Conference paper Open Access

Micro-transfer-printing for heterogeneous integration

Corbett, B.; Li, Z; Buehler, K.; Naumann, F.; Krieger, U.; Wicht, S.; Bower, C.A.


Citation Style Language JSON Export

{
  "DOI": "10.23919/LTB-3D.2019.8735381", 
  "language": "eng", 
  "title": "Micro-transfer-printing for heterogeneous integration", 
  "issued": {
    "date-parts": [
      [
        2020, 
        2, 
        11
      ]
    ]
  }, 
  "abstract": "<p>Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.</p>", 
  "author": [
    {
      "family": "Corbett, B."
    }, 
    {
      "family": "Li, Z"
    }, 
    {
      "family": "Buehler, K."
    }, 
    {
      "family": "Naumann, F."
    }, 
    {
      "family": "Krieger, U."
    }, 
    {
      "family": "Wicht, S."
    }, 
    {
      "family": "Bower, C.A."
    }
  ], 
  "id": "3662515", 
  "type": "paper-conference", 
  "event": "2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)"
}
92
92
views
downloads
Views 92
Downloads 92
Data volume 10.0 MB
Unique views 87
Unique downloads 86

Share

Cite as