Published July 6, 2023 | Version v1
Conference proceeding Open

Compact Model of Junctionless Nanowire Transistor for Air-Pollution Sensor

Description

Abstract:

The paper presents a junctionless nanowire transistor (JLNT) compact model. The model is developed based on the compact model of J. P. Collinge and it is implemented in Matlab. The modeled JLNT is the core device of an air-pollution sensor for real-time detection of atmospheric radicals. The device configurations are modeled and compared versus experimental measurements of prototypes fabricated at the Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf (Germany). Modeled device structures were fabricated on ultra-thin SOI substrates using electron beam and UV lithography processes, reactive ion etching, rapid thermal oxidation, thermal evaporation, rapid thermal annealing. Electrical device characteristics are compared for two types of fabricated devices. The average integral error of our model compared to the measured characteristics is between 2.83% and 9.30% for both device types.

Notes

RADICAL represents a 'Fundamental Breakthrough in Detection of Atmospheric Free Radicals'.

Find out more on the RADICAL project website: radical-air.eu

The RADICAL project has received funding from the European Union's Horizon 2020 research and innovation programme under grant agreement number 899282.

Files

Compact_Model_of_Junctionless_Nanowire_Transistor_for_Air-Pollution_Sensor.pdf

Additional details

Funding

European Commission
RADICAL – Fundamental Breakthrough in Detection of Atmospheric Free Radicals 899282

Dates

Available
2023-07-06
Other
2023-05-13
Date of conference (2023 46th International Spring Seminar on Electronics Technology (ISSE)) where this work was presented