µm         	nm
0.000000e+000	-1.827519e+000
1.953125e-002	-8.254343e-001
3.906250e-002	1.259589e+000
5.859375e-002	3.885352e+000
7.812500e-002	5.798662e+000
9.765625e-002	7.251521e+000
1.171875e-001	8.824640e+000
1.367187e-001	1.150659e+001
1.562500e-001	1.446259e+001
1.757813e-001	1.634153e+001
1.953125e-001	1.828105e+001
2.148437e-001	1.993476e+001
2.343750e-001	2.152377e+001
2.539063e-001	2.334742e+001
2.734375e-001	2.471207e+001
2.929687e-001	2.375732e+001
3.125000e-001	2.407724e+001
3.320312e-001	2.516814e+001
3.515625e-001	2.476382e+001
3.710937e-001	2.425454e+001
3.906250e-001	2.271728e+001
4.101562e-001	2.157844e+001
4.296875e-001	2.153345e+001
4.492187e-001	2.120853e+001
4.687500e-001	2.002471e+001
4.882812e-001	1.927138e+001
5.078125e-001	1.820549e+001
5.273437e-001	1.754891e+001
5.468750e-001	1.691026e+001
5.664062e-001	1.620075e+001
5.859375e-001	1.459852e+001
6.054688e-001	1.177102e+001
6.250000e-001	9.132299e+000
6.445312e-001	8.653581e+000
6.640625e-001	8.046962e+000
6.835937e-001	7.828186e+000
7.031250e-001	6.456462e+000
7.226562e-001	4.711901e+000
7.421875e-001	3.783897e+000
7.617188e-001	4.827726e+000
7.812500e-001	5.410217e+000
8.007812e-001	4.017937e+000
8.203125e-001	2.704752e+000
8.398437e-001	2.192237e+000
8.593749e-001	2.807153e-001
8.789062e-001	-1.400874e+000
8.984375e-001	-2.338269e+000
9.179687e-001	-3.788478e+000
9.375000e-001	-4.304213e+000
9.570313e-001	-3.733783e+000
9.765624e-001	-2.996333e+000
9.960937e-001	-2.385308e+000
1.015625e+000	-3.160692e+000
1.035156e+000	-4.098655e+000
1.054687e+000	-4.654372e+000
1.074219e+000	-3.769011e+000
1.093750e+000	-6.012487e+000
1.113281e+000	-3.467687e+001
1.132812e+000	-9.296172e+001
1.152344e+000	-1.585421e+002
1.171875e+000	-2.389248e+002
1.191406e+000	-2.862774e+002
1.210938e+000	-3.174295e+002
1.230469e+000	-3.210123e+002
1.250000e+000	-3.176894e+002
1.269531e+000	-3.187470e+002
1.289062e+000	-3.187270e+002
1.308594e+000	-3.207820e+002
1.328125e+000	-3.207782e+002
1.347656e+000	-3.189214e+002
1.367187e+000	-3.174406e+002
1.386719e+000	-3.159716e+002
1.406250e+000	-3.144530e+002
1.425781e+000	-3.132436e+002
1.445312e+000	-3.122030e+002
1.464844e+000	-3.111959e+002
1.484375e+000	-3.103094e+002
1.503906e+000	-3.093247e+002
1.523438e+000	-3.085817e+002
1.542969e+000	-3.078671e+002
1.562500e+000	-3.071765e+002
1.582031e+000	-3.064155e+002
1.601562e+000	-3.057769e+002
1.621094e+000	-3.050165e+002
1.640625e+000	-3.042623e+002
1.660156e+000	-3.038324e+002
1.679687e+000	-3.032461e+002
1.699219e+000	-3.026204e+002
1.718750e+000	-3.017633e+002
1.738281e+000	-3.011026e+002
1.757812e+000	-3.006633e+002
1.777344e+000	-3.003334e+002
1.796875e+000	-2.998662e+002
1.816406e+000	-2.994251e+002
1.835937e+000	-2.988362e+002
1.855469e+000	-2.984501e+002
1.875000e+000	-2.980055e+002
1.894531e+000	-2.975736e+002
1.914063e+000	-2.971640e+002
1.933594e+000	-2.963939e+002
1.953125e+000	-2.960164e+002
1.972656e+000	-2.954795e+002
1.992187e+000	-2.950464e+002
2.011719e+000	-2.947523e+002