Conference paper Open Access

SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution

Meissa Babay; Clement Hallepee; Claire Dalmay; Bruno Barelaud; Emre Can Durmaz; Canan Baristiran Kaynak; Mehmet Kaynak; David Cordeau; Arnaud POTHIER

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<oai_dc:dc xmlns:dc="" xmlns:oai_dc="" xmlns:xsi="" xsi:schemaLocation="">
  <dc:creator>Meissa Babay</dc:creator>
  <dc:creator>Clement Hallepee</dc:creator>
  <dc:creator>Claire Dalmay</dc:creator>
  <dc:creator>Bruno Barelaud</dc:creator>
  <dc:creator>Emre Can Durmaz</dc:creator>
  <dc:creator>Canan Baristiran Kaynak</dc:creator>
  <dc:creator>Mehmet Kaynak</dc:creator>
  <dc:creator>David Cordeau</dc:creator>
  <dc:creator>Arnaud POTHIER</dc:creator>
  <dc:description>This paper presents the design and the implementation of an ultra-sensitive capacitive sensor based on an injection-locked oscillator architecture able to achieve ppm sensing resolution. The proposed RF IC chip, implemented on a BiCMOS SiGe 0.25 μm technology, is able to detect capacitance changes in the range of few attoF, induced by dielectric disturbance occurring on on-chip integrated sensing capacitors. Indeed, this paper demonstrates that, once locked on a 4.693 GHz and -50 dBm injection signal, the proposed sensing system can efficiently detect differences of free running frequencies as low as 10 kHz between two oscillators. Considering a differential measurement approach with two injection locked oscillators (one used as a sensor, the other as a reference), a 3 attoF difference between both LC tank sensing capacitors might be detectable. This results, in the present case, in a 5 ppm sensing sensitivity.</dc:description>
  <dc:title>SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution</dc:title>
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