Dataset Open Access

Electron Bessel beam diffraction patterns, line scan of Si/SiGe multilayer

Giulio Guzzinati; Wannes Ghielens; Christoph Mahr; Armand Béché; Andreas Rosenauer; Toon Calders; Jo Verbeeck

Electron diffraction patterns taken with a conical illumination (electron Bessel beams) and can be used to measure strain.

The experimental diffraction patterns, in DM3 format, are included in the file experimental_data.7z while FEM strain simulations for the same sample are in the file reference_strain_experimental.csv

Simulated diffraction patterns are included in the file simulated_patterns.7z while the strain in the model used is in the file reference_strain_simulated_patterns.csv

 

The two python scripts attached allow the extraction of the strain, and rely on the code published at:

https://bitbucket.org/lutosensis/tem-thesis/

 

Files (2.7 GB)
Name Size
experimental_data.7z
md5:48f9cec907f42b10da9775d973c25533
2.6 GB Download
main_experimental.py
md5:67087b8f1f195ec77e9b6f1b02cc5208
18.0 kB Download
main_simulations.py
md5:036525f272569990eec248cd0668e18d
18.4 kB Download
reference_strain_experimental.csv
md5:2a6686f54befc3f3130c5167deeda6a0
63.8 kB Download
reference_strain_simulated_patterns.csv
md5:af2b80d921e65ff7561df93f0ecbc27c
2.5 kB Download
simulated_patterns.7z
md5:507526696388dd43f30f43a5ddc2fa12
42.0 MB Download
  • Guzzinati et al. (2019), Electron Bessel beam diffraction for precise and accurate nanoscale strain mapping, Appl. Phys. Lett. 114, 243501

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