March 15, 2019 Journal article Open Access

Băjenescu, Titu-Marius I.

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<?xml version='1.0' encoding='utf-8'?>
<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:adms="http://www.w3.org/ns/adms#" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dct="http://purl.org/dc/terms/" xmlns:dctype="http://purl.org/dc/dcmitype/" xmlns:dcat="http://www.w3.org/ns/dcat#" xmlns:duv="http://www.w3.org/ns/duv#" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:frapo="http://purl.org/cerif/frapo/" xmlns:geo="http://www.w3.org/2003/01/geo/wgs84_pos#" xmlns:gsp="http://www.opengis.net/ont/geosparql#" xmlns:locn="http://www.w3.org/ns/locn#" xmlns:org="http://www.w3.org/ns/org#" xmlns:owl="http://www.w3.org/2002/07/owl#" xmlns:prov="http://www.w3.org/ns/prov#" xmlns:rdfs="http://www.w3.org/2000/01/rdf-schema#" xmlns:schema="http://schema.org/" xmlns:skos="http://www.w3.org/2004/02/skos/core#" xmlns:vcard="http://www.w3.org/2006/vcard/ns#" xmlns:wdrs="http://www.w3.org/2007/05/powder-s#">
  <rdf:Description rdf:about="https://doi.org/10.5281/zenodo.2640042">
    <dct:identifier rdf:datatype="http://www.w3.org/2001/XMLSchema#anyURI">https://doi.org/10.5281/zenodo.2640042</dct:identifier>
    <foaf:page rdf:resource="https://doi.org/10.5281/zenodo.2640042"/>
    <dct:creator>
      <rdf:Description>
        <rdf:type rdf:resource="http://xmlns.com/foaf/0.1/Agent"/>
        <foaf:name>Băjenescu, Titu-Marius I.</foaf:name>
        <foaf:givenName>Titu-Marius I.</foaf:givenName>
        <foaf:familyName>Băjenescu</foaf:familyName>
        <org:memberOf>
          <foaf:Organization>
            <foaf:name>Swiss Technology Association, Electronics Group Switzerland</foaf:name>
          </foaf:Organization>
        </org:memberOf>
      </rdf:Description>
    </dct:creator>
    <dct:title>MEMS MANUFACTURING AND RELIABILITY</dct:title>
    <dct:publisher>
      <foaf:Agent>
        <foaf:name>Zenodo</foaf:name>
      </foaf:Agent>
    </dct:publisher>
    <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#gYear">2019</dct:issued>
    <dcat:keyword>Process errors</dcat:keyword>
    <dcat:keyword>MEMS</dcat:keyword>
    <dcat:keyword>optical MEMS</dcat:keyword>
    <dcat:keyword>failure analysis</dcat:keyword>
    <dcat:keyword>MEMS switches</dcat:keyword>
    <dcat:keyword>package cracking</dcat:keyword>
    <dcat:keyword>failure mechanisms</dcat:keyword>
    <dcat:keyword>reliability</dcat:keyword>
    <dcat:keyword>creep</dcat:keyword>
    <dcat:keyword>lifetime prediction</dcat:keyword>
    <dct:issued rdf:datatype="http://www.w3.org/2001/XMLSchema#date">2019-03-15</dct:issued>
    <dct:language rdf:resource="http://publications.europa.eu/resource/authority/language/ENG"/>
    <owl:sameAs rdf:resource="https://zenodo.org/record/2640042"/>
    <adms:identifier>
      <adms:Identifier>
        <skos:notation rdf:datatype="http://www.w3.org/2001/XMLSchema#anyURI">https://zenodo.org/record/2640042</skos:notation>
        <adms:schemeAgency>url</adms:schemeAgency>
      </adms:Identifier>
    </adms:identifier>
    <dct:isVersionOf rdf:resource="https://doi.org/10.5281/zenodo.2640041"/>
    <dct:isPartOf rdf:resource="https://zenodo.org/communities/jes_utm"/>
    <dct:description>&lt;p&gt;Today flexibility means to produce reasonably priced customized products&amp;nbsp;of high quality that can be quickly delivered to customers. The article analyses issues&amp;nbsp;related to physic, able to generating defects, affecting the reliability limits for MEMS&amp;nbsp;(Micro-Electro-Mechanical Systems). The MEMS industry is currently at a much more&amp;nbsp;vulnerable position than it appears, regardless of how wonderful its future may look&amp;nbsp;like. A full understanding of the physics and statistics of the defect generation is&amp;nbsp;required to investigate the ultimate reliability limitations for nanodevices. Biggest&amp;nbsp;challenge: cost effective, high volume production.&lt;/p&gt;</dct:description>
    <dct:accessRights rdf:resource="http://publications.europa.eu/resource/authority/access-right/PUBLIC"/>
    <dct:accessRights>
      <dct:RightsStatement rdf:about="info:eu-repo/semantics/openAccess">
        <rdfs:label>Open Access</rdfs:label>
      </dct:RightsStatement>
    </dct:accessRights>
    <dct:license rdf:resource="https://creativecommons.org/licenses/by/4.0/legalcode"/>
    <dcat:distribution>
      <dcat:Distribution>
        <dcat:accessURL rdf:resource="https://doi.org/10.5281/zenodo.2640042"/>
        <dcat:byteSize>1077878</dcat:byteSize>
        <dcat:downloadURL rdf:resource="https://zenodo.org/record/2640042/files/JES -2019-1_65-82.pdf"/>
        <dcat:mediaType>application/pdf</dcat:mediaType>
      </dcat:Distribution>
    </dcat:distribution>
  </rdf:Description>
</rdf:RDF>