Journal article Open Access

MEMS MANUFACTURING AND RELIABILITY

Băjenescu, Titu-Marius I.


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    <subfield code="a">&lt;p&gt;Today flexibility means to produce reasonably priced customized products&amp;nbsp;of high quality that can be quickly delivered to customers. The article analyses issues&amp;nbsp;related to physic, able to generating defects, affecting the reliability limits for MEMS&amp;nbsp;(Micro-Electro-Mechanical Systems). The MEMS industry is currently at a much more&amp;nbsp;vulnerable position than it appears, regardless of how wonderful its future may look&amp;nbsp;like. A full understanding of the physics and statistics of the defect generation is&amp;nbsp;required to investigate the ultimate reliability limitations for nanodevices. Biggest&amp;nbsp;challenge: cost effective, high volume production.&lt;/p&gt;</subfield>
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