A SURVEY ON MEMS FABRICATION TECHNOLOGY

Microelectronic Mechanical Systems (MEMS) is the
technology which enables greater power and supreme complexity in a
small, single system. MEMS technology is essentially very micro
machines,miniature mechanical devices driven by electricity.MEMS
devices combine electronic circuitry with mechanical structures to
produce different results. These devices are created with silicon chips
using well-established, very-large-scale integration and
complementary metal-oxide semiconductor (CMOS) foundry
processes. In this paper many fabrication techniques and applications
of MEMS are discussed in order to integrate number of operations in
a single system.