This dataset contains the measurement data for figures and tables published in journal article: Ultrafast photoresponse of vertically oriented TMD films probed in a vertical electrode configuration on Si chips by Topias Järvinen, Seyed-Hossein Hosseini Shokouh, Sami Sainio, Olli Pitkänen and Krisztian Kordas DOI: https://doi.org/10.1039/D2NA00313A Dataset consists of following files: Files: Dataset_10.1039_D2NA00313A.opju (data for Figures in manuscript and supplementary information), OriginPro -file contact: Topias Järvinen email: topias.jarvinen@oulu.fi