Controlled Silicidation of Silicon Nanowires using Flash Lamp Annealing
Creators
- 1. HZDR, Dresden, Germany
- 2. DCN, TU Dresden, Germany
- 3. CfAED, TU Dresden, Germany
Description
Si nanowires-based devices are used for various applications. The nanowires have a high surface-to-volume ratio which among other properties makes them suitable for sensing applications. The sensing devices for "RADICAL" are, therefore, being fabricated on a nanowires platform. The nanowires are fabricated using a top-down process. Electron beam lithography and dry etching processes are used details of which are given in the experimental section. Furthermore, this manuscript reports a reproducible silicidation process of these nanowires.
Additional Information:
This publication and dataset were published in ACS Langmuir on 3rd Dec 2021.
RADICAL represents a 'Fundamental Breakthrough in Detection of Atmospheric Free Radicals'.
Find out more on the RADICAL project website: radical-air.eu
The RADICAL project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement number 899282.