10.1109/NANO46743.2019.8993943
https://zenodo.org/records/4275929
oai:zenodo.org:4275929
Le Quang, Toai
Toai
Le Quang
0000-0002-6209-9099
Federal Institute of Metrology
Vasyukov, Denis
Denis
Vasyukov
Federal Institute of Metrology
Hoffmann, Johannes
Johannes
Hoffmann
Federal Institute of Metrology
Buchter, Arne
Arne
Buchter
Federal Institute of Metrology
Zeier, Markus
Markus
Zeier
Federal Institute of Metrology
Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy
Zenodo
2020
Scanning microwave microscope
Microwave impedance microscope
impedance standard
Nanoscale electrical measurement
Calibration algorithm
2020-02-13
Creative Commons Attribution 4.0 International
This article presents our results in fabrication and measurement of inductive devices for scanning microwave microscopy (SMM). Devices with resistance and inductance varying between 9\,$\Omega$-220\,$\Omega$ and up to 200\,pH were produced on SiN membrane using using clean room processes. Then, by combining actual SMM measurements performed for these devices and their simulation, we were able to test a calibration method which employs three known standards.