@misc{le_quang_2020_4275929, author = {Le Quang, Toai and Vasyukov, Denis and Hoffmann, Johannes and Buchter, Arne and Zeier, Markus}, title = {{Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy}}, month = nov, year = 2020, publisher = {Zenodo}, doi = {10.1109/NANO46743.2019.8993943}, url = {https://doi.org/10.1109/NANO46743.2019.8993943} }