Published February 4, 2022 | Version v1
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Development of MeV TOF-SIMS capillary microprobe at the Ruđer Bošković Institute in Zagreb


New Time-of-flight Secondary Ion Mass Spectrometry (TOF SIMS) setup using MeV heavy ions for the excitation is developed at the Ruđer Bošković Institute accelerator facility. To focus heavy MeV ions to micron dimensions, conical glass capillary is used instead of quadrupole magnetic lenses. The setup uses a continuous primary beam where START signal for TOF is obtained from the PIN diode placed behind the thin transmission sample. Results showing measured energy spectra for several primary heavy ions are presented and compared with theoretical simulations. . The first mass spectra obtained with the new setup using reflectron-type TOF analyzer are given together with the mass and spatial resolution values of the new setup. 


M. Brajković acknowledges support by Croatian Science Foundation (CSF) project "Young Researchers' Career Development Project - Training of Doctoral Students" co-financed by the European Union, Operational Program "Efficient Human Resources 2014-2020" and the ESF. I. B. R. and Z. S. acknowledge support by CSF project IP-2016-06-1698 "Development of a capillary microprobe for MeV SIMS for analysis of biological materials– BioCapSIMS".


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RADIATE – Research And Development with Ion Beams – Advancing Technology in Europe 824096
European Commission