792187	6.046577231	5.17496506	6.55694292	3.641931739	2.657242915	3.494388185	0.162822845	0.367227973	0.095905641	1.858373055	1.889538392	1.929091628
Zm00001d039180	15.98527015	14.41318391	19.75923142	13.28836398	9.07898359	12.53187697	8.744121277	7.385009509	7.993615281	0.158777983	1.03076243	0.051012623	16.16815152	13.6427996	16.34487345
Zm00001d039181	5.589965659	5.262729122	5.409610412	29.42925251	15.08688255	27.11140887	8.943543022	6.77413074	6.720588187	0.814382137	1.85092746	0.753792297	30.45865108	29.58538431	29.73261151
Zm00001d039182	17.23488045	17.37173624	16.67481174	16.01289719	20.05344801	14.72536712	17.57434534	17.91903316	16.80343804	7.75862208	10.4735637	6.052630502	11.43998016	9.408751007	11.33851664
Zm00001d039183	2.818224171	2.949006265	2.317308816	6.594625833	7.708167571	5.580137723	7.700520049	4.00739877	5.92440683	3.189920761	4.980804186	2.420261511	3.376671052	3.783779307	3.620279703
Zm00001d039184	0.025474349	0.181815208	0.105531986	0.116491844	0.089509845	0.405724319	0.158756144	0.225252619	0.031416937	0	0.01070799	0.056438655	0.028506614	0.102394878	0.117807295
Zm00001d039185	0.584576657	0.482601379	0.463991873	1.170169762	1.126270572	1.185619486	1.027486818	0.764098855	1.011746547	0.006775022	0.16725704	0.005441744	0.769600059	0.737766251	0.738323956
Zm00001d039187	0.097651671	0.204987735	0	1.055486707	0.428901341	0.957093265	0.152141304	0.15699425	0.240863186	0	0	0.03605803	1.457004738	1.034808843	0.940822147
Zm00001d039188	1.569209823	2.114994162	2.094146158	12.27670005	8.453770781	15.69211363	7.429212609	6.423398783	5.220232617	1.07810654	0.759401066	0.481079178	15.77804686	14.31403198	13.21502458
Zm00001d039189	20.2332438	20.18260826	18.22329363	17.30324946	17.62029142	17.7687174	19.55292334	16.83354871	19.77359815	10.40855086	13.00177912	10.55004069	13.20635315	14.46199574	13.81295117
Zm00001d039190	8.888901142	12.32498497	10.25576292	13.35488592	7.380201595	9.711949242	5.193340529	4.998595433	5.048510688	1.129142382	2.441767892	0.95012223	14.77502523	14.90141016	12.54548772
Zm00001d039192	4.798785861	4.477377635	3.28236787	8.727275401	10.14493159	9.028208352	8.576400173	9.610566493	9.015491381	5.073500881	7.114510739	3.467728247	9.394193548	9.519484307	10.80302377
Zm00001d039193	0.215494647	0.315321884	0.256001909	0.786505287	0.65558077	0.803678802	0.418441487	0.336260285	0.171965371	0.100524424	0.023977559	0	1.269559761	1.153371902	1.557132622
Zm00001d039194	1.078740183	1.521718523	1.483665365	1.955253569	5.401314102	3.630006544	62.0253927	69.18937269	55.06023459	0.624859435	0.616681111	0.573590122	14.16383354	26.18172053	30.82174926
Zm00001d039195	0	0.079031416	0	0	0	0	0	0	0.058039322	0.02163498	0	0	0.035108548	0.034393314	0.009068165
Zm00001d039196	4.628777839	4.485789084	4.416026669	7.078013036	7.706987247	7.272316071	8.980710151	9.596362583	8.825576938	3.999175409	5.930930719	3.464189295	6.957252728	6.960626651	6.016251614
Zm00001d039197	93.90704429	98.5056987	90.81091231	71.6382138	51.49929088	81.98970328	158.4600762	138.8045985	139.9992986	11.42317155	16.04072077	5.282210575	357.9428826	350.0012139	319.2550972
Zm00001d039199	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039200	69.48232818	72.11942796	68.54919323	70.51396728	79.66030592	70.28345696	65.46683634	60.65578865	64.28610706	6.840748883	15.60045892	5.944005687	34.9707612	30.84520957	34.51238795
Zm00001d039202	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039203	0.22926719	0.435122138	0.507416602	3.439018874	2.176726035	3.72074679	2.231265992	2.086584498	2.238760508	0.147269953	0.669317049	0.344427493	4.987053087	4.4172239	5.206876753
Zm00001d039204	0.192914872	0	0.063934712	0	0	0	0.015028069	0	0	0.035474855	0.016218123	0	0.172702349	0.056394682	0.074345306
Zm00001d039205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039206	0	0	0	0	0	0.024064845	0	0	0	0	0	0	0	0	0
Zm00001d039207	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039209	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039210	0.034092853	0	0	0	0	0	0	0	0	0.047019665	0	0	0	0	0
Zm00001d039211	6.575028266	6.945490863	6.143447856	6.340948814	6.876273109	6.828470884	6.845218962	6.679377462	7.182590718	4.962472774	5.44144885	4.810298445	5.197992347	5.70085502	5.454544435
Zm00001d039212	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.020500405
Zm00001d039213	2.38068039	2.701596972	3.002657931	4.409526695	5.543919578	5.096934176	4.021252059	3.851096015	4.622081476	3.364621806	4.191070527	1.253327381	4.642318543	3.682123025	3.569933416
Zm00001d039214	1.968818404	2.381683357	1.563614168	4.387819252	3.001206409	4.516481627	1.836930185	1.329289115	1.913986299	0.110829599	0.190005855	0.030600312	2.104815165	2.122499935	2.131055485
Zm00001d039215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039216	1.232271085	1.625259896	0.5056741	3.102666969	2.221096231	2.620612511	2.83906541	2.789451402	3.154160764	5.77190372	14.26393558	8.962995978	0.74151134	0.573477807	0.698896452
Zm00001d039217	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039218	0.028781545	0.015535913	0	0.087173801	0.054177012	0.005037333	0.019217849	0	0.035495627	0.068047707	0.176287337	0.013664096	0.809787896	0.806812848	0.537159929
Zm00001d039219	4.582048264	5.613855879	6.284212924	7.053631926	8.784839525	7.556229475	8.651213069	9.183088308	7.437063294	10.57251113	10.61156961	7.592931973	5.253200643	4.721895809	4.835568076
Zm00001d039221	2.596890588	2.811260361	3.560834761	4.04172002	2.785502117	3.575952858	2.420049867	3.480614274	3.242389037	0.162797284	1.041969837	0.439828715	7.721324557	11.10488308	7.754028684
Zm00001d039222	5.319867557	6.210120224	4.544522368	8.046974053	6.123778597	10.33272604	6.57463091	4.209992479	4.34966909	0.227755304	0.029749551	0.013066758	5.79470521	5.805963872	6.286867441
Zm00001d039224	2.825560634	3.732404273	2.205465564	3.061939772	1.066983299	2.374640662	2.093740444	0.145420005	2.857878882	0	0	0	0.607314829	0.632716704	0.348584387
Zm00001d039226	0.108358525	0.181970618	0	1.779344017	0.237963756	0.907152467	1.223963729	0.87103811	0.311817598	0	0	0.040011552	2.708065609	3.999142818	3.403365082
Zm00001d039228	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039229	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039230	0.180359287	0.227163189	0.268981263	0.629821579	0.760479423	0.57450849	0.75869938	0.456691716	0.511595948	0.024874519	0.045487769	0.019979383	2.01827833	1.700359177	2.272867435
Zm00001d039231	2.699415615	2.211778487	1.935948061	2.407295748	3.340148874	3.153056722	3.284281765	2.619070738	2.452099735	0.493723116	1.793531559	0.5251764	1.791868353	1.893247895	1.745015345
Zm00001d039233	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039239	0	0	0	0	0	0	0	0	0	0	0	0	0.010485641	0	0
Zm00001d039240	0	0	0	0	0	0.071884687	0	0	0.120603884	0.026974085	1.405825867	0.086663076	0	0	0
Zm00001d039241	1.597673787	1.018873947	1.168735523	0.113499652	1.758749287	0.433594397	2.067748865	3.072535391	2.057669966	2.482373977	2.512021688	1.142548814	3.372017621	3.092708128	3.343537168
Zm00001d039242	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039244	0.025553708	0.03218499	0.158791119	0.254955811	0.202024557	0	0	0.400555422	0.126059237	0.599127202	0.096672138	0.198150668	0	0	0.118174296
Zm00001d039245	19.83333609	14.49130494	17.83232048	9.968362797	37.67514209	15.09883659	31.45399305	33.81230538	33.142617	173.6866479	97.14199144	176.7777789	4.247283816	4.323924851	5.076444813
Zm00001d039246	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039248	0	0	0.020495356	0	0	0	0	0	0	0.022744132	0.020795977	0	0.073816887	0	0
Zm00001d039249	0	0	0	0	0.230946876	0	0	0	0	0	0.184186587	0	0	0	0
Zm00001d039250	12.76257185	11.95183774	10.26625363	5.627586284	9.673604117	7.324582709	7.987418474	8.964324231	7.818957491	11.33571665	9.90901582	10.34026643	5.049445799	3.203390435	4.118583961
Zm00001d039251	1.006796296	1.624011355	1.053683706	1.630119602	1.46624412	1.233463219	2.084571746	2.726101701	2.962554945	1.778303153	2.271920138	1.330513348	3.340381017	2.749532185	2.123778366
Zm00001d039252	15.49669167	15.87089475	16.59893449	14.20028558	19.54529368	17.49729222	29.8166265	34.54439036	30.00377867	23.28333842	29.93377063	23.70581653	29.40672242	25.4388365	24.65767416
Zm00001d039253	6.512350466	6.632930723	8.458801556	25.09878834	30.25026777	24.64124255	19.03793982	20.58069073	19.03502613	15.27197087	16.18738789	13.63384181	19.42902663	16.62345988	17.26000114
Zm00001d039254	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039255	9.318129961	9.75616297	9.762822404	6.024641543	7.099347309	7.99667444	7.667689205	6.610554818	6.742942093	3.149342226	4.065295578	1.857224723	8.211557814	7.65705565	6.844583829
Zm00001d039256	54.11849038	49.05381741	40.48835687	11.70409198	13.71715824	15.73630668	18.51506858	18.81030208	20.01349202	17.10241573	18.78430934	13.16017141	5.464991454	3.809656529	4.548817135
Zm00001d039258	271.5336275	310.0961162	320.8689294	708.3477765	261.7834008	615.4553853	236.9154411	160.4020591	197.8626167	6.853242808	4.748705214	0.852437734	1962.574912	2201.519811	1726.098788
Zm00001d039259	1.950838998	1.547772558	1.66088374	4.157176253	5.707761219	4.535439151	8.472048359	7.918066726	9.964699433	4.554831887	5.830560942	4.68794902	1.426718684	1.305037887	1.562821867
Zm00001d039260	93.72644882	89.35990861	96.02806953	59.40733488	53.86489038	70.69269992	65.85784844	57.04530741	64.38931462	21.66732243	26.15217708	11.51764497	58.16199766	53.11862213	54.47740866
Zm00001d039261	0	0	0	0.05007392	0.132260325	0	0.02345791	0.024206162	0.049516661	0	0	0	0	0	0.034814564
Zm00001d039262	2.754651611	3.148244462	3.23329529	5.025982914	7.035262298	3.999792749	6.258798058	5.617816624	5.074903439	0.328318901	0.964917794	0.13185399	1.636412037	1.398030476	2.53600716
Zm00001d039263	24.73034622	28.24252849	29.80741781	39.81193514	44.11830322	41.85204978	34.03076308	35.05490711	30.85499245	14.01250174	20.72633843	9.977247897	34.90574812	33.91573367	37.43585017
Zm00001d039264	0.736889204	0.146544423	0.542254779	13.84570533	17.41339445	21.9995693	20.68798033	15.80631468	14.95914125	1.738393697	1.992977253	0.622960004	1.974706421	1.328624707	1.793567327
Zm00001d039265	2.291522115	2.501901582	2.855978164	11.68252381	9.930715669	11.83414464	15.04941904	11.95236137	15.22721963	1.137023009	0.916839902	0.086292721	7.031812038	6.077303533	6.52196139
Zm00001d039266	0.976175746	1.533113574	0.821649787	1.339486112	1.000070935	1.23688598	0.900815701	1.162656438	0.95958413	0.348920716	0.198643691	0.12690815	1.888281192	1.881210115	2.055748951
Zm00001d039267	9.203876924	10.63649237	10.91824636	10.55087078	8.649803587	8.985998701	7.032947084	6.87864059	6.74970174	10.10543493	37.69010591	20.13451987	13.57082181	11.9009896	16.06081423
Zm00001d039268	0	0	0.051486817	0.258335907	0.136468609	0.177642311	0.048408597	0.249763579	0.102184382	0.028568008	0.078363021	0	0.092718483	0.090829616	0.167637401
Zm00001d039269	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039270	19.83130415	20.10321924	14.81345594	16.10769818	10.06301689	9.426647232	46.46617146	47.03713395	42.0804527	36.85703746	44.15369002	53.3097133	104.2582071	106.9792591	103.942409
Zm00001d039271	11.04925227	11.92583424	10.17970318	13.37484964	13.20626853	14.40552045	16.35457375	15.15745131	16.53250553	5.347820032	8.084388145	4.058135477	11.99254224	10.50134633	11.55335696
Zm00001d039272	2.249830216	2.541447317	1.961635829	1.968507657	1.940808898	2.407499322	1.363755687	1.49203072	1.33530735	1.04722429	1.010719754	0.689265604	1.38863154	1.294830016	1.414353973
Zm00001d039273	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039274	0.955330927	0.968675642	1.63734314	3.157120256	2.353980217	2.59434085	2.28499812	1.829751347	2.352122582	0.523218316	0.922010921	0.462277768	2.477716684	2.241983807	1.949808805
Zm00001d039276	6.746973041	6.509250845	6.747204442	17.09605975	11.01899702	17.69990254	19.71545818	17.811376	14.98750104	0.913449309	1.607141768	0.552119282	19.70806567	17.93879367	17.46490025
Zm00001d039277	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039278	23.51060228	22.37848895	22.56894193	24.37135394	29.27413068	21.98398634	30.70146083	33.80778323	30.55422891	31.70864613	41.48689993	27.33586379	17.05322212	14.69681792	16.02108836
Zm00001d039279	10.27957261	8.731805406	11.47565197	20.77698298	25.23908614	23.70505586	16.21926068	16.39431756	18.27927826	0.453341509	0.82902081	0.165512268	2.775474599	1.899976893	2.245634502
Zm00001d039280	198.8102873	188.3471432	196.7929277	99.53675472	103.1992723	107.6941814	151.1134695	139.679431	145.2488688	140.6474275	158.2884978	145.0114934	49.5274916	46.99226122	41.82403064
Zm00001d039282	0.118247532	0.206215206	0.237394308	0.102096826	0.23970534	0.23401981	0.116914974	0.372900513	0.157049848	0.100358672	0.160584234	0.13098925	0.091608082	0.01994263	0.189291163
Zm00001d039283	556.2682011	628.9929459	436.8753746	157.4662492	158.6511048	177.4807505	268.4995487	229.3679143	259.3842109	811.9019657	899.1040422	1010.710768	122.4699309	122.5599131	136.5012598
Zm00001d039284	28.55985287	28.31240211	27.91429101	21.39242152	25.4568032	20.11983905	24.56682405	28.02200569	30.03497436	15.74878236	25.5988194	14.15317805	13.60249503	13.05847608	13.49757237
Zm00001d039285	34.28506424	36.90044723	30.97378029	30.51179889	41.64671372	32.62148833	42.55358617	39.87213377	37.97007294	52.65732994	63.22834306	53.14832945	23.86012346	21.51382548	22.80881893
Zm00001d039286	0.028304832	0.035650041	0.035177329	0.035300559	0.186478844	0.034677292	0.066148393	0.136516739	0.17453854	0.93688872	0.892332535	1.160127915	0	0	0.032724249
Zm00001d039287	6.968794053	6.062931595	5.801978875	10.09843572	12.12409742	11.03555996	12.91341761	13.37203945	14.02944868	11.41445246	12.95279942	12.25283274	6.844515879	6.85372679	6.326803981
Zm00001d039288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039289	1.70890424	2.194574571	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039293	0	0	0	0	0	0	0	0	0.016306018	0.182348989	0	0	0	0.014494088	0.03057217
Zm00001d039294	4.718152895	6.229936513	5.329909276	9.031484196	9.418142853	9.052918253	7.685488566	7.024278804	6.869980896	1.786447177	2.530544678	1.152370024	7.254982353	5.966796815	7.953341861
Zm00001d039295	0.10429932	0.010105029	0.079768309	0.120071619	0.074000584	0.176927452	0.06562433	0.058043649	0.059367687	0.177041178	0	0	0.053868133	0.017590243	0.102032824
Zm00001d039296	2.898989797	2.851610197	2.753245951	3.009747107	3.027387148	2.842819621	4.641758503	4.955049049	4.08976515	2.576561364	2.246424052	1.676523697	2.525052982	2.50198721	2.511960555
Zm00001d039297	0.098001677	0	0.243593545	0	0.613375036	0.060032732	0.486688581	0.177251572	0.060431624	0.033790117	0	0	0	0.02685822	0.056651656
Zm00001d039298	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039299	16.77833254	11.99404893	22.52200379	39.77674768	76.56995443	33.33365364	33.1075552	43.39810947	34.67364631	1.714080499	5.676024211	0.837219611	17.7042185	14.54501289	26.17473547
Zm00001d039300	4.155955865	3.464887962	4.201408402	2.72694414	3.861863483	3.035970185	3.518957957	3.769571551	3.9244088	2.352583262	5.053063756	3.590260725	3.841990601	3.750121604	3.115982461
Zm00001d039301	0.037455435	0	0.093099451	0.16349478	0	0.011472008	0.054708346	0	0.011548235	0.284114713	0	0.020745716	0.324832221	2.022203205	3.35602859
Zm00001d039302	0.053850257	0.008478075	0	0.121726964	0.172954307	0.020616854	0.066856777	0.186677062	0.083015377	0	0	0.003728304	0.015065042	0	0
Zm00001d039303	0.238538433	0.394327551	0	1.394506806	1.178660174	1.07764318	1.236873962	0.611198988	0.937711639	1.048635943	1.090416735	0.611059742	1.184511485	1.519935074	1.516806393
Zm00001d039304	21.56380666	20.71685466	25.75580869	6.349923654	10.57567412	7.237495841	11.1294152	11.99074406	10.42815691	11.36558019	15.18792956	11.21159306	6.834954162	6.115068255	6.79125817
Zm00001d039305	16.90065926	15.4726679	20.23358952	20.14336606	26.85908531	19.41844264	17.98741483	20.03568033	20.41306015	2.672345974	7.151150127	1.965191016	9.121308557	9.284789334	11.51459632
Zm00001d039306	0.015245312	0.072005728	0	0.009506646	0.030131904	0.060702179	0.022267685	0.022977971	0.06110552	0.021025799	0.072093105	0.029554114	0.051179982	0.050137341	0.008812831
Zm00001d039307	0.076205317	0.009598088	0.037883277	0.228095918	0.130535191	0.112034329	0.008904591	0.05513176	0	0	0	0.008441679	0.00852762	0.033415578	0.070482997
Zm00001d039309	0.036849687	0	0	0.390637315	0.242774344	0.214443066	0.04305886	0.011108084	0.124976181	0	0	0	0	0	0
Zm00001d039310	41.31767583	38.48664659	38.03298864	43.5779217	42.39614658	34.39204786	42.33020997	50.14042031	58.27576997	121.8702659	84.52229327	100.1010192	3.656685042	3.332270528	5.412106856
Zm00001d039311	3.801174831	5.581434099	3.367443417	2.965951606	2.722626575	2.84989986	5.337599988	5.327656575	3.557998008	0.546648296	0.737446679	0.194343183	10.91403192	11.81713167	14.62638598
Zm00001d039312	79.48406419	64.5652043	85.84297504	100.726796	65.49364853	84.59965869	54.47734933	52.08069694	75.50402562	966.4925958	801.6576625	1555.209492	44.12475602	43.00554948	43.80903538
Zm00001d039313	0	0	0	0	0	0	0	0	0	0	0	0	0.013490785	0	0.027876212
Zm00001d039314	0.047718094	0	0.081543258	0.156218834	0.157188973	0.277690672	1.637908675	1.977839861	1.265267345	0.032905559	0.075217559	0.066074924	2.770025368	3.341317235	2.937729468
Zm00001d039315	0.012360971	0.049819804	0.033796952	0.123328534	0.159616448	0.069661852	0.372649903	0.253376796	0.326232416	0.054553014	0.034292678	0.013692923	0.110658588	0.092143607	0.114327755
Zm00001d039316	6.18527421	4.372510447	6.675313457	30.13246998	68.89899327	35.38985004	39.27557448	49.04700232	39.65257591	3.213460976	6.714225151	1.54449795	10.49222919	8.442305101	12.13834438
Zm00001d039317	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039319	7.190153625	8.299978128	6.441433216	6.077983173	4.740748688	5.267427395	5.446963476	5.16833773	5.214516113	0.98310325	2.400996508	1.097177372	12.32826326	13.1669917	11.50519114
Zm00001d039321	8.81918736	8.972769141	8.155419076	7.406334891	10.57511517	9.597072025	10.20487331	9.539925058	10.0108042	12.2558043	10.96590048	11.00619289	5.623883096	5.603454292	5.607469583
Zm00001d039323	0.052305056	0.049408808	0.024376829	0.252776311	0.327368025	0.368464887	0.534786507	0.985437364	0.516053119	0.009017162	0.247343825	0.028970583	0.36581898	0.136179267	0.188974319
Zm00001d039324	0.115531554	0.09700828	0.143582956	0.544324672	0.845720954	0.739163578	1.25998714	0.650088865	0.918220219	0	0.113313664	0	0.287296709	0.140721941	0.192934795
Zm00001d039325	1.540184075	1.206244908	1.19721088	3.604214527	6.508898518	4.377692053	6.302240058	6.699107356	6.37532586	7.01361574	3.495998758	2.88493782	1.447752966	1.381421347	1.851889493
Zm00001d039326	0	0	0	0	0	0	0.010253426	0.010580485	0	0.060509902	0.044261527	0.038881573	0	0	0.010144937
Zm00001d039327	1.058644268	0.830042643	1.097857369	0.856880333	2.032332509	0.798804763	1.712174832	1.403287063	1.660103187	0.889563828	1.821236976	1.568801666	0.243207714	0.092226995	0.178321982
Zm00001d039328	463.3865779	529.8540777	497.1189575	226.8016977	153.3683526	189.3947691	141.8893054	103.6933857	124.0500481	31.96492305	58.69372341	29.49516606	76.9562528	52.96527965	45.61940461
Zm00001d039330	2.343970005	2.239629506	3.300548517	9.417914785	21.19366712	12.39209438	17.93121478	22.56858639	20.77648408	11.94355077	24.44740932	12.33038438	3.772953147	3.632801083	5.993927043
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Zm00001d039338	333.367781	313.9641201	293.2944355	96.81193329	91.50628444	108.7182509	84.19785856	71.6828588	91.50742395	18.5683915	57.87551879	11.98030608	102.6005302	88.15648263	79.56942999
Zm00001d039339	11.13952394	17.79293537	16.67600809	10.10380438	6.338208709	12.34473072	10.23572886	11.3559174	7.243737287	4.259807462	5.427364775	3.9263188	32.46692224	27.47595895	21.65981654
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Zm00001d039341	40.44644644	42.21308824	35.81237204	44.28486063	30.17860197	40.08644281	29.75652586	24.97907047	27.32130365	13.83269168	17.85677424	9.948642373	53.42350705	48.96926624	46.21582476
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Zm00001d039349	25.22982545	28.73239671	26.53368929	33.42475107	23.03703667	40.20123543	36.44383308	26.66569493	27.7165646	9.273353783	9.426850172	6.34578462	14.69994379	11.98802477	14.5141038
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Zm00001d039355	14.19129239	12.0450084	12.65240316	7.832268242	10.07114734	7.993245768	7.095835355	8.522480354	8.733083649	49.13862087	33.82060658	46.18960877	7.556689989	7.503520987	8.235420237
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Zm00001d039362	0.561497107	0.559616516	0.479379047	2.423559862	3.525569025	1.926150196	2.265003667	2.984853174	2.089488135	1.744076907	2.413581041	1.033062554	2.660854902	2.242680545	2.895850568
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Zm00001d039364	0.900500438	1.134183634	1.770283268	2.981227309	12.78228728	2.136266554	17.6201495	19.03108738	16.35561991	7.191953326	12.79053426	7.281994688	2.125307509	2.476874688	2.810973763
Zm00001d039365	20.20900265	19.15094562	22.82077467	27.09825475	35.53713923	32.03864491	34.61214672	43.22215873	34.30857315	23.45564186	27.88801623	15.63928665	20.01476933	19.36214338	20.86780417
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Zm00001d039367	0.103569954	0	0.471962493	0.94723166	3.548183823	0.211478941	6.817544051	9.90728864	10.55905278	43.47098598	38.04960011	65.12845049	0	0	0.399136668
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Zm00001d039369	5.460579685	5.239768049	4.940052093	6.150712515	5.574081054	6.139071455	4.894802691	4.758158837	4.975388604	5.124877439	5.191691886	4.829622283	4.876777533	4.801087898	5.244343907
Zm00001d039370	4.913733557	5.147807711	4.865275079	21.19255166	23.99397555	21.92421636	22.69422311	24.09069775	21.69466149	7.441245607	11.42716543	5.010675179	19.73036256	20.7181479	23.90804956
Zm00001d039371	1.683321841	1.959044458	1.278113997	5.653611721	4.773132591	5.666622549	6.367216074	5.546209658	4.997550528	0.028225876	0.258081805	0	3.19483187	3.286794763	4.075675343
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Zm00001d039373	0.551070321	0.310118665	0	0.014622787	0.077246382	0.086187644	0.424716934	0.042412683	0.014460054	0.016170571	0.118283805	0.090918188	0.05248216	0.089972733	0.08133351
Zm00001d039374	3.892474068	2.255189326	3.681934541	3.17162287	8.251839281	3.322273283	5.57426294	6.941072881	6.363329526	3.322420505	2.93966688	1.787045539	0.638851176	0.545236308	0.950048811
Zm00001d039375	7.291324758	5.846440879	7.1650492	3.357165233	16.31022031	4.336597002	11.3186054	13.74977546	12.67799248	17.59789312	21.70351944	15.59048581	1.233371452	1.533541895	0.53911297
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Zm00001d039379	6.002771675	7.045923238	6.405670253	21.12653234	11.30524777	16.51810962	13.11038343	10.30748454	13.17826165	2.644018424	1.387115541	1.322956679	70.9360341	65.80449102	55.81086744
Zm00001d039380	1.329827092	1.330311725	1.400056895	2.213243206	1.975804233	2.191020192	1.278844282	0.916004576	1.244172538	0.075891757	0.173478065	0.050797314	1.000631887	0.879708801	1.123937441
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Zm00001d039386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039395	16.8405749	18.19257866	20.70992769	19.19865656	27.4427569	19.52261524	17.27811525	20.61215295	17.54137707	0.670125171	3.732054691	0.599413775	14.81660836	12.63837618	17.61875659
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Zm00001d039401	17.89296844	16.75512099	14.97007971	17.75592593	30.6424928	23.01079849	22.63976564	23.37275102	23.73974144	12.14046503	18.92760428	7.363229738	18.23361974	15.92233626	20.07400442
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Zm00001d039436	0	0.956609428	0	0	0	0.232626835	0	0	0	0	0	0	0	0	0
Zm00001d039437	35.97388248	39.37015278	49.41687285	66.58235834	36.8368096	62.01437144	26.72400689	24.74056416	25.77644329	11.44076102	11.83414433	13.43742205	5.665649355	5.067599824	9.269171146
Zm00001d039439	11.53124547	11.73502331	9.032356252	4.208651206	10.07517913	6.927545922	9.521425996	9.289220269	8.151065421	32.11346842	22.81349931	42.82547724	6.37362819	6.063328032	6.014011576
Zm00001d039440	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039441	27.14471615	27.69647201	29.39366023	25.5505921	23.85055423	27.89368486	20.25738726	19.23444497	20.35607482	3.072782688	8.827741651	3.373529461	11.09403029	10.593431	10.2120483
Zm00001d039444	3.84503454	4.60741963	3.207870071	8.447382346	15.18746351	12.44190089	15.97483695	15.46485349	12.87583084	5.106531486	5.881307969	5.886191661	11.85239205	9.298504573	10.4034349
Zm00001d039446	6.23535669	7.676019204	6.196410798	8.800087683	9.047281786	8.442102891	7.579458928	7.821225628	7.448197613	3.235403737	5.715725712	3.847159147	6.573167207	6.674267643	7.796684179
Zm00001d039447	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039448	5.970120974	6.099780587	6.865339718	9.272861876	6.83346564	8.814890222	5.626975444	5.177618742	5.211095725	0.648291959	1.425658271	0.368679667	17.17031358	17.62919763	16.73404899
Zm00001d039449	0.078435077	0.029636781	0.019495869	0.987990338	1.436561119	0.922499532	0.485752357	0.340469457	0.503007456	0	0.049454574	0.017377364	0.456411123	0.438514757	0.489680925
Zm00001d039450	0.166925933	0.336390129	0.082982416	1.207460138	1.649620543	1.676958285	0.487632385	0.563569102	0.658771106	0.25324022	0.231548853	0.092456487	0.280193219	0.731960278	0.656163138
Zm00001d039451	77.58706075	80.06945751	89.40415848	92.69227205	60.36252583	78.11944181	24.56835726	21.28869343	26.4192805	21.16959835	30.70512372	14.28065286	69.15033215	65.46712517	70.07574389
Zm00001d039452	5.321437451	5.095057036	5.588173594	6.928865757	6.062639706	7.612686675	6.786029187	5.824386488	6.203160183	1.467827913	2.231595962	0.963607294	4.763887505	4.595796432	4.552996002
Zm00001d039453	33.38339587	39.00308215	28.28027809	14.89875431	7.840624613	17.91270606	10.12393967	10.82859676	9.131401111	10.04227597	17.8916553	7.185704161	19.23163626	18.88942667	21.14662286
Zm00001d039454	7.928732679	6.853321278	7.921724407	6.992145007	21.16340051	9.773303115	24.388024	32.59388081	38.89760699	17.43440371	39.27062259	15.86553311	2.870516796	2.971813354	3.740821193
Zm00001d039455	6.377874753	5.521857103	6.004879936	8.715377018	11.76798055	8.075474422	10.54291694	13.34451123	11.52881602	18.72862509	22.56318586	13.09357207	8.594051382	9.534068547	10.8664958
Zm00001d039456	22.8225905	25.98307389	26.65798272	35.13030922	20.3005132	28.31628788	18.68729906	16.51130952	19.34475471	5.81807895	8.612895611	3.752095558	30.52841212	32.51236849	29.37945639
Zm00001d039458	0	0	0	0	0	0	0	0	0.032207112	0.036016973	0	0	0	0	0
Zm00001d039459	0.608275178	0	0.223071988	0.111926717	10.39311478	1.343839923	9.962425668	10.30425059	9.73993801	2.516735262	2.565231491	1.23717704	0	0	0
Zm00001d039460	7.250315664	7.495213813	8.332118435	9.766351103	11.72084585	8.3999692	10.74142221	11.97577218	11.75456183	4.728019818	6.083632698	4.846505461	9.938643287	8.902725921	10.64375211
Zm00001d039461	0.067612433	0	0	0.101187952	1.033435873	0.347904822	0.58463795	0.864167161	1.050649504	3.953744533	3.819712825	2.65138866	0.075660483	0.133414422	0.343944476
Zm00001d039462	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039464	0.107225364	0.135050743	0.033315	0.066863411	1.236245042	0.361255791	0.313232097	0.549479874	0.495894794	0	0.304232904	0	0	0	0
Zm00001d039465	0.078309751	0.010382255	0.051222942	0.591127385	0.391015272	0.434255461	0.794648205	0.735511197	0.289732925	0.085264782	0.041579414	0.105010723	2.914887983	2.588931588	3.797778782
Zm00001d039466	0	0	0	0	0	0	0	0	0	0	0.014142629	0	0	0	0
Zm00001d039467	2.585229205	2.410087008	1.662586289	9.172737969	12.19021904	12.51689891	11.76676677	10.84213179	12.29376838	6.998572276	9.331735122	3.589128746	3.13929778	3.533242075	4.006923456
Zm00001d039468	128.8474209	104.0783671	109.324007	23.00785473	29.6985199	34.2419516	56.5903973	48.11661601	40.84909432	146.4711567	144.9080509	174.6280638	33.75722463	29.1347392	41.65045072
Zm00001d039469	2.678217137	2.201769898	2.492890415	6.750190209	5.773293299	5.669993092	5.722134218	6.776167792	4.816276569	1.591846889	2.303358956	1.477196991	3.078519641	3.636162674	3.07695112
Zm00001d039470	0.111299055	0	0	0.023134559	0	0.113630476	0	0	0	0	0	0	0	0	0
Zm00001d039471	0.006842459	0.008618103	0.008503829	0	0.054095665	0.108978337	0.031981656	0.066003588	0.042193251	0	0	0	0.053598523	0.187523607	0.071197352
Zm00001d039472	1.498865808	1.93750669	1.000026702	2.430116539	4.854282116	2.793132826	4.959297333	5.098462999	3.677576395	77.04064866	22.41281875	123.8989691	4.1490585	3.0959639	4.396076986
Zm00001d039474	3.954554385	4.317997986	3.619832425	4.784285545	3.77542139	4.95446807	5.060543036	4.155996739	4.510390293	5.069336994	4.210428821	4.444797553	2.655752862	2.569922257	2.30577474
Zm00001d039475	0.693569579	0.574551935	0.763624708	1.404882912	2.664971255	1.519796974	1.911867616	2.183326568	1.871466768	3.761989409	3.742054365	2.787038932	1.338688214	0.961875432	1.808223648
Zm00001d039477	3.52482401	3.664506764	4.438848811	11.08594705	7.843606719	11.98005439	5.353602402	4.57272635	5.048228411	0.138367555	1.12177201	0.066682658	12.90347346	14.49563356	15.04799916
Zm00001d039480	0.43303753	0.508605402	0.37639605	1.298808122	0.976654861	1.367010396	1.198267987	1.172423051	1.136915425	0.69615784	0.703531201	0.50912873	1.257537222	1.234830929	1.19787538
Zm00001d039481	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039482	0.726775366	0.197919192	0.268530384	0.097989482	0.388229662	0.09625938	0.573808798	0.900010139	0.411820677	0.216722822	0.297239044	0	0.241787424	0.129197299	0.976508504
Zm00001d039483	15.22349703	14.24561717	15.48349573	19.31882052	25.51341568	17.89809685	21.42574228	23.67865076	22.85280278	15.91124872	20.14545973	12.46656803	14.84619759	16.79488486	16.48814458
Zm00001d039484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039486	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039487	0	0	0	0	0	0	0	0	0	0.021304955	0	0.008556143	0	0	0
Zm00001d039488	0.105833778	0.070569548	0.077370901	0.310567757	0.524993991	0.160169296	0.19641193	0.105091779	0.214978071	0.008586013	0.054954031	0.0620671	1.539608148	1.207959447	1.612250411
Zm00001d039489	0.265460853	0.229378915	0.372114027	0.816129152	3.164321568	1.429481135	2.427424987	2.813773661	1.777786755	0.962114274	1.759408171	0.752260545	0.773735638	0.669994032	1.213361053
Zm00001d039491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039492	3.007481716	4.361501697	2.700110197	6.022579092	11.75088477	15.72628437	41.61661201	54.6581854	43.81837898	76.07377114	54.028611	77.35085476	11.41286674	12.53240699	15.19156816
Zm00001d039493	0	0	0	0	0	0	0.027030181	0	0	0.255226876	0	0	0	0.025358522	0
Zm00001d039494	0	0	0.044188946	0.022171872	0.046850081	0	0	0.085744584	0.021925127	0	0	0	0	0.038977599	0
Zm00001d039495	15.36631953	15.14588621	18.82252574	1.85361236	0.906357551	1.850982258	0.617176989	0.222161674	0.499904725	0	0	0.013606804	0.261161227	0.094257149	0.610646827
Zm00001d039496	1.050924253	1.288810275	0.24059585	0.632339409	1.894916782	0.361410808	0.495510789	0.411276238	0.522980079	1.754534185	1.267124234	0.163391747	0.598324939	0.293067913	0.436977947
Zm00001d039497	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039498	0.930376638	0.783232402	0.772846904	1.340686842	2.540741372	1.671369674	1.808153265	2.243644902	1.623023793	2.306997625	1.866233578	2.200099251	1.38636364	1.315844425	1.365452735
Zm00001d039499	9.628051971	10.91768812	9.870829433	5.154702524	12.85236086	5.453205812	13.68971328	13.03417376	12.5768842	10.57329691	10.58296207	9.243449832	17.95683219	16.34813529	18.65626787
Zm00001d039500	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039502	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039503	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039504	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039505	17.96755266	16.7106895	19.35174822	32.42010051	44.21657287	31.10987758	36.3097452	43.16486314	43.66711732	20.593097	26.79929903	17.24202629	28.65177981	31.66166981	29.88174189
Zm00001d039506	10.12539942	10.64653224	9.006897311	13.00792951	11.87257482	15.19255087	14.75532592	12.38088365	12.80720609	2.208229832	2.942793385	1.342815391	8.262232413	7.155900856	7.524435902
Zm00001d039507	0	0	0	0	0	0	0	0.010387143	0	0	0	0	0	0	0
Zm00001d039508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039511	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039512	70.41384859	77.87017105	59.78293242	17.65615331	14.10454879	16.03208528	12.47792191	12.4676007	12.76561913	50.69598451	56.83492243	78.64553384	21.14363378	19.81303546	18.71248133
Zm00001d039513	14.86036204	13.30984913	10.5494461	4.038689038	6.730560106	3.564229978	9.988642577	12.66989972	7.96904019	3.527555162	6.356492739	2.982480364	14.84662322	5.370027783	17.69939678
Zm00001d039514	14.24645332	17.35261368	14.56837167	15.88702513	13.32642721	16.88597145	15.56371982	14.28243644	13.85750452	8.318331832	10.02841796	6.588544415	22.08540637	21.70894617	20.13820582
Zm00001d039517	0.03176894	0.033344248	0.125028019	0.739589089	0.4255791	0.395699868	1.478693273	1.506707014	1.162337449	0.898199425	1.048279914	1.161342276	2.885512675	2.786098224	2.932216879
Zm00001d039518	27.01012845	24.30823835	26.50916846	24.83484414	32.68768493	23.27851757	25.08314177	28.56081025	27.08473254	7.404448952	12.46985122	7.085223561	12.47888334	11.40990601	12.85073649
Zm00001d039519	6.715042984	5.385308709	5.23321234	6.917233102	9.263570623	7.510974451	8.594332225	10.8926743	9.299541313	14.87668373	11.88310883	9.472938574	5.116814806	4.788889847	5.393706561
Zm00001d039520	0	0.009700828	0.009572197	0.076845836	0.690108299	0.113233569	1.007989712	1.207307893	0.465442663	241.8736578	44.9790495	278.9806718	0.077570111	0.151979696	0.071237463
Zm00001d039521	3.963714993	4.351055519	4.823000993	4.679977665	6.564497714	5.918796763	6.486885514	5.834339409	4.990685206	7.089436943	5.873443519	7.762274243	4.055698291	3.299182231	4.386385363
Zm00001d039522	8.980810578	10.38932423	8.683005062	9.973164478	9.414117749	10.11564264	9.528809106	7.553639938	9.203546188	2.830301757	2.893068716	1.87227429	8.077902857	7.308162892	7.254254932
Zm00001d039524	0.84782846	0.169884127	0.419078747	1.297687349	3.605310217	1.026902393	3.962750251	3.229501163	2.792247642	6.098937588	9.063381943	6.94784109	0.463592417	0.580887081	1.180701959
Zm00001d039526	9.266500124	10.64923199	8.326570847	8.430086419	9.914603097	8.451657519	9.61663513	9.244519685	9.304274123	7.942985916	9.605544703	7.31170892	8.538725439	7.475290628	6.777201396
Zm00001d039527	0	0	0	1.325274789	4.20054049	0.701010015	7.402390813	7.145702399	8.594027266	1.042796357	0.618470478	0.022637328	0.686033621	0.448038466	0.732406837
Zm00001d039528	4.904459462	4.896744965	4.493482356	4.928316062	5.005094494	4.450453903	5.382933545	3.764638092	6.101018028	0.915171791	0.938698289	0.282720084	2.932142702	2.765159867	2.385133433
Zm00001d039529	2.000895366	1.934057183	1.677089322	1.241911625	3.200555822	2.132122334	10.58101862	15.2836948	5.658399276	0.141187025	1.631273776	0.010309307	3.47836325	3.866596364	5.024720379
Zm00001d039530	221.4954882	240.3024765	209.0857943	41.37621641	33.95463842	46.85925888	44.81860974	37.39919487	40.92780307	9.232020413	17.78207619	12.79531688	7.35948819	7.884452188	7.919852938
Zm00001d039531	103.7317347	70.32126682	83.29965757	4.54256351	78.58599611	24.08451847	74.51037087	67.98309392	66.76481368	5.023381899	12.37411205	1.492328678	0.893345971	0.96630778	1.88439122
Zm00001d039532	0.975548902	0.196251885	0.572529328	0.794210094	10.95292454	2.556359117	11.24888172	11.51783879	9.056837724	13.37968088	8.807879278	11.95489862	0.181945091	0.066839435	0.430782787
Zm00001d039533	0.008449465	0	0	0	0	0.01035175	0	0.101881312	0	0	0	0	0	0	0.117224811
Zm00001d039534	7.675973641	8.244274972	7.727876048	4.794941728	3.594280839	4.430691474	3.999983721	3.502772332	3.466783754	2.047673149	2.227775117	1.037978399	4.662872978	4.691495954	4.978892883
Zm00001d039535	34.82890345	24.97819793	31.15789763	25.14673193	117.5747678	41.56082699	102.490246	112.4760282	100.095675	64.70425812	51.31179091	31.65899281	21.7038562	21.43009582	25.86320638
Zm00001d039536	0	0	0	0.129167954	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039538	0.319794946	0.419565539	0.033120175	0	0	0	0.093420099	0	0.032866322	0.12863957	0.084014935	0.029521194	0	0.014607102	0.03081055
Zm00001d039539	0.180597542	0.090985309	0.202002441	1.464017229	1.641949917	0.951403807	1.772637125	1.154125495	1.291815764	0.224166406	0.364382871	0.100028881	1.071100577	0.633527575	1.252772423
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Zm00001d039542	117.8445954	167.5276441	126.0419677	981.766304	461.7267035	1016.213319	512.573375	290.9202733	388.0118688	7.402840415	0.261210069	0.01995306	123.1140209	111.7204281	162.6499278
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Zm00001d039547	18.4997647	20.66856943	16.54189419	14.07513322	11.50477534	13.45954423	13.5106095	11.8433833	13.44949168	3.533635465	7.22727675	4.182893561	9.740520855	9.567352228	9.86364389
Zm00001d039548	0.170264452	0.227063337	0.485447136	1.586352803	1.544044828	1.926456956	1.240536789	1.243877517	1.111676241	0	0.151559249	0.022189557	1.300096535	1.438301947	1.841116571
Zm00001d039549	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039559	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039560	5.65221766	5.771417516	5.587438971	10.17618835	11.9190496	9.718468765	8.511494153	10.77675548	9.623103085	6.260120082	7.236654618	3.627466302	9.021911549	7.451977655	7.034523474
Zm00001d039563	4.092322524	4.134539647	3.347385774	3.186961162	2.100037213	2.675938895	2.213381023	1.628019447	2.164417104	0.177574435	0.3466696	0.172182752	1.234423961	0.998193285	1.342407762
Zm00001d039564	0.009989211	0.005032579	0	0.004983244	0.028956952	0.00489526	0.007003436	0	0.009855574	0	0.002519343	0	0.00223565	0.002190105	0
Zm00001d039565	1.531995263	2.260334338	1.432509425	1.382938006	1.730253009	0.983140093	1.738989721	2.56853986	2.105303618	7.405120447	1.839900169	1.099057984	1.926604984	1.359536147	0.624135589
Zm00001d039566	0.082356831	0.172881222	0.034117771	2.191186491	1.338378884	2.051600523	1.828445193	1.588857467	2.403795246	0.832946748	0.934691453	2.189547833	0.645119568	0.57178885	48.36959356
Zm00001d039567	0.077625577	0.132276654	0.062423897	0.404329346	0.589631904	0.072725023	0.58158224	0.434959019	0.495563535	0.768301947	1.197692663	1.360666736	0.53141255	0.625705023	0.617661995
Zm00001d039568	10.07963857	8.765831433	10.60372875	14.85181263	14.00108446	12.17657851	13.0738375	12.67262906	12.4411959	1.18699037	5.833586138	2.255154745	10.33485564	9.942873984	9.759036507
Zm00001d039569	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039571	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039572	0.418758516	0.031025171	0.64288945	0.399373349	3.408026873	0.362143398	3.1661839	5.227484208	3.706255145	7.541954194	7.051259927	11.3514576	0	0.054006799	0
Zm00001d039573	0.751166699	0.063073149	0.622368123	1.030504773	4.58594511	1.625831508	2.80876254	5.494798742	4.601104444	19.78726993	6.630717146	7.211605959	0.028019322	0.082345531	0.028948374
Zm00001d039574	1.109130089	0.212579873	0.599317452	0.811912852	15.28159593	2.422273078	8.621340575	13.40265725	10.76450286	42.93061228	23.5641888	33.94796731	0.107926277	0.158591394	0
Zm00001d039575	47.58951152	45.68781675	40.99578794	30.03332677	101.1656283	51.77303819	131.462649	178.8654212	177.0675878	713.7303146	461.488354	486.0986305	10.68692925	7.72914799	14.65611014
Zm00001d039576	8.200830962	9.391072168	8.317350195	4.584019138	5.484665754	6.316013515	4.640734756	5.168640995	5.345413435	2.593863436	4.622980446	1.692108661	3.301153541	2.480371611	2.604868469
Zm00001d039577	0	0	0	0	0	0	0	0	0.086463708	0	0	0	0	0	0
Zm00001d039578	5.587674256	6.771199397	6.343319018	14.20937247	9.940052751	14.72029696	10.65157321	9.109112822	10.40595911	3.638766592	5.118595295	3.723908403	16.1079329	19.47443205	19.08080029
Zm00001d039579	0	0.043881166	0.017319725	0.173803974	0.082632368	0.153661763	0.154700256	0.008401833	0	0	0	0	0.124758815	0.137494373	0.088615664
Zm00001d039580	10.72984723	11.7010726	10.38746542	13.92430541	14.0835604	12.86637878	15.8901219	15.93491635	15.26379203	17.5264731	21.75879878	22.11996228	14.5799815	14.78252006	14.99157327
Zm00001d039581	0.424433733	0.675253714	0.0277625	0.139298774	0.235475246	0.246310767	0.208821398	0.377094031	0.385695951	0	0	0.123728534	0	0	0.02582649
Zm00001d039582	5.648679287	5.181300858	4.964492502	2.871419824	6.513378317	3.141922276	4.1106798	6.845507637	4.902926352	15.33109936	7.754332395	5.317427867	3.104517417	2.074544637	3.416877086
Zm00001d039584	0	0.024406761	0	0.072502494	0.076600381	0.237407968	0.033964926	0.023365551	0	0.133627821	0.171054645	0.010733078	0.260216296	0.148700506	0.100816661
Zm00001d039587	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039588	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039589	34.56463629	33.94530982	44.89329274	60.36487762	48.50865551	64.44994248	27.84705574	22.29833599	27.5645572	1.40541152	1.512673985	2.288102976	11.56284034	8.718808835	10.08752909
Zm00001d039590	0.960850665	1.131269209	0.934550636	2.116617728	2.29817724	1.797748713	2.025838757	2.052678827	1.655129377	1.886928952	2.410156775	1.943662783	3.161388622	3.572122727	2.771148869
Zm00001d039591	9.538728429	7.522158611	10.37731196	5.895193315	15.25396944	8.045131792	14.58572069	20.06796062	19.19923943	24.00777344	24.44991146	11.38179549	2.027137026	2.544357576	3.403321853
Zm00001d039592	0	0	0.126559775	0	0.033545356	0.03119019	0.059496599	0	0.062794871	0	0.032104031	0	0.028488919	0.083725624	0.058867084
Zm00001d039593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039594	9.434461747	9.878706037	9.708942718	12.27207572	13.68921533	10.91636727	13.33545266	15.02480112	17.52991492	12.09948379	14.0295201	29.6320972	9.265712237	9.241115441	9.825429502
Zm00001d039595	2.350191156	2.653237471	2.359812466	2.269781526	3.568782858	2.449165548	3.918356233	4.086540574	3.313762381	7.549859807	7.833837836	6.937202085	3.0709353	2.796295422	3.089920284
Zm00001d039596	0.172868153	0.136541337	0.203916928	0.394646024	0.362902378	0.857917398	0.493008256	0.494602544	0.422775287	0.141431846	0.158875734	0.120090395	0.268855782	0.22483542	0.355681583
Zm00001d039597	0	0.056922214	0.046806198	0.526065848	0.35729963	0.664428382	0.580903162	0.372374791	0.287974167	0.114272033	0.009498548	0	2.149383022	1.519331765	1.854896954
Zm00001d039598	3.187933704	3.89431244	3.522451779	8.940942745	3.754550987	5.626371438	2.644762362	2.448901435	2.118456696	0.919750511	1.497179666	0.324602219	29.82821451	28.4562542	23.86642576
Zm00001d039600	0	0.028555505	0.046961442	0	0	0	0.035323023	0.009112436	0	0.010422822	0.038120209	0.008371682	0	0	0.01747464
Zm00001d039601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039602	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039606	20.89637419	20.52730429	21.12906823	6.199280125	6.595088097	4.873549794	1.675625862	1.704135767	2.644272088	19.07357553	17.26594607	17.87081779	21.72502072	19.54416995	16.40361132
Zm00001d039607	0.661661628	2.828746899	1.065534954	23.82607244	10.44975579	40.91948846	22.73719124	15.87760863	8.412971801	125.0180444	21.71729362	11.29375837	19.76193031	18.84853849	49.86318899
Zm00001d039608	6.269101169	6.518181417	6.220320008	5.003023966	4.73883677	5.398239451	4.556287492	4.178535977	4.525626232	2.712325488	3.910934934	2.483858011	3.727546093	3.85115991	3.526607894
Zm00001d039611	28.97603756	27.89592947	28.85650956	19.61165133	23.08155953	18.02183301	17.3740251	18.10988773	15.4521278	2.220151829	5.839954127	1.792025518	7.720265823	6.146014441	7.783720677
Zm00001d039612	3.499781878	3.804303974	3.123422211	3.722508169	4.988882615	4.357420945	7.172674744	7.458445075	7.917595646	17.22822599	11.7563326	33.10481204	3.835429303	3.880986249	3.954797927
Zm00001d039613	78.0283351	87.94949949	74.83976679	22.83021614	20.69959568	17.80307412	31.68704903	34.70694307	30.09834014	21.24915666	25.85979687	25.94461096	27.28414824	27.9602291	28.04546019
Zm00001d039614	10.37383604	8.819472291	10.38317485	9.841967983	14.63320714	12.07390013	12.03524301	13.60297737	12.42827928	14.69045956	13.57230531	12.13807092	6.301841629	5.716542826	6.29662432
Zm00001d039615	0	0.062797118	0.161107547	0	0.262784192	0	0.256343117	0.456897926	0.245958031	14.86661649	3.219114028	3.501652872	0	0	0.17293011
Zm00001d039616	2.407926667	2.676480855	2.256698428	5.275870663	7.585237868	4.924792943	7.66453919	8.559510841	7.708085585	10.96995022	10.83506407	8.913170157	5.654131956	5.567794289	5.879640389
Zm00001d039617	0	0	0.003496738	0.007017975	0.074146352	0.024129229	0.059178239	0.139094514	0.052049052	0.609223507	0.17030531	0.719973256	0.01259399	0.012337425	0.029276046
Zm00001d039618	2.268759849	1.847528939	1.251814682	1.658671749	1.520482866	1.761174838	4.022276542	3.148307434	3.376908754	1.37567834	2.195061442	0.725803261	2.144861052	2.444213281	2.102919202
Zm00001d039619	0.368081723	0.351810151	0.266036525	0.253945627	0.368050912	0.217479661	0.454506531	0.528810114	0.463605291	0.849675955	1.020499908	0.413527835	0.166510853	0.206044652	0.223339716
Zm00001d039620	4.405895292	4.270739723	6.938519687	11.64960265	13.88745954	10.66334953	10.7886932	13.7760594	12.18585074	1.653153467	4.807008054	0.645968496	4.338214343	3.515881003	4.482058873
Zm00001d039621	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039624	148.1421949	90.20375292	116.455226	28.14375682	38.9192072	43.3752203	68.8494904	60.06546092	36.51403194	12.47821177	11.00983626	9.606601964	82.38892798	70.7921352	88.83816088
Zm00001d039625	0	0.029509802	0.007279627	0	0.054026133	0.093289939	0.034222016	0.12712902	0.028895326	0	0	0	0.622691613	0.314634725	0.85327006
Zm00001d039626	1.469020788	1.753982008	1.371915819	4.013673532	5.717441357	5.617721337	6.300634448	6.450415914	5.854022642	7.612220848	7.399221382	4.627969737	3.544322394	2.671575455	3.062989668
Zm00001d039628	10.64644854	13.79773337	9.422762092	14.82893232	12.36322163	13.76256927	5.510969952	6.226638749	6.258235609	1.34481716	5.432941312	1.510028409	13.71747692	12.79448188	11.81409679
Zm00001d039629	5.805194871	3.619273888	4.545269362	27.47575147	19.16123571	11.73506073	13.80415847	11.19958979	14.31883057	6.365025037	9.150671221	2.154295029	30.95439046	28.82827887	25.8396503
Zm00001d039630	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039637	2.127297552	2.754285688	1.932016213	3.543615286	3.665496337	3.87289508	2.833404159	4.080740088	3.522525805	0.995061965	2.541895158	2.488357181	2.688482899	3.269717936	2.777626386
Zm00001d039638	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039642	2.230009065	1.717424512	1.500472966	0.354289244	3.509192792	0.791777155	4.265488931	3.579468895	4.002708212	15.64220889	14.86658452	3.493039687	0.071525687	0.062283166	1.001718999
Zm00001d039643	10.04982975	10.43177126	5.965031664	0.399782184	2.648425012	1.539052066	8.341739953	12.37896675	6.197113648	27.42202927	10.30240323	1.084482949	22.13345315	30.31567956	40.3559042
Zm00001d039644	4.574145681	4.557330311	3.16055782	8.706016833	14.86536708	11.50065253	30.85277498	40.9743232	44.41384834	65.2976933	69.75580662	55.60499322	12.2999576	9.804155593	13.79308694
Zm00001d039645	0	0	0	0	0	0	0	0	0	0	0	0.043518312	0	0	0.181676001
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Zm00001d039647	8.862151635	8.506329738	6.697082531	29.01409862	38.21372595	41.72617895	44.01300699	42.83917286	43.08084118	25.89867681	35.4277893	30.33061887	25.54458306	25.26360901	23.76941631
Zm00001d039648	1122.636159	1257.750077	1026.04646	65.31162298	74.40723434	41.40757667	47.70263811	75.87401262	63.6480968	669.7674322	276.9871576	492.6969191	101.0979162	69.9388046	69.45776304
Zm00001d039649	1.170060561	0.982463737	1.377620251	0	0	0.100595388	0	0.024751346	0.050631901	0.849319166	1.061312985	0.727657538	0	0	0
Zm00001d039650	1.023279481	1.011657778	0.895684152	1.715308842	0.471187389	2.911720355	0.597851041	0.092869838	0.278180017	0.053112353	0.27750285	0.02437726	4.721926621	4.221658225	3.078476073
Zm00001d039653	11.67576691	12.25472635	11.80353217	15.8390854	20.93922631	16.80978359	19.76607959	21.84297294	19.66892799	8.597617699	11.89022415	6.850824781	16.06134651	14.71136176	18.21850984
Zm00001d039654	19.05732281	19.3135067	16.43539976	2.717873849	1.726818472	2.189429037	1.415345031	0.718274345	0.893835061	2.047062731	1.690182802	0.687380742	6.721585037	6.078559347	5.280082463
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Zm00001d039656	7.980914335	8.240000791	7.821092745	17.92222443	19.85654357	16.96575818	13.58941156	12.06529882	14.59056005	1.363404418	4.662162085	1.006063547	10.17205159	9.735749443	12.40491423
Zm00001d039657	23.5773954	23.82571344	17.33137134	33.0973886	20.01272007	24.31759024	25.11551905	25.12327767	28.0631372	21.42600623	22.1721253	16.48064068	20.20717533	17.05058901	20.15874962
Zm00001d039658	9.378738014	10.19457718	6.580794062	14.90098881	11.61474006	13.08965789	22.25981863	20.36307769	19.83579176	23.3201372	22.94258525	22.23642779	10.56523221	9.697397276	14.07912672
Zm00001d039659	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039660	0.560524566	0.776080345	0.503939016	5.577621728	2.880959867	4.266426214	3.934482959	2.971888822	4.49088324	0.038378656	0.255665337	0.052844568	2.286552652	2.074369895	1.865995842
Zm00001d039661	0	0	0	0	0.083980682	0	0.037237382	0	0	0	0	0	0	0	0
Zm00001d039662	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039663	10.73983899	10.75643448	2.755095915	2.87748459	3.272668483	2.889963605	2.741273973	2.761240174	2.38360514	2.398417423	4.364247835	3.108983274	1.531781744	1.127791537	1.672151403
Zm00001d039664	14.07518201	14.73577863	9.685913917	7.297971876	9.097266019	6.933023793	7.751411802	9.54924227	8.37765122	8.12155409	14.83310658	12.61141566	6.535785958	4.769478174	5.548529853
Zm00001d039665	0.232503978	0.234271697	0.231165303	0.028996888	0.275722291	0.113939674	0.05433618	0.11213875	0.114696755	0.032066132	0.557070454	0.23180162	0.026017942	0.152927415	0
Zm00001d039667	16.20143244	13.9293755	22.0624855	45.93366663	43.31391425	76.22105057	108.5335191	111.2081656	102.093636	0.816106984	2.984812375	0.949348725	56.87863793	70.63968387	81.36454601
Zm00001d039668	0.468192942	0.157250865	0.297401023	0.765570794	0.712877115	1.198187535	5.981445798	5.670431578	3.310494013	0	0.039360421	0	4.272882615	5.565906171	5.60540976
Zm00001d039669	0	0	0	0	0	0	0	0	0	0	0	0	0.160270521	0.071366127	0.391382013
Zm00001d039670	3.773673933	4.156737385	4.341916836	10.93023571	20.40779725	11.78279595	18.11728033	20.33517691	21.9214278	11.65039742	13.17897475	10.74988256	7.065460428	6.932485752	10.30210575
Zm00001d039671	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039672	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.102502024
Zm00001d039673	13.84272725	12.9192897	12.94446405	12.61217976	17.99267187	13.66981306	15.65859655	16.6459446	15.7930148	17.54664765	19.43961994	16.15953821	12.93270189	13.38891211	13.65892305
Zm00001d039674	49.41174546	39.28277997	50.0221614	30.64794512	52.16186224	25.32135877	34.09288183	27.51153581	23.70931532	9.193220563	19.42429463	4.176460495	40.99251155	36.21986096	30.72806943
Zm00001d039675	3.11192081	4.338147051	3.507123256	9.579143557	9.747798097	7.798354331	9.636140653	10.45518353	9.769101787	3.033558917	4.66448483	1.386732507	4.804045367	4.737189743	5.004219858
Zm00001d039677	34.31015677	41.77510876	32.22456392	42.11347444	45.17103817	40.73144039	47.45736157	47.08597773	44.3477549	29.75428926	38.29680623	19.74699643	81.63753517	84.70917056	80.70455896
Zm00001d039678	0.937428849	1.156721599	1.046761228	1.418374731	1.297900543	1.492439202	1.951676912	1.509013647	1.150241179	0.045939505	0.156016874	0.031627649	4.339825284	4.736544769	4.758798273
Zm00001d039679	0	0	0	0.043718384	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039680	0.015687015	0.158062832	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039681	2.739343237	1.299847667	3.277786113	3.035025581	4.667150102	3.106316211	2.73939422	3.180121173	3.755490304	0.351442414	1.205023153	0.2399388	1.810732356	2.220796817	1.870771792
Zm00001d039682	0.090608568	0.087269632	0.006624035	0.026588959	0.105344189	0.052239009	0.01868402	0	0.013146529	0	0	0	0.435397322	0.584284082	0.425185588
Zm00001d039683	1.321541273	1.193203052	1.416239778	0.992719521	1.169847351	0.900177293	1.897980752	1.788304741	1.58577753	1.839043322	1.552831793	1.857719744	1.615883147	1.506519589	1.91722652
Zm00001d039684	1.395861722	2.53372227	3.673654001	7.526651571	9.142167327	7.444058727	12.13703828	9.40551136	9.316269763	2.717821331	4.814736955	2.319408403	12.45017111	11.61146177	18.17905712
Zm00001d039685	0.770644528	0.873566671	0.798132739	1.070040726	1.536694997	0.818258992	7.558181029	10.06657041	4.821789515	1.261243749	1.120817953	0.956127239	18.32836399	20.78789884	32.9421397
Zm00001d039686	9.156745461	9.285965667	9.321626814	10.3752851	10.78711369	9.913816529	10.68859807	10.4475353	11.39785604	15.73524711	15.13336676	17.09966879	9.351761457	10.43738873	9.06550038
Zm00001d039687	516.2530828	500.2920423	624.5612837	1014.959633	588.9943236	1053.29859	699.136746	567.5409929	629.7092914	143.4925546	99.20367373	76.75377279	1406.218614	1479.890339	1268.059953
Zm00001d039688	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039691	0	0	0	0	0	0	0	0	0	0.044294954	0	0.005929668	0.005990035	0.011736012	0
Zm00001d039693	2.147778504	2.091794364	2.097680263	4.759276753	3.822201266	4.888846286	5.5075955	4.943869053	5.35692859	1.13179062	2.190994223	0.964005243	5.166792526	4.885237364	4.026172665
Zm00001d039694	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039695	0.058237418	0	0	0	0.086328385	0	0.076556727	0.035110535	0	0.341355754	0	0	0	0	0
Zm00001d039696	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039697	0.344771211	0.274723655	0.279825421	0.63181278	0.565540523	0.905125514	0.337091258	0.084839919	0.338423313	0	0	0	0.511788849	0.478222839	0.601971227
Zm00001d039698	0	0	0	0	0.094423242	0.029264646	0.17677455	0.076805574	0.068737892	0.120794258	0.120488279	0	0.044550232	0	0
Zm00001d039699	0	0	0	0	0	0	0	0	0	0.01441505	0	0	0	0	0
Zm00001d039700	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039701	0	0.011982582	0	0.011865115	0.012535739	0	0.011116797	0.011471396	0.093864568	0.06560503	0.167959711	0.221316509	0.138400241	0.052146439	0.043996693
Zm00001d039702	10.51364693	10.52319253	9.966921779	8.747251183	11.45081108	8.798215552	11.12606171	13.94898321	14.12932739	21.02266741	17.69794989	22.38766974	7.12942124	7.122025871	7.591958786
Zm00001d039703	20.31952339	20.15202366	17.38323328	14.84216831	17.85898169	16.3891293	21.63169753	22.09139397	23.8455848	74.98388365	56.10135406	103.6099682	14.91218121	13.65811921	14.217587
Zm00001d039704	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039705	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039706	19.92624921	20.31955429	23.87927106	22.48575632	18.52387491	19.97376686	9.914168344	7.43944722	10.88385176	19.20721347	18.09892918	21.25871997	15.01267651	13.65453041	13.88154843
Zm00001d039708	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039709	5.493382681	4.702189388	5.324767999	6.296811766	10.16646768	6.958839684	6.907195429	8.027836653	7.662832037	4.1804395	7.44295844	3.446378661	3.441676341	3.205907493	3.309149211
Zm00001d039710	18.79794664	17.0250624	15.9957018	18.47101738	21.05673747	17.84310698	22.03735953	20.4384237	17.94267988	2.293161748	8.018090171	1.330248937	19.88122343	18.39606588	22.6763565
Zm00001d039711	1.479651511	1.644376371	2.263874661	3.47361351	4.20241396	3.313266248	3.450681014	3.493282693	3.250941041	0.90030149	1.865888026	1.191439948	2.344525359	2.65115913	2.645083602
Zm00001d039712	0.852098257	0.587010331	0.503166625	2.45419112	5.837134575	2.330113424	8.878576734	10.04163117	9.086281676	48.16306492	38.77782212	46.56998848	4.994154669	4.046046547	4.468516429
Zm00001d039713	0	0	0.085883655	0	0.015175953	0	0	0	0	0	0	0.051034111	0.167549407	0.113632671	0.266315283
Zm00001d039714	5.815699509	5.630329779	4.818512312	7.162875603	5.947431931	7.231371335	6.440648547	5.529686353	7.243737287	1.137278807	2.554054012	1.586553311	4.630037277	3.504869799	2.952090826
Zm00001d039715	2029.293185	2448.082115	2211.780065	1063.827267	356.7041303	807.418907	379.0833209	322.7853674	266.236762	216.4416193	112.652779	181.6073101	1447.040511	1365.127848	1236.554427
Zm00001d039716	0	0.016588603	0.147317772	0.032851965	0.225607064	0.129087724	0.430920457	0.269975661	0.016243182	0	0.066434931	0	0.338985206	0.158820572	0.045681538
Zm00001d039717	19.0696186	19.48766237	17.23863952	11.09774371	10.19008678	9.150906512	15.4833035	15.41795008	15.47035262	7.303943805	7.759639245	4.976434834	10.39215095	9.240435468	10.4374475
Zm00001d039718	1.216604012	0.698451586	1.730008212	1.291465683	7.09071911	2.343214678	2.889488306	2.981656105	2.072659615	0.163887664	0.19266405	0.075220393	0.96249154	0.967696327	1.517776656
Zm00001d039719	4.200558324	4.620824914	4.292218339	19.07711316	14.8252148	21.17066877	18.0764217	14.51750804	13.07272307	13.26764232	6.555368088	9.961661117	24.17144114	23.36460877	28.06084293
Zm00001d039720	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039722	0.198751064	0.0715222	0.017643458	0.336400029	0.14964782	0.469601836	0.23224062	0.49641484	0.157574047	0	0	0	0.603681091	0.747009929	1.230982248
Zm00001d039723	0.44791792	0.466040491	0.338844867	0.728639739	1.693610424	2.21890212	1.297102145	1.902045718	1.104814042	0.107435245	0.221023905	0.04314636	2.985614409	1.62251195	2.589271208
Zm00001d039724	0	0.235876297	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039726	0.989772592	1.675148637	1.518395171	0.212162747	0.326042649	0.719985318	0.343350568	0.055942521	0.17165589	0.234619616	0.078008437	0.068526572	1.661380968	0.949395537	0.554276215
Zm00001d039727	11.36122851	13.59613206	12.794746	21.99485766	19.66744347	18.46350309	18.18094766	19.89911681	17.03847783	10.29283757	12.39421621	10.641659	25.01704357	24.20303067	23.7921769
Zm00001d039728	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d039730	1.026368913	1.220323379	0.938822689	0.962592174	1.136008958	1.086430193	1.938088326	2.504836183	1.873380333	1.483477477	1.956957601	0.400211646	3.886658584	3.717467992	3.199134335
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Zm00001d039732	5.278991316	5.796484854	4.931073475	17.26118684	16.4198084	16.42783071	36.99123754	38.47719218	36.55873897	64.31196089	53.69321685	43.17458179	21.39524902	19.91141444	23.07296452
Zm00001d039733	5.818927096	6.429868437	7.930762149	5.557492083	5.130528702	7.0494765	5.434477759	3.912435813	5.388932666	3.878378344	4.582748812	2.252485785	2.662722266	3.035318825	2.550938024
Zm00001d039735	0.151902599	0.127547924	0	0	0.133435973	0.341186025	0	0.244213277	0	0.034916455	0.031925675	0.112180537	0.821588783	0.305288433	0.263430201
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Zm00001d039746	6.673734511	6.853386723	6.463975232	7.170449597	8.483989632	7.760388571	4.893743022	4.867241513	4.862345058	0.237666624	0.553150735	0.161971899	1.513492889	1.557079138	2.046665505
Zm00001d039747	7.14868146	6.898934817	7.204931215	7.157138858	10.59464038	7.786828812	8.790107975	9.005314313	9.466280324	3.9511391	6.026852165	3.467986457	4.355171987	4.404712664	4.608943552
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Zm00001d039761	1.235226342	1.546982475	1.613201049	0.087035068	0.082758911	0.085498377	0.024463763	0.067317596	0.008606648	0	0	0	0.007809367	0.007650274	0.024204919
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Zm00001d039768	26.11497938	25.66894392	25.13486145	22.57426293	29.58380111	27.44311484	32.92106541	39.93844216	41.96282949	63.27359196	90.7611303	83.45592455	17.9512674	16.28266503	17.87070438
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Zm00001d039904	31.9024549	29.68115095	29.24420007	16.05426146	18.8590644	18.88487369	18.63391051	18.71528802	19.12874993	27.4066864	26.02212563	32.35762196	12.1709656	11.62165376	11.00302462
Zm00001d039905	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039907	33.64301892	26.8355447	35.72967772	20.27425654	32.71645851	27.17867088	33.55137259	35.08552231	27.22580177	7.147278491	8.218123661	6.899547021	8.611320877	6.630082682	9.619720274
Zm00001d039908	71.47113429	61.06558668	80.4009017	123.9194837	243.9471388	116.2898605	150.9183963	184.8060792	153.4511916	12.6097019	48.84628298	8.786292071	34.9865568	36.86647656	51.45225321
Zm00001d039910	1.671827422	0.950949018	1.262290219	0.896787371	2.001539592	0.980060986	2.331633006	2.536060958	3.037314859	0.185945616	0.521389724	0.318619277	1.790362824	1.675062945	2.15108685
Zm00001d039911	0.039074624	0	0.048562057	0.56651154	0.347534206	0.436829813	0.759075854	0.641943261	0.445756092	0	0.049274354	0.005410637	0.513777662	0.637170246	1.044685685
Zm00001d039912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039913	15.73015469	20.55125527	17.78388792	21.19716151	21.51353625	32.47666811	23.64949506	17.72569112	19.81861468	0.482730502	3.673856684	0.490367484	9.619193552	5.879644556	7.522043093
Zm00001d039914	0.281369221	0.583693889	0.47310526	0.330269635	0.697873369	0.811095987	1.373139738	2.49461202	0.816485375	0.182613903	0.271329588	0.440030194	35.48670861	46.57546992	191.4493338
Zm00001d039915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039916	34.02470383	35.17808978	29.85650809	26.3196729	27.89493622	26.23532619	24.70291088	22.04604167	25.77151436	15.26129417	18.6986582	16.96218852	26.8872322	26.06397462	25.10385129
Zm00001d039918	6.83561696	6.513332293	4.540877943	8.047934666	9.309399633	7.226188071	6.936834514	7.534845289	7.258475011	1.389492494	3.827507248	0.706360658	9.697168425	7.157916035	7.799696441
Zm00001d039919	0	0	0	0.058357684	0.030828048	0.009554553	0.009112856	0.112842416	0.009618039	0.010755782	0.019668984	0.034556469	0.209449626	0.12823919	0.207378025
Zm00001d039920	0.079583066	0	0.014129438	0	0.35952811	0.027857184	0.411825318	0.246751877	0.147221989	1.959967306	1.003568001	1.372753933	0	0	0
Zm00001d039921	0.200731279	0.045146748	0.026728867	1.198071717	2.692159965	0.632374155	3.124601039	7.261086958	6.53374546	0.425149489	1.274683223	0.301775645	0.296825559	0.306496372	0.754236444
Zm00001d039922	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039923	0.264974151	0.180397797	0.320410367	0.384053067	0.839828818	0.526426364	1.004180426	0.889414778	0.724229799	0.167906262	0.117400859	0.253860618	0.184319876	0.07065583	0.041398146
Zm00001d039924	0.493949011	0.501718232	0.455460308	0.496799822	1.070753698	0.292816995	0.763366334	1.59464439	1.572067412	0.109876955	0.18083774	0.300063325	0.160474298	0.209606807	0.036843385
Zm00001d039925	0	0.189219447	0.165964833	0.145727948	0.483888693	0.572619902	0.68268534	0.905736056	0.535251524	0.092087353	0.021049896	0.092456487	0	0.091495035	0.135092411
Zm00001d039926	0.937917457	0.610213375	1.320036851	0.635217597	6.195588025	1.795908761	6.459611487	8.388243422	8.495324444	6.973138021	8.153884156	6.192610297	0.841037946	0.87156815	0.58885806
Zm00001d039927	0	0	0	0	0.041554455	0	0.092127087	0.3422366	0.019446855	0.108736364	0.397690071	0.087337788	0.035290772	0	0
Zm00001d039928	0.841550985	0.599964101	0.651209573	0.039605505	1.652839315	0.350156073	0.779260339	1.378486095	0.685383049	0.547470543	1.081245862	0.175892828	0.195451855	0	0.128502537
Zm00001d039929	1.055693739	1.307489335	1.530689167	0.131661544	0.904170395	0	0.43175235	0.25458527	0.433987722	2.450892451	2.884404627	3.254968095	0.236271039	0.501491704	0.549236713
Zm00001d039930	0.719538627	0.988648979	1.219424624	0.326319041	0.402223267	0.88153327	0.43312955	0.552108964	0.295796895	0.210501114	0.494924342	0.386459267	0.658789223	0.836588572	0.806676214
Zm00001d039931	6.45501468	6.070193586	6.514073483	7.838846798	6.614059881	10.16778368	6.790449304	6.771032621	5.820413283	4.247298417	3.225275333	3.666836616	4.614389169	4.019709032	4.158894871
Zm00001d039932	0.754048873	0.784557373	0.774154305	1.880834088	1.03676871	1.767294518	1.110959884	0.909211303	1.496008755	0	0	0.03631744	0.403558866	0.57503642	0.682265269
Zm00001d039933	8.114538843	10.36841187	8.148204077	14.37347655	20.02830908	10.91395062	20.20043898	35.13126163	25.81638962	27.08615807	21.39226207	10.2916596	5.922019256	3.964273256	38.68175083
Zm00001d039934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039935	0.109078994	0	0.090375797	2.017905745	0.263500558	0.890911284	0.55232149	0.02192074	0.605360932	0.401167776	0.298029574	0.221526726	1.037534624	1.773713984	4.476912195
Zm00001d039936	0.119139293	0.187570476	0.444199994	70.875216	28.10004604	51.08667754	67.65813296	46.83148731	52.7485129	0	0	0.494914134	66.19372504	67.22875754	85.29628866
Zm00001d039937	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039938	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039940	0.448073945	0.351151604	0.39599475	0.832018487	0.511682736	0.487957236	0.511939421	0.444226264	0.859599133	0.260919755	0.703155438	0.430175184	0.189421228	0.414786376	0.633153433
Zm00001d039941	1.146091466	2.233998066	1.695673628	10.44790849	3.847270713	8.357850367	10.23537457	11.84507513	4.778802525	0.827959043	0.51616361	0.453424327	38.56700265	34.25146761	59.24813386
Zm00001d039942	0	0	0	0	0	0	0	0	0	0.460897201	0.153243241	0.033654161	0	0	0
Zm00001d039944	0.069751193	0.175703773	0.317852291	1.826803916	1.225432403	0.854547558	3.124330355	2.158670934	1.949844836	1.763637248	0.645028947	0.206045885	0.59841266	0.305854831	0.887060881
Zm00001d039946	0.28133729	0.04429317	0.07648524	0	0.139013682	0	0.154098106	0.339228733	0.271067894	0.42438649	0.254994782	0.642783657	0	0	0.071151566
Zm00001d039947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039951	0	0	0	0	0	0	0	0	0	0.040202314	0	0	0	0	0
Zm00001d039952	0	0	0	0	0.065944563	0	0	0	0	0	0	0	0	0	0
Zm00001d039953	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039954	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039955	0	0	0	0	0.246765155	0	0	0	0	0	0	0	0	0	0
Zm00001d039956	0	0	0	0	0	0	0	0	0	0.021886112	0	0	0.008879019	0.121773891	0.210988786
Zm00001d039957	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039958	0	0	0	0	0	0	0	0	0	0.081888753	0	0	0	0	0
Zm00001d039959	0	0	0	0	0	0	0.022756178	0	0	0	0	0	0	0.021348841	0
Zm00001d039963	1.957789953	1.63550857	2.20969483	10.49752301	21.77807667	8.615237961	24.09064549	22.94004872	18.49472605	4.57366438	5.265170527	2.965434852	0.275716678	0.437999611	1.316509432
Zm00001d039964	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039965	12.86943178	19.18758243	14.72018431	36.61925871	25.94423258	27.60436031	39.50421817	49.22066935	47.82752506	36.00205306	27.51723003	16.45980799	21.90861355	17.66828217	21.28562962
Zm00001d039966	6.037254195	5.350651714	7.054089029	11.57754503	10.03585261	11.09469367	9.519531992	9.169708898	10.75876096	0.948370199	2.035567983	0.936033254	5.314713573	5.161723978	4.904787377
Zm00001d039967	0.082356831	0.069152489	0.076764984	3.089915326	0.922396258	2.362703881	1.218963462	0.645473346	0.321634575	0.009465304	0	0	3.256317817	2.971797312	3.642001877
Zm00001d039968	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039971	1.546192451	1.700210611	1.213312143	2.344935203	2.745184655	2.862540593	2.87909215	2.808990944	3.108773207	1.253826138	2.479587576	1.012803754	2.67820959	2.933201754	2.337030651
Zm00001d039972	0	0.471752595	0.930994507	0.233563971	0.49353031	0.229440166	0.218833383	0.677440941	0	0	0	0	0	0.615899453	0.433035947
Zm00001d039973	15.50920948	16.76378547	14.6101622	30.78431353	26.55819302	32.11937046	31.58770629	25.51719793	29.76679664	7.049220782	12.08353046	5.410338519	52.56276646	57.11769659	50.16315885
Zm00001d039974	0	0	0	0	0.280589662	0	0	0	0	0	0	0	0.047659033	0	0.09847858
Zm00001d039975	0.110799543	0.03151184	0.088839999	0.138184383	0.075352079	0.148881175	0.004176428	0.034477169	0.017631815	0.049293818	0.040564387	0	0.219979147	0.278187962	0.256198784
Zm00001d039976	0.758236503	0.549849453	0.913782844	0.831016684	1.604595606	0.900793661	0.939696291	0.554097352	0.850105361	0.507022131	1.24590618	0.509054538	1.131321326	0.730453301	1.354783892
Zm00001d039977	0.255060334	0.321249435	0.042265298	0.318100184	0.470511173	0.104161269	0.198692002	0.082011922	0.398442832	2.063718809	1.929835587	0.809960222	0.799177972	0.615133409	0.707722928
Zm00001d039978	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039980	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039981	0	0.004500515	0	0	0	0	0	0	0	0	0.009011952	0	0	0	0
Zm00001d039982	0.194797375	0.111521825	0.022008614	0.883428492	1.400040647	1.23665872	1.138103669	2.498282848	0.829917194	2.369072399	1.808845895	3.354517746	0.772854197	0.524152773	1.289852539
Zm00001d039983	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039984	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039986	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d039987	4.32902748	5.640611591	4.099843298	9.449432663	5.357011057	7.326842099	6.648141807	6.485664089	5.028547209	1.686473795	3.16832714	1.315386971	27.73274635	27.99103889	28.1249811
Zm00001d039988	0.066044608	0	0.082080434	1.317887527	0.282826247	0.647309455	0.57879844	1.174612774	0.977415826	0	0.08328437	0	0.110859056	0.217201257	0.248158885
Zm00001d039989	98.47139475	96.01879561	91.45277058	60.12226102	99.1117301	65.76983154	67.49031114	64.64669415	60.5455415	5.810491471	17.74491977	2.807041441	39.62108911	39.17698833	46.82082246
Zm00001d039990	0.02072745	0.044753657	0.06624035	0.007385822	0.007803273	0	0.003460004	0.007140739	0.040169949	0.004083796	0.02613798	0.009840398	0	0.003246023	0.106125227
Zm00001d039991	100.6477221	90.66188712	88.78984712	152.0154036	198.023288	146.7199962	195.6201808	231.4905534	193.2905482	206.2886665	216.0544319	266.8177889	210.1494333	182.1524473	202.4163675
Zm00001d039993	67.3402605	60.43090644	80.15546446	2.316795908	6.425324551	3.236031899	5.189278244	8.924673115	4.009272559	0.440347644	1.390902026	0.417997543	5.749136528	6.013846255	7.282083267
Zm00001d039994	0.417697339	0.299872066	0.186881574	0.562608722	0.308211413	0.880186596	0.56617204	0.679924684	0.412109331	0.218907928	0.231761088	0.14806597	0.775911781	0.485368161	0.999634311
Zm00001d039997	0.513048514	0.608175531	0.187534766	8.205159018	1.550861803	1.515925867	0.458439029	1.091681869	0.93048692	0.33297811	1.484226752	1.838720725	0.776747559	0.363919986	3.384467485
Zm00001d039998	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040002	12.68555483	17.02339623	14.30570757	29.83990226	39.48815222	30.27250549	35.23141818	38.05656906	36.19370803	61.52744854	63.35756652	56.1650556	16.63575632	10.53892675	15.87606012
Zm00001d040003	0	0	0	0	0	0	0	0	0.028969799	0	0	0	0	0.051501329	0
Zm00001d040004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040005	0.235534367	0.309554512	0.209996795	0	0	0.050184666	0.02393234	0	0.006314765	0	0	0	0	0	0.00591978
Zm00001d040006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040008	26.48460064	23.12609028	23.69772346	16.42776827	19.83540135	16.7602893	17.59871126	17.0136714	18.65518425	13.45162694	21.84497096	14.14564291	12.73452422	11.9459823	11.04680124
Zm00001d040010	20.11342553	19.15015307	19.28029565	10.97840012	23.46405804	13.41445012	17.28871243	22.55533192	21.46911452	26.26766519	40.11843291	27.72386608	4.857442503	4.907026196	6.612551528
Zm00001d040011	1.455961735	1.445274534	1.993487787	2.508283115	1.511993356	2.630278873	2.364506552	1.324107639	1.384745932	0.238238625	0.793531673	1.38048883	2.968581404	2.921631342	3.081277443
Zm00001d040012	0	0.041895303	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040014	0.012848904	0	0	0.096147575	0.016930316	0	0	0.015492854	0	0	0	0.014233433	0.100648354	0.098597939	0.059420346
Zm00001d040015	0	0	0.039884154	0	0.042286048	0	0	0	0	0	0	0	0	0	0
Zm00001d040016	0	0	0	0	0	0	0	0	0	0.020606432	0	0	0	0	0
Zm00001d040018	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040019	0.17442036	0.167377591	0.216770137	0.103585479	0.820801473	0.020351315	0.776419779	1.211793404	0.89116452	1.248592052	0.858851091	0.616447727	0	0	0
Zm00001d040020	3.108980758	3.137833451	2.860364308	1.394309703	1.691356526	1.437330875	1.088643608	1.302275623	1.127716329	0.813777238	1.140041524	0.787415633	0.633256476	0.374483035	0.470743519
Zm00001d040021	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040022	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040023	4.135498073	2.490555825	4.428546743	4.393986513	11.75794294	4.267216484	8.163352802	7.637044066	5.471591016	8.555300463	7.164290273	5.915423038	1.808418876	2.057670934	3.017262216
Zm00001d040026	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011068496
Zm00001d040027	0.453645771	0.259712967	0.256269227	0.102866787	2.472490085	0.808404568	8.794593493	2.610650986	1.449538628	9.271029666	3.56238529	3.60906615	0.876839955	0.384279146	0.619835767
Zm00001d040028	0.065621923	0	0.244665356	0.381923805	0.144110851	0	0.255597391	0.26375034	0.08093003	1.629062106	2.454956716	0.339233944	0.244776796	0.359685281	1.213886367
Zm00001d040029	1.480076607	1.128308557	0.822908963	0	0.590197572	0.023859163	3.208621096	1.620261167	0.624460111	16.4913101	5.574714045	8.672418449	0.392270506	0.341581463	0.022515402
Zm00001d040032	14.13354618	18.21717085	13.87159328	3.45945476	16.5344575	19.90476573	12.81073881	14.9713357	16.69752036	66.76633363	57.13307779	145.2250215	26.23664328	27.07775664	41.53797954
Zm00001d040033	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040034	0.866928476	0.366361058	0.751359564	5.014755849	8.672503215	8.21035889	24.89195494	29.27579254	20.86275119	2.949763061	0.769572595	0.732894123	8.648116356	9.290994424	11.2032018
Zm00001d040035	0	0.008558136	0	0	0.026859627	0	0	0	0	0.243651602	0.059979648	0.067743217	0	0	0
Zm00001d040036	3.688435035	3.613242559	3.610996062	6.8771721	6.822696878	6.679569132	7.523398505	7.013621549	8.135668238	7.265971996	6.255109022	6.387124236	4.699947265	4.663068944	4.672795381
Zm00001d040037	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040038	2.46905228	2.764249318	2.693500998	5.445790047	5.602972036	5.484080388	5.219871471	5.943203723	5.464130395	3.342170337	4.226361451	2.887054292	5.403099843	5.017349025	4.440428809
Zm00001d040040	0.852049724	1.178055097	0.294589522	0.798977033	0.785046222	0.690685861	0.127259713	0.162217582	0.11061196	0	0.121179929	0	0.595023256	0.252824705	0.207386475
Zm00001d040041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040042	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040043	0.106473784	0.160924951	0.185256306	0.106231588	0.336707595	0.547868808	0.124414618	0	0.157574047	0	0.026853372	0	0.691055985	0.233440603	0.369294675
Zm00001d040044	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040046	0.155797538	0.196227575	0.112948289	0.178111936	0.034214352	0.206779409	0.091024712	0.015654697	0.064047191	0	0	0.02876424	0.537555879	0.526604756	0.510349108
Zm00001d040047	0.40602336	0.53157429	0.418292667	0.992760966	6.842308852	1.878468512	5.936721351	7.800939362	8.242434219	11.05210169	12.51726002	11.95452617	0.657616441	0.931189912	1.624434769
Zm00001d040048	0.284817373	0.50221995	0.035397187	2.699610232	10.50808286	1.535337112	7.654609371	9.684582782	7.973575041	38.8489203	32.36066247	47.23151178	1.115519252	1.030348461	0.856148154
Zm00001d040049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040050	0	0	0	0	0	0.033836631	0	0.399621727	0.034061461	0.038090678	0.557248148	0.336541611	0.123624644	0.030276539	0.191585601
Zm00001d040051	0.666142862	0.78760401	0.795276175	1.148918581	1.046758898	1.087559598	1.074754464	0.994793503	0.85569478	0.428200299	0.694814886	0.372998193	1.045566733	1.006689265	0.92687884
Zm00001d040052	0.009319178	0	0	0	0	0.022834536	0.043557838	0.067420843	0	0	0.011751782	0	0	0	0
Zm00001d040053	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040056	0.530492505	0.417598295	0.453267132	5.175698296	7.441455606	5.896723561	4.197107525	6.316575433	3.973171627	0.434409245	0.473852381	0.14691388	4.594511908	4.446392416	6.989312208
Zm00001d040057	0	0	0	0	0	0	0	0	0	0.154802015	0.113233922	0.024867607	0	0.147654056	0
Zm00001d040058	0	0	0	0.215047188	0.021638266	0.080476311	0.019188993	0	0.040505521	0	0	0	0.027564954	0	0
Zm00001d040059	0.470012526	0.482594443	0.31746356	0.777324636	5.041994915	1.270580652	3.301227516	4.225820557	2.828972319	1.676929277	1.597715402	0.933789785	2.658380281	2.206589447	3.01822495
Zm00001d040060	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040061	0	0	0	0	0	0.01035175	0.138224794	0.081505049	0.0312616	0.069919229	0.031965138	0.140399004	0.018910445	0.092625999	0.107456077
Zm00001d040064	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040065	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040066	88.12303031	83.14132286	84.32334333	32.70969319	36.04552171	41.46300234	26.23253007	27.74561006	27.22837465	127.6689181	111.2708412	144.0923787	3.425725672	2.518804487	4.695646591
Zm00001d040067	14.6882741	11.42412414	12.30446346	7.084103986	37.66865099	13.95195926	41.35186791	48.3353197	42.52649201	122.8239301	110.4537883	114.080964	13.8043088	11.77866146	15.22989179
Zm00001d040069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040071	0.014497597	0	0.009008828	0	0.678146235	0.159853859	1.753335763	2.971736329	1.716437548	49.25663881	34.45230626	53.96086071	0	0	0.0167612
Zm00001d040075	0.954437592	0.717172479	0.957029855	0.568113554	7.960109461	1.920071078	5.715709213	7.238487355	4.748472958	5.332619338	6.072590142	2.222696482	1.687027699	1.664549098	1.536066623
Zm00001d040076	0.184190027	0.278385625	0.226218827	0.178366019	0.491105292	0.252205984	0.412727599	0.318766261	0.360779379	1.557044752	1.341698131	1.18821753	0.53832272	0.501225724	0.473497936
Zm00001d040079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040080	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040082	9.731747623	9.88234504	9.664086207	13.69206832	10.7885861	13.12645879	9.701351186	9.15611741	10.63152956	2.713374178	3.616713548	1.793276143	11.59956775	13.04300235	13.15528232
Zm00001d040084	1.936610756	1.837729626	1.846331927	4.984913835	9.461352743	7.302014915	10.42600937	13.43488955	15.59534598	19.19637112	16.21394767	14.4488677	3.255642216	3.693404807	3.823656995
Zm00001d040086	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040087	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040088	0.488258354	0.614963204	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040089	0	0	0.011312017	0	0	0	0	0	0	0	0	0	0	0.049889769	0
Zm00001d040090	13.68290876	14.45452368	7.617498823	4.80006206	3.830444258	4.782060783	4.010761796	4.162157544	3.153230261	0.375702244	0.564356512	0.245724234	10.23822672	9.116702783	8.008638054
Zm00001d040091	0	0	0.016143135	0	0	0	0.007588996	0	0.024029106	0	0	0	0	0.014239322	0.015017399
Zm00001d040093	0	0	0	0	0.104327353	0	0	0.031823159	0	0	0	0	0	0	0
Zm00001d040094	4.186281726	3.020190558	5.338318305	1.845819918	7.925596748	2.257820206	4.232056908	4.816051916	6.82724276	9.191920232	8.778452905	6.889060502	0.169865924	0.215807008	0.34277004
Zm00001d040096	0.055915067	0	0.034745705	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040097	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040100	23.84968808	16.596865	23.50190521	4.708046911	2.905460698	3.933344579	4.514179731	7.08297283	2.023250759	0.024328884	0.600614637	0.117246755	1.421284621	1.547033466	0.448681117
Zm00001d040102	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040103	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040104	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040107	2.458739785	3.066530048	1.463166675	2.57700283	6.532265418	3.92481128	7.889154978	9.985275745	7.556077089	23.2179082	15.83603261	30.20889772	5.502817542	3.845492896	6.601958995
Zm00001d040108	0	0	0	0	0	0	0	0	0	1.146377038	0.455132425	0.751160877	0	0	0
Zm00001d040109	3.282539015	3.407447832	5.45434227	8.337638045	11.35966138	7.777961097	6.125794995	6.799632216	6.895423652	0.165830127	0.318414385	0.173154655	1.412794831	1.89807536	2.168607461
Zm00001d040110	0	0.217961642	0	0	1.064109657	0.035335722	1.617705007	4.103710453	0.924833329	0.875121267	0	0.031950153	0	0.031617904	0
Zm00001d040111	36.74638019	46.61397388	38.69546823	35.97290178	43.10830359	29.49654484	24.16232563	28.42684898	29.91994138	105.7181441	82.08035718	108.4617199	16.77239847	17.35475704	22.77986017
Zm00001d040112	3.306115393	6.133554571	1.887849973	4.401841245	2.884571765	5.364101141	3.497758417	3.28610513	2.534573391	0.369703637	0	0	8.849161127	13.56656084	14.35952861
Zm00001d040113	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040115	0	0	0	0	0	0	0	0	0	0.733245547	0	0	0	0	0
Zm00001d040116	1.346654247	1.723253864	2.209186139	8.061546045	7.523517616	7.721231126	4.733285022	3.065656036	4.663521254	3.818522908	3.301250664	2.73290883	4.424403275	5.208208853	5.766817169
Zm00001d040117	1.991244941	2.638994271	1.754469268	4.271808868	3.093684022	4.606011337	4.280214465	3.16249558	2.712328917	3.473807706	3.382386475	6.64212425	5.445951132	4.373890303	6.519897478
Zm00001d040118	49.28259325	44.62120108	40.71818349	22.75647674	41.76599754	28.77068665	31.60612902	32.88016666	26.15178513	44.50158456	51.2098128	40.18143998	14.5171722	11.78404398	15.42341339
Zm00001d040120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040123	15.62019616	15.16904489	13.09863989	13.01420611	14.07938812	13.91332077	15.36988366	16.06250259	15.96028924	19.81346044	19.13255614	26.20055368	13.89359897	14.45752938	15.494638
Zm00001d040124	2.548639353	2.73898505	2.169019118	7.911831619	7.774977504	9.995176117	6.830173447	7.415473074	6.47426577	12.76095593	14.46262196	14.92955872	8.726528375	9.232043681	8.887766665
Zm00001d040125	0.686167395	0.99003606	0.507344688	4.148802456	2.20309234	4.10747459	3.64863652	4.24677425	3.261752733	0.527074308	1.078860649	0.962158355	7.056383173	8.802653592	7.335543657
Zm00001d040126	0	0	0	0.014995752	0.015843321	0	0	0	0.088973208	0.016583013	0.03032518	0.173154655	0.053820755	1.159934942	1.640356925
Zm00001d040127	0.048215317	0.01656201	0.027237335	0.191329255	0.219469875	0.161100982	0.128044541	0.11098824	0.135142858	0.01813551	0.077383169	0.048555218	0.206008044	0.0816855	0.065878665
Zm00001d040128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040129	0.021103011	0.004429887	0.061196063	0.01315938	0.500513631	0.038781114	0.226039628	0.186599803	0.425089131	0.019403021	0.05765841	0.015584639	0.031486596	0.030845149	0.016265307
Zm00001d040130	0.222714337	0.668907345	0.447122362	1.100355575	1.456007185	1.584660998	1.191106264	1.373699685	1.605754571	0.023627676	0.205236483	0.075911642	1.71581479	0.948418269	2.238166371
Zm00001d040133	0	0	0	0	0	0	0	0	0	0.124701624	0	0	0	0	0
Zm00001d040137	0	0	0	0	0	0	0	0	0	0	0	0.026569075	0	0	0
Zm00001d040139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040141	0	0	0	0	0	0	0	0	0	2.056476481	0	0.01855928	0	0	0
Zm00001d040142	6.528934245	6.509903604	6.294840927	7.377640808	7.561150065	7.407691939	7.288220725	6.422833544	7.093817053	4.474040624	5.204617143	4.088829588	5.552016059	5.940963262	5.194013617
Zm00001d040143	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040144	0.513622425	0.439259431	0.315225413	2.902324837	1.645978524	2.004302454	1.785684464	1.804414429	1.313799194	0.813313706	0.927562287	1.01852227	6.925503039	6.054535396	5.718243698
Zm00001d040145	0	0	0	0.019309366	0	0	0	0	0	0	0	0	0.069302604	0.016972692	0.071600508
Zm00001d040146	1.818846237	1.978944676	0	0	0	0	0.179604663	0.123555749	0.021062365	0	0	0	0.009555621	0	0.009872462
Zm00001d040147	0	0.029636781	0.036554754	0.022009686	0.031004916	0.079277304	0.020621562	0.05674491	0.058039322	0.170375471	0.044509117	0.058648603	0.07241138	0.135423675	0.06801124
Zm00001d040148	0.277914059	0.363496624	0.199264853	0.986483637	1.028155991	0.432151181	1.311460422	1.18574234	0.645942711	1.076158437	1.078333985	0.355223749	0.287072083	0.046870639	0.321306578
Zm00001d040149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040150	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040152	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040153	22.13931437	22.02304921	22.60696764	19.48036847	19.2839766	19.91102289	17.98531681	15.94699741	15.8505872	4.374219074	12.26004016	4.592683098	14.93899323	10.89645515	12.78605116
Zm00001d040154	8.125006802	7.622657621	8.978362304	11.41807406	11.94149592	10.15831841	12.02438088	12.38561359	12.63010026	5.326334979	8.028673397	6.102854086	10.39003491	10.0160556	8.423584862
Zm00001d040155	24.98474611	27.52574502	25.6322079	25.66108712	17.4053987	20.41555469	11.93832407	11.40897965	12.54538132	4.99081899	8.130004342	6.163007068	19.81010647	21.20749118	18.42385824
Zm00001d040156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040157	10.14500822	10.70029579	7.837080777	11.45544435	12.09354577	13.79647702	13.10052931	11.88968152	12.54667983	8.442047011	12.69456487	17.66449691	11.11392303	10.43548689	10.05226633
Zm00001d040158	0.512498131	1.395661172	0.826292997	0.017274742	0.237264572	0.101818432	0.064740981	0.08350758	0	0	0	0	1.627505292	0.774398401	0.288251892
Zm00001d040159	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040160	1.561643955	1.406158348	1.455611778	1.802397718	1.389846631	1.879662123	1.200513799	1.040598158	1.199489011	0.368407081	0.578692849	0.424892215	10.29356328	9.212880751	9.328279868
Zm00001d040161	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040162	6.066790698	5.806396763	2.345643613	3.352358984	3.100058996	3.502091265	3.363834588	2.756692899	3.176033169	1.407140502	3.025177083	2.314879773	3.671005066	3.805338462	3.451882424
Zm00001d040163	9.207105329	10.27209496	12.0021899	19.13677376	25.84772649	23.12094831	24.25520715	25.25715499	21.12916407	7.36695376	10.51038151	6.112726706	39.73786845	42.23475181	40.93717157
Zm00001d040164	33.73265613	34.43793942	35.98270437	37.30525892	44.10911688	33.77111981	44.04090387	42.57436168	45.04564138	30.95225562	34.32850228	20.9516131	31.84322196	31.5137793	35.96911619
Zm00001d040166	0.183291839	0.178178028	0.207156435	0.790872594	1.072224408	0.767866363	0.381636677	0.290722244	0.395966203	0.035628074	0.062050172	0.032704813	0.415725201	0.486145018	0.626486725
Zm00001d040167	0.189878249	0	0	0	0	0	0	0.228949948	0	0	0	0	0	0	0
Zm00001d040169	0.838542278	1.031000742	0.942891115	1.624714984	1.479780093	1.920126868	1.382269572	0.794428734	1.501987299	0.041303145	0.289534053	0.143758191	1.066821103	0.941126145	0.796349787
Zm00001d040171	4.532838197	4.442127825	3.886159253	3.007964368	1.389366579	1.588791789	0.778914922	0.628394537	1.091144396	5.365619008	4.111279762	2.618043121	7.90696321	8.94164428	7.244330532
Zm00001d040172	20.5140387	20.4780807	27.72816869	16.47645229	20.91198464	13.15625836	14.84937525	15.32303498	15.31798682	3.489442529	5.891646676	2.739045292	7.576884259	8.021372586	10.07184239
Zm00001d040173	0.36582048	0.157972199	0.181857107	4.445036645	6.638133602	7.094051378	11.21169749	6.780279181	5.452567987	0.172980601	0.237245843	0.266300128	1.22809459	3.11653913	4.930253306
Zm00001d040175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040178	23.31334402	22.13617549	22.44699663	29.66452322	43.97284848	32.0003744	38.76820186	42.66845242	39.04969919	47.40547428	42.59157601	38.44577494	25.32656254	21.96249047	24.01391163
Zm00001d040183	9.26574274	9.212089132	8.866222638	20.14590413	90.29398672	36.57416172	61.88450349	92.42914058	61.45933815	24.74785385	14.8623642	11.50258647	8.746572099	7.259760085	11.08487998
Zm00001d040185	63.31784848	71.39934855	68.80480796	64.32397066	65.49434403	70.75064436	82.30139596	80.32590488	79.79631228	180.4420668	141.1699687	241.8040599	62.24927138	53.56843015	59.13553826
Zm00001d040186	0	0	0	0.028623676	0	0	0	0.01844924	0.009435044	0.063306834	0.028942134	0.067797974	0	0	0.008844886
Zm00001d040187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040188	0.064221886	0.414549476	0.299306807	1.411669967	1.004883354	1.957179856	1.266355248	0.8808456	0.742531841	0	0.080985858	0	2.326673156	1.760057158	2.292446025
Zm00001d040189	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040190	45.07170398	47.17009301	46.49329612	122.3903434	99.70206887	106.731441	92.77229705	114.4943412	129.9296796	108.6292043	129.481279	85.78760866	128.7550905	130.1504707	131.5320524
Zm00001d040191	8.49019755	10.8978734	10.50934483	11.9240177	13.08436558	13.25946232	12.29468972	13.35292915	13.10541113	11.57217694	11.77936362	12.39506858	11.86794811	12.6794457	12.88800226
Zm00001d040192	24.19698828	22.9342713	22.03737741	16.32668319	19.44918953	15.00393732	16.44933706	17.78231898	15.35005978	11.52094842	8.85158535	6.419043324	16.03426501	15.24126101	16.26038752
Zm00001d040193	3.507512579	4.071521372	3.782291283	7.909258918	7.096236204	7.822042325	7.575834666	7.226063888	6.666220698	0.581128183	1.353285782	0.368307639	3.707678863	3.684471784	3.682187136
Zm00001d040194	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040195	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040196	0.410393514	0.323057593	0.286896525	0.543814049	0.811130491	1.099849202	0.674359909	0.804116889	0.806643126	0.194562608	0.291104655	0.255721112	0.37313536	0.295238856	0.326198748
Zm00001d040197	0.962198282	1.363378833	0.996519047	6.566732097	4.824825645	4.355101806	1.920728196	2.819911378	3.279789028	1.714080499	3.151373095	2.102151415	20.09897444	20.2901643	25.57049753
Zm00001d040199	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040200	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040201	3.249155292	5.063382836	4.260495256	8.920003279	5.061294981	8.619140505	4.24708656	3.685333295	3.327938476	0.132914601	0.217017429	0.030502261	4.136616925	4.422112591	5.75407962
Zm00001d040202	670.3192883	684.607211	715.2936277	1457.454269	926.2841307	1491.83328	195.8899423	130.5593507	175.0334502	30.92607271	20.39969931	3.147987545	763.473552	629.6667477	620.3818236
Zm00001d040203	3.29491625	3.888154451	3.532882177	4.925526784	4.348937988	5.760847996	4.808534236	4.823049152	5.314133732	2.653707943	3.793691178	2.402189353	5.019885749	5.290213961	4.991479998
Zm00001d040204	1.016049409	1.030016919	0.893164066	3.39973176	7.368810112	3.916564433	7.635103339	7.271062987	7.324860503	0.512670602	0.687511216	0.658848834	3.974849783	3.939151489	3.829686187
Zm00001d040205	0	0	0.008427902	0.515902958	0.160838003	0.224318734	0.364505208	0.114474974	0.259262457	0.018705244	0	0	4.515196973	3.821061391	3.1987953
Zm00001d040207	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040209	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040210	3.080841447	5.25461517	4.786098523	9.28553853	1.691441909	5.818947315	1.649983159	0.541740721	0.554098408	0	0	0	215.7598283	245.7708697	229.5924063
Zm00001d040211	0	0	0	0.080047746	0	0.23590327	0	0	0	0	0	0	0.071824177	0	0
Zm00001d040212	3.979420202	1.940165601	2.233512644	16.48983566	9.47207469	26.65706945	14.9998469	7.971327752	10.84449742	0.531123535	2.428149941	0.07110034	65.50364961	74.51226767	96.76422037
Zm00001d040213	0	0.049267438	0	0.048784463	0.347907097	0.053913515	0.079988454	0.117914136	0.084422719	0	0	0.037915096	0.060187427	0.053601168	0.084795129
Zm00001d040214	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040215	83.32030481	91.70382994	83.48032906	129.6977459	138.7950279	153.7781527	187.9910978	196.5858075	196.596666	18.73931263	35.92896471	11.48426147	79.74804434	76.57485454	90.47512565
Zm00001d040216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011884069
Zm00001d040217	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040218	19.92917911	21.02091822	18.03850947	17.35521293	14.99538906	17.72606333	17.91040628	14.17058643	16.32579431	12.67322558	12.85153541	12.74109827	10.69229549	10.35675618	9.223697167
Zm00001d040219	1.21730165	1.375945068	2.172320517	8.135811658	5.511088466	4.741763436	6.528529255	7.188401094	5.774117464	0.559619889	0.984010535	0.276609544	3.21339401	2.292514632	2.129093407
Zm00001d040220	0.864021984	0.909161601	0.874452107	3.719210391	1.921478009	4.381572967	3.003269346	2.123190234	2.014258534	0.19106284	0.036778378	0.012115498	11.29644913	11.74971917	10.57514199
Zm00001d040221	21.08507684	22.41288844	24.42197001	57.23266862	46.32809477	63.28426188	57.20562923	55.12814475	56.15350058	37.47485764	26.60026319	29.16657185	36.85696509	40.79381422	45.17871135
Zm00001d040222	0.204449779	0.162634897	0.040119598	0.58377205	0.545874434	0.60642273	0.377209845	0.149209411	0.431297715	0.044521571	0.162832251	0.005960005	0.367261525	0.300799379	0.342117144
Zm00001d040223	0	0	0	0	0	0	0	0	0	0.694819901	0	0	0	0	0
Zm00001d040228	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040231	2.258374925	1.676182892	2.105036253	2.766251751	3.453984252	5.13837682	2.026306752	3.501110703	5.321726432	3.225909611	3.356433812	0.670104979	0.496413119	0.309463737	0.652747401
Zm00001d040232	0.580211519	0.350164724	0.120181431	0.678388722	1.752010784	0.429464927	1.483075048	2.361160202	1.66964401	2.233912162	1.265171318	0.897146736	0.716908167	0.768558292	0.824529542
Zm00001d040233	4.531554624	5.663673337	4.671563579	5.925020849	4.806140895	5.129634918	5.400861371	4.754791477	4.588541798	2.212856978	2.835273044	1.542196794	5.651271813	4.89515673	5.178737305
Zm00001d040234	2.358902395	2.071992206	1.918204407	3.611075054	4.067444047	3.718168337	3.510376515	3.157799277	3.375582612	2.754560552	3.308480236	2.801604182	1.391258155	1.611660361	2.019449364
Zm00001d040235	15.67270633	15.38022338	15.87861963	19.39361384	18.2124245	16.27602541	13.96078586	16.32540102	17.68514916	10.61926895	24.24151816	15.33739414	12.29470085	12.45723652	10.13248924
Zm00001d040236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040238	3.205246789	3.204962595	2.767157276	11.64904224	13.78241357	12.62742177	14.42381251	16.17462234	17.19235079	4.353074233	9.25630313	4.57380378	7.912806937	8.019828408	10.71400684
Zm00001d040239	0.008186368	0.01031076	0.050870209	0.030629048	0	0.030088261	0.057394624	0	0.010096062	0	0.103232722	0	0	0.008974184	0.009464558
Zm00001d040240	0.029784823	0.037514095	0	0	0	0	0	0	0	0	0	0	0	0	0.03443532
Zm00001d040241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040242	63.14808049	71.31996338	71.47897892	56.33426094	33.05839568	46.5355924	26.24437499	26.32672804	18.34265798	2.382760254	6.772803942	2.648878343	85.44492206	80.61627516	90.28997773
Zm00001d040243	0	0	0	0	0.104126337	0.019363159	0.027702029	0.133399738	0.009745909	0	0	0	0	0	0.03654523
Zm00001d040244	1.101038973	0.594326855	1.075151375	5.803269712	16.47671998	6.230741389	28.01340055	30.39261164	23.55286319	36.29972201	19.66964415	7.521366215	7.465926961	9.153065031	9.713830811
Zm00001d040245	4.333196171	3.956815544	9.693556121	23.96751298	71.88413667	8.361294172	182.5080817	206.6688725	177.1012419	217.264457	103.9036529	146.0435923	0.315184068	0.23751009	1.327588018
Zm00001d040246	7.695354351	7.952678795	8.600421681	5.853305744	5.757005631	5.905364114	5.665303	4.826359307	5.231945692	4.412431964	5.545193556	5.901621454	8.642892021	8.003306505	9.613844454
Zm00001d040247	0	0	0	0	0	0	0	0	0	0	0	0.017589283	0	0	0
Zm00001d040248	0.031927216	0	0.007935848	0.007963648	0.033655033	0	0.246225885	0.585153719	0.189000538	1.488311839	0.571709661	1.096393153	0	0	0
Zm00001d040249	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040251	0.83836152	0.9810905	1.517754807	0.329312794	0.113075873	0.218361452	0.115703792	0.183071518	0.211671172	0.182084843	0.099892986	0.431442771	0.184675878	0.238806017	0.297646871
Zm00001d040252	0.016692593	0	0	0	0	0	0	0.201274679	0.102932985	0	0	0.018491297	0	0	0
Zm00001d040253	7.737715109	13.666357	2.510700103	1.36274592	0.569211074	0.07783054	0.311776558	1.27156588	0	0	0	0	0.014217983	0.013928333	0
Zm00001d040254	1.879794664	2.31021177	2.77513946	6.351188283	3.692840548	4.522265677	2.622535732	1.854494575	2.627415917	0.188548855	0.675228029	0.315507761	4.29634272	4.296240854	3.595822246
Zm00001d040256	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040257	16.19588687	13.69251405	18.43778214	24.70063326	33.8169529	22.09225443	24.00245536	25.63601225	23.64245145	3.211827183	7.455256963	1.518541417	11.29474811	11.17489113	14.49019086
Zm00001d040259	1.941386554	2.34891648	1.722495987	4.359454544	3.021332594	3.208741676	3.679630725	3.23175267	3.022684853	1.075213373	2.120445513	0.733793674	5.297186997	5.664071231	4.701095054
Zm00001d040260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040263	1.719761319	1.932667079	1.597596038	4.116305309	8.613995679	5.107740422	22.964251	23.25689277	21.26655641	5.390532699	8.36801559	3.720345641	14.70889789	22.51524232	24.46854854
Zm00001d040264	3.15154243	3.661505054	5.555052794	23.16906866	7.384990909	14.39612507	3.764185718	4.09478297	3.133067108	0.216722822	0.011008853	0.058024416	59.19151526	68.96264722	64.83814606
Zm00001d040265	0	0	0.068201304	0.085550275	0.117501321	0.2100995	0.344665323	0.008271147	0.109977671	0	0	0	1.427762294	1.549071079	1.102362207
Zm00001d040266	0.075972403	0.081334394	0	0	0	0	0.004438688	0	0	0.073344928	0	0	0	0	0
Zm00001d040268	0.708259993	0.663323754	0.984049322	4.330489482	5.149550853	5.121745773	4.974099071	4.620360791	5.496211215	0.390722919	1.396960334	0.249455658	3.068651716	2.691587516	3.4643451
Zm00001d040269	0.02598106	0.013089297	0.071036544	0	0.047927402	0.057294637	0.066789512	0.106512632	0.012816741	0	0	0.02878064	0.046517825	0.074051512	0.132165665
Zm00001d040270	9.955168075	9.878368209	9.945076506	8.075961205	9.661924557	8.336672104	8.101008136	7.717403986	7.759936116	3.056149021	5.045474265	1.977481091	6.65294075	6.343027838	6.337139584
Zm00001d040271	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040272	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040274	60.14432184	64.18558954	55.3233666	25.73932012	23.16733928	22.9541215	19.58720755	17.98519618	19.52489399	5.275460188	6.954645593	3.587120063	15.40612652	14.58753221	13.74672774
Zm00001d040275	0	0	0	0	0	0	0	0	0	0	0.074389923	0	0	0.064668335	0
Zm00001d040276	0.007680468	0	0.104998397	0.335256149	0.435166192	0.150553997	0.062822392	0.111130761	0.047360739	0.042370529	0.106538489	0.008508074	0.034378763	0.050517596	0.079917027
Zm00001d040277	0	0	0	0	0	0	0	0	0	0	0	0.083593593	0	0	0
Zm00001d040278	18.58985129	16.09645385	19.34175443	31.99266195	48.69058953	31.23208403	52.36524043	60.128508	53.15284641	43.63526081	46.8529899	32.01181324	19.48542222	18.37875282	21.46324296
Zm00001d040279	6.15579739	6.390343002	4.925893212	29.8183514	29.06295753	28.7149811	41.86835687	40.55296836	42.37796555	52.45735362	47.83433229	71.59723192	35.92227899	34.90672903	30.43267785
Zm00001d040280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d040282	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d040285	4.41686019	3.061150171	3.252910723	3.992945768	21.6166276	6.585128874	15.64714798	23.55718845	13.02719862	0.418997455	3.389033208	0.362429428	1.07220605	0.896651341	0.810554465
Zm00001d040286	34.51040095	35.30683513	30.03946877	29.29481497	30.37413314	30.88024608	25.30414173	27.00397708	28.23212983	29.06553116	26.11972098	31.30458294	27.59387649	27.58509423	24.61816021
Zm00001d040287	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040289	0	0	0	0	0	0	0	0	0	12.71482191	0	0	0	0	0
Zm00001d040290	7.289670646	8.168854234	6.845597543	13.75772329	8.336721169	12.28674993	6.523300024	6.330486826	6.022016779	0.417476593	1.45177807	0.450758093	16.93668847	17.17372098	18.18098673
Zm00001d040291	23.64437397	23.60495236	28.49105284	24.06223486	54.79122764	30.81266291	52.69545358	71.20371393	65.62563663	127.5070285	152.2045817	117.4847405	18.42567068	15.48216937	18.99792834
Zm00001d040292	514.8074023	736.7088361	590.3070884	25.33844691	545.482087	111.7190376	230.9695175	313.2035283	213.6824442	811.5456961	1194.219786	355.5246617	165.0968493	130.1465404	237.5811127
Zm00001d040293	1.594977291	1.345850506	2.480244275	5.085654121	7.857768365	6.073966884	3.727461955	3.600040555	3.430223989	0	0.069355777	0.095740286	1.714492644	0.645986496	1.907598008
Zm00001d040294	6.38913232	7.112527507	6.643078332	13.42681272	18.74302807	12.85076007	12.85922937	14.28546573	14.03742669	8.603517204	9.896665592	6.408842095	11.85039456	14.07691934	11.02190023
Zm00001d040295	0	0	0	0	0	0	0	0	0	0.097190131	0	0	0	0	0
Zm00001d040296	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040297	0.950757275	0.454217426	0.855644232	0	1.339159583	1.727128733	0.957724038	1.067335007	0.606490036	1.49211324	0.826852018	1.815872004	3.595342626	3.701796954	4.700049632
Zm00001d040298	14.25654669	31.69975464	34.55285042	1.199247423	3.525647722	0.512205876	5.373798362	4.335345796	3.557703935	132.9067616	54.72470775	44.1363517	0	0.183325831	0.725037251
Zm00001d040299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040301	16.27157955	16.49685383	14.72890742	13.18435756	19.52475878	16.13735377	17.38819509	16.23017258	17.22536722	7.657246514	11.37196695	7.27306851	11.69743008	11.54428204	10.12239101
Zm00001d040302	4.935565036	4.848231379	5.356270661	8.492203412	11.94130152	9.466339016	9.961167292	11.45726999	10.73881917	8.111139989	10.51946481	5.782821595	5.83775979	5.691856944	5.848434962
Zm00001d040303	10.02466443	8.435966997	8.556624809	6.686008395	9.538065755	7.855713878	7.75091616	6.993255925	6.447989585	12.41823386	9.647289236	7.947121581	17.22086067	16.23610467	15.24342562
Zm00001d040304	12.40880016	8.299233149	11.48016875	18.81662893	23.61275762	28.51879255	22.27122538	22.72173534	21.26539837	0.297261708	0.038828524	0.034108947	6.339939534	4.388052412	4.805821237
Zm00001d040305	0.110771636	0.076100338	0.105127768	0.585251854	0.419297186	0.82166485	0.814274246	0.415266905	0.501739164	0.016666074	0.012698781	0.002231051	0.581471101	0.351048171	0.31667508
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Zm00001d040308	0.02359143	0	0	0	0	0	0	0	0	0.699534147	0	0.78400548	0	0	0
Zm00001d040309	8.170885897	8.491320844	8.02622459	3.956423079	4.525025513	4.602937366	4.188741957	3.393691531	3.737492426	1.664020376	2.333132008	1.469482683	2.190041354	1.975609386	2.239955493
Zm00001d040310	1.662615513	0.961368679	1.258566649	4.137658695	2.977414617	2.666528499	2.172365887	3.061778403	2.246192339	0.270993379	1.534338418	0.820424824	3.069858241	2.518526012	2.769730473
Zm00001d040311	18.65242105	18.07722625	17.20940008	17.40139649	16.02593766	17.10339923	14.68497978	13.78298055	14.37337881	5.673458277	9.541061711	6.94964308	10.38005334	9.730312681	9.128241658
Zm00001d040312	0.100973751	0.030830743	0.076054833	0.393054498	1.088572339	0.416104223	0.961779575	0.955563702	1.532079619	1.253335047	1.145980255	0.952454941	0.362946793	0.244861846	0.244091547
Zm00001d040313	0	0.072196938	0.089049527	0.017872295	0.132177143	0.298464619	0.385137578	0.501097998	0.318121189	0.43480868	0	0	0.080181078	0.157095248	0.265086995
Zm00001d040314	22.83418085	22.24270552	19.18269825	16.18305739	13.38502815	16.66843503	12.37023643	10.18802754	11.89616569	2.271064901	4.762189574	2.326785285	7.616515665	7.26077755	7.352917927
Zm00001d040315	0.026040446	0	0	0	0.034312107	0	0	0	0	0.035914068	0	0	0.029140095	0.171278705	0.270956778
Zm00001d040317	8.472348437	9.059372039	7.13619452	8.811898825	7.923775744	8.773212198	8.762146608	8.746641877	8.394004433	4.102995839	5.84328982	3.265742462	10.01742905	9.647070769	10.44009527
Zm00001d040318	7.540564712	5.546782827	6.319812945	5.78875988	11.45956793	7.148625342	9.175196038	9.576103485	9.214947291	4.704618008	7.304801639	4.328634863	4.154067389	3.490572684	3.858351961
Zm00001d040320	7.045695023	6.327643453	5.900089041	4.733918983	3.397412358	4.52714919	1.37634529	0.978585119	1.554507085	2.179182982	2.83029035	2.024818915	3.327344153	2.885576031	2.78999362
Zm00001d040321	0	0	0	0	0.012959609	0	0	0	0	0	0	0	0	0	0
Zm00001d040322	44.00462406	43.93097523	44.40277204	41.05876233	42.26162476	35.3770452	28.82333349	31.88032396	30.05903574	6.329961555	18.47422243	4.240906225	34.3091581	32.42985825	37.83586994
Zm00001d040323	253.837238	212.6190324	272.9930421	157.2903099	316.1905835	164.0631364	261.6696976	329.2059246	268.8300777	417.9499616	599.917042	409.9165391	108.2528959	89.87749889	97.51539025
Zm00001d040324	2.341355851	1.941989065	2.02979358	0.626739745	1.655408685	1.105414736	0.653940694	0.50954274	0.267625762	11.21527023	6.135490653	8.856358196	0.664598652	0.600977913	0.950725538
Zm00001d040325	0.016438357	0	0	0	0	0	0	0	0	0.083127752	0	0	0	0	0
Zm00001d040326	0	0	0	0	0	0	0	0	0	0.054890496	0	0	0	0	0
Zm00001d040327	0	0	0.038209857	0.012781237	0.040510921	0.037666714	0.01197514	0	0	0	0	0	0.011468178	0.022469096	0.02369687
Zm00001d040328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040329	0.949391244	0.239152357	0.235981247	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040331	11.43412292	12.02197158	13.54103299	11.62511583	14.59668237	13.39930571	12.91541363	14.37639162	12.97741649	12.31852518	13.50978479	12.3449582	9.791071837	9.791432643	10.70005581
Zm00001d040332	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040333	0	0	0	0.025203503	0	0.04951702	0	0	0	0.013935614	0	0	0	0	0
Zm00001d040334	59.45697016	57.21478413	64.28739783	38.08713826	59.27335611	42.34686238	50.38963056	52.2302096	49.85413484	51.11401908	71.68949078	70.34377341	37.59690763	34.43752267	37.69324051
Zm00001d040336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040339	0	0	0	0	0	0	0	0.109458142	0	0	0	0	0	0	0
Zm00001d040340	5.86130259	6.326049089	4.858850675	2.568676925	1.535687346	1.975596776	1.905883795	1.873733806	1.749164316	1.42453465	2.25121371	1.41743676	1.43186697	1.291157131	1.154957851
Zm00001d040341	2.8645661	4.397650538	3.178107149	14.9802302	14.9035502	15.12241786	12.54139627	9.69495965	16.40555547	7.884462006	10.32531458	4.739425931	15.06466904	14.70386096	15.67788733
Zm00001d040342	5.061682677	5.977764594	4.796175306	6.876440943	5.056915377	6.587852658	5.799971992	4.843512553	5.81121878	0.064692371	0.720568264	0.047237594	2.185507106	1.93529978	1.829056855
Zm00001d040343	26.88565261	27.83698566	19.52995707	19.60873122	15.46937176	18.94707414	19.70650451	13.83046852	17.01407205	3.585406535	6.677043542	3.358260005	11.9479257	12.91549136	12.37289724
Zm00001d040344	29.44857685	30.20300363	27.81480887	29.43293805	31.26343019	31.08613057	33.29427407	29.48733888	33.2716687	22.89521809	27.67697179	25.59925207	19.42738614	20.90063118	20.98694506
Zm00001d040348	1.342838024	1.337453934	1.529809461	2.137952337	3.397597772	2.721515201	3.319049195	3.476594188	3.244647755	2.190213971	2.699170717	1.020702223	1.734475076	1.597348426	1.954393342
Zm00001d040350	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040351	14.81431368	15.95202211	15.8825639	17.66792966	21.77929453	16.16095191	17.39957157	16.25468056	17.13297164	16.16433326	21.41048957	16.05607387	16.15983933	16.85815906	17.9114916
Zm00001d040356	0.970678044	1.286918514	1.10477319	5.734362069	5.156432716	6.058729412	6.029366711	5.864404038	4.322216059	1.155531099	0.541161668	0.011318664	5.190987731	4.222762545	4.536197186
Zm00001d040357	9.099968282	9.429691072	10.01348069	7.171475565	7.268355481	7.003139619	6.231777925	6.410028295	6.07857093	6.351490067	6.38712293	4.44146915	6.568088449	5.753060803	5.845985286
Zm00001d040358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040359	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040360	7.535801748	8.653896347	9.002415015	30.05453675	48.25377138	30.58537173	27.78232513	35.08248806	26.97419184	6.252541244	7.800498786	2.544522427	40.3602123	39.88035952	38.35559259
Zm00001d040361	1.044196084	0.121774892	0.072096109	0.024116223	0.178355013	0	0.022595243	0.279791732	0.190782721	0.026668862	0.219460794	0.171364894	0	0.02119786	0.156493189
Zm00001d040362	0.249134103	0.715822773	0.183839604	0.116515967	0.020516921	0.133535222	0.054583725	0.075099755	0.009601608	0.075161844	0.078541524	0.112116653	1.85568969	2.270223156	2.457281717
Zm00001d040363	0.334157872	0.231480192	0.275131206	1.177310845	1.045717294	1.38168826	0.444152204	0.604377497	0.509985297	0.063368084	0.173820816	0.004627062	0.799282617	0.929525817	1.212116966
Zm00001d040364	0.407228244	0.024424071	0.241002124	1.257601183	1.009286986	0.843396015	0.271912118	0.596244119	0.227197189	0.080233555	0.207856523	0	0.629302046	0.478304895	0.616538769
Zm00001d040365	2.529836033	2.485343519	1.949334354	7.471280957	5.173483535	6.446742199	5.616615507	6.442458332	6.65181751	1.283974437	3.624072199	0.807102014	5.650611638	4.991931173	4.866926588
Zm00001d040366	3.463566987	5.14263771	2.432235135	11.39604558	8.403992706	9.55614748	9.048568817	9.608824164	9.966923583	1.728202686	6.018861064	1.622054317	9.973204932	7.964195197	8.497048301
Zm00001d040368	10.73923544	10.7431759	10.98739607	17.72757297	13.7197143	18.23184219	16.73275592	14.1540081	13.92407546	10.02199892	16.08943196	23.50663645	13.00302965	13.07342113	13.33967861
Zm00001d040369	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040370	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040371	4.443882889	4.6384291	4.082121847	9.120197939	10.83145794	7.359575833	10.93951361	12.22033827	12.02974934	5.951199402	7.870533466	4.287122155	8.432219924	7.451723965	7.087231365
Zm00001d040372	5.572618622	7.472077595	6.174787147	8.713462467	8.943409631	8.756480928	10.13166669	9.083080572	9.020762279	5.806276442	7.06777711	5.311566477	9.012262732	8.462271239	8.263311246
Zm00001d040373	0	0	0	0	0.065624249	0	0.094568707	0.105091779	0.053744518	0.798499249	1.012724285	1.213756631	0	0	0
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Zm00001d040382	0.015624267	0.019678823	0	0.038971817	0.494094345	0.306269845	0.547708695	0.20723241	0.019269055	0.237032846	0.019702702	0.415388503	0.017484057	0.085639353	0.108382711
Zm00001d040383	14.2513867	15.33921824	15.73024846	37.79537173	24.03014589	36.41729021	14.63454451	13.99598397	15.88823145	11.59267012	13.7829562	10.3807879	34.72527958	32.993483	31.08425172
Zm00001d040385	0	0	0	0	0	0	0	0	0	0	0	0.012352669	0	0	0
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Zm00001d040389	24.17746556	23.30598302	28.25246372	38.60446726	45.8046856	34.7854214	38.93195133	44.40177427	41.49510443	53.37689484	53.90562844	47.96445358	33.65387024	25.59719938	29.51632917
Zm00001d040390	1.21141193	1.192814306	0.003610423	0.003623071	0.003827849	0.014236406	0	0	0	0.036059067	0.021980278	0	0	0	0
Zm00001d040392	3.186875475	3.984795356	4.204611806	4.507350654	5.522829263	4.710693413	3.966724715	4.483087487	3.844859973	0.764387249	2.650046751	0.818614731	5.904930096	3.91127364	4.538831168
Zm00001d040393	7.791379958	7.174570713	6.765851581	8.467869608	11.15287414	11.11925047	11.48079725	9.413069656	10.99510806	11.49430938	10.99185997	10.73996888	5.056735402	5.951168656	6.576915089
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Zm00001d040399	6.443594102	6.617441887	5.43207985	4.743026824	3.431776189	5.399028091	5.823391452	4.71603689	3.978926455	1.118615487	0.840969004	0.499155323	3.428811413	3.26016652	2.583942909
Zm00001d040400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d040408	7.382143247	7.988950894	6.123058104	7.709174884	9.145277987	7.737980305	7.311051805	7.024858888	8.831966358	3.059556054	4.725854962	1.843092204	5.525313161	6.912030061	6.785480565
Zm00001d040409	11.04548899	9.607091831	11.73163912	20.24369377	13.03860077	15.97814034	12.29808876	12.45487715	12.02977799	1.661025626	2.148141856	1.21395367	23.55490992	22.44464698	23.85924965
Zm00001d040411	3.555683729	3.493060746	3.429225096	3.838980125	5.335203228	4.023763668	4.646888387	5.288009048	4.504659991	4.094661947	4.42606138	3.083916558	2.724912456	2.636564035	2.927304027
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Zm00001d040416	5.829484905	5.5597846	5.14941043	9.345533878	5.659832741	7.846287739	2.503133569	1.603112532	2.011251429	0.007624297	0.090626057	0.012247774	5.985178681	6.16928858	8.283191444
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Zm00001d040422	6.822650251	7.289345698	6.287561031	18.09592801	20.41437497	26.27278504	36.54313397	32.35903135	29.48042029	1.841972689	3.790808035	0.943231548	81.35365372	83.56030363	80.50070488
Zm00001d040423	0.080656247	0.101586842	0.187949665	0.125738716	0.35868298	0.568185898	0.141370238	0.133722978	0	0	0	0	0.518977351	0.099470487	0.16318685
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Zm00001d040428	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040429	0.426079736	0.643268012	0.49446473	2.671017326	2.241972212	2.672255757	4.787505314	4.181490807	4.684030826	0.217930565	0.377177636	0.078144337	2.901830179	2.490081278	2.528277472
Zm00001d040431	0.026849415	0.03074267	0.027301526	0	0.003216186	0	0	0.002943117	0.012041009	0.003366343	0	0	0	0	0
Zm00001d040433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040434	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040435	23.52854412	23.47078025	27.08048177	33.90797888	45.54272395	34.15105096	35.35763911	39.57945801	36.19370803	10.50072084	22.27920961	11.13693856	23.01843331	20.99701254	22.56583631
Zm00001d040438	18.16705497	17.40909756	20.02498567	15.90421512	26.61000285	15.39022511	18.95813583	22.45138362	20.09814224	13.30613618	17.77783443	11.74179626	12.52233669	12.49027139	11.86005005
Zm00001d040439	0.011336015	0.071388763	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040440	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040441	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.018105168
Zm00001d040442	0.167892346	0.120834875	0.606099202	0.817610486	1.085045147	0.734611059	0.924858981	0.443439898	0.976129752	0.165393732	0.5141714	0.123989015	0.447326016	0.411920278	0.305024443
Zm00001d040443	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040445	2.665956278	3.126210639	2.121791036	6.027341516	5.900792516	4.263707988	3.575539874	4.212151197	4.292038514	2.91607739	5.431965017	1.673009452	7.950543143	10.17841393	11.11417333
Zm00001d040446	59.56948207	53.3961116	57.98165955	53.50668891	69.63849083	56.71979973	60.39130571	57.77822295	58.56243404	27.40117026	34.41908642	22.45020046	91.48378993	90.82505205	88.40929354
Zm00001d040448	1.135629655	1.430329752	2.117045816	5.327497172	8.022784577	5.426076673	5.899971729	6.888686985	7.18587996	1.096354364	3.414925252	0.735445566	3.313871159	3.351699901	4.191317577
Zm00001d040449	0.98971288	0.947375747	1.230018081	4.904392496	5.407634478	5.399816731	6.152470987	5.362202247	6.672561224	1.255779053	2.046817899	0.78937849	3.1453582	3.370602897	4.165045072
Zm00001d040450	0	0.01936892	0.019112092	0.690445575	0.547102498	0.715935907	1.419586185	1.854262792	1.801732491	0.615063756	1.93924236	1.00508209	4.766814712	4.130244366	4.658180835
Zm00001d040455	1.726756041	1.864161963	1.879782238	1.716351385	1.428449196	1.423596701	0.576489842	0.680979331	0.600442414	6.320773577	5.681132962	6.658921628	2.070316561	2.06372134	2.439168529
Zm00001d040456	1.951999337	1.780853557	1.574318941	3.027262779	2.835926553	2.917647973	2.196328624	2.246020806	2.910253034	1.024939063	1.375294527	0.400927617	1.887343147	1.560582978	1.634699236
Zm00001d040457	0	0	0	0	0	0	0	0	0	0.055131244	0	0	0	0	0
Zm00001d040459	4.465333916	4.731594892	4.650986156	4.149831012	4.21658476	4.20238141	4.737729588	4.252360024	4.779990714	2.878089491	3.789351244	2.054592605	3.383333117	3.528313019	3.626123051
Zm00001d040460	0	0	0.019942077	0	0.021143024	0.019658606	0	0	0	0	0	0	0	0	0.018551423
Zm00001d040461	0.091141559	0	0	0.06820068	0	0	0.021299783	0	0.044961128	0	0	0	0.061194199	0.099912578	0.10537208
Zm00001d040462	10.4443041	13.61732009	11.15403035	16.70880716	10.90512167	15.24012181	9.696002194	12.38501002	11.84138243	4.768358816	6.821463804	3.774124447	9.543457797	11.89159714	9.751636424
Zm00001d040463	88.24233835	88.00579653	98.11217931	73.43209666	40.69955552	47.94128444	62.22127887	59.33404339	66.15089402	16.39312002	22.53971612	11.72003665	58.84267116	63.14059862	59.63997219
Zm00001d040464	42.42020731	43.69697389	37.29086366	19.07326961	10.09418424	12.44122778	10.23353752	10.32253344	9.459414273	5.353856372	7.603040415	3.458899895	33.97579155	31.88568075	31.36228691
Zm00001d040465	0	0.025415453	0	0	0	0	0	0	0	0	0	0	0.101613984	0.121664763	0.209966507
Zm00001d040466	0.709404281	0.650976616	1.177632137	0.328617062	1.261904687	1.614075002	2.096031238	2.462272676	2.024750575	0.461238859	0.952090372	0.241366945	0.952615403	1.555347767	1.880528419
Zm00001d040467	13.04756431	14.51330974	17.2490159	39.21168686	32.06231634	43.57685138	30.64253662	28.94617005	25.55312478	9.884820486	14.14392945	5.592780581	80.04874762	82.60693813	79.99045659
Zm00001d040468	5.026659779	3.619209676	5.491123341	20.6139349	177.6811696	40.26459985	160.2253699	207.444738	203.0160769	37.96367165	50.67995319	6.676646665	19.51729502	17.93512671	20.19220254
Zm00001d040470	8.167699624	9.340558311	8.643257556	8.426673671	9.965599447	9.010318686	11.92408588	12.1125318	12.25192937	9.785283457	12.23082547	8.787054724	8.937873124	8.505080194	7.87661971
Zm00001d040474	0.066258	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040475	12.64972205	11.62226847	12.54726688	3.163730153	3.931417586	3.545893478	2.984091584	2.704631635	2.419880137	1.849093689	0.585038991	0.320615607	1.924226058	1.754380261	2.234071818
Zm00001d040476	0.087636115	0.993402099	0.108914422	0.218591922	0.057736719	0	0.307208403	0.211338413	0	0	0	0	0.14710144	0.048034893	0.303957924
Zm00001d040477	34.39287245	35.08043829	33.56087102	24.67787747	17.73791745	26.04470311	42.36531778	35.51979485	32.93279008	5.998608501	3.521103528	1.968887393	34.48482992	35.84844462	38.11150051
Zm00001d040479	0	0	0	0	0.053020916	0	0.070529081	0	0	0.013874088	0	0	0	0	0
Zm00001d040481	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040483	0	0	0	0	0	0	0	0	0	0.210904759	0	0	0	0	0
Zm00001d040485	0	0	0	0	0	0	0	0	0	0	0	0	0	0.022776424	0
Zm00001d040488	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040489	0	0	0	0	0	0	0	0	0	0.011850965	0	0	0	0	0
Zm00001d040493	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040496	0	0	0	0	0	0	0	0	0	0.221301473	0	0	0	0	0
Zm00001d040497	0.065049487	0	0.013473949	0.216338397	0.199995233	0.01328242	0.481398734	0.758203791	0.962688704	1.360661839	3.185478547	1.933579679	0.218377395	0.154503987	0.526442591
Zm00001d040499	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.0018945
Zm00001d040500	0	0.063616883	0.18832001	0	0	0	0	0	0	1.346777535	0	0	0	0.018456757	0
Zm00001d040501	0	0.137385397	0	0	0	0	0.063729403	0.131524438	0.134524652	0.150437916	1.398446462	0	0	0	0
Zm00001d040502	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040503	3.856477505	2.924478987	4.140467985	7.676404092	11.45702459	7.971331814	9.237655365	10.99214964	10.75214156	4.028447433	6.843631024	3.80778154	4.377104804	3.937567228	4.387648404
Zm00001d040504	0	0.067525371	0	0.11701097	0.035321287	0	0.062646419	0.113128209	0.016529826	0.406674001	0	0	0.809923222	1.028511832	0.867770074
Zm00001d040505	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040506	0	0.024633719	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d040509	0.285757365	0.265198653	0.560747517	3.244971827	4.419240882	2.082125337	4.042037952	3.608795213	4.229016989	0.456333862	1.839677518	0.666419033	2.457192808	3.973421006	7.181298553
Zm00001d040513	0.101984077	0.128449323	0.046695936	1.994876571	1.372080145	1.775526375	1.097603638	0.996700832	1.125352143	0.014805564	0.067686944	0.065405614	0.840909684	0.864967548	0.626771503
Zm00001d040515	22.07825708	26.79331063	23.69170343	46.72873428	51.09102356	47.80481464	44.59641981	44.42023724	46.77798391	13.24718247	22.81309666	9.106206749	53.12729128	53.49844828	52.82229723
Zm00001d040516	0	0	0	0	0	0	0	0.067837022	0	0	0	0	0	0	0
Zm00001d040517	1.003761668	1.744653319	1.272427515	9.388860069	6.110427037	9.14930566	3.753265656	4.42972762	4.382224479	0	0.354417187	0.333576487	4.313247505	3.719212705	2.529858319
Zm00001d040518	8.504153384	9.129217538	10.97034079	10.33750458	13.71133421	10.41875149	9.433958828	10.38387164	10.70924505	9.749114017	14.93216617	16.3765918	3.091832888	3.068181529	2.986925115
Zm00001d040519	6.518069962	3.676748219	5.649702609	14.47944338	41.4744451	18.12783005	21.71640426	29.89224254	23.84094042	43.65666639	19.65653671	7.677098373	15.33595451	16.1472406	17.76382628
Zm00001d040520	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040523	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d040527	0.379098341	0.253658999	0.206125734	0.472795006	0.109269492	0.537017235	0.193802181	0.128561149	0.043831256	0.032677445	0	0.013123373	0.795418531	0.896096345	1.972302373
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Zm00001d040535	2.726703167	2.905787738	2.515686503	2.418658425	1.832654656	2.216145659	1.652759312	1.699793472	1.471095649	0.964527422	1.224765641	1.408414457	1.280301669	1.29384434	1.293681825
Zm00001d040536	1.588951771	1.652751255	1.508800762	3.139502388	2.522998487	4.582361322	3.60907188	3.121433174	2.856859136	0.794084305	1.018744854	0.286769052	7.127336104	7.691604927	6.770233573
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Zm00001d040540	0.083361182	0.034997906	0.483473774	3.014969065	0.988565286	1.191503302	1.396174774	1.206175334	1.199420335	0.076645876	0.280323001	0.307812449	3.451502077	2.558736753	1.959663691
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Zm00001d040543	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d040544	7.822200851	5.443797985	7.911453753	25.60455065	63.82228824	26.76407712	57.28433799	83.55492932	60.43100063	64.17788341	75.77246322	27.60855539	12.80136379	12.82383089	16.45759813
Zm00001d040545	0.222714337	0.302087188	0.298081575	4.166394897	1.783326629	4.302721914	1.701580377	1.693885326	0.993032432	0	0	0	2.89483836	1.65268926	2.733335922
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Zm00001d040555	20.89055495	27.32601569	24.58522293	19.46058891	21.15972729	21.45003201	17.41401145	19.54594729	20.62276271	8.885185121	15.30441201	5.919214205	13.35840102	13.91713664	16.33157713
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Zm00001d040562	0.692983845	0.870901647	0.753587067	0.62734618	1.033253653	0.806177658	0.628622975	1.095783564	1.087043724	1.33929211	1.176664835	0.99492265	1.387685259	1.247796592	0.903088862
Zm00001d040563	1.521659531	1.492629136	1.343227512	2.358882727	2.298578062	2.264965857	2.30981519	2.194871065	2.057860227	0.333425506	0.94448634	0.498861092	2.005149724	1.610934423	1.413973479
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Zm00001d040567	12.97352049	16.01687505	12.28693112	81.45827433	64.27572906	83.89887854	177.6383409	131.9545362	140.3303478	111.9037907	103.6632974	153.8790744	114.3524241	121.6052005	127.2150989
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Zm00001d040571	1.801103591	2.025443426	1.894659971	4.147555441	3.760420762	4.231940381	4.221706439	4.209002047	3.969180507	3.054751679	3.569106218	2.280206652	4.326111228	3.979422707	4.752155228
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Zm00001d040582	8.142866335	9.351031727	10.96330977	24.99032199	12.35987223	21.73719484	9.46829752	7.748869466	9.451682379	0.440406084	2.063750213	0.972777213	41.60758858	49.46766544	43.79479023
Zm00001d040583	5.920496424	5.422342224	6.685751612	15.61777079	9.705026121	14.34343023	6.571762192	6.030876668	6.524846622	0.756239309	2.037013809	0.24624996	26.91549727	31.93141009	30.85774259
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Zm00001d040617	13.23775577	11.78029513	17.68477996	28.99568525	45.82549305	28.16713807	32.40748935	38.44683876	29.1150719	2.506320144	8.441226377	1.311281035	21.16610328	15.98296636	25.90611149
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Zm00001d040639	13.07139916	15.04692417	16.975119	17.8761836	14.01260671	14.94255298	17.52267307	15.00773185	18.58653577	5.187678731	9.833341406	4.623601846	1.817926387	1.739793977	2.210502054
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Zm00001d040721	19.35420071	18.81519132	19.82004907	25.31778582	32.29497565	23.36728753	24.52512719	28.08708786	32.27101935	31.66734962	41.66059557	31.53383606	20.05367783	20.91500505	21.54735286
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Zm00001d041291	1.588981136	1.812523128	0.70794374	1.495628937	1.698675049	2.644599811	1.436334024	0.867599801	0.81344146	0.289439032	1.512268823	0.265690746	4.730472618	4.96276292	5.129956549
Zm00001d041293	3.131243761	1.126803744	2.849147812	0.139469692	2.541832488	0.924798707	0.91471459	0.943891808	1.241258135	10.79625345	3.772322107	7.432820866	0	0	0
Zm00001d041294	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041298	0	0.004280132	0	0.029667211	0.170153254	0.066613501	0.039708767	0.049170459	0.01676403	0	0.017141302	0	0.04943603	0.09313253	0.13358131
Zm00001d041299	1.398336255	2.217237196	1.986121615	2.740483927	3.339555101	3.242754349	2.713533947	3.071065598	2.709985796	0.585448499	1.1020918	0.193626681	1.90009385	2.490971123	1.948661762
Zm00001d041300	20.93744093	20.74411312	26.89071339	28.66308087	32.02069344	26.6403519	24.1509346	26.47887268	25.25744468	5.53027153	11.94573294	5.425739759	27.49522818	22.15581085	28.28244719
Zm00001d041305	6.55866747	6.675125459	4.943872305	10.58178131	10.30074105	12.10687728	7.39902669	7.392173998	8.430211497	3.680695877	4.286154177	1.729191705	11.25556284	10.17065884	12.09450261
Zm00001d041307	37.70803743	39.87482259	32.84487291	23.51821767	20.53270449	24.350076	23.08730852	18.49813872	21.93727424	10.64572913	14.89451198	10.52690608	11.58009861	11.61275673	11.37364215
Zm00001d041308	47.87326134	60.00253062	53.32266964	130.6234119	56.63638455	117.0752603	85.847263	57.54382272	81.96941197	14.30626819	19.33823689	12.41918114	200.8637959	198.5762488	163.9610794
Zm00001d041309	0.073402598	0.007704237	0.152041609	1.045133456	0.290156075	1.318947318	0.285903122	0.044253413	0.392278298	0.033744761	0	0.027104022	0.143744763	0.067055421	0.388957344
Zm00001d041310	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041311	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041315	0	0	0	0	0	0	0.006726247	0	0	0	0	0	0	0	0
Zm00001d041319	0.030129441	0.037948143	0.065528677	0.403943419	0.655049321	0.442952255	0.044007815	0.054493872	0.13005285	0.041553467	0	0.016688014	0.033715812	0	0
Zm00001d041321	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041322	26.89162211	24.86813375	26.31820336	31.33857608	44.37943267	34.87913355	38.73626806	38.42095454	38.02180743	14.08172825	28.39310384	9.35690135	36.97767795	28.37478452	33.71191148
Zm00001d041323	0.128716325	0.01965075	0.067865648	0.325923362	0.498528977	0.272382463	0.360060519	0.211639894	0.216467628	0.064553103	0.09345433	0.077774238	0.274981065	0.277930852	0.270570249
Zm00001d041325	0.244464981	0.221059675	0.420676335	1.837134307	1.734484103	1.605029168	0.666533775	1.171518301	0.974054698	0.07780558	0.229232496	0.041662648	0.462954738	0.405422428	0.876892829
Zm00001d041326	0	0.057859441	0.079929132	0.389587215	1.125866021	0.956771661	0.225451328	0.221564465	0.237949518	0	0.01158593	0.101776697	0.298157219	0.342442304	0.477998349
Zm00001d041327	1.466668353	1.068303162	1.339633307	1.8218191	6.395268253	2.273148049	6.036162001	6.271314893	6.712206311	25.9305448	14.15733817	15.30749587	0.632770692	0.348682414	0.715041046
Zm00001d041328	0	0	0	0	0.092024809	0	0.224422997	0.294740162	0.301463502	2.432111665	0.946761401	1.295878619	0	0	0
Zm00001d041329	5.218135581	6.005381412	6.135512412	5.157150151	4.948250659	4.118356564	5.045550353	4.171976822	4.787527517	8.418745165	7.963682301	6.450380886	5.713347281	3.715884459	5.756437729
Zm00001d041330	0	0	0	0.054735698	0	0.013442321	0.243597032	0.05291941	0.148848036	0.030264664	0.083017004	0	0	0.012027999	0
Zm00001d041331	4.789087262	5.416909925	5.99062423	7.384952002	6.529338503	6.249106291	6.166578396	4.922771821	6.521242632	0.329530673	1.283819703	0.161110346	5.428892653	4.566672923	5.176523558
Zm00001d041332	312.0093716	297.5145569	323.9710843	158.8132176	119.35596	131.4912213	97.68261146	79.20804224	87.77493795	6.43319206	13.2551789	2.785993057	122.2200177	110.8935359	111.5850569
Zm00001d041333	0.010655677	0	0	0	0	0	0	0	0	0.014695936	0	0	0	0	0.012319417
Zm00001d041334	4.2491673	5.051285597	4.094593522	4.300943755	4.219461843	3.498833346	3.301106509	2.543200769	2.610707389	0.106164896	0.077657048	0	1.171510566	1.097013103	1.326050675
Zm00001d041336	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041339	0.806252257	0.772646077	1.699064976	0.590198188	0.554272502	0.858929853	0.04096112	0	0.021615927	0	0	0	0	0	0
Zm00001d041341	0	0	0	0	0	0	0	0	0	0.062536934	0	0	0.114168282	0.223684876	0.681510968
Zm00001d041342	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041343	27.43810608	28.25660825	21.65119249	16.37845848	53.19260964	20.88091363	41.67220905	58.96995351	56.54077048	125.673782	119.8348319	129.0226935	20.14271498	20.7697502	24.06952825
Zm00001d041345	0.332265959	0.517406072	0.420449132	0.745897843	2.762177705	0.666116612	1.849495042	2.134303179	2.570413581	0.549899444	1.013213429	0.274378822	0.669269299	0.490070533	0.649553921
Zm00001d041346	15.61762437	15.15235867	13.82863865	9.336997795	9.934755556	9.245390722	7.863221491	6.872503382	7.602756336	0.52221986	0.745552939	0.551908619	3.255959567	3.029419274	3.663446238
Zm00001d041347	0	0	0	0	0	0	0	0	0	0	0	0	0.073491832	0	0
Zm00001d041348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041351	0	0.113656566	0	0	0	0	0	0	0	0	0.014224311	0	0	0	0
Zm00001d041352	40.74917481	38.28456942	49.55232594	39.09392515	52.42555022	37.56401666	43.37231456	51.01898884	43.64135873	13.83023263	26.95908463	13.07983624	38.10509488	33.20313773	49.599945
Zm00001d041353	0.007886037	0	0.007840632	0.001967025	0.002078202	0.005796885	0.018429669	0.007607013	0	0	0.007955637	0	0.003529891	0.00345798	0.009117335
Zm00001d041354	1.997026661	2.092134204	0.243551976	0.500448672	0.510290128	0.594508444	0.33258193	0.213790804	0.420071972	0.115832061	0.129446082	0.056856006	0.490806715	0.245518963	0.248145855
Zm00001d041355	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041356	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041358	0.010452014	0.03949305	0.051959174	0.156423577	0.09640443	0.051220588	0.232050384	0.327671485	0.889425984	1.023468555	0.026360649	0.057891332	0	0.183325831	0.024167908
Zm00001d041360	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041361	0	0	0	0	0	0	0	0	0	0.043344564	0	0	0	0	0
Zm00001d041362	3.384668773	4.19621951	3.671056678	11.23084881	5.522347359	10.68609788	7.089027514	5.575604605	5.299535023	1.56616211	1.223060852	0.641212928	11.41952186	11.40001223	11.14427247
Zm00001d041363	0.466525787	0.337226113	0.539465734	3.394855784	4.436647108	2.460184097	2.55502585	2.680548704	2.801732011	0.151062881	0.45018044	0.107853098	0.494819561	0.484739065	1.027143277
Zm00001d041365	445.8288432	450.2376448	510.8392203	318.8653957	155.2819486	291.3444004	1.582443938	1.295539941	3.009064439	4.213985868	4.347014565	0.27895897	122.1754832	92.08070788	83.7973303
Zm00001d041372	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041374	12.96643161	16.58663467	12.4790083	32.49887608	24.54006276	32.43370079	36.63156467	41.60680234	47.53305692	6.23169944	15.20663196	3.77539795	31.78554615	34.27086097	32.48228328
Zm00001d041375	13.50286897	15.48010824	13.30794735	14.53044035	20.98658632	14.19138289	18.25695651	14.65730797	17.35876062	2.507792651	4.755824712	1.715864866	6.217390906	5.094064937	6.851780601
Zm00001d041376	0.10663989	0.429802676	0.026506474	0.877777857	0.2810274	0.182907839	0.174452198	0.051433374	0.026303312	0.029414798	0	0	1.57520169	0.794936268	2.26854089
Zm00001d041377	0.653604809	0.411608838	0	0.679289637	0	0.20018883	0.031822384	0.049256164	0	0.018779766	0	0	2.300877501	1.059829637	1.448341345
Zm00001d041378	18.49978441	18.36766939	17.46071682	8.905499265	8.926545049	10.0786277	9.291923231	8.23116438	9.652799064	11.60656605	11.36246318	14.81999506	6.225915827	6.269614583	5.554251229
Zm00001d041379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041380	0.66192194	0.64130241	0.580065634	1.989715666	1.02872426	1.361971639	0.674294794	0.521852394	1.025649568	0.163853753	0.107013436	0.009400604	0.503304244	0.390719579	0.519992576
Zm00001d041381	1.281377105	1.298400112	1.293157275	0.672874922	4.062321371	1.888556125	4.897148747	3.566391572	3.457634314	18.82831059	12.52593403	16.29700975	2.803116937	3.84441632	2.517345685
Zm00001d041382	0	0	0	0.114815959	0	0	0.05378733	0	0	0	0	0	0	0	0
Zm00001d041383	0.829164041	0.613681497	0.945498851	1.424993356	6.40509356	2.328401654	4.884344686	5.067629102	4.733428465	6.071446035	3.726081611	3.380496658	1.428459834	1.277539946	1.495589554
Zm00001d041384	0	0	0	0	0.030951643	0.23022862	0	0.028323705	0.173818794	0	0	0	0	0	0
Zm00001d041385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041387	0.15850706	0	0	0.378892664	0.382903226	0.258923782	0.169780876	0.031853906	0.032580528	0	0	0	1.271183844	0.781924523	0.977364225
Zm00001d041388	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041389	14.58685929	15.07156933	14.3158323	20.90253699	21.3420515	21.51341568	23.7224484	21.66194331	20.61151017	2.52559667	10.7699385	2.092698127	15.01000897	14.70999272	15.1609252
Zm00001d041390	3.886413668	4.375134443	4.103402205	3.838969069	1.699420409	2.86526034	2.190260663	2.571151109	3.011547252	0.877522972	3.491343645	1.428714388	2.40543235	2.620348744	2.027915511
Zm00001d041391	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041392	4.436464863	6.796440289	4.946644866	13.24380285	12.83150411	14.37842644	12.22470261	10.86945804	11.69946498	7.485541418	8.153721913	4.897087085	9.453764342	9.209433253	11.09498891
Zm00001d041393	0.689916187	2.058044189	1.602040017	4.687098495	4.99986185	4.69331591	3.967190583	4.575350347	3.918424999	7.161350928	2.312385555	1.769860267	3.49448945	3.303882061	4.575919032
Zm00001d041395	7.555923014	8.895977953	8.567810585	6.139224993	6.578439001	6.173741538	5.479423595	5.503003433	4.794143313	2.473497136	2.986085759	1.263107861	4.940700579	4.766520492	5.064063508
Zm00001d041396	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041397	7.83123424	8.961321995	7.768341087	8.629303585	11.52056268	11.05688429	6.913315745	7.34687027	6.613431723	2.561840885	5.142453493	1.179600095	5.867204897	5.297495403	6.823605909
Zm00001d041399	0	0	0	0	0	0	0	0	0	0.067945533	0	0	0	0	0
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Zm00001d041405	0.211410834	0.492201102	0.302551401	0.399488517	0.09285493	0.125579248	0.134745579	0.100420408	0.260728191	0.035341866	0.347382463	0.049676948	0.186392827	0.168549804	0.148133197
Zm00001d041406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041407	20.48787059	21.06438024	15.78425297	18.4975068	21.65807161	16.63618678	19.92894177	20.08729282	20.39836975	20.38810703	23.01839912	22.1368555	10.01900263	8.893448037	9.379410891
Zm00001d041410	17.92897948	17.56997929	18.62621627	30.04537298	39.92425463	28.5285331	33.68646251	36.40381952	30.60844627	10.89013771	21.04708269	7.272042974	29.59221174	29.7701011	29.195107
Zm00001d041412	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d041415	3.689848229	4.435566728	3.589920209	12.64574829	13.51690956	12.25280216	12.83073011	12.34540528	14.43261968	6.794307505	9.979661117	5.676400118	8.833750142	9.065873575	6.965079269
Zm00001d041416	3.526574381	5.241116576	2.321822224	10.86461593	6.865633	11.24969788	9.485620142	8.202082584	6.729019436	0.691792878	1.658796405	0.459264011	38.53562062	36.3141635	27.777043
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Zm00001d041420	11.78150746	10.5580831	12.59680902	16.40984507	13.94961343	19.69810828	11.96002715	9.964079569	12.18967894	3.335885066	4.709390396	2.943237326	4.292681743	4.671765481	5.322019828
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Zm00001d041437	0.215537472	0.452450405	0.102045944	0.537617969	0.121715245	0.314360588	0.155910571	0.074254037	0.113921777	0	0	0	1.895090622	1.293912891	0.984896698
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Zm00001d041604	13.90951251	15.90597638	18.84148306	13.74414566	24.96037609	15.80037955	23.24878231	27.79721716	24.17027959	68.76487648	51.15619947	23.88785556	9.199127951	7.379164257	11.19147913
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Zm00001d041607	12.98466094	13.60829589	14.29609737	16.17888367	15.37923065	16.91145853	17.34008733	15.1191687	15.67202314	14.02072542	17.11835012	14.61065014	9.880032567	9.388261183	8.369421192
Zm00001d041608	22.52047309	13.54225287	17.53199522	7.662569362	34.5072586	12.31140791	26.81522379	28.49985328	27.51010325	77.14799427	56.00787755	66.57090299	3.471889992	3.342519728	7.836643547
Zm00001d041609	14.44927162	8.019520156	9.827344459	17.01056438	43.68517075	22.97412898	30.07573832	35.13224979	28.04195787	5.737491286	9.891397332	2.392142465	12.38454027	11.64486318	14.90629431
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Zm00001d041626	3.845941602	3.594901674	4.503183534	4.724091656	4.493902588	4.119124853	4.629650198	4.334007925	4.659586114	5.597752626	4.813253062	5.541146914	2.371112805	2.190227957	1.879247295
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Zm00001d041760	87.48215716	74.88088638	107.2374678	207.0524651	305.2036081	170.3361488	190.5260202	239.114865	201.1050252	10.68759338	54.71707773	4.703126741	89.83861926	72.66004164	110.8154221
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Zm00001d041767	14.52209519	13.456089	13.41707103	10.02469464	14.46660105	8.862258428	13.01771784	16.43491335	15.17336846	23.98272006	28.80095848	26.58523828	5.262799082	4.840671429	4.959678472
Zm00001d041768	0.125424164	0.413158059	0.08393405	2.418549151	25.45076949	4.042486373	23.91152376	23.39458067	18.95458986	0.292736401	4.915247206	1.058075426	0.010796436	0.074035432	0.011154419
Zm00001d041769	9.95982158	9.594243209	8.531612455	12.70468283	30.70135647	9.896853113	10.90261772	18.58895369	17.23652166	30.3450008	32.96602487	16.84065724	40.4790768	54.31412759	50.75563572
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Zm00001d041773	8.265034014	6.561609017	8.198092193	32.98123451	41.4069521	31.05426289	25.09960142	30.17891904	27.13581504	9.435113567	10.32895602	6.896501614	38.97043103	38.49357663	33.13347477
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Zm00001d041846	0.021445073	0.006752537	0.046640999	0	0.395598414	0.144502316	0.018793926	0.103431506	0.165298265	0	0.081128774	0.00593897	0	0	0.024793431
Zm00001d041847	2.520688457	2.645680365	2.338661778	2.590636141	2.817788453	2.491281498	2.335203438	2.279532384	2.63376646	0.772543323	1.611408597	0.394283706	1.606249781	1.589518286	1.248004794
Zm00001d041850	0.124283945	0	0	2.7900278	4.039470813	2.030197835	2.420429841	3.996217267	2.963347072	0.3428161	0.156726042	0	0.463592417	0.454148082	0.478964002
Zm00001d041851	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041852	21.92377016	21.17591176	24.02882951	21.87164177	34.04738143	22.55032161	29.95546412	31.74610876	33.56452419	10.25156357	17.25128171	6.970423111	13.00883303	12.96713078	13.04241181
Zm00001d041853	0	0.016414652	0	0.065014947	0.652551516	0.271434935	0.74620306	0.73857638	0.04821856	0.071896608	0.065738282	0.014436961	0.350014484	0.585760109	0.843780244
Zm00001d041854	4.303713626	4.415862249	4.445544987	5.088747817	4.897611772	5.661498307	3.811317445	3.394068445	3.71356804	2.459458104	3.017700444	2.394138621	1.682443228	1.97551294	1.711672637
Zm00001d041855	3.533474195	3.622039415	0.388969752	1.13988362	0.89053238	1.239235722	0.840083496	0.615293489	0.861481467	0.697518159	0.254536819	0.125616892	1.241040283	1.210785306	1.387072758
Zm00001d041856	0	0	0	0	0	0	0	0.05018081	0	0	0	0	0	0	0
Zm00001d041857	4.117728918	4.164930281	3.906397252	6.479064557	7.334872783	6.001056574	7.299271652	6.613483409	6.378139502	2.043418359	3.459760858	2.788117812	5.986047926	5.492629929	5.084878344
Zm00001d041859	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041861	0	0	0	0.006328942	0	0.006217198	0.005929784	0	0	5.53608553	0	0	0.005678749	0.005563061	0
Zm00001d041862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041863	0	0	0.017408453	0	0	0	0	0	0	0	0	0	0	0.04606625	0
Zm00001d041864	32.91662976	35.86727535	27.79970249	18.89048093	18.40931259	19.2999947	19.75575537	18.29756672	18.80363205	20.07508503	18.57631875	17.39542263	16.34107612	15.9362047	15.95038844
Zm00001d041865	0	0	0.018094409	0.012105197	0	0	0	0	0.011970481	0	0	0	0	0	0
Zm00001d041866	0.404345048	0.633151564	0.611174452	2.207935669	1.22396306	1.673574354	1.404661922	0.685202721	0.768220712	0.346652571	0.303179073	0.07263488	1.015011694	1.102153139	1.099205156
Zm00001d041867	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041868	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041869	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041870	0.731555462	0.692514801	0.567513182	3.725003032	3.904844113	4.070256037	3.702416198	3.404752595	3.970876718	1.131036075	2.391487691	0.949749333	3.430963099	3.478551412	3.383111786
Zm00001d041871	5.689579529	4.61445657	5.472895763	10.34264431	10.02355174	10.56356155	9.748341095	11.00047827	10.17746325	4.891069304	7.072327285	5.767856727	9.13368861	10.41662818	11.03798625
Zm00001d041872	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041873	0.004304545	0.0542159	0	0.102000387	0.022687476	0.036915593	0	0.010380602	0	0.071240121	0	0	0.062620008	0.339753099	0.213995566
Zm00001d041875	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041877	1.253295596	1.768353722	1.385080528	0.628190187	0.276975453	0.971809233	0.301237134	0.310845882	0.371741267	0.098458932	0.655184874	0.610695613	2.330066323	1.873904313	2.242251843
Zm00001d041880	12.25070727	14.32672089	12.62794646	16.39746807	14.24689627	19.16118163	10.41484487	10.54099868	11.99109771	11.19017813	11.62568472	14.98661863	8.344482406	8.252544772	8.724067365
Zm00001d041882	41.17238573	38.83492633	44.99488141	48.34941032	80.11340927	48.51266486	62.77255126	77.32948015	69.60946065	41.58175638	66.54279873	26.44856486	36.75749765	36.97211424	47.20575122
Zm00001d041883	4.409295374	5.11695798	5.049108182	8.655776104	7.976654543	8.522701081	7.610653452	9.126679278	8.887510706	4.936066719	7.095180116	5.446973605	5.267896846	5.390330711	4.464023574
Zm00001d041884	8.825894271	8.69758191	7.744575238	11.46723054	9.316934065	9.924834577	8.960769004	8.541217393	8.720367614	3.613122242	5.147903749	2.634416428	14.21697786	12.39380677	10.99790458
Zm00001d041886	0	0	0	0	0	0	0	0	0	0.243288845	0	0	0	0	0
Zm00001d041887	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041888	0.022578421	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041889	0.007785441	0.007844633	0.019351537	0.052432185	0.020516921	0.02861469	0.020014033	0	0.011521929	0	0	0	0.121970214	0.039259498	0.135015479
Zm00001d041890	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041891	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041894	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041896	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041898	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041899	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041900	8.745345867	7.36865001	9.836493684	8.70276964	8.639461473	8.359710962	5.012060816	4.327610894	5.428233745	0.125420524	0.428129675	0.120886344	2.374497743	2.113450098	3.255787009
Zm00001d041904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041905	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041906	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041907	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041908	0.006721354	0	0	0	0.00885637	0	0.031415609	0.016208846	0.008289294	0	0.016951686	0.029782443	0	0	0
Zm00001d041910	0.015795764	0.019894823	0.019631022	0.31519667	0.135286038	0.145139793	0.036914701	0.161891817	0.058441674	0	0	0	0.256301527	0.086579357	0.018262059
Zm00001d041911	22.96880533	23.26020524	22.85502958	8.824075239	8.287726059	10.02520204	7.89955377	7.586192957	7.767970216	4.804616219	7.130659661	5.360406216	5.27836594	5.211565234	5.351107076
Zm00001d041912	17.54899592	17.74035156	13.79391001	8.458896395	9.188745038	7.793721423	5.787984401	4.876207268	4.516184731	0.365972156	1.280497188	0.368419	10.01690757	9.45989044	9.2936866
Zm00001d041913	0.28550368	0	0.122823974	0.410847467	0.622165319	0.672655909	0.551741356	0.304531015	0.487530303	0.242311781	0.498502108	0.644700195	0.540671638	0.57780768	0.27929949
Zm00001d041914	1.073692863	0.971778538	1.134972858	2.058623334	1.947808663	2.214674857	1.029219112	0.685391927	0.719973113	0.04237582	0.055966597	0.024581951	0.238771222	0.327469743	0.396674769
Zm00001d041915	0.001924442	0	0.019133615	0	0	0	0	0	0	0	0	0	0	0	0.002224917
Zm00001d041916	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041917	23.22556217	25.16806795	25.38943685	25.45415987	24.69228886	24.64787059	24.23455378	25.94419179	20.28519642	13.28412386	20.66824674	10.06756582	40.26734755	34.65717549	38.21234679
Zm00001d041918	5.55637501	5.543276408	5.029373256	10.03211136	11.78511492	8.109740495	12.25648454	12.64743723	13.91487476	9.139096905	12.10991006	5.778257217	6.749126922	5.182090943	6.120757706
Zm00001d041919	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.053434118
Zm00001d041920	8.33090817	8.242603399	7.783358731	10.19619534	13.91979807	10.50389466	15.64580977	16.43756555	14.10623458	10.60587309	10.97082291	8.325102505	7.649274872	7.078323618	7.622263065
Zm00001d041921	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041922	0	0	0.028365025	1.195504399	0.421025023	0.16777094	0.746736952	1.155834126	0.168885706	0	0	0	0	0	0
Zm00001d041923	7.348415163	7.029977978	7.786504754	19.90382546	18.15657567	20.36518641	15.32619291	13.27240815	14.79826678	5.578506599	8.822678903	4.709416162	9.014743351	7.795852675	8.147487182
Zm00001d041925	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041926	4.108965306	4.840443708	3.84649432	4.163083147	4.083140768	3.452182235	4.548391075	4.853738888	4.364976175	6.981545098	5.90944247	7.673148741	2.07380341	1.661046609	2.30501426
Zm00001d041927	4.55236538	3.11615274	4.216914107	4.549062907	3.986520429	7.22273847	2.659719492	2.301337632	1.673837236	2.047324691	0.17828195	0.015661192	13.58992165	12.80162194	12.52042611
Zm00001d041929	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041932	0.021188131	0.016422479	0.00405118	0.01016343	0.021475747	0	0.015235896	0.007860942	0.004020129	0	0.004110602	0	0	0	0.003768672
Zm00001d041934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041935	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041938	79.94907089	68.6957641	87.54805513	14.57706296	13.40361555	14.79857072	0.634983059	0.701219086	1.975279681	0.723165064	2.34433305	0.865996197	0.469411568	0.240375449	0.551109207
Zm00001d041939	0.018424844	0	0	0.045957331	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041940	2.627843313	3.154103729	2.764987814	4.148606588	4.007799797	5.069509333	3.855562062	3.9720656	5.003781195	4.587725674	3.632298512	5.851776015	3.722406561	3.422712725	3.280451561
Zm00001d041941	1.413929328	1.49222883	1.060400752	1.921488475	2.608283049	1.547084602	1.355924106	1.428569288	1.352922673	1.136403583	2.084277494	1.49607389	4.184731688	4.55379011	4.013458699
Zm00001d041944	0	0	0	0	0	0	0	0	0	0.006090079	0	0	0	0	0
Zm00001d041945	21.33136263	20.44462576	22.068381	24.29993889	28.23465622	24.00069372	31.6967031	29.05874698	28.97743184	9.986482474	14.93385844	5.117859041	17.39643039	19.33954719	20.49749685
Zm00001d041946	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041947	4.501978169	4.388428744	4.177170175	4.697083311	3.540418895	5.094626963	3.825174328	3.017058769	3.825373354	0.572172912	1.058588176	0.29441407	3.554428343	3.624140454	3.140177931
Zm00001d041948	20.20213928	21.46780639	17.25305361	16.24823139	15.40251106	16.74325318	15.85708631	15.1767537	14.89564222	19.41742156	18.09913477	17.80752823	17.09206172	18.5797416	17.60886188
Zm00001d041949	21.35098928	20.38457417	22.51221653	17.620092	16.17400099	14.71186537	13.48294038	16.51500792	12.52399108	2.643535477	5.922701852	2.62952429	10.66779095	8.864110332	11.50580934
Zm00001d041950	2.572544017	2.592102967	2.502923674	5.683389962	7.03121489	5.871201157	6.003446789	6.088591509	5.837694843	0.46630362	1.91863009	0.455959603	3.586111661	3.182699057	3.484076854
Zm00001d041951	1.123883	0.697656436	1.217181016	4.144903308	4.897484134	5.232259716	4.399411937	3.96864501	3.88096642	6.510083773	3.806335339	6.30496777	0.907312698	0.880028579	1.187988224
Zm00001d041953	7.19262903	7.429132547	7.460838823	7.184495372	6.672745533	7.547331043	6.035341464	5.413694701	6.252666092	4.439434434	4.29650897	4.636163996	3.919086331	3.762674222	3.793305167
Zm00001d041954	8.443301032	10.67611908	10.63460482	23.28083467	18.51926761	18.62884076	15.58196773	16.84982794	16.40489373	3.94470067	6.079037805	1.883210853	21.99663318	20.36493125	22.0909081
Zm00001d041955	2.026887622	1.126571248	2.345647926	2.169649469	5.37388151	3.086424709	2.905387512	3.7995247	3.117052991	4.877824516	3.114765449	4.308783056	0.707075829	0.989530334	0.958215498
Zm00001d041956	0.124799646	0.214344021	0.126901119	1.726241266	1.898555812	1.264872219	1.418512492	2.065679527	1.175332391	2.519200467	2.332031474	3.204825719	0.888712433	0.435303763	0.472206834
Zm00001d041957	0	0	0	0	0.065664118	0	0	0.033382738	0.006828847	0.190916216	0.041895175	0.006133808	0.012392507	0.127470482	0.06401706
Zm00001d041958	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041959	0.051638277	0.01625965	0.016044051	0.273704332	0	0.12652791	0	0.015566002	0.015921079	0	0	0.08580381	0.086677336	0.113215386	0.283579253
Zm00001d041960	145.9672543	114.1061455	160.8535645	62.10036136	42.75103098	33.67071351	0.082238543	0.466739661	0.021699386	13.05524889	12.26981353	8.53698219	35.46034503	31.49753665	26.97362523
Zm00001d041961	25.56438315	29.08389286	23.91276632	43.0586547	30.41098915	42.94760238	27.47782031	24.66270133	32.9511626	8.461150162	11.13686342	7.461310145	34.8928163	33.12347224	26.31579219
Zm00001d041962	0.66688946	0.339979657	0.493340585	0.554477069	1.014717807	0.301523285	0.76998343	0.813689709	0.440603388	0.919750511	0.530611395	0.430937429	1.528078139	1.514354405	3.59807104
Zm00001d041963	80.82329755	87.42476898	91.81397186	107.083384	166.3230583	103.7629162	136.9766507	169.5793173	145.3468985	77.97440447	97.0151187	43.77093032	81.07402175	74.02059894	91.53664063
Zm00001d041964	0.086308295	0.086964493	0.193075565	2.884750966	2.786234091	3.013574911	4.02396461	2.830653897	2.799426293	0.273776746	0.424466363	0.191216825	0.627781397	0.245996878	1.406956756
Zm00001d041965	10.98113239	10.79009101	6.617952377	3.69907823	17.06862875	4.123903371	21.02037072	18.43058629	15.56739358	7.382134781	5.758219148	3.178637218	2.578060351	1.754267262	2.950630911
Zm00001d041966	0	0	1.179906233	0.236807915	0.500384898	0	0.221872735	0	1.170862708	0.523746819	0	0.210338507	0	0.208151204	0
Zm00001d041968	4.245277902	4.853534153	4.153269941	6.161991222	7.447834167	6.14134845	3.18562538	3.046239302	2.711471534	0.011026249	0.171390467	0.168270806	1.100421999	0.99912578	1.220097774
Zm00001d041969	20.40500558	20.13155618	22.36630669	22.35499925	23.09752131	24.19155982	18.62097558	16.39771228	18.73708708	11.13776759	12.26886068	8.507925313	35.83963494	35.25399115	32.63671624
Zm00001d041972	76.04056027	95.19518547	75.99140904	52.37306469	56.00110356	60.69876112	51.20999672	50.84274429	49.92666704	54.50044549	64.53341404	22.87282285	67.34786537	55.67531432	46.63239762
Zm00001d041973	30.91948048	32.15117833	33.2908965	17.6922972	19.38855102	20.93226524	16.98810708	21.1078691	20.06874927	16.51904734	20.0419833	17.54585874	8.33915001	7.753374486	8.333688821
Zm00001d041975	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041976	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041977	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041979	31.326036	32.1147451	35.27197245	27.27640557	25.36645075	28.04814985	19.18067157	20.3344933	20.76011267	4.168597131	8.854488271	4.155258672	20.76231751	17.45071728	21.28946115
Zm00001d041980	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041981	0	0	0	0	0	0	0	0	0	0.025548625	0	0	0	0	0
Zm00001d041982	3.976804887	3.625046255	3.913522609	4.766714162	4.230758561	5.639917159	3.444489461	2.929315458	3.769024948	1.867348591	3.639201748	0.822784245	3.593037999	2.637759911	3.014464441
Zm00001d041983	6.69122327	7.423036232	6.799678053	4.709071206	3.91391734	4.902713344	4.664588113	4.415420975	4.513718643	7.337121698	6.119049506	9.978006607	4.77488864	4.994193168	4.501669711
Zm00001d041984	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041985	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041986	0	0	0	0	0	0	0	0	0	0.21975391	0	0	0	0	0
Zm00001d041987	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041988	3.514356742	3.842651433	3.871692317	8.420728913	7.66691437	8.413994345	7.130011971	7.093567867	6.61239753	0.639148661	1.826256841	0.6417107	7.642072165	8.481279573	7.791283068
Zm00001d041989	1.964822351	2.568739661	1.870485443	5.29785388	3.61416261	4.299216728	2.438240419	1.786322902	2.452248932	0.292659907	0.738355798	0.10447397	6.706032872	6.526338991	6.942018063
Zm00001d041990	0.013120186	0.082624615	0.195669671	0.032725854	0.20745324	0.401850579	0.015330938	0.110739706	0.097084969	0.361897994	0.033089951	0	0.029363819	0	0.13651853
Zm00001d041991	6.115204682	5.870673501	5.990875048	13.12507007	19.74612615	13.93456209	18.0230919	21.7443517	21.20859425	13.18651535	12.37519177	4.986830775	12.2224936	11.90070896	13.16511302
Zm00001d041992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d041993	68.74259867	69.03373037	60.00593875	29.93223101	32.24328906	28.3673231	28.03223871	25.47588507	26.04413697	61.1163324	59.33200148	62.59056937	27.47661608	20.91752636	25.15164747
Zm00001d041994	38.05342391	32.32574581	34.43438351	14.04933999	17.02429516	10.86237049	11.65524104	13.15235027	13.12864937	3.600026135	10.62895118	4.030422339	5.605388627	4.388160425	4.804966869
Zm00001d041995	3.170844254	2.94388837	3.43101508	5.357053377	6.618639471	4.776204131	5.52420168	5.774856226	5.629205742	4.129828143	4.549099751	4.582394006	3.109060109	3.040887656	4.389936836
Zm00001d041996	9.123144267	7.981179255	4.557649639	5.234996277	5.886184481	4.911316852	5.219917136	7.239695383	5.464949728	18.44580513	14.63291596	12.88416702	4.274742697	4.03985769	5.20625368
Zm00001d041997	0.167027904	0.147260584	0.228341047	0	0.176067014	0.020463204	0.009758605	0	0.154493797	0.506789836	0.979418085	2.220311181	0	0	0.028966058
Zm00001d041998	19.77635216	19.42129925	18.39969059	14.61384242	12.68722522	15.675989	15.32981814	13.46331974	19.54276302	20.58264216	21.28306299	42.68691847	15.40951601	15.31662719	14.50649483
Zm00001d042003	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042004	0.069822441	0.087941623	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042005	95.69863744	87.30065876	113.5010305	123.0366368	83.40028629	116.0944747	52.95859812	40.26440759	56.29586613	8.195097286	16.77305219	6.299549912	36.42511844	32.30366755	33.68512236
Zm00001d042007	3.817140055	3.846161619	3.970323654	10.63438431	14.16037675	12.23089546	11.33609563	13.86445353	12.58737765	1.587438812	3.791585337	0.312255103	16.45514113	16.95681253	16.74275454
Zm00001d042008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042010	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042011	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042013	0.086526797	0.363269403	0.150550061	1.035959689	2.059812264	0.600707271	2.493961886	2.316162001	2.482821783	8.178406025	6.99051049	6.517831209	0.27111354	0.271913978	0.286772118
Zm00001d042014	0	0.2425207	0	0.080047746	1.099437241	0.393172116	0.524994641	0.696523784	0.237470746	0.354082357	0.971259976	0.142200681	0.143648354	0	1.780936571
Zm00001d042015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042016	0	0	0	0.112049309	0.15784321	0	0.069988333	0	0.018467057	0	0	0	0.318370696	0.295469836	0.225055374
Zm00001d042017	28.69287194	29.74038419	28.72266944	37.67718632	25.65661193	33.02557004	19.56654535	21.53981783	18.89065267	18.97904748	24.7812917	16.85399124	56.53123556	54.75923607	58.19750559
Zm00001d042018	9.935747756	9.074381796	8.462737323	7.174252658	9.424186271	8.031082833	8.192465806	8.896418028	8.731201639	9.613821811	9.156611462	8.298347524	4.92496836	5.567568709	5.162889926
Zm00001d042019	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042021	0	0	0	0	0	0	0	0	0.021982299	0	0	0	0	0	0.041214634
Zm00001d042022	73.13195864	40.49370611	74.08511483	23.30145169	249.0475873	49.4567214	288.0623824	401.0597832	384.8845891	1084.845728	910.1997426	464.8404882	11.90422163	12.75830953	12.05022179
Zm00001d042023	5.408532016	4.032863959	7.511655682	10.72365948	27.92147731	10.69593701	15.00793892	20.20061537	15.60328619	1.372767978	3.856285498	0.571235104	3.703859412	2.432082491	5.39338675
Zm00001d042024	9.747446153	8.321679727	8.965935043	7.409577171	7.716537311	6.438897502	3.638967156	3.093776369	3.083830949	0.315148516	0.584541731	0.35438121	0.862095926	0.579721978	1.252991788
Zm00001d042025	30.08219408	29.08936166	36.36475739	44.00925614	79.54615716	44.37345227	57.20848422	74.08067843	63.40397545	143.829903	132.6502206	105.2063473	66.97331046	56.1482659	68.30708162
Zm00001d042026	18.7997249	13.84147149	23.60303582	36.62859077	55.94417713	41.56782533	114.5666766	132.3125809	127.1198697	37.79806128	35.4753717	37.49847492	18.52222958	22.05926247	17.68902277
Zm00001d042027	1.442874292	1.116344814	1.56265305	0.147815269	0.828379371	0.069446081	0.553970976	0.963091374	0.546549709	1.599076229	2.040451368	1.290097319	0.2421934	0.19206715	0.703010111
Zm00001d042028	1.80312096	2.121627158	2.116176241	6.873783615	5.992595111	6.524358239	7.962894295	8.089259181	8.399826274	3.825847809	4.690274198	4.631658982	5.003530487	4.779558447	6.346800521
Zm00001d042029	0	0	0.038267229	0.307210268	0.324573988	0	0	0.25988913	0.26581748	0	0	0	0.034456193	0.033754249	0.355986758
Zm00001d042030	6.152055264	8.322502027	5.946727415	20.74437336	32.57505686	22.89048058	29.28720107	57.28327688	59.22223577	19.01200953	27.6556161	8.013897122	16.50968493	13.8628702	34.50935635
Zm00001d042031	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042032	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042033	1.524549722	1.579275202	1.613253613	3.940483707	4.170480678	3.322757123	4.434227468	3.656538799	4.577860304	2.041660327	3.266867268	1.474664152	3.214240754	3.675571809	2.899328759
Zm00001d042034	9.334412392	9.375884395	9.402289816	17.71778131	18.12406653	19.6029916	15.99927078	16.64071812	17.11314882	13.28320626	18.09421088	22.42701356	16.30940528	16.24305279	17.44489751
Zm00001d042035	99.45795357	105.9152454	98.23610687	78.83148091	82.73990286	61.48042747	73.71921159	85.88752565	76.97032432	9.600769028	42.62422154	10.2415181	29.10515459	22.74987837	32.50867662
Zm00001d042036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042037	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042039	0.394149601	0.290050672	0.412795184	2.258995621	1.82647782	1.638561032	0.884903504	0.68885232	1.185199802	0.061078346	0.268063978	0.083399525	1.29346339	0.606854823	1.085465552
Zm00001d042040	33.01753381	35.11697725	32.52838384	28.15507505	28.25087141	25.14108003	22.65257078	22.57452185	22.42457255	2.676783245	8.06530817	2.244309252	14.68889396	14.73181723	15.97640199
Zm00001d042041	0.069046636	0.275387563	0.429056812	0.301391892	0.272937217	0.46525367	0.134468324	0.138757544	0.085153651	0	0	0	0.167408373	0.100921796	0.079827334
Zm00001d042042	3.115536244	3.07729844	2.942967591	3.553943668	4.488590256	2.667568201	3.962932028	4.434151352	4.349679767	21.29737157	19.75150724	36.60769973	2.290571852	2.397901872	2.615934401
Zm00001d042043	14.33377939	16.13325041	15.04278996	14.3935775	13.80843286	14.20926895	10.73036208	11.0468648	12.83641375	2.790405147	6.243723754	2.60429543	8.689640032	8.731286779	10.24618562
Zm00001d042044	11.15174061	12.96726312	15.45556025	29.94282915	17.96761953	25.03771703	11.77611184	11.76247985	11.22585658	0.745290648	2.495709349	0.458684794	48.44802535	47.09944578	48.18013966
Zm00001d042045	6.561314514	6.517228023	6.305358305	6.491653767	8.14237872	6.834076065	6.092489982	5.381904	6.083825183	0.865569382	1.488771612	0.549378521	3.693261447	3.016622138	3.014013602
Zm00001d042047	0	0	0	0	0	0	0	0	0	0.188548855	0	0.030288745	0	0	0
Zm00001d042048	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042049	32.67110224	33.71571154	47.01760367	415.2217843	154.4031665	395.3394897	204.028493	134.4722	169.2596735	1.28271088	2.724868622	0.278873356	1044.268833	1127.887795	1003.980332
Zm00001d042050	10.53949752	17.96667828	13.52622526	288.8013357	75.92120569	210.1705133	111.0296408	54.85807882	70.2323095	0.094927051	0.010849506	0.009530757	2155.978691	2291.597781	1946.53201
Zm00001d042051	0.223527559	0.340565066	0.546640103	0.364204578	0.247025456	0.291519705	0.151659844	0.078248716	0.066694711	0.263530836	0.263689912	0.087862921	1.028779057	0.984107275	0.958685859
Zm00001d042052	2.038331563	2.157557651	1.952389422	1.902737332	2.737346542	2.101208896	4.200612246	4.07641244	3.808830496	6.082404324	5.047333847	5.09754105	4.527356965	5.044531893	5.079759481
Zm00001d042054	19.02442793	17.01151225	18.78183271	8.199830698	13.56465085	14.0248757	13.23216916	12.82671393	14.99832809	63.01999376	30.32554492	35.61056268	4.945916685	4.468981275	4.237100223
Zm00001d042055	3.219825672	1.535533122	2.602988263	1.981822338	25.35258057	6.440500886	12.66298051	17.06235524	12.52323339	6.653820107	6.064174927	4.455585206	2.023093278	1.702016858	2.19257454
Zm00001d042056	13.72453308	3.289393824	9.108048115	1.827990923	16.39857876	3.036392375	19.99190121	20.01906208	18.73380333	408.8900605	130.7608442	719.5791034	1.192869376	0.555069878	3.296728833
Zm00001d042057	2.322621966	3.289718518	1.253240188	4.009985542	3.877226635	2.67338022	6.19097369	8.32192917	8.348661688	55.65269102	72.33655392	97.29389501	8.694459952	8.644189789	9.881021572
Zm00001d042058	34.45202717	36.36685525	29.75106201	20.55812532	22.39084256	21.36320356	21.51486402	18.22698781	22.60648069	16.9450028	17.26706538	17.48603945	15.5447555	17.14340937	15.33697448
Zm00001d042059	78.05408347	91.51827061	65.06061477	21.73152966	20.39585386	27.04623403	22.28262381	20.12488961	18.27707011	69.83579486	40.50339167	77.02213698	49.05650662	47.80940716	48.86158524
Zm00001d042060	0	0	0	0	0.170863136	0	0	0.156356062	0	0.204389003	0	0.02052083	0	0	0
Zm00001d042061	22.91901501	20.50955139	19.37861772	22.94618414	61.01761244	23.26926952	44.53248278	52.30337245	51.57005011	109.8120732	126.483779	133.6808615	23.40415143	23.23043206	26.8171412
Zm00001d042062	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.111439333
Zm00001d042063	0.616897018	0.025064002	0	0.446729342	2.884314696	0.92644399	1.650965682	2.303496416	2.061536436	2.140729356	2.609819383	3.130277871	0.044537263	0	0
Zm00001d042064	6.391524966	5.786044843	5.117792855	8.925236583	9.866464052	7.898176391	9.911648911	9.110741836	8.935971777	4.729839163	5.948476744	2.212575406	9.891508694	9.340599264	10.63711008
Zm00001d042065	1.97779223	3.056014013	1.444395281	1.958035915	1.719443408	2.02338509	6.015878194	3.884466225	4.136524359	1.434152364	2.301219806	1.806934827	4.974025122	3.833334927	5.457189402
Zm00001d042066	39.29032472	42.08271327	41.94532069	27.29508195	28.31167974	30.94861354	41.93524787	40.50758473	46.9638753	23.50616668	33.8077301	22.43702095	30.69676431	31.21210356	30.91829644
Zm00001d042067	0.363355054	0.600661734	0.310460378	3.134361242	3.630699725	2.698780427	0.53072548	0.766716103	0.774869938	0	0.305468254	0.041927942	0.779328115	0.879629009	1.093979241
Zm00001d042069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042071	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042072	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042074	2.917477083	2.764414417	2.870844422	3.299441583	4.467152331	3.556302021	4.513943356	5.033042675	4.888042359	2.33785715	3.092116905	1.712255699	3.974717278	4.191816903	3.54859031
Zm00001d042075	0	0	0	0	0	0	0	0	0	0.070301586	0	0	0	0	0
Zm00001d042076	0	0	0	0	0	0	0	0	0	0.056749091	0	0	0	0	0
Zm00001d042077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042078	0.990669125	0.887289905	0.820804336	4.365502435	4.177126106	3.775971818	6.791235031	5.600978427	4.968530448	11.8108703	4.191979954	2.804513429	4.212644133	4.464692495	5.344960603
Zm00001d042080	1.812037837	1.53327651	1.160827813	3.351012665	2.715821656	2.868446223	3.514391367	3.284866021	3.739934411	2.855499624	2.131916754	2.462555677	2.724542451	2.877236504	3.160442495
Zm00001d042082	0	0	0	0	0	0	0	0	0	0	0	0.021360187	1.467279806	2.156082431	4.391741858
Zm00001d042084	5.029663837	4.637511691	4.546975405	7.020848682	8.666495363	7.424971397	7.782612872	8.102871307	8.249278183	3.334073768	4.463045664	1.95596834	4.922268427	5.414066192	6.277294024
Zm00001d042087	1.459289014	2.816086183	2.375721314	4.757444406	5.903417337	5.112562805	4.297849391	5.8034953	4.641352397	0.635557938	1.61421953	0.283602482	11.80337546	9.486081843	8.159429826
Zm00001d042088	4.021497478	2.953661584	3.572422622	6.80501006	21.70351508	9.102789204	17.23372356	22.30768837	22.65046635	9.933399249	26.33412738	10.11853965	1.990266492	1.343932775	4.273582339
Zm00001d042089	0.512614061	0.778225949	0.580196276	0.707807521	0.663382724	0.846708722	0.299494767	0.160042682	0.214494836	0.056810837	0.103889375	0.05577104	0.148529609	0.075260563	0.37040738
Zm00001d042090	1.765314671	2.440747163	1.995988952	3.790765926	2.938182392	3.772620054	1.907674704	2.096559132	2.586356149	0.970202845	0.669509304	0.691053891	1.633825701	2.066153312	1.826108385
Zm00001d042091	25.73349585	23.34915091	22.27718514	11.19328917	10.60028324	8.796528389	9.12428164	8.530174876	9.43786826	2.704452129	6.315154513	2.088686904	5.165159495	5.307970537	4.784179232
Zm00001d042092	1.275301672	1.01193572	1.489851751	3.833107223	2.335751894	4.4060217	3.621161734	3.013938116	3.082689279	0.281416201	0.627196566	0.211908198	10.76036055	12.6521758	13.07812995
Zm00001d042093	2.219883528	1.62528889	1.816821954	4.602983157	7.811949577	5.837321299	6.621912609	7.475102447	6.521589356	2.227738945	3.09521001	2.03924224	4.362358739	3.709625421	4.183584581
Zm00001d042094	0.041987819	0.042307051	0	0.073311541	0.011065022	0.020576329	0	0	0.051782626	0	0.04235839	0	0.075177149	0.046028522	0.038834919
Zm00001d042095	7.636724315	6.431181459	6.029540549	12.54952263	9.529783798	11.88766443	6.438926612	8.052618528	4.54289601	1.424958487	1.699439006	0.481037024	13.40508192	13.7229324	11.49513605
Zm00001d042096	16.278037	15.68677325	16.72667073	24.2989003	34.52655797	22.85262944	30.7086908	30.22139308	26.67185558	43.24905936	53.05884876	11.78608652	29.38704471	25.3168312	39.22431046
Zm00001d042097	3.251954719	3.506333815	3.601471458	2.152209596	2.316756753	2.383472808	2.715579606	2.664789268	2.344095724	0.634296535	0.959766203	0.423807983	2.819232597	2.369168454	2.58332564
Zm00001d042098	0.057990388	0	0.288282499	0.216969288	5.17683464	1.563015512	5.725869447	7.272013605	4.702323698	0	0.438766437	0.01605978	0	0.015892775	0.150850804
Zm00001d042099	1.137895224	0.270020032	3.566191867	2.735431357	52.58568434	9.637317284	20.81160905	24.29907381	15.37572953	11.82694868	11.04266356	10.88787216	0.018454222	0.018078271	0.171595065
Zm00001d042100	0.093001591	0.175703773	0.462330606	0.2319751	0.12254324	0	0.489025621	0.504624374	0.172045133	0.256529054	0.058638995	0	0	0	0
Zm00001d042101	0.385105181	0.36378105	0.159536617	0	0.592004668	0.353854904	0.112498852	0.425653424	0.435363035	0.442602946	0.040469166	0.106650511	0	0	0
Zm00001d042102	2.275886438	3.187213253	3.975693366	12.32614144	31.8125961	14.21433915	44.7816151	63.78828062	43.86850453	8.406776648	11.98160553	3.73760998	15.22731086	13.87028513	23.2763123
Zm00001d042103	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042104	3.2085549	1.458341312	7.680467186	3.096867592	8.5657725	5.041830592	56.14014127	9.705608798	14.1421099	476.7977266	49.06324726	57.81132406	0.967867433	1.223419322	37.61138137
Zm00001d042105	0	0.03091377	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042107	2.117872776	3.624078027	4.138748018	6.029493838	28.57967591	9.627172103	36.40419574	54.84231821	40.25966388	63.75610316	47.50172089	59.31545902	11.01626338	12.40901409	15.99156413
Zm00001d042108	9.515556598	7.49426661	7.424239013	33.77641599	100.4918065	38.47382684	85.00599765	93.49698999	69.53832489	30.87121147	29.23928673	14.49047042	33.82062811	45.29715324	31.31134101
Zm00001d042110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042111	0.534570122	0.546633959	0.401250343	0.858119274	0.906620721	0.512265365	0.742152704	0.823262529	0.698437964	0.868653261	0.787574147	0.158303545	0.355367009	0.20887647	0.440580127
Zm00001d042113	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042114	28.18546618	22.2507866	43.38765119	1.599881893	39.33588735	5.792595296	38.67366693	59.86089728	44.47897112	354.0725077	251.688157	224.3640818	3.240175415	1.74780046	3.64423549
Zm00001d042115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042116	6.91843946	6.411910369	6.772928639	2.912852125	2.793748316	2.252609451	1.75490939	2.616465152	1.852195095	2.497739273	2.778152652	1.259992221	1.717688542	1.476898366	1.800177303
Zm00001d042117	7.45250758	7.474472383	7.411783977	5.917304404	7.159204638	6.505772225	7.204942538	7.328754077	6.726098005	0.577973982	1.001501244	0.379826706	3.436844616	2.968463732	3.893007088
Zm00001d042118	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042120	0	0	0	0	0	0	0	0	0.007809367	0.017466314	0	0	0	0	0.01464179
Zm00001d042121	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042122	0.051638277	0	0	0.144902294	0.017010251	0	0.015084832	0.015566002	0.063684317	0	0.016279381	0	0.028892445	0.226430772	0.253728806
Zm00001d042123	0	0	0	0.061002397	0	0	0.038103368	0.009829694	0.040215678	0	0	0	0	0.06255707	0.075400415
Zm00001d042125	0.048536925	0.376983361	0.150804584	1.361995819	1.140522265	1.585716652	1.304454141	0.692539723	1.097423982	0.033470211	0.010201103	0.017922334	4.643879301	4.841917241	6.069805937
Zm00001d042126	0.70247447	0.204177506	0.873037339	0.853631694	1.613889632	1.301974698	1.283880176	0.847024312	1.021843818	0	0.090855676	0	0.080624768	0.15796455	0.478964002
Zm00001d042127	9.958436018	12.24801715	13.64055884	53.33252545	44.64594899	53.26323716	57.1124193	53.99130371	51.60995551	13.63612254	24.53858701	12.82313685	9.732336333	10.27003173	12.91278397
Zm00001d042128	0.738267877	0.946575064	0.930723238	3.186142858	2.606900343	2.947691087	2.345955076	2.155011395	2.191068956	0.428520125	0.961119101	0.40302623	1.907861099	1.96215261	1.921996572
Zm00001d042130	0	0	0.051292528	0.032170132	0	0.031602136	0.00602824	0.037323161	0.038174543	0.007115051	0.019516828	0.034289145	0.011546075	0.011310858	0.035786744
Zm00001d042131	0.043846164	0.09940393	0.003632809	0.083847318	0.046219003	0.1790585	0.020493697	0.081065023	0.061284411	0.044345465	0.121641123	0.038856632	0.013084071	0.048065705	0.145317494
Zm00001d042132	0.033923657	0	0.210802106	0	0	0	0	0	0	0.093572633	0.057038427	0.087684539	0	0	0
Zm00001d042133	12.92947248	14.01376917	12.09413738	10.01946544	10.32639051	9.234392133	10.10095074	9.982829266	10.37591557	7.165013871	8.321328626	6.886391425	7.572654423	7.315176959	8.133792271
Zm00001d042134	0.00759513	0.172189697	0.0188785	1.411375174	2.121631968	1.218964617	1.739482245	2.646661394	3.9434656	1.393166539	2.231604693	0.521639498	0.186982275	0.174847011	0.289773221
Zm00001d042135	0.606438535	0.830229976	0.712722531	1.298903974	2.362472961	2.382350039	1.656022152	1.87575579	1.68279053	36.50974933	5.344856762	4.77551573	1.644926033	1.806519612	2.743535364
Zm00001d042136	9.339416156	9.46734558	9.521970252	8.632761831	10.95213252	9.005302916	10.81844953	10.86278784	11.35771516	10.50499077	11.19126091	9.604266805	5.897086382	6.35885213	6.233104432
Zm00001d042137	2.288072623	2.488858308	3.069820705	9.241723883	9.633884367	9.339759494	7.765630133	8.58392485	7.009677571	0.681329069	1.750872515	0.426277507	6.040279435	6.162352424	6.865818708
Zm00001d042138	0	0	0	0	0	0	0	0	0	3.255816292	0.018841382	0	0	0	0
Zm00001d042139	0	0	0	0	0	0	0	0	0	0	0.030895815	0	0	0	0
Zm00001d042140	48.15928703	39.19130656	62.54235197	5.303593019	22.12680523	2.35846968	52.67756496	43.02729039	63.39089823	505.0619325	431.6412236	290.0081072	0.012170684	0.143072904	0.037722702
Zm00001d042141	0	0.023004636	0.113497994	0.045558236	1.07096407	0.033565395	0.672287727	0.75980183	0.382935459	1.272106502	1.117078734	0.69803721	0.153292082	0.28031585	0.274516442
Zm00001d042142	7.106993514	7.171346187	7.190799335	2.771450835	36.10867381	7.728438498	18.91851477	26.86894845	20.43458008	7.527830685	12.25515467	11.60501354	13.78588415	11.79866511	14.17195284
Zm00001d042143	322.1609808	152.5491007	776.5928298	101.5193876	2259.878167	406.8464404	1565.745033	2478.4104	2783.188146	628.5254834	3353.589011	200.2422588	3.982139988	1.455602826	6.447592336
Zm00001d042144	84.52664683	99.36731498	94.36416802	56.31440831	28.21269723	47.27688184	15.45178635	14.84270329	10.85691631	0.745964092	3.645537531	0.392555358	100.4528239	88.36742744	88.12872295
Zm00001d042146	1.353613241	1.557626299	1.427188748	0.784139322	1.97871702	0.757562419	1.794209167	1.885900138	1.54441731	6.112967434	5.540214938	4.760317776	1.218185546	1.290205183	1.22553617
Zm00001d042147	0	0	0.055798521	0.05599399	0.014789701	0	0	0.203009806	0	0	0	0	0.28888887	0.356830636	0.519074288
Zm00001d042148	0.710976467	0.356673238	1.265500136	0.616180666	2.294404795	0.649591727	4.407337122	6.022725637	7.67598808	9.198923857	12.18719382	14.33676164	0.889999368	0.680321432	0.661768244
Zm00001d042150	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042151	0	0	0	0.222587074	0.329234972	0.349851324	0.458807327	0.086080398	0.044021992	0	0	0	0.079887988	0	0.288879072
Zm00001d042152	2.694259583	2.59190484	2.642383911	0.559520467	1.458585834	0.618346772	1.002879009	1.769860269	1.383234275	0.144597838	0.584193735	0.34572493	0.461111986	0.371531523	0.67372732
Zm00001d042153	0	0.009679016	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042154	9.726736846	9.818200948	0.007513	0	0.011948169	0.022218614	0	0	0.007455416	0	0	0	0.00676478	0	0
Zm00001d042156	0.02093604	0	0	0	0	0	0	0.050488197	0	0.259868253	0.052802035	0	0	0	0
Zm00001d042157	0	0	0	0	0	0	0	0	0	0	0.019480073	0.085561427	0	0	0
Zm00001d042158	7.093421704	8.065124749	5.343149424	3.39017521	3.027287004	3.822666597	3.03459881	3.00796803	2.548233647	0.52287536	0.898806029	0.109194034	2.01519998	1.836994986	1.744512813
Zm00001d042160	0.765056886	1.152120844	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042163	0.045419382	0.019068626	0	0	0	0	0	0	0	0	0.076367063	0	0	0	0
Zm00001d042164	0.00886591	0	0	0.011057179	0	0.008146465	0.012949771	0	0.005467063	0.003056888	0	0	0	0	0
Zm00001d042165	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042166	1.997553237	1.782382141	2.330182534	2.491261743	3.136942096	2.578715411	2.214747574	2.353153721	2.192611062	1.225990312	0.889051312	0.186757957	1.772253521	1.198502897	2.020025309
Zm00001d042168	2.564797257	2.439112067	3.0872555	4.399116345	5.521110267	5.691315557	5.306986305	5.511014421	4.833510808	0.643864133	2.231297819	0.325616778	3.521504284	3.159124515	4.437888212
Zm00001d042169	0	0	0	0.094723166	0.166794966	0.248135291	0.029583031	0.03052666	0.062446011	0	0	0	0.113322591	0	0.175620134
Zm00001d042171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042172	0	0.571847703	0	0.062915756	0	0.030902458	0	0.06082803	0.031107792	0	0	0	0	2.599201752	0.05832403
Zm00001d042173	0	0.587523901	0.401353931	0.716017633	0.378243702	0	0.377358353	0.778790373	0.132759236	0	0	0	0.52199776	0.039335661	0.373365639
Zm00001d042174	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042177	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042178	47.47455902	58.62379491	41.76868065	46.10276199	27.0800406	47.38241328	70.25775329	56.97238695	55.09217163	2.853041883	3.32699141	0.631015521	324.1380227	307.0668474	296.6536022
Zm00001d042179	0	0	0.013171046	0	0	0	0.012383595	0.051114407	0	0	0.253920486	0.152617708	0	0	0
Zm00001d042180	11.71715498	13.25528825	10.63279955	11.59192492	20.52113826	11.45002234	27.30602483	32.24517334	29.78554383	6.843475567	9.275194809	3.194262725	28.47594083	28.8104444	31.61162414
Zm00001d042182	6.440314875	7.820701643	6.988356917	6.902050578	15.39780897	7.890266925	11.13775182	14.06368567	9.569577314	13.10285902	16.84219389	9.52058506	10.33820126	8.686356683	11.80044059
Zm00001d042183	14.09786743	13.94115613	13.32623084	11.35101463	8.001300263	10.41884294	12.23038834	11.35159879	12.2126989	17.29889979	19.0451486	23.35195027	5.500900168	5.258921408	4.784491656
Zm00001d042184	18.72096897	15.66771118	20.72317642	33.59226125	140.8775944	44.3625662	94.73089381	135.1423474	115.1836798	82.26636107	74.27597928	50.01945905	20.01639773	21.54040403	25.29149
Zm00001d042185	28.83575352	30.35301783	25.47624791	15.30103407	18.67798064	16.04725644	19.5597557	20.28180923	18.8063019	18.2115656	23.45363762	15.91078111	14.79758968	14.37601749	13.94545315
Zm00001d042187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042188	0	0	0	0	0	0	0	0	0	0.131240502	0	0	0	0	0
Zm00001d042189	1.12300788	1.024078103	1.055674292	1.629620212	1.567956708	1.802418502	1.589435918	1.501727112	1.729455647	0.973614994	1.177309532	0.400543857	1.676289456	1.70715446	1.596948826
Zm00001d042190	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042191	15.21328572	16.1058397	15.88470465	24.87971736	22.80041824	26.15045062	22.84052701	24.70822118	24.37733026	11.8273847	15.05701949	10.70841498	27.80748431	30.87579288	28.94091403
Zm00001d042192	6.174426374	5.522593195	5.535862612	7.551675244	6.118160659	7.917771555	9.131797703	10.69387741	9.012662473	7.048299011	6.720412665	7.522622856	14.71998641	13.54814558	17.49559707
Zm00001d042193	13.50659373	12.9948692	12.27691909	13.32377236	12.26099231	12.37134827	8.500437323	7.962801566	7.257050932	1.513773143	3.790924727	1.2834214	8.665993834	8.456026616	9.390428937
Zm00001d042194	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042199	0.334464438	0.0526574	0	0	0	0.153661763	0	0	0	0	0	0	0.093569112	0.091662916	0
Zm00001d042200	0.23032163	0	0.020446029	0.12310592	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042202	0	0	0	0.537617969	2.776910786	1.567611466	3.062243519	5.024523174	2.978843502	0.349164546	0.491827969	0.136435788	0.589583749	0.510064212	1.289463147
Zm00001d042204	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042207	1.69631741	1.268252727	1.549855304	2.811104497	11.21655983	5.798141493	9.57585127	11.37563434	9.218304923	20.45728369	21.3031981	23.18418954	3.605777164	4.474838125	4.773086591
Zm00001d042209	0.083872601	0	0.086864263	0.244071962	0.718343964	0.188384922	0.522694051	0.235972952	0.086198482	0	0.475947182	0.092910261	0.031285378	0.015324015	0.145452258
Zm00001d042210	0.845370986	1.131294628	1.198374331	4.068977741	4.124912029	4.045684091	10.0942448	9.301340479	10.16512459	1.785293505	11.11013495	2.897184307	0	0	0.106899212
Zm00001d042211	1.242839447	1.349449037	1.531288967	5.010825789	11.05395729	7.993903974	21.5960766	24.55864986	21.3001582	9.841186311	5.688074442	5.661336747	3.572858796	4.228275244	6.032469026
Zm00001d042212	12.32257131	11.23818728	11.37596017	5.59598599	6.099215172	5.616550686	4.839588638	4.963044025	5.369279491	4.688968146	4.974944668	4.925045375	3.657267706	3.517177586	3.373408502
Zm00001d042213	14.11661406	13.08901853	13.05985732	5.047429895	7.646108046	5.480240118	6.652410854	7.144794964	6.631129535	8.661852492	9.018777127	7.629388798	5.670142375	4.974401015	4.544730666
Zm00001d042214	8.09518199	7.397383468	7.985253612	15.0733386	21.61289802	15.08462211	21.49822778	19.19766641	22.41074858	12.90173841	17.29340453	13.2474066	11.51350483	13.18721915	13.25332068
Zm00001d042215	7.946787879	8.204105524	7.390551688	6.537172759	5.563696658	4.919588138	5.42643004	6.320250571	6.369913172	35.54315016	27.40597307	73.70997004	5.110950475	4.435580817	4.988044952
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Zm00001d042234	7.683798918	7.162126495	6.823463078	8.985746638	8.351988092	8.614797116	7.976761478	6.983049768	8.7170299	3.163444763	4.485355028	2.207501931	6.623588248	6.453659349	7.112088219
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Zm00001d042245	186.8862996	155.1717271	125.45314	53.10099602	85.98987917	59.59302111	127.5624918	135.1848774	106.1616206	75.3168305	87.50069789	71.98585784	86.46954615	79.70457876	88.93075584
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Zm00001d042257	283.0807826	254.2068372	289.2627373	567.3104613	331.4027964	541.7573474	204.9305608	171.8161629	170.208324	29.30599057	41.78928912	15.31664563	1441.955551	1397.066109	1225.367238
Zm00001d042258	0.788475643	1.244626724	0.322342056	0.608125961	0.109361298	0.219254433	0.572802918	0.287718545	0.153538286	0.125198443	0.222407663	0.086194494	1.248031947	1.768515182	2.719763147
Zm00001d042259	4.901201245	3.398734956	4.909821406	3.524764092	4.808184456	3.11189483	4.347544411	4.178101174	3.964563014	1.092526075	2.616592531	1.658804167	3.25987789	3.053403084	2.859817959
Zm00001d042260	0.028363556	0.011908001	0	0.011791265	0	0	0.011047605	0	0	2.47747458	0.09537961	0	0.01057991	0	0.065584282
Zm00001d042262	6.252341719	6.858550836	5.512649263	3.956329471	5.252269409	4.239535807	4.272528061	4.772969362	4.844883775	1.952259644	4.151522196	1.624253106	2.974574681	2.762338476	2.953261344
Zm00001d042263	7.119589178	6.987222873	6.604673941	2.883856628	7.470137751	3.60329994	17.62209387	23.40588603	16.27255958	39.12248865	41.51379854	37.22055352	3.098296796	3.802311017	18.72543166
Zm00001d042264	1.50588194	2.307406372	1.287411254	3.329488273	2.578222655	3.881756302	2.465713841	2.212825873	3.134713817	0.127874574	0.495908172	0.038958863	2.658284018	2.814422362	2.284376019
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Zm00001d042267	81.74914351	69.68023512	73.31434189	20.13365073	34.27260887	27.78109304	41.54417056	44.23890518	45.92875987	88.47389209	71.78962628	68.22800057	25.22193336	25.08815835	25.13530208
Zm00001d042268	0.529726872	0.65371431	0.458847293	1.000988447	0.65569027	0.825984598	0.994128796	1.141971872	0.699493087	2.951841172	2.172695262	7.658132794	2.053777911	2.223103741	2.140434824
Zm00001d042269	3.055350499	3.180300812	3.500920359	4.465809621	3.064278764	3.868393863	3.138117436	2.868636923	3.084077373	0.456274809	1.429497668	0.986270523	1.704073335	1.829360191	1.473709168
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Zm00001d042272	24.41393563	26.4177765	26.7788698	8.545820035	8.46551101	8.965266871	4.440538415	4.301522434	4.264901994	2.741754543	3.117911575	1.944352204	2.596713534	2.390194925	2.419200909
Zm00001d042273	0	0	0	0.47361583	0	0.697880506	0	0	0	0	0	0	0	0	0
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Zm00001d042275	35.94755113	26.65093232	39.321966	75.25456339	168.1894645	105.4627557	144.0073707	192.0978253	169.9551421	70.72760973	112.1653747	25.41174371	59.06088811	59.26632467	69.95715742
Zm00001d042276	3.587819537	2.786145471	3.118352528	2.602856123	21.11401114	7.833499192	26.67039673	28.63327372	18.23894815	58.34341924	41.92175189	70.2581124	6.297859243	5.209849693	5.693345685
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Zm00001d042327	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042328	19.87973006	17.58757151	18.97808815	25.23633708	36.92289665	30.0664849	38.43487146	35.88002756	37.36878155	46.34438596	47.05375883	48.16558843	27.86020298	30.47791943	32.11915021
Zm00001d042329	24.74535607	26.13308423	23.98302296	20.38288946	21.31835625	18.17030549	14.91570142	15.68594213	15.85841228	4.00285786	6.858043004	3.8082036	9.564878233	9.787039373	11.52179087
Zm00001d042331	37.7415442	33.91523865	36.63949807	15.58702046	18.80255407	16.02558527	15.48057754	16.76346656	17.47066598	21.37547438	27.92797677	23.46361042	11.66369292	11.02362945	10.80479039
Zm00001d042333	1.105181115	1.735455215	1.311089509	2.60451414	2.042515993	1.503465404	3.203353131	2.37963725	2.575529182	0.880884414	0.832581387	0.453138705	5.211946868	4.381992594	4.721001085
Zm00001d042335	7.607018947	6.99853647	7.301587928	7.64061126	8.672488168	6.862449297	7.376804029	7.681116552	8.135599082	4.334495881	5.930714244	3.828819334	3.993105267	4.159993123	4.375799082
Zm00001d042336	0	0	0	0	0	0	0	0	0	0.053717622	0	0	0	0	0
Zm00001d042337	5.768786568	2.799326723	3.142779146	2.242146618	10.63390218	2.807657988	5.505778341	7.646663567	7.455620573	32.1650178	27.41686556	26.33851492	3.084028453	3.692578298	4.271223782
Zm00001d042338	7.317106653	6.845008192	7.091638752	8.298302991	8.898939517	8.211404795	8.062235058	7.568987476	7.713217114	7.078529508	8.364790045	6.21889557	7.408533363	7.819123165	7.420263216
Zm00001d042340	25.83151319	29.88159143	30.71317241	34.31777021	36.96573494	34.63741885	32.84942561	34.47533663	29.56397231	27.7513458	27.75599877	20.93818134	30.98728567	27.80776214	27.9163227
Zm00001d042341	64.80679929	64.47594556	71.63625303	281.7397442	210.722285	268.1918775	68.42620576	59.70024579	74.2631899	27.20909765	48.71214808	13.90404717	36.19779706	29.50735104	41.06145445
Zm00001d042342	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042343	7.265485656	9.701203039	5.62267894	11.49568155	9.387633376	9.186121955	8.687346897	8.063758772	8.386756799	2.692166639	4.66542727	2.053077305	6.513712417	6.072006673	7.202236015
Zm00001d042344	7.963513828	8.965053716	8.769689452	16.32264257	10.17224026	11.15625302	23.31031698	22.54706612	20.53678064	4.376961086	3.036969685	1.852658607	38.49940381	41.23813921	37.25147448
Zm00001d042345	1.563808597	1.19801794	0.771391528	4.544031125	1.210837041	2.982451595	3.070634932	1.263544522	1.32219119	0.322400754	1.69755742	0.687568799	30.46179392	32.06804943	24.48223367
Zm00001d042346	5.864208447	5.314311489	6.517773228	34.73953533	13.20806728	37.14890336	7.39549993	6.884067822	5.835734899	0.049315306	0.511033475	0.132034634	152.9454838	176.811291	140.006147
Zm00001d042347	48.51134094	47.42397891	46.8896268	57.72406913	62.78972536	57.21714648	60.37570442	61.53385254	56.08942385	47.74008077	47.4615549	29.63258246	57.98986882	50.28385224	56.84379401
Zm00001d042348	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042349	149.0447706	148.2339271	148.924165	102.6140874	97.09163242	106.6140614	86.77856342	83.36106396	82.38904438	95.29528987	97.61951568	68.67730511	67.30929725	65.70522078	82.75726743
Zm00001d042350	16.43432868	17.57095656	15.44451743	15.86402223	12.99515913	14.28066459	13.77322737	11.03307759	12.14639771	4.612701955	7.093752389	3.620069263	10.51176316	10.36679469	11.68890091
Zm00001d042351	0.046500796	0	0	0	0	0	0	0	0	0.448925845	0	0	0	0	0
Zm00001d042353	0.467202461	0.490369357	0.774187458	0.850889954	2.911922531	2.344060803	1.772093385	4.140100598	1.403892015	2.439322044	1.271831615	0.517545684	4.846407947	3.39003621	8.813872963
Zm00001d042354	0	0	0	0	0.237024425	0	0.770715818	0.361499917	0.369746118	7.856202286	2.570856999	5.44666029	0	0.065731959	0
Zm00001d042355	7.585074343	8.513309394	8.737847599	14.98326886	13.02035871	14.24057366	11.01781266	10.53037144	11.45420544	1.357364532	3.202606205	1.17796526	12.93129381	12.80427018	12.17642618
Zm00001d042356	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042357	6.589670444	8.16085165	6.092180868	6.219292738	3.922371943	4.821090143	3.488301865	2.658773585	3.880407525	1.169657909	0.385009383	0.009394772	3.008461705	3.012252662	2.853282452
Zm00001d042359	0	0	0	0.111076025	0.019559019	0.018185811	0	0	0	0.491332521	0	0.049330204	0.813929357	1.318064954	1.578865049
Zm00001d042361	0.717942018	0.534908822	0.251340973	0.226999303	0.639545195	0.433594397	0.37810265	0.390163224	0.399063266	0.4602154	0.382541374	0.280036474	0.44130432	0.587503695	0.631297228
Zm00001d042362	0.145622459	0.186520705	0.095091197	0.13544096	0.026017485	0.003023855	0.049029108	0.077377559	0.042615259	0.663784559	0.404618595	0.803835624	0.066287271	0.059525457	0.151238137
Zm00001d042363	7.201415545	8.319277501	6.238425582	8.60463725	5.018905315	6.098712749	4.554243175	4.567662637	4.273704629	2.746902951	4.307503776	2.538001869	29.32683331	28.91204766	27.03332664
Zm00001d042364	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042365	2.528783153	3.881733056	2.357084359	2.463897382	1.926337238	2.033131646	1.708291812	1.16724771	1.510615933	0.136234722	1.993047928	0.393928765	3.91306836	2.620539437	5.824396066
Zm00001d042366	0.099918735	0.044416947	0.021913994	0.146605072	0.077445642	0.158418275	0.322793352	0.077957162	0.188465605	0.105379841	0	0.006510908	0.355168395	0.199739247	0.434897667
Zm00001d042367	137.5019886	129.9076565	131.5303288	98.90982531	131.0460548	95.32956572	115.0252448	118.5121284	118.7597047	207.1480488	205.8306484	170.2011448	62.19309977	59.73678194	84.36381962
Zm00001d042368	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042370	18.42859584	18.2062031	15.36502962	11.24959663	11.0155269	10.88739029	9.771549748	9.782113224	10.47486941	8.105997974	8.886528134	6.96000191	7.63682353	7.676408597	7.441224239
Zm00001d042371	32.48236946	25.11653465	34.93667232	99.25567475	68.85781687	68.86164689	52.59191083	51.52509735	53.79720413	9.333895902	16.34650886	7.964570771	91.92623606	74.09173094	53.8303787
Zm00001d042372	50.36932633	41.15469649	47.33246398	46.51793813	54.83361002	37.42590743	43.34998031	54.32231135	51.13251167	14.41218981	24.70334598	8.36611334	27.09585304	23.46875493	29.66930901
Zm00001d042373	15.76839667	16.47652657	15.53249698	11.52229557	9.066675616	10.37446244	7.007204598	7.05302525	6.312173285	20.99677546	10.58550557	4.589774589	12.19063541	12.07276984	17.09675111
Zm00001d042375	0	0	0	0	0	0	0	0	0	0	0.027021731	0.023737261	0	0	0
Zm00001d042376	232.6735879	233.0495132	215.7908511	14.19884204	15.99874698	13.85351946	18.80879107	18.45879848	38.35031807	66.15188636	67.06989124	119.0330567	8.211086021	6.892274448	5.429341095
Zm00001d042378	0	0.028208001	0.003976281	0	0	0.015679038	0.029908424	0	0	0	0.016138418	0	0.003580283	0	0
Zm00001d042379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042380	0.397473332	0.291057635	0.160831032	0.876141252	0.974380329	1.18908646	0.291629883	0.40124291	0.592793777	0.191226019	0.116564331	0	0.175845399	0.283727402	0.29923106
Zm00001d042381	0.096276295	0.09700828	0	0	0.025371629	0	0.089999081	0	0	0.026556177	0	0	0	0.063324873	0
Zm00001d042382	0.258234419	0.210454074	0.151027998	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042383	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042384	0.080931713	0.047046365	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042386	0	0	0	0	0	0	0.011378089	0	0.048035393	0	0	0	0.010896403	0	0
Zm00001d042388	21.73767916	19.3034635	20.93151257	27.47453622	33.68206301	43.00590998	25.59549155	20.99538563	21.95456911	15.19132177	11.7329292	3.712913302	21.95956632	21.90860243	20.96722171
Zm00001d042389	0.187393861	0.354034891	0.232893642	1.465995915	1.459066245	1.367063121	0.427986286	0.616239111	0.871909725	0.293689805	0.365205854	0.009435746	1.12475319	0.68164656	1.162047242
Zm00001d042392	0.129892959	0	0	0	0.042788257	0	0.056917471	0.019577668	0.080097021	0	0	0	0	0.088995764	0.412978463
Zm00001d042393	0.733641858	1.019048445	0.882673146	2.125187683	2.570959514	2.339460131	2.377225974	2.293072053	2.326128767	2.870391701	2.467055788	2.925126185	1.63611512	1.443076055	2.306956776
Zm00001d042394	5.031928979	5.692687204	4.507975631	3.531577287	3.734460123	3.560599285	4.40985679	3.974960792	4.034973024	3.216199779	3.495626297	3.618786231	2.659649674	2.447394846	2.01201463
Zm00001d042395	36.48266423	29.55759144	38.42799528	12.97761502	28.30748852	14.14583845	17.47190738	18.85814928	18.0551044	16.03203977	23.42651313	13.60397348	5.892127159	6.799764594	9.212530463
Zm00001d042396	0	0.003754682	0	0	0	0	0	0.014378017	0	0	0	0	0	0	0
Zm00001d042397	33.92910538	34.91687765	35.15714249	46.71859464	44.77218729	47.76830301	75.65301922	74.91120986	87.28897799	171.5857013	156.2148656	245.9255538	37.78539157	41.72011804	40.79678976
Zm00001d042398	39.53679026	36.16093384	37.51154287	44.85313971	54.61562432	52.9428431	51.20805764	50.9923627	53.28925279	4.590545733	12.08658447	2.895673521	15.79095049	16.38145997	17.00459578
Zm00001d042399	0.042589514	0.047681467	0	0	0.006235326	0	0	0	0	0	0	0.005242081	0	0.005187569	0.005471032
Zm00001d042400	2.172867613	2.462229485	2.807150829	3.714795468	3.132844579	3.835308518	2.7705152	3.400404439	2.785635103	1.047493638	1.457476474	1.024257078	1.249012032	1.26700733	1.740930025
Zm00001d042401	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042402	0	0	0	0.027905352	0	0.10965062	0	0.026979372	0	0	0	0.049572414	0	0	0.206950076
Zm00001d042403	0.10015556	0	0	0	0	0	0	0.120764808	0.061759791	0	0.063149687	0	0	0	0
Zm00001d042409	0.102984813	0	0.127989829	0.032109548	0.0339244	0	0.210591071	0.124176243	0.222265463	0.035508259	0.032466788	0.028520476	0	0.028223892	0.029766124
Zm00001d042410	5.109876225	5.041637991	4.608609124	4.90297373	4.908332159	5.966362648	4.751136851	4.187077243	3.732341174	0.940422244	2.882157163	1.725190219	3.659782374	3.243775046	3.635142123
Zm00001d042411	0	0	0	0	0	0	0	0	0	0.04834586	0	0	0	0	0
Zm00001d042412	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042416	76.52296806	81.00209096	68.11563068	63.3238661	56.87432245	63.33520414	69.09078093	57.55092762	59.02789764	68.68172016	69.71485648	79.53744815	42.13432128	42.65863344	36.55959744
Zm00001d042420	193.8584816	269.061538	212.6937808	92.85268326	77.35063766	84.77039661	95.89395794	103.6824471	134.9189545	219.8410699	248.9475241	385.521196	149.5965782	164.9189895	143.9307036
Zm00001d042421	13.15887056	11.36762253	11.96998929	12.93355229	14.32020435	13.13373388	12.00847203	11.27473299	12.58911584	3.845717184	8.834265742	2.87606642	8.760142539	9.343176212	9.791059801
Zm00001d042422	0.022229649	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042425	7.259191516	5.7028639	6.280731641	2.404511138	1.828329435	3.346247553	1.689646216	1.620261167	1.549141429	0.221585193	0.994607572	0.355957474	4.396698591	4.291117132	2.516096152
Zm00001d042426	0.061767623	0.1555931	0.230294952	0.359491534	0.135646509	0.428818142	0.048116979	0.148955388	0.215833728	0	0.064909129	0.011403895	0.25343983	0.259562044	0.333255074
Zm00001d042427	12.13542311	11.26790774	10.04419626	12.91584385	15.47046348	10.86791447	7.992321739	7.265682314	8.124881554	0.393533521	1.185306834	0.316088806	3.606287969	3.62482097	3.63853869
Zm00001d042430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042433	0.54585689	1.281266349	1.264277024	2.754020181	1.40580004	2.310225122	0.927758226	0.852641184	0.902690523	0.598839376	1.908587549	1.058182109	1.124485054	1.223974413	1.290855795
Zm00001d042434	0	0	0	0	0.010877933	0	0	0.069680419	0.010181415	0.079700603	0	0.009145152	0.009238255	0	0
Zm00001d042435	15.18245001	17.48455793	15.58672166	12.17869278	10.89563767	12.42498969	11.16419931	11.7140311	10.83574743	3.143634965	5.172592494	2.647345324	8.87686691	8.327271236	8.486264137
Zm00001d042436	28.36166009	28.81632206	30.96753388	14.12811849	20.09772146	13.33328514	15.72843843	17.204794	17.07713794	22.03775819	26.41377709	28.3291904	4.221193674	3.904039037	4.699757316
Zm00001d042437	75.92760181	62.83177871	63.87397543	19.94284691	43.38360485	26.16235343	44.4541582	52.47489937	49.45022657	134.4550414	113.7602453	147.8584544	16.58735113	18.10233546	19.91754243
Zm00001d042438	16.29289407	20.15632337	12.15331183	15.37524143	16.63632614	23.75421034	29.15877591	19.31583369	18.68531584	19.80872087	16.15476722	21.10412852	23.67675552	29.33903467	24.07132203
Zm00001d042441	85.81635166	89.54608452	80.94195006	32.60810448	27.15216594	28.16858365	25.40784439	26.01346373	24.30232769	10.14557858	17.39819937	9.335347941	24.96035669	25.19675387	23.50805004
Zm00001d042442	1.29818785	1.377814413	1.200890631	2.104021826	3.110566773	2.603442174	2.604717704	3.374553171	3.158453036	2.2210898	2.907570897	2.778245037	1.920835006	1.750371913	1.773357165
Zm00001d042443	9.717763362	14.04265491	9.956379365	9.683834353	9.144343158	8.525563791	6.624793686	7.12189934	4.992649528	62.71014618	21.47211982	88.81827903	4.28614015	6.256661437	9.908775389
Zm00001d042444	3.529785579	3.965836056	3.846782806	5.152569677	5.294047753	4.381802295	5.960293688	5.400755731	4.65001397	8.648353343	9.298567546	9.530957177	4.473610145	4.125974187	4.637402074
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Zm00001d042450	12.24211185	12.65283247	12.15856643	9.363832731	10.37077509	8.947461056	8.1531835	6.943465896	8.449650878	3.02895547	5.061974074	1.891591494	5.044640923	4.446532103	4.616609213
Zm00001d042451	7.96317762	7.100834118	7.137644489	9.75171587	14.37590898	11.369786	13.29047329	13.56616678	14.97597181	10.15896579	12.19902031	7.965192841	6.572244392	6.877332899	7.448062522
Zm00001d042452	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042453	71.15191132	50.2727937	64.41727811	26.41675634	159.4462619	49.76605941	93.65339645	107.8385721	89.32302394	58.37083041	55.17331088	34.95631507	20.62532508	23.52585421	26.37812951
Zm00001d042454	58.26417911	68.27170447	75.32292099	159.7791899	98.82095274	143.034424	74.29053728	87.78330297	61.95807262	7.760782825	16.21617492	4.087549937	384.8173667	443.2558824	430.3617602
Zm00001d042455	33.95874639	33.55391531	29.05535802	24.13670709	18.46267268	22.59141152	26.20259213	24.41233914	22.01593172	73.86075753	57.23192492	71.18826974	52.34656659	49.11896954	51.4031978
Zm00001d042460	0	0.019678823	0.042719348	0.019485908	0.045291982	0.034455358	0.02921113	0.045214344	0.003853811	0	0.007881081	0	0	0.003425574	0.057804113
Zm00001d042461	0.026494639	0	0	0.024782224	0	0.00811489	0	0	0	0	0	0	0	0	0
Zm00001d042462	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042464	0.77084545	0.773460867	0.77654768	1.494266499	1.544772351	1.609936998	1.543038279	1.364422304	1.636522917	0.074033632	0.341168987	0.080871473	0.75447536	0.776766548	0.811763868
Zm00001d042467	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042468	0.126768426	0.103678768	0.11458049	1.987543888	1.431737136	1.526865731	1.315846396	1.510672631	1.409096045	0.252034235	0.298957189	0.189669405	0.843778394	0.77064073	0.985959857
Zm00001d042469	0.274645324	0.269046402	0.30340446	0.190292075	0.02010475	0.056079683	0.606188009	0.4047508	0.658610273	0.231477389	0.153927362	0.557772648	1.75865025	0.853048238	1.481794881
Zm00001d042470	1.837622199	2.353978043	1.861208943	1.031611972	0.943749397	1.267485921	3.30261226	3.003771618	2.126513043	2.657444612	1.31678627	3.355324022	4.450045604	4.790304939	4.893138152
Zm00001d042471	0.918154342	1.060934671	0.052343345	0	0	0	0	0	0	0.011617305	0.042488884	0.009331098	0	0	0
Zm00001d042472	0	0	0	0.010544323	0	0.010358152	0.059275833	0.050972159	0	0.163245762	0	0.009365722	0.018922139	0.009268328	0.019549551
Zm00001d042473	33.76777318	37.55333411	37.11324985	127.8000601	87.46191207	140.2178303	103.9010468	86.09219791	80.06727054	1.155855049	3.96318726	0.76721172	110.8542423	105.6674404	115.2767869
Zm00001d042474	2.038770197	1.400639241	1.546598848	3.390220997	4.616850202	3.427679075	4.424276986	4.45898129	5.017853454	5.684461925	5.331113708	6.061659754	4.177718878	3.802354082	4.938678529
Zm00001d042475	1.461253199	1.689905443	1.429814242	4.494536586	4.075265858	3.814775013	4.326300105	4.176047044	3.77378648	0.539888524	0.994824972	0.516398276	3.551269908	3.868746053	3.979955301
Zm00001d042476	0.948839273	0.863451243	0.722349572	0.780640046	2.742661992	1.113768598	1.625346783	1.509472329	1.176308581	4.38485709	2.718786783	10.62637476	1.100695076	1.17629634	1.694300349
Zm00001d042477	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042478	2.832983474	2.037578083	2.171027469	1.884991004	1.901462613	1.981980636	3.993709237	4.249311027	4.589781815	9.469342488	9.683057273	7.286125888	1.929317107	1.631905441	2.827484159
Zm00001d042479	8.319938152	7.90276208	8.51250103	8.349274457	8.777475486	8.608227636	5.464905806	4.579369271	5.624686199	0.129613042	0.982944159	0.373557106	2.771431575	2.490744211	3.515243283
Zm00001d042480	5.937280592	5.722316218	5.299953436	2.601309907	3.786900815	3.137299675	3.370320585	3.419723688	3.196349072	0.602862653	1.293423878	0.362214348	2.827073392	2.694017398	3.374453332
Zm00001d042481	40.41742942	35.26637007	45.21163006	11.00901257	13.23500056	11.78614739	39.04640902	45.28020528	37.21574482	44.16146515	41.95240428	61.42868006	35.02707523	36.88094915	36.9062869
Zm00001d042482	38.58932558	38.14866279	48.37795694	11.18322946	16.88204034	16.78847243	12.34461857	13.72570396	14.09820455	5.258996245	10.17384845	7.976806897	24.58727578	22.05351619	23.17505152
Zm00001d042483	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042485	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042487	0.150343482	0.315596952	0.217988542	0.568755667	0.633918698	0.736765343	0.585587865	0.543840051	0.543884613	0	0.08215478	0.011102912	0.751468353	1.021833184	1.141402118
Zm00001d042489	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042493	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.018497147
Zm00001d042494	82.30023211	95.80596631	61.27233479	43.5132459	21.17677895	33.81004587	15.4363593	8.669305142	11.91228611	14.22574707	16.18459868	14.98436992	55.81417905	51.6561265	45.11932468
Zm00001d042496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042498	0	0	0	0	0	0	0	0	0	0	0	0	0	0.049735243	0
Zm00001d042499	0.885482392	1.257094382	0.343502466	1.097951786	1.099310588	0.520470972	0.717701398	0.641848449	0.498679677	0.035295555	0.225906125	0.022679704	2.909645552	2.216331054	2.503129354
Zm00001d042500	0	0.090151674	0	0.053560743	0	0.008769179	0	0.069044592	0	0	0	0	0.592718681	0.57279724	0.695124719
Zm00001d042503	18.34983397	21.35152244	20.19999471	10.83633019	14.69130061	8.970090766	37.52311701	35.8260878	30.4236966	14.0783145	16.47364838	11.34145231	19.92211145	12.65559321	22.02276482
Zm00001d042504	0.947017766	1.251065768	1.216778303	0.728184339	0.858472841	0.309684474	1.09827004	1.420920612	1.018650556	1.124418952	1.297479392	0.769050167	0.501983664	0.464437374	0.54332479
Zm00001d042505	26.82791489	27.46761775	24.8719982	17.92401243	18.88299334	20.55834417	17.1773472	15.92336572	18.23085978	17.26194021	19.26239924	16.68761288	15.47312779	15.07389765	14.59703925
Zm00001d042506	0.164086824	0.12601705	0.30340446	0.913401958	1.170689726	1.029659762	1.25329517	1.413913376	1.11547295	1.368855855	2.059093896	1.298975746	1.943668205	2.2462781	2.822466441
Zm00001d042507	0.345805306	0.443052426	0.185244764	5.123230289	3.299528852	5.186168258	3.441591562	3.105651622	3.110317892	1.200529124	1.067623537	1.228457605	3.562767363	2.235287942	4.770005212
Zm00001d042508	6.770950578	5.548015283	6.939976027	7.315348348	9.90411244	6.93453217	7.076221597	6.568073287	6.69913301	0.723977239	1.448647497	0.286537933	1.668623122	1.684669512	2.357238528
Zm00001d042509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042510	7.538115576	5.739656571	8.13850605	12.28099815	17.11235861	11.16608809	11.07817111	12.44800251	11.91831509	1.465929435	4.698980069	1.529324481	8.927571924	7.138526015	8.926964457
Zm00001d042511	0.473090281	0.96827081	1.002201126	1.434815712	1.225480592	1.877114691	2.167250785	2.813302384	2.161422688	3.625654346	4.270984933	3.471950128	1.14302967	1.013662805	1.423331091
Zm00001d042512	102.2533386	125.7271943	108.729027	42.0161274	34.33254333	45.69849572	42.69629589	54.88744318	46.25821234	179.1831762	113.0397077	162.109729	60.39236909	58.19357227	64.86125381
Zm00001d042513	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042514	0	0	0	0	0	0	0	0	0	0.027090353	0	0	0	0	0
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Zm00001d042520	6.265982214	6.370523995	5.92597734	7.104237453	6.593433765	8.163998674	6.845538965	5.571773293	7.085738112	3.745241262	5.666119286	2.904847314	4.736835445	5.232490615	4.382933519
Zm00001d042521	0	0	0	0	0	0.19251876	0	0	0	0	0	0	0	0	0
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Zm00001d042526	42.13603944	44.08324341	45.86753963	96.79862904	50.293463	94.65689644	59.8010616	46.18080853	53.23025264	0.73391274	2.409676755	0.423356486	167.1201448	185.4163198	158.4775955
Zm00001d042527	0	0.035212617	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042530	11.98727167	12.50488645	13.77813195	27.37000955	17.65134839	22.80504347	13.62206353	12.80256514	13.81794065	6.804770702	9.03167607	5.981390825	29.16603214	30.33833721	28.32952384
Zm00001d042533	4.225366925	3.67059493	3.121332538	35.03607989	15.4434216	33.64340406	16.63007289	9.113557012	11.21106116	1.328882744	1.493922407	0.577428415	62.79387403	66.49294619	62.03621444
Zm00001d042534	1.20233304	1.291645426	0.791080434	1.834679429	2.972798846	2.140215022	1.884253918	2.79714535	1.96254277	0.243855218	1.560774083	0.329055171	4.044262245	3.814561953	5.748311373
Zm00001d042535	38.49531657	38.20539821	47.99539183	33.16450338	40.56503738	27.93201134	31.97369621	39.47579096	34.27863442	27.30414244	40.75348439	21.58927089	19.3589919	13.04873293	17.14871189
Zm00001d042536	45.91570289	30.91462234	46.91773393	7.929039877	58.10884123	14.72935225	42.00183236	53.50291527	37.53850431	82.76073212	94.95748374	55.03070577	7.683620558	5.335293212	13.9099257
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Zm00001d042549	4.608596841	5.126168099	3.736895219	2.248823366	7.905361411	3.528851067	8.181699636	10.43616452	8.38689078	12.77662333	15.78106138	7.372440337	7.662377433	7.932422045	10.60218569
Zm00001d042550	6.268996154	4.494545886	4.614744378	7.006507202	13.15297446	7.532678474	8.59316626	10.66979438	7.612466114	2.32776364	4.804053975	1.682708057	5.045553443	3.885489144	5.240727811
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Zm00001d042572	557.9717166	515.7421917	549.9882925	45.70794131	150.166356	51.05173326	190.163737	330.1535854	284.4362885	4282.668862	2173.927443	3294.628294	2.549758291	1.778105202	25.94117744
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Zm00001d042575	3.129629013	4.370075787	3.552850877	3.177139583	3.85794225	3.551776334	3.865748907	4.336535938	4.101376083	1.565941164	3.73578853	2.272932806	1.496316838	1.813337472	1.685864441
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Zm00001d042580	2.488150977	2.406032068	2.179804892	3.026807881	2.302118885	2.97336657	1.374264939	1.918124673	1.660051593	0.046879377	0.197173986	0	1.650813175	1.252012414	2.350043664
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Zm00001d042582	6.096173672	7.223151622	4.644017398	7.912630451	6.217829848	8.284665689	8.139120064	7.786188803	5.917159185	0.326963332	2.163880608	0.175079451	8.224075874	6.992230376	9.501759856
Zm00001d042583	7.122196091	8.390549502	7.380131028	12.85500781	11.414966	14.00941155	9.222586279	9.301504674	8.505532975	1.321785787	2.80814289	0.728595241	13.15359844	12.13371308	12.57947105
Zm00001d042584	0.438150695	0.704492453	0.677772254	3.534436853	6.52871779	3.654771417	4.956393325	6.418404531	5.225408968	0.906423066	1.434206259	0.516344102	2.472387514	2.54976354	3.680657908
Zm00001d042585	18.67342184	19.68835684	19.43387885	23.01112075	29.74380929	26.64929745	35.99910931	33.3329826	32.86475474	15.38354029	17.82789097	13.42448835	13.32396949	13.95290769	14.14558917
Zm00001d042588	6.91156826	6.619737245	6.871773902	5.607611429	9.467282271	8.076803719	5.875190033	6.978394402	6.294557918	0.754195419	0.900304039	0.185097886	2.379774405	2.797552184	2.125003623
Zm00001d042589	35.69615783	40.33603068	29.09941897	44.68984303	34.69419005	31.75400082	37.66213127	28.66671665	28.79176373	17.48276082	16.56930523	7.277659565	28.52402123	26.6642476	32.40488949
Zm00001d042590	20.34736552	22.36690911	16.19781423	52.35318035	45.20568938	54.80047031	53.86198415	43.8093178	46.76640388	42.41581944	37.83790137	23.93681885	49.41522877	51.36850965	55.4275439
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Zm00001d042593	0.229126825	0.128260482	0.126559775	0	0.570271057	0.280711712	0.178489798	0.061394399	0.125589743	0.842676446	1.926241853	0.620439842	0.085466758	0.027908541	0
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Zm00001d042598	5.234419189	7.886949726	5.497480204	5.827055027	13.35101789	7.412069597	10.24069426	11.0784921	9.075192289	1.970008258	4.177776418	1.485342906	13.04527498	11.19849269	23.29585985
Zm00001d042599	22.85426258	17.07439398	24.89394108	13.04173364	11.34373824	14.9349944	12.487467	9.923855662	10.67402094	18.72823638	14.50406743	14.48315726	15.33708513	18.17049907	12.05010693
Zm00001d042600	6.901186428	6.895846383	9.412086556	8.933961919	9.784504697	11.62799461	8.217272243	11.6220923	9.582542565	14.69505464	13.4983592	13.01980227	22.83776311	17.96988813	16.63969184
Zm00001d042601	20.53914513	23.25238823	22.0075739	72.02689877	46.32539746	73.14227309	49.19495063	33.42308683	40.55794665	5.092303718	4.181006528	0.77510568	119.7262094	127.7189565	119.12853
Zm00001d042602	0.419845955	0.429647997	0.413080416	2.618068313	4.909726677	2.550411675	2.003242509	3.22727143	3.581356644	0.012063266	0.617679089	0.125960872	0.078303518	0.249302018	0.384274382
Zm00001d042603	38.36049828	37.47586633	33.7654691	27.01314848	36.52350687	33.92378915	45.83887582	45.61419732	44.92939818	54.99452485	57.42566042	58.15139792	17.90049081	16.45701885	20.4014328
Zm00001d042604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042605	0	0	0	0	0	0.055691212	0	0.05481096	0	0	0	0.012588838	0	0.04983171	0
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Zm00001d042608	0.471558503	0.683767783	0.522031558	0.479381588	0.412491203	0.276724792	0.944599054	0.893502056	0.835690531	9.651515295	6.945916454	12.08915997	0.070949796	0.139008804	0.196999977
Zm00001d042609	185.7802759	174.0051157	172.1321098	152.2966932	149.6128464	188.9387723	146.9480848	133.2550138	142.3601466	671.3423539	385.5781086	513.5151897	115.4087401	103.6632898	115.316781
Zm00001d042610	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042611	0.619786558	1.425486323	1.495891634	8.289832928	4.592231443	9.409006554	5.3424389	1.288858838	3.445198128	0	0	0.00995031	0.934799689	1.280088877	0.810021906
Zm00001d042612	0	0	0	0	0	0	0.042261473	0	0	0	0	0	0	0	0
Zm00001d042613	4.482371777	4.892821995	4.673202392	7.88842104	7.94053412	10.22032653	5.732318541	7.176267209	5.466585233	2.713180243	4.050897142	2.151659483	6.799355442	4.040180749	5.729246998
Zm00001d042615	6.955057925	7.143729045	6.176746185	6.32493545	5.228391578	6.886646412	5.740764043	5.156631137	5.993832142	2.320780709	3.007046118	2.027992361	4.210827052	3.999902032	4.482427607
Zm00001d042617	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042619	0.006960913	0	0.008651044	0.138901588	0.651213747	0.31553864	1.106200522	1.871700793	0.798380519	0.537613843	0.307227729	0.11566476	0.070105371	0.297601111	0.128764253
Zm00001d042620	31.7420658	36.50198439	44.36651308	232.5525331	140.3563428	286.3812193	127.1948951	99.72525664	93.47884628	1.995441444	1.098436296	0.556056874	841.3706726	823.1782195	790.8538775
Zm00001d042621	8.689468778	8.614136117	9.427010967	10.4364357	13.75125824	11.71805841	13.21311473	12.81080711	13.01194719	3.636517622	5.513776246	2.434063114	2.4216505	2.258963473	3.296079664
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Zm00001d042623	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042624	5.958941422	6.578727441	5.22672006	3.058326437	14.83113911	4.040822013	18.89758739	26.27154448	25.1016163	65.12122332	76.58210696	62.56052	7.875665967	6.330783529	9.738648333
Zm00001d042625	6.74282578	6.622680658	5.458534537	3.548904139	19.75275046	4.724114192	21.2997826	32.39693557	29.93170115	103.8582832	94.75424816	60.73738539	7.799260654	7.843815512	10.99016495
Zm00001d042626	1.364760171	1.518007701	1.277602877	3.993600725	2.576744358	3.510513866	3.023759111	2.585927325	2.848930592	0.162963574	0.178805856	0.176706162	2.214785724	2.370441025	2.540951638
Zm00001d042627	65.18668274	66.76047042	53.37727463	30.92079466	34.25091662	34.30216361	26.29411735	22.54174041	26.77176808	8.568138186	12.33208279	6.178450522	24.28501622	20.42136543	17.37873744
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Zm00001d042632	10.69607854	10.65304578	10.40544366	10.37622279	13.21767792	12.59612152	12.69834174	13.02402225	13.67829213	9.531839076	13.24738752	7.174801422	6.820634118	6.970309365	6.544534607
Zm00001d042633	4.821256407	2.162769143	7.441959314	26.4950305	177.7889299	38.89250972	119.258203	124.017873	152.2053644	24.50224249	34.39644479	4.974962952	0.221718112	0.965338918	0.738113607
Zm00001d042634	2.566272579	1.939337886	4.070797314	4.399292981	19.60005938	7.408489846	23.17169182	21.60412338	18.51769324	96.42375567	37.69234556	61.88000947	7.038377152	6.250503599	17.1436419
Zm00001d042635	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042664	5.200700588	5.775846082	6.470587927	8.514334521	11.19903048	8.145752787	11.65713196	14.9114841	12.40258102	50.16873692	43.00907788	32.07755069	3.427543932	1.877298124	5.175589576
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Zm00001d042685	2.543485381	3.718382164	2.173222643	6.41033519	7.989534286	8.615694216	8.465071406	7.219909974	7.244567134	0.219242854	0.467748264	0.058699118	7.251139857	7.12001594	9.285695795
Zm00001d042686	29.33564067	32.18188944	26.30986292	37.59359873	41.4307126	39.02752176	36.20757841	34.88509028	35.91908996	31.44902865	29.56354427	26.03820502	33.4367147	34.31486903	34.86008905
Zm00001d042689	0	0	0	0	0	0	0	0	0.004491322	0	0	0	0	0	0
Zm00001d042690	2.878859249	2.775947517	2.652604869	8.900823261	9.640324289	8.153103498	9.882181211	10.27812599	10.39038016	4.354536726	4.525253386	3.159403864	8.777561646	8.939288932	9.746659431
Zm00001d042691	0.153645336	0.05644242	0.171060159	1.309401949	0.856195934	1.227459227	1.264222638	1.018937158	1.121133255	0.335511893	0.524744181	0.20565994	0.852506401	1.021115437	1.039904751
Zm00001d042692	0.029578611	0.007450874	0	0	0	0	0	0	0	11.75676763	0	0	0	0	0
Zm00001d042693	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042694	3.88021254	4.426693034	3.373838315	5.701446801	5.236752515	5.485484896	5.866322173	5.254755905	5.361230611	2.545933703	2.661064615	1.45950532	5.354694933	4.198074167	4.63670632
Zm00001d042695	1.382658885	1.108797292	1.393361997	3.439096767	2.988662528	3.311760218	2.965026555	3.140777008	2.842003118	1.078442314	1.0350449	0.742877364	5.429826178	4.589734052	4.358572419
Zm00001d042696	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042697	58.06635472	69.91945277	65.70831134	332.5551153	180.2860969	388.5085343	253.3208788	196.1116622	145.750831	0.277959	0.098836242	0.260468323	1658.144779	1979.570117	1917.435295
Zm00001d042698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042699	3.028188177	4.298530678	3.82473501	6.753638721	5.562720425	6.815664159	4.322196144	3.710773176	4.938911786	0.353699151	0.908015956	0.043706703	2.704289096	2.335618706	2.429031725
Zm00001d042702	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042706	1.699823984	2.03114308	2.437553366	5.535416472	2.7757802	5.348686723	3.344360126	1.655446805	4.228543918	0.991835103	2.381702864	2.8808105	5.795890525	6.195429252	4.862680759
Zm00001d042707	0.067512266	0.085031949	0.230737219	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042708	3.399767262	3.787163426	2.810183713	9.150091171	6.93084443	8.821537043	6.764711013	6.854801715	6.467282486	3.704625594	6.855500402	4.849752137	9.547012861	10.47763574	10.70716301
Zm00001d042709	4.449789499	4.317410887	3.45013194	8.630456799	9.372718656	9.690639723	8.528061867	8.926218085	9.169529633	6.658582279	6.372357243	11.30256877	7.158532694	7.638989924	8.595980195
Zm00001d042710	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042711	0	0.011995103	0.005918025	0	0	0.008750853	0	0	0	0	0	0	0	0.005220093	0.008258
Zm00001d042712	7.350176524	6.950613119	7.533147199	12.64044017	11.55101216	11.65383331	11.15370176	11.69162633	11.85352943	6.777602138	6.607821023	5.208492757	7.807754324	7.234691853	7.357125231
Zm00001d042713	1.082183851	1.0575113	1.245561378	1.984587916	1.928174522	2.155279238	1.613368208	1.288797599	1.554880108	0.198511175	0.463852859	0.138776664	1.980549236	1.849619669	1.716482223
Zm00001d042714	4.50873867	3.5118728	2.998349957	4.389966596	3.135488011	3.747153959	4.459706168	3.886629582	5.259736585	2.127311091	2.743083564	2.716348397	5.738800242	5.62911511	6.439687174
Zm00001d042716	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042717	16.23459028	20.12467085	16.38889758	4.866402655	5.741916705	4.832822502	5.091979277	7.572519516	6.392910385	4.183427717	7.165318716	1.593314192	17.73675611	17.59398053	14.81794881
Zm00001d042718	4.115103836	4.088522489	3.2429642	3.179584192	5.471606042	3.646569042	4.528392136	5.112420966	4.449919859	4.063701347	4.691762233	3.524005586	2.101280257	1.976352913	2.370150084
Zm00001d042719	9.166536154	8.879974418	10.24646847	14.86827075	23.35589648	15.7352	16.8194835	19.94548785	19.75447261	7.845366145	11.66498117	5.001704639	9.038453527	9.796026325	9.822615776
Zm00001d042720	1.718645118	1.763119709	1.436871199	4.101300063	4.036268773	4.05666098	4.168788417	3.632068232	4.078373642	0.812895882	1.411492695	0.382964752	3.025145913	2.966623857	3.492381732
Zm00001d042721	41.06564414	32.60613414	32.05758613	12.74875925	23.40706256	14.16548941	20.11421339	25.94162962	19.37154982	53.72782718	57.90288864	53.05133533	8.893153917	8.222288903	11.79430657
Zm00001d042722	6.582227711	9.299728038	6.737671455	11.62645205	9.542685099	11.44283381	8.242189581	7.112448544	7.071203265	1.405989306	2.756892138	0.913884548	7.101956067	6.505084011	7.228433882
Zm00001d042723	0	0.167479341	0.0826293	0.114013294	0.054753363	0.213818708	0.097111471	0.01002091	0	0.045847746	0.052400804	0.036825222	0.176700575	0.081995125	0.355510667
Zm00001d042724	19.1170728	20.35767292	16.8769456	14.28454322	17.65794202	14.61412485	15.29776451	15.41800603	13.84617911	12.25747814	14.55884039	17.97248032	16.14684409	14.40899846	17.28162562
Zm00001d042725	48.97323418	46.1802557	54.56700589	63.62792509	76.93518964	62.3690729	56.94534195	52.71896529	50.03591837	10.03730427	17.1469273	7.776288313	41.07103921	33.0438634	44.66952548
Zm00001d042726	33.98320976	33.7016019	41.82457095	28.24869155	39.8398555	40.36687767	38.0803679	45.35016461	44.12919922	40.76955502	46.6912999	35.75201099	52.10229771	46.94905186	45.33772409
Zm00001d042727	85.5265884	95.26235558	76.01967302	111.8409953	42.1991264	101.5693072	68.69602502	64.07327818	46.64494007	1.683471918	3.956503313	1.903062684	568.6770436	625.880935	568.6956271
Zm00001d042729	26.69986335	27.9452494	25.6088409	20.38798723	26.69512077	23.68756394	25.3980104	28.82214939	26.73631126	72.36146651	72.3700307	82.2849455	18.64905857	15.60617954	15.31596252
Zm00001d042730	18.22831189	21.04540743	17.63008281	6.936180223	7.812460989	9.064942482	8.016047214	9.926088049	5.136688009	5.440208895	13.87222078	6.459427703	4.962432803	5.129919999	8.809332533
Zm00001d042731	8.742582903	7.210506245	7.015940989	5.143848574	10.66982638	6.077291392	8.522394085	11.48243325	9.269795752	14.69297425	15.04095349	9.243623993	6.26376265	6.08378569	6.176878217
Zm00001d042732	0	0	0.295489561	0.64247017	0.208856305	0.728223136	0.463038752	0.525589445	0.928545034	0.27325921	0.349794354	0.307277123	0.620810714	0.434402513	0.595581324
Zm00001d042733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042734	0	0.046225422	0.022806241	0.068658402	0.084628855	0.112410283	0	0.022126706	0	0	0.092563031	0.162624134	0.041069932	0	0.010607928
Zm00001d042735	3.36211086	2.244843459	2.441619298	0	0	0.099254116	0	0	0.174848831	1.201126038	0	0.246797182	0	0.111013976	0
Zm00001d042736	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042737	0	0	0	0	0	0	0	0	0	0.025139847	0	0	0	0	0
Zm00001d042738	0.093001591	0.210844527	0.231165303	0.09279004	0.245086481	0.4899406	0.554229037	1.233526248	0.699650206	1.192860102	0.199372584	0.80357895	0.15610765	0.193708059	0.043009012
Zm00001d042739	12.88783687	10.3602606	11.90889008	17.65782793	7.414508301	13.48357807	3.8737026	1.946794523	2.03833206	1.001377566	0.783082598	0.201078321	3.677638793	2.702038273	8.67055379
Zm00001d042740	2.723770743	2.470991125	2.586176922	3.818620424	5.138748985	2.899449206	3.338523918	4.04789249	4.316409231	4.964922824	3.176554637	3.692462821	2.461835591	2.641367004	3.517908015
Zm00001d042742	0	0	0	0	0	0.022347074	0	0	0	0	0	0	0	0	0
Zm00001d042746	17.19172334	14.50679723	15.1165738	19.947967	36.5147826	23.41284265	34.99380592	40.45398181	37.19423785	32.03712087	45.93351044	20.74064064	16.55920277	16.02246127	22.68439294
Zm00001d042747	0.275075129	0.443466423	0.287165911	0.703276625	0.31170858	0.791960976	0.462852419	0.480933089	0.35620612	0	0.041625428	0	2.357885132	2.303819203	2.970347781
Zm00001d042748	0	0	0	0	0.051103139	0	0	0	0	0	0	0	0	0	0
Zm00001d042749	0.629219971	0.45629069	1.018965048	4.969993733	15.32559604	4.835523504	11.83073699	10.32286458	6.631296073	156.7032951	38.68750643	98.44898227	6.251708613	7.566601095	5.092249077
Zm00001d042750	0.880122355	0.197069753	0.729212436	2.43922316	8.710562861	4.792312485	6.810445509	8.702063243	8.008097903	99.42647768	61.26441147	116.5401713	1.729020644	3.366153379	2.306427512
Zm00001d042751	7.195386274	2.752349934	7.551399892	15.75395814	40.48728333	17.23887284	20.39672164	30.17319309	23.76235054	4.336991203	13.17354175	2.125525967	3.727716799	3.914703348	3.111865534
Zm00001d042752	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.021330381
Zm00001d042753	0	0	0	0	0	0	0	0	0	0	0	0	0.157514026	0	0
Zm00001d042754	0	0	0.04567379	0	0	0	0	0	0	0	0	0	0	0.04028733	0
Zm00001d042755	6.120846998	5.756562776	5.942973958	4.256264795	4.417241648	5.52548689	5.034779244	4.879769722	5.537370144	4.665126306	4.849505353	4.092772248	4.021783696	3.829491668	3.654657577
Zm00001d042756	0.091293716	0.129357869	0	0.185018538	0.405988415	0.139809116	0.85341366	1.307193357	1.477749929	25.48085109	19.71503712	22.04656566	0.076620449	0.050039688	0.184708989
Zm00001d042758	0.130011734	0.025192348	0.09943321	0.162144995	0.342619067	0.159282164	0.245407151	0.204999807	0.086337206	1.04825991	0.327897936	0.686869858	0.335739936	0.120596747	0.242810573
Zm00001d042760	3.439304131	4.304742428	3.472931554	4.021266483	3.568782858	5.08267689	5.576122331	4.328449952	6.388933871	1.334072086	1.924576077	0.904852446	1.130553204	2.356428726	1.168039571
Zm00001d042761	32.17859765	36.00646905	29.83681916	19.16418386	19.4815845	19.13096722	19.31370722	20.12164155	20.36732272	23.42547767	25.38866697	25.9968176	10.04160882	9.746027028	9.14273441
Zm00001d042762	8.266104217	7.46074741	8.316350337	8.549031811	10.91710535	10.08006056	8.604424115	7.860186121	7.921083556	2.184730411	4.770018711	1.552723586	5.704726064	5.620082512	5.050312143
Zm00001d042763	0.508359296	0.297273049	0.022563944	0.747218601	0.669837951	0.422620864	0.042429846	0.350266055	0.111955	0.025039689	0.160264345	0.020112048	0.325068786	0	0.14693318
Zm00001d042764	0.784013415	0.514306144	0.659732517	1.19167854	3.034592285	1.750954674	1.717724403	2.747399371	1.742445148	0.901069796	2.481963778	0.832307211	1.224615093	1.244430855	1.642898029
Zm00001d042765	4.411251478	4.132552731	6.750951503	10.00276633	18.01385633	14.47125016	11.71488043	12.26439079	15.87127818	0.955314198	2.4825405	0.12115498	6.201012163	4.236293307	5.942985338
Zm00001d042766	2.862568835	1.201805347	1.73791243	4.883201484	12.03091488	7.235786326	8.112372072	7.934727425	9.393954087	0.998333287	3.111888913	0.892989474	1.325506115	0.775494739	1.027092481
Zm00001d042767	5.611245408	3.070370503	3.370835735	4.91647469	21.4285311	8.596542518	24.87968582	33.10119724	18.86471424	77.64578143	58.90633247	68.75180197	21.19678579	17.55090828	22.66134501
Zm00001d042768	5.71898196	4.485294539	7.445130191	3.462727659	7.137940864	2.421784006	10.63225903	16.57536971	13.62232851	3.475459024	7.934904558	2.273327442	1.131349705	0.645130884	0.959513978
Zm00001d042769	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042770	0.109369871	0	0	0	0	0	0	0	0.059948171	0	0	0	0	0.053286708	0.014049611
Zm00001d042771	0	0	0	0.018452565	0	0	0	0	0	0	0	0	0	0	0.222376144
Zm00001d042772	3.88679924	3.868477052	5.74482059	14.51940476	31.01129796	13.78986843	15.99632776	21.10446243	16.61091898	1.547284325	4.491641848	0.937185384	4.719911311	4.133154852	6.733417698
Zm00001d042773	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042774	5.316590969	5.971976003	5.704003847	8.078532875	10.02199467	7.603574271	8.811517205	7.391812593	9.11265719	7.631739363	6.964357993	4.74764059	4.516714687	4.008397474	5.193338251
Zm00001d042775	2.278538987	0.239152357	1.41588748	1.894463321	5.003848981	5.117790375	2.218727354	4.121099056	1.873380333	0.26187341	0.478885127	0	0	0.416302408	0.87810067
Zm00001d042776	0	0	0	0.016009549	0.016914419	0	0.044999541	0.015478306	0.047494149	0.017704118	0	0	0.028729671	0.014072194	0.178093657
Zm00001d042777	0.641570045	0.889426984	0.866559129	2.039241437	1.787589784	2.15334288	1.559219054	2.433577152	1.494552731	3.662216637	2.915916479	5.586908811	3.986048728	3.08431447	5.143263272
Zm00001d042778	5.022527743	4.989820202	4.022331178	12.46025875	13.79208161	14.05707052	13.76137973	12.45139667	12.48178583	4.418880526	7.084314899	2.721910183	11.26496537	10.0268561	9.598620631
Zm00001d042779	1.080577416	2.515403479	1.678680992	0.012032583	0.228828097	0.212762441	0.304389977	0.8143315	0.725819197	10.88447165	4.878747845	2.554343706	0	0.01057649	0.044617677
Zm00001d042780	0.597841741	1.151622412	0.808558252	0.263153747	0.266442891	0.24773636	0.636938837	0.742062853	0.574663935	4.171112931	3.813834994	1.860176946	0.334502052	0.742115933	0.467567431
Zm00001d042781	0.087636115	0	0.04840641	0	0.410572224	0.047718325	0.56890445	0.551828079	0.372274297	1.047493638	0.44204781	0.884500389	0.10896403	0	0.067546205
Zm00001d042783	0	0	0	0	0	0	0	0	0	0.097190131	0	0	0	0	0
Zm00001d042784	0	0	0	0	0.246765155	0	0	0	0	0	0	0	0	0	0
Zm00001d042785	0	0	0	0	0	0	0.218833383	0	0	0	0	0	0	0	0.433035947
Zm00001d042786	22.4366339	19.64953857	22.45193004	66.8958196	245.7757864	93.41629054	221.0531647	279.2114697	277.3080796	164.0984294	242.2670085	79.40493276	26.6163544	22.09801151	36.26197361
Zm00001d042787	2.412570692	1.664018081	1.951307115	6.001787159	8.695764447	7.193838265	4.847639597	4.186513327	4.659836794	1.197135586	3.380365604	1.265566144	4.685270137	4.0230905	5.01033912
Zm00001d042789	3.790843624	4.012680257	2.355635807	1.307682646	1.487870139	2.816225757	0.895344844	0.486265375	1.193658265	1.223620887	0.406840462	0.714778644	0.812312376	0.618927474	0.839246659
Zm00001d042791	4.476421726	6.450764464	2.455875629	0.050295486	0.425105754	0.395259755	0.376987303	0.048626538	0.348150327	0.611810443	0.203420231	0	0	0.176836421	0.046624814
Zm00001d042792	7.171107363	7.596604285	7.149439775	5.454700687	5.064162426	5.104526196	5.08761949	4.922713055	4.946778742	6.355273563	6.884124922	7.044783894	3.331892736	3.126099066	3.51367024
Zm00001d042793	2.263806279	2.147958531	2.229336161	3.508984656	4.369233723	3.198738214	3.799093852	4.349218559	4.852589807	3.157843934	3.194581435	1.951262	2.810725509	2.179137287	2.93134127
Zm00001d042794	4.613494307	5.288814817	4.188730089	7.533372821	6.794126817	6.653177141	10.15433606	7.828768751	7.712248981	6.596191528	6.998980242	5.692473852	10.00854962	10.07336312	8.940320594
Zm00001d042795	10.16361589	10.32019738	9.987712922	18.82717312	15.63647405	18.11398613	17.46525575	13.39387612	14.09764332	4.737380439	7.472134988	3.836395517	13.383408	14.07537248	11.437864
Zm00001d042796	68.45905753	57.16438769	38.31287626	19.76087422	23.94504139	18.65566552	22.52707487	22.73388981	25.61578846	21.01885165	29.03043989	17.72304742	14.23355193	13.05536885	11.83577273
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Zm00001d042801	6.443240156	5.763933064	7.340371345	9.395622318	34.19911576	12.07354359	27.76050215	35.8373762	35.10635507	19.39034145	19.95865893	11.61221071	7.718603648	7.923580581	5.204935092
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Zm00001d042808	25.40645432	27.87297276	24.35696632	33.80316906	41.67911857	42.94929962	39.81527989	36.23694072	39.04712341	30.6032455	39.21224101	29.13394538	29.93049602	28.86363364	28.3402687
Zm00001d042809	5.79817929	6.470462898	4.174827658	5.704124694	4.597115105	5.777564551	7.61733378	4.961556689	7.476776414	1.912316003	2.776869833	1.552560626	10.67996167	10.79318291	7.701080634
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Zm00001d042811	37.1853676	34.35227291	32.64088578	3.683903088	6.235073229	3.975984459	9.43503163	11.30592918	9.322963106	29.72291116	20.25408397	20.31089619	4.305775195	4.601517451	4.04413102
Zm00001d042812	7.817280002	8.446899064	10.08096962	39.76875374	57.22979214	62.3697371	64.54479575	61.60111	55.18697083	15.60061671	26.70399753	5.81964249	62.47747654	58.9536865	73.50362055
Zm00001d042813	30.12833777	34.81908849	35.89495994	26.72969342	23.46726987	35.18844362	41.06032309	46.95262597	40.62527702	8.813676939	13.14315197	7.148222704	65.83555587	52.78584443	68.70794739
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Zm00001d042827	7.548249967	9.299669378	0.127893487	0.250265949	0.406786368	0.29627746	0.192395477	0.304002791	0.120567571	0.042577837	0.058396229	0.03989861	0.184250505	0.225621177	0.267693467
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Zm00001d042833	20.21685501	22.85426889	19.75034317	21.61754873	19.71698457	21.95997324	22.06786567	20.39402878	19.49678004	4.418518619	6.450147314	1.578686105	13.18456833	11.17204281	14.41362337
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Zm00001d042841	4.329423772	4.83921965	4.080138504	12.22352232	8.95693353	10.99972219	6.127654371	5.24919424	5.762984196	0.143215607	0.463355986	0.061940174	11.20463459	9.789856459	9.983104205
Zm00001d042842	12.91373448	12.17470632	12.30155474	50.89737882	35.96562885	47.84514813	8.881026797	8.198496108	10.04831148	17.18033972	46.44982601	23.24653151	85.96308638	89.00351245	85.13432763
Zm00001d042843	4.140023963	4.894082165	4.045392799	6.406499846	5.99121561	5.2839524	4.469150813	4.292811517	3.976751555	0.196405057	0.333509285	0.011268134	1.513918985	0.880925632	2.199171769
Zm00001d042845	5.266313348	5.590102139	4.965577218	4.670785976	4.516149897	4.128307216	5.017448788	5.386450597	6.554192601	3.983426511	6.713834587	3.764763027	3.803090183	3.493422181	3.884667896
Zm00001d042846	1.507978529	0.897473573	2.533151418	2.294022857	10.87381873	4.202509518	6.486751973	9.37112949	6.641984816	0.525651353	4.074877083	0.477277194	2.966991466	1.580435325	2.26071009
Zm00001d042847	19.26485614	24.50601897	18.67662724	22.86746845	10.03127749	14.39651276	5.037828054	3.570249839	5.813675532	0.025629659	0.437441059	0.027447889	7.909218513	6.709127349	8.880474384
Zm00001d042848	19.92623308	30.59754389	15.85734951	14.20255162	8.739395645	9.177546868	8.362023822	9.749760143	7.771258019	12.84667159	22.58521082	13.22666406	46.82041827	41.72742868	32.8100325
Zm00001d042849	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d042851	1.25928978	1.641895275	1.239188394	1.607376902	6.535010549	2.569829026	7.793234881	5.209817283	4.35401523	6.534526763	2.994390309	5.015397273	1.962941958	1.554555508	2.770927075
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Zm00001d042863	114.8914571	161.3066396	74.62689272	42.21158564	50.368841	64.39472161	137.30605	180.1120341	150.7616464	1000.498802	885.6101697	1021.318838	28.41371423	23.73166234	18.33781109
Zm00001d042864	4.480729023	4.818606969	4.096436761	3.735861831	4.465738729	4.156590907	4.491354681	2.93439514	4.863923073	6.816386611	6.494284066	5.760411849	6.620026892	8.254557491	7.017449547
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Zm00001d042868	9.612878571	10.43502542	11.14890333	19.33596558	53.94299796	25.05877909	66.60916965	78.38544634	70.74765727	90.51720675	85.36602347	66.30928631	20.52363582	17.41294451	19.86357413
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Zm00001d042906	3.562536527	3.677760399	3.209959889	0.761664174	0.905303157	2.283618295	0.884600092	0.905146	1.176855956	14.29251208	6.409796091	10.8033146	0.064070241	1.053057185	0.94143506
Zm00001d042907	19.91611855	22.49095056	19.44485472	23.74394029	24.48550101	30.54821137	29.89858372	27.39258928	28.87087246	23.33195089	27.29999955	21.00268945	24.11252902	24.14553968	26.77231378
Zm00001d042908	12.28198083	13.47683751	12.35081704	15.87975954	10.10309508	12.6923879	7.589962998	7.155097642	7.121203837	0.921266887	1.813906615	0.481206081	12.07925061	11.67144234	13.54107041
Zm00001d042909	43.56430511	17.433136	27.45131099	23.13648675	114.1101621	42.72695275	74.94662309	90.84870606	59.74545412	87.30937645	76.01407952	63.02620701	21.31141258	19.05049528	20.85816742
Zm00001d042910	9.248447124	9.570621152	8.04762546	7.437673592	6.780866547	7.893600454	8.642012244	7.33624775	7.503595435	10.02971215	9.378278667	10.9095512	6.347795753	6.602095926	5.296935944
Zm00001d042911	0.565476829	0.377057731	0.30315839	1.147740552	1.34409958	1.290484633	0.375726092	0.14706274	0.232463253	0.091751268	0.125838428	0	0.384635071	0.230941482	0.24356077
Zm00001d042912	0	0	0	0.031750782	0	0	0	0	0.062794871	0	0	0	0	0.027908541	0.117734168
Zm00001d042914	0.121774649	0.245400994	0.131162973	0.263244903	0.160455965	0.188974769	0.094862452	0.12725484	0.100121277	0.044785951	0	0.170868811	0.281624134	0.186891105	0.300347973
Zm00001d042915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042916	3.045973891	2.838648056	2.677941031	1.731445616	1.847575008	1.49948771	1.49959356	1.339670619	1.49723878	0.718359392	1.213758393	0.427807133	1.196757477	0.998691566	0.945646876
Zm00001d042917	0	0.043155313	0.076649548	0.213661277	0.4695341	0.319031088	0.200185927	0.355302776	0.422566992	0.557613155	0.224679939	0.470652178	0.069016014	0.015024448	0.348599364
Zm00001d042918	0	0	0	0	0.086087724	0	0.668003935	0.472670859	0.423021365	6.701706609	2.523158197	1.899831677	0.073111349	0.08057466	0.198280797
Zm00001d042920	0	0	0	0	0	0	0	0	0	0	0	0.005038048	0	0	0
Zm00001d042921	13.02397141	17.94606632	15.17527003	26.38794687	33.79182774	26.8543347	53.95467962	48.43016472	50.72150283	20.55580606	15.00077788	22.28538502	40.48291858	40.61705186	48.9140838
Zm00001d042922	0.03858816	0.006943133	0.102766027	0.281877809	0.668255961	0.682121914	3.085462459	2.333073821	1.788020664	2.349257909	1.272135169	4.219661858	0.209738182	0.320284272	0.790290603
Zm00001d042923	6.396011912	7.350005446	5.643537375	8.555208918	11.80130376	10.30988982	9.991329116	10.74106948	9.580056599	14.88403328	12.14709893	10.33884371	9.860266691	8.854443308	8.891467425
Zm00001d042924	2.623262597	2.573314662	2.225712422	3.869318996	5.783046128	5.593344864	4.86318837	6.539013263	5.288324556	5.87910636	5.375529731	6.482462036	5.165377497	4.562428608	5.394972754
Zm00001d042925	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042926	0.028304832	0.071300082	0.52765993	0.211803353	0.335661919	0	0.033074197	0	0	0	0	0	1.235286625	0.372345011	0.719933469
Zm00001d042927	0.002043533	0	0	0.015291632	0.018848579	0.032546894	0	0.014784212	0	0	0	0.002263733	0.004573557	0.006720577	0.002362603
Zm00001d042928	0.152580736	0.096088001	0.018962779	0.15223366	0.080419001	0.130852595	0.106974355	0.036795527	0.169356927	0	0.01924092	0	0.051222823	0	0.123482907
Zm00001d042929	46.55008331	50.02051732	54.53591262	42.42105624	52.56097806	42.11661051	46.03707292	49.10035485	43.98433978	31.4301901	51.04062647	26.2692626	33.21671417	26.53500145	32.32883993
Zm00001d042930	0.21786827	0.571678941	0.248203383	0.452859758	0.502378463	0.222432034	0.403083535	0.087566514	0.716512	0.801270034	1.373694389	1.106162667	0.487603179	0.457766792	0.755656354
Zm00001d042931	0.790816134	0.361062995	0.405416805	2.712246837	2.748317922	2.3131484	0.58909377	0.429094913	0.743662909	0	0.261776686	0	0.353979459	0.866920416	0.594289391
Zm00001d042932	0.089888567	0	0.020311596	0	0.021534795	0.010011436	0.009548617	0	0	0.011270105	0.195790452	0.009052225	0.402352773	0.089580913	0.821940018
Zm00001d042933	0	0	0.03094836	0.031056776	0.328121245	0.305084374	2.764316047	1.381206241	1.873380333	165.8817794	86.1993229	186.6702528	0	0	3.051759707
Zm00001d042934	0.368120505	0.063951605	1.08853745	0.269129887	4.298571102	0.668721153	6.823050136	6.612125505	8.031009282	69.6772927	46.06901603	49.77816035	0	0	0.058703109
Zm00001d042935	35.96912242	41.8060567	39.72387571	9.51637389	40.21698157	14.17833511	36.97741328	51.16552131	20.52004969	926.6372326	259.239452	542.8964051	25.54502027	16.12542538	25.65687634
Zm00001d042936	0.405073598	0	1.258566649	0	0.533743891	0.496270582	1.479151569	0.122106639	0.686906122	0.83799491	0	0.280451343	0	0.555069878	0.234160179
Zm00001d042938	12.07835425	11.42317151	12.14665266	12.40012355	12.86259822	13.80984255	13.93432268	13.64847305	12.61136357	12.90442249	14.33844894	12.7655384	9.528584637	9.55866738	8.989669292
Zm00001d042939	3.735581044	3.514463747	3.441042405	6.820067954	11.17513108	8.574180823	14.32313715	14.96215916	15.01070019	32.20658498	22.85676758	31.16609068	3.405044221	3.373528087	4.234011536
Zm00001d042940	0	0.043814172	0.162124521	1.6594631	1.398021929	1.971112879	1.768207143	1.447103485	0.868762254	2.302886777	1.513423227	1.859328178	1.391661968	2.650352737	1.256823479
Zm00001d042941	0	0	0	0	0	0.039042266	0.074474764	0	0	0.175803128	0	0.105904703	0	0	0.036843385
Zm00001d042943	6.18323122	6.151709618	6.493470452	14.45088301	29.39423178	14.92426892	23.78685603	27.30228125	23.85237206	16.50598717	24.40372723	10.62280521	14.98198347	13.51224793	14.05035237
Zm00001d042944	0	0	0	0	0	0	0	0	0.078493589	5.424729623	1.412577359	3.680336337	0	0	0
Zm00001d042946	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042948	11.51759263	7.406282775	9.06167987	5.708649473	42.8685302	12.05110396	29.18859097	31.75586651	29.52447404	15.87534803	11.91040521	2.864343048	0.793258135	1.25815839	2.052804234
Zm00001d042949	0	0	0	0	0.016141448	0	0	0	0	0	0	0	0	0.01342911	0
Zm00001d042950	29.30271868	21.35508587	26.3210657	48.36552256	89.05741685	45.1223848	66.74482873	79.8512438	84.95011349	68.95341713	78.85995705	78.10600991	20.86165874	19.89390134	22.56971834
Zm00001d042951	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042952	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042953	0.023921669	0.007532358	0.037162401	0	0.031520309	0.007326829	0.027952471	0	0.007375513	0.049487888	0.03770749	0.019874505	0.006692279	0.006555943	0.110626856
Zm00001d042954	36.50044185	36.86625567	42.80336766	38.74541811	32.15935249	33.12248246	31.48886129	36.35020706	29.01938188	36.44069214	45.58618038	41.11308821	47.51376507	42.94319458	43.41532354
Zm00001d042955	2.092053375	3.136135118	2.374773813	3.724503969	1.910403207	3.311211713	4.649736403	4.151977608	3.605312352	0.211913699	0.203698688	0.165846154	11.63483365	11.52737769	10.72699926
Zm00001d042956	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042958	0.956556461	1.218323329	1.202168615	0.268084432	1.161270612	0.289686248	3.315532197	3.395370921	4.917623373	9.382973673	8.023584773	9.143772084	0.68554822	0.659800043	0.633723597
Zm00001d042959	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042960	11.95943813	10.4595772	9.918399604	15.49228634	20.08651662	19.61150497	18.00210052	17.99058471	19.54211464	21.05621729	18.08581394	18.11687203	13.74539749	12.34960038	11.41976608
Zm00001d042961	0.870692124	0.924392839	0.113308768	0.392284669	2.558820539	0.390943398	1.811085216	1.918324202	1.416747781	4.664996676	3.880262952	2.954137353	0.489716831	0.489734877	0.58501005
Zm00001d042962	0.187933404	0.357374843	0.169448529	0.643402637	0.407860898	0.744907494	0.198070755	0.177729339	0.340844131	0.040657435	0.041821774	0.069394699	0.309269874	0.488790644	0.639049005
Zm00001d042963	1.32569541	0	0.102973635	1.550015444	4.366995474	3.552846211	3.872687745	1.79829777	3.065531454	0	0.208968056	1.009624834	2.781554499	1.907421944	1.724270408
Zm00001d042964	0.972859343	0.064490523	0.763624708	0.510866513	0.742143894	0	0	0	0.252590607	0	0.064568781	0.056720496	0.057297939	0	0
Zm00001d042965	10.84790897	10.41124894	10.81734907	18.21760283	20.91835442	17.69248469	24.91933428	22.78323785	24.19670865	3.643959094	7.653700233	3.721284246	8.996662329	10.22848811	10.59539252
Zm00001d042966	25.33539793	22.18728904	28.925358	42.95757088	66.3084864	38.37830503	43.13476583	50.94246219	43.26017057	3.119413578	15.04959381	1.69315966	13.85594229	12.87975243	19.07228706
Zm00001d042967	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042968	9.137194764	7.329814205	8.555453568	10.32664486	17.30350204	10.68625114	17.15397051	21.13469607	15.75230622	26.65230527	21.99869474	21.56044136	9.265754598	8.682999068	10.48393601
Zm00001d042969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042970	0	0.026089348	0	0.025833591	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042972	0.296261503	0.365368658	0.41038364	0.08467353	0.215515663	0.151233699	0.191121074	0.249312539	0.167462441	0.114916909	0.066157494	0.08888345	0.145042684	0.192833531	0.149851943
Zm00001d042973	33.03539921	38.46516472	27.86135408	19.86204198	21.4775401	18.87102369	20.27989983	22.63206273	19.36294455	21.01740234	21.75014399	16.68265023	17.51190814	14.95880033	16.66482359
Zm00001d042974	1.186607561	1.574033242	1.23939181	4.549860662	2.977359449	4.531390319	1.902819913	0.989368194	1.167619321	0	0.39796548	0	10.49568094	13.02184708	14.49230968
Zm00001d042975	0.146393178	0.017843492	0.029344818	0.265028547	0.379566576	0.138852909	0.733904426	0.444139173	0.652285795	0.442878139	0.595504821	0.423728557	0.496740475	0.181188613	0.524130556
Zm00001d042976	73.17789375	83.58273258	91.93241086	81.79734477	75.80618578	73.92393163	87.81634872	89.02974902	87.33508058	19.17536513	27.00749324	8.580381028	116.6893631	121.2112225	123.4913022
Zm00001d042977	10.2443665	12.4464268	10.69876961	20.86563766	18.49813645	20.16745179	25.02986569	22.46396896	24.58519082	11.08732948	10.90139108	6.193079256	28.3900766	28.18056772	23.60996918
Zm00001d042978	0.443241627	0.462312763	0.387324842	3.144002958	1.186322859	3.410917487	1.489042552	1.202509147	1.315352149	0.114619365	0.174669347	0.099734976	4.557014818	3.484792804	3.7312606
Zm00001d042979	0.14218652	0.11192778	0.092772659	1.285634235	1.063220329	1.371808794	1.204550888	1.092959188	1.262558976	0.382392373	0.327225719	0.417395602	0.481311627	0.483196555	0.994541477
Zm00001d042980	0	0	0.011653395	0	0	0	0.010956678	0	0	4.707255361	0.520270262	2.659094214	0	0	0
Zm00001d042982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042983	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042985	9.61533348	11.3164138	8.220309927	9.927659894	10.74440655	8.200018571	8.692294872	9.210793456	9.316224856	2.834503849	6.33784822	2.20281782	14.47086767	13.30543112	13.07221264
Zm00001d042988	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042990	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042993	4.785819231	2.779175986	3.712798843	3.179845617	19.02718447	5.993739626	18.77440811	20.2434948	19.63279891	60.05660409	23.76729059	69.55533097	5.368725159	4.928617002	5.341557432
Zm00001d042994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042995	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d042996	7.688980606	9.728169512	6.514886085	18.0058482	18.64491499	19.27750431	12.53566823	12.96702506	11.57677451	62.24514106	42.07844654	79.30056461	8.40933021	7.65572174	10.78218135
Zm00001d042997	4.72157143	4.465882519	5.913412415	6.747126051	10.23514564	7.01612487	7.389429925	8.749071258	6.724633948	2.40307364	4.847751582	3.205693826	3.388315162	3.152321979	5.050252787
Zm00001d042998	70.0931911	65.94833921	81.14821296	122.3591259	134.3300182	100.9847126	118.0298053	132.0258498	129.797516	82.02047534	72.28451447	65.6302286	163.5714226	169.8285506	164.2561951
Zm00001d042999	0	0	0	0	0.018195814	0	0	0	0	0	0	0	0	0	0
Zm00001d043000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043003	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043006	3.297831405	2.758754823	5.811383355	2.133189572	10.32837667	4.206127692	7.980229078	11.20226746	9.530464123	22.53761289	26.13135189	20.82862394	2.464842848	1.672703826	1.180812243
Zm00001d043007	0	0	0	0.011176775	0	0.010979438	0.01047187	0	0	0	0	0.009927481	0	0	0
Zm00001d043008	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043009	1.948815203	2.224638145	2.415321112	7.097262941	4.120585632	5.14674883	1.57772295	1.644231942	1.304340597	0.092552943	0.169250585	0.127863345	5.280748174	5.702844379	6.346531648
Zm00001d043011	0	0	0	0	0.114373691	0	0.025356884	0.104662833	0.401438643	0	0.136824322	0.024038687	0.097133649	0	0.125442953
Zm00001d043012	0.297200737	0.423374967	0.305678856	1.582317115	1.63664122	1.77284667	1.604668779	1.591596877	1.56976352	0.310950135	0.589308714	0.168018526	0.791304297	0.734739423	0.751190768
Zm00001d043013	0	0	0.022474404	0	0	0	0.021130737	0	0	0.024940325	0.022804054	0	0	0	0
Zm00001d043014	0	0	0	0	0	0	0	0	0.052524682	2.261411499	0.322240459	2.642008912	0	0	0
Zm00001d043015	3.446316614	2.803335508	2.839648291	4.930169606	6.549987303	5.246716091	6.410662093	6.090620292	6.604577188	1.928009606	2.332734225	2.554472472	3.038914886	2.726992977	3.305695017
Zm00001d043016	1.085866236	1.434914143	1.106162094	2.086869752	1.548065778	1.286717182	1.18563243	0.837098246	1.448942601	0.073651896	0.179581923	0.236630821	1.075679279	0.878137893	0.720316956
Zm00001d043017	0.202536799	0.042515975	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043018	1.175354952	0.441512044	1.973273049	2.314502699	4.781958845	4.24412398	4.746671009	5.519662084	5.594710496	1.393498324	3.380365604	0.685265725	3.968854534	4.227070607	4.410369883
Zm00001d043019	0	0.015526573	0.007660347	0	0	0	0.06482125	0	0.038008167	0.110511051	0.380862653	0.436988206	0	0.094597121	0.01425231
Zm00001d043021	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043022	6.287671713	5.012134971	5.762860664	10.88272366	14.03384098	10.60666484	14.77432315	15.0886733	15.91434716	6.442400752	11.13335944	6.73757655	9.350816978	8.492068565	7.776206138
Zm00001d043023	3.438012274	3.749154982	2.732732584	2.452536752	3.456353222	1.699665626	22.95497506	27.70677829	22.40027626	18.98956324	21.52010682	35.59300555	34.6063746	45.50328875	43.12728722
Zm00001d043024	0.133247894	0.671304862	0.33120175	0.565015376	0.386262027	0.130597522	1.525861619	1.895866232	1.051722292	0.80859158	2.285206221	0.73802985	2.505025689	1.460710205	1.509716942
Zm00001d043025	3.370317641	1.288914362	2.635035776	5.792930871	21.21936998	6.951903343	22.58387976	23.59980347	25.36998655	32.8502644	27.02277294	31.06259463	0.994302875	0.886718532	0.956425204
Zm00001d043026	0.109504646	0.339499095	0.136092697	1.932982908	3.063354496	2.394207428	2.883935444	2.589969832	1.724479493	2.381547458	1.125955419	1.539631217	0.367617646	0.267787871	0.613534295
Zm00001d043029	37.01946562	39.69603196	34.76281151	20.36144649	19.09560835	19.39560915	18.02271852	16.7722413	19.59629231	22.516652	19.15622091	27.93453039	15.82631062	14.220947	13.28819124
Zm00001d043030	0.189878249	0.478304714	0	0	1.250962245	0.930507341	0.887490942	0	0	1.047493638	0.957770254	1.262031043	0	0	0.439050335
Zm00001d043031	0.867802934	0.832362305	0.605623746	0.666022261	0.589320495	0.417092646	1.248034137	1.247598347	0.510422962	0.184129741	1.599401499	0.251420247	0.866519419	1.002540761	1.358311975
Zm00001d043032	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043036	0	0	0	0	0	0	0	0	0	0	0	0.014220068	0	0.014072194	0
Zm00001d043037	0.988982879	0.610601763	0.626605523	2.176617432	2.938430465	4.585223407	5.642176454	5.68185572	3.874309965	0	0.684703841	0.021481379	3.775812277	2.31712149	3.362938738
Zm00001d043038	4.152527051	3.857049215	3.757674024	5.046850286	8.158533641	6.059944065	6.70324771	8.04013132	7.862395962	5.91678471	6.989374776	4.318588807	2.210887189	2.622221724	2.378009919
Zm00001d043039	0	0	0	0	0.045062805	0	0.019981034	0.030927573	0.010544355	0.129708405	0.280323001	0.113653828	0	0	0
Zm00001d043041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043043	53.31232183	41.69030669	47.9184088	6.676271341	30.90931774	9.736694283	23.44900765	34.99624078	33.17914565	66.61680926	68.31902158	46.68754599	4.254717148	3.52101555	3.515047564
Zm00001d043044	0	0.052297554	0	0	0	0	0.012129717	0	0	0.057266167	0	0.022998288	0.069697265	0.011379565	0.048005504
Zm00001d043045	3.130514434	3.618479142	4.087605594	13.14592809	18.77096044	15.63252333	50.86480692	47.61362562	32.74343016	3.661673413	6.920931143	1.514437251	80.9936264	151.4978764	195.9004418
Zm00001d043046	0	0	0	0	0	0	0	0.059564214	0	0	0	0	0	0	0
Zm00001d043047	0	0	0	0.038878911	0	0	0.006623067	0.006834327	0.003495113	0.027359908	0	0	47.38617958	21.85898317	15.851683
Zm00001d043048	0	0.021024383	0	0.020818278	0.021994941	0	0	0	0	0.023021838	0	0	0	0	0
Zm00001d043049	0.016353151	0	0.121942462	0.571058322	0.538691876	0.981707506	0.133760596	0.788727092	0.645375043	0	0	0	0	0	0.075625895
Zm00001d043050	41.27478435	35.75327739	55.80956483	89.57259388	61.17205379	88.39819738	9.568261714	10.33136638	12.05988589	4.451847962	5.237806079	1.761584997	11.73951213	12.25490214	11.71715582
Zm00001d043051	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043052	15.33109676	15.20913964	15.00746961	13.8085675	13.87325414	13.40300309	13.5063191	13.36855422	12.49643934	11.03510268	12.69679872	10.53921288	10.68450039	9.974715982	9.503549806
Zm00001d043053	0.759512996	0.478304714	0	0.710423745	1.250962245	0.46525367	0	0	0.936690166	0	0	0	0	0.416302408	0.87810067
Zm00001d043056	20.57219031	14.15828646	18.08949593	3.38090617	16.62902052	4.823423043	16.23149998	19.32063767	19.7853652	102.656933	69.82548365	145.16052	2.299293932	2.60906549	2.764490213
Zm00001d043057	0.207139908	0.559057458	0.478091876	0.03690513	0.740829589	0	0.345775692	0.214083068	0.255460954	0.857040249	0.634367311	0.983400813	0.099341232	0.129756595	0.239482001
Zm00001d043058	0.008082314	0	0	0.020159823	0	0.059411642	0	0	0.039870938	0	0.015288086	0.035812882	0	0	0
Zm00001d043059	9.790703889	10.91019437	11.20059178	22.16382748	18.18069673	20.27142307	18.51618938	21.01973814	21.32928477	37.28860491	41.871597	42.858863	24.30848288	26.57304427	29.31244036
Zm00001d043060	0.076876667	0	0.127390064	0.127836325	0.236358002	0.031394812	0.254519427	0.185391523	0.158017085	0.088354665	0	0.141934138	0.01433791	0.014045817	0
Zm00001d043062	0.052615397	0.011044881	0	0.973357999	1.00526331	0.537175501	0.573823521	1.26884384	0.367706467	0.665181977	0.409156504	1.777690937	1.059809732	1.124737488	1.135504138
Zm00001d043063	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043064	0	0.013174422	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043066	0	0	0	0	0	0	0.028835446	0	0	0.068068179	0	0.013668206	0	0	0
Zm00001d043067	6.310983743	6.231848593	6.281148374	5.134622397	5.04777203	5.004382829	4.237304826	4.327942425	4.832714086	2.221591841	2.867490417	1.181076992	2.675438477	2.983547442	2.881545752
Zm00001d043068	0.168520603	0.053063081	0.095992372	1.541258295	1.739396502	1.88395477	0.845099232	0.355595604	0.66679639	0.038736282	0.212509887	0.085561427	0.377159932	0.338686705	0.478964002
Zm00001d043069	0.713149827	0.879103892	1.206883002	1.570659379	2.209246531	1.403506633	1.569115505	1.674053557	1.730953526	6.215206425	5.214054493	4.781991099	1.502687739	1.472074887	1.815650998
Zm00001d043070	44.10638229	43.04742428	47.91678603	52.31751665	72.47338022	60.37071177	68.69921179	86.64825904	71.27538445	73.21032682	73.7994203	51.5119492	93.08688331	97.17135703	101.7476232
Zm00001d043071	0	0	0	0.033000329	0	0.010805892	0.01545952	0.005317547	0.021755385	0.048657769	0.03336748	0	0.054285177	0.043510316	0.142762174
Zm00001d043072	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043074	1.347618389	2.129107366	1.006363604	1.518519238	2.235182346	1.31067571	2.631393375	2.594172169	2.398218403	1.442851159	1.930447439	1.165455386	1.422044183	1.179253515	1.56486423
Zm00001d043075	32.60079705	27.99577511	29.0013267	7.607970542	15.41701395	9.285828466	10.39017794	9.6122934	9.037852919	25.78687148	25.50456892	20.96697352	10.37061745	9.594938421	9.828926814
Zm00001d043076	0.593846219	0.788163957	0.761841372	2.229821377	12.08215679	4.067981649	10.59517444	10.28638643	10.07215367	8.410282877	7.085978903	4.512895686	1.450539747	1.658987458	1.963730038
Zm00001d043077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043078	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043080	1.046295138	0.803462273	1.436343488	2.127110222	5.289504085	2.691240872	2.370338946	3.018813678	2.314111161	0.077304294	0.353413858	0.035480763	1.170837856	0.854387137	0.935017778
Zm00001d043081	1.305541257	1.085880973	1.040868634	2.467922488	1.979901326	2.514884705	0.80593772	1.08905921	1.478451506	0.158539578	0.631610654	0.154627227	1.791722042	1.34116884	1.329017231
Zm00001d043082	0.931637177	1.15975628	0.686626892	2.337305381	2.069737851	2.362397401	1.012667952	1.188652977	0.961925876	0.194226237	0.874287903	0.300007379	1.333471055	1.140048434	1.553027493
Zm00001d043083	9.045046797	8.434099243	7.703094491	7.290124698	11.74284885	9.379210707	10.60529578	12.10771067	10.65129936	9.768862127	13.04891516	7.133417656	5.945588482	5.146017909	5.724151044
Zm00001d043084	0	0	0	0	0	0	0	0	0	4.443682221	0	0	0	0	0
Zm00001d043086	15.27404405	14.46252099	17.87548862	35.1369971	46.00049408	38.95097045	31.15462044	37.04548767	34.14041013	24.99312296	25.37329479	21.78023405	53.77255774	52.13114334	51.34658754
Zm00001d043087	5.220314674	6.359431693	4.121362617	15.82277112	12.91133991	20.52358445	27.72471702	19.99281232	16.96596555	5.13419417	11.76303749	2.417411575	17.97998569	15.57322812	20.13447735
Zm00001d043088	4.013990785	3.90923347	2.545203858	13.5765667	28.02821721	16.20272237	42.0216916	48.78371586	39.23247561	13.41935591	19.60432004	13.87393913	14.78927712	15.18644578	18.87857979
Zm00001d043089	1.593298528	0.472858512	1.377005104	0.513903312	6.853228664	2.041756228	4.686522829	7.231935383	5.11572111	1.351287841	3.37176186	1.785270973	0.502095738	0.271028761	0.465810938
Zm00001d043090	0	0	0	0	0	0	0	0.006990838	0	0	0.036556117	0	0	0	0
Zm00001d043091	4.169639928	3.760527203	2.85414992	3.098561215	3.393254859	2.543602399	2.673412188	3.49850571	2.968159168	12.52026372	12.97076411	10.04439498	2.717378305	2.455973689	2.822466441
Zm00001d043092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043093	0.796728015	0.674183945	1.094000194	2.274770883	3.194264215	2.596617746	2.839930841	2.898806352	3.272108797	3.80639535	3.12920027	4.303215954	1.480169744	1.738322832	1.754611479
Zm00001d043094	12.82783756	5.816574334	11.11380071	4.156175885	27.89900161	8.366826173	19.78030296	21.27584041	16.62278764	10.65161622	8.309232328	4.779855096	2.757132348	2.455106901	2.687864529
Zm00001d043095	7.338113711	8.327035171	9.248859163	18.27765782	10.48437082	19.48129616	10.21477271	6.835115689	10.14083765	0.068729838	0.251371051	0.009200712	4.568187849	4.529754637	5.05094602
Zm00001d043096	6.405086389	5.517680902	7.453356855	21.89204133	14.33146581	24.13355614	7.660861034	5.154789096	6.185260148	1.437554805	1.409668485	0.753035097	10.51458336	10.69782189	7.98149847
Zm00001d043097	22.95339274	23.61987704	20.35746054	19.72162508	18.92700112	28.32687324	21.790561	23.32124259	19.63164459	51.1196204	36.67774569	43.19984602	19.76356426	17.81851045	22.65256937
Zm00001d043098	10.16743026	11.25429442	12.43727492	26.55795918	48.68695283	26.41246993	39.06310334	40.89750731	38.15052997	7.921479098	15.75697395	3.650954638	20.61589237	20.10821018	24.80467406
Zm00001d043099	0	0	0	0	0	0	0	0	0	0	0.207292961	0	0	0	0
Zm00001d043100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043102	9.799734049	13.71422366	9.502735085	7.031308997	6.907968504	7.766854194	7.436074544	7.264804708	7.78862018	5.639779906	6.234830081	4.771147447	6.462396234	6.401478448	5.082104766
Zm00001d043103	2.151310922	1.631577502	1.293704296	1.355935676	1.706896708	1.558717881	1.40556941	1.199372314	1.14114538	0.510453753	1.283509377	0.999374836	1.527266387	1.039699416	0.962790583
Zm00001d043104	1187.498906	1101.991144	1207.353763	96.0376916	89.88546679	104.9607327	81.3908729	63.72162569	81.59427419	131.7583413	155.1434841	194.7872687	36.42738087	27.35406028	23.3300518
Zm00001d043105	29.55332745	35.59344784	8.205605328	1.763163883	2.278980724	1.418793371	0.966574293	0.79792457	1.46531729	0.684500793	1.118979109	1.216214734	0.336601755	0.494616723	1.025899793
Zm00001d043106	12.24539971	13.6624954	7.74829222	0.976287846	0.810439344	1.575582982	0.686035943	0.674208435	0.965422994	0	0.317298121	1.362683825	0.312853778	0.21453621	0.581809033
Zm00001d043107	2.003059888	1.349642605	2.167352351	4.681808944	3.119202582	3.904126599	1.694052894	1.663640398	1.977990198	0.608533702	1.130482923	0.395677765	2.170951987	1.666062712	2.040504427
Zm00001d043108	10.24419643	9.299173562	10.12404153	7.934237472	8.877215428	6.821766239	5.801842222	5.593715011	6.335937534	0.127283205	0.775871493	0.231732073	3.242851904	2.650695982	2.759970784
Zm00001d043109	18.52308792	18.57790938	14.87318367	10.98211492	9.461323642	10.45356673	14.03583326	11.88984423	12.36739819	9.512204965	9.571483257	9.705409559	10.21304282	10.14347227	10.82800762
Zm00001d043110	60.04806183	63.4003706	53.55328447	58.79401526	29.30060856	43.35643104	25.65185905	22.27472892	22.50705204	9.194827715	18.05238939	5.378414525	94.40397012	96.61909157	92.59567919
Zm00001d043112	2.608948595	3.556209062	2.94376606	6.29347137	7.610373704	6.960405194	6.758970561	7.398834464	6.932565638	2.343545089	3.116811676	1.30243505	3.918272628	4.355887346	4.653437452
Zm00001d043113	18.12162445	16.04800299	17.46419072	33.22597209	37.87528767	33.44224711	35.68960228	39.58460364	35.60049181	12.86420281	19.14259211	11.14301657	23.16101511	20.83461284	24.68666969
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Zm00001d043118	9.260715239	10.34868732	8.606319073	10.57281891	13.19809172	13.5508054	15.46107335	16.11991711	15.94538496	19.00648255	18.66063734	17.61008945	9.994027472	8.585452682	10.53191297
Zm00001d043119	4.822796806	4.417694853	5.316801965	13.63682198	22.82805506	14.04713414	12.41969831	19.41602354	15.54960294	3.866259317	6.483797466	1.928000777	6.33351039	4.893677289	8.862928633
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Zm00001d043124	0	0.028320674	0	0	0	0	0	0	0	0.103371083	0	0	0.008387363	0	0
Zm00001d043125	175.5059261	169.4261588	164.2268122	26.57106247	34.6420314	27.00857205	43.50981231	49.68800913	45.98588304	20.00086143	19.54833648	18.27967471	27.29912153	24.53693511	27.46879021
Zm00001d043126	0.582978694	0.321240422	0.388480279	0.672057475	0.704988907	0.481634463	0.914256344	0.823179276	0.972034486	5.271116113	4.384328024	6.279529409	0.454943547	0.428857468	0.498850851
Zm00001d043127	0	0.070627439	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043128	0.337561331	0.173928987	0.133484342	0.114815959	0.181958145	0.018798128	0.233078429	0.370020117	0.056769101	1.438981159	1.973587191	1.393758189	0	0.050460898	0.301569927
Zm00001d043129	3.930914588	4.235369989	3.642397562	6.768006367	8.143668723	6.847397531	6.222598701	5.735982656	7.128855694	5.637274923	7.680440094	3.892065201	3.857077109	3.594183388	2.949345764
Zm00001d043131	3.632816714	2.497904853	3.38177594	3.141591976	3.368696406	4.007355093	2.921489603	2.544343041	2.173481823	1.302795456	1.469744385	0.598694685	2.634779451	2.720204942	2.54283948
Zm00001d043132	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043133	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043134	2.417112166	2.18042123	2.527931165	2.710843692	2.312378169	2.692084661	2.251882967	1.929863068	2.102059687	1.543938277	1.838569398	0.796033481	2.173164972	1.826160608	1.974009978
Zm00001d043135	16.26769314	17.34436273	17.19356751	10.46452314	11.96900853	11.42141518	12.50811585	12.38850634	12.38624725	11.46781267	19.03767161	17.6809336	6.662199787	5.077118914	5.994514219
Zm00001d043136	0.560871135	0.883024088	0.174263074	1.530143451	2.032332509	1.159555302	1.433639213	2.57832864	1.556346738	2.17556371	2.475467735	2.407566913	1.25526562	2.113535304	1.013193081
Zm00001d043137	0.912464404	0.924685754	1.205703953	5.343302185	7.607693065	4.959850406	5.680350537	6.386359872	6.480300668	0.91851571	2.62532652	0.54605716	2.658321072	2.586919453	3.304245331
Zm00001d043138	0	0	0	0	0	0	0.032668378	0	0	0	0	0	0	0	0
Zm00001d043139	0.464087149	0.560164503	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043141	0.17527223	0.39245515	0.096812819	0.340031878	1.15473438	0.858929853	0.955759476	0.704461377	0.864637077	0	0.171907482	0.02157318	0.544820148	0.277534939	0.675462054
Zm00001d043142	0	0.092244481	0.060680892	0.121786928	0.160838003	0.059818329	0.028526495	0	0.030107898	0.033669438	0.061570945	0	0	0	0
Zm00001d043143	0.034263744	0.010788828	0	0.128196766	0.225737548	0.314833311	0.130120852	0.299528503	0.28523272	0	0.086415361	0.056933731	0.162954477	0.02817084	0.19806782
Zm00001d043144	57.81900157	49.61012594	39.04643661	49.78327905	37.23430115	36.65847788	26.72017539	25.30199307	19.35767432	18.26789377	22.33050384	19.25906995	77.84941257	68.79829309	74.95831818
Zm00001d043145	8.910812229	8.451701468	9.585163369	7.798245032	8.282067811	8.581427859	4.544236486	4.728591746	4.755848398	1.442286061	1.854487425	0.374084102	4.19338734	2.579416356	3.501207773
Zm00001d043146	24.71479788	24.38775448	25.189095	41.80614572	26.96630711	35.18668485	19.12041976	16.11881486	17.66491898	4.701050077	6.771976376	3.552006726	31.62522783	33.93200355	33.68295032
Zm00001d043147	9.047707491	10.79627781	11.23652566	11.94153479	8.92219695	11.2028532	7.949848302	9.389747803	8.82674073	8.842107634	9.99036367	8.006714349	17.24145117	15.69182022	17.79083174
Zm00001d043148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043149	26.87216871	28.30490602	25.8479083	20.88972918	28.56762133	17.37849884	26.71209174	33.06475877	28.80861373	20.74087297	30.43778155	17.19220907	17.93399719	16.98566704	19.24385852
Zm00001d043150	0	0	0.028002719	0	0	0	0.006582133	0	0	0	0	0.006239956	0	0	0
Zm00001d043151	0	0	0	0	0	0	0	0	0	0	0	0.01031633	0	0.010209051	0
Zm00001d043152	28.83174178	29.14795665	23.36962169	26.40449945	27.65111089	24.60397381	33.76020229	31.58662807	40.15481902	174.6276091	147.5821946	132.6499055	10.1743436	9.475643813	9.683842606
Zm00001d043153	3.063048613	2.986074494	1.720572127	3.323704003	4.617475832	3.67844864	3.801606767	5.769538679	3.169332677	5.155259829	7.627003381	3.939453863	5.093061497	3.708780189	4.551673729
Zm00001d043154	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043155	0.664512342	0.652825488	1.150695333	1.961377288	3.070411027	1.953884501	1.237195733	1.474301153	1.404124663	0.164964973	0.156421325	0.098148882	0.272657238	0.140835941	0.501934408
Zm00001d043156	1.497296518	1.177694397	1.511461467	0.396338325	6.683728545	0.643909416	11.35448849	6.978418965	4.959391297	27.84825286	20.04509959	16.18694443	2.892841548	2.130455955	2.974629808
Zm00001d043157	1.501155097	1.282982057	0.70627799	3.677487623	6.13177541	4.2299769	4.460425062	6.839408316	5.355663775	16.07471414	12.02058009	12.17488771	4.583565492	4.008257541	3.582650736
Zm00001d043158	0.213964946	0.127652988	0.181942707	2.176916254	9.815622704	3.649213715	2.500180412	2.871869688	2.0138067	0.372748972	0.482829815	0.249495429	0.252035416	0.728357756	1.406118372
Zm00001d043159	2.799511469	2.628272387	2.614767079	4.723068417	4.526094555	5.460301243	4.666017073	3.924363172	4.52223657	0.556645489	1.061247945	0.304409498	5.323741557	6.11901781	5.738542322
Zm00001d043160	0.734025982	0.808944886	0.63773008	1.093448628	1.132862454	0.967977435	1.260753351	1.421845759	1.194437125	0.695985706	0.891347709	0.506318196	1.062874634	0.912698792	1.225804963
Zm00001d043162	0	0	0	0	0	0	0	0	0	0	0	0.216348179	0	0	0
Zm00001d043163	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043164	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043165	0.131375221	0.268884812	0.051022972	1.961025545	1.168466357	1.755389524	1.703023158	1.03460625	0.931626976	0.2038366	0.248502553	0.045478596	4.947909332	4.487064877	4.433221763
Zm00001d043166	8.636638457	7.165173291	7.181438361	5.084987694	26.26302278	6.834658453	15.54830478	18.4940808	16.01952532	29.93034971	37.69320518	22.25497966	3.098245339	1.661015151	6.752306617
Zm00001d043167	25.46868285	28.55336817	35.23759643	83.51354628	31.39836275	58.2821469	18.09233112	11.44543291	16.57156092	0.442044204	0.652907405	0.054623526	60.68378749	56.69070307	52.96158489
Zm00001d043168	470.9494705	458.5190878	489.6792391	662.6308075	389.5057632	664.7258133	285.4662401	217.9490787	216.6953441	54.7855288	39.94344009	11.38546159	782.1716987	743.8107152	740.8467811
Zm00001d043169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043170	35.78328245	40.77579239	42.5214546	162.7863845	90.87729104	147.8254538	64.32084745	64.45877363	50.95940512	20.39710567	23.08504294	14.90461992	318.9687073	343.5318686	346.9980457
Zm00001d043171	0	0	0	0	0	0	0.046519618	0.614444588	2.013038273	33.38314029	11.17528787	8.238115276	0	0	0.036821927
Zm00001d043172	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043174	22.82883416	29.30594343	31.62835454	52.04023252	147.6358903	63.72738032	162.5137075	192.9658625	167.0730024	256.125597	230.5453441	151.2005641	31.50288417	29.17667857	52.73098066
Zm00001d043175	54.6352221	55.74771891	68.39508829	112.5517881	206.4060411	107.1132378	163.2918788	254.1394371	205.0840542	79.23622785	142.7042851	83.04623183	150.5562732	135.2816306	191.2407468
Zm00001d043176	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043178	12.67277302	7.577636484	13.20434391	36.63870776	122.5043432	56.99096084	93.06688716	116.3014284	131.9312312	46.21918558	89.54075733	43.23519831	12.03256722	11.534851	15.79101262
Zm00001d043179	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043180	0	0.039997607	0	0.297041287	0.1255321	1.167186908	0.333968717	0	0.117494237	0	0.020023072	0	0	0	0
Zm00001d043181	4.985090822	7.864280826	6.132904885	4.741391626	8.592244548	5.706426234	3.971644545	4.21976257	3.322403795	4.757125804	4.127407726	2.035983782	4.958645958	4.278024748	5.617903737
Zm00001d043182	25.58050107	26.55720297	28.99467751	58.15623663	48.92321253	48.2312312	37.86804182	37.86292625	41.78172028	24.54102492	24.4261969	21.25751991	57.21176068	55.96974275	49.17214354
Zm00001d043183	24.72843845	30.28285062	32.13977715	25.34861658	21.14509925	20.92785222	24.63195718	30.33937956	24.06661605	6.516310117	11.66951979	5.172004519	29.28311362	31.30696271	37.81758716
Zm00001d043185	11.48795942	9.3707073	11.91325202	15.97503923	25.59473898	16.99020943	15.60256522	17.89669885	16.20172244	0.969236745	2.942238712	0.560518242	3.271519891	4.067722504	5.914992042
Zm00001d043186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043187	3.119766291	4.494872614	2.722737192	2.674347145	2.825502946	3.167729407	2.161939995	2.520264429	2.453640266	1.377282122	1.552173538	0.788948059	1.412040548	1.510569554	1.315659329
Zm00001d043188	6.619573441	6.574119915	6.798407899	17.53516208	17.86582843	16.75971945	14.55103669	13.96276292	12.70393439	3.670862661	5.764784047	2.766576268	9.999178531	7.692384323	9.441524908
Zm00001d043190	1.439968876	2.603115619	1.115866713	8.979333583	3.348300433	8.426453094	4.493541496	0.612802834	3.698010991	0.046728341	0	0	4.853071542	4.624206677	5.85618068
Zm00001d043191	0.47815165	0.974020949	0.360793598	6.069787459	2.250124809	4.988276505	3.323815111	1.097194824	2.611500207	0.137946164	0.126130344	0.108096877	3.2022125	2.976517647	2.340975021
Zm00001d043192	0	0	0	0	0	0	0	0	0	0.204204536	0	0	0	0	0
Zm00001d043193	2.354721141	2.808768109	2.375592367	9.967525861	12.62977566	13.76245812	44.84931427	42.23813379	38.58935719	12.49351075	8.995471387	8.868740946	8.52502772	8.609488104	12.49091531
Zm00001d043194	4.464656735	4.047308533	5.230610846	5.692256405	7.334815136	6.297255608	5.632313807	6.86635537	6.277723798	1.598204022	4.043254772	0.992298979	3.548181584	3.070636172	3.674049919
Zm00001d043195	32.77008397	36.29713051	34.14123365	32.75029864	31.22002786	29.78860045	35.19594475	35.47887493	32.88062557	6.337162508	11.68416071	5.433861235	23.33748868	26.67931381	24.69767534
Zm00001d043196	0	0	0	0	0.012389172	0	0.076907743	0.045349096	0.057979446	0	0	0.010415662	0.22095567	0.432908694	0.010870572
Zm00001d043197	5.984962405	5.567466874	8.589717377	6.820067954	3.622786662	6.885754322	2.449474999	1.849915576	2.828804302	0.712295674	0.172398646	0.084135403	1.410866254	1.482036574	1.650829261
Zm00001d043198	0.455707797	0.6696266	0.640520527	1.082550469	0.586165166	0.977032708	0.652939764	0.739181259	0.501798303	0.336694384	0.451520263	0.144232119	0.898486255	0.785027399	0.413961745
Zm00001d043199	1.139269493	1.044840395	1.113464911	2.289909548	4.794950431	1.531271789	3.050211586	4.334489299	3.096533997	0.152547617	0.474235757	0.1715382	0.618873372	0.582015017	0.8312118
Zm00001d043200	1.401694328	0.98959596	1.218639707	2.602600645	3.312893118	1.50934708	3.261070163	4.479208354	4.511616636	0	0.221938487	0.02785172	0.372792247	0.461665016	0.370619042
Zm00001d043201	3.470188687	4.873760105	5.557765222	31.20965005	16.11584465	27.66655016	9.464019782	8.021142991	8.010315905	0.26187341	0.495398407	0.159567143	74.81489054	79.17641148	71.32296998
Zm00001d043202	0	0	0	0.026766358	0	0	0.005015647	0.041405077	0	0	0.048715473	0.01901962	0.019213249	0	0
Zm00001d043204	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043205	14.45627676	13.84270114	10.54181771	11.03246287	30.04832337	16.86642298	19.73362211	22.81034099	22.64586226	118.7276823	138.4984079	108.2589318	13.99153079	18.36628272	24.7934307
Zm00001d043206	0.099741493	0.033499941	0.115695086	0.663430735	0.683405055	0.488787903	1.219868386	1.098425235	1.213688037	2.916271199	1.702185073	4.78049502	0.773856602	0.553989975	0.553510928
Zm00001d043207	25.14065857	28.61424689	23.38391035	30.74272945	42.23893252	34.58953276	35.71533824	38.43543336	39.26281519	67.1929594	61.28607789	72.772812	22.86942795	21.52582116	23.2458832
Zm00001d043209	1.310159917	1.434914143	3.114952455	0.994593243	0.750577347	1.535337112	0.998427309	0.618164858	0.983524675	3.063918891	25.50063302	3.786093129	0.509951658	0.312226806	0.263430201
Zm00001d043211	0	0	0.050193943	0	0.008869452	0.049480449	0.094386038	0.097396728	0.149427678	0.575579961	0.067906901	0.067109479	0.045195125	0.051653475	0.124516491
Zm00001d043214	0.139147419	0.262885034	0	0	0.045836785	0	0	0	0	0	0	0	0.428203682	0.152538287	0
Zm00001d043215	0	0.078895623	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043216	0	0	0	0	0.007376682	0	0	0	0.00690435	0.061768667	0.007059732	0.049613014	0	0	0.038834919
Zm00001d043217	73.0587566	64.50241049	66.77892531	71.54142401	117.7306169	72.02856098	84.60403487	102.303742	84.54682358	115.4006562	106.7920784	100.7793149	78.49110791	65.99450543	78.2032124
Zm00001d043218	6.138840539	6.158278271	5.994504286	3.977873554	3.015500554	3.753100786	2.61100147	2.498733171	2.681666575	0.107694864	0.568097471	0.126424902	3.125582439	2.541712771	2.708377288
Zm00001d043220	142.0164791	105.1486265	119.3523512	11.18043927	21.26225665	16.56608151	3.797297307	6.215428085	3.224671065	144.8117025	33.34924624	101.7900448	9.739240685	6.797331126	7.384682688
Zm00001d043221	13.57785118	9.385749884	13.55538177	3.167791126	8.687009952	5.102536156	3.644532473	7.228813099	3.984772101	25.65500812	17.61669222	19.46838051	1.191280513	0.675638335	1.856966992
Zm00001d043222	0	0	0	0	0	0	0	0	0	0	0.101581694	0.025495577	0	0	0.039913667
Zm00001d043223	12.28641563	10.5813815	16.77073701	21.94357824	33.99012959	17.35236481	19.06732086	24.23029991	21.01622787	3.066438889	7.004604517	1.389157411	8.540327151	8.906107121	14.15140518
Zm00001d043224	9.401762609	9.199688932	12.23918405	18.18190042	32.46022425	20.15727981	22.77153036	26.38579635	22.12586521	10.8123228	12.02475865	4.235150964	18.92758548	13.06256392	24.35367779
Zm00001d043225	5.678998185	4.282890944	6.166657145	16.44432629	16.04787709	13.30578264	9.893046232	9.316054719	10.8266168	0.398791994	0.743852025	0.140937477	5.008916033	4.425062147	7.474999109
Zm00001d043226	0	0	0	0	0	0	0	0	0	0	0	0.063498417	0	0	0
Zm00001d043227	0	0	0.017231896	0.069169046	0.027404447	0.025480424	0	0.016718455	0.042749551	0	0.008742325	0.015359404	0	0	0
Zm00001d043228	2.503544712	2.808844434	3.175127673	7.747170942	6.259815075	8.479248144	5.091979277	4.265337523	5.058126898	0.271038979	0.915867806	0.198769889	4.838166357	3.550018787	4.939316272
Zm00001d043229	26.70180751	21.49849608	27.32722078	20.93104537	27.90263437	20.74369503	19.93178401	24.09894578	20.74043665	1.435811363	4.010612848	1.432062003	7.719686608	7.299052769	10.67388313
Zm00001d043230	0.395448915	0.268799344	0.436857845	2.246739558	1.712060726	2.237831704	1.078191474	0.809839484	1.137962434	0.216424305	0.387857376	0.034766695	1.770080136	1.892283674	1.371578733
Zm00001d043231	0.029634178	0	0	0	0	0.06050987	0	0.029776727	0.024364773	0	0	0	0	0	0.022840769
Zm00001d043232	0.090738278	0	0	0.018860807	0.019926832	0	0	0	0	0	0	0.033505249	0	0	0
Zm00001d043233	6.91332291	6.320567907	5.856696286	10.74779686	11.68555623	9.096246679	9.566156486	11.14071956	11.87092488	4.839904598	8.05412082	2.804513429	5.121956699	4.847243883	5.199051495
Zm00001d043234	0	0.017014792	0.01678918	0.421199849	0.035600507	0.496515775	0.252566592	0.35835644	0.366530935	0.03726262	0.289602468	0.224471925	0.453514321	1.095879067	1.124524179
Zm00001d043235	0.82946814	1.321631447	1.52766807	0.012463574	0.079008142	0.146922212	0.256905273	0.13254997	0.135573577	0.055131244	0.01260224	0.022140895	0.055915752	0.076687286	0.231079124
Zm00001d043236	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043237	0	0	0	0	0	0	0	0	0	0	0	0	0.01433791	0	0.029626639
Zm00001d043238	1.774809835	0.673419782	1.735058204	2.278295379	9.080314326	2.656570659	10.8639304	11.03138303	9.67116061	7.722207309	4.204616619	4.359868242	1.146767987	0.985015367	1.983238777
Zm00001d043239	27.04037519	28.19873213	23.8635304	19.29917764	16.69378794	23.16554149	25.00143027	20.77368444	24.85534285	75.90419965	62.9886732	105.5632766	15.72628823	16.05134427	16.25129719
Zm00001d043240	12.56676665	11.15472766	11.80466249	13.87344043	9.373026482	11.63263381	7.763585237	6.300776542	5.699597675	1.237634493	2.328535105	0.990253088	20.13414285	18.85373805	16.40436592
Zm00001d043242	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043243	8.011801331	9.39828682	4.916847248	1.7907441	1.600113495	1.506486186	1.552861245	1.804995341	1.836749991	7.341818538	5.932824906	3.934152637	1.350374782	1.038197738	1.227378703
Zm00001d043244	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043246	0	0	0	0	0	0	0.51997661	0.05961807	0	0.034095634	0.187050972	0.082157536	0	0	0
Zm00001d043247	0	0	0	0	0.010735314	0	0.180883136	0.009823836	0.050239639	0.235966982	0	0.054151511	0.009117133	0	0
Zm00001d043248	2.487413896	2.043200222	2.545830257	2.570616586	2.900323076	2.618756816	3.516099524	3.198693916	2.267409142	8.238593518	8.287007962	5.990096155	12.01672963	12.47628679	13.46693434
Zm00001d043249	15.3852803	13.0912528	12.47457936	15.15190624	35.35919442	17.06832322	35.6509651	43.93083327	39.08168259	39.07140764	54.74564821	32.41533696	20.20881646	19.33112968	29.36044529
Zm00001d043251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043252	13.29049816	12.90534695	10.28946389	3.332653113	2.787084528	2.893738662	1.305833758	0.990424012	1.095623155	0.96024752	2.338362241	1.29262179	9.627671648	9.582255175	9.353877952
Zm00001d043253	5.410721719	4.745941195	4.913410857	8.898779931	11.65134637	8.762790985	11.80354556	8.634683737	7.513017247	20.71004924	7.073183166	11.63408749	9.615266364	8.918402775	7.097911191
Zm00001d043254	1.061185787	1.805787905	1.136451388	7.546565697	5.384819151	5.324868598	7.954439868	7.350597821	6.306995555	6.181163945	2.932627666	1.425646958	7.47872952	5.84129688	6.499830231
Zm00001d043256	0.087170461	0.085393403	0.024074601	0.579814491	2.373770654	0.43904916	1.177033682	1.862742613	1.839536055	1.061964857	0.366415825	0.118022032	0.422701693	0.127412427	0.111978832
Zm00001d043257	0.808673174	1.045189862	0.673522195	1.943159653	2.822858874	2.401625326	2.201549223	2.843545586	3.096386137	4.11665973	5.056101504	6.523946165	0.710678991	0.802951811	0.69997867
Zm00001d043258	0.145438659	0.549541587	1.506263276	0.725539144	4.024372159	1.187881712	1.869395813	0.759918975	1.793662021	2.005838881	3.301250664	2.040731048	0.434001411	0.212579953	0.168146937
Zm00001d043259	2.568035726	1.810537889	3.303220517	6.265423874	5.435725541	5.099954801	6.298949947	6.292236675	5.466248857	1.270071695	2.549158509	0.78790547	3.837204701	3.717995441	4.50110749
Zm00001d043260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043261	1.408867618	1.336332255	0.756581096	7.614007163	9.190275303	6.605891809	8.536172415	10.98959748	7.808134822	1.727165083	0.965081478	0.539494186	6.831795115	7.989192782	10.5774264
Zm00001d043262	0	0	0	0	0	0.238704971	0	0.039155335	0	0	0	0	0	0	0
Zm00001d043263	0.154194682	0.162715458	0.170916458	0.129935756	0.126297423	0.191462416	0.189915757	0.296472909	0.192734602	0.339106308	0.451951944	0.371626882	0.249496239	0.194160245	0.086725992
Zm00001d043264	9.555163493	12.70130454	9.536687283	2.823361465	3.912687074	2.845551481	2.782713533	2.30427044	4.387335876	5.068517604	9.009219555	4.852712913	2.697808772	1.289194555	2.141432603
Zm00001d043265	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043266	3.623641158	2.60799397	5.471565176	4.036580069	3.462454174	4.895482003	1.780102639	1.539653308	1.869664649	0.190384707	0.142992025	0.360450265	0.52135339	0.562075808	0.706787125
Zm00001d043267	13.067025	11.74989212	11.41387196	13.071462	45.33717171	18.84153992	46.0512094	54.9803669	47.37212542	61.44226089	58.10962015	55.0623326	14.18068282	15.36663692	19.15884233
Zm00001d043268	0	0	0.046549725	0.023356397	0	0	0.021883338	0	0	0.232457492	0.047232506	0.207457158	0.08382767	0.143709872	0.173214379
Zm00001d043269	36.28626573	39.18522547	36.54842261	25.97362328	30.16338872	29.16749179	29.66044493	29.86192026	34.4299292	42.23259397	34.85567636	44.60748976	26.06949131	24.55795141	24.71812355
Zm00001d043270	0.663510553	0.808143645	0.733996069	3.337286586	4.58272505	4.600428293	5.10342791	6.048674455	4.846809597	4.354221555	4.321459388	2.673486561	5.442204096	5.083551968	7.822823253
Zm00001d043271	0	0	0.032649212	0.026210868	0.33230788	0.064370223	0.460458405	1.374755565	1.658827166	0.188403929	0.152389272	0.07566366	0.029397674	0.097915862	0.309798776
Zm00001d043272	25.54336809	27.66425605	24.54736379	32.19254455	44.31839671	33.53362486	45.67611718	53.67579263	47.95906386	39.8195013	34.03083754	30.44860822	26.5921308	22.61216403	23.12475953
Zm00001d043273	0.080513745	0.10140736	0.020012544	0	0.021217734	0	0.206976686	0	0.019859155	0	0.081224333	0	0.270292398	0.070609596	0.130318827
Zm00001d043274	10.54638045	7.718233836	11.47132689	7.649631086	16.54067346	9.51891671	13.92754418	12.0271247	11.41831131	5.586198992	5.643110953	2.527197567	7.934341017	7.496546225	9.931809447
Zm00001d043275	15.00426172	16.96130854	15.48158481	14.13668953	16.95302424	14.94890361	21.9175277	21.05971135	20.5417736	83.2041978	66.41855471	111.96845	13.56561668	13.098756	12.3801598
Zm00001d043276	0	0.071646199	0	0	0	0	0	0	0	0	0	0	0.021218516	0.103931253	0.284986903
Zm00001d043277	0	0.00817033	0	0.042473733	0.083338125	0.091395027	0.034109972	0.052796999	0.032000803	0.006709924	0.016360488	0	0.083479631	0.072889959	0.07687287
Zm00001d043278	0.531762152	0.241423818	0.330437784	0.462691177	0.822885341	0.6287553	0.455185313	0.253491394	0.366033606	27.17798283	5.528296693	23.95975353	0.906426964	1.091311062	1.52982532
Zm00001d043280	24.39756368	24.92517242	24.6650999	6.256115794	5.260478628	6.540684533	2.692157342	2.504704572	2.426879067	1.75181183	2.348426379	1.891964205	3.013350707	3.014086562	2.860228428
Zm00001d043281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043282	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043283	0.295688265	0.657212584	0.453948658	0.737539155	0.550041415	2.109623513	1.260101642	0.755010514	0.986742313	0.359826059	0.13160202	0.828508929	1.498712888	0.724556863	1.447860648
Zm00001d043284	0.135024533	1.10541534	0.167808886	0.294694294	0.578222549	1.157964691	0.591660628	0.773342045	0.832613481	0.372442182	0.383108102	0.14957405	1.057677513	0.777097829	1.014694108
Zm00001d043286	0.252586308	0.782077916	0.177885171	0.559151068	0.404930412	1.028930519	0.870683954	0.675111531	0.713874723	0.862186449	0.414075269	0.300788923	0.923330485	0.955284233	1.372513935
Zm00001d043287	0.095719446	0.068142041	0.077582876	0.570934151	0.383856908	0.412992299	0.437666766	0.33621143	0.369543518	0.045917529	0.047232506	0.069152386	0.442423813	0.460784035	0.490774073
Zm00001d043288	10.64587199	10.26221213	10.3707592	7.776526116	9.163820977	8.282276147	6.783484797	7.319236006	8.382261485	2.402942214	4.253276224	1.36477015	3.725384492	3.726742711	3.823624285
Zm00001d043289	1.871169741	13.77222984	0.087206072	5.892445367	1.618011048	0.90264784	1.393869434	0.803772955	0.230767124	0.580646602	2.610313114	6.749544979	2.565026305	0.243584985	1.987557206
Zm00001d043290	1.555409847	0.220944864	0.813923342	6.286247409	1.802926596	1.045925274	1.421200208	0.987089594	0	1.112905987	3.229709447	7.190014325	3.21936975	0.205124198	2.420222721
Zm00001d043291	2.462259922	3.991601655	2.203870433	2.898977176	2.510256929	3.332211214	2.233116997	3.799646106	2.08354044	26.22498095	4.714143514	8.839747673	10.63926312	10.98075134	13.9495642
Zm00001d043292	4.914865087	4.891752759	4.958531566	6.402620613	8.951100098	6.384741485	8.870325268	8.625358149	8.630516109	15.82602733	15.4054575	15.44945027	2.805260929	2.864229379	3.159529582
Zm00001d043293	5.262450532	3.445547402	4.550448967	1.840446037	1.944469217	1.807951127	2.407612901	1.905273902	1.364973145	16.05161331	8.172257599	6.500359486	1.40210741	1.938222618	3.887070891
Zm00001d043294	9.666978758	9.950062083	9.136840354	5.351386518	4.575878832	5.625090174	4.820414365	4.496049449	4.720437987	9.118503544	7.944444008	13.17002474	6.056519286	6.515772438	6.073961569
Zm00001d043295	5.53860246	6.964372588	4.511898297	4.094321732	8.711717811	6.016243449	9.364068302	9.302565629	8.890724723	6.797848346	8.725639375	4.399803208	4.881209517	4.718279603	3.978765179
Zm00001d043296	9.675767669	11.69611195	7.576176412	12.10540231	10.50039449	13.10871577	32.37921497	29.43868327	31.79949177	12.50554505	10.4796744	7.286168979	31.97318543	34.86705907	35.02677239
Zm00001d043298	0.758261739	0.907754581	0.522502134	7.864987756	1.77071954	6.990302264	7.500541236	1.158705501	2.249908176	0.176020348	0.29348479	0.008316514	19.60835536	21.66144195	22.79300521
Zm00001d043299	1198.463967	1355.499878	1387.890468	2184.276682	1039.837105	2132.855953	1418.832165	1184.812908	1023.334705	54.71007756	52.85007666	18.37186174	4811.952486	4884.630641	4371.331706
Zm00001d043300	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043301	0.132155261	0.068875879	0.226541997	1.48904817	3.482678891	1.574418421	2.822221194	2.895758937	2.231195976	1.439256259	0.907966201	1.050009828	0.887315885	1.014112667	1.311882402
Zm00001d043302	0.007658955	0.086818335	0.038074285	0.038207664	0	0	0	0	0	0.073940727	0.019316375	0.042421212	0	0	0.008854797
Zm00001d043303	15.24306028	14.19567467	14.76460206	19.54235158	23.23980128	18.8539696	22.27507344	23.77161595	25.94431399	37.67616155	28.9943177	36.34919357	12.97377013	12.46235766	14.01674065
Zm00001d043304	0	0	0	0	0	0	0	0	0	0.077592121	0.212837834	0.062322521	0	0	0.130088988
Zm00001d043305	2.991598588	2.599715327	2.9347311	5.121423778	5.119126235	4.843191114	5.798997895	5.724448842	5.944783869	4.851999074	5.231124387	4.797690557	3.299177564	3.420384721	3.177632396
Zm00001d043307	1.870642059	2.204482916	1.807515932	3.071032067	2.755604582	3.637375724	3.19965553	2.872372783	2.690493031	3.389176041	2.498072821	3.805537481	1.767807472	1.632833951	1.890203498
Zm00001d043309	7.783631628	7.684579271	7.694663904	4.154584283	4.898222115	4.420282212	4.483663397	4.482340297	4.351230527	4.010280229	3.061329875	1.507165215	3.504507253	3.466978686	3.257595577
Zm00001d043311	0	0	0	0	0	0.032777167	0	0.016129546	0	0	0	0	0.089815361	0.029328545	0.030931139
Zm00001d043312	6.839363873	7.113482645	6.711818888	11.80396377	11.4211733	11.73632774	9.387004499	8.379241787	10.68679104	3.307270248	5.468372905	2.761572039	8.984019529	9.099474603	8.845825391
Zm00001d043314	12.28610384	12.00268608	17.07672194	20.81606354	25.16829572	19.90550354	26.96461839	29.57838472	25.86289809	12.99019466	15.00409693	8.684614836	15.20554944	14.2124883	15.51756018
Zm00001d043316	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043317	2.258145229	3.264458863	2.529934016	6.908856471	8.501250343	6.064575916	4.354410397	3.675121697	3.608048208	0.015341648	0.140275546	0.073935098	1.095420974	1.085299362	2.585002625
Zm00001d043318	0	0.102493867	0	0.025372277	0.241257004	1.071745062	0.380353261	0.220773164	0.025089915	0	0	0	0.136594194	0.289924891	0.141123322
Zm00001d043320	2.208604046	2.392490554	2.139054417	3.049037916	3.188263857	2.779721801	2.213752446	2.111675091	2.302388216	0.814353628	1.390976025	0.751512696	1.985071884	2.038282698	1.629674797
Zm00001d043321	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043324	4.693110152	4.625991863	3.874318974	4.213060221	4.824606629	3.833134718	4.583162176	4.114264729	3.99840877	0.73480897	1.415212764	0.879026597	2.004287612	1.98831001	2.804679754
Zm00001d043325	3.03059664	4.366364508	3.384231669	18.22868879	8.929568046	14.47481235	7.677068881	6.721858093	7.723383948	2.74533302	4.28705017	10.54841161	17.16941534	20.16027417	21.28128153
Zm00001d043327	0.114947315	0.305289721	0.248446716	0.280481683	0.296334686	0.333696838	0.592742076	0.638766587	0.992333432	0.155084966	0.264695417	0.058130474	0.137018632	0.098615961	0.349571058
Zm00001d043328	9.55874892	10.15939212	10.67589027	12.65395884	11.60125823	13.87007109	8.293556464	9.218625763	8.087519973	1.948995131	3.934533554	1.512678323	5.819134775	6.414248256	9.013535106
Zm00001d043329	31.90115127	32.14187459	27.76506214	7.628576979	9.125920522	8.405544734	9.854479301	10.13687286	9.990921782	6.662480233	7.582868039	4.406993728	10.63918873	11.0164309	11.33441271
Zm00001d043330	0.873054126	1.002149035	1.025850551	1.59365884	1.895507379	1.655465745	1.277523245	1.222572782	1.18194257	0.071150511	0.055047463	0.063742642	0.466283809	0.487236955	0.543683231
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Zm00001d043333	0	0	0	0	0	0	0	0.026891348	0	0.876613762	0.337485114	1.136445572	0	0.024448429	0.141813975
Zm00001d043334	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043335	3.583957989	4.535921011	3.048716742	6.669918838	5.698962438	5.196536542	8.261865278	7.703067312	7.544063025	3.354432414	3.992943947	2.594085697	11.93824218	11.76369524	12.20133062
Zm00001d043336	0	0.033421913	0	0.2779919	0.328668963	0.325099614	0.272862122	0.140782887	0.24871742	0.029277772	0.120464892	0	0.742359751	0.546881735	0.889690509
Zm00001d043337	2.942134104	2.13018182	3.262379915	7.580294601	10.56224823	6.280924551	6.278769677	6.585261379	5.366655257	0.461653124	1.199681298	0.09757972	2.898050016	2.163055812	4.073662904
Zm00001d043338	27.08788248	17.21896971	26.32443314	13.90684248	40.08670077	16.18770871	14.04119747	22.50104736	20.031564	156.4569269	93.26220969	103.4442428	3.361692495	0.641896451	6.53424633
Zm00001d043339	3.830836695	2.627063355	2.040417909	4.120886982	8.911688743	4.528843886	9.929977952	9.848306204	9.881939761	36.41385362	18.68520066	37.06024694	3.581986723	3.497694856	5.51532113
Zm00001d043340	0	0	0	0	0	0	0	0	0	0.95692088	0	0	0	0	0
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Zm00001d043342	0	0	0	0	0	0	0	0	0.401438643	0.224462922	0	0	0	0	0
Zm00001d043344	0.012462383	0	0	0.217595605	3.070730295	0.396971227	17.72231228	12.48726824	10.65111498	414.360601	71.99254297	82.65210414	0.083674839	0.027323403	15.51764777
Zm00001d043346	0	0	0	0	0.027671054	0.102913254	0.02453892	0.202573225	0	0	0	0	0	0	0
Zm00001d043347	7.361100274	6.629398864	6.824267948	7.718384085	7.195263584	8.636063851	7.327813937	5.857983252	7.557659887	3.341220791	3.801022608	3.411024464	3.365729441	3.439691225	3.236821872
Zm00001d043348	6.712891435	7.596171306	7.640708269	35.34423931	25.52433562	33.89205264	14.50209265	10.23169421	11.39003497	1.883339231	1.832564687	0.822172404	6.618181394	6.207876836	6.871406757
Zm00001d043350	0	0	0	0	0.007999048	0	1.326507331	0.043919351	0.097329262	388.383849	87.45480149	512.2590728	0	0	0
Zm00001d043352	1.806370261	1.816830454	1.970398546	6.045354912	5.616487525	5.827169545	5.800748778	7.208005954	3.750322225	1.039527907	3.244765387	1.151663309	5.700600285	5.513236837	7.422120876
Zm00001d043353	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043354	5.676447563	4.787224476	5.36677001	8.252083679	8.561170439	9.337580215	8.719889164	8.260194178	8.154112867	2.408320526	5.815631174	2.336686298	6.157276571	4.832016599	6.712293553
Zm00001d043355	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043356	1.881019894	2.045818184	1.95488186	6.327598042	9.827976243	7.153692148	9.822697625	12.69112785	11.4954813	6.089696712	6.215533287	2.125072415	8.362232209	8.038374532	8.536973265
Zm00001d043357	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043358	5.296738606	4.885483396	4.51985666	5.50608353	5.900828992	4.568587054	5.098208925	5.608308496	6.134293864	1.279779327	1.824285839	0.836388195	4.314810194	4.523866305	4.317945287
Zm00001d043359	0	0.233319373	0	0.18482569	0	0	0	0	0	0.204389003	0.467205002	0	0.041459484	0.243689215	0.042834179
Zm00001d043360	1.268591976	1.42715785	1.653144301	2.227274445	1.817614332	2.12759246	2.33146269	2.450383223	1.898696283	0.271782133	0.605724972	0.150079367	2.356803609	2.389800852	2.648541482
Zm00001d043361	0.327881523	0.03591026	0.194887536	1.760132241	1.502720028	2.235546312	3.248272372	1.271997206	1.476825372	0.078643944	0.161792264	0	6.939383878	5.61031525	5.883915442
Zm00001d043362	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043363	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043365	8.111012404	5.467972459	6.972725291	9.269462764	14.32995648	7.751091939	7.657056497	9.189141829	8.840874374	7.581812868	10.06979222	9.131165781	6.383769838	5.888689397	5.919915825
Zm00001d043366	0.432228707	0.725858208	0.457593612	2.655354327	0.885927361	2.667309099	0.318000267	0.096512858	0.414600565	0.176626562	0.04037439	0.301468774	17.98564865	20.46218957	18.1563251
Zm00001d043367	5.778903227	8.65107657	8.413244445	8.319165017	11.96572582	8.819591318	10.45695849	15.56859643	18.89670596	37.43651176	25.02695317	15.72966227	8.27747619	10.3894601	9.010076445
Zm00001d043368	39.44118894	38.70226174	53.08580945	41.36467272	48.90381419	55.43726834	41.69957438	55.85733791	26.41862054	9.20614127	12.68708344	3.821643299	44.97989098	32.80580246	53.27968575
Zm00001d043370	3.404509614	2.612995404	3.619603401	13.60033006	23.62128243	13.01805114	13.70603715	14.80067871	15.7451421	0.330143909	2.045976147	0.353565117	6.131325384	4.883858992	8.05665907
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Zm00001d043375	0	0	0	0.007400247	0.172007309	0	1.539242102	1.294998141	1.580664656	23.60952458	18.78875866	45.7814907	0	0	0.32242759
Zm00001d043376	7.722762019	8.83957876	7.987336792	6.953164839	7.806812568	6.775653531	8.428177771	9.093199917	8.658755974	19.41317281	20.55127099	22.61318918	8.233155304	7.803208841	8.396742693
Zm00001d043378	0.599207274	0.593504913	0.542254779	1.603441508	0.965849318	1.004947928	0.672982493	0.701463669	0.839433826	0.096280266	0.491519543	0.070888552	1.06113345	1.014006377	0.874364072
Zm00001d043379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.084297664
Zm00001d043380	2.787338955	3.343489264	2.804281999	26.73400424	12.13749155	19.7574714	10.77913755	10.45078712	7.759068446	3.130277105	1.439445004	0.602834246	65.85802871	60.74781744	69.86782752
Zm00001d043381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043383	0	0	0	0	0	0	0	0	0	0	0	0	0	0.007386341	0
Zm00001d043384	0.153337334	0.304940432	0.330986684	4.398420449	4.77462898	2.84755021	3.885261406	3.191783921	4.349471575	0.4674765	1.007524553	0.20562017	2.167445064	2.432936152	2.155338009
Zm00001d043385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043386	114.9805009	88.96860274	145.6640247	7.230578201	11.43423986	4.765826928	6.905675069	7.915216245	7.08091636	25.58693078	41.41340931	26.31101654	3.767084753	4.141383192	3.935236384
Zm00001d043387	13.44221372	13.76556071	13.58303224	12.12315476	15.23088737	10.66208132	13.46970896	15.15736014	13.06310111	11.88849224	12.25803308	9.478446269	8.585412281	8.110632495	8.825953691
Zm00001d043388	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043389	50.03596429	63.73859687	50.32565049	45.75102873	32.9978844	39.7926219	19.63543203	22.12021638	20.63122337	14.9663894	16.92382673	16.07441189	25.00913242	25.97635449	26.90320166
Zm00001d043390	135.7948067	152.5438927	111.3514731	4.558155037	9.490521624	4.496411312	11.77563484	13.29446273	11.6363322	36.12798528	35.4439274	29.94994475	1.36899774	0.586734938	1.379030583
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Zm00001d043392	2.093529411	2.272385401	1.950086785	2.524216238	2.375453582	2.259803542	2.626713116	2.603152517	2.549306936	0.918955041	1.603300389	0.699587416	1.827482438	1.796352516	2.098757097
Zm00001d043393	0.005005944	0.157625135	0	0.006243197	0.013192132	0.042930767	0.245676731	0.247477204	0.870494193	9.430894754	10.72520319	14.99464785	0.050416312	0	0
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Zm00001d043399	1.35109347	1.644022234	1.024561794	0.314157234	1.05608873	0	0.428136334	1.021645997	2.033417849	6.000717324	11.92640548	7.077520823	1.306911285	2.610780932	1.085491281
Zm00001d043400	0.429549344	0.187275804	0.256656341	1.09203505	0.304766149	0.485775434	1.196906212	1.832706287	1.41607178	8.077410157	1.010433151	0.512437982	0.295802775	0.706330612	1.461201962
Zm00001d043401	14.69185138	16.48894888	14.10145632	16.02087392	11.05735329	15.39839567	15.31228611	14.87393908	13.13092851	14.89275287	16.42156686	17.51722351	17.7449077	16.1402554	15.05558228
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Zm00001d043403	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043405	8.382773062	12.82565234	11.83984921	30.1593883	11.28028178	24.12426439	8.491425675	6.433210872	5.539192465	0.258640404	0.496621613	0.259677169	52.30676988	52.65968488	49.74819725
Zm00001d043406	0.112520444	0	0.079908994	0.090212539	0.052950783	0.137852939	0.009391439	0.116292037	0.089208587	0.022169178	0.050675675	0.09793539	0.395729682	0.387667851	0.306638329
Zm00001d043407	9.398253479	10.69113789	10.5064338	13.96907347	14.88760999	12.20555964	14.05031994	16.91490699	13.84912588	5.66281944	9.309817351	3.374630607	16.00096841	14.54498187	16.39170569
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Zm00001d043445	0.74783509	0.682241851	0.452146209	4.587715729	4.831037165	5.393200738	1.56347458	1.247783984	1.430792844	0.083626044	0.463875718	0.143293885	1.804885082	2.353056427	2.481634006
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Zm00001d043452	13.15587579	13.8006177	12.16928334	12.0633424	14.0725788	12.56105591	14.17127513	14.94805924	14.83231756	13.30092698	13.72918937	12.84359836	9.041764577	10.19755579	9.039163977
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Zm00001d043454	1.630278599	1.325779828	1.898485747	4.418635576	3.585856847	4.607977198	3.719962031	3.730271822	2.770492041	1.416329426	1.715892625	1.393566673	3.102804455	3.546192909	4.615593947
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Zm00001d043459	9.475553766	9.521407478	8.869100715	8.733465618	13.8063831	10.08041195	12.6948324	11.69398233	13.43522028	5.499768336	5.712285385	3.010776937	7.578640612	7.896404181	8.46525296
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Zm00001d043466	0	0.014067786	0	0.013929877	0	0	0	0.026935288	0	0	0	0	0	0.024488377	0.077479471
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Zm00001d043468	0.913740634	1.15085971	0.663155462	0.695925301	1.038553962	1.02545707	1.051405085	1.097558014	1.092486592	0.673388767	0.681678319	0.154534413	0.901521681	0.80286893	0.834643648
Zm00001d043469	68.26704063	60.69551027	50.80758126	3.564220582	3.390620697	3.296990048	3.655230831	4.128899244	3.677026003	43.26908736	34.19330449	56.90844334	7.731317568	7.57066285	7.10347432
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Zm00001d043474	37.56648791	36.2042798	28.19031035	35.92835269	39.10353988	46.60049735	49.04518107	51.78784175	52.34430461	82.23275668	48.34236018	49.20167086	16.0579086	13.43959727	14.90620926
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Zm00001d043480	5.741006071	3.899041098	4.803861774	5.915655273	21.53700004	5.978839495	13.60992155	17.83174471	15.70733318	86.12075093	33.51636725	74.41457103	1.00799452	0.531228261	1.48303074
Zm00001d043483	7.312403753	8.697981763	7.927722408	9.532822591	9.059832295	10.12080451	9.617743243	8.308765058	8.739690627	6.679502384	6.961766167	5.476213997	11.15378847	10.35987799	11.2915236
Zm00001d043484	8.404601101	8.624698947	7.489497095	13.49484288	9.687797465	11.49714627	12.62492023	10.37678663	9.812349059	1.902888502	4.573150805	1.308369116	11.0721489	10.77302026	10.01789934
Zm00001d043485	9.091294352	8.254355603	7.624009506	15.29193052	15.65418173	13.95761011	12.25271775	12.31275972	12.35867126	7.903497149	10.2151483	6.913735278	11.11148847	10.40059863	12.64288758
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Zm00001d043491	4.426195839	3.281944619	4.65801103	1.617466073	22.59179023	5.364386968	16.90635486	19.98499908	16.21476711	82.29525736	33.44443703	40.04230087	2.409954311	1.617383769	3.810452518
Zm00001d043492	0.893532609	0.780562226	0.772511274	2.70633955	1.859888008	2.518035968	1.729346354	1.739895677	1.984921246	0.581720418	1.145436199	0.639383522	1.709959687	1.397288895	1.539943801
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Zm00001d043497	63.22205903	58.32832814	46.63234609	47.92131082	59.92921467	50.24739641	64.60818796	65.84838362	49.86962775	53.50379842	54.33169443	48.17024981	48.51163501	44.50651202	57.62963297
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Zm00001d043505	70.32325362	71.27084346	77.82288018	31.07465015	17.12828306	37.3140138	15.53428389	7.84688885	12.53412741	0	0	0.05447616	57.92904088	59.60611892	43.87344717
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Zm00001d043547	1.678429953	1.476249118	1.981077132	3.344546356	6.301143161	3.31995829	6.705487114	9.0449362	6.186780728	5.276264251	4.599662086	2.63832004	2.392365804	1.387674694	2.450009278
Zm00001d043548	24.75151933	26.58958954	30.96813505	37.85516808	30.17249414	33.17019763	25.19271534	25.52507091	27.07128795	5.379980559	7.547574382	1.876010147	67.44643847	72.50670066	69.93381539
Zm00001d043549	2.834717795	1.175047802	1.560820844	1.253030858	1.631175967	1.252887837	1.928720471	1.384516218	0.774428878	2.845553584	1.696837065	1.888077938	2.007683694	0.688374061	1.182324525
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Zm00001d043551	7.444470662	8.141082454	7.039217196	10.15457879	18.47352623	10.62848154	16.98239768	18.02410391	17.98066294	12.74089156	13.3303912	11.66269804	8.139093629	7.017211033	8.313841928
Zm00001d043552	0.214022512	0.321824194	0.192705453	1.427202719	1.358233257	1.343141267	0.982477991	1.032249732	1.187771013	0.156622052	0.435127572	0.130638357	1.028864128	0.892988616	1.151349889
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Zm00001d043555	15.32155187	14.74961481	15.93232343	16.03753305	17.45717511	16.70869483	17.96494218	18.09224173	17.06395297	7.155934327	12.5365698	5.338190215	16.24409024	16.61510954	17.86644426
Zm00001d043556	7.836648733	7.576826979	8.453855371	7.021007892	5.866437173	6.540804739	5.547746723	5.494798742	5.238018441	1.176786786	2.260177504	0.876557126	4.240706781	3.480218459	4.717494816
Zm00001d043558	9.871454619	8.584384317	9.048470424	10.88626007	12.25432403	9.847643287	6.116701416	7.433197132	6.390247782	0.201558543	0.36858797	0.014717563	2.274711478	1.631225763	3.609684972
Zm00001d043560	11.82908431	10.89709211	11.4792997	11.60340858	12.36833285	9.921420057	9.069740886	9.826996236	10.268138	2.776135675	6.694966336	3.404904343	9.311153668	9.059068152	9.207094918
Zm00001d043562	0.028978122	0	0.008003132	0.080311681	0.725475608	0.213012985	0.556824274	0.504703606	0.746528385	0.0577281	0.036542341	0.014266955	0.093679297	0.088241208	0.093062954
Zm00001d043563	1.487806117	1.641835724	1.694485286	4.23381914	6.111844112	3.848688718	4.698798065	4.565422405	4.271913104	1.6262974	3.20052742	1.454227145	2.824664845	2.676229768	3.765063724
Zm00001d043564	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043565	16.8376543	19.42860276	17.54902792	30.41814346	28.04974499	29.27821689	31.09968257	35.39372711	27.81046297	10.8585256	7.90497703	3.27061566	47.02089468	45.19519666	56.61894182
Zm00001d043566	0.449451071	0.537889468	0.455851921	0.674361172	0.569527389	0.858659375	0.64390324	0.477567846	0.339799431	0.066499155	0.076003938	0.038151839	0.437431766	0.409642828	0.376281456
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Zm00001d043568	0	0	0	0.021943591	0.023183856	0	0.020559636	0.297016148	0.216993861	0	0	0	0	0	0
Zm00001d043569	9.402761265	6.826519974	11.71806054	11.1328215	47.66427596	21.01331904	32.79950689	41.81127732	32.54627567	29.66151713	33.36607103	18.46289873	3.497641835	2.239965333	3.693695157
Zm00001d043570	0.429289954	0.374325429	0.205201084	1.070783616	4.264149566	1.33507575	1.73639532	1.27415623	0.814513188	1.047493638	0.874485885	0.914515248	0.443436224	0	0.03817829
Zm00001d043571	2.163872252	2.138394778	3.130582382	3.169228006	1.900812762	4.11930766	2.372885683	1.659143776	1.820159301	0.321390094	0.741650018	0.196680163	0.633300355	0.523081273	0.654299039
Zm00001d043572	0	0.042203357	0	0	0	0	0	0	0	0	0.21127285	0	0	0	1.936986773
Zm00001d043573	156.9637667	156.4413867	170.3675428	119.0098824	79.37155114	121.2821944	49.878728	44.26881673	53.97885422	13.66308205	20.8672916	12.17343467	34.90492066	32.58047834	29.54449391
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Zm00001d043579	0	0	0	0	0	0.010494444	0	0	0	0	0	0	0	0.03756112	0
Zm00001d043580	0.53541103	0.712667638	0.672971886	2.291567114	2.845980862	1.677149413	1.990633888	2.244871048	2.033455555	0.377601178	1.358013365	0.336990933	1.211901137	1.067157041	1.674135858
Zm00001d043581	0.163751268	0.492976638	0.218401574	0.602708313	0.331543368	0.499097715	0.43868965	0.327472668	0.206876356	17.16383966	3.062178693	12.38803478	0.451403308	0.18388818	0.406342817
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Zm00001d043586	19.81129687	35.16294867	23.84652597	0.538426417	7.71119464	0.822764386	50.16659322	32.04335266	28.57398002	2095.670904	969.9087322	1984.497319	0.644149463	0.052585567	5.213145033
Zm00001d043587	1.420570603	2.506671002	0.716683786	0.228037252	0.120463031	0.034463235	0.115045122	0.101755532	0.026019171	0.484950758	0.647381746	0.615434891	0.456438213	0.2004419	0.349614156
Zm00001d043588	0	0	0	0	0	0	0	0	0	0	0	0	0.007477297	0.043949814	0.077252258
Zm00001d043589	0.154336581	0.194387495	0.389807332	0.384963777	0.551042947	0.713637458	0.453764487	0.876446413	0.337699659	0.185390353	0.125563471	0.027575332	1.064101603	1.020592794	1.226015284
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Zm00001d043593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043596	1.493708891	1.084157352	0.692211657	0.789359717	3.102386368	0.527287493	2.721638887	4.914792208	5.276687937	5.167635281	6.800168807	3.701957726	1.189887202	0.582823372	0.702480536
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Zm00001d043599	7.485155223	8.336786241	7.632551814	18.42172704	11.80093253	19.54907504	16.11538981	9.452214125	13.69432546	1.943313989	2.136564414	1.610374453	12.66802988	13.14083982	10.85904585
Zm00001d043600	2.939762065	2.397150685	3.109399955	6.574902113	25.56083797	10.73914943	15.1604335	19.1671509	15.39477838	6.679312375	6.65932024	2.029147951	5.569472031	4.554838114	6.435961385
Zm00001d043601	38.30012981	33.8064687	38.50999822	51.43414197	184.4155772	79.93990324	168.0528688	215.9362421	190.6789539	28.64944604	35.73768525	8.056004585	15.84802507	16.21076856	19.51076613
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Zm00001d043607	1.378002358	1.214919348	0.973469588	8.412020156	13.22608868	10.04947928	17.59350743	22.6583929	19.10549789	2.88074643	5.697843837	1.638966575	3.051594007	3.013278546	4.284758603
Zm00001d043609	27.46530422	28.96568782	25.87328229	30.59384893	37.68822454	32.07138313	31.24795061	34.31277817	36.44207899	16.89096563	23.62521209	12.24149113	19.35610187	17.80970795	20.32401259
Zm00001d043610	0.376272493	0.789860996	1.039183471	1.407812192	13.11100247	1.382955864	6.546263459	5.041099763	2.42336355	18.22062328	23.03920741	11.99508404	0.046784556	0.458314578	6.960357608
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Zm00001d043613	77.68907475	77.0564532	73.55267269	104.526301	72.77055766	110.1905151	123.5293437	85.33048902	100.3488279	190.2905101	159.1846967	145.7694974	41.16794484	42.09083073	35.96703992
Zm00001d043614	8.038645277	8.38125109	8.188792537	11.09265471	13.63640965	10.64396247	11.62822262	8.836995914	7.201064313	8.990087152	9.584755345	7.711585857	19.64703296	19.17504834	18.86687877
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Zm00001d043619	29.02858669	28.612188	33.27335577	41.48874672	47.31639596	39.27671486	38.60585596	44.81008374	39.08808064	38.36969196	38.04263451	21.88361828	62.77504912	57.67453565	58.13904539
Zm00001d043620	37.03910744	41.04070225	48.03371661	57.94493826	61.67149811	65.52730642	58.01388155	62.71507135	65.49788381	41.20666703	43.46692674	44.40831038	99.45974446	98.22232761	85.96143406
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Zm00001d043663	2.149565082	0.189516962	1.148738899	0.455743535	67.12710614	10.37603469	43.98103694	58.93949216	42.54870897	7.41151159	8.240438416	1.833516798	0	0	0
Zm00001d043665	40.79798209	12.60007448	50.33521881	40.96076316	337.6088025	72.4804653	225.7587904	322.2748232	294.1096271	187.3588029	164.781822	80.94921009	0.452619815	0.620758621	2.306962708
Zm00001d043666	3.644597641	3.298961487	2.993212597	5.07521412	5.681940665	5.607828586	4.997735204	4.590981379	5.475698122	0.233483395	0.793517131	0.187535454	1.647811082	1.432158098	1.506722272
Zm00001d043667	5.743775426	5.317733963	4.839580343	5.297357778	5.472439045	4.746933045	7.133373729	6.938327158	6.850932174	5.480062576	4.80480012	4.545966333	3.641953177	3.518503308	3.34886509
Zm00001d043668	0.036750629	0.023143776	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043669	34.9667214	35.39937534	31.06094229	21.1908435	23.43073745	22.45048488	23.28790559	22.02909728	21.01172795	11.57422335	16.97891809	10.19812774	17.86117261	16.49414507	17.83138032
Zm00001d043672	0	0	0	0	0.179779005	0	0.047828853	0.082257466	0.31970862	7.696255652	1.806572636	5.879402104	0	0	0
Zm00001d043673	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043674	0.805035857	1.629555493	0.55384873	9.645627128	36.59597311	18.07004161	109.3209662	155.7437435	153.392618	729.0753985	545.2401756	940.2569198	39.34832037	34.82757056	48.06562408
Zm00001d043675	3.799609427	3.244489582	3.94466633	3.866693978	5.67327373	5.139706766	4.493594781	4.537091559	5.355396806	0.913561073	2.355109361	0.601290699	3.10912653	3.116384919	3.658949766
Zm00001d043676	2.278538987	2.630675928	2.831774959	2.841694981	2.001539592	4.652536704	0.887490942	2.518449423	2.575897958	0	1.197212818	0.210338507	1.062399288	3.538570471	0.87810067
Zm00001d043677	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043680	22.20363523	22.14041992	19.73807397	41.93616253	25.35993249	41.39767765	22.80662892	22.77418712	23.23390204	2.794802175	3.680283148	0.891477247	63.54865664	64.22040385	64.18729071
Zm00001d043681	0.198526169	0.261410101	0.370093361	0.832813579	0.879884732	1.105553276	0.843555746	0.413470004	0.545320612	0.784064545	1.081047614	0.519806845	1.555100106	1.325572817	1.575364767
Zm00001d043682	4.032298398	4.56925778	2.269802323	4.248961317	4.173442363	4.048151645	3.039363607	2.476035846	2.636119845	0.236007898	0.992645821	0.193009754	1.963673659	1.719023873	2.298569393
Zm00001d043683	0	0	0	0	0.0427375	0.059605452	0	0.019554444	0	0	0	0	0	0	0
Zm00001d043684	15.539106	15.91197427	12.70457177	10.59027025	10.537175	11.22559728	10.05651073	9.227215329	9.121837376	6.997501106	8.864943285	6.892254804	18.27820914	16.74891085	17.13827878
Zm00001d043686	4.990781047	4.150354751	5.555748428	2.169276273	1.98870664	1.684645228	2.173294788	1.77031384	1.591115855	4.276443673	4.048311218	4.333032248	1.376287084	1.654533074	1.621433737
Zm00001d043687	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043688	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043691	0	0	0	0	0	0	0	0	0	0.113106692	0	0.73586933	0	0	0
Zm00001d043692	0.568705489	0.393255426	0.540485596	2.558916198	5.61280026	2.486412764	3.465992356	5.795085459	4.070705715	8.350899526	4.62635844	6.979258133	1.6596306	1.307990927	5.015057826
Zm00001d043693	152.0396598	144.6530796	135.2391349	80.83106461	113.372351	88.32954579	84.98676965	87.45111896	90.58905236	163.4716692	155.0470573	191.3052839	70.81871033	66.68641609	76.38162622
Zm00001d043694	14.15217122	13.09793601	11.56226454	9.901684588	13.49480933	11.18540658	13.24787516	12.48212932	12.02787961	18.07198367	14.73441713	17.72957105	13.18110341	12.98172077	13.1259339
Zm00001d043695	13.82873662	12.20668897	13.57164036	12.34893257	11.6771849	12.60687365	11.5701008	9.951409703	11.240282	4.851295421	6.699978093	3.733750827	10.37528374	8.333721943	10.16087919
Zm00001d043696	1.536261693	1.638332593	1.649126634	3.661765809	3.573220169	3.707019129	3.101061991	2.877727133	3.143898423	0.775846963	1.359863549	0.730822078	2.676984781	2.255715961	2.502136757
Zm00001d043698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043699	0.807992548	1.248341382	0.535560276	0.282154112	0.085171898	0.633536913	0.44059834	1.026215368	0.637746496	0.876625882	0.353220236	0.668309583	1.398448992	0.673169852	1.382541481
Zm00001d043700	12.14700304	12.42634135	11.81374119	11.26641431	13.5270102	11.84888525	14.77482943	14.72907306	14.92729595	20.33584381	16.38105214	18.16606202	10.46785323	9.851685669	10.30668926
Zm00001d043701	0.573809285	0.252376638	0.58861678	0.124951278	0.876090281	0.189697033	2.171130405	3.371558722	1.606289466	6.632498026	2.239689269	2.340769103	0.010192238	0.06989221	0.126362255
Zm00001d043702	0.289338284	0.819950939	0.269692853	1.443400625	2.764030866	0.797577721	5.57851449	0.610533194	1.96258892	1.296896885	1.003378362	3.044900294	1.618894153	1.98239242	5.686747199
Zm00001d043703	1.90619709	2.12679125	2.210371032	4.609914354	3.773275933	5.001279481	5.85834428	4.985200471	5.381595115	1.840672182	1.785452868	2.490850743	3.56489975	3.78170804	3.471777481
Zm00001d043704	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043705	0.017586408	0.083063047	0.071033429	0.479784488	0.318624248	0.355504975	0.318520627	0.307475472	0.222311414	0.015159098	0.083163843	0.002435178	0.45509434	0.498839934	0.724337746
Zm00001d043706	0.126585499	0.294341363	0.133117626	0.036431987	1.21888629	0.131225394	0.489257827	0.657497285	0.396291993	1.1952171	0.82270009	0.744274718	0.010896403	0.096069787	0.225154018
Zm00001d043707	5.385151931	5.965070985	7.160772084	31.58179182	13.92747743	24.31864027	6.873112731	8.512750923	6.206533201	0.994689152	1.879610089	0.568135897	48.97150068	50.08220461	54.19929695
Zm00001d043708	0.47068411	0.538934889	0.132947181	1.174033607	0.36647908	1.389208143	0.274997193	0.335363303	0.237470746	0.118027452	0	0.023700113	1.244952405	1.289951124	2.572463936
Zm00001d043709	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043710	0	0	0	0	0	0	0	0	0	0.170632448	0	0	0	0.022604656	0
Zm00001d043713	1.382484329	0	0.509083139	0	2.563769815	0	1.61543295	1.234786234	1.831281898	1.412350973	1.937063436	0.850807445	0.229191756	0.056130662	0
Zm00001d043714	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043715	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043716	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043719	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043721	4.043218058	4.588040084	4.479477083	6.486180197	4.040828928	6.203631204	5.519395912	4.888430502	4.742839695	0.915506077	0.857842379	0.455789702	13.24810207	14.68618673	14.5880288
Zm00001d043722	0.690653225	0.745611679	0.697406012	0.569108061	0.503770452	0.876364153	0.612476834	0.089225419	0.243361992	0.017009369	0.155524263	0.054648164	0.062105073	0.060839865	0.014258739
Zm00001d043723	106.5175995	103.038535	104.7145561	66.33347469	85.59101681	77.74757019	116.0506141	96.99571592	110.03077	4.98878265	6.18760927	0.690031362	17.65875766	13.5732555	15.85635024
Zm00001d043724	6.83561696	8.174250234	8.710056629	8.296133215	6.673379636	9.697562287	6.359650728	5.416673641	4.847704558	0.446798234	1.26643555	0.466532803	6.114586233	5.114008731	5.718058395
Zm00001d043725	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043726	2.74758115	2.351255618	3.174844205	5.654214449	11.74877026	7.226717433	9.602943566	11.0897337	10.03143237	5.928448337	10.60233972	4.396377134	2.662324622	2.254187784	3.192806493
Zm00001d043727	4.195654548	5.082564853	6.526753044	9.195333001	56.1659617	22.6864107	66.25701338	76.61265252	66.99983262	17.87963279	36.82197283	11.321724	20.39454942	17.18840868	25.11489035
Zm00001d043728	3.871017381	4.18027829	0	0	0	0	0	0	0	0	0	0	0	0.014942061	0.110309755
Zm00001d043729	0	0	0	0	0	0	0	0	0	0.054651842	0	0	0.221718112	0.564723267	0.549767376
Zm00001d043730	0	0	0	0	0.064392695	0.014967947	0.828007634	2.003465493	0.602696086	6.706205919	0.677885649	0.243609209	0.041014879	0	0.254248988
Zm00001d043731	0	0	0	0.007368267	0.031138905	0	0.027614238	0.028495067	0.109294012	0.228149003	0.081952684	0.006544673	0.039667804	0.025906459	0
Zm00001d043733	0.958602623	1.109089774	1.073604041	1.070414253	1.094196736	1.017374924	1.777876269	2.761959579	1.745840783	2.198327456	3.535121029	3.204210899	1.340883895	1.441869246	1.14693622
Zm00001d043734	0.36783589	0.231645332	0.77279701	2.981868276	4.304400007	1.512894062	7.542251653	14.24564414	10.89824907	23.62598079	27.68759802	24.71996231	1.058451872	1.843358261	2.308600353
Zm00001d043735	0.070409788	0.206923241	0.072921244	0.058541356	0.32471329	0.086261625	3.578911969	3.579873172	1.939310456	5.891140186	0.84349552	0.194991921	9.126602638	13.81623718	16.3485009
Zm00001d043736	8.304119186	8.111881042	7.184432326	2.486870471	3.953422668	2.178117783	4.141785697	5.231144276	4.683961568	5.474496467	8.784434815	7.109762669	2.727713068	2.92955228	3.024994567
Zm00001d043737	0.048138148	0	0	0.015008952	0	0	0.042187069	0.058043649	0.296838433	1.012454238	4.81077207	0.719890947	0	0	0
Zm00001d043738	0	0	0	0	0	0	0	0	0.014947184	0.183868564	0.076417839	0	0	0	0
Zm00001d043739	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043740	0.855039372	0.011834343	0.011677423	0	2.117092393	0.322320069	2.020185566	1.22358405	1.089264441	77.28559246	21.87270791	42.71649814	0	0.020600532	0.597470559
Zm00001d043741	5.514447296	3.78624404	4.319051724	0.131338844	1.576843166	0.469163365	3.792345746	4.640565324	3.223316161	11.84372008	5.601748715	5.1541772	0.449957345	0.913066627	0.58663028
Zm00001d043742	0.494399969	0.649772442	0.507582304	0.227871767	0.325722245	0.131675567	1.155412735	0.660930981	0.55671208	1.556417434	0.365940522	0.726263147	0.396896338	0.223860729	0.236093105
Zm00001d043743	12.54989825	11.04895778	11.43736779	4.612162774	4.335563599	4.752757048	3.891136755	3.687478857	4.2465357	1.007572588	1.206933353	0.715185777	2.268799009	1.974246052	1.91188779
Zm00001d043745	3.331197349	3.205480716	3.295457409	4.237615323	4.916062156	3.281262728	4.499734774	4.337999007	3.746760665	2.462528904	1.999555444	1.771271639	3.847003737	3.534918695	2.603491462
Zm00001d043747	0.036603036	0.138304978	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043752	0.806982558	0.394601389	0.873130612	1.835261342	10.33294815	4.350121818	10.25052037	10.19972016	7.306183298	13.76144767	1.819763483	1.051692536	4.483324995	4.683402093	7.068710398
Zm00001d043753	0.02156346	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043759	0	0	0	0	0	0	0	0	0.023064874	0	0	0	0.041856497	0.020501897	0
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Zm00001d043764	1.006984647	1.574325232	1.529963722	3.558852601	2.394021586	2.83782689	2.32177725	2.132164204	2.144177016	0.387225136	0.77960683	0.331956033	2.157023009	1.97694319	2.300332444
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Zm00001d043767	5.972565597	8.570100204	8.075610749	8.876071972	8.479532554	9.010512073	8.878969301	8.234657218	7.813178634	1.647430525	4.51107161	1.385578455	7.13139167	8.254442628	7.975210756
Zm00001d043768	7.12821944	7.495002804	6.983779193	7.913951984	12.36536502	9.951005786	11.11400466	14.06997202	12.56488459	13.49694742	16.15514902	12.10612553	4.031747767	4.111925592	4.507794778
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Zm00001d043778	26.79387296	25.36912501	23.15005083	16.84024987	13.14280444	18.69670564	13.01734319	11.53080885	14.61544191	4.453639162	5.463614174	2.548232311	20.3283055	22.98946049	24.27449843
Zm00001d043779	17.99344711	16.64941918	17.4350206	30.41487997	31.98152339	31.99084238	25.94067754	26.83152493	25.66675162	9.920570517	13.93776744	5.987851902	25.90162153	26.93028256	31.22255799
Zm00001d043780	10.40479691	14.39931325	11.17858017	42.45651278	19.68297239	31.07764378	44.79657074	21.7198251	44.03753838	0.813089467	0.944374866	0.017650784	35.49156558	36.57638782	27.89965312
Zm00001d043781	0.778698316	0.707862549	0.420768939	1.351177406	0.490719217	0.555815678	0.617155662	0.269432925	0.075157903	0	0	0	0.841079258	0.727446705	0.461883562
Zm00001d043782	164.49883	153.6903425	179.1133967	46.0063131	84.52655663	64.80625742	109.0248487	115.8557181	120.5304085	54.05067173	90.25142782	44.22933409	27.8119789	31.84393191	25.81615971
Zm00001d043783	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043784	12.00063484	14.10635769	8.132906825	11.35445153	8.45335702	11.60207418	8.824855697	7.664111911	7.253761158	5.644195655	6.469623801	6.942539533	6.493310702	5.082320941	6.331467741
Zm00001d043785	10.20026334	10.35902894	8.751079767	10.31736321	7.718932918	9.588941177	11.46613359	10.39683194	10.02488773	6.026373334	7.945216065	7.196046549	13.32578141	12.37752911	12.74854135
Zm00001d043786	2.430817582	4.326053034	2.558410545	13.51915286	8.211762065	14.18563048	49.73683764	37.22590138	30.10392356	22.86077081	11.35099995	25.65296763	74.18281918	74.94679891	72.34549707
Zm00001d043787	2.3449042	1.741400659	1.883267813	5.297140159	16.61472186	7.697012179	14.60482666	14.7639374	15.44174663	5.171364223	7.810941881	3.577796743	5.01287431	4.401488569	4.52690734
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Zm00001d043791	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043792	0	0	0	0	0.029873725	0	0	0	0	0	0	0	0	0	0
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Zm00001d043794	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043795	2.837176924	1.878130866	5.461280279	3.538403982	18.7441478	4.494458237	19.30549793	16.46848465	11.50609948	59.9134006	22.09897699	42.31945794	0.502075957	0.376118778	6.316222197
Zm00001d043796	2.019614102	1.108797292	2.316906785	2.841694981	2.251732041	3.299071481	1.028682682	1.248817896	1.468900488	2.499700727	0.848932726	0.803110664	0.405643364	0.681222123	0.957928004
Zm00001d043797	12.20505123	11.98510452	11.82291898	10.73705201	12.2977547	10.70360645	11.14216477	11.61321437	11.09715905	9.849621132	10.6030303	7.540168556	11.39966891	10.57838582	11.04401879
Zm00001d043798	4.369333188	3.35350721	5.06961959	1.681602273	6.679295044	3.324734094	5.225227566	6.976542223	9.324803229	40.25200272	20.44678071	17.52663336	1.547044356	1.160033677	0.868234371
Zm00001d043799	0.107753568	0.016964502	0.351530685	0.739120665	1.029363219	0.379536984	1.967344452	2.939581987	2.54152189	0.613015981	1.783434267	1.208565688	0.738550677	0.457727574	1.214633834
Zm00001d043800	2.32853131	2.47664362	2.137292851	1.69033051	10.8235376	2.858213675	8.949335765	11.44772064	10.53605175	21.54231187	15.66241557	18.21607362	1.33765964	1.332330087	1.80843356
Zm00001d043801	1.518593344	1.711597958	2.008293833	2.836029397	3.32468781	3.534920795	2.438767475	2.366316063	2.069735776	0.273881846	0.70707505	0.396833458	2.213518448	1.82267178	2.052819796
Zm00001d043803	1.739529764	2.592102967	3.806149139	6.141727862	6.973105676	5.943240435	5.983406671	6.706017819	5.076256385	2.500468684	5.128705234	3.229713852	1.946589663	2.873829528	4.192222556
Zm00001d043804	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043805	3.323979244	3.883484959	3.765036929	9.180171596	11.30095597	16.06931054	9.948338627	7.992106458	10.05247077	3.388083981	5.362406322	3.819413533	8.892169003	10.18942934	10.94344351
Zm00001d043806	0.415906037	0.506937283	0.666953867	1.556099901	1.520305834	1.939546214	0.815202671	1.019153054	0.728026116	0.758636217	0.981268053	0.430997844	0.975864312	1.044228612	1.178843687
Zm00001d043807	3.287399254	4.243148339	4.774399594	10.42256013	9.672782155	10.17196896	9.441408005	9.827740198	10.63493295	4.196635879	7.153584508	2.829036201	7.479020742	6.951389816	9.22215108
Zm00001d043808	15.11107664	13.48208692	12.36340897	18.646356	21.52080921	19.13677438	23.87728289	24.34078932	20.19663435	39.6353763	25.32792871	49.76698585	23.4360762	20.24824054	24.41493524
Zm00001d043809	1.716459078	1.507230771	2.133220394	3.233652909	3.7588595	3.887398042	3.785372504	3.570890429	3.756699023	6.543362116	5.411274912	6.574612648	3.165217189	2.47131244	2.774052781
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Zm00001d043813	10.15766788	9.917607016	10.84801722	14.82703351	16.19888266	16.71303487	14.94198111	14.85904897	16.93309723	5.495955306	9.455917103	4.952927864	9.734691406	10.91717178	10.72172273
Zm00001d043814	4.924033691	3.794192452	3.468128883	6.226185633	8.051136787	8.761406198	8.146967407	7.151470272	6.356863601	6.120187548	7.253226421	4.66998753	6.025833264	4.883367576	5.229138824
Zm00001d043815	0.398917464	0.334958681	0.83662166	4.975125559	4.205058256	4.95855766	4.22434898	4.509409302	4.345786839	0.469939395	1.079456566	0.653647689	7.440024192	8.846362909	10.03116584
Zm00001d043816	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043823	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043827	3.379252105	3.27199274	3.709916254	5.996838393	8.959511396	5.70201089	6.327461113	6.942538395	6.74163316	1.720526026	4.123046079	1.15034968	3.440160221	3.941149197	3.954424779
Zm00001d043828	0	1.861510239	0	2.07366931	1.217152455	0.226339623	0.8635047	0.445524222	0.455687108	0	0	0	0	0.202525496	0
Zm00001d043829	0.009454519	0	0	0.047165062	0.012457715	0.127413868	0.04419042	0	0	0	0.059612257	0	0.814653064	1.202267536	1.016556378
Zm00001d043830	9.202642898	8.83238414	5.608563997	7.587049707	19.38384217	14.90618556	13.54500738	17.604695	14.75969068	78.19590858	51.69169752	58.12694434	1.559560896	1.624791924	3.299271451
Zm00001d043831	0.071983006	0.32080705	0.075697508	1.595216381	1.10899399	1.994428857	1.488137909	1.709196206	1.611607868	0.076366486	0.335161401	0.042936658	1.208269421	1.578205971	1.555614554
Zm00001d043832	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d043834	15.25621849	13.42825428	15.85449689	30.1616987	36.44227384	28.91643481	24.49983678	28.23749158	28.33253886	2.955542189	8.728476813	2.689556387	19.63634956	18.94347685	21.94145948
Zm00001d043835	2.248382884	2.651654205	2.485756289	2.545193104	1.596796129	2.543214893	1.999517911	1.202462883	1.648505501	0.098655911	0.282997674	0.020198712	2.453230045	2.132636899	2.101603821
Zm00001d043837	0	0	0	0.160850659	1.307246468	0.243093355	1.36794685	0.92111648	1.11342416	0.082096744	0.012510787	0.054950553	0.155427936	0.010875825	0
Zm00001d043838	0.237151308	0.135769523	0.167461559	0.662109889	2.830089394	0.508449901	2.257827339	3.135707147	3.14076478	1.657654036	2.035615786	1.029924801	0.464414875	0.301333026	0.507854793
Zm00001d043839	3.753486099	2.959510419	4.83550858	1.408161352	8.16252865	2.523585757	11.60671747	13.72473168	9.992058717	18.39193071	10.13996499	6.118596931	2.236729929	1.154124087	2.41673689
Zm00001d043840	5.370841897	5.160343407	5.045748084	7.029223765	8.999935209	8.062470438	9.016852843	9.624430094	9.359629225	1.793263565	2.837617462	0.770152484	6.675298879	6.411315661	5.724698238
Zm00001d043841	0.66468676	0.416312783	0.534254808	1.606126454	1.625507184	1.77028745	2.289958791	1.737950613	2.073860987	10.50732025	7.473113448	11.26674087	1.208684469	1.667189668	1.77290718
Zm00001d043842	4.628537915	4.905763523	4.407361065	6.84841511	6.367641261	6.423717785	6.159955075	5.867485828	6.845465523	3.490985788	4.859602863	3.276082851	6.240235953	5.549650091	5.494557757
Zm00001d043843	38.71135856	37.26579362	36.08294278	18.27567311	20.53564566	15.9442219	23.07105578	23.5658669	22.08130617	15.1831861	21.83620123	17.69480382	12.56232773	11.98700424	11.78335509
Zm00001d043844	0.013576201	0.205191297	0.573666427	0.050794945	0	0.066530813	0.063455162	0.06547923	0	0.037447638	0	0.060156395	0	0	0.031391881
Zm00001d043845	10.39154356	5.515382072	13.7078291	2.834974263	13.73869125	2.26651495	7.6958469	8.885470952	10.69878358	138.9270616	88.61201757	150.289794	9.531507754	8.130674984	14.01475758
Zm00001d043846	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d043849	255.5022107	234.5169745	236.3866909	57.44419653	75.88387353	60.32685176	71.5829942	80.02492127	63.97153781	4.682085657	8.947759693	3.184722632	54.00696084	34.16473724	52.86283902
Zm00001d043850	123.229026	134.132421	118.7788493	23.75891371	26.41206885	23.16675493	23.44074013	27.87052558	22.2005226	52.73104572	70.49978986	85.73137339	15.50883909	14.32595298	15.16307859
Zm00001d043851	1.059234082	1.075252228	1.817444467	5.027803783	16.17549516	8.120351139	9.924811969	10.52732907	9.032195377	6.584764865	5.427641667	5.792426955	8.018580713	9.254694995	11.60189559
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Zm00001d043853	10.94496646	5.376740542	12.89173814	8.516792059	82.93733659	19.01384942	123.4475727	175.7480376	175.8535558	430.4159511	350.0380092	327.3865665	3.437709135	3.826904434	5.658111713
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Zm00001d043855	20.66467682	23.27078821	18.75160986	31.82581737	33.97585217	33.77326285	33.83485219	36.57184673	33.02013062	137.4887802	100.3344197	136.5635438	33.73687368	31.45785197	33.3957589
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Zm00001d043858	1.32006037	1.040945272	1.012876686	0.400843625	0.438624545	0.43595558	0.737712873	0.221452846	0.113252212	0	0	0	1.194597083	0.704673094	0.398131286
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Zm00001d043861	31.06320222	32.42159774	27.91251932	19.5353721	17.40188437	18.7931048	18.19718568	16.90049505	17.90039974	10.24869843	12.35485456	12.67540004	12.74056487	12.10840324	13.00102287
Zm00001d043862	0.643506688	0.595468693	0.538608494	1.048233307	3.460875376	1.979004085	2.915676292	3.436228608	2.575223109	4.002814306	4.123656369	2.967773288	1.072808964	0.93578063	1.275396939
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Zm00001d043870	6.253077867	5.467224112	5.810179043	15.35802789	9.632004446	11.62381338	11.27601759	11.73053582	8.742441553	0.555951316	0.29136053	0.168815371	12.45448278	14.7174353	14.13486322
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Zm00001d043878	16.43902975	16.32104798	15.32285592	31.39375606	28.2226292	30.49266847	25.11381575	27.72260807	25.39407267	6.853693037	15.09810226	3.995141216	13.99629589	11.88377366	16.71488868
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Zm00001d043881	22.90723687	25.75172119	20.26157698	26.59340223	23.66526224	28.12421118	23.97649324	18.74696041	20.85763558	12.09939176	16.62525265	12.79577999	24.18861609	23.02797921	21.72242621
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Zm00001d044121	1.776502783	1.602453325	1.581205127	2.766213307	2.629961062	2.643757528	3.461774336	3.496594651	3.347597839	0.421559641	0.991629895	0.769807584	2.221841736	2.09352459	1.902859087
Zm00001d044122	0	0.011932758	0.011774532	0.141789355	0.137319764	0.046428641	0.166058596	0.125660678	0.268738551	0.052265795	0.071683429	0	0.1908343	0.602383526	1.467760788
Zm00001d044123	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044124	0.014383202	0	0.008937743	0.008969053	0.454847503	0.044053477	0.462186235	0.502943178	0.700669867	4.096300739	2.992717155	1.147180243	0	0.031534743	0.058201307
Zm00001d044126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044127	3.660860089	3.806498577	4.180999762	4.634652604	6.663536605	4.811576336	6.030716401	6.01692589	5.498862821	2.159203414	3.557465926	2.625569242	3.635187519	3.590531708	3.715024735
Zm00001d044129	0.090292654	0.061235963	0.040282658	0.574595056	0.722994742	0.760163829	0.381448266	0.254035573	0.46826577	0.025544299	0.148896375	0.053858056	0.365299833	0.352781922	0.374735595
Zm00001d044130	37.36576653	37.59403487	48.19666857	132.6809355	102.4004626	143.1821071	84.51525333	87.80715795	67.52578386	9.592011569	14.85379853	3.531169152	278.8837871	300.429149	365.938053
Zm00001d044131	0	0	0	0	0	0	0	0	0	0	0	0	0.122879918	0.3009415	0.021159052
Zm00001d044132	0	0	0	0	0	0.007754228	0	0	0	0	0.007981419	0	0	0.048568614	0.014635011
Zm00001d044133	7.75283689	7.390487889	7.302557108	11.00230897	8.542708526	9.634719966	13.57813822	12.24366811	11.02719608	16.24111582	13.15969521	9.660369138	8.449095379	7.506761081	7.486224377
Zm00001d044134	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044135	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044136	0	0.025015452	0.057595423	0.18990504	0.200638594	0.129775358	0.982471812	0.41510344	0.204121344	0.502188233	0.150274849	0.080672202	0.007408499	0.06531815	0.045924878
Zm00001d044138	1.502657177	1.271012312	0.933753381	5.484348827	26.82666966	6.317021818	35.99502592	19.18442664	30.58676952	3.027346915	3.669044455	1.330028405	3.428985288	2.785816762	2.827332762
Zm00001d044139	12.07737906	13.84491872	10.99230871	10.2235693	8.829451748	10.60228315	6.968771236	6.609097009	7.405850823	1.166175183	2.113699872	1.081740894	5.070209015	4.905395865	5.796329549
Zm00001d044142	6.23922085	11.74896144	18.89116986	0.11443067	0	0.187350471	0.929185147	0.774434722	0.490347872	9.617257026	16.73848149	17.00777405	10.81508215	11.06414454	9.193537221
Zm00001d044143	0	0	0	0	0	0	0	0	0	2.100634142	0	0	0	0	0
Zm00001d044144	10.84618189	12.69184207	9.630124733	14.2881682	10.55239739	14.05443781	14.96977802	11.25014421	13.17103892	11.51469944	9.739569252	9.835459641	14.99370779	14.42833483	12.45801276
Zm00001d044146	2.765584856	0.967025233	2.541294892	3.605451397	30.26740789	9.377594324	33.93622955	37.01195668	27.2375544	16.06717176	15.52081791	4.825370268	0.447120938	1.580279171	1.80249662
Zm00001d044147	0.040809653	0	0.010143671	0	0.161318116	0.009999482	0.190744322	0.068890014	0.010065924	1.744780448	0.257311412	0.262201076	0	0	0.009436306
Zm00001d044148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044152	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044153	1.144481156	0.787693033	1.189190033	3.759461064	4.845447174	7.524084061	6.460089598	5.02977689	5.692128166	4.545528203	2.334400693	2.348555481	13.83587962	15.27483237	12.01704467
Zm00001d044154	0	0	0	0	0	0.054262847	0	0	0	0.244339769	0	0.245319209	0	0.008092271	0.042672279
Zm00001d044155	0	0	0	0	0	0	0	0	0.230964699	0	0	0	0	0	0
Zm00001d044156	76.50781701	69.66565039	70.53140055	7.55961666	15.2189545	5.254257759	13.52343218	20.64749969	15.18010904	23.2750002	50.07956132	19.34637848	19.6732766	22.29363044	33.16893518
Zm00001d044157	2.438271617	1.668642426	2.592387798	5.63358706	19.57381915	6.872324319	17.2017703	13.95225701	13.30582866	5.685622685	4.674313799	2.630749246	0.859557692	0.509863156	4.375113959
Zm00001d044159	2.756297161	3.261729567	4.217213246	2.481135833	2.569718573	2.788520386	3.126258413	3.881809434	2.725466226	1.378636788	1.535521989	0.409820833	4.965174478	3.972330722	8.639377565
Zm00001d044162	0.712917106	0.137329206	0.218897942	0.104602269	1.127247451	0.143857577	0.833043645	0.606787591	0.393065076	2.174673909	1.142273236	1.988279582	0	0.09194409	0.058180903
Zm00001d044164	1.145847	1.00269732	1.354719337	2.165639735	2.465563653	2.535877959	2.568122802	2.456414608	2.646713823	0.418538668	1.194400333	0.316575575	0.709648037	0.632534338	0.717444784
Zm00001d044165	0	0	0	0	0	0	0	0	0	0.18545789	0	0	0	0	0
Zm00001d044167	0.160084706	0.107534549	0	0.346061215	0.098436373	0.130750446	1.022589094	0.79783963	0.460667295	0.01471888	0.09420691	0.082756134	1.468947399	1.895297147	1.715072504
Zm00001d044168	0	0	0	0.034237289	0.072344805	0	0	0	0	0	0.034618202	0	0	0	0.20630076
Zm00001d044169	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044170	0.71371883	1.500329346	0.593423429	2.751847272	1.390775673	1.853488519	2.419717949	1.73328578	1.686042299	0.027727773	0.114087339	0.122491248	6.237533701	6.507173967	7.46127305
Zm00001d044171	0.674365799	0.231645332	0.380956273	0.484235019	0.363508312	0.588347691	0.477573601	0.271043884	0.302429112	0.21137764	0.257696033	0.36219725	0.468789641	0.504043275	0.389829446
Zm00001d044172	27.67575919	27.38085478	26.92661084	23.66684882	24.89403359	17.75325827	23.67322893	25.35847092	24.98558544	16.51031141	18.59061141	13.44463613	14.13978195	13.46108284	12.46143601
Zm00001d044173	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044175	14.12328542	14.55218544	13.59499838	18.27721834	21.05339348	17.14006739	20.75602447	21.79082477	22.59944371	11.39177983	14.4147567	10.89157644	15.61471233	14.11602214	15.70589689
Zm00001d044176	0.217906015	0.047731032	0.105970789	0	0.986205579	0.185714563	0.542458081	1.268030479	0.63095138	1.672505435	1.397826858	0.944555458	0.010601906	0	0
Zm00001d044177	0	0	0	0	0	0.077542278	0	0	0	0	0	0	0	0	0
Zm00001d044178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044179	5.991509297	4.989193	5.594983939	11.22916758	23.85854579	14.00492405	17.67675662	24.4272409	20.62986381	23.58762914	28.88616535	30.484314	8.754375923	8.201056644	9.248760089
Zm00001d044180	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044181	0.330837753	0.304505235	0.29097911	0.304694026	1.223949658	0.224485762	1.251937147	1.583385788	2.058904967	2.400733744	1.473026404	0.981057639	0.176565541	0.14228057	0.308937131
Zm00001d044182	0	0	0	0	0	0	0	0	0	0.123963744	0.045338237	0	0	0	0
Zm00001d044183	0.062769669	0.073788055	0.005200689	0.020875629	0.022055533	0.04614086	0.039118058	0.166509053	0.010321655	0.01154263	0.063323653	0.004635559	0.046827517	0.059635607	0.043542182
Zm00001d044184	14.07607684	14.20859175	10.74010321	14.50623793	16.43405344	16.32945001	20.85098308	26.17226462	19.35684098	30.58013318	49.13754113	54.07472418	14.88036615	16.30976109	17.46200194
Zm00001d044185	6.891912283	8.237775128	8.05645983	16.63317047	16.67416849	16.38965488	16.62866107	18.03533642	15.16891063	2.776237194	6.307372467	2.411307628	12.90469132	13.13175922	12.98151423
Zm00001d044186	17.43783075	18.88025058	15.24228889	18.48673739	14.76787789	17.61218219	16.50877347	13.9718809	12.43301289	6.05252765	11.2189169	7.933659288	12.44124227	12.09038821	11.71036413
Zm00001d044187	0.018524707	0.023331937	0.138135364	0.462064225	0.292908233	0.363124816	0.497860772	0.156356062	0.091384406	0.332132129	0.093441	0.12312498	0.228027164	0.203074346	0.257005074
Zm00001d044188	0.763023571	0.907308781	0.69501849	1.830322143	1.673577593	1.796070559	2.061924298	1.901020041	1.533297076	0.126367386	0.400417469	0.202998291	2.082469563	1.518777402	1.872077348
Zm00001d044189	30.16149747	32.91626303	32.26906349	9.481128061	9.756341826	7.695079312	11.66534605	11.31332206	10.34280212	27.09841681	23.23595185	38.03702864	16.08917247	15.46708669	19.0731634
Zm00001d044190	0	0	0.041040217	0	0.04351173	0	0	0	0	0	0	0	0	0	0
Zm00001d044191	1.248847506	1.624593575	1.056428131	1.9326747	1.606503273	1.873423514	1.259559573	1.140360799	1.284416287	0.257726389	0.74143775	0.042916208	1.598964943	1.241620718	2.429231326
Zm00001d044192	0.254269695	0.725908209	0.179070704	2.251510345	3.316872492	3.156687024	9.557171516	9.391915766	9.930193332	14.44800896	25.59793904	25.78205017	0.493195652	0.167243621	0.538945855
Zm00001d044193	2.827015086	3.336365734	2.136466974	2.034286229	2.55478715	2.025301072	1.780119313	2.25305303	2.453558902	0.821623085	2.234335239	0.866923398	0.708471189	0.703677587	1.057278955
Zm00001d044194	81.49318124	91.72236264	103.211407	26.71092334	26.65282828	22.63959068	32.63066162	28.89893264	25.72487274	1.406581155	3.552085775	0.591787203	28.3960648	23.58504727	23.07704711
Zm00001d044195	37.7580919	39.14301648	35.7783527	23.72292205	20.72417691	23.39318029	24.57928732	19.47677545	21.93039058	17.3020358	16.37768791	16.72358991	16.61385387	16.41891737	15.70153878
Zm00001d044197	0.788053615	0.533970239	0.502095086	4.267207786	3.207136771	3.476926737	2.226336269	2.423645268	2.491233606	0.178849698	0.62896259	0.011050254	2.673478777	2.854124355	2.952417285
Zm00001d044198	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044201	48.72818376	53.78505453	45.16864942	28.8967165	19.31225766	22.01677045	15.43196911	14.9822467	15.76559033	12.4066779	14.40013797	9.040731471	38.77619427	37.03253215	33.1614148
Zm00001d044202	0.212699089	0.160737174	0.185040137	0.411167068	0.826773647	0.9641663	0.627560689	0.833516729	0.465612615	17.77683486	4.190943354	17.81864133	0.208264971	0.227339005	0.399602405
Zm00001d044203	7.665512978	8.372155948	7.015494093	4.090040753	5.990531695	4.582680435	5.771553994	5.868638421	6.037119201	4.893423359	6.971781014	4.081430599	3.315433508	3.568724927	3.684932726
Zm00001d044204	0.067512266	0	0.13634472	0.989330845	0.689419193	1.13728675	1.311514391	0.844570918	0.624460111	0.093110546	0	0.018696756	0.349411321	0.573572207	0.565887099
Zm00001d044205	1.130155337	1.392823328	0	0	0	0	0	0	0.014987043	0	0	0	0	0.026643354	0
Zm00001d044206	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044207	0	0	0	0.022642988	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044208	30.31931365	31.48050954	34.64515884	62.89201859	25.66809565	47.84784634	3.367914342	1.992619324	3.348753122	0.25324022	0.273648644	0.049310126	24.21492062	23.18484182	26.75473032
Zm00001d044209	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044210	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044211	9.148679265	8.887771235	10.1343219	26.14359383	13.01000735	26.88320299	12.37646458	5.195082447	11.22325127	0.752290886	0.470178125	0.068838057	64.32344779	70.74870201	51.79197409
Zm00001d044212	16.64809922	15.07790693	11.62465938	14.02433705	17.22515859	12.42740627	16.46909635	17.42746151	15.13796297	0.935589764	1.700838946	0.406679005	10.00255442	8.468947066	10.74942852
Zm00001d044213	18.46038531	20.61360456	18.57696814	12.89945337	13.80228344	13.01417906	11.29702011	11.07863357	12.82094665	6.50318967	12.29138493	7.648141829	9.455353662	9.534481546	9.146881984
Zm00001d044214	0.369492809	0.46537756	1.377620251	0.230407701	1.947443928	0.905358494	0.43175235	0	0.455687108	0	0	0	0.413474317	0.405050992	0.85436822
Zm00001d044216	3.873218207	3.372356617	3.473700399	3.020661755	3.278919093	3.101922995	3.400362415	3.283940642	3.547904372	2.131789519	2.728866623	1.836796442	1.692532508	1.800891076	1.630500516
Zm00001d044217	4.841139863	5.24485859	6.640024043	13.64315097	8.194632256	13.10608483	3.347512252	3.344976953	3.682161344	0.550142547	0.960310759	0.187463497	8.055071948	10.11051684	10.4743202
Zm00001d044219	0	0	0.006448064	0	0	0	0	0	0	0.264755508	0	0	0	0	0
Zm00001d044220	0.322843123	0.427066795	0.316052984	0.596081137	0.358851228	0.536944473	0.381457188	0.441468659	0.387033457	0.194021249	0.229713235	0.055942273	0.534843758	0.557559637	0.573429857
Zm00001d044221	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044222	12.46253767	12.0174255	12.66936055	16.68585796	17.17335371	16.93537562	14.26293629	13.51206532	14.08496908	5.354516155	7.679285585	4.191819668	8.595740258	8.423894889	8.170844961
Zm00001d044224	25.83416754	20.94240094	25.10357254	24.46917585	32.5934735	25.91458838	40.42352827	49.74417537	40.29834552	64.1199239	77.81524048	60.99185506	22.9005652	21.7726527	26.88243588
Zm00001d044225	33.07151535	32.36217384	35.1029555	26.60296312	37.07214406	28.62351686	30.67498828	29.78925334	30.69138996	38.28342707	39.3488528	28.84559587	20.79619162	22.60937902	25.76837329
Zm00001d044226	4.867907569	5.504098411	4.9204136	12.11251953	14.64016301	12.77968464	9.612604198	12.84448908	9.336581057	7.683638305	10.15457919	7.195765438	10.18724237	7.580072752	7.199410353
Zm00001d044227	4.614762505	3.41473239	5.878621435	10.57542183	15.77162527	11.44877386	8.088525037	10.32883055	8.003365346	7.597643729	5.601137437	4.888373407	4.518558996	1.960310075	3.401250698
Zm00001d044228	43.49360001	37.36688045	6.480154791	171.5213104	118.7358504	256.0669643	3.216196409	1.653916166	2.07254369	0	0.206191071	0	1.138496725	1.19496771	3.465726234
Zm00001d044230	0	0	0	0.280789623	0.148330016	0.720228006	0.058462349	0.01508179	0	0.897030234	0.157729777	0.180125199	0	0	0
Zm00001d044231	17.89486716	14.62912467	30.25164469	56.14080328	138.0330048	70.74125321	87.47197304	71.76743235	82.72573396	66.2986827	83.18585064	32.56655716	17.78611881	10.53955853	23.5159643
Zm00001d044232	54.4414034	56.87733027	50.42596961	23.3181768	16.92220279	23.1785056	15.93298879	13.39825009	14.98180793	12.94421146	14.40669787	13.93567914	18.71841417	17.54141017	16.25299013
Zm00001d044233	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044234	0	0	0	0	0	0	5.722329653	0.492071529	0	0	0	0	0	0	0
Zm00001d044235	0.886856492	0.257769008	0.101740418	3.539356623	9.672110485	5.24873003	69.71852492	74.17978301	47.73754495	0.112903506	0.154849083	0.10579901	7.130162406	2.33328775	10.9473389
Zm00001d044237	0	0	0	0	0	0	0	0	0	0.38322938	0	0	0	0	0
Zm00001d044239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044240	0.140578241	0.022132352	0.021838881	0	0	0	0.020533209	0	0	0	0	0	0	0	0.020315954
Zm00001d044241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044242	7.885068527	8.264152822	5.851551576	7.59357497	3.587822008	10.69118185	9.235797848	3.340199235	4.815597992	0.273826138	0.09537961	0.12567944	7.226078476	6.156438934	5.935377561
Zm00001d044243	2.63521636	2.779980991	2.795269573	5.892722926	6.767636632	5.325997818	4.952297519	5.636469427	4.698976083	1.134302503	1.799126445	0.613584153	4.479685837	3.293619054	5.239495713
Zm00001d044244	5.197328598	4.221730866	2.667953268	9.394032995	11.51298807	6.782706402	6.205101955	9.627250688	8.546330113	0.934952999	1.947202336	0.792680655	11.9691133	11.97299488	13.28036551
Zm00001d044245	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044246	30.02574731	42.99078293	37.53964831	33.80121398	33.06490734	40.84437486	28.30629003	26.00991904	21.33435103	38.95022396	33.57236787	38.01038233	30.47967641	28.57696926	34.81784698
Zm00001d044247	50.06440472	54.07628336	49.01479848	69.84094905	106.783404	80.39583425	81.7345455	106.3139225	85.02775343	141.7696453	121.0718591	131.9094016	60.47768462	52.41616196	66.08430033
Zm00001d044250	5.558559711	5.219024006	5.145644174	9.484890475	9.494028508	9.725036899	7.05280412	7.176466498	8.326595328	0.222476525	0.618736536	0.08934733	4.005151298	3.566201161	3.974765424
Zm00001d044251	4.062715216	3.696166609	4.701105919	4.963537627	5.914532171	5.354309984	4.97312437	5.00334242	4.91802875	2.339180831	3.581275966	2.333264548	3.637047025	3.934814454	4.026697074
Zm00001d044253	10.97798376	4.546783339	6.743893885	12.34912346	49.07481643	16.37940952	46.78677777	41.49591453	32.53408569	15.78438977	12.31418899	6.206606645	3.931364095	4.11967731	5.444151013
Zm00001d044254	0.572840946	0.48458639	0.520664064	0.618455193	0.732270583	1.110323956	0.829212925	1.546378633	1.075524169	7.794296001	3.752015556	8.703988956	0.564486826	0.506123753	1.334449424
Zm00001d044255	18.31175135	17.6312549	16.60776187	13.5801001	17.97579889	13.77675094	12.54362197	12.97855984	12.76405262	1.195027953	4.698470136	0.629238013	6.528817708	6.036971262	8.414925299
Zm00001d044259	0.048223047	0.075921383	0	0.180425078	0.413016106	0.251089282	0.436701892	0.116292037	0.193285272	0.016626883	0.12162162	0.013354826	0.620576092	0.211455192	0.7108434
Zm00001d044260	3.086875638	3.154620405	2.529142521	4.021072609	3.169975521	3.765021868	3.154532889	2.453784171	2.645237115	0.787829687	1.309093775	1.813187228	1.908477178	1.941852535	1.654244292
Zm00001d044261	20.27497265	23.03103574	18.11002253	23.11117785	15.56453749	24.2526682	21.23708349	14.57577395	15.87725283	1.834215101	7.549388414	1.498728202	25.87071827	22.7009108	24.54398459
Zm00001d044262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044263	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044264	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044266	6.128096297	6.443300498	6.589922902	9.216687194	10.69211449	9.22759493	9.303101524	10.19661764	10.25442215	7.254027031	7.744747458	5.415290682	6.059504564	6.325714067	5.984724958
Zm00001d044267	2.762316513	4.812955136	3.813580277	9.268991095	5.119196689	7.987686907	6.0306314	6.761448568	6.797669373	5.780522522	8.56764152	5.194173494	15.47702093	17.70732484	15.03137891
Zm00001d044269	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044270	2.697335872	2.592679759	2.311292958	5.240758345	7.800392617	6.609211019	5.159059492	5.066854914	5.322501132	1.13560058	3.25820909	0.754859689	2.764223941	2.365531442	4.300231321
Zm00001d044271	17.17917705	16.4907738	14.32639962	15.16245804	18.15081128	15.59113797	16.36196771	16.61755599	16.50791237	11.41865125	15.82266497	10.47044999	11.81285024	11.59712283	12.30592686
Zm00001d044272	4.503148057	1.740576327	3.300944775	7.112644834	47.61946932	13.37122531	32.93431621	39.45525605	29.82997914	33.26567074	19.18657513	44.4175186	0.226309907	0.458178982	1.293769627
Zm00001d044273	3.37046281	2.959132317	2.773217878	3.710577024	4.676152627	4.475626355	4.70168861	4.123581148	4.231184249	2.846591826	3.616875825	1.976278284	3.350876887	3.854286662	3.60160544
Zm00001d044274	2.987468115	3.252091695	2.755773047	3.251283224	2.453179242	2.977438499	2.336941853	1.821585865	2.717891248	1.237000439	1.813670313	1.575657048	2.278561335	2.403463606	2.087016604
Zm00001d044275	0	0	0	0	0	0	0	0.011123074	0	0	0	0	0	0	0.01066519
Zm00001d044276	0.021674568	0	0	0	0	0	0	0	0.066826885	0	0	0	0	0.005940106	0
Zm00001d044277	2.646582216	2.44587638	3.30297128	7.424850766	11.28790348	6.899500453	8.460698952	9.586907382	7.232738273	1.606950468	4.114058593	1.118618424	3.383810719	2.986429127	4.034844071
Zm00001d044278	0.889304473	1.331245326	1.435893355	3.518216873	2.674944808	2.482675944	2.325316175	1.889706845	2.067660511	0.035186403	0.156266434	0.028261959	1.101201928	1.266553741	1.571732312
Zm00001d044280	0	0	0	0	0.011882491	0	0	0	0	0	0	0	0	0	0
Zm00001d044281	5.42321894	5.529139478	3.318568999	2.653226828	1.775246057	2.643658086	2.328034192	1.856383978	2.427072374	1.577814685	1.849375663	2.399802642	2.183172371	2.075990003	1.993842758
Zm00001d044283	8.320218521	9.002605394	6.590139131	3.381305806	2.880395898	3.775962729	3.779051571	2.891365875	3.727190391	3.713792946	3.134256762	5.677544877	3.234992406	3.588267228	3.227741235
Zm00001d044284	1.052801427	0.816004488	0.968737528	0.820630169	0.646924866	0.923961751	0.609184823	0.503503402	0.62110777	0.945885592	0.753166983	0.975609336	0.614547444	0.632545385	0.526665341
Zm00001d044285	1.6385573	1.919112278	1.370290431	2.630815908	2.285151755	1.496212028	7.14416539	7.187399866	12.5733146	2.740320797	1.612465631	0.47498452	0.556934043	1.007239655	0.486877437
Zm00001d044286	0	0	0	0	0	0	0	0	0	0.020037073	0	0	0	0	0.016796825
Zm00001d044287	44.42587959	42.04038404	47.66898935	80.30714284	101.3093938	64.67869147	77.61086353	92.74170199	83.9410186	19.01019756	33.23715243	14.77636676	56.41182696	52.75038457	54.5652046
Zm00001d044288	20.79950726	19.6412101	19.88737368	29.79869141	41.74311815	33.03727898	32.07180568	36.61098703	36.89184297	4.281269869	8.738555212	2.037774895	24.90107982	21.67827954	25.90799776
Zm00001d044289	6.299716928	6.429192301	6.027703721	11.20329832	9.022168314	11.16608809	14.51520718	12.64454533	13.59864912	11.80424303	10.79314703	14.46958096	12.38207495	14.00635717	13.04224651
Zm00001d044290	0.051345261	0.112468777	0.063812042	1.080252436	1.005999161	1.178784446	1.327758329	1.079399557	0.980129096	0.058498175	0.430715101	0.022256589	1.421436121	1.502604251	2.121550869
Zm00001d044291	19.36668924	12.97827592	22.47236291	10.18737637	23.70578353	10.67642409	18.71445268	24.73950303	20.44507831	31.77424711	26.27155558	22.92409716	8.038627156	7.065078929	12.21639508
Zm00001d044292	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044293	0.004639034	0	0.023061622	0	0.006112608	0.039784162	0.021682846	0.033561716	0.022884863	0	0	0	0.072677196	0.030512833	0.06436028
Zm00001d044297	3.501874896	3.585149733	3.308691469	3.950681695	4.642455532	4.180066973	4.124476154	3.987452259	4.028222633	1.707367039	2.698202211	1.596766834	2.75388276	3.06640671	2.770907677
Zm00001d044300	31.61923346	26.12602903	24.19699447	8.22043926	14.74244715	10.02789282	12.31569152	11.50141529	8.533922359	30.24292704	23.59245674	30.84767618	5.682062413	4.793696624	6.333436119
Zm00001d044301	9.394138102	11.40739343	10.44574708	6.202567865	9.232647464	7.020553769	12.06829841	12.63315087	12.832731	11.2565343	13.92289791	5.301142521	11.8851304	11.71569882	11.71061177
Zm00001d044302	0.119923105	0.688758788	0.196733839	0.789692079	0.606782529	0.464274189	0.397969622	0.289199934	0.461443156	0.582185938	0.387140819	0.318828895	4.809649323	4.517100237	4.880391095
Zm00001d044303	6.595254398	7.460317878	6.303671277	11.09148116	10.8425705	11.32835094	14.57051867	13.97358668	16.6093618	12.89804061	11.78088342	13.29411818	15.75964705	18.41499587	16.3332396
Zm00001d044304	10.78100662	12.8789162	11.34610504	8.486941386	7.368083667	8.961597544	7.409655915	5.722212112	6.90258928	2.74879203	4.538159729	2.828982338	4.734450518	4.179787938	5.18609792
Zm00001d044307	57.87761905	60.31794779	53.88002954	33.96421067	33.9962099	32.33652307	39.52257564	36.90892508	38.20518005	51.35227793	59.58248607	46.528893	27.70381089	25.42685368	27.12384616
Zm00001d044308	0.878865038	1.06593622	1.456341408	9.215210867	0.72913228	0.279152202	1.06498913	2.001676684	1.40503525	1.840595964	2.66807428	2.848584354	0	0.142732254	0
Zm00001d044309	0.021048859	0	0.026159584	0	0	0	0.012297796	0	0.01297954	0.029029847	0.026543286	0	0.047108698	0	0
Zm00001d044310	4.185686156	3.242779538	5.931757679	79.67386655	46.54240854	99.31423724	84.67719188	76.50357455	60.4969803	6.188057131	4.78463202	2.318356585	184.4418767	188.4584497	211.8640294
Zm00001d044311	0	0	0	0	0	0	0	0	0	0.048973729	0	0	0	0	0
Zm00001d044312	6.541102581	7.283951032	5.912684685	6.570402918	5.861694738	6.222259694	7.012756081	7.494713439	7.437077211	4.601523725	8.87185559	5.261061015	7.508688621	6.610666504	11.01025535
Zm00001d044313	9.320973542	8.406304586	9.18931537	6.873570822	6.928046924	7.623113822	7.239633705	6.692510967	7.149064211	6.219765129	7.32783663	6.659046576	5.853996408	5.845507675	5.107375995
Zm00001d044314	0	0.006974066	0.006881592	0.006905699	0	0.006783772	0	0	0	0	0	0	0.006196253	0	0
Zm00001d044315	24.57509048	23.80648361	26.1641474	32.44757918	38.7464825	32.44771286	33.99918968	37.19857338	38.42866545	25.83307457	34.95281169	25.81721523	32.3799312	34.37476935	33.00294117
Zm00001d044316	0	0	0	0	0	0	0	0	0	0.124045299	0.022684032	0.019926806	0	0	0
Zm00001d044317	0	0.069431329	0	0	0	0	0	0.022156447	0	0	0.023171861	0	0	0	0.021244371
Zm00001d044318	0.00865816	0	0	0	0.011408395	0	0.111287654	0.020879539	0.05338956	0.274643677	0.262037207	0.07672893	0	0.009491379	0
Zm00001d044319	0	0	0	0	0	0	0	0	0.021953676	0	0	0	0	0	0
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Zm00001d044321	0.081782057	0.085837337	0	0	0	0	0	0	0	0	0.0171883	0.015099075	0	0	0
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Zm00001d044324	18.2429851	21.42470702	16.86560358	18.46971025	14.43428598	18.02034042	14.11575979	14.20964054	13.26187825	3.443141462	3.164078182	2.166467273	12.38521047	10.53356158	12.35965065
Zm00001d044325	0	0	0	0	0	0	0	0	0	0	0	0.463130658	0	0	0
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Zm00001d044327	14.58621437	17.75028082	11.29756372	33.14446323	16.18976745	24.46494268	30.72084028	24.61555212	28.04208553	28.24545427	19.30025691	16.68447819	61.83911829	60.49465609	61.34111333
Zm00001d044328	8.597982067	10.67130324	8.476996238	14.17168921	9.201252397	12.06045922	6.703572355	5.992709307	6.020280487	1.545815854	2.296788863	0.588130971	10.8674164	11.01786762	10.50310705
Zm00001d044329	0.782307503	1.050777463	1.312203042	1.821686819	2.883370361	2.034158305	2.192624679	2.542911062	1.909363628	1.120428369	1.365943652	0.760551721	1.487614081	1.06749333	1.745659916
Zm00001d044330	4.241596076	4.752260221	4.433540698	5.787346389	5.117620217	5.5455566	4.793560705	4.862496131	5.137373619	1.536679715	3.24519794	0.859081099	4.392267118	3.549799744	4.750160701
Zm00001d044331	0.016972357	0.053441868	0.147653071	1.100693773	1.017542474	1.206020688	0.366895697	0.173950798	0.376769229	0.035111519	0.085610749	0.028201811	0.313378114	0.046514236	0.098111807
Zm00001d044332	16.8337704	17.43331373	17.32552771	18.51818244	18.05122948	17.93060619	16.90283577	18.98099565	16.94787332	21.02593558	23.51703519	23.21927653	17.37750204	17.14785895	20.01960222
Zm00001d044333	1.563837715	1.26472866	2.260646355	6.867286968	12.26590699	8.097262555	10.26198135	11.74054228	9.815791111	4.722235016	7.223928807	1.850877556	2.892079843	2.282770822	2.712014714
Zm00001d044334	0.379756498	0.478304714	1.41588748	0.236807915	0.500384898	0	0	0	0	0.26187341	0	0.210338507	0	0	0
Zm00001d044335	15.52346561	20.92937996	20.65186074	57.90457696	30.07732915	53.96462315	39.74127179	33.28784528	33.96015522	9.171989456	5.22757184	4.005930794	162.4804683	156.0956767	152.5311851
Zm00001d044336	0.339951992	0.368552074	0.326229032	1.856896059	1.706695233	1.766118749	0.884976803	0.352829381	0.817282072	0.09495693	0.352719924	0.047668783	1.261636775	0.787790393	0.825862387
Zm00001d044337	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044338	13.34733777	14.33495192	11.93265864	10.52726806	9.78626682	10.48977373	11.41341873	9.464773852	9.711937102	9.0856154	10.93207729	7.00123031	9.379580561	9.160711338	8.182943084
Zm00001d044339	0	0.013194613	0.030379195	0.074036498	0.165644656	0.111233061	0.575338955	1.031590568	0.245477423	0.009632125	0.03082479	0.003868294	6.740740309	8.038943057	17.14617723
Zm00001d044340	0.02791472	0	0.121423735	1.148862902	1.517246705	0.60703848	5.626665388	10.44264202	6.584085549	11.74219515	7.515489715	5.983534623	0.796555423	0.40546452	4.130972833
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Zm00001d044381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d044386	0	0	0	0	0	0	0	0.008853059	0	0	0	0	0	0	0
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Zm00001d044388	6.273166796	6.122300342	7.949379075	21.93481315	15.76347668	24.50503657	13.66256325	9.544118895	13.75162428	0.045297022	0.269211099	0.200105823	3.75802213	4.095515584	5.221139122
Zm00001d044389	1.724392798	1.79472645	2.592229041	2.060443491	3.074872757	2.37827556	3.402495483	4.133549507	3.425569324	9.156866592	8.541806016	7.194720779	0.53152061	0.645205847	3.199363772
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Zm00001d044391	5.510775735	5.242614146	6.673646966	9.655903771	15.32106337	10.71138656	11.02867609	14.7113323	10.98534777	3.783935781	5.995444314	2.034862424	6.797603031	6.731223682	7.886611383
Zm00001d044393	3.850969504	3.757334489	3.35891238	6.566447133	6.652691545	5.698785715	5.247558108	4.978083322	5.019570257	1.72873389	2.649169189	1.382057505	4.770374883	4.589914221	5.286620194
Zm00001d044394	21.74836251	24.12985962	21.40168383	18.99320919	16.29458514	18.28804812	19.0753662	15.52750285	17.13062208	8.185222723	12.84394469	10.02613551	12.14404109	11.41095576	10.98188723
Zm00001d044395	32.71879579	33.918621	34.96597348	18.09879062	24.60792911	17.50190212	43.19157571	55.2241896	41.49797783	213.8708211	160.2257314	251.1941811	14.78286829	12.10649748	17.46023474
Zm00001d044396	60.46296662	128.5899663	189.397658	1234.754001	142.7513143	571.7458464	101.4552852	151.9052663	27.42204646	0.474336742	0.108426821	0.019049525	305.9132645	246.6144048	124.5179887
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Zm00001d044398	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d044412	7.955943731	10.30684173	9.009887312	13.54698771	20.73091067	14.01397101	17.84362726	18.500896	17.96175704	6.426784008	9.684627015	4.316685752	6.459185789	6.541188672	8.175096385
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Zm00001d044456	0	0	0	0	0	0.294879087	0.168748278	0	0.029683843	0	0	0	0	0.158312183	0.111308536
Zm00001d044457	0.770954095	0.751542517	1.089396624	3.062313247	2.323919666	3.2346721	1.295757342	0.846822981	1.536909937	0.305872997	0.52605226	0.269077302	1.323628869	1.151946873	1.703291451
Zm00001d044458	1.024418455	1.250353923	1.24033712	3.266467464	2.908378504	3.422283082	1.197032973	1.591772521	1.751816835	0.371417211	1.045445631	1.292740952	1.766808178	1.447169438	1.575086718
Zm00001d044459	5.35879665	4.904381356	6.151859979	7.511761864	13.17484882	7.149579703	8.514870728	10.45832863	9.949036046	6.12208218	8.128039817	3.95497194	5.203718017	4.910978323	5.841021505
Zm00001d044460	0.458766239	0.313672507	0.342093619	0.016347239	0.207254339	0.321172237	0.306324774	0.331900595	0.14548783	0	0.214878466	0	0.014667833	0.158059208	0.13638764
Zm00001d044461	40.9698837	36.86625567	41.09704172	31.16756482	41.16628065	33.99930668	35.05589219	36.94899923	31.50521348	34.4262813	32.7667939	22.94307716	36.154265	36.76270498	34.97204786
Zm00001d044463	0.903516001	1.10067087	0.699506707	2.967924119	1.561330993	2.135227029	2.353822129	1.702613695	1.729274153	0.197469007	0.454499861	0.153139195	1.232060886	1.461343232	1.444156899
Zm00001d044464	25.28305643	25.58665627	25.20400215	27.65755217	15.66822227	21.05401546	16.88574254	15.03938107	11.70902567	1.781184927	5.07658991	1.482215182	40.73971247	36.65728713	37.43623403
Zm00001d044465	2.323216222	2.457173238	2.239508301	9.286584905	12.68622889	10.43627841	20.22087204	18.04664293	17.37468426	2.238760913	4.263016623	2.078639365	29.1222393	33.43479734	39.48870368
Zm00001d044466	1.254387317	0.149991025	0.246670293	0	0.2510642	0	0.333968717	0.382912804	0.440603388	1.368676356	3.534072124	3.166070909	0	0	0
Zm00001d044467	18.95948485	23.92237459	21.99908756	21.35512572	40.10547616	22.39467294	31.9894123	39.55024915	42.44464694	50.79562433	85.8347984	59.35313158	12.88198778	14.61407857	14.96047635
Zm00001d044468	6.916475032	7.904431501	8.30980368	10.5884813	9.801898167	10.06624365	10.29134173	9.569649492	10.52434047	3.259716326	6.635543874	3.879109065	7.537911453	7.588901227	7.895715037
Zm00001d044469	35.33340034	32.17130365	35.27906854	22.20401322	21.7025008	21.19500145	15.80176179	15.22529554	18.23044653	3.135671638	6.107731005	3.511262967	7.31777867	6.714060293	6.044909708
Zm00001d044470	9.325859282	8.95859232	8.972712228	9.107577976	10.65187162	10.24895011	10.94062109	10.25537869	10.46509013	6.303022064	9.401560889	5.739581793	7.285372588	6.718259555	7.085364031
Zm00001d044471	0	0	0	0	0	0	0	0	0	0	0	0	0.022139725	0	0
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Zm00001d044474	0	0	0	0	0.024915431	0	0	0	0	0.208629438	0	0	0	0	0.131168565
Zm00001d044475	3.204327555	2.459852816	4.129452909	12.54774407	28.65283765	10.66889678	17.03192263	23.86516485	23.24173337	13.59603987	19.84130364	8.354224046	5.932090717	6.69173296	8.259685342
Zm00001d044476	0.224118589	0.216413281	0.176405653	0.726728553	0.433120043	0.576609467	0.008729419	0.018015734	0.009213346	0.267883619	0.17899313	0.190339108	2.98447118	2.79263845	4.439446669
Zm00001d044478	20.08269273	19.27345183	19.11174358	11.3678264	18.66727738	12.87872874	16.36604544	17.22195989	17.73588595	5.551272674	8.265992887	4.199489046	8.256315467	7.069858907	6.746063778
Zm00001d044479	0	0	0	0.062283726	0.02193468	0.00509867	0	0.030108486	0	0	0	0.004610159	0	0	0.033680574
Zm00001d044480	8.792188482	9.046197856	10.42678008	14.4941888	12.89850854	13.72245473	12.00283265	13.28158555	12.93548757	17.25802698	16.40441824	11.87955308	12.88043658	12.5501601	13.80861027
Zm00001d044481	9.833694574	10.51710951	10.43285511	11.38893739	10.92068093	13.3644797	13.73275457	11.94288615	13.66143436	9.874618389	11.91891872	10.99172456	9.016104366	8.842165772	10.10586035
Zm00001d044482	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044487	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d044489	1.296410113	1.806012628	1.977360101	2.645716017	2.821135546	3.850375204	4.223232756	4.831633376	3.02809321	2.031776453	3.096240047	1.218512731	2.307970867	2.131755436	3.361006015
Zm00001d044490	8.815610829	8.524880653	13.28562272	13.24439963	16.09192875	12.59515926	9.830093864	10.59876482	11.76363626	0.414683958	1.629598804	0.432291401	4.946793577	5.407061135	6.64184335
Zm00001d044491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044494	2.535424653	2.37970657	2.47463342	4.444191439	4.89749897	5.480647078	5.430651766	5.09702013	4.858581273	1.920273158	2.789923063	1.238476035	3.896847119	3.874051195	4.373924691
Zm00001d044495	27.32885107	28.64111496	23.05753017	231.7821152	314.7670204	451.9262844	716.3696055	598.5280677	657.0862858	610.9903106	370.0904395	322.0818866	122.3426852	106.3188252	185.8757202
Zm00001d044496	3.032436359	3.619302849	3.997536027	5.82146017	5.303789229	6.183070168	5.150587778	4.161363293	5.249125617	3.106799193	4.361180425	3.783093847	4.754790877	5.283204052	5.204607248
Zm00001d044497	11.27377327	11.87473833	10.39302793	13.08722156	14.16538459	13.31072296	12.43969558	15.71581268	14.60767337	59.81866592	27.31744722	39.82643266	12.23245209	11.51393383	12.85803362
Zm00001d044498	9.58178707	9.860408338	9.165303181	7.245293939	7.213565033	7.636410773	7.413818372	7.310763959	7.374284097	5.129200616	5.432044917	6.393291422	5.873575695	6.051487374	5.601985721
Zm00001d044500	3.022419706	3.159051576	2.49011297	5.669272244	4.698433074	5.367092377	5.765226819	5.416803018	5.318990789	3.398964452	5.414222908	2.445241126	4.321378849	4.254616522	3.909386449
Zm00001d044501	27.1013526	25.29700489	25.62082106	29.89042128	29.00643885	29.09681685	30.85087559	32.93971944	25.57312835	38.77389149	35.99999941	28.36565011	28.41159238	25.74466957	24.25230423
Zm00001d044502	0	0	0	0.026557897	0.042088449	0.156533945	0.062207309	0.077029889	0.026262341	2.628523755	0	0.058973413	0	0	0.036929467
Zm00001d044503	7.169787127	7.902127641	6.840617371	12.15811961	10.25872289	13.23382926	12.72017347	10.27374067	10.74976035	6.963808486	8.14999485	4.915040785	9.573830081	9.842936081	9.790136987
Zm00001d044504	0	0	0	0.044939826	0.28487912	0.185414747	6.762147638	3.858235068	2.924132401	0.079514541	0	0	0	0.047401856	0
Zm00001d044506	19.51566668	19.02110914	17.84787106	8.121239209	6.897853517	8.337474787	6.892282338	5.777315835	6.022739198	3.483778668	5.079336185	3.937011919	3.980038649	3.923487862	4.043524231
Zm00001d044507	0	0	0	0.093170327	0	0	0	0	0	0	0	0	0	0	0.057580372
Zm00001d044508	0.070072957	0.035302859	0	0	2.963837971	0.463584385	1.83411762	2.027808864	2.177768629	3.411468261	1.767284939	1.459324466	0.141145	0.023044931	0.048608341
Zm00001d044509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044510	50.02949131	49.53577814	46.6657965	28.22764449	29.36385959	22.07868479	33.30815929	31.98107835	31.46505065	14.53236615	28.4326237	15.49381468	19.34950551	18.67364967	18.15286046
Zm00001d044511	2.994694453	3.246058678	3.682341285	4.396940591	4.113353188	4.430487326	4.109027094	3.944656382	4.258473913	2.440559356	3.51892357	1.945194877	2.858640394	2.442270617	2.775066241
Zm00001d044512	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044513	19.75525165	23.01213556	20.87143156	42.36128032	17.08031675	29.8104241	14.92357266	12.64692642	12.6950155	0.165439083	0.311990969	0.070593456	59.14292647	65.12124857	60.28918335
Zm00001d044514	8.512277724	7.727459041	10.18432211	6.037881773	8.94091762	6.526755217	7.565192548	8.289751727	8.021386333	7.441402645	8.325566912	6.751561051	5.319782618	5.064179554	5.225061841
Zm00001d044515	4.249282838	4.124368605	5.111008463	3.838687404	3.650087211	3.802335813	3.007145667	2.082456559	3.321471697	0.483458602	0.991912158	0.24624996	1.645622612	1.818296448	1.887998815
Zm00001d044516	40.90144876	32.39904673	38.40151177	37.69605408	88.41891971	39.42632789	70.45082587	83.56890757	68.98638069	51.78167557	51.07887276	37.00357917	57.08858127	57.65482515	88.12047602
Zm00001d044517	4.331608844	3.222071719	5.959929791	1.584427459	4.913389294	2.587005186	1.737827172	3.27805786	1.609574158	2.033194122	2.30192927	2.608117436	6.288271636	5.219030002	10.25147024
Zm00001d044518	1.811509257	1.758735347	1.946478854	2.176867791	4.985201096	1.930369266	5.490316632	7.986229227	6.760459462	2.706567413	3.640716744	1.818578894	3.040705539	2.316813403	3.261516776
Zm00001d044519	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d044525	165.595928	172.1396056	175.5906422	223.0534225	147.8315308	227.8247406	128.5306336	106.1235457	117.5324759	28.15205811	36.59866524	14.90206255	244.4875143	253.4364287	225.6035401
Zm00001d044526	0	0	0	0.064219096	10.38086636	1.892557303	0.91757538	16.6240945	0.762053017	0.124278906	0.66556916	1.497324966	11.78362871	9.864250285	13.54358661
Zm00001d044527	11.75027587	11.75163261	11.85934951	16.44345764	23.40486443	16.68800392	18.20490087	22.92173344	23.2907668	22.27835466	24.1767079	19.01337279	13.53977487	10.82994002	12.56100576
Zm00001d044528	77.5188051	72.58528456	69.5592381	47.23562136	60.15797588	49.17830287	51.98903053	54.69955237	55.12521277	51.26589874	62.14298704	55.4890883	34.53023728	30.1730671	28.71108948
Zm00001d044529	0.46014782	0.366036557	0.451478736	0.339795237	0.031911172	0.697262365	0.820673643	0.423425589	0.418150437	0.075152334	0	0.046948896	0.176156906	0.225666142	0.510993924
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Zm00001d044533	173.0797869	201.6008527	149.6452834	207.4687006	143.2187907	206.2002781	321.7232638	344.8161763	263.201707	101.3525394	44.31829405	7.832253357	273.3271645	288.9464573	315.0494753
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Zm00001d044541	178.3985868	226.5484802	160.6978248	75.33022471	67.2731208	134.1777379	50.02468025	64.93090421	18.51929413	1026.463804	346.8005668	810.3716482	158.6689281	137.6530925	154.3044079
Zm00001d044542	6.649055362	7.152639711	5.499702678	10.05141019	11.18982997	12.85441036	9.897074201	11.25653913	11.47649971	14.86160188	13.92740152	14.2102491	6.129440782	6.102738798	6.211891206
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Zm00001d044548	25.56698292	24.41217567	17.87328091	30.70506785	19.1056052	34.07832079	17.94575839	19.89188505	15.91156802	4.836155693	9.161010291	2.901032397	23.65977011	21.42605772	18.52564337
Zm00001d044549	2.831281308	3.281398214	3.816081764	4.691490596	4.308613182	7.922657058	4.372305883	3.966833316	3.565524552	1.118277117	1.885741143	0.898207801	5.005310636	4.218477102	5.3095849
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Zm00001d044554	3.493975857	4.00061411	3.649485225	6.742456939	6.124198667	5.662461457	5.983936078	6.651598477	5.88395985	2.530077095	4.716643842	3.310363077	4.381376978	4.697170274	4.07698519
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Zm00001d044584	1.55532999	1.698591208	1.591125352	3.237058226	2.075733963	3.141100503	2.32775639	2.217081946	1.700227999	2.082980886	1.873030038	1.180009028	5.146774631	5.685185285	4.490616037
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Zm00001d044589	0.904714009	1.772541	0.583012492	7.146027085	5.187814017	8.025625815	4.385249358	3.878681465	3.636561822	1.987157049	3.929675015	0.872286162	5.586970373	5.711913926	6.043398732
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Zm00001d044593	10.97164991	11.55084303	11.39403049	9.756038334	8.36827619	9.360655927	9.298631992	8.621190462	8.774375697	15.52874432	13.85041978	23.53332661	7.116751224	7.747840438	7.35272521
Zm00001d044594	0.154707233	0.133321386	0.040478022	0.436663076	0.332596514	0.249391485	0.380579796	0.363265432	0.692894096	0.067378983	0.277234273	0.12627827	0.127563845	0.205299818	0.263587098
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Zm00001d044598	0	0	0	0	0	0	0	0.095979017	0	0	0	0	0	0.087259893	0.023007004
Zm00001d044599	449.9887748	462.7123407	410.9287809	212.4254894	149.1545366	219.743388	142.2310456	121.4383036	156.1153636	57.386198	72.72922968	46.82209846	140.3779782	129.4604196	106.5383153
Zm00001d044600	15.04221361	15.35152965	15.53964397	11.41653239	10.17123198	11.31108106	10.05477773	8.355236721	9.38876779	12.84501682	12.7223862	13.04822991	9.386562765	9.307584046	8.212688267
Zm00001d044601	10.51442172	12.42374754	11.06966575	10.29726927	7.423892306	9.795704552	10.30619026	8.901573961	9.564458135	0.634209785	1.891160902	0.270763024	16.33236083	15.87701694	14.60840206
Zm00001d044602	10.08210363	10.25810962	9.104978557	9.604170704	10.10153141	10.32853082	9.516924139	9.362756601	8.822385058	5.419164707	7.031477404	5.838202026	6.14590134	6.38280317	5.568798554
Zm00001d044603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d044605	0.051925468	0.046714514	0.009219018	0.027753939	0.117290437	0.045439859	0.026003533	0.152053573	0.009148358	0.890056993	0.729630731	6.261536547	0.56446087	0.870101398	2.306979624
Zm00001d044606	24.87465725	25.82845457	30.12719046	62.835051	42.09947574	61.65874602	38.55907129	37.02405925	37.94941853	15.16523138	24.19364382	18.45871602	108.8005487	113.4430713	102.7377784
Zm00001d044607	0.184902572	0	0	0.086475925	0.121818132	0.297321872	0.189051325	0.250819216	0.171027114	0.414393088	0.058292019	1.12654673	0.103455958	0.228033779	0.454266788
Zm00001d044608	0	0.007625762	0	0	0	0	0	0	0	0	0	0	0	0.033186197	0.377995506
Zm00001d044610	0	0.028988164	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044613	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044614	10.52022376	10.56858192	10.97240558	16.44993431	24.55077231	18.35995428	20.68170855	22.5251705	24.30352554	15.86311539	20.57349146	15.78955369	11.06803242	10.15055719	11.40679652
Zm00001d044615	8.585240671	6.022007086	9.820882872	16.63079599	27.27693849	15.64196429	17.71843944	20.12084643	16.88634217	1.275349672	3.776603694	1.012728984	9.007447429	5.598483425	9.755624206
Zm00001d044616	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d044617	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d044621	8.893497435	8.428232543	8.083972305	8.560980038	10.96000943	10.66655257	10.49294553	9.30066987	9.690306268	5.497687663	5.063076019	2.789752832	5.636307801	4.559168691	5.939657799
Zm00001d044622	14.18454047	12.97503777	6.152004782	2.9473342	1.520128397	2.278878201	1.912229553	1.421702574	1.002850438	0.995313658	1.768848559	1.627034817	1.660660418	1.041839336	1.163401781
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Zm00001d044634	0	0.008242685	0.008133389	0	0	0	0	0	0	0	0	0	0.036616921	0	0
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Zm00001d044639	4.569580245	3.668971141	3.169723411	11.59286814	6.169354546	6.716501547	4.740589474	5.28375023	4.024298493	0.043106734	0.323198193	0.103870868	6.001900174	6.105768655	4.589250418
Zm00001d044640	0.029733001	0	0.16258995	0.029665367	3.345766269	0.480836329	1.737150603	2.151073888	1.268748664	0.278845631	0.502423196	0.362305563	0.166360915	0.410688935	0.247502929
Zm00001d044641	8.416197925	8.902828204	9.892009121	4.173710128	4.886325568	5.113942759	4.364940562	4.127915297	3.926476278	5.463737905	6.398653013	5.630921173	1.781372646	2.022709154	1.782924881
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Zm00001d044653	24.23180467	21.68009858	28.29609166	30.22085561	51.5444283	26.40470257	40.7007079	48.80705077	42.24777119	34.93381269	42.06131397	27.01663395	16.5563655	17.03576318	20.71679574
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Zm00001d044664	127.4766612	103.1224964	184.9337834	265.6416468	461.7151531	246.1005815	264.9337959	298.9536835	262.0109733	10.85203409	51.10662078	7.807765385	102.2623059	90.05453696	137.4051929
Zm00001d044665	9.775473331	10.30185061	12.14898703	26.91362568	28.62492078	23.69847522	28.05080208	29.06516564	29.04975255	12.56163215	17.6492545	7.062711984	22.54416895	22.89553403	24.89728181
Zm00001d044666	31.99744223	36.36143336	42.12075149	115.5785415	63.92887359	120.9139818	61.80597496	50.0551967	51.97574006	2.835321126	3.036882697	2.114681447	239.091191	255.3565883	213.556724
Zm00001d044667	0.682819501	0.864687676	0.701025723	4.42915651	0.704124677	1.29573905	0.650441244	0.393764079	0.430206233	0.112597036	0.102952503	0.073995305	2.774004134	2.880216011	2.351135997
Zm00001d044668	0.248514731	0.27618108	0.050870209	0.196901021	0.955397	0.025073551	0.461206798	0.479443517	0.30288185	0.076613093	0.014747532	0	0.451496977	0.105767164	0.763925049
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Zm00001d044671	2.82996623	3.092600344	1.861989014	5.683389962	2.3853965	4.155416344	4.133519454	3.286843083	3.567121455	3.616005436	5.090614503	7.145746544	14.71641315	16.56085197	14.77133731
Zm00001d044672	0.021347961	0.043020536	0	0.175720052	0.185651861	0.094155021	0.024945092	0.175037312	0.078983868	0.058884714	0.005384093	0.00472966	0.028666864	0.093609536	0.009872462
Zm00001d044673	10.35354399	10.35174288	11.08661586	15.6159578	14.56696955	16.57808483	15.52405547	13.44977881	14.47250498	1.297191799	3.108828039	0.614566044	10.77188937	11.03173412	11.81719139
Zm00001d044674	0.573407162	0.714606249	0.735136281	0.858154246	1.725830827	1.308872577	1.318893823	1.622967046	1.808866573	2.48068692	2.382374222	2.106171012	3.485232525	3.235579512	3.035553311
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Zm00001d044686	8.734399449	7.461553542	10.28878235	134.5068958	153.3679713	134.2256839	249.9174491	204.1317733	142.0022292	7.541954194	18.38918889	1.977181967	88.26413283	59.07331174	197.1775056
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Zm00001d044691	4.580140109	2.248225802	2.218414796	2.605845802	9.499209664	2.915840817	6.59689623	7.674921319	5.18782246	18.85488549	16.10566296	15.22101408	6.116323026	5.642835883	7.10301676
Zm00001d044692	15.40714929	16.65649546	14.75715813	11.27395322	8.043594963	9.985059542	10.14208563	6.53122548	9.567268475	6.203833501	7.46636917	7.412603828	7.891085459	8.851580606	7.869595577
Zm00001d044693	2.324621798	2.192677791	2.227238732	25.13463246	16.38113976	19.44655791	8.663507079	9.680724075	10.15414239	2.146773479	4.132401997	0.91887204	61.56090579	63.42764783	61.16316491
Zm00001d044694	53.62027322	54.84927564	51.78389182	61.66729586	73.6973963	66.08496073	98.77538562	103.9756939	114.3076996	318.305507	220.3346232	305.3333335	37.41375418	36.67808422	39.31171223
Zm00001d044695	23.22099291	20.56358577	17.80270287	4.419253592	15.54136625	6.106454424	10.35623621	12.32289424	10.7443872	5.510894839	10.02489674	2.394147125	1.199886255	1.4876689	1.714233294
Zm00001d044696	8.977818536	8.281075187	7.256290958	6.369902661	8.467994543	7.009079603	8.877564587	8.180551156	9.502115727	13.94725635	12.60431386	13.02053568	4.199377529	4.321200316	4.634164795
Zm00001d044698	8.773908999	8.795654867	9.885216872	10.25375374	12.22972539	10.29138841	8.179690073	9.039179325	9.190340727	0.584647612	1.554471674	0.370731273	3.938549526	4.035636565	4.701116686
Zm00001d044699	32.73735398	35.42155752	32.15170886	18.76302346	25.28800055	21.5880147	27.54426909	30.58759273	29.00479859	65.70116695	53.74581551	66.25538678	14.36436384	14.386624	14.37363737
Zm00001d044700	3.352081394	1.959209695	3.784776148	9.645368541	18.21593485	12.0518595	14.46439563	15.63904257	12.10491907	1.933834409	4.862525907	0.606745694	3.971738876	4.611349754	2.381003741
Zm00001d044701	0.488637731	0.314410092	0.633683907	2.689343036	6.571488382	3.266536259	4.394011095	6.064772038	3.687808138	0.197778519	1.714609686	0.200042217	2.163431277	1.589518286	1.510578776
Zm00001d044702	1.45091664	0.991631329	1.684387738	0.988923881	1.111509029	0.571854367	0.578274641	1.003574924	1.123565827	1.419351725	2.262244673	2.329903464	0.91879402	0.671974764	0.884241235
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Zm00001d044970	62.40879665	60.13436799	65.65878211	56.55867493	40.65112373	61.42700276	68.72145354	47.15149332	50.32271528	17.36353861	11.46541438	6.918252497	157.2083417	170.540852	175.4840604
Zm00001d044971	17.09819205	18.2833694	15.11750195	14.83850268	18.74598434	16.87141833	14.92902747	15.89065307	17.11072375	23.01681811	16.34619431	20.61757602	13.4890839	14.6549795	13.96712184
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Zm00001d045054	0.028144589	0.035448214	0.017489089	0.298356035	0.528455899	0.336189477	1.011273775	1.255630798	1.197497876	0.058224042	0.09760088	0.116914868	0.448799452	0.524502468	1.618814515
Zm00001d045055	0	0.011320822	0.055853549	0.011209842	0.023686859	0.110119212	0.336091244	0.281784551	0.15519127	1.847059788	1.02011033	0.876203012	0.251455453	0.729145046	1.361315832
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Zm00001d045064	16.55214528	15.45419025	17.10457174	10.04392192	18.11738424	14.77581484	14.09274409	14.88964142	14.97089283	86.72524914	38.52548282	45.9988556	5.524476297	4.9956289	6.388939361
Zm00001d045065	4.717156633	3.34623604	5.304163182	4.48231095	5.154106202	5.314172236	4.534500459	4.800555048	5.167982346	4.0059955	3.867980948	2.6684985	4.550560122	4.084245044	4.64771471
Zm00001d045067	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d045068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d045070	0.028481737	0.179364268	0.212383122	0	0	0	0.016640455	0.103027476	0	0.216045563	0.413038422	0.331283149	0	0	0
Zm00001d045071	0.057142044	0.269889807	0	0.017816269	0	0	0	0	0	0	0.918738865	0	0	0	0
Zm00001d045072	37.44659114	37.73129609	32.56039708	21.65995608	21.72863819	21.43242941	23.0380913	22.79011568	24.01001204	26.28627778	30.39535353	27.55310277	24.70887373	24.70978427	22.17852142
Zm00001d045074	12.22125457	13.85004086	12.95005387	16.14037821	15.01154694	17.63182685	19.195061	19.99194562	16.41614307	29.8225165	19.92010703	22.25763839	15.83268883	16.15187526	18.17980756
Zm00001d045075	10.19677668	9.773271575	8.016582813	7.429226879	6.24347654	7.304225579	6.06043538	4.942283067	6.042427836	4.750181095	7.143590296	6.186043874	6.699806868	6.28179634	5.437432218
Zm00001d045076	26.49612086	26.40872439	24.72678185	35.98156171	43.25843682	39.57745502	44.78218146	48.42445701	40.01719966	36.65547882	43.21585624	34.53037907	34.07230675	35.72011837	34.66546801
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Zm00001d045078	0.132089217	0	0	0	0.087023461	0.080913682	0.090035313	0.092907225	0.067876099	0.106267471	0.08328437	0.07316122	0.061588365	0.156867574	0.127260967
Zm00001d045079	0	0.077076856	0	0.106849767	0.532190921	0.209926455	0.643569976	0.339428033	0.211321327	0.033759867	0.092604465	0.027116155	0.068480527	0.214673399	0.764112669
Zm00001d045080	1.427352727	1.001062613	1.189448022	3.450507122	3.924563751	3.403062454	2.657652415	2.619729032	2.404755563	0.182062865	0.846213429	0.262002824	1.588020855	1.486327729	1.592981663
Zm00001d045082	0.016210949	0.081671003	0.060441047	1.489362666	1.502341378	2.032404571	2.85400249	0.886117742	1.812662077	0.089430287	0.006814176	0	0.090702864	0.005923671	0.074968279
Zm00001d045084	37.71984529	34.8736176	30.51343004	13.1339515	12.16454397	13.93799019	10.68432305	9.176020389	11.42356464	8.910616391	12.44643583	12.13848919	8.197648528	9.016569451	7.651843796
Zm00001d045085	50.80507053	53.57605127	48.69250193	39.82771882	46.15934496	40.006054	44.54490138	51.00125891	51.16416286	28.3212444	42.99291306	25.49068274	41.08031624	39.145315	46.30825641
Zm00001d045086	0	0	0	0	0	0	0	0	0	0.61900118	0.340590003	0.391588946	0	0	0
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Zm00001d045089	0.117373635	0.140792884	0.291744599	0.82253477	0.72909721	0.8764877	0.078372054	0.087611264	0.199898719	0.061667655	0.077530053	0.030957425	0.262689734	0.189940101	0.226166567
Zm00001d045090	0.177961204	0.072045898	0.118484308	0.974974847	0.988207832	0.739733869	0.230227776	0.498133777	0.203798697	0	0.120222208	0	0.28449186	0.390174642	0.249836174
Zm00001d045091	0	0.013225015	0	0	0	0	0.01226946	0.189912399	0	0	0	0	0	0	0
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Zm00001d045094	1.615166877	1.889000897	1.548514915	4.115062099	4.803695021	4.042406574	4.300399145	4.354106345	3.044835883	0.461427577	1.236614759	0.230041101	2.078537138	2.276489119	3.174500652
Zm00001d045095	0.014684462	0	0	0.073255295	0.116093596	0.143923799	0.051476381	0.070824474	0.126770098	0.16201835	0.092587887	0	0.032864769	0	0.067908967
Zm00001d045096	9.15895868	10.71348818	9.593035396	11.66212463	14.39590485	13.9262447	12.87859046	11.94655681	13.63989276	28.81195984	16.56189238	16.67582592	13.08541685	12.46100692	11.1217863
Zm00001d045097	0.256283966	0.291552803	0.304811092	0.408984119	0.43936235	0.513176393	0.312348152	0.176108244	0.27188749	0.235638561	0.104252356	0.161792329	0.669176637	0.743151407	0.678620837
Zm00001d045098	0.328986913	0.223622983	0.116818829	0.247481457	0.564223155	0.601382132	0.341707742	0.321124602	0.457253641	0.208858548	0.197553834	0.202464873	0.379834123	0.200359448	0.17508348
Zm00001d045099	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d045102	2.918714388	2.10938111	2.473561083	2.76223347	3.989753355	3.508917163	3.41760826	3.043723404	2.843746444	13.63276008	7.03215071	16.30725598	3.076006673	2.640831788	3.199045852
Zm00001d045103	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d045104	15.53511987	14.5446	15.61507042	15.17823532	16.20273348	16.21396467	14.92903681	13.24295999	14.87160193	1.916064039	7.0616142	0.895018772	9.9546239	12.27034471	14.04201634
Zm00001d045105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d045107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d045108	13.68432897	12.89773402	14.77730841	18.7813174	20.99891107	22.44447879	19.23407092	19.48443002	20.49413485	26.18734095	29.80647085	30.72392815	13.5840571	15.57545217	14.12530906
Zm00001d045109	17.41248106	20.01237897	15.91524812	11.00996734	9.722759408	11.39366404	12.2412669	11.12240909	12.34140139	5.372213378	7.724744729	5.095172441	10.47897385	11.08053411	10.6046574
Zm00001d045110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d045112	0.419923955	0.793343663	0.509256532	0.827801164	1.441286994	1.335947621	0.300740056	0.159249803	0.258941349	0.359629968	0.345907612	0.153807103	2.171431509	2.312814073	2.55664981
Zm00001d045113	2.436812337	3.136876527	2.549710874	4.815611547	5.323885455	4.587901201	5.443587951	5.422783031	5.126629272	5.436533168	4.496373593	2.054315276	6.586597105	6.128320642	7.550745084
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Zm00001d045117	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d045119	0.142408687	0.228281795	0.080448152	0.435941844	1.262334629	0.523410379	1.119448801	0.686849843	0.367225122	0.624925182	1.175445312	0.702721831	0.405643364	0.496724464	0.987863254
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Zm00001d045121	15.64868026	12.60674568	12.83400866	21.43449929	36.09204786	22.76087421	24.70394428	29.58360394	25.26052659	2.996580015	7.850295478	1.703741908	8.468840037	7.199058075	11.6567864
Zm00001d045122	0.182603476	0.34498463	0.226940137	0.161811806	0.145630473	0.105969905	0.213372163	0.156442425	0.160011044	0.629600746	0.775642413	0.686686838	0.451697075	0.458298468	0.277782286
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Zm00001d045124	5.274038789	6.244977353	5.828029873	7.462617234	5.828860441	6.691226581	2.345265337	2.435152061	1.846819715	3.26823764	4.159171537	1.987850406	1.906633801	1.795821777	2.009611596
Zm00001d045125	13.07610357	14.03066263	13.58418595	39.63040714	38.42440599	67.01706702	46.45533516	36.00087023	30.78500287	0.289008055	0.486225488	0.176421262	53.66217234	61.8955664	59.46318998
Zm00001d045127	3.265136868	3.876575671	3.582304952	7.210018237	5.847261287	6.883204987	4.424240132	5.232985818	5.241894463	0.123528136	0.287502209	0	3.826915362	3.391910033	3.304252553
Zm00001d045128	4.763032871	3.831910308	4.782265263	12.20238131	19.08561895	15.53223295	16.69681184	16.72015704	16.07913337	8.165416655	11.04613749	8.230637236	5.487523278	5.144240286	4.720042277
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Zm00001d045138	8.540968385	12.36830361	8.195074311	58.83372031	40.26902083	59.49249949	83.6520178	63.87275148	53.20146985	1.89136845	2.401394858	0.88945639	51.87512398	38.26952929	50.76097338
Zm00001d045139	46.66462381	47.54669255	41.62302715	7.654900834	22.82138205	11.43767157	10.50551478	15.97172362	12.9478368	25.64605237	46.57329711	40.69899153	7.157216255	6.537342125	12.25559644
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Zm00001d045171	1.111912906	1.423799393	1.622074038	2.585260074	2.808124389	2.954775247	2.672784493	2.754847781	2.9613485	1.142830975	1.859528383	1.129082769	1.884174601	1.770333247	1.958892278
Zm00001d045172	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d045173	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d045174	15.18815308	12.7052592	23.91887587	28.80319961	41.72418873	22.27797187	26.45486174	33.06024541	26.91587638	2.327440788	9.038375605	1.533341461	11.98846131	11.05828533	13.98628031
Zm00001d045175	0.129462442	0.293505166	0.225254826	0.548963803	0.579991586	0.634436823	0.756384325	0.655629395	0.255460954	0.392810114	0.065302517	0.028682524	3.563866702	5.307855706	6.85517228
Zm00001d045176	30.77147176	34.22038576	27.39811842	34.60298867	26.3590682	37.20548912	26.7019736	25.5018315	28.70295688	25.71922845	30.1153086	23.52799099	26.13711049	24.60879056	24.55559011
Zm00001d045178	1.157946042	1.035020037	1.578366371	0.745362618	0.541400054	0.777965154	0.611059337	0.720629343	0.737067672	0	0.141310365	0	0.33439453	0.491373334	0.863705578
Zm00001d045179	0.521139794	0.34186328	0.485755552	0.966790129	1.195964413	0.758180219	0.964173768	1.387663596	0.974776679	0.203642346	0.468236474	0.103432023	0.709526132	0.523684097	0.702926839
Zm00001d045180	22.22880019	21.62229403	18.0930965	11.68131868	12.63376374	12.54586711	14.43527728	12.72507304	12.51661173	9.463425349	14.09786636	9.436331347	10.43746476	10.41073809	11.17567437
Zm00001d045181	6.268322537	5.100606887	5.45180668	8.041739946	11.17539978	8.54659906	8.637175605	8.472464946	9.420778666	1.789432435	4.207263583	1.138627843	6.373348168	6.175779523	5.928802966
Zm00001d045182	3.40322056	3.975796807	3.354618168	3.150396253	4.479281913	3.302320972	4.502339423	4.897883389	4.266757189	3.790187637	3.911785327	2.585573719	2.559236946	2.3688484	2.337249368
Zm00001d045183	133.9824028	144.0765395	123.3540815	36.85094521	32.9512527	31.33311109	35.95387633	35.9226438	36.55601959	36.64961714	45.73139065	46.38809637	21.49675356	20.60992249	19.84239886
Zm00001d045184	0.031867678	0	0	0	0.356917899	0	0	0.057637749	0.058952528	0.263704692	0.984561031	0.794285272	0	0	0
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Zm00001d045188	8.473046118	7.616502445	10.79950678	19.79462055	22.71709385	19.43451264	28.74053365	36.67725928	33.64605324	12.84474138	12.82610964	4.299543021	10.69347298	10.50411704	11.89943266
Zm00001d045190	1.92665071	0.886409175	1.073158966	19.75802819	15.8763962	16.3577687	18.41276387	16.64689301	19.87670896	0.777875889	2.177799615	0.530799475	27.45249069	27.23246992	15.45380238
Zm00001d045191	72.76361218	87.18709664	62.58645313	28.78170469	25.78401227	31.92334588	22.60320213	21.23288648	19.98085949	13.81753548	17.90887425	12.34153342	37.47003005	33.07180893	31.16339962
Zm00001d045192	0.209073925	0.255013718	0.196929617	1.556253433	2.39817437	1.380482237	0.545181171	0.477654752	0.553690646	0.688998552	0.793722033	2.169750731	1.263386352	1.425829047	1.600427526
Zm00001d045193	6.514247421	5.885518237	8.851545617	10.82155001	16.21704855	9.779194684	9.753378848	10.91279598	9.769190452	1.629138771	3.515880896	1.799236125	5.462379261	4.018085252	5.884501825
Zm00001d045194	34.91339021	33.61472175	43.11969679	52.07887216	75.47638343	54.00649778	63.28411503	82.07171507	76.66678398	70.46168361	84.27615076	76.48612042	33.88842095	37.85532338	39.69294903
Zm00001d045195	7.799770253	8.086614065	7.928969886	7.413703939	8.33875842	7.243047052	7.59713314	8.299265755	8.218413899	5.99402591	7.424566803	4.985209864	5.208467678	5.360294985	5.218575736
Zm00001d045199	30.56891524	28.79248767	29.38449103	28.8352112	21.11591154	27.35728531	20.69433874	18.1099257	22.37716233	4.050493599	7.947908449	3.451834477	16.19358072	14.23506273	14.70745981
Zm00001d045201	0.099952157	0	0.069011575	0	0.014633514	0.081636712	0.077862731	0.107128489	0.12326873	2.404725444	1.82061933	4.638040973	0.024855483	0.012174563	0
Zm00001d045202	14.61083763	13.40979042	13.00572932	9.997200127	15.53772488	11.53301495	16.34538729	17.60318257	14.86874932	34.41340568	41.75927679	46.99439306	9.127871819	7.40975369	10.06873681
Zm00001d045203	2.930998964	2.963502206	1.49991641	0.012648494	0.668169745	0.248503444	1.007315386	0.574752687	0.250154644	0.503542936	1.330078573	0.730255351	0.13618887	0.277946712	0.187606078
Zm00001d045204	50.41267508	53.00214114	40.11681193	39.69492677	67.80215369	83.10593688	87.2237191	57.12301192	66.30010084	6.252227652	18.34728644	11.96300259	25.09918318	23.26089706	23.46175229
Zm00001d045205	50.12785771	53.21096777	49.72474153	37.91662328	39.14924733	39.02084213	49.52007218	46.5966868	44.87997071	144.8490842	79.56062655	104.7166841	87.5018134	85.16014319	93.00893023
Zm00001d045206	1.853120953	0.601185089	0.989746588	2.250647892	22.53750024	9.691105393	17.40648776	18.26333219	12.81215862	0.496366477	1.046108288	0.415650254	1.056845296	1.751641351	2.14246071
Zm00001d045207	0.040379172	0	0.007169051	0.021582494	0.106410966	0.028268577	0.02696175	0.153019712	0.08536923	0.222758141	0.356436019	0.300331438	0	0.094853713	0.106705904
Zm00001d045208	2.296386551	2.832363164	3.164490033	5.935655313	6.224108758	6.297323832	5.825462734	4.691381693	4.930463121	3.002997427	4.276206619	1.397130972	7.243177599	6.965184941	6.699243235
Zm00001d045209	0	0	0	0.046970165	0	0	0.088015631	0	0.046447446	0	0	0	0	0	0
Zm00001d045210	11.66075834	4.107793428	12.38207482	21.70274892	123.4773322	31.14462806	96.867026	121.5320192	105.8735385	18.60841639	34.00084403	18.53453434	1.024902842	0.881581571	4.18389143
Zm00001d045211	0.025458536	0	0	0.095252346	0.134181425	0	0.237986398	0.184183198	0.062794871	0.316003667	0	0	0.028488919	0	0
Zm00001d045212	0.367130323	0.352306286	0.619224448	0.163524647	0.506783682	0.299856586	0.684344038	0.548074555	0.582137367	4.086832596	3.51631509	2.711268737	0.215196991	0.201230576	0.454770808
Zm00001d045213	4.805535682	3.564387791	5.256858834	6.953083464	9.981081743	7.988504511	5.070028038	5.275591345	4.940044149	0.860839187	1.528356789	1.752075012	1.797037093	1.481416549	1.751530593
Zm00001d045215	21.78283271	20.00049559	20.27550871	15.31017819	13.87528831	16.92091811	13.63186086	10.37248932	13.41916743	6.497683614	9.415618348	5.257815483	13.29012475	13.46514128	13.13098233
Zm00001d045216	6.940549677	7.146250039	9.622445833	17.86341812	19.81129156	16.24408703	16.69300396	19.71078299	17.92344308	7.204964465	9.867554069	4.699405068	12.50555793	12.883464	14.86994162
Zm00001d045217	6.526932978	6.53248042	6.79461869	5.002645837	6.268526195	5.589785224	6.280375405	5.417837059	5.378560439	7.867964772	8.447158955	10.13403918	3.934546119	3.503334056	3.126046869
Zm00001d045218	1.206425595	1.081065416	0.106673071	0.725539144	0.791679769	0.455679214	0.596200751	0.551971412	0.64101364	0.019729563	0.186409418	0.015846919	0.581633039	0.277050923	0.694639805
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Zm00001d045220	57.23689935	70.06972741	52.20660315	22.58579171	17.00508038	18.4687097	22.81206716	19.1988268	18.26545824	3.029351601	7.137303936	2.463484596	29.85257007	25.08804833	24.29880175
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Zm00001d045233	9.400686273	8.090122821	9.373190598	2.582229119	3.184516246	3.031144197	3.068612747	3.109413175	3.416947397	3.171689321	4.376732524	4.755559293	1.056706826	1.067955659	1.253057818
Zm00001d045234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d045235	11.1223598	9.255717375	11.49851479	0.330269635	0.937767339	0.243328796	0.212739959	0.219525858	0.122472806	0.159787165	0.542659176	0.220015097	0.148169973	0.090719653	0.497519508
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Zm00001d045251	45.76149106	44.6891249	45.71362128	50.80524803	72.00678852	55.34618722	76.29426853	84.50826144	90.12900432	118.3218835	144.9707951	150.5901611	51.96756773	51.92554129	52.9598725
Zm00001d045252	0	0	0.104397234	0.052381474	0.110684217	0.205826509	0.04907784	0	0.077697802	0.057925915	0.052964254	0.162842715	0.141000458	0.023021331	0.048558562
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Zm00001d045264	0.621419724	0.409402077	0.760420688	1.359244313	2.683182796	1.218118701	5.853716476	8.36900116	9.939396213	4.232460308	14.9733649	3.484264725	0.909354355	0.429693954	1.149513605
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Zm00001d045295	4.586817062	2.09536023	3.326384405	3.423124319	20.74532399	4.98294718	13.57707831	17.21211429	16.34263649	73.34948542	20.92608514	37.230158	0.910278392	0.799684166	2.28744382
Zm00001d045296	75.80969544	90.42391157	81.54551959	65.84062778	64.72775495	69.36222517	72.69904611	73.52785774	66.15572751	53.04933882	79.47869773	66.13898279	54.06351901	52.15775258	54.51665688
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Zm00001d045304	1.571600438	2.064573624	3.213312006	2.13917459	1.747945268	3.219394372	1.026812758	0.95768433	0.854483736	0.186451278	0.117205507	0.084239402	3.158044261	3.760615575	5.480259932
Zm00001d045305	185.2976657	188.1097504	187.5982444	68.89323964	75.42358672	71.14331561	70.96494299	70.52898346	63.80001454	35.38786051	44.27232793	28.81434126	54.9702242	57.26130921	58.36227319
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Zm00001d045310	36.22312062	37.42635565	35.75993502	28.02240042	30.80716807	27.14928195	28.16500178	31.53378716	32.52250188	51.67173576	41.09071855	45.70012576	25.20256955	25.43229258	24.81904374
Zm00001d045311	21.1615359	39.65749167	14.45931142	2.006872624	3.555137076	1.987642898	15.09392849	21.52380533	16.44176689	187.9225881	282.531415	222.1842075	1.415892866	1.169566779	1.916473827
Zm00001d045312	8.01427609	8.395774239	6.883623173	3.722166963	2.271694205	3.159022927	2.8642826	1.764619543	2.260761505	0.480565565	0.928476749	0.698144832	2.030990979	1.564455593	1.436255086
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Zm00001d045315	55.39977144	54.79558844	61.978238	68.13876898	93.86304951	66.47349827	76.3010186	82.4459236	82.30629148	61.49403828	78.92527692	59.0377572	56.77239593	57.55312772	62.83298131
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Zm00001d045318	9.538070177	10.81191121	8.253855696	11.85141008	10.33352999	10.69001457	7.595271314	7.368993661	6.665748626	2.484752351	2.806489583	1.173982365	4.348424992	3.833854737	3.389877007
Zm00001d045319	8.547813887	8.377244417	8.888172272	7.621655903	7.366938355	8.253546327	5.601965943	4.502241165	4.978535306	0.563103516	1.619351442	0.663842919	3.198251729	2.353432112	2.535325346
Zm00001d045320	1.238541939	1.20270812	0.904757975	0.837179849	0.672716626	0.718150894	0.585523069	1.082999752	0.606322265	11.39638307	0.36959599	0.178045873	1.163790091	0.766963773	0.590258542
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Zm00001d045322	9.324244966	8.568626284	6.427649196	9.513416825	13.15316832	11.17365832	8.772622324	8.974217063	7.51003248	1.329429214	3.45966096	1.221817172	5.849750547	6.380857523	7.811821694
Zm00001d045323	19.95643017	18.36821916	18.60265198	23.7997563	31.14093378	24.22097119	28.01730051	31.3575001	29.96252291	43.59329631	36.16486592	31.293008	28.21678832	24.63468157	30.05078035
Zm00001d045324	5.033284738	3.753616235	4.279997586	6.749271401	5.87164452	6.108507014	6.986918305	6.137443024	6.219104122	5.454216009	6.681193194	4.213174914	5.124220122	4.418279401	5.217558724
Zm00001d045326	16.48109784	18.58263419	14.50238992	33.38232508	35.63709164	38.55669167	40.26341682	33.83393832	41.70066907	9.362262435	9.535563061	6.058700883	41.10223186	42.63868174	34.0356456
Zm00001d045327	4.64034152	6.171240023	5.265549222	38.97695196	50.37043875	41.40790362	50.45039863	43.45254409	42.76125551	29.13695937	17.67601014	35.70581152	70.27872079	61.06392767	68.23267993
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Zm00001d045335	3.362513197	3.515730658	2.714050135	5.887074837	6.035361244	6.452000317	7.445981752	5.965170618	7.675756772	3.077481821	4.928701813	2.567999271	2.095992173	2.261997849	2.139594876
Zm00001d045336	28.70672915	25.55809391	40.4550572	53.85140887	104.3119189	40.3942782	65.99513938	89.72665077	79.80757095	19.48645178	66.01195879	19.25544084	22.38734042	17.55965301	24.07821894
Zm00001d045338	14.46376922	12.04080128	12.55830634	5.325089291	8.262877578	7.42787599	7.478075847	7.46575916	8.857830921	8.23876518	9.581866763	10.67788004	3.569661607	2.671575455	2.783197343
Zm00001d045339	4.51024264	4.194137535	5.605342828	9.112115458	15.94031891	9.880782986	12.24792226	15.55259582	12.12980072	2.848579822	6.945556953	1.743237124	9.481012843	7.670575104	9.860357581
Zm00001d045340	15.72972709	16.45904633	18.27862217	29.47926569	22.5313499	29.57621931	9.538454045	7.292162816	9.078015911	0.489483008	1.306864086	0.393156088	4.614983075	3.618329343	5.457354634
Zm00001d045341	0.096593739	0.12977085	0.184072042	0.208810371	0.322433604	0.102561808	0.338609356	0.155293417	0.087359705	0	0.089325723	0	0.309862289	0.310609051	0.774283775
Zm00001d045342	1.359175	1.191312439	0.694772694	0.908681535	0.621408222	0.834210651	0.479864288	0.581426378	0.398637908	0.047502618	0.10357283	0.029349559	0.462514295	0.772579818	0.431903004
Zm00001d045344	0.055574122	0	0.034533841	0.398530394	0.128147352	0	0.032469181	0.016752435	0	0	0	0	0.13992576	0.243689215	0.096376903
Zm00001d045347	0.940622126	1.136030047	0.608524685	0.915984622	0.66214929	0.505157614	0.376409919	0.341806519	0.413167764	0	0.064994777	0.014273678	0.648854607	0.409632153	0.655471943
Zm00001d045348	0.211138748	0.066482509	0.013120193	0.315987704	0.236475334	0.025867386	0.25905141	0.216397479	0.117176685	0.058239029	0.026625273	0	0.070881312	0.243030595	0.195284165
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Zm00001d045351	11.49559669	11.47931314	16.18679106	15.95015893	25.83923048	17.00126961	18.8434367	22.10327107	18.49207683	7.663598617	12.38304252	5.048124172	12.05788921	8.879327496	9.687433204
Zm00001d045352	19.6038841	16.24129936	18.75271598	36.9255707	43.80310256	30.02422643	21.50957188	21.99511269	21.0706445	0.273100891	2.267351831	0.184259457	8.597678594	8.344378979	14.07504817
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Zm00001d045354	21.85537395	24.46465862	19.80591291	6.246758063	4.796692551	6.103911128	3.632761755	3.444261602	3.932460174	0.201558543	0.326702973	0.2796337	9.879384165	9.721814258	9.523424181
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Zm00001d045358	23.1685987	25.68496315	25.92361258	17.46350734	20.18370721	17.87842968	17.4876056	21.15497516	17.00092652	15.65526855	18.02349479	10.86493998	13.69915591	12.63667038	13.67442226
Zm00001d045359	334.0223819	337.6111254	288.8004469	46.41435136	59.48661756	38.23084462	38.41022623	42.54037735	44.56832243	21.49051464	35.44779802	17.74080914	21.15659657	16.32084495	20.63064479
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Zm00001d045361	156.061244	82.56637116	207.4159101	1.956576872	102.029301	4.484740299	45.65486188	72.10797365	71.63376436	1047.527982	1063.50181	847.7952144	0.459792479	0.450425557	5.959568485
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Zm00001d045370	105.3151484	116.510509	99.49118007	18.79546287	13.4749319	24.35438111	22.97693083	16.00846877	18.63054614	47.26093344	35.02271702	70.35574633	20.5988347	13.72814556	20.12025946
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Zm00001d045373	22.53289489	29.74812658	30.0455482	57.99106513	30.72456804	48.40253205	30.32872916	27.18054651	25.18933689	14.32367135	16.15805732	9.725558317	98.22526799	97.45478193	88.46190146
Zm00001d045374	0.257376497	0.266960771	0.39513139	0.245462025	0.259335695	0.537901254	0.017690849	0.182551453	0.112029389	1.962745554	0.267284722	0.888872362	0.30495448	0.13277419	0.175036679
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Zm00001d045382	38.90459908	42.86587022	36.29134901	34.1760342	34.44825134	35.83124549	36.28468792	33.5816973	30.82968578	17.90272423	22.40608371	14.84182123	21.55550377	20.98330474	21.77026945
Zm00001d045383	9.332552942	9.539332911	9.034927032	12.0574923	12.52832521	12.10577035	10.38126299	10.65948116	11.02635322	4.838022669	7.238292145	3.305994642	12.34829055	11.26164359	11.67404739
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Zm00001d045388	5.688769178	4.212475221	5.374721431	4.927284867	2.689430139	3.986120139	1.369609081	1.778804027	2.392609915	0.362325959	0.866452913	0.470113559	6.648593681	5.106396724	4.777957972
Zm00001d045389	1.738792274	1.964662933	2.100331362	6.495496011	5.015160477	5.910520632	4.164291226	4.042158313	3.877596389	0.531660662	1.34760155	0.398204203	4.382975346	3.78372083	4.125871705
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Zm00001d045394	63.82943537	67.61468312	66.79012077	58.63318107	68.83866526	51.30182119	52.46940998	62.31540825	61.38949414	22.72401756	26.8825007	6.142088126	47.868162	46.66618958	63.73033547
Zm00001d045395	6.299723645	5.759655374	8.021717916	9.475617062	19.22210279	11.00803153	18.24304115	23.06092364	25.6431172	5.329625732	6.750277987	1.827086754	7.176192541	6.429478832	7.186963328
Zm00001d045396	10.64155584	9.587188208	9.460064087	9.718784819	8.361448197	11.41230833	9.000156208	5.270644879	8.365149226	0.623645606	1.235491949	0.434127547	6.426402925	6.312007408	8.277575229
Zm00001d045397	28.11592469	24.66396448	23.24835253	22.19907844	27.18614211	22.03304718	23.4086127	26.79254808	23.10174855	17.27245973	23.38265634	22.14630421	11.07984139	12.18491725	12.02757749
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Zm00001d045431	31.19186417	20.43885228	39.80614344	66.24004744	276.4512288	109.9808676	158.7697927	187.7325597	154.9691216	98.61074714	78.88094944	63.11647137	206.9948859	260.5431195	265.7771505
Zm00001d045432	1.010713792	0.893331762	1.630749782	3.538297253	4.462576601	6.278209062	7.293310773	2.758089641	6.647948885	6.284961829	5.612459156	1.316047936	9.5640739	9.194289765	10.59870926
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Zm00001d045448	46.72957956	39.52163524	55.14679464	75.89761338	136.9053081	63.99763631	78.73312496	98.10570668	82.92116604	11.99529858	35.77682373	8.639503939	39.28084773	35.32623293	53.03226278
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Zm00001d045451	49.67710326	49.6683053	49.10205439	170.4414673	133.3416974	127.67117	111.9671113	107.1575344	107.6043191	20.35097966	27.92108503	9.337657945	371.9626195	402.8906832	380.9630214
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Zm00001d045459	12.60171562	10.6593622	5.143427988	5.857371287	10.90634839	6.836380463	16.19218167	22.20347247	18.86761621	55.98746608	35.06611911	112.4495415	5.255624232	6.677830468	5.107320226
Zm00001d045460	19.83364618	6.261443532	12.87170436	8.654252897	21.97144598	5.70993141	17.12454112	15.11069654	16.28563585	26.42540769	27.1005447	27.19103247	2.26001303	1.986897858	2.574431511
Zm00001d045461	0.041427982	0	0.051486817	0	0	0.101509892	0	0	0	0.114272033	0.052242014	0	0	0	0
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Zm00001d045464	0.123041105	0.01721897	0	0	0	0	0	0	0	0.226258626	0	0	0	0	0
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Zm00001d045466	0.070835409	0.163565343	0.044017227	0.132514274	0.140004065	0.347132272	0.055180784	0.113881839	0.116479606	0.276798837	0.029775241	0	1.056894628	1.358914597	1.337624856
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Zm00001d045470	4.839026683	3.551154425	2.99882931	35.83397815	79.83983038	43.90120246	68.53473213	78.78513591	85.72534492	300.4844772	245.5337068	222.6985426	89.88356565	108.9550257	128.2582899
Zm00001d045472	15.25501277	16.09636888	15.24386781	11.5520459	12.29531518	12.6836457	12.15337395	10.79670084	14.01934871	2.71381752	4.193246901	1.678488629	8.569949882	6.433688573	6.53158934
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Zm00001d045476	1.959073727	1.899412123	2.487290995	2.812399156	5.757005631	3.712436504	7.921542858	11.01225645	7.856609478	1.477289997	1.564028952	0.48399541	1.734887084	1.776795846	2.150894014
Zm00001d045477	10.40965588	7.741528023	7.830380852	7.900517042	5.493267397	6.942971493	6.672020191	7.122250091	5.870003247	0.47225762	1.554502504	0.43621862	4.607766078	4.851734767	5.26530496
Zm00001d045478	296.7403464	348.8876336	323.2960241	184.6998403	152.5173169	223.2405539	176.7107418	157.5708468	172.7529158	31.74477084	68.5206254	24.43292099	115.5457739	112.2472399	135.0678486
Zm00001d045479	41.77293356	37.65733213	41.20908795	36.44229202	38.48869488	43.40759902	45.11516336	42.35531648	43.37142502	22.12185565	26.0289403	12.71656307	19.33700438	17.20634419	20.94372506
Zm00001d045480	1.225741561	0.898523087	1.241252402	0.752213377	2.589278211	1.056752644	1.636890313	2.580574362	2.191535057	17.87099677	10.52547709	12.53649433	0.725737654	0.703843351	0.644829145
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Zm00001d045482	25.46083565	23.4708752	23.82344869	31.58864808	43.94347892	31.81134451	37.83574285	41.94953878	41.58300022	24.51810915	33.95450031	23.54162853	25.91980095	26.85284825	26.66026939
Zm00001d045483	18.34971835	19.06483453	19.9598372	14.15710268	13.0033419	17.16879006	15.12872284	14.27288351	14.54498907	27.56772029	21.61954474	32.30127027	10.52412128	10.69473361	11.35933084
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Zm00001d045488	5.754082986	5.836895891	6.255102201	8.612998312	9.582798351	8.522613788	10.29374437	10.75808416	10.39245872	4.994266957	7.200208616	4.959625825	6.091923978	5.716123993	5.939986239
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Zm00001d045491	26.48588643	25.0346288	13.05902913	28.5889285	18.63590833	28.34651982	31.16486525	23.99010743	26.74618899	1.946570591	1.798248602	0.787140757	65.44228328	70.180672	63.33015836
Zm00001d045492	2.869110604	2.475780258	3.698402718	5.669319486	7.464892663	5.633016064	3.951878346	4.10932673	4.405351428	0.2046712	0.453075855	0.100943256	1.430506175	0.904750159	1.800014401
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Zm00001d045511	4.678715898	3.726125953	5.587963933	4.372255195	4.344619306	3.656388235	5.360479128	4.557173408	3.712829087	0.377457193	1.725629915	0.577478456	2.931371305	2.971661042	2.531340732
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Zm00001d045517	10.03136444	6.286869591	7.811379231	14.05194086	13.4722273	7.440115899	10.17606139	7.927876998	9.239892828	7.762993106	3.177686904	2.149730844	6.201530758	6.011689015	5.994153306
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Zm00001d045528	37.87117378	41.16969953	38.31737484	24.36399842	27.92555285	21.9633416	21.4829029	21.22832202	19.56114233	6.910614137	10.51553731	3.069990446	11.61582193	12.09801171	12.2870521
Zm00001d045529	31.10628898	26.37399367	26.34602573	18.77629779	29.16591597	20.59179537	25.02685672	27.13382044	25.60377418	15.00975225	18.4703866	5.636397928	11.04214333	9.73656441	10.06138365
Zm00001d045530	0	0.378438895	0.622368123	0.749458017	0.857802682	0.306760662	0.585158863	0.241529615	1.235195824	0	0.315748436	0.166421676	0.560386438	0.164691063	0.347380485
Zm00001d045533	1.336884341	0.701587823	0.830741897	3.473550326	3.219006923	3.324478497	2.501298684	2.475537966	2.639961458	0.263397702	0.551916503	0	2.110451857	2.294267289	2.392032094
Zm00001d045534	13.40698212	14.89683805	13.91413797	16.95546777	16.12482274	15.06342743	15.94289437	16.85429714	16.30977154	19.81417648	22.63665845	22.60720705	15.83218056	15.80598782	17.45978618
Zm00001d045535	0.228807262	0.120076497	0.355452924	0.665836481	0.175867496	0.023360017	0.200520966	0.183926318	0.423274217	0	0.31257774	0.042243717	0	0.104511065	0.220443683
Zm00001d045536	0	0	0	0	0	0.19475735	0	0	0	0	0	0	0	0	0
Zm00001d045537	3.223438899	4.111928097	2.142001894	3.011882048	4.347078063	6.507463517	6.684990902	7.234219179	3.572339245	78.64109887	32.32366155	73.09998832	4.788977323	4.242639038	7.143240683
Zm00001d045538	10.84028246	14.59634284	14.6644912	15.27026054	9.628627143	11.06417285	6.579482189	7.193704	4.597422813	2.882549521	2.134084777	2.116583723	18.93773699	17.50892411	19.44845216
Zm00001d045539	205.0470132	224.7941911	240.0330001	111.2818478	130.6854294	94.51672207	90.09707568	145.5084912	101.984351	446.350874	358.0253638	267.074343	96.36161993	81.29679106	101.7437022
Zm00001d045540	2.064925957	1.281173342	2.12383122	0.634306915	5.455088933	1.05928291	6.763156416	8.144076706	6.222298962	66.04821493	44.18998027	76.31907369	1.149667801	1.081642864	2.034527893
Zm00001d045542	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d045544	26.51347757	32.11105162	33.91065232	58.93710838	37.25110692	40.61925704	24.05082001	24.9436446	27.2477522	1.06491557	2.485025525	0.571980805	38.0396372	48.14394546	52.30814659
Zm00001d045545	0.020031112	0.277521856	0	0.037472901	0	0	0	0	0.012351958	0	0	0	0.033623186	0	0.034738049
Zm00001d045546	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d045547	5.530323269	5.177227912	5.193959096	6.483062922	7.860317544	6.242348241	5.431979733	6.226518172	7.11696247	3.316185889	5.616672799	4.65492857	5.086703726	4.706936777	3.865407977
Zm00001d045548	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d045550	18.68797525	21.08950137	18.46035876	18.82612293	10.89134684	15.01456173	11.5041777	9.941951031	11.45055366	25.15301545	28.37534131	31.75286725	21.40697996	20.36978524	19.5242701
Zm00001d045551	7.851067442	8.53574739	6.724001971	7.812563077	6.219196116	7.593005856	7.296244932	6.691613293	6.976211641	12.99127225	17.1329428	19.5968896	6.282526113	6.079293822	6.593535011
Zm00001d045552	0	0	0	0	0	0	0	0	0	0	0.03302656	0.087036624	0.234460532	0	0
Zm00001d045553	2.493495495	2.262170724	2.232174811	4.062968505	3.210016327	2.867601239	3.639271031	3.317614335	2.662792171	0.355752556	0.542134106	0.169329113	2.009872363	1.895615998	1.855608964
Zm00001d045554	0.002408604	0.00606729	0	0.048062494	0.015868443	0.047213903	0.011257813	0.03775496	0.035645715	0.09301212	0	0	0.045820181	0.052807916	0.027846744
Zm00001d045555	22.12507857	19.04628895	27.289064	34.93545013	58.74722942	34.93390417	37.78537964	46.89642518	38.84779094	14.08344508	21.8312979	4.126068838	18.82658265	16.10325683	20.87012328
Zm00001d045556	16.13137502	16.90804187	15.77400921	17.2943504	12.47285694	14.85103621	11.90652542	11.05460444	10.05746278	5.682294256	8.383769762	5.686212096	28.60619233	29.04059241	27.70445889
Zm00001d045557	6.511808943	6.394441381	4.663014047	6.524413118	9.351391302	5.92152064	9.139883895	8.664874939	8.518140692	6.563565091	7.529797437	4.732205058	8.171194105	8.226179009	8.126151968
Zm00001d045558	0.124283945	0.067086895	0.264789347	2.767884722	3.345430461	4.828970564	4.699091648	5.052360401	4.291744035	0.012243432	0.302257366	0.088506073	6.963820371	8.213592451	9.955608901
Zm00001d045559	20.63851606	16.44508343	20.86331792	30.63830688	56.18125658	32.53041715	48.62966015	56.25333286	52.66514149	74.85964566	92.46710673	103.6405012	23.00921527	23.70718594	25.2309472
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Zm00001d045564	1.040093875	0.96990539	1.068907007	4.851877166	4.388159589	6.542821185	18.13675709	18.52233548	15.65170211	3.517187856	2.64840641	1.628546276	25.16930386	28.24156557	30.06226143
Zm00001d045565	0.185079882	0.155405864	0.092007129	0.892517918	11.29930519	2.751211235	8.376696992	10.28043122	4.54987949	1.956960136	1.166958343	0.970442643	4.611656692	4.625916292	5.449296219
Zm00001d045566	9.201062774	8.036315268	9.125699193	8.590116798	11.67402825	8.68236912	8.607800491	8.219334872	9.067446624	0.660313257	1.536284742	0.908452304	3.124426422	2.587888203	3.375998694
Zm00001d045567	0.095901095	0.147629514	0.205265059	2.810686618	4.134903109	3.074373046	2.060666808	2.004338122	4.139542668	13.16021041	6.752168318	6.503935507	4.447668788	5.910650561	4.410351302
Zm00001d045568	7.7029318	6.517287461	8.294360204	3.483368041	4.881173973	4.754592348	4.843982817	6.59375849	5.910212792	6.203865547	6.117371303	1.205036093	5.132416689	7.026110323	5.030667067
Zm00001d045570	0.945661783	1.396927517	0.798023686	10.94938322	6.922489623	14.97552634	12.08685357	7.263833008	7.299944029	0.161015248	0.485837345	0.284522797	30.34887366	24.67524983	23.52649909
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Zm00001d045573	6.057556255	6.631726538	5.622526689	10.69517072	11.98562668	10.96042132	9.055272848	8.825565611	8.93616376	2.509042088	5.119868724	3.945936464	3.859464433	3.979340984	3.912200173
Zm00001d045574	15.7582392	17.6948353	9.718126206	30.08391548	14.32159362	21.35590116	18.99689033	18.15480058	13.05233601	4.336096382	6.13420416	6.372644332	76.19830386	68.65271161	58.52232572
Zm00001d045575	40.53923602	45.80607278	39.17860077	294.5454691	122.0696834	227.9855637	150.9035445	131.2897675	136.4891385	9.754625986	10.99232689	4.791439892	564.9350658	607.5313732	490.2990969
Zm00001d045576	0.552243362	0.857308966	1.013533358	1.28937405	1.303022017	1.006993383	1.455668562	1.184646605	1.211669666	0.566797873	0.356295933	0.049793616	5.784562022	6.300264723	4.632610019
Zm00001d045577	0.128868189	0.042341729	0.111414097	0.195657687	0.450346408	0.240253945	0.301164959	0.304015504	0.248760339	0.007727412	0	0.00620671	0.106588256	0.061421667	0.084211294
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Zm00001d045580	0	0.083413694	0.047032941	0.920355191	0.785379203	0.56796365	0.320602264	0.250973507	0.595073753	0.208773819	0.190891234	0.010480535	0.719931753	0.684522161	0.951630208
Zm00001d045581	1.650846932	2.04745504	1.392881922	2.965520686	2.195189287	1.867886966	5.380004172	5.98381148	5.074314897	5.890411049	3.374124161	2.505420564	1.485789728	1.43338392	1.599258681
Zm00001d045582	0.147697328	0.069759499	0.045889668	0.09210085	0	0.271424153	0.18337085	0.066783509	0.056922427	2.609892994	0.931255345	2.300799335	0.206597566	0.131552685	0.629671109
Zm00001d045583	5.988138604	6.213685728	6.23034514	4.386790697	4.442204369	4.28329924	4.631647246	4.664065469	4.259337329	2.641735802	4.790712466	4.561557986	3.145329504	2.696824151	3.083761235
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Zm00001d045586	0	0	0	0	0	0.077542278	0.036978789	0	0	0	0	0.035056418	0.03541331	0	0
Zm00001d045589	1.628177559	2.463126073	2.147853263	6.364035467	6.35219152	9.806544431	9.066224828	6.558661971	5.597705306	23.39611539	16.90722581	25.33130572	7.114894392	6.730637739	7.613711203
Zm00001d045590	6.890427176	6.39054546	5.831412867	5.285455012	4.740760014	5.29525827	4.293351797	3.955877445	4.031630355	0.55614353	1.278672659	0.453203588	1.916699746	1.80254651	2.102462688
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Zm00001d045597	0.498705131	0.398615223	0.419154343	0.871147462	0.505474748	0.765685802	0.528572297	0.294880466	0.307520868	0.105814861	0.012093907	0.003541301	0.701161172	0.76222328	0.744737784
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Zm00001d045600	0	0	0	0	0	0	0	0	0.040143864	0	0	0	0	0	0
Zm00001d045603	13.42662824	13.15602479	12.93183373	8.787622801	8.016576272	9.760337898	9.910219278	9.016188957	10.71373658	17.89394467	15.98921728	25.59862056	6.882854358	6.90514873	6.615748708
Zm00001d045604	18.01147745	18.58225008	19.90636188	17.362712	10.83360626	14.92005374	9.464031718	9.52160328	9.488919805	7.155149601	10.10589566	5.78250417	30.56726612	32.51055531	27.19783262
Zm00001d045605	15.9068932	19.78896519	18.76579227	15.87734834	7.107348896	14.64054574	7.173645145	6.343443843	9.157802756	4.184536558	6.108349163	4.894158022	26.0402959	29.3805222	22.39071236
Zm00001d045606	0.085418519	0.188273646	0.106158386	0.474059706	0.180082288	0.460457241	0.31440635	0.3192854	0.46878402	0.100135287	0.166959013	0.018924552	0.277199589	0.36987318	0.306141939
Zm00001d045607	68.63309225	69.75702015	68.81394288	49.80540031	67.1006546	49.06888604	48.43543313	52.3528959	46.6627485	15.90001537	23.59913233	10.55908276	30.10780685	26.84218513	33.212426
Zm00001d045608	1.498217416	2.830515569	1.629240388	0.467127942	0.49353031	1.83552133	3.06366736	2.032322822	1.154823493	0.258286103	0.472325057	0	1.466984222	0.821199271	0
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Zm00001d045610	105.0202742	105.5712696	97.64730527	31.10744105	40.59293571	29.02386638	49.89617201	62.74559814	72.75045928	181.0710259	218.349552	275.6309027	15.44121313	14.71559363	16.71618523
Zm00001d045611	22.64682632	24.43577458	19.40430567	18.45200823	23.48680855	22.99491651	25.60015223	24.70053047	28.55731581	152.7241138	118.9177426	227.8802577	13.89931484	13.92602948	14.99072276
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Zm00001d045618	52.60875362	55.43407212	55.0008156	43.48853278	47.85030576	42.3190772	47.48470627	48.50160275	45.60998974	51.85930759	53.06693662	42.52798037	35.23014164	33.23468569	29.35164568
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Zm00001d045812	7.706823043	6.119486785	9.057515495	21.14555383	28.21287793	17.13912418	9.573155965	13.55518366	10.18650556	0.25417125	2.387383208	0.05567784	6.711863736	7.107751412	12.16427694
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Zm00001d045838	2.762899071	2.663613079	2.865688432	2.535404504	2.130381213	2.549144362	1.171806902	1.850792989	1.102153399	0.141129382	0.120438176	0.075570721	1.320683187	1.248907225	2.121638446
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Zm00001d045872	109.882839	120.9888477	119.231878	65.23578322	37.08701716	64.16847864	39.51020685	22.16024698	41.19812328	6.370174932	16.9191482	11.32425648	14.51951276	13.06597563	8.552033268
Zm00001d045873	11.67263985	12.71115234	11.2918678	8.158272061	7.984368669	8.309445025	9.672685099	8.742113706	9.85928312	0.703759334	2.332609982	0.34543929	6.289139423	4.987859648	5.276797808
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Zm00001d045877	83.32441802	75.4544083	81.27194134	204.4927427	234.8729729	218.7909068	298.7499315	365.1293764	335.8250406	87.84442802	153.1032589	82.57566193	194.11506	195.6557273	217.1272773
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Zm00001d045889	14.36592854	13.23673242	18.48494143	30.67919819	43.57358212	25.87113504	30.14925253	34.21451881	29.50299424	1.363447745	5.289886786	0.700488892	10.12594563	8.093895162	13.80820455
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Zm00001d046158	0	0.291846944	0	0	0.305319599	0	0.361013264	0	0	0	0	0	0	0	0.044649187
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Zm00001d046167	7.786265677	9.69279752	10.12687734	6.059773403	5.050242282	7.394760325	3.984893102	4.039222916	4.280239833	2.705447145	1.978969003	2.03930844	3.140761868	3.738450766	3.524033154
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Zm00001d046170	67.7741477	87.06522848	90.203958	748.4580701	122.8969831	437.3344603	246.5751555	400.7450125	145.2526732	0.594809557	1.230287426	0.333964723	6220.79329	6589.116704	5765.60201
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Zm00001d046183	4.833432005	5.482085566	5.831842184	12.06643315	18.47266892	10.57358796	9.125710373	9.086910957	8.721613593	0.137209597	0.993200203	0.358174972	2.801796254	2.453886846	4.169513796
Zm00001d046184	542.6340597	455.4678382	483.9632123	116.1349072	180.1795039	79.01276197	135.7135012	181.4157757	169.4600241	54.3077838	253.6741589	41.87648461	103.1029534	90.40952938	82.88472056
Zm00001d046185	0	0	0	0	0	0	0	0	0	0	0.032651259	0	0	0	0.209546751
Zm00001d046186	2.820888355	4.428460154	4.194449277	0.062823028	0.013274765	0	0	0.072886056	0.434867211	2.20923124	2.74414941	1.562426052	0.135285628	0.011044132	0.011647614
Zm00001d046187	0	0	0	0	0.11410202	0	0	0	0.040048511	0	0.013649932	0	0	0	0
Zm00001d046188	12.75636599	14.06650682	19.82242472	17.63142568	6.641472283	13.6615396	3.529793518	2.102176791	2.320437003	0.26187341	0.478885127	0.611893839	10.14108411	7.739440227	5.448215524
Zm00001d046190	35.94395252	38.81442756	32.76009656	26.58760867	27.28348657	26.92946401	24.6195534	24.07408699	28.37293057	15.33923496	21.29841603	18.40987784	13.25077512	13.95653824	14.25815964
Zm00001d046191	105.5107243	107.3470905	150.4412337	21.55592049	15.68774275	23.21238583	6.572230216	4.306734149	11.36686175	0.736076611	1.993197557	0.432046663	0.321591136	0.922616148	0.332254308
Zm00001d046192	5.1125113	4.483609842	5.78905795	0.661225425	0.997997581	1.020722734	0.531019511	0.36530518	0.186819091	0.0522296	0.477558576	0	0.042378254	0.124544765	0
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Zm00001d046199	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d046202	0.05439483	0.125602564	0.292942237	0.440952669	0.800350381	0.599769984	0.413142335	0.776122103	0.614935852	2.675693298	0.262942232	0.090384186	0.304347807	0.407468405	1.016686851
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Zm00001d046207	5.319183164	3.477095704	3.257024441	7.244867409	7.459662917	4.592196638	10.22280521	9.676846931	9.801679352	4.729809158	9.835940941	9.096960964	6.413555837	7.339993998	6.725112302
Zm00001d046210	0.734633843	0.804861669	0.819203209	2.779987214	2.413339604	3.174752687	18.12676566	15.69566913	14.22307306	17.03671103	15.17767982	8.372045461	52.68624585	62.82136644	65.17788679
Zm00001d046213	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d046214	15.09250081	14.42017678	15.94625751	23.63389885	26.2256184	22.6085645	24.39721385	22.74085024	23.63519692	17.53255441	20.66081131	11.68315866	16.65547557	16.22342851	16.7578123
Zm00001d046215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d046218	4.089430234	5.319834529	4.154918718	6.012232394	7.1091802	5.092394432	5.781286516	6.145656453	5.374719994	3.375765524	2.813711523	2.587439191	3.807935963	3.378593999	3.39928491
Zm00001d046221	19.29841832	20.33319315	18.16060737	18.25058235	14.53816426	18.18726026	13.35277265	11.79111534	14.26596499	5.418527377	8.525447366	6.493181639	11.84799152	11.43181858	11.57893456
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Zm00001d046225	6.295403299	7.554059519	0.285468291	0	0.056048091	0	0.08946704	0.061547217	0	7.27444244	1.416093419	3.797873132	0.009519944	0	0.019671204
Zm00001d046226	80.62315924	101.1914372	84.21267741	11.20840035	43.8150532	15.01378082	35.46539364	36.24918141	34.95571084	132.2469138	141.4050772	129.6091002	5.820991596	5.801461857	15.2862927
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Zm00001d046230	0.049354635	0.007770293	0.015334521	0	0	0.007558273	0	0	0	0	0	0	0	0	0.035662933
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Zm00001d046232	0.274268582	0.106289936	0.026220139	0.263119906	0.416987415	0.439406244	0.123262631	0.381583246	0.260191713	0	0.212837834	0	0.141653238	0.069383735	0.024391685
Zm00001d046234	1188.001051	1001.9288	1138.282882	176.3367036	374.9683052	219.3600133	170.4510232	240.5565931	252.6621772	1518.953599	1844.862612	1745.642878	7.357762873	3.335496125	8.143848292
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Zm00001d046313	9.086441311	8.676804894	7.986048235	9.436106184	12.17617743	8.119909411	11.64455969	13.29063397	11.55766615	10.50041842	15.08300924	8.236643957	4.266580772	3.645810839	4.188334215
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Zm00001d046318	89.73674596	63.9130179	90.34000867	4.401422301	60.46380223	11.85872137	59.06485766	64.59487092	58.64173436	736.3683378	398.8284963	564.6402798	0.891456846	1.032930788	1.06956623
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Zm00001d046323	15.71229138	18.29576162	13.84139693	7.70379507	7.763718362	10.06835154	11.00688765	9.38914061	9.821790071	10.51624599	7.575827816	6.59526758	8.239669609	6.644890046	7.880644327
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Zm00001d046336	49.52191782	50.21518085	50.44112417	50.77549967	59.17423488	49.38084546	53.21884571	58.21245545	61.92971165	50.18858546	63.41822717	50.67933107	69.44188001	74.20400538	73.78679276
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Zm00001d046343	61.67769326	61.98829096	91.0659768	46.21183976	27.45560172	51.55652398	5.673821399	1.42106864	5.523242015	0	0.039631873	0.069629299	0.703381597	0.689052262	0.454190002
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Zm00001d046354	5.96405779	7.457319865	5.218940363	12.50465568	7.327026916	10.88958327	20.05692121	16.16304604	17.32235239	0.307956507	0.463241883	0	25.31756836	29.8553312	31.0703292
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Zm00001d046364	24.8452061	23.56575678	20.92557656	14.63486157	28.80873948	20.92470795	27.17062202	26.50869123	26.83839932	29.55630698	33.18633764	34.14187988	9.495651566	9.818994734	8.668891335
Zm00001d046365	1.139269493	0.478304714	0.471962493	0	0.500384898	0	0.221872735	0	0	0	0	0	0	0	0
Zm00001d046366	4.360909828	4.806371233	4.045528847	6.617082915	5.549249167	6.674868532	5.230033216	5.62138146	6.001936351	1.762790706	2.168390568	1.301290458	5.018912149	4.573936331	4.103610868
Zm00001d046369	22.71489052	24.13426138	26.0537315	20.8801276	25.35985344	20.32490601	22.76611973	22.08460262	22.71357726	15.87964056	20.66436738	10.24306879	17.11619922	15.50623426	17.8304427
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Zm00001d046381	15.65335325	15.8349658	14.64634197	15.85150485	12.42743045	13.86957262	11.18168613	8.949806886	9.157654189	2.62630468	5.739070119	3.373155245	6.821692352	6.039393676	5.853619844
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Zm00001d046385	14.80448826	14.09155388	18.75789263	17.76134381	21.53293069	19.52591539	80.93692468	75.10235218	79.1122382	27.45605817	28.44486632	34.11082004	20.53268926	21.2934066	25.06064078
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Zm00001d046397	30.22103517	19.85664321	17.71199691	23.35961313	14.20025163	28.13623574	9.522579225	18.38535069	12.95244199	1.168288946	5.18283938	1.216415463	41.56852071	34.15256108	21.48248353
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Zm00001d046883	23.50785345	25.61846713	23.34487649	26.3376608	60.48555012	28.39182155	38.50844842	45.83466267	38.92975716	68.52141311	51.57943224	43.77093032	7.213950286	5.604851936	8.738172526
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Zm00001d046921	8.502699915	8.82018111	9.807261125	11.87037144	11.61399682	15.95761197	13.73701169	12.77019049	14.56968198	2.89585583	4.582748812	1.49526716	4.699301356	5.020923223	3.681353697
Zm00001d046922	11.79409558	11.65774806	12.92639243	15.34220814	26.89633644	22.75162768	27.03858413	27.84410969	19.14633527	2.849399793	2.530895491	1.752457614	11.37482844	10.41834524	10.27787261
Zm00001d046923	14.43467408	12.5536439	19.24845585	23.30072338	9.71481497	16.9829618	3.370079356	3.673616739	2.95536887	0.701939894	0.623986826	0.140950727	53.15731866	53.36850501	50.66195916
Zm00001d046925	225.3735025	257.9147423	225.4853076	540.5132715	403.6312802	550.158406	541.1931674	544.0514555	516.0421008	43.01191662	45.44844837	11.81057776	516.5468048	481.6222119	510.9202231
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Zm00001d046930	13.93601827	12.4446988	11.88133102	25.44490185	29.54566242	20.1809115	21.59289887	25.22230248	24.74924476	13.47326679	24.60327259	16.28676147	15.87555927	19.12699505	17.36867014
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Zm00001d046938	7.494797988	8.014289293	5.581252628	7.81559967	5.385913011	8.643761718	1.42092341	1.872731936	1.098785823	0.058117216	0.174600126	0.046680144	27.63304758	26.06702002	30.33101233
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Zm00001d046999	4.613236238	2.8521454	3.84891486	5.703989418	9.10160048	7.272729358	9.66943737	9.051779732	7.247720794	7.196156004	7.492061483	6.768035995	4.43596948	4.557447604	5.648615694
Zm00001d047000	2.616935866	4.14846465	2.915887087	4.501695019	13.9711427	8.015261253	28.1009508	31.82630954	14.24510986	73.05490284	79.94062619	127.3526771	5.654909477	4.698858866	13.77140061
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Zm00001d047030	18.27106486	19.44874674	16.9882346	13.69345556	12.68523728	15.66109327	14.67368818	12.50564643	15.82986409	12.69857106	13.72327529	15.8999766	8.707234283	8.393508684	8.845413236
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Zm00001d047044	7.566889044	8.027561269	6.593346518	6.890449938	10.31958116	8.33630194	10.36715825	9.562871735	10.66560553	5.614579103	8.284478804	4.898597254	4.430240181	4.639866451	4.851066947
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Zm00001d047126	2.241788358	1.986507482	2.03248364	2.814958604	3.095122716	2.701472925	4.108224197	4.516222353	3.742983689	8.253236165	4.421963473	6.405146798	2.518914441	2.356808795	2.892775193
Zm00001d047128	3.6372609	4.165173538	4.406983535	11.47336607	7.140266638	9.710876356	5.504362127	6.733137047	5.573693552	1.600208018	1.594660074	0.953142326	10.20227507	10.85191605	12.29899172
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Zm00001d047150	0.345567893	0.542564489	0.417706417	0.696648216	1.02294752	0.858335026	0.901626878	0.525126196	0.467047728	0.411308098	0.083572751	0.922925749	1.73750842	1.229879553	2.468289904
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Zm00001d047166	58.54330866	61.04084843	61.54974482	71.48949129	82.08415956	76.55932516	64.18575909	56.89791909	50.31025137	18.74997422	22.76088458	18.931636	91.20489347	82.90736456	99.96015738
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Zm00001d047175	38.94279295	37.61682614	35.89149091	21.22695707	17.03322036	21.46663917	12.34505151	13.42161491	13.68787003	10.66584055	10.8131695	6.935943388	13.90448071	13.24876256	14.159763
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Zm00001d047181	2.115246839	2.7426238	2.699218799	5.410285888	4.637784469	5.276601072	4.688555086	4.319130328	4.295426736	1.234081154	2.474570454	1.198249855	3.184557269	3.352493296	3.480028631
Zm00001d047182	0.410677383	1.034499366	0.40294031	0.795225315	1.651863505	1.297561225	1.351231268	2.293481214	0.599777893	0.670727152	0.74955933	0.2992959	1.862432143	0.710840476	2.49894262
Zm00001d047183	3.673464181	3.841154782	3.794728672	7.805992897	7.58779943	6.95733181	6.584853214	6.292054686	7.491036742	0.565146435	1.641674107	0.200853747	4.305506971	3.712931612	3.961934325
Zm00001d047184	11.08653068	12.2427921	11.12824461	20.3773131	22.25885016	17.43900186	12.3829256	10.93023436	12.36355123	2.317075732	5.808705216	1.687252846	19.11027483	19.49003631	17.58810148
Zm00001d047185	5.506469218	7.41372307	7.079437399	7.814661198	2.50192449	7.211431892	3.549963766	1.602649633	2.575897958	1.571240457	0.957770254	0	6.374395727	4.371175287	3.951453017
Zm00001d047186	32.0182466	26.46222186	44.54513498	62.5430354	121.5068271	52.54257759	70.30375581	83.71011628	68.7401164	4.09981655	11.34355756	3.310151637	24.91428599	22.76037946	28.96240535
Zm00001d047187	6.23430384	5.640997155	8.07442405	16.60193488	30.52702043	15.46204008	38.41067974	46.85302102	44.01780806	3.450691884	10.58098868	4.946038748	2.552336408	2.591261502	7.974823278
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Zm00001d047192	0.009737346	0	0.024203205	0.66791976	8.493712885	1.157169385	7.941906118	9.02884665	11.39639702	73.6468604	5.022154283	2.168104612	0	0	0
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Zm00001d047208	78.35751747	76.35840788	61.55018105	50.0855821	45.83060192	55.42237743	47.79713673	38.75202249	49.74104857	17.05083	39.23357886	22.10776506	15.45102698	13.91141576	14.92362721
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Zm00001d047269	5.613448439	5.226547979	1.095031481	1.346998868	5.11204031	1.775895507	3.42080708	3.581329325	3.10217762	6.644289168	5.645070003	2.59752751	1.335840102	1.215152976	2.349512605
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Zm00001d047290	12.40026229	14.21226199	10.63804223	3.018583028	2.963475961	2.72156472	3.473913613	4.497561622	4.116287586	1.257500447	2.034777873	0.924333165	4.643981754	4.506969969	4.031312617
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Zm00001d047309	6.915100878	7.571978224	7.031542685	7.299491336	6.045876728	7.214874572	5.5810609	6.456098099	6.148885764	3.03950321	3.006953124	1.488823091	11.40113908	10.89163278	13.33302117
Zm00001d047310	16.72984597	16.03996382	17.15298081	10.76495599	14.62908715	11.89508429	15.17355134	16.11690968	15.22270675	20.9865684	24.08914199	20.66676313	10.15843192	9.879890276	11.36357349
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Zm00001d047382	6.618256333	8.109152951	7.526559761	9.001816667	8.295854889	9.476482656	9.809110407	10.19429767	9.631886382	11.46385307	10.4724616	9.324084613	10.65195075	10.45959801	10.51987711
Zm00001d047383	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047385	7.80082741	6.535667336	6.940806583	8.874843022	15.8647076	10.10512704	13.36932616	14.10280966	12.90949075	43.80332067	29.87143916	53.92967086	6.680841633	7.367075188	6.516466189
Zm00001d047386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047388	26.36852769	25.7343441	28.90908142	20.64915034	25.06187098	22.24168583	20.38854048	22.3188659	22.71994429	21.43472847	23.37421519	18.88907978	13.43020066	13.94746448	15.37089903
Zm00001d047389	18.34566154	19.33746956	19.70088931	11.58631001	13.22046967	11.90889653	11.40406815	12.00365905	12.21717346	19.00324295	19.37326699	14.54856387	9.115659469	7.890091996	10.34500575
Zm00001d047390	0	0	0	0	0	0	0	0	0	0	0	0	0	0.431721016	0
Zm00001d047392	0.032120373	0.005056966	0.079838589	0.145214369	0.126969912	0.245949077	0.24865385	0.275950245	0.103984988	0.071986347	0.217713415	0.200145892	0.696409753	0.765849717	1.137275758
Zm00001d047394	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047395	0.027518587	0.103979286	0.006840036	0.137279951	0.021755865	0.074170875	0.083604219	0.019908691	0.02715044	0.053133735	0.027761457	0.018290305	0.609724809	0.536969773	0.750839704
Zm00001d047396	20.5516117	18.79214032	21.50453613	38.1781322	41.61667027	43.41090936	32.4228917	33.07159505	30.7346532	9.888967068	11.22445814	5.827301429	18.63780289	17.79546759	19.35928588
Zm00001d047397	5.94707473	4.764579779	5.925953776	11.36677992	23.04475314	14.09772512	19.0587823	19.45455771	17.29441072	13.73470423	13.6010772	7.659894978	4.548217492	3.954069206	5.227919822
Zm00001d047398	0	0	0	0	0	0	0.458059841	0	0	0	0	0.054280905	0	0	0
Zm00001d047399	61.28939651	49.67899206	54.02716541	6.918909519	15.99297819	4.009722454	7.700162952	10.06937354	8.570488769	95.81277557	64.785986	57.00071931	11.1351763	7.939912599	8.551936965
Zm00001d047400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047401	14.53286631	10.94875665	11.44608198	19.15159138	22.39117296	18.60232743	22.75407448	22.74107883	20.03651108	17.34966354	16.10502756	12.59909982	13.54157344	13.88490974	12.87266067
Zm00001d047402	0.074381033	0.037473275	0	0.083488318	0.323426147	0.018225389	0.104297086	0.143498553	0.018346489	0	0.046898435	0	0.016646953	0.05707737	0.017198925
Zm00001d047403	3.070831356	3.622823936	3.299802503	3.846531706	4.072774776	3.21182475	4.152360756	4.082697447	4.233710924	24.22746443	12.56421715	19.75675865	3.736477574	2.734243184	3.496037883
Zm00001d047404	0.056144698	0.026517921	0.470993371	0.551417199	0.675057244	0.472896441	0.205015875	0.067697726	0.077897231	0	0.115050431	0.069968867	0.04712079	0.238497684	0.016227733
Zm00001d047405	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047410	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047412	1.351341304	1.975336352	1.250394138	2.329123736	1.732934712	2.380648651	2.028550724	1.831599581	1.946369177	0.081622881	0.153409088	0.058275604	1.36134281	1.362444245	1.543328451
Zm00001d047413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047414	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047418	30.40919661	35.53742944	30.69826447	47.78970438	56.62212142	44.09085811	130.5661299	166.7477681	134.630618	87.22870953	84.42843176	38.60511617	109.2049725	105.0829568	117.0648124
Zm00001d047419	0	0	0	0.168813563	0	0.165832991	0	0.027201974	0	0.186682035	0	0.049981427	0.252451316	0.593540067	0.886794737
Zm00001d047420	0.451654488	0.568860499	0.410193577	2.98973754	0.549342506	1.766426896	0.730742224	0.71215943	0.214236633	43.86695721	3.439210596	9.890987894	19.67234097	16.56746052	15.30372147
Zm00001d047421	2.557296416	2.121841126	2.696211265	4.323004067	6.116406892	4.335768248	5.424080276	6.736973989	5.694876916	1.604671105	2.552355838	1.275456905	3.336385849	2.896401862	3.208804046
Zm00001d047422	13.63452883	14.69764598	12.65701645	11.9830087	9.449647889	10.98275393	20.89067897	22.13239568	19.59736898	71.05433611	56.54404985	105.7635185	9.137423763	9.341268909	9.071530719
Zm00001d047423	30.30492288	33.05435191	29.64775898	32.85405986	18.20996363	23.65196264	17.51517892	16.74930876	13.73132427	10.4977434	14.70169893	9.279755476	53.92163801	54.85091762	55.98813575
Zm00001d047424	3.287754885	3.948743942	4.560149021	4.143597857	8.316899676	4.98819917	7.456544897	9.208178713	8.896418018	26.69913008	27.86717836	37.8186715	5.930031459	7.489641501	7.850781337
Zm00001d047425	0	0	0	0	0	0	0.04121475	0.00850588	0.043499543	0	0	0	0.031575954	0.309326867	0.285450682
Zm00001d047426	9.617796424	9.029459727	10.51987131	16.46536985	15.69805061	15.48103219	17.04226127	17.14611741	16.3849385	16.75191426	17.81365072	15.31751702	11.21738175	11.36200963	9.830444092
Zm00001d047427	0.115998348	0.041742957	0.453083994	0.723340541	0.676884298	0.12181187	0.15490751	0.319697381	0.245242516	0	0.104484028	0.018356815	0.519223506	0.217991079	0.651391043
Zm00001d047428	5.77169448	6.143516046	5.221393113	4.468144968	5.513440364	3.96448876	5.012492349	4.778917454	4.678327216	4.777008531	6.553891831	7.357559397	8.063880025	7.005307557	8.048310074
Zm00001d047429	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047434	7.177397808	7.303218188	6.752318567	6.445258185	6.980369328	7.399939844	7.505419083	8.711150764	6.547948758	2.048030665	2.169845025	0.82902384	11.25630363	12.38356112	10.91418575
Zm00001d047435	0.212855921	0.294248217	0.187112219	0.386326634	0.250825848	0.52579554	0.171881157	0.204489978	0.177141153	0.071600831	0.030551659	0.003834018	0.27111354	0.185913278	0.168061799
Zm00001d047436	25.09620278	17.28726024	21.72685354	305.6182576	466.5741882	177.4553943	348.115682	408.4207631	429.1717982	2.670663667	13.73328589	0.961002675	11.22471497	11.51400474	15.45656183
Zm00001d047437	1.975468505	2.144563338	1.910677663	34.43021005	33.38117875	19.5845354	12.38194738	13.03602797	16.54441749	0.079796976	0.677503747	0.009156211	6.705833473	4.575802771	3.029288045
Zm00001d047438	0	0	0.019768063	0.009918656	0.062875589	0.029230597	0.111517186	0.02876858	0.019616548	0.01096852	0.020058016	0.052859939	0.320388476	0.069747	0.229869285
Zm00001d047439	19.55147922	19.87977507	18.36194236	14.39027626	23.58113083	14.39996744	19.53615641	19.39674772	21.63145804	15.20824671	19.95480388	14.65247853	8.123590145	8.031850204	8.704086469
Zm00001d047440	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047441	0.163890916	0.326833591	0.033947352	0.493960966	0.125971023	0.468507193	0.335136439	0.461101992	0.067374318	0	0.017222642	0	0.091699599	0.089831489	0.063160088
Zm00001d047442	170.9285267	170.6540031	230.8985736	149.9350502	93.38286726	126.7294981	65.09256304	61.56379861	70.07319612	81.20002523	113.0104835	68.12435128	147.0502741	152.7258989	135.3802164
Zm00001d047443	28.5448473	28.45718413	29.54740456	22.02332261	24.57337818	21.2958905	21.77090538	21.40937467	21.77380433	13.95924838	19.19513407	8.492617404	17.29872768	16.04135917	15.42404922
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Zm00001d047447	0.265408265	0.477546704	0.14136436	2.621024531	3.026099479	2.203134655	1.816473139	1.201715097	3.360060525	0.239047677	0.894779025	0.054001328	2.188104777	3.675468648	2.999597457
Zm00001d047448	17.56079625	18.67409391	18.44243298	24.41456251	26.62329565	22.78039239	29.82719556	33.10035805	28.72604462	31.93822856	31.06413158	30.55892632	38.65577217	32.79524831	35.69293711
Zm00001d047449	17.08300872	17.44280803	15.41728996	8.332172573	7.909791513	9.02372598	7.922042396	7.645627522	8.198857595	7.008171206	6.441085659	7.10674775	6.167542442	5.731624298	5.202651349
Zm00001d047450	0.379756498	1.913218857	0.235981247	0	1.000769796	0.46525367	1.331236412	0	0.234172542	0.523746819	0	0	0	0.208151204	0.219525168
Zm00001d047451	0.016399741	0	0	0	0	0	0	0	0.01769725	0	0.0103403	0	0.013763877	0	0.004740085
Zm00001d047452	3.452595335	3.559901499	3.577547754	1.236462702	0.744847749	1.459688997	0.508105501	0.377505257	0.418292937	2.230921565	2.149499655	0.741804506	32.60187128	45.5612796	75.82164683
Zm00001d047453	0.094665209	0.122543158	0.137258567	0.06559019	0.058902781	0.067653736	0.119834322	0.091949892	0.100533394	0.152318752	0.043107951	0.023303516	0.070622272	0.216198596	0.215851636
Zm00001d047454	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047456	7.263586022	8.190240376	7.357690069	10.2597544	11.98313052	9.364949533	10.57117471	13.54587342	11.27449155	5.672861198	10.64374248	4.964720381	7.516244005	7.258865992	6.844603835
Zm00001d047457	0.045119584	0	0.168224255	0.121920907	0.089177507	0.101342384	0.079083351	0.090673247	0.01854832	0	0.009482874	0.049981427	0.934069869	1.203567359	1.086758256
Zm00001d047458	1.682904314	0.166712017	0.846007457	1.768689822	4.310369495	2.895769733	1.281522189	2.827199353	2.285368539	7.041243542	3.886719124	5.446109065	2.137141804	1.844858805	2.492202733
Zm00001d047460	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047462	24.30952183	32.54240578	38.6929923	75.30730498	34.98321175	65.61718825	17.85422953	23.41061313	15.57109653	7.668709727	9.735452939	3.105232684	175.2391022	172.6388596	175.245281
Zm00001d047463	2.124772552	1.420242219	2.802820205	20.93207632	13.51960179	30.80378903	62.6361705	55.29632844	57.63805134	0.347022432	0.528830202	0.309700869	19.70978801	28.60482806	28.03457601
Zm00001d047464	6.212558842	5.742899314	6.335496519	8.34848243	11.15434268	8.554359011	9.566851506	10.70088772	10.9068838	6.43054569	8.207604079	5.313364594	6.286522701	6.674950479	6.262792579
Zm00001d047465	0	0	0.159536617	0	0	0	0	0	0	0.154911031	0	0	0	0	0
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Zm00001d047467	1.867337683	2.388477044	1.972021628	3.963892999	4.264426711	4.107271256	3.996535641	4.672328866	4.146494686	0.947414628	2.958717028	1.414760914	2.479382797	2.444782296	2.667859999
Zm00001d047468	0.03247565	0.025564501	0.013874037	0.067081806	0.040116969	0.068384104	0.073523858	0.045276717	0.033793439	0.139966487	0.020476418	0.003372661	0.270288385	0.305945649	0.286290412
Zm00001d047469	12.63034146	12.05487759	11.70572156	27.83119653	28.80209898	26.84215605	26.15008128	26.92298325	22.77800878	18.3121729	11.55727226	9.969693698	23.99187606	22.36204914	24.75803617
Zm00001d047470	159.5431862	153.9115389	137.1398247	163.6702925	251.4153348	191.8283812	224.1124881	207.5142946	201.792494	55.07570041	70.10591648	25.29097621	107.0262632	104.8459173	87.89765814
Zm00001d047471	9.600211367	9.947287863	10.1764517	8.995880105	7.941409051	8.215870988	7.790652074	7.539357721	8.343490318	7.495506046	8.276908455	8.000607191	7.036338932	6.748967521	6.858883797
Zm00001d047472	20.10366113	17.09396812	23.74373922	23.74182005	27.65012521	19.58371756	15.50370972	14.83894833	14.69549572	0.67583301	2.01027459	0.377922182	4.893592364	4.685102058	6.432764712
Zm00001d047474	3.792092982	4.118658461	3.39078529	3.56235538	4.140072168	2.630627381	3.257117332	3.064102468	3.595594529	2.893437038	3.738616166	1.549352231	3.912813515	3.131265953	3.188492348
Zm00001d047476	22.94092154	23.33082244	19.13622669	13.61685923	18.11632423	15.0913682	24.02586399	26.6675898	22.48056399	10.18893129	11.33633871	5.28933147	28.57817825	33.60540806	32.2050164
Zm00001d047477	19.70073306	18.29205987	16.53452493	24.73337204	44.64603894	23.8952144	30.17299021	32.93718287	29.72801331	2.621244866	10.67780683	2.192521812	12.92236081	13.07580719	18.21532704
Zm00001d047478	0.712839013	0.769562892	0.379679324	0	0.536725701	0	1.606408185	2.179501177	2.386205117	61.86649576	30.14568499	69.60206958	0.113955678	0.027908541	0.941873345
Zm00001d047479	13.64284091	13.4998153	15.96144806	20.24301928	35.46029801	17.28250706	65.37573459	77.94283573	71.63199441	28.7489687	32.4329055	18.88197639	13.56164275	13.93899777	14.82102627
Zm00001d047480	1.733891397	1.264329944	2.138683186	0.081294516	0.108793156	0.042591563	0.502704659	0.833127463	0.310840602	18.02181839	9.167925443	14.02755928	0.213965731	0.22389818	0.422024226
Zm00001d047481	8.791644297	6.744169793	9.185542893	9.618491341	13.77503117	9.568487341	6.930320168	6.721792635	6.284966058	0.110797743	0.519750644	0.205071983	1.715907853	1.405259943	2.883329028
Zm00001d047482	1.125492281	0.945041128	0.75074964	2.283929734	1.77625002	2.189072619	1.523182128	1.341753181	1.654674071	0	0.120278125	0	0.633288803	0.439150634	0.29406162
Zm00001d047483	0	0.026198509	0	0	0.143891587	0	0.121527858	0.050161723	0.173157634	0.086062619	0.209842399	0.046084055	0.046553213	0.011401207	0.018036301
Zm00001d047484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047491	3.499727305	4.210112577	3.33499635	3.852066463	3.824527432	4.237760847	4.828021208	4.43729741	4.442868519	0.553533016	1.05625039	0.266331328	2.807590891	2.741892475	3.086739926
Zm00001d047492	271.5679704	274.4942548	243.6743365	147.5772031	238.3005283	157.5543809	298.5319065	408.6928399	353.9483652	143.1704421	268.7028214	77.05335494	22.24249477	20.34317215	30.27846772
Zm00001d047493	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047494	73.06648219	69.22898483	74.56270919	20.98102104	14.82601446	21.12520864	6.665465696	5.642004563	6.627521101	5.310300207	10.33582436	8.943576477	5.698796926	5.356081306	4.817154904
Zm00001d047495	0	0	0	0	0	0	0	0	0	0	0	0	0.02565436	0.050263455	0.159029971
Zm00001d047496	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047497	15.6690546	16.02619591	13.4221565	7.010982398	6.350290331	7.337513208	8.65314195	7.724698089	8.340882987	16.23971317	16.29103129	19.91306549	3.905086081	3.692799221	3.649610252
Zm00001d047498	20.40620578	20.96366962	20.51755267	20.11615506	21.51836229	19.95907925	20.79466465	18.66878761	18.67547215	13.19796474	14.48930931	13.04251053	16.71651815	15.69589703	16.49633874
Zm00001d047499	4.050735976	3.911469663	3.607891059	1.010380438	1.556753016	1.323388218	1.183321255	0.773342045	0.041630674	4.562416735	0.68108107	0.63568971	1.58651627	0.407051244	1.678147948
Zm00001d047500	12.74820794	11.14297658	18.89533406	27.47575147	46.99665957	24.06754274	26.76039565	34.564734	23.54015745	1.345061895	4.809592794	0.790979966	17.79309034	14.10867423	22.99393297
Zm00001d047501	13.75066653	18.05268355	16.77127403	22.49873935	15.22281339	18.01423766	9.446707969	9.918306831	9.600318322	0.267790498	0.957151939	0.205314282	24.63175149	25.54253124	23.25464539
Zm00001d047502	18.22443518	17.02121889	18.70344601	18.31932332	19.07890356	19.32098952	16.97368894	15.57288133	18.00070681	8.428959866	10.58884069	11.3244606	12.0839672	12.01628304	11.47618937
Zm00001d047503	562.8818637	609.0513497	451.4610724	196.9888617	200.5919802	173.8359386	213.394976	192.3610947	208.2816532	146.768353	197.3702259	116.5923478	61.92985054	45.47542068	45.9749038
Zm00001d047504	1.618838787	2.887506899	1.40716538	20.31782736	13.58745358	23.1117388	16.78396627	18.60559163	18.01445605	0.283920247	0.660802475	0.072560306	15.08912401	15.96139336	15.66517172
Zm00001d047505	0.716112253	0.300648678	0.674232133	0.351828902	1.172330333	0.770991797	0.557851449	1.22978829	1.1240282	0.149641948	0.93040539	0.769237969	0.607085307	0.475774181	0.526860402
Zm00001d047506	10.75950627	11.89559993	10.67005255	12.98313206	8.19643328	11.40620949	9.484504844	8.675171859	7.869624508	8.725733388	6.451610963	6.974919701	20.33413016	21.80602718	20.85032692
Zm00001d047507	0	0.023717589	0	0	0	0	0	0	0	6.622583745	0.356195549	3.629642999	0	0	0
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Zm00001d047516	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047518	2.451814816	2.299708294	2.525355089	4.525768154	4.862031351	4.344861413	3.589209597	3.484641212	4.287122631	1.240148247	1.96752	0.874331724	2.694116465	2.624169553	3.305894585
Zm00001d047519	0.231580481	0.070404666	0.377128908	0.488001358	0.431406606	0.616352409	0.317257276	0.288862083	0.374238361	0	0.16112023	0	0.679141227	0.744091921	0.987863254
Zm00001d047521	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047522	143.1002894	148.9993032	133.2904078	62.94735268	78.13135786	66.66120489	95.10096349	98.18480045	113.623346	122.8862523	117.1456696	140.1483974	42.24621575	44.01984773	47.78214446
Zm00001d047523	2.145332092	1.783708657	2.404830427	5.333642887	5.912240026	2.886004306	8.339684109	6.357059467	5.343457134	0.270736817	1.414552991	0.450448003	0.01569082	0.384279146	0.22695525
Zm00001d047525	0	0	0.103601523	0	0.082380441	0.025532214	0.146111314	0.075385958	0	0.344906442	0.052560563	0.092343735	0	0.022845864	0
Zm00001d047526	2.734246784	3.276889551	3.365191697	1.548012193	1.431796012	1.120216592	0.856808702	1.288925327	1.094974159	0	0.105834387	0.029359042	2.975679143	2.377564255	2.425770834
Zm00001d047527	6.901867315	6.994275167	6.575128566	7.799169091	8.321042324	8.707925395	10.93189777	10.41900571	10.70044498	5.351680892	6.4865811	4.240843671	9.838942688	9.871943713	10.32383779
Zm00001d047528	5.736381356	6.243030263	5.760528513	7.265870491	6.056475222	7.155041706	7.297617593	6.857862277	7.097143509	2.052251532	3.375583967	1.846819698	10.99326996	10.61310797	10.27989683
Zm00001d047530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047531	2.01585616	2.74280552	2.439727886	2.360522748	1.807875442	1.978345767	1.903332349	2.031916056	1.85698946	3.954382828	1.601541717	1.282166381	2.55107057	2.071013422	2.574647205
Zm00001d047532	432.2171454	513.0501352	506.6180249	307.8841193	100.0412378	203.9140373	105.1676766	89.61755091	86.20894853	1.459008996	9.098817417	0.781257312	346.8885446	328.2247131	303.4778639
Zm00001d047533	4.598086549	4.874511486	3.714116538	5.785678195	4.728046281	6.236178557	6.127580877	6.217961231	6.51784631	0.501948582	1.764710548	0.391811662	5.191296408	3.714410239	3.917375995
Zm00001d047534	15.52194085	15.11697314	16.94546186	18.76879073	22.16758331	16.04976678	15.84737814	18.10653096	17.94558852	9.196771271	13.09496097	8.148155744	12.13305195	11.97755174	11.08929049
Zm00001d047535	3.029972057	0.763252204	0.994133762	3.657926518	30.85351988	9.087295095	19.09049664	25.07732617	13.66172572	5.382334332	9.261842141	4.215720718	1.790255821	1.620922143	1.62542039
Zm00001d047536	2.199142615	2.283621246	1.931799619	4.614659978	5.92254904	5.11429643	5.643258712	6.276350921	6.011811984	5.734626481	6.553634312	5.559153864	3.743066617	3.374187919	4.944954422
Zm00001d047537	0.666993078	1.054113435	0.633585448	1.610705918	0.97402455	1.493785246	1.146733168	1.229414262	1.246979699	1.933533937	1.17325368	3.807270778	1.01736782	0.684609181	1.414566152
Zm00001d047538	0.158678409	0.431062055	0.146937799	0.02328198	0.004099649	0.076236377	0.018178012	0.015006278	0.023022881	0.008582105	0	0.017233014	0.146231017	0.057982948	0.028777082
Zm00001d047539	3.670497586	3.142953598	2.641703909	2.883258542	2.540924636	2.912892545	3.219933073	2.70831595	2.861306006	1.265555327	1.288413041	0.579558235	1.364026174	1.423318833	1.298413734
Zm00001d047540	1.946575973	2.167058517	1.673366842	2.815107191	2.52561489	2.600445629	2.885922004	2.46193269	2.745823372	0.275892802	0.578502667	0.134237843	1.047167703	0.936219162	1.248675832
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Zm00001d047554	36.33545293	35.20433287	34.84556378	40.18123851	43.11871622	51.4188675	65.48759748	62.2881492	58.10511092	111.2002293	45.64079756	108.6805692	10.49675061	9.364638452	11.27420352
Zm00001d047555	140.8313623	123.5343731	151.6726295	43.01682029	48.69168626	37.07878176	47.3515253	42.51176788	52.4559932	87.64681345	59.78300243	87.73741207	36.56726524	32.13472335	31.8724087
Zm00001d047557	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047558	12.22993644	12.05195052	9.991672922	6.440395876	5.706626639	6.365445435	4.662237062	4.751609197	4.331078059	4.90643973	6.308132501	4.11222869	5.381438943	6.196686503	6.19795922
Zm00001d047559	0	0	0	0	0	0	0.035420924	0	0	0	0.009556466	0	0	0	0
Zm00001d047560	96.65415379	85.63197303	107.059363	86.35086039	106.9790629	79.63942183	86.0236381	94.70551509	99.91160336	106.4388697	116.9900918	101.955824	17.37125648	12.32792293	15.29594716
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Zm00001d047563	151.51044	161.2281135	143.6762462	65.51366469	85.15726069	74.1337948	75.99020417	79.48230653	76.80276664	58.80300212	81.1140544	46.45373363	59.21149424	56.67669179	87.56698475
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Zm00001d047582	0.874165913	0.533481593	0.896013171	1.95565561	1.840572005	2.848566968	26.36848498	33.87070734	7.513280122	2.286947218	0.500035624	0.289510088	11.57728089	12.69489084	35.55005325
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Zm00001d047584	0.040597577	0	0.050454788	0	1.430944786	0.124343965	3.53415101	1.51749453	1.114014585	5.333119057	1.036695643	2.889460829	0.05678749	0	0.023468169
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Zm00001d047592	5.901328001	6.342431315	5.751017871	7.517874135	7.799049253	7.768838123	8.174511159	7.391459002	7.464588816	3.601113264	5.316179605	3.044467164	6.221804015	6.800999035	7.477756135
Zm00001d047593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047721	0.002380918	0.026988981	0.044385187	0.053448808	0.090979072	0.052505116	0.125194647	0.117704675	0.07340832	0.019702075	0.078062779	0.023737261	0.127887563	0.083521486	0.173418001
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Zm00001d047727	6.313048559	5.863757253	6.284572381	11.36239121	14.35544381	8.523303535	11.48461251	12.05461253	11.73068812	5.576386981	9.598411091	5.929109548	7.619740993	8.193602921	7.652698199
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Zm00001d047745	6.949983782	7.512523465	6.253958598	10.07210808	12.77430481	11.01519501	14.45342391	15.38119339	14.99427579	7.692405018	9.562910726	6.919243556	6.182425508	5.034205185	6.326393248
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Zm00001d047754	46.13939424	36.37057602	44.68287294	23.03554296	58.10678552	28.79850779	41.78254368	46.97314817	43.93775903	45.84832751	39.11133457	28.31771625	13.86459613	12.41898432	16.54184391
Zm00001d047755	2.951794242	3.283539294	3.320170901	5.964507851	6.500932857	5.270553457	5.580536109	5.83095955	5.201328018	1.098283274	1.932682508	0.418897385	3.611811858	3.39680006	4.621386965
Zm00001d047757	18.31587147	11.00309709	15.27921895	38.57756051	93.9709728	41.13411316	89.78928005	117.2815602	93.88335098	109.2485548	82.35485819	60.21155617	28.74434936	33.2503824	48.60919904
Zm00001d047758	51.92307024	45.18491999	48.74085385	33.5564747	76.18300218	38.65389825	55.63591539	61.92384036	58.93529037	61.07539461	68.48286451	33.19524076	29.58858265	27.9420583	27.46060279
Zm00001d047759	3.391812834	3.567276594	3.919972436	16.04358615	8.592629043	13.10933522	7.996097306	7.116769395	6.27762218	0.198041173	0.181077897	0.005485104	27.38889221	28.95329723	28.80081149
Zm00001d047760	9.342872929	8.859507775	10.66742499	25.18236897	17.678371	22.04139264	14.47719598	17.31173808	13.90665571	3.041302551	4.070523581	1.998215818	50.53640249	52.66698536	51.57843598
Zm00001d047761	13.22511719	15.01797378	16.00644529	94.21543962	61.01546008	100.6306228	111.2038659	79.36000214	80.48337078	3.476813215	1.334849526	2.023538479	45.96063632	45.00696058	45.74499268
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Zm00001d047765	25.03114412	25.90278106	28.72519923	62.7176393	134.9095283	71.86462162	147.1753683	165.5792375	131.4870398	120.7797844	142.3219036	37.30527445	53.34681339	59.68878041	84.88517057
Zm00001d047766	7.507460456	6.730157305	6.776842017	13.07504456	14.55519591	12.02109141	8.106088691	8.967511546	8.796323539	0.38787193	2.009675642	0.276925669	5.017924316	4.693036521	7.315833015
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Zm00001d047768	59.24201366	68.9679589	72.32383533	114.3364334	49.70668378	85.98484946	31.92119825	31.17637147	27.58978308	29.03854021	25.87516217	14.9554053	212.3525969	200.4395916	192.0645648
Zm00001d047769	22.23858827	20.99929369	17.37346241	19.59630477	32.46458415	21.97089458	28.03234422	31.29746383	32.87274507	94.80297675	71.87718232	168.6393527	14.61718913	14.94762318	14.99005494
Zm00001d047770	9.055705107	8.179602195	11.8070617	10.54408124	12.26229524	12.05354401	10.99139033	10.88136279	11.87103534	12.79161035	13.36227708	9.032511688	9.572981654	9.686897449	8.840538954
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Zm00001d047772	20.04691378	19.00345691	18.85659892	42.05181111	56.01988887	45.72007879	63.21365293	66.05232548	68.57615199	110.3368067	102.2391969	105.1731578	45.2626466	43.07136193	53.3767041
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Zm00001d047794	24.98467532	25.57058594	22.80194446	28.68052732	29.94477277	29.91378817	27.55852306	28.34997612	25.16845751	17.99867329	27.38390084	25.11624678	15.59417389	15.89913198	13.93507586
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Zm00001d047820	4.739361092	4.821311519	4.474204436	6.876901854	4.743648834	5.471383164	4.366455432	7.198186352	3.484487419	0.251398473	0.574662153	0.555293659	11.11694615	7.293618193	8.535138517
Zm00001d047821	12.83634941	12.51332761	12.01018448	12.4427194	12.70595668	12.04403242	8.975175568	9.915804752	9.807360551	0.48936344	2.632040394	0.693635382	6.002637075	6.269323596	8.735425907
Zm00001d047822	0.591376531	0.525770068	0.86466411	1.778770904	1.375103537	1.491652989	1.422695402	0.671120457	1.072545992	0.047976808	0.13160202	0	1.051045402	1.29657544	0.442401865
Zm00001d047823	1.897947859	2.043570032	1.767525469	2.885413365	3.490597069	3.650451876	3.329553928	2.795705294	2.692726896	0.186476889	0.625181902	0.099853006	2.353623038	2.036679474	2.136389983
Zm00001d047824	4.132404041	4.91676674	5.115464443	7.659335576	9.59878127	8.244495149	8.168733828	8.645937805	7.53380908	11.64632712	10.33979931	7.273641279	5.300572791	4.422653542	5.230836252
Zm00001d047825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047826	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047827	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047828	7.877397434	7.501706043	8.516549925	11.78921803	10.94783398	9.922893086	7.972451419	7.464826523	8.351227629	1.360236898	2.002882456	1.130388829	5.322481079	4.872376344	7.246387295
Zm00001d047829	3.674144116	2.630675928	3.209344954	5.18609334	4.603541062	4.908426223	3.683087407	2.197919497	2.798361872	1.545053116	1.412711125	1.808911161	2.825982106	2.674742973	3.413616357
Zm00001d047830	0	0	0	0	0	0	0	0	0	0.037292099	0	0.119813074	0	0	0
Zm00001d047831	0	0	0	0	0	0	0	0	0	0.068265335	0	0	0	0	0
Zm00001d047832	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047833	3.38788021	3.458871849	2.72564539	1.301904391	2.473356106	2.487436786	3.664980105	3.963761124	3.555157493	12.81868046	10.41336128	15.70665044	2.280046556	2.572180204	2.350111111
Zm00001d047834	5.877036977	6.027551743	5.623538969	7.251290902	10.24454563	8.744336735	11.33643498	10.09676547	10.44024073	8.305207418	11.15019147	7.403677697	5.528229032	6.236154197	6.281009741
Zm00001d047835	20.40135825	21.44764982	16.86524348	8.126573927	9.911448574	7.780797908	6.509987233	7.233814671	6.976466683	7.730039162	10.41486787	7.367257933	5.2044496	5.162112618	5.412368212
Zm00001d047837	3.147693877	2.926202253	2.483786168	7.041276189	6.665702891	6.786879947	6.093644976	6.348262228	5.73054121	4.272281042	6.229663263	4.891307158	9.714474256	11.08440821	9.776642093
Zm00001d047838	7.00298387	6.446018945	6.962663173	7.250716575	7.799814081	8.104766903	7.441886027	6.903903058	5.888111639	1.810166197	3.276907249	1.678371181	3.942925192	3.756378174	3.625559985
Zm00001d047839	2.678550522	2.976744965	2.090246111	1.489776302	1.742964925	1.274927238	1.245960212	1.047119246	0.867649749	0.586214612	1.266074215	0.941703142	1.152209187	0.702949658	1.410703677
Zm00001d047840	0.022133676	0.009292482	0.183385318	0.607291534	0.534680031	0.442907434	0.508642947	0.711684672	0.391256443	0.976831628	0.158163895	0.286051289	0.4293171	0.606592824	0.622679051
Zm00001d047841	0	0	0	0.456955977	0.060347927	0.336665973	0.026758521	0.110448216	0.056483829	0.631654455	0.11550998	0.456614247	0	0	0.423606354
Zm00001d047842	0.362530976	0.585781419	0.586906604	1.912641179	2.291015573	1.592511691	1.875621993	1.650740306	2.026662848	0.072366972	0.159405587	0.015852449	1.310465444	1.236705759	1.659996313
Zm00001d047843	7.332023966	7.681353651	7.142663768	11.64364331	14.52808981	13.35699847	13.34478937	14.0753099	15.8717649	12.7655314	14.68149045	10.8135055	7.390503733	7.98354226	8.897453073
Zm00001d047844	0	0	0.471962493	0	0.250192449	0	0	0	0	0	0	0	0	0	0
Zm00001d047845	0.732387531	0.553466884	0.627035884	2.861992802	65.15011373	12.96063796	39.59477444	47.15714777	34.52372327	1.863042256	4.515202628	0.144232119	0	0.160573786	0
Zm00001d047847	14.59304949	16.0490086	12.72536216	28.26366336	32.78559225	27.63433056	82.3930387	77.14663233	67.07440061	36.83939503	37.3947685	24.55462058	61.70203466	61.52552294	51.549246
Zm00001d047848	17.42700526	15.92950611	14.2069107	12.17566952	20.33918656	14.6078488	18.77059865	20.27642117	21.31793656	5.663486497	8.331055784	3.728134732	9.323443845	9.121104813	9.076734444
Zm00001d047849	11.42438132	12.94143805	9.515623062	12.92234747	14.43841329	12.01660239	18.26705439	19.07896933	17.94750463	33.34764197	19.47385462	19.08841896	13.38381343	13.99218183	12.32893306
Zm00001d047850	0.011888029	0.119784137	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047851	0.510120669	0.128499774	0.380387681	1.272400738	0.268863527	0.041664508	1.510059214	0.820119215	0.167765403	0.0938054	0	0.075345137	0.646953596	0.298246501	0.314543524
Zm00001d047852	3.924387973	3.812079599	3.867790188	7.410799294	8.764715588	9.081611983	9.960545614	10.60815742	12.83247954	6.780212104	10.43664097	10.24778678	5.931895461	6.935769954	6.128582541
Zm00001d047853	2.3733419	2.845123881	2.104532897	4.664130643	4.363471177	5.514958142	6.459457025	5.490856992	5.696742633	5.581623202	7.185338107	9.4263036	2.264419486	2.164533612	2.441548206
Zm00001d047854	3.28837035	2.904859053	4.190495151	4.335919572	8.682735133	5.991943046	9.609901914	11.34559853	9.440781451	26.54732468	23.67985781	24.85667902	8.621295404	8.898317392	10.61388726
Zm00001d047855	1.19866269	1.502919552	1.120631323	2.424194771	2.006282577	1.911729537	3.047332641	3.28776465	2.736822216	0.498924695	0.490233116	0.299059489	2.906241085	2.710898147	3.058786696
Zm00001d047856	27.99644486	30.09724243	27.32437068	29.01247587	34.4137149	30.63679523	32.98069982	37.53736088	38.59846266	65.19753113	50.43674884	87.94545254	26.58950673	25.02366276	27.50715358
Zm00001d047857	61.1007523	61.35380286	65.06847908	55.75385796	74.97771951	63.07610596	80.00376047	117.8739387	87.11544164	58.96794429	77.08996224	51.52245389	41.1093127	32.12716152	38.53467971
Zm00001d047858	0.060986917	0.06401104	0	0.076060237	0.013393202	0.012452886	0.023754404	0.012256057	0	0.014018502	0.192266148	0.045039026	0.079620705	0.077998667	0
Zm00001d047859	22.90765294	24.08555885	23.48646524	13.49458568	11.51129356	10.84608435	10.51027382	10.60429147	12.26492965	4.115883539	8.546347502	3.250499467	5.578373626	6.369426847	6.013918738
Zm00001d047860	0.017594896	0	0.021866988	0.043887181	0.231838563	0.021556155	0.14391745	0.360662466	0.216993861	0.048532524	0	0.097454135	0.196892532	0.057864427	0.244105206
Zm00001d047861	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047863	4.431185431	4.671371668	4.810592624	3.579341839	3.777061919	4.238991048	4.160982355	3.802638569	4.065390344	1.180980733	2.517393338	1.366945909	2.341038421	2.047222079	2.217441744
Zm00001d047864	0.06835617	0	0.297336371	3.694203475	8.406466287	5.736577756	25.86592349	19.72632748	21.89044919	1.366979198	1.69525335	0.567913969	0.369714952	0.449606601	1.132749865
Zm00001d047865	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047867	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047868	1.190902072	0.385121159	1.420054306	4.064343028	12.77616061	4.455919791	13.12588133	13.56397053	14.87567632	2.374894346	4.038532138	0.980506755	1.071528793	1.173193603	1.590814517
Zm00001d047869	7.590799162	7.715603915	8.525600448	15.21917041	13.47294363	13.73675556	15.64463718	13.30031114	13.431456	2.754990395	5.234627449	2.054510978	11.35487513	9.920044273	10.81509593
Zm00001d047870	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047871	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047872	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047873	5.225006308	5.549828159	5.795598587	2.532307483	1.852081983	2.355131665	1.673616854	1.628799216	1.749078392	0.631336552	1.214723408	1.199292441	1.626335146	1.493147093	1.564996183
Zm00001d047874	0	0	0	0.426254247	0	0	0.199685462	0	0	0	0	0.757218626	1.529854974	0.187336084	0
Zm00001d047875	39.86660017	40.25347723	31.18097208	8.950362405	7.328746767	10.2744544	5.040535543	4.692808021	5.094088668	3.586183931	5.014238773	2.965873059	3.195625145	3.122598286	2.841869965
Zm00001d047876	5.699754082	6.075552748	4.688577421	5.557146358	5.640391581	5.745217046	5.657043926	4.907998363	5.617740255	0.499360487	1.826350455	0.407558936	2.476783577	2.471139797	3.166563802
Zm00001d047877	0	0	0	0.18333516	0.089398791	0.193951902	0.237838763	0.122712627	0.069728797	0	0.028519214	0.062631814	1.417235378	1.673473701	1.163537861
Zm00001d047878	0	0.04228108	0.01043011	0.083733185	0.01105823	0.010281849	0.029419589	0	0.010350168	0	0	0	0.065739624	0.046000266	0
Zm00001d047879	0	0	0	0	0	0	0	0	0	0.198472479	0.42343527	0.053138149	0	0	0
Zm00001d047880	2.974664907	2.968197958	2.768471495	4.07408431	4.724945923	3.798300457	3.864751909	3.660469504	4.053872195	3.948005083	5.065762493	3.923393078	2.215363761	1.86126263	1.943337549
Zm00001d047881	14.42928752	12.3742143	13.2781718	7.22631411	10.62634566	6.758502399	10.3970185	11.22640325	12.43126439	22.51924423	26.29753705	23.96161493	5.954801959	6.524623196	6.573100545
Zm00001d047882	5.06400874	5.138994836	5.268418529	3.899069858	3.260647638	3.739341128	3.296100078	2.983803503	2.696796339	2.791692347	2.091502951	1.674881508	7.076073396	6.794442562	6.254935706
Zm00001d047883	12.45519425	8.462512518	11.47975617	0.582126196	2.03930449	1.203890899	4.148003484	2.577075421	3.52963033	19.95602435	13.87863312	9.34787414	2.845282837	3.500979822	2.186967708
Zm00001d047884	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047885	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047887	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047888	16.64324129	11.91602614	20.74582959	17.72970564	33.61281163	21.48258252	27.20352669	35.05920501	24.92410356	27.94075422	28.10847486	15.30898526	16.62885842	15.20408796	23.5369158
Zm00001d047889	0.541361177	0.582293074	0	0.011159705	0.001965077	0.001827112	0.013941169	0.003596465	0.01839252	0.199511715	0.077106409	0.259372367	0.021695336	0.019618484	0.027587323
Zm00001d047890	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047892	0	0	0.02831775	0	0.030023094	0	0.106498913	0	0	0	0	0	0	0.024978144	0
Zm00001d047893	26.18490868	15.87248373	24.51809712	23.75191973	38.04739153	29.47795213	59.74225014	107.0973552	64.53412033	1096.449184	449.9327889	1300.529852	24.07283449	37.89020242	43.96733274
Zm00001d047894	4.553591837	4.744700803	4.216467856	4.366888676	4.021146938	3.759329382	3.490218354	3.225756238	3.750773414	2.048189825	2.819677974	1.575607912	2.375769276	2.061384814	2.18611599
Zm00001d047895	0.796515889	0.726465824	0.827771485	1.755542354	0.615239694	1.194563919	1.957739937	1.192241615	1.278716159	0.61555377	1.021749885	0.59330038	2.443465002	1.97968418	2.349834441
Zm00001d047896	5.629879727	5.588654155	5.046704719	7.523364221	7.7177686	7.863142186	7.358093518	7.613022684	7.664873322	12.0310413	11.924083	22.85900175	9.296746832	9.677328557	9.822614125
Zm00001d047897	21.40790262	20.42020012	20.76843388	26.7065368	26.04432132	27.13366802	27.1843825	25.13606543	29.33170077	24.88312001	25.96447699	25.08568837	19.96006413	20.384019	18.54190318
Zm00001d047898	9.094281569	9.431118608	8.512760127	8.315129029	7.70834078	8.537846473	8.052989893	7.45561584	7.245050928	6.868634528	7.562895955	7.001067027	7.288200841	7.097432747	7.347391347
Zm00001d047899	0	0	0	0	0	0	0.015615676	0	0	0	0	0	0	0	0
Zm00001d047900	0.144045568	0	0.146471119	0.408289509	0.51763955	0.561513051	0.137714112	0.268424076	0.177648135	0	0.198159363	0.116048832	0.337037015	0.143552555	0.090838
Zm00001d047901	0.757259248	0.442822169	0.201669433	2.057488354	1.122525172	2.153696516	0.553035898	0.326100816	0.383570454	7.030951363	5.883039842	11.69906522	1.134907251	1.008020075	1.156904147
Zm00001d047903	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047904	11.63492733	10.13168485	11.2144084	8.258524584	10.35361498	9.817143395	9.154426176	8.621742198	9.537305787	6.109883301	6.880264318	7.542052486	4.992249888	5.052429683	4.681539561
Zm00001d047905	0.79533908	1.922243474	1.041879466	1.340422161	1.812715102	1.00073431	2.813178834	2.747399371	1.511075646	3.231419053	2.737777237	4.143271726	1.106498881	1.248907225	1.913596744
Zm00001d047906	2.131757728	2.083692301	2.250417186	4.591877983	6.207062276	5.475483895	5.251210701	5.058125994	4.787778153	3.000586833	4.597989169	3.264109187	3.800843786	4.204629261	4.193313979
Zm00001d047907	0	0.045492654	0	0.270280104	0.095185502	0	0	0.021775953	0	0.024907378	0	0.180051985	7.740217374	5.662152703	15.80581207
Zm00001d047908	9.725001874	6.94955847	8.030468688	11.25198505	29.28657436	14.65164625	24.70438428	26.56391136	26.6930898	13.67550453	14.48579147	9.232338735	8.393695673	8.321767422	8.718446466
Zm00001d047909	0.085668307	0.044958145	0.195192843	0.32942887	0.912451208	0.551015835	0.300310251	0.542306508	0.431415523	0.009845893	0.081022862	0.007908289	0.479327929	0.547823535	0.742831899
Zm00001d047910	39.75586023	41.55554466	36.28743384	22.0124645	24.13122278	22.05062782	23.36662711	20.30039245	25.05093427	14.02989601	19.37634994	13.30819859	19.81671049	19.20797871	18.29030935
Zm00001d047911	0	0	0.017243555	0	0.012187995	0	0.037829452	0.083648831	0.005703797	0	0.029160799	0.005123265	0.207016911	0.207869538	0.267351354
Zm00001d047912	4.748675689	4.432826614	4.099296481	9.99188481	11.30235488	10.84468387	15.87150683	15.99391613	14.69016156	2.353811707	3.757978243	1.998351871	12.58716383	10.31439033	17.32914066
Zm00001d047913	9.454236393	14.13497514	10.77765097	29.81659062	23.12226335	27.2485881	64.09803979	67.90587102	56.9563543	32.92569555	38.16785939	16.27454957	54.49632645	59.46289623	73.68182044
Zm00001d047915	0.104433037	0.107618561	0.247780309	1.33796472	1.951501102	1.081714784	1.852637341	1.785809591	1.182571335	0.104749364	0.251414692	0.031550776	0.818047452	1.124016502	1.514723657
Zm00001d047916	0.295416819	0.49610477	0.091786223	0.849438236	0.746072081	1.226527083	1.4766656	0.742094668	0.637579021	0.045269833	0.082784464	0.00909026	2.396711575	2.356881342	2.096689356
Zm00001d047917	6.267592261	5.402220571	5.004029691	0.799979706	11.700351	2.622673602	6.465790421	9.010972951	8.377790736	15.57206766	22.4342387	21.4195704	0.847517171	0.88108322	2.081828271
Zm00001d047918	8.353469052	7.336469836	8.648512086	8.793003635	9.039410647	9.655991169	9.456510898	6.947056214	9.155531085	4.837574947	5.764385426	6.023418641	7.188190297	6.393169596	5.594329156
Zm00001d047919	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047920	12.81514387	12.21281558	14.07021219	40.9313024	42.16278322	36.52702107	33.26644959	33.24265462	34.80896274	24.13184385	38.04887684	25.92445621	40.0792677	43.246505	47.20534544
Zm00001d047921	0	0	0	0	0	0	0	0.024658783	0	3.440981345	1.921271371	8.008280754	0	0	0
Zm00001d047922	0	0	0	0	0	0	0	0	0	0.170787006	0	0	0	0	0
Zm00001d047923	0.082969103	0.109724887	0.092802821	0.695872508	0.524755032	0.592102532	1.068867106	1.170489673	1.266258441	6.073269896	7.96209191	5.928156742	0.782219885	0.775379816	1.064752019
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Zm00001d047931	6.439892639	4.585429472	6.698933816	7.169175638	18.28829046	12.14592763	22.60424826	25.10329443	22.59358328	45.6722546	53.46354104	47.10352061	7.094574257	6.676059827	10.065249
Zm00001d047932	0	0	0	0	0.018419076	0	0	0	0	0	0	0	0	0	0
Zm00001d047933	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047935	0.796905325	0.847723991	0.622343611	5.33867076	3.419723809	5.996439981	3.120724351	2.856689381	3.008181023	1.292142605	2.457987782	3.07778504	6.489380888	7.301606478	8.777548254
Zm00001d047936	0	0.057684991	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047937	23.02889785	19.61122352	17.69102769	5.874282449	7.673077735	3.997630011	4.479458096	6.47631241	6.383793745	6.870278884	13.5901019	6.836162046	9.288127148	10.24294597	7.729967124
Zm00001d047938	0.163433759	0.205845424	0.162492765	0.591099733	0.764485236	0.590674714	0.639757367	0.266036281	0.403118302	3.674054195	0.164876171	0.045261125	0.237753911	0.49269502	0.283427592
Zm00001d047939	0.457923556	0.325588298	0.58746709	9.404766858	5.255257925	15.6451915	4.375603637	1.843473808	3.015018915	1.283476808	0.475004373	0.098180697	11.38093085	8.452895577	7.548534775
Zm00001d047940	0.935354947	0.972257019	1.082292097	1.643874511	1.736787344	1.788716691	1.552760181	1.693034089	1.628232104	4.780445958	4.549935949	7.510255826	1.077972678	0.9263678	1.068968102
Zm00001d047941	38.54767051	40.92209948	37.08741343	26.6983406	30.90906115	28.58962117	28.7119688	31.08447963	30.72055183	36.34934551	37.52657997	40.80447674	24.12916784	23.97780373	24.17962495
Zm00001d047942	1.608760513	1.78211454	0.971582524	8.629835514	12.18233857	8.865325138	11.4753082	13.20465577	11.78476636	18.50737106	28.25512777	21.95790873	10.25205271	9.490750556	17.89731839
Zm00001d047943	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047944	0.324218986	0.158804727	0.380554738	1.909439315	1.329085579	2.008130467	2.252052113	2.084982922	0.710847873	2.906484324	1.930683122	2.873240635	15.68151739	14.31553736	16.84703816
Zm00001d047945	0	0	0	0.064994294	0.045778542	0.159616888	0.08119358	0.010472933	0.021423663	0	0	0.076972668	0.126353969	0.114258348	0.371547044
Zm00001d047946	0.445018625	0.387406212	0.309068784	2.766877736	1.802247953	2.164799271	1.552365678	2.264730357	2.122686093	0.785244154	1.254408529	0.616214296	1.325532553	1.513754473	2.436319524
Zm00001d047947	0	0	0	0.236807915	0.250192449	0	0	0	0	0	0	0	0	0	0
Zm00001d047948	0	0	0	0	0	0	0.01105525	0	0	0.247918909	0	0	0	0	0
Zm00001d047951	129.5333808	115.7703332	109.1701892	45.35589876	46.30959413	50.34572791	38.4625722	36.13018351	40.52880544	49.49868665	56.22917345	64.49941823	33.22170391	34.87652857	36.30800209
Zm00001d047952	1.114551615	0.396228757	1.239948799	2.511004638	19.15082557	2.819051826	13.7377296	21.52400454	21.50507601	10.06585603	6.528706113	3.126451657	0.130756835	0.108386426	0.083133791
Zm00001d047954	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047955	39.24711545	37.65512163	36.48963615	24.07835106	44.74290602	29.31240888	49.54759349	49.79602815	41.23991632	53.81967313	73.29734446	66.43283218	22.22540759	21.07770461	23.18329476
Zm00001d047956	0	0	0	0	0.067467627	0.015682708	0	0.015434828	0.015786913	0.264815807	0.048426586	0.935888189	0	0.014032665	0
Zm00001d047957	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047958	46.03516282	38.85355428	55.02459025	63.61832706	85.97430647	57.3934427	58.7115508	59.53211403	61.21107654	4.814013315	14.96180857	4.867228345	28.40425025	25.05646343	40.7977568
Zm00001d047959	0	0	0.019220192	0	0	0	0.090355413	0	0.038145753	1.215756191	0	0	0	0	0.017879878
Zm00001d047960	9.136277685	9.841003402	9.710513744	11.15158361	10.31278701	11.10646335	11.46672762	9.533209079	10.1162538	12.11838271	12.3580259	19.48183843	10.82780851	10.95158258	10.33260206
Zm00001d047961	0.030046668	0.018921945	0.093355218	0.131155153	0.079181786	0.147245118	0.140438127	0.199261932	0.463198434	0.145037581	0.359953217	0.033284335	0.184927524	0.2635057	0.468963655
Zm00001d047962	3.008511047	2.890390003	3.430302625	6.04260115	7.388999923	4.963023289	4.435183748	5.428714929	4.301392458	2.504013707	1.888091617	0.964930593	3.90684561	3.673858101	4.473190417
Zm00001d047964	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047965	5.721239069	6.540314546	6.221066237	7.143468536	6.050752703	6.020036208	4.307260959	4.670249111	4.461029085	0.995936328	1.535651803	0.530871161	4.426111031	4.947651671	5.889704761
Zm00001d047966	2.145428462	1.860621775	1.89433743	2.512930728	2.496765883	3.005762544	2.488634393	1.919717773	2.362648049	1.187879383	1.415261888	1.266367919	1.851714498	1.81971362	1.442378421
Zm00001d047967	0.004935464	0	0.049070469	0.03077648	0.006503197	0	0.017301267	0	0	2.947352135	0	0	0.027614711	0.081156426	0.045648555
Zm00001d047968	17.45810153	18.242946	15.60799907	15.68935821	10.54332123	12.52908476	7.999918346	8.048719284	8.443404317	2.154001002	4.856299882	3.815718271	19.67982455	18.17658402	22.36064806
Zm00001d047969	28.20118917	25.60108059	22.25399165	10.39926493	14.15007059	11.54865214	13.1356261	12.4368357	12.41966919	7.166471464	11.37018906	5.464297149	4.302375874	4.519600022	4.495800221
Zm00001d047970	3.120497259	2.560441593	2.349636323	0.557775074	0.575907675	0.13698175	0.237544044	0.196096907	0.137891935	0	0.064088716	0	2.218005353	1.54883067	1.739226904
Zm00001d047971	2.644610566	2.831046822	2.193987806	4.898297054	3.719076945	4.35075054	2.626493462	2.272998579	2.85226375	0.212329792	0.353770995	0.064428011	2.829236302	2.164022429	2.519595167
Zm00001d047972	0.954945892	0.853238499	1.227384251	3.868098243	4.947088903	4.989741454	8.249691916	9.024591844	5.747642704	2.206303018	3.880256088	1.74499337	5.662746771	3.695274153	8.832382147
Zm00001d047973	0.08627717	0.071409359	0.061271726	1.429558059	1.66626547	1.32881683	2.632708433	3.670795048	2.979303017	0.370570234	0.456952776	0.117419405	0.433081917	0.418854569	0.547190032
Zm00001d047974	0.068527488	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047975	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d047976	1.578181384	1.389012856	1.157916326	0.640270636	1.102377856	0.943449028	1.233106329	1.42146393	1.020067316	2.648600047	1.678429097	2.517041051	1.000044281	1.261066266	1.450881219
Zm00001d047977	9.077337836	8.726470144	8.248857502	16.68700064	34.16877266	23.44140381	29.01635826	31.96992158	31.78898702	13.67550453	17.69571116	10.85634049	10.20839695	8.828118349	10.72101906
Zm00001d047979	0.494625313	0.451277012	0.540868293	0.298628647	0.426050041	0.310486341	0.277752215	0.31611601	0.31901593	0.282027819	0.319583273	0.367863817	0.340315476	0.316138623	0.27683409
Zm00001d047980	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d047983	20.89999397	19.32741498	19.09215251	19.92877	23.26093508	18.97613486	19.92655914	18.4315327	21.94878813	41.32449855	30.97205109	30.89751696	20.82381446	18.26787488	20.60522687
Zm00001d047984	0	0	0	0	0	0	0	0	0	0	0.014200877	0	0	0	0.013019615
Zm00001d047985	10.565325	11.28518308	11.53672708	11.60978383	13.05918366	11.3834242	10.68387308	10.6459534	11.13627173	12.74238911	13.31221196	12.55426924	8.415666803	7.928608215	8.482889566
Zm00001d047986	16.90039713	16.04494905	14.33723984	8.574906868	10.08892928	9.448576976	11.43134436	9.995003231	9.670109487	14.21768557	15.13805641	13.72827534	9.96144205	9.286517294	8.323710122
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Zm00001d047989	5.541458407	5.322511814	4.654266738	6.778360271	6.686230713	6.761956307	6.26527518	5.758624619	5.533790909	3.241904398	4.790497092	3.774994705	5.799005513	5.899013121	6.20058189
Zm00001d047990	0.050169666	0.04739166	0.116908141	0.27374126	0.13221179	0.407203671	0.263804647	0.234411139	0.37897281	0.112437391	0.079081948	0.00694696	1.221076906	0.735594898	1.080305504
Zm00001d047991	0	0	0	0	0	0	0	0	0	0.03584579	0	0	0	0	0
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Zm00001d047993	0.633994828	0.6896299	0.93835376	2.659596483	4.336387843	2.704434067	5.596580735	5.239980925	3.269727899	32.17730879	16.6075424	56.1146248	1.425370781	1.446879028	2.465493451
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Zm00001d047996	0	0	0	0	0	0	0	1.129068235	0	0	0	0	0	0	0.216517974
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Zm00001d048007	3.200061004	3.84996722	3.607087539	5.637556172	4.125754192	4.720823937	3.362445519	3.107441627	2.78740864	0.076027764	0.114700712	0.009159903	5.854162785	6.212306261	6.510337511
Zm00001d048008	54.7536847	51.99089777	47.6763491	29.7520565	23.72083237	31.13990946	22.58511431	19.32653351	22.04451857	1.801508455	5.94478089	1.91480572	22.10156863	21.46828454	20.04113384
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Zm00001d048014	0.01382329	0	0.017179626	0	0	0	0	0	0	0.19064596	0.209179348	1.54659416	0	0	0
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Zm00001d048017	2.218845633	2.354542823	2.190328171	2.279711213	1.876203567	2.202002516	1.860328456	1.832769932	1.809936782	1.59031622	2.285796741	1.635398693	1.820674051	1.843434945	1.825495547
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Zm00001d048019	13.51169035	11.24603132	14.20787533	13.44802132	11.70719436	14.01265421	5.226375227	5.021604806	5.278635449	2.777017339	5.348867441	2.858233686	5.411438723	4.927278243	5.062948252
Zm00001d048020	2.949377876	2.294405863	4.463279822	0.865490857	71.39247883	6.057744491	17.69801098	13.6812121	23.70729528	51.20489205	24.30645882	30.59624498	0.815404936	0.380377835	3.851162332
Zm00001d048021	33.25817776	26.49986367	31.97619178	7.354283077	107.5112695	16.73757304	112.2868974	149.0193969	139.8868221	482.7319129	313.3157998	412.8069574	11.72994394	7.229698967	20.40902304
Zm00001d048022	0.994271558	1.147931314	1.493117706	1.033343629	0.709636765	1.319628592	0.726128952	0.099905432	0	0.17140805	0	0	1.576214216	1.634933094	3.161162414
Zm00001d048023	2.690786425	2.642314426	3.01403991	3.228691903	3.566715274	3.947352373	3.341675076	2.513417556	3.110046628	0.321894631	0.693518885	0.326899721	1.389958503	1.382228561	1.572517017
Zm00001d048025	1.739975226	1.819732026	2.12383122	4.63067114	4.442053209	2.702700867	4.465693056	4.252224935	4.253424892	1.628376474	3.31083763	2.047932192	1.616778553	1.481658117	2.20922146
Zm00001d048026	3.953220364	3.064802582	3.472541556	6.280129952	7.68699091	8.492120336	7.956024915	7.367534753	7.753333202	1.852669826	2.313491092	1.683652868	4.827504187	4.417807702	5.493429349
Zm00001d048027	6.108131621	5.411182249	5.748844345	6.40237303	12.56990979	9.988940249	12.92742829	12.62810675	11.25721013	0.530057022	0.34618202	0.121641546	12.24191179	12.44393102	13.63171945
Zm00001d048028	6.045993402	6.208480193	6.677801511	20.1327194	16.96109849	20.60154701	14.16770399	12.78301266	15.16631351	4.678279857	6.811101659	3.519539751	13.20715538	13.11224537	12.94283176
Zm00001d048029	3.276576725	3.806673056	3.253030739	4.920124781	5.223025837	4.660226848	6.733195738	5.880797	4.96987675	2.778888081	3.371984532	2.211161827	4.014288879	3.746721675	4.702555657
Zm00001d048031	0.144318304	0.171944063	0.077560741	0.233497334	0.219284224	0.173623909	0.240040346	0.217910706	0.197226061	0.10220908	0.259048845	0.198756387	0.219693867	0.195264239	0.195411847
Zm00001d048032	0.128532968	0.014717068	0.058087691	0.262310306	0.123171667	0.014315498	0.013653707	0.084535365	0.028821236	0.032230573	0	0	0	0.153711658	0.067546205
Zm00001d048033	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048034	0.069056894	0.051163184	0.002524239	0.111455575	0.074935073	0.072162358	0.028479876	0.02693929	0.035068477	0	0.005122527	0	0.190919355	0.082382233	0.234821157
Zm00001d048035	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048037	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048038	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048039	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048040	0.008735613	0.014670049	0.043426581	0.137999245	0.11894133	0.146265052	0.105478157	0.150975301	0.172374932	0.224893203	0.121174767	0.18708703	0.159665375	0.060649808	0.188525128
Zm00001d048041	4.710853479	4.923962353	4.557301687	3.761880442	3.390018388	3.79328171	3.562633981	3.604958811	3.289660727	3.417779372	3.770171553	5.19553857	1.691014259	1.721401003	1.918031705
Zm00001d048042	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048044	0	0	0	0	0	0	0	0	0	0.213886136	0	0	0	0	0
Zm00001d048045	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048046	13.16561218	14.72062702	12.06021939	8.415944453	9.99346226	8.743857032	10.03824214	11.17327852	10.98445766	11.56638601	13.00959909	12.83394015	7.970261514	6.646034038	7.290234087
Zm00001d048047	0.691880738	0.641120815	0.794357405	2.512634989	2.142387781	2.750821436	1.847914625	1.64267932	1.730941124	0.468021016	0.442473931	0.445261705	1.128173568	1.141307675	1.14653559
Zm00001d048049	8.694988694	9.275056004	8.557251283	8.629747409	8.4142989	9.084629026	9.625352552	9.151322209	9.398885329	9.478079305	9.555839	10.32768929	8.413762156	8.443599892	8.274325942
Zm00001d048050	0.026753882	0.044928819	0.155165751	0.111220939	0.646289692	0.054628611	0.489769952	4.13991686	0.252961337	0.368980146	0.292391702	0.177820421	0.259466597	0.166195091	1.288797462
Zm00001d048051	0	0.083485914	0	0.020666873	0	0	0.019363439	0.079924345	0	0	0	0	0	0	0.01915856
Zm00001d048052	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048053	0.47822203	0.428456152	0.710752027	1.586348298	1.721482844	1.123454229	0.403259497	0.321008798	0.26144904	0.1767858	0.335720407	0.180225133	3.839809096	4.204759413	4.571316725
Zm00001d048054	0.263715166	0.150977376	0.242085102	0.328894114	0.307996667	0.08811468	0.108553254	0.130082916	0.081308484	0.264513957	0.366564416	0.146065846	0.268277944	0.308804768	0.346466727
Zm00001d048055	0	0	0	0.084616228	0	0.016624449	0	0.049085051	0	0	0	0.007515818	0.075923324	0.089251931	0.047064453
Zm00001d048057	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048059	3.131153575	3.011776781	3.066233746	6.077560556	5.852889163	6.23740082	5.307768405	4.596724109	4.810357241	1.182654108	1.835211391	0.654084906	4.148155155	4.087821067	4.702087461
Zm00001d048060	2.949615538	2.441319678	3.409767383	2.522490887	6.366541004	3.051554211	8.567326939	8.80673223	4.954192784	134.6574596	113.0037699	245.2039876	3.248322206	3.284797085	14.93974017
Zm00001d048061	0.036824873	0.057976329	0.263154845	0.803711712	3.384421492	2.018918958	5.002221671	3.929613646	2.066395276	0.672935307	0.348280093	1.519536367	3.17303254	2.694611952	4.449043397
Zm00001d048063	304.1265307	341.1416392	273.9560749	30.82146095	17.74441831	30.16991109	13.89264666	4.473329745	19.52638731	0.483458602	1.731353922	0.291237933	0.817230221	0.73653503	0.540369643
Zm00001d048064	472.5228382	531.3178291	281.7795311	10.43153854	9.729002575	14.73499599	4.954221585	3.860270002	7.114102529	0.119334718	1.054759647	0.287551377	0.710059271	0.031617904	0.400147141
Zm00001d048065	70.70157876	73.84816829	70.64355119	37.3652002	33.37132153	36.92394727	44.8597731	37.87528937	49.21594125	18.60553646	27.78054265	20.28577724	14.78305513	14.05835133	16.94543403
Zm00001d048066	0.405407266	0.094557769	0.261251067	0.262166259	1.028797945	0.634645863	1.833465635	1.113443567	1.814740751	1.85339072	2.44255083	1.413807429	0.47046611	0.674862553	1.54499426
Zm00001d048067	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048070	0	0	0	0.125011429	0.00733762	0.040934742	0.052056495	0.026858487	0.020603368	0	0	0	0.093473827	0.024418553	0.006438213
Zm00001d048071	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048072	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048073	0.315719128	0.442666324	1.021659985	0.416039004	0.141285148	0.379501033	0.257546391	0.251396021	0.308556761	0.057509455	0.097655006	0.006598855	0.013332069	0.137134911	0.33746614
Zm00001d048074	16.3573378	16.31509422	12.98972499	11.48368362	10.88479191	12.03335707	12.52067605	11.54477379	13.72250323	16.88159156	20.40584926	30.69744621	9.704773616	10.19759363	8.926369429
Zm00001d048075	66.4872556	65.65135268	78.1760795	145.1818773	103.9676128	136.251367	106.1100125	103.8146526	108.8665515	123.5454013	193.3834997	148.0688556	144.1329659	122.392908	121.2370903
Zm00001d048076	0.113979718	0.215336814	0.125914959	0.1184588	0.141841388	0.093093833	0.355160803	0.221420792	0.163996704	0.48905678	0.231568352	0.308639366	3.323307008	3.325020254	2.877111692
Zm00001d048077	0.694785148	1.009712845	0	0	0	0	0	0	0	1.474189639	0	0	0	0	0
Zm00001d048078	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048079	0	0	0	0	0	0	0	0	0	0.10947998	0	0	0	0	0
Zm00001d048080	10.37717179	12.17631085	11.52489764	13.16048038	13.41371423	12.43439255	12.96515924	12.55476124	14.67251165	1.570737016	4.40249025	0.82976216	6.200789948	5.431005721	5.859443949
Zm00001d048081	13.09130457	13.865074	14.03519788	14.52516983	16.87442566	14.98761447	11.92900098	12.0074593	11.46881183	1.079044651	3.730111262	0.593002538	7.015675297	6.244536125	8.125076084
Zm00001d048082	0.010225306	0	0.02541608	0.102020463	0.094313384	0.050109595	0.02389654	0.024658783	0.06305319	0.05640953	0.025788877	0.067962779	0.022884891	0.190558769	0.130040339
Zm00001d048083	0.065475258	0.16493266	0	0.081657902	0.293329078	0.17647553	0.306031359	0	0.549094235	0.70434917	0.577964809	0.40617091	0.102576483	0.459368175	0.151396667
Zm00001d048084	1.636859373	0.842074404	1.165182277	4.063671744	10.62199848	6.637514421	9.428655872	9.553351606	8.700319454	4.069857238	2.335473504	1.668519962	3.388211692	3.007486538	3.891481555
Zm00001d048085	6.567970056	4.676625086	5.522753153	0.974900951	1.354677822	0.978507409	1.012699421	1.608483659	1.215543236	5.507642124	5.00373944	4.131994738	3.993406397	3.166899613	5.412680205
Zm00001d048086	0	0	0	0	0.041049426	0	0.024268647	0	0	0.193346718	0.039285677	0	0	0	0.012005934
Zm00001d048087	0.011205929	0	0.765971915	0.083853295	15.34130879	2.416268242	28.03452943	29.2395356	30.2105612	32.45513075	21.62048591	7.845281499	0	0	0.012955584
Zm00001d048089	1.825130421	2.234469733	1.861942042	2.345043547	2.383064142	2.391525931	2.761341644	2.684744249	2.696646866	1.366075457	2.939997088	2.451218316	0.994174171	0.877133631	1.114860004
Zm00001d048090	9.938508901	11.15120942	8.971369785	10.16341454	9.796177606	7.936783186	10.47766666	11.4070286	13.96897776	22.01036651	32.73564357	34.40090635	9.821220163	10.11713487	9.391945494
Zm00001d048091	9.090366959	9.162851419	10.39949721	25.03843871	37.20904549	26.92429822	32.39790749	38.14268777	37.81355552	26.80900194	40.17197809	26.27165699	28.01656108	31.48468628	30.98248578
Zm00001d048092	7.501950267	7.904260188	6.851677886	8.572481635	8.142289768	7.958631356	7.344990821	7.612882764	7.639683881	1.149602914	3.099086109	0.561318477	5.341450652	4.59938554	4.683746015
Zm00001d048093	1.086167949	1.3406719	0.701944217	1.842285305	2.108613479	1.76540111	2.851440705	2.409795211	2.696953254	1.118510156	3.79861423	1.812832727	1.709742583	1.539966112	1.984098231
Zm00001d048094	1.712356572	1.043573922	0.892438169	2.411135135	2.110714479	1.861014682	2.355885045	2.331126739	2.213994939	1.218901688	2.646928703	2.049844361	1.514401894	1.089955396	1.46882294
Zm00001d048095	28.11322347	27.95506049	26.25688518	14.19933057	13.94456583	13.78477936	14.79867441	14.55990821	15.74059055	10.82899975	14.32624092	12.40750818	13.21122026	12.45402761	10.77863204
Zm00001d048096	5.779787837	6.256536444	6.311573656	7.434243353	5.988362328	7.288664796	6.603448559	6.020163512	6.159892357	3.250842325	4.343129179	3.659854059	4.401221421	4.382030708	4.283649837
Zm00001d048097	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048098	12.83487608	12.02289238	8.845132373	8.394701291	7.894307627	9.576562609	8.466663582	9.231261886	8.212017788	1.464026402	4.593916856	1.9153177	9.530096576	7.255416325	7.540302111
Zm00001d048099	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048100	16.36574596	13.14230174	15.30856	16.55977747	43.52121511	19.6750326	26.25715707	30.81279512	29.23902601	18.07854143	31.20191052	14.69503903	7.549693032	6.343223616	8.833644892
Zm00001d048101	23.24513445	20.51531775	16.30500346	10.32911375	12.88983617	12.44645154	7.366349518	6.87931496	7.04453697	1.484636652	1.756226362	0.655858652	3.997800155	3.105058711	4.177028091
Zm00001d048102	27.44439689	26.79130469	31.09938129	42.40296211	52.41310295	40.92064296	44.88735638	53.14028569	52.09760712	33.23766626	41.86250435	32.6175628	37.39091026	41.32218481	41.96715618
Zm00001d048103	2.658295485	2.391523571	4.011681193	9.472316603	8.256350818	7.676685562	7.543673003	6.868498427	7.259348789	7.332455467	10.5354728	6.520493722	9.986553306	6.244536125	5.707654358
Zm00001d048104	0.072143715	0.090865276	0.017932084	0.116966865	0.038023971	0.061870145	0.143309883	0.165278907	0.177946417	0.029849423	0.045487769	0.135859806	0.234120286	0.316345893	0.191838352
Zm00001d048105	11.03371286	9.733553265	9.468166604	17.47300415	17.37003506	18.52055749	20.9793537	17.94526723	18.10866	16.01496291	20.28293331	22.44592629	19.49979262	20.82969555	16.16320096
Zm00001d048106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048107	0	0	0	0	0	0	0	0	0	0	0	0	0	0.064115023	0
Zm00001d048108	1.405907034	1.068553085	0.933883231	2.630079397	3.225885619	2.55394568	4.446896101	3.65345661	4.842887456	1.236933977	3.240116393	1.584251735	3.716137083	3.746721675	4.147624444
Zm00001d048109	0.157241029	0.253058341	0.108566452	2.505775766	2.140943947	1.616050449	1.143247117	1.537841437	0.474031062	0.144574202	0.165238319	0.067738407	3.812418147	5.209499274	4.979083291
Zm00001d048110	3.079956148	4.75006061	3.944955461	8.54468284	11.01536962	8.085787927	10.87023388	11.63381527	10.31005176	1.213647801	3.368709171	0.66147834	7.420675853	9.129942472	9.737833642
Zm00001d048111	0.380732736	0.147549012	0.167431424	0.219153855	0.810391994	0.287045966	1.581057127	2.380137758	1.842077062	25.70533231	23.42967029	34.87617921	0.242521997	0.231160206	1.063201583
Zm00001d048112	32.99533174	31.12996942	34.97566324	28.50371912	28.7855007	27.25463104	31.05540821	27.30621359	30.00983686	30.82509904	31.58448473	25.97279154	18.6852516	20.6498706	21.11463444
Zm00001d048113	1.212319515	1.292010006	1.251698618	3.512381518	1.425380173	2.056510085	2.615252979	2.743651213	1.472124245	0.411566395	2.069724533	0.950397184	7.993648775	8.85309951	8.150882622
Zm00001d048114	0	0	0	0	0	0	0	0	0	1.387380434	0	0	0	0	0
Zm00001d048115	1.668450333	1.780560448	1.636015859	2.425803921	2.394356144	2.53969566	3.049578998	2.964923793	3.318418185	5.344027044	4.977280161	6.299254754	2.455549371	2.546955713	2.543289658
Zm00001d048116	20.11930686	18.19519598	16.70371478	59.1922665	32.09465115	61.80409554	51.35457234	35.59356965	35.46993692	3.752781791	2.724272931	2.502749137	160.2564608	174.8711158	204.0646641
Zm00001d048117	2.172806319	2.456999158	3.134006162	8.28772759	6.290221294	7.519621968	8.876968559	9.217493017	8.684487018	10.7835946	15.41987888	15.58359446	21.31503277	20.08103728	20.4082005
Zm00001d048119	15.89370148	16.18531791	15.91052083	13.93829138	12.75141918	13.87017989	13.60422356	12.19120056	11.96323078	5.487038822	9.214521206	5.666434683	10.99761518	11.89395538	11.43593524
Zm00001d048120	0.184746404	0	0.45920675	0.230407701	0	0	0	0	0	0	0	0	0.206737159	0	0
Zm00001d048121	0	0.130658849	0	0.009241284	0.048818039	0	0.086584482	0.107215585	0.009138441	0.132852852	0.168193801	0.073874988	0.016583794	0.024368921	0.239871403
Zm00001d048122	7.192810975	6.39702597	7.47977781	8.933947285	10.94757625	8.464486247	9.250997202	7.787903728	8.725902523	3.387670907	6.947776492	2.395781192	6.767719214	5.417593259	6.154875995
Zm00001d048123	2.613149607	1.324536132	0.633683907	0.476927829	3.779130699	1.87402877	3.09070272	5.494798742	3.026229768	5.274093842	1.326143429	1.376761138	2.424944948	2.969429766	2.873784013
Zm00001d048124	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048125	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048126	14.1815977	12.98602998	15.00683283	17.17205355	23.96601219	18.15265353	20.18742302	20.5236625	19.63924569	6.507107024	10.17412183	4.306342621	9.830442211	9.671839113	9.472188408
Zm00001d048127	1.314666265	0.978814005	1.187172354	1.292291417	1.378132543	1.182198336	1.418892434	1.065902456	1.253949034	0.799389982	0.77583474	0.419680622	0.981977021	0.93357442	0.812378309
Zm00001d048129	96.45328177	110.4148036	96.38926304	33.38384403	43.69386591	34.50631389	47.86193135	52.72893408	60.27841398	99.33059864	87.6728156	93.42805024	14.33966629	12.12080473	16.01970839
Zm00001d048131	3.012759679	2.158695517	3.086939794	7.088929595	6.942656676	3.133285248	4.701702745	6.708390432	4.566020527	7.045189826	9.683704541	3.092655896	2.315010711	1.526578077	2.407251495
Zm00001d048132	0.60293647	0.194265299	0.418231379	2.150944509	5.653579525	1.992717259	2.883662875	3.38141461	2.59391123	0.502796946	1.750509327	0.264055726	0.988521676	1.075981609	3.24221786
Zm00001d048133	17.34549993	18.06886465	16.84037582	10.02092724	12.74589549	10.22151031	11.23935746	11.92238072	12.0933248	7.235326955	10.67346823	6.606489465	5.377407499	5.379030946	6.006659537
Zm00001d048134	2.878697558	2.378167138	3.718708249	8.106873229	10.48202508	10.83321226	12.68341771	8.385270231	9.747233218	6.147404173	3.760242161	5.234809518	15.6911163	16.03879648	15.68652292
Zm00001d048135	0.950953444	2.112124931	0.571861809	3.991550617	7.302550584	5.950514409	7.037531012	7.71819898	5.27124668	6.148638797	5.183564369	7.339980097	3.901873944	3.22828973	4.823314379
Zm00001d048136	24.12022878	33.47611686	21.06470201	24.7157776	35.68412412	29.45930461	25.89925881	34.22645756	15.16059833	94.37717885	36.59360901	96.78780854	43.35283851	33.05690677	52.69321816
Zm00001d048137	0	0	0	0.02895749	0.085663719	0.153609568	0.065114825	0.072791152	0.040089321	0.044831589	0.122974578	0.020576593	0.181878139	0.086541126	0.118114085
Zm00001d048138	0.489553469	0.22184349	0.173833855	0.500715485	0.788404853	0.853640876	0.992752277	0.840148273	0.575004952	0.300077753	0.431159933	0.350059387	1.350724551	1.226664466	1.431447171
Zm00001d048139	9.692765477	9.176003322	10.04637122	10.63462867	11.70316338	11.14539099	10.03794203	12.00809586	10.06312549	7.636315994	9.474735585	5.094909382	6.181805087	5.486395038	5.346729755
Zm00001d048140	2.970689411	2.754380648	2.900842641	3.127034642	3.126890487	2.838386345	3.041139375	2.756972191	2.771795861	1.349763738	2.211639264	1.47270268	1.62338111	1.742219645	1.797366656
Zm00001d048141	0	0	0	0	0	0	0	0	0	0.125281631	0	0.012578382	0	0	0
Zm00001d048142	0.004464805	0.005623439	0.044390986	0.083524673	0.188257153	0.060169972	0.119993876	0.172273246	0.099114178	0.043103918	0.039411839	0	0.144891555	0.141939815	0.139371955
Zm00001d048143	0.210095801	0.122857632	0.233131857	0.028073825	0.375700626	0.13789077	0.087677481	0.117616438	0.092537997	0.19662065	0.283861656	0.415597489	0.167931391	0.049353085	0.225549459
Zm00001d048145	0.037713749	0	0	0	0	0	0	0	0	0.156040432	0	0	0.028135264	0	0.00726704
Zm00001d048146	2.634116232	2.550958476	2.092897348	4.363651469	4.490345377	3.903251767	5.271762672	7.710554039	5.276337117	13.22902078	13.77467332	12.33355681	6.162711674	5.419727233	11.10287589
Zm00001d048147	10.26327503	11.77291229	7.540518912	9.950027095	9.37032008	10.00362431	8.689482634	7.814648931	7.834994835	8.109774233	6.284849768	4.571680176	6.238457605	6.77001294	5.295174793
Zm00001d048148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048149	3.343109986	3.021307881	3.552271928	5.691592793	6.455274701	6.091849296	6.10996341	6.620949247	6.33743322	4.058659886	5.395899883	2.579227154	7.614577131	7.984766027	7.945272129
Zm00001d048150	1.207656057	1.811985845	1.536134038	2.30721878	2.421604816	2.651263246	2.805718361	2.882998006	2.776334659	2.688365175	3.130107323	2.112176454	5.825103645	5.40434198	6.709329445
Zm00001d048151	0	0	0	0	0	0.146068013	0	0	0	0	0.008352648	0	0	0.007261089	0.038289273
Zm00001d048152	0	0	0	0	0	0	0	0	0	0	0.007765705	0.027287158	0	0	0
Zm00001d048153	0.476753681	0.129832005	1.569353135	1.912318771	4.074764863	2.367926315	2.047669958	3.169478633	1.843363871	0.106625177	0.53620691	0.142736781	1.658183997	0.678011839	2.785755756
Zm00001d048154	0.39526266	0.292587109	0.422288531	2.598821228	2.023874805	1.733108271	2.98996441	2.796870676	2.591279821	0.267784323	0.795753323	0.199722894	2.510312373	2.022070435	2.858114128
Zm00001d048155	6.7712955	7.084965296	7.90668389	9.072032223	9.446102592	10.05807593	9.538439854	10.85798554	8.913380163	4.774205392	5.176383634	2.798275845	11.01914361	9.910062804	11.04649141
Zm00001d048156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048157	15.77802374	19.00720442	3.002535258	4.398201277	8.026274345	3.717353447	4.107432951	5.342932445	5.295358981	0.521114925	1.501629746	0.583451537	1.012215603	0.589936076	2.303359548
Zm00001d048158	5.611112341	5.116701221	0.438641643	0.925272655	1.528045769	0.8912868	0.833250189	0.833773466	0.684010838	0.158945294	0.190746658	0.135645065	0.072543176	0.118442203	0.274811274
Zm00001d048159	16.68638601	16.09411239	8.613908419	11.57621808	15.51947533	8.248316328	10.68556933	10.36372426	9.122138404	2.17920787	3.301660274	1.048521603	3.348426298	3.062646863	3.900708506
Zm00001d048161	0	0.016509079	0.065160689	0.065388955	0.293610314	0.224820566	0.291008535	0.047414371	0.080826572	0.45193877	0.165291127	0.07260006	0.117342663	0.086214113	0.303083645
Zm00001d048162	0	0	0	0.064953028	0.223028697	0.478546632	0.425995652	0.659375849	0.11240282	0.125699237	0.147770268	0.086539272	0.597371942	0.34255741	2.242919998
Zm00001d048163	6.03142673	5.613046499	7.287656146	26.20209931	37.66132218	22.82479771	23.94267842	34.01926868	26.2617618	8.919100242	15.12713608	5.103802012	18.89820851	18.47648042	28.80299332
Zm00001d048164	0.039360558	0.148724307	0.016305806	0	0	0	0	0	0	0	0	0	0	0.014382809	0
Zm00001d048165	32.85548459	23.94822224	29.34304742	46.98595667	124.8374047	70.84690374	126.6357764	124.3277164	102.5998729	14.24952553	32.18438321	7.87681444	52.87085008	52.7268533	56.69805191
Zm00001d048166	0	0	0	0.04970895	0.052518532	0	0.023286934	0.012014866	0.012288938	0.013742628	0	0.011038172	0	0.010923387	0.011520271
Zm00001d048168	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048169	0	0	0	0	0	0	0	0	0.060269609	0.690840308	0.23109738	1.204512202	0.013671626	0	0.070624719
Zm00001d048170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048171	5.048726217	5.383698464	5.14530793	7.074643391	7.390191937	6.734146737	9.114592202	7.29896505	9.166104053	1.870927088	4.898009736	1.835896317	6.741673103	6.541199086	5.489310814
Zm00001d048172	0	0	0	0	0	0.095030537	0.045318686	0.023382122	0.047830987	0	0	0	0	0	0
Zm00001d048173	0.210186083	0.172650097	0.045429545	0.159560413	0.457571217	0.302290486	0.213567339	0.716233793	0.383191432	0.214260062	0.184383578	0.404929746	0.184073459	0.080143779	0.169046118
Zm00001d048174	17.89633933	14.74825662	20.51630335	19.63216029	25.29893024	18.17632088	18.45040771	20.12333579	18.16310468	3.995737321	9.978570625	2.427111357	10.90148313	10.30224397	12.19106123
Zm00001d048175	5.846989022	6.227624973	6.121256294	15.23566891	11.19604953	16.35712404	22.88693383	18.63768903	20.33773768	2.051821905	2.534767047	1.545035004	19.73295634	21.01581832	20.54218064
Zm00001d048176	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048178	0.145117034	0.350319596	0.691348862	2.948525619	4.087177487	2.866835089	1.194050174	5.402449183	0.238626066	0	0.053374194	0	7.787983528	4.102999941	15.15568358
Zm00001d048179	0.033324153	0	0	0.020780219	0.098796287	0.061239971	0	0.010045336	0.020548962	0	0	0	0.009322699	0.02739833	0.009631817
Zm00001d048180	9.799672977	8.874592668	7.693393656	7.212540315	7.329211611	7.228928812	6.257684741	6.57378749	6.99609677	1.770322413	4.438329599	2.201705848	5.004270689	4.698059889	4.986689825
Zm00001d048181	0.228670579	0.977181674	0.578534669	4.929678748	2.001539592	3.782062095	1.727267316	1.546027603	1.097841163	0.270320939	0.638513503	0.14474908	19.95025931	23.82324104	23.80313753
Zm00001d048183	0	0.044493462	0	2.114749753	0.884401215	1.990852915	0.206393242	0.042595339	0.043566984	0.097441269	0	0.234796473	0	0.077451611	0.163367567
Zm00001d048184	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048185	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048188	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048189	0.485331956	0.325485366	0.13316784	0.078608437	0.68102177	0.115830789	0.935363897	0.775199822	1.391431865	0.565038062	0.73124368	0.712183493	0	0.006909584	0
Zm00001d048190	31.33158155	31.55969522	33.95638654	20.81270738	26.22838612	19.86810542	24.29018463	26.79318653	24.90744306	6.953084604	19.41380645	7.250201798	13.17873603	11.77855025	14.84402145
Zm00001d048191	13.94586009	13.78166126	12.40434756	5.854640884	10.59572089	7.906683845	5.906578131	7.626490909	7.398264704	26.20509508	21.51465837	23.13010567	4.763390253	3.800817468	4.435152539
Zm00001d048192	0	0	0	0	15.08072458	1.698068696	0.19631136	0.354503145	0.025899267	0	0.185374888	0.930529801	36.5661189	9.001340552	26.65865077
Zm00001d048193	40.94059356	45.96636193	51.82602471	54.17759864	64.11776884	53.97340655	30.39490367	35.17258874	28.23895445	13.34966224	15.58041237	2.996480123	124.5972795	101.2857081	139.1249554
Zm00001d048194	5.889327768	6.188761255	4.60193867	7.814050343	10.45516167	8.554586834	8.983270304	9.709210158	6.799259144	2.399417929	4.002376128	1.757945219	8.616122169	6.662270355	9.744425841
Zm00001d048195	63.65409369	67.50618808	56.75134453	21.51938108	20.57946617	21.97689156	17.59652494	18.35762307	16.97538042	4.385189276	14.61470338	3.96966128	13.18920425	11.1152743	12.59675325
Zm00001d048196	0.911415595	0.991395226	0.257434087	0.051667181	0.054587443	0	0	0	0.051092191	0	0.052242014	0	0.139077725	0.227074041	0.191585601
Zm00001d048197	0	0.081413568	0.02008351	0.08061546	0	0	0.132179502	0.292276529	0	4.947735908	4.095996195	6.784535677	0	0	0.074731972
Zm00001d048198	4.274468487	5.005514451	4.126927848	4.890358805	5.399502156	4.760735232	6.914173614	6.559682219	5.598357506	6.406763414	6.748939235	8.296142049	5.633186922	4.279201499	5.901653344
Zm00001d048199	20.09527121	15.42332296	17.87656818	17.60051677	29.32982319	22.3737631	26.47598675	26.34842972	25.51564945	8.871510365	12.9272231	5.856576087	16.54256589	17.00560452	18.18992897
Zm00001d048201	20.44023415	20.22553048	18.99604318	9.092808521	9.358037439	10.42853381	50.78735385	43.85724042	34.90299259	0.163334146	0.63471077	0.086094159	30.81245536	32.11185929	49.65951675
Zm00001d048202	0.04818056	0.060683594	0.014969735	0.480709636	0.745948236	0.354166671	0.633363579	0.784279644	0.341664959	0.08306117	0.243028928	0	0.552634837	0.448946386	0.334219815
Zm00001d048203	182.9904863	174.1326137	160.2953688	13.69612154	23.6062177	15.26420908	27.25736358	36.52646961	40.79215772	120.738807	140.317059	185.6247999	9.051261371	12.43240541	11.68686463
Zm00001d048204	40.32002393	33.63705711	43.94938684	59.09884467	75.52109324	54.46123726	59.18795296	71.04321713	60.00956049	43.96815791	55.98399999	36.4681613	66.12660667	60.23270954	72.79695897
Zm00001d048205	0.956239312	0.922108761	0.232112702	0.568338996	1.279672854	0.887795528	1.108636225	1.297132818	1.068748124	0.968502315	0.664158717	0.322748922	0.46397241	0.384909112	0.496630707
Zm00001d048207	0	0	0	0	0	0	0.013718194	0.014155772	0.00723934	0.064765601	0	0	0.065687204	0.019304706	0
Zm00001d048208	1.590389628	0.828205478	1.843504504	0.228861341	0.282096184	0.318495801	0.536068354	0.442534127	1.074993412	1.265428556	2.815458869	1.18580098	0.171124718	0.787901202	0.088399396
Zm00001d048209	0.375288774	0.016881343	0	0.23402194	0.847710886	0.344835073	0.250585678	0.404029319	0.909140456	0.073940727	0.135214624	0	0.599943127	0.367325654	0.356405566
Zm00001d048210	0	0	0	0	0	0	0	0.016786554	0	0	0	0	0	0.061046382	0
Zm00001d048211	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048212	0	0	0	0	0	0.00835785	0	0	0	0	0	0	0	0	0.015774264
Zm00001d048214	60.13206795	45.64820616	51.48078383	27.06270455	17.61511211	22.50664631	12.37633852	12.85697049	10.55971805	0.245506321	1.818266967	0.354946231	18.10726786	17.79692795	17.80211906
Zm00001d048215	7.229182785	7.81375974	6.229904911	4.714630309	5.308628873	9.326221303	6.268913287	4.857901615	3.30821936	2.928220852	1.371352864	2.271655877	10.14108411	8.583398746	7.399993832
Zm00001d048216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048217	1.816535348	1.189445287	1.684566656	5.764218344	8.425009604	6.792212057	7.847857729	8.111582214	7.844447106	2.75046887	6.725018284	1.84612424	1.970597428	1.711221114	2.723146817
Zm00001d048218	4.472687641	4.742166397	4.969724715	11.03484404	8.048926309	10.53779681	6.857194967	5.84702943	6.789002231	2.97237511	4.592385579	1.761809718	7.736446096	6.753350179	6.687074337
Zm00001d048219	8.347211317	19.95962764	10.05252402	0.845279133	1.727356086	1.256458053	1.010801816	1.290363697	0.868867199	0.614966911	2.080479418	0.326004105	1.387148346	0.948289635	1.989903281
Zm00001d048220	0.162252007	0	0.201647272	0.074945802	2.866380656	0.338663771	2.162747156	2.99255193	2.467921256	3.505765521	4.175457312	4.287022373	0	0	0.00694761
Zm00001d048221	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048222	0	0.014921118	0	0.059099376	0.577567317	0.101597855	0.179959168	0.299976014	0.189935441	0.098032334	0.224088361	0.013123373	0.079541853	0.051947614	0.369806695
Zm00001d048223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048224	8.729592405	9.493440404	10.03667074	19.37628308	22.44764657	24.40520519	16.08717757	19.84619292	14.22820506	6.788819528	8.365335134	3.897918664	16.78321913	15.7246378	18.9625284
Zm00001d048225	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.012224139
Zm00001d048226	2.940050306	3.332703815	3.71480156	4.400043842	6.876256986	4.232307583	5.75437675	6.971895178	6.587046976	4.22376467	9.392327657	8.114995308	2.111090198	3.034978848	4.078919244
Zm00001d048227	0	0	0	0.183829325	0.194219475	0.015048636	0.057411813	0	0.015148628	0.609861525	0	0.081640822	0.096217294	0.013465307	0.298222869
Zm00001d048229	0	0	0	0	0	0	0	0	0.046886605	0.870386816	0.498594526	0	0	0	0.008790774
Zm00001d048230	0	0	0	0	0.173361697	0.249112201	0.139762353	0.086532264	0.191763341	0.164959628	0.66365183	0.463738441	0	0	0.069141785
Zm00001d048232	0	0	0	0	0.350402157	0.148091354	0.282490485	0.29150126	0.357780859	0	0.015243028	0	0	0	0
Zm00001d048233	0.863096921	0.829242167	0.481321523	0.53130841	1.202867784	0.867619957	0.730536858	0.393597482	0.539042257	0.007630468	0.041861266	0.018386531	1.31873375	1.085654682	1.298494476
Zm00001d048234	93.98078606	83.17994444	89.08971587	8.941668501	13.92694303	13.53376645	37.03764552	40.40547033	33.45602259	16.18953518	16.03638363	10.29447311	18.08859939	16.55619421	18.75733369
Zm00001d048235	8.907557817	9.182449701	8.107714879	6.154115373	7.302914729	6.546812764	7.079810039	6.941554818	6.894104956	4.421939142	5.977087604	3.08520928	6.246574365	5.888483237	5.613107337
Zm00001d048236	18.38072253	18.98602821	16.26089821	5.930493873	5.10514147	5.651837054	4.634136823	4.073946893	4.644703747	3.464971034	4.442732221	3.561500032	4.82842804	4.318523768	4.532242186
Zm00001d048237	5.12671272	1.6740665	1.41588748	2.131271236	0.500384898	4.885163539	0	0.686849843	0.702517625	0.523746819	0.239442564	0.841354029	1.487359003	1.873360837	0.658575503
Zm00001d048238	9.08611239	9.748585929	12.12870998	6.557757649	12.56351006	7.283725154	5.947554679	7.81106775	6.674998232	0.212721785	0.548139284	0.388317244	1.302338081	1.537116585	2.577563199
Zm00001d048239	1.594172153	2.159976766	1.335837304	4.413162347	2.928047319	4.823513318	3.626796021	3.11630812	2.576725422	1.149281889	1.187905863	0.307703682	5.054467849	4.9912158	5.375651631
Zm00001d048240	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048242	6.944118817	5.557445251	6.787270141	17.45612631	18.91931472	15.81862479	13.3546256	15.83025352	14.45179114	11.22314612	15.14189164	17.62837012	12.1821785	8.524287408	10.57902236
Zm00001d048243	0.332920857	0.395644041	0.266938724	0.746698328	0.77475148	0.753250444	0.545880131	0.492071529	0.559585916	0.129599566	0.457066323	0.086250354	0.360531416	0.523893526	0.512167909
Zm00001d048244	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048245	10.31822455	0.527890963	7.340454171	0.020633525	0.225264036	0.2026922	0.128881298	0.059846537	0.0204039	0.39550385	0.222539599	0.183271955	0.092568877	0.024182149	0.006375882
Zm00001d048246	1.469210825	0.545604403	1.069209956	1.904118241	0.945996887	1.970704446	0.141589514	0.102274118	0.250309847	1.136390173	1.09635301	1.728196731	0.989846338	0.77707323	0.759995838
Zm00001d048247	0.005607561	0	0	0	0.007388784	0.00687003	0	0.013522885	0	0.038668756	0.014142629	0	0.012550082	0	0
Zm00001d048248	0	0	0	0	0	0.034821481	0.199270315	0	0.140211418	0	0	0	0	0.031157769	0
Zm00001d048249	0	0	0	0	0	0.028729215	0	0	0	0	0	0	0	0	0
Zm00001d048252	15.21259853	13.89545534	9.109570182	10.15488059	14.04021155	10.29373746	9.504636444	11.89866345	10.072863	1.952497333	4.637439063	1.475462763	6.524381509	5.19765801	7.234645598
Zm00001d048253	13.04007068	10.23688748	2.538237311	7.544848695	5.601869956	2.990916453	8.161360514	5.212400548	4.14901524	1.116839907	2.560450271	0.507890542	2.965093483	1.383806612	3.325003149
Zm00001d048255	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048256	13.48453425	10.37689452	16.23467812	16.88492595	31.59963696	20.74826413	20.3309709	24.02945688	15.89484811	1.852264081	5.073228872	1.581152549	8.943249124	8.430949037	7.638315348
Zm00001d048258	20.6628314	23.29761271	15.34860038	12.66851549	11.32707769	13.90617389	21.27314162	20.85140345	17.3706591	29.29582146	19.2867698	27.05104635	22.33270904	24.18750012	25.58053514
Zm00001d048259	1.806980483	2.30584464	1.861584234	2.935594467	2.224319651	2.388571887	1.861415784	2.608834881	1.29018889	0.327911052	0.65961221	0.105352157	2.953285255	4.092071673	4.205720429
Zm00001d048260	0	0	0	0.010929596	0	0	0.081922241	0	0	0	0	0	0	0	0
Zm00001d048262	0	0	0	0	0.026926542	0	0	0	0.025202426	0	0.025769603	0	0	0	0
Zm00001d048263	0.342439385	0	0.687482938	0.361371616	6.733503137	2.388122886	11.57329228	8.035746137	3.83339097	113.27463	17.67169163	41.4938299	1.149602004	1.70371159	1.370446133
Zm00001d048265	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048266	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048267	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048268	0.321967466	0	0.246241301	0	0.261070382	0	0.057879844	0.149315183	0	9.803174156	0.874485885	11.96185945	0	0	0
Zm00001d048270	12.9240053	13.61767934	12.4800255	14.45413175	14.27645836	14.64731689	13.42670345	13.79982082	12.28093276	2.860306108	5.24984164	1.807526892	8.020433218	7.380602875	7.219721185
Zm00001d048271	11.10026212	9.545632051	12.94742027	13.85896162	25.35105093	13.50977236	22.22524107	21.77350731	20.63222885	14.23359002	24.03132638	13.01174252	9.367293828	8.775743816	8.424131566
Zm00001d048272	4.154034521	4.717618667	3.717817753	9.021041143	9.02817092	8.578663197	13.47144269	12.29634011	12.59450622	6.351665433	7.777365533	5.048124172	10.35939532	9.946092915	9.244908946
Zm00001d048273	0	0	0	0.650769843	1.375103537	0.085237314	1.829179803	2.726426857	0.343214717	2.254909969	0.17546936	0	0.272493252	0.64828772	0.241310108
Zm00001d048279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048281	0	0.075687779	0	0	0.079181786	0	0.719745401	1.77524267	1.945433422	53.39454934	39.42434966	143.4055582	0.201739118	0	0.746868043
Zm00001d048282	4.344251359	4.379453956	4.680604998	8.823691579	9.834008031	8.049519799	5.595477757	4.301860422	5.187413197	0.946016659	0.41889226	0.057346945	2.573091516	3.017240049	4.249464147
Zm00001d048284	9.993443719	12.77845619	15.79279319	45.01371382	18.94964107	31.92900421	9.854607208	8.548031067	8.164323565	0.244868643	1.935086841	0.238825912	103.4142226	110.0243241	109.4677114
Zm00001d048285	9.309030992	9.651685654	9.445459898	8.760646501	7.614409666	8.297431907	7.777223251	7.401710805	6.84400065	2.760007908	4.105809854	2.097296325	8.082062793	6.798327881	7.414173688
Zm00001d048286	35.2616356	35.25618391	32.89691535	12.24205746	15.20836847	13.09488166	15.25450091	18.07394258	16.99493209	30.72502671	44.92650107	36.95479037	18.10567178	18.3866175	18.89241359
Zm00001d048288	0	0	0	0.145727948	1.616628132	0.572619902	0.563215405	0.457899895	0.486358356	0.543890927	0.313117199	0.275058048	0.29420288	0.224162835	0.236411719
Zm00001d048289	0.771645791	0.440101462	1.302797425	3.758663649	6.29238006	3.817161104	0.068050424	0.351105351	0.269335831	0.100398751	0.495714956	0.080640961	1.612946139	0.478814272	0.841630036
Zm00001d048291	90.14748437	89.12628543	100.0303102	153.2392862	142.9896563	138.2026789	82.53507934	82.50992396	87.55026997	4.35886505	16.80043709	3.896062639	55.43570515	56.31409294	71.75857418
Zm00001d048292	13.96125023	12.24950879	13.6377835	9.950839159	12.89497066	9.411574495	11.30927036	11.48296372	12.92604703	6.083421365	11.06515235	3.01841465	7.245489766	6.935224333	6.744956803
Zm00001d048293	16.16194455	12.60400698	19.20562515	21.21952317	28.06369197	30.44680295	21.91204355	21.64995197	24.58754803	3.129758319	6.114219179	0.355616844	16.190449	13.05740088	12.23510635
Zm00001d048294	1.980867623	3.721915068	3.632205411	0.728985886	7.744674574	1.790287283	7.778721079	6.460630349	8.570381285	4.030735615	4.66827687	1.834591445	0.109015794	0.462777974	0.638239442
Zm00001d048295	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048296	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048297	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048298	0.683876847	0.595400059	0.708922915	3.930421827	4.476472366	5.440186072	3.719360377	3.001999313	3.210398661	0.947525366	1.681065633	0.708692398	2.539178381	2.577274661	3.016876992
Zm00001d048299	0	0	0	0.007530994	0	0	0.007056023	0	0	0	0	0	0	0	0.006981366
Zm00001d048301	0.925195096	0.409089993	0.366968677	0.478730472	0.570633318	0.361752314	0.391032726	0.249224133	0.31560187	0.502253969	0.918466508	0.163546139	2.555265328	1.898986364	1.49068494
Zm00001d048302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048303	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048305	0	0	0	0	0	0	0.01586379	0	0	0.168514369	0	0	0	0	0
Zm00001d048306	0	0	0	0	0.194744393	0	0.17270094	0.178209689	0.030379141	0	0	0	0	0	0
Zm00001d048307	224.7443631	175.9711179	193.9599272	0.668634113	0.706425738	0	0.626464194	2.456498261	1.719101952	5.471613827	8.653735946	2.494367238	0.599943127	0.235088419	0.061983577
Zm00001d048308	2.493799817	1.898634014	3.770046162	4.052490692	6.875966941	4.30926487	4.092654933	4.550824332	4.168054473	0.241268614	1.079545019	0.07834007	1.820165053	1.713719688	2.177441031
Zm00001d048309	0	0.12126035	0	4.097443996	0.68186252	2.801351325	0.224997703	0.304729156	0.192944981	0	0	0	8.214890268	5.13195328	5.509772517
Zm00001d048310	4.291365997	4.350647834	4.132228888	3.82411791	8.278813917	4.154153516	6.704265936	8.965197947	7.447121818	31.44426723	24.54323342	24.6936105	5.246871034	5.725124761	5.510557459
Zm00001d048311	83.24012657	124.3848898	59.70621665	30.38929025	19.62738652	27.56975277	21.91269283	31.97017044	35.90956382	42.66213596	44.61029433	64.85015595	23.89115795	23.41093076	14.11648469
Zm00001d048312	0.083192093	0	0	0.115281744	0.231415328	0.226492659	0.194419922	0.189475819	0.068399282	0.242219624	0.174846497	0.133114836	0.734413139	0.587721047	0.609148944
Zm00001d048313	0.197062831	0.49640273	0.122455133	8.540445457	2.661506701	10.17019375	23.19949294	16.72200914	16.49587331	0.339727666	0	0	56.28763708	81.49625956	82.27565958
Zm00001d048314	45.90713549	52.14204677	34.84431664	18.93110133	20.43714891	18.43733831	20.02559917	21.33159369	18.23869567	12.60733414	20.09949291	13.10108416	13.68370283	12.90537466	14.65800905
Zm00001d048315	11.19083408	13.33216344	14.77402979	27.86171572	24.45206105	27.46125912	23.98164236	22.19591943	20.51283259	3.981492809	10.08448389	3.703387211	21.67603984	22.8622774	22.70167304
Zm00001d048316	11.57644808	14.71944185	15.11802438	26.72109958	30.84630775	31.29206138	20.48386351	20.16236635	18.80934286	35.37825287	37.26035248	44.1710865	30.10359789	26.14647706	21.88170219
Zm00001d048317	39.49629693	41.31082595	35.57700621	36.15655023	36.35453823	41.47063666	29.71626553	25.05206	27.58487561	52.25841794	56.31934416	56.94090114	38.02595769	36.97938319	38.84822326
Zm00001d048318	8.461774258	9.551996882	9.586303442	7.905894563	10.18256932	8.286412741	7.634290499	8.328958093	8.350346336	5.706083765	7.413141769	4.973730763	6.095264293	5.340064366	5.60690386
Zm00001d048319	0.006996537	0.202679787	0.139125075	0.296676446	0.313444788	0.351440337	0.351544518	0.700207209	0.336518166	9.543235284	4.217326136	16.8417203	1.260525337	1.119798085	1.391299732
Zm00001d048320	1.363881202	1.45918858	1.643996467	2.895159282	3.360687821	3.066481425	2.338766643	2.447248704	2.932247477	0.649860085	1.540003713	0.809296112	1.816476025	2.082762594	1.814232342
Zm00001d048321	1.035699539	0.758962852	0.351046483	1.338649702	1.190998766	0.992028487	0.946168029	0.590350278	0.487698186	0.337621916	0.641151989	0.354620293	1.053619128	0.784437596	0.979699095
Zm00001d048322	0	0	0.017162272	0	0	0	0	0	0	0	0	0	0.015453081	0.060553078	0.063861867
Zm00001d048323	3.36733108	3.814588335	4.201118258	6.644611228	4.86605838	6.950211572	4.68818464	3.714682903	3.911875178	0.197621477	0.492802227	0.079365459	3.177783558	3.213005724	2.801220624
Zm00001d048324	11.27955732	11.74111041	13.57682405	27.24877035	27.54081499	25.288095	26.43411241	27.81028047	27.12074969	17.01511895	24.22738475	14.79461795	19.70615732	16.95975631	19.07283327
Zm00001d048325	1.631792113	1.453712145	1.854874428	7.792945188	7.840091765	6.48510793	3.208919212	4.966914146	2.87142575	0.7410217	2.258497543	0.61723789	5.23312837	4.581144406	4.394337853
Zm00001d048326	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048327	0	0	0	0	0.57939304	0	0	0.433799901	0	0	0	0	0	0	0
Zm00001d048328	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048329	2.954334814	1.869862737	2.710618525	8.249982492	37.51689295	12.98088105	44.30729341	57.92251045	61.17252455	7.236365586	16.88044028	7.215266673	2.626491408	3.80377835	4.558928028
Zm00001d048330	0	0	0	0	0.250192449	0.46525367	0.221872735	0	0	0	0	0	0	0	0
Zm00001d048331	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048332	0.084704052	0.12802208	0.168432711	2.968462043	3.917511507	3.715111093	1.821171003	1.194965526	2.360877074	0.163549193	0.256354864	0.065681913	1.620850066	1.383547781	2.164240686
Zm00001d048333	8.500982239	9.390918991	16.63893248	3.828143239	36.2428463	8.29455429	50.26477358	75.1247484	63.91120532	960.8485672	577.6178195	1230.359691	2.472615922	2.410311396	8.82155594
Zm00001d048334	120.4426568	108.0009304	164.4701388	86.66762573	204.4667322	113.9484892	157.566515	208.4402308	206.1094116	981.1383677	809.8784521	999.0946498	20.60263146	18.99484112	29.60381802
Zm00001d048335	1.236416504	0.845375774	1.251249401	1.600748077	3.925500131	1.550845568	3.84579408	3.897473526	3.913767439	131.8217963	74.81002391	115.1089709	1.087106248	0.819696215	1.667710576
Zm00001d048336	3.413727863	3.49489578	3.506513083	7.060858346	6.381507692	6.936191851	13.56621408	11.77215879	11.55181975	0.672125374	0.99681291	0.157565534	16.16485002	17.43059533	17.35053837
Zm00001d048337	0	0.007135918	0	0	0.007465336	0	0	0.013662989	0.006987328	0	0	0.062761594	0.044380376	0	0
Zm00001d048338	7.301525707	7.086239795	6.838681671	6.933588959	7.90190254	6.849623559	8.075670909	7.327975248	8.029809717	4.226048375	5.014378749	3.557373771	4.416800414	4.313918025	4.545106527
Zm00001d048340	7.026983617	8.141892453	8.200414384	5.460636716	5.154020484	6.377049189	4.521433414	4.102639486	4.573838153	1.525493255	1.679583671	1.072655724	2.766758996	2.806894513	2.557603409
Zm00001d048341	0.068143222	0.139468291	0.317582238	1.508488551	3.007921182	1.033124038	2.110071921	2.588204267	1.323621992	0.199709067	0.63373957	0.217022161	4.041486039	3.538959538	5.652670484
Zm00001d048342	6.592277845	4.792334612	7.771343578	27.00070053	32.10236317	29.19805559	18.86133661	20.13870413	19.41585927	9.67151893	5.755920267	6.788011629	3.61422049	2.602900495	3.930139894
Zm00001d048343	39.88920778	40.16192458	35.40781823	19.27891223	17.62037961	17.22931203	18.96807431	17.39019411	20.37636786	10.77238167	15.84537724	10.32194946	13.81046555	13.49331301	13.01686844
Zm00001d048344	351.9743959	332.8920367	281.4947033	60.195344	68.60918651	66.71483326	77.08670443	78.54058159	68.36328483	15.26096197	62.88261748	11.8119738	52.30667429	46.32596863	51.93654716
Zm00001d048345	35.71373256	36.9219623	30.09598791	7.485626172	17.28171657	10.41303793	16.5028128	20.02570689	19.89514853	28.87601712	36.73577218	25.25640329	8.219810336	7.710984135	7.758190024
Zm00001d048346	60.15031507	47.08741034	66.89826447	54.17021515	79.51332598	44.89644929	50.59911339	61.92913548	59.14590299	3.747354803	16.91588079	2.69942403	23.32244742	20.45761242	28.72229289
Zm00001d048347	0.112985404	0.316234522	0.109214461	0.109597052	0.066166598	0	0.264046892	0.378429665	0.154824821	0	0.110816393	0.027813356	0.252868591	0.206430946	0.595076487
Zm00001d048348	0	0	0	0.668634113	0.302753888	0	0.17898977	0.277048676	0	0	0.193163749	0.339369692	0.428530805	0	0.044273983
Zm00001d048349	2.354130328	2.946901083	2.299419161	0.493817453	0.872709206	0.273419219	2.97793169	3.185767991	2.148616306	5.68923085	3.250063991	1.499284904	4.527532889	5.161360664	6.716845887
Zm00001d048352	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048353	0	0	0	0	0	0	0	0	0	0.063698937	0	0	0	0	0
Zm00001d048354	0	0	0	0	0	0	0.015615676	0	0	0	0	0.014803883	0.07477297	0.058599752	0.061801807
Zm00001d048355	7.548254258	6.268624086	6.518514502	9.86179551	9.577842711	10.39312286	11.09178629	9.458936283	9.794232373	5.118653232	5.233787079	2.60826766	8.695547666	12.06825614	9.451849252
Zm00001d048356	2.088148937	1.748197284	2.640954544	8.318276953	5.454330264	4.394201782	1.736707341	4.606152045	1.287633382	0.660683319	0.449196831	0.285742878	6.501540008	5.830477934	7.256756484
Zm00001d048357	0.046659501	0.004897318	0.169133317	0.514026737	2.782003409	0.971792649	2.030930636	1.692510534	1.980476307	0.096526718	0.098065214	0.043072732	0.004351123	0.017049928	0.026972376
Zm00001d048358	22.10622139	17.26832059	24.49433692	22.20786849	63.56948154	20.47164639	41.28150934	47.37868024	50.97224805	50.63504552	72.93028695	48.61746059	17.84565065	17.73591438	22.41147193
Zm00001d048359	10.45289975	10.57167263	9.860892262	11.59100235	14.25485142	12.42941791	13.21947707	13.06604735	11.83033267	9.787081087	8.099982022	4.967472693	16.02182647	15.54883387	13.25997863
Zm00001d048360	57.32324398	59.23929755	66.47219115	60.76740373	51.33949054	64.61638871	55.71574711	51.82462813	53.42091917	117.5949437	104.3011807	136.976864	65.13961444	66.24466849	66.75875887
Zm00001d048361	11.29835141	11.81058567	10.63780957	8.885199364	7.308005287	9.155631828	8.645520289	7.301119031	7.827298003	13.50044498	11.8826001	20.8955604	5.624184536	6.023587669	7.093114325
Zm00001d048362	5.039592112	4.447028032	6.253701339	7.565117395	13.64410855	7.61921305	8.546761504	12.85505857	10.52241525	7.00324318	11.49324305	5.099029625	2.974003788	3.022565385	3.842981758
Zm00001d048363	5.183887955	5.671378128	3.979222805	4.360786945	6.924285296	5.367194015	3.753195893	4.743093932	3.798296035	3.182200004	1.192050116	1.508807373	3.992409636	3.565653341	4.888637785
Zm00001d048364	19.02419593	20.98073524	20.36750816	18.33093382	13.25526643	17.42538817	17.02482623	12.94502351	13.50416978	8.362244987	9.674828542	6.545971344	11.81268301	12.01765375	11.33368246
Zm00001d048366	0.050354453	0.04228108	0.01043011	0.010466648	0.055291149	0.020563698	0.029419589	0	0	0	0	0	0.272349873	0.331201916	0.213460936
Zm00001d048367	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048368	43.753717	39.03329737	64.79029417	135.8797822	249.7807399	122.1379224	129.5175072	164.5831332	133.4427782	6.742411582	27.51467839	4.664722336	52.23776954	40.50253557	70.5426064
Zm00001d048369	0.75535811	0.923117632	1.319842596	3.82416283	3.291371999	3.692505608	4.771477557	4.508861112	4.085977783	0.361007107	1.424080718	0.240255363	5.808092737	4.623962855	3.717997369
Zm00001d048370	0	0	0	0	0	0	0.019577006	0.151510995	0	0	0	0.00927964	0	0	0.009684934
Zm00001d048372	2.238926	2.203261771	2.044076779	8.963788897	10.06546145	6.674028313	8.826152959	9.852808453	8.207438175	1.737324288	6.408002516	3.675511827	3.058646072	2.886903766	4.693380913
Zm00001d048373	157.8942318	149.473204	163.2601072	147.4193979	116.0451589	160.1204185	209.2964016	187.0971069	208.0960932	62.16869721	35.12436456	22.05589823	136.7775421	155.594921	163.3696616
Zm00001d048374	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048375	0	0	0	0	0	0	0	0	0	0.018873759	0	0	0	0	0
Zm00001d048376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048378	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048380	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048382	63.2253191	58.76546685	86.47541353	62.97829095	95.15067212	54.95175313	58.00064892	80.9850846	63.31844083	7.350209596	23.96048976	4.63865163	33.44937148	23.38752658	35.51523874
Zm00001d048383	0	0.013225015	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048384	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048385	13.0440667	12.35204672	12.44598095	8.730090685	9.643377769	10.4596874	9.207841644	8.086684941	8.420854992	10.9167206	10.21763339	9.648024221	9.265159427	9.098587152	8.204052657
Zm00001d048386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048387	0	0	0	0.063501564	0.100636069	0.04158692	0.0198322	0	0	0	0.010701344	0	0.075970452	0.111634165	0.068678265
Zm00001d048389	0.031428124	0	0	0	0	0	0.036723763	0	0	0	0.039631873	0.008703662	0	0	0.0726704
Zm00001d048390	0.003939837	0.059546869	0.014689323	0	0	0.019307357	0	0.009501093	0	0	0.059619128	0	0.004408804	0.008637975	0.018219956
Zm00001d048391	0.33124135	0.322381592	0.261970371	0.450665283	1.230021027	0.996093761	0.527802983	0.853267205	0.798456155	0.43607114	0.132906445	0.200145892	0.842431153	0.429139928	1.027029639
Zm00001d048392	4.308616916	3.780624774	3.965215185	3.60851818	6.018997123	4.48268355	5.887944139	5.599047088	5.633598694	2.750611403	3.969392287	2.05588553	4.598864097	4.767425553	4.477682623
Zm00001d048393	0.185273498	0.270197813	0.484754629	0.133774514	1.027894798	0.394237775	0.752025135	1.069957244	1.106390097	0.497596835	1.918273092	0.61571272	0.720188504	0.534482407	0.597509301
Zm00001d048394	0.047843338	0.090388292	0.163514565	0.790602803	0.394003857	0.93783417	0.265548471	0.115376352	0.295020525	0.11547174	0.120663969	0.119247028	0.495228644	0.878496421	1.161581989
Zm00001d048395	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048396	0	0.011745546	0	0.093043219	0.135165361	0.068550336	0.141659536	0.078711305	0.149512619	0.051445799	0.047039194	0	0.166969165	0.245351488	0.463608403
Zm00001d048397	1.329667957	1.83983512	1.73397727	9.471019026	9.599164538	9.326742758	8.611093615	9.856765688	10.93617848	12.72059055	13.09521221	6.82534049	10.98142475	12.87229858	13.0993374
Zm00001d048398	0.752447758	0.974406813	0.276591973	1.202763922	0.851818013	0.701126461	0.953536779	0.702823095	0.535873909	0.292323806	0.320741667	0.164357531	2.597195654	2.021487043	1.617338909
Zm00001d048400	1.057513901	1.027040132	0.981752362	2.025998752	1.628466043	1.607791808	2.463965997	2.542560648	2.592702511	1.924147214	2.498414671	2.208848368	1.974696309	2.15096044	1.885502278
Zm00001d048401	0.8527329	1.143311872	1.025592541	0.97772604	3.298311722	1.280617749	7.408852951	13.51587819	13.26443741	18.760042	23.11945622	18.40483098	0.353990588	0.226160262	0.588345117
Zm00001d048402	1.523403588	1.455590139	1.632146951	2.767991077	7.112098897	3.298340142	6.030846225	6.571589273	5.976461177	5.035214376	8.015460573	5.630040503	1.866393677	1.727595009	3.127759161
Zm00001d048403	21.86465033	20.50716171	26.88375614	21.10558114	37.16413667	21.21842315	27.23757365	28.89336627	27.51138074	18.16370043	28.83598833	12.40728217	17.48964638	14.37361256	17.4766737
Zm00001d048404	3.338424353	3.592239549	3.297515725	3.036136132	2.7799161	3.231366359	2.669158255	2.566309017	2.596625094	2.248856398	2.463868489	2.389382062	2.847470182	2.761237443	2.996456525
Zm00001d048407	1.310664019	1.295232235	2.531055495	3.62127502	6.907968504	3.483226595	4.076175209	3.792869928	4.575690016	4.922293113	0.711970809	0.268041991	2.36924443	2.298873476	4.779043472
Zm00001d048408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048409	36.98873768	35.21697465	32.87345941	32.24558077	29.26202943	34.2281832	26.68318573	22.29177334	28.02218007	12.21239589	17.25133488	13.69845272	22.5152309	20.8051491	20.89564111
Zm00001d048410	12.4783077	13.62618359	11.98774394	9.74206494	9.464015794	9.025819289	9.145142145	8.62737568	8.556403053	5.107822209	6.495633533	4.417799795	7.850351101	6.883352854	7.571093623
Zm00001d048411	0.099717242	0	0.123928882	0.049745208	1.721236455	0.183250899	1.642926338	1.791520815	1.574131396	3.575689443	2.20056623	2.573770092	0	0.043725417	0.011528674
Zm00001d048412	4.778675015	5.289809345	5.705670141	4.447870405	4.627129	4.283101868	5.081241043	4.658633716	4.43695342	4.3361922	5.996474637	5.120322744	3.39578793	3.498083394	3.164779304
Zm00001d048413	0	0	0	0	0	0	0.008816135	0	0.027914608	0.05202783	0	0.016715643	0	0.06616727	0
Zm00001d048414	36.09043002	35.95826512	41.46527619	58.79602235	56.20394659	78.57802169	100.6826777	87.83501203	94.82315273	78.22532847	59.53568314	70.98924616	101.1404122	105.2501696	92.8121048
Zm00001d048415	12.53054801	13.96499118	13.49347223	10.69786871	11.16316611	11.01800901	10.87498225	9.142816804	9.404943784	7.384113876	8.382970482	6.223858023	8.761954309	8.159044133	7.711856365
Zm00001d048416	0.052547984	0.02206146	0.391840738	0.076458161	13.38633782	2.446381888	16.45582179	12.45041842	7.323104927	0.760959504	0.949793949	0.009701712	0.019600961	0.009600824	8.930638209
Zm00001d048417	0.522352811	0.02268639	0.313398019	0.819935706	42.04419827	4.556911444	19.2055846	23.23887215	13.10625766	1.242087318	1.578617376	0.2992959	0.292264784	0.128346197	0.468551741
Zm00001d048418	0	0	0	0	0	0	0	0	0	0.143565118	0	0.025624996	0	0	0
Zm00001d048419	2.701340931	2.549352079	2.434708277	2.505272653	2.336810078	1.774292335	0.630409183	0.516723307	0.759733586	0.596306202	0.629667598	0.353919705	3.448917386	3.598866159	2.955018881
Zm00001d048420	7.484472433	7.085244932	7.268847512	3.289591276	3.149442431	3.261089303	3.653406419	3.282323487	3.930376751	3.995737321	5.700953011	2.94195316	2.093841245	1.55493085	2.602899736
Zm00001d048421	0.005512594	0.006943133	0.006851068	0	0	0	0.006441467	0	0	0	0	0	0	0.259853277	0.184826028
Zm00001d048422	35.97847214	41.87368295	38.89294345	95.98478936	41.00370295	50.98861424	11.03757471	12.06031844	8.002984505	6.258045504	8.810665981	2.442989428	480.2827362	482.2653912	457.6239507
Zm00001d048423	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048424	706.7329286	704.3376084	658.4685982	165.186088	157.9685012	147.4298419	199.3062587	211.8646183	190.3642195	176.5585845	392.9302428	242.6122066	110.5409272	108.7331033	115.8503413
Zm00001d048427	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048428	5.438517488	5.088832552	5.26350904	4.929461803	4.607146028	4.729629638	4.56352429	4.316665699	4.475867968	1.821999114	2.78375887	1.831081532	2.820108543	2.835420381	3.309690013
Zm00001d048430	12.06691246	12.08405929	10.91260659	8.788636465	9.357355444	9.246366321	9.060806572	9.256222486	9.15178796	8.890147899	9.74206438	7.264839896	7.589753701	7.302758461	7.459146642
Zm00001d048431	78.12829938	84.89780788	69.77978082	101.9059173	85.927058	108.9738544	136.2274866	103.284586	115.5885683	38.14669345	58.54178614	37.3075273	109.9532131	126.173023	117.8251445
Zm00001d048432	0.938008072	0.84779974	0.615799706	3.023713739	1.814936061	2.603808552	1.722383833	1.672112222	1.748687591	0.09885169	0.550166638	0.09320676	1.304230136	1.373313985	1.455561449
Zm00001d048433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048434	0.005622937	0.016524923	0.009317603	0.011687805	0.032105859	0.025259179	0.070084286	0.131079652	0.046230938	0.062039656	0.077997742	0.022839059	0.056630223	0.012328122	0.199360394
Zm00001d048436	0	0	0.023274863	0	0	0	0	0	0	0.064571526	0	0	0	0	0
Zm00001d048437	0	0.049765808	0.040921603	0	0.034708779	0.072611845	0	0	0	0	0	0	0.537954784	0.678596989	0.753745373
Zm00001d048438	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048439	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048440	0.023423016	0.036057237	0.006468932	0.090882307	0	0.031884889	0.024328707	0.015690459	0.01925805	0.003589356	0	0	0.023298762	0.028530148	0.018053469
Zm00001d048441	11.54037802	15.01345353	16.2040456	31.20602081	14.87255114	27.37242428	9.639137726	10.78608642	8.612345696	0.989299547	0.984374984	0.233709452	47.73714133	49.44747494	55.68621752
Zm00001d048442	13.79870894	13.62392806	13.54889516	13.49958721	12.12283845	12.47131325	10.12675137	9.567632674	10.93193372	3.714922032	5.076441205	3.32766888	8.151646168	7.2078824	7.699993582
Zm00001d048443	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048444	0.064385717	0.067578374	0.01333646	0.281046756	0.39590893	0.328672138	0.012539118	0.219964471	0.13234241	0.014799753	0.16238491	0.059436313	0.072049685	0.094109179	0.459038498
Zm00001d048445	0.617375778	0.65874189	0.820885267	1.745028233	1.850762995	1.839729166	0.837962262	1.04348081	0.884415799	0.029745432	0.091791825	0.014932333	0.274535205	0.28963023	0.576626944
Zm00001d048446	0	0.158883227	0.039194117	0	0.010388614	0	0.046063544	0.009506572	0	0	0	0.096071567	0	0	0
Zm00001d048447	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048448	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048449	9.897628343	9.342784828	10.61245631	28.80241632	46.54053102	31.10741812	45.08985918	61.32247397	39.58476282	56.40108884	46.24036233	28.34195266	41.60047281	38.82643754	45.58505894
Zm00001d048450	2.99188098	4.749609427	3.414914028	6.45211596	5.86545398	6.949108014	6.670344151	5.267240587	5.598787879	1.934201779	3.013046241	1.559317991	6.806459632	6.132552042	6.9300559
Zm00001d048451	2.759814548	3.911680138	2.915887087	10.21322058	6.420780474	10.23558075	3.497241532	3.046621084	3.143940261	0.280023052	0.388797826	0.008330238	18.23540005	20.88931292	16.29267977
Zm00001d048452	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048453	0	0.011080418	0.027333735	0.318182064	0.295594168	0.167060198	0.251855537	0.042430878	0.113921777	0	0	0.053599774	0.310105738	0.260389923	0.213592055
Zm00001d048454	3.789511977	5.028502515	4.215492927	3.181734217	2.553918438	3.242258538	0.919484708	0.759051265	0.81722741	0.165644253	0.078339282	0.027526881	2.247742086	1.747940436	1.996674836
Zm00001d048455	0.037905454	0.127312161	0.031406007	0.063032051	0.016648666	0	0	0	0	0	0	0	1.385635744	1.786791483	1.504619818
Zm00001d048456	0	0	0	0	0	0	0	0.033710422	0	0	0	0	0	0.03064803	0
Zm00001d048457	0	0	0	0.025372277	0.080419001	0	0.095088315	0.220773164	0.025089915	0.168347192	0.256545604	0.631015521	0.113828495	0.089207659	0.023520554
Zm00001d048458	0.095285733	0.440046687	0.208647209	0.820535889	0.681573057	1.083996272	0.779389655	1.083275955	0.615548135	0.050062756	0.062940096	0.020105373	0.507751402	0.452640786	0.57704591
Zm00001d048459	0	0	0	0.020029568	0	0.029513889	0.004691582	0.004841232	0.004951666	0	0	0	0	0.013204305	0.018567767
Zm00001d048460	125.1149968	129.4197595	112.4434922	80.96449387	81.01977669	91.56959993	147.2128936	163.979718	177.1032743	110.7876447	111.1589721	72.78670486	109.1081786	112.1343723	97.94577139
Zm00001d048461	4.453908345	4.639899072	3.536982307	29.26114191	45.11918957	25.90520106	17.54497553	17.78603546	15.53840198	58.84473372	57.64073994	62.22489005	33.14826571	29.20415415	46.16937926
Zm00001d048462	4.438492301	3.71264031	5.326684496	2.32406281	5.915330765	2.635860943	4.988424921	5.10669028	5.703711868	10.67742586	10.21146874	9.889819474	0.473932768	0.557133335	0.6855061
Zm00001d048463	8.016147037	7.766832492	7.24683505	7.348771217	10.30364545	7.971002722	9.950205235	12.35959669	11.09225075	22.21840292	25.50633063	29.71760138	6.786127124	5.786615936	6.722555807
Zm00001d048466	12.794024	12.98718902	14.37828593	18.1648299	23.2479066	18.12799531	15.04651713	17.60198241	16.61547738	15.2482609	24.87883605	10.94575108	12.42775651	9.507419649	13.96881696
Zm00001d048467	8.940933685	12.20096587	6.648875124	10.7269831	6.171413743	7.664442044	7.286767731	5.984831963	5.981670536	2.094987276	5.066100556	1.173467461	16.18574634	14.32226356	13.65677622
Zm00001d048468	0	0	0	0	0	0	0	0	0	0	0.112092748	0	0	0	0
Zm00001d048469	0.110728137	0.074379999	0.174310122	0.092063552	0.145900564	0.045219039	1.164472456	0.836681018	0.637273007	19.80170209	18.51516774	8.774250382	0.049563336	0.048553629	0.332843775
Zm00001d048470	9.192112655	9.918997428	9.585279167	10.10075144	16.07781896	10.89409896	12.73709573	13.82997318	15.02327017	9.164498077	11.86723293	5.823458974	6.275306943	6.258934088	7.606069475
Zm00001d048471	2.328530027	5.974942723	1.608814411	0.994265103	1.008859159	0.850995166	0.977674779	0.361666892	0.632752595	1.132164025	1.712041979	0.935593452	2.013896849	2.249763592	3.814566654
Zm00001d048472	9.164233727	10.19419773	8.363071652	9.212088125	9.320356068	12.35478565	10.32805392	9.547967594	10.00508617	10.70515476	11.88003489	9.513772477	12.01328425	12.42045097	13.90245649
Zm00001d048473	0.441007546	0.367495118	0.495491415	1.011121186	1.71686314	0.971438749	1.553759801	1.802057652	1.145453957	0.817106474	0.587020479	0.542809051	1.866831828	2.026574774	1.972507665
Zm00001d048474	0.265544017	0.485497266	0.330018886	0.427322554	0.553056993	0.356811086	0.260241705	0.185914243	0.422566992	0.17720757	0.518492168	0.427002984	0.651817909	0.873296029	0.911111974
Zm00001d048475	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048476	0.720227841	1.434914143	1.02529783	0.163315804	0.189801168	0.24064845	0	0.031579303	0	0	0	0	0.117230266	0.559854963	0.408771002
Zm00001d048477	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048478	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048479	106.6121088	121.6502035	96.69659076	33.76706827	13.61954579	15.9895937	9.804727916	18.97187744	9.860513213	13.28244865	13.19611214	4.700794283	64.12472649	66.89611897	83.02067668
Zm00001d048480	10.27282906	10.02694262	8.605564293	8.767078433	8.67090327	9.712594872	9.50975695	9.124574553	10.0984772	11.13248713	12.63277993	13.63362003	8.244838853	8.113338906	7.255547146
Zm00001d048481	1.718995026	2.73326473	1.900308865	2.516958042	3.904357885	2.856486238	3.823085327	3.761809073	3.882758057	1.263978082	2.095850157	0.768002219	1.886413741	1.743871846	1.625050494
Zm00001d048482	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048483	35.3433078	32.287259	38.15889054	23.3719925	21.70719215	20.77523931	22.39990884	22.46695008	22.34370274	15.21128625	22.64340422	17.38093342	20.5502907	18.40102428	18.21455326
Zm00001d048484	3.388512979	3.259304981	3.216087275	3.848466917	2.817881812	3.254117101	4.461543748	3.096711577	3.52864567	1.804681896	3.583428995	3.007239685	3.223622982	2.975967502	2.562799528
Zm00001d048486	13.56031113	11.04854784	12.09679121	8.600018076	10.48676829	9.965676997	10.34746031	9.284315115	11.05788391	12.17472322	9.476680124	10.56727007	7.478601397	7.843036041	7.65176568
Zm00001d048487	45.63176723	47.98150649	29.89985934	23.21688388	11.15986322	16.28096226	13.98846895	10.23747189	11.29931109	4.404690341	10.91984646	8.019872689	24.86435478	21.05222167	18.43252758
Zm00001d048489	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048490	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048491	12.03144854	14.86547036	11.01904064	1.260333339	1.281320325	1.004480728	0.868924185	1.172530275	0.564365623	34.7908138	31.20968511	76.54561505	1.045507584	0.647968602	1.895815674
Zm00001d048492	3.502992163	3.395607932	3.499167484	4.197308984	4.71022566	4.225732069	3.855754261	4.627451848	4.047386193	2.341402483	1.763938921	0.556242803	2.582090162	2.280470735	2.888862897
Zm00001d048493	0.003490231	0	0	0.113174475	0.045988911	0.00855202	0.057096686	0.008416848	0.004304423	0.168476128	0.008802586	0.023197916	0.054679524	0.084174498	0.242110984
Zm00001d048494	6.202141285	4.408390306	4.391139691	0.324877652	1.50713539	0.336549338	0.962973022	1.182147936	1.188670043	0.091449297	1.457310569	0.278070931	0.575053749	0.506226036	0.48186782
Zm00001d048495	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048496	9.287974842	8.47146658	7.429300142	5.79649225	7.378810139	6.453369319	7.859372517	7.444859987	8.080700241	3.929403996	7.042708637	3.223097522	9.522480383	8.450317542	9.22661003
Zm00001d048497	5.219194597	5.439168668	4.707409433	5.917411902	9.356608906	5.261197977	9.613093058	9.754883884	7.964070391	1.253295329	3.863757885	1.282817437	3.536664735	2.988561524	5.420463786
Zm00001d048499	2.695736266	1.23570071	2.632354188	15.15189477	29.89019488	11.26718949	47.66737061	62.31123885	51.63292515	217.6594829	142.1739603	191.8388757	0.769544756	0.794073809	2.257973153
Zm00001d048501	1.256335952	1.449658706	1.154665829	1.819693517	1.813164895	1.879485752	2.160072535	1.75353631	1.827005201	2.417405916	2.274760273	2.792265787	1.577372656	1.485738768	1.524474634
Zm00001d048502	0.581893744	0.41585747	0.239705484	3.269783895	2.463875137	3.292153662	3.25837779	2.424175915	2.822165494	0.356177894	0.886315372	0.572169024	1.946156974	1.859922094	2.086276485
Zm00001d048503	12.69377372	11.8785936	12.59934656	37.28798023	55.96478747	44.00895154	54.39933606	59.99683148	53.00851828	10.34741542	12.23447395	10.20599017	43.60456207	40.95691694	41.03402612
Zm00001d048504	0	0	0	0	0	0	0	0	0	0.232776364	0	0	0	0	0
Zm00001d048505	9.210986289	8.742876609	8.205754265	9.442125953	8.49258831	8.304129257	4.716784526	4.093734521	4.582691332	0.150238131	0.709742101	0.080448194	2.099402577	2.255662451	2.875692236
Zm00001d048506	9.551451308	7.971745237	13.50098769	19.63352896	29.78048302	17.62324509	21.05773961	24.50458227	23.50240781	8.983051502	18.807125	10.12174392	10.3793191	10.39494498	13.22472828
Zm00001d048507	1.693357875	1.964095216	1.480291039	2.052224787	3.472930314	2.367616999	2.828295135	3.281882943	2.719613366	2.216669532	3.93295721	2.453409543	2.023391114	1.442055228	1.343881152
Zm00001d048508	1.29823733	1.134583276	2.008584564	1.784320104	7.435952322	3.473172749	5.139191731	7.028230949	5.816192428	0.986592845	1.670529514	0.293495591	0.830153862	0.92941933	0.796416887
Zm00001d048509	9.397822078	9.136122706	8.332789695	12.21216695	15.41687084	12.7818761	13.4350488	14.7742123	12.98493369	10.85769073	11.99961472	10.5084234	8.86746982	8.662590129	9.276491158
Zm00001d048510	10.69192661	10.02227725	9.199013926	6.941250244	8.096115205	7.472992715	9.189601134	8.517871318	8.383952171	5.712631231	6.840536808	5.710302989	5.712471279	5.723369457	5.13781819
Zm00001d048511	6.566450286	6.374274883	5.556452757	6.28713161	7.696465202	6.304678882	6.899921231	6.797292192	7.541241475	5.734066398	8.537472426	6.025741989	5.53913008	5.584657446	5.714003251
Zm00001d048512	1.524646066	1.668504817	1.308124373	1.988585706	2.703982663	2.29577604	2.572410319	2.262393351	2.23676859	0.578003889	0.51330816	0.098721244	1.331480545	1.177616538	1.762698915
Zm00001d048513	0.183506496	0.260017999	0	0	0.151122956	0	0.857709366	0.746776339	0	2.467585684	1.446297364	0.813120672	0	0	0.026519819
Zm00001d048514	35.83645693	38.40131115	34.2667607	20.96895893	27.68661924	21.37540452	28.93292041	33.02972268	30.19126147	19.44410066	27.44127638	16.65066763	18.30068451	18.59260272	20.00688645
Zm00001d048515	52.57494615	59.0319747	53.74941622	266.5120619	135.6879333	286.1271833	207.4248692	97.19019363	124.1358267	0.774858308	0.488069226	0.09681334	125.6157632	114.9131513	91.37058484
Zm00001d048516	3.806288097	5.01225455	3.03476556	3.376271265	2.725264601	3.973358475	3.201294058	2.761544397	3.579083852	0.350962225	0.839803304	0.18593091	1.902473117	2.089261037	1.959294724
Zm00001d048517	0.018059754	0.136477963	0.089778863	0.247756762	0.095185502	0.13275402	0	0.261311433	0.044545371	0	0	0.020005776	0	0	0.02087954
Zm00001d048518	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048520	38.9095601	176.3583495	235.1551159	24.11421698	31.69659413	12.62455384	13.94143424	3.894815747	32.55660713	16.43920132	66.72200501	21.1164462	0.127275788	0.137151209	0.197243911
Zm00001d048521	0.425895138	0.650405009	0.661629663	0.876410602	1.052211234	0.443512845	1.325015681	1.123352546	0.715648795	0.176213883	0.201400287	0.094357461	3.979529295	3.285676484	3.594468165
Zm00001d048522	1.025584427	0.718980335	1.875825451	1.71346364	2.447742686	2.181061793	1.718453798	2.858228645	2.326809967	1.574576424	1.561714555	4.094232343	2.4360748	1.590964618	3.053776854
Zm00001d048523	0	0	0	0	0	0	0	0	0	0	0	0.008076999	0	0	0.033719066
Zm00001d048524	1.473916117	2.007582912	1.94147515	7.949407806	3.267846113	5.767583655	4.281957586	3.926883284	3.753049612	0.136329708	0.556483686	0.127099317	27.73294234	29.85573594	25.98112246
Zm00001d048525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048526	29.27936049	32.07973342	29.16694775	31.48343058	30.92343224	26.06299428	23.68877828	30.55549241	24.76312421	8.481359351	13.04693412	3.897843221	17.35762256	16.77398889	23.06491584
Zm00001d048527	3.59432753	4.104229187	2.619295256	5.589239086	5.094154265	5.859421591	8.583633885	6.5378574	7.120743837	2.759699669	3.067627434	2.526521706	9.612653358	10.26094971	8.452767164
Zm00001d048528	0	0	0	0	0	0	0	0.457899895	0.234172542	0	0	0	0	0	0
Zm00001d048529	48.92676739	49.58351382	45.79133772	34.77882198	41.36204841	32.35568781	40.02377753	46.9315446	44.02879452	48.04828958	87.68720785	72.05903759	22.10581141	22.38351553	23.05116365
Zm00001d048530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.213592055
Zm00001d048531	14.85004693	18.17522963	18.38739663	31.91378163	14.53218662	22.02416023	9.764670155	9.787045621	9.622207058	3.967999284	8.049889271	4.542758434	59.26022082	63.50672705	61.45036398
Zm00001d048532	2.477072967	2.096481598	3.264793058	3.896057285	7.005966051	3.778944411	8.545108973	9.768883395	7.413527018	8.062013932	9.639601141	9.394229921	8.43053376	6.364886677	9.248178556
Zm00001d048533	47.03436682	38.87884159	37.32982173	29.32961097	57.54791572	31.37915266	57.71930138	67.7424458	60.91904659	22.11205548	36.91260543	26.38289713	32.97935541	28.40580228	31.80390896
Zm00001d048535	4.279623445	4.884262068	3.91944216	4.564214145	3.49131387	4.547511225	4.447860379	3.77471483	3.908455168	0.724470808	1.522095686	1.219422564	4.523218621	4.740166594	4.883078259
Zm00001d048536	2.202947646	2.227857219	2.528466362	3.442356574	2.817332981	2.841795879	3.3198891	3.179691594	2.285346434	0.956148221	1.49929628	0.531129652	1.975760571	1.825417006	1.805308393
Zm00001d048537	10.74511017	10.81472133	14.42714821	15.97331705	13.08374828	21.92079399	14.5174834	8.849517973	14.25741032	1.653937323	2.117176352	1.753558923	6.226778142	6.099925814	7.542422601
Zm00001d048538	0	0	0	0	0	0	0	0	0	9.843489512	0	0	0	0	0
Zm00001d048539	23.63310168	26.36388208	26.61276236	21.49804029	36.29539242	19.1642519	32.34530827	41.17016515	41.01434763	37.51260926	64.48107853	44.72465763	14.59971671	12.24850124	14.58797294
Zm00001d048540	20.26013708	19.34855355	17.35858972	12.84916556	8.749030078	13.01120623	14.22590749	10.84812889	11.88059402	18.38759646	10.67743297	13.37704319	18.6851392	17.49491839	17.30044252
Zm00001d048541	11.5388425	11.6605253	10.76996764	9.30232488	8.425224485	10.433186	10.04466318	9.320522691	9.889879224	10.27024171	9.726667808	9.977133416	7.136611607	6.506437241	6.257889923
Zm00001d048542	0.801897224	0.89777113	0.96891689	2.493283499	2.157260188	2.674403176	1.574708978	1.698799285	1.97105556	0.30720791	0.393251493	0.104869382	1.19646499	1.294183291	0.894911559
Zm00001d048544	0.7655891	0.973872892	0.572150252	4.967547171	3.636285417	4.24415218	5.985734254	6.388278574	6.446171024	0.256075654	0.808269	0.185958807	3.671651939	2.846811408	6.701664317
Zm00001d048545	19.76875187	25.36880001	23.60038963	17.89909856	19.75904997	15.44296106	27.9631519	29.56214908	29.36161245	15.4560294	18.13443464	11.22427849	21.13989762	21.62175316	25.89896561
Zm00001d048546	6.522417089	6.463113283	5.778004935	5.660121728	4.227293463	5.243587186	4.632424408	4.088072827	5.147716254	3.667505165	4.565260307	4.796597427	4.26440411	4.237581378	3.806887663
Zm00001d048547	3.072187398	3.779144663	3.487219501	4.252963724	6.706282095	3.839126916	6.593359669	6.890107186	8.625969217	15.06978488	12.93958375	5.218285661	2.349215504	2.963698943	2.746777828
Zm00001d048548	0	0.112726479	0	0	0	0.095944292	0	0	0.0137974	0	0	0.012393104	0.075115629	0.049056912	0.051737519
Zm00001d048550	2.608050779	2.172239256	1.882041204	6.492180072	6.942263093	6.19717889	6.684854846	4.564909724	4.552314209	1.160300645	2.015738012	0.337836002	7.060869113	7.089950246	7.84211445
Zm00001d048551	24.81894797	21.05268894	28.0806457	31.68314157	39.40423949	31.64964455	37.61914505	41.25020178	39.03083649	41.2618807	42.66497409	25.87944152	17.5693145	16.79786159	18.78350074
Zm00001d048552	4.132325047	4.042615883	4.145882882	7.046454031	6.074578063	6.384479033	7.486997664	6.555346839	6.727119748	0.874561626	2.160194067	0.466083129	4.287898643	3.936981667	4.642023505
Zm00001d048553	2.97035166	2.518094456	2.650352051	8.964399905	7.940648368	8.327911104	9.778469135	8.575100265	8.852896196	12.32920437	10.7809181	7.941303972	10.1741748	12.87870347	11.16092858
Zm00001d048554	0	0	0	0	0	0	0.050314447	0	0	0	0	0	0.024092204	0	0
Zm00001d048555	0	0	0	0	0.175959525	0	0	0	0.020586597	0	0	0	0	0	0
Zm00001d048556	1.612818903	1.538362592	1.643972838	3.77585687	3.90227726	4.096286542	2.818602656	2.95968549	2.768389564	4.907213211	2.738515916	2.076539522	3.079235521	2.814887826	3.145896366
Zm00001d048558	0.079948736	0.201391459	0.19872105	0.797668767	0.632065134	1.273325835	1.191106264	0.168699961	0.443695342	0.330787465	0.151226882	0	0.805186829	2.103422695	0.785669021
Zm00001d048559	0.657116754	0.282609116	0.139430889	0.619642751	1.098148334	0.569431221	2.528256727	3.787739344	2.925372337	16.04765166	9.984165419	11.38047219	0.717399754	0.614936734	1.778848721
Zm00001d048560	0	0	0	0	0	0	0.017382848	0	0	0.246200899	0.037518748	0.494375599	0	0	0
Zm00001d048561	5.339538672	4.491905142	4.833007226	30.70789624	48.87768534	38.18851498	36.47018782	38.69034781	42.38091587	24.10702013	21.66099419	18.84955429	27.14731598	22.78404367	26.06735992
Zm00001d048562	1.828094807	1.483998278	2.158740929	6.55193112	7.498437753	7.701178036	7.955482994	8.062781094	8.591250633	4.037341095	4.066800574	1.533947993	3.527297787	4.993409606	4.444726361
Zm00001d048563	0.725412412	1.144584576	1.000615525	2.097717694	1.354978115	2.363434389	6.911562108	6.66104174	4.856588314	0.219882046	0	0.035322152	0.892043717	0.655403208	1.29948659
Zm00001d048564	2.845327416	3.662257516	2.543245206	4.374592795	5.157997533	4.304632482	7.683747339	7.14813271	7.303863448	5.001480595	4.621766868	3.648731071	4.480218348	4.385691154	4.549793828
Zm00001d048565	0.561656669	0.948570694	0.777349989	2.770055612	4.188095449	3.205949662	7.099927532	5.987329721	5.494199463	1.461209613	2.672098525	1.95137573	2.771165873	2.546791204	2.818776942
Zm00001d048566	13.76853808	14.81893538	14.33019214	13.55114333	18.17412196	16.28222276	17.28238588	17.55011342	18.35046038	9.326793888	13.05771475	6.063138462	13.08452475	12.6046295	12.74027201
Zm00001d048567	2.19524334	2.355425102	1.886736854	3.511906061	2.981066633	2.68288968	3.670319259	3.375931774	2.442242875	1.363718133	1.721275787	0.747098565	2.624928052	2.153186749	1.941555138
Zm00001d048568	0	0	0	0	0	0.00357811	0	0	0.003601885	0.024167766	0	0	0.01307289	0	0
Zm00001d048569	45.02770827	55.0273465	54.50310906	119.4689797	50.94073822	118.6131689	126.7686543	82.99139032	87.03938572	7.207624619	4.347185196	2.615608379	140.8135943	120.2488428	120.8230125
Zm00001d048570	3.140508281	3.509438108	4.044206467	2.441690995	2.474043807	2.578678701	2.537547414	2.29621355	2.818311175	3.953443731	4.811320956	4.759448449	1.188890229	1.142695174	1.212860457
Zm00001d048573	3.683731335	3.708918128	4.146776108	2.597323177	3.511300415	3.470540893	3.02226645	2.38962992	2.968870552	6.809995495	7.059731605	3.572137006	1.240422952	0.761004894	1.190937519
Zm00001d048574	10.33980536	9.30123147	9.139444192	21.82884821	31.92346173	20.93167664	26.05627875	28.37977532	30.46451382	3.406823896	11.78371732	2.713533363	13.98279367	12.96300687	13.25994947
Zm00001d048575	2.616394479	2.971016761	2.640054038	3.813944021	3.746949738	3.884702855	4.898036211	4.239886601	4.130905352	9.840738597	6.261267348	11.38010564	2.936033511	2.720504704	3.003718811
Zm00001d048576	0	0.037109849	0	0.036746056	0	0.054145901	0	0.053290074	0	0	0	0.310067972	0	0	0
Zm00001d048577	6.990385646	7.927223792	6.099002106	13.18975406	12.52472841	14.37897193	10.58709713	10.15501013	10.53776437	2.267922547	4.960527073	1.300130093	10.14611365	9.783892071	11.76489219
Zm00001d048578	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048580	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048581	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048582	0	0.047632005	0	0	0	0	0	0	0.011660044	0	0.09537961	0.146626013	0.04231964	0.010364375	0
Zm00001d048583	47.37997178	46.12440566	48.53403033	15.71437313	22.15260325	15.77603115	17.14201253	23.34805768	18.27782651	25.693101	40.80050698	25.92273975	18.29496464	18.50273644	18.17111845
Zm00001d048584	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048585	28.06533546	25.13992339	30.34285237	27.53044615	50.32688084	35.28055791	47.90339407	64.22704279	48.34138463	66.52173081	70.58887051	39.60758892	15.27832694	13.48126424	23.92287484
Zm00001d048586	0.003865206	0.029209448	0.004803689	0	0.010185952	0.056824876	0.045164933	0	0.023834355	0.090622859	0.04386734	0.034253599	0.008650579	0.004237175	0
Zm00001d048588	0.179412519	0.126543609	0.231893383	0.528063004	6.884035385	1.239699544	5.031444708	6.680290754	7.815093703	7.096563199	11.37559568	10.46988903	0.192737635	0.416958003	0.57249398
Zm00001d048590	0	0	0	0	0.114011749	0.017667861	0	0	0.106711538	0.079556479	0.381895734	0.127800612	0.016137711	0.079044761	0.016672798
Zm00001d048591	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048592	7.566909742	5.405057757	10.75385135	14.05737902	10.82446972	16.30921259	46.68623072	32.51470594	47.28695187	1.364895618	0.320279355	0.203735953	22.14908547	23.79084256	28.71574826
Zm00001d048593	185.7514752	161.542928	190.589086	522.1444802	315.6421106	463.7356414	1056.356539	917.0594057	989.7778008	14.60770992	5.893719347	8.071829947	1513.694902	1614.321281	1336.481208
Zm00001d048594	0	0	0	0.026682582	0	0	0	0	0.013192819	0.014753432	0.067448609	0.011850057	0	0	0
Zm00001d048595	0.42636645	0.103937443	0.136745672	0.943419863	0.706781083	0.471806539	0	0.232174595	0.271395139	1.441621023	1.12735533	0.380894681	2.724188435	2.62345904	4.166119479
Zm00001d048596	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048597	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048598	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048599	11.33777688	11.28168601	11.03180407	16.15279252	12.08603051	14.40112296	10.82014288	11.87881971	10.20913955	4.748500427	6.470249225	3.992810461	24.65978727	23.65613351	21.55125974
Zm00001d048600	0.402095115	0.417591113	0.490957888	0.422295229	0.139426133	0.579046364	0.296746197	0.102070565	0.26099726	0.097290431	0.097852689	0.039072169	0.252607633	0.18559612	0.43225389
Zm00001d048601	1.332396048	1.106870007	1.145041197	0.070710917	0.373537716	0	0.198753803	0.051273394	0.201031482	0.449624019	0.786473864	0.13346518	0	0	0
Zm00001d048602	1.181970749	0.636783488	1.205733266	0.562374419	2.547686827	1.33926094	1.780304168	1.515806549	1.390289752	1.017654989	0.792637452	0.991460669	0.175845399	0.157283669	0.781996699
Zm00001d048603	10.53184242	7.517176618	7.858970955	2.96142932	6.19015475	4.489175163	4.562102312	4.584143894	4.949197199	7.966542205	8.918562903	10.29122505	2.21671402	1.638313691	2.282815086
Zm00001d048604	10.46462161	6.309126413	9.116393016	8.688315464	22.62314594	12.88619043	17.49029145	16.94349168	21.08653424	12.72581697	10.26289589	6.913162214	4.95305527	4.610848084	3.892989396
Zm00001d048605	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048606	41.36120857	42.56497481	36.55296343	29.19509159	21.18787492	26.82183378	27.25227817	21.39828903	22.34420009	73.68763738	49.8970084	59.67635178	36.04129743	32.61444379	28.70795676
Zm00001d048608	0	0	0	0	0	0	0	0	0	0	0	0	0	0.010651661	0.101103275
Zm00001d048609	29.91787871	29.80810856	27.62214346	48.98563332	54.08641677	39.60023025	50.98690697	52.03870808	47.3211208	28.32144625	37.89908819	22.47148386	26.0265784	24.06607947	24.59410592
Zm00001d048610	0	0	0.371380323	0	0.246090933	0	0	0.540472007	0	0	0.047103455	0	0.041799316	0.081895556	2.029708107
Zm00001d048611	2337.964507	1988.906565	2749.406418	3775.725792	4383.774702	4876.723401	7311.623904	8312.229138	5916.197956	7546.826094	7896.465423	8816.387936	6824.898658	5185.085611	7286.479364
Zm00001d048612	5.955223526	6.429108058	6.03307439	13.8928501	15.36086335	17.69350146	27.23825678	26.13630086	19.39759394	11.19631046	12.10984265	11.31187244	22.58000167	22.34326348	26.22578548
Zm00001d048613	1.966031035	2.202194622	2.163161427	2.31381067	2.194396272	2.035484808	2.149392124	2.251341151	2.136824442	0.212772145	0.508815448	0.166517985	1.310292455	1.305281509	1.134213366
Zm00001d048614	2.11339717	3.048863444	2.875940257	2.072612394	2.56986666	2.051384532	1.897927876	1.70893282	1.45401813	0.147033511	0.395409738	0.02084088	1.319324473	1.278697672	1.406572267
Zm00001d048615	3.580561265	3.840822818	3.364063486	7.093554389	8.036256709	5.813921806	4.223923053	5.329541637	3.86648798	0	0.453680647	0.075911642	9.777268634	7.756371186	7.922712817
Zm00001d048616	26.26342041	25.54791379	24.75393723	19.4206497	28.90565216	20.67868957	19.07495013	20.18473137	17.54411864	34.09170822	37.82533648	32.5368235	21.20305881	20.70599553	21.12782699
Zm00001d048617	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048618	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048620	0.234498009	0.265815999	0.68001457	1.335547898	0.937256104	0.900182059	1.150845886	0.725728136	0.857963206	0.409654459	0.216853643	0.095247626	1.198342662	1.131085789	1.572447856
Zm00001d048621	7.14912601	9.392165297	7.229027476	14.20149285	12.90181602	11.03577134	23.47816945	23.67353708	21.03755482	18.77767465	14.93839208	15.80794658	11.13248276	7.162037992	9.999991665
Zm00001d048622	0	0	0	0.343292011	0.241796729	0.224820566	0.750495696	0.258144907	0.075438134	0	0	0	18.82371893	18.03790838	14.81573883
Zm00001d048623	1.003710845	0.464984836	0.444481133	10.27326692	5.700587446	8.833930451	26.88086487	15.78885208	13.71598968	0.334137211	0.625581584	0.115020551	39.32437344	38.76355083	37.4537724
Zm00001d048624	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048625	0	0.016168047	0	0.40023873	0.050743257	0.188722616	0	0.077391532	0.189976597	0	0	0	0.215472532	0.647320928	0.756898043
Zm00001d048626	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048627	3.992063671	3.761037996	4.203364685	14.17554681	61.19075299	21.03830734	59.02174694	62.71902086	52.76941194	18.48346827	23.37270169	14.33714061	22.09692034	31.80588991	52.52731056
Zm00001d048628	32.20486679	30.49013572	30.04547544	15.56349553	10.46849432	13.18362432	5.488147832	4.073122374	5.215554939	2.952095399	4.116432384	2.972024637	7.803750606	6.936197503	5.621596737
Zm00001d048629	0	0.020329362	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048630	0	2.900037004	0.417314205	0.179475472	0	0	0	0	0.354956274	0	0	0	0	0	0
Zm00001d048631	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048632	8.806604935	9.643069994	10.02238847	10.83937904	12.59372348	11.95227924	10.58423655	10.63302391	11.02145756	5.844484296	6.850450191	5.0710553	8.200260928	7.028243643	7.309717976
Zm00001d048633	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048634	3.786167102	4.322360746	3.581248823	70.29415197	55.01230204	57.20525553	52.49030667	57.43676393	37.82669252	0.064307249	0.552710529	0.165286467	122.1692509	114.2213404	144.2145581
Zm00001d048635	2.840510486	1.914934748	2.808917583	10.7856979	13.65175659	11.35636224	22.94741152	23.37876702	21.97147499	1.178078047	1.443097782	1.032262162	19.77148895	23.65195064	20.15300104
Zm00001d048636	0.870661239	0.326647122	0.253248167	0.646889914	0.43936235	0.272343612	0.541153013	0.781780309	0.593998642	0	0.140161501	0.02052083	0.145108195	0.385841256	0.149919627
Zm00001d048637	11.03192626	7.963773492	10.45396923	13.52173195	13.62923366	12.75376624	23.64053996	21.06339518	30.95761	0.635043018	1.879624124	0.783510939	15.01170194	15.86112176	10.01583577
Zm00001d048639	16.51206846	9.852413459	15.25622268	23.64042386	30.04094706	21.88951659	39.75502039	40.7453758	45.36773878	0.934335257	5.040396483	1.230761691	23.33951197	24.09685417	18.60981639
Zm00001d048640	0	0	0	0	0	0	0	0.018850081	0	0	0.009856984	0	0.034988107	0	0
Zm00001d048642	0	0	0	0	0	0	0	0	0	0	0	0	0	0.082345531	0.086845121
Zm00001d048643	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048644	5.946497332	3.842419256	4.399726727	4.822064753	7.222739531	1.808826322	3.736358045	5.193174944	5.482655449	2.89123244	4.628841922	3.777057107	0.33773648	0.447102825	0.433811071
Zm00001d048645	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048646	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048647	27.49661847	21.8301103	24.05512006	7.810155339	46.36124265	13.63301453	47.90199522	57.46885703	53.18340615	66.58339053	99.3205729	67.98425153	7.751696453	5.73493973	4.834194812
Zm00001d048648	0	0	0	0	0	0	0	0	0	0.013863886	0	0.05567784	0	0	0
Zm00001d048649	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048651	0	0.007680183	0.045470071	0	0.06427781	0	0	0.191166058	0.06768234	0.092508359	0.076895025	0.027019398	0.4367115	0.467922421	0.690887414
Zm00001d048652	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d048654	0.052080891	0.098394113	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048655	16.37941604	17.08285137	16.43364403	17.13738303	19.7603753	17.50072072	19.57019667	19.37041119	18.64407621	5.9006454	11.12714812	5.080988035	11.22225632	12.01111333	12.11987171
Zm00001d048656	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d048660	0	0	0	0	0	0	0	0	0	0.352062177	0	0.12567944	0	0	0
Zm00001d048661	0.095491739	0	0.098897845	0.138942013	0.398443854	0.019498408	0.316149276	0.710038021	0.098139831	0.636544446	0.260905983	0.511276837	0.338384686	0.261703493	0.312804197
Zm00001d048662	0.320732761	0.403964099	0.730780635	1.316679786	0.827616078	0.818628159	0.546548674	0.934599199	1.170175985	1.087427413	1.011135753	0.592155328	0.867366457	0.893646225	1.189684779
Zm00001d048663	2.098974376	2.357133687	2.656622788	3.217316201	2.296271796	2.724034677	2.442620281	2.018497497	2.583323837	1.308298177	1.115043047	1.084118346	2.185507106	2.503304152	2.262935731
Zm00001d048664	0	0	0	0	0	0.036175231	0	0.035603448	0	0	0	0	0	0.097107257	0
Zm00001d048665	9.260715239	9.085386029	8.714467262	7.905338399	7.537456133	8.388593817	9.215634581	6.775998046	7.845603866	0.726402623	2.339077104	1.009624834	3.157087653	2.922066351	3.018195269
Zm00001d048666	1.314977724	1.484886277	1.634258186	2.714454907	4.301816437	2.83318653	4.185778172	4.537992991	3.355308059	1.094396338	3.259277881	4.294672803	3.881721577	3.877204519	2.804679754
Zm00001d048667	0.767705712	0.79211631	0.159916226	0.708620639	0.693426788	0.582747935	1.582954973	0.885583046	1.014549565	0.197402037	0.167731339	0.219414026	1.147067657	0.979472925	1.215188809
Zm00001d048668	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048669	0.930015913	2.049877347	0.584334515	1.056775458	1.708797407	1.645795297	6.900694872	8.578614362	4.160943392	0.035629035	0.045608107	0.011446994	14.40815796	13.24238137	13.90624735
Zm00001d048670	0.044072321	0.077712952	0.197183556	0.813483283	0.545874434	0.853115048	0.07209791	0.350731835	0.108706789	0	0	0.009764263	0.246591711	0.173929053	0.163051575
Zm00001d048671	0	0.017769835	0.01753421	0.017595635	0	0.069139864	0	0.153105847	0.017399817	0	0	0	0.142091793	0.309326867	0.326229351
Zm00001d048672	0.077915844	0.045293213	0.171321764	0.104648127	1.034552906	0.367144501	0.777381368	1.604355968	0.901785009	6.571518615	8.306274079	7.363046523	0.147552869	0.07884377	0.568205432
Zm00001d048673	0.035863678	0.031619304	0.017828594	0.031309336	0.051981222	0.021968956	0.037716037	0.077838177	0.008845972	0.064300501	0.004522525	0.011918446	0.068225432	0.066835539	0.095365603
Zm00001d048674	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048677	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048678	0	0	0	0	0	0	0	0	0.230964699	0	0	0	0	0	0
Zm00001d048680	20.98942478	11.63570705	16.90647512	61.19815746	190.2900429	87.04818958	227.7947644	277.8623221	219.1604401	6.398611126	16.46691053	2.367128823	24.46555292	23.49937895	20.70377365
Zm00001d048681	0.015989747	0.050347865	0.03974421	0.219358911	0.179085121	0.068563699	0.102762109	0.125319971	0.078879172	0.055131244	0.010081792	0.061994507	0.062625642	0.210342269	0.129404309
Zm00001d048682	0.282104827	0.255095848	0.386559756	1.308081817	2.039664156	1.400191999	0.659278985	0.418651333	0.776114709	0.179570338	0.446959452	0.040064478	0.817541547	0.372689775	0.493408948
Zm00001d048683	2.06857123	1.645498812	1.430384621	3.656378866	7.623611553	2.37231735	6.333595764	7.876503316	7.979449335	12.83805343	12.58176693	12.11205219	1.305337009	1.091195391	1.41155432
Zm00001d048684	4.172635485	4.416399056	4.156740428	4.358076664	5.223610064	4.154594599	5.485190173	5.871865641	5.742564115	4.522608518	7.239353862	4.975027435	3.145622228	2.866416633	2.937468977
Zm00001d048685	4.064420895	6.515285837	5.969687752	3.225707816	1.460582946	1.131698117	1.942885575	0.668286333	1.822748432	0.25479575	2.562682573	1.227922096	1.240422952	0.810101984	1.70873644
Zm00001d048686	17.79353767	19.81499813	18.25144002	20.78554279	17.56828391	17.26206198	18.89132661	18.67843247	15.62915536	6.107295063	14.68129811	5.476233642	19.22679927	22.78924703	22.13558369
Zm00001d048687	0.367431743	0.392927808	0.482493097	6.458659688	11.10793575	7.109038335	10.10173513	12.28806412	10.61898852	1.309898231	4.423616368	1.174994419	0.57408351	1.071577599	1.00188971
Zm00001d048688	5.902854564	6.967078037	4.071757885	3.322062972	1.650964429	2.478826073	3.242685843	2.641084528	2.770008394	0	0	0	21.05238312	21.71216308	18.32744536
Zm00001d048689	50.03138942	52.60251293	44.60469089	25.27840036	22.41853297	26.95174047	22.04228537	21.12450469	24.51602233	21.98724336	22.79078892	27.50333275	21.17249821	24.25167476	21.96423555
Zm00001d048690	0.285934304	0.3151184	0.111049998	0.423468272	6.663949466	1.072820228	3.18452632	2.499594722	2.887209689	19.87773221	14.68205461	22.21174635	1.219884359	0.75424201	2.376037108
Zm00001d048691	17.6851082	15.44197204	15.98480329	14.64950597	23.57653517	16.52134394	15.79591877	13.92601793	13.86601187	1.77990119	3.254886433	1.938479682	10.26838659	8.41663557	10.16629832
Zm00001d048692	2.871703315	3.23648262	3.150043615	3.925415353	4.827921149	4.757118221	10.50666509	8.334569849	5.560754302	1.575768528	1.308308647	1.304462442	19.72204972	19.66578985	26.899741
Zm00001d048693	4.588990284	5.402029714	7.146860612	6.551022323	6.214864532	8.139984385	60.48362635	61.88190011	53.31262602	0.519345585	0.563394267	1.003968673	31.26132224	48.99774396	45.21111603
Zm00001d048694	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d048695	0.297071576	0.336746474	0.088608343	0.074098956	0.039143538	0.007279067	0.041655377	0.14328028	0.021982299	0.106524777	0.516971167	0.14479626	0.033243263	0.039079235	0.013738211
Zm00001d048696	1.366404232	2.608660325	1.573042797	1.614429553	1.279258603	1.083715546	1.596643356	1.725615386	1.844801674	0.15869446	0.181376797	0.079665295	0.845001433	0.977577039	1.180655084
Zm00001d048697	0	0	0	0	0.016294759	0.04545219	0.028900655	0	0	0.213194092	0.116959733	0.698654906	0	0	0
Zm00001d048698	2.232409801	2.573213108	2.489306704	4.346567017	3.579738099	3.390873847	3.583061457	3.420709819	3.206803947	0.617781277	1.95636183	0.447795778	2.384030794	2.682788455	2.610443123
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Zm00001d048702	2.288286747	2.348041324	2.253305422	64.77241009	19.13129341	68.24151751	19.91301868	9.511584774	8.574471801	0	0.073753431	0.03239438	88.43707099	93.95255228	136.8850944
Zm00001d048703	0.283341636	0.41932206	0.642651519	55.55881783	14.98976853	68.66276345	29.51620132	11.29138436	11.05973861	0.381005458	0.035730289	0.345260306	111.8062405	114.6380354	134.6032783
Zm00001d048704	0.104161782	0.065596075	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d048707	2.816506661	4.06543366	3.289229776	34.36796834	33.91883085	48.99860565	41.30054314	34.10081443	39.26747304	77.94750239	27.54544746	23.84074862	37.3508739	34.74722914	40.64647028
Zm00001d048709	0.288194654	0.294923065	0.458904242	0.258335907	0.296670888	4.954124064	0	0.010859286	0.022213996	0.049683493	0	0	23.05868367	26.73550012	32.61120119
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Zm00001d048717	54.1039441	62.1274159	55.83024104	55.44436147	40.63986475	56.57445576	33.9276705	30.51256552	33.47315877	32.33820601	37.55504603	32.0288382	96.70352955	101.7708681	89.3368381
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Zm00001d048736	359.0956858	346.7614651	359.9983859	17.91663815	45.72122202	32.83624324	93.98183295	117.2523655	111.9775806	607.7639711	494.319776	660.759833	17.71729279	17.40712927	18.63497211
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Zm00001d048924	8.564009294	7.935757964	9.995285897	17.59995908	20.41523159	17.3419052	14.19706312	13.50255499	14.6128086	9.505294216	7.728448927	9.635703786	7.12287963	8.091622272	6.911546607
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Zm00001d048944	28.18627411	33.20023315	28.584806	39.12682267	25.95210738	39.01709849	18.94504815	14.79709172	19.00312195	1.445649644	5.330247569	1.587880346	29.23058153	30.3989333	28.46682197
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Zm00001d048949	347.7841489	126.1534879	604.0924281	466.8919578	5782.284544	946.9334471	4125.936191	5722.370244	4767.044363	2235.256444	4673.432513	1044.059319	4.161522599	3.649656346	14.43406413
Zm00001d048950	197.82673	64.56569427	329.5670534	321.1294955	4998.104992	863.6072745	3560.167107	4618.340136	3993.95924	1765.708777	2283.660899	530.7039971	7.040040591	7.540810248	11.16997338
Zm00001d048953	4.018913165	2.914919353	4.073277919	10.94045366	10.91970206	13.85432521	18.40385422	16.45097626	10.92979271	1.357016593	1.092236732	1.96500728	22.15304441	19.44573236	19.37874272
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Zm00001d049043	23.20475287	22.16047363	24.2409202	36.49456949	45.50739711	35.01676091	29.61932958	31.10348245	31.68656182	4.729787225	10.78813612	2.993775071	16.92538939	16.42734411	20.97744792
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Zm00001d049060	9.924303142	5.739656571	4.593768268	3.473182755	35.96099467	8.932870472	22.00977535	23.56658127	20.04516956	41.48074807	67.93783672	62.42846892	1.416532384	1.609702645	2.107441609
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Zm00001d049076	13.88446165	13.49017213	12.60282572	9.607793344	8.608425349	9.025871842	8.600140337	7.744605463	8.998188611	6.421663916	6.69839619	6.530157019	6.637216966	6.156946981	6.256921467
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Zm00001d049080	34.7861957	36.89880536	30.95825145	22.30285814	21.98313686	26.0204804	25.561055	23.21258266	24.33234027	38.92897073	41.76477902	42.56392012	33.80425016	34.24515956	33.68174285
Zm00001d049081	0.458766239	0.577817776	0.570156032	1.367145378	7.546603182	2.035217752	4.395760502	5.234712895	4.180860806	40.41379199	24.3465131	41.33541732	31.35365087	34.25120344	40.34920658
Zm00001d049082	6.158020026	6.581072194	7.092780841	9.099375133	13.12842304	10.01732562	11.44723918	13.11271867	11.9347078	7.430075293	11.59854764	5.888597201	8.474275199	7.979928677	8.840772719
Zm00001d049083	29.7310499	34.20965763	30.08760894	20.32780671	17.37415973	18.93000872	20.74762204	20.55866461	19.36713361	17.79251268	21.9824599	20.35025057	18.57267119	18.74070444	19.00140002
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Zm00001d049100	14.35645341	11.96419116	13.73536763	11.9089303	25.30968658	15.36803959	18.22836083	22.65438446	20.29520601	12.68170147	20.10388412	12.59174384	8.675774168	8.529319512	9.110383189
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Zm00001d049150	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049153	1.367937641	1.268262411	0.954606687	5.148562318	4.037650148	5.440059594	4.573300552	4.162825491	4.572431569	2.474305997	4.182472606	3.196042879	5.634069839	5.819803531	5.958951185
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Zm00001d049156	0.605884231	0.860948486	0.250998235	1.491889865	0.63457903	1.103920073	4.229701146	3.671524614	3.276286741	1.864062542	2.821068749	0.550704455	3.842022152	5.654143618	3.987375317
Zm00001d049157	14.39387735	15.52865014	13.48987942	6.676603742	9.055509223	7.895761319	83.28628584	74.41984703	60.13005223	0	1.190238763	0.098021829	16.25574056	20.43519395	30.24758426
Zm00001d049158	0.276282776	0.071995692	0.248643655	0.08317156	0.2510642	0.245109251	0.946244697	0.574369206	0.66971715	0	0	0	1.055440017	0.992163231	0.649855688
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Zm00001d049160	21.78657826	25.17586348	26.40145257	59.81573298	30.2122805	40.68738948	20.53386576	21.51251343	22.52675693	3.469643311	6.943178338	1.085692459	85.62996474	91.38579223	88.27437782
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Zm00001d049163	14.84957858	13.51823346	13.28600697	8.369392969	12.68993933	10.07932183	7.919818941	7.92278999	8.34759918	2.498587275	4.74960189	2.121561317	4.21817474	3.334498845	3.558947885
Zm00001d049165	1.156227497	1.700926643	1.25303168	2.71095394	2.193839066	1.915157869	2.410276481	2.37562679	2.464040167	0.637851336	1.458039968	0.563559194	4.771739805	3.893751348	3.539731932
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Zm00001d049171	45.99553465	43.15413579	45.79978321	33.00987278	52.09460782	39.12836422	63.8676674	68.83073129	67.65067094	57.27510331	100.9348343	83.09507715	15.99635172	15.97511473	15.89201134
Zm00001d049173	12.11768461	9.000825077	9.796797208	5.8556139	20.84937075	9.206383236	21.50148508	21.72943139	23.13340865	63.62730296	51.85019878	90.87898288	1.841492099	1.48859649	3.751884683
Zm00001d049174	0.156115232	0.074905795	0.21249861	0	0.431000369	0.072861912	0.217167441	0.080674044	0.155860354	1.640446807	3.074864373	4.183437323	0.00831895	0.146690571	0.085947863
Zm00001d049175	2.976800934	2.24494632	0	0	0.024212172	0.045024549	0.021471555	0	0.022661859	0	0.092687444	0.936345612	0	0.020143665	0.042488742
Zm00001d049176	13.13267016	14.63612426	14.00441434	11.7026166	16.02141465	13.83072275	17.74175073	9.840685019	12.61977115	38.36683516	19.12057708	59.91205551	7.440658285	8.038421048	8.549507437
Zm00001d049177	0	0	0	0.042413358	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049178	0.171247189	0.083878071	0.130060645	1.317027737	1.253573857	1.561853658	0.37797109	0.481798637	0.340259058	0	0	0	2.374096446	1.741691078	2.375821438
Zm00001d049179	27.72676113	36.7975312	36.76332439	266.5242298	134.9836613	306.8163228	125.1942246	109.3785447	82.59593021	2.915020946	6.275649932	2.511645758	70.14970983	71.31146159	119.0822988
Zm00001d049180	0	0	0	0	0	0	0	0.2242775	0	0	0	0	0	0	0
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Zm00001d049183	8.5445212	5.319078287	7.95826411	14.13498279	15.60683242	14.41484217	14.02388703	12.1264524	15.6976352	4.117733612	10.25474703	5.178679107	8.000965671	9.32373842	8.447934037
Zm00001d049184	0.725775149	0.596974031	0.791547063	1.662530108	2.93725393	1.633176481	3.487464404	3.321882663	3.288056489	1.572942776	2.00789322	0.631699179	2.04698905	1.518173246	2.097737788
Zm00001d049185	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049187	3.999068426	3.553120734	4.209134889	32.10922016	40.30651414	25.24713285	35.7532065	14.40982935	36.48312617	1.143692033	1.915540509	0.412091769	7.475821928	6.049128872	9.461982735
Zm00001d049188	1.100597985	0.853448484	1.122842579	7.1908797	5.930665827	5.619940101	5.244967493	5.030984249	4.431622145	0.226553145	1.201456468	0.295699674	4.866675933	4.66398757	5.175228343
Zm00001d049189	43.01062357	39.04901184	45.11749317	90.42337288	73.16864116	78.82129037	58.33507874	68.49976634	62.51617515	16.20672741	38.48299359	11.37245951	23.77864473	21.5261088	29.53970121
Zm00001d049190	24.34911243	23.615545	25.94915548	5.607152364	3.242650036	5.689341725	3.902118329	2.136337806	2.706714379	0.599668578	0.906379726	0.491487641	2.217660824	1.890384021	1.703006147
Zm00001d049191	41.4496516	39.38447981	36.04869326	40.53409619	46.70501659	49.00585235	37.05268475	35.22358119	41.15829692	27.8366673	35.81551727	28.52225459	42.78458751	43.48922031	39.22051996
Zm00001d049192	3.198296054	3.840261549	3.30646556	4.96064673	4.810058298	3.829602466	4.655479939	4.094630854	3.603279224	0.853737589	1.48648158	0.880260573	4.428915413	4.252059858	5.370118551
Zm00001d049193	19.64120506	18.47216984	22.33268811	23.081016	29.34134677	26.35489351	23.60183334	29.105637	25.99008435	14.35386479	20.72798856	8.002048359	17.01323436	15.53226103	18.68168763
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Zm00001d049197	0.416671179	0.528774641	0.635531115	0.153534201	0.133097068	0.336452204	0.280325008	0.148439495	0.241363709	0.02612083	0.067669752	0.045457595	0.271989917	0.242226292	0.167875169
Zm00001d049199	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049202	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049204	2.243600759	1.077523592	1.823695933	1.09522434	2.008175447	1.374358957	0.807679282	1.15452257	1.027137248	2.391046398	2.336276717	3.332640616	1.667434141	2.049594948	1.834076825
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Zm00001d049213	2.487329412	0.38874168	1.669731849	0.226429879	10.83702114	1.423565015	7.913166244	11.42743005	5.620140998	15.29924971	11.14981946	21.19809911	0.142217594	0.039805808	0.062971363
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Zm00001d049223	10.50473489	10.10167498	11.10995743	13.22641855	10.66261349	12.90492481	15.53015924	16.77010267	14.17727795	8.120276312	9.806078435	8.51870954	29.30347212	30.46966303	29.50307568
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Zm00001d049233	2.775674766	0.730501745	2.62582769	4.856715058	1.419273529	7.562486934	1.21021492	0.999054317	0.664198482	0.742768216	0.574662153	0.137676114	2.410680566	1.771177519	4.69384722
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Zm00001d049242	29.54750557	14.55743542	23.63618615	125.3324988	174.0855202	81.29182277	224.8071812	358.4248357	274.9336717	6.056878536	12.32743005	3.378986341	10.56915937	12.16677361	9.156323927
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Zm00001d049268	0	0	0	0	0	0.086335733	0	0.169942229	0	0	0	0	0	0.051501329	0.488839549
Zm00001d049269	7.830648665	7.611627131	7.586039341	8.358233128	8.852681077	10.17240869	9.091489774	8.607677845	9.716656616	8.032065896	10.28592532	11.35364808	5.45040075	6.056627148	5.186433135
Zm00001d049270	0.447348259	0.187812263	0.606508073	4.471759975	6.323158295	5.945651269	4.823339465	4.960847054	5.416734804	0.215003652	0.495742264	0.030033461	1.122550998	1.181415461	1.896383996
Zm00001d049273	8.214361958	5.502352377	7.773156612	5.007005067	19.28763365	6.32946338	11.49348779	15.45889862	15.45973098	36.95207851	40.71485793	48.14248558	3.245326047	2.849129929	3.688837129
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Zm00001d049277	0.245004192	0.012343347	0.073078063	0	0.542352664	0.252137473	0.629832281	0.815357233	0.290071793	1.121831896	0.21009154	0.10856181	0	0.010743288	0.226606625
Zm00001d049282	0.05612165	0.056548341	0.041848891	1.301860262	1.197965815	2.062701002	6.308617875	3.681244477	4.332768799	0.108361411	0.113233922	0.049735214	11.3922698	13.33808307	18.12866951
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Zm00001d049288	0.021631699	0.027245205	0	0.215824935	7.496272492	1.616609273	4.625625256	5.58174176	5.308899013	125.3909552	2.836939741	1.581532573	0	0	0.150055178
Zm00001d049289	3.434119063	3.092691306	2.262962896	2.796079921	8.698230844	3.502421557	4.497904199	5.928661375	4.791139723	0.171779868	1.211652088	0.13797476	1.533173532	1.410912978	1.5840098
Zm00001d049290	0.091141559	0.028698283	0.141588748	0	25.90993002	2.596115481	13.47211249	13.62710088	17.90014908	0.094274427	0.97692566	0.100962483	0	0	0
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Zm00001d049292	0.119923105	0	0.11923263	0.014956289	0.632065134	0.220383318	5.955531318	6.391318536	4.910228451	0.099236239	0	0	1.97270773	2.879059813	4.36739544
Zm00001d049293	7.514003338	7.614117771	7.109858554	9.238561461	7.541712718	8.88694488	10.14648944	6.523597769	8.055880436	0.97611746	1.820292638	0.480331029	8.317627721	7.455109794	6.377954041
Zm00001d049294	0.952161233	1.061498839	1.047423585	1.789264887	1.305474765	1.402986127	1.157705831	1.101545536	1.047329805	0.008872887	0	0.014253527	1.051100359	0.945055444	1.041324089
Zm00001d049295	54.26687972	55.19588586	53.24003365	62.3251138	59.36468737	76.01377669	60.40470543	50.73762413	60.89284788	13.6824044	18.775789	8.798965036	46.26450577	44.03527162	55.26224972
Zm00001d049297	14.84943833	17.32983975	17.28518801	14.06913474	13.16019717	13.4474211	16.59199261	15.55362794	16.10049308	3.016408129	5.13182695	2.295283799	17.69297358	17.57006479	17.18363422
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Zm00001d049305	23.55271069	23.62191166	24.74816726	22.06065937	25.04443266	19.59310034	13.68705456	13.9717091	14.13502318	0.721846024	2.83562466	0.32210647	8.552220116	7.751105173	11.967818
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Zm00001d049309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049314	0.05007778	0	0.155592031	0	0	0.040901422	0	0	0	0	0	0	0.056038644	0.036598014	0
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Zm00001d049320	200.930355	221.5108492	251.831144	217.8866441	277.6799602	256.7574359	321.0906409	374.0960009	357.6413268	417.6399411	412.7710626	492.2090847	167.5465611	149.1968093	177.0888854
Zm00001d049321	0	0	0.143988557	0.048164322	0.1017732	0.141941798	0.045126658	0.046566091	0.142884941	0.053262388	0.048700182	0.38502642	0.129648727	0.338686705	0.178596747
Zm00001d049324	2.283190965	2.327267854	1.810763408	2.095590501	1.588808888	1.962842353	1.826441137	1.777003105	1.287423071	0.130883239	0.147830607	0.166965316	3.10468731	2.863970182	2.691312222
Zm00001d049325	7.645008421	9.92018255	8.808088083	16.21886807	18.99968926	15.24920985	14.94163854	18.0754275	16.39067987	17.78550392	12.24802319	8.031791592	13.12174117	13.04828444	13.72982481
Zm00001d049326	4.018449784	4.027578608	3.857908032	6.894314417	8.191682101	7.616557133	7.59239529	8.942079943	8.480032343	4.762104826	7.292757645	3.942718443	4.097061067	3.873748941	4.862192266
Zm00001d049329	3.825017255	3.803386884	3.093344534	8.604971951	3.834274641	5.470934727	8.083652432	7.061588744	4.897873882	1.312522149	0.807758046	0.243283093	5.509116307	4.5141225	5.035854448
Zm00001d049330	1.182597416	1.476645426	1.140312064	13.35024488	46.45183832	21.15811323	31.17535294	32.55084355	22.39255284	2.769882506	2.494059455	0.587253819	1.505897514	0.558795179	0.542182964
Zm00001d049331	5.222165029	6.20503413	6.918715036	15.05330314	27.58878897	18.80127805	24.4659665	29.90952612	25.82226945	10.93923086	22.08566435	7.176522471	16.62166756	15.66197169	15.12231749
Zm00001d049332	10.09067266	13.11921502	12.77188298	21.51569057	24.14101835	17.94549872	24.5599534	30.22139308	29.87850469	6.284961829	17.94353252	9.478110689	18.62884629	19.62568496	13.87040651
Zm00001d049333	10.81967622	11.71799193	10.77756727	12.45844097	12.27082491	12.16108604	13.32818079	12.26264987	14.11156195	5.139978684	6.292835058	3.228800213	10.33030785	10.32759717	10.04686272
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Zm00001d049346	13.92355535	14.90047589	12.95679583	22.53569015	19.26062072	21.962159	22.01230678	21.51822192	20.67947854	16.70365694	18.49814329	22.29729343	18.05793581	17.80950085	18.84896129
Zm00001d049347	0	0	0	0.527743354	0.428901341	1.296063796	4.716380432	3.983729088	3.633019717	0.673388767	0.718327691	0.432696358	3.04149739	3.586147889	2.201523824
Zm00001d049348	3.993874867	4.431288106	4.303399236	5.123202303	8.709170902	4.772080064	7.105885665	8.303400479	7.703897883	3.672780562	7.549345643	2.937678607	2.5629856	1.983311931	3.029005181
Zm00001d049349	0.190574794	0.214763379	0.049862508	0	0.052865316	0.036865295	0.052741575	0.120942012	0.049480332	0.159083773	0.170754345	0.099999525	0	0.038484302	0
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Zm00001d049360	39.54319746	40.25242854	33.97576149	26.72008371	28.26554901	27.24736587	31.55915474	29.43335154	34.90239454	41.69215878	35.20461264	41.3854039	26.41343481	29.21661322	28.05686197
Zm00001d049361	36.34344146	37.49158678	31.93057621	25.52696459	21.96984047	23.69692028	21.75222896	23.01351002	22.83320029	16.52164475	20.26716978	14.31951562	20.81136048	22.9733627	22.38295827
Zm00001d049362	11.07723098	10.48945971	11.47445107	5.947438929	16.12241815	7.205768611	14.73389998	19.53865065	20.74574626	62.90334589	59.88618263	68.00191948	4.918507909	4.420031442	5.551567517
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Zm00001d049369	322.7158477	317.1331198	360.5065826	85.90800384	83.50501726	87.36075016	100.0806183	79.47627612	87.06689352	107.5930852	177.3881791	126.0156126	118.721892	118.2672257	99.90779598
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Zm00001d049371	12.09135327	13.23923865	11.72328653	8.601272143	6.389506513	7.076443808	7.689582531	5.999405837	6.286937388	5.316554767	5.248994208	3.831596251	9.028265874	9.190725587	8.558031373
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Zm00001d049375	11.76527688	13.23673242	11.07989603	54.4161448	38.31611786	57.84179117	27.4850452	29.39269868	28.47049928	3.402477707	2.661790166	1.134594684	24.65707627	19.64404954	26.97799845
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Zm00001d049389	11.7182005	12.29926408	13.11671731	11.37215683	20.24641563	12.85103705	15.21916822	15.39271436	13.35115804	14.02075685	16.99521182	13.36773846	8.293348159	7.69903451	9.585170801
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Zm00001d049530	0.639589891	0.201391459	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049539	0.390132358	0.710922854	0.361064202	3.457654367	7.371790629	2.888132074	6.362776586	11.87036668	10.237051	1.488242327	0.952536537	0.27585378	2.303606762	2.111085437	1.209187809
Zm00001d049540	33.311671	31.38243553	32.30987729	25.53332289	33.97619138	29.09393327	25.41588701	26.11432728	24.70693086	53.54701871	63.85207506	58.78973212	21.89724316	22.54553973	24.52502281
Zm00001d049541	15.63812757	10.90905049	15.01754204	47.59747426	328.7935545	96.24807737	336.1930202	422.9364317	365.5557259	62.37925985	90.85964758	38.42762394	20.21382573	24.45279772	40.15695995
Zm00001d049543	18.1515516	17.60711097	17.38627053	2.382040083	2.833489911	2.817106941	79.58927311	74.55749088	54.59903637	0.630520074	0.431316899	0.288857241	5.093200609	8.334297904	7.341069514
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Zm00001d049545	0.119923105	0.302087188	0.327889732	4.905662915	2.401847511	3.320441985	1.177093249	2.14007951	1.1240282	0.198472479	1.0283428	0.398536119	13.9565717	15.9597197	15.38986965
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Zm00001d049551	0.068527488	0.183410078	0.127749246	0.961475745	0.891663315	0.96548882	0.730678632	0.795299818	1.193751753	4.312050879	3.056943406	6.215265662	0.690160139	0.422562595	0.950725538
Zm00001d049552	15.72773431	13.15726379	17.37829412	26.84775397	40.63218251	24.16512452	27.26100365	32.69468996	26.93364555	2.041518923	6.673280914	0.884300174	8.394679848	7.354353914	10.1643718
Zm00001d049553	10.89628793	11.06767336	13.1855719	17.97304782	24.46130559	17.33841148	18.96876782	19.6072859	20.2941086	17.11992985	17.81141625	10.86132264	16.72696643	15.88934469	18.00878723
Zm00001d049554	52.49939829	61.23276474	42.23823517	17.89107963	19.32353721	34.2744783	49.31008344	49.55831875	42.8822493	390.1005261	174.6342575	407.7132941	62.42354673	64.98777952	73.63949347
Zm00001d049556	0.269516686	0.277223432	0.22888669	0.700269833	0.633311197	0.547573073	1.015650057	0.75827681	0.889140099	0.192049105	0.232243945	0.034831808	0.846987229	0.679543409	1.028273629
Zm00001d049557	9.452884301	9.19237997	10.06418205	9.244719022	11.21000567	8.463836867	10.66830079	12.17214276	10.01618906	7.056322744	10.08266353	3.516670771	6.496704789	5.941214664	7.162933559
Zm00001d049558	70.37439164	77.72837336	59.77176608	31.80101131	25.45506401	27.24360404	28.28519517	26.07075209	27.86275547	16.89928244	23.91722252	18.86939963	23.3933469	25.38437507	24.01322076
Zm00001d049559	0	0	0	0	0	0	0	0	0	0	0	0	0.090256931	0	0
Zm00001d049560	3.848022135	3.150790495	2.891182826	13.60237912	14.16124253	13.34269442	11.51566043	14.34219322	15.33748269	0.846052554	4.490803885	0.608952042	8.656696854	9.065494402	11.90041328
Zm00001d049561	0	0	0	0	0	0	0	0	0	84.87691307	20.52364831	99.03938851	0	0	0.050177181
Zm00001d049562	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049563	7.699733542	7.102968211	6.042250363	7.708310338	8.713289123	7.97338925	7.982104157	8.209295126	7.252337635	2.60932547	4.335774326	1.813697307	6.336225693	6.247028953	7.314000196
Zm00001d049564	0	0	0	0	0.019369738	0	0	0	0.018129487	0.182466634	0.055612466	0	0	0	0
Zm00001d049565	0.122482728	0.049910057	0	0.040435186	0.104428153	0.083855998	0.033675546	0.03909343	0.05775639	0.019873397	0	0	0.120937152	0.071084048	0.087462992
Zm00001d049568	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049571	2.568436337	2.067914317	2.272827702	4.216926678	3.994749353	4.520871575	3.409611453	3.410564736	3.769036294	0.661378266	1.629689934	0.585246262	3.147026285	3.074004703	3.505093877
Zm00001d049572	21.63187238	22.43892751	21.30843369	9.288461734	8.862745223	9.111896547	7.008470237	6.819707693	7.709067842	4.334076979	6.770031864	4.231181616	8.506422232	8.183185008	6.289906704
Zm00001d049573	0	0	0	0	0	0.010716015	0.010220625	0	0.043148875	0	0	0	0	0	0
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Zm00001d049576	0.028600908	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049578	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049579	8.728316393	7.545612585	9.467330013	14.3677919	20.60051419	16.7108046	17.43706459	19.13434779	18.82811538	2.297534673	7.76188411	2.34789757	7.553002534	6.721807307	8.508735216
Zm00001d049580	0.082191787	0.034506953	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049581	17.22964036	18.3007898	13.92801207	7.88108077	6.48067681	8.280610577	6.129462494	6.953776717	7.679878537	6.247355475	8.187968593	5.391713775	7.220183163	7.084302464	6.537482479
Zm00001d049582	12.6634186	12.0863922	14.40393225	16.23045018	14.63625827	11.05872186	11.2131067	11.49152621	10.13246574	15.10808132	8.702816254	3.082268124	11.54746303	10.18339737	10.35989926
Zm00001d049583	5.268722503	5.16488704	6.076021342	8.919101474	6.345216901	7.67082102	4.616444478	4.925309796	4.447310454	0.567759157	1.307879549	0.349974995	11.16679856	11.04425801	9.688623364
Zm00001d049584	1.430416142	1.403027162	0.880996654	1.405060296	1.317680232	1.581862479	0.724784269	1.495806324	1.483092763	0.820536683	1.11739863	0.827331461	2.238121166	1.762346862	1.844011408
Zm00001d049585	1.085018565	1.767449801	1.006853319	1.98467586	1.372484292	1.736947036	1.572126811	1.883930997	1.445179114	0.618520053	1.514189164	1.025650625	1.246548498	1.74450533	1.772927068
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Zm00001d049598	82.04686435	64.67224425	78.21745383	48.99041696	85.17156413	55.3973075	73.97315956	86.09430569	76.80192681	98.59561827	79.18067341	84.52823435	41.95395884	42.40062251	44.93125509
Zm00001d049599	0	0.013953784	0	0	0	0	0	0	0	0	0	0.012272587	0	0	0.0128086
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Zm00001d049603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049627	33.45288245	33.06490043	29.97494849	20.11943387	25.5658666	19.60370702	22.46427277	25.14406365	24.48858152	17.78373183	25.22849451	22.25009966	14.40849038	15.48952698	16.08168353
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Zm00001d049637	3.223962626	4.381842292	4.881641908	21.27454034	14.35731236	14.02427333	9.76372497	9.361660841	8.958672517	0.478407542	1.723986458	0.316449575	8.379951875	6.117781361	7.855724506
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Zm00001d049641	129.4015931	135.026076	142.5542238	331.8338492	307.7892641	293.4114837	285.2290522	303.3179086	299.2190441	34.78252848	61.28854952	21.19136448	470.6846043	513.1202816	499.8277323
Zm00001d049642	17.11053805	17.31452448	15.77119506	17.9017322	14.81494733	19.19055206	19.17216835	14.3925916	17.27210924	11.95607611	14.76518184	12.71275665	25.77491511	26.59160511	23.23799377
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Zm00001d049648	1.437097237	1.269863479	0.953795418	0.412882485	1.070719033	0.580734906	1.204486881	1.342702609	0.955764209	0.290554097	1.09113067	0.800142962	0.269429605	0.156714831	0.243567825
Zm00001d049649	8.889086414	8.925107519	10.77920041	21.30403101	24.30586521	18.54855519	21.4895719	22.88846665	23.43633135	11.14588699	18.94278399	9.391978474	25.94677658	25.47160275	28.65004632
Zm00001d049650	408.4483542	461.6781625	530.2750165	1074.362651	642.2198864	1303.683295	720.1380812	494.5039944	635.9317918	56.72417325	49.00672165	17.21999717	973.231091	983.9360251	986.94058
Zm00001d049651	9.209005252	10.81683622	9.355305732	3.677803911	1.448607179	3.311796231	1.632244456	3.056709234	1.690827661	2.033544887	2.31604614	1.37545862	4.892062265	4.338682431	6.729059064
Zm00001d049652	7.184059204	7.35097695	7.32355593	6.869914778	8.595067132	7.646342931	7.250947355	8.390483536	8.354377511	3.286177568	5.317994209	3.331989005	6.771959239	5.735236627	5.752415112
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Zm00001d049656	34.84622781	33.27274598	35.92592693	38.27385671	51.76914434	35.52719005	40.87796623	43.39376149	43.35537341	17.9570338	28.44505643	15.51127878	28.30934644	27.74514697	30.92498903
Zm00001d049657	0.850906676	0.976456097	0.634505593	1.650777167	1.370348683	0.833981683	1.060570088	1.231199718	1.585765925	2.42531722	0.047689805	0.020946573	0.232758018	0.041457501	0.612119969
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Zm00001d049660	0	0	0	0.008407382	5.60490303	0.429464927	1.543919153	0.942894459	1.91217815	0.371891232	0.059506436	0.149352786	0.045261981	0.096069787	0.007793793
Zm00001d049661	45.25098479	47.70460176	44.1243531	42.19335413	33.52578817	38.67319106	24.18023565	18.54092909	19.11998261	1.424223806	4.41918556	0.88563582	32.78154153	26.72369319	24.91803218
Zm00001d049662	10.57903104	12.5835003	10.66223319	13.91679509	15.85485081	15.00936365	16.98615115	17.51783717	17.33711596	26.31803622	29.04392675	47.24820829	13.35214544	13.58675961	12.62910614
Zm00001d049663	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049664	0.958499795	1.313131762	0.940441868	1.929416518	3.500847848	3.522880191	3.929849188	3.588853791	4.417306393	1.020436607	3.859354678	1.192176926	0.922052814	1.364120069	0.816536417
Zm00001d049665	25.20155873	25.30841857	23.18634531	56.18545916	67.13889183	68.42039212	71.04692584	76.77967101	71.62850843	70.73745628	72.50770785	49.70200107	62.66587155	62.79740221	61.80885793
Zm00001d049666	84.72523782	56.95184655	43.05257862	47.57946923	73.14585246	51.62625958	51.17363022	57.01685232	49.25448025	6.916501576	22.5412273	3.190218907	23.67015324	16.00294681	28.3968827
Zm00001d049667	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.015727176
Zm00001d049668	21.40255241	18.96631344	23.45211853	37.74554851	50.04834961	25.09894579	31.77654758	38.96164191	36.71087174	3.90101079	12.53499513	2.20824348	14.4243469	12.43247153	18.95140225
Zm00001d049670	0	0	0	0	0	0	0	0	0	0.249403247	0	0.013354826	0	0	0
Zm00001d049671	0	0	0	0	0	0	0	0.044075926	0	0	0	0	0	0	0
Zm00001d049672	0	0	0	0	0	0	0	0	0	0.012195916	0	0	0	0	0
Zm00001d049673	0	0	0.029294224	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049674	54.55473345	49.75930839	67.01482128	104.0872276	193.9124235	93.31659333	115.018826	145.309392	120.2710174	9.69679825	41.61023097	8.530299621	45.43773346	36.84531193	53.43869795
Zm00001d049676	3.898171099	4.135828635	3.781985297	7.740493297	9.03048969	7.563995702	7.723387281	9.079158539	7.786668598	4.793310959	6.260469254	4.72158677	7.283637714	7.010512755	8.013791042
Zm00001d049677	0.337561331	0.354299788	1.678088865	1.473471472	0.074131096	1.033897045	1.643501744	0.407022129	1.040766852	2.405355762	1.986486454	7.354057435	0.755483938	0.863442032	3.122135717
Zm00001d049678	0.088966815	0.102716197	0.073712146	0.009246296	0.107457928	0	0.155936586	0.107273728	0.036573586	0	0.046745837	0.032851133	1.551425598	1.341017519	1.680010393
Zm00001d049679	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049680	43.66186819	42.47897994	43.37927588	35.28572544	37.54790255	38.48565342	35.25360825	37.92780627	40.45911736	20.64391485	31.26845574	22.17024888	32.18916544	33.52554104	30.81684128
Zm00001d049681	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049683	0	0	0	0	0	0	0	0	0	9.668722106	0	0.007047172	0	0	0
Zm00001d049684	0	0	0.072648422	0.1549187	0.028883789	0.143231488	0	0.035241895	0.0360458	0.090696937	0.009214252	0	0.098120041	0.048060567	0.025343365
Zm00001d049685	3.256824747	3.353331964	3.751332317	5.138989157	5.147981587	4.911713341	6.081001112	5.386545234	5.616322968	4.645406569	4.641802307	2.60979789	3.817708745	3.132449371	3.024436413
Zm00001d049686	0.019067272	0.072045898	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049687	17.99027698	17.41402412	15.65406623	6.42734535	5.861021852	6.419270906	7.912018048	9.108432905	6.886352752	13.40844594	9.623511569	5.737515578	8.799795133	7.658497168	8.614117842
Zm00001d049688	0	0	0	0	0	0	0	0	0	0.112231461	0	0	0	0	0
Zm00001d049690	0	0	0	0	0.010640199	0	0	0	0	0	0	0	0	0	0
Zm00001d049691	4.608678662	4.372983249	4.128106751	6.486897375	10.40852391	6.648717286	9.576633085	11.69533514	8.869313423	3.293962524	5.873043482	1.381660644	6.47379588	5.309168856	5.133948663
Zm00001d049692	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049693	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049694	38.33868054	44.49580693	39.39131868	49.41471619	24.82920703	39.71418768	16.21705469	15.36559966	16.90911736	6.765976958	11.28993298	4.964292507	90.83030654	104.973132	89.4026944
Zm00001d049695	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049697	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.02910831
Zm00001d049698	9.812239039	8.711242383	9.773068991	11.04408455	11.17151322	11.29935658	6.334402322	6.63196103	8.154739928	8.804772712	8.741789966	6.629830749	5.151516287	5.564077055	5.619030293
Zm00001d049699	0	0	0	0	0	0	0	0	0.010630784	0	0	0	0	0	0
Zm00001d049700	0.168187412	0.544712574	0.029860544	0.119860597	0.126635194	0.029436085	0.056150569	0.028970819	0.029631675	0	0.212089722	0.23954192	0.026886731	0.079016977	0.166669372
Zm00001d049701	0.097045139	0	0.015075998	0	0	0.014861697	0	0	0	0	0.061188517	0.013437775	0	0	0
Zm00001d049703	17.61547576	14.84951024	19.35525934	18.76985082	22.26732358	19.39442118	17.23633697	19.65496813	19.10144872	5.248115116	9.314109793	4.014028368	8.935118577	8.858550699	9.651555298
Zm00001d049704	0.360018634	0.298318949	0.34146143	1.346998868	3.620248327	0.336607645	3.011195877	7.562488081	6.566568069	47.36587657	21.73202611	35.37884944	0	0	0
Zm00001d049706	16.85435468	19.67542494	17.87907166	20.84507747	18.55412984	18.25946232	16.81959944	15.05323317	15.08056382	2.741920008	5.054940562	2.671481655	13.68960598	12.50287233	12.08514636
Zm00001d049707	17.49887862	19.24900226	15.11214558	7.668512419	7.560270836	8.660167331	8.29496484	7.435206218	9.023757741	12.3452138	12.248712	12.92575249	6.600199404	6.006845311	6.187277002
Zm00001d049708	9.212387244	9.494370991	11.12009098	5.747308125	6.421059067	6.373146811	5.534549883	6.05097331	5.85189939	9.554084429	8.240235179	9.301417171	4.07196638	4.063923041	3.984782986
Zm00001d049709	3.877281617	3.068498845	4.48227354	5.256945338	6.205756074	5.60049885	4.41169012	4.43706839	4.322413041	3.365640568	4.091163338	2.861129778	3.994887041	4.703343332	5.205070165
Zm00001d049712	18.66070983	18.30671537	17.1340491	14.5384313	15.89918624	16.73628114	15.83592532	15.3292237	14.13084556	22.6306848	17.62787176	15.68275302	15.28681173	14.59592444	15.46220746
Zm00001d049713	0.249921429	0.261197907	0.026434305	0.603487149	0.875819542	0.657978353	1.466379432	1.493918444	1.04270994	2.273440101	1.334396364	1.979194541	1.32099496	1.16584105	1.647591456
Zm00001d049714	3.721717579	4.280345803	3.947993465	2.832254134	3.773862417	3.129210538	3.48405668	3.447000969	3.835359071	1.982397575	2.395455094	1.713619638	2.651908076	2.805831045	2.696594476
Zm00001d049715	0	0	0	0	0.017835501	0.016583299	1.012266896	0.652847375	0.033386976	0	0.034138346	0	0	0	0
Zm00001d049716	0.12413348	0.135500367	0.277692218	0.619255565	1.188565581	0.942899085	1.421489728	1.726271518	2.500486461	2.6821417	5.363977236	1.356759765	0.36116431	0.235871098	0.181785974
Zm00001d049717	0.099399352	0.019260593	0.142539008	0.133502449	0.130973228	0.112410283	0.410985738	0.19360868	0.150876268	0.084361904	0.115703789	0.033880028	0.059893651	0.10896506	0.097239336
Zm00001d049718	3.520666001	3.849468723	3.659636942	3.628475535	6.466711107	4.464515015	4.979259152	6.307443096	5.008835894	1.02947999	2.038247102	0.72922172	1.664029701	1.411061129	2.283212749
Zm00001d049719	0.602337409	0.298860623	0.090737782	0.204875206	0.76961736	0.245981914	0.127969321	0.198076857	0.47272214	0	0.138103054	0.222414016	0.1021265	0.580266641	0.97071743
Zm00001d049721	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049722	0.204353272	0.02573837	0.558735866	0	0.16155925	0.025036072	0.14327208	0.024640353	0.226821834	0.084551056	0.360774446	0.158461297	1.30346388	0.47044039	0.614276702
Zm00001d049723	34.83204614	34.75006576	36.54786292	37.03647175	40.61734574	35.20185173	32.7701338	37.79956717	36.98086735	36.79835657	40.12218232	36.87723337	25.82111719	24.78194155	26.96379219
Zm00001d049724	0.224317364	0.290164456	0.301386248	0.279758885	0.151779721	0.155978614	0.255030656	0.197374145	0.209353368	0.150504629	0.229355183	0.248488596	0.223881216	0.112983181	0.560738344
Zm00001d049725	17.35195075	17.82604877	14.23375346	9.201353701	10.09670874	9.347572542	10.61149025	9.741379981	11.04438766	6.798636593	11.27912615	7.729940138	6.86473386	5.451960386	6.294462018
Zm00001d049726	1.573990747	1.416033693	2.552323483	4.711231153	2.745532928	2.405851217	1.61149671	2.223224491	2.21847671	0.516855414	2.060466271	1.062762983	2.012967072	2.251319603	1.663769691
Zm00001d049727	8.425847295	6.412272575	8.399457497	4.928564733	16.19996107	4.703423824	15.57269262	17.42881476	18.81430014	11.1296199	12.98975908	7.368420829	8.472634321	8.065859161	6.935623265
Zm00001d049729	7.811265268	8.234327223	8.098700106	7.691150444	8.714573449	8.318710803	8.711933089	8.205549833	9.333582316	11.46467581	9.24467616	11.10407749	4.047415339	4.241508841	4.399483484
Zm00001d049730	21.67407105	23.74156275	22.11785761	23.33313239	20.81581534	21.83633174	21.62638623	17.87562103	22.05588209	23.26792787	24.43865004	18.68152723	19.61487266	22.3332556	19.42765419
Zm00001d049731	0	0	0	0	0	0	0	0	0	3.181117975	0	0	0	0	0
Zm00001d049732	14.3431108	16.99821369	20.87526412	29.61920538	48.49884397	24.51528956	262.7997215	315.0703509	185.8249184	6.728132214	5.451922987	2.9447391	999.9302097	1076.750167	1614.759587
Zm00001d049733	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049735	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049737	4.935353527	4.940261505	3.596906355	7.209514732	5.589815028	6.736976825	10.18117742	10.5702173	10.21957672	0.987386761	1.037273189	0.472470675	13.93489071	13.79294531	13.06731204
Zm00001d049738	10.850589	10.65783813	14.52732135	15.57650279	25.19596076	14.14959211	20.69602482	24.37423271	22.5798044	12.82692953	22.07856263	7.980352431	5.658757248	5.724545012	8.358277944
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Zm00001d049743	6.132187407	6.614356786	6.122906972	4.851864919	2.929197377	4.154390001	2.974105543	2.366475577	2.30787801	0.655403521	1.205300823	0.270647663	5.419988951	5.439074356	5.512789127
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Zm00001d049748	12.19552028	13.53670531	15.71029529	8.391970922	8.364886443	8.528071352	13.68652018	17.29015083	10.48482516	11.7251019	10.39307518	6.086536679	9.160435081	6.989810701	8.820351338
Zm00001d049750	0	0	0	0.013580382	0	0.040021821	0	0	0.006714625	0	0	0	0.079203961	0.047747946	0.08183017
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Zm00001d049759	15.34654615	12.34350234	15.02937024	28.60235525	31.45455884	27.92923037	27.41311418	29.19068742	31.83101188	25.78648078	23.38305346	16.77218671	18.95203026	18.23373208	19.42839049
Zm00001d049760	3.374033593	3.749154982	3.205625053	5.400620314	4.809610902	4.3234213	4.635063528	4.701707101	4.601317408	1.616133042	2.547763238	1.06682033	5.43362284	5.138361154	5.045402079
Zm00001d049761	7.297597617	7.499178956	5.841194833	4.61122162	4.825103794	3.79846052	2.791946568	2.758248855	3.344310462	18.03159307	20.42018485	31.59762344	4.617355361	4.486089407	4.451236255
Zm00001d049762	3.934360584	3.455255277	2.953738642	4.302597687	4.281288486	3.242931026	4.134442922	3.530526521	3.089537181	6.127468658	4.998480705	4.728910368	2.959077359	3.159921099	2.52806352
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Zm00001d049764	26.5785262	26.41413381	27.38483248	40.37195231	63.55617629	34.07610119	55.33751827	68.42065722	66.67158519	159.7901155	153.5839054	183.020257	40.35011079	43.47507949	45.25162522
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Zm00001d049767	11.54632672	11.44413136	10.47409582	8.017461672	9.764077993	8.543230708	9.323317711	10.45070304	9.249610338	7.470959442	10.50695775	6.000725537	5.525964772	4.954071566	5.889118245
Zm00001d049768	38.15451576	41.8520828	36.78819069	20.58605749	27.93888965	23.09260837	38.3227635	42.23945465	40.23981446	76.33080618	64.89945506	55.17448897	30.2072419	28.2222304	27.72267214
Zm00001d049769	0.241257069	0.126610071	0.374793745	0.67699204	0.476837373	0.270941843	0.610802589	0.460593424	0.02479474	0.332733273	0.101410968	0.089084544	4.792045729	4.363828774	8.344539019
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Zm00001d049784	1.418274267	0.497827356	1.444783143	3.740598495	1.470518884	2.335763325	1.765925853	1.65404656	1.319012683	10.48562509	9.939309681	13.70205132	12.93091705	12.46358435	12.98334563
Zm00001d049785	41.41936607	48.3205427	41.03955067	33.53387458	16.04937289	36.45049527	18.36923934	8.110506892	11.98146214	1.238502496	1.936916056	1.037022718	39.55584952	34.94913091	34.73029565
Zm00001d049786	3.120510555	5.236638925	3.2225562	4.415871337	5.348784025	4.491264994	24.5107701	27.58899277	20.43320066	7.534555286	4.769432778	2.882284108	16.90945001	15.56519037	16.33301705
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Zm00001d049790	45.50898885	36.98673607	57.24985037	68.79791713	126.1580582	65.57711056	73.53840195	104.2335382	78.64387132	5.880167677	27.58378333	3.011762218	28.54000636	26.82398704	43.27399169
Zm00001d049792	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049796	6.332044887	6.669053915	7.844698246	8.183086641	5.886365891	5.460876779	5.26668585	5.037900816	5.804609521	0.261300382	0.565859888	0.022092447	2.042038369	1.814604808	2.363378172
Zm00001d049797	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049798	14.54164355	17.26282108	17.45219542	14.70540968	16.3776232	13.63532913	14.06273847	15.61679642	13.85474487	7.346682884	9.351675269	6.993666085	8.805107578	7.709722699	8.157838487
Zm00001d049800	12.67886164	11.62732721	12.86875383	14.05376945	18.80529605	13.245732	14.12865235	14.46911187	14.94409985	13.23623766	21.14229811	16.66314913	7.904981291	7.772568746	8.619979648
Zm00001d049801	0.080695921	0.016939468	0	0.016773409	0.026582179	0	0.023573296	0	0	0.009274415	0.050880073	0	0.007525111	0.007371809	0
Zm00001d049803	43.48675017	36.81779703	53.90732575	34.37757831	23.65233982	36.63021581	8.441987005	3.58502113	8.738633869	4.828690185	9.180578293	4.647967987	0.217662293	0.213228063	0.289130709
Zm00001d049804	0	0	0	0	0	0	0	0	0	0	0	0	0	0.011126122	0
Zm00001d049805	0.08629273	0.310531465	0.122565553	0.153743642	0.276136662	0.211440802	0.475355833	0.178370383	0.258455537	1.802180218	1.274723982	3.045261561	0.151743956	0.378388483	0.171027723
Zm00001d049806	0	0	0	0	0.00666686	0	0	0.024403251	0.062399789	0	0	0	0	0	0
Zm00001d049807	0.711220262	1.045081977	1.227648104	2.808843016	2.681253182	2.735046143	3.208818404	2.453602328	3.191785278	2.50671888	3.213789784	1.685139716	2.940328202	1.79756011	2.740892266
Zm00001d049809	0.639676886	0.630800124	0.369763868	1.558448608	1.078087158	1.719261659	1.686136218	1.973105098	1.944727788	1.005320336	1.713356146	0.477896412	0.865641552	0.717544086	0.81408245
Zm00001d049810	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049811	0.008763611	0.030353953	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d049813	0.756361489	0.381056038	0.376003314	1.061213893	0.39864689	0.416990842	0.353523363	0.547199875	0.186560697	110.1041861	41.75242445	248.9919171	0.973351713	1.368097541	1.574022779
Zm00001d049814	0	0.225084571	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049815	35.88698904	31.35574385	47.57381932	62.79577569	92.78937396	53.111498	66.93456681	80.03174367	65.28355784	8.107600759	24.94608405	4.134413697	30.30642704	25.41775984	35.70532946
Zm00001d049816	0	0	0	0.259564908	0	0	0.030399309	0	0	0	0	0	0	0.057038579	0.060155327
Zm00001d049817	1.057307659	1.135543566	1.06955529	1.903833418	1.517354205	1.729639095	1.436586056	1.398406514	1.508643964	0.192166099	0.33332472	0.1021428	1.153352896	1.262384641	0.992601208
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Zm00001d049820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049821	12.00065777	11.83887399	15.55833667	37.92443047	31.04011748	37.65640148	33.38283792	26.76005234	30.66953974	21.55260692	24.54647385	29.71482836	48.26201424	48.71607486	45.21709114
Zm00001d049822	0	0.039470418	0	0.009770871	0	0	0.036618537	0.056679872	0.028986401	0	0	0	0.166574467	0.034353895	0.09057772
Zm00001d049823	0.459966749	0.450589862	0.49225247	3.680924527	3.484923608	4.304683493	3.762298048	5.145596579	5.184186136	0.845826639	1.46619409	0.198150668	5.390236686	5.056323456	6.100748023
Zm00001d049824	0.033328215	0.012593103	0.041420404	0.145479265	0.122961477	0.281738205	0.062310432	0.084391107	0.049323519	0	0.054636333	0	0.372953431	0.354394932	0.589539065
Zm00001d049825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049826	193.4433099	204.6558498	196.3171334	123.8553724	143.0488092	112.2875491	125.7158087	140.3977148	134.0613905	131.7490468	143.6068992	88.22197957	109.6742971	104.1095859	111.7696711
Zm00001d049829	0.039398369	0	0	0	0	0	0.015345665	0	0	0	0	0	0	0	0
Zm00001d049830	51.23436865	55.41610913	49.12631958	59.77546248	97.05228879	59.89732238	67.40394461	73.27568673	63.34778735	8.895329361	21.22394404	4.354611905	30.62968426	29.59072198	31.72945234
Zm00001d049831	19.23249658	20.42907764	10.97110527	10.7903218	9.746782979	8.392511566	11.67874687	9.225374602	11.71799398	28.20152158	11.34136806	14.8847547	10.90021669	10.30348461	11.01326405
Zm00001d049832	2.31185096	2.752349934	3.05533614	2.883240229	3.274448543	3.575107152	3.238563436	3.165132608	3.130517135	1.019928016	1.562677784	0.693748059	2.773421299	2.811867144	3.034839159
Zm00001d049833	0.042325802	0.159928511	0.052602631	0	0	0	0.148373099	0.153105847	0.052199452	0	0.026687097	0	0	0.04639903	0.048934403
Zm00001d049834	1.143601317	1.243955987	0.726786349	0.972443149	1.13014688	0.748297728	1.032594023	2.30342799	0.801350903	1.397985806	2.458155596	0.331103201	1.294268942	0.812027131	1.036692997
Zm00001d049835	35.8379582	34.53433673	39.03450186	41.0325642	52.11286359	42.81636088	47.39909633	53.29454903	55.18278401	77.47787794	76.66853702	65.10278541	25.91867665	24.27896621	27.3311138
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Zm00001d049851	1.635202217	1.841706939	0.791398867	1.607951617	0.776905822	1.338774794	0.780828718	0.455003461	0.378123345	0	0	0	12.92327175	13.27188356	13.36086472
Zm00001d049853	1.880011255	1.418546301	2.487224394	6.688247883	10.87909067	6.591388502	12.16841192	12.90128602	11.43260621	1.02757931	2.28335342	0.614220432	4.828059425	5.261555913	7.011450221
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Zm00001d049858	21.41759926	22.9166083	29.95130645	30.70528398	36.21233491	26.72994733	26.5701534	26.74189022	23.59965503	3.202293875	8.455863301	3.059917141	22.10786032	14.7894021	21.05898826
Zm00001d049860	163.1034338	144.6537247	142.8893544	67.93964702	125.2570998	92.51069016	140.3606759	128.4681652	141.7237643	190.989362	162.8249423	113.0400415	40.76419414	35.36571524	41.71986442
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Zm00001d049871	0.420862216	0.273588397	0.16872542	0.321701319	0.500881805	0.249490548	0.872508473	0.638422495	0.535783054	1.029810031	2.499523564	1.158010609	0.66845699	0.416715817	0.784797024
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Zm00001d049873	11.90382665	10.62612095	12.88840279	23.55534732	28.78159838	23.25262398	25.37264643	28.17198166	28.20703198	16.03514585	23.70093095	10.1917534	17.31768266	16.95813486	18.91713634
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Zm00001d049882	30.78074224	30.45111211	28.9281921	22.29114027	20.96223202	23.16796122	23.02162131	17.24116491	21.5382649	19.87101704	30.83217298	26.26838267	20.21485016	20.73036424	15.17484153
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Zm00001d049886	20.18211848	18.773176	19.916593	31.26539466	35.70680073	30.27574716	26.33381673	31.4221567	27.53335109	13.52535728	18.63215768	13.41769821	25.50969577	27.30390047	31.16110218
Zm00001d049888	33.3049861	33.53720385	29.37921081	13.31292148	15.915323	13.71214252	13.86775801	12.44265081	13.4948315	4.290152057	6.628163597	2.814053815	12.44602811	11.10068501	9.825371623
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Zm00001d049893	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049894	12.04143774	10.9236321	10.83094016	9.740125256	8.536182791	9.740452652	10.30797095	9.906501265	11.26126311	11.44057014	10.55787957	11.03224947	6.557790487	6.794701826	6.488066875
Zm00001d049897	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049898	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049899	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049902	10.53676708	10.97374754	11.29041881	23.43294074	29.8441998	23.90873525	28.01804304	31.92250305	28.91606223	10.33110953	13.95714425	3.982263757	15.2589162	13.23971079	20.04389898
Zm00001d049903	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049904	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049905	12.39086453	14.31020721	13.7040558	22.20626065	20.74155624	22.27597924	27.74797718	25.06926778	26.80696575	51.95201708	37.98051567	54.81798909	24.92625851	24.21513597	22.77143691
Zm00001d049906	0	0	0	0	0	0	0	0	0	0	0	0	0	0.01878056	0
Zm00001d049910	3.96146142	2.725731886	3.301747576	10.27323383	7.91946846	7.241479896	6.655671814	8.226402409	8.620852539	2.059655946	4.24884359	2.855895468	16.06083854	18.12902048	29.2913382
Zm00001d049911	0.010412212	0.052456877	0.012940327	0.467483714	0.411588492	0.102051072	0.389333421	0.025109514	0.269664039	0.014360157	0.118171197	0.173012633	0.337896377	0.741925084	0.577821005
Zm00001d049912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049913	41.93588741	39.31283238	45.02396701	29.26484107	26.58174664	27.61009079	25.71232988	24.19497053	26.78906204	26.06820209	29.64136244	39.04280378	23.91575354	25.98169772	24.59200696
Zm00001d049914	0.719225785	0.606407194	0.539268449	2.779919003	1.903203082	3.692091301	2.597647399	2.243311312	2.602369636	0.754195419	1.2292773	0.586021371	2.540889566	2.156808477	3.071825215
Zm00001d049916	0	0	0.07347308	0.073730464	0	0.03621434	0.008635047	0.017820969	0	0	0	0	0	0.259232635	0.230679419
Zm00001d049917	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049920	0.225040888	0	0.069920369	0	0	0	0.131480139	0	0	0	0	0	0	0	0
Zm00001d049921	6.81748535	6.927171723	9.043652656	6.1054985	10.1298078	7.360140293	11.46911371	9.867317634	10.40545999	1.667098628	3.52113945	1.218512731	11.32173841	10.93207916	10.91453512
Zm00001d049922	2.420266292	2.735262174	2.918489599	13.7788215	13.58365434	14.06446263	14.17862322	14.85961842	14.77102129	27.78614703	18.69989139	16.97763866	38.8612443	38.18429267	41.0799862
Zm00001d049923	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049925	0	0	0	0	0	0	0	0	0	0	0	0	0.010260597	0.050257836	0
Zm00001d049926	0	0	0	0	0	0	0	0.064476126	0	0	0.146100547	0	0.169540643	0.097698088	0.144251218
Zm00001d049927	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049928	4.552874027	4.616081733	4.518823178	4.562965207	4.272474596	4.221275737	4.639186966	4.291417541	4.462412691	5.125954569	5.835153427	5.546416871	5.357315021	5.470766667	5.152928031
Zm00001d049929	0.514530415	0.460725153	0.404658227	1.759661755	1.737296347	1.506978663	1.05684749	0.862752875	1.269117403	0.260564427	0.425800831	0.133587526	2.775420521	2.762945593	4.856534435
Zm00001d049930	12.11032888	12.84843709	11.65975066	9.856091612	9.943519137	9.616822646	10.60840236	9.390721374	10.07482273	8.949996587	11.44846866	8.350508069	10.70944327	10.07808623	9.596216737
Zm00001d049932	0	0.028414141	0	0.028135594	0	0.027638832	0	0.027201974	0.02782248	0	0.142243107	0	0.025245132	0	0.026082198
Zm00001d049933	9.025954438	5.017570744	10.77901436	23.81523729	56.98576917	25.17772766	34.3716653	41.33506666	34.89926265	3.89262152	6.988633276	2.116955298	11.58083766	9.088821611	15.38092465
Zm00001d049934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049935	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049938	0.660351328	0.790540934	0.633797552	1.577813426	1.038101238	2.262855011	0.721961785	0.697689654	0.669256389	0.072137295	0.09893753	0.007242646	0.051214657	0.121844607	0.143620483
Zm00001d049939	68.42574331	62.13944986	74.49081306	36.4756497	41.67709636	34.81944263	39.16477201	41.21099056	39.43751613	11.27454985	19.91577231	5.597252183	38.34369338	37.56255318	39.92676827
Zm00001d049940	33.84138123	30.31831102	31.84916559	16.50360463	27.8095069	17.7443894	24.72415148	26.13788549	25.37632077	86.90347923	76.42018158	58.70664498	10.7472611	9.766669323	12.08607053
Zm00001d049942	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049944	0	0	0	0.015035423	0.063540939	0.044309873	0.098610105	0.058146018	0	0	0.015202702	0	0.013490785	0	0
Zm00001d049945	3.774089122	3.87687712	2.594935599	6.417063939	11.57799675	7.039710991	7.701807753	8.312131915	6.596001844	1.262705967	2.591203888	1.165657763	2.707379712	2.102705619	3.391065135
Zm00001d049946	111.2879251	88.40784449	115.8407285	20.30751577	12.74413119	18.99901556	6.48530694	5.658822585	10.3679019	3.039294974	5.712313339	1.49183371	2.968375324	1.252635306	2.453439485
Zm00001d049948	17.96009964	20.67997306	20.68878119	14.37099272	21.78466357	16.0144395	25.35040755	31.50432638	29.48935726	22.38297899	25.74971445	18.17997411	15.5194061	15.53610076	15.45476683
Zm00001d049950	0.073609189	0.227563476	0.099798236	0.450665283	0.061721485	0.336130405	0.101650945	0.040343603	0	0	0.033754018	0.007412811	11.95128996	9.543778559	10.39021322
Zm00001d049952	6.562724754	5.566405009	7.113903988	8.981637691	9.822550677	7.909765419	10.14176601	8.65149909	7.880236648	1.946073867	3.642697774	1.076474385	7.939753665	5.968487497	8.218406665
Zm00001d049953	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049954	9.198302799	7.283037968	11.61795728	14.12812692	100.3183655	33.67223102	90.31820682	99.6388058	80.26456417	122.9756322	116.1427692	85.91132498	14.16859339	15.22902913	46.97053211
Zm00001d049956	1.13970516	0.915272195	1.409931548	9.49984609	13.17801421	8.108757661	6.396043703	8.201223514	7.80801998	0.331672938	1.747060847	0.075287512	4.095214081	4.384309111	8.310895447
Zm00001d049957	0.035976931	0	0	0.012819677	2.106131323	0.239273316	1.765639873	2.038859533	3.080513374	17.99011254	0.097217281	0.039853612	0.005751334	0.02817084	0.095072554
Zm00001d049958	3.441551113	3.639735907	3.383516756	6.226724298	6.024481889	6.615436245	4.026736935	3.811641734	4.160726283	0.629951516	0.844029096	0.325631563	2.135622889	1.720294305	2.195977859
Zm00001d049959	3.971620039	3.135553127	5.106371975	11.4391379	20.56442935	12.23229442	15.64819098	18.69757905	17.28323453	5.390227679	8.380489726	3.873734173	10.60628622	12.14215358	14.61061949
Zm00001d049960	2.086373048	1.88440532	2.251772859	7.891695098	3.798102238	8.72771042	6.383519182	3.045310146	4.638309137	0.037861216	0.138472808	0.015205193	23.22430443	23.27782502	21.82027269
Zm00001d049961	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049964	0.013045071	0.42718818	0	0.016269246	0.017188794	0.015981996	0	0	0.06435276	0	0	0	0	0	0.060327527
Zm00001d049965	18.93842126	23.88993582	26.29360738	114.8662267	64.72884616	87.44507585	25.92057175	29.02149242	22.11499371	0.889508536	2.6371201	0.238153106	148.5457468	170.6833923	186.9808361
Zm00001d049966	34.30903532	29.09412124	32.80953056	42.52743523	37.54612201	44.7926982	39.84528296	44.02154854	36.69241479	29.0408581	25.69466407	11.19871224	41.67535965	43.46771353	43.05721219
Zm00001d049967	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049968	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049974	20.45952218	23.72504927	20.70752945	12.23812062	10.26605693	12.59084117	11.53738224	10.70969428	11.83787365	3.462634756	6.184296955	2.499096091	9.205358815	8.444638763	7.777835316
Zm00001d049975	3.551755462	3.646242006	4.489312009	10.04472714	8.841820127	7.929898843	6.023381947	6.246773411	7.082017118	0.554204915	1.460266658	0.205817958	5.623329126	5.717184654	7.29844862
Zm00001d049976	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049977	0	0	0	0.021803286	0	0	0.204281802	0.168638325	0.323409648	0	0	0	0.019563363	0.114988901	0
Zm00001d049978	0	0	0	0	0	0	0	0	0	0	0	0	0	0.038086116	0
Zm00001d049979	12.97883306	12.67301327	12.72467843	9.131394864	9.686330074	11.2262502	11.01712893	10.26722092	14.46217317	4.490225962	7.31951147	7.588505624	8.588948725	9.25375655	7.817745409
Zm00001d049980	18.38455457	17.30916432	19.32079601	13.5508255	15.01154694	15.9914333	18.91877119	18.45467406	19.33328503	9.274807956	13.3403714	11.81261056	13.39715856	14.97975009	12.99839878
Zm00001d049982	10.93988256	10.20192046	10.7023701	12.11506953	15.61667178	13.64229524	13.7756889	15.32938293	15.65823258	14.07294577	15.5968136	10.11406735	9.930827032	9.286791246	10.530699
Zm00001d049984	8.455840335	9.273610616	8.626388796	17.36104255	21.32355504	17.97066772	13.98078297	16.43815668	14.82676749	4.81288802	7.90664196	3.929465519	13.98969766	9.416725443	12.10374949
Zm00001d049985	0	0	0	0.146668128	0	0.036019639	0	0	0	0	0	0	0	0	0
Zm00001d049986	0.768663755	0.665592705	0.793238166	1.99432208	2.86666288	3.195115568	2.269517498	2.060549528	2.623861008	0.54898763	0.597163984	0.182462319	1.866238749	2.13668465	1.682144658
Zm00001d049987	0	0	0	0.007432506	0.031410386	0.029205113	0	0.07904462	0.007349792	0	0	0.006601732	0.040013644	0.006533081	0.041340398
Zm00001d049988	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049989	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049990	0	0	0	0	0	0	0.013688806	0.056501787	0	1.567201279	0.22159209	2.595436592	0	0	0
Zm00001d049991	4.606936595	5.086566545	3.618723362	6.019170113	6.346238226	5.864028756	5.662852485	4.737310075	4.980650119	0.08251591	0.679031865	0.220924471	3.202541048	3.224749509	3.274143419
Zm00001d049992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049993	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049995	0.556833966	0.612659971	0.517037563	32.77527975	11.39359546	22.88107096	170.6375842	106.1916161	143.9687523	1.783093103	3.728847114	1.871776378	130.4459206	141.2387777	145.8855735
Zm00001d049996	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049997	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d049999	0.157965938	0.054261459	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050000	0.007767747	0.009783506	0.135152896	0	0.010235146	0	0	0	0.009579786	0.010713003	0	0	0	0	0
Zm00001d050001	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050002	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050003	0.153250637	0.257359659	0	0	0	0	0	0	0	0.035226316	0	0	0	0	0
Zm00001d050004	0	0	0	0	0	0	0	0.03139885	0	0	0	0.115385695	0	0	0
Zm00001d050006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050008	11.09499637	9.362273984	9.221056149	8.148096262	15.18052114	12.37247449	14.4415737	14.34722325	11.13296272	0.521114925	1.36013002	0.32724021	8.710179327	9.730179706	9.729708434
Zm00001d050009	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050011	1.587784761	0.799928313	2.509637367	3.30036046	23.46414758	5.885639047	23.91944019	26.81291608	18.81860196	3.346489503	5.513881644	1.99339269	3.353106793	2.543932525	6.420228607
Zm00001d050012	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050013	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050014	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050015	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050016	0	0.023717589	0	0	0	0	0	0	0	0	0	0	0.568954329	0.80508069	0.391879638
Zm00001d050017	0	0.007077258	0	0.014015758	0.103655565	0.055073184	0.045961306	0.013550675	0.00692989	0	0	0	0.125758732	0.03695903	0.103942866
Zm00001d050018	0.978308482	1.158462794	0.827882832	1.800609175	3.004145663	2.561029378	2.983272303	2.997773992	3.224276609	0.776490697	1.289914434	0.602069855	1.718552683	1.564380426	1.259953623
Zm00001d050019	0.239846209	0.215776563	0.028388721	0.199417192	0.075245849	0.08395555	0.200185927	0.068857127	0.169026797	0.126014272	0	0	0.23005338	0.075122239	0.132045214
Zm00001d050020	5.369636671	5.152939825	6.204658652	4.206220217	6.743098827	4.761841255	5.388347064	5.871384339	5.645438569	6.510369927	7.775086306	6.047193904	2.725616457	2.1782886	2.256005992
Zm00001d050021	0	0	0	0	0.166872222	0	0.088790201	0	0.140568603	0.602587818	0.159702312	0.273566711	0	0	0
Zm00001d050022	12.45300516	13.06716222	9.450244914	33.44494594	15.61130939	14.66158742	3.889040096	2.26576442	2.523662615	14.29764758	11.7476072	16.91724315	180.4551706	198.6875375	171.8387268
Zm00001d050023	11.4731868	12.27475468	11.48869569	11.83782176	10.81810394	10.7337056	10.10003278	8.503499683	9.896335236	2.109219527	4.317774055	1.460938109	7.593845344	7.771732459	6.857775345
Zm00001d050024	0.014639037	0	0.024257918	0.11360018	0.036434927	0.027898614	0.047515874	0.058837821	0.030089987	0.078515288	0.125119779	0.183786555	0.078267417	0.046360387	0.063937848
Zm00001d050026	1.440957582	2.489851021	1.450421321	5.019997754	2.353726872	5.551432733	1.154975145	0.624626512	0.521380676	0.689812884	0.8259517	0.705769973	2.6719157	1.873360837	2.739857667
Zm00001d050032	0.472336886	0.668438265	0.540851429	5.341415799	4.335633123	6.261418574	4.843302662	3.56436673	4.457277973	0.058555545	0.20077482	0.111701505	4.121581337	4.043434105	5.252241899
Zm00001d050033	20.63125387	20.50112965	23.42724169	16.00494874	12.7943242	15.00042006	12.89922179	11.147494	13.56585758	4.117733612	6.522745698	2.219433903	15.15201191	17.11864213	14.14801856
Zm00001d050034	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050035	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050037	0	0	0	0	0	0	0	0	0	0	0	0	0.018910445	0.092625999	0
Zm00001d050038	0	0	0.048753658	0	0	0	0	0	0	0.135257428	0	0	0	0	0
Zm00001d050039	0	0	0	0	0	0.107481062	0	0	0	0	0	0	0	0.032057512	0
Zm00001d050040	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050041	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050043	415.4515966	413.7057031	438.8651076	232.7291732	193.1538727	273.4046248	182.4622602	138.4361778	169.5756583	190.4967768	137.8389967	126.6560982	201.3481645	160.3001371	147.198167
Zm00001d050045	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050047	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050048	1.862880077	1.880100554	1.063329612	0.537311168	0.311824411	0.579863429	0.758680672	0.292665712	0.45649614	0.008368791	0.114779391	0	0.991384049	0.498897693	0.133293577
Zm00001d050049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050051	3.013693002	3.052068824	3.182341071	5.253216764	6.27808121	5.887443496	5.915847251	7.006837651	6.701630607	9.985792463	11.19835548	10.8248102	3.643913709	2.864715995	3.349061313
Zm00001d050052	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050054	9.512256284	8.034339413	9.743866972	25.51392328	42.1002151	24.37489322	30.07800749	37.74638724	34.95115435	3.662459771	11.67633171	3.14405267	17.8614106	15.00228946	21.83248861
Zm00001d050055	0.142408687	0.059788089	0.235981247	0.236807915	0	0.290783544	0.360543195	0.028618743	0.175629406	0	0.119721282	0.15775388	0.026559982	0.026018901	0.301847105
Zm00001d050056	11.90403672	10.17063022	9.730731189	11.7851264	16.8819264	16.59878086	15.91747667	15.83330697	16.34583199	12.99870023	21.88255702	15.36188594	11.50824478	9.874663229	10.04534555
Zm00001d050059	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050061	0	0	0	0	0	0.007947394	0.003789997	0	0	0	0	0	0	0	0
Zm00001d050062	3.146916281	3.900805164	3.002902569	4.038606897	3.287679215	5.360942991	3.5316372	2.17756221	2.979886481	0.584026213	1.282650113	0.919791832	2.295014751	2.494021838	2.078322692
Zm00001d050063	1.628872912	2.075289049	2.082875797	1.092056336	0.446624537	0.692112898	0.583103553	0.420056929	0.429638878	0.597331083	0.427434659	0.010430009	5.457747085	6.254857672	6.193875391
Zm00001d050068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050069	0.371208924	0.375261576	0.121405143	0.054823697	0.18663874	0.101727491	0.005707337	0	0.066261041	0.336814675	0.44962848	0.400387126	0.185834474	0.139213667	0.220231036
Zm00001d050071	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d050076	0	0	0.009550674	0.076673052	0.050629163	0.065904399	0.053878034	0.03706441	0.066342305	0	0.058144569	0	0.077395699	0.092667652	0.044423305
Zm00001d050077	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050079	0	0.420707811	0	1.368774546	2.106332241	0.672303733	5.07403198	4.487898449	2.82478291	4.146100473	3.24939856	1.585798169	1.041262548	1.307756256	1.737811798
Zm00001d050081	1.364231029	1.724325599	1.476796603	2.380771254	1.597491138	2.447995511	1.585654655	1.485106924	1.712200925	0.096401918	0.598775268	0.093450818	1.321630708	1.329055714	1.192681165
Zm00001d050082	0.244371609	0	0.134980336	0	0.053665908	0	0	0	0	0	0	0	0.729225807	0.610191018	1.61668187
Zm00001d050083	0	0	0	0	0	0	0	0	0.031050503	0	0	0	0	0	0.02910831
Zm00001d050084	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050089	19.48101841	20.83212434	19.68097648	16.79260309	11.86820946	15.60408175	13.36080475	10.61515867	13.77241301	6.1144799	7.921327126	5.674338715	18.27087797	18.38450927	16.27289307
Zm00001d050090	0	0	0	0	0	0	0	0	0	0	0	0	0.016610803	0	0.085807883
Zm00001d050091	0.060707078	0.045876473	0.316877127	0.560263131	0.511939079	0.639620499	0.567489767	0.322075237	0.748686634	0.217685179	0.33683572	0.201745637	0.733678229	0.359365844	0.140371333
Zm00001d050092	0.05675066	0.0214433	0	0.03538848	0	0.027810929	0.006631315	0.041057027	0.055991442	0	0.078720843	0.044006064	0.234971499	0.248848264	0.131223014
Zm00001d050093	0	0	0	0	0.176606435	0	0	0	0	0	0	0	0	0	0
Zm00001d050095	0.283454611	0.476016175	0.298081575	1.250889657	1.924925637	1.593883388	2.106198598	1.717672334	1.774781368	0	0.238296905	0.048307408	0.756387627	0.780816	0.949525127
Zm00001d050096	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050097	0	0	0	0.010825505	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050098	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050099	0.669221241	0.200687293	0.47526293	4.292350461	7.474280715	4.489860596	9.756194127	6.878104719	7.231510096	0.571360166	1.326143429	0.070603135	3.815722197	3.528381251	5.71072464
Zm00001d050100	0.181075946	0.456131648	0.862659921	0.225830065	0	0	0.141058163	0.218336374	0	3.53789242	1.293941271	4.24577331	0.033771633	0.033083635	0.279131339
Zm00001d050102	0.16159851	0.142473745	0.140584572	0.221692516	0.149050821	0.118788171	0.132179502	0	0.059788734	0	0.122268543	0.071604598	0	0.070859984	0
Zm00001d050103	6.448184053	6.674654133	6.330246045	12.05608525	10.93825917	11.56440277	7.433396186	7.265417599	7.671726357	0.425972443	0.696974311	0.234098505	9.968615054	10.22292192	8.732977417
Zm00001d050104	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050106	0	0	0	0.064279623	0.152803682	0.094717053	0.346297125	0.21751324	0.206583882	0.231021217	0.178735637	0.057094713	0.418150747	0.522634126	1.400326423
Zm00001d050107	7.501817078	6.732993473	8.118981484	9.154521221	28.19652645	11.51564667	18.30548357	24.46856923	19.19080633	13.15275827	20.73264281	7.084668064	8.521283172	7.568687612	7.804878257
Zm00001d050109	0.954490016	1.054222635	0.593121501	1.694028694	1.770427341	1.808042728	1.261171338	1.549285359	1.113765858	0.415172022	1.194383744	0.577470703	1.454266007	0.893418058	1.544928999
Zm00001d050110	0	0	0	0	0	0	0	0	0	0	0	0	0.025951738	0.06355762	0.080436703
Zm00001d050111	0.535275825	0.218653584	0.143836188	1.371230594	0.93405181	1.169780657	0.304282609	0.837302665	1.141869917	0.079809039	1.039864848	0.032051582	0.63136872	0.364760205	0.635577628
Zm00001d050112	4.42878647	3.633912546	4.379540548	4.091904603	6.094535201	4.645012386	4.70138957	4.953382513	4.993997706	1.65453173	2.011919906	1.297181952	2.240488417	2.462655037	2.33844599
Zm00001d050115	0.900376496	0.847261946	0.926061153	0.361396485	0.300003663	0.748068733	0.108836891	0.262053233	0.293557705	0.057092765	0.104404933	0.091714595	0.057905185	0.034035322	0.011965036
Zm00001d050116	5.348073373	5.405091097	6.88869608	7.663742164	9.846952554	8.425189524	9.242781308	8.897018688	8.888849947	7.823637717	9.647178107	5.715104308	6.625408201	6.140999774	5.65760717
Zm00001d050118	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050119	1.258933771	1.362652279	1.320136816	5.200915131	3.537973222	7.085244385	4.171845908	3.451049857	5.143035503	0.515457301	0.43409731	0.337752193	1.254701202	1.595726066	1.216706397
Zm00001d050120	33.91609251	50.47697974	13.02419145	1.683233961	1.108866882	2.84015481	0.296861081	0.01914564	0.274153219	0	0.160184572	0	0	0.034812745	0.018357505
Zm00001d050121	27.91754843	32.41314662	33.55896979	26.5695764	24.50642214	26.72495367	21.27432875	24.93146733	23.51754986	28.42653385	37.10032043	24.28022247	13.71896717	10.98942839	12.98010762
Zm00001d050122	0.025177226	0	0.062580662	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050123	6.283726716	5.998725621	8.975988524	18.69773875	26.16761711	15.79082197	18.17861293	20.25704889	18.96127672	9.589261531	9.929635925	7.721415611	10.51349795	9.794354435	11.63581079
Zm00001d050125	2.853046373	3.266110073	3.356604942	4.292059059	4.449043403	4.261761524	6.463681481	7.361463569	8.822820125	5.394058889	5.772370136	2.808854427	2.681660247	2.738947657	2.792038222
Zm00001d050126	0.561831531	0	0	0	0	0.458880332	0	0	0	0	0	0	0	0	0
Zm00001d050129	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050130	19.26254236	19.69190685	20.62576513	35.86380297	29.49076952	38.15080097	32.00632225	28.83795084	27.25369793	15.1775142	16.04774628	10.49007363	44.45801956	49.12368418	44.68037773
Zm00001d050131	5.864472369	5.667032667	5.332507598	2.964023482	3.153849417	2.808030817	3.475751898	3.053841523	3.144372656	3.526701177	3.701200469	3.247156753	2.531172513	2.434261201	2.697704962
Zm00001d050132	4.873698776	4.030577691	5.612020515	3.38935001	11.5970098	4.008339314	10.33717737	13.77108369	12.40707719	46.34444558	32.93969163	45.21181847	2.121635104	2.061884881	3.813092242
Zm00001d050133	2.551963665	3.294562872	3.080971156	9.218458518	8.694687989	8.776545239	12.26867478	13.0996002	12.66779781	4.39947328	11.73460116	5.23995289	10.34181963	10.41089063	9.662619778
Zm00001d050134	3.992029658	5.000248317	4.040181343	5.619325985	3.954732818	5.448187909	6.251023154	5.583281813	7.99127939	1.922935181	4.682432355	4.031996118	6.807567224	8.623694332	5.251635894
Zm00001d050136	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050137	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050138	0.016333613	0	0.010149731	0	0	0	0	0	0	0.022526745	0	0	0	0.01790548	0
Zm00001d050139	3.920763574	3.563290137	4.155321951	9.740408507	11.45822843	9.91853916	9.834008113	10.14768957	10.35802324	2.561805093	3.70094919	1.361220774	8.052204903	6.857503132	7.113276209
Zm00001d050140	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050141	0	0	0	0	0	0	0	0.010393692	0.021261567	0.166436568	0.086960225	0.219622048	0	0	0.049829168
Zm00001d050143	0.064184197	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050144	0	0.061386701	0	0	0	0	0.028475645	0	0	0	0	0	0	0	0
Zm00001d050145	0	0	0	0.026999477	0.014262752	0.013261387	0.006324163	0.006525889	0.006674752	0.067178927	0	0	0	0	0
Zm00001d050146	31.16346607	32.12540992	33.05621876	38.07664981	42.20669423	39.27382708	44.16998927	50.64987806	47.07760577	56.18824313	58.1493436	42.49219584	37.80213335	30.95295293	35.65630563
Zm00001d050147	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050148	2.102850927	1.286826918	2.264076302	3.06754737	8.718450039	4.046547938	5.204929081	4.842983944	5.200130461	2.885267174	4.226459486	2.892341607	2.171680252	2.571889611	2.381184025
Zm00001d050149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050150	3.764678312	4.001944355	4.475202803	12.76647155	6.286197682	12.30314481	6.438600208	4.618339315	4.968962587	0.977756341	0.731727951	0.637603224	48.11070538	50.30340954	40.86301508
Zm00001d050151	0	0	0	0	0.038409075	0	0	0	0	0	0	0	0	0	0
Zm00001d050153	0.062175886	0.08457562	0.046363425	0.1364758	0.147466534	0.146254019	0.145305048	0.137944738	0.113486566	0	0.006272463	0.002755025	0.256042674	0.438946472	0.707336687
Zm00001d050154	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050155	21.86312409	21.29594799	21.89006992	26.43227395	30.85706871	32.10250326	28.16727203	28.86949815	29.1043016	27.45929751	31.58361434	17.6684346	13.39634912	13.28202922	16.57937695
Zm00001d050156	25.67671775	23.85001234	24.62786101	19.20296911	11.32689451	19.5512281	8.65303668	6.639548479	8.025731653	0.726103545	2.111448061	0.516285427	33.19514866	35.38570471	32.51966006
Zm00001d050157	0.034436357	0.050601506	0	0.042947531	0.015124984	0.04218925	0.013412961	0.062283613	0.02123479	0	0.014475117	0.006357839	0	0.012583448	0
Zm00001d050158	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050159	0	0	0	0.061775978	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050160	0	0	0.002071273	0	0	0	0	0.008038228	0	0	0	0	0	0	0
Zm00001d050161	0	0	0	0	0	0	0	0	0	2.388157099	0	0	0	0	0
Zm00001d050162	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050163	2.099249823	2.841327317	2.634913599	4.389539535	4.341765983	4.836647782	4.497117964	4.596489398	3.889876046	0.84983823	1.060205576	0.26609669	4.820971558	5.192171977	5.077420913
Zm00001d050164	29.54909622	21.49654064	32.74032329	5.219596642	36.73429765	9.15991762	25.8924882	39.44215093	38.15259829	68.72087208	63.81392615	45.68575135	1.303618531	1.121651574	1.068923269
Zm00001d050165	7.071871003	6.407519835	6.85106845	10.82332213	11.66334938	9.474451473	10.27874013	10.91996294	12.04315928	5.528304558	9.811627998	4.213555256	9.376530489	8.814292235	8.239781061
Zm00001d050166	4.586407518	5.845860996	6.164749027	11.06957932	11.39090191	7.788413817	10.61561973	10.9011856	9.006694182	11.25528965	11.15112721	8.08999465	10.80621615	10.95983911	12.08006554
Zm00001d050167	1.21288383	0.794721679	1.742630744	1.005522839	0.711316378	0.953412137	0.638993478	0.346594998	0.501489504	0.077353376	0.309433467	0.124261518	0.337352635	0.391964729	0.486332679
Zm00001d050168	16.68263632	14.46661978	23.20068256	4.07143433	2.668719456	3.199639277	3.17628337	2.683132719	2.727904695	1.359904021	2.167585313	1.402256714	15.73096489	14.89924409	11.73881949
Zm00001d050169	0	0	0	0	0	0	0	0.012719442	0	0	0	0	0.047217746	0	0
Zm00001d050170	0.198565489	0.07502819	0.111049998	0.136203245	0.156983497	0.024326989	0.197220209	0.13168363	0.036732948	0	0.062599363	0.043992368	0.044440232	0.021767446	0.03443532
Zm00001d050171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050172	20.15996883	22.07626117	20.43949807	22.95410931	27.69294331	27.09859587	37.09977058	34.83866426	34.92875689	27.74763745	33.6306015	23.48507917	23.10766021	20.06453339	23.26049358
Zm00001d050173	17.77052324	17.66451383	20.3913658	34.50258883	28.67959471	31.95591649	19.31812474	21.62792929	19.45236017	7.188963187	10.0500276	4.310498722	45.42993996	46.22667564	46.22658735
Zm00001d050174	11.52253028	11.04623323	11.53278919	10.67637438	12.06375663	9.019570217	9.857984854	9.99179433	10.46782054	3.931544688	5.575698219	3.584579092	6.293767804	6.883457354	5.775010233
Zm00001d050178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050179	28.24420624	28.68166223	30.62471684	23.98983041	31.68653557	23.48004141	27.94054493	34.35840371	28.75711142	27.056882	34.49082302	18.77453903	17.82861878	15.71019204	19.58944276
Zm00001d050180	0.621419724	0.434822467	0.371849237	2.669471043	0.576200792	1.635437145	0	0	0	0	0	0	0.206041074	0.327995837	0.292700223
Zm00001d050182	0.650426748	0.942869975	0.991375435	1.530535896	1.746406179	1.277985845	1.118525388	1.228191101	1.695123317	0	0.309512829	0.054378357	0.892644285	1.304962307	1.915426059
Zm00001d050184	1.113454957	1.538820934	1.076891127	2.323426731	2.777290795	3.102477494	2.232579019	1.817959083	1.675088768	0.8903115	0.57639224	0.179975905	3.005894737	2.821172777	3.110571794
Zm00001d050185	0	0	0	0	0	0	0	0.080021341	0.040923357	0.015254762	0	0	0	0	0
Zm00001d050186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050187	2.83511894	3.262845574	3.039132433	5.184624046	6.99811635	5.495662696	3.411060768	2.322005505	2.770801767	0.400495052	1.117844769	0.677221801	1.992488592	2.563436182	3.922739273
Zm00001d050190	9.516991569	9.576664554	10.63871255	16.61057066	26.63927557	20.85158991	23.35915384	27.80793175	24.96460421	41.21684912	45.17923996	45.79569	15.52394274	15.15248766	17.20301093
Zm00001d050191	0.076497712	0.12387748	0.067908272	0.558798533	0.943171534	0.515460901	0.759794403	0.685202721	0.471714472	0.090431105	0.213603438	0.006052907	0.073374339	0.143759105	0.511698952
Zm00001d050192	0.052123441	0.028135571	0.194337497	0.352890226	0.274721121	0.118594073	0.252325856	0.062849005	0.055099422	0.174582273	0.056339427	0.008248569	0.26664139	0.187744223	0.223829583
Zm00001d050193	60.41697111	48.25460669	68.7541313	62.75010315	87.86999959	54.53894111	58.6642205	71.22053598	61.00900047	4.770513195	26.58677911	3.223500977	23.90014398	21.1260933	29.73270029
Zm00001d050195	5.996936486	4.37485224	9.648327712	4.294939646	6.845656586	7.674412336	2.463004177	3.132214266	2.562930748	17.68797075	16.88421048	18.53171316	1.511583091	2.815126383	1.578865049
Zm00001d050196	0.129448822	0.063404938	0.107252918	0.717524246	1.004454903	0.308374342	1.319331615	0.893157712	1.490032122	4.036790317	3.355470749	2.071297661	0.547239023	0.709531722	0.947849856
Zm00001d050198	0.049858621	0.113034812	0.099143106	0.149235623	0.591264431	0.195467625	0.279647036	0.63725237	0.47961816	0.990190923	0.641307873	0.718004532	2.030879689	1.934849705	4.161851318
Zm00001d050199	2.90302745	2.253346654	3.565938838	7.346307766	12.05371621	8.539989595	8.243804746	9.565020032	8.596734194	0.232776364	0.595945936	0.168270806	2.4364357	1.702214292	2.400141833
Zm00001d050200	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050201	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050202	10.57652373	9.157612831	10.67515422	17.2475352	17.12185187	17.34154517	11.98883262	12.71047657	13.20642779	4.437870153	7.128767154	2.464004017	14.4918095	14.41825241	13.91521333
Zm00001d050205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050207	0	0	0	0	0	0	0	0	0	0	0	0	0	0.004638467	0.004891926
Zm00001d050208	14.60761981	14.97814489	14.35929723	16.78416647	17.69169071	16.78099883	14.09043837	13.4798202	16.14828184	7.79163076	12.47725359	4.996259882	12.40533086	12.48336948	12.54601369
Zm00001d050211	0	0	0	0	0	0	0.043233659	0.111531774	0.114075934	0	0	0	0	0.010139977	0
Zm00001d050214	4.527431555	4.336747948	4.552946728	2.757183606	1.635086712	3.881149578	2.241821914	2.236730343	1.969138621	2.978931722	2.419349026	1.055602173	4.194304995	3.704936675	3.809455325
Zm00001d050215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050216	0.599080573	0.777135343	1.056621357	4.992912515	4.04141883	4.535582357	3.152211332	3.261410326	3.260596103	0.277059456	0.153806191	0.0755033	1.922856292	1.978064552	3.284755486
Zm00001d050217	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050218	2.61575941	0.385735274	1.747110515	1.30240005	39.3817432	8.80821051	33.3576654	29.54236268	28.83547186	23.97194769	11.8583424	25.87835671	3.118139959	4.931417731	7.447248213
Zm00001d050219	15.06486189	16.34132992	13.83213153	14.2857818	11.27415055	13.55433207	13.62706541	12.13649497	12.30262572	15.67997747	14.84633742	19.57213621	10.95965524	11.29171467	11.36753213
Zm00001d050220	6.616124673	4.607522476	9.547498143	3.402212798	6.252515882	3.457389661	2.943375921	3.705208326	4.408459223	0.763997653	1.83206512	1.157826645	1.55558648	1.432233056	1.691753585
Zm00001d050221	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050222	1.435101903	2.88568369	0.438064635	5.903189574	5.639697194	3.42385574	20.53487328	27.53470972	19.40656422	0	0.952478706	0.111560755	42.14849064	34.14139751	36.61825338
Zm00001d050224	0.379077148	0.292630076	0.562302362	2.623103059	12.57586303	3.902637676	10.10215539	14.51600007	14.68877638	44.78456924	22.85284375	32.38836734	0.396831791	0.315019533	1.20169412
Zm00001d050225	17.52722298	15.71782876	18.97724881	25.72389734	41.53348619	26.901683	32.58866737	41.30397946	34.67194677	37.03292893	56.19311758	37.24739004	26.87837509	25.59299113	29.13132747
Zm00001d050227	6.419806264	5.388881652	5.954937791	3.407126046	4.378012269	4.299166094	4.763389414	4.577957678	4.188746361	6.779826646	6.081487193	3.925999924	4.900928244	4.967228508	6.802160168
Zm00001d050228	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050231	2.126636388	3.252472057	4.389251187	0.047361583	0.200153959	0.186101468	0	0	0.046834508	0	0	0.210338507	0	0.041630241	0.131715101
Zm00001d050233	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050234	1.447938568	1.286474749	1.785552684	8.10513002	9.450619208	7.549485667	5.442986316	6.252702016	4.291240664	0.185762419	0.084925441	0.024867607	2.650241376	3.07612617	3.503751444
Zm00001d050235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050238	44.62629036	44.99955053	45.62771543	17.38236998	14.64229067	16.72669662	16.3347182	13.54562905	15.64701457	21.04069296	25.57218588	17.43668316	13.91624045	12.94653851	11.75427354
Zm00001d050239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050240	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050241	0.169828993	0.035650041	0.211063972	0.176502794	0.270394324	0.069354584	0.231519376	0.042661481	0.017453854	0	0	0	0.427599216	0.34131626	0.286337175
Zm00001d050242	3.133466066	2.858661638	3.060016966	2.786409086	2.79703754	2.842728374	3.631855649	3.011601756	3.167772636	4.719835147	4.548743221	5.533574689	2.114641117	1.971593396	1.953395711
Zm00001d050243	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050244	6.222267623	6.411372577	5.937700505	7.999186846	6.935972722	7.810988422	8.539087873	7.833494074	7.778288412	6.47510604	6.943268955	7.134125895	6.402993961	6.272551753	7.261436389
Zm00001d050245	77.03598453	68.87587885	71.95886254	66.11691551	82.30158496	75.2230431	93.25817573	79.48241162	78.8979671	60.94142465	66.78625479	37.1333961	45.43704551	47.28760177	45.60723944
Zm00001d050247	2.810907909	2.91452966	3.175822384	4.603368817	2.356953165	2.156689912	2.670767133	3.560492643	3.484137254	7.087713962	9.398680067	6.998178369	0.524249368	0.638070981	0.311848836
Zm00001d050248	1.502945097	2.580041064	2.130749237	6.067527883	7.701363659	7.037908943	6.361315364	5.718528332	5.42334453	1.381872715	1.895261986	0.098660407	4.335419635	4.369141236	5.238571264
Zm00001d050250	2.830983923	2.311391356	4.490764868	7.700076723	12.27791456	6.640394738	7.380673887	9.86319233	7.316125274	1.785426201	4.395178795	1.701969024	3.390833606	2.666761317	4.539442384
Zm00001d050251	3.483595811	3.172330809	3.405397568	2.953695791	4.925878832	3.157413543	4.173078396	4.336408539	4.610473138	1.077257435	1.933098167	0.712567482	2.907332093	2.129209384	2.07170589
Zm00001d050253	3.136542446	3.309452853	3.217146543	3.343825622	4.899743252	3.595066659	3.960985577	4.060904877	3.733079049	2.737216186	2.656302612	2.257898075	2.387162376	2.06623625	2.150986894
Zm00001d050254	0	0	0	0	0	0.188457183	0	0.023184805	0.023713675	0	0	0	0	0	0.022230397
Zm00001d050255	0	0	0	0	0	0	0	0.097253075	0.087037582	0	0	0	0	0	0
Zm00001d050256	7.777727899	6.227378683	7.623783777	23.28717504	33.93698529	27.07631723	27.82766934	34.09622266	29.10825358	16.8814726	27.53018789	12.57061387	14.69611981	13.10770194	14.98685808
Zm00001d050257	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050258	3.10636321	4.2588931	4.544244787	10.19983536	8.964291819	9.147602935	7.26902344	7.481379825	6.833958433	0.613620534	1.152724673	0.134417508	8.065685102	6.89928867	6.874125367
Zm00001d050259	0.859430529	0.496345646	1.042051503	0.867932598	5.170490501	1.068328575	3.198886393	2.92685232	3.624396357	3.723565242	2.400152873	3.891746141	0.225185645	0.275747685	0.39744759
Zm00001d050260	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050265	33.97779249	38.62948427	37.42793771	38.40451489	56.41003245	38.11654488	58.3663652	82.44675107	86.34158011	353.5113954	252.9895079	309.7598778	30.1718205	28.79148707	34.81791209
Zm00001d050266	2.530853955	4.366602632	2.470322703	7.782833253	15.62317548	10.60448011	52.5157573	63.34578634	51.59317941	26.10676452	26.10025145	14.03062745	23.08361056	29.65705982	34.49755432
Zm00001d050267	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050268	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050269	1.669303964	2.117841195	1.196311346	2.294630707	1.557347651	2.149621237	2.762137583	1.366353698	1.968552061	0	0	0	1.077170615	0.868224274	0.619835767
Zm00001d050270	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050271	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050272	0.253656931	0.330498459	0.271763432	1.429028954	1.590474839	1.243057791	1.931698134	3.206178153	2.103507667	2.304083895	3.397234991	1.443705377	0.65579196	0.652020663	1.334847852
Zm00001d050273	0.123515665	0.057314688	0.177743364	0.762109353	0.556776349	0.645116359	0.243078831	0.266509497	0.16836371	0	0	0	0.203689678	0.106896481	0.353244492
Zm00001d050274	10.25342544	5.317622999	9.55243544	11.20605057	4.1977991	1.743122349	3.307008101	4.66187676	3.070733147	0.063987168	1.209130774	0.102789859	9.20681953	8.985350623	7.867146279
Zm00001d050275	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050277	0	0	0	0	0	0	0	0.19874804	0	0	0	0	0.119350388	0	0.078468571
Zm00001d050278	0	0	0.235981247	0	0.250192449	2.326268352	0.221872735	0	0	0.26187341	1.197212818	0.841354029	0	0	0
Zm00001d050279	0	0	0	0	0	0	0	0	0	1.091400557	0	0	0	0	0
Zm00001d050281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050283	1.831273229	1.435425334	1.295332757	2.538999292	11.32042842	4.857069312	15.76995838	14.54056468	11.98910021	3.15703462	3.728036267	3.442148081	3.629794845	4.847913474	5.523869483
Zm00001d050284	4.316964774	4.146609033	5.018388574	5.371278009	6.797807751	6.687223071	5.352607705	5.235860174	5.042486432	5.317147669	6.435363179	4.664129569	2.821290992	3.097475284	3.384027296
Zm00001d050285	9.131649529	7.254441174	7.89201006	11.14315326	11.2889138	16.70091007	10.02643317	7.229720801	8.236041559	0	0.231629658	0.014533947	21.28876884	21.40161939	22.8744382
Zm00001d050286	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050287	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050289	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050293	10.93844333	11.15732992	10.04116333	4.815696838	5.980101427	3.003128609	3.374765838	4.234496953	4.756117901	7.618270791	9.019329117	7.471367161	1.936422149	1.657523595	1.731259728
Zm00001d050294	0.393983686	0.744335867	0.391715268	1.850786933	2.16304711	1.464141234	1.99493641	2.56529509	1.992153726	2.300259805	3.759317252	4.233441308	0.191048172	0.705434628	1.062830783
Zm00001d050295	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050296	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050297	1.970266065	2.506879414	1.274298732	2.98377973	2.251732041	2.29069013	2.208286284	2.351450638	1.512479122	0.249549955	0.025352742	0.334067041	4.544569189	5.09113357	5.4623027
Zm00001d050298	0	0	0	0	0	0	0	0	0	0.050112652	0	0	0	0	0
Zm00001d050299	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050300	22.69073246	23.40144845	25.14145602	17.35373374	22.34359628	16.82368317	15.11368105	18.26979819	17.20230101	1.519953677	4.442121388	1.557878083	6.673254637	5.432931726	8.629879587
Zm00001d050301	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050302	13.11371906	9.907013602	13.17980367	4.942735419	9.086776819	4.009100777	8.879630112	9.528214839	8.878627002	38.22794602	20.72451806	51.97151242	0.542501764	1.142617248	3.026644864
Zm00001d050303	0.132506692	0.029024812	0.093079834	0.086220834	0.007591174	0	0	0	0	0.01589118	0.087180099	0.044673665	0	0.037893519	0
Zm00001d050304	0.730315541	0.730710148	0.449577852	1.957832788	2.275339816	1.948351367	1.682821066	1.744728906	1.38048396	0.611865979	0.972593459	0.438529009	1.344255994	1.092404123	1.38882822
Zm00001d050307	18.88895338	17.93218148	17.22942368	33.98684012	29.72552772	33.98141231	3.733763665	3.389543011	3.466862125	8.674362997	12.11381017	4.581396715	17.19955297	14.33287315	16.53063481
Zm00001d050308	0.026227787	0	0.08963892	0	0.077757653	0	0.0996033	0.142311334	0.080865338	0.1718191	0.363814888	0.050844416	0	0.035939776	0.01516145
Zm00001d050309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050310	59.53867696	57.74945598	57.78254727	81.37627797	113.4579776	104.3211467	102.724268	120.1701555	112.0572778	106.4692991	74.2280607	42.82233361	143.0538892	145.0719792	163.8316723
Zm00001d050313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050314	0	0	0	0	0	0	0	0	0	2.902121184	0	0	0	0	0
Zm00001d050315	12.70827053	14.17786784	11.79676966	8.868218133	9.013178636	9.339297481	7.898730968	8.413791411	8.898231567	3.434703289	3.720748011	4.198595989	5.594958859	4.929760094	5.111386831
Zm00001d050316	23.30282528	25.45940635	23.68138572	13.97730635	11.03001224	13.77838685	11.69580842	10.62111412	11.89769609	6.555566015	7.646104923	5.822317343	9.160476633	9.584869241	8.461484457
Zm00001d050317	0.071827849	0	0	0	0.015773955	0	0.013988474	0	0.014763943	0.198124891	0.256635462	0	0	0	0.055361864
Zm00001d050318	0.238451754	0.100110289	0.032927616	0	0.034910574	0.19475735	0.030958986	0.127786017	0.130700953	0	0.133642361	0.117398237	0	0	0.122525675
Zm00001d050319	20.62769576	17.94690463	20.85631642	12.81711464	15.16154703	10.71120518	9.086379202	10.61792778	9.09763024	10.26076781	12.07188058	8.707141154	14.92225951	13.08616702	12.24616339
Zm00001d050320	0.336177883	0.152900687	0.081239446	0.244572109	0.061522733	0.755083826	0.349176764	0.630550675	0.103650141	0	0	0.010344517	0.78373718	0.563031946	0.561408625
Zm00001d050321	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050322	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050323	5.187462021	7.079205477	4.766310558	45.55056978	37.41981902	59.56685169	89.24427844	77.81042669	80.14564284	85.86695531	83.42815456	30.28874503	8.074891403	6.370005938	7.304386103
Zm00001d050324	27.68582533	31.01356205	29.99272053	49.52501935	47.67070232	48.66777554	43.6667378	45.11029802	40.04674534	15.74300792	24.39736858	9.089728455	64.2915476	62.69757521	66.85267104
Zm00001d050325	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050326	0	0	0	0.039651558	0	0	0	0.019167903	0.078420572	0	0.060139062	0	0	0	0
Zm00001d050327	0	0	0	0	0	0.07112158	0	0	0	0	0	0	0	0	0
Zm00001d050328	0.012679095	0.011977025	0	0	0	0	0	0	0	0.048088046	0	0	0	0	0
Zm00001d050329	0.099306784	0.056853301	0.190738089	0.487898324	0.876306901	0.65256359	0.819312571	1.052272706	0.849887049	0.290522118	0.470557607	0.296687025	0.245827456	0.230922753	0.375748999
Zm00001d050330	6.820941956	7.936695571	6.835654282	10.77989487	9.242833111	9.938729331	10.38467288	7.60164944	9.555928876	9.953663248	10.19291263	9.708264562	8.641151649	8.140150998	7.180141335
Zm00001d050333	1.712944203	1.36367727	2.731357408	7.577853283	4.343766775	7.840019297	4.361923564	3.741139569	4.50408463	0.33430648	0.876257892	0.751848281	16.70905433	22.63976501	18.32801612
Zm00001d050334	2.919735888	3.562048173	3.657116405	10.49570759	5.838661976	10.61900588	4.977084878	5.895173524	4.801125476	0.710611262	1.487190998	0.811758661	22.66594179	26.40905328	25.24429114
Zm00001d050335	1.983601199	1.726267268	2.069926874	2.394524705	3.680496027	2.600224828	2.351625744	3.158811967	3.138149796	1.714805575	2.895188764	1.441406013	1.650224275	1.553209493	1.390697509
Zm00001d050336	130.7583727	136.9189262	132.3044126	22.06865726	22.47077779	22.62067577	19.11169001	20.93770459	23.78860012	105.7518226	115.7472677	123.3117541	14.68825208	15.15416489	13.91747818
Zm00001d050337	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050338	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050339	3.238663329	2.98190791	3.76308841	6.466097316	7.405490783	6.997453456	9.514304225	10.6225246	11.97384613	6.859845285	7.849188087	3.844460443	10.60521254	12.07576482	11.76907589
Zm00001d050340	5.666896963	6.700170527	5.424679106	10.47754204	5.84122779	10.89263287	10.39632246	6.474143823	7.287067172	1.812805317	1.524613874	0.693687811	3.080524302	3.092532176	3.949660975
Zm00001d050341	18.49058976	18.04481958	23.42835398	101.66726	56.97908034	101.1374454	13.67629926	9.171174878	9.82513858	0.542586633	1.36430583	0.399491841	122.6818953	107.8193288	122.6182303
Zm00001d050342	1.925525904	1.697644901	3.828878818	1.681002665	2.79087915	1.179516348	2.474974738	0	0.237470746	2.390055907	2.428149941	2.346311235	0.215472532	0	0.222617071
Zm00001d050343	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050344	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050346	41.87352779	41.44104241	40.90935272	25.59312712	22.84776327	45.77042712	33.97583246	32.93423397	40.40139095	247.9595318	184.8135168	505.3521537	47.14647406	45.40052679	33.89799947
Zm00001d050347	23.05608722	21.74865848	20.29923542	2.954652039	3.025104949	3.485973906	3.253472822	2.606286853	3.192862595	0.917901973	1.786354883	0.541112015	3.730686986	3.507426811	4.327361679
Zm00001d050350	2.788107961	3.481703609	2.874432056	3.803195484	2.598754476	4.027166765	3.748440883	3.686545158	2.725410206	0.131088427	0.229731683	0.02632278	6.603371703	5.626594775	5.741740537
Zm00001d050352	0.63544912	0.663147572	0	0	0.095691136	0.06672961	0.106074615	0.043783257	0	0.025039689	0.091579626	0	0	0	0.041980909
Zm00001d050353	11.63498398	12.15721689	10.20518563	6.140100424	8.402650981	6.178805239	7.514233713	6.900588216	7.269107802	6.779443034	7.751656546	5.685861406	3.670965777	3.904264634	3.591827224
Zm00001d050354	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050355	0	0.007588792	0	0.360691121	0.198477923	0.206688277	0.098566645	0.007265049	0.133753907	0	0	0	0.006742419	0	0
Zm00001d050357	25.37122715	28.22740985	23.90377098	16.7817189	17.05475936	18.97679794	16.25614234	15.65112656	14.24071774	9.503612262	11.57896022	11.31670844	13.84063947	13.42827532	13.15350053
Zm00001d050358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050359	24.40780506	24.60013801	25.90851697	28.13054861	26.65532013	29.39867303	30.36055399	29.05266952	28.18162325	11.05626793	15.0171857	11.99259865	19.23332072	17.83125656	18.49528271
Zm00001d050365	3.73152037	4.616680285	2.373492538	8.072061106	12.18328447	11.72574106	14.52140975	15.26996607	15.17709574	3.704180401	6.114460827	1.396159946	4.822368941	4.38022534	4.377777256
Zm00001d050368	11.00617614	14.70148211	14.20399211	9.507826694	16.1061096	7.330688573	11.67795016	15.32569921	15.12223506	2.632969013	10.8900363	1.135473103	2.652513311	1.699543852	2.429384423
Zm00001d050371	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050372	7.284273186	8.144317331	6.912379108	4.544513366	4.954681567	4.859516093	4.768761771	4.835848022	4.922243412	3.817172174	4.426121261	4.333380092	3.801457815	3.532692313	3.868398621
Zm00001d050374	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050375	43.51358454	36.54794651	49.63427272	120.033196	136.0589428	127.2508668	154.1799977	149.7725143	162.994794	120.9226656	167.4839162	144.0301942	88.8190088	85.90578611	92.11526919
Zm00001d050378	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050380	0.328948251	0.39154717	0.300997761	1.226241726	0.700168398	0.87687154	0.760304244	0.527396072	0.686542872	0.348979901	0.141310365	0.088095239	0.987003209	0.895567529	1.124210324
Zm00001d050382	17.03050096	15.37655088	14.82415329	9.796005832	18.95092731	12.25105689	16.48154567	16.64125768	17.33817657	8.779542787	18.53039367	13.86339366	7.667067645	8.106672907	7.73411908
Zm00001d050383	0.981710946	0.686926983	0.939908284	9.232485609	10.0609304	5.648377539	6.355945764	9.154100882	8.313623466	0.130379527	1.448882236	0.241665519	6.94131007	6.799901252	8.483012967
Zm00001d050384	8.492483921	9.983227263	13.63804895	21.01677457	37.01507385	22.17576934	29.34233145	34.17349863	30.43501447	20.55435141	25.4083266	15.58708255	25.45410347	23.71250405	34.03736387
Zm00001d050386	0.402659064	0.362250415	0.810213312	0.239132817	0.227383881	0.281892827	0.156835706	0.323676784	0.141882942	0.132222198	0	0.403566729	0.321848873	0.084077906	0.044336079
Zm00001d050388	0.239496069	0.050274364	0.372058024	0.846285805	0.262976005	1.075856663	0.583023246	0.890398044	0.19691005	0.247728422	0.302012226	0.110542865	0.938013269	0.175029334	0.461483564
Zm00001d050389	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050390	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050391	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050393	42.89349643	33.53785692	48.09512335	110.1092221	82.18821951	153.0261618	157.9148939	116.3461193	123.3493219	24.29709107	22.76445755	15.78112454	52.34537873	47.48118195	63.69023818
Zm00001d050394	0.711580165	0.716990281	0.420068114	0.676682084	0.972771682	0.871783065	0.394953679	1.308455654	0.515575719	0.52749517	0.459879276	0.44339412	1.184468067	0.780059165	0.647863475
Zm00001d050395	14.06974104	14.18695601	13.50357411	17.89202836	23.7202088	15.53853157	22.13289426	25.55522699	22.73298555	24.74914029	25.59827602	26.35174872	16.09942564	15.85614396	18.07654593
Zm00001d050396	0	0	0.024376829	0.024462224	0.103379376	0	0.022919422	0	0	0	0	0.152095563	0	0	0
Zm00001d050400	0	0	0	0.030044352	0.158712391	0.177083335	0.422242386	0.174284365	0.50506994	0	0.258218236	0.106744476	0.013478898	0.198064582	0.055703302
Zm00001d050401	17.68922759	18.82846581	15.59515661	18.18406105	14.59657865	16.31795619	15.77411114	13.67047998	15.69264623	7.754598934	11.46506471	7.551300669	19.88858352	19.55689965	19.34674024
Zm00001d050402	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050403	349.7789092	389.1991535	526.3368735	2482.582425	836.4350898	2137.524516	901.1679785	515.3218088	653.7152287	0.429566146	0.631239956	0.197160261	1506.602175	1560.782427	1255.655379
Zm00001d050404	9.671261643	8.525812113	9.768537251	9.610888601	9.730246693	10.36647053	8.400067715	7.48754161	6.002483071	1.109110911	1.040564716	0.743662282	14.63339541	14.20496218	12.24849375
Zm00001d050406	0.135856944	0.126749869	0.206364167	0.037652197	0.006630054	0.098633093	0.323377266	0.097074104	0.049644234	0.013879194	0.006345184	0	0.050676094	0.027579843	0.034904259
Zm00001d050409	8.232510208	6.749143907	9.277976249	4.897996877	17.93842142	7.687206374	9.526033423	13.57132453	10.12472637	37.18865605	28.83417887	24.40349474	6.432053578	5.836601604	6.817414753
Zm00001d050410	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050411	56.7714338	60.91357622	56.37102818	35.14898348	34.6735959	31.78138284	31.20369632	35.24056004	29.47693542	8.353702112	19.41939188	5.623081367	40.04107895	40.28365901	47.45344033
Zm00001d050412	0.146608407	0.061551277	0.0759189	0.563767905	4.330408716	1.182467774	2.198503029	2.990466875	2.486121353	3.369952723	2.310973804	2.990979737	0.738267816	0.294648353	0.776871907
Zm00001d050413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d050422	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d050427	0	0	0	0	0	0	0	0	0	0.673388767	0	0	0	0	0
Zm00001d050428	1.473652488	2.169142938	1.637280795	5.726199912	4.524519239	4.972534553	11.43549367	11.14088285	10.64177347	0.3428161	0.474656012	0.114074494	13.64551164	15.15038001	14.95188768
Zm00001d050430	19.60272968	15.28963275	25.80803834	63.01524456	156.5399562	57.95171498	98.27149064	128.1672222	118.2218202	38.0274607	91.34078209	39.25799008	30.82909098	26.17339185	27.75005253
Zm00001d050432	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050433	3.275906586	3.268131855	3.305417034	5.096847938	7.222637532	6.119493117	5.571295448	6.316085386	6.760169599	4.025954196	6.40104106	4.060057163	4.028799577	2.684483857	4.312380517
Zm00001d050434	0.828438355	0.70569548	1.004716408	2.610432919	4.150147814	2.113254084	2.623502204	3.102888399	2.359274646	0.447085985	0.893283381	0.168467844	1.621216337	1.675934051	1.813781713
Zm00001d050436	34.2839338	28.13694725	41.95735025	44.38324582	36.82049851	49.04615466	23.5651629	21.71050065	23.84094042	19.20831855	17.19771332	16.44034571	10.92219199	9.661473006	9.480910907
Zm00001d050437	5.586363345	5.227373926	5.075531075	11.95685866	6.42023902	9.803377886	5.557730159	4.573994581	4.657858204	2.255259527	3.328644163	3.016001327	6.687890599	6.287758779	6.804080605
Zm00001d050438	0.348365812	0.438768029	0	0	0.011195684	0	0	0	0	0.175775812	0	0	0	0	0
Zm00001d050440	20.87804144	21.40503503	20.41149069	19.99869551	26.35109644	23.01781317	23.14149312	25.4633656	21.74811454	20.43006389	30.11575341	15.80227341	21.7783866	19.70706739	18.89567007
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Zm00001d050455	1.281151391	0.350324291	0.921810838	3.269175607	77.03089242	12.91810376	88.1078245	108.2868322	80.85102963	519.5788018	254.474006	288.4433416	0.405571911	0.129356605	3.040328832
Zm00001d050456	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050457	73.09925076	78.45711314	66.76667241	78.15667212	79.955713	89.50775278	92.9414816	97.4783247	89.85671497	27.55593218	37.71803775	8.956688451	89.66950877	89.44693311	96.84927412
Zm00001d050459	0	0	0	0	0	0	0	0.020813632	0	0	0	0	0	0	0
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Zm00001d050463	0.082252516	0.032714952	0	0	0.022816791	0	0	0	0	0	0	0	0	0	0
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Zm00001d050465	1.806197538	1.472203124	1.648170548	0.869250875	0.600342762	0.627967858	0.697175983	0.608232037	0.675620997	0.108468891	0.441170905	0.138195028	0.716218556	0.701627705	0.639632149
Zm00001d050466	2.16720972	0.74783799	1.697220171	0.536867456	0.586770565	1.236635163	0.867254992	0.805426526	1.025172299	0.409443767	0.767464113	0.295981222	1.312253453	0.960072004	0.755109371
Zm00001d050468	0	0	0	0	0	0	0	0	0	0.3428161	0	0	0	0	0
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Zm00001d050472	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050474	0	0	0	0	0	0	0	0	0	1.681739357	0	0	0	0	0
Zm00001d050475	0	0	0	0	0.011408395	0.116681731	0.010117059	0.041759078	0	0	0	0	0.784789442	0.57897409	0.710710992
Zm00001d050477	0.050521929	0	0.150693124	0.050407006	0.026628021	0	0.02361395	0.012183589	0.04984604	0.041806841	0.012741955	0	0.022614264	0.066460695	0.035046146
Zm00001d050479	0	0	0	0.014956289	0.079008142	0	0	0.072299983	0	0	0	0	0	0.078878351	0
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Zm00001d050483	5.974098581	6.11179441	6.733310754	9.058079007	8.557028677	9.197340174	7.160404917	6.919847439	6.804404913	1.727688812	3.039645326	1.24741937	5.202417842	4.045418308	5.024606483
Zm00001d050484	0.353332089	0.42980861	0.228944033	0.911451538	1.110197905	1.313439785	0.8645538	0.608105626	0.942276788	0.074969724	0.007616463	0	0.33456073	0.188701688	0.401517205
Zm00001d050487	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050488	10.98306995	11.4244962	10.91983333	6.753016725	6.021485683	5.626955627	5.869406384	5.695451505	6.895723562	5.921281453	5.268812546	6.423596207	4.082478162	4.571842403	4.013610705
Zm00001d050489	17.12631164	16.14761624	16.65279848	8.169645224	11.16188917	9.980720817	9.765246704	9.738376474	9.008808438	18.06876133	9.963513782	10.90899957	4.935965697	5.950534231	6.062781025
Zm00001d050490	11.18355367	12.36660305	9.822291888	3.843838622	3.887047904	3.8568855	1.15759688	1.406880837	2.09058385	1.518106722	1.193742636	0.414580246	0.394165533	1.399741431	0.68720922
Zm00001d050493	3.959656166	2.992320956	3.263447972	10.51773691	18.89258103	12.4937632	14.56242758	18.74597498	18.93370672	4.905336061	6.184626216	1.923827809	5.752503461	6.168383245	6.360875589
Zm00001d050495	16.88087023	16.72318542	21.1865688	18.03201799	13.10642703	14.20801242	9.995329873	9.109317515	9.839914638	1.190175496	1.584616567	0.40250824	7.403617097	6.72169337	8.594300915
Zm00001d050496	12.87958118	11.86280913	10.21709451	10.55667534	12.99886292	10.59410585	11.88328628	11.90743692	13.0677666	1.133812713	2.982099812	0.505936721	5.531101504	5.763331336	6.641491931
Zm00001d050498	1.835789705	1.948354985	2.603622475	3.441009799	3.820474269	3.757309263	3.917999109	3.538416014	3.442669308	0.666474033	1.770286252	0.511391726	5.072327216	4.146253607	3.963937861
Zm00001d050500	2.779817564	4.276044145	4.700746433	3.353200078	2.01154729	3.991876492	0.186373098	0.439583899	0.421510575	0.251398473	0.258597969	0.025240621	0.229478246	0.149868867	0.395145302
Zm00001d050501	3.531014641	4.075647464	3.326044575	7.106881382	7.702985085	7.785510248	8.471954838	8.030545091	8.125883058	8.259099448	5.703848013	2.254465577	2.949255217	2.894750352	3.111750869
Zm00001d050502	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d050509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050510	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050511	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050512	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050514	1.873066695	0.583004486	1.123791008	0.845795829	5.616918982	1.608971748	4.037734378	3.829052666	3.88984562	57.11397202	14.37560361	61.88920736	1.023918684	0.920454459	2.389540092
Zm00001d050515	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050518	3.126247967	2.879534582	3.259574108	1.672339098	5.178729836	2.483101326	3.926171877	5.048772237	4.245202332	6.706557351	5.963658529	7.344536915	0.744517923	0.909576175	1.119652602
Zm00001d050521	0.205508885	0.265002039	0.267569288	1.232689448	1.096047092	1.588589841	0.617495487	0.483794019	0.500864391	0.067483484	0.067873483	0.021681278	0.72276613	0.627582585	0.322452143
Zm00001d050526	8.80172834	7.868038311	9.465035133	5.555860236	7.023406867	5.627114193	5.368395317	5.640514469	5.790115994	2.655570568	3.359288912	2.428472329	3.242885489	2.904332367	3.12191073
Zm00001d050529	1.055536992	1.738515131	1.273983389	4.265706943	1.818770944	4.153088443	1.589181998	0.807698701	1.589661262	0.013997688	0.281571656	0.213617727	0.692807375	0.745450192	0.704045081
Zm00001d050530	1.565536279	1.613289875	1.290165689	1.639238623	1.246519146	1.353879634	0.870643287	0.928698379	1.156379287	0.277107931	0.253372168	0.111287489	0.805679901	0.569006109	0.309728099
Zm00001d050532	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050533	0	0.029946034	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050534	6.879717715	6.887587885	6.960685545	25.74025647	25.97481864	26.71756723	32.72264988	33.28784528	29.45135178	25.45409541	22.71769252	22.08147218	22.20757221	24.41412188	26.33452237
Zm00001d050535	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d050541	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d050548	0	0	0	0	0	0	0	0	0	0.204654255	0	0	0	0	0
Zm00001d050550	1.269471721	1.576542032	1.279815176	4.937906344	8.726192742	5.742559589	5.4252206	6.05855082	7.182102263	0.759092792	5.373464285	0.47203239	2.463662556	2.598375811	3.571702987
Zm00001d050551	7.687288437	7.572824429	7.918701246	8.140643642	10.20868938	7.845072351	8.774648933	9.09668913	10.2839958	2.493823766	6.908769534	1.436286375	6.792243146	6.733996278	7.050523794
Zm00001d050552	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050553	0	0	0	0.029295825	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050557	15.8894941	9.566094284	20.07713463	24.29724386	75.67725887	36.80673482	63.58943032	96.90033971	80.22825615	128.0935077	154.763511	87.95488305	30.46219164	26.61692223	39.27758237
Zm00001d050558	0.140217784	0.044151204	0.021782884	0.262310306	0.323325626	0.214732463	0.286727843	0.211338413	0.216159269	0	0	0	0.431497557	0.057641872	0.364749509
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Zm00001d050563	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050565	1.420112671	1.459385547	1.422473003	2.476019503	3.667937671	3.01224702	2.831715283	2.214957632	2.012794683	1.451874903	1.737350694	0.516552241	1.533808088	1.765896727	1.462139721
Zm00001d050567	2.046475566	1.81080591	2.792873266	3.158037151	5.811196666	2.895989213	4.101545062	4.544726955	4.720279484	0.348337534	1.323002398	0.645662495	2.442260191	2.044634471	3.122228154
Zm00001d050568	0	0	0	0	0	0	0	0	0	0.035508259	0	0	0	0	0
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Zm00001d050572	0	0	0	0	0	0	0	0	0	0	0	0	0.011886985	0.04657929	0
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Zm00001d050574	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050575	6.123000069	6.379108242	7.396824256	8.155092442	7.060464495	9.165185057	6.947445867	6.756021003	6.827151145	5.40759803	5.522927534	4.80418797	6.222094728	5.733238536	6.810289495
Zm00001d050577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050580	0.140523507	0.128719911	0.042337704	0.114181172	0.129051143	0.143467103	0.102004098	0.136064943	0.076148928	0.13213983	0.099342001	0.068398505	0.081007739	0.130706378	0.096001662
Zm00001d050583	6.216208304	6.255111166	6.667042987	7.242183811	5.93174719	7.209173379	4.807960635	4.747932893	4.624339316	4.225568996	4.086796377	4.325213186	6.943759229	6.002029867	5.02563442
Zm00001d050584	11.6426517	12.98339692	10.75523971	9.257352704	7.754427343	9.668711469	8.194986778	8.52505871	7.983699601	6.339819658	4.445908342	4.824809018	8.828304148	7.818986713	8.011079118
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Zm00001d050593	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d050600	0.42722606	0.205324886	0.265478902	0.168258255	0.177768319	0.289253104	0.151077817	0.115228099	0.138654794	0.25584343	0.170130243	0.043589888	0.113229398	0.080110825	0.090987405
Zm00001d050601	0	0	0	0	0	0	0	0	0	0.020834128	0	0	0	0	0
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Zm00001d050604	10.48783088	10.64061715	10.50352918	9.732621132	8.834983508	8.297590325	6.392946768	6.208358512	5.968502319	6.127948877	7.053595313	4.629330934	6.468441726	6.01170897	6.176298942
Zm00001d050605	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050606	33.33344619	30.04624972	32.99550538	31.50736344	46.84672776	34.51316218	32.71520074	39.32426165	37.95431457	9.864278704	16.6492712	8.888697056	12.38425175	12.3367303	14.80425566
Zm00001d050607	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d050616	27.76708742	26.25343746	26.68747649	27.84009991	36.73707694	29.3458172	30.78899523	32.67622413	33.03819991	31.07971141	36.29646475	38.57909205	21.09384064	22.20187153	20.11011253
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Zm00001d050633	9.162103245	9.160869979	8.728499395	11.95695811	17.93969132	13.46213411	15.99676033	15.9339109	16.53648074	37.43376167	27.46864059	31.61890035	7.901218052	6.588471234	6.83279616
Zm00001d050635	0	0	0	0	0	0	0	0	0	18.2336974	0	0	0.059296704	0	0
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Zm00001d050640	0	0	0	0	0	0	0	0	0	0.341508889	0	0	0	0	0
Zm00001d050642	11.6106845	12.95794193	10.88818229	10.78051896	8.405182564	10.62598602	7.616009919	6.907411352	10.09282403	2.267423428	5.030981326	3.472440304	6.443216034	6.880671125	5.355897836
Zm00001d050643	17.86080561	19.63397248	17.72937366	14.89797453	17.33170469	16.71389553	15.50432983	14.27645816	14.81494391	6.240887762	13.20191593	5.05520429	9.998771643	10.57279665	10.80691919
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Zm00001d050645	29.70473267	31.07097553	33.07453693	42.79697061	37.06000277	43.61661575	40.41228437	44.31173001	50.72877925	225.6152833	130.1210076	495.9086391	38.34675855	39.07997883	40.93885095
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Zm00001d050660	4.677001078	4.021535689	4.452593522	8.880296816	10.96237967	8.925524362	8.915780709	9.145947906	8.245338438	4.217540174	5.708814806	3.769487457	4.545950637	4.453340236	4.800668797
Zm00001d050664	1.7394422	1.280037777	2.368246392	2.729977165	3.180430674	2.550082305	2.626313437	2.698303599	3.651685609	6.442198186	7.553993558	10.11068186	2.71196593	2.346053029	2.022330493
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Zm00001d050863	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050864	6.517681288	1.134583276	4.939142371	3.23821056	70.5891812	13.95761011	64.20893766	42.36106472	37.96862698	133.5919793	88.2707795	45.84401137	5.633186922	3.078701531	13.17151006
Zm00001d050865	0.049265708	0	0	0.143364792	0	0.040238155	0.14391745	0.039602153	0.141769322	0	0.134605549	0.036382877	0.027564954	0.009001133	0.094929802
Zm00001d050866	0	0	0	0	0	0	0	0	0	0.200347071	0	0	0	0	0
Zm00001d050867	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050868	37.50235326	34.18418619	36.78667296	60.90371962	89.40290441	53.5921855	109.7771577	125.9110409	137.7585298	22.90372405	28.85927406	16.53811026	29.1615664	28.88750582	29.34889736
Zm00001d050870	0	0	0	0	0	0	0	0	0	0.016789747	0	0	0	0	0
Zm00001d050871	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050872	0.036282468	0.054837483	0.117239091	0.651598849	4.168811762	2.755961232	9.878282932	12.2233023	15.77756143	0.530418753	1.473258067	0.353690229	0.12180374	0.167051285	0.369137861
Zm00001d050873	0	0	0.008288122	0.008317156	0	0	0.007792603	0	0	0	0	0	0.037313536	0.007310676	0
Zm00001d050874	3.485642847	3.207197412	6.044002127	29.51892008	49.02244108	28.47352463	26.19385478	25.53193889	22.48485418	0.316646932	4.737672709	0.624271844	12.33226605	11.50901376	20.13732851
Zm00001d050875	0	0	0.022275516	0	0.005904247	0	0.01047187	0	0	0	0	0	0.020057096	0	0
Zm00001d050876	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050877	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050879	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050880	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050883	0.009159956	0.005768499	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050884	5.000516715	6.384264155	6.123168778	9.915329565	12.78983799	11.77592829	8.816881162	8.134415522	9.078689305	1.624420903	4.674655588	1.310570698	7.725767621	6.934317192	7.27675271
Zm00001d050885	0.380126992	0.142791456	0.298372386	0.257831837	0.289979151	0.163406167	0.280533722	0.50659364	0.493475795	4.276839878	2.396761661	2.62256207	0	0.007310676	0.077101522
Zm00001d050886	3.710763493	3.935764506	3.276768167	6.59679192	5.961728643	5.88213569	4.849504074	5.082688836	4.014386427	1.840595964	2.934881708	2.163481788	2.422270376	3.157951126	3.179978857
Zm00001d050889	1.260791573	1.396649766	1.170466983	16.21660603	4.963818189	9.0631415	0.656743297	0.512847883	0.374676067	0.481847074	0.670439178	0.218752047	99.78054111	94.60055926	90.18093886
Zm00001d050892	0	0	0	0	0	0	0	0	0	0.034851914	0	0	0	0	0
Zm00001d050893	4.338981043	4.846901424	5.199909182	18.19901635	27.96231477	31.0618351	46.10370134	42.95493172	35.31345521	64.25858958	40.65698542	55.47532426	58.14990319	54.59643549	62.43693899
Zm00001d050894	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050896	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050897	4.138570813	4.635232857	4.392140753	14.59786168	7.002470877	13.99016431	11.65899179	7.857722399	8.487559875	2.143849953	2.596869786	3.252581463	5.13668507	4.65336278	4.36234269
Zm00001d050899	277.7008406	227.345438	307.6742889	63.47100913	51.51222615	24.55009779	43.25606534	50.39407887	47.52098673	62.50523682	91.82786316	46.03820092	17.21960051	15.27772811	17.42969687
Zm00001d050901	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050902	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050903	6.045346417	7.063039176	5.238136306	5.423535424	5.247668141	5.349657488	5.311033316	5.814222052	4.548239515	2.389188625	4.909589129	4.164455146	3.057711445	2.731117824	3.695937767
Zm00001d050904	0.019309652	0	0.023998093	0	0.330762899	0	0	0.093132182	0	0.026631194	0.243500912	0.171122853	0.021608121	0.084671676	0
Zm00001d050905	4.82294214	5.478049617	5.839083827	5.843996242	5.10693648	4.687314098	5.256988276	5.650075643	4.518654841	1.564078924	3.740280556	2.319284031	5.355189701	5.560312567	5.345447837
Zm00001d050907	0.595155154	0.487603961	0.675030041	2.046596893	1.819658353	2.130806751	1.458395934	2.076225729	1.111676241	0.015938196	0.233168075	0.268835015	0.944035614	0.525744546	0.641317819
Zm00001d050908	0.059961552	0	0.223561181	0.299125787	0.553056993	0.440766635	0	0.072299983	0	0	0	0	0.134197805	0.065731959	0.415942423
Zm00001d050909	118.701031	112.3674432	205.0002801	26.6578053	31.73869925	33.6976587	6.022259961	5.723748689	10.90574979	2.618734095	6.259712734	2.28367522	1.548067534	1.546266088	2.226612414
Zm00001d050910	22.97755581	21.76821558	20.72654564	19.11908035	23.12191628	17.84460033	19.21929609	20.42107433	18.57258299	9.005560624	12.15098889	5.636782369	21.59175695	22.14499523	20.72982581
Zm00001d050911	0	0.147485822	0	0	0.540029954	0.107596138	0.427591995	0.405932669	0.126362913	0.121123461	0.129206694	0.064858126	0.065518414	0	0.118458977
Zm00001d050913	3.277989042	2.739381545	2.461713459	4.262542472	4.032647383	3.302243665	3.630644761	3.708989151	3.094270811	2.517555732	3.526335937	2.237236849	2.998863444	2.094758027	2.31698836
Zm00001d050914	0.049955788	0.027964222	0	0.581491787	0.438827194	0.489621402	0.382669663	0.555503405	0.376501529	0.015310504	0.06999539	0.073785006	0.391314914	0.419851881	0.333699646
Zm00001d050915	14.97465622	13.66408564	14.5059956	22.52578	26.07166733	25.38183895	24.78103739	25.71329476	27.10962636	53.05048425	39.49720946	56.15902439	27.54835624	25.6872015	26.75091204
Zm00001d050916	19.71069701	15.24905312	19.15692833	24.6998326	24.77991539	21.07781894	19.85019367	20.22207118	17.11606001	4.639003527	10.50312908	2.264871699	13.73811876	11.28922616	16.47028797
Zm00001d050917	2.824899976	3.154312268	2.930403424	7.006215154	17.13910443	7.207848223	14.03816884	16.18076535	19.74013355	7.798320018	13.97202689	10.7369848	5.179783587	5.089317854	6.976577464
Zm00001d050918	5.621815818	7.348906076	8.09834708	66.66032152	43.54751561	50.76917622	58.22604121	51.25055275	35.08648773	4.581560959	5.9614485	1.65125557	101.5137413	77.08208704	100.5958693
Zm00001d050920	14.44749826	11.05375437	6.896720807	7.48895308	16.45000677	9.038715136	11.31207365	14.10959114	12.08158888	1.875755853	4.376708934	1.449766304	2.663426539	2.264560074	3.241266952
Zm00001d050921	9.990756212	7.094309486	5.910799029	11.35127272	23.6088831	9.703680919	14.62362291	16.67930041	14.72124245	1.406185184	4.500082887	1.342952542	3.575922951	3.884731886	4.082629038
Zm00001d050922	0	0	0.007336205	0	0	0	0	0	0	0.236093126	0	0	0	0	0
Zm00001d050923	9.774847549	8.726838429	11.4850055	10.52166618	13.05837169	9.682119134	8.561483247	9.375883355	8.837619488	0.490647578	2.168334888	0.272110782	3.478666516	3.101375562	4.955229806
Zm00001d050924	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050925	4.714218593	5.248685757	4.217720829	5.018577343	5.034545101	5.086324371	7.158090399	7.050384745	6.951029789	8.301322225	8.913886925	11.22051147	5.278276546	5.567618415	4.899229613
Zm00001d050926	0	0	0	0	0.039678098	0.073784723	0.140747462	0.036309243	0.111412487	0.373775263	0.03797327	0.033357649	0.134788985	0	0
Zm00001d050927	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050928	6.592336436	7.35390529	5.408544857	6.107692043	5.346605595	6.462874856	4.532506295	4.024910517	4.794935723	1.020617043	2.294463023	1.296083528	2.322259579	2.299758975	2.564094658
Zm00001d050929	0.024748048	0.033767779	0.012815394	0.2366293	0.217394555	0.386576741	0.154229833	0.11190192	0.101737354	0.031287334	0.015604041	0.011422818	0.138469299	0.113040328	0.066761614
Zm00001d050930	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050931	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.193343267
Zm00001d050933	0	0	0	0	0	0	0	0	0	0	0	0.021980221	0	0	0
Zm00001d050934	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050935	16.6114856	23.30457819	17.94491913	10.88408105	14.38640855	11.60967241	11.90453603	10.81647369	10.92463024	28.90221487	25.2457743	30.80738792	12.76276273	8.376232566	10.39286273
Zm00001d050936	0	0	0	0	0.018513727	0	0	0	0	0	0	0	0	0	0
Zm00001d050937	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050938	0.082574459	0.084502305	0.096209795	0.836739179	1.040437908	0.878871033	0.235190125	0.267583631	0.260957849	0	0.045556456	0.02286806	0.213683028	0.062233203	0.137234306
Zm00001d050942	5.962385673	5.901281515	5.5663049	10.26991689	11.33289313	7.28173121	9.325969372	10.56314676	9.97034629	5.037465971	7.1043398	2.371508883	4.139854807	3.561444229	4.570224506
Zm00001d050943	2.288775011	2.397969726	1.938735417	2.323398412	4.32677831	3.722029363	5.219690659	4.423485779	4.595083835	2.998485832	4.058261024	3.20213447	3.06520808	2.939925363	3.228380902
Zm00001d050944	11.19840091	9.766314862	11.94174867	32.22790509	36.30699725	32.91399222	34.69470402	42.48885073	35.70314378	4.701541213	15.03476562	4.558964853	27.75085768	26.97252348	28.85479645
Zm00001d050945	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050947	8.040260729	6.771987634	7.410528347	9.277241451	11.8158477	9.348971237	10.06534294	11.04443331	10.36329016	1.693475766	3.906242848	1.116335012	4.396294517	4.578665544	4.893384775
Zm00001d050948	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050950	0	0	0	0	0	0	0	0	0	0.211472471	0	0	0	0	0
Zm00001d050951	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050952	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050953	1.019283864	1.023442412	0	0	0	0	0	0	0	0.009830493	0	0	0	0	0
Zm00001d050954	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050955	0.793185986	0.610250842	0.776529422	1.698484356	1.634262007	1.918311932	1.871163167	1.944382806	2.205605416	0.802390447	0.953052174	1.448538094	2.522544122	3.800041195	4.639226449
Zm00001d050959	0.060896365	0.069029277	0.068113963	0.205057722	0.096287873	0	0.177893507	0.205596033	0.060081686	0	0.038396135	0.013491646	1.240238777	1.882539888	3.055555652
Zm00001d050960	0	0.008944919	0	0	0	0	0.033194466	0	0.008758661	0.058768474	0	0	0	0	0.032843246
Zm00001d050961	0.841031406	0.574716921	0.617134203	3.252699294	3.68411656	3.124020065	2.948235615	3.026094988	2.322721885	1.875616881	2.222678876	3.23106377	3.564321799	3.472092861	2.35328681
Zm00001d050962	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050963	0.12710858	0.231246494	0.070209297	0.827849158	0.707155517	0.709415721	1.155205151	0.783349407	1.027649749	0.1558255	0.605532434	0.234675194	0.426715747	0.510916592	0.228596456
Zm00001d050964	8.570027234	9.394761252	11.29892297	19.90600265	27.99168057	16.5824741	18.14720283	22.52594111	19.06933413	4.002363752	10.60694819	3.867717027	12.50776953	8.972248919	10.79932765
Zm00001d050965	4.160810324	4.327567149	4.756661226	13.12664193	24.60429157	13.87176267	17.87216647	21.15177034	19.7390318	8.857597317	15.28369755	4.978531792	13.05973759	10.12369759	10.84449672
Zm00001d050967	11.26821418	12.39275017	10.31142758	13.22299399	16.70881448	15.1179815	14.36217526	16.58228456	19.80398853	4.075521566	12.22351444	5.269953856	9.411696874	9.469149316	9.160613171
Zm00001d050969	45.50449496	46.00073848	55.62635757	121.500544	65.54860207	94.86099382	44.80699721	45.67676336	47.62814035	13.64408077	16.73834125	5.809932001	141.4142307	161.1408224	158.240127
Zm00001d050970	56.4080345	59.56681505	54.65356352	52.4990063	52.42168809	60.69367708	51.57062748	47.70890262	53.40047297	73.76488785	62.16063849	75.81483994	32.0280581	31.05624987	30.29875423
Zm00001d050971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050972	0.023970603	0.006709125	0.003310082	0.066433547	0.045622469	0.00978909	0.06535585	0.009634364	0.016423556	0.033059413	0.030227699	0.002950394	0.029804305	0.005839426	0.02155478
Zm00001d050973	0	0	0	0	0	0	0	0	0	0	0.077020988	0.067659147	0	0	0
Zm00001d050974	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050977	0	0	0	0	0	0	0.078002134	0.169029453	0	0	0.050507416	0	0	0	0
Zm00001d050978	21.20664787	19.61636926	18.15953967	16.54746217	22.14479799	17.54475021	26.11447547	27.75750912	26.18129566	101.2234024	72.02338184	132.1318595	19.59617674	15.95655422	16.62134537
Zm00001d050981	0.006217023	0.015660727	0.077265347	0.069782414	0.335865443	0.083783744	0.123498057	0.194904185	0.368031061	0.085742999	0.195996641	0.068869361	0.180883262	0.22490553	0.733148172
Zm00001d050982	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050983	0	0	0	0	0.095691136	0	0	0	0	0.100158754	0	0	0	0	0
Zm00001d050984	0	0	0	0	0	0	0.147915157	0	0	0	0	0	0	0	0
Zm00001d050985	11.97294399	12.87560641	10.88738323	8.448600399	13.26486177	13.21204833	14.69596801	15.38088592	13.95726527	48.49049742	41.82660037	48.68356603	12.93883555	13.22341935	14.48593404
Zm00001d050988	0.585094562	1.096406213	1.099603638	0.569525508	0.244446902	0.646887149	0.300153513	0.20648513	0.246394491	0	0	0	1.94824955	1.298446342	2.029347479
Zm00001d050989	0.036924332	0	0	0	0	0	0	0	0	0.140043039	0	0	0	0	0
Zm00001d050990	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050991	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050992	6.191657075	6.76614427	6.84761703	6.407771655	7.051267692	7.467497199	9.069844454	7.856039712	7.805908681	12.37678377	7.330199348	4.99726146	4.346791968	3.820334846	5.454398623
Zm00001d050993	6.628191342	8.965739402	8.471889499	14.36917766	21.85267123	14.98180992	16.834173	19.00821413	17.03484116	13.31545016	18.48826857	9.859508727	11.36312971	8.826759476	10.67164829
Zm00001d050994	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050995	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d050999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051000	0	0	0	0	0	0	0	0	0	0.043950782	0	0	0	0	0
Zm00001d051001	0.698874106	0.316488817	0.956394989	6.786770667	70.19299331	17.68231181	59.96298648	67.78391302	66.15367575	2.77245875	4.89172493	1.261306154	1.080828041	0.834995985	2.796203399
Zm00001d051004	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051005	0.020713991	0.052178696	0.025743409	0.245419112	0.3138778	0.076132419	0.411473073	0.83670799	0.434283623	2.871084835	3.617759461	1.502964242	1.066262558	1.282968331	1.448866106
Zm00001d051007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051008	0.519666786	0.528652579	0	0	0	0	0	0	0	0.156205192	0	0	0	0	0
Zm00001d051009	5.622654615	5.54903658	5.780560894	4.70451685	5.186070629	4.527666536	4.691586599	4.363797495	4.251730533	2.490199203	3.362089829	2.023538479	3.237538235	3.078981936	2.847426658
Zm00001d051012	1.142980469	1.383500281	1.014642494	2.017881127	2.043917466	1.918603084	1.378935437	1.306580808	1.464531856	0.163777507	0.627074336	0.049330204	1.885326163	1.838781973	1.698996086
Zm00001d051014	2.417028686	2.151092831	2.17975471	3.453241693	10.58149114	4.695460523	8.580426181	10.65562338	10.25778655	8.552077341	8.918583676	9.54656149	1.771857375	1.685320064	1.683533339
Zm00001d051015	12.00885157	10.48450878	13.27490875	9.453406353	27.46214032	12.12868189	25.02047965	29.87235868	26.92771731	18.05072975	21.3229904	14.00373466	10.92555231	7.847035958	11.2591311
Zm00001d051016	3.692510844	3.48402518	3.064668601	2.103385444	3.33340519	2.379315967	1.881149024	2.133727923	1.481196039	2.202673538	1.997890849	7.041425538	3.131198499	2.941351595	2.954357396
Zm00001d051017	10.03034188	11.30259958	9.217218248	8.960788176	8.391306844	8.46223086	7.22999086	5.856832895	6.016388624	1.671861767	2.754769002	1.678563456	5.675724274	5.218648047	4.992845807
Zm00001d051018	31.4478238	44.14348115	30.91010335	79.60059877	59.22339744	96.47435002	147.4218189	120.6132354	127.3461686	5.826874232	2.730901775	0.64757278	97.39630649	88.24640088	89.38194405
Zm00001d051020	19.61938284	21.33076387	21.65191766	14.46760938	13.46166853	11.92113655	8.826899859	10.56071443	9.185933703	7.270933429	10.15206863	7.525372123	14.47096205	17.77810748	18.38311218
Zm00001d051021	19.97705826	25.25882892	12.55830634	8.487482174	9.761762095	9.055296391	7.851526666	5.650605889	8.3930272	9.95613991	9.233701886	11.73760441	14.3056382	11.93662557	12.68847169
Zm00001d051022	4.671004923	4.567810021	4.483643686	0.449935039	0.075057735	0.953770024	0.621243659	0.366319916	0.210755287	0.183311387	0.550717896	0.378609313	0.361215758	0.52037801	0.526860402
Zm00001d051023	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051025	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051026	0.037049414	0	0	0	0	0	0	0	0	0.204389003	0	0	0	0	0
Zm00001d051029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051030	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051033	26.12875744	27.13699843	19.44029599	15.91187729	16.93916604	18.29557189	17.91496274	17.59662466	18.74045596	26.52807397	30.56157812	34.72019494	14.15767778	12.92193214	12.29216208
Zm00001d051036	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051038	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051039	3.198952687	3.266488441	3.038187786	4.222426276	3.490413203	4.317870012	3.289890761	3.239690345	3.273143567	0.984671082	1.733848717	0.553346698	1.899967518	1.902745534	1.837545969
Zm00001d051040	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051041	0.028751281	0.181061721	0	0	0	0	0	0.0346675	0.017729151	0	0.054384431	0.015924682	0	0	0
Zm00001d051042	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051043	0.056000958	0.132250151	0.208794467	0.846833835	0.415065814	0.634631735	0.408982001	0.658362983	0.353956653	0	0.070619005	0.03101766	0.517001681	0.74435638	1.141126217
Zm00001d051044	159.9010103	162.2595833	160.4964843	81.79303474	71.68345779	79.89187806	66.10236734	63.22665543	79.00525642	111.4190246	135.5668702	110.1987637	35.75302665	35.11308189	34.68886189
Zm00001d051045	0	0	2.682734172	1.570410384	1.553826789	2.056910964	1.494721586	1.277299707	1.20783732	0.771837418	1.083792656	0.88563582	3.578608127	3.812453634	3.39686312
Zm00001d051047	2.285772444	2.733169796	2.517133297	5.611219931	3.393086166	7.993501157	13.84485869	14.32136434	9.295534794	0.83799491	1.24054052	0.304490029	17.5811905	10.73663735	13.09624429
Zm00001d051048	0	0	0	0.004342886	0	0	0.008137971	0	0.004294555	0	0	0	0.003896727	0.03053874	0.096622387
Zm00001d051049	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051050	0	0	0	0	0	0	0	0	0	0.015217825	0	0	0	0	0
Zm00001d051052	54.3585667	54.31739981	55.10694162	37.30007325	42.02436775	32.45422023	39.00487377	43.48470039	39.85902386	8.989829353	23.8019881	8.968119798	12.04202821	11.19047376	11.39318151
Zm00001d051053	93.12634953	100.2540014	122.9602075	61.50734921	42.55538185	61.10223465	85.71863728	73.02147178	62.48735166	73.88662442	86.27941519	101.7715904	84.86164179	78.92049279	98.52473098
Zm00001d051054	0	0	0	0	0.353212869	0	0	0	0	0	0	0	0.074992891	0	0.077479471
Zm00001d051055	8.11792953	7.068272008	8.031382866	6.759867718	11.90917709	7.682327559	8.966572397	11.37670837	9.730697844	10.95331658	13.63601894	9.419944626	6.590416331	5.969038854	6.949758978
Zm00001d051056	124.7599258	124.0698375	176.7684853	23.44810598	40.70364984	27.62796883	40.63232222	48.08214605	48.18754549	126.5647864	192.8930767	195.5000816	94.36571593	106.7402596	111.563964
Zm00001d051057	1.905485434	1.771153914	1.334019366	3.683998971	4.045716973	2.946134624	3.383592975	3.501554645	3.858502158	2.168943005	3.032453356	1.686804729	1.815713451	1.75135864	2.164520825
Zm00001d051060	0.536466141	0.555802187	0.473157335	1.402862079	2.303037328	2.332157639	1.941246009	2.295295677	3.297386522	0.059667359	1.898567365	0.105435505	1.142549918	1.062361589	1.120411995
Zm00001d051061	27.92148481	28.32014077	26.64533662	25.01360217	30.136122	28.51293435	30.74686264	31.45610668	29.29746443	30.85546554	36.30512659	31.6428301	23.0018195	21.77506479	23.52276737
Zm00001d051062	11.29599301	11.78380421	12.97959451	24.27500978	15.37389463	17.9264584	11.55739198	12.83334295	13.29379505	4.151075584	5.899051806	4.438867806	17.56086844	17.06398174	20.69010147
Zm00001d051063	5.893606142	4.624175612	5.303324129	12.39099508	11.77584248	10.02185998	20.94227741	23.76548996	20.11732449	0.621833679	2.457036059	0.321082103	6.288803134	7.414007554	9.606359279
Zm00001d051064	1.102518865	2.129227437	0.593759266	1.443764386	0.920062555	0.630343683	1.009163087	1.79467217	0.815826919	0.582879524	1.135421189	0.6717262	0.678564706	0.402873298	1.529594716
Zm00001d051065	3.210234771	3.299551264	3.251352087	7.221773528	9.459632408	6.625114832	9.237804926	8.583105783	6.761824091	3.524185402	5.587160301	2.62449597	6.828279402	6.332155794	6.260260121
Zm00001d051066	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051067	8.035552659	8.328087811	6.486147786	7.833184916	7.687146917	7.633372376	7.418355241	7.340187449	7.154689229	3.299431852	3.535976632	2.650126149	4.601363291	4.337005773	5.168959107
Zm00001d051068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051069	0.833108408	0.652269509	0.494375206	1.198145345	0.993902037	0.94710986	1.990825137	1.832605125	1.883665155	1.816652431	2.612244098	2.47764096	2.805224054	3.200603308	3.158559206
Zm00001d051070	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051072	0.02156346	0	0	0	0	0	0.025196904	0	0	0.059479134	0	0	0	0	0
Zm00001d051075	4.557077974	4.571654578	4.71733274	4.778022353	4.65146525	5.474582772	4.443058099	4.149787296	5.093338078	3.342415348	3.52500388	3.376040303	3.858692003	3.821328566	3.74610796
Zm00001d051079	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051080	0	0	0	0	0	0	0	0	0	0	0.037961325	0.028583276	0.004812378	0	0.034803613
Zm00001d051081	9.517844781	7.715436092	7.805058687	5.375905725	9.353211174	7.385417955	9.123955625	8.800825095	7.878889699	1.382542138	2.155837208	1.170492525	2.774112766	2.886891374	2.800316288
Zm00001d051082	14.94149956	12.85923057	17.83919556	19.46610569	20.23159009	16.92421017	16.12326749	16.82901775	14.3342969	11.03700614	16.29878022	12.45321224	11.37174429	10.28716613	12.68503617
Zm00001d051083	0	0	0	1.677212924	0.056855938	0.202645996	0.285715127	0.537628914	0.52328509	0	0	0	0	0	0
Zm00001d051085	0.116576413	0.013348039	0.12512494	4.698709608	4.419678704	2.16180659	10.26599987	17.14888351	18.84054244	0.146161903	0.394244965	0.082178766	0.278694511	0.476327407	0.275682769
Zm00001d051086	0	0	0	0	0	0	0.293116274	0.050410998	0	0	0	0	0	0	0
Zm00001d051088	47.59932228	65.73616075	45.13973564	170.6620453	53.78745503	53.24893889	46.22186365	46.93832781	49.03969426	0.945699585	2.585078963	0.822891714	25.03399049	29.12811835	20.81841809
Zm00001d051089	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051090	0	0	0	0	0	0	0	0	0	2.110279154	0	0	0	0	0
Zm00001d051091	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051093	3.847536381	6.23394322	3.488262919	57.30572083	16.11504819	16.04524164	13.86723703	16.84213545	14.0668083	1.162598864	2.411086813	1.059010548	10.27105527	10.65550608	8.803995217
Zm00001d051094	6.124774275	8.836941735	6.379850499	75.56129251	10.74350847	15.97710918	8.3510952	10.24830929	10.216715	0.021197173	0.368248934	0.034051428	4.893128052	7.244925554	4.282406643
Zm00001d051096	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051099	0.105765993	0.29109433	0.068157334	0.561825082	0.020646254	0.143975348	0.018309269	0.033063259	0.072466001	0	0	0.004339362	0.061369541	0.146004054	0.04528886
Zm00001d051102	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051103	6.567102265	6.247639644	7.537779041	11.73583122	10.3889436	9.546763627	9.627932033	8.365097651	7.682751668	0.341606872	1.923832892	0.257383916	5.393860973	5.202278291	5.577776553
Zm00001d051104	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051111	0.01820707	0.040130777	0.045255601	0.292353504	0.167933403	0.167296143	0.063824885	0.134465693	0.084203877	0.094164569	0.040179475	0.030253449	0.203742963	0.16715855	0.17629256
Zm00001d051112	3.464084417	2.775462558	4.118945396	6.331977985	8.571390053	7.570046181	7.03469609	8.258140469	7.924724928	1.483105112	2.145257166	1.044776183	3.442420284	3.981042759	3.933619251
Zm00001d051113	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051114	4.461084374	4.121737292	5.81755683	9.227073937	10.73518209	8.679270693	0.997280131	1.420524378	1.078395496	1.220404308	2.244945981	0.870032891	2.466751989	2.215602553	2.463793762
Zm00001d051115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051116	2.929550126	3.088481869	4.234177796	9.445252842	16.41262466	9.916549661	12.19666123	12.27171719	11.02618139	3.142480914	3.940540475	1.778862803	6.823638854	4.9956289	7.953083216
Zm00001d051117	0	0	0	0	0	0	0	0	0	0	0	0	0	0.074784864	0.015774264
Zm00001d051118	0	0	0	0	0	0	0	0.148843307	0.019029823	0	0	0	0	0	0
Zm00001d051119	0.394136262	0.477893092	0.515422034	0.143062957	0.565839721	0.136933524	0.154661717	0.251805536	0.155980677	0.283959119	0.45992754	0.244369178	0.339016916	0.257949857	0.469277553
Zm00001d051120	72.35900836	69.65150811	83.80523191	118.5831635	129.2615907	130.4470696	100.9580912	88.88208235	91.51716085	21.74257065	49.38988231	14.87150094	54.99208422	46.85089806	63.65043239
Zm00001d051121	18.06966212	16.45414153	27.51547001	17.05016989	29.28062602	23.6257266	19.56102483	25.01353761	23.84343132	13.78466418	29.65753415	23.8346607	3.158884221	2.32089842	2.675413567
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Zm00001d051126	0.005584654	0	0.01388125	0.020894816	0	0.09578752	0.019577006	0.006733822	0.013774855	0	0.007042428	0.024745707	0.018748223	0.006122094	0.077479471
Zm00001d051127	0	0	0	0	0	0	0	0	0	0.618973513	0	0.038243365	0	0	0
Zm00001d051128	0.551493513	0.438699865	0.541103495	1.122198018	3.289154234	1.351310024	2.475930143	4.864821816	3.615504719	12.73005007	3.367447009	6.0770412	1.039391915	1.209133109	1.81213132
Zm00001d051129	14.52542305	11.88739583	16.92789574	22.83851626	49.25672504	24.3066045	33.26247213	39.4783278	36.72551971	27.46116286	28.28208009	20.22512537	16.51810173	14.36877564	15.95175678
Zm00001d051130	1.169531339	1.997669533	0.982271939	0.379632689	0.168879903	0.536495639	0.773781165	0.605286424	1.027432026	2.622007513	2.067436885	4.283017852	0.035855976	0.017562758	0.012348291
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Zm00001d051135	3.581775838	3.868761052	3.930672705	5.189577295	5.751759031	5.812198838	6.475940031	5.944399811	5.805881266	7.010278585	5.51841081	7.503568365	5.496387275	4.984977239	6.171512442
Zm00001d051136	10.84374	8.012787886	8.373829583	7.146440843	5.529005408	6.025265356	6.801168206	5.948164974	7.530617971	4.812248001	7.605264793	5.381333688	4.628274125	3.6271893	3.460238286
Zm00001d051138	15.75989466	14.71416345	19.18900137	20.83909653	28.1400665	29.24976365	25.81897989	29.79964318	29.99873507	22.08006327	27.43507689	16.76065789	26.44815069	27.08156719	26.27369638
Zm00001d051139	0.654213788	0.870189435	0.691479932	3.202625828	2.537730208	2.868925585	10.2521874	10.93307674	8.626262927	12.54743721	10.38555348	13.00411236	6.992449839	6.963942433	6.503285824
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Zm00001d051304	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051305	1.295906887	0.632293508	0.870571294	1.834604104	1.169131581	1.644876341	1.582477443	1.68926349	1.036678442	0.161015248	1.177787503	0.517314176	2.16870987	1.932553281	1.768199301
Zm00001d051306	18.6512893	17.32678647	17.15335948	23.52483845	30.36811065	25.39205446	34.67392786	35.30028716	38.27284969	7.618345995	14.51577548	5.935032175	12.13741295	12.06126977	11.64914547
Zm00001d051307	1.877071949	1.791289258	2.022317263	8.868645067	19.27161856	13.59395354	20.24178028	22.55596859	21.94067228	99.41666892	64.29807038	124.5897863	4.753017095	4.269928357	6.81412704
Zm00001d051308	4.161476992	5.272295571	4.017080494	8.746913084	8.647297565	7.841058494	8.478345496	7.469376486	6.058859946	8.044412785	8.83649407	10.57524263	7.652706579	6.932023413	8.08727172
Zm00001d051309	60.89913292	60.26639399	54.55091097	5.047001507	5.112580067	5.199287137	2.302360092	1.955466071	2.48607124	39.73740278	51.49023856	44.14030526	19.65744917	19.30683187	19.55574974
Zm00001d051310	0	0	0	0	0	0	0	0	0	0.229471223	0	0	0	0	0
Zm00001d051311	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051312	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051313	0	0	0	0	0.027231831	0.139259602	0.084522947	0	0.050976336	0	0	0	0	0.045311827	0
Zm00001d051314	0	0.012049664	0.023779776	0.059657697	0.4286012	0.058604381	0.290654836	0.31146165	0.306767668	0.923612305	1.230557164	0.932613563	0.192703916	0.157315116	0.0221215
Zm00001d051315	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051316	0.077289982	0.200420333	0.209063532	0.068041915	0.185709859	0.005570047	0.850007952	0.948387279	0.964413952	50.95271016	34.89252273	71.80860104	0.025438227	0.034887997	0.13666482
Zm00001d051318	0.183842999	0.315751278	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051320	1.691749217	1.588931954	1.590823385	3.294830127	2.496901321	3.58586632	2.923580198	2.679509966	2.555102713	3.334184383	3.354784459	4.028753924	5.45786099	5.745937642	5.153671155
Zm00001d051321	48.53643771	49.18560261	44.01467143	40.77376973	31.08389342	46.65534753	48.92211775	41.84535311	49.6530452	18.24549724	22.75511022	19.03520281	35.26502182	38.16299251	33.59005638
Zm00001d051322	0	0	0	0	0	0	0	0	0	3.950547435	0.738851339	3.461570861	0	0.285464509	0
Zm00001d051323	15.5237774	16.42091848	15.02197667	9.08092316	11.56820703	10.8349649	11.168582	12.94277614	12.18506611	47.67782905	47.47395545	67.07303397	10.03479107	9.83036166	9.728086218
Zm00001d051324	0	0	0	0	0	0	0	0	0	0	0	0.007545776	0	0	0
Zm00001d051325	0.348628916	0.407735166	0.278535242	0.310567757	1.181236481	0.457626561	1.396707056	0.840734234	1.044179202	0.103032161	0.502436855	0.13792689	0.445859373	0.600567409	0.518223347
Zm00001d051328	0.211076058	0.224950911	0	0.020249608	0	0	0	0	0	0	0	0	0	0	0.003128625
Zm00001d051329	0.278517571	0.25056708	0.187905905	0.80387879	0.692034062	1.472129774	1.376179202	1.295339634	0.844002548	0.307297319	0.311080211	0.008815118	3.642087803	3.245123313	2.971639871
Zm00001d051332	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051333	0	0	0	0	0	0	0	0	0	0	0	0	0.017544208	0	0
Zm00001d051334	0	0.120244202	0.130514768	0.285757037	0.125795086	0.152052177	0.546625007	0.299297697	0.035322115	0	0	0	0.694417412	1.276815766	3.156747382
Zm00001d051335	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051336	7.541724548	6.209813289	8.886374628	14.88722699	25.97938903	16.08135231	23.51352405	29.29430761	25.62979849	24.86193309	24.30702183	18.3774408	10.94020973	10.76622307	12.37997821
Zm00001d051337	19.36001149	20.35814235	19.94002334	14.72064086	20.5723027	16.02574769	14.32958796	15.39593319	16.11822829	6.63992645	12.40726134	5.735742414	12.79538172	11.93722952	13.12118701
Zm00001d051338	0.336477667	0.331665548	0.28181388	0.07298093	0.212041113	0.143384759	0.393174157	0.132298525	0.207485141	0.141235097	0.249051013	0.113440993	0.360158474	0.144335987	0.24524802
Zm00001d051339	7.418325291	9.597458528	8.537105165	13.27677163	10.91167199	14.82710058	7.463653328	7.553096303	6.12226835	2.766413526	5.327400776	5.32535722	4.551945539	4.016977009	2.953873075
Zm00001d051340	0	0.083668463	0	0.18226615	0.140049418	0.065108385	0.186295475	0.68885232	0.147467257	0.018323504	0.067015994	0	0.148673953	0.058258063	0.092162169
Zm00001d051341	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051342	0	0	0	0	0	0	0	0	0	3.73364069	0	0	0	0	0
Zm00001d051343	0.119853015	0.231464818	0.238325888	0	0.136867406	0.058734537	0.149384799	0	0	0.011019804	0.040303599	0	0.581183947	0.56934403	0.323321696
Zm00001d051344	0.232503978	0.214749055	0.250429078	0	0.204238734	0.075959783	0	0	0	0	0	0	0.034690589	0.050975805	0.017920422
Zm00001d051345	4.996593108	4.886786513	5.296346982	5.358175216	7.149015433	4.977591645	6.546218371	6.7816517	6.613456182	8.74007036	8.850645752	10.2593165	6.060823699	5.342579592	5.040062824
Zm00001d051346	0	0	1.323946734	0	0.701838558	0.65256359	0	0	0	0	0	0.393360325	2.582872035	0.194634892	0
Zm00001d051347	0.108834073	0.052721891	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051349	0.731423287	0.643006409	0.652782594	2.301925988	2.729568176	2.405620414	2.432075715	2.077566634	2.536630964	1.21185799	1.764223126	2.164258621	1.64795868	1.565954768	1.606120221
Zm00001d051350	0	0	0	0	0	0	0	0	0	0	0.02336025	0	0	0.020307435	0
Zm00001d051352	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051353	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051355	0	0	0	0	0.026221043	0	0.023253038	0	0	0.027445248	0.225849754	0.110221052	0	0	0.092028018
Zm00001d051356	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051357	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051359	0.078796737	0	0	0.802553626	0.519131306	0.209163033	0.138110982	0.079175774	0.210552833	0.144898255	0.513386938	0.50917679	0.264528238	0.187156126	0.394765719
Zm00001d051360	6.368135557	8.530978915	8.262929973	8.227095652	6.611468547	11.37820982	6.105883727	4.910245684	4.650709382	82.32535866	10.23125702	135.5973718	4.905765952	5.238577418	5.272607521
Zm00001d051361	0	0	0	0	0	0	0.045318686	0	0	0.50814585	0.110041689	0.247035864	0	0.010628998	0
Zm00001d051362	12.62567058	13.74038997	14.6982605	10.98542692	8.474050741	8.555833731	24.0198847	26.05866676	11.17945796	49.09616286	3.246468005	1.507881246	268.0778338	280.1553012	311.725738
Zm00001d051363	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051364	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051365	0	0	0	0	0	0	0.089999081	0	0	0.053112353	0.024281499	0.021330102	0	0	0
Zm00001d051366	1.466386477	1.657491584	2.11214898	2.260226041	4.082348079	1.907079402	2.759130254	2.965015163	2.068137694	0.622273448	1.86812614	0.924656408	0.950899957	1.211810971	1.260639576
Zm00001d051367	1.8108675	2.291068166	1.794358596	0.793504326	1.128553052	0.08994164	0.400324076	0.570462399	0.422516567	2.396235447	3.528206176	1.563231769	8.142187573	7.332486332	6.243107154
Zm00001d051368	0	0	0	0	0	0	0	0	0	0	0	0.067760056	0	0	0
Zm00001d051370	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051371	0	0	0	0	0.017660643	0	0.015661605	0	0.016529826	0.018485182	0	0	0	0.146930262	0
Zm00001d051373	36.63189602	31.25905271	34.15556259	22.42753116	25.72748199	19.66949364	19.74326002	20.11941693	15.77962665	60.43232527	24.53365344	19.49352565	22.59478116	23.59473957	22.37130324
Zm00001d051374	21.5455966	24.14032028	24.81967464	12.74583778	14.74663729	18.88382545	13.97798233	17.65608125	13.9263788	31.88693869	16.60604603	11.43251651	22.38537794	14.83995644	16.58060678
Zm00001d051375	2.718462165	2.810922253	1.967166312	1.241304863	1.831427985	1.88548601	1.982765202	1.707652335	1.833124886	0.2721199	1.326994066	0.437137116	1.373827431	1.288160884	1.272372941
Zm00001d051376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051379	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051380	3.512284487	2.6038442	4.061179698	7.929022093	9.168027693	8.742229944	7.870529423	11.49887151	9.59536268	14.50139973	10.06359575	14.92274755	1.865676798	2.973008418	2.184543131
Zm00001d051381	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051384	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051387	7.706539479	6.4196723	6.070942085	3.711438015	3.624791025	2.291489164	2.906564127	3.696782792	4.082330908	6.178587298	9.410194066	5.603489031	8.285815377	6.306188808	6.717655905
Zm00001d051388	0.104560106	0.065846921	0.016243451	0.081501768	0.1722166	0.272213429	0.122178485	0.220632454	0.209546366	1.333902032	1.104274309	1.071399203	0.526527525	1.260847065	1.223968239
Zm00001d051389	0	0	0	0	0.074746292	0	0.106057009	0	0.027984105	0.29729695	0.007153471	0.06283972	0.076175351	0.15546563	0.065584282
Zm00001d051392	9.309399944	8.538850978	9.292971608	12.88476831	19.80374725	14.886421	18.13005652	20.78206015	20.41079466	14.64390377	16.50123775	8.007052013	21.64389171	19.1810291	23.18281825
Zm00001d051393	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051395	0	0	0	0	0	0	0	0	0	0	0	0.025367458	0	0	0
Zm00001d051396	1.564395444	1.94143321	1.598522956	2.909063893	2.673327568	3.242271798	2.257411157	2.003237249	1.923038725	0.675777117	1.155331601	0.503210436	2.216105022	1.902386215	2.086001331
Zm00001d051397	0.081863676	0.057998027	0.069946537	0.140383135	0.094383978	0.087757429	0.257080086	0.111047579	0.069410424	0.141129382	0.161301128	0.068013649	0.005725505	0.095350701	0.177460465
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Zm00001d051400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051404	1.917334165	1.855036206	1.907394198	2.024397395	2.453521034	2.896283121	3.292129128	3.231816277	3.065531454	2.223424704	2.880747349	3.27042014	2.444996303	3.003680463	2.46214769
Zm00001d051405	16.99545509	18.67117198	20.8800756	36.11722734	44.37367238	37.75434166	49.27178625	49.63374066	42.40036276	24.30690057	36.6323519	18.61115658	37.80233102	27.18322494	37.32456826
Zm00001d051406	0.49505861	0.227827594	0.414117508	1.466362104	1.103913201	1.300507126	0.678596834	0.872433226	0.757310086	0.045955501	0.540246453	0.079096653	0.697809894	0.678375791	0.902560299
Zm00001d051407	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051410	2.150170593	2.223106418	0.877451396	4.04241117	0.54971862	1.72995731	0.862491197	0.541740721	0.554098408	0.442602946	0	0.497702383	10.34268152	6.75465316	5.268604023
Zm00001d051411	0.245381122	0.044151204	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051413	0.186003183	0.039045283	0.346747954	0.038662517	0.040847747	0.037979891	0.25356884	0.149518333	0	0	0	0.034340981	0	0	0
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Zm00001d051416	6.642970807	6.425737968	8.586139819	17.92836134	13.44474408	17.02584277	12.79228926	12.06292552	12.84603657	3.206613178	4.25551565	1.33929825	14.39163863	13.06437062	13.31743349
Zm00001d051418	0	0.011087553	0	0.131746322	0.011599392	0.064710105	0.010286437	0.0424582	0.032570038	0.036422831	0.066606045	0.009751689	0.157615451	0.028950844	0.264617588
Zm00001d051419	0.313026123	0.527204877	0.27141613	0.544733862	0.853691807	0.37458123	0.837870841	1.145481207	1.104276905	1.019047325	0.812421733	0.161281922	0.936812152	1.125213538	1.144616848
Zm00001d051420	0.558796031	1.431880498	0.347236676	0.949234264	2.272361017	1.440024045	5.111047198	7.295419894	3.065531454	9.806134946	4.750378471	2.209221361	13.67058568	16.95134119	51.17117734
Zm00001d051421	2.01217457	2.210980383	2.01016138	4.966962636	4.955924793	5.028671362	5.114947793	4.542882903	4.599016789	3.443450917	4.208793231	3.046649588	4.822993499	4.422186991	4.485733989
Zm00001d051422	73.9548654	68.1652547	67.47715189	55.80547668	84.92246556	62.47692146	64.86290939	72.16502347	52.18702355	20.71044564	47.88851272	19.56749084	41.13610043	31.68656045	43.40326171
Zm00001d051424	0.333851866	1.282487366	0.425284884	0.416365565	0.615858336	0.521493125	0.302332079	0.352230689	0.298505657	0.989939043	0.168399166	0.120193433	3.483735687	2.662505512	2.894837375
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Zm00001d051427	4.91048402	5.856792419	3.606178724	8.316307353	21.60437327	15.05143099	18.85465449	23.48185421	20.45043143	4.386646827	17.87316573	5.820796239	13.99765266	14.27322543	17.83798791
Zm00001d051428	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051429	4.909559143	5.755511976	4.427581843	15.59007246	10.98082218	20.69736218	19.57873663	18.26033946	15.8047059	13.00396798	10.04865035	7.237503992	75.74613442	82.56587764	91.86582484
Zm00001d051430	19.27172561	22.13528244	23.92752193	24.92852425	28.47431635	25.59729435	19.74269504	19.50843029	19.55809067	2.574667121	6.063676508	1.107105853	17.97843363	12.17555347	13.2332799
Zm00001d051431	2.284029442	2.983929892	2.640715444	3.98864416	5.885249849	4.025845616	4.50695701	5.220058805	4.425014629	5.23620615	5.393515867	8.891997035	5.932028024	5.534314185	6.131893357
Zm00001d051432	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051438	8.107869776	8.233057319	7.057287534	7.133304128	12.85104031	7.074543176	9.890557894	12.20956182	10.90888981	5.819829274	6.849613264	4.358639101	4.758935149	4.935513028	4.419033699
Zm00001d051439	23.33896116	22.19914895	19.90227954	25.4088215	23.15881168	19.12283416	15.85932837	15.85267316	13.22744682	8.970726428	16.05563672	11.87020955	28.09711956	25.93175696	22.66299735
Zm00001d051440	20.07693786	19.92635489	22.60076996	81.12234918	87.80338777	88.27530019	12.00624538	13.27045734	14.31545349	3.972570212	6.071901991	4.143271726	1.058390234	0	2.186967708
Zm00001d051441	21.61141415	27.00299356	23.15679285	27.75451495	30.46846958	26.47693934	24.52296162	23.95150021	28.69621662	35.86174246	35.54152214	39.09454574	14.7413178	14.58988308	15.32431051
Zm00001d051442	3.032528251	4.019846747	1.940023281	2.039820325	2.083056841	2.38142206	1.847272054	1.420655238	1.827056746	0.644494268	0.231954542	0.093619757	2.05278722	1.656732202	2.287532074
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Zm00001d051448	1.268106831	1.006445498	0.766414316	4.484606311	3.158719407	5.288639562	1.755811177	1.665196315	1.810299546	0.071873769	0.109529	0.048107918	0.456818194	0.342775045	0.763177711
Zm00001d051449	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051450	0	0	0	0	0	0	0	0	0	0.029414798	0	0	0	0	0
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Zm00001d051452	4.610564804	2.142266185	4.693035496	3.868974387	3.115072182	3.210905613	2.074978821	2.141165707	1.807416237	0.029506863	0.337243047	0	2.956761962	2.626809562	3.425829376
Zm00001d051453	50.59559298	57.54805224	55.7220234	78.7674515	41.92667832	65.78495887	28.20191156	24.71853745	24.54073298	0.331757516	0.825760865	0.088823299	184.5696001	181.4980834	179.4260954
Zm00001d051454	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051455	0.028976757	0.014598533	0.129644636	0.108415663	0	0.014200197	0.020315604	0.048915122	0	0.19182588	0.03654062	0.044938791	0	0	0
Zm00001d051456	0	0	0	0	0	0	0	0	0	0	0	0	0.017956044	0.017590243	0.148411381
Zm00001d051457	8.62713998	7.586110974	7.936381293	8.112930709	10.31982464	8.621145439	9.749818697	8.802463851	10.01451515	2.193225502	4.549669824	1.001917775	4.893756371	5.431452577	5.435222907
Zm00001d051458	4.054168076	5.142712835	4.261158507	15.0421431	16.57915818	16.40499619	19.62932199	17.74141437	16.47828674	5.367711521	6.229868455	3.156547883	18.15021756	18.9105876	20.95165684
Zm00001d051459	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051460	1.670241248	0.23374167	0.691926913	0.46290054	11.87338645	2.980991843	10.50532264	7.608182873	7.934316703	3.213577768	4.78451747	0.799476679	0	0.045209311	0.047679674
Zm00001d051461	21.65361557	16.93576297	20.03667085	5.262744323	7.051476656	6.051358595	5.81540117	5.386348766	4.59409552	13.8723993	12.96770516	11.05107446	2.734280272	2.0952062	2.833607756
Zm00001d051462	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051466	0	0	0	0	0	0	0	0	0	0.057484407	0	0	0	0	0
Zm00001d051467	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051471	0.064946479	0.040900166	0.20178919	0.067498693	0.142627524	0.013261387	0.113834943	0.274087348	0.827669221	0.119429203	0.696146551	0.203843494	0.024225732	0	0
Zm00001d051472	3.888706537	5.688637401	2.391276632	5.733908984	2.535283484	3.374639956	2.035312559	1.465279664	1.223941817	0.055866327	0	0	7.003336105	5.062237285	7.376045632
Zm00001d051473	0.013562732	0.068329245	0	0.202978213	0.178708892	0.232626835	0.221872735	0.032707135	0.367985423	0	0	0	0.349074052	0.148679432	0.094082215
Zm00001d051474	0.558680232	0.596041259	0.980229794	0.69676175	1.039260942	1.280342312	2.319423441	2.599462482	1.507710902	0.262880615	0.364689443	0.254833191	0.463369536	0.590829187	0.714301122
Zm00001d051475	3.867221971	3.462820428	4.0927753	2.12891624	1.81133804	1.499093594	3.089056868	1.602902616	1.527684735	0.729194466	0.304793186	0.284479926	5.308005105	3.82538213	3.982016742
Zm00001d051478	0	0.044378788	0.131371003	2.109299367	2.089235915	4.144115168	1.317512326	0.212427786	1.303640953	1.020496379	0.444326407	0.19515944	3.824637436	4.017103651	4.236609421
Zm00001d051479	0.005675066	0	0	0.067238113	0.078516186	0.205105603	0.026525259	0.085535472	0.045493047	0.19567129	0.114503044	0.330045478	0.196868012	0.202189214	0.147625891
Zm00001d051480	3.190189846	2.951315408	2.833236898	1.029876033	1.292682514	1.011692545	0.569057176	0.740393635	0.304654004	14.95152509	12.80751943	12.48609339	2.898589446	2.762167554	3.2802976
Zm00001d051481	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051483	0.038456354	0	0	0	0.025335944	0	0.022468125	0.023184805	0	0	0.024247348	0	0	0	0
Zm00001d051484	5.72517796	6.002040871	4.438373814	1.558872675	4.793891562	1.804804442	5.033703724	8.881388987	5.43662619	9.60444779	10.04837821	7.355838079	1.723428461	1.174482549	1.187048743
Zm00001d051485	0	0	0.061560325	0	0.130535191	0	0.115759688	0	0	0	0	0	0.027714764	0	0
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Zm00001d051489	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051490	0.010730953	0	0	0	0	0	0.050156474	0	0.066171205	0	0.013532076	0	0	0	0.012406446
Zm00001d051491	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051495	0	0	0	0	0	0	0	0	0	0	0.10957541	0	0	0.015875939	0
Zm00001d051496	0.014512987	0.018279161	0.072147133	0.253399552	1.262117323	0.320047111	0.508752769	0.227491668	0.375869302	0.820647882	0.475834903	0.546612171	0.308569475	0.365921862	0.90606566
Zm00001d051497	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051498	12.15636395	11.5656828	12.29555913	15.8839476	21.9936618	16.10757851	11.48396281	11.90665008	11.19799639	0.838281502	2.676777879	1.046225461	5.682019502	7.175663946	7.254240696
Zm00001d051499	33.22059887	34.03944926	26.2206495	26.02175745	35.58888547	33.09024644	37.90375442	32.84832183	30.84574341	30.03920854	43.21515384	35.2876792	32.42323576	30.94125817	31.28434179
Zm00001d051500	0.072372864	0.091153889	0.179890416	0.370067213	0.753358735	0.398999971	0.431295227	0.776660277	0.812227894	0.489089142	0.374184462	0.136291335	0.186271384	0.253880558	0.309589755
Zm00001d051501	0.170585806	0.030693351	0.030286363	0.547064274	6.165170081	2.418323891	4.413725003	3.819913564	2.013633406	0.302484794	0.030730596	0	2.072530803	1.041869129	2.338471304
Zm00001d051502	8.216209548	6.040255644	7.867591513	8.005667012	22.54884583	11.60757848	15.17961561	16.82203359	15.57523649	0.875038761	2.377912356	0.286631888	1.511212718	1.492083094	1.676063556
Zm00001d051503	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051505	4.135704325	2.732233778	3.103315024	11.3278526	12.07092884	8.948166483	12.67410009	7.545939368	9.257835	0.710286782	0.570726111	1.089150078	7.334921111	5.594420035	9.544834001
Zm00001d051506	1.088257427	2.541439974	1.803319377	13.37434553	6.213734854	12.19381262	9.139832085	4.729354141	5.648101899	0	0	0	9.158833264	8.773417918	10.61584393
Zm00001d051507	6.980070745	6.075391298	7.282273819	6.159162362	5.724893979	5.978061522	5.026524877	4.952055048	5.244152581	2.749533213	4.047795408	2.523178001	4.374331386	4.565182417	4.441866859
Zm00001d051508	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051514	0.006194488	0	0	0.054078473	0.036729657	0.0720964	0.050667811	0.056018564	0.064935929	0.00854322	0.023434342	0.030878875	0.024261406	0.044138996	0.057293383
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Zm00001d051534	1.182323282	1.364002688	2.12383122	3.0358224	2.644476002	2.957877259	2.240656636	2.192328858	2.622187879	0.041108035	0.425985026	0.132073016	0.878332434	1.154513074	0.918942562
Zm00001d051535	6.277344894	6.428760991	7.385848878	5.34542398	6.379766205	6.524407889	3.192562446	2.891128581	3.033226267	0.879941965	1.395021033	0.632677964	1.283995707	1.08862218	1.832213066
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Zm00001d051543	48.13584159	36.77504509	56.05897016	114.008122	221.7034693	106.0444055	127.3841789	168.0355519	138.3160449	11.29035059	33.20652559	7.194332652	42.59775827	40.623138	53.06462255
Zm00001d051544	0.04461891	0.033718609	0.077633517	0.350574642	2.422228723	1.076886107	1.105308562	1.09214505	1.045522314	0.646136742	0.382607961	0.232305975	0.279607959	0.107608194	0.257927743
Zm00001d051545	23.49247466	25.95643103	23.26656885	41.74184332	27.38942481	46.30140865	53.6300421	38.32261285	46.91118302	28.82175226	28.65938799	32.42887831	27.4663639	29.71132741	28.27087217
Zm00001d051546	15.88880865	12.41032767	19.98816405	21.65485624	39.13043373	25.73988701	28.54366769	32.25207957	31.25381085	33.5162931	48.27450374	35.61966545	9.120289271	9.485847183	9.211246666
Zm00001d051548	0	0	0.007786732	0.09376812	0.561385074	0.176549056	0.388023079	0.302188748	0.579528746	0.069128819	0	0	0	0	0
Zm00001d051549	0.174951805	0.146901631	0	0	0	0	0	0	0	0.011489875	0	0	0	0	0.009631817
Zm00001d051550	0.186595549	0.054837483	0.185521198	0.240471004	0.286844846	0.274326095	0.334323248	0.532480497	0.544626948	0.180142218	0.352954461	0.006890069	0.05568171	0.204552594	0.07910097
Zm00001d051551	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051552	9.247568091	5.040992674	6.453305339	11.20477266	31.61445664	12.98122259	20.62698515	26.1616766	21.97830178	9.587229908	16.90781788	12.41418517	4.690926655	5.126485127	4.907351513
Zm00001d051553	2.790343818	3.739811604	2.680519912	6.14578108	3.969802792	6.215012243	5.097029688	4.58321027	4.956141319	0.206756792	0.500059744	0.166068464	4.908307258	4.15094881	3.667708779
Zm00001d051554	0.262290706	0.283162384	0.465679516	1.388580789	2.04542613	3.377370027	2.514441838	3.356259216	2.409574939	0.221474771	0.580512276	0.272764736	3.653921435	3.608823539	2.673496795
Zm00001d051556	0.741684052	0.422165663	1.285156085	168.3226213	113.8622312	251.9446918	470.2202006	318.0361995	432.3198914	0.540959156	0.170869811	0.007900038	32.76778573	32.9054805	38.50450827
Zm00001d051557	0	0	0	0.011129354	0	0	0	0	0	0.0369221	0	0	0	0	0
Zm00001d051561	6.027733266	4.249384442	7.220766033	13.45846233	23.24261806	17.30299199	20.51392105	22.16762652	19.02863416	4.260534442	7.062749176	4.553513108	23.38345387	22.43903122	22.84244733
Zm00001d051562	0.075998212	0.063813353	0.031483601	0.084250376	1.401943112	0.444850328	0.809102304	1.160729567	0.885198242	0.069876043	0.340750875	0.028062457	0.170088879	0.638724634	0.244067512
Zm00001d051563	2.969277184	5.005251694	7.937888863	16.07683342	14.06593769	11.12212711	13.05030971	14.07230938	13.14316438	2.845553584	3.834851767	1.67939564	11.70479593	11.14182587	12.36255117
Zm00001d051564	3.183187276	4.443449455	3.903707705	5.278912223	3.709774279	6.682758241	2.336470969	2.424855147	2.097514096	0.427919788	0.512027359	0.152759151	5.962533678	5.916649862	6.000805647
Zm00001d051565	3.258640974	3.949549188	3.503192906	4.419865295	3.338219946	4.205893181	3.472790641	2.79836562	3.652277136	0.648535192	0.906133945	0.194608845	2.638445536	2.448582165	2.564053958
Zm00001d051566	0	0	0	0	0	0	0	0	0	0	0	0	0	0.050803006	0.187526584
Zm00001d051567	9.516828785	10.0691389	13.71946144	69.93999285	46.31579871	113.5740361	86.8172712	60.58489302	66.25467944	5.120076662	1.845359068	1.403465556	80.37233785	96.74724416	120.065127
Zm00001d051568	0.176189885	0.194172836	0.15738419	1.270350958	1.102741104	1.207448511	0.971486258	0.610779079	0.536437139	0.045561544	0.451305356	0.067091461	1.022778598	0.790689552	1.6232308
Zm00001d051569	1.92379639	1.474438724	2.696121069	0.428806668	1.197328175	0.611794647	1.951417208	1.845857541	1.373064388	0.135484207	1.12523667	0.081616379	3.719288142	2.620461626	2.044344555
Zm00001d051571	9.700875569	9.409341898	11.22352358	6.09914636	9.132115901	9.703959511	9.8046	10.6117547	9.682100988	12.8411839	13.40598102	10.71295408	7.565339888	7.082318074	7.087756253
Zm00001d051572	1.105624552	0.758855094	1.088451438	2.494391051	3.633871972	1.780689196	2.373362872	2.007186819	1.853803891	0.37692638	0.524793697	0.701829167	0.653368322	0.435784075	1.069998182
Zm00001d051573	0	0.089882765	0.012670134	0	0.013433152	0.012490031	0.083388411	0.049170459	0	0	0	0	0.148308089	0.245869879	0.058932931
Zm00001d051576	0.080242019	0.113698259	0.062328136	0.492032293	0.669627332	0.577556281	0.175805249	0.197538619	0.119577468	0	0.084323133	0	0.056120872	0.087964119	0.162348767
Zm00001d051577	0	0.055724821	0.054985922	0	0.011659454	0.140931209	0.134416104	0.128034145	0.043651581	0.085426666	0.267803722	0.039208731	0.188137505	0.097002503	0.572896748
Zm00001d051582	0	0	0	0	0	0	0	0.023482046	0	0	0	0	0	0	0.157607813
Zm00001d051583	0	0	0	0	0	0	0	0	0.260728191	0	0	0	0	0	0
Zm00001d051584	6.057383574	6.366168379	5.284650452	8.294947674	7.06176997	6.556145032	8.624911967	8.62915577	8.736944545	10.74418651	9.884593718	5.439176044	8.789483686	6.534775128	7.902906034
Zm00001d051585	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051586	11.11015125	10.57514159	12.55083654	38.16552131	34.22536833	34.53227136	25.40330644	24.08178161	27.70888037	3.371602727	7.23909162	0.942997118	28.31737946	31.92789114	34.56417339
Zm00001d051587	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051588	32.16380241	25.81826583	27.04428867	27.21973867	34.79125862	28.84022161	28.0552166	31.38863139	30.84759047	40.38738784	52.8213129	36.65117372	23.42760162	20.64465813	24.50368498
Zm00001d051589	1.468323643	1.283890878	1.751660527	1.597162617	2.337194819	1.510352427	2.244647345	2.076634572	2.2102358	0.355273751	1.141589956	0.322047222	2.137267111	2.101794878	3.373892051
Zm00001d051590	9.077463057	9.532654285	8.949120708	7.004900904	6.30414218	7.775912877	6.738796105	6.228589618	7.24150532	7.909276394	7.492502026	9.448874996	5.308825098	5.362550582	5.528309367
Zm00001d051591	0.235204024	0	0	0.73334064	0.968486899	1.188648087	0.961925666	0.389953459	0.362589742	0.527125831	0	0.390822517	1.941106312	2.127171015	1.461612729
Zm00001d051592	0.079368557	0	0.012329935	0	0.183014506	0.012154668	0.150706009	0.203363379	0.195766885	0.328386975	0.412855973	0.219802214	0.166529932	0	0.206461986
Zm00001d051594	0.029025974	0.036558322	0	0	0	0	0	0	0	0.240189624	0.292821479	0.257229257	0.584657952	0.159096462	0.234905912
Zm00001d051595	30.07557107	32.52232004	37.76884293	36.51061055	52.69297832	41.31592695	44.81773578	49.80480064	42.07701548	32.6471041	43.21863166	28.1162148	51.64780156	49.74317559	55.56162712
Zm00001d051596	0	0	0	0.177605936	0	0	0.332809103	0.214640576	0	0	0	0	0.637439573	0.429311859	0.452770658
Zm00001d051597	0	0	0	0	0	0	0.100628894	0	0	0.475083729	0	0	0.024092204	0	0.024891043
Zm00001d051598	0.011877701	0.014960008	0.014761642	0.059253414	0	0.087310854	0.11103275	0	0.058593998	0.016381308	0.089868973	0.026315156	0	0.065103765	0.08239346
Zm00001d051599	12.20735804	12.38986639	11.18629335	9.179998072	9.658573849	9.086216907	11.43581461	10.92020776	12.69078405	48.00530236	31.66084575	75.31546268	7.679461435	7.929131584	7.913301859
Zm00001d051600	18.90730098	19.15537032	17.32197064	13.53490389	13.911117	13.98720595	13.13493314	11.9060908	12.99165498	6.921549216	7.666876543	5.229711372	8.628243031	8.929142833	8.582178912
Zm00001d051601	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051603	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051604	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051605	4.762641817	5.015960742	4.61702439	4.938989429	6.177577905	5.079356376	5.521737119	4.676551538	4.838208338	1.496094174	3.232474609	0.765449263	3.084653237	2.435369089	2.886278726
Zm00001d051606	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051607	0.088123981	0	0.014934647	0.829278699	0.94476422	0.91769344	0.992284041	0.883868886	1.071992906	0.44747897	0.181844455	0.062121657	0.286875823	0.346898344	0.486261432
Zm00001d051608	7.683867534	7.423756547	7.071166149	5.648679933	5.937652768	5.425900479	5.529968782	5.006015529	5.417183171	3.087408227	4.734935368	3.762635303	5.004730028	5.022159058	4.784552777
Zm00001d051609	5.626238575	5.85161141	3.986267828	8.407982128	7.131309608	7.652144709	11.80558005	9.415126305	9.097217242	4.832859384	11.00225424	7.376640788	9.166521152	9.251520443	9.635466204
Zm00001d051610	0.02156346	0.036212344	0.035732176	0.242037112	0.246246196	0.184927326	0.092388647	0.12133625	0.168426938	0	0.036256287	0.007962341	0.024130205	0.063036327	0.033240404
Zm00001d051611	17.24807087	17.07449323	19.55674331	25.30864271	26.3268869	26.59930824	25.82050305	32.27722739	25.94010159	13.00138557	22.72348283	16.29954967	20.52642944	20.59982443	22.88286141
Zm00001d051612	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051613	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051614	0.022634493	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051615	2.14825642	1.905348767	1.666914836	2.945730708	3.990317414	3.338113747	1.954962564	1.403648712	1.640267395	1.248719277	1.219768288	0.386240681	2.649399195	2.200871473	2.282122598
Zm00001d051617	9.357560705	14.52797346	0.588202514	0.337293173	0.498900076	2.070862035	1.027066668	0.440236101	0.867202765	0.578141889	0.545673261	2.4566539	0.484227094	0.711543582	1.532116303
Zm00001d051619	0	0	0.01707603	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051620	4.084173656	1.913218857	2.172808459	0.500424273	3.323311021	1.948798393	2.22709991	2.038950476	2.22684832	1.462538287	1.427619813	0.904852446	0.673521058	0.282771447	0.613013676
Zm00001d051622	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051623	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051625	0	0	0	0	0.077925838	0	0.011517546	0	0.03646811	0.122346049	0	0.043675191	0.011029957	0.021610507	0.011395683
Zm00001d051626	0	0	0	0	0.038856463	0	0	0	0	0.032536472	0	0	0	0	0
Zm00001d051627	14.39357387	18.81828447	15.25189583	11.67339217	14.52730349	13.19064021	11.01712893	10.02999414	9.949337485	4.393880433	5.283184307	3.150164249	9.63178994	9.577270755	10.17092579
Zm00001d051628	8.854311802	8.095416637	9.349884186	28.13874191	37.29711297	32.66035718	44.96843558	47.70632151	48.08712357	79.48667969	76.66592818	63.82794979	10.92871117	7.924749664	11.88624275
Zm00001d051629	1.645201165	1.0604876	1.239188394	6.811777758	4.269897064	9.779375773	5.929072384	3.052418588	4.010157333	1.436271666	3.213264873	0.834535925	1.927815628	1.372381035	1.818821162
Zm00001d051630	0	0	0	1.972746929	0.69474928	1.107380637	1.760312611	1.271523676	1.161186157	0.571360166	0.18997096	0.083440069	0.969329598	0.784437596	0.43542182
Zm00001d051631	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051632	3.092229433	3.132841893	2.838167228	10.1454284	7.848023187	9.890683898	9.101690397	7.412396677	9.377896672	2.196189822	3.121077064	2.933153864	6.250648993	6.272164321	6.500719998
Zm00001d051633	4.791218992	5.324610044	5.189342124	5.066923306	5.067646865	5.678662307	5.775868735	5.212477969	5.630835843	3.0438112	3.821968075	1.84441454	3.498336304	3.978440903	3.714591419
Zm00001d051634	2.953190195	3.017684119	2.678848565	2.183748223	2.4301747	2.696218664	2.158404413	1.86911838	2.037344719	1.622932415	1.548127711	1.428891758	3.443993818	3.637413221	2.959706171
Zm00001d051635	44.68468124	39.3272765	43.47298965	46.83534321	66.71798641	54.74484855	84.4595546	116.9171066	97.20762393	312.6186569	300.8462788	321.8179159	43.15701996	42.13905488	54.97885865
Zm00001d051636	0.788291906	0.691131329	0.269733245	1.064837628	0.733827905	0.978307853	0.770390519	0.666584841	0.540381986	1.112599203	1.580170304	2.064007636	0.419295283	0.231189056	0.362182005
Zm00001d051637	0	0	0	0.005230113	0	0.041102165	0	0.005056563	0.025859544	0.109890437	0.084612832	0.009291026	0.037542453	0	0.019393634
Zm00001d051638	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051642	0.012327533	0	0	0.015374364	0	0	0.115237778	0.014864199	0.015203267	0	0.077727072	0	0.013794905	0.027027749	0
Zm00001d051643	0.202536799	0.212579873	0.041952222	0.420991849	1.023009125	0.413558818	0.473328502	0.244213277	0	0	0	0.14957405	0.226645181	0.555069878	1.014694108
Zm00001d051644	9.116561372	9.122251747	8.588745799	7.832848346	8.784270752	7.54720285	7.019821462	7.227784885	7.238397485	1.721771016	2.987818529	0.92462343	4.043005493	4.089849788	4.581697085
Zm00001d051645	0	0.071448007	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051648	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d051650	28.49055836	27.14628519	28.75963467	30.15006218	40.84499765	29.40824392	44.89890146	48.68738587	48.08082507	50.72514457	57.68526457	50.47522846	33.34883387	37.30208429	38.48371634
Zm00001d051652	3.391758111	3.422138988	4.173198845	5.633573663	6.576705169	5.738365011	3.674090739	3.518011389	3.76211039	0.183231547	0.4763301	0.057714834	1.679109118	1.547807277	2.123303641
Zm00001d051653	0.066044608	0	0	0	1.392375369	0	3.009751889	3.663199161	2.932247477	2.823678503	1.082696809	3.145932455	0	0.072400419	0.22906974
Zm00001d051654	0	0	0	0	0	0	0	0	0	0.118584185	0	0	0.048108647	0	0
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Zm00001d051658	0	0	0.090616799	0	0.288221701	0.178657409	0.042599565	0.04395839	0.269766768	0.100559389	0	0.040384993	0	0	0.042148832
Zm00001d051659	0.206202623	0.103885187	0.128134614	0.051433393	6.656704074	0.682091354	2.84318365	3.704638066	2.263314701	0.853162239	0.962104057	0.753792297	0	0	0.023839837
Zm00001d051660	13.81557576	9.012039955	13.88979211	12.06113073	27.65928468	9.625066883	18.1915564	19.86581084	21.13274737	18.11547821	19.45010363	9.959195198	5.722534445	4.227070607	6.460595883
Zm00001d051661	11.72811438	10.37217126	13.28203077	22.82010893	54.07204929	26.95164917	39.41000384	40.27659585	36.4595949	5.997831593	11.69743773	3.074999495	16.04924	14.45435773	19.92441623
Zm00001d051662	4.283454296	2.744508273	7.994508783	12.54564902	32.25188251	11.99501166	16.02715628	19.83166445	13.62086574	0.26759117	1.430381777	0.198397893	1.536535564	1.423427012	4.952257712
Zm00001d051663	4.807161521	2.624842944	4.316730121	13.27279485	17.02529104	11.33630285	10.00050768	10.62104391	11.3088203	1.801178085	4.064683519	0.707968634	6.560963407	6.853759161	5.268604023
Zm00001d051664	16.73791192	18.19244338	15.80285357	11.5153427	26.20495939	14.3869445	77.11621897	111.1419079	133.0794724	1892.42302	1201.498039	2540.857456	10.09983284	8.791699492	16.98764483
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Zm00001d051799	11.23418787	12.83187569	7.904345756	19.03688533	20.78642378	21.46801806	57.02322232	64.37515082	49.8042234	12.69015771	6.101412943	2.620634896	14.19439355	10.71236597	15.73709115
Zm00001d051800	8.231545221	8.469947014	6.953223766	12.03460127	11.41558805	10.26121872	14.78384424	14.38711081	10.78028666	4.706081628	7.502274943	5.571754556	12.98021198	10.73614898	11.15629037
Zm00001d051801	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051802	0	0.049479798	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051803	18.91358678	18.42731846	23.67619365	35.16864616	47.72091765	27.70533135	55.1312042	59.69912919	58.82132533	130.8973253	123.2283052	111.6660249	25.6126096	25.39131681	27.53142704
Zm00001d051804	147.1930468	124.3892323	128.7089685	130.7108381	250.4084244	149.1135095	260.3477505	281.7756236	255.5612798	562.701228	421.6736764	580.7116291	179.3500622	177.4639187	210.6615291
Zm00001d051806	21.66020787	24.63679472	19.1526032	21.01516751	17.83422075	20.35684309	25.14427866	21.21864644	23.49833185	6.595825517	13.80151903	4.059440897	15.21311708	15.23198536	14.73401787
Zm00001d051807	2.107112856	2.761872362	2.680865322	8.471636135	4.037588488	4.961733501	1.110059203	1.024891928	0.924944835	0.088659336	0.558449114	0.221547769	7.953007835	9.435317906	8.018518035
Zm00001d051808	0	0	0.045048121	0.007534322	0.031840665	0	0.007059141	0.087411734	0.014900948	0.083318098	0.007618146	0.194072825	0.060842664	0.033112874	0.153657917
Zm00001d051809	12.7869962	14.28284972	12.65557217	9.284143325	8.571902235	8.764980529	10.19142265	10.56150628	9.503018756	13.16911993	12.98963337	16.3019852	7.148104406	7.565828565	7.793373947
Zm00001d051810	5.107933553	3.342876904	2.489472492	0.936822521	7.060375924	1.901916103	7.607065213	5.192886723	6.114219328	12.56992366	20.77624706	42.71489684	0.392270506	0	0
Zm00001d051812	0.015524908	0.007821472	0.015435521	0.081320365	0.871440245	0.254869828	0.921555436	0.613999769	0.677786707	1.648678381	1.127658642	1.602833884	0.180677853	0.044249268	0.104103691
Zm00001d051813	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051814	0.591677639	0.280553478	0.389296965	0.460111509	5.383978445	0.793110636	7.426184386	3.894480575	4.223690485	23.20379746	9.462614062	16.64801439	0.482948108	0.419693874	0.515057012
Zm00001d051815	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051816	0.157543029	0.169029579	0.19579494	1.149776714	0.845720954	1.351082362	0.156816581	0.182925438	0.179902081	0	0.110370452	0	0.261178826	0.390183563	0.2158711
Zm00001d051817	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051819	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051820	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051823	16.58141725	14.2745183	18.36847239	35.37778749	34.49546309	36.01543221	31.3089907	30.63671171	33.32701504	46.89207527	45.4208508	41.40841211	26.83482943	31.10984414	34.92046536
Zm00001d051824	6.513009927	7.083850407	6.309083659	7.727993297	9.56033693	7.405114965	8.727125973	7.977978048	10.44205182	6.153442146	8.819503296	6.237108004	3.732682663	4.170438195	4.510919651
Zm00001d051825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051829	1.825849122	1.31771365	1.043943528	4.47896295	5.16291173	4.350583991	4.184725499	3.887600434	4.404304756	4.030422541	3.158738985	2.20646487	6.045122305	5.828233716	5.710561976
Zm00001d051830	7.372489783	7.496694296	6.955974112	9.742954221	11.37424076	8.835503841	11.48963226	11.39737476	12.09529417	9.981312292	10.94949964	6.584102584	5.629336486	6.95124615	5.796441903
Zm00001d051831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051832	11.42082504	11.07777338	12.35259859	14.74640893	14.88799512	16.43896302	13.24662405	14.15532515	14.84827375	8.328221024	12.17905385	10.88566694	10.74466045	11.72842094	12.1199574
Zm00001d051833	0	0	0	0	0.057736719	0	0.128003501	0.211338413	0.054039817	0	0.110511952	0	0	0.120087233	0
Zm00001d051835	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051836	3.915767332	4.119438946	4.627420339	6.958388869	7.083263044	6.183868321	8.265126732	10.84858858	11.06814192	9.03723402	12.70155586	4.989619421	4.204568307	4.55313528	4.592582811
Zm00001d051837	0.050188083	0.101139323	0.043661728	0	0.006613016	0.061487269	0.005864478	0.012103081	0.037137496	0.069217641	0	0.027798041	0.011232415	0.005501794	0.058024273
Zm00001d051838	20.75561542	21.70761728	20.39818909	14.98634394	17.75020416	16.61662318	16.91007266	16.34094025	17.52070064	4.676429272	9.226873725	3.558448289	8.103147986	8.987389334	8.034204315
Zm00001d051839	7.807053215	8.951318181	7.434572374	6.382141904	4.604582389	6.480428178	5.266622039	4.421266731	5.470865621	3.275855652	4.194309879	2.805358162	6.149581332	5.829373646	5.472740789
Zm00001d051840	11.04466034	12.08204557	14.79078639	22.6759121	25.26884023	19.21753049	20.68341061	20.48746858	20.059477	13.15117013	14.60656784	10.55407345	15.9009986	14.52189976	15.01363533
Zm00001d051841	0.719538627	0.352435053	0.695523674	0.049854298	0.632065134	0.587688847	0.840780892	0.578399868	0.049299482	0.055131244	1.713904666	0.354254328	0.447326016	0.262927837	0.415942423
Zm00001d051842	36.40380202	38.05773337	34.34832619	16.30456182	25.26495551	17.20801247	26.3778393	31.60522543	29.6078977	61.97873053	61.18426123	30.7994088	17.19273267	14.50522174	16.42205553
Zm00001d051843	0.379603678	0.748349589	0.252979493	0.164669649	0.28996147	0.074141028	0.224997703	0.059702039	0.17640684	1.775470102	0.138751425	0.152357872	0.240097964	0.042216582	0.572443898
Zm00001d051846	6.033684986	7.620938701	5.815520369	7.37599393	7.05659801	7.478317655	6.180592142	5.955984658	5.910354207	1.967849983	3.394182387	1.346691472	7.720874949	7.491105302	6.748909147
Zm00001d051847	0	0.013536926	0	0.147446438	0.127456531	0.210680907	0.238617847	0	0.066275248	0	0.121980174	0.011905953	0.192434588	0.106039293	0.17396334
Zm00001d051848	3.850181842	4.728301422	4.972665064	11.18703416	11.34004811	11.65376362	9.158264957	9.996561566	11.05407251	2.470444333	4.033020529	1.01874795	8.0563146	8.178085262	8.140945373
Zm00001d051849	0.606377921	0.754421391	0.76279861	1.434104891	1.198487805	1.558269494	1.944199223	1.716428004	1.70314212	0.089238809	0.214478369	0.024575047	1.729491222	1.846254737	1.872331491
Zm00001d051850	0.897735811	0.807643983	1.41323103	4.5104577	6.29752701	5.541145028	6.114196505	6.494790257	6.242257919	2.947918306	4.129373442	1.496442062	3.645245436	3.514748288	3.983578652
Zm00001d051851	5.740047416	5.865802869	5.583698914	11.24540543	8.769756306	10.4946874	8.068567863	10.39033061	9.204539445	9.789059352	11.84235359	10.93987017	11.17812343	10.70491907	12.42049093
Zm00001d051852	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051853	0	0	0.145219229	0.036431987	0	0.017894372	0	0.176115344	0	0.020144108	0.128930611	0.016179885	0.016344604	0	0
Zm00001d051854	16.30233762	18.71653292	13.35276352	13.03030797	11.41989146	12.1216213	14.41250571	15.61497819	16.01239613	23.20803928	18.64892092	30.93408679	13.49777739	13.15998364	12.2228669
Zm00001d051855	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051856	2.124864283	2.404252789	2.388890724	3.236403617	3.432461627	3.144660244	3.142940943	3.088946285	2.944273647	0.678216807	1.028651538	0.353350288	3.474661499	3.349238624	2.91953267
Zm00001d051857	0.045026707	0.042533478	0.041969493	0.217602003	0.118658584	0.151700662	0.01973014	0.047505465	0.06247172	0.007762407	0	0	0.006298291	0	0.006507127
Zm00001d051858	0.107859834	0.203774789	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051859	2.109276091	2.779633682	1.262162553	0.998652808	0.797756495	0.717819949	0.410781522	0.423884474	0.650330601	0.134677753	0.172398646	0.367791904	1.355014406	1.049082069	1.196725771
Zm00001d051860	50.25825602	53.54995852	64.89199967	56.23474706	74.30715736	52.99687743	54.87741427	59.48285144	47.88969543	19.59317919	38.45216784	13.38817269	36.91005526	30.5154681	39.22888297
Zm00001d051861	1.98944741	1.730510371	1.483494658	6.474257324	9.682754972	6.816950096	6.77059938	7.743693179	8.694733823	1.877771679	5.323268781	1.088135906	3.109800698	4.634416987	5.613614928
Zm00001d051862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051863	0	0	0	0	0.009886859	0.110312616	0.131516221	0.009047418	0	2.442235442	0.520413036	0.964186175	0	0	0
Zm00001d051864	2.510612402	2.784205836	2.37437921	4.049122993	2.7088738	3.426219931	3.182915043	2.594766072	2.552769805	0.397659622	0.795185798	0.334983548	3.092762371	3.094000615	2.569257517
Zm00001d051865	5.897395025	7.832943085	4.497524936	5.126194868	2.590227708	3.634452202	8.989761184	8.296068688	8.375112076	3.462890733	1.780325885	2.266706736	34.42673645	31.23737365	28.16120503
Zm00001d051866	2.920187217	3.67492926	2.853898201	9.057902752	6.601668939	8.404305294	9.822595943	8.063656179	7.753639126	3.294248458	3.486542215	2.471178683	10.17005864	9.308261661	8.570836303
Zm00001d051867	0	0.013337699	0	0	0	0	0	0	0.078359828	0	0	0	0	0	0
Zm00001d051868	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051869	60.20866656	57.00522549	65.68859792	102.6024112	118.5912208	89.7728105	97.56349283	117.5762049	106.7188137	82.70438406	118.9594191	78.11207288	78.84934351	65.52978363	70.80684498
Zm00001d051870	12.81226089	16.66094755	12.82164773	27.6614198	25.71025262	27.17302985	36.88370092	40.60045737	36.80969332	6.509424751	8.129645136	2.12341731	41.92935856	42.95844375	45.64032771
Zm00001d051871	2.627046345	2.860489002	2.143249481	2.615786175	2.942291116	3.280784599	4.738236157	4.570058089	5.455534358	27.58546008	18.16423978	39.08247877	3.309588632	3.163201563	3.571187664
Zm00001d051872	0.704922999	2.367608335	0.398218354	5.834355008	3.476111339	2.904927605	7.700370623	13.07161107	5.558670706	0.088382276	0.228966951	0.023663082	6.681163521	7.587111391	12.60760478
Zm00001d051873	18.56315888	17.9327465	15.69038098	10.76006839	22.79890398	12.76212813	21.64232728	23.28109585	23.15532375	18.20399591	23.44937077	15.87503127	13.1775807	12.24632056	11.59633405
Zm00001d051874	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051875	8.801570863	12.01490784	7.7439974	2.974281028	4.459558444	1.854534826	1.913420582	2.600080602	1.919693008	15.60517507	9.706427934	12.43926698	6.823621944	6.100163841	6.576582668
Zm00001d051876	7.074955607	6.969740722	7.446075442	6.619323361	10.74316172	7.456231582	8.961643813	10.82680429	9.44546975	7.377998668	9.027878297	6.398045795	4.985714365	4.889911474	4.500308169
Zm00001d051877	0.020952083	0.026389226	0.013019655	1.123612728	1.14570887	1.771172594	1.199642928	0.947379093	0.645993218	0.245619198	0.039631873	0	0.703381597	1.171388845	1.223285072
Zm00001d051879	20.21027408	19.64697699	19.14271946	18.67285925	28.30028514	21.56055183	25.01308444	25.5975334	25.92776734	47.11082479	39.4984721	53.5775894	16.63677138	16.71210914	17.12204135
Zm00001d051881	7.270797379	7.409844924	6.877896658	9.600320882	13.27507611	10.06456859	10.70266103	12.64793764	11.35167218	8.142139738	10.01258201	5.834903885	5.885117785	6.170276776	6.630846685
Zm00001d051882	0	0	0	0.16553563	0.233189079	0	0.103397003	0	0.491080281	0.061019047	0.055792442	0	0	0.097002503	0.818423926
Zm00001d051883	30.02399648	27.60653505	33.72300636	100.0504222	94.17700195	114.4927698	104.6331089	97.97733463	110.952461	6.187087006	12.90592754	3.004167332	36.79706793	34.89716295	39.93355708
Zm00001d051884	19.95307938	19.48577079	16.35260426	9.809243308	13.21776209	12.07421614	12.95849115	12.27635415	13.89739929	13.90249468	15.90504806	14.17308786	6.745563073	7.464987235	7.59612656
Zm00001d051885	32.89855576	31.78465894	27.85890758	24.46250215	29.64154543	23.83547398	24.45076314	22.4200009	21.88239172	27.14165009	25.29608936	34.0537876	14.75173899	13.84808964	17.02357519
Zm00001d051886	0	0	0	0	0	0	0	0	0	0	0.007036679	0	0	0	0
Zm00001d051887	4.448446794	4.063594759	2.693392631	7.38705215	6.15133473	6.158649897	4.265033941	3.546404671	3.356007914	3.000151624	3.606193366	3.041509855	6.883435672	5.430290294	3.494610416
Zm00001d051889	10.47925609	8.724158068	12.35804638	6.986606569	15.00292187	8.941035802	11.34384478	11.83914589	10.7573814	2.363631505	3.016638618	2.001319533	1.266555307	1.428627225	1.428260897
Zm00001d051890	1.283005794	1.26279579	1.668441679	2.076962895	2.440659217	2.706509854	2.720388641	2.264171265	2.797845208	0.199212587	0.471444401	0.207070351	1.045892152	0.959384295	1.208275254
Zm00001d051891	0	0	0	0	0	0	0	0	0	0	0	0.015857982	0	0	0
Zm00001d051892	0.168413751	0.286982829	0.270865431	2.989957328	3.015362907	2.888618441	1.389116256	2.293481214	2.248056399	0.587507301	0.599647464	0.186561111	0.753841582	0.857944963	0.99645337
Zm00001d051893	1.390593322	1.145467942	1.239661141	4.383284018	6.355102963	4.111804112	4.771882625	4.669399789	5.267977657	0.979159289	1.346633199	0.597975224	1.95007265	1.685220736	1.689118972
Zm00001d051894	0.351671612	0.184554874	0.291372343	0.091372829	0.154459647	0.233374831	0.205464141	0.265022447	0.560206981	0.161671044	0.036955765	0	0.114780116	0.016063115	0.135526792
Zm00001d051895	0.029527503	0	0	0	0	0	0	0	0	0	0	0	0.033042224	0	0
Zm00001d051896	2.530726797	1.003046779	1.440631144	2.483034449	11.29801086	4.032800747	6.04872467	6.775140196	7.25707527	9.616601788	5.188697107	3.813049132	1.396178326	0.591715268	1.831223534
Zm00001d051898	46.2271183	42.14561245	40.11294971	87.83209446	96.5996731	107.3205439	89.99245299	78.84721435	81.11491554	52.27524716	66.98435109	62.68431766	67.5915467	72.45705942	75.51090905
Zm00001d051899	1.156105988	1.314748919	1.102020797	2.617719022	4.052378189	3.094051503	4.262579645	3.911322257	4.485038629	11.26958673	7.28943371	8.753397578	1.343961267	1.673412636	1.557222864
Zm00001d051900	39.60447338	41.35366642	42.82369926	16.47147147	26.27917067	22.07600885	22.00932909	22.72173534	22.95391339	7.667574424	18.18258502	8.766792637	10.22146975	10.28641124	8.980800824
Zm00001d051901	4.740940278	2.761854548	2.855606729	0.742779678	1.854892137	1.011581248	0.98854189	1.497468667	1.139330564	3.770977097	2.440891718	3.156327143	0.814155494	0.689990328	1.25194551
Zm00001d051902	43.29393988	43.8542291	38.88464139	30.32836582	35.17246867	31.14597502	30.8576828	31.15358302	31.89356674	33.35575938	37.40660649	31.88487079	31.04202376	31.90720472	38.28676078
Zm00001d051905	0	0	0	0	0	0.044515966	0	0	0	0.075168979	0.01145506	0	0	0.029874193	0
Zm00001d051906	0.044100755	0.129605148	0.082212821	0.577505754	1.104075065	1.386756102	1.537363341	1.196448113	1.377841019	0	0.176106144	0	0.526401712	0.475390492	0.722308616
Zm00001d051907	0.081619307	0.282699503	0.114116304	0.29265217	1.156113167	1.099943006	1.215995051	1.267084187	1.723789515	0.154778911	0.064327853	0	0.262587048	0.301974583	0.353861464
Zm00001d051908	2193.326724	2057.020482	2351.780057	2055.171915	2223.675316	2695.754088	1953.038652	1736.273015	2163.965264	98.59659367	303.6116407	76.52020809	487.1097341	432.5009611	323.4636716
Zm00001d051910	11.70074916	11.87399815	10.97725351	12.24777161	14.01077715	12.81237031	14.37362952	13.83946396	15.51761541	14.33528007	15.70609263	12.39085024	10.90630877	10.80639538	10.48194297
Zm00001d051911	6.89652376	8.048894684	5.869285454	10.93828582	10.76633497	13.31665064	12.0878821	9.547165737	9.233363929	7.327429795	6.8888561	5.771261904	13.14899341	11.95663887	12.55581644
Zm00001d051912	18.2141858	16.73858928	17.02225047	12.46258543	23.72066388	13.66513198	20.09481969	24.40467339	22.66174647	34.54196318	42.4209687	36.01600308	17.65071362	16.16688336	19.63722715
Zm00001d051913	7.548562015	8.859076719	7.439424785	6.414409131	7.899445162	6.507660137	8.171067882	8.085648532	7.539715981	5.610600713	6.508752606	3.244862222	6.453836713	4.719296211	5.477522343
Zm00001d051914	0.197276103	0.074540994	0.159363959	0.147620518	0.272937217	0.120845109	0.265094697	0.166509053	0.145977688	0.068019067	0.186578621	0.262240217	0.220758294	0.140569644	0.319309335
Zm00001d051915	0.390075968	0.216406888	0.530957805	0.984554647	0.85663719	1.507649462	3.771233587	3.236406596	5.291790369	0.217753433	0.1815339	0.154324448	2.946425851	4.917572198	3.661536627
Zm00001d051916	2.484130598	2.607820471	2.204339504	2.230267817	2.228088654	2.646953076	3.66747458	3.787391978	3.087626848	1.580468244	1.623044734	1.164329761	3.351577636	3.28863344	3.248925599
Zm00001d051917	0.576071298	0.55937331	0.607951686	0.389328267	0.606398648	0.532281742	1.045434245	1.136988723	0.742207886	0.013315597	0.223209169	0.014260238	0.421358362	0.313990799	0.94507445
Zm00001d051919	0	0	0	0	0	0	0	0	0	1.325263517	0	0	0	0	0
Zm00001d051920	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051923	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051924	4.105714848	3.693687888	4.724624535	7.703281204	5.71520124	7.718085253	6.498238759	6.146724016	6.920989312	2.446740966	5.259619702	1.844918262	6.91189774	6.906033595	6.320650483
Zm00001d051925	0	0.011978414	0.017729374	0.002965247	0.084586804	0	0.04445172	0.080271842	0.04691596	0	0.020987661	0	0.007981852	0.002606415	0.002748837
Zm00001d051926	0	0	0	0	0.024018475	0	0.021299783	0.021979195	0.022480564	0	0	0	0	0	0
Zm00001d051927	2.321328451	2.034479207	2.273396798	4.389284736	6.216049015	5.556832571	5.512443736	4.669289072	4.432787266	0.649150987	2.009968562	0.438452099	4.548864556	4.268565539	4.959413646
Zm00001d051928	5.878098631	6.275655628	6.093274524	18.62028929	13.8199689	17.04240488	12.20386376	12.48623527	13.04441286	2.11536653	3.913069133	0.658023968	18.4832673	20.52678645	20.08014646
Zm00001d051929	4.919491261	3.843762136	7.598967765	17.74157441	29.09876084	14.75769989	15.71697541	19.93054362	14.54377432	1.373288903	3.766978284	0.667783355	5.703829373	4.118443668	7.622881805
Zm00001d051930	0.073948527	0.12806536	0.086159482	0.979894821	1.412851477	0.973918434	1.042306806	0.880505275	0.740992221	0.133858213	0.431288025	0.030718808	0.744756986	0.577587926	0.737390827
Zm00001d051932	0	0.015491651	0.007643117	0	0	0.015068945	0	0.007415383	0	0	0	0.006812583	7.976166961	5.373166306	3.320429256
Zm00001d051934	3.882161897	3.698811731	7.19555057	0.344342476	11.41024559	0.205007737	14.16618038	26.63329623	29.92363934	19.18951932	71.7659479	24.68143452	0.018725275	0	0.038692318
Zm00001d051935	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051936	0.323154577	0.407014386	0.022312081	0.291073156	0.922574389	0.362916192	0.293693654	0.173178161	0.188199075	0.012380096	0.169795121	0.019887554	0.391755378	0.521539721	0.186805395
Zm00001d051937	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051938	0.278058995	0.245151433	0.564435144	0.092475498	1.148001692	0.397437034	1.689542077	1.788137896	1.82892724	7.618652034	1.63632613	2.546308057	0.16595037	0.223533225	0.128589658
Zm00001d051939	2.071399079	3.120073052	2.826521203	4.270450714	6.505932033	4.371140236	4.366653019	4.189911471	3.889262694	0.501397697	1.183441539	0.59940621	3.954727145	3.04001165	4.183603937
Zm00001d051943	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051944	6.689288768	9.79427635	8.209549424	33.42250427	15.2043558	32.16652899	11.62694555	10.48548751	10.10594161	0.230640801	0.210885194	0	18.33954587	15.49103273	11.98728255
Zm00001d051945	0	0	0.006793542	0.020452023	0.108039922	0.046878818	0.01277476	0.072502342	0.141570925	0.701121292	0.379125371	0.750860533	0.006116973	0	0.006319797
Zm00001d051946	0.777399287	1.142326825	0.566029687	2.16922035	2.483242688	2.79953903	2.128754837	2.324479766	2.358134979	2.420486448	2.891464938	2.566105624	1.234604388	1.360096553	1.425337447
Zm00001d051947	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051948	23.95910536	24.48834438	21.53163715	16.93561107	16.55472724	15.35493413	17.07798918	15.77062618	16.77860683	12.47842925	16.01074396	13.01884655	14.25352003	13.26946445	14.31903915
Zm00001d051949	0	0.014469722	0	0	0.007568847	0	0	0	0	0	0	0	0	0	0
Zm00001d051950	0.030886719	0	0.004798263	0.09630144	0.081395567	0.075680913	0.144364525	0.069829411	0.023807432	0.053247347	0.063292358	0.034214905	0.133932517	0.186225082	0.214255572
Zm00001d051951	11.36404793	11.52927147	10.73007185	11.1276818	15.11026891	12.25138002	20.26723753	19.58252743	18.09152738	21.84236976	13.3911843	21.30074058	15.38485684	17.16341554	18.39425582
Zm00001d051952	0.109021004	0.283778874	0.16258995	0.145030685	0.057460467	0.222609412	0.042463681	0.210327225	0.134453134	0.020047725	0.045826328	0.088563582	0	0.01593502	0.075625895
Zm00001d051953	0	0	0	0	0	0	0	0	0	0	0	0.009189546	0	0	0
Zm00001d051954	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051956	0.007393853	0	0	0.027663878	0	0	0.051838303	0	0.063830698	0.805590023	0.531461482	0.876391487	0.008273959	0.121581017	0.008548303
Zm00001d051958	0	0.008942597	0.00882402	0.013282397	0	0	0.004148231	0	0	0	0	0	0	0.003891687	0
Zm00001d051959	0.269953843	0.355186787	0.053919551	0.036072292	0.044462974	0.0177177	0.087309581	0.017437655	0.023780568	0.013296816	0.012157873	0.02403021	0.010788822	0.018495805	0.066879318
Zm00001d051960	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051961	0.618843784	0.867943424	0.107054334	0.183760743	0.071685053	0.105532585	0.052975748	0.065598658	0.086664419	0.037515939	0.060029374	0.022599793	0.058343002	0.114308869	0.044552944
Zm00001d051962	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051963	0.145930268	0.16848307	0.123931087	0.139531723	0.099347011	0.277116045	0.193255455	0.146632238	0.080987622	0.063732934	0.070542054	0.04580223	0.234064273	0.101316793	0.084357652
Zm00001d051964	0.809433409	0.646280273	0.919141758	0.633935832	0.631675314	0.572569451	0.684032666	0.508329399	0.653619922	0.28905287	0.464792825	0.245512295	0.458282547	0.567785135	0.370426961
Zm00001d051965	2.238409494	2.194776139	1.602700096	2.544801476	2.704767085	2.51236982	2.277010341	2.295513683	1.90497615	0.54594743	0.784799806	0.235076827	2.000228295	1.373425139	1.811770697
Zm00001d051966	0	0	0	0.138058056	0	0	0.021558484	0	0.022753607	0	0	0	0	0	0
Zm00001d051967	1.622981681	2.380835198	1.637367085	4.238729385	4.063181281	3.590770646	3.949086787	3.142625817	3.273182676	1.632685615	2.082749003	1.290232854	5.053222088	4.416526667	4.889647169
Zm00001d051968	0	0	0	0.014424848	0.015240149	0	0	0	0	0	0	0	0	0	0
Zm00001d051969	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051972	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051973	0	0	0	0	0.054670277	0	0	0	0	0	0	0	0	0	0
Zm00001d051974	0.247341403	0.070801685	0.055890295	0	0	0	0.026274403	0.027112494	0	0.108539637	0	0	0	0.036974227	0
Zm00001d051976	0.92681725	1.249487862	1.006603107	1.738913947	1.321493635	1.341928479	1.273540679	1.2945003	1.008943801	0.172430364	0.555240171	0.204735056	2.886346662	2.604083295	2.796654621
Zm00001d051977	7.382864315	7.704674366	6.529157985	9.713881359	27.5163622	9.415596551	20.78356516	27.4356021	30.67762554	20.42475368	29.4407702	9.337927507	9.878364872	9.17974079	9.386857823
Zm00001d051979	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051980	15.25360653	12.93987256	12.75383241	9.707713748	26.48803428	13.0037411	22.94258498	25.36141896	24.40097813	21.68311831	24.2458521	27.39520322	6.851797279	7.659255713	9.544020139
Zm00001d051981	6.045411489	3.775739632	6.826650598	15.59873111	39.73311338	22.79635109	35.47905987	35.78626461	31.94488888	11.8662744	11.84348431	7.449285586	3.673881605	3.330970843	3.889936524
Zm00001d051986	4.487702857	3.358600182	3.976879011	6.391785856	7.404363401	5.880523081	5.411077025	5.803260327	5.662920378	6.888940082	8.267261416	7.363248673	3.682714639	2.937486832	3.564203102
Zm00001d051987	2.833367906	3.43908287	2.603218567	4.384995812	4.25087581	5.143885314	5.168329601	4.183112859	4.128612471	6.964184789	4.327654105	5.023953946	3.568266391	3.628835767	4.421735387
Zm00001d051988	7.336656947	5.574378502	5.055681996	5.341196326	15.16873592	7.095727445	9.12349981	8.939836173	8.422855292	1.233958474	2.203874486	0.475739451	4.39199203	3.289006985	2.986002018
Zm00001d051989	0.238056312	0.171333032	0.366299248	0.494822509	1.583307439	0.958283679	1.245136545	0.929468444	1.244260072	0.437758535	0.042885235	0	1.116312088	0.646200753	1.009160472
Zm00001d051990	0.311991316	0.388219829	0.378400503	0.473485609	1.258047706	0.5940715	0.487546577	0.824899674	0.523845972	0.129604657	0.137463864	0.016655895	0.65619295	0.671669654	0.782250804
Zm00001d051991	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051993	0	0	0.036073566	0	0	0	0	0.139994872	0	0	0	0	0	0	0
Zm00001d051994	0	0.04555283	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d051995	0.038866337	0	0	0.012118102	0.883408733	0.119041451	0.204368916	0.339763675	0.191731889	1.35347792	0.428852353	0.419780048	0	0.010651661	0.078635881
Zm00001d051998	0.478796747	0.429257723	0.559038335	1.189106519	1.869019409	1.604251756	1.646175669	1.791854535	1.827623566	0.662242647	0.845637282	0.296528893	1.111723437	1.222184543	1.103918243
Zm00001d051999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052000	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052001	3.600995396	3.522254417	3.456055786	4.94653347	3.363019564	4.065803097	3.828095659	3.407117463	3.645123411	1.746108884	2.413185437	1.146812015	5.147995841	5.305962182	4.502622746
Zm00001d052002	6.532653328	10.27891405	10.49560913	14.00380989	10.00492575	13.45498149	8.806073553	8.196534965	7.5661732	4.439515973	6.638064201	2.265363202	21.82480088	22.75017704	27.18949943
Zm00001d052003	11.22611767	8.002549892	13.24205993	32.74255862	67.11690074	31.79273907	35.28645446	55.71553763	37.83690226	3.593751019	11.29818801	1.996842851	10.32552248	8.921697565	16.03278848
Zm00001d052005	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052006	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052007	29.58389707	31.25962797	32.56080002	22.71504718	22.19948636	21.58655792	23.36384948	25.88103902	22.59040388	24.03434914	18.32554552	12.33255091	37.54041523	36.1735604	42.62935633
Zm00001d052008	2.588191182	1.514944704	2.028734299	0.622806677	5.61783265	2.019632194	5.402330955	5.017834672	3.463472595	8.686873792	8.34230682	12.776949	1.886781076	1.754160344	2.812267426
Zm00001d052009	6.681887081	6.288256068	7.815521162	6.587768307	7.664368266	6.480214695	6.684032196	6.813176839	6.767978373	2.539295509	4.055245343	2.429673781	2.960493413	3.094180714	3.391388285
Zm00001d052010	13.80840349	15.2417636	11.74381589	14.48409081	18.25484437	17.73876871	20.96140812	24.11095635	16.07097175	29.82729376	26.21535707	30.74459571	27.11783065	25.36242364	30.81869042
Zm00001d052011	0.290094922	0.087484305	0.238661249	0.636960919	0.398393714	0.595680432	0.864149877	0.487733182	0.332572599	0.005635052	0	0.009052225	18.27961802	19.84665121	18.95658214
Zm00001d052012	0	0	0	0	0	0	0	0	0	0.012714016	0	0	0	0	0
Zm00001d052014	2.118078495	1.649140761	0.478609852	0	0	0	0	0	0	0.743572949	0	0	0.043094506	0	0.066785121
Zm00001d052015	10.15662476	12.19208095	12.69671648	4.308975396	3.846095687	4.488329526	3.306338802	3.375889423	3.012101711	1.273423638	2.741852101	0.659885513	15.19855922	17.46837556	17.97523725
Zm00001d052016	17.02455545	12.88715343	13.03685076	2.25190923	3.002309388	2.896862476	3.164826188	2.384535303	3.870474461	4.980535789	5.583981295	3.23841928	0.384869176	0.848314341	0.447334304
Zm00001d052017	0	0.151043594	0.037260197	0	0.039504071	0.036730553	0	0	0	0	0	0.033211343	0	0	0
Zm00001d052018	5.209147667	5.730323796	4.945246027	7.624059705	6.453744734	9.069042278	4.043495314	4.092061502	4.359036189	8.737629859	6.942666332	4.99887418	13.14265656	12.54187158	12.36194407
Zm00001d052019	15.14969847	14.79360081	14.8242852	12.24698451	13.2157731	12.67924956	19.03543655	18.69625446	18.83009858	35.39381708	36.28657745	54.91604239	28.67712128	29.64362169	26.45204997
Zm00001d052020	10.28655856	9.694498235	10.0094059	24.56445057	24.47520226	26.85356755	23.43214338	21.79480575	25.12089869	12.38713953	15.01578063	13.04381078	4.91698355	4.235667456	4.066372233
Zm00001d052021	0.124110364	0.048097681	0.017797468	0.196457963	1.434063982	0.567271584	1.043049759	0.863358741	0.629911055	0.092167736	0.120390116	0.190362224	0.02136669	0.1726841	0.342164926
Zm00001d052022	0.004127788	0	0.102600542	0	0	0	0	0	0	0.0056929	0.041642185	0.009145152	0.036953019	0.004525026	0.014316859
Zm00001d052025	26.84208281	20.73028903	33.62593952	43.95154904	68.75877188	38.09606525	47.88274656	59.55930871	47.71609906	4.855441099	21.47658947	2.989281372	15.85849666	12.28336988	22.16945928
Zm00001d052026	0	0	0.019155186	0.173000596	0	0.075531599	0.144079702	1.189404012	1.40661928	6.41958897	10.57326531	2.407391798	0.413940467	0.777222986	0.302929882
Zm00001d052027	0.011383209	0.057348775	0	0.709832218	0.854945721	1.129625065	0.864583182	0.960789122	0.884435178	1.240246422	1.421104574	1.021393983	1.108221339	0.686327035	0.789632576
Zm00001d052028	1.592248814	2.027769753	1.543426425	2.694527649	2.261521434	2.723602297	2.551392615	2.865375562	2.412489782	2.454831022	3.019047294	3.204217021	3.432868076	3.417801177	3.926438098
Zm00001d052029	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052030	3.896970265	3.817526587	4.676979043	5.201612145	3.767220071	5.398416133	3.601220812	3.255418724	3.777300168	0.816723032	1.63003843	0.931093233	3.776539993	3.343604438	2.907916054
Zm00001d052031	4.145675101	3.587285357	3.284072349	5.032168196	4.336669117	5.466730628	5.454371412	5.017819684	6.010428568	3.38253154	4.050570034	5.258462679	3.930877365	4.215061884	3.091646111
Zm00001d052032	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052033	0.342048073	0.074045609	0.099632426	0.10664688	0.028168657	0.065477452	0.118655943	0.038665511	0.098868782	0	0	0.053283562	0.023922674	0.023435319	0.030894863
Zm00001d052034	188.6116427	198.861217	216.3576904	424.6689692	432.9205413	410.5939573	418.2847514	470.645002	423.5785199	441.1222615	606.4646724	543.6844712	391.0436424	362.5018075	345.0388451
Zm00001d052035	0.046406089	0.058448641	0	0	0.048917465	0	0.097605928	0	0	0	0	0	0.010385981	0.010174397	0.075112481
Zm00001d052036	0.79910846	1.142490881	0.483146439	0.377096964	0.056915818	0.105839698	0.227130383	0.078125101	0.133178697	0	0	0	0.555871476	0.023675966	0.124848437
Zm00001d052037	1.348648752	0.977292876	0.321444725	1.543731598	1.168466357	1.720181138	0.453339967	0.935600867	0.820236794	0	0.046594229	0	3.059709949	3.037882439	3.054366386
Zm00001d052038	2.662738609	3.732949387	2.163296769	6.55956295	3.880479719	8.553238847	6.167848264	5.014523834	4.270224131	0.025953043	0.261030296	0.031268491	11.20279211	11.66563583	11.01946843
Zm00001d052039	0	0	0	0	0.011851221	0	0.010509761	0.010844998	0	0	0	0	0.010064835	0	0
Zm00001d052040	5.464069221	4.931646665	6.268395056	4.910890356	8.453104103	5.013898778	6.462312681	8.02880787	3.492126445	0.823757133	1.729565702	0.318570943	6.485792934	5.626145169	10.00011734
Zm00001d052041	0	0	0.020821875	0	0	0	0	0	0	0	0	0	0.018748223	0	0.019369868
Zm00001d052042	0.066044608	0.30896702	0.152435091	0	0	0	0	0	0	0	0	0	0.010558005	0	0.043632331
Zm00001d052043	0.062729009	0.10689239	0.128404371	0.087436769	0.09237875	0.05198786	0.088389786	0.111230744	0.034130411	0.12213691	0.104695534	0.077663449	0.111487407	0.113261222	0.147179627
Zm00001d052044	1.146549171	1.334057558	1.350295248	1.511636468	1.704985603	1.598659177	1.90115871	2.718872061	1.838217044	0.233427097	0.654068345	0.169346019	1.973415163	1.705775842	1.716925273
Zm00001d052046	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052047	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052048	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052049	0.473400545	0.632386086	0.19611453	1.216591345	0.77499277	0.843607914	0.419067076	0.812976519	0.530758331	3.50190423	2.785875284	4.433662048	0.577909539	0.393150228	1.011704655
Zm00001d052050	19.47115134	17.91372473	19.56214605	19.29383865	22.02497786	19.02329021	19.67368167	20.95530228	21.71559252	10.77061264	17.39861103	8.539468714	14.21768787	14.35208303	14.26571787
Zm00001d052051	0.066472774	0.100467246	0	0.022107189	0.005839175	0.04343373	0.06213875	0.021373609	0.005465291	0.006111794	0.039118007	0.088362627	0.009918023	0.043721874	0.035864079
Zm00001d052052	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052053	5.273644069	6.735538113	6.297463911	4.133774728	3.104634418	4.43054115	3.7926317	2.432438018	2.657704167	7.747882843	5.348230646	11.47851937	4.769687275	4.945324348	4.738070698
Zm00001d052054	0	0	0	0	0	0	0	0	0	0	0	0	0.054520847	0.021364058	0
Zm00001d052056	14.58737035	13.85210092	17.1611613	28.25504035	33.28102236	28.36345426	29.58628753	29.87363227	29.09228053	2.435448141	9.292448859	1.416873958	16.66051193	15.44294605	18.81961049
Zm00001d052057	6.890557102	7.68313375	6.339005704	7.192280634	6.515252678	8.324626991	8.503069809	8.530685731	8.502339312	11.41461177	10.35196432	17.53951569	5.45781811	5.253375892	5.233088414
Zm00001d052058	3.275906586	2.839189549	2.801542487	0.364060567	0.897487504	0.715265429	0.644299474	1.192821079	1.320033117	0.603893129	0.777123196	0.287437675	0.362954917	0.337782737	0.506235974
Zm00001d052059	4.769741612	4.757537557	4.052584609	0.644117529	1.000769796	0.508677346	0.615327053	1.428647673	1.336344637	3.86874317	4.112026959	3.578559135	0.951909762	0.721590841	1.276172974
Zm00001d052060	649.2909176	656.1670962	608.861086	96.51546814	101.17527	120.4659277	122.3981831	128.3142075	142.9600104	269.7182152	250.8723782	392.1012247	42.43164459	34.90323503	31.68639146
Zm00001d052061	14.93549263	14.46856682	17.20490763	8.378162504	10.85828919	8.349924637	11.60341246	13.24849331	12.53015042	20.53510227	19.34865003	19.47315491	6.726474583	7.093415058	7.846432977
Zm00001d052062	9.084217378	9.138739908	9.085333364	9.841252445	10.93004047	10.38666265	12.82259906	12.08288452	11.82840562	1.712069611	3.199608842	1.204585238	7.968742476	7.201582346	7.00914707
Zm00001d052063	0.324000341	0.408079629	0.405942306	2.02368105	3.821436574	1.80722813	7.057861488	10.1606134	8.027380582	7.629144416	11.6393999	9.763597386	1.668396754	1.406283973	2.177486634
Zm00001d052064	1.325044283	0.981041496	0.873455145	0.10049216	0.300820784	0.340028223	0.533540723	0.734079203	0.563118253	0.12965049	0.08467517	0.004958865	0.621159191	0.628134086	0.36228122
Zm00001d052066	9.164096528	4.733251035	9.682342875	3.814878194	14.90461537	7.63270953	12.47350282	10.73367535	8.437910321	6.216085535	5.290040638	4.190634586	4.638464398	3.161617194	3.579763829
Zm00001d052067	0	0.134935708	0.057889778	0.052283315	0.098201602	0.102720402	0.250372232	0.292057446	0.097658327	0.051393214	0.205586119	0.046439302	0.505607947	0.525945257	0.479290383
Zm00001d052068	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052069	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052070	3.350323827	3.331889096	3.241700185	5.020979736	4.963312328	5.230914786	4.700707973	4.463787763	5.098266233	2.801747059	3.318425925	1.942812992	3.882030732	3.838455693	3.514978629
Zm00001d052071	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052072	3.04982457	3.479927705	3.036721591	3.90322239	3.597616472	3.946141063	2.278038034	1.851472665	2.052520791	0.098916771	0.291887537	0.041531008	0.848196689	0.984592175	1.221195448
Zm00001d052074	31.17356218	29.71731977	31.7474041	27.42971988	31.41187807	31.92836801	26.25167543	28.16479854	25.19894313	27.10615975	27.13927498	26.67948159	15.75858291	15.40878242	15.89682442
Zm00001d052075	15.93782775	14.96222401	17.35807534	26.2568147	47.60804887	24.65173707	31.49953105	37.72182937	30.51670269	1.878075094	7.106077864	1.190907406	10.75710608	7.866642363	12.12883744
Zm00001d052076	2.2035337	2.451098891	2.232164247	3.337221864	4.687769552	4.035785842	4.860671029	4.490189185	3.990100104	7.755553431	5.8412056	5.739771078	3.221224887	2.620038466	2.807734706
Zm00001d052077	0	0	0.065855232	0	0	0	0	0	0	0	0.016705295	0	0	0	0
Zm00001d052078	37.79912869	40.90927394	42.87613248	44.31851387	51.64018822	42.35128398	44.92573655	44.37268879	45.5224868	32.22844398	39.81986599	33.80261615	40.21740788	38.82727817	38.83573412
Zm00001d052079	156.4428555	165.7730478	151.0015008	19.16662157	19.96926206	18.55862504	24.60404645	24.26173691	35.65742818	176.65469	219.0479523	221.1944226	15.38522708	13.04742995	11.92457545
Zm00001d052080	0	0	0	0	0	0.017875274	0	0	0	0	0	0	0	0	0
Zm00001d052081	4.032382429	4.197659283	3.985013802	3.58695827	3.981740809	3.178406738	3.42885626	4.135744042	3.768729944	1.88950878	2.652758125	1.576866079	2.41384367	2.029141376	2.072617148
Zm00001d052082	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052083	0.063916271	0.034501192	0.031206737	0.321701319	0.776018523	0.330004607	0.28540784	0.346808136	0.495480789	0.261304975	0.411638109	0.32114465	0.173702017	0.212704186	0.116122179
Zm00001d052084	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052085	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052087	17.00945844	16.80718818	17.24727379	25.67719102	42.25150569	30.59957872	34.46302143	34.45228437	35.51405649	18.01240791	25.80012459	10.72210137	23.8961614	22.98492315	24.43982395
Zm00001d052089	0.074300184	0	0.055404293	1.343627518	0.793001284	1.101437494	0.963699403	0.501699016	0.641429136	0.030741661	0.112433899	0.106998284	0.191231872	0.236206366	0.128851729
Zm00001d052090	0	0	0	0.217947108	0.070850959	0.148222408	0.094246826	0.097253075	0.082892935	0	0	0.014891222	0.135385396	0.427354685	0.046624814
Zm00001d052091	0	0	0	0	0	0	0	0	0	0	0	0	0	0.012743951	0
Zm00001d052092	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052093	33.40373052	35.01993787	35.13434863	44.16295654	30.85711276	39.65922045	46.37638168	37.88755869	36.72607058	5.894952314	8.526608492	4.662883114	26.82396892	26.70491456	24.2492126
Zm00001d052094	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052095	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052096	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052097	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052098	7.982603588	8.394539327	8.970484331	5.769735252	5.745468402	5.977433648	5.387295023	5.460236915	5.557054453	5.83673105	5.955710911	6.093506959	4.327236395	4.688659251	3.863506995
Zm00001d052099	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052101	1.81673185	1.613249552	1.803023062	7.530763372	5.493709531	6.004707984	2.443569705	2.01721101	1.595776173	0.216308438	0.29667071	0.144783676	15.16691786	19.45716266	24.61536124
Zm00001d052102	0	0	0	0.024184638	0	0	0	0	0.023915494	0	0.146722252	0	0	0	0
Zm00001d052103	0.031734526	0.095927408	0.118319288	0.720318226	3.019035346	1.298563169	1.557435357	1.844354452	1.526361413	0.017506857	0.016007302	0	0.127843034	0.153069409	0.880546633
Zm00001d052104	0	0	0	0.014554136	0	0	0	0	0	1.118578354	0.213382874	3.748927042	0	0	0.026983887
Zm00001d052106	0.383561673	0.327816057	0.187271691	0.990891637	1.082997375	1.795748636	1.264541201	1.304877056	1.300854279	1.60587702	0.587330056	0.637338322	0.429217829	0.510575298	0.776036865
Zm00001d052107	1.53395707	1.679743707	0.482115989	8.642083512	4.323058251	7.17553695	5.267666931	4.549106377	2.976840262	0.101407952	0.086327215	0.036512768	6.171058178	4.747329837	6.551556004
Zm00001d052108	2.839586275	2.086273829	3.386745931	9.120079705	22.06722545	11.22219909	14.99369118	19.28241769	13.87619402	5.642779799	9.115662623	3.991146749	7.354579191	7.204751227	10.81961228
Zm00001d052110	3.100412498	3.833032953	3.771558627	3.633379982	3.257284582	3.240300085	3.392546069	3.080600109	3.492553933	9.442214668	6.394939844	28.99626071	3.924917808	3.704060789	3.909763186
Zm00001d052111	49.92733501	51.99937216	43.85457589	10.49646691	12.82169267	12.67576529	12.34164804	12.13906589	14.86406829	26.35875685	33.59321922	40.19875796	9.094943681	9.459468367	8.15699782
Zm00001d052112	0.033142385	0.083485914	0.06864909	0.158446023	0.065504932	0.148881175	0.045181357	0.086584707	0.09537209	0.243780338	0.543316944	0.134616645	0.339967772	0.254322926	0.332081708
Zm00001d052113	3.058910982	3.922253198	2.689957474	5.860135126	5.478365839	6.196367139	5.619581172	5.659021321	6.046872221	6.259578299	5.493640207	6.257145833	7.680168551	7.796086457	7.239010859
Zm00001d052114	0	0	0	0.006279989	0	0	0	0	0	0.027778837	0	0	0	0	0.005821662
Zm00001d052115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052117	0	0	0	0	0.018686573	0.191120802	0.132571261	0	0.017490065	0	0	0	0.428486352	0.202105319	0.344317483
Zm00001d052118	36.36756038	38.19582532	25.69812716	44.52297348	14.25852472	44.30063614	31.4987013	16.09063215	16.91534294	5.855045873	5.802777437	4.998793968	79.10064483	69.955077	54.64245996
Zm00001d052120	0.589739502	0.675253714	0.266519996	0.200590234	0	0.032841436	0	0	0	0	0	0	0.119988625	0	0.030991788
Zm00001d052121	0	0	0	0	0	0.204257709	0	0.201029222	0	0	0	0	0.746270719	0.365533822	0
Zm00001d052122	224.142464	217.3377174	224.7903834	18.57355276	42.27994458	25.84316264	33.15739353	37.27399559	33.25732921	897.1944994	459.255774	994.1682067	37.48407549	39.34701525	33.2410893
Zm00001d052123	145.0214593	145.3925623	137.0864938	59.46941484	33.69784481	52.06144542	6.383215605	4.420106243	4.786870882	10.5476331	23.13151126	17.75602035	94.94431188	88.58179825	77.40028055
Zm00001d052124	0.965240534	1.045295423	0.756759392	0.506273603	0.3149899	0.132622623	0.374204363	0.603684586	0.389386212	0.391902932	0.557409016	0.209852737	0.449215087	0.415340971	0.338956709
Zm00001d052125	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052126	0.369770414	0.168179268	0.242541206	2.164897604	1.461680303	2.328016112	1.728306928	1.102262407	1.165408652	0.113327636	0.012952565	0.056890956	2.298805371	1.857878516	2.695656904
Zm00001d052127	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052129	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052130	0.010655677	0.120787784	0.052971628	0.053157194	0	0	0	0	0.013141405	0	0	0	0.02384809	0	0
Zm00001d052131	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052133	0.274759223	0.04943718	0.107319637	0.283924735	0.20170554	0.403941171	0.004586516	0.009465631	0	0	0	0	2.152250754	1.815809988	1.470308099
Zm00001d052135	2.141826648	1.262724446	3.058316956	0	0.600461878	0.167491321	0	0.329687924	0	0.188548855	0	0	0	0	0
Zm00001d052136	8.870883364	9.217974763	8.801923069	11.178758	6.839847704	6.47297287	12.29942333	16.01341348	13.51369242	122.7552281	126.8879958	174.4904996	6.740564023	5.99475468	7.617688373
Zm00001d052137	0.434870264	0.119813905	0.608015299	1.050805699	1.557858351	1.032252676	2.953598084	3.637709704	2.715097938	0.974606407	1.850800571	0.180648579	0.562670319	0.402232546	0.251384685
Zm00001d052138	1.915246314	1.937211211	2.270695937	3.488228952	3.240041518	3.558665481	3.771915997	3.49651113	2.941965603	1.567299689	1.284805386	0.884461741	5.782862766	6.228874443	7.837779973
Zm00001d052139	0	0	0	0.017075784	0	0	0	0	0	0	0	0	0.183858385	0.015009401	0.015829556
Zm00001d052143	0.039626765	0.04040338	0.056283726	0.256517394	0.45003561	0.330590186	0.315307341	0.277584036	0.232718054	0.333115989	0.142773206	0.133780516	0.116138059	0.204789756	0.202890341
Zm00001d052144	7.456155238	8.34082008	6.290155442	9.577116702	5.468035822	8.422081336	7.001737045	6.640522735	6.684380464	3.008758322	3.423519207	4.038499337	18.29315948	17.07017024	14.89781861
Zm00001d052145	2.787054125	2.653051556	2.771007256	2.495325292	4.762461588	3.026345334	3.208679696	3.339328334	3.372084599	2.678526651	3.166807743	2.463397933	2.00916576	1.897481363	1.458476221
Zm00001d052146	0.849273622	0.613099679	0.823789079	2.867528572	2.524669258	3.248316535	0.689822505	0.749290737	0.587560195	0.899892262	0.626904167	1.675059384	0.533131279	0.374672167	0.694497803
Zm00001d052147	14.26953737	13.4586783	13.01996837	7.006612483	7.71008818	7.124794939	7.103034722	6.896753957	7.039318835	14.65482566	10.88714424	12.99698665	5.831525964	5.870137241	6.522923755
Zm00001d052148	0.376272493	0.157972199	0.428663182	4.106118895	1.859228291	2.381757322	5.019616197	8.317814609	4.679154088	0.908148154	1.265311162	0.034734799	10.14055247	7.321575383	8.845454461
Zm00001d052149	5.843306133	5.716067899	5.552426309	5.623866191	4.549436074	6.177394352	4.667710544	4.676734445	5.201405848	4.219414914	4.079697504	4.928998346	4.253090125	4.571765384	4.033698559
Zm00001d052152	0	0	0	0	0	0	0	0	0	0	0	0	0.096948984	0.018994787	0.020032715
Zm00001d052153	3.4521167	3.406244787	3.878620116	7.391948004	8.133982549	6.484563618	8.211364786	8.675847857	8.249293147	3.997444569	5.173749599	3.829340298	4.675880729	4.191555712	4.82818593
Zm00001d052154	0	0	0	0	0	0	0	0	0	8.999550027	0.176689681	0.953452442	0	0	0.057854363
Zm00001d052155	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052156	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052157	0.009485678	0.032854929	0.020630451	0.032532848	0.118738342	0.037769075	0.188428259	0.225891986	0.204723263	0.078493886	0.080741777	0.178632668	0.050420199	0.020797067	0.189176242
Zm00001d052158	0	0	0	0	0	0	0	0	0	0	0	0.010408503	0	0	0
Zm00001d052162	0.407628534	1.026819295	0.896295744	1.89663587	4.152276517	2.746704008	1.978534851	2.268494893	1.102114806	0.454074077	1.225770188	0.364715393	1.614067175	1.048394597	0.779415045
Zm00001d052163	14.18693097	13.46764683	17.06912851	25.14867244	16.59937339	23.27342841	14.94182209	13.3245697	13.35594708	1.785335577	2.12346292	0.384730018	41.32610551	38.5113378	40.40885441
Zm00001d052164	0.206418166	0.126659088	0.052622996	0.607284409	0.181324144	0.26585924	1.471936196	0.676479288	0.48955932	0.065696465	0.0467205	0.023452377	3.334527103	3.092532176	3.59807104
Zm00001d052165	0	0	0.007524646	0.052857037	0.031911172	0.066759163	0.070747728	0.014600882	0.007466972	0	0	0	0.135505312	0.099558592	0.265996837
Zm00001d052166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052167	0	0	0	0	0	0.120845109	0	0.023787008	0	0.081622881	0	0.087413406	0	0	0.228078096
Zm00001d052168	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052170	4.137347108	3.867236845	4.84125592	6.188809396	18.45521216	8.686142482	16.42421984	17.38191326	14.06055239	49.54112606	36.95932856	45.59115773	12.88993052	10.7437754	11.47427373
Zm00001d052171	0.775672847	0.814135684	0.5824218	1.168924177	0.702668155	1.029497483	1.510622879	1.870569784	1.056267634	2.072700177	3.52540966	1.933324151	0.904169607	0.72631484	1.083613593
Zm00001d052172	0	0	0.054985922	0.055178543	0.757864506	0	4.394372623	3.467591439	2.29170798	202.9493499	48.20466989	257.895431	0	0	1.483393366
Zm00001d052173	0.020808575	0.10483391	0.18102671	0.077854657	0	0	0	0	0	0	0	0	0.442423813	0.364977454	0.577381263
Zm00001d052174	18.87519291	22.20304897	17.78561275	64.25250381	38.94192891	66.74416255	33.25451783	33.20409707	24.8026048	3.439035418	7.929517412	2.149756289	95.47945003	79.28431496	96.79023061
Zm00001d052175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052176	0.044750357	0.01409081	0	0.237195489	0.235860639	0.137063274	0.169945074	0.296773091	0.262150603	0	0.028215818	0.049572414	0.450693773	0.662268316	0.400965773
Zm00001d052177	9.799206884	10.2038339	7.625433224	10.14095072	20.01539592	18.61014682	17.61060457	19.60888963	19.87252471	14.45952002	27.86923642	11.94392778	7.632609786	5.844559301	8.781006705
Zm00001d052178	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052179	0.011307886	0.014242324	0	0	0	0	0	0	0	5.676739716	0.142596068	0.989582654	0	0.049584406	0
Zm00001d052180	16.60503902	16.29987438	17.23125809	20.25404168	19.62293718	19.93292686	28.07777714	33.11244732	34.8687506	27.52238186	25.06165499	18.36956296	20.16475511	20.91307392	20.32544787
Zm00001d052182	1.531325797	1.696335748	2.545158061	4.233780377	7.438920428	5.628250879	5.885466244	8.097598146	7.372168759	5.368935003	10.39975637	4.741557926	3.220747315	2.892206205	2.559645679
Zm00001d052183	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052184	2.544861725	4.397918671	3.769570563	21.94009956	13.68585189	22.11465498	15.11039772	11.23936106	8.612683608	0.408114404	0.261210069	0.245850203	163.7474643	189.3310914	177.6272213
Zm00001d052185	3.174447224	4.308435373	2.63338066	15.04627517	30.50044133	17.74536304	24.83248889	24.72895127	21.74931888	1.471942733	4.722845373	0.329131344	6.155292963	3.419941546	11.00124294
Zm00001d052186	40.96140742	35.97165093	31.80872463	24.67150265	31.24370491	30.66097959	28.2047531	26.9064981	28.80091928	27.74656099	28.89325938	31.49698459	17.605872	20.22820227	20.3316293
Zm00001d052188	4.32582327	4.921541343	4.33007977	6.521053781	7.891144527	5.430968592	7.59400831	7.036622866	7.071311734	10.56717836	14.6088554	10.49369394	2.420367572	2.052308738	2.830891714
Zm00001d052189	0.492953146	0	0.081685816	0.163943941	4.763279318	0.214732463	6.412975409	3.751256833	4.174575886	64.42085874	34.93559096	62.0094099	0.098067627	0.012008723	0.645910589
Zm00001d052190	0.025601562	0	0	0	0.674676267	0.125461664	0.269238825	0.401305526	0.031573826	1.094572004	1.033100499	0.935888189	0	0	0.029598899
Zm00001d052191	0	0	0	0	0	0	0.016588616	0	0	0	0.268533716	0	0	0	0
Zm00001d052192	0	0	0	0	0	0	0	0.0102324	0	0.046815358	0	0.122207848	0.569778389	0.809347699	0.363013685
Zm00001d052193	1.130031801	1.266989421	1.104196892	2.273906234	2.520152235	2.580375797	3.008210855	2.679238065	2.77504239	3.40223094	3.144194109	3.025942033	1.686672978	1.505399487	1.308383814
Zm00001d052194	0.209520826	0.296878788	0.813728437	3.658273999	9.559077018	4.139153344	16.40328085	19.38969211	12.37077013	4.623420196	6.291559775	6.803362748	0.468921065	0.387591897	4.375363686
Zm00001d052195	0.306644499	0.257479921	0.063516448	0	0	0.156533945	0	0.030811956	0.252118475	0	0.096672138	0	0.257358781	0.112051489	0.029543574
Zm00001d052197	5.985027027	6.576721614	6.302035738	6.027173854	7.158125043	6.379455407	6.180108418	6.236983735	6.473398246	3.376433229	4.86575811	2.917335253	4.405298956	4.088419504	4.231973612
Zm00001d052198	8.195337157	9.122324207	9.538072336	9.29757459	8.454156401	9.387374599	7.289600687	6.581856399	7.559799769	4.131738444	4.807868371	3.578336394	5.313070345	4.8179865	4.727478447
Zm00001d052199	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052200	2.004250407	2.116328347	1.911112579	8.333842911	9.840744896	11.86992208	17.99377369	15.81252036	14.31937346	3.41949582	5.463375726	1.870916162	3.567244775	3.537189373	4.504531591
Zm00001d052201	0	0	0	0	0	0	0	0	0	6.70097254	0	0	0	0	0
Zm00001d052202	0	0	0	0	0	0	0	0	0	1.945489631	0	0	0	0	0
Zm00001d052203	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052204	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052205	1.312323087	1.525731493	0.412220405	0.197839524	0.114011749	0.017667861	0	0.034777207	0.035570513	0.01988912	1.309356804	0.015975076	0.096826264	0.015808952	0.016672798
Zm00001d052206	317.3001037	270.0806049	260.4209105	23.3446189	41.76952224	23.68145609	39.2759074	20.70352333	43.90768576	0.322919066	4.330470266	0.230551818	4.395967672	5.104952843	1.970086947
Zm00001d052207	0.172458226	0.118479149	0.311755041	0	0	0.01920772	0.091598836	0.018904124	0.07734139	0.237848326	1.522327492	0.364715393	0.017544208	0	0.018125931
Zm00001d052208	0.731920745	1.037088998	0.454816628	0.016300354	0.344433199	0.160125546	0.45816932	0.299429759	0.241784269	0.558796797	2.604109564	0.622569807	0.058503058	0.386850804	0.090664314
Zm00001d052209	5.139443812	4.499627615	4.147860628	2.237529458	18.53001267	4.204080158	14.35446667	20.52756046	31.63382515	508.4011873	324.1884907	321.0606973	0.122739081	0.094473211	0.83331502
Zm00001d052210	4.998835532	4.934347613	6.024745705	1.435345934	5.208087715	1.82303479	4.278974183	5.340607961	6.021579641	1.859835643	6.626206454	0.978717952	0	0.10195161	0.255366011
Zm00001d052211	62.41156341	63.39322182	58.82484162	21.01157752	24.35007346	22.73215546	36.82160178	36.90536468	47.75442194	29.22976277	70.99221847	28.71403167	2.542147072	1.051318918	1.454763797
Zm00001d052212	8.559496992	11.58549958	6.783024732	2.09184168	3.034466548	2.283231255	3.390958573	3.723836343	2.955088743	34.38675805	36.54448412	46.30314479	2.919684275	2.26189624	1.893003782
Zm00001d052213	0.353332089	0.29439988	0.445877886	0.555910112	0.465566863	0.446199544	0.533553202	0.65544319	0.489388023	1.664327864	1.617736796	1.505404823	0.243316895	0.280073032	0.647315564
Zm00001d052215	58.95596331	61.90629587	58.09429235	38.82419636	43.4879966	38.17497	40.36354906	36.10867745	36.65256456	10.08042579	13.74462508	5.550751254	41.05000469	37.305021	38.70485293
Zm00001d052216	86.638992	91.42943367	112.5732165	235.9490615	114.8491079	222.0462099	72.80398178	63.66999451	67.05850055	8.254650823	13.89912527	2.717291719	397.3414003	362.5177307	368.7140514
Zm00001d052218	4.231495142	4.581643733	4.496694631	4.913103784	4.275778858	4.591798627	3.784212503	3.509732593	4.342169226	2.434620865	2.22608268	2.239483522	4.673447311	4.564010357	4.547031623
Zm00001d052219	41.24166421	41.89484436	42.95016084	29.07220487	27.50567391	28.41527372	17.86228791	17.14408621	17.28615068	22.74443547	28.54146232	17.02028336	15.72857091	12.2951019	13.11754389
Zm00001d052220	85.445212	67.41226642	84.50016479	11.67936637	11.94919137	9.602835758	15.06959619	19.01200365	25.85264859	222.3305247	178.5762639	183.2973887	3.59515919	2.447858161	4.451970399
Zm00001d052221	0.138093272	0.006957159	0.116703453	0	0.087339909	0.006767326	0.129089591	0.086584707	0.040873753	2.765383205	2.277751805	3.285869915	0	0	0.083020427
Zm00001d052223	0	0	0	0	0	0.165178818	0	0	0	0	0	0	0.165960599	0.192139573	0.529977919
Zm00001d052224	5.74073459	3.786682517	4.780918763	8.22246288	18.32578458	5.93107796	19.97200394	26.14667869	29.16634212	27.53956001	37.76351289	14.79034822	2.847781987	2.75083981	5.555982424
Zm00001d052225	19.21084411	20.3539772	20.20038236	14.71612883	16.15205462	14.99511624	15.31878615	17.92861437	15.79871258	19.82279542	22.32568363	15.28949313	15.29854974	12.5044592	16.56310628
Zm00001d052226	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d052229	498.1159362	490.7134775	449.2427846	227.3355985	206.2596021	184.7864294	257.0756095	246.2605859	254.8565516	184.1870517	154.1073489	98.01641727	182.2473923	159.4503887	172.9165812
Zm00001d052230	7.94021148	8.882330156	7.341112242	3.974984696	5.183152261	3.97312328	5.082674824	5.529281319	4.90946738	5.342316157	5.37156747	5.193849752	3.32180622	3.004901349	3.218692197
Zm00001d052231	4.728396694	4.626703773	3.388716849	3.596256648	3.578534182	2.704252438	3.666563288	3.568248807	3.28935043	5.334880539	4.912031064	2.984526123	5.684740091	5.076681842	5.579257762
Zm00001d052232	0.049895014	0.027930202	0.068899634	0.0069141	0.036524445	0.040752146	0.006478036	0.04679269	0.027348618	0.038229695	0.090883309	0.036847622	0.049630332	0.085083704	0.038456964
Zm00001d052233	0.881086264	0.754327233	1.130801458	1.436408584	2.450916426	1.326384516	2.01872413	2.131722679	1.455933746	9.411558256	3.805260758	8.905452414	3.76341746	4.052898593	6.338303745
Zm00001d052234	0.281423017	0.4850414	0	1.477804541	1.756497367	1.996104588	1.903826722	1.625222163	0.895082044	0.265561767	0.093390382	0	1.35913443	0.92551738	2.089175593
Zm00001d052235	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052237	0.088527879	0.087608079	0.259339242	1.971573761	2.624590538	2.293128174	2.135396798	1.974772721	1.707878185	0.078489348	0.255169133	0.007004798	1.457678653	1.344799269	2.142045761
Zm00001d052238	0	0	0	0.022287804	0	0	0.02088214	0	0	0.197175273	0	0	0.13998673	0.333041927	0.123967153
Zm00001d052239	55.77897363	55.17120258	47.09319052	44.93121692	41.46986405	41.80009837	47.66685218	37.88752358	38.97142437	91.8298424	65.16283802	82.68338865	40.14445746	36.07265533	36.45534074
Zm00001d052240	7.532393382	9.797260886	9.167187127	9.296687535	5.730242523	6.888043796	6.337995503	5.613096254	6.126348777	2.725508491	4.976533844	3.526589382	5.868028966	7.335409395	7.708458434
Zm00001d052241	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052242	72.09624157	67.86972391	76.67228137	291.0529664	183.6791353	310.0702549	158.4542592	120.1631486	132.308419	47.22485262	31.4576015	11.9465568	783.0094385	827.4632331	775.0305432
Zm00001d052243	0.029212038	0	0	0.007286397	1.031562713	0.014315498	4.901680739	1.141227431	0.835815841	591.4229657	225.6138346	780.9059776	0	0	2.830186007
Zm00001d052244	8.405277151	2.806054323	4.530839935	5.809687517	10.94174977	3.722029363	9.703234294	9.524317819	7.868197397	22.48619676	19.15540509	31.52273094	1.699838861	1.443181682	1.170800894
Zm00001d052245	0.567754764	0.416740741	0.341121406	0.90502827	3.116258425	0.783100237	2.117676405	2.185225242	2.443741177	11.53798686	5.362565138	9.617259664	0.525940242	0.544078395	0.634666821
Zm00001d052247	27.89916648	23.17886369	17.1503113	14.58009829	27.36639098	14.28332412	18.28912421	21.99640655	16.46432848	32.70444115	35.50575086	37.14344144	14.10054272	16.57124825	24.48229935
Zm00001d052248	5.20505118	5.447395716	5.547729313	11.26537439	7.780621174	10.06649048	7.612494357	6.88697531	7.446725391	19.40867982	9.372372166	14.77231066	10.2256296	12.15859007	10.15251173
Zm00001d052249	0.556589676	0.481955895	0	0	0.045836785	0	0.24389064	0	0	0.047976808	0	0.038535299	0.038927607	0	0
Zm00001d052251	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052252	0.852136532	0.731067368	0.675328446	0.893324167	2.375811223	0.635468428	2.034735329	2.04007433	1.781995926	9.129375447	7.210530534	6.717151675	0.801550032	0.879988831	1.242191192
Zm00001d052253	12.53196443	9.123888039	12.67620017	2.881907646	32.47309164	5.04317422	35.83035363	36.11793418	34.48963886	641.1846907	398.0348608	630.1821047	3.548012716	2.615635886	8.884556312
Zm00001d052254	0	0	0	0	0	0	0	0.014797483	0	0.456985555	0.340464112	0.40783768	0	0	0.085130047
Zm00001d052255	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052256	0	0	0	0	0	0	0.013653707	0.05635691	0	0	0.029469854	0	0	0.128093049	0.094564688
Zm00001d052258	7.112040127	6.373025116	9.339616933	6.80137003	7.938937368	8.16218845	7.456383798	5.649210495	6.367438705	0.180924192	0.933481358	0.238739251	1.814015837	1.746244509	2.199163708
Zm00001d052259	58.0894453	59.10346747	53.40862945	36.10958714	33.80476874	34.08480975	33.54804558	30.59555253	32.29628551	23.35113111	26.41082089	24.54752099	34.45787858	35.38871301	33.04372384
Zm00001d052260	1.847464043	2.184425281	2.136717123	0.366771443	0.904170395	0.388010783	0.740146886	0.963787093	0.818376847	1.570373805	2.900253004	2.505963461	0.464103826	0.462915419	0.435902153
Zm00001d052261	0.127768541	0.055973896	0.3244862	0.581964352	0.607537617	0.415155246	0.116841554	0.087077266	0.075361501	0.007661473	0.189141139	0.104613707	1.864918701	4.293277173	2.453401142
Zm00001d052262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052263	1.872631592	2.796793733	2.448128801	32.10945167	20.88582594	34.7644786	30.6044874	20.20449013	26.67884297	0.64213869	1.593655146	0.323064833	51.55817382	54.76495574	52.17929201
Zm00001d052264	0.082577923	0.1040072	0.011403121	0.068658402	0.435234113	0.078687198	0.482461519	0.342963948	0.226314403	0.923762846	0.497526293	0.559020462	0.359361907	0.814723371	0.700123219
Zm00001d052266	2.383257894	2.933501179	1.911784679	8.538595379	7.92210005	8.719635351	7.4304511	7.706651167	7.575166274	1.792857574	2.759471193	0.828020367	10.42531916	11.21047626	8.929908087
Zm00001d052268	0.130428077	0.074670294	0.058944145	0.103513607	7.139923975	1.133072252	8.423851574	18.17143764	13.30701208	7.865741473	8.089129868	3.086667425	0.145953207	0.636910189	0.795088552
Zm00001d052269	0.125137153	0.137909368	0.064800342	0.045519142	0.096183825	0.083042989	0.542242749	0.628695508	0.160759182	0.043146191	0.17752721	0.005775886	0.355915917	0.217201257	0.705293674
Zm00001d052270	6.362952594	6.465789867	6.580254743	6.148634908	5.714162799	5.972558746	6.018426943	5.796373742	5.876314867	9.436212457	10.06594264	8.560679409	5.93441418	5.176865669	4.856917755
Zm00001d052271	6.337541605	6.359136956	6.548109509	3.924528407	4.221680662	3.445735886	4.293703159	4.523464687	4.103236286	3.748534415	4.378598387	3.400602225	3.120244664	2.605891028	3.073705451
Zm00001d052272	0	0	0.02771721	0	0	0	0	0.026891348	0	0.123033511	0	0	0	0	0
Zm00001d052273	0.005720182	0.028818359	0.056872468	0.549315097	0.444693524	0.525600381	0.414409996	0.627648559	0.514983631	0.118336101	0.050493327	0.006336558	0.160026671	0.169307925	0.714237533
Zm00001d052276	10.95577334	10.69060331	8.765944222	9.733825906	14.818394	11.92630271	12.16322688	11.56275888	13.77478656	14.61518606	18.98431059	11.09578324	7.587163334	7.161129497	8.707511708
Zm00001d052277	0.344580565	0.195300224	0.428245741	2.653681135	7.241865368	2.997324213	6.402014051	8.112358823	4.802086448	0.047523341	0.336758539	0.104970446	1.899063831	0.84991796	3.097421269
Zm00001d052278	0	0	0	0	0	0	0	0	0	0	0.01042944	0	0	0	0
Zm00001d052281	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052282	8.579716025	9.472122028	8.90912135	8.054101172	6.427631312	8.297911001	7.210610041	6.170197345	7.005425834	3.826142584	3.736525079	2.087982709	5.843855958	6.117971483	5.757314841
Zm00001d052283	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052284	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052285	0	0	0.094919831	0	0	0	0	0	0	0	0	0	0.056977839	0	0
Zm00001d052286	17.10975639	18.70606255	15.6391208	11.1471944	12.63699315	11.88934607	12.39260078	14.13661858	12.82413991	10.55587907	12.8123539	5.575882608	13.11966539	11.25151873	11.87830725
Zm00001d052288	0.023942616	0.140727131	0.079349211	0.009953397	0.01051597	0	0.009325649	0.009623115	0.009842629	0.011006938	0.010064136	0.035363392	0.008930852	0	0.055361864
Zm00001d052289	5.028836735	4.509102329	5.011331	4.92966627	10.41658829	5.135032547	8.195360456	10.68835124	9.501739146	9.101163714	13.14242663	10.69150954	5.599316063	5.801967776	5.978614979
Zm00001d052290	0	0	0	0	0	0	0	0	0	0	0	0.204653683	0	0	0.213592055
Zm00001d052291	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052292	0.351363489	0.818035165	0.449908171	1.686426461	2.511277479	1.774051379	2.774445981	2.323734982	3.282792639	7.679988403	6.135995415	8.444992773	1.596577621	1.003794592	0.886307219
Zm00001d052294	5.698187967	5.711839172	5.983782951	4.104160441	5.965816717	5.574024588	6.124977871	5.77885942	5.166171612	2.314977863	5.18031472	1.989890627	3.7896246	4.099805301	4.255738306
Zm00001d052295	6.193068966	5.983591975	6.261054435	10.09938396	9.151039016	10.5966176	10.97737546	9.327420864	10.13030415	5.103389005	6.146011723	4.856295453	5.387639268	5.317846964	5.12108311
Zm00001d052296	0	0	0.106607998	0	0.098899603	0	0.150351407	0	0.052895445	0	0.05408585	0.047511757	0	0	0
Zm00001d052297	3.463787966	2.779743989	4.266710253	1.261559655	3.52737695	1.790079145	3.354954546	5.889044391	5.733551915	41.82458903	29.01657327	31.33006212	0.468789641	0.504043275	0.484333554
Zm00001d052298	3.152119508	2.932050898	2.830277458	3.309049364	4.610632715	3.029192591	5.043351485	4.864248066	4.894961515	5.444086449	7.566942148	6.711255509	2.661672589	2.520269683	3.335017988
Zm00001d052299	1.153451271	0.928824092	0.728506421	0.282990372	0.722547488	0.625486262	0.508189834	0.843599807	0.48972183	0.469416236	1.597608474	1.06827524	0.169278559	0.456032514	0.34978284
Zm00001d052301	0	0	0	0	0	0	0	0	0	0.034438147	0	0	0	0	0
Zm00001d052302	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052303	2.037237035	1.57846562	2.446539772	9.12102014	10.450902	10.07471866	8.2381746	11.70951042	11.77900627	1.728430273	3.680339446	0.950881489	5.315109371	4.3850288	6.014015559
Zm00001d052306	15.80726489	16.07797776	14.11871245	10.41404238	13.15543426	10.12113332	11.8372019	12.72836081	13.41856031	6.132988792	10.49783895	5.292255729	8.536740151	6.446347452	7.066862732
Zm00001d052307	4.213736482	3.913947376	3.627328175	3.768693228	2.933995871	3.686597925	3.263955541	2.989160309	3.098450151	4.196054734	4.04078089	3.892458875	2.502398025	2.609743447	2.570692211
Zm00001d052308	4.914348254	3.912009891	4.928799669	11.62097983	15.20534277	11.13061767	10.22024194	10.27813625	11.1724404	4.041701628	6.887183512	2.60360051	5.13580285	4.74553007	6.452868383
Zm00001d052309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052310	9.197536684	8.106608541	7.353447995	17.02617246	13.03183977	16.25408389	16.98661409	15.40554411	13.85853206	6.156697301	8.674527217	2.877537353	15.02939862	14.74431218	14.31532733
Zm00001d052311	0.046421847	0	0.192310693	0.135089065	0.09175139	0.113746228	0.054243929	0.121277392	0.019083671	0.106705634	0.009756573	0	0.034631692	0.059370802	0.116284978
Zm00001d052312	20.07378695	22.48804574	19.50231102	15.64520765	14.32157522	14.04430334	14.20206001	12.39571989	15.18485301	6.542606226	10.98639817	5.104562827	12.12481334	10.25189931	8.606477379
Zm00001d052313	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052314	7.933776949	7.526207973	7.533036745	10.83892193	13.51180532	11.73805668	12.71671206	12.88700132	14.1173639	13.03927443	12.16311124	10.96980984	8.326116891	8.854818843	9.47257642
Zm00001d052315	0	0	0	0	0	0	0	0	0	0	0	0	0.728502369	0.041980075	0.974027635
Zm00001d052316	40.28493828	30.84774938	59.86853781	69.5812601	72.77257615	68.23971649	135.6675424	185.6774806	89.67196629	305.5076688	188.3588983	215.2299419	174.8287709	184.949508	194.3410982
Zm00001d052317	0.11668194	0.010497238	0.155370705	0.394984631	2.716171794	0.571805365	1.496525063	2.438658901	1.363635105	0.53258059	0.735698346	0.240044921	0.099482543	0.070046412	0.147747888
Zm00001d052318	0.005492661	0.159114626	0	0.089052715	0.007237387	0.006729262	0	0	0	0	0	0	4.044373536	4.064342516	2.673461985
Zm00001d052319	0	0	0	0	0	0	0	0	0	0	0	0	0.021792806	0	0
Zm00001d052320	9.696040903	10.91614791	8.982511968	9.059812493	8.563038336	7.316489172	9.068153411	7.835996593	8.135607332	2.086539747	4.217278701	1.262031043	8.307277012	7.775454658	6.691976884
Zm00001d052321	77.96257117	85.34703139	84.53699678	155.6919745	109.7481158	138.3388787	94.33692688	95.43694429	79.66455987	51.96641601	55.34802849	37.6585566	257.3665824	262.3706523	283.782971
Zm00001d052322	2.470415954	0.513548219	1.520216031	4.367236497	32.26692511	8.844717145	25.11132264	30.07679311	23.39753437	17.23402691	18.72188803	10.78704428	4.48220668	2.918498989	6.460972302
Zm00001d052323	0	0	0	0	0.024684969	0	0	0	0	0	0	0	0	0	0.08663686
Zm00001d052324	0.011659901	0.014685688	0.021736439	0.029083445	0.01536363	0	0.006812297	0	0.021569838	0	0	0	0	0.012781993	0
Zm00001d052325	20.57895655	24.21190572	22.40328291	22.62564738	18.7549327	17.06715363	16.95220039	17.66682127	16.09565697	2.545807323	7.401503042	1.533607343	21.2695027	22.164151	20.45752258
Zm00001d052326	0.692373725	0.650071601	0.672742117	1.004798225	0.895716613	0.647756491	0.132388152	0.091074012	0.263929273	0	0.095247871	0.027890189	0.112696499	0.124200718	0.174649857
Zm00001d052327	11.11902004	11.88191637	11.59375703	9.848608769	8.63230919	9.801173685	7.911765506	5.982806262	7.885169683	3.343927529	5.573079078	3.307439488	5.128216675	4.719274961	4.669060751
Zm00001d052329	2.109276091	2.420495171	3.080971156	15.61470796	10.69851505	13.02922965	5.726598693	7.742956398	5.472411578	0.294495354	0.893189174	0.051923563	20.81768369	24.73264502	26.20453109
Zm00001d052330	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052331	0	0	0	0	0.074375955	0	0	0.054448873	0.069613637	0	0	0	0	0	0.182726151
Zm00001d052333	0	0	0	0.017834906	0.640660162	0.157680114	0.835504024	1.224259552	0.352728515	0	0	0	0.208034672	0.282179875	0.47946501
Zm00001d052334	2.140332524	1.566643966	2.729645371	2.194161207	4.03096949	2.375081852	3.888956208	4.202169857	3.772865146	3.07551001	5.002386936	3.835746809	2.194464103	2.579710006	2.733628153
Zm00001d052335	0.142197084	0	0.050492273	0.215343899	4.4298562	1.207032554	3.952169914	6.294932882	4.985474258	0.15408896	0.435479492	0.202525041	0.125025295	0.690332077	0.798510565
Zm00001d052336	0	0	0	0	0	0	0.289574084	0.485567563	0.050937834	2.022200709	0.325526144	0.160136869	0	0	0
Zm00001d052337	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052338	0.104560106	0	0.227408314	1.369229704	2.032155877	0.640502185	2.474114327	1.166200115	1.289516099	0	0.362597534	0.115826941	1.287067283	1.34681391	1.873729155
Zm00001d052339	4.776905283	5.295202047	5.537733196	4.772532478	4.310519731	5.097561954	4.679395272	4.399675413	5.382921464	2.74057047	3.665728108	3.537371682	3.680196987	3.381680877	2.954498035
Zm00001d052340	625.0278769	611.881001	537.7821274	74.02487421	81.92788412	65.76423504	43.85884288	56.03704663	74.04915504	81.54879526	225.6584377	145.747531	15.56271389	16.40456517	14.06147695
Zm00001d052341	0	0.033762686	0	0	0.176606435	0	0.03132321	0.032322346	0.033059653	0	0.202821936	0	0	0	0.092975365
Zm00001d052342	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052343	63.6428573	58.93952369	61.46249143	24.21222459	50.82666416	32.96160512	61.48853453	66.10131969	65.5941224	83.81090238	78.55986993	74.41656421	42.22909518	43.9762603	51.51448906
Zm00001d052344	7.18616142	6.361043892	5.86927716	5.991037852	6.680352229	6.620917618	5.404592272	5.905734545	6.93711136	6.383444136	6.642996252	5.493969896	4.409411061	4.205721766	4.199122437
Zm00001d052346	0.551753835	0.180168592	0.660324206	2.599577471	5.322479723	2.278282548	4.385717568	5.24018176	4.360019698	1.080374604	1.537586328	0.701757172	0.769882175	0.955815395	1.480564359
Zm00001d052347	0	0	0.004035784	0	0	0	0	0	0	0.143315044	0	0	0	0	0.00375435
Zm00001d052348	1.467565111	1.068278937	1.463276367	4.446962676	3.882169854	4.375283497	4.107815215	3.310335895	3.97080166	1.138989001	1.773243214	1.557706887	3.078442867	3.260412494	3.515986766
Zm00001d052349	1.148737107	0.651872353	0	0	0	0	0.014750542	0.015221049	0.015568258	0.191508532	0.015918619	0	0	0	0
Zm00001d052351	1.492835888	1.583353537	1.399612911	7.414537479	4.900321071	7.283626427	5.753389552	7.263239716	7.1059254	2.961878563	5.746621527	2.408013254	5.011593882	7.034075175	7.085364031
Zm00001d052353	9.338533573	9.61651198	7.949393229	11.9895092	9.319234967	11.86300066	9.058316004	8.672789137	8.894009541	3.935728524	5.077112223	3.490277253	19.95955034	20.52642249	18.95162903
Zm00001d052354	14.14198638	13.34974436	11.40550894	12.70440419	13.96601428	14.18652086	14.14881725	11.31144405	12.11412714	13.75462892	18.97792689	20.14948817	6.201967983	5.639368087	6.23367313
Zm00001d052355	0.170130911	0.214280512	0.211439197	0.666851089	3.314549565	0.684853403	1.09338884	2.710767379	1.723509906	0.067039593	0.137918917	0.040384993	0.013598711	0	0.014049611
Zm00001d052357	2.173516148	2.403984415	2.758001263	3.416867713	6.353584597	4.117355127	6.850932078	6.023356536	6.329697878	26.99132906	17.32047851	20.71855371	4.619201393	3.543993247	5.363628945
Zm00001d052358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052359	0.011507773	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052361	14.0074118	14.09273874	11.67759002	5.9291267	7.2498389	5.54643392	6.792579235	7.059915596	6.529958906	7.91673368	7.157370008	8.391471984	3.818367539	3.626949424	3.951453017
Zm00001d052362	0.002656156	0.003345438	0.013204313	0.026501138	0.041998499	0.058574777	0.034140899	0.051243509	0.058963982	0.029306214	0.040193972	0.023538951	0.03269556	0.026205941	0.018425272
Zm00001d052363	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052364	6.6502334	6.586343643	6.965127624	13.04622656	13.23576495	13.50643294	10.51048607	10.84057723	11.69842172	7.283028349	8.486153752	4.729203645	13.77325148	15.52960042	15.8851013
Zm00001d052365	0.042000719	0.211600242	0.026099308	0.497624006	0.415065814	0.411653017	0	0.07596496	0.051798535	0	0	0.023263245	0.094000306	0.138127988	0.218513531
Zm00001d052366	0	0	0	0.015291632	0	0	0	0	0	0.693318659	0	0	0	0	0
Zm00001d052367	5.754394961	6.010960165	5.381936939	4.38901447	4.769783117	5.332852384	5.011136698	4.496357718	4.761077089	7.901535804	7.404640015	9.491960919	3.487330554	3.77815519	3.803485777
Zm00001d052368	0	0	0.037287454	0	0	0.085767319	0	0.006029406	0	0.117239595	0	0.227110195	0.022382662	0.00548167	0.011562408
Zm00001d052370	0	0	0.072609614	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052371	10.14177943	12.51958809	12.62213707	1.239685692	3.815368938	1.411939485	1.565500354	2.466579836	2.380713047	15.06006659	5.032078492	8.298286309	1.402501399	1.579229368	1.981972219
Zm00001d052372	5.354005402	4.792471866	6.151786981	1.189872283	1.153596711	1.237620601	1.796841266	2.666195449	1.245844064	9.783487378	3.581022774	4.650242463	1.50724628	1.070491907	1.323639434
Zm00001d052373	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052374	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052375	2.782948381	3.045084974	3.631589261	11.75724183	43.95747639	12.78559705	49.89596019	57.4227441	53.6272996	12.66587727	19.91577231	9.537486507	9.050668742	8.065461926	9.793168547
Zm00001d052376	0.112874351	0.233557875	0.093520384	1.752946501	1.005688067	1.237993647	0.860449248	0.596251013	0.52367738	0.05189078	0.050835064	0.023816587	5.6929732	4.928850294	6.79211818
Zm00001d052377	0.59250727	0.559698824	0.335697988	4.357627868	3.857651834	3.778962891	1.15051407	0.777466744	0.977883042	0.012017135	0.538402399	0.077217961	3.042159031	2.282897337	2.538600791
Zm00001d052378	4.506315586	4.986962367	4.008933056	11.52505154	15.60592819	9.489761448	11.36437768	12.38625013	9.988199951	60.06832379	43.13894215	59.3966124	21.94470452	20.97405308	23.02446649
Zm00001d052379	8.159597652	6.94586384	7.452107531	4.398031473	5.371614145	3.550524923	3.715163315	4.331253433	3.358204534	7.786856434	8.842674652	5.724593589	6.269151874	5.243525417	6.639669968
Zm00001d052380	0.49659404	0.969466148	0.370301121	2.260556487	2.839816072	1.393226029	2.483556198	2.484934411	2.131284854	5.170882144	7.571012088	2.150907974	5.851570244	5.051881895	7.6818658
Zm00001d052381	0	0	0	0	0	0	0	0	0	0.013130143	0	0	0	0.020873101	0
Zm00001d052382	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052383	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052384	0	0.155125853	0	0.345611552	1.014293712	0.414955976	0.215876175	0.148508074	0.189869628	2.25069579	0	0	0.895861021	0.202525496	0.249190731
Zm00001d052385	0.035265436	0.029611298	0	0	0	0.057606645	0.068679437	0.049609103	0.007248677	0.04863685	0	0.006510908	0.144698235	0.283500866	0.224244109
Zm00001d052386	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052387	0	0	0	0.124536433	0.011961392	0	0	0	0	0	0	0	0	0	0.062971363
Zm00001d052389	0	0.034018379	0	0	0	0	0	0.021711421	0	0	0	0.01994649	0.020149555	0.004934767	0
Zm00001d052390	0	0.011365657	0.100934553	0	0.190245347	0	1.465678109	0.359066056	0.300482786	7.529508725	2.105197985	11.24582117	0	0.079138676	0.772033065
Zm00001d052391	41.55423108	44.92223911	50.93060949	57.2280033	76.99718275	52.79440555	62.38348735	71.51259968	76.3334114	39.02869544	58.96578986	28.35424489	51.78614923	54.06765512	57.57968886
Zm00001d052392	0.312267739	0.076741926	0.132517603	0.123483125	0.22078264	0.121302907	0.329286333	0.146936122	0.450863679	0.525205724	0.355362111	0.244672314	1.482979195	0.918416455	1.162321556
Zm00001d052393	0.360192472	0.319994968	0.315751901	0.332901459	0.555120014	0.468865379	0.383305897	0.492476669	0.519575491	3.929764418	2.43734618	3.722857981	0.590205165	0.602859945	0.606056779
Zm00001d052394	0.062597225	0.094609724	0	0.468411261	0.247443081	0.306760662	0.234063545	0.211338413	0.247039165	0	0.205236483	0.027736946	0.266183558	0.439176167	0.275009551
Zm00001d052395	4.023640753	2.591483736	4.375518499	1.482623468	2.470127457	1.904583587	2.938515158	2.701456238	1.015008742	12.04442518	20.18044349	33.47969977	1.227977237	1.353330906	0.422897982
Zm00001d052396	0.108699043	0.07432086	0.077195137	0.445426973	0.421496411	0.47561143	0.152417799	0.093618788	0.187678493	0.18846319	0.074411047	0.082568137	0.177243534	0.282578736	0.219026473
Zm00001d052397	0	0	0	0	0	0	0	0	0	0	0	0	0	0.014607102	0
Zm00001d052399	36.52435991	37.5053022	35.62480394	30.61076693	33.72912317	29.69112104	39.40191889	40.69644218	44.26583956	36.39040327	53.75778491	48.67116655	24.98564882	23.68839718	23.02378753
Zm00001d052401	0.505262377	0.807712865	0.640017368	4.689705576	2.9062867	4.535479278	9.855123291	6.490657789	6.638716659	0.549431631	0.722922537	0.527415958	11.43857451	12.32397151	11.78414844
Zm00001d052402	0	0	0	0	0.053612668	0	0	0	0	0	0	0.045072537	0	0	0
Zm00001d052403	0	0	0	0.08903483	0.062711423	0.014577138	0.278065047	0.258241194	0.05869599	0.08204911	0.570160883	0.105443847	0	0.10434734	0.123805316
Zm00001d052404	1.443846623	2.472896667	2.154801803	5.130873041	5.595996907	5.306729006	7.306211331	7.34258568	6.690525784	3.007783323	4.304252535	2.168261907	5.922019256	5.377530711	5.776140778
Zm00001d052405	0.032067007	0.058338964	0.004428108	0.271060819	2.201850044	0.449611835	2.065029744	2.414446359	2.618924187	0.520880339	0.584097575	0.201293458	0.877164697	0.636659508	0.37897699
Zm00001d052406	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052407	8.394527355	8.344676995	7.609465795	7.712867548	6.540665014	7.00498212	7.675831257	7.994870337	7.159039321	7.581559355	9.053192203	7.708519693	5.233412366	5.666459787	5.460297418
Zm00001d052408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052409	9.202254115	9.18445924	6.852994937	94.15049874	109.2703429	153.097076	154.3017643	160.2955436	161.8778398	288.0423411	177.3524557	228.4298367	160.7557626	171.1507729	171.3638922
Zm00001d052410	1.563582997	1.505964789	1.444845351	4.469016542	4.755541728	3.925859551	1.551915	1.317509601	1.43830842	0.076109602	0.176295709	0.028528151	2.16551054	2.831214872	4.959520149
Zm00001d052411	3.223460081	2.868788869	2.756903691	4.440084081	5.793663318	4.531547159	4.431990258	5.03905484	5.105147998	0.9150868	2.659971862	0.592391247	3.341189966	2.914870756	2.971103391
Zm00001d052412	0	0	0	0	0	0	0	0	0	0	0	0	0	0.016763855	0
Zm00001d052413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052415	0.103657207	0.116050343	0.11451154	0.502743004	0.470454546	0.155215209	0.497951952	0.402735881	0.25567617	0.301805244	0.551908049	0.331721723	0.592867134	0.606040911	0.665788208
Zm00001d052416	27.49160857	25.97246777	30.26807024	18.07318008	35.77224343	21.89568365	34.69153682	42.36190114	43.33435263	45.64939184	53.35581362	31.16987216	23.82679584	26.58401212	25.18009552
Zm00001d052418	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052419	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052420	13.99285518	14.69453842	9.309230876	7.295589228	7.278015599	7.24101587	6.813679176	7.267072731	7.731765744	3.452121891	4.861018755	2.819238797	6.045352593	6.790853196	5.944020018
Zm00001d052421	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d052423	4.694400636	5.047822966	5.056740999	9.210136412	6.031425111	8.262406701	5.788501186	4.666899378	5.09325278	1.58526939	3.007997205	2.366308205	4.040911577	4.181609012	4.72175115
Zm00001d052424	0	0	0.025900381	0	0.164760881	0	0.243518856	0.201029222	0.025701864	0	0	0	0.09328384	0.022845864	0.024094226
Zm00001d052425	1.388425259	1.748726751	0.950228325	3.37303027	2.741674851	2.912689923	2.093530385	1.398926224	2.233044337	8.425416274	6.25988405	9.615875926	2.107062361	2.577043957	2.682678175
Zm00001d052426	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052427	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052428	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052430	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052431	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052432	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052433	0.313699668	0.012745351	0.012576351	0.012620407	0.01333372	0.012397581	0.201015713	0.219629261	0.062399789	56.77400012	13.27125031	154.9635867	0.317068388	0.155304525	0.374378968
Zm00001d052434	0.537778396	0.954795951	0.523408642	4.460518378	17.0235211	7.326753062	23.27329326	25.58597044	20.39232203	48.66526368	29.21789372	39.081094	6.416690296	7.308770812	11.71577729
Zm00001d052435	1.766507754	1.85732707	1.724519133	0.415079042	0.789371232	0.7464969	1.573551355	1.376786651	0.505181213	27.19481798	17.03970136	23.35182833	2.395053855	2.76162856	7.293168715
Zm00001d052436	5.313849045	4.486049269	4.958161933	11.06927395	15.30419082	9.10016024	10.67872674	13.20140275	10.73304905	4.140814201	6.835782646	1.986445974	10.50279498	8.94524164	10.14729331
Zm00001d052437	10.79203433	8.590727808	12.64736093	13.22409691	10.38707475	14.76648251	7.865605992	9.313624011	8.754685869	2.47838364	2.190977706	0.989828269	5.377268029	4.854140499	4.786509537
Zm00001d052438	0.094414599	0.023783107	0.132983907	0.737898697	0.356627911	0.393280727	0.220646919	0.394654053	0.419181787	0.034723546	0.055561258	0.104588208	0.486003652	0.151800878	0.407516333
Zm00001d052439	10.56765533	10.33888465	11.53439317	11.09189701	10.76121875	11.52369483	12.16732679	10.57299836	11.10804338	6.80254692	8.984260583	5.747602815	9.465769341	9.684336808	8.725910192
Zm00001d052442	0.474336869	0.597429042	0.79379195	0.685286801	0.55693819	0.690448594	1.059135531	0.639895834	0.677660423	0.848502232	0.254659628	0.192491166	1.397943742	1.951229838	2.432498731
Zm00001d052443	0	0	0	0	0	0	0	0	0	0	0	0.031782524	0	0	0
Zm00001d052444	53.47568649	52.24074644	54.73744462	39.41228459	44.6761341	33.49826427	54.03184409	55.26930489	48.86622841	39.59062687	47.73790512	38.40791477	57.33009354	62.90810132	63.02907368
Zm00001d052445	7.450978454	7.829077289	7.365786764	5.911503623	6.099900531	6.427275348	5.903167812	5.467444423	6.069542441	2.786580773	4.103452521	2.706259473	4.963064053	4.8899342	4.462084677
Zm00001d052446	3.797564978	6.696265999	1.41588748	0.236807915	2.752116939	0.232626835	0.665618206	0.228949948	2.341725416	0	0.478885127	0.210338507	0.424959715	1.248907225	0.219525168
Zm00001d052447	0.205803521	0.129605148	0.073078063	0.036667032	0	0.054029459	0.017177244	0	0.018129487	0	0	0.016284272	0	0.032229864	0.016995497
Zm00001d052449	0	0	0	0.024872604	0	0	0.069911759	0	0	0	0	0	0	0	0
Zm00001d052450	2.887181654	2.119742482	2.904308662	8.872683806	10.41470209	9.972431522	11.89135798	11.09012961	9.342419432	1.172886238	2.532358571	0.736239751	5.230136714	4.865058359	6.605722294
Zm00001d052451	0.109021004	0	0	0.108773014	0.430953501	0.213705035	0.267521193	0.223472676	0.107562507	0.015035794	0.027495797	0	0.134197805	0.155366449	0.15125179
Zm00001d052452	15.50376102	11.19233031	19.1054434	20.62345017	23.07306704	14.36148989	20.39340887	22.37669105	17.68550752	3.20934221	7.482834839	1.772213805	9.244230059	8.6254316	12.86324067
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Zm00001d052457	48.69091602	47.00984915	36.2296784	21.97100492	23.3953369	19.93748397	21.13465533	21.11541328	20.38573711	10.83707265	8.908410221	3.03631417	15.20930429	16.51916587	15.50008098
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Zm00001d052660	14.76579111	14.25710612	14.07187027	15.55507762	21.19728732	15.04754953	20.91883224	21.96687203	20.86472619	4.224272393	8.416951153	2.876717542	11.1814249	11.67289919	13.65063518
Zm00001d052661	10.43771903	10.044399	8.745187375	4.137173575	34.48240636	7.717737356	28.81735293	44.42302365	37.79131576	32.44149414	29.45143532	15.441321	1.837325827	1.597866597	2.324384128
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Zm00001d052731	4.876872919	4.875351561	5.06738677	6.306568686	10.35884526	9.411183895	12.86083364	13.46386358	15.05277531	32.71120484	34.66456202	39.84623158	2.728688697	2.57084996	2.303088601
Zm00001d052732	0.32550557	0.512469337	0.884929675	0.938774235	0.375288674	0.448637468	1.212376018	0.956683709	1.053776437	0	0.128272802	0.090145074	5.873550348	4.081250396	5.127480701
Zm00001d052733	0.025154064	0.166328594	0.101600022	0.07058488	0.041430212	0.007704293	0.183703277	0.090990228	0.015510969	0.364261817	0.031720082	0.125390389	0.408148981	1.178821355	1.46134693
Zm00001d052734	6.599305602	6.488443645	1.59210055	3.046445929	2.926923891	2.953040218	1.363209339	1.559659031	1.174953058	0.28474445	0.467383519	0.121243157	1.355602934	1.104383026	1.647876695
Zm00001d052735	13.05595336	13.14711675	10.51358067	13.08774998	17.27657916	16.40506183	21.4659523	22.95717781	21.90506578	83.26662773	68.63774844	85.05261992	9.776005992	9.424089017	12.00617119
Zm00001d052736	0.336967033	0.151575438	0.598262315	0.810483428	0	0.589758174	0.028124713	0	0.207786903	0.531123535	0.910556228	0.613240436	0.37707693	0.369395095	0.027827134
Zm00001d052738	0.424167162	0.328763145	0.865076837	5.493491491	18.14283382	6.435824042	8.489412157	7.238971135	6.961463432	71.129568	28.87025851	98.49263748	0.158218892	0.095381936	1.005938716
Zm00001d052740	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052741	0	0	0.012420066	0.049854298	0.184352331	0.134678694	0.140130149	0.012049997	0.012324871	0.082696866	0.01260224	0	0.134197805	0.142419245	0
Zm00001d052742	0.446075558	0.720843386	0.47070341	2.764135894	2.565486619	2.591595656	2.756995254	2.7874292	2.255898993	0.580388431	0.919836813	0.525220389	2.718765458	2.251262274	2.607813032
Zm00001d052743	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052744	3.513316102	2.68938998	5.349850298	4.509276467	36.80076238	6.243314224	40.16029368	56.16539792	59.9369528	131.8524776	121.1005857	101.6879624	1.122199008	0.815155015	4.393132396
Zm00001d052745	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052746	3.41780848	5.170638893	3.051481637	5.266934663	3.209365208	6.136535481	4.636375091	3.576356078	3.779060326	1.950505395	0.544938248	0.043518312	36.42197834	40.56795193	44.64687719
Zm00001d052747	18.96538205	19.53982618	19.98537289	11.3225856	13.51272686	13.83170943	12.3144544	12.93798646	12.22795841	10.54661557	10.97488528	6.469135797	8.113227781	7.854713558	8.308498413
Zm00001d052748	0.145181245	0.268189263	0.078187061	0.832893255	0.503750319	0.669965285	0.633338668	0.355946255	0.423748684	0.006674296	0.006102607	0	0.476556594	0.551729634	1.387554475
Zm00001d052749	0	0	0	0	0.452230703	0	0.01671008	0.017243092	0	0.315562937	0.108199987	0.110889757	0.064010668	0	0
Zm00001d052750	10.8002748	12.25585491	11.08390034	11.72449917	11.30634394	11.40911471	9.443947725	9.173081664	9.015367354	3.23860386	4.309966145	1.469894979	16.68441837	16.27399579	16.59610267
Zm00001d052751	22.98457529	24.62694357	21.37490577	12.73838793	11.3071677	13.31616141	12.14446705	10.66107611	11.15430419	13.53925589	12.9124056	14.65027731	10.29296744	9.898457325	9.785490269
Zm00001d052752	0	0	0	0	0	0	0	0	0	0.303621344	0.194330197	0.438967319	0	0	0
Zm00001d052753	3.098034866	3.83766792	3.418076285	4.185207123	6.392323618	6.405306669	5.381775379	5.799739547	5.341233254	6.704182868	6.228062071	6.359989951	4.642356077	5.486128215	5.701562945
Zm00001d052756	17.86418702	17.10084119	16.66153305	13.84380218	13.77572952	11.45673082	12.80952422	14.50201121	14.68993271	30.59543767	27.18861613	22.28264011	10.22372816	9.694906932	9.204110902
Zm00001d052757	0.102176636	0.180168592	0.431750442	0.127430268	0.323118499	0.77611823	0.09551472	0.024640353	0.655263076	0.112734741	0.206156826	0.249010609	0	0.022401923	0.189008216
Zm00001d052758	18.99449313	18.45861459	16.63263782	11.36927483	16.2662434	10.80826349	14.06038107	14.55229184	16.99364846	4.30401249	8.81669984	3.317402057	8.468600188	6.736862151	7.51435227
Zm00001d052759	0.279004774	0	0.577913257	0.695925301	0.612716202	0.626668209	0.21734472	0.672832499	0.057348378	0.064132264	0.11727799	0.154534413	0.312215301	0.20390322	0.053761266
Zm00001d052760	26.4196059	22.97664718	19.92467091	19.45914208	18.18353159	23.97991916	16.75226229	19.35687343	13.23424097	8.613456321	8.687592669	2.44877609	78.79833864	61.19449341	71.93257329
Zm00001d052763	6.748034315	6.799864641	6.717474705	7.804691859	9.550970806	7.753754733	9.300785941	9.273101476	10.40274726	8.075734967	9.098525236	7.706166368	6.218827802	6.286445763	6.094736564
Zm00001d052764	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052765	20.88942039	21.44930918	20.33284341	9.640713343	12.05371621	8.974226354	9.926750531	10.96246267	9.887285089	17.3263207	17.18310782	15.52453989	9.99757078	10.01592757	10.83641272
Zm00001d052766	19.62758065	22.22926121	18.25084836	15.27263661	14.024273	15.958587	17.10997837	16.42454624	13.88711189	23.42191428	28.68541783	30.43798936	13.14818305	14.55158294	13.13325256
Zm00001d052767	0.77136614	0.248052385	0.744488255	1.535129341	12.45615996	2.322358657	9.588737664	8.7171387	6.588316548	17.36098099	6.508928464	7.653998594	1.074387947	0.539743819	5.711343857
Zm00001d052768	157.4350517	162.8854117	154.9129944	135.2945937	104.0379211	133.6110593	125.8648995	101.2488968	116.6918749	8.931261546	16.1812764	3.347703398	201.5651028	193.5674735	178.6888649
Zm00001d052769	57.42642071	54.54003246	60.30499976	122.0029363	116.4641711	108.1987285	124.5001191	140.8864943	117.9783271	131.7720653	165.849551	181.4117422	167.4436901	138.6609372	131.226944
Zm00001d052770	0	0	0	0	0	0	0.007924026	0	0	0	0	0	0.007588566	0	0
Zm00001d052772	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052773	0	0	0	0	0	0	0	0	0	0.016864835	0	0	0	0	0
Zm00001d052774	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052775	0.008300688	0.020909496	0.02063224	0.041409034	0	0.040677917	0.019398709	0	0.030711153	0	0.010467434	0.009195126	0.037154948	0.118293581	0.028790186
Zm00001d052776	52.51287048	65.52327571	57.77350221	103.68203	92.31399895	101.8514203	98.51149451	104.1444098	82.75263685	49.01682847	91.7848242	48.35819884	204.338106	166.8866869	176.7936705
Zm00001d052777	0.220780353	0.248376484	0.367624595	0.360892589	0.468846057	0.344016355	0.520973046	0.739187413	0.750762015	2.660614132	2.946292316	3.542709908	0.271046742	0.166834267	0.280033986
Zm00001d052779	30.91001512	24.16509467	29.52720292	4.669713754	7.077026152	4.32261538	4.038646832	6.255151548	5.445226387	19.59969183	19.82770157	28.9943852	2.860466208	2.694553965	2.74719166
Zm00001d052781	24.64902188	23.53085415	24.60778145	11.98379155	9.828927232	12.52924915	8.111790042	7.11210434	8.597940619	4.367124212	4.309966145	3.861421971	6.19353052	5.782137948	6.422820259
Zm00001d052782	0.390606683	0.983941126	1.456341408	0.487147711	1.029363219	0	1.597483695	0.470982749	0	0	0	0	1.311304264	0.642295144	0
Zm00001d052783	0.087636115	0.110378011	0.163371632	0.163943941	0.288683595	0.026841558	0.128003501	0.739684446	0.243179178	0.694971741	1.077491536	0.412587072	0.3677536	0.336244253	0.075989481
Zm00001d052784	0	0	0.010533571	0	0	0	0	0	0.010452835	0.011689328	0.149633047	0	0	0	0
Zm00001d052785	33.36659396	34.82272087	36.94754423	24.27744162	28.0523042	23.15871622	24.25230134	28.3411896	25.42014891	24.30594875	29.36314924	17.67195983	21.30258952	21.44422545	21.84336738
Zm00001d052786	33.90858019	37.15347587	34.65118176	22.55022469	24.40586987	19.27050687	19.23851331	18.78866666	20.42588879	11.55622014	19.89690464	17.36988962	20.94640144	22.56090471	15.23929551
Zm00001d052788	0	0	0	0	0	0.020131168	0	0.118877857	0	0	0	0	0	0	0
Zm00001d052791	0.08321195	0.073980536	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052792	0	0	0	0.005986717	0	0	0.033654853	0.00578806	0.011840185	0.264815807	0.20581299	0.212701861	0.037601773	0.00526225	0.033298761
Zm00001d052793	0	0	0	0	0	0	0.012417285	0.006406683	0	9.533698413	0.113905052	0.759278684	0	0	0
Zm00001d052794	0.350458877	0.512869703	0.261330795	1.232141183	0.980734854	1.149049348	1.064729123	0.712338411	0.88089124	1.454624954	1.048028877	2.266479578	0.49301967	0.713487038	0.902968756
Zm00001d052795	0.519772819	0.532859363	0.480725723	0.949744211	1.369753885	1.229158238	1.299456233	1.544956675	1.446030973	5.568109418	2.484613551	4.244709184	0.32463766	0.238518091	1.02018062
Zm00001d052796	63.21742235	57.15909752	53.39491165	68.63593916	72.02371079	66.99652854	40.14802772	45.15795867	44.79291954	15.36938729	11.57924003	2.692925394	62.28502867	58.49635178	68.51040372
Zm00001d052797	7.316934783	7.878034407	7.700555642	15.26906123	11.40381318	15.09913499	9.553216542	7.961554673	8.990367699	11.28799921	7.009928408	3.59459817	14.67143564	15.48727531	15.23105527
Zm00001d052798	2.426294075	3.565247426	2.648144501	18.13641507	15.65709469	17.22550108	14.28466649	13.4275628	9.629047034	2.080687022	1.255234736	0.654705524	16.89976314	17.45912626	18.66488388
Zm00001d052799	0	0	0	0.092262824	0	0.072507066	0	0.017840256	0	0	0	0	0.016556872	0	0.102635143
Zm00001d052800	3.118035319	2.799448769	2.64467846	2.934341124	3.040422952	3.322281692	3.002771573	2.836971249	2.799530708	1.914864308	1.91747484	1.439720353	2.023769492	1.753370616	1.93810448
Zm00001d052801	11.56599627	12.57202614	10.34617264	15.71874947	12.79228561	16.65234658	17.44433233	17.83857277	20.45738345	14.61452392	23.07982495	17.20919169	15.31049614	15.62821216	16.91910603
Zm00001d052802	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052803	42.93709194	46.76161535	43.4436929	42.54082084	34.97611568	36.86177942	27.18426719	27.56060174	23.72073521	3.753365996	8.584707815	2.236734528	29.4003653	29.37009845	29.74777473
Zm00001d052804	0.023469929	0.014780232	0.058336995	0.117082712	0.06185015	0	0.027424613	0.084898178	0	0	0	0	0.22324064	0.30874273	0.393449399
Zm00001d052806	2.84412378	3.273467194	3.072497715	3.926546079	3.101612976	3.78473434	3.91099563	3.373313849	4.367553159	1.206479535	2.478063997	0.842654421	2.898921482	3.340199478	2.286590432
Zm00001d052807	0.032092098	0.404201167	0.239304926	0.560334222	1.606869814	1.100881924	0.899990814	0.619132253	0.672833781	1.106507364	0.809383314	0.426602043	2.04698905	3.236604639	5.083089797
Zm00001d052808	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052809	36.78212936	33.84377208	38.88853687	52.59194914	48.34774829	50.98717864	38.54246375	38.74231287	45.34511277	2.055950246	10.22613085	1.431869589	24.04057817	26.16240849	32.16793636
Zm00001d052810	20.99691983	22.62517281	21.18055659	37.32490837	27.77785633	43.53946215	11.26532074	9.505526377	8.565678431	0.361249351	0.895023872	0.074879469	8.708259774	4.964753567	11.14612582
Zm00001d052811	0	0	0	0	0	0	0	0	0	0.163144868	0	0	0	0	0
Zm00001d052812	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052813	1.10097472	0.542614592	1.356396409	0.907432011	12.5516716	2.521753088	7.226711953	7.561120117	8.477439573	21.9577553	10.97411548	10.60530288	0.149985782	0.136435243	0.066410975
Zm00001d052814	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052815	0	0	0	0	0.022075804	0	0	0	0	0	0	0	0	0	0
Zm00001d052816	13.07519227	11.43179943	12.18975976	14.39666663	13.61974789	14.7063296	13.29473185	13.41858964	15.81827764	5.671033438	7.506762226	4.404571918	10.45232041	9.31304328	9.778319718
Zm00001d052817	0	0	0	0	0	0	0	0	0	0.0288301	0	0	0	0	0
Zm00001d052818	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052819	0	0.021416629	0.021132649	0.21206679	0	0	0	0	0	0	0	0	0.057084141	0.074561625	0.078635881
Zm00001d052820	46.96730363	46.36944635	42.42392386	30.84261501	38.18445849	31.78386799	31.39471678	31.87460486	33.93003238	18.86658206	23.94544466	16.54419355	16.66516957	17.06943175	17.92371245
Zm00001d052821	0	0	0	0	0	0	0	0	0	0.027051486	0	0	0	0	0
Zm00001d052822	5.245240758	4.142228008	0	0	0	0.01470512	0	0	0.074014148	0	0	0	0	0	0
Zm00001d052823	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052825	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052826	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052827	0	0	0	0.324879737	0.254253442	0.449165153	4.272733383	4.641689551	3.319730427	0.0798372	0.145997442	0	0	0.01057649	0.011154419
Zm00001d052828	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052829	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052830	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052831	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052832	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052833	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052835	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052837	14.56770828	13.54935322	10.63591979	12.15355158	18.5060382	16.0372686	54.32608485	45.6899021	44.24453442	108.2066652	90.84686381	55.31787799	7.830405243	7.234107423	13.67533831
Zm00001d052838	32.48321097	43.37257724	38.72417383	33.51240288	20.76474079	24.31236914	13.48286731	11.93697658	14.81170165	0.123841612	1.047413776	0.049735214	15.599999	11.27092629	15.54627492
Zm00001d052839	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052840	3.838321531	4.147765458	3.803124983	3.515681339	3.620929319	3.580232514	3.793609367	3.401464504	3.311601018	1.607109273	2.425234433	1.596153107	3.131825852	3.390155515	3.966682454
Zm00001d052841	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d052843	4.330097078	1.891227836	3.211514897	0.609712333	14.97703764	1.818232735	12.66969827	16.88440073	14.27645012	27.49971804	33.29077298	36.5747234	0.058615133	0.363666472	1.069869782
Zm00001d052844	0	0	0	0	0	0.020400892	0	0	0	0	0	0	0	0	0
Zm00001d052845	0.190165334	0.231703705	0.305698113	0.809457718	0.996835715	0.564719756	0.794635826	1.139003489	0.721424207	1.057629652	0.948792063	2.14778068	0.538941955	0.328560413	1.185316418
Zm00001d052846	0	0	0	0	0	0	0.221872735	0	0	0	0	0.210338507	0	0	0
Zm00001d052847	8.908994183	10.46919623	8.993686365	12.04134326	6.627198623	9.109578005	8.150871785	6.904105922	6.356203121	0.608775293	1.505254206	0.33745987	16.2377513	12.48566459	14.06638209
Zm00001d052848	2.578687886	2.871084228	2.691735322	3.357801509	4.942970643	4.009529662	3.453640898	3.246380001	3.918111427	2.805540948	2.316253141	1.650305801	3.648888232	3.128553591	2.538614017
Zm00001d052849	0	0	0	0	0	0	0.055468184	0	0	0	0	0	0.026559982	0.026018901	0.027440646
Zm00001d052850	5.620460615	5.026156624	4.72883591	4.210097104	5.540961324	4.896118813	4.805328552	5.350260124	5.336391835	7.111579634	7.204610357	5.204472523	2.200342963	1.716783797	1.897770393
Zm00001d052851	9.741105073	9.138236119	8.382730503	8.046076064	7.054894639	8.141635259	6.748377079	6.498981674	7.273555636	3.794206936	5.905385758	3.446143382	5.486002251	5.648408483	5.361052927
Zm00001d052852	5.12594811	5.731952334	5.161812611	3.226944905	1.563618849	3.057559692	1.458105923	1.379231362	1.244729214	0.987034274	1.434726985	0.33880028	2.21093135	2.447522884	1.831635493
Zm00001d052853	3.121514949	2.796242945	2.966621386	1.42605206	1.704607895	1.912141459	1.199575668	1.388795286	1.008743256	0.437414926	1.063019733	0.610212812	1.410305868	2.095236297	1.553562725
Zm00001d052854	0.009187657	0	0.04567379	0.527088585	0.968486899	0.506526173	0.053678888	0.011078223	0.079316506	0.012671294	0	0.01017767	0.133656685	0.010071832	0.159332783
Zm00001d052855	17.67884121	15.65231013	17.2208881	67.00301828	90.52759879	69.82665015	111.0595758	118.5864488	117.9343691	7.086224938	12.23381983	4.096016681	17.04586751	22.89893501	21.13852521
Zm00001d052856	0	0	0	0	0	0	0	0.004461271	0	0	0	0.004098612	0	0	0
Zm00001d052858	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052859	0.007414571	0.006225787	0.003071617	0	0	0	0	0	0	0	0.003116671	0	0	0	0.001428709
Zm00001d052860	0.071390255	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052862	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052863	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052864	1.485269858	1.403027162	1.510279978	9.851209268	5.070566967	6.3688058	3.885238122	4.4161901	2.768439825	0.093110546	0.61722972	0	16.80951762	14.46882148	16.64488604
Zm00001d052865	11.09067383	7.887212636	12.58619441	15.06193699	18.66368504	13.64379807	10.3059141	11.86544628	10.76407877	0.648532135	4.237651277	0.584430483	6.032146292	6.173289739	7.51836866
Zm00001d052867	1.594977291	2.248032157	0.70794374	0.047361583	0.200153959	0.186101468	0.177498188	0	0	0	0	0	0	0.041630241	0
Zm00001d052868	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052869	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052870	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052871	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052872	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052873	10.26213989	11.4412634	9.582691806	10.47702943	11.66629145	10.28350591	10.32132504	11.5920359	10.07670359	6.105483061	7.252875206	5.730303114	7.317715278	6.496100813	6.762405062
Zm00001d052874	1.232652239	1.529006873	1.880112883	5.776560289	4.552682269	7.253380993	4.757533408	5.292121739	5.43587408	7.289525399	5.087173155	2.110281416	2.884152821	2.579710006	1.900152271
Zm00001d052875	9.753959932	9.156223374	10.06829245	3.215659431	7.166951256	6.336989932	7.932417123	8.715162809	7.70135618	2.344237866	6.549038075	2.392741335	7.485403643	6.083047738	6.772191858
Zm00001d052876	0.730017345	0.845159786	0.934760666	0.018392848	0.893891468	0.216817244	0.163711921	0.320085364	0.345575013	0	0.418443315	0.008168486	2.442486906	2.045136103	2.745130251
Zm00001d052877	1.822831189	0.727023166	0.490840993	3.144809112	2.321785927	2.009895856	1.703982608	0.622743857	3.109811352	0.251398473	1.264256736	1.076933157	0.883916207	1.065734165	0.491736375
Zm00001d052878	13.46123033	15.88324318	15.63348572	24.30500408	16.24290886	19.68215988	18.23241759	13.62304941	15.64315743	6.299443307	10.0632082	4.710807119	13.57129413	14.44588541	12.56452803
Zm00001d052880	0.051423233	0.018505072	0.063908946	0.714622918	0.3581476	0.531004189	0.944240765	0.708625308	0.607011467	0.253289703	0.277912916	0.13020417	1.150884989	0.716729133	0.925756859
Zm00001d052881	0.013522487	0.085158109	0.016805786	0.421616466	0.124725019	0.149102066	0.237015385	0.146745367	0.26683162	0.205147122	0.238732052	0.104857179	0.27237774	0.148238246	0.203239918
Zm00001d052882	0.107647511	0.124283902	0.01114872	0.302069939	0.011820116	0.164853663	0.094339588	0.054082665	0.243391933	0.024743944	0.260181683	0.079498018	0.100384185	0.088505236	0.062227607
Zm00001d052883	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052885	23.09548689	22.34390567	26.81305497	35.81544562	64.39154207	34.00371145	40.0410706	49.57999172	40.91396136	4.998218164	19.85134703	3.064719172	17.86943029	17.84237635	25.20512635
Zm00001d052886	1.521638567	1.387671269	1.448588566	2.861244725	2.956573963	2.855994521	3.59924459	3.082217574	2.502136484	0.926529999	1.740929814	0.993500605	2.101201304	1.958973888	2.077668171
Zm00001d052888	8.382492311	8.557181628	9.612306192	14.18319621	9.7299838	15.10656157	9.268108917	6.385959961	8.196089763	1.03090283	2.188179818	1.023534831	3.050415972	3.176868801	2.995525459
Zm00001d052889	0.432514966	0.34737949	0.631014503	1.493160224	1.073728254	1.497515253	1.149953875	1.058145562	1.453351455	0.008645064	0.371514734	0.076381521	2.686540372	1.74537791	2.514725717
Zm00001d052890	0	0	0	0.039860128	0.063169572	0	0.00933655	0	0	0	0	0	0	0.035036556	0
Zm00001d052892	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052893	0.56413744	0.429757979	0.593683269	1.424157285	2.074141195	1.399012368	0.664510688	0.345596327	0.768678186	0.947450153	1.956337378	0.705561448	0.829838139	0.718173606	0.599621489
Zm00001d052895	3.775166471	5.093368163	4.631052883	14.15514551	8.61252291	14.47400427	8.808288112	7.012129225	6.780330963	0.303295745	0.647072665	0.05413538	18.37466565	18.57623937	18.98392442
Zm00001d052896	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052898	0	0	0	0.536168864	1.246241633	0.807610145	0.669804484	0.933079032	1.307831553	0	0.144569095	0.253993669	0.288651882	0.157095248	1.126619728
Zm00001d052899	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052901	14.40024639	14.02796249	13.33301811	13.30115294	12.55870563	13.80507797	13.51393382	10.88469349	11.98211101	5.778110068	12.85328943	9.596088575	11.77353828	9.969880849	10.60310895
Zm00001d052902	0	0	0	0	0	0	0	0	0	0.351021804	0.011462676	0	0	0.019929371	0
Zm00001d052903	0.813864327	0.929463202	0.566005606	1.414711814	1.33909296	1.6118844	2.636193019	2.649096371	1.799415903	0.133763839	0.223341861	0.088754805	3.94496841	3.212796501	3.939264698
Zm00001d052904	1.921950657	1.854350584	2.052097928	2.176874033	2.366807295	2.458316476	2.372920077	2.244559698	2.17351872	0.740191791	1.320046218	0.61595149	2.891980491	2.772110254	2.75029515
Zm00001d052905	32.34167396	29.55346384	27.854618	22.28456023	18.33843032	24.38664353	21.90497393	17.7943136	22.03266641	7.852935673	10.48967505	12.35268638	9.577054703	9.219237533	8.098242358
Zm00001d052906	0.546576069	0.370022837	0.152839428	0.213020613	3.555958646	0.987704944	1.341215696	1.721758526	1.356585758	1.281491467	1.300959296	0.946050257	0.137618139	0.157283669	0.181676001
Zm00001d052907	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052909	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052910	0	0.083317595	0	0.013750137	0	0	0	0	0	0	0	0.012213204	0	0	0.025493245
Zm00001d052911	6.672357158	7.277383876	6.154038043	4.06512877	4.171432982	4.556877071	3.599729613	3.32426765	3.291546753	1.284403414	1.725776683	0.87437914	3.101014445	2.935126512	2.744269759
Zm00001d052912	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052913	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052914	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052915	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052916	0	0	0	0	0	0	0	0	0	0	0	0	0	0.006980385	0
Zm00001d052917	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052918	0	0	0	0	0.073397552	0	0	0.009595108	0	0	0	0	0.00890486	0	0
Zm00001d052921	9.991003513	10.55279134	9.422659139	8.154429076	9.473522039	7.809031079	5.622965272	6.793523144	6.168637645	0.436051931	1.762261828	0.448307049	2.929509526	2.758918088	4.298712996
Zm00001d052922	10.92742426	10.84929434	9.091848901	9.90350196	14.99458474	11.41842906	13.55089074	12.37327562	11.04523271	5.128407109	7.254008126	2.244968861	8.087611044	7.233380344	7.581857121
Zm00001d052923	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052924	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052925	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052926	0	0	0	0	0.103766454	0	0.01840419	0	0.135971153	0.021722218	0	0.017447434	0.105750344	0	0
Zm00001d052927	0.161264924	0.162491015	0.1152418	0.744153684	2.241771563	0.953282956	1.446262148	2.508389399	2.530803687	0.372538286	0.798188953	0.133981473	0.433105507	0.437541074	0.125849875
Zm00001d052928	6.002372973	6.125888287	6.316435707	7.448281605	11.57536824	8.453092059	9.031554259	8.728637825	10.07161506	2.069565478	4.630895781	0.768495461	5.594560662	4.596088806	6.791355544
Zm00001d052929	9.679345905	9.942452326	8.408103884	7.590301502	8.352215112	7.593857034	8.18095346	8.638229808	8.939140076	5.195740518	11.22892206	5.833848632	5.635646456	4.95459704	4.647622769
Zm00001d052930	25.62985665	26.53346119	21.87407946	26.01445389	23.78727775	25.71863755	19.72597816	20.09147533	18.31879472	29.1003276	25.97198688	23.73494391	23.03493675	22.90701744	23.04871402
Zm00001d052931	0.006566395	0.016540797	0	0	0	0	0	0	0	0.027168423	0.016560869	0	0	0	0
Zm00001d052932	7.712407698	8.081942892	8.842356123	13.86022797	9.904677541	10.11926733	6.871529128	6.794426385	7.142262519	1.455708071	2.253577069	0.705252642	9.317866695	10.78100796	11.23452328
Zm00001d052933	3.335303602	2.087147844	3.263740631	5.245532492	8.724738839	5.643261777	4.463436723	4.927539087	4.139333432	0.735989367	0.699511711	0.163344542	1.382919751	1.347049395	2.191869162
Zm00001d052934	0	0	0	0	0	0	0.00834631	0	0	0	0	0	0	0	0
Zm00001d052935	0	0.141139096	0	0	0.319918214	0.183050624	0	0.337795005	0.43763393	0	0	0	0	0	0
Zm00001d052936	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052937	56.82805762	41.720036	49.56703766	4.787558469	16.16747485	7.718161664	5.139191731	8.916624315	2.897204468	0.05684074	0.35637963	0.189141603	4.849152718	4.21465849	3.825523851
Zm00001d052938	18.68559654	17.70885966	16.85347035	3.959362788	8.77491579	3.329220036	5.10384064	4.664558101	3.643044107	0.427696364	0.908058996	0.116450385	2.24684583	1.999403954	1.31259339
Zm00001d052939	28.16557642	17.10225421	26.59700596	2.080283886	3.77802569	1.943380164	1.879017903	1.932381376	1.559656354	0.127804248	0.268084019	0.150960651	0.994283735	1.398298041	1.077669005
Zm00001d052940	0.177867108	0.19312438	0.221053765	0.413059297	0.307100287	0.12774125	0.351174074	0.354980269	0.264744192	0	0.030937397	0	0.43239508	0.443757076	0.538915082
Zm00001d052941	12.59227224	13.30368425	10.23690736	4.459464549	4.282408579	4.070409879	3.970646431	3.70859251	4.121797344	2.350055506	2.800026129	2.507056855	3.018481903	3.079596064	2.810513744
Zm00001d052943	9.316475468	9.119602873	9.080000646	10.12767147	8.532722837	8.967516859	8.35521675	8.213631326	9.708865461	2.523735291	5.488644789	2.626957503	7.281897584	7.108815378	6.631189021
Zm00001d052944	0.706701479	0.905846989	0.637343678	1.723736297	1.961252428	1.570710013	1.468866526	1.523260767	2.028495539	0.922906106	1.127767903	0.76206815	2.477441267	2.152736699	2.429438635
Zm00001d052945	1.525545416	1.51497373	1.203200519	2.414830928	3.408201001	2.47403132	2.308238243	1.916104711	1.827148844	0.330432542	0.869392313	0.200408363	2.451269773	1.59731482	2.057695133
Zm00001d052946	0	0	0	0	0	0.005666148	0	0.005576589	0.022815187	0	0	0	0.020701691	0.005069989	0.005347027
Zm00001d052947	1.057705165	0.682661232	1.17064138	2.303544892	2.780429711	3.345958267	2.674770621	3.229621893	3.063171537	0.050802232	0.265432865	0.06412167	0.912731028	1.85749712	1.825151509
Zm00001d052948	11.8808068	11.05051792	11.80628408	16.22144876	21.1593902	14.74406051	16.19770821	17.49334217	17.93791177	2.842658253	6.113867367	2.1196669	7.16732236	6.886413735	9.766597647
Zm00001d052949	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d052951	15.32082082	15.17925705	15.7456049	21.58748782	23.69095045	23.55029488	20.83329976	21.82479566	22.63848531	15.73837549	21.73267777	15.62832491	13.16602463	12.22896926	13.48936799
Zm00001d052952	3.46658072	2.079129164	4.811841534	8.197556982	22.04769463	9.928135404	7.873437749	8.703616448	6.773781357	0.020696911	0.416330429	0.265982393	1.998383556	1.332533285	2.828043213
Zm00001d052953	0	0	0	0.005134047	0.032545359	0.0100868	0.004810249	0.004963685	0.015230734	0.153291752	0.020764667	0	0.059885922	0.022563816	0.009518706
Zm00001d052955	0	0	0	0.030230798	0.007984865	0.029697043	0.007081045	0	0	0.033430648	0	0.006712931	0.006781272	0	0
Zm00001d052956	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d052958	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d052962	12.24431587	4.672742278	10.42070666	4.813368039	42.56355517	13.51918021	39.19075307	42.03029455	29.02808412	2.530228172	2.347774799	0.903242894	0.729950684	0.774670088	2.608116107
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Zm00001d052987	2.987125099	3.065573798	2.854691057	8.410103065	6.441949393	7.048189708	10.80994747	6.663634543	8.888269232	0.83557296	2.086056832	1.073820633	4.645571175	5.526955904	4.367155011
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Zm00001d053003	23.82292088	23.42297516	25.71632238	22.50491772	26.26423438	24.21046819	22.70517276	21.77514408	21.34510668	7.740894631	12.25539445	6.788856645	18.26312282	17.0805455	16.8469553
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Zm00001d053010	117.206465	128.5616717	129.5741652	125.2973949	151.9550347	118.7122978	131.8462699	140.0220824	134.2174135	70.26078715	95.4337783	47.84046	125.7929885	125.2805548	140.1509579
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Zm00001d053014	10.48994719	10.59896922	10.23839639	8.970141988	13.64708177	10.42499604	10.84168416	12.30826023	11.1151878	19.69423692	16.9538126	18.06783091	6.859891994	6.999136888	6.780315983
Zm00001d053015	2.901790649	2.251627751	2.329103599	20.89534402	12.10786048	19.88099765	22.44348539	16.57811673	15.76337715	0.011910856	0.174250053	0.10523569	277.2970864	307.6051394	261.0105706
Zm00001d053016	7.374703471	3.856614667	7.244698713	3.675378367	16.82998039	5.556625856	8.617341067	10.61692186	10.66408458	7.732287423	14.55689932	10.12013537	2.823233943	3.128177718	2.87529494
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Zm00001d053018	12.76236063	13.83281249	11.29550402	5.516930842	8.868746562	5.980164333	8.91946963	9.395569396	8.763343983	25.02589403	28.14802622	29.74661733	2.418180806	1.609470399	2.740849792
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Zm00001d053151	118.3530508	114.9069006	121.3257002	171.628238	144.5869354	167.4359889	129.8569005	130.3176748	140.1303342	51.2514033	51.83919637	24.27502327	92.4129442	83.95033065	96.84519209
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Zm00001d053162	16.79767307	17.37042208	18.00227166	12.36656436	17.06319274	12.73749968	14.94803755	16.97513603	17.79584565	11.73646458	19.35110645	10.78959693	7.390503733	7.503583327	7.592778463
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Zm00001d053622	8.713757436	12.28277959	7.957646089	9.953338191	19.12714753	8.767416151	14.46418595	19.02517807	16.7725429	43.57823123	40.38467161	48.94011669	19.22855694	18.58016854	18.17138781
Zm00001d053623	4.345552367	3.556904438	3.163839776	4.697590237	9.755060635	5.933120911	6.972730134	7.758942197	8.027465237	2.758627382	3.823281586	1.640229271	2.562216393	2.265932652	3.050470245
Zm00001d053624	14.10363984	13.72434486	13.04079391	22.80246758	27.96563358	21.64054974	26.26542775	31.20477957	27.65927062	34.30058503	44.9945016	34.55184198	15.64532763	16.12453123	18.09711324
Zm00001d053625	17.46569885	15.93047538	21.77577152	30.13356555	41.8607709	32.31329166	25.95095961	26.80116121	22.06765567	4.001853246	3.447972916	1.895622138	18.42070275	11.88755775	27.71930851
Zm00001d053626	60.15732419	70.53154901	52.1337031	28.02834195	22.83807996	63.97834447	18.72833448	18.78563672	10.74791922	162.133214	43.70133764	101.5125995	53.70837015	52.97715006	59.94725731
Zm00001d053627	7.503936286	6.606019827	7.004150071	7.984041816	7.765836291	8.235708197	7.96458423	8.831263158	7.740948922	3.115529963	4.879206957	1.948246893	4.732141459	5.818236746	5.991568554
Zm00001d053628	4.901998071	4.834764778	5.078823454	3.770424732	4.693530059	3.762274536	3.37104163	4.162784397	4.245980259	2.005838881	2.96451107	1.204365864	3.158961091	2.509140431	3.043183907
Zm00001d053630	7.948970405	7.207212072	2.875578576	5.476533185	8.097220225	5.989453075	5.741638394	5.234808264	4.95533815	0.308815231	3.325615369	0.399624025	1.907098558	4.595614939	4.559092289
Zm00001d053631	1.913331409	2.355996638	0	0	0	0	0	0.012888504	0	0.73709482	0	0	0	0	0
Zm00001d053632	4.845192431	4.99856111	1.936601219	4.38779973	5.90302683	5.026231104	6.003010857	5.343116853	5.344889213	0.738748853	1.980358442	0.107885111	1.335047084	2.242027574	3.80015072
Zm00001d053633	7.189700719	8.284456016	3.072935777	4.805183963	6.057337115	3.514523776	7.671848824	4.848351831	3.833932885	1.307757641	1.725500055	0.438774621	1.020798754	1.605267934	2.48396871
Zm00001d053634	23.63158885	24.98838065	26.34505243	30.46041586	30.52022376	25.71303786	26.2437002	27.64621389	25.77421256	7.593244835	11.81608696	7.299032288	17.22556991	14.56147537	14.31028875
Zm00001d053635	24.55706051	16.69989474	9.484385571	13.62950171	23.06972037	13.07546594	19.19637371	17.23836029	14.1613532	3.861135593	6.594875432	3.211488558	6.615589079	7.695968845	8.872285361
Zm00001d053636	19.70266065	15.53083543	17.27837021	33.64445288	50.23650308	29.48265238	31.56525269	41.73990167	40.70845445	3.848278767	12.73783221	2.051644048	12.31246918	11.62084798	17.45401172
Zm00001d053639	0.250848329	0.090269828	0.022268217	0.335193379	5.571782561	1.382955864	6.008883623	7.129555379	2.519119556	9.958740302	4.405994224	10.65862128	0.82207148	0.333914907	0.3728763
Zm00001d053640	2.022748526	2.075540581	2.434769779	1.746473687	3.298967998	2.686099825	3.355294258	4.434498726	4.736269884	2.145925922	4.173955832	1.911653851	1.290048426	1.031172235	0.883097622
Zm00001d053641	27.28094114	25.83620388	25.47832808	10.38970748	16.76537124	11.69876376	16.36306431	16.87016967	15.98022089	24.72688403	25.16927124	29.94796257	12.86124704	13.01741284	13.20233447
Zm00001d053642	19.35488436	19.53925641	20.61141977	18.42639096	18.73781746	18.37822705	27.42859542	23.57140615	25.57249567	38.72860977	36.67474062	30.29897426	25.55958311	25.21097016	23.24698128
Zm00001d053643	0	0	0.038813592	0.0973739	0.195467316	0.325225867	0	0.216528334	0.057774151	0.064608403	0.0393829	0	0.227162932	0.342361775	0.848513041
Zm00001d053644	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053647	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053648	5.973965957	6.419450633	3.212587211	2.262490139	4.976284032	2.830418797	3.983356135	4.617874445	4.053931906	8.205479976	9.010985602	7.559917647	0.919598502	0.721177147	0.93728568
Zm00001d053649	25.49333094	25.26813156	26.56772228	26.5257029	38.99434095	28.55978219	30.4308439	35.926095	34.84678256	24.88375379	35.17244585	24.01501516	17.31584578	16.42874903	17.52325175
Zm00001d053650	21.64612037	19.23053159	18.2742113	8.418853355	12.79488861	9.092013316	8.298455019	9.230748353	8.95545832	11.20426606	10.20428122	7.713722449	7.184599296	5.637590557	6.179530887
Zm00001d053651	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053652	0.295717206	0.14325266	0.268571003	7.560516264	6.249399409	5.462279365	2.631462326	3.757674347	2.370558641	0.062745043	0.458964781	0	9.112946437	11.99449668	14.35935672
Zm00001d053653	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053654	0	0	0.11441515	0	0.020217572	0.075192512	0.10757466	0	0	0.232776364	0	0	0	0	0.07095763
Zm00001d053655	0	0	0.04468284	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053656	0	0.034997906	0	0	0	0	0	0	0	0.881427574	0	0	0	0	0
Zm00001d053657	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053658	32.04305277	29.88974113	33.63187741	54.37207132	61.67083077	47.73933228	47.91424424	55.46003486	52.73758272	19.92122862	30.08112618	14.92051611	41.66790091	37.23605654	39.95132318
Zm00001d053659	0	0	0	0.012800428	0.040571748	0.012574424	0.071958725	0.061878364	0.012657975	0.155708514	0.064714206	0.011369649	0.126339375	0.123765581	0.22545828
Zm00001d053660	2.202077947	2.068587637	2.793764557	6.648421949	6.347164143	6.373663034	7.054659538	5.9299573	6.766800638	0.809874276	2.568624119	0.884268731	5.256951322	5.159914682	7.945337745
Zm00001d053661	7.148102307	5.48547178	8.835137873	9.91345592	12.94424248	9.068458685	11.57034619	13.8939911	10.1162538	1.966295201	6.009324225	1.276454255	4.130608431	3.768131513	6.457803217
Zm00001d053662	0.055313295	0.005573384	0.010998964	0.488409139	0.241972823	0.168060559	0.266290372	0.349483073	0.158262588	0.051874584	0.066961766	0.049018846	0.118842918	0.201312768	0.094645581
Zm00001d053663	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053664	5.941160479	7.386448792	7.186521326	14.2187091	11.95157015	13.64595159	10.96951589	10.5080605	11.99593121	3.878115702	6.408897237	3.654284364	10.87243871	10.27312402	9.714976926
Zm00001d053665	6.979828289	6.502522317	6.703062246	9.867995651	13.82075756	11.59011675	14.40206819	14.31661697	14.78547642	5.290505843	8.801787402	3.983119072	12.38300334	10.17042592	9.659107375
Zm00001d053667	3.384253558	3.562129078	2.442554839	3.802211798	7.137327368	4.357593283	6.676720071	7.24804799	4.824020043	19.23832986	8.414407958	7.975752986	3.872914767	3.173940942	4.178675421
Zm00001d053670	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053671	96.97334457	92.99849143	92.47824518	120.7024847	138.1062319	135.2033673	162.7273601	165.8430166	147.1848115	322.5547892	245.0150451	352.4155497	143.784971	135.9998833	139.5995849
Zm00001d053672	2.410866177	3.040144504	2.40922948	9.265925305	7.468228695	7.728457113	9.636368367	8.616049405	9.895402983	2.058131841	1.980501611	1.104210289	3.900838352	3.770545679	4.546097282
Zm00001d053674	3.056500639	2.662666545	3.002282107	3.517363134	3.780876106	3.704520672	3.88303854	3.25683846	3.997356529	4.483115092	4.402859702	3.761482876	2.64309532	2.327761396	2.595549023
Zm00001d053675	523.5631892	603.9516834	722.1492923	2039.983086	1606.169538	2265.826276	2580.916308	2545.455453	2837.265394	10.99292774	99.66599368	3.064932533	724.5049456	571.8256684	727.5305292
Zm00001d053676	0.473690492	0.292783251	0.436076991	1.460505409	0.959351989	1.252020464	0.804635676	0.33846691	0.676147858	0	0.027654579	0.068020922	0.279761737	0.331759763	0.289037949
Zm00001d053677	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053679	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053680	4.036631743	4.316733354	4.089114593	4.131935321	3.622842415	3.807045076	4.325220477	3.361163799	3.287547659	6.754145608	5.532123676	13.55822096	3.298350279	2.312739619	2.342254045
Zm00001d053681	0	0	0	0	0	0	0	0.457899895	0	0	0.239442564	0.841354029	0	0	0
Zm00001d053682	3.959684773	4.93996523	2.763750166	4.634088727	3.758553414	3.287750028	1.852949516	1.651833802	2.013530268	13.9502859	9.596108562	28.5009399	1.407004575	1.234335212	1.87673678
Zm00001d053684	0.097931475	0.012334506	0	0.091601916	0.09032736	0.137976375	0.154484455	0.03542492	0.102660169	0.310646394	0.006174737	0	0.416436168	0.300596581	0.379294201
Zm00001d053685	1.772413283	1.949178545	1.545924134	2.982505155	3.647401923	3.35555018	3.227722288	3.615863931	3.525492121	2.041740056	1.995729731	1.973102784	2.620554655	3.309790869	3.47714362
Zm00001d053686	3.788536592	4.14483372	3.660689769	7.106348667	9.515491717	6.532908151	6.859922553	7.360417631	7.816421953	0.966558023	3.38137017	0.427552864	3.830320404	2.995150462	4.356579701
Zm00001d053687	7.385449636	7.18294499	7.217038237	6.524145189	7.272277448	7.675445987	6.408580872	7.077289625	6.849413148	6.511418205	7.003558283	7.366597846	5.089164861	5.403797513	5.221813579
Zm00001d053688	1.317627604	1.147172226	1.443741771	2.97652164	3.704618495	2.993190914	3.517686033	3.207494521	3.916167021	4.909314703	3.220540085	4.421385661	1.997992114	2.034093896	1.996303591
Zm00001d053689	0	0	0	0	0	0	0.046303875	0.238904293	0.097741583	0	0	0	0	0	0
Zm00001d053694	0	0	0	0	0	0	0	0	0.031993213	0	0	0	0	0	0
Zm00001d053695	6.031787677	4.876647167	6.009260327	6.344071291	24.32032309	8.705338875	22.75051959	32.76902643	33.2138225	41.64492436	53.10466365	45.01848257	3.529378173	3.733268455	3.100152547
Zm00001d053696	0.149157683	0.058707704	0.01158585	0.325540236	0.313231051	0.251265535	1.301734071	1.421940759	1.920007255	5.772822082	5.213692425	5.080825965	0.146048208	0.245267836	0.113168106
Zm00001d053697	0.943579023	0.948402992	0.977235656	1.517528281	1.49266698	1.600131555	1.541732168	1.835170646	1.615694658	0.37128942	0.534439163	0.367610524	1.354170712	1.003703564	1.328193605
Zm00001d053698	4.835779636	4.311344794	3.615724929	5.236651104	7.211068255	5.018959649	4.783875635	6.232214217	6.038203634	4.500447168	6.081547321	4.5729269	3.387619815	3.485255668	3.184798406
Zm00001d053699	0	0	0	0.071042375	0.600461878	0.209364152	1.464360054	1.579754638	0.702517625	0	0	0	0	0	0.06585755
Zm00001d053700	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053701	0	0	0	0	0	0	0	0	0	0.008931732	0	0	0	0	0
Zm00001d053702	0.187920741	0.055691028	0.099601545	0	0.127447943	0.016928575	0.116251088	0.296565851	0.224941968	0.968089936	1.637909107	0.725533917	0.00309249	0	0.015975149
Zm00001d053703	0.489177862	2.140210925	0.543956772	2.600873372	6.852728774	5.456873558	19.94598286	21.35831375	16.57465311	6.213945311	19.86967443	9.582879783	0.374540766	0.282238921	0.654854737
Zm00001d053704	3.638003424	3.006486775	3.331499952	3.024773369	3.128456842	2.298900489	2.043466538	2.724311981	2.69200031	0.563357923	0.998012702	0.608037365	1.228454975	1.623229558	1.52007343
Zm00001d053705	0.096276295	0.060630175	0	0.030017905	0.095143607	0.014743954	0.084374139	0	0	4.896295086	0	0.013331314	0.013467033	0.013192682	0.013913567
Zm00001d053706	0	0.003962939	0	0.074557705	0.23216938	0.161901853	0.356630422	0.44008975	0.547139158	3.888142093	0.801485074	1.390703023	0.57039472	0.762278932	0.727540256
Zm00001d053707	1.678923464	2.19699773	1.680096148	5.520230442	6.234460644	6.758421739	7.821810117	8.781161625	7.287359859	9.201905835	11.27327668	14.92698918	6.343896226	8.150762942	7.083625505
Zm00001d053708	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053709	9.763746698	9.16675333	9.959609966	11.42051379	12.81276472	11.10924255	10.21227758	11.61700359	12.10271818	6.019850711	7.522849999	3.238142196	6.141672334	6.081951111	6.368305372
Zm00001d053710	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053711	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053713	110.7825655	121.3937365	128.1472562	211.0242693	155.3595032	190.3631918	118.7285382	126.526899	111.447396	6.452560811	10.95689171	1.245203962	450.1003319	485.5584769	494.8097278
Zm00001d053714	0.211957115	0	0	0	0.069821149	0.064919117	0.061917973	0.638930086	0.261401907	0	0	0	0.592967044	0.232354833	1.531570937
Zm00001d053715	1.591793703	0.813404424	0.700878433	6.704358219	17.46253405	9.093341199	39.92114942	36.30296175	33.36187491	468.2484735	217.0181223	250.1592391	31.26889209	29.45526501	47.44898473
Zm00001d053716	8.952843452	6.387272688	9.121823763	20.63372329	21.16229582	17.98431887	12.47592355	12.74015283	15.57972715	4.324387453	5.772049056	1.105673215	9.736466394	11.35068779	11.42307952
Zm00001d053718	10.07670392	11.09122248	12.15701086	12.65288931	7.357134959	10.51159685	5.186722233	5.700695534	5.477784486	1.566964525	2.461291112	1.97824753	8.845424826	9.543669529	9.244596801
Zm00001d053719	0.471922573	0.384066239	0.117301353	1.810958034	0.679226659	1.325342904	0.738083279	0.761626379	0.832724025	0	0.054933185	0	0.18686492	0.30244381	0.243424615
Zm00001d053720	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053721	0	0	0	0	0	0.008871362	0	0	0	0	0	0	0	0	0
Zm00001d053722	113.8696276	110.7741685	126.3078491	84.39297925	60.63783784	69.3608365	96.87605523	121.0238062	116.4441373	3.834221996	27.04646819	5.31270091	95.19097619	97.2000667	101.8486325
Zm00001d053723	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053724	1.234301787	0.8955892	1.784101594	2.34251598	5.692307888	2.827135159	3.715442941	5.209004499	2.92865051	0.092516612	0.710573417	0	1.065944094	0.6177127	1.287421395
Zm00001d053725	32.78501201	31.51363887	30.15373556	11.50588387	22.53981524	14.23927218	16.76480141	17.56304553	19.05008832	12.25285016	21.07190241	8.290825313	5.456126133	5.449776981	6.17389862
Zm00001d053726	5.863341367	6.493726544	6.026361477	7.349530342	6.174130273	5.910388647	5.330727349	4.659541604	5.815411912	1.207859114	2.12768506	0.443971833	17.75694862	20.41102231	20.04472149
Zm00001d053727	0.131034191	0.130029977	0.23193742	1.886760014	1.658551396	1.906958988	1.758484811	1.618276481	1.478898561	0	0.060086661	0.030790185	6.105201089	5.036255565	7.436949042
Zm00001d053728	18.05337608	14.97158019	19.37129742	25.01891531	30.27088525	22.08570783	28.25491794	27.30524749	28.18700274	7.20177008	11.63111785	3.241070126	17.06037889	17.6189407	17.67156532
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Zm00001d053848	4.18189106	3.576834747	3.281917781	1.711495837	3.120196141	1.850996553	4.168228513	4.285525428	4.783704561	4.788352805	5.955887352	4.776375879	2.548143498	2.444029971	2.772773872
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Zm00001d053853	1.575966506	0.964706485	1.540869083	1.711202056	1.401319739	1.755249639	2.202093606	1.893612626	1.352367665	0.106395968	0.298796524	0.244165619	0.82628201	0.809448939	0.815455036
Zm00001d053855	5.820907598	4.408056246	4.047550342	12.63985928	12.23340999	12.35713749	5.182947099	4.659589333	5.260451974	0.134079186	0.658945935	0.148078309	5.317095956	5.395279212	7.755385122
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Zm00001d053857	22.7899837	22.95284034	22.7798026	24.77889273	25.39856894	22.78242167	21.69700637	20.35623526	21.44378395	3.262858207	8.60834636	2.468084902	11.65897541	11.5121045	11.73220392
Zm00001d053858	0.240953346	0.289030125	0.142598823	0.236112298	0.11338978	0.358458136	0.113962328	0.228277413	0.127355272	0.055385732	0.585996236	0.209720643	0.154076875	0.26414152	0.470924321
Zm00001d053859	10.96474599	12.73213158	9.659658745	7.760568019	11.39963159	7.821929728	14.94769007	12.21686218	13.15170051	42.6547917	58.48718863	63.78061453	7.19627213	6.542498762	8.103487406
Zm00001d053860	0	0	0	0	0	0	0	0	0	0.448925845	0.155314095	1.374103298	0	0	0
Zm00001d053861	39.10656981	40.50178433	41.40746296	37.13808801	19.96683696	32.57763343	24.72526886	20.47114558	20.67606838	2.587364877	5.13666928	1.354841514	54.04366379	57.26604167	52.38446358
Zm00001d053862	0.41998494	0.164163906	0.359971393	0.180616206	0.457979398	0	0.118457477	0.29685883	0.07144247	1.517978069	0.858340715	0.96256605	0.178266999	0.063503757	0.150691005
Zm00001d053863	60.1026845	56.56318762	72.54413886	78.60575047	110.1283793	73.57915689	100.4880027	107.3465322	95.93507058	20.29576101	67.45379329	13.309192	39.49898488	34.16224828	55.23406597
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Zm00001d053868	38.28259418	38.92554691	45.84159234	39.2878197	19.46158302	28.15238742	8.950310483	12.79385976	8.16888462	1.255549206	1.286557058	0.278197429	141.1119962	125.3839763	133.8322204
Zm00001d053870	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053872	2.487139722	2.930170763	2.312166259	2.467231061	2.319663359	2.837093428	2.580759214	2.344457031	2.558679838	0.297954962	0.51559736	0.16416128	2.13784096	2.172579892	1.692668917
Zm00001d053873	1.179336702	1.599638858	1.533330038	5.249687344	5.869146289	4.756886897	3.646545395	3.948816879	3.345233229	0.588042215	0.137278285	0.080394811	2.04048341	1.561341215	2.968178378
Zm00001d053874	5.719881984	6.102038146	6.055730565	5.709847407	4.198166692	4.400484818	3.788039602	3.822538199	3.870489887	0.466297721	0.747378476	0.211501275	5.181120717	4.530513611	4.856251831
Zm00001d053875	9.42430748	9.241852679	7.613734561	6.77296169	6.852305862	7.409572269	7.023976488	7.253578662	7.106600123	5.692040901	9.061384348	6.388394336	5.484385758	4.72632276	5.064463368
Zm00001d053876	0.00462491	0.017475274	0.011495703	0.057679871	0.067033971	0.050995328	0.194551465	0.223063548	0.011407593	0.414603368	0.268279354	0.25616327	0.010350846	0.096329786	0.053470271
Zm00001d053877	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0.024186399
Zm00001d053878	0	0	0	0.023340411	0	0	0	0.045131817	0	0	0	0	0	0	0.021636978
Zm00001d053880	16.58339402	20.01410384	24.28731921	37.60379934	8.575089144	24.06827344	3.588867479	4.42594748	2.355839925	0	0	0	22.79064774	20.82766652	23.30815985
Zm00001d053881	36.27078792	36.28116946	32.09118525	30.32731867	37.83720048	30.70590521	31.47066829	32.0049372	35.43469408	20.29656339	26.70498963	16.97441213	20.69318078	20.84682681	22.46937182
Zm00001d053882	19.49475979	20.96027591	19.39135827	19.09104372	16.11544056	17.15010017	19.50817325	14.85440128	15.95663764	10.46512379	13.87084603	12.15727016	14.72928287	13.85204828	12.19881306
Zm00001d053883	18.76570316	21.36126903	17.53830435	23.72547225	19.93986613	24.25463946	19.81784018	18.8170938	19.88257429	12.76262296	13.56690601	14.93006536	17.77614507	16.65995109	15.30877395
Zm00001d053884	0.445428674	0.561019063	1.107160135	0.854645107	0.632065134	1.007466595	1.361264301	0.743656973	0.718363887	2.646299717	2.722083881	3.985361188	2.262191566	1.65268926	1.307247615
Zm00001d053885	11.97064263	12.97106544	11.16966968	6.030949598	5.270210921	6.168895088	9.94680605	8.47703489	7.979116094	9.761563368	12.38778317	16.34413517	10.00412461	8.925477346	8.787108864
Zm00001d053886	20.53941867	22.40562602	19.19880461	28.70277408	22.83916671	29.05606459	26.83755694	25.65160545	31.90895299	25.69714276	34.1968092	18.58372445	21.3564191	22.35338977	18.78456755
Zm00001d053887	38.20750111	43.5609725	43.07278754	50.97103419	69.52716478	50.30616529	54.37049768	61.25254597	60.49046495	106.8112723	88.43748076	111.7760968	47.61338114	47.14296114	46.75192833
Zm00001d053888	4.1917585	3.82090361	2.534555604	1.733199088	2.329891335	2.04173305	2.0727681	2.588458911	1.922924275	0.662258374	1.852216856	0.926184765	1.150552088	0.92274633	1.188701569
Zm00001d053889	9.307685701	10.62388356	9.679769212	8.748230863	11.03252472	10.25347512	13.11609209	13.43760077	14.95551944	5.539629817	7.01750898	3.725418559	10.57904522	12.2048658	14.09182711
Zm00001d053890	0.399797429	0.324121783	0.314112853	1.816774405	1.774137783	1.756547639	2.201574168	1.113735678	1.382838054	0.209146629	0.620055634	0.111991998	1.126178956	1.239251808	0.685361263
Zm00001d053891	1.67114028	2.142515642	1.941595254	2.684985941	1.391474469	2.354148375	1.602890269	1.204414377	1.909930457	0.120118721	0.164744874	0.021105038	1.882242433	1.602221413	1.167421118
Zm00001d053894	12.04146121	11.01561675	11.10669568	15.48513787	13.43200683	15.28048902	12.76675393	11.83141148	12.70484091	1.207455721	3.303599666	0.619203408	11.34202826	12.23559945	12.0503096
Zm00001d053895	0.225234888	0.296878788	0.501256717	0.67286111	0.531443271	0.859917129	0.801802161	0.315793031	0.484494914	0.093913223	0.066053121	0.168270806	0.756135217	0.459368175	0.224067068
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Zm00001d053897	17.49627065	12.43795791	21.29253767	17.23155467	19.22116798	20.43750485	25.71268968	28.53203474	26.24127536	9.226858855	12.23296774	8.893291094	21.35286943	21.3164548	18.95015979
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Zm00001d053900	13.32278056	12.46601115	16.17060213	19.06586242	24.57855885	20.50951213	14.40680794	16.87773323	15.70835505	3.067497639	4.78677368	2.603452325	10.63597656	12.33736118	13.76579945
Zm00001d053901	24.82913021	25.34112524	24.33929073	30.85858033	40.74251492	33.25517092	38.36433992	42.26768263	42.44878629	10.86413576	24.28760796	7.45862178	23.05514391	23.44102791	23.61313385
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Zm00001d053909	13.10646785	14.30826068	15.15120619	7.181149425	6.996834985	6.012508972	6.022801774	5.721791852	5.940376953	2.524728256	3.8638253	1.668325937	5.85500052	4.981396339	5.005924335
Zm00001d053910	12.87536649	13.56578597	12.00115753	8.536113514	11.30235488	10.22715442	10.29168021	10.04417933	9.902499404	12.7569277	9.344764889	12.18602808	7.995619789	7.716404795	9.773839805
Zm00001d053911	5.020509632	5.587652954	5.843535615	8.952543298	4.236309434	7.48151559	3.937300914	2.689191757	2.351647981	0.173102762	0.231325867	0.160427675	9.183451471	7.773918277	10.40326049
Zm00001d053912	2.098148489	2.245952571	0	0	0	0	0	0	0	0.006117744	0.005593726	0	0	0	0
Zm00001d053913	10.3091627	9.95173331	6.904875928	7.251605196	7.602716925	5.40823249	6.908882516	8.150797351	7.00592919	20.04792129	16.0140686	19.83685584	5.009701221	4.242862901	6.248090094
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Zm00001d053919	26.51671825	26.76281727	25.72195588	16.35076046	16.57088593	15.21271304	14.69519885	16.61750666	14.06124424	15.4688014	16.80552691	14.88511808	10.02608444	8.979546133	11.67057054
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Zm00001d053926	82.02740352	75.60630947	88.29069784	46.04222463	78.73913789	75.23816499	86.37188628	73.68917598	67.91003706	26.3369829	31.70903664	13.28137431	39.24806512	55.27901265	42.58788252
Zm00001d053927	11.33003511	11.68307095	10.42376363	11.25311212	9.601385424	10.35515094	10.10009066	9.814397402	8.514513612	3.627208595	6.874396001	2.936115221	11.13160726	11.55301628	11.82669888
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Zm00001d053932	7.05319628	7.22785665	7.886906386	19.52628872	23.89105614	17.11565824	29.93692919	37.28665486	35.12960812	14.97888117	18.1773108	7.983936438	26.56956352	27.52896297	34.37868938
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Zm00001d053936	21.16551197	24.31091905	19.19683871	10.93935694	7.101819975	8.866608727	9.338991048	6.789401735	7.429681108	3.733311638	4.213738934	2.331272385	19.15464718	16.8624489	17.56098156
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Zm00001d053939	38.26613343	46.45556384	38.36865365	18.4208291	8.842367967	13.42378678	14.08743234	10.03921816	11.47987388	2.342507088	4.598697129	3.191201517	25.97585669	24.64347996	25.33550388
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Zm00001d053957	13.72082727	14.75168082	14.77179828	18.40057633	13.8970258	17.65038532	11.76381584	14.93960698	13.45571847	7.010734325	9.036857673	7.270031304	17.57390841	16.19199911	16.58941339
Zm00001d053960	24.55444188	11.67538837	38.58073524	1.385546932	2.937041793	2.011282948	1.273356568	1.604071682	1.178135147	0.790499857	1.552658611	0.274354575	1.472841746	2.350427883	3.092441492
Zm00001d053961	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053962	8.711302519	8.256337669	8.375164696	30.26586026	27.41571345	27.99023991	22.47096937	22.49991847	23.26356808	2.533541897	8.961315747	1.563704659	16.22901317	19.08867252	20.2323337
Zm00001d053963	5.274636094	4.314548219	6.415034618	4.971347939	6.878297648	5.212642774	5.235488988	5.895330768	5.348095449	1.63208576	4.005617738	1.457516489	1.61610534	1.339943742	2.466282749
Zm00001d053964	22.23760812	21.76959257	21.22020622	11.25049573	20.63991723	12.89383318	17.1596714	18.36752418	15.58115816	120.7484226	59.12700359	115.0739917	11.81627116	9.812386176	12.30239251
Zm00001d053965	22.53906133	12.37904309	40.22651132	58.49283507	41.18843907	54.32150963	61.53910161	65.96728651	62.52027121	5.299751596	22.89329765	10.09624834	94.16188456	104.2601253	93.29700962
Zm00001d053966	25.07580862	23.6648614	20.79981524	18.1169167	16.06032029	19.08946968	18.74003292	15.83120847	17.65157944	16.06302549	17.18593383	12.14392332	11.70921326	10.53301526	12.08098044
Zm00001d053967	31.87337075	32.79615368	28.87727319	30.50619138	29.3229574	36.04767267	56.32942218	48.3832652	46.99806594	35.67374658	34.38070639	28.01839395	33.07509549	31.41995201	30.41325125
Zm00001d053968	13.0168928	14.58925494	13.04251192	13.47443093	14.09780061	13.26100451	12.17519542	11.1662662	10.76800124	2.907110586	5.335098758	2.323944631	11.08963197	9.456468151	11.04154647
Zm00001d053969	3.492003146	3.185981006	3.095476462	3.628652508	4.334435709	4.651970358	4.035031852	4.123607333	3.666945314	2.299003079	2.504309807	1.659152193	3.013773951	3.107445365	3.129736778
Zm00001d053970	0	0	0	0.010409139	0	0	0	0.020127468	0.010293299	0	0.157874218	0.055473892	0.037359096	0	0
Zm00001d053971	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053972	10.87278748	10.23186219	10.02458565	11.03487816	11.98393212	11.26356448	12.65676425	13.49715766	11.602326	14.67752374	12.57960016	12.24496826	12.11173565	10.25893448	12.19930829
Zm00001d053973	0	0	0	0	0	0.408515418	0.779260339	0.201029222	0.616844744	0	0	0	3.917921276	4.203638952	2.69855328
Zm00001d053974	0.250948428	0.467234613	1.057678117	8.586318594	4.039819337	6.443002146	9.727694007	4.959790404	4.951824152	2.332408021	0.096312093	1.450378852	33.31982622	31.30142258	30.82953288
Zm00001d053975	5.82980475	7.484102193	5.345986584	7.78827403	7.520785018	7.387563638	8.580769561	7.052966671	8.857743652	2.794563384	5.535227949	3.92131074	5.33263734	5.015254585	5.103019325
Zm00001d053976	12.99777412	13.06266668	12.83923977	7.055242712	5.767983554	8.184797575	6.688971136	7.308353006	6.79400296	6.20446478	8.47555904	4.953627266	8.44057917	7.988084438	8.440147923
Zm00001d053977	3.890442567	3.955443328	3.815614488	5.699628219	9.50102251	7.015493632	8.745082169	9.815280495	8.189348312	6.162853999	8.915472826	5.555821231	4.196173644	4.299095499	4.678520372
Zm00001d053978	0.583197479	1.144514852	0.994492396	7.104237453	3.073792945	9.288457206	3.946165079	3.761320567	2.375178636	1.814408623	1.145903697	1.337151938	36.5920669	46.93809654	44.53224829
Zm00001d053979	25.70960384	22.34030262	26.54042948	36.156742	49.21115553	35.63603406	23.55072566	23.12448089	20.29568482	0.838976169	3.31069999	0.727071748	13.2026126	10.31884002	22.17255604
Zm00001d053980	0.033562767	0.07045405	0.003475992	0.006976338	0.003685322	0	0.003268174	0.02360695	0.00344935	0.003857382	0	0.003098276	0.003129818	0.009198171	0.01940157
Zm00001d053981	115.4322285	110.1702406	105.5316677	40.91526439	45.12067986	44.99276672	45.81220209	46.6187676	41.20589049	3.384210215	14.19753554	2.276605019	57.53300759	59.44270949	57.45400767
Zm00001d053982	0	0	0	0	0.008578027	0	0	0	0	0	0.008209459	0	0	0	0
Zm00001d053983	14.34900272	13.79706429	12.70699018	17.07906848	18.68555945	17.01172446	15.11517411	18.85228195	15.69591073	17.18510961	19.92811465	14.34223414	19.7325362	18.84156476	18.14319699
Zm00001d053984	8.78302578	9.010014723	8.581896643	10.50810204	11.21376524	11.65092488	12.56328559	11.42294891	12.06450294	5.588798578	9.731319218	5.280736008	7.381533306	7.357319655	6.680879359
Zm00001d053985	1.264831045	1.941269083	1.236933046	0.655112695	0.54642638	1.04999615	0.549185497	0.583370948	0.468818637	0.343162729	0.261474185	0.130158914	0.301639757	0.310648309	0.511411513
Zm00001d053986	0.416097331	0.42492659	0.316798515	1.570840988	2.168380293	1.639550363	0.735885003	0.876877671	0.961603505	0.165439083	0.24108393	0.103813905	0.792823115	0.456140506	0.663090005
Zm00001d053987	6.916837399	7.081623036	4.714921588	4.40468168	3.963186483	4.455307667	4.837148788	4.839803568	4.071317166	1.532094949	3.508765079	1.532431715	3.981493015	4.859680394	4.083218603
Zm00001d053988	9.824161736	5.69403132	6.861089091	24.45032311	23.1115772	28.03948512	15.08593505	12.81537322	12.89326464	0.719423294	1.041518051	0.577845692	25.05167923	30.33117133	25.75668898
Zm00001d053989	5.646903583	7.260198501	5.563695286	6.192120167	5.847173981	7.155483665	5.714928106	5.315944533	5.172968839	2.488981267	3.208443755	1.471989191	5.295474497	5.180819483	5.740206011
Zm00001d053990	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053991	0	0	0	0	0	0	0.028526495	0	0	0	0	0	0	0	0
Zm00001d053992	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d053993	0	0	0	0	0	0	0	0	0	0	0	0.008455819	0	0	0
Zm00001d053994	14.48046807	12.52104618	13.13428511	13.20703085	29.11451574	16.58498933	26.20098698	27.146589	28.68452991	17.65751526	20.22017829	21.52032551	17.19362686	18.4707063	17.20609177
Zm00001d053995	0.388195531	0.021257987	0.125856665	0.694636551	4.581301733	1.468133804	5.837718193	5.576203167	3.913283362	4.818470735	8.151689055	2.056643181	0.056661295	0.111013976	0.273186875
Zm00001d053996	9.188687596	8.435149493	9.884747171	9.08280078	10.38181751	11.07477662	11.45858632	12.53019526	11.76552882	2.966267031	5.80032827	1.710228983	11.46199755	10.03794592	9.02309988
Zm00001d053997	1.576083245	1.434541147	1.578933529	1.757315404	3.23799887	2.418545074	3.818264251	4.426405329	3.714377044	16.53172049	13.89899662	21.14385879	1.383908321	1.418046987	1.711234917
Zm00001d053998	0	0.008387223	0	0.008305002	0.017548813	0.081583693	0.101155811	0.024088256	0.008212578	0	0.041987006	0	0	0.014599987	0.146278826
Zm00001d053999	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d054000	3.077780354	1.845520343	2.082443739	1.355269914	2.25404151	2.018485155	1.72855928	2.079569985	1.755213266	4.505834172	2.669968771	2.485230361	2.463458779	2.390216289	2.464085574
Zm00001d054001	2.857856948	3.120077945	2.675914149	4.341268102	3.965928491	4.487776285	3.644722975	3.306573276	3.230173844	0.557867603	0.852250955	0.336758077	2.185908743	2.010553577	2.204651541
Zm00001d054002	11.50240664	12.92513641	11.34145247	7.570171728	10.50884371	6.570617472	9.618908411	9.583174085	10.14359964	12.30871389	12.3728577	9.372163629	5.970543996	4.907009026	5.247241209
Zm00001d054003	12.76680618	11.87788294	11.13231838	7.404591851	6.962858597	7.780182846	7.915680433	7.120970286	8.249234339	8.343235198	7.755106663	9.119798476	5.660295842	5.807623783	5.344199546
Zm00001d054004	0.093425289	0.130743885	0	0.245978153	0.889066561	0.368811566	0.400280652	0.90119706	0.243240727	4.094530941	2.604960555	13.91396412	1.312631831	0.489321282	1.044119704
Zm00001d054005	2.435939972	3.019793822	2.810841624	5.537067661	5.680127525	5.255717986	5.061616703	5.063394711	4.770601459	2.013815197	3.383812319	2.165687734	4.309176005	3.946330349	4.311042293
Zm00001d054006	20.73351183	22.98867684	28.34740169	52.01343274	23.82984834	35.77825084	16.61606077	15.47749593	14.30046348	2.764066982	3.279485583	0.951478901	82.07284802	79.17156377	71.9674759
Zm00001d054007	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d054008	0.272064357	0.299832806	0.60016723	4.292231822	6.049429365	4.208115288	4.681183563	4.920715291	5.502705216	0.06566378	0.737626047	0.165759301	2.169197352	2.989921177	2.705074304
Zm00001d054009	0.410983159	0.395838384	0.931406087	1.567831714	2.914708849	1.569768352	1.55369767	2.929587658	1.744181689	0.800207342	0.884095619	0.65612224	0.595169044	0.331275126	0.838504619
Zm00001d054010	0	0	0	0	0.038245979	0.011853597	0.89314375	0.244991027	0.071594153	21.19006239	4.136103392	17.74881874	0	0.042425723	0.324393878
Zm00001d054011	2.652446155	2.376789066	2.591879332	3.777703517	3.820474269	4.187283034	4.641977206	4.282232076	4.364931782	4.049108998	5.045315819	4.059732561	2.637368469	2.69462092	2.354953635
Zm00001d054012	2.267740224	3.651890496	1.806766369	1.247450226	1.2806059	1.314727493	0.501579596	0.400391141	0.794077979	0.91593638	0.398314407	0.07626017	0.729581312	0.989951343	0.486908903
Zm00001d054013	3.965276445	3.178886716	4.297634938	6.688912802	9.659013462	6.578392169	7.806707649	8.301870135	7.980091607	2.030526129	3.299756886	2.453251294	3.530434557	3.682298406	4.233955088
Zm00001d054014	15.92500618	14.00600978	15.56450222	15.76317035	21.57094028	19.45974048	16.82374133	17.60923727	17.7563875	8.379949105	11.85761217	4.78291475	10.41151302	8.850951203	8.198787782
Zm00001d054015	207.7599773	226.4956785	237.0273173	126.5536078	67.85140931	126.0879908	44.05056081	43.5858612	38.40307558	29.94165648	38.03109631	23.57546386	260.0952916	260.189548	219.4267104
Zm00001d054016	1.092598614	1.190338433	0.981902949	3.408163073	3.347124731	3.562406853	4.811733075	5.164186308	4.252107408	3.934422886	3.487068439	3.528516932	5.648824421	5.152770116	6.605025709
Zm00001d054017	7.638161854	7.273483586	8.348254413	14.97323701	26.0200147	15.52075701	20.98300113	24.677302	23.22885472	10.50461042	16.48016013	7.307624509	7.786513987	7.410890464	8.198922974
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Zm00001d054032	10.06223439	8.842173636	8.052136968	7.726695467	12.17152455	11.3275086	9.960426306	9.428535867	8.944184166	11.48358519	11.49685501	11.07033641	7.019447715	6.546754403	6.874683816
Zm00001d054033	31.68509509	33.04016424	40.77755942	37.5504918	43.65711064	38.56241363	38.39599045	38.49591354	33.56215966	20.67382738	30.26103289	12.36493474	39.020301	31.73693654	39.30998437
Zm00001d054034	0.082263912	0.110087433	0.223645258	0.102595983	0.088070753	0.081887446	0.006007836	0.024797888	0.006340889	0.070909686	0.012967179	0.005695514	0.224386401	0.360722358	0.279380657
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Zm00001d054038	16.68471755	16.93251735	18.27829604	24.29097678	18.66315429	22.37603558	26.0144757	23.0888193	22.01827883	17.31268829	14.49933158	12.68096257	43.32939528	43.49936939	41.36243704
Zm00001d054039	5.712139321	5.080448489	4.631774488	8.834576476	9.666841714	8.258482974	11.69379153	10.58700827	12.78721189	10.13061174	17.94539039	8.136976387	6.886871898	6.944418787	6.916998945
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Zm00001d054044	560.7539131	555.0110152	521.6446634	3794.813118	2804.243435	2834.703518	2811.537223	2501.733513	3035.190867	52.17021115	109.8294306	26.34716968	198.2284086	130.5018129	232.3159332
Zm00001d054046	15.38013816	11.18580798	12.87170436	6.619857626	10.61043432	9.80204892	11.82985085	9.959322719	13.82682416	4.642301351	6.758810546	4.302378555	1.854369666	1.27729148	3.532359515
Zm00001d054047	17.08738408	15.4227162	19.51327898	13.68315429	19.5521575	13.6284787	11.22346623	10.79763945	12.31195372	2.058393612	3.471394372	1.065470167	5.069825073	4.857467402	3.903521758
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Zm00001d054060	0.069441188	0.065596075	0.12945257	0	0.091498953	0	0	0.010466283	0	0	0.120405403	0.057692848	0	0	0.010035436
Zm00001d054062	0.029212038	0.029434136	0	0.02914559	0	0.042946493	0.034134267	0	0.007205309	0	0	0	0.006537842	0	0.006754621
Zm00001d054063	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d054064	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d054065	27.499308	18.33836736	31.02499143	52.91094785	129.0246765	54.92306236	75.59793776	96.88916634	73.50241764	6.669510162	20.60213262	3.851245783	24.30802072	19.02732843	25.65800085
Zm00001d054066	0.733220737	1.553149389	2.12900877	18.72941626	11.69890621	19.27252649	18.71649595	18.50174554	16.7946583	2.215517992	2.471243387	0.539024473	7.436691417	7.051363074	11.16656348
Zm00001d054067	488.1690506	513.294178	612.4965974	1113.763649	764.0429733	1034.616868	784.2173436	718.3220399	920.7757446	804.1127604	566.5506193	851.878481	365.9891622	298.4168222	331.5659251
Zm00001d054069	14.85812561	14.18172379	16.61602817	29.20536679	26.90080245	34.06759628	22.34422531	21.86056587	24.21023532	4.070645925	6.707471428	2.233047119	6.40191953	5.858447671	5.968019072
Zm00001d054070	11.7429756	12.40239702	10.95021988	12.98100442	9.041786197	11.3005325	10.9721816	9.840663539	10.1593927	9.068668852	9.079563167	10.48481606	8.213390392	8.276460651	8.295417601
Zm00001d054071	0.412009789	0.179265986	0.69824588	3.213840242	2.438039733	2.624795502	3.177460719	2.800089222	2.106398051	0.299611879	0.292841535	0.149369154	1.886122571	1.66703452	1.749465226
Zm00001d054072	3.638564777	3.928102115	3.969414281	4.944002537	5.421485849	4.634207884	4.705368831	4.727087511	4.858087982	1.174651592	3.079957483	0.77005284	2.873296104	2.821626401	3.14957776
Zm00001d054073	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d054076	8.78983583	8.844645292	8.149839739	5.290985951	6.472960818	6.31078833	6.520836326	6.366128739	6.956523539	6.709363652	7.081686406	8.098447457	4.721889254	4.145841343	4.254857452
Zm00001d054077	2.497348749	2.520745459	2.168247664	2.590636141	2.760125661	3.152525511	2.515883412	2.560956136	1.928550304	1.673843867	1.817433441	2.042518871	1.305894131	1.202532949	1.443637978
Zm00001d054078	13.28874536	13.30994701	14.36939044	21.05716425	23.90327858	19.35990813	20.82730541	24.81224468	21.51017994	9.63091273	16.88156204	6.161859001	16.99838861	16.50833723	16.7786718
Zm00001d054079	14.46247292	16.7336842	17.09326063	33.34522405	16.26414608	27.15938789	10.74100763	9.540541348	9.011459094	0.46496698	0.971748784	0.221030097	44.23259602	45.57160012	46.71743044
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Zm00001d054086	0	0	0	0	0.026221043	0.09752042	0.116265189	0.047989509	0.098168402	0.219561985	0	0.242486314	0	0	0.115035022
Zm00001d054087	2.349301067	3.244153714	1.442270476	15.77934977	9.174759125	13.73220771	6.780210299	3.447047658	4.817263713	0	0.035693301	0	9.248812682	9.929200297	12.53338721
Zm00001d054088	11.47979807	11.07788625	11.06016015	14.6392966	16.53878599	15.76324708	16.70348937	15.89362182	16.87507149	23.25326668	21.42626089	25.79872147	11.65999371	11.45500745	11.82002844
Zm00001d054089	11.1705423	7.926074496	12.35816889	34.28422858	58.84422784	43.05784228	47.03548843	57.56738026	59.51336538	4.286680177	14.12359915	3.292823014	12.53319498	13.95241652	19.37882567
Zm00001d054090	0	0	0	0	0	0	0	0	0	0.019279024	0	0	0.072999215	0.02043202	0
Zm00001d054093	864.1739813	932.7605161	845.5315666	42.77984537	57.90087737	46.63812059	47.78481833	56.61942214	52.68750546	73.04059949	209.6242622	80.47990091	84.14680141	73.68006571	74.57657987
Zm00001d054094	0.1601529	0.073350244	0.144755269	0.018157795	0	0	0.017012606	0.245773746	0.071822888	0	0.110158879	0.032256384	1.059005041	1.197035679	0.690136629
Zm00001d054095	0.14461813	0.24286276	0.059910613	0.024048194	0.101629655	0	0.011265752	0	0	0	0	0	0	0	0
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Zm00001d054098	0	0.045856111	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d054100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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Zm00001d054103	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d054104	0.905480963	1.083830177	0.994585522	2.132953376	1.670582572	1.811074272	1.942743588	1.494047487	1.712213437	0.669668387	0.826615448	0.609599841	1.883641484	1.844282098	1.699717359
Zm00001d054105	2.325851173	2.379588905	2.647469941	2.323535627	4.633122358	2.598146653	4.351198827	4.737358329	4.818944838	8.349973715	8.176226126	7.750557422	1.983392507	1.929911426	2.413206345
Zm00001d054106	4.197088348	4.579774961	4.460088913	7.910805501	11.91731136	8.687394316	8.941213087	10.64301802	10.60358507	1.262380575	3.888558963	0.822290894	2.823002443	2.994930002	3.348935074
Zm00001d054107	30.40399704	31.92955285	32.14311347	32.7491096	35.61897998	31.07484495	28.90809856	33.78189979	35.02377246	16.66000569	21.97359918	12.92824434	19.25776009	19.12663837	19.26219649
Zm00001d054109	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
Zm00001d054110	0.343589212	0.368977922	0.247218449	0.430764874	0.226364597	0.496270582	0.342317935	0.259476607	0.341222846	0.074820974	0.05929054	0.010016119	0.641486808	0.495598105	0.662756935
Zm00001d054111	0	0.007033893	0	0	0	0	0	0	0	0.015404318	0	0	0	0	0
Zm00001d054112	0	0.153349603	0	0.086769312	0.114591961	0.106546642	0.24389064	0.020972514	0.107254599	0	0	0	0	0.076269144	0.040218351
