Published February 2, 2021
| Version 1.0.0
Dataset
Open
Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe (Data)
Creators
- 1. TU Braunschweig, Institute of Semiconductor Technology (IHT)
Description
Raw data, Ansys Workbench Projects and figures used for the article "Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe", published in the proceedings of SMSI 2020, which did not take place because of Covid-19 virus pandemic.
The data can be opened by a text editor
Ansys projects are compressed using 7-Zip and can be opened by Ansys Workbench.
Notes
This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.
Files
Data.zip
Files
(7.7 MB)
| Name | Size | Download all |
|---|---|---|
|
md5:b70bd09a8fdef9ec97119bde4f59b64e
|
7.7 MB | Preview Download |
Additional details
Related works
- Is supplement to
- Conference paper: 10.5162/SMSI2020/A6.3 (DOI)