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MICRO-TRANSFER-PRINTING AND POTENTIAL PROCESS OPTIMIZATIONS BY FEA

Buehler, Kjell; Lorenz, Georg; Mittag, Marcel; Krieger, Uwe; Heise, Niclas; Wicht, Sebastian; Gerbach, Ronny; Naumann, Falk

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@misc{buehler_kjell_2019_2677551,
  author       = {Buehler, Kjell and
                  Lorenz, Georg and
                  Mittag, Marcel and
                  Krieger, Uwe and
                  Heise, Niclas and
                  Wicht, Sebastian and
                  Gerbach, Ronny and
                  Naumann, Falk},
  title        = {{MICRO-TRANSFER-PRINTING AND POTENTIAL PROCESS 
                   OPTIMIZATIONS BY FEA}},
  month        = mar,
  year         = 2019,
  publisher    = {Zenodo},
  doi          = {10.5281/zenodo.2677551},
  url          = {https://doi.org/10.5281/zenodo.2677551}
}
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Publication date:
March 24, 2019
DOI:
10.5281/zenodo.2677551

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Keyword(s):
Micro-Transfer-Printing micro-assembly technology
Grants:
European Commission:
  • MICROPRINCE - Pilot line for micro-transfer-printing of functional components on wafer level (737465)
Meeting:
International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE 2019), Hannover, Germany, 24-27 March 2019
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License (for files):
Creative Commons Attribution 4.0 International

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