Journal article Open Access

Novel, High-Resolution, Subtractive Photoresist Formulations for 3D Direct Laser Writing Based on Cyclic Ketene Acetals

Carlotti, Marco; Tricinci, Omar; Mattoli, Virgilio


DataCite XML Export

<?xml version='1.0' encoding='utf-8'?>
<resource xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://datacite.org/schema/kernel-4" xsi:schemaLocation="http://datacite.org/schema/kernel-4 http://schema.datacite.org/meta/kernel-4.1/metadata.xsd">
  <identifier identifierType="URL">https://zenodo.org/record/6396479</identifier>
  <creators>
    <creator>
      <creatorName>Carlotti, Marco</creatorName>
      <givenName>Marco</givenName>
      <familyName>Carlotti</familyName>
      <affiliation>Istituto Italiano di Tecnologia</affiliation>
    </creator>
    <creator>
      <creatorName>Tricinci, Omar</creatorName>
      <givenName>Omar</givenName>
      <familyName>Tricinci</familyName>
      <affiliation>Istituto Italiano di Tecnologia</affiliation>
    </creator>
    <creator>
      <creatorName>Mattoli, Virgilio</creatorName>
      <givenName>Virgilio</givenName>
      <familyName>Mattoli</familyName>
      <nameIdentifier nameIdentifierScheme="ORCID" schemeURI="http://orcid.org/">0000-0002-4715-8353</nameIdentifier>
      <affiliation>Istituto Italiano di Tecnologia</affiliation>
    </creator>
  </creators>
  <titles>
    <title>Novel, High-Resolution, Subtractive Photoresist  Formulations for 3D Direct Laser Writing Based on Cyclic  Ketene Acetals</title>
  </titles>
  <publisher>Zenodo</publisher>
  <publicationYear>2022</publicationYear>
  <subjects>
    <subject>Two photon lithography</subject>
    <subject>MDO</subject>
    <subject>Cyclic ketene acetal</subject>
    <subject>Erasable resist</subject>
    <subject>Photobase</subject>
    <subject>MEMS</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2022-03-23</date>
  </dates>
  <resourceType resourceTypeGeneral="JournalArticle"/>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://zenodo.org/record/6396479</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsIdenticalTo">10.1002/admt.202101590</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://zenodo.org/communities/5dnanoprinting</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;Research paper:&lt;/p&gt;

&lt;p&gt;Marco Carlotti*, Omar Tricinci, Virgilio Mattoli*, Novel, High-Resolution, Subtractive Photoresist Formulations for 3D Direct Laser Writing based on Cyclic Ketene Acetals, Advanced Materials Technologies,&amp;nbsp;2101590, 2022&amp;nbsp; (In Press)&lt;/p&gt;</description>
  </descriptions>
  <fundingReferences>
    <fundingReference>
      <funderName>European Commission</funderName>
      <funderIdentifier funderIdentifierType="Crossref Funder ID">10.13039/100010661</funderIdentifier>
      <awardNumber awardURI="info:eu-repo/grantAgreement/EC/H2020/885881/">885881</awardNumber>
      <awardTitle>Multi-Potent Polymer Precursor approach for novel conjugated polymers</awardTitle>
    </fundingReference>
    <fundingReference>
      <funderName>European Commission</funderName>
      <funderIdentifier funderIdentifierType="Crossref Funder ID">10.13039/100010661</funderIdentifier>
      <awardNumber awardURI="info:eu-repo/grantAgreement/EC/H2020/899349/">899349</awardNumber>
      <awardTitle>Functional &amp; Dynamic 3D Nano- MicroDevices by Direct Multi-Photon Lithography</awardTitle>
    </fundingReference>
  </fundingReferences>
</resource>
53
70
views
downloads
Views 53
Downloads 70
Data volume 336.1 MB
Unique views 37
Unique downloads 70

Share

Cite as