Preprint Open Access

An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications

Campion, James; Glubokov, Oleksandr; Gomez, Adrían; Krivovitca, Aleksandr; Shah, Umer; Bolander, Lars; Li, Yinggang; Oberhammer, Joachim


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    <subfield code="a">&lt;p&gt;A very low-loss micromachined waveguide bandpass&amp;nbsp;filter for use in D-band (110&amp;ndash;170GHz) telecommunication applications&amp;nbsp;is presented. The 134&amp;ndash;146GHz filter is implemented&amp;nbsp;in a silicon micromachined technology which utilises a double&amp;nbsp;&lt;br&gt;
H-plane split, resulting in significantly lower insertion loss than&amp;nbsp;conventional micromachined waveguide devices. Custom splitblocks&lt;br&gt;
are designed and implemented to interface with the&amp;nbsp;micromachined component. Compact micromachined E-plane&amp;nbsp;bends connect the split-blocks and DUT. The measured insertion&amp;nbsp;loss per unit length of the waveguide technology (0:008&amp;ndash;0:016dB=mm) is the lowest reported to date for any micromachined&amp;nbsp;waveguide at D-band. The fabricated 6-pole filter, with&amp;nbsp;a bandwidth of 11:8GHz (8:4%), has a minimum insertion&amp;nbsp;loss of 0:41dB, averaging 0:5dB across its 1dB bandwidth,&amp;nbsp;making it the lowest-loss D-band filter reported to date in any&amp;nbsp;technology. Its return loss is better than 20dB across 85% of&amp;nbsp;the same bandwidth. The unloaded quality factor of a single&amp;nbsp;cavity resonator implemented in this technology is estimated to&amp;nbsp;be 1600.&lt;/p&gt;</subfield>
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