Conference paper Open Access

SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution

Meissa Babay; Clement Hallepee; Claire Dalmay; Bruno Barelaud; Emre Can Durmaz; Canan Baristiran Kaynak; Mehmet Kaynak; David Cordeau; Arnaud POTHIER


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  <identifier identifierType="URL">https://zenodo.org/record/4699691</identifier>
  <creators>
    <creator>
      <creatorName>Meissa Babay</creatorName>
      <affiliation>XLIM- CNRS- University of Limoges, France</affiliation>
    </creator>
    <creator>
      <creatorName>Clement Hallepee</creatorName>
      <affiliation>XLIM- CNRS- University of Limoges, France</affiliation>
    </creator>
    <creator>
      <creatorName>Claire Dalmay</creatorName>
      <affiliation>XLIM- CNRS- University of Limoges, France</affiliation>
    </creator>
    <creator>
      <creatorName>Bruno Barelaud</creatorName>
      <affiliation>XLIM- CNRS- University of Limoges, France</affiliation>
    </creator>
    <creator>
      <creatorName>Emre Can Durmaz</creatorName>
      <affiliation>IHP – Leibniz-Institut für innovative Mikroelektronik,</affiliation>
    </creator>
    <creator>
      <creatorName>Canan Baristiran Kaynak</creatorName>
      <affiliation>IHP – Leibniz-Institut für innovative Mikroelektronik,</affiliation>
    </creator>
    <creator>
      <creatorName>Mehmet Kaynak</creatorName>
      <affiliation>IHP – Leibniz-Institut für innovative Mikroelektronik,</affiliation>
    </creator>
    <creator>
      <creatorName>David Cordeau</creatorName>
      <affiliation>XLIM- CNRS- University of Limoges, France</affiliation>
    </creator>
    <creator>
      <creatorName>Arnaud POTHIER</creatorName>
      <affiliation>XLIM- CNRS- University of Limoges, France</affiliation>
    </creator>
  </creators>
  <titles>
    <title>SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution</title>
  </titles>
  <publisher>Zenodo</publisher>
  <publicationYear>2020</publicationYear>
  <dates>
    <date dateType="Issued">2020-08-04</date>
  </dates>
  <language>en</language>
  <resourceType resourceTypeGeneral="Text">Conference paper</resourceType>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://zenodo.org/record/4699691</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsIdenticalTo">10.1109/IMS30576.2020.9223884</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://zenodo.org/communities/sumcastec_participants</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;This paper presents the design and the implementation of an ultra-sensitive capacitive sensor based on an injection-locked oscillator architecture able to achieve ppm sensing resolution. The proposed RF IC chip, implemented on a BiCMOS SiGe 0.25 &amp;mu;m technology, is able to detect capacitance changes in the range of few attoF, induced by dielectric disturbance occurring on on-chip integrated sensing capacitors. Indeed, this paper demonstrates that, once locked on a 4.693 GHz and -50 dBm injection signal, the proposed sensing system can efficiently detect differences of free running frequencies as low as 10 kHz between two oscillators. Considering a differential measurement approach with two injection locked oscillators (one used as a sensor, the other as a reference), a 3 attoF difference between both LC tank sensing capacitors might be detectable. This results, in the present case, in a 5 ppm sensing sensitivity.&lt;/p&gt;</description>
  </descriptions>
  <fundingReferences>
    <fundingReference>
      <funderName>European Commission</funderName>
      <funderIdentifier funderIdentifierType="Crossref Funder ID">10.13039/501100000780</funderIdentifier>
      <awardNumber awardURI="info:eu-repo/grantAgreement/EC/H2020/737164/">737164</awardNumber>
      <awardTitle>Semiconductor-based Ultrawideband Micromanipulation of CAncer STEm Cells</awardTitle>
    </fundingReference>
  </fundingReferences>
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