Journal article Open Access

Modification of an SiO2(Au)/Si Surface by Irradiation with Argon Ions

V. D. Bundyukova; D. V. Yakimchuk; E. Yu. Kaniukov; D. I. Tishkevich; M. D. Kutuzau; V. V. Prigodich; A. A. Shemukhin; Yu. V. Balakshin; A. V. Nazarov; A. V. Kozhemiako; A. P. Evseev; A. E. Ieshkin


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@misc{v_d_bundyukova_2020_4280772,
  author       = {V. D. Bundyukova and
                  D. V. Yakimchuk and
                  E. Yu. Kaniukov and
                  D. I. Tishkevich and
                  M. D. Kutuzau and
                  V. V. Prigodich and
                  A. A. Shemukhin and
                  Yu. V. Balakshin and
                  A. V. Nazarov and
                  A. V. Kozhemiako and
                  A. P. Evseev and
                  A. E. Ieshkin},
  title        = {{Modification of an SiO2(Au)/Si Surface by 
                   Irradiation with Argon Ions}},
  month        = oct,
  year         = 2020,
  publisher    = {Zenodo},
  version      = {Author Accepted Manuscript (English version)},
  doi          = {10.5281/zenodo.4280772},
  url          = {https://doi.org/10.5281/zenodo.4280772}
}
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