March 15, 2019 Journal article Open Access

Băjenescu, Titu-Marius I.

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{
  "inLanguage": {
    "alternateName": "eng", 
    "@type": "Language", 
    "name": "English"
  }, 
  "description": "<p>Today flexibility means to produce reasonably priced customized products&nbsp;of high quality that can be quickly delivered to customers. The article analyses issues&nbsp;related to physic, able to generating defects, affecting the reliability limits for MEMS&nbsp;(Micro-Electro-Mechanical Systems). The MEMS industry is currently at a much more&nbsp;vulnerable position than it appears, regardless of how wonderful its future may look&nbsp;like. A full understanding of the physics and statistics of the defect generation is&nbsp;required to investigate the ultimate reliability limitations for nanodevices. Biggest&nbsp;challenge: cost effective, high volume production.</p>", 
  "license": "https://creativecommons.org/licenses/by/4.0/legalcode", 
  "creator": [
    {
      "affiliation": "Swiss Technology Association, Electronics Group Switzerland", 
      "@type": "Person", 
      "name": "B\u0103jenescu, Titu-Marius I."
    }
  ], 
  "headline": "MEMS MANUFACTURING AND RELIABILITY", 
  "image": "https://zenodo.org/static/img/logos/zenodo-gradient-round.svg", 
  "datePublished": "2019-03-15", 
  "url": "https://zenodo.org/record/2640042", 
  "keywords": [
    "Process errors", 
    "MEMS", 
    "optical MEMS", 
    "failure analysis", 
    "MEMS switches", 
    "package cracking", 
    "failure mechanisms", 
    "reliability", 
    "creep", 
    "lifetime prediction"
  ], 
  "@context": "https://schema.org/", 
  "identifier": "https://doi.org/10.5281/zenodo.2640042", 
  "@id": "https://doi.org/10.5281/zenodo.2640042", 
  "@type": "ScholarlyArticle", 
  "name": "MEMS MANUFACTURING AND RELIABILITY"
}