Dataset Open Access

The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates

Plaza, Alejandro Enrique; Manca, Nicola; Bernini, Cristina; Marré, Daniele; Pellegrino, Luca


MARC21 XML Export

<?xml version='1.0' encoding='UTF-8'?>
<record xmlns="http://www.loc.gov/MARC21/slim">
  <leader>00000nmm##2200000uu#4500</leader>
  <datafield tag="041" ind1=" " ind2=" ">
    <subfield code="a">eng</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">SrTiO3</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Oxides</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">MEMS</subfield>
  </datafield>
  <datafield tag="653" ind1=" " ind2=" ">
    <subfield code="a">Etching</subfield>
  </datafield>
  <controlfield tag="005">20210719134817.0</controlfield>
  <controlfield tag="001">4738478</controlfield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="u">CNR-SPIN</subfield>
    <subfield code="0">(orcid)0000-0002-7768-2500</subfield>
    <subfield code="a">Manca, Nicola</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="u">CNR-SPIN</subfield>
    <subfield code="0">(orcid)0000-0003-4807-0924</subfield>
    <subfield code="a">Bernini, Cristina</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="u">Università degli Studi di Genova</subfield>
    <subfield code="0">(orcid)0000-0002-6230-761X</subfield>
    <subfield code="a">Marré, Daniele</subfield>
  </datafield>
  <datafield tag="700" ind1=" " ind2=" ">
    <subfield code="u">CNR-SPIN</subfield>
    <subfield code="0">(orcid)0000-0003-2051-4837</subfield>
    <subfield code="a">Pellegrino, Luca</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2=" ">
    <subfield code="s">614044276</subfield>
    <subfield code="z">md5:ce9298fb794b8f1f23be5885f999f087</subfield>
    <subfield code="u">https://zenodo.org/record/4738478/files/Dataset.tar.bz2</subfield>
  </datafield>
  <datafield tag="542" ind1=" " ind2=" ">
    <subfield code="l">open</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
    <subfield code="c">2021-07-19</subfield>
  </datafield>
  <datafield tag="909" ind1="C" ind2="O">
    <subfield code="p">openaire_data</subfield>
    <subfield code="o">oai:zenodo.org:4738478</subfield>
  </datafield>
  <datafield tag="100" ind1=" " ind2=" ">
    <subfield code="u">CNR-SPIN</subfield>
    <subfield code="0">(orcid)0000-0002-2538-7585</subfield>
    <subfield code="a">Plaza, Alejandro Enrique</subfield>
  </datafield>
  <datafield tag="245" ind1=" " ind2=" ">
    <subfield code="a">The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates</subfield>
  </datafield>
  <datafield tag="536" ind1=" " ind2=" ">
    <subfield code="c">828784</subfield>
    <subfield code="a">Oxide Nanoelectromechanical Systems for Ultrasensitive and Robust Sensing of Biomagnetic Fields</subfield>
  </datafield>
  <datafield tag="540" ind1=" " ind2=" ">
    <subfield code="u">https://creativecommons.org/licenses/by/4.0/legalcode</subfield>
    <subfield code="a">Creative Commons Attribution 4.0 International</subfield>
  </datafield>
  <datafield tag="650" ind1="1" ind2="7">
    <subfield code="a">cc-by</subfield>
    <subfield code="2">opendefinition.org</subfield>
  </datafield>
  <datafield tag="520" ind1=" " ind2=" ">
    <subfield code="a">&lt;p&gt;Datafiles for the Figures and Supplementary Material of the article &amp;quot;The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates&amp;quot; published in Applied Physics Letters by Alejandro E. Plaza et al. (2021)&lt;/p&gt;</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="n">doi</subfield>
    <subfield code="i">isSupplementTo</subfield>
    <subfield code="a">10.1063/5.0056524</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="n">doi</subfield>
    <subfield code="i">isSupplementTo</subfield>
    <subfield code="a">10.5281/zenodo.5105675</subfield>
  </datafield>
  <datafield tag="773" ind1=" " ind2=" ">
    <subfield code="n">doi</subfield>
    <subfield code="i">isVersionOf</subfield>
    <subfield code="a">10.5281/zenodo.4738477</subfield>
  </datafield>
  <datafield tag="024" ind1=" " ind2=" ">
    <subfield code="a">10.5281/zenodo.4738478</subfield>
    <subfield code="2">doi</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">dataset</subfield>
  </datafield>
</record>
70
8
views
downloads
All versions This version
Views 7070
Downloads 88
Data volume 4.9 GB4.9 GB
Unique views 5151
Unique downloads 88

Share

Cite as