Published February 15, 2019
| Version v1
Dataset
Open
Electron Bessel beam diffraction patterns, line scan of Si/SiGe multilayer
Creators
- 1. EMAT, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium
- 2. Adrem Data Lab, University of Antwerp, Middelheimlaan 1, 2020 Antwerp, Belgium
- 3. Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, D-28359 Bremen, Germany
Description
Electron diffraction patterns taken with a conical illumination (electron Bessel beams) and can be used to measure strain.
The experimental diffraction patterns, in DM3 format, are included in the file experimental_data.7z while FEM strain simulations for the same sample are in the file reference_strain_experimental.csv
Simulated diffraction patterns are included in the file simulated_patterns.7z while the strain in the model used is in the file reference_strain_simulated_patterns.csv
The two python scripts attached allow the extraction of the strain, and rely on the code published at:
https://bitbucket.org/lutosensis/tem-thesis/
Files
reference_strain_experimental.csv
Files
(2.7 GB)
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Additional details
Related works
- Is documented by
- arXiv:1902.06979 (arXiv)
- 10.1063/1.5096245 (DOI)
References
- Guzzinati et al. (2019), Electron Bessel beam diffraction for precise and accurate nanoscale strain mapping, Appl. Phys. Lett. 114, 243501