Conference paper Open Access

Micro-transfer-printing for heterogeneous integration

Corbett, B.; Li, Z; Buehler, K.; Naumann, F.; Krieger, U.; Wicht, S.; Bower, C.A.


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    <subfield code="a">&lt;p&gt;Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.&lt;/p&gt;</subfield>
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