Journal article Open Access

A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

Puurunen, Riikka L.


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@article{puurunen_riikka_l_2014_3228179,
  author       = {Puurunen, Riikka L.},
  title        = {{A Short History of Atomic Layer Deposition: Tuomo 
                   Suntola's Atomic Layer Epitaxy}},
  journal      = {Chemical Vapor Deposition},
  year         = 2014,
  volume       = 20,
  number       = {10-11-12},
  pages        = {332-344},
  month        = oct,
  doi          = {10.1002/cvde.201402012},
  url          = {https://doi.org/10.1002/cvde.201402012}
}
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