µm         	nm
0.000000e+000	3.166771e+001
3.906250e-003	3.199523e+001
7.812500e-003	3.182523e+001
1.171875e-002	3.169509e+001
1.562500e-002	3.155576e+001
1.953125e-002	3.127958e+001
2.343750e-002	3.108624e+001
2.734375e-002	3.145648e+001
3.125000e-002	3.157339e+001
3.515625e-002	3.144870e+001
3.906250e-002	3.157376e+001
4.296875e-002	3.217249e+001
4.687500e-002	3.266671e+001
5.078125e-002	3.295520e+001
5.468750e-002	3.351985e+001
5.859375e-002	3.414318e+001
6.250000e-002	3.456901e+001
6.640625e-002	3.470973e+001
7.031250e-002	3.543287e+001
7.421875e-002	3.619139e+001
7.812500e-002	3.676664e+001
8.203125e-002	3.756654e+001
8.593750e-002	3.832508e+001
8.984375e-002	3.904491e+001
9.375000e-002	3.955593e+001
9.765625e-002	4.040114e+001
1.015625e-001	4.085721e+001
1.054688e-001	4.130643e+001
1.093750e-001	4.137734e+001
1.132813e-001	4.160822e+001
1.171875e-001	4.167360e+001
1.210937e-001	4.215835e+001
1.250000e-001	4.233903e+001
1.289063e-001	4.147627e+001
1.328125e-001	4.059256e+001
1.367188e-001	3.982958e+001
1.406250e-001	3.922387e+001
1.445313e-001	3.865672e+001
1.484375e-001	3.816491e+001
1.523437e-001	3.799204e+001
1.562500e-001	3.823971e+001
1.601562e-001	3.837324e+001
1.640625e-001	3.858898e+001
1.679688e-001	3.918154e+001
1.718750e-001	4.009910e+001
1.757813e-001	4.120493e+001
1.796875e-001	4.229119e+001
1.835938e-001	4.326482e+001
1.875000e-001	4.403193e+001
1.914062e-001	4.460601e+001
1.953125e-001	4.460228e+001
1.992187e-001	4.457708e+001
2.031250e-001	4.442763e+001
2.070312e-001	4.397401e+001
2.109375e-001	4.324401e+001
2.148438e-001	4.245437e+001
2.187500e-001	4.157268e+001
2.226563e-001	4.075498e+001
2.265625e-001	3.995883e+001
2.304687e-001	3.982318e+001
2.343750e-001	3.972683e+001
2.382812e-001	3.962203e+001
2.421875e-001	3.957251e+001
2.460937e-001	4.000123e+001
2.500000e-001	4.043514e+001
2.539063e-001	4.052442e+001
2.578125e-001	4.051815e+001
2.617188e-001	4.086509e+001
2.656250e-001	4.115067e+001
2.695313e-001	4.144790e+001
2.734375e-001	4.185901e+001
2.773438e-001	4.231288e+001
2.812500e-001	4.249945e+001
2.851563e-001	4.267051e+001
2.890625e-001	4.264664e+001
2.929687e-001	4.250428e+001
2.968750e-001	4.236577e+001
3.007812e-001	4.220032e+001
3.046875e-001	4.202624e+001
3.085937e-001	4.192825e+001
3.125000e-001	4.196352e+001
3.164062e-001	4.204522e+001
3.203125e-001	4.256238e+001
3.242187e-001	4.327877e+001
3.281250e-001	4.415678e+001
3.320312e-001	4.504198e+001
3.359375e-001	4.615270e+001
3.398438e-001	4.724202e+001
3.437500e-001	4.824416e+001
3.476563e-001	4.890047e+001
3.515625e-001	4.981070e+001
3.554688e-001	5.052081e+001
3.593750e-001	5.104088e+001
3.632813e-001	5.154407e+001
3.671875e-001	5.213689e+001
3.710938e-001	5.274129e+001
3.750000e-001	5.294302e+001
3.789062e-001	5.320940e+001
3.828125e-001	5.354680e+001
3.867187e-001	5.347547e+001
3.906250e-001	5.286520e+001
3.945312e-001	5.254865e+001
3.984375e-001	5.247170e+001
4.023437e-001	5.197542e+001
4.062500e-001	5.140062e+001
4.101562e-001	5.119786e+001
4.140625e-001	5.115769e+001
4.179687e-001	5.078723e+001
4.218750e-001	5.051039e+001
4.257813e-001	5.080388e+001
4.296875e-001	5.117538e+001
4.335938e-001	5.134798e+001
4.375000e-001	5.179210e+001
4.414063e-001	5.244013e+001
4.453125e-001	5.273830e+001
4.492188e-001	5.296750e+001
4.531250e-001	5.349994e+001
4.570313e-001	5.388547e+001
4.609375e-001	5.413083e+001
4.648437e-001	5.469915e+001
4.687500e-001	5.539394e+001
4.726562e-001	5.597525e+001
4.765625e-001	5.675510e+001
4.804688e-001	5.779697e+001
4.843750e-001	5.863998e+001
4.882813e-001	5.938935e+001
4.921875e-001	6.003273e+001
4.960938e-001	6.069978e+001
5.000000e-001	6.107017e+001
5.039062e-001	6.144566e+001
5.078125e-001	6.184267e+001
5.117187e-001	6.238072e+001
5.156250e-001	6.285954e+001
5.195312e-001	6.371368e+001
5.234375e-001	6.460930e+001
5.273437e-001	6.547518e+001
5.312500e-001	6.631758e+001
5.351562e-001	6.699337e+001
5.390625e-001	6.716222e+001
5.429687e-001	6.747399e+001
5.468750e-001	6.753211e+001
5.507812e-001	6.732881e+001
5.546875e-001	6.684742e+001
5.585937e-001	6.642084e+001
5.625000e-001	6.576177e+001
5.664062e-001	6.490871e+001
5.703125e-001	6.394760e+001
5.742187e-001	6.310588e+001
5.781250e-001	6.229141e+001
5.820312e-001	6.156155e+001
5.859375e-001	6.079136e+001
5.898438e-001	6.026612e+001
5.937500e-001	6.001358e+001
5.976563e-001	5.989436e+001
6.015625e-001	6.014564e+001
6.054688e-001	6.050056e+001
6.093750e-001	6.078970e+001
6.132813e-001	6.099405e+001
6.171875e-001	6.123420e+001
6.210938e-001	6.134318e+001
6.250000e-001	6.120608e+001
6.289063e-001	6.101801e+001
6.328125e-001	6.054571e+001
6.367188e-001	5.993022e+001
6.406250e-001	5.910908e+001
6.445313e-001	5.845809e+001
6.484375e-001	5.781927e+001
6.523438e-001	5.704155e+001
6.562500e-001	5.598054e+001
6.601563e-001	5.490261e+001
6.640625e-001	5.387589e+001
6.679687e-001	5.272622e+001
6.718750e-001	5.149852e+001
6.757812e-001	5.082834e+001
6.796875e-001	5.034441e+001
6.835937e-001	4.962992e+001
6.875000e-001	4.890856e+001
6.914062e-001	4.863335e+001
6.953125e-001	4.856480e+001
6.992187e-001	4.851493e+001
7.031250e-001	4.845968e+001
7.070312e-001	4.861004e+001
7.109375e-001	4.885257e+001
7.148437e-001	4.934841e+001
7.187500e-001	4.970937e+001
7.226562e-001	4.985603e+001
7.265625e-001	5.001645e+001
7.304687e-001	5.004456e+001
7.343750e-001	4.961699e+001
7.382812e-001	4.897012e+001
7.421875e-001	4.821533e+001
7.460937e-001	4.721914e+001
7.500000e-001	4.587975e+001
7.539062e-001	4.442068e+001
7.578125e-001	4.323203e+001
7.617188e-001	4.229511e+001
7.656250e-001	4.096170e+001
7.695313e-001	3.959073e+001
7.734375e-001	3.835352e+001
7.773438e-001	3.708713e+001
7.812500e-001	3.593023e+001
7.851563e-001	3.527764e+001
7.890625e-001	3.503806e+001
7.929688e-001	3.476404e+001
7.968750e-001	3.460717e+001
8.007813e-001	3.459461e+001
8.046875e-001	3.453262e+001
8.085938e-001	3.455990e+001
8.125000e-001	3.460283e+001
8.164063e-001	3.483934e+001
8.203125e-001	3.492112e+001
8.242188e-001	3.528387e+001
8.281250e-001	3.555521e+001
8.320313e-001	3.584570e+001
8.359375e-001	3.628252e+001
8.398437e-001	3.680688e+001
8.437500e-001	3.708373e+001
8.476562e-001	3.734279e+001
8.515625e-001	3.771260e+001
8.554687e-001	3.809584e+001
8.593750e-001	3.822467e+001
8.632812e-001	3.853071e+001
8.671875e-001	3.891159e+001
8.710937e-001	3.904540e+001
8.750000e-001	3.894359e+001
8.789062e-001	3.919061e+001
8.828125e-001	3.946823e+001
8.867187e-001	3.947467e+001
8.906250e-001	3.957070e+001
8.945312e-001	4.006424e+001
8.984375e-001	4.054516e+001
9.023437e-001	4.087185e+001
9.062500e-001	4.144058e+001
9.101562e-001	4.227000e+001
9.140625e-001	4.293446e+001
9.179687e-001	4.361690e+001
9.218750e-001	4.457315e+001
9.257813e-001	4.557079e+001
9.296875e-001	4.662469e+001
9.335938e-001	4.751883e+001
9.375000e-001	4.843935e+001
9.414063e-001	4.928054e+001
9.453125e-001	5.020409e+001
9.492188e-001	5.081237e+001
9.531250e-001	5.156842e+001
9.570313e-001	5.245732e+001
9.609375e-001	5.280887e+001
9.648437e-001	5.306109e+001
9.687500e-001	5.334930e+001
9.726563e-001	5.369947e+001
9.765625e-001	5.375314e+001
9.804687e-001	5.399808e+001
9.843750e-001	5.412579e+001
9.882813e-001	5.415029e+001
9.921876e-001	5.391223e+001
9.960937e-001	5.393174e+001
1.000000e+000	5.377485e+001
1.003906e+000	5.361310e+001
1.007812e+000	5.364758e+001
1.011719e+000	5.381974e+001
1.015625e+000	5.406099e+001
1.019531e+000	5.431050e+001
1.023437e+000	5.451548e+001
1.027344e+000	5.451605e+001
1.031250e+000	5.442839e+001
1.035156e+000	5.422508e+001
1.039062e+000	5.407006e+001
1.042969e+000	5.391801e+001
1.046875e+000	5.363573e+001
1.050781e+000	5.301520e+001
1.054687e+000	5.215498e+001
1.058594e+000	5.127498e+001
1.062500e+000	5.070488e+001
1.066406e+000	4.983666e+001
1.070312e+000	4.888211e+001
1.074219e+000	4.769822e+001
1.078125e+000	4.592880e+001
1.082031e+000	4.334294e+001
1.085937e+000	4.065345e+001
1.089844e+000	3.744706e+001
1.093750e+000	3.400172e+001
1.097656e+000	3.035852e+001
1.101562e+000	2.581572e+001
1.105469e+000	2.089025e+001
1.109375e+000	1.622742e+001
1.113281e+000	1.128617e+001
1.117187e+000	5.766807e+000
1.121094e+000	3.951250e-001
1.125000e+000	-5.092068e+000
1.128906e+000	-1.090064e+001
1.132812e+000	-1.705117e+001
1.136719e+000	-2.224551e+001
1.140625e+000	-2.866831e+001
1.144531e+000	-3.617333e+001
1.148437e+000	-4.286376e+001
1.152344e+000	-4.853407e+001
1.156250e+000	-5.192191e+001
1.160156e+000	-5.491269e+001
1.164062e+000	-5.787405e+001
1.167969e+000	-6.144688e+001
1.171875e+000	-6.457125e+001
1.175781e+000	-6.698625e+001
1.179688e+000	-6.857490e+001
1.183594e+000	-6.887104e+001
1.187500e+000	-6.853874e+001
1.191406e+000	-6.832269e+001
1.195313e+000	-6.810555e+001
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1.207031e+000	-6.757629e+001
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1.218750e+000	-6.706308e+001
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