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D1.1 - Inventory and preliminary assessment on availability of commercial solutions for nanoprocesses monitoring

Maria Paulis; Jose Ramon Leiza; Miren Aguirre; Edurne Gonzalez; Ron Peters; Christian Hill; Marko Simic; Nicola Pombo; Laurent Philippet; Heidy Ramirez; Roland Haas; Simona Neri


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@misc{maria_paulis_2020_4108910,
  author       = {Maria Paulis and
                  Jose Ramon Leiza and
                  Miren Aguirre and
                  Edurne Gonzalez and
                  Ron Peters and
                  Christian Hill and
                  Marko Simic and
                  Nicola Pombo and
                  Laurent Philippet and
                  Heidy Ramirez and
                  Roland Haas and
                  Simona Neri},
  title        = {{D1.1 - Inventory and preliminary assessment on 
                   availability of commercial solutions for
                   nanoprocesses monitoring}},
  month        = sep,
  year         = 2020,
  publisher    = {Zenodo},
  doi          = {10.5281/zenodo.4108910},
  url          = {https://doi.org/10.5281/zenodo.4108910}
}
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