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StretchBio_D.3.1_Guidelines for optimized semiconductor fabrication route

Lopez, E; Bertelsen, C; HERNANDEZ-RAMIREZ, F; ROMANO-RODRIGUEZ, A

This deliverable presents the results of the cleanroom fabrication work performed in the initial phase of the StretchBio project. Pillars with various pitches, diameters and heights have been fabricated. These results show that the required nanostructures can be fabricated with the desired dimensions and forms the basis of delivery of the sample to consortium partners going forward in the project.

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Publication date:
May 30, 2022
DOI:
10.5281/zenodo.7015228

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10.5281/zenodo.7015228

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Keyword(s):
Fabrication, nanopillars, cleanroom
Grants:
European Commission:
  • StretchBio - Continuous two-dimensional Stretch monitoring of fresh tissue Biopsies (964808)
Communities:
License (for files):
Creative Commons Attribution 4.0 International

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