Conference paper Open Access
Corbett, B.; Li, Z; Buehler, K.; Naumann, F.; Krieger, U.; Wicht, S.; Bower, C.A.
<?xml version='1.0' encoding='utf-8'?> <resource xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://datacite.org/schema/kernel-4" xsi:schemaLocation="http://datacite.org/schema/kernel-4 http://schema.datacite.org/meta/kernel-4.1/metadata.xsd"> <identifier identifierType="URL">https://zenodo.org/record/3662515</identifier> <creators> <creator> <creatorName>Corbett, B.</creatorName> <givenName>B.</givenName> <familyName>Corbett</familyName> <affiliation>Tyndall National Institute</affiliation> </creator> <creator> <creatorName>Li, Z</creatorName> <givenName>Z</givenName> <familyName>Li</familyName> <affiliation>Tyndall National Institute</affiliation> </creator> <creator> <creatorName>Buehler, K.</creatorName> <givenName>K.</givenName> <familyName>Buehler</familyName> <affiliation>Fraunhofer Institute for Microstructure of Materials and Systems</affiliation> </creator> <creator> <creatorName>Naumann, F.</creatorName> <givenName>F.</givenName> <familyName>Naumann</familyName> <affiliation>Fraunhofer Institute for Microstructure of Materials and Systems</affiliation> </creator> <creator> <creatorName>Krieger, U.</creatorName> <givenName>U.</givenName> <familyName>Krieger</familyName> <affiliation>X-FAB MEMS Foundry GmbH</affiliation> </creator> <creator> <creatorName>Wicht, S.</creatorName> <givenName>S.</givenName> <familyName>Wicht</familyName> <affiliation>X-FAB MEMS Foundry GmbH</affiliation> </creator> <creator> <creatorName>Bower, C.A.</creatorName> <givenName>C.A.</givenName> <familyName>Bower</familyName> <affiliation>X-Celeprint Inc</affiliation> </creator> </creators> <titles> <title>Micro-transfer-printing for heterogeneous integration</title> </titles> <publisher>Zenodo</publisher> <publicationYear>2020</publicationYear> <dates> <date dateType="Issued">2020-02-11</date> </dates> <language>en</language> <resourceType resourceTypeGeneral="Text">Conference paper</resourceType> <alternateIdentifiers> <alternateIdentifier alternateIdentifierType="url">https://zenodo.org/record/3662515</alternateIdentifier> </alternateIdentifiers> <relatedIdentifiers> <relatedIdentifier relatedIdentifierType="DOI" relationType="IsIdenticalTo">10.23919/LTB-3D.2019.8735381</relatedIdentifier> <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://zenodo.org/communities/microprince</relatedIdentifier> </relatedIdentifiers> <rightsList> <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights> <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights> </rightsList> <descriptions> <description descriptionType="Abstract"><p>Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.</p></description> </descriptions> <fundingReferences> <fundingReference> <funderName>European Commission</funderName> <funderIdentifier funderIdentifierType="Crossref Funder ID">10.13039/501100000780</funderIdentifier> <awardNumber awardURI="info:eu-repo/grantAgreement/EC/H2020/737465/">737465</awardNumber> <awardTitle>Pilot line for micro-transfer-printing of functional components on wafer level</awardTitle> </fundingReference> </fundingReferences> </resource>
Views | 91 |
Downloads | 90 |
Data volume | 9.8 MB |
Unique views | 86 |
Unique downloads | 84 |