Dataset for "Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-Ray Transparent Samples"

Dataset associated with the publication "Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-Ray Transparent Samples" by Sina Mayr ^1,2,*, Simone Finizio ¹, Joakim Reuteler ³, Stefan Stutz ¹, Carsten Dubs ⁴, Markus Weigand ⁵, Aleš Hrabec ^1,2,6, Jörg Raabe ¹ and Sebastian Wintz ^1,7,*.

¹   Paul Scherrer Institut, 5232 Villigen PSI, Switzerland

²   Laboratory for Mesoscopic Systems, Department of Materials, ETH Zurich, 8093 Zurich, Switzerland

³   Scientific Center for Optical and Electron Microscopy, ETH Zurich, 8093 Zurich, Switzerland

⁴   INNOVENT e.V. Technologieentwicklung Jena, 07745 Jena, Germany

⁵   Helmholtz-Zentrum Berlin, 14109 Berlin, Germany

⁶   Laboratory for Magnetism and Interface Physics, Department of Materials, ETH Zurich, 8093 Zurich, Switzerland

⁷   Max Planck Institute for Intelligent Systems, 70569 Stuttgart, Germany