Journal article Open Access

MEMS MANUFACTURING AND RELIABILITY

Băjenescu, Titu-Marius I.

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{
  "publisher": "Zenodo", 
  "DOI": "10.5281/zenodo.2640042", 
  "container_title": "Journal of Engineering Science", 
  "language": "eng", 
  "title": "MEMS MANUFACTURING AND RELIABILITY", 
  "issued": {
    "date-parts": [
      [
        2019, 
        3, 
        15
      ]
    ]
  }, 
  "abstract": "<p>Today flexibility means to produce reasonably priced customized products&nbsp;of high quality that can be quickly delivered to customers. The article analyses issues&nbsp;related to physic, able to generating defects, affecting the reliability limits for MEMS&nbsp;(Micro-Electro-Mechanical Systems). The MEMS industry is currently at a much more&nbsp;vulnerable position than it appears, regardless of how wonderful its future may look&nbsp;like. A full understanding of the physics and statistics of the defect generation is&nbsp;required to investigate the ultimate reliability limitations for nanodevices. Biggest&nbsp;challenge: cost effective, high volume production.</p>", 
  "author": [
    {
      "family": "B\u0103jenescu, Titu-Marius I."
    }
  ], 
  "page": "65-82", 
  "volume": "XXVI (1)", 
  "type": "article-journal", 
  "id": "2640042"
}
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Publication date:
March 15, 2019
DOI:
10.5281/zenodo.2640042

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Keyword(s):
Process errors MEMS optical MEMS failure analysis MEMS switches package cracking failure mechanisms reliability creep lifetime prediction
Published in:
Journal of Engineering Science: XXVI (1) pp. 65-82.
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License (for files):
Creative Commons Attribution 4.0 International

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