Charge sensing properties of monolithic CMOS pixel sensors fabricated in a 65 nm technology
Creators
- Szymon Bugiel1
- Andrei Dorokhov1
- Mauro Aresti2
- Jerome Baudot1
- Stefania Beole3
- Auguste Besson1
- Roma Bugiel1
- Leonardo Cecconi4
- Claude Colledani1
- Wenjing Deng5
- Antonello Di Mauro4
- Ziad El Bitar1
- Mathieu Goffe1
- Jan Hasenbichler6
- Geun Hee Hong7
- Christine Hu-Guo1
- Kimmo Jaaskelainen1
- Alex Kluge4
- Magnus Mager4
- Davide Marras2
- Joao de Melo4
- Magdalena Munker4
- Hung Pham1
- Francesco Piro8
- Felix Reidt4
- Gianluca Aglieri Rinella4
- Roberto Russo9
- Valerio Sarritzu10
- Serhiy Senyukov1
- Walter Snoeys4
- Miljenko Suljic4
- Gianluca Usai10
- Isabelle Valin1
- Marc Winter11
- Yitao Wu12
- 1. Université de Strasbourg, CNRS, IPHC UMR 7178
- 2. INFN
- 3. Dipartimento di Fisica Sperimentale dell'Universita and Sezione INFN
- 4. CERN
- 5. CERN, Central China National University (CCNU)
- 6. CERN, Vienna University of Technology
- 7. CERN, Yonsei University
- 8. CERN, Ecole Polytechnique Federale de Lausanne (EPFL)
- 9. NIKHEF
- 10. Università degli Studi di Cagliari, INFN
- 11. Universite Paris-Saclay CNRS/IN2P3, IJCLab
- 12. Université de Strasbourg, CNRS, IPHC UMR 7178, University of Science and Technology of China (USTC)
Description
In this work the initial performance studies of the first small monolithic pixel sensors dedicated to charged
particle detection, called CE-65, fabricated in the 65 nm TowerJazz Panasonic Semiconductor Company are
presented. The tested prototypes comprise matrices of 64 × 32 square analogue-output pixels with a pitch of
15 μm. Different pixel types explore several sensing node geometries and amplification schemes, which allows
for various biasing voltage of the detection layer and hence depletion conditions and electric field shaping.
Laboratory tests conducted with a 55Fe source demonstrated that the CE-65 sensors reach equivalent noise
charge in the 15 to 25 e− range and excellent charge collection efficiencies. Charge sharing is substantial for
standard diodes, but can be largely suppressed by modifying their design. Depletion of the thin sensitive layer
saturates at a reverse diode bias of about 5 V.
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Charge sensing properties of monolithic CMOS pixel sensors.pdf
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