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Dataset for "Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-Ray Transparent Samples"

Mayr, Sina; Finizio, Simone; Reuteler, Joakim; Stutz, Stefan; Dubs, Carsten; Weigand, Markus; Hrabec, Aleš; Raabe, Jörg; Wintz, Sebastian

Dataset associated with the publication "Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-Ray Transparent Samples" by Sina Mayr 1,2,*, Simone Finizio 1, Joakim Reuteler 3, Stefan Stutz 1, Carsten Dubs 4, Markus Weigand 5, Aleš Hrabec 1,2,6, Jörg Raabe 1 and Sebastian Wintz 1,7,*.

1   Paul Scherrer Institut, 5232 Villigen PSI, Switzerland

2   Laboratory for Mesoscopic Systems, Department of Materials, ETH Zurich, 8093 Zurich, Switzerland

3   Scientific Center for Optical and Electron Microscopy, ETH Zurich, 8093 Zurich, Switzerland

4   INNOVENT e.V. Technologieentwicklung Jena, 07745 Jena, Germany

5   Helmholtz-Zentrum Berlin, 14109 Berlin, Germany

6   Laboratory for Magnetism and Interface Physics, Department of Materials, ETH Zurich, 8093 Zurich, Switzerland

7   Max Planck Institute for Intelligent Systems, 70569 Stuttgart, Germany

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Publication date:
May 13, 2021
DOI:
10.5281/zenodo.4753181

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Version 1 10.5281/zenodo.4753181 May 13, 2021
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