Conference paper Open Access

SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution

Meissa Babay; Clement Hallepee; Claire Dalmay; Bruno Barelaud; Emre Can Durmaz; Canan Baristiran Kaynak; Mehmet Kaynak; David Cordeau; Arnaud POTHIER


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    "description": "<p>This paper presents the design and the implementation of an ultra-sensitive capacitive sensor based on an injection-locked oscillator architecture able to achieve ppm sensing resolution. The proposed RF IC chip, implemented on a BiCMOS SiGe 0.25 &mu;m technology, is able to detect capacitance changes in the range of few attoF, induced by dielectric disturbance occurring on on-chip integrated sensing capacitors. Indeed, this paper demonstrates that, once locked on a 4.693 GHz and -50 dBm injection signal, the proposed sensing system can efficiently detect differences of free running frequencies as low as 10 kHz between two oscillators. Considering a differential measurement approach with two injection locked oscillators (one used as a sensor, the other as a reference), a 3 attoF difference between both LC tank sensing capacitors might be detectable. This results, in the present case, in a 5 ppm sensing sensitivity.</p>", 
    "language": "eng", 
    "title": "SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution", 
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        "title": "Semiconductor-based Ultrawideband Micromanipulation of CAncer STEm Cells", 
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    "publication_date": "2020-08-04", 
    "creators": [
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        "affiliation": "XLIM- CNRS- University of Limoges, France", 
        "name": "Meissa Babay"
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      {
        "affiliation": "XLIM- CNRS- University of Limoges, France", 
        "name": "Clement Hallepee"
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      {
        "affiliation": "XLIM- CNRS- University of Limoges, France", 
        "name": "Claire Dalmay"
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      {
        "affiliation": "XLIM- CNRS- University of Limoges, France", 
        "name": "Bruno Barelaud"
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        "affiliation": "IHP \u2013 Leibniz-Institut f\u00fcr innovative Mikroelektronik,", 
        "name": "Emre Can Durmaz"
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        "affiliation": "IHP \u2013 Leibniz-Institut f\u00fcr innovative Mikroelektronik,", 
        "name": "Canan Baristiran Kaynak"
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        "affiliation": "IHP \u2013 Leibniz-Institut f\u00fcr innovative Mikroelektronik,", 
        "name": "Mehmet Kaynak"
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        "affiliation": "XLIM- CNRS- University of Limoges, France", 
        "name": "David Cordeau"
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