Poster Open Access

Manufacturing Capability of Micro-Transfer Printing

Gomez, David; Moore, Tanya; Meitl, Matthew A.; Bonafede, Salvatore; Pearson, Andrew; Ghosal, Kanchan; Raymond, Brook; Radauscher, Erich; Kneeburg, David; Roe, Julia; Fecioru, Alin; Kelleher, Steven; Trindade, Antonio Jose; Bower, Christopher A.

Micro-Transfer printing is a mass transfer process that provides fast and precise assembly of micro-components onto non-native substrates. The process was originally conceived at the University of Illinois [1, 2], and has been developed at X-Celeprint. The process involves the fabrication of retrievable micro-components, elastomer stamp retrieval and transfer-printing of the micro-components to a non-native substrate and finally the interconnection [3]. With this process a large array of micro-components can be transferred at one time with an accuracy of +/- 1.5um 3 sigma and transfer yields exceeding 99%.

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