Journal article Open Access

Origin of ferroelectric phase in undoped HfO2 films deposited by sputtering

T. Mittmann; M. Materano; P. D. Lomenzo; M. H. Park; I. Stolichnov; M. Cavalieri; C. Zhou; J. L. Jones; T. Szyjka; M. Müller; A. Kersch; T. Mikolajick; U. Schroeder

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  author       = {T. Mittmann and
                  M. Materano and
                  P. D. Lomenzo and
                  M. H. Park and
                  I. Stolichnov and
                  M. Cavalieri and
                  C. Zhou and
                  J. L. Jones and
                  T. Szyjka and
                  M. Müller and
                  A. Kersch and
                  T. Mikolajick and
                  U. Schroeder},
  title        = {{Origin of ferroelectric phase in undoped HfO2 
                   films deposited by sputtering}},
  month        = jun,
  year         = 2019,
  note         = {{T.S., M.M., I.S., and M.C. received funding from 
                   the European Union's Horizon 2020 research and
                   innovation program under grant agreement No.
                   780302 (project 3εFerro). M.H.P. was supported by
                   Humboldt postdoctoral fellowship from Alexander
                   von Humboldt Foundation and later by the Basic
                   Science Research Program through an NRF (National
                   Research Foundation of Korea) grant funded by the
                   Ministry of Education (NRF-2018R1C1B5086580).
                   P.D.L was funded by the German Ministry of
                   Economic Affairs and Energy (BMWi) project
                   (16IPCEI310). This work was performed in part at
                   the Analytical Instrumentation Facility (AIF) at
                   North Carolina State Univ., which was supported by
                   the State of North Carolina and the National
                   Science Foundation (Award No. ECCS-1542015). The
                   AIF is a member of the North Carolina Research
                   Triangle Nanotechnology Network (RTNN), a site in
                   the National Nanotechnology Coordinated
                   Infrastructure (NNCI). The authors thank Ilya
                   Karpov for helpful discussions on the topics of
                   oxygen vacancies and phase stability. The authors
                   also thank Robin Materlik and Christopher Künneth
                   for providing their simulation data and fruitful
  publisher    = {Zenodo},
  doi          = {10.5281/zenodo.3247678},
  url          = {}
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