Dataset Open Access
Electron Bessel beam diffraction patterns, line scan of Si/SiGe multilayer
Giulio Guzzinati;
Wannes Ghielens;
Christoph Mahr;
Armand Béché;
Andreas Rosenauer;
Toon Calders;
Jo Verbeeck
Electron diffraction patterns taken with a conical illumination (electron Bessel beams) and can be used to measure strain.
The experimental diffraction patterns, in DM3 format, are included in the file experimental_data.7z while FEM strain simulations for the same sample are in the file reference_strain_experimental.csv
Simulated diffraction patterns are included in the file simulated_patterns.7z while the strain in the model used is in the file reference_strain_simulated_patterns.csv
The two python scripts attached allow the extraction of the strain, and rely on the code published at:
https://bitbucket.org/lutosensis/tem-thesis/
| Name | Size | |
|---|---|---|
|
experimental_data.7z
md5:48f9cec907f42b10da9775d973c25533 |
2.6 GB | Download |
|
main_experimental.py
md5:67087b8f1f195ec77e9b6f1b02cc5208 |
18.0 kB | Download |
|
main_simulations.py
md5:036525f272569990eec248cd0668e18d |
18.4 kB | Download |
|
reference_strain_experimental.csv
md5:2a6686f54befc3f3130c5167deeda6a0 |
63.8 kB | Download |
|
reference_strain_simulated_patterns.csv
md5:af2b80d921e65ff7561df93f0ecbc27c |
2.5 kB | Download |
|
simulated_patterns.7z
md5:507526696388dd43f30f43a5ddc2fa12 |
42.0 MB | Download |
Guzzinati et al. (2019), Electron Bessel beam diffraction for precise and accurate nanoscale strain mapping, Appl. Phys. Lett. 114, 243501
| All versions | This version | |
|---|---|---|
| Views | 684 | 684 |
| Downloads | 595 | 595 |
| Data volume | 292.2 GB | 292.2 GB |
| Unique views | 605 | 605 |
| Unique downloads | 381 | 381 |
- Publication date:
- February 15, 2019
- DOI:
-
- Related identifiers:
- Documented by
- Communities:
- License (for files):
- Creative Commons Attribution 4.0 International