March 15, 2019 Journal article Open Access

Băjenescu, Titu-Marius I.

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  <identifier identifierType="DOI">10.5281/zenodo.2640042</identifier>
  <creators>
    <creator>
      <creatorName>Băjenescu, Titu-Marius I.</creatorName>
      <givenName>Titu-Marius I.</givenName>
      <familyName>Băjenescu</familyName>
      <affiliation>Swiss Technology Association, Electronics Group Switzerland</affiliation>
    </creator>
  </creators>
  <titles>
    <title>MEMS MANUFACTURING AND RELIABILITY</title>
  </titles>
  <publisher>Zenodo</publisher>
  <publicationYear>2019</publicationYear>
  <subjects>
    <subject>Process errors</subject>
    <subject>MEMS</subject>
    <subject>optical MEMS</subject>
    <subject>failure analysis</subject>
    <subject>MEMS switches</subject>
    <subject>package cracking</subject>
    <subject>failure mechanisms</subject>
    <subject>reliability</subject>
    <subject>creep</subject>
    <subject>lifetime prediction</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2019-03-15</date>
  </dates>
  <language>en</language>
  <resourceType resourceTypeGeneral="JournalArticle"/>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://zenodo.org/record/2640042</alternateIdentifier>
  </alternateIdentifiers>
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    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsVersionOf">10.5281/zenodo.2640041</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://zenodo.org/communities/jes_utm</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="https://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;Today flexibility means to produce reasonably priced customized products&amp;nbsp;of high quality that can be quickly delivered to customers. The article analyses issues&amp;nbsp;related to physic, able to generating defects, affecting the reliability limits for MEMS&amp;nbsp;(Micro-Electro-Mechanical Systems). The MEMS industry is currently at a much more&amp;nbsp;vulnerable position than it appears, regardless of how wonderful its future may look&amp;nbsp;like. A full understanding of the physics and statistics of the defect generation is&amp;nbsp;required to investigate the ultimate reliability limitations for nanodevices. Biggest&amp;nbsp;challenge: cost effective, high volume production.&lt;/p&gt;</description>
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