Published February 2, 2021 | Version 1.0.0
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Entwicklung eines taktilen Mikrotaster-Messsystems für Hochgeschwindigkeitsmessung von Form, Rauheit und mechanischen Eigenschaften (Data)

  • 1. TU Braunschweig, Institute of Semiconductor Technology (IHT)

Description

Raw data, scripts and figures used for the article "Entwicklung eines taktilen Mikrotaster-Messsystems für Hochgeschwindigkeitsmessung von Form, Rauheit und mechanischen Eigenschaften", published in the proceedings of 20. GMA/ITG-Fachtagung Sensoren und Messsysteme 2019; 2019-06-25 - 2019-06-26; Nürnberg, Germany.

The data/scripts can be opened/executed by the software "Matlab"

Notes

This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.

Files

Data.zip

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Additional details

Related works

Is supplement to
Conference paper: 10.5162/sensoren2019/P2.10 (DOI)