Journal article Open Access

Controlled Silicidation of Silicon Nanowires using Flash Lamp Annealing

Khan, M. Bilal; Prucnal, Slawomir; Ghosh, Sayantan; Deb, Dipjyoti; Hübner, Rene; Pohl, Darius; Rebohle, Lars; Mikolajick, Thomas; Erbe, Artur; Georgiev, Yordan M.

Si nanowires-based devices are used for various applications. The nanowires have a high surface-to-volume ratio which among other properties makes them suitable for sensing applications. The sensing devices for "RADICAL" are, therefore, being fabricated on a nanowires platform. The nanowires are fabricated using a top-down process. Electron beam lithography and dry etching processes are used details of which are given in the experimental section. Furthermore, this manuscript reports a reproducible silicidation process of these nanowires.

 

Additional Information:

This publication and dataset were published in ACS Langmuir on 3rd Dec 2021.

 

RADICAL represents a 'Fundamental Breakthrough in Detection of Atmospheric Free Radicals'.

Find out more on the RADICAL project website: radical-air.eu

The RADICAL project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement number 899282.

Files (14.3 MB)
Name Size
FLA-Data.zip
md5:2a4316bc884eb0b89a6bc1c5ee94c558
8.0 MB Download
FLA-Manuscript-Khan.pdf
md5:25aa43c522e712fe7479dad48794eaf3
5.5 MB Download
FLA-Supporting.pdf
md5:6a3e798c8a12816a5553aff02f6b6888
857.2 kB Download
48
27
views
downloads
Views 48
Downloads 27
Data volume 150.8 MB
Unique views 39
Unique downloads 25

Share

Cite as