Filestructure:
The files are all given in the h5 format.

VNA measurements: Frequency given in GHz, measured S21 as a complex number
SA measurements: Frequency in Hz, Power Spectrum in dBm

Further parameters are given directly in the h5 files.

The given ‚dB‘ value in folder name of the cooling traces concerns the value of the variable attenuator in the input line (see Fig. S1 in the supplement). For each cooling traces we took several sets of cooling traces at different detunings.

For the measurements of the mechanical mode, we always took a VNA trace before the spectral trace, and a low power VNA trace in parallel to the spectrum. We took several additional VNA traces for adjusting the frequency of the cavity, a VNA trace with the cavity detuned and traces to check the leakage of the calibration tone in the spectrum with the cavity detuned.