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Journal article Open Access

An open source three-mirror laser scanning holographic two-photon lithography system

Pisanello, Marco; Zheng, Di; Balena, Antonio; Pisano, Filippo; De Vittorio, Massimo; Pisanello, Ferruccio

Two-photon polymerization is a widely adopted technique for direct fabrication of 3D and 2D structures with sub-diffraction-limit features. Here we present an open-hardware, open-software custom design for a holographic multibeam two-photon polymerization system based on a phase-only spatial light modulator and a three-mirror scanhead. The use of three reflective surfaces, two of which scanning the phase-modulated image along the same axis, allows to overcome the loss of virtual conjugation within the large galvanometric mirrors pair needed to accommodate the holographic projection. This extends the writing field of view among which the hologram can be employed for multi-beam two-photon polymerization by a factor of ~2 on one axis (i.e. from ~200μm to ~400μm), with a voxel size of ~250nm × ~1050nm (lateral × axial size), and writing speed of three simultaneous beams of 2000 voxels/s, making our system a powerful and reliable tool for advanced micro and nano-fabrications on large area.

F.Pisano, A.Balena, and F.Pisanello acknowledge funding from the European Research Council under the European Union's Horizon 2020 Research and Innovation Program (Grant Agreement No. 677683). D.Zheng, M.De Vittorio, and F.Pisanello acknowledge funding from the European Union's Horizon 2020 Research and Innovation Program (Grant Agreement No. 828972). F.Pisano, M.De Vittorio, and F.Pisanello acknowledge that this project has received funding from the European Union's Horizon 2020 Research and Innovation Program (Grant Agreement No 101016787). M.Pisanello and M.De Vittorio acknowledge funding from the European Research Council under the European Union's Horizon 2020 Research and Innovation Program (Grant Agreement No. 692943). M.De Vittorio and F. Pisanello acknowledge that this project has received funding from the European Union's Horizon 2020 Research and Innovation Program (Grant Agreement No. 966674). M.Pisanello, F.Pisanello, and M.De Vittorio were funded by the U.S. National Institutes of Health (Grant No. 1UF1NS108177-01). The funders had no role in study design, data collection and analysis, decision to publish, or preparation of the manuscript.
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