4118056
doi
10.5281/zenodo.4118056
oai:zenodo.org:4118056
user-eu
Hönicke, Philipp
Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany
Vinson, Jon
National Institute of Standards and Technology (NIST), Gaithersburg, Maryland, USA
Quintanilha, Richard
ASML Netherlands B.V. (ASML), Netherlands
Saadeh, Qais
Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany
Heidenreich, Sebastian
Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany
Scholze, Frank
Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany
Soltwisch, Victor
Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany
The anisotropy in the optical constants of quartz crystals for soft X-rays
Andrle, Anna
Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany
url:http://arxiv.org/abs/2010.09436
info:eu-repo/semantics/openAccess
Creative Commons Attribution 4.0 International
https://creativecommons.org/licenses/by/4.0/legalcode
refractive index
SiO2 crystal
anisotropy
<p>The refractive index of a y-cut SiO2 crystal surface is reconstructed from polarization dependent soft X-ray reflectometry measurements in the energy range from 45 eV to 620 eV. In the datasets the 1-delta and beta values for the (100) and (001) direction of the SiO2 crystal for the different energies are provided.</p>
Zenodo
2020-10-22
info:eu-repo/semantics/other
4118055
user-eu
award_title=Technology Advances for Pilotline of Enhanced Semiconductors for 3nm; award_number=783247; award_identifiers_scheme=url; award_identifiers_identifier=https://cordis.europa.eu/projects/783247; funder_id=00k4n6c32; funder_name=European Commission;
1603412818.845969
30140
md5:7cee66545f5c6a81a1c39f9baff6204d
https://zenodo.org/records/4118056/files/delta_beta_SiO2_001.txt
30110
md5:a38544e555454673ff5cb1b4398765d3
https://zenodo.org/records/4118056/files/delta_beta_SiO2_100.txt
public
http://arxiv.org/abs/2010.09436
Is supplement to
url
10.5281/zenodo.4118055
isVersionOf
doi