Conference paper Open Access
Corbett, B.; Li, Z; Buehler, K.; Naumann, F.; Krieger, U.; Wicht, S.; Bower, C.A.
{ "DOI": "10.23919/LTB-3D.2019.8735381", "language": "eng", "title": "Micro-transfer-printing for heterogeneous integration", "issued": { "date-parts": [ [ 2020, 2, 11 ] ] }, "abstract": "<p>Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.</p>", "author": [ { "family": "Corbett, B." }, { "family": "Li, Z" }, { "family": "Buehler, K." }, { "family": "Naumann, F." }, { "family": "Krieger, U." }, { "family": "Wicht, S." }, { "family": "Bower, C.A." } ], "id": "3662515", "type": "paper-conference", "event": "2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)" }
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