Ten nm technology node optical wafer defect inspection

Defect inspection researchers from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a careful survey of new viewpoints and energizing patterns on the foundation of previous great audits in the field of defect inspection techniques. The survey centers around three explicit regions: (1) the defect perceptibility evaluation, (2) the different optical inspection frameworks, and (3) the post-handling calculations.

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