Dataset Open Access

The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates

Plaza, Alejandro Enrique; Manca, Nicola; Bernini, Cristina; Marré, Daniele; Pellegrino, Luca


Dublin Core Export

<?xml version='1.0' encoding='utf-8'?>
<oai_dc:dc xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
  <dc:creator>Plaza, Alejandro Enrique</dc:creator>
  <dc:creator>Manca, Nicola</dc:creator>
  <dc:creator>Bernini, Cristina</dc:creator>
  <dc:creator>Marré, Daniele</dc:creator>
  <dc:creator>Pellegrino, Luca</dc:creator>
  <dc:date>2021-07-19</dc:date>
  <dc:description>Datafiles for the Figures and Supplementary Material of the article "The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates" published in Applied Physics Letters by Alejandro E. Plaza et al. (2021)</dc:description>
  <dc:identifier>https://zenodo.org/record/4738478</dc:identifier>
  <dc:identifier>10.5281/zenodo.4738478</dc:identifier>
  <dc:identifier>oai:zenodo.org:4738478</dc:identifier>
  <dc:language>eng</dc:language>
  <dc:relation>info:eu-repo/grantAgreement/EC/H2020/828784/</dc:relation>
  <dc:relation>doi:10.1063/5.0056524</dc:relation>
  <dc:relation>doi:10.5281/zenodo.5105675</dc:relation>
  <dc:relation>doi:10.5281/zenodo.4738477</dc:relation>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:rights>https://creativecommons.org/licenses/by/4.0/legalcode</dc:rights>
  <dc:subject>SrTiO3</dc:subject>
  <dc:subject>Oxides</dc:subject>
  <dc:subject>MEMS</dc:subject>
  <dc:subject>Etching</dc:subject>
  <dc:title>The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates</dc:title>
  <dc:type>info:eu-repo/semantics/other</dc:type>
  <dc:type>dataset</dc:type>
</oai_dc:dc>
70
8
views
downloads
All versions This version
Views 7070
Downloads 88
Data volume 4.9 GB4.9 GB
Unique views 5151
Unique downloads 88

Share

Cite as