Poster Open Access
Manufacturing Capability of Micro-Transfer Printing
Gomez, David; Moore, Tanya; Meitl, Matthew A.; Bonafede, Salvatore; Pearson, Andrew; Ghosal, Kanchan; Raymond, Brook; Radauscher, Erich; Kneeburg, David; Roe, Julia; Fecioru, Alin; Kelleher, Steven; Trindade, Antonio Jose; Bower, Christopher A.
Micro-Transfer printing is a mass transfer process that provides fast and precise assembly of micro-components onto non-native substrates. The process was originally conceived at the University of Illinois [1, 2], and has been developed at X-Celeprint. The process involves the fabrication of retrievable micro-components, elastomer stamp retrieval and transfer-printing of the micro-components to a non-native substrate and finally the interconnection [3]. With this process a large array of micro-components can be transferred at one time with an accuracy of +/- 1.5um 3 sigma and transfer yields exceeding 99%.
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SSI19_Abstract-MICROPRINCE-XCEL.pdf
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SSI19_Poster-MICROPRINCE-XCEL.pdf
md5:8d92a3526b4eae321871712e67bcba7b |
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| Data volume | 30.5 MB | 30.5 MB |
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- Publication date:
- April 10, 2019
- DOI:
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- Grants:
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European Commission:
- MICROPRINCE - Pilot line for micro-transfer-printing of functional components on wafer level (737465)
- Meeting:
- Smart Systems Integration (SSI), Barcelona, 10-11 April 2019
- Related identifiers:
- Supplementary material
- Communities:
- License (for files):
- Creative Commons Attribution Non Commercial Share Alike 4.0 International