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Review of reference metrology for nanotechnology: significance, challenges, and solutions

Ukraintsev, Vladimir


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@misc{ukraintsev_vladimir_2012_995713,
  author       = {Ukraintsev, Vladimir},
  title        = {{Review of reference metrology for nanotechnology: 
                   significance, challenges, and solutions}},
  month        = feb,
  year         = 2012,
  publisher    = {Zenodo},
  doi          = {10.1117/1.jmm.11.1.011010},
  url          = {https://doi.org/10.1117/1.jmm.11.1.011010}
}
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