µm         	nm
0.000000e+000	8.723938e+000
1.953125e-002	1.104507e+001
3.906250e-002	1.271210e+001
5.859375e-002	1.486466e+001
7.812500e-002	1.674536e+001
9.765625e-002	1.815602e+001
1.171875e-001	2.071226e+001
1.367187e-001	2.336141e+001
1.562500e-001	2.551653e+001
1.757813e-001	2.795561e+001
1.953125e-001	2.925071e+001
2.148437e-001	2.964190e+001
2.343750e-001	3.077398e+001
2.539063e-001	3.218564e+001
2.734375e-001	3.343944e+001
2.929687e-001	3.593713e+001
3.125000e-001	3.773782e+001
3.320312e-001	3.844196e+001
3.515625e-001	3.769772e+001
3.710937e-001	3.716912e+001
3.906250e-001	3.605532e+001
4.101562e-001	3.454140e+001
4.296875e-001	3.271591e+001
4.492187e-001	3.143531e+001
4.687500e-001	3.013027e+001
4.882812e-001	2.873945e+001
5.078125e-001	2.744434e+001
5.273437e-001	2.496909e+001
5.468750e-001	2.283778e+001
5.664062e-001	2.131867e+001
5.859375e-001	1.930452e+001
6.054688e-001	1.772385e+001
6.250000e-001	1.710966e+001
6.445312e-001	1.675481e+001
6.640625e-001	1.610845e+001
6.835937e-001	1.499883e+001
7.031250e-001	1.353178e+001
7.226562e-001	1.290312e+001
7.421875e-001	1.276911e+001
7.617188e-001	1.293156e+001
7.812500e-001	1.389981e+001
8.007812e-001	1.514467e+001
8.203125e-001	1.583491e+001
8.398437e-001	1.542228e+001
8.593749e-001	1.576186e+001
8.789062e-001	1.750277e+001
8.984375e-001	1.842298e+001
9.179687e-001	1.917499e+001
9.375000e-001	1.986963e+001
9.570313e-001	1.543047e+001
9.765624e-001	1.025330e+000
9.960937e-001	-1.389253e+001
1.015625e+000	-2.762970e+001
1.035156e+000	-4.143121e+001
1.054687e+000	-5.736734e+001
1.074219e+000	-6.822189e+001
1.093750e+000	-8.041103e+001
1.113281e+000	-9.244852e+001
1.132812e+000	-1.132974e+002
1.152344e+000	-1.436081e+002
1.171875e+000	-1.790851e+002
1.191406e+000	-2.043545e+002
1.210938e+000	-2.194219e+002
1.230469e+000	-2.364747e+002
1.250000e+000	-2.641730e+002
1.269531e+000	-2.964169e+002
1.289062e+000	-3.185436e+002
1.308594e+000	-3.198883e+002
1.328125e+000	-3.175029e+002
1.347656e+000	-3.171822e+002
1.367187e+000	-3.166250e+002
1.386719e+000	-3.161375e+002
1.406250e+000	-3.153806e+002
1.425781e+000	-3.144561e+002
1.445312e+000	-3.133484e+002
1.464844e+000	-3.125079e+002
1.484375e+000	-3.116225e+002
1.503906e+000	-3.106122e+002
1.523438e+000	-3.097988e+002
1.542969e+000	-3.089694e+002
1.562500e+000	-3.081227e+002
1.582031e+000	-3.074886e+002
1.601562e+000	-3.068590e+002
1.621094e+000	-3.063787e+002
1.640625e+000	-3.056811e+002
1.660156e+000	-3.051009e+002
1.679687e+000	-3.046202e+002
1.699219e+000	-3.040876e+002
1.718750e+000	-3.034917e+002
1.738281e+000	-3.029245e+002
1.757812e+000	-3.025995e+002
1.777344e+000	-3.021894e+002
1.796875e+000	-3.016976e+002
1.816406e+000	-3.012200e+002
1.835937e+000	-3.006772e+002
1.855469e+000	-3.001299e+002
1.875000e+000	-2.997403e+002
1.894531e+000	-2.992457e+002
1.914063e+000	-2.988999e+002
1.933594e+000	-2.985860e+002
1.953125e+000	-2.981619e+002
1.972656e+000	-2.978122e+002
1.992187e+000	-2.972197e+002