March 15, 2019 Journal article Open Access

Băjenescu, Titu-Marius I.

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    "description": "<p>Today flexibility means to produce reasonably priced customized products&nbsp;of high quality that can be quickly delivered to customers. The article analyses issues&nbsp;related to physic, able to generating defects, affecting the reliability limits for MEMS&nbsp;(Micro-Electro-Mechanical Systems). The MEMS industry is currently at a much more&nbsp;vulnerable position than it appears, regardless of how wonderful its future may look&nbsp;like. A full understanding of the physics and statistics of the defect generation is&nbsp;required to investigate the ultimate reliability limitations for nanodevices. Biggest&nbsp;challenge: cost effective, high volume production.</p>", 
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    "title": "MEMS MANUFACTURING AND RELIABILITY", 
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