Journal article Open Access

MEMS MANUFACTURING AND RELIABILITY

Băjenescu, Titu-Marius I.

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@article{bajenescu_titu_marius_i_2019_2640042,
  author       = {Băjenescu, Titu-Marius I.},
  title        = {MEMS MANUFACTURING AND RELIABILITY},
  journal      = {Journal of Engineering Science},
  year         = 2019,
  volume       = {XXVI (1)},
  pages        = {65-82},
  month        = mar,
  doi          = {10.5281/zenodo.2640042},
  url          = {https://doi.org/10.5281/zenodo.2640042}
}
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Publication date:
March 15, 2019
DOI:
10.5281/zenodo.2640042

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Keyword(s):
Process errors MEMS optical MEMS failure analysis MEMS switches package cracking failure mechanisms reliability creep lifetime prediction
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Journal of Engineering Science: XXVI (1) pp. 65-82.
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Creative Commons Attribution 4.0 International

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