## 1. Translation of sample names to process parameters
### 1.1. On AlN

| AlN| none 25 nm | none 250 nm | Cr 25 nm | Cr 250 nm | Zr 25 nm | Zr 250 nm |
|:------------:|:----------:|:-----------:|:--------:|:---------:|:--------:|:---------:|
|as dep.       |ASN-012     |ASN-092      |ASNC-008  |ANC-188    |ASNZ-008  |ASNZ-088   |
|800 °C        |ASN-013     |ASN-093      |ASNC-011  |ANC-191    |ASNZ-011  |ASNZ-091   |

### 1.2. On Sc<sub>0.14</sub>Al<sub>0.86</sub>N

| Sc<sub>0.14</sub>Al<sub>0.86</sub>N| none 25 nm | none 250 nm | Cr 25 nm | Cr 250 nm | Zr 25 nm | Zr 250 nm |
|:------------:|:----------:|:-----------:|:--------:|:---------:|:--------:|:---------:|
|as dep.       |AN-012      |AN-092       |ANC-108   |ANC-288    |ANZ-108   |ANZ-188    |
|800 °C        |AN-013      |AN-093       |ANC-111   |ANC-291    |ANZ-111   |ANZ-091    |

## 2. Mapping of samples and raw data file names

### 2.1. RTA
* map of RTA log files to samples (**bold** are the samples presented in the paper):
	* *ANC111.his*: **ANC-111**
	* ANC190.his: ANC-190
	* ANC290.his: ANC-290
	* *ANC291.his*: **ANC-291**, ANZ-191, **ANZ-111**
	* *ASN_013.his*: **AN-013**, **AN-093**, **ASN-013**, **ASN-093**
	* *ASN_Cr1.his*: ANC-011, ANC-091, **ASNC-011**, ASNC-091
	* *ASNCrZr.his*: **ANC-191**, ANZ-011, **ANZ-091**, **ASNZ-011**, **ASNZ-091**
### 2.2. XRD
1. measurements shown in plots
	1. no interlayer: AN-012, AN-013, AN-092, AN-093, ASN-012, ASN-013, ASN-092, ASN-093
	1. 5 nm Cr: ANC-108, ANC-111, ANC-288, ANC-291r3, ASNC-008, ASNC-011, ANC-188, ANC-191r1
	1. 5 nm Zr: ANZ-108, ANZ-111, ANZ-188, ANZ-091, ASNZ-008r5, ASNZ-011r4, ASNZ-088, ASNZ-091
1. original data of samples with repeated measurements that were made to reduce the presence of substrate peaks &rarr; for comparison of relevant peaks (should be same for original and repeated measurements)

### 2.3. EDS
* same as in table in 1.1.

### 2.4. SEM of FIB cross-sections
* cross-section prepared for samples: **ASNC-008**, **ASNC-011**
* extracted line profiles for thickness measurements
	* in subfolder /processed: images and ImageJ macros for line selection and rectangle marking