µm         	nm
0.000000e+000	6.980331e+000
9.765625e-003	7.184645e+000
1.953125e-002	6.913697e+000
2.929687e-002	6.841288e+000
3.906250e-002	6.359023e+000
4.882812e-002	5.989766e+000
5.859375e-002	5.964355e+000
6.835937e-002	6.292955e+000
7.812500e-002	6.525227e+000
8.789063e-002	6.688066e+000
9.765625e-002	6.677642e+000
1.074219e-001	6.539282e+000
1.171875e-001	6.274155e+000
1.269531e-001	5.893984e+000
1.367187e-001	5.586964e+000
1.464844e-001	5.442281e+000
1.562500e-001	5.451011e+000
1.660156e-001	5.308751e+000
1.757813e-001	4.914444e+000
1.855469e-001	5.760446e+000
1.953125e-001	5.002712e+000
2.050781e-001	4.656715e+000
2.148437e-001	4.290055e+000
2.246094e-001	2.874002e+000
2.343750e-001	1.032107e+000
2.441406e-001	-8.658010e-002
2.539063e-001	-6.455135e-001
2.636719e-001	-3.787747e-001
2.734375e-001	5.577889e-001
2.832031e-001	1.697666e+000
2.929687e-001	3.017438e+000
3.027344e-001	4.170350e+000
3.125000e-001	5.131649e+000
3.222656e-001	5.507668e+000
3.320312e-001	5.759464e+000
3.417969e-001	5.987265e+000
3.515625e-001	5.814069e+000
3.613281e-001	5.778791e+000
3.710937e-001	6.267757e+000
3.808594e-001	7.047818e+000
3.906250e-001	7.403199e+000
4.003906e-001	7.127785e+000
4.101562e-001	6.087137e+000
4.199219e-001	5.731459e+000
4.296875e-001	5.919165e+000
4.394531e-001	6.599727e+000
4.492187e-001	7.419323e+000
4.589844e-001	8.147056e+000
4.687500e-001	8.374800e+000
4.785156e-001	8.563735e+000
4.882812e-001	9.022444e+000
4.980469e-001	9.938316e+000
5.078125e-001	1.080633e+001
5.175781e-001	1.118607e+001
5.273437e-001	1.114510e+001
5.371094e-001	1.117944e+001
5.468750e-001	1.112291e+001
5.566406e-001	1.131364e+001
5.664062e-001	1.151808e+001
5.761719e-001	1.182480e+001
5.859375e-001	1.213356e+001
5.957031e-001	1.159017e+001
6.054688e-001	1.077131e+001
6.152343e-001	9.447437e+000
6.250000e-001	9.332824e+000
6.347656e-001	9.418808e+000
6.445312e-001	9.512907e+000
6.542969e-001	1.045289e+001
6.640625e-001	1.063898e+001
6.738281e-001	1.036543e+001
6.835937e-001	9.416334e+000
6.933594e-001	8.659336e+000
7.031250e-001	7.327661e+000
7.128906e-001	8.517781e+000
7.226562e-001	1.002893e+001
7.324219e-001	1.153548e+001
7.421875e-001	1.332830e+001
7.519531e-001	1.417442e+001
7.617188e-001	1.498627e+001
7.714843e-001	1.398944e+001
7.812500e-001	8.915832e+000
7.910156e-001	7.746887e+000
8.007812e-001	6.394265e+000
8.105469e-001	4.335996e+000
8.203125e-001	4.284141e+000
8.300781e-001	3.375666e+000
8.398437e-001	4.980538e+000
8.496094e-001	6.238783e+000
8.593749e-001	6.979920e+000
8.691406e-001	8.476191e+000
8.789062e-001	9.278321e+000
8.886719e-001	1.079572e+001
8.984375e-001	1.029195e+001
9.082031e-001	1.023852e+001
9.179687e-001	8.660179e+000
9.277343e-001	6.660139e+000
9.375000e-001	4.302947e+000
9.472656e-001	3.016733e+000
9.570313e-001	2.746602e+000
9.667968e-001	1.620172e+000
9.765624e-001	3.217369e-002
9.863281e-001	-1.273223e+000
9.960937e-001	-2.776299e+000
1.005859e+000	-3.889296e+000
1.015625e+000	-5.581993e+000
1.025391e+000	-7.056717e+000
1.035156e+000	-8.066196e+000
1.044922e+000	-9.438237e+000
1.054687e+000	-1.115995e+001
1.064453e+000	-1.234217e+001
1.074219e+000	-1.289392e+001
1.083984e+000	-1.352936e+001
1.093750e+000	-1.448756e+001
1.103516e+000	-1.547403e+001
1.113281e+000	-1.632921e+001
1.123047e+000	-1.667013e+001
1.132812e+000	-1.704937e+001
1.142578e+000	-1.738931e+001
1.152344e+000	-1.751279e+001
1.162109e+000	-1.809200e+001
1.171875e+000	-1.904878e+001
1.181641e+000	-1.995876e+001
1.191406e+000	-2.099660e+001
1.201172e+000	-2.184817e+001
1.210938e+000	-2.208514e+001
1.220703e+000	-2.208973e+001
1.230469e+000	-2.173108e+001
1.240234e+000	-2.141203e+001
1.250000e+000	-2.075120e+001
1.259766e+000	-1.995666e+001
1.269531e+000	-1.901980e+001
1.279297e+000	-1.801916e+001
1.289062e+000	-1.747219e+001
1.298828e+000	-1.683466e+001
1.308594e+000	-1.635730e+001
1.318359e+000	-1.609752e+001
1.328125e+000	-1.580414e+001
1.337891e+000	-1.559890e+001
1.347656e+000	-1.533924e+001
1.357422e+000	-1.487961e+001
1.367187e+000	-1.431802e+001
1.376953e+000	-1.367299e+001
1.386719e+000	-1.278237e+001
1.396484e+000	-1.202087e+001
1.406250e+000	-1.192287e+001
1.416016e+000	-1.208738e+001
1.425781e+000	-1.214007e+001
1.435547e+000	-1.200686e+001
1.445312e+000	-1.204510e+001
1.455078e+000	-1.199316e+001
1.464844e+000	-1.200971e+001
1.474609e+000	-1.219474e+001
1.484375e+000	-1.241014e+001
1.494141e+000	-1.239706e+001
1.503906e+000	-1.244374e+001
1.513672e+000	-1.247387e+001
1.523438e+000	-1.264637e+001
1.533203e+000	-1.282688e+001
1.542969e+000	-1.269925e+001
1.552734e+000	-1.265307e+001
1.562500e+000	-1.237661e+001
1.572266e+000	-1.196911e+001
1.582031e+000	-1.183968e+001
1.591797e+000	-1.189665e+001
1.601562e+000	-1.198399e+001
1.611328e+000	-1.202812e+001
1.621094e+000	-1.213350e+001
1.630859e+000	-1.233601e+001
1.640625e+000	-1.240550e+001
1.650391e+000	-1.256623e+001
1.660156e+000	-1.234586e+001
1.669922e+000	-1.236737e+001
1.679687e+000	-1.216176e+001
1.689453e+000	-1.225449e+001
1.699219e+000	-1.223236e+001
1.708984e+000	-1.211589e+001
1.718750e+000	-1.227018e+001
1.728516e+000	-1.243277e+001
1.738281e+000	-1.260150e+001
1.748047e+000	-1.267805e+001
1.757812e+000	-1.265858e+001
1.767578e+000	-1.268592e+001
1.777344e+000	-1.288942e+001
1.787109e+000	-1.299988e+001
1.796875e+000	-1.310055e+001
1.806641e+000	-1.322328e+001
1.816406e+000	-1.331111e+001
1.826172e+000	-1.339542e+001
1.835937e+000	-1.347401e+001
1.845703e+000	-1.351145e+001
1.855469e+000	-1.358274e+001
1.865234e+000	-1.347711e+001
1.875000e+000	-1.334855e+001
1.884766e+000	-1.351728e+001
1.894531e+000	-1.376337e+001
1.904297e+000	-1.392143e+001
1.914063e+000	-1.399811e+001
1.923828e+000	-1.411452e+001
1.933594e+000	-1.415351e+001
1.943359e+000	-1.413076e+001
1.953125e+000	-1.418896e+001
1.962891e+000	-1.430531e+001
1.972656e+000	-1.438038e+001
1.982422e+000	-1.443034e+001
1.992187e+000	-1.432645e+001
2.001953e+000	-1.437660e+001
2.011719e+000	-1.446362e+001