Conference paper Open Access

SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution

Meissa Babay; Clement Hallepee; Claire Dalmay; Bruno Barelaud; Emre Can Durmaz; Canan Baristiran Kaynak; Mehmet Kaynak; David Cordeau; Arnaud POTHIER


Citation Style Language JSON Export

{
  "DOI": "10.1109/IMS30576.2020.9223884", 
  "language": "eng", 
  "author": [
    {
      "family": "Meissa Babay"
    }, 
    {
      "family": "Clement Hallepee"
    }, 
    {
      "family": "Claire Dalmay"
    }, 
    {
      "family": "Bruno Barelaud"
    }, 
    {
      "family": "Emre Can Durmaz"
    }, 
    {
      "family": "Canan Baristiran Kaynak"
    }, 
    {
      "family": "Mehmet Kaynak"
    }, 
    {
      "family": "David Cordeau"
    }, 
    {
      "family": "Arnaud POTHIER"
    }
  ], 
  "issued": {
    "date-parts": [
      [
        2020, 
        8, 
        4
      ]
    ]
  }, 
  "abstract": "<p>This paper presents the design and the implementation of an ultra-sensitive capacitive sensor based on an injection-locked oscillator architecture able to achieve ppm sensing resolution. The proposed RF IC chip, implemented on a BiCMOS SiGe 0.25 &mu;m technology, is able to detect capacitance changes in the range of few attoF, induced by dielectric disturbance occurring on on-chip integrated sensing capacitors. Indeed, this paper demonstrates that, once locked on a 4.693 GHz and -50 dBm injection signal, the proposed sensing system can efficiently detect differences of free running frequencies as low as 10 kHz between two oscillators. Considering a differential measurement approach with two injection locked oscillators (one used as a sensor, the other as a reference), a 3 attoF difference between both LC tank sensing capacitors might be detectable. This results, in the present case, in a 5 ppm sensing sensitivity.</p>", 
  "title": "SUMCASTEC_200804_Highly Sensitive Capacitive Sensor Based on Injection Locked Oscillators with ppm Sensing Resolution", 
  "type": "paper-conference", 
  "id": "4699691"
}
19
14
views
downloads
Views 19
Downloads 14
Data volume 14.2 MB
Unique views 14
Unique downloads 14

Share

Cite as