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SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution

Meissa Babay; Clement Hallepee; Claire Dalmay; Bruno Barelaud; Emre Can Durmaz; Canan Baristiran Kaynak; Mehmet Kaynak; David Cordeau; Arnaud POTHIER


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  <dc:creator>Meissa Babay</dc:creator>
  <dc:creator>Clement Hallepee</dc:creator>
  <dc:creator>Claire Dalmay</dc:creator>
  <dc:creator>Bruno Barelaud</dc:creator>
  <dc:creator>Emre Can Durmaz</dc:creator>
  <dc:creator>Canan Baristiran Kaynak</dc:creator>
  <dc:creator>Mehmet Kaynak</dc:creator>
  <dc:creator>David Cordeau</dc:creator>
  <dc:creator>Arnaud POTHIER</dc:creator>
  <dc:date>2020-08-04</dc:date>
  <dc:description>This paper presents the design and the implementation of an ultra-sensitive capacitive sensor based on an injection-locked oscillator architecture able to achieve ppm sensing resolution. The proposed RF IC chip, implemented on a BiCMOS SiGe 0.25 μm technology, is able to detect capacitance changes in the range of few attoF, induced by dielectric disturbance occurring on on-chip integrated sensing capacitors. Indeed, this paper demonstrates that, once locked on a 4.693 GHz and -50 dBm injection signal, the proposed sensing system can efficiently detect differences of free running frequencies as low as 10 kHz between two oscillators. Considering a differential measurement approach with two injection locked oscillators (one used as a sensor, the other as a reference), a 3 attoF difference between both LC tank sensing capacitors might be detectable. This results, in the present case, in a 5 ppm sensing sensitivity.</dc:description>
  <dc:identifier>https://zenodo.org/record/4699691</dc:identifier>
  <dc:identifier>10.1109/IMS30576.2020.9223884</dc:identifier>
  <dc:identifier>oai:zenodo.org:4699691</dc:identifier>
  <dc:language>eng</dc:language>
  <dc:relation>info:eu-repo/grantAgreement/EC/H2020/737164/</dc:relation>
  <dc:relation>url:https://zenodo.org/communities/sumcastec_participants</dc:relation>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:rights>https://creativecommons.org/licenses/by/4.0/legalcode</dc:rights>
  <dc:title>SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution</dc:title>
  <dc:type>info:eu-repo/semantics/conferencePaper</dc:type>
  <dc:type>publication-conferencepaper</dc:type>
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